RGV100BL User Manual - Newport Corporation
Contents
1. Direction Motion Direction The incremental sensor consists of a optical scale and an encoder head When the carriages of the stage move the encoder head generates square signals in quadrature sent to pins 19 20 23 and 24 of the SUB D25 connector Pinouts Sub D connections for the RGV100BL rotation stage are given in the following tables Encoder Connector SUB D15M Identical connection at both sides of the cable Phase B Shield Ground Phase A 5 V N C N C Index Pulse N C Phase B N C Phase A N C N C Index Pulse N C DOO OO GO ONIS SD 010 JN OS OT R VIN N wm A gl D Newport 6 Experience Solutions RGV100BL High Speed Precision Rotation Stage Motor amp Limits Connector SUB D15F Connection at RGVIOOBL size N C Phase V Motor Mechanical Zero End of Run Ground N C N C N C Phase W Motor Phase U Motor End of Run N C N C N C N C 00000000 Ge SONG CE m mi mem NS IG A D D D w m oa SUB D9M Connector of the Motor amp Limits Cable Connection at controller size Phase U Motor N C Phase V Motor N C N C Phase W Motor N C Ground N C Cie Oi See SD MU DIU A VIN SUB D9F Connector of th2. EW Motor 5 1 UE92BL DC Motor Characteristics Motor winding resistance terminal to terminal Q 10 4 Motor winding inductance terminal to terminal H 0 00951 Motor constant or steepness MotorS N m W 0 0117 Motor thermal time constant MotorTauTH s 3 301 Thermal resistance MotorRTH CC W 1 8 Motor torque constant Kf N m A 0 426 5 2 Motor Bearings Device Characteristics Static friction torque Chriction jar N m 0 12 Viscous friction torque factor N m rad s Insignificant Inertia of RGV100BL rotating part Inertia kg m 0 00104 Max inertia of the load in the rotation axis kg m 0 031 5 3 Sensor Position lt Home Position Origin E A o A ee Mechanical E LL El A as Zero Ei Index Pulse i Index Pulse Ae i a i A eR A en mm i AQ Stage Travel Range Motion Direction gt Newport Experience Solutions EDH0227En1030 12 15 RGV100BL High Speed Precision Rotation Stage 5 4 5 5 EDH0227En1030 12 15 End of Run and Mechanical Zero are 5 V open collector type The Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source Feedback Signal Position 2 3 4 Direction Encoder Phase A 0 Encoder 7 Phase A A Encoder Phase B i Encoder N PhaseB
3. NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 6 ORIGINAL DECLARATION Done in Beaune La Rolande on 26 June 2015 Dominique DEVIDAL Quality Director v EDH0227En1030 12 15 RGV100BL High Speed Precision Rotation Stage Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark CE The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a
4. C BORED 45 11 5 4 HOLES M5 THD ON SOR 3 35 85 ON SQUARE 3 97 100 8 USABLE DEPTH 31 8 MODEL SHOWN RGV100BL DIMENSIONS IN INCHES AND MILLIMETERS D Newport Experience Solutions 1 5 EDH0227En1030 12 15 RGV100BL High Speed Precision Rotation Stage 9 0 Maintenance 9 1 9 2 EDH0227En1030 12 15 RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The RGV160BL stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The RGV160BL stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your RGV160BL stage to Newport s After Sales Service after every 2000 hours of use for lubrication If your stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior a
5. The direct drive technology of the RGV100BL eliminates the worm gear of traditional rotation stages The advantages are higher speeds superior reliability and enhanced position sensitivity Speed resolution and repeatability are increased by a factor of up to ten times compared to worm driven rotation stages of the same size A high efficiency brushless DC torque motor with rare earth magnets supplies an optimum ratio of torque per inertia for high acceleration with minimal stage heating At maximum continuous torque the temperature of the motor increases by only 30 C This is significantly less than with other stage designs and guarantees high performance and high reliability for the most demanding applications Precision is ensured by a high resolution glass scale with 15 000 line pairs per revolution that directly measures the position of the rotating platen The flat encoder is mounted on a precision ground reference surface and is perfectly aligned with the stage s rotation axis to minimize position errors induced by eccentricity wobble or axial runout The encoder signals are interpolated by Newport s XPS motion controller with less than 0 1 arcsec resolution for outstanding position sensitivity and stability The RGV100BL features a proprietary 4 point contact ball bearing This unique 2 piece design takes the full benefit of Newport s excellent capabilities in the design manufacturing and assembly of precision mechanics and
6. aich sole High Speed Precision Rotation Stage ETS O j i OTS Compliant QO USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed RGV100BL High Speed Precision Rotation Stage Warranty S A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used K J EDH0227En1030 12 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from e Incorrect usage Load on the stage greater than
7. integrates multiple functions the bearing ways and the direct drive motor into a minimum number of parts The result is a more compact rotation stage with superior stiffness high reliability and outstanding wobble and eccentricity A 30 mm diameter through hole allows convenient routing of cables and vacuum lines through the stage A once per revolution index pulse permits precision homing to a unique home position The RGV100BL also features two limit switches that can be enabled or disabled by an external switch 2 1 Design Details Base Material Aluminum Bearings Large diameter steel ball bearings Motor High torque brushless DC motor with rare earth magnets Motor Initialization Using a patented process that avoids major motion during initialization and that does not require Hall effect sensors Motor Commutation Done by the XPS controller on encoder signals Feedback Glass scale encoder with 15 000 line pairs per revolution 1 Vpp 32768 fold signal subdivision when used with XPS controller Limit Switches Two optical limit switches at approx 168 disabled by external switch Origin Optical fixed at position 0 including mechanical zero signal Cable Length m 5 included NOTE RoHS This product complies with the RoHS directive Restriction of Hazardous Substances Compliant gt Newport EDH0227En1030 12 1 5 2 Experience Solutions RGV100BL High Speed Precision Rotation Stage EN Characteris
8. maximum specified load Carriage speed higher than specified speed Improper grounding Connectors must be properly secured When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads e Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings D Newport ii Experience Solutions RGV100BL High Speed Precision Rotation Stage Table of Contents Warranty iaiiaas ii EC Declaration Of Conor id v Definitions and Sym Dols i sicssieiiesies oacelaedisdieaeieneegcvedesatereneaniesvelava tata E vi E vii CaAUTIONS ii aida viii 1 0 Introduction 1 2 0 DESCPNHON na nee ion 2 2 1 Design Details viii i 2 3 0 Chiaracieristlos coordine 3 Sil D finitions iii seas 3 3 2 Mechanical SpeciticAtiOhs sssss sandrine 4 3 3 Load Characteristics and Stiffness o oonoccnncnnoonnooncnonccononanccnnnonancnnnnnnnos 4 3 4 Stage Weig
9. of the maximum torque that the motor can deliver C MOOK max Kt ZVscaling N m V2 Coa C priction np MOTO nax ScalingAcceleration rad s Inert Inert plat payload 13 EDH0227En1030 12 15 RGV100BL High Speed Precision Rotation Stage Here is an example for the XPS controller and the XPS DRV02 driver with Z 0 5 A V Vscaling 10V Kt 0 426 N m Arms and Inertpat 0 00104 kg m see chapter 5 0 Chriction yay 0 12 N m see chapter 5 0 Inertpayload 0 0200 kg m Crriction 0Nm app we calculate Cotor max 1 51 N m ScalingAcceleration 66 06 rad s 3785 22 s AccelerationLimit calculation Intermediate calculation of the maximum torque that the motor is susceptible to deliver DriverMaximumPeakCurrent Kt 11 NI Remark This 1 1 coefficient comes from a Newport 10 security margin in case of during transitional phases the instantaneous current delivered to the motor reach the maximum output driver current C MOON inn it N m In that case the Newport XPS DRV02 driver generate a security stop Es E oa C riction y Inert say AccelerationLimit rad s Inert payload Then following the same XPS and XPS DRV02 example as above with DriverMaximumPeakCurrent 3 11 A we calculate C motor ny 0 83 N m AccelerationLimit 33 75 rad s 1933 46 s QD Newport EDH0227En1030 12 15 1
10. which are about 2X better than the guaranteed values visit www newport com for the Motion Control Metrology Primer To obtain arcsec units divide urad value by 4 8 e CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 pm 3 3 Load Characteristics and Stiffness Cz Normal centered load capacity 100 N Ka Transversal compliance 15 urad Nm Mz Maximum torque 0 42 Nm O 0 s Jz Maximum Inertia 0 032 kg m Q Off center load N Q lt Cz 1 D 35 and O lt Jz Jq D2 Where D Cantilever distance mm Jq Inertia of payload CAUTION When a RGV100BL rotation stage is integrated in an assembly or in a system vibrating events due to the rotation of an off center load at a high speed must be taken into account These event amplitudes damage RGV100BL rotation stage specifications or damage assembly or system specifications 3 4 Stage Weight The stage weight below does not include the cables Weight Ib kg RGV100BL 4 8 2 6 5 meter encoder cable 0 84 0 38 5 meter motor cable 1 72 0 78 gt Newport EDH0227En1030 12 1 5 4 Experience Solutions RGV100BL High Speed Precision Rotation Stage 4 0 Drive The RGV100BL rotation stage is equipped with a DC motor and a glass optical disk Specifications Commandable Max Max Ambient Resolution Speed Temperature Motos C s CC RGV100BL 0 00001 720 35 UE92BL
11. 4 Experience Solutions RGV100BL High Speed Precision Rotation Stage E Dimensions 4 HOLES M4 THD ON SOR 1 89 48 4 HOLES M6 THD ON SOR 1 97 50 DEPTH 24 6 DEPTH 31 8 91 97 50 3 A DEPTH e 31 8 es 2 85 D ES 72 5 Cu g Wo ww O ES O gt Newport ar As I 2 56 a lt 65 2015 CAUTION SUB D15M CONNECTOR ai Mounting holes of the RGV100BL upper interface are i 078 d clearance holes Make sure that e fixing screw lengths of the driven load do not if Es i exceed the usable depth indicated on the mounting oi a holes 226 ale OSADO sl a FA MOTOR b umts il an e any object does not get into the internal mechanism nl Lu A A O o of the stage through these mounting holes y 3 La re f 36 9 25 this may damage the rotation stage SQR 4 53 re 115 gt SUB D15F CONNECTOR CAUTION To reach the specifications stated it is necessary to meet the following using conditions x e the flatness of the load mounting surface must be NY lt 10 pm e the RGV100BL rotation stage must be fixed on a plane surface with a flatness lt 10 pm 91180 030 9 4 HOLES M3 THD ON 91 38 35 ol USABLE DEPTH 24 6 e EX 7 4 HOLES 29 7 5
12. Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user gt Newport EDH0227En1030 12 15 vi Experience Solutions RGV100BL High Speed Precision Rotation Stage Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the s
13. Our RGV100BL rotation stage is delivered equipped with a set of two 5 meter cables It can be directly connected to our XPS controller WARNING The RGV100BL rotation stage operates only with 5 meter max cables WARNING These cables are shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable WARNING Keep the motor cable at a safe distance from other electrical cables in your environment to avoid potential cross talk D Newport Experience Solutions 9 EDH0227En1030 12 15 RGV100BL High Speed Precision Rotation Stage 6 4 Configuration To configure the XPS controller with the RGV100BL rotation stage please refer to the XPS user s manual IMPORTANT For optimum performance it is important to configure the XPS controller with the weight inertia on the RGV100BL rotation stage To do that please log in to the XPS controller as Administrator Go to the tab TUNING select the RGV100BL positioner Do the auto scaling which sets the ScalingAcceleration and AccelerationLimit in the stages ini file according to your payload inertia In case of auto scaling process failure you may set manually these values Please refer to chapter 7 2 7 0 Connection to Non Newport Electronics 7 1 Connections WARNING Newport is not responsible for malfunction or damage to a RGV160BL stage when it is used with non Newport controllers WARNING Newport guar
14. antees C compliance of the RGVIGOBL stage only if they are used with Newport cables and controllers Nevertheless the figure below shows the wiring when a RGV160BL stage is used with non Newport controllers SUB D15M SUB D 15F RGV100BL Connector Connector SUB D15M 3 i 1 3 Encoder Phase A 1 i 111 Encoder Phase A amp 15 i 1 Encoder Phase B a 9 i 9 Encoder Phase B O 14 E 1 14 Index Pulse 2 7 17 Index Pulse l wi 4 1 4 5V 2 7 1 2 Ground Connector 22 3 i EEEE ane aes ee Connector Cap Cap SUB D9M SUB D 15M RGV100BL Connector Connector SUB D15F 1 Ea 1 10 Phase U Motor 2i 7 12 Phase V Motor n 9 pa 9 Phase W Motor 5 i F 1 5 Ground Y Connector 2 2222 They tees ee Aon Ghee ee en eee Connector w Cap i Cap x e SUB D9F Connector 15 111 End of Run 2 1 4 End of Run 3 1 3 Mechanical Zero Connector _____________ Cap D Newport EDH0227En1030 12 15 10 Experience Solutions RGV100BL High Speed Precision Rotation Stage 7 2 Configuration The installation of a direct drive acceleration driven stage is a two steps process Driver configuration Controller configuration 7 2 1 Driver Configuration The two driver parameters to configure are e The maximum average RMS driver current DriverMaximumRMSCurrent gt maximum average RMS amount of current that the driver can deliv er to the motor WARNING This funct
15. as ele Pes ese 17 D Newport iv Experience Solutions RGV100BL High Speed Precision Rotation Stage EC Declaration of Conformity VADA DA DA PSO Go ONG A Ie 4 NS SS eS 6S SS CS SS ES PAS ES OND a AS OS Se OS AS Ie ONG x NACO LN ENS gt Newport Experience Solutions COL Ge a SOA SOP SOP SO SO RGV100BL EC Declaration of Conformity following Annex IT 1A of Directive 2006 42 EC on machinery The manufacturer MICRO CONTROLE Spectra Physics 9 rue du bois sauvage F 91055 Evry FRANCE Hereby declares that the machinery Description RGV 100BL Function High Speed Precision Rotation Stage Models RGV100BL the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility was designed and built in accordance with the following harmonised standards e NF EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements e NF EN 55011 2010 A1 2011 Class A was designed and built in accordance with the following other standards
16. cement of the geometric center of a rotation stage from the rotation axis in the plane defined by bearings Wobble Tilt of rotation axis during rotation of a stage measured on a reference surface The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 C A linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 164 points D Newport Experience Solutions 3 EDH0227En1030 12 15 RGV100BL High Speed Precision Rotation Stage Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or at www newport com 3 2 Mechanical Specifications Travel Range 360 continuous Minimum Incremental Motion 0 00011 Uni directional Repeatability 0 0003 Bi directional Repeatability 0 0011 or 0 00055 Absolute Accuracy 0 01 or 0 005 Maximum Speed no load s 720 Maximum Acceleration s2 1000 Inertia no load kg m 0 00104 Wobble 2 urad 20 10 Eccentricity um 3415 MTBF h 20 000 with 5 kg load 720 s speed and a duty cycle of 30 Travel Range mm Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the definition of typical specifications
17. e Motor amp Limits Cable Connection at controller size End of Run End of Run Mechanical Zero N C N C N C N C N C N C OOOO Ss Ore ere Ol ON SOS JN S Ww D D Newport Experience Solutions 7 EDH0227En1030 12 15 RGV100BL High Speed Precision Rotation Stage 6 0 Connection to Newport Controllers 6 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances e If the power cord or any attached cables are frayed or damaged in any way e If the power plug is damaged in any way e If the unit is exposed to rain excessive moisture or liquids are spilled on the unit e If the unit has been dropped or the case is damaged e If you suspect service or repair is required e Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to e Keep all air vents free of dirt and dust e Keep all liquids away from the unit e Do not expose the unit to excessive moisture 85 humidity e Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity
18. e that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year D Newport EDH0227En1030 12 15 viii Experience Solutions RGV100BL High Speed Precision Rotation Stage High Speed Precision Rotation Stage RGV100BL 1 0 Introduction This manual provides operating instructions for the RGV100BL high speed precision rotation stage RGVIOOBL precision rotation stage RECOMMENDATION We recommend you read carefully the chapter Connection to electronics before using the RGV160BL rotation stage GO Newport Experience Solutions 1 EDH0227En1030 12 15 RGV100BL High Speed Precision Rotation Stage EN Description The RGV100BL is a very compact direct drive rotation stage that provides ultra fast rotation with very high resolution and outstanding positioning performance Applications include semiconductor wafer inspection micro robotics and precision metrology
19. erMaximumPeakCurrent Calculation First intermediate calculation MaxinstCurrent 2 x DriverMaximumRMSCurrent Remark This coefficient 2 was determined by Newport with regards to the optimum acceleration profiles used for Motion Control This coefficient allows delivering an instantaneous current to the motor in order to obtain in parallel an high short term acceleration and a high long term acceleration with respect to the thermal elevation constraint In case of exceeding the XPS DRV02 driver generate a security stop Second intermediate calculation DriverMaximumPeakCurrent 1 1 x MaxInstCurrent Remark This 1 1 coefficient comes from a Newport 10 security margin in case of during transitional phases the instantaneous current delivered to the motor reach the maximum output driver current In that case the Newport XPS DRV02 driver generate a security stop Then DriverMaximumPeakCurrent 2 2 x DriverMaximumRMSCurrent A Knowing the average RMS force that you need to apply you can verify the balance between this need and the maximum average RMS current then maximum instantaneous current that your driver is capable to deliver IMPORTANT Systematically verify DriverMaximumPeakCurrent lt DriverMaxOutputCurrent Then following the same example as above we calculate DriverMaximumPeakCurrent 3 04 A gt Newport EDH0227En1030 12 15 12 Experience Solutions RGV100BL High Speed Precis
20. ht E a inner enr 4 40 Drive iii anaes 5 30 MO ini eue a dre 5 5 1 UE92BL DC Motor Characteristics ooooooconocnonnnonocncoonconocnnoonco nono nonnnonnnoos 5 5 2 Motor Bearings Device Characteristics 0 cccceseeesseceeseneeeeeneeneeneees 5 5d DENSOL POSITION iia 5 5 4 Feedback Signal Position sessesssssssesessesessessssessesessesessessssessesessesessessssese 6 DD RN 6 Encoder Connector SUB D15M 6 Motor amp Limits Connector SUB D15F oooconicccccccccnononnconnooncnnconnonnconnnnos 7 SUB D9M Connector of the Motor amp Limits Cable 7 SUB D9F Connector of the Motor amp Limits Cable oonnooniccnnccnnnnnnnnmm 7 6 0 Connection to Newport Controlleys 8 6 1 Warnings on Controllers resina ii 8 62 COMMECHON esanean ian cti a EEE 9 6 3 Cables orninn AE EA ESTEE EE 9 6 4 CONTISULSA ON comicios ane ousted Hae ATA EAN E EEEE 10 D Newport Experience Solutions iii EDH0227En1030 12 15 RGV100BL High Speed Precision Rotation Stage EDH0227En1030 12 15 7 0 Connection to Non Newport Electronics 10 1 1 CONMMECHONS sssini E E ETEN EN T T doar Nein 10 1 2 Configuration 11 Driver Configuration sees cinta tail escanea 11 Controller Configuration at 13 8 0 Dimensions 15 9 0 Maintenance 16 91 Maintenance sisi ln ira tie 16 92 ONE 16 93 CANIDTALION a er ne hits line ire le an 16 A mr RU t
21. ion Rotation Stage 7 2 2 gt Newport Experience Solutions Controller Configuration The two controller parameters to configure are e The full scale acceleration ScalingAcceleration gt theoretical acceleration corresponding to the full scale controller command e The maximum authorized acceleration AccelarationLimit gt maximum acceleration authorized by the controller WARNING The AccelarationLimit functionality does not exist on every driver in the marketplace Driver data e Transimpedance Z A V e The maximum instantaneous driver current DriverMaximumPeakCurrent A Remark In case of use Newport XPS DRV02 driver Z 5 10 A V To know DriverMaximumPeakCurrent please refer to the stages ini XPS file Controller data e Full scale of the command Vscaling V Remark In the case of use Newport XPS controller Vscaling 10 V Motor data e Motor force torque constant Kt N m A ms Stage data e Moving inertia at no payload Inertpiat kg m e Static friction C N m friction pray Remark For our stage RGV100BL the viscous friction is negligible compared to the static friction Application data e Payload Inert ayloaa Kg M e Static friction Coico N m Remark We to not consider viscous friction for that configuration process In case of viscous friction can t be neglicted please contact Newport for support ScalingAcceleration calculation Intermediate calculation
22. ionality does not exist on every driver in the marketplace e The maximum instantaneous driver current DriverMaximumPeakCurrent gt maximum instantaneous amount of current that the driver can deliv er to the motor IMPORTANT The stage RGV100BL is designed for a maximum motor winding temperature elevation of 30 C It is mandatory to respect this limit for fear to downgrade the performances or to damage the stage Motor data e Motor constant or Steepness MotorS N m W e Motor torque constant Kt N m A ms e Motor thermal resistance MotorRTH K W e Motor thermal time constant MotorTauTH s Driver data e Maximum driver output current DriverMaxOutputCurrent Intermediate calculation e Maximum value of the average RMS torque at 30 C temperature elevation 30 x MotorS ae N rus 30 MotorRTH x 1 0 004 x 30 dis DriverMaximumRMSCurrent calculation DriverMaximumRMSCurrent Crus A t IMPORTANT For the RMS averaging process on the driver current you must use a time constant inferior or equal to the motor thermal time constant MotorTauTH D Newport Experience Solutions 1 1 EDH0227En1030 12 15 RGV100BL High Speed Precision Rotation Stage Here is an example for a 30 C temperature elevation with see chapter 5 0 Motors 0 0117 N m W MotorRTH 1 8 C W Kt 0 426 N m Arms we calculate Crms 30 0 417 N m DriverMaximumRMSCurrent 1 38 A Driv
23. of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts gt Newport EDH0227En 1030 12 15 8 Experience Solutions RGV100BL High Speed Precision Rotation Stage 6 2 Connection On each stage is represented a label which indicates its name and its serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE These stages are ESP compatible Enhanced System Performance is ESP Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion COMPATIBLE system quickly and safely 6 3 Cables
24. tage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit D Newport Eserco Suns vii EDH0227En1030 12 15 RGV100BL High Speed Precision Rotation Stage Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock e Operating temperature 10 to 35 C e Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sur
25. tics 3 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of position uncertainty which depends on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Eccentricity Displa
26. uthorization will void your warranty Calibration CAUTION It is recommended to return your RGV160BL stage to Newport once a year for recalibration to its original specifications D Newport 1 6 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems D Newport Experience Solutions 1 T EDH0227En1030 12 15 Newport Experience Solutions Visit Newport Online at WWw newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
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