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IONIZATION SOLUTIONS Digital AeroBar®

1. An ITW Company Digital AeroBar lonization System Model 5225 Model 5200 IM6T V1 X User s Manual SNOILN TOS NOILVZINOI About Simco lon Simco lon develops manufactures and markets system solutions to manage electrostatic charge As the world s largest provider of electrostatics management products and services Simco lon improves its customers business results by providing a total solution to their electrostatic discharge and electromagnetic interference challenges Simco lon is a division of Illinois Tool Works ITW with its Technology Group located in Alameda California For more information about Simco lon visit www simco ion com or call 800 367 2452 Simco lon is ISO 9001 and ANSI ESD S20 20 certified 2012 Simco lon E SN NU Important Safety Information Carefully read the following safety information before installing or operating the equipment Failure to follow these safety warnings could result in damage to your ionization system and or voiding the product warranty Use proper input voltage to avoid damaging the unit Verify that power to the controller and or emitter is turned off before connecting or removing emitters or cables Failure to do so may result in damage to the equipment Never power down an emitter by removing the cables as this can result in damage to the ionizer Do not clean emitter points while unit is powered Doing so may result in additional contamina
2. Figure 14 Eroded and Dirty Silicon Emitter Point Tip Emitter Point Inspection Emitter point maintenance ensures continued optimum performance Dirty or eroded points may cause system failure and diminished ionization output Dirt or erosion to emitter points can be caused by a number of environmental factors including AMC It is 57 important to create an inspection schedule for emitter points Schedules will vary depending on your environment Inspect emitter points for white fuzz or buildup on the tips or tips that are blackened or broken Clean any buildup following the procedures described below Emitter Point Cleaning Recommended Cleaning Materials Cleanroom compatible cloth swabs polyester cloth is recommended e Cleaning solution of 50 IPA electronic grade isopropyl alcohol 50 de ionized water or Simco lon Emitter Point Cleaner Simco lon part number 22 1000 Do not clean emitter points while the unit is powered Doing so may result in additional contamination and possible shock After powering down the AeroBar allow a minute for the high voltage power supplies to discharge Caution Reinigen Sie keinesfalls Emitter Punkte bei eingeschaltetem Gerat Andernfalls kann es zu zusatzlicher Verunreinigung Achtung oder zu Stromschlag kommen Warten Sie nach dem Ausschalten des Aerobars eine Minute damit sich die Hochspannungs Netzteile entladen konnen To clean the emitter points and areas arou
3. 1 Select the ionizer s either by checking the Fam Select boxes or clicking one or more 150 11 0 ionizer rows in the grid The selected ionizer will highlight in the grid 10 moz Change the value in the boxes under the 120 120 PosAlrm and NegAlrm columns 3 Click ni Apply Changes to accept BE fa Placing lonizers in Standby Mode About Standby Mode Standby mode is a convenient way to turn off high voltage to the ionizer without removing wires or accessing the Interface Module Standby mode is useful for maintenance periods where settings must be remembered Placing lonizers in Standby Mode 1 Select the ionizer s either by checking the Select boxes or by clicking one or more ionizer rows in the grid The selected ionizer will highlight in the grid Use the drop down box below the list of ionizers to change Run Status PosFdbk MegFdk Running OK 38 0 170 the mode from Running to 1 2 Funning OK 220 50 0 Standby 3 Running Neadlim 16 0 51 0 Click Apply Changes to accept B 3 5 Editing lonMonitor Options The following options may be adjusted and saved using the Options menu in lonMonitor Connection options Interface Module options Default ionizer settings The settings in these three menus are saved to a setup configuration file called IonMonitor cfg For more information about this configuration file including how to change the
4. Ultraclean Sleeved Silicon Emitter Points box of 10 Ultraclean Sleeved Silicon Emitter Points box of 15 Ultraclean Sleeved Silicon Emitter Points box of 20 Ultraclean Sleeved Silicon Emitter Points box of 25 Ultraclean Sleeved Silicon Emitter Points box of 30 Emitter Point Cleaner Box of 50 67 ings Draw imensiona 5 3 D Model 5225 Standard Lengths Va 1IVL3Q 33S 03 08 TOHLNOO SLNIOd H3LLIW3 o o ot O dAL NOILO3S SSOHO E 2 dVOON3 GAL LOT qaTwaviv 2 03134A 323H QN3S 8 HOIVOIONI Q31 SdAH V QBVO8 1081409 B3LLIW3 68 Model 5225 300 mm EFEM Application Lengths 91 SSCCS 49S SSCS 9 69 Interface Module Model 5200 IM6T rse vse Nd esca eros ov zt lt 70 Warranty amp Service Simco lon provides a limited warranty for the AeroBar Model 5225 Interface Module Model 5200 IM6T and lonMonitor software package New products manufactured or sold by Simco lon are guaranteed to be free from defects in material or workmanship for a period of two 2 years from date of initial shipment Simco lon liability under its new product warranty is limited to servicing evaluating repairing or replacing any unit returned to Simco lon that has not been subjected to misuse
5. In order for an independent computer to communicate with the AeroBar Model 5225 system for demonstrations or other remote setups you must configure the lonMonitor software for the Interface Module Model IM6T Communication setup involves Adjusting network settings on a computer e Adjusting network settings in the lonMonitor application e Adjusting network settings in the lonSimulator application Adjusting Network Settings on a Computer 1 On your PC open the Control Panel Br nemo nd pars CONEA usually under Settings Fle Edt Favortes Tools Ade Back gt gt gt 5 2 Open the Network and Dial up Connec Address 81 Network and Dial up Connections Name tions or Network Connections New Connection window Status 3 Right click on Local Area Connection and Create choriak click Properties D 4 Inthe Local Area Connection Properties or Windows Network Connection Prop erties window click on Internet Protocol TCP IP then click on the Properties button Connect using Install Uninstall Properties ontrol Protocol Intemet Protocol The default Wide twork protocol that provides communication ise interconnected networks Show icon in taskbar when connected OK Cancel 29 Once the Internet Protocol TCP IP Properties window opens change the General You
6. If the unit is in Pulse Mode the outer LEDs will alternate blinking If the unit is in Steady state Mode both outer LEDs will remain lit Reset the alarm by changing the feedback value to the original settings Then reset the output to the desired level 27 2 8 lonMonitor Software Installation Software Installation To install the software copy the file Simco lon Release 1 X X exe in any convenient directory and run it The default installation directory is C Program Files lonSoftware The installer will place a new folder in your Start menu named lonSoftware you can select a different name during the installation with shortcuts to lonMonitor exe lonSimulator TestlonAccess exe API web page documentation and the software manual If you only install partial components during the installation Note you can repeatthe installation to install additional components at a later time by re running the installation program Wenn Sie nur zum Teil Komponenten wahrend der Installation installieren k nnen Sie die Installation wiederholen um zu Hinweis einem sp teren Zeitpunkt zus tzliche Komponenten mit erneutem Ausf hren des Installationsprogramms einzubauen Uninstalling the Software To uninstall all components select the Uninstall Ion Software icon from the lon Software program group or run the Add Remove Programs option in the Windows Control Panel 28 2 9 Software Configuration
7. neglect lack of routine maintenance Simco lonrepair alteration or accident In no event is Simco lon be liable for collateral or consequential damages Consumable items such as but not exclusive to emitter points emitter wires batteries filters fuses or light bulbs are only covered under this warranty if found defective as received with the new product Simco lon is in compliance in all material respects with the terms and conditions of all material permits licenses and authorizations which are required under federal state and local laws applicable to Simco lon and relating to pollution or protection of the environment except where the failure to obtain such authorizations could not be reasonably expected to have a material adverse effect on the business of Simco lon or its customers Simco lon is not aware of 71 any conditions circumstances activities practices incidents or actions which could reasonably be expected to form the basis of any claim action suit proceeding hearing or investigation of by against or relating to Simco lon based on or related to the manufacture processing distribution use treatment storage disposal transport or handling or the emission discharge release or threatened release into the environment of any pollutant contaminant or hazardous or toxic substance material or waste or relating to the safety of employees workers or other persons other than such conditions circumstance
8. VDC before applying power to the unit Make sure ground to the Interface Module is a known ground Improper ground connection may cause malfunction or component failure and may void the warranty Warnung Unsachgem e Versorgungsspannung kann zu Besch digungen des Ger tes f hren Stellen Sie sicher dass das Interface Modul mit 24 VDC versorgt wird bevor das Ger t eingeschaltet wird Stellen Sie au erdem sicher dass das Interface Modul zuverl ssig ber Netz Erde geerdet ist Unsachgem e Erdung kann Fehlfunktion oder Besch digung verursachen und zum Verlust von Garantie Anspr chen f hren Mounting The Interface Module may be mounted using the screw holes on the bottom of the chassis or with self adhesive dual lock strips For safety considerations the mounting systems used for the Interface Module should be able to support approximately four times the weight of the Interface Module approximately 16 Ib 6 kg For mounting with self adhesive dual lock strips Use three to five self adhesive dual lock strips For mounting with screws The mounting location will determine the type of screw to be used If your installation is replacing an older system note any differences between the older controllers and the Interface Module chassis 2 4 Unit Connections Connecting AeroBars to the Interface Module Up to six AeroBars may be connected to the Interface Module using an RJ 11 plug style cable Ports 5 a
9. damage to the ionizer Niemals ein Aerobar durch Entfernen des RJ 11Kabel Achtung abschalten Nichtbeach tung kann zu Sch den am lonisator fuhren Turning off the Interface Module is as simple as turning off the power switch POWER omy CIRCUIT BREAKER INPUT POWER 24VDC fa COMM ALARM O POWER ON Figure 13 Interface Module Power Switch To place the AeroBar s in standby mode using the integrated software see the accompanying software manual 56 4 2 AeroBar Maintenance Primary maintenance for the AeroBar consists of periodic emitter point cleaning and replacement system calibration and exterior cleaning of the chassis As maintenance schedules will vary depending on conditions develop a schedule which meets the requirements for your application In general equipment should be checked on a monthly basis to ensure it is operating as originally set Emitter point cleaning is recommended every three to six months and replacement every 24 to 36 months or when damage or erosion is evident Calibration may be performed quarterly semiannually or annually depending on your application Always calibrate after cleaning since cleaning will throw off the calibration Where AeroBars are used in environments containing airborne molecular contaminates AMC emitter points should be cleaned every one to three months or wherever significant amounts of debris have accumulated on emitter tips
10. den am Ger t nur die Installation und Wartung durch wie sie in diesem Handbuch enthalten sind Das Interface Modul muss ber Netz Erde geerdet sein nicht ber den R ckleiter der 24 V Versorgung Unsachgem e Erdung kann eine Fehlfunktion oder Besch digung von Bauteilen hervorrufen 2 1 Installation Guidelines Keep in mind the following considerations when determining locations for the units Tool and mini environment requirements restrictions Access to controls Access to a regulated 24 VDC power supply within 10 feet 3m of the Interface Module Applicable SEMI standards Applicable National Electrical Code standards The least amount of distance for cables from the Interface Module to AeroBars Operating Environment Do not operate any component of the AeroBar lonization System in corrosive or explosive environments Operate the units in 60 95 F 16 35 C temperature 40 65 relative humidity non condensing GL 95 on on ezizzi da JO DUI SI XX p duis Janod 6229 16 80 SZZS 6229 16 Jegosav 6229 9220 52160 o nuos vesog Paandey 9900 ievod 231 O XX NGZZS L6 Jegoley 5225 0025 IAA 01 OVA 02 001 6225 16 segolov 6229 16 1egoJev SZZS OQA bz peuddns dojde senimejnueudinb3 pos io uoaets iD 10 d
11. products to Buyer does not convey any license express or implied and Buyer shall not manufacture modify reverse engineer duplicate otherwise copy or reproduce any of the products or any part thereof Simco lon will treat drawings specifications or data furnished by Buyer as confidential when identified as such in connection with this purchase Simco lon Software Restricted License The Simco lon products consist of certain proprietary hardware the Hardware and certain proprietary software the Software Simco lon hereby grants to Buyer or Buyer s end user a limited 73 non transferable without the right to distribute or sublicense non exclusive right and license to use the Software solely in conjunction with such Hardware during the term of this Agreement Buyer receives no title or ownership rights to such Software Except for the license granted in this Section K all right title and interest in the Software shall remain the exclusive property of Simco lon or its licensors This Agreement does not entitle Buyer to the receipt or use of or access to Software source code or any right to reproduce the Software or any related documentation and Buyer agrees that it shall not decompile disassemble compile or reverse engineer the Software or otherwise attempt to gain access to the Software source code except with sample applications and integration tools that are provided with source code to assist in customer integrat
12. settings in it see Appendix B Setting lonMonitor Options 45 3 6 Balance Adjustment and System Calibration Simco lon balance adjustment and calibration procedure is a regular part of installation and maintenance of the AeroBar and its components Adjustment for the AeroBar may be performed at initial installation during periodic checks of the entire system or anytime additional components are added to the system This section consists of the following information About Adjustment and Calibration Tool parameters that Affect lonization Performing the Adjustment Understanding lonization Modes Voltage Swing and Output and Decay Timing Troubleshooting Goals of Balance Adjustment and System Calibration Balanced high ion density arriving to the surfaces and wafers Similar positive and negative decay times Maximum decay in the amount of available time Moderate voltage swings Pulsed DC or voltage offset Steady state DC to eliminate the possibility of inducing voltage on the surfaces Recommended Equipment Charged Plate Monitor Model 280A Tripod optional Anemometer 46 About Adjustment and Calibration Environment variables and the physical properties of ions can lead to degraded ionization performance over time This leads to a greater risk of static or the presence of voltage on your sensitive product surface In order to ensure optimal ionization performance and therefore static charge neutralizatio
13. silicon emitter points 300 mm EFEM length 56 Model 5225 AeroBar with 12 ultraclean silicon emitter points 300 mm EFEM length 76 Model 5225 AeroBar with 16 ultraclean silicon emitter points 300 mm EFEM length IM6T Interface Module powered by 24 VDC supports up to six Model 5225 AeroBar ionizers does not support sensors Software package requires V1 x version of IM6T Quick Installation Guide for setting up network and or serial connections 66 between the Interface Module and computer Accessories 24 VDC hardware cable 33 1790 40 100 240 VAC to 24 VDC transformer 33 5200 Flat mounting clips 28 6255 4 inch polycarbonate mounting rods 93 1420 8 inch polycarbonate mounting rods 93 1421 12 inch polycarbonate mounting rods 93 1422 Emitter Point Cleaner 22 1000 2 5 meter 8 foot IEC power cable US plug 25 20660 2 5 meter 8 foot IEC power cable UK plug 25 20710 2 5 meter 8 foot IEC power cable German Schuko plug 25 20735 3 meter 10 foot IEC power cable US plug 25 0670 4 6 meter 15 foot IEC cable US plug 25 0680 3 meter 10 foot IEC cable No plug 25 0700 AeroBar Installation Kit 93 5200 AeroBar Developer s Kit Instruction Manual 19 5200IM6T SW IEC cables required only if AC transformer p n 33 5200 is purchased Replacement Emitter Points and Cleaner 22 0365 1 22 0365 10 22 0365 15 22 0365 20 22 0365 25 22 0365 30 22 1000 Ultraclean Sleeved Silicon Emitter Points box of 1
14. the sensitivity of the product to electrostatic related problems Choose values that meet the static charge protection needs of your environ ment for example the appropriate voltage swings range decreases for products more sensitive to electrostatic related problems and increases for less sensitive products 48 If possible set the AeroBar mode outputs and timing to any pre determined settings for your process tool If no settings are available use the following parameters for an optimization starting point 50 Positive and Negative Power 1 0 sec on times 0 2 sec off times 2 Setthe CPMin an appropriate location for obtaining measurements Remove the charge plate from the monitor refer to the charge plate monitor manual for instructions on removing the plate Simco lon P N 19 0280 M or 19 280A M For the AeroBar Model 5225 ideal locations include e Centralized in the mini environment chamber Next to a FOUP port Ona pre aligner Ona metrology module Ona buffer stations After placing the CPM in its location step away Standing too close to the CPM may interfere with airflow and ion movement Make sure all access doors are closed 3 Record the Airflow Use an anemometer to measure the airflow at the height of the CPM plate Record the air flow along with the CPM measurements obtained at each sample location Too high or low of an airflow rate will affect the true balance behavior of the ions The recommended ai
15. to a custom bracket See the Mounting section in this chapter 2 3 Interface Module Installation Once an AeroBar is installed and wiring is prepared install the Interface Module Model 5200 IM6T and connect it to the AeroBar Electrical Requirements Install the Interface Module within ten feet of a properly grounded DC power supply receptacle The power supply should provide 24 VDC 2 VDC minimum 1 0A Use of improper input voltage may result in damage to the unit Caution Verify that the Interface Module is receiving 24 VDC before applying power to the unit Anschluss an ungeeignete Versorgungsspannung kann zu Sch den am Ger t f hren Stellen Sie sicher dass das Interface Modul mit 24 VDC versorgt wird bevor das Ger t eingeschaltet wird Achtung Grounding Ensure that ground input to the Interface Module is aknown ground not common from 24 VDC If a known ground connection is not available at the connector input connect a 22 AWG or heavier gauge cable between the side screw on the IM6T Interface Module and known ground source as shown in Figure 3 Improper ground connection may cause malfunction or component failure INPUT POWER DC 24V IONIZER OR 5 15 ip li TE Figure 3 Known ground connection if none can be provided on connector input Warning Use of improper input voltage may result in damage to the unit Verify that the Interface Module is receiving 24
16. vary Click the Write configuration in the lonMonitor cfg button 31 ii Interface Module Defaut lonizer Settings Connection mode TCP IP C Serial Com port TCPAP hostname I LL lO jJ TCPAP IP address 192 168 0 111 Port number 10001 Mite configuration info in lonMonitor cfg OK Cancel Apply 19 5225 M 01 Rev 2 32 Operation 3 1 Getting Around in lonMonitor 3 2 Network Configuration 3 3 Logging In and Connecting 3 4 Configuring AeroBars 3 5 Editing lonMonitor Options 3 6 Balance Adjustment and System Calibration 33 3 1 Getting Around in lonMonitor The lonMonitor application provides a graphical user interface GUI for monitoring and configuring the AeroBar and Interface Module IonMonitor Configuration v1 0 2 File Edit Help Disconnect from Interface Modul j Refresh GUI Fully Now 3 Status PosFdbk NegFdbk PosOut Neg0u PosOn_ NegOn Poso Pos km NegAlm OpMode Select lalx Use Default lonizer Values 2005 10 24 11 23 05 Ionizer 5 2005 10 24 11 23 05 Ionizer S 2005 10 24 11 23 05 Ionizer 5 2005 10 24 11 23 05 Ionizer 5 2005 10 24 11 23 05 Ionizer 5 2005 10 24 11 23 05 Ionizer 5 2005 10 24 11 23 05 Ionizer 5 updated PosOn with value 33 updated PosOff with value ll updated PosOut with value 654 updated PosAlrm with value 31 updated NegOn with value 31 updated Neg0ff wi
17. 00 Fax 510 217 0484 CERTIFIED Toll free 800 367 2452 Sales services 510 217 0460 Tech support 510 217 0470 ioninfo simco ion com salesservices simco ion com techsupport simco ion com service simco ion com www simco ion com
18. 200 IM6T 24 VDC 1 0A 5 via CPC connector from tool or optional adapter 100 240 VAC Output Voltage 24 VAC to the ionizers Output Current Approximately 40 mA per AeroBar Comm Ports Ethernet RS 485 and RS 232 DB9 Input Voltage Device Ports Ports 1 6 can connect up to six AeroBars LED Indicators Green POWER Red ALARM reserved for future use Yellow COMMUNICATION Chassis Aluminum with epoxy polyester powder coat Operating Env 60 95 F 16 35 C 40 65 RH non condensing Dimensions 2 76W x 2 96H x 12 42L in 7 0W x 7 5H x 31 5L cm Weight 2 6 lb 1 2 kg Certifications RoHS Compliant lonMonitor Software lonMonitor exe lonSimulator exe lonAccess DLL Library TestlonAccess exe Software Developer s Kit Manual Microsoft Windows XP or 7 CD ROM drive available Ethernet port and IP address or RS 232 port Contents Requirements 65 5 2 Parts amp Accessories AeroBars 91 5225U 22R 91 5225U 28R 91 5225U 44R 91 5225U 64R 91 5225U 84R 91 5225U 36R 91 5225U 56R 91 5225U 76R 91 5200 IM6T V1 X 91 5200 SW V1 X 22 Model 5225 AeroBar with 5 ultraclean silicon emitter points 28 Model 5225 AeroBar with 7 ultraclean silicon emitter points 44 Model 5225 AeroBar with 9 ultraclean silicon emitter points 64 Model 5225 AeroBar with 13 ultraclean silicon emitter points 84 Model 5225 AeroBar with 17 ultraclean silicon emitter points 36 Model 5225 AeroBar with 8 ultraclean
19. Addresses These device addresses are handled by the IM6T The AeroBar s address should not be changed from its default address of 01 when the AeroBar is used with the IM6T Emitters are shipped with factory set addresses These instructions refer to changing the factory set address 1 Turn on the Remote Control while holding down any button A password prompt will appear Enter in the following password Esc Down Up Select Select Select Select Use the Up or Down button to scroll to the Address item Press Select Use the Up or Down button to change the address number while pointing the remote control directly at the middle LED on the emitter Stop at a desired address number The address is sent to the emitter immediately Press Esc to exit The Emitter address will appear as a two digit number followed by the Controller address in parentheses B2 Setting Pulsed DC Steady state DC or Standby Mode The factory default mode is set to pulsed DC mode at 1 0 second on 0 2 seconds off 1 Hold down any button while turning on the remote control A password prompt will appear 2 Enter the following password Esc Down Up Select Select Select Select 3 Use the Up or Down button to reach the OpMode item Press Select 4 Point the remote control directly at the LEDs on the Emitter and use the Up or Down button to select the operation mode Standby Pulsed or StdySDC Press Esc to exit Setting Timing
20. Circuit Breaker Turns the Interface Module on or off resets the circuit breaker in the event of a tripped breaker 8 Communication Indicators Alarm Comm and Power On The red Alarm LED is not in use at this time The yellow Comm LED indicates the Interface Module is communicating with either the host usually the process tool controller or connected AeroBars The green Power On LED indicates that the Interface Module is receiving power It will blink if the output voltage drops below 12 VAC 9 Ground Connection Provides additional ground 1 5 lonization System Software The AeroBar Model 5225 and Interface Module Model 5200 IM6T are monitored and controlled using a graphical user interface GUI lonMonitor lonMonitor may be installed directly on a tool controller or service engineer s laptop providing an integrated software controlled ionization system This software package includes a collection of DLLs dynamic link libraries and open source code for lonMonitor for developing a custom monitoring and control application in Visual Basic Visual C Visual C or any COM enabled development language For information about the developer s kit see the companion developer s kit manual Simco lon part number 19 5200IM6T SW Software Compatibility lonMonitor version 1 X works with the IMET Interface Module version 1 X and all Model 5225 AeroBars Simco lon also offers a later version of lonMonitor software ve
21. Monitor It does not cover the integrated sensor See Simco lon manual 19 5200 M xx for the version 3 0 X and later version products A Software Developer s Kit SDK manual is also available which contains detailed information about the open source code for developing your own custom interface Simco lon manual 19 5200IM6T SW 1 2 System Overview The AeroBar Model 5225 lonization System is specially designed for in tool applications and mini environments where tight integration with your system is a necessity The system is composed of The Digital AeroBar Model 5225 The Interface Module Model 5200 IM6T lonMonitor Simco lon pre compiled software routine or open source code examples The Interface Module Model 5200 IM6T powers the AeroBar System parameters are set and monitored using the lonMonitor interface A custom interface that is incorporated into tool programs may be created based on the provided open source code examples 1 3 AeroBar Model 5225 Simco lon Digital AeroBar Model 5225 is a high performance ionizer specially designed for in tool applications and mini environments with an aerodynamic design and cleanroom compatible materials Its high ion output provides fast neutralization of electric charge on wafers allowing charge to be reduced to comply with E 78 Levels and Il the recommended requirements for semiconductor manufacturers The following AeroBar lengths are rounded to the nearest whole num
22. The factory default is 1 0 second on 0 2 seconds off 1 Holding down any button while turning on the remote control A password prompt will appear Enter the following password Esc Down Up Select Select Select Select Use the Up or Down button to reach the desired PosOn PosOff NegOn or NegOff item Press Select Use the Up or Down button to change the timing parameter Press Esc to exit from the change action 85 B3 Setting Output Levels The factory default output level setting is 30 approximately 7 kV to 8 kV 1 Use the Upor Down button to reach the PosOut or NegOut item Press Select 2 Use the Up or Down button to adjust the output level accord ingly Press Esc to exit from the change action 86 B2 Setting Alarm Levels The default alarm percentage value is 25 of the output level For proper maintenance and performance alarm percentage should be set to 50 75 1 Hold down any button while turning on the remote control A password prompt will appear Enter the following password Esc Down Up Select Select Select Select Use the Up or Down button to reach the PosAlrm or NegAlrm item Press Select Point the Remote Control Model 5572 directly at the center Emitter LED and use the Up or Down button to change the alarm level 87 Notes Notes M SIMCO An ITW Company Technology Group 1750 North Loop Rd Ste 100 Alameda CA USA 94502 ISO 9001 Tel 510 217 06
23. afer and AeroBar is less than 12 inches 30 cm or when large metal objects are within 12 inches 30 cm of the AeroBar Voltage Swing and Output Voltage swing refers to the range of the CPM plate voltage between the positive and negative peak readings at sample locations The recommended typical voltage output range is 50 80 50 For Pulsed DC mode adjust the positive and negative output voltages so that the maximum swing values are within 20 volts of each other averaging a value as close to zero as possible The swings should not exceed 150 volts in either direction Keep the voltage swings below 100 volts if itis possible to meet the desired decay time at this output level For Steady state DC mode adjust the positive and negative output voltages so that the combined value of the positive and negative settings are as close to zero as possible and less than 20V Decay Timing Decay timing is a measure of the time in seconds that it takes to decay a charge of 1000V to 100V and 1000V to 100V The conductive plate is charged to the initial test voltage of 1000V and is allowed to discharge to 10 of the initial test voltage The time required for both polarities will be recorded In Pulsed DC mode if decay times are too slow and voltage swings are gt 100V increase the positive and negative offtimes in 0 1 second increments 51 Troubleshooting the Balancing Procedure 1 If decay times are too long check th
24. ajte ox Bunzauuos HED lid 21 00 8N 20 191 i DOA PE ek OVA OPE 001 par cns sueudinbersoriipe 4 T F 208095 BUA p DM fe rm ITS rag svod Tee Su ansi Butsn dojdej 0 uonoeuuoo BINPOM e epejul LONI 00ZS 16 1 didala 1 SUONdO uonoeuuo 19 002 WEIS S uoneziuo JegoJev 15 2 2 lonizer Installation Installation methods will vary as all process equipment has different requirements Use the following general guidelines Install AeroBars away from all moving components in the tool Place AeroBars directly in the airflow from HEPA filters for effective ionization discharge Make sure that there are no obstructions in the airflow between the AeroBar and the surfaces to be neutralized Ensure there is unobstructed airflow over emitter points Keep emitter points at least 4 inches 100 mm from grounded surfaces including tool frames skins and other modules Keep the AeroBars within a 12 36 inches 300 900 mm working distance from the wafers A bracket or hanging device may need to be constructed depending on your application You may use clips available from Simco lon to secure an AeroBar
25. al setting Adjusting On and Off times in lonMonitor It is important to set positive and negative on or offtimes in coordination with environmental readings you get during a balance adjustment See the Balance Adjustment section in this chapter 1 Select the ionizer s either by checking the Select boxes or by clicking one or more ionizer rows in the grid The selected ionizer will highlight in the grid 2 Change the value in the boxes under the sr an parna PosOn NegOn PosOff and NegOff columns 3 Click Apply Changes to accept iz N Setting Positive Negative Alarm Values About Positive Negative Alarm Values Normally alarm levels are automatically adjusted when the output levels are set The default alarm percentage value is 2596 which means the alarm levels are automatically adjusted to 2596 of the output level For proper maintenance and performance alarm percentage should be set to 50 75 Positive and negative alarm levels can also be changed individually without changing the output levels as long as the alarm levels are adjusted after the output levels have been set In addition note that changing the positive or negative output level will cause the corresponding alarm level to reset 43 Adjusting Alarm Values in lonMonitor It is important to set alarm values in coordination with environmental readings you get during a balance adjustment See the Balance Adjustment section in this chapter
26. and ontimes in 0 1 second increments maintaining balance until decay time improves or voltage swings become too high Maintain last beneficial setting Increase and offtimes in 0 1 second increments maintaining balance until performance stops improving Maintain last beneficial setting Increase voltage outputs in 0 1 increments maintaining balance until output reaches 90 If decay time is still too long switch to Pulsed DC mode and balance 53 19 5225 M 01 Rev 2 Maintenance 4 1 Maintenance Power Down 4 2 AeroBar Maintenance 4 3 Interface Module Maintenance 4 4 System Adjustment and Calibration Caution To avoid personal injury or damage to the equipment do not perform any maintenance other than that contained in these instructions There are no user serviceable parts inside the AeroBar or Interface Module Vorsicht Zur Vermeidung von Verletzungen oder Schaeden am Geraet duerfen keine Wartungsarbeiten ausgefuehrt werden sofern sie nicht in diesem Handbuch enthalten sind Es befinden sich keine Teile im AeroBar oder Interface Modul welche vom Benutzer gewartet werden koennen 55 4 1 Maintenance Power Down Before performing any maintenance the AeroBar must be powered down There are two ways to power down AeroBars turn off the Interface Module or place the AeroBar in standby mode Never power down an AeroBar by removing the RJ 11 cable Sabor as this can result in
27. and with prior authorization from Simco lon Simco lon may at its option recondition or replace the rejected material to meet Buyer s specifications within a reasonable time period after receipt Claims for shipping damage must be made with the carrier All products must be returned in the same packing conditions in which it left Simco lon manufacturing location s anti static rails and boxes adequately protected etc Buyer must pay return shipping Confidential Information All drawings diagrams specifications and other materials furnished by Simco lon and identified as confidential or information which the Buyer knows or has reason to know is confidential proprietary or trade secret information of Simco lon relating to the use and service of articles furnished hereunder and the information therein are proprietary to Simco lon Buyer may not reproduce or distribute such materials except to buyer s employees who may use the articles as part of their duties Customer agrees that it will take all reasonable measures to maintain the confidentiality of all confidential information in its possession or control which will in no event be less than the measures it uses to maintain the confidentiality of its own information of equal importance Accordingly Simco lon will be entitled to preliminary and permanent injunctive relief and other equitable relief for any breach of this warranty Buyer further acknowledges and agrees that the sale of
28. aneous connections should only be used for diagnostic purposes Simco lon recommends using one connection at a time Unpredicatable results may occur if both are used at once Ethernet Connection Connect a CAT 5 cable to the ETHERNET port on the Interface Module HANDHELD REMOTE ETHERNET INPUT Figure 7 CAT 5 Cable Connected to Ethernet Port If you are connecting to a hub or router use standard Ethernet cables If you are connecting directly to another computer such as a laptop a cross over Ethernet cable is required 23 RS 232 Connection Connect an RS 232 cable to the RS 232 port on the Interface Module Figure 8 RS 232 Cable Connected to RS 232 Port 19 5225 M 01 Rev 2 24 2 6 System Power Up Turn on the Interface Module and AeroBar with the rocker switch labeled POWER POWER dy CIRCUIT BREAKER INPUT POWER 24VDC ALARM O POWER ON Figure 9 Interface Module Power Switch The green POWER ON LED will light The yellow COMM LED will also light as communication occurs between any connected AeroBars and the Interface Module Do not connect or disconnect AeroBars to and from the Warning Interface Module while the Interface Module is powered Verbinden oder trennen Sie Aerobars nicht mit bzw vom Warnung Interface Modul w hrend das Interface Modul eingeschaltet ist 25 2 7 AlarmTest Testing the alarm ensures that all units are comm
29. at airflow is 70 90 fpm If airflow is too low and cannot be changed see the table Airflows Are Lower Than Tool Specification and Cannot Be Changed For Pulsed DC mode For Steady state DC mode If voltage swings are lt 100V adjust and Increase the positive and negative ontimes upward in 0 1 second increments voltage outputs maintaining a until decay time stops improving or voltage balance of 20V swings become too high Maintain last beneficial setting Do not set below 0 7 seconds or alarms will be defeated The normal range is 0 7 to 2 seconds If voltage swings are gt 100V adjust and off times upward in 1 second increments until decay time stops improving or voltage swings become too high Maintain last beneficial setting 2 If voltage swings are too high pulsed DC only If Voltage Outputs are gt 80 If Voltage Outputs are lt 50 Decrease voltage outputs in 0 1 Decrease positive or negative on or increments maintaining balance until offtimes in 0 1 increments maintaining swings are lt 100V or in desired range balance until swings are lt 100V or in desired range 52 If airflows are lower than tool specification and cannot be changed For Pulsed DC mode For Steady state mode Increase voltage outputs in 1 increments maintaining balance until swings reach 100 150V Do not exceed 90 output If decay times are still too long proceed to the next step Increase
30. ber For exact lengths see Chapter 4 Specifications The AeroBar Model 5225 is available in five standard lengths 22 inches 558 28 inches 711 1118 64 inches 1626 mm 84 inches 2134 mm 44 inches Three lengths are also available with optimized placement of emitter points over the FOUP openings for use in 300 mm EFEMs 36 inches 907 mm 56 inches 1412 mm 76 inches 1918 mm AeroBar Controls and Connectors AeroBaro Model 5225 Figure 1 AeroBar Model 5225 1 Modular Port A modular port on one end of the bar allows a RJ 11 connection to the Interface Module and provides 24 VAC to the bar 2 Emitter Points Emitters points are replaceable The number of points depend on the length of the bar 3 Positive and Negative Ion Output Indicators LEDs indicate high voltage HV ionization In Pulsed DC mode lights flash depending on which polarity has HV Lights are continuously on when in Steady State mode Both positive and negative ion indi cators and the Alarm LED flash once simultaneously during communication 4 Transmit and Receive LEDs LEDs communicate with an optional IR remote control See Appendix B 5 Alarm LED LED flashes when the AeroBar is in alarm or standby mode also flashes once during communication with the Interface Module 1 4 Interface Module Model 5200 IM6T The Interface Module Model 5200 IM6T powers up to six AeroBars The Interface Module featu
31. can get IP settings assigned automatically if your network supports ju need to ask your network administrator for this capability Otherwise option from Obtain an IP address auto P Obtain an P address automatically matically to Use the following IP Gut ini ie IP address address Subnet mask a Set the options under Use the following IP address and Use the following DNS server addresses to the following IP 192 168 0 100 If there are multiple computers being setup with static IPs use a free IP address e Subnet Mask 255 255 255 0 Click OK then OK or Close Reboot you computer to allow communication to reset Setting IP Addresses in the lonMonitor Application Now that you ve set the computer you need to set the software to correctly recognize the computer 1 2 Start the lonMonitor application Log in with the following configuration Fils Edit Help password 1414222 Click the Edit menu in the top menu bar t from and select Options Connection Mode If connecting using an Ethernet make sure the TCP IP radio button is checked If connecting via RS 232 serial connection check Serial Com Port Enter the serial com port number in the Port Number box i e com port 1will be entered as Port Number 1 30 Enter the IP address 192 168 0 111 This IP address is the factory default address of the Interface Module Your installation s IP address installation may
32. er 24V Versorgung Unsachgem e Erdung kann eine Fehlfunktion oder Besch digung von Bauteilen hervorrufen Contents do Descriplion ae leale 1 1 1 About this Manual ii 2 1 2 System OVES u E ciotola 3 1 3 AeroBar Model 5225 mr o rea ra eros 4 1 4 Interface Module Model 5200 1 6 6 1 5 lonization System 9 2 Installation io oec ies ida a 11 2 1 Installation 14 2 2 lonizer Installation i 16 2 3 Interface Module Installation 17 2 4 Unit Connections cit er ah dee cen RD hien de tr e o 20 2 5 Communication Connections 23 25 Qs AVAIL Test erp 26 2 8 lonMonitor Software Installation eee 28 2 9 Software CO jutANON rincara 29 3 Operation RC 33 3 1 Getting Around in lonMonitor 34 3 2 Network 36 3 3 Logging In and GOM CUNJ 37 3 4 Configuring AgroBars u 39 3 5 Editing lonMonitor er 45 3 6 Balance Adjustment and System Calibration 46 4 Maintenance cirillico 55 4 1 Maintenance Power Down
33. ert all settings to the Note defaults that are loaded from the startup configuration file See Appendix B Setting lonMonitor Options for more information Wenn lonisatoren ausgew hlt wurden k nnen Sie die Use Default lonizer Values Taste dr cken um alle Einstellungen Hinweis auf die Standardeinstellungen Defaults aus dem Startup Configuration File zur ck zu setzen Siehe auch Anhang B Einstellung lonMonitor Optionen f r weitere Informationen Setting the Output Voltages About Setting Output Voltages The recommended typical output range is 50 80 For bars operating in Pulsed DC mode adjust the positive and negative output voltages so that maximum swing values are within 20V of each other averaging a value as close to zero as possible The swings should not exceed 150V in either direction For bars operating in Steady state DC mode adjust the positive and negative output voltages so that the combined value of the positiv and negative settings are as close to zero as possible and lt 20V 41 For Pulsed DC mode For Steady state DC mode Maximum swing values are within20 combined value of the positive and volts of each other averaging a negative settings are as close to zero value as close to zero as possible as possible and less than 20V Note If you modify a positive or negative output setting then that AeroBar will automatically modify its positive or negative alarm to be approx
34. ettings Connection Z Synchronize all ionizers every minutes Z Automatically refresh the GUI periodically Auto refresh period 5 5000 seconds B Polling period for lonAccess to IMET 5 5000 seconds 5 Communications logging level lt less more gt Nothing Ernos Warnings Info Everything write configuration info in file lonM onitar cfq DE Cancel Apply Interface Module Options Menu Synchronize all ionizers every 60 minutes To enable a synchronization every 60 minutes check the box Time is not editable Automatically refresh the GUI periodically This is an auto refresh for the lonMonitor interface No matter what the time is set to you can still refresh at any time by clicking the Refresh GUI Now button In addition to refreshing the GUI after every refresh the lonMonitor writes the file lonData txt in its installation directory The lonData txt file contains all settings for all ionizers that were connected to ports at the moment that the file was written Data in lonData txt is written in Simco lon file command format Polling period for lonAccess to IM6T 5 5000 seconds Set the time for how often you want the lonMonitor software to poll the IM6T for information about AeroBars 78 e Communications logging level This allows you to select the amount of information you want to view in the session history area in lonMoni
35. imately 1 4 25 of the new output setting These additional changes are not marked as pending since you did not make them yourself Setting Output Voltages in lonMonitor It is important to set output voltages in coordination with environmental readings you get during a balance adjustment See the Balance Adjustment section in this chapter 1 Select the ionizer s either by checking the Select boxes or by clicking one or more ionizer rows in the grid The selected ionizer will highlight in the grid 2 Change the value in the boxes under the Pos0ut P PosOut or NegOut columns 600 53 4 3 Click Apply Changes to accept 65 4 54 3 3 65 4 54 3 B m es f Editable text boxes for example positive output negative Tip emitter off time and alarm threshold settings all display tool tip text with their units and valid ranges Hold the mouse pointer over a field to see this information Hold the cursor over a edit field to see the range of values for that parameter a E 31 1 1 1 2 42 Adjust the On and Off times Pulsed DC Mode Only About Adjusting On and Off times If the decay time is too slow and the voltage swings are less than 100V increase both the positive and negative ontimes in 0 1 second increments checking the positive and negative decay times between each adjustment When changes no longer positively improve performance set the ontime and offtime at the last benefici
36. ing AeroBars In general the following adjustments should be made in order to fine tune ionization performance in a new installation This information is also available as a Quick Start Guide Contact Simco lon for a copy Simco lon recommends allowing the Interface Module to run Note for 10 minutes before adjusting AeroBars Simco lon empfiehlt vor dem Einstellen der Aerobars das MinWEIS nterface Modul 10 Minuten laufen zu lassen Setting the lonization Mode OpMode About Setting the lonization Mode The ionization mode called OpMode in lonMonitor designates the method of ionization for an ionizer to operate in Pulsed DC mode is recommended for most process tool envoironments Pulsed DC provides fast decay times and should be used unless large metal objects such as a pre aligner or measurement tool are within 12 inches 30 cm of the AeroBar Steady state DC mode is recommended when the distance between the wafer and AeroBar is 12 inches 30 cm or when large metal objects are within 12 inches 30 cm of the AeroBar Steady state mode is also recommended when low swing voltages are required for sensitive devices i e 100V swings 39 Use Pulsed DC mode for Use Steady state DC mode for Distances gt 12 inches 30 cm between AeroBar and wafer Distances lt 12 inches 30 cm between AeroBar and wafer or for sensitive devices lt 100V swings No large metal objects are withi
37. ion To obtain service under this warranty please contact Simco lon Technical Support at techsupport simco ion com or 510 217 0470 74 Setting lonMonitor Options A1 About the Startup Configuration File A2 Editing lonMonitor Options A3 Reloading the Configuration File A4 Contents of the Configuration File 75 A1 Aboutthe Startup Configuration File When lonMonitor starts up it looks in its directory for file lonMonitor cfg to preload settings for connections GUI options interface module options and default ionizer settings If the configuration file is present and can be opened then settings in it are read in and placed in the Edit gt Options dialog where they can later be modified and saved back to the configuration file If the startup configuration file is missing or cannot be opened a message appears in the session history window identifying the problem and uses built in settings for all options If any field in any ofthe options tabs has a validation problem then no changes will be saved This is also true when settings Nole are saved to the startup configuration file either all settings are valid and all are saved or no settings are saved Wenn in einem der Options Tabs ein Feld ein Validierung Problem hat dann werden keine Anderungen gespeichert Hinweis Dies gilt auch f r Einstellungen die im Startup Configuration File abgelegt werden Entweder alle Einstellungen sind g ltig und we
38. is not available at the connector input connect a 22 AWG or a heavier gauge cable between the side screw on the IM6T Interface Module and known ground source as shown in Figure 3 Improper ground connection may cause malfunction or component failure 21 Warning Use of improper input voltage may result in damage to the unit Verify that the Interface Module is receiving 24 VDC before applying power to the unit Make sure ground to the Interface Module is a known ground Improper ground connection may cause malfunction or component failure and may void the warranty Warnung Unsachgem e Versorgungsspannung kann zu Besch digungen des Ger tes f hren Stellen Sie sicher dass das Interface Modul mit 24 VDC versorgt wird bevor das Ger t eingeschaltet wird Stellen Sie au erdem sicher dass das Interface Modul zuverl ssig ber Netz Erde geerdet ist Unsachgem e Erdung kann Fehlfunktion oder Besch digung verursachen und zum Verlust von Garantie Anspr chen f hren POWER CIRCUIT BREAKER INPUT POWER 24VDC Figure 6 CPC style Connector 22 2 5 Communication Connections There are two methods of connection to communication devices by Ethernet cable or by an RS 232 cable Both connection types are provided on the Interface Module The Interface Module may be connected via both RS 232 and Ethernet cables simultaneously However in order to maintain the integrity of the communication simult
39. legFdbk PosOut NegOut PosOn Exit IF E M EN Mo Figure 11 Select Enable Configuration or Disable Configuration to Switch Modes 37 Connect to Units Connect using the Connect button at the upper left of the window Jif OpMode Select 50 0 50 0 Pulse 50 0 500 Pulse lesi Figure 12 Connect to IM6T Button A successful connection will be indicated with a message in the session history window 5 in Figure 10 Once you are connected the GUI will automatically refresh its information every several seconds by calling the lonAccess DLL You can You can change the refresh interval in Edit gt Options You can also suspend and resume automatic refreshes by clicking the Stop Resume Automatically Refreshing button next to the Connect button e The Refresh GUI Fully Now button causes an immediate refresh that also directs the DLL and the IM6T to examine all ports for inserted or removed ionizers By default the IM6T does this examination every 60 minutes anyway but there may be times when you want to force it for example after adding changing and or removing lonizers from the ports The simulator supports hot swapping of ionizers in ports artificially delaying replies to ICON commands suppressing replies automatic wobbling of AeroBar feedback levels and graphical editing of all ionizer settings including run mode op mode emitter outputs and so forth 38 3 4 Configur
40. n ion delivery must be periodically regulated or balanced This procedure is commonly referred to as balance adjustment or system calibration Simco lon recommends performing a balance adjustment as part of a regular maintenance program In general AeroBars should be balanced every six months to a year The actual frequency of balance adjustment depends on the specific activity of your application and environment In Pulsed DC mode positive and negative ions are released sequentially during ontimes During offtimes no ions are released and existing ions disperse In Steady state DC mode both positive and negative ions are constantly produced The goal of the adjustment procedure is to regulate the ion delivery so that equal numbers of positive and negative ions arrive at the work surface to neutralize static charges of either polarity in a specified amount of time Adjustment of the AeroBar lonziation System components may be performed during periodic checks of the entire system Tool Parameters that Affect lonization Balancing involves adjusting positive and negative ionization output levels and timing sequence of these outputs You can make adjustments to the AeroBar Model 5225 settings using the software In addition to the ionizer settings be aware of the following variables that can affect balance 47 Airflow he recommended airflow for effective ionization is 70 90 fpm Low airflow moves the ions more slowly allowing po
41. n 12 inches Large metal objects are within 12 inches 30 cm of AeroBar 30 cm of the AeroBar Setting the lonization Mode in lonMonitor 1 Selectthe ionizers either by checking their Select boxes or by clicking one or more ionizer rows in the grid The selected ionizer Jif PosAm OpMode Select will highlight in the grid 50 0 50 02 Fulse 500 500 Pulse E MU Hd N zel Changes Apply Changes Note When only one ionizer is selected all of its settings will show up in the box fields below the grid When two or more ionizers have been selected and they share the same value the box field will be filled in as shown in the screen shot below Run _ Status PosFdbk NegFdbk Poson Neon Peso 5 543 45 54 Ja 5 Running OK 15 0 15 0 345 Fosklm_ NegAlm OpMode Select Oz Pie Ni 120 110 Running Belh lim 110 11 0 ons z 543 122 Phe Use Default lonizer Values Cancel Change Apply Change Two or more ionizers are selected and share a common value 40 2 Use the drop down box to sig change the ionization mode for 150 110 Pulse the selected ionizer s Click EA IT Apply Changes to accept Az 120 120 Pulse fi 2 5 ancel Changes 1413 3 When ionizers have been selected you can click the Use Default lonizer Values button to rev
42. nd 6 should not be used with a Sensor this version of the IM6T Interface Module does not support the Sensor Contact your sales representative for more information of ioninfo simco ion com A 15 foot cable is supplied with the AeroBar Different lengths of pre made cables are available for use with the AeroBar but it may be necessary to construct your own cable to allow for custom sizing See Figure 5 for custom cable information on SENSOR Figure 4 Five Connected to Interface Module Verify that power to the Interface Module is turned off before Warning 9 connecting or disconnecting AeroBars Stellen Sie sicher dass das Interface Modul mit 24 VDC Warnung versorgt wird bevor das Ger t eingeschaltet wird 20 RJ11 24AWG CABLE 4 CONDUCTOR NOTE WITH TAB FACING YOU LEFT TO RIGHT ORDER OF WIRES IS THE SAME AT BOTH PLUGS Figure 5 Interconnect Cable Assembly for Custom Sizing Power Connections Connect 24 VDC input power to the Interface Module using a CPC style connector A pre made cable with CPC connector is available from Simco lon part number 33 1790 40 This cable features color coded pin designations 1 green 2 red and 3 black If constructing your own cable the pin assignments at the IM6T chassis are Pin Characteristics 1 ground 2 ground 3 24 VDC 4 Unused It is not necessary to use both grounds If a known ground connection
43. nd the emitter points moisten a cleanroom compatible swab with the IPA solution or use Simco lon Emitter Point Cleaner Gently rotate the swab around the emitter point until dirt or debris is removed Do not alter emitter points in any way Doing so may void the warranty 58 Emitter Point Replacement Emitter point replacement is recommended every 24 to 36 months or when damage or erosion is evident To remove emitter points Use a soft jawed tool to remove silicon points Silicon points are brittle and may break if handled roughly When pulling a silicon point out keep the point straight Do not move the emitter point from side to side or the point may snap Figure 15 Removal of Silicon Emitter Point Clean the area around the socket with a cleanroom compatible cloth and IPA solution before inserting new points To insert new emitter points Gently insert and press the new emitter point into the socket until it is fully seated Do not push on the tip of the emitter point Chassis Cleaning Use a cleanroom compatible cloth moistened with 50 IPA and 50 de ionized water to wipe down the chassis Do not use any cleaners or solvents 59 4 3 Interface Module Maintenance The only maintenance the Interface Module requires is occasional cleaning of the chassis After removing power from the Interface Module use a cleanroom compatible cloth moistened with 50 IPA and 50 de ionized water to wipe down the chassis Do n
44. need see Appendix B for information on setting the amount of information that appears Status Bar Indicates current status of the software Monitor Connected and how often an auto refresh will take place in seconds 35 3 2 Network Configuration See the Network Configuration section in Chapter 2 Installation for information on setting the lonMonitor software to communicate with your computer Communication setup involves Adjusting network settings on a computer Adjusting network settings in the lonMonitor application e Adjusting network settings in the lonSimulator application 36 3 3 Logging In and Connecting Types of Login There are two levels of login monitoring or configuration In either mode any connected IM6T Interface Modules or ionizers are continuously monitored To change settings for the IM6T Interface Module or ionizers you must be in configuration mode Login Passwords Password 1010321 enables monitoring only Password 1414222 enables field service level configuration in addition to monitoring To switch from monitoring to configuration mode 1 From the File menu select Enable Configuration or Disable Configuration 2 Ifenabling the configuration mode re enter the configuration password 1414222 IonMonitor Configuration v1 0 2 File Edit Help Connect Stop Automatically Refresh Disable Configuration Reload Startup Configuration File
45. negofi Write configuration info in fila lontdonitor cfa OK Cancel Apply Default lonizer Settings Menu Op mode Choose Pulse or Steady as the default operation mode for AeroBars Pulse is recommended Output Alarm On Off Default values for positive and negative output alarm and on or off values It is useful to set default values for these settings that match your environment needs which allows the instant application of desired settings to be applied to new AeroBars by clicking the Use Default lonizer Values button 80 A3 Reloading the Configuration File After starting lonMonitor at any time you can reload the same startup configuration file that you started with To do this go to File gt Reload Startup Configuration File A reload restores options to whatever is specified in the file 81 A4 Contents of the Configuration File Startup configuration files use the file command format The contents of a typical lonMonitor configuration file are connection settings onnect mode TCP IP ipAddress 192 168 18 100 port 10001 GUI refresh settings et autoRefresh on autoRefreshPeriod 8 interface module settings HHHHHHHO HHH set sync 1 pollPeriod 7 set logging 2 default ionizer settings set Port 0 Pulse 0 set Port 0 PosOut 444 PosAlrm 11 PosOn 40 PosOff 4 set Port 0 NegOut 666 NegAlrm 17 NegOn 60 NegOff 6 82 Emitter Settings Using the 5572 Remote Control B1 Setting Emitter
46. ot use any other cleaners or solvents Moisten a cleanroom cloth with the diluted IPA solution Thoroughly wipe down the case to remove any accumulated dirt Change the cloth frequently to make sure that the dirt is completely lifted 60 4 4 System Adjustment and Calibration Adjustment and calibration should be performed as a regular part of installation and maintenance activity Refer to Chapter 3 Operation for instructions on adjusting and calibrating the system 61 19 5225 M 01 Rev 2 62 Specifications 5 1 AeroBar Model 5225 5 2 Parts amp Accessories 5 3 Dimensional Drawings 63 5 1 AeroBar Model 5225 Model 5225 Input Voltage Input Current Output Voltage Output Current Control Signal Connectors Regulation Timing Operating Modes Emitter Points Maintenance Ozone Operating Env EMI Cleanliness LED Indicators Chassis Required Optional Dimensions 24 VAC 60 Hz received from the Interface Module Approximately 40 mA AeroBar 1W typ 0 20 kVDC 10 for each polarity on an individual AeroBar pos neg output levels can be adjusted separately in 0 1 output power resolution 15 pA current and voltage limited RS 485 from the Interface Module Telephone style RJ 11 modular jack receptacle Output and balance stability is achieved by independently regulating the ion emission current of each polarity at each ionizer Precise timing 0 10 sec 0 1 sec resolution LEDs on each ba
47. r indicate the polarity of ion emission Bipolar pulsed DC steady state DC or standby Single crystal silicon replaceable Annual semi annual or quarterly depending on process sensitivity and presence of AMCs in the environment lt 0 005 ppm 24 hour accumulation Temperature 60 95 F 16 35 C humidity 40 65 RH non condensing Below background level ISO 14644 1 Class 1 better than Fed Std 209 e Class 1 2 red POS NEG ION OUTPUT 1 middle red ALARM STANDBY all blink at once when COMMUNICATION occurs 2 transmit receive indicate communication with an optional IR remote control Fire retardant ABS plastic Interface Module Model 5200 IM6T lonMonitor software p n 91 5200 SW V1 0 X not sensor compatible AC to DC converter p n 33 5200 22 4 bar 2 1H x 1 2W x 22L in 5 3H x 3 05W x 56 9L mm 28 4 bar 2 1H x 1 2W x 28L in 5 3H x 3 05W x 72 1L mm 44 4 bar 2 1H x 1 2W x 44L in 53H x 30 5W x 112 8L mm 64 4 bar 2 1H x 1 2W x 64L in 53H x 30 5W x 163 6L mm 84 4 bar 2 1H x 1 2W x 84L in 53H x 30 5W x 214 4L mm Three lengths for 300 mm EFEM applications available 39 7 bar 2 1H x 1 2W x 35 7L in 53H x 30 5W x 90 7L mm 55 6 bar 2 1H x 1 2W x 55 6L in 53H x 30 5W x 141 2L mm 75 5 bar 2 1H x 1 2W x 75 5L in 53H x 30 5W x 191 8 mm 64 Weight 1 2 Ib 544g 22 bar Warranty Two year limited warranty ct WS SEMI F47 Certifications C 4 A RoHS Compliant Interface Module Model 5
48. rden gespeichert oder es werden keine Einstellungen gespeichert Any problems encountered with the contents of the file will generate entries in the session history window Problem settings are reported and then skipped over thus all valid settings are actually applied The startup configuration file can be customized to be something other than the default lonMonitor cfg To use a non default startup file name it on the command line when starting up lonMonitor The named file either has to be in the lonMonitor installation directory or the name has to be fully qualified with its complete path 76 A2 Editing lonMonitor Options From the Edit menu select Options TonMonitor Configuration File Edit Help t from Interface Run Status PosFdbk The following menus are available e Connection options e Interface Module options Default lonizer Setting options Each menu is described below Connection Options See the Network Configurations section in Chapter 2 Installation for information about changing these options x Connection Interface Module Defauk lonizer Settings Connection mode C Serial Com TCPAP hostname TCPAP IP address 192 168 18 100 Port number 10001 Wire configuration info in fle IonMoritor cig OK Cancel Apply Connection Options Menu 77 Interface Module Options IonMonitor Opti 1 Default lonizer S
49. removing the RJ 11 cable This may result in damage to the AeroBar Do not clean emitter points while the unit is powered Doing so may result in additional contamination and possible shock To avoid personal injury or damage to the equipment perform only the maintenance described in this manual Ensure that ground input to the Interface Module is a known ground not common from 24 VDC Improper ground connection may cause malfunction or component failure S AN A NH SN AAW Sicherheitshinweise Vor Installation oder Betrieb von einem der Bestandteile des Digital AeroBar lonisierungssystem lesen Sie bitte sorgf ltig die folgenden Sicherheitshinweise Lassen Sie das Interface Modul f r 10 Minuten laufen bevor Einstellungen an AeroBars gemacht werden Warten Sie nach dem Trennen des r Aerobars von der Span nungsversorgung eine Minute damit sich die Hochspan nungs Netzteile entladen k nnen Achten Sie auf die korrekte Versorgungsspannung damit das Ger t nicht besch digt wird Verbinden oder trennen Sie Aerobars nicht mit bzw vom Interface Modul w hrend das Interface Modul eingeschaltet ist Niemals ein Aerobar durch Entfernen des RJ 11Kabel abschalten Nichtbeach tung kann zu Sch den am Aerobar f hren Reinigen Sie keinesfalls Emitter Punkte bei eingeschaltetem Ger t Andernfalls kann es zu zus tzlicher Verunreinigung oder zu Stromschlag kommen F hren Sie zur Vermeidung von Verletzungen oder Sch
50. res an Ethernet port and an RS 232 port for communication with process equipment or EFEM controllers Two versions of the the IM6T Interface Model are available IM6T Version 1 X described in this manual runs with lonMonitor Software Version 1 X and controls only ionizers The IM6T must be paired with the proper version of lonMonitor Software in order to operate correctly Older versions of the IM6T can be factory upgraded to later versions if desired To determine what version of IM6T you have look at the serial number label on the outside of the product If the model number does not include the letters NV or V3 X or V4 X then it is Version 1 X Figure 2 Interface Module Model 5200 IM6T RS 232 Port One oftwo communication connection options An RS 232 cable connects from your process tool Ethernet Port If connecting the Interface Module Model 5200 IM6T directly to a PC use a CAT 5 crossover cable If the PC connection is routed through a hub or router use a regular CAT 5 cable Handheld Remote Input An RJ 11 cable connector is reserved for future use lonizer Connections ports 1 6 RJ 11 cables connect up to six AeroBars Additional and Future Connections ports 5 6 RJ 11 cables may be used to connect AeroBars Sensors are not compatible with this version Interface Module Do not attach sensors Input Power 24 VDC CPC style connector for 24 VDC input power equipment Power On Off Rocker Switch
51. rflow for optimal ionization is 70 90 fpm 4 Take the measurements on the CPM The measurements taken on the CPM will record the following specifics Positive and negative peak voltages Balance an average of the positive and negative voltage peaks Positive and negative decay time a Allow the CPM to warm up for at least 15 minutes b From the Main screen on the CPM 49 C Press Auto The Auto test performs both Decay tests followed by a balance test C Make sure the symbol D gt is next to the test you want usually the Factory test which runs an auto test with standardized test parameters C Press Start c Note the numbers for Vp positive voltage peak Vp negative voltage peak and Vave average or balance 5 Examine the Data and Adjust the AeroBars If the measure ments have been taken for an operation area do not meet your specifications use the software to adjust the AeroBar settings Understanding lonization Modes Voltage Swing and Output and Decay Timing lonization Modes Ensure that the AeroBar is operating within the appropriate ionization mode Pulsed DC or Steady state DC Pulsed DC mode is recommended for most process tool environments Pulsed DC provides fast decay times and should be used unless large metal objects such as a pre aligner or measurement tool are within 12 inches 30 cm of the AeroBar Steady state DC mode is recommended when the distance between the w
52. rsion 3 X which operates with the enhanced IM6T version 3 X or 4 X and includes the capability of closed loop control when combined with the Sensor Model 5200 SR lonMonitor software must be paired with its proper version of IM6T Interface Module in order to operate correctly Requirements The software runs under either Microsoft Windows XP or Windows 7 operating systems It places minimal demands on the host system typically less than 1 CPU usage The system also requires either a TCP IP Ethernet port or an RS 232 port on the tool controller Contents of the Software Package The software package includes lonMonitor exe lonMonitor graphical user interface GUI program through which you can monitor and configure AeroBars connected to an Interface Module You can also monitor and configure simulations of these devices when lonMonitor is connected to the lonSimulator program lonSimulator exe lonSimulator GUI that simulates the behavior of an IM6T Interface Module with AeroBars attached to its ports The simulator supports hot swapping of ionizers in ports artificially delaying replies to ICON commands suppressing replies automatic wobbling of AeroBar feedback levels and graphical editing of all ionizer settings including run mode op mode emitter outputs and so forth There is also a lightweight simulator named lonSimLite with a minimal graphical user interface intended primarily for performance testing lonAcces
53. s activities practices incidents or actions that are beyond reasonable knowledge of and control of Simco lon THIS WARRANTY IS THE ONLY WARRANTY MADE BY SIMCO ION WITH RESPECT TO THE GOODS SOLD UNDER THIS AGREEMENT THERE IS NO OTHER WARRANTY EXPRESS OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE SIMCO ION FURTHER DISCLAIMS ANY WARRANTY EXPRESS OR IMPLIED LIABILITY OR SUPPORT OBLIGATION FOR ALTERED DAMAGED OR MODIFIED SOFTWARE OR ANY PORTION OF THE SOFTWARE INCORPORATED WITH OR INTO THIRD PARTY PRODUCTS OR PRODUCT PROBLEMS CAUSED BY CUSTOMER S NEGLIGENCE ABUSE OR MISAPPLICATION OR USE OF THE PRODUCT OTHER THAN AS SPECIFIED BY SIMCO ION Simco lon shall not be liable for any incidental special indirect or consequential damages losses or expenses directly or indirectly arising from the sale whether in contract tort or any other legal theory In any event Simco lon liability hereunder is expressly limited to the repair or replacement at Simco lon s option of non conforming goods or at Simco lon s election to the repayment or crediting to Buyer the purchase price of such goods Claims Notice of Defects Failure of the Buyer to object in writing to any merchandise shipped to it by Simco lon within 30 days after receipt thereof will constitute complete acceptance by Buyer of such merchandise Rejected material must be returned to Simco lon within 45 days after receipt 72
54. s DLL library a collection of DLLs dynamic link libraries and associated header files used to develop custom monitoring and control applications in Visual Basic or Visual C C lonMonitor is built upon lonAccess TestlonAccess exe a fully functional sample application written in C C which demonstrates how the lonAccess library can be used to integrate control and monitoring features into your custom applications This application is also used to test the lonAccess library DLLs hence its name TestlonAccess This application is provided in source code form for use as the framework for your own control application Installation 2 1 Installation Guidelines 2 2 lonizer Installation 2 3 Interface Module Installation 2 4 Unit Connections 2 5 Communication Connections 2 6 System Power Up 2 7 Alarm Test 2 8 lonMonitor Software Installation 2 9 Software Configuration NANA AA AAW Safety Information Before installing or operating any component of the Digital AeroBar lonization System carefully read the following safety information Allow the Interface Module to run for 10 minutes before adjusting any AeroBars After removing power from the AeroBar s allow a minute for the high voltage power supplies to discharge Use proper input voltage to avoid damaging the unit Do not connect or disconnect AeroBars to and from the Inter face Module while the Interface Module is powered Never power down an AeroBar by
55. seen 56 4 2 AeroBar Maintenance 57 4 3 Interface Module 60 4 4 System Adjustment and 61 5 Specifications me 63 5 1 AeroBar Model 5225 64 5 2 Parts 8 Accessories 66 5 3 Dimensional Drawings nes een 68 6 Warranty 8 Service 71 Appendix A Setting lonMonitor Options 75 Appendix Emitter Settings Using the 5572 Remote Control 83 Description 1 1 About this Manual 1 2 System Overview 1 3 AeroBar Model 5225 1 4 Interface Module Model 5200 IM6T 1 5 lonization System Software 1 1 About this Manual This manual describes the system components of the AeroBar Model 5225 lonization System AeroBar Interface Module and lonMonitor software and covers the following information Installation and setup of system components including lonMonitor software Operation using the lonMonitor software interface Maintenance procedures Specifications for system components Warranty information This manual covers the IM6T Interface Module version 1 X and lonMonitor software version 1 0 X It does not cover later versions of the IM6T or lon
56. tential ion recombination and reducing the ions available to neutralize surfaces High airflow moves the ions in a more direct path reducing the surface coverage area Configuration Configuration changes differing from the original spec such as adding a pre aligner or metrology tool may change the way the ions disperse Also metal objects closer than 6 inches to the AeroBar will ground ions reducing the amount of ions available to the surfaces Maintenance Contaminants in the environment are attracted to AeroBar emitter points Dirty emitter points have an adverse effect on ion output and voltage balance As a general rule emitter points should be cleaned every 3 months and AeroBars should be rebalanced every 6 months to a year Environment Changes in cleanroom humidity and background airflow may affect performance Location Specifications for the AeroBar location are based on the designed in location for AeroBars Repositioning or changing the mounting distance from the FFU will affect performance results Performing the Adjustment 1 Choose a specification for the measurements If the facility has an existing specification for voltage swings and decay times obtain these numbers If specs are not available or do not exist use the industry s typical setting 50 to 100V for semiconductor tools and mini environments and 100 to 150V for wafer fabrication in open areas A desired balance and decay time will depend on
57. th value 12 updated NegOut with value 543 ses 7 ene 1 Running OK 150 150 345 543 45 54 2 Running Possim 120 150 ENEMU 4 19 5 3 4 Running Neg amp lim 11 0 110 654 543 23 31 5 Running BothAlim 11 0 110 654 54 3 33 31 6 Running 6 pez se 1 s 7 2 2005 10 24 11 23 05 Ionizer 5 updated NegAlrm with value 31 E 4 gt 10 m 127001 TG Auto rehesh evey 6 secs Figure 10 The lonMonitor interface 1 Connect Disconnect from Interface Module button 2 Start stop Automatic GUI Refresh Button Allows lonMonitor to refresh information at specified time intervals see Appendix B for information on changing intervals 3 Refresh GUI Fully Now button A full refresh is typically used when automatic refreshing has been turned off 4 Configuration Area Grayed out when only monitoring 5 lonizer Select Boxes Check boxes to select one or more ionizers at a time to make changes to 6 Running Standby Setting Select Running or Standby to turn power to the emitter points on or off AeroBars are still powered and communicating but without ionization 7 Settings Set values for one or more ionizers in these boxes values correspond to column heading 8 10 Use Default lonizer Values button Click to restore all settings to default values see Appendix B for information on changing the defaults Session History List Area Displays as much or as little infor mation as you
58. tion and possible shock To avoid personal injury or damage to the equipment perform only the installation and maintenance procedures contained in this manual Ensure that ground input to the Interface Module is a known ground not common from 24 VDC Improper ground connection may cause malfunction or component failure Wichtige Sicherheits und Gebrauch N SE N AAW shinweise Lesen Sie aufmerksam die folgenden Sicherheitshinweise vor der Installation oder dem Betrieb des Gerates Nichtbeachtung dieser Sicherheitshinweise k nnen zu Schaden an Ihrem lonisationssystem und oder zum Verlust von Garantie Anspr chen fuhren Achten Sie auf die korrekte Versorgungsspannung damit das Ger t nicht beschadigt wird Stellen Sie sicher dass die Stromversorgung zum Steuerger t und oder Emitter Sender vor dem AnschlieBen oder Entfernen von Emittern oder Kabeln abgeschaltet wird Nichtbeachtung kann zu Sch den am Ger t f hren Niemals einen Emitter durch Entfernen der Kabel abschalten Dadurch kann der lonisator besch digt werden Reinigen Sie keinesfalls Emitter Punkte bei eingeschaltetem Ger t Andernfalls kann es zu zus tzlicher Verunreinigung oder zu Stromschlag kommen F hren Sie zur Vermeidung von Verletzungen oder Sch den am Ger t nur die Installation und Wartung durch wie sie in diesem Handbuch enthalten sind Das Interface Modul muss ber Netz Erde geerdet sein nicht ber den R ckleiter d
59. tor In addition to displaying the information in lonMonitor a log file named lonMonitor log is automatically opened and filled with time stamped information The amount of information in this file depends on the setting specified Note Nothing no log Errors only errors are logged Warnings only warnings are logged Info communication activity information Everything all information is logged At the Everything logging level with a 5 second lonAccess polling period and 4 or more ionizers in ports the log file will grow at about 2 megabytes per hour Keep this in mind when setting the logging level Logging only Errors or Warnings is recommended for practical applications Hinweis Bei Logging Level Everything mit einer 5 Sekunden lonAccess Pollingzeit und 4 oder mehr angeschlossenen lonisatoren wird die Log Datei auf etwa 2 Megabyte pro Stunde anwachsen Beachten Sie dies bei der Einstellung der Logging Level F r praktische Anwendungen wird lediglich das Logging von Fehler oder Warnungen empfohlen Write configuration info in file lonMonitor cfg Clicking this button saves the Interface Module option settings into the startup configuration file making these settings the permanent default 79 Default lonizer Settings os TonMonitor Options Connection Interface Module beiau Tonizer Sellings Op mode Output Alarm On Off Positive posout palm pason posoff Negative negout negon
60. unicating properly Test the alarm using the software interface Without the software interface you can test the alarm manually using Simco lon infrared Remote Control Model 5570 The IM6T s alarm LED will not turn on if the IM6T is not set to Note poll AeroBar Default To set the IM6T to automatically poll AeroBar contact Simco lon for more information Die IM6T s Alarm LED leuchtet nicht wenn das IM6T nicht auf Poll Aerobar Default eingestellt ist Kontaktieren Sie lon System f r weitere Informationen wenn das IM6T auf automatisches Poll Aerobar gesetzt werden soll Hinweis The IM6T s alarm LED will not turn on if the IM6T is not set to poll AeroBar Default To set the IM6T to automatically poll AeroBar contact Simco lon for more information To test the alarm 1 Note the value of the positive feedback and negative feedback settings 2 Either change the positive alarm so that it is above the positive feedback value or change the negative alarm so that it is above the negative feedback level Changing the positive or negative output level automatically Note resets the corresponding alarm level ndern der positiven oder negativen Ausgangspegel setzt die Hinweis entsprechende Alarm Einstellung automatisch zur ck 26 This sets the unit into alarm If using the software interface check that it shows an alarm is occurring Visually check that the center LED on the bar blinks intermittently

IONIZATION SOLUTIONS Digital AeroBar®

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IONIZATION SOLUTIONS Digital AeroBar®