Digisoft V3.25
Contents
1. In order to connect also a computer through a RS232C cable QUALIFLOW recommends to use one of the following connector e Serial Connector adaptor with same SUB D 15 pin out Q2001733 6 model 4 D Sub 15 pin Male MODEL 4 RS232C D Sub 9 pin Female D Sub 15 pin Female e Serial Connector adaptor standard MFC Card Edge Connector Q2001733 08 model 2 RS232C D Sub 15 pin Female D10 092 V03 Digisoft V3 25 for Digital MFC 8 qualiflow RS232C amp Power Supply kit for Qualiflow Digital MFC s all series When connecting individually a Digital MFC to a computer use an interface kit Q2001733 12 It includes e serial connector adaptor P N Q2001733 06 e power supply assy 120 230 VAC 15VDC P N 67300250 01 e power cord from power supply to MFC length 1 meter P N 2990976Q e RS232C cord from MFC to computer length 2 meters P N Q2001733 11 SP 5 3 RS485 MODBUS interface RJ11 CORD 2m50 2990955Q 01 2m50 1m00 2990955Q 01 1m00 Om50 2990955Q 01 0m50 QUALIFLOW QUALIFLOW QUALI QUALI FLOW FLOW gt FLOW gt FLOW gt FLOW gt RS232 RS485 adapter 6730024Q 01 RS485 MODBUS accessories When connecting several Digital MFC to a computer e RS232 RSA85 converter PN 6730024Q 01 e RJ11 RJ11 cable 2m50 PN 2990955Q 01 2m50 e MFC Power supply for 4 MFCs 15V PN 6730025Q 01 D10 092 V03 Dig2. qualiflow Mes Flaw Cabe Digisoft V3 25 FOR DIGITAL MFC User s Manual qualiflow QUALI FLOW S A Le Mill naire 395 rue Louis L pine B P 7 34935 MONTPELLIER CEDEX 9 France Ph 33 0 4 67 99 47 47 Fax 33 0 4 67 99 47 48 QUALI FLOW Technology Center 44862 Osgood Road CA 94539 Fremont CALIFORNIA USA Ph 1 510 440 93 74 Fax 1 510 440 93 75 QUALI FLOW J apan 3F Hattori Bldg 30 Yotsuya 4 Chome Shijuku ku Tokyo 160 0004 Japan Ph 81 0 3 5368 1682 Fax 81 0 3 5368 1683 Identification D10 092 24 12 2003 DONS Users Mama Digisoft V3 25 UserManual doc Control Approved Gilles Sanchez Dec 24 2003 Albin Diranzo Dec 24 2003 Mathieu Bourgarit Dec 24 2003 History Rue N 0 Dec 2000 nitial version V00 Complete Olivier L onel Gilles Sanchez Sept 01 2003 Update to Digisoft V3 23 Complete Gilles Sanchez Dec 23 2003 Update to Digisoft V3 24 Gilles Sanchez June 2004 Update to Digisoft V3 25 V03 D10 092 V03 Digisoft V3 25 for Digital MFC User s Manual qualiflow TABLE of CONTENTS l DESCRIPTION sasssa a TE ENa eia 1 2 REFERENCE DOCUMENTATION cccccsccccsscccscccccccccscccccsccccsscccsccccccccccsccccscsccecscececccseees 1 5 SCOPE amp COMPATIBILITY ssa csc deca 04089000086 015 0308 9002008581 50 50 007008000900 a OO NU NUT s 0 ER Pa Siu da RUNE 2 4 SOFTWARE INSTALLA ION 1n an OB de a sante c baa E Foie 2 dl INSTALLATI
3. BO 40 20 C v C CC C q 54 0 9 55 0 83 55 0 9 57 0 9 58 0 359 0 10r CE DI ES Dynamic Adj 0 2x 10 207 25 an 50 d Bl d 75 al d 100 d Specific 52 Modbus Calib Slot Full Scale Unit Process Gas E o wo f EXT Valve amp Setpoint amp Flow Reading OK D10 092 V03 Digisoft V3 25 for Digital MFC 20 qualiflow Input output format e Flow readout OV gt flow 0 Digisoft display OV or 0 Full Scale 5V gt flow MFC Full Scale Digisoft display 5V or 100 Full Scale e Setpoint between O and 5V Digisoft display xV or x FS with 5V lt 100 FS e External sensor between 0 and 5V Digisoft display yV or y FS with 5V lt 100 FS or 10V 100 FS 7 4 6 Flow unit The setpoint and readout values are expressed in the selected unit Flow unit v zot FS seem slm COM CU my If the option External sensor is activated in the REGULATION tab the flow unit group is as follows Flow unit fe Z of FS COM C mY 7 4 7 Graphic area features A contextual menu is available using the right mouse button when the cursor is anywhere on the graphic area Right click to display the following menu w Legend w Magnify LIndazaam Print Clear Legend A legend gives information about the curves color code of the current setpoint and readout values The legend may be hidden by using the contextual menu If t
4. OFF data is recorded even when setpoint is zero The Read History Data button allows to consult all data in memory Data is available in TXT format and can be imported in Microsoft Excel data saved as a cvs file Predictive maintenance can be done with a minimum training on mass flow controllers Here is the MFC history window Ei History of MFC 0 X Ele Status Data About Header File 03M07 0074 1491678 csv Date 2 U8 0315 07 08 5 enal number 03M087 0074 Sensor senal number 1431578 Process gas N20 Gas flow 20000 sccm Comments essai N History 4 records uploaded 00 00 00 75 00 2039 0 01 Regulation 75 00 2041 0 01 at Regulation 75 00 2052 0 05 0 Regulation 75 00 206 0 03 0 Regulation I Header Read JP Save D10 092 V03 Digisoft V3 25 for Digital MFC 30 qualiflow 7 6 OTHERS tab 7 6 1 Overview This panel contains useful functions for the maintenance and particular applications M DEMO MODE Qualiflow s Digital Control 3 25 25 May 2004 SERIAL INFORMATION CALIBRATION SLOT REGULATION ALARMS OTHERS H Pos Time ms oS s write Analog Readout C 0 020 to 5 54 v 5 to 554 Automatic amp utazera ON lo 0 32 6 3 Readout DAC Offset SE mM O 4 1000 E write OFF Es Write Soft start ON Delay 40 D gt 12s memi EA Read MFC f OFF S write
5. SANCHEZ Company ja ualiflcuw Installshield Cancel D10 092 V03 Digisoft V3 25 for Digital MFC qualiflow e Choose your installation directory on your computer or keep the default path Choose Destination Location 4 P x setup will install Digis oft in the following directory To install to this directory click Next To install to a different directory click Browse and select another directory You can choose not to install DigiSoft by clicking Cancel to exit acetyl ea an Destination Directory C Program Files Glualiflow DigiSoft Browse InstallShield e You can specify the program folder in the Start menu Select Program Folder E x Setup will add program icons to the Program Folder listed below You map type a new folder name or select one from the existing Folders list Click Next to continue Program Folders Existing Folders E ccessoles Ahead Mero marrage Logitech Outils d administration Projet Jipelec Installshield D10 092 V03 Digisoft V3 25 for Digital MFC qualiflow e Before finishing the installation a quick sum up is given below Check information and click next to finish copying Digisoft program files Start Copying Files En EA Setup has enough information to start copying the program files If vou want ta review or change any settings click Back If you are satisfied with the settings click N
6. conflict with Automatic auto zero on page Others 7 4 5 External sensor The MFC s external sensor feature can be used in different applications such as pressure control in vacuum process chamber pressure control for wafer s back side cooling evaporation control in gas bubbler and burner flame temperature control using gas This option is off by default when Digisoft starts according to the mass flow controller configuration External sensor C ON f OFF The flow measure of the MFC is not involved in the regulation it is just an information which is given to the user The regulation adjusts the valve command so that external sensor V setpoint V To activate this option you need to enter the CUSTOMER access level See section 7 2 4 for further details on access level Once activated the REGULATION tab receives new features M DEMO MODE Qualiflow s Digital Control 3 25 25 May 2004 Es Oo x SERIAL INFORMATION CALIBRATION SLOT REGULATION CALIBRATION ALARMS OTHERS Actuator menu Fully open Setpoint Flow unit gt o 4 Closed 40 00 2 offic tf Sof FS Regulation Hold last value Flow readout COM C mx Direct control 40 00 e Sate State oS Safe value External sensor External sensor 0 00 OF F S Pere CC OFF ST Auto zero amp 3 amp tpoin Active Acquisition Stop C Analog Digital Aw Command valve Sample rate m Number 255 gt SP RO ES D 100 a
7. d oce Total amp ccumulator Total fo scc EA Read Total c scc Read Hour fl h Read Modbus Calb Slot Full Scale Unit Process Gas E FU n 3 T fesse FL EXIT Soft Start Reading OK 7 6 2 Ramp rate The ramping function increases linearly the setpoint to assure a progressive increasing of the flow Hamp rate Time ms lo ai Write D10 092 V03 Digisoft V3 25 for Digital MFC 31 qualiflow It is expressed in milliseconds A value of 0 ms disables the ramping mode The maximum ramping time is 10 hours that 1s 36000000 ms When ramping is active the MFC calculates periodically the actual setpoint so that the target setpoint is reached when the ramping delay expires and making a linear ramp Ramping 2 hours Ramp rate 7200000 ms Actual lime 7473000 ms Error 3 7 19 1 01 11 31 12 18 0 01 12 00 00 1891 01 12 28 48 19 1701 12 57 36 19 01 132624 191 01135532 19 01 1424 00 181 01 14 52 48 7 6 3 Analog readout On Off These checkboxes allow to avoid negative readout on the analog readout pin of the Sub D connectors particular applications for supervisors compatibility Analog Readout C 0 020 to 554 f O5 to 55V 7 6 4 Automatic Auto zero On Off If ON after the given time of flow below 1 5 the mass flow will automatically proceed to an auto zero see section 7 4 for further deta
8. eee ee ee eee 24 74 9 Dynamic adjustment sessiossa EEEE EEN er dues ten Steam enter e pile tee der ces 24 OO a ae E E O AE E OEA 24 TA92 miena seis ne ne ee ee ee en de ee ne 25 19 EA el NER 26 7 4 10 Specific error message error 140 enne nennen nennen essen nennen essen 27 pes ALARN TAD TR RP t Ska AEA A Alaa oottaa A Lastut 28 Joska EII mm s 26 7 5 2 Regulation monitoring sise 28 LD PITO DOM EN cessum massa Ks Ks E SIISTI ii tr 29 Ti 110 10001 missin an vi OoN DES E 30 Oo O TEK MULT 31 JOI 101010100 a N 31 VIP EN Don EEE 31 7 6 3 Analog readout On Ofdf cesses eene enne aa aan nnn nnne nene aa aa naan rrr nnns 32 7 6 4 Automatic Auto zero On Off cccccccccccccccccsssesecccceeeeeaeseeeeeeeeeeaaaseseeeeeeeeesaaaeeseeeeeeesaaaaeeeeeeeeaaas 32 760 3 Readout DAC ON SCE E 32 70 0 Soft start OMON nes area donnee ee tee dead een ec 33 TOT EDI 2000190278 9 11077112170 EE Ra md ee a R 35 D10 092 V03 Digisoft V3 25 for Digital MFC i qualiflow 1 Description This manual is designed for users of Digisoft V3 25 software QUALIFLOW software for digital mass flow controllers communication M DEMO MODE Qualiflow s Digital Control 3 25 25 May 2004 m Hi iol x SERIAL INFORMATIDN CALIBRATION SLOT REGULATION ALARMS OTHERS ADVANCED SOFTWARE FOR DIGISOFT Single Device Version Digisoft o
9. symbol Semi code Calibration gas Slot 1 Mat calibrated Slot 2 Mat calibrated Slot 3 Not calibrated Slot 4 Not calibrated Slot 5 Mat calibrated Slot HB Mat calibrated Sloth Nat calibrated Slot H8 Mat calibrated Slot 9 Not calibrated Slot 10 Mat calibrated Modbus Calib Slot Full Scale Unit Process Gas M O A en o fer Address 764 Reading OK Make a new Gas Slot Wizard This button accesses a wizard allowing to add a new gas slot by giving the reguested gas and full scale g Make anew Gas Slat Wizard WARNING This option must only be used by qualified users who have been trained by Qualiflow s engineers Refer to specific documentation for further details on the use of this Digisoft option See section 2 for documentation references Tool The Read button reloads data from the mass flow controller to fill the calibration slot table D10 092 V03 Digisoft V3 25 for Digital MFC 17 qualiflow 7 4 REGULATION tab 7 4 1 Overview This is the main tab of Digisoft as it gives all necessary tools for mass flow controller operation M DEMO MODE Qualiflow s Digital Control 3 25 25 May 2004 E ES x SERIAL INFORMATION CALIBRATION SLOT REGULATION ALARMS OTHERS Actuator menu Fully open Setpoint Flow unit 4 Closed 75 00 of FS of FS seem slm Regulation e Hold last value Flow readou
10. 0x480 minimum screen size and Microsoft Windows 95 98 2000 or NT4 x Windows 3 1 is not supported 3 Mb Hard disk drive space and 8 MB RAM space are enough to run Digisoft 4 Software Installation 4 1 Installation procedure Installation e Insert the Qualiflow Digisoft CD ROM into your disk drive e Browse the disk from your Explorer e Start the program file Setup exe from the Digisoft directory on the CD ROM CE LLL x master the mass flow jualifiow DIGISOFT 3 Copyright c OUALIFLOW s a 1998 2003 Cancel D10 092 V03 Digisoft V3 25 for Digital MFC 2 qualiflow e Follow instructions on your screen to install Digisoft V3 25 Welcome to the Digisott Setup program This program will install D igiS oft on your computer It is strongly recommended that you exit all Windows programs before running this Setup program Click Cancel to quit Setup and then clase any programs you have running Click Mest to continue with the Setup program WARNING This program is protected by copyright law and international treaties Unauthorized reproduction or distribution of this program or ang portion of it may result in severe civil and criminal penalties and will be prosecuted to the maximum extent possible under law InstallShield Cancel e Enter your name and company name User Information E x Type your name below ou must also type the name of the company you work for Mame Gilles
11. 92 V03 When using comX parameter others com port will not be scanned Note that add0 brings an input query dialog box MFC address Please enter MFC address Digisoft V3 25 for Digital MFC qualiflow 5 Hardware Connection 5 1 Connector Here is an illustration of a mass flow top connector for pin out configuration 1 Ext sensor signal common 9 2 Readout Power common 10 2 Al TX RS232C 11 D eros J 4 Gnd RS232C Valve voltage 12 5 15VDC Reset alarm 13 6 15vDC sre 14 7 Ki RS232C Valve override 15 EUM 8 Setpoint For further information on connecting precautions refer to the appropriate mass flow controller user s manual A wrong pin out configuration could lead to major damages on your mass flow controller Digisoft uses the following pins for communication with a mass flow controller e 4 GND RS232C e 7 RX RS232C e 11 TX RS232C The other pins of the top connector are used exclusively by the electronic card of the mass flow controller Note The power supply 15V OV 15V must be connected to the connector For 1 or 2 mass flow controllers Qualiflow recommends the following power supply 6730025Q 01 D10 092 V03 Digisoft V3 25 for Digital MFC 7 qualiflow 5 2 RS232C interface RS232 CORD Q2001733 11 POWER p SUPPLY 5 15 15 100 240 VAC VDC 47 63 Hz QUALIFLOW 6730025Q 01
12. ON PROCEDURE wsssssscasissaciannarernedobiantawananiansathoadaenseoteadoninadswieeeinasathastionieaieaiabiantannsasananss 2 42 RUNNING DIGISOFT VIIS vuusaaasakssssastessausum ssaans s nvaanaSiva nad aussansadaanlandeusaueeedaosaecdetepsancauensanicunsassadies 6 4 3 COMMAND LINE PARAMETERS ccccsssescecessccucscaccccnsscacavascucucacecensscacavaseucucacenensscacavaseseucasenensscazes 6 S HARDWMANRECONNEC TON 51 5 oes ieien udo axes ee Desv E Ud A vaxe Sep cei Eon eoe aeo Aaaa 7 SS MEME CONT O III 7 Re ORTI RR 8 5 3 RS485 MODBUS INTERFACE ccscscsccsessscacecsccucsssceceesscacacsccucucacenenescacavescscucacenensscasavsseucucscas 9 6 SOFTWARE STARTING 5vamsoisalassssavoseass niaa vosu soai UDURE CCUg CU Ea eu se e QUE VEU GER FUSE Ces Cuba E Fera te Ossa eU TAHO SSTN NS 10 7 WINDOW IADS m ne 12 TA SFR ET ea a a E E A E aes 12 T2 INFORMA THON RE E ie T T E A E O E 13 J OE ae E E E E E a vpet va lUSn S SSKESE 13 CCS oss ag wc cease eee 14 SHEER CL P 14 dU CO EIAS 15 TPs OO U 16 dn CALIBKA TON SORA ME DU DE D LE EU M CEDE 17 E MERECE ELE E Tm 18 OO NEE E AENEA E N E 18 OO OA ane toads IONIN ESIIN 19 SO OO a re 19 o OO a siis Ne Te A 19 0 JONA SEO ENERO 20 140 10000 a ee ee es s aa p see 21 7 4 7 Graphic area eatmmes muosssiomasuvatausast rsv ststal stu deca sa aa MaA Luv Eos nee nee termine ss O OD uec ides Pa QUEE 21 Hs 500010 ssa E ee de ee nn ne La on eM
13. appears CAUTION x N MFC not Found But Digisoft will continue to run without any MFC connected leading to hazardous software results In this case when the main Digisoft window appears click on EXIT to quit Digisoft and recheck your mass flow controller connection see section 5 for hardware connection D10 092 V03 Digisoft V3 25 for Digital MFC 11 qualiflow 7 Window Tabs 7 1 SERIAL tab This page is the default opening page when the software is started KI DEMO MODE Qualiflow s Digital Control 3 25 25 May 2004 7 ioj x SERIAL INFORMATION CALIBRATION SLOT REGULATION ALARMS OTHERS ADVANCED SOFTWARE FOR DIGISOFT Single Device Version Digisoft E apvn pll Osaliflown SA 1958 2000 advanced solutions for thin film deposition qualiflow Digisott 3 25 25 May 2004 Modbus Call Slot Full Scale Unit Process Gas NE a AE R i ES ccm H EXIT Soft version Reading OK The software automatically chooses the first serial port on which a QUALIFLOW digital MFC is found However if there are several mass flows connected on several serial communication ports the scroll down list allows to choose the serial communication port number NOTICE At the bottom of each page the status line indicates 1 The number of the chosen calibration named Gas Slot the corresponding full scale the unit as well as the corresponding process gas Modbus Calib Slot Uni
14. as it is available in BASIC access level See section 7 2 4 for more details about access level on Digisoft Setpoint Ir Analog Digital In digital setpoint mode the digital setpoint can be modified to predefined values by several aligned buttons An additional button allows to choose a specific setpoint using the up and down arrows or the numerical keyboard Eai Dynamic Ad 0 2x 10 20 25 an AQ d Bn d 1 SO d 100 d Spei 50 a Those buttons disappear when the analog setpoint mode is requested 7 4 4 Auto zero The check box is refreshed whenever the program enters the regulation page e When checked it means that the readout is affected by an offset which cannot exceed 1 5 FS and 1 5 FS e Unchecked means that no correction is applied to the readout Auto zero Active When the command is checked the MFC invokes only once the Zero adjust service The current readout is captured and stored in non volatile memory The captured readout is adjusted so that it does not exceed 1 5 FS or 1 5 FS D10 092 V03 Digisoft V3 25 for Digital MFC 19 qualiflow Consequent readout values are corrected in the following way Readout Readout CapturedReadout When the command is unchecked the captured readout is cleared and consequent readout values are no longer affected WARNING Since the check box is only refreshed once when the program enters the regulation page this information may
15. been observed that when there is no gas sometimes the regulation monitoring can generate an alarm when setpoint is above 0 so it is possible to switch off the alarm warning due to the regulation monitoring Note that if a hardware alarm occurs it will generate an alarm even if alarm warning is off 7 5 3 Error parameters Clicking on the Read and Acquit button of the error panel allows to list the mass flow internal errors with their number and explanation Error wf Read and Acquit i Clear window Safe state valve Close Sale valve value lo write The Clear window button erases the list of errors The Safe state valve fields allow setting the state of the valve when an error occurs D10 092 V03 Digisoft V3 25 for Digital MFC 29 qualiflow 7 5 4 History recorder When the history recorder is ON the valve voltage setpoint reading of the sensor error status and flow are stored each xx seconds where xx is the value written in the sample rate dialog The sample rate can be changed and the total time of recording is automatically refreshed History recorder Sample rate lo seconds ES Write Total history oO 0 him s History C ON fe OFF ss EraseHisto Hold an zero E betel tet C ON OFF EB Head histor data The Hold On Zero function allows to record data only when setpoint is above 2 in order to avoid to record mass flow activities when there is no processing When Hold On zero is
16. box Advanced options are activated in the different tabs of Digisoft e Valve type selection see section 7 2 3 e External sensor on off see section 7 4 5 e Dynamic adjustment for external sensor see section 7 4 9 3 e Gas slot parameters edition Advanced parameters for gualified users e Calibration tab Advanced parameters for qualified users WARNING If the CUSTOMER level is used without Qualiflow support engineers approval product warranty is void as the use and modification of advanced parameters is restricted to Qualiflow s engineer D10 092 V03 Digisoft V3 25 for Digital MFC 15 qualifiow 7 2 5 Tools The Print button allows to print a sheet with the configuration and identification parameters of the mass flow controller Ki MFC Information Eger lt gt n gal EG Fee QUAL FLO 350 rue Med Mabel Le k ll naime BF 7 34935 Montpellier Cedex 9 France qualitiow Fhore Fax 3 D 67 09 47 R 53 D 67 99 47 48 HTTP hrtp fu ww quali dou com DIGITAL FLOW CONTROLLER CONFIGURATION STATE Product Hertifier Manufacturer Identifier MFC Senal Humber Sensor Senal Humber Value Type Microcortrdiler Soft Version Current GAS Slot 1 Gas Slat Gas Slate Gas Slats Gas Slat 4 Gas Slats Gas Slot 6 Gas Slat Gas Slate Gas Slot Gas Slot 10 Setpdirt Regu ation Alarm Min Max Delay Regu ation Alarm a mine Safe state valve Sat
17. e valve value Digital D Ym Ym z ON Close O Automatic Lutozero OFF Delay O Softstart OFF Delay O Ma Calibrated Mo Calibrated Ma Calibrated Ma Calibrated Ma Calibrated Ma Calibrated Mo Calibrated Ma Calibrated Ma Calibrated Ma Calibrated OoOoooooo00 Printed 08 06 2004 0000 0000000000 OoOooo000000 HO T 99 MODELS address O H xtony OFF Rate Os Had on zero OFF Ramping O analog Readout 4 5vto 5 5 Extemal Regulation OFF Readodt From sensor measurement Readout DAC Offset 1000m Oo Page 1 sur 1 E The Read command button allows reloading the identification parameters of the mass flow controller D10 092 V03 Digisoft V3 25 for Digital MFC 16 qualiflow 7 3 CALIBRATION SLOT tab In this Digisoft tab all calibrations available in memory are described with full scale unit gas process name gas process symbol gas process SEMI Code Ref SEMI E52 1000 Practice for referencing gases used in digital mass flow controllers and the gas used during calibration The calibration curve can be selected changing the calibration slot from the scroll down list in Calibration slot currently in use ioi xj M DEMO MODE Qualiflow s Digital Control 3 25 25 May 2004 E SERIAL INFORMATION CALIBRATION SLOT REGULATION ALARMS OTHERS CALIBRATION SLOT CURRENTLY IN USE p Make a new Gas Slot Wizard Full scale Unit Gas Gas
18. essage can appear permanently in any other regulation modes as a result of a circuit failure or open circuit from the sensor D10 092 V03 Digisoft V3 25 for Digital MFC 27 qualiflow 7 5 ALARMS tab 7 5 1 Overview Bl DEMO MODE Qualiflow s Digital Control 3 25 25 May 2004 imi x SERIAL INFORMATION CALIBRATION SLOT REGULATION ALARMS OTHERS r History recorder sample rate lo seconds E write Total history 0 0 0 h mn s Regulation Monitoring Alarm Marnin OFF iv ON Regulation Delay fi Seconds Delta Min jo E History 34 C ON OFF Celta Max jo E ze Erasetlisto Hold on zero C ON e OFF Head history data fai Write wf Read and Acqui i Clear window Safe state valve Close Safe valve value o write Modbus Calb Slot Full Scale Unit Process Gas espero f EXIT Address 600 Reading OK 7 5 2 Regulation monitorin The regulation monitoring panel contains all data to parameter the regulation alarm Regulation Monitoring Alarm Warnin C OFF i ON Regulation Delay E Seconds Delta Min i d Delta Mas jo E Es Write After the alarm delay there will be an alarm if the readout is not contained between the Flow Delta min and the Flow Delta max The alarm delay is in seconds and the max and min Delta are in per thousand of the full scale The user chooses three parameters the Delta min
19. ext to begin copying files Current Settings Setup Type Custom Target Folder N C Program Files Gualiflow Digis oft User Information Name Gilles SANCHEZ Company Qualiflow InstallShield e Once files are copied the following dialog ends the installation wizard Setup Complete E Setup has finished copying files to vour computer Setup will now launch the program Select your option below Yes Launch the program file Click Finish ta complete Setup InstallShield NOTICE When the installation wizard is completed you do not need to restart your computer D10 092 V03 Digisoft V3 25 for Digital MFC qualiflow 4 2 Running Digisoft V3 25 Before starting the program we do recommend to Read carefully the whole manual Connect one MFC on one mass flow serial port prior to run Digisoft To start the program see section 6 for further information 4 3 Command line parameters Command line parameters can be used with the executable file running the software The syntax is as follows C N directory Digisoft exe paraml param2 Parameters e demo Digisoft enters demo mode MFC is not needed in this mode e nologo the welcome logo does not show up e comx access directly the com number X default com e addy access directly the MFC number Y default add1 e bdrZ set baud rate example BDR19200 default BDR2400 e ms allow for multi session Notice D10 0
20. he option External sensor is activated in the REGULATION tab the legend includes the external sensor as follows D10 092 V03 Digisoft V3 25 for Digital MFC 21 qualiflow Magnify Double clicking with the left mouse button anywhere inside the graphic area allows to magnify A new double click restores its initial size This can also be performed by using the contextual menu Here is an illustration of the Magnify mode for graphic area M DEMO MODE Oualiflow s Digital Control 3 25 25 May 2004 SERIAL INFORMATION CALIBRATION SLOT REGULATION ALARMS OTHERS 151 x Setpoint 75 00 Flow readout 75 02 Valve 21639 15 1 0 15 1 30 15 20 802 100 Specific atl ff EXIT Current values for setpoint and readout are also displayed They are displayed differently depending on the graphic area mode used normal or extended Modbus Calib Slot Full Scale Unit Process Gas Valve amp Setpoint amp Flow Reading OK Setpoint 75 00 Flow readout Setpoint 75 02 75 00 x of F 5 Flow readout Valve 75 01 al ES 21 639 D10 092 V03 Digisoft V3 25 for Digital MFC 22 qualiflow If the option External sensor is activated in the REGULATION tab the readouts includes the external sensor as follows Ext sensor 0 00 Setpoint Setpoint 76 00 soo ars Flow readout Flow readout 75 00 External sensor Valve You can zoom in by dragging a rectangle with the m
21. ils Automatic Autozero ON lo 0 gt 3276 8 OFF 7 6 5 Readout DAC Offset An offset can be added to the readout value with a range of 1000 mV The purpose of this offset value is to read OV when gas flow is nil Type the value of offset in the text field and press the Write button Readout DAC Offset 1 000 mv 0 gt 1000 5 write D10 092 V03 Digisoft V3 25 for Digital MFC 32 qualiflow 7 6 6 Soft start On Off The Soft Start function avoids big overshoots when starting opening the gas flow in the line This overshoot which appears when you suddenly open the supply valve is due to the pressure wave which travels from the supply valve to the mass flow controller This pressure wave creates a rapid flow change that the controller s sensor reads r Soft start copy Delay D 3 12s OFF S write The Soft Start function will not reduce the spike It will just delay the opening of the mass flow controller valve so that the regulation is not disturbed by the spike Many hardware solutions can reduce this spike without playing with the Soft Start function e Check that the pressure upstream from supply valve is not too high The pressure drop across the MFC should not exceed 2bar 30psi You can try to reduce the upstream pressure and see if it affects the amplitude of the spike e fitis not enough the best solution consists in placing the pressure regulator between the su
22. isoft V3 25 for Digital MFC qualiflow 6 Software Starting Before starting the program we do recommend to e read carefully the whole manual e connect one MFC on one mass flow serial port prior to run Digisoft Then click on the following icon from the program folder of the Start menu of Windows Digisoft exe The introduction frame appears on screen Then the main Digisoft windows appears amp DEMO MODE Qualiflow s Digital Control 3 25 25 May 2004 T B t B 2003 Digisot C spy gli Qualiflaw S vanced solutions for thin film deposition qualiflow D10 092 V03 Digisoft V3 25 for Digital MFC 10 qualiflow Digisoft 3 25 will automatically recognize the baud rate available 2400 9600 19200 38400 baud rates The following window may appear e If no mass flow is connected or if there is a bad connection e If the Modbus device identifier address of the mass flow is not set to 1 Looking for an MFC please wait Scanning Com 1 Address 2 Baud rate 9600 In case no mass flow is connected or if there is a bad connection Digisoft will scan from address 0 to 255 without being able to find any MFC In case the Modbus device address of the mass flow is not set to 1 Digisoft will scan from address O until the Modbus device identifier address of the mass flow is found and then the main Digisoft window will appear If you click Cancel the following warning message
23. ling time second D10 092 V03 Digisoft V3 25 for Digital MFC 25 qualiflow User readout parameters e Beta Adjustment coefficient no unit e User readout filter Cutting frequency Hertz 7 4 9 3 External sensor To access the interface of the external sensor regulation control parameters the external sensor option from the Regulation tab must be ON In order to do so you need to run Digisoft with CUSTOMER level ON See section 7 2 4 for further details about level access in Digisoft External sensor C ON tv OFF When ON is ticked the following window shows the parameters for the external sensor Five parameters can be modified with CUSTOMER level e Kp Gain no unit e Ti Integration time second e Td Derivate time second e Beta Adjustment coefficient no unit e User readout filter Cutting frequency Hertz Regulation control parameters Slot number 1 Extemal sensor AR Bb x Sensor filter 1 0000 00 Hz Kel nh 3 Tdf E Tau 4 5 amp Beta i User RO filter 1 58 Hz Valve Group Init valve 1 bit Min valve 1 bit Max valve 40000 bit Threshold 5 CE White Disable linearization D10 092 V03 Digisoft V3 25 for Digital MFC 26 qualiflow The external sensor group is divided into three parts Sensor conditioning parameters e A Gain no unit e B Offset percent of external sensor full scale e Sensor filter Cutting frequency for e
24. low controller Only Qualiflow s engineer can grant you access to these parameters Regulation control parameters Slot number 1 mu Internal sensor Tau 0 z Gamma 0 ensor Hier 10000 00 Beta D User RO filter 1 DOCE OLI Hz Valve Group nit valve o bil Hin valve o bit Max valve o bit Write ce ce ce ce ce Threshold 0 sable lineanzation D10 092 V03 Digisoft V3 25 for Digital MFC 24 qualiflow 7 4 9 2 Internal sensor If the external sensor option from the Regulation tab is off the window shows the parameters for the internal sensor and the valve group Three parameters can be modified with CUSTOMER level e St Desired settling time second e Beta Adjustment coefficient no unit e User readout filter Cutting frequency Hertz Regulation control parameters Slot number 1 u E Internal sensor Tau o s Gamma 0 Sensor filter Ii 0000 00 Hz User RO filter 1 0000 00 Hz Valve Group Init valve fo bit Min valve O bit Mas valve o Hit Threshald 0 Disable lineanzation The internal sensor group is divided into three parts Sensor conditioning parameters e Tau2 Second order time constant no unit e Gamma Weighting coefficient no unit e Sensor filter Cutting frequency for sensor signal Hertz Regulation parameters e K Static gain no unit e Tau MFC time constant second e St Desired sett
25. ouse around the area of interest Zoom IMPORTANT NOTICE The rectangle must be dragged from top left to bottom right corner Un zoom is performed by dragging a rectangle from bottom right to top left corner Un zoom can also be performed by using the contextual menu While in zoom state curves do not scroll and will disappear as lifespan expires Print The contextual menu allows printing the current graphic on the default printer It is recommended to magnify the drawing before printing 142820 14 8 15 14 8 30 14 8 45 14 870 14 98 15 Clear This command erases the current curve of the graphic area D10 092 V03 Digisoft V3 25 for Digital MFC 23 qualiflow 7 4 8 Sample rate Acquisition can be started or stopped using the button below The acquisition speed is also adjustable by the sample rate cursor Acquisition E Stop Sample rate 7 4 9 Dynamic adjustment 7 4 9 1 Overview The Dynamic Adjustment command button opens a window to tune the PID of the system for the use of an internal or external sensor and the valve You need CUSTOMER level access to modify those parameters In BASIC level parameters are read only NOTICE The interface of this window depends of the firmware version If version is 7 40 the following window appears If firmware is older than 7 40 the old interface will appear Modifying dynamic parameters is restricted to qualified users only as you can damage the mass f
26. pply valve and the MFC In such a case the pressure regulator will absorb the pressure wave and the spike should be reduced e Contact Qualiflow support team for further information When Soft Start function is ON two parameters can be tuned e The delay parameter is the time between the setpoint change and the regulation really starts Set it first to about 3 seconds This means that the mass flow controller will wait 3 seconds before regulating It should be enough time for the pressure spike to decay If you don t have spike anymore set it to 0 05 second and the MFC will start working just after the setpoint change e For fine adjustment the CUSTOMER level must be entered in order to access the Init valve parameter The Init Valve is the initial valve voltage applied to the valve when the setpoint changes from a close position to a non zero setpoint value The mass flow controller applies Init Valve value for Delay time whenever the setpoint passes from 1 540 to any gt 1 5 of full scale This is to make sure the valve is under control in pneumatic critical situations e g shut off valves opening Note e If your flow controller is Normally Closed try to increase the Init Valve value until you get a reasonable settling time e If your flow controller is Normally Open try to decrease the nit Valve value until you get a reasonable settling time D10 092 V03 Digisoft V3 25 for Digital MFC 33 qualiflow Soft S
27. pyrglial Qualif pa a O advanced solutions for thin film deposition qualiflow D igisoft 3 25 25 May 2004 Modbus Call Slot Full Scale Unit Process Gas N a Nas ae Hl EXIT Soft version Reading OK For further information feel free to contact your OUALIFLOW sales representative A list of Oualiflow s representatives is available on our web site at www gualiflow com 2 Reference Documentation The following documents represent also an interesting source of information and give further information on the use of Digisoft tools and options e SEMI E52 1000 Practice for referencing gases used in digital mass flow controllers e External readout application note External readout MFC Applications pdf e Multicalibration application note Multicalibration pdf D10 092 V03 Digisoft V3 25 for Digital MFC 1 qualiflow 3 Scope amp Compatibility This manual applies to QUALIFLOW Digisoft software V3 25 Version 3 25 is compatible with MFC Firmware 7 40 and higher A backwards compatibility has been kept although support for the version 6 81 might present some weakness However it is recommended to upgrade your firmware to the last in board software rev 7 40 for best results WARNING Firmware V7 40 is not compatible with versions of Digisoft older than V3 25 Feel free to contact Qualiflow for more information Required configuration Any compatible PC with 486 or Pentium processor with CD ROM 64
28. ss flows are on the same cable RS485 cable As Digisoft 3 25 program is designed to run with only one mass flow per connection it is not recommended to change the Modbus address MFC address Curent address l a zd Validate current address New address p Fe Titer ly 4 any write new address Search Modbus odores 7 2 3 Valve type According to the mass flow controller configuration the respective checkbox is selected by default when Digisoft starts NO normally open or NC normally closed Valve Type E fi Normal Openi f NEIN armati Close The two functions are activated in CUSTOMER access level See section 7 2 4 for further details on access level Valve Type f NO Normally Open NC Normally Closed D10 092 V03 Digisoft V3 25 for Digital MFC 14 qualiflow 7 2 4 Access level The Access level button asks for a password for more advanced functions Password for Plant Level X Enter Password xxxx Two levels access are set in Digisoft BASIC and CUSTOMER By default when Digisoft 1s started the BASIC level is on Password for CUSTOMER level is provided to the user if trained on Digisoft by Qualiflow s engineers BASIC level BASIC level is run by default when Digisoft starts If you want to change to CUSTOMER level select the INFORMATION tab and click on Access Level CUSTOMER level To access this level enter the password in the Access Level dialog
29. t Process Gas Soft Version Reading DK 2 A communication progress bar D10 092 V03 Digisoft V3 25 for Digital MFC 12 qualiflow 7 2 INFORMATION tab 7 2 1 Overview The identification frame provides you with the main identification parameters of the connected MFC e Manufacturer identifier e Product identifier e Serial number of MFC e Serial number of the sensor e Number of the soft version of the micro controller inside the mass flow controller firmware version Kl DEMO MODE Qualiflow s Digital Control 3 25 25 May 2004 m i x c x SERIAL INFORMATION CALIBRATION SLOT REGULATION ALARMS OTHERS MFC addres Current address 1 ES J Validate current address Mew address zl ks Identification Manufacturer Identifier F Product Identifier MassFlow Seral Number sensor Seral Number Write nen address Search Modbus address Software Version 7 99 Valve Type f HO Normally Openi HE Normally Closed PRINT EB Read Write Modbus Calb Slot Full Scale Unit Process Gas EN HW mer f ExT Valve Type Reading Ok D10 092 V03 Digisoft V3 25 for Digital MFC 13 qualiflow 7 2 2 MFC address The MFC address frame allows to change or search for the Modbus address of the mass flow The Modbus address allows to give a different address to each mass flow when several ma
30. t COM C mv C Direct control 75 01 x EU ier in FS C Safe value External sensor UM v OFF AUTO zera Sipon Active Acquisition C Analog Digital a Command valve sample rate p cP RD 22044 5 15 2 30 45 1 30 15 20 Modbus Call Slot Full Scale Unit Process Gas alve amp Setpoint amp Flow Reading OK v The regulation can be chosen either in digital mode or analog mode e Analog mode the setpoint is the 0 5V voltage applied on pin 8 of the SUB D15 connector e Digital mode the setpoint is a numerical value transmitted by the RS232 or the RS485 connection D10 092 V03 Digisoft V3 25 for Digital MFC 18 qualiflow 7 42 Actuator menu This frame sets the actuator mode according to your requirements Actuator menu Fully open Closed Regulation Hald last value Direct control Safe State Safe value 01010 101070 10 The actuator selector allows e Fully open open the valve e Closed close the valve e Regulation Standard regulation mode e Holdlast value Keep the valve voltage constant e Direct Control The setpoint is directly converted in valve command e Safestate Goes in the safe state defined in the Alarm Page e Safe value Applies to the valve the safe value defined in the Alarm Page 7 4 3 Digital mode According to the mass flow controller configuration the mode is automatically set when Digisoft starts The mode can be set by the operator
31. tart function for a Normally Closed MFC Flow SetPoint Flow Readout Valve Voltage Soft Start i Delay lt lt Consequence of a too low Init Valve Flow SetPoint Flow Readout Valve Voltage Ideal Init Valve E p E ER ele alalla T TTL Soft Start Additional Delay Delay J EE L D10 092 V03 Digisoft V3 25 for Digital MFC time time qualiflow Consequence of a too high Init Valve Flow SetPoint Flow Readout Valve Voltage Ideal Init Valve time Soft Start Delay 7 6 7 Total accumulator The total value indicates the cumulative flow in sccm since the last initialization It is useful to have a look on the gas consumption Total Accumulator Total 2 scc EA Read Total 2 SCC Read Hour 2 h Read e Total is memorized in non volatile storage when historic function is ON and will not be reset in case of power shut down FRE e Total 2 will be automatically reset in case of power shut down e Hour states the number of working hours for the mass flow controller Note that both total values are reset to zero when there is a change of calibration slot Total can be typically used to monitor the total gas consumption Total 2 can be used to monitor gas consumption during a process batch oOo D10 092 V03 Digisoft V3 25 for Digital MFC 35
32. the Delta max and the Delay alarm to adjust the regulation alarm Delta min and Delta max in o FS are the maximum differences between the readout and the setpoint to assure before the delay time If the MFC does not correctly regulate the alarm is on D10 092 V03 Digisoft V3 25 for Digital MFC 28 qualiflow until the user inhibits it For example if the pressure is too low the MFC could not regulate the flow see the figure below therefore an alarm signal will be generated until acknowledgment The regulation alarm also drives the regulation LED e Readout and Set point inside the delta Green regulation LED On e Readout and Set point outside the delta from less than delay transient time green regulation LED is blinking e Readout and Set point outside the delta from more than delay regulation error green regulation LED is OFF and Red Alarm LED is ON if Alarm Warning is ON Readout F S Regulation LED aff i Alarm on Delta Max F S zz Delta Min 4 F S 0 Alarm Delay Time s ADJUSTABLE ALARM One issue with the regulation monitoring 1s that it may generate an alarm when there is no gas at the inlet of the mass flow controller because when there is no gas if the requested setpoint is above 0 the readout will never be equal to the setpoint The mass flow controller is intelligent enough to detect when the readout and the setpoint are not equal because there is no gas However it has
33. xternal sensor signal Hertz Regulation parameters e Kp Gain no unit e Ti Integration time second e Td Derivate time second As an example of PID regulation calibration method you can read the following procedure based on Ziegler Nichols method The closed loop method prescribes the following procedure e Step 1 Disable any D and I action of the controller T 1000 T420 Like a pure P controller e Step 2 Make a setpoint step test and observe the response e Step 3 Repeat the SP test with increased decreased controller gain until a stable oscillation is achieved This gain is called the ultimate gain Ku e Step 4 Read the oscillation period Pu e Step 5 Calculate the parameters according to the following formulas PI Proportional gain 0 45 x Ku integral time Pu 1 2 PID Proportional gain 0 6 Ku integral time Pu 2 derivative time Tu OP Pu Alegler Michols Test User readout parameters e Tau Process time constant second e Beta Adjustment coefficient no unit e User readout filter Cutting frequency Hertz 7 4 10 Specific error message error 140 The point needs to be done on a specific error message error 140 sensor error In Fully Open regulation this message can appear because the flow signal measured by the sensor is higher than the allowed values for full scale In this particular case the message doesn t state an error but a normal running situation However this m
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