Home

Test & Measurement

Contents

1. O 2 VY aD pa 7 aD LOW LEVEL MEASURE amp SOURCE 138 6487 Picoammeter Voltage Source CA 186 1B Ground Connection Cable Banana to Screw Lug Protective Shield Cap 3 lug CS 459 Safety Interlock Plug 7078 TRX 3 Low Noise Triax Input Cable 1m 3 ft High Voltage Banana Cable Set for Voltage Source Output CAP 31 8607 APPLICATIONS e Resistance resistivity measurements e Beam monitoring and radiation monitoring e Leakage current testing in insulators switches relays and other components e Galvanic coupling measurements l V characterization on semiconductor and optoelectronic devices Fiber alignment Circuit test and analysis in DCLF circuits e Sensor characterization Capacitor leakage 1 888 KEITHLEY ws only www keithley com Picoammeter Voltage Source Rear panel triax input This allows the picoammeter to be used in floating operation up to 500V When not floating the addition of a triax to BNC adapter allows inexpensive easy to use BNC cables to be employed rather than more expensive triaxial cables RS 232 and IEEE 488 interfaces These interfaces make it easy to integrate the Model 6487 into automated test and measurement systems Scaled voltage analog output This output allows the Model 6487 to transmit measurement results to devices like DMMs data acquisition cards oscilloscopes or strip chart recorders Built in Tr
2. INPUT BIAS CURRENT lt 4fA at T Temperature coefficient 0 5fA C 2nC range TEMPERATURE Thermocouple ACCURACY 1 Year THERMOCOUPLE 18 28 C TYPE RANGE rdg C K 25 C to 150 C 0 3 1 5 C NOTES 1 Excluding probe errors T 5 C 1 PLC integration time HUMIDITY ACCURACY 1 Year RANGE 18 28 C rdg RH 0 100 0 3 0 5 NOTES 1 Humidity probe accuracy must be added This is 3 RH for Model 6517 RH up to 65 C probe environment not to exceed 85 C ae av GUT Tem lt a INTERLOC car l nls KEITHLEY TI kenner TOL Ha mn L ka ry Model 6517B rear panel 1 888 KEITHLEY wis only www keithley com Electrometer High Resistance Meter IEEE 488 BUS IMPLEMENTATION IMPLEMENTATION SCPI IEEE 488 2 SCPI 1999 0 TRIGGER TO READING DONE 150ms typical with external trigger RS 232 IMPLEMENTATION Supports SCPI 1991 0 Baud Rates 300 600 1200 2400 4800 9600 19 2k 38 4k 57 6k and 115 2k FLOW CONTROL None Xon Xoff CONNECTOR DB 9 TXD RXD GND GENERAL OVERRANGE INDICATION Display reads OVERFLOW for readings gt 105 of range The display reads OUT OF LIMIT for excesive overrange conditions RANGING Automatic or manual CONVERSION TIME Selectable 0 01PLC to 10PLC MAXIMUM INPUT 250V peak DC to 60Hz sine wave 10sec per minute maximum on mA ranges MAXIMUM COMMON MODE VOLTAGE DC to 60Hz sine wave El
3. onl Lu Lu onl onl 126 Series 3700A a GE Combines the functions of a system switch and a high performance multimeter LXI Class B compliance with IEEE 1588 time synchronization 312 to 7 2 digit measurement resolution Embedded Test Script Processor TSP offers unparalleled system automation throughput and flexibility Extended low ohms 19 range with 100nQ resolution Extended low current 10pA range with 1pA resolution gt 14 000 readings second Low noise lt 0 1ppm rms noise on 10VDC range Expanded dry circuit range PANOJ Four wire open lead detection source and sense lines For more information about Series 3700A systems see page 162 1 888 KEITHLEY ss ony P 5 L ear i z z 2 E ee co of System Switch Multimeter and Plug In Cards A Series 3700A system combines the functionality of an instrument grade relay switching system with a high per formance multimeter Integrating the multimeter within the mainframe ensures you of a high quality signal path from each channel to the multimeter This tightly integrated switch and measurement system can meet the demanding application requirements of a functional test system or provide the flexibility needed in stand alone data acquisi tion and measurement applications It is ideal for multiple pin count applications where relay switching can be used to connect multiple devices to source and measurement instr
4. vn lt x Lu LJ gt T O A Tektronix Company 153 Lu 9 fa O Vv oF Lu T x L LJ Lu ar 154 BOMH ARBITRARY WAVEFORM GE IE Ra TR Ferd High Low Gisge Lem BEST IN CLASS PERFORMANCE 50MHz sine wave frequency 25MHz square wave frequency Arbitrary waveform generator with 256k point 14 bit resolution Built in function generator capability includes sine square triangle noise DC etc Precision pulses and square waves with fast 5ns rise fall times Built in 1OMHz external time base for multiple unit synchronization Built in AM FM PM FSK PWM modulation Frequency sweep and burst capability Waveform creation software KIWAVE included LXI Class C compliance 1 888 KEITHLEY u s only Output OFF 50 000 00MHz 4 Er fesse V arh i Ea ae H on uy at p A t awh Tiat Burst ie Sere tity Hele 5 ee ae S0MHz Arbitrary Wavetorm Function Generator Keithley has paired the best in class performance of the Model 3390 Arbitrary Waveform Function Generator with the best price in the industry to provide your applications with superior wave form generation functionality and flexibility at an unparalleled price From its fully featured Arbitrary Waveform Generator ARB to its high speed and ease of use the Model 3390 is a complete signal genera tion solution for all you
5. 6 Calibration period One year GENERAL SOURCE CAPACITANCE Stable to 10 0nF typical INPUT BIAS CURRENT gt 50fA max 23 C INPUT VOLTAGE BURDEN 6 4 0mV maximum MEASUREMENT SPECIFICATIONS VOLTAGE SOURCE SLEW RATE 3 0ms V typical Accuracy Temperature Coefficient DC Input Maximum 23 5 C 018 C amp 28 50 C impedance COMMON MODE VOLTAGE 200NDE Range Resolution rdg offset rdg offset C maximum COMMON MODE ISOLATION Typically 10 Q2 in parallel 2 000000 nA 1 fA 1 00 2pA 0 01 200 fA 20kQ with 150nF 20 00000 nA 10 fA 0 40 2pA 0 01 200 fA 20 kQ OVERRANGE 105 of measurement range 200 0000 nA 100 fA 0 30 200 pA 0 02 20 pA 200 Q MEMORY BUFFER 6000 readings two 3000 point buf 2 000000 uA 1 pA 0 20 200 pA 0 02 20 pA 200 Q fers Includes selected measured value s and time 20 00000 uA 10 pA 0 10 20 nA 0 01 2nA 20 Q stamp 200 0000 uA 100 pA 0 10 20 nA 0 01 2nA 20 Q PROGRAMMABILITY IEEE 488 2 RS 232 five user defin 2 000000 mA 1nA 0 10 2A 0 02 200 nA 0 2 Q able power up states plus factory default and RST 20 00000 mA 10 nA 0 10 2A 0 02 200 nA 0 2 Q OUTPUT ENABLE CONNECTOR Output Enable Active low input Input line SOT start of test trigger input VOLTAGE BIAS SPECIFICATIONS POWER SUPPLY 100V 120V 220V 240V 10 50Hz or Accuracy Maximum Temperature 60Hz 50VA maximum Range Resolution 23 C 5 C Current Load Regulation Coefficient WARRANTY
6. DC Current Source The Model 6221 can also expand the capabilities of lock in amplifiers in applications that already employ them For example its clean signals and its output synchronization signal make it an ideal output source for lock in applications such as measuring second and third harmonic device response Model 2182A Nanovoltmeter The Model 2182A expands upon the capabilities of Keithley s original Model 2182 Nanovolt meter Although the Model 6220 and 6221 are compatible with the Model 2182 delta mode and differential conductance measurements require approximately twice as long to complete with the Model 2182 as with the Model 2182A Unlike the Model 2182A the Model 2182 does not sup port pulse mode measurements Ramp to Amps gj 100E 3 ARB Wavetorm Help Pages i I 2000 2000 Figure 4 The Model 6221 and the free example start up control software make it multiplying stringing together or applying filters to standard wave shapes Source Current A l Programmable 50us to 12ms Voltage measurement noise at line frequency Ne EEO Ne Measurement integration period Measuring difference voltage eliminates Measured response voltage line frequency noise DC offsets 1 60 second 1 50 when operating off 50Hz power Line synchronized pulse measurements Pulsed measurement without line sync Figure 3 Measurements are line synchronized to minimize 50 60Hz interference 1 888 KEITHLEY wis on
7. Figure 5a Subtracting thermoelectric EMFs with Offset Compensation a Measurement with Positive Polarity ___Veme Vu Vemr lIs Rs b Measurement with Negative Polarity Vim Figure 5b Canceling thermoelectric EMFs with Current Reversal KEITHLEY A Tektronix Company VY gt a 2 Somes _ aD aD B VY eD aD QO Ta o Vv aD w 5 NS aD 00 gt n 2 _ oO b e Uj B O ales D LOW LEVEL MEASURE amp SOURCE 111 Vv QO 7 G aD G _ 7 _ aD z aD b YW aD aD QO _ m2 VY oO Some c p z a 2 Gn S O 2 a os D Se LOW LEVEL MEASURE amp SOURCE 112 Technical Information Three Step Delta Technique The three step delta technique eliminates errors due to changing thermoelectric voltages offsets and drifts and significantly reduces white noise This results in more accurate low resistance measurements or more accurate resistance measurements of any type when it is necessary to apply very low power to DUTs that have limited power handling capability This technique offers three advantages over the two step delta technique A delta reading is a pair of voltage measurements made at a positive test current and a negative test current Both the two
8. OVERSHOOT lt 2 JITTER RMS 300ps 0 1ppm of period NOISE BANDWIDTH 20MHz typical 1 888 KEITHLEY wis only www keithley com ARBITRARY FREQUENCY 1uHz to 10MHz LENGTH 2 to 256K RESOLUTION 14 bits including sign SAMPLE RATE 125Msamples s MIN RISE FALL TIME 30ns typical LINEARITY lt 0 1 of peak output SETTLING TIME lt 250ns to 0 5 of final value JITTER RMS 6ns 30ppm NON VOLATILE MEMORY 4 waveforms 256K points COMMON CHARACTERISTIC FREQUENCY RESOLUTION 1uHz AMPLITUDE RANGE 10mVpp to 10Vpp in 50Q 20mVpp to 20Vpp in Hi Z AMPLITUDE ACCURACY at 1kHz 1 of setting 1mVpp AMPLITUDE UNITS Vpp Vrms dBm AMPLITUDE RESOLUTION 4 digits DC OFFSET RANGE Peak AC DC 5V in 50Q 10V in Hi Z DC OFFSET ACCURACY 2 of offset setting 0 5 of amplitude setting DC OFFSET RESOLUTION 4 digits MAIN OUTPUT IMPEDANCE 50Q typical MAIN OUTPUT ISOLATION 42Vpk maximum to earth MAIN OUTPUT PROTECTION Short circuit protected over load automatically disables main output INTERNAL FREQUENCY REFERENCE ACCURACY gt 10ppm in 90 days 20ppm in 1 year EXTERNAL FREQUENCY REFERENCE STANDARD OPTION Standard EXTERNAL FREQUENCY INPUT Lock Range 10MHz 500Hz Level 100mVpp 5Vpp Impedance 1kQ typical AC coupled Lock Time lt 2 seconds EXTERNAL LOCK RANGE 10MHz FREQUENCY OUTPUT Level 632mVpp 0dBm typical Impedance 50Q typical AC coupled PHASE OFFS
9. Selector Guide Low Current High Resistance Measurements Selector Guide Sources and Source Measure Unit SMU Instruments Source Measure Unit SMU Current Sources Voltage Source Lu 9 O Vv o Lu x vn lt x Lu LJ gt Lu ar 130 low power resistance and I V measurements up to 100kHz Controls 1 Best absolute accuracy of source 2 Resolution for lowest range smallest change in current that source can provide 1 888 KEITHLEY wis only www keithley com source ARB waveforms 2182A like 6220 adds pulsed I V output Programmable voltage limit capability Pulse mode USB port A Greater Measure of Confidence eN Instruments lt MODEL 6220 6221 248 2657A 6430 Page 121 121 335 32 44 B Current Source 120 mA e i Voltage Source 3000 V Sink 180 W CURRENT OUTPUT a 2 pA DC 0 5 Accuracy 2 pA 7 AAC 0 03 10 fA Resolution 100 fA Merlo fA 50 aA SA Maximum 105 mA 105 mA 120 mA 105 mA I VOLTAGE OUTPUT D From 15V 100 uV 5 uV To 5000 V 3000 V 210 V POWER OUTPUT 11W 11W 25 W 180 W 2 2 W V CURRENT LIMIT 5 25 mA 120 mA 1 fA to 105 mA bo VOLTAGE LIMIT 105 V 105 V 0 to 5000 V 3000 V 0 2 mV to 210 V v E VA ACCURACY Setting I 0 05 0 05 0 03 0 03 V 0 01 0 03 0 02 FEATURES SHV High Output Connector 3 Slot Triax 3 Slot Triax Voltage Coax HV Triax 3 Slot Triax Ethernet LXI compliant RS 232
10. Z O ae 2 at A ae o0 c p VY rb _ v DO oO O Oo D Z T O me rs ae gt 60 Oo fo a D E 49 D 7 ro pa O a 7 ai r D D 2 79 49 D v a2 O Z LOW LEVEL MEASURE amp SOURCE 2182A Three Ways to Measure Nanovolts DC nanovoltmeters DC nanovoltmeters and sensitive DMMs both provide low noise DC voltage measurements by using long integration times and highly filtered readings to minimize the bandwidth near DC Unfortunately this approach has limitations particularly the fact that thermal voltages develop in the sample and connections vary so long integration times don t improve measurement precision With a noise specification of just 6nV p p the Model 2182A is the lowest noise digital nanovoltmeter available AC technique The limitations of the long integration and filtered readings technique have led many people to use an AC technique for measuring low resistances and voltages In this method an AC excitation is applied to the sample and the voltage is detected synchronously at the same frequency and an optimum phase While this technique removes the varying DC component in many experiments at high frequencies users can experience problems related to phase shifts caused by spurious capacitance or the L R time constant At low frequencies as the AC frequency is reduced to minimize phase shifts ampl
11. or 10 of reading TRIGGER DELAY 0 to 99 hours 1ms step size EXTERNAL TRIGGER DELAY 2ms lt 1ms jitter with auto zero off trigger delay 0 MEMORY SIZE 1024 readings Math Functions Rel Min Max Average Std Dev Peak to Peak of stored reading Limit Test and mX b with user defined units displayed Remote Interface Keithley 182 emulation GPIB IEEE 488 2 and RS 232C SCPI Standard Commands for Programmable Instruments 1 888 KEITHLEY ws only www keithley com Nanovoltmeter GENERAL POWER SUPPLY 100V 120V 220V 240V LINE FREQUENCY 50Hz 60Hz and 400Hz automatically sensed at power up POWER CONSUMPTION 22VA MAGNETIC FIELD DENSITY 10mV range 4 0s response noise tested to 500 gauss OPERATING ENVIRONMENT Specified for 0 to 50 C Specified to 80 RH at 35 C STORAGE ENVIRONMENT 40 to 70 C EMC Complies with European Union Directive 89 336 EEC CE marking requirement FCC part 15 class B CISPR 11 IEC 801 2 IEC 801 3 IEC 801 4 SAFETY Complies with European Union Directive 73 23 EEC low voltage directive meets EN61010 1 safety standard Installation category I VIBRATION MIL T 28800E Type III Class 5 WARM UP 2 5 hours to rated accuracy DIMENSIONS Rack Mounting 89mm high x 213mm wide x 370mm deep 3 5 in X 8 375 in X 14 563 in Bench Configuration with handles and feet 104mm high x 238mm wide x 370mm deep 4 125 in x 9 375 in X14 563 in SHIPPING W
12. 1 Speed Normal 1 0 NPLC filter on Typical Noise Floor 2 One year RMS 1 STDEV 100 Samples 3 Measured as DVin Alin at full scale and zero input currents Range 0 01 NPLC 0 1 NPLC 1 0 NPLC 10 NPLC 4 saan as rae at full scale 20mA and zero load currents 5 Specification by design PRAU ie 5 2 ig a 5 5 i 6 Measured at input triaxial connector as DVin at full scale 20mA Ee z i versus zero input currents 200 0000 nA 200 pA 120 pA 2 pA 500 fA 2 000000 uA 200 pA 120 pA 2 pA 500 fA 20 00000 uA 20 nA 12 nA 200 pA 50 pA 200 0000 uA 20 nA 12 nA 200 pA 50 pA 2 000000 mA 2 uA 1 5 uA 25 nA 5 nA 20 00000 mA 2 uA 1 5 uA 25 nA 5 nA 1 888 KEITHLEY ws only www keithley com A Greater Measure of Confidence A Tektronix Company KEITHLEY Model 6482 specifications Lu UW fa O Vv o Lu fa vn lt x Lu LJ gt T O 133 Picoammeter The 5 2 digit Model 6485 Picoammeter combines Keithley s expertise in sensitive current measure ment instrumentation with enhanced speed and a robust design With eight current measurement ANNANN I m ranges and high speed autoranging this cost BUUU I NIE effective instrument can measure currents from 20fA to 20mA taking measurements at speeds up to 1000 readings per second The Model 6485 s 10fA resolution and superior sensitivity make it well suited for characterizing low current phenomena while its 20mA range lets it measure curr
13. 1 year 10 V lt 400 uV 0 15 of setting 5 mV 20 mA lt 0 30 0 to 20 mA 150 ppm C EMC Conforms to European Union EMC Directive 30 V lt 4 mV 0 3 of setting 50 mV 20 mA lt 0 30 0 to 20 mA 300 ppm C VIBRATION MIL 1 28800F random class 3 SAFETY Conforms to European Union Low Voltage Directive WARM UP 1 hour to rated accuracy DIMENSIONS Rack Mount 89mm high x 213mm wide x 370mm ANALOG OUTPUT SPECIFICATIONS OUTPUT VOLTAGE RANGE output is inverting 7 10V out for positive full scale input 10V out for negative full scale input OUTPUT IMPEDANCE 1kQ typical Accuracy Temperature Coefficient deep 3 5 in x 8 4 in x 14 6 in 23 C 5 C 0 18 C amp 28 50 C Typical Rise Time Bench Configuration with handle and feet 104mm Range rdg offset rdg offset C 10 to 90 high x 238mm wide x 370mm deep 4 1 in x 9 4 in 2 000000 nA 6 0 90 mV 030 7mV 6 1 ms x 14 6 in 20 00000 nA 3 0 9mV 0 11 700 uV 6 1 ms WEIGHT 23 1kg 10 5 Ib 200 0000 nA 6 0 90 mV 0 30 4mV 395 us ENVIRONMENT For indoor use only T TT AT 00 30 n a a Ha Ko Altitude Maximum 2000m 6562 ft above sea level H UZ m i 0 m Us 3 o o o er 200 0000 wA 25 9mV 0 11 400 uV 135 us loa 0 o 70 humidity up to 2 000000 mA 6 0 90 mV 0 30 4mvV 21 us Pe ene 2 20 00000 mA 25 9 mV 0 11 400 uV 21 us Storage 25 to 65 C TYPICAL NOISE FLOOR MEASUREMENT SPECIFICATIONS NOTES
14. FUNCTIONS Amps CONTACT CONFIGURATION Single pole break before make for signal HI input Signal LO is common for all 10 channels and output When a channel is off signal HI is connected to signal LO CONNECTOR TYPE Inputs BNC Outputs Triaxial SIGNAL LEVEL 30V 500mA 10VA resistive load CONTACT LIFE gt 10 closures at maximum signal level gt 10 closures at low signal levels CONTACT RESISTANCE lt 1Q CONTACT POTENTIAL lt 200yV OFFSET CURRENT lt 1pA lt 30fA typical at 23 C lt 60 RH ACTUATION TIME 2ms COMMON MODE VOLTAGE lt 30V peak ENVIRONMENT Operating 0 to 50 C up to 35 C at 70 R H Storage 25 to 65 C A Greater Measure of Confidence MODEL 6522 SPECIFICATIONS CHANNELS PER CARD 10 FUNCTIONS Volts Amps CONTACT CONFIGURATION Single pole break before make for signal HI input Signal LO is common for all 10 channels and output When a channel is off signal HI is connected to signal LO 6517B can also configure chan nels as voltage switches CONNECTOR TYPE Inputs Triaxial Outputs Triaxial SIGNAL LEVEL 200V 500m lt A 10VA resistive load CONTACT LIFE gt 10 closures at maximum signal level gt 10 closures at low signal levels CONTACT RESISTANCE lt 1Q CONTACT POTENTIAL lt 200vV OFFSET CURRENT lt 1pA lt 30fA typical at 23 C lt 60 RH CHANNEL ISOLATION gt 10 Q lt 0 3pF INPUT ISOLATION gt 10 Q lt 125
15. Lu 9 x O T o Lu vn lt x rr Lu Lu 140 6487 Typical Analog 512 Digit Accuracy 1 Year Rise Time 10 to 90 Default rdg offset Typical Damping Range Resolution 18 28 C 0 70 RH RMS Noise ff On 2 nA 10 fA 0 3 400 fA 20 fA 4 ms 80 ms 20 nA 100 fA 0 2 1pA 20 fA ms 80 ms 200 nA 1 pA 0 15 10 pA 1 pA 300 us 1 ms 2 uA 10 pA 0 15 100 pA 1 pA 300 us 1 ms 20 uA 100 pA 0 1 1nA 100 pA 110 us 110 us 200 uA 1 nA 0 1 10nA 100 pA 110 us 110 us 2 mA 10 nA 0 1 100 nA 10 nA 110 us 110 us 20 mA 100 nA 0 1 IpA 10 nA 110 us 110 us TEMPERATURE COEFFICIENT 0 18 C amp 28 50 C For each C add 0 1 x rdg offset to accuracy spec INPUT VOLTAGE BURDEN lt 200V on all ranges except lt ImV on 20mA range MAXIMUM INPUT CAPACITANCE Stable to 10nF on all nA ranges and 2A range 1uF on 20uA and 200A ranges and on mA ranges MAXIMUM CONTINUOUS INPUT VOLTAGE 505 VDC NMRR 50 or 60Hz 60dB ISOLATION Ammeter Common or Voltage Source to chassis Typically gt 1x10 Q in parallel with lt 1nF MAXIMUM COMMON MODE VOLTAGE between chassis and voltage source or ammeter 505 VDC ANALOG OUTPUT Scaled voltage output inverting 2V full scale on all ranges 2 5 2mV ANALOG OUTPUT IMPEDANCE lt 10002 DC 2kHz VOLTAGE SOURCE Accuracy 5 Noise Typical Typical Range Step Size prog offset p p Temperature Rise Time Fall Time
16. or resistivity by the seventh reversal on most materials i e by discarding the first three readings For example a 1mm thick sample of 10 Q2 cm material can be measured with 0 3 repeatability in the Model 8009 test fixture provided the background current chang es less than 200fA over a 15 second period Simple DMM like Operation The Model 6517B is designed for easy DMM like operation via the front panel with single button control of important functions such as resistance measurement It can also be controlled via a built in IEEE 488 interface which makes it possible to program all functions over the bus through a computer controller High Accuracy High Resistance Measurements The Model 6517B offers a number of features and capabilities that help ensure the accuracy of high resistance measurement applications For example the built in voltage source simplifies determining the relationship between an insula tor s resistivity and the level of source voltage used It is well suited for capacitor leakage and insulation resistance measurements tests of the surface insulation resistance of printed circuit boards voltage coefficient testing of resistors and diode leakage characterization Temperature and Humidity Stamping Humidity and temperature can influence the resistivity values of materials significantly To help you make accurate comparisons of readings acquired under varying conditions the Model 6517B offers
17. resolution and speed that are equal or superior to our earlier electrometers The Model 6514 s built in IEEE 488 RS 232 and digital I O interfaces make it simple to configure fully automated high speed systems for low level testing The 5 2 digit Model 6514 is designed for applica tions that demand fast yet precise measurements of low currents voltages from high resistance sources charges or high resistances The Model 6514 s exceptional measurement perfor mance comes at an affordable price While its cost is comparable with that of many high end DMMs the Model 6514 offers far greater current sensitivity and significantly lower voltage burden as low as 20uV than other instruments can provide The Model 6514 offers the flexibility and sensitivity needed for a wide array of experiments provid ing better data far faster than older electrometer designs Applications include measuring currents from light detectors and other sensors beam experiments and measuring resistances using a current source In addition to use by researchers in areas such as physics optics and materials science the Model 6514 s affordable price makes it an attractive alternative to high end DMMs for low current measurement applications such as testing resistance and leakage current in switches relays and other components For more information on how the Model 6514 does this refer to the section titled Low Voltage Burden The Model 6514 build
18. the impedance of the DUT forms a voltage divider If the DUT resistance is entirely predictable the current can be known but if the DUT resistance is unknown or changes as most devices do then the current isn t a simple function of the voltage applied The best way to make the source predictable is to use a very high value series resistor and accordingly high voltage source which is in direct contradiction with the need for compliance While it s possible to know if not control the actual current coming from such an unpredictable source this also comes at a cost This can be done with a supplemental measurement of the current such as using a voltmeter to measure the voltage drop across the series resistor This measurement can be used as feedback to alter the voltage source or simply recorded Either way it requires additional equipment which adds complexity or error To make matters worse if the homemade current source is made to be moderately predictable by using a large series resistor this readback would require using an electrometer to ensure accuracy Precision low current sourcing Lu 9 x O Vv o Lu vn lt x Lu LJ gt T O KEITHLEY A Tektronix Company www keithley com A Greater Measure of Confidence 123 Precision low current sourcing Lu 9 x O Vv o Lu vn lt x Lu LJ gt Lu ar 124 6220 6221
19. 2 Dual Fixed Rack Mounting Kit GPIB INTERFACES KPCI 488LPA JEEE 488 Interface Controller for the PCI Bus KUSB 488B IEEE 488 USB to GPIB Interface Adapter 1 888 KEITHLEY ss ony Lu U m e Vv o Lu oe m Vv x Lu onl Lu Lu onl onl 132 A Greater Measure of Confidence A Tektronix Company 6482 Dual Channel Picoammetet Voltage Source TYPICAL SPEED AND NOISE REJECTION Readings per Second SPECIFICATION CONDITIONS This document contains specifications and supplemental information for the Model 6482 Dual Channel Picoammeter Voltage Source instrument Specifications are the standards against which the Model 6482 is tested Upon leaving the factory the Model 6482 meets ale o GPIB GPIB these specifications Supplemental and typical values are nonwarranted apply at 23 C and are provided solely as useful information Digits SCPI 488 1 NPLC NMRR The Model 6482 provides two independent picoammeter voltage source channels for a wide range of measurement applications The 4i 700 900 0 01 Model 6482 includes an analog output jack on the rear panel for each channel 51 60 475 01 Source and measurement accuracies are specified at the Model 6482 terminals under these conditions 6Y 58 58 1 60 dB 1 23 5 C lt 70 percent relative humidity 2 After a one hour warm up period 3 Speed normal 1 NPLC A D autozero enabled 5 Properly zeroed operation
20. 20mA in decade steps This provides for all photodetector current measurement ranges for testing laser diodes and LEDs in applications such as LIV testing LED total radiance measurements measurements of cross talk and insertion loss on optical switches Model 2502 rear panel A Greater Measure of Confidence A Tektronix Company Lu 9 O r o Lu 7 lt x Lu LJ gt T O 141 Dual Channel Picoammeter and many others The Model 2502 meets industry testing APPLICATIONS requirements for the transmitter as well as pump laser Scanning electron Dual Channel modules The extensive current measurement range pro microscope SEM beam Picoammeter vides excellent sensitivity and resolution for beam current measurements and radiation monitoring measurements Production testing of User s Manual High Accuracy Dark Current Measurements e Laser diode modules The Model 2502 s 2nA current measurement range is ideal e Chip on submount laser for measuring dark currents and other low currents with diodes ACCESSORIES AVAILABLE 1fA resolution Once the level of dark current has been LEDs 7007 1 Shielded IEEE 488 Cable 1m 3 3 ft determined the instrument s REL function automatically 7007 2 Shielded IEEE 488 Cable 2m 6 6 ft subtracts the dark current as an offset so the measured e Passive optical 7009 5 Shielded RS 232 Cable values are more accurate for optical power measurements componen
21. 485 e m2 offering an additional 20mA measurement range as well A008 Output uo ue R Battery Option Yes No as much higher measurement speeds With a top speed Storage Buffer 100 points 2500 points of up to 1000 readings per second the Model 6485 is the fastest picoammeter Keithley has ever made It offers ten times greater resolution than the Model 485 on every range A time stamped 2500 reading data buffer provides minimum maximum and standard deviation statistics A built in emulation mode simplifies upgrading existing applications originally configured with a Model 485 This emulation mode makes it possible to control the Model 6485 with any custom code written to control the Model 485 Refer to the comparison table for additional information When do you need a picoammeter Measuring low DC currents often demands a lot more than a digital multimeter DMM can deliver Generally DMMs lack the sensitivity required to measure currents less than 100nA Even at higher currents a DMM s input voltage drop voltage burden of hundreds of millivolts can make accurate current measurements impossible Electrometers can measure low currents very accurately but the circuitry needed to measure extremely low currents combined with functions like voltage resistance and charge measurement can increase an electrometer s cost significantly The Model 6485 Picoammeter combines the economy and ease of use of a DMM with low current sensitivi
22. 7078 TRX 3 Low Noise Triax Cable 3 Slot Triax Connectors 0 9m 3 ft 7078 TRX 10 Low Noise Triax Cable 3 Slot Triax Connectors 3m 10 ft 7078 TRX 20 Low Noise Triax Cable 3 Slot Triax Connectors 6m 20 ft 8501 1 Trigger Link Cable 1m 3 3 ft 8501 2 Trigger Link Cable 2m 6 6 ft 8503 Trigger Link Cable to 2 male BNCs 1m 3 3 ft 8607 1kV Source Banana Cables PROBES 6517 RH Humidity Probe with Extension Cable 6517 TP Temperature Bead Probe included with 6517B TEST FIXTURE 8009 Resistivity Test Fixture OTHER CS 1305 Interlock Connector ADAPTERS 237 BNC TRX Male BNC to 3 Lug Female Triax Adapter 237 TRX NG Triax Male Female Adapter with Guard Disconnected 237 TRX T 3 Slot Male Triax to Dual 3 Lug Female Triax Tee Adapter 237 TRX TBC 3 Lug Female Triax Bulkhead Connector 1 1kV rated 7078 TRX BNC 3 Slot Male Triax to BNC Adapter 7078 TRX GND 3 Slot Male Triax to BNC Adapter with guard removed 7078 TRX TBC 3 Lug Female Triax Bulkhead Connector with Cap RACK MOUNT KITS 4288 1 Single Fixed Rack Mounting Kit 4288 2 Dual Fixed Rack Mounting Kit SCANNER CARDS 6521 Low Current Scanner Card 6522 Voltage Low Current Scanner Card GPIB INTERFACES KPCI 488LPA JEEE 488 Interface Controller for the PCI Bus KUSB 488B JEEE 488 USB to GPIB Interface Adapter 1 888 KEITHLEY ws only www keithley com Electrometer High Resistance Meter produces a highly repeatable accurate measure ment of resistance
23. AMPS RANGE RESOLUTION rdg counts rdg counts V SOURCE RANGE 2 MQ 10 Q 0 125 1 0 01 1 40 V 200 uA 20 MQ 100 Q 0 125 1 0 01 1 40 V 20 uA 200 MQ 1 kQ 0 15 1 0 015 1 40 V 2 pA 2 GQ 10 kQ 0 225 1 0 035 1 40 V 200 nA 20 GQ 100 kQ 0 225 1 0 035 1 40 V 20 nA 200 GQ 1 MQ 0 35 1 0 110 1 40 V 2 nA 2 TQ 10 MQ 0 35 1 0 110 1 400 V 2 nA 20 TQ 100 MQ 1 025 1 0 105 1 400 V 200 pA 200 TQ 1 GQ 1 15 1 0 125 1 400 V 20 pA NOTES 1 Specifications are for auto V source ohms when properly zeroed 5 2 digit 1PLC median filter on digital filter 10 readings If user selectable voltage is required use manual mode Manual mode displays resistance up to 1080 calculated from measured current Accuracy is equal to accuracy of V source plus accuracy of selected Amps range PREAMP SETTLING TIME Add voltage source settling time to preamp settling time in Amps specification Ranges over 20GQ require additional settling based on the characteristics of the load OHMS ALTERNATING POLARITY METHOD The alternating polarity sequence compensates for the background offset currents of the material or device under test Maximum tolerable offset up to full scale of the current range used Using Keithley 8009 fixture REPEATABILITY Alg X R V r 0 1 10 instrument temperature constant 1 C ACCURACY V Ert LygasErr X R V pir where AI is a measured typical background current noise from the sample and fixture V r is the a
24. Each Saag hc sales semantics Ot area eens delta voltage is averaged with the previous delta complexity of the system include the challenges voltage to calculate the differential voltage dV of mixing the AC signal and DC bias of ground The differential conductance dG can now be loops and of common mode current noise derived using dI dV This technique requires only one measurement sweep when using the Keithley has developed a pea technique that Model 2182A Nanovoltmeter and a Model 622x is both simple and low noise the four wire Current Source so it is faster quieter and Each A D conversion I integrates averages V6 voltage over a fixed time 622X lt 4th Cycle I Source lt 3rd Cycle gt lt _ 2nd Cycle lt _ Ist Cycle __ Ist Reading AV V1 V2 V3 V2 4 Figure 10 Detail of applied current and measured device voltage KEITHLEY A Greater Measure of Confidence A Tektronix Company Vv QO YW aD par 7 _ aD oO WV aD aD QO _ m2 VY aD See l E S 2 en S O G Ea D Se LOW LEVEL MEASURE amp SOURCE 113 WY _ aD Some _ 7 S aD QO G _ m2 7 aD p 2 g aD e0 2 gt e V 2 m e0 p e r QO KS aD Y LOW LEVEL MEASU
25. IEEE 488 Memory 65 000 pt 65 000 pt 250K readings 2500 pt Remote Sense j Current Source Guard CE e e e e e Other Controls 2182A for AC and DC current Voltage monitor Source measure KEITHLEY A Tektronix Company Dual channel 61 2 digit measurement capability Dual 30V bias sources Measure currents up to 20mA Measure currents with 1fA resolution 0 10V analog output for high resolution measurement feedback Supports assembly process final testing parts binning and specification 3000 point buffer memory on each channel allows data transfer after test completion Trigger Link for binning and sweep test operations IEEE 488 and RS 232 interfaces APPLICATIONS Manufacturing component test Dual diode testing Semiconductor component testing Multi pin component testing lon beam monitoring Electron microscopy 888 KEITHLEY wis only Dual Channel Picoammetetr Voltage Source Programmable Limits and Filters The Model 6482 Dual Channel Picoammeter Voltage Source provides two independent picoammeter voltage source channels for a wide range of low level measurement applications that require dual channel measurements Building off of the proven measure ment capabilities of Keithley s Model 6485 52 digit Picoammeter the Model 6482 adds higher measure ment resolution a second measurement channel and dual independent 30V voltage bias sources With its dual chan
26. KEITHLEY A Tektronix Company 3390 S0MHz Arbitrary Waveform Function Generator BURST WAVEFORMS Sine Square Ramp Triangle Noise ARB TYPE Internal External START STOP PHASE 360 to 360 INTERNAL PERIOD 1us 500s GATED SOURCE External trigger TRIGGER SOURCE Internal External or Manual TRIGGER INPUT LEVEL TTL compatible SLOPE Rising or falling selectable PULSE WIDTH gt 100ns IMPEDANCE gt 10kQ DC coupled LATENCY lt 500ns TRIGGER OUTPUT LEVEL TTL compatible into 21kQ PULSE WIDTH gt 400ns OUTPUT IMPEDANCE 50Q typical MAXIMUM RATE 1MHz FAN OUT lt 4 Keithley 3390s PATTERN MODE CLOCK MAXIMUM RATE 50MHz OUTPUT Level TTL compatible into 22kQ Output Impedance 1102 typical PATTERN LENGTH 2 to 256K 1 888 KEITHLEY wis only www keithley com GENERAL POWER SUPPLY CAT II 110 240VAC 10 POWER CORD FREQUENCY 50Hz to 60Hz POWER CONSUMPTION 50VA max OPERATING ENVIRONMENT 0 to 50 C STORAGE TEMPERATURE 30 to 70 C INTERFACE USB LAN LXI C GPIB LANGUAGE SCPI 1993 IEEE 488 2 DIMENSIONS 107mm high x 224mm wide x 380mm deep 4 2 in x 8 8 in x 15 in WEIGHT 4 08kg SAFETY Conforms with European Union Directive 73 23 EEC EN 61010 1 EMC Conforms with European Union Directive 89 336 EEC EN 61326 1 WARM UP 1 hour A Greater Measure of Confidence NOTES 1 Add 10 C of spec for offset and amplitud
27. Model 6485 with other instruments and voltage sources This interface combines six independent selectable trigger lines on a single connector for simple direct control over all instruments in a system RS 232 and IEEE 488 interfaces These interfaces make it easy to integrate the Model 6485 into automated test and measurement systems Display on off switch For research on light sensitive components such as measuring the dark currents of photodiodes the front panel display can be switched off to avoid introducing light that could significantly reduce the accuracy of the results REL and LOG functions The Model 6485 can make relative readings with respect to a baseline value or display the logarithm of the absolute value of the measured current Resistance calculations The Model 6485 can calculate resistance by dividing an externally sourced voltage value by the measured current Rear panel BNC inputs Inexpensive easy to use BNC cables can be employed rather than more expensive triax cables ACCESSORIES AVAILABLE SERVICES AVAILABLE CABLES 6485 3Y EW 1 year factory warranty extended to 3 years from 4802 10 Low Noise BNC Input Cable 3m 10 ft saan ae s C 6485 3Y ISO 3 ISO 17025 accredited calibrations within 3 4803 Low Noise Cable Kit years of purchase 7007 1 Shielded IEEE 488 Cable 1m 3 3 ft Woran enalicouiies 7007 2 Shielded IEEE 488 Cable 2m 6 6 ft 7007 4 Shielded IEEE 488 Cable 4m 13 1 ft 7009 5 _RS 232 Cable
28. Such systems demand careful shielding and guarding and typically include a current source two electrometer buffers and an isolated voltmeter The schemat ics show two suggested configurations for these high resistivity applications one that requires manual switching and one with automated switching The range of the systems shown here is very wide The high resistance end is limited by the minimum output of the current source A current of 100pA can be supplied with an accuracy of about 2 If the resistance of each leg of the sample is no more than 1TQ the maximum voltage developed will be 100V within the range of the Model 6220 current source and the Model 6514 electrometer This system will provide good results with samples as low as 1Q per leg if a test current level of 100mA is acceptable Even at 100mQ per leg accuracy is approximately 2 Leakage currents are the most important sources of error especially at very high resistances One important advantage of this circuit is that a guard voltage is available for three of the sample termi nals which virtually eliminates both leakage currents and line capacitance The fourth terminal is at circuit LO or ground potential and does not need guarding Call Keithley for additional guidance in selecting equipment for specific high resistivity applications ACCESSORIES AVAILABLE 7007 1 Shielded IEEE 488 Cable 1m 3 3 ft 7007 2 Shielded IEEE 488 Cable 2m 6 6 ft
29. Testing Once electrometers were simply considered too slow to keep up with the high throughput that production test applications demand The Model 6514 is designed for fast sensitive measurements providing speeds up to 1200 readings per second with fast integration or 17 measurements per second with 60Hz line cycle integration It offers 10fA resolution on 2nA signals settling to within 10 of the final value in just 15ms A normal mode rejec tion ratio NMRR of 60dB allows making accurate low current measure ments even in the presence of line frequency induced currents which is a common concern in production floor environments The instrument s sen sitivity makes it easy to determine the leakage resistance on capacitances up to 10nF or even on higher capacitances when a series resistor is used While the Model 6514 can be easily operated manually using the front panel controls it can also be externally controlled for automated test applications Built in IEEE 488 and RS 232 interfaces make it possible Electrometer Leakage Resistance Photodiode RI no incident light VBURDEN error current due to VBuRDEN Photodiode no incident light V BURDEN Total offset CAL VoFFSET voltage 0 Figure 2 Dark Current Measurement with Burden Voltage Corrected 1 888 KEITHLEY u s only www keithley com Programmable Electrometer to program all instrument functions over the bus through a computer controller
30. The instrument s interfaces also simplify integrating external hardware such as sources switching systems or other instruments into the test system A digital I O interface can be used to link the Model 6514 to many popular component handlers for tight systems integration in bin ning sorting and similar applications These features make the Model 6514 a powerful low cost tool for systems designed to test optical devices and leakage resistance on low value capaci tors switches and other devices particularly when the test system already includes a voltage source or when the source current measure voltage technique is used to determine resistance Low Voltage Burden The Model 6514 s feedback ammeter design minimizes voltage offsets in the input circuitry which can affect current measurement accuracy The instrument also allows active cancellation of its input voltage and current offsets either manually via the front panel controls or over the bus with EEE 488 commands Dark Current Measurements When measuring dark currents Figure 1 from a device such as a photodiode the ammeter reads the sum of two different currents The first current is the dark current I generated by the detector with no light falling upon the device in other words the signal of interest the second one is the leakage current I generated by the voltage burden Vpurnen appearing at the terminals of the ammeter In a feedback ammeter the primar
31. a Optoelectronics Pulsed I V Replacement for AC resistance bridges when used with Model Model 6220 6221 in an existing application with 2182A out rewriting the control code Measuring resistance with low power Define and execute current ramps easily Both the Models 6220 and 6221 offer tools for defining current ramps and stepping through predefined sequences of up to 65 536 output values using a trigger or a timer Both sources support linear logarithmic and custom sweeps Replacement for lock in amplifiers when used with Model 2182A Measuring resistance with low noise Lu V m O Vv o Lu fa m Vv x Lu onl Lu gt Lu unl eo onl A Greater Measure of Confidence A Tektronix Company 121 Lu V m Vv o Lu oe m Vv x Lu onl Lu Lu onl onl 122 6220 6221 Ordering Information 6220 DC Precision Current Source 6221 AC and DC Current Source 6220 2182A Complete Delta Mode System w DC Current Source Nanovoltmeter and all necessary cables GPIB cables not included 6221 2182A Complete Delta Mode System w AC and DC Current Source Nanovolt meter and all necessary cables GPIB cables not included Accessories Supplied 237 ALG 2 6 6 ft 2m Low Noise Input Cable with Triax to Alligator Clips 6 6 ft 2m Trigger Link Cable to connect 622x to 2182A CA 180 3A Ethernet Crossover Cable 6221 only CA 351 Co
32. charge measurements in areas of research such as physics optics and materials science Its extremely low voltage burden makes it particu larly appropriate for use in solar cell applica tions and its built in voltage source and low current sensitivity make it an excellent solution for high resistance measurements of nanomateri als such as polymer based nanowires Its high speed and ease of use also make it an excellent choice for quality control product engineering and production test applications involving leak age breakdown and resistance testing Volume and surface resistivity measurements on non conductive materials are particularly enhanced by the Model 6517B s voltage reversal method The Model 6517B is also well suited for electro chemistry applications such as ion selective elec trode and pH measurements conductivity cells and potentiometry Model 6517B Enhancements The Model 6517B is an updated version replac ing the earlier Model 6517A which was intro duced in 1996 Software applications created for the Model 6517A using SCPI commands can run without modifications on the Model 6517B However the Model 6517B does offer some useful enhancements to the earlier design Its internal battery backed memory buffer can now store up to 50 000 readings allowing users to log test results for longer periods and to store more data associated with those readings The new model also provides faster reading rates to the in
33. complicated function menus Built in Trigger Link interface The Trigger Link interface simplifies synchronizing the Model 6482 with other instruments and voltage sources and combines six independent selectable trigger lines on a single connector for simple direct control over all instruments in a system RS 232 and IEEE 488 interfaces These interfaces make it easy to integrate the Model 6482 into automated test and measurement systems Display on off switch For research on light sensitive components such as measuring the dark currents of photodiodes the front panel display can be switched off to avoid introducing light that could significantly reduce the accuracy of the results REL and LOG functions The Model 6482 can make relative readings with respect to a baseline value or display the logarithm of the absolute value of the measured current Rear panel triax inputs Triax inputs ensure premium noise protection Triax to BNC adapters which are included allow inexpensive easy to use BNC cables to be employed in situations where noise is less of a concern A Greater Measure of Confidence A Tektronix Company Lu 9 x O Vv o Lu x vn lt x Lu 2 LJ gt T O Dual Channel Picoammetet Voltage Source ACCESSORIES AVAILABLE SERVICES AVAILABLE Ordering Information CABLES 6482 3VEW 1 Year Factory Warranty extended to 3 years from date of shipment 237 ALG Low Noise Triax Cable with Alligat
34. connection due to ground voltages V in the ground bus magnitude may be amperes Source voltage desired signal IR may exceed Vs by orders of magnitude Figure 2a Multiple grounds ground loops HI geste Nanovoltmeter ource Single lt System Ground Ground bus Input voltage to the nanovoltmeter is L Current passing through Zcj MQ or GQ due to Vg and currents in the source magnitude is typically nA s Vin Vs since IR is now insignificant compared to Vc Figure 2b Single system ground Minimizing temperature gradients within the circuit also reduces thermoelectric EMFs A way to minimize such gradients is to place all junctions in close proximity and provide good thermal coupling to a common massive heat sink If this is impracti cal thermally couple each pair of corresponding junctions of dissimilar materials to minimize their temperature differentials which will also help minimize the thermoelectric EMFs Johnson Noise The ultimate limit to how well the voltmeter can resolve a voltage is defined by Johnson thermal noise This noise is the voltage associated with the motion of electrons due to their thermal energy All sources of voltage will have internal resistance and thus produce Johnson noise The noise voltage developed by any resistance can be calculated from the following equation V v4kTBR k Boltzmann s constant 1 38 x 10 3 J K T absolute temperature of
35. e g 1Oppm 0 001 Temperature Channel 1 Input 24 Hour 90 Day 1 Year 2 Year Coefficient Range Resolution Resistance Tea 1 C Tea ee Ta TSC Tea 5 C 0 18 C amp 28 50 C 10 000000 mv 34 1 nV gt 10 GQ 20 4 40 4 50 4 60 4 1 0 5 C 100 00000 mV 10 nV gt 10 GQ ae 23 3 30 4 40 5 1 0 2 C 1 0000000 V 100 nV gt 10 GQ 7 2 18 2 25 2 32 3 1 0 1 C 10 000000 V 1 uV gt 10 GQ 2 1 18 2 29 r 2 3243 1 0 1 C 100 00000 V 10 uV 10 MQ 1 10 3 25 3 35 4 52 5 1 0 5 C Channel 2 amp 10 100 00000 mV 10 nV gt 10 GQ 10 6 25 6 30 7 40 7 1 1 C 1 0000000 V 100 nV gt 10 GQ 7 2 18 2 254 2 32 3 1 0 5 C 10 000000 V 1 uV gt 10 GQ 2 15 18 2 25 2 32 3 1 0 5 C CHANNEL 1 CHANNEL 2 RATIO For input signals gt 1 of the range Ratio Accuracy 2 4 Channel 1 ppm of Reading Channel 1 ppm of Range Channel 1 Range Channel 1 Input Channel 2 ppm of Reading Channel 2 ppm of Range Channel 2 Range Channel 2 Input O DELTA hardware triggered coordination with Series 24XX Series 26XXA or Series 622X current sources for low noise R measurement Accuracy accuracy of selected Channel 1 range plus accuracy of I source range Uj DELTA MEASUREMENT NOISE WITH 6220 or 6221 Typical 3nVrms VHz 10mV range 1Hz achieved with 1PLC delay 1ms RPT filter 23 20 if 50Hz Oo PULSE MODE WITH 6221 Line synchronized voltage measurements within current pulses from 50us to 12ms pulse repe
36. mA 100 mA O e ss sss aaa sss SSS VOLTAGE MEASURE From 10 uV 10 uV 10 uV v eD To 200 V 200 V 200 V z RESISTANCE MEASURE O From 10 Q 10 Q 100 Q 100 uQ D To 1 PQ 200 GQ 10 PQ 10 PQ i CHARGE MEASURE g eD From 10 fC 10 fC To 20 uC 2 uC z FEATURES Input Connection 3 Slot Triax BNC 3 Slot Triax 3 Slot Triax 3 Slot Triax 3 Slot Triax 3 Slot Triax K IEEE 488 s RS 232 e e e O Guard R D CE e e e e os Other 62 digits 5 digits 5 digits Built 5 digits 5 digits Replaces 5 digits Built SourceMeter with Dual 30V Autoranging in 500V source Dual channel Built Models 6512 in 1kV source Remote PreAmp to bias sources 1000 rdg s Alternating voltage in 100V source per 617 HIQ Temperature minimize method for channel RH measurements cable noise HI R sweeps Alternating polarity method for HI R Plug in switch cards available Replaces 6517A NOTES 1 Includes noise 2 Digital resolution limit Noise may have to be added 3 PQ Petaohms 10 Q 4 Resistance is measured with the Model 237 using Source V Measure I or Source I Measure V but not directly displayed 5 Lowest resistance measurable with better than 1 accuracy 6 Highest resistance measurable with better than 10 accuracy 1 888 KEITHLEY ws only KEITHLEY A Greater Measure of Confidence A Tektronix Company Lu 9 fa O Vv oS Lu vn lt x Lu LJ gt Lu O 129
37. meters with integrated detectors the Model 2502 allows the user to choose from a wide range of measurement capabilities simply by selecting an appropriate photodetector and programming the calibration coefficient of this detector at the wavelength of choice 2500INT Integrating Sphere The Model 2502 is designed for tight integration with other Keithley Interface Options instruments that are often used in LIV test systems for laser nal diode modules These other instruments include the Model 2400 tea AD Systemi Integration and contol thg Model 202 are sa psec Meter SMU inst ts includes the Trigger Link feature and digital I O lines as well as standard eo ANG MORE EE aia IEFE 488 and RS 232 interfaces The Trigger Link feature combines six LOW LEVEL MEASURE amp SOURCE 1 888 KEITHLEY wis only KEITHLEY A Greater Measure of Confidence A Tektronix Company 142 2502 independent software selectable trigger lines on a single connector for simple direct control over all instruments in a system This feature is especially useful for reducing total test time if the test involves a sweep The Model 2502 can sweep through a series of measurements based on triggers received from other instruments The digital I O lines simplify external handler control and binning operations The Model 2502 Dual Channel Picoammeter can measure and display either photo diode current or optical power for two photodiodes with appropriate user s
38. same delay The polarity reversal process can be repeated any number of times The resistance is calculated based on a weighted average of the most recent cur rent measurements PROPERTY Minimal Minimal Piezoelectric Triboelectric Effects Effects ES 0 Sapphire Teflon Polyethylene Polystyrene Kel F Ceramic Nylon Glass Epoxy PVC Phenolic o00000 I KEY Material very good in regard to the property O Material moderately good in regard to the property Material weak in regard to the property 10 9 surface 10 10 10 11 10 12 10 13 10 14 10 15 Typical Current Generated Epoxy board Resistance Polyethylene Polystyrene Clean surface Electrochemical Resistor Effects Noise in 1Hz Bandwidth Piezoelectric Effects Triboelectric Effects Current Generating Phenomena Insulating Material Figure 7 Figure 8 1 888 KEITHLEY ws only www keithley com LOW LEVEL MEASURE amp SOURCE KEITHLEY A Greater Measure of Confidence A Tektronix Company 128 Selector Guide Low Current High Resistance Measurements E Selector Guide Picoammeters Electrometers Source Measure Unit SMU Instruments z 2 Source 5 Measure D Unit SMU Picoammeters Electrometers Instruments ps MODEL 6482 6485 6487 2502 6514 6517B 6430 Page 131 134 137 141 144 148 44 CURRENT MEASURE From 20 fA 20 fA 20 fA 15 fA lt 1 fA lt 1 fA 400 aA To 20 mA 20 mA 20 mA 20 mA 20 mA 20
39. small series resistor may be added to reduce noise if the unknown resistor has high stray capacitance across it O Y O QO aD g aD ur i QO 1S x a gt g VY aD QO _ m2 VY oO os _00 G g 7 _ aD _ O 2 7 aD 7 D ACCESSORIES AVAILABLE SERVICES AVAILABLE CABLES TEST FIXTURES 6487 3Y EW Shad eit alia extended to 3 years t t 6517 ILC 3 Interlock Cable for 8009 Resistivity Test Fixture 8009 Resistivity Test Fixture Ci6487 3 I80 ve on P d calibrati ma 3Y accredited calibrations within 7007 1 Shielded IEEE 488 Cable 1m 3 3 ft RACK MOUNT KITS years of purchase 7007 2 Shielded IEEE 488 Cable 2m 6 6 ft 4288 Single or Dual Fixed Rack Mounting Kit Not available in all countries 7007 4 Shielded IEEE 488 Cable 4m 13 1 ft 7078 TRX 10 Low Noise Triax Cable 3 0m 10 ft 7078 TRX 20 Low Noise Triax Cable 6 0m 20 ft 8501 Trigger Link Cable with male Micro DIN connectors at each end 1m or 2m 3 3 ft or 6 6 ft ADAPTERS 237 TRX BAR Triax Barrel 7078 TRX BNC Triax to BNC Adapter GPIB INTERFACES KPCI 488LPA IEEE 488 Interface Controller for the PCI Bus KUSB 488B IEEE 488 USB to GPIB Interface Adapter 1 888 KEITHLEY ws only KEITHLEY A Greater Measure of Confidence A Tektronix Company LOW LEVEL MEASURE amp SOURCE 139 Model 6487 specifications
40. the source in Kelvin B noise bandwidth in Hz R resistance of the source in ohms A Greater Measure of Confidence From this equation it can be observed that Johnson noise may be reduced by lowering the temperature and by decreasing the bandwidth of the measurement Decreasing the bandwidth of the measurement is equivalent to increasing the response time of the instrument thus in addition to increasing filtering the bandwidth can be reduced by increasing instrument integration typically in multiples of power line cycles Ground Loops When both the signal source and the measurement instrument are connected to a common ground bus a ground loop is created Figure 2a This is the case when for instance a number of instruments are plugged into power strips on different instrument racks Frequently there is a difference in potential between the ground points This potential differ ence even though it may be small can cause large currents to circulate and create unexpected voltage drops The cure for ground loops is to ground the entire measurement circuit at only one point The easiest way to accomplish this is to isolate the DUT source and find a single good earth ground point for the measuring system as shown in Figure 2b Avoid grounding sensitive measurement circuits to the same ground system used by other instruments machinery or other high power equipment Magnetic Fields Magnetic fields generate spur
41. 0 120V or 220 240V 50 60Hz 30VA PHYSICAL Case Dimensions 90mm high x 214mm wide x 369mm deep 3 in x 83 4 in x 14 6 in Working Dimensions From front of case to rear including power cord and IEEE 488 con nector 394mm 15 5 in Net Weight lt 2 8 kg lt 6 1 lbs Shipping Weight lt 5 kg lt 11 lbs KEITHLEY A Greater Measure of Confidence A Tektronix Company 10fA resolution 5 2 digit resolution lt 200pV burden voltage Alternating Voltage method ohms measurements Automated voltage sweeps for l V characterization Floating measurements up to 500V Up to 1000 readings second Built in Model 486 and 487 emulation mode IEEE 488 and RS 232 interfaces Analog output Digital 1 0 1 888 KEITHLEY ws only A METER VOLTAGE SOURCE _ V SOURCE xj f Picoammeter Voltage Source The 5 2 digit Model 6487 Picoammeter Voltage Source improves on the measurement capability of the award winning Model 6485 and adds a high resolution 500V source It provides higher accuracy and faster rise times than the 6485 as well as a damping function for use with capaci tive devices With eight current measurement ranges and high speed autoranging this cost effective instrument can measure currents from 20fA to 20mA take measurements at speeds up to 1000 readings per second and source voltage from 200uV to 505V The Model 6487 s 10fA resolution superior sen sitivity voltage sweeping and A
42. 0 200 nC 100 fC 0 4 50 0 04 10 2 uC 1 pc 1 50 0 05 10 20 uC 10 pC 1 50 0 05 10 Notes 1 Charge acquisition time must be lt 1000s derate 2 for each additional 10 000s 2 When properly zeroed 612 digit Rate Slow 100ms integration time INPUT BIAS CURRENT lt 4fA at Tep Temperature coefficient 0 5fA C IEEE 488 BUS IMPLEMENTATION MULTILINE COMMANDS DCL LLO SDC GET GTL UNT UNL SPE SPD IMPLEMENTATION SCPI IEEE 488 2 SCPI 1996 0 DDC IEEE 488 1 UNILINE COMMANDS IFC REN EOI SRQ ATN INTERFACE FUNCTIONS SH1 AH1 T5 TEO L4 LEO SR1 RL1 PPO DC1 DT1 CO E1 PROGRAMMABLE PARAMETERS Function Range Zero Check Zero Correct EOI DDC mode only Trigger Terminator DDC mode only Data Storage 2500 Storage Calibration SCPI mode only Display Format SRQ REL Output Format Guard V offset Cal I offset Cal ADDRESS MODES TALK ONLY and ADDRESSABLE LANGUAGE EMULATION 6512 617 617 HIQ emulation via DDC mode TRIGGER TO READING DONE 150ms typical with external trigger RS 232 IMPLEMENTATION Supports SCPI 1996 0 Baud Rates 300 600 1200 2400 4800 9600 19 2k 38 4k 57 6k Protocols Xon Xoff 7 or 8 bit ASCII parity odd even none Connector DB 9 TXD RXD GND AUT a ETTI Ote EA BC eR ee TE es T A Em NE a rs tk A Model 6514 rear panel 1 888 KEITHLEY wis only www keithley com Programmable Electrometer GENERAL OVERRANGE INDICATION Display reads
43. 369mm deep 3 in x 8 in x 14 in Working Dimensions From front of case to rear including power cord and IEEE 488 con nector 15 5 inches Net Weight 5 4kg 11 8 Ibs Shipping Weight 6 9kg 15 11 lbs SERVICES AVAILABLE 6517B 3Y EW 1 year factory warranty extended to 3 years from date of shipment C 6517B 3Y ISO 3 ISO 17025 accredited calibrations within 3 years of purchase Not available in all countries KEITHLEY A Greater Measure of Confidence A Tektronix Company Model 6517B specifications Lu 9 x O Vv o Lu vn lt x Lu 2 LJ gt T O 151 6521 Low Current 10 channel 6522 Scanner Cards for 6517B 10 channels of multiplex switching Install directly in 6517B s option slot Choose from low current scanning or high impedance voltage switching with low current switching Two optional 10 channel plug in scanner cards are available to extend the measurement performance of the Model 6517B Electrometer High Resistance Meter The cards install directly into the option slot lt 200pV contact potential in the back panel of the Model 6517B The cards are also compatible with the Models 6517A and 6517 lt 1pA offset current The Model 6521 Low Current Scanner Card is a 10 channel multiplexer designed for switching low currents in multipoint testing applications or when the test configuration must be changed Offset current on each channel is lt 1pA and high
44. 5 nV Off 100 Thermocouple 6 5 18 9 18 15 1 10 kQ 35 nV Off 100 100 KQ 100 nV On 100 a aC 1 MQ 350 nV On 100 epee pee ou Channel 1 Channel 2 Ratio 7 5 15 13 5 7 Delta with 24XX Scan 751719 23 2 2 5 U 18 TEMPERATURE Thermocouples 12 ACCURACY Tai ma i Displayed in C F or K Accuracy based on 90 Day 1 Year 2 20 16 1 O ITS 90 exclusive of thermocouple errors 23 5 C 5 57 30 29 0 1 A Relative to Simulated 4 517 41 40 0 01 TYPE RANGE RESOLUTION Reference Junction Delta with 622X 65 47 40 0 2 1 of J 200 to 760 C 0 001 C 0 2 C LLJ K 200 to 1372 C 0 001 C 0 2 C System Speeds gt 5 ee N 200 to 1300 C 0 001 C 0 2 C T 200 to 400 C 0 001 C 0 2 C RANGE CHANGE TIME lt 40 ms lt 50 ms x E 200 to 1000 C 0 001 C 0 2 C FUNCTION CHANGE TIME lt 45 ms lt 55 ms Tr R 0 to 1768 C 0 1 C 0 2 C AUTORANGE TIME lt 60 ms lt 70 ms S 0 to 1768 C 0 1 C 0 2 C ASCII READING TO RS 232 19 2K Baud 40 s 40 s B 350 to 1820 C 0 1 C 0 2 C MAX INTERNAL TRIGGER RATE 120 s_ 120 5 T MAX EXTERNAL TRIGGER RATE 6 120 s 120 s gt LLJ onl 1 888 KEITHLEY ws only KEITHLEY A Greater Measure of Confidence A Tektronix Company 119 Model 2182A specifications Lu 9 fa 4 O vn o Lu vn lt x Lu LJ gt Lu O 120 2182A Measurement Characteristics A D LINEARITY 0 8p
45. 7 Max typical 18 28 C 0 70 R H 0 1 10 Hz Coefficient 10 90 90 10 10 100 200 uV 0 1 1m lt 50 uV 0 005 20 uV C 250 us 150 us 50 500 1 mV 01 4mV lt 150 uV 0 005 200 uV C 250 us 300 us 505 00 10 mV 0 15 40 mV lt 1 5mV 0 008 2 mvV C 4 5 ms 1 ms SELECTABLE CURRENT LIMIT 2 5mA 250wA 25uA for 50V and 500V ranges 25mA additional limit for 10V range All current lim its are 20 35 of nominal WIDEBAND NOISE lt 30mVp p 0 1Hz 20MHz TYPICAL TIME STABILITY 0 003 ImV over 24 hours at constant temperature within 1 C between 18 28 C after 5 minute settling OUTPUT RESISTANCE lt 2 5Q VOLTAGE SWEEPS Supports linear voltage sweeps on fixed source range one current or resistance measurement per step Maximum sweep rate 200 steps per second Maximum step count 3000 Optional delay between step and measure RESISTANCE MEASUREMENT V I Used with voltage source resistance calculated from voltage setting and measured current Accuracy is based on voltage source accuracy plus ammeter accuracy Typical accuracy better than 0 6 for readings between 1kQ and 1TQ ALTERNATING VOLTAGE RESISTANCE MEASUREMENT Offers alternating voltage resistance measurements for resistances from 10 Q to 105Q Alternates between OV and user selectable voltage up to 505V NOTES 1 At 1 PLC limited to 60 rdgs s under this condition At 6 PLC 1 standard deviation 100 readings fil
46. 7078 TRX 10 Triax Cable 3m 10 ft KPCI 488LPA IEEE 488 Interface Controller for the PCI Bus KUSB 488B IEEE 488 USB to GPIB Interface Adapter A Greater Measure of Confidence The equipment configuration with manual switching above was developed for very high resistance van der Pauw or Hall Effect measurements This measurement system includes a Model 6220 current source two Model 6514 electrometers used as unity gain buffers and a Model 2000 digital multimeter DMM The current source has a built in guard which minimizes the time constant of the current source and cable The insulation resistance of the leads and supporting fixtures for the sample should be at least 100 times the DUT resistance R The entire sample holder must be shielded to avoid electrostatic pickup If the sample is in a dewar this should be part of the shield Preamp Out 7152 Low Current Matrix Card in 7001 Mainframe One Model 7152 Matrix Card housed in a Model 7001 mainframe is used to connect the electrometers and the current source to the sample Two Model 6514 electrometers are used as unity gain buffers and their output difference is measured with a Model 2000 DMM To ensure faster measurement time guarded measurements are made by turning the Guard switch ON for both of the Model 6514s and by guarding the Model 6220 output Call Keithley s Applications Department for cabling information Lu 9 fa O Vv o Lu
47. 7754 3 BNC to Alligator Cable 0 9m 3 ft 8607 Banana Cable set for Analog Output 8501 1 Trigger Link Cable with Male Micro DIN Connectors at each End 1m 3 3 ft 8501 2 Trigger Link Cable with Male Micro DIN Connectors at each End 2m 6 6 ft 8503 DIN to BNC Trigger Cable ADAPTERS CS 565 BNC Barrel 7078 TRX BNC Female BNC to 3 Slot Male Triax for connecting BNC cable into triax fixture RACK MOUNT KITS 4288 1 4288 2 Single Fixed Rack Mounting Kit Dual Fixed Rack Mounting Kit GPIB INTERFACES KPCI 488LPA EEE 488 Interface Controller for the PCI Bus KUSB 488B JEEE 488 USB to GPIB Interface Adapter KEITHLEY A Greater Measure of Confidence A Tektronix Company Z O QO aD O aD _ QO 1S x oO 7 _ oO _ p O 2 7 aD p 7a eD LOW LEVEL MEASURE amp SOURCE 135 Model 6485 specifications Lu 9 fa 4 O vn o Lu vn lt x Lu LJ gt Lu O 136 6485 512 Digit Accuracy 1 Year Analog Default rdg offset Typical Rise Time gt Range Resolution 18 28 C 0 70 RH RMS Noise 10 to 90 2 nA 10 fA 0 4 400 fA 20 fA 8 ms 20 nA 100 fA 0 4 1 pA 100 fA 8 ms 200 nA 1 pA 0 2 10pA 1 pA 500 us 2 uA 10 pA 0 15 100 pA 10 pA 500 us 20 uA 100 pA 0 1 1nA 100 pA 500 us 200 uA 1 nA 0 1 10nA 1InA 500 us 2 mA 10 nA 0 1 100nA 10nA 500 u
48. APLW S i s a 5 H EUT THLE Local REL rue A LMT E TAIG pm er od 3 7 i A i 7 RANGE I a 3 Soh D GIS SPEED stone RECALL Conric menu exit enter b ss AUTO Dual Channel Picoammeter The Model 2502 Dual Channel Picoammeter provides two independent picoammeter voltage source channels for a wide range of low level measurement applications including laser diode testing The Model 2502 is also designed to increase the throughput of Keithley s LIV light current voltage test system for production test ing of laser diode modules LDMs Developed in close cooperation with leading manufacturers of LDMs for fiberoptic telecommunication networks this dual channel instrument has features that make it easy to synchronize with other system elements for tight control over Dual channel instrument for optical power measurements beam measurements and nanoscale materials and device research 100V source for bias requirements Measure photodetector current from 1fA to 20mA 1fA current measurement resolution Measure optical power directly when used with Model 2500INT Integrating Sphere 0 10V analog output for high resolution optical power feedback Provides a high accuracy high speed fiber alignment solution Supports assembly process final testing parts binning and specification Allows faster alignment of the fiber with the laser diode s optimum light emitting region Comb
49. DUTs and lower cost It also eliminates the need for a current pre amplifier 1 888 KEITHLEY wis only AC and DC Current Source Models 6220 and 6221 vs Homemade Current Sources Many researchers and engineers who need a current source attempt to get by with a volt age source and series resistor instead This is often the case when an AC current is needed This is because until the introduction of the Model 6220 6221 no AC current sources were available on the market However homemade current sources have several disadvantages vs true current sources e Homemade Current Sources Don t Have Voltage Compliance You may want to be sure the voltage at the terminals of your homemade current source never exceeds a certain limit for example 1 2V in the case of many optoelectronic devices The most straightforward way to accomplish this is to reduce the voltage source to that level This requires the series resistor to be reduced to attain the desired current If you want to program a different current you must change the resistor while the voltage is held constant Another possibility is to place a protection circuit in parallel with the DUT These do not have precise voltage control and always act as a parallel device stealing some of the programmed current intended for the DUT e Homemade Current Sources Can t Have Predictable Output With a homemade current source made of a voltage source and series resistor
50. EIGHT 5kg 11 lbs NOTES 1 Relative to calibration accuracy 2 With Analog Filter on add 20ppm of reading to listed specification 3 When properly zeroed using REL function If REL is not used add 100nV to the range accuracy 4 Specifications include the use of ACAL function If ACAL is not used add 9ppm of reading C from Tea to the listed specification T is the internal temperature stored during ACAL 5 For 5PLC with 2 reading Digital Filter Use 4ppm of reading 2ppm of range for 1PLC with 10 reading Digital Filter 6 Channel 2 must be referenced to Channel 1 Channel 2 HI must not exceed 125 referenced to Channel 1 LO of Channel 2 range selected 7 Noise behavior using 2188 Low Thermal Short after 2 5 hour warm up 1 C Analog Filter off Observation time 10X response time or 2 minutes whichever is less 8 For Lyne On line frequency 0 1 If Leyye Off use 60dB 9 For 1kQ unbalance in LO lead AC CMRR is 70dB 10 For Low Q mode On add the following to DC noise and range accuracy at stated response time 200nV p p 25s 500nV p p 4 0s 1 2uV p p 1s and 5uV p p 85ms 11 After 2 5 hour warm up 1 C 5PLC 2 minute observation time Channel 1 10mV range only 12 For Channel 1 or Channel 2 add 0 3 C for external reference junction Add 2 C for internal reference junction 13 Speeds are for 60Hz 50Hz operation using factory defaults operating conditions RST Autorange Off Display Off Tri
51. ET Range 360 to 360 Resolution 0 001 Accuracy 8ns A Greater Measure of Confidence MODULATION MODULATION TYPE AM FM PM FSK PWM Sweep and Burst AM CARRIER Sine Square Ramp ARB SOURCE Internal External INTERNAL MODULATION Sine Square Ramp Triangle Noise ARB FREQUENCY Internal 2mHz to 20kHz DEPTH 0 0 120 0 FM CARRIER Sine Square Ramp ARB SOURCE Internal External INTERNAL MODULATION Sine Square Ramp Triangle Noise ARB FREQUENCY Internal 2mHz to 20kHz DEVIATION DC 25MHz PM CARRIER Sine Square Ramp ARB SOURCE Internal External INTERNAL MODULATION Sine Square Ramp Triangle Noise ARB FREQUENCY INTERNAL 2mHz to 20kHz DEVIATION 0 0 to 360 PWM CARRIER Pulse SOURCE Internal External INTERNAL MODULATION Sine Square Ramp Triangle Noise ARB FREQUENCY INTERNAL 2mHz to 20kHz DEVIATION 0 100 of pulse width FSK CARRIER Sine Square Ramp ARB SOURCE Internal External INTERNAL MODULATION 50 duty cycle Square FREQUENCY INTERNAL 2mHz to 100kHz EXTERNAL MODULATION INPUT VOLTAGE RANGE 5V full scale INPUT RESISTANCE 8 7kQ typical BANDWIDTH DC to 20kHz SWEEP WAVEFORMS Sine Square Ramp ARB TYPE Linear or logarithmic DIRECTION Up or down SWEEP TIME 1ms 500s TRIGGER Internal External or Manual MARKER Falling edge of sync signal programmable frequency
52. ION 11 characters DIGITAL INTERFACE Handler Interface Start of test end of test 3 category bits 5V 300mA supply Digital I O 1 trigger input 4 TTL Relay Drive outputs 33V 500mA diode clamped OUTPUT CONNECTIONS Teflon insulated 3 lug triax connector for output Banana safety jack for GUARD OUTPUT LO Screw terminal for CHASSIS DB 9 connector for EXTERNAL TRIGGER INPUT OUTPUT and DIGITAL I O Two position screw terminal for INTERLOCK INTERLOCK Maximum 10Q external circuit impedance POWER SUPPLY 100V to 240V rms 50 60Hz POWER CONSUMPTION 120VA ENVIRONMENT For Indoor Use Only Maximum 2000m above sea level Operating 0 50 C 70 R H up to 35 C Derate 3 R H C 35 50 C Storage 25 C to 65 C guaranteed by design EMC Conforms to European Union Directive 89 336 EEC EN 61326 1 SAFETY Conforms to European Union Directive 73 23 EEC EN61010 1 VIBRATION MIL PRF 28800F Class 3 Random WARMUP 1 hour to rated accuracies Passive Cooling No fan DIMENSIONS Rack Mounting 89mm high x 213mm wide x 370mm deep 3 5 in x 8 375 in x 14 563 in Bench Configuration with handle and feet 104mm high x 238mm wide x 370mm deep 4 125 in x 9 375 in x 14 563 in KEITHLEY A Tektronix Company Model 6220 and 6221 specifications Lu UW ja O Vv o Lu Wn lt x Lu LJ gt T O 125 Lu V m Vv o Lu fa m Vv x Lu
53. LJ gt T O A Tektronix Company 115 2182A 2107 30 2182 KIT 2187 4 2188 4288 1 4288 2 7007 1 7007 2 7009 5 8501 1 8501 2 8503 KPCI 488LPA KUSB 488B 2182A 3Y EW WY Z O ae Y TA A ae o0 c T VY D _ cp DO O gt Ke D Z T O aS rs ae gt 60 Oo fo D tet UO 49 D 7 D O ej 7 s r D D Some 79 49 D D 2 O Z n LOW LEVEL MEASURE amp SOURCE 116 Nanovoltmeter 2107 4 Low Thermal Input Cable with spade lugs 1 2m 4 ft User manual service manual contact cleaner line cord alligator clips ACCESSORIES AVAILABLE Low Thermal Input Cable with spade lugs 9 1m 30 ft Low Thermal Connector with strain relief Low Thermal Test Lead Kit Low Thermal Calibration Shorting Plug Single Fixed Rack Mount Kit Dual Fixed Rack Mount Kit Shielded GPIB Cable 1m 3 2 ft Shielded GPIB Cable 2m 6 5 ft Shielded RS 232 Cable 1 5m 5 ft Trigger Link Cable 1m 3 2 ft Trigger Link Cable 2m 6 5 ft Trigger Link Cable to 2 male BNC connectors JEEE 488 Interface Controller for the PCI Bus JEEE 488 USB to GPIB Interface Adapter SERVICES AVAILABLE 1 year factory warranty extended to 3 years from date of shipment C 2182A 3Y ISO 3 ISO 17025 accredited calibrations within 3 years of purchase Not available in all countries APPLICATIONS Research Det
54. Link ensures measurement integrity by keeping the source and measure ment functions working in lock step while the buffer memories record the measurements Together source memory buffer memory and Trigger Link eliminate GPIB traffic during a test sweep improv ing test throughput dramatically ea O a QO aD g G aD _ p QO QO 49 x a oO 7 aD QO _ m2 VY oO p os _00 os OO 7 _ aD _ p m O 2 WV aD _ 7 D Ratio and Delta Measurements Trigger Link ato The Model 2502 can provide ratio or delta measurements between the two 2510 l l completely isolated channels such as the ratio of the back facet monitor detector to the fiber coupled photodetector at varying levels of input current These functions can be accessed via the front panel or the GPIB interface For test setups with multiple detectors this capability allows for targeted control VA capabilities for the laser diode module Thermistor Peltier Programmable Limits and Filters As with most Keithley instruments the Model 2502 s current and voltage limits can be programmed to ensure device protection during critical points such as start of test etc These instruments also provide Average and Median filters which can be applied to the data stored in the buffer memory Adaptable to Evolving DUT Requirements Unlike optical power
55. NCE METER Model 6517B is also significantly faster than competitive ee G 6 Se le 6 0 L electrometers so it offers a quick easy way to measure low level currents Gx w Fater math Tma 50 Fa aol i Cro List brom RECALL inna MENU J ex ENTER FAROE Exceptional Performance Specifications The half rack sized Model 6517B has a special low current input amplifier with an input bias current of lt 3fA with just 0 75fA p p peak to peak noise and lt 20uV burden voltage on the lowest range The input impedance for voltage and resistance measurements is 200TQ for near e Measures resistances up ideal circuit loading These specifications ensure the accuracy and sensitivity needed for accurate to 10 6Q low current and high impedance voltage resistance and charge measurements in areas of research such as physics optics nanotechnology and materials science A built in 1kV voltage source with sweep capability simplifies performing leakage breakdown and resistance testing as well as volume Q cm and surface resistivity 2 square measurements on insulating materials 1fA 20mA current measurement range lt 20yuV burden voltage on lowest current ranges Wide Measurement Ranges f f The Model 6517B offers full autoranging over the full span of ranges on current resistance voltage 200TQ input impedance and charge measurements lt 3fA bias current e Curr
56. NG TIME lt 250ms analog filter off 1PLC OVERRANGE INDICATION Display reads OVRFLOW CONVERSION TIME Selectable 0 01PLC to 60PLC 50PLC under 50Hz operation Adjustable from 200us to 1s READING RATE To internal buffer 1000 readings second To IEEE 488 bus 900 readings second BUFFER Stores up to 3000 readings PROGRAMS Provide front panel access to IEEE address choice of engineering units or scientific notation and digital calibration EMC Conforms with European Union Directive 89 336 EEC EN61326 1 SAFETY Conforms with European Union Directive 73 23 EEC EN61010 1 CAT I ENVIRONMENT Operating 0 50 C relative humidity 70 non condensing up to 35 C Above 35 C derate humidity by 3 for each C Storage 10 C to 65 C WARM UP 1 hour to rated accuracy see manual for rec ommended procedure POWER 100 120V or 220 240V 50 60Hz 50VA PHYSICAL Case Dimensions 90mm high x 214mm wide x 369mm deep 3 in x 8 in X 14 in Working Dimensions From front of case to rear including power cord and JEEE 488 connector 394mm 15 5 inches NET WEIGHT lt 4 7 kg lt 10 3 lbs NOTES 1 0 01PLC digital filters off front panel off auto zero off 2 Binary transfer mode IEEE 488 1 3 Measured from trigger in to meter complete KEITHLEY A Tektronix Company a i 1 tire su aa sia E oe iO 0000 Y 20A DUAL CAANNEL PICOAMME TER AANGE D
57. OVRFLOW RANGING Automatic or manual CONVERSION TIME Selectable 0 01PLC to 10PLC PROGRAMS Provide front panel access to IEEE address choice of engineering units or scientific notation and digital calibration MAXIMUM INPUT 250V peak DC to 60Hz sine wave 10s per minute maximum on mA ranges MAXIMUM COMMON MODE VOLTAGE DC to 60Hz sine wave Electrometer 500V peak ISOLATION Meter COMMON to chassis Typically 10 Q in parallel with 500pF INPUT CONNECTOR Three lug triaxial on rear panel 2V ANALOG OUTPUT 2V for full range input Inverting in Amps and Coulombs mode Output impedance 10kQ PREAMP OUTPUT Provides a guard output for Volts measurements Can be used as an inverting output or with external feedback in Amps and Coulombs modes DIGITAL INTERFACE Handler Interface Start of test end of test 3 category bits Digital I O 1 Trigger input 4 outputs with 500mA sink capability Connector 9 pin D subminiature male pins EMC Conforms with European Union Directive 89 336 EEC EN55011 EN50082 1 EN61000 3 2 EN61000 3 3 FCC part 15 class B SAFETY Conforms with European Union Directive 73 23 EEC EN61010 1 GUARD Switchable voltage and ohm guard available TRIGGER LINE Available see manual for usage READING STORAGE 2500 readings READING RATE To internal buffer To IEEE 488 bus To front panel 1200 readings second 500 readings second 3 17 readings second at 60Hz 15 readings second at 50Hz No
58. RE amp SOURCE 114 Selector Guide Model 2182A 6220 6221 3706A 2750 Page 115 121 126 264 VOLTAGE RANGE Full Scale From 10 mV N A 100 mV 100 mV To 100 V N A 300 V 1000 V Input Voltage Noise 1 2 nV rms N A 100 nV rms lt 1 5 uV rms CURRENT RANGE 100 fA DC From N A also 2 pA peak N A N A AC 6221 only 105 mA DC also 100 mA To N A peak AC 6221 N A N A only RESISTANCE RANGE 10 nQ when 1 3 From 10 nQ used with 2182A 0 9 mQ 0 4 mQ 100 MQ when 2 3 To 100 MQ used with 2182A 100 MQ 100 MQ THERMOCOUPLE TEMPERATURE From 200 C N A 150 C 200 C To 1820 C N A 1820 C 1820 C FEATURES IEEE 488 RS 232 CE e e Input Connection Special low thermoelectric Trigger Link Rear panel 15 pin Banana jacks 4 w copper pins Optional Digital I O D SUB Optional 2187 4 Modular Probe Kit Ethernet accessories adds banana plugs spring 3706 BAN clips needle probes and 3706 BKPL alligator clips 3706 TLK Special Features Delta mode and differential Controls Dry circuit Offset Dry circuit conductance with Model Model 2182A compensation Offset 6220 or 6221 Pulsed I V with for low power Plug in switch compensation Model 6221 Analog output resistance and I V relay modules DMM IEEE 488 EEE 488 RS 232 measurements USB LXI Class RS 232 Digital I O B Ethernet with Plug in modules IEEE 1588 protocol Digital I O NOTES 1 Lowest resistance measurable with better than 10 accuracy 2 Hig
59. T Integrating Sphere or to a fiber coupled photodetector At the same time it applies the voltage biases it measures the current outputs of the two photodetectors and converts these outputs to measurements of optical power The conversion is performed with the user programmed calibration coefficient for the wavelength of the laser diode module Fast accurate measurements of optical power are critical for analyzing the coupling efficiency and optical power characteristics of the laser diode being tested When testing modules with multiple detectors the Model 2502 packs more testing capabilities into less test rack space Fiber Alignment The Model 2502 s built in high speed analog output makes it suitable for precision fiber alignment tasks This instrument combines the ability to align the optical fiber quickly and accurately with a laser diode s optimum light emitting region and the capability to make precision LIV measurements all in the same test fixture The Model 2502 s wide dynamic range allows early beam skirt detection reducing the time required for fiber alignment An LIV sweep can be performed during the alignment process to optimize fiber location for an entire operating range High speed feedback minimizes delays in the alignment process so it s unneces sary to sacrifice alignment speed to ensure accurate device characterization Wide Dynamic Measurement Range The Model 2502 offers low current measurement ranges from 2nA to
60. UENCY ACCURACY 100ppm 1 year SAMPLE RATE 10 MSPS AMPLITUDE 4pA to 210mA peak peak into loads up to 10 Q AMPLITUDE RESOLUTION 16 bits including sign AMPLITUDE ACCURACY lt 10kHz 5 Magnitude 1 rdg 0 2 range Offset 0 2 rdg 0 2 range SINE WAVE CHARACTERISTICS Amplitude Flatness Less than 1dB up to 100kHz SQUARE WAVE CHARACTERISTICS Overshoot 2 5 max Variable Duty Cycle 4 Settable to 1us min pulse duration 0 01 programming resolution Jitter RMS 100ns 0 1 of period RAMP WAVE CHARACTERISTICS Linearity lt 0 1 of peak output up to 10kHz ARBITRARY WAVE CHARACTERISTICS Waveform Length 2 to 64K points Jitter RMS 100ns 0 1 of period WAVEFORM NOTES 4 Minimum realizable duty cycle is limited by current range response and load impedance 5 Amplitude accuracy is applicable into a maximum resistive load of 2V T putt scale Of range Amplitude attenuation will occur at higher frequencies dependent upon current range and load impedance 6 These specifications are only valid for the 20mA range and a 50Q load A Greater Measure of Confidence GENERAL COMMON MODE VOLTAGE 250V rms DC to 60Hz COMMON MODE ISOLATION gt 10 Q lt 2nF SOURCE OUTPUT MODES Fixed DC level Memory List REMOTE INTERFACE JEEE 488 and RS 232C SCPI Standard Commands for Programmable Instruments DDC command language compatible with Keithley Model 220 PASSWORD PROTECT
61. a built in type K thermocouple and an optional Model 6517 RH Relative Humidity Probe A built in data storage buffer allows recording and recalling readings stamped with the time temperature and relative humidity at which they were acquired Accessories Extend Measurement Capabilities A variety of optional accessories can be used to extend the Model 6517B s applications and enhance its performance Scanner Cards Two scanner cards are avail able to simplify scanning multiple signals Either card can be easily inserted in the option slot of the instrument s back panel The Model 6521 Scanner Card offers ten channels of low level current scanning The Model 6522 Scanner Card A Greater Measure of Confidence provides ten channels of high impedance voltage switching or low current switching Test Fixture The Model 8009 Resistivity Chamber is a guarded test fixture for measuring volume and surface resistivities of sample mat erials It has stainless steel electrodes built to ASTM standards The fixture s electrode dimensions are pre programmed into the Model 6517B so there s no need to calculate those values then enter them manually This accessory is designed to protect you from contact with potentially hazardous voltages opening the lid of the chamber automatically turns off the Model 6517B s voltage source Applications The Model 6517B is well suited for low current and high impedance voltage resistance and
62. ally needed to connect the instruments to each other and to the DUT The Model 2187 4 Low Thermal Test Lead Kit is required when the cabling provided may not be sufficient for specific applications such as when the DUT has special connection requirements The kit includes an input cable with banana terminations banana extensions sprung hook clips alligator clips needle probes and spade lugs to accommodate virtually any DUT The Model 2187 4 is also helpful when the DUT has roughly 1GQ impedance or higher In this case measuring with the Model 2182A directly across the DUT will lead to loading errors The Model 2187 4 Low Thermal Test Lead Kit provides a banana cable and banana jack extender to allow the Model 2182A to connect easily to the Model 622X s low impedance guard output so the Model 2182A can measure the DUT voltage indirectly This same configuration also removes the Model 2182A s input capacitance from the DUT so it improves device response time which may be critical for pulsed measurements Figure 6 Model 2187 4 Test Lead Kit ce i we AML Figure 7 Model 2182A rear panel KEITHLEY A Tektronix Company www keithley com A Greater Measure of Confidence 118 2182A Nanovoltmeter Volts Specifications 20 over range CONDITIONS 1PLC with 10 reading digital filter or 5PLC with 2 reading digital filter Accuracy ppm of reading ppm of range ppm parts per million
63. cal Range output offset output offset C 10 to 90 2 000000 nA 6 0 90 mV 0 30 7mvV 6 1 ms 20 00000 nA 3 0 9mV 0 11 700 uV 6 1 ms 200 0000 nA 6 0 90 mV 0 30 4mV 395 us 2 000000 uA 3 0 9mV 0 11 400 uV 395 us 20 00000 uA 6 0 90 mV 0 30 4mvV 135 us 200 0000 uA 2 5 9 mV 0 11 400 uV 135 us 2 000000 mA 6 0 90 mV 0 30 4mV 21 us 20 00000 mA 2 5 9 mV 0 11 400 pV 21 us 1 888 KEITHLEY u s only www keithley com A Greater Measure of Confidence Dual Channel Picoammeter GENERAL Typical Noise Floor Measurement Specification Typical Noise Floor RMS 1 STDEV 100 Samples Range 0 01 NPLC 0 1 NPLC 1 0NPLC 10NPLC 2 000000 nA 2 pA IpA 40 fA 15 fA 20 00000 nA 2 pA 1 pA 40 fA 15 fA 200 0000 nA 200 pA 100 pA 2 pA 500 fA 2 000000 uA 200 pA 100 pA 2 pA 500 fA 20 00000 uA 20 nA 10 nA 200 pA 50 pA 200 0000 uA 20 nA 10 nA 200 pA 50 pA 2 000000 mA 2 uA 1 uA 25 nA 5 nA 20 00000 mA 2 uA 1 uA 25 nA 5 nA SOURCE CAPACITANCE Stable to 10 0nF typical INPUT BIAS CURRENT 50fA max 23 C INPUT VOLTAGE BURDEN 4 0mV max VOLTAGE SOURCE SLEW RATE 3 0ms V typical COMMON MODE VOLTAGE 200VDC COMMON MODE ISOLATION Typically 10 Q in parallel with 150nF OVERRANGE 105 of measurement range MEMORY BUFFER 6000 readings two 3000 point buffers Includes selected measured value s and time stamp PROGRAMMABILITY IEEE 488 SCPI 1995 0 RS 232 five user definable power
64. cation Signal connections to the Model 6487 are made through to measure currents less than the instrument s triax connector Often a detector may require high voltage to attract ions making 100nA Even at higher currents the 6487 s 500V source a necessity a DMM s input voltage drop voltage burden of hundreds of millivolts can make accurate Picoammeter Voltage Source current measurements impossible Electrometers can measure low lon Beam currents very accurately but the circuitry needed to measure extremely low currents combined with functions like voltage resistance and charge measure ment can increase an electrom High Resistance Measurements eter s cost significantly The Model The Model 6487 Picoammeter can be used to l 6487 Picoammeter 6487 Picoammeter Voltage measure high resistances gt 1GQ in applications Metal Shield Source combines the economy such as insulation resistance testing A constant and ease of use of a DMM with voltage is placed in series with the unknown low current sensitivity near that of resistance and the picoammeter The voltage aa MIRE TORS ae drop across the picoammeter is negligible so all the voltage appears across the unknown resistance The resulting current is measured by the picoammeter and the resistance is calculated using Ohm s Law R V I To prevent generated saure current due to electrostatic interference the unknown resistance is housed in a shielded test fixture A
65. counts rdg counts C 20 pA 100 aA 1 30 01 5 200 pA 1 fA I oar 5 EID sell 2 nA 10 fA 0 2 30 01 2 20 nA 100 fA MA T 0 03 1 200 nA 1 pA 0 2 5 0 03 1 2 pA 10 pA 0 1 10 0 005 2 20 uA 100 pA 01 5 0 005 1 200 uA 1 nA Ml ae S 0 005 1 2 mA 10 nA 0 1 10 0 008 2 20 mA 100 nA Ouse S 0 008 1 INPUT BIAS CURRENT lt 3fA at Tep Temperature coefficient 0 5fA C 20pA range INPUT BIAS CURRENT NOISE lt 750aA p p capped input 0 1Hz to 10Hz band width damping on Digital filter 40 readings 20pA range INPUT VOLTAGE BURDEN at Tea 1 C lt 20xV on 20pA 2nA 20nA 2A and 20uA ranges lt 100V on 200pA 200nA and 200A ranges lt 2mV on 2mA range lt 5mV on 20mA range TEMPERATURE COEFFICIENT OF INPUT VOLTAGE BURDEN lt 10yV C on pA nA and uA ranges PREAMP SETTLING TIME to 10 of final value Typical 0 5sec damping off 2 0 sec damping on on pA ranges 15msec on nA ranges damping off Imsec on uA ranges damping off 500usec on mA ranges damping off NMRR gt 60dB on all ranges at 50Hz or 60Hz NOTES 1 When properly zeroed 5 2 digit 1PLC power line cycle median filter on digital filter 10 readings 2 aA 10 8A fA 10 A 3 Line sync on 1 888 KEITHLEY wis only www keithley com Electrometer High Resistance Meter OHMS Normal Method TEMPERATURE ACCURACY COEFFICIENT 10 100 Range 10 100 Range 5 2 DIGIT 18 28 C 1 Year 0 18 C amp 28 50 C AUTO
66. del 485 emulation via DDC mode RS 232 IMPLEMENTATION Supports SCPI 1996 0 Baud Rates 300 600 1200 2400 4800 9600 19 2k 38 4k 57 6k Protocols Xon Xoff 7 or 8 bit ASCII parity odd even none Connector DB 9 TXD RXD GND 1 888 KEITHLEY ws only www keithley com Picoammeter GENERAL INPUT CONNECTOR BNC on rear panel DISPLAY 12 character vacuum fluorescent RANGING Automatic or manual OVERRANGE INDICATION Display reads OVRFLOW CONVERSION TIME Selectable 0 01 PLC to 60 PLC 50 PLC under 50Hz operation Adjustable from 200us to 1s READING RATE To internal buffer 1000 readings second To IEEE 488 bus 900 readings second Notes 1 0 01 PLC digital filters off front panel off auto zero off 2 Binary transfer mode IEEE 488 1 BUFFER Stores up to 2500 readings PROGRAMS Provide front panel access to IEEE address choice of engineering units or scientific notation and digital calibration EMC Conforms with European Union Directive 89 336 EEC EN61326 1 SAFETY Conforms with European Union Directive 73 23 EEC EN61010 1 TRIGGER LINE Available see manual for usage DIGITAL FILTER Median and averaging selectable from 2 to 100 readings ENVIRONMENT Operating 0 50 C relative humidity 70 non condensing up to 35 C Above 35 C derate humidity by 3 for each C Storage 25 to 65 C WARM UP 1 hour to rated accuracy see manual for recommended procedure POWER 10
67. device The Model 6221 s pulse measurement capability minimizes the amount of power dissipated into a DUT by offering maximum flexibility when making pulsed measurements allowing users to program the optimal pulse current amplitude pulse interval pulse width and other pulse parameters The Model 6221 makes short pulses and reductions in heat dissipation possible with microsecond rise times on all ranges The Model 6221 2182A combination synchronizes the pulse and measure ment a measurement can begin as soon as 16us after the Model 6221 applies the pulse The entire pulse including a complete nanovolt measurement can be as short as 50us Line synchronization between the Model 6221 and Model 2182A eliminates power line related noise Standard and Arbitrary Waveform Generator The Model 6221 is the only low current AC source on the market It can be programmed to gen erate both basic waveforms sine square triangle and ramp and customizable waveforms with an arbitrary waveform generator ARB that supports defining waveforms point by point It can generate waveforms at frequencies ranging from 1mHz to 100kHz at an output update rate of 10 megasamples second Performance Superior to AC Resistance Bridges and Lock In Amplifiers The Model 622X 2182A combination provides many advantages over AC resistance bridges and lock in amplifiers including lower noise lower current sourcing lower voltage measurements less power dissipation into
68. e for operation outside the range of 18 to 28 C Autorange enabled DC offset set to OV Spurious output at low amplitude is 75dBm typical Add 1ppm C average for operation outside the range of 18 to 28 C FSK uses trigger input IMHz maximum Sine and square waveforms above 10MHz are allowed only with an infinite burst count NW WM RR O amp N KEITHLEY A Tektronix Company Model 3390 specifications Lu 9 fa O T o Lu vn lt x Lu LJ gt Lu O 157 1 888 KEITHLEY wis only KEITHLEY A Greater Measure of Confidence A Tektronix Company Lu 9 x O Vv o Lu vn lt x Lu LJ gt Lu ar 158
69. eater Measure of Confidence lower measured emitter current than intended Ifa picoammeter or electrometer were used instead the voltage burden would cause a negligible change in emitter current Sources of Generated Current Error Low current measurements are subject to a number of error sources that can have a serious impact on measurement accuracy All ammeters will generate some small current that flows even when the input is open These offset currents can be partially nulled by enabling the instrument current suppress External leakage currents are additional sources of error therefore making properly guarded and or shielded connections is important The source impedance of the DUT will also affect the noise performance of the ammeter In addition there are other extraneous generated currents in the test system that could add to the desired current causing errors The follow ing paragraphs discuss various types of generated currents and how to minimize their impact on the measurements Frictional motion at boundary due to cable motion Conductive lubricant in low noise cable Outer Jacket Outer niei Shield Conductor Figure 4 Triboelectric effects are created by charge imbal ance due to frictional effects between a conductor and an insulator as shown in Figure 4 Keithley s low noise cables greatly reduce this effect by intro ducing an inner insulator of polyethylene coated with graphite underneath t
70. ectrometer 500V peak V Source 750V peak ISOLATION Meter COMMON to chassis gt 10 Q lt 500pF INPUT CONNECTOR Three lug triaxial on rear panel 2V ANALOG OUTPUT 2V for full range input Non inverting in Volts mode inverting when measuring Amps Ohms or Coulombs Output impedance 10kQ PREAMP OUTPUT Provides a guard output for Volts measurements Can be used as an inverting output or with external feedback in Amps and Coulombs modes EXTERNAL TRIGGER TTL compatible External Trigger and Electrometer Complete GUARD Switchable voltage guard available DIGITAL I O AND TRIGGER LINE Available see manual for usage EMC Conforms to European Union Directive 89 336 EEC EN 61326 1 SAFETY Conforms to European Union Directive 73 23 EEC EN 61010 1 READING STORAGE 50 000 READING RATES To Internal Buffer 425 readings second To IEEE 488 Bus 400 readings second Bus Transfer 3300 readings second 1 0 01PLC digital filters off front panel off temperature RH off Line Sync off 2 Binary transfer mode DIGITAL FILTER Median and averaging ENVIRONMENT Operating 0 50 C relative humidity 70 non condensing up to 35 C Storage 25 to 65 C ALTITUDE Maximum 2000 meters above sea level per EN 61010 1 WARM UP 1 hour to rated accuracy see manual for recommended procedure POWER User selectable 100 120 220 240VAC 10 50 60Hz 100VA max PHYSICAL Case Dimensions 90mm high x 214mm wide x
71. el thermoelectric offsets that drift over time produce results in half the time of the previ ous technique and allow the source to control and configure the nanovoltmeter so setting up the measurement takes just two key presses The improved cancellation and higher reading rate reduces measurement noise to as little as 1nvV A Greater Measure of Confidence A Tektronix Company DC Current Source 210E 9 Delta Volkace Fl K Sia E iiy i Ava ATTI OUO A RN O Y AS i 3 T ii yH Y i i i vi L H y eis i i i i 42E 0 440E 0 460E 0 4 R0E 0 S00E 0 Delta Mi yde R tesistance Graph so or no a a we ee a F Ygtag d Delta Mode Measurement Measurement Figure 2 Delta mode offers 1000 to 1 noise reduction The delta mode enables measuring low voltages and resistances accurately Once the Model 622X and the Model 2182A are connected properly the user simply presses the current source s Delta button followed by the Trigger button which starts the test The Model 622X and the Model 2182A work together seamlessly and can be controlled via the GPIB interface GPIB or Ethernet with the Model 6221 The free example control software available for the Model 622X includes a tutorial that walks users through the delta mode setup process Pulsed Tests Even small amounts of heat introduced by the measurement process itself can raise the DUT s tem perature skewing test results or even destroying the
72. ent measurements from 1fA to 20mA Up to 425 rdgs s e Voltage measurements from 10uV to 200V 0 75fA noise e Resistance measurements from 50Q to 10 Q PP e Charge measurements from 10fC to 2uC Built in 1kV voltage source Pe Improved High Resistivity Measurements Many test applications require measuring high levels of resistivity surface or volume of materials The conventional method of making these measurements is to apply a sufficiently large voltage to a sample measure the current that flows through the sample then calculate the resistance using Optional plug in scanner cards Ohm s Law R V I While high resistance materials and devices produce very small currents that are difficult to measure accurately Keithley s electrometers and picoammeters are used successfully for such measurements Unique voltage reversal method for high resistance measurements Even with high quality instrumentation inherent background currents in the material can make these measurements difficult to perform accurately Insulating materials polymers and plastics typically exhibit background currents due to piezoelectric effects capacitive elements charged by static electricity and polarization effects These back ground currents are often equal to or greater than the current stimulated by the applied voltage In these cases the result is often unstable providing inaccurate resistance or resistivity readings or even erroneous negative values Kei
73. ent source waveform generator The Model 6221 is the only low current AC source on the market Before its introduction researchers and engineers were forced to build their own AC current sources This cost effective source provides better accuracy consistency reliability and robustness than home made solutions The Model 6221 is also the only commercially available current source waveform generator which greatly simplifies creating and outputting com plex waveforms Simple programming Both current sources are fully programmable via the front panel controls or from an external controller via RS 232 or GPIB interfaces the Model 6221 also features an Ethernet interface for remote control from anywhere there s an Ethernet connection Both instruments can source DC currents from 100fA to 105mA the Model 6221 can also source AC currents from 4pA to 210mA peak to peak The output voltage compliance of either source can be set from 0 1V to 105V in 10mV steps Voltage compliance which limits the amount of voltage applied when sourcing a current is critical for applications in which overvoltages could damage the device under test DUT APPLICATIONS e Nanotechnology Differential conductance Pulsed sourcing and resistance Drop in replacement for the Model 220 current source These instruments build upon Keithley s popular Model 220 Programmable Current Source a Model 220 emulation mode makes it easy to replace a Model 220 with
74. ents high enough for applications such as measuring 4 20mA sensor loops 6485 PICOAMMETER Although it employs the latest current measurement technology it is significantly less expensive than other instruments that perform similar functions such as optical power meters competitive pico Cost effective low current ammeters or user designed solutions With a price that s comparable to a general purpose DMM measurement solution the Model 6485 makes picoamp level measurements affordable for virtually any laboratory or f production floor 10fA resolution Low Voltage Burden and Higher Accuracy While DMMs typically employ shunt ammeter circuitry to measure current the Model 6485 is a feed lt 200npV burden voltage back picoammeter This design reduces voltage burden by several orders of magnitude resulting in a voltage burden of less than 200uV on the lower measurement ranges The low voltage burden makes the Model 6485 function much more like an ideal ammeter than a DMM so it can make current 51 2 digit resolution Up to 1000 readings second Built in Model 485 emulation measurements with high accuracy even in circuits with mode very low source voltages _ Model485 Model 6485 _ Current Ranges 2nA 2mA 2nA 20mA IEEE 488 and RS 232 interfaces Successor to the Model 485 Voltage Burden 200uxV Bee Analog output The Model 6485 builds on the strengths of one of Reading Rate 3 s 1000 s Keithley s most popular picoammeters the Model
75. ermining the transition temperature of superconductive materials e l V characterization of a material at a specific temperature e Calorimetry Differential thermometry e Superconductivity e Nanomaterials Metrology e Intercomparisons of standard cells Null meter for resistance bridge measurements 1 888 KEITHLEY ws only www keithley com Nanovoltmeter Reliable Results Power line noise can compromise measurement accuracy significantly at the nanovolt level The Model 2182A reduces this interference by synchronizing its measurement cycle to line which minimizes variations due to readings that begin at different phases of the line cycle The result is exceptionally high immunity to line interference with little or no shielding and filtering required Optimized for Use with Model 6220 6221 Current Sources Device test and characterization for today s very small and power efficient electronics requires sourc ing low current levels which demands the use of a precision low current source Lower stimulus currents produce lower and harder to measure voltages across the devices Linking the Model 2182A Nanovoltmeter with a Model 6220 or 6221 Current Source makes it possible to address both of these challenges in one easy to use configuration When connected the Model 2182A and Model 6220 or 6221 can be operated like a single instrument Their simple connections eliminate the isolation and noise current problems that p
76. ess power put into the DUT In very small devices sometimes even a small amount of power is enough to destroy them In other devices a small amount of power could raise the temperature significant ly causing the measurements to be invalid With superconducting devices a small amount of heat introduced while making measurements can raise the device temperature and alter the results When sourcing current and measuring voltage the sourced current dissipates heat PR into the device and leads With the lowest resistance devices lt 10uQ the power dissi pated during the measurement may be primarily at contact points etc rather than in the device itself It is important to complete the measure ment before this heat can be conducted to the device itself so fast pulsed measurements are critical even at these lowest resistances 2pt Delta Resistance 3pt Delta Resistance Sourced l MERN WY Wey RN Ci 9 1S ry a wn o 4 Measured V Figure 6 1000 delta resistance readings using 100 resistor and 10nA source current 1 888 KEITHLEY wis only www keithley com With higher resistance devices significant power is dissipated within the device Therefore with these devices it is even more important to reduce the measurement power by reducing the source current or the source pulse width Many tests measure device properties across a range of current
77. ey com Programmable Electrometer VOLTS Accuracy Temperature 1 Year Coefficient 51 2 Digit 18 28 C 0 18 C amp 28 50 C Range Resolution rdg counts rdg counts C 2V 10 uV 0 025 4 0 003 2 20 V 100 uV 0 025 3 0 002 1 200 V 1 mV 0 06 3 0 002 1 NOTES 1 When properly zeroed 51 2 digit Rate Slow 100ms integration time NMRR 60dB on 2V 20V gt 55dB on 200V at 50Hz or 60Hz 0 1 CMRR gt 120dB at DC 50Hz or 60Hz INPUT IMPEDANCE gt 200TQ in parallel with 20pF lt 2pF guarded 10MQ with zero check on SMALL SIGNAL BANDWIDTH AT PREAMP OUTPUT Typically 100kHz 3dB AMPS Accuracy Temperature 1 Year Coefficient 51 2 Digit 18 28 C 0 18 C amp 28 50 C Range Resolution rdg counts rdg counts C 20 pA 100 aA 1 30 0 1 5 200 pA 1 fA E ol a 2 nA 10 fA 0 2 30 01 2 20 nA 100 fA 02 5 0 03 1 200 nA 1 pA 02 5 0 03 1 2 uA 10 pA 0 1 10 0 005 2 20 uA 100 pA O1 5 0 005 1 200 uA 1nA 01 5 0 005 1 2 mA 10 nA 0 1 10 0 008 2 20 mA 100 nA 01 5 0 008 1 NOTES 1 When properly zeroed 5 2 digit Rate Slow 100ms integration time 2 aA 10 8A fA 10 A INPUT BIAS CURRENT lt 3fA at Tea user adjustable Temperature coefficient 0 5fA C INPUT BIAS CURRENT NOISE lt 750aA p p capped input 0 1Hz to 10Hz bandwidth damping on Digital filter 40 readings INPUT VOLTAGE BURDEN at T 1 C user adjustable lt 20uUV on 20pA 2nA 20nA 2uA 20uA ra
78. fear Operation bded Operation FrontPanel Hen Deka Hod Messuements OfferentidiCondictence Measurements Pubed M Measurements ARE Waea Gerersbor Loenenare scr SETUP ADWANCED sre OGRA PLOT SHEET HOLE aenn pata sue DATA a 5 Diferential C orden tame Surface Mok Tratrgean erey 4 i garh Egri d P Mae Aa le t ereen Harisantal and Vertical Joos are controked irom 20 Graph Tab x en Current r E 5 n ai r Menor E ait Poet y sta aT a k 70 Brt Garent Amped i inisini i 20 ey _ Reret Mice vw _ TETT a0 Stoo Current dene of O01 Bhain of pahit poe f LOL Disl pattie Hims ire mi a Vole Measure Fire Loni i Figure 1 Perform analyze and display differential conductance measurements Delta Mode Keithley originally developed the delta mode method for making low noise measurements of voltages and resistances for use with the Model 2182 Nanovoltmeter and a triggerable external current source Essentially the delta mode automatically triggers the current source to alternate the signal polarity then triggers a nanovoltmeter reading at each polarity This current reversal technique cancels out any constant thermoelectric offsets ensuring the results reflect the true value of the voltage This same basic technique has been incorporated into the Model 622X and Model 2182A delta mode but its implementation has been dramatically enhanced and simplified The technique can now canc
79. gger Delay 0 Analog Output off 14 Speeds include measurements and binary data transfer out the GPIB Analog Filter On 4 readings s max 15 Auto Zero Off NPLC 0 01 16 10mV range 80 readings s max 17 Sample count 1024 Auto Zero Off 18 For Lync On reduce reading rate by 15 19 For Channel 2 Low Q mode Off reduce reading rate by 30 20 Front Auto Zero off Auto Zero off 21 Applies to measurements of room temperature resistances lt 10Q Isource range lt 20uA 22 Display off delay 1ms N e KEITHLEY A Greater Measure of Confidence A Tektronix Company 6220 6221 6220 and 6221 Source and sink programmable load 100fA to 100mA 104 output impedance ensures stable current sourcing into variable loads 65000 point source memory allows executing comprehensive test current sweeps directly from the current source Built in RS 232 GPIB Trigger Link and digital I O interfaces Reconfigurable triax output simplifies matching the application s guarding requirements Model 220 emulation mode eliminates need to reprogram existing applications 6221 Only Source AC currents from 4pA to 210mA peak to peak for AC characterization of components and materials The 6221 s 10MHz output update rate generates smooth sine waves up to 100kHz Built in standard and arbitrary waveform generators with ImHz to 100kHz frequency range Applications include use as a complex programmable load or senso
80. h a 20pA test current The free Model 6220 6221 instrument control example start up software used here can be downloaded from www keithley com KEITHLEY A Greater Measure of Confidence A Tektronix Company 2182A Nanovoltmeter cancels out any constant thermoelectric offsets so the results reflect the true value of the voltage being measured The improved delta mode for Model 2182A Model 622X the Model 2182A and the Model 622X current sources uses the same basic RS 232 gp GPIB or technique but the way in which it s implemented has been simplified dra Prieger kine Ethernet matically The new technique can cancel thermoelectric offsets that drift es eeeeccee gt over time not just static offsets produces results in half the time of the jaa colo meee i original technique and allows the current source to control and configure the Model 2182A Two key presses are all that s required to set up the measurement The improved cancellation and higher reading rates reduce measurement noise to as little as 1nvV Differential Conductance Measurements Characterizing non linear tunneling devices and low temperature devices often requires measuring differential conductance the derivative of a device s I V curve When used with a Model 622X current source the Figure 3 It s simple to connect the Model 2182A to the Model Model 2182A is the industry s fastest most complete solution for d
81. he input terminal that is proportion al to the current being measured Figure 1 DMM shunt ammeter VBURDEN 200mV at full scale Figure 1 The main drawback associated with shunt ammeters is their fundamentally high input impedance design This drawback becomes more significant with decreasing current because a larger shunt resistor must be used in order to develop a measurable voltage However as long as the shunt resistor is significantly smaller than the resistance of the DUT and the currents to be measured are not very small not much lower than microamp level 10 A shunt ammeters work fine Voltage Burden The terminal voltage of an ammeter is called the volt age burden This voltage burden developed across the meter could result in significantly lower current through the load than before the meter was inserted therefore the ammeter can t read the current it was intended to measure An ideal ammeter would not alter the current flowing in the circuit path so it would have zero resistance and zero voltage burden A real ammeter will always introduce a non zero voltage burden In general the error term caused by an ammeter is stated as the ammeter s voltage burden divided by the resistance 1 888 KEITHLEY wis only www keithley com Low Current High Resistance Measurements of the DUT A shunt ammeter s voltage burden is typi cally on the order of hundreds of millivolts Picoammeter Elect
82. he outer shield The graphite provides lubrication and a conducting equipotential cylinder to equalize charges and minimize the charge generated Piezoelectric currents are generated when mechani cal stress is applied to certain crystalline materials when used for insulated terminals and interconnect ing hardware In some plastics pockets of stored charge cause the material to behave in a manner similar to piezoelectric materials An example of a terminal with a piezoelectric insulator is shown in Figure 5 To minimize the current due to this effect remove mechanical stresses from the insulator and use insulating materials with minimal piezoelectric and stored charge effects KEITHLEY A Tektronix Company WY aD aD gt VY aD aD 1S a VY aD n iG 90 iE aS ma aD eal gt UO e ll _ 49 qj to s D LOW LEVEL MEASURE amp SOURCE 127 VY a aD z aD VY ig aD aD O O 2 VY aD Dex BO lt lt SS aD UO e al p eo qa O 2 de D Technical Information Metal Terminal Piezoelectric Insulator Conductive Plate Figure 5 Printed Epoxy Printed Circuit Board Figure 6 Contamination and humidity can produce error currents which arise from electrochemical effects that occ
83. hest resistance measurable with better than 1 accuracy 3 Delta mode offset voltage compensation with external current source 10nQ if used with 5A test current with Model 2440 1 888 KEITHLEY wis only www keithley com 2010 253 100 mV 1000 V 100 nV rms N A N A 0 9 mQ 100 MQ 200 C 1372 C Banana jacks 4 Dry circuit Offset compensation DMM IEEE 488 RS 232 Plug in scanner cards Low Voltage Low Resistance Meters 2002 247 200 mV 1000 V 150 nV rms N A N A 1 2 mQ 1GQ 200 C 1820 C Banana jacks 4 8 2 digits DMM Plug in scanner cards KEITHLEY A Greater Measure of Confidence A Tektronix Company Make low noise measurements at high speeds typically just 15nV p p noise at 1s response time 40 50nV p p noise at 60ms Delta mode coordinates measurements with a reversing current source at up to 24Hz with 30nV p p noise typical for one reading Averages multiple readings for greater noise reduction Synchronization to line provides 110dB NMRR and minimizes the effect of AC common mode currents Dual channels support measuring voltage temperature or the ratio of an unknown resistance to a reference resistor Built in thermocouple linearization and cold junction compensation 1 888 KEITHLEY u s only Nanovoltmeter CHANNEL 1 The two channel Model 2182A Nanovoltmeter is optimized for making stable low noise voltage meas
84. ices being tested have become smaller more sensitive and more complex To accurately duplicate the signals these tiny devices receive very clean pulses with crisp edges are mandatory which is why the Model 3390 offers the fastest rise time 5ns and cleanest pulse shapes for this class of instrument Modulating Waveforms The ability of the Model 3390 to modulate at high internal frequencies allows you to accu rately simulate real world conditions Modulate 7 rR a any of your signals with the built in AM FM PM ji hyi PWM or FSK source or use your own external 4 modulation source Keithley 3390 Leading Competitor Noise Generation Inject noise into your device under test with the press of a button The adjustable amplitude and offset parameters control how much or how little noise is produced The fast rise times and high speed capability provides the precise noise simulation your applications require The faster rise time results in cleaner pulses A Greater Measure of Confidence A Tektronix Company Ordering Information 3390 50MHz Arbitrary Waveform Function Generator Accessories Supplied Arbitrary Waveform Generator with power cord One universal serial bus USB cable USB B 1 One pattern generator cable 005 003 00003 One Ethernet crossover cable CA 180 3A CD ROM containing user s manual ACCESSORIES AVAILABLE 4299 3 Single Rack Mount Kit 4299 4 Dual Rack Mount Kit 7755 50Q Feed Thro
85. ifferen idp or 6221 to ake a variety of measurements The instrument tial conductance measurements providing 10X the speed and significantly control example start up software available for the Model 622X lower noise than other instrumentation options There s no need to current sources includes a step by step guide to setting up the average the results of multiple Sweeps because data can be obtained in a instrumentation and making proper connections single measurement pass reducing test time and minimizing the potential for measurement error Pulsed Testing with the Model 6221 When measuring small devices introducing even tiny amounts of heat to the DUT can raise its temperature skewing test results or even destroying the device When used with the Model 2182A the Model 6221 s pulse capability minimizes the amount of power dissipated into a DUT The Model 2182A 6221 combination synchronizes the pulse and measurement A measurement can begin as soon as 16us after the Model 6221 applies the pulse The entire pulse including a complete nanovolt measure ment can be as short as 50us Competition 2182A in delta mode WY C O D 2 gan a eTo N Q _ oD DO O w D E _ O ge gt 60 O O a _ oO fet QO 2 Q N Q eee O Uj WV D D Shoes 5 N D eD ma Figure 4 The Model 2182A
86. ifier noise increases The current reversal method The Model 2182A is optimized for the current reversal method which combines the advantages of both earlier approaches In this technique the DC test current is reversed then the difference in voltage due to the difference in current is determined Typically this measurement is performed at a few hertz a frequency just high enough for the current to be reversed before the thermal voltages can change The Model 2182A s low noise performance at measurement times of a few hundred milliseconds to a few seconds means that the reversal period can be set quite small in comparison with the thermal time constant of the sample and the con nections effectively reducing the impact of thermal voltages 1 888 KEITHLEY wis only Nanovoltmeter 220 215 Temperature C 210 205 200 195 190 185 180 H t i t H t H t H t t 10 O 8 17 25 33 42 50 58 67 75 83 92 100 108 117 125 Minutes Figure 5 The Model 2182A s delta mode provides extremely stable results even in the pres ence of large ambient temperature changes In this challenging example the 200nV signal results from a 20pA current sourced by a Model 6221 through a 10m2 test resistor Optional Accessory Model 2187 4 Low Thermal Test Lead Kit The standard cabling provided with the Model 2182A Nanovoltmeter and Model 622X Current Sources provides everything norm
87. igger Link interface The Trigger Link interface simplifies synchronizing the Model 6487 with other instruments and voltage sources This interface combines six independent selectable trigger lines on a single connector for simple direct control over all instruments in a system Display on off switch For research on light sensitive components such as measuring the dark currents of photodiodes or I V measurements on unpackaged semiconductors the front panel display can be switched off to avoid introducing light that could significantly reduce the accuracy of the results One touch front panel design Functions can be configured easily with the push of a button without complicated function menus A Broad Range of Low Current Applications Wafer Level Photodiode Testing The Model 6487 Picoammeter Voltage Source can be paired with a calibrated light source and a probing fixture to create a cost effective photodiode test system Multiple Model 6487s can be con nected to the DUT s probe pads to provide photocurrent readings or with the addition of a switch matrix one picoammeter can take current measurements from multiple pads In the first step of the measurement process performed in total darkness the Model 6487 produces a voltage sweep and then measures the resulting dark current In the second step a voltage bias is applied and the result ing photocurrent is measured while the light level is increased in calibrated steps The same basic
88. ines fiber alignment and device characterization processes User programmable photodetector calibration coefficients 3000 point buffer memory on each channel allows data transfer after test completion Digital I O and Trigger Link for binning and sweep test operations IEEE 488 and RS 232 interfaces 1 888 KEITHLEY u s only optical power measurements The Model 2502 features a high speed analog output that allows using the LIV test system at the fiber alignment stage of the LDM manufacturing process Through the use of buffer memory and a Trigger Link interface that s unique to Keithley instruments the Model 2502 can offer the fastest throughput available today for LIV testing of laser diode modules These instruments are ruggedly engineered to meet the reliability and repeatability demands of continuous operation in round the clock production environments Low Level High Speed Measurements The Model 2502 combines Keithley s expertise in low level current measurements with high speed current measurement capabilities Each channel of this instrument consists of a voltage source paired with a high speed picoammeter Each of the two channels has an independent picoammeter and volt age source with measurements made simultaneously across both channels Part of a High Speed LIV Test System In a laser diode module DC CW test stand the Model 2502 provides the voltage bias to both the back facet monitor diode and a Model 2500IN
89. ing Leading Competitor Keithley 3706A Plant environment monitoring and control Automotive and aerospace systems Consumer product certification testing laboratories v bo S i u E a oa 7 2 gt Z U A 10 0 15 0 20 0 25 0 1000 Readings at 1PLC Compare the Model 3706A s 10V DC noise and speed performance with that of the leading competitor All the data was taken at 1PLC with a low thermal short applied to the input which resulted in 10x lower noise and 7x faster measurements for the Model 3706A A Greater Measure of Confidence A Tektronix Company Technical Information An ammeter is an instrument for measuring electric current flow calibrated in amperes There are two main types of ammeter architectures shunt amme ters and feedback ammeters Shunt vs Feedback Ammeters Shunt ammeters are the most common type and work in many applications feedback ammeters are more appropriate when measuring small currents their use is growing because the typical magnitude of the test currents used today is decreasing However choosing the proper ammeter depends not only on the magnitude of the current but also on character istics most typically the impedance of the device under test DUT Shunt Ammeters DMMs Shunt ammeters are the most common ammeter type and are found in almost all digital multimeters DMMs These meters measure current by develop ing a voltage at t
90. ious voltages in two circumstances 1 if the field is changing with time and 2 if there is relative motion between the circuit and the field Figure 3a Changing magnetic fields can be generated from the motion of a conductor in a magnetic field from local AC currents caused by components in the test system or from the deliberate ramping of the magnetic field such as for magnetoresistance measurements a Area A enclosed Agr DUT Voltmeter B The voltage developed due to a field passing through a circuit enclosing a prescribed area is _do _ dA _ dA a8 dt dt dt dt Vg b ae Z Voltmeter Figure 3 Minimizing interference from magnetic fields with twisted leads To minimize induced magnetic voltages leads must be run close together and should be tied down to minimize movement Twisted pair cabling reduces the effects of magnetic fields in two ways first it reduces the loop area through which the magnetic KEITHLEY A Tektronix Company Technical Information field is interfering second a magnetic field will create voltages of opposite polarities for neighboring loops of the twisted pair that will cancel each other Figure 3b Low Resistance Measurements Low resistances lt lt 10Q2 are typically best measured by sourcing current and measuring voltage For very low resistances micro ohms or less or where there are power limitations involved this method will require measuring
91. isolation is maintained between each channel gt 10 Q The Model 6521 maintains the current path even when the channel is deselected making it a true current switch BNC input connectors help provide shielding for sensitive measurements and make the card compatible with low noise coaxial cables The Model 6521 is well suited for automating reverse leakage tests on semiconductor junctions or gate leakage tests on FETs Compatible with Keithley s Model 6517 and 6517A Electrometers The Model 6522 Voltage Low Current Scanner Card can provide up to ten channels of low level current high impedance voltage high resistance or charge switching Although it is similar to the Model 6521 in many ways the Model 6522 s input connectors are 3 lug triax The card can be soft ware configured for high impedance voltage switching of up to 200V Triaxial connectors make it possible to float the card 500V above ground and drive guard to 200V Lu U m O Vv o Lu oe m Vv x Lu ul Lu Lu onl onl 152 6521 3Y EW 6522 3Y EW Ordering Information 6521 Low Current 10 channel Scanner Card Low Current High Impedance Voltage High Resistance 10 channel Scanner Card SERVICES AVAILABLE from date of shipment from date of shipment 1 888 KEITHLEY ss ony 1 year factory warranty extended to 3 years 1 year factory warranty extended to 3 years MODEL 6521 SPECIFICATIONS CHANNELS PER CARD 10
92. lague other solu tions The Model 2182A 622X combination allows making delta mode and differential conductance measurements faster and with less noise than the original Model 2182 design allowed The Model 2182A will also work together with the Model 6221 to make pulse mode measurements The 2182A 622X combination is ideal for a variety of applications including resistance measure ments pulsed I V measurements and differential conductance measurements providing significant advantages over earlier solutions like lock in amplifiers or AC resistance bridges The 2182A 622X combination is also well suited for many nanotechnology applications because it can measure resistance without dissipating much power into the device under test DUT which would otherwise invalidate results or even destroy the DUT An Easy to Use Delta Mode Keithley originally created the delta mode method for measuring voltage and resistance for the Model 2182 and a triggerable external current source such as the Model 2400 SourceMeter SMU instrument Basically the delta mode automatically triggers the current source to alternate the signal polarity and then triggers a nanovoltmeter reading at each polarity This current reversal technique Delta Mode Re Lad ah Pam pia ed el a aw ae i a sistance G EEE Yolkage Delta Mode Measurement Measurement Figure 2 Results from a Model 2182A 6220 using the delta mode to measure a 10m2 resistor wit
93. lternating Voltage resistance measurements make it well suited for characterizing low current devices Using the latest current measurement technology it is sig nificantly less expensive than other instruments that perform similar functions such as optical power meters tera ohmmeters competitive picoammeters or user designed solutions With a price that s comparable to a high end DMM the Model 6487 makes picoamp level measurements affordable for virtually any laboratory or production floor Low Voltage Burden and Higher Accuracy While DMMs typically employ shunt ammeter circuitry to measure current the Model 6487 is a feed back picoammeter This design reduces voltage burden by several orders of magnitude resulting in a voltage burden of less than 200V on the lower measurement ranges The low voltage burden makes the Model 6487 function much more like an ideal ammeter than a DMM so it can make current measurements with high accuracy even in circuits with very low source voltages Successor to the Model 487 The Model 6487 builds on the strengths of one of Keithley s most popular picoammeters the Model 487 offering an additional 20mA measurement range as well as much higher measurement speeds up to 1000 readings per second It simplifies device characterization with built in voltage sweeping capability and the Alternating Voltage method for high resistances A time stamped 3000 reading data buffer pro vides minimum ma
94. lternating polarity voltage used VogcErr is the accuracy in volts of the voltage source using V as the setting IyeasEtr is the accuracy in amps of the ammeter using V R as the reading VOLTAGE SOURCE TEMPERATURE ACCURACY 1 Year COEFFICIENT 51 2 DIGIT 18 28 C 0 18 C amp 28 50 C RANGE RESOLUTION setting offset setting offset C 100 V 5 mV 0 15 10 mv 0 005 1mv 1000 V 50 mV 0 15 100 mv 0 005 10 mv MAXIMUM OUTPUT CURRENT 100V Range 10mA hardware short circuit protection at lt 14mA 1000V Range 1mA hardware short circuit protection at lt 1 4mA SETTLING TIME 100V Range lt 8ms to rated accuracy 1000V Range lt 50ms to rated accuracy NOISE typical 100V Range lt 2 6mV rms 1000V Range lt 2 9mV rms KEITHLEY A Greater Measure of Confidence A Tektronix Company 6517B COULOMBS ACCURACY TEMPERATURE 1 Year COEFFICIENT 5 2 DIGIT 18 28 C 0 18 C amp 28 50 C RANGE RESOLUTION rdg counts rdg counts C 2 nC 10 fC 0 44 5 0 04 3 20 nC 100 fC 0 4 5 0 04 1 200 nC 1 pC 0 4 5 0 04 1 2 uC 10 pC 0 4 5 0 04 1 NOTES 1 Specifications apply immediately after charge acquisition Add 4fA iT where Pas of time in seconds between the coulombs zero and measurement and Qv average charge measured over T and RC 300 000 typical 2 When properly zeroed 5 2 digit 1PLC power line cycle median filter on digital filter 10 readings
95. lvin connection method shown in Figure 4b is preferred for low resistance measurements In this configuration the test current is forced through the DUT through one set of test leads while the voltage is measured using a second set of leads called the sense leads There is very little current running through the sense leads so the sense lead resistance has effectively been eliminated Thermoelectric EMFs Thermoelectric voltages can seriously affect low resistance measurement accuracy Given that resist ance measurements involve controlling the current through the DUT there are ways to overcome these unwanted offsets in addition to those mentioned in the low voltage measurement section namely the offset compensated ohms method and the current reversal method e Offset Compensation Technique Figure 5a applies a source current to the resistance being measured only for part of the measurement cycle When the source current is on the total voltage measured by the instrument is the sum of the voltage due to the test current and any thermoelectric EMFs present in the circuit During the second half of the measurement cycle the source current is turned off and the only voltage measured is that due to the thermoelectric EMF This unwanted offset voltage can now be subtracted from the voltage measurement made during the first half of the delta mode cycle e With the Offset Compensation technique the source current is decided by the i
96. ly www keithley com A Greater Measure of Confidence easy to create complex waveforms by adding Graph view l 000 AC and DC Current Source Complete waveform preview T Signal F g 1000 Total l l 1 2000 e000 7000 APPLICATIONS OF 622X 2182A COMBINATION Easy instrument coordination and intuitive example software simplifies setup and operation in many applications Measure resistances from 10nQ to 100MQ One measurement system for wide ranging devices Low noise alternative to AC resistance bridges and lock in amplifiers for measuring resistances Coordinates pulsing and measurement with pulse widths as short as 50us 6221 only Measures differential conduc tance up to 10x faster and with lower noise than earlier solutions allow Differential conductance is an important parameter in semi conductor research for describing density of states in bulk material Delta mode reduces noise in low resistance measurements by a factor of 1000 For low impedance Hall measure ments the delta mode operation of the Model 622X 2182A combination provides industry leading noise performance and rejection of contact potentials For higher impedance Hall measurements greater than 100MQ the Model 4200 SCS can replace the current source switching and multiple high impedance voltage measurement channels This provides a complete solution with pre programmed test projects KEITHLEY A Tek
97. ment includes a step by step measure ment guide that helps users set up their instruments and make proper connections as well as pro gram basic sourcing functions The advanced tools in the package support delta mode differential conductance and pulse mode measurements From this package users can print out the instrument commands for any of the pre programmed functions which provides a starting point for incorporat ing these functions into customized applications Differential Conductance Differential conductance measurements are among the most important and critical measurements made on non linear tunneling devices and on low temperature devices Mathematically differential conductance is the derivative of a device s I V curve The Model 6220 or 6221 combined with the Model 2182A Nanovoltmeter is the industry s most complete solution for differential conductance measurements Together these instruments are also the fastest solution available providing 10x the speed and significantly lower noise than other options Data can be obtained in a single measure ment pass rather than by averaging the result of multiple sweeps which is both time consuming and prone to error The Model 622X and Model 2182A are also easy to use because the combination can be treated as a single instrument Their simple connections eliminate the isolation and noise current problems that plague other solutions Ble Edt Create Tools Browse Wide Helo Gera
98. mmunication Cable between 2182A and 622x CS 1195 2 Safety Interlock Connector Instruction manual on CD Getting Started manual hardcopy Software downloadable ACCESSORIES AVAILABLE 7006 GPIB Cable with Straight On Connector 7007 1 Shielded IEEE 488 Cable 1m 3 3 ft 7007 2 Shielded IEEE 488 Cable 2m 6 6 ft 7078 TRX 5 5 ft 1 5m Low Noise Triax to Triax Cable Male on Both Ends KPCI 488LPA IEEE 488 Interface Controller for the PCI Bus KUSB 488B IEEE 488 USB to GPIB Interface Adapter SERVICES AVAILABLE 6220 3Y EW 1 year factory warranty extended to 3 years from date of shipment 6221 3Y EW 1 year factory warranty extended to 3 years from date of shipment C 6220 3Y ISO 3 ISO 17025 accredited calibrations within 3 years of purchase C 6221 3Y ISO 3 ISO 17025 accredited calibrations within 3 years of purchase Not available in all countries 1 888 KEITHLEY uss ony DC Current Source AC and DC Current Source The Model 6221 s combination of high source resolution and megahertz update rates makes it capable of emulating high fidelity current signals that are indistinguishable from analog current ramps Free Instrument Control Example Start up Software The instrument control example software available for the sources simplifies both performing basic sourcing tasks and coordinating complex measurement functions with the Keithley Model 2182A The software developed in the LabVIEW programming environ
99. nce A Tektronix Company 7 _ aD aD p J 7 aD aD QO _ L W VY aD a WO 49 o 00 gt o love a O S aD p i O aD L e QO aD _ a 7 LL LOW LEVEL MEASURE amp SOURCE 145 Model 6514 specifications Lu UW x O v o Lu 7 lt x Lu LJ gt Lu ar 146 6514 VBURDEN 200mV at full range VsouRCE R _ Vsource VBuRDEN Desired Current Reading DMM s Actual Current Reading Figure 3 Errors Due to Burden Voltage when Measuring with a DMM The example below compares a DMM s voltage burden errors with the 6514 s The desired current reading is I a 20UA 50kQ Actual Reading VeuRDEN 200mV gen 1V 200mV _ 800mV on DMM aaa aa 16uA 20 Burden error Refer to Figure 3 au 20 with a DMM 6514 Actual Reading Vgurpgy LOLV 9 999990V 19 9998uA 0 001 Burden error 50kQ Refer to Figure 2 with the 6514 DMM Offset Currents Typically offset currents in DMMs are tens or hundreds of picoamps which severely limits their low current measuring capabilities compared to the Model 6514 with 3fA input bias current APPLICATIONS e High resistivity measurements e Leakage currents e lon selective electrode measurements pH measurements e Conductivity cells e Potentiometry 1 888 KEITHLEY wis only www keithl
100. nel measurement capabilities the Model 6482 is a great measurement tool for analyz ing multi channel devices monitoring currents in multiple locations on materials and recording data from multiple sensors at once The dual chan nels facilitate easier control and data aggregation The greater channel density increases the number of instruments and channels that can fit in con fined spaces As with most Keithley instruments the Model 6482 s current and voltage limits can be programmed to ensure device protection during critical points such as start of test These instruments also pro vide average and median filters which can be applied to the data stored in the buffer memory Ratio and Delta Measurements The Model 6482 can provide ratio or delta measurements between the two completely isolated chan nels These functions can be accessed via either the front panel or the GPIB interface For test setups with multiple detectors this capability enables targeted control capabilities Features that Expand Test and Measurement Flexibility Scaled voltage analog output The Model 6482 can transmit measurement results to devices such as DMMs data acquisition boards oscilloscopes or strip chart recorders 220V overload protection With this high overload protection and a robust design the Model 6482 can withstand abusive overflows One touch front panel design Functions can be configured easily with the push of a button without
101. nges lt 100LV on 200pA 200nA 200A ranges lt 2mV on 2mA range lt 4mV on 20mA range TEMPERATURE COEFFICIENT OF INPUT VOLTAGE BURDEN lt 10pV C on pA nA uA ranges PREAMP SETTLING TIME to 10 of final value 2 5s typical on pA ranges damping off 3s typi cal on pA ranges damping on 15ms on nA ranges 5ms on uA and mA ranges NMRR gt 95dB on pA 60dB on nA uA and mA ranges at 50Hz or 60Hz 0 1 Digital Filter 40 OHMS Accuracy Temperature 1 Year Coefficient Test 5 2 Digit 18 28 C 0 18 C amp 28 50 C Current Range Resolution rdg counts rdg counts C nominal 2 kQ 10 mQ 0 20 10 0 01 2 0 9 mA 20 kQ 100 mQ 1s 3 0 01 1 0 9 mA 200 kQ 1 Q 0 25 3 0 01 1 0 9 mA 2 MQ 10 Q 0 25 4 0 02 2 0 9 uA 20 MQ 100 Q 0 25 3 0 02 1 0 9 uA 200 MQ 1 kQ 0 30 3 0 02 1 0 9 uA 2 GQ 10 kQ 15 4 0 04 2 0 9 nA 20 GQ 100 kQ lS r 3 0 04 1 0 9 nA 200 GQ 1 MQ 1 5 3 0 04 1 0 9 nA NOTES 1 When properly zeroed 5 2 digit Rate Slow 100ms integration time MAXIMUM OPEN CIRCUIT VOLTAGE 250V DC PREAMP SETTLING TIME To 10 of final reading with lt 100pF input capacitance 2kQ through 200kQ 2ms 20MQ through 200MQ 90ms 2GQ through 200GQ 1s KEITHLEY A Greater Measure of Confidence A Tektronix Company 6514 COULOMBS Accuracy Temperature 1 Year Coefficient 6 2 Digit 18 28 C 0 18 C amp 28 50 C Range Resolution rdg counts rdg counts C 20 nC 10 fC 0 4 50 0 04 1
102. nstrument To characterize at a specific current or a variety of currents the Current Reversal technique Two step Delta technique described below will provide more flexibility e Current Reversal Technique Two Step Delta Technique Figure 5b e Thermoelectric EMFs can also be cancelled by taking two voltages with test currents of opposite polarity The voltage due to the test current can now be calculated using the formula shown in Figure 5b This method provides 2x better signal to noise ratio and therefore better accuracy than the offset compensation technique This is the method employed by the Model 2182A Nanovoltmeter Model 622x Current Source combination For these methods to be effective the consecutive measurements need to be made rapidly when compared with the thermal time constant of the circuit under test If the instruments response speed is too low changes in the circuit temperature during the measurement cycle will cause changes in the thermoelectric EMFs with the result that the thermoelectric EMFs are no longer fully cancelled A Greater Measure of Confidence a Offset compensation measurement cycle One surement cycle gt mea lt On Source Current Off gt Thermal offset measurement b Voltage measurement with source current on __Vemr c Voltage measurement with source current off ___Vemr Rs Vmi Veme ls Rs Vu2 Veme Vm Vum Vm Is Rs
103. onfidence A Tektronix Company Lu 9 O T o Lu vn lt x Lu LJ gt Lu O VY mm go E a aD zZ aD Pa mm VY 49 aD z aD _ 2 7p aD Pa 5 SS aD e76 plans gt ro 2 oey ig a 2 O ad a as D LOW LEVEL MEASURE amp SOURCE 110 Technical Information How to Select a Voltmeter Many kinds of instruments can measure voltage including digital multimeters DMMs electrometers and nanovoltmeters Making voltage measurements successfully requires a voltmeter with significantly higher input impedance than the internal impedance source impedance of the device under test DUT Without it the voltmeter will measure less potential difference than existed before the voltmeter was connected Electrometers have very high input impe dance typically in the order of 100TQ 10 Q so they re the instrument of choice for high impedance voltage measurements DMMs and nanovoltmeters can typically be used for measuring voltages from 10MQ sources or lower Nanovoltmeters are appro priate for measuring low voltages microvolts or less from low impedance sources Low Voltage Measurements Significant errors may be introduced into low voltage measurements by offset voltage and noise sources that can normally be ignored when measuring higher signal levels Steady offset
104. or Cl 6482 Dual Channel pe ee ne i Mi ea of a ft ee 6482 5Y EW 1 Year Factory Warranty extended to 3 years Picoammeter Voltage a sae a from date of shipment Source 120V line acai piibia C 6482 3Y DATA 3 Z 540 1 compliant calibrations within 3 power vol tage 7007 1 Shielded IEEE 488 Cable 1m 3 3 ft years of purchase for Model 6482 7007 2 Shielded IEEE 488 Cable 2m 6 6 ft C 6482 5Y DATA 5 Z 540 1 compliant calibrations within 5 6482 E Dual Channel 7007 4 Shielded IEEE 488 Cable 4m 13 1 ft years of purchase for Model 6482 Picoammeter Voltage 7078 TRX 3 Slot Triax Cable C 6482 3Y ISO 3 ISO 17025 accredited calibrations within 3 Source 220 240V 7009 5 RS 232 Cable years of purchase for Model 6482 line power voltage 7754 3 BNC to Alligator Cable 0 9m ft C 6482 5Y ISO 5 ISO 17025 accredited calibrations within 5 6482 J Dual Channel 8607 Banana Cable set for Analog Output years of purchase for Model 6482 Picoammeter Voltage 8501 1 Trigger Link Cable with Male Micro DIN Source 1 OOV line Connectors at each End 1m 3 3 ft ower voltage 8501 2 Trigger Link Cable with Male Micro DIN P amp Connectors at each End 2m 6 6 ft Accessories Supplied 8503 DIN to BNC Trigger Cable ADAPTERS 7078 TRX BNC 237 TRX BAR 3 lug Triax Barrel Triax to BNC Connector 2x 7078 TRX BNC Female BNC to 3 Slot Male Triax for connecting BNC cable into triax fixture CS 565 BNC Barrel RACK MOUNT KITS 4288 1 Single Fixed Rack Mounting Kit 4288
105. pF Input HI to Input LO ACTUATION TIME 2ms COMMON MODE VOLTAGE lt 300V peak ENVIRONMENT Operating 0 to 50 C up to 35 C at 70 R H Storage 25 to 65 C A Tektronix Company 6220 6514 2000 7001 y ea a 1 001 uo nA SoBe S800 SF ee d oo TA ee cari The Model 6220 Current Source offers material researchers 0 1pA step to 105mA DC output combined with 10 output resistance 98 00SCCO I ii cee Le me ee The Model 6514 Electrometer provides gt 200TQ input impedance and lt 3fA input bias current o Pr if fa The Model 2000 612 Digit Multimeter provides 0 1pV of sensitivity The Model 7001 Switch Control Mainframe controls the 7152 4x5 Low Current Matrix Card which provides contacts with lt 1pA offset current Ordering Information 6220 6514 DC Current Source Programmable Electrometer 2000 Digital Multimeter Options 7001 7152 Switch System 4x5 Low Current Matrix Card 1 888 KEITHLEY uss ony oa pra Impedance Semiconductor Resistivity Hall Effect Test Configurations Alternative Economical Approaches to Heall Coefficient and Resistivity Measurements Occasionally when working with samples with very high resistivity semi insulating GaAs and similar materials with resistivities above 1080 alternative system configurations may be able to produce more reliable data than stan dard pre configured Hall Effect systems
106. pm of reading 0 5ppm of range FRONT AUTOZERO OFF ERROR 10mV 10V Add 8ppm of range 500uV for lt 10 minutes and 1 C NOTE Offset voltage error does not apply for Delta Mode AUTOZERO OFF ERROR 10mV Add 8ppm of range 100nV for lt 10 minutes and 1 C 100mV 100V Add 8ppm of range 10uV for lt 10 minutes and 1 C NOTE Offset voltage error does not apply for Delta Mode INPUT IMPEDANCE 10mV 10V gt 10GQ in parallel with lt 1 5nF Front Filter ON 10mV 10V gt 10GQ in parallel with lt 0 5nF Front Filter OFF 100V 10MQ 1 DC INPUT BIAS CURRENT lt 60pA DC at 23 C 10V to 5V lt 120pA 23 C 5V to 10V COMMON MODE CURRENT lt 50nA p p at 50Hz or 60Hz INPUT PROTECTION 150V peak to any terminal 70V peak Channel 1 LO to Channel 2 LO CHANNEL ISOLATION gt 10GQ EARTH ISOLATION 350V peak gt 10GQ and lt 150pF any terminal to earth Add 35pF ft with Model 2107 Low Thermal Input Cable Analog Output MAXIMUM OUTPUT 1 2V ACCURACY 0 1 of output 1mV OUTPUT RESISTANCE 1kQ 5 GAIN Adjustable from 10 to 10 With gain set to 1 a full range input will produce a 1V output OUTPUT REL Selects the value of input that represents OV at output The reference value can be either programmed value or the value of the previous input Triggering and Memory WINDOW FILTER SENSITIVITY 0 01 0 1 1 10 or full scale of range none READING HOLD SENSITIVITY 0 01 0 1 1
107. pply at 23 C represent the 50th percentile and are provided solely as useful information 2182A MEASUREMENT FUNCTIONS DUT RESISTANCE Up to 1GQ 1ns L00MQ limit for pulse mode DELTA MODE RESISTANCE MEASUREMENTS AND DIFFERENTIAL CONDUCTANCE Controls Keithley Model 2182A Nanovoltmeter at up to 24Hz reversal rate 2182 at up to 12Hz PULSE MEASUREMENTS 6221 ONLY Pulse Widths 50s to 12ms 1pA to 100mA Repetition Interval 83 4ms to 5s 1 888 KEITHLEY ws only www keithley com Settling Time 6221 Only 1 of Final Value Output Temperature Response Output 6220 6221 Coefficient C Typical Noise Typical Noise Bandwidth Response with Output 0 18 C amp peak peak RMS peak peak RMS BW Into Fast Typical Response 28 50 C 0 1Hz 10Hz 10Hz Bw Short 6221 Only Slow Max 0 02 200 fA 400 80 fA 250 50 pA 10kHz 90 us 100 us 0 02 200 fA 4 0 8 pA 250 50 pA 10kHz 90 us 100 us 0 02 2pA 20 4 pA 2 5 0 5 nA 100kHz 30 us 100 us 0 01 20 pA 200 40 pA 25 5 0 nA 1MHz 4 us 100 us 0 005 200 pA 2 04 nA 500 100 nA IMHz 2 us 100 us 0 005 2nA 20 4 nA 1 0 0 2 uA IMHz 2 us 100 us 0 005 20 nA 200 40 nA 5 0 1 pA IMHz 2 us 100 us 0 005 200 nA 2 0 4 uA 20 4 0 uA IMHz 2 us 100 us 0 01 2pA 10 2pA 100 20 uA IMHz 3 us 100 us ARBITRARY FUNCTION GENERATOR 6221 only WAVEFORMS Sine Square Ramp and 4 user defined arbitrary waveforms FREQUENCY RANGE 1mHz to 100kHz 5 FREQ
108. previous paragraphs also apply here Leakage currents are typical sources of error in high resistance measurements They are generated by unwanted high resistance paths leakage resistance between the measurement circuit and nearby voltage sources they can be reduced by employing proper guarding techniques using clean quality insulators and minimizing humidity Volume Resistivity Ohm cm 1016 1018Q 1017 1018Q 1014 1018Q 1012 1018Q 1017 1018Q 1012 10140 1012 10140 1010 1017Q 1010 1015Q 105 10 2Q Typical resistance values of various insulating materials are shown in Figure 8 Absorbed moisture may also change the Table 1 Dirty Resistance to Water Absorption resistance of certain insulators by orders of magni tude Table 1 shows a qualitative description of water absorption and other effects Alternating Polarity Method When measuring materials with very high resistivity background currents may cause significant measure ment errors They may be due to charge stored in the material dielectric absorption static or triboelectric charge or piezoelectric effects The Alternating Polarity Method can virtually eliminate the effects of background currents in the sample In this method a bias voltage of positive polarity is applied then the current is measured after a predetermined delay Next the polarity is reversed and the current is measured again using the
109. produces the lowest transient currents of any nanovoltmeter available 2 O l In the delta differential conductance and pulse modes The Model 2182A produces virtually no transient currents so it s ideal for characterizing devices that can be easily disrupted by current spikes see Figure 4 Metrology Applications Research Applications The Model 2182A combines the accuracy of a digital multimeter with The Model 2182A s 1nV sensitivity thermoelectric EMF cancellation direct low noise at high speeds for high precision metrology applications Its display of true voltage ability to perform calculations and high measure low noise high signal observation time fast measurement rates and ment speed makes it ideal for determining the characteristics of materials 2ppm accuracy provide the most cost effective meter available today for such as metals low resistance filled plastics and high and low temperature applications such as intercomparison of voltage standards and direct superconductors measurements of resistance standards Nanotechnology Applications The Model 2182A combined with the Model 622X current source or Series 2400 SourceMeter SMU instrument is a highly accurate and repeatable solution for measuring resistances on carbon nanotube based materials and silicon nanowires 1 888 KEITHLEY wis only KEITHLEY A Greater Measure of Confidence A Tektronix Company LOW LEVEL MEASURE amp SOURCE 117 WY
110. r signal and for noise emulation Programmable pulse widths as short as 5ps limiting power dissipation in delicate com ponents Supports pulsed I V measurements down to 50ps when used with Model 2182A Nanovoltmeter Built in Ethernet interface for easy remote control without a GPIB controller card 1 888 KEITHLEY uss ony DC Current Source AC and DC Current Source KEITHUEY 1 0000 nA ra fa ee O00 ma CAFI The Model 6220 DC Current Source and Model 6221 AC and DC Current Source combine ease of use with exceptionally low current noise Low current sourcing is critical to applications in test environ ments ranging from R amp D to production especially in the semiconductor nanotechnology and super conductor industries High sourcing accuracy and built in control functions make the Models 6220 and 6221 ideal for applications like Hall measurements resistance measurements using delta mode pulsed measurements and differential conductance measurements The need for precision low current sourcing Device testing and characterization for today s very small and power efficient electronics requires sourcing low current levels which demands the use of a precision low current source Lower stimulus currents produce lower and harder to measure voltages across the device Combining the Model 6220 or 6221 with a Model 2182A Nanovoltmeter makes it possible to address both of these challenges AC current source and curr
111. r waveform application needs up to 50MHz Versatile Waveform Creation Capabilities The Model 3390 generates highly stable and accurate waveforms that allow you to create almost any desired shape It uses direct digital synthesis DDS techniques to achieve this level of performance and functionality The exceptional signal quality of the Model 3390 is a result of its high resolution fast rise and fall times and deep memory This combined with its low price makes it the ideal solution for applications that use the 50MHz bandwidth and below Lower speed instruments cannot provide the signal accu racy of the Model 3390 even at bandwidths they were specifically designed for Arbitrary Waveform Generation ARB With the Model 3390 you can precisely replicate real world signals This 14 bit ARB provides the ability to define waveforms with up to 256 000 data points and generate them at a sampling rate of 125MSamples second For ease of use up to four user defined waveforms can be stored in the onboard non volatile memory Function Generation Standard output waveforms can be created by pressing one button on the front panel Ten standard waveforms are provided including the basic sine square ramp and triangle shapes The Model 3390 offers the highest repetition rates of any instrument in its class allowing you to better emulate the signals you need to test Pulse Generation Pulse capabilities have become critically important as dev
112. rld conductors may have obeyed Ohm s Law Figure 8a but in the nanoscale Ohm s definition of resistance is no longer relevant Figure 8b Because the slope of the I V curve is no longer a fundamental con stant of the material a detailed measurement of the slope of that I V curve at every point is need ed to study nanodevices This plot of differential conductance dG dI dV is the most important measurement made on small scale devices but presents a unique set of challenges Figure 8a Figure 8b Nanoscale Macroscopic scale Quantum Classical Differential conductance measurements are per formed in many areas of research though some times under different names such as electron energy spectroscopy tunneling spectroscopy and density of states The fundamental reason that differential conductance is interesting is that the conductance reaches a maximum at volt ages or more precisely at electron energies in eV at which the electrons are most active This explains why dI dV is directly proportional to the density of states and is the most direct way to measure it Existing Methods of Performing Differential Conductance The I V Technique The I V technique performs a current voltage sweep I V curve and takes the mathematical derivative This technique is simple but noisy It only requires one source and one measure ment instrument which makes it relatively easy to coordinate and control The f
113. rometer V ea Total voltage CAL Vofrser burden lt 0 2mV Figure 2 Feedback Ammeter Feedback ammeters are closer to ideal than shunt ammeters and should be used for current measure ments of microamps or less 10 A or where it is especially critical to have an ammeter with low input impedance Instead of developing a voltage across the terminals of the ammeter a feedback ammeter devel ops a voltage across the feedback path of a high gain operational amplifier Figure 2 This voltage is also proportional to the current to be measured however it is no longer observed at the input of the instru ment but only through the output voltage of the op amp The input voltage is equal to the output voltage divided by the op amp gain typically 100 000 so the voltage burden has now typically been reduced to microvolts The feedback ammeter architecture results in low voltage burden so it produces less error when measuring small currents and when measuring currents generated by low impedance devices Keithley electrometers and picoammeters employ feedback ammeter technology VBURDEN Figure 3 Figure 3 illustrates the problems caused by high volt age burden when measuring the emitter current of a transistor Even though the basic current measure ment could be well within the measuring capability of the DMM the DMM s voltage burden significantly reduces the voltage applied to the DUT resulting in A Gr
114. s 20 mA 100 nA 0 1 pA 100 nA 500 us TEMPERATURE COEFFICIENT 0 18 C amp 28 50 C For each C add 0 1 x rdg offset to accuracy spec INPUT VOLTAGE BURDEN lt 200vV on all ranges except lt 1mV on 20mA range MAXIMUM INPUT CAPACITANCE Stable to 10nF on all nA ranges and 2A range 1uF on 20uA and 200uA ranges and on mA ranges MAXIMUM COMMON MODE VOLTAGE 42V MAXIMUM CONTINUOUS INPUT VOLTAGE 220 VDC ISOLATION Meter COMMON to chassis Typically gt 5x10 Q in parallel with lt 1nF NMRR 50 or 60Hz 60dB ANALOG OUTPUT Scaled voltage output inverting 2V full scale on all ranges 3 2mV 1kQ impedance NOTES 1 At 1 PLC limited to 60 rdgs second under this condition 2 At 6 PLC 1 standard deviation 100 readings filter off capped input limited to 10 rdgs sec under this condition 3 Measured at analog output with resistive load gt 100kQ IEEE 488 BUS IMPLEMENTATION MULTILINE COMMANDS DCL LLO SDC GET GTL UNT UNL SPE SPD IMPLEMENTATION SCPI IEEE 488 2 SCPI 1996 0 DDC IEEE 488 1 UNILINE COMMANDS IFC REN EOI SRQ ATN INTERFACE FUNCTIONS SH1 AH1 T5 TEO L4 LEO SR1 RL1 PPO DC1 DT1 CO E1 PROGRAMMABLE PARAMETERS Range Zero Check Zero Correct EOI DDC mode only Trigger Terminator DDC mode only Calibration SCPI mode only Display Format SRQ REL Output Format V offset Cal ADDRESS MODES TALK ONLY and ADDRESSABLE LANGUAGE EMULATION Keithley Mo
115. s so reducing the current is not usually an option Shorter pulses are the only solution The Model 6221 Current Source was designed with microsecond rise times on all ranges to enable short pulses The Model 2182A Nanovoltmeter offers a low latency trigger so that a measurement can begin as little as 10s after the Model 6221 pulse has been applied The entire pulse including a complete nanovolt measurement can be as short as 50s In addi tion all pulsed measurements of the 6221 2182A are line synchronized This line synchroniza tion combined with the three step delta tech nique causes all 50 60Hz noise to be rejected Figure 7 Dry Circuit Testing Applications that involve measuring contact resistance may require that existing oxide layers remain unbroken during the measurement This can be done by limiting the test current to less than 100mA and the voltage drop across the sample to no more than 20mV Most low resist ance meters have this dry circuit measurement technique built in 60Hz 50Hz line frequency noise e g 0 4mV rms p VA A DCV offset level eg 0 5MV Figure 7 Operating at low voltage levels measurements are suscep tible to line frequency interference Using line synchronization elimi nates line frequency noise A Greater Measure of Confidence KEITHLEY A Tektronix Company Technical Information Nanovolt Level Resistance Measurements In the macroscopic wo
116. s zero input currents The analog output voltage for each channel is referenced to that channel s floating ground KEITHLEY A Tektronix Company Model 2502 specifications Lu UW fa O Vv o Lu T x L LJ gt T O 143 Lu 9 fa O Vv o Lu vn lt x L LJ Lu ar 144 a K POWER Tap Srone mE i TAWI ETU U ai Lt DELAY DAMP air lt IfA noise gt 200TQ input impedance on voltage measurements Charge measurements from 10fC to 20pC High speed up to 1200 readings second Interfaces readily with switches computers and component handlers Cancels voltage and current offsets easily Ordering Information 6514 Programmable Electrometer Accessories Supplied 237 ALG 2 Low Noise Triax Cable 3 Slot Triax to Alligator Clips 2m 6 6 ft SERVICES AVAILABLE 6514 3Y EW 1 year factory warranty extended to 3 years from date of shipment C 6514 3Y ISO 3 ISO 17025 accredited calibrations within 3 years of purchase TRN LLM 1 C Course Making Accurate Low Level Measurements Not available in all countries 1 888 KEITHLEY wis only a D Co veon ra um oe cae aj b Tm en ENTER R amp D on a Budget Programmable Electrometer The Model 6514 Electrometer combines flexible interfacing capabilities with current sensitivity charge measurement capabilities
117. s can generally be nulled out by shorting the ends of the test leads together then enabling the instrument s zero relative feature The following paragraphs discuss non steady types of error sources that can affect low voltage measurement accuracy and how to minimize their impact on the measurements Thermoelectric EMFs The most common sources of error in low voltage measurements are thermoelectric voltages thermo electric EMFs generated by temperature differences between junctions of conductors Figure 1 Nanovoltmeter The thermoelectric voltage developed by dissimilar metals A and B in a circuit is Vas Qag T T2 t Temperatures of the two junctions in C Seebeck coefficient of material A with respect to B uV C Figure 1 Thermoelectric EMFs Constructing circuits using the same material for all conductors minimizes thermoelectric EMF genera tion For example connections made by crimping copper sleeves or lugs on copper wires results in cold welded copper to copper junctions which generate minimal thermoelectric EMFs Also con nections must be kept clean and free of oxides 1 888 KEITHLEY wis only www keithley com Low Voltage Low Resistance Measurements HI Nanovoltmeter Experiment source Ground 1 gt lt Ground 2 Input voltage to the nanovoltmeter is __ Resistance of input LO connection typically around 100mQ Current passing through input LO
118. s on the features and capabilities of the Keithley electrometers that preceded it For example like those instruments a built in constant current source simplifies measuring resistance Two analog outputs a 2V output and a preamp output are available for recording data with strip chart recorders CABLES 237 ALG 2 7007 1 7007 2 7009 5 7078 TRX 3 7078 TRX 10 7078 TRX 20 8501 1 8501 2 ACCESSORI Low Noise Triax Cable 3 Slot Triax to Alligator Clips Shielded IEEE 488 Cable 1m 3 3 ft Shielded IEEE 488 Cable 2m 6 6 ft RS 232 Cable Low Noise Triax Cable 3 Slot Triax Connectors 0 9m 3 ft Low Noise Triax Cable 3 Slot Triax Connectors 3m 10 ft Low Noise Triax Cable 3 Slot Triax Connectors 6m 20 ft Trigger Link Cable 1m 3 3 ft Trigger Link Cable 2m 6 6 ft RACK MOUNT KITS 4288 1 4288 2 Single Fixed Rack Mounting Kit Dual Fixed Rack Mounting Kit A Greater Measure of Confidence ES AVAILABLE ADAPTERS 7078 TRX BNC 3 Lug Triax to BNC Adapter 237 TRX NG Triax Male Female Adapter with Guard Disconnected 237 TRX T 3 Slot Male Triax to Dual 3 Lug Female Triax Tee Adapter 237 TRX TBC 3 Lug Female Triax Bulkhead Connector 1 1kV rated 7078 TRX TBC 3 Lug Female Triax Bulkhead Connector with Cap GPIB INTERFACES KPCI 488LPA JEEE 488 Interface Controller for the PCI Bus KUSB 488B IEEE 488 USB to GPIB Interface Adapter A Tektronix Company 6514 Economical Component
119. step and three step delta techniques can cancel constant thermoelectric voltage by alternating the test current The three step technique can also cancel changing thermoelectric voltages by alternating the current source three times to make two delta measurements one at a negative going step and one at a positive going step This eliminates errors caused by changing thermoelectric EMFs 10x better than the two step technique Figure 6 The three step technique provides accurate volt age readings of the intended signal unimpeded by thermoelectric offsets and drifts only if the current source alternates quickly and the volt meter makes accurate voltage measurements within a short time interval The Model 622x Current Source paired with the Model 2182A Nanovoltmeter is optimized for this applica tion These products implement the three step Resistance Measurements on the Nanoscale technique in a way that offers better white noise immunity than the two step technique by spend ing over 90 of its time performing measure ments In addition the three step technique is faster providing 47 readings second to support a wider variety of applications Interestingly the formula used for the three step technique is identical to that used for differential conduc tance Figure 10 Pulsed Low Voltage Measurements Short test pulses are becoming increasingly important as modern electronics continue to shrink in size Short pulses mean l
120. ter off capped input limited to 10 rdgs sec under this condition Measured at analog output with resistive load gt 2kQ Maximum rise time can be up to 25 greater Accuracy does not include output resistance load regulation Rise Time is from OV to full scale voltage increasing magnitude Fall Time is from full scale voltage to OV decreasing magnitude For capacitive loads add C AV ILimit to rise time and C AV 1mA to fall time Measured with LO connected to chassis ground 2 3 4 5 6 7 8 9 1 888 KEITHLEY u s only www keithley com A Greater Measure of Confidence Picoammeter Voltage Source REMOTE OPERATION IEEE 488 BUS IMPLEMENTATION SCPI IEEE 488 2 SCPI 1996 0 DDC IEEE 488 1 LANGUAGE EMULATION Keithley Model 486 487 emulation via DDC mode RS 232 IMPLEMENTATION Supports SCPI 1996 0 Baud Rates 300 600 1200 2400 4800 9600 19 2k 38 4k 57 6k Protocols Xon Xoff 7 or 8 bit ASCII parity odd even none Connector DB 9 TXD RXD GND GENERAL AMMETER INPUT CONNECTOR Three lug triaxial on rear panel ANALOG OUTPUT CONNECTOR Two banana jacks on rear panel VOLTAGE SOURCE OUTPUT CONNECTOR Two banana jacks on rear panel INTERLOCK CONNECTOR 4 pin DIN TRIGGER LINE Available see manual for usage DISPLAY 12 character vacuum fluorescent DIGITAL FILTER Median and averaging selectable from 2 to 100 readings RANGING Automatic or manual AUTORANGI
121. ternal buffer up to 425 readings second and to external memory via the IEEE bus up to 400 readings second Several connector modifica tions have been incorporated to address modern connectivity and safety requirements KEITHLEY A Tektronix Company N 49 aD oO 00 E T VY ara D E 4 fe 7a aD lt D ke mar go WV aD E Ta fe WV aD de 50 te oTo WV ig aD z VY lt D A is 79 LOW LEVEL MEASURE amp SOURCE 149 Model 6517B specifications Lu 9 x O Vv o Lu vn lt x Lu LJ gt Lu 150 6517B VOLTS ACCURACY TEMPERATURE 1 Year COEFFICIENT 512 DIGIT 18 28 C 0 18 C amp 28 50 C RANGE RESOLUTION rdg counts rdg counts C 2 V 10 uV 0 025 4 0 003 2 20 V 100 uV 0 025 3 0 002 1 200 V 1 mV 0 06 3 0 002 1 NMRR 2V and 20V ranges gt 60dB 200V range gt 55dB 50Hz or 60Hz CMRR gt 120dB at DC 50Hz or 60Hz INPUT IMPEDANCE gt 200TQ in parallel with 20pF lt 2pF guarded IMQ with zero check on SMALL SIGNAL BANDWIDTH AT PREAMP OUTPUT Typically 100kHz 3dB NOTES 1 When properly zeroed 5 digit 1 PLC power line cycle median filter on digital filter 10 readings 2 Line sync on AMPS ACCURACY TEMPERATURE 1 Year COEFFICIENT 5 2 DIGIT 18 28 C 0 18 C amp 28 50 C RANGE RESOLUTION rdg
122. tes 1 0 01PLC digital filters off front panel off auto zero off 2 1 00PLC digital filters off gt Binary transfer mode DIGITAL FILTER Median and averaging selectable from 2 to 100 readings DAMPING User selectable on Amps function ENVIRONMENT Operating 0 50 C relative humidity 70 non condensing up to 35 C Storage 25 to 65 C WARM UP 1 hour to rated accuracy See manual for recommended procedure POWER 90 125V or 210 250V 50 60Hz 60VA PHYSICAL Case Dimensions 90mm high x 214mm wide x 369mm deep 3 in x 8 in x 14 6 in Working Dimensions From front of case to rear including power cord and IEEE 488 con nector 15 5 inches Net Weight lt 4 6kg lt 10 1 lbs Shipping Weight lt 9 5kg lt 21 lbs KEITHLEY A Greater Measure of Confidence A Tektronix Company Model 6514 specifications Lu UW fa O T o Lu vn lt x Lu LJ gt Lu O 147 Electrometer High Resistance Meter Keithley s 542 digit Model 6517B Electrometer High nn a Resistance Meter offers accuracy and sensitivity speci KeITHLEY fications unmatched by any other meter of this type It 1023 a p i also offers a variety of features that simplify measuring t li 0023e 15 R cm high resistances and the resistivity of insulating materi RHE 55 4 Ex ternal Tempi 23 19C ounce als With reading rates of up to 425 readings second the O517B_ELECTROMETERVHIGH RESISTA
123. test configuration can be used for testing positive intrinsic negative PIN and avalanche photodiodes APDs The 6487 s high resolution on the 10V source range provides superior sweeping and biasing when small biases are required The 500V source capability is necessary to bias APDs Calibrated Light Source Photo Diode Pads Probe Probe Needles Needles Vsource Ammeter 6487 Picoammeter Voltage Source KEITHLEY A Greater Measure of Confidence A Tektronix Company 6487 Picoammetet Voltage Source Monitoring and Control of Focused lon Beam Currents In semiconductor fabrication focused ion beam systems are often used for nanometer scale imaging When do you need a micromachining and mapping Careful monitoring of the magnitude of the beam current with an picoammeter ion detector is critical The ion detector generates a secondary current that s proportional to the Measuring low DC currents often current of the primary ion beam When this secondary current is measured it can be used to control demands a lot more than a digital the intensity of the primary beam However this secondary current is very low often just a few picoamps so the instrumentation measuring it must provide high measurement accuracy and repeat ability as well as sub picoamp resolution The Model 6487 s wide measurement range and 5 digit multimeter can deliver Generally DMMs lack the sensitivity required resolution make it ideal for this appli
124. thley s Model 6517B is designed to solve these problems and provides consistent repeatable and accurate measurements for a wide variety of materials and components especially when used in combination with the Model 8009 Resistivity Test Fixture Alternating Polarity Method The Model 6517B uses the Alternating Polarity method which virtually eliminates the effect of any background currents in the sample First and second order drifts of the background currents are also canceled out The Alternating Polarity method applies a voltage of positive polarity then the current is measured after a specified delay Measure Time Next the polarity is reversed and the current measured again using the same delay This process is repeated continuously and the resistance is calculated based on a weighted average of the four most recent current measurements This method typically Lid WY V o Lid 4 V x Lid Lid gt Lid A 1 888 KEITHLEY ws ony A Greater Measure of Confidence A Tektronix Company 148 Electrometer High Resistance Meter 237 ALG 2 Low Noise Triax Cable 3 slot Triax to Alligator Clips 2m 6 6 ft 8607 Safety High Voltage Dual Test Leads 6517 TP Thermocouple Bead Probe CS 1305 Interlock Connector ACCESSORIES AVAILABLE CABLES 6517B ILC 3 Interlock Cable 7007 1 Shielded IEEE 488 Cable 1m 3 2 ft 7007 2 Shielded IEEE 488 Cable 2m 6 5 ft 7009 5 RS 232 Cable
125. tition rate up to 12Hz lt PULSE MEASUREMENT NOISE typical rms noise Rpur lt 109 0 009ppm of range meas_time Vpulse_avg count 3nV vV 2 meas_time pulse avg count for 10mV range s 0 0028ppm for the 100mV range 0 0016ppm for ranges 1V and above N 8nV VHz for ranges above 10mV meas_time seconds pulsewidth pulse_meas_delay in 33s incr N DC Noise Performance DC noise expressed in volts peak to peak T Response time time required for reading to be settled within noise levels from a stepped input 60Hz operation Channel 1 Response Range Time NPLC Filter 10 mV 100 mV 1V 10 V 100 V NMRR8 CMRR 25 0 s 5 75 6 nV 20 nV 75 nV 750 nV 75 UV 110 dB 140 dB 40 s 5 10 15 nV 50 nV 150 nV 1 5 uV 75 uV 100 dB 140 dB 10 s 1 18 25 nV 175 nV 600 nV 2 5 uV 100 uV 95 dB 140 dB 667 ms 1 10 or 5 2 35 nV 250 nV 650 nV 3 3 uV 150 uV 90 dB 140 dB 60 ms 1 Off 70 nV 300 nV 700 nV 6 6 uV 300 uV 60 dB 140 dB Channel 2 6 1 25 0 s 5 75 150 nV 200 nV 750 nV 110 dB 140 dB 40 s 5 10 150 nV 200 nV 1 5 uV 100 dB 140 dB 10 s 1 10 or 5 2 175 nV 400 nV 2 5 uV 90 dB 140 dB 85 ms 1 Off 425 nV 1 uV 9 5 uV 60 dB 140 dB i icti 13 14 VOLTAGE NOISE VS SOURCE RESISTANCE Operating Characteristics DC noise expressed in volts peak to peak 60Hz 50Hz Operation Source Analog Digital s ae Resistance Noise Filter Filter Function Digits ____Readings s PLCs 100 Q 8 nV Off 100 Channel 2 75708 6 6 5 1 kQ 1
126. tronix Company 6220 6221 Source Specifications DC Current Source AC and DC Current Source Accuracy Range 1 Year 5 over 23 C 5 C Programming range rdg amps Resolution 2 nA 0 4 2 pA 100 fA 20 nA 0 3 10 pA 1 pA 200 nA 0 3 100 pA 10 pA 2 uA 0 1 Ind 100 pA 20 uA 0 05 10 nA 1 nA 200 uA 0 05 100 nA 10 nA 2mA 0 05 1A 100 nA 20 mA 0 05 10 uA 1 uA 100 mA 0 1 50 uA 10 uA ADDITIONAL SOURCE SPECIFICATIONS OUTPUT RESISTANCE gt 10 Q 2nA 20nA range OUTPUT CAPACITANCE lt 10pF lt 100pF Filter ON 2nA 20nA range LOAD IMPEDANCE Stable into 10H typical 1004H for 6220 or for 6221 with Output Response SLOW VOLTAGE LIMIT Compliance Bipolar voltage limit set with single value 0 1V to 105V in 0 01V programmable steps MAX OUTPUT POWER 11W four quadrant source or sink operation GUARD OUTPUT ACCURACY 1mV for output currents lt 2mA excluding output lead voltage drop PROGRAM MEMORY Number of Locations 64K Offers point by point control and triggering e g sweeps MAX TRIGGER RATE 1000 s RMS NOISE 10Hz 20MHz 2nA 20mA Range Less than ImVrms 5mVp p into 50Q load SOURCE NOTES 1 Settling times are specified into a resistive load with a maximum resistance equal to 2V I ii scare Of range See manual for other load conditions 2 Settling times to 0 1 of final value are typically lt 2x of 1 settling times 3 Typical values are non warranted a
127. ts 7078 TRX 3 Low Noise Triax Cable 0 9m 3 ft j ai e Laser diode bars 8501 1 Trigger Link Cable 1m 3 3 ft Voltage Bias Capability e Fiber alignment KPCI 488LPA IEEE 488 Interface Controller for the PCI Bus The Model 2502 provides a choice of voltage bias ranges KUSB 488B IEEE 488 USB to GPIB Interface Adapter 10V or 100V This choice gives the system integrator the ability to match the bias range more closely to the type of photodetector being tested typically 10V for large area photodetectors and 100V for SERVICES AVAILABLE avalanche type photodetectors This ability to match the bias to the photodetector ensures improved 2502 3Y EW 1 year factory warranty extended to 3 years measurement linearity and accuracy Also the 100V range provides a source voltage for an SEM target from date of shipment C 2502 3Y DATA 3 Z540 1 compliant calibrations within 3 years of purchase High Testing Throughput Not available in all countries bias supply The Model 2502 is capable of taking 900 readings second per channel at 42 digit resolution This speed is comparable with the measurement speed of the Model 2400 SourceMeter SMU instrument which is often used in conjunction with the Model 2502 to perform optoelectronic device test and characterization Both instruments support Trigger Link a proprietary hardware handshaking triggering system that s unique to Keithley products and buffer memory When programmed to execute a sweep Trigger
128. ty near that of an electrometer Lid YW fa eo V o LLJ fa V ef Lid Lid gt Lid A 1 888 KEITHLEY ws ony A Greater Measure of Confidence A Tektronix Company 134 Picoammeter Protective Shield Cap 2 lug Low Noise BNC Input Cable 1 2m 4 ft APPLICATIONS e Beam monitoring and radiation monitoring e Leakage current testing in insulators switches relays and other components e SEM beam current measurements e Galvanic coupling measurements e Optoelectronic device testing and characterization e Optical fiber alignment e Circuit test and analysis in DCLF circuits e Sensor characterization e I V measurements of semiconductors and other devices e Nanoelectronic device characterization e Capacitor leakage e Teaching labs 1 888 KEITHLEY ss only www keithley com Picoammeter Features that Expand Test and Measurement Flexibility Scaled voltage analog output This output allows the Model 6485 to transmit measurement results to devices like DMMs data acquisition boards oscilloscopes or strip chart recorders 220V overload protection This high overload protection and a robust design let the Model 6485 withstand abusive overflows One touch front panel design Functions can be configured easily with the push of a button without complicated function menus Built in Trigger Link interface The Trigger Link interface simplifies synchronizing the
129. ugh Terminator 7051 2 General Purpose BNC to BNC Cable 2ft 7007 1 Shielded GPIB Cable 1m USB B 3 USB cable Type A to Type B 3m 10ft KPCI 488LPA IEEE 488 Interface Controller for the PCI bus KUSB 488B IEFE 488 USB to GPIB Interface Adapter SERVICES AVAILABLE 1 year factory warranty extended to 3 years from date of shipment C 3390 3Y DATA 3 2540 1 compliant calibrations within 3 years of purchase 3390 3Y EW Not available in all countries 1 888 KEITHLEY wis only S0MHz Arbitrary Wavetorm Function Generator Keithley 3390 je Leading Competitor The 20MHz noise bandwidth of the Model 3390 is 2x better than the competition s Pattern Generation The Model 3390 is the only instrument in its class with a Digital Pattern mode It provides the ability to transmit arbitrary 16 bit patterns via a multi pin connector located on the rear panel of the instrument This feature can be used for applications such as testing clock and data sig nals directly sending simple protocols to devices under test and simulating simple control func tions With Keithley s KiWAVE software package you can easily create complex and long patterns which the Model 3390 can generate at varying speeds and amplitudes 10MHz External Reference Expands Flexibility The built in 10MHz external time base is includ ed at no extra cost This external time base makes it simple to control multiple instruments from the same source connect m
130. ultiple Model Model 3390 rear panel A Greater Measure of Confidence 3390s together and synchronize multiple signals of any shape Ease of Use This instrument is easy to use In most cases pressing one button on the front panel or per forming one or two mouse clicks on your PC is all that is necessary to generate or modify a waveform The KiWAVE software package helps you define and manage waveforms apply filters to waveforms and display waveforms on a PC In addition the GPIB USB LAN and LXI interfaces can connect the Model 3390 to most devices under test instruments and test fixtures Teer Deter ines SS a p5 fered jio oy 1 ela Erni f hati be BFE A 008 ee wat HUNION IS NDTIS SUISSE ee ce A i vio are ff Hacer Ms SS 22 S22 oo oes se 1 Teeetp eee fens fe fe BEE ERR ERE REESE ERE SE KiWAVE Waveform Editing Utility LXI Class C Compliance The Model 3390 supports the physical program mable LAN and Web portions of the emerging LAN eXtensions for Instrumentation LXI stan dard The instrument can be monitored and con trolled from any location on the LAN network via its LXI Web page A Tektronix Company Lu UW fa O Vv oS Lu x vn lt x Lu Lu gt Lu O 155 Model 3390 specifications Lu 9 O vn o Lu vn lt x rr Lu Lu ar 156 3390 Specifications 50MHZ
131. uments The high performance multimeter in the Series 3700A offers low noise high stability 31 2 to 7 2 digit readings for leading edge measurement performance This flex ible resolution supplies a DC reading rate from gt 14 000 readings second at 3 2 digits to 60 readings second at 7 2 digits offering customers maximum reading throughput and accuracy The multimeter also provides an expanded low ohms 192 range low current 10uA range and dry circuit 1Q to 1kQ range extending utility beyond typical DMM applications The multimeter supports 13 built in measurement functions including DCV ACV DCI ACI frequen cy period two wire ohms four wire ohms three wire RTD temperature four wire RTD temperature thermocouple temperature thermistor temperature and continuity In rack calibration is supported which reduces both maintenance and calibration time Onboard memory can store up to 650 000 readings and the USB device port provides easy transfer of data to memory sticks Single Channel Reading Rates ew APPLICATIONS Resolution 2 Wire Ohms 4 Wire Ohms 74 Digits NG a 55 shia and rack level signal 6 Digits 0 2 NPLC 295 120 rererencing 5 Digits 0 06 NPLC 935 285 41 Digits 0 006 NPLC 6 200 580 Power supply burn in testing 3 Digits 0 0005 NPLC 14 000 650 PC network telecom Low ohms testing contacts connectors relays Low Noise Performance Model 3706A vs Leading Competitor Temperature profil
132. undamental problem is that even a small amount of noise becomes a large noise when the measurements are differentiated Figure 9 To reduce this noise the I V curve and its derivative must be measured repeatedly Noise will be reduced by N where N is the number of times the curve is measured 1 888 KEITHLEY wis only www keithley com Resistance Measurements on the Nanoscale di dV 100 us 0 01 0 005 i 0 01 0 005 Figure 9a I V curve Figure 9b Differentiated I V curve True di dV curve obscured by noise The AC Technique Four Wire Source Current The AC technique superimposes a low ampli Measure Voltage Technique tude AC sine wave on a stepped DC bias to the Now there is another approach to differential sample It then uses lock in amplifiers to obtain conductance This technique is performed by the AC voltage across and AC current through adding an alternating current to a linear stair the DUT The problem with this method is that case sweep The amplitude of the alternating while it provides a small improvement in noise portion of the oe the differ ential oe over the LV curve technique it imposes a large rent dI Figure 10 The differential current is Ap constant throughout the test After the voltage is penalty in system complexity which includes l O measured at each current step the delta voltage precise coordination and computer control of l oht j h for th between consecutive steps is calculated
133. up states plus factory default and RST DIGITAL INTERFACE Enable Active low input Handler Interface Start of test end of test 3 category bits 5V 300mA supply Digital I O 1 trigger input 4 TTL Relay Drive outputs 33V 500mA diode clamped POWER SUPPLY 100V 120V 220V 240V 10 LINE FREQUENCY 50 60Hz POWER DISSIPATION 60VA EMC Complies with European Union Directive 89 336 EEC VIBRATION MIL T 28800F Random Class 3 SAFETY Complies with European Directive 73 23 EEC WARM UP 1 hour to rated accuracy DIMENSIONS 89mm high x 213mm wide x 370mm deep 3 in x 8 in x 14 6 in Bench configuration with handle and feet 104mm high x 238mm wide x 370mm deep 4 in x 93 in x 14 6 in WEIGHT 23 1kg 10 5 Ibs ENVIRONMENT Operating 0 50 C 70 R H up to 35 C non condensing Derate 3 R H C 35 50 C Storage 25 to 65 C non condensing NOTES 1 2 year 3 4 Dual channel internal trigger measure only display off Autorange off Auto Zero off source wan ee Speed Normal 1 0 NPLC Filter On Measured as AVin Alin at full scale and zero input currents delay 0 filters off limits off CALC5 and CALC6 off 60Hz Measured as AVin Alin at full scale 20mA and zero load currents Noise floor measured as rms 1 standard deviation 100 samples Filter off open capped input Specification by design Measured at input triax as AVin at full scale 20mA v
134. upplied optical power gain wavelength calibration factors The Model 2502 includes an analog output jack on the rear panel for each channel Measurement Specifications Temperature Accuracy Coefficient Dc Input Maximum 23 C 5 C 0 18 C amp 28 50 C Impedance Range Resolution rdg offset rdg offset C Maximum 2 000000 nA 1 fA 1 00 2 pA 0 01 200 fA 20 kQ 20 00000 nA 10 fA 0 40 2 pA 0 01 200 fA 20 kQ 200 0000 nA 100 fA 0 30 200 pA 0 02 20 pA 200 Q 2 000000 uA 1 pA 0 20 200 pA 0 02 20 pA 200 Q 20 00000 uA 10 pA 0 10 20 nA 001 2 nA 20 Q 200 0000 uA 100 pA 0 10 20 nA 001 2nA 20 Q 2 000000 mA 1InA 0 10 2 uA 0 02 200 nA 0 2 Q 20 00000 mA 10nA 0 10 2 uA 0 02 200 nA 0 2 Q MAXIMUM INPUT 20 0mA TYPICAL SPEED AND NOISE REJECTION Readings s Digits GPIB SCPI GPIB 488 1 NPLC NMRR 4V 700 900 0 01 5 2 460 475 0 1 6 58 58 1 60 dB PHOTODIODE VOLTAGE BIAS SPECIFICATIONS Accuracy Maximum Temperature Range Resolution 23 C 5 C Current Regulation Coefficient 0 to 10 V lt 400 uV 0 15 of setting 20 mA 150 ppm C 5 mV 0 to 100 V lt 4 mV 0 3 of setting 20 mA 300 ppm C 50 mV ANALOG OUTPUT SPECIFICATIONS OUTPUT VOLTAGE RANGE Output is inverting 10V out for positive full scale input 10V out for negative full scale input OUPUT IMPEDANCE 1kQ typical Accuracy Temperature Coefficient Rise Time 23 C 5 C 0 18 C amp 28 50 C Typi
135. ur when contaminants in the form of ionic chemicals create weak batteries between two con ductors on a circuit board For example commonly used epoxy printed circuit boards if not thoroughly cleaned of etching solution flux oils salts e g fingerprints or other contaminants can generate currents of a few nanoamps between conductors see Figure 6 To avoid the effects of contamination and humidity select insulators that resist water absorp 10 7A 10 8 Low Current High Resistance Measurements tion and keep humidity to moderate levels Also keep all insulators clean and free of contamination Figure 7 summarizes approximate magnitudes of the various currents High Resistance Measurements For high resistance measurements gt 1GQ2 a constant voltage is most often applied across the unknown resistance The resulting current is measured from an ammeter placed in series and the resistance can be found using Ohm s law R V D This method of applying a voltage and measuring the current as opposed to applying a current and measuring the voltage is preferred for high resist ance measurements because high resistances often change as a function of applied voltage Therefore it s important to measure the resistance at a relevant and controllable voltage This method most often requires measuring low currents using an electrom eter or picoammeter All the low current techniques and error sources described in
136. urements and for characterizing low resistance materials and devices reliably and repeatably It provides higher measurement speed and significantly better noise performance than alternative low voltage measurement solutions The Model 2182A represents the next step forward in Keithley nanovoltmeter technology replacing the original Model 2182 and offering enhanced capabilities including pulse capability lower measurement noise faster current rever sals and a simplified delta mode for making resistance measurements in combination with a reversing current source such as the Model 6220 or 6221 Flexible Effective Speed Noise Trade offs The Model 2182A makes it easy to choose the best speed filter combination for a particular applica tion s response time and noise level requirements The ability to select from a wide range of response times allows optimizing speed noise trade offs Low noise levels are assured over a wide range of useful response times e g 15nV p p noise at 1s and 40 50nV p p noise at 60ms are typical Figure 1 illustrates the Model 2182A s noise performance Figure 1 Compare the Model 2182A s DC noise performance with a nanovolt micro ohm meter s All the data shown was taken at 10 readings per second with a low thermal short applied to the input Number of Readings A Greater Measure of Confidence Keithley 2182A nV uQ Meter Lu 9 O vn oF Lu fa vn lt x Lu
137. very low voltages often using a nanovoltmeter Therefore all the low voltage techniques and error sources described previously also apply here Low resistance measurements are subject to additional error sources The next sections describe methods to minimize some of these Lead Resistance and Four Wire Method Resistance measurements in the normal range gt 10Q2 are generally made using the two wire method shown in Figure 4a The main problem with the two wire method for low resistance measure ments lt 10Q is the error caused by lead resistance The voltage measured by the meter will be the sum of the voltage directly across the test resistance Recap Test Current I v Lead M Resistances V Resistance Under Test RLEaD Vm Voltage measured by meter Vp Voltage across resistor Measured _ Vm Resistance l Rs Figure 4a Two wire resistance measurement Lead resistance error DMM or Micro ohmmeter Test Current I Source HI Riean 0 Sense Current Rieap A Lead z Resistance Vm Resistances V R R 3 Under Test Sense LO Riean Rieap Source LO Because sense current is negligible Vy Vp V V and measured resistance T Figure 4b Four wire resistance measurement 1 888 KEITHLEY u s only www keithley com Low Voltage Low Resistance Measurements and the voltage drop across the leads Typical lead resistances lie in the range of 1mQ to 100mQ Therefore the four wire Ke
138. www keithley com a Ne Orn NOE OIMOIe a A BIUIc To FR aN S SR EO sere A S Test amp Measurement 7 9 product catalog 22 99 230309 1 n gt eae A Greater Measure of Confidence KEITH LEY A Tektronix Company 1 888 KEITHLEY ss ony Low Level Measurements and Sourcing Low Voltage Low Resistance Measurements Technical Information saaa 110 Selector GUC scai t74oncdon di TEATER Ra 114 NamnOV OMG lelic 645 244040600 b0baeueess eens 115 DO Get DOUNE o 3244 cones do eeneenaacs 121 AC and DC Current Source 00 es 121 System Switch Multimeter and Plug In Cards 126 Low Current High Resistance Measurements Technical Information saaa 127 Selector GUING cian teen taeues od sueedycesaus 129 Dual Channel Picoammeter Voltage Source 131 PicoaMmeter anc necaen ou noe donate eons 134 Picoammeter Voltage Source n nunna 137 Dual Channel Picoammeter 005 141 Programmable Electrometer 05 144 Electrometer High Resistance Meter 148 Low Current 10 channel Scanner Card for Model 6517x Electrometer 152 Low Current High Impedance Voltage High Resistance 10 channel Scanner Card for Model 6517x Electrometer 152 High Impedance Semiconductor Resistivity and Hall Effect Test Configurations 153 Arbitrary Waveform Function Generator 50MHz Arbitrary Waveform Function Generator 154 A Greater Measure of C
139. ximum and standard devia tion statistics A built in emulation mode makes it possible to control the Model 6487 with any custom code written to control the Model 487 Features that Expand Test and Measurement Flexibility Direct resistance measurements Optimized for resistances from 50Q to 5x10 Q using the Source Voltage Measure Current method e Alternating Voltage method resistance measurements This method improves resistance measurements on devices with high background current or high noise It extends the measurable resistance range up to 10 Q e 500V overload protection This high overload protection and a robust design let the Model 6487 tolerate abusive overflows including accidentally shorting the voltage source directly into the ammeter A Greater Measure of Confidence Model 487 Model 6487 Current Ranges 2 nA 2 mA 2 nA 20 mA 200 uV 1 mV on Voltage Burden 200 uV An mal reve Reading Rate Up to 180 s Up to 1000 s Voltage Sweeps No Yes Alternating Voltage No Yes Ohms Yes Yes ra log Output non inverting inverting Storage Buffer 512 points 3000 points Best V Source 1 mv 0 2 mv Resolution Lu UW fa O Vv o Lu T x L LJ gt T O A Tektronix Company 137 ace O a O QO aD g G aD _ p QO QO 49 2D oO 7 aD QO _ m2 WY oO p os _00 lt me 7 _ aD _ p
140. y voltage burden is the amplifier offset voltage This leakage current represents an error current Without the use of cancellation techniques I Vaurpzy R Figure 2 illustrates how the Model 6514 s CAL Vorrspr iS adjusted to cancel Vayenen to within the voltage noise level of a few microvolts so the measured current is only the true dark current I of the photodiode In a similar manner offset currents can also be cancelled Earlier electrometers used an internal numerical correction technique in which the voltage burden was still present so the measured dark current included the error term I Vauapen R Voltage Burden and Measurement Error Electrometers provide current measurement with lower terminal voltage than is possible when making DMM measurements As shown in Figure 3 DMMs measure current using a shunt resistance that develops a voltage typically 200mV full range in the input circuit This creates a terminal voltage Vaurpen Of about 200mV thereby lowering the measured current Electrometers reduce this terminal voltage by using the feedback ammeter configuration illustrated in Figure 1 The Model 6514 lowers this terminal voltage still further to the level of the voltage noise by canceling out the small offset voltage that remains as shown in Figure 2 Any error signals that remain are negligible in comparison to those that can occur when measuring current with a DMM KEITHLEY A Greater Measure of Confide
141. z Arbitrary Waveform Function Generator DISPLAY Graph mode for visual verification of signal settings CAPABILITY Standard Waveforms Sine Square Ramp Triangle Pulse Noise DC Built in Arbitrary Waveforms Exponential Rise and Fall Negative ramp Sin x x Cardiac Waveform Characteristics SINE FREQUENCY 1uHz to 50MHz AMPLITUDE FLATNESS 0 1dB lt 100kHz Relative to 1kHz 0 15dB lt 5MHz 0 3dB lt 20MHz 0 5dB lt 50MHz HARMONIC DISTORTION 2 3 Unit dBc DC to 20kHz 65 lt 1Vpp 65 21Vpp 20kHz to 100kHz 65 lt 1Vpp 60 21Vpp 100kHz to 1MHz 50 lt 1Vpp 45 21Vpp 1MHz to 20MHz 40 lt 1Vpp 35 21Vpp 20MHz to 50MHz 30 lt 1Vpp 30 21Vpp TOTAL HARMONIC DISTORTION 3 DC to 20kHz V 0 5Vpp THD lt 0 06 typical SPURIOUS 2 non harmonic DC to 1MHz 70dBc 1MHz to 50MHz 70dBc 6dB octave PHASE NOISE 10K Offset 115 dBC Hz typical when f gt 1MHz V 2 0 1Vpp SQUARE FREQUENCY 1uHz to 25MHz RISE FALL TIME lt 10ns OVERSHOOT lt 2 VARIABLE DUTY CYCLE 20 to 80 to 10MHz 40 to 60 to 25MHz ASYMMETRY 1 of period 5ns 50 duty JITTER RMS 1ns 100ppm of period RAMP TRIANGLE FREQUENCY 1uHz to 200kHz LINEARITY lt 0 1 of peak output SYMMETRY 0 0 100 0 PULSE FREQUENCY 500uHz to 10MHz PULSE WIDTH 20ns minimum 10ns res period lt 10s VARIABLE EDGE TIME lt 10ns to 100ns

Download Pdf Manuals

Related Search

Related Contents

Enhorabuena por su compra del Kit de Teclado Internet  Transcend DDR400 1024MB  Xerox Phaser 6700 User's Manual  PARA BOMBEROS  Le poème S`affiche chez vous Nouvelle formule!  SCOTT Xanab    the great outdoors by Minka Lavery 72170-189 Instructions / Assembly  Spb Pocket Plus 4.0 User Manual  Guide d`utilisation  

Copyright © All rights reserved. Failed to retrieve file