PLASMA CLEANER
Contents
1. please see the previous page To determine the flowrate e Read the position on the millimeter mm reference scale that corresponds to the center of the float Read the float position with the float at eye level Use the correlation table below to convert the float position mm to an actual flowrate mL min For example if argon Ar gas metered at 10 psig regulated pressure is inputted into Flowmeter 2 to raise the float to 35 mm on the reference scale the corresponding Ar flowrate is 57 mL min The float position may deviate slightly after setting the flow level due to relaxation and equilibration of the flowmeter valve to its new position Allow a few minutes for the flowrate to equilibrate and the pressure to stabilize Flowtube 022 13 Float Material Glass Gas Temperature 70 F 21 C Gas Metering Pressure Atmospheric pressure 0 psig and 10 psig for Air 10 psig for all other gases Take readings at the center of the float Scale Air Air Argon Ar Nitrogen N3 Oxygen Oz Reading Opsig 10 psig 10 psig 10 psig 10 psig mm Flow mL min Flow mL min Flow mL min Flow mL min Flow mL min 47 of 50 WEE fi HARRICK E Bro APPENDIX B OPTIONAL AND REPLAGEMENT PARTS OPTIONAL PARTS Premium Vacuum Pump 230V iii PDC VP 2 Premium Vacuum Pump Oil PDC VP OIL Basic Vacuum Pump 230V iii PDC VPE 2 Basic Vacuum Pump Oil PDC VPE OIL Fomblin Based Vacuum2. 3111 HARRICK et PLASMA www harrickplasma com PLASMA CLEANER USER S MANUAL FOR THE EXPANDED PLASMA CLEANER PDC 002 230V AND OPTIONAL PLASMAFLO HARRICK PLASMA Harrick Plasma e 120 Brindley St e Ithaca NY 14850 USA 800 640 6380 e Intl 607 272 5070 e Fax 607 272 5076 el ARR IC K asma DECLARATION OF CONFORMITY Harrick Plasma Inc hereby declares that the product listed is in conformity with the requirements and provisions of the following European Union CE directives and their respective standards EMC Directive 89 336 EEC Generic Emissions Standard EN 61000 6 4 2001 Product Specific Emissions EN 55011 Group 2 Class A Generic Immunity Standard EN 61000 6 2 2001 Immunity EN 61000 4 2 Electrostatic Discharge EN 61000 4 3 Radiated Susceptibility EN 61000 4 4 Electrical Fast Transient Burst EN 61000 4 5 Surge EN 61000 4 6 Conducted Susceptibility Low Voltage Directive 93 68 EEC Standard EN 60950 Safety of Information Technology Equipment Manufacturer s Name Harrick Plasma Manufacturer s Address 120 Brindley St Ithaca NY 14850 USA Products Expanded Plasma Cleaner PlasmaFlo Model Numbers PDC 002 PDC FMG 2 Declaration of Conformity Issued December 20 2006 Signature f 5 Dee Heather Hack President Harrick Plasma Inc 120 Brindley St Ithaca NY 14850 USA Phone 607 272 5070 Fax 607 272 5076 For further information please contact Harrick Plasma or i
3. DET 1s eerste HARRICK Ko PLASMA PROCESSING WITH GAS OPERATION A CAUTION Following completion of processing the Plasma Cleaner main power should be turned off in order to prevent overheating and possible damage to the Plasma Cleaner N CAUTION If you are working with toxic or highly reactive gases the gases must be handled with extreme caution To avoid releasing toxic or highly reactive gases into the ambient environment it is recommended to run several purge cycles flood the chamber with an inert gas e g Ns or Ar and allow it to pump out to ensure the toxic and highly reactive gases are properly evacuated from the gas line and chamber prior to venting The pump exhaust must also be properly vented See CONFIGURATION OPTIONS PURGING WITH INERT GAS for general guidelines to set up the Plasma Cleaner to purge with inert gas For safe gas handling procedures specific to your process gas contact your process gas supplier NOTE Ifthe Plasma Cleaner is intended to be repeatedly used with no change to the process settings as in the case of a single user it is recommended for process repeatability to leave the needle valve open and fixed to the desired setting Instead use only the 3 way valve to switch between bleeding in gas isolating the plasma chamber and venting Figure 6 If the process settings of the Plasma Cleaner may vary with each use as in the case of multiple users it is recommended to clos
4. Figure 5C e Closed the front door and hold the door against the plasma chamber e Turn on the vacuum pump The vacuum will hold the front door closed It will take a few minutes to evacuate the air in the chamber e Open the 3 way valve to room air lever points to the needle valve Figure 5A e Slightly open the needle valve 1 8 of a turn or less and allow the air to enter the Plasma Cleaner chamber e Turn on the Plasma Cleaner main power e Select the appropriate RF power level refer to the following NOTE on the next page e Look through the window of the Plasma Cleaner and wait until a glow is observed For air the plasma glow discharge should be purple pink in color e Adjust the needle valve slightly until the plasma intensity is visibly maximized This broadly corresponds to optimal plasma generation conditions 15 of 50 NOTE PLASMA PROCESSING VENTING THE CHAMBER CAUTION If the Plasma Cleaner is not vented immediately oil may backstream from the vacuum pump and contaminate the system We recommend the use of a vacuum pump with an PROCESSING WITH ROOM AIR By selecting the process pressure plasma energy RF power and processing duration the nature and extent of the surface interactions can be tailored for your application For optimal plasma uniformity the RF power level should be set to MED or HI Process pressures of 1000 1300 mTorr and process times of 1 3 minutes are good process para
5. to the vent flow Figure 6B or 10B Once atmospheric pressure is reached open the front door Close the 3 way valve lever is in the vertical position Figure 6C or 10C Turn off the Plasma Cleaner main power and optional PlasmaFlo main power Remove the sample 35 of 50 ZC HARRICK KA PLASMA CONFIGURATION OPTIONS Al Inert Gas Purge with Plasma Cleaner Pressure Isolation Plasma Vacuum Regulator Valve Cleaner Pump Inert Gas open Process Gas Vent closed closed Pressure Isolation Needle Regulator Valve Valve 3 Way 3 Way Valve Valve Lever r between needle valve 3 way valve partially open and vertical position BI Inert Gas Purge with Plasma Cleaner and Optional PlasmaFlo Pressure Isolation Regulator Valve PlasmaFlo Plasma Inert Gas Cleaner open Process Gas closed TC Vacuum Input 1 Input 2 Pressure Isolation Gauge Regulator Valve Gas Output Vent closed open Valve 3 Way 3 Way Valve Valve Lever between needle valve 3 way valve partially open and vertical position to inert gas Figure 11 A Possible Configuration for Inert Gas Purge in the Plasma System 36 of 50 MAINTENANGE REQUIREMENTS CLEANING THE CHAMBER CAUTION MAINTENANCE For most plasma cleaning and plasma processing applications the Plasma Cleaner requires little or no maintenance The vacuum pump does require routine servicing Please review the pump manual to determin
6. C Sj else i ors ee EE AE E ee 49 PDC002CE M 10 Go bam LIST OF FIGURES Figure 1 Expanded Plasma Cleaner 230V 7 Figure 2 Example of Vacuum Pump and Accessories 9 Figure 3 Setting Up the Vacuum PUMP 10 Figure A Connecting the Needle Valve 3 Way Valve to the Plasma Cleaner Front Door 13 Figure 5 Setup for Operating with Room Air i 14 Figure 6 Setup for Operating with Process Gas i 19 Figure 7 PlasmaFlo 230V EE 23 Figure 8 PlasmaFlo and Accessories 24 Figure 9 Final Configuration of the Needle Valve 3 Way Valve and TC Vacuum Gauge on the Plasma Cleaner Front Door When Using the Optional PlasmaFlo 28 Figure 10 Setup for Operating with Processing Gas and PlasmaFio 29 Figure 11 A Possible Configuration for Inert Gas Purge in the Plasma System 36 Figure 12 Replacing the Plasma Chamber 38 Figure 13 Removing the O Ring on the Plasma Cleaner Front Door mrrrnnnnnennnnnnnnnevnnnnnneenn 39 Figure 14 Replacing the Window on the Plasma Cleaner Front Door 40 PDC002CE M 10 SAFETY INFORMATION UNPACKING GENERAL INFORMATION The Plasma Cleaner is designed for safe and efficient operation when used properly and in accordance with this manual Failure to observe the following precautions could result in serious pers
7. IV oe G SETUP continued USING THE OPTIONAL PLASMAFLO To connect the PlasmaFlo gas output to the needle valve using the supplied hose adaptors and 1 4 ID flexible tubing connect the Swagelok hose adaptor to the PlasmaFlo gas output tighten with a wrench Attach one end of the flexible tubing to the PlasmaFlo gas output and the other end of the tubing to the NPT hose adaptor on the needle valve Tighten hose clamps over each end of the tubing OR Alternatively you may use other types of tubing and adaptors of your choice to connect the PlasmaFlo gas output to the needle valve The needle valve has 1 8 NPT fittings and the PlasmaFlo gas output has 1 4 Swagelok fittings Attach appropriate pressure regulator s to the process gas cylinder s See PRESSURE REGULATOR SELECTION above To connect the gas cylinder pressure regulator to the PlasmaFlo gas input s using the supplied Swagelok hose adaptors connect the two 2 Swagelok hose adaptors to the PlasmaFlo gas input s tighten with a wrench Use appropriate hose adaptors and 1 4 ID flexible tubing to connect the pressure regulator output to the PlasmaFlo gas input Tighten hose clamps over each end of the tubing OR Alternatively you may use other types of tubing and adapiors of your choice to connect the pressure regulator output s to the PlasmaFlo gas input s The PlasmaFlo gas inputs have 1 4 Swagelok fittings Connect the supplied vacuum gauge ca
8. Plasma 43 0f 50 CC dl HARRICK x e P A S VI A DISCLAIMER WARRANTY WARRANTY INFORMATION The Plasma Cleaner is designed for safe and efficient operation when used properly and in accordance with the instructions Failure to observe the following precautions could result in serious personal injury The Plasma Cleaner is an electrical instrument to avoid electric shock please observe all standard precautions such as not operating the device near water and operating the device at appropriate line voltage and frequency Do not remove cover plates or housing except by certified electronics technician Do not open the Plasma Cleaner door when the chamber is under vacuum Do not use the Plasma Cleaner near flammable materials Do not plug vacuum pumps whose input electrical current requirement exceeds 7 Amps into the Plasma Cleaner With respect to vacuum pumps please refer to the pump user s manual for specific precautions In general for oxygen process gas an oxygen compatible pump should be used in case of using toxic gases or gases that ionize to toxic products an efficient pump exhaust filter should be used Harrick Plasma shall not be held liable for any damages indirect or consequential related to this product including loss of revenue Furthermore Hack Plasma s liability shall not exceed the cost of the product Operational instructions should be followed at all times All products manufactured by Harrick Plas
9. Pump 230V for Oxygen Service t PDC OPF 2 Fomblin Fluid for Fomblin Based Vacuum Rumm PDC FMB Dry Scroll Vacuum Pump 230V for Oxygen SErvice erreen PDC OPD 2 PN 230V een PDC FMG 2 Quartz Plasma Chamber en PDC 00Q Quanz Sample Tray OD 65 Laser PDC 00T REPLACEMENT PARTS Pyrex Vacuum Chamber ie PDC 191 420 Front Door O ring VIton iii ORV 438 Inset Window O ring Viton ORV 032 ae TEE 001 505 FMC FSS cent ENG lori PDC FLB REPLACEMENT FUSES PDC 002 230V Plasma Cleaner 2 Amp slow blow 2 PlasmaFlo 0 5 Amp fast acting 2 48 of 50 CC HARRICK MB PLASMA APPENDIX C SPECIFICATIONS PLASMA CLEANER PDC 002 Chamber Dimensions 6 diameter x 6 5 length Chamber Material Pyrex Input POWwer EEE NE 200 W RF Frequency i MHz range Ne 1 8 NPT needle valve Je 1 2 OD Pyrex tubing Weight 45 lbs DIMENSIONS EE 11 Hx18 Wx9 D POWER APPLIED TO RF COIL Low Setting EE 7 2 W Medium Setting i 10 2 W High Setting 29 6 W OPTIONAL PLASMAFLO PDC FMG 2 Vacuum Pressure Transducer Thermocouple vacuum gauge Pressure Reading iii Digital meter Pressure Raiden 1 to 1999 mTorr Number of Gas Inputs 2 Flowmeter EE 65 mm reference scale 49 mL min maximum flowrate for atmospheric Air 0 psig FOG avsa 65 mm reference scale 104 mL min maximum
10. excess of the first ionization threshold in the neutral gas species electron neutral collisions lead to further ionization yielding additional free electrons that are heated in turn PLASMA SURFACE INTERACTION e The energy of plasma electrons and ions is sufficient to ionize neutral atoms break molecules apart to form reactive radical species generate excited states in atoms or molecules and locally heat the surface e Depending on the process gases and parameters plasmas are capable of both mechanical work through the ablative effect of kinetic transfer of electrons and ions with the surface and chemical work through the interaction of reactive radical species with the surface e In general plasmas can interact with and modify a surface through several mechanisms ablation chemical etching activation deposition and cross linking 3 of 50 CC al HARRICK az PLASMA TYPES OF PLASMA SURFACE INTERACTIONS ABOUT THE PLASMA CLEANER ABLATION Plasma ablation involves the mechanical removal of surface contaminants by energetic electron and ion bombardment Surface contamination layers e g cutting oils skin oils mold releases are typically comprised of weak C H bonds Ablation breaks down weak covalent bonds in polymeric contaminants through mechanical bombardment Surface contaminants undergo repetitive chain scission until their molecular weight is sufficiently low for them to boil away in the vacuum Ablati
11. hose hose clamps inlet port adaptor swing clamp and centering ring to connect the pump to the Plasma Cleaner Figure 2 To set up the vacuum pump for use with the Plasma Cleaner an Edwards XDS 5 dry pump is used as an example pump below e f applicable fill the vacuum pump with the appropriate pump oil or fluid Refer to the pump manual for instructions and oil fluid capacity Note that Fomblin prepared pumps for oxygen service require Fomblin fluid not pump oil e Place the centering ring on top of the inlet port of the vacuum pump Figure 3A e Place the inlet port adaptor on top of the centering ring Figure 3B e Wrap the swing clamp around the inlet port adaptor and centering ring Tighten the swing clamp using the wing nut Figure 3C e Connect the vacuum hose to the inlet port adaptor on the pump Tighten a hose clamp over the end of the hose Figure 3D e We recommend that the pump exhaust from the outlet port be properly vented either by conducting the pump outlet exhaust to an exhaust hood through a vacuum hose or attaching an oil mist filter to the outlet port 8 of 50 A HARRICK Ke PLASMA ABOUT THE VACUUM PUMP Swing Centering Inlet Port Hose 1 2 ID Clamp Ring Adaptor Clamp 2 3 ose Figure 2 Example of Vacuum Pump and Accessories 9 of 50 ZC HARRICK Ka PLASMA ABOUT THE VACUUM PUMP Al Centering ring on the inlet port B Adaptor on the inlet port C Swing clamp ar
12. pump exhaust must also be properly vented See CONFIGURATION OPTIONS PURGING WITH INERT GAS for general guidelines to set up the Plasma Cleaner to purge with inert gas For safe gas handling procedures specific to your process gas contact your process gas supplier 30 of 50 Ba Lui ka Se e es m E i ata e egene HARRICK PE ARRILK 8 Posi EE AG AA SP ef PLASMA oe G EVACUATING THE CHAMBER BLEEDING IN PROCESS GAS ES GENERATING PLASMA USING THE OPTIONAL PLASMAFLO Put the sample in the Plasma Cleaner chamber Turn on the PlasmaFlo main power Check that the 3 way valve is closed lever is in the vertical position Figure 10C On the PlasmaFlo check that the flowmeter valves are closed Close the Plasma Cleaner front door and hold the door against the plasma chamber Turn on the vacuum pump The vacuum pump will hold the front door closed The pressure as indicated by the vacuum gauge meter should begin to decrease Pump down the chamber to 200 mTorr or to the desired base pressure and allow the pressure to equilibrate prior to flowing in process gas es Open the 3 way valve to process gas lever points to the needle valve Figure 10A Open the needle valve The vacuum pressure will initially increase but will gradually decrease towards the starting base pressure as the residual air in the gas line is evacuated Open the process gas cylinder valve s and adjust the regulator pr
13. FMG 2 For further information please contact Harrick Plasma or its authorized distributors See www harrickplasma com or e mail info harrickplasma com al HARRICK da cure TABLE OF CONTENTS General Information Safety Information and Unpacking 1 Technical Suppor and Feedback ia 2 About the Plasma Cleaner PHNGCIDISOROPENA ON E 3 Ed eet 7 About the Vacuum Pump Setting Up a Vacuum Pump from Harrick Plasma i 8 Setting Up Your Own Vacuum PUMP ccccccsesseceeeceesseceeeceeeececeaeeeeeeeseaeeseeeesseaaeeeseeeeceeeesanees 11 Processing with Room Air Cdl NN 12 Ble re EE EEE EEE NE EEE NE 15 Processing with Gas PN 17 UNN 20 Using the Optional PlasmaFlo Er OE 23 SO E 25 NNN 30 Configuration Options PURGING WiN ug 34 Maintenance Maintenance Requirements ii 37 cleaning TINS CAINS EE 37 Replacing ihe SET Se Pr 37 Cleaning the Plasma Cleaner Front Door and O RING i 39 Replacing the Window and Window O Ring i 40 Checking and Replacing the FUSES 41 Troubleshooting i 42 Warranty Information Disclaimer and Warranty _ ii 44 Repair Returns and New Equipment Returns _ 45 Appendix A Flowrate Table for PlasmaFlo Flowmeter 1 032 15 i 46 Flowrate Table for PlasmaFlo Flowmeter 2 02211 47 Appendix B Optional and Replacement Parts iii 48 Appendix
14. Figure 12B Remove the retaining ring e Slide the old chamber out Figure 12C e Slide the new chamber in e Slide the retaining ring onto the plasma chamber outlet and hand tighten the thumbscrew e Reconnect the vacuum hose to the plasma chamber outlet Tighten the hose clamp around the end of the tubing 37 of 50 el HARRICK KO PLASMA MAINTENANCE Al Disconnect the vacuum hose from the plasma chamber outlet B Loosen the thumbscrew of the retaining ring Ze we EE Figure 12 Replacing the Plasma Chamber 38 of 50 Pa Li d WP Bee ag HARRICK PLASMA CLEANING THE PLASMA CLEANER FRONT DOOR AND O RING MAINTENANCE To clean the Plasma Cleaner door and o ring Remove the o ring from the Plasma Cleaner door Figure 13 Wipe the interior of the Plasma Cleaner door with isopropyl alcohol Visually inspect the o ring If the o ring shows signs of degradation e g surface is cracked or worn replace the o ring see APPENDIX B OPTIONAL AND REPLACEMENT PARTS to find the appropriate part number If the o ring appears in good condition wipe the o ring with isopropyl alcohol to remove any debris or contaminants on the surface Reinsert the o ring into the circular groove on the Plasma Cleaner door Make sure the o ring is properly seated in the groove Figure 13 Removing the O Ring on the Plasma Cleaner Front Door 39 of 50 Pa va e a dg ag HARRICK MM PLASMA REPLACIN
15. G THE WINDOW AND WINDOW O RING MAINTENANCE To replace the Plasma Cleaner window Figure 14 Remove the three 3 screws securing the Plasma Cleaner window Figure 14A Remove the retaining ring in front of the window Figure 14B Remove the window Figure 14C Remove the o ring Figure 14D and visually inspect it If the o ring shows signs of degradation e g surface is cracked or worn replace the o ring see APPENDIX B OPTIONAL AND REPLACEMENT PARTS to find the appropriate part number If the o ring appears in good condition wipe the o ring with isopropyl alcohol to remove any debris on the surface Reinsert the o ring into the circular groove Make sure the o ring is properly seated in the groove Insert the new window Reinsert the retaining ring Secure the retaining ring with the three 3 screws Tighten with a wrench Ce Remove the window D Remove the o ring Figure 14 Replacing the Window on the Plasma Cleaner Front Door 40 of 50 CHECKING AND REPLAGING THE FUSES MAINTENANCE Remove the fuse holder on the back of the Plasma Cleaner Figure 1B Check the fuse either visually or using a digital multimeter If the fuse is in working condition the metal wire inside the fuse should be intact and the digital multimeter should indicate an electrical short across the fuse resistance of 1 ohm or less If the fuse is blown the metal wire inside the fuse may be broken and the digital mul
16. IR See ABOUT THE VACUUM PUMP for instructions to set up the vacuum pump for use with the Plasma Cleaner When connecting NPT tapered threads always wrap the thread with PTFE Teflon tape to ensure a good seal and lubrication Remove any debris or residual tape on the internal and external threads before wrapping with new tape and reconnecting Wrap the tape in the direction counter to the screw direction TIGHTEN ALL THREADED CONNECTIONS WITH A WRENCH In preparation for setting up the Plasma Cleaner for operating with room air refer to Figure 1 for identification of parts of the Plasma Cleaner Figure 4 for valve assembly installation and Figure 5 for a schematic of the assembled system e Connect the needle valve 3 way valve to the Plasma Cleaner front door Figure 4 e Connect the plasma chamber outlet at the back of the Plasma Cleaner Figure 1B to the vacuum pump using 1 2 ID vacuum hose Tighten hose clamps over the hose at each end e Plug one end of the Plasma Cleaner power cord into the power inlet on the back of the Plasma Cleaner and the other end into an electrical outlet e Plug the vacuum pump power cord into an electrical outlet 12 of 50 a KC Ju Bee Gees Cal HARRICK se PLASMA PROCESSING WITH ROOM AIR Figure 4 Connecting the Needle Valve 3 Way Valve to the Plasma Cleaner Front Door 13 of 50 e Ss Gees 77 a HARRICK Ke PLASMA PROCESSING WITH ROOM AIR Al To proces
17. aFlo Figure 7 17 of 50 e e HARRICK J CAUTION For processing with pure oxygen make sure that you use an oxygen compatible vacuum pump The optional Harrick Plasma oil based vacuum pumps are NOT oxygen compatible The hydrocarbon pump oil mist can react with the concentrated oxygen to produce a potentially explosive combination We do offer oxygen service pumps for use with oxygen process gas please inquire with Harrick Plasma CAUTION If you are working with highly reactive or corrosive gases be sure that the seals and gas connection materials of the Plasma Cleaner and vacuum pump are compatible with the gas es Use a suitable vacuum pump to service corrosive gases It may be necessary to use different materials to avoid reaction with the process gas Please contact Harrick Plasma to determine materials compatibility with your process gas es 18 of 50 KO PLASMA PROCESSING WITH GAS Al To process gas Plasma Cleaner open Process Gas Vent closed Needle Valve 3 Way 3 Way Valve Valve Lever pointing left B To vent Plasma Vacuum Cleaner Pump closed Process Gas Vent open Needle Valve 3 Way 3 Way Valve Valve Lever pointing right C 3 way valve closed Plasma Cleaner closed Process Gas Vent closed Needle Valve 3 Way Li Valve ae Lever pointing vertical Figure 6 Setup for Operating with Process Gas 19 of 50 Ca ph Dee Ba e
18. ble between the TC vacuum gauge and the thermocouple vacuum gauge power inlet TC on the PlasmaFlo front panel Connect the plasma chamber outlet at the back of the Plasma Cleaner Figure 1B to the vacuum pump using 1 2 ID vacuum hose Tighten hose clamps over the hose at each end Plug the vacuum pump power cord into an electrical outlet Plug one end of the Plasma Cleaner power cord into the power inlet on the back of the Plasma Cleaner and the other end into an electrical outlet Plug one end of the PlasmaFlo power cord into the power inlet on the back of the PlasmaFlo and the other end into an electrical outlet 26 of 50 a a sva Ba LG Dg eee iw al HARRICK KA PLASMA USING THE OPTIONAL PLASMAFLO CAUTION For processing with pure oxygen make sure that you use an oxygen compatible vacuum pump The optional Harrick Plasma oil based vacuum pumps are NOT oxygen compatible The hydrocarbon pump oil mist can react with the concentrated oxygen to produce a potentially explosive combination We do offer oxygen service pumps for use with oxygen process gas please inquire with Harrick Plasma CAUTION If you are working with highly reactive or corrosive gases be sure that the seals and gas connection materials of the Plasma Cleaner and vacuum pump are compatible with the gas es Use a suitable vacuum pump to service corrosive gases lt may be necessary to use different materials to avoid reaction with the process gas P
19. commended to run several purge cycles flood the chamber with an inert gas e g N or Ar and allow it to pump out to ensure the toxic or highly reactive gases are properly evacuated from the gas line and chamber prior to venting The pump NOTE USING THE OPTIONAL PLASMAFLO By selecting the process gas or gas mixture process pressure plasma energy RF power and processing duration the nature and extent of the surface interactions can be tailored for your application For optimal plasma uniformity the RF power level should be set to MED or HI Process pressures of 1000 1300 mTorr and process times of 1 3 minutes are good process parameter initial values Optimal process parameter values will depend on the sample material and intended application Some experimentation may be required to determine these optimal values e Process the sample for the desired duration e Atthe end of the process set the RF power level to OFF e Turn off the Plasma Cleaner main power e Close the process gas cylinder valve s and isolation valve s e Allow 1 3 minutes for the system to pump out any residual process gas es from the chamber e Close the flowmeter valve s e Close the needle valve and 3 way valve lever is in the vertical position Figure 10C exhaust must also be properly vented See CONFIGURATION OPTIONS PURGING WITH INERT GAS for general guidelines to set up the Plasma Cleaner to purge with inert gas For safe gas hand
20. cted to the flowmeter s should be purged of any dust or residual contamination prior to installation All flowmeters have a built in filter at the inlet To prevent the float from potentially getting stuck along the flowtube of the flowmeter s use only dry clean gas When connecting NPT tapered threads always wrap the thread with PTFE Teflon tape to ensure a good seal and lubrication Remove any debris or residual tape on the internal and external threads before wrapping with new tape and reconnecting Wrap the tape in the direction counter to the screw direction TIGHTEN ALL THREADED CONNECTIONS WITH A WRENCH In preparation for setting up the Plasma Cleaner and PlasmaFlo for operating with process gas es refer to Figure 1 for identification of parts of the Plasma Cleaner Figure 7 and 8 for identification of the PlasmaFlo and accessories Figure 9 for valve TC vacuum gauge configuration on the front door and Figure 10 for a schematic of the assembled system e Connect the needle valve 3 way valve assembly to the thermocouple TC vacuum gauge assembly Tighten with a wrench e Connect the needle valve 3 way valve TC vacuum gauge assembly to the Plasma Cleaner front door Tighten with a wrench The final configuration of the valves and TC vacuum gauge assembly on the front door is shown in Figure 9 25 0f 50 Ba Lui ka Ce e es m a oe a use HARRICK eg ARP D LI 8 ha a 1 AC AA PA CH e J L F 3
21. e the maintenance requirements for the vacuum pump Some combinations of process gas es and sample materials may generate particulates and contaminants that can accumulate on the chamber wall Over time these contaminants may affect the plasma power and effectiveness of the plasma process If a change to the plasma process or plasma intensity is detected the chamber may require cleaning to remove these contaminants Please take all safety precautions and use the appropriate personal protection equipment e g gloves goggles etc when cleaning the plasma chamber with solvents or hazardous chemicals REPLAGING THE CHAMBER The plasma chamber is made of borosilicate glass Pyrex and may be cleaned using similar cleaning methods for standard laboratory glassware such as e Soaking or wiping the plasma chamber surface with acetone or isopropyl alcohol e Cleaning the plasma chamber using a standard laboratory glassware cleaner e g Alconox If standard laboratory glassware cleaning methods do not remove the contaminants and the contaminants are affecting the plasma process the chamber may require replacement See APPENDIX B OPTIONAL AND REPLACEMENT PARTS to find the appropriate part number To replace the Plasma Cleaner chamber Figure 12 e Disconnect the vacuum hose on the plasma chamber outlet at the back of the Plasma Cleaner Figure 12A e Loosen the thumbscrew of the retaining ring on the plasma chamber outlet
22. e the needle valve at the end of each use as the default setting EVACUATING THE CHAMBER e Putthesamplein the Plasma Cleaner chamber e Check that the 3 way valve is closed lever is in the vertical position Figure 6C e Closed the front door and hold the door against the plasma chamber e Turn on the vacuum pump The vacuum will hold the front door closed It will take a few minutes to evacuate the air in the chamber 20 of 50 al Ti o ph Ge a Ee p A E F eses HARRICK a e KS PLASMA BLEEDING IN PROCESS GAS GENERATING PLASMA NOTE PLASMA PROCESSING PROCESSING WITH GAS e Open the process gas cylinder valve and isolation valve at regulator output and adjust the regulator pressure to 5 10 psig e Open the 3 way valve to process gas lever points to the needle valve Figure 6A e Slightly open the needle valve 1 8 of a turn or less and allow the gas to flow for 30 60 seconds e Turn on the Plasma Cleaner main power e Select the appropriate RF power level refer to the following NOTE below e Look through the window of the Plasma Cleaner and wait until a glow is observed This indicates that plasma has been generated e Adjust the needle valve slightly until the plasma intensity is visibly maximized This broadly corresponds to optimal plasma generation conditions By selecting the process gas or gas mixture process pressure plasma energy RF power and processing duration the nature and exte
23. ecting Wrap the tape in the direction counter to the screw direction TIGHTEN ALL THREADED CONNECTIONS WITH A WRENCH In preparation for setting up the Plasma Cleaner for operating with process gas refer to Figure 1 for identification of parts of the Plasma Cleaner Figure 4 for valve assembly installation and Figure 6 for a schematic of the assembled system e Connect the needle valve 3 way valve to the front door Figure 4 e Attach an appropriate pressure regulator to the process gas cylinder Use a regulator that is compatible with the process gas and that has the same connection size as on the gas cylinder We recommend using regulated pressures of 5 10 psig For added safety include an isolation valve at the regulator output e Wrap the threads on the open end of the needle valve with Teflon tape Connect the pressure regulator output to the needle valve through appropriate adaptors and tubing The needle valve has 1 8 NPT fittings e Connect the plasma chamber outlet at the back of the Plasma Cleaner Figure 1B to the vacuum pump using 1 2 ID vacuum hose Tighten hose clamps over the hose at each end e Plug one end of the Plasma Cleaner power cord into the power inlet on the back of the Plasma Cleaner and the other end into an electrical outlet e Plug the vacuum pump power cord into an electrical outlet To more precisely control the process gas flowrate and monitor pressure we recommend using the optional Plasm
24. epends on parameters such as the intensity and frequency of the RF power used to excite the plasma the type of gas es that are ionized the pressure and flow rate of the gas es the sample surface material and the duration of the plasma process Detailed guidance on plasma processing may be found in the subsequent PLASMA PROCESSING sections of this manual 6 of 50 MST a HARRICK Ka PLASMA ABOUT THE PLASMA CLEANER GETTING STARTED Before starting take a few moments to familiarize yourself with the Plasma Cleaner unit Figure 1 A Front view PLASMA CLEANER RF Power Plasma 3 Way Valve Cleaner Door Main Power Indicator Window Plasma Cleaner Main Power Switch B Back view Cooling Fan CAUTION GE Retaining Ring for Plasma Chamber Plasma Chamber Outlet Plasma Cleaner Power Inlet rice INPUT WOOT 2 0 MAC Pi Hu MAY ODE O MAX CURENT d Plasma Cleaner Fuse Figure 1 Expanded Plasma Cleaner 230V NOTE The expanded Plasma Cleaner PDC 002 is rated for 230V at 50Hz can accept line voltages of 220 240V at 50 60Hz 7 of 50 SETTING UP A VACUUM PUMP FROM HARRICK PLASMA ABOUT THE VACUUM PUMP Use a vacuum pump with a minimum pumping speed of 1 4 m h and an ultimate total pressure of 200 mTorr or less If you have purchased a vacuum pump from Harrick Plasma your pump should be accompanied by pump oil fluid if applicable as well as a length of 1 2 inner diameter ID vacuum
25. er door is properly seated and the door o ring is in place The o ring should be clean and free of defects If you are still unable to form plasma following these test and corrective procedures contact Harrick Plasma Plasma degrades in Contaminants from Plasma chamber and or door requires cleaning effectiveness of previous use have See MAINTENANCE CLEANING THE surface treatment deposited on the CHAMBER and MAINTENANCE CLEANING plasma chamber walls THE PLASMA CLEANER DOOR AND O RING and door interior 42 of 50 Sp i HARRICK es PLASMA TROUBLESHOOTING MALFUNCTION POSSIBLE CAUSES CORRECTIVE ACTIONS Float becomes stuck Dust particulates or The clearance spacing between the float and along the flowtube of condensation in the inner wall of the flowtube is very small less than one of the PlasmaFlo flowtube is causing 0 5 mm to achieve such low flowrates Any flowmeters the float to stick dust particulates or condensation that may have formed from temperature fluctuations during shipping can cause the float to stick To free the float disconnect the gas lines at the PlasmaFlo gas input and output Open the flowmeter valve fully Blow clean dry compressed air or inert gas through the PlasmaFlo gas input until the float moves freely along the flowtube To prevent dust or condensation from accumulating in the flowtubes use only dry clean gas with the PlasmaFlo If the float continues to stick contact Harrick
26. essure to 10 psig Slowly open the regulator isolation valve The floats in the flowmeter flowtube may rise slightly due to the sudden pressure increase upon opening the regulator isolation valve Slowly open the flowmeter valve s and set the desired flowrate or set the flow level to obtain the desired pressure Read off the millimeter mm reference scale reading located on the flowtube from the center of the float See APPENDIX A to convert the mm scale reading to the actual flowrate mL min The float position may deviate slightly after setting the flow level due to relaxation of the flowmeter valve as it equilibrates to its new position Allow a few minutes for the pressure to stabilize after setting the gas flowrate Turn on the Plasma Cleaner main power Select the appropriate RF power level refer to the following NOTE on the next page Look through the window of the Plasma Cleaner and wait until a glow discharge is observed This indicates that plasma has been generated Plasma that is visibly maximized broadly corresponds to optimal plasma generation conditions 31 of 50 G Ba Lui ka Se e es a e ata e TELDI HARRICK PEE ARRILK 8 Posi EE AC AA A du r L F 3 W A PLASMA PROCESSING N CAUTION If you are working with toxic or highly reactive gases the gases must be handled with extreme caution To avoid releasing toxic or highly reactive gases into the ambient environment it is re
27. flowrate for atmospheric Air 0 psig Flowmeter ACCUTACY varene 2 of full scale Flowmeter Maximum Operating Pressure Temperature 200 psig 250 F 121 C Gas Input Connection 1 4 Swagelok to 1 4 OD stainless steel hose adaptor Gas Output Connection 1 4 Swagelok to 1 4 OD stainless steel hose adaptor Output Connection to Plasma Cleaner 2 ft length 1 4 ID flexible tubing with two 2 hose clamps Wella iddio 7 lbs PN ve 8 5 H x 10 W x 8 D Maximum flowrate varies with the process gas and regulated pressure See APPENDIX A for flowrate tables for the most common process gases used with our Plasma Cleaner Air Ar N2 O2 Flowrate tables with other process gases and regulated pressures can be made available 49 of 50 va HARRICK x Se g PLASMA APPENDIX C SPECIFICATIONS UTILITIES REQUIRED EE eege minimum pumping speed of 1 4 m hr and an ultimate total pressure of 200 mTorr or less OPTIONAL VACUUM PUMPS Premium Vacuum Pump PDC VP and PDC VP 2 Pumping speed 50 60 HZ o e cceesecesseceseesecessesseesvecersevaeeeveervecene 3 2 3 6 m hr Ultimate total pressure gas ballast closed 1 5 mTorr Ultimate total pressure gas ballast open 23 mTorr Motor power 50 60 HZ _ 250 300 W VL 34 Ibs DIMENSIONS ssi iaia 9 H x 15 W x 5 D Basic Vacuum Pump PDC VPE and PDC VPE 2 Pu
28. guidelines to set up the Plasma Cleaner to purge with inert gas For safe gas handling procedures specific to your process gas contact your process gas supplier VENTING THE CHAMBER e Turn off the vacuum pump e Slowly open the 3 way valve to vent lever points to the vent flow Figure 6B e Once atmospheric pressure is reached open the front door e Close the 3 way valve lever is in the vertical position Figure 6C e Take out the sample CAUTION If the Plasma Cleaner is not vented immediately oil may backstream from the vacuum pump and contaminate the system We recommend the use of a vacuum pump with an anti suck back feature such as that optionally provided by Harrick Plasma Do not open the front door when the chamber is under vacuum since this will damage the glass chamber 22 of 50 Ca da Se m oe Cl HARRICK PLASMA GETTING READY Flowmeter 1 032 15 Gas Output Gas Input 2 Fuse 2 Power Inlet USING THE OPTIONAL PLASMAFLO Before starting take a few moments to familiarize yourself with the PlasmaFlo Figure 7 and PlasmaFlo accessories Figure 8 A Front view DG MT PUT d S Se INPUT di PLASMAFLO Flowmeter 2 POC EMG 022 13 PRESSURE D Digital Vacuum Gauge Meter MTORR Thermocouple TC Vacuum Gauge E Power Inlet 2 al HARRICK on PLASMA Main Power i Switch Figure 7 gt PlasmaFlo 230V NOTE The Pla
29. ical activity and characteristics of the surface such as wetting and adhesion yielding greatly enhanced adhesive strength and permanency DEPOSITION Plasma deposition involves the formation of a thin polymer coating at the substrate surface through polymerization of the process gas The deposited thin coatings can possess various properties or physical characteristics depending on the specific gas and process parameters selected Such coatings exhibit a higher degree of cross linking and much stronger adherence to the substrate in comparison to films derived from conventional polymerization CROSS LINKING Cross linking is the covalent bonding of polymer chains to form dense molecular networks Plasma processing with inert gases can be used to cross link polymers and produce a stronger and harder substrate surface Under certain circumstances cross linking through plasma treatment can also lend additional wear or chemical resistance to a material 5 of 50 7 al HARRICK gt PLASMA ABOUT THE PLASMA CLEANER PLASMA PROCESSING In general plasma processing proceeds as follows The sample is placed in the reaction chamber and the chamber is evacuated Process gas es are flowed into the chamber to sustain pressures from 300 to 1500 mTorr The process gas is subjected to a MHz range RF electromagnetic field creating plasma at near ambient temperature The type of interaction between the plasma and the sample surface d
30. lease contact Harrick Plasma to determine materials compatibility with your process gas es 27 of 50 Ze HARRICK KA PLASMA USING THE OPTIONAL PLASMAFLO Figure 9 Final Configuration of the Needle Valve 3 Way Valve and TC Vacuum Gauge on the Plasma Cleaner Front Door When Using the Optional PlasmaFlo 28 0f 50 vr al HARRICK Kat PLASMA USING THE OPTIONAL PLASMAFLO Al To process gas PlasmaFlo Plasma Vacuum Cleaner Pump TC Vacuum Gauge Input 2 Gas Output open Input 1 Vent closed Needle Valve 3 Way 3 Way open Valve Valve Lever pointing left B To vent PlasmaFlo Plasma Vacuum Cleaner Pump TC Vacuum Input 2 Gauge Gas Output Input 1 Cod Vent open Needle Valve 3 Way 3 Way Valve Valve Lever pointing right C 3 way valve closed PlasmaFlo Plasma Vacuum Cleaner Pump TC Vacuum Gauge Input 1 Input 2 Gas Output closed Vent closed Needle Valve 3 Way 3 Way Valve Valve Lever pointing vertical Figure 10 Setup for Operating with Process Gas and PlasmaFlo 29 of 50 a a Li Ca e oe m E el ata e epps di _ ADD gi F Wi ARRILK SG MB PLASMA USING THE OPTIONAL PLASMAFLO OPERATION N CAUTION Following completion of processing the Plasma Cleaner main power should be turned off in order to prevent overheating and possible damage
31. linder valve Adjust the inert gas pressure regulator to 10 psig Slowly open the regulator isolation valve e If using optional the PlasmaFlo slowly open the flowmeter valve that is connected to the inert gas line to the highest flow capacity 34 of 50 Li E i a SALEN HARRICK LC a BS ge ms A n p SS H L A 5 IVI PURGING WITH INERT GAS AFTER PLASMA PROCESSING continued CONFIGURATION OPTIONS Partially open the 3 way valve to inert gas lever is intermediate to needle valve and vertical position Figure 11 If using the optional PlasmaFlo the pressure should quickly increase Close the 3 way valve lever is in the vertical position Figure 6C or 10C These steps should be performed quickly to avoid disturbing the sample or overloading the vacuum pump If using the optional PlasmaFlo the pressure should decrease back to a lower pressure Repeat the previous 2 steps of quickly opening and closing the 3 way valve to inert gas flow Repeat a third time At the end of this procedure the 3 way valve should be closed lever is in the vertical position Figure GC or 10C Close the inert gas cylinder valve and regulator isolation valve Allow 1 3 minutes for the vacuum pump to evacuate any residual gas from the chamber Close the flowmeter valve If necessary repeat the above steps with the second process gas Close the needle valve Turn off the vacuum pump Slowly open the 3 way valve to vent lever points
32. ling procedures specific to your process gas contact your process gas supplier 32 of 50 Ba a va LG Dg eee iw al HARRICK Ka PLASMA USING THE OPTIONAL PLASMAFLO VENTING THE CHAMBER e Turn off the vacuum pump e Slowly open the 3 way valve to vent lever points to the vent flow Figure 10B e Once atmospheric pressure is reached open the front door e Close the 3 way valve lever is in the vertical position Figure 106 e Turn off the PlasmaFlo main power e Remove the sample AS CAUTION If the Plasma Cleaner is not vented immediately oil may backstream from the vacuum pump and contaminate the system We recommend the use of a vacuum pump with an anti suck back feature such as that optionally provided by Harrick Plasma Do not open the front door when the chamber is under vacuum since this will damage the glass chamber 33 of 50 E De a sz 7 ii HARRICK S e RB gm es 8 e A n uf SS H L A 5 IVI A PURGING WITH INERT GAS SETUP PURGING WITH INERT GAS AFTER PLASMA PROCESSING CONFIGURATION OPTIONS If you are working with toxic or highly reactive gases the gases must be handled with extreme caution To avoid releasing toxic or highly reactive gases into the ambient environment it is recommended to run several purge cycles flood the chamber with an inert gas e g No Ar and allow it to pump out prior to venting to ensure the toxic or highly reactive gases are properly evacuated fr
33. ma come with a 1 year limited warranty Any product failure that results from use in accordance with manufacturers guidelines is covered under the warranty Any failure resulting from misuse of the product or resulting from actions such a dropping the unit or damage in poor storage conditions for example will not be repaired or replaced under warranty Furthermore products that have been intentionally damaged cannot be replaced or repaired under warranty Products out of warranty or not subject to these conditions may be repaired by the manufacturer as a billed service at the manufacturer s discretion With the exception of this exclusive warranty Harrick Plasma makes no warranties explicit or implied We also disclaim any implied warranties of merchantability or fitness for a particular purpose 44 of 50 CC dl HARRICK x e P A S VI A REPAIR RETURNS NEW EQUIPMENT RETURNS WARRANTY INFORMATION Owners of products manufactured by Harrick Plasma in need of service or repair should contact Harrick Plasma prior to return of equipment regardless of warranty coverage status Products out of warranty may be repaired by the manufacturer as a billed service at the manufacturer s discretion Any potentially hazardous substances must be removed from the plasma chamber and front cover interior if these items are to be returned with the product Products to be repaired out of warranty will be initially evaluated and a formal repair esti
34. mate will be prepared for approval prior to any repairs being carried out Any product returned for repair must be accompanied by a repair return document providing contact information return shipping address and a description of product problems at issue and any measures taken Recently purchased products manufactured by Harrick Plasma may be returned within 30 days of receipt Products must be returned in unused resalable condition in original packing materials and are subject to a 15 restocking fee Vacuum pumps and accessories must be returned within 15 days of receipt in unused resalable condition in original packing materials and are also subject to a 15 restocking fee Purchasers wishing to return products should contact Harrick Plasma prior to returning 45 of 50 CC al HARRICK es di PLASMA APPENDIX A FLOWRATE TABLE FOR PLASMAFLO FLOWMETER 1 032 15 Flowmeters with a 65mm reference scale rather than a direct read scale are provided to enable use with a broad range of gases Use the flowrate table below for the specified process gas to convert the millimeter mm scale reading on Flowmeter 1 032 15 to an actual flowrate mL min Please note that Flowmeter 1 and Flowmeter 2 have different flow capacities For flowrates for Flowmeter 2 022 13 please see the next page To determine the flowrate e Read the position on the millimeter mm reference scale that corresponds to the center of the float Read the floa
35. meter initial values Optimal process parameter values will depend on the sample material and intended application Some experimentation may be required to determine these optimal values e Process the sample for the desired duration e Atthe end of the process set the RF power level to OFF e Turn off the Plasma Cleaner main power e Turn off the vacuum pump e Slowly open the 3 way valve to vent lever points to vent flow Figure 5B e Once atmospheric pressure is reached open the front door e Close the 3 way valve lever is in the vertical position Figure 5C e Take out the sample anti Suck back feature such as that optionally provided by Hack Plasma Do not open the front door when the chamber is under vacuum since this will damage the glass chamber 16 of 50 al Ti o ph Ge a Ee p A E F eses HARRICK a e wt D ACR RAN ei a P L KS VI PA SETUP PURGE GAS LINE S PRIOR TO INSTALLATION NOTE NOTE PROCESSING WITH GAS See ABOUT THE VACUUM PUMP for instructions to set up the vacuum pump for use with the Plasma Cleaner All gas lines to be connected to the Plasma Cleaner should be purged of any dust or residual contamination prior to installation When connecting NPT tapered threads always wrap the thread with PTFE Teflon tape to ensure a good seal and lubrication Remove any debris or residual tape on the internal and external threads before wrapping with new tape and reconn
36. mping speed 50 60 H 5 1 m hr Ultimate total pressure gas ballast closed 7 5 mTorr Ultimate total pressure gas ballast open 150 mTorr Motor power 50 60 HZ rrnnrnnnnrnnnnnnonnrnnnnnennnnnnnnrennnnnnensennnnnnsnsennnnr 373 W NSO E 27 Ibs DENE sr 9 75 Hx 14 W x 5 5 D Fomblin Based Vacuum Pump for Oxygen Service PDC OPF and PDC OPF 2 Pumping speed 50 60 H 3 3 3 9 m hr Ultimate total pressure gas ballast closed 1 5 mTorr Ultimate total pressure gas ballast open 90 mTorr Motor power 50 60 KE 250 300 W NAM 48 lbs DIMENSIONS ee 9 Hx 17 W x 6 5 D Dry Scroll Vacuum Pump for Oxygen Service PDC OPD and PDC OPD 2 Pumping speed 50 60 HZ i 4 8 6 m hr Ultimate total pressure gas ballast closed 50 60 HZ 53 45 mTorr Ultimate total pressure gas ballast open 50 60 HZ 263 225 mTorr Motor power 50 60 HZ rannnnennnnnnnnrnnnvnnnnnnnnnnnnnnsnnnnnnnnnsnnnnnnnnnsnnnnnr 250 300 W Ve 51 Ibs MEN areni E nen aecmemavnsceeabensenantyancieseus 11 5 H x 17 W x 10 D 50 of 50 Dan anan Manual Part No PDC002CE M 10 Cal HARRICK gee PLASMA 2010 Harrick Plasma
37. ng or damaged contact Harrick Plasma immediately 1 of 50 Se HARRICK ef w PLASMA TECHNICAL SUPPORT FEEDBACK GENERAL INFORMATION For additional information please contact us between 9 a m and 5 p m EST USA 800 640 6380 Intl 607 272 5070 or e mail your questions to info harrickplasma com Your comments and suggestions are welcome Please send them to Harrick Plasma 120 Brindley St lthaca NY 14850 USA 800 640 6380 Intl 607 272 5070 Fax 607 272 5076 info harrickplasma com 2 of 50 vet HARRICK Ka PLASMA ABOUT THE PLASMA CLEANER PRINCIPLE OF OPERATION Plasma the fourth state of matter is a distinct processing medium for the treatment and modification of surfaces NATURE OF PLASMA e Plasma is a partially ionized gas consisting of electrons ions and neutral atoms or molecules e The plasma electrons are at a much higher temperature than the neutral gas species typically around 10 K although the plasma gas as a whole is at near ambient temperature e The plasma electron density is typically around 10 cm PLASMA FORMATION e Aradio frequency RF oscillating electric field is generated in the gas region through magnetic induction e At sufficiently low pressures the combined effect of the electric field acceleration of electrons and elastic scattering of the electrons with neutral atoms or field lines leads to heating of the electrons e When electrons gain kinetic energy in
38. nt of the surface interactions can be tailored for your application For optimal plasma uniformity the RF power level should be set to MED or HI Process pressures of 1000 1300 mTorr and process times of 1 3 minutes are good process parameter initial values Optimal process parameter values will depend on the sample material and intended application Some experimentation may be required to determine these optimal values e Process the sample for the desired duration e Atthe end of the process set the RF power level to OFF e Turn off the Plasma Cleaner main power e Close the process gas cylinder valve and isolation valve at regulator output e Allow 1 3 minutes for the vacuum pump to pump out any residual process gas from the chamber e Close the needle valve e Close the 3 way valve lever is in the vertical position Figure 6C 21 of 50 e e HARRICK Ko PLASMA PROCESSING WITH GAS CAUTION If you are working with toxic or highly reactive gases the gases must be handled with extreme caution To avoid releasing toxic or highly reactive gases into the ambient environment it is recommended to run several purge cycles flood the chamber with an inert gas e g Ns or Ar and allow it to pump out to ensure the toxic or highly reactive gases are properly evacuated from the gas line and chamber prior to venting The pump exhaust must also be properly vented See CONFIGURATION OPTIONS PURGING WITH INERT GAS for general
39. om the chamber The pump exhaust must also be properly vented Note that the procedures outlined below are general guidelines for purging the plasma system with inert gas For safe gas handling procedures specific to your process gas please consult with your process gas supplier The inert gas line should be connected immediately after the process gas regulator output to flush out as much of the process gas line as possible A possible configuration for connecting the inert gas line to the process gas line in conjunction with the plasma system is shown in Figure 11 as an example For safe gas handling equipment and procedures specific to your process gas please further consult with your process gas supplier e Attach an appropriate pressure regulator oreferably one with an isolation valve at the regulator output to the inert gas cylinder e Use appropriate tubing and adaptors to connect the inert gas regulator output to the process gas line as close to the process gas regulator as possible To purge the gas line and plasma chamber with inert gas after following the procedures in PLASMA PROCESSING page 21 or page 32 e Check that the process gas cylinder valve and isolation valve are closed e Check that the 3 way valve is in the closed position lever is in the vertical direction Figure 6C or 10C e f using the optional PlasmaFlo check that the flowmeter valves are closed e Open the needle valve e Open the inert gas cy
40. on affects only the contaminant layers and the outermost molecular layers of the substrate material Argon is often used for its high ablation efficiency and chemical inertness with the surface material CHEMICAL ETCHING Chemical etching involves the chemical reaction of surface organic contaminants with highly reactive free radicals in the plasma to form volatile byproducts that are released from the sample surface By proper selection of the gas chemistry and mixture various types of materials can be chemically etched In addition the material can be selectively etched with minimal etching of other materials on the sample surface Chemical etching involves minimal physical damage or roughening of the sample surface O is often used for chemical etching of organic contaminants from sample surfaces 4 of 50 CC al HARRICK az PLASMA TYPES OF PLASMA SURFACE INTERACTIONS ABOUT THE PLASMA CLEANER AGTIVATION Plasma surface activation involves the creation of surface chemical functional groups through the use of plasma gases such as oxygen hydrogen nitrogen and ammonia which dissociate and react with the surface In the case of polymers surface activation involves the replacement of surface polymer groups with chemical groups from the plasma gas The plasma breaks down weak surface bonds in the polymer and replaces them with highly reactive carbonyl carboxyl and hydroxyl groups Such activation alters the chem
41. onal injury A gt gt gt p gt gt gt The Plasma Cleaner is an electrical instrument to avoid electric shock please observe all standard precautions such as not operating the device near water and operating the device at appropriate line voltage and frequency Do not remove cover plates or housing except by a certified electronics technician Do not open the Plasma Cleaner front cover when the chamber is under vacuum Do not use the Plasma Cleaner near flammable materials Do not plug vacuum pumps whose input electrical current requirement exceeds 7 Amps into the Plasma Cleaner rear vacuum pump outlet With respect to vacuum pumps please refer to the pump user s manual for specific precautions If oxygen is used as the process gas in concentrations near or above its flammability threshold an oxygen service pump must be used If corrosive gases are used make sure the seals and gas connection materials are compatible with the gas Use a suitable vacuum pump to service corrosive gases If toxic gases or gases that ionize to toxic products or intermediates are used the gases must be properly purged from the chamber prior to venting and the pump exhaust must be properly vented For safe gas handling procedures specific to your process gas contact your process gas supplier Before installing the Plasma Cleaner make sure all the parts on the included check off list are present If any parts are missi
42. ound inlet port adaptor DI Attach vacuum hose Figure 3 Setting Up the Vacuum Pump 10 of 50 V o i 4 i j J ji j VIA Sa HARR S e p A S SETTING UP YOUR OWN VACUUM PUMP ABOUT THE VACUUM PUMP If you are using your own vacuum pump refer to your pump manufacturer for appropriate parts and accessories required for connecting the pump to the Plasma Cleaner Below are guidelines to set up the vacuum pump for use with the Plasma Cleaner see also the previous section SETTING UP A VACUUM PUMP FROM HARRICK PLASMA as an example e If applicable make sure the vacuum pump is filled with the appropriate pump oil or fluid Refer to the pump manual for instructions and oil fluid capacity e To connect the vacuum pump to the plasma chamber outlet at the back of the Plasma Cleaner use 1 2 inner diameter ID flexible vacuum hose with hose clamps tightened at both ends e Toconnect the vacuum hose to the inlet port of your vacuum pump use a 1 2 outer diameter OD inlet port adaptor with the appropriate centering ring and swing clamp to tighten and seal to the inlet port e We recommend that the pump exhaust from the outlet port be properly vented by either conducting the pump outlet exhaust to an exhaust hood through a vacuum hose or attaching an oil mist filter to the outlet port 11 of 50 e Be p tea i a Gap o G sg SETUP HARRICK PLASMA NOTE PROCESSING WITH ROOM A
43. s gas air Plasma Vacuum Cleaner Pump Vent closed open Air Needle Valve 3 Way a Valve awe Lever pointing left B To vent Plasma Cleaner closed Air Vent open Needle Valve 3 Way 3 Way Valve Valve Lever pointing right Cl 3 way valve closed Plasma Vacuum Cleaner Pump closed Air Vent closed Valve 3 Way 3 Way Valve Valve Lever pointing vertical Figure 5 Setup for Operating with Room Air 14 of 50 OPERATION CAUTION PROCESSING WITH ROOM AIR Following completion of processing the Plasma Cleaner main power should be turned off in order to prevent overheating and possible damage to the Plasma Cleaner NOTE EVACUATING THE CHAMBER BLEEDING IN AIR GENERATING PLASMA If the Plasma Cleaner is intended to be repeatedly used with no change to the process settings as in the case of a single user it is recommended for process repeatability to leave the needle valve open and fixed to the desired setting Instead use only the 3 way valve to switch between bleeding in air isolating the plasma chamber and venting Figure 5 If the process settings of the Plasma Cleaner may vary with each use as in the case of multiple users it is recommended to close the needle valve at the end of each use as the default setting e Putthe sample in the Plasma Cleaner chamber e Check that the 3 way valve is closed lever is in the vertical position
44. smaFlo PDC FMG 2 is rated for 230 V at 50Hz but can accept line voltages of 220 240V at 50 60Hz 23 0f 50 Ba 8 Cale Be a tee 3 RATE CC el HARRICK KM PLASMA USING THE OPTIONAL PLASMAFLO PLASMAFLO PDC FMG 1 4 ID Swagelok Hose NPT Thermocouple TC Vacuum Flexible Hose Clamp Hose Vacuum Gauge Gauge Tubing Adaptor 3 2 Adaptor Assembly Cable Figure 8 PlasmaFlo and Accessories 24 of 50 a Lui ka Ca e es T m E i ata e egene HARRICK PE ARRILK D i e be e I i V ri 6 8 r L 5 IVI A a SETUP PRESSURE REGULATOR SELECTION PURGE GAS LINE S PRIOR TO INSTALLATION NOTE USING THE OPTIONAL PLASMAFLO See ABOUT THE VACUUM PUMP for instructions to set up the vacuum pump for use with the Plasma Cleaner Use a pressure regulator that is compatible with the process gas and that has the same connection size as on the gas cylinder For added safety include an isolation valve at the regulator output A two stage regulator is able to provide more stable regulated pressures under conditions where downstream pressures at the plasma chamber may fluctuate and is recommended over a single stage regulator For process gas delivery we recommend using regulated pressures of 10 psig to enable use of the correlated flowrate tables provided for each flowmeter in APPENDIX A If other regulated pressures are desired please inquire with Harrick Plasma All gas lines to be conne
45. t position with the float at eye level Use the correlation table below to convert the float position mm to an actual flowrate mL min For example if argon Ar gas metered at 10 psig regulated pressure is inputted into Flowmeter 1 to raise the float to 35 mm on the reference scale the corresponding Ar flowrate is 25 mL min The float position may deviate slightly after setting the flow level due to relaxation and equilibration of the flowmeter valve to its new position Allow a few minutes for the flowrate to equilibrate and the pressure to stabilize Flowtube 032 15 Float Material Glass Gas Temperature 70 F 21 C Gas Metering Pressure Atmospheric pressure 0 psig and 10 psig for Air 10 psig for all other gases Take readings at the center of the float Scale Air Air Argon Ar Nitrogen N3 Oxygen Oz Reading Opsig 10 psig 10 psig 10 psig 10 psig mm Flow mL min Flow mL min Flow mL min Flow mL min Flow mL min 46 of 50 CC al HARRICK es di PLASMA APPENDIX A FLOWRATE TABLE FOR PLASMAFLO FLOWMETER 2 022 13 Flowmeters with a 65mm reference scale rather than a direct read scale are provided to enable use with a broad range of gases Use the flowrate table below for the specified process gas to convert the millimeter mm scale reading on Flowmeter 2 022 13 to an actual flowrate ML min Please note that Flowmeter 1 and Flowmeter 2 have different flow capacities For flowrates for Flowmeter 1 032 15
46. timeter should indicate an electrical open across the fuse resistance overload OL Replace the blown fuse s Refer to the back of the Plasma Cleaner Figure 1B or APPENDIX B OPTIONAL AND REPLACEMENT PARTS for specifications on the replacement fuse s Reinsert the fuse holder into the back of the Plasma Cleaner 41 of 50 ve Cal HARRICK PLASMA TROUBLESHOOTING MALFUNCTION POSSIBLE CAUSES CORRECTIVE ACTIONS Plasma fails to form in The electronics fails to Check the fuses in the back of the unit the chamber deliver power to RF Replace any blown fuses refer to coll MAINTENANCE CHECKING AND REPLACING THE FUSES If plasma still does not form test the electronics with the fluorescent bulb Place the miniature fluorescent bulb supplied with the Plasma Cleaner into the chamber Leave the door open and turn the RF power level to its three 3 settings successively If the bulb glows on all three RF power settings the electronic system is functioning properly proceed to the test of the vacuum system below If the electronics test fails contact Harrick Plasma The vacuum system If you are using a vacuum pump not supplied by fails to sufficiently Harrick Plasma make sure that your vacuum evacuate the pump is capable of reaching an ultimate total chamber pressure of 200 mTorr or less Then check that the vacuum hose is properly attached all hose clamps and gas line connections are properly tightened the Plasma Clean
47. to the Plasma Cleaner USING THE FLOWMETERS Flowmeters with a 65mm reference scale rather than a direct read scale are provided to enable use with a broad range of gases Correlated flowrate tables that convert the millimeter mm scale reading to an actual flowrate mL min are available for the most common process gases used with the Plasma Cleaner air Ar No O2 metered at a regulated pressure of 10 psig Please note that Flowmeter 1 032 15 and Flowmeter 2 022 13 have different flow capacities See APPENDIX A for flowrate tables for each flowmeter Correlated flowrate tables for other process gases or other regulated pressures can be made available Please inquire with Harrick Plasma Before opening the gas cylinder valve and isolation valve to introduce process gas into the plasma system make sure the flowmeter valves are closed to avoid the sudden rise of the float and having the float hit the top of the flowtube WHEN CLOSING THE FLOWMETER S DO NOT OVERTIGHTEN THE FLOWMETER VALVES JD CAUTION If you are working with toxic or highly reactive gases the gases must be handled with extreme caution To avoid releasing toxic or highly reactive gases into the ambient environment it is recommended to run several purge cycles flood the chamber with an inert gas e g N or Ar and allow it to pump out to ensure the toxic or highly reactive gases are properly evacuated from the gas line and chamber prior to venting The
48. ts authorized distributors See www harrickplasma com or e mail info harrickplasma com HARRICK PLASMA Harrick Plasma Inc asserts the following statement regarding European Union directives governing disposal and restriction of hazardous substances in relation to the listed products Waste Electrical and Electronic Equipment WEEE Directive 2002 96 EC The products specified below comply with the WEEE Directive 2002 96 EC marking requirement shown above The affixed product label indicates that you must not discard this electrical electronic product in domestic household waste To return unwanted products please contact Harrick Plasma Inc With reference to the equipment categories in the WEEE directive Annex 1 Harrick Plasma has classified these products as Monitoring and Control Instruments Restriction of Hazardous Substances RoHS Directive 2002 95 EC Harrick Plasma has classified the products specified below as Monitoring and Control Instruments an equipment category currently outside the scope of the RoHS Directive 2002 95 EC Harrick Plasma is actively working toward transitioning to RoHS compliant substances in future product iterations Environmental Statement Issued December 20 2006 Manufacturer s Name Harrick Plasma Manufacturer s Address 120 Brindley St Ithaca NY 14850 USA Ph 607 272 5070 Fx 607 272 5076 Products Expanded Plasma Cleaner PlasmaFlo Model Numbers PDC 002 PDC
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