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Introduction - Direct Source Surplus

1. Q 186 Advanced Selu IPIE 186 Remote Movement Commands with Nucleus Vision eene 187 Appendix F Hardware Configurator 189 R a SALES EEE ees 189 E AEA A A TE 189 et EEEN A T E E O TE AAE man 190 Segoe do Bic EEP EEIE E EE T EAN A EA AA O EE 190 KT a E EEA EE EA 191 Pema eenn a TAA a E EEE E EE E EA EEEE 191 oee wa a OR e ETE NETE aoe Uem 192 gE LS EE a SEEE ATA EE E EPA N EA E EE 192 lore T E RAEE EE 193 Tl A AEAEE AE 193 RTO ere roa meton I UE EEE EE E EN 193 ee NN 194 AGNO FrOnrnovng Compa IEN T D ILE 194 vi Nucleus 2 7 User s Guide esie E 194 foggellg e MR E ITUNES 194 b uegyhEe i s e eM EEEE 194 Companen setup for TZDUD HOOIOS ariannin a NEEE ERI E 194 Component setup for Alessi 6100 Series ssee memes 195 Componer Ser Ol SSELESSIO S esexisc buvi nterisebetu vibnbl Ce dla bext P Gn RET pEHCORI 195 Lormponent SSTUID TOT VINCI STCICIO sspe red orent RUPTAERT EE INASRE PEEL EVP e EFE RO LEA RIO LOHN 196 ewm mper EE 196 Pept a ejes e 197 jg e T ianiG ats 197 Neh Ae Ue TRI UEM 197 Pee ee eran eee papa Pure 197 Engine seral DOr SE vs NEMPE UU UKTTTMMTM 198 he SPR S S108 110 cepe 198 Vier iislale an iem ds eT TIT UTETTTMPPST 199 ee eli M ER UNTEN 199 Appendix G MOSAID Auto Tester 201 MOSAID Warer Probe Utility esses isvaerstseverskturi at veter eterne kae
2. Set Fail Calor Set Pass Color 5 Fail Color Pass Color i Figure 99 Wafer Map Test Analysis window 2 Clicking on any of the five check boxes below the Enable portion of the Wafer Map Test Analysis window will enable the selections listed in the drop down menus under Parameter Highlight the chosen parameter to display the bin ranges and set the upper and lower limits listed in the Wafer Map Test Analysis window Wafer Map Test Analysis x Lower Limit Upper Limit Color Source I A nk Apply Bin Ranges 1 000e 016 1 000e 014 Parameter ri Sub Th 0 5000 0 5000 Cancel dii ro rez ves 1 iha p po ERR ae DIE Gees Ez Set Fail Color Set Pass Calor ic Fail Color Pass Color Figure 100 T1 and T2 enabled 122 Nucleus 2 7 User s Guide 3 Disable all parameters except the one designated for the Pass Fail test by toggling the corresponding check boxes on or off Wafer Map Test Analysis Ea Bin Ranges Lower Limit Upper Limit Color Source OF TOME ES d nanem 0 o Ew Apply Enable Parameter E ri Sub Th F t2 Pass Fail gt m T3 Rnohm 2 E E Efe 4s Cancel 0 0000 50 0000 rs ve None Mane Hr EAS Set Fail Color Set Pass Coler Fail Color Pass Color SR vk id Raut oy o Figure 101 T3 set for wafer map test analysis 4 C
3. Sw Sou 0 0000 50 0000 None None e EEN Ee Fail Color Pass Color HE We RN INI LZ l Figure 105 New colors displayed for Fail and Pass Color aia Basic colors E C E EEr NEL IINE A LLL EENNENMENMN EEEE E Custom colors Define Custom Colors gt gt ae Figure 106 Color window 2 Click the OK button in the Wafer Map Test Analysis window to apply the new colors to the wafer map The adjusted colors will now display in the Wafer Map window see figure 107 Wafer Maps 127 gt Wafer Map Test200 wfd E FS Ele Mode Wafer View D se errTeAQPH7EOR Parameter Test Analysis Subsite None Testz n wtd Default Wafer Map Combo Pass Fail Combo Pass Fail Recticle Size fum Die x 14650 Recticle Size fum Die Y 14550 Water Diameter mm 200 Die Marked For Test 114 Minimum Value Maximum Value Mean atandard Dev Variance Passed Die 35 965 Failed Die 64 045 Teste00 wid Default Water Map Combo Pass Fail Combo Pass Fail Recticle Size ium Die x 14650 Recticle Size fum Die Y 14550 Water Diameter mm 200 Die Marked For Test 114 Minimum Value Maximum Value Mean atandard Dev Variance Passed Die 35 965 Failed Die 64 045 Ready Curent 7 3 4A Figure 107 Adjusted colors displayed in Wafer Map window see figure 105 128 Nucleus 2 7 User s Gui
4. Figure 146 System Configuration dialog Positioners 192 Nucleus 2 7 User s Guide MISCELLANEOUS TAB Joystick The Joystick component corresponds to the Engine Joystick and Abstract Joystick class This does not refer to the ECX joystick The ECX Joystick plugs directly into the ECX box and does not require a component other than the ECX Driver which used to communicate with the ECX box System Configuration X Stage ECX Box Setup Thermal Remate Comm Microscope Fositioners Misc M Joysticki Edge Sense Cancel Validate Set Default Figure 147 System Configuration dialog Misc Component restrictions during setup The following are the restrictions that the System Configuration dialog imposes on various different setups e Components that use GPIB cannot share the same address e Components that use RS 232 cannot share the same COM port e If GPIB in Remote Communications is selected then no GPIB can be used for the ECX box or Thermal Controllers If GPIB is being used for ECX box or Thermal Controllers then no GPIB Remote Communications can be used e If an Alessi 6100 Stage or ECX Microscope or ECX Positioner is selected then at least one ECX box must be enabled e The components that need to use RS 232 or GPIB will use the default settings for that particular component i e ECX BOX RS 232 uses 9600 baud 7 data bits EVEN parity 1 Stop Bit and NONE handshake e Thermal C
5. Figure 5 Move Parameters dialog Parameter Description Metric English select one of these units to change the display on Microns the Status window and the Motion Control window mm These settings do not affect the units displayed in Mils the Wafer Map window Inch Decimal Places select the number of decimal digits to display on the Status and Motion Control windows Timers These two values represent the length of time in Light seconds to leave the light or auxiliary power on ZB before automatically turning them off For example if the Light time value is set to five seconds the microscope lamp power will be turned off automatically after five seconds If the remote command set light 2 onissent the light will be turned on and then turned off automatically after 5 seconds If the value is zero the power will be left on until a command is received to turn it off Remote commands as well as the toolbar buttons will adhere to the Timer value entered On Alessi 6100 stations these timers are greyed out because there is no software control of Light and Aux Power 10 Nucleus 2 7 User s Guide Parameter speed Ultra Slow Very slow Slow Medium Fast Very Fast Ultra Fast Description The value selected affects moves that are commanded from the Motion Control window such as index moves move to load chuck up down etc This soeed setting does not affect the operation of the joystick or scan moves I NOT
6. Positioner 1 E0 um Current Channel Positioner 4 Eull Intialze Initialize in place Positioner 2 200 um Positioner 3 j um Positioner 4 200 prm kikka Positioner 200 Retresh Channels Positioner 6 OF Cancel Apply Figure 137 Parameters dialog Current channel The Current Channel describes which channel is active Positioner 4 in figure 137 When a channel is selected in the Motion Control window the current channel display on this page will also change The Full Initialize and Initialize in Place buttons apply to the active channel Full initialize Starts a full initialize on the current channel A full initialize will find each of the limit switches on the x y and z axes locate the center of travel and set that position to zero This action will move the x y and z axes Be sure to clear a path for the positioners to move Inifialize in place Resets the current position of the x y and z axes to zero This action will not move the x y and z axes Refresh channels The Refresh Channels button will cause the software to refresh the available channels that are set up on the ECX Box This action is helpful when the configuration of the channels has been changed on the ECX Box and the software does not reflect the current changes 182 Nucleus 2 7 User s Guide APPEND IA Nucleus Vision Introduction zi NOTE Nucleus Vision is
7. Remake Comm Microscope Positioners Misc Stage ECX Box Setup Thermal v Enable Thermal Type Communications C TP315 C TP3000 f GPIB TU CIE Address CE TP3500 n f R5 232 Virtual n EN Fort 1 ERS SP72 aa Cancel Validate Set Default Figure 143 System Configuration dialog Thermal REMOTE COMMUNICATIONS Defines the type of remote communications that you will be using e DDE when running on the same machine e GPIB and RS 232 when running on a remote computer You cannot configure a GPIB remote communications and a GPIB setup with Thermal or ECX See the Component restrictions during setup on page 193 for a list of possible conflicts System Configuration E X Stage ECX Box Setup Thermal Remote Corn Microscope Fositioners Misc iv DDE GPIB Address Es z Rs z32 Port ee Cancel Validate Set Default Figure 144 System Configuration dialog Remote Comm Hardware Configurator 191 MICROSCOPE TAB Use this page to setup an ECX Virtual or A Zoom microscope Figure 145 System Configuration dialog Microscope POSITIONERS TAB This tab can be used to enable and configure positioners on your system If you select ECX positioners then an ECX box must be enabled The number of Virtual positioners to setup can be changed in the Virtual Positioners dialog System Configuration seem Virtual Positioners dialog
8. Pas X LIncal Unknown Fas g Y Lincal Unknown Error Could not capture Joystick Button 1 E i Cancel Calibrate 7 Click OK to close the joystick dialog 8 Click Save on the Hardware Configurator toolbar to save the config file the calibration values are stored in the registry Normally joystick calibration is only required when the system is first installed If the joystick hardware is changed it may need to be calibrated again Calibrating the Joystick 167 VERIFYING Verify operation of the machine by using the Verify program See Appendix C Verifying the Station 168 e Nucleus 2 7 User s Guide APPEND IA C Verifying the Station Verify Station INTRODUCTION Verify Station is a stand alone test program provided to verify that all major components of the system are functional This program is accessed through the Start menu under Cascade Microtech Nucleus 2 6 Verify Station Executing this program will display the following dialog box that allows you to select the proper platform Station Verification E X Platform f Summit 12000 C 300 mm Hun verify Figure 122 Station Verification dialog Selecting the 300 mm platform and clicking on Run Verify will display the following dialog The Summit 12000 dialog will have a similar appearance but without the theta column because Summit series stations do not support motorized theta xn NOTE Onc
9. calibrate button in the Nucleus Video Setup dialog will start manual calibration of interpolation e Nucleus will set the zoom to 0 and then ask you to perform a manual pixel to micron ratio calculation using the same steps as prior versions of Nucleus e Nucleus will then set the zoom to 10 and the same steps will be repeated e For the whole range of zoom pixel to micron ratios can be manually calculated for 0 10 20 30 40 50 60 70 80 90 and 99 e If ratios for 0 10 20 and 30 are the only ones that have been calculated interpolation will work for any zoom from 0 30 For any other values the software will present you with the never been calibrated error message With Vision module e If the vision module is installed interpolation can be automatically calculated by clicking on the Calibrate Objective button in the Nucleus Video Setup dialog The easiest way to calibrate is to zoom all the way down to 99 then find an adequate target for the pattern recognition software Once the Calibrate Objective button is pressed Nucleus will move through all the Zoom settings at that location Objective Calibration Please wait while Linear Interpolation is caleualted Figure 34 Objective Calibration window MAIN TOOLBAR LIGHT CONTROL When using an A Zoom microscope the main toolbar button for controlling illuminator on off is smart Nucleus sends a command to the A Zoom digital control to set the brightness
10. define DIE ORIENTATION 8 X addresses start at bottom Y addresses start on right By default HardBin 1 is the only bin which increments the pass counter in the PRB window The remaining HardBins 2 16 by automatically increment the fail counter it is possible to re assign the default PASS bin as a FAIL bin e g define FAIL BIN 1 Assign Bin 1 to increment fail count 208 Nucleus 2 7 User s Guide define PASS_BIN 1 Assign Bin 1 to increment pass count default OF to assign any other bin as a PASS bin e 9 define PASS BIN 2 Assign Bin 2 to increment pass count define FAIL BIN 2 Assign Bin 2 to increment fail count default DI tage penetret ea ee ee ae i a kn Ban Title A5SIOnWNeN ES a SSeS See a RRR e a c HardBins listed on the wafer summary report may be be anotated with User defined bin titles Erom the examples above we might use define BIN TITLE 1 Bin 1 is a Fail Bin define BIN TITLE 2 Bin 2 is a Pass Bin or more likely define BIN TITLE 2 Failed Continuity Test define BIN_TITLE 1 Loge in X this is the default define BIN_TITLE 2 LogBin 2 this is the default cc ee M D MC cence c CE ieee oe aa a ee aes ASSIN Vorto nS to BSOIIOOLDBe eenese esciepeus Re ee by default softbins 1 16 are mapped to hardbins 1 16 and all other softbins 17 250 are mapped to hardbin 16 define SOFT BIN 1
11. Engine 300mm Sensors Solenoids Engine P821 Sensors Solenoids Engine Virtual Sensors Solenoids d Engine 12K Light Control Engine 300mm Light Control Engine P521 Light Control Engine Virtual Light Control Engine ELH Microscope Engine Virtual Microscope Engine Serial Port Engine UPS aea Figure 123 Add component dialog 3 Click the Setup button on the toolbar The Engine Serial Port must be similarly configured as shown in figure 124 4 Complete the configuration Any valid COM port can be used on the computer but the other settings must appear as shown Serial Port Configuration E X Mame Enaine EC Serial Fort Pet cow 1 Handshoke NONE Baud Rate a600 Data Bits Parity EVEN Stop E 0 Uk Set Back to Defaults Cancel Figure 124 Serial Port Configuration dialog GPIB 1 Open GPIB in the control panel 2 Select the GPIB Board type and click the Configure button to open up the Hardware Settings dialog 172 Nucleus 2 7 User s Guide 3 Click the Software gt gt button to open up the configuration settings for the GPIB board Configure GPIBO PCI GPIB Hardware Settings D0a737et Serial Humber or Slot Number Ti 500rsec Bus Timing hz Disabled Cable Length for High Speed Sultware gt M Sustem Controller Assert REM when SC Enabe Auto Polling Enable CIC Protocol GPIB Address Se
12. Figure 48 Distance tab The Distance Tool can be used to measure die size on a wafer This utility is set up to allow you to scan across an arbitrary number of rows and columns and correctly compute the die size for one row and one column Instructions for each step are given on the dialog The following procedure summarizes the required steps Procedure 1 From the main menu select Tools Distance 2 Enter the approximate die size into the estimate fields on the utility 3 Move to a feature on a die on the wafer using the Motion Control window or joystick 4 Click the Start Pos button 5 Move to the same feature on a different die move at least one row and one column As the stage is moving the distance fields in the dialog will be updated to indicate how far the stage has moved 6 Click on the End Pos button 7 Row Column sizes will be computed and displayed in the fields 8 From the data you calculated with the Distance Tool enter the x and y die reticle size values into the die x and die y fields of the Wizard The die reticle size displays the die size in microns x NOTE Total reticle size die street Now that the replica of the physical dies is fairly accurate the next step will allow the removal of any die that doesn t match the physical wafer Tutorials 51 Step 4 Selecting die position x Select die position Denter C Upper left comer C Upper right corner Bottom left comer
13. File New Creates a new wafer map File Open le D Opens an existing wafer map x NOTE PCS users can automatically convert wafer map files to Nucleus using the following dialog Open a wafer map file Open a wafer map file EE Look in E Er Ed _ J Remote Scripts Files of type Cascade Water Map Files 2 0 wfd Cancel Open as read only E Figure 84 Opening a wafer map file File Save Save the wafer map File Wizard The Wafer Map window can used to set up or edit a wafer map however your wafer map can be set up quickly with the Wizard Tutorial Wafer Map Wizard on page 47 RT Mode Select Test Die A mouse click selects a die on the wafer map The die is now shown in blue indicating that it will be tested The path from the menu is Mode Select Die This simply toggles the icon so that the mouse can be used to select the die Select a die to be the Reference die The die that is selected as the Reference die will now appear with an R The path from the menu is Mode Select Reference Die This simply toggles the icon so that the mouse can be used to select the die o Mode Select Reference Die 102 Nucleus 2 7 User s Guide D g Mode Add Remove Die When this mode is selected clicking on a die location will toggle the die on or off in the wafer map Note that there is no icon for this command Wafer Set Reference Set Ref
14. Maxixrunm Value 45 96 Meat 26 09 Standard Der 15 44 Vari ance Go S Tesr2D0 wrd Default Wafer Man Param Hame T3 Rn ohm Deac Bn Resistance Recticle Size unm Die X 14850 Becticle Size um Die Y 14550 Water Diameter nm 200 Die Marked For Test 114 Miniu Value 0 0 Mecimum Welue 49 96 Hea 26 69 acCendeard Dey 15 44 Variance 238 5 0 000e 000 L d00e 001 2 000e 001 Figure 73 Parameter T3 Rn ohm display 94 Nucleus 2 7 User s Guide Wale Map Test200 wid File Made w er View nsbereQarpkzeeee Parameter Mone 5 Liosite Hane Hane Test Analisis Tesc20 T1 154 Th Deraul n pon Farai IM Desc Recricle 3ize jum Die x 14650 Recricle 3ize jum Die Y 14550 Water Diamerer mm z n Die Marked Far Tesc lid Coote PM E AU y AA l y NE l y Parameter Mone Selected Head Cunent S Y E Figure 74 Selecting a parameter The Wafer Map legend panes and the histogram pane can be printed from the Wafer Map window by selecting File Print and selecting the appropriate radio button from the Print Options window Print Selection eee c ESSA Cancel Figure 75 Print options Wafer Maps 95 WAFER VIEW SETUP The data shown in the Wafer Map window can be manipulated using the Wafer View Setup window The Wafer View Setup window can be opened by selecting View Setup Wafer View Setup E X Wafer 1 a His
15. Save Delete Cancel To use this feature select the event that you would like to designate with a sound then use the Sounds list to scroll through the available sounds The sounds are wav files that are in the Cascade Nucleus SysData folder The Preview button will play the selected sound The event and sound file combinations can be saved as a Scheme scm file which should make it easier to organize various combinations For example the No Sounds scm can be used to set all events to no sound Events Sounds Window 153 154 Nucleus 2 7 User s Guide oH A PTE kK 8 User List Window Introduction The User List window manages the User profile for each user of Nucleus Each user has a unique configuration file This means that when a user exits Nucleus and then restarts it any previous configurations such as the placement of the Wafer Map window will be activated for that user Nucleus User List E xX User Information Service Operator lond Mame Se L onfirm Password Se F Mail v Edit User List All Users Iv Nucleus Login Required Iv Use Log File Mew User Delete Uzer Ok Cancel MI on the left is the current user e The user name with a e The E Mail edit box can be used to enter your e mail address This address will be used when the event window is configured to send e mail based on events DEFAULT NAMES AND PASSWORDS Default Log Defaul
16. amp STOP EXIT Procedure 1 Ensure that the platen is in the full up position Remove any probes that may be in the way of stage motion 2 Click the Verity Stage Control button The station will be exercised through various motion tests The results of these tests are shown as green within tolerance or red out of tolerance indicators under each test value If any of the values are out of tolerance contact CMI Customer Service If the stage verification tests pass then the motion control card motors encoders limit switches and home pulses are functional Clicking on Verify Stage Movement will cause the stage to make a series of moves until all stage tests are completed The operator has the option of aborting the test by clicking STOP Clicking on Verity Switches Solenoids will initiate an interactive test in which the operator is asked to verify that an action has taken place i e is the microscope light on 3 After operation of the machine is verified click exit to get out of the verify program x NOTE The Verify JoyStick provides a quick test of joystick communication only and does not verify joystick movements The joystick positions displayed are uncalibrated positions 170 Nucleus 2 7 User s Guide APPEND IA D Motion Channels Hardware Requirements Motion Channels provide for control of the Alessi 6100 series probe stations microscope and MS1 micropositioners from the User Int
17. 0 62 High Limit ps gs o 62 lt x lt 0 76 go o v6 ex lt o s Outlying bin lMs 0 9 xx Set color SetColor MNHNENNL 3randient Fill HP E Range of legal values for test Figure 98 Wafer map parameter setup dialog Wafer Map Test Analysis In some cases it may be more effective to sort dies into just two categories rather ur than into an assortment of bins The Wafer Map Test Analysis tool allows you to view wafer map data with results arranged into two groups those that pass criteria for a group of selected parameters and those that fail one or more criteria The pass criteria are specified as a range of acceptable values for each parameter For example a die might be declared good if a transistor switching threshold is between 0 1 and 0 2 volts the off current is between 0 1e 5 and 0 15e 5 amps and a node resistance is between 10k and 11k ohms The die will fail if any of these readings is outside the specified range Wafer Maps 121 Viewing data Procedure 1 In the Wafer Map window select Test Analysis from the Parameter drop down list From the Wafer Map menu select Wafer Wafer Map Test Analysis to open the Wafer Map Test Analysis window Wafer Map Test Analysis x Bin Ranges Lower Limit Upper Lirit Color Source OF N A EHE x BRI Apply Cancel Enable Parameter Hl Mone rs rs 1 1 1 rs 1 1 p L p Benes mI cp RD xm E
18. 6 Thermal Control Introduction The optional purchased separately Thermal Control configures the temperature and view status of the optional hot cold chuck The thermometer displays the current temperature Curent Setting Temp 0 0 Window o 2 Temp 23 7 Status Idle in virtual mode Figure 116 Thermal Control Display window Thermal Control Display SETTINGS BUTTON Opens the Thermal Control Properties dialog box to create or edit a temperature profile See Thermal Control Properties on page 146 SETTING LIST This list drops down to display and access all saved profiles SETTINGS PANE The Temperature field enables you to enter a new temperature on the fly The Window field enables you to enter a tolerance factor for allowable error C on the fly Thermal Control 145 To save these on the fly settings you must configure these settings in the Thermal Control Properties dialog box SET BUTTON The ESSE button enables the new temperature for the current probing session Any change in the profile must be saved if it will be used in another session STOP BUTTON Click to put the chuck into idle mode non controlled temperature when refrigeration and heating equipment are turned off Note that some controllers don t have the capability to enter idle mode Thermal Control Properties Thermal Settings x test setting Settings
19. DDE or Serial Port Depending on what type of communication is desired there are three different components that can be used e Communications DDE Server must be added for a DDE connection to the Hardware Configurator e Communications GPIB must be added for a GPIB connection to the Hardware Configurator e Communications R5232 must be added for a Serial port connection to the Hardware Configurator The default setup for all stations has the DDE Server component in the Hardware Configurator x NOTE The Communications GPIB component should only be used if the probe station is going to receive remote commands from an external host via GPIB If you are using ICS ICV on the same computer as the probe station software and ICS ICV is going to control an instrument via GPIB then this component must be removed from the Hardware Configurator JOYSTICK Two components have to be added to the component list to operate a joystick e Engine Joystick e Abstract Joystick If these two components are not present in the component list then the joystick will not function properly in Nucleus The components for the joystick are part of the default setup for a 300mm and a 12K but not a virtual station Virtual stations by default do not have a joystick present After the joystick has been added it must also be calibrated Please refer to Calibrating the Joystick on page 167 for more information THERMAL CONTROL Refer to T
20. ELI GP 27 4 F H F Show OP Clear Close Figure 129 Test ECX Boxes dialog Motion Channels 175 ABSTRACT POSITIONERS To test the Abstract positioners highlight the Abstract Positioners component in the list and click the Test button on the toolbar Each of the currently active positioners can be selected in the left hand side of the dialog The rest of the dialog applies to whichever positioner is currently selected See figure 130 on page 176 Active Positioners C Positioner 1 Positioner 2 Positioner C Positioner 4 C C Positioner Positioner E Move Separate Set Separate 200 LK Cancel Figure 130 Positioners dialog Channel Control When Motion Channels are enabled there are several changes that affect how Nucleus controls each channel The Motion Control window Status window and Parameters dialog box are all affected by the addition of Motion Channels Each of these windows is discussed in following sections MOTION CONTROL WINDOW When Motion Channels are enabled through the use of an ECX Box the Motion Control window acquires additional sets of buttons the channel buttons icons displaying a chuck microscope and six 6 MS1 positioners and other button sets such as the microscope focus buttons F1 F2 F3 and F4 icons All of these features are programmable user defined 5ee figure 133 POSITIONER CHANNEL SET The Positioner Channel
21. Temperature 100 degree Window 0 2 degree New Delete om Figure 117 Thermal Settings dialog CONFIGURING THERMAL PROPERTIES To configure the Thermal Control Display window enter the target Temperature C the tolerance value in the Window field and then type in the configuration title test setting in the provided field Then click New This new setting is now available to the Thermal Control Display window figure 116 zi NOTE Existing settings cannot be edited Also the Titan controller doesn t allow the window tolerance to be set from the UI 146 Nucleus 2 7 User s Guide Thermal Controller Setup INTRODUCTION There are two ways to set up the Thermal Controller e With the System Configurator see the Hardware Configurator on page 189 e Without the System Configurator TO SET UP A THERMAL CONTROLLER WITHOUT THE SYSTEM CONFIGURATOR GPIB communications setup Procedure 1 Determine what device ID the controller is set to This can be determined by using the front panel of the thermal controller or by using the Measurement and Automation program provided by National Instruments 2 Add the following components to Hardware Configurator e Communications GPIB Generic Device Choose the component fromTable 3 according to your controller type Table 3 Controller component determination Controller type Component to add TPO315 Engine 300 Thermal Chuck TPO3000 Series Engine 3000 Thermal Ch
22. The chuck will go back to contact when the image is verified Good and bad images How fo pick alignment targets The best targets to align have both horizontal and vertical features have light and dark contrasts and are not repeated within the field of view A low light level makes acquiring targets easier If the alignment fails check your light setting or try a different target Tutorials 87 The following images illustrate both horizontal and vertical aspects with good contrast Figure 67 Good images The following images illustrate poor horizontal and or vertical aspects with poor contrast Figure 68 Bad Images 88 Nucleus 2 7 User s Guide Minimum match score The Minimum Match Score provides a value for your step and repeat accuracy The maximum is 999 If you re having a problem training the target you may want to lower the score See Nucleus Vision for a complete description of the Minimum Match Score and the Advanced dialog Nucleus ision Basic Setup Target Image Train Target x Hide Advanced Auto Objective M Calibration Advanced Setup Video Window Display W Results Rectangle Set Defaults Iw Target Rectangle Match Setup Minimum Match Score zog Last Match Score Current Alignment Offset Bana y E Microns Pixels Per Micron 5 SUE y fo Micron Pixels Per Micron Calculate Current Alignment Offset Light Switching Auto Microscope Light Switching
23. from the main menu Tools Remote Window or Bh click on the Remote Window icon Bi x Remote Window X f sebmaode summit fe 4 Click Run and navigate to Test200 Param 4 txt and click Open The program starts and displays the results in the Remote Window gt gt Remote Window probeplar mark die value COMPLETE probeplan mark die value COMPLETE probeplar mark die value COMPLETE probeplan mark die value COMPLETE prabeplan mark die value COMPLETE probeplan mark die value COMPLETE prabeplan mark die value COMPLETE Note that the text file displays the running program on the Wafer Map based on the Testing Sequence set up in the Wafer Map Also note that you ll not see a display of data results 68 Nucleus 2 7 User s Guide In the next section we ll add various test result windows based on user defined parameters Testing Sequence E x Specify the testing sequence Horizontal C Vertical iv Bi directional Horizontal Bi directional Vertical Harrzental V artical let to right top to bottom tight to left C bottom to top Cancel Setting Up Wafer Map Parameters INTRODUCTION After you have sent remote commands to Nucleus you ll want to see the data that was created Nucleus can sort and display the results of your commands based on parameter definitions which you ll create in the Wafer Map Data
24. nnnx nnnx Change Settings Auto Calibrate Manual Calibrate Right clicking over a preset button and selecting Auto Calibrate will initiate an auto calibration sequence using the pattern recognition PR software which automatically determines the x y conversion ratio screen pixel to a wafer s micron The chuck will make a series of moves while using the PR to track movements of a trained target on the display Each objective on the microscope must be calibrated separately To perform the calibration for each objective 1 Put a wafer on the chuck 2 Raise the platen 3 Raise the chuck to contact height 4 Focus the video image 5 Move the chuck so an image with good contrast is in the field of view Preparations 4 6 Right click over a preset button and select Auto Calibrate Capture This button will cause the video control to request a frame of live video from the frame grabber nnn nnn nnnx nnn A Save As dialog box is displayed to enable you to select a directory and file name to store the captured frame The capture is at 640 x 480 in 24 bit color 42 Nucleus 2 7 User s Guide CHA PTE R Tutorials Introduction In this chapter we will attempt to build on our understanding of the Motion Control window and Integrated Video which were described in the previous chapter Preparations However we will take a tutorial approach and provide a context for these tools We will
25. red light 769 W Water angle 703 measuring dies 5 153 Water load button 45 Water map stepping 25 subsite 06 106 Wafer map commands 04 Wafer map menu 69 Wafer map parameters bins 70 120 colors 720 Nucleus 6 test results 6 values 120 Wafer map setup 47 Wafer map tool 9 Wafer Map Wizard 9 Wafer Map Wizard 47 47 axis icon 53 die size 50 51 reference position 53 save file 55 test direction 54 Window and changing size 29 World Wide Web Cascade Microtech xii Z Z axis Edge Sense parameters 6 17 options 2 Z position parameters 2 Z stage initialize Index 213 214 Nucleus 2 7 User s Guide Glossary Accuracy Align Alignment Target Base Alignment Offset Chuck Command Interface Current Alignment Offset DDE DUT Dwell End Effector Filename or Pathname GPIB Hardware Align For a motion system the difference between the actual position and the desired position Align is the process of getting the DUT oriented with respect to the probe station s coordinate system so that semiautomatic stage moves correctly place the probes This can be done either by physically rotating the hardware adjusting Theta or by setting Nucleus software to compensate for misalignment The Alignment Target is a unique image detailed enough to be easily distinguished by the pattern recognition software The Base Alignment Offset is the distance offset from the lower le
26. to direct the user to the Wafer Map command from the Tools item on the menu we use Tools Wafer Map e Syntax strings commands appear in this font e All numbers are decimal unless otherwise stated e Bit 0 is the low order bit If a bit is set to 1 the associated description is true unless otherwise stated x NOTE CAUTION Notes indicate the presence of a J Cautions indicate situations that hazard which will or can cause may result in damage to data or the minor personal injury or property hardware damage if the warning is ignored p WARNING J DANGER Warnings indicate the presenceof Dangers indicate the presence of a hazard which can cause severe a hazard which will cause severe personal injury death or personal injury death or substantial property damage if the substantial property damage if warning is ignored the warning is ignored Software Interlocks LOCK OUT Before You Begin xi See Logging On on page 1 MICROCHAMBER INTERLOCK OPTION p WARNING The interlock mechanism for the load door is managed by the Nucleus system software Every posible action has been taken to ensure that the stage will stop correctly Nevertheless there is still a chance that the stage will not stop immediately when the door is opened When reaching into the stage area use caution to avoid personal injury The MicroChamber Interlock Option controls the action of the stage when the load door of the station is ope
27. veraur Names are POSS Wars auastereniadxbxbvrphixkdi o bee nin bleed d b ZR bs doi 155 Aeg e ds c Mcr ee ieee 156 zelpE arde Lem 156 PU Logon eI hin D erenn EEEE EAE ENTE IEH 156 DE EE EEE 156 Appendix A Installing Nucleus 157 C exi E A E EA EAE EE 197 Ea SI EB T TD T D mm 157 scaestexig ie i TT TET TIU UTRUM 162 i ens rri M E E A 162 127139 9 5 9280 S ee ter eT 164 ipe ek TE 165 Appendix B Calibrating the Joystick 167 Wae iwla d TIE NETTE 167 ECCE E E EAEE E 167 E i E iieitniannatis 168 Appendix C Verifying the Station 169 VOID SB ID EAE EE A E 169 iguiew TY EATI TEE E EERE TENEN E E TETEE NTETE AT TEE A 169 Appendix D Motion Channels 171 FA NOSOUISITISPIB aara roria en 18a e UTR a DX A 171 Be FT E AAR EAE POPE teed EORUM DEFERRI 171 ovsrem aero vneurts enda TOT venis enr Eta dil SAX deo ud ath ab eda d eda b Fb ada sc 171 step 1 Choose the Communications Type RS 232 or GPIB serere 171 Ic m 172 Contents v e le EAE AE A EAA A T A OA A T A 172 UBL CUS Sm gt TELS EIS Gaerne rn eee et ne ert EA iei renner DIRE 174 Step 3 Add the Microscope Positioners and or Stage eeeee 174 ee 0 lt acta t eaten PRN A EEA UTD 174 id erecew mir eg NI RT TA ET leo FroeramnmoebseTnmoroposnonem CIS aaest vexukret nsdebbeteadi nt utar basi apa uhr REM 179 Dos ehm 08 02 9 2 2210000 10 20008072 000
28. A Setup button that brings up a dialog box to change video attributes Size button The Size button toggles the Video window between two different sizes Each size can be set by you using standard sizing methods When the size does not provide enough room for all control buttons the buttons are dropped off of the right side Control modes The modes of control are e Movement e Crosshair e Measuring Tape e Vision with Nucleus Vision option enabled The user can change the control mode either by right mouse button click with cursor over the Video window or by the combo box as shown below Movement Mode This mode enables you to double click a feature anywhere in the Video window and one of the following actions will occur e f the chuck channel is selected in the motion control widow the chuck will move to the position that s featured beneath the crosshair e If the scope channel is selected in the motion control widow the scope will move to position the crosshair over the feature This mode also allows you to drag amp drop left button down followed by moving the mouse to reposition a positioner A positioner channel must be selected in the Motion Control window The selected positioner will move in the same direction and the same relative distance converted to microns as the drag amp drop motion The actual movement will not occur until the left button is released 30 Nucleus 2 7 User s Guide N
29. AY scan speed E 1 000 mm sec Figure 39 Loading a wafer from Nucleus 44 Nucleus 2 7 User s Guide Proceed as follows 1 Click on the Wafer Load button to send the stage to the load position See figure 39 Note that the red crosshairs moved up in the Wafer Map when the stage moved the wafer to the front of the MicroChamber s loading door Also the Status window default setup shows the chuck s position See figure 40 on page 45 Note that this window may Chuck User display theta information if JEN your station uses motorized Y 100000 100000 theta See figure 58 on page 59 z 400 00 Location of Auxiliary Chucks on summit and Alessi 6100 series stations Microns Set ero Figure 40 Status window 2 Open the loading door 3 Unlock the stage See figure 41 4 Pull the stage out stage lock unlocked position Figure 41 Loading a wafer 5 Center the wafer on the stage Figure 41 Tutorials 45 6 Set the 75 mm vacuum switch to the ON position 8 inch wafer Figure 42 Vacuum turned on Lit 7 From Nucleus toolbar toggle the vacuum from OFF WIf toON Mif NOTE ET Alessi 6100 series stations do not have software controlled vacuum 8 Push the stage back into the MicroChamber 9 Lock the stage Figure 43 Locking the stage 10 Close the door to the MicroChamber 46 Nucleus 2 7 User s Guide Crea
30. C Bottom right comer To mark unwanted die click on the die or use the following buttons Select All Clear All Label Test200 Water diameter 200 00 mm Quality area diameter 135 00 mm Die Size micran 14650 0 14550 Street Sree micron 500 0 500 0 Back Cancel Figure 49 Wafer Map Wizard Step 4 with Select All displayed Procedure 1 To display e the complete wafer map including portions of the die that lie on the outer edges select Show Partial Die e only those die that lie completely on the wafer map deselect Show Partial Die 2 Select a die position by clicking on the die Or you may use Select All to select all the die The die positions are always described relative to the streets Ey NOTE The wafer map is approximate Some dies may appear to be cropped due to inaccuracies in the grid mapping There is also a grid fit feature that can be accessed in the main menu This will allow for a more exact replica of the wafer 3 Click Next to continue to the next step 52 Nucleus 2 7 User s Guide Step 5 Set reference position and mark test sites xi C Set Reference Position fo 0 Cursor Position 1 1 Label Test200 Waker diameter 200 00 mm Quality area diameter 135 00 mm Die size X 148550 0 micron Die size Y 14550 0 micron Define positive X Fight Define positive Y Up m A jl A tT ET tT TT Maik Test Sites pt tt tt tt tt pt tt t
31. Commands Iv Commands hf Commands lf Commands v Errors v Errors v Errors IY Responses IY Responses IY Responses GPIB Script Display GPIB status M Show Script window Display Register Script Delay ms 0 S untax Options v Summit Commancs Use SCFI DevicelD r Options Lines to display 30 Show Direct window Log Remote Path C Program FilessCascade Mucleus Ll serD at Browse OF Cancel Figure 115 Remote setup dialog CLEAR BUTTON The Clear button clears the Display pane See figure 114 SEND BUTTON The Send button is used to execute the command that is visible in the Direct pane LOG REMOTE CHECK BOX When the Log Remote check box is checked and the Log Remote Path is set within the Remote Setup window commands are recorded to a specified file path as well as displayed in the Display pane DIRECT PANE This dialog box is used for entering commands to send to Nucleus The list keeps tab of recently sent commands There is a clear Direct button in the setup box that can be used to clear the list GPIB STATUS PANE Status determines if listener or talker mode is enabled See GPIB Pane on page 143 142 Nucleus 2 7 User s Guide DISPLAY REGISTER PANE Displays the STB SRE ESR and ESE registers See Display Register on page 143 SCRIPT PANE Allows you to select scripts from a file DISPLAY PANE This is the displ
32. Compensation dialog e Fixed Compensation When this is selected the value in the edit fields will be applied to die moves in the wafer map For example if the value is 1 01 then all die moves will be one percent longer than are defined in the wafer map e Coefficient of Expansion This form of compensation only works when the optional thermal control module is used to control the temperature of the chuck When it is enabled the valve given is used in conjunction with the current chuck temperature to adjust movement of the stage for each degree Preparations 13 Celsius away from ambient 25 C the length of moves are expanded or contracted by the PPM value given For example if PPM is three 3 and the chuck temperature is 125 C then a commanded move of 10 mm will actually be 10 003 mm px NOTE If the temperature at the chuck changes it will be necessary to set the Reference die position again INKER The Inker is used to mark dies PEE Parameters E x x Mowe Parameters ZW Compensation Inker Contact Made Inker Test Spray Time Go m Figure 8 Inker dialog e Spray Time is the time that the Inker remains active The value is only in the above dialog for the cycle button For the remote command that fires the inker the value is passed as part of the command See the set inker command in the Probe Station Communications Programming Guide e Cycle is the button that activates the Inke
33. Delay Time after light ON mis Delay Time after light OFF ms o Figure 69 Advance dialog If you like you can use the Remote window to step and repeat to the image using the move next die command while watching your monitor See Sending Remote Commands on page 66 Another method used to step and repeat is with the Motion Control window See Die mode on page 25 AutoCal AutoCal is enabled if Vision optional pattern recognition module is available See Calibrating the video window on page 39 Tutorials 89 90 Nucleus 2 7 User s Guide CHAPTER 3 Wafer Maps Introduction The Wafer Map tool provides a visual facsimile designed to resemble the actual wafer being tested For example you can select a reference die in the Wafer Map window and then index to any die on the map as determined by a user defined coordinate system The probes will then be over the pads for that particular die Tutorials Wafer Map Wizard on page 47 Creating Wafer Map Subsites on page 75 nii NOTE Setting up the wafer map can be done using one dialog at a time which is normally used when modifying a previously saved map or by using the Wafer Map Wizard which makes setting up a new map quick and easy x Wafer Map Test200 wfd E E m x File Mode Wafer View Ins evreaaPuxso2e6e02 Parameter None Subsite None z Maximum dies supported 100 000 Current Cal Row Figure 70 Default Wafer M
34. EEE E 42 Chapter 2 Tutorials 43 ES E D eA EEEE NAAA 43 Feeelsena hie 4 eR TI TI A 44 weding a waler I e M RR T ERN 47 HowToserupD uo WOTSPFNMCIEC scm TEEVD PED EU PE REP RER e SUME PRU Fb pe dac A Ed FRAN 47 P Mee PET TNT 47 NT a d a iae 47 Step 1 Setting wafer diameter eessseesesrrrrtrsrrtttrrrrttt menn 48 Step 2 Selecting shape and orientation seen 49 Step 3 eipe e t CNIT mEET 50 Se SS SSSI Die DONON arisna 52 step 5 Set reference position and mark test sites ssseen ee 53 SIGN OC SPECII Test SSUES CS una vecberkixoebpaskd he Oran ck Oca HO eR Edo oc oL lad o4 S219 TES FS uostri rey tree R DH DEVI EPH DAVE FRIE HIE REL Serr rrr errant reer E POFLE DR UEDE HE DRE errs B MOVING TO The Center of Mme WISE sciebat dU HU CUR PRU HR a b ORG 59 es TE N N NNI TM 56 a ererss Me EPI 56 PA POLOS OP issasserensbiteepssekixepsFnsibueitxP tquebbxete EATEN EE ARA ETETA 60 SMAG CONT aie E N T 69 Torr 65 SSndgnog BSIDOIS C OTITPEHIEIPIED epit Hu TEUER M de pPEDR EC PUE PNE d EC GR VOD Va A EM E p lc Ga Tumba 66 UPC CHIETI aiesensiheiayieIspETHRDNUEH DR A rrr ner serene nrrT Mere nt FUERO DE EUER PEEL 66 TSS OT Te nana adc Anarene dene 67 setting Up Wafer Map Pararneters S eenas eene nnns 69 TASE d ele PTT UTE meer 69 POPS TS SSG uiseimertbxxioxpkih HD koEG E srren as Xr ont e oC PORFR RIDERE ORE RE cor HR p 69 CCG valer NOD SUDSITSS uid Cas tp end
35. For Test Minimum Value 0 03 Maximun Value 45 96 Hean gt 26 69 atemdard Dew LS 44 Variance gt 236 4 0 000e 000 1 000e 001 2 D Denn A cady Cren W Y E Ey NOTE The Wafer Map can also be opened with a Toolbar icon 92 Nucleus 2 7 User s Guide Use the File Open command on the Wafer Map window to display a selected file Nucleus includes several wafer data files that demonstrate the display capabilities of the Wafer Map window In figure 72 a wafer data file C UserData RemoteScripts Demo Test200 Test200 wfd has been selected gt Water Map Teste wtd Mode Wale Yaw Gee o o cued unuice tm C eM ew ORARPHIESee Parameter hove Subsile More Testcod wtd Default Wafer Map Faran Mane Desc Recticle Size um Pie 14650 FRecticle Sige Jum Die V 14550 Water Di amp uerer xu z 200 Die Marked For Test Ll Parameter Mone Selected Curent x v E Figure 2 Test200 wfd sample file Wafer Maps 93 To view the data for the file select a parameter by making a selection from the Parameter list Waler Map T esk DEL weld File Moda Male View D ea eTeRRPHIOSO Perometer T3 An ohm Subsite Hore Test 20i wid Lefault Wafer Map Faran Nane T3 Ba ohm Desc Hn Resiztmsnce Recticle Size jumj Die X Recticle Size uw Pie Y Water Pisneter xn Die Marked For Test Miniwum Value 0 09
36. Game Controllers i E General Advanced A Use this application to configure and test game controllers Game Controllers Controller z axis 2 button joystick Refresh Add Remove Troubleshoot Properties Installing IMAQ IMAQ is an image acquisition library that is used with the Nucleus Vision Module The Nucleus Vision Module is purchased separately from Nucleus See Appendix E Nucleus Vision for more information 1 Exit from all applications 2 Insert the IMAO installation CD ROM into the CD drive bay 3 If AutoRun is not enabled Start Run E Nsetup exe your CD drive letter may differ 4 Enter the IMAO serial number at the first screen and click NEXT 5 Pick your destination folder and click OK we recommend using the default folder 6 Click Finish Installing Nucleus 165 166 e Nucleus 2 7 User s Guide APPENDIX B Calibrating the Joystick Calibration CALIBRATING Procedure The Joystick dialog box is opened with the following steps 1 Start the Hardware Configurator in the Start menu select the Cascade Microtech Nucleus 2 6 Hardware Configurator Select default cfg from the File Open menu item or click E l Highlight Engine Joystick Click the Go button on the Hardware Configurator toolbar Click the Test button on the Hardware Configurator toolbar ON OF FF C N Click Calibrate and follow the instructions Analog Joystick Ed
37. Limit Click here High Limit E Once Threshald Apply Upper Threshold Threshold tor selected Bin 1 Then click here Figure 63 Bin colors selected with Gradient Fill Tutorials 73 10 We now had our Die and Bin Configuration Editor set up and from Nucleus Tools Remote window we sent it some values from our text file Test200 Param 4 txt see Figure 65 We also added two more panes to our window Show Histogram and Show Legend These were found in the Wafer Map window menu View path z Wafer Map Test200 wfd i Bl x File Mode Wafer View O eer eQagarpve7 e ez Parameter T4 Yield n z 5v Subsite None Testz n wfd Default Water Map Param Name T4 Yield I Un z Desc T4 Parameter Yield Map Teste00 utd Default Water Map Param Name T4 Yield I Un Z 5V Desc T4 Parameter Yield Map I Un HB 2 5Volts Recticle Size ium Die x 14650 Recticle Size ium Die Y 14550 Water Diameter imm 200 Die Marked For Test 114 J 000e 000 1 000e 001 1 100e 001 1 200e 001 Minimum Value 9 Current Cal Row 6 Figure 64 Parameter results in Wafer Map window Die Map Index Param value probeplan mark die value probeplan mark die value probeplan mark die value This command stores a floating point value at the given die subsite probeplan mark die value TE and parameter combination probeplan mark die value ll probeplan mark die value Id Fig
38. Point and Shoot In this example Quick is selected Tools 135 E NOTE 2 In order to use Quick and Automatic X moves the video window must be calibrated 3 Press the Start button to begin 4 Double click two locations in the video window on a theta alignment line Ihe stage will generate a theta alignment based on the two locations and then move the theta axis 5 With Automatic X Moves turn on the software generates a new X alignment stage location and moves to that position When using Quick Mode the Next button does not have to be pressed after the second double click 6 Double click the same theta line in the video window The stage will move an equal distance to the other side of the wafer 7 Double click on the same theta line again This process iterates back and forth until the distance moved is equal to the Max Distance Move and align tool At any time during or after an alignment the Move and Align tool can be used to move the X stage back and forth along a fixed Y location If the X theta line moves out of the field of view during an alignment use the Move and Align tool to bring the X stage back slightly to make the alignment location visible again VERIFY THE ALIGNMENT 1 Position the video crosshairs on a street of the wafer 2 Use the Move and Align tool to double click on an X stage location away from your current stage location This makes an absolute move keeping the Y stage location from changing
39. Set up the objective See Integrated Video on page 29 184 Nucleus 2 7 User s Guide Step 2 Auto calibrate the video window z NOTE Calibration should be performed any time there is a change to your setup such as a change or refocusing an objective Once the Vision target has been trained and activated do not change the objective lens zoom setting or microscope position Doing so will cause the target search to fail or the alignment position to move Tutorial AutoCal on page 41 Step 3 Set up the windows Procedure With Nucleus up and running Select Window Vision Window Select Window Motion Control Select Window Wafer Map Select Window Status Window Select Window Video Window Jg A WO N e Step 4 Set up the wafer map Tutorial How to Set Up a Wafer Map on page 47 Step 5 optional measure the die size Tutorial Distance Tool on page 133 Step 6 Perform a coarse hard alignment of the wafer Tutorial Hard align on page 56 This step should be done to ensure that the target is in the field of view at the outer edges of the wafer See the Hard Align Tool on page 138 Note that in the case of a blue tape application the Hard Align will be approximate The wafer should now be aligned close to the x and y axes Step 7 Perform a probe to pad alignment Tutorial Aligning Probes To Pad on page 60 Nucleus Vision 185 Step 8 Activate Vision software Tutorial Visi
40. Window Describes the use of audio to verify events Page 153 8 User List Window Describes the management of user logons Page 155 Appendix Description A Installing Nucleus Lists how to install the Nucleus 2 6 Software Page 157 on a Windows 2000 based system B Calibrating the Joystick Includes information for calibrating the Page 167 joystick C Verifying the Station Describes a stand alone program for Page 169 verifying system functionality D Motion Channels Describes setting up multiple channels of Page 171 motion for the MS1 micropositioners and the microscope from the User Interface UI x Nucleus 2 7 User s Guide Appendix Description E Nucleus Vision Describes module alignment and auto Page 183 calibration of the Integrated Video window Also describes how to Use Nucleus Vision for accurate die stepping F Hardware Configurator Describes the Hardware Configurator which Page 189 contains the low level drivers for all hardware components and basic configuration information G MOSAID Auto Tester Describes the steps required to setup Page 201 Nucleus to work with the MOSAID memory module tester Tooltips Tooltips are active for identifying buttons To see a description of a button drag the mouse pointer over any button Notational Conventions This manual uses the following conventions e When directing the user to a command found on the menus a vertical hash mark is used to indicate that a command is nested So
41. arinnar 101 S anA a E OEN EA nes can ard P 102 OAR EEE EAIA EU EATE TE E NETET 102 P ETE N A 102 P E a E dena hse te 102 S AE 5 0 A EE TEE EA EAE EE 102 Mode Select Test Die ssssssssssreettttttttttt ttnn rrnnErEEEEESEENSNEEEEEEEEEEEEEEEEEEEEEEEEEEEE EEEE 102 Mode Select Reference Die ssssssssssetnrrttttrtrrtttrtttrrnnn ttan EEEEEEEEEEEEEEEEEEEEEEEEEEE EEEE E gt 102 Mode Add Remove Die iuesierrrrrre tm rrr red rtm nia hn Op re er ee reb Pa 103 Wafer ciiam 103 View Bes ei gig et EUER 103 2 MUS SUDORE TETTE RTT 103 Water STINT qareeecei U mwpsd viven pipi E Dif pr pe e etd AE ONEN EAEN EE Ea else nie 103 uer rcm 104 uuecakeseelte TENUERUNT 104 e Wise RTT DTI 104 walor POSEEN Lossrmdedepriberenndre i peiemeien e ted water eniai 104 valori SOF POIDS auerteongheisitidvebebsthtebuxiaskpubvebiti qu rennin p VAT VID V ax Ka Pp 104 Wafer Wafer Map Test Analysis sssssee nnns 104 COnnrands wgneur Ier FSG usse ibt bU OR R VR RERE EV dad 105 wa pelke scd Ren 105 CASO Cll CS IGE TON TOT er M 105 Contents iii Clear all partial die marked for test semen 105 eer Nita aaa RTT ITUNES 105 te AG ete T E IUIUS 105 SUI SH AMNES m UT E A PE E A AE EE 105 She aE S LOTEA EN P 105 du Os are eI ATTEN T a E 108 s pmsekbelfo tei irre 110 us e a S arias aige a NRI mc 112 x9 28 ANE ty inne AEE AEA A E AA EE E NT IE Fio
42. default unless the value assigned to the button has been changed see Changing speeds on page 23 The High button will remain depressed to indicate that the slider matches it s assigned value e Click on one of the arrow buttons Figure 20 and hold The stage will move until the button is released Release the mouse button and the stage will stop A lt gt v Figure 16 Motion buttons Preparations 21 Scan z axis mode When in the Scan Z axis mode only the z axis will move When the joystick is moved in the y direction pushed away from the operator the z axis will move up When the joystick is moved in the y direction the z axis will go down The speed of the z axis will be displayed in the X Y Scan Speed field Figure 21 When moving the z axis up with the joystick it will stop at the contact position To move the z axis beyond the contact position the joystick must be released moved back to center and then moved again When the z axis is above contact the maximum speed of motion is limited See Z Axis Motion Control on page 27 Scan auto z axis gt gt Motion Control Scan Auto Settings Low Med High 50 000 ron SEC z Speed utra Fast Separate o Distance Figure 17 Motion Control window with Scan Auto Z axis enabled When in the Scan Auto Z axis mode with the chuck at contact the chuck automatically separates from the probes when the joystick or arrow keys are activated in the x or
43. enabled by a software option You must purchase this option for Nucleus Vision to be available at runtime Check the Help About Nucleus menu item to determine if Nucleus Vision is installed on your machine Nucleus Vision is both a tool for module alignment and a tool for auto calibrating A see AutoCal on page 41 the Integrated Vision window Nucleus Vision works in conjunction with Integrated Video on page 29 Tutorial Vision on page 84 Nucleus Vision was designed for blue tape applications where individual dies are not uniformly spaced nor equally distributed across the wafer Nucleus Vision can also be used when temperature expansion causes a change in the wafer s size which causes a change in die spacing NOTE Ef You will need adequate area on the wafer where the probes or shadows from the probes will not interfere with the Vision software Nucleus Vision Window The User Interface for pattern recognition is described in this section z Nucleus Vision Basic Setup Target Image D Auto Objective Mw Calibration Figure 138 Nucleus Vision window with the Basic Setup Nucleus Vision 183 BASIC SETUP The following items are available from the Basic Setup dialog e Train Target Trains the current target displayed in the Search Rectangle of the video window e Advanced Shows the Advanced Setup items listed in Advanced Setup on page 186 e Auto Objective Calibration Automatica
44. includes 5300 stage with OMS PC48 No Thermal No ECX box DDE Enabled Remote GPIB not enabled No A Zoom No Microscope No Positioners Joystick is included and no Edge Sense The Set Default button resets all of the tabs to the default components STAGE TAB This tab is used to configure the type of Stage you have Different types of Virtual stages can be setup by the setup button in the main toolbar System Configuration E X Remake Comm Micrascope Positioners Misc Stage mcum Motion Control Card C OMS 35 48 OMS PCIe aanasusuanan C Summit 12000 C Virtual C Alessi 6100 Cancel Validate Set Default Figure 141 System Configuration dialog Stage ECX Box SETUP TAB Use this tab to setup an ECX box in your system You can have up to two different ECX boxes but they cannot share the same port address on RS 232 or GPIB System Configuration E x Remake Comm Microscope Positioners Misc Stage ECX Box Setup Thermal GPIB Address E Rs5 232 Port a Enable Box Two C GPIB Address E p5 232 Port EE E Cancel Validate Set Default Figure 142 System Configuration dialog ECX Box Setup 190 Nucleus 2 7 User s Guide THERMAL TAB Use this page to configure a Thermal component in your system You have to purchase the Thermal Module Option for the Thermal components to work properly System Configuration D X
45. motorized theta stages such as the 5300 station Motion Control fe W Enable Joystick Mode E Theta Theta scan speed Low Med High z 00000 deg sec Clicking on the curved arrow buttons rotates the stage The speed of rotation is controlled by the Low Medium and High buttons and the Speed Slider 26 Nucleus 2 7 User s Guide Z AXIS MOTION CONTROL We lt Contact a Move Z Toward Contact Move Z Away from Contact L m Separate Figure 23 Z axis controls Figure 23 displays the buttons that control the z axis e Contact moves the z axis to the programmed contact position e Separate moves the z axis down to the programmed separate position e Move Z Toward Away from Contact These two buttons move the z axis up or down in a scan move The speed of the move is controlled by the position of the z axis i e as the z position changes the speed will change as shown in the following graph Z Position Contact separate Slow Figure 24 Z axis speed graph Right clicks Right clicking on the button can alter the function of the four z axis buttons Contact right click e Set to Current Position This menu item will use the current position as the contact position The separate position will also move so the relative separate distance remains the same e Open Z Parameters This menu item opens the z axis tab of the parameters window Preparations 27 Sepa
46. name of the Engine Serial Port object that was set up in step 4 In this example the name is Engine Serial Port Thermal Chuck Configuration EB X M ame Enaine S000 Thermal Chuck Communications Object Mas Setting 200 degree Min Setting 55 degree Cancel Enable Quick Purge Temperature Setting fo degree Lasting D seconde Figure 121 Selecting Communications Object REMOTE COMMANDS The following commands are used in thermal communication THERmalchuck ACTIvate THERmalchuck ACTIvated THERmalchuck DEACtivate THERmalchuck STATus IHERmalchuck TEMPerature CURRent THERmalchuck TEMPerature SETTemp IHERmalchuck TEMPerature TARGet IHERmalchuck TEMPerature WINDow THERmalchuck TEMPerature WINDow 150 Nucleus 2 7 User s Guide See the Probe Stations Communications Programming Guide for a full description of these commands Also see Sending Remote Commands on page 66 Thermal Control 151 152 Nucleus 2 7 User s Guide CoH A PTE kK Events Sounds Window Audio Feedback The Event Sounds window is used to configure sounds that may be played for the audio feedback Audio feedback makes it easier to recognize when certain events occur EventSounds E x Events Move To Water Load Move To SUS 1 Move To AUS 2 Vacuum On Vacuum Off Chuck Up Chuck Down i 5 Action Moves way Preview Schemes Voice F Sounds scm
47. of the chuck e Vertical Alignment Horizontal Alignment which changes the orientation of the x y z display e Stop Mode ON OFF which turns the Status window into a Stop window any left click of the mouse will stop the current motion of the stage e Setup Dialog which displays the Status window Configuration dialog x Available Channels Chuck Show caption v Microscope Show chuck temperature I Positioner 1 I Show user defined zero Set era Positioner 2 Show Wafer Row Col vw Positioner 3 Positioner 4 Custom Aux Chuck vw Positioner 5 v Positioner 6 Figure 135 Status Window Configuration dialog Status window configuration dialog Available channels The Available Channels pane of the Status window configuration dialog figure 135 displays the Motion Channels that are available for the Status window display Each of the check boxes can be used to configure those Motion Channels that will be seen in the Status window Only a checked channel will be displayed in the Status window Show caption The Show caption turns the caption of the setup window on or off Show chuck temperature The Show chuck temperature toggles the display of the chuck temperature if a thermal unit is available Show user defined zero The Show user defined zero turns the User x and y display on off in the status window The x and y positions are based off of the chuck s x and y position
48. one of the outlying bins The legal range of values is split into five bins with two other bins assigned to outlying values for a total of seven bins It s not possible to remove the outlying bins as they are always included in the total bins The colors in figure 98 were selected from the Set Color dialog Gradient Fill can also be used to select colors assigned to each bin One of the colors shown will be displayed on the wafer map for each die that has one of these test results See Setting Up Wafer Map Parameters on page 69 for the procedure to activate Gradient Fill The thresholds for each of the bins are at the computed default values The legal range of values has been evenly divided into the given number bins When a test result is being displayed on the wafer map the value is compared with the bin thresholds to select which bin and thus which color to display 120 Nucleus 2 7 User s Guide Wafer Map Data Setup l I X Wafer map name p Wafer C Program FilesCascade sMucleusslIserD ata Hiemote Scripts Test name pe Data Label Test Number f Delete Data Item Test description p Parameter Description Voltage Parameter Colors Number of bins Number of Bins fz E Outlying bin er 0 2 r m D 2 e x lt 0 34 Range for Bins Ms 0 34 c x lt 0 48 Low Lirit o2 Bins with legal values p gs 0 48 lt x lt
49. position 136 Nucleus 2 7 User s Guide Soft Align Tool SOFT xi Distance 2 Point Align Soft Align Hard Align Software Alignmen Angle D Calculate Reset Software a Align Active Set Left Position Set Aight Position Figure 112 Soft Align tab The soft align utility is used for setting a wafer angle that is non zero This can be used in applications where the probe card cannot be easily rotated to match a wafer that is at zero degrees These steps can be used to set the wafer angle Procedure 1 2 4 Move to a location on a horizontal street on the wafer Load a wafer Align the probes to the pads on a die If this can be done with the wafer at zero degrees hard align then soft align is not necessary If after aligning the probes to the pads the wafer is at some other angle than zero then soft align can be used to make the die to die stepping work correctly will stay in focus 5 Click the Set Left Position button Raise the platen so the stage can move without dropping the chuck the wafer 6 Move to a location on the same horizontal street the farther away the more accurate the angle measurement will be Click the Set Right Position button 8 Click Calculate The value shown in the Angle window is the angle of the wafer as measured on the horizontal street in steps 5 and 7 used for die to die stepping Check the Softw
50. program Toggle the Video window Stop any movement Toggle the auxiliary power plug on off Note that Alessi 6100 series stations do not have a Auxiliary Power control button Toggle the Wafer Map Toggle the Thermal Control window Toggle Edge Sense mode on off Turn Manual mode on off Alessi 6100 series stations do not have manual mode Toggle the Two Point Wafer Alignment Wizard for systems with motorized theta only Preparations 7 Table 1 Toolbar buttons Button Description Turn Soft Align on off Turn Compensation on Turn Nucleus Vision on off Toggle the Events Sound dialog start the WinCal application for RF calibration purchased separately start the VNA Test application for RF measurements save the current user s settings Display the wafer handler window STOP BUTTON There are two separate stop buttons in Nucleus e On the main Toolbar e Inaseparate window Both stop buttons have the same effect when clicked All stage motion is stopped as quickly as possible e The stop button on the Toolbar cannot be removed e The stop button that is a separate window will be visible whenever Nucleus starts up The Stop window can be toggled on off with the Window Stop window menu item e Dragging the border of the window can change the size and shape of the Stop window In the following graphic the window was dragged horizonta
51. rr reu t DEbx p rrr Rt 201 PUTOSISSISr NIU adipex ip tib HIER a a dt dock Vix sides 201 iode A m RR RENE NCC 202 LOGO G IDDSISSTUD eP aua aE ac EE arena ten 204 Lodd a prober IVS uusisseiercperrivns br arrians sI Ene EEEREN IA 204 Tum on responses Om TMe HODET seeesesaisute d aisteivei aint abvrad a ia 204 Doou ar OTa wo irarri eE AAEE 205 COG Se ra N E 205 ExXGMDIS POF aenieei tinere enaena ATE NNN REEERE E iA ER AEAT EA 206 Index 211 Glossary 215 Contents vii viii e Nucleus 2 7 User s Guide Before You Begin About this Guide Contents Welcome to the Nucleus 2 6 User s Guide This guide describes how to use Nucleus to control Summit Alessi 6100 and 5300 series probe stations Nucleus is a multithreaded 32 bit Windows 20001 based software application This guide is composed of tutorials and references which should address the needs of both beginners and advanced users New users to the Nucleus should start with Chapter 1 Preparations and then read Chapter 2 Tutorials Current users of Nucleus software may find the tutorials to be useful in reinforcing prior learning Furthermore since the last release of Nucleus was shipped many of the windows have been updated to include new controls that should make your work easier and more intuitive These changes are described fully throughout the manual Finally the appendices will provide useful information for both levels of users Chapter Description Prepa
52. to zero A brightness of zero turns will turn the A Zoom light off This will also work for the following remote command set light 2 OFF ON Since the A Zoom is used for controlling illumination the toolbar button no longer controls the microscope outlet on the back of the station When using an A Zoom this outlet remains turned on The microscope outlet may be turned on off during reset of the controller board which happens during system startup CALIBRATION The Movement mode and the Measuring Tape mode require calibration of the Video window prior to use This calibration creates the x and y axes ratio for converting pixels to microns Each of the microscope s objectives must be calibrated separately 38 Nucleus 2 7 User s Guide Calibrating the video window 1 Select an objective to calibrate by rotating the turret on the microscope or by changing the magnification on the microscope s control 2 Right click on the button for the objective selected in step 1 Select the Manual Calibrate item from the menu JA ninm nnns Change Settings Auto Calibrate Manual Calibrate 3 The software will move the crosshair to the upper left corner of the Video window Move the stage manually until a landmark is beneath the crosshair and click Next Size Mode vemm 5x nnnx nnn nnn nnn Setup Capture Objective Calibration Step 1 Move the stage until a landmark is directly beneath the center of the crosshai
53. um Die Y 14550 Water Diameter inm 200 Die Marked For Test 114 Minimum Value 5 28 Maximum Value 24 66 Mean 13 37 standard Dey 6 499 Variance 42 24 Passed Die 4l 35 965 Failed Die P ud 64 045 Ready Current E 6 m Figure 109 Original color source for T3 displayed in Wafer Map window see figure 108 O 000e 000 1 000e 001 2 000e 001 5 Select the bottom radio button under the Color Source option in the C Test Analysis window to return to the colors selected in that window 130 Nucleus 2 7 User s Guide Importing PCS and Galaxy Probe Plans Open a wafer map file E 2 x een 0B Look in c Remote Scripts amp t Demo Test200 Demno TestI55 _ Dema Test Qtr Lid Dema TesktRmap Files of type Cascade wafer Map Files 2 0 wfd Cancel Cascade wafer M ap Files 1 0 wmp PCS Water Man Files ood To read in wafer maps that were generated from PCS software Procedure 1 Inthe Wafer Map window choose File Open and the Windows file open dialog will appear 2 Choose the PCS Wafer Map Files ppd in the Files of type selection box then select the PPD file to open Nucleus will convert the PPD file to the Cascade Wafer Map file format wfd To read in wafer maps that were generated from Galaxy software Procedure 1 Following the same procedure as for PCS wafer maps choose File Open in the Wafer Map window 2 Choose the G
54. y axis and returns to the default height within two seconds when the joystick is released The Z Speed controls the speed at which the chuck will return to contact Moving down will always be at full speed Z Speed utra Fast z Figure 18 Z Speed list 22 Nucleus 2 7 User s Guide The Separate Distance is the default distance that the chuck drops prior to a move in the x or y axis Separate Distance 2 Figure 19 Separate Distance text box Changing speeds aft Scan Speed Low Med High J Figure 20 Speed slider buttons The value of the speed slider can be changed either by dragging the slider button or by clicking on the Low Med or High buttons For example clicking on the Med button will change the slider value to 0 200 mm sec the default Clicking on one of the motion buttons will then move the stage at 0 200 mm sec The value that is set when clicking on the Low Med or High buttons defaults to the following values 0 050 mm sec 0 200 mm sec and 50 000 mm sec on Alessi stations the maximum speed is 20mm sec These values may be changed as follows Procedure 1 Drag the slider to the desired speed for example 0 500 mm sec 2 Right click on the button to change Low Med or High The current value shown under the slider will be assigned to the given button AY Scan Speed Low Med High Set Speed Set Speed To Default 0 050 mmzsec Figure 21 X Y Scan speed The speed se
55. 0 000 ESE 175 z4 dp7 MM 179 leid QE 3 TITTEN 176 deaeda b eye ren 176 e etten k ga T ATT A TETEE E E T 176 Poma al E E EE 176 DEG nN PUN E E iiaea E AA aE AEA E aiai 178 i NOT T E E 179 eee s aaa ger a EAE ST D TT ETE IEEE EE 179 ee EEE E E A 179 gons MNO WoC Ot OO sasdatavisatedronte pad vip OM pbi X eq ERR Pa rr D 180 xereaa u cie we hele dua 18 o eea ae a ae HD T T I TIL ITTTTMTTUTMTCCT 182 AE essE M C IU TU TU 182 HOTELS EID essetis intet rep DEPETORNHERPUTDHEL REDRE ER FE DECRTRRHERDR impeeinio URDUTEREACUDAAO RP URDU enai 182 Appendix E Nucleus Vision 183 Be edo A ETOILE rrnrren erie rer Tre er entry terre 183 NU SIEUS VRON VA OOW sredsintsenncati nsdn rns DRCUN EUR VOPETIF PUDE MPH De DAVE 183 secessus senesced cs cco cen H 184 UnG POCI US VEO TQ E E T EEE A EEEE EERE 184 vu TEE E 184 a ve ee q EES ER RR ERES 184 SIBD I 58T HD TES ODIBDTIVO vcard ieee b diede Cha Gib pa da hlbi Rae BR 184 step 2 Auto calibrate the video window eeeeee memes 185 oap o GeO TS WIS onidebvireivtuisbapiideipressdabivsahivabvelde dni kiebuobd ad GV bab 185 Step 4 Set up the wafer MOP sseeiriade eb oh l HRar Er R C e dr cais 185 Step 5 optional measure the die size sse me 185 step 6 Perform a coarse hard alignment of the wafer sseeee 185 step 7 Perform a probe to pad alignment es ne 185 Step 8 Activate Vision sOftwQOFe sss 186 ANOM OC re SS o
56. 1 Bin and Range setup 70 Nucleus 2 7 User s Guide Bin Settings Number of Bins Step 4 Total Range Lows Limit fo Step 5 Bian tat f2 Threshold Apply Upper Threshold Threshold far selected bin 1 gt 7 Now we re going to set the color for our bins We clicked on a bin and then clicked Set Color and the color picker offered us a full range to choose from Color kl E3 Basic colors Define Custom Colors gt gt cancel Tutorials 71 8 We clicked on five different color swatches for each bin and clicked OK Wafer Map Data Parameter Setup set olor Gradient Fill Figure 62 Bin colors selected independently 72 Nucleus 2 7 User s Guide Ihesi 3 Apply Upper Threshold Threshold tor selected Bin 1 9 Optional the Gradient Fill button can also be activated to set the colors for the bins by selecting the top color holding down the shift key and selecting the bottom color with the mouse pointer See figure 63 Wafer map Data Parameter Setup ET C Program FilessCascade Mucleus LIserD atanem D emo T estzDT esEz UL wt Wafer File Mame Data Parameter Selection Label T4 Yield On z Bv ameer Remove Description T4 Parameter Yield Mapl n amp z Bolts Data Parameter Colors Bin Settings STEP 8 Click Humber of Bins 5 here once Tae otal Range Hold down 4 BE Shift key and Low
57. 15 xus EGOS SOSE T p 16 acess M 17 Moron Corm NN O TE 18 jai E g e MT 18 POETE MT TU E Ea 19 E T m A A E E eens eae 20 a ge MTM 20 vasgtidspiijes M RTT STET TIE TUE 2 eects ester cat eres ceed TTE 22 ey a N 22 MES eI E st EEE AA ARA AAA ENTES A A aoe ceo EA ETE EAE AE EE AAT EASE 24 Rag a E RA tag PEO PR ye Oe ny ea eer eee Perey he 24 hc cca T TT UTENTE 25 olira q 25 T A ar O E E 20 Contents i Mela MOGE Nw TRETRRNR 26 a sic ee oie reise hohaetia aise er PURI EKMD M eal 2 PMI m PM 27 Mw ce ds Mene TTD 28 cie sess 29 ee acerca ce c P 29 JALLE SIE e PR RERO ERE D EE DUTIES PN 29 a eie ep NNNM TT m M 30 rides MNT TT TT E E TERRE 30 Sees ielu es Ret EEUU 30 Ba DEED EOD ODE A PHEPHA UEM EHURU ETUDES RU TEE S 34 sormweare Controlled A Zoom MICIOSCODO uixdasenmdasisnkbvik nl Ro KR Ca i x rl pt oo Pa e a E EE E ai ADU ermiaem E ANE EEE O E A A Jo pieces ge c UO 30 mis c Or EN T DI Tm 35 olega bin o NT mme 3 7 Linear interpolation and pixel To micron ratios sseee mene 37 PO OG Nem esae E R 38 E I e S Umm E E E 38 a ee ges eee EEEE 39 10e Bis o MAAN E E TAA AA A A E T E 4 P ir E E A EEO 4 ie a Terr 4 Jew N ara cere ch ter AE AE ENE
58. 2 Enter information about the wafer map under the label field of the dialog The name Test200 was chosen for this example Pre existing files can be opened by entering the file name in the File Name field and clicking Open x NOTE The Wafer Map Wizard may be cancelled at any time from any of the step windows 3 Click Next to continue to the next step Step 2 Selecting shape and orientation Wafer Map Wizard ee Wafer Map Wizard ee Wizard Step 2 of 6 Primary flat length mm 65 67 Orientation O bottom f Notch Notch diameter mm 0 00 Orientation o bottom Label Test200 Water diameter 200 00 mm Quality area diameter 135 00 mm lt Back Cancel Figure 46 Wafer Map Wizard Step 2 Procedure 1 Select either flat or notch according to the shape of the wafer and enter the flat length into the Primary flat length field The orientation will default to 0 degrees or the notch width which positions either the flat or the notch at the bottom of the wafer map 2 Note that the dialog continues to describe earlier input The label remains Default Wafer Map and the Wafer diameter and Quality area diameter remain displayed at the lower left of the dialog 3 Click Next to continue to the next step Tutorials 49 Step 3 Selecting die size nii NOTE If you don t know your die size jump to Calculating die size with the distance tool on page 51 and the
59. 2000 Series 794 5300 194 Virtual stage 196 Default log on names 2 155 Default passwords 2 155 Device under test DUT 75 105 DUT device under test 75 105 E Edge Sense and the Hardware Configurator 196 Edge sensing 6 Event Sounds window 53 audio feedback 53 F File conversion PCS 737 G Galaxy Wafer Map Files 3 Glossary 215 GPIB 741 and the Hardware Configurator 197 listener 45 talker 45 H Hardware Configurator 189 Help xii I Index moves 24 Initialize z stage 1 Interlock switch MicroChamber door xii moving parameters 200 J Jog mode single micron moves 26 Joystick 27 calibrating 67 mode button 27 setting up 62 subsite 07 with the Hardware Configurator 197 L Loading a wafer 45 vacuum switch 46 Lock Out Tag Out xi Locking workstation lock button 2 with password 2 3 without password 2 3 Log on default log on names default passwords M Manual anchor position 25 Meta 4 MicroChamber interlock switch xii Mode setting joystick mode button 2 mode list 27 Index 211 Motion control and mouse right clicks 27 Motion Control window centering wafer center button 55 mode list box 20 moving parameters 0 10 moving stage 18 right clicking position buttons 9 Motorized positioners with the Hardware Configurator 97 Moving parameters 10 interlock switch 200 Moving stage direction Motion Control window 7 6 speed N Notational conventi
60. 5 Speed 500 Band 100 After these are set you can alter them to different values RF Probe Pressing the RF Probe button will set the following values Overdrive 0 Soeed 500 Band 100 After these are set you can alter them to different values Fixed Overdrive Pressing the Fixed Overdrive will set the following values Overdrive 25 Speed 0 Band 0 Motion Control Window d INTRODUCTION The Motion Control window is used for moving the stage See figure 12 on page 19 Note that this window may appear differently from the window in figure 12 Depending on how you set it up it may display buttons and modes that differ from the minimum and maximum configurations If this is your first time in Nucleus you will want to give special attention to the controls available in this window Once you have become familiar with the motion controls you will want to set up the Integrated Video before actually attempting to process a wafer Later on in Tutorials you ll have many opportunities to put Motion Control to work 18 Nucleus 2 7 User s Guide Positioner Channel sets see Positioner Channel Set on page 176 Move to wafer center Move to load position Move to reference die Move to auxiliary chuck Move to auxiliary chuck Mode list see figure 14 Speed modes speed configurator see figure 21 Motion Control Motion Control Microscope Focus Positi
61. 66 Auxiliary chuck selected ADDING POSITIONS Reference Position Buttons on page 19 Procedure 1 In the Motion Control window right click over a button in the left column such as AUX 1 Tutorials 83 2 Click Add A New Position Set To Current Position Set To Default Remove Position Change Settings Add New Position 3 Right click again but over the newly created button and click Change Settings Position Settings E X e Tip Aus H1 Offset ext Label f Enable Axis 5 Position i082 pm Position 39756 um Z Position 9 o v T Position fo oooo0 deg W Iv 4 Enter your parameters for the new position and click OK 5 Click the new button to verify your entry Optional Modules VISION e pe NOTE If Vision is not installed on your station then you may want to skip this section Introduction Cascade s Vision module is an option that compliments Integrated Video Blue tape applications and irregular street sizes are good reasons to use this module In this exercise we will use Vision to train a target to step and repeat accurately around the wafer Reference Nucleus Vision on page 183 84 Nucleus 2 7 User s Guide Setting up the environment Procedure 1 Launch Vision by clicking Window Vision Window from the main menu Note that the Target Image area of the Basic Setup is empty You have yet to capture an image Sucleus ision B
62. 7 2 assign sottbiu 18 to hardbin 2 non default define SOFT BIN 17 16 assign softbin 17 to hardbin 16 default Report options may be defined here and can be assigned globally to all report types or to specific reports Setups may be modified after PSF loading via the SETUP menu on the PRB utility window assign the path for the database root directory to be used by PRB define DATA PATH C MMY DATA lf Set database root to C MMY DATA define DATA PATH C PRBDATA default By default all output is sent to the User Terminal only To change this to Terminal and File use define REPORT_OPTIONS ALL EOW OUTPUT Terminal amp File restore to default settings define REPORT OPTIONS ALL EOW OUTPUT Terminal The header footer and pagebreaks can also be suppressed MOSAID Auto Tester 209 on a report by report basis define REPORT_OPTIONS WMR NOFOOTER define REPORT_OPTIONS WSR NOPAGEBREAK NOHEADER NOFOOTER define REPORT_OPTIONS LSR NOPAGEBREAK NOHEADER 210 Nucleus 2 7 User s Guide Index A Adding subsites 50 Aligning probes to pad 60 185 Aligning the wafer hard align 56 out of theta street alignment 56 Audio Feedback Event Sounds window 153 Auto anchor position 24 Auxiliary chuck 82 C Centering wafer center button 55 Commands subsite window 06 109 Conventions notational xi D Debugging IEEE or DDE 4 Default component setups 1
63. E If Ultra Slow Very Slow or Slow are selected the stage will take significantly longer to move Chuck contact after initialize When this box is checked the z stage will move to contact after it is initialized If the box is not checked the stage will remain at the bottom of travel after initialization Vacuum Safety When this box is checked the chuck will be lowered to the separate position when the vacuum is turned off This does not apply to Alessi 6100 stations Reverse orientation This check box changes the direction the stage will move when commanded by the Motion Control window When the boxis not checked the direction of the arrows on the Motion Control window and the joystick indicate the direction the view of the wafer will move When the box is checked the arrows indicate the direction the stage will move Joystick Speed User Preference With the Joystick Speed User Preference enabled the joystick will use the Low Medium and High speeds of the Motion Control window to define the maximum speed for the joystick For example if it is enabled and you have MEDIUM selected in the Motion Control window then the maximum speed that the joystick will move when pegged to the side is the MEDIUM speed With this item disabled the joystick uses the maximum stage speed for the top speed Disable Joystick on Remote When selected the system disables the joystick whenever a remote command is
64. E You can configure and add components only if the Nucleus Ul is not running and all other components are stopped Adding or removing components while the Nucleus Ul or other components are running will lead to unpredictable results DEFAULT SETUPS Component setup for 12000 Series Engine 12K Stage Engine 12K Light Control e Engine 12K Sensors Solenoids 194 Nucleus 2 7 User s Guide Engine Joystick Interpreter GPIB commands Interpreter Metacommands Interpreter SUMMIT Communications DDE Server Abstract Joystick Abstract Die Motion Abstract Motion Abstract Station Abstract Wafer Alignment Manual Abstract Wafer Map Component setup for Alessi 6100 Series Engine ECX Stage Engine ECX Driver Engine ECX Sensors Solenoids Engine Joystick Engine Serial Port OR Communications GPIB Generic Device Interpreter GPIB commands Interpreter Metacommands Interpreter SUMMIT Communications DDE Server Abstract Die Motion Abstract Motion Abstract Station e Abstract Wafer Alignment Manual e Abstract Wafer Map e Abstract Joystick The communication component may be the Engine Serial Port or the Communications GPIB Generic device depending on the setup with the ECX Box See Appendix D Motion Channels for a complete description of the type of communications to use Component setup for S300 Series Engine 300mm Stage Engine 300mm Light Control Engine 300mm Sensors Solenoids En
65. Enable Anis Position i592 um Y Position 3956 um Z Position I no E T Position deg F Iv Ses Figure 13 Positions Setting dialog MODE SETTINGS The mode for the Motion Control window is set from the mode list Scan Auta 2 Scan Axis Figure 14 Mode list 20 Nucleus 2 7 User s Guide The mode setting can be changed with the mouse figure 14 or by pressing the mode button upper right on the joystick figure 15 if the mode is checked in the mode list Joystick mode button works with checked modes See figure 15 on page 21 Figure 15 Joystick mode button When the joystick mode button is used to change the mode only those modes that are checked in the list can be selected For example in the mode list the Scan and Scan Z axis modes are checked Pressing the mode button on the joystick will change the mode between these two modes The joystick will cycle through all checked modes from the top to the bottom To check or uncheck modes in the mode list change the mode to the mode to be changed and then left click on the list Scan XY mode In x y scan mode Scan in figure 14 on page 20 the motion buttons are used to move the x y stage by indefinite amounts The speed slider buttons Figure 20 control the speed of the motion The following steps illustrate how to move the stage e Click the High button The value of the slider will change to 50 000 mm sec this is the
66. General Purpose Interface Bus GPIB is a communications protocol that allows instruments to communicate across a bus Refer to IEEE 488 1 1987 and IEEE 488 2 1987 specifications A hardware align rotates the chuck until the DUT axes are parallel to the probe station axes theta 0 degrees Glossary 215 ISS Joystick Probe plan Probe Plan Align SEMI SEMI S2 SMIF Software Align Subsite Stage Theta Wafer Carrier Wafer Map The Impedance Standard Substrate ISS is a wafer substrate containing die of known electrical characteristics that is used to calibrate a test system The joystick is a probe station accessory that allows you to move the stage by tilting a stick To use the joystick the joystick software application must be running You can modify the direction and velocity corresponding to various directions and angles of joystick tilt A probe plan is a file containing a symbolic map of your device under test DUT with sites marked for testing See also Water Map The probe plan align is a process of measuring the distance between the probe plan s coordinate for the DUT s alignment die and the actual physical position of the alignment die Nucleus uses the measurement to compensate for the discrepancy correctly positioning the probes over each die site marked for testing Semiconductor Equipment and Materials International a standards organization based in California and tasked with the generati
67. Map utility on any Windows based computer 216 Nucleus 2 7 User s Guide
68. N Label Index x Offset offset Label First R 0 Label Second 1 247 2470 2 3182 2469 3 318 1207 4 Double click a subsite to move to that subsite or highlight a label and click Ed move to that position Note that the selected die displays in blue 5 Open the text file that you previously used To execute a text file on page 67 change the command to move probeplan next site Execute and see that the stage moves in x and y to each die and subdie 76 Nucleus 2 7 User s Guide Io change text x Wafer Map Subsite Subsites Mode Tools View ed 3182 3180 Procedure e Simply select the text field turns blue and type in new text To delete a subsite 3 Water Map Subsite Subsites Mode Tools View Label First 0 0 Label Second 247 2470 Label Third 3180 2469 Procedure e Select the subsite and navigate to the menu item Subsites Delete a Subsite Ey NOTE The Delete icon x can be used to remove all but the reference subsite but it would have to be added to the subsite toolbar as we did above See Customizing the subsite window on page 108 Note also that you cannot undo a deletion you will have to re add the subsite Note that many other features found in the menus can be placed on the toolbar as icons through the View Customize menu item Tutorials 77 To rearrange a label x Wafer Map Subsite Subsites Mode Tools View Label Fi
69. Parameter Setup dialog Your parameter definitions are visually displayed in the Wafer Map window as differently colored die Reference Using the Parameter Dialog on page 117 PARAMETER SETTINGS Procedure if 2 From the Wafer Map menu select Wafer Parameters In the Data Label field enter a name for the test We used T4 Yield I On 2 5V replace lt new gt In the Parameter Description field we described the test parameter to be T4 Parameter Yield Map I On Q 2 5Volts see figure 61 We then clicked on the Number of Bins control and selected seven for our total The bins are currently the gradients of the a color gray We ll change them in a later step Tutorials 69 6 Now you ll want to separate your test results so that the dies that meet one requirement will fill one bin while others will fill the other bins We filled in the Range for Bins by typing in our low and high limits The upper and lower values become the legal range of values The outlying bins will accept rejected values i e values that don t fall within our legal range of values In our example the range is from 9 to 12 x C Program FilessCascade Mucleus ll zerD atasM ew Demo Test200 T est200 var Wafer File Mame Data Parameter Selection step 2 Label T4 ield LOn 2 54 Number f Remove Description 14 Parameter Yield Map n 2 5 Volts step 3 pum Berroa HERES n EE TET Figure 6
70. Probe Fired Overdrive OF Cancel Apply Figure 11 Contact mode Programmable This button can be used to toggle on or off Pro gramable Mode When off Contact Mode is at its defaulft Standard Mode Summary When commanded to go to contact the Z axis will move up to the bottom of the Speed Zone at normal velocity Then it will set the velocity to the Contact Speed The Z axis will then continue at this velocity up to the Contact Overdrive amount If the starting point of the Z axis is already in the speed zone the Z axis move will start by using the Contact Speed The contact icon at the lower left of this dialog turns green when contact is made When in this mode and with a Positive Overdrive amount the chuck will be above contact at the end of the move The icon on the main toolbar will display yellow and the Contact button in the main toolbar will display grey There is no actual contact searching that goes on in this mode Contact Mode Programmable Parameters speed Zone speed Zone is the distance before contact that the Contact Speed will use When the Speed Zone is 0 the Contact Speed is disabled Contact Soeed At Contact Speed the velocity is lowered from Preparations 17 Overdrive Overdrive is The amount of penetration of the probe tip into the pad after contact is made DC Probe Card Pressing the DC Probe Card button will set the following values Overdrive 2
71. Q MODE AUTO TESTER or AUTO PROBER or MANUAL define ID SOURCE LOT USER Change this to USER define ID SOURCE WAFER USER Change thie to USER ooo Ju PSS SS SSS SSS Wafer Map Die Index Locations 5 oec MH The wafer map DIE ROW DIE COL or DIE LOC statements define the layout of die on the wafer under test This section is wafer specific and may be different for each product wafer tested Setup a basic wafer map to match the Nucleus wafer map define XY_MIN 1 1 Minimum X Y co ordinates define XY_MAX 4 4 Maximum X Y co ordinates define DIE ROW 1 4 1 Cow from X 1 to X4 in Y 1 define DIE ROW 4 1 2 cow from X 4 to X 1 an Y 2 single dice can also be specified define DIE_LOC O 3 single die at X 0 Y 3 lf mote dice 1 2 2 2 2 1 and lll are specified by both the DIE ROW statements above and the DIE COL statements below Since they have already been defined by the DIE ROW vectors they are not included in the subsequent DIE COL vectors They will be tested in the first two row passes and skipped MOSAID Auto Tester 207 in the column passes define DIE COL 4 1 1 Lf col from Y 4 to Y 1 in X 1 define DIE COL 1 4 2 col from Ys l to Ys4 in Xs1 SKIP DIE and UGLY DIE are not tested They can be overlaid on already defined test dice or may specify new locations define SKIP DIE O0 0O map die at 0 0 bu
72. Separate Figure 60 Z axis controls in Motion Control window Height bar currently at Separate fills up when moving towards Contact e Sending Remote Commands ay INTRODUCTION In this section of the tutorial we ll set up and run Cascade commands from the Remote window The Remote window is available through Tools Remote Window The Remote window can also be used to send AUCS commands to an ECX Box Reference Remote Window on page 141 NOTE ET The Nucleus 2 6 Communications Guide PN 129 164 describes the command used in this exercise as well as all other commands available to Nucleus We ll use our wafer map file Test200 wfd that we created earlier and a text file our script that we made for this exercise Both are located in C Program Files Cascade Nucleus UserData Remote Scripts Demo Test200 Command used probe mark die value 66 Nucleus 2 7 User s Guide Io execute a text file Procedure 1 Open the Wafer Map window if not already open From the File menu item navigate to Test200 wfd and open the wafer map x Waker Map Test 00 whd E ml xl File Mode Wafer View u Ready Current Cal Row 2 Select the parameter T4 Yield I On 2 5V x Wafer Map Test200 wid E B x File Mode Wafer View w OT 6 CO Pye senum T4 Yield Un 2 54 Subsite Mone P am EHE EE Current Col Row 4 Tutorials 67 3 Open the Remote window
73. Set is located at the top of the Motion Control window and contains the buttons icons for all available Motion Channels The Positioner Channel Set is used to select the motion channel the active channel that is to be controlled by the motion direction buttons arrows in the Motion Control window To change the active channel click on any one of the channel positioner buttons 176 Nucleus 2 7 User s Guide NOTE im The channel button on the joystick can also be used to cycle through and select an available channel For the Positioner Channel Set to be visible the system must have an ECX Box and be set up for Motion Channels The set will show which channels are configured in the ECX Box In the following example the chuck motion channel is the active channel Right clicking on a motion button will bring up a menu that can be used to do a Full Initialize or an Initialize in Place NOTE For best performance motorized positioners should be kept near the center of their travel Figure 131 Chuck and motorized positioner channel set e If the chuck channel is selected in the motion control widow the chuck will move to the position that s featured beneath the crosshair ca Motorized Positioner 1 Em Chuck motion gt Motorized Positioner 2 Microscope motion amp Motorized Positioner 3 Motorized Positioner 4 Motorized Positioner 5 4 Motorized Positioner 6 Figure 132 Available Motion Channels M
74. T ET TT Mark All wp Back Hest gt Cancel Figure 50 Wafer Map Wizard Step 5 Procedure 1 To set a point from which all moves on the wafer will reference from check Set Reference Position and click a known location on any portion of the wafer The R which marks the reference position will be displayed at the selected position the location of the axis origin on the wafer map select the Set Reference Position radio button and enter axis coordinates In figure 50 the coordinates 0 0 were chosen placing the Reference die at the axis origin 2 Define the x and y coordinate arrow direction using the pull down menus next to Define positive X and Define positive Y In figure 50 the x axis points to the right and the y axis points up ni NOTE The axis icon in the corners lower left in Figure 50 of the wafer window reflects these directions To select all dies as a test site in the wafer map select Mark All To remove dies drop ins click the mouse once on each die selected for removal Simply click again to re mark a die 3 Click Next to continue to the next step Tutorials 53 Step 6 Specify test sequence Wafer Map Wizard Step 6 of 6 Specify the testing sequence Horizontal Vertical sal a w BRR Op a Bi directional Horzortat Pee eee 2 Bi directional Vertical Horizontal Vertical left t
75. Technical Publication Nucleus 2 7 CAscADE User s Guide MICROTECH Innovating Test Technologies File Parameters Tools window i 1627 NE al REI Chuck User Vv Enable Joystick Mode a Scan XY scan speed Cascade Microtech Inc 2430 NW 206th Ave Beaverton Oregon 97006 Toll Free 1 800 550 3279 Telephone 503 601 1122 Fax 503 601 1111 Email tech_support cmicro com www cascademicrotech com Japan 81 03 5478 6100 Email Japan tech support cmj gcmj co jp Europe 44 1295 812828 Email Europe tech support cme gcmicro com PN 129 169 Revision A Revised 05 30 03 Copyright 2003 by Cascade Microtech Inc All rights reserved No part of this manual may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopy recording or any information storage and retrieval system without permission in writing from Cascade Microtech Inc Requests for permission to make copies of any part of this manual should be mailed or faxed to Cascade Microtech Inc 2430 NW 206th Ave Beaverton Oregon 97006 USA Tel 503 601 1122 Fax 503 601 1140 The following are trademarks of Cascade Microtech e AIR COPLANAR PROBES e ALESSIO e ATTOGUARD e CASCADE MICROTECH e CASCADE MICROTECH and Design e EYE PASS PROBES e EZ PROBE e FEMTOGUARD INFINITY PROBE e INNOVATING TEST TECHNOLOGIES e MICROCHAMBER e MICROSCRUB e PYRAMID PROBE e S
76. Temperdture Setting lt a degree Lasting a seconds Figure 119 Thermal Chuck configuration dialog box 5 The system has now been configured for thermal chuck control using GPIB Be sure to save the default cfg file by selecting Save in the main toolbar of the Hardware Configurator RS 232 communications setup 1 Add the following components to Hardware Configurator e Engine Serial Port Add the component from Table 4 according to your controller type Table 4 Controller component determination Controller type Component to add P0315 Engine 300 Thermal Chuck TPO3000 Series Engine 3000 Thermal Chuck TPO3200 Series Engine 3200 Thermal Chuck TPO3500 Titan Engine 3500 Thermal Chuck 148 Nucleus 2 7 User s Guide Controller type Component to add ERS SP72 Engine ERS SP72 Thermal Chuck E NOTE The list of supported thermal controllers also includes e TPO3200A TP03200 Series e TPO3010B TP03000 Series e TPO3210B TP03200 Series e TPO3215 TP03200 Series 2 Connect the computer to the thermal controller using an RS 232 cable This cable will be different depending on what type of controller you have Table 5 Cable types Controller type P0315 Does not support RS 232 communications TPO3000 amp A 9 pin to 25 pin straight through cable The 9 pin side is TP03020 Series connected to the host and the 25 pin is connected to the Thermal controller TPO3500 Titan A9 pin to 9 pin NULL mo
77. UMMIT e SURROGATE CHIP e TOPHAT e WINCAL t All other trademarks registered trademarks service marks and trade names are the property of their respective owners Contents Contents i Before You Begin ix ee E e erem ix Esai p YT RNC n IX j Sle e RR TTE xi DOS CEGNOUES DOGUEIIST Bode DRE RUM EPEEEPERREM SUN dUPDEIRIEIR LUUD SIDA r Xi Software Interlocks viccecccccccccc eee eeee teen eem eere nennen rr nnn Xi fermes cE HP Xi MicroChamber Interlock Option emen Xii Where ToO del There THTOI REED dd Sad arb b Fab dap AA Xii About Nucleus 2 6 SofftwOate esesseee eene nene nnn Xii Chapter 1 Preparations 1 e el e AAA NAA ae aS oah T a e E A E E TE teeter EEEE E ee Cumrent Users of NUCISUS a cesversicxeoiermuerniatercesiviaimwrnteiaimerdtei anti eeninnaivenvasenteangusnhaienaceiel Esse 1G Qa aE TURNER Cea aak aa a E AE ETTET EE 2 Eee d ie gge S esM o AE o S ee rete ree Te 3 Hi pie a a a AEEA x 4 Ie a Nem 4 OT T E EE EEEa 4 ei E F E EER 5 jis ee sige TITE a SIENNE I E AEEA R AEE E E 6 EIE BUD DI a A AE E neice 8 Ine PO AA VIG 9 ANTT TmUMem LMT 9 a t NC T Tm RS 9 Move Parameters esssiscssseriissnittasitatntadidtd FE EXE CUL rH DU DEP URERUHEEPERITEKE PANT PEPHERPE FEE TAE 10 CRT TE Nem 12 BAe Ch eu Pm 13 lempeceralure C ompens IIT stasis viacepuccrniadarninnerGinlindadanmentin oliiddulusbaeneiadiananainencniecwensia 13 JE Tem 14 CN a NT 15 E E E A OOA E
78. VER RGZ0DO PDI Changed to EG2000 PDL 2 riri s c nae LCD C LM C CHE yg iin ea eee Proper Driver Contiguvalioly Saas See ess Se Seea ccc c c c E 2 aa 0 0 0 The timeout settings used by the Prober Driver can be set when the PSF file is loaded as follows or can be set in MOSAID INI define IO TIMEOUTS 12 10 3 sec 300 ms reccommended the CASSETTE_SETUP command can be used to configure the maximum number of cassettes per lot and wafers per cassette to expect for multi cas sette probing These settings can also be controlled via MOSAID INI define CASSETTE_SETUP dy i cassettes per lot slots per cassette 206 Nucleus 2 7 User s Guide Defaults set here may be changed by the Operator using the dialog box accessed from the EDIT menu of the PRB utility window define CARD ID Card xxx define COMMENT_LINE EG Example Prober Setup File define DEVICE ID SRAM define OPERATOR_ID Operator define PROBER_ID Cascade Microtech Change Company define FLAT ALIGN BOTTOM or RIGHT or TOP or BOTTOM gaan lac kaa sped op a ea oc a aA Lf Re a ee Proper Sequence Mode Control Sess Se ju RRS SS ee ee ea By default the PRB utilty assigns AUTO PROBER as the normal SEQ MODE ID SOURCE defines how LOT and WAFER identification is obtained by default both are initialized to SEQUENTIAL define SEQUENCE TESTING Test Program or Current Test define SE
79. a alignment If point and shoot has not been calibrated for the video window this option is grayed out Automatic moves e When Automatic Moves is enabled a new X stage location for the fine alignment based on the size of the coarse alignment is generated This is only an estimate and may cause the street to move out of the field of view e Max Distance is the largest distance from center that Automatic Moves will use when making a fine theta alignment The fine alignment will continue to move out until the Max Distance from center is reached At that point the alignment is finished If the video window is not calibrated for point and shoot the Automatic Move check box is grayed out Move and align fool e The move and align tool can be used to make an absolute move in X along a street while keeping the Y axis at the same location e The red crosshairs depict the X distance from center The edge of the circular region represents the edge of the chuck Double clicking the Move and Align tool translates the X mouse location into an X stage move which is then executed The Y mouse location has no effect on the stage move e The current Y stage location will be maintained during the X stage move TWO POINT ALIGN PROCEDURE This example uses a Quick Point and Shoot alignment with Automatic X Moves Use the on screen instructions to complete the alignment 1 Select an alignment type using the radio buttons Standard or Quick
80. al control are configured on the system then clicking on one of these buttons will cause the A Zoom microscope to change to the zoom and illumination values stored in the objective settings dialog See Software Controlled A Zoom Microscope on page 35 and Calibrating the video window on page 39 34 Nucleus 2 7 User s Guide Change objective settings The Objective Setting s dialog figure 29 allows you to give the button an ID name maximum of four characters which becomes the button s text The tooltip associated with this button also is programmable maximum of 256 characters Objective Settings Tool Tip Select as the active obj lens Figure 29 Objective Settings dialog SOFTWARE CONTROLLED A ZOOM MICROSCOPE An A Zoom microscope can be controlled by Nucleus This section describes requirements for software control of the A Zoom and the basic changes to the Integrated Video Window when using an A Zoom microscope Requirements e A digital controller for the A Zoom or A Zoom2 e One free COM port on the Nucleus computer All A Zoom digital controllers use a RS 232 interface e A 9 pin to 9 pin straight through communications cable Refer to Hardware Configurator on page 189 for a complete description of how to configure the Hardware Configurator for controlling an A Zoom microscope Video window Several changes occur in the Video window when controlling an A Zoom microscope This section covers the basic toolbar i
81. alaxy Wafer Map Files wfr in the Files of type selection box and then select the WFR file Nucleus will convert the WFR file to the Cascade Wafer Map file format wfd Nucleus DataMap 1 0 The Nucleus DataMap is also offered as part of the Nucleus software application The Nucleus DataMap is a standalone Windows 2000 based software product that allows you to view test data in a graphical wafer map format The software provides many of the same functions as Nucleus and can be run in conjunction with the Nucleus software or independently on any PC based desktop or notebook computer The Nucleus DataMap software provides you with straightforward methods to achieve the following e View wafer test data and statistics e Perform wafer yield analysis Wafer Maps 131 e Display histogram tabular and wafer map formats e Print device performance reports e Load an existing wafer map or create a new one x NOTE The Data Map software is on the Nucleus CD It can also be downloaded from Cascade s website For more information on using the DataMap software see the Nucleus DataMap User s Guide 132 Nucleus 2 7 User s Guide CHAP TE R 4 Tools Introduction The Tools window contains one tool to measure distance and two others Soft Align and Hard Align for aligning the wafer in theta rotation There is also a fourth tool Two Point Align used to align the wafer in theta on the S300 and Alessi 6100 series probe statio
82. all Nucleus software on a computer that is not attached to hardware e Nucleus Authentication If you are installing on a Summit 12K or 5300 input the serial number of the probe station and insert the encryption disk into drive A Click Next to continue Installing Nucleus 159 4 Choose the Setup Type This step allows selecting different types of options for the installation The recommend option is Full Install The Minimal install will only install the prober control software and will not install documentation demos or scripts The custom option allows you to be selective with components to be installed Cascade Nucleus Prober Control Software 2 6 0 E X Setup Type Select the Setup Type to install CASCADE B Click the type of Setup vau prefer then click Next e Typical Fragram will be installed with the mast common options Recommended for TEE EU Compact Program will be installed with minimum required options C Custom Tou may choose the options you want Eo install Recommended tor advanced UZETE Installshield Back Cancel Click Next gt to continue 5 Choose a Destination Folder Nucleus software can be installed to any directory or drive but it is recommended that the default path be used Cascade Nucleus Prober Control Software 2 6 0 T E Dp X Choose Destination Location Select folder where Setup will install files CASCADE Setup will install Cascade Nu
83. altering it for use with Nucleus See comments in RED for changes made to the file MOSAID Auto Tester 205 EXAMPLE PSF KKKKKKKKKKKKKKKKKKKKKKK KKK kk ck Kk KkCk Kok Kock KKK Kk Ck kk KEK KKK K KKK KKKKKEKKKKKKKKKKKKKKKK ck Filename EXAMPLE PSF Rev V1 3 2 Description This example file contains prober definitions required to setup the Wafer Probe PRB utility i Ihe most commonly used PSF command verbs are d presented here other commands listed in the 5 PRB utility s User Manual may also be included m Use the supplied template file TEMPLATE PSF i as the starting point for developing your own m CUSTOM PSF a RM r P Rev Date Eng Description 100 OLSEP94 MSI Initial file creation 1 240 ZOAPR9S BG Revision Lor PRE 1 2 0 Less USMAY96 BG Revision Tor PRB 1 5 2 KKKKKKKKKKKKKKKKKKEKKKKKKKKKKKKKRKKKKKKKKKKKKKKKKKKKKKKKKKKKKKKKKKKKKKKKKKK This is a mandatory statement and must appear as the first statement in the PSF It is used to validate options selected in PSF command verbs which may differ between prober types The SIMPROBE PDL is a prober simulator driver It is useful for configuration testing The real prober driver will be named for the prober type e g KLA1007 PDL for the KLA 1007 prober define PROBER_DRI
84. alues to either horizontal or vertical e Stop Mode On Off e Setup Dialog e Show caption window header e Show Hide Chuck Temperature e Show user defined zero Set Zero button e Show wafer row and column e Custom Aux Chuck Configuration setup displays Aux chuck location on graphic e The units of the numeric values can be selected from microns mm inches or mils See The Parameters Window on page 9 for more details e Set Zero Sets current user coordinates to zero at the present location Integrated Video INTRODUCTION Integrated Video Video is a window that displays and captures patterns on the wafer You will need to have this window set up properly before you can perform any meaningful wafer measurements Integrated Video is complemented by Nucleus Vision see Appendix E Nucleus Vision when Vision is purchased as a separate module Preparations 29 ACTIVATION The Integrated Video control may be activated from the menu item Window Video Window or by clicking the icon shown at left on the toolbar All video control attributes and settings are saved in the userX dat file when running The video control activates a dialog box that contains the following e A title bar with a maximize button A Size button to toggle between two window sizes A combo box for changing control modes e A crosshair that can re positioned e Five objective lens buttons to associate a specific lens or zoom setting e
85. ap window Wafer Maps 91 Wafer Map Window The Wafer Map window allows you to view test data in a graphical format Wafer map data is displayed in three separate panes within the Wafer Map window e The Wafer Map pane displays a graphical image of the Wafer Map e The Legend pane displays parameters bin ranges and a vertical legend of bin values by color e The Histogram pane displays bin count bin ranges and a horizontal bar chart of bin values by color You can zoom in or out on the Wafer Map pane Each of the windows within the wafer view window is dockable tearable and resizeable The enhanced Wafer Map window can be opened by selecting Window Wafer Map from the main menu opens the default Wafer Map and then from the Wafer Map window selecting View Show Legend and or Show Histogram Teat2 00 wt d Defmult Wafer Map Legend Faran Nanc T3 Bn chm pane Desc Pn Bcasistaoance Becticle Size um Die X 14650 Becticle Size um Die Y 14550 Water DimBueter mum 200 Die Marked For Test 114 Miniman Value 0 039 Maximan Value Hean Standard Dev Variance l ce 3 4 ET Bi 7i q p d Loc do Los dn Lo t tous toe CA oo 2 oS m 4 Testcod ved j Default Wafer Hap Histogram Faranu Nane T3 En obm pane Desc En Resistance Recticle Sine tum Die x Recticle Sine unm Die Y Warer Diameter imm Die Marked
86. are Align Active check box so that the wafer angle will be Tools 137 e 10 Optional Use the Soft Align 5 button on the main tool bar to enable disable the Soft Align function Hard Align Tool z Tools BET xj aes Distance 2 Point Align Soft Align Hard Align Scan method Continual C Wait at end Scan distance C Define with Joystick Enter fixed distance agog Microns Scan velocity Very Fast Ultra Fast Start Align Stop align Close Figure 113 Hard Align tab This dialog box is used to adjust the theta alignment of a wafer so that it is orthogonal with the motion of the stage After clicking the Start Align button the stage will begin moving in the x axis As it is moving adjust the theta knob until the motion is parallel to a scribe line on the wafer When finished click the Stop Align button Tutorial Hard align on page 56 START AT CENTER e On The x motion to be divided equally around the center of travel 0 0 e Off The current position will be used as the center of the scan area SCAN METHOD e Continual The stage will move back and forth in x e Wait at end The stage will pause at the end of each move until the operator clicks a button to continue 138 Nucleus 2 7 User s Guide SCAN DISTANCE e Define with control pad When this is checked the operator will be prompted to move to the right and left ends of travel befor
87. asic Setup Target Image Train Target a 3 Advanced Auto Objective M Calibration Ey NOTE When the Vision target has been trained and activated do not change the following e Objective lens e Zoom setting e Microscope position Doing so will cause the target search to fail or the alignment position to move 2 Ensure that you re in Vision mode drop down list Tutorials 85 Size Mode Vision nnnx nnns nnn nans Setup Capture 3 Using Motion Control navigate over to the Reference Die and capture the image at Separate Contact position chuck down Move the red square around until you re over an acceptable image 4 Click Train Target The passed image is updated to the Target Image in the setup window Sucleus ision Basic Setup Target Image Train T arget XU A rA Auto Objective M Calibration 5 If your score exceeds the Minimum match score see page 89 then your have successfully trained your target and video window displays the result 86 Nucleus 2 7 User s Guide Size Mode Vision nnn nnnx nnn nnns Setup Capture l 1 6 If you are unsuccessful then you ll see an error message You ll then want to minimize the Match Score or get better image See Good and bad images Nucleus Vision Error x e The current Nucleus Vision target could not be located on this die Note that images are captured in the down position Separate
88. ay area for selected command sets See Display Pane on page 143 Remote Setup DISPLAY PANE The Display pane in the Remote Setup window allows you to configure what will be displayed in the Display pane of the Remote window If a SCPI GPIB or Meta command is checked then the Display pane will show the appropriate result For example if SCPI commands are checked then all SCPI commands sent to the computer via DDE RS 232 or GPIB will be displayed You can set up any combination of commands errors and responses for each of the command sets Text is added to the window with the most recent command at the bottom and the screen scrolls as other commands are displayed GPIB PANE The Display GPIB status check box toggles the status bar in the Remote window The Status in the Remote window shows whether or not the system is in a Listener or Talker mode The system is a listener when it is waiting for commands to come over the GPIB Once a command is executed and a response is required it will go into the Talker mode The Talker Listener check box will toggle the system between being the controller or being controlled When checked the system is the controller Response On should be checked if the system is going to return string responses after every remote command DISPLAY REGISTER The Display Register check box toggles the register window in the Remote window Remote Window 143 144 Nucleus 2 7 User s Guide CHA PTE RK
89. buttons are also programmable A programmed position applies to the currently selected positioner As the active channel is changed to a different positioner these buttons change the positioner s behavior to reflect the currently selected positioner Right clicking in the buttons area of the window produces the following popup menu Set To Current Position Remove Position Change Settings Add 4 New Positioner Location This menu can be used to e Set the position to the current location e Remove a position from the window e Change the current settings of the button e Add a new positioner button STATUS WINDOW When Motion Channels are set up the Status window can display the x y and z positions for each motion channel The active channel in the Motion Control window displays as bold text in the Status window In the following display the Status window is configured to show the Chuck User and Positioner 4 as the active channel Chuck User Scope Pos 1 Pos 2 Pos 3 Pos 4 Pos 5 Pos 6 P OD eE f b P AS BZ eS Ye pb qp P e pfp f f po Z 0 n h n n D n n n T D 00000 Microns SetZero Figure 134 Status window Motion Channels 179 Right clicking anywhere in the Status window displays a popup menu which has several options for configuring the window Hide Graphic Vertical Alignment Stop mode OM Setup Dialog These options are e Hide Graphic Show Graphic which toggles the graphic display
90. cel Figure 95 Reticle setup window Relicle size Reticle size is the number of Rows and Columns that make up a reticle in the currently defined wafer map The Set Column Rows button applies the sizes to the wafer map Reticle location The direction buttons in the Reticle Location section are used to shift the currently defined reticle by the step size For example if the step size is one and the UP button is pressed the currently defined reticle will be shifted up by one row Wafer Map Parameters The Parameter function allows you to create a visual display of data received from the wafer map showing parameters as different colored dies The Parameters window can be opened from the Wafer Map window by selecting Wafer Parameters Tutorial Setting Up Wafer Map Parameters on page 69 x NOTE Maximum parameters supported 255 116 Nucleus 2 7 User s Guide The steps for using the Wafer Map parameter data assumes that you have already set up your Wafer Map wafer size die size etc in the Wafer Map dialog and saved the wafer map to a file Procedure 1 Set up the wafer map parameters in the dialog Tell Nucleus what colors to display for various test results The colors are user selectable from the Color button on this dialog For each group of test results specity the range of values and the number of bins to divide the range into 2 Send remote commands to Nucleus from test software The PROBe
91. cleus Prober Control Software v2 6 0 in the following folder To install to this folder click Next To install to a different folder click Browse and select another tolder Destination Folder C Program FilessCascade sMucleus Browse lnstallhield Cancel Back Click Next to continue 160 Nucleus 2 7 User s Guide 6 Optional Step Custom Setup This step will only appear if you have selected the custom install from the previous step This will allow you to install different options Cascade Nucleus Prober Control Software v2 5 0 Select Features Choose the features Setup wall install Select the features you want to install and clear the features you do not want to install Description zum L ocumentation qu LabVIEW Demo wi Remote Scripts a Extras Installs the Nucleus Manual and Programmers Guide Space Required on C 347412 K Space Available an C aggid K Back Cancel Click Next to continue once an option is selected Irrstalls meld 7 Click Install to complete the installation Cascade Nucleus Prober Control Software 2 6 0 3 E AX Setup Status CASCADE Cascade Nucleus Frober Control Saftware v2 6 0 Setup is performing the requested operations l 69 Installshield Cancel Installing Nucleus 161 Setting up the joystick This section describes two types of setups Windows NT and Windows 2000 Refer to the appropriate sect
92. condary None Primary a PPinsreumenrs Termination jw Teminate Read on EOS IM Sei EOI with EOS on Write bit EOS Compare I Send EDI at end of Write 10 EOS Byte 10sec LO Timeout Default Parallel Poll Duration Figure 125 GPIB settings 4 Verify that the board is setup properly and that the System Controller is checked and that the Enable Auto Polling is unchecked 5 When the settings for your board are entered as shown close the dialog by clicking the OK button GPIB setup for fhe Hardware Configurator A GPIB connection requires the Communications GPIB Generic Device component The Communications GPIB Generic Device setup dialog can be accessed by selecting the component and clicking the Setup button on the toolbar A unique name can be assigned to the GPIB connection in the Hardware Configurator Object Name field The address must match the address of the ECX Box The default address for an ECX Box is five 5 1 Add the communications GPIB Generic Device 4dd Component r E X Interpreter Metacommands Interpreter SUMMIT Communications GPIB Communications AS 232 Communications GPIB Generic Device Communications ODE Server Abstract Wafer Map Abstract Motion Abstract Die Motion i Abstrack Joy Stick Abstract Auto Recipe Abstract Water Alignment D ff amp xis Abstract Water Alignment M anual Cancel Figure 126 Add Co
93. cross the wafer map Tooltips None C Parameter C Subsite C Row and column Wafer Map Test200_wid op File Mode Wafer View D eM ereQaaPsr7eee Parameter E Arn ohm Subsite None Bs Sanne bL S P Curent 7 t Figure 8 Wafer map with Tooltips deselected Wafer Maps 97 gt Wafer Map Test 00 wtd JB xc Fille Mode Wafer View nsgoeveaaPri toeecse C Subsite Parameter 13 An ohm Subsite None C Row and column p im Positior 4 Die index 35 N 4O E bL m s Ready Current 1 d it Figure 79 Wafer map with Parameter tooltip selected Legend pane The Legend pane always displays data such as file name description wafer size and the number of dies marked for test In addition it can contain the legend statistical information or both depending on the options you has selected The legend displays the colors assigned to each of the bins for the parameter currently selected as well as the range of values contained in that bin The statistical information displayed reflects the parameter data received for the selected parameter x NOTES The same statistical information can also be displayed in the Histogram pane The parameter result data cannot be added to the wafer data file by the DataMap Nucleus must be used to add parameter result data with the remote commands such as PROB MARK DIE VALUE See the Probe Sta
94. de 3 To automatically adjust the color to match that of selected dies on the original wafer map click on the radio button corresponding to the selected parameter under the Color Source option in the Wafer Map Test Analysis Waler Map Test Analysis x Enable Parameter Bin Ranges Lower Limit Upper Limit Color Source r nasem owes 1200e814 JE i r r mara z penon Ta E ee C mo T3 Finchm El 0 0000 50 0000 z 5 fe Eoo E ln ms posu uou C m None a nal T EE C Set Fail Color Sel Pass Ex C Fail Color Pass olor Figure 108 Original color source selected for T3 see figure 109 4 Click the OK button and the colors chosen in the original parameters of the wafer map document will be re applied to the selected or passed dies on the Wafer Map Wafer Maps 129 Water Map Test200_wid BE E Fie Mode Wafer View D eM ereQAQPE7O008 Parameter Test Analysis Subsite Hone Teste00 wid Default Water Map Pass Color Param T3 Rn ohm Desc Rn Resistance Recticle Size irum Die x 145850 Recticle Size ium Die Y 14550 Water Diameter imm 200 Die Marked For Test 114 Minimum Value 4 29 Maximum Value 24 66 Mean 14 47 standard Dey 6 499 Variance 42 24 Passed Die 41 35 965 Failed Die 73 64 04 Testz wrfd Default Water Map Pass Color Param T3 Rn ohm Desc Rn Resistance Recticle Size fum Die x 14850 Recticle Size
95. dem cable ERS SP72 A 9 pin to 9 pin straight through cable 3 Set up the thermal controller for RS 232 communications using a baud rate of 9600 Refer to Temptronics documentation for setting the baud rate of your thermal controller NOTE ET When using the ERS Thermal Chuck the controller must have PROTOCOL mode turned OFF from the front panel Please refer to the ERS Thermal Chuck documentation for procedures on how to turn PROTOCOL mode OFF 4 Highlight the Engine Serial Port component in Hardware Configurator and click the Setup button in the main toolbar In the Port combo box select the COM port that is connected to the RS 232 cable COM 1 is selected in the example in figure 120 Verify that all other settings are as shown Click OK to close the dialog NOTE ET On Titan TP03500 systems the Handshake setting must be XON XOFF and not RTS CTS On ERS SP72 systems the Handshake setting must be NONE and not RTS CTS Thermal Control 149 Serial Port Configuration E X M ame Serial Part Thermal Connection Part comi v Handshake ATS CTS Baud Fate S600 Data Bits A a8 Parity NONE Stop Bits I 7 Set Back to Defaults Cancel Figure 120 Serial port configuration dialog box 5 Highlight the thermal chuck component that was added in step 1 and press the Setup button on the main toolbar of Hardware Configurator In the Communications Object combo box select the
96. e Auto Microscope Light Switching check box is enabled and turns the light off for probing REMOTE MOVEMENT COMMANDS WITH NUCLEUS VISION The following remote commands will use Nucleus Vision when Vision is activated move probeplan absolute die move probeplan absolute index move probeplan absolute location move probeplan absolute subsite move probeplan first die Nucleus Vision 187 move probeplan first subsite move probeplan last die move probeplan last subsite move probeplan next die move probeplan next site move probeplan next subsite move probeplan prior die move probeplan prior site move probeplan prior subsite move probeplan relative die move probeplan relative index See the Nucleus 2 6 Communications Guide PN 129 164 tor a complete description of these and other commands Also see Sending Remote Commands on page 66 188 Nucleus 2 7 User s Guide APPEND IA Hardware Configurator System Configurations System Contig Components are located in the Hardware Configurator and define the basic operation of the probe station The components are configured at one time and then saved in the default cfg file then loaded up and started each time Nucleus runs Various users can have very different configurations so it is important to understand what type of setup is required NOTE Most users will not need to modify the configuration after the system is installed Usually it is only neces
97. e This includes all mark die and parameter markings on the wafer The mode of the Wafer Map window is the same as the zoomed wafer For example when you are in Select Test Die mode the zoomed window is also in that mode Mode selection is done in the Wafer Map window Test die can be selected in the Wafer Map window or the zoom window and all changes will be reflected in each window When the zoom Wafer Map window is visible the Zoom In Out buttons in the main window are disabled The bounding rectangle seen in the Wafer Map window tracks along with the current region seen in the zoom window When the zoomed window is scrolled the bounding box moves along with the area being viewed Tool tips work the same way as they do in the Wafer Map window Tool tip display selection is done through the Wafer Map window Double clicking on a die in the zoomed window will move the stage to that die location ZOOM MODE Nucleus supports Select Test Die Select Reference Die Remove Die and Water Zoom modes A single click and dragging have different effects in each of these modes In the Zoom Mode a single click will move the zoomed area to the mouse X Y location Dragging the mouse will specify the size of the zoom area Wafer Maps 113 Zoom window foolbar Figure 93 shows the main toolbar of the Wafer Map zoom window Figure 93 Zoom window toolbar Table 2 Zoom tools ZOOM n Will zoom ouf on the zoomed amp Waf
98. e a test is completed and a red light appears a tolerance has been exceeded however the station may still be functional Verifying the Station 169 Cascade Microtech Imc Wentication JI mm Yeh Swiches Solenoids gt Stage Motion Verilicalion 1 Suabches 5 ono Venficalion M Axis Z Axis Theta Axis Pass Fail Accelkration um zec sac Vacuum gt theta mikdeg sec cec Ewpected 200000 200000 20000 Plus opem Hos Actual pua 187375 187375 187437 150000 Microscope Light 5 In Tolerance Out of Tolerance 105 a a Accessory Outlet 3 Velocile um ze Expected zo000 pnac ESTEE ug theta mid deg sec DEAL 20175 sra Eve Le In Tolerance Out of Tolerance 10 3 AN Distance Behween Limt Switches hmi Expected gt 301000 301000 gt 10000 TED theta mil degree Actual 30665 11304 15510 erifies that joysick is communicating Values displayed are un calibrated In Tolerance Dut of Tolerance gt Dist Bshween Fos Limit and Home Pulse um Expected 150500 150500 Achal 1519936 150010 JoyStick Vesficaban JoyStick 5 Pasion jo JoyStick Y Poston 1 Bulani m Bulton 2 mj Stop Venheslion In Tolerance Out of Tolerance j 23 34 11 33 Actual 154833 152483 Dist Bshaeen Meg Limit and Home Pulse un Expected F 150500 750500 In Tolerance Out of Tolerance Motion Controller I caa wer 3 27 4E Verify Stage Control
99. e chosen by you A vertical index has been selected in figure 82 Wafer Map Test200_wd Bx File Mode Wafer View jn ed ereaagarPHr eeee Parameter T3 Arn ahm Subsite Hone 4 Testz wEd Default Water Map Param Name T3 En ohn Desc Rn Resistance Recticle 5ize un Die x 14850 Recticle 5ize iun Die Y 14550 Water Diameter nm 200 Die Marked For Test ll4 Minimum Value 0 03 Maximum Value 49 96 Mean 26 69 Standard Dew 15 44 VWaciance gt 8306 5 Ready Curent Y m Figure 82 Bin range 0 000e 000 1 000e 001 2 000e4 001 3 000e 001 4 000e 001 5 000e 001 In addition by selecting between the Display Exponent radio buttons the limit values can display the exponent at all times or only when the exponent changes from one value to the next Customizing the Wafer Map Toolbar The contents of the Wafer Map toolbar can be customized to meet your needs 1 Open the Customize dialog from the View menu in the Wafer Map 2 Click Start Edit to start the customize process Buttons can now be dragged off the toolbar to remove them or dragged from the Customize window onto the toolbar to insert them 3 Click Stop Editing to terminate the customize process LI jj x Create a new wafer map Mew wafer Dot i KT OQ gm BS Pits E L L E Reset Start Edit Get Path Figure 83 Custom wafer map toolbar selections Wafer Maps 101 COMMANDS
100. e list and the subsite display Tools Set Grid Size Grid size defines the size in microns of the area that a subsite will cover This also effects the size of the grid when in grid mode View Toggle Grid The Toggle Grid command enables disables a grid of lines on the subsite display Tools Renumber Subsites The Renumber Subsites button changes the number assigned to each subsite in the list The index value is changed to ascending order through the list The order of the subsites in the list is not changed when they are renumbered Tools Load from File Load from File reads in a comma delimited text file Each line of the file is one entry in the list The format of each line is as follows X value Y value Label The label is optional If it is not included then the label will default to Label n where n is the entry number in the list The check box enable for each item read in from the file will default to enabled Wafer Maps 109 Setting up subsite offsets By default the location of the Reference subsite within a die is at the center as shown in Figure 88 All offsets are in relation to the Reference subsite with X positive to the right and Y positive up lt gt Water Map Subsite Subsites Mode Toole View FBADAARIRA OD Label 0 RO 0o Label 1 1 15000 SSS Lann Figure 88 Wafer Map Subsite default location In this example the die size of X is 30 000 microns and Y is 20 000 m
101. e selected units microns mm mils or inches The rectangle will be displayed until the left mouse button is clicked over the Video window or the control mode is changed 32 Nucleus 2 7 User s Guide inl x 3 Nucleus Integrated ideo Size Mode PETEA nnnx nnnx nnnx nnn nnnx Setup Capture Figure 27 Measuring Tape mode NOTE ET The Integrated Video window must be calibrated for this mode to work correctly See the Objective Setting s dialog figu allows you to give the button an ID name maximum of four characters which becomes the button s text The tooltip associated with this button also is programmable maximum of 256 characters on page 39 Also if you change the objective setting you will have to remeasure the distance Vision mode This optional mode is a separate purchase and is only available when used with the Imagenation frame grabber and National Instruments pattern recognition software See and iS Dag Preparations 33 Nucleus Integrated Video Figure 28 Vision mode Objective lens buttons There are five programmable buttons that associate ID and calibration ratios with a given objective lens or zoom setting Right clicking the mouse over one of the objective lens buttons will display a menu giving you the option to change parameter settings or to calibrate the Video window for a specific lens or zoom setting If the A Zoom microscope and digit
102. e that a new label was created with the coordinates already defined for a new subsite beneath the crosshairs x Wafer Map Subsite Subsites Mode Tools wiew Label First 0 Label Third 3180 247 3180 3150 ety 3150 80 Nucleus 2 7 User s Guide Procedure 1 Move to another location on the die see window above 2 Select the menu item Subsites Load Current Position or click ix on the toolbar gt Wafer Map Subsite E X Subsites Mode Tools View 3191 24 3180 Using Additional Wafer Map Features z v Nucleus has an abundance of features The following are some of the key features within the Wafer Map tool ZOOM WAFER MAP The Wafer Map Zoom window makes it possible to see the overall wafer in the main map window and concurrently in a zoomed view window Reference Wafer Map Zoom Window on page 112 WAFER MAP TEST ANALYSIS In some cases it may be more effective to sort dies into just two categories rather than into an assortment of bins The Wafer Map Test Analysis tool allows you to view wafer map data with results arranged into two groups those that pass criteria for a group of selected parameters and those that fail one or more criteria Reference Water Map Test Analysis on page 121 Motion Control Exercises Aux 1 MOVING TO AN AUXILIARY CHUCK Our chuck is the primary surface zone for which we do our work However many users also use the Auxi
103. e the alignment motion begins e Enter Fixed distance The value shown in the Edit window will be used as the distance of travel in x Tools 139 140 Nucleus 2 7 User s Guide CHA PTE R 5 Remote Window Introduction Bi The Remote window is used for monitoring communication progress with a at separate test application The window can be used for debugging IEEE separate computer DDE same computer communications or RS 232 serial communications Tutorial Sending Remote Commands on page 66 The window is accessed from the main menu Tools Remote Window Remote Window The Remote window is a resizeable edit window that scrolls commands errors and responses depending on the current settings you have selected The types of commands that are displayed are from the SCPI Meta and GPIB command sets Remote Window g X Send Direct Pane GPIB Status Pane ww Status Talker 7 Listener Response On SSeS ule aspe ONL DNE ERR LIE I ETE EE EE SEE CME EXE QYE OPC RSD oao g0 0 0 ud D g E o 8 0 G GB B oo a bisplay Register Pane f setmaode summit sebusedeviceid off COMPLETE Figure 114 Remote window with all settings enabled Remote Window 141 SETUP BUTTON Clicking the Setup button displays the following Remote Setup window See Remote Setup on page 143 xi Display SCFI GPIB Meta
104. ence die to the current position Move wafer to align probes Set reference die Ea current poskion bors eS KT Qo 23 P ud i E Mo usur None Subsite None Curent Y EA Tutorials 61 5 Move around a little in Scan mode Med to Low speed to find the pads and align them to the Reference die you can also use the joystick Motion Control A check in the mode check box enables joystick operation for the mode The Enable Joystick check box must be enabled for any joystick moves ST scan speed f 00 000 mmel sec 62 Nucleus 2 7 User s Guide 6 Carefully lower the platen to bring the probes near contact sometimes it s necessary to use Scan Z mode figure 60 on page 66 to arrive at the correct height z Motion Control 7 Move the microscope manually to view all probes and pads for correct alignment 8 Select Ls to display the Align dialog box You can also access this tool from the menu Wafer Set Reference 9 Select Skip move in the Align query dialog and click OK you don t want to go back to the calculated position Set Heterence Die C Move to stored position C Move to calculated position Tutorials 63 10 You have already Moved wafer to align probes so click Yes to set the Reference die to the final position P Move wafer to align probes Set reference die to current postion x NOTE Move Options Move to ca
105. ents are required in the Hardware Configurator Abstract Microscope and Engine ECX Microscope To control a virtual microscope replace the Engine ECX Microscope component with the Engine Virtual Microscope Programmable micropositioners channel To control micropositioners two components are required in the Hardware Configurator Abstract Positioners and Engine ECX Positioners To control virtual positioners replace the Engine ECX Positioners component with the Engine Virtual Positioners component The following is an example of the component list with a Positioners only Setup The connection type is a serial port Ernie 5 erial Fort Runing Engine E CX Driver Running Engine EG Positioners A unning bstrack Positioners Running Testing the Setup Once the system has been started and all the components are running you can choose to test various components by using the test button on the toolbar TEST ECX DRIVER To test the ECX Driver component highlight the component in the Hardware Configurator and click the Test button This dialog can be used to send AUCS commands directly to the ECX Box Responses appear on the left hand side of the dialog Any string can be sent to the ECX Box by entering a string in the Command String edit box Test ECS Boxes Ea Responses Command String HP 2 0 0000 0 6771 4 0 0000 RR MP 2f HP 2 r 1 0000 Send lig bor 2
106. er Map window This button is disabled when you are in Reticle mode Zoom In Will Zoom in on the zoomed eu Wafer Map window This button is disabled when you are in Reticle mode Reticle Mode Turns on off Reticle mode Please refer to the section on Reticle mode Reticle Setup Only enabled when in Reticle mode Opens up the Reticle setup dialog Please refer to Reticle Mode on page 114 Apply Pattern When in Reticle mode an EE Apply Pattern button is enabled on the toolbar This button will take the currently defined test pattern in The zoomed wafer window and apply across the whole wafer Auto Track Crosshair When this is selected the wafer zoom window snaps into position when the crosshairs move beyond the zoomed view When this mode is de selected the zoom window does nof snap to the location of the crosshairs The default state is enabled RETICLE MODE The Wafer Map zoom window can be put into a Reticle mode which changes the basic properties of the zoom window The button on the zoomed Wafer Map window is used to toggle Reticle mode When in Reticle mode the zoomed wafer shows a certain number of rows and columns defined as a reticle The zoom 114 Nucleus 2 7 User s Guide in and zoom out buttons are disabled in this mode The aspect ratio of the wafer zoom window is fixed to show the number of rows columns that are defined as the reticle The window can still be sized but will remain at a fixed as
107. erence Die will position the stage so that the Reference die on the wafer corresponds to the Reference die shown in the wafer map Set Heference Die C Move to stored position C Move to calculated position View Zoom Out Select to increase the view of the image View Zoom In Select to decrease the view of the image Scroll bars will appear if the graphical display is too large for the current window Wafer Orientation Select a wafer style flat or notch and set the rotation angle The primary flat length is only used for display purposes Flat primary Flat length mm onentation clockwise 1 bottom C Notch notch diameter mm f T onentation clockwise n hotam Cancel Wafer Maps 103 Wafer Size Enter the wafer diameter the quality area diameter the x and y die size and the x and y street size of your wafer Wafer Map ES E x Description Wafer Map 0000000 Wafer Diameter mm 00 Quality Area Diameter 130 Recticle Size micron Die X 20000 Street X 5000 Die Y 20000 Street r 5000 Cencel Street size is used only for displaying the wafer map Die size is the total distance from one row or column to the next including street size E Wafer Coordinates You can specify map coordinates For example you may exchange the axes of x and y and redefine their positive and negative directions K Water Map E Reference Die ha
108. erface UI and with commands from a remote host See the Nucleus 2 6 Communications Guide PN 129 164 for a list of available SCPI commands and Motion Channels The use of Motion Channels require the following e EC X 56 Expansion Box e Programmable micropositioners M91 e Motorized microscope Introduction There are two ways to set up Motion Channels e With the System Configurator see Hardware Configurator on page 189 e Without the System Configurator described below System Setup Without Configurator STEP 1 CHOOSE THE COMMUNICATIONS TYPE RS 232 OR GPIB To communicate with the ECX 56 Box a connection must be made between the box and the computer that is running the Hardware Configurator The connection can be done through a serial or GPIB connection and up to two ECX boxes can be used Each ECX Box must have its own connection Communication with the ECX Box must be set up though the Engine ECX Driver component in the Hardware Configurator a NOTE If the GPIB bus is used to communicate with the ECX Box it is not possible to simultaneouly receive remote commands through the GPIB from a remote host Motion Channels 171 RS 232 4 1 Make a serial port connection by clicking 844 from the Hardware Configurator toolbar to display the Add Component dialog shown in fig 123 2 Click the Engine Serial Port component Add Component E X Engine Virtual Positioners r Engine 12K Sensors Solenoids
109. es that are not active will be ignored x NOTE Maximum subsites supported 255 SUBSITE WINDOW The Subsite window displays the locations and labels for subsites The subsite view can be opened from the Wafer Map window by selecting Wafer Sub Die Tutorial Creating Wafer Map Subsites on page 75 Wafer Maps 105 gt Wafer Map Subsite x Subsites Mode Tool View JFBANAARRRE Label index x Ortset Y Oiset Ro g n Label 0 Ready E Figure 85 Wafer Map Subsite window Square elements on the subsite display represent the subsites with colors as follows e Yellow reference location e Blue currently selected subsite e Green subsite that is enabled e Grey subsite that is disabled Locations on the subsite display are only for visual representation They do not necessarily show the exact scale x Wafer Map Subsite X Subsites Mode Tools wiew ERANA Label Index x Offset Y Offset W Label n RO m se M Label 1 1 0500 10000 aca Label 2 2 12709 9644 SE Se Site Si BEBE Bite ss CE ee eS E ee E Es Ee ee Ee ee OE Ee ERR ERR RR ERR ERR Cs Sad i ea d EE ss EHE E ERR E ERR EE ERR ELE EE Et ERR EE a eS ee Ready A Figure 86 Subsites with grid activated When in edit mode the list shows the fields for each subsite and the currently selected subsite is highlighted 106 Nucleus 2 7 User s Guide e The first item in the list i
110. ete baba b n Deb v edat b Ea Fabr tin fed Eas 75 vhe pn ENT PC H fis POGO UDE enaA 79 ii Nucleus 2 7 User s Guide ataga iis a MM E 7 Be a e T ai Me OEE olor suerepisionereeioienseiaen 78 kei atus sy sci Mr 78 TO change TNE reference subsite oo cece etree errr ener EEE rttr tearr nennen SEES 78 ERE meen m 9 To move to the currently selected subsite sseee meme 9 heise ogak Va 91 1 RETI T Oo aon ease TT 80 lo afereberefi ies lenMM RTT UNT ENEE niia 80 umg AdcMmond wala Map FoU onem ndbowibu tei a Deb vida vob vin ETE 8 Py eee FEA denetseroiecn A resort eubcedaaeasreliauensieieretiereie rien EEEE 8 rh a errant TT Ut 8 Pa ie c TIE A E ET 8 ye i eiAderr o apt EE 8 Ve i 491 1 MT rrr 82 ea melle UMEN NR NUT UTE 83 Sejenak eet TT TT CMT 84 a A E E ean ate HR 84 WE DEM A Imm 84 ee a NEN T I m SM 85 Eenelter slion MMC 87 vVillaan gspa eee A TU UTR 89 PU mmm 89 Chapter 3 Wafer Maps 91 lays ot ene Mr M rre 9 Water Map WINGOW iessebeesixeiersteter er per ErPERE FEE FR HEY rta F EFE EYYEE ET cosaneusd Ero pCH FE Urb don caa 92 00s 0 8 d 2s uie Po TET 96 lec EU aiat 1M TETTE 96 ie aa Tm RI I 97 Bolo ei g o fo g cs eeerer even errr tee ter errr eter Vereeeren ty eeret VW rret ers Fey fever ene re errr entrenert te Serre verter tty tr 98 Pr 1 a mM 100 CAlUsiomidnc ihe Wafer Mab TOC
111. f the Toolbar to remove them or dragged from the Customize window onto the Toolbar to insert them 3 Click Stop Editing to terminate the customize process The Reset button changes the Toolbar to the default contents Note that two buttons on this Toolbar have special attributes WinCal and VNA Tools See figure 3 4 Nucleus 2 7 User s Guide SPECIAL BUTTONS STORING THE PATH When Nucleus is run for the first time you must assign paths to the following buttons e WinCal e VNA Tools In the following Customize toolbar dialog the WinCal icon is selected but it does not have a path to its executable as displayed by the text in the upper left of the window Save the curent user settings Save User Settings Figure 3 Path to WinCal not set The Set Path button on the Customize toolbar is used for this purpose See figure 3 Click on one of these buttons a white perimeter surrounds the selected button and then click on the Set Path button This provides a typical Windows directory path for selecting the executable EXE See figure 4 on page 5 Select executable Open WinCal Bp 2 x Look in 23 WinCal 3 1 DEMO rr E3 dacument IwCEXT EXE Bee WIMCAL EXE File name Files of type Executable Files exe Cancel Open as read only Figure 4 Select path to application When you start Nucleus for the first time and then click the button on the Nucleus Too
112. fset in microns zi NOTE Current and Base Offsets After stepping around the die the advanced user may want to check the aligment offsets When the image was first trained in the basic setup a distance offset from the lower left corner of the Reference Die to the train area on the Reference Die was calculated This offset is referred to as the Base Alignment Offset Upon moving to a new die you may calculate the Current Alignment Offset for that die The Current Alignment Offset is the difference between the current offset of the Alignment Target and the Base Alignment Offset The Current Alignment Offset may be calculated by clicking the Calculate Current Alignment Offset button in the Nucleus Vision window With Nucleus Vision active and the Current Alignment Offset set up each subsequent move listed will be offset by the Current Alignment Offset e Current Alignment Offset Y edit box read only Vertical Current Alignment Offset in microns See Note above e Calculate Current Alignment Offset button Calculate the Current Alignment Offset for the current die See Note above e Auto Microscope Light Switching check box Enable disable auto microscope switching feature e Delay Time Before pattern req search occurs ms This works when the Auto Microscope Light Switching check box is enabled and turns the light on for pattern recognition e Delay Time After pattern req search occurs ms This works when th
113. ft corner of the Reference Die to the train area on the Reference Die The chuck is the part of a probe station on which you place your DUT The chuck moves vertically to make or break contact between the probes and the DUT A command interface is a Cascade Microtech programmatic interface that allows you to send probe station control commands directly to the hardware drivers The Current Alignment Offset is the difference between the current offset of the Alignment Target and the Base Alignment Offset The Dynamic Data Exchange DDE is a messaging system built into Windows that allows applications running in different windows to communicate with each other The Device Under Test DUT is the wafer module contact substrate or ISS that you are probing When executing a probe plan dwell is the time that the probe station pauses at each test site before moving onto the next site If a test program has been selected the dwell time begins when the test program execution is complete The mechanical device at the end of the robot arm used to pick and place the wafer Specifies the path and filename of the probe plan file File and path names follow the MS DOS naming conventions In general probe plan files have a wfd extension File paths begin at the current directory For example if the current directory is C CASCADE the complete path for a file TEST_01 wfd in a subdirectory called MYTEST is C CASCADE MYTEST TEST_01 wfd The
114. g to the A Zoom digital control Select the communications object that was setup in the previous step from options in the combo box 198 Nucleus 2 7 User s Guide MicroChamber Interlock Switch STATION SETUP AND TEST 1 Highlight Abstract Station component in the Hardware Configurator and click Test Station Setup and Test Station Model Number lt Model H Station Seral Number lt Serial H Default Contact Height i agg MicrolhamberfWater Access Door Option warm amp Stop Stage X Figure 151 Station Setup and Test dialog 2 Enter station information and Door Option choice see Options below and click OK MicroChamber Interlock Options This setting controls the actions of the stage when the load door of the station is opened Possible values include e None the interlock switch has no effect e Warn when the load door is open a warning message will be displayed but the stage will still be able to move as normal Warn and Stop Stage when the load door is Open a warning message will be displayed and the stage will not be allowed to move If the door opens during a move the move will be interrupted and an error will be generated HicroChamber Door Interlock MicroChamber door is open Hardware Configurator 199 MicroChamber Interlock Option cont ET A NOTE Alessi 6100 series stations do not have a MicroChamber interlock CAUTION Older stat
115. gine Joystick Hardware Configurator 195 e Interpreter GPIB commands e Interpreter Metacommands e Interpreter SUMMIT e Communications DDE Server e Abstract Joystick e Abstract Die Motion e Abstract Motion e Abstract Station e Abstract Wafer Alignment Manual e Abstract Wafer Map Component setup for virtual stage Engine Virtual Stage e Engine Virtual Light Control Engine Virtual Sensors Solenoids e Interpreter GPIB commands e Interpreter Metacommands e Interpreter SUMMIT e Communications DDE Server e Abstract Die Motion e Abstract Motion e Abstract Station e Abstract Wafer Alignment Manual e Abstract Wafer Map The components listed above define the basic setup that has to be present to run the Hardware Configurator on the various different types of hardware Any other components can vary depending on the type of hardware options being used EDGE SENSE One component is needed to operate Edge Sense e Abstract Edge Sense Once this component has been added to the Hardware Configurator and saved as part of the default cfg then the next time Nucleus is started the Edge Sense tab of the parameters dialog will be enabled The icon for the Edge Sense component must be added from the Customize Toolbar option in Nucleus This icon will allow you to turn Edge Sense on or off 196 Nucleus 2 7 User s Guide COMMUNICATIONS Communication to the Hardware Configurator can occur via the GPIB
116. he state of a function e g up or down which you can change with the click of a button Table 1 Toolbar buttons Button Description 2 Chuck is Down separated Clicking the button will cause the chuck to move to Contact Chuck is in between Contact and Separate Clicking the button will cause the chuck to move to Separate Chuck is Up contact Clicking the button will cause the chuck to move fto Separate Vacuum is On Clicking the button will turn the vacuum off Alessi 6100 stations do not have a vacuum control button 2E WI d Vacuum is Off Clicking the button will turn the vacuum on Alessi 6100 stations do not have a vacuum control button mug 6 Nucleus 2 7 User s Guide Table 1 Toolbar buttons Button Description Lamp is Off Clicking the button will turn the lamp on Alessi 6100 stations do not have a light control button Lamp is On Clicking the button will turn the lamp off Alessi 6100 stations do not have a light control button When using an A Zoom with RS 232 communications this button controls the illumination through the digital A Zoom It does not control the microscope outlet on the back of the station Toggle the Motion Control window Toggle the Position Status window Toggle the Theta Alignment window HARD Il Toggle the Software Alignment window SOFT mr Toggle the COM interface to remotely communicate with another
117. hermal Control on page 145 for information on setting up a thermal chuck in the Hardware Configurator A ZOOM DIGITAL CONTROL Two components are required in the Hardware Configurator to operate the A Zoom digital control e Engine Serial Port communications port used for the digital control e Engine A Zoom control actual component needed to run the control Hardware Configurator 197 Engine serial port setup 1 After adding the Engine Serial Port component press the Setup button to open the window shown in figure 149 Serial Port Configuration E E X Mame Engine 5 eral Port Port COM 1 Handshake gt ON OFF Baud Rate gent Data Bits 8 Parity NONE Stop Bits v i Set Bari D etaull Cancel mhi mir hm EL Bathe ILI L Figure 149 Serial port Configuration window 2 Configure the settings as shown in figure 149 If you are using a COM port other then COM 1 use the drop down combo box to select a different port 3 Press OK to close the dialog A Zoom control setup 1 After adding the Engine A Zoom Control component press the Setup button to open the window shown in figure 150 Select the commurscabons component Serial Port Object Enaine Serial Port Cancel Figure 150 A Zoom Setup window 2 The Serial Port Object combo box contains the communications component that will be used for accessin
118. icrons With the Reference subsite in the center of the die the only values that are valid for X are 15 000 to 15 000 And the only values valid for Y are 10 000 to 10 000 In this example an entry of 20 000 for X is out of range because this value will place the subsite off of the die When a subsite offset value will put the subsite off of the die the following error message will be shown Subsites Subsite offset value of 20000 Is out of range Figure 89 Subsites error message To enter different ranges for X and Y the Reference subsite must be shifted within the die to better match the actual location of the reference within the die x NOTE The subsite Reference Origin RO in the Index column see figure 88 and the actual Reference site should be close so that error messages such as Target must be on Heference Die are not generated 110 Nucleus 2 7 User s Guide Switch to the reference placement mode by clicking on the yellow arrow icon Then click anywhere within the die to move the reference location to that spot gt Wafer Map Subsite Subsites Mode Toole View 8E 3 Q D amp amp k N A 2 Label RD 0 0 25000 18000 Figure 90 Relocated Reference site In the prior example the reference site has been moved to the lower left hand corner Now larger values than 15 000 may be entered for X and larger values than 10 000 may be entered for Y An offset value of 25 000 is no
119. il stage movement follows the street 58 e Nucleus 2 7 User s Guide E E oj xi A i Nucleus Integrated Video Nucleus Integrated Video EN ini xi _ Size Mode Movement nnnx nnnx nnnx nnnx nnnx Setup Contac _ Size Mode Movement nnnx nnnx nnnx nnnx nnnx Setup Capture 0 ie rye ins j PA TET Wm i M n E Figure 57 Wafer view alignment from left to right theta correct Chuck User Chuck User Bs274 eoo x 83008 63008 Y fasa pa a o o ze p o zp D Microns Set zero Microns Set zero Figure 58 Status window theta correct left to right 8 Click Stop Align in the Hard Align dialog to finish the alignment Tutorials 59 ALIGNING PROBES TO PAD t With theta alignment correctly set proceed to aligning the probes to the pads Procedure 1 Raise the platen s handle e Figure 59 Platen handle on Summit probe station 2 Select o You can also access this tool from the Wafer Map menu Wafer Set Reference x Wafer Map Untitled File Mode Wafer View Dae OT eQQPw ea Paranete None Subate None Ready Current Y E 60 Nucleus 2 7 User s Guide 3 Click in the general area where you want the Reference die to be x Wafer Map Untitled E El xj File Mode wafer View Dg Pert eQ a PS Parameter None od Subsite None l I j Current In 6 ve 4 Click Yes to set the refer
120. ill stay in the separate location down Unchecked If the chuck was up before a move is made it will move back up after the move is finished 12 Nucleus 2 7 User s Guide Partial platen There are two separate optical switches on the lever arm that raise the platen full up or full down If the top switch is activated but not the bottom then the platen is considered to be at partial platen Partial Platen only applies to Summit 12 000 and S300 stations e The lowest position means the platen is all the way down and the probes are at contact when the chuck is in the contact position The chuck will move down before an x y move starts e The highest position means the platen is all the way up and the probes are cleared from the path of the stage X y moves can occur without first lowering the chuck if the platen arm is raised to this height e The middle position is the partial platen switch If Partial Platen is checked then the stage can move in x y without first lowering the chuck when the platen arm is raised above the partial platen switch If this is not checked then the platen must be raised completely to allow an x y move without first lowering the chuck TEMPERATURE COMPENSATION x Move Parameters Z Axis Compensation Inker Contact Made Temperature Compensation Fired Compensation Ambient 1 0 Coefficient of Expansion PFM C 312 30 Ba s 53 Cancel Apply Figure 7
121. ing Set to Current will save the offsets from the reference point to the current subsite location z Wafer Map Subsite i x Subsites Mode Tools View BE 39 Qi C1 Y kh oO Label RO v Label 1 1 O 15000 10000 2 27 emm 7144 Figure 87 Subsites without grid activated Wafer Maps 107 Customizing the subsite window x Load the current position as a subsite Load Position Ox OO Kk RODE UH oS Set Path Reset StattEdit The contents of the subsite toolbar can be customized to meet your requirements 1 Open the Customize dialog from the View menu in the Subsite window 2 Click Start Edit to start the customize process Buttons can now be dragged off the toolbar to remove them or dragged from the Customize window onto the Subsite window toolbar to insert them 3 Click Stop Editing to terminate the customize process Subsites Set to current This button loads the current x y stage position into the currently selected subsite entry The values are offsets from the reference position Subsites Move To m x This button moves the stage to the location of the currently selected subsite on the current die If a wafer has not been loaded and aligned then this button is inactive Subsites Add Subsite using Position Adds a subsite to the list using the current stage position Subsites New O 2 Adds an entry to the bottom of the list of subsites Default val
122. ing of MC 204 Nucleus 2 7 User s Guide MF when a move is complete Please refer to the Nucleus Programming Guide for a complete description of the EG command SM Send Command to Probes Enter a Command String SM15H11 H18BBHBBOBHE Figure 156 Send Command to Prober window ID SOURCE FOR LOT AND WAFER Nucleus does not support the usage of IDs for lot and wafers MOSAID must be set into USER mode which will prompt you for new IDs for the wafer and lots Add these lines to the PSF file e define ID SOURCE LOT USER e define ID SOURCE WAFER USER Refer to Example PSF on page 206 for a sample PSF file This file is also in the distribution under the NucleusData folder CHANGING OF WAFERS The stations that Nucleus controls are semiautomatic Summit 12000 series S300 series and Alessi 6100 series probe stations These stations do not automatically load wafers e When MOSAID sends the EG command HW to handle wafers Nucleus will present the dialog shown in figure 157 e After the wafer has been loaded and aligned press the OK button and MOSAID will continue to process the wafer e Press Cancel to stop MOSAID from processing wafers Manual Wafer Handling x Please manuall load and align the next wafer Fress Ok Co start tester Cancel Figure 157 Manual Wafer Handling window Listed below is the Cascade Example PSF which was generated by taking the basic MOSAID example PSF and
123. ion you will not see the 2 Point Align tab See Chapter 4 Tools for a description of the alignment methods Hard Align is the preferred method of aligning on Summit series stations 56 Nucleus 2 7 User s Guide Distance 2 Peint Align Soft Align Hard Align Start at center Scan velocity Scan method Continual wait at end Scan distance C Define with Joystick Enter fixed distance fi OO000 Microns Start Align Stop Align Figure 54 Hard Align tab Procedure Close pem 1 From the Toolbar click P FP You can also access this tool from the menu Tools Hardware Align 2 Set the Scan Method to Wait at end Use the default settings for the remaining sections 3 Verify that your video camera is focused on the wafer and that you are over a street Tutorials 57 Figure 55 Wafer view over a Street 4 Click Start Align and watch your monitor The wafer moves to the left edge of the wafer It s likely that this move was not parallel to the street If this is 5 Make sure that you are still over a street and click Start Align This time adjust the theta knob on the stage while moving left across the wafer When motion stops continue to make any adjustments in theta as needed to bring the street parallel to the chuck 6 Click Yes when you re satisfied with the alignment to the left 7 Repeat adjusting theta while going to the right unt
124. ion for the type of operating system you are using WiNDOWS NT 1 Open the Multimedia icon in the control panel and click the Devices tab Highlight the Joystick Devices Multimedia Properties El Ei Audio Video MIDI CDMusio Devices Multimedia devices i icu Video Capture Devices Jo stick Devices Click the Add button 2 Select the Unlisted or Update Driver option Add ed ES List of Drivers Inlisted nr Indated Cirver a du MET CO Audio C MCI Microsoft Video for Windows DUET MCI Midi Sequencer MCI Sound Cinepak Codec by Radius Inc Compag Business Audio Creative Labs Sound Blaster 4 Pro 16 Creative Sound Blaster 4ME 32 MIDI Synth Crystalare Audio Driver DSP Group TrueSpeech TM Audio CODEC Click the OK button 162 Nucleus 2 7 User s Guide 3 In the Install Driver dialog use the Browse button to find the following directory C Program Files Cascade Nucleus SupportFiles Drivers Analog Joystick Install Driver Insert the disk with the unlisted updated pa or vendaor pravided driver in Cancel C AProgram Files Cascade Nucleus Browse Help If Nucleus was installed to another directory you ll find the Analog Joystick folder where Nucleus was installed Click the OK button once a path to the folder has been located 4 Select the Joystick Driver L ancel Help Click OK to continue 5 At the Joys
125. ions except S300 may not have an interlock switch on the loading door If a switch is required contact the factory for an upgrade kit WARNING The interlock mechanism for the loading door is managed by the system software Every posible action has been taken to ensure that the stage will stop correctly Nevertheless there is still a chance that the stage will not stop immediately when the door is opened When reaching into the stage area use caution to avoid personal injury 200 Nucleus 2 7 User s Guide APPENDIX G MOSAID Auto Tester MOSAID Wafer Probe Utility MOSAID is a memory module tester which consists of a PC controller a base unit and a series of test headers This document assumes that you are familiar with the operation of MOSAID and understand how to create PSF files and Database files The MOSAID Wafer Probe Utility can be started from the menu item Tools Wafer Probe Nucleus supports the Auto Tester mode in MOSAID Auto Tester Mode To access Auto Tester mode use the menu item Wafer Probe Setup Mode Auto Tester This menu item will become available when the Wafer Probe Tool is turned on with Tools Wafer Probe Window Help Mode Manual Reports Auta Fraber ae ID Source a Suto esker f rearnitinde Driver p Lonhrmaliens fer Comme Figure 152 Wafer Probe Setup Mode Auto Tester menu item In this mode MOSAID has a wafer map which defines the stepping
126. is also available to use with other wafers of its type If you need to modify the Wafer Map after leaving the Wizard you can access each setup window independently of the Wizard See Commands on page 102 MOVING TO THE CENTER OF THE WAFER You re now ready to move the stage so that the wafer is centered under your video camera You will of course need the Video window for this procedure and for others that follow this section If the Video window is not on your toolbar see Customizing the Toolbar on page 4 to set it up AA Procedure 1 Using the wafer map that we created in the previous section click the Center Z A button in the Motion Control window the stage moves at full speed Tutorials 55 x Wafer Map Test200 whd E Ioj x x Motion Control File Mode Wafer View Iv Enable Joystick Mode sean M Y scan speed fi 00 000 mm sec Ready Current Kol Row Figure 53 Moving to wafer center ALIGNING THE WAFER With the wafer centered in your Video window you will now align it Alignment compensates for an out of theta street alignment that is created when the wafer is placed on the chuck Hard align Haro pe NOTE The following procedure is for use on Summit series stations The Tools dialog also shows a 2 Point Align which is the preferred method of alignment on S300 and R61 series stations motorized theta If you are performing this exercise on a Summit series stat
127. iver Options MOSAID Auto Tester 203 e Set up the dialog as shown in figure 155 The Nucleus prober will default to DEV28 Probe Diver Setup GPIB Configuration Local GPIB Board Name ETSI Prober GPIB Board Name DEV2B8 Reedy rte Timeout 3s Event Wait Timeout v Local Beard is ContrellerAIn Charge Event Logging Iv Show Driver Event Maniar Iv Verbose E vent List Log Driver Events to File Verbose Event Log E Caselle Conirol pee AEE PRE rre E r R r nr E Er khe Peoh v This Prober can process multiple Cassettes per Lot Number al Cassetles Per Lot i Number of Wales Per Cassete i 2 Stage Chuck Control I Probs raises 2 stage automatically at the first de on each wafer Probes raises Z stage automabeally at each subsequent de Probes lowers Z stage auiomaltically before moving in XY Figure 155 Probe Driver Setup window LOAD A PROBER SETUP FILE PSF e Choose Wafer Probe File Open and select the PSF file that you would like to use Refer to Example PSF on page 206 for an example PSF file For a complete description of PSF files please refer to MOSAID documentation LOAD A PROBER DRIVER Nucleus emulates the EG2000 pdl driver e Select Wafer Probe File Load Prober Driver and select EG2000 pdl TURN ON RESPONSES FROM THE PROBER In MOSAID e Select Wafer Probe Setup Driver Command Type the command 5M15M1101000000000 into the dialog box to enable the send
128. lbar the path that was last created is displayed Preparations 5 If an EXE path is currently set the value will be displayed on the dialog Along with the path to the EXE a tag will show that the setting is the default value Def the global value Glo or a user setting Usr 1 User Setting Usr The per user setting is stored with the User List window settings 2 Global Setting Glo The global setting applies to all users that do not have a user setting 3 Default Setting Def If neither the User or global settings have been set then Nucleus looks for the EXE using the default setting Custom usage If you want a unique path for a button that is different from other users of the system then the Set Path button on the Customize toolbar dialog can be used to set a new value for that specific user NOTE im EXE Upgrade If the system upgrades to a new version of WinCal or VNA Tools which was installed into another directory there are two options 1 You may individually change the path to the executable using the previously described Set Path procedure on the Customize dialog OR 2 If the old executable is deleted so that the path no longer exists then Nucleus will prompt you to browse to the new executable The new path will then be used for all users that don t have a custom path setup TOOLBAR BUTTONS The following are the available buttons for the Toolbar Note that some of these buttons indicate t
129. lculated position Check if you know the general area in which you will place your Reference die The stage will automatically move there You will then use the joystick or Motion Control window to precisely position your probes Skip move Check if you know or have already moved to the precise location in which you will place your Reference die Move to stored position Check if you have already set your Reference die and want to return to it 11 Now all you need to do is penetrate the pads CAUTION Ensure that youre at the Contact position before setting to current position in the next step or you may crash the probes 64 Nucleus 2 7 User s Guide amp a Setting contact position Procedure 1 Drive the probe tips into the wafer for a satisfactory scrub See figure 60 on page 66 for the controls to use The above graphic lower probe demonstrates a good scrub When you penetrate the wafer you ll need to leave the probe tips embedded before you set the current position in the next step 2 Set the current position in Z by right clicking on the contact button Figure 60 and clicking Set to Current Position cet To Current Position Open Parameters Tutorials 65 Optionally we could have moved the stage using the Move Z Towards Away Contact scroll buttons while watching our monitor figure 60 p Contact Move 7 Toward Contact A Move Z Away from Contact Y m 4
130. liary chucks to perform work In this section we ll move to the AUX 1 chuck Tutorials 81 To move fo the aux chuck 1 z NOTE Alessi 6100 series stations do not have Auxiliary Chucks This section applies to Summit 12000 and S300 series stations Since your station and setup will probably differ from ours you may choose to follow along with our procedure We introduced the Status window on page 29 The Status window Window Status Window allows you to monitor your moves across the wafer in relation to the stage Procedure 1 Activate the Motion Control and Status windows 2 Send the chuck to wafer center and then check the Status window for activity The Status window and the Wafer Map currently indicate that the chuck is centered Before Move in figure 66 on page 83 and is sitting at Z 845 3 Click AUX 1 in the Motion Control window to move to this auxiliary chuck Note that the chuck drops to a safe position Z 800 The new position is shown After Move in figure 66 82 Nucleus 2 7 User s Guide Wafer Map Untitled E m x File Mode wafer view v Enable Joystick Mode E Cran f T 16 mmrzec Ready Current Cal Row Before Move Chuck User Chuck User Auxillary chuck xo o O los282 Ios location ped viae e N 2845 64 z Boo po T 0 00000 Micrans T 0 00000 Microns Set Zero EE Set Zero 25 0 zu Before Move After Move Figure
131. lick on the OK button in the Wafer Map Test Analysis window to display the results on the wafer map In the example the Bin Range is 0 to 50 The lower and upper limits however are set at 0 and 1 respectively Dies that fall within this range will appear on the wafer map in the selected Pass Color while all remaining die will appear in the selected Fail Color Wafer Maps 123 gt Water Map Test200 wid Fle Mode Wafer Yew ln sh ereAaPrP 7O066 l Parameter Test Analysis Teat200 wEd Default Wafer Map Conbo Pass Fail Combo Pass Fail Subsite None Recticlc Size fun Dic xXx Recticle Size iun Die Y Wafer Diameter inm Die Marked For Test Minimum Value in Maximum value Mean Standard Dey Oo Variance Passed Die 4 Failed Die 110 Tesrz n wrd Default Wafer Map Comho Pass Fail Combo Pass Fail Recricle size jun Hecticle Size um Water Diameter imm Die Marked For Test Minimum Values Kaximun Value Mean O Standard Dey O Variance Passed Die 4 l Failed Die LO Ready Figure 102 Test results displayed in Wafer Map window 14550 14550 200 114 3 51 96 49 124 Nucleus 2 7 User s Guide Current X Y E 5 The lower and upper limits can be adjusted simply by highlighting the old value and typing in a new value Figure 103 Adjusted lower and upper limits 6 Clicking again on the OK button will readjust the dies in the wafer map t
132. lly 8 e Nucleus 2 7 User s Guide to display three stop signs You could also display just one stop sign and set it to any size The Stop window should normally be the top most window on the screen to allow a quick shutdown of the software Right clicking on the window and selecting the menu item will disable the top most attribute ls Topmost Window The Parameters Window INTRODUCTION The Parameters window contains system settings for Nucleus This window can be opened from the Toolbar or from the Parameters Move Parameters menu item This is where you can make general configurations to your system such as units of measurement speed in which the chuck will transport the wafer to under the probes etc If this is your first time in Nucleus you may want to change some of the basic settings at this time such as whether you ll use Metric or English units to measure your moves After you have made your changes to the Parameters Window you ll need to familiarize yourself with the Nucleus Motion Control Window on page 18 Preparations 9 MOVE PARAMETERS x Parameters X Move Parameters Z Asis Compensation Inker Contact Mode English Mils Ultra Showy Inch Decimal Places fo Chuck contact after initialize Vacuum Safety Reverse orientation Aux Pur fo aE Joystick Speed User Preference I Disable Joystick on Remote Enable Chuck Safety Prompting cancel o
133. lly calibrates the current objective of the Video window before training occurs e Target Image read only Displays the current target image that was previously trained using the Train Target button Using Nucleus Vision OVERVIEW The user begins by preparing the Vision environment by first selecting a microscope objective and a magnification level Next the Integrated Video window is calibrated with the AutoCal command Then several windows are opened which are required to run the Vision procedure One of these windows is the Water Map where you set up the wafer to be tested A course alignment is done to ensure that the target is in the field of view at the outer edges of the wafer Then from the Wafer Map window a probe to pad alignment is performed Once the Vision environment is set up you start the Vision tool Then the search for a good image is begun which is a small section of the wafer called the Alignment Target The Alignment Target an image should be present on all die be unique and be detailed enough to be easily distinguished by the pattern recognition software Once this target is located it is trained for use The user then trains the Alignment Target on the Reference Die Upon training a distance offset from the lower left corner of the Reference Die to the train area on the Reference Die is calculated You may now step accurately around the die Tutorial Vision on page 84 PREPARATIONS Step 1
134. mponent dialog 2 Highlight the Communications GPIB Generic Device Motion Channels 173 3 Click the Setup button Configure GPIB Device 1 X GPIB Address E oo System Manager Object Name GPIB to EC Figure 127 GPIB setup dialog The Configured GPIB Device can be used to set the GPIB address of the ECX box and the System Manager object name STEP 2 ADD THE ECX DRIVER To create a connection to the ECX Box the Engine ECX Driver component needs to be added to the Hardware Configurator Once added to the Hardware Configurator the component has to be setup with the type of connection that was chosen in Step 1 To configure the ECX Box select the Engine ECX Driver in the component list and click the Setup button on the toolbar The Port Name field contains all of the available connections that have been setup in the Hardware Configurator In this example the Engine Serial Port ECX that was setup in the previous step was used as the connection Configure ECX Driver 1 X ELX Box 1 W Enable Serial Port Name ECs Box 2 Enable p Gend f GPIB Port Name Figure 128 Configure ECX Driver dialog STEP 3 ADD THE MICROSCOPE POSITIONERS AND OR STAGE Stage channel To control a 6100 stage only one component is required in the Hardware Configurator Engine ECX Stage 174 Nucleus 2 7 User s Guide Microscope channel To control the microscope channel two compon
135. n return to this page and complete Step 3 Wafer Map Wizard Step 3 of 6 E Ix Die Size micron eT oe EE o die x 14850 0 street x 500 0 PN ou o TARATAR EIE a so qe a TEES ES WIE TEETESTEE ESTEE TESTES ES EET ERES Sonos Label Test200 Waker diameter 200 00 mm Quality area diameter 135 00 mm Back Cancel Figure 47 Wafer Map Wizard Step 3 The die reticle size displays the die size in microns Procedure 1 Enter the x and y die reticle size values into the die x and die y fields respectively 2 Enter the x and y street reticle size values into the x and y street fields respectively Er NOTE Total reticle size die street Now that the replica of the physical die is fairly accurate the next step will allow the removal of any die that doesn t match the physical wafer 3 Click Next to continue to the next step 50 Nucleus 2 7 User s Guide Calculating die size with The distance fool Distance 2 Point Align Soft Align Hard Align Instructions Move to a location on a die After moving click Start Pos Enter estimated row and column sizes The sizes will be used for computing the number af rows and columns traversed between points Distance X Microns Distance Y Microns Mum Columns Mum Rows Column Size estimate Row Size estimate Start Fos Abort Copy To Water Map Set Distance Eomp Close
136. n the Video window which includes the Preset buttons and the Setup button Preset buttons When you are using an A Zoom digital control the preset buttons in the Video window will store zoom and brightness values used for the digital control Each of these buttons is stored per user so two different logons could have different zoom and brightness values The five buttons in the Video window correspond to the five buttons of the A Zoom digital control the default name nnnX is assigned to the buttons on startup Preparations 35 When you press button 1 of the A Zoom control that zoom value is sent to Nucleus When a preset button is pressed in the Video window the corresponding zoom setting is sent to the digital control E nnn nnn nnn nnn Figure 30 Preset buttons Right clicking on the buttons shown in figure 30 will bring up the dialog shown in figure 31 Change Settings Figure 31 Change Settings Calibrate options right click on preset button Change settings dialog When using an A Zoom the objective settings dialog is slightly different The preset buttons can now store Zoom and Brightness values Each button contains its own settings and is stored when Nucleus is closed A Zoom Presets E n E xj Magnification f Low C Med Cancel C High Mame LN ToolTip ToolTip Test Goes Hee Zoom a Brightness pe Auto Name Figure 32 A Zoom Presets options The first time a user log
137. nd passwords are not case sensitive See Chapter 8 User List Window for adding user names Preparations 1 Nucleus System Login i Er NOTE The log path is stored per user however each user has the same default path Default Log Default On Names Passwords Super User Cascade Operator Cascade Service Cascade Copyright 1996 2003 CMI Click OK and wait a minute while Nucleus initializes the stage Note the warning about obstructing the stage and click OK when it s safe to do so The system will initialize the stage by moving to one corner and then return to the center of travel When the Nucleus User Interface UI first comes up it will have a default set of tools These tools are the basic ones to get you started LOCKING THE WORKSTATION OPTIONAL The following is an optional step You may wish to skip this step and proceed to the The Toolbar You can then come back and lock the station at another time 2 Nucleus 2 7 User s Guide Lock station dialog The Lock Station dialog is opened with either the Lock Button or with the Tools Lock Workstation menu item Lock Station E E Enter a password or leave it blank Click Lock to lock this station Password The dialog can be used either with or without a password e With Password Enter a password in the edit box and click Lock Station To continue using the station re enter the password not case sensitive and click Unlock If the
138. ned Possible values include e None the interlock switch has no effect e Warn when the load door is open a warning message will be displayed but the stage will still be able to move as normal e Warn and Stop Stage when the load door is open a warning message will be displayed and the stage will not be allowed to move If the door opens during a move the move will be interrupted and an error will be generated HicroChamber Door Interlock MicroChamber door is open Also see the MicroChamber Interlock Switch on page 199 Where to get more information ABOUT NUCLEUS 2 6 SOFTWARE You can find out more about Nucleus 2 6 Software from these sources e World Wide Web Cascade Microtech maintains an active site on the World Wide Web www cascademicrotech com The site contains current information about the company and locations of sales offices new and existing products contacts for sales service and technical support information You can also send e mail to Cascade Microtech using the web site NOTE When sending e mail for technical support please include information about both the hardware and software plus a detailed description of the problem including how to reproduce it Requests for sales service and technical support information receive prompt response xii Nucleus 2 7 User s Guide e Other If you purchased your Cascade Microtech product from a third party vendor you can contact tha
139. ns Distance Tool Distance 2 Point Align Saft Align Hard Align Instructions Move to a location on a die After moving click Start Pas Enter estimated row and column sizes The sizes will be used for computing the number af rows and columns traversed between points Distance X Microns Distance Y Microns Mum Columns Mum Aows Column Size estimate 14850 Microns Row Size estimate Microns Start Fos Abort Copy To Water Map Set Distance Eomp Close Figure 110 Distance tab The distance tab can be used to measure die size on a wafer The utility is set up to allow you to scan across an arbitrary number of rows and columns and still correctly compute the die size for one row and one column Instructions for each step are given on the dialog The following procedure summarizes the required steps Tools 133 Procedure 1 Align the wafer in theta using the Hard Align utility on the Summit 12000 series see Hard Align Tool on page 138 or align the wafer using the 2 Point Align Tool found on the S300 and Alessi 6100 series probe stations 2 Enter the approximate die size into the estimate fields on the utility 3 Move to a feature on a die on the wafer using the Motion Control window or joystick 4 Click the Start Pos button 5 Move to the same feature on a different die move at least one row and one column As the stage is moving the distance fields in the dialog will be
140. o match the new limits Wafer Maps 125 Water Whap Test200 wtd File Mode Wafer View X ae erTeRARPHZOOC Parameter Test Analysis Subsite None Testz n wtd Default Wafer Map Combo Pass Fail Combo Pass Fail Recticle Size um Die X Recticle Size um Die Y 200 114 Water Diameter mm Die Marked For Test Minimum Value Maximum Value Mean standard Dev Variance Passed Die Failed Die Testz u wtd Default Water Map Combo Pass Fail Combo Pass Fail Recticle Size um Recticle Size um Water Diameter mm Die Marked For Test Minimum Value Maximum Value O Mean O atandard Dev Variance Passed Die 41 Failed Die E du Ready Figure 104 Adjusted limits displayed in Wafer Map window Color selection 14650 14550 35 965 64 04 Die X Die Y 14850 14550 20d 114 35 965 64 045 lolx Curent 7 3 oe The pass and fail colors within the Wafer Map Test Analysis window are user adjustable To set colors 126 Nucleus 2 7 User s Guide 1 Click on the Set Fail Color or Set Pass Color buttons at the bottom of the Wafer Map Test Analysis window see figure 105 and choose from the variety of colors in the Color window see figure 106 Wafer Map Test Analysis Ea Lower Lirit Upper Lirnit BE m jus Enable Parameter E i Sub Th m T3 Rnohm E E B Bin Ranges TOE Teil 4 Color Source C
141. o right C top to bottom C right to left bottom ta tap ENMENN BMEBNENEBBEBENEN TRY Tee S l l TE E Label Test200 Water diameter 200 00 mm Quality area diameter 135 00 mm Die size micran 148510 0 14550 Back Cancel Figure 51 Wafer Map Wizard Step 6 Procedure 1 To establish a direction in which to test select from Horizontal Vertical Bi directional Horizontal or Bi directional Vertical in the Specify the testing sequence portion of the window 2 Select left to right or right to left and top to bottom or bottom to top for both the Horizontal and Vertical settings A sequence can be visually verified with the TRY button 3 Click Finish to complete the wafer map setup 54 Nucleus 2 7 User s Guide SAVING THE FILE Once you click Finish you are prompted to save the file Save the wafer map to the UserData directory See figure 52 Save a wafer map file B x Save in IS Demo Test200 amp t Ex EJ C Cascade Mucleus UserData Hemoale Scripls LX D emo T esl Hi File name Test200 wid save as type Cascade Wafer Map Files 2 5 wfd Cancel Figure 52 Saving a wafer map file The wafer map is now complete We put this file into the Nucleus application so that you may use it as we proceed to demonstrating other features To use this wafer map it must be loaded into the Wafer Map Window See the Wafer Map Window on page 92 This map
142. ol the software can use interpolation to calculate intermediate pixel to micron ratios for zoom settings that do not have a pixel to micron ratio calculated This mode can be turned on off with the Use Linear Interpolation check box in the Video Setup dialog When linear interpolation is turned on and the zoom value changes either from the digital control or the Video window Nucleus will update the pixel to micron ratio used for that new zoom setting To use interpolation the objectives must first be calibrated The Calibrate Objective button is used to calibrate different objectives depending on which one is selected by the Objective Selection radio buttons For example if Objective 1 is selected that objective will calibrated when the Calibrate Objective button is pressed Three different objectives lens can be supported with Linear Interpolation When an objective lens is switched out of the A Zoom the new objective lens must be selected in the Nucleus Video Setup dialog The objective lens calibration is stored per machine When a new user is added they can use the same objective lens calibration Calibrating interpolation For Nucleus to calculate accurate pixel to micron ratios the actual ratio must be no more than 9 zoom settings away in either direction For example a zoom setting a 6 would need an actual pixel to micron ratio from 0 to 10 Preparations 37 Without Vision module e Clicking on the
143. on and compilation of standards related to the semiconductor industry SEMI standards carry an S designation and a dash year designation indicating the particular last revision of the specification 92 934 is related to safety elements of systems Standard Mechanical Interface as defined by SEMI Relates to a system of closed PODS used to transport 200 mm wafers Software align is the process of measuring the discrepancy between the probe station s coordinate system and the actual physical position of the DUT Nucleus uses the measurement to compensate for the discrepancy correctly positioning the probes on the DUT during semiautomatic stage moves This is an alternative to aligning the hardware by adjusting theta The subsite is a test site on a DUT that is defined as being offset from a die site The stage is a movable platform that supports the wafer chuck The stage moves left right forward backward up down and in theta Theta is the rotational angle between the probe station s x and y axes and the DUT s x and y axes Aligning theta refers to rotating the wafer chuck until the DUT s axes are parallel to the probe station s axes theta 0 degrees Any cassette box pod or boat that contains wafers as defined by SEMI A wafer map is a graphical representation of the DUT In Nucleus the wafer map is stored in a file on the computer hard drive The wafer map file can be opened in Nucleus or it can be opened with the Data
144. on on page 84 Advanced Features Nucleus Vision Basic Setup Target Image Train Target 2 3 Auto Objective Iv Calibration Advanced Setup Video Window Display Set Defaults IY Results Rectangle Iw Target Rectangle Match Setup Minimum Match Score 1700 Last Match Score Curent Alignment Offset fi x n Micron Pixels Per Micron s YER y o Microns Hein Pet Micron Calculate Current Alignment NB Offs t Light Switching Auto Microscope Light Switching Delay Time after light ON m nn Delay Time after light OFF ms 200 Figure 139 Nucleus Vision window with the Advanced Setup ADVANCED SETUP The following items are available from the Advanced Setup e Results Rectangle check box Displays Hides the results rectangle in the video window e Target Rectangle check box Displays Hides the target rectangle in the video window e Set Defaults button Sets each item to its default value 186 Nucleus 2 7 User s Guide e Minimum Match Score edit box minimum score that a match must meet to be considered a valid target e Last Match Score edit box read only Score of last successful match e Pixels Per Micron X edit box read only Horizontal calibration coefficient e Pixels Per Micron Y edit box read only Vertical calibration coefficient Current Alignment Offset X edit box read only Horizontal Current Alignment Of
145. ons Move chuck in Z axis MW Enable Joystick I Scan MSI l Positioner Positions ile de 2 Tm Low Med High Microns Y o Micron 1 000 mm sec Iv Auto Anchor Maximum Configuration Minimum Configuration in Scan mode Figure 12 Motion Control configurations POSITION BUTTONS The Motion Control window has buttons that when clicked move the chuck to predetermined locations Tutorials Adding Positions on page 83 Moving to an Auxiliary Chuck on page 81 Button Description we Click this button to move the stage to the center of travel A H Click this button to move the stage to the manual load position front Eg of station Preparations 19 Button Description Click this button to move the stage to the auxiliary chuck Note that AL 1 this button will not be present on Alessi 6100 series stations Click this button to move the stage to the auxiliary chuck Note that ALI 2 this button will not be present on Alessi 6100 series stations Click this button to move to the location of the reference die POSITION SETTINGS You can make adjustments to a position by right clicking over any button in the left column of the Motion Control window and selecting Change Settings This action brings up the Position Settings window figure 13 The following is an example of right clicking over the AUX 1 auxiliary chuck button x Tool Tip muy e Tex Label Bux 1
146. ons xi Nucleus installing 157 users 755 wafer map parameters 6 Nucleus UI label Nucleus Vision installing 65 O Offset values subsite offset values 07 P PCS software importing 3 PCS Wafer Map Files 3 Platen raising and lowering 3 Position buttons configuring 19 Position settings 20 PPD file 737 Probe to pad alignment using Motion Control window 60 using Nucleus Vision 785 R RS232 and the Hardware Configurator 197 RS 232 serial communications 47 212 Nucleus 2 7 User s Guide S Scan mode values changing speeds 23 SCPI 41 Setting contact position 65 Single micron moves jog mode 26 Soft align wafer angle 57 Speed motion control window override protection 26 Stage position 29 Status window 2 moving parameters 0 10 stage position 29 Stepping 25 Stop buttons amp Stop window changing size 8 Sub index mode moving within a die 25 Subdies changing reference die 75 Subsite joystick 107 move to selected 79 Subsite customization buttons 708 Subsite window colors 06 commands 708 109 customizing 708 108 109 Subsites adding 80 DUT x and y offsets 75 105 T Technical support xii Temperature compensation 3 Theta mode motorized theta stages 26 Toolbar buttons customizing subsite window 708 109 customizing 4 701 Tools windows distance 5 133 Troubleshooting xii U User List window Nucleus 55 V Vacuum switch 46 Verification
147. ontroller TP315 does not support RS 232 communications so the RS 232 option will be disabled if it is selected e Some TP3000 series support both RS 232 and GPIB some support only RS 232 and some support only GPIB This dialog will allow GPIB or RS 232 for T P3000 series Hardware Configurator 193 x NOTE The Hardware dialog does not guarantee that errors will not occur when starting the system For example you have configured the system with an ECX box on RS 232 port 1 when actually the box is hooked up to port 2 Components s ADDING REMOVING COMPONENTS Add Adding 1 To add a component press the Add button in the main toolbar of the Hardware Configurator A component list dialog will appear listing all of the possible components 2 Highlight the component you would like to add and press the OK button Add Component E X Engine Joystick Engine 300 Thermal Chuck Engine 3000 Thermal Chuck Engine 3200 Thermal Chuck Engine 3500 Thermal Chuck Engine Virtual Thermal Chuck Engine 12K Stage Engine 3mm Stage Engine EC Stage Engine 12K Stage PCI Engine 300mm Stage PCI Engine Virtual Stage Engine EC Driver Cancel Figure 148 Add Component dialog Removing Delete 1 To remove a component highlight the component in the Hardware Configurator and press the delete button delete bmp The component must be stopped before it can be deleted zx NOT
148. or position will be the current position such as 621 705 3 Click X motion button index move The stage will move to 5621 705 4 Switch to sub index mode and click Auto Anchor 5 Click X sub index move The stage will move to 6621 705 sub index size is 1000 1000 6 Click X sub index move The stage will move to 7621 705 7 Switch to index mode 8 Click X index move The stage will move to 10621 Index moves ignore any g sub index moves that have occurred Switch to sub index mode and click Auto Anchor 10 Click X sub index move The stage will move to 11621 Sub index moves will anchor at the most recent index move Die mode Die mode is used for stepping around a wafer map After a wafer map file has been setup Die Mode can then be used to step around the selected test die The Toggle Wafer Map button can be used to open the Wafer Map window Die Stepping Mex Die Mex Subst Prev Die Prey Subst First Die First Subsite Last Die Last Subsite Toggle Wafer Map Preparations 25 Jog mode Jog mode is used to make single micron moves Switch to Jog Mode Click the right arrow X of the Motion Control window You will see that the X stage location has increased by one micron m m Click and hold the right arrow The stage will move approximately one micron per second Theta mode Theta mode is available only on systems with
149. orm the following 1 In Scan mode move the x y stage to any location When the stage stops the position assumes an arbitrary value 2 Switch to index mode this sets the anchor and click any arrow button The stage will move the x y distance that is set in the Index Size area of the Motion Control window 3 Switch back to Scan mode and move to some other location 4 Switch back to Index mode and click on any arrow button The stage will move the Index Size from the position you left while in 5can mode Manual anchor With the Auto Anchor check box cleared perform the following 1 In Scan mode move to any location 2 Switch to Index mode Unlike Auto Anchor the anchor is not automatically set 3 Click the Anchor button The anchor position is set to the current position 24 Nucleus 2 7 User s Guide 4 9 Switch back to Scan mode and move to any location Switch back to Index mode and click any arrow button The stage will move the Index Size relative to its anchor position and not from its current position If you move again for example in the same direction your new position will be two Index Sizes from the anchor Sub index mode Sub index mode can be used for moving within a die All sub index moves are relative to the most recent index move i e making an index move sets the anchor position for sub index moves 1 2 Switch to index mode If Auto Anchor is not set then Click Anchor Anch
150. ormally Closed search Band This is the height of the search area when the system is looking for the edge sense switch The value is split evenly above and below the contact location search Speed This is the soeed used when searching for the edge sense switch in the search band Overdrive After the edge sense switch is detected the stage will move up and scrub the pads the amount entered When edge sensing is enabled Nucleus will search for the edge sense switch The search occurs every time the chuck moves up to the contact position If the switch is not found an error will be generated and the move will fail and the chuck will move back to the separate location Example Given the values entered in figure 10 and with Contact at 5000 Separate at 4500 and the stage at the separate position the stage when commanded to go to contact will in the following order 1 Move up to 4800 bottom of the search band at normal speed velocity at 500 microns second 2 Continue to move up towards 5200 top of Search Band until the edge is detected Contact 5015 velocity at normal 3 Continue to move up scrub 75 microns final location at 5090 16 Nucleus 2 7 User s Guide Programmable PES Parameters Move Parameters Z sis Compensation Inker Contact Mode Contact Mode Programmable Contact Motion Properties ire m lee o prin Sec Overdrive fe um Use Defaults DC Probe Card HF
151. ote commands Histogram Window v Display bin count Iv Show Statistics Bin Count gt Wafer Map Test200_wid iofs File Mode Water View DSM er eQQPE7OE0 8 Parameter T3 Fin ohm Subsite None Testz n wfd Default Wafer Map Param Name T3 Rn ohm Desc En Resistance Recticle Size um Die X 14650 Recticle Size um Die Y 14550 Wafer Diameter imm 200 Die Marked For Test b 1l4 Minimum Value 0 03 Maximum Value 49 96 Mean 26 69 Standard Dey 15 44 Variance i 230 5 Curent X Y 2 Statistics Bin Range Index Ready Figure 81 Histogram pane with all options selected The bar chart can display limit values for the each of the bins on the chart The Display Bin Count check box is used to enable the limit values and to display a count of the number of dies in each bin Display bin count has been selected in figure 81 The statistical information for the parameter currently selected can be displayed in the histogram pane by selecting the Show Statistics check box This is the same information as displayed in the legend pane Show Statistics has been selected in figure 81 The bin range display can be turned on or off using the Bin Range Index check box Bin ranges have been deselected in figure 82 100 Nucleus 2 7 User s Guide By selecting the Display Type radio buttons in the Bin Range Index the bin limit values can be displayed either vertically or horizontally to fit the pane siz
152. otion Channels 177 DISPLAYING BUTTON SETS Button sets may be displayed on each side of the Motion Control window They are accessed by right clicking the mouse in the upper area of the Motion Control window and selecting the Positions option in the displayed menu The following dialog will appear Hide Stage Position Buttons Show Position Buttons Align Stage Position on Right Side The options in this popup menu provide choices to those buttons that are to be visible and to which side of the Motion Control window to align the buttons In the following example the Stage Positions Button Set is placed on the left hand side and the Positions Button Set is placed on the right hand side Motion Control Motion Channels Microscope Focus Positions W Enable Joystick Mode sean MS1 Positioner Positions Figure 133 Motion Control window with button sets 178 Nucleus 2 7 User s Guide Microscope positions In figure 133 there are four buttons that focus the Microscope Motion Channel If the microscope channel is not configured in the ECX Box then these buttons will not be available for use These programmable buttons do not change as the active channel is changed e If the scope channel is selected in the motion control widow the scope will move to position the crosshair over the feature MS1 positioner positions As with the other position buttons in the Motion Control window the MS1 Positioner
153. password is forgotten then the Nucleus logon password for you will also work However if the Nucleus logon password is empty then the password used to lock the dialog must be used e Ifthe password is forgotten Terminate the process with the Windows 2000 Task Manager e Without Password Simply click the Lock Station button To continue using the station click Unlock e While the Lock Station dialog is active the Motion Control window is hidden e When the Lock Station dialog is closed the Motion Control window will be displayed again Preparations 3 The Toolbar INTRODUCTION E 5 x Fie Parameters Tools Window Help BS Ready Figure 1 Toolbar After logging on the Toolbar is automatically displayed The Toolbar provides quick access to frequently used functions and windows As a user you may customize the toolbar to suit your needs If this is your first time in Nucleus you may want to leave the Toolbar in its default state and proceed to setting The Parameters Window on page 9 CUSTOMIZING THE TOOLBAR Customize EI X Save the curent use settings Save User Settings E Ki e EB SOFT HAFD H Set Bath Close Reset BE Figure 2 Customize toolbar dialog See Table 1 Toolbar buttons for a description of the buttons 1 Open the Customize Toolbar dialog from the Parameters menu 2 Click Start Edit to start the customize process Buttons can now be dragged of
154. pattern The Prober s wafer map must match or be a superset of the tester s map When MOSAID finishes with one die it tells the prober go to die X Y At the end of the tester s stepping pattern MOSAID tells the prober to load the next wafer The wafer handling must be done manually when using Nucleus MOSAID Auto Tester 201 Wafer Maps The wafer map in Nucleus must match or be a superset of the MOSAID map Please refer to Chapter 3 Wafer Maps in this user s guide or to the MOSAID manuals for a complete description of wafer maps MOSAID moves the stage by sending Row Column die coordinates so it is important for the two wafer maps to have the 0 0 Row Column in the same physical place The example wafer maps shown here have the Nucleus Reference Die 0 0 in the lower left hand corner of the wafer map The MOSAID wafer map has the same 0 0 coordinate in the lower left also It is important that the coordinate systems match or die move errors will occur Setting up the communications driver ele Device SF AM wafer 0 A Columns Legend Physical Bins Wtrows Figure 153 Wafer map showing 0 0 coordinates 202 Nucleus 2 7 User s Guide gt gt Wafer Map mosaid wid File Mode Waer View DsM Om eQAQP Ar e e Row Column O Ready Curert 4 4 Z Figure 154 Wafer maps showing 0 0 coordinates e Set up communications in MOSAID by using the menu option Wafer Probe Setup Dr
155. pect ratio Grid lines appear on the wafer map which define the size of the reticle The red rectangle on the Wafer Map zoom window defines the location of the current view When in Reticle Mode the Apply Pattern button becomes available on the toolbar This button can be used to apply a pattern of selected die on a reticle to the entire wafer Use a reticle with each die visible when selecting the pattern to apply across the wafer If you select a partial reticle on the edge of the wafer the missing die will affect the die pattern x Water Map Untitled x Wafer Map Untitled File Mode Wafer View DG ek eoa Pus Parameter None H Subsite None Current Ix Y E Figure 94 Apply pattern of selected die As pictured in figure 94 the wafer zoom window is in Reticle Mode The wafer window shows the currently view area with a red rectangle and the grid lines show the reticle layout In this mode the scroll bars will shift a whole reticle at a time The Auto Track crosshair feature will also jump a whole reticle at a time The Wafer Map zoom window will always show a whole reticle at a time Wafer Maps 115 Reticle setup dialog 3 The Reticle Setup dialog can be accessed by pressing the button on the zoom Wafer Map window Reticle Setup E X Reticle Size Number af Columns 3 Number of Rows 3 Set ColumnRows Reticle Location Step Size Up Left Right 1 Down Can
156. plan MARK DIE VALUe command is used to send these test results There is not a User Interface UI function for setting test result values 3 On the Wafer Map specify which parameter to display and optionally specify which subsite location to display 4 After the test results have been transmitted to Nucleus from the remote test program save the wafer map to the file again The file can be opened at a later time to display the test results USING THE PARAMETER DIALOG C Program Files Cascade sMNucleus LIserD ata New D ema T estzDl T est200 vef Wafer File Mame Data Parameter Selection Label Number Remove Description SSS Data Parameter Colors Bin Settings Humber of Bing 2 Tatal Range Low Limit High Limit Threshold Appi Upper Threshold Threshold tor selected bin 1 EPUM SS SE Etsy Gradient Fil Wafer Maps 117 To create parameter settings Procedure 1 From the wafer map menu select Wafer Parameters 2 In the Label field enter a name for your test parameters e The string lt new gt will be highlighted Type in a new name to replace lt new gt e The value of the name field is used to select which set of test results to display at a time on the wafer map 3 In the Parameter Description field describe the test parameters e The description string is used only for display purposes 4 Click on the Number of Bins control to select the number of bins de
157. qyiqes Sete 113 asgph 4 ee E ea se MT T un P T TM 114 ee areas ween 114 Beie i it i s T 116 Fe rien o cm H e 116 ee i M Tm IIT T ten TIT 116 a e se TTD MEE 116 Tupesas Wueisip i b eem TER ETORS 117 aisi e o ieee iii cis E ORE NI er errr er o TIT 118 To change the threshold between bins esseseeeee mms 119 leuc eed wlrel TQ TITIUS 121 VIGUUIPDD COSE EATE EAA A E A EA EE E ENEE 122 des T aa tere ces E E E ro 126 MEning Peo ODIO GO FIOPESJAIOUIS waren ner ener terre errr rr ape rr ta araor 151 To read in wafer maps that were generated from PCS software 131 To read in wafer maps that were generated from Galaxy software 131 Wem cba es rU HH Chapter 4 Tools 133 PO es eei METER IET ET Ros Biege Ries cr mT es APONTA IOC aeei aAA AEAEE R EEEE 134 POI AlN SUES nka a aaa 155 AONNE TOE NON NI TUTTI 135 Begg eli 17 NT TTE 155 MEVo na ese TRI ITE tprerrerenrer erent errr rere rrcrrtrr ey rere 135 PHOT FIG FIOOSQUES osbodteiidideude tid pli Avi ebrEMEV nba eC Pu Gl aab bab p bo 19 jusc xegebelenm ssec CP TOR IRR 136 venr Te SE NT T TT T TMMMMUMMUMMMTMET o6 Sagale Lale ENTER UTEM I3 amiet 6 gas e MTM 138 Sie aie g we g PR NETT METERS 136 ves alNcj ipeeMmr 138 vs EE S elu EET TNT 139 Chapter 5 Remote Windo
158. r 14 Nucleus 2 7 User s Guide CONTACT MODE v Parameters E E xl Mowe Parameters Z Axis Compensation Inker Contact Mode Inker Test Spray Time Em m Figure 9 Contact mode Standard Standard In Standard mode when you command the chuck to move into contact the Z axis moves up to the position as specified on the Z Axis tab This mode is the default Contact mode The Contact Motion Properties are disabled The contact icon 4 4 at the lower left of the dialog turns green when contact is made x Parameters E x Move Parameters Z xis Compensation Inker Contact Mode Centact Mode SEEDS seliet ge T Hardware Edge Sense Contact Motion Properties Search Band 200 E m No Switch C Normally Open Search used poc Urn Sec Overdrive 5 n C Normally Closed Use Defaults rei a Figure 10 Contact mode Hardware Edge Sense Preparations 15 Hardware Edge Sense The edge sensor is a hardware switch that detects contact The contact icon 4 at the lower left of this dialog turns green when contact is made This button can be used to toggle on or off Hardware Edge Sense When off Contact Mode is at its default Standard Mode Contact Mode Hardware Edge Sense Parameters owitches If No Switch is selected edge sensing is disabled No Switch selects which type of edge sense switch to look for Normally Open N
159. radient filled for bins 2 to 8 l Ei CO 0000000 2 0 000000 0 142857 2 0 000000 0 142857 3 0 142857 0 285714 Hm 4 0 285714 0 428571 UX 0000000 3 0 142857 0 285714 4 0 285714 0 428571 5 0 428571 0 571429 5 0 428571 0 571429 6 0 571429 0 714286 6 0 571429 0 714286 7 0 714286 0 857143 Bl 7 0 714286 0 857143 8 0 857143 1 000000 8 0 857143 1 000000 9 G 1 000000 Ox 1 000000 COx Figure 96 Bin lists e Change the threshold values between bins see To change the threshold between bins on page 119 When bins are first set up the default values for dividing between each of the bins is based on the total range of bins Each of the bins with legal values will have the same width of values assigned The thresholds between bins can be changed so that the bin widths are uneven NOTE E Changing the bin thresholds should be done after the range of the bins and the number of bins has been set If the range of bins or the number of bins is changed any non default values for bin thresholds will be overridden Lor Limit Lhang vathlowe hin range pper thressold for un 2 change with thredadd cond High Litet Change vith high n range Figure 97 Changing bin list threshold values Figure 97 shows a range with four bins The low limit between the Outlying Bin and Bin 2 and high limit between Bin 3 and Outlying bin are set by changing the bin ranges The
160. rate right click e Set to Current Position This menu item will use the current position as the separate position The position must be below the contact position The separate position is stored as a relative distance from the contact position e Open Z Parameters This menu items opens the z axis tab of the parameters window Z up or z down right click e Override Speed Protection This menu item overrides the speed and contact protection of the Z up down buttons When the speed is overridden the stage will move up down at a fixed speed and will NOT stop at the contact position e The override can be cancelled with another right click or by setting either the contact or separate positions e When override mode is active the Z up down buttons will blink red gray e Cancel override This menu item cancels the speed protection override The override can also be cancelled by setting either the contact or separate positions e When the z speed is overridden the speed slider in scan mode controls how fast the z stage moves JOYSTICK MOVES The joystick can also move the stage in either scan moves indefinite length or index moves When scan mode is selected the joystick will move the stage in any direction at varying speeds The further the joystick is deflected from center the faster it will move The ratio of speed actually moved versus how far the joystick is deflected has been adjusted to allow easy control of low
161. rations Describes the tools and features you will Page 1 need to get started such as Logging on to Nucleus and locking the workstation e Toolbar which provides access to functions in your environment e Parameters which sets and maintains system settings e Motion Control which you ll need to move about the wafer e Integrated Video for displaying and captures images on the wafer Before You Begin ix Chapter Description 2 Tutorials Describes the basics of using Nucleus Topics Page 43 include Loading a wafer e Creating a wafer map e Executing a text file e Adding subsites to the Wafer Map window e Creating Wafer Map Parameters e Motions Control exercises e Using Vision Cascade s optional module for training and moving to wafer targets 3 Wafer Maps Describes the Wafer Map window the use of Page 91 subsites and how to use the Data Map Viewer from within Nucleus Also describes how to set up a wafer map and how to mark die and designate binning of parameters 4 Tools Describes the tools to measure distance and Page 133 aligning the wafer in theta rotation 5 Remote Window Contains information about the remote Page 141 debug window used for monitoring communication progress with a separate test application Also describes how to set up and run a script from the Remote window 6 Thermal Control Describes controlling the temperature of a Page 145 thermal chuck 7 Events Sounds
162. received To re enable the joystick use the Enable Joystick check box in the Motion Control window Enable Chuck Safety Prompting When prompted you may press OK or CANCEL to stop the upward Z movement If it s not selected then the software will not prompt you before an upward movement in Z Preparations 11 Z AXIS Parameters Move Parameters Z Axis Compensation Inker Contact Mode Contact JB um Separate Distance 200 prn Z Asis Options Partial Platen Stay at Separate Use Defaults Figure 6 Z axis dialog Aus 1 Contact O00 pum Separate 200 um Aus 2 pm Separate 200 um Iv Enable Zones Parameters Description Z Axis Parameters Contact Indicates the physical position of the chuck s up location On Alessi 6100 series stations the contact value is not settable to a location Use the right click on the contact button in the Motion Control window See Z Axis Motion Control on page 27 for more information FP NOTE Normally Contact is set in the Motion Control window by right clicking on the contact button and selecting Set to Current Position separate Distance Indicates how far down to move the chuck before moving horizontally Z axis Options Partial Platen See Partial platen Partial Platen does not apply to Alessi 6100 series stations stay at Separate Checked After an x y move is made the chuck w
163. rs and press Next Next gt Finish Cancel Figure 35 Calibration Next Preparations 39 4 Nucleus moves the crosshair to the lower right corner of the Video window Move the stage until the same landmark is beneath the crosshair 5X nnn nnnx nnn nnnx Setup WES Objective Calibration Step 2 Move the stage again until the same landmark is directly beneath the center of the crosshairs in their new location and press Finish Finish Figure 36 Calibration Finish 5 Click the Finish button The software then calculates the conversion ratios and displays the following message Figure 37 Calibration completed message SETUP DIALOG Other video attributes are accessible via the Setup dialog box Changes made to any of the fields are applied immediately e Cancel button deletes all changes made during the edit session e Set Defaults button restores all fields to their default values e Camera Connector selects between BNC and S Video Nucleus Video Setup E x Cross Hair width i Pixel Contrast Cross Hair Size Long Brightness L Cross Hair Color Black Hue Camera Connector S video Saturation 4 00m Setup v Use Linear Interpolation Calibate Objective Set Defaults Cancel Figure 38 Nucleus Video Setup dialog ADDITIONAL FEATURES AutoCal AutoCal is enabled if pattern recognition is available JA
164. rst Label Thir 2 3180 2469 l 247 2470 Procedure e Click on a label and drag to another position To renumber a subsite z Wafer Map Subsite Subsites Mode Tools View Label First Label Third 3180 2469 Label Second 247 2470 Procedure e Navigate to the menu item Tools Renumber Subsites To change the reference subsite x Wafer Map Subsite Subsites Mode Tools View amp d Q D amp QR k X N AO v EE RO Label First 1 Label Third 2 78 Nucleus 2 7 User s Guide Procedure e With the yellow arrow depressed click on a die in the subsite map window To toggle the grid z Wafer Map Subsite Subsites Mode Tools View Rael abel Second Label First Label Third Procedure e Navigate to the menu item View Toggle Grid to enable a grid of lines in the subsite display To move fo the currently selected subsite x Wafer Map Subsite Subsites Mode Tools view 3427 1 2 3180 2469 Procedure e Select a subsite and navigate to the menu item Subsites Move to Current Subsite A red crosshair over this subsite validates the move Tutorials 79 To add a subsite using position x Wafer Map Subsite Subsites Mode Tools View j 3150 egy Procedure 1 Move to a position on the wafer see window above 2 Select the menu item Subsites Add Subsite using Position see window that follows or click al on the toolbar You can se
165. s 180 Nucleus 2 7 User s Guide Show wafer row col The Show Wafer Row Col displays the row and column coordinates in relation to the Reference Die Set zero The Set Zero button sets the current X Y position to 0 0 Custom aux chuck The Custom Aux Chuck button opens up the Auxiliary Chuck Setup dialog The settings in this dialog change the display configuration of the Auxiliary chucks in the graphic portion of the Status window Auxiliary Chuck Setup 4 X ux 1 4 ALK Z C None C None C Right Front Right Front Right Back C Right Back C Left Front C Left Front Left Back Left Back H Cancel Figure 136 Auxiliary Chuck Setup PARAMETERS DIALOG BOX The Parameters dialog box figure 137 on page 182 will have a Auto Probe tab only if Motion Channels are enabled in Hardware Configurator The Auto Probe tab contains settings for the Motion Channels that are active in the ECX Box If you have a different channel configuration on your ECX Box this tab will reflect the setup of your ECX Box and may appear different from the following diagram Motion Channels 181 Separate distance Each of the available positioners has a separate value which is the distance that the positioner will move away from contact during an auto z move Parameters ES x Move Parameters Z Axis Compensation Inker Contact Mode Auto Frobe Separate Distance Curent Channel
166. s coordinates of an Cancel The coordinate is deined as Define positive Right Define positive r Up m Wafer Subdie Opens the Subdie window where the following options are available Wafer Parameters Edit the wafer parameter settings Wafer Clear Parameters Clears the marked die and parameter values from the wafer map Wafer Wafer Map Test Analysis Start the Wafer Map Test Analysis K amp wis 104 Nucleus 2 7 User s Guide Subsites COMMANDS WITHOUT MENU ITEMS Select all die for test When selecting die for test the street size is included in the calculation of a partial die Clear all die marked for test Clear all partial die marked for test Select all partial die Open grid fit dialog Subsites are test sites on a device under test DUT that are defined as x and y offsets from a reference point Each Subsite entry contains these elements e Label text label for the subsite e Active defines whether or not a subsite location is visited e Index numerical identifier of the subsite Defines the order the subsites are visited e X Offset defines the x offset of the subsite Offsets can be negative e Y Offset defines the y offset of the subsite Only one group of subsite locations can be defined This group is applied to all of the dies on the wafer Subsites that are marked as active will become a part of the die subsite stepping sequence Subsit
167. s in the values for zoom and brightness will be drawn from the digital control Possible Zoom and Brightness settings range from 0 99 When setting a preset value from the digital control the zoom and brightness settings for that preset will be reflected in the proper toolbar button of Nucleus The Change Settings dialog can also be used to change the zoom and brightness levels of the currently selected toolbar button When the Auto Name check box is enabled the Name of the preset button will be associated with the A Zoom zoom value for the button For example if preset number one is equal to the first button on the A Zoom then its Name will be 1 36 Nucleus 2 7 User s Guide SETUP BUTTON When using an A Zoom microscope the Setup button in the Video Window will bring up the dialog shown in figure 33 Nucleus ideo Setup E x Cross Hair width i Prive Contrast Cross Hair Size Long Brightness L Cross Hair Color Black gt Hue L Camera Connector S video Saturation 4 00m Setup 28 v Use Linear Interpolation E E Calibate Objective Ss cfm Set Defaults Cancel Figure 33 Nucleus Video Setup window This dialog features the A Zoom setup section which consists of Use Linear Interpolation Calibrate Objective and the Objective Selection radio buttons Linear interpolation and pixel to micron ratios When using an A Zoom digital contr
168. s the reference point It is denoted with RO in the index column The reference item in the list cannot be moved from the top spot in the list or have its index value changed from 0 e You can also enter numeric values for positions at the subsites and change the label text by using the arrow keys to highlight an entry and then simply entering the new values e A subsite is active if it has a check mark in the box next to its name Active sites are green and inactive sites are gray A subsite can be marked as active or inactive by clicking on the check box next to the label Subsites that are inactive will be skipped by the remote move commands e Subsite entries in the list can be dragged within the list to change the order e The index value for the subsites changes with each subsite when the order changes e The order that the subsites are visited is the order of the index value The order can be rearranged by moving entries in the list and clicking Tools Renumber subsites e Clicking on the label at the top of each list sorts the list in ascending or descending order for that column e The reference position in the die is shown in yellow Any subsite location can be marked as the reference position By definition the offset values for the Reference subsite are always 0 0 Changing the Reference subsite will change the x y offset for all of the other locations e The joystick may be used to move to a location and then push
169. sary to change the list if hardware has been added or removed from the system i e if a motorized positioner is added to the system for the first time The toolbar of the Hardware Configurator window has a button labeled System Config This button opens up the System Configuration tabbed dialog The dialog can be used to graphically setup a default cfg file to match your system e The System Configuration dialog will not open unless all components are stopped If any components are running and the System Config dialog is opened an error message box appears e When the System Configuration dialog is opened it fills in the various radio buttons and check boxes based on the current component list Buttons Cancel validate Sek Default Figure 140 Configuration buttons OK Button Closes the dialog the component list will be re configured to the settings that were requested After the System Configuration dialog is finished the component list can still be accessed and edited Cancel Button Closes the dialog and make no changes to the current component list configuration Validate Button The Validate button checks the settings and lists any conflicts in a separate Conflicts window It does not resolve any conflicts but provides a Hardware Configurator 189 listing of each error See the Component restrictions during setup on page 193 for a list of possible conflicts e Set Default Button Default setup
170. sequentially e Load a wafer Loading the Wafer on page 44 e Create a Wafer Map Creating a Wafer Map on page 47 e Wafer dimensions are known e Wafer dimensions are not known therefore we will have to calculate them using the Distance and Align tools e Align the wafer and set contact position Aligning the Wafer on page 56 e Runa text file with the Remote tool Sending Remote Commands on page 66 e Create Wafer Map parameters to view the results Setting Up Wafer Map Parameters on page 69 e Add subsites to our wafer map Creating Wafer Map Subsites on page 75 We will additionally e Move to an Auxiliary chuck Moving to an Auxiliary Chuck on page 81 e Add a position to the Motion Control window Adding Positions on page 83 e Use Cascade s Vision module with Integrated Video to find targets on the wafer Optional Modules on page 84 Be sure to take a look at the Quick Start Guide that came with the documentation You ll see that the Quick Start Guide summarizes many of the tasks that are performed in this tutorial Tutorials 43 Loading the Wafer The Wafer Map window should already be on your desktop default setup The Wafer Map window is also available from the main menu Window Wafer Map See figure 39 or from the Toolbar gt gt Motion Control x Wafer Map Untitled E Joj x File Mode wafer View O Hex eRnaPuGE Parameter None E Subsite None v Enable Joystick Mader sean
171. sired e Two bins selected will create an above below threshold i e results above the threshold will be one color results below the threshold will be a different color e Three bins selected will create one bin of legal values and two outlying bins Use this setting to create a single pass fail bin with failed values going to bins above and below e Four or more bins selected will create two or more bins with legal values and two outlying bins 5 Fill in the range for bins The upper and lower values become the legal range of values Optional steps e Set the color for a single bin The color for a single bin can be set by clicking on the appropriate bin in the list Click the Set Color button A dialog will be displayed with available colors Select the desired color and click OK e Set the color for a range of bins The colors for a range of bins can be set to a eradient fill This means that the colors change gradually from one bin to the next in the range of bins selected Follow these steps to set colors with a gradient fill e Click on the top bin of the range of bins e Hold the shift key and click on the bottom bin of the range e Click the Gradient Fill button The bins between the two outer bins selected will be filled in with colors that gradually change from one end to the other 118 Nucleus 2 7 User s Guide Following are two bin lists Figure 96 The first list has default colors The second list has been g
172. speed and high speed moves There are no user settings to control how fast the joystick moves the stage When index or sub index mode is selected deflecting the joystick will cause the stage to move by a complete index move or sub index move Index and sub index moves work the same with the joystick and the arrow buttons When the Motion Control window is closed the joystick continues to work the same as if the window is open If the left button on the joystick is pressed while the Motion Control window is closed the window will be reopened The Enable Joystick check box enables the joystick for stage moves When it is not checked the joystick has no effect on the stage The SET JOYSTICK ENABLED remote command can be used to set the value at the check box 28 Nucleus 2 7 User s Guide Status Window The Status window shows the position of the stage Location of Auxiliary Chucks on Chuck User has NN 5300 series stations i DB B Window contents may differ ESI Micron depending on station Setzero Main chuck with indicating position of Integrated Video portal e The size of the window can be changed by dragging on the corners of the dialog Right clicking anywhere in the window will show the following options for changing the contents of the window Hide Graphic Vertical Alignment Stop mode OM Setup Dialog e Hide or show the graphic e Orient the layout of the numeric v
173. t On Names Passwords Super User Cascade Operator Cascade Service Cascade User List Window 155 Check Boxes EDIT USER LIST e Checked You can open the User List dialog e Unchecked The menu item is disabled for that user NUCLEUS LOGON REQUIRED e Checked The log on dialog will be displayed when Nucleus first starts running e Unchecked Log on is not required and the Window s user name is used to retrieve setup parameters To erase all existing users and revert to the default set of user names and passwords delete the following file Cascade Nucleus Userdata user dat UsE LOG FILE The log path is stored per user however each user has the same default path e Checked Writes to file the user name time logged in out e Unchecked No file is created for the user 156 Nucleus 2 7 User s Guide APPEND IA Installing Nucleus Introduction The following steps are used to install Nucleus software on Windows 2000 or Windows NT 4 0 operating systems It is necessary to be a system administrator for the installation to be successful Installation 1 Double click Setup exe from the Nucleus Installation CD Installing Nucleus 157 The InstallShield Wizard dialog enters windows configuration and waits for you at the Welcome window Cascade Nucleus Prober Control Software v2 6 0 E x E Welcome to the InstallShield Wizard for Cascade Nucleus Prober Control Sof
174. t do not test define SKIP DIE 3 3 map die at 3 3 but do not test define UGLY DIE 3 0 map an ugly die at 3 0 PP SSS SS a ee jt Saeed Warrer Map Axis Orientation SSDLIH ee e J RS Sa ae these settings control the axis display for both the Wafer Map window and the ASCII Wafer Map Report define MAP_DISPLAY X_AXIS_INCREASES RightToLeft define MAP_DISPLAY X_AXIS_INCREASES LeftToRight default define MAP_DISPLAY Y_AXIS_INCREASES TopToBottom define MAP DISPLAY Y_AXIS_INCREASES BottomToTop default A me c M a OE E EE S gusce edes Nater Mop Dre Orientation eLbtlng seem IUE eecedeesuatutscuc e stooieitutaetiddiepurenim eise de vitm iertertuiuc uh teieirelleituitetelindishaV ie eive ark nea amc ene DIE ORIENTATION specifies the cartesian quadrant for embedded bitmap display define DIE ORIENTATION 1 I X addresses Start at bottom X addresses start on left define DIE ORIENTATION 2 Y addresses start at top X addresses start on left default define DIE ORIENTATION 3 Y addresses start at top X addresses start on right define DIE ORIENTATION 4 hf X addresses start st bottom X addresses start on right define DIE ORIENTATION 5 X addresses start at bottom Y addresses start on left define DIE ORIENTATION 6 X addresses start at top Y addresses start on left define DIE ORIENTATION 7 X addresses start at top Y addresses start on right
175. t vendor for service and support Before You Begin xiii xiv Nucleus 2 7 User s Guide CHAPTER Preparations Introduction Before you can perform a measurement you must log on to Nucleus and set up your working environment This includes making selections from a variety of tools and setting parameters Additionally you will need to move around the wafer and view it at the pad level In this chapter the following topics are presented e Logging On and locking the workstation e The Toolbar e The Parameters window e The Motion Control window e Integrated Video and Vision New USERS OF NUCLEUS Once you have acquired a basic understanding of the fundamentals in this chapter you can then proceed to the Tutorials which provide a context for using the tools CURRENT USERS OF NUCLEUS Some of the information in this chapter describes significant changes to the Nucleus UI such as Contact Mode in the Parameters window Also if you are unfamiliar with Vision Cascade s module for training and moving to wafer targets this section will provide an overview Logging On Begin by clicking the Start button at the lower left of your screen Near the top of the menu you will see Cascade Microtech s path to Nucleus Move your mouse to this area and follow the links to Nucleus Click on Nucleus When Nucleus is started the following log on dialog is displayed Standard user names and passwords are shown Note that names a
176. threshold between Bin 2 and Bin 3 is set with the threshold control To change the threshold between bins Procedure 1 Click on one of the inner bins In Figure 97 only the threshold for Bin 2 can be changed so you must click on Bin 2 2 Drag the threshold tool to a different value The value will be displayed in the box below the slider control The slider will limit the possible values It must remain between the lower limit of Bin 2 and the upper limit of Bin 3 Wafer Maps 119 oi Click the Apply Threshold button This copies the new threshold value as the dividing line between values in Bin 2 and Bin 3 The wafer map parameter setup dialog is used to specify what colors to display on the wafer map based on test results that are sent to Nucleus from the remote test program See the display settings for a typical measurement Figure 98 The measurement results have the following attributes The name of the test is Test and the description is Voltage The Data Label will be used to select the test to display on the wafer map combo box Also the Data Label will be displayed as part of the tool tip Help when the mouse is over the wafer map If more than one test result has been setup they can be selected by clicking on the Data Label combo box In figure 98 the legal range of values is from 0 1 to 0 2 Values within this range will be assigned to one of the legal bins Values outside of this range will be assigned to
177. tick Configuration window take the default option Microsoft Joystick Configuration The settings below determine how Windows will communicate with your joysticks IF you are unsure of what settings to use keep the current settings Use the following joystick port There is one joystick plugged into this port This joystick has a throttle or Z axis This joystick has a rudder C There are two joysticks plugged into this port Cancel Click the OK button in the configuration dialog Once the computer has been rebooted a Joystick Icon will be present in the control panel of NT This can be used to calibrate the joystick and verify that it is working properly Installing Nucleus 163 WiNDOWS 2000 1 In the control panel double click on the Game Controllers icon 2 In the Game Controllers dialog click the Add button F Game Controllers EME ETGEETHES 3 In the Add Game Controller dialog select 2 axis 2 button joystick EL Add Game Controller 2 asis 4 button joystick 2 button flight yoke 2 buthon flight poke w thrattle z button gamepad 3 asiz 2 button joystick Jr O Click the OK button to continue 164 Nucleus 2 7 User s Guide 4 The following dialog should appear showing that the joystick is active To calibrate and test the joystick in the operating system click the Properties button Refer to Calibration on page 167 for more information fA
178. ting a Wafer Map e Now that we have a wafer loaded we can let Nucleus help us to create a map of the wafer which represents our physical wafer How TO SET UP A WAFER MAP Introduction The easiest way to set up a wafer map is with the Wafer Map Wizard This six step procedure will produce a wafer map that can be modified later if necessary with each separate tool that the wizard is built from By creating a wafer map we are visually replicating our physical wafer Reference Wafer Maps on page 91 WAFER MAP WIZARD To access the Wafer Map Wizard select Window Wafer Map from the Nucleus menu or click the Wafer Map icon on the toolbar 15 xl File Parameters Tools Window Help Ready Mmf Figure 44 Nucleus toolbar Tutorials 47 When the Wafer Map appears select File Wizard to display the first step z Wafer Map Untitled Bl x File Mode wafer View Dd E ox eoQaPiz ao pE Parameter None Subsite None Current x Y E Step 1 Setting wafer diameter Wafer Map Wizard Step 1 of 6 EE xj Label Test200 File Hame Untitled Open Wafer Diameter mm 200 00 Quality Area Diameter mm 195 00 Back Cancel Figure 45 Wafer Map Wizard Step 1 48 Nucleus 2 7 User s Guide Procedure 1 Enter the wafer s diameter and quality area diameter under the Diameter Wafer and Quality Area Diameter headings in the Wizard window respectively
179. tion Communication Programming Guide for more information on remote commands 98 e Nucleus 2 7 User s Guide gt Wafer Map Test200 fd JB File Mode Wafer View lnzdoervreaarzceeee Parameter E Rn ohm Subsite None o REED JU Testz wtd Default Water Map Param Name T3 Rn ohm Desc Rn Resistance Legend Window Iw Show Legend Iw Show Statistics Recticle Size fum Die x 14850 Recticle Size um Die Y 14550 Water Diameter mm 200 Die Marked For Test ll4 Minimum Value 0 03 Maximum Value 49 96 un Mean 26 69 Statistics Standard Dey 15 44 Variance bed ls m x l at Oc x lt LO 3a l z x g 20 Legend d l c x c 30 Bt 30 c x 40 5 40 c x 50 7 50 cz x lt 0 Ready Current 1 Y A Figure 80 Wafer map with Parameter tooltip selected The Show Legend check box allows you to toggle the legend in the Legend pane by clicking in the check box Show Legend has been selected in figure 80 The Show Statistics check box enables you to toggle the list of statistics on or off in the legend display pane Show Statistics has been selected in figure 80 Wafer Maps 99 Histogram pane The Histogram pane displays a bar chart of the parameter result data that was sent to Nucleus by an external test program These values are sent to Nucleus with remote commands such as PROB MARK DIE VALUE See the Probe Station Communication Programming Guide for more information on rem
180. togram Window v Display bin count IY Show Statistics V Partial Die Row Col Display Bin Hange Index v Show bin range index Display Type C Display horizontal index Display vertical index Display Exponent Always C When exponent changes rei to Figure 76 Wafer View Setup window Parameter C Subsite C Row and column Wafer map pane gt Waler hap Test2 00_wid File Mode Wafer View DgHerea amp ricecec0s Parameter E Ar ohm Subsite None Coordinates Zoom out an selected area Current EE 0 m Figure 77 Wafer Map pane with Coordinates and Partial Die brown selected 96 Nucleus 2 7 User s Guide The Coordinates check box in the Wafer View Setup window displays the x and y axis arrows in the Wafer Map pane The coordinates have been selected and can be seen in the lower left corner of figure 77 The Partial Die check box in the Wafer View Setup window enables partial dies to be displayed on the wafer map Partial dies are located at the edge of the wafer They appear as incomplete on the map because they have not been included with the rest of the wafer The Row Column Display check box in the Wafer View Setup window when enabled displays the row and column coordinates in relation to the Reference Die Tooltips The Tooltips options when selected allow you to view data by parameter subsite or row and column by simply scrolling the cursor a
181. ttings affect x y moves in scan mode when clicking the motion buttons re NOTE The speed settings do not affect joystick operation When z speed protection is overridden see Z Axis Motion Control on page 27 the speed settings affect the z axis as well Preparations 23 Index mode In Index mode the motion buttons cause the stage to move by fixed amounts The values for x and y are displayed into the edit boxes see figure 22 on page 24 Note that these index values come from the Wafer Map which you can learn to set up in the Tutorials In figure 22 clicking on an arrow button will move the x axis by 5000 microns if the Auto Anchor check box is enabled The speed is set in the Move Parameters window Parameters menu item The anchor position for index moves is the starting place for those moves i e all index moves are relative to the anchor position Disabled Move Al buttons in Index Mode ric Anchor must Anchor button is enabled in Manual Anchor Index Size A 5000 Microns Y 5000 Microns W Auto Anchor be set To enable these buttons Ancha Figure 22 Index size and anchor controls Anchors The following exercise show how the anchors work You can also use the joystick to perform the moves you ll need to enable the joystick in the Motion Control window E NOTE Anchors only have an effect when youre in Index mode Auto anchor With the Auto Anchor check box enabled perf
182. tware The InstallShield Wizard will install Cascade Nucleus Prober Control Software v2 6 0 an your computer To continue click Nest Cancel Click the Next gt button to continue with the installation 2 Input a User Name and your organization Cascade Nucleus Prober Control Software 2 6 0 E x Customer Information Please enter your information C ASCADE User Name Cascade Microtech Inc Company Name Chl Install this application for Anyone who uses this computer all users C Only for me Cascade Microtech Inc Installshield Back Next gt Cancel Click the Next gt button to continue 158 Nucleus 2 7 User s Guide 3 For this step you will need the encryption disk that comes with the Nucleus Installation CD and the serial number of your probe station The serial number can be found on the probe station or printed on the encryption disk Cascade Nucleus Prober Control Software 7 6 0 Please select the type of station staton Tape 6 Virtual C Summit 12000 C 5300 C Alessi 6100 Serial Number Encryption Path Irrstalls Hield Cancel Back e Select Station Type There are three possibilities Virtual Desktop Summit 12K Alessi 6100 and S300 For a virtual installation the encryption disk is not needed but for the Summit 12K and 300 installations an encryption disk is required The Virtual Desktop option allows you to inst
183. uck TPO3020 Series Engine 3020 Thermal Chuck TPO3500 Titan Engine 3500 Thermal Chuck m NOTE The list of supported thermal controllers also includes e TPO3200A TP03200 Series e TPO3010B TP03000 Series e TPO3210B TP03200 Series e TPO3215 TP03200 Series The ERS Thermal Controller does not support GPIB Communications 3 Highlight the Communications GPIB Generic Device and click on the Setup button in the main tool bar of the Hardware Configurator Set up the GPIB Address to match the address of your device Use the Hardware Thermal Control 147 Configurator Object Name edit box to give the component a new name The example shown in figure 118 renames the component GPIB Thermal Chuck Click OK to close the dialog box Configure GPIB Device E X GPIB Address H System Manager Object Name GPIB Thermal Chuck Figure 118 Configure GPIB Device dialog box 4 Highlight the thermal chuck component that was added in step 6 and click the Setup button on the main toolbar of Hardware Configurator In the Communications Object combo box select the name of the GPIB Component that was setup in the prior step In this example the name is GPIB Thermal Chuck Click OK to close the dialog box Thermal Chuck Configuration p X Mame E ngine 3000 Thermal Chuck B MM GEE Thermal Chuck i Sng 200 degree nk Min Setting 65 degree it Cancel Enable Quick Purge
184. ucleus Integrated Video Size Mode vemm nnnx nnn nnn nnnx nnn Setup Capture Figure 25 Movement mode NOTE ET The Integrated Video window must be calibrated for this mode to work correctly See the Objective Setting s dialog figure 27 allows you to give the button an ID name maximum of four characters which becomes the button s text The tooltip associated with this button also is programmable maximum of 256 characters on page 39 Crosshair mode The crosshair mode enables you to position the crosshair anywhere on the Video display When this mode is selected the crosshair is displayed using dashed lines While in this mode the crosshair can be re positioned by clicking the left mouse button to any desired location within the Video window To re center the crosshair after it has been moved right click in the video window Select Re Center Crosshair from the context menu to return the crosshair to the center of the video window Preparations 31 Nucleus Integrated Video Figure 26 Crosshair mode Measuring Tape mode The measuring tape mode is used to measure the distance between two features within the Video display The left mouse left button is clicked down over feature 1 and moving the mouse while holding the left crosshair button down drag amp drop until the cursor is over feature 2 A green rectangle is displayed along with the X Y distances The distances will be shown in th
185. ues for the entry are e Label n where n is the index of the item e X Value 0 Y Value 0 e Index is the position in the listing View Zoom In Zooming in will enlarge the subsite display of the die Scroll bars will appear if the subsite display is too large for the current window View Zoom Ouf E E Zooming out will reduce the size of the subsite display of the die 108 Nucleus 2 7 User s Guide 5x G MM E 3 ih n3 EET qo Mode Select Subsite blue arrow In this mode clicking on a subsite selects the subsite in the list Mode Reference Subsite yellow arrow Clicking on a subsite changes it to the reference location All subsites become relative to this location Mode Grid Location black arrow This mode is only enabled when the Show Grid check box is checked Toggle a subsite in out of the grid location Clicking on an existing subsite removes that subsite from the list and subsite display Clicking on a location in the grid adds a subsite at that location in the subsite display and to the bottom of the list Note that deleting a subsite and reinserting it will cause the loss of index and label information Mode Drag The Drag tool allows you to drag the subsite display to expose other areas of the die when zoomed in Subsites Delete All Removes all the subsites from the list and the subsite display Subsites Delete Removes the currently selected subsite from th
186. updated to indicate how far the stage has moved 6 Click on the End Pos button 7 Row Column sizes will be computed and displayed in the fields 8 Optional Click Copy to Wafer Map and the values will be put into the current wafer map 9 Optional In the Wafer Map window click the save button to save the wafer map 2 Point Align Tool x NOTE This feature is only available for stations with motorized theta currently the S300 and Alessi 6100 series probe stations Please select theta alignment method and press the Start button Note Video window must be calibrated ta use Quick lignment and Automatic Moves C Quick Point amp Shoot Automatic Moves Use Automatic X Moves Max Distance fi 49 mm Move and Align Tool Start gt Figure 111 2 Point Align tab 134 Nucleus 2 7 User s Guide The 2 Point Align function aligns the wafer on the chuck so the streets are aligned with the x axis of motion Two point alignment is used on stations that have motorized theta such as the S300 mm station Stations with manual theta such as the Summit 12000 Series use the hard align procedure 2 POINT ALIGN FEATURES Alignment types e Standard An alignment that requires moving the stage so the theta alignment line is under the crosshairs in the video window e Quick Point and Shoot An alignment that uses a calibrated video window and point shoot to find stage locations for a thet
187. ure 65 Text file fragment first six commands Now it s easy to see the data in different formats all which display our defined parameters For more information on this and other commands see the Nucleus 2 6 Communications Guide PN 129 164 74 Nucleus 2 7 User s Guide Creating Wafer Map Subsites sa SUBSITES Subsites are test sites on a device under test DUT that are defined as x and y offsets from a reference point In this exercise we ll add subsites to our Wafer Map window and then execute a text file script Reference Subsites in Chapter 3 Wafer Maps To add subsites Procedure 1 Click the Subsite icon Lj from within the Wafer Map window or use the menu path Wafer Sub Die x Wafer Map Subsite E X Subsites Mode Tools wiew EFAA 2 Set the Grid Size Wafer Map Subsite E x Subsites Mode Tools view Set grid size IE It Renumber subsites Load From File NS 0 Tutorials 75 3 While watching your Video window move to desired subsites using the Subsite Grid Size Grid size 2000 Microns arid size y 2000 Microns Cancel Motion Control window or joystick each time adding subsites Subsite Add subsite using position or click a i x Wafer Map Subsite Subsites Mode Tools wiew Label Second Label 3 2 3182 2469 Label 4 3 3180 1207 x Wafer Map Subsite Subsites Mode Tools View EFA
188. w 141 JR perm D ai el NIORT TT TT E T TT TRU 141 E sperijlass S m 141 ee Ve AcE ol Fs stoatveta ning P at EERDME FO RUIT POLITE AOTT LU PRECOR doe N 142 aee diserte TR 142 Spes UP RETIRO w e wt 142 Feei m eu 29 ae dr CIT UT ID TEST 142 Ped qu T T m TT 142 dero QA ARTT Dmm 142 Enay siete UTEM 143 wA ETE RTT NER 143 iv e Nucleus 2 7 User s Guide E se dati de I T Kem 143 ee e M UT UT TIME 143 E ss dari EAEI A EAA EE Cus est telsc esto vinis ETE E EEE EET 143 ISPE PCS E A E E A 143 Boso arcen WT T EEE E AAEN TT 143 Chapter 6 Thermal Control 145 e FE rer 145 le liga eontro DEI orenian EN EEEE EAEE 145 S EU E aE EE Ee 145 LT eaer ERRA A SRA 145 SS pa T 145 ritis e MEM re A aera 146 IUE er rure i NR ETE EET 146 Thermal Control Properties ssssssrsssnsrrnnrnnrnnnrnnrrnntut mmn nnns 146 COON Tennad PICU SINS gt ccuacekbpisk prabykepkunp ben tcp adore i PEG PROUD 146 Thermal Controller Seld uscesssbreped waited vixei rutb rbieTUPFPROIPPEAEYPPETEUR KLPM E EXER Cet lbN CPP EEEE 147 MO E aA AEE 147 To Set up a Thermal Controller without the System Configurator 147 GFB Oormruniceanons STU sieisen iaiia EIE ODD LED N 147 Bo COMMUNICOTONS SUD aere erp rtr nie eine ani 148 H ageuctdseganpess T NMTTNMNTIRTUTTy 150 Chapter 7 Events Sounds Window 153 ie a u Pos CMM TT TERN hens 153 Chapter 8 User List Window 155 Jesee Ew el MYTH too
189. w valid for X because the reference has been moved to the lower corner Any offset entry will not be allowed if its placement in relation to the reference site will place it off of the die I NOTE When the subsite list view is not visible the only commands available are Zoom In Zoom Out and Add a subsite using the current position Wafer Maps 111 Wafer Map Zoom Window The Wafer Map Zoom window makes it possible to see the overall wafer in the main map window and additionally a zoomed in view in another Wafer Map window Figure 91 shows the Wafer Map window and a zoomed in window side by side The red rectangle of the main window shows the region of the wafer that is zoomed z Wafer Map Untitled File Mode wafer wiew ilnsgoxreaaPwxoee z Parameter IN Subsite n J zs is PER Wafer Map Untitled Current x Y Z Figure 91 Wafer map window and zoomed in view Ready Procedure 1 Select Mode Zoom Wafer and drag a rectangle with your mouse 112 Nucleus 2 7 User s Guide 2 Select zZ from the main Wafer Map window You can also select View Show Zoomed Wafer from the main menu f View Setup oam Cul oom In Customize i w Show Tool Bar w Show Status Bar id w Show Parameter Bar Show His agram Show Legend Figure 92 Select Show Zoomed Wafer PROPERTIES All die colors on the wafer map and in the zoom window are updated in both windows when a change is mad

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