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VacIon Plus 40/55/75 pumps

1. 107 1078 109 10 107 10 105 104 PRESSURE mbar Figure 25 Pumping speed vs pressure for Nitrogen 100 Before Saturation SH Saturation lasse to 10 10 108 107 108 105 10 PRESSURE mbar Ar PUMPING SPEED L SEC Figure 26 Pumping speed vs pressure for Argon CURRENT A 10709 10 9 10 5 1077 10 5 10 5 10 4 PRESSURE mbar Figure 27 Pressure vs current diagram Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 65 98 5 Technical Information Vaclon Plus 75 Starcell Vaclon Plus 75 Starcell 150 g u o i d 10 Before Saturation a ul a fter Saturati Afte a r Saturation o z 5 5 a a z Lu N o 107 1079 10 10 107 108 10 5 1074 PRESSURE mbar Figure 28 Pumping speed vs pressure for Nitrogen 150 100 Before Saturation Lo 10 10 0 103 108 107 10 105 10 PRESSURE mbar Ar PUMPING SPEED L SEC o Figure 29 Pumping speed vs pressure for Argon CURRENT A 10
2. VACION PLUS 75 5 374 136 50 REF 9 p f ee le i se 6 519 160 50 REF 12 205 310 00 REF VACION PLUS 55 VACION PLUS 40 2 244 87 00 Figure 39 Vaclon Plus pumps outline drawing 70 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 Stray Magnetic Field Curves of field strength along the centre line of the pump and in the plane of the flange as a function of distance from the pump are shown in Figs 41 42 and 43 where Bx is the magnetic field along X axis By is the magnetic field along Y axis and Bz is the magnetic field along Z axis AZ Vertical axis Longitudinal axis X Trasversal axis 0 A 100mm Figure 40 Vaclon Plus pump axis identification Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 71 98 5 Technical Information Stray Magnetic Field 72 98 4 Gauss f Legend 1 a d Bx n E i By 15 to Bz 2 1000 800 600 400 200 0 200 400 600 800 1000 Distance from flange centre mm Figure 41 Longitudinal stray magnetic field Gauss
3. Figure3 X Vaclon Plus 55 54 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 Figure4 Vaclon Plus 75 Inlet flange Cover Magnet Element NY High voltage connector SJ Figure 5 Pump main assemblies Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 55 98 5 Technical Information Technical Specification Technical Specification The following table details the main technical specifications of the Vaclon Plus 40 55 and 75 pumps Tab 1 Model Specification StarCell Triode Noble Diode Diode Nominal pumping speed for Nitrogen i s 40 34 33 36 40 55 50 48 53 55 75 65 62 68 75 Operating life at 1x10 6 mbar hours 80 000 35 000 50 000 50 000 Max starting current 40 55 75 250 mA Max baking current 40 55 75 15 mA Protect current 40 55 75 30 mA Operating voltage max 7000 Vdc 7000 Vdc 1096 10 96 Ultimate pressure Below 10 11 mbar Inlet flange 40 2 CFF NW 35 AISI 304 ESR SST 55 4 CFF NW 63 AISI 304 ESR SST 75 6 CFF NW 100 AISI 304 ESR SST Internal volume litres 40 1 9 55 1 9 75 2 3 Maximum baking temperature C 350 Temperature limits C Pump 400 Magnet 350 Flange 500 Material Body AISI 304 SST Cathode Titanium Titanium Titanium Tantalum Anode AISI 304 SST
4. 0 100 200 300 400 500 600 700 800 900 1000 Distance from flange centre mm Figure 42 Vertical stray magnetic field 1 Gauss 05 o Pea 0 5 pim Nr Legend s Al 9 A Bx 1 2 BEN Seriy 45 m Be 1000 800 600 400 200 0 200 400 1000 Distance from flange centre mm Figure 43 Transversal stray magnetic field Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 Vaclon Plus Pump Installation Inspection Procedure Vaclon Plus pumps are evacuated baked out sealed and leak checked at below 1x10 Torr mbar prior to shipping The following information and procedures can be used to evaluate the vacuum integrity of a VacIon Plus pump before installation Visual Inspection Inspect the pump and magnet for physical damage which may have occurred during shipment Inspect the pinch off seal If it is open the pump is at atmospheric pressure WARNING The pinch off seal is extremely sharp Be careful A Vaclon Plus pump that has been exposed to atmosphere during shipment or while in storage will operate properly if it has otherwise not been damaged The pump is not harmed by such exposure although it is good practice to keep it under vacuum when not in use to exclude dust and the accumulation of water vapor from the environment Vaclon Plus 40 55 75 pumps User Manual 87 900
5. Tab 3 Part number StarCell Triode Noble Diode Diode Basic pump 40 919 1240 919 1230 919 1220 919 1210 55 919 1340 919 1330 919 1320 919 1310 75 919 1440 919 1430 919 1420 919 1410 Pump with options With additional 2 4 CFF port 40 919 1243 919 1233 919 1223 919 1213 55 919 1343 919 1333 919 1323 919 1313 75 919 1443 919 1433 919 1423 919 1413 Cables HV rad Resist cable with interlock 929 0705 Replacement parts HV Feedthrough 959 5125 Pump without magnets and covers 40 919 1244 919 1234 919 1224 919 1214 55 919 1344 919 1334 919 1324 919 1314 75 919 1444 919 1434 919 1424 919 1414 Heaters for basic pump 120V 919 0071 250 Watt 220V 919 0070 Copper gasket for inlet flange 10 pack individually sealed 40 2 FG 0275 CI 55 4 5 FG 0450 CI 75 6 FG 0600 CI Nut and bolt set for inlet flange 40 1 4 28 x 1 25 pack FB 0275 C12 55 5 16 24 x 2 25 pack FB 0450 C12 75 5 16 24 x 2 25 pack FB 0450 C12 Copper gasket for 1 1 3 CF feedthrough flange FG 0133 Cl 10 pack individually sealed Nut and bolt set for 1 1 3 CF feedthrough flange FB 0133 C 8 32 x 3 4 25 pack For a complete overview of Agilent s extensive vacuum product line please refer to the Agilent Vacuum Catalogue 90 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 Vaclon Plus Pump Controllers The following controller series are available to supply the VacIon Plus pumps Mi
6. La pompe est fournie dans un emballage de protection sp cial si l on constate des signes d endommagement imputables au transport contacter aussit t le revendeur local Pendant l op ration de d ballage veiller tout particulierement ne pas laisser tomber la pompe et ne lui faire subir aucun choc ni aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est entierement recyclable et il est conforme la directive CEE 85 399 en mati re de protection de l environnement En vue d viter tout probl me de d gazage ne pas toucher mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e La pompe ne peut tre endommag e si elle reste simplement expos e l atmosph re Il est quoi qu il en soit conseill de ne pas la retirer de son emballage avant le moment de l installation afin d viter toute pollution due la poussi re Figure 1 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 33 98 3 Proc dure pour l installation Installation Installatio ATTENTION Ne pas installer et ou utiliser la pompe dans des milieux expos s des agents atmosph riques pluie gel neige des poussieres des gaz de combat ainsi que dans des milieux explosifs ou fort risque d incendie Pendant le fonctionnement pour respecter les sp cifications techniques d clar es la temp rature ambiante doit
7. Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION PARAMETERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Contact vertemperature Temp 2 Purge flow Cooling defective Clogging eR OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other SCROLL AND ROTARY VANE PUMPS Pump doesn t start Noisy pump describe Doesn t reach vacuum Over temperature Other Pump seized DIFFUSION PUMPS Heater failure Electrical problem Doesn t reach vacuum Cooling coil damage Other Vacuum leak Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to al
8. 69 E Agilent Technologies 51 98 5 Technical Information Disposal Vaclon Plus Pump Installation 73 Inspection Procedure 73 Visual Inspection 73 Vacuum Evaluation 74 Short Circuits 75 Typical Installation 76 Inlet Flange Connection 77 Control Unit Connection 80 Safety Interlock 81 Heater Installation 81 Heater Replacement 82 Bakeout Operation 83 Bakeout of Vaclon Pump with the Integral Heaters 84 Operating Procedure 85 Maintenance 86 Exchange of the High Voltage Feedthrough 86 Leakage Current Check 87 High potting 88 Pump Troubleshooting 89 Vaclon Plus Pump Replacement Parts and Accessories 90 Vaclon Plus Pump Controllers 91 52 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 Description of the Vaclon Pump The Agilent VacIon Plus 40 55 and 75 pumps are ion pumps and are available in four types StarCell Triode Noble Diode Diode They operate in the pressure range from 10 to below 10 Torr mbar Virtually all gases and vapors can be pumped successfully with the ion pump The pumping speed will vary depending on the system pressure the gas type and the applied operating voltage The latter can be optimized using Agilent controllers to achieve the lowest possible operating pressure The VacIon Plus Triode and StarCell pumps allow starting from as high as 5x10 Torr 6 6x10 mbar because ions are prevented from bombarding the system and pump walls at star
9. tre comprise entre 0 C et 85 C La pompe doit tre conserv e scell e avec son tuyan d entr e aplati jusqu ce qu elle soit pr te tre branch e au syst me AVERTISSEMENT NON Pour viter toute l sion aux personnes ne pas brancher la haute tension la pompe avant que celle ci soit install e dans le syst me et avant que toutes les brides d entr es soient correctement assembl es ou ferm es 34 98 Le fonctionnement de la pompe n est optimis que si celle ci est utilis e avec l une des unit s de contr le Agilent sp cifiques Dual MidiVac ou MiniVac Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Proc dure pour l installation 3 ATTENTION Lors de l utilisation des pompes le respect des normes de s curit est imp rativement subordonn l emploi des unit s de contr le Agilent La pompe Vaclon Plus peut tre install e dans presque toutes les positions Pour plus de facilit elle est g n ralement mont e en position verticale avec la bride d entr e en haut En cas d installation dans une position diff rente de la verticale la pompe peut tre suspendue dans toutes les positions par sa bride d entr e ou pos e sur les pieds dont elle est munie en partie basse Pour plus de d tails sur l installation de la pompe consulter l appendice Technical information Vaclon Plus 40 55 75 pumps User Manual 87
10. Figure 1 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 43 98 4 Installation procedure Installation Installation Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation to obtain the declared functioning specification the ambient temperature must be between 0 C and 85 C CAUTION The pump should be kept sealed with its pinch off tube until it is ready for attachment to the vacuum system NO To avoid injury never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off 44 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Installation procedure 4 The pump operation is optimized using one of the special Agilent controllers Dual MidiVac or MiniVac only CAUTION The safety specifications agreement using the pump is guaranteed using the Agilent controller only The VacIon Plus pump can be installed in any position For convenience a pump is usually mounted vertically with the inlet up For mounting other than vertical the pump can be supported by the mounting flange in any position Alternatively it should be supported using the mounting feet at the bottom of the pump For detailed informat
11. Italy Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 05 2011 Publication Number 87 900 105 01 E Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang
12. Magnet Ferrite 56 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 Specification Model Weight Ibs kg 40 37 17 55 39 18 75 42 19 Tested according to ISO DIS 3556 1 1992 Figures 6 to 16 show the pumping speed vs pressure diagrams for saturated and unsaturated Vaclon Plus 40 pumps and the pressure vs current diagrams for the same pump The diagrams are for pumps controlled by means of a Dual controller Figures 17 to 27 show the correspondent diagrams for VacIon Plus 55 pumps figures 28 to 38 show the correspondent diagrams for VacIon Plus 75 pumps The pumping speed of a newly regenerated i e baked sputter ion pump decreases during operation until it reaches a stabilized level known as saturation nominal pumping speed To saturate the Vaclon Plus 40 55 and 75 pumps it normally requires an amount of gas equal to 1 2 1 7 2 3 Torr litres mbar litres respectively Consequently pumps can operate for extended periods of time at low pressures in the non saturated state if they are properly conditioned Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 57 98 5 Technical Information Vaclon Plus 40 Starcell Vaclon Plus 40 Starcell Before Saturation LL 40 T After Saturation N PUMPING SPEED L SEC 0 107 1
13. 900 105 01 E 35 98 3 Proc dure pour l installation Utilisation Utilisation 36 98 Toutes les instructions pour le fonctionnement correct de la pompe Vaclon Plus sont fournies dans la notice de l unit de contr le Il est conseill de lire attentivement cette notice avant d utiliser la pompe Il est recommand de porter la pompe une pression de 1x10 Torrs mbars de facon obtenir un d marrage plus rapide Pour ce faire il est pr f rable de ne pas utiliser une pompe m canique scell e l huile mais au cas o il serait n cessaire d utiliser une telle pompe il est recommand d introduire un dispositif de retenue le long de la ligne de vide afin de r duire la pression due aux vapeurs d eau et d huile engendr es par la pompe m canique Essayer de r duire au minimum le temps o la pompe m canique est ouverte vers le syst me et vers la pompe ionique car ses vapeurs se r pandent dans le syst me des pressions inf rieures 1x10 Torrs mbars causant une contamination de celui ci Dans les syst mes o l huile doit tre compl tement absente il est pr f rable d effectuer ladite op ration l aide d une pompe Turbo Des d p ts hygroscopiques et l absorption d hydrogene dans le compos de titane peuvent provoquer par effet du vieillissement de la pompe l allongement du temps de d marrage Pendant l exposition l air le d p t du compos de titane absorbe de la vapeur d eau et cette action a pour c
14. Komponenten die mit dem Vakuum in Kontakt kommen nicht mit blo en H nden ber hrt werden Stets Handschuhe oder einen anderen geeigneten Schutz tragen Die Pumpe kann wenn sie einfach der Atmosph re ausgesetzt ist nicht besch digt werden Sie sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden Abbildung 1 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 23 98 2 Anleitung zur Installation Installation Installation VORSICHT Die Pumpe darf nicht in Umgebungen installiert und oder benutzt werden die ungesch tzt vor Witterungsbedingungen Regen Frost Schnee Staub und aggressiven Gasen sind und in denen Explosions und erh hte Brandgefahr besteht W hrend des Betriebes soll die Umgebungstemperatur zwischen 0 C und 85 C betragen um die angegebenen technischen Merkmale zu gew hrleisten Die Pumpe soll versiegelt und mit flachgedr cktem Eintrittsschlauch gehalten werden bis sie f r den Anschlu an das System bereit ist FALSCH Um Personensch den zu vermeiden darf die Hochspannungsleitung der Pumpe erst angeschlossen werden wenn die Pumpe im System installiert ist und alle Eintrittsflansche entsprechend angeschlossen oder geschlossen sind 24 98 Der Pumpenbetrieb wird nur durch den Einsatz speziell daf r vorgesehener Agilent Steu
15. Manual 87 900 105 01 E 27 98 2 Anleitung zur Installation Bedienungsschritte Die Stufen im Druck Stromst rke Diagramm sind charakteristisch f r die Funktionsweise des Dual Wenn die Stromaufnahme der Pumpe ein bestimmtes Ausma erreicht ndert die Steuereinheit die ausgangsseitige Hochspannung auf einen niedrigeren Wert ab 7 Wenn die Pumpe auf den atmosph rischen Druck gebracht wird ist trockener Stickstoff zu verwenden um die Aufnahme von Wasserdampf durch die Pumpenw nde zu verhindern Wenn die Pumpe zur F rderung von giftigen leicht entflammbaren oder radioaktiven Gasen benutzt wird sind die f r das jeweilige Gas vorgeschriebenen Vorg nge zu befolgen Die Pumpe nie bei Vorhandensein von explosivem Gas benutzen Wenn die Heizung installiert ist darf die Pumpe w hrend der Aufheizung und Abk hlung nicht ber hrt werden Die hohe Temperatur kann zu Personensch den f hren VORSICHT Keine elektronischen Ger te in die N he der Pumpe bringen Das darum befindliche Magnetfeld kann zu Funktionsst rungen der Ger te f hren 28 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Wartung Anleitung zur Installation 2 Die Pumpen der Serie VacIon Plus erfordern keine Wartung S mtliche Eingriffe d rfen nur von autorisiertem Personal vorgenommen werden Vor Eingriffen an der Pumpe ist diese von der Hochspannungsquelle zu trennen Bei eventueller Verschrottung einer
16. Rd Pin Chen City 324 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
17. al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere Figura 1 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 13 98 1 Procedura per l installazione Installazione Installazione Non installare e o utilizzare la pompa in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento per ottenere le specifiche tecniche dichiarate la temperatura ambiente deve essere compresa tra 0 C e 85 C hwerser4lta La pompa deve essere tenuta sigillata con il suo tubo di ingresso schiacciato finch non pronta per essere collegata al sistema AVVERTENZA NO Per evitare lesioni alla persona non collegare l alta tensione alla pompa prima che sia installata nel sistema e che tutte le flange di ingresso siano adeguatamente collegate o chiuse Il funzionamento delle pompe ottimizzato solo con l uso delle apposite unit di controllo Agilent Dual MidiVac o MiniVac 14 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Procedura per l installazione 1 aapi Il rispetto delle normative di sicurezza nell uso delle pompe garantito solo con l uso delle unit di controllo Agilent La pompa Vaclon Plus puo essere installata in qualsiasi posizione Per convenienza norma
18. and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Vaclon Plus 40 Vaclon Plus 40 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 3 98 Vaclon Plus 55 Vaclon Plus 55 4 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Vaclon Plus 55 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 5 98 Vaclon Plus 75 Vaclon Plus 75 6 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Contents Contents 1 Procedura per l installazione 11 Informazioni Generali 12 Preparazione per l installazione 13 Installazione 14 Uso 16 Procedure di uso 17 Manutenzione 19 Smaltimento 19 2 Anleitung zur Installation 21 Allgemeine Hinweise 22 Vor der
19. la tension de la pompe ionique descend apr s la fermeture de la soupape la rouvrir pour un pr pompage suppl mentaire D s que la pression diminue la tension remonte et la soupape de pr vide peut tre referm e Lorsque la tension a atteint 2 3 kV mettre l unit de contr le en tat de PROTECT Le syst me sera ainsi prot g contre toute augmentation de pression au del de 1x10 Torrs mbars lorsque la pompe n est pas contr lee Si une telle augmentation devait tre enregistr e l unit de contr le s teindrait automatiquement La pression de la pompe peut galement tre calcul e en relevant le courant et en convertissant la lecture en pression l aide du diagramme pression courant illustr dans l appendice Technical Information de ce manuel Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 37 98 3 Proc dure pour l installation Proc dure d utilisation Les paliers du diagramme de pression courant sont une caract ristique du mode de fonctionnement du Dual Lorsque le courant absorb par la pompe atteint des valeurs d termin es l unit de contr le porte la valeur de haute tension en sortie une valeur inf rieure 7 Lorsque l on porte la pompe la pression atmosph rique utiliser de l azote sec de facon viter que les parois de la pompe n absorbent de la vapeur aqueuse N IERI AU Lorsque la pompe est utilis e pour le pompage de gaz toxiques inflammables ou radioac
20. on the pump control unit and wait for current stabilization The current reading should not be higher than 10 nA at 3 kV Make sure that the control unit and the high voltage cable leakage current is negligible 4 If leakage current comes from the pump perform the high potting per the following procedure then recheck the pump and install the magnet 5 Ifitis not possible to high pot the pump the pressure reading is biased by the leakage current value Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 87 98 5 Technical Information Maintenance High potting A constant pump current when no vacuum leak exists is often caused by field emission currents which prevent the use of the pump current as a UHV pressure indicator To reduce this field emission current high potting should be performed High potting is the term used to describe the application of higher than normal operating voltage 10 12 KV 20 50 mA for the purpose of burning off whiskers sharp edges on the pump cathode High potting should be done under vacuum and preferably without pump magnets installed to reduce the drawn current The output of an appropriately sized AC transformer i e neon sign type may be applied to the pump High potting should be done carefully and in voltage steps since uncontrolled arcing inside the pump can cause permanent damage Slowly increase the applied voltage and watch the current meter for indication of arcing ins
21. pump can cause severe injury or death Before mounting the high voltage connector of the cable on the pump high voltage feedthrough or before removing it be sure the main power is removed from the control unit WARNING To avoid injury never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at least 10 seconds after removing the main power from the control unit to allow capacitors to discharge completely To disconnect the coaxial high voltage cable from the controller slide the safety locking sleeve very little sleeve travel is required from the control unit and at the same time pull on the male end of the cable connector to remove it from the socket on the control unit 80 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 Safety Interlock The VacIon Plus pump feedthrough in conjunction with the cable P N 929 0705 when used with the Agilent MidiVac and DUAL control units allows the operation of the High Voltage Cable Safety Inter lock feature When the high voltage cable connector is disconnected from the Vaclon Plus pump feedthrough the high voltage is automatically switched off by the control unit Heater Installation The heat
22. 0 9 10 10 107 10 105 104 PRESSURE mbar Figure 6 Pumping speed vs pressure for Nitrogen Before Saturation 30 i 20 LAT After Saturation 107 10 0 10 10 107 10 105 10 PRESSURE mbar Ar PUMPING SPEED L SEC Figure 7 Pumping speed vs pressure for Argon CURRENT A 10 10 9 10 5 10 7 10 5 105 10 4 PRESSURE mbar Figure8 Pressure vs current diagram 58 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 Vaclon Plus 40 Triode Before Saturation After Saturation N PUMPING SPEED L SEC 10 10 10 aot 107 10 103 104 PRESSURE mbar Figure9 Pumping speed vs pressure for Nitrogen Before Saturation 20 After Saturation Ar PUMPING SPEED L SEC 10 107 10 108 107 10 105 10 PRESSURE mbar Figure 10 Pumping speed vs pressure for Argon CURRENT A 10 10 1079 1078 1077 10 5 10 5 1074 PRESSURE mbar Figure 11 Pressure vs current diagram Vaclon Plus
23. 10 107 10 5 1077 10 5 10 3 10 4 PRESSURE mbar Figure 30 Pressure vs current diagram 66 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Vaclon Plus 75 Triode Technical Information 5 150 o D Before Saturation d 100 a LH wW amp u After Saturation o 2 0 10 10 1079 10 9 1077 107 10 5 10 PRESSURE mbar Figure 31 Pumping speed vs pressure for Nitrogen 150 g eo Im B 7 9 Before Saturation Ta ERA z N After Saturation lt LT NI ll P 10 10 107 107 10 8 105 10 PRESSURE mbar Figure 32 Pumping speed vs pressure for Argon z b 3 10 10 10 9 1078 1077 1075 105 107 PRESSURE mbar Figure 33 Pressure vs current diagram Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 67 98 5 Technical Information Vaclon Plus 75 Diode Vaclon Plus 75 Diode 150 Before Saturation After Saturation N PUMPING SPEED L SEC 10 11 4010 10 1079 1077 10 8 1075 1074 PRESSURE mbar Figure 34 Pumping speed vs pre
24. 105 01 E 73 98 5 Technical Information Vaclon Plus Pump Installation Vacuum Evaluation The ion pump is shipped in an evacuated condition Before removing the shipping flange for installation on a vacuum system it is recommended that the pump be started briefly to verify vacuum integrity and proper operation To verify the vacuum integrity of the new pump before venting 1 Connect the pump to the control unit as directed in the instruction manual of the control unit WARNING The high voltage which is present in the ion pump from the control unit can cause severe injury or death 2 With the main power switch in the OFF position plug the control unit into a suitable power source 3 Turn the power to ON 4 Observe the reading for an indication of one of the following conditions a Ifthe pump is free of leaks and is at a low pressure the pressure indication shall quickly fall to or below the 10 mbar range as the volume of gas is pumped b Ifthe pressure inside the pump is at or near atmospheric level an arc may strike inside the high voltage feedthrough giving a popping sound and the pump current will fluctuate If this occurs turn the power OFF immediately 5 If the vacuum integrity has been lost the pump should be leak checked with a mass spectrometer leak detector before installation on the system 74 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 Short Circui
25. 40 55 75 pumps User Manual 87 900 105 01 E 59 98 5 Technical Information Vaclon Plus 40 Diode Vaclon Plus 40 Diode 50 DIT III Before Saturation After Saturation 40 30 20 N PUMPING SPEED L SEC 107 40 70 10 9 10 8 4077 10 8 1075 104 PRESSURE mbar Figure 12 Pumping speed vs pressure for Nitrogen CURRENT A 10 10 1079 10 8 1077 1078 1075 107 PRESSURE mbar Figure 13 60 98 Pressure vs current diagram Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 Vaclon Plus 40 Noble Diode Before Saturation 40 DETTE After Saturation N PUMPING SPEED L SEC tot toto 10 104 107 109 10 104 PRESSURE mbar Figure 14 Pumping speed vs pressure for Nitrogen 50 go ul o a qa Before Saturation ul a ao o Pad zo Ir 2 a 4 After Saturation o to 10 1079 10 8 107 104 105 10 PRESSURE mbar Figure 15 Pumping speed vs pressure for Argon CURREN
26. 5 75 pumps User Manual 87 900 105 01 E Technical Information 5 Operating Procedure 1 10 11 Using a clean roughing pump evacuate the system to a minimum starting pressure per the charts on pages from 11 to 16 for the type and size of ion pump 10 Torr mbar or less is recommended A turbo molecular roughing pump is recommended When starting an ion pump a slight increase in vacuum pressure is normal as the internal components are heated and outgassed If possible leave the roughing pump connected to the system while starting the ion pump This will make the startup faster and easier Connect the control unit to a suitable power source and switch the power on Switch on high voltage to the pump and observe the current and voltage Fastest starting is obtained using a high applied voltage 7 kilovolts for example The applied voltage may be reduced later to optimize pumping and achieve the lowest vacuum pressure If started at 10 Torr mbar the voltage will start at approximately 800 volts and increase to full voltage as the pump starts operating The current will start at several milliamps and slowly decrease to microamps or nanoamps as low vacuum pressure is achieved When first starting the pump if the voltage decreases instead of increasing reduce the vacuum pressure then start the ion pump again When the pump reaches its full operating voltage you may close the roughing valve If the pump does not start afte
27. Installation 23 Installation 24 Gebrauch 26 Bedienungsschritte 27 Wartung 29 Entsorgung 29 3 Proc dure pour l installation 31 Indications Generales 32 Pr paration de l installation 33 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 7 98 Contents 8 98 5 Installation 34 Utilisation 36 Proc dure d utilisation 37 Maintenance 39 Mise au rebut 39 Installation procedure 41 General Information 42 Preparation for Installation 43 Installation 44 Use 46 Operating Procedure 47 Maintenance 49 Disposal 49 Technical Information 51 Vaclon Plus Pump Controllers 52 Description of the Vaclon Pump 53 Technical Specification 56 Vaclon Plus 40 Starcell 58 Vaclon Plus 40 Triode 59 Vaclon Plus 40 Diode 60 Vaclon Plus 40 Noble Diode 61 Vaclon Plus 55 Starcell 62 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Contents Vaclon Plus 55 Triode 63 Vaclon Plus 55 Diode 64 Vaclon Plus 55 Noble Diode 65 Vaclon Plus 75 Starcell 66 Vaclon Plus 75 Triode 67 Vaclon Plus 75 Diode 68 Vaclon Plus 75 Noble Diode 69 Outline Drawing 70 Stray Magnetic Field 71 Vaclon Plus Pump Installation 73 Typical Installation 76 Inlet Flange Connection 77 Control Unit Connection 80 Safety Interlock 81 Heater Installation 81 Heater Replacement 82 Bakeout Operation 83 Operating Procedure 85 Maintenance 86 Pump Troubleshooting 89 Vaclon Plus Pump Replacement Parts and Accessories 90 Vaclon Plus Pump Controll
28. Pumpe ist diese entsprechend der einschl gigen nationalen Vorschriften zu entsorgen Entsorgung Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 29 98 2 Anleitung zur Installation Entsorgung 30 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Vaclon Plus 40 55 75 pumps User Manual 3 Proc dure pour l installation Indications Generales 32 Pr paration de l installation33 Installation 34 Utilisation 36 Proc dure d utilisation 37 Maintenance 39 Mise au rebut 39 Traduction de la mode d emploi originale AXE Agilent Technologies 31 98 3 Proc dure pour l installation Indications Generales Indications Generales Cet appareillage a t concu en vue d une utilisation professionnelle Il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl me
29. T A 10710 10 9 10 5 1077 10 5 1075 1074 PRESSURE mbar Figure 16 Pressure vs current diagram Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 61 98 5 Technical Information Vaclon Plus 55 Starcell Vaclon Plus 55 Starcell 100 75 Before Saturation After Saturation N PUMPING SPEED L SEC 10 100 10 104 107 10 105 10 PRESSURE mbar Figure 17 Pumping speed vs pressure for Nitrogen 100 Before Saturation I TIS After Saturation Ar PUMPING SPEED L SEC 10 100 10 wt 107 10 10 10 PRESSURE mbar Figure 18 Pumping speed vs pressure for Argon CURRENT A 10 10 9 10 8 1077 10 5 1075 1074 PRESSURE mbar Figure 19 Pressure vs current diagram 62 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 Vaclon Plus 55 Triode 100 Before Saturation LAT After Saturation y LT N PUMPING SPEED L SEC 10 1079 109 10 107 105 105 10 4 PRESSURE mbar Fi
30. Vaclon Plus 40 55 75 pumps Models 919 1240 1230 1220 1210 919 1340 1330 1320 1310 919 1440 1430 1420 1410 919 1243 1233 1223 1213 919 1343 1333 1323 1313 919 1443 1433 1423 1413 919 1244 1234 1224 1214 919 1344 1334 1324 1314 919 1444 1434 1424 1414 Manuale di Istruzioni Bedienungshandbuch Notice de Mode D Emploi User Manual 87 900 105 01 E 09 2011 di Xr Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 105 01 E Edition Edition 09 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental o
31. age cable 8 Backing pump Valve si z LT Vaclon P 1 ti j rave Or aclon Pump optional Pinch off 2 6 e 4 Turbo Roughing Pump Diaphragm 8 Vacuum Pum p igh Voltage Chamber Cable g JE SE 3 B g lo Vacuum pump High Vacuum Controller Gauge 76 98 Figure 44 Typical installation Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 Inlet Flange Connection The pump should be mounted allowing sufficient clearance for installation and removal of the high voltage connector To achieve good performance of the ion pump at low vacuum pressure it is critical that atmospheric pollution and dust must not enter the pump during venting This type of contamination will not be re moved by the standard high temperature bake procedure and may degrade ion pump performance The pump should be kept sealed with its pinch off tubulation until it is ready for attachment to the vacuum system Before venting the pump consult the inspection procedure see preceding paragraph Vent the ion pump by opening the pinch off tubulation in a clean area free from smog dust pollen etc Venting with dry nitrogen gas is further recommended This can be done by placing a clean polyethylene bag over the ion pump flange Small pumps can be placed inside of the bag Purge the bag with clean dry nitrogen for several minutes then reach into the bag and release the internal vacuum using pliers to open the copper tube pi
32. as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 i Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Company Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A L Non Billable L Billable am New PO hard copy must be submitted with this form 3B exchange Repair upgrade Consignment Demo calibration Evaluation return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Techno
33. by reading the current and converting this reading to pressure with the appropriate pressure versus current graph shown in the appendix Technical Information of this manual Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 47 98 4 Installation procedure Operating Procedure The steps on the pressure current charts are a characteristic of the Dual step voltage operation When the current drawn by the Vaclon pump reaches the specified values the controller will change the high voltage output to a lower applied voltage 7 When venting the pump use dry nitrogen This will avoid water vapor absorption on the pump walls When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in the presence of explosive gases WARNING When the heating element is installed do not touch the pump during the heating and cooling phases The high temperature may cause a serious damage Do not put any electronic device near the pump since the magnetic field may cause a device malfunction 48 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Installation procedure 4 Maintenance Disposal The Vaclon Plus series pump does not require any maintenance Any work performed on the pump must be carried out by authorized personnel Before carrying out any work on the pump disconnect it from the H
34. e Steuereinheit an eine entsprechende Versorgungsquelle anschlie en und einschalten Die Spannung die Stromst rke und den Druck beobachten Wenn der Anlauf bei einem Druck von 5x10 Torr mbar erfolgt ist ist eine Spannung von ca 300 400 V typisch Ein Stromwert der sich dem Kurzschlu stromwert der Steuereinheit ann hert weist auf eine Leckstelle an der Pumpe und am System hin Ein zeitweiliger Anstieg des Vorvakuumdruckes ist w hrend der Anlaufphase normal W hrend des Anlaufes der Ionenpumpe soll das Vorvakuumventil ge ffnet bleiben bis ein angemessener Anlaufdruck erreicht ist Wenn die Spannung der Ionenpumpe nach Schlie ung des Ventils abf llt ist das Ventil f r eine zus tzliche Vorvakuumpumpung zu ffnen Sobald der Druck sinkt steigt die Spannung erneut an und kann das Vorvakuumventil geschlossen werden Wenn die Spannung 2 3 kV erreicht hat ist die Steuereinheit auf den Status PROTECT zu schalten Das System verf gt auf diese Weise ber einen Selbstschutz vor einem Druckanstieg ber 1x10 Torr mbar wenn die Pumpe nicht kontrolliert ist Falls ein solcher Anstieg stattfindet wird die Steuereinheit automatisch ausgeschaltet Der Pumpendruck kann auch berechnet werden indem die Stromst rke abgelesen wird und der abgelesene Wert mittels des Druck Stromst rke Diagramms im Anhang Technical Information des vorliegenden Handbuches in einen Druckwert umgerechnet wird Vaclon Plus 40 55 75 pumps User
35. e vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en oeuvre le processus de collecte et mise au rebut Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 39 98 3 Proc dure pour l installation Mise au rebut 40 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Vaclon Plus 40 55 75 pumps User Manual Installation procedure General Information 42 Preparation for Installation 43 Installation 44 Use 46 Operating Procedure 47 Maintenance 49 Disposal 49 Original Instructions GEB Agilent Technologies 41 98 4 Installation procedure General Information General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The Vaclon Plus series pumps are ion pumps commonly used to create ultra high vacuum due to their cleanliness ability to pump different gases and maintenance and vibration free operation The following paragraphs contain all the information necessary to guarantee the safety of the operator when us
36. eme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 19 98 1 Procedura per l installazione Smaltimento 20 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Vaclon Plus 40 55 75 pumps User Manual Anleitung zur Installation Allgemeine Hinweise 22 Vor der Installation 23 Installation 24 Gebrauch 26 Bedienungsschritte 27 Wartung 29 Entsorgung 29 bersetzung der Originalanleitungen GEB Agilent Technologies 21 98 2 Anleitung zur Installation Allgemeine Hinweise Allgemeine Hinweise Dieses Ger t ist f r den professionellen Gebrauch bestimmt Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie alle weiteren von Agilent mitgelieferten Zusatzdokumentationen genau lesen Bei vollst ndiger bzw teilweiser Nichtbeachtung der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mi achtung der nationalen Bestimmungen bernimmt Firma Agilent keinerlei Haftung Die Pumpen der Serie VacIon Plus sind Ionenpumpen die aufgrund ihrer Reinheit ihrer F higkeit alle Arten von Gas zu pumpen und ihres vib
37. er plated screws or apply high temperature lubricant to the screw threads Lubrication simplifies sealing and disassembly A recommended lubricant is Fel Pro C 100 5 Attach the nuts and tighten each one to 4 5 8 ft Ibs 0 6 1 1 Kgm of torque After tightening a nut always tighten the opposite nut with respect to the center of the flange This will partially close the gap between the flange faces 6 Repeat the sequential tightening for two more cycles 7 Continue tightening the bolts until the flange faces meet and a pronounced increase in torque is felt Note that it s not possible to install the screws from the lower side but only from the upper side of the flange To allow complete flexibility in the installation a stud mounting kit is available see Fig 45 For ordering information refer to the VacIon Plus pump replacement parts and accessories paragraph Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 VACUUM CHAMBER NUT ch WASHER ero DOUBLE END STUD 5 16 24 UNF TP WASHER NUT VACION PUMP Figure 45 Stud mounting kit Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 79 98 5 Technical Information Control Unit Connection Control Unit Connection WARNING The high voltage present in the high voltage cable which connects the control unit to the ion
38. ereinheiten Dual MidiVac oder MiniVac optimiert Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Anleitung zur Installation 2 nhi Die Einhaltung der Sicherheitsvorschriften beim Gebrauch der Pumpen ist nur bei Verwendung von Agilent Steuereinheiten gew hrleistet Die Pumpe Vaclon Plus kann in einer beliebigen Position installiert werden In der Regel wird sie aus Gr nden der Konvenienz in senkrechter Lage mit nach oben gerichtetem Eintrittsflansch montiert Bei anderweitigen Montagepositionen kann der Eintrittsflansch der Pumpe stets als Lagerung dienen Alternativ dazu besteht die M glichkeit die Pumpe auf die St tzf e am Pumpenboden aufzustellen Detaillierte Informationen zur Installation der Pumpe sind dem Anhang Technical Information zu entnehmen Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 25 98 2 Anleitung zur Installation Gebrauch Gebrauch 26 98 S mtliche Hinweise f r den korrekten Betrieb der Pumpen VacIon Plus sind im Handbuch der Steuereinheit enthalten Dieses Handbuch ist vor der Inbetriebnahme genau durchzulesen Es wird empfohlen die Pumpe auf einen Druck von 1x10 Torr mbar zu bringen um einen rascheren Anlauf zu gew hrleisten Zu diesem Zweck empfiehlt es sich keine lversiegelte mechanische Pumpe zu verwenden Falls hingegen eine derartige Pumpe benutzt werden mu soll an der Vakuumleitung eine Falle eingesetzt werden um den durch die Wasser und ld mpfe au
39. eriods are recommended when the pump has been used with heavy gas loads or when UHV pressure 10 Torr mbar or less is desired 4 Asthe pump and system cool down to room temperature a drop in pressure should be observed Note that the ion pump can be also baked when switched off into an external turbo pump through a bakeable isolation valve This method gives the best vacuum performance Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 83 98 5 Technical Information Bakeout Operation Bakeout of Vaclon Pump with the Integral Heaters 1 The integral heaters are to be powered with the appropriate voltage Please refer to the inscription on the heaters to apply correct voltage The integral heaters are designed to provide a temperature of 250 C to 300 C when the pump is wrapped in a 3 fold aluminium foil A three layer foil wrapping is advisable and suffi cient to achieve full bakeout regeneration if the standard European heaters 220 Vac are operated at 240 Vac thus preventing overheating Bakeout the VacIon pump for 24 hours If the pump is used in heavy gas load applications it is recommended to bakeout the pump for a longer period Wait until the pump cools down to room temperature and recovers its base pressure before using it in the application WARNING Do not touch the pump during the heating and cooling phases The high temperature may cause serious damage 84 98 Vaclon Plus 40 5
40. ers 91 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 9 98 Contents 10 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Vaclon Plus 40 55 75 pumps User Manual e 1 Procedura per l installazione Informazioni Generali 12 Preparazione per l installazione 13 Installazione 14 Uso 16 Procedure di uso 17 Manutenzione 19 Smaltimento 19 Traduzione delle istruzioni originali GEB Agilent Technologies 11 98 1 Procedura per l installazione Informazioni Generali Informazioni Generali Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Le pompe della serie VacIon Plus sono pompe ioniche utilizzate comunemente per applicazioni di ultra alto vuoto grazie alla loro pulizia capacit di pompare qualsiasi tipo di gas e del loro funzionamento senza vibrazioni e necessit di manutenzione Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono
41. fornite nell appendice Technical information Questo manuale utilizza le seguenti convenzioni AVVERTENZA I messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali ATTENZIONE messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura Le note contengono informazioni importanti estrapolate dal testo 12 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Procedura per l installazione 1 Preparazione per l installazione ATTENZIONE La pompa viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere la pompa e a non sottoporla ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Onde evitare problemi di degassamento non toccare con le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata La pompa non pu essere danneggiata rimanendo semplicemente esposta all atmosfera Si consiglia comunque di mantenerla chiusa fino
42. gure 20 Pumping speed vs pressure for Nitrogen 100 g Bn d a 5 Before Saturation n TN z LT 5 LU gos 4 AT After Saturation 5 N lt LA y FAIT 1 o to 100 10 10 107 10 105 104 PRESSURE mbar Figure 21 Pumping speed vs pressure for Argon CURRENT A 10 19 10 9 10 8 1077 10 5 10 5 107 PRESSURE mbar Figure 22 Pressure vs current diagram Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 63 98 5 Technical Information Vaclon Plus 55 Diode Vaclon Plus 55 Diode 100 After Saturation N PUMPING SPEED L SEC s tot 40 9 10 10 8 10 7 10 10 3 10 4 PRESSURE mbar Figure 23 Pumping speed vs pressure for Nitrogen CURRENT A 10 10 10 8 10 8 1077 10 8 10 5 10 4 PRESSURE mbar Figure 24 Pressure vs current diagram 64 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 Vaclon Plus 55 Noble Diode 100 Before Saturation After Saturation N PUMPING SPEED L SEC
43. h exchangeable high voltage feed through Exchange of the High Voltage Feedthrough CAUTION The high voltage feedthrough contains a ceramic insulator that can be damaged if excessive force is applied in torque in bending or in tension When installing or removing the feedthrough the applied torque should not exceed 2 Nm Rotate the feedthrough gently when making the threaded connection to avoid excessive force 86 98 1 Remove the 6 bolts of the Mini ConFlat flange connection see Fig 48 2 Remove the cable connection disc 3 Gently relieve the feedthrough from the metal gasket connection and turn the feedthrough counterclockwise until it is completely detached from the internal high voltage threaded connection Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 4 Replace the feedthrough and the copper gasket making sure that the feedthrough is connected to the pumps internal connector Check that the feedthrough is not shorted 5 Bake out the pump while it is operating and leave it to cool down then verify that the base pressure is below 10 Torr mbar Figure 48 High voltage feedthrough connection Leakage Current Check If the pump current reading is to be used as pres sure measurement check the pump leakage currents as follows 1 Turn offthe pump control unit 2 Remove the pump magnet 3 Turn
44. ide the pump as whiskers are burned away If arcing occurs wait at this voltage until the current is stable again Then slowly increase voltage again in steps up to a maximum of 12 kV The current should never exceed 50 mA WARNING Voltages developed in the High Potter power sup ply are potentially lethal Use caution during operation and ensure correct grounding connection 88 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Pump Troubleshooting Tab 2 Technical Information 5 Symptom Possible cause Correction procedure 1 Slow starting Starting vacuum pressure too high Reduce pressure to 10 Torr recommended 10 4 Torr minimum 2 Slow starting more than 30 minutes Air leaks which limit pressure to above 10 6 Torr mbar and cause longer starting time Leak check the vacuum system with a helium leak detector 3 Slow pump down due to long exposure of viton parts to air Viton releases considerable gas after long exposure to air A bell jar system which reached 1 5 x 10 8 Torr 2 x 10 8 mbar in 24 hours after 30 minutes air exposure will only reach 7 5 x 103 Torr 1 x 107 mbar in 24 hours after 20 hours air exposure With the system under vacuum pump for several days or heat to 100 150 C for up to 15 hours 4 Slow pump down due to absorption of vapours on pump and system walls Vapours and gases admitted to a system are absorbed
45. igh Voltage supply If a pump is to be scrapped it must be disposed of in accordance with the specific national standards Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 49 98 4 Installation procedure Disposal 50 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Vaclon Plus 40 55 75 pumps User Manual ee 5 Technical Information Description of the Vaclon Pump 53 Technical Specification 56 Vaclon Plus 40 Starcell 58 Vaclon Plus 40 Triode 59 Vaclon Plus 40 Diode 60 Vaclon Plus 40 Noble Diode Vaclon Plus 55 Starcell 62 Vaclon Plus 55 Triode 63 Vaclon Plus 55 Diode 64 Vaclon Plus 55 Noble Diode Vaclon Plus 75 Starcell 66 Vaclon Plus 75 Triode 67 Vaclon Plus 75 Diode 68 Vaclon Plus 75 Noble Diode Outline Drawing 70 Stray Magnetic Field 71 Original Instructions 61 65
46. ing element is a plane resistance heater shaped to fit the bottom of the pump body To install the element proceed as follows 1 Align the heating element with the bottom of the pump see Fig 46 Be sure that the written heater side is towards the bottom pr m RR m nm wg g WD UE gi Cm WRITTEN SIDE Figure 46 Aligning the heater and the screws 2 Insert the heating element into the bottom of the pump in contact with the pump body and centered and fix it with the suitable screws see Fig 47 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 81 98 5 Technical Information Heater Replacement CAUTION Turn the screws until they are in contact with the heater then make another one and half turn Do not tighten the screws too strongly otherwise the heater can be damaged It is advisable to make a 10 15 minutes initial operation of the heater in a ventilated room to allow the evaporation of residual internal elements Figure 47 Heater mounted Heater Replacement To replace the pump heaters first remove the faulty heater following in the reverse order the instructions of para HEATER INSTALLATION and the
47. ing the equipment Detailed information is supplied in the appendix Technical Information This manual uses the following standard protocol WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment The notes contain important information taken from the text 42 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Installation procedure 4 Preparation for Installation The pump is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Normal exposure to the environment cannot damage the pump Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust
48. ion about the pump installation see the appendix Technical Information Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 45 98 4 Installation procedure Use Use 46 98 All the instructions for the correct use of the VacIon Plus pumps are contained in the control unit manual Read the manual carefully before using the pump Rough pumping down to 1x10 Torr mbar is recommended for the most rapid starting Roughing with an oil sealed mechanical pump is not desirable but when used a trap in the roughing line is recommended to reduce pressure due to water vapor and oils from the mechanical pump Be careful to minimize the time that the mechanical pump is open to the system and ion pump since mechanical pump vapors will start diffusing into the system at pressures below 1x10 Torr mbar and cause contamination In systems where oils must be completely eliminated turbopump roughing pumps should be used Hygroscopic deposits and hydrogen absorption into titanium may cause starting times to increase with age During exposure to air the deposits of titanium compound absorb water vapor In subsequent start ups pump heating causes release of the water vapor and some previously pumped hydrogen thus the starting time may be lengthened Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Installation procedure 4 Operating Procedure Check that the controller HV polarity is correct for the pump positive polarity f
49. l returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e f requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Har
50. lmente viene montata in posizione verticale con la flangia di ingresso in alto Per installazioni in posizione diversa dalla verticale la pompa pu essere mantenuta sospesa in ogni posizione tramite la sua flangia di ingresso In alternativa puo essere appoggiata sui piedini al fondo della pompa stessa Per informazioni dettagliate sull installazione della pompa vedere l appendice Technical Information Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 15 98 1 Procedura per l installazione Uso Uso 16 98 Tutte le istruzioni per il corretto funzionamento delle pompe VacIon Plus sono contenute nel manuale dell unit di controllo Leggere attentamente tale manuale prima dell utilizzo Si raccomanda di portare la pompa ad una pressione di 1x10 Torr mbar in modo da ottenere un avvio pi rapido A questo scopo amp meglio non utilizzare una pompa meccanica sigillata con olio ma se deve essere utilizzata una tale pompa si raccomanda di inserire una trappola lungo la linea di vuoto per ridurre la pressione causata dai vapori di acqua e di olio provenienti dalla pompa meccanica Cercare di ridurre al minimo il tempo in cui la pompa meccanica aperta verso il sistema e verso la pompa ionica poich i suoi vapori si diffondono nel sistema a pressioni inferiori a 1x10 Torr mbar causando una contaminazione dello stesso Nei sistemi in cui l olio deve essere completamente assente meglio utilizzare pompe Turbo per la
51. logies to discuss alternatives if this requirement presents a problem The equipment listed above check one El HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic L Corrosive L Reactive L1 Flammable L Explosive LJ Biological L Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next pag Detailed Description of Malfunction Please provide the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature Date Pg 2 3 Agilent Technologies Vacuum Products Division
52. materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Sealthe product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the R was issued Product being returned under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon
53. n reassembly the new heater following the instructions of the same paragraph 82 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 Bakeout Operation When a Vaclon pump does not reach the desired base pressure and there are no leaks it is necessary to bake the system This is done by heating the pump and all the components in the system and is generally required to achieve base pressure less than 10 mbar 1 Heatthe pump body and the system with a bakeout oven unit or heating strips to temperatures between 150 C and 250 C 250 C is the maximum allowable for most bakeable high voltage cables This temperature is high enough to degas the pump surfaces of water vapor without damaging the magnet and high voltage connector Note that the system components must be compatible with the bakeout temperature The heating must be approximately even on all surfaces or evaporated water will condence on the colder surfaces resulting in an incomplete bake and preventing achievement of UHV vacuum pressure 2 Leave the pump control unit on and monitor the pressure Agilent recommends that current during bake not exceed 15 mA If this value is exceeded turn the bakeout off and then on again when low pressure is restored To control the heaters and to monitor the high pressure limit during bakeout an automatically controlled relay may be used 3 Bake the Vaclon Plus pump for at least 24 hours Longer bakeout p
54. nch off CAUTION Do not open the pinch off seal with a saw or grinder These methods will cause metal particles to be drawn into the pump by the inrushing air as the pump is opened WARNING The pinch off seal is extremely sharp Be careful when opening Watch your fingers Use appropriate procedures to maintain the clean condition of the pump and vacuum system Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 71 98 5 Technical Information Inlet Flange Connection Unscrew the main flange bolts and lift the blank flange with the help of a bolt screwed into the available threaded hole Remove the ConFlat flange and the copper gasket plate Some particles of copper oxide may adhere to the outer edge of the flange gasket Be careful not to allow them or any other foreign materials to fall into the pump Connect the ion pump to the vacuum chamber with a short length and large diameter tubulation in or der to retain as much pumping speed as possible Proceed as follows 1 Inspectthe mating flanges for cleanliness and absence of scratches on the knife edge 2 Place a new copper gasket between pump flange and vacuum chamber flange 3 Bolt mating flanges of the pump to the chamber with the screws provided with the ion pump For flanges over NW 35 2 75 o d also mount washers below the nuts and screw heads Lubrication is essential to prevent galling of the nut and screw after bakeout 78 98 4 Use silv
55. nd General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F Ili Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com NAME COMPANY FUNCTION ADDRESS TEL N FAX N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc DATE CORRECTIVE ACTION PLAN ACTUATION LOG N by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc Ee Agilent Technologies Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 8 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous
56. niVac AUHV Dual Please refer to the Agilent Vacuum Catalogue to choose the correct controller for each pump Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 91 98 5 Technical Information Vaclon Plus Pump Controllers 92 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E XE Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely CZ d LT Giampaolo LEVI Vice President a
57. ntaire fournie par Agilent avant d utiliser l appareil Agilent d cline toute responsabilit en cas de non respect total ou partiel des instructions fournies d op rations non autoris es d utilisation impropre par du personnel non form ou contraires aux r glementations nationales sp cifiques Gr ce leur propret leur capacit de pomper tous les types de gaz leur fonctionnement sans vibrations et l absence d entretien les pompes de la s rie Vacion Plus sont des pompes ioniques g n ralement utilis es pour des applications de vide ultra pouss Les paragraphes suivants fournissent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information Cette notice utilise les signes conventionnels suivants AVERTISSEMENT Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une man uvre sp ciale dont la mauvaise ex cution risque de provoquer de graves l sions ATTENTION Les messages d attention apparaissent avant certaines proc dures dont le non respect peut endommager s rieusement l appareillage 32 98 Les notes contiennent des renseignements importants extrapol s du texte Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Proc dure pour l installation 3 Pr paration de l installation ATTENTION
58. o di vapore acqueo da parte delle pareti della pompa RTENZA A Quando la pompa viene utilizzata per il pompaggio di gas tossici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza di gas esplosivi A VVE VVE A Quando installato il riscaldatore non toccare la pompa durante le operazioni di riscaldamento e di raffreddamento L elevata temperatura pu causare lesioni alle persone RTENZA ATTENZIONE Non avvicinare dispositivi elettronici alla pompa Il campo magnetico attorno ad essa puo provocare dei malfunzionamenti dei dispositivi stessi 18 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Procedura per l installazione 1 Manutenzione Le pompe della serie VacIon Plus non richiedono alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato AVVERTENZA Prima di effettuare qualsiasi intervento sulla pompa scollegarla dall alta tensione Qualora una pompa dovesse essere rottamata procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche Smaltimento Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insi
59. on the walls of the system and pump Subsequent reduction in pressure depends on the rate of depletion of this vapour Heavy hydrocarbons are most troublesome because of their relative low vapour pressure and they are very difficult to remove even by baking Bake the system walls thereby accelerating the desorption process Baking mobilizes the vapours so they can be cracked and pumped by discharge see para BAKEOUT OPERATION 5 Slow starting or slow pump down High voltage feedthrough is leaking Replace the feedthrough 6 Current higher than expected at any given pressure lon pump leakage current causing higher pressure reading Highpot the pump 7 System fails to achieve desired UHV vacuum pressure System not fully baked Water vapour limits base pressure Bake the system walls thereby accelerating the desorption process Baking mobilizes the vapours so they can be cracked and pumped by discharge see para BAKEOUT OPERATION 8 System fails to achieve desired UHV vacuum pressure System not appropriately cleaned for UHV Excessive outgassing from walls limits base pressure Clean all components for UHV and bake the system again Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 89 98 5 Technical Information Vaclon Plus Pump Replacement Parts and Accessories Vaclon Plus Pump Replacement Parts and Accessories
60. ons quence qu au d marrage suivant le chauffage de la pompe entrainera la dispersion de la vapeur et d une partie de l hydrog ne pomp e pr c demment ce qui aura pour effet d allonger le temps de d marrage Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Proc dure pour l installation 3 Proc dure d utilisation Contr ler que la polarit de l unit de contr le soit correcte pour la pompe polarit positive pour les pompes Diode et n gative pour les pompes StarCell et Triode Se reporter au manuel correspondant et observer la proc dure suivante pour l utilisation de la pompe 1 A l aide d une pompe de pr vide porter le syst me une pression minimale de d marrage en suivant le tableau de la page 10 et en fonction du type de pompe ionique Brancher l unit de contr le une source d alimentation appropri e et l allumer Contr ler la tension le courant et la pression Lorsque la mise en route est effectu e une pression de 5x10 Torrs mbars la tension est g n ralement d environ 300 400 V Une valeur de courant proche du courant de court circuit de l unit de contr le r vele l existence d une fuite dans la pompe et dans le syst me Au cours de la phase de d marrage un accroissement momentan de la pression de pr vide est normal Laisser la soupape de pr vide ouverte pendant le d marrage de la pompe ionique tant qu une pression de d marrage appropri e n a pas t atteinte Si
61. or Diode pumps and negative for StarCell or Triode pumps Refer to the relevant pump control unit instruction manual and follow the procedure below when operating the pump 1 With a clean roughing pump establish a minimum starting pressure in the vacuum system per the table on page 10 for the type and size of ion pump Plug the control unit into a suitable power source and switch the power ON Observe the voltage current and roughing pressure If started at 5x10 Torr mbar a controller voltage of approximately 300 to 400 volts is typical A current value near the short circuit current of the control unit could indicate that an unconfined flow discharge exists in the pump and system A temporary rise in roughing pressure will usually be noticed during any starting procedure Allow the roughing valve to remain open after turning on the ion pump until an adequate starting pressure is reached If the ion pump voltage drops after closing the roughing valves reopen the valve for additional rough pumping As the pressure decreases the voltage again will rise and the roughing valve may be closed When the voltage has increased to 2 3 kV place the control unit in the PROTECT condition The system is now automatically protected against pressure increases to 10 Torr mbar when the pump is left unattended If such an increase should occur the control unit will be turned off automatically The pressure in the pump can also be determined
62. r 30 minutes of pumping see the section PUMP TROUBLE SHOOTING Once the pump reaches its base pressure with stable voltage and current the ion pump may be baked at high temperature if required per the section titled BAKEOUT OPERATION To stop the ion pump simply switch off the high voltage The pump surfaces will continue to pump for a few minutes depending on the system pressure When venting the pump use clean dry nitrogen This will avoid water absorption on the pump surfaces and make subsequent pump downs easier Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 85 98 5 Technical Information Maintenance Maintenance WARNING The high voltage present in the high voltage cable which connects the control unit to the ion pump can cause severe injury or death Before mounting the high voltage connector of the cable on the pump high voltage feedthrough or before removing it be sure the main power is removed from the control unit Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at least 10 seconds after removing the main power from the control unit to allow capacitors to discharge completely Vaclon Plus pumps are maintenance free In case of life time expiry or premature failure of the pump please contact your nearest Agilent sales service office for repair The Vaclon Plus 40 55 and 75 pumps are designed wit
63. r consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows
64. rations und wartungsfreien Betriebes allgemein f r Ultrahochvakuumanwendungen zum Einsatz kommen In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf eine spezielle Prozedur oder Praktik die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnte VORSICHT Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam da bei Nichteinhaltung Sch den am Ger t entstehen k nnen Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden 22 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Anleitung zur Installation 2 Vor der Installation VORSICHT Die Pumpe wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Beim Auspacken vorsichtig vorgehen damit die Pumpe nicht f llt oder St en oder Vibrationen ausgesetzt wird Das Verpackungsmaterial ist ordnungsgem zu entsorgen Es ist vollst ndig recyclebar und entspricht der EG Richtlinie 85 399 f r den Umweltschutz Um Entgasungsprobleme zu vermeiden d rfen die
65. ressione di pre vuoto normale durante la fase di avvio Lasciare la valvola di pre vuoto aperta durante l avvio della pompa ionica finch non si raggiunge una adeguata pressione di avvio Se la tensione della pompa ionica scende dopo la chiusura della valvola riaprirla per un pre pompaggio aggiuntivo Appena la pressione diminuisce la tensione cresce nuovamente e la valvola di pre vuoto pu essere chiusa Quando la tensione ha raggiunto i 2 3kV mettere l unit di controllo nello stato PROTECT Il sistema sar cosi autoprotetto dall incremento della pressione oltre 1x10 Torr mbar quando la pompa non amp controllata Nel caso in cui ci fosse un tale incremento l unit di controllo viene spenta automaticamente La pressione nella pompa pu anche essere calcolata leggendo la corrente e convertendo la lettura in pressione tramite l apposito diagramma pressione corrente illustrato nell appendice Technical Information di questo manuale Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 17 98 1 Procedura per l installazione Procedure di uso gradini nei diagrammi pressione corrente sono una caratteristica del modo di funzionamento del Dual Quando la corrente assorbita dalla pompa raggiunge determinati valori l unit di controllo cambia il valore dell alta tensione in uscita ad un valore pi basso 7 Quando si porta la pompa alla pressione atmosferica usare azoto secco in modo da evitare l assorbiment
66. s der mechanischen Pumpe erzeugten Druck zu verringern Es ist zu versuchen die Zeit auf ein Mindestma zu reduzieren w hrend der die mechanische Pumpe zum System und zur Ionenpumpe ge ffnet ist da sich ihre D mpfe bei Dr cken unter 1x10 Torr mbar im System verbreiten und dessen Verunreinigung verursachen Bei Systemen die vollkommen lfrei sein m ssen erweisen sich f r den obengenannten Vorgang Turbopumpen als geeigneter Hygroskopische Ablagerungen und die Absorption von Wasserstoff in der Titanverbindung k nnen die Anlaufzeit verl ngern und eine k rzere Standzeit der Pumpe verursachen Die Ablagerungen der Titanverbindungen absorbieren Wasserdampf wenn sie der Luft ausgesetzt werden Dadurch bewirkt beim anschlie enden Anlaufvorgang die Aufheizung der Pumpe die Abgabe des Dampfes und eines Teils des zuvor gepumpten Wasserstoffs so daf sich die Anlaufzeit verl ngert Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Anleitung zur Installation 2 Bedienungsschritte Es ist zu kontrollieren daf die Steuereinheit in bezug auf die Pumpe richtig gepolt ist positive Polarit t f r Dioden Pumpen und negative f r StarCell oder Triode Pumpen Es ist nach dem diesbez glichen Handbuch vorzugehen f r den Gebrauch der Pumpe sind die folgenden Bedienungsschritte zu beachten 1 Mit einer Vorvakuumpumpe das System auf einen Mindestanlaufdruck gem Tabelle 10 in Abh ngigkeit vom Ionenpumpentyp bringen Di
67. ssure for Nitrogen CURRENT A 40 10 10 9 10 8 1077 108 10 5 10 4 PRESSURE mbar Figure 35 Pressure vs current diagram 68 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Technical Information 5 Vaclon Plus 75 Noble Diode 150 Before Saturation After Saturation N PUMPING SPEED L SEC to 10 0 10 10 107 10 105 104 PRESSURE mbar Figure 36 Pumping speed vs pressure for Nitrogen 150 o u 4 100 a wu ul a 9 A Before Saturation 39 LH 5 5 LH IN HEN IL After Saturation D rH qo 100 109 0 107 104 108 104 PRESSURE mbar Figure 37 Pumping speed vs pressure for Argon CURRENT A 10710 109 10 8 1077 10 8 10 5 1074 PRESSURE mbar Figure 38 Pressure vs current diagram Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 69 98 5 Technical Information Outline Drawing Outline Drawing The following figure shows the outline drawing for the VacIon Plus pumps dimensions inches mm 7 165 182 00 REF VACION PLUS 75
68. suddetta operazione Depositi igroscopici e l assorbimento dell idrogeno all interno del composto di titanio possono provocare l allungamento del tempo di avvio con l invecchiamento della pompa Durante l esposizione all aria il deposito del composto di titanio assorbe vapore acqueo in conseguenza di ci al successivo avvio il riscaldamento della pompa provoca il rilascio del vapore e di parte dell idrogeno pompato precedentemente con l effetto dell allungamento del tempo di avvio Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Procedura per l installazione 1 Procedure di uso Controllare che la polarit dell unit di controllo sia corretta per la pompa polarit positiva per le pompe Diode e negativa per le StarCell e le Triode Fare riferimento al relativo manuale ed osservare la seguente procedura per l uso della pompa 1 Tramite una pompa di pre vuoto portare il sistema da vuoto ad una pressione minima di avvio in accordo alla tabella di pagina 10 ed a seconda del tipo di pompa ionica Collegare l unit di controllo ad una apposita fonte di alimentazione ed accenderla Osservare la tensione la corrente e la pressione Se l avvio avvenuto ad una pressione di 5x10 Torr mbar tipica una tensione di circa 300 400 V Un valore di corrente prossimo alla corrente di corto circuito dell unit di controllo indice dell esistenza di una perdita nella pompa e nel sistema Un temporaneo incremento della p
69. tifs suivre les proc dures appropri es chaque gaz Ne pas utiliser la pompe en pr sence de gaz explosifs NEA IA Lorsque le r chauffeur est install viter de toucher la pompe pendant les op rations de chauffage et de refroidissement La temp rature lev e peut provoquer des br lures gt ATTENTION Ne pas approcher de dispositifs lectroniques de la pompe Le champ magn tique environnant cette derni re peut entra ner des dysfonctionnements desdits dispositifs 38 98 Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E Proc dure pour l installation 3 Maintenance Les pompes de la s rie VacIon Plus ne demandent aucun entretien Toute intervention doit tre ex cut e par un personnel agr AHSA ANR Avant toute intervention sur la pompe la d brancher de la haute tension En cas de mise au rebut d une pompe proc der son limination dans le respect des normes nationales en vigueur Mise au rebut Signification du logo WEEE imprim sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat d
70. ting pressures and have high speed for inert gases The Vaclon Plus Diode and Noble Diode pumps re quire a lower starting pressure i e 10 Torr mbar The Diode contains more titanium than triode pumps and thus has a higher hydrogen capacity and longer life The tantalum in the Noble Diode pump enhances the noble gas pumping capacity although it somewhat reduces the high getterable gas pumping speed that the standard diode pump provides The Vaclon Plus StarCell is the latest variation of the Triode configuration Its patented design makes this ion pump the only one that can handle a high amount of Noble Gases better than Noble Diode and Triode and Hydrogen comparable to the Diode A positive polarity high voltage supply is required to operate Diode and Noble Diode pumps A negative polarity high voltage supply is required to operate Triode and StarCell pumps since the anode is grounded and the cathode is held at negative potential The inlet ConFlat flanges for each model are Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 53 98 5 Technical Information Description of the Vaclon Pump Vaclon Plus 40 2 4 NW 35 Vaclon Plus 55 4 4 NW 63 Vaclon Plus 75 6 NW 100 Fig 2 shows the VacIon Plus 40 55 and 75 pumps Fig 5 shows the main assemblies of the pump Figure2 Vaclon Plus 40
71. ts If there is a short circuit between the anode and cathodes in the pump or cathode to pump body the short circuit current of the control unit will be drawn and low voltage will be indicated If a short circuit exists in the control unit or high voltage cable and connector low voltage will also be observed when the high voltage connector is disconnected from the pump refer to the control unit manuals An ohm meter reading on the pump feedthrough may not be effective in finding a short Short circuits may be caused by mechanical shock to the pump If the pump is shorted contact Agilent Vaclon Plus 40 55 75 pumps User Manual 87 900 105 01 E 75 98 5 Technical Information Typical Installation Typical Installation A typical installation is shown in the following figure and consists of 1 Vaclon Plus pump 2 A Valve to seal off the pump from the rest of the system if required 3 The control unit 4 Aclean roughing pump i e turbo or sorption 5 Athermocouple gauge capable of indicating pressure from atmosphere to 10 mbar range 6 A valve to seal off the roughing pump from the vacuum chamber Roughing lines are usually made of stainless steel or copper tubing or other low vapor pressure material 7 High volt
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