User`s Manual - Newport Corporation
Contents
1. 5 1 Stepper Motor Characteristics Motor Angle by Step RMS Current Resistance Inductance Newport C per Phase mH Utilization UE41PP 1 8 0 43 2 9 3 4 Mini Step UE41PPV6 1 8 0 23 5 7 11 3 Full Step UE63PP 1 8 1 56 1 16 2 9 Mini Step 5 2 Command Signals for Stepper Motors Command Signals UE41PP UE63PP 1 2 3 4 Phase 1 oo A lll Direction Phase 2 L 1 Phase 3 Direction Phase4 Direction Displacement Direction QD Newport Experience Solutions 7 EDH0157En1031 02 12 MTM Series Long Travel Steel Linear Stages 5 3 DC Motor Characteristics Motor Nominal Max RMS Max Peak Resistance Inductance Tachometer Voltage V Current Current mH Const V krpm UE404CC 30 0 7 1 18 6 6 6 3 10 UE511CC 48 1 5 2 3 5 1 3 2 7 31096 5 4 Command Signals for DC Motors Motor Motor Tachometer Tachometer Motor Tachometer Displacement Direction Motor Tachometer2. MTM 21 holes 1 4 20 thd 1 0 25 4 spacing 4 holes 0 26 6 5 clr Base M MTM on C3 8 0 x 6 0 203 2 x 152 4 1 plate 25 holes M6 thd 98 25 spacing y d TT h 9 8 S x b G 35 LM ded plate _ on the carriage G 4 holes 26 6 5 clr on 0 7 9 200 Dimensions in inches millimeters WARNING The working surface flatness directly influences stage accuracy and performance 8 2 Interfaces Disassembling Disassemble the top plate fixed on the carriage of the stage with 4 CHc M6 x 39 in 10 mm screws O 2 48 in 63 mm Newport Experience Solutions 15 EDH0157En1031 02 12 MTM Series Long Travel Steel Linear Stages Turn the stage upside down El Disassemble the base plate fixed on the body of the stage with 4 CHc M6 x 39 in 10 mm screws 15 04 in 128 mm 8 3 Interface Plates Mounting Make steps of Interfaces Disassembling chapter in the opposite order Newport EDH0157En1031 02 12 16 Experience Solutions MTM Series Long Travel Steel Line
3. 15 8 2 Interfaces Disassembling rini iet eter RR 15 8 3 Interface Plates Mounting 16 8 4 Assembly ee ue doe ee et oer qaqa Ea 17 9 0 18 10 0 Accessories EQ160 Brackets 19 11 0 Maintenance 1 7 essent teens 20 11 1 M intenatiCe aire eoe here einer ert rne o 20 11 2 Repairing seinieni ninnan GR AE 20 Il S U CaliDratio Misono EEE eee reer eer 20 Service 21 Newport iv Experience Solutions MTM Series Long Travel Steel Linear Stages EC Declaration of Conformity CNC ANANAS SUP qM quM quM dua d Con zx MTM Series eo SS EC Declaration of Conformity ANC following Annex 1 of Directive 2006 42 EC on machinery G HA Ur The manufacturer PAY MICRO CONTROLE Spectra Physics gt 1 rue Jules Guesde ZI Bois de l Epine BP189 vA F 91006 Evry FRANCE SN Hereby declares that the machinery 6 Description MTM E Function Long Travel Steel Linear Stage e Models M MTM 100 150 200 250 CC1 CC 1 PE1 PE1BVO PE 1 PE 1 BV6 PP 1 1 0 6 the technical file of which was compiled by KS Mr Dominique DEVIDAL Quality Director u MICRO
4. o o O 9 6 0 6 Direction o o o o oo Direction 4 In the above drawings Motor signal is referred to Motor signal Tacho Generator signal is referred to Tacho Generator signal HN When the stage moves in Direction the Motor voltage is higher than Motor voltage and Tacho Generator voltage is higher than Tacho Generator voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage Tacho Generator voltage is lower than Tacho Generator voltage 5 5 Sensor Position i Home Position Origin m at Center of Travel Range POCHE _ 4 EOR Limit O VU Mechanical _ m P Zero n Index Pulse Index Pulse sika StageTravel Range Motion wj Direction End of Run and Mechanical Zero are TTL type 5 V 5 16 mA max Use of the Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active signals and should not be connected
5. 2 End of Run 2 21 E 45 V Encoder 5 V Encoder 22 0V Encoder 0 V Encoder Connector E i iy t M Connector Connector Cap Cap Cap The Mechanical Zero logic signal is open collector type It supports until 30 V and 10 mA 2 Open collector type with a 5 6 V protective Zener diode Mechanical Zero lin max 10 mA V max 30 V If the Mechanical Zero output is not used a 1 0 25 W resistor must be connected between pins 13 and 21 End of Run lin max 16 mA V max 5 6 V Encoder and Index Pulse are differential pair type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 261 532 or MC3486 EDH0157En1031 02 12 14 Newport Experience Solutions MTM Series Long Travel Steel Linear Stages m Mounting 8 1 Stage Mountings WARNING Before to use a M MTM stage it is imperative to fix it directly on a rectified working surface from holes located on the mounting plate on another stage directly or with a mounting interface but in no case the stage has to remain without fastening It is equally necessary to fasten the device to move on the carriage directly removing the plate on the top of the stage
6. diii aasan aa ae editos 4 3 3 Load Specification Definitions 5 3 4 Load Characteristics and Stiffness 5 So Stage Weight 5 40_ uU rr 6 4 1 St pper Drive Versions ku l er e rt Reds 6 4 2 DC Servo Drive Versions 7 5 0 Mortor 7 5 1 Stepper Motor Characteristics 7 5 3 DC Motor Characteristics 8 5 4 Command Signals for DC Motors esses 8 bib Sensor P sito Nesia ever eR census Te RR REESE ER REESE 8 5 6 Feedback Signal Position L n n tnter hern ho ni 9 PInOUtS e de 10 6 0 Connection to Newport Controllers 11 6 1 Warnings on controllers o eene 11 0 2 C 12 6 3 Cables y 12 7 0 Connection to Non Newport Controllers 14 QD Newport Experience Solutions iii EDH0157En1031 02 12 MTM Series Long Travel Steel Linear Stages EDH0157En1031 02 12 8 0 15 8 1 Stage Mountings
7. mA amp Sensors 1 0v Power Supply EDH0157En1031 02 12 MTM Series Long Travel Steel Linear Stages Pinouts The 25 pin Sub D connection for the M MTM stages is given in the following table UE41PP UE41PPV6 UE404CC amp UE63PP amp UE511C 1 Phase 1 1 Tachometer 2 Phase 1 2 Tachometer 3 Phase 2 3 Tachometer 4 Phase 2 4 Tachometer 5 Phase 3 5 Motor 6 Phase 3 6 Motor 7 Phase 4 7 Motor 8 Phase 4 8 Motor oe 9 N C 9 N C 10 N C 10 N C E 11 N C 11 N C 12 N C 12 N C 13 Mechanical Zero 13 Mechanical Zero cu 14 Shield Ground 14 Shield Ground e 15 Index Pulse I 15 Index Pulse I gt 0 V logic 16 0 V logic 17 End of Run 17 End of Run 18 End of Run 18 End of Run 19 Encoder Phase A 19 Encoder Phase A 20 Encoder Phase B 20 Encoder Phase B 21 Encoder Power 5 V 21 Encoder Power 5 V 22 0 V Encoder 22 0 V Encoder 23 Encoder Phase A 23 Encoder Phase A 24 Encoder Phase B 24 Encoder Phase B 25 Index Pulse I 25 Index Pulse I Newport EDHO0157En1031 02 12 10 Enos Soles MTM Series Long Travel Steel Linear Stages m Connection to Newport Controllers 6 1 Warnings on controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read
8. newport com Service RMAs amp Returns Tel 800 222 6440 e mail rma service newport com Europe MICRO CONTROLE Spectra Physics S A S 1 rue Jules Guesde Bat B ZI Bois de l pine BP189 91006 Evry Cedex France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport fr com Service amp Returns Tel 33 0 2 38 40 51 55
9. opposite motor SS a 0 Origin at stage center Origin on motor side Direction S o h go 9 Direction Position measuring is performed with 2 000 cts rev encoder Stepper or 4 000 cts rev encoder DC integral with the motor shaft On the drive leadscrew side opposite motor M MTM stages are equipped with a hexagon socket A 2 5 mm wrench permits a manual control of the carriage The modular design of M MTM stages brings you the flexibility to choose the drive configuration that best matches your specific application requirements high resolution 0 1 pm version or higher torque 1 um version DC motor or stepper motor driven versions with mini step or full step drive options For optimal performance we recommend the use of our motion controllers The M MTM Series stages are supplied with a 3 meter cable for connection to our motion controllers QD Newport EDH0157En1031 02 1 2 2 Experience Solution
10. CONTROLE Spectra Physics Zone Industrielle B P 29 CS F 45340 Beaune La Rolande France 4 a AG complies with all the relevant provisions of the Directive 2006 42 EC on machinery magnetic compatibility complies with all the relevant provisions of the Directive 2004 108 EC relating to electro DA S was designed and built in accordance with the following harmonised standards d NF EN 61326 1 2006 Electrical equipment for measurement control and a laboratory use EMC requirements Part 1 General requirements OY NF EN 55011 2007 Class A OAS was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 SUN NF EN 61000 4 6 AO A a SN ORIGINAL DECLARATION a SN Done in Beaune La Rolande on 09 June 2011 9 3 Dominique DEVIDAL x Quality Director Pa 4 Ges Newport Experience Solutions EDH0157En1031 02 12 MTM Series Long Travel Steel Linear Stages Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur General Warning or Caution The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible The presence
11. Long Travel Steel Linear Stages RoHS A gt USER S MANUAL Nevvport Experience Solutions For Motion Think Newport MTM Series Long Travel Steel Linear Stages Warranty A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used 9 EDH0157En1031 02 12 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument trans portation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or mis use of any product or part CAUTION Warranty does not apply to damages resulting from ncorrect usage Load on the stage greater than maximum specified load Carriage speed
12. PACING ON 92 203 2 x 152 4 n 220 lt DC Servo Drive 25 PIN SUB D CONNECTOR ru 4 HOLES 6 5 CLR ON z 200 L2 EDH0157En1031 02 12 Dimensions in mm Model Travel Range L A B M MTM100 3 9 11 4 100 290 M MTM150 168 13 4 150 340 1 4 20 1 0 M MTM200 193 15 4 M6 25 200 391 M MTM250 219 17 4 250 442 Dimensions in mm Version Ly PP1 6 3 159 6 PP 1 7 1 181 6 PE1 5 6 142 5 PE 1 8 7 220 6 CC1 8 1 205 CC 1 9 5 241 1 18 Newport Experience Solutions MTM Series Long Travel Steel Linear Stages 10 0 Accessories EQ160 Brackets EQ160 Series right angle brackets to order separately can be used for ver tical mounting configurations of an M MTM stage Model Description EQ160 S Right Angle Bracket for M MTM100 150 EQ160 L Right Angle Bracket fo
13. ad perpendicular to bearings Axial Load Capacity Cx Maximum load along the direction of the drive train Off Centered Load Q Maximum cantilever load a stage can move lt Cz 1 D 100 D Cantilever distance 3 4 Load Characteristics and Stiffness Cz Normal center load capacity on bearings 1000 N Cx Direct load capacity on X axis 200 PE1 PE 1 PP 1 150 N PP1 CC 1 100 N CC1 Cx Inverse load capacity on X axis 50 Compliance in roll 5 mrad Nm kay Compliance in pitch 10 mrad Nm Q Off center load Q Cz 1 D 100 D Cantilever distance in mm 3 5 Stage Weights Weights indicated into the below table are average values for stages with a typical drive unit installed Weight Ib kg M MTM100 22 10 M MTM150 25 4 11 5 M MTM200 28 7 13 M MTM250 32 14 5 The weight variation between drive units is not very significant CY Newport Experience Solutions 5 EDH0157En1031 02 12 MTM Series Long Travel Steel Linear Stages m Drive 4 1 Stepper Drive Versions Stepper motor driven stages are offered in four variants Two mini step drive versions with resolutions of 1 PP1 and 0 1 pm PP 1 These combine high speed positioning and smooth displacement from 1 10 stepper encoder count driving mode For ultrasmooth low speed positioning microstepping up to 250x is possible using ESP Series Controller
14. ar Stages 8 4 Assembly Pattern Stacking M MTM Series stages either together or with other Newport stage is easily accomplished Below are example schematics of the assembly patterns used These interfaces are accessed by unscrewing and removing the upper and or lower plates of the stages see dimension drawing 4 holes M6 thd 2 63 Carriage Interface depth 11 L 10 Neck for M BR6 mounting clamp 6 holes M6 thd Stage Interfaces 4 holes M6 thd 63 depth 9 depth 9 A DE 9 9 9 128 i _ 2 holes 10 5 Access for captive screws used in mounting to carriage lid Dimensions millimeters CY Newport Experience Solutions 17 EDH0157En1031 02 12 MTM Series Long Travel Steel Linear Stages m Dimensions 4 HOLES 6 5 CLR 25 HOLES THD A 9 mm DEEP MODEL MTM200CCI SHOWN Stepper Drive MMMMMMMMMMMI Dimensions in millimeters LUE B S
15. cable QD Newport EDH0157En1031 02 12 12 Experience Solutions MTM Series Long Travel Steel Linear Stages For applications where the standard 3 meter cable MMCABLE 3 included with your stage is not adequate Newport offers longer length cables designed to ensure the integrity of your positioning application These cables are specially shielded and terminated with Newport s standard 25 pin sub D connectors They are available in 5 m MMCABLE 5 7 m MMCABLE 7 or 10 m MMCABLE 10 lengths WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk For cable lengths in excess of 3 meters we recommend the MMCABLE REG to ensure a high quality regulated 5 V supply to the stages Li eI 25 Pin Sub D 25 Pin Sub D 24 Male gt 8 Female 54 ot E 2 4 62 gt This regulator is available as an option Please note that for best efficiency this regulator should be attached to the stage to re adjust the 5 volts coming from the controller through the long cable CY Newport Experience Solutions 13 EDH0157En1031 02 12 MTM Series Long Travel Steel Linear Stages El Connection to Non Newport Controllers WARNING Newport takes no responsibility for improper func
16. e the mechanics or cause a short circuit CY Newport tiefe Sons vii EDHO157En1031 02 12 MTM Series Long Travel Steel Linear Stages Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock Operating temperature 10 to 35 Storage temperature 10 to 40 in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point by using the manual knob as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year QD Newport EDH0157En1031 02 1 2 viii Experience Solutions MTM Serie
17. er Sales Service for further instructions Repairing CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your stage to Newport once a year for recalibration to its original specifications m Newport Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems CY Newport Experience Solutions 21 EDH0157En1031 02 12 NNevvport Experience Solutions Visit Newport Online at A North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech
18. higher than specified speed Improper grounding 5 Connectors must be properly secured 5 When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior writ ten approval of Newport Corporation This manual has been provided for information only and product specifica tions are subject to change without notice Any changes will be reflected in future printings Newport ii Experience Solutions MTM Series Long Travel Steel Linear Stages Table of Contents Warranty dm EE ii EC Declaration Comiormity decre aun aa ka esas eatin v Definitions amd SYM Dols sirenaren vi M armnps and vi o uen en DI E ORDRE OSEE DOE RS vii CIONS viii 10 Introduction dcin cat 1 20 Description dr eias 2 21 Design Details a terere Een inte tes Heer re RH 3 3 0 Characteristics eenterta rnnt 3 2 1 Definitions 3 32 Mechanical Specifications
19. kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts CY Newport Experience Solutions 1 1 EDH0157En1031 02 12 MTM Series Long Travel Steel Linear Stages 6 2 Connection On each stage is represented a label which indicates its name and its serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE MTM are ESP compatible stages Enhanced System Performance is ESP Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion system quickly and safely 6 3 Cables All our M MTM stages are delivered equipped with a 3 meter cable with 25 pin Sub D connectors so they can be directly connected to our controllers drivers Dimensions in inches millimeters Locking Knobs TAN 10 3 25 Pin Sub D 2 18 Connector 54 2 32 59 gt Disconnected 4 1 104 for a static cable 6 54 166 for a cable in motion with the stage WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the
20. of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations European Union CE Mark ATTENTION This stage is a Class A device In a residential environment this device can cause radioelectric interferences In this case suitable measurements must be taken by the user of this device Warnings and Cautions The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Situation has the potential to cause bodily harm or death CAUTION Situation has the potential to cause damage to property or equipment NOTE Additional information the user or operator should consider QD Newport EDH0157En1031 02 1 2 vi Experience Solutions MTM Series Long Travel Steel Linear Stages Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately swi
21. per Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or at www newport com Mechanical Specifications PP1 PE1 CC1 PP 1 PE 1 CC 1 Travel Range mm 100 150 200 and 250 Minimum Incremental Motion um 1 0 3 Uni directional Repeatability guaranteed um 1 5 Bi directional Repeatability guaranteed um 3 0 or 1 5 3 5 or 1 75 On Axis Accuracy guaranteed um 5 or 2 5 5 or 2 5 Maximum Speed mm s 408 CC1 20 PP1 4 CC 1 2 PP 1 2 0 2 PE 1 Pitch guaranteed urad 9 40 or 20 40 or 20 Yaw guaranteed urad 35 or 17 5 35 or 17 5 1 Shown are peak to peak guaranteed specifications or half the value as sometimes shown Typical specifications are about 2X better than the guaranteed values 2 For 100 mm travel 3 20mm s for vertical usage with maximum With V6 versions the maximum speed is reduced by a factor of two 9 To obtain arcsec units divide mrad value by 4 8 CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 Newport 4 Experience Solutions MTM Series Long Travel Steel Linear Stages 3 3 Load Specification Definitions Normal Load Capacity Cz Maximum load a stage can move while maintaining specifications This value is given with speed and acceleration specified for each stage and with a lo
22. r M MTM200 250 4 HOLES C BORED FOR M6 SCREW ON SQR 2 48 63 AT 4 33 12 110 amp amp 4 HOLES C BORED FOR M6 SCREW ON SQR 3 94 100 3x4 HOLES M6 THD ON SQR 3 94 100 98 25 Qe 98 25 J E 728 bd 185 os 4 Qe Y 2 x 4 HOLES C BORED FOR M6 SCREW 0N SQR 5 04 128 AT 3 1 A 4 33 6 50 lt 110 gt x 165 gt 6 50 740 lt 165 lt 188 gt Dimensions in mm Model A EQ160 S 10 8 275 EQ160 L 12 8 325 Q Newport Experience Solutions 19 EDH0157En1031 02 12 MTM Series Long Travel Steel Linear Stages 9 Maintenance 11 2 11 3 EDH0157En1031 02 12 RECOMMENDATION Contact Newport s After Sales Service to define the appropriate maintenance for your application Maintenance The M MTM stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and manipulated with precaution PRECAUTIONS The M MTM stage must operate and be stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your stage to Newport s After Sales Service after every 2000 hours of use for lubrication and maintenance If your M MTM stage is mounted on a workstation and cannot be easily dismantled please contact Newport s Aft
23. rors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for lin ear errors The relation between absolute accuracy and on axis accuracy is as follow Absolute Accuracy On Axis Accuracy Correction Factor x Travel 3 EDH0157En1031 02 12 MTM Series Long Travel Steel Linear Stages 3 2 EDH0157En1031 02 12 Repeatability Ability of a system to achieve a commanded position over many attempts Can be specified as uni directional or bi directional Reversal Value Hysteresis Difference between actual position values obtained for a given target posi tion when approached from opposite directions Minimum Incremental Motion Sensitivity The smallest increment of motion a device is capable of delivering consis tently and reliably Resolution The smallest increment that a motion device can be commanded to move and or detect Yaw Pitch Rotation of carriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 1 linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 164 points Guaranteed Specifications Guaranteed maximum performance values are verified
24. s Two full step versions with resolutions of 1 pm and 0 1 pm PE 1 These are primarily designed for applications requiring the position to be maintained within the stage s resolution when power is switched off such as operation in vacuum E gt is M MTMPP 1 y V Mini Step Drive Is used for stepper motors when 1 pulse emitted by electronic corresponds to theoretical physical motion of a fraction of a full step of the motor For these stages a mini step equals 1 10 of a full step Full Step Drive Is used for stepper motors when 1 pulse emitted by electronic corresponds to theoretical physical motion of 1 full step of the motor Stepper Motor Performance Specifications Resolution Speed Mot otor um mm s M MTMPP1 1 20 UE63PP M MTMPP 1 0 1 2 M MTMPE1 1 2 UE41PP M MTMPE 1 0 1 0 2 M MTMPE1BV6 1 1 UE41PPV6 M MTMPE 1BV6 0 1 0 1 Newport EDHO157En1031 02 12 6 eren sons MTM Series Long Travel Steel Linear Stages 4 2 DC Servo Drive Versions Two DC motor driven configurations are available with resolutions of 1 CC1 and 0 1 pm CC 1 These feature a built in tachometer to provide superior speed stability DC Motor Performance Specifications Resolution Speed Mot otor pm mm s 1 1 40 UE511CC M MTMCC 1 0 1 4 UE404CC D 20 mm s for vertical usage with maximum 5 0 Motor
25. s MTM Series Long Travel Steel Linear Stages 2 1 Design Details Base Material Stainless Steel Bearings Linear ball bearings Drive Mechanism Backlash compensated leadscrew Drive Screw Pitch mm CC 4 mm PP PE 2mm Reduction Gear 10 1 on all versions with 0 1 um resolution additional motor mounted gear 10 1 on all PE versions Feedback CC 4 000 cts rev screw mounted rotary encoder with index pulse PP PE 2 000 cts rev rotary encoder with index pulse Limit Switches Mechanical Origin Centered can be set to left or right travel limit via external switch Protection Bellows Vacuum Compatibility Vacuum compatible versions are available up to 10 Torr using full step motor PE1 and PE 1 Cable m 3 included NOTE This product complies with the RoHS directive Restriction of Hazardous Substances RoHS Compliant Characteristics 3 1 QD Newport Experience Solutions Definitions Specifications of our products are established in reference to ISO 230 stan dard part II Determination of the position precision and repeatability of the machine tools with CNC This standard gives the definition of position uncertainty which depends on the 3 following quantities Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear error sources Linear er
26. s Long Travel Steel Linear Stages Long Travel Steel Linear Stages MTM Series m Introduction This manual provides operating instructions for the stage that you have purchased in the M MTM Series e M MTMPP1 e M MTMPE1V6 e M MTMCCI M MTMPP 1 e M MTMPE 1V6 e M MTMCC 1 M MTMPE1 M MTMPE 1 REMARK Vacuum compatible stages to 10 hPa In this case max speed and load capacity have to be divided by two M MTM Series linear stages RECOMMENDATION We recommend you read carefully the chapter Connection to electronics before using the M MTM stage QD Newport Experience Solutions 1 EDH0157En1031 02 12 MTM Series Long Travel Steel Linear Stages 20 Description The M MTM Series motorized all steel translation stages offer high precision positioning where longer travel of 100 150 200 or 250 mm is required For durable linear travel opposing single row bearing surfaces are precision ground from tool steel Smooth drive is provided by a diamond corrected leadscrew and matched precision lapped nut The nut design includes anti backlash preloading and a sophisticated uncoupling system that prevents leadscrew eccentricity errors from affecting stage movement All M MTM stages include a center home position Mechanical Zero switch supplemented by an index pulse signal from the encoder for precise origin location qoum 4 1 Origin side
27. tch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damag
28. the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances If the power cord or any attached cables are frayed or damaged in any way If the power plug is damaged in any way f the unit is exposed to rain excessive moisture or liquids are spilled on the unit If the unit has been dropped or the case is damaged f you suspect service or repair is required Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not expose the unit to excessive moisture gt 85 humidity Read this manual before using the unit for the first time WARNING attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any
29. tioning or damage of a stage when it is used with any non Newport controllers WARNING Newport guarantees the compliance of the M MTM translation stages only if they are used with Newport cables and controllers Nevertheless the figure below indicates the recommended wiring when a M MTM stage is used with non Newport controllers Sub D25 male Connection UE41PB Connection Connector UE41PPV6 amp UE63PP UE404CC amp UE511CC 9 A NC N C 10 m N C N C 11 m NC N C 12 S NC N C S Phase 1 Tachometer 2 1 Phase 1 Tachometer 3 4 Phase 2 Tachometer 4 i E Phase 2 Tachometer Y x 5 2 i I Phase 3 Motor 6 Phase 3 Motor 1 EE 1 4 Phase 4 Motor 8 i Phase 4 Motor Y Em Yd Y 4 c r e 1 Ground Ground n mmn an apu ay OV logic 0 V logic 3 L zz Mechanical Zero Mechanical Zero 9 1 Encoder Phase Encoder Phase A 23 Encoder Phase Encoder Phase A 20 X Encoder Phase B Encoder Phase B 24 Encoder Phase B Encoder Phase B 5 1 i E Index Pulse Index Pulse I 25 m 1 Index Pulse I Index Pulse 1 di am End of Run 2 End of Run 2 8 1 End of Run
30. to any other source Use appropriate TTL type receivers QD Newport EDH0157En1031 02 1 2 8 Experience Solutions MTM Series Long Travel Steel Linear Stages QD Newport Experience Solutions Encoder 1 Phase A Encoder 1 Phase A Encoder 1 Phase B Encoder Phase B 5 6 Feedback Signal Position Direction o o o o o o o o o le Direction Motion w Direction 9 Direction The incremental sensor operates following the photoelectric measurement principle with a disk including slides When the sensor shaft turns the sen sor generates square signals in quadrature sent to pins 19 20 23 and 24 of the 25 pin Sub D connector Newport User Stage Encoder Phase A Pin 19 Encoder Phase A L Pin 23 Encoder Phase B Pin 20 EncoderPhaseB Pin 24 1 Output Signals gt Y gt Index Pulse Phase Pin 15 Index Pulse Phase Pin425 I ndex Pulse Phase i 5 V 5 Encoders T Pin 22 150
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