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User Manual MP135E - Physik Instrumente

1. Q 545 x40 Connect the Sub D 15 m connector of the Q 545 with the Sub D 15 f connector of the Y adapter cable Q 545 x4U Connect the free Sub D 15 m connector side of the 5604500041 adapter to the Sub D 15 f connector of the Y adapter cable 4 Connect the Y adapter cable with the E 871 controller a Connect the HD Sub D 15 m connector for motor connection to the corresponding socket of the controller see user manual of the controller b Connect the HD Sub D 15 f connector for sensor connection with the corresponding panel plug of the controller see user manual of the controller 5 Secure the connections with the integrated screws against accidental disconnection Connecting the Q 545 x4x to the E 871 controller for operation in a vacuum Figure 19 Connection diagram for Q 545 x40 and controller for operation in a vacuum to 10 hPa Controller here E 871 1A1 7202500043 0015 Y adapter cable E 873 UHVx extension cable C 815 VF vacuum feedthrough Q 545 x40 OH A MH A 44 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 20 Connection diagram for Q 545 x4U and controller for operation in a vacuum to 1 07 hPa Controller here E 871 1A1 7202500043 0015 Y adapter cable E 873 UHVx extension cable C 815 VFUx vacuum feedthrough here C 815 VFU1 Q 545 x4U OM A GW N m 1 Before connecting for the first time Install the vacuum feedthrough
2. Q 545 x0U Connect the free Sub D 15 m connector side of the 5604500041 adapter with the Sub D 15 f connector of the adapter cable 3 Connect the adapter cable with the drive electronics Connect the Mini DIN 4 connector of the adapter cable with the Mini DIN 4 socket of the drive electronics 4 Take suitable measures to secure the connections against accidental disconnection Connecting the Q 545 x0x to E 870 drive electronics with Mini DIN 4 socket for operation in a vacuum 1 2 3 4 5 Figure 15 Connection diagram for Q 545 x00 and drive electronics with Mini DIN 4 socket for operation in a vacuum to 10 hPa Drive electronics with Mini DIN socket here E 870 xG 7202500042 0015 adapter cable E 873 UHVx extension cable C 815 VF vacuum feedthrough Q 545 x00 Om A OO Nasa 40 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 16 Connection diagram for Q 545 x0U and drive electronics with Mini DIN 4 socket for operation in a vacuum to 10 hPa Drive electronics with Mini DIN socket here E 870 xG 7202500042 0015 adapter cable E 873 UHVx extension cable C 815 VFUx vacuum feedthrough here C 815 VFU1 Q 545 x0U OM A GW NH 1 Before connecting for the first time Install the vacuum feedthrough a Obtain the dimensions from the corresponding dimensional drawing p 71 b Make sure that the vacuum feedthrough is oriented correctly C 815 VF V
3. a Obtain the dimensions from the corresponding dimensional drawing p 71 b Make sure the vacuum feedthrough is oriented correctly C 815 VF Vacuum side Sub D 15 f socket C 815 VFUx See dimensional drawing p 71 c Provide a suitable opening for the vacuum chamber d Install the vacuum feedthrough 2 Remove the ESD protection from the Q 545 Q 545 x40 Remove the ESD protective cap from the Sub D 15 m connector Q 545 x4U Remove the protective foil from the Sub D 15 f connector 3 Connect the stage vacuum feedthrough cables and controller as shown in the connection diagram above 4 Secure the connections with the integrated screws against accidental disconnection Q 545 Stage MP135E Version 1 0 0 45 PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation eee eee 47 AO TS SIAC T 50 6 1 General Notes on Start Up and Operation A Risk of electric shock if the protective earth conductor is not connected If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the Q 545 in the case of malfunction or failure of the system If touch voltages exist touching the Q 545 can result in minor injuries from electric shock gt Connect the Q 545 to a protective earth conductor p 23 before start up gt Do not remove the protective earth conductor duri
4. INFORMATION lf a manual is missing or problems occur with downloading gt Contact our customer service department p 59 INFORMATION For some products e g Hexapod systems and electronics that are delivered with a CD access to the manuals is password protected The password is stored on the CD Availability of the manuals Password protected manuals FTP download directory Freely available manuals PI website gt Follow the corresponding instructions for downloading Q 545 Stage MP135E Version 1 0 0 3 1 About this Document PP I Downloading freely accessible manuals l 2 3 4 Open the website http www pi portal ws Click Downloads Click the corresponding product category Go to the corresponding product code The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Downloading password protected manuals 1 2A 3 Insert the product CD in the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the file name Find the user name and the password in the section User login for software download in the Release News Open the FTP download directory ftp pi ftp ws Windows operating systems Open the FTP download directory in Windows Explorer Log in with the user name and the password from the Release News In the directory of
5. C d 666666 d S 0009 0 19 9 Figure 33 Sub D 15 f connector cos IR C S S S S CN C C Q 545 Stage MP135E Version 1 0 0 77 10 Technical Data PP I a CS Motor Motor signal differential The sign indicates that the corresponding pin has not been assigned Only for models with sensor Not assigned for models without sensor The cable shield is connected to the connector shell 10 4 3 C 815 VF Vacuum Feedthrough Sub D 15 m f oo 0 QOO C Bi D D 00 0 amp 15 9 Figure 34 Vacuum side Sub D 15 f socket S J z aaaaa dede eiea Le i i a d 9 15 Figure 35 Air side Sub D 15 m panel plug 78 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data w _ pn Iag Iae PN i REF THH En CC UE Octane sos ero id B mew Motor aeea fe CC T Q 545 Stage MP135E Version 1 0 0 79 10 Technical Data 10 4 4 C 815 VFUx Vacuum Feedthrough 80 Sub D 15 m m Figure 36 C 815 VFUx vacuum feedthrough 1 Vacuum side 2 Airside E S i ooo 0 06 6 0 lt 9 15 K i E sd G D de diko ike Ee PI SIN Encoder B Encoder A ID chip data ID chip data Version 1 0 0 V pp MP135E 5 V Motor signal differential Motor signal differential Supply voltage 5 V Q 545 Stage 10 Technical Data PIEZO NANO POSITIONING WWW
6. 202500042 0013 electronics Sub D 15 f to Mini DIN 4 m 0 3 m 12 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description Only for models with sensor Air side adapter cable for connection to the E 871 controller Sub D 15 f to HD Sub D 15 m and HD Sub D 15 f 0 3 m 7202500043 0015 Only for models suitable for operation to 10 hPa Adapter for operation outside of a vacuum chamber 5604500041 Sib sain 3 5 Accessories number Air side extension cable from vacuum feedthrough or Q 545 xx0 to E 873 UHV1 the adapter cable to the electronics Sub D 15 f to Sub D 15 m 1m Air side extension cable from vacuum feedthrough or Q 545 xx0 to E 873 UHV2 the adapter cable to the electronics Sub D 15 f to Sub D 15 m 2 m Air side extension cable from vacuum feedthrough or Q 545 xx0 to E 873 UHV3 the adapter cable to the electronics Sub D 15 f to Sub D 15 m 3 m For Q 545 xx0 models only suitable for use in a vacuum to 10 hPa Order ee Description number C 815 VE Vacuum feedthrough drive and sensor signals Sub D 15 m f l including C815T0003 Technical Note Q 545 Stage MP135E Version 1 0 0 13 3 Product Description E Order RR Description number Adapter bracket for vertical mounting of Q 545 1x0 stages Material Aluminum 3 3206 anodized mass 42 g includes 145 1001 Sine 2 dowel pins A2 2 5 m6 x 4 ISO 2338 4socket head cap sc
7. The values for the parameters of the E 870 drive electronics are listed in a table in this section For optimum drive performance the values of the following parameters should be identical PlShift Steps per Second ID 0x1FO00600 PlShift Frequency ID 0x1F000400 Prerequisites v You have read and understood the general notes on start up and operation p 47 v You have read and understood the documentation of the E 870 drive electronics E870T0001 Technical Note or E870T0002 Technical Note You have properly installed p 21 the stage The E 870 drive electronics have been properly installed and all connections on the E 870 have been set up see E870T0001 Technical Note or E870T0002 Technical Note Starting up the Q 545 x0x with the E 870 drive electronics 1 Make sure that the parameters of the E 870 drive electronics have been set correctly for values see table below 2 Provide the control signal required for operating the system Details can be found in the E870T0001 or E870T0002 Technical Note 3 If necessary Adapt the PlShift Steps per Second parameter ID 0x1F000600 and the PlShift Frequency parameter ID 0x1F000400 to your application see also Operating Time p 64 Q 545 Stage MP135E Version 1 0 0 51 6 Start Up and Operation 52 PI The following table lists the settings for the parameters of the E 870 drive electronics Further information on the parameter settings is found in the Operat
8. hPa lf the value x is used in this manual for a character after the period the corresponding description or instruction applies to all feature values of the corresponding feature Q 545 Stage MP135E Version 1 0 0 3 Product Description E Detailed model names Order Product name Q 545 100 Q Motion Linear Stage 13 mm Travel Range without Position Sensor for Open Loop Operation 8 N Push Pull Force Dimensions 45 x 48 x 15 mm W x L x H Piezoelectric Inertia Drive Vacuum Compatible to 10 hPa Q 545 140 Q Motion Linear Stage 13 mm Travel Range Linear Encoder 1 nm Resolution 8 N Push Pull Force Dimensions 45 x 48 x 15 mm W x L x H Piezoelectric Inertia Drive Vacuum Compatible to 10 hPa Q 545 200 Q Motion Linear Stage 26 mm Travel Range without Position Sensor for Open Loop Operation 8 N Push Pull Force Dimensions 45 x 63 x 15 mm W x Lx H Piezoelectric Inertia Drive Vacuum Compatible to 10 hPa Q 545 240 Q Motion Linear Stage 26 mm Travel Range Linear Encoder 1 nm Resolution 8 N Push Pull Force Dimensions 45 x 63 x 15 mm W x L x H Piezoelectric Inertia Drive Vacuum Compatible to 10 hPa Q 545 10U Q Motion Linear Stage 13 mm Travel Range without Position Sensor for Open Loop Operation 8 N Push Pull Force Dimensions 45 x 48 x 15 mm W x L x H Piezoelectric Inertia Drive Vacuum Compatible to 10 hPa Q 545 14U Q Motion Linear Stage 13 mm Travel Range Linear Encoder 1 nm Resolu
9. measurement The intended use of the Q 545 is only possible when completely mounted and connected The Q 545 must be operated with suitable electronics p 15 The electronics are not included in the scope of delivery of the Q 545 2 2 General Safety Instructions The Q 545 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the Q 545 working order Q 545 Stage MP135E Version 1 0 0 5 2 Safety E I gt Read the user manual gt Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the Q 545 2 3 Organizational Measures User manual gt Always keep this user manual available with the Q 545 The latest versions of the user manuals are available for download p 3 on our website gt Add all information given by the manufacturer to the user manual for example supplements or Technical Notes gt If you pass the Q 545 on to other users also include this user manual as well as other relevant information provided by the manufacturer gt Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage gt Only install and operate the Q 545 after you have read and understood this user manual Personnel qualification The Q
10. 545 may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel 2 4 Measures for Handling Vacuum Compatible Products When handling the vacuum version of the stage attention must be paid to appropriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder free gloves are worn In addition the Q 545 xxU models are wipe cleaned afterwards and then shrink wrapped twice in vacuum compatible film gt Only touch the stage with powder free gloves gt f necessary wipe the stage clean after unpacking 6 Version 1 0 0 MP135E Q 545 Stage WWW PI WS 3 Product Description PIEZO NANO POSITIONING 3 Product Description In this Chapter Model Overview 7 PrOdUCEVIOW 1 eae e E a e e eE eE EAE 9 POUC a MAG ee EE psceeene 11 COD OF DEIVI ecserin op EEEa T 12 AOCOSSONOS aeree ee ne e ee e ne res rea 13 Suitable ElSCIOMICS sad RAE ARA 15 Technical Features ee 16 3 1 Model Overview Classification of the Q 545 models The model version of the Q 545 is coded in the order number by means of three characters after a period see also Detailed model names Each character codes a feature of the model version I First character Second character Third character Sensor linear encoder Vacuum suitability Feature value 1 13mm 0 without sensor 0 suitable to 10 hPa 2 26mm 4 with sensor U suitable to 10
11. EEE E E A E ET 17 4 Unpacking 19 5 Installation 21 5 1 General Notes on Installation e eee eee ee 21 5 2 Mounting the Q 545 on a Surface and Connecting It to a Protective Earth ORCL I oc serene teene cee gcse E E A E 23 5 3 Setting Up a Multi Axis System sse ee eee eee 26 5 3 1 General Information on Setting Up a Multi Axis System 27 5 3 2 Setting Up an XY System sse eee eee 27 5 3 3 Setting Up a Z System with an Adapter Bracket eee 30 5 4 Affixing the Load to the Q 545 oo cccccccccccccecceceseeeeeeseseeseeeeeeeeeeseessesesseeeeeseeeeeees 35 5 5 Connecting the Q 545 to the El CtroniCs ccccccccccssssssesesseeeeeeeeeeeeeeseeseesenaaaas 38 5 5 1 Connecting the Q 545 to the Drive Electronics eeeeceeeeeeeeees 38 5 5 2 Connecting the Q 545 to the Controller sss eee 42 6 Start Up and Operation 47 6 1 General Notes on Start Up and Operation eee ee 47 6 2 Staring UDINE Stag ercsi an EEE 50 6 2 1 Starting Up the Q 545 x0x with the E 870 Drive Electronics 51 6 2 2 Starting Up the Q 545 x4x with the E 871 1A1 Controller 53 7 Maintenance 55 7 1 General Notes on Maintenance ccccccesssccceceesseceeeceeeeecceeeeeeeeceeeseaeeceeeeeaeees 55 7 2 Performing a Maintenance RU sees ee eee eee eee 55 72 Cleaning b e 55 8 Troubleshooting 57 9 Customer Service 59 10 Technical Data 61 10 1 OCC IC AO 1S re ritarennccrinaccitsnmacamahesuaamianss stent nsacotieusa
12. INS TTT 61 CS AA TNS E Sajsasaci ena vest eamesbewseaaeatboueianciapesgasorsesoseeaaeesbeinatee es 64 IGT E 65 EIT ET mea asaincaumverat eas 76 10 1 Specifications 10 1 1 Data Table Preliminary Data Q 545 100 Q 545 140 Q 545 200 Q 545 240 Q 545 10U Q 545 14U Q 545 20U Q 545 24U Motion and Positioning 13 mm travel 13 mm travel 26 mm travel 26 mm travel range open loop range range open loop range UHV version resolution 1 nm UHV version resolution 1 nm Q 545 10U UHV version Q 545 20U UHV version Q 545 14U Q 545 24U 2 Tolerance Active axis Integrated sensor Linear encoder Linear encoder Sensor resolution ie Min incremental 500 open loop 500 open loop nm motion Unidirectional 0 018 0 018 um repeatability mp lt O T Q Q 545 Stage MP135E Version 1 0 0 61 10 Technical Data Pp I Preliminary Data Q 545 100 Q 545 140 Q 545 200 Q 545 240 Q 545 10U Q 545 14U Q 545 20U Q 545 24U Reference point switch Mechanical Properties Load capacity Holding force de energized Push pull force Drive Properties Motor Type Miscellaneous Operating O to 40 0 to 40 0 to 40 0 to 40 C temperature range Cable length Q 545 100 2 Q 545 140 2 Q 545 200 2 Q 545 240 2 m Q 545 10U 1 Q 545 14U 1 Q 545 20U 1 Q 545 24U 1 Sub D 15 Sub D 15 Sub D 15 Sub D 15 m Recommended E 870 E 871 E 873 E 870 E 871 E 873 controller driver The Q 545 stage series repl
13. adapter bracket 1 Lower stage 2 2dowel pins 2 5 m6 x 4 for use as locating pins from the scope of delivery of the adapter bracket 3 Q 145 200 adapter bracket for operation in a vacuum to 10 hPa or Q 145 20U for operation in a vacuum to 10 hPa 4 4 socket head cap screws M2 5x8 for mounting the adapter bracket on the lower stage from the scope of delivery of the adapter bracket 5 2dowel pins 2 5 m6 x 5 for use as locating pins from the scope of delivery of the stage 6 Upper stage 7 4 socket head cap screws M2 5x5 for mounting the upper stage on the adapter bracket from the scope of delivery of the stage Q 545 Stage MP135E Version 1 0 0 33 5 Installation PP I Figure 10 Adapter bracket with screws and locating pins The locating pins for alignment on the lower stage must be inserted into the bracket from below and up to the limit stop Setting up a Z system 1 Mount the upper stage to the long side of the adapter bracket a Align the upper stage so that the cable exit points away from the origin of the sides of the adapter bracket i e upwards in the Z system b Insert the 2 5 m6 x 5 locating pins into the locating holes on the bottom of the upper stage or in the long side of the adapter bracket c Place the stage on the long side of the adapter bracket so that the locating pins are inserted into the corresponding locating holes on the other side d Mount the stage using four M2 5x5 screws according to ste
14. improper maintenance Improper maintenance can lead to misalignment and failure of the Q 545 gt Only loosen screws according to the instructions in this manual 7 2 Performing a Maintenance Run The maintenance run must cover the entire travel range gt Perform the maintenance run after every 10 million steps 7 3 Cleaning the Q 545 Prerequisites v You have disconnected the stage from the electronics Cleaning the stage Only when the stage is not used in vacuum gt When necessary clean the surfaces of the stage with a cloth that is lightly dampened with a mild cleanser or disinfectant Only when the stage is used in vacuum gt Only touch the stage with powder free gloves gt f necessary wipe the stage clean Q 545 Stage MP135E Version 1 0 0 55 PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting Functional impairment after system modification No or limited motion Q 545 Stage Drive electronics E 870 drive electronics from PI or controller has gt Adapt the parameters of the drive electronics in the been replaced E 870 Control PC program to the Q 545 see The stage has Starting up the Q 545 x0x with the E 870 Drive been replaced Electronics p 51 and Technical Note E870T0001 and or E870T0002 E 871 controller from PI gt Load the parameter set from the stage database that corresponds to the Q 545 model gt f necessary In the PIMikroMove PC
15. long Screws and locating pins that are inserted too deeply damage the Q 545 gt Observe the depth of the mounting holes p 65 in the moving platform gt Observe the maximum depth for the insertion of locating pins p 65 into the moving platform gt Only use screws and locating pins of the correct length for the respective holes INFORMATION Any model of the Q 545 can be used as lower or upper stage Designations in these instructions Lower stage Forms the basis of the multi axis system X axis is mounted on a surface Upper stage Forms the Y axis of the multi axis system is mounted on the lower stage rotated by 90 Q 545 Stage MP135E Version 1 0 0 27 5 Installation PI Figure 8 Example Mounting a Q 545 140 on a Q 545 140 Aa ONSI Lower stage 2 dowel pins 2 5 m6 x 5 ISO 8734 for use as locating pins Upper stage 4 socket head cap screws M2 5x5 ISO 4762 Prerequisites v v You have read and understood the general notes on installation p 21 The stages are disconnected from the electronics You have properly mounted the lower stage on a surface and connected it to a protective earth conductor p 23 You have accounted for the space required to route cables without bending and according to regulations 28 Version 1 0 0 MP135E Q 545 Stage 5 Installation PIEZO NANO POSITIONING WWW PI WS Tools and accessories 5861500010 screw set from the scope of delivery of t
16. 5 into the moving platform gt Only use screws and locating pins of the correct length for the respective holes Observe the following order when you align the adapter bracket on the lowerstage 1 Insert the locating pins into the short side of the adapter bracket from below 2 Make sure that the locating pins are inserted up to the limit stop 3 Place the adapter bracket on the moving platform of the lower stage Designations in these instructions Lower stage X axis in an XZ combination Y axis in an XYZ combination The stage to which the upper stage is mounted with an adapter bracket Upper stage Forms the Z axis of the multi axis system is mounted on the lower stage in a vertical alignment using an adapter bracket Recommended Z Systems The following combinations of adapter brackets and stages are recommended 30 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation ee Orientation of adapter bracket and upper stage to the lower stage Combination of stages and adapter bracket 2 Q 545 1xx Q 145 1001 or Q 145 10U1 2 Q 545 2xx Not possible The Not possible The moving platforms of _ Sas moving platforms of the stages collide with the stages collide with each other an ae each other Q 145 1001 or Q 145 10U1 2 Q 545 2xx Q 145 20U Q 545 Stage MP135E Version 1 0 0 31 5 Installation PI Prerequisites v v You have read and un
17. Drive Electronics 1 Channel Eero OEM Board with Connector Strip PIShift Piezomotor PiezoMike E 870 1G Drive Electronics 1 Channel Bench Top Device PIShift Piezomotor PiezoMike Drive Electronics 2 Channels ao OEM Board with Connector Strip PIShift Piezomotor PiezoMike E 870 2G Drive Electronics 2 Channels Bench Top Device Q 545 Stage MP135E Version 1 0 0 15 3 Product Description E cna an A T Stage without Stage with N sensor sensor Order Number Description Q 545 x00 Q 545 x40 Q 545 x0U Q 545 x4U PIShift Piezomotor PiezoMike Drive Electronics 4 Channels OEM Board with Connector Strip PIShift Piezomotor PiezoMike Drive Electronics 2 Channels Bench Top Device Q Motion Controller 1 gt To order contact our customer service department p 59 3 7 Technical Features 3 7 1 Linear Encoder Sensor Some of the Q 545 models are equipped with an optical linear encoder For the encoder resolution refer to the table in the Specifications section p 61 Optical linear encoders measure the actual position directly direct metrology Therefore errors occurring in the drivetrain such as nonlinearity backlash or elastic deformation cannot influence the measurement of the position 3 7 2 Reference Point Switch The Q 545 models equipped with a sensor have an optical reference point switch The commands that use the reference signal are described in the user manual of the
18. E Damage from unsuitable cables Unsuitable cables can damage the electronics gt Only use cables provided by PI for connecting the Q 545 to the electronics INFORMATION For optimum repeatablity all components must be firmly affixed to each other 22 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation INFORMATION When handling the vacuum version of the stage appropriate cleanliness must be ensured gt Only touch the stage with powder free gloves gt If necessary wipe the stage clean INFORMATION The positive direction of motion of the axis Is given in the product view p 9 5 2 Mounting the Q 545 on a Surface and Connecting It to a Protective Earth Conductor NOTICE Protruding screw heads Protruding screw heads can damage the Q 545 gt Ensure that the screw heads do not protrude from countersunk holes so that they do not interfere with the stage motion NOTICE Warping of the Q 545 due to mounting on uneven surfaces Mounting the Q 545 on an uneven surface can warp the Q 545 Warping reduces the accuracy gt Mount the Q 545 on an even surface The recommended evenness of the surface is lt 2 um gt For applications with large temperature changes Only mount the Q 545 on surfaces that have the same or similar thermal expansion properties as the Q 545 Q 545 Stage MP135E Version 1 0 0 23 5 Installation PP I INFORMATION The electric
19. FU1 p 72 815 VFU3 p 73 815 VFU6 p 74 815 VFU15 p 75 C 815 VF vacuum feedthrough for 10 hPa Dimensions in mm Note that the decimal places are separated by a comma in the drawings 28 92 Figure 27 C 815 VF vacuum feedthrough Sub D 15 m f Q 545 Stage MP135E Version 1 0 0 71 10 Technical Data PP I C 815 VFU1 vacuum feedthrough for 10 hPa Dimensions in mm Note that the decimal places are separated by a comma in the drawings A A 2x 4 40 UNC x4 2x 4 40 UNC x4 D Sub 15 m 12 7 18 2 Figure 28 C 815 VFU1 vacuum feedthrough Sub D 15 m m 1 Vacuum side 2 Airside 72 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data C 815 VFU3 vacuum feedthrough for 10 hPA Dimensions in mm Note that the decimal places are separated by a comma in the drawings 6x 4 40 UNC x4 6x 4 40 UNC x4 3x D Sub 15 m 3x D Sub 15 m Figure 29 C 815 VFU3 vacuum feedthrough Sub D 15 m m 1 Vacuum side 2 Airside Q 545 Stage MP135E Version 1 0 0 73 10 Technical Data PP I C 815 VFU6 vacuum feedthrough for 10 hPa Dimensions in mm Note that the decimal places are separated by a comma in the drawings A A 12x 4 40 UNC x4 12x 4 40 UNC x4 A 6x D Sub 15m 6xD Sub 15 m 18 2 A Figure 30 C 815 VFU6 vacuum feedthrough Sub D 15 m m 1 Vacuum side 2 Airside 74 Version 1 0 0 MP135E Q 545 Stage P
20. IEZO NANO POSITIONING WWW PI WS 10 Technical Data C 815 VFU15 vacuum feedthrough for 10 hPa Dimensions in mm Note that the decimal places are separated by a comma in the drawings A A 30x 4 40 UNC x47 A 15x D Sub 15m 15x D Sub 15m 30x 4 40 UNC Yd ve N ANNE EN Figure 31 C 815 VFU15 vacuum feedthrough Sub D 15 m m 1 Vacuum side 2 Airside Q 545 Stage MP135E Version 1 0 0 75 10 Technical Data P Ji 10 4 Pin Assignment 10 4 1 Q 545 xx0 Connector Sub D 15 m The Sub D 15 m connector transmits the signals of the drive and for the models with sensor in addition the signals of the sensor and of the ID chip Motor Motor signal differential Motor Motor signal differential Supply voltage 5 V T S o Sn aa COS Encoder B Motor Motor signal differential GND GND GND Motor Motor signal differential rs ee Reference signal differential Sn Breeder s eR 76 Version 1 0 0 MP135E Q 545 Stage 10 Technical Data PIEZO NANO POSITIONING WWW PI WS The sign indicates that the corresponding pin has not been assigned Only for models with sensor Not assigned for models without sensor The cable shield is connected to the connector shell 10 4 2 Q 545 xxU Connector Sub D 15 f The Sub D 15 f connector transmits the signals of the drive and for the models with sensor in addition the signals of the sensor and of the ID chip 8
21. MP135E Q 545 Stage User Manual Version 1 0 0 Date 10 07 2015 PI This document describes the following products Q 545 Q Motion linear positioning stage piezoelectric inertia drive This document applies to various model versions of the Q 545 The model version of the Q 545 is coded in the order number by means of three characters after a period Meaning of the places and valid values First character after the period Travel range 1 13 mm 2 26 mm Second character after the period Sensor equipment 0 without sensor 4 with sensor Third character after the period Vacuum suitability 0 suitable to 10 hPa U suitable to 10 hPa PI miCos GmbH Freiburger Strasse 30 79427 Eschbach Germany PIEZO NANO POSITIONING WWW PI WS _ Phone 49 7634 5057 0 Fax 49 7634 5057 99 E mail info pimicos com PI Physik Instrumente PI GmbH amp Co KG is the owner of the following trademarks PI PIC PICMA PILine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano PIMag 2015 Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First pr
22. PI WS Vacuum side Reference signal differential Goss coder ems E Reference signal differential p e Motor Motor signal differential GND GND Motor Motor signal differential e 10 4 5 5604500041 Adapter Sub D 15 m m The adapter is only required if a Q 545 xxU model is to be operated at atmospheric pressure i e without a vacuum feedthrough haaaaaah Figure 38 Sub D 15 m connector Q 545 Stage MP135E Version 1 0 0 81 10 Technical Data Figure 39 Pin assignment of the 5604500041 adapter 82 Version 1 0 0 MP135E PI Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal Q 545 Stage In accordance with EU law electrical and electronic equipment may not be disposed of in EU member states via the municipal residual waste Dispose of your old equipment according to international national and local rules and regulations In order to fulfil the responsibility as the product manufacturer PI miCos GmbH undertakes environmentally correct disposal of all old PI miCos equipment made available on the market after 13 August 2005 without charge Any old PI miCos equipment can be sent free of charge to the following address PI miCos GmbH Freiburger Strasse 30 79427 Eschbach Germany MP135E Version 1 0 0 83 PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity 12 EC De
23. aces the LPS 45 series The specifications were determined on a surface with an evenness of 2 um 62 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 2 Maximum Ratings The Q 545 stage is designed for the following operating data Maximum operating Maximum operating Maximum power voltage frequency consumption 10 1 3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the Q 545 Area of application For indoor use only Maximum altitude 2000 m Air pressure Q 545 xx0 1100 hPa to 10 hPa Q 545 xxU 1100 hPa to 10 hPa Relative humidity Highest relative humidity 80 for temperatures up to 31 C non condensing Decreasing linearly to 50 relative humidity at 40 C non condensing Operating temperature 0 C to 40 C Storage temperature 20 C to 70 C Transport temperature 20 C to 70 C Maximum bakeout 120 C for 12 hours only in switched off state Maximum bakeout 80 C for 2 hours only in switched off state Overvoltage category acc to EN 60664 1 2007 VDE 0110 1 Q 545 Stage MP135E Version 1 0 0 63 10 Technical Data P Ji Protection class acc to EN 61140 VDE 0140 1 Degree of pollution acc to EN 60664 1 2007 VDE 0110 1 Degree of protection IP20 acc to IEC 60529 10 2 Operating Time The operating time and the operating frequency in step mode affect th
24. acuum side Sub D 15 f socket C 815 VFUx See dimensional drawing p 71 c Provide a suitable opening for the vacuum chamber d Install the vacuum feedthrough 2 Connect the stage vacuum feedthrough cables and drive electronics to each other as shown in the connection diagram above 3 Take suitable measures to secure the connections against accidental disconnection Connecting the Q 545 x0x to E 870 drive electronics with connector strip If a Q 545 x0x is to be operated at atmospheric pressure gt Connect the Q 545 x0x to the connector strip of the drive electronics using a Suitable adapter Q 545 Stage MP135E Version 1 0 0 41 5 Installation PI If a Q 545 x0x is to be operated in a vacuum 1 Follow the instructions in Connecting the Q 545 x0x to E 870 drive electronics with Mini DIN 4 socket for operation in a vacuum to install the vacuum feedthrough and to connect the stage vacuum feedthrough and cables Connect the 7202500042 0015 adapter cable to the connector strip of the drive electronics using a suitable adapter 5 5 2 Connecting the Q 545 to the Controller Prerequisites v v v v You have read and understood the general notes on installation You have installed the E 871 controller p 15 You have read and understood the user manual of the controller The controller is switched off i e the power supply is not connected to the power socket via the power cord Tools and acces
25. al contact of the Q 545 to the protective earth conductor is established via the surface on which the Q 545 is mounted The corresponding contact surfaces must be sufficiently conductive The protective earth conductor is connected to the surface on which the Q 545 is mounted The screws are secured against unintentional loosening e g with threadlocker INFORMATION gt Observe the applicable standards for mounting the protective earth conductor Figure 6 Example Q 545 140 left View from below right View from top 1 Two locating holes on the bottom side of the stage are used for alignment on a surface 2 The stage is mounted on a surface using four M2 5 screws Prerequisites v You have read and understood the general notes on installation p 21 v The Q 545 is disconnected from the electronics v You have provided a suitable surface for the required position and depth of the holes for accommodating the screws and locating pins see Dimensions p 65 The surface must be connected to the protective earth conductor 24 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS Q 545 Stage 5 Installation Two locating holes with 2 5 mm H7 and four M2 5 mounting holes are available in the surface The contact surfaces to the bottom side of the stage have to be sufficiently conductive to ensure the proper functioning of the protective earth conductor For application
26. annul neen i aataaten Densermneaatenmaatuteainn 3 Other Applicable Documents sees eee eee 3 Downloading Manuals sees eee ee eee eee 3 1 1 Objective and Target Audience of this User Manual This manual contains information on the intended use of the Q 545 It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual d Y Dangerous situation If not avoided the dangerous situation will result in minor injuries or damage to the fh equipment gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation Q 545 Stage MP135E Version 1 0 0 1 1 About this Document PP I INFORMATION Information for easier handling tricks tips etc Symbol Meaning Label 1 Action consisting of several steps whose D sequential order must be observed gt Action consisting of one or several steps whose sequential order is irrelevant s List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface Warning sign a
27. claration of Conformity Q 545 Stage For the Q 545 an EC Declaration of Conformity has been issued in accordance with the following European directives 2006 95 EC Low Voltage Directive 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Safety Low Voltage Directive EN 61010 1 2010 EMC EN 61326 1 2013 RoHS EN 50581 2012 ga my aa a QN kdn MP135E Version 1 0 0 85
28. controller and or in the corresponding software manuals 16 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 7 3 ID Chip Q 545 models with sensor contain an ID chip in the connector The following data is stored as parameters on the ID chip Information on the stage Type serial number date of manufacture version of the hardware Settings for the sensor Interpolation rate corrections of hysteresis as well as of phase and offset gain values When switched on or rebooted controllers from PI read the data from the ID chip For more information on the ID chip recognition see the manual of the controller used Q 545 Stage MP135E Version 1 0 0 17 4 Unpacking PIEZO NANO POSITIONING WWW PI WS 4 Unpacking NOTICE Electrostatic hazard Touching the pins in the Sub D 15 connection of models equipped with sensor can damage electrostatic also ESD sensitive components of the Q 545 For this reason these models are supplied with ESD protection Q 545 x40 ESD protection cap on the connector m Q 545 x4U Electrically nonconductive foil on the connector f gt Remove the ESD protection from the connection only when you connect the Q 545 to the controller INFORMATION When handling the vacuum version of the stage attention must be paid to appropriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder fr
29. department p 59 If a Q 545 xOU is to be operated at atmospheric pressure 5604500041 adapter in the scope of delivery p 12 If the Q 545 is to be operated in a vacuum 38 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation E 873 UHVx extension cable available as optional accessory p 13 Suitable vacuum feedthrough available as optional accessory p 13 For Q 545 x00 C 815 VF For Q 545 x0U C 815 VFUx Suitable tools for installing the vacuum feedthrough Connecting the Q 545 x0x to E 870 drive electronics with Mini DIN 4 socket for operation at atmospheric pressure 1 2 3 Figure 13 Connection diagram for Q 545 x00 and drive electronics with Mini DIN 4 socket for operation at atmospheric pressure 1 Drive electronics with Mini DIN 4 socket here E 870 xG 2 7202500042 0015 adapter cable 3 Q 545 x00 Figure 14 Connection diagram for Q 545 x0U and drive electronics with Mini DIN 4 socket for operation at atmospheric pressure 1 Drive electronics with Mini DIN 4 socket here E 870 xG 2 7202500042 0015 adapter cable 3 5604500041 adapter 4 Q 545 x0U Q 545 Stage MP135E Version 1 0 0 39 5 Installation PP I 1 Q 545 x0U only Connect the Sub D 15 f connector with the 5604500041 adapter 2 Connect the Q 545 with the adapter cable Q 545 x00 Connect the Sub D 15 m connector of the Q 545 with the Sub D 15 f connector of the adapter cable
30. derstood the general notes on installation p 21 You have read and understood the general notes on setting up a multi axis system p 27 You have accounted for the space required to route cables without bending and according to regulations If you set up an XZ combination You have properly mounted the lower stage on a surface If you set up an XYZ combination You have properly mounted the stages for the X and Y axis p 27 Tools and accessories Suitable adapter bracket for combination options see Recommended Z Systems p 30 The following brackets are available as optional accessory p 13 For Z systems suitable for use in a vacuum to 10 hPa Q 145 1001 or Q 145 200 adapter bracket For Z systems suitable for use in a vacuum to 10 hPa Q 145 10U1 or Q 145 20U adapter bracket For the diameter and position of the holes in the adapter bracket see Dimensions p 65 Mounting accessories from the scope of delivery of the adapter bracket 2 dowel pins 2 5 m6 x 4 for use as locating pins 4 socket head cap screws M2 5x8 Mounting accessories from the scope of delivery of the stage p 12 2 dowel pins 2 5 m6 x 5 for use as locating pins 4 socket head cap screws M2 5x5 Allen wrench AF 2 32 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 9 Example Setting up an XZ system consisting of two Q 545 140 and a Q 145 200 or Q 145 20U
31. e lifetime of the stage In order to prevent overheating and high wear the operating time with the given operating frequency and 100 duty cycle must not exceed the values given in the following table Operating frequency in Hz Operating time 48 V 0 6 A 20000 10 s max 10000 20 s max 5000 60 s max lt 1000 120 s max For the relevant parameters see Starting Up the Stage p 50 and the user manual of the electronics used With 100 duty cycle without heat dissipation 64 Version 1 0 0 MP135E Q 545 Stage 10 Technical Data PIEZO NANO POSITIONING WWW PI WS 10 3 Dimensions 10 3 1 Q 545 10x Dimensions in mm Characters used to separate decimal places Depth and diameter of holes Period All other dimensions Comma SSE Pa F N hy q Fr L L F F m g L ee LL AH 15 O3 4x M2575 4x M2y4 4x M24 con Figure 21 Q 545 10x Q 545 Stage MP135E Version 1 0 0 65 10 Technical Data PP I 10 3 2 Q 545 14x Dimensions in mm Characters used to separate decimal places Depth and diameter of holes Period All other dimensions Comma A A 2 6 40 4x 2 9 __J 05 5 42 6 2x 2 5H 3 8 O3 2x oH Yew dx M255 4x M254 4x M24 40 Figure 22 Q 545 14x 66 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 3 Q 545 20x Dimensions in mm Characters used to
32. ection 8 Base body 10 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description Figure 3 Direction of motion of the platform of the Q 545 Q 545 240 used as example The arrow in the figure above shows the direction of motion on positive commanding 3 3 Product Labeling Figure 4 Example for models with sensor Product labeling and type plate of the Q 545 240 stage ao Q 545 Stage MP135E Version 1 0 0 11 3 Product Description E Symbol for the protective earth conductor marks the protective earth connection of the Q 545 p 23 Warning sign Electrostatic sensitive devices Q 545 240 Product name example the characters following the period refer to the model Old equipment disposal WWW PIMICOS COM _ Manufacturer s address website Serial number example individual for each Q 545 G 113064246 Meaning of the places counting from left 1 internal information 2 and 3 year of manufacture 4 to 9 consecutive numbers 3 4 Scope of Delivery The Q 545 is delivered with the following components Q 545 Linear positioning stage as specified in the order p 7 Screw set for mounting the Q 545 consisting of 5861500010 2dowel pins A2 2 5 m6 x 5 ISO 8734 4socket head cap screws A2 M2 5x5 ISO 4762 MP139EK Short instructions for Q 5xx Q 6xx PIShift stages Only for models without sensor Air side adapter cable for connection to the E 870 drive
33. ectronics are adapted to the stage Drive is blocked gt Carefully release the blockage by manually moving the moving platform back and forth gt Contact our customer service department p 59 During affixing of a gt Contact our customer service department p 59 load or an adapter bracket on the moving platform of the stage Dowel pin was pushed too deeply into the moving platform If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 59 58 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail info pi ws gt If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present gt f possible Take photographs or make videos of your system that can be sent to our customer service department if requested The latest versions of the user manuals are available for download p 3 on our website Q 545 Stage MP135E Version 1 0 0 59 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 Technical Data In this Chapter DIC CC AO
34. ee gloves are worn In addition the stage is wipe cleaned afterwards and then shrink wrapped twice in vacuum compatible film gt Only touch the stage with powder free gloves gt f necessary wipe the stage clean after unpacking 1 Unpack the Q 545 with care 2 If present do not remove the ESD protection from the connection of the Q 545 3 Compare the contents with the items listed in the contract and the packing list 4 Inspect the contents for signs of damage If there is any sign of damage or missing parts contact PI immediately 5 Keep all packaging materials and the ESD protection in case the product needs to be returned Q 545 Stage MP135E Version 1 0 0 19 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation eee eee 21 Mounting the Q 545 on a Surface and Connecting It to a Protective Earth Conductor EE E E EE EEEE E N EEES E EE E EE A E EET 23 Setting Up a Multi Axis System eee eee eee 26 Affixing the Load to the Q 54B 35 Connecting the Q 545 to the EIectroniGS eee 38 5 1 General Notes on installation Figure 5 Accessible when the moving platform is driven out Ceramic rod of the PIShift drive example Q 545 140 NOTICE Malfunction due to soiling Any type of soiling e g dust oil lubricant or condensation will render the Q 545 inoperable gt Keep the Q 545 free from dirt and condensation gt Avoid touch
35. ffixed to the product that C A refers to detailed information in this manual 1 3 Definition Load capacity Maximum load capacity in the vertical direction when the stage is mounted horizontally The contact point of the load is in the center of the platform Linear encoder The linear encoder is an incremental sensor for capturing changes in position Signals from the sensor are used for axis position feedback After switching on the controller a reference point definition must be performed before absolute target positions can be commanded and reached 2 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 4 Figures For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 1 5 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals Description E 870 10 E 870 11 E 870 21 E 870 41 Piezomotor E870T0001 Technical Note PiezoMike Drive Electronics OEM Board 1 to 4 Channels E 870 1G E 870 2G E 870 4G Piezomotor E870T0002 Technical Note PiezoMike Drive Electronics Bench Top 1 to 4 Channels E 871 1A1 Q Motion Controller 1 Channel PZ241E User Manual USB Interface PIMikroMove SM148E Software Manual 1 6 Downloading Manuals
36. hat can increase the electrical conductivity gt Only operate the Q 545 within the permissible ambient conditions and classifications p 63 gt For operation in vacuum below 0 1 hPa Do not operate the Q 545 during evacuation NOTICE Increased wear due to small working range Using a small working range permanently increases the wear in this area gt If possible Select another part of the travel range for the working range in regular intervals 6 2 Starting Up the Stage The electronics to be used for operating the Q 545 depends on the presence of a sensor see also Suitable Electronics p 15 Models without sensor Q 545 x0x E 870 drive electronics p 51 Models with sensor Q 545 x4x E 871 controller p 53 INFORMATION If the parameters of the electronics are not adapted to the Q 545 and the application load orientation of the Q 545 the Q 545 will either not move or not move satisfactorily gt Only operate the Q 545 when the parameters of the electronics have been correctly set gt Pay particular attention to the parameter settings for operating voltage and operating frequency 50 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation INFORMATION The PIShift drive develops noises in step mode The noise development depends on the current step frequency 6 2 1 Starting Up the Q 545 x0x with the E 870 Drive Electronics INFORMATION
37. he Q 545 p 12 2 dowel pins 2 5 m6 x 5 ISO 8734 for use as locating pins 4socket head cap screws M2 5x5 ISO 4762 Suitable tools for fastening the screws Setting up an XY system 1 Insert the two locating pins into the locating holes on the bottom side of the upper Q 545 or in the moving platform of the lower Q 545 see figure above 2 Place the upper Q 545 on the lower Q 545 so that the locating pins are inserted into the corresponding locating holes on the other side 3 Mount the upper Q 545 to the lower Q 545 using four M2 5 screws a Manually displace the moving platform of the upper Q 545 until two of the four countersunk holes in the base body are accessible b Insert a screw into each of the two countersunk holes c Tighten the screws with a maximum torque of 72 Ncm each d Make sure that the screw heads do not protrude from the countersunk holes e Repeat steps a to d for the other two countersunk holes in the base body of the upper Q 545 4 Check that the upper Q 545 is affixed firmly to the lower Q 545 Q 545 Stage MP135E Version 1 0 0 29 5 Installation P Ji 5 3 3 Setting Up a Z System with an Adapter Bracket NOTICE Inserting screws and locating pins too deeply Screws and locating pins that are inserted too deeply damage the Q 545 gt Observe the depth of the mounting holes p 65 in the moving platform gt Observe the maximum depth for the insertion of locating pins p 6
38. ing Time p 64 and user manual of the E 871 controller Prerequisites v You have read and understood the general notes on start up and operation p 47 You have properly installed p 21 the stage You have read and understood the user manual of the controller You have read and understood the manual of the PC software XK NN The controller and the required PC software have been installed All connections on the controller have been set up See user manual of the controller Starting up the Q 545 x4x with the E 871 controller 1 Start up the stage see E 871 user manual The start up comprises the following steps Selecting the stage type Defining the reference point of the axis Commanding of first motions for testing Q 545 Stage MP135E Version 1 0 0 53 6 Start Up and Operation E I 2 If necessary Adapt the Maximum Motor Output ID 0x9 parameter to your application also refer to General Notes on Start Up and Operation p 47 and Operating Time p 64 The E 871 user manual describes the start up using the PIMikroMove program 54 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance cccccccccecseeseeeeeeeeeeeeeeeseeeeeeeeseaeeeeeeeeeeessuaaaeeeeeeees 55 Performing a Maintenance HRUD ee eee eee 55 Cleaning the e 55 7 1 General Notes on Maintenance NOTICE l Damage due to
39. ing Time section p 64 Parameter Operating voltage upper limit Operating voltage lower limit Charging current for forward motion Charging for backward motion Operating frequency in step mode Duty cycle of the Current source during the output of one period of the modified sawtooth signal in step mode Number of steps the stage moves per second at the set operating frequency Version 1 0 0 Parameter in E 870 drive electronics Value Unt ID 0x1F000000 ID 0x1F000100 ID 0x1F000200 ID 0x1F000300 ID 0x1F000400 PIShift Charge Cycle ID 0x1F000500 PIShift Steps per Second ID 0x1F000600 MP135E Q 545 Stage 6 Start Up and Operation PIEZO NANO POSITIONING WWW PI WS 6 2 2 Starting Up the Q 545 x4x with the E 871 1A1 Controller INFORMATION If you use the software included in the scope of delivery of the E 871 controller the operating parameters can be loaded from the P MicosStages2 dat stage database The entries in the stage database are updated regularly gt Download the PI Update Finder from the PI website http www update pi portal ws and use it to update the P MicosStages2 dat stage database on your PC For further information see the user manual of the E 871 controller INFORMATION For optimum drive performance in step mode the Maximum Motor Output ID 0x9 parameter in the P MicosStages2 dat stage database takes a value of 15 kHz For further information see Operat
40. ing the ceramic rod of the drive Q 545 Stage MP135E Version 1 0 0 21 5 Installation P Ji Electrostatic hazard Touching the pins in the Sub D 15 connection of models equipped with sensor can damage electrostatic also ESD sensitive components of the Q 545 For this reason these models are supplied with ESD protection NOTICE Q 545 x40 ESD protection cap on the connector m Q 545 x4U Electrically nonconductive foil on the connector f gt Remove the ESD protection from the connection only when you connect the OO 545 to the controller NOTICE Heating up of the Q 545 during operation The heat produced during operation of the Q 545 can affect your application gt Install the Q 545 so that the application is not impaired by the dissipated heat gt Ensure sufficient ventilation at the place of installation gt Make sure that the complete bottom side of the Q 545 is in contact with the surface on which the a a nS Cee IHE 545 is mounted NOTICE Unintentional changes in position with vertical mounting If the load exceeds the self locking of the drive when the stage is mounted vertically unintentional changes in the position of the moving platform occur Unintentional changes in position of the moving platform can damage the drive the load or the environment gt When the stage is mounted vertically make sure that the installed load is lower than the self S a ees of the drive NOTIC
41. inst unintentional loosening e g with threadlocker MP135E Version 1 0 0 25 5 Installation PP I 4 Make sure that the contact resistance at all connection points relevant for mounting the protective earth conductor is lt 0 1 Q at 25 A 5 Check that the Q 545 is affixed firmly to the surface 5 3 Setting Up a Multi Axis System The Q 545 can be used in multi axis systems Typical combinations XY system p 27 Z system p 30 XZ or XYZ combination Figure 7 Example for an XYZ system Three Q 545 140 mounted using an adapter bracket Lower stage Middle stage Q 145 1001 adapter bracket use in a vacuum to 10 hPa Upper stage KR MH gt S 26 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 3 1 General Information on Setting Up a Multi Axis System NOTICE Impermissibly high load on the stages In a multi axis system the stage used for the Y and or Z axis must also be moved Impermissibly high loads impair the motion and can damage the stages gt Include the masses of the moved stages and of the adapter bracket p 13 in the calculation of the load to be moved gt For all stages in a multi axis system Do not exceed the maximum permissible load gt Ifa stage is mounted vertically make sure that the installed load is lower than the self locking of the drive 5 3 2 Setting Up an XY System NOTICE Screws and locating pins that are too
42. inting 10 07 2015 Document number MP135E KSch version 1 0 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Objective and Target Audience of this User Manual sse eee 1 1 2 Symbols and Typographic Conventions sse eee ee eee eee ee 1 1 3 DEO eee E E E E E 2 1 4 SI 3 1 5 Other Applicable Documents sees eee eee ee 3 1 6 Downloading Manuals sese ee eee eee 3 2 Safety 5 2 1 ETO SC BT 5 2 2 General Safety Instructions eee ee eee 5 2 3 Organizational MEASULES cccccsseeecceeceeeeceeeeaaeeceeecaeeeeceeessaaeeeeeesseaeeeeeesaageeees 6 2 4 Measures for Handling Vacuum Compatible Produce sss sees eee 6 3 Product Description 7 3 1 Model OVErVIGW cccccccccccsssceeceeeceeceeeceeceeeceeseeceeseeseeeessaeeessuaeceeseuseeesaaeeeesaaaeees 7 3 2 PO CIC T 9 3 3 Product Ece secs acseteeeateseeseatenenncceseerndetentgacemsag aqaiteenncdeenesacaetsocceeegeaentece 11 3 4 Scope of Delivery esse eee eee eee 12 3 5 PIC eeel L 12 3 6 SU itable BICCUIOMICS crccdceccsicaccenceedcatecoessauinctseederenecddenesacedecce lt ceuteecedseacdoacdteresacnceees 15 3 7 Technical Features cccccccseececceeeeecceeeececceasececseeeecseuseeeseeeeessageeeessgeeeesseeneeas 16 3 7 1 Linear Encoder Sensor eee eee eee 16 3 7 2 Reference eiie T 16 3 7 3 IEG NI e E
43. ng operation gt If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the Q 545 to the protective earth conductor before Starting it up again Burning from hot surface The surface of the Q 545 and its vicinity can heat up during operation Touching the Q 545 and surrounding parts can result in minor injuries from burning gt Cool the Q 545 so that the temperature of its surface and surrounding parts does not exceed 65 C gt If sufficient cooling is not possible Make sure that the hot Q 545 and its Surrounding parts cannot be touched gt If sufficient cooling and protection against contact are not possible Mark the danger zone in accordance with the legal regulations Q 545 Stage MP135E Version 1 0 0 47 6 Start Up and Operation E I NOTICE Overheating during continuous operation The highest velocity is achieved at maximum operating frequency however the Q 545 can overheat during continuous operation as a result gt Observe the recommended operating time according to the operating frequency in step mode p 64 gt Ensure sufficient ventilation at the place of installation NOTICE Damage from collisions Collisions can damage the stage the load to be moved and the environment gt Make sure that no collisions are possible between the stage the load to be moved and the environment in the motion range of the stage gt Do n
44. oad is affixed firmly to the moving platform of the stage MP135E Version 1 0 0 37 5 Installation PI 5 5 Connecting the Q 545 to the Electronics The electronics to be used for operating the Q 545 depends on the presence of a sensor see also Suitable Electronics p 15 Models without sensor Q 545 x0x E 870 drive electronics p 38 Models with sensor Q 545 x4x E 871 p 42 controller INFORMATION The Q 545 and the electronics can be delivered as a pre configured system gt Ifa connection assignment is given on the labels of the Q 545 and or electronics observe this assignment when connecting the Q 545 5 5 1 Connecting the Q 545 to the Drive Electronics Prerequisites v v v v You have read and understood the general notes on installation You have installed the E 870 drive electronics p 15 You have read and understood the user manual of the drive electronics The drive electronics are switched off i e not connected to the power source Tools and accessories If the drive electronics have a Mini DIN 4 socket models E 870 x1 E 870 xG 7202500042 0015 adapter cable in the scope of delivery p 12 If the drive electronics have a connector strip model E 870 10 Suitable adapter from Sub D 15 f to the connector strip The pin assignment of the J10 connector strip 2x4 pin can be found in the E870T0001 Technical Note f you need a suitable adapter contact our customer service
45. on a surface p 23 or on a Q 545 p 26 The stage is disconnected from the electronics You have prepared the load so that it can be affixed to the moving platform for the required position and depth of the holes for accommodating the screws and locating pins see Dimensions p 65 The distance between the center of gravity of the load and the center of the moving platform is as small as possible in all directions Four points are provided for affixing the load to the moving platform If you use locating pins for aligning the load You have made two locating holes of 2 5 mm H7 in the load for accommodating locating pins Tools and accessories Screws of suitable length p 65 Options M2 screws M2 5 screws Suitable tools for fastening the screws Optional 2 locating pins of suitable length for locating holes with 2 5mm H7 Affixing the load to the Q 545 1 2 3 Align the load on the Q 545 so that the mounting holes in the load and the holes in the moving platform overlap If you use locating pins to align the load a Insert the locating pins into the locating holes in the moving platform or in the load b Place the load on the moving platform so that the locating pins are inserted into the corresponding locating holes on the other side Affix the load using the screws Maximum torque for M2 screws 35 Necm Maximum torque for M2 5 screws 72 Ncm Check that the l
46. ot place any objects in areas where they can get caught by moving parts gt Stop the motion immediately if an electronics malfunction occurs NOTICE v Operating frequency too high An operating frequency that is too high can cause damage to the Q 545 gt Only operate the Q 545 with controllers drivers and original accessories from PI gt Do not exceed the operating frequency range p 63 for which the Q 545 is specified 48 Version 1 0 0 MP135E Q 545 Stage 6 Start Up and Operation PIEZO NANO POSITIONING WWW PI WS NOTICE Considerable wear due to high operating frequency A high operating frequency in step mode can cause considerable wear on the mechanical system gt When the E 870 drive electronics are used f necessary reduce the values of the parameters PIShift Steps per Second ID 0x1F000600 and PlShift Frequency ID 0x1F000400 on the drive electronics see documentation of the drive electronics gt When the E 871 controller is used When the PIShift Open Loop Driving Mode ID 0x1F000702 parameter has a value of 0 step mode and motions in open loop operation are initiated with the SMO command The step frequency depends directly from the control value commanded with SMO and is limited by the value of the Maximum Motor Output ID 0x9 parameter If necessary reduce the commanded control value and the value of the Maximum Motor Output parameter gt Reduce the operating time
47. p 3 of the instructions in Setting up an XY System p 27 2 Mount the short side of the adapter bracket to the moving platform of the lower stage a Insert the 2 5 m6 x 4 locating pins into the locating holes in the short side of the adapter bracket from below and up to the limit stop see figure above 34 Version 1 0 0 MP135E Q 545 Stage 5 Installation PIEZO NANO POSITIONING WWW PI WS b If you set up a Z system consisting of a Q 145 1xx adapter bracket and two Q 545 2xx stages Align the adapter bracket so that the moving platforms of the stages cannot collide with each other for permissible orientations refer to Recommended Z Systems p 30 c Place the short side of the adapter bracket on the moving platform of the lower stage so that the locating pins are inserted into the corresponding locating holes in the platform d Insert four M2 5x8 screws into the mounting holes of the adapter bracket e Tighten the screws with a maximum torque of 72 Ncm each 3 Check that the adapter bracket and the upper stage are affixed firmly 5 4 Affixing the Load to the Q 545 NOTICE Impermissibly high forces and torques Impermissibly high forces and torques that are applied to the moving platform can damage the Q 545 gt For affixing type and mass of the load observe the maximum permissible forces according to the specifications p 61 gt Avoid tilting torques at the moving platform NOTICE Scre
48. program set the parameters of the controller so that they correspond to the application load orientation of the Q 545 model see user manual of the controller Cable not connected Check the connecting cable s correctly or defective Excessive load Reduce the load Observe the information in the Technical Data section p 61 If the stage is mounted vertically make sure that the installed load is lower than the self locking of the drive Parameters of the See the Functional impairment after system drive electronics modification problem in this table incorrectly set Operating voltage too Provide an operating voltage of 48 V low Unfavorable operating Adapt the operating frequency for the step mode frequency for step for details see Starting Up the Stage p 50 and mode manual of the electronics used Warped base body gt Mount the Q 545 on an even surface The recommended evenness of the surface is 2 um MP135E Version 1 0 0 57 8 Troubleshooting P I Unfavorable load gt Observe the maximum torque when affixing the load mounting p 35 gt Keep the distance between the center of gravity of the load and the center of the moving platform as small as possible in all directions Unsuitable ambient gt Only operate the Q 545 in a clean environment and conditions within the permissible ambient conditions p 63 Wear of the drive gt Replace the Q 545 and make sure that the operating parameters of the el
49. rews A2 M2 5x8 ISO 4762 Adapter bracket for vertical mounting of Q 545 2x0 stages Material Aluminum 3 3206 anodized mass 49 g includes ee le adone pins A2 2 5 m6 x 4 ISO 2338 4 socket head cap screws A2 M2 5x8 ISO 4762 For Q 545 xxU models only suitable for use in a vacuum to 10 hPa number a drive and sensor signals Sub D 15 m m a drive and sensor signals 3 x Sub D 15 m m drive and sensor signals 6 x Sub D 15 m m Vacuum feedthrough drive and sensor signals 815 VF one wes 15 x Sub D 15 m m DN160CF Adapter bracket for vertical mounting of Q 545 1xU stages Material Aluminum 3 3206 uncoated mass 42 g includes oe l 2 dowel pins A2 2 5 m6 x 4 ISO 2338 4 socket head cap screws A2 M2 5x8 ISO 4762 14 Version 1 0 0 MP135E Q 545 Stage 3 Product Description PIEZO NANO POSITIONING WWW PI WS Order ae Description number Adapter bracket for vertical mounting of Q 545 2xU stages Material Aluminum 3 3206 uncoated mass 49 g includes een 2 dowel pins A2 2 5 m6 x 4 ISO 2338 4 socket head cap screws A2 M2 5x8 ISO 4762 gt To order contact our customer service department p 59 3 6 Suitable Electronics Eoct oni s E Stage without Stage with PEEPS D ONON sensor sensor pilai Lait Q 545 x00 Q 545 x40 Q 545 x0U Q 545 x4U PIShift Piezomotor PiezoMike E 870 10 Drive Electronics 1 Channel OEM Board PIShift Piezomotor PiezoMike
50. s with large temperature changes The surface should have the same thermal expansion properties as the Q 545 e g surface made of aluminum The evenness of the surface is lt 2 um You have accounted for the space required to route cables without bending and according to regulations Tools and accessories 5861500010 screw set from the scope of delivery of the Q 545 p 12 2 dowel pins 2 5 m6 x 5 ISO 8734 for use as locating pins 4socket head cap screws M2 5x5 ISO 4762 Suitable tools for fastening the screws Threadlocker Mounting the Q 545 on a surface and connecting it to a protective earth conductor 1 Align the Q 545 on the surface using the locating pins a Introduce the two locating pins into the locating holes on the bottom side of the Q 545 see figure above or in the surface b Place the Q 545 on the surface so that the locating pins are inserted into the corresponding locating holes on the other side Mount the Q 545 on the surface using four M2 5 screws a Manually displace the moving platform of the Q 545 until two of the four countersunk holes in the base body are accessible b Insert a screw into each of the two countersunk holes c Tighten the screws with a maximum torque of 72 Ncm each d Make sure that the screw heads do not protrude from the countersunk holes e Repeat the steps a to d for the other two countersunk holes in the base body of the Q 545 3 Secure the screws aga
51. separate decimal places Depth and diameter of holes Period All other dimensions Comma A A 4x O02 9 L_J 05 5 29 2x 2 5H7 3 8 2x 2 5H 1 4 4x M254 40 Figure 23 Q 545 20x Q 545 Stage MP135E Version 1 0 0 67 10 Technical Data PP I 10 3 4 Q 545 24x Dimensions in mm Characters used to separate decimal places Depth and diameter of holes Period All other dimensions Comma 4x 2 9 L_ 65 5 29 A 2x 2 5H7 73 8 Cw ald Y te F T k l e 1 T ODRE TCE A 9 45 4x M2544 4x M2594 4x M24 Figure 24 Q 545 24x 68 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 5 Q 145 1001 and Q 145 10U1 Adapter Brackets Dimensions in mm Note that the decimal places are separated by a comma in the drawings 4x 2 5 H x3 5 8 Figure 25 Q 145 1001 adapter bracket dimensions of the Q 145 10U1 adapter bracket are identical Q 545 Stage MP135E Version 1 0 0 69 10 Technical Data PP I 10 3 6 Q 145 200 and Q 145 20U Adapter Brackets Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 26 Q 145 200 adapter bracket dimensions of the Q 145 20U adapter bracket are identical 70 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 7 Vacuum Feedthroughs Available vacuum feedthroughs C 815 VF p 71 815 V
52. smpsbasuenbssnuiamenknnttaadamennuathunmenaiannadas 61 10 1 1 Pit Ts AON cee rsa ce apes ensate ce ae eanseceeauaes Sea sence ncgeecaiet seneoegseaseesSeaenecesseeee 61 10 1 2 Maximum Rains see eee eee eee 63 10 1 3 Ambient Conditions and Classifications sse eee eee eee 63 10 2 Operating Time sse eee eee eee 64 103 ITVS NOS T 65 10 3 1 6 LT 65 10 3 2 EA A 66 10 3 3 12 aE A EAEE EE 67 10 3 4 a S A e PEE E A AEE E AE EE E E A E E 68 10 3 5 Q 145 1001 and Q 145 10U1 Adapter Brackets sss 69 10 3 6 Q 145 200 and Q 145 20U Adapter Brackets sss 70 10 3 7 Vacuum Feedthroughs sss sees eee eee 71 10 4 Pin ASSIQNIM GI vicntasinnccictnencacaliensentadmusnantanaechddesanneaennentalansatasaniedadduetanatNencentaianadns 76 10 4 1 OO TTT 76 10 4 2 6 T T 77 10 4 3 C 815 VF Vacuum Feedthrough ccccccseecceeeceeseeeeeseeeeeeeeeeeaaeeeees 78 10 4 4 C 815 VFUx Vacuum Feedthrough ccccceccsseeeeeeeeseeeeeeeeesaeeeess 80 10 4 5 5604500041 Adapter 81 PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 12 EC Declaration of Conformity 83 85 PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Objective and Target Audience of this User Manual sse 1 Symbols and Typographic Conventions eee ee 1 DENNO are aanee secinssiet easesoeuactcuee i eeessaqessaneesestetgecescuaet esececesanesos 2 PEI eistieadeinaven ea savoss ante PesweniatsnanteaSetsnsaax
53. sories 7202500043 0015 Y adapter cable in the scope of delivery p 12 If a Q 545 x4U is to be operated at atmospheric pressure 5604500041 adapter in the scope of delivery p 12 If the Q 545 is to be operated in a vacuum E 873 UHVx extension cable available as optional accessory p 13 Suitable vacuum feedthrough available as optional accessory p 13 For Q 545 x40 C 815 VF For Q 545 x4U C 815 VFUx Suitable tools for installing the vacuum feedthrough 42 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Connecting the Q 545 x4x to the E 871 controller for operation at atmospheric pressure 1 2 L Figure 17 Connection diagram for Q 545 x40 and controller for operation at atmospheric pressure 1 Controller here E 871 1A1 2 7202500043 0015 Y adapter cable 3 Q 545 x40 Figure 18 Connection diagram for Q 545 x4U and controller for operation at atmospheric pressure Controller here E 871 1A1 7202500043 0015 Y adapter cable 5604500041 adapter Q 545 x4U Aa M 1 Remove the ESD protection from the Q 545 Q 545 x40 Remove the ESD protective cap from the Sub D 15 m connector Q 545 x4U Remove the protective foil from the Sub D 15 f connector Q 545 Stage MP135E Version 1 0 0 43 5 Installation PP I 2 Q 545 x4U only Connect the Sub D 15 f connector with the 5604500041 adapter 3 Connect the Q 545 with the Y adapter cable
54. the corresponding product go to the Manuals sub directory Copy the desired manual to the hard disk of your PC or to a data storage medium Version 1 0 0 MP135E Q 545 Stage 2 Safety PIEZO NANO POSITIONING WWW PI WS 2 Safety In this Chapter Mendod USG TTT 5 General Safety Instructions eee eee eee 5 Organizational MEASUIES ccccccseeeeeccccceeeeeeeseeeceeeeeeeueeeseceeeeesseeeaeseeeeeeeesseaeeeeeeeeeesaaas 6 Measures for Handling Vacuum Compoatible Products sss esse eee ee eee 6 2 1 Intended Use The Q 545 is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants In accordance with its design and realization the Q 545 is intended for single axis positioning adjusting and shifting of loads at different velocities in interval operation The Q 545 uses a PIShift piezomotor as a drive When at rest the drive is self locking requires no current generates no heat and maintains its position The Q 545 can be mounted in any orientation The specifications of the Q 545 apply to horizontal mounting p 61 The Q 545 is not intended for applications in areas in which a failure would present severe risks to human beings or the environment For further information on the operating conditions of the Q 545 see Technical Data p 61 some models of the Q 545 are equipped with a linear encoder for direct position
55. tion 8 N Push Pull Force Dimensions 45 x 48 x 15 mm W x L x H Piezoelectric Inertia Drive Vacuum Compatible to 10 hPa Q 545 20U Q Motion Linear Stage 26 mm Travel Range without Position Sensor for Open Loop Operation 8 N Push Pull Force Dimensions 45 x 63 x 15 mm W x Lx H Piezoelectric Inertia Drive Vacuum Compatible to 10 hPa Q 545 24U Q Motion Linear Stage 26 mm Travel Range Linear Encoder 1 nm Resolution 8 N Push Pull Force Dimensions 45 x 63 x 15 mm W x L x H Piezoelectric Inertia Drive Vacuum Compatible to 10 hPa 8 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 2 Product View Figure 1 Example for models without sensor Q 545 200 stage 1 Moving platform 2 Cable exit for drive connection 3 Connection for drive with Q 545 x00 models Sub D 15 m connector with Q 545 x0U models Sub D 15 f connector 4 Type plate p 11 5 Base body Q 545 Stage MP135E Version 1 0 0 9 3 Product Description E l 8 7 Figure 2 Example for models with sensor Q 545 240 stage 1 2 3 4 Moving platform Cable exit for drive connection Warning sign Electrostatic sensitive devices Connection for drive and sensor with Q 545 x40 models Sub D 15 m connector with Q 545 x4U models Sub D 15 f connector 5 ESD protection ESD protective cap with Q 545 x40 nonconductive foil with Q 545 x4U 6 Type plate p 11 7 Cable exit for sensor conn
56. with a high operating frequency p 64 gt Stop the motion immediately if an electronics malfunction occurs NOTICE Operating voltage too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause damage to the Q 545 gt Only operate the Q 545 with controllers drivers and original accessories from PI gt Do not exceed the operating voltage range p 63 for which the Q 545 is specified gt Only operate the Q 545 when the operating voltage is properly connected see Pin Assignment p 76 NOTICE Reduced lifetime of the piezo actuator due to permanently high voltage The permanent application of a high static voltage to piezo actuators leads to a considerable reduction in the lifetime of the piezo ceramic of the stage gt When the Q 545 is not used switch off the electronics Q 545 Stage MP135E Version 1 0 0 49 6 Start Up and Operation E I NOTICE Destruction of the piezo actuators by electric flashovers Using the Q 545 in environments that increase the electrical conductivity can lead to the destruction of the piezo actuators of the drive by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials e g metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the Q 545 in environments t
57. ws and locating pins that are too long Screws and locating pins that are inserted too deeply damage the Q 545 gt Observe the depth of the mounting holes p 65 in the moving platform gt Observe the maximum depth for the insertion of locating pins p 65 into the moving platform gt Only use screws and locating pins of the correct length for the respective holes Q 545 Stage MP135E Version 1 0 0 35 5 Installation PP I are SL U K o m mbo a dhE U Figure 11 Q 545 14x The arrows mark the following mounting holes in the moving platform of the Q 545 1xx For aligning the load White arrows Locating holes 2 5 mm H7 depth 2 5 mm For affixing the load Dark gray arrows M2 5 threaded holes depth 5 mm Light gray arrows M2 5 threaded holes depth 4 mm Black arrows M2 threaded holes depth 4 mm Figure 12 Q 545 24x The arrows mark the following mounting holes in the moving platform of the Q 545 2xx For aligning the load White arrows Locating holes 2 5 mm H7 depth 1 4 mm For affixing the load Dark gray arrows M2 5 threaded holes depth 4 mm Light gray arrows M2 5 threaded holes depth 4 mm Black arrows M2 threaded holes depth 4 mm 36 Version 1 0 0 MP135E Q 545 Stage PIEZO NANO POSITIONING WWW PI WS Q 545 Stage 5 Installation Prerequisites v v You have read and understood the general notes on installation p 21 You have properly mounted the stage

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