Home

VS Series Helium Mass Spectrometer Leak Detector

1. aoe aroan LL mmm aoa Pe tice m 5 TOES ET za alt aoe SS Si Fo i at aa ES BEER le bk a qocoviee 7 EN E Toere See Ee d weer oor ng GE am Erg S l ees Bes t O O z Kg H del Etg nee E a E aove 00 24 E pE mm ZE E 0E Tw p gl z ll KL d E GO Ke Gi am ES i ES HE E E EE zi Teter i E d E ES ae mee RK E weg ta 2 HE SCH B ELE ma S m E E aoa na ES aJ z SE S SCH pe ira l e a en PET D kee LE F bal oa Toeoet zu aves ELS ZEN O o aii E SS met en breet e CG Ham E E oam meus ore ura D i j e Se ee a mis ie UA y Si IE Ae IAEA Je i EH ZS O f maa Elle luau usuy ose U uh O O Se m Topo si 2 i m Tee E GC Sis D al wamoa 029 e Fi e renee AE TPP a torr open Li elle N H h n H Iw 4 E eeng ES e kee i vlt loo Ie a SS S a Ea b one Zem xos wa HG tremorsao meet ZIL LE Fo seem Sal H ma ase wen EH voor g 5 ci nil S f z 5 md e enue D ae d D Se i GES
2. Figure 1 5 Screen Flow CONTROL PANEL ZERO GROSS TEST MENUS CALIBRATION LEAK RATE SET UP RANGING SET UP REJECT AUDIO TRANSFER CONTROL PANEL SETPOINTS POINTS ACCESS SYSTEM AUTO INFORMATION SEQUENCER SET UP ADVANCED MANUAL MANUAL VALVE PARAMETERS TUNING CONTROL d PASSWORD OUTPUT ee UNITS LANGUAGES NEXT SET UP GAUGE CALIBRATION MAINTENANCE FORE PUMP WIRELESS VS Series Helium Mass Spectrometer Leak Detectors 1 3 Display Panel Controls Table 1 2 Screens General Description Screen Purpose Home Accesses the Control Panel and Menu screens Activates the Zero function The LED illuminates while zeroing occurs Accesses the Gross Leak Test screen when Gross Test is pressed Control Panel Activates deactivates Q Std Leak Q Zero Enable Q Hold Q Calibrate Displays the type of leak Internal or external associated with Calibrate Adjusts the speaker volume Menus Accesses the following screens for tailoring leak detector operation Q Calibration Set Up Configures leak type mode and parameters O Reject amp Audio Set Points Configures parameters and toggles operations on off for each reject set point and for the audio threshold Leak Ranging Configures the Range Stop Manual Range values toggles the high pressure test feature and toggles operations on off Transfer Pressure Configures the Maximum Test Pr
3. Interconnection Diagram Figure E 1 Ei VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss o
4. eg THL 4O gor INANOAWOD FHL WOUT NMOHS TUY SNOILOUNNOD TIY Son i yoeveteu KS
5. Company Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only Taxable O Non taxable 2 PRODUCT IDENTIFICATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A Li Non Billable i Billable mmm Neu PO hard copy must be submitted with this form 3B Exchange L_ Repair C Upgrade L_ consignment Demo C Calibration Evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one O HAS NOT pumped or been exposed to any toxic or hazardous materials OR O HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed L Hoxie L Corrosive L Reactive C Flammable C Explosive C Biological O Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is cont
6. 4 Diaphragm Pump PDO3 Q Disconnect hose to diaphragm pump inlet and verify system and pump motor are making audible sounds Q Check diaphragm pump for damaged diaphragm and replace if required QO Replace diaphragm pump especially pump HR5 gt 15000 hours 5 V8 PDO3 only Exhaust valve not activating O Verify on the front panel display that the valve error symbol is flashing replace V8 O Verify in the Manual Valve menu that V8 indicates a failure red circle replace V8 Q Valve Driver Board failure remove covers while in Test disconnect power connections for V8 and measure if 24 VDC is present if not replace the Valve Driver board D 25 VS Series Helium Mass Spectrometer Leak Detector Front Panel Display Difficulty selecting menus or in activating deactivating features options D 26 Causes Resolutions Front Panel Display is out of calibration Q Re calibrate front panel by a b G Turning off leak detector Place and hold a finger on front panel and hold power up unit A blue screen appears with the message Touch all Crosshairs In every corner of the screen a crosshair appears touch all four crosshairs A second message appears Accept Calibration select Accept VS Series Helium Mass Spectrometer Leak Detector Appendix E Interconnection Diagram 002 o Suerg
7. Gain Too Low error message and a flashing C appear on the front panel display after a calibration attempt Too much helium signal during calibration Gain lt 8 Causes Resolutions 1 Calibrating to the wrong calibrated leak or the leak rate value was incorrectly entered a Open the Calibration Set Up screen and verify that the correct calibrated leak is selected b Select Setup Menu gt Maintenance Option gt Internal Calibrated Leak and verify that the programmed parameters match the calibration certificate or physically check the information on the label for the internal standard leak Figure D 5 on page D 6 2 Leak present in system Q Leak check the system concentrate around the internal calibrated leak spectrometer turbo pump mechanical pump and foreline connection 3 Emission current set to high a Select Setup Menu gt Manual Tuning Note the emission reading The factory default is 702 mA but adjustments can be made If the Emission is set for gt 1 0 mA it may be necessary to turn it down b Measure test points EMISS T P and TP101 FIL GND Emission current on the lon Source board Figure D 13 The measured voltage should correspond to the observed reading in the Manual Tuning screen within 10 If the measurement voltage Emission current is gt 2 0 VDC and cannot be adjusted replace the lon Source board Emission current measurement Figure D 13 lon Source Board Measurement Poin
8. 5 Loosen and remove the four hex nuts lock washers and washers in the back of the fan in the corners Figure 7 4 Figure 7 4 Fan Nuts NOTE The fan spacers are part of the fan unit and will not loosen 6 Mount the replacement fan using the four hex nuts lock washers and washers 7 Replace the red black wire connector 8 Reinstall the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 7 2 on page 7 2 9 Using an extended length M5 Allen wrench reinstall the four screws holding the rear plastic cover Figure 7 2 on page 7 2 7 3 VS Series Helium Mass Spectrometer Leak Detector To replace the bottom fan 1 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 7 5 and detach the rear plastic cover from the unit 2 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 7 5 Front Cover Screws Rear Cover Screws Figure 7 5 Rear and Front Cover Screws 3 Disconnect the red black wire connector Figure 7 6 Figure 7 6 Fan Wiring 7 4 VS Series Helium Mass Spectrometer Leak Detector 4 Loosen and remove the four hex nuts lock washers and washers in
9. Agilent does not recommend the use of vacuum grease Vacuum grease absorbs helium tracer gas and releases this slowly resulting in helium background during leak test operations If it must be used use it sparingly and avoid silicone types Apiezon L grease is recommended Agilent Part No 695400004 When removing checking or replacing O rings CAUTION NOTE NOTE 25 2 Remove O rings carefully with your fingers Do not use metal tools for this task This prevents scratching of any sealing surfaces Wipe all O rings clean with a lint free cloth before installation to ensure that no foreign matter is present to impair the seal Do not use grease or any other substances on O rings or metal seals that will come in contact with the spectrometer Do not use alcohol methanol or other solvents on O rings as this causes deterioration and reduces their ability to hold a vacuum If applicable apply a small amount of Apiezon L grease and wipe the O rings shiny dry Due to the effective cleaning nature of VacuSolv solvent and its residue free properties Agilent Component and Spectrometer Cleaning Kit Part Number 670029096 used in accordance with the kit instructions is recommended for cleaning spectrometer components The kit can also be used for fine cleaning of other parts in the leak detector s vacuum system such as valves and fittings No rinsing steps or high temperature drying are required following cleaning wi
10. When calibration is successful filament replacement is complete VS Series Helium Mass Spectrometer Leak Detector Section 15 Flapper Box Installation 15 1 Installation Procedure Equipment Required O Extended Length M5 Allen Wrench QO Metric Allen Wrench Set Q Flapper box kit P N VSFLDFBCP for leak detectors with Compression Port adapter installed Q Flapper box kit P N VSFLDFBNW25 for leak detectors with NW 25 Flange NOTE To operate the Flapper Box the leak detector must have CPU software LDO2 11 or greater If correct software is not installed contact Agilent Customer Service For clarity some items have been omitted from views 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 15 1 and detach the rear plastic cover from the unit 4 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 15 1 Front Cover Screws Rear Cover Screws te aR A Figure 15 1 Rear and Front Cover Screws 15 1 VS Series Helium Mass Spectrometer Leak Detector WARNING Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting AN an
11. Discrete I O PCB R2111501 Test Port TC FO0472301 Wireless Base PCB R2541301 25 6 VS Series Helium Mass Spectrometer Leak Detector 25 4 Leak Detector Accessory Item List Table 25 5 Leak Detector Accessory Item List Assembly Part Number Flapper Box NW25 Flange L6241302 Power Probe 10 NW25 Flange K9565306 Power Probe 25 NW25 Flange K9565307 Spare Tip Filters for Power Probe Qty 10 K9565303 Throttle Valve NW25 Flange R1947301 Elite Z Mechanical Pump Fluid 695409005 Calibrated Leak 10 10 NW25 Flange F8473320 Calibrated Leak 10 NW25 Flange F8473321 Calibrated Leak 108 NW25 Flange F8473322 Calibrated Leak 10 NW25 Flange F8473323 Calibrated Leak 1071 NW25 Flange F8473324 Oil Mist Eliminator VSFLDME Filter Oil Mist Eliminator 649071021 Inlet Adapter Kit NW25 1 1 8 Compression LDCOMPINADKIT Wireless Remote Unit Model VSLDWRC VSLDWRC Field Installed I O Assembly VSFLDIO Field Installed Wireless Remote Base Unit VSFLDWB 25 7 VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Section 26 Leak Checking for Reliability Accuracy reliability and stability of any mass spectrometer leak detector depends upon the leak free integrity of its own vacuum system Inherent helium background and
12. TEST_OUT Active HIGH when the leak detector is in FINE TEST mode Indicates that the leak detector is ready for fine leak testing REJECT1_ OUT Active HIGH when the leak rate is over set point 1 Indicates that the value of the leak rate exceeds the value set in the 1REJECT variable REJECT 2_ OUT Active HIGH when the leak rate is over set point 2 Indicates that the value of the leak rate exceeds the value set in the 2REJECT variable REJECT3_ OUT Active HIGH when the leak rate is over set point 3 Indicates that the value of the leak rate exceeds the value set in the 3REJECT variable VS Series Helium Mass Spectrometer Leak Detectors Signal Name REJECT4_ OUT Table A 6 Description Active HIGH when the test port pressure is over set point 4 UO Connector Pin Signals Continued Leak Detector Behavior Indicates that the value of the test port pressure exceeds the value set in the A4REJECT variable CAL_OUT_ OK Active HIGH when calibration is successful Indicates the calibration has successfully completed Set low on power up or if calibration is not successfully completed AUTO_ MANUAL_ RANGE_IN Active HIGH when Manual Ranging is selected Activation causes the leak detector to change from AUTO to MANUAL ranging Default is AUTO CAL_IN gt 200 ms Pulse Active HIGH pulse Initiate CALIBRATING routine
13. Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are sub
14. fs Agilent Technologies Vacuum Products Division cE VS Series Helium FIELD SERVICE COMPONENT REPLACEMENT Mass Spectrometer MANUAL Leak Detector Models PR02 MR15 MD30 BR15 BD30 and PD03 Manual No 699910004 Revision B January 2009 VS Series Helium Mass Spectrometer Leak Detector VS Series Helium Mass Spectrometer Leak Detector Alconox is a registered trademark of Alconox Inc Apiezon is a registered trademark of M amp I Materials Ltd Scotch Brite is a trademark of 3M Loctite and PST are registered trademarks of Loctite Corporation Teflon is a registered trademarks of E L du Pont de Nemours and Company Copyright 2009 Agilent Inc VS Series Helium Mass Spectrometer Leak Detector Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve 12 months from date of shipment thereof to Customer and Seller s liability under valid war ranty claims is limited at the option of Seller to repair to replace or refund of an equitable portion of the purchase price of the Product Items expendable in normal use are not covered by this warranty All warranty replacement or repair of parts shall be limited to equipment malfunctions which in the sole opinion of Seller are due or traceable to defects in original materials or workmanship All obligations of Seller under this warranty shall cease in the event of abuse accident alteration misuse or neglect
15. 10 8 28 29 30 31 32 33 34 35 36 Connect the spectrometer ground cable the preamp signal cable and the ion source cable to the spectrometer cover Ensure that the vent valve on the turbo molecular pump if installed is tightened Figure 10 13 NOTE The vent valve is not installed on most turbo pumps Figure 10 13 Vent Valve Attach the fan assembly Figure 10 2 on page 10 2 by fastening two wing nuts and one M4 socket head cap screw Then connect the fan cable to the unit Leak check the spectrometer to ensure a leak free joint Attach the rear cover and secure to the unit using existing hardware Power up the unit Watch the Home screen to verify that the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes Refer to the user manual if the system fails to reach the System Ready mode The filament emission current normally operates at 0 8mA Use the display menus MENUS SET UP MANUAL TUNING EMISSION to set the emission to 8mA NOTE Agilent recommends that you wait a minimum of 30 minutes for the vacuum system to clean up to obtain optimum calibration Calibrate the system per the user manual For proper operation the system must be calibrated after opening the spectrometer or changing a filament VS Series Helium Mass Spectrometer Leak Detector 37 If the system fails calibration adjust the filament emission current as follows O If
16. 16 Secure to the spectrometer header using two M4 support screws 17 Connect the collimator wire to the collimator plate using an M1 5 screw Figure 14 8 Figure 14 8 Partial Pressure Plate 18 Insert the chamber and extractor wires into the ion support assembly Figure 14 9 and Figure 14 10 Extractor Plate Ton chamber Figure 14 9 Extractor Plate CAUTION Do not cut the wires by over tightening Ensure that wires are contacting the assembly where required and that no short circuit exists 14 6 VS Series Helium Mass Spectrometer Leak Detector Repeller plate edge Center line of filament should line up with the edge of the repeller plate Figure 14 10 Filament Alignment 19 Insert each new filament assembly into a pair of couplers 20 Guide the ceramic against the bottom and side ribs of the ion source support block Figure 14 11 and Figure 14 12 on page 14 8 Correct positioning of filament is critical for proper spectrometer operation Support Ribs on Ion Support Block Filament Assembly Figure 14 11 Coupler and Filament Assembly 14 7 VS Series Helium Mass Spectrometer Leak Detector 21 While holding the filament in position insert the M2 screw and washer and tighten Figure 14 12 22 Tighten the coupler screws onto the filament posts Figure 14 12 23 Verify ceramic is tight against the bottom and right side ribs Ensure that the filament is positioned in
17. 26 1 VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detectors Appendix A Communications Protocol This appendix defines the technical specifications for the RS 232 protocol used with the leak detector and describes the customer configured inputs outputs A 1 Protocol RS 232 RS 232 ports operate at 9600 baud 8 bits no parity and one stop bit All characters transmitted to the leak detector are echoed by the leak detector Commands inquiries and strings of both commands and inquiries must be terminated by a carriage return lt CR gt the carriage return is echoed as a space character The maximum length of the input is 80 characters if no carriage return has been received before the 80th character execution of the command string begins anyway Words that begin with O are inquiries for the controlling device to determine the current state or value of a leak detector parameter O PUT are commands for the controlling device to set the current state or value of a volatile leak detector parameter O INIT are commands for the controlling device to set non volatile leak detector parameters Other commands do not require a parameter and do not begin with any special characters Successful inquiries respond with data followed by a space then ok lt CR gt lt LF gt as specified in the tables of this appendix Unsuccessful inquiri
18. Figure 8 1 Rear and Front Cover Screws 8 1 VS Series Helium Mass Spectrometer Leak Detector 8 2 4 Remove the user interface front cover using an Allen wrench to loosen the M4 screw and washer at the bottom front of the plate Figure 8 2 Figure 8 2 User Interface Plate Mounting Screw 5 Gently rock the interface panel up and out VS Series Helium Mass Spectrometer Leak Detector 6 Disconnect Figure 8 3 QO P401 red black wire from position J401 Q Ground wire from the Front Panel using a small Phillips head screw driver and place washer aside Q R2148301 red black wire from position J301 Spkr connection QO R2127 301 green cable from position J303 COM1 connection Q J300 2 from the P300 connector using the two captive screws 7 Remove the assembly and lay it aside Figure 8 3 Interface Board Wiring VS Series Helium Mass Spectrometer Leak Detector 8 Remove the bank of connections shown in Figure 8 4 Label the wires as they are disconnected from left side LI SP1 goes to L on power supply SPN goes to N white on power supply SPG green yellow goes to CGND2 on power supply SP GND goes to GND on power supply LU UU wv Three red wire lead Q PS1 goes to POS1 V on power supply Q PS2 goes to POS2 V on power supply Q PS3 goes to POS3 V on power supply Q Three black wire lead Q PS4 goes to POS4 V on power supply Q PS5 goes to POSS V on power supply QO PS6 goes to P
19. M 4 Screw Figure 15 6 Front Panel Removal 15 3 VS Series Helium Mass Spectrometer Leak Detector 13 Remove the M4 screws Figure 15 7 and gently lean the PCB Mounting Tray forward to gain access to the Flapper Box Wiring Harness M 4 Screws Figure 15 7 PCB Mounting Tray 14 Install the Flapper Box Wiring Harness as shown Figure 15 8 utilizing the top two wire clips only use bottom wire clip if accessible Figure 15 8 Flapper Box Wiring Harness Layout 15 Reinstall the M4 screws Figure 15 7 16 Reinstall the M4 screw Figure 15 6 on page 15 3 17 Reinstall the Figure 15 2 on page 15 2 Q Fan assembly by tightening the M4 socket head screw Q The plastic shield using the two wing nuts 18 Attach the front cover and secure to the frame using existing hardware 15 4 VS Series Helium Mass Spectrometer Leak Detector 19 Carefully locate the Flapper Box Wire Harness leads between the front cover and the test port Figure 15 9 20 Attach the rear cover and secure the unit using existing hardware Flapper Box Wire Harness Leads if Figure 15 9 Front Cover Assembly 21 Install the flapper box for Q P N VSFLDFBNW25 Utilizing the NW 25 Centering Ring and Quick Clamp Figure 15 10 Q P N VSFLDFBCP Inserting the Flapper Box into leak detector s Compression Port Adapter and tighten 22 Connect the leads of the Flapper Box to the leads of the Wire
20. Oil Mist Eliminator 649071021 Inlet Adapter Kit NW25 1 1 8 Compression VSFLDCP B 3 VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Appendix C VS Series Leak Detector Hardware Descriptions The VS Series Helium Mass Spectrometer Leak Detector system hardware locates and measures the partial pressure of helium that is proportional to the desired Helium leakage flow rate in a vacuum system under full software control The VS Series leak detector hardware provides m m m m Q Gas evacuation and high vacuum creation in the test port and spectrometer tube Helium detection and leak rate measurement Microprocessor based software control of all leak detector functions mode and operations such as O Spectrometer tube electrode parameters O Leak rate analog to digital and digital to analog conversion calculation and presentation via LCD Display audio speaker analog voltage and RS 232 outputs O Spectrometer and Test Port pressure measurement calculation and presentation via the LCD display and RS 232 output Valves control Turbo molecular and mechanical pumps control Front Panel control and indication Ooo wv Discrete I O reading and control O Wireless remote control AC to DC voltage supply conversion and distribution Protected AC power for the mechanical pumps VS Series hardware resides
21. e g 7 0E 05 where x is a number from 1 to 4 or the letter A ROUGH Reports the currently stored Test Sequencer rough time used as part of setting up the Auto Sequencer RSONOFF Reports the status of the Rangestop function as Enabled or Disabled 2SEQONOFF Reports the status of the Auto Sequencer as Enabled or Disabled SETUP Reports seven lines each begins with a lt cr gt lt lf gt The first line reports the turbo pump speed with the RPM value or OFF The second line reports the selected manual leak rate range and the ranging method as auto or manual The third line reports the least sensitive leak rate range The fourth line reports the reject set point leak rate The fifth line reports the internal calibrated leak rate value The sixth line reports the DAC output method as Linear Log 2V or Log 3V The seventh line reports the active filament status as One or Two followed by Lit or Out SPLITFLOW A 6 Returns the status of the split flow function ON or OFF VS Series Helium Mass Spectrometer Leak Detectors Table A 1 Internal Operating Parameters Continued Inquiry Response STDLEAK Reports a six character number consisting of a two digit calibration standard leak rate mantissa with a decimal point after the first digit followed by E and then by a two digit exponent e g 1 3E 07 This inquiry is used for reporting the calibration standard leak rate entered using INIT
22. to the right of the Test Port TC Zero box confirms that the calibration was successful O A Failed message indicates that the calibration was not successful A Failed message results from a defective or contaminated thermocouple gauge or the fact that the actual pressure was not at or near zero Verify the latter case using an appropriate vacuum gauge installed on the test port 6 Press Done to leave the screen and return to the previous menu 24 2 2 Atmospheric Calibration To perform Atmospheric Calibration 1 Ifthe system is not already in Vent mode press VENT 2 Wait approximately ten seconds for the test port pressure to stabilize then move to the Gauge Calibration screen Figure 24 2 on page 24 4 3 Press Test Port Atm You will receive one of the following messages Q A Cal OK indication to the right of the Test Port TC Atm box confirms that the calibration was successful 24 5 VS Series Helium Mass Spectrometer Leak Detector Q A Failed message indicates that the calibration was not successful This is the result of a defective or contaminated thermocouple gauge or that the actual pressure was not at or near atmosphere Verify the latter case using an appropriate vacuum gauge installed on the test port 4 Press Done to leave the screen and return to the previous menu 24 3 Maintenance Screen Use this screen to access the Internal Calibration Leak screen 1 Press Set Up on the Menu screen to open
23. 1 O Felt Tip Pen For clarity some items have been omitted from views WARNING Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting AN any part of the system 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 23 1 and detach the rear plastic cover from the unit Front Cover Screws Rear Cover Screws Figure 23 1 Rear and Front Cover Screws 23 1 VS Series Helium Mass Spectrometer Leak Detector NOTE Always change the valve plates diaphragm and sealing rings at D the same time 4 Remove the pump head by Figure 23 2 L OEE Ce ey TSN vy ea 14 y SSS SSE KS ee GE SSS X Figure 23 2 Pump Head Removal a Making a mark M on the head plate 3 intermediate plate 2 and housing 1 with a felt tip pen b Undoing the 4 screws 4 in the head plate and lifting the head plate with the intermediate plate off the pump housing For models with Q DC motors no cooling fan Removing the cover 6 from the pump housing 1 by inserting a screwdriver into the slots on the sides and prying the cover off with care the adhesive gasket between cover and housing may be reused Q No fan Reference is made to tu
24. 1 1 Equipment Required O Extended Length M5 Allen Wrench O Metric Allen Wrench Set O M3 Phillips Head Screw Driver For clarity some items have been omitted from views WARNING Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting AN any part of the system 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 20 1 and detach the rear plastic cover from the unit Front Cover Screws Rear Cover Screws VE EEN Figure 20 1 Rear and Front Cover Screws 20 1 VS Series Helium Mass Spectrometer Leak Detector 4 Disconnect the two spade connectors red arrow in Figure 20 2 Q Red black Q Black black fsx a AMMA eeng y Figure 20 2 Spade Connectors 5 Use an Allen wrench to loosen valve from housing blue arrow in Figure 20 2 6 Mount the new valve and tighten 7 Reconnect the two spade connections 8 Attach the front cover and secure to the frame using existing hardware 9 Attach the rear cover and secure to the unit using existing hardware 10 Connect the power cord and power up the unit 11 Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes Refer to the operator s man
25. 5 14 M4 Mounting SCREWS Eege ERC EE ee 5 14 Valve Driver Board Mounting Gcrews AE 5 15 Rear and Front Cover Sere EE 5 16 M4 Rer nee 5 16 Turbo Controller Board Mounting Gcrews AA 5 17 Rear and Front Cover EE 6 2 Valve BlOCk Rue EE 6 3 Fore PUMP C p EE 6 4 Cap Wire ConnectionS sates re eege ee 6 4 Fore Pump MOUntING SChEWS niseni ied cael e Ee hae ET 6 5 Fore Pump Mounting Spacers ENEE 6 5 Rear and Front Cover Screws s cccissscc cciianccida docaphecst beseech agegaaibesiaiodleadectidestiaucesheawtenenss 6 7 Sensor Wiring and Hun ele e EE 6 7 Blanne ee re VE 6 8 Test Port Grounding Wire EIER eege eege eegene 6 8 VAC EISEN 6 9 ValveiBlock anc TO Ground WE 6 9 Spectrometer Ground NEE 6 10 Valve Block Assembly and Spectrometer Mounting Nuts 6 10 T rpo P UMP OME TEE 6 11 Berl OC AUIS ese aNd als ale dente tn ve cetacean dace dane eacade E A TA ees 7 1 Rear and Front Cover EE 7 2 Fan WNO WEE 7 2 Fan Niege eege E 7 3 Rear and Front Cover EE geegent eecnedlon aegusneemea e dE 7 4 Fan Wiring WEE 7 4 Fore EUREN ee Ee EE EE 7 5 Rear and Front EE 8 1 User Interface Plate Mounting SCrewW EENEG EE 8 2 Intert ce Board NV IRI EE 8 3 Power Supply Connections gu tcctcenetstecszespecdsaveleeeeiiineds taiaienienssueetetuade agee a beneiaadideeuatetenes 8 4 Power Supply Mounting Kelte is c2deccesets vcd cease asec cnpied be decedent eege SEH ed 8 5 Rear and Front Cover EE 9 1 Speaker N ts and WV IIIA ee ed Een o e e a yok ra a E N acs 9 2 ee E
26. Gain changes Zero by the same percentage which can affect system transfer points Typical gain values range from 0 8 to 3 0 The higher the gain the more noise shows up in the least sensitive range To change a manual tuning parameter 1 Press the desired parameter When you press the box containing the desired variable a highlighted indicator appears to the right of the numbers 24 2 VS Series Helium Mass Spectrometer Leak Detector 4 NOTE Once a change of value is initiated you can press Cancel to exit the screen and revert to the original value Press the Up or Down arrow to peak the helium signal NOTE Do not press the ESC box before pressing the OK box This causes the selected parameter to revert to its previously stored value Press OK to accept the changes and to store the new parameter value in the leak detector memory Press Done to exit the screen and return to the previous menu screen To manually tune the leak detector 1 2 3 5 Place the system in TEST mode Navigate to the Control Panel and turn the STD LEAK ON Navigate to the Calibration Set Up screen and write down the INTERNAL CALIBRATED LEAK value This value is temperature compensated Navigate to the Manual Tuning screen and O Set the GAIN to 1 0 O Set the EMISSION to between 0 5000 and 0 6000 Q Adjust the ION value up or down to attain the maximum value Ideally the ION value should be between 250 and 270 Q Adjust
27. Harness Red to Red and Black to Black Figure 15 10 Flapper Box Assembly NW25 Installation 23 Connect the power cord and power up the unit 24 Watch the home screen to verify that the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes 15 5 VS Series Helium Mass Spectrometer Leak Detector 15 6 Refer to the operator s manual if the system fails to reach the System Ready mode 25 Manually close the flapper box the leak detector should transfer into test 26 After 30 seconds verify that the vent button is operational the flapper box should open 27 Agilent recommends a full calibration of the unit prior to leak test operations VS Series Helium Mass Spectrometer Leak Detector Section 16 I O Card Installation 16 1 Installation Procedure 16 1 1 Equipment Required O Extended Length M5 Allen Wrench Q Metric Allen Wrench Set O M3 Phillips Head Screw Driver For clarity some items have been omitted from views WARNING Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting AN any part of the system NOTE Prior to I O installation ensure that the software revision is 2 0 by navigating from the Home screen menu to System Information If not contact Agilent customer services see the back cover of this manual for a listing of our sales and service offices 1 Turn off the power switch locat
28. I O connectors J3 C 2 2 Motherboard PCB The Motherboard PCB Agilent P N R2101301 functions as liaison between the CPU PCB and all other hardware section under full software control provided by CPU PCB The Motherboard PCB circuitry provides m CA Parallel interface Data Address and Control communication between a CPU and an lon Source PCBs UART RS 232 non isolated parallel to serial and serial to parallel interface for the leak detector peripherals such as Q Front Panel PCB Q Valve Driver PCB Q Turbo Pump Controller PCB Q Discrete UO PCB RS 232 isolated serial communication between the CPU PCB and a rear panel serial diagnostic port Q Isolated leak rate analog output 0 10 VDC Q Parallel to serial and serial to parallel communication between the Pre amp ADC PCB and CPU PCB Test Port Thermocouple TP TC power supply and TP pressure voltage to frequency signal conversion Q Isolated calibrated leak temperature frequency signal conversion Q CLPD control signals generation data to frequency and frequency to data conversion 24 VDC toa 5 VDC DC DC conversion for the 5V logic supply and clock memory battery power back up VS Series Helium Mass Spectrometer Leak Detector The Motherboard circuitry resides on a stand alone PCB comprised of five sections m m Parallel interface section with two 64 pin 0 1x0 1 PC 104 bus type I O connectors J1 and J2 Non isolated quad UART RS
29. Series Helium Mass Spectrometer Leak Detector Front panel display is blank after power up and mechanical pump is running Causes Resolutions 1 24 V power supply is defective Q Remove leak detector covers and measure the output of the 24 V power supply Figure D 3 Ion Source board Mother Board 24VDC Power Supply Figure D 3 Board Locations 2 Defective front panel display Q Ensure that the 24 VDC is available for the front panel display if present replace front display 24 VDC can be measured at the P401 connector VS Series Helium Mass Spectrometer Leak Detector System Pressure Wait error message appears on the front panel display D 4 This error can also occur during normal operation Causes Resolutions 1 Foreline pump is not running For the QO DS302 Ensure the foreline pump is operating check electrical connections and that the power switch is on OI PRO2 and PDO3 Ensure the 6 A breaker Figure D 1 on page D 1 is not off or tripped a Press Vent b Remove test port cap and press Test and verify that suction vacuum is present by placing hand over test port Foreline valve is not open a Verify if the valve error symbol is present b Open the Manual Valve Control screen and verify that the foreline valve indicates a failure red circle coil shorted or open c Remove covers and disconnect the V1 plug Figure D 7 on page D 7 from the coil and measure the resista
30. Turbo Pump Valve Block and Spectrometer on page 4 9 ao A WwW N Section 4 5 Replacing the Valve Block Harness and Thermocouple Wiring on page 4 9 4 1 VS Series Helium Mass Spectrometer Leak Detector 4 1 Removing the Covers 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 4 1 and detach the rear plastic cover from the unit Front Cover Screws Rear Cover Screws See EE Figure 4 1 Rear and Front Cover Screws 4 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 4 1 VS Series Helium Mass Spectrometer Leak Detector 4 2 Removing the Valve Block Wiring Harness The valve block wiring harness is comprised of seven three prong sensor blocks labeled V1 through V5 and V7 and the thermocouple See the wiring diagram on Appendix E Interconnection Diagram To remove the valve block wiring harness 1 Remove the valve pug or connector unscrew the Phillips head screw and remove the wires from the six three prong connector Figure 4 2 Figure 4 2 Sensor Wiring and Thermocouple 2 Unplug the thermocouple octal connector Figure 4 3 Figure 4 3 Thermocoup
31. Valve Block 1 V3 CF VI Vent bk Test Port TC V6 Cal Leak Tnternal Calibrated Leak Turbo pump Figure D 5 Valve Block Exploded View 4 VPI valve Figure D 6 on TS620 scroll pump MD30 only is not open If the scroll pump is running press Vent remove the test port cap and press Test and verify that suction vacuum is present by placing hand over test port If no vacuum is present the coil on the VPI valve is defective VS Series Helium Mass Spectrometer Leak Detector Figure D 6 VPI Valve Spectrometer Valve Block Metal Gasket Turbo Pump V1 Foreline Valve Figure D 7 Valve Block Spectrometer Exploded View 5 Turbo pump failure a Verify that the red turbo symbol appears on the Home screen This symbol flashes when a turbo failure is present Select the Manual Valve Control screen and verify that the turbo RPM is 70K 69960 RPM and that the bearing temperature is normal lt 50 C 122 F If the bearing temperature is gt 60 C the turbo shuts down D 7 VS Series Helium Mass Spectrometer Leak Detector c If no turbo error symbol is present on the Home screen select the Manual Valve Control screen and observe the turbo RPM and bearing temperature If the turbo RPM is 6000 it is possible that the turbo has crashed Figure D 5 on page D 6 Q Remove the complete valve block assembly valve block turbo and spectrometer from the leak detector Q Remove the s
32. are returned for repair and or adjust ment written authorization from Seller or its authorized representative for the return and instructions as to how and where these Products should be returned must be obtained Any Product returned to Seller for examination shall be prepaid via the means of transportation indicated as acceptable by Seller Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on any item that has been altered or has been returned by non acceptable means of transportation When any Product is returned for examination and inspection or for any other reason Customer shall be responsible for all damage resulting from improper packing or handling and for loss in transit notwith standing any defect or non conformity in the Product In all cases Seller has the sole responsibility for determining the cause and nature of failure and Seller s determination with regard thereto shall be final If it is found that Seller s Product has been returned without cause and is still serviceable Customer will be notified and the Product returned at Customer expense in addition a charge for testing and exami nation may be made on Products so returned VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Contents PAG ACS eegene eege gekiert xviii Documentation Standards isisi eaa arae REE AEAEE EE E R
33. brackets and in mm below the brackets Figure 1 1 shows the outline drawing and physical dimensions of the portable leak detector with Internal DS42 Wet Rotary Vane Pump Model VS PROZ and the PDO3 which utilizes a Agilent IDP 3 dry pump ANAANANANAANA Dss 4013 Figure 1 1 Portable Leak Detector with Internal DS42 Wet Rotary Vane Pump Model VS PROZ and Portable Leak Detector with Internal IDP 3 PD03 Dimensions Figure 1 2 shows the outline drawing and physical dimensions of a mobile leak detector with External DS302 Wet Rotary Vane Pump on a Cart Model VS MR15 Figure 1 2 Mobile Leak Detector with External DS302 Wet Rotary Vane Pump on a Cart Model VS MR15 Dimensions VS Series Helium Mass Spectrometer Leak Detectors Figure 1 3 shows the outline drawing and physical dimensions of a Mobile Leak Detector with External TS620 Dry Scroll Pump on a Cart Model VS MD30 Figure 1 3 Mobile Leak Detector with External TS620 Dry Scroll Pump on a Cart Model VS MD30 Dimensions VS Series Helium Mass Spectrometer Leak Detectors 1 2 Front Panel Display and Controls The front panel Figure 1 4 consists of two hard buttons TEST and VENT and an LCD display to access the software control screens All operator control and monitoring of results are achieved via the resident software accessed u
34. detector The CPU PCB circuitry provides LI 32 bit 16 MHz integrated MC68332 microcontroller unit MCU which combines high performance data manipulation capabilities with powerful peripheral subsystems Battery backed SRAM for frequently updated process parameters and real time clock calendar n Flash Memory with boot sector Q EEPROM for setup and configuration parameters O Non isolated UART RS 232 serial interface for communication with the external VS Series leak detector peripherals such as Q Front Panel PCB Q Valve Driver PCB Q Turbo Pump Controller PCB Q Discrete I O PCB Q Serial Interface for background debug mode BDM O EEPLD control signals generation for the Motherboard PCB VS Series Helium Mass Spectrometer Leak Detector LI ESD protected PC104 Parallel Interface Data Address and Control Bus for communication with the lon Source and Preamp PCBs via the Motherboard PCB The CPU circuitry resides on a stand alone PC104 PCB comprised of six sections LU UU wv MCU and memory SRAM FLASH and EEPROM section Real Time Clock Calendar section with the battery and super capacitor backup with 4 pin battery connector JXBT and IRQ1 jumper RS 232 section with 9 pin connector J2 pin No 10 is removed BDM section with 10 pin connector J1 Time processor section with 34 pin connector J4 not used in VS leak detector Parallel interface section with two 64 pin 0 1x0 1 PC 104 bus type
35. existing hardware 20 Attach the label to the rear cover in location shown Figure 17 6 i ll Ml d i i H H A i o H ai Figure 17 6 Label 21 Connect the power cord and power up the unit 22 Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes Refer to the operator s manual if the system fails to reach the System Ready mode 23 After installation refer to the VS Series leak detector manual P N 699909942 Section 3 for leak detector activation of the wireless remote 24 Refer to the wireless remote user s manual P N 699909945 for operational instructions 25 Agilent recommends a full calibration of the unit prior to leak test operations 17 5 VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Section 18 Scroll Pump Replacement PDO3 only 18 1 Installation Procedure 18 1 1 Equipment Required O Extended Length M5 Allen Wrench O Metric Allen Wrench Set O M3 Phillips Head Screw Driver For clarity some items have been omitted from views WARNING Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting AN any part of the system 1 Turn off the power switch located on the back of the unit and unplug 2 Wai
36. its effect on sensitivity demands elimination of all detectable leaks If performance degrades during operation or after some part of the vacuum system is opened for service a methodical leak check eliminates the possibility of a leak as the cause NOTE To ensure reliable testing the leak detector must be leak D checked before performing testing after servicing any part of the vacuum system 26 1 General Suggestions for Leak Checking The following suggestions apply whether leak checking components systems or the leak detector itself Q When spraying suspected leak locations Always apply helium sparingly O Since helium rises start at the highest points first O Apply helium downstream from the source of a draft first or deflect the draft until leak checks are completed Q If vent grooves exist at flanges or other assembled seals apply helium to these points rather than spraying a general area to Q Obtain the most positive response Q Minimize the use of helium O Save time in checking O Locate and repair large leaks before attempting to locate extremely small leaks OQ Limit the search to a general area of the test piece by isolation methods to shorten the time required to locate both large and small leaks Isolation methods include Q Bagging Q Masking O Shielding with tape plastic film or duct seal if applied properly Q Use only enough helium to reach the leaks Do not flood the area
37. less than 10 and provided by the user see Appendix A 3 1 Serial Connector on page A 13 VS Series Helium Mass Spectrometer Leak Detectors CAUTION The usage of a longer cable for the parallel I O output connection with an external PLC is fully responsibility of the user Some EMC prevention measure may be required by the user Q USB HUB with two downstream type A connectors and one upstream type B connector NOTE USB features are SW disabled in this release Table 1 1 VS Series Leak Detector Configurations and Part Numbers Vacuum Pump System Model Agilent Number P N Mains Voltage Internal External Configuration VSPR021 100 115 VAC VS PR02 Portable VSPRO22 230 VAC VS MR15 VSMR151 100 115 VAC VSMR152 230 VAC Mobile VS MD30 VSMD301 100 115 VAC VSMD302 230 VAC Mobile VS BR15 VSMR151 100 115 VAC VSBR152 230 VAC Bench Mount VS BD30 VSBD301 100 115 VAC VSBD302 230 VAC Bench Mount VS PDO3 VSPD030 110 VAC VSPD031 115 VAC VSPD032 220 VAC BR NBL Outline drawings for each configuration are shown in Section 1 1 1 VS Series Leak Detector Configurations VS Series Helium Mass Spectrometer Leak Detectors 1 1 1 VS Series Leak Detector Configurations This section contains outline drawings of the leak detector configurations Dimensions are given in inches in
38. location Figure 16 4 I O Cable to Mother Board 16 3 VS Series Helium Mass Spectrometer Leak Detector 9 Rotate the I O bracket and board to approximately a 30 angle and insert into the leak detector Figure 16 5 Rotated I O and Board Figure 16 5 UO Bracket Installation 10 Connect the Figure 16 6 O Opposite end of the cable labeled P1 to J100 on the I O board O 24 V plug labeled P101 which is tie rapped at the base of the leak detector to the connector labeled J101 on the I O board OI 24 V lug as a ground to one of the bracket screws VOJ101 Bracket Ground Screw TO J100 Figure 16 6 UO Bracket 16 4 VS Series Helium Mass Spectrometer Leak Detector 11 Slide the I O assembly into the leak detector and ensure that the I O bracket engages the clip at the base of the leak detector Figure 16 7 TO Clip Figure 16 7 I O Clip 12 Reinstall the two back plate Phillips head screws w lock washers Figure 16 2 on page 16 2 13 Reinstall the Figure 16 3 on page 16 3 Q Fan assembly by tightening the M4 socket head screw Q Reinstall the plastic shield using the two wing nuts 14 Attach the front cover and secure to the frame using existing hardware 15 Attach the rear cover and secure to the frame using existing hardware 16 Connect the power cord and power up the unit 17 Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabiliz
39. of the equipment In warranty repaired or replaced parts are warranted only for the remaining unexpired portion of the original warranty period applicable to the repaired or replaced parts After expiration of the applicable warranty period Customer shall be charged at the then current prices for parts labor and transportation Reasonable care must be used to avoid hazards Seller expressly disclaims responsibility for loss or damage caused by use of its Products other than in accordance with proper operating procedures Except as stated herein Seller makes no warranty express or implied either in fact or by operation of law statutory or otherwise and except as stated herein Seller shall have no liability under any war ranty express or implied either in fact or by operation of law statutory or otherwise Statements made by any person including representatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and Adjustment All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto and must be received within the applicable warranty period by Seller or its authorized representative Such claims should include the Product serial number the date of shipment and a full description of the circumstances giving rise to the claim Before any Products
40. plate and the intermediate plate are clean If scratches distortion or corrosion are evident replace that part Laying the new valve plates in the intermediate plate recesses The valve plates for suction and pressure sides are identical as are upper and lower sides of the plates Ensuring the valve plates are not deformed by moving them gently sideways in their recesses Laying the sealing rings on the intermediate plate 7 Refit the pump heads by see Figure 23 2 on page 23 2 a b a9 D g h Turning the fan to bring the diaphragm to top dead center Placing the intermediate plate 2 with valve plates 7 sealing rings 8 and head plate 3 on the housing in the position indicated by the M Checking that the head plate is centered by moving it gently sideways Gently tightening the screws 4 evenly and diagonally Turning the fan to check that the pump rotates freely Turning the fan again to bring the diaphragm to top dead center Tightening the screws 4 For DC versions no cooling fan Reattaching the cover 6 to housing 1 8 Attach the front cover and secure to the frame using existing hardware 9 Attach the rear cover and secure to the unit using existing hardware 23 3 VS Series Helium Mass Spectrometer Leak Detector 23 4 10 Connect the power cord and power up the unit 11 Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilizati
41. qualified electrician and must comply with national and local codes Q Opening the enclosure may expose hazardous voltages Always disconnect the power cord and interface cables before opening the enclosure Do not touch the power inlet s contacts for at least 10 seconds after disconnecting the power cord Q Electrical installation must include the appropriate branch circuit 20 A maximum with a long time delay and a reliable earth ground Q Use only the power cord that was provided with your leak detector The use of extension cords is not recommended and could result in damage to the equipment and loss of warranty Q To avoid electric shock connect the product power cord to a grounded power receptacle A power cord with a grounding conductor is required xxvi VS Series Helium Mass Spectrometer Leak Detectors Spectrometer Pumps xxvii WARNING A CAUTION W CAUTION W CAUTION WARNING A WARNING A Store the lon Source Preamplifier sub assembly in a cool dry area in a tightly sealed ESD protected container Wear lint free gloves when handling the spectrometer Wash hands thoroughly after handling the spectrometer filaments and especially before smoking or eating The spectrometer operates at a very high vacuum produced by the high vacuum pump Service of the spectrometer requires that this vacuum be vented to the atmosphere Do not use grease or any other substance on O rings o
42. resistance should be between 15 to 45 Ohms c Replace the spectrometer header Figure D 8 on page D 9 or entire spectrometer if the voltage or resistance is not within specification Figure D 4 on page D 5 Foreline pump failure a Lock system into High Pressure Test and perform a full calibration b Let the system stabilize and verify instability If the foreline pump is a Q Rotary vein mechanical pump drain and add new oil Q Dry scroll pump replace tip seal or pump module If needed replace foreline pump lon Source board Emission Current noise regulation gt 100 mVAC a Open the Manual Tuning menu and adjust and measure the emission current Figure D 13 on page D 16 to minimize the emission current to lt 30 mVAC b If after adjustment emission current noise is gt 100 mV AC Q Switch filaments if no change Q replace ion source board if no change noise gt 100 mVAC Q replace the ion source Figure D 10 on page D 10 D 23 VS Series Helium Mass Spectrometer Leak Detector Leak detector will not transfer into Fine Test Midstage model D 24 Causes Resolutions 1 Background greater than 1 5E 7 std cc sec He leak contamination Q Perform steps in order until background normailzes a Leak in system leak check Open the Manual Tuning screen and verify high negative offset values Switch filaments and calibrate Contaminated ion source clean spectrometer and replace ion sour
43. s sssnssseseeeesrsrrrrnriresesrrrrrrrrrrrsrerrrrrrrtrrrsrerrarrrnrerererrrnnrerere nn 18 4 Rear and Front Cover Screws cccccccccccessesseeeeeeeeeeeceeeueusceeeeeeeeeseucaeueenceeeeeeeeeeagneaseeseees 19 1 Be EE 19 2 Connector erte KEE 19 2 Rear and Front Gover SCrewS edd EES EE 20 1 Spade GOMMECHOS Geert cies ere REESEN aa E AE pE AEE EES EE 20 2 Rear and Front Cover Screws idee EEN Aen 21 1 IR leie ee 21 2 Rear and Front Cover Screws cccccccccccecsesseeeeceeeeeeeeeeueueueeeeeeeeeceusueueeeeeeeeeeeseeaenesseeeees 22 1 Molex top fg cc eicecs ceccdlts Se aclse cada coal et Eed cals eh eege der 22 2 Ground COMMECHOM EG 22 2 Pump to Plate Connections eege eeneg ee Eege genee 22 3 Rear and Front Cover Screws cccccccccccecsesseeeeceeeeeeeeeeeeuscseceeceeeseeeaeaeneneeeeeeeeeesaeneseeseees 23 1 PUMP Ge Ree EE 23 2 DOV ANU LU ST ATA ht ee eee AEE E TE aes caudal ded Vest hae ah dedi E 24 1 Gauge C libration EE 24 4 GET OE EE 24 6 Internal Galibrated Leak ies sash cette al heed ca tice et ee as 24 7 Cal Leak Expiration Set Up tte deer asec ncn teed aarti esto EE 24 8 Fore Pump SOU sos ace atest Elend eege Eege Eege 24 9 Date SErvicGd WEE 24 10 Serial Connector Map EE A 13 Optically Isolated Output Circuit Sketch scieiicccceccesshestseeiesnnetasndieageees noleviadiesnensuteeteaennees A 16 Optically Isolated Input Circuit Sketch a cs cdecdecsee ance nike een A 17 VS Series Power and Communications Panel D 1 DS42 Mechanical Pu
44. shield and front cover are in position AN before proceeding Figure 3 3 High Voltage Shield Figure 3 3 High Voltage Location Connect the power cord and power up the unit Watch the Home screen to verify that the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes Refer to the operator s manual if the system fails to reach the System Ready mode Leak check the calibrated leak O ring to ensure a leak free joint between the atmosphere and the vacuum space inside Refer to the Internal Calibrated Leak and Cal Leak Expiration Set Up of the user s manual for the correct calibration procedures for the calibrated leak Attach the rear cover and secure it to the frame using existing hardware Agilent recommends a full calibration of the unit prior to leak test operations 3 3 VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Section 4 Valve Block Turbo and Spectrometer Assembly Removal 4 2 1 Equipment Required O Extended Length M5 Allen Wrench QO M5 Allen Wrench O Phillips Screw Driver O Slotted Screw Driver Replacing the spectrometer is comprised of 1 Section 4 1 Removing the Covers Section 4 2 Removing the Valve Block Wiring Harness on page 4 3 Section 4 3 Removing the Valve Block Assembly and Spectrometer on page 4 4 Section 4 4 Replacing the
45. the Set Up screen CAUTION The items configured using the Set Up sub screens significantly affect the performance of the leak detector and must only be accessed by trained service personnel Many of the values for the parameters included on the Set Up sub screens are calculated when the leak detector performs functions such as Calibrate and tuning Changing these values can cause unreliable test results 2 Press Maintenance on the Set Up screen and the Maintenance screen appears Figure 24 3 ie 10 0 1 2 3 4 5 6 7 8 9 10 MAINTENANCE _ Accesses the Internal Calibration Leak screen DATE amp TIME PASSWORD Figure 24 3 Maintenance 3 Press Internal Calibrated Leak The Internal Calibrated Leak screen appears Figure 24 4 From this screen you can also access the Cal Leak Expiration Set Up Section 24 3 1 Cal Leak Expiration Set Up on page 24 8 24 6 VS Series Helium Mass Spectrometer Leak Detector INTERNAL CALIBRATION LEAK INTERNAL LEAK VALUE TEMPERATURE C CAL LEAK EXPIRATION Accesses the _ Internal Leak Value keypad _ Sets the temp at which the leak was calibrated Accesses the Cal Leak Expiration Set Up screen Figure 24 4 Internal Calibrated Leak To use this screen 1 Press a button to activate its field A keypad appears 2 Enter the required values as shown on the calibrated leak label 3 Repeat step 1 and 2 for each
46. the test port In necessary use a VacuSolv wipe to remove any dirt or foreign matter and allow parts to air dry 6 Place the O ring into the groove of the centering ring 2 2 VS Series Helium Mass Spectrometer Leak Detector 7 Place the centering ring onto the top of the test port Figure 2 3 Figure 2 3 O ring and Centering Ring on Test Port 8 Replace the blank off flange cap or connected device 9 Replace the quick clamp onto the test port and tighten the wing nut clockwise until it is just tight enough to stay in place 2 3 VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Section 3 Internal Calibrated Leak Replacement 3 1 Recalibrating the Internal Calibrated Leak Helium calibrated leaks typically degrade at 3 percent per year Check the calibrated leak supplied with your leak detector at least once a year to ensure it is at the value stated on its tag Failure to check the leak could result in unreliable testing You can arrange for testing and recalibration at a lab of your choice Agilent provides NIST traceable calibrated leak testing and verification services You can contact Customer Service at 1 800 882 7426 to arrange for recalibration 3 2 Replacing the Internal Calibrated Leak 3 2 1 Equipment Required O Extended Length M5 Allen Wrench O Slotted Screw Driver For clarity some items have been om
47. the test port wing nut counterclockwise to loosen it Figure 2 1 remove the quick clamp Agilent p n KQ25AWP from the test port and remove any connected devices CAUTION Be careful not to drop the test port blank off flange cap when you remove the test port tightening nut It is deceptively heavy for its size Test Port Tightening Nut GUN N ee Figure 2 1 Test Port with Blank O Flange Cap o 2 1 VS Series Helium Mass Spectrometer Leak Detector 2 Remove the test port blank off flange cap and or centering ring from the top of the test port Figure 2 2 Figure 2 2 Centering Ring with O ring 3 Remove the O ring from the centering ring 4 Examine the O ring for wear If necessary use a new O ring otherwise clean the O ring NOTE Agilent recommends replacing all O rings during routine maintenance or during any maintenance procedure requiring that O rings be removed CAUTION Remove O rings carefully with your fingers Do not use metal tools for this task This prevents scratching of any sealing surfaces Do not use alcohol methanol or other solvents on O rings To do so causes deterioration and reduces their ability to hold a vacuum Wipe all O rings clean with a lint free cloth before installation to ensure that no foreign matter is present to impair the seal If applicable apply a small amount of Apiezon L grease and wipe the O rings shiny dry 5 Examine all parts of the test port including inside
48. unit 4 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 12 1 Front Cover Screws Rear Cover Screws Figure 12 1 Rear and Front Cover Screws 12 1 VS Series Helium Mass Spectrometer Leak Detector NOTE Cables not shown for clarity 5 Using an M5 allen wrench remove the four screws and disconnect the compression test port flange Figure 12 2 Do not discard hardware Remove four Socket head screws Compression test port flange Figure 12 2 Compression Test Port Flange NOTE Cables not shown for clarity 6 Attach new compression port adapter kit using existing hardware and O ring Figure 12 3 Mount four Socket head screws Attach new compression port Adapter Kit Figure 12 3 Compression Port Adapter Kit 7 Attach the front cover and secure to the unit using existing hardware 8 Leak test the Compression Port Adapter to ensure a leak free joint 12 2 VS Series Helium Mass Spectrometer Leak Detector 9 Attach the rear cover and secure to the unit using existing hardware 10 Connect the power cord and power up the unit 11 Watch the home screen to verify that the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes Refer to the operator s manual if the
49. wire green plug ground and red black wire connector at the interface board Figure 5 3 Figure 5 3 Interface Board Wiring 8 Use a nut driver to remove the four hex nuts that mount the interface board to the user interface Figure 5 4 The spacers between the interface board and user interface loosen as well remove them Figure 5 4 Interface Board Mounting Nuts 5 3 VS Series Helium Mass Spectrometer Leak Detector 9 Disconnect the two ribbon cables on the left and right sides of the board and gently lift board off Figure 5 5 Figure 5 5 User Interface Board to Front Panel Display Wiring 10 Gently pull the board out and disconnect the blue plug from the user interface board that originates on the display Figure 5 6 11 Disconnect the white plug form the backside of the interface board Figure 5 6 White plug Figure 5 6 White Plug to Front Panel VS Series Helium Mass Spectrometer Leak Detector 12 Disconnect the green yellow wire spade connection that runs between the user interface board and the Front Panel Figure 5 7 Figure 5 7 Green Yellow Wire to Front Panel 13 Remove the four Phillips head screws that hold the user interface in place The spacers between the interface and the front membrane loosen as well remove them 14 Place the new interface into the slot inserting the spacers and reinstall the four Phillips head screws 15 Inert the spacers between the user interface and t
50. 0 to 350 PUT RANGESTOP Sets the Range Stop exponent Preceded by two or three characters XX or X The commands listed in Table A 4 are used to cause certain leak detection actions Table A 4 Leak Detection Actions Command Action AUTO Initiates auto ranging mode Success is indicated by the normal ok response CALIBRATE Initiates a Full or Fast calibration depending on system settings The CPU software tunes then adjusts the gain so that the current helium signal causes the current leak rate measurement to be the same as the most recently input using INIT STDLEAK If the gain is 2 9 or higher a normal calibration is performed Success is indicated by the normal ok response DECREMENT Subtracts 1 from the Manual Ranging leak rate exponent making it more negative Success is indicated by the normal ok response Does nothing in auto ranging mode Does nothing upon reaching the most sensitive range DISABLE OENABLE Turns the Zero Enable function OFF DISABLE PASSWORD Turns the password function OFF DISABLE xREJECT Turns the Reject Set Point OFF Where x is a number from 1 to 4 or the letter A DISABLE RANGESTOP Turns the Range Stop function OFF DISABLE SEQUENCER Turns the auto sequencer function OFF DISABLE SPLIFLOW Turns the split flow function OFF DISABLE VOLUME Turns audio OFF ENABLE OENABLE Turns the Zero Enable function ON ENABLE
51. 08 INIT STDLEAK INIT TCTPZERO Used to calibrate the low pressure end of the test port thermocouple to a known pressure higher than zero Preceded by a number XX of mTorr representing the test port pressure at the time of the command INIT TEMPFACTOR Sets the temperature correction factor that is printed on the internal cali brated leak label Preceded by 10 to 10 Example 7 INIT TEMPFACTOR INIT TEST Sets the Auto Sequencer test time in seconds Preceded by XX LOCK MS Enables the MS lock feature If the system exceeds 150 mTorr the system goes from Fine test directly into Roughing mode no Contra mode If the leak rate exceeds the 7 range the over range symbol appears UNLOCK MS Disables the MS lock feature MS LOCK Queries the status of the MS lock feature either on or off appears The commands listed in Table A 3 are used to cause an immediate change in the spectrometer operating parameters These Commands Do Not Change The Non Volatile Operating Parameters Table A 3 Spectrometer Operating Parameters Command Parameter PUT EXPONENT Sets the exponent leak range for Manual mode Preceded by a two character number Acceptable values are 0 through 10 VS Series Helium Mass Spectrometer Leak Detectors Table A 3 Spectrometer Operating Parameters Continued Command Parameter Sets the ion value of the ion source Preceded by a three digit number of PUT ION volts in the range 20
52. 18 2 13 Reattach the diaphragm pump See Section 22 Diaphragm Pump Replacement PD03 only on page 22 1 14 Reattach the exhust valve See Section 21 Exhaust Valve Replacement PDO3 only on page 21 1 15 Reattach the four M2 screws to remount the manifold block 16 Reattach the fan assembly 17 Reconnect the diaphragm fan and motor power connectors 18 Reconnect the exhaust hose 19 Attach the front cover and secure to the frame using existing hardware 20 Connect the power cord and power up the unit 21 Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes Refer to the operator s manual if the system fails to reach the System Ready mode 22 Agilent recommends a full calibration of the unit prior to leak test operations VS Series Helium Mass Spectrometer Leak Detector Section 19 Scroll Pump Fan Replacement PDO3 only 19 1 Installation Procedure 19 1 1 Equipment Required O Extended Length M5 Allen Wrench O Metric Allen Wrench Set O M3 Phillips Head Screw Driver For clarity some items have been omitted from views WARNING Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting AN any part of the system 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an ext
53. 232 section with four I O RJ45 8x8 connectors J100A B and J101A B QO TP TC gauge section with 4 pin I O connector J200 O Isolated section that consists of analog output and RS 232 circuitry with 10 pin I O connector J300 and two I O RJ45 8x8 connectors J302 and a calibrated leak temperature circuitry with 4 pin input connector J301 Power Supply section with 3 pin connector J400 and 4 pin connector XJBT1 CPLD section with two 14 pin JTAG connectors J501 and J502 and RJ45 10x10 connector J500 C 2 3 lon Source PCB The lon Source PCB Agilent P N R2120301 creates the high voltage and filament current supply for all spectrometer tube electrodes under full software control provided by the CPU PCB The lon Source PCB circuitry provides m Parallel interface Data Address and Control communication between the lon Source and CPU PCBs via the Motherboard PCB High voltage flyback power supplies for a spectrometer tube such as O Filament Bias Q Suppressor Q Chamber Repeller O Filament power supply with an emission current regulation loop CLPD control signals generation O Isolated digital control of the ion voltage filament bias repeller voltage and emission current filament voltage tuning the filament selecting FIL 1_SEL and FIL2_SEL high voltage supply HV_ON OFF switching 24 VDC to a 5 VDC DC DC conversion for the filament supply and 24 V to 15 V for the digital control circuitr
54. 7 1 and detach the rear plastic cover from the unit 17 1 VS Series Helium Mass Spectrometer Leak Detector Front Cover Screws Rear Cover Screws Figure 17 1 Rear and Front Cover Screws 4 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 17 1 5 Disconnect the fan connector from the 24 V cable harness 6 Detach the fan assembly by removing the M4 socket head cap screw and loosening the two wing nuts Figure 17 2 Place the fan assembly on a flat surface on its back M4 SCREW Figure 17 2 Fan Assembly and Socket Head Cap Screw 7 Hand tighten the antenna to the fan bracket and then apply a 12 turn using an adjustable wrench Figure 17 3 17 2 VS Series Helium Mass Spectrometer Leak Detector Wireless antenna Figure 17 3 Wireless Antenna CAUTION Use proper ESD safety techniques when performing a PCB card install 8 Place the wireless board assembly on the four fan bracket standoffs Note the correct orientation of the wireless base board P300 connector Figure 17 4 Wireless base Board assembly P300 connector orientation Figure 17 4 Base Board Assembly with Posts 17 3 VS Series Helium Mass Spectrometer Leak Detector 9 Connect the antenna cable to the MMCX jack Color gold on the wireless base board 10 Secure the
55. CPU PCB via the Motherboard PCB Q Local microprocessor controlled 24 VDC to frequency conversion with auto diagnostic voltage current and temperature control and auto protection over current and temperature functionality for turbo pump Q 3 phase variable output voltage current and frequency control respect to the speed reached by the turbo pump O 24 VDC to 5 VDC 15 VDC 12 VDC and VP 50 VDC conversion The Turbo V70 controller circuitry resides on a stand alone PCB comprised of five sections Q 1 O RS 232 interface section with a 6 pin connector P5 Q Microcontroller with an 8 channel ADC section with the temperature ambient turbo and heat sink current and motor voltage sensors O 3 phase motor driver section with over current protection and 6 pin connector P2 Q Power supply section with 4 pin connector P3 C 6 VS Series Helium Mass Spectrometer Leak Detector LI Parallel I O section with 15 pin connector P4 not used in the VS Series leak detector C 2 6 Front Panel Controller PCB The Front Panel PCB Agilent P N R2117301 functions as liaison between an operator and VS Series leak detector via an LCD display Touch Panel and two hard keys TEST and VENT under software control provided by the CPU PCB The Front panel PCB circuitry provides m m m LU UU 50 V isolated RS 232 interface with the CPU PCB via the Motherboard PCB Non isolated RS 232 interface with a Wi
56. Filament 1 Filament 1 VS Series Helium Mass Spectrometer Leak Detector Both Filaments Burnt Out error message appears on the front panel display Both Filaments No Emission error message appears on the front panel display Occurs for PDO3 and PRO2 manufactured after Spring 2009 This error can also occur during normal operation Causes Resolutions 1 Both filaments are an open circuit due to age and prolonged normal everyday use Q Spectrometer Pre Amp Board Figure D 11 and Figure D 12 on page D 11 Measure the J2 connector filament resistance with power off filament resistance lt 5 Ohm If filaments are open circuit open the spectrometer and replace the filaments See Section 10 Filament Replacement 2 lon Source board failure a Ensure that the ion source board cable is secure at both the spectrometer and ion source board b If both filaments failed prematurely and both were replaced Q Run a calibration Figure D 11 on page D 10 and Figure D 12 on page D 11 and after a successful pass measure the voltage of the filament that is in use on the Pre Amp board J2 connector Spectrometer Header The filament voltage should 1 4 to 1 9 VDC with lt 30 mV of noise AC If not go to the Manual Tuning screen and adjust the Emission Current until the AC ripple is lt 50 mV and the filament voltage is 1 4 to 1 9 VDC Q Select Setup Menu gt Manual Tuning screen and note the Emission Current Measure the
57. IT 1 LOG Sets the leak rate analog output voltage to logarithmic at 1 volt per decade Not preceded by a value INIT ML XFER Sets the value of the midstage flow mode crossover pressure in Torr Preceded by X XE XX The range is 1 0E 03 to 1 0E 01 Torr The default is 1 0E 01 100 mTorr INIT PASSWORD Sets the system password Preceded by a 1 to 6 digit password and followed by a digit indicating the number of digits in the password Example 123123 6 INIT PASSWORD Password is read back using the SYSPWD command INIT QUICK CAL Sets which type of calibration will be run if the CALIBRATE command is initiated Preceded by 0 or 1 O for FULL cal 1 for FAST cal INIT RANGESTOP Sets the value of the most sensitive range exponent Preceded by XX INIT 1 REJECT Sets the leak rate value for Reject Set Point 1 Preceded by a two digit leak rate mantissa with a decimal point after the first digit followed by E and then by a two digit leak range exponent the helium leak rate number is in atm cc sec Example 3 4E 08 INIT 1 REJECT INIT 2REJECT Same as INIT 1 REJECT but for Reject Set Point 2 INIT 3REJECT Same as INIT 1 REJECT but for Reject Set Point 3 INIT 4REJECT Sets the test port pressure value for Reject Set Point 4 Preceded by a two digit leak rate mantissa with a decimal point after the first digit followed by E and then by a two digit exponent the test port TC pressure in
58. OCKOUT Reports the status of the control panel lockout feature ON or OFF CURRDATE Reports the current system date and time in the following format 3 05 25 2005 04 19 03 35 1 where 3 is the day of the week 0 Sunday 1 Monday etc 05 25 2005 is mm dd yyyy date 04 19 03 35 is hh mm ss ms time and 1 is PM O AM 1 PM 2 24 hour DISPLAY Reports what the display bar graph is set to log or lin ZEMISSION Reports the emission value EXPONENT Reports the current manual mode exponent with a two character minus followed by one digit number The exponent is within the least sensitive range as reported by RANGE and the three lower more negative exponent ranges See also INIT EXPONENT 2EXTLEAK Reports the currently stored value of the external standard leak GAIN Reports the system gain value by returning a three character number consisting of a two digit gain factor with a decimal point after the first digit 2INTEXT Indicates which leak Internal or External has been selected for use during calibration 2IONCHAMBER Reports the ion chamber value LANGUAGE Reports the language that has been selected to display on the front panel O English 1 French 2 German 3 Korean 4 Spanish 5 Japanese 6 Chinese Reports a six character number consisting of a two digit leak rate mantissa with decimal point after the first digit followed by E then a two digit number
59. OS6 V on power supply Figure 8 4 Power Supply Connections WARNING Use two people for the next step A 9 Place 6 blocks under all four corners of the unit 10 Rock the unit back gently VS Series Helium Mass Spectrometer Leak Detector CAUTION Do not exceed 45 or the oil will leak into the unit 11 Remove the four Phillips screws on the bottom mounting plate Figure 8 5 Power supply mounting holes Figure 8 5 Power Supply Mounting Holes 12 Place the new power supply in place and install using the four Phillips screws removed in step 9 WARNING Use two people for the next step A 13 Remove the 6 blocks 14 Reinstall the bank of connections shown in Figure 8 4 on page 8 4 Q SP1 goes to L on power supply SPN goes to N white on power supply Black green yellow goes to CGND2 on power supply SP GND goes to GND on power supply Ooo LU Three red wire lead Q PS1 goes to POS1 V on power supply Q PS2 goes to POS2 V on power supply Q PS3 goes to POS3 V on power supply 8 5 VS Series Helium Mass Spectrometer Leak Detector 8 6 15 16 17 18 19 Q Three black wire lead Q PS4 goes to POS4 V on power supply Q PS5 goes to POSS V on power supply Q PS6 goes to POS6 V on power supply Reconnect Q P401 red black wire from position J401 O Ground wire from the Front Panel using a small Phillips head screw driver and place washer aside Q R2148301 re
60. PASSWORD Turns the Password feature ON ENABLE xREJECT Turns the Reject Set Point ON Where x is a number from 1 to 4 or the letter A ENABLE RANGESTOP Turns the Range Stop function ON ENABLE SEQUENCER Turns the auto sequencer function ON VS Series Helium Mass Spectrometer Leak Detectors Table A 4 Leak Detection Actions Continued Command Action ENABLE SPLITFLOW Turns the split flow function ON ENABLE VOLUME Turns audio ON EXTERNAL Sets the External Calibrated Leak in test port as the leak for use during calibration INCREMENT Adds 1 to the Manual Ranging leak rate exponent making it less negative Success is indicated by the normal ok response Does nothing in auto ranging mode Does nothing upon reaching the least sensitive range INTERNAL Sets the Internal Calibrated Leak as the leak to be used during calibration KEEP Causes the leak detector to close most valves and enter the Hold state MANUAL Turns the Manual Ranging Mode ON Success is indicated by the normal ok response NOSNIFF Turns the HIGH PRESSURE TEST function OFF ROUGH Causes the leak detector to begin a roughing on the test port only SNIFF Turns the HIGH PRESSURE TEST mode ON STDLEAK Turns Read Std Leak ON OFF Verifies calibration by exposing internal cal leak to the system TPTCATM Sets the current test port thermocouple reading to represent atmospheric pressure when the test p
61. PCB R2104301 24 VDC Turbo Controller PCB 9699518 Front Panel Controller PCB R2117301 Front Panel Sub Assembly R2021301 AC DC Power Supply 659077040 Filament Replacement VSFLDFR Valve Block O ring Kit VSFLDOV B 1 VS Series Helium Mass Spectrometer Leak Detector Table B 1 Spare Parts Continued Part Number Diaphragm Pump PDO3 VSFLDDP Diaphragm Kit PD03 614911041 Clippard Valve PD03 and PRO2 VSFLDV9 Exhaust Valve 2 way for PDO3 VSFLDV8 Fan Kit VSFLDFN Metal Gasket Kit VSFLDMG Discrete I O PCB R2111501 Wireless Base PCB R2541301 Calibrated Leak VSFLDCL TC Replacement Kit VS531A1S TC 531 1 8 NPT F072301 For PRO2 units manufactured after Spring 2009 B 2 VS Series Helium Mass Spectrometer Leak Detector Table B 2 Leak Detector Accessory Item List Assembly Part Number Flapper Box NW25 Flange L6241302 Power Probe 10 NW25 Flange K9565306 Power Probe 25 NW25 Flange K9565307 Spare Tip Filters for Power Probe Qty 10 K9565303 Throttle Valve NW25 Flange R1947301 Elite Z Mechanical Pump Fluid 695409005 Calibrated Leak 10 10 NW25 Flange F8473320 Calibrated Leak 10 NW25 Flange F8473321 Calibrated Leak 10 NW25 Flange F8473322 Calibrated Leak 10 NW25 Flange F8473323 Calibrated Leak 10 NW25 Flange F8473324 Oil Mist Eliminator VSFLDME Filter
62. STDLEAK SYSLEAK Reports the leak rate value that has been stored that relates to the split flow functionality SYSPWD Reports the value of the system password TEST Reports the currently stored Test Sequencer test time used as part of setting up the Auto Sequencer TEMPFACTOR Reports the internal calibrated leak temperature factor that is used as part of the temperature correction logic degrees C TURBO Reports four lines each begins with a lt cr gt lt lf gt The first line consists of the word turbo followed by either READY or NOT READY The second line consists of the word turbo followed by either Fault or No Fault The third line consists of the words turbo speed RPM followed by the RPM value xxxxx The fourth line consists of the words Turbo Temp Celsius followed by the bearing temperature value XX 2VALVESTATE Reports the current mode of the valves Vent Hold etc VER Reports the CPU software version in the form LC02 05 followed by a six digit hexadecimal checksum VOLUMEONOFF Reports audio as either ON or OFF WHYNOCAL Reports the calibration failure diagnostics 2 OENABLE Responds with the status of the Zero Enable function ON or OFF The commands listed in Table A 2 are used to set non volatile operating parameters The current value of the operating parameter is changed to the new value If the leak detector is in back panel control the response is cant Tabl
63. Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 5 18 and detach the rear plastic cover from the unit Front Cover Screws Rear Cover Screws Figure 5 18 Rear and Front Cover Screws 4 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 5 18 5 Loosen and remove the two M4 screws and washers that hold the electronics back plate to the top rail Figure 5 19 and gently rock the assembly forward M4 mounting screws Figure 5 19 M4 Mounting Screws 5 16 VS Series Helium Mass Spectrometer Leak Detector 6 Unscrew the four Phillips screws The spacers between the board and the backplate loosen as well remove them Figure 5 20 ge ba ef a En r D 4 pb ie Mounting screws Ka P A Figure 5 20 Turbo Controller Board Mounting Screws 7 Disconnect the O 24 VDC J3 connector R2124301 QO Turbo controller cable R134301 QO RS 232 cable R2133301 Q Ground at the top the backplate NOTE Take care with cable bundle on the back of the board The white clip open so the cable can be temporarily moved to access the board 8 Remove the board 9 Place the new board w
64. Wiring Harness ssssssseseseeeeeerrrrrtreerrirrrttteeerirnnrnrsssrrrnennnsnne 4 3 4 3 Removing the Valve Block Assembly and Gpechometer 4 4 4 4 Replacing the Turbo Pump Valve Block and Gpechomeier 4 9 4 5 Replacing the Valve Block Harness and Thermocouple Wumg 4 9 Section 5 The EIS CH OMICS EE 5 1 5 5 1 Equipment Required EE 5 1 SEI SON nt 5 1 DO BONG io ee adele ieee E E Soe ads E ade gases hes decane aa a ae 5 7 5 SAO Source Board crt tna ahaha a ela bles net ea al AGS Seca den tive Saat 5 9 54 Mother BOAO KEE 5 11 VS Series Helium Mass Spectrometer Leak Detector 5 5 Valve Reg Board EE 5 14 5 6 Turbo Controller Board ppe inei ea aa RE aaae ree ENEE dE RE 5 16 Section 6 Turbo Molecular Pump and Roughing Foreline PUMPS ssssssssssssnesssnresssrrrnesrrnnrererersrnne 6 1 6 6 1 Equipment Required BEE 6 1 6 1 DS 42 Fore PUMP EE ceeds aaa a E AE A R edd ERER 6 1 GZ OOl PUMP EE 6 6 6 2 2 Valve Block Wiring Harmege secteur EEKNNKSNeERNECNEdEAAERSSENEEEEASENEANE ENEE 6 6 6 2 3 Removing the Valve Block Assembly and Spectrometer sssnsssssseneereneessrrrssrrr neee 6 8 6 2 4 Replacing the Turbo Pump Valve Block and Spectrometer sssssseesssresssrrrnereee e 6 11 6 2 5 Replacing the Valve Block Harness and Thermocouple Wimg 6 11 6 3 Changing the Mechanical Pump Eu 6 12 Section 7 Fan Replacement EE 7 1 Tia EQUIPMENT ee EE 7 1 Section 8 Power S Upply EE 8 1 8 3 1 Equipment Required EE 8 1 Section 9 Sp
65. aae ERE ERE RE xviii HR EE xviii Hazard and Safety Information icc ccceseticczsasect other txdestedetarenetisensianeraxentinees AER xix EE XX Vacuum Equipment and Cleanliness ANE XX O fing Gare ee ee deen sss atin Nata dE xxi N t eeler teen a e E dealt a E needs canta EEE EEA xxii Equipment General scere aa a p a aR i aas xxii Power and Static Sensitivity EE xxiv EISE e Ee Ee A A xxvii NN Done xxvii Agilent Services ee eege Eeer xxviii Weu ne Be E EE xxviii Tools Required for Component Replacement Au GA Materials Required for Component Replacement cceeeeeeeeeeeeeeeeeeeeneeeeeeeeeeeteeeeeeeesenaeeees Xxix Section 1 Introduction to the VS Series Leak Detector 0 cccccccecceeeeeeeeeeeeeeeeeeeeeeeaeeeeeteeaeeeeenneees 1 1 1 1 The VS Series Leak Detector sesadeanececsseg needs teetaneydse dees geeE egene Ee 1 1 1 1 1 VS Series Leak Detector Configurations EE 1 3 1 2 Front Panel Display and Controls seis eee tale ai caiildet ol sqlite dsl ieanhen ceeeaalen as 1 5 1 3 Display Panel ale 1 8 IA Rear E E 1 10 Seclon2 Cleaning the Test E 2 1 Section 3 Internal Calibrated Leak Replacement EE 3 1 3 1 Recalibrating the Internal Calibrated Leak EE 3 1 3 2 Replacing the Internal Calibrated Leak AE 3 1 3 2 1 Equipment Required EE 3 1 Section A Valve Block Turbo and Spectrometer Assembly Removal ccccecccsseestteeeeeeeees 4 1 42 1 e len ue le 4 1 4 1 Removing the Covers EE 4 2 4 2 Removing the Valve Block
66. al delay time of 50 milliseconds between each character Terminate the command with a carriage return CR Q Transmit the intended command one character at a time Wait for an echoed response from the leak detector before transmitting the next character Terminate the command with a carriage return CR Windows 95 and later versions contain a serial communications program called HyperTerminal a useful tool in establishing communication between the leak detector and a PC A 2 1 Windows HyperTerminal Set Up Instructions A 2 To set up Windows HyperTerminal 1 Click Start 2 Select Programs gt Accessories gt Communications gt HyperTerminal 3 Double click Hypertrm exe The Connection Description dialog box appears 4 Enter a name and choose an icon for the connection for example leak detector RS 232 5 Click OK The Connect To dialog box appears 6 Select a COM port from the Connect Using the pull down list The Com Properties Port Setting dialog box appears VS Series Helium Mass Spectrometer Leak Detectors ve 14 Configure the following settings Q Bits per second baud rate 9600 OI Data bits 8 Q Parity None Q Stop bits 1 Q Flow Control None Click OK Select Properties from the File menu The Properties window appears Configure the following settings on the Connect To tab O Connect using Verify the COM port is correct Q Click Configure and verify the
67. all the right board as per Section 5 2 CPU Board on page 5 7 Reinstall the left board as per Section 5 3 lon Source Board on page 5 9 Replace the user interface front cover using an Allen wrench to tighten the M4 screw and washer at the bottom front of the plate Figure 5 2 on page 5 2 Reinstall the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 5 11 on page 5 9 Using an extended length M5 Allen wrench reinstall the four screws holding the rear plastic cover Figure 5 11 on page 5 9 5 13 VS Series Helium Mass Spectrometer Leak Detector 5 5 Valve Driver Board To replace this board 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 5 15 and detach the rear plastic cover from the unit Front Cover Screws Rear Cover Screws Figure 5 15 Rear and Front Cover Screws 4 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 5 15 5 Loosen and remove the two M4 screws and washers that hold the electronics back plate to the to
68. aments Filament Voltage 1 3 to 1 8 VDC If there is no filament voltage or lt 1 0 VDC is measured replace the ion source board 3 Contaminated spectrometer Emission current cannot be established ion source a Refer to step 2b for steps to measure filament resistance ion voltage and filament voltage Verify Figure D 12 on page D 11 and Figure D 10 on page D 10 Q Continuity for both filaments O Reverify that the ion and filament voltage are available at the spectrometer If yes continue to the step b b Select Setup Menu gt Manual Tuning and note the Emission Current setting Measure the emission current on the lon Source board Figure D 13 on page D 16 at test points EMISS T P and TP101 FIL GND The measured voltage should correspond to the noted reading within 10 If emission current lt 3 mA or zero inspect the spectrometer for contamination if necessary replace the ion source See Figure D 10 on page D 10 and Figure D 11 on page D 10 D 2 Operational Failures NOTE A flashing C indicates that the leak detector has failed a calibration attempt or that the calibration routine was interrupted For example by pressing Vent during the calibration routine and going back into Test Gain Too High error message and a flashing C appear on the front panel display after a calibration attempt Insufficient helium signal during calibration Gain gt 6 9 Causes Resolutions 1 Calibrating to the wro
69. aminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature En Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next page for suggestions of failure terms Detailed Description of Malfunction Please provide the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature En Date Pg 2 3 Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION PARAMETERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Contact Overtemperature Other Temp 2 Purge flow Cooling defective Clogging TI OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum
70. and secure using a hose clamp The unit appears as in Figure 13 3 Figure 13 3 Figure 3 Oil Mist Eliminator After Install 11 Attach the rear plastic cover and secure to the unit using existing hardware 12 Connect the power cord and power up the unit 13 Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes Refer to the operator s manual if the system fails to reach the System Ready mode 14 Agilent recommends a full calibration of the unit prior to leak test operations 13 2 VS Series Helium Mass Spectrometer Leak Detector Section 14 lon Source Replacement 14 1 Installation Procedure Equipment required O Extended Length M5 Allen Wrench O Metric Allen Wrench Set Range 1 5 mm to 10 mm O Needle nose pliers or tweezer QO M3 Phillips Head Screw Driver Q 1 5 mm Hex Driver Q 5 mm Hex Driver Q Torque Wrench must be adjustable to 45 in lbs 5 0 N m and 90 in lbs 10 2 N m Q Digital Multimeter Fluke 187 or equivalent NOTE Inspect the new ion source kit for deformation damage and filament coating flaking prior to installation Do not install if damaged Touching the filament under any condition will cause damage For clarity some items have been omitted from views 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended lengt
71. ass Spectrometer Leak Detector WARNING Use two people for the next step A 12 Place 6 blocks under all four corners of the unit 13 Rock the unit back gently 14 Accessing from the bottom remove the four Phillips head screws Figure 6 5 Fore pump mounting screws Figure 6 5 Fore Pump Mounting Screws 15 Remove the rubber spacers washers and nuts Figure 6 6 Fore pump mounting feet Figure 6 6 Fore Pump Mounting Spacers 6 5 VS Series Helium Mass Spectrometer Leak Detector 16 17 18 19 20 21 22 23 24 Place the new pump in and screw down the spacers washers and nuts WARNING Use two people for the next step A Remove the 6 blocks under all four corners of the unit Reinstall the exhaust hose and tighten the hex nut Figure 6 2 Reinstall the valve block connection using the NW 16 wing nut Figure 6 2 Reconnect the wires in the box and tighten the two collars on the nuts exterior to the box Figure 6 4 Reinstall the four Phillips screw on the cap and pull off the cap Figure 6 3 Replace the oil Reinstall the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 6 1 Using an extended length M5 Allen wrench reinstall the four screws holding the rear plastic cover Figure 6 1 6 2 Scroll Pump Replacing the sc
72. ation Causes Resolutions 1 Spectrometer pressure is gt 1E 4 due to a gross leak a Select Setup menu gt Gauge Calibration menu and ensure that the Spectrometer Pressure reading is lt 1E 4 Torr b Check for a gross leak at the turbo inlet spectrometer inlet gasket misaligned or at the spectrometer header gasket misaligned or entire spectrometer Figure D 4 on page D 5 Figure D 8 on page D 9 and Figure D 9 on page D 9 D 8 VS Series Helium Mass Spectrometer Leak Detector Metal Gasket Figure D 8 Screws Exploded View Figure D 9 Washer Alignment and Pattern NOTE Insert a screw with three Belleville washers into each hole and finger tight Figure D 9 Following the pattern shown in Figure D 9 torque screws to 5 N m 45 in lbs Re torque hardware in pattern shown to 10 2 N m 90 in Ibs Go through the entire torque pattern twice to ensure the metal gasket is firmly compressed Wait a minimum of five minutes then torque the pattern shown to 10 2 N m 90 in lbs VS Series Helium Mass Spectrometer Leak Detector D 10 2 Spectrometer pressure is gt 1E 4 due to a misaligned incorrectly assembled or contaminated total pressure plate a Disassemble the spectrometer header from the spectrometer body and inspect the total pressure plate Figure D 8 on page D 9 Figure D 10 and Figure D 11 Figure D 11 Spectrometer Header Decomposition VS Series Helium Mass Spectrom
73. ation Wait and System Ready within ten minutes Refer to the operator s manual if the system fails to reach the System Ready mode 18 Agilent recommends a full calibration of the unit prior to leak test operations 19 Connect operators 25 pin cable to the I O connector and verify the connection Refer to Section A 3 of the users manual for the I O pin connector signals 16 5 VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Section 17 Wireless Remote Base Unit Installation 17 1 Installation Procedure 17 1 1 Equipment Required O Extended Length M5 Allen Wrench O Metric Allen Wrench Set O M3 Phillips Head Screw Driver Q Adjustable Wrench For clarity some items have been omitted from views WARNING Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting AN any part of the system NOTE Prior to I O installation ensure that the software revision is 2 0 by navigating from the Home screen menu to System Information If not contact Agilent customer services see the back cover of this manual for a listing of our sales and service offices 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 1
74. ayes ieee 25 7 Internal Operating Parameters EE A 5 Non Volatile Operating Parameters AEN A 7 Spectrometer Operating Parameters AAA A 10 Leak Detection Actions eege sak a 2c da ntuan Samrat ere cde tcubsceahateatetnedeedenttceiceanebdaeactee A 11 Seral Connector SUM MANY Ze eer Ee A 13 V O Connector E a E A 13 Spare PAS soo olds sete asi Sad ented pad danas i ie EES eege eeben eng B 1 Leak Detector Accessory ltem List Zeie dee Eegen ee B 3 Spectrometer Header Pre amp Board J1 Pin Assignments ssessssssneseeeerrnnnesereeeen D 11 XV VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank We CE DECLARATION OF CONFORMITY eg Agilent Technologies Wir Nous Agilent Inc Nosotros 121 Hartwell Avenue Wij Lexington MA 02421 3133 USA Noi declare under our sole responsibility that the product erkl ren in alleniniger Verantwortung da dieses Produkt d clarons sous notre seule responsabilit que le produit declaramos bajo nuestra sola responsabilidad que el producto verklaren onder onze verantwoordelijkheid dat het product dichiariamo sotto nostra unica responsabilita che il prodotto VS Series Helium Mass Spectrometer Leak Detectors Models VS PRO2x VS MR15x VS MD30x VS BR15x VS BD 30x and PD03 With Optional Wireless Remote Control and Discrete 1 0 to which this declaration relates isin conform ity with
75. b Using an Ohmmeter verify the vent coil resistance is between 9 and 10 Ohms If the coil s resistance is open or shorted replace the valve Valve Driver board failure a Disconnect the V7 Vent Valve connector disconnect V4 and V5 and place V5 connector on V7 Vent Valve b Open the Manual Valve Control screen and toggle the Midstage Valve and verify if the vent valve toggles If the vent valve toggles replace the Valve Driver Board due to a bad valve channel Figure D 4 on page D 5 D 21 VS Series Helium Mass Spectrometer Leak Detector D 3 Performance Issues High helium background after a full calibration with the test port blanked off Causes Resolutions 1 Leak at the test port a Blank off the test port press Test and let the background stabilize b Open the Manual Valve Control screen and turn off the Midstage valve Verify that the leak rate lowers c Clean and leak check the test port 2 Vent Valve leak a Perform a full calibration and let the background stabilize b Zero out the background and leak check the vent valve Figure D 5 on page D 6 3 Filament condition Q Switch filaments and perform a full calibration 4 Contaminated ion source spectrometer Both filaments 1 and 2 produce a high helium background a Open the spectrometer and inspect the ion source for contamination carbon buildup or noticeable discoloration Figure D 10 on page D 10 b Clean or replace the ion source and f
76. c sec He in Fine Test Midstage a This is sometimes due to leak checking parts that have gross leaks thus saturating the leak detector with helium Q MR15 Open the gas ballast on the DS302 for 5 minutes and then shut off the gas ballast and re calibrate Repeat the process if necessary until the leak detector completes a full internal calibration Q MD30 PD03 Place a light Nitrogen purge in the test port of the leak detector and throttle the Nitrogen until the leak detector transfers into Test or Fine Test for several minutes Repeat the process if necessary until the leak detector completes a full internal calibration a PRO Remove the test port cap or plug and place the leak detector into Test and run for several minutes at atmospheric pressure Repeat the process if necessary until the leak detector completes a full internal calibration b Possible leaks in the foreline connections or bellows Q Inspect and fix leak check foreline c Defective foreline pump MD30 MR15 amp PDO2 models Q Activate a High Pressure Test in the Leak Rate Ranging Menu with the test port blanked off and observe the test port pressure after twp minutes A typical baseline pressure of 10 mTorr should be achieved 100 mTorr or higher indicates a poor performing primary pump d MD30 PD03 models only High ambient helium background due to poor helium management excessive spraying of helium and poor ventilation Q MD30 Plumb in a nitrog
77. ccessseeeeeeeceeeeeeaceeeeeaaeeseeeaeeeeeaaaaeeeesaaeeeeeeaes 4 6 4 9 PIAS HEMI EE 4 6 4 10 Valve Block Assembly and Spectrometer M5 Mounting Gcrews 4 7 4 11 Calibrated Leak Connection xi ceci cc seictessececanevscncehesuet EENEG ENEE ade edesiane evecare 4 7 4 12 Turbo Controller Connection sccci ccsrc geehegen tte deed EE ee ee 4 8 4 13 Spectrometer Nut Locations ned ANERE eaedicapdassandeseavcenendease cee sanactuedalenes candies 4 8 5 1 Rear and Front Cover Screws ee 5 2 5 2 User Interface Plate Mounting SCrew E 5 2 5 3 Interface Board Wining EE 5 3 5 4 Interface Board Mounting E 5 3 5 5 User Interface Board to Front Panel Display Wiring eee ceeceeeeeeeeeeeeeeneeeeeeeeeeeeneneeeeeees 5 4 5 6 White Plugto Front Panel 2 555 Geteste estes 5 4 5 7 Green Yellow Wire to Front Panel 5 5 5 8 White Plug to Rromt ae eet eet edd leede Eech ee e 5 6 5 9 Rear and Front EE 5 7 SHEI Morgen ENEE ae r A ede aR a aa pa a 5 8 5 11 Rear and Front Cover SCrews lt te js diesel sc ater t carat ded cashed Se ed 5 9 5 12 leese 5 10 5 13 Rear and Front Cover GEES 5 11 VS Series Helium Mass Spectrometer Leak Detector 5 14 5 15 5 16 5 17 5 18 5 19 5 20 6 1 6 2 6 3 6 4 6 5 6 6 6 7 6 8 6 9 6 10 6 11 6 12 6 13 6 14 6 15 7 5 10 1 10 2 10 3 10 4 10 5 10 6 10 7 10 8 10 9 10 10 Motherboard Screw Locations ees eeeg e neie Red Ee BEE e eege 5 12 Rear and Front Cover Screws 22e7e1teE EENS dE EES ENEE de
78. ce Figure D 10 on page D 10 and Figure D 11 on page D 10 2 Test port pressure gt 100 mTorr defective foreline pump Q Perform steps in order until pressure normailzes a b Replace foreline pump Rotary vein mechanical pump drain and replace oil Dry scroll pump replace tip seal or pump module 3 Test Port TC Q Not calibrated correctly a Open the Gauge Calibration screen and ensure that the spectrometer pressure lt 1E 5 Torr and that the leak detector is in Test Open the Manual Valve Control screen turn off the Contraflow and turn on the Midstage valve Open the Gauge Calibration screen and let the system stabilize for a few minutes Press the Test Port Vacuum button and ensure CAL OK appears and the Test Port Pressure is reading lt 1 0E 3 Torr Press Vent open the Gauge Calibration screen press Test Port ATM and ensure CAL OK appears and that the Test Port Pressure is reading 7 6E 02 Torr Open the Home screen test port blanked press Test and verify that the leak detector transfers into Fine Test Q Contaminated In stressful environments Figure D 5 on page D 6 O Remove the TC and fill and soak for several minutes with Acetone Q Fill and rinse two to three times with isopropyl alcohol O Install the TC and verify if the system goes into Fine Test Then calibrate the TC at atmosphere and vacuum If necessary replace TC VS Series Helium Mass Spectrometer Leak Detector
79. cimal point after the first digit followed by E and then by a two digit leak range exponent the helium leak rate number in atm cc sec of the calibration standard leak Example 3 2E 08 INIT EXTLEAK INIT FILAMENT Sets the operating filament in the ion source Preceded by a single digit either 1 or 2 INIT GAIN Sets the value of the gain used for adjusting the helium signal to match a calibration standard leak Preceded by a two digit number with a decimal point after the first digit in the range 1 0 to 6 0 Note Changing Gain changes Zero by the same ratio INIT ION Sets the ion voltage of the ion source Preceded by a three digit number volts in the range 220 to 280 INIT LANGUAGE Selects the language to be shown on the display Preceded by 0 6 where O English 1 French 2 German 3 Korean 4 Spanish 5 Japanese 6 Chinese INIT LINEAR Sets the leak rate analog output voltage to Linear Not preceded by a value INIT LKEXPIRE Sets the date on which the internal calibrated leak expires Preceded by the date Example mm dd yyyy INIT LKEXPIRE VS Series Helium Mass Spectrometer Leak Detectors Table A 2 Non Volatile Operating Parameters Continued Command Parameter INIT LEAKTEMP Sets the internal calibrated leak temperature printed on the leak label that the factory calibration was performed at Preceded by 12 0 to 50 0 degrees C Example 23 5 INIT LEAKTEMP IN
80. creen 1 Press the button next to Year or Day and a keypad appears to set the value 2 Press Set for each item configured 3 Press the button next to Month use the up and down arrows to set the value and press Set 4 Press OK to exit the screen 24 10 VS Series Helium Mass Spectrometer Leak Detector Section 25 Maintenance NOTE All service must be performed by trained personnel only A mass spectrometer leak detector requires periodic maintenance to ensure continued reliable operation After prolonged use the leak detector accumulates contaminants from even the cleanest of products tested that eventually impair operation A thorough disassembly and cleaning of the entire vacuum system which includes the valve block and spectrometer restores normal operation For heavy production use more frequent overhauls may be needed In most cases maintenance personnel do this work but Agilent can also do this work under the terms of a service contract This maintenance section covers daily and as required maintenance It does not cover overhaul of the entire vacuum system Refer to the VS Series Helium Mass Spectrometer Leak Detectors Field Service Component Replacement Manual for annual and preventive maintenance procedures If your leak detector requires service that is not covered in this section contact Agilent Customer Service See the back cover of this manual for a listing of our sales and service offices Important Remin
81. d black wire from position J301 Spkr connection QO R2127 301 green cable from position J303 COM1 connection Q J300 2 from the P300 connector using the two captive screws Reinstall the speaker wire green plug ground and red black wire connector at the interface board Figure 8 3 on page 8 3 Replace the user interface front cover using an Allen wrench to tighten the M4 screw and washer at the bottom front of the plate Figure 8 2 on page 8 2 Reinstall the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 8 1 on page 8 1 Using an extended length M5 Allen wrench reinstall the four screws holding the rear plastic cover Figure 8 1 on page 8 1 VS Series Helium Mass Spectrometer Leak Detector Section 9 Speaker Replacement 9 3 1 Equipment Required O Extended Length M5 Allen Wrench Q Slotted Screw Driver To replace the speaker 1 Shut down the system using the On Off rocker switch 2 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 9 1 and detach the rear plastic cover from the unit 3 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 9 1 Front Cover Screw
82. dangerous products CAUTION The performance and operating safety of this equipment can only be guaranteed if it is operated according to normal conditions of use Allow at least 4 of clearance adjacent to the ventilation slots at the front sides and back of the equipment enclosure Allow sufficient room for the operator to safely maneuver to perform testing LCD Display WARNING Ifthe LCD display breaks avoid getting any liquid crystal in mouth or eyes If it gets on the operator hands feet or clothing wash it AN immediately with soap and water CAUTION Do not apply excessive pressure to the LCD display as this may cause smears In general the lower the temperature the longer it takes the LCD display to turn on Performance of the LCD display may deteriorate in low temperature Radio The Wireless Remote Control is built around an Aerocomm model AC4424 100 RF transceiver module operating in 2 4 GHz ISM band The same type of the RF module is built in a VS Series Leak Detector Wireless Base Station PCB and Wireless Remote unit see VS Series Leak Detector Wireless Remote Operational Manual 6999099945A Agency Identification Numbers for Aerocomm Model AC4424 100 Q US FCC ID KQL AC4424 Q CAN IC CAN2268C391190A Q EUR EN CE are also applied to the Agilent s Wireless Remote and VS Series Leak Detector Wireless Base Station when the units are used the approved antennas xxiii VS Series Helium Mass Spectro
83. ders In addition to the safety notes at the beginning of this manual heed the following notes cautions and warnings when performing maintenance WARNING Disconnect power from the leak detector before performing any maintenance procedure that requires physically disconnecting AN any part of the system The VS Series leak detector has a battery backed clock which uses a primary non rechargeable lithium coin battery from Panasonic P N BR2477A HB 3 0V 1Ah that is permanently soldered onto a Motherboard PCB Never replace this battery with a rechargeable type Use only the primary type of lithium battery Only a qualified technician should replace any battery The battery has a life of 7 to 10 years The VS Series leak detector uses fuses and circuit breakers that are not operator replaceable Only a qualified technician should replace any fuse Information about the fuses and circuit breakers is given in Table 25 3 on page 25 4 25 1 VS Series Helium Mass Spectrometer Leak Detector Cleanliness is vital when servicing the leak detector or any vacuum equipment There are some techniques more important in leak detector servicing than in general vacuum work CAUTION NOTE Do not use silicone oil or silicone grease Use powder free butyl or polycarbonate gloves to prevent skin oils from getting on vacuum surfaces Do not clean any aluminum parts with Alconox Alconox is not compatible with aluminum and will cause damage
84. desired item 4 Press Done to exit the screen The value of the internal calibrated leak as shown on the CALIBRATION SET UP screen is compensated for temperature using the temperature sensor located on the calibrated leak The calibrated leak is not compensated for temperature if any of the following conditions exist m The temperature sensor on the calibrated leak fails or there is a cable connection problem The temperature sensor reading is out of the operating range The operating temperature range is from 10 0 to 45 0 C 50 to 113 F The internal calibrated leak is not a E 7 or E 8 range leak 24 7 VS Series Helium Mass Spectrometer Leak Detector 24 3 1 Cal Leak Expiration Set Up Q Press the button next to the Cal Leak Expiration text on the Internal Calibrated Leak screen The Cal Leak Expiration Set Up screen appears Figure 24 5 The Cal Leak Expiration is usually one year from leak installation When the calibrated leak expires a message appears on the Home screen 0 1 2 3 4 5 6 7 8 9 10 Accesses the CAL LEAK EXPIRATION SET UP Day keypad Accesses the Year keypad _ YEAR 2006 Activates the field MONTH avc DAY Use the arrows to set the value Figure 24 5 Cal Leak Expiration Set Up To use this screen 1 Press the button next to Year or Month and a keypad appears to set the value Press Set for each item configured Press the button n
85. e A 2 Non Volatile Operating Parameters Command Parameter INIT AZ lt 0 Preceded by 0 or 1 sets the status of Auto zero lt 0 0 off 1 on INIT CL XFER Preceded by X XE X sets the value of the contra flow mode crossover pressure in Torr A 7 VS Series Helium Mass Spectrometer Leak Detectors Table A 2 Non Volatile Operating Parameters Continued Command Parameter INIT CPLOCKOUT Sets the status of the control panel lockout Preceded by 0 or 1 0 OFF 1 ON INIT DATE Sets the system date and time Preceded by dow mm dd yyyy hh mm ss AmPm 24 12 mode Where 2 is the day of the week dow 0 Sunday 1 Monday etc mm dd yyyy date hh mm ss time AmPm O AM 1 PM 24 12 mode 0 for 24 hr 1 for 12 hr Examples 2 02 12 2005 04 16 33 1 0 INIT DATE Tuesday February 12 2005 4 16 33 on a 24 hr clock 2 02 12 2005 04 16 33 1 1 INIT DATE Tuesday February 12 2005 4 16 33 PM CURRDATE reports the stored value INIT DISPLAY Sets the status of the bar graph display to either a log or linear display Preceded by 1 Log or 0 Linear INIT EMISSION Sets the emission of the ion source Preceded by a three digit number micro amps in the range 60 to 165 INIT EXPONENT Sets the range that the leak detector will operate in when Manual Range is ON Preceded by 0 to 11 INIT EXTLEAK Sets the value of the external leak Preceded by a two digit leak rate mantissa with a de
86. e ae Ne dee 10 1 Fan Assembly sisccctuited steesenedd a Ea AEAEE AS ARENS 10 2 Gable ee 10 2 Spectrometer Exploded View siis ceciseciisicdeiageus a cetaueed eeitipeslindecdanei ieee adie mel tiaed acces 10 3 EEN 10 4 Coupler and Filament ASSe Ml E 10 4 Filament E ME 10 5 Fil ment le Tun 10 5 Figure 9 Spectrometer AlIQNMemt iss c cceicsec asa doeenpesscceeaeandd caicgsssieessuens eadectnceeseeecnedauenes 10 6 Direction OF COM Gr ee tetacseseetetet ante a A Niue a a tea e NEE hore rele aoa 10 6 VS Series Helium Mass Spectrometer Leak Detector 10 11 10 12 10 13 11 1 11 2 11 3 11 4 11 5 11 6 12 1 12 2 12 3 13 1 13 2 13 3 14 1 14 2 14 3 14 4 14 5 14 6 14 7 14 8 14 9 14 10 14 11 14 12 14 13 14 14 14 15 14 16 14 17 14 18 15 1 15 2 15 3 15 4 15 5 15 6 15 7 15 8 15 9 15 10 16 1 16 2 16 3 lon Source Header Pin Gchemat AE 10 7 lon Source Header Pin Locations jac sce isccaciset venedichecedaidas seeuneasecs tea EEEEEEE dAn 10 7 Ve E 10 8 Rear and Front Cover SCreWS insiaccsisiiciaaassasinsanenvktar ERKENNEN EEN 11 2 Fan and TC Gauge EE 11 2 CHEWS EEO E see eater cated e 11 3 Thermocouple Gauge Onentavonsc cssctastt ds cht bet teh ba dea a eee 11 3 Figure 5 Ground Lug POS MOM EE EE 11 4 OClal lte uerge Ee EE 11 4 REAM and Front Cover SCreWS ccasicek eege E era ged EENS EA ana ES eanet Te 12 1 Compression Test Port Flange ege eege ee Eegen de 12 2 Comprtession Port Adapter EE 12 2 Unit Before Insial
87. e immunity of the leak detector against unidirectional transients caused by the following phenomena Q Switching phenomena in the power network e g switching of capacitor banks inductive loads electrical motors etc Q Faults in the power network Q Indirect lightning strokes XXIV VS Series Helium Mass Spectrometer Leak Detectors XXV CAUTION CAUTION Many components of the leak detector are static sensitive Wear a grounding device when performing any maintenance on the leak detector especially when performing maintenance of static sensitive parts such as circuit boards and the spectrometer This equipment has been tested and found to comply with the limits for Class A digital device pursuant to Part 15 of FCC Rules These limits are designed to provide reasonable protection against harmful interference when it is operated in a commercial environment This equipment generates uses and can radiate RF energy which if not installed and used in accordance with the instructional manual can cause harmful interference to radio communications When this equipment is operated in a commercial environment operation is subject to the following two conditions Q This equipment must not cause harmful interference Q This equipment must accept any interference received including interference RF and ESD that may cause undesired operation The equipment may need to be reset after RF and or ESD events by c
88. e user A detailed summary of information related to I O pin identifications is provided in the VS Series User Guide VS Series Helium Mass Spectrometer Leak Detectors The rear panel of the leak detector Model VS PROZ and PDO3 is shown in Figure 1 8 The optional Wireless remote control and I O PCB is not installed Figure 1 8 Rear Panel with Discrete I O PCB Oil Drain Glass Window Exhaust Serial Connector Cover Plate For the internal mechanical vacuum pump Oil level sight glass reading A barbed hose fitting OD 12 57 mm for exhaust of the internal mechanical vacuum pump A 9 pin male D type connector to interface with an external PC via RS 232 type communications protocol for system diagnostic or control A detailed summary of information related to serial communication is provided in Appendix A Communications Protocol on page A 1 Access to expansion slot VS Series Helium Mass Spectrometer Leak Detectors Power Entry Module Vacuum Pump Breaker Analog Output Chassis Earth Terminal Product Label 25 Pin I O USB Provides supply power overcurrent and EMI protection for the leak detector The Power Entry Module consists of O Power Input Connector An IEC EN60320 C20 standard three prong grounded inlet connector Q Power Switch I O A 20A rocker type Power Switch Thermal Circuit Breaker QO 20 A EMC line filter A 6A Thermal Circu
89. ead cap screws item 1 and the Belleville washers item 2 See Figure 14 5 on page 14 4 for correct orientation of the Belleville washers 14 3 VS Series Helium Mass Spectrometer Leak Detector Spectrometer Header Spectrometer Body Figure 14 5 Direction of Cone 9 Remove the metal gasket item 3 and discard Do not scratch the mating surface when removing the gasket Do not attempt to reuse the gasket Figure 14 4 10 Examine the spectrometer cavity for discolored areas If present refer to the service manual for cleaning instruction CAUTION This is a static sensitive device ensure that personnel are properly grounded before proceeding 14 4 VS Series Helium Mass Spectrometer Leak Detector 11 Use an M1 5 Allen wrench to unscrew the six coupler screws and the collimator screw Figure 14 6 Collimator screw Coupler Screws M4 support screws Extractor and chamber wires Figure 14 6 lon Support Assembly 12 Remove the extractor chamber and collimator wires from the assembly 13 Remove the two M4 support screws Figure 14 7 M4 support screws Figure 14 7 M4 Support Screws 14 Gently remove the ion support assembly from the spectrometer header NOTE Ensure that no damage is done to the spectrometer wire during disassembly 15 Position the new ion support assembly onto the spectrometer header and align 14 5 VS Series Helium Mass Spectrometer Leak Detector
90. eaker Replacement cc ca ctctecs saseseseagesigesssacecennessceceetetocd niegienpessdiaiorsndscsndeecsaeccepecaeclensd 9 1 9 3 A EQUIPMent Required BEE 9 1 Section 10 Filament Replacement EE 10 1 TOA Installation ProC Ure so sisieun ENEE EENEG 10 1 10 11 EqQuipmentiRGQuired EE 10 1 Section 11 Thermocouple Gauge and Octal Cable Replacement sssssssessenneenrrnrnsnsrenrnrrnneeee 11 1 11 4 Installation ProC G Ure wio ccccc accessions teen innean ides aadiaaadbanadee Ei SEAN e ENEE ENN 11 1 Tet Equipment E EEN 11 1 Section 12 Compression Port Adapter Kit ege AgEredet ie eege deeg 12 1 12 4 Installation PrOCGA UIC x 5e22 ack is sdececitanigedeiandacdnleedehena vacdeshect AAR EAR 12 1 12 41 E uipment e EE 12 1 Section 13 Oil Mist Eliminator Installation dese goes rae tied ated adece te nanteraie ed Eege 13 1 13 1 Installation nerung AANEREN ee ENEN 13 1 Section 14 lon Source Replacement EE 14 1 NEE ele lee Le EN 14 1 Section 15 Flapper BoxinStallatigny cs ccc edeteeee Eege EE Eed 15 1 15 4 Installation Procedure EE 15 1 ere e ee EE te TEE 16 1 16 1 Installation Procedure EE 16 1 16 1 1 Equipment Required DEE 16 1 Section 17 Wireless Remote Base Unit Installation AAA 17 1 17 1 Installation Procedure EE 17 1 Kean Eug Required WE 17 1 Section 18 Scroll Pump Replacement vi VS Series Helium Mass Spectrometer Leak Detector PDOS e In EE 18 1 geeiert EE 18 1 TSS BqQuipment REGUINGG EE 18 1 Section 19 Scroll Pu
91. ears 5 Click Start to log data 6 Select Transfer gt Capture Text gt Stop to end text capture 7 Open the file where the data was stored and select File gt Print Example To use the above procedures to poll the leak detector leak rate using HyperTerminal and capture the text 1 Type the command XYZZY If received correctly the leak detector responds ok 2 Type the command LEAK 1 SECS CR ESC This command polls the leak rate every second The time is set in seconds Press ESC to abort polling Select Transfer gt Capture Text Browse to a folder and file using the Capture Text dialog box and click Start nn eR w Select Transfer gt Capture Text gt Stop to abort data logging VS Series Helium Mass Spectrometer Leak Detectors Table A 1 lists inquiries that are used to determine internal operating parameters All inquiries except VER begin with and end with lt CR gt Table A 1 Internal Operating Parameters Inquiry Response Responds with four lines Each begins with a lt cr gt lt lf gt The first line reports the ion chamber value The second line reports the emission value The third line reports the value of the offset variable The fourth line reports the gain value 2AZ lt O Reports the status of the Auto zero lt 0 function ON or OFF CALOK Reports the status of the last calibration CL XFER Reports the currently stored contra flow mode crossover pressure CPL
92. ectors Figure A 3 shows the input circuit sketch All inputs are optically isolated 3300 Ohm resistive loads in series with the LEDs of the opto isolators and voltage level from 5 VDC to 24 VDC The required pulse inputs are 200 ms minimum pulse width Customer J103 VS LD 5 24 VDC y 17 21 Figure A 3 Optically Isolated Input Circuit Sketch VS Series Helium Mass Spectrometer Leak Detectors This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Appendix B Leak Detector Spare Parts and Accessories Lists Table B 1 Spare Parts VS Series Remote Base Unit Field Installation VSFLDWB Wireless Baseboard Assembly Qty 1 R2541301 QO Label Wireless Remote Control Base Qty 1 R2778001 QO Cable RS 232 Wireless Base Qty 1 R2552301 Q Antenna S181FL 4 RMM 2450S Qty 1 648751010 Q Screw SEMS M3 X 6lg Pan HD Phillips Qty 4 614418306 QO lon Source Field Replacement w o filaments VSFLDIS Testport TC Cable VSFLDOC VS I O Kit Field Installation VSFLDIO Q I O Assembly Qty 1 R2988301 Q Cable Discrete I O RS 232 Yellow Qty 1 R2128301 2 Way Valve Assembly V1 V2 V3 V4 V5 and V7 R2010301 3 Way Valve Assembly V6 and V8 PR02 R2011301 Spectrometer Assembly R2041301 Replacement Fan Assembly VSFLDFN Motherboard PCB R2101301 CPU PCB R2361303 lon Source PCB R2120301 Valve Driver
93. ed on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 16 1 on page 16 2 and detach the rear plastic cover from the unit 16 1 VS Series Helium Mass Spectrometer Leak Detector Front Cover Screws Rear Cover Screws Figure 16 1 Rear and Front Cover Screws 4 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 16 1 5 Remove the two back plate Phillips head screws w lock washers Figure 16 2 and pull the blank back plate off and discard M3 Philips Head Screws Figure 16 2 Back Plate with Screws 16 2 VS Series Helium Mass Spectrometer Leak Detector 6 Remove the two wing nuts holding the plastic shield around the power input area inside the leak detector and remove the shield Figure 16 3 M4 SCREW Figure 16 3 Plastic Shield 7 Remove the fan assembly by loosening the M4 socket head cap screw Figure 16 3 CAUTION Use proper ESD safety techniques when performing a PCB card install 8 Connect the I O cable end labeled P100B provided with the kit to J100 marked Yellow on the mother board PCB Figure 16 4 Then run the cable along the base of the leak detector to the I O board location P100B
94. els Downstream with communication with an external PC 24 VDC to 5 VDC 3 3 VDC and 1 8 VDC conversion m m m m Flapper box interface The Discrete I O circuitry resides on a stand alone PCB comprised of six sections m m m CPU and memory section Isolated RS 232 section system site with a RJ45 8x8 connector J100 Isolated parallel interface section customer site with a 25 pin DB25 female type connector J103 Q Flapper box interface section with a 6 pin connector J102 O Power supply section with a 3 pin connector J101 a Non isolated USB section with O Dual USB type A connectors J201A and J201B for the external USB devices Q USB type A connectors J202 for the Flat Panel PCB Q USB type B connectors J203 for the external PC C 9 VS Series Helium Mass Spectrometer Leak Detector C 2 10 WRC B PCB The VS Series leak detector Wireless Remote Control Agilent P N R2541301 provides wireless communication between the leak detector and the hand held remote control unit The Wireless Remote Base PCB circuitry provides QO Isolated RS 232 serial interface for communication with the CPU PCB via the Front Panel PCB O Serial parallel interface for communication with a 2 4 GHz transceiver module Q RF output for communication with an omni directional dipole antenna via a coax cable O Voltage to frequency conversion of RF strength signal Q 24 VDC to 5 VDC conversion The Wi
95. emission current actually VDC on the lon Source board at test points EMISS T P and TP101 FIL GND The measured voltage should correspond to the observed reading in the Manual Tuning screen within 10 If the emission current lt 3 mA the system senses no emission current indicating that the filament is defective Replace the filament NOTE lon Source Bd Assy Rev G May 2007 the measured emission current will be a factor of 10 lower than observed emission For example Manual Tuning screen Emission Current 702 if measured on the lon Source board 0702 c Adjust the emission in ether direction the measured value should track the displayed value If the measured emission current voltage is fixed at 1 5 to 3 0 VDC replace the lon Source board due to a failed emission regulation circuit Q Remove the spectrometer header and inspect filaments for distortion and loss of thoria coating due to over heating replace if needed d Select Setup Menu gt Manual Tuning screen and verify that the Emission or lon is 0 Measure with power on the ion voltage with respect to ground on the pre amp VS Series Helium Mass Spectrometer Leak Detector board J2 connection pins labeled REP or CHA The voltage range is from 198 to 287 VDC If no high voltage is present replace the lon source board If the high voltage is present and there is continuity for both filaments verify if the filament voltage is present at either of the two fil
96. en purge 15 sccm or 2 psi at the inlet of the scroll pump Verify that the test port pressure is lt 100mTorr while in Test QO PDO3 Verify that the diaphragm pump is functional electrically running and creating a vacuum VS Series Helium Mass Spectrometer Leak Detector No Ion Peak error message and a flashing C appear on the front panel display after a calibration attempt Output from A D converter on the pre amp board is constant no change in reading Causes Resolutions 1 Cable w RJ45 connectors from Pre Amp board to motherboard disconnected Q Check the cable and re calibrate 2 Pre Amp board failure Figure D 12 on page D 11 a Measure the voltage with respect to ground on the pre amp board J3 connector OUT pin Monitor the output voltage during the calibration routine Monitor the A D output from the Pre Amp board by connecting a laptop to the leak detector using HyperTerminal Enter the command AD_READ CR 1 SECS MANY The following response appears example 8390438 8391004 8390710 8390937 continues until ESC is entered Perform a full calibration and note the electrometer output voltage The voltage should be scaling up and down as the ion voltage is scanning The same should be happening for the A D output If the LI Response back from the A D is not changing the A D on the Pre Amp board is defective Replace the Pre Amp board O Electrometer was not responding during
97. ended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 19 1 and detach the rear plastic cover from the unit Front Cover Screws Rear Cover Screws VE EEN Figure 19 1 Rear and Front Cover Screws 19 1 VS Series Helium Mass Spectrometer Leak Detector 4 Remove the four M3 screws and remove the fan Figure 19 2 D en kb al 4 anne a Figure 19 2 Fan Screws 5 Run the black red connector through the slit Figure 19 3 Where is the power connection we Figure 19 3 Connector Routing 19 2 VS Series Helium Mass Spectrometer Leak Detector 6 Install the new fan using the reserved M3 screws 7 Attach the front cover and secure to the frame using existing hardware 8 Attach the rear cover and secure to the unit using existing hardware 9 Reinstall the power connector 10 Connect the power cord and power up the unit 11 Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes Refer to the operator s manual if the system fails to reach the System Ready mode 12 Agilent recommends a full calibration of the unit prior to leak test operations 19 3 VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Section 20 Clippard Valve Replacement PDO3 only 20 1 Installation Procedure 20
98. er lon Source and allows for emission current adjustment The emission current parameter tunes the leak detector maximizing the leak detector output for a peak helium signal Typical Emission current values range from 5 mA to 1 0 mA lon Voltage Displays the current ion voltage value of the spectrometer lon Source The ion voltage parameter tunes the leak detector maxi mizing the leak detector output for a peak helium signal Typical ion voltage values range from 250 VDC to 270 VDC The ion voltage value is automatically adjusted and set during the full calibration routine Filament Switches between Filament 1 and 2 The filament selection can be performed manually but occurs automatically if the current operat ing filament burns out A calibration routine is recommended every time the operating filament is changed The change appears on the Home and System Information screens and C flashes on the Home screen to indicate that calibration is required NOTE Replace the filament inside the spectrometer as soon as it is convenient after the spare filament has been put into use Gain Displays the current value of the Gain of the system Gain is used to scale the indicated value of a known leak to agree with a known correct value The gain parameter is adjusted after the leak detector has been tuned to helium It is automatically set by the Calibrate Procedure Use the value button next to Gain to change the Gain value NOTE Changing
99. es Southeast Asia Agilent Technologies Vacuum Products Division South East Asia SEA Alex Ho H P 601 2213 1253 Fax 603 6733 8121 Singapore Agilent Technologies Vacuum Products Division Singapore Unit 10 04 Helios Biopolis one north 11 Biopolis Way 138667 Singapore H P 65 92364988 Fax 65 64789603 Taiwan Agilent Technologies Vacuum Products Division 14F 6 No 77 Hsin Tai Wu Road Sec 1 Hsi chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Toll Free 0800 051 342 Fax 886 2 2698 9678 UK amp Ireland Agilent Technologies Vacuum Products Division 6 Mead Road Oxford Industrial Park Tel 44 0 1865 291570 Fax 44 0 1865 291571 L
100. es respond with the offending inquiry followed by a space then 2 lt CR gt lt LF gt line feed lt LF gt Inquiries parameters and commands can be concatenated Each word or numeric parameter is followed by one or more spaces The string is terminated by a lt CR gt which causes execution to begin Successful strings respond with the specified data for the input inquiries in the order the inquiries were issued followed by ok lt CR gt lt LF gt Unsuccessful strings respond with the first offending command followed by a space then 2 lt CR gt lt LF gt All commands and inquiries following the failed word are ignored all parameters are discarded Table A 1 on page A 5 Table A 2 on page A 7 Table A 3 on page A 10 and Table A 4 on page A 11 outline the available control and query commands A 1 VS Series Helium Mass Spectrometer Leak Detectors A 2 Communicating with RS 232 The RS 232 Protocol is intended for diagnostic purposes and initial set up inquires The RS 232 connection is located on the rear D sub 9 pin connector The leak detector RS 232 port is not an interrupt driven port It is configured as DTE Data Terminal Equipment therefore the leak detector s RS 232 Protocol cannot be sent as strings NOTE When programming with virtual instrumentation programs such as LabView TestPoint or Visual Basic try one the following two methods Q Transmit the intended command one character at a time with a minim
101. essure System Information Displays the status of configured and active items Control Panel Access Activates deactivates Vent and Panel Lockouts Auto Sequencer Configures roughing and test times toggles features on off and displays rough timer value Set Up Accesses all the screens shown in Figure 1 5 on page 1 7 LI LU UU LU LI VS Series Helium Mass Spectrometer Leak Detectors Table 1 2 Screens General Description Continued Screen Purpose Accesses the following screens Q Advanced Parameters Q Activates Autozero and Split Flow functions Q Activates the Gross Leak function O Sets Split Flow value Output Control Configures the Analog Output and Bar Graph default units Manual Tuning O Toggles between Filament 1 and 2 Q Sets Emission lon and Gain settings Units Configures Leak Rate and Pressure units Manual Valve Control Access to control all valves Languages Configures language Gauge Calibration Calibrates the Test Port Vacuum and Test Port ATM reference points and displays Test Port Pressure and Spectrometer Pressure Maintenance Configures OQ Date and Time Q Cal Leak Expiration and Internal Calibrated Leak values Q Password Fore Pump Wireless VS Series Helium Mass Spectrometer Leak Detectors 1 4 Rear Panel The rear panel of the leak detector with an external mechanical pump Model VS MR15 or MD30 a
102. est the TC gauge to ensure a leak free joint Attach the rear cover and secure to the frame using existing hardware 12 13 Connect the power cord and power up the unit Watch the home screen to verify that the Spectrometer Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes Refer to the operator s manual if the system fails to reach the System Ready mode Refer to the TC gauge calibration section of the user s manual for the correct calibration procedure for the TC gauge Agilent recommends a full calibration of the unit prior to leak test operations VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Section 12 Compression Port Adapter Kit 12 1 Installation Procedure 12 1 1 Equipment Required Q Extended Length M5 Allen Wrench O Metric Allen Wrench Set OQ Compression Port Adapter Kit P N VSFLDCP For clarity some items have been omitted from views WARNING Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting AN any part of the system 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 12 1 and detach the rear plastic cover from the
103. eter Leak Detector b Ensure the total pressure plate is electrically isolated from ground and other points of contact c Ensure that the total pressure plate wire is securely fastened to total pressure plate and feed through pin 3 Pre amp board failure Figure D 11 and Figure D 12 J2 Check Filament Voltage amp Resistance Ion Voltage REP CHA ee Eer ei s Fe i Ha ne Sg SS mme ye as SS e UE en he Zeche El iets JEY LEN Cep Ez PEHEA ya Figure D 12 Pre Amp Board Measurement Points a Measure on the pre amp board the voltage present at the header pin labeled PRESS spectrometer pressure output b Carefully remove the ion source power cable warning high voltage present if the measured voltage is greater than 1 5 VDC c Re measure the voltage at the PRESS pin The voltage should be 0 If a constant steady state voltage is measured replace the pre amp board CAUTION Many components of the leak detector are static sensitive Wear a grounding device when performing any maintenance on the leak detector especially when performing maintenance of static sensitive parts such as circuit boards and the spectrometer Table D 1 gives the spectrometer header pre amp board J1 connector pin assignments Table D 1 Spectrometer Header Pre amp Board J1 Pin Assignments Chamber Repeller Filament 2 Filament 2
104. etermine the leak detector status The I O is accessible via a type DB25S female socket connector Table A 6 I O Connector Pin Signals Signal Name Description Leak Detector Behavior Customer supplied 5VDC to 24VDC for Output Common pins VRET Customer supplied GND for the Input Common pins CAL_OUT Active HIGH when the leak Performs calibrating routine detector is in CALIBRATION with the Internal Calibrated mode Leak Zeroing routine is included VS Series Helium Mass Spectrometer Leak Detectors Table A 6 I O Connector Pin Signals Continued Signal Name ZERO_OUT Description Active HIGH when the leak detector is in ZEROING mode Leak Detector Behavior Performs the Zeroing routine HOLD_OUT Active HIGH when the leak detector is in HOLD mode Performs a HOLD routine and isolates the test port and any test objects from the leak detector vacuum system VENT_OUT Active HIGH when the leak detector is VENT mode Performs a VENT routine isolates the test port from the leak detector vacuum system and vents the test port to atmosphere START_OUT Active HIGH when the leak detector is in START ROUGH mode Performs a ROUGHING routine on the test port and any attached test objects Active HIGH when the leak detector is in READY mode Indicates that the leak detector is completing a STARTING routine and that the filament and turbo are OK
105. ext to Day use the up and down arrows to set the value and press Set e w N Press OK to exit the screen 24 8 VS Series Helium Mass Spectrometer Leak Detector 24 4 Fore Pump Set Up 1 Press Set Up on the Menu screen to open the Set Up screen CAUTION The items configured using the Set Up sub screens significantly affect the performance of the leak detector and must only be accessed by trained service personnel Many of the values for the parameters included on the Set Up sub screens are calculated when the leak detector performs functions such as Calibrate and tuning Changing these values can cause unreliable test results 2 Press Fore Pump on the Maintenance screen The Fore Pump Set Up screen appears Figure 24 6 Use this screen to select fore pump speed and type ee a 0 1 2 3 4 5 6 7 8 9 10 FORE PUMP Opens Date OPERATING HOURS SINCE SERVICED 135 t Y Displays hours Displays pump type since service oil sealed or dry PUMP TYPE OIL SEALED HA DONE Figure 24 6 Fore Pump Set Up 24 9 VS Series Helium Mass Spectrometer Leak Detector 24 4 1 Date Serviced Q Press the date on the Fore Pump screen and the Date Serviced screen appears Figure 24 7 Press to open the DATE SERVICED keypad GE open Te SE SE el Press to increment eypad B W MONTH 11 DAY 02 z Month Press to activate 7 field OK CANCEL SET Figure 24 7 Date Serviced To use this s
106. gain is too low there is too much signal reduce emission current by 0 1 0 2mA then calibrate again O If gain is too high there is too little signal increase emission then calibrate again The permitted emission current range is from 0 5 to 1 5 mA When calibration is successful filament replacement is complete 10 9 VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Section 11 Thermocouple Gauge and Octal Cable Replacement 11 1 Installation Procedure 11 1 1 Equipment Required O Extended Length M5 Allen Wrench QO Metric Allen Wrench Set For clarity some items have been omitted from views WARNING Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting AN any part of the system NOTE Some early versions of this instrument used one assembly that incorporated a TC gauge and cable If you need to replace one of these early assemblies you will need to replace the TC gauge VSFLDOG and the cable assembly VSFLDOC 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 11 1 and detach the rear plastic cover from the unit VS Series Helium Mass Spectrometer Leak Detector Fron
107. ger tighten Figure 10 10 NOTE The cones of the Belleville washers should all point to the head of the screw Figure 10 10 Direction of Cone 22 Following the pattern shown in Direction of Cone torque screws to 40 in lbs 4 5 N m 23 Re torque screws to 90 in Ibs 10 2 N m following the same pattern Go through the entire torque pattern twice to ensure the metal gasket is firmly compressed 10 6 VS Series Helium Mass Spectrometer Leak Detector 24 Wait a minimum of five minutes then torque the screws shown in pattern Figure 10 10 to 90 in lbs 10 2 N m 25 On the PCB use the resistance meter to verify an open circuit between any two of the six ion source header pins except FIL 1 to FIL 1 and FIL 2 to FIL 2 which should be 0 3 Ohms or less Also verify an open circuit between the body of the spectrometer and any of the ion source header pins Figure 10 11 Ion Source Header Pins Figure 10 11 lon Source Header Pin Schematic If there is continuity short circuit at any of the points remove the header and inspect for shorting 26 Place the spectrometer cover over the header and align the holes Figure 10 12 Ion Source Header Pins Location Figure 10 12 lon Source Header Pin Locations 27 Install screws and washers items 5 amp 6 then tighten using a M3 Phillips screw driver lon Source Header Pin Locations 10 7 VS Series Helium Mass Spectrometer Leak Detector
108. h M5 Allen wrench remove the four screws holding the rear plastic cover Figure 14 1 on page 14 2 14 1 VS Series Helium Mass Spectrometer Leak Detector Rear Cover Screws Rear Cover Screws II SI ZU GE Figure 14 1 Rear Screws 4 Detach the rear plastic cover from the unit 5 Disconnect the fan cable and remove the fan assembly by unfastening two wing nuts and one M4 socket head cap screw Figure 14 2 Fan Assembly Figure 14 2 Fan Assembly CAUTION Static sensitive device ensure that personnel are properly grounded before proceeding 14 2 VS Series Helium Mass Spectrometer Leak Detector 6 Disconnect the spectrometer ground cable the preamp signal cable and the ion source cable from the spectrometer Figure 14 3 C Pre amp Signal Spectrometer ha Cable Location cover Ion Source Cable Location Ground Stud Location Figure 14 3 Cable Locations NOTE Cables not shown for clarity 7 Use an M3 Phillips screw driver to remove the spectrometer cover CAUTION Wear non powdered ESD safe Nitride or equivalent gloves not included in kit to prevent skin oils from getting on vacuum surfaces Ensure that personnel are properly grounded before proceeding 8 Use an M5 allen wrench to loosen screws item 1 of Figure 14 4 on page 14 4 and carefully remove the spectrometer header from the body The vacuum system vents to atmosphere as the screws are loosened Retain the socket h
109. he calibrated leak temperature cable from the calibrated leak PC board Figure 4 11 on page 4 7 4 5 Replacing the Valve Block Harness and Thermocouple Wiring To replace the wiring 1 Replug the valve plugs screw the Phillips head screw and reattach the wires from the six three prong blocks Figure 4 2 on page 4 3 Reattached the thermocouple wires Figure 4 3 on page 4 3 Using an extended length M5 Allen wrench reinstall the four screws holding the rear plastic cover Figure 4 1 on page 4 2 Replace and retighten the two wing nuts holding the plastic shield Figure 4 9 on page 4 6 Reconnect the ground connection on the valve block and the spectrometer Figure 4 7 on page 4 5 Tighten the Phillips head screw connecting the test port ground wire to the center rail Figure 4 4 on page 4 4 Reconnect the Figure 4 8 on page 4 6 QO lon source sensor cable R2126 301 Q Pre amp cable R2125 301 Reinstall the four screws holding the front plastic cover to attach the cover to the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 4 1 Using an extended length M5 Allen wrench reinstall the four screws holding the rear plastic cover Figure 4 1 4 9 VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Section 5 The Electronics This chapte
110. he user interface board and gently place the user interface on top 16 Replace and tighten the four hex nuts that mount the interface board to the user interface Figure 5 4 17 Reconnect the green yellow wire spade connection that runs between the user interface board and the Front Panel Figure 5 7 5 5 VS Series Helium Mass Spectrometer Leak Detector 5 6 18 Reconnect the blue plug from the user interface board that originates on the display Figure 5 8 Blue plug Figure 5 8 White Plug to Front Panel 19 Reconnect the white plug form the backside of the interface board Figure 5 6 on page 5 4 20 Reconnect the two ribbon cables on the left and right sides of the board Figure 5 5 on page 5 4 21 Use a nut driver to reinstall the four hex nuts and the spacers that mount the interface board to the user interface Figure 5 4 22 Reconnect the speaker wire green plug ground and red black wire connector at the interface board Figure 5 3 23 Gently rock the metal interface panel back in place 24 Reattach the user interface front cover using an Allen wrench to tighten the M4 screw and washer at the bottom front of the plate Figure 5 2 25 Reinstall the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 5 1 26 Using an extended length M5 Allen wrench re
111. i aapiocut alee eeedientcl 15 4 Front Cover Assembly eegene ee eebe Eege ee 15 5 Flapper Box Assembly NW25 Installation eceecccccceeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeneeneeseees 15 5 Rear and Front Cover EE 16 2 Back ER 16 2 WEARTEN S A E EE 16 3 xi VS Series Helium Mass Spectrometer Leak Detector 16 4 16 5 16 6 16 7 17 1 17 2 17 3 17 4 17 5 17 6 18 1 18 2 18 3 18 4 18 5 18 6 19 1 19 2 19 3 20 1 20 2 21 1 21 2 22 1 22 2 22 3 22 4 23 1 23 2 24 1 24 2 24 3 24 4 24 5 24 6 24 7 A 1 A 3 D 1 D 2 D 3 D 4 D 5 D 6 D 7 xii I O Cable to Mother Board 16 3 VO Bracket nstallat O i ewestetectehiaee EES Ee 16 4 ege EE 16 4 UO Clip EE 16 5 Rear and Front Cover Screws ccccccccccceccesseeeeceeeeeeeeeeeeuecseececeeeseueaeaeenceceeeeeeeeaeneseeseees 17 2 Fan Assembly and Socket Head Cap Gcrew 17 2 Wireless E Le EE 17 3 Base Board Assembly with EE 17 3 Front Panel Display oireisiin aaia aicastadaal feaedtenesideds dees eel AKE eiiean 17 4 Ee REES 17 5 Rear and Front Cover Gcrewes esssssssrsrresesessrrrrirrrererrerrrrttitrere rtrt rr rtrtt ere rrrrrrnrtreere errr rrnree 18 1 NW 16 ConnNeGtON ei a a EEN e 18 2 Scroll Pump Mounting Connections cecccccceeeeeeeeeeeeeeeeeeeeeeeeeeeeaeeeeeseaeeeseeeeeeeeeseeeeees 18 2 EXxXMausSt FlOS6iiiscisaceosstis Stee geg e Ee e 18 3 Fan Assembly lei seareiros ene aE aust aaten setae set A SA NERE EEEREN 18 3 Manifold Block Connections
112. ight up and out of the unit Place the block bottom down on a flat surface Figure 6 14 Unscrew the knurled nut that connects the vacuum connection to the turbo pump Figure 6 15 Figure 6 15 Turbo Pump Connector Lift the pump straight up and out of the unit 6 2 4 Replacing the Turbo Pump Valve Block and Spectrometer To reinstall the scroll pump and valve block 1 Gently place the valve block onto it mounting holes and tighten the five M4 Allen nuts Figure 6 14 on page 6 10 Reinstall the spectrometer ground wire Figure 6 13 on page 6 10 Reinstall the ground to the valve block CONDS Reinstall the three bolts for the spectrometer connection Take care not to damage the O ring Figure 6 14 on page 6 10 Reinstall the two bolts for the vacuum connection Take care not to damage the O ring Figure 6 11 on page 6 9 Tighten the Phillips head screw connecting the test port ground wire to the center rail Figure 6 10 on page 6 8 6 2 5 Replacing the Valve Block Harness and Thermocouple Wiring To replace the wiring 1 Replug the valve plugs screw the Phillips head screw and reattach the wires from the six three prong blocks Figure 6 8 on page 6 7 Reattached the thermocouple wires Figure 6 9 on page 6 8 Reinstall the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the un
113. igure 6 8 Figure 6 8 Sensor Wiring and Thermocouple 6 7 VS Series Helium Mass Spectrometer Leak Detector 5 Unplug the thermocouple octal connector Figure 6 9 Figure 6 9 Thermocouple 6 2 3 Removing the Valve Block Assembly and Spectrometer To remove the valve block 1 Unscrew the Phillips head screw connecting the test port ground wire to the center rail Figure 6 10 Ground wire Figure 6 10 Test Port Grounding Wire Connection 6 8 VS Series Helium Mass Spectrometer Leak Detector Loosen but don t remove the two bolts for the foreline to valve block connection Take 2 care not to damage the O ring Figure 6 11 a gt Sg f S amp SS S Pe ON CR NG Figure 6 11 Vacuum Connection 3 Remove the ground to the valve block CONDS Figure 6 12 MW Figure 6 12 Valve Block and TC Ground 6 9 VS Series Helium Mass Spectrometer Leak Detector 4 Unscrew the Phillips screw for the spectrometer ground SP_GND Figure 6 13 Ground wire Figure 6 13 Spectrometer Ground Wire 5 Unscrew the five Allen nuts that mount the valve block to the unit Figure 6 14 Two are shown with the unit already removed for a better view The spectrometer and turbo pump are shown together Figure 6 14 Valve Block Assembly and Spectrometer Mounting Nuts 6 10 VS Series Helium Mass Spectrometer Leak Detector 8 Gently pull the valve block assembly stra
114. iitiesi icc apelin mec aan D 1 D2 Operational e D 13 D 3 Performance ISSUES ooonnnnnoennnnsnnnrnnsnerrrererrerrrreresrrrrrernrrronrnrrssrrrrrssnrrrorerrrrenrrrererrrrerene D 22 viii VS Series Helium Mass Spectrometer Leak Detector Figures 1 1 Portable Leak Detector with Internal DS42 Wet Rotary Vane Pump Model VS PRO2 and Portable Leak Detector with Internal IDP 3 PD03 Dimensions eseceeeseeeeeeeeeeee 1 3 1 2 Mobile Leak Detector with External DS302 Wet Rotary Vane Pump on a Cart Model VS MR15 DIMENSIONS EE EE 1 3 1 3 Mobile Leak Detector with External TS620 Dry Scroll Pump on a Cart Model VS MD30 DME O EE 1 4 1 4 Front Panel Displays Sleigh deet eet oats octane tenga 1 5 1 5 SCTE RIT Me EE 1 7 1 6 VS Seres Rear E EE 1 10 1 7 Optional l O PGB Rear ET EE 1 11 1 8 Rear Panel with Discrete HCH BC ts ERREEEEE ENEE EENS 1 13 2 1 Test Port with Blank Off Flange Cap ENEE 2 1 2 2 Centering Ring with Eegeregie eegene ger neces 2 2 2 3 O ring and Centering Ring on Test Port scat ate ois ee 2 3 3 1 Se 3 2 3 2 Calibrated Leak Location ake apa RE ae a ra Re ES aeie 3 2 3 3 High Voltage Location EE 3 3 4 1 Rear and Front Cover SCrowsS eene a r aaa A A EET EAEE EANN E 4 2 4 2 Sensor Wiring leie Wuere 4 3 4 3 Thermocouple EE 4 3 4 4 Test Port Eeer Meter 4 4 4 5 VACUUMS ONMECUOM tas dicavtocs se a aA EE 4 4 4 6 Valve Block Ground EEN 4 5 4 7 Spectrometer Ground RE 4 5 4 8 Leak Sensor and Pre Amp Cables cc
115. ilaments Figure D 11 on page D 10 5 Electrometer offset noise drift a Measure the voltage with respect to ground on the pre amp board Figure D 12 on page D 11 J3 connector OUT pin b Monitor the output voltage low mV range c Unplug the P1 ion source bd cable cable and observe if the leak rate is 0 0E 11 and electrometer output voltage lt 5mV DC If the leak rate and output voltage remain unchanged or very unstable replace spectrometer header or entire spectrometer 6 Foreline pump MD30 failure Q Replace the tipseal Unstable leak rate reading Test and Fine Test modes of operation Causes Resolutions 1 Leak in system O Perform a full calibration blank off test port and leak check the system 2 Filament unstable damaged O Switch filaments and verify if instability has been eliminated D 22 VS Series Helium Mass Spectrometer Leak Detector Contaminated ion source If both filaments 1 and 2 produce an unstable background reading Figure D 11 on page D 10 a Open the spectrometer and inspect ion source for contamination carbon buildup or noticeable discoloration Figure D 10 on page D 10 and Figure D 11 on page D 10 b Clean or replace ion source and filaments Electrometer cooler failure Figure D 11 and Figure D 12 on page D 11 a Verify that 5 0 VDC is present on the pins labeled H and H on the Pre amp board b Power off the unit and measure resistance of pins H and H
116. in a stand alone unit with a plastic enclosure compromised m m Spectrometer tube sub assembly with a pre amplifier PCB Valve block sub assembly with seven solenoids and Standard Calibrated Leak with a Temperature Sensor PCB Q Turbo molecular pump Q Internal mechanical pump with a valve VS PRO2 model only and external 6 A circuit breaker or an AC 20 A outlet for the external mechanical wet or dry pumps Electronics block sub assembly with the CPU Motherboard lon Source Valve Driver and Turbo Controller PCBs Front Panel with the color LCD Display Touch Panel and two hard keys TEST and VENT C 1 VS Series Helium Mass Spectrometer Leak Detector LU UU wv m Discrete I O PCB optional Wireless Base PCB with RF antenna optional Two fans AC Power Entry Module with the IEC60320 C20 input 20 A thermal circuit breaker switch and EMI filter Universal Power supply with 100 253 VAC 50 60 Hz input and 24 VDC output All VS Series leak detector hardware PCBs and sub assemblies are interconnected using the cables shown in Appendix E Interconnection Diagram on page E 1 C 1 Spectrometer Tube Description The spectrometer tube is a heart of the VS Series Helium Mass Spectrometer Leak Detector and is quantitatively sensitive to the presence of helium The VS Series spectrometer tube LI m Creates positive ions from gas molecules that penetrate inside the spectrometer maintained unde
117. in very humid environments to keep the test port as dry as possible which reduces the time required to pump down the system To do this 1 2 Turn the system power OFF Remove the power cord from the power input and remove the rear plastic from the system Locate the filter that provides venting for the test port It is on the valve block on valve V7 on the back facing surface in the upper right hand corner Remove the filter and install a nitrogen connection into the port The threads of the port are a size Rc 1 8 metric Feed the nitrogen line through the lower left hand opening of the rear panel where the foreline manifold or mechanical pump drain access is located Replace the rear cover and re connect the power to the system NOTE The nitrogen supply line should have a pressure relief valve installed so that the pressure does not exceed two psi 25 5 VS Series Helium Mass Spectrometer Leak Detector 25 3 Spare Parts List Table 25 4 Leak Detector Spare Parts Assembly Part Number Motherboard PCB R2101301 CPU PCB R2361303 lon Source PCB R2120301 Valve Driver PCB R2104301 24 VDC Turbo Controller PCB 9699518 Front Panel Controller PCB R2117301 Front Panel Sub Assembly R2021301 AC DC Power Supply 659077040 Spectrometer Assembly R2041301 TC Upgrade Kit VS531AIC Filament Replacement VSFLDFR Valve Block O ring Kit VSFLDOV Metal Gasket Kit VSFLDMG
118. install the four screws holding the rear plastic cover Figure 5 1 VS Series Helium Mass Spectrometer Leak Detector 5 2 CPU Board To replace this board 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 5 9 and detach the rear plastic cover from the unit Front Cover Screws Rear Cover Screws Figure 5 9 Rear and Front Cover Screws 4 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 5 9 5 Disconnect the O R2140 301 from R24202 black white O Grey plug rightside R2730 301 5 7 VS Series Helium Mass Spectrometer Leak Detector 6 Unscrew the four Phillips head screws Figure 5 10 The spacers between the board and the mother board loosen as well remove them 4 CPU board SEH s Figure 5 10 Mounting Screws 5 8 10 11 E Remove the board Place the new board with the spacers into the location Replace and tighten the four Phillips head screws and spacers on the corners of the board Figure 5 10 Reconnect the O R2140 301 from R24202 black white QO Grey plug rightside R2730 301 Reinstall the four screws holding the front plas
119. it Figure 6 1 on page 6 2 Using an extended length M5 Allen wrench reinstall the four screws holding the rear plastic cover Figure 6 1 on page 6 2 VS Series Helium Mass Spectrometer Leak Detector 6 3 Changing the Mechanical Pump Fluid Refer to the Mechanical Pump Operation Manual provided with the pumps that came with your leak detector See the accessory item list in this manual for the replacement oil part number 6 12 VS Series Helium Mass Spectrometer Leak Detector Section 7 Fan Replacement 7 3 1 Equipment Required O Extended Length M5 Allen Wrench Q M5 Allen Wrench QO Slotted Screw Driver There are two cooling fans inside the unit body Figure 7 1 Figure 7 1 Fan Locations To replace the top fan 1 Shut down the system using the On Off rocker switch 2 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 7 2 and detach the rear plastic cover from the unit 3 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 7 2 VS Series Helium Mass Spectrometer Leak Detector Front Cover Screws Rear Cover Screws Figure 7 2 Rear and Front Cover Screws 4 Disconnect the red black wire connector Figure 7 4 Figure 7 3 Fan Wiring VS Series Helium Mass Spectrometer Leak Detector
120. it Breaker for the internal mechanical pump Banana type output connector for an Isolated Leak Rate Analog reading The Red connector is a signal positive terminal black is the signal negative terminal Signal range From 0 to 10 VDC Provided for additional connection of the leak detector to the building grounding system to improve ESD protection A product label with part number serial number and rating infor mation Q Inputs Opto isolated 5 24 VDC 3300 Ohm resistive load All inputs are opto isolator LEDs with series resistors Q Momentary Inputs Opto isolated 5 24 VDC 3300 Ohm resistive load requires 200 ms minimum pulse width Q Outputs Emitter follower with 10 Ohm series resistor 14 mA max drive current 24 VDC max Standard USB connector types USB A and USB B VS Series Helium Mass Spectrometer Leak Detector Section 2 Cleaning the Test Port The test port is located on the outside of the leak detector Therefore it is not necessary to turn the leak detector off or disconnect it from mains power if this is the only procedure being performed If you are cleaning the test port in conjunction with other procedures that require opening the leak detector be sure to turn the leak detector off and disconnect it from mains power The NW 25 uses the blank off flange cap on top of the centering ring when the system is not in use or when in use but not connected to a device To clean the test port 1 Turn
121. ith the spacers into the location 10 Replace and tighten the four Phillips head screws and spacers on the corners of the board 11 Reconnect the Q 24 VDC J3 connector R2124301 Q Turbo controller cable R134301 Q RS 232 cable R2133301 Q Ground at the top the backplate 12 Reinstall the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 5 18 on page 5 16 13 Using an extended length M5 Allen wrench reinstall the four screws holding the rear plastic cover Figure 5 18 on page 5 16 5 17 VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Section 6 Turbo Molecular Pump and Roughing Foreline Pumps The VS Series has an internal high speed turbo pump and depending upon your system s configuration either one or three roughing foreline pumps NOTE The DS302 MR15 TS620 MD30 and the DS42 PRO2 D 6 6 1 Equipment Required O Extended Length M5 Allen Wrench QO M5 Allen Wrench Q Phillips Screw Driver QO Slotted Screw Driver 6 1 DS 42 Fore Pump CAUTION The fore pump operates at high temperatures Allow the pump to cool before proceeding To replace the fore pump 1 Shut down the system using the On Off rocker switch 2 Wait for the pump to cool 3 Using an e
122. itted from views WARNING Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting AN any part of the system 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 3 1 and detach the rear plastic cover from the unit 3 1 VS Series Helium Mass Spectrometer Leak Detector Rear Cover Screws Figure 3 1 Rear Cover Screws Carefully disconnect the calibrated leak temperature cable from the calibrated leak PC board Using a slotted screwdriver remove the two screws holding the calibrated leak in place Figure 3 2 Calibrated Leak T A A Figure 3 2 Calibrated Leak Location 6 Discard the calibrated leak and the O ring 7 Inspect the replacement calibrated leak and O ring for damage or particle contamination and remove any particle contamination 3 2 VS Series Helium Mass Spectrometer Leak Detector 8 9 10 11 12 13 14 15 Install the O ring in the groove and then assemble the replacement calibrated leak to the valve block using a slotted screwdriver Figure 3 2 Reconnect the calibrated leak temperature cable to the replacement calibrated leak WARNING Extreme care must be taken due to the presence of high voltage Ensure that high voltage
123. ject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e f requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank Agilent Technologies Vacuum Product Division United States amp Canada Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Toll Free 1 800 882 7426 Fax 1 871 860 5437 Benelux Agilent Technologies Vacuum Products Division Herculesweg 8 4338 PL Middelburg THE NETHERLANDS Tel 31 118 671570 Fax 31 118 671569 China Agilent Technologies Vacuum Products Division Room 1648 Central Tower South Wing Beijing Junefield Plaza No 10 XuanWuMenWai Street Beijing 100052 P R CHINA Tel 86 10 6310 8550 Toll Free 800 820 6556 Fax 86 10 6310 0141 F
124. l cece cceccceec cee cececeeececeeceeeeeeeneeeeeeseaaeaeseeaaeaesaeaaaeaaeeaaeeaaeeaeeeaeeeaeeeeeeeeeeees 13 1 KF 16 Flange Adapter w Centering Ring AAA 13 2 Figure 3 Oil Mist Eliminator After Iossbalt e ieteeeeredr eeued geesde 13 2 Beat free E E TE 14 2 SE EEN ann EES 14 2 Cable MEO CATIONS EE 14 3 Spectrometer Exploded Eed en Geier eet cele adele Teale bg 14 4 Direction Of GC OMG emne aasa a oiantaias E 14 4 Jon Support Assembly sirri a R a aE Raa a 14 5 MA S pport Screws e ta ede ee EES 14 5 Partial Pressure Plate cccseeeeceeeeeeeeeceeaeeeaeaeaaeaaeeaaaeaaeeaaeeaeeaaecaaeeaeeeaeceseceeeeeeeeees 14 6 EXtracton ENEE 14 6 Eelere eeh er Seeerei 14 7 Coupler and Filament Assembly ugeet gd ege ENEE deadededeta madecienesdsscierenearaneee 14 7 Filament POSION Seres aee AANEREN ENEE e EENS 14 8 Filament ie EE 14 8 Spectrometer e ie E EE 14 9 PIPE e Tee ION EE 14 10 lon Source Header Pin ere tence Get egekedia bese oneee one Roy ylest hatte 14 10 lon Source Header Pin Locations Seefe cadets attic teeter anleaoi ca d et 14 11 Vent VaVe EE 14 11 Rear and Front Cover SCrews cccesn s oc i5 ceeds oy scanebind nedecu tant weas dear sansa ntnweccaneedhcuaune ada enc enas 15 1 Pl sticShieldi ean eane e e e a EN 15 2 VOAssembly WIT SChOWS EE 15 2 Desa CWE E 15 3 KORD o PEE E E E E A E A 15 3 Front PanelRemoval sise a a a ENEE e a ayaa aae ae AE 15 3 PCB Mounting RE 15 4 Flapper Box Wiring Harness Layout cgi od oa rence d oa Gucc
125. l pressure signals under full software control provided by the CPU PCB The Pre Amp PCB passes all voltages and currents to the ion source section of the spectrometer tube The Pre Amp PCB is soldered directly to a spectrometer tube header Pre Amp PCB circuitry provides O Digital isolated serial interface with the Motherboard PCB QO 24 bit sigma delta analog to digital conversion of the signals proportional to O Helium leak rate generated by an electrometer amplifier in a spectrometer tube Q Total spectrometer tube pressure generated by the ions of gasses heavier than helium collected by an off target collector plate and amplified by an active low pass filter stage Q 24 VDC conversion to 15 VDC 12 VDC the electrometer supply 5 VDC analog supply for the ADC converter 5 VDC digital supply and 24 V 5 V DC DC conversion for the electrometer Peltier cooler element inside of the spectrometer tube Q lon source s electrodes voltage supply distribution and filtering The Pre Amp PCB circuitry resides on a stand alone PCB comprised of four sections Q Digital isolated section with a RJ45 10x10 connector JR1 Q ADC section with 8 pin spectrometer connector J3 Q Power supply section Q lon source s high voltage and high current distribution section with 10 pin connector J1 and 6 pin spectrometer connector J2 C 2 8 Temperature Sensor PCB C 8 The Temperature Sensor PCB Agilent P N R2114301 provides direct
126. le 4 3 VS Series Helium Mass Spectrometer Leak Detector 4 3 Removing the Valve Block Assembly and Spectrometer To remove the valve block Unscrew the Phillips head screw connecting the test port ground wire to the center rail 1 Figure 4 4 Figure 4 4 Test Port Grounding Wire Connection Loosen but don t remove the two bolts for the foreline to valve block connection Take care not to damage the O ring Figure 4 5 amp E S SS S Figure 4 5 Vacuum Connection 4 4 VS Series Helium Mass Spectrometer Leak Detector 3 Remove the ground to the valve block CONDS Figure 4 6 MW Figure 4 6 Valve Block Ground 4 Unscrew the Phillips screw for the spectrometer ground SP_GND Figure 4 7 Figure 4 7 Spectrometer Ground Wire VS Series Helium Mass Spectrometer Leak Detector 4 6 5 6 Disconnect the Figure 4 8 QO lon source sensor cable R2126 301 Q Pre amp cable R2125 301 Figure 4 8 Leak Sensor and Pre Amp Cables Loosen and remove the two wing nuts holding the plastic shield and remove the shield Figure 4 9 ee Figure 4 9 Plastic Shield VS Series Helium Mass Spectrometer Leak Detector 7 Loosen and remove the four M5 screws and rubber spacers holding the unit to the VS Series body Figure 4 10 Two are shown with the unit already removed for a better view The spectrometer and turbo pump are shown together Cal leak connec
127. lium Mass Spectrometer Leak Detector Table 25 3 lists the fuses and circuit breakers Table 25 3 Fuses and Circuit Breakers Function Type MFG PIN Location Circuit Breaker Q Main Power Supply 20 A 250 V AC SCHURTER Model EF12 PIN EF12 2196 1110 01 Power Entry Module Q Internal Vacuum Pump 6 A Rear Panel 250 V E T A PIN 1110 Fl12 PIMI 6 A Fuses PCB overcurrent 1 85 A 33 VDC Raychem Q Motherboard RT400 protection SMD185 2 QO Valve Driver Fl Q lon Source FI Q Front Panel Controller RT400 5x20mm T4A 4A 250V AC Cooper Bussmann S505 4A Turbo Controller F2 NOTE Only a qualified technician should replace circuit breakers and fuses Use only circuit breakers and fuses of the same type and rating 25 4 VS Series Helium Mass Spectrometer Leak Detector 25 1 Daily Maintenance 25 1 1 Sensitivity Check To perform a sensitivity check 1 2 Turn on the Std Leak in the Control Panel screen Compare the value on the Home screen to the value of the known calibrated leak on the Internal Calibrated Leak screen If the values do not match press Calibrate on the Control Panel screen to perform an automated calibration and then repeat step 1 If specification is still not met Manual Tuning may be required 25 2 Dry Nitrogen Vent You may want to vent the leak detector test port with dry nitrogen when the system is vented Venting with dry nitrogen can be helpful
128. lt 1 0E 03 TORR Changes during the procedure Display only SPECTROMETER PRESSURE 1 0E 06 TORR a Figure 24 2 Gauge Calibration Test Port Vacuum Calibrates the thermocouple gauge zero value Do this at or below 1E 4 Torr Test Port ATM Sets the thermocouple atmospheric value Perform this operation only when the test port is at atmosphere Test Port Pressure and The Test Port Pressure and the Spectrometer Pressure values appear Spectrometer Pressure on this screen for reference 24 4 VS Series Helium Mass Spectrometer Leak Detector Test Port Pressure Calibrates the test port pressure thermocouple gauge Perform both Gauge Calibration the Vacuum and Atmospheric Calibration procedures in the order Procedure written TEST PORT VACUUM and the TEST PORT ATM NOTE Display of lt 1 0E 03 indicates the pressure is less than the lowest displayable pressure of the TC gauge which is 1 0E 03 24 2 1 Vacuum Low Pressure Calibration To perform Vacuum Calibration 1 Verify that the leak detector is in the System Ready condition and that a test port cap is in place 2 If the system is not already in Vent mode press VENT 3 Press Test and verify that the leak detector transfers to Fine Test mode displaying 10 atm cc sec or lower 4 Wait approximately 5 minutes for the vacuum system pressure to stabilize 5 Press Test Port Vacuum You will receive one of the following messages Q A Cal OK indicator
129. meter Leak Detectors WARNING A CAUTION Power and Static Sensitivity WARNING A CAUTION The Wireless Remote complies with Part 15 of the FCC Rules Operation is subject to the following two conditions 1 This device may not cause harmful interference and 2 This device must accept any interference received including interference that may cause undesired operation To satisfy FCC RF exposure requirements for mobile type transmit ting devices maintain a separation distance of 20 cm or more between the antenna of the Wireless Remote and persons during operation with exception of hands wrist feet and ankles To ensure compliance operations at closer distance than this distance are prohibited Maintain a separation distance of 20 cm or more between the oper ator and the RF antenna of the VS Series leak detector with a wire less base station Use only approved type of antennas for O Wireless Remote Centurion Model WCP2400 MMCX2 www centurion com Q VS Series Leak Detector Wireless Base Station Nearson Model 181FL 5 RMM 2450S www nearson com Depending on the unit configuration ordered the mains power supply requirements for VS Series leak detectors are Q 100 VAC 50 Hz 20 A Q 115 VAC 60 Hz 20 A or QO 230 VAC 50 60 Hz 12 A Before powering the unit for the first time verify that the unit is configured to operate for the local mains supply voltage Use surge protection to improve th
130. millitorr Example 1 5E 02 INIT 4REJECT INIT AREJECT Same as INIT 1 REJECT but for the Audio Reject Set Point HIGH xREJECT Sets the reject set point to activate when the actual test value is higher than the set point Where x is a number from 1 to 4 or the letter A For example the reject set point is set for 7 0E 05 and the actual test value is 9 2E 05 LOW xREJECT Sets the reject set point to activate when the actual test value is lower than the set point Where x is a number from 1 to 4 or the letter A For example the reject set point is set for 7 0E 05 and the actual test value is 4 3E 07 A 9 VS Series Helium Mass Spectrometer Leak Detectors Table A 2 Non Volatile Operating Parameters Continued Command Parameter INIT ROUGH Sets the Auto Sequencer rough time in seconds Preceded by XX INIT SYSLEAK Sets the split flow leak value system must be in TEST and the split flow feature must be OFF when this parameter is set Preceded by a two digit leak rate mantissa with a decimal point after the first digit followed by E and then by a two digit leak range exponent the helium leak rate number in atm cc sec Example 3 4E 08 INIT SYSLEAK INIT STDLEAK Sets the value of the internal leak Preceded by a two digit leak rate mantissa with a decimal point after the first digit followed by E and then by a two digit leak range exponent the helium leak rate number in atm cc sec Example 3 2E
131. mp Fan Replacement HR DOS ONIY ER 19 1 19 1_Installation Procedure EE 19 1 19 1 1 Equipment Repdtegl e gugekkebe ease SNE ERR KENEEENEe ENEE 19 1 Section 20 Clippard Valve Replacement PDOS Du WEE 20 1 20 1 Installation Procedure TE 20 1 20 1 1 Equipment Required ass eege Eege EE Seege 20 1 Section 21 Exhaust Valve Replacement P DOS EE 21 1 21 1 Installation ee TEE 21 1 21 1 1 Equipment Required E 21 1 Section 22 Diaphragm Pump Replacement PDO3 only ssssssssssssessssrnsssrrrnerrsnersrrnsssrrrnsrrrnnerrrnee 22 1 22 1 ANStAMAtON See TEE 22 1 22 1 1 Equipment Required EE 22 1 Section 23 Diaphragm and Seal Replacement PDO3 only eceeeeeeeeeeeeeeeeeeeeeeeeeeeeeeetteeeeeeeee 23 1 23 1 Installation Geier EEN 23 1 23 1 1 Equipment Required E 23 1 Section 24 Manual Tuning Calibration Maintenance Screen and Fore Pump Set Up 24 1 24 1 Manual TUNNG EE 24 1 24 2 Gauge Calibration EE 24 4 24 2 1 Vacuum Low Pressure Calibration 222 osctcncevtececbapentGiceegs schon ad leider cna 24 5 24 2 2 Atmospheric Calibration EE 24 5 24 3 Maintenance Screen aeaiia perea ea sane ka E AE ae AEE rE EEEa ARTOAK ep R E Ea 24 6 24 3 1 Cal Leak Expiration GetrUp ee 24 8 24 4 FoOre PUMP Set UP oinaan desen Aer kEkes kee NN A eE A A Ee EES Kee 24 9 24 AA DATS Serviced ME 24 10 la 25 1 25 1 Daily Maintenanee sienne inanin aaea ea ae EREECHEN EEN H a Naaiers 25 5 25 1 1 Sensitivity Checken a T Ee N 25 5 25 2 RE geen E EE 25 5 e Pa
132. mp Removal WEEN D 2 Board Locations D 3 Valve Driver and Turbo Controller Boards cccccceceeccecceeeeeeeeseneeceeeeeeeeesaeueeeeeeeeeeeneneans D 5 Valve Block Exploded EE D 6 Val KEE D 7 Valve Block Spectrometer Exploded View EE D 7 VS Series Helium Mass Spectrometer Leak Detector D 8 D 9 D 10 D 11 D 12 D 13 E 1 Screws Exploded EE D 9 Washer Alignment and Pattern iiscecciicsinetee cacseestedeais ladeeseten ceuelediedeveneed REESEN dE EEN D 9 Spectrometer lon Source Assembly AAA D 10 Spectrometer Header Decomposition EE D 10 Pre Amp Board Measurement Points eeeeeeceecceee ee ee eeeeeeeeeeeeeeeeseeeeeaeeeeeeeeeseneneaee D 11 lon Source Board Measurement Pot D 15 Interconnection Re TE EE Ei xiii VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Tables 1 1 1 2 25 1 25 2 25 3 25 4 25 5 A 1 A 2 A 3 A 4 A 6 B 1 B 2 D 1 VS Series Leak Detector Configurations and Part Number 1 2 Screens General Description visas icsceceadsesncerenneccchcgeistecsaneclannensinceetetensehdes dived EENEEEE SENG 1 8 Scheduled MAINTAIN COs agent daansdeseperssuhenssuusteneents tovdenuyabseeiededte neat teases 25 3 As Required Maintenance ic sccscsedeecaterisuce ENNEN EEEENEAEE RENE ENER 25 3 FUSES and Reg EE 25 4 Leak Detector Spare E EE 25 6 Leak Detector Accessory ltem LiSt cc cuca niancthn qe h
133. nal Failures Main Power switch trips on power up Causes Resolutions 1 Foreline pump failure MR15 and MD30 models only a Disconnect the foreline pump power cord from the back of the leak detector b Power up the leak detector and confirm the power switch does not trip If it does not trip Replace the foreline pump due to a seizure or motor failure 2 24 V power supply failure all models a Remove leak detector covers and disconnect power cable b Disconnect the AC input to the 24 VDC power supply Figure D 1 S D BC CH cop CH Ka ke J Figure D 1 VS Series Power and Communications Panel c Power up the leak detector and confirm the power switch does not trip D 1 VS Series Helium Mass Spectrometer Leak Detector 6 A vacuum pump breaker trips at startup Causes Resolutions 1 Operating temperature is less than 10 C 50 F Mechanical pump oil is cold causing the motor to draw more current during power up Q Place the leak detector PRO2 in a warmer environment gt 10 C 50 F for one hour preferably 22 C 72 F 2 Defective mechanical pump DS42 only Q Replace the mechanical pump Figure D 2 Refer to Section 6 Turbo Molecular Pump and Roughing Foreline Pumps for the correct procedure 3 Defective scroll pump IDP 3 PD03 model See Section 18 Scroll Pump Replacement PDO3 only DS42 Mechanical Pump Figure D 2 DS42 Mechanical Pump Removal D 2 VS
134. nce of the coil coil resistance 10 Ohms To attach the spectrometer to the turbo pump the torque sequence is O Finger tight all hardware in place Q Torque hardware pattern to 6 2 N m 55 in lb O Re torque hardware pattern to 12 4 N m 110 in Ib Q Wait 5 minutes and re torque hardware pattern to 12 4 N m 110 in lb O Re torque to 12 4 N m 110 in lb three times at 5 minute intervals d Reconnect the V1 plug and verify operation listen for activation by toggling the foreline valve from the Manual Valve Control screen 3 Valve Driver board failure a Press Test or Vent to verify correct operation b Select the Manual Valve Control screen toggle the individual valves and verify activation c Ensure the 24 V and communication cable between the valve driver PCB and motherboard are secure Figure D 4 VS Series Helium Mass Spectrometer Leak Detector Valve Driver Board Turbo Controller Board Figure D 4 Valve Driver and Turbo Controller Boards Remove the connectors from V1 and V2 and place the V2 connector on V1 Figure D 5 Open the Manual Tuning screen and toggle Contraflow on Verify that the turbo RPM is increasing and ramps up to 69960 and return to the Home screen and verify the System Pressure Wait message is gone V1 valve channel is defective replace PCB Figure D 4 on page D 5 D 5 VS Series Helium Mass Spectrometer Leak Detector D 6 i V2 CF n V1 Foreline j
135. nd 5725 5850 MHz USA CAN IC Radio Standard Specification RSS 210 Issue 5 for Low Power License ExemptRadio comm unication Devices of Industry Canada ovember2 001 Canada EM Cand Radio Spectrum Matters N 300 328 1 V1 3 1 2001 12 Electromagnetic compatibility and Radio spectrum M atters ERM W iband Tran sm ission systems D ata transmitting equipmentoperating in the 2 4 GHz ISM band and using spread spectrum modu lation techniques Part 1 Technical characteristics and test conditions EU N 300 328 2 V1 2 1 2001 12 Electromagnetic compatibility and Radio spectrum M atters ERM W iband Transm ission systems Data transmitting equipm entoperating in the 2 4 GHz ISM band and using spread spectrum modu lation techniques Part 2 Harmonized EN covering essential requirements under article 3 2 of R amp TTE Directive EU N 301 489 1 V1 3 1 2001 09 Electromagnetic compatibility and Radio spectrum M atters ERM Electromagnetic Compatibility EM C standard for radio equip mentand services Part1 Common Technical requirements EU N 301489 17V1 1 1 2001 09 Electrom agnetic compatibility and Radio spectrum M atters ERM Electrom agnetic Com p atib ility EMC standard for radio equip mentand services Part 17 Specific conditions for Wideband dataand HIPERLAN equipment EU per the provisions of the Radio and Telecommunications Terminal Equipment R amp TTE Directive 1999 5 EC of 9 March 1999 The authorized representative loca
136. nd a wireless remote control option is shown in Figure 1 6 Figure 1 6 VS Series Rear Panel Serial Connector A 9 pin male D type connector to interface with an external PC via RS 232 type communications protocol for system diagnostic or control A detailed summary of information related to serial communication is provided in Appendix A Communications Protocol on page A 1 Cover Plate Access to expansion slot This is not used when an optional I O PCB is installed A rear panel of the optional I O PCB is shown in Figure 1 7 on page 1 11 VS Series Helium Mass Spectrometer Leak Detectors Power Entry Module Fore Pump Power Connection Analog Output Chassis Earth Terminal Product Label RF Antenna Exhaust Cover M Oil Level Cover on Oil Drain Cover Test Port 2 Wheel Cart Wireless Label Provides supply power overcurrent and EMI protection for the leak detector The Power Entry Module consists of Q Power Input Connector An IEC EN60320 C20 standard three prong grounded Inlet connector Q Power Switch I O A 20A rocker type Power Switch Thermal Circuit Breaker O 20 A EMC line filter An IEC EN60320 C19 standard three prong grounded outlet connector Banana type output connector for an Isolated Leak Rate Analog reading The Red connector is a signal positive terminal black is the signal negative terminal Signal range From 0 to 10 VDC Provided for additional co
137. ng calibrated leak or the leak rate value was incorrectly entered a Open the Calibration Set Up screen and verify that the correct calibrated leak is selected Select Setup Menu gt Maintenance Option gt Internal Calibrated Leak and verify that the programmed parameters match the calibration certificate or physically check the information on the label for the internal standard leak Figure D 5 on page D 6 2 Internal or external calibrated leak is damaged destroyed If the Q Internal full calibration failed try calibrating to an external calibrated leak VS Series Helium Mass Spectrometer Leak Detector Q External calibration is successful turn on the internal calibrated to validate the leak rate and vice versa 3 Calibrated leak valve or valve driver board is defective Q Verify that the valve error symbol is present If Q Yes Measure the resistance of V6 resistance 115 Ohms It shorted or open replace V6 Figure D 5 on page D 6 O No Open the Manual Valve screen and toggle the standard leak valve and listen for activation H activation is not heard check the connection between V6 and its valve 4 Filament failure not generating enough electrons for proper ionization to occur Q Switch filaments and re calibrate and if the second filament fails inspect the ion source and filaments and replace Figure D 11 on page D 10 See Section 10 Filament Replacement Q Measure the voltage with respec
138. nnection of the leak detector to the building grounding system to improve ESD protection A product label with part number serial number and rating infor mation A swirl 2 4 GHz antenna for the optional Wireless Remote Control Standard USB connector Exhaust opening for a VS PRO2 model Oil level window for a VS PRO2 model Oil drain opening for a VS PRO2 model Test port adapter not shown 2 wheel cart for an external fore pump not shown A wireless info label for VS leak detector with an optional Wireless Remote Control A rear panel for the optional I O PCB assembly is shown in Figure 1 7 Figure 1 7 Optional I O PCB Rear Panel USB A1 USB 1 1 full speed downstream port USB type A receptacle VS Series Helium Mass Spectrometer Leak Detectors USB A2 USB B UO Connector USB 1 1 full speed downstream port USB type A receptacle USB 1 1 full speed upstream port USB type B receptacle A 25 pin female D sub connector to interface with an external PLC via a parallel cable Inputs Q Four level inputs optically isolated 5 to 24 VDC Q Four momentary inputs optically isolated 5 to 24 VDC requires 200 ms pulse width All inputs are opto isolator LEDs with a series 3300 Ohm resistor Outputs Q Eight optically isolated emitter followers with a 10 Ohm series resistor 14 mA max drive current 24VDC max Power Q An external power supply is supplied by th
139. ns GE 25 6 25 4 Leak Detector Accessory ltem EE 25 7 Section 26 Leak Checking for Reliability AAA 26 1 26 1 General Suggestions for Leak Checking AE 26 1 A t Protocol RS 232 EE A 1 A 2 Communicating with RS 232 5 sco caetssecteepatanivet spend heae this lencessaneld as deleaehivcen dt dewaecioneeneye A 2 A 2 1 Windows HyperTerminal Set Up Instructions cccccceeeeeseeeeeeeeeeeeeeeeeeeeeestaeeeeeeaas A 2 A 2 2 Printing with HyperTerminal EE A 4 A 3 Customer Accessible Inputs and Outputs EE A 13 vii VS Series Helium Mass Spectrometer Leak Detector En Serial Coala Ae ME TE AA EE E E E A A 13 MET GOnMeClOr sik A E EE e A 13 C 1 Spectrometer Tube DESOriD tonic ceeds cvesds saacexeessceoceandet pedaunnes anesducncteende ue tuasiadecaevaa nennen ternen eet C 2 C 2 Printed Circuit Boards P Ns and Descriptions ssssssseeesseeessrrrsssrrrrerrnnrerenerssrrrnserrnnnet C 3 LEE GR UUR CB EE C 3 G 2 2 Motherboard PCB i oso eee es SAN e C 4 G 2 3 lon Source PCB EE C 5 Gi2 4 Valve Driver PGB negt ege e C 6 G 2 5 lurbo Controller P CE dese EE eI ee C 6 G 2 6 Front Panel Controller POB saaa a a Aaaa re a NA aena ETA CANEDA SEEE C 7 RSF El eB BEEE E xa te cytes nee casa Se ae ease eacate ech aetna cant ene C 8 C28 Temperature Sensor POB siesta oes ead ele he a Lt deena C 8 G29 Diserete IERCH ees A ege Ee A is ee ee C 9 C210 WRGHB PCB EE C 10 C2 M WROC AA Be EE C 11 D 1 Start Up and Operational Failures c c cciscessncs a
140. o not use metal tools for this task this prevents scratching of any sealing surfaces Q Wipe all O rings clean with a lint free cloth before installation to ensure that no foreign matter is present to impair the seal O Do not use grease or any other substance on O rings that will come in contact with the spectrometer Q Do not use alcohol methanol or other solvents on O rings Doing so causes deterioration and reduces their ability to hold a vacuum Q Agilent does not recommend the use of vacuum grease If applicable apply a small amount of Apiezon L grease and wipe the O rings shiny dry VS Series Helium Mass Spectrometer Leak Detectors Metal Seal Care CAUTION Equipment General WARNING A WARNING A Metal Seals must be replaced during routine maintenance or during any maintenance procedure required All fasteners must be installed and torqued per assembly procedure specifications Remove Metal Seals carefully with your fingers Do not use metal tools for this task this prevents scratching of any sealing surfaces Wear non powdered ESD safe Nitride or equivalent gloves prior to removing or replacing Metal Seals Q All Metal Seals come in clean room condition packages No cleaning is required If necessary Metal Seals can be cleaned using alcohol or methanol Wipe all Metal Seals clean with a lint free cloth before installation to ensure that no foreign matter is present to impair the seal Q Do not u
141. om the body The vacuum system vents to atmosphere as the screws are loosened Retain the socket head cap screws item 1 and the Belleville washers item 2 See line item 21 for correct orientation of the Belleville washers Figure 10 10 on page 10 6 Spectrometer Header Spectrometer Body Figure 10 4 Spectrometer Exploded View 9 Remove the metal gasket item 3 and discard Do not scratch the mating surface when removing the gasket Do not attempt to reuse the gasket Figure 10 4 10 Examine the spectrometer cavity for discolored areas If present refer to the service manual for cleaning instruction 10 3 VS Series Helium Mass Spectrometer Leak Detector 11 On a clean work surface remove the defective filament s item 4 from the spectrometer by loosening the two coupler screws Then loosen the M2 screw and washer and remove the defective filament Figure 10 5 Screw and Washer Coupler Screws Figure 10 5 Coupler Screws 12 Inspect the new filament assembly for deformation damage and flaking of the coating prior to installation Do not install if damaged 13 Insert new filament assembly into the coupler 14 Guide the ceramic against the bottom and side ribs of the ion source support block Figure 10 6 and Figure 10 7 Correct positioning of filament is critical for proper spectrometer operation Support Ribs on Ion Support Block Filament Assembly Figure 10 6 Cou
142. on Wait and System Ready within ten minutes Refer to the operator s manual if the system fails to reach the System Ready mode VS Series Helium Mass Spectrometer Leak Detector Section 24 Manual Tuning Calibration Maintenance Screen and Fore Pump Set Up 24 1 Manual Tuning 1 Press Set Up on the Menu screen to open the Set Up screen CAUTION The items configured using the Set Up sub screens significantly affect the performance of the leak detector and must only be accessed by trained service personnel Many of the values for the parameters included on the Set Up sub screens are calculated when the leak detector performs functions such as Calibrate and tuning Changing these values can cause unreliable test results 2 Press Manual Tuning on the Set Up screen and the Manual Spectrometer Tuning screen appears Figure 24 1 Use this screen to manually adjust the parameters of the ion source in the spectrometer for a maximum helium signal 0 1 2 3 4 5 6 7 8 9 10 MANUAL TUNING 0 963 EMISSION CANCEL Increments Select a value a decrements to change it ION 258 6 the selected value Accesses the ________ __ KS SA OK keypad to set Gain Sets on OFFSET uV 1126 9108 Select the FILAMENT filament for use a zm Figure 24 1 Manual Tuning 24 1 VS Series Helium Mass Spectrometer Leak Detector Emission Current Displays the value of the existing Emission current of the spectrom et
143. ont in this manual The large bar graph displays the leak rate in one of three forms Q A linear bar graph Q A logarithmic bar graph Q Both linear and logarithmic bar graphs Use the Output Control Set Up screen to change the type of bar graph that appears Over range and under range conditions are indicated using two up and down arrows on the right and left side of the bar graph respec tively The VENT button advances the leak detector to the vented state A red LED illuminates while the leak detector is in the vented state When the system is in the Vent or Hold states pressing the TEST button automatically advances the leak detector through roughing then through the various test states depending on the achievable test port pressures and leak rates A green TEST LED in the button illuminates when the leak detector is in a Test state Press the VENT button to isolate the test port from the leak detector vacuum system and vent the test port to atmosphere The red VENT LED remains lit while the leak detector is in the vented state To activate the VENT function press and hold VENT for one second VS Series Helium Mass Spectrometer Leak Detectors The leak detector operator interface functions through a series of screens which are navigated as in Figure 1 5 v MAIN SCREEN
144. or clarity some items have been omitted from views 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 10 1 Rear Cover Screws Rear Cover Screws IA fe Figure 10 1 Rear Screws 10 1 VS Series Helium Mass Spectrometer Leak Detector 4 Detach the rear plastic cover from the unit 5 Disconnect the fan cable and remove the fan assembly by unfastening two wing nuts and one M4 socket head cap screw Figure 10 2 Fan Assembly Figure 10 2 Fan Assembly CAUTION Static sensitive device ensure that personnel are properly grounded before proceeding 6 Disconnect the spectrometer ground cable the preamp signal cable and the ion source cable from the spectrometer Figure 10 3 NOTE Cables not shown for clarity Pre amp Signal Spectrometer Cable Location cover Ion Source Cable Location Ground Stud Location Figure 10 3 Cable Locations 10 2 VS Series Helium Mass Spectrometer Leak Detector 7 Using an M3 Phillips screw driver remove the spectrometer cover CAUTION Wear non powdered ESD safe Nitride or equivalent gloves not included in kit to prevent skin oils from getting on vacuum surfaces 8 Loosen screws item 1 Figure 10 4 and carefully remove the spectrometer header fr
145. ort is exposed to atmosphere Success is indicated by the normal ok response TPTCZERO Sets the current test port thermocouple reading to represent a ZREO pressure reading when the test port pressure is less than 1 0E 04 Torr Success is indicated by the normal ok response Adjusts the ion source voltage to cause a maximum response to helium Causes the leak detector to isolate and vent the test port to the atmosphere Unlocks the system so that all RS 232 commands are accessible Sets the current leak rate measurement to be 0 0 atm cc sec in the most sensitive range VS Series Helium Mass Spectrometer Leak Detectors A 3 Customer Accessible Inputs and Outputs A 3 1 Serial Connector Use the SERIAL connector on the Rear Panel to interface the VS Series leak detector to a PC via an isolated RS 232 connection Table A 5 and Figure A 1 provide details of the connection A typical connection from a 9 pin PC serial connector requires a female to female 9 pin null modem cable where pins 2 and 3 are crossed Table A 5 Serial Connector Summary EIA Name Description Received Data Data into the leak detector Transmit Data Data out of the leak detector Signal Common RS 232 Ground Figure A 1 Serial Connector Map A 3 2 I O Connector Table A 6 lists the optional discrete I O PCB P N R2111501 pin signals This I O connector provides a means for a controller usually a PLC to control or to d
146. our Phillips head screws and spacers on the corners of the board Figure 5 10 10 Reconnect the QO P1 cable OI PI J1 cable from position J1 and unscrew the red black ground from the lower left 11 Reinstall the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 5 11 12 Using an extended length M5 Allen wrench reinstall the four screws holding the rear plastic cover Figure 5 11 VS Series Helium Mass Spectrometer Leak Detector 5 4 Mother Board To replace this board 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 5 11 and detach the rear plastic cover from the unit Front Cover Screws Rear Cover Screws Figure 5 13 Rear and Front Cover Screws 4 Remove the right board as per Section 5 2 CPU Board on page 5 7 5 Remove the left board as per Section 5 3 lon Source Board on page 5 9 VS Series Helium Mass Spectrometer Leak Detector 6 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 5 14 Mounting
147. p board and re measure the electrometer output If the large voltage reading 500mV to 11 VDC is still present in the absence of the ion source high voltage and the filament voltage the electrometer is defective Replace the spectrometer header assembly or the entire spectrometer assembly 2 Defective Pre Amp board A D converter corrupted a Place the leak detector in Hold or Vent b On the Pre Amp board measure the voltage with a DMM the pin labeled OUT electrometer output with reference to ground Q Confirm that the electrometer output is approximately between 20 to 20mV DC QO Place the leak detector in Test and activate the internal standard leak O Verify that the electrometer output is approximately between 20 to 100mV O Attempt another full internal calibration If the calibration aborts to an Offset Fault condition go into the Manual Tuning screen and observe the first Offset reading The Offset reading should be between 20000 to 20000 uV for a normal operating Pre Amp board VS Series Helium Mass Spectrometer Leak Detector c Replace the Pre Amp board or Spectrometer Header assembly if the observed Offset reading is abnormally higher ex 1000000 to 10000000 uV than what was measured above High Background error message and a flashing C appear on the front panel display after a calibration attempt Causes Resolutions 1 Helium background is gt 1E 5 std cc sec He in Test ContraFlow or E 7std c
148. p rail Figure 5 16 and gently rock the assembly forward M4 mounting screws Figure 5 16 M4 Mounting Screws 5 14 VS Series Helium Mass Spectrometer Leak Detector 6 Unscrew the four Phillips screws The spacers between the board and the backplate loosen as well remove them Figure 5 17 Mounting screws Figure 5 17 Valve Driver Board Mounting Screws 7 Disconnect the O 24 VDC connector at J2 R2124301 QO Valve driver cables 2 at J3 and J4 R2431301 and R2432301 O Gray RS 232 cable R2130301 NOTE Take care with cable bundle on the back of the board The white clip opens so the cable can be temporarily moved to access the board 8 Remove the board 9 Place the new board with the spacers into the location 10 Replace and tighten the four Phillips head screws and spacers on the corners of the board 11 Reconnect the Q 24 VDC connector at J2 R2124301 Q Valve driver cables 2 at J3 and J4 R2431301 and R2432301 O Gray RS 232 cable R2130301 12 Reinstall the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 5 11 13 Using an extended length M5 Allen wrench reinstall the four screws holding the rear plastic cover Figure 5 11 5 15 VS Series Helium Mass Spectrometer Leak Detector 5 6 Turbo Controller Board To replace this board 1
149. pectrometer Figure D 4 on page D 5 from the turbo and see if the turbo spins freely If not replace turbo NOTE Install the turbo pump using a new metal gasket and follow torque requirement instructions 6 Turbo Controller board failure a Verify that the red turbo symbol appears on the Home screen b Open the Manual Valve Control screen and ensure that the turbo RPM 0 and the bearing temperature 255 C 491 F c Verify that the power cable is connected to the turbo and that 24 VDC is present at the turbo controller board If all connections are secure replace the turbo controller board Figure D 4 on page D 5 d Open the Manual Valve Control screen and ensure that the turbo RPM 0 and the bearing temperature OC 32 F Ensure that the RS 232 cable is secure at the turbo controller board and motherboard If the RS 232 cable is secure replace the turbo controller board If the replacement turbo controller board does not solve the communication problem there is a chance that the RS 232 cable is defective or that the communication port on the motherboard is not working replace the motherboard Figure D 3 on page D 3 7 Gross leak in vacuum system Q Ensure that the foreline connection bellows between the foreline pump and valve block are properly attached and free of cracks and fractures If not replace these Spec Tube message error appears on the front panel display This error can also occur during normal oper
150. pler and Filament Assembly 10 4 VS Series Helium Mass Spectrometer Leak Detector 15 While holding the filament in position insert the M2 screw and washer and tighten Figure 10 7 16 Tighten the coupler screws onto the filament posts Figure 10 7 Filament Post M2 screw and Washer Ceramic position Filament position see figure 8 Coupler Screw Figure 10 7 Filament Position 17 Verify ceramic is tight against the bottom and right side ribs Ensure that the filament is positioned in the slot of the ion source as shown Figure 10 7 and Figure 10 8 Repeller plate edge Center line of filament should line up with the edge of the repeller plate Figure 10 8 Filament Alignment 18 Clean the mating surfaces of the spectrometer body and header with Isopropyl alcohol and a clean lint free wipe NOTE Agilent recommends that you use the Vac u solv spectrometer cleaning kit PN 670029096 19 Center replacement metal gasket inside the bolt pattern and outside of the body cavity To prevent scratching of any sealing surface do not use metal tools for this task 10 5 VS Series Helium Mass Spectrometer Leak Detector 20 Guide the spectrometer header into pocket with the detector housing closest to the inlet Figure 10 9 Metal Gasket Detector housing Figure 10 9 Figure 9 Spectrometer Alignment 21 Insert a screw with three Belleville washers into each hole and fin
151. port settings are correct Ensure that the Settings tab is configured as follows Terminal keys radio button selected Ctrl H radio button selected Auto detect selected from the Emulation pull down list ANSI entered in the Telnet terminal ID COvoovo wv 500 set in the Background buffer lines field _ Click ASCII Set Up The ASCII Set Up dialog box appears Ensure that the settings are as follows O Line delay 0 milliseconds Q Character delay 0 milliseconds Q ASCII Receiving Wrap lines that exceed terminal width The cursor begins blinking Type some simple commands Q LEAK Q ALL Q SETUP A 3 VS Series Helium Mass Spectrometer Leak Detectors A 2 2 Printing with HyperTerminal A 4 The easiest way to print information captured in HyperTerminal is to choose Print from the File menu however this method only prints information currently displayed on the screen Screen information can also be highlighted copied and pasted into Microsoft Word or Excel To capture large amounts of data that exceeds the terminal screen limits use the Transfer menu Capture Text option 1 Select Transfer gt Capture text The Capture text dialog box appears 2 Click Browse The Select Capture File dialog box appears 3 Navigate to a location enter a file name and select a file type Q txt text file Notepad a doc Word OI xis Excel 4 Click Save The Capture Text dialog box reapp
152. r damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being returned under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION
153. r gives the replacement procedures for the VS Series electronics Refer to Appendix D Troubleshooting for diagnostics to determine when to replace various boards and flow control modules Refer to Appendix E Interconnection Diagram for a diagram showing the electronics interconnections 5 5 1 Equipment Required O Extended Length M5 Allen Wrench QO M5 Allen Wrench Q Phillips Screw Driver QO Slotted Screw Driver 5 1 User Interface To replace the user interface 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 5 1 and detach the rear plastic cover from the unit 4 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 5 1 5 1 VS Series Helium Mass Spectrometer Leak Detector Front Cover Screws Rear Cover Screws Figure 5 1 Rear and Front Cover Screws 5 Remove the user interface front cover using an Allen wrench to loosen the M4 screw at the bottom front of the plate Figure 5 2 Figure 5 2 User Interface Plate Mounting Screw 6 Gently rock the metal interface panel up and out 5 2 VS Series Helium Mass Spectrometer Leak Detector 7 Disconnect the speaker
154. r high vacuum via any leaks in the unit under test UUT which is connected to the test port Separates helium from all other gas ions detects helium and total gas pressures as currents Converts the helium current into voltage with amplification The VS Series leak detector spectrometer tube is a stand alone unit comprised of five sections C 2 Spectrometer tube body with magnets lon source with two filaments section Electro magnetic ion lenses Electrometer section for the partial helium pressure signal Collector plate for the total pressure signal VS Series Helium Mass Spectrometer Leak Detector C 2 Printed Circuit Boards P Ns and Descriptions This section describes the following circuit boards EC O0 O0 0 0 0 0 UU U Section C 2 1 CPU PCB Appendix C 2 2 Motherboard PCB on page C 4 Appendix C 2 3 lon Source PCB on page C 5 Appendix C 2 4 Valve Driver PCB on page C 6 Appendix C 2 5 Turbo Controller PCB on page C 6 Appendix C 2 6 Front Panel Controller PCB on page C 7 Appendix C 2 7 Pre Amp PCB on page C 8 Appendix C 2 8 Temperature Sensor PCB on page C 8 Appendix C 2 9 Discrete I O PCB on page C 9 Appendix C 2 10 WRC B PCB on page C 10 Appendix C 2 11 WRC HH PCB on page C 11 C 2 1 CPU PCB The CPU PCB Agilent P N R2362303 is a modified version of a PC104 based single board Computer that functions as an embedded PC in the VS Series leak
155. r metal seals that will come in contact with the spectrometer If the spectrometer magnet comes in contact with a magnetic surface the magnet can become degraded causing the spectrometer to lose sensitivity To avoid injury use proper lifting techniques when moving pumps Two people may be required to move pumps safely The vacuum pumps are also compressors incorrect operation may be dangerous Study the Mechanical Pump Operation Manual enclosed with your pump before starting pumps The pumps are designed to prevent any thermal risk for user safety However specific operating conditions may generate temperatures gt 70 C Hot oil burns the skin Service of the pumps in this area must be performed by authorized personnel only Stand back from a mechanical pump before starting it VS Series Helium Mass Spectrometer Leak Detectors WARNING To avoid injury wait until the turbo pump is completely stopped before disconnecting it from the vacuum system To vent the turbo open the knurled vent screw located on the side of the turbo If the turbo is spinning you will hear it wind down Close the vent screw after the turbo has stopped CAUTION Check the oil level often Do not allow oil based mechanical pumps to run when the oil level is below the LOW mark Damage to pumps can occur if operated with no oil if the oil level is too high or if the oil has become discolored Agilent Services Agilent offers Rebuilt spectrometer
156. r polycarbonate gloves to prevent skin oils from getting on vacuum surfaces Agilent does not recommend the use of vacuum grease Vacuum grease absorbs helium tracer gas and releases this slowly resulting in helium background during leak test operations If it must be used use it sparingly and avoid silicone types Apiezon L grease is recommended Agilent Part No 695400004 XX VS Series Helium Mass Spectrometer Leak Detectors O ring Care xxi When removing checking or replacing O rings keep in mind the following NOTE NOTE CAUTION Agilent recommends replacing all O rings during routine maintenance or during any maintenance procedure requiring that O rings be removed Due to the effective cleaning nature of VacuSolv solvent and its residue free properties Agilent Component and Spectrometer Cleaning Kit Part Number 670029096 used in accordance with the kit instructions is recommended for cleaning spectrometer components The kit can also be used for fine cleaning of other parts in the leak detector s vacuum system such as valves and fittings No rinsing steps or high temperature drying are required following cleaning with VacuSolv Although appropriate precautions are advised VacuSolv is compatible with most materials and does not contain toxic chemicals or CFCs chlorofluorocarbons Other acceptable solvents are isopropyl alcohol IPA or Dow Corning OS 20 Remove O rings carefully with your fingers D
157. rance Agilent Technologies Vacuum Products Division 7 avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex FRANCE Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Germany amp Austria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt GERMANY Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 QUALITY SYSTEM oecrerserese so ZS RAAPS AL MARA SIM yl SVS IRTO 14001 India Agilent Technologies Vacuum Product Division 205 A A wing of Galleria 2nd floor Hiranandani Gardens Powai Mumbai 400 076 India Tel 91 22 2570 8595 8597 Fax 91 22 2570 8599 Italy Agilent Technologies Vacuum Products Division via F lli Varian 54 10040 Leini Torino ITALY Tel 39 011 997 9111 Toll Free 00 800 234 234 00 Fax 39 011 997 9350 Japan Agilent Technologies Vacuum Products Division Sumitomo Shibaura Building 4 16 36 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 JAPAN Tel 81 3 5232 1253 Toll Free 0120 655 040 Fax 81 3 5232 1710 Korea Agilent Technologies Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul KOREA 135 280 Tel 82 2 3452 2452 Toll Free 080 222 2452 Fax 82 2 3452 2451 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 MEXICO D F Tel 52 5 523 9465 Fax 52 5 523 9472 Agilent Technologi
158. ration errors see Table D 2 VS Series Helium Mass Spectrometer Leak Detector Table D 2 Range Stop Sensitivity Requirements 5 00E 12 5 00E 12 5 Q0E 11 5 00E 10 5 00E 09 There are guidelines for activating or setting the Range Stop or Manual Range after a Gain Too High error condition occurs Q When a calibration is complete and the gain has been calculated and the correct Range Stop has been applied the Range Stop value cannot be lowered example changing E 8 to E 9 The out of range symbol lt gt appears thus not allowing the change Q Once the Range Stop has been activated it cannot be deactivated The lock symbol appears on the front display Q De activating the Range Stop can be achieved if spectrometer maintenance has been performed for example changing the filaments or ion source Perform a full internal calibration Once the calculated gain lt 6 9 after a full calibration procedure the Range Stop can be turned off Q Manual Range Gain Too High Q De activate Manual Range OQ Select the desired Range Stop and activate if it less than the previous Manual Range value See Table D 2 Q Re calibrate Q Calibration successful activate Manual Range NOTE The Manual Range value cannot be lower than the Range Stop value allowed by the max gain The out of range symbol lt gt appears thus not allowing the change VS Series Helium Mass Spectrometer Leak Detector
159. rbo pumps H Figure 14 18 Vent Valve 14 11 VS Series Helium Mass Spectrometer Leak Detector 14 12 36 37 38 39 40 41 42 43 Attach the fan assembly Figure 14 2 on page 14 2 by fastening two wing nuts and one M4 socket head cap screw Then connect the fan cable to the unit Leak check the spectrometer to ensure a leak free joint Attach the rear cover and secure to the unit using existing hardware Power up the unit Watch the Home screen to verify that the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes Refer to the user manual if the system fails to reach the System Ready mode The filament emission current normally operates at 0 8mA Use the display menus MENUS SET UP MANUAL TUNING EMISSION to set the emission to 8 mA NOTE Agilent recommends that you wait a minimum of 30 minutes for the vacuum system to clean up to obtain optimum calibration Calibrate the system per the user manual For proper operation the system must be calibrated after opening the spectrometer or changing a filament If the system fails calibration adjust the filament emission current as follows Q If gain is too low there is too much signal reduce emission current by 0 1 0 2mA then calibrate again O If gain is too high there is too little signal increase emission then calibrate again The permitted emission current range is from 0 5 to 1 5 mA
160. reless Base PCB Microprocessor CPU control of the two UART color TFT LCD Display Touch and Front Panels LCD brightness and audio volume PWM output for an audio circuitry USB device functionality and temperature control Power amplification for the audio control CPLD control signal generation 24 VDC to 3 3 VDC 12 VDC and 1 8 VDC conversion Q 24 VDC to 600 VAC conversion for a CCFL backlight of the LCD display The Front Panel Controller PCB circuitry resides on a stand alone PCB comprised of nine sections m m Q CPU and memory SDRAM and Flash section Isolated I O RS 232 interface section UART1 with a RJ45 8x8 connector J303 Non isolated I O RS 232 interface section UART2 with a DB9 female connector P300 O USB device section with a USB B type connector J302 Q CPLD section with a 6 pin overlay connector J503 and 14 pin CPLD JTAG connector J500 Q Audio amplifier section with a 2 pin speaker connector J501 Q TIET LCD and Touch Panel interface section with a 33 pin display connector J602 4 pin touch panel connector J601 and 20 pin debug connector P602 Power supply section with 3 pin power connector J401 and 5 pin backlight connector J400 DC AC daughter PCB with high voltage AC connector CN2 C 7 VS Series Helium Mass Spectrometer Leak Detector C 2 7 Pre Amp PCB The Pre Amp PCB Agilent P N R2107301 functions as an ADC converter for the spectrometer tube helium and tota
161. reless Remote Base circuitry resides on a stand alone PCB comprised of five sections Q Isolated RS 232 serial interface and V F converter with a 9 pin DB9 female type connector P300 Serial parallel interface with 20 pin connector J2 3 pin jumpers J4 J6 J8 and J9 and 10 pin connector J4 RF module with 20 pin interface connector and RF MMCX type connector LU UU wv Power supply section with 3 pin connector J401 VS Series Helium Mass Spectrometer Leak Detector C 2 11 WRC_HH PCB The Wireless Remote HH PCB Agilent P N R2544301 circuitry provides Q Local microprocessor for parallel communication with the RF 2 5GHz module keypad LCD Display and backlight LED RS 232 serial interface for software programming Leak rate audio indication Battery voltage to 5 VDC and 3 3 VDC conversion Ooo LU RF output for communication with an omni directional dipole antenna via a coax cable The Wireless Remote HH PCB circuitry resides on a stand alone PCB comprised of five sections Q Microcontroller Section with a BDM 10 pin connector J4 Keypad interface section with a 14 pin connector J3 LCD display section Audio section with a 2 pin speaker connector and 3 pin audio jack connector J7 Power supply section VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Appendix D Troubleshooting D 1 Start Up and Operatio
162. rning or holding the cooling fan the necessary operations must be carried out by turning or holding the counterweight 16 5 Change the diaphragm by see Figure 23 2 a Turning the fan to bring the structured diaphragm 9 to top dead center b Lifting the edge of the diaphragm and gripping it on opposite sides unscrewing it by turning counterclockwise 23 2 VS Series Helium Mass Spectrometer Leak Detector CAUTION Ensure that the disc s spring 12 and diaphragm spacers 11 on the threaded portion of the diaphragm do not fall into the housing Taking the disc spring 12 diaphragm spacer s 11 and diaphragm support 10 off the threaded portion of the diaphragm and retaining them Ensuring that all parts are free from dirt and clean them if necessary Placing the diaphragm support diaphragm spacer s and disc spring in that order on the thread part of the new diaphragm The concave side of the disc spring must be towards the diaphragm Turning the fan until the connecting rod 13 is at top dead center Screwing the diaphragm complete with diaphragm support diaphragm spacer s and disc spring into the connecting rod clockwise and tightening it by hand 6 Change the valve plates by see Figure 23 2 on page 23 2 f Separating the head plate 3 from the intermediate plate 2 Removing the valve plates 7 and sealing rings 8 from the intermediate plate Checking that the valve seats in the head
163. roll pump is comprised of 1 2 3 4 Section 6 2 2 Valve Block Wiring Harness Section 6 2 3 Removing the Valve Block Assembly and Spectrometer on page 6 8 Section 6 2 4 Replacing the Turbo Pump Valve Block and Spectrometer on page 6 11 Section 6 2 5 Replacing the Valve Block Harness and Thermocouple Wiring on page 6 11 6 2 2 Valve Block Wiring Harness 6 6 The valve block wiring harness is comprised of seven three prong sensor blocks labeled V1 through V5 and V7 and the thermocouple See the wiring diagram on Appendix E Interconnection Diagram To remove the valve block wiring harness 1 2 Shut down the system using the On Off rocker switch Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 6 1 and detach the rear plastic cover from the unit VS Series Helium Mass Spectrometer Leak Detector Front Cover Screws Rear Cover Screws er AAT SES Figure 6 7 Rear and Front Cover Screws 3 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 6 1 4 Disconnect valve block harness from the valve driver board Connections are labeled P3 and P4 Or remove the valve plug or connector unscrew the Phillips head screw and remove the wires from the six three prong connector F
164. s Figure 9 1 Rear and Front Cover Screws 9 1 VS Series Helium Mass Spectrometer Leak Detector 4 Disconnect the speaker black SPK2 and red spade connections SPK1 Figure 9 2 NOTE The speaker connects to the J50 connector on the Front Panel board 5 Use a nut driver to loosen and remove the four M3 screws in the speaker corners Figure 9 2 Remove the plastic protective shell and place it aside Figure 9 2 Speaker Nuts and Wiring 6 Mount the replacement speaker and plastic shield using the four M3 screws and washers 7 Replace the black and red spade connections 8 Reinstall the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 9 1 on page 9 1 9 Using an extended length M5 Allen wrench reinstall the four screws holding the rear plastic cover Figure 9 1 on page 9 1 9 2 VS Series Helium Mass Spectrometer Leak Detector Section 10 Filament Replacement 10 1 Installation Procedure 10 1 1 Equipment Required Q Filament Service Kit PN VSFLDFR Extended Length M5 Allen Wrench Metric Allen Wrench Set Needle nose pliers or tweezer M3 Phillips Head Screw Driver 1 5 mm Hex Driver 5 mm Hex Driver Torque Wrench must be adjustable to 40 in lbs 4 5 N m and 90 in lbs 10 2 N m COvuvvoovo UU U Digital Multimeter Fluke 187 or equivalent F
165. s VS MR15 VS MD30 VS BR15 and VS BD30 spectrometer tube valve block leak detector electronics an operator interface TFT LCD display with a touch panel and two hard buttons TEST and VENT and optional features including Q Wireless remote control that is includes Q Wireless Base PCB P N R2541301 installed in a VS leak detector Q Wireless Remote unit P N R3000301 Q Optional I O PCB P N R2111301 Both models VS MR15x and VS MD30x include an optional two wheel cart All models are available in 100 115 VAC and 230 VAC configurations see Table 1 1 on page 1 2 The wireless remote control has the following capabilities a RF communication between VS leak detector Base Station or Host and the Wireless Remote unit from the distance up to 100 m 300 ft QO Enter the VS leak detector unit into Test and Hold modes from the Wireless Remote unit keypad Q Read the VS leak detector unit s leak rate in a linear and logarithmic bar graph format with a numeric range indicator and System status in alphanumeric format on the Wireless Remote unit LCD display Q Configure up to ten different VS leak detector units for wireless control by toggling through a MAC address list using one Wireless Remote unit The optional I O PCB compromises Q Optically isolated parallel I O DB25 female connector with 12 output and 8 input lines to use with an external PLC and should be powered by the user 5 24 VDC via a cable with length
166. s not appear on the front display verify the RS 232 communication cable from the motherboard to the Valve Driver board Figure D 4 on page D 5 is secure If it is secure the Test button is defective b Defective valve driver channel Q Verify if a valve error symbol is present on the front panel display O Open the Manual Valve Control screen and toggle the Vent valve or Contra Flow Valve O Verify that the valves are heard turning off and on If this does Q Not occur replace the Valve Driver board Q Occur proceed to the next step Foreline pump failure a Blank off test port and press Test b Verify the test port pressure The pressure should go down to lt 1E 3 If no gross leak was found in step 3 replace the foreline pump I O Board enabled Q Disable the Parallel Enable signal VS Series Helium Mass Spectrometer Leak Detector Leak Detector will not go into Vent Causes Resolutions 1 Vent Lockout button active Q Open the Control Panel Access screen and verify that Vent Lockout is active Panel Lockout button active Q Open the Control Panel Access screen and verify that Panel Lockout is active Vent button front panel display button active Q Select Setup Menu gt Manual Valve Control and toggle the vent valve If leak detector vents the Vent button is defective replace the front panel Vent Valve is defective a Verify that the valve error symbol is present on the front panel display
167. s on an exchange basis NIST traceable calibrated leak testing and verification services Preventive maintenance services Overhaul services System recertification Support agreements LU UU UU LU On site support Please see our catalog or contact us to learn about available services Contacting Agilent In the United States you can contact Agilent Customer Service at 1 800 882 7426 See the back cover of this manual for a listing of our sales and service offices Visit our web site at http www chem agilent com en US Products Instruments vacuum pages default aspx xxviii VS Series Helium Mass Spectrometer Leak Detectors Tools Required for Component Replacement Each procedure lists the tools required for that component replacement Materials Required for Component Replacement O Powder free butyl or VacuSolv or similar solvent polycarbonate gloves Clean non magnetic surface Q Cotton swabs QO Lint free wipes Loctite PST 565 Thread Sealant XXix VS Series Helium Mass Spectrometer Leak Detectors This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detectors Section 1 Introduction to the VS Series Leak Detector 1 1 The VS Series Leak Detector The VS Series is a wide range Helium Mass Spectrometer Leak Detector which is comprised of a turbo molecular high vacuum pump internal mechanical rough pump model VS PRO2 and PDO3 external mechanical rough pump model
168. screws Figure 5 14 Motherboard Screw Locations 7 Disconnect the LI LU UU m Top board Q Green plug P100A at J100 on the right Q Yellow plug P100B at J100 on the left Righhand board Q Blue plug P101A at J100 on the bottom O Grey plug P101B at J100 on the top Righthand bottom board QO Red plug P101A at J302 on the top QO Black plug P101B at J302 on the bottom R2142 301 at J300 black white connection to right board White plug at J301 green white yellow White plug P200 at J200 white black red and ground to back plate Black plug P500 at J500 8 Remove the board 5 12 VS Series Helium Mass Spectrometer Leak Detector 12 13 14 16 Place the new board with the spacers into the location Replace and tighten the four Phillips head screws and spacers on the corners of the board Figure 5 14 on page 5 12 Reconnect the Q Top board Q Green plug P100A at J100 on the right Q Yellow plug P100B at J100 on the left Q Righhand board Q Blue plug P101A at J100 on the bottom Q Grey plug P101B at J100 on the top Righthand bottom board O Red plug P101A at J302 on the top QO Black plug P101B at J302 on the bottom R2142 301 at J300 black white connection to right board White plug at J301 green white yellow White plug P200 at J200 white black red and ground to back plate Black plug P500 at J500 m m Q m Reinst
169. se grease or any other substance on Metal Seals that will come in contact with the spectrometer Environment of intended use O Indoors use in an industrial and laboratory installation only Q Altitude up to 2000 m OQ POLLUTION DEGREE 2 Material group III Q Operating Temperature 12 C to 40 C Relative Humidity RH up to 90 max Q Storage ambient conditions RH from 0 to 95 non condensing temperature 20 C to 60 C Q Do not use in presence of flammable or explosive gas Q Do not attempt to disassemble or modify the equipment Such action could lead to electric shock or injury Agilent s authorized technician will do any repair work Q f there is smoke or unusual smell or noise stop the using the equipment immediately and contact the Agilent Service Center The leak detector is not designed for use with hazardous gases Verify that the system to be tested has been purged of all hazardous gases prior to using the leak detector When testing a system that contained hazardous gases connect the exhaust of the leak detector to a scrubbed or toxic containment exhaust Exposure to hazardous gases could result in serious injury or death xxii VS Series Helium Mass Spectrometer Leak Detectors WARNING Equipment tightness is guaranteed for normal operating conditions when the equipment leaves the factory It is the AN user s responsibility to maintain the level of tightness particularly when pumping
170. sing the Home screen Table 1 2 on page 1 8 lists the main sub screens and their purpose Test Port Display TEST Hard Button 4 Model Label Handle Recessed MU VM VENT Hard Button Figure 1 4 Front Panel Displays and Controls The front panel display touch panel is calibrated at the factory and should not require recalibration If the touch panel buttons do not respond to pushes recalibrate as follows 1 Turn off the leak detector power 2 Press and hold the center of the touch panel and restart power A blue screen appears 3 Press the four cross hairs on the screen and accept the calibration VS Series Helium Mass Spectrometer Leak Detectors LCD Display Leak Rate Bar Graph VENT TEST Represents Leak Rate in a Bar Graph format with a numeric range indicator O Leak Rate System Status and Parameters in alphanumeric format O Series of screens with the soft key buttons for operator interface Leak Rate System Status and Parameters in alphanumeric format Q Leak Rate is presented in a scientific notation XXE YY with appropriate units Where X X mantissa is a leak rate value E Y 10 YY exponent is a leak rate range X and Y are any numbers from 0 to 9 Q System Status and or Mode are represented on the screen in alpha format on the screen and an italic font in this manual Q Parameters are represented on the screen in alphanumeric format a bold f
171. ss Spectrometer Leak Detectors Hazard and Safety Information The common international symbols used in this manual and on the equipment are defined below O OFF Supply Power ON Supply Power AC Alternating Current Warning Risk of danger Frame or chassis Terminal Indoor Dry Location Use T Only E x D D D H Earth Ground Terminal Caution Hot Surface Caution Risk of Electrical Shock Protective Conductor Terminal Do Not Place in Trash Caution Radio Restriction Operators and service personnel must be aware of all hazards associated with this equipment They must know how to recognize hazardous and potentially hazardous conditions and know how to avoid them The consequences of unskilled improper or careless operation of the equipment can be serious Every operator or service person must read and thoroughly understand operation maintenance manuals and any additional information provided by Agilent All warning and cautions must be read carefully and strictly observed Consult local state and national agencies regarding specific requirements and regulations Address any safety operation and or maintenance questions to your nearest Agilent office xix VS Series Helium Mass Spectrometer Leak Detectors Solvents WARNING CAUTION The mechanical components of leak detectors are typically cleaned with alcohol methanol or other solvents When heated sprayed or e
172. stem body red arrow in Figure 22 3 Figure 22 3 Ground Connection 6 Disconnect the two M4 screws mounting the plate to the scroll pump assembly blue arrow in Figure 22 3 22 2 VS Series Helium Mass Spectrometer Leak Detector 7 Remove the diaphragm pump assembly turn it over and unscrew the four M2 screw holding the pump to the plate Figure 22 4 two shown Figure 22 4 Pump to Plate Connections 8 Reattach the new pump to the plate 9 Reattach the plate to the scroll pump 10 Reattach the ground and Molex connections 11 Attach the front cover and secure to the frame using existing hardware 12 Attach the rear cover and secure to the unit using existing hardware 13 Connect the power cord and power up the unit 14 Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes Refer to the operator s manual if the system fails to reach the System Ready mode 15 Agilent recommends a full calibration of the unit prior to leak test operations 22 3 VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Section 23 Diaphragm and Seal Replacement PDO3 only 23 1 Installation Procedure 23 1 1 Equipment Required Q Extended Length M5 Allen Wrench Q Metric Allen Wrench Set Q M3 Phillips Head Screw Driver LI Phillips Head Screw Driver
173. system fails to reach the System Ready mode 12 Agilent recommends a full calibration of the unit prior to leak test operations 12 3 VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Section 13 Oil Mist Eliminator Installation 13 1 Installation Instructions Equipment required QO Oil Mist Eliminator Kit Q Adjustable Wrench O Extended Length M5 Allen Wrench O Adjustable Pliers To install the unit 1 Unplug the unit from the power source 2 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover 3 Detach the rear plastic cover from the unit 4 Disconnect the hose clamp and remove the hose from the barbed fitting 5 Remove the elbow and reducer using an adjustable wrench Figure 13 1 Elbow and reducer Figure 13 1 Unit Before Install 6 Clean any particles that may be present at the pump exhaust port opening 13 1 VS Series Helium Mass Spectrometer Leak Detector 7 Install the KF 16 flange adapter provided with the leak detector using adjustable pliers Figure 13 2 l m i Figure 13 2 KF 16 Flange Adapter w Centering Ring 8 Install KF 16 centering ring the oil mist eliminator and the KF 16 quick clamp by tightening up the wing nut 9 Ensure the orientation of the barbed fitting as shown in Figure 13 2 10 Reconnect the hose to the barbed fitting
174. t 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 18 1 and detach the rear plastic cover from the unit Front Cover Screws Rear Cover Screws VE EEN Figure 18 1 Rear and Front Cover Screws 18 1 VS Series Helium Mass Spectrometer Leak Detector 4 Disconnect the NW 16 connection Figure 18 2 Figure 18 2 NW 16 Connection 5 Tilt the unit and unscrew the four connections underneath that hold the pump Figure 18 3 Place the unit flat again and remove the whole pump assembly Figure 18 3 Scroll Pump Mounting Connections 18 2 VS Series Helium Mass Spectrometer Leak Detector 6 Disconnect the exhaust hose Figure 18 4 Figure 18 4 Exhaust Hose 7 Disconnect the diaphragm fan and motor power connectors 8 Remove the fan assembly bracket and lay it aside Figure 18 5 Figure 18 5 Fan Assembly Mounts 18 3 VS Series Helium Mass Spectrometer Leak Detector 18 4 9 Unscrew the four M2 screws and remove the manifold block Figure 18 6 Figure 18 6 Manifold Block Connections 10 Remove the exhaust valve unit See Section 21 Exhaust Valve Replacement PD03 only on page 21 1 11 Remove the diaphragm pump See Section 22 Diaphragm Pump Replacement PDO3 only on page 22 1 12 Mount the new scroll pump using the four connections seen in Figure 18 3 on page
175. t Cover Screws Rear Cover Screws Figure 11 1 Rear and Front Cover Screws 4 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 11 1 NOTE Cables not shown for clarity 5 Disconnect the fan cable and remove the fan assembly by unfastening two wing nuts and one M4 socket head cap screw Figure 11 2 Fan Bracket Assembly TC Cable PCB Plug Location TC Cable Ground Stud Location Figure 11 2 Fan and TC Gauge Assemblies VS Series Helium Mass Spectrometer Leak Detector 6 Replace the TC Gauge VSFLDOG by a Disconnecting the octal connector from the TC gauge Figure 11 3 Octal Connector Ground Lug Figure 11 3 Octal Cable b Using an M4 Allen wrench to remove the TC gauge from the valve block Retain both screws and the two washers and discard the old TC Gauge and O ring c Placing the new O ring onto the replacement TC Gauge d Installing the replacement TC Gauge orientate the TC vent towards the base of the valve block 6 o clock position and loosely install existing hardware Figure 11 4 O ring position Valve block and TC vent orientation Figure 11 4 Thermocouple Gauge Orientation VS Series Helium Mass Spectrometer Leak Detector e Installing the ground lug between the washer and
176. t to filament 1 and 2 The voltage should be 88 VDC 1 if not replace ion source board 5 Contaminated ion source Q Inspect ion source and if contaminated discoloration clean ion source or replace Figure D 10 on page D 10 6 Electrometer failure spectrometer a Select Setup Menu gt Manual Tuning Note the offset reading mV if the offset reading is 1000000 1000000 perform the following Q On the J3 connector of the pre amp board Figure D 12 on page D 11 measure the voltage with respect to ground on the pin labeled OUT The voltage should be in mV DC with no leak present If the voltage reads Q 11 00 VDC remove the ion source voltage cable J1 connector on the pre amp board Figure D 12 on page D 11 and re measure the OUT pin voltage OI 11 00 VDC with no high voltage or filament voltage the electrometer is defective Replace the spectrometer header or entire spectrometer Extended Sensitivity Gain with Range Stop Manual Range The VS Series leak detector has an MDL sensitivity of 5E 12 std cc sec He when the unit ships from the factory In order to maintain this sensitivity requirement the gain calibration cannot be greater than 6 9 Q This sensitivity specification might be too stringent for end users that for example only require an E 7 to E 8 std cc sec He reject set point Activating the range stop extends the sensitivity requirements for calibration thus eliminating unnecessary calib
177. ted within Community is Agilent Inc Torino Varian S p A Via F lli Varian 54 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 John Ehmann ae Operations Manager Agilent Inc Lexington Massachusetts USA VS Series Helium Mass Spectrometer Leak Detectors Preface This manual contains information for field replacement of components of the VS Series Mass Spectrometer Helium Leak Detector It is organized so that similar items or procedures are included in a section The manual moves from a brief overview of the leak detector to specific replacement procedures to calibration and tuning procedures that must be run after the replacement of certain components Photographs are liberally used to help document procedures Various appendices provide interconnection drawings troubleshooting and parts lists Documentation Standards This manual uses the following documentation standards NOTE Notes contain important information CAUTION Cautions appear before instructions which if not followed could cause damage to the equipment or data loss WARNING Warnings appear for a particular procedure or practice which if j not followed correctly could lead to serious injury or death Hard buttons are depicted in text in bold text Text Soft key screen buttons are depicted in bold text when part of an action Italics is used for emphasis or to indicate screen text xviii VS Series Helium Ma
178. temperature to frequency conversion where a period of the output square wave 5 V TTL signal is proportional to temperature Further conversion to 16 bit digital signal is provided by a CPLD on the Motherboard PCB and sent to the CPU PCB via RS 232 port The Temperature circuitry resides on a stand alone PCB directly placed on the Standard Calibrated Leak and comprised of an TMPO3 integrated circuit and a 4 pin connector J1 VS Series Helium Mass Spectrometer Leak Detector C 2 9 Discrete I O PCB The Discrete I O PCB Agilent P N R2111301 functions as liaison between the VS Series leak detector and the external devices such as PLC and USB connected devices PC Printer External Memory and or Bar Code readers in future releases The USB section is non functional The Discrete I O PCB is under full software control provided by the CPU PCB The Discrete I O PCB circuitry provides m Local CPU and memory SDRAM and Flash for serial to parallel Address Data and Control signals conversion for the parallel I Os and embedded USB Host controllers Parallel optically isolated input 7 lines and Output 1 2 lines interface between the VS leak detector and external equipment e g PLC RS 232 Isolated Serial communication interface with the CPU PCB via the Motherboard PCB Non isolated USB interface for communication O Upstream with a Front Panel Controller PCB 1 channel Downstream with the external USB devices 2 chann
179. th VacuSolv Although appropriate precautions are advised VacuSolv is compatible with most materials and does not contain toxic chemicals or CFCs chlorofluorocarbons Other acceptable solvents are isopropyl alcohol IPA or Dow Corning OS 20 VS Series Helium Mass Spectrometer Leak Detector For simplicity the maintenance functions in this section are grouped by recommended frequency as shown in Table 25 1 based on assumed daily use Table 25 1 Scheduled Maintenance Description 12 Months Calibration check Recalibrate the internal calibrated leak Spectrometer overhaul Maintenance functions that may be required on a demand basis such as changing a filament after filament failure are listed in Table 25 2 Table 25 2 As Required Maintenance Function Most Common Symptom Spectrometer cleaning Loss of sensitivity increase in background high ion voltage gt 300 VDC high gain required to tune the leak detector Filament replacement Filament failure as soon as convenient after second filament is in use Tuning adjustments If calibration is not successful or if the system is calibrated to an external leak tuning can maximize the helium signal Mechanical pump fluid change Persistent high helium background signal Fluid contamination dirty brown color indicates burnt or contaminated fluid milky white consistency indicates high water vapor content in fluid 25 3 VS Series He
180. the EMISSION to attain the maximum value Ideally the EMISSION value should be between 0 500 and 1 000 O Set the GAIN so that the leak rate on the screen matches the value of the internal leak you wrote down Navigate to the CONTROL PANEL and turn the STD LEAK OFF 24 3 VS Series Helium Mass Spectrometer Leak Detector 24 2 Gauge Calibration 1 Press Set Up on the Menu screen to open the Set Up screen CAUTION The items configured using the Set Up sub screens significantly affect the performance of the leak detector and must only be accessed by trained service personnel Many of the values for the parameters included on the Set Up sub screens are calculated when the leak detector performs functions such as Calibrate and tuning Changing these values can cause unreliable test results 2 Press Gauge Calibration on the Set Up screen and the Gauge Calibration screen appears Figure 24 2 Use this screen to perform a calibration on the test port thermocouple gauge Calibrate the thermocouple gauge for the most accurate operation To calibrate the gauge 1 Seta calibration point at atmosphere 2 Seta calibration point at a low vacuum level lt 1E 4 Torr o Di N w A wu EI E H o GAUGE CALIBRATION CAL OK indicates CAL OK Press to activate the _TEsT Port vacuum valid calibrations calibration type 1 CAL FAILED Best Port am OAL FAILED indicates a failed cal TEST PORT PRESSURE
181. the back of the fan in the corners Figure 7 6 5 Unplug the fore pump connection Figure 7 7 Figure 7 7 Fore Pump Connection 6 Mount the replacement speaker using the four M3 screws and washers 7 Replace the black and clear spade connections 8 Reinstall the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 7 5 on page 7 4 9 Using an extended length M5 Allen wrench reinstall the four screws holding the rear plastic cover Figure 7 5 on page 7 4 7 5 VS Series Helium Mass Spectrometer Leak Detector This page intentionally left blank VS Series Helium Mass Spectrometer Leak Detector Section 8 Power Supply CAUTION Always where and ESD bracelet when performing this procedure 8 3 1 Equipment Required O Extended Length M5 Allen Wrench Q M5 Allen Wrench O Phillips Screw Driver 1 Shut down the system using the On Off rocker switch 2 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 8 1 and detach the rear plastic cover from the unit 3 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 8 1 Front Cover Screws Rear Cover Screws ec GE
182. the calibration measure and verify that 12 VDC is available on the Pre Amp board J3 connection 3 Electrometer failure spectrometer Q If 12 VDC is Q Not measured replace the Pre Amp board Q Available on the Pre Amp board use the same troubleshooting method in step 2 Both the electrometer and the A D will not respond as the electrometer has failed Install a new spectrometer header VS Series Helium Mass Spectrometer Leak Detector Leak Detector will not go into Test D 20 Causes Resolutions 1 Panel Lockout Q Select the Control Panel Access menu Verify that Panel Lockout is enabled Test Port TC defective Q The leak detector will not go into Test if the test port TC is open circuit Measure the resistance of the TC Figure D 5 on page D 6 Any combination of the 4 pins resistance 1 5 Ohms Pumping down against a gross leak test port pressure gt 10 Torr a Blank off the test port and verify that the leak detector goes into Test b Connect the item for leak checking and verify that all fixturing connections are tight Front Panel Display Test button defective a Connect a laptop to the leak detector using HyperTerminal b Enter the command ROUGH and verify if the leak detector goes into Test If the command worked replace the front panel display Valve Driver board failure a Communication failure between motherboard and valve driver board Q Press Test and if ROUGHING doe
183. the following standards Safety EN 61010 1 Second Edition 2001 Safety Requirem ents for Electrical Equipm ent for Measurement Control and Laboratory Use Part General Requirements per the provisions of the Low Voltage Directive 73 23 EEC of 19 February 1973 as Amended by 93 68 EEC Article 13 of 22 July 1993 CANICSA C22 2 No 61010 1 04 Safety Requirem ents forElectrical Equipm ent forM easurement Control and Laboratory Use Part 1 General Requirements Adopted IEC 61010 1 2001 M0D L 61010 1 Second Edition 2004 Safety Requirem ents for Electrical Equipm ent for Measurement Control and Laboratory Use Part 1 General R eq virem ents EM C Emission and Immunity N 55011 1998 A1 1999 A2 2002 Group 1 Class A ISM radio frequency equipment Radio disturb ance characteristics Lim its and methods of measurement EU N 61326 1997 A1 1998 A2 2001 Electrical equipment for measurement controland laboratory use EMC requirements EU per the provisions of the Electromagnetic Compatibility Directive 89 33 6 EEC of 3 May 1989 as Amended by 92 31 EEC of 28 April 1992 and 93 68 EEC Article 5 of 22 July 1993 ASIN ZS CISPR 11 2004 Class A ISM radio frequency equipment Electromagnetic disturbance characteristics Limits and methods of measurement A ustra lia CC Code of Federal Regulations 47CFR 2004 Part 15C Section 15 24 Class A Telecommu nication Radio Frequency Devices Operation within the bands 902 928 MHz 2400 2483 5 MHz a
184. the screw Figure 11 5 and secure the existing hardware using an M4 Allen wrench Te Figure 11 5 Figure 5 Ground Lug Position f _Reconnecting the octal connector to the TC Gauge Figure 11 5 g Ifan Octal cable installation is required then proceed to step 7 otherwise proceed to step 8 Octal Connector Ground Lug Figure 11 6 Octal Cable 7 Replace the octal cable VSFLDOC by Disconnecting the octal connector from the TC gauge Figure 11 3 on page 11 3 b Using an M4 Allen wrench loosen the lower TC gauge screw and remove the ground lug Figure 11 3 on page 11 3 c Detaching the cable plug from the mother board PCB and disconnecting the ground cable form the chassis Figure 11 2 on page 11 2 d Removing the octal cable from the cable ties and discard e Routing the replacement octal cable back through the assembly in the same position as the removed cable VS Series Helium Mass Spectrometer Leak Detector 10 f Attaching the cable plug and the chassis ground to the location Figure 11 2 on page 11 2 g Installing the ground lug between the washer and screw and securing it using an M4 Allen wrench h Attaching the octal connector to the TC gauge Attach the fan assembly Figure 11 2 on page 11 2 by fastening the two wing nuts and one M4 socket head cap screw Then connect the fan cable to the unit Attach the front cover and secure to the frame using existing hardware Leak t
185. the slot of the ion source as shown Figure 14 12 and Figure 14 13 on page 14 8 Filament Post M2 screw and Washer a Ceramic position Filament position see figure 8 Coupler Screw Repeller plate edge Center line of filament should line up with the edge of the repeller plate Figure 14 13 Filament Alignment 24 Clean the mating surfaces of the spectrometer body and header with Isopropyl alcohol and a clean lint free wipe 14 8 VS Series Helium Mass Spectrometer Leak Detector NOTE Agilent recommends that you use the Vac U Solv spectrometer cleaning kit PN 670029096 25 Center replacement metal gasket inside the bolt pattern and outside of the body cavity To prevent scratching of any sealing surface do not use metal tools for this task 26 Guide the spectrometer header into pocket with the detector housing closest to the inlet Figure 14 14 Metal Gasket Detector housing Figure 14 14 Spectrometer Alignment 27 Insert a screw with three Belleville washers into each hole and finger tighten Figure 14 15 on page 14 10 NOTE The cones of the Belleville washers should all point to the head of the screw 14 9 VS Series Helium Mass Spectrometer Leak Detector Figure 14 15 Direction of Cone 28 Following the pattern shown in Figure 14 15 torque screws to 45 in lbs 5 0 N m 29 Re torque screws to 90 in lbs 10 2 N m following the same pattern Go thro
186. tic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 5 9 on page 5 7 Using an extended length M5 Allen wrench reinstall the four screws holding the rear plastic cover Figure 5 9 on page 5 7 VS Series Helium Mass Spectrometer Leak Detector 5 3 lon Source Board To replace this board 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 5 11 and detach the rear plastic cover from the unit Front Cover Screws Rear Cover Screws Figure 5 11 Rear and Front Cover Screws 4 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 5 11 5 Disconnect the O P1 cable OI PI J1 cable from position J1 and unscrew the red black ground from the lower left VS Series Helium Mass Spectrometer Leak Detector 5 10 6 Unscrew the four Phillips screws Figure 5 12 The spacers between the board and the mother board loosen as well remove them Figure 5 12 Mounting Screws 7 Remove the board 8 Place the new board with the spacers into the location 9 Replace and tighten the f
187. tion Figure 4 10 Valve Block Assembly and Spectrometer M5 Mounting Screws 8 Carefully disconnect the calibrated leak temperature cable from the calibrated leak PC board Figure 4 11 Figure 4 11 Calibrated Leak Connection 4 7 VS Series Helium Mass Spectrometer Leak Detector 9 Loosen the four M3 screws and disconnect the turbo controller cable from the pump Figure 4 12 Figure 4 12 Turbo Controller Connection 10 Gently pull the valve block assembly straight up and out of the unit Place the block bottom down on a flat surface Figure 4 10 on page 4 7 11 Remove the three bolts for the spectrometer connection Take care not to damage the O ring Figure 4 13 Figure 4 13 Spectrometer Nut Locations 12 Replace the spectrometer and reattached the pump as per step 11 4 8 VS Series Helium Mass Spectrometer Leak Detector 4 4 Replacing the Turbo Pump Valve Block and Spectrometer To reinstall the scroll pump and valve block 1 Gently place the valve block onto it mounting holes and tighten the four M5 screws nuts Figure 4 10 on page 4 7 Reinstall the two bolts for the vacuum connection Take care not to damage the O ring Figure 4 5 on page 4 4 Tighten the Phillips head screw connecting the test port ground wire to the center rail Figure 4 4 on page 4 4 Reinstall the four M3 screws that connect the turbo controller cable to the pump Figure 4 12 on page 4 8 Reconnect t
188. ts c Turn down the emission current to 702 and perform a full calibration and verify that it was successful VS Series Helium Mass Spectrometer Leak Detector 4 Foreline Pump elevated foreline test port pressure QO MR15 and PRO2 models Check the operating hours which are found in the Fore Pump menu Inspect oil and if necessary change QO MD30 models Check the operating hours which are found in the Fore Pump menu Investigate the maintenance schedule in the scroll pump manual gt 7000 hours typically require cleaning and tip seal replacement Offset Fault error message and a flashing C appear on the front panel display after a calibration attempt Causes Resolutions 1 Defective electrometer spectrometer assembly a Goto the Manual Tuning screen and observe the first offset value uV b Power off and remove front and back covers c Remove the aluminum cover of the spectrometer and reconnect the ion source and pre amp cables and verify that the pre amp going to the Mother board is secure d Power unit back up e Place the leak detector in Hold or Vent f On the Pre Amp board measure the voltage with a DMM the pin labeled OUT electrometer output with reference to ground The voltage should be in the mV DC range Verify if the voltage reading is in V and matches the large offset reading observed prior in the Manual Tuning screen g Carefully remove the lon Source high voltage cable from the pre am
189. ual if the system fails to reach the System Ready mode 20 2 VS Series Helium Mass Spectrometer Leak Detector Section 21 Exhaust Valve Replacement PDO3 only 21 1 Installation Procedure 21 1 1 Equipment Required O Extended Length M5 Allen Wrench O Metric Allen Wrench Set O M3 Phillips Head Screw Driver For clarity some items have been omitted from views WARNING Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting AN any part of the system 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 21 1 and detach the rear plastic cover from the unit Front Cover Screws Rear Cover Screws VE EEN Figure 21 1 Rear and Front Cover Screws VS Series Helium Mass Spectrometer Leak Detector 4 Unscrew the black cover using the Philips head screw pull up the cover and disconnect red arrow in Figure 21 2 Figure 21 2 Unit Screws 5 Unscrew the two Philips head screws blue arrow in Figure 21 2 and pull the complete black grey body up and out Mount new unit and replace the three Philips screws Attach the front cover and secure to the frame using existing hardware Attach the rear cover and secure to the unit using existing hardware St gt Connect the po
190. ugh the entire torque pattern twice to ensure the metal gasket is firmly compressed 30 Wait a minimum of five minutes then torque the screws shown in pattern Figure 14 14 to 90 in lbs 10 2 N m 31 On the PCB use the resistance meter to verify an open circuit between any two of the six ion source header pins except FIL 1 to FIL 1 and FIL 2 to FIL 2 which should be 0 3 Ohms or less Also verify an open circuit between the body of the spectrometer and any of the ion source header pins Figure 14 16 Ion Source E l T as CO Header Pins e Ro 8 wf H S le e Me e e an nr ie e is zs FE ee weer w m er Tg FE Bey SE ek RK Figure 14 16 lon Source Header Pin Schematic If there is continuity short circuit at any of the points remove the header and inspect for shorting 14 10 VS Series Helium Mass Spectrometer Leak Detector 32 Place the spectrometer cover over the header and align the holes Figure 14 17 Ion Source Header Pins Location ur Item 5 amp 6 Figure 14 17 lon Source Header Pin Locations 33 Install screws and washers items 5 amp 6 then tighten using a M3 Phillips screw driver Figure 14 17 34 Connect the spectrometer ground cable the preamp signal cable and the ion source cable to the spectrometer cover 35 Ensure that the vent valve on the turbo molecular pump if installed is tightened Figure 14 18 NOTE The vent valve is not installed on most tu
191. wer cord and power up the unit 10 Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes Refer to the operator s manual if the system fails to reach the System Ready mode 11 Agilent recommends a full calibration of the unit prior to leak test operations VS Series Helium Mass Spectrometer Leak Detector Section 22 Diaphragm Pump Replacement PDO3 only 22 1 Installation Procedure 22 1 1 Equipment Required O Extended Length M5 Allen Wrench O Metric Allen Wrench Set O M3 Phillips Head Screw Driver Q Adjustable Wrench For clarity some items have been omitted from views WARNING Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting AN any part of the system 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 22 1 and detach the rear plastic cover from the unit Front Cover Screws Rear Cover Screws Figure 22 1 Rear and Front Cover Screws 22 1 VS Series Helium Mass Spectrometer Leak Detector 4 Disconnect the R3359 301 Molex connector to the Clippard valve Figure 22 2 ut WI II ill d Wii w Figure 22 2 Molex Connector 5 Remove the ground connection to the sy
192. which is the leak rate range exponent e g 1 3E 08 LKEXPIRE Reports the internal calibrated leak expiration date mm dd yyyy A 5 VS Series Helium Mass Spectrometer Leak Detectors Table A 1 Internal Operating Parameters Continued Inquiry Response LEAKTEMP Reports the internal calibrated leak temperature that the factory calibration was performed at degrees C LP Reports the current leak rate along with the test port and system pressures LPV Reports the current Leak Rate Pressures and Valve state ML XFER Reports the current contra to midstage crossover pressure setpoint in Torr The response is in exponential format in Torr X XE XX PRESSURES Reports two lines Each begins with a lt cr gt lt lf gt The first line consists of the words test port TC followed by a number in mTorr The second line consists of the words system TC followed by a number in uTorr PWDONOFF Reports status of system password ON or OFF QUICK CAL Reports whether Fast or Full Calibration is chosen if a calibration were to be started RANGESTOP Reports the value of the Range Stop variable ZREIECT Reports the reject leak rate setpoint e g 7 0E 05 where x is a number from 1 to 4 or the letter A 2 gt xREJECT Reports the status of a reject set point where x is a number from 1 to 4 or the letter A 2xREJECT Reports the reject leak rate setpoint
193. wireless base board to the fan bracket using the four M3 Phillips screws provided with the kit 11 Unfurl the black red wire P1 RF with the 24 V three pin connector and the ground lug which is tie rapped at the base of the leak detector and O Plug the 24 V connector labeled P1 RF into the three pin connector on the wireless board O Attach the 24 V ground lug to one of the bracket screws Q Reinstall the fan assembly by tightening the M4 socket head cap screw and the two wing nuts Figure 17 2 on page 17 2 12 Connect the RS 232 cable end labeled J300 1 to P300 on the wireless board using its two slotted screws Figure 17 4 on page 17 3 13 Dress the RS 232 cable through the leak detector to the front panel display 14 Remove the M6 screw and washer from the front panel display and detach the display Figure 17 5 P300 COM2 Figure 17 5 Front Panel Display 15 Connect the RS 232 cable end labeled J300 2 to P300 COM2 on the front panel display board using its two slotted screws Figure 17 5 16 Reattach the display by inserting the tabs into their slotted positions and secure using the M6 screw and washer 17 Attach the front cover and secure to the frame using existing hardware 17 4 VS Series Helium Mass Spectrometer Leak Detector 18 Rotate the antenna to its horizontal locked position 19 Guide the antenna through its location hole in the rear cover Then secure the rear cover to the frame using
194. with Internal Calibrated Leak Zeroing routine is included ZERO_IN gt 200 ms Pulse Active HIGH pulse Initiate ZEROING routine HOLD_IN gt 200 ms Pulse Active HIGH pulse Initiate HOLD routine and isolate the test port and any test objects from leak detector vacuum system VENT_IN gt 200 ms Pulse Active HIGH pulse Initiate VENT routine and vent the test port to atmosphere TEST_IN gt 200 ms Pulse Active HIGH pulse Initiate ROUGHING routine on the test port and any attached test objects VS Series Helium Mass Spectrometer Leak Detectors Table A 6 I O Connector Pin Signals Continued Signal Name Description Leak Detector Behavior RDSTDLK_ Active HIGH when standard Initiate the INTERNAL IN leak is ON STANDARD LEAK reading routine PARALLEL_ Active HIGH when ENABLE Activation causes the leak ENABLE_IN is active detector to take inputs only from the rear panel I O or RS 232 port No control functions inputs from the front panel or wireless are allowed Figure A 2 shows the output circuit sketch Level outputs are optically isolated emitter followers with 10 Ohm series resistors and a 14 mA max drive current 24 VDC max YS LD J103 a 15 19 23 e ei bh g Ka RQ 2 wer NK you gt j 12 S Figure A 2 Optically Isolated Output Circuit Sketch VS Series Helium Mass Spectrometer Leak Det
195. xposed to high temperature equipment these solvents become flammable and explosive causing serious injury or death Do not use these solvents near a high temperature source Ventilate the working area with a blower and work in a large well ventilated room Alcohol methanol or other solvents are irritants narcotics depressants and or carcinogens Their inhalation and or ingestion may produce serious side effects Prolonged or continued contact with the skin results in absorption through the skin and moderate toxicity Always ensure that cleaning operations are carried out in large well ventilated rooms and wear eye shields gloves and protective clothing To clean the leak detector plastic enclosure the LCD display and Front Panel buttons use only a soft cloth slightly dampened with water or a mild soap Do NOT use excess water or cleaning solvents of any kind Avoid splashing any cleaning solvents into the unit through the ventilation openings or Front Panel buttons Wipe the surface with a dry lint free cloth Do not clean any aluminum parts with Alconox Alconox is not compatible with aluminum and will cause damage Vacuum Equipment and Cleanliness Cleanliness is vital when servicing the leak detector or any vacuum equipment There are some techniques that are more important in leak detector servicing than in general vacuum work CAUTION NOTE Do not use silicone oil or silicone grease Use powder free butyl o
196. xtended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 6 1 and detach the rear plastic cover from the unit 6 1 VS Series Helium Mass Spectrometer Leak Detector Front Cover Screws Rear Cover Screws Figure 6 1 Rear and Front Cover Screws 4 Remove the four screws holding the front plastic cover and detach the cover from the unit Two screws are situated at the front of the unit not shown and two screws are positioned inside the unit Figure 6 1 5 Drain oil 6 Unscrew the wing nut on the NW 16 clamp and remove the vacuum connection to the valve block Figure 6 2 7 Remove the sensor Figure 6 2 to the VS Series housing by a Loosening the knurl nut on the top of the sensor form which the green black wire exits and pulling off the cap b Removing the hex nut 6 2 VS Series Helium Mass Spectrometer Leak Detector Figure 6 2 Valve Block Connection 8 Gently push the vacuum hose to the side Figure 6 2 9 Loosen the hex nut and remove the exhaust connection Figure 6 2 Valve block connection 6 3 VS Series Helium Mass Spectrometer Leak Detector 10 Remove the four Phillips screw on the cap and pull off the cap Figure 6 3 Figure 6 3 Fore Pump Cap 11 Loosen the two collars on the nuts exterior to the box and disconnect the wires inside and label them for reconnection Figure 6 4 Figure 6 4 Cap Wire Connections VS Series Helium M
197. y The lon Source circuitry resides on a stand alone PCB comprised of five sections m m Parallel interface CPLD section with a 64 pin 0 1x0 1 PC 104 bus type I O connector J5 and a 14 pin JTAG connector J2 High voltage section with the ion voltage tuning and a 10 pin connector J4 C 5 VS Series Helium Mass Spectrometer Leak Detector O Filament power supply section with the emission tuning and good emission EMI OK signals generation O Isolated digital control section Q Power supply section with 3 pin connector J1 C 2 4 Valve Driver PCB The Valve Driver PCB Agilent P N R2104301 functions as PWM solenoid drivers under software control provided by the CPU PCB Valve Driver PCB circuitry provides O 50 V Isolated RS 232 interface with the CPU PCB via the Motherboard PCB Q Local microprocessor control and valve failure detection signals for eight solenoid valves QO Delayed pulse width modulated PWM output voltage for the solenoid valves Q 24 VDC to a 5 VDC conversion for the 5 V logic The Valve Driver circuitry resides on a stand alone PCB comprised of three sections QO Isolated I O RS 232 interface section with a RJ45 8x8 connector J1 Q Microcontroller and eight valve driver cells section with two 12 pin connectors J3 and J4 Q Power supply with 3 pin connector J2 C 2 5 Turbo Controller PCB Turbo V70 Controller PCB circuitry provides QO RS 232 communication with the
198. y part of the system 5 Remove the two wing nuts holding the plastic shield around the leak detector power input area and remove the shield Figure 15 2 6 Remove the fan assembly by loosening the M4 socket head cap screw Figure 15 2 M4 SCREW Shield Figure 15 2 Plastic Shield CAUTION Use proper ESD safety techniques when handling a PCB card 7 Remove the two I O board Phillips head screws w lock washers and remove the UO board that is installed in the unit Figure 15 3 8 Slide the I O assembly back to allow room to connect the flapper box wiring harness to the I O board M3 Phillips Head Screws Figure 15 3 I O Assembly with Screws 15 2 VS Series Helium Mass Spectrometer Leak Detector 9 Connect the P102 Molex receptacle on the flapper box wire harness to the J102 connector on the I O board Figure 15 4 VO J102 rO J101 Bracket Ground Screw YO J100 Figure 15 4 UO Bracket 10 Slide the I O assembly into the leak detector and ensure that the I O bracket engages the clip at the base of the leak detector Figure 15 5 11 Reinstall the two I O board Philips head screws w lock washers Figure 15 3 on page 15 2 VO Clip Figure 15 5 I O Clip 12 Remove M4 screw Figure 15 6 and open front panel to provide required room for installing the Flapper Box Wiring harness
199. ycling the Power Switch Circuit Breaker on the back panel of the unit Operation of this equipment in a residential area is also likely to cause harmful radio communications interference in which case the users will be required to correct the interference at their expense VS Series Helium Mass Spectrometer Leak Detectors WARNING This equipment is designed to meet current EEC regulations LVD Low Voltage Directive 73 23 EEC 1993 and EMC AN Electromagnetic Compatibility Directive 89 336 EEC 1993 for Material Group III Pollution Degree 2 environment for Industrial Scientific Measuring and Process Control Electrical Equipment and R amp TTE Radio and Telecommunications Terminal Equipment Directive 199915 EC 1999 Q Any modifications on the part of the user are liable to cause non compliance with regulations or affect the EMC performance and the safety of the product Agilent cannot be held responsible for consequences resulting from such intervention O Before powering the unit the first time verify that the unit is configured to operate for the local mains supply voltage Q The equipment can be damaged by Q Incorrect mains AC supply voltages Q Radio Frequency RF and Electrostatic Discharge ESD energy inputs that exceed the maximum ratings O Operating in very high temperatures or without adequate ventilation Q Immersion in liquids O Physical abuse Q All electrical connections must be performed by a

VS Series Helium Mass Spectrometer Leak Detector

Contents

Download Pdf Manuals

Related Search

Related Contents