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1. An image with adequate penetration voltage high enough Reducing Noise in the Projection Images Since the process of CT reconstruction enhances any noise that is in your projection images it is imperative that the noise within individual images is as low as possible There are several ways of doing this e Increasing the X ray current e Decreasing the detector gain or sensitivity e Increasing the exposure of the imaging e Averaging more frames The three images below show a sample viewed e Using a low X ray current using a camera with an aperture in the fully open position e Using a high X ray current and a low detector gain e Averaging the image User Manual XTMO26 A1 443 How to Get More Out of 3 D CT Image with open aperture or high gain Image with small aperture or low gain 444 XIMO26 A1 User Manual How to Get More Out of 3 D CT Image averaged over time Note the difference in noise levels Detector gain can be reduced either by closing the aperture on a camera or reducing the gain of a flat panel Using a reduced detector gain forces use of more X rays to obtain the same image brightness Since the noise level of a random process like X ray generation is proportional to the square root of the signal level then the signal to noise ratio also increases in the same way The same reduction in noise by increasing the total signal can be achieved by increasing
2. oooccccoccoccncncccnnnoconnnononnnonnnnononnnnnnnnonnnnnonnnnnnnnnnnnnnnncnonnnnnos 121 Manual Bad Pixel Identification ccoocccconcncocnncccnnnnoconnnnononononnncnnnnononnnonnnnnnnnnnnnnnnncnonennnos 122 Saving the Bad Pixel Map a A ei 122 Operator Level Control Tool Bar ccococcccccnnccccnncoccnnncocnnonanononacononnnnonnnnononnnonannnonannnonnnnonannnenanenos 123 iv XITMO26 A1 User Manual ve IMAGES id As 124 Capture Made unid ooo 124 PV ETAGS IMAG ia 125 wWidelmage RaAGIOG rap am dadawnuae tad daeactasboe suka 126 Open iMade st Es 128 S Ve Mae a 130 image Intense Flia iii 133 A A cay eh A lantuat seule A A 134 imaging Presets Operator a iad 134 image Ito malo said o a a E A 135 Supervisor Level Control Tool Baturra ii 135 Lye a ge reve eat asd ale ek wad Nae tian usin such Retna dass etait plained Bets acd a gad ved nd etnta ane amen eianineteanaalae 136 LIVE Mage Processing ii A AAA 136 Capture Image ii e a d os 137 Average Madina da dd A ets 138 Wide IMage RadlograP Vic ici di a 138 OPER MIM AGS sario o a 141 Save Made ii A ad 143 image IntensiMerPlieldS ici dica boi 146 HS COMO aaa coa pda rl iii 147 A A A ect ced A O assets N T 147 FBO SSS o esata dus vo conic haere manatee EEEE S 148 Undo image PROCESSING a a Cucwensanctanaranddantindtngmavaaaiastunatasmesnuvanccuacacotenay 149 AE A E E SE AE E E E E E coeur 150 A A A 150 A ee Rane NERD ae a AE eR ie Er Ne men Re ce 151
3. User Manual XTMO26 A1 303 Inspections Sample Management These controls allow the management of samples on page 306 within an inspection program Component Management These controls allow the management of components on page 310 within the selected sample within an inspection program Action Management These controls allow the management of actions on page 315 within the selected component within the selected sample within an inspection program Save Inspection l Save Changes made to the inspection program are saved to disk by pressing the Save button Add Recorded Actions Add The current recorded actions on page 299 can be added to the inspection by pressing the Add button When the recorded actions are added to the inspection program Save Image on page 344 actions will be inserted automatically At which places in the list of recorded actions the Save Image actions are inserted is controlled by the Inspection Properties on page 354 The recorded actions are added to the end of the list of actions for the currently selected component Get Manipulator Map Get Map m The Get Map button will get a copy of the current manipulator map image on page 83 and save it within the inspection This manipulator map image will then be reloaded into the manipulator s user interface whenever the inspection program is edited or run The map image is also used in reports generated by the inspectio
4. A The number of samples is only required when the X ray inspection system Sample Tray Type If the X ray inspection system is fitted with a sample changer manipulator then the sample tray type being used must be selected in the Sample tray type drop down list The samples must be loaded in consecutive slots in the sample tray from the index position The sample tray type is only required when the X ray inspection system is fitted with a sample changer manipulator User Manual XTMO26 A1 495 3 D CT Batch 2 D Inspection Program Selection 3 0 CT batch program best 1 To select the 3 D CT Batch program to run select the required program from the 3 D CT batch program drop down list Running the Program Run To run the program after entering the required data press the Run button If any of the shading corrections within the 3 D CT Batch program require to be updated then the following prompt will be displayed If they are all still valid then this message will not be displayed Information 1 j Shading references used within this program require to be updated Do you wish to update these and run the program A prompt will be displayed to ensure that the correct X ray filtration material is inserted Information LI Please insert the x ray Filter of 4 000 mm of Copper 496 XIMO26 A1 User Manual 3 D CT Batch If any of the CT data sets have already been inspected then the followi
5. For each void identified the following data is available Void ID A numerical identifier X The X ordinate of the pixel that specifies the centre of the void Y The Y ordinate of the pixel that specifies the centre of the void Area The area of the void in the current measurement units Percentage This is the percentage of area of the region of interest or the whole image if no region defined that for this void User Manual XTMO26 A1 265 Image Processing The full results may be printed by pressing the Print button This will display the standard Windows print dialog This is documented in the Windows help system T The full results may be saved to a file on disk This is done by pressing the Export button A standard Windows save file dialog is displayed This dialog is documented in the Windows help system The results may be saved in two different file types CS File cs Text File Ext CSV File on The results are saved as comma separated values This file type can be page 589 easily imported into an Excel spreadsheet Text File This saves the results as a text file Wire Sweep The Wire Sweep function is used to measure the percentage sweep of bond wires Each measurement is displayed as a pass or a failure depending upon its sweep percentage 266 XIMO26 A1 User Manual Image Processing The wire sweep measurement is defined as the ratio of separation distance to the wire s length
6. The first method of zoom is by the zoom controls at the bottom right hand corner of the window and the second is by holding down a key and then clicking upon the map image SHIFT Left Mouse Button Down E CTRL Left Mouse Button Down 170 XTMO026 A1 User Manual The image is enlarged by zooming in on the centre of the visible image The image is enlarged by zooming in centred upon the point that the mouse was clicked The image is reduced by zooming out from the centre of the visible image The image is reduced by zooming out centred upon the point that the mouse was clicked The image will be reset to fit the whole image area The image is scaled to fit the screen when this button is checked If not checked then the image is displayed at actual pixel size Image Processing When the zoomed in it is possible to see other parts of the image by use of the scroll bars or by holding the SHIFT and CTRL keys down and clicking upon the map image with the left mouse button and holding it down and dragging the image When holding down either the CTRL or the SHIFT key or both and moving the mouse over the map image area the cursor will change to indicate what action will occur if the left mouse button it clicked SHIFT held down and zoom in available CTRL key held down and zoom out available SHIFT or CTRL key held down but the limit of the zoom has been reached SHIFT and CTRL keys held down pan image av
7. Measuring the gap between material To measure the thickness of material select the Gaps Between Material radio button There are then two methods of measurement when measuring a gap This is controlled by the Measure Using Base Lines checkbox If the Measure Using Base Lines checkbox is unchecked then the measurement function will look for edges to use for the measurement that start on one of the cyan lines and end on the other cyan line Note in this mode the cyan lines of the box will be a solid Invalid edge 210 XIMO26 A1 User Manual Image Processing This shows a good measurement as the edges of the two pieces of material both start on one cyan line and end on the opposite cyan line The objects whose edges do not follow this rule are outlined in yellow and will not be used for measurement This following image shows an example of this Edges do not start and end on cyan lines This type of measurement is useful for precise measurements of gaps between defined sections of material User Manual XTMO26 A1 211 Image Processing If the Measure Using Base Lines checkbox is checked then the measurement function will look for edges to use for the measurement that start and end on the blue lines Note in this mode the blue lines of the box will be a solid Good edge as starts and ends on same blue line Ignored edge as it does not start and end on the blue line f
8. 76 XIMO26 A1 User Manual Manipulator Controller Locking Axes To lock movement on an axis press the Lock button corresponding to the axis When pressed the button will stay depressed to show that movement on that axis is inhibited To re enable movement of that axis press the Lock button again and the button will be released Movement can be locked on all axes by pressing the lock all button Movement upon the axis is allowed mo Movement upon the axis is not allowed as the axis is locked Move to Position When the Move button is pressed the manipulator will start moving its axes to the positions specified in each axis demanded position text box This movement may be stopped before the demanded positions are reached by pressing the Stop on page 70 button Joysticks Rotate Fotate There are two types of joystick controls available There are the physical joysticks on the inspection system and as an alternative there are software joysticks By default the physical joysticks are enabled on all systems when fitted The type of joysticks being used is specified in the manipulator properties on page 78 If the software joysticks have been enabled they appear on the manipulator controller user interface To move the manipulator using a software joystick click upon the green control point within the required joystick with the left mouse button The control point s colour will change to red to indicate that the j
9. In order to re calibrate the centre of rotation then mount a sample and enter a serial number of Calibration into the relevant Serial Number text box This is because the calibration run will create only reconstructed slices for the slices used to calculate the centre of rotation It is not a complete CT data set and will normally be discarded after re calibration Then press the Calibrate button This will acquire the CT data sets for the program and then re calculate the centre of rotation by reconstructing only the relevant slices Upon completion it is recommended that this CT data set is discarded Deleting a 2 D Inspection Program If a 2 D inspection program is no longer required then it can be deleted by selecting the required program within the 2 D Inspection Program drop down list and then pressing the Delete button This will delete the program and associated data files but will not delete the results data that has been previously created by the program It is only possible to delete 2 D inspection programs when logged in at supervisor level User Manual XTMO26 A1 535 2 D Inspections 2 D Inspection Operator Window When Inspect X is run in operator mode then the main controls window will be replaced by the 2 D Inspection window as shown below This allows for the running of 2 D inspection programs and some basic system control functions X 2D lespocti n ee Operator ID Operator Mo 2 D inspection program Small
10. Rotate 2 D CT For the latter the Area of Interest controls are not displayed A The area of interest is required for Standard 2 D CT but not for Translate To define the area of interest press the Acquire button quire to acquire the images Specify the required area by changing the crop boxes on the images When reconstructing the CT data set on page 589 to create the reconstructed image stack it is possible to reconstruct only a specified area of interest for each slice i e not reconstruct the whole of each sinogram This is of use to remove redundant data from the reconstructed image stack and therefore speed up the reconstruction To specify an area of interest press the Acquire button One scatter free radiographs is acquired 90 degrees apart in rotation from the scatter free radiograph acquired at the Corrections on page 465 stage These are displayed in the main X ray image window Adjust the red crop box so that only the required data is within the crop box If the whole image is required press the All button to maximise the crop box 478 XIMO26 A1 User Manual 2 D CT Acquisition tightly as this might cause the cropping of data in the reconstructed image f When cropping the area of interest it is recommended to not to crop too m stack Reconstruction Size Reconstruction Size Volume size voxels Voxel size mm Reconstructed voxel size mm Disk space For projections ME Disk space F
11. The conditioning process needs to be done on a regular basis to ensure that the X ray source will perform as required If the X ray source is not conditioned regularly then when a high kV is demanded it is likely that the X rays will switch off automatically and the kV will not be achieved Auto conditioning the X ray source daily is recommended typically at the start of a day Auto conditioning is also required after the filament has been changed or if the generation of X rays becomes unstable x There are two auto conditioning modes within Inspect X normal auto conditioning and intelligent auto conditioning Which mode is used is defined in the properties on page 36 Normal Auto Conditioning To auto condition the X ray source first set the required maximum kV on page 11 that you will use It is usually best to set the maximum kV that the X ray source will handle as this will ensure stability of the source After setting the required maximum kV then press the auto condition button This button stays depressed whilst auto conditioning takes place Y The X ray status on page 13 will update to show that auto conditioning is taking place During auto conditioning the X rays will switch off and on automatically until the X ray source stabilises at the maximum kV set Once the X ray source has stabilised for a number of minutes then auto conditioning is complete and it may be stopped by pressing the auto condition button again so t
12. User Manual XTMO26 A1 115 Image Processing Image Acquisition Flat Panel Calibration Setting X ray and Imaging Parameters Please ensure that the Following conditions are set 1 Set the ray conditions so that the image is about 80 saturated and the 04 is a minimum of OLA 2 It is recommended to use an imaging device exposure of 1000 milliseconds IF necessary to get the required brightness change the exposure Acquire Images Three images are acquired to calculate a bad pixel correction map These will be a white a mid grey and a black image Time For each image acquisition seconds ml Pressing the Open button will open the Image Processing properties on page 283 window with the Imaging Setup on page 288 tab visible This allows the selection of the required imaging parameters A bad pixel map is required for each binning mode for a flat panel The required binning mode can be selected in the Imaging Setup It is recommended that the imaging device exposure is set to 1000 milliseconds as this normally ensures a high quality set of images for the determination of the bad pixels It is possible to acquire the images for bad pixel determination at a different exposure if it is not possible to use 1000 milliseconds The Time for Each Image Acquisition numeric control specifies the number of seconds over which each image is averaged The longer the period the better reduction of noise within the imaging d
13. Acquire Tone Erode Dilate PseudoLolour Erode Dilate The defined script buttons are displayed in the window Every time a script button is added then the window resizes appropriately to display the new button The set of actions defined for the script button are executed when the button is pressed Add Script Button Add When the current recorded actions on page 299 are to be saved as a Script Button then press the Add button A window will be displayed to request the name for the new script button When a unique name has been specified then the new script button will be added to the window The window will be resized appropriately to accommodate the new button Delete Script Button lt ee To delete one of the script buttons select the name of the button to delete from the menu displayed when the option button of the Delete Script Button button is pressed A confirmation window will be displayed to check that you do wish to delete the button User Manual XTMO26 A1 353 Inspections Acquire Image Action in Script Buttons When an acquire image action is included within a script button s action list it has slightly different behaviour to when an acquire image action is run within an inspection program In an inspection program an acquire image action moves to a specified position and then acquires an image using specified imaging settings and X ray conditions When an acquire image action is
14. Edit Program 2 D inspection program Smal Dace Serial numbers 123 456 709 E CT profiles Aerofoil Rook A Samples Pixel Size Wall thickness measurements Define Reconstruction computer BLADERLUNMER CT Data Set Folder BladerunnerycT Data Select Shading Correction Safe Position Safe position set With the samplets mounted move the manipulator to a position where there nothing in view and then press the Set button Output HTML report w Coy export file w When the editing is complete press the Done button User Manual XTMO26 A1 521 2 D Inspections It is only possible to create and edit 2 D inspection programs when logged in at supervisor level CT Profiles Aerofoil Root A The 2 D CT profiles that specify how the CT data sets for the program are to be created may be managed using the CT Profiles list To add a 2 D CT profile then press the Add button The file that you need to select is the ct2dprofile xml file in the required CT data set folder The CT data set must have already been created by performing a 2 D CT acquisition on page 455 To remove a 2 D CT profile from the program select the required profile in the CT Profiles list and then press the Remove button To edit a 2 D CT profile then select the required profile in the CT Profiles list and then press the Edit button The 2 D CT Acquisition on page 455 function is loaded with the profile A link is estab
15. If the image is to be saved with the colour overlay information then check this checkbox If the original greyscale X ray image is to be saved so that it can be re analysed then clear this checkbox Apply Tone to Image Apply tone to image Greyscale images can be saved with either the tone edit saved in the image profile or applied to the image If the tone edit is saved in the image profile then the image data in the saved file does not have the tone edit applied This is so that tone edits are non destructive and can be altered if the image is re loaded into Inspect X If the tone edit is required to be applied to the image data in the saved file then the Greyscale with Tone option should be selected Applying the tone edit to the image data means that third party image applications will open the image and the tone edit is seen Not that re opening such an image in Inspect X will not allow the undoing of the tone edit If this checkbox is checked then the image saved shall have the image tone applied to the image data This checkbox will not be available when the Colour File checkbox is checked User Manual XTMO26 A1 345 Inspections JPEG Quality Factor JPEG quality Factor 20 When the image file format has been set to JPEG or JPEG2000 this field will be enabled If is not relevant for other file formats This numeric field specifies the JPEG quality factor Numerically smaller values compress the image file less but ret
16. Image Processing Image Flattening In order to remove any effects due to non uniform illumination of the X ray image Image Flattening can be used This process equalises the grey scale levels within the image to produce to a better BGA void analysis if so required Image flattening creates a reference image that is used to remove the non uniformity of intensity The reference image is only viewed when defining the image flattening Flatten nell Press the Flatten button and the Image Flattening dialog will be displayed Define Image Flattening Adjust the slider until the artefacts are removed From the image Then close the window DES Adjust the slider so that the voids in the BGA solder balls in the X ray image are removed in the reference image 0 e 9 0 4 0 c E The BGA void analysis image with the voids flattened When this has been done close the Image Flattening window by pressing the close button at the right hand end of the window s title bar If a Void Fill Threshold had already been defined it will need to be adjusted after any alteration to image flattening To remove any image flattening press the Flatten button and set the slider to the left hand end and close the window 240 XIMO26 A1 User Manual Image Processing Define Region of Interest It can be helpful to obtain a good result to define a region of interest to mask out objects that might cause problems when analysing the voi
17. Inspect X 3 0 User Manual XTM026 A1 Contents 1 2 5 Introduction 1 Important Health and Safety Information 3 Understanding Ne Hazal dS cmi a a E E 3 Getting Started 5 LURING OF Me System si id ida 5 HOG QING Oins onor anaE hunt E E O EA OEE 5 Welcome Sr o ES a a aaae eceseseaeuchees 6 User Interface Language Selection cccccscsccccssseecceeseecceesececseseeessaneessegeeeesauseeessageeesseneeessaass T Configuration Selecion llos 8 Operator B een e a a a a ee eee 8 FAS SW OIG es ILI oral deeids ER a 8 Mal Scene dida loci ious 9 X ray Controller 11 Operator Level dl 11 kV Control X ray PenetalOMi A ARA 11 Power or Current Control X ray IntensSity coooccccoconncoconnncccooconncnanonconannnnonononnnnannnnnnannnnnnnns 12 Switching X rays ON and Oia is ds 13 A AS ia ds Ele 13 Vaca 14 FOCUS aC US UN CUNT niesna alien aires oia 15 AUTO 7 g a i406 a1 yc een eerste re etter tr od cod 16 MONAHO Ms oa 18 SUPE apt aaa eae eae ee ted eae ie 19 KV Control X tay Renetalouania a haat hese ares ee Me edd eye esas 19 Power or Current Control X ray IntensSity coooccccococncoccnnoncconcnnnonanoncononnnnonononnnnannnnnnannnnnnnns 20 Switching Xsrays OM and Dicta as ica dey ec anc taste te ce saexe dates 22 A Tay AS ios ee ee ee 22 Vaca 23 FOCUS AQUsSiMeNta ca rere nee een nt ee eer re 24 AUTO C ONOIIONING sonso aci 24 A A ed E a a a eerie oar anah cra 28 ray FUGA ION ai O Oi dem el EE
18. Note that the edge detection function is only available on inspection systems when it has been specifically requested 260 XIMO26 A1 User Manual Image Processing Define Region of Interest More accurate results may be obtained by defining a region of interest to mask out areas of the image that do not form part of the die attach To define or update a region of interest or to load a saved region of interest press the Region button This will open the Region of Interest on page 270 window When the region of interest is defined close the window by clicking upon the close box on the right hand end of the window s title bar Package void analysis with image flattening but no region of interest Package void analysis with image flattening and a region of interest User Manual XTMO26 A1 261 Image Processing Image Flattening In order to remove any effects due to non uniform illumination of the X ray image Image Flattening can be used This is only active for void analysis using thresholding This process equalises the grey scale levels within the image to produce to a better package void analysis if so required Image flattening creates a reference image that is used to remove the non uniformity of intensity The reference image is only viewed when defining the image flattening Flatten Press the Flatten button and the Image Flattening dialog will be displayed fine Image Flattening Adjust the
19. Remove Files older than o months g weeks Oo days When the clean up files task it will delete files of the specified type that have a modification date older than the number of months weeks and days specified in the Remove Files Older Than numeric controls 956 XIMO26 A1 User Manual Scheduled Tasks Setting the Task s Schedule The task s schedule can be set to one of the following options e Daily e Weekly e Monthly Run task now After the schedule has been specified it is possible to run the task immediately by checking the Run Now checkbox and pressing the OK button Running the task immediately will not change the scheduled run time for the task Setting a Daily Schedule for a Task Run task every 2 Daily O Weekly Monthly Start time 20 00 00 Perform this task Every day O Every days To run a task on a daily basis select the Daily radio button The time at which the task starts to run is entered in the Start Time numeric control Then the task can be run at this time every day by selecting the Every Day radio button Perform this task Every day Every 2 3 days Optionally the task may be run every N days by selecting the Every radio button The frequency of the days N is entered in the numeric control User Manual XTMO26 A1 557 Scheduled Tasks Setting a Monthly Schedule for a Task Run task every Daily CO Weekly Monthly Start time 20
20. Run Inspection 296 Running an Inspection 350 Samples 306 Save Image Action 344 Step and Repeat Actions 315 Step and Repeat Components 310 Step and Repeat Samples 306 Threshold Action 343 Tone Edit Action 337 Viewing Results 351 Visuall Check Action 334 X ray Flux Calibration Action 322 X rays Off Action 348 Introduction to Inspect X 1 Introduction to X ray Focusing 37 K kV Step Style 34 L Login to Windows XP 5 M Manipulator Absolute Position 69 Add Saved Position 90 Calibrate Revolution Back Offs 78 Calibrate X ray Source Position 78 Copy Absolute Position to Relative Position 69 Delete Saved Position Set 90 Demand Position 69 Display Software Joysticks 78 Homing 61 69 Joysticks Enable 69 Load Position 61 69 Locking Axes 61 69 Map 61 69 Map Scanning 69 Map Zoom Control 69 Measuring 61 69 Move 69 Move to Datum Position 69 Move to Position 69 Movement Speed 61 69 Index Next Saved Position 90 Positioning using the Map 69 Preparing for Use 61 69 Previous Saved Position 90 Properties 69 78 Recording Position 69 Relative Position 69 Remove Saved Position 90 Saved Positions 90 Set Horizontal 69 Status Bar 61 69 Stopping Movement 61 69 Zero Relative Position 69 Manipulator Axes Controls 69 Manipulator Map 69 82 Calibration 78 Displaying Component Status 82
21. To correctly align a transmission target X ray source the electron beam must pass through the very centre of the aperture In theory this will coincide with the electron beam passing through the centre of the magnetic lens but in practice this is not always the case Transmission target sources should be aligned for maximum brightness rather than for a stable modulated image To align a transmission target source turn the X rays on and seta demanded kV and demanded current or power level that would normally produce an image of medium brightness Ensure that there is no subject in view For SR controlled sources adjust the physical source alignment by turning opposite pairs of alignment knobs a very small amount at a time The aim is to achieve maximum brightness for the operating conditions To check the alignment move the mouse to the centre of the image display and check the grey level read out For Xi sources or when the physical alignment of the SR controlled X ray source is as near to perfect as possible the alignment may be fine tuned using the X and Y shift adjustment on page 49 Note On occasions particularly if the alignment is poor after a filament change it is possible to totally lose the X ray image This can be difficult to recover If this happens it is possible to temporarily remove the aperture in some models roughly align the X ray source and then replace the aperture and fine tune the alignment 40 XIMO26 A1 User Man
22. White target Estimated time to completion 00 00 07 Hours Mins Secs Upon the successful completion of the creation of the shading correction the correction is loaded and the window is closed Using Multiple X ray Filters To create a shading correction that uses multiple thicknesses of the same X ray filtration then check the Use Multiple X ray Filters checkbox This type of shading correction is created using a fixed X ray uA and different thicknesses of the X ray filtration are used to create the white and grey reference images This type of shading correction can produce very high quality shading correction for samples consisting of a single material The filtration should be of the same material as the sample User Manual XTMO26 A1 111 Image Processing Reference Images Frames to average Black Image Black target 0 00 White Image white target 48000 Gener ate The Frames to Average control specifies the number of image frames to average for each shading correction reference image The larger the number of frames the better the reduction of the effect of noise within the images Note that on inspection systems fitted with either a curved linear detector or a Time Delay Integration TDI detector then it is recommended that the number of lines to acquire is set within the Imaging Set Up on page 288 and the Frames to Average is set to 1 The X ray uA to be used for the white reference image may be s
23. X ray Image Zoom 169 Imaging Presets Defining new Imaging Presets 283 Removing an Imaging Preset 283 Select an Imaging Preset 123 135 152 Inspection On Failure Actions 349 Inspection Programs Actions 367 Adding a Map to an Inspection Program e 389 Adding Actions Manually 373 Adding Recorded Actions to an Inspection Program 373 Adding Save Image Actions 373 Archiving Results Information 396 Basic Concept 367 Calibration Actions 373 Components 367 Creating an Inspection Program 373 Editing an Inspection Program 385 Editing an Inspection Program Adding Samples Components and Actions 385 Editing an Inspection Program Deleting Samples Components and Actions 385 Editing an Inspection Program Renaming Components 385 Editing an Inspection Program Reordering Samples Component or Actions 385 Example of Program Creation 401 Failure Modes 394 Fiducial Calibration 368 Inspection Program Structure 367 Inspection Results File e 396 Names of Samples Components and Actions 385 On Failure Actions 394 Operator Identification 397 994 XIMO26 A1 User Manual Positional Calibration During Editing 385 Positional Tolerances 373 Repeatability 368 Results Table 392 Sample serial numbers 392 Samples 367 Status map 389 Step and Repeat Actions 380 Step and Repeat Components 380 Step and Repeat Example 380 Step an
24. BGA Void Analysis P455 ia ik Menu showing views of a component User Manual XTM026 A1 89 Manipulator Controller Sentence as Pass z To mark the area currently being viewed in the main X ray image window as a Pass then press the Sentence as Pass button By pressing this button the current area will be marked on the map image with a green overlay to indicate a pass The Map Mode on page 88 will be changed to Status to show the status information on the map image Sentence as Failure To mark the area currently being viewed in the main X ray image window as a Failure then press the Sentence as Failure button By pressing this button the current area will be marked on the map image with a red overlay to indicate a failure The Map Mode on page 88 will be changed to Status to show the status information on the map image Clear Status Information To clear the status information from the map image press the Clear Status Information button This will delete any existing status information To hide the status information without deleting it press the Map Mode on page 88 button so that the map is set to Normal mode Saved Manipulator Positions As an aid to moving to particular positions on the manipulator a number of positions can be saved in a Saved Position Set A saved position set consists of a number of manipulator positions It is possible to move to these positions either sequentially or in any o
25. Frame Rate Digital Gain White Level Black Level d Image Processing lxi 40 ms a 0 FPS La an For analogue cameras the only controls that are available are the White Level and Black Level controls To set up an analogue camera follow these steps Following these steps ensures that the dynamic range of the camera will just exceed the gamut of the X ray image As the result the best dynamic range for the X ray image is achieved The X ray image must be viewed using the Live Histogram on page 136 function 1 Switch the X rays on and move the manipulator so that nothing is in view 2 With the X rays on adjust the White Level control until the peak on the histogram is just less than 65535 preferably 65024 This can be checked by moving the mouse over the X ray image to see what grey level is read 3 Switch off the X rays and then adjust the Black Level control until the peak in the histogram reads about 6 This can be checked in the X ray image 4 Now repeat steps 1 to 3 until when no X rays are on the grey level reads about 1536 and with X rays on read out 65024 The process is iterative and takes a number of cycles to get the required result A The values are NOT saved until the Save button is pressed If the Save button is not pressed then the next time that Inspect X is run the previous values will be used User Manual XTMO26 A1 291 Image Processing Annotation Properties General
26. If the Manage Database Size checkbox is checked then the records within the database are purged when Inspect X is started up All records older than the specified number of days are removed User Manual XTMO26 A1 365 Inspections 366 XIMO26 A1 User Manual 8 How to Get More Out of Inspection Programs The Inspect X application provides the Inspection function that allows for the programming of inspections This function is found on the Inspection tab It is not available on some of the inspection systems What is an Inspection Program An inspection program is a series of instructions of actions to perform The actions that can be inserted into an inspection program can be things such as acquire an image analyse the image for BGA voiding etc The purpose of an inspection program is to allow the repeated inspection of a number of samples of the same type for example a printed circuit board PCB This can allow for either full inspection or sampling from a batch of samples Inspection programs can be run by anyone but may only be created and edited by Supervisors Basic Concepts There are a number of basic concepts that need to be understood in order to understand the structure of an inspection program Samples An inspection program will inspect one or more samples in each run of the program This allows for the concurrent mounting of one or more of the samples to inspect onto the manipulator table If the sample being in
27. My Recent Documents kb o o A Y 3 5 When the preview image is displayed then a left mouse click upon this preview image will zoom in on the image centred upon the point where the mouse click is made To reset the zoom so that the whole image is displayed left mouse click upon the preview image again The preview image pane also displays an estimate for the size of the image file that will be created User Manual XTMO26 A1 131 Image Processing The preview image is of particular importance when saving images to JPEG or JPEG2000 files as the effect of the image compression can be previewed before saving the file to disk Pixel Depth Pixel depth 2 8 bit 0516 bit Some image file formats can be saved as either 8 or 16 bits per pixel for monochrome images without colour or 24 or 48 bits per pixel for colour images with colour and some can only be saved in 8 bits for monochrome and 24 bits for colour images The image acquisition and processing within Inspect X is 16 bits for all imaging devices Image Type Greyscale smaller file Greyscale with Tone smaller file Colour larger file All the image formats allow for the saving of the image in greyscale or colour formats Greyscale images can be saved with either the tone edit saved in the image profile or applied to the image If the tone edit is saved in the image profile then the image
28. PTA MAMMAL SiS A E 252 mage Sepalo tax o ca 253 Region OF Atrea in 254 Smart Alter tddi ea 254 Solder Edge Threshold 2 did A 255 PTI ZC io do don 255 NUmber ol PIAS sar ol ot tada 255 FIILevel nresnold ainia ai o de A do Ai 255 TUCANO ya ad NA A 206 Calculate Result A A As mhaaldieatle outa 256 MeWReSU Sao das da os 257 Pas Pala a a a Oia 258 Package Vod ANALY SIS ii AA 209 PADIANY SIS DO ad 260 Define REGION Of Interest sida ip doi o 261 image Flantenihg sseni ada a 262 void Edge Threshold zisa AAA E aE A lata SI ala ui dd 263 Overall voiding Fallsissa a don 264 User Manual XTMO26 A1 vii gt Male VOIGING Pal A ace dad hse a peace S 264 Wii UIT V OIG Siles oa A 264 mee E eo e P A E E E E E E E E E E 264 WICW ROSUNG arinena ne aa A E A E aoe amas Meee ead cet 265 Sn A 266 Defining a Wire Sweep MeasureMent oocccccconnnccccocnncccnnnncononcnnnnnnnnnnonannnnononnnnnnnannnnnnannnnnnananess 267 Deleting a Wire Sweep MEaSUreMeNH ccccccssseecceeseeecseeseeccseseeecsauseecseseeessaueeessagseeseueeeeeas 268 Deleting All Wire Sweep Measurements cccccccccccseseeeceeeeecceseeecsegeeecsaeeeessageeeseneeessagseesens 269 DALON A te pee teen OOO A ee ee ee neti Roe re ae eee ere en E toe eee eee 269 DIAS CU ESU ono rat 270 Ada Resultis to Image Notes iii AA 270 A et eee eee ee ee eee ee 270 ReGIOMOnINTETeS tidad RS AAA 270 Once a a 212 Melder Exclude IR COION A 276 REDEA eo A E E ieee ae E ocean oe emeees ee A a
29. Reordering Samples Component Or ACtIONS occccoccncccccncccncnccncncccnnnnonannnnnnnnnnnnononnncnonenonanons 387 Names of Samples Components and Actions ooccccccncccccncccncncccnnncnonononnnnnnnnnnnnnnnnnnnnnncnonenonos 387 Renaming E om poneis ns 388 Checking an Inspection Prod Mii iii bites 388 Maps ana IMSDCCIION PROGKANNS a e E a a a 389 Adding a Map to an Inspection Program ccccccseeeceseeeeeeeeeeeeeeeseeeeeseeeeeseueesseeeesaeeeeseueeseneeesees 389 UA A tee ame Mane Mem 389 SUS A A eae senna aan ere ec eee lene een Slee 390 RUANING an Inspection Prog Musa dd 392 Salm ples Serial N mDe Ss less 392 ResullS Table o da 393 VIEWING the INSPECTION Report stc os seeds sin din 393 What Happens when a Failure is Identified ooocccconcnccoccncconnnoconnnonoconononnnnnnonononononanonnns 394 On Failure Actions What Happens when a Failure is identified ooccccoooncncccccnncnns 395 Outputtrom an Inspectlon ProdtaMiiiai ar iaa 396 Transforming the XML Results Filesi a a 396 Archiving Results Informal on ya AA A AAA eae 396 INSPECTIONS and Validation Station ooccccoccncccncncconnnononnnononononnnonnnnnonnnnnonnnnnonnnnnnnnnnononenenaninonos 397 x XIMO26 A1 User Manual Validation Station NEtWOFrKING sista catia A ae 397 Examining Results on the Validation Station oocccccocnnoconnoconnnocononononononocnnonanoncnnnnonanones 398 Checking the Res
30. The order of the components in the list is the order in which they are inspected To change the order of the components select the component that you wish to move in the component list To move the component up press the Up button To move the component down press the Down button This may be repeated any number of times Execute Actions for Component To execute the actions for a component double click upon the required component within the list To stop the execution of action press the Cancel button that is displayed 314 XIMO26 A1 User Manual Inspections Action Management An inspection program consists of a number of samples on which a number of components are to be inspected For each component a list of actions can be defined The actions for the selected component are displayed in the Actions list Actions Acquire Image Tone Edit BGA Analysis Save Image Save Image Process Image BGA Void Analysis Save Image R a New Action Mer To add a new action to the current component within an inspection program press the New button A window will be displayed in which the new action s type can be selected Press the Create button to create a new action Press the Cancel button to not create a new action When a new action is created it will be added to the bottom of the list if no actions are currently selected in the action list or it will be added directly after the last actio
31. This is done by selecting the required inspection program from the drop down list and then pressing the Edit button The samples components and actions of the program are displayed on the user interface Positional Calibration During Editing An inspection program has an internal coordinate system for each sample within it When the program is created this is aligned with the sample on the manipulator and therefore is aligned with the manipulator s coordinate system When the original sample is removed and a new sample is mounted on the manipulator then this sample will not be in exactly sample place The difference in position is corrected by using a Fiducial Calibration action on page 370 Effectively this translates the position of sample to the coordinate system of the sample within the inspection program When editing an inspection program it is vital that this translation between coordinate systems is preserved If the program contains one positional calibration action for example a Fiducial Calibration action then the user will be prompted to execute this action when the program is edited This is vital to be executed if the sample on the manipulator is not the original sample used to create the program If the original sample has been removed and replaced with another sample or even just placed back onto the manipulator then it is highly likely that the sample is not in exactly the same place This is true even when using registrat
32. This numeric field specifies the minimum calibration quality allowed If the fit of the calibration is less than this value then the position calibration will fail X ray Flux Calibration ray Flux calibration 100 25 y The reference image and the acquired image need to be acquired using the same X ray conditions to enable high quality calibration This is achieved by using an X ray flux calibration on page 28 This control selects the X ray flux calibration for this position calibration action If the reference image has been created and the X ray flux calibration is changed then the reference image will be deleted and need to be recreated Use X ray Flux Calibration Use X ray Flux calibration w It is possible to just use the current X ray conditions for a positional calibration action This is not recommended if repeatability of the inspection program is required This check box specifies if an X ray flux calibration is used by this positional calibration action Get X ray Conditions ray conditions Get If an X ray flux calibration is not being used then Get X ray Conditions button is enabled To record and save the present X ray conditions press this button User Manual XTMO26 A1 331 Inspections Image Exposure Image exposure seconds When acquiring images the time over which the image is captured is specified by this control Acquire Image Action This action acquires an image so that it
33. This optimises the user interface to the inspection procedures The range measurement tool is optional and is only available on systems that have a valid licence for the this tool 284 XIMO26 A1 User Manual Image Processing Images Folder Images Folder D Images The images folder specifies where images will be saved when using the Inspection function The images folder is set by pressing the Select button Quad Image Display Quad image display This checkbox specifies if the quad image display on page 171 function is enabled in the main X ray image window Save Map File with Image Save map File with image This checkbox specifies if a copy of the manipulator map image is to be saved within the image profile that is saved with the X ray image Save Images Enabled Save images enabled This checkbox specifies if saving of images is enabled This checkbox is only available when Inspect X is being run on a Validation Station User Manual XTMO26 A1 285 Image Processing Tone Control Tab General Tone Control annotation Camera Set Up Corrections Curves Show Original Tone Curve Histogram type 0 Solid Line Auto Tone Adjust Auto tone adjust image Cut Off 5D Tone curve to apply on auto tone adjust Enhance Processing to apply on acquisition Show Original Tone Curve Show Original Tone Curve C The Show Original Tone Curve check box controls if th
34. This shows a good measurement as the edges of the two pieces of material both start and end on the blue lines The measurement is made between objects that start and end on opposite blue lines If there are two edges that start and end on the same blue line then the measurement is made using the one whose path is longest 212 XIMO26 A1 User Manual Image Processing The objects whose edges do not follow this rule are outlined in yellow and will not be used for measurement This following image shows an example of this Edges do not start and end on blue lines This type of measurement is good for measuring gaps between material within an inspection program when the position of the material might vary slightly Region Naming and Selection Label Region The Label drop down list allows for the naming of new regions and the selection of existing regions Note that it is also possible to select a region by clicking upon one of its nodes within the image To name a new region type in a unique name into the Label text box and press the Add button To select an exiting region select the required name from the drop down list User Manual XTMO26 A1 213 Image Processing Selecting the Required Region Area When the Add button is pressed then a new measurement box is added to the image This measurement box may be adjusted to select the required region in a number of ways Click and drag side gt Control Key
35. for example BGA Void Analysis then if either the Greyscale or Greyscale with Tone options are selected and the image is saved the image analysis parameters are saved in the image profile If this saved image is re opened within Inspect X the image analysis is restored 162 XIMO26 A1 User Manual Image Processing JPEG Type Type JPEG JPEG 2000 If a compressed image file is required then select JPEG as the image file type Then it is possible to specify either standard JPEG or JPEG2000 JPEG on page 589 A lossy compressed see topic Lossy Compression on page 589 image file format supported by most image editing and display applications High compression values can cause many visible artefacts within the image This format is widely supported by third party applications JPEG2000 on page 589 A newer lossy compressed image file format only supported by recent image editing and display applications High compression values cause much less visible artefacts within the image and better image compression hence smaller images than standard JPEG This format is not very widely supported by third party applications JPEG Compression Compression J TAE Higher quality More compression The level of compression within a JPEG or JPEG2000 image file can be specified using the slider Numerically smaller values compress the image file less but retain better image quality Larger numerical values compress the fil
36. gt button Preview gt Pressing this button will cause the Open File dialog to increase its width to display a preview of the selected file in the file list Pressing this button will cause the Open File dialog to decrease its width to hide the display of the preview image A Look in IC2 ex O2 EE f PA cSP Analysis 0002 jpg 4 2 FA CSP Analysis jpg My Recent PA CSP Void Analysis jpg Documents Desktop i D My Documents My Computer a File name CSP Analysis ipa My Network Files of type All Image Files tif bmp ipal x Load image profile if available 900 x 900 pixels When the preview image is displayed then a left mouse click upon this preview image will zoom in on the image centred upon the point where the mouse click is made To reset the zoom so that the whole image is displayed left mouse click upon the preview image again When the required image file has been selected then press the Open button to open the image in the main X ray image window on page 169 To cancel the opening of an image press the Cancel button User Manual XTMO26 A1 159 Image Processing Image Profile Load image profile if available If the image profile file named lt image name extension gt xml is available in the same folder as the image then it can be loaded by selecting this checkbox The image profile file contains the state informatio
37. it is possible to run selected actions from the edit inspection program interface Run a Single Action To run a single action double click upon the required action within the action list This allows the user to assess the action s performance Running Component s Actions To run all the actions for a component then double click upon the required component within the component list This will execute each action for that component in turn To abort this you can do so by pressing the Cancel button 388 XIMO26 A1 User Manual How to Get More Out of Inspection Programs Maps and Inspection Programs The manipulator map image is very useful within an inspection program It can be used to easily identify where the image being viewed is on the sample and can also be used to display the status of a component after an inspection program has been run Adding a Map to an Inspection Program When an inspection program is loaded to be run it is very useful for the map image to be loaded This can be automatically done by adding a copy of the map image to the inspection program To do this follow these steps e Either create a new inspection program or open an inspection program for edit e Scan the map or load a previously acquired map from disk e Press the Get Map button on the inspection tab to get a copy of the map image e Save the changes by pressing the Save button When this has been done and the inspection program is loaded
38. list will be cleared as there will be no actions currently defined for the newly created component Upon creation of a new component it will be added to the bottom of the list if no component is currently selected in the component list or it will be added directly after the component selected Step and Repeat Component l Repeat When an inspection program is being programmed for components that have a repetitive pattern then the Step and Repeat Sample function makes programming easy Once the inspection actions for the first set of components have been programmed these can be easily replicated by selecting the components in the component list and then pressing the Repeat button Note it is possible to replicate actions for one or more components The step and repeat sample function will only work correctly for regularly spaced patterns of components If A the spacing between these patterns varies then the positioning of acquire image or visual check actions will not be correct When the Repeat button is pressed then a check is made on the actions defined within the selected components Step and repeat can only be performed when there is at least one Acquire Image on page 332 of Visual Check on page 334 action within the components inspection actions If is not true then an error message will be displayed and the step and repeat function will not be performed Providing there is at least one of these actions
39. mm Reconstruct Minimise ring artefacts Send email notification w add Multiple add to Batch Minimum time to acquire 00 00 55 Hours Mins Secs Operator ID Operator ID operatoriMcompan com If configured in the application properties on page 585 then the operator s identity will need to be input into the Operator ID text box When the operator ID is entered then the CT data set folder shall be contained within a folder named the same as the Operator ID If not then the CT data set folder shall be a sub folder of the CT data folder Note that if email notifications on page 430 are enabled then the Operator ID must be a valid email address 422 XIMO26 A1 User Manual 3 D CT Acquisition CT Data Folder CT Data Set CT Data Set CT Data Set CT Data Set CT Data Set CT Data Set Folder Folder Folder This text box will not be displayed if not configured within the application properties Reconstruction Computer Selection Necanithaaile saipa The reconstruction computer on which the volume is to be reconstructed is selected by the Reconstruction Computer drop down list The computers that are available in this list are controlled by the CT properties on page 427 CT Agent must be running on the selected reconstruction computer CT Data Set Name Data set name Rock Core 1 The CT data set name is set by the Data Set Name text box The data set name specifies the folder in which the CT data set is s
40. mypassword The Operator Password allows a user to perform all basic operations on the X ray inspection system such as generating X rays using the image processing and manipulator features The Supervisor Password allows a user to perform all basic operations on the X ray inspection system such as generating X rays and using the image processing and manipulator features In addition to the basic functionality supervisor level users have the privilege to change some system settings such as filament level tool visibility and macro creation The passwords are set using the Passwords window The Passwords window can be shown by selecting the Show Passwords menu item in the window menu on page 577 Require Operator Password F Operator Password Confirm Operator Password Reguire Supervisor Password Supervisor Password Confirm Supervisor Password User Manual XTMO26 A1 587 Passwords Password Definition Require Supervisor Password Supervisor Password esssseeeees Confirm Supervisor Password ssssesssses To define a password for a level of access check the relevant Require Password check box Then enter the new password into the Password text box and re enter it into the Confirm Password text box Then press the Save button To remove a password for a level of access uncheck the relevant Require Password check box and then press the Save button Changes made to passwords and the need for a pass
41. possible to remove each object added to the region of interest by pressing the Undo button This removes the last object each time the button is pressed Region of Interest BGA Count e Saved Regions of Interest The Inspect X software can save any defined region of interest for future use When a region of interest has been defined it may be saved by pressing the Save button When this is done a dialog is displayed to name the region of interest The name entered is added to the bottom of the list in the Region of Interest drop down menu To select a saved region of interest select the required name in the Region of Interest drop down menu and press the Load button This will load this region of interest and display it on the X ray image in the main X ray image window To delete a saved region of interest select the required name in the Region of Interest drop down menu and press the Delete button User Manual XTMO26 A1 277 Image Processing Information The panel at the bottom of the Region of Interest window displays information on how to add an object to the region of interest This information is updated depending upon the type of object on page 272 selected Unsharp Masking This image processing filter is a simple sharpening operator that derives its name from the fact that it enhances edges by subtracting an unsharp or smoothed version of the image from the original image The effect of USM is to lighten and darke
42. string received from the SR controller The decoded command and status strings are shown in the lower section of the tab The SR3 uA Offset is used to control the offset between the demanded uA and the actual UA returned This value should be used only for SR3 controllers SR4 controllers should have this value set to zero and the offset should be corrected within the SR4 controller s configuration The SR3 uA Correction Time is used in the function that applies the SR3 uA Offset This value should be used only for SR3 controllers The Correction Time is used to determine how to apply the uA Offset If the actual uA value returned by the SR3 controller is greater than 0 then the corrected uA value is set to the actual uA plus the uA Offset Else if the actual uA value returned by the SR3 controller is O and it is less than Correction Time seconds since the X rays were switched on then the corrected uA value is set to O otherwise the following is calculated Else if the actual uA value returned by the SR3 controller is O and demanded uA plus the uA Offset is greater than zero then the corrected uA value is set to 0 Else if the actual uA value returned by the SR3 controller is O and demanded uA plus the uA Offset is less than or equal to 0 then the corrected uA value is set to the demanded uA value User Manual XTMO26 A1 57 X ray Controller Information This panel mainly consist of data read out controls that give the current sta
43. then the Step and Repeat Window will be displayed and the manipulator will be moved to the first position within the actions list User Manual XTMO26 A1 311 Inspections Step amp Repeat Specify positions manually amp Y Specify positions by increment X amp Y Specify positions by increment Rotate 1 Move the manipulator to the position on the last Feature that corresponds to the First position on the initial Feature 2 Enter number of steps relative to the main 4 ray image and press OK Mote that this function works For regularly spaced identical Features Number horizontally Number vertically There are three modes of step and repeat 8 Specify positions manually 0 Es Y Specify positions by increment x amp Y 05 Specify positions by increment Rotate Step and Repeat Specify Manually When the manipulator is at the start position a crop box will be displayed on the X ray image This is used to draw a box around the first feature to be inspected within the component being replicated 312 XIMO26 A1 User Manual Inspections Once the crop box has been defined then move the manipulator to locate the same feature on the last component to be inspected within this crop box The more accurately this is done the better the positional accuracy will be for the replicated actions for the new components 1 Move the manipulator to the position on the last Feature that co
44. towards that end of the slider until either the button is released or the end of the slider is reached The present value of the shift is displayed as a numeric value For inspection systems that have an Xi X ray source i e a source with an integral generator then the X and Y shift needs to be set for every demand kV setting Inspection systems with an SR X ray controller then only one X and Y shift setting is required for all demand kV settings as large adjustment is performed mechanically To set the X amp Y shift values for a demand kV focus modulation needs to be applied to the image Focus modulation applies a sinusoidal modulation to the focus current in order to assist with alignment of the electron beam Note that this function is best carried out at high magnification and at a kV as close as possible to that which will be used on the system This modulation is applied to the current being passed through the magnetic lens of the X ray source thus modulating the focal length of the lens Modulation causes the image to pulse in and out of focus If the X ray source is correctly aligned then this is the only effect that will been seen If the X ray source alignment is not correct then the image will not only modulate in focus but will be seen to move across the screen When the modulation button is pressed it will stay depressed and apply a sinusoidal modulation to the X ray beam focus current The button stays depressed whilst
45. when mouse over label eee Disabled stage Reconstructing the Image Stack The reconstructed image stack is created by a separate application CT Agent This application manages the reconstructions requested by Inspect X and CT Pro to ensure that only one is done concurrently to ensure the fastest throughput Sample Setup The purpose of this stage is to set up the position of the sample to set the X ray conditions and to define the imaging parameters to be used to acquire the projection images on the manipulator is recorded as are the X ray conditions and the f When the user progresses from this stage the position of the sample imaging device parameters User Manual XTMO26 A1 457 2 D CT Acquisition Sample Setup Minimise ring artefacts Projections 3440 Optimise Frames per projection li sel Check that the sample is penetrated at all angles by iS pressing the Rotate button CT Profile Sample Setup for Standard 2 D CT Sample Setup Minimise ring artefacts w Lines per pass 1440 D Optimise Voxel size 0 120001 mm Movement per translation 0 192218 mm 180 degrees rotation Maximum sample radius 76 000 mm 7 Frames per projection Check that the sample is penetrated at all angles by pressing the Rotate button CT Profile Load Sample Setup for Translate Rotate CT Translate Rotate CT is not available on all 2 D CT inspection systems 458 XIMO26 A1
46. 0 5W Small change buttons 1UA Large change buttons 5uA If set to Intelligent then the response of the power or current control demand change buttons will vary depending upon the present demand Power Current Power Demand Less than 10W Between 10W and 20W More than 20W Current Demand Less than 100uA Between 100uA and 250uUA More than 250uA Small change buttons 0 1W 0 5W 1 0W Small change buttons 1UA QUA 5UA Large change buttons 0 5W 1 0W 2 0W Large change buttons 5UA 10UA 25uA This is useful if large values of power or current are used as the demand will increase quicker per button press than when set to Normal User Manual XTMO26 A1 35 X ray Controller Auto Conditioning Mode Intelligent Auto Conditioning The conditioning of the X ray source is the process to achieve a stable operating voltage and hence a steady image The conditioning process involves slowly ramping up the demand kV with the filament turned down and no beam current is generated There are two modes of auto condition within Inspect X The normal auto condition on page 25 mode is selected when the Intelligent Auto Conditioning checkbox is unchecked In this mode the user sets the kV to which the X ray source is to be auto conditioned and then Inspect X will control the process to achieve this The intelligent auto condition on page 25 m
47. 123 135 Capture Image Linear Detector 152 Capture Image using Averaging 135 Captured Image Processing 135 Centre Cross 221 Circle Annotation 221 Contrast 180 Dark Threshold 228 Define Region of Interest 228 231 237 246 252 259 Delete All Annotation Objects 221 Delete Preset Tone Curve 180 Dilate 226 Edge Detection 135 Emboss 135 Equalise 135 Erode 226 Excluded BGA Balls 231 Functions 176 General Properties 283 Geometric Distortion Correction 101 Grid 221 Histogram 135 180 189 Histogram of Specified Area 197 Histogram Type 283 Horizontal Edge Detection 135 Image Enhancement 281 Image Flattening 246 259 Image Notes 123 135 152 Intensifier Field Switches 123 135 Laplacian Edge Detection 135 Light Threshold 228 Live Histogram Linear Detector 152 Live Image 123 135 Live Image Linear Detector 152 Live Image Processing 135 Load Background Subtraction Image 196 Measurement 197 Measurement Type 197 Measurement Units 197 Measuring gaps between material 207 Index Measuring material thickness 207 Minimum Void Size 259 Multi Point Shading Correction Mode 102 107 Negate Tone Curve 180 Open Image 123 135 152 Package Void Analysis 259 Package Void Edge Threshold 259 Pad Array Void Analysis 246 Page Set Up 123 135 152 Preset Tone Curves 180 Print Image 123 135 1
48. 28 X tay RU Galas ta O OI E 28 A A nna cuteateancees 32 A eee ee a ope eae ey nee ee eee eee ee ace een 58 EXDOS UNG MA seh Si b 58 A a e e conan a a Laate sata haven cadena E 59 Manipulator Controller 61 dao A ooo ideas siest gable doce ees sale eseeateicgtetesaeieces 61 Homing Preparing the Manipulator For Use oooccooccccoccncccocnconcoconccncnnnnnnoncnnnonononnncnconcncnnnnnnnnnos 61 CONTOS A he ee ect a CEE ee eae Re ee Ree ene ee ee ees 62 Manipulator Controls ii 62 Measurement utes ei 2 amit caueectes deci eel dae tase Aia 67 LOCKING AOS AP nena a a baat inact te veins dxetoauit a siete taaoi daa 68 A O 68 User Manual XTMO26 A1 iil A o oo O A 69 Homing Preparing the Manipulator For Use oooccooccccoccnccnccnconcnnonccncnncnnnnncnonononononcnconcncnnnnnnnnoos 69 650 0 em ee er ae eee eee 69 Manipulator Axes CONTO eet ei eee ee ate eee 69 MEU id o 15 AXESOR coda 75 SOW SUCKS isisa aa labo eaten seem neta nacas aan edomiaa A vans vadataeh idan de aneauaanatauaneaaneammencese 17 A A A 78 ci A lee ee ee ea el 82 MaD kerena ed ed A 83 ZOON Gc pijo PA o A 83 Manipulador ea hae 85 Map Scanning aaa 85 Denne Map Scan Adri e A A E A O A a col A sien actin 86 SGA IAC a a a a a A a a e aE OE 87 Delete Scan A A T 87 EO ad Map Imago ineeie a a is 88 Save Mapa a iba 88 A E a a esses cam 88 WIAD MOS lia 88 SC ILS COS ras oe wate celal cake o cie liar caia 90 SEMEN CSAS Al UNC ii li trail den 90 Clear otat s INONMA
49. 418 FRECOMSFUCTION QUA co cai sed aches itn cced teases a hanes ene aa 418 Beam Hardening Corretto sirrin e Oui a A a a e alee ease 419 Noise Reducida a e ae A 420 o A E EE E AS 420 haaa EAEI ELELEE EE dara and 420 ROAS gE SrA S o aia 421 PRS IO No aca 422 ODS AON Di nose ie ada 422 Reconstruction Computer SelectiON ococccccocnccccnncoconnnocononononnncnnnnonanononanononnnnononnnnnnnnenanenenos 423 CT Data Set IN aMe a ais 423 A eine aa tseege E E sen akan samnestecteeann idea 423 AU o os 424 senda Mall Noticas lino dd 424 SO A A SRO E AE E E RP T 424 Add Multiple CT Acquisitions to Batch oocccccocccccccnccccnocononocononocanononacononannnnnnnnonanonenannnnos 425 AR A E N sacs 427 ACQUISITION Propeller a A 428 Reconstruction Tai a A as o 429 ti A erase teed taker amnddent 431 ESA Ar A a a tte aeltaxenn bene dine a tcaduadae tances tna ene heen 434 Cente OF ROION ao dde dd 435 A A EREE A ot Gah feline ae 436 Panero canoa eii A cif 438 10 How to Get More Out of 3 D CT 439 Optimising Your IMA a 439 User Manual XTMO26 A1 xi Choosing the Correct Position for Your Sample ccccceccccccseessccceeesseeeesseeseeeesseaseeeeesseaseeeeesees 440 How to Choose the Correct X ray Settings occcconccccococcocononcnnonnnnonoononcnononnnnononnnnnonnnrnnononrnnonnnnnns 441 Ensuring the Electron Beam is Properly Aligned ooooocccconncccccnnconccncnncononcnnnoncnnnoncnnnnncnnnnncnnnnnnnnnos 442 Reducing
50. 583 that may be opened from the Inspect X main menu on page 5 77 or the Properties on page 151 button on the Image Processing tool bar There are three sets of properties available that the user may set These are on separate tab panes a General Focus Controller With the exception of focus values property values are NOT saved until the Save button is pressed The Save button saves the updated properties to permanent storage so that they will be used the next time the Inspect X application is run The Revert button will reset all the properties that have been altered but not saved to their last saved value The Close button closes the Properties window 32 XTIMO26 A1 User Manual X ray Controller General x ray Stability Tolerances kw Tolerance 2 lig or oe ky UA Tolerance 2 o or 2 ua Minimum usuable uA 5 u x ray Flux Calibrations Time valid 24 hours x ray Demand Control ky Step Style Ge 1 kV Steps 5 kv Steps u Step Style Normal Intelligent Auto Conditioning Intelligent Auto Conditioning Radiation Survey Mode Beep whilst X rays are on Beep frequency seconds Engineer Level Pre Warning Delay mm seconds X ray Stability Tolerances ky Tolerance 7 ee U4ATolerance o s a A number of functions within Inspect X require the X rays to stabilise for example CT acquisition Inspect X checks for stability by comparing the demanded kV and uA va
51. A1 User Manual 2 D Inspections Sample Serial Numbers Serial numbers 123 456 709 i 234 567 090 lw When running the 2 D inspection program then the serial numbers of the samples need to be input This identifies the wall measurements with the individual samples The example above shows a program that inspects three samples per program run The orientation of the samples within the sample holder is shown below This is viewing the manipulator s turntable from above a sample 3 x ray Source rT OJ User Manual XTMO26 A1 527 2 D Inspections Sample 1 is the closest to the X ray source and its serial number is to be entered in the top most Serial Number text box Sample 2 is the next sample clockwise around the turntable from sample 1 Its serial number is entered into the next Serial Number text box Subsequent samples clockwise are entered into subsequent text boxes The checkbox next to the Serial Number text box must be checked if the sample is present in the sample holder on the turntable If a sample position does not contain a sample then uncheck the check box next to the relevant Serial Number text box When the program is run it will only analyse those positions that are marked as containing samples Running the Program Run To run the program after entering the serial numbers of the samples press the Run button If any of the shading corrections within the 2 D inspection program require to be update
52. Adaptive check box The Search Width may be specified manually and the Calculation Errors minimised or it may be optimised automatically by pressing the Auto Set button next to the Search Width numeric Completing the Wall Measurement Definitions When the wall measurements have been defined and the thresholds have been calibrated then the measurements may be updated to specify the minimum and maximum allowable measurements To select a wall measurement either click upon one of its corners on the slice image within the X ray image window or select the required wall measurement by selecting it in the Label drop down list Selecting Another Slice for Wall Measurements To select another slice to define wall measurements press the Select Slice button Completion of Wall Measurement Definition Once all the wall measurements have been defined then press the Done button The 2 D Inspection window will now re display the program in edit mode To save the wall measurements within the 2 D inspection program press the Save button The program is ready to run 520 XIMO26 A1 User Manual 2 D Inspections Editing a 2 D Inspection Program When a 2 D inspection program has been created it may be edited to alter any of its parameters This is done by selecting the program in the 2 D Inspection Program drop down list and then pressing the Edit button The 2 D Inspection window then displays the information about the program 2 D Inspection
53. Emboss Level Emboss level If the image processing to be applied is set to Emboss then this control is enabled The level of emboss applied is selected by this control Tone Edit Action This action applies a specified tone edit to an acquired image Tone Edit Tone curve Get User Manual XTMO26 A1 337 Inspections Get Tone Curve Tone curve Get To get the current tone curve on page 180 press the Get Tone Curve button This makes a copy of the current curve within the image tone adjustment control Binarise Image Action This action applies image binarisation to an acquired image Binarise Image Pararmeters Get Get Binarise Image Parameters Pararmeters Get To get the current binarise image on page 189 parameters press the Get Parameters button This makes a copy of the current parameters within the binarise image edit control Psuedo Colour Image Action This action applies pseudo colour to an acquired image Pseudo Colour Image Pararmeters Get Get Pseudo Colour Image Parameters Pararmeters Get To get the current pseudo colour image on page 193 parameters press the Get Parameters button This makes a copy of the current parameters within the pseudo colour image edit control 338 XIMO26 A1 User Manual Inspections Background Image Subtraction Action This action applies to an acquired image subtraction using a specified background image Background Image Subtraction Get para
54. Focus 37 Current control 11 Electromagnetic Alignment 37 Exposure Timer 58 Focus adjustment 11 Focus Fine Adjustment 19 Focus modulation 37 Focusing 37 General Properties 33 kV control 11 19 Operator advanced operator 11 Optical and X ray Focus 37 Physical Alignment 37 Power control 11 Power or Current Control 19 Properties 32 Switching X rays on and off 11 19 X ray Flux Calibration 11 19 X ray Intensity 19 X ray Penetration 19 X ray status 11 19 X ray Radiation 3 X ray Stability Tolerances 33 NIKON METROLOGY EUROPE NV tel 32 16 7401 01 sales_europe nikonmetrology com NIKON METROLOGY GMBH tel 49 6023 91733 0 sales_germany nikonmetrology com NIKON METROLOGY SARL tel 33 1 60 86 09 76 NIKON METROLOGY NV Geldenaaksebaan 329 b 3001 Leuven belgium phone 32 16 740100 fax 32 16 74 01 03 info nikonmetrology com NIKON METROLOGY INC tel 1 810 2204360 sales_us nikonmetrology com us nikonmetrology com www nikoninstruments com NIKON METROLOGY UK LTD tel 44 1332 811349 sales_uk nikonmetrology com sales_france nikonmetrology com More offices and resellers at www nikonmetrology com NIKON CORPORATION Shin Yurakucho Bldg 12 1 Yurakucho 1 chome Chiyoda ku Tokyo 100 8331 Japan phone 81 3 3773 9026 fax 81 3 3773 9062 www nikon instruments jp eng NIKON INSTRUMENTS SHANGHAI CO LTD tel 86 21 5836 0050 tel 86 1
55. Grey Level numeric or by sampling it from the image To sample the grey level press the Sample check box button with the pipette icon next to the Material Grey Level numeric Then click upon a pixel within the slice image in the main X ray image window that is within the body of the turbine blade The grey level that defines the background is set in a similar manner using the Background Grey Level controls If sampled from the image then click upon a pixel in the background of the image At this stage it is recommended that the Threshold for Edge is set to 50 and the Adaptive checkbox is unchecked Threshold for Edge The Threshold for Edge specifies how the measurement algorithm finds the edges of the turbine blade The threshold is a percentage that the algorithm uses to find the edges Material Grey Level paveeeeecceeecceeterceeeeeeestereeecacesetenscccmcscctmesssensessenenssemecccamessannesssemesscemenssemessssss Edge Threshold i Threshold for Edge Background Grey Level pes Pixels User Manual XTMO26 A1 513 2 D Inspections The edges of are found by calculating the difference between the background grey level and the material grey level The Threshold for Edge specifies the percentage of this difference that is added to the background grey level to find the true edge The Threshold for Edge defaults to 50 and it is recommended that this A figure is normally used Adding a Wall Measurement To add a
56. Histogram Live Processing mode The grey level information in the histogram can be used to help set the pseudo colour thresholds As a pseudo colour threshold slider thumb on page 590 is moved an indicator is drawn upon the grey scale at the bottom of the histogram to show the current grey scale value of the slider Grey Level 48125 Pixels 7949 Max 65260 Min 1536 Average 22650 Std Dey 26666 0 When the mouse is moved over the body of the histogram the grey level information corresponding to the mouse position is displayed below the histogram The information displayed is the grey level and the number of pixels in the image that contain that grey level The other information displayed describes the grey levels in the image The values displayed are the Maximum grey level in the image the Minimum Grey Level in the image the Average Grey Level in the image and the Standard Deviation of the Grey Levels in the image Grey Level 12600 Pixels 120 Max 65260 Min 1536 Average 22650 Std Dey 276666 0 So that specific grey levels may be marked for future use or tracking guidelines may be added to the histogram To add a guideline move the mouse to the right or left edge of the histogram The cursor will change to show that a guideline may be added Click with the left mouse button and whilst holding it down drag the guideline to the grey level required It is possible to add up to 4 red guidelines and 4 green guidelines to the histogram Red g
57. Maximum measurement numeric Deleting Measurements If a range measurement is no longer required on the image then select the required measurement in the Label drop down list and then press the Delete button To delete all range measurements on the image then press the Delete All button Editing a Measurement All parameters except the name of a measurement can be updated To do so select the required measurement in the Label drop down list and then update the required measurement parameters 216 XIMO26 A1 User Manual Image Processing Ignoring Intermediate Objects Ignore intermediate objects There will be instances where there is some object in between the edges to be measured If measuring material thickness this may be a hole in the material If measuring the gap between material then this may be another object The edges of intermediate objects may be excluded by checking the Ignore intermediate objects checkbox Gap FAIL Min 6 559 mm Object in between edges whose distance being measured Gap FAIL Min 1 544 mm With Ignore intermediate objects selected User Manual XTMO26 A1 217 Image Processing Defining Thresholds Material grey level 26360 gt Auto Set Background grey level 53760 Threshold For edge 50 JSA Adaptive w Search width 6 Auto S5et When setting up the measurements it is recommended to initialise the thresholds in the Parameters section
58. N 304 Add Recorded ACIONS atch ots di 304 Gel Manipulator Maps aa 304 EdC COMPICtS 3 sera cu in oict o iia 305 EMOS lid 305 Allowable Falles o o A a oa 305 Sample Manage menta ad 306 NEW Sa yal Seed eho hota ete uote eh ea pastel eal Ree cote ncn heals 306 Step and Repeal sample E A A oak oe 306 Delle Samil ed card 310 A aad eaten ahd eet net ad co ctab st mud we oich abo k cts Seat S 310 Component Management 2s iriiri iina a eee ee 310 New COMPARA ete ee a dee ee eee eee ee el 311 Step and Repeat Component sina eaten ee nie eh ee ee ee 311 Delete COMPONENT ieee onto 314 Reorder Components aunar 314 Execute Actions for Component ans eet 314 Acton MAA MM di de dia US 315 NE A io 315 Step and Repeat Actions ensia EE a el wee ee 317 Delete FACTION ooh s sae eee ei o o ea 321 Reorder ACIONS nite aeertietie ketene eee ee le ea et ee ee ee 321 ACHION CODY and Pastel 321 EXEC ACM edo ctvab ee 322 ay Fux Calibration Acute 322 Fiducial Calla ds o taaan 324 Position CalibratlOn ACO ai o o ls a ie ENdaoS 328 Acaguire IMage SACOM ia Raa 332 MIsual CHECK ACU OM esua fetes eae octth bide aa naam acca cous br a a eels io 334 Process Mage ACION iia NA AA a 336 TOWNS EG FAC UO cta da aid as 337 Bm anse Image ACUM sia NA cudtacaetinwes 338 Psu do Colour image ACON inicio id 338 Background Image Subtraction ACtION ccccooncnncccccnncononcnnnnoncnnonannnnononcnnonnnnnnnnnnnrnnononrncnnaninnos 339 MU A A 339 Range Measurement C IO
59. Noise in the Projection Images oocccoocnnccncccconcnconcnnnnncncnnncnnnnncnnnnnnnnonrnnnnnncnnnrnnonnrnnnnnos 443 Calculating the Number of Projections ccccccsssceccseseeecseseeeccecescsaseeeceegeeecseaseeessageeessegeesesages 445 Selecta Ara FINA ON ni a taza 446 When Should Use an X ray Filter and What Does it DO oooocccccoccccccnoccoconoccnonnoconconanonnononons 446 Beam lar eMail a a N 448 How Do Know What Type and Thickness of Filter to Use ococconcccccccccococoncnnoconcnconanonnos 450 COMMPEMS ATOM ecos iaa 450 ATLAS CN scat decease nd 454 11 2 DCT Acquisition 455 Reconstructing the Image Stack gui ot nied Dor dis 457 SPIE U Revenant ae ae O a a 457 Minimise Ring Artefacts adeudo aos 459 A A E eee ee 461 Mit A e NP 461 100 Degrees A suai cyatomatyadnatauidetaisda ited vain Seu andes deter a Tee 462 Sampie RAS le ll a 462 Sample cao io 1118 ft een oe ne eee oe ene ne eee eee eee 462 Seting the X ray CONOS mesadas cid 463 Load CT Pr ONG onnan a ert ORF ree eee een a eee oe 464 Hi Ee RE AO a ee 465 Minimum Frames for Reference IMages ccccooccnnccccccnconoccnncnnnnononnnnnnononcnnnnnnnnnnnnnncnnonnnrnnonnnnnnos 466 Disable Shading Correction 2D occccocnnnococccnncccnoconcccanonoconcnnnnnnnnnnonannnnonnnnnnnnnannnnnnannnnenananess 466 Shading Correction gt SlSCUOMN sresti tallas 466 Bt A thes 467 Scatter Free Radio PND aeaa aa o Iaei 468 PADI Flux NormalisatloN tel es a 46
60. O o _ _ _QQ_ IH Length The length of the wire is the distance is a straight line between the two ends of the bond wire shown in red in the above diagram The separation distance in light blue is the distance perpendicular to the length line in red of the point furthest from the line The wire sweep measurement is expressed as a percentage Sweep Percentange di 50 Ho Add a Measurement 1 Click on the start of a bond wire and hold the mouse button Eo drag the line to the other end of the bond wire 2 Then adjust the mid point to the maximum extent of the wire SIMBED Remove a Measurement Select the required measurement and press the Delete button Delete Remove All Measurements Press the Delete All button Delete All Defining a Wire Sweep Measurement To define a wire sweep measurement click on one end of the bond wire and hold the left mouse button down and drag the line to the other end of the bond wire User Manual XTMO26 A1 267 Image Processing Whilst any adjustment is made to a bond wire measurement it will be drawn in a semi transparent colour to help the correct placement of the points Now that the ends are set then the middle point needs to be adjusted to place it on the point in the bond wire furthest from this initial line To do this click upon the middle point and drag it to the required position whilst holding the left mouse button down Whilst the measurem
61. Other materials may be used for special cases Contact Nikon Metrology if you have a particular problem in this area Alternatively another filter that can be used can be made from the material being inspected The filter would be typically up to 20 of the thickness of the sample Note that if you have added a filter you will have to re check that the X ray conditions satisfy the two requirements Achieving the best image is an iterative process though with experience the process will be shorter In the example above it can be seen easily from the histogram that the X rays are not saturating the image as the peak at the white end of the histograms the right hand end is not at the maximum grey level i e the left hand edge of the histogram If the sample being inspected is more uniform in its dimensions it will be necessary to move the sample completely out of view to check that the image is not saturated as maximum intensity occurs at the centre of the image 408 XIMO26 A1 User Manual 3 D CT Acquisition Setting the X ray Conditions for Dual Energy If dual energy acquisition has been enabled then two sets of X ray conditions have to be recorded Dual energy acquisition allows the collection of data for a sample using two different X ray conditions The comparison of the CT data sets collected can be used to measure the response of different materials to changes in the X ray conditions For example this allows for materials of simil
62. Package void analysis without image flattening Package void analysis with image flattening User Manual XTMO26 A1 263 Image Processing Overall Voiding Fail Overall voiding Fail i 20 ES T The analysis can be passed or failed on two criteria the overall voiding within the region of interest and the maximum allowable size of individual voids This control specifies the overall allowable percentage of voiding Note that voiding within the region of interest is colour coded on the image Green areas are voids that are less than the Single Voiding Failure percentage voids larger that the Single Voiding Failure percentage are coloured orange and their percentage is displayed with the single largest void greater than the Single Voiding Failure percentage is coloured red The overall voiding identified is displayed in the upper left hand corner of the image Single Voiding Fail Single void Fail i 2 Yo The analysis can be passed or failed on two criteria the overall voiding within the region of interest and the maximum allowable size of individual voids This control specifies the allowable percentage of voiding for each single void Note that voiding within the region of interest is colour coded on the image Green areas are voids that are less than this percentage voids larger that this percentage are coloured orange and their percentage is displayed with the single largest void greater than this percentage is coloured red The o
63. Position Shading Correction Safe Position Safe position set w With the samplets mounted move the manipulator to a position where Set there nothing in view and then press the Set button When a 3 D CT Batch program is run it is possible that the shading corrections require to be updated The length of time that a shading correction is valid is specified in the image processing properties on page 294 When a program is run and the shading correction needs to be updated then the samples must be out of view when the correction is updated This may either be done by prompting the user to remove the samples or by automatically moving them out of view If it is possible to move the manipulator so that no sample or other obstruction is in view then this position may be set as the Shading Correction Safe Position If the program has a safe position set then when the shading corrections need to be updated when the program is run the manipulator will automatically move to this position and the shading corrections can be updated This avoids the user having to intervene to update the shading correction To set the safe position check the Safe Position Set checkbox Then move the manipulator to the position where no sample or other obstruction is in view and then press the Set button User Manual XTMO26 A1 493 3 D CT Batch Save Program When a 3 D CT Batch program has been edited then the changes are saved to disk by pressing
64. Position The Absolute text box displays the position of the manipulator in either millimetres or inches depending on how this is set up in the Inspect X Engineering Tool for linear axes and degrees for tilt and rotate axes Copy Absolute Position to Relative Position The copy gt button copies the Absolute position to the Demand position This is used when setting up a demanded position for one or more axes but not all axes In this case the copy button is pressed for those axes that you do not wish to move Once the demand positions for the axes have been set moving the manipulator is started by pressing the Move on page 77 button Demand Position This is the demand position for the axis specified in millimetres or inches for linear axes and degrees for tilt and rotate axes The moving of the axis only happens when the Move on page 77 button is pressed The demand position may either be typed into the box or incremented and decremented by pressing the up and down buttons for the box Relative Position The Relative text box displays the position of the manipulator relative to the position when the zero gt 0 button was pressed for this axis Zero Relative Position Pressing the zero relative position gt 0 button will set the relative position for the axis to zero This is useful when measuring distances using the manipulator If the zero All button is pressed then the relative positions for all axes will be set to zero
65. Positive ULL Negative User Manual XTMO26 A1 187 Image Processing Auto Tone When the Auto button is pressed then the histogram of the grey levels of the X ray image is analysed The tonal range of the image is then adjusted by automatically selecting the correct white and black ends of the tone curve so that the dynamic range of the X ray image fills the dynamic range of the monitor The number of pixels to cut off from the ends of the image s histogram when calculating the tonal range of the X ray image is specified in the Image Processing Properties on page 283 Preset Tone Curves Tone Curve Make Image Lighter wt When a tone curve has been set it is possible to save on page 188 this for future use Saved tone curves may then be easily recalled by selecting the name of the required tone curve from the drop down menu When a tone curve has been selected from the list the displayed tone curve on page 181 is updated It is then possible to manually adjust this curve Whenever the displayed tone curve does not correspond exactly to a saved preset tone curve the drop down menu control display the legend Custom When the Inspect X software is installed a number of example preset tone curves are provided for use Save Tone Curve Save When a tone curve has been set it is possible to save this for future use by pressing the Save button A dialog is displayed in which the name of the
66. Required Region Area When a new wall measurement is added to the image by pressing the Add button a rectangle is added to the centre of the X ray image as shown above The square node points of the rectangle need to be moved to define the region in which measurements are to be made Note that the cyan lines must intersect the material or gap to be measured User Manual XTMO26 A1 515 2 D Inspections If the cyan lines intersect correctly then a measurement will be made and the contours will be drawn in red green and orange if the thresholds have been set A properly defined wall measurement If the dark blue lines intersect the material then this is a bad wall measurement and any contours found will be drawn in yellow An incorrectly defined wall measurement cyan lines must intersect the turbine blade material The cyan lines that define the region must intersect only two edges of turbine blade If they intersect more then the wall measurement cannot be made and any contours will be displayed in yellow F An incorrectly defined wall measurement cyan lines must intersect the turbine blade edge only twice The wall measurement must have the cyan edges bisecting the edges of the turbine blade and must be on opposite sides of the wall or gap being measured If the contours within the measurement region are yellow then it is not measuring the correct region 516 XIMO26 A1 User Manual 2 D Inspections La
67. The Unlock buttons may be used to unlock the relevant sub system if it has been left in a locked mode by the software for any reason Numeric Control Delay Delay on key down in numeric controls before value entered 29n0s This control specifies how long a delay after a character has been entered at a numeric entry box that is executed before the value is automatically applied This may be set to the following values Delay on key down in numeric controls before value entered 7 29n105 If the value Off is selected then the value in numeric text boxes will only be applied after switching focus to another control or by manually pressing the Enter key Enable Floating Windows Enable floating windows If this checkbox is checked then certain parts of the user interface can be floated as a separate window If not required then clear this checkbox 986 XIMO26 A1 User Manual 20 Passwords The Inspect X software can be protected by the setting of passwords which have to be entered before the software is launched There are 2 levels of access to the software The default passwords when the software is installed are as noted below It is highly recommended that the default passwords are changed e Operator For operator level access No default password e Supervisor For supervisor level access supervisor Enter password Passwords for the Inspect X software are case dependent MyPassword is not the same as
68. UON iio tod ii 90 saved Manipulator POSINONS oi iia 90 Select Saved POSI os al alii 91 New Saved POSION SELL dais 91 Delete Saved OSIMOM DO di 91 sed FOSON Si odo cd 92 Add Saved OSO cin O baii 92 REMOVE Saved ROS a ee tne deeded 92 ATV AGO MIES RO Tate CONTO aos didas 93 Hand Rotate AXES CONTO en lo te DS 94 TULA alles 96 A E AAA A E aca hicace sce E Garcinia tee tooo 96 0 jeg ro hte dista paar em ee tege ore ee eR a cle ee eRe Cee ne 97 Sample He dns a A a 98 6 Image Processing 101 Mage Comecin Sus la clan 101 Geometric Distortion CorrectiON ccooonccconnnococncoconncoconnnononnnononononnnonannnonnnnnonannnonnrnnonanonnnnnonanas 101 Shading COMEN o andas 101 Bad Pixel Corre clon a O e o ette ies Edo de 101 Shading COMECUOM nai alta linia 102 Standard Shading CorrectiON occcccocccncoconcnnccnnnnncnnononononennnnnnnonnonnncnnnnnnrnnnnnnrnnnnnnnrnronarnnonnrnnnnnass 103 Multi Point Shading Correction cccccooncnccocccnconoccncononcnnononcnnconancnnononcnnononnnnonnrrnronnnrnnnnnnrnnronanenns 107 Bad Pixel C On CCll OM st o ls lille 115 OA ANION A A O A tioiae 115 Mage ACQUISITION ass noia 116 Bad Pixel Correction Flat Panel Calibration Dialog ccccoooccococoncnncononononononnnnonnnncnnanonoos 118 Mage Sel CUO Mesina it E N e Aaa 118 Bad Pixel Parameter Setting ccccccsssccccesececeeseeeceesscecseeseeecsaueeecseaseeseeeeessageeessegeeesssaeeesseas 119 Non Linear Pixel Identification
69. User Manual 2 D CT Acquisition Minimise Ring Artefacts Minimise ring artefacts Iw There are two methods of collecting a data for reconstructing a 2 D slice of a sample standard 2 D CT and Translate Rotate 2 D CT If the Minimise Ring Artefacts checkbox is not checked then Standard 2 D CT is performed of the checkbox is checked then Translate Rotate 2 D CT will be performed A Translate Rotate CT is not available on all 2 D CT inspection systems Standard 2 D CT Standard 2 D CT rotates the sample and collects a sinogram on page 590 The sample must be contained within the X ray fan beam during this process The advantages of this type of acquisition is that the data can be collected at any magnification providing the whole sample is within the X ray fan beam Pa X ray Source User Manual XTMO26 A1 459 2 D CT Acquisition Translate Rotate 2 D CT When collecting data for Translate Rotate 2 D CT the sample is moved along the X axis from being completely outside the X ray fan beam on one side to being completely outside on the other side of the X ray fan beam This process is repeated a number of times with the sample at a different rotation angle RO X ray far beam Yr _ _ _ F Object moved through X ray Source AA The advantages of Translate Rotate 2 D CT is that ring artefacts are minimised and that samples wider than the detector may be scanned However at lower magnifi
70. X amp Y shifts will be automatically adjusted and then the X ray flux calibration is recalibrated for a second time If the checkbox is unchecked then the action will just fail after the first attempt to recalibrate if the correct uA cannot be determined The Recalibrate X amp Y shifts checkbox and function is only available on the XT V 160 and XT V 130 systems Database Properties General On Failure Save Image Action x ray Flux Calibrations Database Database Support Validation station support Manage database size w Delete records after 28 gt day s These properties control the database file used to share results data from inspection programs 364 XIMO26 A1 User Manual Inspections Validation Station Support Validation station support If the X ray inspection system is being used paired with a validation station then this checkbox should be checked This ensures that when an inspection program is run that the results data is recorded in the database that is shared with the validation station This allows the user of the validation station to review the inspection results data If a validation station is not being used then this checkbox should be unchecked Database Size Control Manage database size w Delete records after aq bt days When a validation station is being used then the database file used to share the inspection program results data can grow very large quite quickly
71. X software To quit the Inspect X software press the Exit button 6 XIMO26 A1 User Manual Getting Started When the Run button is pressed the Inspect X software will initialise itself This takes a small amount of time during which a splash screen is displayed showing the progress of the initialisation NIKON METROLOGY VISION BEYOND PRECISION aek Inspect X Initialising image tools Copyright 2004 2011 Nikon Metrology NW The splash screen will automatically dismiss itself at the end of the initialisation and the main Inspect X screen on page 9 depending upon the access level will be displayed User Interface Language Selection Select language English e This control allows the user to select the language in which to display the user interface of Inspect X User Manual XTMO26 A1 7 Getting Started Configuration Selection Select configuration Area e Area Linescan If the inspection system has more than one configuration for example swappable transmission and reflection targets for the X ray source then the configuration selection control is displayed If the system only has one configuration then this control will not be displayed Select the required configuration that matches the hardware configuration required in the Select Configuration drop down list Operator ID Enter operator ID If configured then the operator ID will need to be entered into this text box This is used to
72. XIMO26 A1 User Manual 3 D CT Acquisition Manual Calculation Manual Calculation Replace the sample with a calibration rod of a suitable size and then press the Acquire button Two images of a calibration rod are required to manually calculate the centre of rotation The images of the rod are collected with the rotation angle of the sample 180 degrees apart To acquire the centre of rotation images replace the sample with one of the calibration rod supplied with the inspection system In the viewed image the rod must appear to be a reasonable thickness e more than a few pixels in width and the edges of the rod must be in view Normally a thin rod will be used when using high magnifications so that it does not fill the whole image and a thicker rod will be used at lower magnifications Then press the Acquire button to collect the images A rod image for calibration User Manual XTMO26 A1 417 3 D CT Acquisition Reconstruction Setup The reconstruction set up stage of the step by step user interface defines the parameters on how to reconstruct the projection images into a 3 D volume Reconstruction Setup Reconstruction quality 100 Beam hardening 5 Moise reduction 2 Interpolation Yolume of Interest To define the volume of interest press the Acquire Acquire button to acquire the images Specify the required volume by changing the crop boxes on the images
73. a centre point to the arc edge This value R 0 655 mm is shown below the manual fit value The sensitivity of the edge detection is controlled by the Edge Detect Controls on page 206 Measurement Type Type Linear Angle Edge detect Line O Edge detect Arc This control allows the selection of four types of measurement that can be performed using the measurement function These functions all require calibration for any linear measurements while angles do not require calibration unless there is a difference between vertical and horizontal scaling due to looking at the sample from a side angle as opposed to overhead The functions are e Linear measurements e Angular measurements e Edge Detect Line e Edge Detect Arc Both Edge Detect functions provide both linear and angular measurements as described in the control User Manual XTMO26 A1 203 Image Processing Add Measurement To Image Notes Add To Motes To add the measurement to the image notes press the Add To Notes button Profile Grey Level 48239 Max n2459 Min e149 Average nine Std Dey 15373 2 This data read out gives the information about the grey levels of the pixels described by the line from the red to the blue node The profile shows the grey levels of the pixels If the mouse is moved over this profile the Grey Level informational box below the profile will read out the grey level for that pixel When measuring linear meas
74. are PTHs that are those that are filled greater than the Fill Threshold percentage and PTHs that are filled less than the Fill Threshold percentage are coloured red User Manual XTMO26 A1 255 Image Processing Tilt Angle Tilt angle 45 w degrees On inspection systems that do not have a computer controlled tilt axis this control is used to specify the angle of tilt used when the image being analysed was acquired Calculate Results Calculate When the parameters that define the PTH Fill analysis have been entered press the Calculate button to calculate the results of the analysis A Pass or Fail indicator is shown The X ray image is updated to indicate the PTH Fill analysis PTH fill analysis 256 XIMO26 A1 User Manual Image Processing View Results View Results When the PTH Fill analysis have been performed to view a detailed analysis press the View Results button The full results consists of a detailed analysis for each of the PTHs found in the image This detailed data is displayed in a separate window X Plated Through Hole Fill Results ole 02 08 2007 15 20 34 Passed PTHs 37 Failed PTHs 1 Missing PTHs 2 PTHID Status Height from Width rom Percentage Passed 2 13 0 90 100 Passed l 2 17 0 59 100 Passed f i 2 16 0 99 100 Passed i 2 29 0 87 100 Passed i i 1 98 0 90 ad Passed 2 23 0 85 100 Passed 2 15 0 87 Passed A 1 95 0 85 Passed 1 94 0 62 Pass
75. arm if detachable or the manipulator does not have a tilt or rotate axes on a manipulator with a cantilevered arm Pressing the Horizontal button will set the tilt and rotate axes to a horizontal position Home FE Pressing the Home button will cause the manipulator to perform a homing operation To select which axis to home press the option button next to the home button A menu will be displayed to show which axis is homed by pressing the Home button On the XT V 160 system there is just a Home button and pressing this automatically homes all the axes yi a All Axes A Y E Rotate Tilt No other operation can be performed using the manipulator until the homing operation has completed or has been stopped by pressing the Stop button Whilst the homing operation is in progress a warning is displayed Manipulator homing in progress Please Wait Before a homing operation is performed to avoid damage to either the manipulator or other materials be sure that there are no samples tools etc in the cabinet that may collide with the manipulator This is particularly important when a tilt and rotate arm is fitted Load Position PT Pressing the Load button will move the manipulator to a position whereby it is easy to load sample to be inspected onto the manipulator tray If a detachable tilt and rotate arm is fitted then the tilt and rotate axes are also set to a horizontal position User Manual XTMO26 A1 63 Ma
76. auto conditioning of the X ray source Xi Auto Conditioning Parameters EY will be increased if leakage is below 20 uA EM will be reduced if leakage is above co uA Leakage will be checked every 200 ms ky will be changed in steps of i kv Condition above the demand kw by Ey Restore Defaults The Xi X ray source conditioning routine is performed in software and is configurable These controls configure the behaviour of the conditioning routine The kV will be increased if leakage is below field defines the uA threshold below which the auto conditioning routine will start to increase the kV demand if it has not reached the required kV demand The kV will be reduced if leakage is above field defines the uA threshold above which the auto conditioning routine will start to decrease the kV demand The leakage will be checked every field defines the time in milliseconds between consecutive checks of the uA and kV levels The appropriate action will be taken of the auto conditioning routine at each check point Decreasing this sample time will make the conditioning routine more hard i e rigorous The kV will be changed in steps of field defines the kV increment or decrement that may be applied as required at each check point User Manual XTMO26 A1 55 X ray Controller The Condition above the demand kV by field defines the number of kV over the normal demand kV to which the source will be auto conditioned Auto conditioning an X
77. axis position into the relevant Axis Position numeric control or press the Set button to do this automatically Then move the Y axis X axis on the XT V 160 system so that other end of the sample is being viewed Enter the axis position into the relevant Axis Position numeric control or press the Set button to do this automatically 426 XIMO26 A1 User Manual 3 D CT Acquisition Specifying the Overlap Between CT Volumes As the CT volumes will need to be aligned in a volume viewer application it is best to specify an overlap between the volumes CT data set overlap 0 060 mm Mumber of CT data sets This value is entered into the CT Data Set Overlap numeric control The number of CT data sets that will be added to the 3 D CT batch program is displayed in the Number of CT Data Sets read out Adding the CT Profile to the Batch Program When the data has been correctly entered the CT profiles are added to the 3 D CT batch program by pressing the Add To Batch button This will add the CT profiles to the currently selected 3 D CT batch program If no program is currently selected in the 3 D CT batch program window on page 487 a prompt will be displayed to request that a program is selected CT Properties There are a number of properties that control how CT acquisition functions These properties are available within the Properties Window on page 583 that may be opened from the Inspect X main menu on page 577
78. axis is allowed e Movement upon the tilt axis is not allowed as the axis is locked Rotate Axis Control Rotate 0 0 m To finely adjust the rotate axis from the user interface of Inspect X use the rotate axis controls If the Plus button is clicked the rotation angle will be increased by 1 degree If this button is pressed and held the rotate angle will start increasing until the button is released If the Minus button is clicked the rotation angle will be decreased by 1 degree If this button is pressed and held the rotate angle will start decreasing until the button is released 96 XIMO26 A1 User Manual Manipulator Controller To lock movement on the rotate axis press the Lock button When pressed the button will stay depressed to show that movement on that axis is inhibited To re enable movement press the Lock button again and the button will be released Movement upon the tilt axis is allowed Movement upon the tilt axis is not allowed as the axis is locked Orbit Control Speed E y k When a sample being inspected is being viewed at a tilt angle of greater than 0 degrees then it is possible to view the sample from all rotation angles by orbiting Orbiting rotates the sample so that different views can been seen There are two modes of operation Orbit Once and Orbit Continuous Orbit Once The Orbit Once mode will rotate the sample at the set speed through 360 degrees of rotation and then will sto
79. axis to home press the option button next to the home button A menu will be displayed to show which axis is homed by pressing the Home button Rotate Tilt 70 XIMO26 A1 User Manual Manipulator Controller No other operation can be performed using the manipulator until the homing operation has completed or has been stopped by pressing the Stop button Whilst the homing operation is in progress a warning is displayed Manipulator homing in progress Please Wait Before a homing operation is performed to avoid damage to either the manipulator or other materials be sure that there are no samples tools etc in the cabinet that may collide with the manipulator This is particularly important when a tilt and rotate arm is fitted Set Horizontal Supervisor l Horizontal The Horizontal button will not be available if the manipulator is not fitted with a tilt and rotate arm if detachable or the manipulator does not have a tilt or rotate axes on a manipulator with a cantilevered arm Pressing the Horizontal button will set the tilt and rotate axes to a horizontal position Load Position y Pressing the Load button will move the manipulator to a position whereby it is easy to load sample to be inspected onto the manipulator tray If a detachable tilt and rotate arm is fitted then the tilt and rotate axes are also set to a horizontal position Whilst the movement to the load position is in progre
80. be specified manually and the Calculation Errors minimised or it may be optimised automatically by pressing the Auto Set button next to the Search Width numeric 220 XIMO26 A1 User Manual Image Processing Annotation To aid the description of faults features etc that are to be saved and viewed again at a later date it is possible to annotate the image This annotation consists of coloured arrows shapes and text When the image is saved to disk it may be saved with or without the annotation z a An example of annotation added to an X ray image Objects a lo Y iT Control Add C Delete Delete All Style Normal f Bold Information Atar Conditions User Manual XTMO26 A1 221 Image Processing Annotation Objects This set of controls set what type of annotation object will be added to the X ray image when it is clicked upon The available type of annotation are detailed below Only one of these radio buttons see topic Radio Button on page 590 can be selected at a time The currently selected button stays depressed when activated and is outlined in blue Arrow Cross hair Rectangle anc ectangle and square a Circle and ellipse Quadrilaterals Text The size of the text font is specified by the down menu 222 XIMO26 A1 User Manual Image Processing To add a specific annotation object select its radio button and press it Then click upon the X ray image in th
81. beam Then pressing the relevant Set button will record the manipulator s Y axis position as the point When all of the parameters have been set then the scatter free radiograph is acquired by pressing the Acquire button An example of a scatter free radiograph is shown below If a scatter free radiograph has already been acquired for this CT data set then it may be loaded by pressing the Load button 468 XIMO26 A1 User Manual 2 D CT Acquisition Apply Flux Normalisation Flux Normalisation Apply Flux normalisation Crop an area on the image in which no sample is in view at all angles Flux normalisation is a function that ensures that small variations of X ray flux does not cause a change in brightness of the image In 2 D CT flux normalisation is applied to the image data when acquiring scatter free radiographs and to the projection data when acquiring the sinograms see topic Sinogram on page 590 As both sinograms and scatter free radiograph are created by iteratively acquiring lines and building the image up line by line variations of X ray flux will cause the lines to have different brightness To remove this effect switch on the Flux Normalisation function by checking the Apply Flux Normalisation check box When flux normalisation is selected a crop box is displayed on the X ray image The area contained within this box will be used to monitor the brightness of the image The crop box must be set to a vertical are
82. button The image within the main X ray image window is then the view of the object being inspected providing the manipulator has been moved to view the object If no image is seen then switch the X rays on on page 13 1 0 4 Je 16 The level of averaging applied recursion to the image is defined by pressing the button next to the Live Image button and selecting from the menu displayed This specifies the number of frames that are used to create a rolling average The higher the number of frames the higher the quality of the X ray image Inspect X implements a motion detect feature so that when the manipulator is moved the imaging system temporarily returns to live imaging When the manipulator stops moving image recursion is re enabled This ensures the highest image quality whilst using image recursion This function is only available if an X ray controller is enabled Capture Image LJ To capture an image from the live image in the main X ray image window on page 169 then press the Capture Image button This will capture the image as present in the main X ray image window on page 169 This button may also be used to abort a capture using averaging on page 125 process 124 XIMO26 A1 User Manual Image Processing Average Image To capture an image from the live image in the main X ray image window on page 169 by averaging over a number of frames then press the Average Image button This will capture an ima
83. can be analysed Acquire Image y ray Flux calibration 70 72 e Use ray Flux calibration w ray conditions Get Image exposure seconds Manipulator position Get Higher precision Include map image w X ray Flux Calibration x ray Flux calibration 100 25 v The acquired image needs to be acquired using the repeatable X ray conditions to enable high quality analysis of the image This is achieved by using an X ray flux calibration on page 28 This control selects the X ray flux calibration for this acquire image action Use X ray Flux Calibration Use x ray Flux calibration w It is possible to just use the current X ray conditions for an acquire image action This is NOT recommended if repeatability of the inspection program is required This check box specifies if an X ray flux calibration is used by this acquire image action 332 XIMO26 A1 User Manual Inspections Get X ray Conditions ray conditions Get If an X ray flux calibration is not being used then Get X ray Conditions button is enabled To record and save the present X ray conditions press this button Image Exposure Image exposure seconds _ _ _ o gt o ooo e When acquiring images the time over which the image is captured is specified by this control Manipulator Position Manipulator position et When an image is acquired the position of the component on the manipulator is required Pressing the Get b
84. can be removed from the analysis by specifying a size in the Exclude Below Diameter field This size must be smaller than that specified for the Perfect Ball Diameter The units of measurement used are those that are set in the Measurement on page 197 function Objects that are excluded by this value are coloured blue in the X ray image If the calibration of measurement has not been made at the magnification at which the BGA image is captured then any measurements in units other than pixels will be wrong To re calibrate press the Calibrate on page 237 button Undersize Fail Threshold Diameter Undersize Fail fl 10 The Undersize Fail control specifies the threshold as a percentage of the Perfect Ball Diameter below which solder balls are considered to be undersized Undersized BGA solder balls are coloured red in the X ray image 234 XIMO26 A1 User Manual Image Processing Oversize Fail Threshold Diameter Oversize Fail 11 The Oversize Fail control specifies the threshold as a percentage of the Perfect Ball Diameter above which solder balls are considered to be oversized Oversized BGA solder balls are coloured orange in the X ray image Calculate Results a Calculate When the parameters that define the BGA analysis have been entered press the Calculate button to calculate the results of the analysis A Pass or Fail indicator is shown To view the full results press the View Results button Vi
85. check box which will stay depressed and then click upon the X ray image to define the grey level It may be helpful to zoom the X ray image to do this After sampling from the image the slider makes for easy minor adjustment Void Fill Threshold Void Fill Threshold 37231 E J a This set of controls are only used in the thresholding BGA void analysis as it requires to have set the grey scale value that defines the edge of the voids within the solder balls in the BGA To set the void edge grey level either change the value of the text box adjust the slider or by sampling from the X ray image in the main X ray image window on page 169 To sample from the image press the Sample From Image check box which will stay depressed and then click upon the X ray image to define the grey level It may be helpful to zoom the X ray image to do this After sampling from the image the slider makes for easy minor adjustment 242 XIMO26 A1 User Manual Image Processing Fail Thresholds Overall voiding Fail J sel Single void fall 5 fo The Fail Thresholds specify the failure criteria for the BGA void analysis e The Overall Voiding Fail threshold specifies the allowable percentage of a BGA solder ball that may be void before it fails this analysis If the voiding is equal to or greater than the fail threshold specified then it is marked as failed in the results This control applies to both types of BGA void analysis e The Single Voi
86. click to move and click and drag to move and zoom on page 85 described above e Status mode View the status of components inspected during the run of an inspection on page 295 program The normal mode movement functions are also available 88 XIMO26 A1 User Manual Manipulator Controller When an inspection program has been run then the map will display the status of each component inspected To revert to normal map mode press the Map Mode button The component status can be displayed again by pressing the Map Mode button a second time Status mode displaying component status As an inspection program is run then the map is marked with green and red overlay to show the status of each component inspected A green overlay shows that the component passed inspection and a red overlay show that the component failed inspection When the inspection program has completed running then the status overlay on the map can be used to view the components If only one image was captured to inspect the component then if the user double clicks upon the overlay on the map then the manipulator will automatically move to the required position to view the component If more that one image was captured to inspect the component then when the user double clicks upon the overlay a menu will be displayed from which the required view may be selected BGA Analysis FAIL BGA Void Analysis P455 BGA Void Analysis P455 BGA Void Analysis P455
87. clicked upon and dragged This sets the value of the slider V Voxel This is the individual element of a 3 D volume created by the computed tomography function It is analogous with the pixel in a 2 D image A voxel represents the 3 D data at a point in the same way as a pixel represents a point in 2 D data X X ray Flux X ray flux is the rate at which the x rays flow through a surface 22 Index gt 2 D Computed Tomography 455 2 D CT 455 Acquire Data Set 479 Area of Interest 475 Beam Hardening 475 Centre of Rotation 470 Data Set Name 479 Datum Position 465 Flux Normalisation 465 Interpolation 475 Loading a CT profile 457 Maximum Attenuation 475 Median Filtering 475 Noise Reduction 475 Projection setup 457 Properties 482 Reconstruct 479 Reconstruction computer 521 Reconstruction Quality 475 Reconstruction Size 475 Sample Setup 457 Scatter Free Radiograph 465 Setting the imaging conditions 457 Setting the sample s position 2D 457 Setting the X ray conditions 457 Shading Correction 465 Slice Stack Setup 470 X ray Filtration 479 2 D CT Properties Add Beam Hardening Preset 482 Remove Beam Hardening Preset 485 Update Data Set Name 482 X ray Trip Control 482 2 D Inspections 503 Adding 2 D CT Profiles 504 Auto conditioning the X ray source in Operator mode 536 Calibrating centre of rotation 535 Calibrating wall measuurements 508 Creatin
88. controls the temperature of the filament that generates the electron beam The correct setting of this value will ensure that the image produced is bright and sharp However care needs to be used when setting the filament demand as setting too higher a value will reduce the life of the filament Too low a setting will give longer filament life but poor performance at high power To set the filament demand follow the steps below This assumes that the X ray source has been aligned using X and Y shifts on page 49 the target has not been burned and the focus look up table has not been corrupted For XT V 160 and XT V 130 systems the filament demand and X and Y shifts are set up using the Auto Filament Control function 1 Place an object with fine detail in the field of view and set the magnification to a very high value by moving the manipulator s magnification axis 2 Set the current demand on page 20 to the highest current to be used during object inspection If you normally use power demand set the highest power demand that you normally use and the lowest kV demand Set the kV demand on page 19 to a high value Do not switch the X rays on at this stage Set the filament demand to 0 Switch the X rays on on page 22 Increase the filament demand until an image is seen Keep on increasing the filament demand by small amounts until the brightness of the image does not increase It is advised to do this by using the right hand nudge bu
89. curve is set Delete Preset Tone Curve EE If a saved tone curve is no longer required it can be deleted by selecting on page 188 it in the drop down list of saved tone curves and then pressing the Delete button A dialog is displayed to confirm the deletion of the curve 188 XIMO26 A1 User Manual Image Processing Reset Tone Curve To reset the tone curve to a straight line so no tone adjustment is made to the displayed image press the Reset button Binarise Image The Binarise Image function allows the user to display a black and white binary image based upon the X ray image in the main X ray image window on page 169 This can be useful to isolate a specific feature within the X ray image for display on its own To select the binarise image function either press the Binarise Image button on the control tool bar or press the Binarise button on the image processing function selection control This image processing function is available for both live and captured X ray images ad Grey Level Pixels Max 65200 Min 1536 Average 22650 Std Dey 26666 0 User Manual XTMO26 A1 189 Image Processing Binarise Threshold Sliders The binarise sliders set the two grey levels at which the image changes from white to black The portion of the image set to white and black depends upon the relative positions of the sliders thumbs To help with the setting of the threshold values a histogram is
90. data in the saved file does not have the tone edit applied This is so that tone edits are non destructive and can be altered if the image is re loaded into Inspect X If this is required then select the Greyscale option If the tone edit is required to be applied to the image data in the saved file then the Greyscale with Tone option should be selected Applying the tone edit to the image data means that third party image applications will open the image and the tone edit is seen Not that re opening such an image in Inspect X will not allow the undoing of the tone edit Larger files are created when saving using the Colour option Saving with colour is necessary when any colour image processing on the image is to be saved in the image and to be read in a third party image application Colour images opened within Inspect X are displayed as monochrome images The Colour option is best considered to be an image export function If an image analysis function has been used to analyse the image for example BGA Void Analysis then if either the Greyscale or Greyscale with Tone options are selected and the image is saved the image analysis parameters are saved in the image profile If this saved image is re opened within Inspect X the image analysis is restored 132 XIMO26 A1 User Manual Image Processing JPEG Type Type JPEG JPEG 2000 If a compressed image file is required then select JPEG as the image file type Then it is p
91. data set on page 589 using a specified reconstruction computer this computer must have CT Agent installed and running Enable Email Notifications Enable email notifications If this check box is checked then CT Agent will attempt to send an email notification of the reconstruction job status when the job is complete If email notifications are required then the Require Operator ID on page 585 option must be set and the user must enter a valid email address as the Operator ID on page 480 on the Acquisition user interface CT Agent will need to be correctly set up If correctly configured CT Agent will send an email message when the reconstruction job added by Inspect X at the end of a CT data set acquisition is completed Volume Display Program The Volume Display Program numeric control specifies the number of bytes per voxel used by the program used to display the reconstructed image stack as a 3 D volume This is used when calculating the memory required on page 479 to be able to open the volume 484 XIMO26 A1 User Manual 2 D CT Acquisition Beam Hardening Tab Acquisition Reconstruction Beam Hardening Beam hardening presets Small Blade Beam hardening tables TurbineBlade 1 This properties page enables the management of the available beam hardening corrections The Beam Hardening Corrections on page 476 drop down list on the Reconstruction Setup on page 475 stage contains a list of availab
92. device This control is only enabled if the imaging device has an internal gain control Brightness The brightness within the imaging device is set by this slider This control is only enabled if the imaging device has an internal brightness control Imaging Presets It is possible to set up a pre defined set of imaging parameters from within the Imaging Set Up tab When the relevant parameters have been set then press the Save button and enter a name to identify the imaging preset Once this has been done this name shall appear in the list of imaging presets on page 288 on the Image Processing toolbar To remove an imaging preset press the Remove button and select which preset is no longer required This will remove it from the list of imaging presets on page 288 on the Image Processing toolbar Bad Pixel Correction For imaging devices such as amorphous silicon flat panel detectors a bad pixel correction has to be made These devices cannot be manufactured without some defective pixels This function detects which pixels are bad and creates a map file that corrects them This only needs to be performed when there are bad pixels that are not already corrected Pressing the Bad Pixel Correction button opens the Bad Pixel Correction on page 115 window A This function is only available for devices that require bad pixel correction 290 XIMO26 A1 User Manual Analogue Imaging Set Up Camera Control Binning Exposure
93. displays the information about the program Xx 3 D CT Batch Program Operator ID operatoriMcompan corn Number of samples 3 Sample tray type Sample Tray 4 3 0 CT batch program Done lt lt CT profiles Delay between each CT acquisition Reconstruction computer NIALL lt P Shading Correction Safe Position Safe position set With the sample s mounted move the manipulator to a position where there nothing in view and then press the Set button When the editing is complete press the Done button 490 XIMO26 A1 User Manual 3 D CT Batch CT Profiles Std CT A y The 3 D CT profiles that specify how the CT data sets for the program are to be created may be managed using the CT Profiles list To add a 3 D CT profile then press the Add button The file that you need to select is the ctorofile xml file in the required CT data set folder The CT data set must have already been created by performing a 3 D CT acquisition on page 403 To remove a 3 D CT profile from the program select the required profile in the CT Profiles list and then press the Remove button To edit a 3 D CT profile then select the required profile in the CT Profiles list and then press the Edit button The 3 D CT Acquisition on page 403 function is loaded with the profile A link is established between the 3 D CT profile in the 3 D CT Batch program and the one loaded into the 3 D CT Acquisition function This link ensures that c
94. export file are only created when the program is run they cannot be created after the program has been run Save Program When a 2 D inspection program has been edited then the changes are saved to disk by pressing the Save button Revert Program Revert To revert the 2 D inspection to its last saved state press the Revert button User Manual XTMO26 A1 525 2 D Inspections Running a 2 D Inspection Program When logged into Inspect X at supervisor level then the user interface to run a 2 D inspection program is described in this section If logged in as at operator level then the user interface is described in this section on page 536 2 D Inspection Operator ID Operator No 6 2 D inspection program Small Blade w Serial numbers 123 456 759 234 567 090 Operator ID Operator IL Operator Mo 6 If configured in the application properties on page 585 then the operator s identity will need to be input into the Operator ID text box This is so that the 2 D inspection program report contains this information so that it is possible to track the inspection of samples with operators This text box will not be displayed if not configured within the application properties 2 D Inspection Program Selection 2 D inspection program Small Blade e To select the 2 D inspection program to run select the required program from the 2 D Inspection Program drop down list 526 XIMO26
95. fail status will be displayed All of the PTHs analysed at least the required level of fill and that the correct number of PTHs were found One or more of the PTHs analysed did not meet the required level of fill or there were PTHs missing 258 XIMO26 A1 User Manual Image Processing Package Void Analysis The Package Void function is ideally suited to the calculation of voids within a die attached to a chip carrier It highlights the voids and calculates what percentage the voids form of the whole die attach An example of voiding within a die attached to a package Flatten 5 Edge Detection 2 Threshalding Region Void Edge Threshold 255 lt lt lt Minimum void size 50 pixels overall voiding Fail 20 Yo Single void Fail Wo Results Percentage Void FAIL User Manual XTMO26 A1 259 Image Processing Analysis Type Edge Detection e Thresholding ll There are two types of image processing functions that can be used to identify voids within a die attach one using an edge detection algorithm and the other using grey scale value thresholding Thresholding works well with images that have a uniform grey scale colour for the background of the attached area Thresholding does not as well when there is not a uniform background In this case edge detection will get a better result Uniform background with voiding Thresholding Non uniform background Edge Detection
96. failure with one annotation and then press Ok Results Whilst this panel is displayed the user has can add annotation on page 221 to mark each failure within the image The default annotation is a cross hair Each failure may be marked with one annotation and optionally some text annotation if required When the user has assessed the sample the OK button is pressed to continue the inspection program run X rays Off Action This action will switch the X rays off This is useful at the end of an inspection program if the X rays off on page 356 or go to load position on page 355 properties are not selected 348 XIMO26 A1 User Manual Inspections On Failure Actions When an action fails during an inspection program run it is possible to execute a predefined set of On Failure actions if the Inspection Properties on page 358 have been set to do so The use of On Failure actions is especially useful when the number of allowable failures on page 305 within the inspection program is greater than 0 If a calibration action such as fiducial calibration on page 324 or X ray flux calibration on page 322 fails then the inspection program run will be aborted as the failure of such an action is fatal The On Failure actions will not be run y after the failure of calibration action The actions that are executed as the On Failure actions is specified in the action list on page 305 The actions that are can be add
97. for this in some way e g by increasing the current or the exposure or the number of projections in the scan Now since the CT reconstruction algorithm is using the amount by which the X ray intensity is reduced at all angles to calculate both the material density and path length then the effect of having an X ray beam which behaves like this is to make the apparent calculated material density decrease with the depth of material penetrated So we obtain CT slices like this one shown below of a cylindrical rod of uniform density i y iui Valid ae Sample with beam hardening 448 XIMO26 A1 User Manual How to Get More Out of 3 D CT Ih iy i ii PUN A BR od A A YN A ij th PARO Je wh le ty Filtered sample with reduced beam hardening Beam hardening shows up as a drop in material density left image above as more and more material is penetrated This is because the amplitude does not continue to drop off as quickly after the lower energy X rays have been completely removed from the beam By removing those lower energy X rays using a filter beam hardening is reduced By putting a filter in front of the X ray beam the spread of energies in the X ray beam is reduced so the beam hardening artefacts are also reduced If the X ray spectrum is known accurately then the beam hardening artefacts can be removed more successfully A step wedge can help to calibrate the response of the detector to diffe
98. guidelines may be added to the histogram To add a guideline move the mouse to the right or left edge of the histogram The cursor will change to show that a guideline may be added Click with the left mouse button and whilst holding it down drag the guideline to the grey level required It is possible to add up to 4 red guidelines and 4 green guidelines to the histogram Red guidelines are dragged out from the left side of the histogram and green guidelines are dragged out from the right side User Manual XTMO26 A1 205 Image Processing When a guideline has been set it is possible to move it by clicking upon the required guideline with the left mouse button and dragging it to the new grey level To remove a guideline drag the required line to the left edge of the histogram for red guidelines and to the right edge for green guidelines When guidelines have been set on a histogram they will appear on all histograms displayed within other image processing functions This enables the tracking of specific grey levels Edge Detect Controls Threshald 46 Lon 100 High smooth 30 Parallel 35 3 Perpendicular These controls affect how the Edge Detect determination for Line and Arc find the edges Threshold has two selection parameters Low specifies the minimum gradient for which an edge is to be detected High specifies the maximum gradient for which an edge is to be detected By setting these values appropriately it is possible t
99. high resolution Minimum Calibration Quality Minimum calibration quality 50 oH When the fiducial calibration reference images are compared to the acquired images a minimum quality will be applied to the fit of the calibration to correct for positional offset of the sample on the manipulator This numeric field specifies the minimum calibration quality allowed If the fit of the calibration is less than this value then the fiducial calibration will fail 326 XIMO26 A1 User Manual Inspections X ray Flux Calibration ara Flux calibration 100 25 The reference images and the acquired images need to be acquired using the same X ray conditions to enable high quality calibration This is achieved by using an X ray flux calibration on page 28 This control selects the X ray flux calibration for this fiducial calibration action If the reference images have been created and the X ray flux calibration is changed then the reference images will be deleted and need to be recreated Use X ray Flux Calibration Use x ray Flux calibration w It is possible to just use the current X ray conditions for a fiducial calibration action This is not recommended if repeatability of the inspection program is required This check box specifies if an X ray flux calibration is used by this fiducial calibration action Get X ray Conditions ray conditions et If an X ray flux calibration is not being used then Get X ray Conditions but
100. higher magnifications without the need to keep on manually adjusting the manipulator speed The speed of the tilt and rotate axes is unchanged Image Sample Depth Sample Depth 10 00 3 Mmm This control sets the difference in depth between the feature in the sample being viewed and the manipulator magnification axis In the case of a vertical system fitted with a table then this is the height of the feature in the sample above the table In the case of a horizontal system then this numeric defines the distance between the feature in the sample and the rotation axis If the feature is closer to the X ray source than the rotation axis then a negative number needs to be entered lf the feature is closer to the imaging than the rotation axis then a positive number needs to be entered into the numeric The sample depth is important as the magnification of the feature within the sample is defined by the position of the magnification axis of the manipulator and this value When measuring samples the measurement of features will only be correct if the image sample depth has been set correctly for that feature within the sample On the XT V 160 inspection system the sample depth also is needed to be set correctly to ensure the correct behaviour of the orbit function When an orbit is performed or the sample is rotated using the rotate joystick on the inspection system it is important to have previously input the sample s height above the manipulat
101. if the inspection program being run detects X ray flux calibrations used within the program Time Valid Time valid 24 hours X ray flux calibrations on page 28 need to be recalibrated on a regular basis to ensure consistency of X ray flux generated when using the calibration This numeric control specifies how long an X ray flux calibration is valid before it requires to be recalibrated Each time an inspection program is run the program automatically determines which X ray flux calibrations require to be recalibrated using the value in this numeric control 362 XIMO26 A1 User Manual Inspections Minimum Calibration Quality Minimum quality 65 When an X ray flux calibration is recalibrated a Minimum Quality is specified Should the recalibration of the X ray flux calibration fail to achieve this minimum quality then there will be too much variation in the X ray conditions to ensure repeatability of the inspection program This numeric field specifies the minimum calibration quality When the action is executed if it fails to achieve this value then the action s status will be set to Fail and the inspection program will always be interrupted Quick Calibration Quick recalibration This checkbox controls the speed of the recalibration of the X ray flux calibration If the checkbox is clear then the images collected to adjust the flux calibration are collected over a longer period and can give a higher quality cal
102. inspection program Small Blade EA Serial numbers 123 456 789 234 567 090 2 D Inspection programs can be managed by the Supervisor The Operator is limited to running the programs only User Manual XTMO26 A1 503 2 D Inspections The Supervisor may create on page 504 edit on page 521 run on page 526 delete on page 535 and calibrate on page 535 2 D inspection programs The 2 D Inspection window can be opened from the Programs menu item on the main menu bar This function is only available on systems configured to run this function and also have a valid licence for this function Creating a 2 D Inspection Program The creation of a 2 D inspection program consists of a number of stages e Creation of one or more 2 D CT profiles e Setting up of the program parameters e Calculation of beam hardening correction e Defining the wall measurements on page 508 It is only possible to create and edit 2 D inspection programs when logged in at supervisor level Creating 2 D CT Profiles 2 D CT profiles are created by performing 2 D CT acquisition on page 455 The 2 D CT profile is an XML file with the extension ct2dprofile xml that will be found in the folder that contains the CT data set when it has been acquired This file has the name of the CT data set and contains all the information required to re acquire the CT data set So the first thing that needs to be done is to mount the sample s and perform
103. is the sample whose volume of interest was set up when the program Was created The subsequent samples are clockwise when viewing the rotation table From above From sample 1 Sample 1 9 000 degrees Sample 2 120 000 degrees Sample 3 240 000 degrees The angles at which the samples are held within the sample holder can be entered into the relevant numeric boxes and the OK button is then pressed to save these values Pixel Size Pixel Size 0 061 mim Edit All 2 D CT profiles within a 2 D inspection program are acquired at the same geometric magnification then the pixel size for all of the reconstructed slice images is fixed The pixel size is displayed in the Pixel Size numeric If the pixel size has been calibrated by some alternative method then the pixel size for the 2 D inspection program can be modified by checking the Edit check box This enables the Pixel Size numeric so that the calibrated value can be entered User Manual XTMO26 A1 523 2 D Inspections Wall Thickness Measurements Wall thickness measurements To edit the wall thickness measurements within the 2 D inspection program press the Define button The Wall Thickness Measurements on page 509 user interface is displayed The process of editing the wall thickness measurements is the same as defining measurements When measurements are edited the thresholds will not normally require to be changed nor calibrated Reconstruction Computer Reconstru
104. line If they do not then they will be highlighted in yellow If more than two edges start and end upon one of the blue base lines then the longest edges will be used If Measure Using Base Lines is not checked then the two edges of the material must start on one of the cyan lines and must end on the opposite cyan lines If they do not do this they will be highlighted in yellow and will be ignored Label Placement Call out line at top The Call out line at top checkbox controls the placement of the text at the end of the call out line of the currently selected measurement Region Z FAIL Min 1 9687 mm Max 1 971 mm Call out line at top Region 4 FAIL Min 1 967 mm aax 1 921 mm Call out line at bottom User Manual XTMO26 A1 215 Image Processing Defining Minimum Allowable Measurement Check minimum measurement Minimum measurement 1 910 mm If the selected region is to measure the minimum distance within the region defined on the image then the Check minimum measurement checkbox must be checked and the minimum allowable measurement is entered into the Minimum measurement numeric Defining Maximum Allowable Measurement Check maximum measurement w Maximum measurement 1 950 mm If the selected region is to measure the maximum distance within the region defined on the image then the Check maximum measurement checkbox must be checked and the maximum allowable measurement is entered into the
105. main X ray image window 060000000004 060060000000 600000000 606000000 Soler ol Bribira 90 Caister Image Adjust the red crop box so that only the required data is within the crop box If the whole image is required press the All button to maximise the crop box tightly as this might cause the cropping of data in the reconstructed f When cropping the volume of interest it is recommended to not to crop too volume Reconstruction Size Reconstruction Size volume size voxels voxel size mm Reconstructed voxel size mm Disk space For projections GE Disk space For volume GE Temporary disk space GE Memory required to open volume GE The Reconstruction Size section gives information about the reconstructed volume that will be created by CT Agent using the current parameters The Memory Required to Open the Volume value depend upon the number of bytes per voxel that is used by the display program The number of bytes per voxel is set in the CT Properties on page 427 This is useful so that it can be checked that the volume being reconstructed can be opened on one of your computers User Manual XTMO26 A1 421 3 D CT Acquisition Acquisition The acquisition of the projection images that will make up the CT data set on page 589 is controlled by this stage of the step by step user interface Acquisition Operator ID pperatoriMcompary com Reconstruction computer THIS COMPUTER wyt Data set name Rock Core 1 2 0 w
106. mm Set Bottom 10 00 mm Set The manipulator Y axis top and bottom positions for the scatter free radiograph are relative to the datum point defined The positions may be entered into the numeric controls if the positions can be physically measured Alternatively it may be set by moving the manipulator Y axis and viewing a live image to identify when the required top or bottom point is within the X ray fan beam Then pressing the relevant Set button will record the manipulator s Y axis position as the point Frames to Average This control specifies the number of frames to average when acquiring the scatter free radiograph The higher the number of frames the higher the quality of the X ray image but with a curved linear detector an average of 1 frame per line gives a good image The number of lines within the image is set in within the Imaging Set Up on page 288 tab in the Image Processing Properties window or by an imaging preset on page 290 Apply Flux Normalisation Apply Flux normalisation w Flux normalisation is a function that ensures that small variations of X ray flux does not cause a change in brightness of the image As a scatter free radiograph is created by iteratively acquiring lines and building the image up line by line variations of X ray flux will cause the lines to have different brightness To remove this effect switch on the Flux Normalisation function by checking the Apply Flux Normalisation check bo
107. p void Fill Threshold 37231 J Overall voiding fai f 15 6 Single void fail 5 ie to Results Calculate view Results Analysis Type 2 Edge Detection Thresholding There are two types of image processing functions that can be used to identify voids within the BGA solder balls one using an edge detection algorithm and the other using grey scale value thresholding Images with very few but large solder balls can be difficult to analyse using the edge detection function These images need to use the thresholding function The edge detection function is only available on systems with the relevant licence in the image processing library Edge Detection BGA void analysis using edge detection is very simple to use Select the Edge Detection radio button on page 590 and then press the Calculate on page 243 button This function is only available on inspection systems when it has been specifically requested 238 XIMO26 A1 User Manual Image Processing Thresholding BGA void analysis using thresholding requires more parameters to be set up a ball edge threshold on page 242 a void fill threshold on page 242 and optionally the image needs to be flattened on page 240 before the results are calculated 0 0 00 0 o0 BGA void analysis using thresholding with image flattening o0 0 0 Q 0 4 o0 e BGA void analysis using edge detection User Manual XTMO26 A1 239
108. program run consists of four stages e Updating of shading corrections if required e Acquiring the CT data sets e Waiting for the CT data sets to be reconstructed e Performing the wall thickness measurements User Manual XTMO26 A1 529 2 D Inspections If any of the shading corrections used by the 2 D CT profiles within the 2 D inspection program have aged then they are re acquired The time that they are valid is specified within the Image Processing Properties on page 294 When the program is run a check is made to see if the shading corrections are valid If they need to be updated then a prompt will be displayed Warning Please change the ray Filtration to 4 000 mm of Copper Do you wish to continue A Please remove any sample From view BEFORE collecting a shading correction reference The shading corrections will then be updated Progress will be displayed in the 2 D Inspection window 2 D Inspection 2 D inspection program Small Olac Serial numbers 12245000 he Edit gt Calibrate Status Shading corrections Verifying shading corrections CT data set Waiting CT reconstruction Waiting Wall thickness Waiting Estimated time to completion 00 03 57 Hours Mins 5ecs The shading correction for the CT profile Aerofoil is being updated 930 XIMO26 A1 User Manual 2 D Inspections Then the CT data sets will be acquired During this progress will be displayed in the 2 D Inspection window 2 D Insp
109. quickly replicate the required actions by using one of the Step and Repeat functions within the inspection programming interface There are three different Step and Repeat functions available one to repeat samples one to repeat components and one to repeat actions within a component Each Step and Repeat function will only work for regularly spaced objects that fall upon a rectangular grid Sample Set of samples that can be used for Step and Repeat 380 XIMO26 A1 User Manual How to Get More Out of Inspection Programs Sample Set of samples that cannot be programmed using Step and Repeat Step and Repeat Samples This function can be used to automatically program multiple identical samples When it is used it will create clones of the original sample and its components but using the correct positional information for each sample All names and locations of images are automatically updated in the new actions within the samples added to the inspection program Note that if the sample s actions contain any fiducial or positional calibration actions then the reference images for each of these actions will not be cloned and need to be acquired Step and Repeat Components This function can be used to automatically program multiple identical components within a sample When it is used it will create clones of the original component and its actions but using the correct positional information for each new component added to the ins
110. ray source to a kV slightly higher than the normal maximum operating kV increases stability at the maximum kV The auto conditioning parameters are set upon manufacture It is not recommended to change these values Controller SR The Controller properties tab pane will display different controls dependent upon whether the hardware X ray controller is a Xi controller or an SR controller This section describes the SR controller variant SR3 X ray Controller Communications Pork copy wr Last Control 0000493100004101341123D Last Status OOOO E SR3 uA offset Oo u SR3 u correction time 30 seconds Last Control Last Status Focus Demand Focus Actual Filament Demand 493 Filament Actual EY Demand EY Actual u Demand 14 Actual ray Demand o A raw State 2 Shift Bo o Generator Status gt Shift 12 Interlock Status Overheat Status EA vacuum Value A Head Number Special Command l 56 XIMO26 A1 User Manual X ray Controller The Communications Port defines the serial communications port on the controlling computer that is connected to the SR controller The communications port is selected from the drop down menu and the state of the communications link is reported in the box immediately below The Last Control field and the Last Status field display diagnostic information which consists of the last control string to have been sent to the SR controller and the last status
111. relative to the top left hand corner of the image and the grey level of the pixel User Manual XTMO26 A1 151 Image Processing Linear Detector Control Tool Bar Inspection systems that are fitted with a curved linear array image detector will display the image control tool bar described in this section For systems fitted with any other type of image detector then the Operator Level Tool Bar on page 123 or Supervisor Level Tool Bar on page 135 will be displayed as appropriate If the inspection system is configured as a BladeRunner then when operator level access is selected the 2 D Inspection Operator Window on page 536 will be displayed in place of the main controls window and this tool bar will not be available 3 mp LJ El Live Image To view a live X ray image within the main X ray image window on page 169 the press the Live Image button The image within the main X ray image window is then the view of the object being inspected providing the manipulator has been moved to view the object If no image is seen then switch the X rays on on page 13 This function is only available if an X ray controller is enabled 152 XIMO26 A1 User Manual Image Processing On a system fitted with a linear detector then a live image consists of a rolling display of image lines The last image line acquired is displayed at the bottom of the image and older lines are recursively moved upwards in the image When the oldest l
112. required During auto conditioning the kV will step up in steps of 5kV from the Start kV until either there is a breakdown in the X ray source or the Change to 1kV Steps value is reached This enables fast auto conditioning at lower kV values but increased stability of the auto conditioning process at higher kV values or after a breakdown User Manual XTMO26 A1 17 X ray Controller Running Auto Conditioning To run the auto conditioning process press the Start button The Auto Condition Window will update to show the information about the auto condition process Auto Condition Start kh Change to 1k steps at Maximum kv vacuum Demand ki Time stable at maximum ki Mins Secs Conditioning at 52k The Vacuum readout displays the current quality of the vacuum within the X ray source The Demand kV display the target kV at which the source is presently being auto conditioned This value will increase providing the X ray source s vacuum quality remains high and the X ray source does not break down In either of these cases then the demand kV will be decreased The Time Stable at Maximum kV displays the continuous elapsed time at which the X ray source has been held at the Maximum kV during the auto conditioning process If the X ray source reached the Maximum kV and then breaks down then this value will be reset to zero The auto conditioning process will continue until the user presses the Stop button There is n
113. selection of noise reduction processing applied to the projection images as they are reconstructed into the reconstructed volume The values in the drop down list correspond to the noise reduction preset values in CT Pro Note that selecting a noise reduction preset can reduce the sharpness of edges in the reconstructed volume Interpolation Interpolation The Interpolation checkbox controls how pixels are chosen during the reconstruction of the volume from the projection images If checked then pixels will be chosen using linear interpolation which will produce a better quality volume but will take longer to reconstruct If unchecked then pixels will be chosen using the nearest neighbour method which is faster but will produce a lower quality volume Volume of Interest Yolume of Interest To define the volume of interest press the Acquire button to acquire the images Specify the required volume by changing the crop boxes on the images When reconstructing the CT data set on page 589 to create the 3 D volume it is possible to reconstruct only the volume of interest i e not reconstruct the volume from the whole of each projection image This is of use to remove redundant data from the 3 D volume and therefore speed up the reconstruction 420 XIMO26 A1 User Manual 3 D CT Acquisition To specify a volume of interest press the Acquire button Two images are acquired 90 degrees apart in rotation These are displayed in the
114. that creates other file formats as the output if required for example a data file that could be input into an SPC statistical process control program Results Samples Components For Sample 1 User Manual XTMO26 A1 351 Inspections To view the results for a sample double click upon the sample row within the results table Similarly double clicking upon a component row will display the results for that component The results file is displayed in an external web browser TAUR ORE L Se EGA IC Comparten Sitabas FASS age acqured at 17 1344 ming these concbticas dy Sample Height 2 839 mm keri Yee aber PON EV 100 ut 15 rg capers bet l eremia j ming parameters Camera eqporare se 40 nellisecomdk Gam 0 Brghiness 0 Dental gan magng bereng whete 255 black condor Ttensiier field set to field O fete pet bo OP To view the results of the whole inspection program press the View All button 352 XIMO26 A1 User Manual Inspections Script Buttons Sets of actions can be saved as a Script Button A script button has an associated set of action that are preformed when the button is pressed A script button is created by saving a set of recorded actions on page 299 and making a named button that appears in the Script Buttons Window Script buttons To show the Script Buttons Window press the Show Script Buttons button on the Inspections tab page Script Buttons
115. that is displayed when the option button next to the Iris Control button is pressed show the available iris demand values The lower the number the more closed the iris and therefore better image noise reduction am E de e e 100 Foto sO io soo eo to LO Imaging Presets This button may not be displayed If the inspection system is fitted with an imaging device that has configurable parameters that affect the size and performance of the imaging system then this button will allow the easy switching between pre defined imaging states The required imaging preset is selected from the pop up menu that is displayed when the option button next to the Imaging Presets button is pressed The entries in the menu depend upon the imaging device fitted New imaging presets can be defined from within the Camera Control on page 290 tab of the Image Processing Properties window This is opened by selecting the Add menu item m e Feal Time High Quality Add User Manual XTMO26 A1 147 Image Processing Process Image When an image has been captured or an image that has been previously saved is opened it is possible to apply image processing to the image The effect of the image processing can been seen within the main X ray image window on page 169 This function is not available whilst a live X ray image is being viewed The type of image processing applied to the image is selected from the pop up m
116. the Save button Revert Program Cs To revert the 3 D CT Batch program to its last saved state press the Revert button Running a 3 D CT Batch Program A 3 D CT Batch Program Operator ID operatoriMcompan corn ES 1 Sample tray type Sample Tray 4 E Mumber of samples 3 3 0 CT batch program test 1 E Operator ID Operator ID operatoriMcompan com If configured in the application properties on page 585 then the operator s identity will need to be input into the Operator ID text box When the operator ID is entered then the CT data set folder shall be contained within a folder named the same as the Operator ID If not then the CT data set folder shall be a sub folder of the CT data folder Note that if email notifications are enabled then the Operator ID must be a valid email address 494 XIMO26 A1 User Manual 3 D CT Batch CT Data Set CT Data Set CT Data Set CT Data Set CT Data Set CT Data Set Falder Folder Folder This text box will not be displayed if not configured within the application properties Number of Samples Mumber of samples 3 If the X ray inspection system is fitted with a sample changer manipulator then the number of sample to load needs to be specified in the Number of samples numeric Each of the 3 D CT profiles in the 3 D CT Batch program will be run for each sample loaded Consequently the samples must all be of the same type is fitted with a sample changer manipulator
117. the fiducial mark is in the required position The difference between this position and the original position specifies the offset for this fiducial mark The process is then repeated for the second fiducial mark Having calculated the offsets of the two marks then a positional calibration can be applied to all subsequent actions within the inspection program to account for the offset and rotation of the sample It is possible that sometimes the fiducial calibration action will fail even when you can see the fiducial mark within the acquired image In this case either adjust the X ray conditions to make the mark more distinct and re take the reference images using the reference sample or reduce the minimum calibration quality parameter for the calibration 372 XIMO026 A1 User Manual How to Get More Out of Inspection Programs Note Although the use of fiducial calibration within an inspection program will greatly reduce the positional errors of the placement of samples it will never remove all positional errors The quality of the fiducial mark within reference images will affect the positional accuracy but it is normally possible to reduce the error to no more than 50 70 microns Other factors that affect the positional calibration include the positional tolerance of the mounting of the components upon the sample with respect to the fiducial marks When programming the acquiring of images for analysis it is advised to leave a small border
118. the map display area When the zoomed in it is possible to see other parts of the image by use of the scroll bars or by holding the SHIFT and CTRL keys down and clicking upon the map image with the left mouse button and holding it down and dragging the image When holding down either the CTRL or the SHIFT key or both and moving the mouse over the map image area the cursor will change to indicate what action will occur if the left mouse button is clicked Q Q Q El SHIFT held down and zoom in available CTRL key held down and zoom out available SHIFT or CTRL key held down but the limit of the zoom has been reached SHIFT and CTRL keys held down pan image available SHIFT and CTRL keys held down with Left Mouse button image will pan when mouse is dragged 84 XIMO26 A1 User Manual Manipulator Controller Manipulator Position The manipulator map can be used to position the manipulator and indicates the area of the manipulator tray area that is currently in view in the main imaging window The imaging field of view is shown on the manipulator map as a red rectangle To move the manipulator to a different position at the same magnification double click upon the centre of the area to be viewed using the left mouse button The manipulator will move to this position To move the manipulator to a position at a different magnification click upon the centre of the area to be viewed using the left mouse button and drag
119. the number of frames averaged but this of course increases the overall acquisition time Note that increasing the detector exposure time and increasing the X ray current achieves the same aim The former however increases the overall length of the CT scan while the latter does not There are times when you want to keep the current low such as when trying to achieve a very high resolution on a very small sample but for larger samples increasing the current is fine Do remember though that for high beam currents you may need a higher than normal filament demand current the filament must be hot enough to supply all the electrons you are requesting Also if you leave the X ray beam tightly focussed then you may pit the target within the X ray source which will cause the X ray intensity to fall Calculating the Number of Projections To avoid interpolation between edge voxels see topic Voxel on page 590 the number of projection images should be great enough such that each angular increment moves on by no more than one voxel This means that if you have a horizontal slice N x N voxels then you should use between pi N 2 and pi N projection images i e between 1 57 and 3 14 times N If your horizontal CT slices are to be 500 x 500 voxels then you should use at least 785 projection images User Manual XTMO26 A1 445 How to Get More Out of 3 D CT The vertical height of the volume does not influence the number of projections Using
120. the process of calibrating the XT V 160 s manipulator back offs This procedure is performed within the factory before the inspection system is shipped and does not require to be performed on site unless a Nikon Metrology accredited engineer needs to do so Map Scan The manipulator map control can be shown by pressing the Map button It may be hidden by pressing the Controls button when the saved positions on page 90 and the software joysticks if configured are displayed Before the manipulator map can be used it must be calibrated The calibration function is only available when logged in as the Supervisor and is found in the Manipulator Properties on page 80 This is only necessary to be done upon installation and after engineering work has been undertaken on the manipulator or the imaging system The manipulator map consists of an image area that can display an image that corresponds to the object s on the manipulator tray This can then be used to navigate to features on the objects and to set the required magnification It is also used to display the status of the inspection of components upon samples when used with the Inspections on page 295 function 82 XIMO26 A1 User Manual Manipulator Controller The quality of the fit of the images that make up the map is affected by a number of attributes The first is the system calibration which is factory set The alignment of the images is also affected by parallax If the
121. the required correction e The placement of the grey level images within the correction may be specified by the user By default the grey level images are placed so that more points are towards the black end e The target grey level for white pixels is defined by the user e The shading correction may be acquired by using different thicknesses of X ray filtration rather than by altering the uA User Manual XTMO26 A1 107 Image Processing Shading Correction Shading correction mode Standard correction All imaging pres Only acquire white image Multi point correction Disable shading correction Name 40ms 1004 9Suc ray conditions 100 uo 95 Creating a Multi Point Shading Correction Name 40ms 100k 9514 E ray conditions kw 100 uo 95 To create a new multi point shading correction type the required name in the Name box and then press the Create button A dialog will be displayed to request how many points this shading correction should use It is possible to specify any number between 2 and 12 Note that once the correction has been created the number of points that it uses cannot be changed 108 XTM026 A1 User Manual Image Processing When the number of points has been specified then the edit correction user interface will be shown Use multiple X ray Filters Reference Images Frames to average White Image White target 64000 Using Fixed or
122. there will be no CT profiles listed for a newly created program User Manual XTMO26 A1 505 2 D Inspections 2 D Inspection Edit Program 2 D inspection program Small Blade Serial numbers 123 456 705 Delet CT profiles Aerofoil Rook Remove Samples Angles Pixel Size Wall thickness measurements Reconstruction computer ELADERUNMNER CT Data Set Folder BladerunnericT Data Select Shading Correction Safe Position Safe position set With the samplets mounted move the manipulator to a position where there nothing in view and then press the Set button Output HTML report Iw Cow export File fw To add the 2 D CT profiles to the program press the Add button The file that you need to select is the ct2dprofile xml file in the CT data set folder If more than one 2 D CT profile is to be added to the program then add each one using the Add button The 2 D CT profiles may be re ordered in the list by selecting a CT profile and then pressing either the Up or the Down button to move it within the list 906 XIMO26 A1 User Manual 2 D Inspections Setting Up the Program Parameters There are a number of other parameters within the 2 D inspection program that need to be defined These may be set up now or updated when the program is edited on page 521 Setting up Beam Hardening Correction Beam hardening on page 448 correction will normally be required This is calculated within the CT Pro 2D application an
123. track which operator was using the inspection system It is of particular use when using the Inspection on page 295 function Note that the operator ID is not linked to a specific password Password Entry The Inspect X software can be protected by the setting of passwords which have to be entered before the software is launched There are 2 levels of access to the software e Operator For operator level access e Supervisor For supervisor level access Enter password Passwords for the Inspect X software are case dependent MYPASSWORD is not the same as mypassword The Operator Password allows a user to perform all basic operations on the X ray inspection system such as generating X rays using the image processing and manipulator features and running programs The Supervisor Password allows a user to perform all basic operations on the X ray inspection system such as generating X rays and using the image processing and manipulator features In addition to the basic functionality supervisor level users have the privilege to change some system settings such tool visibility and program creation 8 XIMO26 A1 User Manual Getting Started The Inspect X software will let the user access at the highest level of privileges if no password has been set So if no supervisor password has been set then pressing the Run button will always let the user in with supervisor level privileges If Inspect X has been configured to use entry passwo
124. will move Alternatively click upon the required point within the circular control and the control point is re located to this point To demand a tilt or rotation angle in between those on the grid points of the circular control hold the Control key down and click upon the green control point Whilst moving the control point the snap to grid function is turned off For fine adjustment of the tilt and rotate angles use the tilt on page 96 and rotate on page 96 axes controls or the joysticks on the inspection system 94 XIMO26 A1 User Manual Manipulator Controller Sample viewed at 60 degrees tilt and 120 degrees rotation User Manual XTMO26 A1 95 Manipulator Controller Tilt Axis Control Tilt 0 0 ain To finely adjust the tilt axis from the user interface of Inspect X use the tilt axis controls If the Plus button is clicked the tilt angle will be increased by 1 degree If this button is pressed and held the tilt angle will start increasing until the button is released If the Minus button is clicked the tilt angle will be decreased by 1 degree If this button is pressed and held the tilt angle will start decreasing until the button is released To lock movement on the tilt axis press the Lock button When pressed the button will stay depressed to show that movement on that axis is inhibited To re enable movement press the Lock button again and the button will be released Movement upon the tilt
125. within the limits of a perfect ball Passed or is undersized or oversized X The X ordinate of the pixel that specifies the centre of the solder ball Y The Y ordinate of the pixel that specifies the centre of the solder ball Average The average diameter of the solder ball is calculated Note that this is Diameter an average diameter as it is calculated from the area of the ball and if the ball is not near round then this figure cannot be exactly correct Area The area of the ball in the current measurement units Compactness Compactness is a measure of how close together are the pixels that define the solder ball A circular ball is the most compact and will have a value of 1 0 the more irregular the ball the higher the value of compactness Perimeter The perimeter of the solder ball in the current measurement units Roughness Roughness is a measure of the unevenness or irregularity of the solder ball s edge A smooth round solder ball will have a roughness of 1 0 whereas irregular shaped solder balls will have a higher value of roughness The full results may be printed by pressing the Print button This will display the standard Windows print dialog This is documented in the Windows help system Export The full results may be saved to a file on disk This is done by pressing the Export button A standard Windows save file dialog is displayed This is documented in the Windows help system The results m
126. 0 00 mm Set Bottom 10 00 mm Set Acquire Load Flux Normalisation Apply Flux normalisation Crop an area on the image in which no sample is in view Rotate at all angles User Manual XTMO26 A1 465 2 D CT Acquisition Minimum Frames for Reference Images It is recommended to acquire a good CT data set that vou use a shading correction whose images have been acquired with a minimum number of Frames Minimum Frames The recommended minimum number of frames used to average for the reference images within the shading correction is displayed This figure is calculated from the number of projections on page 461 and the frames per projection on page 461 specified on the Sample Setup tab This recommended minimum is calculated to minimise the effect of noise from the shading correction within the reconstructed volume It is possible to use a shading correction that uses more frames or less frames The point of this information is to advise the user on what to do Disable Shading Correction 2D Disable shading correction During the setting up of the imaging system it might be required to temporarily disable the shading correction This may be done by checking the Disable Shading Correction check box To re enable shading correction uncheck the check box Shading Correction Selection Disable shading correction Mame 40ms 1 6mm Cu e ray conditions kw 100 uo 95 The shading correction to be used duri
127. 0 461 1 12 i 2 9 2 11 2 0 768 0 464 Leis 5 5 3 7 3 0 728 0 416 1 14 6 1 6 6 1 244 XIMO26 A1 User Manual Image Processing For each solder ball the following data is available Ball X Y Average Diameter Area Compactness Roughness Voids Largest Void Total Void l Print A numerical identifier The X ordinate of the pixel that specifies the centre of the solder ball The Y ordinate of the pixel that specifies the centre of the solder ball The average diameter of the solder ball is calculated Note that this is an average diameter as it is calculated from the area of the ball and if the ball is not near round then this figure cannot be exactly correct The area of the ball in the current measurement units Compactness is a measure of how close together are the pixels that define the solder ball A circular ball is the most compact and will have a value of 1 0 the more irregular the ball the higher the value of compactness Roughness is a measure of the unevenness or irregularity of the solder ball s edge A smooth round solder ball will have a roughness of 1 0 whereas irregular shaped solder balls will have a higher value of roughness This is the number of separate voids found in the solder ball This is the percentage of the area of the solder call that has been identified as the largest single void This is the percentage of area of the solder ball that has been identified a
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129. 00 00 5 Every 2 months Starting on 01 11 2011 4 To run a task on a monthly basis select the Monthly radio button The time at which the task starts to run is entered in the Start Time numeric control The day on which the task is run is selected in the Starting On control The task will be run every N months where N is the number entered in the Every numeric control If the task is to be run every month then enter 1 into the Every numeric control Setting a Weekly Schedule for a Task Run task every Daily Start time Every 2 gt weeks On Monday Thursday Tuesday Friday Wednesday O Saturday Sunday To run a task on a weekly basis select the Weekly radio button The time at which the task starts to run is entered in the Start Time numeric control The day on which the task is run is selected by the required On radio button The task will be run every N weeks where N is the number entered in the Every numeric control If the task is to be run every week then enter 1 into the Every numeric control 958 XIMO26 A1 User Manual Scheduled Tasks What Happens When the Clean Up Files Task Runs When the clean up files task is run a check is made to see if any of the following are running e CT acquisition if configured on the inspection systems e 3 D CT batch program if configured on the inspection systems e 2 D inspection program if configured on the inspection systems e Inspection pr
130. 00 uo 95 Multi point shading correction is enabled by clicking the Multi Point Correction radio button Then the required shading correction will be selected from the list either by typing its name or selecting it from the drop down list The correction is loaded by pressing the Load button If there is a mismatch between the imaging conditions used to create the shading correction and the current imaging set up then the following user interface shall be displayed Differences Correction Present Exposure 40 00 2000 Each of the conditions that do not match are displayed The example above only shows one condition that does not match To update the imaging set up to match that of the shading correction press the Correction button Once this has been done then the shading correction may be loaded To retain the current imaging set up press the Present button The imaging set up will not be altered but the shading correction will not be loaded User Manual XTMO26 A1 113 Image Processing Updating a Multi Point Shading Correction Name 40ms 100k 95uA se ray conditions 100 uo 95 The selected multi point shading correction can be updated by pressing the Update button The update process re acquires the shading correction reference images that are used to recalculate the shading correction required X ray filtration should be inserted and there should be f When acquiring the images to update a shading correctio
131. 1 Press the Pads button to open the region of interest tool If you have a previously defined region of interest this may be loaded otherwise a new region has to be defined 2 To define a new region press the None button to exclude everything The whole image is covered by a transparent red mask 3 Add a region of interest object as an included object to define a pad Press the Repeat button to create another object to define the next pad Repeat steps 3 and 4 until all the pads have been included 5 Close the region of interest tool The order in which the pads are added to the mask defines the numbering of the pads The first pad added to the mask is pad 0 and so on 248 XIMO26 A1 User Manual Image Processing Void Edge Threshold Yoid Edge Threshold 34375 i F H The voids within the pads are defined by a grey scale value that corresponds to the edges of the voids This is entered in the Void Edge Threshold controls To set the void edge grey level either change the value of the text box adjust the slider or by sampling from the X ray image in the main X ray image window on page 169 To sample from the image press the Sample From Image check box which will stay depressed and then click upon the X ray image to define the grey level It may be helpful to zoom the X ray image to do this In order to clearly define the voids from the rest of the X ray image it will be necessary to use the Image Flattening
132. 100 So The Reconstruction Quality defines how the reconstructed image stack will be scaled If the sinograms are 2048 pixels in width and the whole sinogram is to be reconstructed then a reconstructed slice image of 2048 x 2048 pixels would be created at 100 reconstruction quality However if the reconstruction quality is set to 50 then the reconstructed slice image would be 1024 x 1024 pixels Beam Hardening Correction Beam Hardening occurs because the lower energy X rays in the beam are stopped more effectively than the higher energy X rays Therefore as the material path length increases the mean energy of the X rays in the rest of the beam which has not been stopped gradually increases Thus the X ray beam becomes progressively more and more penetrating as it passes through the material To correct for beam hardening then select a value from the Beam Hardening drop down list Beam hardening Presets 5 available in A LT Pro 20 Custom 1 6 presel A calculated bu CT Pro gt lt 0 Beam Hardening Table am The drop down list consists of a number of values The entries named 1 2 6 select the same correction as selecting the same numbered beam hardening preset within CT Pro 2D After this will be a list of custom presets and beam hardening look up tables In the example above there is one custom preset called Small Blade and one beam hardening look up table called TurbineBlade 1 To a
133. 15 is only required for flat panel detectors This correction identifies the under performing pixels and replaces them with an average of the surrounding good pixels User Manual XTMO26 A1 101 Image Processing Shading Correction Shading correction is applied to all images on all X ray inspection systems This correction compensates for the variation in response of the imaging device s pixels when illuminated with a constant set of X ray flux The variation of the response is due to two factors drop off of X ray flux due to the inverse square law and small variations internally within the imaging device s pixel array As the X rays are effectively generated at a point source the X rays from this point source that fall upon the corners of the imaging device have to travel further than those that fall upon the middle of the imaging device As a result of the inverse square law the corners of the device will be slightly darker than the middle Some imaging systems such as flat panels have small variations within its pixel array This is an inherent property of the imaging device and it not a fault Shading correction will compensate for this effect Shading correction is highly important for the correct functioning of the image analysis tools and for CT reconstruction to produce high quality data There are two modes of shading correction available within Inspect X namely Standard on page 103 and Multi Point on page 107 These corre
134. 3 The angle of both the red and blue nodes can be adjusted by pulling either cyan node on their respective arm s in a circular direction if you decide that the endpoint s were not quite the desired positions By pulling these node in a radial direction the radius of the arc can be adjusted which is useful if you need to measure the centre of a number of concentric arcs which share the same centre point 4 The whole arc tool can be picked up an moved using the green centre node This is helpful for repositioning over a number of similar features Automatic Fit Once the manual fit has been made an automatic orange fit arc should appear and this overlap the light green manual fit arc 1 The cyan node between the red and centre cyan positioning nodes adjusts the zone within which the automatic fit takes place Pulling this node radially adjusts this zone and this is indicated by two feint dark green inner and outer arcs Pull this node to tightly define the arc to fit within if there is other image data which may cause the detector to find the wrong edge The fitting of the arc is indicated by a solid orange arc however to help see why a fit may not be working well the individual fit points through which the fit arc is drawn are also show to indicate what features are being used for detection In a noisy environment these points may stray a long way from the final fit arc 2 The result of the automatic fit is shown as an orange radial line from
135. 3 D volume is of high quality The centre of rotation must be in the centre of the image User Manual XTMO26 A1 435 3 D CT Acquisition CT Systems CT enabled inspection systems will normally be mechanically aligned accurately and this calibration is not required In this case the Calibration Required checkbox should be clear In this case then the CT system is set up so that when the X axis is at 0 then the centre of rotation is in the centre of the image So when the Allow Offset Centre of Rotation checkbox and the Calibration Required checkbox are both unchecked then all CT acquisition shall occur at 0 on the X axis If the sample being acquired is very small and it is not possible to get the centre of rotation to the centre of the image then it is possible to acquire the CT data set at a non zero value on the X axis This is enabled by checking the Allow Offset Centre of Rotation checkbox This will allow the manual centring of the centre of rotation during the set up of a CT acquisition Inspection Systems with CT Add On For systems that have CT as an add on such as the XT V 160 then this calibration is required and the Calibration Required checkbox must be checked This can only be done if the Allow Offset Centre of Rotation checkbox is clear Calibration Process To perform the calibration a calibration rod needs to be inserted into the CT rotate axis The manipulator should be moved so that the centre of the diameter rod n
136. 5 Validation Station 561 Sample REVIEW uote boi cioidel 561 y ses sccesiehesuenceecsue asaskeh aun tease A O wah oes eace diel uae cecssemsce ee 561 Sample Senai Numbers sas citas 562 o haere E TAER ea tostaderelendestculee 562 Oppem Re Oe aa e ide 562 Component REVICW ansan aaa a aaa a a aaa aa a a aa 563 tn A E S ca tease A E E E 563 Sn E Aa a a a O A 564 Components Stats do 564 a Ssi eae E a lost e E a EE 564 Change Component Stalin aldea 565 Add Note to COMPONEN DO 566 xiv XTM026 A1 User Manual y A tid Se Re ia ies hcl ee ch i ae ie te Se a ie se ne 567 Component Noles cs Una cio 567 A 568 UPlIale REPO da o cc aaron 568 gt Operator MENUS ss lla dai isis 569 UPA o e o a es a 570 A A e cee A Sarcien Oea 572 PUNET IGO cun E A ta aenasinn cuttaatmedanadeest 573 PBA RGVIOW AIM AGS ic eieaa o noia 575 PAGGO lO Deena E O a a aa a E 576 Programs Menta lA ara 576 asks MONU sion ositos ri tenes Deed ends 977 Windows MA lo ES 577 en e ete re ne a a ea eee ne ee See eer 577 ADOULINSDCCT XK WINDOW bit ele E aleta 578 17 Status Log 579 12 PERO O 580 View Message DES oia 580 da A a A Se anced em iar moa enesee eats 581 18 Properties Window 583 19 Application Properties 585 FRE GUC Operatorlar a aeaa aa 585 Component Control a A E E dit 586 NumeniG COntrol Delia a 586 Enable Floating VWVINGOWS A area ees 596 20 Passwords 987 Password DM o LOS 588 PASS WOE MI o a aa 589 21 Glossary of Terms 589 22 Index 991 User M
137. 52 Print Preview Image 123 135 152 Process Image 123 152 Properties 283 Pseudo Colour 193 PTH Fill Analysis 252 PTH Fill Threshold 252 PTH Size 252 PTH Solder Edge Threshold 252 Range Measurements 207 Record Movie 135 Recording BGA Ball Count Analysis 231 Recording BGA Void Analysis 237 Recording Binarise Settings 189 Recording Package Void Analysis 259 Recording Pseudo Colour Settings 193 Recording Thresholds 228 Rectangle Annotation 221 Recursion 135 Region of Interest Definition 270 Remove Background Subtraction Image 196 Reset Tone Curve 180 Restore Image 123 135 152 Save Image 123 135 152 Save Tone Curve 180 Saved Regions of Interest 270 Scatter Free Radiogaph Linear Detector 152 Set Background Subtraction Image 196 Set Image as Background Subtraction Image 135 Shading Correction 101 412 Show Electrical Inspection Tools 283 Show Original Tone Curve 283 Smart Filter 231 Smooth 135 Smoothing Image 226 Standard Shading Correction Mode 102 103 Thesholding 228 User Manual XTMO26 A1 593 Index Threshold Exclusion 270 Tilt Angle 252 Tone Adjustment 180 Tone Control Properties 283 Tone Curve 180 Undo Image Processing 123 135 152 Unsharp Masking 278 Vertical Edge Detection 135 View Background Subtraction Image 135 Wire Sweep Measurement 266 X ray Image Display 169
138. 7 Image Processing Auto Tone Adjustment If Auto Tone Adjustment is selected in the Image Processing Properties on page 283 then the tone of the X ray image is automatically adjusted to give optimum tonal rendering This tone adjustment is made whenever the sample is moved and whenever an image is captured Auto Tone Adjustment analyses the histogram of the grey levels of the pixels within the X ray image It then adjusts the tone to apply the full dynamic range of the monitor to display the image In doing so the contrast of the image is optimised When an image is captured a specified tone curve may optionally be applied and an image processing filter may be applied These are set in the Image Processing Properties on page 283 Image with auto tone adjustment applied 168 XIMO26 A1 User Manual Image Processing Main X ray Image Window The main X ray image window shows the current X ray image This may either be a live image or one that has been previously saved to disk and then re loaded If quad image display is enabled in the image processing properties on page 283 then up to 4 images can be displayed individually or simultaneously Lp rege CT Siu User Manual XTMO26 A1 169 Image Processing Image Zoom The image may be enlarged and reduced within the display area in two ways The image is scaled in factors of V2 up within the magnification range of 1 to 25600 5 Zoomed in to see more detail
139. 7 Inspection Program Structure oocccconccccccncccocnnoconnnononnnonnnononnnononnnonannnonannnonnnnnnnnnnnnnnnnnannnenanenes 368 ERS DS AON EY aro ds ls 368 ATV FOG aM RATION Nai cule dentaassnos toute nessa atetinan tun tiesesseaanereuh dele mettcnntes deals 369 dual CAMION a o area edl 370 Creating an INSPECTION RP rOGl amie ic iia 373 Recorded Actions Teach CLG aria do 373 Adding Recorded Actions to an Inspection Program cccceeeeeeeeeeseeeeeeeeeeseeeesaeeesaeeeeseeeeeas 374 AGGING Save Mage ACIONS uta oia 375 Selecting X ray Conditions When Adding Acquire Image ACtiONS cccoocccccccncccccnccccnncononononos 376 Save Image Action mage Ty Pe tn aa a a 376 Example of Adding Recorded ACtIONS coooccccocccnococonnnncconcnonocnannnnononnnnnnnnnonnnnannnnnnannnnnnnnannss 377 AJANG ACIOS Manta la asilo iia ol lrcia 317 CAlIDPATIOM A CIA o il ls 378 P stional TOMA CES lio 379 IR eT e e ere eee ee 380 Seb and REPASO oo tues 381 Stepand Repeal COMPONER cee Rae 381 SLED and REPASA dio ee 381 Example of Step and Repeat usina pati it 382 Ediing an Inspecton Program rerio r ctl ans vem a a a a a N 385 Positional Calibration During Editing miersii eaaa i a E aaa N e e aata EA 385 Adding Samples Components and ACTIONS occccccccncoccncconnncnonnncnnnnnnonnnnnnnnnnnnnnnnonnnonnnnnononones 386 Deleting Samples Components and AC IONS ccccocccccoccncccccncconcncnonnncononononononnnnnnnnnnnnnnnenoninonos 387
140. 9 SS E a E 470 DICE Stace DE O o o 471 Slices for Centre of Rotation Calculation occocccoccccncnccnncnocinanoninononannnnnnncnononannnnnnannnnnnnananons 473 asi a Ta 2a cedecbt oats sau nasaeecumsanreusaneeed 475 FRECOMSEFUCTION QUalY o at ive du beceaujudl ick Buia Tocca ated dunce ticks ad gen oatinet Se ldeateedlinccelivard 476 Beam Hardening Correction ccccccccsssecccceseeeccesseeceseeecseseeecsaeeeeseaseeessaueeessageeessageeesssaseeesaas 476 NOS SRC ala oS Ni ct A 477 A A E 477 UE A E E 477 MAMA lala 478 O A ea 478 RECONStUCION SIZE ricotta 479 O A A ON Ta eR 479 Dl O oe cote E O E 480 Reconstruction Computer SelectiON cococcccconcccccnncconnncconnnccnnnncnnnnnonnnnnnonnnnnnnnnnnnnnnnonnnononinenos 480 ANS A A A 480 A rst ae pe a etal a ashiroaeamnel ana e meeeumeneienaes 481 A eRe oS Non ene a Sn Ne ED 481 Send Email NOTICIA adas 481 A suse te a a arose the a couse 481 A Sr A ro 482 A Jenene eine ao tO I er Re 482 As E rains Niort old Sone nm T 483 xii XTMO26 A1 User Manual Beam Hardening pel bre 10 pee er ieee ree nr cnc i mena re rte a t 485 12 3 DCT Batch 487 Creating a 3 D CT Batch Program cccccecccccseeecccceeeeeecseeceeeseeeeeeeeaeeessaueeeeaeeeeeeseaeeeesaeneeesaeneeessagas 488 creating as CT Protesis clado 488 Adding 3 D CT Profiles to the 3 D CT Batch PrograM ooccccccnoccnccccccnnccnncnnnonononnnnnacononnnncnnononens 488 Setting Up the Program Parameters ooccconccnc
141. 9 the image tone Sets the background colour of the X ray image window The colour is selected from a list of the standard colour black mid grey of white Starts the sample height calculation on page 99 function Available only on XT V 160 inspection systems User Manual XTMO26 A1 173 Image Processing Orbit Starts a continuous orbit on page 98 Available only on XT V 160 inspection systems Orbit once Starts a single orbit on page 97 Available only on XT V 160 inspection systems Stop Stops the manipulator movement on page 62 Available only on XT V 160 inspection systems Movement of Manipulator Axes The manipulator s axes can be moved when viewing a live X ray image by a number of actions upon the X ray image X amp Y Axes When a live X ray image is being viewed then it is possible to move the manipulator to centre a feature within the image window To do this double click upon the feature Note that the manipulator may not be able to move the sample to centre this feature if it is very close to the limits of its travel in either the X or Y axis or either axis is locked Magnification Axis The scroll wheel on the mouse can used as a virtual joystick When the mouse is over the active X ray image and the image displayed is a live X ray image then if the mouse wheel is clicked and held it enables a joystick function to control the magnification axis of the manipulator When the wheel is held down and mo
142. Adding Save Image Actions When recorded actions are added to an inspection program normally the operator will require that the image is saved to disk by the inspection program This allows for seeing f the image within the inspection report and to have a record of the image for arching You will normally see that the recorded actions do not include any Save Image actions A Save Image action is only recorded if the image is actually saved There is a function within the Inspection function that will automatically insert Save Image actions into the inspection program directly after certain actions This is controlled by the Inspection Properties In the Inspection Properties window there is a tab that specifies if this function is switched on it is by default and after what actions Save Image actions are automatically inserted General On Failure Save Image Action Save Image Control Automatically add save image actions Save X ray image Save colour image Add After Action BGA Analysis v Process Image BG4 void Analysis Tone Edit Pad Array Void Binarise Image Package Woid w Pseudo Colour Image Threshold Background Image Subtraction Measurement w Erode Dilate Visual Check It is not normally required to make any changes to these property values but they can be updated to a supervisor The Save X ray Image checkbox controls if the greyscale X ray image and image profile are saved lt is highl
143. Blade m Serial numbers 123 456 799 pe 234 567 820 ya Manipulator x ray Controller Shop Load Switch X rays OFF Supervisor Mode Hone _ Auto Condition Operator ID Operator IL Operator Mo 6 If configured in the application properties on page 585 then the operator s identity will need to be input into the Operator ID text box This is so that the 2 D inspection program report contains this information so that it is possible to track the inspection of samples with operators This text box will not be displayed if not configured within the application properties 936 XIMO26 A1 User Manual 2 D Inspections 2 D Inspection Program Selection 2 D inspection program Small Blade e To select the 2 D inspection program to run select the required program from the 2 D Inspection Program drop down list Sample Serial Numbers Serial numbers 123 456 709 iw 234 567 090 j When running the 2 D inspection program then the serial numbers of the samples need to be input This identifies the wall measurements with the individual samples The example above shows a program that inspects three samples per program run The orientation of the samples within the sample holder is shown below This is viewing the manipulator s turntable from above en F Sample 2 Array Source rT OJ User Manual XTMO26 A1 537 2 D Inspections Sample 1 is the closest to the X ray source and its serial number
144. CT acquisition for example the volume of interest tool 172 XIMO26 A1 User Manual Image Processing Context Menu and Manipulator Control Open Image Save Image Switch auto tone adjustment on Auto Range Image Reset Image Tone Set Display Background Colour Delete Edit Text Font Size d Colour Background Colour Context menu Open Image Save Image Switch auto tone adjustment off Auto Range Image Reset Image Tone Set Display Background Colour Calculate Sample Height Orbit Orbit Once Stop Delete Edit Text Pont Size Colour Background Colour Context menu for XT V 160 inspection systems If the user clicks upon the active X ray image with the right mouse button then a menu is displayed to allow easy access to some commonly used functions All inspection systems have the same functions available except the XT V 160 that has some extra functions specific to this system Open image Save image Switch auto tone adjustment on off Auto range image Reset image tone Set display background colour Calculate sample height Opens the dialog on page 128 to allow the opening of a saved image Opens the dialog on page 130 to allow the saving of the active X ray image Toggles the enabled state of the auto tone adjustment on page 17 function Auto ranges on page 188 the image to adjust the tone to fit the currently displayed live or saved X ray image Resets on page 18
145. Calculation progress Cancel Calculate On the image a crop box is displayed This crop box is used to identify the feature on the sample whose height above the manipulator tray is to be calculated User Manual XTMO26 A1 99 Manipulator Controller Note the following 1 A high contrast image gives best results 2 As the feature will move vertically in the image window during the calculation it is important to crop an area no bigger than one quarter of the whole image window 3 Itis also best to have the cropped area near the centre of the image see above example When the required area has been selected press the Next gt button to start the height calculation During the calculation the tilt axis will be moved and the required area will be identified in each new image captured If the software fails to identify the required area then an error message is displayed Sample Height Calculation Crop the area on the ray image that specifies the area of the sample whose height to calculate Mote 1 A high contrast image gives a best results 2 Crop an area no bigger than one quarter of the image 3 Have the cropped area near the centre of the image Failed to keep track of sample Please re define and try again Cancel o Calculate During the height calculation the progress is displayed on the progress bar To cancel the operation press the Cancel button Upon successful
146. Click rotates box around its centre Click and drag moves corner Click and h n E drag side Click and drag centre will move whole box E M Shift Key Click changes the size of the box proportionally 214 XIMO26 A1 User Manual Image Processing If a corner is clicked upon and the left mouse button is held down the corner may be dragged to the required position All other corners will stay in the present positions If the Shift key is held down at the same time as click and dragging the corner then the corner will be moved and the adjacent corners will be moved proportionally If one of the nodes in the centre of a line is clicked and dragged then it will move the whole side If the Control key is held down when a node is clicked upon then dragging the node will cause the box to rotate about its centre The whole box may be moved by clicking and dragging the centre node If measuring the thickness of material then the two edges of the material must start on one of the cyan lines and must end on the opposite cyan lines If they do not do this they will be highlighted in yellow and will be ignored If measuring the gap between material then the two edges must follow one of these rules lf Measure Using Base Lines is checked then edge of the objects must start and end on one of the blue base lines and the edge of the other object must start and end on the other blue base
147. Database W Insert results into database If at the end of a 2 D inspection program run the results data is to be inserted into the Nikon Metrology supplied database then check the Insert Results Into Database checkbox The database connection data will then need to be set up correctly Note that 2 d inspection results data can only be automatically inserted into the Nikon Metrology supplied database If the database being used is any other database then a CSV see topic CSV File on page 589 file can be created and then manually imported into the required database Database Server Mame Databaseserver SQLEXPRESS Authentication Use Windows Authentication hl Name Passiword These controls specify the database server and the authentication method The Name needs to be set to the computer name of the database server followed by a backslash and then SQLEXPRESS The Authentication method may either use Windows Authentication or Use SQL SERVER Authentication If the former is chosen then the Windows user information is used to log onto the database This will need to have been set up on the database If the latter authentication is used then a valid user name and password will need to be input Database Mame BladeGB Table MainTable The names of the database and the table into which the results data shall be inserted are specified in these text boxes User Manual XTMO26 A1 545 2 D Inspections Test Database Co
148. Intelligent Auto Conditioning Intelligent auto conditioning auto conditions the X ray source whilst monitoring the vacuum value This enables faster conditioning of high kV X ray sources whilst minimising the number of breakdowns The kV at which the auto conditioning starts is set by the user and when this kV is reached then the kV is increased until the maximum specified kV is reached If the vacuum level increases beyond parameters specified by the supervisor then the kV is reduced This will often ensure that there is no breakdown within the X ray source and the kV can be increased when teh quality of the vacuum has increased again To set up the auto conditioning process press the Auto Condition button This button stays depressed whilst auto conditioning takes place The Auto Condition Window will open Auto Condition Start ky Change to 1k steps at Maximum kv Defaults Setting Auto Condition Parameters Stark kv 55 ky Change to 1k steps at 110 ky Maximum kw 1605 kv Before starting the auto conditioning of the X ray source the parameters need to be set These can either be set to their default values by pressing the Defaults button or can be manually entered The Start kV defines the kV at which the auto conditioning process starts The Maximum kV defines the KV at which the auto conditioning process will stop increasing the kV This may be the maximum kV supported by the X ray source or lower if
149. KB see topic KB or Kilobytes on page 589 Kilobytes or MB see topic MB or Megabytes on page 590 Megabytes When the status log exceeds the maximum size set then the file is tuncated deleting the oldest messages User Manual XTMO26 A1 581 Status Log 982 XIMO26 A1 User Manual 18 Properties Window The properties for the various components within Inspect X are set within the Properties Window Properties arar controller Imaging Manipulator 2 D Inspection CT Application General Tone Control Annotation Camera Set Up Corrections Tools Show Binarise Show BGA Analysis Show Pseudo Colour Show BGA Void Analysis Show Background Subtraction Show Pad Array Void Analysis Show Measure fw Show PTH Fill Show Annotation Show Package void Show Erode Dilate Show Wire Sweep Show Thresholding Show Drill OFFset Images Folder D Imagesi Quad image display Save map File with image The exact components for which properties can be set depends upon the type of inspection system An example of the Properties Window is shown above User Manual XTMO26 A1 583 Properties Window The properties that may be set within this window are the following X ray Controller properties on page 32 Manipulator properties on page 78 Image Processing properties on page 283 Inspection properties on page 354 CT properties on page 427 Application properties on page 585 The
150. Loading From Disk 82 Map Acquisition Speed Quality 78 Mode 82 Position 82 Saving to Disk 82 Scanning 82 Zoom Control 82 Manipulator Saved Positions 69 Minimum Usable uA 34 P Page Set Up 569 Password Entry 5 Passwords Definition 587 Engineer 587 Engineer Password 5 Entry 587 Operator 587 Operator Password 5 Supervisor 587 Supervisor Password 5 Power Step Style 34 Pre Warning Delay 36 Print 569 All Properties 569 Image 569 Status Log 569 Print Preview 569 All Properties 569 Image 569 Status Log 569 Properties 583 Reconstructed Image Stack 455 User Manual XTMO26 A1 595 Index Script Buttons 353 Show Hide Passwords 569 Status Log 569 Show Hide Application Properties 569 Sinogram 455 Slice Stack 455 Status Log Delete Messages 5 9 Maximum Log Size 579 Properties 579 View Message Types 579 T Turning on the System 5 U User Interface Language Selection 5 Validation Station 561 Adding a Note to a Component 563 Changing a Component s Status 563 Images Folder 561 Input Sample Serial Number 561 Opening a Report 561 Reviewing Images for Components 563 W Windows Cascade 569 996 XIMO26 A1 User Manual Tile Horizontal 569 Tile Vertical 569 Windows Menu 569 X ray Controller Alignment X amp Y Shift 37 Alignment and Focusing Procedure 37 Auto conditioning 11 19 Auto
151. N oocccconncccoonocononocononononnconannccnannnonannnnnnnnnnnnnconannrnnnnnnnnnnnnnnnncnnnnnnnns 340 A A te E A oe A 340 A eee RRR ieee ee ee ee ee 341 BGA Void Analysis AGHON ace ick Pi cee once 341 Pad Array VOI ANAIVSIS ACUM ilatina 342 PRE te UMN MEANY SIS AC UO conan o dde oso ral 342 Package Voit Analysis ACH O Me sa dla 343 o a A et seettaasesea sy tasene haneseeieee 343 MENA CM o a eee 343 Restore Mage FNC UO errada ad a 344 Delete Annotation ACTION cooonccccnccccncconncconnoconcconnononcnnnnnonnnonnnonannnnnnnonnnnnnnnonannenanenannenaneninans 344 Save IMAG CoA CU OM assi 344 Mark Fare ACUO tato 346 Atay S OFACION ad 348 ONFE ACCIONS ea a a aaa a 349 FCIAC AM OS CUO BN a E cicica 350 Viewing the Results Of an Inspection ooocccccconnncccocnncccooconcncannnononnnnonnnnnnnnnannnnonannnnnnnnnnnnnnanons 351 SCHPEBUIONS peri tre nc a en Oe ee eee eee ee 353 User Manual XTMO26 A1 ix Add SCrpt BURON ar cee ees io 353 DElETE SCrDEBUTOM a door 353 Acquire Image Action in Script BUNONS oleadas 304 POPE A Gee os eee ae 354 General Properes A eee eee 355 On Failure Pros io 358 Save Image Action PrO PENES a 361 X ray Flux Calibration Properties ieee nie eee 362 Database Propecia 364 8 How to Get More Out of Inspection Programs 367 What iS an Inspection Program oococconccncononcnnccnncnnconononononcnnnnnnnnnnonnncnnnnnnrnnnnnnrnronnnrnnrnnnrnnnonancnnennnnos 367 Basic CONCEDII aaisan aaa a a cicled 36
152. No X ray Filtration To create a shading correction that uses either no X ray filtration or a fixed X ray filter then make sure that the Use Multiple X ray Filters checkbox is unchecked When this type of multi point shading correction is created then the X ray uA current is altered automatically to acquire the intermediate grey reference images The Frames to Average drop down list specifies the number of image frames to average for each shading correction reference image The larger the number of frames the better the reduction of the effect of noise within the images Note that on inspection systems fitted with either a curved linear detector or a Time Delay Integration TDI detector then it is recommended that the number of lines to acquire is set within the Imaging Set Up on page 288 and the Frames to Average is set to 1 The X ray uA to be used for the white reference image may be set before the Generate button has been pressed Once the Generate button has been pressed then the uA is set for the correction The X ray filtration used for the correction is specified in the Filter lists If the required value is not in either list then type the required value into the relevant box Entry of the X ray filtration used is important so that when the shading correction is loaded or updated the user will be prompted to install the specified filtration The White Target control specifies the grey level for which the correction is calculate f
153. O26 A1 User Manual Image Processing Clipping Clipping 4 yj BJ fo The clipping of the USM fringe applied is controlled by this slider Image Enhancement This image processing filter accentuates edges within an image Bond wires before enhancement Bond wires after enhancement User Manual XTMO26 A1 281 Image Processing Image Enhancement Pre fiter Q J y Filter 4 a Ml Eo Post Filter 4 p b lo Pre Filter Pre fiter J 9 This slider controls the smoothing applied to the image before the image enhancement filter iS applied Filter Filter 4 gt amp b The strength of the image enhancement is controlled by this slider The further to the right of the slider the thumb is placed the less image enhancement is applied Post Filter Post filter E g b Do The post filter slider controls the sharpness of the image enhancement applied 282 XIMO26 A1 User Manual Image Processing Saved Filters If a set of values for pre filter filter and post filter sliders are desired to be kept for further use these may be saved as a filter by pressing the Save button The values are then reloaded when the filter is selected in the Saved Filters control A saved filter can be deleted by selecting it in the Saved Filters control and then by pressing the Delete button Properties The image processing properties are those values that control the behaviour of the image pr
154. P Min 6 887 mm a ue Max 1 145 mm eo cc 2 PASS Min 1 652 mm Max 1 114 mm It is only possible to create and edit 2 D inspection programs when logged in at supervisor level 908 XIMO26 A1 User Manual 2 D Inspections Sample Requirements for Measurement Definition In order to be able to set up the wall measurements accurately a number of cut turbine blades will be required The blades will require to be cut at the point where measurements are to be made Then the wall measurements will need to be made accurately using a calibrated measurement device The measurements will then be used to calibrate the wall measurements calculated by the 2 D inspection program The cut blades will need to be accurately mounted so that the cut surface is parallel with the X ray fan beam Defining the Wall Measurements After 2 D CT Profiles have been acquired using the 2 D CT Acquisition function and added to the 2 D inspection program then the wall thickness measurements can be set up To do this press the Define button on the 2 D Inspection Program window when the program has been opened for edit on page 521 Wall thickness measurements Pressing the Define button will update the 2 D Inspection Program window to display the Wall Thickness Definition user interface Setting up the measurements for each slice is a three stage process e Selection of the slice e Defining the turbine blade within the slice e Defining the wall measurem
155. The entries named 1 2 6 select the same correction as selecting the same numbered beam hardening preset within CT Pro After this will be a list of custom presets and beam hardening look up tables In the example above there is one custom preset called Small Blade and one beam hardening look up table called TurbineBlade 1 To add a new preset press the Add button and select the required CT Reconstruction Parameter file xtekct This will be the parameter file edited by CT Pro that contains the required custom beam hardening coefficient values When the file is selected then a new entry is added to the drop down list and is named the same name as the reconstruction parameter file A beam hardening look up table is a text file that contains corrected attenuation for each grey level within the projection images Therefore it will have 65536 entries each line corresponding to a grey level from O as the first line and 65535 as the last line Each line will contain a floating point number in text format that defines the corrected attenuation for that grey level Note that the attenuation must be within the range 0 3 402823 X 1038 To add a bream hardening look up table press the Add button and select the required file that must have a bht file extension Note that beam hardening look up tables are available for future use User Manual XTMO26 A1 419 3 D CT Acquisition Noise Reduction The Noise Reduction drop down list allows the
156. Tone Control Annotation Camera Set Up Corrections Colours Arrows Cross Hair Shapes Orange Text Blue Text Background Transparent Text Size Scaling 1 0 Annotation Colours Arrows Cyan E E Cross Hair Shapes Grange i Text Blue E The Annotation Colours controls define the initial colour of each type of Annotation on page 221 object that can be added to the X ray image in the main X ray image window on page 169 For each object type the colours may be selected from the list in the menu The Text Background has an extra colour option of Transparent Arrows Cross Hair Shapes Text 292 XIMO26 A1 User Manual Image Processing Text Background Text Size Scaling The text displayed on the colour overlay of the X ray image can be scaled using the Text Size Scaling numeric control This is useful if the imaging device in the inspection system is large and the text is not easily read at a scaling of 1 0 Corrections Tab Image Corrections Geometric Distortion Enabled Shading Correction Enabled Valid time For reference images 3 gt hours Time For rays to die down 105 seconds Time to collect standard correction images 20 seconds Image Corrections The live X ray image within Inspect X is automatically corrected for geometric distortion and shading This ensures a high quality image that can be used within the image tools for analysis If there is a reason to
157. XTMO26 A1 13 X ray Controller Interlocks are made but X rays are not being generated Interlocks are made X ray generation has been initiated and the system is implementing the required pre warning delay prior to turning on X rays Interlocks are made X rays are on X ray controller is in Auto condition mode Check Coolant The X ray controller coolant needs to be checked It is possible for the X ray source to overheat This is usually caused by a lack of coolant or the coolant is not flowing adequately If this happens then switch off X rays and investigate the cooling system to find the cause of the problem Communications lost The communications have been lost with the SR X ray controller If this happens check to the serial link between the computer and the SR controller Vacuum Status This panel shows the current status of the vacuum within the X ray source It can be one of three states The vacuum within the X ray source is good X rays may be generated The vacuum within the X ray source is good enough for X ray generation but is not ideal If this state is displayed after the system has been pumping down for more than one hour then there may be a problem within the X ray source You need to contact either Nikon Metrology or your agent to have the system checked 14 XIMO26 A1 User Manual X ray Controller The vacuum within the X ray source is not good enough for X ray generation You need to
158. Xi sources or an external supply SR controlled The Xi sources with an integral power supply only have electro magnetic alignment and the sources controlled by an SR controller can be aligned physically and electro magnetically Physical Alignment This information is only relevant to X ray inspection systems with an SR X ray controller These X ray inspection systems have an electro mechanical MRA or mechanical alignment systems If the system is fitted with an MRA then the alignment is performed using the controls on the front panel Mechanical alignment is achieved by altering the two pairs of knobs at the base of the X ray source Both these the high voltage receptacle to be moved slightly within the X ray source Altering the position of the filament holder will change the position of the filament relative to the anode ring and magnetic lens physically aligning the source If an X ray source is perfectly aligned physically no electromagnetic alignment should be required The alignment will be correct for all operating voltages Xi Source Xi X ray sources controlled by the Xodiac hardware controller do not have physical alignment knobs The alignment is set by the X and Y shift sliders on page 49 only Inspect X stores the X shift and Y shift values for each kV setting in a look up table Consequently X shift and Y shift values must be set for every kV setting SR Controlled Sources AN SR controlled X ray source should be phys
159. a Analysis Delete Calibrate W Quick calibration Before starting the recalibration process it is possible to select Quick Calibration by checking the checkbox Quick calibration uses images averaged over a shorter interval is can speed up the recalibration process but might not give quite as accurate calculation of the required X ray current To start the recalibration process press the Start button During the process the progress bar will be updated and the quality of calibration for each flux calibration shall be displayed AL X ray Flux Calibrations Flux calibrations 1400 51 BG4 Analysis Delete Create Calibrate M Quick calibration Quality of recalibration 100 o Calibrating BGA Analysis Done User Manual XTM026 A1 31 X ray Controller Deleting X ray Flux Calibrations To delete X ray flux calibrations select the required X ray flux calibrations in the list and then press the Delete button Be aware that deleting a X ray flux calibration that is used by an Inspection Program will cause that program to fail when it is next run Setting X ray Conditions for an X ray Flux Calibration To set the kV and uA demand for a X ray flux calibration select the required calibration in the list and press the Set button Properties The properties of the X ray controller are those values that control the behaviour of the X ray controller and source These properties are available within the Properties Window on page
160. a detailed analysis press the View Results button This calculates a detailed analysis for the voids found in the pad array This detailed data is displayed in a separate window XA Pad Array Void Results 16 01 2007 16 14 31 Failed pads 12 Passed pads amp Worst pad void 20 1 Worst pad ID 17 Largest Void Total Void a 9 95 14 91 9 14 21 30 11 41 16 71 0 03 153 09 0 14 ce Da 0 07 2 04 450 a 4 02 15 00 4 96 11 4 16 67 1 57 106 69 21 99 14 07 16 39 tta 14 61 14 00 17 21 1 44 6 043 105 67 0 40 4 02 12 92 17 53 dba A 6 49 17 50 10 fe o 1 E J 4 z 6 T a 250 XIMO26 A1 User Manual Image Processing For each pad the following data is available Pad ID A numerical identifier X The X ordinate of the pixel that specifies the centre of the pad Y The Y ordinate of the pixel that specifies the centre of the pad Area The area of the pad in the current measurement units Largest Void This is the percentage of the pad that is area of the largest void Total Void This is the percentage of the pad that is void The full results may be printed by pressing the Print button This will display the standard Windows XP print dialog This is documented in the Windows help system The full results may be saved to a file on disk This is done by pressing the Export button A standard Windows save file dialog is displayed This dialog is documented in the Windows
161. a 2 D CT acquisition It is recommended that the CT data set is reconstructed and the centre of rotation is calculated This may be done automatically by selecting the options within the 2 D CT acquisition user interface before the CT data set is acquired or it may be done subsequently within CT Pro 2D It may be necessary to use different imaging or X ray settings to acquire useful reconstructed slice stacks for different parts of the sample For example the aerofoil and root of a turbine blade may require different settings If this is the case then each different set of conditions will require a separate 2 D CT acquisition which will create its own 2 D CT profile geometric magnification and therefore are acquired at the same f All 2 D CT profiles within an inspection program must be at the same magnification Z axis position 904 XIMO26 A1 User Manual 2 D Inspections Adding 2 D CT Profiles to the Inspection Program Once the required 2 D CT profiles have been created then these need to be added to the 2 D inspection program 2 D Inspection Operator ID Operator No 6 2 D inspection program Small Blade w Serial numbers 123 456 769 224 567 090 y To create an 2 D inspection program enter the required name of the program into the 2 D Inspection Program text box on the 2 D Inspection Window Then press the Create button The 2 D Inspection window will open up to display the program s parameters Note that
162. a il Reconstruction Size Volume size voxels Voxel size mm Reconstructed voxel size mm Disk space For projections GE Disk space For volume GE Temporary disk space GE Memory required to open volume GE Reconstruction Quality Reconstruction quality 100 s The Reconstruction Quality defines how the reconstructed image stack will be scaled If the projection images are 2048 x 2048 pixels in size and the whole image is to be reconstructed then a reconstructed slice volume of 2048 x 2048 x 2048 voxels see topic Voxel on page 590 would be created at 100 reconstruction quality However if the reconstruction quality is set to 50 then the reconstructed slice image would be 1024 x 1024 x 1024 voxels 418 XIMO26 A1 User Manual 3 D CT Acquisition Beam Hardening Correction Beam Hardening occurs because the lower energy X rays in the beam are stopped more effectively than the higher energy X rays Therefore as the material path length increases the mean energy of the X rays in the rest of the beam which has not been stopped gradually increases Thus the X ray beam becomes progressively more and more penetrating as it passes through the material To correct for beam hardening then select a value from the Beam Hardening drop down list Presets available in KK CT Pro Custom 1 6 presel a calculated bu CT Pro Beam Hardening Table m The drop down list consists of a number of values
163. a list of the available data sets will be displayed below the Open button Select the CT data set Folder 127 DatalSmall Blade 123 456 789 In this case select the required CT data set in the Select CT Data Set Folder drop down list and press the Select button Once the slice has been selected then the user interface will advance to the second stage of defining the wall measurements defining the turbine blade within the slice Defining the Turbine Blade within the Slice Define Sample Use the crop box bo define the sample within the slice Ibis best to crop relatively closely to the sample s edges Then press the Set button Set This stage of the user interface is used to identify the turbine blade within the slice This definition is then used to create a pattern matching model which is used to find the turbine blade when the program is run This is necessary to correct for minor positional differences when the program is run for different blades 510 XIMO26 A1 User Manual 2 D Inspections When this stage is entered a red crop box is displayed upon the image within the main X ray image window The crop box should be adjusted so that it contains the turbine blade upon which the measurements are to be made Once the crop box has been adjusted then press the Set button If the crop box is in the correct position already just press the Set button User Manual XTMO26 A1 511 2 D Inspections Adding Wall Me
164. a of the image through which no part of the sample or other obstruction will be seen during the acquisition of the scatter free radiograph The example below shows a live X ray image with the crop box To ensure that no part of the sample will be within the flux normalisation area press the Rotate button This will rotate the sample through 360 degrees whilst showing a live X ray image User Manual XTMO26 A1 469 2 D CT Acquisition Slice Setup A CT data set consists of a number of slice stacks Each slice stack contains one or more slices A slice is a 2 D horizontal slice through the sample This stage of the set up is to define the slice stacks that are required Slices Mame Height abowe datum Slices Slice Spacing Top 65 300mm 1 Middle 20 000mm 42 220mm 0 0 120 Bottom 0 300mm 1 Slice name Middle Slice position above datum 40 000 mam W Slice stack Slices in slice stack 20 Slice spacing 0 120 mm Cubic End position above datumi 42 260 mm Centre of Rotation Calculate automatically I Use top and bottom slices w Mowe the guideline on the image to select the required slice Then press the top or bottom button to select the slice For the centre of rotation calculation Centre of rotation top slice Centre of rotation bottom slice 470 XIMO26 A1 User Manual 2 D CT Acquisition Slice Stack Definition Mame Height above datum Slices Slice Spacing Top 65 500mm 1 Mid
165. ace is provided within the Inspect X application The CT Acquisition wizard is available as the CT tab on the main tab control Image Tools Inspections ET Sample Shading Centre of Reconstruction Setup Correction Rotation Setup Acquisition User Manual XTMO26 A1 403 3 D CT Acquisition There are a number of stages in the CT step by step user interface These guide the user through the processes that need to be performed to set up the acquisition of the projection images The current active stage is highlighted in white Any stage that is available to be selected will be highlighted by a darker grey background If the stage is not currently available then it will be greyed out and will not highlight when the mouse is tracked over it This will happen when a previous stage needs attention For example the white and black reference images need to be re collected Sample Setup Active stage Shading Correction Available stage when mouse over label eee Disabled stage Reconstructing the 3 D Volume The 3 D volume is reconstructed by a separate application called CT Agent This application manages the reconstructions requested by Inspect X and CT Pro to ensure that only one is done concurrently to ensure the fastest throughput 404 XIMO26 A1 User Manual 3 D CT Acquisition Sample Setup The purpose of this stage is to set up the position of the sample to set the X ray conditions and to define the imaging par
166. aced zo that the path length of material through the sample and compensator is roughly the same for all ray angles 450 XIMO26 A1 User Manual How to Get More Out of 3 D CT View in 3D Using a compensator piece to remove large differences in path length thereby reducing the dynamic range required When scanning a large cylindrical object there can be a large difference in intensity between the centre of the sample and the unimpeded beam Adding a normal filter may make penetration of both filter and sample impossible However by using a filter shaped as above the intensity reaching the detector from all parts of the sample can be made approximately the same Be sure to keep the compensation piece in place when collecting the white reference image User Manual XTMO26 A1 451 How to Get More Out of 3 D CT Unfiltered radiograph Filtered radiograph 452 XIMO26 A1 User Manual How to Get More Out of 3 D CT Compensated radiograph Filtered compensated radiograph User Manual XTMO26 A1 453 How to Get More Out of 3 D CT X ray Scattering X rays generally travel in straight lines Consequently the CT reconstruction code knows what path an X ray has travelled along from the point X ray source to a given pixel on a given projection image Sometimes X rays are absorbed and then re emitted either with the same energy or with a lower energy In this case the direction of t
167. acquire an image that is not automatically corrected then the Disable buttons can be pressed to disable each correction The Restore buttons re enable each correction Geometric correction is only used on systems fitted with a camera and image intensifier On an inspection system fitted with a flat panel the geometric correction controls are not displayed User Manual XTMO26 A1 293 Image Processing Reference Images Validity Time This control specifies the time period for which shading corrections are valid When a shading correction is created or updated it will remain valid for use within CT acquisition on page 403 for this period of time After this period has elapsed then the shading correction must be updated by acquiring new reference images X rays Die Down Time This control specifies the time period used by the shading correction function to allow the X rays to die down and any latency on the imaging device to decay when acquiring a black reference image This ensures that when a black reference image is acquired there is no latent image and facilitates a high quality shading correction Collection Time for Reference Images This control specifies the period of time over which shading correction reference images are averaged when Standard Shading Correction on page 103 is being used The longer the period then the smaller the influence of systematic noise within the imaging device 294 XIMO26 A1 User Manual 7 Inspec
168. added to the inspection program Save Image on page 361 actions will be inserted automatically if this checkbox is checked At which places in the list of recorded actions the Save Image actions are inserted is controlled by the Add After Action on page 361 checkboxes Save X ray Image When adding recorded actions to an inspection program if this checkbox is checked then a Save Image action will be inserted at the required points to save the X ray image without any colour overlay information Save Colour Image When adding recorded actions to an inspection program if this checkbox is checked then a Save Image action will be inserted at the required points to save the X ray image with colour overlay information for example annotation BGA analysis results etc Add After Action When adding recorded actions to an inspection program a Save Image action will be inserted after the actions of the type whose checkbox in this section is checked User Manual XTMO26 A1 361 Inspections X ray Flux Calibration Properties General On Failure Save Image Action ray Flux Calibrations Database x ray Flux Calibration These values are used when automatically updating raw Flux calibrations that are older than the validity period Time valid 24 2 hours Minimum quality 057 Quick recalibration Limit u change Recalibrate x amp Y shifts These properties specify how X ray flux calibrations should be recalibrated
169. ade 1 This properties page enables the management of the available beam hardening corrections The Beam Hardening Corrections on page 419 drop down list on the Reconstruction Setup on page 418 stage contains a list of available corrections These fall into 3 categories e Fixed presets that are available in CT Pro These are called 1 2 6 e Custom presets e Beam Hardening Look Up tables The fixed presets cannot be removed The custom presets and look up tables may be added or removed using these controls Add Custom Preset To add a new custom preset press the Add button and select the required CT Reconstruction Parameter file xtekct This will be the parameter file edited by CT Pro that contains the required custom beam hardening coefficient values When the file is selected then a new entry is added to the drop down list and is named the same name as the reconstruction parameter file 434 XIMO26 A1 User Manual 3 D CT Acquisition Add Look Up Table A beam hardening look up table is a text file that contains corrected attenuation for each grey level within the sinograms Therefore it will have 65536 entries each line corresponding to a grey level from O as the first line and 65535 as the last line Each line will contain a floating point number in text format that defines the corrected attenuation for that grey level Note that the attenuation must be within the range 0 3 402823 X 1038 To add a bream harden
170. ade off of frame rate and image brightness against image size Lines This parameter is only used on a line orientated imaging system such as a curved linear detector CLDA or a Time Delay Increment TDI camera On other systems it is not enabled The parameter sets the number of lines for which image data will be shown In Live mode this will be a rolling buffer User Manual XTMO26 A1 289 Image Processing Exposure This slider control sets the frame rate at which the camera captures image A slower frame rate allows for a longer integration time and is useful when capturing images at low power and kV X ray conditions As the X ray flux will be low a longer integration time allows for the accumulation of X rays on the imaging system Accumulation The accumulation function controls averaging in the low level image device interface It has the same effect as averaging images Digital Gain The digital gain control sets a bit shift for the image data as it is passed from the camera to the Inspect X application A gain of 1 X applies no digital gain When set to any other value the image data is bit shifted that number of bits to the left thus applying a digital gain to the image The effect of this is that if pixel has a grey scale value of N with a digital gain of O then this pixel would have a grey scale value of N 2 to the power of Digital Gain for non zero values Gain This control sets the gain within the imaging
171. after the first measurement is defined This helps in that the contours of the edges found within the measurement regions are drawn This helps to ensure that the region is correctly defined The thresholds may be altered at any time The grey level that defines the material of the sample being measured is set by either entering a grey level into the Material Grey Level numeric or by sampling it from the image To sample the grey level press the Sample check box button with the pipette icon next to the Material Grey Level numeric Then click upon a pixel within the X ray image that is material within the measurement region The grey level that defines the background is set in a similar manner using the Background Grey Level controls If sampled from the image then click upon a pixel in X ray image that defines the background within the measurement region It is recommended to pick a pixel close to the edge of the material When defining measurements it is recommended that the Threshold for Edge is set to 50 and the Adaptive checkbox is unchecked possible to only measure one type of material or the gap between one f As the material and background grey levels are global to the image it is material within the image at any one time 218 XIMO26 A1 User Manual Image Processing Threshold for Edge The Threshold for Edge specifies how the measurement algorithm finds the edges of the material The threshold is a percentage that the a
172. ailable Not available on all inspection systems SHIFT and CTRL keys held down with Left Mouse button image will pan when mouse is dragged Not available on all inspection systems SG ppp Quad Image Display eS If quad image display has been enabled in the image processing properties on page 283 then up to 4 X ray images may either be displayed individually or simultaneously Note that only one of these images can display a live image at any one time The mode of quad image display operation is controlled by the button at the top right corner of the X ray image window When pressed the 4 X ray images are displayed simultaneously When pressed the X ray images will be displayed individually User Manual XTMO26 A1 171 Image Processing The buttons numbered 1 to 4 control which X ray image is the active image In individual mode this will be the X ray image displayed Note that each X ray image has a completely independent set of image processing parameters JUNE p j LE iis i ware pe yo ae i Y y l The X ray image window displaying 4 images simultaneously Image Selection Main Image Window ap Image CT Setup If the inspection system is configured with CT then a tab control is displayed at the top of the image window This allows the selection of the required image This is either the X ray image or the image display required for certain stages of setting up a
173. ain better image quality Larger numerical values compress the file more but can introduce artefacts within the image Mark Failure Action When an analysis of an image has failed and the On Failure on page 349 actions have been run it is often useful to get the operator to mark the failures on an image during the running of the On Failure actions This is performed by executing a Mark Failure action This action will acquire an image and then display this image with an optional region of interest mask The failures are marked on the image by adding annotation on page 221 for each failure The default annotation is a cross hair Each failure may be marked with one annotation and optionally some text annotation if required Mark Failure ray Flux calibration 100 51 Use X ray Flux calibration ray conditions Image exposure i seconds Include map image Region of interest Mark Failure Mask wa X ray Flux Calibration ray Flux calibration 100 25 e The acquired image needs to be acquired using the repeatable X ray conditions to enable high quality analysis of the image This is achieved by using an X ray flux calibration on page 28 This control selects the X ray flux calibration for this acquire image action 346 XIMO26 A1 User Manual Inspections Use X ray Flux Calibration Use X ray Flux calibration w It is possible to just use the current X ray conditions for an acquire image action Thi
174. alibration calculates a rotation more than 0 5 degrees Reports Report SLT transform InspectionConcise hal Maximum size for staus map image 600 pixels Maximum size for map images 200 pixels Leading Zeroes in Incremented Names The data for each sample is saved to a folder named as the Sample serial numbers within a folder named as the inspection name within the Images folder on page 285 Windows sorts folder names using an algorithm that makes numbers easier to identify if they have leading zeroes If the Sample serial numbers are purely numeric then it is very helpful to have leading zeroes To enable the Inspection s automatic name incrementing function to add leading zeroes enter the number required into the numeric field If no leading zeroes are required enter 0 into this field Move To Load Position At the end of running a sequence the manipulator will move to the load position to assist loading new samples if this checkbox is checked If this is not required then clear this checkbox User Manual XTMO26 A1 355 Inspections Switch X rays Off At the end of running a sequence the X rays will be switched off if this checkbox is checked If this is not required then clear this checkbox Note that if Move To Load Position is checked then the X rays will always be switched off irrespective of the status of this checkbox Higher Precision The precision of the moves to position execu
175. ames that are used to create a rolling average The higher the number of frames the higher the quality of the X ray image Inspect X implements a motion detect feature so that when the manipulator is moved the imaging system temporarily returns to live imaging When the manipulator stops moving image recursion is re enabled This ensures the highest image quality whilst using image recursion This function is only available if an X ray controller is enabled Capture Image _ To capture an image from the live image in the main X ray image window on page 169 then press the Capture Image button This will capture the image as present in the main X ray image window on page 169 This button may also be used to abort a capture using averaging on page 138 process and to stop the recording of a movie on page 136 User Manual XTMO26 A1 137 Image Processing Average Image To capture an averaged image from the live image in the main X ray image window on page 169 then press the Average Image button This will capture an image by averaging the number of frames To set the number of frames press the option button next to the Average Image button and select the required number on the pop up menu 1024 Sl 256 125 64 32 16 me M 0 Whilst the image capture is being performed a progress bar is displayed to indicate how much of the process has completed The higher the number of frames the higher the quality o
176. ameters to be used to acquire the projection images When the user progresses from this stage the position of the sample on the manipulator is recorded as are the X ray conditions and the imaging device parameters Sample Setup Projections 720 Optimise Frames per projection Check that the sample is penetrated at all angles by Rotate pressing the Rotate button CT data sets are acquired with the centre of rotation in the centre of the image Press the Mowe button to centre the sample Move Flux Normalisation Apply Flux normalisation Crop an area on the image in which no sample is in view at all angles CT Arm Position Top C Middle le Bottom CT Profile User Manual XTMO26 A1 405 3 D CT Acquisition Projection Setup Projections 1663 Optimise Frames per projection The number of projections used when collecting the CT data set on page 589 and the number of frames averaged for each projection are defined by these controls The number of projections can either be set by entering a number into the numeric control or the Optimise checkbox may be checked If the Optimise checkbox is checked then the optimal number of projections will be acquired The optimal number of projection images should be pi 2 times the number of voxels required along the X or Y axis of the volume whichever has the more voxels A smaller number of projections is OK when detail at the edges of the volume is not so vita
177. ample 1 When an inspection is run then the user interface is updated to show the progress of the inspection and the Pass Fail status of each component inspected The results of the inspection are saved in an XML http www w3 org xml data file The results file can be easily viewed either within Inspect X on page 351 or within a web browser such as Internet Explorer Firefox Opera etc 350 XIMO26 A1 User Manual Inspections Viewing the Results of an Inspection The results information of an inspection program run is held in an XML http www w3 org xml results file This file will be found in the folder named the inspection name on page 297 contained within the images folder defined in the Image Processing properties on page 285 The format of the name of the results file is lt inspection name gt Samples lt sample ID sample ID gt isr xml where lt inspection name gt is the name of the inspection program lt sample ID sample ID gt is the sample serial numbers for each sample within the inspection program So that the results file can be viewed in a web browser for example Internet Explorer Firefox etc the XML results file is converted to HTML http www w3 org tr rec html40 using an XSLT http www w3 org tr xsIt stylesheet The XSLT stylesheet is fully customisable and required stylesheet can be selected in the Inspection Properties on page 354 It is possible to create an XSLT stylesheet
178. an Up Files Task Control Shading Corrections Clean up Remove Files older than months Inspection Programs Clean up Remove Files older than l months 3 D Batch Programs Clean up Remove Files older than Manipulator Maps Clean up Remove Files older than months Tone Curves Clean up Remove Files older than months Regions of Interest Clean up Remove Files older than months weeks User Manual XTMO26 A1 555 Scheduled Tasks Enabling amp Disabling the Task Task Control Enabled Next scheduled run 29 10 2011 20 57 31 If task is enabled The task can be enabled by checking the Enabled checkbox To disable the task uncheck the Enabled checkbox and press the OK button The next scheduled run time of the task is displayed on this tab Configuring the Clean Up Files Task The clean up files task can be configured to delete old files of the following types e Multi point shading corrections e Inspection programs This is only available on systems with the inspection program function enabled e 2 D inspection programs This is only available on systems fitted with a linear detector e 3 D CT batch programs This is only available on systems with the 3 D CT acquisition and 3 D CT batch program functions enabled e Manipulator maps e Tone curves e Regions of interest Each of the file types can be enabled for cleaning up by checking the required Enabled checkbox Clean up
179. and press the Set button This position is used for both updating the standard shading corrections and filament recalibration Time Out For Task Warning If no programs are running when the calibration task is to be run then a warning message on page 553 is displayed This warning message is displayed for a period of time and if the user does not select to delay the task during this period then the calibration task will run Time out period 120 seconds The Time Out Period numeric control sets how long shall be the time out 950 XIMO26 A1 User Manual Scheduled Tasks Setting the Task s Schedule The task s schedule can be set to one of the following options e Daily e Weekly e Monthly Run task now After the schedule has been specified it is possible to run the task immediately by checking the Run Now checkbox and pressing the OK button Running the task immediately will not change the scheduled run time for the task Setting a Daily Schedule for a Task Run task every 2 Daily O Weekly Monthly Start time 20 00 00 Perform this task Every day O Every days To run a task on a daily basis select the Daily radio button The time at which the task starts to run is entered in the Start Time numeric control Then the task can be run at this time every day by selecting the Every Day radio button Perform this task Every day Every 2 3 days Optionally the task may be run ev
180. anual XTMO26 A1 xv 1 Introduction The Inspect X software controls Nikon Metrology X ray inspection systems The X ray inspection system consists of the following components e X ray generating system X ray source e Sample manipulator e image processor Inspect X controls the X ray inspection system either under manual control or programmatically Simple and complicated inspection routines can be programmed by the use of the Inspection program function on page 295 Inspect X may be remotely controlled by another application using the Inter Process Communications IPC interface Limitations of Liability Whilst every effort has been made to ensure that all of the information supplied in this manual was correct at the time of generation Inspect X is being continually developed by Nikon Metrology Inspect X also gives the advanced user the ability to interface Inspect X with third party software components through the use of IPC interface Nikon Metrology has no control over the third party software components Nikon Metrology cannot and do not accept any liability whatsoever for any damage or injuries caused to either persons data or materials that may arise from the use or misuse of any information supplied in this manual regardless of the accuracy of said information Installing Software The computer within the X ray inspection system is an integral part of the system and acts as the control computer for the system It is not a gene
181. applications High compression values cause much less visible artefacts within the image and better image compression hence smaller images than standard JPEG This format is not very widely supported by third party applications JPEG Compression Compression y FET Higher quality More compression The level of compression within a JPEG or JPEG2000 image file can be specified using the slider Numerically smaller values compress the image file less but retain better image quality Larger numerical values compress the file more but can introduce artefacts within the image The preview image can be used to assess the trade off of image quality against file size Image Intensifier Fields This button is only available on inspection systems fitted with a multiple field image intensifier This button allows the easy switching between the image intensifier fields The required field is selected from the pop up menu that is displayed when the option button next to the Image Intensifier Fields button is pressed The entries in the menu depend upon the image intensifier fitted Normal oom 146 XIMO26 A1 User Manual Image Processing Iris Control This button is only available on inspection systems fitted with an image intensifier and a camera that has a computer controlled iris The control of the iris enables the reduction of noise on the image Noise is reduced by closing down the iris The values in the pop up menu
182. ar densities but different chemical make up to be distinguished Sample Setup Projections F2C otirnise Frames per proj ctior 32 v Cuieck that tie sanple is penetrated at all angles by AE pressing the Rotae button CT data seks are acquirsd with khe contre of rokation in Move the centre o the mage Press the Move button to centre the sample Dual energy enabled x ray conditions Energy 1 ky Set uA Energy 7 ki Set uA Flux Normalisation apply Flux normalisation _ ap a area on the image in which no sample is in view ak al andes LI Arm Position gt op C Middle fe Bottom LI Profile oad When dual energy CT acquisition has been enabled for the system then Dual Energy is selected by checking the Dual Energy Enabled check box When dual energy has been selected then the X ray conditions have to be explicitly recorded by pressing the relevant Set button User Manual XTMO26 A1 409 3 D CT Acquisition Flux Normalisation Flux Normalisation Apply Flux normalisation Crop an area on the image in which no sample isin view at all angles Flux normalisation is a process that compensates for variations in brightness within the projection images within a CT data set The reason that the brightness can vary slightly is that the X ray flux can vary slightly over a period of time even though the X ray conditions have not been changed This variation can
183. around the features being inspected to allow for the cumulative positional inaccuracies Creating an Inspection Program There are two ways of creating an inspection program The first is to manually add each sample component and action to the program from the edit inspection program user interface The second is to use the recorded actions Recorded Actions Teach amp Learn Whilst images are acquired and analysed by the user Inspect X records the actions that can be automated within an inspection program This is an always on feature that involves no processing overhead Not all actions are recordable in particular actions that only work with user input are not An example of a non recordable action is the Wire Sweep Analysis tool The recorded actions allow the user to be able to save a set of actions already performed to an inspection program As a result of this you do not have to go into a programming mode to create an inspection program The recorded actions buffer is cleared and the recording starts again whenever an image is acquired or loaded from disk Recorded Actions Acquire Image Tone Edit Measurement An example of the recorded actions In the example window shown above an image has been acquired a tone edit has been applied and then a measurement has been made using one of the line edge detect mode tools User Manual XTMO26 A1 373 How to Get More Out of Inspection Programs There are some action
184. ary the uA until the flux calibration is recalibrated or it fails as it cannot get enough brightness when there is no further available uA e g it has reached the X ray source s UA limit User Manual XTMO26 A1 323 Inspections Recalibrate X amp Y Shifts Recalibrate 1 amp Y shifts w When the recalibration of an X ray flux calibration fails to calibrate it is possible that the X amp Y shifts on page 49 within the X ray source need to be recalibrated This can be done automatically on systems that support this function XT V 160 and XT V 130 If the Recalibrate X amp Y shifts checkbox is checked and the X ray flux calibration fails to recalibrate then the X amp Y shifts will be automatically adjusted and then the X ray flux calibration is recalibrated for a second time If the checkbox is unchecked then the action will just fail after the first attempt to recalibrate if the correct uA cannot be determined The Recalibrate X amp Y shifts checkbox and function is only available on the XT V 160 and XT V 130 systems Fiducial Calibration The fiducial calibration action performs a 2 point positional calibration using fiducial marks It is used to correct for small positional differences between the placement of samples on the manipulator The method used is to acquire two reference images and then when the action is executed it acquires images where the fiducial marks are expected to be located and compares the tw
185. ases the delay by 1 second and the button decreases the delay by 1 second The minimum value for the pre warning delay is 1 second and the factory default is 3 seconds 36 XIMO26 A1 User Manual X ray Controller Note On systems that use an SR X ray controller the number of seconds read out is not available Focus This panel contains controls that allow the user to align and to focus the X ray beam When the X ray beam is not aligned then the following may be observed e No image is seen e An image is seen but focus is poor e The brightness of the image decreases when the power or current is increased When the X ray source is focused at a particular kV demand the focus data is stored in persistent storage so that it may be recovered when that kV demand Is used at a later time The focusing can be performed at all the required kV demands The focus look up table should not normally be updated as it is set up by Nikon Metrology when the X ray inspection system is built lts focal values are dependent upon the lens within the X ray source If the image appears to be out of focus then the user should check the X and Y shifts and physical alignment of the filament within the holder Optical and X ray Focus Optimum focus of the X ray source is achieved when the focus spot on the target is as small as possible Then and only then will optimum image quality be achieved This is not the same as the focus of the optical system on th
186. asurements and Calibrating Thresholds The third stage of defining the wall measurements is adding the measurements and calibrating the thresholds The method of doing this is to add wall measurements that measure either the minimum or maximum wall thickness in specific regions of the blade where the measurement is known from being measured using a calibrated measurement device Then the thresholds can be defined and calibrated Measurements ey C 1 Jael Call out line at top Check minimum measurement w Minimum measurement 1 300 mm Check maximum measurement Maximum measurement mm Parameters Measurement type Measuring material C Gaps between material Material grey level 11671 Aubo Set Background grey level Ol Threshold For edge 50 Adaptive w Search width 6 Auto 5et Calculation Errors To calculate the required parameters minimise the error sums below Min measurement error 0 0543263 Max measurement error Lo 912 XIMO26 A1 User Manual 2 D Inspections Defining Thresholds 2D Inspections Material grey level 26360 Auto Set Background grey level 53760 Threshold For edge 50 Adaptive w Search width 6 Auto Set When setting up the wall measurements it is recommended to initialise the thresholds in the Parameters section The grey level that defines the material of the turbine blade is set by either entering a grey level into the Material
187. at action will happen when the button is pressed namely Switch X rays On or Switch X rays Off If the interlock is broken then it will not be possible to switch X rays on The state of the interlock will be shown within the X ray status read out After the button is pressed to switch the X rays on there is a delay before the X rays are actually generated by the X ray source This is the pre warning delay and is a safety feature The length of the pre warning delay is set by the supervisor in the general properties panel Whilst the system is waiting for the pre warning delay to elapse it will update its X ray status read out to indicate that the system is in the pre warning mode X ray Status This panel shows the current status of X ray generation The states are as follows Interlock not engaged X rays cannot be generated nor can the X ray source be auto conditioned If the interlock is broken then the X rays will switch off automatically and will not be able to be switched on again until the interlock is re engaged The interlocks for X ray generation include the following The door on the X ray inspection system The interlock key switch on the X ray inspection system Vacuum quality The speed of the vacuum turbo pump The lamp detect failure on the X rays On lamp Sa eS SS On some X ray inspection systems the service or imaging door All of these must be satisfied to engage the interlocks User Manual
188. ation on page 322 fails then the inspection program run will be aborted as the failure of such an action is fatal The On Failure actions will not be run after the failure of calibration action General On Failure Saye Image Action On Action Failure Stop on Failure Audible alarm on Failure Move to next sample on First Failure Run Failure actions Stop On Failure When running an inspection program it is possible to stop the sequence running on any failure by setting this checkbox When a failure is identified a prompt will be displayed to ask if the sequence is to continue running or to be aborted To allow the sequence to run on even if a failure is identified then clear this checkbox Note If an X ray flux calibration or positional calibration action fails when an inspection is run then a failure message will always be displayed as these are catastrophic errors Audible Alarm on Failure When Stop on Failure has been selected then if this checkbox is checked the computer will sound its beeper to alert the operator that a failure has occurred during an inspection run User Manual XTMO26 A1 359 Inspections Move to Next Sample on First Failure When Stop on Failure is not selected then this checkbox is available When checked if the inspection program identifies a failure on a sample it will not perform any further actions for that sample but will move onto inspecting the next sample if any This allows a samp
189. ator is about to automatically perform a homing operation Please remove any objects from the manipulator tray before pressing the OK button 29 10 2003 12 18 25 Information Application terminated 30 10 2003 12 18 29 Error The file D SoftwareDevelopment 177 NGIFramework NGlApplication bin Debug Default Properties InspectxCommonForms 4pplicationPropertiesForm ini does not exist a The Status Log window can be shown by selecting the Show Status Log menu item in the window menu on page 577 The window displays the current data within the status log The status log consists one or more messages Each message has the date and time of the event s occurrence its severity and the message s text There are three levels of severity Error Warning and Information Error messages are coloured red warning messages are coloured gold and information messages are coloured blue The messages are sorted by date and time by default The oldest message is at the top of the list and the latest is at the bottom of the list The list may be sorted by severity error messages then warning messages and finally information messages or by the message s text as well To select the method of sorting click upon the relevant column header within the Status Log window The columns within the Status Log window can be re ordered by clicking upon the column header and dragging it to the required column position By right clicking upon the Status Log window a c
190. ave Image Switch auto tone adjustment off Auto Range Image Reset Image Tone Set Display Background Colour Calculate Sample Height Orbit Orbit Once Stop Delete Edit Text Pont Size Colour Background Colour User Manual XTMO26 A1 93 Manipulator Controller Tilt and Rotate Axes Control The tilt and rotate control has two functions It allows the accurate setting of the tilt and rotate axes and it provides feedback about the current positions of the tilt and rotate axes The tilt axis position is shown by the distance of the green control point from the centre of the circular control The rotate axis position is shown by the angle in a clockwise direction of the green control point from the upper vertical line The concentric circles on the control describe 15 degree steps in the tilt angle with the inner most circle being 0 degrees tilt and the outermost circle being 75 degrees tilt The radial lines on the control describe the rotation angle in steps of 30 degrees with the upper vertical line being 0 degrees rotation Rotational angles are positive in the clockwise direction To demand a new tilt and or rotate angle click on the green control point and drag it to the desired position Note that the control point will turn red in colour whilst it is being moved and snaps to the points on the grid within the circular control When the mouse button is released the control point will turn green and the tilt and rotate axes
191. avelled since the last time they were zeroed to the current position The read outs give the distance in millimetres or inches as an absolute distance distance along the X axis and the distance along the Y axis To perform a measurement follow this procedure 1 Move the manipulator to the start position for the measurement 2 Zero the measurement by pressing the Zero button 3 Move the manipulator to the end position for the measurement Read out measurement To facilitate the measuring switch on the centre cross in Annotation in Image Processing or the grid in Annotation in Image Processing If measuring a distance in one axis it may be helpful to lock on page 68 the other axes The units in which the measurements are made is defined by the Measurement on page 199 image processing tool The units will either be millimetres or inches User Manual XTMO26 A1 67 Manipulator Controller Locking Axes Mag Tilt Rotate A Y There are times where it is desirable to disable movement on one or more manipulator axes For example when making measurements using the manipulator it may be appropriate to lock one or more axes to stop movement on these axes To lock movement on an axis press the Lock button corresponding to that axis When pressed the button will stay depressed to show that movement on that axis is inhibited To re enable movement of that axis press the Lock button again and the button will be released M
192. ay be saved in two different file types CSW File cev Text File tet CSV File on The results are saved as comma separated values This file type can be page 589 easily imported into an Excel spreadsheet Text File This saves the results as a text file 236 XIMO26 A1 User Manual Image Processing Pass Fail When the results of an analysis have been calculated a pass or fail status will be displayed The analysis of the BGA has passed using the specified parameters Fail The analysis of the BGA has failed using the specified parameters Calibrate Calibrate As the analysis of the BGA requires parameters that use the current measurement units it may be necessary to re calibrate the measurements This is not necessary if entering data in pixels To re calibrate press the Calibrate button and this will display the Measurement on page 197 image processing function BGA Ball Void Analysis This image processing function is for analysing voids within the solder balls of a Ball Grid Array see topic BGA on page 589 BGA The analysis will count the number of voids and the percentage of the balls area that consists of voids for each complete solder ball in the X ray image o o o c 06 a An example of BGA balls with voids User Manual XTMO26 A1 237 Image Processing Flatten Edge Detection Region e Threshalding SmartFilter Ball Edge Threshold fl 37632
193. ay image in the main X ray image window on page 169 To sample from the image press the Sample From Image check box which will stay depressed and then click upon the X ray image to define the grey level It may be helpful to zoom the X ray image to do this User Manual XTMO26 A1 229 Image Processing Light Threshold Light Threshold n n n AA To set the grey level that defines the light threshold either change the value of the slider by clicking upon its thumb see topic Slider Thumb on page 590 with the left mouse button and dragging it long the slider or by sampling from the X ray image in the main X ray image window on page 169 To sample from the image press the Sample From Image check box which will stay depressed and then click upon the X ray image to define the grey level It may be helpful to zoom the X ray image to do this Percentage Highlighted Highlighted Sa The percentage of the image highlighted is displayed in this control If a region of interest has been defined then this percentage refers to the percentage of the region of interest that is highlighted Define Region of Interest To define or update a region of interest or to load a saved region of interest press the Region button This will open the Region of Interest on page 272 window When the region of interest is defined close the window by clicking upon the close box on the right hand end of the window s title bar Add Results t
194. background colour of the text object Mem text Blown wirel When Edit Text is selected then a dialog is displayed to allow the editing of the text Small Medium Large The size of the text font can be selected from the sub menu Black Red Orange Yellow Lime Green Cyan Blue Transparent e 50 Black 224 XIMO26 A1 User Manual Image Processing The background colour of the text object can be selected from the sub menu This menu has the same options as the object colour menu except for an extra Transparent option Add or Delete Annotation Objects f Add Delete _ When clicking upon the X ray image in the main X ray image window either an annotation object will be added or be deleted These radio buttons control whether an object is added or deleted When in delete mode the annotation objects no longer required on the image can be deleted by clicking upon the object s move handle Delete All Annotation Objects Poe Delete All To delete all annotation objects on the X ray image in the main X ray image window press the Delete All button Normal or Bold Style e Mormal Bold The annotation objects on the X ray image can be either displayed in Normal style or Bold style The style control affects all annotation objects on the X ray image except for text objects The bold style is useful when printing images smaller than actual size An example of bold annotation o
195. bel Placement Call out line at top f The Call Out Line At Top checkbox controls the placement of the text at the end of the call out line of the currently selected measurement Reg i F Region 2 FAIL ia Lode ie Min 1 98 mm Max 1 921 mm Max 1 921 mm Call out line at top Call out line at bottom Defining Minimum Allowable Measurement Check minimum measurement Minimum measurement 1 910 mm If the selected region is to measure the minimum distance within the region defined on the image then the Check minimum measurement checkbox must be checked and the minimum allowable measurement is entered into the Minimum measurement numeric Defining Maximum Allowable Measurement Check maximum measurement w Maximum measurement 1 950 mm If the selected region is to measure the maximum distance within the region defined on the image then the Check maximum measurement checkbox must be checked and the maximum allowable measurement is entered into the Maximum measurement numeric Deleting Measurements If a wall measurement is no longer required on the image then select the required measurement in the Label drop down list and then press the Delete button To delete all wall measurements on the image then press the Delete All button User Manual XTMO26 A1 517 2 D Inspections Editing a Measurement All parameters except the name of a measurement can be updated To do so select the required measur
196. bjects User Manual XTMO26 A1 225 Image Processing Add X ray Conditions ray Conditions To add the present X ray conditions to the image as an annotation object press the X ray Conditions button If the X ray conditions namely kV demand and power or current demand have been changed since the image was captured then the present X ray conditions will be added rather than the ones used when the image was captured Erode Dilate Erosion and Dilation is often used to produce a mask image for use in Background Image Subtraction The resultant image can highlight fine detail within an otherwise confusing sample The actions of the Erode and Dilate functions are equal and opposite and are usually used together Remove Holes From Dark Areas 10 Apply Remove Holes From Light Areas 10 Apply Erosion Erosion is a process that expands the black and dark detail within the image This effectively makes the white and light sections of the image decrease in size and they do not necessarily keep their exact shape Applying an equal number of erosions and then dilations will remove small white and light detail from the image Grey Erosion To apply erosion to the image press the Grey Erosion button This process can be applied any number of times Each time the black and dark areas of the image will expand in size Image before erosion 226 XIMO26 A1 User Manual Image Processing Image after erosion Dilat
197. buttons at the top of the window changes the panel displayed below them This gives access to each component s properties After the properties have been updated they are saved to disk by pressing the Save button The properties may be reverted to the last saved state at any time by pressing the Revert button The window is closed by either pressing the Close button or by pressing the close box on the window s title bar 984 XIMO26 A1 User Manual 19 Application Properties The Application Properties control the behaviour of the Inspect X application The Application Properties can be shown by selecting the Show Properties menu item in the window menu on page 577 A All property values are NOT saved until the Save button is pressed Login Require Operator ID Sub Systems Load ray controller Unlock Load manipulator controller Unlock Load image processing Unlock Application Behaviour Delay on key down in numeric w controls before value entered Seconds Enable Floating windows Require Operator ID Require Operator ID If this checkbox is checked then an operator ID will be need to be entered on the Launch Screen on page 5 when Inspect X is started up User Manual XTMO26 A1 585 Application Properties Component Control Load ray controller Load manipulator controller Load image processing These check boxes control which components are initialised and made visible within user interface
198. by the passage through the sample a quantity known as the X ray attenuation is only possible if the X rays all have the same energy Trying to do so otherwise will lead to what are known as beam hardening artefacts on page 448 It is not possible within the inspection system to make the X ray beam contain all the same energy X rays make it monochromatic or mono energetic without cutting most of the flux within the beam It is possible to narrow the spread of energies in the beam by cutting out just a range of energies This can be achieved by using a filter in front of the X ray source to remove many of the lower energy X rays from the beam Energy flux Unfiltered in vac uur Maximum photon energy Photon energy T 50 100 150 kev Spectrum of a filtered beam User Manual XTMO26 A1 447 How to Get More Out of 3 D CT Beam Hardening Beam hardening occurs simply because the lower energy X rays in the beam are stopped more effectively than the higher energy X rays Therefore as the material path length increases the mean energy of the X rays in the rest of the beam which has not been stopped gradually increases Thus the X ray beam becomes progressively more and more penetrating as it passes through the material Do not forget that using a filter reduces the number of detected X rays in the CT scan even if the brightness is the same as more energetic X rays make the detector glow more brightly So remember to compensate
199. cations it may not be possible to move the sample completely out of view In this case Standard 2 D CT is a better option Translate Rotate 2 D CT takes slightly longer to perform A Translate Rotate CT is not available on all 2 D CT inspection systems 460 XIMO26 A1 User Manual 2 D CT Acquisition Projection Setup Projections 3400 Optimise Frames per projection The number of projections used when collecting the CT data set on page 589 and the number of frames averaged for each projection are defined by these controls The number of projections can either be set by entering a number into the numeric control or the Optimise checkbox may be checked If the Optimise checkbox is checked then the optimal number of projections will be acquired The optimal number of projection images should be pi 2 times the number of voxels required along the X or Y axis of the reconstructed slice whichever has the more voxels A smaller number of projections is OK when detail at the edges of the reconstructed slices is not so vital For each projection a number of frames can be averaged This is set up by selecting the required number of frames on the Frames per Projection drop down list The choice of the number of frames is often influenced by the imaging device parameters on page 288 exposure gain etc In the case of a linear detector the exposure of the detector is probably the most significant Lines per Translation Lines p
200. cify positions by increment Rotate 318 XIMO26 A1 User Manual Inspections Step and Repeat Specify Manually When the manipulator is at the start position a crop box will be displayed on the X ray image This is used to draw a box around the first feature to be inspected within the actions being replicated Once the crop box has been defined then move the manipulator to locate the same feature on the last of the objects to be inspected within this crop box The more accurately this is done the better the positional accuracy will be for the replicated actions for the new actions 1 Move the manipulator to the position on the last Feature that corresponds to the First position on the initial feature 2 Enter number of steps relative to the main X ray image and press OK Moke that this Function works For regularly spaced identical Features Number horizontally q al Number vertically 7 hata Then enter into the Step and Repeat Window the number of objects horizontally and vertically These are the objects horizontally and vertically with respect to the X ray image displayed This may be different to your sample s initially loaded orientation if you have rotated the sample using the manipulator Note that the example above defines the number of samples as a 4 by 2 grid Then press the OK button to create the new components When step and repeat has created the new actions it is highly recommended that the positionin
201. ckage voiding Package Yoid Pararmeters Get Get Package Void Analysis Parameters Pararmeters Get To perform void analysis on a package within an acquired image it is necessary to set up the required parameters in the Package Void on page 259 image processing tool This includes setting up any region of interest mask on page 270 Once the analysis has been set up then press the Get button to save the parameters in this action Annotation Action This action adds the specified annotation to an acquired image Annotation Get parameters fet Get Annotation Pararmeters Get To get the current annotation on page 221 press the Get Parameters button Threshold Action This action applies threshold on an acquired image Threshold Image Pararmeters Get User Manual XTMO26 A1 343 Inspections Get Threshold Parameters set parameters Get To perform thresholding within an acquired image it is necessary to set up the required parameters in the threshold on page 228 image processing tool This includes setting up any region of Interest on page 270 Once the analysis has been set up then press the Get button to save the parameters in this action Restore Image Action This action will restore an acquired image back to its edit state when it was acquired Delete Annotation Action This action will delete any annotation on the acquired image Save Image Action After analysis the acquire
202. co aca eoaee 2 6 NENA AAA gs er cca o ROO O seem E E ae mage ane eee caesar 211 NOS NONE tt ta 211 IN ClO oy cis ia Se ia di a 211 Saved Regions of Mies ae cece aren Say ne grist a ead 217 MAMA cach ee a ai Ele are Red Ea ie ae la oad Salad ae oar ag 278 UNAS iMac ro ata 278 Senda a A 280 PA a E E ia 280 E o o O E 0 E E E E E ree 281 Mage ENN ante Men Erica AAA 281 POPO FMMCD sschiisctoueletde tetas atten hate sere o E 282 A a seta hte AOC y eh ead wae a ete tt tate a ea Ata seam 282 POSERO Posta cal eae cece 282 Saved FOIS otto 283 A a ao a a he a a ch Oe a 283 General TAD serene eens sateen a ii dd 284 Tone COnmol Taba e di totes aaa e o 286 Camera Se cUD Ta tt de 288 AAMIMOTATION POPE St e e de c 292 Core cion D nt rai ao do 293 T Inspections 295 A 296 INSPECTION Manage met A 296 INSPECION SCIECUOM 2 a od di 297 sample Sena NUDE dades 297 RUN ASPE CUO si o add a 297 reato INS OS COM concessions a R a a N a a e 298 EGICINS DOCHO y tiie A a a a N seen idauaaseancseaniesmesdeme onda 298 Del tte INSPECION sra a a A a a e ads ey 298 Creating an INSPECCION sorain ies AEE 299 Recording ACION S airada AA wheat 299 Reorder ACION S a dd at 299 EXECS ACION meriya dad 299 Delete ACI n e a eee a a a e N aoe 300 AQUA ACHONS TO INSDCCUON ii oda 300 Editing an InSPeciON aria 303 Sample Man AG SIMS IM sessed a E E E E 304 vill XTM026 A1 User Manual Component Management A eas aaa 304 Action MANTE MEN iaa 304 DAVE IASPeCcUO Nota
203. completion the calculated sample height is automatically entered in the Sample Depth numeric Anti Collision Sample s maximum height above table 150 i mm The XT V 160 inspection system has an anti collision function As the imaging system can be tilted over to 75 degrees it is likely that the imaging system could collide with the sample upon the manipulator table In order to avoid this happening there is a Maximum Sample Height function that enables the specification of the maximum height of the sample above the manipulator table For example if the sample is 150 millimetres high then enter 150 mm into the Maximum Height edit box Note that measurements are specified in the currently selected measurement unit Selection of the units is in the Measurement on page 199 image processing tool 100 XTM026 A1 User Manual 6 Image Processing The image processing function within the Inspect X software consists of a tool bar that controls the imaging system a main X ray image window on page 169 and a set of image processing functions on page 283 The control tool bar is located to the left of the main X ray image window and the image processing functions are to the right of the main X ray image window On the operator level user interface there is a simplified form of the tool bar Image Corrections For the correct functioning of the software there are a number of image corrections that are automatically applied to the X ray i
204. computer may then be selected from the Available Computers drop down list and added by pressing the Add button Remove Computer To remove a computer from the Reconstruction Computers list select the name in the list and either press the Delete key or press the Remove button For Inspect X to successfully acquire a CT data set on page 589 using a specified reconstruction computer this computer must have CT Agent installed and running Enable Email Notifications Enable email notifications If this check box is checked then CT Agent will attempt to send an email notification of the reconstruction job status when the job is complete If email notifications are required then the Require Operator ID on page 585 option must be set and the user must enter a valid email address as the Operator ID on page 480 on the Acquisition user interface CT Agent will need to be correctly set up If correctly configured CT Agent will send an email message when the reconstruction job added by Inspect X at the end of a CT data set acquisition is completed Volume Display Program The Volume Display Program numeric control specifies the number of bytes per voxel used by the program used to display the reconstructed image stack as a 3 D volume This is used when calculating the memory required on page 479 to be able to open the volume 430 XIMO26 A1 User Manual 3 D CT Acquisition Output Properties Volume Format Float
205. correction imaging device The target grey level for the white image is calculated as the average grey level in the white reference image This ensures that the shading correction normalises the grey levels within the image During the acquisition of the images for the shading corrections to be calculated it is possible either to have Inspect X to e To reuse the X ray settings last used to acquire shading reference images for the imaging mode This is chosen by checking the Use Previous X ray Conditions checkbox e Determine the X ray uA value automatically This is chosen by un checking the Use Previous X ray Conditions and the Manually Set X ray Current checkboxes e To manually set the uA value This is chosen by checking the Manually Set X ray Current checkbox e fa shading correction already exists for the imaging mode then it is possible to just acquire the white image only by checking the Acquire White Image Only checkbox You can do this to speed up the calculation of the shading correction If a shading correction does not exist for the imaging mode and the Acquire White Image Only checkbox is checked then both the white and the black images will be acquired 104 XIMO26 A1 User Manual Image Processing For repeatability it is recommended that the previous X ray settings are re used If the X ray filament has been replaced since the shading correction was last taken for the imaging mode then it is possible that the
206. ct X is installed indicates what is normally possible User Manual XTMO26 A1 437 3 D CT Acquisition Panel Scan CT These properties are only available on systems fitted with a scanning flat panel Compensate For imaging latency The only property that can be set for Panel Scan CT is the Compensate for Imaging Latency property Flat panel imaging devices have a longer latency time than image intensifiers For example if a sample is in view and then quickly removed a ghost of the sample is left on the flat panel for some time This ghost may not be easily discernible to the eye but may have an effect when performing Panel Scan CT The reason for this is that the panel is moved to one side an image is acquired and then the panel moves to other side and another image is acquired The second image may have a ghost remaining from the first image This is caused by the latency of the panel If problems are seen in the reconstructed volumes then the CT data set can be acquired again with Compensate for Imaging Latency checked The software performs actions to remove the ghost images to ensure a high quality volume 438 XIMO26 A1 User Manual 10 How to Get More Out of 3 D CT Getting the best quality results out of your CT system can seem like a black art at first Once the initial training is over when several weeks may have passed by it is often difficult to remember all the steps tips and advice to get the best results To make
207. cted then the volume rendering program converts the data to 16 bit unsigned integers The memory required to load the volume is half that if no input conversion is selected Automatic scaling of attenuation coefficients Range min max C Percentiles If Range is selected then the minimum and maximum attenuation coefficients within the volume are mapped to 0 and 65535 This effectively stretches the data within the volume to use the full dynamic range of the 16 bit unsigned integer If Percentiles is selected then the input percentiles are used by the volume rendering program to decide which attenuation coefficients are mapped to O and 65535 Low percentile 0 20 z So High percentile 99 50 o Note that the histogram algorithm within the volume rendering program relies upon converting the attenuation coefficients to a 16 bit floating point number This will fail if the attenuation coefficients are outside the range of representable values which is 65504 to 5 96E 08 0 5 96E 08 to 65504 432 XIMO26 A1 User Manual 3 D CT Acquisition 16 Bit TIFF Image Stack When this option is selected then the reconstructed data shall be output as a TIFF image stack There is one TIFF image for every slice in the Z axis of the volume This option will use about 50 of the disk space required for a 32 bit floating point volume TIFF scaling of attenuation 1 0000 The data within the TIFF images is scaled using t
208. ction computer BLADERUNMER ye The reconstruction computer that receives the CT data acquired by the 2 D inspection program can be defined by selecting it in the Reconstruction Computer drop down list If the drop down list does not contain the required computer then this can be added by updating the reconstruction computers on page 430 in the CT properties The folder that contains the 2 D inspection results data and CT data sets is specified by the CT Data Folder controls To set the correct folder press the Select button Folder needs to be updated to be the CT data folder on the selected f Whenever the reconstruction computer is changed then the CT Data a reconstruction computer Shading Correction Safe Position Shading Correction Safe Position Safe position set w With the samplets mounted move the manipulator to a position where Set there nothing in view and then press the Set button When a 2 D inspection program is run it is possible that the shading corrections require to be updated The length of time that a shading correction is valid is specified in the image processing properties on page 294 When a program is run and the shading correction needs to be updated then the samples must be out of view when the correction is updated This may either be done by prompting the user to remove the samples or by automatically moving them out of view 924 XIMO26 A1 User Manual 2 D Inspections If it is possible to
209. ctions are set up and updated using the this function The Shading Correction window is opened by pressing the Shading Correction button on the Image Processing Tool Bar Shading Correction Shading correction mode Standard correction O Use previous ray conditions recommended Manually set X ray current All imaging presets Only acquire white image gt Multi point correction Disable shading correction 102 XIMO26 A1 User Manual Image Processing Standard Shading Correction The standard mode of shading correction applies an offset and gain correction using a linear fit This modelling of the response of the imaging device is of a quality that gives good images for radiographic inspection of samples Standard mode shading correction is enabled by default and will be used unless Multi Point Shading Correction on page 107 is loaded by the user Standard mode shading correction is calculated by acquiring two images e Black image with no X rays on e White image with X rays on and the image as near saturation as possible For every significant imaging mode a standard shading correction is required For an inspection system fitted with an image intensifier and camera the different imaging modes are limited to the intensifier field the camera exposure and if applicable the camera binning For a flat panel the different imaging modes include binning mode digital gain and exposure Not
210. current imaging set up then the following user interface shall be displayed Differences Correction Present Exposure 40 00 2000 User Manual XTMO26 A1 413 3 D CT Acquisition Each of the conditions that do not match are displayed The example above only shows one condition that does not match To update the imaging set up to match that of the shading correction press the Correction button Once this has been done then the shading correction may be loaded To retain the current imaging set up press the Present button The imaging set up will not be altered but the shading correction will not be loaded If a new shading correction is to be created then press the New button This will open the Shading Correction on page 102 window This window gives full control of creation editing and deletion of shading corrections Shading corrections will remain valid for use within CT for a limited period A of time This time is set in the image processing properties on page a 294 Shading Correction Selection for Dual Energy Energy 1 0 Energy 2 Disable shading correction Name 40ms 100k 9544 we When dual energy has been selected in the CT Properties on page 427 then extra controls will be displayed to allow the specification of the shading correction for each energy When the Energy 1 radio button is checked then the Name box allows the selection of the shading correction for X ray energy 1 Similarly when
211. d then the following prompt will be displayed If they are all still valid then this message will not be displayed Information 1 Shading references used within this program require to be updated Do you Wish to update these and run the program A prompt will be displayed to ensure that the correct X ray filtration material is inserted Information LA Please insert the ray Filter of 4 000 mm of Copper 528 XIMO26 A1 User Manual 2 D Inspections If any of the serial numbers entered have already been inspected then the following warning prompt will be displayed Warning AN Starting this operation will overwrite existing data TF you continue the existing data will be lost Continue and overwrite data Archive data as a ZIP File and then continue Cancel If the Cancel button is pressed then the 2 D inspection program run will be aborted and no data will be lost If the Continue button is pressed then the results data for the samples that have already been inspected will be overwritten by this program run If the Archive button is pressed then the results data folder will be archived by creating a ZIP archive of the folder An informational window will be displayed whilst this archive operation is in progress Then the inspection program will continue its run Archiving Progress Compressing Folder DACT Data Small Blade 23 456 789 into ZIP archive DACT Data Small Blade 235 456 769 zip A
212. d the legend on the Scan button will change to Stop The scanning process can be stopped by pressing the Stop button or letting it run to completion Delete Scan Area To delete one or more pre defined map areas press the Delete Scan Area button The Delete Map Areas window will be displayed Delete Map Areas Select areas to remove 10x10 10x20 User Manual XTMO26 A1 87 Manipulator Controller Select the area s that you wish to remove from the Scan Area button s option menu and press the Remove button When finished close the window Load Map Image A saved map image can be reloaded by pressing the Load Map Image button Re use of manipulator map images will only work if the items are held in a fixture on the manipulator to ensure feature alignment Save Map Image Manipulator map images may be saved to disk as bitmap images by pressing the Save Map Image button The map images may then be re used by loading them when required Print Map To print the map image press the Print Map button This will display the print dialog to allow the printing of the image If the map is in Normal on page 88 mode then the map image without any status information will be printed If the map is in Status on page 88 mode then the map image with the status information will be printed Map Mode Mormal The manipulator map can be used in two modes e Normal mode Double
213. d Fail threshold specifies the allowable percentage of a BGA solder ball that may be a single void within that ball before it fails this analysis If there is any void equal to or greater than the fail threshold specified then it is marked as failed in the results This control is only available when using the thresholding BGA void analysis In the analysed image all voids greater than the Single Void Fail threshold are coloured orange and all other voids smaller than this threshold are coloured green Calculate Results Calculate When the parameters that define the BGA void analysis have been entered press the Calculate button to calculate the results of the analysis A Pass or Fail indicator is shown User Manual XTMO26 A1 243 Image Processing View Results View Results When the parameters that define the BGA void analysis have been entered to view a detailed analysis press the View Results button The full results consists of a detailed analysis for the voids found in the BGA solder balls This detailed data is displayed in a separate window Also the X ray image show the results for each BGA solder ball X BGA Ball Void Results 06 09 2007 15 21 49 Failed balls 4 Passed balls 2 Worst ball void 13 1 Worst ball ID 1 Average Diameter mm rea square mm Compactness Roughness Voids Largest Yoid Total Void 0 781 0 479 1 14 1 0 5 5 7 13 1 0 759 0 453 1 13 b 6 5 0 3 8 0 739 0 429 1 13 a 1 3 3 10 0 0 766
214. d Repeat Samples 380 Transforming the XML Results File 396 Uses of the Map 389 Validation Station Adding a Note to a Component s Results 397 Validation Station Changing the Status of a Component 397 Validation Station Checking the Results for a Sample 397 Validation Station Networking 397 Viewing the Inspection Report 392 X ray Flux Calibration 368 Inspections 295 296 Acquire Image Action 332 Actions 315 Annotation Action 343 Background Image Subtraction Action 339 BGA Analysis Action 341 BGA Void Analysis Action 341 Binarise Image Action 338 Components 310 Create Action 315 Create Component 310 Create Inspection 296 Create Sample 306 Delete Action 315 Delete Annotation Action 344 Delete Component 310 Delete Inspection 296 Delete Sample 306 Edit Inspection 296 Editing 303 Erode Dilate Action 340 Execute Action 315 Fiducial Calibration Action 324 Manual Creation 299 Mark Failure Action 346 Measurement Action 339 Package Void Analysis Action 343 Pad Array Void Analysis Action 342 Position Calibration Action 328 Process Image Action 336 Properties 354 Pseudo Colour Image Action 338 PTH Fill Analysis Action 342 Range Measurement Action 340 Recording Actions 299 Reorder Actions 315 Reorder Components 310 Reorder Samples 306 Repeatability 295 Restore Image Action 344
215. d and is OK Change Status Pass Fall The required status of the component can be selected within this window and a note may be also added to explain why the status has been updated Pressing the Update button will add a note to the component within the inspection report and the status will be updated If the window is closed without pressing the Update button then the component s status will note be changed The changed status of the component is not saved to disk until the Save on page 568 button is pressed User Manual XTMO26 A1 565 Validation Station Add Note to Component A note can be added to a component by pressing the Add Note button Notes can contain whatever information the operator wishes to add This could provide extra information about the identified failure When the button is pressed the Add Note to Component window is displayed Add Note to Component Missing Balls 41 and 45 The required note can be entered in the text box and added to the component within the inspection report by pressing the Add button If the window is closed without pressing the Add button then no note will be added page 568 button is pressed A The note added to the component is not saved to disk until the Save on 966 XIMO26 A1 User Manual Validation Station Map Map A To display a window that shows the inspection map with the component being inspected indicated press the Map button T
216. d dea ie ten ae 226 DIAM A A 227 Remove Holes from Dark Areas aiii is 228 XTMO26 A1 User Manual Remove Holes from Light Areas iii eae en alee eee edad 228 IE FUE STO LCUING sra ad is 228 DAK lolis 010 10 Peete erence att rene nm E meen nt mera meen terete rere 229 Eat Tres taa o O ene area ere o eee 230 Percentage FIgnlIG Meda a A A A 230 Define Region Of Interest scissione aa ea io 230 Add Results to Mage NOLES 0 a A a 230 Baba PANY Slo sra aia 231 Defne Region of Mele St rate ista 232 BONBE Ole ta aca 233 Exo uded BOA Bal eee aren eee ene ee ee nen neon ds 233 Ball Edge Threshold racial one 233 Perfect Ball Dia i E 234 Exclude Objects Below Diametro bd ewan Riedie ee 234 Undersize Fall Aresnold ontsan e ane eal 234 Oversize Fall TASA ete eial 235 Calculate RESUS ida oas 235 VIEW FUI Results 235 Passi Pl o do il 237 Callbrale dois 237 BOGA Ball old Analysis a ido 237 Analysis Pi 238 image Plate nl a Batata nae 240 Define Region Of Interest ci isin tee ie edi cues ad eee a Sade 241 Smart Alter dd band 241 Ball Edge Nes Nina 242 vola FIL T PSSM OIG aia onda 242 Fall TORTOSA Si AAA E 243 Calculate Result iaa 243 VMIeWROSU Sad a 244 PASSARE AM capecta stun back a a du SPs sated ada aaie css Sens A a eeoosn Coulda 246 Pad Arnav Voit ANGIY IS naa 246 mage Platte MING usual Aa 247 Delne Pals ld aro 248 Vod Edge VARESHOIG piscis 249 Overall VoldingFall a dar a 249 SINGIS VOIGIING Palio oia 250 VICW Resulta o o 250
217. d image may be saved to disk by an action of this type Save Image File name Image O02 Bit depth f g g Colour File 1 Apply tone to image JPEG quality Factor 40 Image File Name File name Image 0001 Images are saved in a specific folder However the name of the image is specified by this text box The folder which will contain the saved image in a folder named the sample serial numbers on page 297 which is contained within a folder named the inspection name on page 297 contained within the images folder defined in the Image Processing properties on page 285 344 XIMO26 A1 User Manual Inspections Image File Format File Format TIFF tif we The image file format is specified by this control If the file format is set to JPEG or JPEG2000 then the JPEG quality factor can be entered Bit Depth Bit depth 3 Cc 16 The number of bits per sample per pixel is specified by these controls Note that 8 bit images are smaller than 16 bit images but if the camera within the inspection system produces more than 8 bits then the least significant bits of each pixel will be discarded If you wish to save all of the image data for ultimate quality then select 16 bits 16 bit images may not be able to be read by some third party image viewing and editing applications Note that Windows Bitmap files and JPEG images can only be saved as 8 bits per pixel Colour File Colour File
218. d once the reconstruction parameter file has been saved by that application it is possible to import the beam hardening correction on page 476 into Inspect X Once the beam hardening correction is available in Inspect X then it needs to be used within the 2 D CT profiles within the 2 D inspection program To do this follow these steps Select the 2 D CT Profile in the CT Profiles list in the 2 D Inspection Program window 2 Press the Edit button This re loads this profile into the 2 D CT Acquisition user interface 3 On the 2 D CT Acquisition user interface select the Reconstruction Setup tab and select the required beam hardening correction in the Beam Hardening Correction on page 476 list On the 2 D Inspection Program window press the Save button Repeat the steps for all of the 2 D CT profiles that require beam hardening correction Upon completion press the Done button on the 2 D Inspection Program window This will break the connection between the 2 D CT profile in the 2 D CT Acquisition user interface and the profiles in the 2 D inspection program User Manual XTMO26 A1 507 2 D Inspections Defining Wall Measurements The 2 D Inspection Program function is designed to be able to measure the wall thickness of turbine blades It can measure the minimum and maximum wall thicknesses with a number of user defined sections This section describes how to set up these measurements CU 1 FAIL CC 1 PASS Max 1 578 mm
219. d to existing Create new component Mew component name The recorded actions may either to added to an existing component within the selected sample or a new component can be created The selection of the required radio button on page 590 determines which of these operations is performed when the Add button is pressed If the Create New Component radio button is selected then a new component will be created using the name in the text box and added to the end of the components list for the selected sample within the inspection program User Manual XTMO26 A1 301 Inspections Add Save Image Actions Save image actions will be automatically inserted If this message is displayed when the recorded actions are added to the inspection program Save Image on page 344 actions will be inserted automatically At which places in the list of recorded actions the Save Image actions are inserted is controlled by the Inspection Properties on page 361 If this message is not displayed then no Save Image actions will be inserted and the recorded actions will just be added exactly as specified in the recorded actions window Note that the Save Image actions are only inserted into the inspection program and do not get added to the list of action in the Recorded Actions on page 299 window Save Inspection Save i When recorded actions have been added to an inspection program the changes to the inspection program can be saved
220. dd a new preset press the Add button and select the required CT Reconstruction Parameter file xtek2dct This will be the parameter file edited by CT Pro 2D that contains the required custom beam hardening coefficient values When the file is selected then a new entry is added to the drop down list and is named the same name as the reconstruction parameter file 476 XIMO26 A1 User Manual 2 D CT Acquisition A beam hardening look up table is a text file that contains corrected attenuation for each grey level within the sinograms Therefore it will have 65536 entries each line corresponding to a grey level from O as the first line and 65535 as the last line Each line will contain a floating point number in text format that defines the corrected attenuation for that grey level Note that the attenuation must be within the range 0 3 402823 X 1038 To add a bream hardening look up table press the Add button and select the required file that must have a bht file extension Note that beam hardening look up tables are available for future use Noise Reduction The Noise Reduction drop down list allows the selection of noise reduction processing applied to the sinograms as they are reconstructed into the reconstructed image stack The values in the drop down list correspond to the noise reduction preset values in CT Pro 2D Note that selecting a noise reduction preset can reduce the sharpness of edges in the reconstructed image stack Interp
221. ded in the inspection report Maximum Size for Status Map Image In an inspection report an image is included in the report to show the status of each component analysed This numeric entry box sets the maximum dimension of the status map image included in the inspection report The status map included in the inspection report file is a click map image that allows the user to view the report data for each component by clicking upon the red or green overlay on the image This makes reviewing the report data easier User Manual XTMO26 A1 357 Inspections On Failure Properties This is an action in the main Inspection program Execute action Failure identified Action Allowable failure count exceeded Skip to nex sample _ This is an action in the main inspection program Execute next action This is an action in the main inspection program 1 action of next sample if one exists Action failure logic 398 XIMO26 A1 User Manual The number of actions is defined by the supervisor This example shows 2 actions Yes Continue or abort Abort Terminate program Inspections When an action fails to execute then the logic as detailed in the flow diagram above is executed The logic is controlled by the properties set in the On Failure tab of the Inspection Properties If a calibration action such as fiducial calibration on page 324 or X ray flux calibr
222. dle 40 000mm 4 80rnm 0 0 120 Bottom 0 300mm 1 This list specifies all of the slice stacks that are defined for the CT data set In the example above there are 3 slice stacks two of which contain 1 slice and one stack that contains 20 slices Slice name Middle Bottom position above datum 40 000 mm lw Slice stack Slices in slice stack 20 Slice spacing 0 120 mm Cubic End position above datumi 42 280 mm Add a Slice Stack To add a slice stack first ensure that no slice stacks are highlighted in the slice stack list This is important because if you have a slice stack selected in the list then this slice stack will be edited Add the name of the slice stack in the Slice Stack box This identifies the slice stack within the reconstructed image stack on page 590 The files within the image stack that are from this slice stack will have this name as a prefix and the slice number within the slice stack as a postfix Then enter the bottom of the slice stack This will be a measurement in the Y axis direction i e vertically from the datum point on page 467 defined in the Corrections stage User Manual XTMO26 A1 471 2 D CT Acquisition If a single slice is required make sure that the Slice Stack check box is unchecked If a slice stack of multiple slices is required then check the Slice Stack check box For slice stacks with multiple slices the end position top of the stack is calculated automatica
223. ds in the BGA solder balls p To define or update a region of interest or to load a saved region of interest press the Region button This will open the Region of Interest on page 270 window When the region of interest is defined close the window by clicking upon the close box on the right hand end of the window s title bar Smart Filter SamartFilter In both types of BGA void analysis is it possible to use the Smart Filter function to automatically remove features in the image that are not BGA solder balls The edge detection function switches the Smart Filter function on by default O e O a O 6 gt BGA void analysis image using Smart Filter oor BGA void analysis image without Smart Filter These images show the effect of not having the Smart Filter switched on User Manual XTMO26 A1 241 Image Processing To switch the Smart Filter on press the Smart Filter button so that it stays depressed To switch it off press the button again to release it Ball Edge Threshold Ball Edge Threshold i 210 a J E This set of controls are only used in the thresholding BGA void analysis as it requires to have set the grey scale value of the edge of the solder balls in the BGA To set the ball edge grey level either change the value of the text box adjust the slider or by sampling from the X ray image in the main X ray image window on page 169 To sample from the image press the Sample From Image
224. e This file contains all of the information about the run including the wall measurements and is stored in the CT data set folder If selected within the program then an HMTL http www w3 org tr 2001 rec xhtmI11 20010531 report and a CSV see topic CSV File on page 589 export file are created The 2 D inspection data is saved in the selected CT data folder on the reconstruction computer selected within the program The folder structure for the results is shown below CT Data Folder 2 0 Inspection Program Name serial Number Serial Number Sinograms CT Profile Mame Serial Mumber User Manual XTMO26 A1 533 2 D Inspections This is different to the CT data sets acquired by the 2 D CT acquisition function which produces data sets in this folder structure CT Data Folder Date amp Time Stamp Slice Stacks 2 D Inspection Results Data For each 2 D inspection program there will be a folder within the CT data folder whose name is the same as the program s name This will contain all of the CT data sets and measurements made by that program Within this folder will be a number of folders Each of these folder contains the results data for a particular run of the program The folders will be named with the serial numbers of the samples For example if the program was set up to inspect serial numbers A123 B234 and C345 then the folder will be named A123 B234 C345 This folder contains the XML results fil
225. e and if selected the HTML report and the CSV export file Also within this folder will be folders named the same as each 2 D CT profile within the 2 D inspection program Each of these folders contains the sinograms acquired for that 2 D CT profile the reconstructed image stack on page 590 a copy of the 2 D CT profile and the reconstruction parameter files Inserting 2 D Inspection Results into a Database If the results data from a 2 D inspection program run are to be inserted into a database this can be done automatically for the database that Nikon Metrology N V supply This is enabled in the 2 D Inspection properties on page 544 If the database being used is any other database then a CSV see topic CSV File on page 589 file can be created and then manually imported into the required database 934 XIMO26 A1 User Manual 2 D Inspections Calibrating a 2 D Inspection Program When a 2 D CT data set is reconstructed then the centre of rotation of the sample within the sinogram needs to be determined accurately to ensure the highest quality of the reconstructed image stack on page 590 It is recommended that the centre of rotation is calculated automatically when the 2 D CT profiles are acquired before adding them to the program Subsequent runs of the program then use this fixed centre of rotation 2 D Inspection Operator ID Operator No 6 2 D inspection program Small Blade Serial numbers 123 456 789 24 56 3890
226. e warning message will be displayed It is recommended to follow the advice in such a warning message User Manual XTMO26 A1 117 Image Processing Bad Pixel Correction Flat Panel Calibration Dialog Flat Panel Calibration Bad Pixel Correction Pixel is bad if less than 40673 E Auto Set Pixel is bad if greater than 53809 Grey Level Pixels Max 60906 Min 4013 Average 4 954 Std Dey 1958 24 Mon Linear Pixel Identification Find non linear pixels Pixel is bad if max or min outside standard deviations Pixel is bad if standard deviation is outside average standard deviations Manual Bad Pixel Identification When in manual mode click on a pixel to add it to the map 4 manually added pixel can be ie removed From the map bw clicking upon it again Manually bad pixels are coloured orange Only manually added pixels can be removed Image Selection This set of radio buttons allow the selection of the image to be viewed whilst bad pixels are being identified This can either be the white image the grey image the black image or a live image Whenever one of the images is selected then the bad pixel parameters and the histogram is updated If the Live image is selected then a live X ray image can be viewed to check that the bad pixels have been identified 118 XIMO26 A1 User Manual Image Processing Bad Pixel Parameter Setting Pixel is bad if less than 40673 Auto Set Pixel is bad iF greater tha
227. e 2 Activate Image 3 Activate Image 4 Print Image Ctrl P Print Preview Image Page Set Up Print Status Log Exit Alt F4 Programs Menu Fie Programs Tasks Windows Help Help The programs menu is only displayed on systems that have either 2 D Inspection Programs or 3 D CT Batch Programs configured 3 D CT Batch Crri B 2 D Inspection Cbrl 1 Window Menu Fie Programs Tasks Windows LL Switch To Supervisor Show Status Log Help User Manual XTMO026 A1 569 Menus Help Menu File Programs Tasks Windows Help ll Show Help About Inspect x Supervisor Menus File Menu File Programs Tasks Windows Help Open Chrl 0 Save As Chrl 5 Activate Image 1 Activate Image 2 Activate Image 5 Activate Image 4 Print Image Ctrl P Frink Preview Image Page Set Up Print Status Log Exit Alt F4 Programs Menu Fil Programs Tasks Windows Help The programs menu is only displayed on systems that have either 2 D Inspection Programs or 3 D CT Batch Programs configured 3 D CT Batch Ctrl 6 2 D Inspection Ctrl 1 570 XIMO26 A1 User Manual Tasks Menu File Programs Tasks Windows Help ff Calibrations Clean Up Files Windows Menu File Programs Tasks Windows Help Switch to Operator Show Properties Show Status Log Show Passwords Show System Calibration Help Menu File Programs Tasks Windows Help Ee Show Help About Insp
228. e Processing Image Information AA Popas J ize When the mouse tracks across the X ray image in the main X ray image window on page 169 this panel displays the X and Y coordinates to the image pixel under the mouse relative to the top left hand corner of the image and the grey level of the pixel Supervisor Level Control Tool Bar The tool bar controls what image is being displayed within the main X ray image window on page 169 and opening and saving the image Inspection systems that are fitted with a curved linear array image detector then the tool bar is slightly different and is described within the Linear Detector Control Tool Bar on page 152 section Cojo User Manual XTMO26 A1 135 Image Processing Live Image To view a live X ray image within the main X ray image window on page 169 the press the Live Image button The image within the main X ray image window is then the view of the object being inspected providing the manipulator has been moved to view the object If no image is seen then switch the X rays on on page 22 This function is only available if the X ray controller is enabled Live Image Processing Mo To view a live X ray image and to apply image processing to the image in real time press the Live Processing button The processing applied to the image is selected from the pop up menu that appears when the option button next to the Live Processing button is pressed The icon o
229. e X and Y axes e By specifying increments in the X and Y axes e By specifying an angular increment in the rotation axis This example demonstrates the manual method in the X and Y axes In this case the BGA has 17 rows and columns of BGA balls As each image has 4 rows and 5 columns of BGA balls then the number of images needed to analyse the BGA is as follows Rows 17 4 4 1 for the last 1 row Columns 17 5 3 1 for the last 2 columns So the number of images will be 4 horizontally and 5 vertically with only 1 row and 2 columns of BGA balls in the last image The number of images is entered into the Step and Repeat window Then the manipulator is moved so that the last image with the required number of BGA balls is lined up with the crop box Note these BGA balls will be those in the bottom right hand corner of the BGA Defining the position of the last image in Step and Repeat When the last image has been correctly aligned then press the OK button on the Step and Repeat window The new actions will be added to the actions list A message will be displayed advising the user to check the positioning of the Acquire Image actions added It is best to do this as the alignment of these has been determined by the accuracy of the positioning of the first and the last image using the crop box 384 XIMO26 A1 User Manual How to Get More Out of Inspection Programs Editing an Inspection Program Any inspection program can be edited
230. e axis about which the CT rotate axis is rotating the sample is very important to ensuring that the reconstructed 3 D volume is of high quality By not calculating the centre of rotation accurately then a lower quality reconstructed image stack will be created The centre of rotation of the sample needs to be known to sub pixel accuracy in order to reconstruct a high quality CT volume As sinograms are acquired with the manipulator positioned with the centre of rotation of the sample at the centre of the image it is possible to automatically calculate the exact position of the centre of rotation This is done by checking the Calculate Automatically checkbox When this checkbox is checked then the calculation is done by CT Agent just before the reconstructed image stack is reconstructed Use top and bottom slices Mowe the guideline on the image to select the required slice Then press the top or bottom button to select the slice For the centre of rotation calculation Centre of rotation top slice Set Centre of rotation bottom slice Set When automatic centre of rotation calculation is selected then the user can specify the two slices at which this calculation is done This is important as the slice must have significant features on it so that the algorithm can function correctly If the Use Top and Bottom Slices check box is checked then the top most slice of the highest slice stack and the bottom most slice of the lowest slice stack wi
231. e button This will display a dialog that allows the user to specify where to save the image This is an enhanced version of the standard Windows save file dialog Savein C9 IC2 My Recent Documents E Desktop My Documents Ja My Computer File name My Network Save as type TIFF Files tf E Pinel depth 16 bit Image 2 Greyscale smaller file O Greyscale with Tone smaller file Colour larger file 130 XTMO26 A1 User Manual Image Processing The standard controls of the Windows Save File dialog are not documented here but are available within the Windows help information The types of image files that can be saved by Inspect X is controlled by the Save as Type drop down list Note that JPEG files can be saved as either JPEG2000 or standard JPEG A preview of the image to be saved can be obtained by pressing the Preview gt gt button AER Pressing this button will cause the Save File dialog to increase its width to display a preview of the image to be saved FA Pressing this button will cause the Save File dialog to decrease its width to hide the display of the preview image Save s Save in 102 x O 2 egan i peti 6 6 File name save My Network Save as type TIFF Files tif _ Cancel Pixel depth O 8 bit 16 bit Image Greyscale smaller file Greyscale with Tone smaller file 1 94 MB Colour larger file
232. e filament has been correctly inserted in the middle of the focus cup Mechanical alignment may need to be performed After following the next steps and failing to get a good focus it may be necessary to mechanically centre the filament again as it was not closely centred previously or may have drifted 2 Place an object with small details into view of the X ray source using the manipulator Set a very high magnification so that the fine detail in the object can be seen 3 Set the kV to the value required to be aligned and focused Set the power or current with the X rays switched on so that an image is displayed or would be displayed 42 XIMO26 A1 User Manual X ray Controller 4 Adjust the X shift and Y shift sliders on page 49 until the brightest image can be seen It is useful to use the live histogram on page 136 mode to view the image data histogram to ascertain the correct point when the image is at its brightest Steps 5 and 6 may be omitted if the X ray source has a transmission target and an aperture fitted Switch on beam modulation by pressing the modulation on page 49 button 6 Adjust the X shift and Y shift sliders until the features in the image pulse in and out of focus rather than moving laterally or vertically across the display Switch off modulation Save the X amp Y shift values for that particular kV demand level by pressing the Save button Filament Demand Filament Demand J The filament demand
233. e image intensifier if fitted which must also be correctly set for optimum image quality This section details how to differentiate between poor optical focus and poor focus of the X ray source and how to set the focus of the X ray source lt does not detail the adjustment of the optical sub system which is outside the scope of this document as this requires a skilled engineer The optical focus is set up within the factory and should only be adjusted by a service engineer if required An inherent feature of the X ray source is that it produces noise This is because the X rays generated will not all be at the same kV but form a broad spectrum This noise makes the image appear speckled when using short exposures high frame rates on the imaging The appearance of the noise within the image can be minimised by use of averaging and image recursion or increasing the exposure on the imaging When attempting to discriminate between poor optical focus and poor X ray focus the noise produced by the X ray source provides a useful tool e Turn X rays on and demand just sufficient kV and power or current to get an image Tend towards using a low kV value and higher power or current value e Ensure that there is no sample in view e Using the image tone control increase the image contrast so that the noise speckling on the image can be clearly seen The focus of the speckle is a function of the optical focus only It is independent of the focu
234. e is set in within the Imaging Set Up on page 288 tab in the Image Processing Properties window or by an imaging preset on page 290 An example of an averaged image being collected is shown below Image lines scroll down the screen during averaging User Manual XTMO26 A1 157 Image Processing The averaging process can be aborted by pressing the Capture Image button Open Image To open an image that has been previously saved press the Open Image button This will display a dialog that allows the user to select the required image This is an enhanced version of the standard Windows open file dialog anbe dorra CoP Eel aise gogz ipg My Recent CSP Void ARE pg Documents 3 Desktop My Documents PL My Computer a File name CSF Anales pg w My Network Files of type All Image Files tif bmp jpo v Load image profile if available The standard controls of the Windows Open File dialog are not documented here but are available within the Windows help information The types of image files that can be displayed and opened within Inspect X is controlled by the Files of Type drop down list All Image Files tif brmp jpg TIF Files tif Bitmap Files eee 158 XIMO26 A1 User Manual Image Processing If an image file is highlighted in the list of available images by clicking once on the file s icon or name a preview of this image can be obtained by pressing the Preview gt
235. e main X ray image window on page 169 using the left mouse button at the point where you want to add it If adding an arrow rectangle ellipse or quadrilateral drag the mouse with the button depressed to draw the shape For text and cross hairs the object is added at the point where the mouse is clicked For a text object a dialog box is displayed to enter the text to be added The initial colour of each type of annotation object is set within the properties on page 283 Once an annotation object has been added to the X ray image it may be re sized by clicking upon one of the object s resize handles and dragging it or moved by clicking upon the object s move handle and dragging it Resize handle Move handle The properties of each annotation object can be updated by clicking upon the object s move handle with the right mouse button This will display a menu from which the object s properties can be updated Delete Edit Text Font Size Colour Background Colour User Manual XTMO26 A1 223 Image Processing Not all the menu options are available for every object Only those menu options relevant to the object will be enabled For all objects the object s colour may be modified or the object may be deleted M Back Red Orange Yellow Lime Green Cyan Blue The object s colour can be selected from the sub menu For a text object it is also possible to update the text the font size and the
236. e more but can introduce artefacts within the image The preview image can be used to assess the trade off of image quality against file size Imaging Presets This button may not be displayed If the inspection system is fitted with an imaging device that has configurable parameters that affect the size and performance of the imaging system then this button will allow the easy switching between pre defined imaging states The required imaging preset is selected from the pop up menu that is displayed when the option button next to the Imaging Presets button is pressed The entries in the menu depend upon the imaging device fitted User Manual XTMO26 A1 163 Image Processing New imaging presets can be defined from within the Camera Control on page 290 tab of the Image Processing Properties window This is opened by selecting the Add menu item E Real Time High Quality Add Process Image When an image has been captured or an image that has been previously saved is opened it is possible to apply image processing to the image The effect of the image processing can been seen within the main X ray image window on page 169 This function is not available whilst a live X ray image is being viewed The type of image processing applied to the image is selected from the pop up menu that is displayed when the option button next to the Process Image button is pressed F Sharpen Ale a Sharpen More smooth Horizon
237. e number of images to stitch together Number of images 2 OE If the system only supports two image stitching then the Number of Images selection is not displayed Disable shading correction Mame 4 Panel Scan Ww kw 250 yA 120 A suitable multi point shading correction needs to be selected The drop down list will only display shading corrections that are configured for the selected number of images These shading corrections are not the same as the ordinary multi point shading corrections in that they contain correction data for multiple images Compensate For latency Calculate It is possible to compensate for latency within the imaging panel This is done by checking the Compensate for Latency checkbox and then pressing the Calculate button It is recommended that any sample is removed from view and that the X ray conditions are set such that the image is bright but not saturated i e no pixels at 65535 Manipulator control SOO Manipulator control y aa Outer Left Inner Left Middle Inner Right Outer Right To check that the sample is in view as required then the manipulator can move the imaging panel to the positions used for wide image radiography by pressing the relevant button When everything is set up press the OK button to acquire the wide image radiograph User Manual XTMO26 A1 127 Image Processing Open Image y To open an image that has been previously saved press the Op
238. e of a feature or object This may either by achieved by the use of the manipulator on page 75 or it may be performed using the Measurement function within the image processing functions The Measurement image processing function is more flexible in that measurements can be made in a number of units The measurement made is calibrated when the inspection system is commissioned If the feature within the sample is not directly in contact with the tray on a vertical inspection system or in line with the rotational axis on a horizontal inspection system then the sample depth on page 98 must be set appropriately before the image is acquired It is also possible to calibrate the measurements manually on page 199 Calibration involves the use of an object or feature of Known size The calibration of the function is valid only at the magnification and sample depth at which it was calibrated If the magnification is changed them the Measurement function must be recalibrated User Manual XTMO26 A1 197 Image Processing Calibrate Vertical 14 413 mm e 7 Calibrate Horizontal 15 57 y Calibrate Measurement flee mm 42 76 degrees Type O Linear C Angle 2 Edge detect Line CO Edge detect arc Threshold 40 Lowy 100 8 High Smooth Je 7 Parallel i 7 Perpendicular Profile Grey Level Max n409 Min 149 Average EE Std Dew 15373 2 Histogram Grey Level Pixel
239. e original tone curve is displayed in the Image Tone on page 180 function user interface The original curve is the curve that defines the starting point before editing of the curve has been performed The current curve is shown in red and the original curve in gold 286 XIMO26 A1 User Manual Image Processing Histogram Type Histogram type Solid The Histogram Type controls the appearance of the histograms within the image processing functions Solid Pixels 1434 Line Auto Tone Adjust Images This checkbox selects if auto tone adjustment is applied to the X ray images If selected Auto Tone Adjustment on page 188 is applied when images are captured or the manipulator stops moving User Manual XTMO26 A1 287 Image Processing Tone Cut Off This numeric control specifies the number of pixels to cut off from the ends of the image s histogram when calculating the tonal range of the X ray image This is important to avoid the odd bright or dark pixel skewing the tonal range of the displayed image Tone Curve to Apply on Auto Tone Adjust When Auto Tone Adjustment is switched on whenever an image is captured then this control specifies if a tone curve is to be applied after dynamically changing the tonal range Processing to Apply on Auto Tone Adjust When Auto Tone Adjustment is switched on whenever an image is captured then this control specifies if image processing is to be applied after dynamically changi
240. e performed using this process To acquire the data set press the Acquire button A progress bar and an estimated time to completion will be displayed To stop the acquisition of the data set press the Cancel button The CT data set folder will contain all of the data files including the projection images the reconstruction parameter file the CT profile and the reconstructed volume Send Email Notification Send email notification Iw If an email is to be sent by CT Agent when the reconstruction job is completed then the Send Email Notification check box needs to be checked When this is selected then the Operator ID on page 422 must be a valid email address Note that CT Agent must be correctly configured to ensure that the email message is sent Add to Batch l Add to Batch If the 3 D CT Batch Program function is enabled and licenced then this button will add the current 3 D CT profile to the currently selected 3 D CT Batch program licence for this function AN 3 D CT Batch is optional and is only available on systems that have a valid 424 XIMO26 A1 User Manual 3 D CT Acquisition Add Multiple CT Acquisitions to Batch e Add Multiple If the 3 D CT Batch Program function is enabled and licenced then this button will enable adding multiple CT profiles to the currently selected 3 D CT Batch program so that CT volumes for a tall sample can be acquired When the Add Multiple button is pressed the Add To Batc
241. e rectangle whilst holding down the button Ellipse To create an elliptical region to be added to the region of interest click upon the X ray image in the main image window with the left mouse button and drag out the ellipse whilst holding down the button User Manual XTMO26 A1 273 Image Processing Quadrilateral To create a quadrilateral region to be added to the region of interest click upon the X ray image in the main image window with the left mouse button and drag out the quadrilateral whilst holding down the button Path To create an irregular region to be added to the region of interest click upon the X ray image in the main image window with the left mouse button and drag the line to the next point defining the irregular region A line is drawn between the last point defined and the current mouse position When the mouse is positioned as required click with the left mouse button and move to the next point defining the irregular region To complete the region click upon the first point The points in the path may now be moved if required 274 XIMO26 A1 User Manual Image Processing Threshold To include or exclude objects of a fairly uniform grey levels it is possible to exclude these from the region of interest by using the Threshold object type Examples of objects that may be excluded in such a manner are resistors on the back of circuit boards when trying to analyse a BGA on page 589 or
242. e that there is no longer any requirement to create shading corrections for different kV settings for an imaging mode as in older versions of Inspect X The Standard Shading Correction mode is the normal mode of shading correction within Inspect X and the software automatically loads the correct shading correction whenever the imaging mode is updated Shading Correction Shading correction mode Standard correction O Use previous ray conditions recommended Manually set X ray current All imaging presets Only acquire white image Multi point correction _ Disable shading correction User Manual XTMO26 A1 103 Image Processing Standard Mode Controls Standard correction O Use previous ray conditions recommended Manually set X ray current All imaging presets Only acquire white image When Standard Mode is selected then there are two modes of setting up shading correction e For the present imaging mode only e For all imaging modes for which an Image Preset on page 288 has been defined If the present imaging mode as specified by the Imaging Set Up on page 288 in the Image Processing Properties then the All Imaging Presets checkbox must be unchecked If all corrections are to be set up for all presets then the All Imaging Presets checkbox must be checked there should be no object between the X ray source and the f When acquiring the images to calculate a shading
243. e tone edit is seen Not that re opening such an image in Inspect X will not allow the undoing of the tone edit Larger files are created when saving using the Colour option Saving with colour is necessary when any colour image processing on the image is to be saved in the image and to be read in a third party image application Colour images opened within Inspect X are displayed as monochrome images The Colour option is best considered to be an image export function If an image analysis function has been used to analyse the image for example BGA Void Analysis then if either the Greyscale or Greyscale with Tone options are selected and the image is saved the image analysis parameters are saved in the image profile If this saved image is re opened within Inspect X the image analysis is restored User Manual XTMO26 A1 145 Image Processing JPEG Type Type 0 JPEG JPEG 2000 If a compressed image file is required then select JPEG as the image file type Then it is possible to specify either standard JPEG or JPEG2000 JPEG on page 589 A lossy compressed see topic Lossy Compression on page 589 image file format supported by most image editing and display applications High compression values can cause many visible artefacts within the image This format is widely supported by third party applications JPEG2000 on page 589 A newer lossy compressed image file format only supported by recent image editing and display
244. early fills the width of height of the X ray image For an XT V 160 system ensure that the correct CT Arm Position on page 410 is selected on the Sample Setup stage of the step by step user interface Then press the calibrate button The process of calibration will take a few minutes Fast CT Acquisition Reconstruction Centre of Rotation Fast CT Calibration Rotation Speed Calibration 1 Press the Reset button Then acquire a data set with as many projections as your longest acquisition 2 Enter the maximum speed of the CT rotate axis 50 00 degrees second 3 Load the _CTData txt File to be Found in the projections i i Calibrate Folder by pressing the Calibrate button Minimum Frame Rate To avoid dropping Frames the shortest allowable exposure For a projection must be specified Shortest allowable exposure 500 milliseconds 436 XIMO26 A1 User Manual 3 D CT Acquisition The calibration of Fast CT is required to ensure that high quality volumes are created Fast CT is selected when the Minimise Ring Artefacts on page 424 checkbox in the Acquisition stage of the step by step user interface is not checked Fast CT needs to be calibrated to synchronise the manipulator and imaging sub systems Fast CT controls the manipulator by setting the CT rotate axis to move at a percentage of the fast speed so that the required number of projection images are acquired for a full 360 degree rotation In order to synchr
245. easurement on page 340 Erode Dilate on page 340 BGA analysis on page 341 BGA void analysis on page 341 Pad array void analysis on page 342 Package void analysis on page 343 Annotation on page 343 Threshold on page 343 Restore image on page 344 Delete annotation on page 344 Save image on page 344 Mark Failure on page 346 X rays off on page 348 Step and Repeat Actions l Repeat Inspections Use Performs image subtraction on an acquired image Measures a feature on an acquired image Measures minimum and or maximum distances Applies erosion and dilation on an acquired image Performs BGA analysis on an acquired image Performs BGA ball void analysis on an acquired image Perform pad array void analysis on an acquired image Performs package void analysis on an acquired image Adds annotation to an acquired image Applies threshold on an acquired image Restores an acquired image to its original state Deletes annotation on an acquired image Saves the acquired image to disk Allows the operator to mark failures on an image Switches the X rays off When an inspection program is being programmed for features that have a repetitive pattern then the Step and Repeat Sample function makes programming easy Once the inspection actions for the first set of features have been programmed these can be easily replicated by selecting the actions in the sample list and then pressing the Repeat b
246. eck the All Delays Are The Same checkbox Delay between each CT acquisition All delays the same Hours Minutes Seconds Wait after CT acquisition 1 4 i oo g Wait after CT acquisition 2 0 10 oo A separate Hours Minutes and Seconds numeric controls are displayed to define the delay after each CT acquisition Enter the required delay into the relevant Hours Minutes and Seconds numeric controls The example shown above is for a batch program with three CT profiles 492 XIMO26 A1 User Manual 3 D CT Batch Reconstruction Computer The reconstruction computer that receives the CT data acquired by the 3 D inspection program can be defined by selecting it in the Reconstruction Computer drop down list If the first entry in the drop down list Use Profile s Reconstruction Computer is selected then the reconstruction computer in each CT profile within the batch program will be used This can be used to direct each CT profile s output to separate reconstruction computers If a specific reconstruction computer is selected in the drop down list then this computer is used for all CT profiles within the batch program Note that the CT profiles are not updated with this computer s name so the Use Profile s Reconstruction Computer may still be used If the drop down list does not contain the required computer then this can be added by updating the reconstruction computers on page 430 in the CT properties Shading Correction Safe
247. ect the action after which the new actions are to be inserted and right click upon the action list to display the menu again Select Paste from the menu and the actions originally selected will be duplicated and inserted into the action list This may be done any number of times required After copying actions it will be necessary to update each action s values to get the required behaviour It is possible to copy actions from one component s list of actions and paste them into the action list of another component User Manual XTMO26 A1 321 Inspections Execute Action When editing an inspection program it is useful to be able to execute the action to check that it does the expected behaviour To execute an action double click upon it within the action list When editing an inspection program that contains X ray flux calibration and position calibration actions you should execute these calibration actions before trying to execute other actions This ensures that the calibration performed by those actions is applied A X ray Flux Calibration Action The X ray flux calibration action is used to recalibrate an X ray flux calibration on page 28 Note that all actions that acquire an image may use an X ray flux calibration to set the X ray conditions This is to ensure repeatability within the inspection program The X ray flux calibrations required must be set up using the calibration function on page 28 within the X ray controll
248. ect x User Manual Menus XTMO026 A1 571 Menus File Menu Open Save As Activate Image 1 Activate Image 2 Activate Image 3 Activate Image 4 Print Print Preview Page Set Up Print Status Log Exit 9 2 XIMO26 A1 The open file dialog on page 128 is displayed to allow the selection of an image to be opened The save file dialog on page 130 is displayed to allow the saving of the image to disk If quad image display is enabled this makes image 1 the active image If quad image display is enabled this makes image 2 the active image If quad image display is enabled this makes image 3 the active image If quad image display is enabled this makes image 4 the active image The Print Image on page 573 dialog is displayed to allow printing of the active X ray image The Print Preview on page 575 dialog is displayed The Page Set Up on page 576 dialog is displayed The standard Windows print dialog is displayed to allow printing of the status log on page 579 The Inspect X application is exited User Manual Menus Print Image To print the image within the main X ray image window on page 169 press the Print Image button This will display a dialog that allows the user to specify how to print the image This is an enhanced version of the standard Windows print dialog Print General Image Options Select Printer Status Ready _ Print to file Location C
249. ection 2 D inspection program Serial numbers Cancel Status Shading corrections Completed CT data set Acquiring Demo Profile 1 of 1 CT reconstruction Waiting Wall thickness waiting Estimated time to completion 00 19 23 Hours Mins Secs Sinograms will be displayed in the main X ray image window User Manual XTMO26 A1 531 2 D Inspections After the CT data sets have been acquired then Inspect X will wait for the CT data sets to reconstructed When this is complete then the wall measurements will be performed 2 D Inspection Operator ID Operator No 6 2 2 inspection program Small Blade Serial numbers 123 456 708 224 567 090 Upon completion the 2 D Inspection window displays the status of each sample inspected next to the sample s serial number This is a button and when pressed will open the HTML report if available to display the results information for that sample Sample Small Blade lt Serial Numbers 123 456 789 x TEK Status FAIL Inspection stated at 15 02 29 18 September 2009 and completed at 15 14 13 18 September 2009 Serial Number 123 456 789 FAIL Sample 123 456 789 Status FAIL Slice Stack Middle Slice Number 1 Status FAIL Height above datum 60 000 mm 932 XIMO26 A1 User Manual 2 D Inspections 2 D Inspection Results When an 2 D inspection program is run the results are saved in an XML http www w3 org xml results fil
250. ed only a part of the original information is still there although the user may not notice it M MB or Megabytes 1024KB or 1048576 bytes R Radio Button A set of radio buttons are a set of controls that allow the user to select only one of the options By clicking upon the required option s control the previously selected option s control will be de selected They are like selecting a radio band on an analogue radio receiver Reconstructed Image Stack The reconstruction of the 2 D CT data set will create a collection of reconstructed slices as individual image files These images may be loaded as an image stack into a 3 D volume viewing application for analysis if required 990 XIMO26 A1 User Manual S Sinogram This is an image file created during the acquisition of 2 D CT data on an inspection system fitted with a linear detector The process to create a reconstructed image stack is to acquire a number of sets of angular views of the sample called projections As the inspection system has a linear detector then the projections are saved as individual lines within an image file This image file is called a sinogram The vertical size of the image e the number of lines in the sinogram image will be the same as the number of projections Consecutive lines are consecutive projections Slider Thumb y The thumb of a slider control is the active object within the control that moves along the bar when
251. ed i 2 11 0 87 Passed 2 05 0 83 Passed 2 03 0 85 Passed l 2 03 0 83 Passed 2 02 0 63 Passed Passed Passed Passed 1 2 a 4 3 6 E 5 For each PTH the following data is available PTH ID A numerical identifier Status This indicates if the PTH passed or failed the analysis X The X ordinate of the pixel that specifies the centre of the PTH Y The Y ordinate of the pixel that specifies the centre of the PTH Height Height of the PTH in the currently selected measurement units Width Width of the PTH in the currently selected measurement units Percentage Ua the fill level of the PTH expressed as a percentage of the expected eight User Manual XTMO26 A1 257 Image Processing The full results may be printed by pressing the Print button This will display the standard Windows print dialog The use of this dialog is documented in the Windows help system ae The full results may be saved to a file on disk This is done by pressing the Export button A standard Windows save file dialog is displayed This is documented in the Windows help system The results may be saved in two different file types CSW File cev Text File Ext CSV File on The results are saved as comma separated values This file type can be page 589 easily imported into an Excel spreadsheet Text File This saves the results as a text file Pass Fail When the results of an analysis have been calculated a pass or
252. ed to run then a Warning window is displayed because the task will control the manipulator the X ray controller and the imaging Warning When Programs Running When the calibration task runs a Warning window is displayed If one of e CT acquisition if configured on the inspection systems e 3 D CT batch program if configured on the inspection systems e 2 D inspection program if configured on the inspection systems e Inspection program if configured on the inspection systems is being run then the following warning will be displayed Warning 4 calibration task is about bo be run This will interfere with the program being run Delay calibration Delay calibration For i The calibration task cannot be run whilst a program is active The only option is to delay the running of the calibration task by entering the required delay into the Delay Calibration Hours and Mins numeric controls and then pressing the Delay button User Manual XTMO26 A1 553 Scheduled Tasks Warning When No Programs Running If no CT acquisition 3 D CT Batch program or inspection program is running then the Warning window displayed is shown below Warning A 4 calibration task is about to be run Continuing calibration in 53 seconds Continue calibration Delay calibration Hours Mins Delay calibration for If the task is to be run immediately then press the Continue button The running of task may be delayed by entering t
253. ed to the list is the same as to the main inspection program When the On Failure actions are executed they are run directly after the action that failed and when complete the main program s actions are then run from the action that failed On Failure Actions The example above shows how the number of failures within an image can be counted by the user by the execution of a Mark Failure on page 346 action For each annotation added to the image by the user a failure is counted If the total number of failures then exceeds the number of allowable failures for the inspection program then the inspection program run will be aborted If it does not then after completing the On Failure actions then the actions within the main program will be run User Manual XTMO26 A1 349 Inspections Running an Inspection To run an inspection program make sure that you have entered the serial numbers for the samples to be inspected and clear the check box for any sample in the inspection program that is not available on the manipulator To start the run press the Run button Whilst the inspection program is in running the status of the samples and components is displayed if the Show Results Panel on page 356 property is set in the Inspection Properties on page 354 It is not possible to view the inspection results file until the run has been completed or aborted To abort the run press the Stop button Results Samples Components For S
254. el as set in the properties on page 32 and of the state of the filament On Xi systems the state indicator will read OK Bad or N A On SR based systems the state indicator will report the filament actual reading An empirical indication of the quality of vacuum and indication of whether the vacuum set point interlock is made This is the return current within the X ray source This is the beam current and any leakage lt can be used as a diagnostic aid to see if the X ray source requires cleaning To do this set the filament demand to O and then set the demand kV to a high value If the cathode current is not small then there is a large leakage and the X ray source needs to be very carefully cleaned This status value is only displayed on Xi controlled systems It displays the status of the turbo vacuum pump At Speed status This is only displayed when the X ray source is being auto conditioned in normal mode The time displayed is the elapsed time since the following conditions have been met gt The actual kV has reached the demanded kV gt No breakdown has occurred since this time As a result this is the time that the auto conditioning has been stable at the demanded kV since the last breakdown 5 Manipulator Controller The Manipulator Controller provides an interface to control the sample manipulator within the X ray system There are some small differences to the user interface dependent upon the type of ma
255. ely encloses the sample must be specified for Translate Rotate 2 D CT This is entered into the Maximum Sample Radius numeric control Sample Position Check that the sample is penetrated at all angles by pressing the Rotate button The position of the sample in the manipulator needs to be set up so that the required features to be analysed stay in view in every projection In order to set up this the sample needs to be mounted on the relevant sample holder and then placed at the centre of rotation Every CT data set on page 589 is collected with the manipulator positioned so that the centre of rotation of the CT rotate axis is as close to the centre of the X ray image The recommended process to set up a sample s position is the following 1 Mount the sample and move it into view 2 Move the manipulator s magnification axis so that the required features of the sample are in view 3 Press the Rotate button This will move the manipulator so that the CT rotate axis is in the centre of the image and then will rotate through 360 degrees If the some of the required features in the sample cannot be seen in the X ray image then either adjust the manipulator s magnification axis or try remounting the sample so that its centre is as close to the centre of the CT rotate axis 462 XIMO26 A1 User Manual 2 D CT Acquisition Once the sample s position has been set then the X ray conditions need to be set The manipulator position of the sa
256. ement in the Label drop down list and then update the required measurement parameters Measurement Type Measurement type Measuring material le Gaps between material Measure using base lines The type of measurements made upon the turbine blade slice may either be the measurement of the thickness of walls or the gaps between material This is selected by the Measurement Type radio buttons Measuring the gap between walls Note that it is not possible to concurrently measure both gaps between walls and the thickness of walls 518 XIMO26 A1 User Manual 2 D Inspections Defining and Calibrating the Thresholds After defining the wall measurements then the thresholds need to be calibrated This can be done by measuring the turbine blade accurately outside the X ray inspection system and then setting up the wall measurements so that the measured minimum and or maximum measurements are known These values can be entered for the required regions and the thresholds can then calibrated Calibration is done by altering the Parameters until the Calculation Errors are minimised The parameters may be altered manually or automatically optimised To automatically optimise the parameters then press the Auto Set button next to the Material Grey Level numeric If the wall measurements defined for the slice have minimum and maximum thicknesses defined then the following window will be displayed Calculation Type Automatic calculat
257. en User Manual XTMO26 A1 369 How to Get More Out of Inspection Programs Grey Level 52224 Pixels 17452 Histogram of too thick a filter This can be used but the peak is quite close to the white end Re Calibration Upon re calibration of an X ray flux calibration the manipulator is moved to the position at which the calibration was created and then adjusts only the X ray beam current uA until the same mean brightness of the image is obtained The X ray kV is not changed The intention is to re create the same image brightness as when the calibration was created This is very important after the X ray filament has been changed As the X ray beam current can only be adjusted in 1uA steps it might not be possible to re create the exact image brightness When an X ray flux calibration is recalibrated then a quality factor is calculated 100 is returned for a perfect match and a smaller percentage indicates the level of match Note It should be noted that when setting the grey level thresholds for image analysis tools e g ball edge threshold in BGA Void Analysis then there will be a range in which the BGA balls will be identified The use of X ray flux calibrations will help to control the X ray conditions used However the grey level threshold within an image being analysed is dependent upon the X ray conditions and the actual sample being analysed It is recommended that when setting grey level thresholds to use the mid point of
258. en If your voltage is not high enough to penetrate the longest path lengths of your specimen then increasing only the current but not the voltage will not help you If none of the X rays have enough energy to get through the specimen then firing more of them at it will not help However if your voltage is already high enough then increasing the current is a better option than increasing the voltage still further as increasing the voltage may wash out low density areas of your specimen User Manual XTMO26 A1 441 How to Get More Out of 3 D CT Ensuring the Electron Beam is Properly Aligned To produce the best X ray image the electron beam should be directed down the centre of the lens of the X ray source On high voltage cable based sources this means ensuring that the X Y shifts are as small as possible that is that the electron beam is not diverted by the X Y coils too much Using a high X or Y shift results in a bent electron beam which is more difficult to focus than a straight beam due to electrons with different energies within the beam coming to a focus at different positions The electron beam needs to be focused into only as small a spot as is needed to achieve the resolution required Too small a spot will only damage the target prematurely or stop you from using a high enough current for fear of doing so An image with inadequate penetration voltage too low 442 XIMO26 A1 User Manual How to Get More Out of 3 D CT
259. en Image button This will display a dialog that allows the user to select the required image This is an enhanced version of the standard Windows open file dialog Open lookin QZ OR rai ae AUGE oo ipa My Recent CSP Void ARRE pg Documenta 3 Desktop My Documents Qs My Computer a File name CSP Analysis pg eerie o bf My Network Files of type All Image Files tif bmp jpg Load image profile if available The standard controls of the Windows Open File dialog are not documented here but are available within the Windows help information The types of image files that can be displayed and opened within Inspect X is controlled by the Files of Type drop down list All Image Files t1f bmp pal TIF Files tif Bitmap Files l ou 128 XIMO26 A1 User Manual axi Image Processing If an image file is highlighted in the list of available images by clicking once on the file s icon or name a preview of this image can be obtained by pressing the Preview gt gt button Preview gt Pressing this button will cause the Open File dialog to increase its width to display a preview of the selected file in the file list Pressing this button will cause the Open File dialog to decrease its width to hide the display of the preview image A Look in IC2 ex O2 EE f PA cSP Analysis 0002 jpg 4 2 FA CSP Analysis jpg My Recent PA CSP V
260. en press the Move on page 77 button or double click upon the required item in the list Double clicking moves to the position immediately Add Saved Position To add a new saved position to the end of the currently selected saved position set move the manipulator to the required position and then press the Add button Enter name for saved position Enter a name to refer to this new position Ic 7 Use the text box to define the name for the new saved position and then press the OK button This will add a new saved position of the name entered to the end of the currently selected saved position set and will highlight it in the list of saved positions To abort the addition of a new saved position press the Cancel button Remove Saved Position Remove To remove a saved position from the currently selected saved position set highlight the saved position within the list of saved positions on page 91 Then press the Remove button 92 XIMO26 A1 User Manual Manipulator Controller XT V 160 Tilt amp Rotate Control Sample height above table Calculate Sample s maximum height above table 150 mer On the XT V 160 inspection system there is an extra panel of controls to move the tilt and rotate axes These functions can also be accessed from a contextual menu on the main X ray image window This menu is displayed when a right mouse click is made within the main X ray image window Open Image S
261. en replicated then the reference images for these actions will need to be created 308 XIMO26 A1 User Manual Inspections Step and Repeat Specify Increments in X amp Y When the manipulator is at the start position it is possible to step and repeat by specifying the increments in the X and Y axes This is done by entering into the Step and Repeat Window the number of samples horizontally and vertically and the increments in the X and Y axes Enter the spacings and numer of steps ins amp Y and press OK Moke that this function works for regularly spaced identical Features Spacing in x 2 00 mm 5pacing in Y 2 00 mm Mumber horizontally q fo Number vertically 7 hat These are the samples horizontally and vertically with respect to the X ray image displayed This may be different to your sample s initially loaded orientation if you have rotated the sample using the manipulator Note that the example above defines the number of samples as a 4 by 2 grid Then press the OK button to create the new samples Step and Repeat Specify Increment in Rotation When the manipulator is at the start position it is possible to step and repeat by specifying an increment in the rotation axis This is done by entering into the Step and Repeat Window the increment in the rotation axis and the required number of steps Enter the angular increment and the number of steps and press Ok Mote that this function works for regularly spaced id
262. en the demand kV is increased then Inspect X will not increase this value until the Time to Hold KV Before Increasing kV has elapsed This ensures that the X ray source has time to settle before trying to increase the kV Running Auto Condition To run the auto conditioning process press the Start button The Auto Condition Window will update to show the information about the auto condition process Auto Condition Start kv Change to 1k steps at Maximum ky Change in vacuum to stop increasing ki Change in vacuum to decrease kw Time to hold at kv before increasing kw seconds Vacuum Demand ki Time stable at maximum kw Mins 5ecs Conditioning at 65k The Vacuum readout displays the current quality of the vacuum within the X ray source The Demand kV display the target kV at which the source is presently being auto conditioned This value will increase providing the X ray source s vacuum quality remains high and the X ray source does not break down In either of these cases then the demand kV will be decreased User Manual XTMO26 A1 27 X ray Controller The Time Stable at Maximum kV displays the continuous elapsed time at which the X ray source has been held at the Maximum kV during the auto conditioning process If the X ray source reached the Maximum kV and then breaks down then this value will be reset to zero The auto conditioning process will continue until the user presses the Stop button There is no recom
263. ent for the X ray beam generated by the X ray source The choice of power or current control is made by the supervisor and cannot be changed in the operator interface The advantage of controlling the power rather than the current is that the relative brightness of the image displayed is maintained when the kV level is altered the relative brightness varies when using current and changing the kV level The four buttons increase and decrease the demanded power or current setting by a pre determined value The step value is set by the supervisor and may either be a fixed step size or a step size that varies dependent upon the present power or current demand set The value of the increment is set within the general properties panel by the supervisor To change the demanded level of power or current by a number of steps you may either click the required button a number of times or click the button and hold down the mouse button until the required level is set The buttons disable as required when the maximum power or current setting for the source has been reached or the level is set to 0 12 XIMO26 A1 User Manual X ray Controller If the power limit for the system is reached then the readout box is coloured yellow to indicate this 126 ua Cara Power limit reached Switching X rays On and Off Switch X rays On The generation of X rays can be switched on and off by pressing this button The legend on the button always states wh
264. ent is being adjusted two yellow lines will be displayed The one of the line joining the two end points and the second line is a line parallel to the first line and can be used to determine the correct point on the bond wire When the measurement has been defined then it will be displayed either in red or green The colour of the measurement shows whether its wire sweep is greater than the Sweep Percentage specified on the control Measurements displayed in red are larger than this sweep percentage and are marked as failures Sweep Percentange 3 50 Yo A Deleting a Wire Sweep Measurement To delete a wire sweep measurement select the required measurement on the image This is done by clicking upon one of its three points The selected measurement will be displayed with the points coloured yellow 268 XIMO26 A1 User Manual Image Processing When the measurement has been selected then press the Delete button Delete Deleting All Wire Sweep Measurements To delete all the wire sweep measurements on an image press the Delete All button Drill Offset The drill offset function can be used to calculate the variation in alignment of holes within multi layered boards It can also be used to calculate the alignment offset of other features such as via holes Drill Offset mm Add To Notes Calibrate User Manual XTMO26 A1 269 Image Processing Drill Offset Results Drill Offset mm To calculate the ali
265. entical Features Angular increment 1 00 gt degrees Mumber of steps 20 E Then press the OK button to create the new samples User Manual XTMO26 A1 309 Inspections Delete Sample MEN To delete an existing sample and all the components associated with this sample select the sample to be deleted from the sample list and then press the Delete button A prompt to confirm deletion will be displayed Reorder Samples When an inspection program is run then each sample is inspected in the order specified in the list To change the order of the samples select the sample that you wish to move in the sample list To move the sample up press the Up button To move the sample down press the Down button This may be repeated any number of times Component Management An inspection program consists of a number of samples on which a number of components are to be inspected For each component a list of actions can be defined Component U1 Ue A Us i 310 XTM026 A1 User Manual Inspections New Component New To add a new component to the current sample within an inspection program press the New button A window will be displayed into which the new component s name can be entered Press the Create button to create a new component Press the Cancel button to not create a new component Mew Component Component ID LS Cancel Create When a new component is created the Action on page 315
266. entry window on page 588 is displayed Upon entry of a valid supervisor password the user interface will be updated to display the supervisor level interface This menu entry is only available on the operator level menus When this menu entry is selected the user interface will be updated to display the operator level interface This menu entry is only available on the supervisor level menus The Properties window on page 583 is shown This is only available on the supervisor level menus The Status Log window on page 579 is shown if not already visible or hidden if visible The Passwords window on page 587 is shown if not already visible or hidden if visible This is only available on the supervisor level menus The System Calibration window is displayed when this menu item is selected This is only available to Nikon Metrology Engineers and not for the supervisor as this affects the set up of the system and requires an accredited engineer The on line help is displayed when this menu entry is selected The About Inspect X on page 578 window is displayed User Manual XTMO26 A1 577 Menus About Inspect X Window About Inspect X NIKON METROLOGY VISION BEYOND PRECISION TEX Inspect X as ae Copyright 2004 2011 Nikon Metrology NY Support Information Mikon Metrology T 44 1442 828700 Tring Business Centre F 44 1442 626116 Icknield Way E tring supportimnikonmetrology com Tring We aL nikonmetrol
267. ents Selecting the Slice Select 2 D Slice Slice acquired by program Serial number of sample Slice stack Slice number 1 Height above datum 70 061 mm User Manual XTMO26 A1 509 2 D Inspections When selecting a slice for which wall measurements are to be defined then the program has to know if the CT data set was acquired using the 2 D Inspection Program function or by the 2 D CT Acquisition user interface This is because the CT data sets are held in different folder structures on page 533 within the CT data folder depending upon how the data set was acquired If the CT data set to be used was acquired by the 2 D CT Acquisition function then the Slice Acquired by Program check box must be unchecked If the CT data set was acquired by a 2 D Inspection Program then the Slice Acquired by Program check box must be checked In this case the serial number of the sample needs to be entered into the Serial Number of Sample text box Then the required CT Profile is selected in the CT Profile drop down list and the required slice is selected by selecting the required slice stack in the Slice Stack drop down list and the slice number within the stack in the Slice Number numeric The height of the slice selected above the datum point is displayed in the Height Above Datum output Once the required slice has been selected then press the Open button If there is more than one CT data set that meets the criteria specified then
268. enu that is displayed when the option button next to the Process Image button is pressed E Sharpen Dels Sharpen More Smooth Horizontal Edge Detection vertical Edge Detection Edge Detection Edge Detection More Laplacian Edge Detection Laplacion Edge Detection More Emboss Equalise Background Subtraction Unsharp Masking Image Enhance Sharpen This applies a process that accentuates the edges within the image As a result the image looks sharper Sharpen More This applies a process similar to the Sharpen function but the effect of the sharpening is less aggressive as it uses a different spatial filter Smooth This applies a process that makes the image have a smoother appearance by applying localised averaging Horizontal Edge This applies a process to detect horizontal edges using a rate Detection of change of pixel value Vertical Edge This applies a process to detect vertical edges using a rate of Detection change of pixel value Edge Detection This applies an edge detection process using the rate of change of pixel value to find all edges within the image Edge Detection More This applies an edge detection process similar to Edge Detection but with a different spatial filter 148 XIMO26 A1 User Manual Image Processing Laplacian Edge This applies an edge detection process emphasising Detection maximum values or peaks to find all edges within the image Laplacian Edge This applies an edge detection proce
269. eplaced with colour This can be useful to accentuate specific features within the X ray image To select the pseudo colour image function either press the Pseudo Colour Image button on the control tool bar or press the Pseudo Colour button on the image processing function selection control This image processing function is available for both live and captured X ray images Grey Level Pixels Max 65250 Min 1536 Average 22650 Std Dey 26666 0 User Manual XTMO26 A1 193 Image Processing Pseudo Colour Threshold Sliders The pseudo colour sliders set the two grey levels at which the image changes from grey scale to pseudo colour To help with the setting of the threshold values a histogram is provided As the slider thumb on page 590 is moved an indicator is drawn on the grey scale at the bottom of the histogram to show the grey level of the slider s position The colour ramp applied to the selected grey scale values can be inverted by switching the positions of the upper and lower sliders thumb positions An image with pseudo colour applied to some grey scale levels Histogram Grey Level 27646 Pixels 1663 Max 65260 Min 1536 Average 22650 Std Dey 76666 0 194 XTM026 A1 User Manual Image Processing The histogram shows the grey level distribution for the image displayed within the main X ray image window If the image processing is in Live mode then no histogram is available It is available for captured images and
270. er When an inspection program is run the program checks to see if the X ray flux calibrations need to be recalibrated The length of time between calibrations is specified in the X ray controller properties on page 34 If any of the X ray flux calibrations require to be recalibrated then the program will automatically do this It is no longer necessary to add X ray Flux Calibration on page 322 actions to the program You may still add these if you require the X ray flux calibrations to be recalibrated every time the program is run X ray flux calibrations are used to minimise the variations in X ray flux on page 590 that can occur due to such effects as ageing of the filament within the X ray source x ray Flux Calibration ray Flux calibration BGA Analysis e Minimum quality a5 Quick recalibration ys Limit u change w Recalibrate lt 2 Y shifts w 322 XIMO26 A1 User Manual Inspections X ray Flux Calibration Selection ara Flux calibration 1100 25 wv To select the X ray flux calibration to recalibrate select the required name from the X ray flux calibration list It is helpful to have a useful naming convention for X ray flux calibrations For example you can adopt a convention such as XXX YY when XXX is the kV value and YY is the uA or power value Minimum Calibration Quality Minimum quality a5 gt When an X ray flux calibration is recalibrated a Minimum Quality is specified Should the recalibratio
271. er compared to the total number of pixels on the panel and will not affect image quality This function is only available for devices that require bad pixel correction Some pixels may always be on some may always be on and others may have an out of specification dynamic range This correction identifies these pixels and creates a map file to identify them When X ray images are then acquired the bad pixels are replaced with an average of the surrounding good pixels Bad pixel correction maps need to be collected for each binning mode that the imaging device supports This is done in the factory before the system is shipped and need only be re done if new bad pixels are noticed within the image Inspect X has a Flat Panel Calibration tool that allows the easy identification of the bad pixels and creation of a bad pixel correction map This tool is opened from the Imaging Setup on page 288 tab in the Image Processing properties Creation of a bad pixel map consists of three stages preparation image acquisition and bad pixel correction Preparation Flat Panel Calibration Preparation Please ensure that the Following conditions are set 1 Please ensure that there is no sample or obstruction in view 2 Anv rav Filtration is removed When collecting a new bad pixel map then any X ray filtration must be removed and there must be no sample in view Once these condition have been satisfied then the images can be acquired
272. er on the acquisition computer the validation station or some other server It is recommended that the shared folder is allocated the same drive letter on both computers so that it is obvious where the images folder is on both computers The Images folder will contain all the inspection results and also contains an index of sample serial numbers against reports This index is held in a folder called Results Index in the Images folder This is a hidden folder and cannot normally be seen This is done to avoid the accidental deletion of the folder User Manual XTMO26 A1 397 How to Get More Out of Inspection Programs Examining Results on the Validation Station When an inspection program has been run for a sample with the serial number of 123 456 for example then to check this sample s results on a Validation Station the serial number 123 456 needs to be entered into the serial number on the Inspections tab and then the List button is pressed Serial number 123 4546 Reports Inspection Date amp Time PE4 1010 2007 16 18 20 PE4 1040 2007 16 18 33 If there is only one report for that serial number then the report is listed in the Reports list and is automatically opened If there is more than one report then all of the reports are listed in the Reports list To open a report select it in the list and press the Open button The result information about the inspection run will be displayed Checking the Results for a Sa
273. er or an SR controller This section describes the Xi controller variant Zodiac X ray Controller Error Signals Over ki Converter Over Volks yer U 0 Converter Over Current e Turbo e Oil Over Pressure 3 Auto Condition Parameters EY will be increased if leakage is below 20 U EY will be reduced if leakage is above 50 3 ues Leakage will be checked every 200 3 m EY will be changed in steps of kv Condition above the demand ky by 4E ku Restore Defaults Xi Error Signals Cryer Ey C Converter Over Volks 0 Over UA 05 Converter Over Current E Turbo 0 Dil Over Pressure 0 This panel displays the current value of the error signals provided by the Xi source A green icon shows that the particular condition being monitored has not occurred A red signal indicates that the error condition has occurred and has not been cleared 54 XIMO26 A1 User Manual X ray Controller Over kV This occurs when the output kV exceeds its trip level Over uA This occurs when the output current exceeds its trip level Turbo The turbo controller has sent an error signal Converter Over Volts The input volts to the high voltage supply has exceeded its trip level Converter Over The input current to high voltage supply has exceeded its trip level Current Oil Over Pressure The oil tank pressure switch has activated This is indicative of an overheating problem Note It is quite normal for an Over uA error condition to occur during
274. er pass 2307 Optimise Voxel size 0 120001 mm Movement per translation 0 119980 mm Each pass of the sample through the fan beam is called a translation Image data is acquired during each translation The number of lines acquired during each translation is controlled by the Lines per Pass numeric control The number of lines per pass is a large factor in the calculation of the time to acquire the CT data set Also it is vitally important that a sufficient number of lines are acquired to avoid blurring within the reconstructed slice Good results are achieved if movement per translation i e each line that is acquired is equal to the voxel size of the reconstructed slice There is a limit of 8192 lines per translation If the Optimise checkbox is checked then the optimal number of lines per pass is automatically calculated User Manual XTMO26 A1 461 2 D CT Acquisition 180 Degrees Rotation 180 degrees rotation It is preferable that image data is acquired for the sample being rotated by 360 degrees when there is a large difference in magnification between the front of the sample and the back of the sample This is when the Sample Radius on page 462 is large When the Sample Radius is not large then 180 degrees of rotation can be used as this halves the acquisition time Sample Radius Maximum sample radius 76 000 mm The radius of the smallest cylinder centred on the rotation axis of the turntable that complet
275. ery N days by selecting the Every radio button The frequency of the days N is entered in the numeric control User Manual XTMO26 A1 551 Scheduled Tasks Setting a Monthly Schedule for a Task Run task every Daily CO Weekly Monthly Start time 20 00 00 5 Every 2 months Starting on 01 11 2011 4 To run a task on a monthly basis select the Monthly radio button The time at which the task starts to run is entered in the Start Time numeric control The day on which the task is run is selected in the Starting On control The task will be run every N months where N is the number entered in the Every numeric control If the task is to be run every month then enter 1 into the Every numeric control Setting a Weekly Schedule for a Task Run task every Daily Start time Every 2 gt weeks On Monday Thursday Tuesday Friday Wednesday O Saturday Sunday To run a task on a weekly basis select the Weekly radio button The time at which the task starts to run is entered in the Start Time numeric control The day on which the task is run is selected by the required On radio button The task will be run every N weeks where N is the number entered in the Every numeric control If the task is to be run every week then enter 1 into the Every numeric control 552 XIMO26 A1 User Manual Scheduled Tasks What Happens When the Calibration Task Runs When the calibration task is schedul
276. eshold to use can only be done using either minimum or maximum wall widths Choose which measurement to use during the automatic calculation Calculate using minimum thickness Minimum Calculate using maximum thickness Mazimum User Manual XTMO26 A1 219 Image Processing The automatic optimisation can only performed for either minimum or maximum thickness in any one pass Select the required thickness by pressing either the Minimum or Maximum button During the optimisation the Material Grey Level numeric will be updated and the Calculation Errors will be re calculated Minimum measurement error 0 1679956 Maximum measurement error HE This will continue until the relevant calculation error has been minimised Once the Material Grey Level has been set then the Adaptive checkbox may be checked to instruct the measurement algorithm to use local adaptive thresholding Adaptive Thresholding As the grey level that defines the edges of the material can vary it is often necessary to use local adaptive thresholding Local adaptive thresholding uses the global edge threshold calculated using the grey levels for material and background and the edge threshold as a seed to find the true edge in a local search algorithm The size of the area in which the edge is found at every pixel within the slice image is defined by the Search Width numeric To switch on local adaptive thresholding check the Adaptive check box The Search Width may
277. essed the area will be automatically scanned When complete the Save New Map Scan window is displayed Save New Map Scan cal O Do you wish to save this area so that it can be scanned again CO Yes 2 No Do vou wish to save the map image so that it can be reloaded without having to scan it again Yes O No 86 XIMO26 A1 User Manual Manipulator Controller This allows the user top specify if the scan area is to be added to the option menu of the Scan Area button and if the map image file is to be saved to disk Typically the user will add the area to the option menu of the Scan Area button when the area is to be scanned a number of times using different samples If the area is to be scanned only once then it is recommended that the No radio button is checked If the scanned area is to be re used many times it is recommended that the Yes radio button is checked so that the image is saved to disk The map can be re loaded by opening this map image file Scan Area To scan a pre defined scan area then pressing the Scan Area button will display the menu from which the required area can be selected Clear map e 10x10 10x70 test The currently selected map scan area if there is one is the entry with a mark against its name Selecting another map scan area from the menu will start the map scan of that area Selection of the Clear Map menu item will clear the manipulator map When the map scan has starte
278. et before the Generate button has been pressed Once the Generate button has been pressed then the uA is set for the correction For the White and Grey images the X ray filtration used must be specified If the required value is not in either of the material or thickness lists then type the required value into the relevant box Entry of the correct X ray filtration is vital so that when the shading correction is loaded or updated the user will be prompted to add the specified filtration at the correct points in the process The material for the X ray filter should be uniform for all images Only the thickness of the filter should be altered The White Target control specifies the grey level for which the correction is calculate for X rays that pass through no material 112 XIMO26 A1 User Manual Image Processing When the parameters have been set as required to generate the shading correction press the Generate button Prompts will be displayed at the appropriate times to ensure that the required X ray filtration is inserted Upon the successful completion of the creation of the shading correction the correction is loaded and the window is closed required X ray filtration should be inserted and there should be no f When acquiring the images to create a shading correction the object between the X ray source and the imaging device Loading a Multi Point Shading Correction Mame 40ms 100kY 9504 yt ray conditions kw 1
279. evice Also if the panel exhibits non linear pixels then the longer the time over which the image is averaged then the more likely it is to identify non linear pixels Non linear pixels are pixels whose dynamic range varies with time 116 XIMO26 A1 User Manual Image Processing Once the imaging parameters have been set and the image acquisition time has been specified then the X ray settings need to be specified The particular kV used is not significant but the uA settings is recommended to be at least 80UA This is because the grey image acquired for bad pixel determination is acquired at 1 4 of the initial uA setting If the initial uA setting is not greater than 80uA then 1 4 of the setting will not normally produce an image that is about 1 4 of the brightness of the white image Once the X ray settings have been set then pressing the Acquire button will acquire the images Three images will be acquired e A white image acquired at the initial uA setting e A grey image acquired 1 4 of the initial uA setting e A black image with no X rays on Note that there will be a delay between acquiring the grey image and the black image This is to allow for the latency of the imaging device to decay to ensure a high quality image for bad pixel determination Before the images are acquired an image is averaged to check that the settings used are acceptable to the bad pixel identification function If there is any problem then an informativ
280. ew Full Results view Results A When BGA analysis has been calculated to display a detailed analysis press the View Results button The full results included detailed analysis for each BGA solder ball found This detailed data is displayed in a separate window X BGA Ball Count Results BAX 18 10 2005 12 37 05 Target BGA ball count 241 Excluded BGA balls 0 Passed BGA balls 241 Undersize BGA balls 0 Oversize BGA balls 0 Ball Type x Average Diameter mm Area square mm Perimeter mm Compactness Roughness had Passed 0 047 0 002 0 161 1 21 1 02 Passed 0 049 0 002 0 170 1 21 1 02 Passed 0 050 0 002 0 175 1 26 1 01 Passed 0 049 0 002 0 168 1 20 1 01 Passed 0 049 0 002 0 167 151 4 1 01 Passed 0 050 0 002 0 169 1 17 1 01 Passed 0 049 0 002 0 170 1 22 1 02 Passed 0 051 0 002 0 173 1 18 1 02 Passed 0 050 0 002 0 180 1 29 1 04 Passed 0 050 0 002 0 180 1 32 1 05 Passed 0 049 0 002 0 176 1 32 1 05 Passed 0 049 0 002 0 174 1 28 1 04 Passed 0 050 0 002 0 176 1 25 1 04 Passed 0 048 0 002 0 167 1 20 1 02 Passed gt 0 050 0 002 0 174 1 25 1 05 Passed f 0 050 0 002 0 173 1 22 1 02 Passed 0 050 0 002 0 179 1 30 1 03 Passed 0 049 0 002 0 169 1 20 1 01 Passed 0 049 0 002 0 165 Ll 1 02 w 0 1 2 3 4 5 6 3 User Manual XTMO26 A1 235 Image Processing For each solder ball identified the following data is available Ball A numerical identifier Type This field specifies if the ball was
281. f interest There are two ways of starting to build a region of interest e Set the whole image to be excluded from the region of interest by pressing the None on page 277 button and then adding objects and setting these to be included e Set the whole image to be included within the region of interest by pressing the All on page 277 button and then adding objects and setting these to be excluded The type of object to be added to the region of interest is set by the Object Type drop down menu The available object types are as follows When an object type has been selected then the Information on page 278 panel will show the instructions on what to do to add the object to the region of interest Before the region defined by the shape is added to the region of interest it may be re sized by clicking upon one of the object s resize handles and dragging it or moved by clicking upon the object s move handle and dragging it Resize handle Move handle When the object is positioned as required then add it to the region of interest by pressing the Include or Exclude button The region defined by the shape will be either added as an included of excluded area dependent upon which button is pressed 272 XIMO26 A1 User Manual Image Processing Rectangle To create a rectangular region to be added to the region of interest click upon the X ray image in the main image window with the left mouse button and drag out th
282. f the X ray image The averaging process can be aborted by pressing the Capture Image button This function is only available if an X ray controller is enabled Wide Image Radiography systems fitted with a scanning imaging panel AN The Wide Image Radiography function is only available on inspection 138 XITMO26 A1 User Manual Image Processing When the Wide Image Radiography button is pressed then the Wide Image Acquisition window is opened This window enables the acquisition of wide radiographic images of samples where two or four images are stitched together Wide Image Acquisition Frames to average Number of images 2 O Disable shading correction Mame 4 Panel Scan e ara conditions kw 250 UA 120 Compensate For latency Calculate Manipulator control Guter Left Inner Left Middle Inner Right Outer Right Depending upon the inspection system you may be able to acquire two or four images The four image option is only available on the very large systems Frames to average 16 wt To acquire a wide image radiograph select the number of frames to average and the number of images to stitch together Number of images 2 OE User Manual XTMO26 A1 139 Image Processing If the system only supports two image stitching then the Number of Images selection is not displayed Disable shading correction Mame 4 Panel Scan e kw 250 ya 120 A suitable multi point shading co
283. g AN Starting this operation will overwrite existing data TF you continue the existing data will be lost Continue and overwrite data Archive data as a ZIP File and then continue Cancel If the Cancel button is pressed then the 2 D inspection program run will be aborted and no data will be lost If the Continue button is pressed then the results data for the samples that have already been inspected will be overwritten by this program run If the Archive button is pressed then the results data folder will be archived by creating a ZIP archive of the folder An informational window will be displayed whilst this archive operation is in progress Then the inspection program will continue its run Archiving Progress Compressing Folder DACT Data Small Blade 23 456 789 into ZIP archive DACT Data Small Blade 235 456 769 zip A program run consists of four stages e Updating of shading corrections if required e Acquiring the CT data sets e Waiting for the CT data sets to be reconstructed e Performing the wall thickness measurements User Manual XTMO26 A1 539 2 D Inspections If any of the shading corrections used by the 2 D CT profiles within the 2 D inspection program have aged then they are re acquired The time that they are valid is specified within the Image Processing Properties on page 294 When the program is run a check is made to see if the shading corrections are valid If they need to be updated then a
284. g These images show the effect of not having the Smart Filter switched on To switch the Smart Filter on press the Smart Filter button so that it stays depressed To switch it off press the button again to release it Solder Edge Threshold Solder Edge Threshald 27165 4 J b To set the solder edge grey level either change the value of the text box adjust the slider or by sampling from the X ray image in the main X ray image window on page 169 To sample from the image press the Sample From Image check box which will stay depressed and then click upon the X ray image to define the grey level It may be helpful to zoom the X ray image to do this After sampling from the image the slider makes for easy minor adjustment PTH Size Height 1 20 mm width 1 00 mm The size of the PTHs that are being analysed is entered into these numeric controls The units of measurement are set in the Measurement on page 197 tool Number of PTHs Number of Plated Holes 40 This numeric defines the number of PTHs expected to analysed in the image This allows for the analysis function to determine if there are any missing PTHs Fill Level Threshold Fill Threshold an Ho The PTH fill analysis is determined to be passed or failed on the fill level percentage threshold This control specifies the allowable percentage of fill for the PTHs Note that voiding within the region of interest is colour coded on the image Green areas
285. g FUNCIONS aca 176 Image Tool COM este aceasta oia uae aeaseeanat nan aaaaieneemedaone 177 a a a museeteotenaes 178 CENTE A A ee 178 A A E A A LIA 179 User Manual XTMO26 A1 v image Tone AGIUSUNC IA iii a ts 180 TONG CUIV GS id 181 Fea S LOO MA anette ec ee 185 Negate Tone CUVE O ce 187 AWO TONG asi ada 188 Preset Tone CUNG S daa 188 Save TONG CUN Gradine te ea E eee N 188 Delete Preset T One CUNO miite a a a a T 188 Reset Tone CUNO aaa aaa 189 Bin AanSe IINAGe a A a 189 Binanse Threshold Slidas nrecunsocnebansir on E late sland Gia leuan cantina cieh deen dala 190 PUSLOO ha isryaccswnccsape E eau ianead idea ence amet ieee eens 191 PSeudo Colour Made ba 193 Pseudo Colour Threshold Sliders ciclos is A A A AA a 194 PISIOOra M AA A A ee cei ane eee ee 194 Background Image Subtraction 00 A 196 Set Background Subtraction Image oooccccccoccnncconcnnconoconononcnnnnnaconnonancnnononcnnnnnnrnnnonancnnnnnnnnnnnas 196 Load Background Subtraction IMAage ooccccccocnnncccccnnconncnnononcnnnonnnonnononcnnnnnnrononnnrnnnnanrnnonnaninnss 197 Remove Background Subtraction Image cccoooccncoccnnncconcnncononnnnononcnnonnncnnnonanonnnnnnnnnnnnronconanenoss 197 Apply Background Subtraction sessi a ii a 197 Measte Men Erbstit a A 197 Measurement UNIS rio A O ala lavesatavaeians 199 MeasuremeniS aia A A AA uddatonshatainMuldns 199 Calibrate Horizontal amp Vertical Measurements oooccccccoccnnccocnnconoconcononcnnnnoncnnconano
286. g a program 504 CT profiles 521 Defining wall measurements 508 Deleting a program 535 Editing a program 521 Manipulator control in Operator mode 536 Number of samples 521 Operator ID 526 Operator ID in Operator mode 536 Output options 521 Pixel size 521 Reconstruction computer 521 Results data folder structure 533 Running a program 526 Running a program in Operator mode 536 Sample Serial Numbers 526 Sample serial numbers in Operator mode 536 Setting up beam hardening correction 504 Shading correction safe position 521 X ray control in Operator mode 536 3 D CT Batch Program 487 Adding 3 D CT Profiles 488 Creating a program 488 CT profiles 490 Deleting a program 501 Editing a program 490 Number of Samples 494 Operator ID 494 Reconstruction computer 490 Running a program 494 Shading correction safe position 490 Tray Type 494 3 D CT Properties Add Beam Hardening Preset 434 Remove Beam Hardening Preset 434 About Inspect X 569 Application Properties Changes Control 585 Component Control 585 Run Function Main 585 Show VBA Tool Bar 585 Splash Screen Logo 585 System Description 585 VBA Project to Open 585 VBA Version 585 Bad Pixel Correction 101 115 283 Computed Tomography 403 User Manual XTMO26 A1 591 Index CT F Acquiring a CT data set 422 Acquisition properties 428 File Menu 569 Automatic calculati
287. g of the created acquire image actions A and visual check actions is checked to ensure accuracy If any fiducial calibration or positional calibration actions have been replicated then the reference images for these actions will need to be created User Manual XTMO26 A1 319 Inspections Step and Repeat Specify Increments in X amp Y When the manipulator is at the start position it is possible to step and repeat by specifying the increments in the X and Y axes This is done by entering into the Step and Repeat Window the number of objects horizontally and vertically and the increments in the X and Y axes Enter the spacings and numer of steps ins amp Y and press OK Moke that this function works for regularly spaced identical Features Spacing in x 2 00 mm 5pacing in Y 2 00 mm Mumber horizontally q fo Number vertically 7 hat These are the objects horizontally and vertically with respect to the X ray image displayed This may be different to your sample s initially loaded orientation if you have rotated the sample using the manipulator Note that the example above defines the number of samples as a 4 by 2 grid Then press the OK button to create the new components Step and Repeat Specify Increment in Rotation When the manipulator is at the start position it is possible to step and repeat by specifying an increment in the rotation axis This is done by entering into the Step and Repeat Window the increment in the
288. ge stack will not be created Send Email Notification Send email notification If an email is to be sent by CT Agent when the reconstruction job is completed then the Send Email Notification check box needs to be checked When this is selected then the Operator ID on page 480 must be a valid email address Note that CT Agent must be correctly configured to ensure that the email message is sent Acquisition To acquire the data set press the Acquire button A progress bar and an estimated time to completion will be displayed To stop the acquisition of the CT data set press the Cancel button The CT data set folder will contain all of the data files including the sinograms the reconstruction parameter file the CT profile and the reconstructed image stack if reconstruction was selected User Manual XTMO26 A1 481 2 D CT Acquisition Properties There are a number of properties that control how CT acquisition functions These properties are available within the Properties Window on page 583 that may be opened from the Inspect X main menu on page 577 or the Properties on page 151 button on the Image Processing tool bar The properties are separated into the following groups Acquisition on page 482 Reconstruction on page 429 Beam Hardening on page 485 Note that all property values are NOT saved until the Save button is pressed Acquisition Tab Acquisition Reconstruction Bea
289. ge 34 panel To change the demanded level of kV by a number of steps you may either click the required button a number of times or click the button and hold down the mouse button until the required level is set The buttons disable as required when the maximum kV setting for the source has been reached or the level is set to O Both demanded kV and actual kV being generated by the X ray source are displayed If the X rays have not been switched on then the actual kV will be 0 although the demanded kV may be set to some other value If the power limit for the system is reached then the readout box is coloured yellow to indicate this 160 160 E Power limit reached Power or Current Control X ray Intensity Current control The control of power or current controls the level of x rays at the penetrating power selected The X ray controller can either control the power or current for the X ray beam generated by the X ray source The choice of power or current control is made by use of the drop down menu to the right of the demand read out The advantage of controlling the power rather than the current is that the relative brightness of the image displayed is maintained when the kV level is altered the relative brightness varies when using current and changing the kV level 20 XIMO26 A1 User Manual X ray Controller The more power or current generated the image will become brighter In particular the areas in t
290. ge 567 can be added to the component by pressing the Add Note on page 566 button The status of the component can be updated by pressing the Change Status on page 565 button Images List BGA Analysis BGA Void Analysis BGA Void Analysis For the selected component this control will list the images available for review If there are no images available then the list will be empty The images are identified not by their name on disk but by the analysis action that preceded the image being saved within the inspection program Note that only greyscale images are listed If the Save Image action within the inspection program saves a colour image then this is not listed in this control This is because colour images cannot be reviewed within Inspect X analysis parameters can be updated However the updated image cannot be saved to disk unless the Save Images Enabled on page 285 property Images opened within the validation station can be analysed and the is set to true This avoids inspection images being incorrectly updated 964 XIMO26 A1 User Manual Validation Station Change Component Status SD se ee ee Change Status If the status of a component is reviewed and the operator decides that the status needs to be changed then pressing the Change Status button allows this to be done When the button is pressed the Change Component Status window is displayed Change Component Status This BGA has been evaluate
291. ge Notes e 269 Add Measurement to Image Notes 197 Add or Delete Annotation Objects 221 Add Package Void Results to Image Notes 259 Add Results to Image Notes 228 Add X ray Conditions to Annotation 221 Annotation 221 Annotation Default Colours 283 Annotation Normal or Bold Style 221 Annotation Properties 283 Arrow Annotation 221 Auto Tone Adjustment 168 Average Image Linear Detector 152 Background Image Subtraction 196 Background Image Subtraction Action 339 Bad Pixel Correction 101 115 BGA Ball Analysis 231 BGA Ball Count Calculate Full Results 231 BGA Ball Count Calculate Results 231 BGA Ball Edge Threshold 231 237 BGA Ball Void Analysis 237 BGA Ball Void Analysis using Thresholding 237 BGA Ball Void Image Flattening 237 BGA Exclude Objects Below Diameter 231 D BGA Fail Threshold 237 BGA Oversize Fail Threshold 231 alga noe BGA Perfect Ball Diameter 231 E BGA Undersize Fail Threshold 231 Essential Safety Information 3 Exit 569 992 XIMO26 A1 User Manual BGA Void Fill Threshold 237 Binarise Image 189 Binary Dilate 189 Binary Erode 189 Brightness 180 Calculate BGA Ball Void Results 237 Calculate Full BGA Ball Void Results 237 Calculate Package Void Full Results 259 Calculate Pad Array Void Full Results 246 Calculate PTH Fill Analysis Full Results e 252 Calibrate Measurement 197 Capture Image
292. ge by averaging the number of frames Whilst the image capture is being performed a progress bar is displayed to indicate how much of the process has completed The higher the number of frames the higher the quality of the X ray image To specify the number of frames over which to average press the button next to the Average Image button and select the required number of frames from the menu displayed This function is only available if an X ray controller is enabled User Manual XTMO26 A1 125 Image Processing Wide Image Radiography The Wide Image Radiography function is only available on inspection systems fitted with a scanning imaging panel When the Wide Image Radiography button is pressed then the Wide Image Acquisition window is opened This window enables the acquisition of wide radiographic images of samples where two or four images are stitched together Wide Image Acquisition Frames to average 16 Number of images 2 2 4 Disable shading correction ray conditions ky 250 YA 120 Compensate For latency Calculate Manipulator control Outer Left Inner Left Middle Inner Right uter Right Depending upon the inspection system you may be able to acquire two or four images The four image option is only available on the very large systems Frames to average 16 126 XIMO26 A1 User Manual Image Processing To acquire a wide image radiograph select the number of frames to average and th
293. ges The image acquisition and processing within Inspect X is 16 bits for all imaging devices Image Type Greyscale smaller file Greyscale with Tone smaller file Colour larger file All the image formats allow for the saving of the image in greyscale or colour formats Greyscale images can be saved with either the tone edit saved in the image profile or applied to the image If the tone edit is saved in the image profile then the image data in the saved file does not have the tone edit applied This is so that tone edits are non destructive and can be altered if the image is re loaded into Inspect X If this is required then select the Greyscale option If the tone edit is required to be applied to the image data in the saved file then the Greyscale with Tone option should be selected Applying the tone edit to the image data means that third party image applications will open the image and the tone edit is seen Not that re opening such an image in Inspect X will not allow the undoing of the tone edit Larger files are created when saving using the Colour option Saving with colour is necessary when any colour image processing on the image is to be saved in the image and to be read in a third party image application Colour images opened within Inspect X are displayed as monochrome images The Colour option is best considered to be an image export function If an image analysis function has been used to analyse the image
294. gnment offset re size and move the green and red rectangles in the main X ray image window on page 169 Re sizing the rectangles is achieved by clicking with the left mouse button upon the corners with a box and dragging the corner to its required position To move a rectangle without re sizing it click upon the box in the centre of the rectangle and drag the rectangle to the required position Both rectangles can be moved by clicking upon the orange box and dragging this Once the rectangles have been adjusted as required then the alignment offset is displayed in the Drill Offset control The units of measurement used are those that are set in the Measurement on page 197 function If the calibration of measurement has not been made at the magnification at which the image is captured then any measurements in units other than pixels will be wrong To re calibrate press the Calibrate on page 270 button Add Results to Image Notes Add To Motes i To add the results of the drill offset analysis to the Image Notes see topic Image Profile on page 589 press the Add To Notes button Calibrate l Calibrate As the measurement of drill offset requires parameters that use the current measurement units it may be necessary to re calibrate the measurements To re calibrate press the Calibrate button and this will display the Measurement on page 197 image processing function Region of Interest Bu
295. gram Shading corrections Sample Loading sample CT data set Unloading sample Cancel Status Completed 1 of 3 Completed Acquiring Std CT Profile 1 of 1 Waiting Std CT Complete The CT acquisition Finished successfully Estimated time to completion 00 07 03 Hours Mins Secs For a system fitted with a sample changer manipulator User Manual XTMO26 A1 499 3 D CT Batch OM 3 D CT Batch Program Operator ID 3 D CT batch program Delete Create Edit gt gt Status Shading corrections Completed CT data set Acquiring Std CT Profile 1 of 1 Std CT Complete The CT acquisition Finished successfully Estimated time to completion 00 00 13 Hours Mins Secs For systems without a sample changer manipulator When the batch program has completed then the status of the individual CT acquisitions is displayed in the status panel 3 D CT Batch Program Operator ID operator company com Std CT Complete The CT acquisition Finished successfully Std CT Complete The CT acquisition Finished successfully 900 XTMO26 A1 User Manual 3 D CT Batch Deleting a 3 D CT Batch Program A 3 D CT Batch Program Operator ID operatoriMcompan com Number of samples 3 i Sample traw type Sample Tray 4 E 3 D CT batch program test 1 E If a 3 D CT Batch program is no longer required then it can be deleted by selecting the required program within the 3 D CT Batch Prog
296. gram then the Add to Inspection window is displayed This user interface controls which inspection program to which the actions are to be added and the sample and component within the inspection program to update Add To Inspection Inspection Inspection Test Create Recorded Actions Add to Sample Add to existing Sample Sample 1 Create new sample Add to Component Add to existing Component c 1 Create new component Mew component name Save image actions will be automatically inserted Gale a 300 XIMO26 A1 User Manual Inspections Inspection Selection The inspection program to which the actions are to be added is selected by these controls A new inspection program can be created typing in the required name and pressing the Create button Sample Selection Add to existing Sample Sample 1 a Create new sample The recorded actions may either to added to an existing sample within the selected inspection program or a new sample within the program can be created The selection of the required radio button on page 590 determines which of these operations is performed when the Add button is pressed If the Create New Sample radio button is selected then a new sample will be created and added to the end of the samples list within the inspection program Note that samples are automatically named and are just used for reference within the user interface Component Selection Ad
297. gram is contained within one folder archiving the results of an inspection run is easy To archive the results open up the Images folder within Windows Explorer and then open the folder that has the name of the required inspection program In this folder will be one or more sub folders that are named with a date and time stamp Each of these folders contains all the data for each run of the inspection program The required folders can be archived 396 XIMO26 A1 User Manual How to Get More Out of Inspection Programs Inspections and Validation Station When an inspection program has been run the results can either be viewed as an HTML report either within Inspect X or within a web browser or may be examined using a Validation Station A Validation Station is a computer running another version of Inspect X that allows for the loading of inspection reports checking the results The user of a Validation Station can update the status of the various components Validation Station Networking The Validation Station must be networked with the Acquisition computer on the inspection system This can be done as a point to point connection or through a local area network Acquisition PC Validation Station Shared Folder The important part of the set up is that the Images folder as specified in the Image Processing properties on both the acquisition computer and the validation station MUST be the same folder This will have to be a shared fold
298. gram to show the current displayed grey scale value of the point It is also possible to set the white and black ends of the tone curve using the histogram Grey Level Pixels Max 65260 Min 1536 Average 22650 Std Dey 276666 To do this move the mouse over the required end of the grey scale at the bottom of the histogram The cursor will change to show that the end can be alter To change the required end point click with the left mouse button on the end and drag it whilst holding the mouse button down to the grey level required Both white and black end points can be defined in this manner Grey Level 46126 Pixels 7949 Max 65250 Min 15 36 Average 22650 Std Dey 666 0 dl User Manual XTMO26 A1 185 Image Processing When the mouse is moved over the body of the histogram the grey level information corresponding to the mouse position is displayed below the histogram The information displayed is the grey level and the number of pixels in the image that contain that grey level The other information displayed describes the grey levels in the image The values displayed are the Maximum grey level in the image the Minimum Grey Level in the image the Average Grey Level in the image and the Standard Deviation of the Grey Levels in the image Grey Level 12600 Pixels 120 Max 652650 Min 1536 Average 22650 Std Dey 76666 0 So that specific grey levels may be marked for future use or track
299. h Tall Samples on page 425 window is opened licence for this function AN 3 D CT Batch is optional and is only available on systems that have a valid Add To Batch Tall Samples Add To CT Batch Tall Sample Yertical Field of iew Maximum sample radius 10 000 tam Vertical Field of view 24 858 mm Sample Height Top Y axis 140 000 Bottom Y axis 200 000 CT Datasets CT data set overlap Number of CT data sets The Add to CT Batch Tall Sample window facilitates adding multiple CT profiles to a 3 D CT batch program that will acquire 3 D CT data sets and volumes for a tall sample A tall sample is one whose vertical height does not fit within the imaging User Manual XTMO26 A1 425 3 D CT Acquisition Specifying the Sample s Radius Maximum sample radius 10 000 rim Vertical Field of view 24 858 mm The radius of a cylinder that would fully enclose the sample is entered into the Maximum Sample Radius numeric control sample viewed from above The Vertical Field of View shows the vertical field of view of the sample Specifying the Height of the Sample The top and the bottom positions of the sample need to be set OE Top Y axis 140 000 Set Bottom axis 200 000 Set It is usually best practice to move the Y axis of the manipulator X axis on the XT V 160 system so that either the top or bottom of the sample is being viewed Then either enter the
300. h no more than the allowable X rays trips can occur After the X ray source has tripped the vacuum within it will need some time to stabilise The Delay Period After X ray Trip numeric specifies the number of seconds to wait after an X ray trip has occurred during CT acquisition before the X rays are switched back on Reconstruction Tab P Acquisition Reconstruction Beam Hardening Reconstruction computers Recon 1 Enable email notifications _ volume display program 3 bytes per voxel Reconstruction Computers The computers that appear in the Reconstruction Computer on page 480 drop down list at the Acquisition stage of the step by step user interface is shown by the Reconstruction Computers list User Manual XTMO26 A1 483 2 D CT Acquisition Add Computer To add a computer to this list type its name into the Available Computers box and press the Add button If the exact name of the computer is not Known then press the Find button and this will populate the Available Computers list This may take some seconds as it has to interrogate the computers available on the local area network The required computer may then be selected from the Available Computers drop down list and added by pressing the Add button Remove Computer To remove a computer from the Reconstruction Computers list select the name in the list and either press the Delete key or press the Remove button For Inspect X to successfully acquire a CT
301. hanges made within the 3 D CT Acquisition function are copied into the 3 D CT profile in the 3 D inspection program The link between the profiles is only broken either when another 3 D CT profile is edited from within the 3 D inspection program or the 3 D inspection program is closed for edit by pressing the Done button To alter the order in which the 3 D CT profiles are performed within the program then select the CT profile to move and then either press the Up button to move it up in the list or the Down button to move it down in the list User Manual XTMO26 A1 491 3 D CT Batch Delay Between CT Acquisitions Delay between each CT acquisition The CT acquisitions within the batch program may be run sequentially without any delay between each CT acquisition This is the default behaviour and is selected by unchecking the Delay Between Each CT Acquisition checkbox If a delay is required between each CT acquisition CT Profile in the batch program then check the Delay Between Each CT Acquisition checkbox If the delay between each CT acquisition is to be the same then check the All Delays Are The Same checkbox Delay between each CT acquisition All delays the same Hours Minutes Seconds Wait after each CT acquisition O is g The required delay between every CT acquisition is then specified in the Hours Minutes and Seconds numeric controls If different delays are required between CT acquisitions then then unch
302. harp image can been seen Move the slider to the left of the focus position Then using the right hand nudge button step the coarse focus until it just moves past the focus position Use the left hand nudge button to nudge the value back one step Repeat the actions in step 3 but using the fine focus slider Once the fine focus has been set then press the Save Value button to save the focus value Set the demand kV value to the next required kV value to focus and repeat steps 3 to 5 until all required kV demand values have been focused When focusing increasing kV demand values the coarse slider will typically only require two nudges to the right after the previous kV setting to get the coarse focus position If the X ray source is focussed for all the 5kV steps then the intermediate 1kV steps can be automatically calculated by pressing the Interpolate button Pressing the Clear All button will display a dialog that asks if the user really wishes to delete all values If the answer entered is Yes then all focus values for all kV demand settings will be erased and cannot be recovered On SR controlled systems the Clear All button will clear the focus values for ALL X ray heads Once this has been done the focus values cannot be recovered After the Clear All button has been pressed the focus values cannot be recovered 52 XIMO26 A1 User Manual X ray Controller Auto Focus Ato On inspection systems that have been set up
303. hat it is no longer depressed or by pressing the Switch X rays Off on page 13 button When the X ray source is being auto conditioned the time that the source has been stable at the demanded kV is displayed in the Information Window on page 58 Intelligent Auto Conditioning Intelligent auto conditioning auto conditions the X ray source whilst monitoring the vacuum value This enables faster conditioning of high kV X ray sources whilst minimising the number of breakdowns The kV at which the auto conditioning starts is set by the user and when this kV is reached then the kV is increased until the maximum specified kV is reached If the vacuum level increases beyond parameters specified by the supervisor then the kV is reduced This will often ensure that there is no breakdown within the X ray source and the kV can be increased when the quality of the vacuum has increased again User Manual XTMO26 A1 25 X ray Controller To set up the auto conditioning process press the Auto Condition button This button stays depressed whilst auto conditioning takes place A ea The Auto Condition Window will open Auto Condition Start ky Change to ik steps at Maximum Ev Change in vacuum to stop increasing kw Change in vacuum bo decrease ki Time to hold at kv before increasing EY Ed seconds Setting Auto Condition Parameters Statky o 55 33 ki Change to 1k steps at 110 7 ky Maximum kw 160 7 ky Change in vacuum to s
304. hat once a user has logged on the computer will start Inspect X automatically If this has been disabled then the software can be started by either clicking upon the Inspect X icon on the desktop or through selecting Inspect X from the Start Menu To do this click upon the Start button on the taskbar at the bottom of your screen Select Programs or All Programs Select Nikon Metrology and then Inspect X Inspect x User Manual XTMO26 A1 5 Getting Started Welcome Screen When the Inspect X software is run then the welcome screen as below is displayed Inspect X NIKON METROLOGY VISION BEYOND PRECISION XK Inspect X Copyright 2004 2011 Nikon Metrology NY Select language English iw Select configuration Area Enter operator ID Enter password This computer is the control system for the X ray inspection system It is not a general purpose computer The loading of any software onto this computer unless instructed to do so by Nikon Metrology will invalidate your warranty This screen allows the user to select the folllowing e The language on page 8 in which the user interface for Inspect X will be displayed e f more than one system configuration is available the configuration to run on page 8 e f configured in the application properties on page 585 an operator ID on page 8 will need to be entered as well This is optional e The entry of a password on page 8 to gain entry to the Inspect
305. he Map Window displayed shows the map image from the inspection report Note that the resolution of the image is controlled by the Map Size on page 357 property in the inspection properties and cannot be changed after the inspection has been run Component Notes 12345679 0 Component status changed to PASS This BGA has been evaluated and is OK This control displays the notes within the inspection report that have been added on a Validation Station Each note starts with the operator ID if configured within the application properties on page 585 If not configured then only the note is shown Each note starts on a new line User Manual XTMO26 A1 567 Validation Station Save Report If an inspection report has been updated with a note added to a component or the status of a component has been updated then the inspection report on disk will only be updated when the Save button is pressed Update Report When an inspection has been updated on the validation station and saved to disk then the HTML report can be updated by pressing the Report button This makes a second copy of the report and does not overwrite the original report 968 XIMO26 A1 User Manual 16 Menus The operator level interface has a menu bar that controls a number of functions within the Inspect X application Operator Menus File Menu File Programs Tasks Windows Open Chrl 0 Save As Ctrl s Activate Image 1 Activate Imag
306. he TIFF Scaling of Attenuation This is the attenuation coefficient that is mapped to 65535 Attenuation coefficients greater than this value are clipped and those below 0 are clipped to 0 8 Bit Unsigned Integer The advantage of this option is that it requires 25 of the disk space required for a 32 bit floating point volume There are two options on how the data is scaled when the volume rendering program loads the data Automatic scaling of attenuation coefficients Range min max Percentiles If Range is selected then the minimum and maximum attenuation coefficients within the volume are mapped to O and 255 This effectively stretches the data within the volume to use the full dynamic range of the 8 bit unsigned integer lf Percentiles is selected then the input percentiles are used by the volume rendering program to decide which attenuation coefficients are mapped to O and 255 Low percentile 0 20 2 High percentile 99 50 Yo Note that the histogram algorithm within the volume rendering program relies upon converting the attenuation coefficients to a 16 bit floating point number This will fail if the attenuation coefficients are outside the range of representable values which is 65504 to 5 96E 08 0 5 96E 08 to 65504 User Manual XTMO26 A1 433 3 D CT Acquisition Beam Hardening Acquisition Reconstruction Beam Hardening Beam hardening presets Small Blade Beam hardening tables TurbineBl
307. he X ray may be changed Depending on the type of absorption the direction may be completely different or only slightly different Not only the sample being scanned scatters X rays The inside of the cabinet will also scatter X rays If the direction is changed only slightly or if the X rays scatter off the inside of the cabinet then there is a chance that this X ray will still hit the detector However the CT reconstruction algorithm thinks that this X ray has travelled in a straight line from the source and so reconstruction artefacts appear in the data The effect of scattered X rays is to introduce a higher than expected background X ray brightness all over the image which will lead to a cloud of higher brightness around the reconstructed volume The most effective way to remove scattered X rays is to use a pair of collimators A small pinhole collimator made of lead and thick enough to stop the highest energy X rays you are using placed just in front of the source will prevent X rays hitting much of the interior of the cabinet The pinhole should be just large enough to not be seen in the image and no larger After the sample a large lead plate with a hole the same shape as the detector cut in it again just large enough to not be seen in the image will prevent scattering after the sample In this way only X rays scattered by small angles within the sample will still appear in the image The only way to remove these is to use a two dime
308. he anode within the vacuum chamber The electrons form a beam that passes through the centre of the anode ring and along the beam tube to strike the target left of diagram When the highly accelerated electrons strike the target X rays are produced Part of the filament holder is held at a potential more negative than the filament This voltage the grid voltage is used to control the flow of electrons down the beam tube this is the beam current controlled by the demanded uA or power 38 XIMO26 A1 User Manual X ray Controller Current is passed through a focus coil located close to the target The coil acts as a magnetic lens focusing the electron beam to produce a fine spot on the target The size of the focal spot determines the resolution and the imaging quality of the X ray source In order to achieve the best possible image quality it is necessary to ensure that the electron beam passes exactly through the centre of the magnetic lens This is the alignment of the X ray source All X ray inspection systems are set up prior to shipment Unless there is some change in the X ray source then the focusing should never need to be updated Changing the filament within the X ray source does not affect the focusing if the filament is physically correctly aligned within the filament holder Only the X and Y shifts or mechanical alignment of the filament will require to be updated X ray sources either have an integral high voltage power supply
309. he centre of rotation is to be calculated press the Acquire button and then move the guideline on the ray image to specify the slice to be used Manual Calculation Replace the sample with a calibration rod of a suitable size and then press the Acquire button Automatic Calculation Caclulate automatically w To specify the slice at which the centre of rotation is ta be calculated press the Acquire button and then move the guideline on the X raw image bo specify the slice to be used As projection images are acquired with the manipulator positioned with the centre of rotation of the sample at the centre of the image it is possible to automatically calculate the exact position of the centre of rotation This is done by checking the Calculate Automatically checkbox When this checkbox is checked then the calculation is done by CT Agent just before the volume is reconstructed User Manual XTMO26 A1 415 3 D CT Acquisition When automatic centre of rotation calculation is selected then the user can specify the slice at which this calculation is done This is important as the slice must have significant features on it so that the algorithm can function correctly To specify the slice press the Acquire button This acquires an image and displays a green line on the X ray image that specifies the slice Note that the slice must be within the volume of interest If it is not then a warning message is displayed 416
310. he image where the X rays have not passed through the item being inspected will become saturated The X ray source will not generate any X rays until it is switched on on page 22 You may change the power or current level required when the X rays are switched on or off Actual Power 70 W Demanded Una Power Demand Change Buttons The buttons increase and decrease the demanded power or current setting by a pre determined value The step value is set either as a fixed value or varies depending upon the present power or current demand The value of the increment is set within the general properties on page 34 panel In the latter mode as the demand increases then the step size increases The outer buttons increase and decrease the power or current demand by a large step and the inner two buttons by a small step To change the demanded level of power or current by a number of steps you may either click the required button a number of times or click the button and hold down the mouse button until the required level is set The buttons disable as required when the maximum power or current setting for the source has been reached or the level is set to 0 The demanded power or current is shown as is the actual power or current being generated by the X ray source If the X rays have not been switched on then the actual power or current will be 0 although the demanded power of current may be set to some other value If the power limit fo
311. he kilo voltage kV generated by the X ray source The more kV generated the more the X rays will penetrate the item being examined in the X ray inspection system The X ray source will not generate any X rays until it is switched on on page 13 You may change the kV level required when the X rays are switched on or off The two buttons increase and decrease the demanded kV setting by 5kV To change the demanded level of kV by a number of steps you may either click the required button a number of times or click the button and hold down the mouse button until the required level is set The buttons disable as required when the maximum kV setting for the source has been reached or the level is set to 0 User Manual XTMO26 A1 11 X ray Controller If the power limit for the system is reached then the readout box is coloured yellow to indicate this 160 w ail Power limit reached Power or Current Control X ray Intensity 1 0 Raa da es Power control D UA Eara i 4 E Current control The power or current controls alter the intensity of x rays at the penetrating power selected The more power or current generated the image will become brighter In particular the areas in the image where the X rays have not passed through the object being inspected will become saturated The X ray source will not generate any X rays until it is switched on The X ray controller can either control the power or curr
312. he main X ray image window on page 169 These may be the results saved from image processing functions or user input information To view the notes for the current image press the Image Notes button This will display the Image Notes dialog Image Notes Measured horizontal distance is 27 68 mm Measured vertical distance is 15 73 mm Measured distance is 31 84 mm The list shows all the image notes attached to the image To save the changes to the image notes press the OK button To abort the changes to the image notes press the Cancel button To delete one or more records select them in the list and then press the Delete button 150 XTM026 A1 User Manual Image Processing To add a new record press the Add button and the Add Image Note dialog will be displayed Add Image Note Image Mote to Add Extra Information When the new note has been entered press the OK button To cancel adding a new note press the Cancel button Shading Correction The Shading Correction button opens the Shading Correction on page 102 window This window controls the shading correction being used Properties The Properties Window on page 583 can be displayed by pressing the Properties button Image Information at ae Ti az I ize A When the mouse tracks across the X ray image in the main X ray image window on page 169 this panel displays the X and Y coordinates to the image pixel under the mouse
313. he minimum kV that will be used Set the X and Y shift values and press the Save button 3 Lower the demand kV to the lowest setting to be used on the system Set the X and the Y shift values and press the Save button 4 Press the Interpolate button This will calculate the X and Y shift values for all the other kV settings To reset the Max Mid and Min kV values press the Reset button 50 XIMO26 A1 User Manual X ray Controller Focusing Focus Mode gt Normal Auto Defocus Set up Focus There are three focusing mode These are detailed below Normal Reads focus current values from a previously recorded look up table and uses these to supply a focus current to the magnetic lens on the X ray source This is the normal operating mode which requires the look up table to have been set up previously Auto This mode is the default mode for X ray systems When the X ray power Defocus reaches the Defocus Threshold for the X ray source then Inspect X starts to impose a defocus factor on the current values read from the look up table This has the effect of enlarging the focal spot on the X ray source target this increases target life but decreases resolution The focus slider on the X ray controller is disabled when Auto Defocus mode is used and the demanded power is greater than the defocus threshold Set Up Before either Normal or Auto Defocus modes can be used it is necessary Focus to record a look up table of f
314. he region in interest Include or Exclude Region When an object is defined in the X ray image in the main X ray image window then this object may added to the region of interest as an area to include for image processing or to exclude for image processing Press the Include button to include the region for image processing and press the Exclude button to exclude the region for image processing Excluded regions appear with a red included regions are clear Once an object has been added it cannot be edited If a mistake has been made then press the Undo on page 277 button to remove it Repeat f When an object is added to a region of interest mask the Repeat button is enabled If the button is pressed then a new object identical to the last added object is created and may be moved to the desired position and added to the region of interest mask 2 6 XTM026 A1 User Manual Image Processing Reset to All To set the region of interest to include the whole of the image for image processing press the All button No red will then be seen on the X ray image in the main X ray image window Reset to None Mone To set the region of interest to exclude the whole of the image for image processing press the None button The whole of the X ray image in the main X ray image window will be covered by red Undo A region of interest is build up by defining one or more objects If a mistake is made then it is
315. he required delay into the Delay Calibration Hours and Mins numeric controls and then pressing the Delay button The Time Out on page 550 specified in the calibration task will be started when the window is displayed How much of this period is displayed on the Warning window If the user does not press the Continue or Delay buttons during the time out period then the window is dismissed and the calibration task runs Calibration Task Progress Reporting When the calibration task runs a progress window is displayed Calibration Progress Filament Recalibration Calibrating Standard Shading Corrections Waiting This window displays which functions are to be performed and their current status Whilst the X ray source filament is being recalibrated the Filament Calibration on page 46 window is displayed next to the progress window If either window is moved then they move together If the Cancel button is pressed on either window then the calibration task is aborted 554 XIMO26 A1 User Manual Scheduled Tasks When the standard shading corrections for all imaging presets are being updated then the Shading Correction on page 104 window is displayed next to the progress window If either window is moved then they move together If the Cancel button is pressed on either window then the calibration task is aborted Clean Up Files Task The clean up files task can be used to delete old files on a scheduled basis Cle
316. he supervisor This example shows 2 actions No Allowable failure count exceeded Yes Continue or abort Mo Stop on failure Mo kip to next sample Terminate program Mo This is an action in the main Inspection program Execute next era Continue Yes This is an action in the main inspection program 1 actlon of next sample if one exists 394 XIMO26 A1 User Manual How to Get More Out of Inspection Programs What Happens 1 Ifthe Run On Failure Actions property is set in the Inspection properties then the On Failure on page 395 actions specified in the inspection program will be run 2 Ifthe Allowable Failure Count for the inspection program has been exceeded then the inspection run will be automatically aborted 3 If Stop on Failure is not set within the Inspection Properties then the inspection program will run to identify all the failures if the Move to Next Sample on First Failure property is not set If this property is set then the program run automatically advances to the next sample in the program if one exists An audible alarm can be sounded upon a failure being identified within an inspection program run This only works if the speaker within the inspection system s computer has been connected On Failure Actions What Happens when a Failure is identified The On Failure actions within an inspection program can be run when the inspec
317. hed off until the timer reaches zero Information This panel displays information about the X ray source Status Head Type Hours On 90 56 Hours Mins Demand u Value Actual mBar Set Point Turbo at Speed Cathode Current ol Head Type Hours On Demanded Power uA Focus Absolute Focus Value This is the type of X ray head target that is currently being used A display of the number of hours for which the X ray source has been active since the hours on time was last reset This feature can be used as a preventative maintenance tool as it gives an indication of filament usage The value is reset within the Focus Properties on page 44 Displays the demanded X ray power in Watts if using current control or displays the demanded current in UA if using power control Displays the demand focus current as saved in the focus Look up table LUT for the X ray head target being used Displays the actual focus value used If this is the same as the Focus Absolute value then no automatic defocusing is applied If the value is different to the Focus Absolute value then the focus demand current has been modified automatically to avoid damage to the X ray source target User Manual XTMO26 A1 59 X ray Controller Filament Demand Actual Vacuum Value Set Point Cathode Current Turbo at Speed Auto Condition Time Stable 60 XITMO26 A1 User Manual An indicator of the filament demand lev
318. held at its maximum kV for one minute Filament Set Up 1 Make sure that there is no sample in view 2 Press the Start button to calibrate the Filament TILL Setting up X amp Y Shift The X and Y shifts are then set up The X and Y shifts are determined at three kV values and then the other kV values are calculated automatically As the filament has been changed a coarse search is performed first for each kV and then a fine search to determine the X and Y shifts Filament Set Up 1 Make sure that there is no sample in view 2 Press the Start button to calibrate the Filament Setting up Filament Demands Finally the optimal filament demand for various uA settings is calculated This process takes a few minutes When completed the filament life timer counter is reset and the filament is calibrated 4 1 1 1 1 2 Auto Filament Recalibration Recalibrate 46 XIMO26 A1 User Manual X ray Controller The Auto Filament Recalibrate function is run by pressing the Recalibrate button This function is run when the filament needs to be recalibrated It should not be used when the filament has just been changed until the Auto Filament Calibrate function has been run The function sets up the X and Y shifts calculates the optimal filament demand values for all X ray conditions The filament life time counter is not reset When the Recalibrate button is pressed then Filament Set Up window is displayed This window guides y
319. help system The results may be saved in two different file types Cov File csv The results are saved as comma separated values This file Text File txt type can be easily imported into an Excel spreadsheet CSV File on page 589 Text File This saves the results as a text file User Manual XTMO26 A1 251 Image Processing PTH Fill Analysis The PTH Plated Through Hole Fill Analysis function allows for the analysis of fill level within plated through holes An example of plated through hole to be analysed Separale Region SmartFilter Solder Edge Threshold 21045 L MD UN id Height 1 205 mm width 1 00 mm Number of Plated Holes 40 55 Fil Threshold 805 Tilk angle 45 w degrees Results Passed Calculate missing FAIL 252 XIMO26 A1 User Manual Image Processing Image Separation In order to improve the efficiency of the analysis of the fill level of plated through holes PTH this function can be used to separate the PTHs from their background Image separation creates a reference image that is used in the analysis The reference image is only viewed when defining the image separation Separate Press the Separate button and the Image Flattening dialog will be displayed This is used to define the image separation Define Image Flattening Adjust the slider until the artefacts are
320. how the image within the main X ray image window on page 169 will be printed press the Print Preview Image button This will display a dialog that allows the user to see how the image will be printed This is the standard Windows print preview dialog and is not documented here Documentation is available from within Windows al Print preview 22 08 BBB tux User Manual XTMO26 A1 575 Menus Page Set Up To specify the print page set up press the Page Set Up button This will display a dialog that allows the user to specify the print page set up This is the standard Windows page set up dialog and is not documented here Documentation is available from within Windows Page Setup Paper SIZE Source Auto Select Orientation Margins millimeters O Portrait Left 254 Right 25 4 2 Landscape Top l Bottom 25 4 Programs Menu 2 D Inspection Display the 2 D Inspection Program window on page 503 3 D CT Batch Display the 3 D CT Batch Program window on page 487 576 XIMO26 A1 User Manual Tasks Menu Calibrations Clean Up Files Menus Displays the calibration task window on page 548 Displays the clean up files window on page 555 Windows Menu Switch To Supervisor Switch To Operator Show Properties Show Hide Status Log Show Hide Passwords Show Hide System Calibration Help Menu Show Help About Inspect X When this menu entry is selected the password
321. ibration If the checkbox is checked the images are collected over a much shorter period This allows for quicker recalibration but does mean that the recalibration s accuracy may be very slightly less accurate Limit uA Change Limit 14 change Ww When recalibrating an X ray flux calibration as part of an inspection program it is possible to limit the maximum allowable change in uA This can stop the program from getting into an apparently endless loop in trying to recalibrate an X ray flux calibration if the required X ray filtration has been removed If the Limit uA Change checkbox is checked then the program will only allow a maximum change of either 25 of the starting uA or 10uA if this is greater If the checkbox is not checked then the program will vary the uA until the flux calibration is recalibrated or it fails as it cannot get enough brightness when there is no further available uA e g it has reached the X ray source s UA limit Recalibrate X amp Y Shifts Recalibrate 1 amp Y shifts w When the recalibration of an X ray flux calibration fails to calibrate it is possible that the X amp Y shifts on page 49 within the X ray source need to be recalibrated This can be done automatically on systems that support this function XT V 160 and XT V 130 User Manual XTMO26 A1 363 Inspections If the Recalibrate X amp Y shifts checkbox is checked and the X ray flux calibration fails to recalibrate then the
322. ically aligned so that the electron beam passes exactly through the centre of the magnetic lens To determine whether a source is aligned or not use the modulation on page 49 function To alter the physical alignment of the source turn opposite pairs of alignment knobs mechanical or electro mechanical a small amount at a time until the image remains stationary modulating in focus only For most systems this requires an iterative process of making small adjustments closing the cabinet door and checking the alignment and repeating as necessary The best technique is normally to adjust each pair of alignment knobs in turn working towards perfect alignment Training on source alignment is normally given when the X ray system is installed When the physical alignment of the X ray source is as near to perfect as possible the alignment may be fine tuned using the X and Y shift adjustment on page 49 User Manual XTMO26 A1 39 X ray Controller Transmission Target Lens X ray sources controlled by both Xodiac and SR controllers that have a transmission target lens contain a fine aperture close to the target that has three main effects Firstly it strips electrons from the perimeter of the electron beam producing a finer focus spot and an improved image Secondly it limits the power of the electron beam striking the target thus helping to prevent burning of the target The final effect is that it can make it difficult to align the X ray source
323. ication This allows the user to visually inspect the sample to determine if they judge it to be OK ora failure When the user has assessed the sample they may then press either the Pass of Fail button Upon pressing the relevant button the inspection program shall continue onto the next action having noted the user assessment in the results for that action If the Auto Pass Visual Check on page 356 property has been set within the Inspection properties then the Pass button will be automatically pressed after the time out specified in the Inspection properties This can be used when an inspection contains many visual check actions that are normally expected to pass this saves the operator from having to press the Pass button many times Process Image Action This action applies a specified image processing to an acquired image Process Image Image processing Sharpen w Emboss level 336 XIMO26 A1 User Manual Inspections Image Processing Image processing Sharpen wr nn This control specifies the type of image processing that is applied to the acquired image when this action is executed The list of image processing on page 148 that can be applied is shown below e Sharpen Sharpen More smooth Horizontal Edge Detection Vertical Edge Detection Edge Detection Edge Detection More Laplacian Edge Detection Laplacion Edge Detection More Emboss Equalise Background Subtraction Unsharp Masking Triage Enhance
324. ilding When processing an image it may be desirable to only apply the image processing to a portion of the image This is known as the region of interest In order to create manage save and load regions of interest the Inspect X software provides a function to perform these tasks Simple or complex regions of interest may be created 270 XTM026 A1 User Manual Image Processing A region of interest is defined by the areas that are not covered by red colouration The areas that are beneath the red will not be included in the image processing An example of a complex region of interest Dll In the image processing functions that allow for a region of interest press the Region button to define or update the region of interest The region of interest window is displayed Once the region of interest has been loaded or created close the window by pressing its close button in the right hand side of the window s title bar to continue with the image processing Build Region of Interes Object Type Region of Interest BGA Count E Click upon the image to define the path points Click upon the start point to complete the path User Manual XTMO26 A1 271 Image Processing Object Type cueca A region of interest is created or updated by adding an object on the X ray image in the main X ray image window on page 169 and then specifying whether this object region defines an area to be included or excluded from the region o
325. image tool back to its fixed position either close the floating tool window or press the Float Image Tool button again so it is no longer pressed Note that this button and function is only available if the application Enable Floating Windows on page 586 property is set Centre Cross Centre Cross To display a cross at the centre of the X ray image check the Centre Cross check box This will display a cross as below in the centre of the image in the main X ray image window 178 XTM026 A1 User Manual Image Processing To remove the display of the centre cross uncheck the Centre Cross check box The numeric control specifies the width of a circle drawn in the centre of the image If this is set to 0 then no circle will be drawn This function can be useful when aligning features Grid Grid 4 105 It can be helpful to display a grid on the X ray image in the main X ray image window To show a grid check the Grid check box The spacing of the grid in pixels is defined by the numerical entry text box To remove the grid from the X ray image uncheck the Grid check box X ray image with grid User Manual XTMO26 A1 179 Image Processing Image Tone Adjustment The Image Tone function allows the user to modify the tonal quality of the image displayed in the main X ray image window on page 169 This can be useful to accentuate specific features within the X ray image To select the image tone function either p
326. imit Limits 145 0025 241 25 5 241 25 For each of the X Y and Magnification axes the following information is displayed e An Apply User Defined Limits checkbox to control if the axis is more restricted in its movement e Both the system Negative and Positive travel limits are displayed These cannot be altered in this window e The present user Negative and Positive limits for the axis 66 XIMO26 A1 User Manual Manipulator Controller To apply a user defined limit to an axis check the Apply User Defined Limit checkbox for the axis To clear the user defined limits for that axis uncheck the checkbox To set a user defined travel limit for an axis either enter the required limit in the Negative User Limit or Positive User Limit numeric control as required or press the required Set button to set the limit to the axis current position To clear the user defined travel limit enter the relevant system limit value into the numeric control When the limits have been defined or cleared press the OK button to save the data When user defined travel limits have been defined the label next to the Limits button will show that the user limits are being applied User defined limits enabled If user defined limits are applied and Inspect X is re started then these limits are remembered and applied again Measurement It is possible to measure distances using the manipulator The distance read outs give the distance tr
327. indow shall display the progress of the acquisition of the images If only the current imaging mode is set then only 2 images are acquired a white image and a black image Calculate Shading Correction x Shading correction mode Standard correction Use previous sray conditions recommended Manually seb ray current All imaging presets Only acquire white image Multi poink correction Disable shading correction Acquiring reference image 1 of 2 Estimated time to completion 00 00 33 Hours Mins Secs If All Imaging Presets is selected then 2 images are acquired for each imaging preset The example below shows the progress for acquiring images for 3 image presets Shading Correction x Shading correction mode Standard correction Use previous sray conditions recommended Manually seb ray current All imaging presets Only acquire white image Multi point correction Disable shading correction Acquiring reference image 1 of 6 Estimated time to completion 00 02 18 Hours Mins Secs 106 XTM026 A1 User Manual Image Processing For each shading correction a check is made when the images have been acquired If the image contains pixels that are likely to cause a problem and a bad shading correction then the following warning is displayed Warning This image is too bright and has pixels that are saturated This will not give a good shading correction You need to change the X ray conditions so that no pixel is b
328. ine reaches the top of the image then it is discarded The number of lines in the image is set within the Imaging Set Up on page 288 tab in the Image Processing Properties window or by an imaging preset on page 290 An example of a live image is shown below Image lines scroll up screen Live Histogram To view a live X ray image with a live histogram displayed press the Live Histogram button The histogram can be viewed on the Image Tone on page 180 function There are two modes of live histogram available This is selected within the menu when the Option button is pressed a Active Line Th Whole Image If Active Line is selected then the histogram will display the information for the last line acquired only This is constantly updated as new lines are acquired If Whole Image then the histogram will display the information for the whole of the live image This is constantly updated as new lines are acquired Note that the image displayed is the same as in Live on page 152 mode The active line is the bottom most line of the image and older lines are recursively scrolled upwards User Manual XTMO26 A1 153 Image Processing Capture Image To capture an image from the live image in the main X ray image window on page 169 then press the Capture Image button This will capture the image as present in the main X ray image window on page 169 This button may also be used to abort a capture using averagi
329. ined in the Image Processing properties The format of the name of the results file is lt inspection name gt Samples lt sample ID sample ID gt 1Sr xml where lt inspection name gt is the name of the inspection program lt sample ID sample ID gt is the sample serial numbers for each sample within the inspection program In Windows Explorer it looks like this for an inspection program called PE4 The Images folder i Imades PE4 02 07 2007 14 58 00 2 02 07 2007 15 07 18 3 02 07 2007 15 14 47 02 07 2007 15 16 34 4 Folder that contains the ML results file and HTML report Folders that contains the images for the components Data for the sample serial C Package 2 Transforming the XML Results File So that the results file can be viewed in Inspect X or a web browser for example Internet Explorer Firefox etc the XML results file is converted to HTML http www w3 org tr rec html40 using an XSLT http www w3 org tr xsIt stylesheet The XSLT stylesheet is fully customisable and required stylesheet is selected in the Inspection properties It is possible to create an XSLT stylesheet that creates other file formats as the output if required for example a data file that could be input into an SPC statistical process control program Archiving Results Information As all of the data pertaining to a run of an inspection pro
330. ing guidelines may be added to the histogram To add a guideline move the mouse to the right or left edge of the histogram The cursor will change to show that a guideline may be added Click with the left mouse button and whilst holding it down drag the guideline to the grey level required It is possible to add up to 4 red guidelines and 4 green guidelines to the histogram Red guidelines are dragged out from the left side of the histogram and green guidelines are dragged out from the right side When a guideline has been set it is possible to move it by clicking upon the required guideline with the left mouse button and dragging it to the new grey level To remove a guideline drag the required line to the left edge of the histogram for red guidelines and to the right edge for green guidelines When guidelines have been set on a histogram they will appear on all histograms displayed within other image processing functions This enables the tracking of specific grey levels 186 XIMO26 A1 User Manual Image Processing Negate Tone Curve cs It is possible to view the image and tone curve as a negative This is helpful for users that prefer negative X ray images To produce a negative image press the Negate button The button will stay depressed and the image and tone curve will be negated To reset back to a positive image press the Negate button again and it will be released This function may be used to negate any tone curve
331. ing Products http www accessdata fda gov scripts cdrh cfdocs cfcfr cfrsearch cfm fr 1020 40 A XIMO26 A1 User Manual 3 Getting Started This section describes how to turn on the system on page 5 login to Windows on page 5 launch the Inspect X software on page 6 and to enter a password on page 8 to initialise the software Turning on the System Inspect X requires that all of the X ray generating hardware is powered up before the Inspect X software is started This includes all of the X ray generating sub systems imaging and manipulator controllers The supplied computer usually includes an automatic power up feature Powering on the X ray inspection system will power on all the required sub systems If this does not work on your system then locate the power switch on the computer and press it to switch on the computer Logging On Having turned on the computer which will take a few minutes to boot up you may be prompted to press the Ctrl Alt amp Del keys to display the Windows Log On dialog Unless specifically requested by the customer computers are normally shipped with no password set Some Windows machines are usually configured not to display the log on screen but rather to boot directly into Inspect X If a password has been set enter that password in the Log On dialog and then press OK Note that passwords are case sensitive i e MYPASSWORD is not the same as mypassword Systems are usually shipped so t
332. ing look up table press the Add button and select the required file that must have a bht file extension Note that beam hardening look up tables are available for future use Remove Preset or Look Up Table To remove a preset or a look up table select the required item in the list and then press the Delete button A prompt is displayed to confirm the deletion have CT Profiles or 3 D CT Batch programs that reference this preset When deleting preset or look up tables you need to be aware that you may A Deletion of the preset will cause problems Centre of Rotation Acquisition Reconstruction Centre of Rotation Fast CT Calibration Panel Scan Calibration Allow offset centre of rotation Centre of rotation calibration is required if the imaging device cannot be aligned to make the CT rotational axis perfectly square to the s ray image This is only required For systems with removable CT arms Calibration required 1 Insert calibration rod into CT rotate axis 2 Move the manipulator so that its width nearly Fills the image Check that the centre of the rod is being viewed 3 On a sT Y 160 check that the correct CT arm position has been selected on the Sample Setup panel 4 Press the Calibrate button The correct calculation of centre of rotation of the sample within the image i e the axis about which the CT rotate axis is rotating the sample is very important to ensuring that the reconstructed
333. ing point volume 16 bit TIFF images 8 bit volume Volume input conversion None O Automatic These properties control the type of data output when 3 D CT reconstruction is performed This is only relevant if the Reconstruct on page 424 checkbox is checked and the 3 D CT data set is to be reconstructed by CT Agent Volume Format Floating point volume 16 bit TIFF images 6 bit volume There are 3 types of volume data that can be created a 32 bit floating point volume an 8 bit unsigned integer volume and a 16 bit TIFF image stack The type of output data is selected by the Volume Format radio buttons For each volume format there are other options that control how the data is scaled within the data files and and within the volume rendering program when it is displayed User Manual XTMO26 A1 431 3 D CT Acquisition 32 Bit Floating Point Volume If the volume format selected is Floating Point Volume then there are two options to select to control how the volume rendering program displays the data Volume input conversion None Automatic If None is selected then no scaling conversion will occur when the volume rendering program loads the data The volume rendering program loads the data as 32 bit floating point numbers lf Automatic scaling is selected then there are two options on how the data is scaled when the volume rendering program loads the data Note that when this option is sele
334. inimum Grey Level in the image the Average Grey Level in the image and the Standard Deviation of the Grey Levels in the image Grey Level 12600 Pixels 120 Max 65260 Min 1536 Average 22650 Std Dey 76666 0 So that specific grey levels may be marked for future use or tracking guidelines may be added to the histogram To add a guideline move the mouse to the right or left edge of the histogram The cursor will change to show that a guideline may be added Click with the left mouse button and whilst holding it down drag the guideline to the grey level required It is possible to add up to 4 red guidelines and 4 green guidelines to the histogram Red guidelines are dragged out from the left side of the histogram and green guidelines are dragged out from the right side When a guideline has been set it is possible to move it by clicking upon the required guideline with the left mouse button and dragging it to the new grey level To remove a guideline drag the required line to the left edge of the histogram for red guidelines and to the right edge for green guidelines When guidelines have been set on a histogram they will appear on all histograms displayed within other image processing functions This enables the tracking of specific grey levels 192 XIMO26 A1 User Manual Image Processing Pseudo Colour Image The Pseudo Colour Image function allows the user to display an image in which some or all of the grey scale values have been r
335. input information To view the notes for the current image press the Image Notes button This will display the Image Notes dialog Image Notes Measured horizontal distance is 27 68 mm Measured vertical distance is 15 73 mm Measured distance is 31 84 mm The list shows all the image notes attached to the image To save the changes to the image notes press the OK button To abort the changes to the image notes press the Cancel button To delete one or more records select them in the list and then press the Delete button 166 XIMO26 A1 User Manual Image Processing To add a new record press the Add button and the Add Image Note dialog will be displayed Add Image Note Image Mote to Add Extra Information When the new note has been entered press the OK button To cancel adding a new note press the Cancel button Shading Correction The Shading Correction button opens the Shading Correction on page 102 window This window controls the shading correction being used Properties The Properties Window on page 583 can be displayed by pressing the Properties button Image Information at ae Ti az I ize A When the mouse tracks across the X ray image in the main X ray image window on page 169 this panel displays the X and Y coordinates to the image pixel under the mouse relative to the top left hand corner of the image and the grey level of the pixel User Manual XTMO26 A1 16
336. ion Dilation is a process that contracts the black and dark detail within the image This effectively makes the white and light sections of the image increase in size but do not necessarily keep their exact shape Applying an equal number of dilations and then erosions will remove small black and dark detail from the image Grey Dilation To apply dilation to the image press the Grey Dilation button This process can be applied any number of times Each time the black and dark areas of the image will contract in size Image before dilation Image after dilation User Manual XTMO26 A1 227 Image Processing Remove Holes from Dark Areas Remove Holes From Dark Areas 10 7 Apply To remove light holes and small light coloured features from the dark areas within the image use these controls It will apply a number of erosions followed by an equal number of dilations Enter the required number of operations and then press the Apply button If the effect is not as required then press the Undo Image Processing on page 149 button on the Image Processing Tool Bar and try again with a different number Remove Holes from Light Areas Remove Holes From Light Areas 10 i Apply To remove dark holes and small dark coloured features from the light areas within the image use these controls It will apply a number of dilations followed by an equal number of erosions Enter the required number of operations and then press the Ap
337. ion of the material theshold to use can only be done using either minimum or maximum wall widths Choose Which measurement to use during the automatic calculation Calculate using minimum thickness Minium Calculate using maxsimum thickness Mazimum The automatic optimisation can only performed for either minimum or maximum thickness in any one pass Select the required thickness by pressing either the Minimum or Maximum button During the optimisation the Material Grey Level numeric will be updated and the Calculation Errors will be re calculated Minimum measurement error 0 1679956 Maximum measurement error Lo This will continue until the relevant calculation error has been minimised Once the Material Grey Level has been set then the Adaptive checkbox may be checked to instruct the measurement algorithm to use local adaptive thresholding User Manual XTMO26 A1 519 2 D Inspections Adaptive Thresholding As the grey level that defines the edge of the turbine blade can vary around the blade it is often necessary to use local adaptive thresholding Local adaptive thresholding uses the global edge threshold calculated using the grey levels for material and background and the edge threshold as a seed to find the true edge in a local search algorithm The size of the area in which the edge is found at every pixel within the slice image is defined by the Search Width numeric To switch on local adaptive thresholding check the
338. ion pins or a fixture By running the Fiducial Calibration action then the difference in position is corrected and any new Acquire Image actions will have their manipulator position correctly calculated with respect to the sample Note that if there are more than one positional calibration action within the inspection program then a message will be displayed advising that each positional calibration action needs to be executed as appropriate For example consider an inspection program contains 3 samples each of which have a Fiducial Calibration action which is recommended The Fiducial Calibration action for a sample must be executed before adding any further Acquire Image or Visual Check actions to any component within that sample It must also have to be executed if editing the position of any Acquire Image or Visual Check action within any component of that sample User Manual XTMO26 A1 385 How to Get More Out of Inspection Programs Adding Samples Components and Actions Actions can be added to an existing inspection program in exactly the same way as when the inspection program was created Actions may be added using Recorded Actions on page 373 or may be added manually on page 377 Note that there are some actions on page 377 that can only be added to an inspection program manually Samples and components can only be added manually to an inspection program This is done by pressing the appropriate New button on the edit inspec
339. is run when the filament has been changed The function sets up the X and Y shifts calculates the optimal filament demand values for all X ray conditions and then resets the filament lifetime counter When the Calibrate button is pressed then Filament Set Up window is displayed This window guides you through the process which consists of the following e Waiting for the vacuum to reach its set point e Auto conditioning the source to its maximum kV e Setting up the X and Y shifts Calculating the optimal filament demand settings for all X ray conditions Filament Set Up 1 Make sure that there is no sample in view 2 Press the Start button to calibrate the Filament Before starting the process there must be no sample in view To start the Calibration process press the Start button Filament Set Up 1 Make sure that there is no sample in view 2 Press che Start button to calibrate the Filament Waiting for Yacuum User Manual XTMO26 A1 45 X ray Controller The first process is to wait for the vacuum within the X ray source to reach its set point Filament Set Up 1 Make sure that there is no sample in view 2 Press the Start button to calibrate the Filament PLL ELE 4uto conditioning Once this has been achieved then the X ray source is auto conditioned to its maximum kV and held at this kV for one minute If the X ray source breaks down at any point then the process is repeated until it has been
340. is to be entered in the top most Serial Number text box Sample 2 is the next sample clockwise around the turntable from sample 1 Its serial number is entered into the next Serial Number text box Subsequent samples clockwise are entered into subsequent text boxes The checkbox next to the Serial Number text box must be checked if the sample is present in the sample holder on the turntable If a sample position does not contain a sample then uncheck the check box next to the relevant Serial Number text box When the program is run it will only analyse those positions that are marked as containing samples Running the Program 2D Inspection Operator a Run To run the program after entering the serial numbers of the samples press the Run button If any of the shading corrections within the 2 D inspection program require to be updated then the following prompt will be displayed If they are all still valid then this message will not be displayed Information 1 Shading references used within this program require to be updated Do you Wish to update these and run the program A prompt will be displayed to ensure that the correct X ray filtration material is inserted Information i Please insert the ray Filter of 4 000 mm of Copper 938 XIMO26 A1 User Manual 2 D Inspections If any of the serial numbers entered have already been inspected then the following warning prompt will be displayed Warnin
341. isplay a preview of the image to be saved FA Pressing this button will cause the Save File dialog to decrease its width to hide the display of the preview image Save s Save in 102 x O 2 egan i peti 6 6 File name save My Network Save as type TIFF Files tif _ Cancel Pixel depth O 8 bit 16 bit Image Greyscale smaller file Greyscale with Tone smaller file 1 94 MB Colour larger file My Recent Documents kb o o A Y 3 5 When the preview image is displayed then a left mouse click upon this preview image will zoom in on the image centred upon the point where the mouse click is made To reset the zoom so that the whole image is displayed left mouse click upon the preview image again The preview image pane also displays an estimate for the size of the image file that will be created User Manual XTMO26 A1 161 Image Processing The preview image is of particular importance when saving images to JPEG or JPEG2000 files as the effect of the image compression can be previewed before saving the file to disk Pixel Depth Pixel depth 2 8 bit 0516 bit Some image file formats can be saved as either 8 or 16 bits per pixel for monochrome images without colour or 24 or 48 bits per pixel for colour images with colour and some can only be saved in 8 bits for monochrome and 24 bits for colour ima
342. ist in this control The columns list the name of the inspection used to create the report and the date and time of completion of the run When a report is selected the data for this report can be loaded by pressing the Open button Open Report iF To open the report selected in the Reports List then press the Open button The data for the entered serial number and selected report will be loaded for review 962 XIMO26 A1 User Manual Validation Station Component Review The results data for the selected sample and report is displayed in the Component Results table Results Run by operator 13259998 1 Sample status FAIL Components Measurement Images Threshold Operator ID Run by operator 13259998 1 This displays the ID of the operator that ran the inspection program that created the report If entry of operator IDs is not configured in the application properties on page 585 then this will contain an empty string User Manual XTMO26 A1 563 Validation Station Sample Status Sample status FAIL The status of the sample being reviewed is displayed as either PASS or FAIL Components List Package 2 Measurement The components that were examined upon the selected sample are listed in this box The status of each component is displayed When a component is selected in this list then the list of images available for review is listed in the images list on page 564 Notes on pa
343. ition 435 800 men Set Datum Reset Datum All measurements within the 2 D CT acquisition user interface including the scatter free radiograph function are relative to a datum point Normally this datum point is defined as a point relative to the sample Alternatively a fixed point upon the manipulator may be used The Y axis position such that the datum point is in line with the X ray fan beam may be set by entering the value into the numeric control Alternatively it may be set by moving the manipulator Y axis and viewing a live image to identify when the datum point is within the X ray fan beam Then pressing the Set button will record the manipulator s Y axis position as the datum point The Reset Datum point when pressed will set the datum point to be that specified in the manipulator properties on page 79 User Manual XTMO26 A1 467 2 D CT Acquisition Scatter Free Radiograph Scatter Free Radiograph Height abowe datum Top 90 00 mm Set Bottom 10 00 mm Set Acquire Load Top 1100 00 mm Set Bottom 10 00 mm Set ll The manipulator Y axis top and bottom positions for the scatter free radiograph are relative to the datum point defined on page 467 The positions may be entered into the numeric controls if the positions can be physically measured Alternatively it may be set by moving the manipulator Y axis and viewing a live image to identify when the required top or bottom point is within the X ray fan
344. itive limit Limits 195 005 241 25 241 25 For each of the X Y and Magnification axes the following information is displayed e An Apply User Defined Limits checkbox to control if the axis is more restricted in its movement e Both the system Negative and Positive travel limits are displayed These cannot be altered in this window e The present user Negative and Positive limits for the axis To apply a user defined limit to an axis check the Apply User Defined Limit checkbox for the axis To clear the user defined limits for that axis uncheck the checkbox To set a user defined travel limit for an axis either enter the required limit in the Negative User Limit or Positive User Limit numeric control as required or press the required Set button to set the limit to the axis current position To clear the user defined travel limit enter the relevant system limit value into the numeric control When the limits have been defined or cleared press the OK button to save the data 74 XIMO26 A1 User Manual Manipulator Controller When user defined travel limits have been defined the label next to the Limits button will show that the user limits are being applied User defined limits enabled If user defined limits are applied and Inspect X is re started then these limits are remembered and applied again Measurement It is possible to measure distances using the manipulator The distance read outs give the di
345. ke sure that the voltage is high enough such that the image is noticeably brighter even through the longest path length of the specimen than when the X rays are switched off Rotate your specimen so that it presents the darkest parts of the image and measure the grey level at this point The grey level at this point should theoretically be greater than 15 of the maximum possible signal above the black level when X rays are off For example if your black level is grey level 1500 and your white level is at grey level 62500 then the darkest part of your sample should not be less than 1500 0 15 62500 1500 10650 A good rule of thumb is to make sure that the minimum grey level does not fall below 10000 Below this level you will see artefacts below 5000 these artefacts will dominate your data Increasing the X ray voltage also reduces the contrast between low density materials and the background noise level Do not increase the X ray voltage so much that you wash out detail in these areas If due to having several different materials in your specimen you cannot achieve both these criteria then you can try using a filter on page 446 which will reduce the contrast in the images Do not think that you will get the best quality CT results if you have really high contrast projection images To some extent the opposite is true Increasing the X ray current uA simply increases the number of X rays passing through all parts of your specim
346. l for example using 720 projections for 512 cubed voxel on page 590 volumes or 360 for 256 cubed voxel volumes For each projection a number of frames can be averaged This is set up by selecting the required number of frames on the Frames per Projection drop down list The choice of the number of frames is often influenced by the imaging device parameters on page 288 exposure gain etc Sample Position Check that the sample is penetrated at all angles by pressing the Rotate button CT data sets are acquired with the centre of rotation in the centre of the image Press the Move button Eo centre the sample The position of the sample in the manipulator needs to be set up so that the required features to be analysed stay in view in every projection In order to set up this the sample needs to be mounted on the relevant sample holder and then placed at the centre of rotation Every CT data set on page 589 is collected with the manipulator positioned so that the centre of rotation of the CT rotate axis is as close to the centre of the X ray image The recommended process to set up a sample s position is the following Mount the sample and move it into view 2 Move the manipulator s magnification axis so that the required features of the sample are in view 3 Press the Move button This will move the manipulator so that the CT rotate axis is in the centre of the image If the some of the required features in the sample cannot be
347. l Calibration action The X ray Flux Calibration actions are before the Fiducial Calibration action as the later depends upon a calibrated X ray flux calibration Positional Tolerances When acquiring images for analysis it is recommended that some space is left between the features in the image that are to be analysed and the edge of the image This is to allow for very slight positional variations even when using a fiducial calibration correction An example of a view of a BGA on page 589 is shown below There is very little space between the BGA balls and the edge of the image If subsequent samples analysed have a small positional variation then it is quite possible for the BGA balls to be cropped by the edge of the image 00000000 o BGA image that leaves no positional tolerance User Manual XTMO26 A1 379 How to Get More Out of Inspection Programs CXXXIII 0 0 00000 COOCOO ec o ecccccoe c BGA image that allows for positional variation The image above shows the same view of the BGA with space around the BGA balls that allows for small positional variation between samples Step and Repeat When creating an inspection program multiple samples components or features within the sample being inspected are analysed Often these are repeating patterns of the same components for example Rather than having to input all the actions to analyse each component or sample it is possible to
348. last X ray settings are no longer ideal If this is the case then it is recommended that the automatic setting of the uA value is used If manual setting of the X ray uA value is selected and only the shading correction for the present imaging mode is to be acquired or updated when the Acquire button is pressed the present X ray kV and uA values are used If manual setting of the X ray uA value is selected and All Imaging Presets has been selected during the acquisition of the images when a white shading correction reference image is to be acquired then the following prompt will be displayed Shading Correction Shading correction mode Set X ray conditions Estimated time to completion 00 01 52 Hours Mins Secs When this is displayed use the Live Histogram on page 136 function to aid the setting the X ray UA so that the image is near saturation but no pixel is actually saturated 65535 It is recommended to have the leading edge of histogram to be less than 64000 In the case of inspection systems fitted with a Varian Paxscan flat panel the maximum usable grey level is lower than 64000 It is typically about 58000 but varies from device to device Above this value an effect that appears as tram lines appears on the image This is an inherent feature of the internal design of these flat panels User Manual XTMO26 A1 105 Image Processing When the Acquire button is pressed then the w
349. lator table This is necessary to ensure that the point of interest on the sample stays in the field of view when orbiting If the point of interest on the sample is directly on the manipulator table then 0 0 should be entered If the sample s height above the table is known then enter the value into the Sample Depth edit box The units of measurement are defined by the Measurement on page 199 image processing tool The units will either be millimetres or inches User Defined Limits User defined limits not enabled On horizontal inspection systems it is possible to define limits to the travel on the X Y and Magnification axes This function is not available on the XT V 160 and XT V 130 systems The purpose of being able to define user limits which restrict the movement of these axes more than the system allows is useful when large samples are being inspected The label next to the Limits button shows the present status of user limits being applied User Manual XTMO26 A1 73 Manipulator Controller To define or clear user limits press the Limits button The Set Axis Limits window will be displayed Set Axis Limits Apply user defined limits Negative limit User limits Positive limit Limits 269 00 05 00 Apply user defined limits Negative limit User limits Positive limit Limits 285 D00 265 00 5 150 00 285 00 Set Sel Magnification Axis Apply user defined limits Megatiwe limit User limits Pos
350. layed the tilt axis will be moved so that the angle of tilt is increased User Manual XTMO26 A1 175 Image Processing T When this cursor is displayed the tilt axis will be moved so that the angle of tilt is decreased When this cursor is displayed the rotate axis will be moved so that the angle of rotation is increased and the sample is rotated in a clockwise direction d When this cursor is displayed the rotate axis will be moved so that the angle of rotation is decreased and the sample is rotated in a anti clockwise direction Image Processing Functions Inspect X contains a number of image processing functions Some of these functions may only be used for captured images and some may be used on live as well as captured images To select the image processing function press the required button The button will stay depressed to show which function is selected Note that not all the image processing functions may be listed on the user interface The supervisor may select which are displayed from within the image processing properties on page 283 Measure Range Erode Dilate Threshalding BGA Analysis BGA Ball Void Pad Array Void Image Tone Binarise Pseudo Colour BG Subtraction Measure Annotation a Centre Cross Grid 50 E 176 XIMO26 A1 User Manual Image Processing Image Tool Selection Image Function Available for Live Available for Images Captured Images Image Tone
351. le corrections These fall into 3 categories e Fixed presets that are available in CT Pro 2D These are called 1 2 6 e Custom presets e Beam Hardening Look Up tables The fixed presets cannot be removed The custom presets and look up tables may be added or removed using these controls Add Custom Preset To add a new custom preset press the Add button and select the required CT Reconstruction Parameter file xtek2dct This will be the parameter file edited by CT Pro 2D that contains the required custom beam hardening coefficient values When the file is selected then a new entry is added to the drop down list and is named the same name as the reconstruction parameter file User Manual XTMO26 A1 485 2 D CT Acquisition Add Look Up Table A beam hardening look up table is a text file that contains corrected attenuation for each grey level within the sinograms Therefore it will have 65536 entries each line corresponding to a grey level from O as the first line and 65535 as the last line Each line will contain a floating point number in text format that defines the corrected attenuation for that grey level Note that the attenuation must be within the range 0 3 402823 X 1038 To add a bream hardening look up table press the Add button and select the required file that must have a bht file extension Note that beam hardening look up tables are available for future use Remove Preset or Look Up Table To remove a preset
352. le to be failed upon the first failure Run Failure Actions When a failure is detected when an action is run the an On Failure set of actions will be executed if this checkbox is checked If a calibration action e g fiducial calibration or X ray flux calibration action fails then the On Failure actions are not run as the failure of a calibration action is deemed to be fatal General On Failure 587e Image Action Save Image Control Automatically add save image actions Save X ray image w Save colour image Add After Action BG4 Analysis v Process Image BG4 void Analysis Tone Edit Pad Array Void Binarise Image Package Woid w Pseudo Colour Image Threshold Background Image Subtraction Measurement w Erode Dilate Visual Check 360 XIMO26 A1 User Manual Inspections Save Image Action Properties General On Failure Save Image Action Save Image Control Automatically add save image actions Save X ray image w Save colour image Add After Action BGA Analysis w Process Image BGA Void Analysis Tone Edit Pad Array void Binarise Image Package Void Pseudo Colour Image Threshold Background Image Subtraction Measurement w Erode Dilate Visual Check These properties control how Save Image actions are automatically added to an inspection program when adding recorded actions to the program Automatically Add Save Image Actions When recorded actions are
353. les of type All Image Files tif bmp jpo y Load image profile if available The standard controls of the Windows Open File dialog are not documented here but are available within the Windows help information The types of image files that can be displayed and opened within Inspect X is controlled by the Files of Type drop down list All Image Files tf bmp jpg TIF Files tif Bitmap Files e bmp User Manual XTMO26 A1 141 Image Processing If an image file is highlighted in the list of available images by clicking once on the file s icon or name a preview of this image can be obtained by pressing the Preview gt gt button Preview gt Pressing this button will cause the Open File dialog to increase its width to display a preview of the selected file in the file list Pressing this button will cause the Open File dialog to decrease its width to hide the display of the preview image A Look in IC2 ex O2 EE f PA cSP Analysis 0002 jpg 4 2 FA CSP Analysis jpg My Recent PA CSP Void Analysis jpg Documents Desktop i D My Documents My Computer a File name CSP Analysis ipa My Network Files of type All Image Files tif bmp ipal x Load image profile if available 900 x 900 pixels When the preview image is displayed then a left mouse click upon this preview image will zoom in on the image centred upon the point
354. less than this number of projections will lead to a certain amount of linear interpolation between voxels at the perimeter of the reconstruction volume during the reconstruction process Using more than this number will not add more detail to the reconstruction but will increase the signal to noise in the final volume in the same way that increasing the exposure does Note that N is not necessarily the number of pixels across the detector but only across the sample Selecting X ray Filtration Filters in front of the X ray source are useful to reduce the contrast between the transmitted beam where there is no sample and the beam which has passed through a long path length of dense material They reduce the brightness variations in the image so that the detector which has a limited dynamic range can still digitise all of the image without having areas of too bright white saturated or black un penetrated There are much more complex reasons why putting a filter in front of your X ray beam will allow you to obtain much better CT results When Should I Use an X ray Filter and What Does it Do When you choose a voltage of say 100kV you do not get all your X rays with 100keV of energy The voltage you choose is the voltage which accelerates the electrons which come from the filament down on to the target within the X ray source It is the sudden deceleration of these electrons when they hit the target that produces X rays Since the elec
355. lgorithm uses to find the edges Material Grey Level povreetnrcrtewceeeeweastenetestetersemesestmeccsemecsctmesseemsessnenssemecssamansanmenenemenncamanseassssss Edge Threshold i Threshold for Edge Background Grey Level Pixels The edges of are found by calculating the difference between the background grey level and the material grey level The Threshold for Edge specifies the percentage of this difference that is added to the background grey level to find the true edge The Threshold for Edge defaults to 50 and it is recommended that this figure is used Calibrating the Thresholds After defining the measurements then the thresholds need to be calibrated This can be done by measuring a sample accurately outside the X ray inspection system and then setting up the range measurements so that the measured minimum and or maximum measurements are known These values can be entered for the required regions and the thresholds can then calibrated Calibration is done by altering the values in the Parameters section until the Calculation Errors are minimised The parameters may be altered manually or may be automatically optimised To automatically optimise the parameters then press the Auto Set button next to the Material Grey Level numeric If the measurements defined have minimum and maximum thicknesses defined then the following window will be displayed Calculation Type Automatic calculation of the material th
356. lished between the 2 D CT profile in the 2 D inspection program and the one loaded into the 2 D CT Acquisition function This link ensures that changes made within the 2 D CT Acquisition function are copied into the 2 D CT profile in the 2 D inspection program The link between the profiles is only broken either when another 2 D CT profile is edited from within the 2 D inspection program or the 2 D inspection program is closed for edit by pressing the Done button To alter the order in which the 2 D CT profiles are performed within the program then select the CT profile to move and then either press the Up button to move it up in the list or the Down button to move it down in the list 522 XIMO26 A1 User Manual 2 D Inspections Number of Samples The number of samples inspected each time the program is run is set up in the Samples numeric box The 2 D inspection program is set up to find the samples equally spaced in angle about 360 degrees The sample holder must be designed to hold each sample accurately spaced within 360 degrees The accuracy of the holder and how it holds the samples will effect the quality of the measurements made by the program If there is minor angular differences to the equal spacing then this can be calibrated by pressing the Angles button This opens the 2 D Inspection Program Calibration window 2 D Inspection Program Calibration Samples Angular Positions The samples are ordered as Follows Sample 1
357. ll be used to calculate the centre of rotation If the centre of rotation slices are to be specified manually then uncheck the Use Top and Bottom Slices check box Then a green guideline will be displayed on the X ray image This is used to set the required slices User Manual XTMO26 A1 473 2 D CT Acquisition The green guideline may be adjusted to the required slice and then press either the Centre of Rotation Top Slice Set button or the Centre of Rotation Bottom Slice Set button as appropriate 474 XIMO26 A1 User Manual 2 D CT Acquisition Reconstruction Setup The reconstruction set up stage defines the parameters on how to reconstruct the sinograms see topic Sinogram on page 590 into a reconstructed image stack see topic Reconstructed Image Stack on page 590 Reconstruction Setup Reconstruction quality 100 Beam hardening 3 Moise reduction i ne Interpolation Median filtering Mone O 3x1 5x1 Maximum attenuation 1 0000 imm Area of Interest To define the area of interest press the Acquire button i 3 i quire to acquire the images Specify the required area by changing the crop boxes on the images Reconstruction Size Volume size voxels Voxel size ror Reconstructed voxel size ror Disk space For projections ME Disk space For volume GE Memory required ta open volume GE User Manual XTMO26 A1 475 2 D CT Acquisition Reconstruction Quality Reconstruction quality
358. lly If the slices in the stack are to be spaced with at an equal spacing to the resolution of the reconstructed slices then check the Cubic check box If not then specify the slice spacing by entering a value in the Slice Spacing numeric control To add the slice stack to the CT data set press the Add button Edit an Existing Slice Stack To edit an existing slice stack select the required stack in the list The controls below the list are updated with the details of the slice stack The slice stack selected is highlighted on the X ray image window in red Changing any of the values in the Name Bottom Position Slice Stack Slice Spacing or Cubic controls will update the slice stack Delete a Slice Stack To delete an existing slice stack from the CT data set select the required slice stack in the list and then press the Delete button Note that the slice stack selected in the list is highlighted in red on the X ray image 472 XIMO26 A1 User Manual 2 D CT Acquisition Slices for Centre of Rotation Calculation but not for Translate Rotate 2 D CT For the latter the Centre of Rotation f The calculation of the centre of rotation is required for Standard 2 D CT controls are not displayed Calculate automatically w The centre of rotation for the CT data set can be calculated automatically The correct calculation of centre of rotation within the image i e th
359. low shows an inspection program that has two samples each sample having two components Sample 2 The structure of an example inspection Repeatability One of the main reasons for creating an inspection program is the ability to repeatedly inspect samples with the confidence that they are being analysed using controlled conditions By doing so it is possible to re inspect a sample after a period of time and to expect to get the same results There are two functions within the Inspect X software to facilitate repeatability X ray flux calibration and fiducial calibration It is highly recommended that you use these functions within Inspect X when programming inspection programs lt is possible to create and run inspection programs that use neither type of calibrations These programs will not have repeatability in the long term 368 XIMO26 A1 User Manual How to Get More Out of Inspection Programs X ray Flux Calibration X ray flux calibration is used to control the X ray flux on page 590 when acquiring an image to analyse The calibration controls the image brightness X ray flux calibrations are created and maintain within the X ray Flux Calibrations on page 28 window When an inspection program is run it checks to see if the X ray flux calibrations need to be recalibrated The length of time between calibrations is specified in the X ray controller properties on page 34 If any of the X ray flux calibrations require to be
360. lues against the values returned by the X ray controller These controls define the stability tolerances for the allowable differences in kV and uA between the demanded and returned values For example if the kV tolerance is set to 2 then the kV is determined to be stable if the difference between the returned kV and the demanded kV do not vary by more than 2 of the demanded value User Manual XTM026 A1 33 X ray Controller Minimum Usable uA Minimum usuable uA 4 u The Minimum Usable uA value is used within the Multi Point Shading Correction on page 107 function For systems fitted with an SR X ray controller there will be a value for the uA below which the high voltage generator cannot generate the required X ray power This is apparent by switching the X rays on and setting the uA and allowing the generator time to try to generate the required uA For values below the minimum usable uA the actual uA value will normally be 0 At the minimum usable uA the X ray controller will generate the required X ray power and the actual uA will be the same as the demanded uA X ray Flux Calibration Validity Time Time walid 24 hours X ray flux calibrations on page 28 need to be recalibrated on a regular basis to ensure consistency of X ray flux generated when using the calibration X ray flux calibrations are usually used within inspection programs on page 295 In previous versions of Inspect X the X ray flux calibra
361. ly adjusting the manipulator speed The speed of the tilt and rotate axes is unchanged Image Sample Depth Sample Depth 10 00 mm This control sets the difference in depth between the feature in the sample being viewed and the manipulator magnification axis In the case of a vertical system fitted with a table then this is the height of the feature in the sample above the table In the case of a horizontal system then this numeric defines the distance between the feature in the sample and the rotation axis If the feature is closer to the X ray source than the rotation axis then a negative number needs to be entered If the feature is closer to the imaging than the rotation axis then a positive number needs to be entered into the numeric 72 XIMO26 A1 User Manual Manipulator Controller The sample depth is important as the magnification of the feature within the sample is defined by the position of the magnification axis of the manipulator and this value When measuring samples the measurement of features will only be correct if the image sample depth has been set correctly for that feature within the sample On the XT V 160 inspection system the sample depth also is needed to be set correctly to ensure the correct behaviour of the orbit function When an orbit is performed or the sample is rotated using the rotate joystick on the inspection system it is important to have previously input the sample s height above the manipu
362. m Hardening Data Set Name Automatically update data set name x ray Control Maximum allowable consecutive raw trips i Reset X ray trip count if no trip within 5 minutes Delay period after ray trip 10 seconds Data Set Name Upon completion of the acquisition of a CT data set the Data Set Name on page 480 will be automatically updated if the Automatically Update Data Set Name check box is checked If it is unchecked then the data set name will not be altered 482 XIMO26 A1 User Manual 2 D CT Acquisition X ray Control If during the acquisition of a CT data set the X rays trip off for any reason then it is possible to re attempt the relevant part of the CT acquisition If however the X rays keep on tripping off then there is a problem and the CT data set acquisition will need to be aborted to avoid possible damage to the X ray source The X ray trip control function will allow a certain number of X ray trips within a specified period If more than this occur then the CT data acquisition is aborted The period of time used to monitor the X ray source is specified by the Reset X ray Trip Count if No Trip Within numeric The allowable number of trips within this period is specified by the Maximum Allowable Consecutive X ray Trips numeric If less X ray trips occurs within the time period then the X ray trip count will be reset to zero The effect of this function is that there is a sliding time window during whic
363. mage as this is likely to cause non optimal shading correction 120 XTM026 A1 User Manual Image Processing Non Linear Pixel Identification Non Linear Pixel Identification Find non linear pixels w Pixel is bad if max or min outside 3 02 standard deviations Pixel is bad if standard deviation is outside 3 0 average standard deviations Some flat panels have pixels that are not linear in response over time These pixels can be identified by checking the Find non linear pixels checkbox The maximum value minimum value and standard deviation of each pixel will have been calculated during the frame averaging when the images were acquired Altering the values of the numeric controls will identify these bad pixels It is recommended to acquire the images over a long period of time if non linear pixels are to be identified Reducing the values in the numeric controls will cause more pixels to be identified as bad The pixel identified as bad are stained yellow on the X ray image Note that some of the pixels identified as bad by the normal bad pixel identification function will be marked as bad by this function This is to be expected User Manual XTMO26 A1 121 Image Processing Manual Bad Pixel Identification It is possible that sometimes not all bad pixels can be marked as bad by the automatic functions The Manual Bad Pixel Identification function allows the manual setting of bad pixels To enter this mode press
364. mages These corrections are applied to the live X ray image that is seen in the main X ray image window on page 169 and any image saved by Inspect X There are three corrections that may be applied to the X ray image e Geometric distortion correction on page 101 e Shading correction on page 101 e Bad pixel correction on page 101 The corrections that need to be applied to depend upon the imaging device within the X ray inspection system Geometric Distortion Correction This correction is applied to the images acquired using an image intensifier and camera The geometric distortion within such an imaging system is due to the curved internal face of the image intensifier and to a lesser extent the optical lens on the camera The correction is calculated within the factory and does not need to be changed by the users of the X ray inspection system after the system has been installed It may be updated by a Nikon Metrology accredited engineer if so required Shading Correction Shading correction on page 102 is applied to all images on all X ray inspection systems This correction compensates for the variation in response of the imaging device s pixels when illuminated with a constant set of X ray flux The variation of the response is due to two factors drop off of X ray flux due to the inverse square law and small variations internally within the imaging device s pixel array Bad Pixel Correction Bad pixel correction on page 1
365. mended time to hold the X ray source at the maximum kV during auto conditioning The longer it is held there the more stable the X ray source will be at higher kV values Information G When this button is pressed then the X ray controller information window on page 28 will be displayed X ray Flux Calibration pa When the X ray Flux Calibration button is pressed then the X ray Flux Calibrations on page 28 window is opened This enables the creation and maintenance of X ray flux calibrations X ray Flux Calibrations In order to provide repeatability of inspections it will be necessary to calibrate the X ray flux on page 590 The reason for this type of calibration is to maintain the uniformity of brightness of the acquired images when using the same X ray conditions As the filament in the X ray source ages the brightness of the image can decrease and this can cause problems when analysing images within an inspection program This can be compensated by adjusting the X ray current on page 20 so that the same brightness is achieved in the image The process of calibration the X ray flux is handled by an X ray flux calibration The X ray Flux Calibrations window allows the user to maintain these calibrations This window is opened by pressing the X ray Flux Calibration button on the X ray controller user interface AL X ray Flux Calibrations Flux calibrations 490 51 28 XIMO26 A1 User Manual X ray Controller Creati
366. meters se Get Background Image Subtraction Parameters Pararmeters Get To get the current background image subtraction on page 196 parameters press the Get Parameters button This makes a copy of the current parameters within the background image subtraction edit control Measurement Action This action applies to an acquired image subtraction using a specified background image Measurement Get parameters et Measurement mode must be changed to either Edge Detect Line or Edge Detect Arc Get Measurement Parameters Pararmeters Get To get the current measurement on page 197 parameters press the Get Parameters button This makes a copy of the current parameters within the measurement control Measurement Type This error message is displayed if the measurement type on page 203 in the measurement on page 197 control is set to linear or angle Measurements can only be made within inspection programs when using one of the edge detect measurements User Manual XTMO26 A1 339 Inspections Range Measurement Action The measurement of the minimum and or maximum thicknesses of materials or gaps between material may be performed by this type of action Range Measurement Get parameters et Get Range Measurement Parameters Get parameters Get To perform the required measurements on an acquired image it is necessary to set up the measurements in the Range Measurement on page 207 image processing to
367. modulation is being applied To remove modulation press the button again so that it raises up again On Xi systems it is possible to adjust the speed of the modulation by use of the buttons next to the Modulation button This is not available on SR based systems User Manual XTMO26 A1 49 X ray Controller When active the image may display an oscillating movement This movement indicates an X ray beam misalignment The image movement is minimised using both mechanical and X amp Y Shift adjustments until the image pulses rather than moves The pulsing will take the image in and out of focus When this occurs the X ray beam is centred within the magnetic lens The correlation of the X and Y shift to movement in a particular direction is variable due the physics of the X ray source however X shift acts in a perpendicular direction to Y shift Shift and Y ShiFt When a new X amp Y shift value has been set up for a specified kV demand setting and the X ray beam has been aligned the pressing the Save button will save these values to permanent storage For Xi X ray sources the X and Y shift values need to be set to each kV demand value that is going to be used The method to do this is as follows Shift and Y Shift Max ky Mid ky 1 Set the demand kV to the maximum and set the X and Y shift values Press the Save button to save them 2 Lower the demand kV to a setting in midway from the maximum kV and t
368. move the manipulator so that no sample or other obstruction is in view then this position may be set as the Shading Correction Safe Position If the program has a safe position set then when the shading corrections need to be updated when the program is run the manipulator will automatically move to this position and the shading corrections can be updated This avoids the user having to intervene to update the shading correction To set the safe position check the Safe Position Set checkbox Then move the manipulator to the position where no sample or other obstruction is in view and then press the Set button Output Options Output HTML report w SY export File w When a 2 D inspection program is run then the results of the inspection are saved in an XML http www w3 org xml file This file contains all of the information about the run including the wall measurements So that the results file can be viewed in a web browser for example Internet Explorer Firefox etc the XML results file can be converted to HTML http www w3 org tr rec html40 using an XSLT http www w3 org tr xslIt stylesheet If this is required then check the HTML Report check box If the results data is to be exported into some other third party application such as a database then if it is not possible to use the XML results file then it is possible to create a CSV export file see topic CSV File on page 589 Note that the HTML report and the CSV
369. mple Sample status FAIL Components Images BGA Analysis BGA Void Analysis BGA Void Analysis BGA Void Analysis BGA Void Analysis Map Change Status Add Mote 398 XIMO26 A1 User Manual How to Get More Out of Inspection Programs If an image within the Images list is double clicked then the X ray image is loaded into the main X ray image window and the analysis performed on the image reloaded providing the image profile file XML is available This allows the user to adjust the parameters to determine if the status is marginal Note In order to view images on the Validation Station then the inspection program must save greyscale X ray images Colour images may be saved as well by the inspection program for viewing in the HTML report but these images cannot be viewed by the Validation Station as the analysis tools cannot be re loaded with the parameters used within the inspection program nor can the colour overly be re loaded Adding a Note to a Component s Results A note may be added to a component within the inspection report This note can be any textual information For example a failure on a BGA can be checked for the type of failure and a note can be added to specify a failure code To do this select the required component within the Component list and then press the Add Note button This will open the Add Note window into which the text can be entered When the window is closed then the notes attached
370. mple is saved when the stage in the CT Acquisition user interface is changed from Sample Setup to any other A stage When the Sample Setup tab is entered from another stage of the user interface the sample is moved back to the saved manipulator position Setting the X ray Conditions Two conditions must be met when setting the X ray conditions e X rays must penetrate all parts of the object at all rotation angles e X rays must not saturate at any rotation angle any part of the image to be used to reconstruct the volume To make sure the first condition is met rotate the object so that the X rays pass along the longest path length of densest material thus producing the darkest image The live histogram mode on page 153 and the grey level read out on page 135 are useful in checking the penetration of the sample Check that the grey level of the darkest points in the image are higher than the grey level when the X rays are off Increase the kV until all parts of the sample are penetrated In normal practice none of the image should be saturated however if the a volume of interest is being used and a compensator is being used then it is allowable to have parts of the image not being used for reconstruction to be saturated To make sure that this condition is met check rotate the sample by pressing the Rotate button and check the live histogram as the sample rotates It may be necessary to use a filter on the X ray source s output
371. n When the image is captured a crop box is displayed This must be moved and resized to define the feature being used as a fiducial mark within the image When the feature has been cropped then press the Crop OK button that will have been displayed Ca Crop OF A check is made to see that the defined image is of good enough quality to use for positional calibration If it is not then an error message is displayed If this happens then either select another fiducial mark or feature on the sample that is better defined or increase the contrast in the image by varying the X ray conditions Changes to the contrast of the image using the Image Tone tool will not be applied when the image is re captured When creating a position calibration reference image it is advisable to use a feature that does not vary much from sample to sample Large variation in features from sample to sample will cause the position calibration to fail It is also advisable to perform a position calibration if viewing the sample with a different tilt angle User Manual XTMO26 A1 329 Inspections An example of an image that has too much small detail is shown below Using a whole BGA on page 589 is not a good idea as there is a lot of detail in the image which will cause the calibration to fail Also the image is taken a quite a low magnification so the position calibration will be coarser Note that at a low magnification 1 pixel shift in the image equates t
372. n the no object between the X ray source and the imaging device Editing a Multi Point Shading Correction To edit an existing multi point shading correction select the required correction from the Name drop down list Then press the Edit gt gt button The user interface will expand to show the details of the shading correction This is the same as in creating on page 108 a multi point shading correction The only things that are fixed once the shading correction was created are the number of points within the correction When editing the correction is complete press the Generate button to create the correction When the update is complete the correction is loaded and the window is closed Deleting a Multi Point Shading Correction Mame 40ms 100 9514 E ray conditions 100 uo 95 To delete a multi point shading correction select the required correction from the drop down list in the Name box and the press the Delete button A dialog will be displayed to confirm that the correction is to be deleted This avoids accidental deletion of corrections 114 XIMO26 A1 User Manual Image Processing Bad Pixel Correction Bad pixel correction is only required for flat panel detectors These imaging devices cannot be manufactured with every pixel working to its normal performance Each vendor will have a specification specifying how many bad pixels and lines are allowable when the panel is manufactured This is a very small numb
373. n 53809 Grey Level 40450 Pixels 33 Max 60906 Min 4013 Average 47934 Std Dey 1955 24 These controls set the parameters that control the identification of bad pixels on the selected image The pixels identified as bad by these parameters are shown as a red stain on the X ray image An example is shown below User Manual XTMO26 A1 119 Image Processing The thresholds shown by the red lines on the histogram correspond to the values in the numeric controls Pixels within the image are identified as bad if they fall outside the range specified When the images are acquired then the Auto Set button is pressed automatically Normally the values calculated by this function will identify all the bad pixels within the image It is possible to alter the thresholds and see the effect Care must be taken that the thresholds set do not erroneously identify too much of the image as bad pixels An example is shown below Piel is bad Flessthan 4960012 Pixel is bad if greater than fl SORDO Grey Level Pinsk Max 60906 Hin 4013 Average 47934 Std Dew 1958 24 Using threshold like those set in the above example will cause too many pixels to be identified as bad See the stained X ray image below At any time pressing the Auto Set button will set the thresholds back to the automatically calculated values It is not recommended to alter the thresholds calculated by A the Auto Set function for the grey i
374. n about the image including the geometric magnification at which the image was captured and the last image analysis edit performed on the image By loading the image profile the last image analysis will be reloaded into the relevant image processing edit control and measurements can be correctly made on the image Save Image To save the image within the main X ray image window on page 169 to a file on disk press the Save Image button This will display a dialog that allows the user to specify where to save the image This is an enhanced version of the standard Windows save file dialog Save in C IC2 a My Recent Documents 3 Desktop My Documents Qs My Computer a File name My Network Save as type TIFF Files tif Pixel depth 8 bit 276 bit Image Greyscale smaller file Greyscale with Tone smaller file Colour larger file Preview gt gt 160 XIMO26 A1 User Manual Image Processing The standard controls of the Windows Save File dialog are not documented here but are available within the Windows help information The types of image files that can be saved by Inspect X is controlled by the Save as Type drop down list Note that JPEG files can be saved as either JPEG2000 or standard JPEG A preview of the image to be saved can be obtained by pressing the Preview gt gt button AER Pressing this button will cause the Save File dialog to increase its width to d
375. n an orbit is performed or the sample is rotated using the rotate joystick on the inspection system it is important to have previously input the sample s height above the manipulator table This is necessary to ensure that the point of interest on the sample stays in the field of view when orbiting If the point of interest on the sample is directly on the manipulator table then 0 0 should be entered If the sample s height above the table is known then enter the value into the Image Sample Depth on page 65 edit box If the height is not known then use the auto sample height calculation on page 99 function 98 XIMO26 A1 User Manual Manipulator Controller The Maximum Sample Height is used in the Anti Collision on page 100 function The units of measurement are defined by the Measurement on page 199 image processing tool The units will either be millimetres or inches Automatic Calculation of Sample Height The height of the point of interest on the sample above the manipulator table can be calculated using the auto sample height calculation function The calculation is started by pressing the Calculate button The Auto Height Calculation window is displayed Crop the area on the ray image that specifies the area of the sample whose height to calculate Mote 1 4 high contrast image gives a best results 2 Crop an area no bigger than one quarter of the image 3 Have the cropped area near the centre of the image
376. n either side of the slider If a nudge button is held down then the slider will move towards that end of the slider until either the button is released or the end of the slider is reached The present value of the focus trim is displayed as a numeric value Focus On inspection systems that have been enabled for auto focusing then the Focus button is displayed If this button is pressed then the focus trim will be automatically calculated Auto Conditioning The conditioning of the X ray source is the process to achieve a stable operating voltage and hence a steady image The conditioning process involves slowly ramping up the demand kV with the filament turned down and no beam current is generated When a pre defined amount of leakage current is detected which can be indicative of an imminent breakdown the kV level is reduced until the leakage current subsides Once the current has reduced below a lower uA threshold kV is again ramped up This process continues until the X ray source holds a steady kV with no leakage uA at the kV to which the source is being conditioned On an SR controller the conditioning parameters are selectable via a switch inside the controller with options of hard normal or soft conditioning The Xi source conditioning routine is performed in software and unlike the SR conditioning routines is user configurable in the properties panel on page 55 24 XIMO26 A1 User Manual X ray Controller
377. n ensure that the sample is correctly placed If Flux Normalisation is selected then when a panel scan mode is selected the flux normalisation box has to be defined on just one of the images This is done by selecting the required image in the Flux Normalisation Defined on Image drop down list Load 3 D CT Profile CT Profile When a CT data set on page 589 is acquired then all the parameters that specify how to acquire that CT data set are saved in a CT profile ctprofile xml within the CT data set s folder This can be reloaded by pressing the Load button and selecting the required CT profile When the CT profile is loaded then all the parameters within the step by step user interface are reset to the values within the profile The manipulator is moved to the required position the X ray conditions are set up and the imaging device parameters are reloaded Shading Correction The purpose of this stage is to set up shading correction that are used to correct the X ray projection image Shading Correction It is recommended to acquire a good CT data set that you use a shading correction whose images have been acquired with a minimum number of Frames Minimum Frames Disable shading correction Name 40ms 100k 95uA Y ray conditions kw 100 uo 95 412 XIMO26 A1 User Manual 3 D CT Acquisition Minimum Frames for Reference Images It is recommended to acquire a good CT data set that you use a shading correction who
378. n estimate for the size of the image file that will be created The preview image is of particular importance when saving images to JPEG or JPEG2000 files as the effect of the image compression can be previewed before saving the file to disk Pixel Depth Pixel depth 8 bit 16 bit Some image file formats can be saved as either 8 or 16 bits per pixel for monochrome images without colour or 24 or 48 bits per pixel for colour images with colour and some can only be saved in 8 bits for monochrome and 24 bits for colour images The image acquisition and processing within Inspect X is 16 bits for all imaging devices Image Type Greyscale smaller file Greyscale with Tone smaller file Colour larger file All the image formats allow for the saving of the image in greyscale or colour formats Greyscale images can be saved with either the tone edit saved in the image profile or applied to the image If the tone edit is saved in the image profile then the image data in the saved file does not have the tone edit applied This is so that tone edits are non destructive and can be altered if the image is re loaded into Inspect X If this is required then select the Greyscale option If the tone edit is required to be applied to the image data in the saved file then the Greyscale with Tone option should be selected Applying the tone edit to the image data means that third party image applications will open the image and th
379. n moved to the required X ray filter if one is required then press the Create button This will display the user interface to allow the creation of the X ray flux calibration AL X ray Flux Calibrations Flux calibrations Delete Calibrate 1 Move the manipulator to the view the appropriate Filter 2 Set the X raw conditions 3 Specify a name For the ray Flux calibration Mame BGA Analysis A unique name is input into the Name text box This allows easy referencing of the X ray flux calibration when it needs to be used or re calibrated This name is the one that appears in the Inspection Programs user interface when referencing the calibration When the name has been specified then press the Create button and a number of images are acquired to set up the X ray flux calibration 30 XIMO26 A1 User Manual X ray Controller Recalibrating X ray Flux Calibrations When an X ray flux calibration is recalibrated the X ray current is automatically adjusted until the brightness of the image is as near as possible to the brightness of the image when the calibration was created To recalibrate one or more X ray flux calibrations select the required calibrations in the list and then press the Calibrate button Note that the required X ray filtration for all of the selected calibrations must be available on the manipulator If they are not then the recalibration will fail A X ray Flux Calibrations Flux calibrations 90 51 B
380. n of the X ray flux calibration fail to achieve this minimum quality then there will be too much variation in the X ray conditions to ensure repeatability of the inspection program This numeric field specifies the minimum calibration quality When the action is executed if it fails to achieve this value then the action s status will be set to Fail and the inspection program will always be interrupted Quick Calibration Quick recalibration This checkbox controls the speed of the recalibration of the X ray flux calibration If the checkbox is clear then the images collected to adjust the flux calibration are collected over a longer period and can give a higher quality calibration If the checkbox is checked the images are collected over a much shorter period This allows for quicker recalibration but does mean that the recalibration s accuracy may be very slightly less accurate Limit uA Change Limit u change w When recalibrating an X ray flux calibration as part of an inspection program it is possible to limit the maximum allowable change in uA This can stop the program from getting into an apparently endless loop in trying to recalibrate an X ray flux calibration if the required X ray filtration has been removed If the Limit uA Change checkbox is checked then the program will only allow a maximum change of either 25 of the starting uA or 10UA if this is greater If the checkbox is not checked then the program will v
381. n program to show were the component being inspected is located upon the sample and the status of each component 304 XIMO26 A1 User Manual Inspections Edit Complete crs When the editing of an inspection program is complete press the Done button to return to the inspection management on page 296 If there are changes made to the inspection that have not been saved then a window is displayed to ask if these changes should be saved This allows for the discarding of unwanted changes that have not been saved Edit Mode This pair of radio buttons controls the list of actions that are displayed on the user interface When the Program button is pressed then the actions that are contained within the main inspection program are displayed When the On Failure button is pressed the actions that are performed when a failure on page 349 is detected in the main inspection program are displayed The buttons enable access to the actions so that they can be viewed and edited On Failure Actions Mark Failure Save Image Save Image Delete Annotation An example On Failure actions list Allowable Failures Allowable Failures 0 When an inspection program is run it can be configured so that a certain number of failures are allowed and the inspection of the samples can be judged to have passed This control sets up the number of allowable failures before the inspection program may be aborted If the number of all
382. n selected if one or more actions are selected in the action list Mew Action Action BGA void Analysis User Manual XTMO26 A1 315 Inspections New Action Type Action Acquire Image wt To define the required new action to be created select the required action type from the list of Actions ray Flux Calibration Fiducial Calibration Pseudo Colour Image Background Image Subtraction Measurement Range Measurement Erode Dilate BGA Analysis BGA Void Analysis Pad Array Void Analysis Package Void Analysis Delete Annotation Save Image Mark Failure rays OFF Action Type X ray flux calibration on page 322 Fiducial calibration on page 324 Position calibration on page 328 Acquire image on page 332 Visual check on page 334 Process image on page 336 Tone edit on page 337 Binarise image on page 338 Pseudo colour image on page 338 316 XIMO26 A1 User Manual Use Recalibrates an X ray flux calibration Performs a 2 point fiducial calibration Calculates a positional offset Similar to a fiducial calibration Acquires an image that can be image processed Moves to a position and allows the user to assess a live image for pass fail status Applies image processing on an acquired image Applies a tone edit to the image Binarises the image Adds pseudo colour to the image Action Type Background image subtraction on page 339 Measurement on page 339 Range M
383. n the Acquire Image action added to the inspection program will be set to use the X ray conditions under which it was acquired and not to use an X ray flux calibration If this option is selected then the user needs to be aware that the inspection program is not calibrated Pressing the Cancel button will not add any of the recorded actions to the inspection program Note in all cases if an Acquire Image action uses a specific X ray flux calibration the user will need to ensure that the inspection program contains a X ray Flux Calibration action to re calibrate that X ray flux calibration Save Image Action Image Type When Save Image actions are automatically added to an inspection program then a check is made upon the type of image file that the Save Image actions will save There are three options e TIFF e JPEG e Windows Bitmap If the file type is set to TIFF then the following warning message will be displayed Warning A Saved images will currently be saved as TIFF files TIFF Files cannot be displayed in the inspection report JPEG images can be viewed in the report Do vou wish to use JPEG images instead As web browsers cannot directly display TIFF files this message explains that this will be a problem if viewing the generated HTML report It is recommended that if you want to view the images in the HTML report then the file type should be changed to JPEG Windows bitmap BMP files can also be used and viewed
384. n the button updates to indicate which processing mode has been selected Recursion 7 Histogram Background Subtraction Record Movie Recursion This mode applies a rolling average process to the live image See below for more details The level of averaging applied to the image is defined by the drop down box This specifies the number of frames that are used to create a rolling average The higher the number of frames the higher the quality of the X ray image a Histogram This mode generates a histogram of the live image This histogram may be viewed in the Image Tone on page 180 function P Background This mode applies a background image subtraction on page Subtraction 196 to the live image cx Record Movie This mode will record a video file of the live image When selected a Save File dialog will be displayed so that the user can specify where to save the movie file The recording will continue until either the Live Image Average Image or Capture Image button is pressed 136 XIMO26 A1 User Manual Image Processing 190 Bis 128 b Je 16 When image recursion is selected a rolling average is applied to the live image to give a better quality image on the display The level of averaging applied to the image is defined by selecting the number of frames from the pop up menu that appears when the second option button next to the Live Processing button is pressed This specifies the number of fr
385. n the pixels adjacent to edges in the image This gives the effect of a fringe around the edges that makes the image look sharper Unsharped edge Sharped edge 278 XIMO26 A1 User Manual Image Processing There are 3 controls that affect the appearance of the sharpening e Strength e Radius e Clipping k t Strength aj Radius The radius is effectively the width of the USM fringe applied The strength is the amount of USM applied The radius is also the width in pixels of the features that will be sharpened Selecting a radius of 2 0 pixels will mean that features less than 2 0 pixels will not be sharpened and a fringe of 2 0 pixels will be added to the image The clipping function controls how the USM fringe is applied The USM fringe will only be applied to the pixels in the image if the grey level of that pixel varies by more than the clipping value when compared to its surrounding pixels This allows USM to not be applied to noise within the image but to true edges within the image Bond wire junction within an LED before USM User Manual XTMO26 A1 279 Image Processing After USM applied Unsharp Masking x Strength 4 l Radius 4 P D clipping 4 b lo Strength strenath Y A The strength of the USM fringe applied is controlled by this slider Radius Radius 4 J E The radius of the USM fringe applied is controlled by this slider 280 XIM
386. necessary to move the sample completely out of view to check that the image is not saturated as maximum intensity occurs at the centre of the image Load CT Profile CT Profile When a CT data set on page 589 is acquired then all the parameters that specify how to acquire that CT data set are saved in a CT profile ct2dprofile xml within the CT data set s folder This can be reloaded by pressing the Load button and selecting the required CT profile When the CT profile is loaded then all the parameters within the step by step user interface are reset to the values within the profile The manipulator is moved to the required position the X ray conditions are set up and the imaging device parameters are reloaded 464 XIMO26 A1 User Manual 2 D CT Acquisition Corrections The purpose of this stage is to set up shading correction that are used to correct the X ray projection image set the datum point for the CT data set acquire a scatter free radiograph of the sample and to specify flux normalisation if required Shading Correction It is recommended to acquire a good CT data set that you use a shading correction whose images have been acquired with a minimum number of Frames Minimum Frames Disable shading correction Name 40ms 1 6mm Cu vw ray conditions ky 100 yA 95 Datum Point Datum position 435 800 mm Set Datum Reset Datum Scatter Free Radiograph Height above datum Top 9
387. nent Save the inspection by pressing the Save button Create X ray flux calibrations are required If necessary use Step and Repeat to add actions When all of the images and analysis has been added to the inspection using recorded actions go to the Inspection tab and select the Calibration component Manually add X ray Flux Calibration actions for each of the X ray flux calibrations created during the adding of recorded actions Manually add a Fiducial Calibration action Save the inspection program 10 Try running it User Manual XTMO26 A1 401 How to Get More Out of Inspection Programs 402 XIMO26 A1 User Manual 9 3 D CT Acquisition If the inspection system has been configured with the Computed Tomography on page 589 CT option then is it possible to create three dimensional representations of samples The process to create a three dimensional volume is to acquire a number of angular views of the object called projections These projection images can then be reconstructed into the three dimensional volume by the CT Agent program The set of projection images along with a reconstruction parameter file are called a CT data set see topic CT Data Set on page 589 CT acquisition is only available on systems that have been configured A for this option This is configured by Nikon Metrology when the i inspection system is built In order to make the acquisition of a CT volume easy a step by step user interf
388. ng on page 138 process Scatter Free Radiograph To produce a scatter free radiograph of the sample then press the Scatter Free Radiograph button This will open the Scatter Free Radiograph window A scatter free radiograph is a 2 D image of the sample This is created by moving the sample vertically through the X ray fan beam and iteratively adding the lines to build up the 2 D image Scatter Free Radiograph x Y axis position For turntable 420 00 Height abowe turntable Top 100 00 Bottom 10 00 Averaging Apple Flux normalisation w Acquire Setting the Turntable Y Axis Position All measurements within the Scatter Free Radiograph function are relative to a datum point For ease of use the top to the manipulator s rotate turntable is recommended to be used as this datum point It is possible to use other recognisable features as a datum point for the scatter free radiograph if you so wish Y axis position for turntable 420 00 mm Set 154 XIMO26 A1 User Manual Image Processing The Y axis position such that the datum point is in line with the X ray fan beam may be set by entering the value into the numeric control Alternatively it may be set by moving the manipulator Y axis and viewing a live image to identify when the datum point is within the X ray fan beam Then pressing the Set button will record the manipulator s Y axis position as the datum point Setting the Top and Bottom Positions Top 100 00
389. ng an X ray Flux Calibration When an X ray flux calibration is created it records the X ray conditions the imaging conditions the manipulator position and the mean brightness of the image It is possible to create any number of X ray flux calibrations as they are uniquely identified by their name As the mean image brightness is used then it is highly recommended that the manipulator is moved to view an X ray filter of the appropriate thickness to ensure that there is a distinct peak in the histogram of the image as near to the centre of the greyscale range Appropriate X ray filters may be a thin sheet of copper e g 0 5mm thick 1 0mm thick etc These filters need to mounted on the manipulator table at a fixed position so that the X ray flux calibration may be re calibrated Often the filters are mounted upon a fixture that holds the samples on the manipulator table The reason for having a distinct peak in the histogram allows for the software to re adjust the X ray beam current uA upon re calibration to re create the same image brightness Grey Level 22704 Pixels 601 Histogram of a good filter Grey Level 28672 Pixels T Histogram of a too dense filter no distinct peak can be seen User Manual XTM026 A1 29 X ray Controller Grey Level 52224 Pixels 17432 Histogram of too thick a filter This can be used but the peak is quite close to the white end After the X ray conditions have been set and the manipulator has bee
390. ng of a number levels of grey A grey scale value refers to a particular shade of grey within the image Image Profile When an X ray image is saved to disk an image profile file will be written into the same folder If the image is saved as Image1 jpg then the image profile is saved to a file named Image jpg profile xml The image profile stores the data about how the image was captured its magnification and other data This image profile is used to set up Inspect X to the same image processing conditions when the image is reloaded into Inspect X J JPEG JPEG is a term commonly used to mean JFIF image files JPEG is actually a lossy image compression algorithm that uses discrete cosine transforms to eliminate visually redundant data from the image The greater level of compression the more likely that the user will see artefacts JPEG2000 JPEG2000 is a lossy image compression algorithm that uses wavelet compression to eliminate visually redundant data from the image The greater level of compression the more likely that the user will see artefacts JPEG2000 produces better quality images and smaller image files than JPEG K KB or Kilobytes 1024 bytes User Manual XTMO26 A1 589 Glossary of Terms L Lossy Compression Lossy compression reduces the size of an image file by permanently eliminating certain information especially redundant information from the image When the compressed file is uncompress
391. ng the acquisition of the CT data set is specified by selecting the required shading correction within the Name drop down list This correction can be loaded by pressing the Load button It may be updated by pressing the Update button Updating a shading correction involves the re acquisition of the reference images If there is a mismatch between the imaging conditions used to create the shading correction and the current imaging set up then the following user interface shall be displayed Differences Correction Present Exposure 40 00 2000 466 XIMO26 A1 User Manual 2 D CT Acquisition Each of the conditions that do not match are displayed The example above only shows one condition that does not match To update the imaging set up to match that of the shading correction press the Correction button Once this has been done then the shading correction may be loaded To retain the current imaging set up press the Present button The imaging set up will not be altered but the shading correction will not be loaded If a new shading correction is to be created then press the New button This will open the Shading Correction on page 102 window This window gives full control of creation editing and deletion of shading corrections Shading corrections will remain valid for use within CT for a limited period AM of time This time is set in the image processing properties on page r n 294 Datum Point Datum Point Datum pos
392. ng the tonal range The image processing options available are displayed in menu below Sharpen More Smooth Camera Set Up Tab This tab s availability depends upon the type of imaging system within the X ray inspection system The imaging system may either be a flat panel or a camera fitted to an image intensifier For all of these imaging systems except for analogue cameras a standard camera control is displayed Some of the controls may not be enabled for certain imaging systems as the imaging system does not support that function Analogue cameras have a slightly different camera control 288 XIMO26 A1 User Manual Image Processing Standard Camera Control Camera Controls Binning 4 V PJ ix Lines Exposure El Y h 1000 ms Accumulation 4 y E h 1x Frame Rate 1 00 fps Digital Gain 4 y BJ 4x Gain 4 PO dB Brightness d Pi oo Status Bad Pixel Correction Collect button is not pressed then the next time that Inspect X is run the previous f The values are NOT saved until the Save button is pressed If the Save values will be used Binning The binning function is the adding of pixels on the detector within the imaging device When pixels are binned i e added together a faster frame rate can be achieved as the addition of pixels gives an increased image brightness However the image size decreases proportionally Therefore binning mode changes are a tr
393. ng warning prompt will be displayed Warning AN Starting this operation will overwrite existing data TF you continue the existing data will be lost Continue and overwrite data Archive data as a ZIP File and then continue Cancel If the Cancel button is pressed then the 3 D CT Batch program run will be aborted and no data will be lost If the Continue button is pressed then the results data for the samples that have already been inspected will be overwritten by this program run If the Archive button is pressed then the results data folder will be archived by creating a ZIP archive of the folder An informational window will be displayed whilst this archive operation is in progress Then the inspection program will continue its run Archiving Progress Compressing Folder DACT Data Small Blade 23 456 789 into ZIP archive DACT Data Small Blade 235 456 769 zip A program run consists of a number of stages If a sample changer manipulator is available then the following stages are performed e Updating of shading corrections if required e For each sample Loading the sample Acquiring the CT data sets and Unloading the sample e lf there is no sample changer manipulator e Updating of shading corrections if required e Acquiring the CT data sets If any of the shading corrections used by the 3 D CT profiles within the 3 D CT Batch program have aged then they are re acquired The time that they a
394. nipulator Controller Whilst the movement to the load position is in progress a warning is displayed Manipulator moving to load position On an XT V 160 system pressing the Load button causes the manipulator to move to the load position next to the access door and then displays the following window Information 1 Load your sample onto the table and then close the window Press OK when the window is closed and the manipulator will move to position After loading the sample press the OK button and the manipulator will be returned to the central position Movement Speed sees gt JO gt 1 This set of buttons control the speed of movement of the manipulator The speed control only applies to movement made by use of the joysticks Positional point to point moves made from the Inspect X user interface always move at the fastest speed Precision speed This moves the manipulator very slowly for high precision work Slow speed Y E ik Normal speed Il Fast speed JID 64 XIMO26 A1 User Manual Manipulator Controller On XT V 160 inspection systems there is a fifth soeed control the Auto speed setting When the Auto button is selected then the maximum speed of the X Y and magnification axes are dynamically updated dependent upon the current position of the magnification axis As the magnification of the sample increases the speed of the axes is reduced This enables finer control of the manipulator at
395. nipulator within the X ray system in particular there are different numbers of axes that may be controlled Before a manipulator can be used it must be homed This is a process that causes the manipulator to move all of its axes to their datum positions and zero their coordinate systems This needs to be performed each time the system or computer is re started The user interface for the manipulator controller is slightly different in the operator level user interface on page 61 of the Inspect X software to that in the supervisor level user interface on page 69 The operator level manipulator controller has the essential controls The supervisor level user interface has extra controls to allow the supervisor to set up parameters that control the manipulator In addition to the user interface for the manipulator there are joysticks on the inspection system that may be used to move the manipulator s axes When the joysticks are used the manipulator controller interface is updated to reflect the change in the position of the manipulator Operator Level The operator level manipulator user interface consists of two parts the manipulator map on page 82 and the manipulator controls on page 62 Homing Preparing the Manipulator For Use Before a manipulator can be used it must be homed This is necessary each time either the computer or the system is switched on To initiate the homing operation press the Home button after making sure
396. nitiate the homing operation press the Home button after making sure that no objects are likely to collide with the manipulator whilst it is homing _ Home r e The homing operation sends each axis to its zero position and sets the allowable travel for that axis The operation involves moving each axis to its datum position to zero the coordinate system Once this operation is complete for all axes then the manipulator is calibrated and ready for use Controls The manipulator can be controlled by the manipulator map on page 82 or by joysticks either on the inspection system or on the software interface Some CT see topic Computed Tomography on page 589 inspection systems are configured so that the manipulator map does not appear on the user interface The manipulator can also be controlled by moving to saved positions on page 90 Manipulator Axes Control Cone JE 52 set C O Jm a sample Depth 10 00 mm Magnification 25 0 Inspection Systems other than the XT V 160 and XT V 130 User Manual XTMO26 A1 69 Manipulator Controller Cenas a 00 D gt Ibm Sample Depth 10 00 mm Magnification 30 0 XT V 160 and XT V 130 Inspection Systems Stop Pressing the Stop button will stop any movement currently in progress by the manipulator It will also stop a homing on page 69 operation Home Ca Pressing the Home button will cause the manipulator to perform a homing operation To select which
397. nnection To test the connection to the database press the Connect button If the connection succeeds then the status of the connection is displayed in the State field To disconnect from the database then press the Disconnect button 546 XIMO26 A1 User Manual 14 Scheduled Tasks Inspect X provides two scheduled tasks that may be run within Inspect X These are not tasks that are scheduled within Windows 7 or XP e Calibration e Clean Up Files These tasks can only be set up and changed when logged in as Supervisor The tasks set up will run irrespective of whether the user is logged in as the supervisor or operator User Manual XTMO26 A1 547 Scheduled Tasks Calibration Task The calibration task can be used to perform two functions on a scheduled basis e X ray source filament calibration This is only available on the XT V 160 and XT V 130 systems e Updating of the standard shading corrections for the imaging presets X Cahbration Task Control x ray source Filamant Calibration Recalibrate Standard Shading Corrections Update For all imaging presets a Use previous X 1aw conditions Automatically set ray conditions Acquire white images only Manipulator Safe Position Manipulator position For updating of shading corrections Warning Time Out When the task runs and no program is running then the warning message is displayed For a fixed period of time This warning will time out and the ta
398. nnnnnnnnnnnnnannnnonannnnenannaness 509 Slap e AP eee nee eer seer este ey erent ee eran ee nee nee cee eee er eres 509 Defining the Turbine Blade within the Slice cccccooccoccoccnncononnnnononcnnconanonnonanonnononcnnnnnanonos 510 Adding Wall Measurements and Calibrating ThresholdS ooocccccooccncononcnnononcnncnnanonnnnonons 512 Defining Thresholds 2D InSpectiONS oooccccocccnoccconoccconcnnnocnannncononcononnnnnnonannnnonannnnonnnnonoss 513 Threshold for Eds ds c 513 Adding a Wall Measure Metu A RA 514 Region Naming and Sale a a dol 515 Selecting the Required Region Aread cccccccccssssecccsssceecseseeeceeseeecsueeeceeseeecseuseeeseeseeessaneeesaaes 515 Label Place menta A A A a 517 Defining Minimum Allowable MeasureMent ooccncccccncccoccnnccnocnnnononcnnonnnnononnnnnnononcnnnnnnrnncnnanennos 517 Defining Maximum Allowable Measurement ooocccccoccncccoccnnccnoconnononcnnonnnnnnnnnnnnnononcnnnnnnrnnconaninnss 517 Deletinia Measurements nai AAA A A de 517 Edi ng a Measurement aan a ehiutdtenigeatendaahetteieeinae eat 518 Meastrement Typo 22m AAA AAA unt eaaeln 518 Defining and Calibrating the ThresholdS ccocconncncccccconoconcnnconononononnnnonnnnononnanonnononcnnnnnnnnnos 519 Adaptive TARE SMOIGING nia a A 520 Completing the Wall Measurement DefinitiONS oooccccococnnnccconnconancnnnnoncnnnonaronconanencnnncnnnnnns 520 Selecting Another Slice for Wall Measuremen
399. nnonanennnnnnnnnnnos 199 Linear Measuremenl Se rencia AA A A 200 Angular Measure meN rar A 201 Edge Deter WMG resena ii tods 201 EOE Be 216 A a a o a ere E T 202 Mestre ment DO ias ano N 203 Add Measurement To Image Notes ccoocccccoccccocnncccocnonanoccnanoconncconanononannnnnnnnnnnnnnrnanncnnnnninos 204 Prol dci 204 PIS LOO hel PA nn O 205 Edge Deltech COmWOl Swish scares a ca ah aad eke scala ati rie call eee 206 Range Mesas tre mentar iris 207 Defining a Measurement isa A A cud eee 209 Meastre ment TDS tacon ass 209 Region Naming and SelectionN lt i oooiooioiinoosicccis etecedeescosushedionsedntacesececesasedneusevecdsnncsteseeeess 213 Selecting the Required Region rea ooocccccoconococonnococonconconannonononnnnonnnnnnonannnnonanrnnnnnnnnnnnnananinnns 214 Label Placementan a Sas 215 Defining Minimum Allowable Measurement oooccnccoccnncconcnnconoconcnnoncnnononcnnnnnnnnnononcnnnnnnrnnnonaninnss 216 Defining Maximum Allowable Measurement ooocccccoccnccccccnnconoconcnnoncnnononnnnonannnnnnnncnnononrnnnnnaninnss 216 Deleting MeaSUremenls us ashen aati etna 216 Edna a Measurement oa 216 ignoring Intermediate OD Scsi 217 penning ThresholdS nooo cada 218 A A TO 221 Annotation UDS a bodies 222 Add or Delete Annotation Objects uu a a 225 Delete All Annotation Objects 100 iS 225 Normal or Bold Style ia a a eats 225 Add Xray CONAN Sa A A id 226 Erode ID 72 Co pete ee eee eee eee 226 ErOSION asada oi men
400. nsional fan beam CT scan which takes many times longer than a 3 D scan Most scattered X rays are lower in energy than the incident X rays Therefore a filter placed after the sample e g over the detector will help remove scattered radiation Scatter is more of a problem with higher voltages However removing as much scatter as possible will help you get cleaner images 454 XIMO26 A1 User Manual 11 2 D CT Acquisition If the inspection system has been configured with the 2 D Computed Tomography on page 589 CT option then is it possible to create three dimensional representations of samples using an reconstructed image stack The process to create a reconstructed image stack is to acquire a number of sets of angular views of the sample called projections As the inspection system has a linear detector then the projections are saved as individual lines within an image file This image file is called a sinogram An example is shown below The vertical size of the image i e the number of lines in the sinogram image will be the same as the number of projections Consecutive lines are consecutive projections A sinogram Reconstruction of a sinogram will create a reconstructed 2 D slice through the sample An example of a slice is shown below The reconstruction is performed by the CT Agent program A set of sinograms along with a reconstruction parameter file are called a CT data set on page 589 The reconstruction of the CT data
401. nspection function Higher Precision Higher precision w The precision of the move to position executed by this action needs to be of higher precision then check this checkbox When the action is executed then 2 moves will be made to ensure the best accuracy of positioning This only really needs to be used when viewing the sample at a very high resolution Include Map Image Include map image w If a copy of the map image showing the position of the component being inspected is required within the report generated by running the inspection program then check this check box This function only works if the manipulator map has been copied into the inspection program by pressing the Get Map on page 304 button Region of Interest Region of interest Mark Failure Mask wa When the manipulator has been moved to position by the Visual Check action then a region of interest on page 270 mask may be displayed on the live image if required The required region of interest can be selected from the list of saved regions of interest If no region of interest mask is required then select None User Manual XTMO26 A1 335 Inspections Running a Visual Check Action When a visual check action is executed when the inspection is run then the Visual Check Status panel is displayed Inspection Sample ID Yisual Check Mata Results Cl Whilst this panel is displayed the user has full control of the Inspect X appl
402. ntrol Auto Filament Control e On inspection systems that support the calibration of the filament then the filament demand is automatically set by the software dependent upon the X ray conditions This allows for the optimum use of the filament and increases its lifetime If it is required that the automatic setting of the filament demand is to be overridden then this is controlled by the Auto Filament Control checkbox If the checkbox is checked then the filament demand will be automatically set If the checkbox is clear then the Filament Demand Slider on page 43 is enabled and the filament demand for all X ray conditions is set by the slider The Auto Filament Control function calibrates the X and Y shifts and the filament demand On systems where this function is not available there is only one filament demand for all X ray settings This means that at some X ray conditions that the filament will be run at optimal conditions The Auto Filament Control function calibrates the filament so that the filament demand used is optimised to the X ray conditions selected by the user This facilitates longer filament life Filament Calibrate Recalibrate Filament Change 44 XIMO26 A1 User Manual X ray Controller This is only available on the XT V 160 and XT V 130 inspection systems 4 1 1 1 1 1 Auto Filament Calibration ee Calibrate The Auto Filament Calibrate function is run by pressing the Calibrate button This function
403. number of points depends upon how complex a curve is required Moving a point towards the top left hand corner of the control will bend the curve to lighten areas within the image Moving a point towards the bottom right hand corner will bend the curve to darken areas within the image Some examples of curves that may be used are shown below Make the image lighter Make the image darker More detail in light areas This is useful to improve the visibility of differences in the light i e near white areas of the image User Manual XTMO26 A1 183 Image Processing More detail in dark areas This is useful to improve the visibility of differences in the dark i e near black areas of he image More detail in dark and light areas las pama oer More detail in the mid tone with the dark areas tonally compressed 184 XTM026 A1 User Manual Image Processing Histogram Grey Level 27646 Pixels 1663 Max 652650 Min 1536 Average 22650 Std Dey 666 0 The histogram shows the grey level distribution for the image displayed within the main X ray image window If the image processing is in Live mode then no histogram is available It is available for captured images and the Histogram Live Processing mode The grey level information in the histogram can be used to help adjust the tone curve to best effect As a point within the tone curve is moved an indicator is drawn upon the grey scale at the bottom of the histo
404. o Image Notes To add the results of the Thresholding function to the Image Notes see topic Image Profile on page 589 press the Add To Notes button 230 XIMO26 A1 User Manual BGA Ball Analysis Image Processing This image processing function is for counting and analysing the solder balls within a Ball Grid Array see topic BGA on page 589 BGA The analysis will count the number of solder balls that are of a correct size the number of undersized balls and the number of oversize balls O a O FAT O O46 An example of a BGA Excluded Balls T Ball Edge Threshold 38091 2 Perfect Ball Diameter Exclude Below Diameter mm Diameter Undersize Fail Yo Diameter Oversize Fail Results View Results Calibrate BGA Ball Count 241 User Manual XTMO26 A1 231 Image Processing Define Region of Interest It can be helpful to obtain a good result to define a region of interest to mask out objects that might be identified to be BGA balls but are not To define or update a region of interest or to load a saved region of interest press the Region button This will open the Region of Interest on page 270 window When the region of interest is defined close the window by clicking upon the close box on the right hand end of the window s title bar BGA Analysis without a region of interest Note the device included in the count that is not required The
405. o a larger positional shift i ch J 4P9O0 i J E 00 _ 9000 t0 0 0 pec eceeooocoogc 0 i k AAA FA CE L 0 0060000 a 600 ecee O J tb ee TEILLE EEEE O g A better strategy for calculating position calibration for this component is to zoom in on a distinct section of the BGA Note that the middle of a BGA would not be a good reference image as there is a repeating pattern of BGA balls A corner of the BGA with clear space is a much better reference image see the image below Note that zooming in on part of the sample also yields a much more accurate position calibration as a 1 pixel shift in this image would equate to a sub pixel shift in the image above of the whole BGA 6 330 XIMO26 A1 User Manual Inspections Higher Precision Higher precision w The precision of the move to position executed by this action needs to be of higher precision then check this checkbox When the action is executed then 2 moves will be made to ensure the best accuracy of positioning This only really needs to be used when viewing the sample at a very high resolution Minimum Calibration Quality Minimum calibration quality 50 When the position calibration reference image is compared to the acquired image a minimum quality will be applied to the fit of the calibration to correct for positional offset of the sample on the manipulator
406. o detect subtle edges in the image in a noisy environment with other sharp edges Smooth has two filters specifying the smoothing applied Parallel along the line and Perpendicular across the line The filter averages pixels to reduce noise and the number indicates the size of the filter Smoothing in two directions allows better control over edge detection when a feature has a direction 206 XIMO26 A1 User Manual Image Processing Range Measurement The range measurement tool within Inspect X can measure the minimum and maximum distances within a specified region The measurement can be of the thickness of an object or it can be the distance between objects have a valid licence for the range measurement tool A This tool is optional and is only available on systems that Region 1 FAIL Min 1 999 mm Region 2 PASS ax 1 928 mm The steps to create a range measurement are e Define the regions in which the measurement is to be made e Define the allowable limits of the measurement e Set and calibrate the thresholds User Manual XTMO26 A1 207 Image Processing Measurements Label Region 2 se Call out line at top Check minimum measurement Minimum measurement 1 910 mm Check maximum measurement w Maximum measurement 1 950 mm Parameters Measurement type Measuring material l Gaps between material Measure using base lines Ignore intermediate objects w Ma
407. o pairs of images to calculate an offset and rotation to compensate for the placement of the sample It is highly recommended that samples being inspected are held within a fixture sample in the X Y axes plane then it is not possible to rotate the sample to square up the sample It is therefore vital that samples are held in a fixture to ensure repeatability of the inspection On these inspection systems there is a property value on page 356 that allows the fiducial calibration action to fail if the rotation of the sample is too great for the inspection to function correctly i When this action is executed on inspection systems that cannot rotate the On inspection systems such as the XT V 160 the sample can be rotated to square up the sample and region of interest masks will fit correctly 324 XIMO26 A1 User Manual Inspections Fiducial Calibration Fiducial 1 Fiducial 2 Fiducial Reference Image Higher precision Minimum calibration quality ol l oy ray Flux calibration 70 72 e Use ray Flux calibration w ray conditions Get Image exposure seconds Error The reference image For the First fiducial does not exist Error The reference image For the second Fiducial does nok exist Create Fiducial Reference Images Reference Image Fiducial calibration is performed by comparing a pair of reference images with a pair of acquired images to calculate the manipulator offset and rotation to correct the po
408. o recommended time to hold the X ray source at the maximum kV during auto conditioning The longer it is held there the more stable the X ray source will be at higher kV values Information i When this button is pressed then the X ray controller information window on page 28 will be displayed 18 XIMO26 A1 User Manual X ray Controller Supervisor Level The X ray controller on the supervisor level interface is shown below Focus J _o 4 y b Flux Calibration Af kV Control with 5kV Steps i100 Fa Pa kV Control with 1kV Steps 4 Bl These controls allow the user to control the kilo voltage kV generated by the X ray source The more kV generated the more the X rays will penetrate the item being examined in the X ray inspection system The X ray source will not generate any X rays until it is switched on on page 13 You may change the kV level required when the X rays are switched on or off Actual kV kV 100 Demanded kV Raa Ra es res kV Demand Change Buttons User Manual XTMO26 A1 19 X ray Controller There are either two or four buttons that vary the demanded kV setting If there are two buttons then these alter the demanded kV setting in steps of 5kV If there are four buttons then the centre pair alter the demanded kV setting in steps of 1kV and the outer pair alter the demanded kV settings by 5kV The selection of the kV step size is made within the general properties on pa
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410. o use image zoom not manipulator magnification to do this operation very accurately User Manual XTMO26 A1 199 Image Processing When the box is adjusted correctly enter the horizontal and vertical measurements in the required units Then press the Calibrate button Calibrate The measurement calibration is only valid at the one magnification If the magnification axis on the manipulator is changed then the calibration will need to be performed again gt Linear Measurements Measurement 06 06 mm Once the measurement has been calibrated then measurements of objects can be made by use of the measurement box on the main X ray image window 200 XIMO26 A1 User Manual Image Processing Angular Measurements Measurement 21 46 degrees Measurements of angles does not require calibration The required angle can be measured by dragging the lines on the main X ray image window to specify the angle to measure Edge Detect Line Measurement rm degrees This mode measures distances between edges detected along the line drawn on the X ray image as well as the angle of the line User Manual XTMO26 A1 201 Image Processing The line can be drawn across an object on the X ray image and the first edge detected from each end of the line is indicated by the orange points The distance between these edges is automatically calculated and displayed along with the angle of the line The sensitivity of the edge detecti
411. occcccccccoccncconcncconcnncononononnnnononononononnnnnonnnnnnnnnnnnnnnnnnnnnnnonenennanns 536 Operator IDe cat dato ee 536 2 D Inspection Program Selection ooooocccccconcnnccconcncononcncononcnnonnnnnnnnnnronononrnnnnnnrnnnnnnrrnnonanrnnonanens 537 Sample Serial Numbers cccccccccsseccceeeceaseecesececceacecauecscaseeceageeseeeeecsuaescuaeseaseeseaseeseaeeessusees 537 Running the Program 2D Inspection Operator coooooccnccconcccnccononcconcnononccnncnonancnoconnnnrcnncnnnannons 938 Manipulator GOntrO vta ii cole 542 A coi ie dees ueibe a gud ceidnctaatiacadianshe oaa 543 SWITCH WOE Sarara a lata ses eer dat ane eae a a dd 543 F ROD CICS A A nu taseeg enc snaneatenaadecetecatsauauee sete 544 insert Results nto Data D AS ina da 545 Bicis A A O A sine ei Seat act 545 Database silicio dea 545 Test Database COmmeclONss ia litis 546 14 Scheduled Tasks 547 Calibration Task oe ale alado adbos 548 Enabling amp Disabling Me Task 549 Contiguning the Calibration TaskKusiiin cas de 549 seting the Task scale o da 551 What Happens When the Calibration Task RUINS ooccccoccncoccncccccnccocnncnocnnononnnnnncnnnnnnononononononos 553 Clean Up FES Tasio ida lio 555 Enabling amp Disabling ine Tasas lid eel 556 Contiguring the Clean Up Files TasKiiviniicni di AAA 556 Setting the Task s Schequie rnain E A E AA 557 What Happens When the Clean Up Files Task RUNS coooccccccccccccnnccccncconcnccncnnconcnononcnonononos 559 1
412. ocessing functions These properties are available within the Properties Window on page 583 that may be opened from the Inspect X main menu on page 577 or the Properties on page 151 button on the Image Processing tool bar There are three sets of properties available that the user may set These are on separate tab panes General Tone Control Annotation Imaging Set Up Corrections A All property values are NOT saved until the Save button is pressed The Save button saves the updated properties to permanent storage so that they will be used the next time the Inspect X application is run The Revert button will reset all the properties that have been altered but not saved to their last saved value The Close button closes the Properties window User Manual XTMO26 A1 283 Image Processing General Tab General Tone Control Annotation Imaging Set Up Corrections Tools Show Binarise Show BGA Analysis Show Pseudo Colour Show BGA Void Analysis Show Background Subtraction Show Pad Array Void Analysis Show Measure w Show PTH Fill Show Range Measure Show Package void Show Annotation Show ire Sweep Show Erodes Dilate Show Drill OFFset Show Thresholding Images Images Folder H Images Quad image display Save images enabled Save map File with image Show Image Tools The check boxes on this tab window allow the supervisor to control which image processing tools appear in the user interface
413. ococcnnoconcnncononononnonnnnnnncnnnonnncnnononcnnnnnnrnnnnnnrnronancnnnnnos 489 Editing ao CT Batch PON les 490 SUPE lie 491 Delay Between CT ACQUISTIONS ue aa 492 Reconstruction COMPULCN iiaies l a 493 Shading Correction Safe POSO usais 493 Save Prod IMs clasica oda ei 494 Reventa id io 494 kanning aD CT Balch Prod Miss lies 494 Operor ID e e do o ed 494 NUmber ot SAI DI SS hisses it delo 495 Sampe Tray Tel e or il A 495 2 D Inspection Program Selection ooccccconcnococonnoncconcnnnonannnnoconnnnnnnnnnnnnannnnononnnnnnnannnnnnannncnnnns 496 RUNAINOIISE FTO aM ean sede Sante cota Sudan Cunuenaendsgdaialeld entalauGainmendseie yeahs 496 Deleting a 3 D CT Batch Progra secesii da did a o 501 13 2 D Inspections 503 Creating a 2 D Inspection POTASA 504 Creating 2D o Sieti A E cae eee 504 Adding 2 D CT Profiles to the Inspection Program cccccseeeeeeseeeeeeeeeeeeesaeeeeeseeeeeeeaeeeeeeaaeeees 505 Setting Up the Program Parameters cccccccsssccccseseeeceseecceseecseseeecsegeeecseuseeessaeesseneeesseaes 507 Setting up Beam Hardening Correction ccccccccccssseeeceesececceseecceeseeeceseeeseuseeessaneeessegeeesseass 507 Defining Wall Measurements vc cicciicc doses onic ew enticess tec he Mecete a 508 Sample Requirements for Measurement Definition oooccccoccnccccnccocnnononnnonannncnncncnonenononos 509 Defining the Wall Measurements ccccconcnccconcnncccocnonoconcnncnnnnnnnnannnnonon
414. ocus values for every kV demand value to be used This is done by switching the mode to Set Up Focus and then following the procedure detailed below When the focusing procedure is complete then switch the focus mode back to either Normal or Auto Defocus The focus of the X ray source is set up during the manufacturing process It is particular to the magnetic lens supplied and should only be necessary to be changed if the lens has been replaced The settings of the focus must be done by a trained engineer If the focus us to be adjusted then previously the filament demand should be correctly set the target should be checked for burning Manual Focus Coarse Focus J Fine Focus 3 l I I I I I I I I I I Prior to performing focusing check that the filament is correctly set in the focus cup the beam alignment is correct the filament demand has been set correctly and the target is not burned User Manual XTMO26 A1 51 X ray Controller To manually focus the X ray source for each kV setting to be used follow the procedure below 1 Place an object with small details into view of the X ray source using the manipulator Set a very high magnification so that the fine detail in the object can bee seen Set the kV demand on page 19 to the minimum value required to be focused Set the power or current demand on page 20 with the X rays switched on on page 22 Adjust the coarse focus slider until a s
415. ode is selected when the Intelligent Auto Conditioning checkbox is checked In this mode the user has more control over how Inspect X tries to auto condition the X ray source In this mode the vacuum level within the X ray source is monitored Doing so allows Inspect X to reduce the demanded kV to stop the X ray source from breaking down This enables faster conditioning of high kV X ray sources whilst minimising the number of breakdowns Radiation Survey Mode Radiation Survey Mode Beep whilst k rays are on Beep Frequency 2 seconds These controls allow the management of the radiation survey mode This is normally only used by engineers when checking the radiation protection of the system When this mode is enabled and the X rays are switched on a beep will be sounded by the computer at the specified frequency This will only function if the beeper within the computer has been connected The audible beep allows the engineer to know the X rays are still on when they are checking parts of the cabinet that are out of view of the computer monitor Pre Warning Delay This property is only available to a user that has successfully entered the Engineer password Pre Warning Delay a seconds The pre warning delay is the delay that occurs between when the user presses the X rays On button and when the X rays are actually generated This is a safety feature The length of the pre warning delay is controlled by these buttons The incre
416. of the samples being inspected need to be entered This enables the user to track inspection reports against specific samples Sample serial numbers 123 456 123 457 This above example shows an inspection program that inspects two samples each time it is run The serial number of each sample is entered before the program is run The entry of the serial number can be speeded up by using a barcode reader if the samples have barcode labels When the serial numbers have been entered then the Run button can be pressed to start the inspection If the inspection program inspects more than one sample per run and there is not a fully loaded manipulator as there are sample not loaded then it by clearing the checkbox for that sample serial number will stop the inspection program from trying to inspect a missing sample This avoids spurious failure information being added to the inspection report file 392 XIMO26 A1 User Manual How to Get More Out of Inspection Programs Results Table Whilst the inspection program is in running the status of the samples and components is displayed on the user interface if the Show Results Panel property is set in the Inspection Properties It is not possible to view the inspection results file until the run has been completed or aborted Results Samples Components for Sample 1 When an inspection program is run and completes then the results table shows the Pass Fail status of each component ins
417. ogram if configured on the inspection systems If any of these are running then a Warning window is displayed Warning A clean up Files task is about to be run This might interfere with the program being run Continue to clean up Files Delay the clean up operation Hours Mins Delay clean up For If the task is to be run immediately then press the Continue button The running of task may be delayed by entering the required delay into the Delay Calibration Hours and Mins numeric controls and then pressing the Delay button If there are no programs running then the clean up file task will run without displaying a warning Whilst the task is in progress no window is displayed User Manual XTMO26 A1 559 Scheduled Tasks 960 XIMO26 A1 User Manual 15 Validation Station When Inspect X has been configured as a Validation Station then this will be running upon a standalone computer The function of the validation station is to allow an operator to review images captured by an inspection on page 295 program to assess the faults identified In order to be able to do this the images folder on page 285 on both the acquisition computer on the inspection system and the validation station must both point to the same shared folder Note that there is a hidden folder Results Index in the selected images folder This folder and its contents must NOT be deleted or altered by the user Reviewing the results of an inspecti
418. oid Analysis jpg Documents Desktop i D My Documents My Computer a File name CSP Analysis ipa My Network Files of type All Image Files tif bmp ipal x Load image profile if available 900 x 900 pixels When the preview image is displayed then a left mouse click upon this preview image will zoom in on the image centred upon the point where the mouse click is made To reset the zoom so that the whole image is displayed left mouse click upon the preview image again When the required image file has been selected then press the Open button to open the image in the main X ray image window on page 169 To cancel the opening of an image press the Cancel button User Manual XTMO26 A1 129 Image Processing Image Profile Load image profile if available If the image profile file named lt image name extension gt xml is available in the same folder as the image then it can be loaded by selecting this checkbox The image profile file contains the state information about the image including the geometric magnification at which the image was captured and the last image analysis edit performed on the image By loading the image profile the last image analysis will be reloaded into the relevant image processing edit control and measurements can be correctly made on the image Save Image To save the image within the main X ray image window on page 169 to a file on disk press the Save Imag
419. ol Once the measurements have been set up then press the Get button to save the parameters in this action Erode Dilate Action This action applies image erosion and dilation to an acquired image Erode Dilate Image Pararmeters Get Get Erode Dilate Parameters Pararmeters Get To get the current erode dilate on page 226 parameters press the Get Parameters button This makes a copy of the current parameters within the erode dilate edit control 340 XIMO26 A1 User Manual Inspections BGA Analysis Action BGA analysis can be performed upon an acquired image by an action of this type BGA Analysis Get parameters et Get BGA Analysis Parameters Get parameters Get To perform BGA analysis on an acquired image it is necessary to set up the required parameters in the BGA Analysis on page 231 image processing tool This includes setting up any region of interest mask on page 270 Once the BGA analysis has been set up then press the Get button to save the parameters in this action BGA Void Analysis Action Analysis of voids within BGA solder balls can be performed upon an acquired image by an action of this type BGA Yoid Analysis Get parameters se Get BGA Void Analysis Parameters set parameters Get To perform void analysis on BGA balls within an acquired image it is necessary to set up the required parameters in the BGA Ball Void Analysis on page 237 image processing tool Thi
420. olation Interpolation The Interpolation checkbox controls how pixels are chosen during the reconstruction of the reconstructed image stack from the sinograms If checked then pixels will be chosen using linear interpolation which will produce a better quality volume but will take longer to reconstruct If unchecked then pixels will be chosen using the nearest neighbour method which is faster but will produce a lower quality volume Median Filtering Median Filtering None f 3x1 f Sxl An alternative noise reduction available within 2 D reconstruction is median filtering The median filtering may be used to reduce salt and pepper type noise within the sinograms No median filtering will be applied if None is selected If 3x1 or 5x1 is selected then the relevant size filter will be applied to the sinograms during reconstruction User Manual XTMO26 A1 477 2 D CT Acquisition Maximum Attenuation Maximum attenuation 1 0000 imm If the images in the reconstructed image stack are rather dark it is possible to correct for this if the CT data set is re acquired Normally the Maximum Attenuation value will be set to 1 0 mm However if the reconstructed images contain grey levels no greater than 16384 then the maximum attenuation in the image is 0 25 mm If the CT data set is to be acquired again then the grey levels may be re scaled by a factor of 4 by specifying that the Maximum Attenuation is 0 25 Area of Interest
421. omment Samsung ML 6040 Seres Page Range al Number of copies 1 Ga Select Current Page Pagez Collate 12 a pu Apoy The standard controls of the Windows Print dialog are not documented here but are available within the Windows help information User Manual XTMO26 A1 573 Menus Image Options General Image Option o eee Image notes Image annotation Image Size Fit To Page The controls on the Image Options tab specify how the image will be printed File Name If this check box is checked then the image s file name will be printed at the top of the first sheet Image Notes If this check box is checked then the image notes on page 150 will be printed alongside the image Image If this check box is checked then any colour annotation on page 221 on Annotation the image will be printed Fit To Page If this check box is checked then the image will be re sized to fit the page If unchecked then the size specified by the height and width text boxes will be used to re size the image How the image will appear upon the printed page is indicated by the display on the right side of this panel The box with the X represents the image To apply the changes to the image print options press the Apply button The print dialog may then be cancelled if no image requires to be printed only the image options to be updated 574 XIMO26 A1 User Manual Menus Print Preview Image To preview
422. on button Actions Acquire Image BGA Analysis Save Image Save Image Acquire Image BGA Void Analysis Save Image Save Image Then the required action has be to selected from the list on the New Action window This will add the action to the inspection after the currently selected action In the example above the action would be added after the Acquire Image action Note that any action can be manually added to either the main body of the inspection program or to the On Failure on page 394 actions The On Failure actions can only be added manually Calibration Actions It is recommended that the X ray Flux Calibration and Fiducial Calibration actions are used within an inspection program so that the program is self calibrating and will give consistent results Good practice is to add as the first component within an inspection program as one called Calibration or something similar In this component the required X ray Flux Calibration actions and a Fiducial Calibration action can be added Component Calibration Ba 421 Bish 241 An inspection program with a calibration component 378 XIMO26 A1 User Manual How to Get More Out of Inspection Programs Actions Array Flux Calibration ray Flux Calibration A Fiducial Calibration An example of the actions within a calibration component In the example above the calibration component contains two X ray Flux Calibration actions and a Fiducia
423. on consists of two stages First the sample to review on page 561 is selected and then the components are reviewed on page 563 Sample Review To review the components for a sample then the serial number of the sample needs to be entered A list of all the reports available for entered serial number is then displayed Operator ID 12345679 0 Serial number 000 2 Reports Inspection Date amp Time Motherboard PE4 02 02 2007 10 26 Operator ID Operator ID 123456 9 0 This control allows the entry of the operator ID of the operator validating the sample If this is not configured within the application properties on page 585 then this control will not be displayed Note that this is initially set to the operator ID entered on the Launch Screen on page 8 User Manual XTMO26 A1 561 Validation Station Sample Serial Number Serial number 000 12 The serial number of the sample to be reviewed is entered into this text box This may be done using a barcode reader if so required Once the serial number has been entered then press the List button to list the available reports If no reports exist for the entered serial number when the List button is pressed then this is indicated by the display of this error message No reports available Reports List Reports Inspection Date amp Time Motherboard PE4 02 02 2007 10 24 49 All of the reports available for the entered sample serial number will be l
424. on is controlled by the Edge Detect Controls on page 206 When the line on the X ray image is drawn in red it cannot find edges between which to measure When drawn in green the measurement is calculated Edge Detect Arc Measurement of 6 06 mm degrees This mode measures from an x ray image the radius of circular objects and arcs as well as reporting the angle of the centre of the fitted arc This reports the manual fit the operator makes as well as the automatic fit made by the software This is a complex control and requires some practice to operate it The operation of the control is described as follows The above image shows a measurement being made of the inside of a ring shaped object Manual Fit Initially we must manually fit as best we can the arc tool to the arc we wish to measure to give an immediate manual estimation of the arc and its direction To do this follow these step 1 Pick up the red and blue nodes and pull these to the start and end of the arc respectively If you are measuring a full circle don t close the circle but as shown above leave about 30 degrees unclosed 2 Pick up the cyan node in the centre of the tool and pull it to the centre of the arc to be fitted You have now manually fitted a regular arc to the arc to be measured and this is shown as a light green fit arc The readout R 0 664 mm is the manual measurement returned for the radius 202 XIMO26 A1 User Manual Image Processing
425. on is pressed To perform the operation the height of the sample above the manipulator table must be set first This is done using the Sample Depth on page 98 controls This is necessary to ensure that the point of interest on the sample stays in view Once the sample depth has been set press the Continuous button This will start the orbit at the currently selected speed When the button is pressed its legend will become Stop Pressing the button again will stop the orbit The speed of the orbiting is controlled by the manipulator speed on page 64 control and the Orbit Speed Slider on page 98 control The manipulator speed control can only be altered before the orbit is started The speed slider may be used to alter the speed and direction of rotation whilst the orbit is in progress Orbit Speed Control The right hand half of the slider controls the orbit speed in a clockwise direction and the left hand side controls the orbit speed in an anti clockwise direction When the slider s thumb see topic Slider Thumb on page 590 is in the centre of the control the orbit will stop Moving the slider to the right of the centre of the slider increases the orbiting speed with rotational movement in a clockwise direction Moving the slider to the left of the centre of the slider increases the orbiting speed with rotational movement in a anti clockwise direction Sample Height Sample height above table Maximum sample height 120 mm Whe
426. on of centre of H rotation 415 M me Beam Hardening 418 446 azards TO Health and Safety Information 3 h f e the number of projections Help Menu 569 High Voltages 3 Centre of rotati Iculation 415 ios How X rays are Generated 37 Centre of rotation calibration 435 Choosing the correct position for your l sample 440 Ensuring the electron beam is aligned 442 Fast CT 422 Fast CT calibration 436 How to choose the correct X ray settings kV amp UA 441 How to get more out of CT 439 Interpolation 475 Loading a CT profile 457 Manual calculation of centre of rotation e 415 Noise Reduction 475 Optimising your image 439 Projection setup 457 Properties 427 Reconstructed output data properties 431 Reconstruction properties 429 Reconstruction Quality 475 Reconstruction Size 475 Reducing noise in the projection images 443 Sample Setup 457 Selecting the required X ray filtration 446 Selection of the reconstruction computer 422 Setting the imaging conditions 457 Setting the sample s position 405 Setting the X ray conditions 457 Shading Correction 465 Using compensation pieces 450 Volume of interest 418 X ray filter definition 422 X ray scattering 454 Current Step Style 34 Image Procesing Add BGA Ball Count Results to Image Notes 231 Add BGA Ball Void Results to Image Notes 237 Add Drill Offset Results to Ima
427. on page 180 Yes Yes Binarise on page 189 Yes Yes Pseudo Colour on page 193 Yes Yes Background Subtraction on page 196 Yes Yes Measure on page 197 Yes Yes Annotation on page 221 Yes Yes Measure Range on page 207 No Yes Erode Dilate on page 226 No Yes Thresholding on page 228 No Yes BGA Ball Count Analysis on page 231 No Yes BGA Ball Void on page 237 No Yes Pad Array Void on page 246 No Yes Plated Through Hole Analysis on page No Yes 252 Package Void on page 259 No Yes Wire Sweep on page 266 No Yes Drill Offset on page 269 No Yes If the software is put into live X ray image mode and the currently selected image processing function is not supported in live mode then the software will automatically select Image Tone function User Manual XTMO26 A1 177 Image Processing Float Image Tool The current image tool is either shown directly below the image tool selection buttons in the Image Tools tab or alternatively it can be shown as a floating tool window It may be advantageous to display the image tool in a floating tool window when you need to access other function within Inspect X concurrently and do not wish to keep on switching the displayed tab on the main window To open the current image tool in the floating tool window press the Float Image Tool button so that it is pressed The icon will change to the following display The floating tool window will then be displayed To put the
428. on page 247 function Tit Analysis of voiding within a pad array Overall Voiding Fail Overall voiding Fail a 20 Ne The analysis of each pad can be passed or failed on two criteria the overall voiding within a pad and the maximum allowable size of individual voids within a pad This control specifies the overall allowable percentage of voiding Note that voiding within a pad is colour coded on the image Green areas are voids that are less than the Single Voiding Failure percentage voids larger that the Single Voiding Failure percentage are coloured orange and their percentage is displayed with the single largest void within a pad greater than the Single Voiding Failure percentage is coloured red User Manual XTMO26 A1 249 Image Processing Single Voiding Fail Single void Fail i ol o The analysis can be passed or failed on two criteria the overall voiding within a pad and the maximum allowable size of individual voids within a pad This control specifies the allowable percentage of voiding for each single void Note that voiding within a pad is colour coded on the image Green areas are voids that are less than this percentage voids larger that this percentage are coloured orange and their percentage is displayed with the single largest void greater than this percentage is coloured red View Results CAR View Results When the parameters that define the package void analysis have been entered to view
429. one of more components are inspected by a defined set of actions An inspection program can inspect one sample for example a PCB or it may inspect a number of samples Different inspection programs can be defined for different sample types Inspection Sample serial numbers 123456 789 0 Ca 123456 709 1 y 296 XIMO26 A1 User Manual Inspections Inspection Selection The current inspection program is selected using this control Valid inspection programs are listed in the drop down menu Once an inspection program has been selected then it may be run edited etc If the Inspection drop down list is selected for input and the program name is read in using a barcode reader then the program if it exists shall be automatically selected Sample Serial Numbers Sample serial numbers 1123456 789 0 we 123456 789 1 ny When running an inspection program the Sample Serial Numbers specify a unique identifier for each sample being inspected If the inspection program has been set up to inspect more than one sample upon each run then each sample has its own entry within this control If you have more then 5 samples within an inspection program then a scroll bar is displayed to allow you access to each sample s entry Each sample s entry within this control consists of two parts a text field for the entry of the sample serial number and a checkbox to define if the sample is present When an inspection program is set up to inspect more
430. one or more 3 D CT profiles e Setting up of the program parameters Creating 3 D CT Profiles 3 D CT profiles are created by setting up and performing 3 D CT acquisition on page 403 The 3 D CT profile is an XML file with the extension ctprofile xml that will be found in the folder that contains the CT data set when it has been acquired This file has the name of the CT data set and contains all the information required to re acquire the CT data set So the first thing that needs to be done is to mount the sample s and set up a 3 D CT acquisition Once the CT acquisition has been set up it may be added to the current 3 D CT batch program by pressing the Add to Batch button on the Acquisition tab of the CT Acquisition user interface Alternatively the CT data set can be acquired and the CT profile in the data set folder may be added to the 3 D CT batch program Adding 3 D CT Profiles to the 3 D CT Batch Program Once the required 3 D CT profiles have been created then these need to be added to the 3 D inspection program A 3 D CT Batch Program Operator ID operatorimcompan corn Number of samples 3 Sample tray type Sample Tray 4 iw ia gt 488 XIMO26 A1 User Manual 3 D CT Batch To create an 3 D inspection program enter the required name of the program into the 3 D CT Batch Program text box on the 3 D CT Batch Program window Then press the Create button The 3 D CT Batch Program window will open up to displa
431. onise the manipulator and imaging sub systems an adjustment factor has to be calculated that is then used to adjust the CT rotate axis speed The other calibration that needs to be calculated is the shortest imaging exposure for a projection that can be used without dropping frames during Fast CT The method of calibration is to run a Fast CT acquisition for the maximum number of frames after pressing the Reset button The CT data set on page 589 needs to be acquired at the minimum exposure for each projection i e 1 frame at the fastest frame rate for the imaging device A data file CTData txt that specifies the rotation axis angle and time at which each projection is acquired is saved in the CT data set folder To check if there are any dropped frames press the Calibrate button and select the required CTData txt file If Inspect X detects that there are dropped frames then it will report an error If dropped frames are detected then acquire another CT data set and the next fastest exposure Repeat the above process until the Fast CT speed is calibrated without reporting any dropped frames When this has been done then the Shortest Allowable Exposure for Fast CT can be entered If it is not possible to calibrate the Fast CT due to dropped frames by only adjusting the exposure of the imaging device then try adjusting the number of frames averaged for each projection Normally the default value for the Shortest Allowable Exposure when Inspe
432. ontextual menu is displayed Delete Messages Options Page Setup Print Print Preview e User Manual XTMO26 A1 579 Status Log Delete Messages This item is only enabled if one or more messages are highlighted within the status log Selecting this menu item will delete the highlighted messages from the status log Options The Status Log Properties on page 580 window is displayed This controls the behaviour of the status log Page Setup The standard Windows page set up dialog on page 5 6 is displayed This is documented in the Windows help system Print The standard Windows print dialog is displayed to allow printing of the status log Print Preview The standard Windows print preview dialog is displayed to preview the printing of the status log Status Log Properties Status Log Properties View Show errors Show warnings Show information Log Control Max log size 1024 KB we Cert ac View Message Types Show errors Show warnings Show information These check boxes control which message types are visible in the Status Log window The messages are still logged within the status log on disk even if they cannot be viewed within the window 980 XIMO26 A1 User Manual Status Log Maximum Log Size Max log size 1024 KE wv The status log is held within a file on disk The maximum size of this file is adjusted by this set of controls The maximum size is set either in
433. oqy com Hertfordshire Licence Agreement HP23 41 United Kingdom This window displays the version and copyright information for the Inspect X software The window is closed by pressing the OK button 578 XIMO26 A1 User Manual 17 Status Log The Inspect X application includes a status log that lists all the error warning and information messages This can be useful for monitoring the system s performance and for error information The viewing of the status log in the Status Log window is only available in the supervisor level user interface Status Log ES Date and Time Severity Status Message 29 10 2003 11 58 22 Information Application started in normal mode 29 10 2003 11 58 23 Information SR3 X Ray controller initialised 29 10 2003 11 58 24 Information X ray controller plug in loaded 29 10 2003 11 58 25 Information Manipulator plug in loaded 29 10 2003 11 58 35 Information Imaging plug in loaded 29 10 2003 11 59 50 Warning The manipulator is about to automatically perform a homing operation Please remove any objects from the manipulator tray before pressing the OK button 29 10 2003 12 14 33 Information Application started in normal mode 29 10 2003 12 14 33 Information SR3 X Ray controller initialised 29 10 2003 12 14 33 Information X ray controller plug in loaded 29 10 2003 12 14 34 Information Manipulator plug in loaded 29 10 2003 12 14 38 Information Imaging plug in loaded 29 10 2003 12 15 31 Warning The manipul
434. or X rays that pass through no material User Manual XTMO26 A1 109 Image Processing The relative positions of the intermediate grey level reference images compared to the black and white images can be adjusted by pressing the Points gt gt button The user interface will expand to display the information about the points The example below shows a 5 point correction Reference Images Frames to average ao v Black Image Black target 0 00 Percentage of white target 6 25 Percentage of white target 25 00 Percentage of white target 56 25 i Y White Image white target 64000 To adjust the relative placement of the grey images alter the relevant Percentage of White Target numeric control The grey level gradient indicates the placement of the grey levels by the red lines Each percentage is used to calculate the uA required to acquire that intermediate grey reference image To no longer display the information about the points press the Points lt lt button When the parameters have been set as required to generate the shading correction press the Generate button When acquiring the images to calculate a shading correction there should be no object between the X ray source and the imaging device 110 XTM026 A1 User Manual Image Processing Whilst the reference image are being acquired then the progress is displayed Reference Images Frames to average White Image Filter mm
435. or a look up table select the required item in the list and then press the Delete button A prompt is displayed to confirm the deletion may have CT Profiles or 2 D Inspection programs that reference this preset Deletion of the preset will cause problems f When deleting preset or look up tables you need to be aware that you 486 XIMO26 A1 User Manual 12 3 D CT Batch The 3 D CT Batch function allows for the creation of batch programs These programs run a number of 3 D CT acquisitions and can be run unattended providing the X ray filtration does not need to be changed between CT acquisitions If the X ray inspection system has an automatic sample changer then the CT Batch program will run the CT acquisitions for each sample The 3 D CT Batch Program window can be opened from the Programs menu item on the main menu bar A 3 D CT Batch Program Operator ID operatoriMcompan corn l pa ketm Sample tray type Sample Tray 4 E 3 D CT batch program test 1 iv Number of samples 3 3 D CT Batch window with Sample Changer A 3 D CT Batch Program Operator ID Loerator company com 3 0 CT batch program test 1 E 3 D CT Batch window licence for this function AN 3 D CT Batch is optional and is only available on systems that have a valid User Manual XTMO26 A1 487 3 D CT Batch Creating a 3 D CT Batch Program The creation of a 3 D CT batch program consists of a number of stages e Creation of
436. or table This is necessary to ensure that the point of interest on the sample stays in the field of view when orbiting If the point of interest on the sample is directly on the manipulator table then 0 0 should be entered If the sample s height above the table is known then enter the value into the Sample Depth edit box The units of measurement are defined by the Measurement on page 199 image processing tool The units will either be millimetres or inches User Defined Limits User defined limits not enabled On horizontal inspection systems it is possible to define limits to the travel on the X Y and Magnification axes This function is not available on the XT V 160 and XT V 130 systems User Manual XTMO26 A1 65 Manipulator Controller The purpose of being able to define user limits which restrict the movement of these axes more than the system allows is useful when large samples are being inspected The label next to the Limits button shows the present status of user limits being applied To define or clear user limits press the Limits button The Set Axis Limits window will be displayed Set Axis Limits Apply user defined limits Negative limit User limits Positive limit Limits 269 00 05 00 Apply user defined limits Negative limit User limits Positive limit Limits 285 D0 265 00 5 150 00 265 00 Set Set Magnification Axis Apply user defined limits Negative limit User limits Positive l
437. or the Properties on page 151 button on the Image Processing tool bar The properties are separated into the following groups Acquisition on page 428 Reconstruction on page 429 Output on page 431 Beam Hardening on page 434 Centre of Rotation on page 435 Fast CT on page 436 Panel Scan CT on page 438 User Manual XTMO26 A1 427 3 D CT Acquisition A Note that all property values are NOT saved until the Save button is pressed Acquisition Properties Acquisition Reconstruction Centre of Rotation Fast CT Calibration Panel Scan Calibration Auto update data set name Minimise ring artefacts displacement 15 pixels Z ray Control Maximum allowable consecutive ray trips i Reset X ray trip count iF no trip within 5 minutes Delay period after ray trip 10 seconds Restart Fast CT from current angle Data Set Name Upon completion of the acquisition of a CT data set the Data Set Name on page 423 will be automatically updated if the Automatically Update Data Set Name check box is checked If it is unchecked then the data set name will not be altered Minimise Ring Artefacts Displacement The Minimise Ring Artefacts Displacement numeric control specifies the maximum number of pixels used to shift the projection image when collecting a CT data set with Minimise Ring Artefacts on page 424 selected It is recommended that this value is not altered X ray Control If during the acq
438. or volume GE Memory required to open volume GE The Reconstruction Size section gives information about the reconstructed image stack that will be created by CT Agent using the current parameters The Memory Required to Open the Volume value depend upon the number of bytes per voxel that is used by the display program The number of bytes per voxel is set in the CT Properties on page 482 This is useful so that it can be checked that the volume being reconstructed can be opened on one of your computers Acquisition The acquisition of the sinograms see topic Sinogram on page 590 that will make up the CT data set on page 589 is controlled by this stage Acquisition Operator ID operatori company com Reconstruction computer THIS COMPUTER s Data set name Small Bladel x ray filter Copper W 1 6 mm Reconstruct Send email notification Minimum time Lo acquire 00 16 04 Hours Mins Secs User Manual XTMO26 A1 479 2 D CT Acquisition Operator ID Operator ID operatoriMcompan corn If configured in the application properties on page 585 then the operator s identity will need to be input into the Operator ID text box When the operator ID is entered then the CT data set folder shall be contained within a folder named the same as the Operator ID If not then the CT data set folder shall be a sub folder of the CT data folder Note that if email notifications on page 430 a
439. ossible to specify either standard JPEG or JPEG2000 JPEG on page 589 A lossy compressed see topic Lossy Compression on page 589 image file format supported by most image editing and display applications High compression values can cause many visible artefacts within the image This format is widely supported by third party applications JPEG2000 on page 589 A newer lossy compressed image file format only supported by recent image editing and display applications High compression values cause much less visible artefacts within the image and better image compression hence smaller images than standard JPEG This format is not very widely supported by third party applications JPEG Compression Compression J TAE Higher quality More compression The level of compression within a JPEG or JPEG2000 image file can be specified using the slider Numerically smaller values compress the image file less but retain better image quality Larger numerical values compress the file more but can introduce artefacts within the image The preview image can be used to assess the trade off of image quality against file size Image Intensifier Fields This button is only available on inspection systems fitted with a multiple field image intensifier This button allows the easy switching between the image intensifier fields The required field is selected from the pop up menu that is displayed when the option button next to the Image Inten
440. ou through the process which consists of the following e Auto conditioning the source to its maximum kV This is optional e Setting up the X and Y shifts e Calculating the optimal filament demand settings for all X ray conditions Filament Set Up 1 Make sure that there is no sample in view 2 Press the Start button to calibrate the Filament Auto conditior Before starting the process there must be no sample in view To start the Recalibration process press the Start button If the X ray source has recently been auto conditioned then the Auto Condition checkbox may be cleared Filament Set Up 1 Make sure that there is no sample in view 2 Press che Start button to calibrate the Filament Auto conditioning User Manual XTMO26 A1 47 X ray Controller If the Auto Condition checkbox is checked then the X ray source is auto conditioned to its maximum kV and held at this kV for one minute If the X ray source breaks down at any point then the process is repeated until it has been held at its maximum kV for one minute Filament Set Up 1 Make sure that there is no sample in view 2 Press the Start button to calibrate the Filament oe PT TTL eye Setting up X amp Y Shift The X and Y shifts are then set up The X and Y shifts are determined at three kV values and then the other kV values are calculated automatically Filament Set Up 1 Make sure that there is no sample in view 2 Press the S
441. out a rectangle that defines the area to be viewed in the main imaging window The manipulator will start to move when the mouse button is released Map Scanning Lx Lal Most of the functions available in the map toolbar are also available from the map context menu To display the map context menu right click upon the map image Open Map Save Map Print Map Sentence as a Pass Sentence as a Pailure Clear Status Information Switch bo Mormal Mode User Manual XTMO26 A1 85 Manipulator Controller Define Map Scan Area Scan When the Scan button is pressed the Define Map Area window is displayed This window guides the user through the process of scanning a map Define Map Area Define Grea Mowe the manipulator to the corner of the area to scan The press the next button Moye the manipulator to the opposite corner of the area to scan The press the next button gt Enter the name For the scan area To define a new area to map move the manipulator to one corner of the area then press the Next gt button Then move the manipulator to the diagonally opposite corner of the area and press the Next gt button At this point the new map scan area has to be named This name will appear in the option menu for the Scan Area button if required When the name has been input press the OK button To cancel the creation of a new map scan area press the Cancel button When the OK button is pr
442. ove any effects due to non uniform illumination of the X ray image Image Flattening can be used This process equalises the grey scale levels within the image to produce to a better pad array void analysis Image flattening creates a reference image that is used to remove the non uniformity of intensity The reference image is only viewed when defining the image flattening L eee Flatten Press the Flatten button and the Image Flattening dialog will be displayed Define Image Flattening Adjust the slider until the artefacts are removed From the image Then close the window DIE La User Manual XTMO26 A1 247 Image Processing Adjust the slider so that the voids in the die attach in the X ray image are removed in the reference image The pad array void analysis image with the voids flattened When this has been done close the Image Flattening window by pressing the close button at the right hand end of the window s title bar If a Void Edge Threshold had already been defined it will need to be adjusted after any alteration to image flattening To remove any image flattening press the Flatten button set the slider to the left hand end and close the window Define Pads The pads are identified using the Region of Interest on page 270 tool Each pad is a separate area that is an inclusion within the defined region of interest The method for defining the region of interest for the pads is as follows
443. ovement upon the axis is allowed flo Movement upon the axis is not allowed as the axis is locked Joysticks Fotate There are two types of joystick controls available There are the physical joysticks on the inspection system and as an alternative there are software joysticks By default the physical joysticks are enabled on all systems when fitted The type of joysticks being used is specified in the manipulator properties on page 78 If the software joysticks have been enabled they appear on the manipulator controller user interface To move the manipulator using a software joystick click upon the green control point within the required joystick with the left mouse button The control point s colour will change to red to indicate that the joystick is actively being used Whilst holding mouse button down move it in the direction that you require the manipulator axis to move When movement is required to stop release the mouse button and the control point within the joystick will become green again and return to its central position 68 XIMO26 A1 User Manual Manipulator Controller Supervisor Level The supervisor level manipulator user interface consists of two parts the manipulator map on page 82 and the manipulator controls on page 69 Homing Preparing the Manipulator For Use Before a manipulator can be used it must be homed This is necessary each time either the computer or the system is switched on To i
444. owable failures is set to 0 then the failure logic as specified by the inspection properties on page 358 shall be performed upon the first failure detected If set to more than 0 then the inspection program may be terminated depending upon how the on failure properties have been set User Manual XTMO26 A1 305 Inspections Sample Management An inspection program consists of a number of samples on which a number of components are to be inspected Sample New Sample Mer To add a new sample to an inspection press the New button Samples are automatically named as Sample 1 Sample 2 etc This is just for identification whilst editing the inspection program When the program is run the samples are identified in the inspection report by their sample serial numbers When a new sample is created the component on page 310 list will be cleared as there will be no components defined for the newly created sample Step and Repeat Sample When an inspection program is being programmed for samples that have a repetitive pattern then the Step and Repeat Sample function makes programming easy Once the inspection actions for the first sample have been programmed these can be easily replicated by selecting the sample in the sample list and then pressing the Repeat button spaced samples If the spacing between varies then the positioning of acquire The step and repeat sample function will only work correctly fo
445. oystick is actively being used Whilst holding mouse button down move it in the direction that you require the manipulator axis to move When movement is required to stop release the mouse button and the control point within the joystick will become green again and return to its central position User Manual XTM026 A1 77 Manipulator Controller Properties The properties of the manipulator controller are those values that control its behaviour These properties are available within the Properties Window on page 583 that may be opened from the Inspect X main menu on page 577 or the Properties on page 151 button on the Image Processing tool bar Note that all property values are NOT saved until the Save button is pressed The Save button saves the updated properties to permanent storage so that they will be used the next time the Inspect X application is run The Revert button will reset all the properties that have been altered but not saved to their last saved value The Close button closes the Properties window Not all of the controls are available in the manipulator properties window This is because various features are only available on specific manipulator configurations Mowe to Filament Change Position axis position for turntable Datum 420 00 Set Map Acquisition Quality Speed Map Resolution Normal High very High Map Calibration Calibrate Engineer Level Display joysticks on
446. p moving To perform the operation the height of the sample above the manipulator table must be set first This is done using the Sample Depth on page 98 controls This is necessary to ensure that the point of interest on the sample stays in view Once the sample depth has been set press the Once button This will start the orbit at the currently selected speed When the button is pressed its legend will become Stop Pressing the button again whilst the orbit is in progress will stop the orbit The speed of the orbiting is controlled by the manipulator speed on page 64 control and the Orbit Speed Slider on page 98 control The manipulator speed control can only be altered before the orbit is started The speed slider may be used to alter the speed and direction of rotation whilst the orbit is in progress When the slider s thumb see topic Slider Thumb on page 590 is in the centre of the control the orbit will stop Moving the slider to the right of the centre of the slider increases the orbiting speed with rotational movement in a clockwise direction Moving the slider to the left of the centre of the slider increases the orbiting speed with rotational movement in a anti clockwise direction When the rotation angle nears the initial rotation angle the orbiting speed automatically slows down User Manual XTM026 A1 97 Manipulator Controller Orbit Continuous The Orbit Continuous mode continues to rotate the sample until the Stop butt
447. peat definition The manipulator will be moved to the position specified by the Acquire Image action and will display a crop box 382 XIMO26 A1 User Manual How to Get More Out of Inspection Programs Defining position of first image in Step and Repeat The purpose of this crop box is to define the position of the items to be lined up in this case the BGA balls The crop box needs to be adjusted so that you can use it to align the last image of the Step and Repeat action In the image above the crop box is set to bound the BGA balls within the image At the same time that the crop box is displayed on the image then the Step and Repeat window is displayed This is used to define how many rows and columns there are in the matrix of items to be examined Step amp Repeat E Specify positions manually amp Y Specify positions by increment X amp Specify positions by increment Rotate 1 Move the manipulator to the position on the last Feature that corresponds to the First position on the initial Feature 2 Enter number of steps relative to the main X ray image and press Ok Mote that this Function works For regularly spaced identical Features Number horizontally Number vertically Step and Repeat definition User Manual XTMO26 A1 383 How to Get More Out of Inspection Programs There are three modes of adding actions using step and repeat e By manually specifying the end position in th
448. pected The results of the inspection are saved in an XML http www w3 org xml data file When the inspection report is to be examined on a Validation Station then the Results Table can be hidden by clearing the Show Results Panel property in the Inspection Properties The report is then checked on the Validation Station Viewing the Inspection Report To view the results for a sample double click upon the sample row within the results table Similarly double clicking upon a component row will display the results for that component To view the results of the whole inspection program press the View All button User Manual XTMO26 A1 393 How to Get More Out of Inspection Programs What Happens when a Failure is Identified When an inspection program is run and it finds a failure then there are three basic things the program can do either to continue with the inspection to identify all the failures to run the On Failure actions or to abort If a failure occurs for either a Fiducial Calibration or an X ray Flux Calibration action then the inspection program will always be aborted as these are fatal errors The behaviour of the inspection program when a failure is identified is controlled by the On Failure properties in the Inspection Properties The flow chart below shows the options This is an action in the main inspection program Execute action P prog Failure identified The number of actions is defined by t
449. pection program All names and locations of images are automatically updated in the new actions within the components added to the inspection program Step and Repeat Actions This function can be used to automatically program multiple identical actions within a component This is useful for programming such things as the analysis to BGA balls when the whole BGA cannot be viewed within one image User Manual XTMO26 A1 381 How to Get More Out of Inspection Programs Example of Step and Repeat This section describes an example of how to step and repeat actions for the analysis of BGA balls The example shows a BGA that is on a grid of 17 balls by 17 balls The BGA is to be analysed for BGA voids using images that contain 5 balls horizontally and 4 balls vertically BGA for Step amp Repeat The first image is acquired for the 20 balls in the top left hand corner of the BGA is analysed for BGA voiding and then added to the inspection program The image below shows the actions added to the component Note that the Save Image actions were added automatically when the recorded actions were added to the inspection program BGA Analysis Save Image Save Image Acquire Image EGA Void Analysis Save Image Save Image Highlighted actions to be repeated To step and repeat these actions the actions need to be highlighted in the actions list as shown above Then the Repeat button below the actions list is pressed to start the Step and Re
450. pleted at 15 14 13 18 September 2009 Serial Number 123 456 789 FAIL Sample 123 456 789 Status FAIL Slice Stack Middle Slice Number 1 Status FAIL Height above datum 60 000 mm Manipulator Control Manipulator Home There are limited controls over the manipulator To stop the manipulator moving press the Stop button To home the manipulator press the Home button To move the manipulator to the load position press the Load button When the manipulator is moving a status label is displayed to warn the user 942 XIMO26 A1 User Manual 2 D Inspections X ray Control x ray Controller Switch x rays Off Auto Condition There are limited controls over the X ray controller There is a status label that shows the current state of X ray generation To switch the X rays off press the Switch X rays Off button To auto condition the X ray source then press the Auto Condition button If Intelligent Auto Condition has been selected in the X ray controller properties then the Auto Condition on page 17 window will open If not then extra controls will be displayed to allow the auto conditioning of the X ray source x ray Controller Switch X rays Off 450 LY 450 Auto Condition FAME ES Vacuum value o The required maximum kV to which the X ray source is to be conditioned can be selected When auto conditioning is satisfactory then this is switched off by pressing the Switch X rays Off b
451. ply button If the effect is not as required then press the Undo Image Processing on page 149 button on the Image Processing Tool Bar and try again with a different number Thresholding The Thresholding function may be used to highlight a range of grey levels and to calculate the percentage of the image that is defined by the highlighted area Dark Threshold EJ J Light Threshold a J o Highlighted 32 03 7 Add To Motes 228 XIMO26 A1 User Manual Image Processing The area highlighted in the X ray image is defined by two thresholds a dark and a light threshold If the dark threshold is a grey level that is numerically less than the light threshold then the grey levels between the dark and the light thresholds are highlighted and the percentage of the image is calculated for this area If the dark threshold is a grey level that is numerically greater than the light threshold then all of the grey levels not between the dark and the light thresholds are highlighted and the percentage of the image is calculated for this area Thresholding to get light areas highlighted The same thresholds but swapped to highlight dark areas Dark Threshold Dark Threshold Da F B Ea 4 To set the grey level that defines the dark threshold either change the value of the slider by clicking upon its thumb see topic Slider Thumb on page 590 with the left mouse button and dragging it long the slider or by sampling from the X r
452. position Get Higher precision Include map image Region of interest None X ray Flux Calibration array Flux calibration 100 25 wt The sample needs to be viewed using the repeatable X ray conditions to enable high quality analysis of the image This is achieved by using an X ray flux calibration on page 28 This control selects the X ray flux calibration for this action Use X ray Flux Calibration Use X ray Flux calibration w It is possible to just use the current X ray conditions for an acquire image action This is NOT recommended if repeatability of the inspection program is required This check box specifies if an X ray flux calibration is used by this action Get X ray Conditions ray conditions Get If an X ray flux calibration is not being used then Get X ray Conditions button is enabled To record and save the present X ray conditions press this button 334 XIMO26 A1 User Manual Inspections Manipulator Position Manipulator position et When the sample is to be visually checked the position of the component on the manipulator is required Pressing the Get button will update the action s manipulator position to the current manipulator position Note that this position will have position correction applied to it when running the inspection program if a position calibration action precedes the acquire image action within the inspection program This is all automatically handled within the I
453. prompt will be displayed Warning Please remove any sample From view BEFORE collecting a shading correction reference Please change the ray Filtration to 4 000 mm of Copper Do you wish to continue The shading corrections will then be updated Progress will be displayed in the 2 D Inspection window Then the CT data sets will be acquired During this progress will be displayed in the 2 D Inspection window Sinograms will be displayed in the main X ray image window 540 XIMO26 A1 User Manual 2 D Inspections After the CT data sets have been acquired then Inspect X will wait for the CT data sets to reconstructed When this is complete then the wall measurements will be performed XDD paca l m m aA Operator 1D Operator Nos 2 D Inspection program Small Blade ri Serial numbers 73 455 750 HO 234 567 200 io Calibrate Run Manipulator xray Controller Stop i Load Switch X rays Off Supervisor Mode Howe Auto Condition Upon completion the 2 D Inspection window displays the status of each sample inspected next to the sample s serial number This is a button and when pressed will open the HTML report if available to display the results information for that sample User Manual XTMO26 A1 541 2 D Inspections Sample Small Blade 7 Serial Numbers 123 456 789 XT EK Status FAIL Inspection stated at 15 02 29 18 September 2009 and com
454. provided As the slider thumb on page 590 is moved an indicator is drawn on the grey scale at the bottom of the histogram to show the grey level of the slider s position Gives a result like F sane j i 190 XTM026 A1 User Manual Gives a result like Histogram Grey Level 27646 Pixels 1663 Max 65260 Min 1536 Average 22650 Std Dey 76666 0 Image Processing The histogram shows the grey level distribution for the image displayed within the main X ray image window If the image processing is in Live mode then no histogram is available It is available for captured images and Live Processing mode The grey level information in the histogram can be used to help set the binarise thresholds As a binarise threshold slider thumb on page 590 is moved an indicator is drawn upon the grey scale at the bottom of the histogram to show the current grey scale value of the slider Grey Level 46126 Pixels 7949 Max 65250 Min 15 36 Average 22650 Std Dey 276666 0 When the mouse is moved over the body of the histogram the grey level information corresponding to the mouse position is displayed below the histogram The information displayed is the grey level and the number of pixels in the image that contain that grey level User Manual XTMO26 A1 191 Image Processing The other information displayed describes the grey levels in the image The values displayed are the Maximum grey level in the image the M
455. r regularly A image or visual check actions will not be correct 306 XIMO26 A1 User Manual Inspections When the Repeat button is pressed then a check is made on the actions defined within the components for the selected sample Step and repeat can only be performed when there is at least one Acquire Image on page 332 of Visual Check on page 334 action within the sample s inspection actions If is not true then an error message will be displayed and the step and repeat function will not be performed Providing there is at least one of these actions then the Step and Repeat Window will be displayed and the manipulator will be moved to the first position within the actions list Step amp Repeat Specify positions manually amp Y Specify positions by increment X amp 1 Specify positions by increment Rotate 1 Move the manipulator to the position on the last Feature that corresponds to the First position on the initial Feature 2 Enter number of steps relative to the main X ray image and press Ok Mote that this function works For regularly spaced identical Features Number horizontally Number vertically There are three modes of step and repeat Specify positions manually 0 Es Y Specify positions by increment x amp Y 05 Specify positions by increment Rotate User Manual XTMO26 A1 307 Inspections Step and Repeat Specify Manually When the manipulator is at the sta
456. r the system is reached then the readout box is coloured yellow to indicate this 106 uo Power limit reached User Manual XTMO26 A1 21 X ray Controller Switching X rays On and Off Switch X rays On The generation of X rays can be switched on and off by pressing this button The legend on the button always states what action will happen when the button is pressed namely Switch X rays On and Switch X rays Off If the interlock is broken then it will not be possible to switch X rays on After the button is pressed to switch the X rays on there is a delay before the X rays are actually generated by the X ray source This is the pre warning delay and is a safety feature The length of the pre warning delay is set in the general properties on page 36 panel Whilst the system is waiting for the pre warning delay to elapse it will update its X ray status read out to indicate that the system is in th pre warning mode X ray Status This panel shows the current status of X ray generation The states are as follows Interlock not engaged X rays cannot be generated nor can the X ray source be auto conditioned If the interlock is broken then the X rays will switch off automatically and will not be able to be switched on again until the interlock is re engaged The interlocks for X ray generation include the following The door on the X ray inspection system The interlock key switch on the X ray inspection sy
457. ral purpose computer It is likely that loading of third party software programs or the alteration of the Windows 7 or Windows XP Control Panel settings will interfere with the correct operation of the computer Do not load any third party software or alter the Windows 7 or Windows XP settings The loading of any third party software onto this computer unless instructed to do so by Nikon Metrology will invalidate your warranty Trademarks All brands company and product names are trademarks or registered trademarks of their respective holders and are hereby acknowledged User Manual XTMO26 A1 1 Introduction Copyright Copyright Nikon Metrology All rights reserved This publication or parts thereof may not be reproduced in any form by any method for any purpose Products that are referred to in this document may be either trademarks and or registered trademarks of the respective owners Nikon Metrology or any of its group companies make no claim to these trademarks The use of these Nikon Metrology products services and materials is subject to the Nikon Metrology s General Sales Terms and Conditions Products that are referred to in this document may be either trademarks and or registered trademarks of the respective owners Nikon Metrology make no claim to these trademarks While every precaution has been taken in the preparation of this document Nikon Metrology assume no responsibility for errors or omissions or for damages res
458. ram drop down list and then pressing the Delete button This will delete the program and associated data files but will not delete the results data that has been previously created by the program User Manual XTMO26 A1 501 3 D CT Batch 902 XIMO26 A1 User Manual 13 2 D Inspections The 2 D Inspection function provides a program function to automate the measurement of wall thicknesses It is particularly useful for the measurement of walls within turbine blades The 2 D Inspection function is only available on systems fitted with a linear detector that have been configured and licenced for this function A 2 D Inspection program consists of one or more 2 D CT profiles and a number of wall thickness measurements A 2 D CT profile contains all the information to perform a 2 D CT acquisition on page 455 If different X ray or imaging conditions are required to inspect different sections of the sample then different 2 D CT profiles will be required For example a turbine blade may require different conditions for the aerofoil and the root 2 D Inspection Program Wall Measurements for 2 D Wall Measurements for 2 D Slice D CT Profile The 2 D Inspection window is displayed when logged in at supervisor level When logged in at operator level then the 2 D Inspection Operator window on page 536 is displayed in place of the main controls window 2 D Inspection Operator ID Operator No 6 2 D
459. rder Each position within a saved position set is named for easy identification Any number of saved position sets can be created and recalled for future use Saved Postion Set Board Revision 14 wt Saved Positions 90 XIMO26 A1 User Manual Manipulator Controller Select Saved Position Set Saved Position Set Board Revision 14 ha Any number of different sets of saved positions can be stored by the Inspect X software Use the Saved Position Set control to choose the required saved position set from the list New Saved Position Set To create a new saved position set press the New button Mew Position Set Please enter the name For the new position set Board Revision 1C Use the text box to define the name for the new saved position set and then press the OK button This will create a new saved position set of the name entered and will select it in the Saved Position Set on page 91 control To abort creation of a new saved position set press the Cancel button Delete Saved Position Set To delete a saved position set select the set to delete in the saved position set list and then press the Delete button User Manual XTMO26 A1 91 Manipulator Controller Saved Positions This list display the saved positions within the current selected saved position set To move to a saved position either click upon the name of the required position to highlight it for example IC6 in the diagram and th
460. rds you will have to enter the password before you can click on the Run button The Run button will not be enabled until a valid password has been entered Only the supervisor may set the passwords for the Inspect X software Main Screen The functions available within the Inspect X application depend upon the access level determined by the entry of a password at the Welcome Screen on page 6 The Inspect X application fills the screen to show the X ray image and controls r Leal E lau F LPG A i He JAN LEJER FH d HIBIFIEI SILA iliii a A Mo LO p A i 4 l j a 1 l User Manual XTM026 A1 9 Getting Started 10 XTMO26 A1 User Manual 4 X ray Controller The X ray controller allows the user to control the generation of X rays The functions available in the X ray controller vary depending upon the access level e The operator level user interface on page 11 has the essential controls e The supervisor level user interface on page 19 has extra functions to allow the supervisor to set up parameters that control the X ray source Operator Level The X ray controller on the operator level interface is show below This is not shown as a separate window but is contained on the operator s main window Cas a CAUTION X rays produced when energized No unauthorized use kV Control X ray Penetration 100 w MU ere This user interface allows the user to control t
461. re Out of 3 D CT Obviously one way of increasing the amount of X rays is to expose for longer but you have to wait for good results There are several factors involved in getting as high a signal to noise ratio in your images as possible Choosing the Correct Position for Your Sample During a CT scan the sample being scanned should not leave the sides of the imaging window at any rotation angle If part of the sample leaves the sides of the imaging window then information about that part will not be obtained from some rotation angles However since those parts pass in front and behind the region you are scanning they will affect the images of those parts Having information from only some rotation angles and not all can lead to artefacts in your reconstructed volume If parts of the sample project up above the top of the image or down below the bottom of the image then this is not a problem as they are then not visible at any rotation angle and so will not affect the reconstruction of other parts of the sample being scanned So to obtain the best resolution scan of your sample move the magnification axis so that it fills about 90 of the width of the image Decrease this if you need to scan more height but bear in mind that the resolution will also decrease The resolution you will obtain is approximately the width of the sample divided by the number of pixels horizontally across the detector So if you are scanning a sample with a maxim
462. re enabled then the Operator ID must be a valid email address CT Data Set CT Data Set CT Data Set ER CT Data Set CT Data Set CT Data Set Falder Folder Folder This text box will not be displayed if not configured within the application properties Reconstruction Computer Selection The reconstruction computer on which the volume is to be reconstructed is selected by the Reconstruction Computer drop down list The computers that are available in this list are controlled by the CT properties on page 482 CT Agent must be running on the selected reconstruction computer CT Data Set Name Data set name Small Blade The CT data set name is set by the Data Set Name text box The data set name specifies the folder in which the CT data set is stored on the reconstruction computer and the name of the sinograms and the reconstructed volume 480 XIMO26 A1 User Manual 2 D CT Acquisition X ray Filter 1 600 mm If an X ray filter is being used to harden the X rays to improve the quality of the reconstructed volume then the details of this filter are entered into the X ray Filter controls If the CT Profile for this data set is reloaded then a prompt will be displayed to ensure that the same X ray filter is reused Reconstruction Reconstruct If the CT data set is to be reconstructed automatically by CT Agent after acquisition then check the Reconstruct check box If this box is unchecked then the reconstructed ima
463. re valid is specified within the Image Processing Properties on page 294 User Manual XTMO26 A1 497 3 D CT Batch When the program is run a check is made to see if the shading corrections are valid If they need to be updated then a prompt will be displayed Warning T Please remove any sample From view BEFORE collecting a shading correction reference Please change the ray Filtration to 4 000 mm of Copper Do you wish to continue The shading corrections will then be updated Progress will be displayed in the 3 D CT Batch Program window A 3 D CT Batch Program Operator IL Mumber of semples 3 Sample tray Eype 3 0 CT batch program Shading corrections Sample Loading sample CT data set Unloading sample operaton company com Sanple Tray d est 1 Evil l TaLe Status verifying shadng corrections Wreiting weelting waiting waiting Estimatec time to conpleton 00 07 03 Fours Mins 5ecs The shading correction for the CT profile Std CT is being updated 498 XIMO26 A1 User Manual 3 D CT Batch Then the CT data sets will be acquired During this progress will be displayed in the 3 D CT Batch Program window If delays have been configured between each CT acquisition then the delay is shown and how long to wait is updated whilst the delay is in progress A 3 D CT Batch Program Operator ID operator ii omparr Com Number of samples 3 Sample tray type 3 D CT batch pro
464. recalibrated then the program will automatically do this It is no longer necessary to add X ray Flux Calibration on page 322 actions to the program You may still add these if you require the X ray flux calibrations to be recalibrated every time the program is run Creation When an X ray flux calibration is created it records the X ray conditions the imaging conditions the manipulator position and the mean brightness of the image It is possible to create any number of X ray flux calibrations as they are uniquely identified by their name As the mean image brightness is used then it is highly recommended that the manipulator is moved to view an X ray filter of the appropriate thickness to ensure that there is a distinct peak in the histogram of the image as near to the centre of the greyscale range Appropriate X ray filters may be a thin sheet of copper e g 0 5mm thick 1 0mm thick etc These filters need to mounted on the manipulator table at a fixed position so that the X ray flux calibration may be re calibrated Often the filters are mounted upon a fixture that holds the samples on the manipulator table The reason for having a distinct peak in the histogram allows for the software to re adjust the X ray beam current uA upon re calibration to re create the same image brightness Grey Level 22704 Pixels 601 Histogram of a good filter Grey Level 26672 Pixels 0 Histogram of a too dense filter no distinct peak can be se
465. removed From the image Then close the window a IM Adjust the slider so that the PTHs are distinct in the reference image Reference image with the PTHs separated from each other and the background When this has been done close the Image Flattening window by pressing the close button at the right hand end of the window s title bar If a Solder Edge Threshold had already been defined it will need to be adjusted after any alteration to image separation To remove any image separation press the Separate button set the slider to the left hand end and close the window User Manual XTMO26 A1 253 Image Processing Region of Interest It can be helpful to obtain a good result to define a region of interest to mask out objects that might cause problems when analysing the fill level of PTHs To define or update a region of interest or to load a saved region of interest press the Region button This will open the Region of Interest on page 270 window When the region of interest is defined close the window by clicking upon the close box on the right hand end of the window s title bar Smart Filter ee eee SmartFilber TLL In PTH Fill Analysis is tt possible to use the Smart Filter function to automatically remove features in the image that are considered to be not PTHs PTH fill analysis image using Smart Filter PTH fill analysis image without Smart Filter 254 XIMO26 A1 User Manual Image Processin
466. rent thicknesses of material If the sample being scanned is made all of one material then the beam hardening artefacts can also be reduced using software This is preferable as filters reduce the overall amount of X rays hitting the detector and this unless the image exposure is increased to compensate will produce noisier images However it is still recommended that you use a thin filter when the voltage rises above about 70kV AN Be sure to keep the filter in place when collecting the white reference image User Manual XTMO26 A1 449 How to Get More Out of 3 D CT How Do Know What Type and Thickness of Filter to Use You should choose a filter that has similar material properties i e density and atomic number to the sample you are scanning So for example if you are scanning a plastic object then use a plastic filter If you are scanning a silicate or aluminate rock sample then use an aluminium filter If you are scanning a denser metal sample then use a metal filter e g copper Choose a filter thickness to reduce the brightness of the unimpeded beam away from the sample to prevent saturation of the detector Do this in preference to reducing the current uA as the latter reduces the number of all X rays whereas the former only reduces the number of lower energy X rays This helps reduce beam hardening artefacts Compensation Pieces en nn ee _ A m f a he The compensator e pl
467. ress the Image Tone button on the control tool bar or press the Image Tone button on the image processing function selection control This image processing function is available for both live and captured X ray images Grey Level Pixels Max 65200 Min 1536 Average 22650 Std Dey 26666 0 Tone Curve 180 XITMO26 A1 User Manual Image Processing Tone Curve The tone curve shows how the image data is transformed before it is displayed on the monitor The left hand vertical axis is the output data axis and the bottom horizontal axis is the input axis Every grey scale on page 589 value in the image to be displayed is re mapped using the curve The curve is defined by a number of points By default and when the curve is reset by pressing the Reset on page 189 button the curve is a straight line defined by the two end points These end points may be moved along the edges of the tone curve control More points may be added to the tone curve by clicking the mouse using the right mouse button on the line defining the tone curve This will display the following menu Add Point Delete Point Selecting the Add Point menu entry will add another point to the tone curve at the point the mouse click was made To remove an existing point click upon the point using the right mouse button and select the Delete Point menu entry Points added to the curve can be moved anywhere in the tone cur
468. righter than the target value of 64000 Do vou wish to continue It is recommended to not to continue and to correct the X ray uA used Multi Point Shading Correction Multi point shading correction is more advanced than the Standard on page 103 mode It uses between 2 and 12 images to calculate the required compensation It uses a black and a white image with a variable number of intermediate grey images depending upon the number of points chosen by the user For example if a 5 point correction is created then it is created from a black image a white image and three intermediate grey images A polynomial of 1 order less than the number of images collected is fitted to the image data to calculate the shading correction The maximum order of polynomial fitted is quintic fifth order and shading corrections with more than 6 images use a quintic polynomial The modelling of the response of the imaging device using a multi point shading correction is more accurate and improves the quality of the X ray images particularly in the darker areas CT acquisition uses multi point shading correction rather than standard shading correction as this results in better CT data sets Multi point shading correction can also be used to acquire radiographic images The advantages of a multi point shading correction compared to a standard shading correction are the following e More images and a fitted polynomial allow for higher quality modelling of
469. rkest points in the image are higher than the grey level when the X rays are off Increase the kV until all parts of the sample are penetrated Grey Level Pixels Sample viewed face on User Manual XTMO26 A1 407 3 D CT Acquisition Grey Level Pixels Sample viewed rotated through 90 degrees In normal practice none of the image should be saturated however if the a volume of interest is being used and a compensator is being used then it is allowable to have parts of the image not being used for reconstruction to be saturated To make sure that this condition is met check rotate the sample by pressing the Rotate button and check the live histogram as the sample rotates Note that the collection of the white reference image will ensure that this condition is enforced It may be necessary to use a filter on the X ray source s output window to adjust the X ray flux This has two effects The first is to reduce the contrast between the parts of the image formed by X ray penetrating large path lengths or dense material and the parts formed by X rays not passing through the object The second is to harden the X rays by removing low energy X rays If you are using a high voltage over 50kV then it is recommended to use a copper filter even if it is only very thin about 0 25mm This will reduce the range of energies in the beam so and make it more monochromatic Use a thicker copper filter for higher voltages
470. rly in the CT data If you think of your projection images as a blurred version of the 3D volume the blurring being along the direction that the X rays travel then CT reconstruction has to undo that blurring It does this by applying a high pass filter to the images which undoes the blurring Unfortunately this enhances the noise which is usually high frequency speckling in the images The way to get good CT data then is to minimise the noise in the projection images Many micro focus sources are limited in the power they can output while still maintaining a small focal spot size The noise in micro focus X ray images is often due to this relatively low X ray flux being spread over the large number of pixels in the detector each with great well depth Even with a reasonably constant flux the number of X rays within a given pixel varies slightly with each exposure the smaller the X ray dose the greater the effect of this random fluctuation With longer exposures more projection images and greater X ray fluxes we can attempt to maximise the signal to noise in the projection images Therefore the overriding factor in obtaining good quality micro focus X ray CT data is to detect as many X rays which have passed directly through the specimen as possible throughout the whole CT scan More attention is paid to those angles which present long material path lengths and so give a lower detected X ray signal User Manual XTMO26 A1 439 How to Get Mo
471. rotation axis and the required number of steps Enter the angular increment and the number of steps and press Ok Mote that this function works for regularly spaced identical Features Angular increment 1 00 gt degrees Mumber of steps 20 E Then press the OK button to create the new actions 320 XIMO26 A1 User Manual Inspections Delete Action ose To delete an action select the action to be deleted from the action list and then press the Delete button A prompt to confirm deletion will be displayed It is possible to select multiple actions to be deleted Reorder Actions When an inspection is run the actions for each component are run The order of the actions in the list is the order in which they are executed To change the order of the actions select the action that you wish to move in the action list To move the action up press the Up button To move the action down press the Down button This may be repeated any number of times Action Copy and Paste tav Flux Calibration Positional Calibration Acquire Image BGA Analysis Save Image Acquire Image BGA Void Analysis Save Image To enable easier setting up of repeated actions it is possible to copy and paste actions To perform this select the action s that are to be copied in the action list and then right click upon the action list A menu will be displayed copy Paste To copy the actions select Copy from the menu Then sel
472. rrection needs to be selected The drop down list will only display shading corrections that are configured for the selected number of images These shading corrections are not the same as the ordinary multi point shading corrections in that they contain correction data for multiple images Compensate For latency Calculate It is possible to compensate for latency within the imaging panel This is done by checking the Compensate for Latency checkbox and then pressing the Calculate button It is recommended that any sample is removed from view and that the X ray conditions are set such that the image is bright but not saturated i e no pixels at 65535 Manipulator control Manipulator control Outer Left Inner Left Middle Inner Right Outer Right To check that the sample is in view as required then the manipulator can move the imaging panel to the positions used for wide image radiography by pressing the relevant button When everything is set up press the OK button to acquire the wide image radiograph 140 XIMO26 A1 User Manual Image Processing Open Image TO open an image that has been previously saved press the Open Image button This will display a dialog that allows the user to select the required image This is an enhanced version of the standard Windows open file dialog My Recent CSP void TEE jpg Documents Desktop My Documents or My Computer a File name CSF Anales pg w i j My Network Fi
473. rresponds to the First position on the initial Feature 2 Enter number of steps relative to the main X ray image and press OK Moke that this Function works For regularly spaced identical Features Number horizontally 4 iak Number vertically 7 ES Then enter into the Step and Repeat Window the number of components horizontally and vertically These are the components horizontally and vertically with respect to the X ray image displayed This may be different to your sample s initially loaded orientation if you have rotated the sample using the manipulator Note that the example above defines the number of samples as a 4 by 2 grid Then press the OK button to create the new components When step and repeat has created the new components it is highly recommended that the positioning of the created acquire image actions A and visual check actions is checked to ensure accuracy If any fiducial calibration or positional calibration actions have been replicated then the reference images for these actions will need to be created Step and Repeat Specify Increments in X amp Y When the manipulator is at the start position it is possible to step and repeat by specifying the increments in the X and Y axes This is done by entering into the Step and Repeat Window the number of components horizontally and vertically and the increments in the X and Y axes Enter the spacings and numer of steps ins amp Y and press OK Mote that this f
474. rt position a crop box will be displayed on the X ray image This is used to draw a box around the first feature to be inspected within the sample being replicated Once the crop box has been defined then move the manipulator to locate the same feature on the last sample to be inspected within this crop box The more accurately this is done the better the positional accuracy will be for the replicated actions for the new samples 1 Move the manipulator to the position on the last Feature that corresponds to the First position on the initial feature 2 Enter number of steps relative to the main X ray image and press OK Moke that this Function works For regularly spaced identical Features Number horizontally q al Number vertically 7 hata Then enter into the Step and Repeat Window the number of samples horizontally and vertically These are the samples horizontally and vertically with respect to the X ray image displayed This may be different to your sample s initially loaded orientation if you have rotated the sample using the manipulator Note that the example above defines the number of samples as a 4 by 2 grid Then press the OK button to create the new samples When step and repeat has created the new samples it is highly recommended that the positioning of the created acquire image actions A and visual check actions is checked to ensure accuracy If any fiducial calibration or positional calibration actions have be
475. rties on both installations of Inspect X By setting this property then an operator ID has to be entered when Inspect X is started This operator ID can be updated when an inspection program is run as there is an Operator ID text box on the run inspection program interface Inspection Operator ID 1234567090 Sample serial numbers 123 456 400 XIMO26 A1 User Manual How to Get More Out of Inspection Programs When an inspection report is modified on the Validation Station then the operator ID of the persons reviewing the report is logged Inspection Operator ID 1234567090 Serial number 123 456 Any changes to the status of components or notes added to a component are recorded with the operator s ID 10 10 2007 16 46 1234567890 Component status changed to FAIL Voiding within BGA makes the device very marginal Operator ID recorded Example of Program Creation An example of how to create an inspection program is briefly outlined by the following steps This is not the only way of creating and populating an inspection program but this is an easy method 1 Create a map of the sample s 2 Create a new inspection program and name the first component Calibration 3 Create another component bearing the name of the first component to inspected 4 Move to the component and acquire an image Analyse the image as required Then 8 9 press the Add to inspection button Add the recorded actions to the named compo
476. rtified by Nikon Metrology to emit less than one micro Sievert 1uSv per hour on all external surfaces Therefore there is no X ray radiation risk to the user under normal operation conditions If the system is damaged e g dropped during re location IT MUST NOT BE USED AND Nikon Metrology SHOULD BE CONTACTED IMMEDIATELY Nikon Metrology will then arrange for an approved engineer to critically examine the system for radiation leakage before it can be re commissioned High Voltages The system contains high voltages These pose no risk to the user under normal operating conditions If the X ray inspection system is damaged or exposed to an unsuitable environment e g wet or very damp conditions IT MUST NOT BE USED AND Nikon Metrology SHOULD BE CONTACTED IMMEDIATELY Nikon Metrology will then arrange for an approved engineer to critically examine the system for environmental damage before it can be re commissioned Summary Under normal operating conditions the X ray inspection system poses negligible risk to the user If the system is damaged Nikon Metrology should be contacted immediately User Manual XTMO26 A1 3 Important Health and Safety Information References 1 IRR 1999 lonising Radiation Regulations 1999 http www hmso gov uk si si1999 19993232 htm 2 Council Directive 96 29 EURATOM http ec europa eu energy nuclear radioprotection doc legislation 9629_en pdf 3 Performance Standards for lonizing Radiation Emitt
477. s Max 54704 Min 1536 Average 20108 Std Dey 12086 6 198 XIMO26 A1 User Manual Image Processing Measurement Units To change the units of measurement used within the image processing functions select the required units from the Measurement Units drop down menu For all measurement units except for pixels the measurement must be calibrated This calibration is required every time the magnification is changed i e the magnification manipulator axis is moved Changing the measurement units will cause the Inspect X to convert all displayed measurements in the image processing functions to be re calculated to the newly selected units Measurements Vertical 22 61 mm we Horizontal 3 14 5 mm lf Manual Override has not been selected then these boxes show the measurement described by the box on the image in there vertical and horizontal directions in the currently selected measurement units If the Manual Override check box has been checked then these will calibrate the measurement see below Calibrate Horizontal amp Vertical Measurements Calibrate Vertical 22 61 3 mm v Calibrate Horizontal 9 14 5 mm Manual Override Iw Calibrate To calibrate the measurements select Linear measurement in the measurement units control on page 203 and check the Manual Override check box Then drag the box on the main X ray image window on page 169 to encompass the feature or object of known dimensions It may be helpful t
478. s of the X ray source If the speckle is clearly defined and in focus the optical sub system is in focus and does not need adjustment If the speckle is blurred the optical sub system is out of focus and must be adjusted Optical focus must be adjusted by a skilled engineer User Manual XTMO26 A1 37 X ray Controller If the X ray inspection system is fitted with a flat panel imaging device then there is no optical focus to be adjusted Introduction to X ray Focus Having established that the performance of the X ray source is poor the beam alignment may be adjusted in two ways In order to understand how to use Inspect X to align the X ray source it is necessary to understand the basic features on the X ray source and some of the mechanisms involved in generating X rays This description is not intended to be a comprehensive study of X ray generation but should provide sufficient knowledge to set up a system correctly The schematic diagram below details some of the basic features common to most X ray generating systems FILAMENT WEHNELT FILAMENT HOLDER j FOCUS COIL ULTRA FOCUS TARGET HIGH VOLTAGE POWER SUPPLY COOLING UNIT ANODE FILAMENT CUP ASSEMBLY TYPICAL X TEK GUN An X ray source operates in much the same way as a triode valve Electrons emitted from a heated filament the cathode at the right of the above diagram are accelerated by the demanded operating kV towards t
479. s or nearly fills the whole of the reference image then there will be only a very small positional tolerance when viewing the same mark on other samples For a fiducial calibration to function then the whole of the fiducial mark must always be in view User Manual XTMO26 A1 371 How to Get More Out of Inspection Programs Maximum horizontal positional tolerance Maximum vertical positional tolerance Positional tolerance on fiducial mark It is also best to use a circular type of fiducial mark where rotational accuracy is desired This enables the calibration software to handle better fiducial marks that have been rotated because the sample has been rotated when being placed in the fixture Positional Calibration When a fiducial calibration action is run within an inspection program the manipulator is moved to where the fiducial mark should be located If then loads the reference image for that mark and then acquires an image The acquired image is examined to determine if the fiducial mark is in view If the whole mark is not in view then the calibration will fail In this case the reference images need to be re taken using the reference sample with a greater field of view i e the fiducial mark will be smaller and in the centre of the reference image If the fiducial image is found then the manipulator is moved to move the mark to where it should be Then another image is acquired and the process is repeated until
480. s being void The full results may be printed by pressing the Print button This will display the standard Windows print dialog The use of this dialog is documented in the Windows help system The full results may be saved to a file on disk This is done by pressing the Export button A standard Windows save file dialog is displayed This is documented in the Windows help system The results may be saved in two different file types CSW File cew Text File twt User Manual XTMO26 A1 245 Image Processing CSV File on The results are saved as comma separated values This file type can be page 589 easily imported into an Excel spreadsheet Text File This saves the results as a text file Pass Fail When the results of an analysis have been calculated a pass or fail status will be displayed The analysis of the BGA has passed using the specified parameters The analysis of the BGA has failed using the specified parameters Pad Array Void Analysis The Pad Array Void function allows for the analysis of voiding within arrays of pads It highlights the voids within each pad and calculates what percentage the voids form of each pad An example of voiding within a pad array 246 XIMO26 A1 User Manual Image Processing Definition Flatten void Edge Threshold 34375 Pad voiding Fail 20 Yo Single void Fail i i l Yo Results FAIL Image Flattening In order to rem
481. s in the BGA To set the ball edge grey level either change the value of the text box adjusting the slider or by sampling from the X ray image in the main X ray image window on page 169 To sample from the image press the Sample From Image check box which will stay depressed and then click upon the X ray image to define the grey level It may be helpful to zoom the X ray image to do this The slider is helpful after sampling the threshold from the X ray image to adjust the threshold by a small amount User Manual XTMO26 A1 233 Image Processing Perfect Ball Diameter Perfect Ball Diameter i 0 50 mm When the BGA is analysed it will identify the solder balls that are within a specified tolerance of the perfect ball diameter This control specifies the perfect ball diameter The units of measurement used are those that are set in the Measurement on page 197 function BGA solder balls that are not oversized or undersized or excluded are coloured green in the X ray image If the calibration of measurement has not been made at the magnification at which the BGA image is captured then any measurements in units other than pixels will be wrong To re calibrate press the Calibrate on page 237 button Exclude Objects Below Diameter Exclude Below Diameter i 0 40 3 Mmm When analysing a BGA the threshold set for the edge of the BGA ball may cause a lot of small features to be included in the analysis These features
482. s includes setting up any region of interest mask on page 270 Once the BGA ball void analysis has been set up then press the Get button to save the parameters in this action User Manual XTMO26 A1 341 Inspections Pad Array Void Analysis Action This action analyses an acquired image for package voiding Pad Array Yoid Pararmeters Get Get Pad Array Void Analysis Parameters Pararmeters Get To perform void analysis on a pad array within an acquired image it is necessary to set up the required parameters in the Pad Array Void on page 246 image processing tool This includes setting up the region of interest mask on page 270 to define the pads Once the analysis has been set up then press the Get button to save the parameters in this action PTH Fill Analysis Action This action analyses an acquired image for package voiding Plated Through Hold Analysis Get parameters fet Get Pad Array Void Analysis Parameters Pararmeters Get To perform void analysis on a pad array within an acquired image it is necessary to set up the required parameters in the PTH Fill Analysis on page 252 image processing tool This includes setting up the region of interest mask on page 270 to define the pads Once the analysis has been set up then press the Get button to save the parameters in this action 342 XIMO26 A1 User Manual Inspections Package Void Analysis Action This action analyses an acquired image for pa
483. s is NOT recommended if repeatability of the inspection program is required This check box specifies if an X ray flux calibration is used by this acquire image action Get X ray Conditions ray conditions Get If an X ray flux calibration is not being used then Get X ray Conditions button is enabled To record and save the present X ray conditions press this button Image Exposure Image exposure seconds When acquiring images the time over which the image is captured is specified by this control Include Map Image Include map image w If a copy of the map image showing the position of the component being inspected is required within the report generated by running the inspection program then check this check box This function only works if the manipulator map has been copied into the inspection program by pressing the Get Map on page 304 button Region of Interest Region of interest Mark Failure Mask e When the image has been captured then a region of interest on page 270 mask may be displayed on the image if required The required region of interest can be selected from the list of saved regions of interest If no region of interest mask is required then select None User Manual XTMO26 A1 347 Inspections Running a Mark Failure Action When a mark failure action is executed when the inspection program is run then the Mark Failure panel is displayed Stop Mark Failures Mark each
484. s that are not recordable For example X ray flux calibration fiducial calibration visual check and the mark failure actions If required these actions have to be added to an inspection program using the edit inspection program user interface Adding Recorded Actions to an Inspection Program Recorded actions can be added to an inspection program by either pressing the Add button on the Recorded Actions window as in the picture above or by pressing the Add button on the panel next to the X ray controller see below Inspections Recorded actions If either button is pressed then the Add to Inspection window is displayed Add To Inspection Inspection Inspection Test Create Recorded Actions Add to Sample Add to existing Sample Sample 1 Create new sample Add to Component Add to existing Component c 1 Create new component Mew component name Save image actions will be automatically inserted Gale a This window allows the user to select to which inspection program to which sample and to which component the recorded actions are to be added When the required program sample and component have been specified then press the Add button to add the actions 3 4 XIMO26 A1 User Manual How to Get More Out of Inspection Programs The changes to the inspection program can be saved by pressing the Save button This will save the changes and also close the Add to Inspection window
485. same BGA using a region of interest Note that the colour coding of the solder balls specifies their status Green A ball of acceptable size Red Undersized balls Orange Oversized balls Blue Objects deliberately excluded from the analysis due to their small size 232 XIMO26 A1 User Manual Image Processing BGA Ball Count EGA Ball Count 241 m To set the number of expected solder balls within the BGA either select the required value from the drop down menu in the BGA Ball Count control or if the figure does not appear in the list type its value into the text box This number defines the number of solder balls within the BGA and is used to calculate the target ball count Excluded BGA Balls Some BGAs are difficult to completely analyse as there are components on the other side of the board that mask out a number of the solder balls These can be excluded from the analysis using the Region of Interest on page 270 function When a number of balls have been excluded it is necessary to specify this number so that they are not included in the analysis PF E ME EA LME AA 2 G2 balls bf rie omong o j nte Excluded Balls 4 E To define the number of BGA solder balls that have been excluded from the analysis enter the number into the Excluded Balls text field Ball Edge Threshold Ball Edge Threshold 145 l a J D The BGA analysis requires to have set the grey scale value of the edge of the solder ball
486. sample being mapped is held in a fixture above the manipulator table or has tall components then parallax will cause misalignment between the images The manipulator map is provided as a navigation aid rather than as a high quality image Map This is an image that is created by scanning the manipulator tray area This may be zoomed on page 83 or used to position the manipulator on page 85 Zoom Control The image within the map may be enlarged and reduced within the display area in two ways The number of zoom steps the image may be enlarged or reduced depends upon the size of the image within the map display area Zoomed in to see more detail on the map image User Manual XTMO26 A1 83 Manipulator Controller The first is by the zoom controls at the bottom right hand corner of the window and the second is by holding down a key and then clicking upon the map image The image is enlarged by zooming in on the centre of the visible image SHIFT Left Mouse Button Down The image is enlarged by zooming in centred upon the point that the mouse was clicked The image is reduced by zooming out from the centre of the visible image CTRL Left Mouse Button Down The image is reduced by zooming out centred upon the point that the mouse was clicked A The image will be reset to fit the whole image within the map display area CTRL or SHIFT Right Mouse Button Down The image will be reset to fit the whole image within
487. scale smaller file Greyscale with Tone smaller file Colour larger file Preview gt gt User Manual XTMO26 A1 143 Image Processing The standard controls of the Windows Save File dialog are not documented here but are available within the Windows help information The types of image files that can be saved by Inspect X is controlled by the Save as Type drop down list Note that JPEG files can be saved as either JPEG2000 or standard JPEG A preview of the image to be saved can be obtained by pressing the Preview gt gt button Pressing this button will cause the Save File dialog to increase its width to display a preview of the image to be saved A Pressing this button will cause the Save File dialog to decrease its width to hide the display of the preview image Save in Q P ma Ey My Recent Documents My Network Saveastype TIFF Files tif e Pixel depth O 8 bit O 16 bit Image Greyscale smaller file Greyscale with Tone smaller file 1 94 MB Colour larger file File name Ss Save v 144 XIMO26 A1 User Manual Image Processing When the preview image is displayed then a left mouse click upon this preview image will zoom in on the image centred upon the point where the mouse click is made To reset the zoom so that the whole image is displayed left mouse click upon the preview image again The preview image pane also displays a
488. se images have been acquired with a minimum number of Frames Minimum Frames The recommended minimum number of frames used to average for the reference images within the shading correction is displayed This figure is calculated from the number of projections on page 406 and the frames per projection on page 406 specified on the Sample Setup tab This recommended minimum is calculated to minimise the effect of noise from the shading correction within the reconstructed volume It is possible to use a shading correction that uses more frames or less frames The point of this information is to advise the user on what to do Disable Shading Correction Disable shading correction During the setting up of the imaging system it might be required to temporarily disable the shading correction This may be done by checking the Disable Shading Correction check box To re enable shading correction uncheck the check box Shading Correction Selection Name 40ms 100k 9544 we The shading correction to be used during the acquisition of the CT data set is specified by selecting the required shading correction within the Name drop down list This correction can be loaded by pressing the Load button It may be updated by pressing the Update button Updating a shading correction involves the re acquisition of the reference images If there is a mismatch between the imaging conditions used to create the shading correction and the
489. seen in the X ray image then either adjust the manipulator s magnification axis or try remounting the sample so that its centre is as close to the centre of the CT rotate axis 406 XIMO26 A1 User Manual 3 D CT Acquisition 4 Press the Rotate button and check that none of the sample s required features go out of view in the X ray image whilst it is rotating though 360 degrees If they do adjust the magnification axis or remount the sample Once the sample s position has been set then the X ray conditions need to be set The manipulator position of the sample is saved when the stage in the CT Acquisition user interface is changed from Sample Setup to any other AM stage When the Sample Setup tab is entered from another stage of the user interface the sample is moved back to the saved manipulator position Setting the X ray Conditions Two conditions must be met when setting the X ray conditions e X rays must penetrate all parts of the object at all rotation angles e X rays must not saturate at any rotation angle any part of the image to be used to reconstruct the volume To make sure the penetration condition is met rotate the object so that the X rays pass along the longest path length of densest material thus producing the darkest image see the images below The live histogram mode on page 136 or the grey level read out on page 135 is useful in checking the penetration of the sample Check that the grey level of the da
490. ser Manual XTMO26 A1 295 Inspections Repeatability One of the main concepts for inspection programs is the ability to repeatedly inspect samples with the confidence that they are being analysed using controlled conditions By doing so it is possible to re inspect a sample after a period of time and to expect to get exactly the same results There are two functions within the Inspect X software to facilitate repeatability X ray flux calibration on page 322 and fiducial calibration on page 324 X ray flux calibration is used to control the image brightness and fiducial calibration is used to control the positioning of the sample It is highly recommended that you use these functions within Inspect X when programming inspection programs It is very strongly advised that all samples are held within a fixture When an inspection program is run it checks to see if the X ray flux calibrations need to be recalibrated The length of time between calibrations is specified in the X ray controller properties on page 34 If any of the X ray flux calibrations require to be recalibrated then the program will automatically do this It is no longer necessary to add X ray Flux Calibration on page 322 actions to the program You may still add these if you require the X ray flux calibrations to be recalibrated every time the program is run Inspection Management An inspection program consists of one or more samples to be inspected For each sample
491. set will create a stack of reconstructed slices This image stack may be loaded into a 3 D volume viewing application for analysis if required User Manual XTMO26 A1 455 2 D CT Acquisition A reconstructed slice 2 D CT acquisition is only available on systems that have been configured for A this option This is configured by Nikon Metrology when the inspection system is b built In order to make the acquisition of a reconstructed image slice stack easy a step by step user interface is provided within the Inspect X application The 2 D CT Acquisition wizard is available as the CT tab on the main tab control Image Tools Inspections ET Sample Shading Centre of Reconstruction Setup Correction Rotation Setup Acquisition 456 XIMO26 A1 User Manual 2 D CT Acquisition There are a number of stages in the CT step by step user interface These guide the user through the processes that need to be performed to set up the acquisition of the projection images The current active stage is highlighted in white Any stage that is available to be selected will be highlighted by a darker grey background If the stage is not currently available then it will be greyed out and will not highlight when the mouse is tracked over it This will happen when a previous stage needs attention For example the white and black reference images need to be re collected Sample Setup Active stage Shading Correction Available stage
492. sifier Fields button is pressed The entries in the menu depend upon the image intensifier fitted Normal zoom User Manual XTMO26 A1 133 Image Processing Iris Control This button is only available on inspection systems fitted with an image intensifier and a camera that has a computer controlled iris The control of the iris enables the reduction of noise on the image Noise is reduced by closing down the iris The values in the pop up menu that is displayed when the option button next to the Iris Control button is pressed show the available iris demand values The lower the number the more closed the iris and therefore better image noise reduction am E de e e 100 Foto sO io soo eo to LO Imaging Presets Operator This button may not be displayed If the inspection system is fitted with an imaging device that has configurable parameters that affect the size and performance of the imaging system then this button will allow the easy switching between pre defined imaging states The required imaging preset is selected from the pop up menu that is displayed when the option button next to the Imaging Presets button is pressed The entries in the menu depend upon the imaging device fitted New imaging presets can be defined from within the Camera Control on page 290 tab of the Image Processing Properties window m e Feal Time High Quality Add 134 XIMO26 A1 User Manual Imag
493. sition of the sample To create the reference images find the first fiducial mark and press the Create button for Fiducial 1 Note that an error message is displayed whilst there is no reference image exists for this fiducial mark Then move the manipulator to locate the second fiducial mark and press the Create button for Fiducial 2 An example of a reference image for a fiducial mark User Manual XTMO26 A1 325 Inspections When the image is captured a crop box is displayed This must be moved and resized to define the fiducial mark within the image When the fiducial mark has been cropped then press the Crop OK button that will have been displayed ee Crop OF A check is made to see that the defined image is of good enough quality to use for positional calibration If it is not then an error message is displayed If this happens then either select another fiducial mark or feature on the sample that is better defined or increase the contrast in the image by varying the X ray conditions Changes to the contrast of the image using the Image Tone tool will not be applied when the image is re captured Higher Precision Higher precision Iw The precision of the move to position executed by this action needs to be of higher precision then check this checkbox When the action is executed then 2 moves will be made to ensure the best accuracy of positioning This only really needs to be used when viewing the sample at a very
494. sk will continue after this period Time out period 120 7 seconds 548 XIMO26 A1 User Manual Scheduled Tasks Enabling amp Disabling the Task Task Control Enabled Next scheduled run 29 10 2011 20 57 31 If task is enabled The task can be enabled by checking the Enabled checkbox To disable the task uncheck the Enabled checkbox and press the OK button The next scheduled run time of the task is displayed on this tab Configuring the Calibration Task The calibration task can be used to perform two functions e X ray source filament calibration This is only available on the XT V 160 and XT V 130 systems e Updating of the standard shading corrections for the imaging presets Recalibration of the X ray Source Filament This will only be available on XT V 160 and XT V 130 inspection systems x ray source Filamant Calibration Recalibrate To recalibrate the X ray source filament check the Recalibrate checkbox If not required uncheck the Recalibrate checkbox When the task is run then the filament recalibration function is run if selected This will require the Manipulator Safe Position to be set This is a position that the manipulator will move to before the recalibration function is run The position must be somewhere where there is no sample or section of the manipulator is in view If no safe position has been set for the task then the following warning will be display Manipulator position For
495. slider until the artefacts are removed From the image Then close the window 3 8 Adjust the slider so that the voids in the die attach in the X ray image are removed in the reference image The package void analysis image with the voids flattened When this has been done close the Image Flattening window by pressing the close button at the right hand end of the window s title bar If a Void Edge Threshold had already been defined it will need to be adjusted after any alteration to image flattening To remove any image flattening press the Flatten button set the slider to the left hand end and close the window 262 XIMO26 A1 User Manual Image Processing Void Edge Threshold Void Edge Threshold 131 Q TOTO p The voids within the die attach are defined by a grey scale value that corresponds to the edges of the voids when using thresholding This is entered in the Void Edge Threshold controls To set the void edge grey level either change the value of the text box adjust the slider or by sampling from the X ray image in the main X ray image window To sample from the image press the Sample From Image check box which will stay depressed and then click upon the X ray image to define the grey level It may be helpful to zoom the X ray image to do this In order to clearly define the voids from the rest of the X ray image it may be appropriate to use the Region of Interest and the Image Flattening functions
496. slightly degrade the quality of the reconstructed volume The process of flux normalisation is for the user to specify a rectangular area within the projection images which contains no image data This area is used to monitor any variations in image brightness and to correct the projection images as required If flux normalisation is required then check the Apply Flux Normalisation checkbox and then crop the required area on the X ray image If the area is too large then the following message will be displayed The flux normalisation area is too large and must be reduced If this happens reduce the size of the cropped area The flux normalisation rectangle must contain no sample or other object at any angle CT Arm Position CT Arm Position Top Middle le Bottom These radio buttons will only be displayed on a XT V 160 system The relevant radio button must be selected to match the physical position of the CT rotate arm within the inspection system 410 XIMO26 A1 User Manual 3 D CT Acquisition Panel Scan CT XT H 225 Systems Sample Setup Projections 1440 Optimise Frames per projection 32 v Check that the sample is penetrated at all angles by Rotate pressing the Rotate button CT data sets are acquired with the centre of rotation in the centre of the image Press the Move button Eo centre the sample Flux Normalisation Apply Flux normalisation Crop an area on the image in
497. spected is say a PCB then more than one may be mounted on the manipulator table at a time Rather than having to run the inspection program for each PCB mounted it is possible for the inspection program to inspect all of the PCBs in one run Each sample within an inspection program can be individually identified by a unique serial number This allows for traceability of inspection program results to each sample Components For each sample within an inspection program there will be one or more uniquely identifiable features which need to be inspected These are referred to as components within an inspection program The results output from the inspection program run will enable the operator to easily identify each component s status for each sample User Manual XTMO26 A1 367 How to Get More Out of Inspection Programs Actions For each component within an inspection program one or more actions will be defined An action is the actual unit of work Each action contains the instructions to direct Inspect X to perform a specific operation for example to acquire an image at a specific position upon the manipulator The results of each action are recorded in an XML http www w3 org xml results data file Inspection Program Structure An inspection program is structured to inspect one or more samples Each sample can have one or more components For each component there are a number of defined actions to be performed The diagram be
498. ss a warning Is displayed Manipulator moving to load position On an XT V 160 system pressing the Load button causes the manipulator to move to the load position next to the access door and then displays the following window Information 1 Load your sample onto the table and then close the window Press OK when the window is closed and the manipulator will move to position After loading the sample press the OK button and the manipulator will be returned to the central position User Manual XTMO26 A1 71 Manipulator Controller Movement Speed sees gt JO gt 17 This set of buttons control the speed of movement of the manipulator The speed control only applies to movement made by use of the joysticks Positional point to point moves made from the Inspect X user interface always move at the fastest speed Precision speed This moves the manipulator very slowly for high precision work Slow speed Normal speed oso Lua Fast speed suo J JLo JLo oo On XT V 160 inspection systems there is a fifth speed control the Auto speed setting When the Auto button is selected then the maximum speed of the X Y and magnification axes are dynamically updated dependent upon the current position of the magnification axis As the magnification of the sample increases the speed of the axes is reduced This enables finer control of the manipulator at higher magnifications without the need to keep on manual
499. ss similar to Laplacian Detection More Edge Detection but with a different spatial filter Emboss This applies a process that makes the image appear to be embossed The level of embossing is specified by the drop down menu Equalise This applies a process that obtains a more uniform distribution of the grey scale values in the image Background This applies a background image subtraction on page 196 Subtraction to the image Unsharp Masking This applies Unsharp Masking on page 278 to the image Image Enhance This applies Image Enhancement on page 281 to the image If Emboss is chosen then the level of emboss applied is selected on the pop up menu that is displayed when the second option button next to the Process Image button is pressed Eo E 1 2 I l l Lo Fri re Undo Image Processing To remove the effects of the last processing function applied i e to undo press the Undo Processing button This button is only available when an image processing operation has been applied to the image User Manual XTMO26 A1 149 Image Processing Restore Image To remove all image processing applied to the image since it was loaded or captured press the Restore Image button This button is only available when at least one image processing operation has been applied to the image Image Notes The image notes see topic Image Profile on page 589 are a set of lines of text that are associated with the image open within t
500. ss the Up or Down button next to the list to promote or demote its position within the list Component Moves U up the list Moves 117 down the list fo Was Samples and actions can be reordered in the same manner Names of Samples Components and Actions The name of samples within an inspection program are not editable This is because they are only used to associate actions within the inspection program with a sample mounted on the manipulator When the inspection program is run then the serial number of the sample is used within the inspection report rather than the name that appears in the inspection program The names of the actions are fixed as they describe the action that is to be performed when the inspection program is run The names of the components are specified when they are created but they may be renamed on page 388 if required User Manual XTMO26 A1 387 How to Get More Out of Inspection Programs Renaming Components To rename a component select the required component in the list and then right click to display the context menu Component Rename Mer Selecting rename When the Rename option is selected then the component s entry in the list becomes editable Component ES IJ Editing the component s name When the name has been updated press the Enter key Checking an Inspection Program To check the correct performance of actions within the program
501. stance travelled since the last time they were zeroed to the current position The read outs give the distance in millimetres or inches depending on how this is set up in the Inspect X Engineering Tool as an absolute distance distance along the X axis and the distance along the Y axis To perform a measurement follow this procedure 1 Move the manipulator to the start position for the measurement 2 Zero the measurement by pressing the Zero button 3 Move the manipulator to the end position for the measurement Read out measurement To facilitate the measuring switch on the centre cross in Annotation in Image Processing or the grid in Annotation in Image Processing If measuring a distance in one axis it may be helpful to lock the other axes The units of measurement are defined by the Measurement on page 199 image processing tool The units will either be millimetres or inches Axes Control Zero Lock Absolute Demand Relative 276 20 Y 178 20 Rotate 0 00 E Tilt 0 00 0 0 1 1 U User Manual XTMO26 A1 75 Manipulator Controller These controls acts on individual axes of the manipulator If an axis is not available for use for example the tilt and rotate axes as the tilt and rotate arm is not fitted then their controls are disabled The units of measurement are defined by the Measurement on page 199 image processing tool The units will either be millimetres or inches Absolute
502. stem Vacuum quality The speed of the vacuum turbo pump The lamp detect failure on the X rays On lamp oe SS a On some X ray inspection systems the service or imaging door All of these must be satisfied to engage the interlocks Interlocks are made but X rays are not being generated Interlocks are made X ray generation has been initiated and the system is implementing the required pre warning delay prior to turning on X rays 22 XIMO26 A1 User Manual X ray Controller Interlocks are made X rays are on X ray controller is in Auto condition mode Check Coolant The X ray controller coolant needs to be checked It is possible for the X ray source to overheat This is usually caused by a lack of coolant or the coolant is not flowing adequately If this happens then switch off X rays and investigate the cooling system to find the cause of the problem Communications lost The communications have been lost with the SR X ray controller If this happens check to the serial link between the computer and the SR controller Vacuum Status This panel shows the current status of the vacuum within the X ray source It can be one of three states The vacuum within the X ray source is good X rays may be generated j The vacuum within the X ray source is good enough for X ray generation but is not ideal If this state is displayed after the system has been pumping down for more than one ho
503. support rotation of the sample in the plane of the X Y axes it will not be possible to rotate the sample to correct its placement The X Y axes offset can still be applied To ensure that region of interest masks fit correctly this property specifies a tolerance on the rotation calculated by the fiducial calibration If the rotation calculated by the fiducial calibration is greater than this tolerance then the action will be marked with a FAIL status and the inspection will be aborted On inspection systems such as the XT V 160 the sample can be rotated in the X Y axes plane and this property will not be displayed 356 XIMO26 A1 User Manual Inspections Report XSLT Transform The output from running an inspection program is a results file that is an XML http www w3 org xml file In order to view this file it has to be transformed into another format for example HTML This transformation is performed by an XSLT http www w3 org tr xslIt stylesheet Inspect X is installed with a number of XSLT stylesheets This control selects the stylesheet to transform the inspection results at the end of an inspection run Maximum Size for Map Images In an inspection report if the Include map image on page 333 checkbox for the acquire image actions has been checked then an image will be included in the inspection report to show the location of the component being analysed This numeric entry box sets the maximum dimension of the image inclu
504. sure your data starts out top quality read through the following pages The process of computerised tomography CT consists of collecting a large set of images of a sample during a single rotation of that sample Together with a small number of calibration images these images are built into a 3 D volume which represents your sample both inside and out All this processing takes place behind the scenes and all you are asked to do is to choose the parameters for your images and then sit back and let the computer do the work for you Optimising Your Image Choosing the correct settings for your CT scan can seem a daunting task There are so many parameters to consider the voltage and current for the X ray set where to position the sample what detector exposure or camera aperture setting to use which intensifier zoom setting or detector gain setting to use and what filters to put on the source Fortunately once you have optimised your image the CT acquisition software leads you through the acquisition sequence It is most important that you realise that this first step of optimising the image is by far the most important of all As with many complex processing systems if you put garbage in you will get garbage out With CT reconstruction if you put garbage in you will get much more garbage out The process is actually designed to enhance whatever noise is present in the original projection images and to show that noise much more clea
505. tS ccocoonccnconocnccconcnnconaconnnnonnnnonnanonconancnnonanennnnns 520 Completion of Wall Measurement Definition oooccccoccncoccncconcnocononononnnonannnonannnonenononenononos 520 EdIitind a 2 D1ASpectlon POMO i 521 CT Promesas SA AAA AA AS 522 NUmber 0 Samples aia tada 523 RIXO SIZE 523 Wall Thickness Measurements cccccccccsecccesecccesecceeseeceeeeeceuececeueetegeeeeseeesageessaeeessuesenseesens 524 User Manual XTM026 A1 xiii Reconistructi n Computer ee ea eee 524 shading Correction Sale POSI MN ind oiaio na 524 OULDUT OPINAS door 525 DAVE Progra scat eheiaictacbadansed co avaehadin a a badan te oe auc A 525 REVET Rrra ese etch beet es eie ar shet bccn aoe eed teed beeen eee a nether aks hetatuaben 525 Running a 2 D INSDCCHON Proga Mirad aaa 526 Operator ID Pentre ree ey eae eee ada 526 2 D Inspection Programi Seleccion ee een eee 526 Sample Serial Numbers sica ede eee eee ees 527 RUNNING Me ROOM 528 2 D Inspection FSS UNS o 533 2 Dpspecion Results Dalarnas a S 534 Inserting 2 D Inspection Results into a Database ooooocccconccccococccccnncccncnnaccncnnnncncnnncnncnnnccncnnnnons 534 Calibrating a 2 D Inspection PrograM oocccconccnconcccncononcnnononcnnconanononnnncnnononcnnnnnrnnonnnnrnnonnnrnnnnnnnnnnnnnns 535 Deleting a 2 D Inspection PrograM ccccooocnccconnccconoconcncononconanncnnanononnnononnnnnnnnnnnnnnnnnannnnnnnnnnannnenanans 535 2 D Inspection Operator WINGOW o
506. tal Edge Detection Vertical Edge Detection Edge Detection Edge Detection More Laplacian Edge Detection Laplacion Edge Detection More Emboss Equalise Background Subtraction Unsharp Masking Image Enhance Sharpen This applies a process that accentuates the edges within the image As a result the image looks sharper Sharpen More This applies a process similar to the Sharpen function but the effect of the sharpening is less aggressive as it uses a different spatial filter Smooth This applies a process that makes the image have a smoother appearance by applying localised averaging Horizontal Edge This applies a process to detect horizontal edges using a rate Detection of change of pixel value 164 XIMO26 A1 User Manual Vertical Edge Detection Edge Detection Edge Detection More Laplacian Edge Detection Laplacian Edge Detection More Emboss Equalise Background Subtraction Unsharp Masking Image Enhance Image Processing This applies a process to detect vertical edges using a rate of change of pixel value This applies an edge detection process using the rate of change of pixel value to find all edges within the image This applies an edge detection process similar to Edge Detection but with a different spatial filter This applies an edge detection process emphasising maximum values or peaks to find all edges within the image This applies an edge detection process similar to Laplacian Edge De
507. tart button to calibrate the Filament Setting up Filament Demands Finally the optimal filament demand for various uA settings is calculated This process takes a few minutes When completed the filament has been recalibrated 4 1 1 1 1 3 Filament Change Position MA a Filament Change On the XT V 160 inspection system to move the manipulator table into a position to facilitate the changing of the filament in the X ray source press the Filament Change button When the filament change operation is complete move the manipulator using the joysticks back to an operating position where the sample can been seen This is only available on the XT V 160 inspection system 48 XIMO26 A1 User Manual X ray Controller Alignment X amp Y Shift The alignment of the electron beam through the magnetic lens is modified using the X and Y shift controls The X shift controls deflect the beam in a perpendicular direction to the Y shift controls Note that the X shift does not correspond to the X axis of the manipulator nor to the X direction within the X ray image Similarly the Y shift does not correspond to the Y axes Shit J Ep Y Shift 7 o Changing the value of the X shift or Y shift is performed by updating the required slider To adjust move the slider by either moving the thumb of the slider or by pressing the nudge buttons on either side of the slider If a nudge button is held down then the slider will move
508. tection but with a different spatial filter This applies a process that makes the image appear to be embossed The level of embossing is specified by the drop down menu This applies a process that obtains a more uniform distribution of the grey scale values in the image This applies a background image subtraction on page 196 to the image This applies Unsharp Masking on page 278 to the image This applies Image Enhancement on page 281 to the image If Emboss is chosen then the level of emboss applied is selected on the pop up menu that is displayed when the second option button next to the Process Image button is pressed Pa E I l I Lo Po Undo Image Processing E ci To remove the effects of the last processing function applied i e to undo press the Undo Processing button This button is only available when an image processing operation has been applied to the image User Manual XTMO26 A1 165 Image Processing Restore Image To remove all image processing applied to the image since it was loaded or captured press the Restore Image button This button is only available when at least one image processing operation has been applied to the image Image Notes The image notes see topic Image Profile on page 589 are a set of lines of text that are associated with the image open within the main X ray image window on page 169 These may be the results saved from image processing functions or user
509. ted if required from the beginning This ensures ultimate consistency and quality within the projections of the CT data set The drawback of this is that it can be very time consuming e lf the checkbox is checked then the Fast CT will restart from the point at which the X ray s trip was detected At present the angle at which the last valid projection was acquired is not to a certain level of precision As a result restarting from the last known angle will produce a CT data set which will reconstruct There might be a very slight loss of consistency and quality but this can save a lot of time when acquiring CT data sets Reconstruction Tab _ yT E EPI Acquisition Reconstruction Beam Hardening Reconstruction computers Recor 1 Enable email notifications volume display program 3S bytes per voxel User Manual XTMO26 A1 429 3 D CT Acquisition Reconstruction Computers The computers that appear in the Reconstruction Computer on page 480 drop down list at the Acquisition stage of the step by step user interface is shown by the Reconstruction Computers list Add Computer To add a computer to this list type its name into the Available Computers box and press the Add button If the exact name of the computer is not known then press the Find button and this will populate the Available Computers list This may take some seconds as it has to interrogate the computers available on the local area network The required
510. ted by actions need to be of higher precision then check this checkbox When the actions are executed then 2 moves will be made to ensure the best accuracy of positioning This only really needs to be used when viewing the sample at a very high resolution Show Results Panel When an inspection program is run then the results of the program can be displayed If this is not required for example as the inspection program results are to be reviewed using a validation station then this checkbox should be cleared Auto Pass Visual Check Actions If the inspection program consists of many visual check actions on page 334 and it is normally expected that each check will result in a pass the operator will have to press the Pass on page 336 button many times In order to reduce the stress upon the operator the Pass button may be set to be automatically pressed after a specified time out by checking the Auto Pass Visual Check Actions checkbox If the Auto Pass Visual Check Actions checkbox has been checked then the Timeout for Auto Pass numeric field allows the supervisor to specify the period in seconds of the time out after which the Visual Check Pass on page 336 button will be automatically pressed Fiducial Calibration Rotation Tolerance When a fiducial calibration action is executed it will calculate a X Y axes offset and a rotation required to correct for the placement of the sample being inspected On inspection systems that do not
511. terial grey level 28380 Auto 5et Background grey level 53760 Threshold For edge 50 Adaptive W Search width 6 Auto Set Calculation Errors To calculate the required parameters minimise the error sums below Min measurement error 0 0000553 Max measurement error 0 00085 2 208 XIMO26 A1 User Manual Image Processing Defining a Measurement The steps to define a measurement are as follows e Set the type of measurement on page 209 e Define the named region on page 214 e Set the required minimum on page 216 and or maximum on page 216 allowable limits for the measurement e Set the region on the image on page 214 e Set the thresholds on page 218 This step is only required for the first measurement defined Measurement Type Measurement type Measuring material le Gaps between material Measure using base lines There are two types of measurement that can be made e Thickness of material e Gap between material Note that it is not possible to concurrently measure both F gaps between objects and the thickness of objects The type of measurement is selected by the Measurement Type radio buttons Measuring Thickness of Material Region 1 PASS Min 13 692 mm Measuring the thickness of material To measure the thickness of material select the Measuring Material radio button User Manual XTMO26 A1 209 Image Processing Measuring the Gap Between Material
512. than one sample and there are not enough samples available to populate the manipulator then the checkbox by the samples not present can be cleared By doing so when the inspection program is run it knows that the samples in these positions are not present and does not try to inspect them Run Inspection Run To run the selected inspection program press the Run button The inspection status on page 350 is displayed whilst the sequence is being executed Pause When an inspection is started the Delete Edit and New buttons are replaced by a Pause button When pressed this button will pause the running inspection program Pressing the Pause button again will re start the inspection program Note that when the Pause button is pressed to pause the inspection program then the inspection will pause at the next available point when it is not waiting for a process to complete User Manual XTMO26 A1 297 Inspections Create Inspection To create an inspection type in the name required and press the Create button When the Create button is pressed the display will be updated to show the controls that allow the definition of the inspection program on page 303 New inspection programs can only be created if logged in as the Supervisor Edit Inspection To edit an existing inspection select the required inspection on page 297 and press the Edit button This will display the controls that allow the edi
513. that no objects are likely to collide with the manipulator whilst it is homing teme _ j The homing operation sends each axis to its zero position and sets the allowable travel for that axis The operation involves moving each axis to its datum position to zero the coordinate system Once this operation is complete for all axes then the manipulator is calibrated and ready for use User Manual XTMO26 A1 61 Manipulator Controller Controls The manipulator can be controlled by the manipulator map on page 82 or by joysticks either on the inspection system or on the software interface Some CT see topic Computed Tomography on page 589 inspection systems are configured so that the manipulator map does not appear on the user interface The manipulator can also be controlled by moving to saved positions on page 90 Manipulator Controls Hone JE Te ses LJ Jo pa Sample Depth 10 00 mm Magnification 30 0 Inspection Systems other than the XT V 160 and XT V 130 Cenas a FR J JJ Sample Depth 10 00 mm Magnification 30 0 XT V 160 and XT V 130 Inspection Systems Stop i Stop Pressing the Stop button will stop any movement currently in progress by the manipulator It will also stop a homing operation 62 XIMO26 A1 User Manual Manipulator Controller Set Horizontal Horizontal The Horizontal button will not be available if the manipulator is not fitted with a tilt and rotate
514. the Energy 2 radio button is checked then the shading correction for X ray energy 2 may be specified Shading corrections will remain valid for use within CT for a limited period A of time This time is set in the image processing properties on page 294 Latency Compensation for Panel Scan XT H Systems Calculate imaging latency Calculate It is possible to compensate for latency within the imaging panel This is enabled by checking the Compensate for Imaging Latency checkbox in the Panel Scan on page 438 tab of the CT Properties Pressing the Calculate button will calculate the latency correction It is recommended that any sample is removed from view and that the X ray conditions are set such that the image is bright but not saturated i e no pixels at 65535 414 XIMO26 A1 User Manual 3 D CT Acquisition Centre of Rotation The correct calculation of centre of rotation within the image i e the axis about which the CT rotate axis is rotating the sample is very important to ensuring that the reconstructed 3 D volume is of high quality This stage of the step by step user interface allows for two methods of calculating its position Not that one or both may be used Using neither will yield a low quality 3 D volume The centre of rotation of the sample needs to be known to sub pixel accuracy in order to reconstruct a high quality CT volume Centre of Rotation Caclulate automatically w To specify the slice at which t
515. the Manual Bad Pixel checkbox so that its icon is orange coloured When in this mode clicking upon a pixel in the X ray image will mark the pixel as bad Manually identified bad pixels are stained orange If an incorrect pixel is marked manually as bad then clicking upon the pixel again will remove it from the bad pixel map and the image stain for that pixel will be removed Manually marked bad pixels are always retained for the bad pixel map even if it is regenerated Saving the Bad Pixel Map When all of the bad pixels have been identified then press the OK button and the bad pixel map will be saved If the Cancel button is pressed then the previous bad pixel map for the imaging mode shall be restored After a new bad pixel map has been created then all of the A shading corrections for that imaging mode must be i regenerated 122 XIMO26 A1 User Manual Image Processing Operator Level Control Tool Bar The tool bar controls what image is being displayed within the main X ray image window on page 169 and the opening and saving of images Inspection systems that are fitted with a curved linear array image detector then the tool bar is slightly different and is described within the Linear Detector Control Tool Bar on page 152 section Lit O El User Manual XTMO26 A1 123 Image Processing Live Image To view a live X ray image within the main X ray image window on page 169 press the Live Image
516. the range of acceptable grey levels Ball Edge Threshold f 32089 E y a s Acceptable Grey Level Ran E Setting grey level thresholds Fiducial Calibration As inspection programs are often used to inspect small features upon the sample e g BGA on page 589 balls then the exact positioning of the sample is essential for the program to move to the correct features It is very strongly advised that all samples are held within a fixture Even when a fixture is used then there is small positional changes from sample to sample The correction for the positioning of each sample inspected can be made by using a fiducial calibration 370 XIMO26 A1 User Manual How to Get More Out of Inspection Programs Creation When a fiducial calibration is created the operator specifies 2 positions on the sample that have special marks for positional calibration e g fiducial marks on a PCB These marks will need to be in the same place on each sample being inspected An example of a fiducial mark with good contrast An example of a fiducial mark with bad contrast At each of the positions a reference image is acquired This reference image is used when checking for position when the fiducial calibration is run There is a very important thing to consider when capturing the reference images for a fiducial calibration namely the field of view of the fiducial mark or feature being used for positional reference If the fiducial mark fill
517. then the manipulator map will be re loaded with the map image in the inspection program Uses of the Map When Acquire Image or Visual Check actions within the inspection program are executed then if the action has the Include Map Image option selected then a copy of the map image with the position of the acquired image marked will be included in the inspection report Include map image This allows for easy identification of the part of a component being inspected within the inspection report Image acquired at 14 05 22 using these conditions Boat PER TT ee A eee tee He dE ar See e SEER ee EG i W ray Sa A fa EEE eae die kV 125 u 10 Mi oe MO conditions zi pes a A ae 1 pn fel E p al Rae tua la i le ny tals 1E T i ee x Li Imaging capture time 1 seconds AAA Imagina parameters Camera ap ee exposure frame 45 TENE E ia Imaging milliseconds Gain 0 So a EY conditions Brightness 0 Distal gan 0 a eas le Binning 0 White 255 Black En Intensifier field set to field 0 Tris set to 25 eae The other use of the map is to display the status of each component whilst the inspection is being run see Status Map on page 390 for details User Manual XTMO26 A1 389 How to Get More Out of Inspection Programs Status Map When an inspection program has been run then the map will display the status of each component inspected Map displaying the sta
518. ting of the inspection program on page 303 If the inspection contains either a fiducial or positional calibration action then a prompt will be displayed to ask if this should be executed When editing an inspection program it is very important that each fiducial or positional calibration action preceding an acquire image or visual check action is executed when editing the inspection program This ensures the correct positions are held within the inspection program If you fail to do this you will get positional inaccuracy Editing of inspection programs can only be performed if logged in as the Supervisor Delete Inspection es To delete an existing inspection program select the required inspection on page 297 and press the Delete button You will be asked to confirm the deletion before it is executed Deletion of inspection programs can only be performed if logged in as the Supervisor 298 XIMO26 A1 User Manual Inspections Creating an Inspection Inspection programs can be created by adding recorded actions to a program They may also be created manually by creating new samples on page 306 and components on page 310 and adding actions on page 315 as required Recording Actions Whilst images are acquired and analysed by the user Inspect X records the actions that can be automated within an inspection program This is an always on feature that involves no processing overhead This allows the
519. tion program identifies a failure An example of this is when inspecting a reel of semi conductors devices for a pick and place system In this case when a failure is identified the user then marks the failures upon an image and the number of failures are counted Once a limit of failures is reached then the reel is deemed to be waste and the inspection is aborted On Failure Actions Mark Failure Save Image Delete Annotation To do this then the On Failure actions would be set up as above and an Allowable Failure Count for the inspection program would be defined When a failure is identified then the On Failure actions would be run The Mark Failure action allows the user to click upon the defective devices and mark them with an annotation cross Another example could be that an inspection program only needs to save images of failed devices All devices that pass need not have any images saved In this case the main inspection program would need no Save Image actions and the On Failure actions would contain the Save Image actions User Manual XTMO26 A1 395 How to Get More Out of Inspection Programs Output from an Inspection Program The results information of an inspection program run is held in an XML http www w3 org xml results file This file will be found in the folder named with the date and time stamp of the inspection run within a folder named the inspection name contained within the images folder def
520. tion user interface PE4 Gone Program On Failure Allowable Failures i Sample Creates a new sample Component Actions Acquire Image BGA Analysis Save Image Save Image Acquire Image BGA Void Analysis Save Image Creates a new Save Image l action r 386 XIMO26 A1 User Manual How to Get More Out of Inspection Programs Note that when a new sample component or action is manually added to an inspection program then it is added after the currently selected items in the sample component or action list as appropriate In the example above creating a new component would add it after BGA 1 and before BGA 2 If no item is selected then the new item is added to the end of the list Deleting Samples Components and Actions To delete any sample select it in the list and then press the Delete button just below the list This will delete the sample and all its components and their actions from the inspection program To delete a component or a set of actions then follow the same procedure using the components list or actions list as appropriate Reordering Samples Component or Actions Any item in the samples components or actions lists can have its position within the list changed When an inspection program is run it executes the actions in order for the samples and components within the each sample For example to reorder a component select it within the components list and then pre
521. tions The Inspect X application provides the Inspection function that allows for the programming of inspections This function is found on the Inspection tab It is not available on some of the inspection systems An inspection program is a structured sequence of actions Inspections are structured to inspect one or more samples Each sample can have one or more components For each component there are a number of defined actions to be performed The diagram below shows an inspection program that has two samples each sample having two components Sample 1 Sample 2 The structure of an example inspection Once an inspection has been programmed it may be run to inspect any number of identical samples Each sample can be easily identified by entering a serial number so that the inspection report can be correlated with the sample The serial number may be input using a barcode reader if one has been attached to the inspection system s computer The output from each inspection run is an XML http www w3 org xml data file containing the results data This XML results file can be translated into other formats using an XSLT http www w3 org tr xslIt stylesheet When installed Inspect X provides some XSLT stylesheets to convert this data into an HTML report These stylesheets may be updated or replaced with your own stylesheet as required Inspection programs can be run by anyone but may only be created and edited by Supervisors U
522. tions had to be explicitly recalibrated within a program to ensure consistency This may still be done but to make it easier for users the inspection program function automatically checks to see if any X ray flux calibrations are used within the program and then to see if they need to be recalibrated If so the inspection program does this automatically The Time Valid control specifies how long an X ray flux calibration is valid to be used before it needs to be recalibrated kV Step Style ky Step Style 2 1 kv Steps 5 ky Steps The step value in kV used when altering demanded kV is set by this control This may be set to 1 kV Steps or 5 kV Steps If set to 1 kV steps then the kV control on page 19 interface will display four buttons two to control the increase and decrease in kV in 5kV and two to control the increase and decrease of kV in 1kV When set to 5 kV steps then the kV control will only display two buttons to control the demanded kV in 5kV steps Power or Current Step Style Power Step Style Normal Intelligent Power step style 34 XTMO026 A1 User Manual u Step Style Normal Intelligent Current step style X ray Controller This property controls the response of the power or current control demand change buttons If set to Normal the buttons will change the demanded power or current by the following values Power Small change buttons 0 1W Current Large change buttons
523. to conditioning the X ray source daily is recommended typically at the start of a day Auto conditioning is also required after the filament has been changed or if the generation of X rays becomes unstable There are two auto conditioning modes within Inspect X normal auto conditioning and intelligent auto conditioning Which mode is used is defined in the properties on page 36 Normal Auto Conditioning To auto condition the X ray source first set the required maximum kV on page 11 that you will use It is usually best to set the maximum kV that the X ray source will handle as this will ensure stability of the source After setting the required maximum kV then press the auto condition button This button stays depressed whilst auto conditioning takes place The X ray status on page 13 will update to show that auto conditioning is taking place During auto conditioning the X rays will switch off and on automatically until the X ray source stabilises at the maximum kV set Once the X ray source has stabilised for a number of minutes then auto conditioning is complete and it may be stopped by pressing the auto condition button again so that it is no longer depressed or by pressing the Switch X rays Off on page 13 button When the X ray source is being auto conditioned the time that the source has been stable at the demanded kV is displayed in the Information Window on page 58 16 XIMO26 A1 User Manual X ray Controller
524. to disk by pressing the Save button Add Recorded Actions Add To add the recorded actions to the selected inspection program press the Add button The actions are added to the end of the list of actions for the specified component Add Script as 7 If the actions attached to a Script Button on page 353 are required to be added to an inspection then select the required named script button in the menu accessed by pressing the option button If the same set of actions need to be repeatedly be added then after the initial selection of the required script button then subsequent times the Add Script button can be pressed to add the actions again 302 XIMO26 A1 User Manual Inspections Editing an Inspection When an inspection program is either being created or edited then the Inspection tab is updated to show the Sample on page 306 Component on page 310 and Action on page 315 management controls This allows for the definition of new samples and components to be inspected and new actions for components It also allows for the editing of existing samples components and actions When the editing is complete press the Save button to save the changes and then press the Done button to return to the inspection management on page 296 to run it PE4 Allowable Failures oO Sample Component Actions Acquire Image BGA Analysis Save Image Save Image Acquire Image BGA Void Analysis Save Image Save Image
525. to enable auto focusing then the Auto Focus button will be displayed If this button is pressed then the Auto Focus window will be displayed Auto Focus Before starting Auto Focus 1 The filament must be physically aligned in the Focus cup 2 The filament demand must be set correctly to produce an image 3 The target must not be burnt Rotate it if necessary 4 4 sample with small detail must be in view and at very high magnification Auto Focus Parameters Maximum ky igol gt Minimum ki 45 O Before starting the Auto Focus function ensure that the conditions as noted on the Auto Focus window are set Then select the kV range over which the auto focusing is to be performed and press the Start button Auto focusing will take some time to complete especially if a large kV range is selected If the Reset button is pressed then the focus values will be set to their default values This will not produce a crisp X ray image but will be a very good starting point for the Auto Focus function The Auto Focus function finds the focus at 5kV steps within the specified range Once these values have been calculated then the intervening 1KV focus values are calculated by interpolating between the adjacent pairs of 5kV values User Manual XTMO26 A1 53 X ray Controller Controller Xi The Controller properties tab pane will display different controls dependent upon whether the hardware X ray controller is a Xi controll
526. to exclude bridged BGA balls when performing a count on a BGA When the Threshold object type is selected these extra controls are displayed in the Region of Interest window Threshold 573 Number of Dilations n bs To define the area to be excluded click upon a point within the object to exclude with the left mouse button This will use the grey level of the pixel in the X ray image at that point to define the Threshold An example is shown below F n j y ii a tI dk 0600000605000 e e r FT D o gt 0 0 E 0 o as E TH L e LAAL a T i l a 6 0000 E zl en oe 3 7 E j of me a i sirel p a User Manual XTMO26 A1 275 Image Processing The Threshold can be altered within the Region of Interest window as required A number of Dilations can be applied A dilation expands the dark area of the object When the settings is as required then press the Exclude or Include button and the region will be excluded from or included to the region of interest as required 7 0600000000090 OED eae J 6600604000 i i a ot 5 606000060000 e n 0e I 5 e ee Fa ew A ae ala pal 6000600800 6 i Pii HF a LJ l i r 4 al a oe i B MNM baad Regions of interest that include objects included to excluded by threshold require that the X ray conditions are not varied when re using t
527. to the component are displayed in the Notes text box 10 10 2007 16 31 Bridging Failure 7 This note can be saved to the inspection results file by pressing the Save button If the HTML report is to be re generated then this can be done by pressing the Report button User Manual XTMO26 A1 399 How to Get More Out of Inspection Programs Changing the Status of a Component If the user determines that a component was identified as failure by the inspection run but after examination the component can be passed then this can be recorded by selecting the required component in the Components list and then pressing the Change Status button This opens the Change Status window The reason for the change of status can be entered and the new status can be selected Note components status can be changed from pass to fail or fail to pass When the window is closed the change of status is recorded in the Notes text box 10 10 2007 16 37 Component status changed to PASS Marginal Failure that is acceptable as a pass This change of status can be saved to the inspection results file by pressing the Save button If the HTML report is to be re generated then this can be done by pressing the Report button Operator Identification If the operator running an inspection program or validating results on the Validation Station is required to be tracked then this can be done by setting the Require Operator ID property in the application prope
528. ton is enabled To record and save the present X ray conditions press this button Image Exposure Image exposure seconds When acquiring images the time over which the image is captured is specified by this control User Manual XTMO26 A1 327 Inspections Position Calibration Action A position calibration action is used to correct for small positional differences between the placement of samples on the manipulator This is similar to a fiducial calibration but is normally performed upon each component rather than once for the whole sample The method used is to acquire a reference image and then when the action is executed it acquires another image and compares the two images to calculate an offset It is highly recommended that samples being inspected are held within a fixture Position Calibration Reference Image Higher precision Minimum calibration quality so o ray Flux calibration 70 72 e Use X ray Flux calibration w x ray conditions Image exposure seconds Error The reference image does nok exist 328 XIMO26 A1 User Manual Inspections Create Reference Image Reference Image Position calibration is performed by comparing a reference image with an acquired image to calculate the manipulator offset to correct the position of the sample To create the reference image press the Create button Note that an error message is displayed whilst there is no reference image exists for this actio
529. ton is pressed the calibrate map window is displayed Map Calibration Adjust the red crop box on the image to exclude any black non image corners Then press the OK button 80 XIMO26 A1 User Manual Manipulator Controller When this window is displayed a red crop box is displayed on the main X ray image window Click upon the top left corner and the bottom right corner to drag the crop box to define the usable area of the image window This is particularly useful if the main X ray image window displays black corners that are not within the intensifier s field of view When the image area has been defined press the OK button to complete the map calibration Display Software Joysticks Display joysticks on user interface _ This function is only available when logged in as Engineer If software joysticks are required on the manipulator interface rather than using the inspection system s joysticks then check this check box When software joysticks are enabled the inspection system s joysticks will not control the manipulator If this check box is clear then the inspection system s joysticks will control the manipulator User Manual XTMO26 A1 81 Manipulator Controller Calibrate XT V 160 Back Offs Calibrate Revolution back oFFs Calibrate This function is only available when logged in as Engineer and the inspection system is an XT V 160 The window that is opened by this button guides the user through
530. top increasing kw i Change in vacuum to decrease ky J Time to hold at ky before increasing kw z e seconds Before starting the auto conditioning of the X ray source the parameters need to be set These can either be set to their default values by pressing the Defaults button or can be manually entered The Start kV defines the kV at which the auto conditioning process starts The Maximum kV defines the KV at which the auto conditioning process will stop increasing the kV This may be the maximum kV supported by the X ray source or lower if required 26 XIMO26 A1 User Manual X ray Controller During auto conditioning the kV will step up in steps of 5kV from the Start kV until either there is a breakdown in the X ray source or the Change to 1kV Steps value is reached This enables fast auto conditioning at lower kV values but increased stability of the auto conditioning process at higher kV values or after a breakdown Whilst the auto conditioning is in progress then Inspect X will monitor the quality of the vacuum within the X ray source If the vacuum rises by more than the value in the Change in Vacuum to Stop Increasing kV numeric control then the demand kV will not be increased until the vacuum level gets back to the best level monitored If the vacuum rises by more than the value in the Change in Vacuum to Decrease kV numeric control then the demand kV will be decreased This is to avoid a breakdown within the X ray source Wh
531. tored on the reconstruction computer and the name of the projection images and the reconstructed volume X ray Filter E x ray Filter Copper Ph E If an X ray filter is being used to harden the X rays to improve the quality of the reconstructed volume then the details of this filter are entered into the X ray Filter controls If the CT Profile for this data set is reloaded then a prompt will be displayed to ensure that the same X ray filter is reused User Manual XTMO26 A1 423 3 D CT Acquisition Acquisition Reconstruct Minimise ring artefacts The Reconstruct checkbox controls if the CT data set is to be reconstructed directly after acquisition If the data set is to be viewed in CT Pro before reconstruction then do not check this checkbox If the Minimise Ring Artefacts checkbox is clear then a Fast CT data acquisition shall be performed The sample shall be rotated continuously whilst the projection images are acquired This acquires the CT data set at a much faster rate but may show up ring artefacts within the reconstructed volume If the checkbox is checked then a process is undertaken to minimise the ring artefacts This takes longer to acquire but reduces the ring artefacts within the volume If dual energy acquisition has been selected in the CT Properties on page 428 then the minimise ring artefacts checkbox is checked and disabled This is because dual energy scanning can only b
532. trons are decelerated by interaction with the electron clouds of the atoms in the target then the precise nature of this interaction which is different for each electron determines the amount of deceleration and therefore the energy of each X ray produced Energy flux Untitered in acuurn Maximum photon energy Bremsstrahluing j Photon energy 0 50 100 150 keV Typical X ray spectrum Therefore the maximum possible energy of an X ray produced when using 100kV of acceleration is 100keV but most X rays will have less energy than this In fact the X ray beam has a wide spectrum of energies as shown above The spikes in the spectrum are due to electron transitions in the electron clouds of the atoms in the target and are specific to the target material 446 XIMO26 A1 User Manual How to Get More Out of 3 D CT The CT reconstruction software assumes that the X rays that hit the detector all have the same energy In fact since the detector does not measure the energy of the X rays their different energies cannot be determined Now X rays of different energies interact differently with any given material In particular lower energy X rays are stopped more quickly by a shorter path length in any given material than are higher energy X rays So trying to estimate the density and path length of material by looking at the image brightness and in particular the amount by which the image brightness has been reduced
533. tton of the slider Once the image brightness does not increase any more then nudge the slider until the focus becomes slightly sharper Once this has been done the filament demand has been set to the optimum value for image brightness for the maximum current setting that you specified and for filament life at this current User Manual XTMO26 A1 43 X ray Controller Changing the value of the filament demand is performed by updating the slider To adjust move the slider by either moving the thumb of the slider or by pressing the nudge buttons on either side of the slider If a nudge button is held down then the slider will move towards that end of the slider until either the button is released or the end of the slider is reached The present value of the filament demand is displayed as a numeric value Remember that the filament demand value is NOT saved until the Save button is pressed Reset Filament Lifetime Timer Filament Lifetime Inspect X provides a read out of the time for which X rays have been turned on see the Hours On read out on the Information on page 58 panel This read out can be used for preventative maintenance purposes for example changing filaments before they burn out The Hours On time can be reset by pressing the Reset button On XT V 160 and XT V 130 systems this control is not displayed The filament lifetime counter is reset when the Auto Filament Control Calibrate function is run Auto Filament Co
534. tus of components inspected As an inspection program is run then the map is marked with green and red overlay to show the status of each component inspected A green overlay shows that the component passed inspection and a red overlay show that the component failed inspection When the inspection program has completed running then the status overlay on the map can be used to view the components If only one image was captured to inspect the component then if the user double clicks upon the overlay on the map then the manipulator will automatically move to the required position to view the component If more that one image was captured to inspect the component then when the user double clicks upon the overlay a menu will be displayed from which the required view may be selected 390 XIMO26 A1 User Manual How to Get More Out of Inspection Programs BGA Analysis FAIL BGA Void Analysis P 455 BGA Void Analysis P455 BGA Void Analysis P455 BGA Void Analysis P455 ES Menu showing views of a component The status map is also embedded within the inspection report at the top so that it can be used to quickly assess the status of each component User Manual XTMO26 A1 391 How to Get More Out of Inspection Programs Running an Inspection Program When you run an inspection program you need to specify the serial numbers of the samples Sample Serial Numbers When an inspection program is run then the serial numbers
535. tus of the X ray source It also provides an exposure timer control that allows the X rays to be switched off automatically after a user defined period x ray Controller Status Status Exposure Timer Head Type a Hours On 90 56 Hours Mins Minutes Set Demand u Seconds Set Absolute Value Demand Actual Value mar vacuum ea E Turbo at Speed Cathode Current ol Set Point Exposure Timer The exposure timer allows the X rays to be automatically turned off after a user defined period in the range of 1 second to 99999 minutes and 59 seconds Exposure Timer Timer Active F Minutes Set o Seconds Set oOo 7 00 00 To enable the exposure timer check the Timer Active check box After this is done the next time the X rays are switched on on page 22 the exposure timer will start counting down When the timer reaches 0 the X rays are automatically switched off The current time left on the exposure timer is shown in the box just above the Reset button 58 XIMO26 A1 User Manual X ray Controller To set the length of the exposure timer set the required time on the Minutes Set and Seconds Set edit boxes Pressing the up and down buttons within the edit box will increment and decrement the value respectively When the exposure timer is active it may be reset to its initial value by pressing the Reset button If this is done whilst the X rays are on the X rays will not be switc
536. ual X ray Controller Electromagnetic Alignment This information is relevant to all systems both Xi and SR controlled sources Two pairs of coils the X shift and Y shift coils are mounted between the anode ring and the magnetic lens Passing a current through these coils steers the electron beam facilitating source alignment The degree of deflection can be controlled using the X Shift and Y Shift on page 49 sliders on the Focus panel within the properties of the X ray Controller Supervisor Level Filament Demand 4 Y P Filament Lifetime shift LE y H A ShiFt a J o o s Shift and Shift Max kw mid kw Interpolate Min ky Focus Mode gt Normal Auto Defocus Set up Focus Engineer Level Coarse Focus 4 LA Fine Focus 4 LJ gt Focus Properties Tab User Manual XTMO26 A1 41 X ray Controller Supervisor Level Filament Demand q 7 j Auto Filament Control Filament Calibrate Recalibrate Filament Change x 5hift LE J b A ShiFE Fg J F o Shift and 5hift Max kw _ l mide rerpolate mow C Focus Mode Normal 2 Auto Defocus Set up Focus Engineer Level Coarse Focus d I Fine Focus 4 b Focus Properties Tab for XT V 160 Inspection System Beam Alignment at a Set kV Demand Level In order to perform alignment it is recommended that you follow this procedure 1 For SR controlled X ray sources ensure that th
537. uidelines are dragged out from the left side of the histogram and green guidelines are dragged out from the right side When a guideline has been set it is possible to move it by clicking upon the required guideline with the left mouse button and dragging it to the new grey level To remove a guideline drag the required line to the left edge of the histogram for red guidelines and to the right edge for green guidelines When guidelines have been set on a histogram they will appear on all histograms displayed within other image processing functions This enables the tracking of specific grey levels User Manual XTMO26 A1 195 Image Processing Background Image Subtraction The background image subtraction function can be used to eliminate unwanted features within an image These can include the non uniform intensity across the image or features or defects within a particular sample or holder Background image subtraction can be used either on live or captured images in the supervisor level interface and on captured images only in the operator level interface Skilful use of this function can produce excellent images in otherwise difficult conditions Apply Set Background Subtraction Image Set A To set the image currently displayed in the main X ray image window on page 169 as the background subtraction image press the Set button This function will only work if a captured image is displayed within the main X ray image windo
538. uisition of a CT data set the X rays trip off for any reason then it is possible to re attempt the relevant part of the CT acquisition If however the X rays keep on tripping off then there is a problem and the CT data set acquisition will need to be aborted to avoid possible damage to the X ray source 428 XIMO26 A1 User Manual 3 D CT Acquisition The X ray trip control function will allow a certain number of X ray trips within a specified period If more than this occur then the CT data acquisition is aborted The period of time used to monitor the X ray source is specified by the Reset X ray Trip Count if No Trip Within numeric The allowable number of trips within this period is specified by the Maximum Allowable Consecutive X ray Trips numeric If less X ray trips occurs within the time period then the X ray trip count will be reset to zero The effect of this function is that there is a sliding time window during which no more than the allowable X rays trips can occur After the X ray source has tripped the vacuum within it will need some time to stabilise The Delay Period After X ray Trip numeric specifies the number of seconds to wait after an X ray trip has occurred during CT acquisition before the X rays are switched back on If the X ray source trips during a Fast CT acquisition then the Restart Fast CT From Current Angle checkbox controls what happens e lf the checkbox is clear then the Fast CT acquisition will be restar
539. uisition to Speed By doing so each image of the map will be acquired as quickly as possible User Manual XTMO26 A1 79 Manipulator Controller Map Resolution Map Resolution Normal High O very High If changing map resolution has been enabled in the Engineering Tool then these controls are displayed This allows the resolution of the map to be changed The default is Normal High resolution will produce a map of twice that of Normal and Very High will produce a map of four times that of Normal Selection of a map resolution higher than Normal may result in there being not enough memory to acquire maps of very large areas Map Calibration Calibrate Before the manipulator map can be used it must be calibrated for the system As the manipulator map is made up of a number of images that are pieced together it is important that the optics within the imaging system are correctly aligned This calibration process cannot compensate for optics that are not aligned correctly The alignment of the optics requires a skilled engineer The process of map calibration ensures that the images fit together correctly and that demanding a manipulator position using the map will ensure that the correct area is put into view within the main imaging window To calibrate the manipulator map press the Calibrate button The manipulator must have been homed on page 69 before the calibration process can be performed When the Calibrate but
540. ulting from the use of information contained in this document or from the use of programs and source code that may accompany it In no event shall Nikon Metrology be liable for any loss of profit or any other commercial damage caused or alleged to have been caused directly or indirectly by this document 2 XIMO26 A1 User Manual 2 Important Health and Safety Information Nikon Metrology EXPRESSLY FORBIDS ANY ALTERATION OF THE EQUIPMENT ANY MODIFICATIONS WILL RENDER ANY EQUIPMENT WARRANTY VOID AND MAY LEAVE THE SYSTEM IN A DANGEROUS CONDITION Before Installation The relevant HEALTH and SAFETY at WORK authorities for your country must be informed that you are in possession of equipment for the generation of X RAYS You must comply with all legislation for X ray generating equipment existing in your country Before Inspection This section contains essential safety information All operators must have read and understood this section and received operator training before using the X ray system for X ray inspection Understanding the Hazards X ray Radiation X rays are ionising radiation Exposure to ionising radiation can cause lasting injuries disfigurement and in extreme cases death The X ray inspection system controlled by the Inspect X software has been designed and built to United Kingdom lonising Radiation Regulation Standards 1 and conforms to European Union 2 and United States of America standards 3 The system is ce
541. ults tora Sample isc each edie he ieee R 398 Adding a Note to a Component s Results ooccccocccccccnnococonocanononononnncononannonononocanononanonos 399 Changing the Status ofa Componentes sisi actor geist elie Reece aot ete eee 400 Operator IdenticalOMa taa 400 Example of Programar alo daa aid 401 9 3 D CT Acquisition 403 FRECONSIFUCTING thes D VM iaa ai 404 Sample is ida 405 AS O 406 A a te oe oma eee igen aceon Slee 406 Sening thie Wal ay CONOS oda 407 Setting the X ray Conditions for Dual Energy ooccccccoccnccconcnnconocononnncnnononcnnnnnanonnonancnnonancnnnnnas 409 PINO MaS AM ite cot caste inst a a a e A a a O 410 CTATM POSO WOOP ART AEON AEEA loas EA AEA 410 Panel Scan CT AT H225 SMS li elec 411 Moo Ss SF arel A NEEE EE ATENO EAN AEE EE PENA AE AEE E EAA T TTEN 412 Snading CONC e a a a a a r O 412 Minimum Frames for Reference IMages cccooccccccccnccccnnccocononocononononnnnnnonannnnnnnnononnnonanenenaninnas 413 Disable Shading Conecto acc fer decor a erent ie Stes laa ad 413 Shading Corecom SCI CHO Mists o ao 413 Shading Correction Selection for Dual Energy occcccccnccoccnccccnnnccccnoconononnnnnonnnnnnnnnononnnononenononos 414 Latency Compensation for Panel Scan XT H SyStemMS cccocccccnccncccccnccoccnononononncnononcnononcnononononos 414 Cente OL FRO LATO usa ato did 415 AION Vat GG GIG UA Orn te aacarn thease etre id 415 Manual Calcula ON ia tec ied at ha site ec ict iaa 417 FSCO S UG TON SUD NA
542. um horizontal diagonal of 35mm and your detector has 1000 pixels across it then your sample should span about 900 pixels and so you will get a resolution of just under 40um Note that if you choose the option to minimise ring artefacts then you should leave a slightly larger gap at the edges than if not as this method uses small sideways movements of the sample to achieve its goal A maximum of 15 pixels extra at each side will be required There are however circumstances when you can allow parts of the sample to leave the sides of the imaging system at some rotation angles When these parts are of lower density than the central region that you are examining and when these parts are reasonably uniform as the sample is rotated then the effect of these parts on the reconstructed volume will be negligible In this way higher resolution data from the central region can be obtained Bear in mind though that the absolute density measurements from such region of interest CT scans will be affected by the missing parts of the specimen but this will not stop you seeing or measuring the size of defects or sub components within the specimen 440 XIMO26 A1 User Manual How to Get More Out of 3 D CT How to Choose the Correct X ray Settings Increasing the X ray voltage increases the penetrating power of the X rays which means that more X rays pass right through the specimen to hit the detector and so that the image becomes brighter It is important to ma
543. unction to control the tilt and rotate axes of the manipulator Only one of these axes can be moved at any one time After holding down the mouse wheel button with the ALT key pressed the joystick function acts like the physical joystick on the system as though there is a cross shaped gate If the cursor is moved up and down from the initial point then the tilt axis will be controlled If the cursor is moved left and right from the initial point then the rotate axis will be controlled To switch which axis is being controlled move the cursor back to the initial point as identified by the cursor changing see below and then move in the required direction When the wheel is held down and moved up or down on the screen from the initial point at which the wheel was pressed then the manipulator s tilt axis will be moved When the wheel is held down and moved left or right on the screen from the initial point at which the wheel was pressed then the manipulator s rotate axis will be moved The speed of movement of the axes are controlled by the distance from the initial click point The further the cursor is away from this point the fast the axis will move The movement of the axis will stop when the wheel on the cursor is released 4 Sel This is the cursor shown when the wheel is initially clicked and held down This shows the initial click point and acts as the centre of the joystick control function h When this cursor is disp
544. unction works for regularly spaced identical Features Spacing in 2 00 mm Spacing in Y 2 00 mm Number horizontally 4 Number vertically gt lun User Manual XTMO26 A1 313 Inspections These are the components horizontally and vertically with respect to the X ray image displayed This may be different to your sample s initially loaded orientation if you have rotated the sample using the manipulator Note that the example above defines the number of samples as a 4 by 2 grid Then press the OK button to create the new components Step and Repeat Specify Increment in Rotation When the manipulator is at the start position it is possible to step and repeat by specifying an increment in the rotation axis This is done by entering into the Step and Repeat Window the increment in the rotation axis and the required number of steps Enter the angular increment and the number of steps and press IK Mote that this Function works For regularly spaced identical features Angular increment 1 00 degrees Number of steps 20 E Then press the OK button to create the new components Delete Component Delete To delete an existing component and all the actions associated with this component select the component to be deleted from the component list and then press the Delete button A prompt to confirm deletion will be displayed Reorder Components When an inspection program is run the actions for each component are run
545. updating of shading corrections Set The sate position must be set To set the Manipulator Safe Position move the manipulator to the required position and press the Set button This position is used for both filament recalibration and standard shading corrections updating User Manual XTMO26 A1 549 Scheduled Tasks Updating the Standard Shading Corrections Standard Shading Corrections Update For all imaging presets a Use previous ray conditions Automatically set X ray conditions Acquire white images onl To update the standard shading corrections for all imaging presets check the Update for All Imaging Presets checkbox If not required uncheck the Update for All Imaging Presets checkbox This update function will only update the shading corrections for pre defined imaging presets on page 288 only When the task is run then the update standard shading corrections on page 104 function is run if selected This will require the Manipulator Safe Position to be set This is a position that the manipulator will move to before the updating function is run The position must be somewhere where there is no sample or section of the manipulator is in view If no safe position has been set for the task then the following warning will be display Manipulator position For updating of shading corrections Set The sate position must be set To set the Manipulator Safe Position move the manipulator to the required position
546. ur then there may be a problem within the X ray source You need to contact either Nikon Metrology or your agent to have the system checked The vacuum within the X ray source is not good enough for X ray generation You need to wait for the system to pump down to make a better vacuum If this state is displayed after the system has been pumping down for more than one hour then there is a problem within the X ray source You need to contact either Nikon Metrology or your agent to have the system checked User Manual XTMO26 A1 23 X ray Controller Focus Adjustment focus Co J Fine focus of the X ray beam is adjusted by use of this control This control is not enabled when the focus mode has been set to auto defocus within the X ray controller properties and the X ray power is above the defocus threshold If the focus of the X ray beam cannot be brought into focus by adjusting this control then other actions are needed to rectify this The following should be checked and adjusted by the supervisor using the supervisor level interface on page 19 of the X ray controller X and Y shift on page 49 alignment of the X ray beam Filament demand on page 43 Check that the target on the X ray source in the X ray inspection system is not burned A E The focus on page 50 of the system may require to be adjusted To adjust the fine focus move the slider by either moving the thumb of the slider or by pressing the nudge buttons o
547. urements this the diagonal line across the green box between the nodes For Angular measurement this is the green line For the Edge Detect Line function the locations of the orange edges detected is indicated by two vertical orange lines For the Edge Detect Arc function this is the centre angle from the edge to the arc origin The profile can be saved as either a CSV or text file by pressing the Save button 204 XIMO26 A1 User Manual Image Processing Histogram Grey Level 27646 Pixels 1663 Max 65260 Min 1536 Average 22650 Std Dey 76666 0 The histogram in the Measurement function is slightly different to the histograms in the other image processing functions In this function the histogram is not of the whole image but only of the area bounded by the box on the X ray image when in Linear or Angular modes This allows for the generation of a histogram for any rectangular region of the image In Edge Detect Line mode it is the image data under the line only and for Edge Detect Arc this function is not used When the mouse is moved over the body of the histogram the grey level information corresponding to the mouse position is displayed below the histogram The information displayed is the grey level and the number of pixels in the image that contain that grey level Grey Level 12600 Pixels 120 Max 65260 Min 1536 Average 22650 Std Dey 76666 0 So that specific grey levels may be marked for future use or tracking
548. used within a script button it acquires an image at the manipulator s current position using the specified imaging settings and X ray conditions Properties The inspection properties control how inspection programs run These properties are available within the Properties Window on page 583 that may be opened from the Inspect X main menu on page 5 7 or the Properties on page 151 button on the Image Processing tool bar After making changes to the properties press the Save button To revert the properties to their last saved values press the Revert button To close the properties window press the Close button Updating of the inspection program properties can only be performed if logged in as the supervisor Revert Save Close SS II gq lt A The Save button saves the updated properties to permanent storage so that they will be used the next time the Inspect X application is run The Revert button will reset all the properties that have been altered but not saved to their last saved value The Close button closes the Properties window 394 XIMO26 A1 User Manual Inspections General Properties General On Failure Save Image Action Auto Incrementing Names Leading zeroes in incremented names 4 Run Inspection Control Move to load position Switch X rays off Higher precision Show results table Auto pass visual check actions Timeout For auto pass 5 4 seconds Abort inspection if Fiducal c
549. user interface Calibrate XT Y 160 back offs Calibrate 78 XIMO26 A1 User Manual Manipulator Controller Filament Change Position Move On the XT V 160 inspection system to move the manipulator table into a position to facilitate the changing of the filament in the X ray source press the Move button When the filament change operation is complete move the manipulator using the joysticks back to an operating position where the sample can been seen Y Axis Position for Datum Y axis position for turntable Datum 420 00 Set On an inspection system fitted with a linear detector then positions within the scatter free radiograph are related to a datum position on the Y axis This is often set to be the top of the manipulator s turntable To set the value either move the manipulator s Y axis to the desired position and press the Set button or if the value is Known enter the value into the Y Axis Position for Turntable Datum numeric This control is only displayed on inspection systems fitted with a linear detector Map Acquisition Map Acquisition Quality Speed The speed of the map function is determined by these radio buttons see topic Radio Button on page 590 If the Map Acquisition is set to Quality then each tile of the map is averaged over a period of 1 second This gives a map image of good quality If the speed of mapping needs to be increased this can be done by setting the Map Acq
550. user to be able to save a set of recorded actions to an inspection program As a result of this you do not have to go into a programming mode to create an inspection program Recorded actions The list of recorded actions is cleared every time an image is either acquired or opened from disk To view the actions that have been recorded press the Show Recorded Actions button on the Inspections tab page Recorded Actions Acquire Image Tone Edit Measurement Reorder Actions The order of the actions in the list can be changed To change the order of the actions select the action that you wish to move in the list To move the action up press the Up button To move the action down press the Down button This may be repeated any number of times Execute Action Any action in the list of recorded actions can be run by selecting the action in the list and pressing the Execute button User Manual XTMO26 A1 299 Inspections Delete Action To delete any action from the list of recorded actions select it in the list and then press the Delete button You will be asked to confirm the deletion Add Actions to Inspection To add the recorded actions to an inspection program press the Add button This will display the Add To Inspection on page 300 window New inspection programs can only be created if logged in as the supervisor Add to Inspection When recorded actions are to be added to an inspection pro
551. utton Switch Mode Supervisor Mode To switch from operator mode to supervisor mode then press the Supervisor Mode button and enter the supervisor password This will display the full Inspect X control window User Manual XTMO26 A1 543 2 D Inspections Properties The inspection properties control how inspection programs run These properties are available within the Properties Window on page 583 that may be opened from the Inspect X main menu on page 5 7 or the Properties on page 151 button on the Image Processing tool bar After making changes to the properties press the Save button To revert the properties to their last saved values press the Revert button To close the properties window press the Close button Updating of the 2 D inspection program properties can only be performed if logged in as the supervisor Revert Save ss Else The Save button saves the updated properties to permanent storage so that they will be used the next time the Inspect X application is run The Revert button will reset all the properties that have been altered but not saved to their last saved value The Close button closes the Properties window Database Control Insert results into database Server Mame DatabaseservernSQLEXPRESS Mame Password Database Name BladebiB x Table MainT able State Mot connected 944 XIMO26 A1 User Manual 2 D Inspections Insert Results into
552. utton Note it is possible to replicate one or more actions A The step and repeat sample function will only work correctly for regularly spaced patterns of features If the spacing between these patterns varies then the correct positioning of acquire image or visual check actions will fail User Manual XTMO26 A1 317 Inspections When the Repeat button is pressed then a check is made on the actions Step and repeat can only be performed when there is at least one Acquire Image on page 332 of Visual Check on page 334 action is selected If is not true then an error message will be displayed and the step and repeat function will not be performed Providing there is at least one of these actions then the Step and Repeat Window will be displayed and the manipulator will be moved to the first position within the selected actions Step amp Repeat Specify positions manually amp 1 Specify positions by increment X amp Y Specify positions by increment Rotate 1 Move the manipulator to the position on the last Feature that corresponds to the First position on the initial Feature 2 Enter number of steps relative to the main 4 ray image and press OK Mote that this function works For regularly spaced identical Features Number horizontally Number vertically There are three modes of step and repeat 8 Specify positions manually 0 Es Y Specify positions by increment x amp Y O Spe
553. utton will update the action s manipulator position to the current manipulator position Note that this position will have position correction applied to it when running the inspection program if a position calibration action precedes the acquire image action within the inspection program This is all automatically handled within the Inspection function Higher Precision Higher precision mt The precision of the move to position executed by this action needs to be of higher precision then check this checkbox When the action is executed then 2 moves will be made to ensure the best accuracy of positioning This only really needs to be used when viewing the sample at a very high resolution Include Map Image Include map image w If a copy of the map image showing the position of the component being inspected is required within the report generated by running the inspection program then check this check box This function only works if the manipulator map has been copied into the inspection program by pressing the Get Map on page 304 button User Manual XTMO26 A1 333 Inspections Visual Check Action This action moves the manipulator to the user defined position and displays a live X ray image for the user s assessment for pass fail status During the user assessment all the image processing tools can be used isual Check ray Flux calibration 100 51 Use x ray Flux calibration arar conditions Get Manipulator
554. ve control To move a point click upon the required point using the left mouse button and drag the point whilst holding the button down Moving a point towards the upper left hand corner of the control will lighten a set of grey scale values Moving a point towards the lower right hand corner will darken a set of grey scale values The Input and Output readouts specify the input and output grey value for the point in the tone curve underneath the cursor as it tracks across the tone curve User Manual XTMO26 A1 181 Image Processing Brightness and Contrast When using a straight line this control can be used as a simple brightness and contrast control This is achieved by moving the two end points of the line The brightness is altered by moving the line towards the top left hand corner to increase brightness and to the bottom left hand corner to decrease brightness The contrast is altered by changing the gradient of the line Making the line more vertical increases the contrast and making the line more horizontal decreases the contrast Increased brightness Decreased brightness Increased contrast Decreased contrast No tonal change 182 XIMO26 A1 User Manual Image Processing Tonal Range Improvements As well as simple brightness and contrast adjustments it is possible to make more advanced adjustments to enhance various tonal ranges within the image To adjust the tone curve extra points will need to be added The
555. ved up the screen from the initial point at which the wheel was pressed then the manipulator s magnification axis will be moved to decrease the magnification of the sample being viewed Moving the mouse down the screen from the initial point will move the manipulator s magnification axis to increase the magnification of the sample The speed of movement of the magnification axis is controlled by the vertical distance from the initial click point The further the cursor is away from this point the fast the axis will move The movement of the axis will stop when the wheel on the cursor is released ai Y This is the cursor shown when the wheel is initially clicked and held down This shows the initial click point and acts as the centre of the joystick control function 174 XIMO26 A1 User Manual Image Processing When this cursor is displayed the magnification axis will be moved so that the magnification of the sample becomes smaller T When this cursor is displayed the magnification axis will be moved so that the magnification of the sample becomes larger Tilt and Rotate Axes XT V 160 Inspection Systems Only The scroll wheel on the mouse can used as a virtual joystick to control the tilt and rotate axes on a XT V 160 inspection system When the mouse is over the active X ray image and the image displayed is a live X ray image then if the mouse wheel is clicked whilst holding down the ALT key and held it enables a joystick f
556. verall voiding identified is displayed in the upper left hand corner of the image Minimum Void Size Minimum void size 14 To help remove small artefacts picked up by the void edge threshold when using thresholding it is possible to define the minimum size in pixels of a void used in the analysis This is done by entering a number into the Minimum Void Size text box Percentage Void Percentage void 23 02 The percentage of the area defined within the region of interest or the whole image if there is no region of interest that is voiding is calculated and displayed in the Percentage Void control 264 XIMO26 A1 User Manual Image Processing View Results po View Results When the parameters that define the package void analysis have been entered to view a detailed analysis press the View Results button This calculates a detailed analysis for the voids found in the die attach This detailed data is displayed in a separate window X Package Void Results MEX 22 12 2009 14 33 24 Package percentage void 23 04 Void ID A Area square mm Percentage 356 5 0 01 0 0 a0 0 01 0 0 eso 0 4 0 5 405 5 0 17 0 2 211 1 6 02 6 4 349 7 3 91 3 9 36 0 1 54 1 5 300 7 0 03 0 0 241 5 0 0 0 0 303 6 0 23 0 2 efl 4 0 4 Oe 415 5 0 02 0 0 414 0 0 01 0 0 16 0 0 01 0 0 abe 4 0 97 1 0 422 2 0 10 0 1 414 5 0 0 0 0 259 9 0 10 0 1 414 7 0 03 0 0 E 0 05 0 0 0 1 El 4 4 3 6 F a
557. w If a live X ray image is currently being viewed then this function will not work The image will replace any existing background subtraction image defined and is displayed in the image window in the Background Image Subtraction control 196 XIMO26 A1 User Manual Image Processing Load Background Subtraction Image Load To load a previously saved image as the background subtraction image press the Load button An open image file dialog will be displayed to allow the selection of the required image file The image will replace any existing background subtraction image defined and is displayed in the image window in the Background Image Subtraction control Remove Background Subtraction Image l Remove al To remove any defined background subtraction image press the Remove button If the background subtraction image was loaded from a saved image file then the image file will not be removed from the disk but will no longer be defined as the background subtraction image Apply Background Subtraction Apply To apply the background subtraction image to the current image in the main X ray image window press the Apply button Background subtraction can also be applied from the Live Processing on page 136 or Captured Image Processing on page 137 drop down list on the Image Processing Control Tool Bar Measurement A common use for X ray inspection systems is to make measurements of the physical siz
558. wait for the system to pump down to make a better vacuum If this state is displayed after the system has been pumping down for more than one hour then there is a problem within the X ray source You need to contact either Nikon Metrology or your agent to have the system checked Focus Adjustment Gre JIG 38 Fine focus of the X ray beam is adjusted by use of this control This control is not enabled when the focus mode has been set to auto defocus within the X ray controller properties and the X ray power is above the defocus threshold If the focus of the X ray beam cannot be brought into focus by adjusting this control then other actions are needed to rectify this The following should be checked and adjusted by the supervisor using the supervisor level interface on page 19 of the X ray controller X and Y shift on page 49 alignment of the X ray beam Filament demand on page 43 Check that the target on the X ray source in the X ray inspection system is not burned Ye Y The focus on page 50 of the system may require to be adjusted To adjust the fine focus move the slider by either moving the thumb of the slider or by pressing the nudge buttons on either side of the slider If a nudge button is held down then the slider will move towards that end of the slider until either the button is released or the end of the slider is reached The present value of the focus trim is displayed as a numeric value On inspection s
559. wall measurement the following needs to be done A unique measurement identifier needs to be input into the Label text box Then either check the Check Minimum Thickness or Check Maximum Thickness check box This will depend upon which measurement you have previously made using a calibrated measurement device Enter the measurement into either the Minimum Allowable Thickness or Maximum Allowable Thickness numeric Press the Add button A new wall thickness measurement will be displayed on the image Move the wall thickness object on the image so that it is measuring the required region 914 XIMO26 A1 User Manual 2 D Inspections The wall measurement object must have the cyan edges bisecting the wall to measure and must be on opposite sides of the wall If the contours within the measurement object are yellow then it is not measuring the correct region The label on the wall measurement object can be moved to any position that allows for easy reading of the image Region Naming and Selection Region Naming and Selection Label The Label drop down list allows for the naming of new regions and the selection of existing regions Note that it is also possible to select a region by clicking upon one of its nodes within the image To name a new region type in a unique name into the Label text box and press the Add button To select an exiting region select the required name from the drop down list Selecting the
560. where the mouse click is made To reset the zoom so that the whole image is displayed left mouse click upon the preview image again When the required image file has been selected then press the Open button to open the image in the main X ray image window on page 169 To cancel the opening of an image press the Cancel button 142 XIMO26 A1 User Manual Image Processing Image Profile Load image profile if available If the image profile file named lt image name extension gt xml is available in the same folder as the image then it can be loaded by selecting this checkbox The image profile file contains the state information about the image including the geometric magnification at which the image was captured and the last image analysis edit performed on the image By loading the image profile the last image analysis will be reloaded into the relevant image processing edit control and measurements can be correctly made on the image Save Image To save the image within the main X ray image window on page 169 to a file on disk press the Save Image button This will display a dialog that allows the user to specify where to save the image This is an enhanced version of the standard Windows save file dialog Save in C IC2 a My Recent Documents 3 Desktop My Documents Qs My Computer a File name My Network Save as type TIFF Files tif Pixel depth 8 bit 276 bit Image Grey
561. which no sample is in view at all angles Flux normalisation is defined on a part image Select the required part image and draw the box Flux normalisation defined on image Outer Left we Acquisition mode Central CT Panel scan CT 2 images Panel scan CT 4 images Guter Left Inner Left Inner Right Outer Right CT Profile On an XT H system that has been fitted with a scanning imaging device the user is able to select the type of acquisition The choice is Central CT in which the imaging flat panel is fixed in its central position or Panel Scan CT in which the imaging flat panel moves to take left and right images Central CT is the same as performing CT on a non scanning flat panel system Panel Scan CT 2 Images enables CT acquisition of very wide samples as the projection images are effectively twice the width For each projection a left and a right image are acquired and then stitched together User Manual XTMO26 A1 411 3 D CT Acquisition Panel Scan CT 4 Images enables CT acquisition of very wide samples as the projection images are effectively four times the width For each projection a four images are acquired and then stitched together Note this is only available on systems that are configured with an imaging device that can achieve four positions When aligning the sample the Move Panel buttons allow the user to see the left and right images so that they ca
562. window to adjust the X ray flux This has two effects The first is to reduce the contrast between the parts of the image formed by X ray penetrating large path lengths or dense material and the parts formed by X rays not passing through the object The second is to harden the X rays by removing low energy X rays If you are using a high voltage over 50kV then it is recommended to use a copper filter even if it is only very thin about 0 25mm This will reduce the range of energies in the beam so and make it more monochromatic Use a thicker copper filter for higher voltages Other materials may be used for special cases Contact Nikon Metrology if you have a particular problem in this area Alternatively another filter that can be used can be made from the material being inspected The filter would be typically up to 20 of the thickness of the sample User Manual XTMO26 A1 463 2 D CT Acquisition Note that if you have added a filter you will have to re check that the X ray conditions satisfy the two requirements Achieving the best image is an iterative process though with experience the process will be shorter In the example above it can be seen easily from the histogram that the X rays are not saturating the image as the peak at the white end of the histograms the right hand end is not at the maximum grey level i e the left hand edge of the histogram If the sample being inspected is more uniform in its dimensions it will be
563. with an inspection report 376 XIMO26 A1 User Manual How to Get More Out of Inspection Programs Example of Adding Recorded Actions If the recorded actions were as follows e Acquire Image e Tone Edit e BGA Analysis e BGA Void Analysis then with the default Save Image Control properties the following actions would be added to an inspection program e Acquire Image e Tone Edit e BGA Analysis e Save Image X ray image e Save Image Colour image e BGA Void Analysis e Save Image X ray image e Save Image Colour image This automatic adding of Save Image actions makes the creation of an inspection program really simple when adding recorded actions Main Program Actions Only Note that recorded actions can only be added to the main body of the inspection program and not to the On Failure on page 394 actions Adding Actions Manually There are some actions that cannot be recorded and if these actions are required then need to be manually added to an inspection program The actions that cannot be recorded are as follows e X ray Flux Calibration e Fiducial Calibration e Positional Calibration generally not used any more as fiducial calibration is better e Visual Check e Mark Failure User Manual XTMO26 A1 377 How to Get More Out of Inspection Programs To add any of these actions to an inspection program then they have to be added manually by opening the inspection for edit and pressing the New acti
564. word are not actioned until the Save button is pressed Password Entry If the user has logged in with supervisor level privileges and access to engineer level controls is required then press the Enter Password button The Password Entry dialog will be displayed in which the engineer password can be entered Password Entry Enter Password 988 XIMO26 A1 User Manual 21 Glossary of Terms B BGA A ball grid array BGA is a set of solder balls on the underside of a semiconductor device used to mount it C Computed Tomography Computed tomography CT is a process in which multiple X ray images are acquired from different angular view of the object being inspected These images are then reconstructed to produce a three dimensional representation of the object CSV File A comma separated values CSV file is used to store data structured in a table of lists Each line in the CSV file corresponds to a row in the table Within a line items are separated by commas each item belonging to one table column CSV files are often used for moving data between computer applications for example between Inspect X and a database program CT Data Set A CT data set is a set of projection images along with a reconstruction parameter file These files can be reconstructed to form a 3 D volume using the CT Agent application G Grey Scale X ray images within the Inspect X software are monochrome images consisti
565. x When flux normalisation is selected a crop box is displayed on the X ray image The area contained within this box will be used to monitor the brightness of the image The crop box must be set to a vertical area of the image through which no part of the sample or other obstruction will be seen during the acquisition of the scatter free radiograph User Manual XTMO26 A1 155 Image Processing The example below shows a live X ray image with the crop box Acquiring the Scatter Free Radiograph When all of the parameters have been set then the scatter free radiograph is acquired by pressing the Acquire button An example of a scatter free radiograph is shown below 156 XIMO26 A1 User Manual Image Processing Capture Image using Averaging To capture an averaged image from the live image in the main X ray image window on page 169 then press the Average Image button This will capture an image by averaging the number of frames To set the number of frames press the option button next to the Average Image button and select the required number on the pop up menu JE 1074 ale ob 10 b ae 16 me M 0 Whilst the image capture is being performed the averaged image will be built up by lines scrolling down the screen The higher the number of frames the higher the quality of the X ray image but with a curved linear detector an average of 1 frame per line gives a good image The number of lines within the imag
566. y recommended that this option is selected It is imperative it is selected if the inspection results are to be checked using an Inspect X validation station This is because the Validation Station requires the greyscale X ray images The Save Colour Image checkbox controls if an image with a colour overlay is to be saved The image analysis tools within Inspect X normally display the results of the analysis as a colour overlay upon the image If an image with this colour overlay is to be displayed in the inspection report then select this option User Manual XTMO26 A1 375 How to Get More Out of Inspection Programs Selecting X ray Conditions When Adding Acquire Image Actions When an Acquire Image action is added to an inspection program a check is made to see if the X ray conditions under which it was acquired match an existing X ray flux calibration If they do then the Acquire Image action added to the inspection is set to use this X ray flux calibration If the conditions do not then the following message is displayed Warning The acquire image action does not use an raw Flux calibration The action is not calibrated Re running an inspection sequence that contains uncalibrated actions will not produce consistent results Do you wish to create an x ray Flux calibration If the Yes button is pressed then the user will be able to define a new X ray flux calibration using a filter if necessary If the No button is pressed the
567. y the program s parameters Note that there will be no CT profiles listed for a newly created program A A 3 D CT Batch Program Operator I operatoriMcompan corn Mumber of samples 3 Sample tray type Sample Tray 4 3 D CT batch program CT profiles A 0 Delay between each CT acquisition Reconstruction computer MIALL P mm Shading Correction Safe Position Safe position set With the samplets mounted move the manipulator to a position where there nothing in view and then press the Set button To add the 3 D CT profiles to the program press the Add button The file that you need to select is the ctprofile xml file in the CT data set folder If more than one 3 D CT profile is to be added to the program then add each one using the Add button The 3 D CT profiles may be re ordered in the list by selecting a CT profile and then pressing either the Up or the Down button to move it within the list Setting Up the Program Parameters The other parameters within the 3 D CT Batch program will need to be defined These may be set up now or updated when the program is edited on page 490 User Manual XTMO26 A1 489 3 D CT Batch Editing a 3 D CT Batch Program When a 3 D CT Batch program has been created it may be edited to alter any of its parameters This is done by selecting the program in the 3 D CT Batch Program drop down list and then pressing the Edit button The 3 D CT Batch Program window then
568. ystems that have been enabled for auto focusing then the Focus button is displayed If this button is pressed then the focus trim will be automatically calculated User Manual XTMO26 A1 15 X ray Controller Auto Conditioning The conditioning of the X ray source is the process to achieve a stable operating voltage and hence a steady image The conditioning process involves slowly ramping up the demand kV with the filament turned down and no beam current is generated When a pre defined amount of leakage current is detected which can be indicative of an imminent breakdown the kV level is reduced until the leakage current subsides Once the current has reduced below a lower uA threshold kV is again ramped up This process continues until the X ray source holds a steady kV with no leakage uA at the kV to which the source is being conditioned On an SR controller the conditioning parameters are selectable via a switch inside the controller with options of hard normal or soft conditioning The Xi source conditioning routine is performed in software and unlike the SR conditioning routines is user configurable in the properties panel on page 55 The conditioning process needs to be done on a regular basis to ensure that the X ray source will perform as required If the X ray source is not conditioned regularly then when a high kV is demanded it is likely that the X rays will switch off automatically and the kV will not be achieved Au

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