PRO165LM Series Stage Manual
Contents
1. 150 ja 125 80 gt 8X M5x0 8 78 3 28X M6x1 0 7 0 F E 100 75 80 125 150 Y 4 Y l 16 5 8 THRU ALL i LJ 010 V6 5 25 O OO 0 219 1 i o 162 poe 25 50 75 1 l L o o DIMENSIONS MILLIMETERS o o TT3 MOUNTS THE FOLLOWING ADRS ADRT AGR A 100 75 150 150 100 165 SIDE MOUNT NOT AVAILABLE Figure 2 4 www aerotech com Og PRO165LM Accessory Tabletop Dimensions TT3 TT6 Options Chapter 2 21 Mechanical Specifications and Installation 22 DIMENSIONS MILLIMETERS PRO 165LM Hardware Manual MOTOR POWER OJo J MOTOR ENCODER FEEDBACK CONNECTOR INTERFACE Figure 2 5 Dimensions for Stages without a Cable Management System CMSO Option Chapter 2 www aerotech com PRO165LM Hardware Manual Mechanical Specifications and Installation 2 3 Securing the Stage to the Mounting Surface WARNING The PRO165LM must be mounted securelv Improper mounting can result in injurv and damage to the equipment WARNING Make sure that all moving parts are secure before moving the PRO165LM Unsecure2. 49 Appendix B Technical 51 Index ia 53 www aerotech com 3 Table of Contents PRO 165LM Hardware Manual List of Figures Figure 2 1 Figure 2 2 Figure 2 3 Figure 2 4 Figure 2 5 Figure 2 6 Figure 2 7 Figure 3 1 Figure 3 2 Figure 3 3 Figure 3 4 Figure 3 5 Figure 3 6 Figure 3 7 Figure 4 1 Figure 4 2 Figure 4 3 Shipping Brackets Used on Single Axis Stages or Upper Axes of XY Systems 18 PRO165LM Series Stage with Lifting Features 19 PRO165LM Dimensions 4 00 20 PRO165LM Accessory Tabletop Dimensions TT3 TT6 Options 21 Dimensions for Stages without a Cable Management System CMSO Option 22 Cantilevered Load Capability of PRO165LM Series Stages 25 Stage Orientations hes eser 25 Ground Connection Points for the 50 Option 28 Motor and Feedback Wiring 2 0000 34 Motor and Feedback Wiring for a Typical Vertical or Rotary Axis Stage 35 Machine Direction 0 2 nn Ieri 38 HalliPhasing 22 2 E ib iva e a a dk a a mA 39 Analog Encoder Phasing Reference
3. 17 2 1 Unpacking and Handling the Stage 17 2 2 Dimensions 0 0 0 0 0 0 0 20 2 3 Securing the Stage to the Mounting Surface 23 2 4 Attaching the Payload to the Stage 24 2 4 1 Speed Capability 222 2 2 242 2 0 0 0 02 26 Chapter 3 Electrical Specifications and Installation 27 3 1 Motor and Feedback Connectors 0 28 3 2 Motor and Feedback Wiring L nn e RR RI emen rrr heels rrr 34 3 3 Motor and Feedback Specifications 4 1 2222 36 3 4 Limits Marker and Machine Direction 0 0 0 0 2 38 3 5 Motor and Feedback Phasing 39 Chapter 4 Maintenance 0 0 0 0 cc aaa eee aLa cc L Daonna aan 41 4 1 Service and Inspection Schedule 2 42 2 41 4 2 Cleaning and Lubrication 2 2 4 2 2 02022 2022 2202020220242 2 42 4 3 Troubleshootilig rezi et a B Ad aa 47 Appendix A Warranty and Field Service
4. 32 Table 3 5 General Feedback Connector Wiring for Z or T 33 Table 3 6 Feedback Specifications L sse 36 Table 3 7 PRO165LM Linear Motor Specifications 142 37 Table 3 8 Encoder Specifications 2 2222222 2 242 2 2 2 37 www aerotech com 5 Table of Contents PRO 165LM Hardware Manual 6 www aerotech com PRO165LM Hardware Manual Safetv Safetv Procedures and Warnings Read this manual its entirety before installing operating or servicing this product If you do not understand the information contained herein contact an Aerotech representative before proceeding Strictly adhere to the statements given in this section and other handling use and operational information given throughout the manual to avoid injury to you and damage to the equipment The following statements apply wherever the Warning or Danger symbol appears within this manual Failure to observe these precautions could result in serious injury to those individuals performing the procedures and or damage to the equipment N OTE Aerotech continually improves its product offerings listed options may be superseded at any time All drawings and illustrations are for reference only and were complete and accurate as of this manual s release Refer to www aerotech com for the most up
5. www aerotech com Chapter 3 27 Electrical Specifications and Installation PRO165LM Hardware Manual 3 1 Motor and Feedback Connectors Stages equipped with standard motors and encoders come from the factorv completelv wired and assembled NOTE Refertothe other documentation accompanving vour Aerotech equipment Call vour Aerotech representative if there are anv questions on svstem configuration N OTE If using standard Aerotech motors and cables motor and encoder connection adjustments not required The PRO165LM s protective ground connection provides motor frame ground protection only Additional grounding and safety safeguards are required for applications requiring access to the stage while it is energized The System Integrator or qualified installer is responsible for determining and meeting all safety and compliance requirements necessary for the integration of this stage into the final application WARNING The protective ground connection must be properly installed to minimize the possibility of electric shock WARNING For stages with the 50 option Ground wire connection points provided at the tabletop and stage base A user supplied ground wire is recommended and may be useful in the final application to reduce noise or provide additional grounding for customer supplied equipment Refer to Figure 3 1 for ground connection points WARNING Operator access to the base and tabletop must be re
6. indoor use 1 2 Accuracy and Temperature Effects Vibration Use the system in a low vibration environment Excessive floor or acoustical vibration can affect system performance Contact Aerotech for information regarding your The accuracy specification of PRO165LM series stages is measured 25 mm above the table with the stage in unloaded condition The stage is assumed to be fully supported by a mounting surface meeting or exceeding the specification in Section 2 3 The accuracy specifications listed in Section 1 3 assume a 20 C operating environment If the temperature of the stage differs from 20 C the encoder scale in the stage will expand or contract at the rate of 3 25 ppm per C The ThermoComp option is a hardware and software solution that uses the functionality of the A3200 controller to mitigate the effects of changing temperature by detecting and compensating for thermal changes ThermoComp is effective at compensating for both self heating and environmental temperature changes www aerotech com Chapter 1 13 Overview PRO 165LM Hardware Manual 1 3 Basic Specifications N OTE Aerotech continually improves its product offerings listed options may be superseded at time All drawings and illustrations are for reference only and were complete and accurate as of this manual s release Refer to www aerotech com for the most up to date information Table 1 3 165 Series Specification
7. line line Inductance line line 1 33 i Thermal Resistance 5 1 4 bar 20 psi didi Thermal Resistance No Cooling Maximum Bus Voltage 340 Magnetic Pole Pitch 25 0 98 1 Performance is dependent upon heat sink configuration system cooling conditions and ambient temperature 2 Values shown 0 100 C rise above a 25 C ambient temperature with motor mounted to the specified aluminum heat sink 3 Peakforce assumes correct rms current consult Aerotech 4 Force constant and motor constant specified at stall 5 All performance and electrical specifications 10 6 Maximum winding temperature is 125 C 7 Ambient operating temperature range 0 C 25 C consult Aerotech for performance in elevated ambient temperatures 8 All Aerotech amplifiers are rated Apk use force constant in N m Apk when sizing ear N Table 3 8 Encoder Specifications Encoder Option Fundamental Signal Period Digital Resolution E1 E1 with x4000 Interpolation 5nm E1 with x16000 Interpolation sum 1 25 nm 21 100 nm aO Tnm 1 Quadrature decoding included in interpolated resolution calculations www aerotech com Chapter 3 37 Electrical Specifications and Installation PRO165LM Hardware Manual 3 4 Limits Marker and Machine Direction Aerotech stages are configured to have positive and negative machine directions The machine direction defines the phasing of the feedback and motor signals and is dic
8. AEROTECH PRO165LM Hardware Manual Revision 1 08 00 Global Technical Support Go to www aerotech com global technical support for information and support about your Aerotech products The website provides downloadable resources such as up to date software product manuals and Help files training schedules and PC to PC remote technical support Vou can also complete Product Return RMA forms and get information about repairs and spare or replacement parts For immediate help contact a service office or vour sales representative Have vour customer order number available before vou call or include it in vour email United States World Headquarters Phone 1 412 967 6440 101 Zeta Drive Fax 1 412 967 6870 Pittsburgh PA 15238 2811 Email service aerotech com www aerotech com United Kingdom Phone 44 0 1256 855055 Phone 81 0 50 5830 6814 Fax 44 0 1256 855649 Fax 81 0 43 306 3773 Email service aerotech co uk Email service aerotechkk co jp Germany Phone 49 0 911 967 9370 Fax 49 0 911 967 93720 Email service aerotechgmbh de France Taiwan Phone 33 2 37 21 87 65 Phone 886 0 2 8751 6690 Email service aerotech co uk Email service aerotech tw This manual contains proprietary information and may not be reproduced disclosed or used in whole or in part without the express written permission of Aerotech Inc Product names mentioned herein are used for identification purposes only and may be trademarks of th
9. Diagram E1 Incremental Encoder 40 Encoder Phasing Reference Diagram E2 Incremental Encoder 40 Endplate Cover Removal 2 0 10 44 Hardcover Screw Removal Step 3 0 0 00 45 Hardcover Removal Step 3 0 1 9 0 0 00 0 46 www aerotech com PRO 165LM Hardware Manual Table of Contents List of Tables Table 1 1 Model Numbers and Ordering Options 24 4 2 2 11 Table 1 2 Environmental Specifications 02027 13 Table 1 3 PRO165LM Series Specifications 0100 0300 14 Table 1 4 PRO165LM Series Specifications 040010 1000 15 Table 2 1 Stage Mounting Surface Flatness Requirement 23 Table 2 2 Stage to Mounting Surface Hardware 2 0 0 23 Table 3 1 Linear Motor Connector Wiring 2 29 Table 3 2 Linear Motor Limit and Encoder Connector Wiring E1 and E2 Incremental Encoder Options J A 30 Table 3 3 Linear Motor Limit and Encoder Connector Wiring E3 Absolute Encoder Option 31 Table 3 4 General Motor Connector Wiring for Z or T Axes
10. ECK00656 Amphenol 17 1726 2 Cinch 08 255 6 REZE 8 9 10 o 12 EMI 15 16 18 2 21 22 29 7 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 www aerotech com Chapter 3 33 Electrical Specifications and Installation PRO165LM Hardware Manual 3 2 Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections THIRD PARTV CONTROLLER STAGE MOTOR CONNECTIONS p Boo es GE a CASE CASE A E1 and E2 Incremental Encoder Option A E3 Absolute Encoder Option Figure 3 2 Motor and Feedback Wiring 34 Chapter 3 www aerotech com PRO165LM Hardware Manual Electrical Specifications and Installation Tvpical Aerotech THIRD PARTV CONTROLLER Vertical or Rotarv Axis Stage MOTOR CONNECTIONS SAFE MOVE Figure 3 3 Motor and Feedback Wiring for a Typical Vertical or Rotary Axis Stage www aerotech com Chapter 3 35 Electrical Specifications and Installation PRO165LM Hardware Manual 3 3 Motor and Feedback Specifications Table 3 6 Feedback Specifications Hall Effect Sensors Specifications Thermistor Specifications Logic O no fault Polarity m Logic 1 over temperature fault Cold Resistance 1000 Note 1K pull up to 5V recommended Encoder Specifications Supply Voltage 5 V 10 Supply Current 250 mA Sinusoidal Type Incr
11. Option Pin Description Connector 1 Signal shield connection 2 Over Temperature Thermistor sensor 3 5 V supply input for feedback devices 4 5 HalEfecsemorphaseB 7 eeo lt Mating Connector Aerotech P N Third Partv P N Backshell ECKOO656 Amphenol 17 1726 2 Cinch 08 255 10 11 12 13 14 15 16 17 18 19 20 21 www aerotech com Chapter 3 31 Electrical Specifications and Installation PRO165LM Hardware Manual Table 3 4 General Motor Connector Wiring for 7 Axes Wire Gauge AWG mm OMEN Pin Description Connector im mem meme s meme Frame ground motor protective ground 16 1 31 Mating Connector Aerotech P N Third Party P N Backshell 00656 Amphenol 17E 1726 2 Sockets QTY 4 ECK00659 ITT Cannon 4DM53744 6 ECK00657 ITT Cannon 5DBMM9W4SA197 32 Chapter 3 www aerotech com PRO165LM Hardware Manual Electrical Specifications and Installation Table 3 5 General Feedback Connector Wiring for Z axes Wire Gauge AWG mm 2610 129 2610 129 2610 128 2610 129 2610 129 2810 129 2610 129 2610 128 2610 128 2610 129 N Pin Description Connector 2610 128 2610 128 2610 128 2610 129 2610 128 2610 129 2610 128 2610 129 Reserved Brake 26 0 129 1 BRAKE pins On Z or T axis otherwise Reserved Mating Connector Aerotech P N Third Party P N Backshell
12. operational check on all safeguards and protective devices www aerotech com Chapter 4 41 Maintenance PRO 165LM Hardware Manual 4 2 Cleaning and Lubrication When cleaning and or lubricating components of the PRO165LM series stages Be sure to use a clean dry soft lint free cloth for cleaning 2 Before using a cleaning solvent on any part of the PRO165LM blow away small particles and dust with clean dry compressed air 3 Take the opportunity during the lubrication procedure to inspect the motion guides or bearings for any damage or signs of wear 4 Inapplications that have multiple stages bolted together to form multi axis systems the orthogonality may be lost if the stage tables of the support stages are loosened Precision aligned stages should not be loosened or disassembled 5 Further disassembly of the stage is not recommended because proper assembly and calibration can only be done at the factory In addition an autocollimator is required for post assembly verification to maintain warranties Contact Aerotech for more information A Cleaning If a solvent is necessary for cleaning the stage Aerotech recommends using isopropyl alcohol Harsher solvents such as acetone may damage the plastic and end caps on the bearing trucks WARNING Make sure that all solvent has completely evaporated before attempting to move the stage Lubrication Aerotech recommends that you use only Kluberplex BEM 34 132 as the st
13. request available on our website www aerotech com Products must be returned prepaid to an Aerotech service center no C O D or Collect Freight accepted The status of any product returned later than thirty 30 days after the issuance of a return authorization number will be subject to review Visit https www aerotech com global technical support aspx for the location of your nearest Aerotech Service center Returned Product Warranty Determination After Aerotech s examination warranty or out of warranty status will be determined If upon Aerotech s examination a warranted defect exists then the product s will be repaired at no charge and shipped prepaid back to the buyer If the buyer desires an expedited method of return the product s will be shipped collect Warranty repairs do not extend the original warranty period Fixed Fee Repairs Products having fixed fee pricing will require a valid purchase order or credit card particulars before any service work can begin All Other Repairs After Aerotech s evaluation the buyer shall be notified of the repair cost At such time the buyer must issue a valid purchase order to cover the cost of the repair and freight or authorize the product s to be shipped back as is at the buyer s expense Failure to obtain a purchase order number or approval within thirty 30 days of notification will result in the product s being returned as is at the buyer s expense Repair work is warrant
14. the Stage V vacuum vacuum guidelines Vibration Warrantv and Field Service 47 36 16 16 13 49 Index PRO 165LM Hardware Manual www aerotech com
15. when first installing them in the vacuum chamber Chapter 1 www aerotech com PRO165LM Hardware Manual Mechanical Specifications and Installation Chapter 2 Mechanical Specifications and Installation WARNING PRO165LM installation must be in accordance to instructions provided by this manual and anv accompanving documentation Failure to follow these instructions could result in injurv or damage to the equipment 2 1 Unpacking and Handling the Stage WARNING Itis the customer s responsibility to safely and carefully lift and move the PRO165LM e Secure all moving parts before lifting or moving the PRO165LM to a new location Unsecured moving parts could shift and cause bodily injury e Improper handling could adversely affect the PRO165LM s performance Use care when lifting or moving the PRO165LM Carefully remove the PRO165LM from its protective shipping container Gently set the PRO165LM on a smooth flat and clean surface Before operating the PRO165LM it is important to let it stabilize at room temperature for at least 12 hours Allowing it to stabilize to room temperature will ensure that all of the alignments preloads and tolerances are the same as they were when tested at Aerotech Use compressed nitrogen or clean dry oil less air to remove any dust or debris that has collected during shipping Each PRO165LM has a label listing the system part number and serial number These numbers contain information necessary for
16. A5 XY assembly 5 arc sec orthogonality Alignment to within um orthogonality for short travel stages ALIGN PASZ XZ or YZ assembly with L bracket 5 arc sec orthogonality Alignment to within 5 um orthogonalitv for short travel stages CMS3 External CMS for lower axis of two axis XZ or XT assembly 12 Chapter 1 www aerotech com PRO165LM Hardware Manual Overview 1 1 Environmental Specifications specifications Exceeding environmental or operating specifications can cause damage to the f WARNING Donot expose this product to environments or conditions outside of the listed equipment Table 1 2 Environmental Specifications Ambient Operating 10 to 35 50 to 95 F Temperature The optimal operating temperature is 20 C x2 C 68 F 4 F If at any time the operating temperature deviates from 20 C degradation in performance could occur Storage 0 to 40 C 32 to 104 F in original shipping packaging Humidity Operating 20 to 60 RH Storage 10 to 70 RH non condensing in original packaging The stage should be packaged with desiccant if it is to be stored for an extended time Altitude Operating 0 m to 2 000 m 0 ft to 6 562 ft above sea level Contact Aerotech if your specific application involves use above 2 000 m or below sea level specific application Protection The PRO165LM stages have limited protection against dust but not water This Rating equates to an ingress protection rating of IP50
17. Electrical installation requirements will varv depending on product options Installation instructions in this section are for PRO165LMs equipped with standard Aerotech motors intended for use with an Aerotech motion control svstem Contact Aerotech for further information regarding products that are otherwise configured Aerotech motion control svstems are adjusted at the factorv for optimum performance When the PRO165LM is part of a complete Aerotech motion control system setup usually involves connecting the PRO165LM to the appropriate drive chassis with the cables provided Labels on the system components usually indicate the appropriate connections If system level integration was purchased an electrical drawing showing system interconnects has been supplied with the system separate from this documentation The electrical wiring from the motor and encoder are integrated at the factory Refer to the following sections for standard motor wiring and connector pin assignments WARNING Applications requiring access to the stage while it is energized will require additional grounding and safeguards The System Integrator or qualified installer is responsible for determining and meeting all safety and compliance requirements necessary for the integration of this stage into the final application WARNING Operator access to the base and tabletop must be restricted while connected to a power source Failure to do so may cause electric shock
18. RO165LM Hardware Manual 10 www aerotech com PRO 165LM Hardware Manual Overview Chapter 1 Overview The specifications in this manual pertain to the second generation of PRO LM stages Second generation stages can be distinguished from their first generation counterparts by the second generation s curved hardcover Contact Aerotech if you need a first generation manual Table 1 1 Model Numbers and Ordering Options PRO165LM Linear Motor Stage 0100 0150 0200 0250 0300 0400 0500 0600 0800 1000 MTI MT2 Inverted mounting orientation TH 6 Incremental linear encoder 1 Vpp Incremental linear encoder 0 1 um digital TTL output J www aerotech com Chapter 1 11 Overview PRO 165LM Hardware Manual PRO165LM Linear Motor Stage continued CMSO cus 82 CMS4 CMS CMSS CMS7 LF NOTE Lifting option only available on travels 400 mm and greater Lifting should never by ordered on the upper axis of an XY set only order on lower axis ThermoComp Optional ThermoComp integrated temperature compensation single or lower axis NOTE An A3200 controller must be used with the TCMP option PLO PL P2 ALIGN NPA ALIGN NPAZ ALIGN PA10 XY assembly 10 arc sec orthogonality Alignment to within 7 um orthogonality for short travel stages ALIGN PA10Z XZ or YZ assembly with L bracket 10 arc sec orthogonality Alignment to within 10 um orthogonality for short travel stages ALIGN P
19. SH 10 5 THRU 6 8 fe eo foe 9 l5 IS A STAGE LENGTH TABLETOP ELEC MECH ETT2 BASIC MODEL Limit Limit A B c D TRAVEL TRAVEL 525125 97517621 pRotesim o100 100 102 108 116 330 165 150 152 4 PRO165LM 0150 150 152 158 166 190 150 152 4 PRO165LM 0200 200 202208 216 430 215 150 350 152 4 i PRO165LM 0250 250 252 258 266 480 240 150 350 1524 PRO165LM 0300 300 302 308 316 530 265 150 350 152 4 406 4 PRO165LM 0400 400 402 408 416 630 315 150 350 550 152 4 406 4 l PRO165LM 0500 500 502 508 516 730 365 150 350 550 152 4 406 4 y PRO165LM 0600 600 602 608 616 830 415 150 350 550 750 152 4 406 4 660 4 PRO165LM 0800 800 802 808 816 1030 515 150 350 550 750 152 4 406 4 711 2 L o 150 1524 PRO16SLM 1000 1000 1002 1008 1016 1230 615 150 350 550 750 152 4 406 4 711 2 o 50 50 8 U o 100 101 6 NOTES 24X 6 1 0 14 20 AN M8X0 8 FOR CUSTOMER INSTALLED AIR PURGE FITTING HELICOIL Y 7 0 7 6 2 DIMENSIONS MILLIMETERS Figure 2 3 PRO165LM Dimensions 20 Chapter 2 www aerotech com PRO165LM Hardware Manual Mechanical Specifications and Installation
20. and the offset load extends outwards in a direction normal to the tabletop surface Refer to Figure 2 7 for clarification on Horizontal or Side orientations 24 Chapter 2 www aerotech com PRO165LM Hardware Manual Mechanical Specifications and Installation Horizontal Side Load kg 50 100 150 200 250 300 Offset Distance mm Cantilevered Load Capabilitv of PRO165LM Series Stages va G BEROTEGH PROIGSLM www aerotech com Figure 2 7 Stage Orientations Chapter 2 25 Mechanical Specifications and Installation PRO165LM Hardware Manual 2 4 1 Speed Capabilitv To help ensure safetv and prevent damage to the svstem speed limitations are required for the PRO165LM Achievable speeds are application dependent and determined bv factors such as travel length pavload amplifier sizing and dutv cvcle The Motor Sizer application supplied bv Aerotech at https www aerotech com resources motor sizer aspx can be used to estimate allowable speeds and accelerations based on these parameters Consult with an Aerotech Applications Engineer to specifv the svstem configuration for optimum performance 26 Chapter 2 www aerotech com PRO165LM Hardware Manual Electrical Specifications and Installation Chapter 3 Electrical Specifications and Installation AN WARNING Electrical installation must be performed properiv qualified personnel
21. andard lubricant for second generation PRO165LM stages Second generation stages can be distinguished from first generation stages by the curved hardcover on the second generation stage WARNING First generation stages were manufactured with THK AFE CA grease as the standard lubricant THK AFE CA grease is not chemically compatible with Kluberplex BEM 34 132 and the two should not be used interchangeably First generation stages in the field should continue to use THK AFE CA grease for regular maintenance lubrication For high speed applications i e near maximum speed at a duty cycle of 50 frequent maintenance with standard lubricants is required If the application process uses only a small portion of travel for most of the duty cycle periodically drive the stage through full travel to redistribute the lubrication in the bearings 42 Chapter 4 www aerotech com PRO 165LM Hardware Manual Maintenance NOTE During the lubrication procedure inspect the linear motion guides for any damage or signs of wear The lubrication and cleaning process is outlined in the steps that follow Remove power to the stage Remove the cover attached to the rear endplate Figure 4 1 Remove the screws on the edges of the hardcover Figure 4 2 and slide it out from under the stage Figure 4 3 This can be done without removing the table Remove anv accumulated dust or debris from the inside of the assembiv Remove any dirty or dried lubricant fr
22. been archived If you need a copy of this revision contact Aerotech www aerotech com Appendix B 51 Revision Historv 52 Appendix B PRO 165LM Hardware Manual www aerotech com PRO 165LM Hardware Manual Index 2010 A Accuracv and Temperature Effects acetone caution Altitude Ambient Temperature Attaching the Pavload B BLMC 142 Motor Specifications Braycote 602EF Cleaning cleaning solvent D Dimensions E EN 60204 1 EN ISO 12100 Encoder Specifications G Global Technical Support grease H Hall Effect Sensors Specifications Humiditv inspect inspection schedule isopropvi alcohol www aerotech com 13 42 13 13 24 37 16 42 42 20 36 36 13 41 41 42 Index label Lifting Instructions Limit Switch Specifications lubricants vacuum operation Lubrication lubrication schedule M Maximum Achievable Velocity Motor Specifications mounting surface multiaxis combinations part number Possible Cause Protection Rating protective ground connection R red anodized aluminum serial number service schedule Shimming shipping brackets Shipping Brackets Solution Specifications Speed Limitations stabilize stage distortion Support Index 17 19 36 16 42 41 26 37 23 42 17 47 13 28 17 17 41 23 17 17 47 14 26 17 23 53 Index 54 Svmptom Technical Support Thermistor Specifications U Unpacking and Handling
23. cket head cap screws SHCS to secure the base to the mounting surface NOTE Ifthe stage is not connected to a power source the stage should move freely by hand Do not attempt to manually move the stage if it is connected to a power source Tightening torque values are dependent on the properties of the mounting hardware and of the surface on which the stage is being mounted Values provided in Table 2 2 are typical values and may not be accurate for your mounting surface Refer to Section 2 2 for specific model mounting locations and dimensions Table 2 2 Stage to Mounting Surface Hardware Mounting Hardware Tvpical Screw Torque M6 x 22 mm 1 4 x 7 8 SHCS with flat washers 7 N m 5 ft lb www aerotech com Chapter 2 23 Mechanical Specifications and Installation PRO165LM Hardware Manual 2 4 Attaching the Pavload to the Stage Inspect the mounting surface for dirt or unwanted residue and clean if necessarv Clean the mounting surface with a lint free cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry To prevent damage to the payload or stage test the operation of the stage before the payload is attached Aerotech recommends that customers use a representative payload during start up to prevent accidental damage to the stage and the payload Proceed with the electrical installation and test the motion control system in accordance with the system documentation Document all results for futur
24. d moving parts mav shift and cause bodilv injurv WARNING Do not attempt to manually move the PRO165LM if it is connected to a power source The mounting surface must be flat and have adequate stiffness in order to achieve the maximum performance from the PRO165LM stage When it is mounted to a non flat surface the stage can be distorted as the mounting screws are tightened This distortion will decrease overall accuracv Adjustments to the mounting surface must be done before the stage is secured Inspect the mounting surface for dirt or unwanted residue and clean if necessarv Use precision flatstones on the mounting surface to remove anv burrs or high spots Clean the mounting surface with a lint free cloth acetone or isopropyl alcohol and allow the cleaning solvent to completely dry Gently place the stage on the mounting surface NOTE The PRO165LM is precision machined and verified for flatness prior to product assembly at the factory If machining is required to achieve the desired flatness it should be performed on the mounting surface rather than the PRO165LM Shimming should be avoided if possible If shimming is required it should be minimized to retain maximum rigidity of the system Table 2 1 Stage Mounting Surface Flatness Requirement Stage Travel Flatness Requirement All Travels If necessary manually move the stage table to access the mounting holes along the edges of the stage This stage is designed to use so
25. e reference For information on electrical installation refer to Chapter 3 and the documentation delivered with the stage N OTE If your PRO165LM was purchased with Aerotech controls it might have been tuned witha representative payload based on the information provided at the time of order If the PRO165LM is started up without a payload the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur Refer to the controller help file for tuning assistance The payload must be flat rigid and comparable to the stage in quality to maintain optimum performance N OTE For valid system performance the mounting interface should be flat within 12 um engagement A screw extending through the stage table can affect travel and damage the WARNING Refer to the dimensions in Section 2 2 for maximum allowable thread AN stage Applied loads should be symmetrically distributed whenever possible i e the payload should be centered on the stage table and the entire stage should be centered on the support structure For a cantilevered load first determine if it is a Horizontal or a Side cantilever system Measure the cantilever length then find the corresponding load value from Figure 2 6 The Horizontal curve assumes a horizontal stage orientation with the payload offset extending outwards along the surface of the tabletop The Side curve is for situations where the stage is mounted on its side
26. ed for ninety 90 days from date of shipment Replacement components are warranted for one year from date of shipment www aerotech com Appendix A 49 Warrantv and Field Service PRO165LM Hardware Manual At times the buyer may desire to expedite a repair Regardless of warranty or out of warrantv status the buyer must issue a valid purchase order to cover the added rush service cost Rush service is subject to Aerotech s approval On site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts and cannot be returned to the Aerotech service center for repair and if Aerotech determines the problem could be warranty related then the following policy applies Aerotech will provide an on site Field Service Representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech covering all transportation and subsistence costs For warranty field repairs the customer will not be charged for the cost of labor and material If service is rendered at times other than normal work periods then special rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply On site Non Warranty Repair If any Aerotech product cannot be made functional by telephone assistance or purchas
27. ed replacement parts and cannot be returned to the Aerotech service center for repair then the following field service policy applies Aerotech will provide an on site Field Service Representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech covering all transportation and subsistence costs and the prevailing labor cost including travel time necessary to complete the repair Service Locations http www aerotech com contact sales aspx mapState showMap USA CANADA MEXICO CHINA GERMANY Aerotech Inc Aerotech China Aerotech Germany Global Headquarters Full Service Subsidiary Full Service Subsidiary Phone 1 412 967 6440 Phone 486 21 3319 7715 Phone 49 0 911 967 9370 Fax 1 412 967 6870 Fax 49 0 911 967 93720 JAPAN TAIWAN UNITED KINGDOM Aerotech Japan Aerotech Taiwan Aerotech United Kingdom Full Service Subsidiary Full Service Subsidiary Full Service Subsidiary Phone 81 0 50 5830 6814 Phone 886 0 2 8751 6690 Phone 44 0 1256 855055 Fax 81 0 43 306 3773 Fax 44 0 1256 855649 Have your customer order number ready before calling 50 Appendix A www aerotech com PRO165LM Hardware Manual Revision Historv Appendix B Technical Changes Revision Description Product redesign 1 07 00 Safety information updated Order and part number specifications updated Chapter 1 Added ThermoComp information Global Technical Support li 03 00 Revision changes have
28. eir respective companies Phone 86 21 3319 7715 Email service aerotech com Copyright 2009 2017 Aerotech Inc All rights reserved Aerotech Worldwide United States France Germany United Kingdom China Japan Taiwan PRO 165LM Hardware Manual Table of Contents Table of Contents PRO165LM Hardware 2 1 Table of Contents 2 22 7 3 List of Figures 2 2 2 0 000 20 0 22 4 EE 5 Safety Procedures and Warnings 2 2 2 2 22 2 22 2 72 22222222 2 4 4 22 4 7 Declaration of Incorporation 2 4 54 4 4 0 072 9 Chapter 1 Overview o oo ooo occ ec nce ccc cc ec ec ccc eeeeecececececeseceeeees 11 1 1 Environmental Specifications 13 1 2 Accuracy and Temperature Effects 2 4 13 1 3 Basic Specifications 2 1 14 1 4 Vacuum Operation 2 16 Chapter 2 Mechanical Specifications and Installation
29. emental Encoder 1 into 120 Q Load differential signals SIN SIN COS COS are 5 V y relative to ground Output Signals Digital Output Incremental Encoder RS422 485 compatible Serial Output Absolute Encoder EnDat 2 2 with 36 bit word Limit Switch Specifications Output Polaritv Normally Closed e Sinks current to ground Logic 0 when not in limit e High impedance Logic 1 when in limit e Requires external pull up to 5 V 10 kQ recommended Notes 36 e Ifthe PRO165LM is driven beyond the electrical limit it will encounter a mechanical stop Impacting the mechanical stop could cause damage to the stage even at low speeds Chapter 3 www aerotech com PRO165LM Hardware Manual Electrical Specifications and Installation Table 3 7 PRO165LM Linear Motor Specifications BLMC 142 A BLMC 142 Performance Specifications Continuous Force 1 4 bar 20 psi 2 N Ib 120 3 27 0 Continuous Force No Forced Cooling 2 N Ib 77 7 17 5 Electrical Specifications Winding Designation BEMF Constant ineine max V m s 5 21 28 0 54 Continuous Current 1 4 bar 20 psi 2 Apk Arms 6 50 4 60 Continuous Current No Forced Cooling 2 Apk Arms 4 20 2 97 Peak Current Stall 9 Apk Ams 26 00 18 38 Force Constant N A pk Ib Apy 18 51 4 16 iva 4 siepe N Aqs Ib Arms 26 17 5 88 Motor Constant 42 NAW IbWW 8 24 1 85 Resistance 25
30. he hardcover is model dependent Figure 4 2 Hardcover Screw Removal Step 3 www aerotech com Chapter 4 45 Maintenance PRO 165LM Hardware Manual Figure 4 3 Hardcover Removal Step 3 46 Chapter 4 www aerotech com PRO 165LM Hardware Manual Maintenance 4 3 Troubleshooting Symptom Possible Cause and Solution Stage will not move Shipping restraints still installed Remove the red anodized shipping brackets In Limit condition Check limits refer to Chapter 3 and refer to controller documentation for polarity and compatibility requirements Example voltage requirements Controller trap or fault refer to controller documentation Stage moves Encoder sine and cosine signal connections refer to Chapter 3 and Controller uncontrollably documentation Motor Connections refer to Chapter 3 and Controller documentation Stage oscillates or Gains misadjusted refer to the controller documentation squeals Encoder signals refer to the controller documentation www aerotech com Chapter 4 47 Maintenance 48 Chapter 4 PRO 165LM Hardware Manual www aerotech com PRO165LM Hardware Manual Warrantv and Field Service Appendix A Warrantv and Field Service Aerotech Inc warrants its products to be free from harmful defects caused by faulty materials or poor workmanship for a minimum period of one year from date of shipment from Aerotech Aerotech s liability is limited to replacing repa
31. ion 10 nm E3 Encoder Horizontal Straightness Pitch 70 prad 80 urad 90 urad 100 urad 120 urad 14 4 arc sec 16 5 arc 18 6 arc 20 6 arc sec 24 7 arc sec 70 urad 80 urad 90 urad 100 prad 120 urad 14 4 arc sec 16 5 arc sec 18 6 arc 20 6 arc sec 24 7 arc sec 70 prad 80 urad 90 urad 100 prad 120 urad 14 4 arc sec 16 5 arc sec 18 6 arc 20 6 arc sec 24 7 arc sec Maximum Sped TIN Load Capacity 3 45kg 26kg 13 3 kg 14 9 kg 16 6 kg 20 0 kg 23 3 kg Material Anodized Aluminum Mean Time Between Failure 20 000 Hours 1 Certified with the PL1 option 2 Requires the selection of an appropriate amplifier with sufficient voltage and current 3 Axis orientation for on axis loading is listed 4 Specifications for single axis systems measured 25 mm above the tabletop performance of multi axis system is payload and workpoint dependent consult the Aerotech factory for multi axis or non standard applications www aerotech com Chapter 1 15 Overview PRO 165LM Hardware Manual 1 4 Vacuum Operation Aerotech can speciallv prepare the PRO165LM for operation in vacuum environments Aerotech offers two vacuum preparation options one for low vacuum for use in atmospheric pressures to 10 torr and one for high vacuum preparation for environments from 1073 1076 torr As part of this preparation attention to detail during modification cleaning and assembiv results i
32. iring or issuing credit at its option for any products that are returned by the original purchaser during the warranty period Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer whether or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or subsequently provided or whether or not Aerotech s products are specifically designed and or manufactured for buyer s use or purpose Aerotech s liability on any claim for loss or damage arising out of the sale resale or use of any of its products shall in no event exceed the selling price of the unit THE EXPRESS WARRANTY SET FORTH HEREIN IS IN LIEU OF AND EXCLUDES ALL OTHER WARRANTIES EXPRESSED OR IMPLIED BY OPERATION OF LAW OR OTHERWISE IN NO EVENT SHALL AEROTECH BE LIABLE FOR CONSEQUENTIAL OR SPECIAL DAMAGES Return Products Procedure Claims for shipment damage evident or concealed must be filed with the carrier bv the buver Aerotech must be notified within thirtv 30 davs of shipment of incorrect material No product mav be returned whether in warranty or out of warranty without first obtaining approval from Aerotech No credit will be given nor repairs made for products returned without such approval A Return Materials Authorization RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate
33. maintaining or updating system hardware and software Locate this label and record the information for later reference Shipping Brackets All PRO165LM series stages are packaged with shipping brackets installed to prevent unwanted stage motion and potential damage from occurring during shipment The brackets are red anodized aluminum the only red anodized pieces Aerotech uses that attach to the stage base on either side of the stage carriage The rubber pads on the shipping brackets compress slightly to gently hold the carriage in place Two shipping brackets are used on single axis and upper axis stages in a multi axis stack while four shipping brackets are used on lower axis stages in multi axis stacks They must be removed from the stage for the stage to operate Retain the brackets for future use www aerotech com Chapter 2 17 Mechanical Specifications and Installation PRO165LM Hardware Manual NOTE 2 Red anodized brackets on a single axis shown and on the upper axis of a multi axis stack 4 Red anodized brackets on the lower axis of a multi axis stack Figure 2 1 Shipping Brackets Used on Single Axis Stages or Upper Axes of XV Systems N OTE After removing the lifting features or shipping brackets retain them for future use Do not transport or ship the PRO165LM without the lifting features or shipping brackets attached 18 Chapter 2 www aerotech com PRO165LM Hardware Manual Mechanical Specifica
34. n products with optimal performance in vacuum applications Special Guidelines To ensure that the PRO165LM will continue to perform well in the vacuum environment follow the guidelines listed below in addition to standard handling installation and lubrication guidelines outlined in this manual 1 2 16 Do not remove the PRO165LM from the sealed bag until it is ready for use Always handle the PRO165LM in a clean environment and use powder free polyethylene gloves to prevent any contaminants from adhering to the surface of the PRO165LM During installation use cleaned vented stainless steel fasteners when securing the PRO165LM Reduced air pressure eliminates significant convective heat transfer This coupled with the viscous vacuum compatible lubricants could result in excessive motor operating temperatures Because of this consider all continuous torque ratings to be 40 to 6096 lower than the value specified for operation in normal atmospheric environment Reduce motor usage accordingly For vacuum applications the recommended lubricant is a small quantity of Braycote 602EF grease or a compatible substitute of equal quality Baking vacuum components between 100 and 125 C for 24 to 48 hours significantly reduces outgassing at initial pump down to vacuum pressure and evaporates water vapor that impregnates porous surfaces on the aluminum surfaces and Teflon cables Aerotech recommends that customers bake out vacuum systems
35. om the linear bearing rails Use a clean lint free cloth with a side to side motion A swab soaked in Isopropyl Alcohol can be used carefully to remove stubborn debris 6 Apply athin continuous film of lubricant to the linear bearing guides A good quality natural bristle artist s brush makes an excellent applicator 7 Manually move the stage to the opposite end of travel This will work the grease into the linear bearing guides Repeat steps 3 through 5 for any areas covered by the original table position Refasten the hardcover NOTE For GEN II PRO series stages with travel lengths greater than or equal to 800 mm The hardcover mounting surfaces in the stage endplates have been machined in such a way as to negate the natural sag due to gravity of the hardcover As the mounting screws are tightened the cover gently conforms to the shape of the endplates Ensure that the cover is fully seated on the endplate mounting surfaces before operating the stage Check each mounting screw for full engagement by tightening the screw while holding the long side of a standard hex wrench 10 Restore power to the stage drive the stage table back to its original position to redistribute lubricants www aerotech com Chapter 4 43 Maintenance PRO 165LM Hardware Manual Figure 4 1 Endplate Cover Removal Step 2 44 Chapter 4 www aerotech com PRO 165LM Hardware Manual Maintenance PRO165LM model shown The number of screws securing t
36. r Phasing Reference Diagram E1 Incremental Encoder Figure 3 6 z S NOILOAYIG 3NIHOVIN SAILISOd 2 aj KO 5 SIN N COS COS N MRK z x 72 5 Positive MOVE Clockwise Encoder Phasing Reference Diagram E2 Incremental Encoder 47 Figure 3 www aerotech com Chapter 3 40 PRO 165LM Hardware Manual Maintenance Chapter 4 Maintenance NOTE The bearing area must be kept free of foreign matter and moisture otherwise the performance and life expectancy of the stage will be reduced N mem 4 1 Service and Inspection Schedule Inspect the PRO165LM once per month A longer or shorter inspection interval may be required depending on the specific application and conditions such as the duty cycle speed and environment In general stages operating in a clean environment should be cleaned and lubricated annually or every 500 km whichever comes first For stages operating under conditions involving excessive debris the stage should be cleaned every six months For high speed applications those near max speed at a duty cycle of 5096 frequent maintenance with standard lubricants is required Monthly inspections should include but not be limited to Visually inspect the stage and cables Re tighten loose connectors Replace or repair damaged cables Clean the PRO165LM and any components and cables as needed Repair any damage before operating the PRO165LM Inspect and perform an
37. s 0100 to 0300 PRO165LM 0100 0150 0200 0250 0300 ici Calibrated Resolution Minimum 5 nm E1 Encoder Incremental Motion 10 nm E3 Encoder Bidrectionel Repetali 7 Vertical Vertical Straightness 00 1 2 25pm 25pm s3um s3um ddum ddum 5 5 Pitch 29 urad 29 40 urad 46 urad 58 urad 6arcsec 6arcsec 8 2arc sec 9 5arc sec 12arc sec 29 urad 29 urad 40 urad 46 58 prad 6arcsec 6arcsec 8 2arc sec 9 5arc sec 12arc sec 29 urad 29 urad 40 46 58 prad 6arcsec 6arcsec 8 2arc sec 9 5arc sec 12arc sec TIN Load Capacity 3 ao 8g 45kg 25kg 8 2kg 9 1kg 9 9 kg 10 7 kg 11 6kg Anodized Aluminum Mean Time Between Failure 20 000 Hours 1 Certified with the PL1 option 2 Requires the selection of an appropriate amplifier with sufficient voltage and current 3 Axis orientation for on axis loading is listed 4 Specifications are for single axis systems measured 25 mm above the tabletop performance of multi axis system is payload and workpoint dependent consult the Aerotech factory for multi axis or non standard applications 14 Chapter 1 www aerotech com PRO 165LM Hardware Manual Overview Table 1 4 PRO165LM Series Specifications 0400 1000 PRO165LM 0400 0500 0600 0800 1000 1000 mm mew 15 5 um Calibrated Resolution Minimum 5 nm E1 Encoder Incremental Mot
38. stricted while connected to a power source Failure to do so may cause electric shock CAUTION Thestage controller must provide over current and over speed protection Failure to do so may result in permanent damage to the motor and stage components e Tabletop Ground Connection Sa 25 Co Base Ground 8 D Connection Z D ssi Figure 3 1 Ground Connection Points for the 50 Option 28 Chapter 3 www aerotech com PRO165LM Hardware Manual Electrical Specifications and Installation Table 3 1 Linear Motor Connector Wiring Pin Description Connector Frame ground motor protective ground Mating Connector Aerotech P N Third Party P N Backshell 00656 Amphenol 17E 1726 2 Sockets QTY 4 00659 ITT Cannon DM53744 6 ECK00657 ITT Cannon ZDBMM9W4SA197 www aerotech com Chapter 3 29 Electrical Specifications and Installation PRO165LM Hardware Manual Table 3 2 Linear Motor Limit and Encoder Connector Wiring E1 and E2 Incremental Encoder Options Pin Description Connector 7 10 12 Positive CW hardware limit 13 14 15 16 17 18 19 20 21 22 23 Mating Connector Aerotech P N Third Party P N Backshell 00656 Amphenol 17 1726 2 Connector 00300 Cinch DB 25S 30 Chapter 3 www aerotech com PRO165LM Hardware Manual Electrical Specifications and Installation Table 3 3 Linear Motor Limit and Encoder Connector Wiring E3 Absolute Encoder
39. tated bv the stage wiring refer to Section 3 5 for Motor and Feedback phasing information Programming direction of a stage is set bv the controller that is used to move the stage Programming direction is tvpicallv selectable in the controller while machine direction is hardwired in the stage Figure 3 4 shows the machine direction of PRO165LM stages Positive Limit CW Limit Marker Near Center of Travel POSITIVE MACHINE DIRECTION Negative Limit CCW Limit Applies to E1 and E2 Incremental Encoder Options A PRO115LM Shown Figure 3 4 Machine Direction 38 Chapter 3 www aerotech com PRO165LM Hardware Manual Electrical Specifications and Installation 3 5 Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point Motor Phase A Hall A 120 200 300 400 Motor Phase B OB Hall B 100 180 300 400 POSITIVE MACHINE DIRECTION Motor Phase C C Hall C 100 300 Positive MOVE Clockwise Figure 3 5 Hall Phasing www aerotech com Chapter 3 39 PRO 165LM Hardware Manual Electrical Specifications and Installation 3NIHOVIN SAILISOd x 2 MRK N Positive MOVE Clockwise M9 Analog Encode
40. tions and Installation Lifting Instructions This section applies onlv to stages equipped with lifting features The lifting features should come attached to the svstem and contain QTV 4 eve bolts and QTV 4 standoffs see Figure 2 2 The evebolts are threaded into the standoffs and the standoffs are threaded into the stage base These must be removed for the stage to operate Retain the lifting hardware for future use If the stage must be lifted in the future reattach the shipping brackets and the lifting hardware If the stage is part of a multi axis svstem attach the lifting features to the lower axis jet 5 27 1 p Standoff TATV 4 Figure 2 2 PRO165LM Series Stage with Lifting Features N OTE After removing the lifting features or shipping brackets retain them for future use Do not transport or ship the PRO165LM without the lifting features or shipping brackets attached www aerotech com Chapter 2 19 Mechanical Specifications and Installation PRO165LM Hardware Manual 2 2 Dimensions STAGE MOTOR 8 FEEDBACK CABLES 1M LENGTH FROM CABLE TRAY SAFETY GROUND 1M LENGTH FROM CABLE TRAY STAGE TABLETOP TT1 ETT2 1524 150 ENGLISH METRIC MOUNTING MOUNTING E 1 9 oO f foo voume SPACING C METRIC D ENGLISH 91 5 CMS2 CMS3 55 145 5 CMS6 CMS7 ADDITIONAL CABLE TRAY FOR MULTI AXIS CABLE MANAGEMENT METRIC 12 7 ENGLI
41. to date information N WARNING Tominimize the possibility of electrical shock bodily injury or death the following precautions must be followed 1 Moving parts can cause crushing or shearing injuries Access to all stage and motor parts must be restricted while connected to a power source 2 Cables can pose a tripping hazard Securely mount and position all system cables to avoid potential hazards 3 Donotexpose this product to environments or conditions outside of the listed specifications Exceeding environmental or operating specifications can cause damage to the equipment 4 The PRO165LM stage must be mounted securely Improper mounting can result in injury AN and damage to the equipment 5 Usecarewhen moving the PRO165LM stage Lifting or transporting the PRO165LM stage improperly can result in injury or damage to the PRO165LM 6 This product is intended for light industrial manufacturing or laboratory use Use of this product for unintended applications can result in injury and damage to the equipment T Ifthe product is used in a manner not specified by the manufacturer the protection provided by the product can be impaired and result in damage shock injury or death 8 The stage forcer temperature may exceed 75 C 9 Operators must be trained before operating this equipment 10 All service and maintenance must be performed by qualified personnel www aerotech com T Safetv PRO165LM Hardware Manual 8
42. www aerotech com PRO165LM Hardware Manual Declaration of Conformitv EC Declaration of Incorporation Manufacturer Aerotech Inc 101 Zeta Drive Pittsburgh PA 15238 2811 USA herewith declares that the product PRO165LM Linear Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006 42 EC as amended and that the following harmonized European standards have been applied EN ISO 12100 2010 Safety of machinery Basic concepts general principles for design EN 60204 1 2010 Safety of machinery Electrical equipment of machines Part 1 General requirements and further more declares that it is not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national implementing legislation i e as a whole including the equipment referred to in this Declaration This is to certify that the aforementioned product is in accordance with the applicable requirements of the following Directive s 2011 65 EU RoHS 2 Directive Authorized Representative Simon Smith European Director Address Aerotech Ltd The Old Brick Kiln Ramsdell Tadley Hampshire RG26 5PR UK Cle Alex Weibel Name Position Engineer Verifving Compliance Location Pittsburgh PA www aerotech com 9 Declaration of Conformitv P
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