Home

TPS-compact User Manual

1. Output Frequency setting 1350 111111111111 I 1200 1050 900 A gt 750 3 5 2 600 g 450 300 150 0 0 1 2 3 4 5 6 7 8 9 10 Voltage V Figure 27 Output Power setting 100 TTT TTT TTT ren 90 80 70 s 60 50 5 amp 40 30 20 10 o o 1 2 4 5 6 7 8 9 10 Voltage V Figure 28 TPS compact User Manual 87 901 010 01 C 229 262 17 Technical Information Interconnections 230 262 Output Temperature setting Temperature C Voltage V Figure 29 Output Pressure setting 1 0E 01 1 0E 02 1 0E 03 1 0E 04 1 0E 05 Pressure Torr 1 0E 06 1 0E 07 1 0E 08 1 0E 09 0 1 2 3 4 5 6 r 8 9 10 Voltage V Figure 30 FAULT this open collector output signal is ON when a system fault condition is detected PROGRAMMABLE SET POINT this open collector output signal i
2. Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destination Controller 02 80 31 30 30 31 30 03 42 33 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC STX ADDR ACK ETX CRC TPS compact User Manual 87 901 010 01 C 243 262 17 Technical Information Window Protocol Command READ PUMP STATUS Source PC Destination Controller with address 3 02 83 32 30 35 30 03 38 37 STX ADDR WINDOW RD ETX CRC Source Controller with address 3 in stop status Destination PC 02 83 32 30 35 30 30 30 30 30 30 03 38 37 STX ADDR WINDOW DATA STATUS ETX CRC Command REAL SERIAL TYPE Source PC Destination Controller with address 3 in 485 mode 02 83 35 30 34 30 03 38 31 STX ADDR WINDOW RD ETX CRC Source Controller Destination PC 02 83 35 30 34 30 31 03 42 30 STX ADDR WINDOW RD DATA ETX CRC 244 262 TPS compact User Manual 87 901 010 01 C Window Meanings Technical Information 17 Tab 9 N Read Data Description Admitted Values Write Type 000 R W L Sta
3. Connector examples 5 5 CNT REJE gt TPS COMPACT 3 3 Figure 37 RS 232 Connection 1200 VW A FAR PC HOST B m mm A TPS compact p 8 1 Gnd mm A TPS compact p 8 2 Gnd 1200 W Figure 38 RS 485 Connection TPS compact User Manual 87 901 010 01 C 237 262 17 Technical Information RS 232 RS 485 Communication Description The communication port mating connector is sup plied with the RS232 PCB AMP Cannon or equivalent 15 pin D type male connector For example the Transmit data signal from con troller pin 2 must be connected to the host computer s receive data line pin 2 and vice versa Consult the host computer s instruction manual for its serial port connections Agilent cannot guarantee compliance with FCC regulations for radiated emissions unless all external wiring is shielded with the shield being termi nated to the metal shround on the 0 subconnector The cable should be secured to the connector with screws Serial Communication Descriptions This unit can communicate by two different proto col protocol old system letter Window protocol new system These two protocols can be used as well with 232 or 485 media Please use Window protocol for new development 238 262 TPS compact User Manual 87 901 010 01 C
4. valtuutetun henkil n teht v ksi VAROITUS Ennen mink n tyyppist toimenpidett j rjestelm ss kytkek se irti s hk verkosta p st k pumppuun ilmaa avaamalla siihen tarkoitettu venttiili ja odottakaa roottorin t ydellist pys htymist Antakaa t m n j lkeen pumpun pintalimm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilentin korjauspalvelua Ennen j rjestelm n l hett mist valmistajalle korjausta tai vaihtopalvelua varten on ehdottomasti t ytett v ja toimitettava paikalliseen myyntitoimistoon Turvallisuus ja Terveys kaavake joka on liitteen ohjekirjassa Kyseisen kaavakkeen kopio tulee liitt j rjestelm n pakkaukseen ennen sen l hett mist Mik li pumppu t ytyy romuttaa toimikaa sen h vitt misess kansallisen lains d nn n m r m ll tavalla TPS compact User Manual 87 901 010 01 C 131 262 10 Ohjek sikirja H vitt minen H vitt minen Pakkausmerkinn iss olevan WEEE logon merkitys Alla n kyv merkki on lis tty pakkaukseen EY n ns WEEE direktiivin mukaisesti Merkki koskee ainoastaan Euroopan Unionin j senmaita tarkoittaa ett tuotetta EI saa h vitt tavallisen kotitalous tai teollisuusj tteen mukana vaan se on toimitettava erilliseen ker yspisteeseen Loppuk ytt j kehotetaan sen vuoksi ottamaan ker ys ja h vitt misprosessia varten yhteytt laitteen toimittajaan olipa se
5. 86 262 TPS compact User Manual 87 901 010 01 C Istruktionsbog 7 Generel Information Dette udstyr er beregnet til professionel anvendelse Brugeren b r l se denne brugsanvisning og anden yderligere information fra Agilent f r udstyret anvendes Agilent tager ikke ansvar for skader helt eller delvis som f lge af tilsides ttelse af disse instruktioner fejlagtig brug af personer uden tilstr kkeligt kendskab ukorrekt anvendelse af udstyret eller h ndtering der strider imod g ldende lokale regler TPS compact systemet omfatter en turbomolekyl r pumpe til h je eller meget h je vakuumtilpasninger og aktuel styreenhed og hovedpumpe Systemet er i stand til at pumpe en hvilken som helst form for gas eller gaslignende luftarter men systemet kan ikke anvendes til pumpning af v ske eller af faste partikler Pumpningen sker ved hj lp af en hurtigroterende turbine Turbinen drives af en elektrisk trefasemotor med h j effekt TPS compact er ikke fremstillet af skadelige stoffer og er derfor egnet til anvendelse der kr ver rent vakuum TPS compact har endvidere hj lpestik der g r det muligt at styre ventilationsventilen og fjernstyre den ved hj lp af en v rtscomputer gennem seriel forbindelse De f lgende afsnit indeholder oplysningerne der er n dvendige for at garantere sikkerhed for operat ren i forbindelse med anvendelse af udstyret Bilaget Technical Information indeholder detaljerede oplysninger TPS
6. Technical Information 17 Window Protocol Description Communication Format 8 data bit no parity 1 stop bit baud rate 600 1200 2400 4800 9600 programmable Communication Protocol The communication protocol is a MASTER SLAVE type where Host MASTER Controller SLAVE The communication is performed in the following way 1 the host MASTER send a MESSAGE CRC to the controller SLAVE 2 the controller answer with an ANSWER CRC to the host The MESSAGE is a string with the following format lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt Where When a data is indicated between two quotes it means that the indicated data is the corresponding ASCII character TPS compact User Manual 87 901 010 01 C 239 262 17 Technical Information Window Protocol lt STX gt Start of transmission 0x02 lt ADDR gt Unit address 0x80 for RS 232 lt ADDR gt Unit address 0x80 device number 0 to 31 for RS 485 lt WIN gt Window a string of 3 numeric character indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph lt COM gt Command 0x80 to read the window 0x31 to write into the window lt DATA gt an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not present The field length is variable ac
7. 0 6151 703 353 Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 05 2012 Publication Number 87
8. W nast pnych paragrafach zosta y przedstawione wszystkie potrzebne informacje w celu zagwarantowania bezpiecze stwa operatora podczas u ytkowania aparatury Szczeg owe informacje zosta y przedstawione w dodatku dotycz cym informacji technicznych Technical Information TPS compact User Manual 87 901 010 01 C 147 262 12 Podrecznik Instrukcji Og lne informacje W tej instrukcji zastosowano nastepujace umowne znaczenia ZAGROZENIE Komunikaty zagrozenie przyciagaja uwage operatora co do danej procedury lub danego post powania kt rego nieprawid owe wykonanie mog oby spowodowa powa ne uszkodzenia cia a Komunikaty zwi kszonej uwagi s wy wietlane przed procedurami i w przypadku ich braku przestrzegania mo e doj do uszkodzenia aparatury S to wa ne przypis wyci gni te z tekstu 148 262 TPS compact User Manual 87 901 010 01 C Podrecznik Instrukcji 12 Magazynowanie By zagwarantowa maksymalny poziom funkcjonalnosci i dziatania systemow pompujacych Agilent powinny by przestrzegane nastepujace zasady podczas transportu przesuni cia i magazynowania pomp nie mog by przekroczone nast puj ce warunki rodowiskowe temperatura od 20 C do 70 C wzgl dna wilgo od 0 do 95 bez opar klient po otrzymaniu i przygotowaniu po raz pierwszy pomp turbomolekularnych musi je zawsze uruchomi w spos b Soft Start czas magazynowania danej pompy turbomolekularn
9. dstopp St ng av TPS compact vid en n dsituation genom att dra ut elkabeln fr n eluttaget eller genom att placera den externa brytaren i l ge OFF Underh ll TPS compact r underh llsfritt f rutom bytet av Tip seal Allt servicearbete m ste utf ras av auktoriserad personal VARNING Innan n got arbete utf rs pa systemet m ste pumpens str mf rs rjning avbrytas och pumpen luftas genom att den aktuella ventilen ppnas V nta sedan tills rotorn stannat samt tills pumpens yttemperatur r l gre n 50 C Om pumpen havererar kontakta Agilent reparationsverkstad Innan systemet l mnas in till tillverkaren f r reparation m ste h lso och s kerhetsbladet som medf ljer bruksanvisningen fyllas i och skickas in till den lokala terf rs ljaren Bifoga dessutom en kopia av bladet med systemet Skrotning av systemet ska ske enligt g llande lagstiftning TPS compact User Manual 87 901 010 01 C 107 262 8 Bruksanvisning Bortskaffning Bortskaffning Betydelse av logotypen WEEE pa etiketterna Symbolen som visas nedan har tillimpats i enlighet med CD direktivet som har betecknats som WEEE Den h r symbolen g ller endast i de l nder som tillh r den Europeiska Unionen indikerar att produkten p vilken symbolen har applicerats INTE f r skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste uppr ttas Vi rek
10. encendido fijo la bomba est en rotaci n normal parpadea lentamente periodo de 400 ms aproximadamente el sistema est en estado de rampa o de frenado o de stop o de waiting for iterlock parpadea r pidamente per odo de 200 ms aproximadamente situaci n de error Una descripci n detallada del panel de control del TPS compact aparece en el ap ndice Technical Information TPS compact User Manual 87 901 010 01 C Manual de istrucciones 4 Parada del TPS compact Para detener el TPS compact basta disponer el interruptor externo en posici n OFF El controlador incorporado detiene inmediatamente el sistema de bombeo Parada de Emergenica Para interrumpir inmediatamente en caso de emergencia el funcionamiento del TPS compact se debera desenchufar el cable de alimentaci n de la toma de red o disponer el interruptor externo en posici n OFF Mantenimiento iADVERTENCIA El TPS compact no necesita ningun mantenimiento a excepci n de la sustituci n del Tip seal Toda intervenci n deber ser realizada por personal autorizado Antes de realizar cualguier operaci n en el sistema desconectarlo de la alimentaci n disponer la bomba en presi n atmosf rica abriendo la v lvula respectiva y esperar hasta gue el rotor se pare completamente y gue la temperatura superficial de la bomba se reduzca a menos de 50 C En caso de aver a se podr utilizar el servicio de reparaci n Agilent
11. erp n zaji uje velmi rychl turb na poh n n vysoce v konn m trojf zov m elektromotorem TPS compact neobsahuje dn kontaminuj c l tky a proto se hod pro aplikace vy aduj c ist vakuum TPS compact je vybaven pomocn mi konektory pro ovl d n odvzdu ovac ho ventilu kter se m ovl dat d lkov pomoc hostitelsk ho po ta e p ipojen ho s riovou linkou N sleduj c odstavce obsahuj informace pot ebn k zaji t n bezpe nosti obsluhy p i pou v n tohoto za zen Podrobn informace jsou uvedeny v p loze Technical Information TPS compact User Manual 87 901 010 01 C 159 262 13 N vod k Pou it V eobecne informace Tento manual pou iva nasledujici standardni protokol NEBEZPE I Nebezpe i hla eni jsou ur ena pro upozorn ni obsluhy na ur ity postup nebo innosti kter by v p pad nedodr en mohly zp sobit v n raz POZOR Pozor hl en jsou uvedena p ed postupy kter by v p pad nedodr en mohly po kodit za zen Pozn mky obsahuj d le it informace p evzat z textu 160 262 TPS compact User Manual 87 901 010 01 C Navod k Pou iti 13 Uskladneni Pro zaru en maxim ln rovn funk nosti a spolehlivosti v v vov ch syst m Agilent je t eba respektovat n sleduj c p edpisy P i p eprav p em s ov n a skladov n v v v byste nem li p ekra ovat n sleduj c
12. poussi re aux gaz agressifs ainsi que dans des milieux explosifs ou fort risque d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes pression max 2 bars au del de la pression atmosph rique temp rature de 5 C 35 C humidit relative O 95 non condensante En pr sence de champs magn tiques le syst me de pompage doit tre prot g e l aide d crans appropri s Le TPS compact peut tre install e dans n importe quelle position Le fixer dans une position stable en reliant la bride d entr e de la turbopompe une contre bride fixe pouvant supporter un couple de serrage de 50 Nm autour de son axe La turbopompe bride d entr e ISO doit tre fix e la chambre vide l aide de colliers doubles ou simples Le tableau suivant d crit pour chaque type de collier le nombre de colliers n cessaires ainsi que le couple de serrage prescrit TPS compact User Manual 87 901 010 01 C 43 262 3 Mode d emploi Installation Tab 1 COUPLE DE BRIDE TYPE DE COLLIER N SERRAGE ISO 63 Collier double filet M10 4 22 Nm ISO 100 K Collier double filet M10 4 22 Nm ISO 160 K Collier double filet M10 4 22 Nm La turbopompe bride d entr e ConFlat doit tre fix e la chambre vide l aide des l ments m caniques Agilent pr vus cet effet Pour tout autre d tail se reporter l appendice Technical Informa
13. sitten laitteen valmistaja tai j lleenmyyj tarkastettuaan ensin kaupan sopimusehdot 132 262 TPS compact User Manual 87 901 010 01 C TPS compact User Manual 11 Felhasznaloi Kezik nyv Biztonsagi tmutat Turb molekul ris szivatty khoz 134 ltal nos inform ci 135 Tarol s 137 El keszites telepitesre 138 Telepites 139 Haszn lat 141 A TPS compact bekapcsol sa s haszn lata 142 A TPS compact kikapcsol sa 142 Veszleallitas 143 Karbantart s 143 Megsemmisit s 144 Az eredeti utasitas forditasa RE Agilent Technologies 133 282 11 Felhaszn l i K zik nyv Biztons gi tmutat Turb molekul ris szivatty khoz Biztons gi tmutat Turbomolekularis szivattyukhoz A turb molekul ris szivatty k ahogy a k vetkez g pk nyvben le van rva nagy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor ll r sz rintkez si hib ja vagy ak r a forg r sz sz tt r se eset n a forg si energia felszabadulhat VESZ LY A berendez s k rosod s nak s a kezel szem lyzet s r l s nek megel z s re az ebben a g pk nyvben adott telep t si utas t sokat szigor an be kell tartani 134 262 TPS compact User Manual 87 901 010 01 C Felhaszn l i K zik nyv 11 Altal nos inform ci A berendez st professzion lis felhaszn l k sz m ra tervezt k A fe
14. te turbov vevu k syst mu erpac syst m nein talujte ani nepou vajte v prostred vystavenom vonkaj m vplyvom d sneh ad prach koroz vne plyny ani vo v bu n ch prostrediach alebo tam kde existuje vysok riziko po iaru Po as innosti zariadenia je potrebn zabezpe i tieto vlastnosti prostredia maxim lny tlak 2 bary nad rov ou atmosf rick ho tlaku a teplota od 5 C do 35 C relat vna vlhkos 0 95 bez kondenz cie V pr tomnosti magnetick ho po a mus by erpac syst m chr nen feromagnetick m t tom Zariadenie TPS compact m e by nain talovan v ubovo nej polohe Upevnite TPS compact do stabilnej polohy pripojen m vstupnej pr ruby turbov vevy k pevnej pr rube upevnenej tak aby vydr ala nam hanie kr tiacim momentom 50 Nm okolo svojej osi Turbov veva so vstupnou pr rubou ISO mus by pripojen k v kuovej komore pomocou svoriek alebo kle t n Nasleduj ca tabu ka ukazuje pre ka d sp sob upevnenia potrebn po et svoriek alebo kle t n a pr slu n upev ovac kr tiaci moment TPS compact User Manual 87 901 010 01 C 175 262 14 N vod na Obsluhu In talacia Tab 1 PRIRUBA ISO 63 UPEVNOVACI KRUTIACI UPEVNOVACI MECHANIZMUS PO ET Svorky M10 MOMENT 4 22 Nm ISO 100 K Svorky M10 4 22 Nm ISO 160 K Svorky M10 4 22 Nm Turbovyveva so vstupnou prirubou ConFlat musi byt pripojena
15. v vy Bezpe nostn n vod pro Turbomolekul rn v v vy Turbomolekul rn v v vy jak jsou popisov ny v n sleduj c m n vodu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefuk nosti nap kontaktu rotoru anebo statoru nebo p i zhroucen rotoru m e doj t k uvoln n rota n energie 4 74 4H 08 Pokyny k instalaci uveden v tomto n vodu musi b t p sn dodr ov ny za elem prevence po kozen za zen a zran n obsluhy 158 262 TPS compact User Manual 87 901 010 01 C Navod k Pou iti 13 V eobecne informace Toto zafizeni je ur eno pro odborniky U ivatel by si m l pred pou itim za zen p e st tento n vod a v echny dal informace dodan firmou Agilent Firma Agilent neodpov d za jak koli nehody kter vzniknou n sledkem i ste n ho nedodr en t chto pokyn nespr vn m pou v n m neznal mi osobami neopr vn n m z sahem do za zen nebo jakoukoli innost kter je v rozporu s pokyny uveden mi v p slu n ch st tn ch norm ch TPS compact je integrovan syst m pro aplikace vy aduj c vysok a velmi vysok vakuum vybaven hlavn turbomolekul rn v v vou a p slu n m regul torem Za zen m e od erp vat libovoln plyn nebo plynnou sm s Nen vhodn na erp n tekutin nebo pevn ch stic
16. 010 01 C 225 262 17 Technical Information Interconnections 92 3 6 KF 40 18 0 70 CFF2 75 24 0 94 Figure 24 FRG 700 gauge dimension J5 In Out Figure 25 This connector carries all the input and output signals to remote control the TPS compact It is a 15 pins D type connector the available signals are detailed in the table the following para graphs describe the signal characteristics and use 226 262 TPS compact User Manual 87 901 010 01 C Technical Information 17 Tab 5 Pin N Signal name Input Output 1 START STOP IN 2 START STOP IN 3 INTERLOCK IN 4 INTERLOCK IN 5 SPEED SETTING IN 6 SPEED SETTING IN 7 SOFT START IN 8 SOFT START IN 9 24 Vdc Imax 30 mA OUT 10 NORMAL OUTPUT relay OUT Vmax 125V Imax 200 mA 11 PROGRAMMABLE SET POINT OUT 12 NORMAL OUTPUT OUT 13 FAULT OUTPUT OUT 14 PROGRAMMABLE ANALOG SIGNAL OUT 15 GROUND OUT PROGRAMMABLE ANALOG SIGNAL Signal Description START STOP input signal to start or stop the pump Without the supplied cover connector the turbomolecular pump automatically starts if you want to stop the turbo pump from outside you have to connect the START STOP signal to the 24 Vdc pin and the START STOP signal to the GROUND pin this is the default
17. 3 Arr t du TPS compact Pour arr ter le TPS compact il suffit de placer l interrupteur ext rieur sur OFF Le contr leur incorpor arr te imm diatement le syst me de pompage Arr t d urgence Entretien Pour arr ter le TPS compact en condition d urgence d brancher le cordon d alimentation de la prise ou placer l interrupteur ext rieur sur OFF Le TPS compact n exige aucun entretien particulier I exception du remplacement du Tip seal Toute intervention doit tre effectu e par un personnel agr AVERTISSEMENT Avant toute intervention sur le syst me le d brancher refouler l air de la pompe en ouvrant la soupape pr vue cet effet attendre jusqu l arr t complet du rotor et jusqu ce que la temp rature superficielle de la pompe soit inf rieure 50 C En cas de panne il est possible de b n ficier du service r parations Agilent Avant de renvoyer une pompe au constructeur pour r paration remplir et faire parvenir au bureau Agilent de votre r gion la fiche S curit et Sante jointe au pr sent manuel d instructions Une copie de cette fiche devra tre mise dans l emballage de la pompe avant l exp dition En cas de mise au rebut de la pompe proc der son limination conform ment aux r glementations nationales concernant la gestion des d chets TPS compact User Manual 87 901 010 01 C 47 262 3 Mode d emploi Mise au rebut Mise au rebut 48 262 Signific
18. 87 901 010 01 C 211 262 17 Technical Information Technical Specification Technical Specification Tab 4 Characteristic TV301 TV81M Pumping speed l s Nz 215 l s Nz 60 l s Base pressure 1x10 9 mbar CFF flanges 7 5x10 10 Torr CFF Flanges 1x10 8 mbar ISO Flanges 7 5 x 10 9 Torr ISO Flanges Inlet flange ISO 100 ISO 160 CFF 6 CFF 8 KF 40 ISO 63 CFF 2 75 CFF 4 5 Rotational speed 56000 RPM 80000 RPM Start up time 15s Operating position Any Operating ambient temperature 5 C to 35 C Bakeout 120 C at inlet flange max CF flange temperature 80 C at inlet flange max ISO flange Noise level 55 dB A at 1 meter Lubricant permanent lubrication Power supply Line type Input voltage Input frequency 115 or 200 240 Vac 50 or 50 60 Hz 115 or 200 240 Vac 50 or 50 60 Hz Max input power 310 VA 260 VA Protection fuse 115 Vac 5 A 115 Vac 4 A 220 Vac 3 A 220 Vac 2 5 A Compliance with UNI EN 292 1 UNI EN 292 2 EN 55011 Class A Group 1 EN 61000 3 2 EN 61000 3 3 EN 61000 4 2 EN 61000 4 3 EN 61000 4 4 EN 61010 1 EN 1012 2 212 262 TPS compact User Manual 87 901 010 01 C Technical Information 17 Characteristic TV301 TV81M Installation category Il Pollution degree 2 Power cable 115 Vac USA plug 5 meters long 220 Vac EU or UK plug 5 meters long Serial communication kit RS232 cable
19. 901 010 01 C Podrecznik Instrukcji 12 Instalacja UWAGA Usun ta m klej c i zdj korek zabezpieczaj cy tylko w momencie po czenia pompy do systemu Nie instalowa i lub u ytkowa zespo u pompuj cego w otoczeniach wystawionych na czynniki atmosferyczne deszcz mr z nieg py y gazy chemiczne w rodowiskach wybuchowych lub z wysokim zagro eniem po aru Podczas dzia ania obowi zkowo nale y przestrzega nast puj ce warunki otoczenia maksymalne ci nienie 2 bary ponad ci nieniem atmosferycznym temperatura od 5 C do 35 C wzgl dna wilgo O 95 bez opar W obecno ci p l elektromagnetycznych zesp pompyj cy musi by odpowiednio zabezpieczony przez odpowiednie ekranowanie TPS compact mo e by zainstalowany w jakiejkolwiek pozycji Zamocowa TPS compact w stabilnej pozycji cz c ko nierz wej ciowy turbopompy do ko nierza sta ego wytrzyma ego na obci enie 50 Nm wok w asnej osi Turbopompa z ko nierzem wej ciowym ISO musi by zamocowana do komory pr niowej poprzez podw jne lub pojedyncze zaciski W niniejszej tabeli przedstawione zosta y dla ka dego typu zacisku ilo potrzebnych zacisk w i moment dokr cenia ich TPS compact User Manual 87 901 010 01 C 151 262 12 Podrecznik Instrukcji Instalacja Tab 1 KOLNIERZ TYP ZACISKU Nr MOMENT DOKRECENIA ISO 63 Podw jny zacisk z gwintem M10 4 22 Nm ISO 100 K Podw
20. 901 010 01 C Technical Information 17 WARNING If dangerous gases were being pumped flush the pump with air or inert gas for at least 10 minutes prior to disassembly To test the Pumping System 1 Run the TPS compact for about 5 seconds Verify that the front fan is running If you hear loud noises from the Scroll pump this indicates that the tip seal or main O ring are possibly out of place 2 Disassemble and repair as necessary 3 The pump is now ready to return to service Newly installed tip seals may require several hours of run time to seat properly and enable the pump to meet speed and base pressure specifications TPS compact User Manual 87 901 010 01 C 253 262 17 Technical Information Service Options Troubleshooting Chart Tab 10 Problem Possible Causes Corrective Actions TMP doesn t Scroll Pump motor thermal Allow motor to cool Identify cause of overload reach NORMAL protector open OPERATION Vacuum system leak Locate and repair leak System will not start Excessive voltage drop Check size and length of cable Fuses burnt out Check fuses and if necessary replace Poor ultimate Vacuum system leak Locate and repair leak pressure Water in TPS compact Flush the system with air or dry nitrogen Solvent in pump Flush the system with air or dry nitrogen Install trap or filter Scroll Pump seals worn out Replace tip seals Poor conductance t
21. 9397 969 9397 EU Power cord 2 m 969 9396 969 9396 969 9396 969 9396 UK Power cord 2 m 969 9398 969 9398 969 9398 969 9398 Vibration damper 969 9340 969 9376 Inlet screen 969 9309 969 9300 969 9300 FRG 700 1 5 m cable 969 9959 969 9959 969 9959 969 9959 FRG 700 3 m cable 969 9960 969 9960 969 9960 969 9960 FRG 700 5 m cable 969 9961 969 9961 969 9961 969 9961 EyeSys Mini IMG cable 1 m 969 9943 969 9943 969 9943 969 9943 EyeSys Mini IMG ext cable 969 9944 969 9944 969 9944 969 9944 Serial cable and T Plus SW 969 9883 969 9883 969 9883 969 9883 Tip seal replacement kit IDP3TS IDP3TS IDP3TS IDP3TS TPS compact User Manual 87 901 010 01 C 255 262 17 Technical Information Orderable Parts Tab 12 Orderable parts part 2 TPS compact TV 301 TV W TV 301 TV 301 ISO 100 CFF 6 ISO 160 CFF 8 120 V 969 8221 969 8222 969 8223 969 8224 220 V 969 8229 969 8230 969 8231 969 8232 Accessories DIY EyesSys Gauge Kit 969 9188 969 9197 969 9189 969 9198 DIY Full Range Gauge Kit 969 9194 969 9201 969 9195 969 9202 Wheels accessory kit 969 8233 969 8233 969 8233 969 8233 US Power cord 5 m 969 8452 969 8452 969 8452 969 8452 EU Power cord 5 m 969 8450 969 8450 969 8450 969 8450 UK Power cord 5 m 969 8451 969 8451 969 8451 969 8451 US Power cord 2 m 969 9397 969 9397 969 9397 969 9397 EU Power cord 2 m 969 9396 969 9396 969 9396 969 9396 UK Power cord 2 m 969 9398 969 9398 969 9398 969
22. El TPS compact no puede da arse permaneciendo simplemente expuesto a la atm sfera De todas formas se aconseja mantener cerrada la bomba hasta el momento de la instalaci n en el sistema para evitar su posible contaminaci n por polvo 54 262 TPS compact User Manual 87 901 010 01 C Manual de istrucciones 4 Instalacion UNIT Despegar el adhesivo y guitar el tap n de protecci n s lo en el momento de conectar la turbobomba al sistema No instalar ni o utilizar el sistema de bombeo en lugares expuestos a agentes atmosf ricos lluvia hielo y nieve polvo y gases agresivos ni en ambientes sujetos a riesgo de explosi n o incendio Durante el funcionamiento es necesario que se respeten las condiciones ambientales siguientes presi n m xima 2 bares por encima de la presi n atmosf rica temperatura de 5 C a 35 C humedad relativa 0 95 no condensadora Cuando existan campos electromagn ticos el sistema de bombeo ha de protegerse mediante pantallas adecuadas El TPS compact puede ser instalado en cualquier posici n Fijar el TPS compact en posici n estable conectando la brida de entrada de la turbobomba a una contrabrida fija capaz de resistir ha un par de 50 Nm en torno a su propio eje La turbobomba con brida de entrada ISO ha de fijarse a la camara de vacio mediante mordazas dobles o mordazas sencillas La tabla siguiente describe por cada tipo de mordaza el numero de mordazas necesari
23. Hvad ang r fremgangsm den til tilkobling af Soft Start henvises der til afsnittet Signal Description i kapitlet Technical Information Den blu STATUS LED der er anbragt pa bagpanelet pa TPS compact s fundament angiver systemets funktion ved blink konstant t ndt pumpen er i normal rotation a langsomme blink periode p ca 400 ms systemet er i stilling for acceleration bremsning stop eller Waiting for interlock a hurtige blink periode p ca 200 ms fejl Vedrerende en detaljeret beskrivelse af kontrolpanelet i TPS compact henvises til bilaget Technical Information Stop af TPS compact Afbrydelse af TPS compact sker ved blot at indstille den udvendige afbryder i position OFF Den indbyggede styreenhed afbryder straks pumpeanl gget 94 262 TPS compact User Manual 87 901 010 01 C Istruktionsbog 7 Nodstop Nadstop af TPS compact sker ved at fjerne stramkablet fra stikkontakten eller indstille den udvendige afbryder i position OFF Vedligeholdelse TPS compact behgver ikke nogen vedligeholdelse med undtagelse af Tip seal pakningen Ethvert indgreb skal foretages af autoriseret personale ANNUAIRES Inden der foretages noget som helst indgreb p systemet skal str mmen forst afbrydes og luften i pumpen skal fjernes ved at abne ventilen Vent med foretagelse af indgrebet til rotoren er standset og til temperaturen pa pumpens overflade er under 50 C I tilfaelde af skader pa
24. TPS compact V v vu TPS compact sta vypnout extern m vyp na em kter p epnete do vypnut polohy Vestav n regul tor erpac syst m okam it zastav 166 262 TPS compact User Manual 87 901 010 01 C Navod k Pou iti 13 Nouzove zastaveni Udr ba Pro okam it zastaveni v v vy TPS compact v nouzov situaci je treba vytahnout napajeci kabel ze sitov zasuvky nebo vypnout sitovy vypina V v va TPS compact nevy aduje adnou udr bu s v jimkou vym ny Tip seal Ve ker prace na tomto za zen mus prov d t opr vn n osoby NEBEZPE Ne za nete prov d t jak koli pr ce na tomto za zen odpojte jej od s t odvzdu n te v v vu otev en m p slu n ho ventilu po kejte a se rotor p estane ot et a po kejte dokud povrchov teplota v v vy neklesne pod 50 C V p pad poruchy kontaktujte va e m stn servisn st edisko spole nosti Agilent Ne vr t te za zen v robci na opravu nebo v m nu za repasovan za zen mus te vyplnit list Health and Safety Zdrav a bezpe nost p ilo en k tomuto n vodu a zaslat jej m stn prodejn kancel i P ed odesl n m za zen mus te k za zen p ibalit kopii tohoto listu Pokud se m za zen vy adit mus se zlikvidovat v souladu s konkr tn mi st tn mi normami TPS compact User Manual 87 901 010 01 C 167 262 13 N vod k Pou it Likvi
25. TPS compact kytkem ll s hk p lle ja asettamalla ulkokatkaisin ON asentoon Sis nrakennettu valvoja tunnistaa automaattisesti s hk virran ja k ynnist pumpun Ensimm isess k ynnistyksess on hyv k ytt Soft Start tapaa K ynnist se s timest Kytke seuraavissa k ynnistyksiss Soft Start tapa pois Soft Start k ynnistyksen aktivoimiseksi viitataan kohtaan Signal Description kappaleessa Technical Information TPS compact perustan takapaneeliin sijoitettu sininen STATUS led ilmoittaa vilkkumistiheydell n j rjestelm n toimintaolosuhteet palaa jatkuvasti pumppu py rii normaalisti a vilkkuu hitaasti noin 400 ms n jakso systeemi on kiihdytys jarrutus pys ytys tai Waiting for interlock tilassa vilkkuu nopeasti noin 200 ms n jakso virhetila Ks TPS compactin ohjaustaulun yksityiskohtainen kuvaus liitteest Technical Information TPS compact n pys ytt minen 130 262 Pys yt TPS compact asettamalla ulkokatkaisin OFF asentoon Sis nrakennettu valvoja pys ytt pumppausj rjestelm n valittomisti TPS compact User Manual 87 901 010 01 C Ohjekasikirja 10 Hatapysaytys Huolto H t tilassa pys yt TPS compact irrottamalla s hk johto pistorasiasta tai asettamalla ulkokatkaisin OFF asentoon TPS compact ei vaadi lainkaan huoltoa tip seal tiivisteen vaihtamista lukuun ottamatta Mahdolliset toimenpiteet tulee j tt
26. Waiting for interlock miga szybko okres 200 ms stan b du Dla szczeg owego opisu panelu sterowniczego TPS compact nale y zapozna si z dodatkiem Technical Information TPS compact User Manual 87 901 010 01 C Podrecznik Instrukeji 12 Zatrzymanie TPS compact Aby zatrzyma TPS compact wystarczy ustawi wytacznik zewnetrzny na pozycji OFF Wbudowany sterownik zatrzyma natychmiast zespot pompujacy Zatrzymanie Alarmowe Aby zatrzyma w stanie alarmowym system TPS compact nale y wytaczy kabel zasilania z gniazda sieciowego lub ustawi zewnetrzny wytacznik na pozycje OFF Konserwacja System TPS compact nie wymaga adnej konserwacji z wyjatkiem wymiany Tip seal Jakakolwiek interwencja musi by wykonana przez upowa niony personel ZAGROZENIE Przed wykonaniem jakiejkolwiek interwencji na systemie nale y odtaczy go od zasilania otworzy odpowiedni zaw r dla wlotu powietrza odczeka a do ca kowitego zatrzymania wirnika i odczeka a temperatura powierzchni pompy b dzie wynosi a poni ej 50 C W przypadku uszkodzenia mo liwe jest skorzystanie z serwisu naprawczego firmy Agilent Przed wysy k do konstruktora systemu do naprawy nale y obowi zkowo wype ni i przekaza do miejscowego biura sprzeda y kart Bezpiecze stwo i Zdrowie za czon do niniejszej instrukcji Jeden egzemplarz kopia karty musi by w o ony do opakowania systemu przed jego
27. als optie verkrijgbaar zijn 80 262 TPS compact User Manual 87 901 010 01 C Gebruik Bedrijfshandleiding 6 In deze paragraaf worden de belangrijkste gebruiksprocedures vermeld Breng alle elektrische en pneumatische aansluitingen tot stand alvorens het systeem te gebruiken Tijdens de eventuele verwarming van de vacu mkamer mag de temperatuur op de inlaatflens niet meer dan 120 C bedragen WAARSCHUWING Laat het pompsysteem nooit draaien als de inlaatflens niet op de vacu mkamer is aangesloten of als de afsluitflens niet gesloten is WAARSCHUWING Raak de turbopomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken WAARSCHUWING Vermijd stoten of bruuske verplaatsingen wanneer de turbopomp in werking is De lagers kunnen beschadigen en er kunnen letsels aan personen of schade aan voorwerpen worden veroorzaakt VOORZICHTIG PI PI PI Gebruik voor de luchttoevoer naar de pomp inert gas zonder stof vaste deeltjes of vocht bijv stikstof De inlaatdruk via de hiervoor bestemde poort moet minder van 2 bar boven de atmosferische druk bedragen TPS compact User Manual 87 901 010 01 C 81 262 6 Bedrijfshandleiding Gebruik VL Ee UT Wanneer de pomp wordt gebruikt voor het pompen van brandbare giftige of radioactieve gassen moeten de procedures worden gevolgd die speciaal voor elk type gas zijn opgesteld Inschakeling en
28. and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely CZ J LT Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F Ili Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com NAME COMPANY FUNCTION ADDRESS TEL N FAX N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc DATE CORRECTIVE ACTION PLAN ACTUATION LOG N by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc HE Agilent Technologies Agilent Technologies Vacuum Products Division Instructions fo
29. av gas eller gasf reningar Dock l mpar sig inte systemet f r pumpning av v tskor eller fasta partiklar Pumpningen stadkoms med hj lp av en h gvarvig turbin som drivs av en elektrisk trefas h geffektmotor Inga tillsats mnen anv nds i TPS compact som d rf r passar f r till mpningar som kr ver ett rent vakuum TPS compact har dessutom hj lpkontakter som g r det m jligt att kontrollera avluftningsventilen och att fj rrstyra den med hj lp av en host dator som r ansluten genom seriell f rbindelse De f ljande avsnitten inneh ller all information som beh vs f r att garantera operat rens s kerhet under anv ndningen Detaljerade uppgifter finns i bilagan Technical Information TPS compact User Manual 87 901 010 01 C 99 262 8 Bruksanvisning Allm n Information I bruksanvisningen anv nds f ljande standardrubriker VARNING Varningsmeddelandena informerar operat ren om att en speciell procedur eller en viss typ av arbete m ste utf ras exakt enligt anvisningarna I annat fall finns risk f r sv ra personskador Maia Detta varningsmeddelande visas framf r procedurer som m ste f ljas exakt f r att inte risk f r maskinskada ska uppst Detta visar p viktig information i texten 100 262 TPS compact User Manual 87 901 010 01 C Bruksanvisning 8 F rvaring Respektera f ljande anvisningar f r att garantera optimal prestanda och drifts kerhet f r Agilent turbomoleky
30. boste tako prepre ili probleme pu anja Zmeraj uporabite rokavice ali drugo primerno za ito Slika 1 OPOMBA Normalna izpostavljenost na okolje ne more po kodovati TPS compact a Kljub temu je priporo ljivo da je enota zaprta dokler je ne namestite v sistem S tem boste prepre ili onesna enje s prahom 186 262 TPS compact User Manual 87 901 010 01 C Priro nik za Navodila 15 Monta a POZOR Lepljiv in za itni pokrov ne odstranjujte dokler ne pove ete turbo rpalko na sistem rpalni sistem name ajte in uporabljajte samo odznotraj in v nobenem primeru je ne name ajte v okolju ki je izpostavljeno na atmosferske agente de sneg led prah agresivni plini ali v okoljih kjer obstaja nevarnost po ara Tekom delovanja je treba spo otvati naslednje pogoje a Maksimalen pritisk 2 bara nad pritiskom atmosfere temperatura od 5 C od 35 C a Relativna vla nost 0 95 brez kondenza V prisotnosti magnetnih polje za ite rpalni sistem s feromagnetnim itom TPS compact lahko namestite v poljuben polo aj TPS compact namestite v stabilem polo aj tako da pove ete vhodno prirobnico turbo rpalke na pritrjeno tevno prirobnico ki lahko prenese navor 50 Nm okoli svoje osi Turbo rpaklo z dovodno ISO prirobnico je treba fiksirati na vakuumsko le i e s pomo jo primerne Agilent strojne opreme Naslednja tabela prikazuje tevilo potrebnih dr al in pritrjeval t
31. configuration of the cover connector INTERLOCK input signal to control the pump rotation With the supplied cover connector the IN TERLOCK signal is connected to the 24 Vde pin and the INTERLOCK signal to the GROUND pin in this condition the pump is stopped TPS compact User Manual 87 901 010 01 C 227 262 17 Technical Information Interconnections SOFT START this input is used to provide a soft start to the pump in this condition the ramp up time could be up to 20 min SPEED SETTING PWM input signal to set the pump speed The PWM signal characteristics must be the following frequency 100 Hz 20 amplitude 24 V max a duty cycle range from 25 to 75 corresponding to a pump speed from 1100Hz to 1350Hz see the following diagram 1400 1350 1300 1250 1200 1150 1100 1050 Excitation Freguency Hz 20 30 40 50 60 70 80 Duty Cycle Figure 26 PROGRAMMABLE ANALOG SIGNAL this output signal is a voltage from 0 to 10 Vdc proportional to a reference guantity frequency or power or Temperature or Pressure set by the user The de fault setting is the frequency see the following example diagram 228 262 TPS compact User Manual 87 901 010 01 C 17 Technical Information
32. de werking moeten de volgende omgevingscondities aanwezig Zijn max druk 2 bar boven de atmosferische druk temperatuur van 5 C tot 35 C relatieve vochtigheid O 95 niet condenserend In aanwezigheid van magnetische velden moet het pompsysteem op passende wijze afgeschermd worden De TPS compact kan in alle standen worden ge nstalleerd Bevestig de TPS compact in een stabiele positie en verbind de inlaatflens van de turbopomp met een vaste contraflens die een koppel van 50 Nm rondom de eigen as kan verdragen De turbopomp met ISO inlaatflens moet aan de vacu mkamer worden verbonden met behulp van dubbele of enkelvoudige klemmen De volgende tabel beschrijft voor elke of klemtype het aantal benodigde klemmen en het aanhaalkoppel waarmee ze vastgezet moeten worden TPS compact User Manual 87 901 010 01 C 79 262 6 Bedrijfshandleiding Installatie Tab 1 FLENS KLEMTYPE NR AANHAAL KOPPEL ISO 63 Dubbele klem met M10 schroefdraad 4 22 Nm ISO 100 K Dubbele klem met M10 schroefdraad 4 22 Nm ISO 160 K Dubbele klem met M10 schroefdraad 4 22 Nm De turbopomp met ConFlat inlaatflens moet aan de vacu mpomp worden bevestigd met behulp van de speciale mechanische bevestigingselementen van Agilent Zie voor meer informatie de bijlage Technical Information De TPS compact kan niet met behulp van zijn eigen basis worden bevestigd Zie Technical Information voor installatie van accessoires die
33. di Sicurezza per Pompe Turbomolecolari Le pompe Turbomolecolari descritte nel seguente Manuale di Istruzioni hanno una elevata quantit di energia cinetica dovuta alla alta velocit di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore o per una rottura del rotore l energia di rotazione potrebbe essere rilasciata NAT 3 41 3 YZ I Per evitare danni all apparecchiatura e prevenire lesioni agli operatori necessario seguire attentamente le istruzioni di installazione descritte nel presente manuale 14 262 TPS compact User Manual 87 901 010 01 C Istruzioni per l uso 1 Informazioni Generali Ouesta apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilita dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Il TPS compact un sistema integrato costituito da una pompa turbomolecolare per applicazioni di alto e ultra alto vuoto integrata dal relativo controller e dalla pompa primaria Il sistema capace di pompare gualsiasi tipo di gas o di composto gassoso
34. es adecuado para aplicaciones gue requieren un vacio limpio Asimismo el TPS compact posee conectores auxiliares con los gue se puede gobernar la valvula de ventilaci n y pilotearlo a distancia mediante un ordenador host conectado a trav s de linea serial A continuaci n se facilita toda la informaci n necesaria para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informaci n mas detallada TPS compact User Manual 87 901 010 01 C 51 262 4 Manual de istrucciones Informacion general Este manual utiliza las convenciones siguientes DMIA Los mensajes de advertencia atraen la atenci n del operador sobre un procedimiento o una ejecuci n especifica que de no realizarse correctamente podria provocar graves lesiones personales ATENCI N Los mensajes de atenci n se visualizan antes de los procedimientos que de no cumplirse podr an provocar da os al aparato Las notas contienen informaci n importante extra da del texto 52 262 TPS compact User Manual 87 901 010 01 C Manual de istrucciones 4 Almacenamiento ATENCI N Para garantizar el nivel m ximo de funcionalidad y fiabilidad de los sistemas de bombeo Agilent deber n aplicarse las siguientes instrucciones durante el transporte desplazamiento y almacenamiento de las bombas no deber n superarse las siguientes condiciones ambientales temperatura entre 20 C y 70 C
35. gebruik van de TPS compact Om de TPS compact in te schakelen is het voldoende om voedingsspanning te verschaffen en de externe schakelaar in de stand ON te zetten De ingebouwde controller herkent automatisch de aanwezigheid van stroom en start de pomp Bij de eerste inschakeling wordt aangeraden om de Soft Start modaliteit te gebruiken door deze op de controller te activeren Voor de volgende inschakelingen wordt aangeraden om de Soft Start modaliteit te inactiveren Voor het activeren van de Soft Start procedure zie paragraaf Signal Description uit het hoofdstuk Technical Information De blauwe STATUS LED op het achterpaneel van de basis van de TPS compact geeft door de frequentie van zijn knipperen de werkcondities van het systeem aan brandt onafgebroken de pomp draait normaal a knippert langzaam periode van circa 400 ms het systeem is in de status oploop of remmen of stop of waiting for interlock a knippert snel periode van circa 200 ms fouttoestand Zie voor een gedetailleerde beschrijving van het bedieningspaneel van de TPS compact de bijlage Technical Information 82 262 TPS compact User Manual 87 901 010 01 C Bedrijfshandleiding 6 Afzetten van de TPS compact Om de TPS compact uit te schakelen is het voldoende om de externe schakelaar in de stand OFF te zetten De ingebouwde controller stopt onmiddellijk het pompsysteem Noodstop Om de TPS compact onder noo
36. humedad relativa entre 0 y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez el per odo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de env o al cliente En caso de superarse por cualquier motivo el per odo m ximo permitido de almacenamiento ser necesario devolver el sistema de bombeo al fabricante Para mayores informaciones al respecto se ruega contactar con el representante local de Agilent TPS compact User Manual 87 901 010 01 C 53 262 4 Manual de istrucciones Preparacidn para la instalacion Preparacion para la instalacion ATENCI N El TPS compact se suministra en un embalaje especial de protecci n si se observan da os que podr an haberse producido durante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de que no se caiga el TPS compact y de no someterlo a golpes o vibraciones No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con lo dispuesto por la directiva CEE 85 399 para la preservaci n del medio ambiente Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vac o Utilizar siempre guantes u otra protecci n adecuada NOTA Figura 1
37. nos turbomolekul rnej v vevy je 10 mesiacov odo d a dodania POZOR Ak z ak hoko vek d vodu vypr as skladovate nosti zariadenia vr te erpac syst m do z vodu v ktorom bola vyroben Inform cie z skate u miestneho zast penia spolo nosti Agilent pre predaj a servis TPS compact User Manual 87 901 010 01 C 173 262 14 Navod na Obsluhu Priprava na in talaciu Priprava na in talaciu POZOR Zariadenie TPS compact je dodan v Speci lnom ochrannom obale Ak je balenie po koden o sa mo e stat napriklad po as prepravy obr te sa na zastupenie spolo nosti Agilent Po as vybalovania systemu dbajte na to aby zariadenie nespadlo nebolo vystaven narazu alebo prudk mu otrasu alebo vibraciam Obalovy material zlikvidujte predpisanym sposobom Material je 100 recyklovatelny a spl a po iadavky smernice EEC 85 399 Ak chcete pred s probl mom s odply ovan m nechytajte komponenty ktor bud vystaven v kuu hol mi rukami V dy pou vajte rukavice alebo in vhodn ochranu Postava 1 POZN MKA Be n vystavenie okolit m podmienkam nem e TPS compact po kodi Napriek tomu je vhodn aby zariadenie zostalo zabalen a do in tal cie kv li prevencii kontamin cie prachom 174 262 TPS compact User Manual 87 901 010 01 C Navod na Obsluhu 14 In tal cia POZOR Neodstra ujte lepiacu p sku a ochrann kryt sk r ne pripoj
38. oder eine bestimmte Ausf hrungsweise die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnten MGS TANN Die Vorsichtshinweise werden vor Vorg ngen angegeben die bei Nichtbeachtung Sch den an der Anlage verursachen k nnten Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden 28 262 TPS compact User Manual 87 901 010 01 C Gebrauchsanleitung 2 Lagerung Zur Garantie der h chsten Funktionst chtigkeit und Zuverl ssigkeit der Agilent Pumpsysteme m ssen die folgenden Vorschriften eingehalten werden W hrend des Transports der Handhabung und der Einlagerung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werden Temperatur von 20 C bis 70 C Relative Feuchtigkeit von 0 bis 95 nicht kondensierend Der Kunde hat die Turbomolekularpumpen nach dem Empfang bei Erstinbetriebnahme stets im Modus Soft Start ingangzusetzen Die Lagerdauer f r eine Turbomolekularpumpe betr gt 10 Monate ab dem Speditionsdatum h s tm Falls die Lagerdauer aus verschiedentlichen Gr nden die genannte Frist berschreiten sollte ist das Pumpensystem an das Werk zur ckzusenden F r Informationen wenden Sie sich bitte an den rtlichen Agilent Vertreter TPS compact User Manual 87 901 010 01 C 29 262 2 Gebrauchsanleitung Vor der Installation Vor der Installation VORSICHT Modell TPS compact wird in einer speziellen Schutzver
39. office When unpacking the system be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection NOTE Figure 1 Normal exposure to the environment cannot damage the TPS compact Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust 198 262 TPS compact User Manual 87 901 010 01 C Instructions for Use 16 Installation CAUTION Do not remove the adhesive and protective cap before connecting the turbopump to the system Do not install or use the pumping system in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected maximum pressure 2 bar above atmospheric pressure temperature from 5 C to 35 C relative humidity O 95 non condensing In the presence of magnetic fields the pumping system must be protected using a ferromagnetic shield The TPS compact can be installed in any position Fix the TPS compact in a
40. pripade syst movej poruchy napr pri kontaktu rotora statora alebo pri zrucaniu rotora sa mo e uvolnit rota na energia NEBEZPE I Pokyny k in talacii uvedene v tomto navode musia byt dosledne dodr ovane aby nedo lo k po kodeniu zariadenia alebo k zraneniu obsluhy 170 262 TPS compact User Manual 87 901 010 01 C Navod na Obsluhu 14 V eobecne informacie Toto zariadenie je ur en pre profesion lnych pracovnikov Skor ne za nete zariadenie pou ivat pre itajte si navod na pou itie a v etky al ie pokyny spolo nosti Agilent Spolo nos Agilent nenesie iadnu zodpovednos za ak ko vek udalosti zapr inen postupom ktor nie je v sulade dokonca ani v iasto nom sulade s tymito pokynmi zapri inen nespravnym pou ivanim zariadenia nepou enymi osobami neopravnenou pravou zariadenia alebo akymkolvek postupom ktory je v rozpore so pecifickymi tandardmi danej krajiny TPS compact je integrovany system s turbovyvevou pre ur eny pre aplik cie pou vaj ce vysok alebo ve mi vysok vakuum spojen s prislu nym kontrolnym modulom a vyvevou primarneho vakua System doka e vy erpat lubovol ny typ plynu alebo zmesi plynov Nie je vhodn na vy erpavanie tekutin alebo pevnych asti Vy erpavanie zabezpe uje velmi r chla turbina poh an vysokovykonnym 3 fazovym elektrick m motorom Zariadenie TPS compact neobsahuje iadne kontamina n inidla a preto sa hod pre aplik ci
41. prodajalnem centru ali pa pri prodajalcu seznani o postopku lo evanja in odstranitve odpadkov ele nato ko se je seznanil s pogoji in z merili kupopordajne pogodbe 192 262 TPS compact User Manual 87 901 010 01 C TPS compact User Manual Instructions for Use Safety Guideline for Turbomolecular Pumps 194 General Information 195 Storage 197 Preparation for Installation 198 Installation 199 Use 201 Switching on and Use of TPS Compact 202 TPS Compact SDwitching off 202 Emergency Stop 203 Maintenance 203 Disposal 204 Original Instructions SHE Agilent Technologies 193 262 16 Instructions for Use Safety Guideline for Turbomolecular Pumps Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy may be released WARNING To avoid damage to equipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed 194 262 TPS compact User Manual 87 901 010 01 C Instructions for Use 16 General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional informatio
42. protegida atrav s de blindagens adequadas TPS compact pode ser instalado em qualquer posic o Fixar a aparelhagem em posi o estavel ligando o flange de entrada da turbobomba a um contra flange fixo capaz de resistir a um torgue de 50 Nm ao redor do pr prio eixo A turbobomba com flange de entrada ISO deve ser fixada a camara de vacuo atrav s de grampos duplos ou simples A tabela a seguir indica para todos os tipos de grampos o n mero de grampos e o torgue de aperto necessarios TPS compact User Manual 87 901 010 01 C 67 262 5 Manual de Istruc es Instalac o Tab 1 FLANGE TIPO DE GRAMPO N TORQUE DE APERTO ISO 63 Grampo duplo com rosca M10 4 22 Nm ISO 100 K Grampo duplo com rosca M10 4 22 Nm ISO 160 K Grampo duplo com rosca M10 4 22 Nm A turbobomba com flange de entrada ConFlat deve ser fixada c mara de v cuo atrav s de parafusos especificos da mec nica Agilent Para ulteriores detalhes consultar o ap ndice Technical Information O TPS compact n o pode ser fixado por intermedio da sua pr pria base Para a instalac o dos acess rios opcionais consultar Technical Information 68 262 TPS compact User Manual 87 901 010 01 C Manual de Istruc es 5 Utilizacao Neste par grafo s o descritos os principais procedimentos operacionais Antes de usar o sistema efectuar todas as liga es el ctricas e pneumaticas Durante o aquecimento da camara a vacuo a temperatura no flange d
43. supplies the 24 Vdc 2 the customer does not supply the 24 Vdc Please note that on the connector a 24 Vdc 30 mA voltage a GROUND signal and the open collector pin are available 24 Vdc Loo 5 Vde Customer s device l Controller JA K NPN nn 24 Vdc PNP 5 Vdc Customer s i device i Controller JAK Figure 32 Case 1 TPS compact User Manual 87 901 010 01 C Technical Information 17 i 24 Vdc Customer s device Controller 5 Vdc l N SK 24 Vdc gt Controller Customer s i 5 Vdc device Bi S Vo Tec Figure 33 Case 2 with relay utilisation TPS compact User Manual 87 901 010 01 C 233 262 17 Technical Information Interconnections 234 262 i 424 Vdc Customer s device PA i Controller PNP 5 Vdc W JAK 24 Vdc Controller Customer s i device 18 18 Vde BSK NPN TIT Figure 34 Case 2 with transistor utilisation TPS compact User Manual 87 901 010 01 C Technical Information 17 How to Connect the Outputs of the Controller The following figure shows a typical logic output connection relay coil but any other device may be connected e g a LED a
44. technick podm nky prost ed Teplotn rozp t 20 C a 70 C Rozp t vlhkosti 0 a 95 bez sr en turbomolekul rni vyv vy mus u ivatel po dod vce a poprv v dycky spou t t pozvoln a skladovatelnost turbomolekul rni vyv vy je 10 m s c ode dne doru en POZOR Pokud dojde z jak hokoli d vodu k p ekro en skladovac lh ty erpac system mus te vr tit v robci Informujte se pros m u m stn ho z stupce pro prodej a servis v v v firmy Agilent TPS compact User Manual 87 901 010 01 C 161 262 13 Navod k Pou iti P prava k instalaci P prava k instalaci V v va Mini Task se dod v ve speci ln m ochrann m obalu Pokud toto balen vykazuje zn mky po kozen k n mu mohlo doj t b hem p epravy kontaktujte va i m stn prodejn pobo ku P i vybalov n d vejte pozor aby za zen nespadlo a chra te jej p ed v emi nenad l mi n razy ot esy nebo vibracemi Balic materi l nelikvidujte nedovolen m zp sobem Tento materi l lze 100 recyklovat a spl uje po adavky sm rnice EEC 85 399 POZOR Aby se zamezilo probl m m s odply ov n m nepou vejte hol ruce p i manipulaci s komponenty kter budou vystaveny vakuu V dy pou vejte rukavice nebo jinou vhodnou ochranu Postava 1 POZN MKA V norm ln m prost ed se v v va TPS compact nem e po kodit P esto doporu ujeme abys
45. the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being returned under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier reguirements RETURN THE COMPLETED REOUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00800234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 k Agilent Technologies Vacuum Products Division Reguest for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Company Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if reguesting a billable service 3A O Non Billable Billa
46. with a 9 pin D type male connector and a 9 pin D type female connector and software optional Storage temperature 20 C to 70 C Weight kg lbs 19 1 42 1 16 7 36 8 According to standard DIN 28 428 the base pressure is that measured in a leakfree test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange When the TPS compact has been stored at a temperature less than 5 C wait until the TPS compact has reached the above mentioned temperature TPS compact User Manual 87 901 010 01 C 213 262 17 Technical Information TPS Compact Outline TPS Compact Outline The following figure shows the TPS compact outline Dimensions are in mm 253 48 i gt 267 90 448 26 Figure 5 TPS compact eguipped with TV301 250 200 a S 3 8 Pumping speed l s o 0 0001 0 001 0 01 0 1 Inlet Pressure mbar Figure 6 Graph o
47. wysy k Je eli system musi by poddany rozbi rce nale y przyst pi do jego eliminacji zgodnie z obowi zuj cymi krajowymi normami w meritum sprawy TPS compact User Manual 87 901 010 01 C 155 262 12 Podrecznik Instrukcji Przetworstwo odpadow Przetworstwo odpadow 156 262 Objasnienie znajdujacego sie na etykiecie znaczenia logo WEEE Uzyty ponizej symbol jest zgodny z wymogiem zarzadzenia WEEE Unii Europejskiej Symbol ten prawomocny tylko w krajach Unii Europejskiej oznacza ze wyrob ktory nim zostal oznaczony NIE moze byc przetworzony jako odpad razem z innymi domowymi lub przemyslowymi natomiast musi byc skladowany w miejscu przeznaczonym dla odpadow do przerobki zroznicowanej Dlatego tez poleca sie uzytkownikowi po uprzedniej weryfikacji terminu i warunkow zawartych w kontrakcie sprzedazy nawiazac kontakt z dostawca lub sprzedawca urzadzenia w celu uruchomienia procesu zbiorki i przerobu TPS compact User Manual 87 901 010 01 C TPS compact User Manual 13 Navod k Pouziti Bezpe nostni navod pro Turbomolekularni vyv vy 158 V eobecne informace 159 Uskladn ni 161 P prava k instalaci 162 Instalace 163 Pou iti 165 Zapnuti a pou ivani vyv vy TPS compact 166 Vypnuti vyv vy TPS compact 166 Nouzov zastaveni 167 Udr ba 167 Likvidace 168 Preklad originalniho navodu SEE Agilent Technologies 157 262 13 Navod k Pou iti Bezpe nostn n vod pro Turbomolekularni v
48. za uporabo in vse dodatne informacije ki mu jih je posredoval Agilent Agilent ni odgovoren za dogodke ki bi nastali zaradi neupo tevanja teh navodil nepravilne uporabe in nepoobla enega poseganja v opremo ali kakr nega koli dejanja ki niso v skladu s standardi TPS compact je integriran sistem s turbomolekularno rpalko za visoko in ultravisoko vakuumsko uporabo ki je povezana s pripadajo im upravljalcem in primarno rpalko Sistem lahko rpa vse tipe plinova ali plinskih zmesi Ni primeren za rpanje teko ine ali trdnih delcev rpanje se izvaja preko hitre turbine ki jo vodi visoko u inkovit 3 fazni elektri ni motor TPS compact ne vsebuje onesna evalnih agentov in je primeren za isto vakuumiranje TPS compact je opremlje z auksiliarnimi priklju ki za nadzor na odprtino ki jo lahko nadzorujete iz oddaljene lokacije s pomo jo gostiteljskega ra unalnika povezanega preko serijske povezave Naslednji odstavki vsebujejo informacije ki so potrebne za varnost tistega ki uporablja to opremo Podrobne informacije lahko najdete v prilogi Technical Information TPS compact User Manual 87 901 010 01 C 183 262 15 Priro nik za Navodila Splo ne informacije Navodila so napisana po naslednjem standardnem protokolu SVARILO Svarilo so za to da pritegnejo pozornost uporabnika na dolo ene postopke pri katerih lahko pride do resnih po kodb e se jih ne dr i POZOR Sporo ila so prikazana pr
49. 0 01 C 89 262 7 Istruktionsbog Forberedelse for installation Forberedelse for installation TPS compact leveres i en speciel beskyttende emballage Kontakt den lokale forhandler hvis emballagen viser tegn pa skader der kan vere opst et under transporten S rg for at TPS compact ikke tabes eller uds ttes for stad ved udpakningen Smid ikke emballagen ud Materialet kan genbruges 100 og opfylder EU direktiv 85 399 om milj beskyttelse Abi Komponenter der skal uds ttes for vakuum m ikke ber res med bare h nder idet der er risiko for afgasning Anvend altid handsker eller anden lignende beskyttelse Figur 1 BEM ERK Normal atmosf risk p virkning kan ikke skade TPS compact Det anbefales dog at opbevare pumpen i en lukket kasse indtil den skal installeres Herved forhindres at der kommer stov i pumpen 90 262 TPS compact User Manual 87 901 010 01 C Istruktionsbog 7 Installation HT ETAT Tapen og beskyttelsesproppen fjernes f rst nar turbopumpen tilsluttes systemet Installer og anvend ikke pumpeanl gget i milj er der uds ttes for pavirkninger fra atmosf ren regn sne is damp aggressive gasser og ligeledes ikke i eksplosivt eller brandfarligt milj Folgende krav til omgivelsesforholdene g lder ved drift a max tryk 2 bar over det atmosf riske tryk temperatur fra 5 C til 35 C relativ luftfugtighed O 95 ikke kondenserende Hvis pumpeanl
50. 0 4 22 Nm Turbopumparna med intagsfl ns ConFlat ska f stas vid vakuumkammaren med hj lp av Agilent f stdelar F r detaljer h nvisas till bilaga Technical Information TPS compact systemet kan inte fastsp nnas med sin egen bas Installation av tillbeh rsutrustning beskrivs i Technical Information 104 262 TPS compact User Manual 87 901 010 01 C Bruksanvisning 8 Anv nding Anvisningar f r riktig anv ndning finns i styrenhetens bruksanvisning Innan du anv nder systemet ska du utf ra alla elektriska och pneumatiska anslutningar Om vakuumkammaren uppv rms f r temperaturen vid inloppet aldrig verstiga 120 C VARNING S tt aldrig ig ng pumpsystemet om intagsfl nsen varken r kopplad till vakuumkammaren eller r blockerad p plats med l sfl nsen VARNING Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r att undvika br nnskador VARNING Undvik st tar eller pl tsliga r relser av pumpen under drift Lagren skulle kunna f rst ras och skador p personer eller p f rem l kan intr ffa OBSERVER Anv nd delgas fri fr n damm partiklar och fukt t ex kv ve f r luftning av pumpen Trycket vid inloppet f r vara h gst 2 bar ver atmosf riskt tryck TPS compact User Manual 87 901 010 01 C 105 262 8 Bruksanvisning Anv nding VARNING Da pumpen anv nds f r pumpning av giftiga l ttant ndliga el
51. 1 C Kaytto Ohjekasikirja 10 Tahan kappaleeseen on kirjattu t rkeimm t kayttotoimenpiteet Suorittakaa ennen j rjestelm n k ytt kaikki s hk ja paineilmakytkenn t Tyhji kammion mahdollisen l mmityksen aikana sis ntulolaipan l mp tila ei saa ylittaa 120 C tta VAROITUS lk k ytt k pumppausj rjestelm ellei sis ntulolaippaa ole kytketty tyhji kammioon tai pumppua suljettu sulkulaipalla VAROITUS lk koskeko turbopumppuun tai sen lis osiin lammitt misen aikana Korkea l mp tila saattaa aiheuttaa henkil iden loukkaantumisia VAROITUS V ltt k turbopumppuun kohdistuvia iskuja tai sen kkin ist liikuttamista sen ollessa k ynniss Laakerit voisivat vahingoittua joka saattaisi johtaa henkil tai omaisuusvahinkoihin P stett ess pumppuun ilmaa tulee k ytt jalokaasua jossa ei ole p ly hiukkasia tai kosteutta esim typpi Sis njohtavan paineen siihen sopivan aukon l pi t ytyy olle alle 2 baaria paitsi atmosf rinen paine TPS compact User Manual 87 901 010 01 C 129 262 10 Ohjek sikirja K ytt VAROITUS Kun pumppua k ytet n myrkyllisten paloherkkien tai radioaktiivisten kaasujen pumppaamiseen noudattakaa jokaiselle kaasulle sopivaa menettelytapaa lk k ytt k pumppausj rjestelm r j hdysherkkien kaasujen l hell TPS compact n k ynnistys ja k ytt K ynnist
52. 1 Felhaszn l i K zik nyv Altalanos inform ci Ez a kezik nyv a k vetkez szabvanyos protokollt hasznalja VESZ LY A vesz lyt zenetek felhivjak a kezel figyelm t egy konkret eljarasra vagy gyakorlatra amit ha nem k vetnek megfelel en sulyos ser leshez vezethet 10430341 A Figyelem zenetek olyan elj r sok el tt jelennek meg amelyeket ha nem k vetnek a berendez s k rosod s t okozhatj k A megjegyz sek fontos a sz vegb l kivonatolt inform ci kat tartalmaznak 136 262 TPS compact User Manual 87 901 010 01 C Felhaszn l i K zik nyv 11 Tarolas A Agilent szivattyu rendszerek maximalis m k d si szintj nek s megbizhat s g nak biztos t s hoz tartsa be a k vetkez el ir sokat szivatty k sz ll t sakor mozgat sakor s t rol sakor a k vetkez k rnyezeti param tereket nem szabad t ll pni h m rs klettartomany 20 C 70 C relativ p ratartalom 0 95 nem kondenz l A turbomolekularis szivatty kat mindig l gyan kell ind tani amikor a felhaszn l atveszi s el sz r zemelteti Egy turbonukle ris szivatty raktarozhatasi ideje 10 h nap a szallitas datumatol FIGYELEM Ha valamilyen okb l a raktarozhatasi id t t ll pik a szivatty z rendszert vissza kell vinni a gyarba Kerem inform ci ert forduljon a helyi Agilent v kuumkereskedelmi s szolg ltat si k pviselethez TPS compact User Manual 87
53. 2 Zur Einschaltung des TPS compact ist der Netzstecker anzuschlie en und der externe Schalter auf die Schaltstellung ON zu stellen Der eingebaute Controller erfa t automatisch das Anliegen der Spannung und startet die Pumpe Bei der Erstinbetriebnahme sollte die Betriebsart Soft Start ber den Controller eingestellt werden bei darauffolgenden Ingangsetzungen wird empfohlen die Betriebsart Soft Start zu deaktivieren Um den Modus Soft Start einzustellen bitte den Absatz Signal Description im Kapitel Technical Information nachschlagen Die blauen LEDs STATUS an der Bodenplatte von Modell TPS compact gibt mit der H ufigkeit ihres Blinkens die Be triebsbedingungen des System an a Daueranzeige Die Pumpe befindet sich im normalen Betrieb Langsame Blinkanzeige ca 400 ms das System befindet sich entweder im Status Rampe Abbremsung Stopp oder Waiting for Interlock Schnelle Blinkanzeige ca 200 ms Fehlerstatus F r eine detaillierte Erl uterung der Bedienblende des TPS compact siehe im Anhang Technical Information TPS compact User Manual 87 901 010 01 C Gebrauchsanleitung 2 Stoppen von Modell TPS compact Zur Stillsetzung des TPS compact ist der externe Schalter auf die Schaltstellung OFF zu schalten Der eingebaute Controller sorgt f r den sofortigen Stopp des Pumpensystems Not Aus Wartung Zur Notstillsetzung des TPS compact ist der Netzstecker zu ziehen oder der e
54. 7 901 010 01 C 41 262 3 Mode d emploi Pr paration pour l installation Pr paration pour l installation ATTENTION Le TPS compact est livr dans un emballage de protection sp cial en cas d endommagement de l emballage pouvant s tre produit pendant le transport contacter le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber le TPS compact et ne lui faire subir aucun choc et aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et conforme la directive CEE 85 399 en mati re de protection de l environnement Afin d viter tout probl me de d gazage ne pas toucher mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e Figure 1 Le TPS compact ne peut s endommager en restant simplement expos l atmosph re Toutefois afin d viter toute pollution due la poussi re il est conseill de le garder dans son emballage clos jusqu au moment de l installation 42 262 TPS compact User Manual 87 901 010 01 C Mode d emploi 3 Installation Furl Ne d coller l adh sif et ne retirer le couvercle de protection qu au moment de brancher la turbopompe au syst me Ne pas installer et ou utiliser le syst me de pompage dans des milieux expos s aux agents atmosph riques pluie gel neige la
55. 901 010 01 C Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford 0X5 10U UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
56. 901 010 01 C 137 262 11 Felhaszn l i K zik nyv El k sz t s telep t sre El k sz t s telep t sre FIGYELEM A TPS compact ot k l nleges v d csomagol sban sz ll tj k Ha ez s r l s jeleit mutatja ami sz ll t s k zben felmer lhet forduljon a helyi szolg ltat si irod hoz A rendszer kicsomagol sakor gyeljen arra hogy ne ejtse le s ker lje annak b rmilyen hirtelen t s t vagy r zk d s t Ne rtalmatlan tsa a csomagol anyagokat nem megengedett m don Az anyag teljesen jrafeldolgozhat s megfelel az EEC 85 399 es direkt v nak G zkivon si probl m k elker l s re ne haszn ljon puszta kezeket v kuumnak kitett komponensek kezel s re Mindig haszn ljon keszty t vagy m s alkalmas v delmet bra 1 Wie 130 435 A k rnyezetnek val norm l kitetts g nem tudja k ros tani a TPS compact ot M gis aj nlatos z rva tartani a rendszerbe val telep t sig igy megakad lyozva a por ltali szennyez d s b rmely form j t 138 262 TPS compact User Manual 87 901 010 01 C Felhaszn l i K zik nyv 11 Telepites 6303 Ne t vol tsa el az ntapad s v d kupakot a turb szivatty nak a rendszerhez val csatlakoztat sa el tt Ne telep tse valamint ne haszn lja a szivatty z rendszert atmoszf rikus k zegeknek kitett k rnyezetben es h j g porban agressz v g zokban illetve robban vagy t zvesz lyes
57. 9398 Vibration damper 969 9344 969 9334 969 9345 969 9335 Inlet screen 969 9302 969 9302 969 9304 969 9304 FRG 700 1 5 m cable 969 9959 969 9959 969 9959 969 9959 FRG 700 3 m cable 969 9960 969 9960 969 9960 969 9960 FRG 700 5 m cable 969 9961 969 9961 969 9961 969 9961 EyeSys Mini IMG cable 1 m 969 9943 969 9943 969 9943 969 9943 EyeSys Mini IMG ext cable 969 9944 969 9944 969 9944 969 9944 Serial cable and T Plus SW 969 9883 969 9883 969 9883 969 9883 Tip seal replacement kit IDP3TS IDP3TS IDP3TS IDP3TS For a complete overview of Agilent s extensive product lines please refer to the Agilent catalog 256 262 TPS compact User Manual 87 901 010 01 C e Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem
58. A IAE Lorsque la pompe est utilis e pour le pompage de gaz toxiques 46 262 inflammables ou radioactifs suivre les proc dures typiques de chaque gaz Ne pas utiliser le syst me de pompage en pr sence de gaz explosifs Mise en marche et utilisation du TPS compact Pour allumer le TPS compact il suffit de le brancher au r seau et de placer l interrupteur ext rieur sur ON Le contr leur incorpor reconna t automatiquement la pr sence de l alimentation et met la pompe en marche Lors de la premi re mise en marche il est conseill d adopter le mode Soft Start en l activant sur le contr leur pour les d marrages suivants il est conseill de d sactiver le mode Soft Start Pour la proc dure d activation de la modalit Soft Start se r f rer au paragraphe SIGNAL DESCRIPTION dans le chapitre Technical Information La LED bleu STATUS plac e sur le panneau arri re de la base du TPS compact indique par sa fr quence de clignotement les conditions op rationnelles du syst me allum e fixe la pompe est en rotation normale a clignote lentement p riode d environ 400 ms le syst me est en tat de rampe de freinage de stop ou d attente interlock a clignote rapidement p riode d environ 200 ms condition d erreur Pour une description d taill e du panneau de contr le du TPS compact consulter l appendice Technical Information TPS compact User Manual 87 901 010 01 C Mode d emploi
59. AR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met TPS compact User Manual 87 901 010 01 C TPS compact TPS compact TPS compact User Manual 87 901 010 01 C 3 262 TPS compact 4 262 TPS compact User Manual 87 901 010 01 C Contents Contents 1 Istruzioni per l uso 13 Indicazioni di Sicurezza per Pompe Turbomolecolari 14 Informazioni Generali 15 Immagazzinamento 17 Preparazione per l installazione 18 Installazione 19 Uso 21 Manutenzione 23 Smaltimento 24 2 Gebrauchsanleitung 25 Sicherheitshinweise f r Turbomolekularpumpen 26 Allgemeine Informationen 27 Lagerung 29 Vor der Installation 30 Installation 31 Gebrauch 33 W
60. Antes de enviar al fabricante un sistema para su reparaci n es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Seguridad y Salud adjunta al presente manual de instrucciones Una copia de la misma se deber introducir en el embalaje del sistema antes de enviarlo En caso de que el sistema se tenga que desguazar eliminarlo respetando las normas nacionales especificas TPS compact User Manual 87 901 010 01 C 59 262 4 Manual de istrucciones Eliminaci n Eliminaci n 60 262 Significado del logotipo WEEE presente en las etiquetas El simbolo que se indica a continuaci n es aplicado en observancia de la directiva CE denominada WEEE Este simbolo valido s lo para los paises miembros de la Comunidad Europea indica gue el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto se invita al usuario final a ponerse en contacto con el proveedor del dispositivo tanto si ste es la casa fabricante o un distribuidor para poder proveer a la recogida y eliminacion del producto despu s de haber efectuado una verificaci n de los terminos y condiciones contractuales de venta TPS compact User Manual 87 901 010 01 C TPS compact User Manual Manual de Istruc es Indicac es de Seguranca para Bombas
61. C 224 R A Pressure reading Format X X E XX 226 R N Rotation Frequency rpm 300 R N Cycle time in minutes zeroed by the reset 0 to 999999 command 301 R N Cycle number zeroed by the reset 0 to 9999 command 302 R N Pump life in hours zeroed by the reset 0 to 999999 command 310 Reserved to Agilent service to 347 358 R W N Tip seal life R 0 reset Tip seal life reset W 400 R A CRC EPROM QE QE8XXXX where XXXX are variable 401 R A Boot CRC BL BL2XXXX where XXXX are variable TPS compact User Manual 87 901 010 01 C 247 262 17 Technical Information Window Protocol N Read Data Description Admitted Values Write Type 402 R A CRC Param PA PA8XXXX where XXXX are variable 404 R A CRC Parameter structure XXXX 406 R A Program Listing Code XXXXXXXXXX 407 R A Parameter Listing Code XXXXXXXXXX 500 Reserved to Agilent service 503 R W N RS 485 address 0 to 31 default 0 504 R W L Serial type select 0 lt RS 232 1 lt RS 485 default lt 0 1 Automatic means that when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On command means that the vent valve is opened or closed by means of window n 122 3 These commands remove the pump motor supply for a short time If they are used continuously they can cause the pump stopping 7 6 5 4 3 2 0 TO
62. Full Range Gauge is a combined technologies gauge Inverted Magnetron plus Pirani Gauge TPS compact User Manual 87 901 010 01 C 223 262 17 Technical Information Interconnections FRG 700 measure from 5x10 mbar to atmosphere 3 8x10 Torr to atmosphere and its temperature range goes from 5 C to 55 C 41 131 F Pressure data is available on three independent reading channels 1 On board display data expressed in mbar Torr or Pa see Pressure Display Module picture 2 Serial communication line Win 224 3 Analogical output Pressure gauge can be connected disconnected from the TPS compact during normal operation IDENTIFICATION SIGNAL COMMON 25VDC P MAX 2W COMMON SIGNAL Figure 21 Gauge Connector The Mini IMG gauge is intended for high vacuum use so with pressure above 50 mTorr the signal is misinterpreted and a false pressure is displayed Use a transition gauge to understand if the reading is really under 50 m Torr or not 224 262 TPS compact User Manual 87 901 010 01 C Pressure Display Module Technical Information 17 PRESSURE BERE Figure 22 Pressure display module MU 9 male pin D Sub Connector N N NW 25 and NW 40 KF fittings Figure 23 EyeSys Mini IMG gauge dimension TPS compact User Manual 87 901
63. K zik nyv 11 Hasznalat Ez a bekezd s r szletezi az alapvet zemeltetesi elj r sokat V gezze el az osszes elektromos s pneumatikus csatlakoztatast a rendszer hasznalata el tt A vakuumkamra melegit se k zben a bemeneti szelep h6m rs klete nem haladhatja meg a 120 C ot VESZELY Soha ne haszn lja a szivatty z rendszert amikor a bemeneti karima nincs csatlakoztatva a vakuumkamr hoz vagy nincs kiiktatva VESZELY Ne rintse meg a turboszivattyit vagy annak tartoz kait a melegitesi folyamat k zben Magas h m rs klet g st okozhat VESZELY Ne mozditsa el s vigyazzon ne tk zz n semmi a turboszivattyuhoz m k des k zben A csapagyak megs r lhetnek s anyagi kar vagy szemelyi s r l s t rtenhet A AAA Haszn ljon port l szemcsekt l vagy nedvess gt l mentes semleges g zt pl nitrogent a szivattyu szell ztetesehez A szell z porton lev nyomasnak 2 barnal kisebbnek kell lennie a legk ri nyomas f l tt TPS compact User Manual 87 901 010 01 C 141 262 11 Felhaszn l i K zik nyv Haszn lat Amikor a szivatty t m rgez gy l kony vagy radioakt v g zok szivatty z s ra haszn lja k rem k vesse az egyes g zok rtalmatlan t s hoz sz ks ges elj r sokat Ne haszn lja a szivatty z rendszert robban g zok jelenl t ben A TPS compact bekapcsol sa s haszn lata A TPS compact bekapcsol s hoz ele
64. O HIGH LOAD NO CONNECTION SHORT CIRCUIT PUMP OVERTEMP OVERVOLTAGE CONTROLL OVERTEMP Figure 39 Windows N 206 Bit Description 248 262 TPS compact User Manual 87 901 010 01 C Technical Information 17 Service Options Agilent pumping systems will provide many years of trouble free operation if the maintenance procedures are observed Pumping System cleaning and internal scroll pump tip seal replacement are recommended when Pumping System TMP adsorbed current with blanked inlet flange has risen to an unacceptably high level gt 500 mA or when the message TIP SEAL SERV appears on the TPS compact front side display The warning message appears after 5000 h of operation If your TPS compact exhibits humming or grinding noises from the scroll pump a major overhaul should be done by Agilent Vacuum Technologies Advance exchange TPS compact are available to minimize downtime The parts needed for Tip Seal replacement on the internal scroll pump are available in the kit described in Orderable parts Table This kit contains seals and O rings and can be obtained from your Agilent dealer Cleaning Exterior The exterior surfaces of the TPS compact may be cleaned with mild detergents only Interior Internal dry scroll pump do not contain fluid for the cleansing of accumulated dust and debris Run the pump periodically at atmosphere for a minute or two to flus
65. Options To Install the new Seals and O Rings 1 10 252 262 Unpack the Tip Seals Two tip seals are provided in the kit one fits the orbiting scroll and the other fits the out board housing scroll Install the correct tip seal into the groove of the orbiting scroll by a Facing the white plastic surface upwards and inserting the foam backing into the groove Start from the center and work outward b Cutting the tip seal off about 1 8 3 mm from the outer end of the groove Install the correct tip seal into the groove of the outboard housing scroll as in step 3 Place the new main O ring into the groove in the frame Ensure that the groove is clean Ensure the sealing face of the outboard hous ing is clean Carefully replace the outboard housing by lining up the locating pins Ensure the tip seal has not fallen out of its groove Reinstall 4 M5 bolts B and torque the 4 M5 bolts to 5 6 N m 50 in Ib Unlock the upper part of TPS compact by sliding the small lever you can find on the bottom side of TPS compact Reconnect the TPS compact to the electrical power mains Disable the TIP SEAL SERV warning message by serial interface To disable the Tip seal Service message you have to reset the Tip seal hour meter Win 358 Write a 0 on the window 358 The message will be showed again after 5000 h of operation To check the Tip seal life you have just to read the Win 358 TPS compact User Manual 87
66. PS compact wordt in een speciale beschermende verpakking geleverd als er schade wordt geconstateerd die tijdens het transport veroorzaakt zou kunnen zijn meteen contact opnemen met het plaatselijke verkoopkantoor Zorg er bij het uitpakken voor dat de TPS compact niet kan vallen en geen stoten of trillingen te verduren krijgt Laat de verpakking niet ergens buiten achter Het verpakkingsmateriaal is volledig recyclebaar en voldoet aan de EEG milieurichtlijn 85 399 Tr yen Om ontgassingsproblemen te voorkomen mogen de componenten die met het vacu m in aanraking komen niet met de blote handen aangeraakt worden Gebruik altijd handschoenen of een andere geschikte bescherming Figuur 1 OPMERKING De TPS compact kan niet beschadigd worden door eenvoudigweg aan de atmosfeer blootgesteld te worden Toch wordt aangeraden om de pomp gesloten te houden zolang deze niet in het systeem wordt ingebouwd zodat eventuele vervuiling door stof wordt voorkomen 78 262 TPS compact User Manual 87 901 010 01 C Bedrijfshandleiding 6 Installatie Moo toile Alleen op het moment waarop de turbopomp op het systeem wordt aangesloten mogen de sticker en de beschermdop verwijderd worden Het pompsysteem mag niet geinstalleerd en of gebruikt worden in ruimten die blootgesteld zijn aan de weersomstandigheden regen vorst sneeuw stof agressieve gassen of in ruimten met explosiegevaar of zeer groot brandgevaar Tijdens
67. TPS compact Models 969 8217 969 8218 969 8219 969 8220 969 8221 969 8222 969 8223 969 8224 969 8225 969 8226 969 8227 969 8228 969 8229 969 8230 969 8231 969 8232 Manuale di istruzioni Instruksjon manual Bedienungshandbuch Ohjek sikirja Notice de mode d emploi Felhasznal i kezikonyv Manual de istrucciones Podrecznik instrukcji Manual de istruc es Navod k pou iti Bedrijfshandleiding Navod na obsluhu Istrukstionsbog Priro nik za navodila Bruksanvisning User Manual 87 901 010 01 C 05 2012 of Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 901 010 01 C Edition Edition 05 2012 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limit
68. Turbomoleculares 62 Informa es gerais 63 Armazenagem 65 Preparac o para a instalac o 66 Instalac o 67 Utilizac o 69 Acendimento e Utilizac o do TPS compact 70 Paragem do TPS compact 70 Paragem de Emerg ncia 71 Manutenc o 71 Eliminac o 72 Traduc o das instruc es originais SEE Agilent Technologies 61 262 5 Manual de Istruc es Indicac es de Seguranca para Bombas Turbomoleculares Indicac es de Seguranca para Bombas Turbomoleculares As bombas turbomoleculares descritas no seguinte Manual de Instruc es t m uma alta quantidade de energia cin tica devida alta velocidade de rota o unida massa especifica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o estator ou uma ruptura do rotor a energia de rota o pode ser liberada ATENCAO Para evitar danos aparelhagem e prevenir les es aos operadores amp necess rio seguir atentamente as instruc es de instalac o descritas neste manual 62 262 TPS compact User Manual 87 901 010 01 C Manual de Istruc es 5 Informac es gerais Esta aparelhagem destina se a uso profissional O utilizador deve ler atentamente o presente manual de instrug es e todas as informac es adicionais fornecidas pela Agilent antes de utilizar a aparelhagem A Agilent n o se responsabiliza pela inobserv ncia total ou parcial das instruc es pelo uso indevido por parte de pessoas nao treinadas por operac es ndo aut
69. WEEE Dette symbolet som bare gjelder for land i Det europeiske fellesselskap viser at produktet som det star pa IKKE ma behandles som vanlig hus industriavfall men ma legges i kildesortering Derfor oppfordrer man den sluttelige brukeren av anordningen A henvende seg til leverand ren av anordningen som kan v re et firma eller en forhandler som s rger for oppsamling og kassering etter ha kontrollert avtaler og betingelser i kjapekontrakten 120 262 TPS compact User Manual 87 901 010 01 C TPS compact User Manual 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet 122 Yleisi tietoja 123 Varastointi 125 Valmistelut asennusta varten 126 Asennus 127 K ytt 129 TPS compact n k ynnistys ja k ytt 130 TPS compact n pys ytt minen 130 H t pys ytys 131 Huolto 131 H vitt minen 132 Alkuper isen ohjeiden k nn s SEE Agilent Technologies 121 262 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet Turbomolekyylipumppujen Turvaohjeet T ss k ytt ohjeessa kuvatuissa turbomolekyylipumpuissa on korkea maara kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa pyorimisenergia saattaa vapautua VAROITUS T ss k ytt ohjeessa kuvattuja asennusohjeita on noudatettava tarkasti 122 262 laitteiston vaurioitum
70. a K yt n aikana on noudatettava seuraavia ymp rist koskevia ehtoja maksimipaine 2 baaria yli atmosf risen paineen a l mp tila 5 C 35 C suhteellinen kosteus 0 95 ei tiivist v Mik li l sn on magneettikentti tulee pumppausj rjestelm suojata t h n tarkoitukseen olevilla suojilla TPS compact voidaan asentaa mihin tahansa asentoon Kiinnit TPS compact tukevaan asentoon kytkem ll turbopumpun kiinte sis ntulolaippa kiinte n vastalaippaan joka kest 50 Nm n momentin oman akselinsa ymp ri Turbopumppu ISO sis ntulolaipalla tulee kiinnitt tyhji kammioon kaksois tai yksinkertaisilla kiinnikkeill Seuraavassa taulukossa ovat kaikki kiinnikemallit kiinnikkeiden vaadittava m r ja kiristysmomentti TPS compact User Manual 87 901 010 01 C 127 262 10 Ohjek sikirja Asennus Tab 1 LAIPPA KIINNIKE M R KIRISTYS MOMENTTI ISO 63 Kaksoiskiinnike kierteitys M10 4 22 Nm ISO 100 K Kaksoiskiinnike kierteitys M10 4 22 Nm ISO 160 K Kaksoiskiinnike kierteitys M10 4 22 Nm Turbopumppu ConFlat sis ntulolaipalla tulee kiinnitt tyhji kammioon sopivien Agilentin mekaanisten varusteiden avulla Lis tietoja l ytyy Technical Information liitteest TPS compact ei voida kiinnitt perustansa kautta Ks Technical Information liitett lis varusteiden asentamista varten 128 262 TPS compact User Manual 87 901 010 0
71. a Bruk fukt st v og partikkelfri inaktiv gass f eks kvelstoff ved forsyning av pumpen Trykket ved inngangen ma ikke v re mindre enn 2 bar over atmosf risk trykk i bl Pl TPS compact User Manual 87 901 010 01 C 117 262 9 Instruksjon Manual Bruk MONTGAT N r pumpen brukes for pumpe giftige brannfarlige eller radioaktive gasser skal de relevante forskriftene for de enkelte gasstypene folges Pumpesystemet skal ikke brukes i eksplosjonsfarlige milj er Starte og bruke TPS compact For a sl p TPS compact er det nok kople til strammen og dreie den utvendige bryteren til ON Den innebygde styreenheten detekterer stromforsyningen automatisk og sorger for starte pumpen Ved f rste start svarer det seg aktivere Soft Start modusen p styreenheten For folgende starter anbefales det deaktivere Soft Start modusen Fremgangsm ten for kople inn Soft Start modus er beskrevet i kapittelet Technical Information under paragrafen Signal Description Det bl lysemitterende dioden STATUS som befinner seg p det bakre panelet til TPS compacts base angir ved hjelp av frekvensen p blinkingen den operative situasjonen til systemet den lyser fast pumpen roterer normalt den blinker langsomt ca hver 400 ms systemet er i stilling for akselerasjon bremsing stopp eller Waiting for interlock den blinker hurtig ca hver 200 ms feiltilstand Se vedlegget T
72. alebo radioaktivnych plynov dodr iavajte prosim po adovane postupy pre likvidaciu jednotlivych plynov Nepou ivajte vyvevu v pritomnosti vybu nych plynov Zapnutie a pou itie zariadenia TPS compact Pre zapnutie TPS compactu sta i pripojenie k sieti a prepnutie vonkaj ieho vypina a do polohy ON Zabudovany kontrolny modul automaticky rozpozna pripojenie k sieti a zapne vyvevu Pri prvom zapnuti sa odporu a pou it re im Soft Start ktory sa da aktivovat na kontrolnom module Pre d al ie zapnutia sa odporu a re im Soft Start zablokovat Viac o aktivovani re imu Soft Start najdete v odstavci Popis signalu v kapitole Technical Information Modra LED STATUS umiestnena na zadnom paneli zariadenia TPS compact signalizuje frekvenciou blikania operativne podmienky v ktor ch sa nachadza system iadne blikanie v veva norm lne rotuje pomal blikanie interval asi 400 ms syst m je v niektorom z t chto stavov stupanie klesanie brzdenie Stop alebo v re ime Cakanie na spojenie r chle blikanie interval asi 200 ms chybov stav Podrobn inform cie o kontrolnom paneli TPS compactu sa nachadzaju v dodatku Technical Information Vypnutie TPS compact Pre vypnutie TPS compactu sta i prepnutie vonkaj ieho vypina a do polohy OFF Zabudovany kontrolny modul erpaci system okam ite zastavi 178 262 TPS compact User Manual 87 901 010 01 C Navod na Obsluhu 14 Nudzove
73. an da ar y se podr an verificar da os a las personas o a las cosas PI Pj PI ATENCI N Para el env o al aire de la bomba utilizar gas inerte exento de polvo part culas y humedad por ej nitr geno La presi n de entrada a trav s de la respectiva puerta debe ser inferior a 2 bares por encima de la presi n atmosf rica TPS compact User Manual 87 901 010 01 C 57 262 4 Manual de istrucciones Uso OOM NESEN Cuando la bomba se utiliza para bombear gases t xicos inflamables o 58 262 radioactivos seguir los procedimientos apropiados t picos de cada gas No usar el sistema de bombeo cuando haya gases explosivos Encendido y Uso del TPS compact Para encender el TPS compact basta conectar la tensi n de alimentaci n y disponer el interruptor externo en posici n ON El controlador incorporado reconoce autom ticamente la presencia de la alimentaci n y pone en marcha la bomba Al efectuar el primer encendido conviene adoptar la modalidad Soft Start activ ndola en el controller mientras que para las sucesivas activaciones se aconseja inhabilitar dicha modalidad Soft Start Para el procedimiento de activaci n de la modalidad Soft Start consultar el punto Signal Description del cap tulo Technical Information El LED azul STATUS situado en el panel trasero de la base del TPS compact indica con la frecuencia de su parpadeo las condiciones operativas del sistema
74. artung 35 Entsorgung 36 TPS compact User Manual 87 901 010 01 C 5 262 Contents 6 262 Mode d emploi 37 Nomes de s curit pour Pompe Turbomol culaires 38 Indications g n rales 39 Stockage 41 Pr paration pour l installation 42 Installation 43 Utilisation 45 Entretien 47 Mise au rebut 48 Manual de istrucciones 49 Indicaciones de Seguridad para Bombas Turbomoleculares 50 Informaci n general 51 Almacenamiento 53 Preparaci n para la instalaci n 54 Instalaci n 55 Uso57 Mantenimiento 59 Eliminacion 60 Manual de Istruc es 61 Indicac es de Seguranca para Bombas Turbomoleculares 62 Informac es gerais 63 Armazenagem 65 TPS compact User Manual 87 901 010 01 C Contents Preparac o para a instalac o 66 Instalac o 67 Utiliza o 69 Manutenc o 71 Eliminac o 72 6 Bedrijfshandleiding 73 Veiligheidsinstructies voor Turbomoleculaire pompen 74 Algemene informatie 75 Opslag 77 Uitpakken 78 Installatie 79 Gebruik 81 Onderhoud 83 Afvalverwerking 84 7 Istruktionsbog 85 Sikkerhedsanvisninger for Molekyl re turbopumper 86 Generel Information 87 Opbevaring 89 Forberedelse for installation 90 Installation 91 Anvendelse 93 Vedligeholdelse 95 TPS compact User Manual 87 901 010 01 C 7 262 Contents 8 262 10 Bortskaffelse 96 Bruksanvisning 97 S kerhetsanvisningar f r Molekyl ra turbopumpar98 Allm n Information 99 F rvaring 101 F rberedelser f r
75. as y con gu par de apriete apretarlas TPS compact User Manual 87 901 010 01 C 55 262 4 Manual de istrucciones Instalaci n Tab 1 BRIDA TIPO DE MORDAZA N PAR DE APRIETE ISO 63 Mordaza doble con rosca M10 4 22 Nm ISO 100 K Mordaza doble con rosca M10 4 22 Nm ISO 160 K Mordaza doble con rosca M10 4 22 Nm La turbobomba con brida de entrada ConFlat ha de fijarse a la camara de vacio mediante los accesorios mecanicos especificos Agilent Para mas detalles v ase el anexo Technical Information EI TPS compact no puede fijarse utilizando su base Para instalar los accesorios opcionales v ase Technical Information 56 262 TPS compact User Manual 87 901 010 01 C Manual de istrucciones 4 c so En este apartado se citan los procedimientos operativos principales Antes de usar el sistema realizar todas las conexiones el ctricas y neumaticas Durante el posible calentamiento de la camara de vacio la temperatura de la brida de entrada no ha de ser superior a 120 C WZMIANKI No hacer funcionar nunca el sistema de bombeo si la brida de entrada no esta conectada a la camara de vacio o no esta cerrada con la brida de cierre AVVIA No tocar la turbobomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas A GAETA Evitar los golpes o bruscos desplazamientos de la turbobomba cuando est en marcha Los rodamientos se podr
76. ation du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en uvre le processus de collecte et mise au rebut TPS compact User Manual 87 901 010 01 C TPS compact User Manual 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares 50 Informaci n general 51 Almacenamiento 53 Preparaci n para la instalaci n 54 Instalaci n 55 Uso 57 Encendido y Uso del TPS compact 58 Parada del TPS compact 59 Parada de Emergenica 59 Mantenimiento 59 Eliminaci n 60 Traducci n de las instrucciones originales Kai Agilent Technologies 49 262 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares Indicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energia cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa especifica d
77. ay Module225 J5 In Out 226 Signal Description 227 How to Connect the Open Collector Input of the Controller 232 How to Connect the Outputs of the Controller 235 J6 Serial 235 Original Instructions RE Agilent Technologies 25 252 17 Technical Information Disposal RS 232 RS 485 Communication Description 236 Communication Format 236 Serial Communication Descriptions 238 Window Protocol 239 Description 239 Communication Format 239 Communication Protocol 239 Examples 242 Window Meanings 245 Service Options 249 Cleaning 249 Exterior 249 Interior 249 Tip Seal Replacement 250 To Remove the Worn Tip Seals 251 To Install the new Seals and O Rings 252 To test the Pumping System 253 Troubleshooting Chart 254 Orderable Parts 255 206 262 TPS compact User Manual 87 901 010 01 C Description of the TPS Compact Technical Information The TPS compact pumping system consists of a pump with an integrated controller and a forepump and is available in sixteen models which differ in the TPM size high vacuum flange and voltage The models are 17 Tab 2 P N TMP Flange Foreline Voltage 969 8217 TV81M KF40 3 6 m3 h Scroll 110V 60Hz 969 8218 TV81M CFF 2 75 3 6 m3 h Scroll 110V 60Hz 969 8219 TV81M IS063 3 6 m3 h Scroll 110V 60Hz 969 8220 TV81M CFF 4 5 3 6 m3 h Scroll 110V 60Hz 969 8221 TV301 IS0100 3 6 m3 h Scroll 110V 60Hz 969 8222 TV301 CFF6 3 6 m3 h Scro
78. ay problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other DIFFUSION PUMPS Heater failure Doesn t reach vacuum Vacuum leak Electrical problem Cooling coil damage Other Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of guotation date Units without a Pur
79. ble mm New PO hard copy must be submitted with this form 3B Exchange Repair upgrade consignment Demo calibration Evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this reguirement presents a problem The eguipment listed above check one E HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed toxic O Corrosive O Reactive O Flammable O Explosive O Biological O Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Fail
80. chase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropigues Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49
81. cherheitshinweise f r Turbomolekularpumpen 26 Allgemeine Informationen 27 Lagerung 29 Vor der Installation 30 Installation 31 Gebrauch 33 Einschaltung und Gebrauch von Modell TPS compact 34 Stoppen von Modell TPS compact 35 Not Aus 35 Wartung 35 Entsorgung 36 bersetzung der Originalanleitungen SEE Agilent Technologies 25 262 2 Gebrauchsanleitung Sicherheitshinweise f r Turbomolekularpumpen Sicherheitshinweise f r Turbomolekularpumpen 26 262 Die in der folgenden Gebrauchsanweisung beschriebenen Turbomolekularpumpen verf gen aufgrund der hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren ber eine gro e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k nnte diese Rotationsenergie freigesetzt werden Um Sch den am Ger t zu vermeiden und um Verletzungen der Bediener vorzubeugen befolgen Sie bitte aufmerksam die in diesem Handbuch beschriebenen Installationshinweise TPS compact User Manual 87 901 010 01 C Gebrauchsanleitung 2 Allgemeine Informationen Dieser Apparat ist f r den fachm nnischen Gebrauch bestimmt Vor dem Gebrauch hat der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau zu lesen Bei auch teilweiser Nichtbeachtung der enthaltenen Anweisungen unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Ein
82. chtigkeit 0 95 nicht kondensierend Bei Vorhandensein von elektromagnetischen Feldern ist das Pumpensystemdie Pumpe entsprechend abzuschirmen Modell TPS compact kann in jeder beliebigen Position installiert werden Modell TPS compact ist stabil zu befestigen indem der Flansch am Eingang der Turbopumpe an einen festen Gegenflansch angeschlossen wird der mit einem Drehmoment von 50 Nm um seine eigene Achse belastbar ist Turbopumpen mit einem ISO Eingangsflansch sind mittels doppelter oder einfacher Klemmschellen an die Vakuumkammer anzuschlie en In der nachstehenden Tabelle sind die Anzahl der Klemmschellen und das Anzugsmoment f r die Schellenarten angegeben TPS compact User Manual 87 901 010 01 C 31 262 2 Gebrauchsanleitung Installation Tab 1 FLANSCH KLEMMSCHELLE ANZ ANZUGSMOMENT ISO 63 Doppelschelle mit Gewinde M10 4 22 Nm ISO 100 K Doppelschelle mit Gewinde M10 4 22 Nm ISO 160 K Doppelschelle mit Gewinde M10 4 22 Nm Turbopumpen mit ConFlat Eingangsflansch sind mit dem speziellen Agilent Befestigungsmaterial an die Vakuum kammer anzuschlie en F r ausf hrliche Informationen siehe im Anhang Technical Information Modell TPS compact kann nicht mittels seines Sockels befestigt werden F r die Installation der Optionsteile siehe im Anhang Technical Information 32 262 TPS compact User Manual 87 901 010 01 C Gebrauch Gebrauchsanleitung 2 In diesem Abschnitt werden die wichtig
83. compact User Manual 87 901 010 01 C Podrecznik Instrukcji 12 Og lne informacje Ta aparatura jest przeznaczona do u ytku zawodowego U ytkownik musi przeczyta bardzo uwa nie niniejsz instrukcj ka d dodatkow informacj dostarczon przez firm Agilent przed u ytkowaniem aparatury Firma Agilent uchyla si od jakiejkolwiek odpowiedzialno ci w przypadku cz ciowego lub ca kowitego braku przestrzegania instrukcji w przypadku niew a ciwego u ytkowania przez nieprzeszkolony personel w przypadku nieupowa nionych interwencji jak i w przypadku braku zastosowania odpowiednich norm krajowych TPS compact jest zintegrowanym systemem sk adaj cym si z pompy turbomolekularnej dla zastosowania wysokich i ultra wysokich pro ni odpowiedniego sterownika i z g wnej pompy System jest w stanie pompowa jakikolwiek typ gazu lub mieszanki gazowej ale nie jest przystosowany do pompowania p yn w lub sta ych cz stek Zjawisko pompowania jest uzyskane poprzez obrotow turbin o wysokiej pr dko ci nap dzan przez elektryczny silnik tr jfazowy o wysokiej wydajno ci System TPS compact jest ca kowicie bez czynnik w zanieczyszczaj cych i dlatego te jest to system odpowiedni do zastosowa gdzie jest wymagana tzw ezysta pr nia Poza tym TPS compact posiada pomocnicze konektory poprzez kt re mo na sterowa wentylator vent pilotowa go zdalnie poprzez g wny komputer pod czony przez port szeregowy
84. compact User Manual 87 901 010 01 C 87 262 7 Istruktionsbog Generel Information I brugsanvisningen anvendes f lgende standardrubrikker LUISE Advarselsmeddelelserne informerer operat ren om at en speciel procedure eller en vis type arbejde skal udf res pr cist efter anvisningerne I modsat fald er der risiko for sv re personskader ile ple Denne advarselsmeddelelse vises f r procedurer der skal f lges n je for ikke at risikere maskinskader Dette g r opm rksom p vigtig information i teksten 88 262 TPS compact User Manual 87 901 010 01 C Istruktionsbog 7 Opbevaring For at sikre maksimal sikkerhed og driftssikkerhed af Agilent pumpe systemerne er det n dvendigt at overholde folgende forskrifter S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 20 C til 70 C relativ fugtighed fra O til 95 ikke kondenserende Kunden skal altid starte de turbomolekyl re pumper ved hj lp af Soft Start funktionen ved modtagelse og start af pumperne for f rste gang De turbomolekyl re pumper m opbevares i 10 m neder fra forsendelsesdatoen dius tele Hvis opbevaringsperioden af en eller anden grund er l ngere er det n dvendigt at sende pumpeanl gget tilbage til fabrikken Yderligere oplysninger f s ved henvendelse til den lokale Agilent repr sentant TPS compact User Manual 87 901 01
85. computer etc and the related simplified circuit of the controller The figure example refers to the programmable set point signal on pins 11 and 9 P1 Y Controller 15 C8 45 081 9 24 V Figure 35 Typical output connection 1 J6 Serial Figure 36 This is a 9 pin D type serial input output connector to control via an RS 232 or RS 485 connection the TPS compact TPS compact User Manual 87 901 010 01 C 235 262 17 Technical Information RS 232 RS 485 Communication Description Tab 6 P N Signal name 5 V OUT TX RS232 RX RS232 Not used GND A RS485 Not used B RS485 O o M GI B D Not used A serial communication kit with a serial cable and the Navigation Software is available optional RS 232 RS 485 Communication Description Both the RS 232 and the RS 485 interfaces are available on the connector J6 The communication protocol is the same see the structure below but only the RS 485 manages the address field Therefore to enable the RS 485 is necessary to select the type of communication as well as the device address by means of the software Communication Format 8 data bit a no parity 1 stop bit baud rate 600 1200 2400 4800 9600 programmable 236 262 TPS compact User Manual 87 901 010 01 C Technical Information 17
86. cording to the data type as per the following table Tab 7 Data Type Field Length Valid Characters Logic L 1 0 lt OFF 1 ON Numeric N 6 07 Y right justified with Alphanumeric A 10 from blank to ASCII lt ETX gt End of transmission 0x03 lt CRC gt XOR of all characters subsequent to lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII character The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same structure of the MESSAGE Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt 240 262 TPS compact User Manual 87 901 010 01 C Technical Information 17 The controller can answers with the following response types Tab 8 Response Type Response Response Description Length Value Logic 1 byte After a read instruction of a logic window E After a read instruction of a numeric Numeric 6 bytes window Aft d instructi f Alphanumeric 10 bytes ee a en nl alphanumeric window ACK 1 byte 0x6 The command execution has been successfully completed NACK 1 byte 0x15 The command execution has been failed Th ifi
87. ct User Manual 87 901 010 01 C 221 262 17 Technical Information Interconnections Interconnections Input Power Connector The following figure shows the input power connector 15 1 Bipolar mi tt switch Line IEC320 GND z connector JE a y Line ES Fuses Figure 18 P3 Vent Ha COMMON Ha ENABLE N C VALVE Ha ENABLE N O VALVE ja 24VDC MAX 100mA Figure 19 This is a dedicated 24 Vdc connector to control the optional vent valve available on request The vent valve can be driven by controller automatically or by serial line 222 262 TPS compact User Manual 87 901 010 01 C Technical Information 17 Vent Valve CLOSED OPEN Add RAMP NORMAL Vent Valve Delay Vent Valve Open Win 126 Time Win 147 e e START STOP COMMAND Figure 20 Vent Valve Diagram in Auto mode Gauge Connector TPS compact is equipped with new generation gauge reading card able to drive read a Agilent EyeSys Mini IMG gauge or a Agilent Full Range Gauge FRG 700 The EyeSys Mini IMG is a vacuum measurement instrument based on the inverted magnetron ion gauge design see orderable parts table The gauge pressure operation range goes from 6 6x10 mbar 5x10 Torr to 6 6x10 mbar 5x10 9 Torr and its operation temperature range goes from 0 C to 50 C 32 122 F The FRG 700
88. d 2 bara nad pritiskom atmosfere TPS compact User Manual 87 901 010 01 C 189 262 15 Priro nik za Navodila Uporaba SVARILO Pri rpanju strupenih vnetljivih ali radioaktivnih plinov sledite zahtevanim navodilom za odstranjevanje vsakega plina rpalnega sistema ne uporabljajte v prisotnosti eksplozivnih plinov Vklop in uporaba TPS compact a Za vklop TPS compact a je dovolj da priklju ite napetost in premaknete zunanje stikalo v polo aj ON Vgrajen upravljalec samodejno prepozna prisotnost napetosti in za ene rpalko Pri prvem vklopu je priporo ljivo uporabiti na in Soft Start ki ga lahko omogo ite na upravljalcu Za naslednje vklope je priporo ljivo da na in Soft Start onemogo ite Za aktivacijo na ina Soft Start glej odstavek Opis signalov v poglavju Technical Information Plava lu ka STATUS ki se nahaja na zadnji plo i TPS compact ka e preko frekvence lastnega utripa operativne pogoje sistema Brez utripanja rpalka je normalno vrti Po asno utripanje perioda pribli no 400 ms Sistem je v stanju ramp breaking stop ali v stanju Waiting for interloc a Hitro utripanje perioda pribli no 200 ms Napaka Za podroben opis nadzorne plo e glej prilogo Technical Information Izklop TPS compact a Za izklop TPS compact a je dovolj da premaknete zunanje stikalo v polo aj OFF Vgrajen kontroler takoj zaustavi rpalni sistem 190 262 TPS c
89. d in the system package before shipping If a system is to be scrapped it must be disposed of in accordance with the specific national standards TPS compact User Manual 87 901 010 01 C 203 262 16 Instructions for Use Disposal Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale 204 262 TPS compact User Manual 87 901 010 01 C TPS compact User Manual EA e st o e Go 17 0 Technical Information e o s s Description of the TPS Compact 207 Turbopump Description 209 Controller Description 209 Control Panel Description 210 Scroll Pump Description 211 Technical Specification 212 TPS Compact Outline 214 Inlet Screen Installation 216 High Vaccum Flange Connection 219 High Vaccum Flange Connection Configurations 221 Interconnections 222 Input Power Connector 222 P3 Vent 222 Gauge Connector 223 Pressure Displ
90. dace Likvidace Vyznam loga WEEE nachazejiciho se na titku Ni e uvedeny symbol odpovida sm rnicim CE pojmenovanym WEEE Tento symbol platny jen pro staty Evropske Unie ur uje e vyrobek ktery je takto ozna en NESMI byt likvidovan spole n s ostatnimi domacimi nebo prumyslovymi odpady ale je nutno ho p edat do pat i n ch provozn ch sb ren kde mus b t t d n a likvidov n odd len od m stsk ho odpadu U ivateli kter m n v robek likvidovat doporu ujeme aby se nakontaktoval p mo s v robcem nebo prodejcem kter se po pat i n m prov en terminu a smluvn ch podm nek postar o kompletn likvidaci uveden ho v robku 168 262 TPS compact User Manual 87 901 010 01 C TPS compact User Manual 14 Navod na Obsluhu Bezpe nostn n vod pre Turbomolekularne v vevy 170 V eobecn inform cie 171 Uchov vanie 173 Pr prava na in tal ciu 174 In tal cia 175 Pou itie 177 Zapnutie a pou itie zariadenia TPS compact 178 Vypnutie TPS compact 178 N dzov zastavenie 179 dr ba 179 Likvid cia 180 Preklad origin lneho n vodu SEE Agilent Technologies 169 262 14 Navod na Obsluhu Bezpe nostne navod pre Turbomolekularne vyvewy Bezpe nostne navod pre Turbomolekularne wyvewy Turbomolekularne vyvevy ak su nasledovne popisovan obsahuju velk mno stvo kinetickej energie vd aka vysokej ot avej rychlosti v kombinacii s konkretnym objemom ich rotorov V
91. das as operac es devem ser efectuadas por pessoal autorizado iADVERTENCIA Antes de executar gualguer operac o no sistema deslig lo da rede de alimentac o introduzir ar na bomba abrindo a v lvula especifica aguardar at a completa paragem do rotor e at gue a temperatura superficial da bomba seja inferior a 50 C Em caso de defeito possivel usufruir do servigo de assistencia Agilent Antes de reenviar ao fabricante um sistema para as reparac es 6 indispensavel preencher e enviar ao escritorio de vendas local a ficha Seguranca e Saude anexa ao presente manual de instruc es A copia da mesma deve ser colocada na embalagem do sistema antes da expedic o Caso uma bomba deva ser eliminada actue em conformidade com as normas nacionais especificas TPS compact User Manual 87 901 010 01 C 71 262 5 Manual de Istruc es Eliminac o Eliminac o 12 262 Significado do logotipo WEEE presente nos rotulos O simbolo abaixo indicado aplicado de acordo com a directiva CE denominada WEEE Este simbolo valido apenas para os paises da Comunidade Europeia indica gue o produto no gual esta aplicado NAO deve ser eliminado juntamente com os residuos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Portanto convidamos o utilizador final a contactar o fornecedor do dispositivo seja este o fabricante ou um revendedor para encaminhar o processo de recolha e e
92. di ingresso ISO deve essere fissata alla camera da vuoto per mezzo di morsetti doppi o morsetti singoli La seguente tabella descrive per ogni tipo di morsetto il numero di morsetti necessari e con quale coppia di serraggio stringerli TPS compact User Manual 87 901 010 01 C 19 262 1 Istruzioni per l uso Installazione Tab 1 COPPIA DI FLANGIA TIPO DI MORSETTO N SERRAGGIO ISO 63 Morsetto doppio con filettatura M10 4 22 Nm ISO 100 K Morsetto doppio con filettatura M10 4 22 Nm ISO 160 K Morsetto doppio con filettatura M10 4 22 Nm La turbopompa con flangia di ingresso ConFlat deve essere fissata alla camera da vuoto per mezzo dell apposita minuteria meccanica Agilent Per ulteriori dettagli vedere l appendice Technical Information Il TPS compact non pu essere fissato tramite la sua base Per l installazione degli accessori opzionali vedere Technical Information 20 262 TPS compact User Manual 87 901 010 01 C Istruzioni per l uso 1 Uso In questo paragrafo sono riportate le principali procedure operative Prima di usare il sistema verificare che tutti i collegamenti elettrici e pneumatici siano stati realizzati correttamente Durante l eventuale riscaldamento della camera da vuoto la temperatura sulla flangia di ingresso non deve essere superiore a 120 C NAM 44 Non far funzionare mai il sistema di pompaggio se la turboflangia di ingresso non collegata alla camera a vuoto o non chiusa co
93. domstandigheden uit te schakelen moet de voedingskabel uit de contactstop worden gehaald of de externe schakelaar in de stand OFF worden gezet Onderhoud De TPS compact is onderhoudsvrij behalve de vervanging van de Tip seal Eventuele werkzaamheden moeten door bevoegd personeel worden uitgevoerd WAARSCHUWING Alvorens werkzaamheden aan het systeem uit te voeren de stekker verwijderen de pomp met behulp van de hiervoor bestemde klep ontluchten en wachten totdat de rotor volledig stil staat en de oppervlaktetemperatuur van de pomp onder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent Alvorens de pomp ter reparatie of ruil naar de fabrikant op te sturen volledig ingevuld naar het plaatselijke verkoopkantoor worden gestuurd Een kopie van deze kaart moet v r versturing bij de pomp in de verpakking worden gevoegd Mocht het systeem gesloopt worden ga dan overeenkomstig de specifieke nationale wetgeving te werk TPS compact User Manual 87 901 010 01 C 83 262 6 Bedrijfshandleiding Afvalverwerking Afvalverwerking 84 262 Betekenis van het logo WEEE op de etiketten Het onderstaande symbool wordt aangebracht in overeenstemming met de EG richtlijn WEEE Dit symbool alleen geldig voor de landen van de Europese Gemeenschap seeft aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industriee
94. dot laitteen k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset tiedot l ytyv t osasta Technical Information TPS compact User Manual 87 901 010 01 C 123 262 10 Ohjek sikirja Yleisi tietoja T m k sikirja k ytt seuraavanlaisia merkint j VAGT KI Varoitus merkit saavat k ytt j n kiinnitt m n huomion erityiseen k ytt tai toimintatapaan jonka v r nlainen suoritus voi johtaa vakaviin henkil vaurioihin Huomio merkit varoittavat toiminnoista joiden laiminly nti voi johtaa laitteen vahingoittumiseen Huomautukset sis lt v t t rke tekstiss k sitelty tietoa 124 262 TPS compact User Manual 87 901 010 01 C Ohjekasikirja 10 Varastointi Noudata seuraavassa annettuja ohjeita Agilent pumppausj rjestelmien parhaan ja luotettavan toiminnan takaamiseksi Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt l mp tila 20 C 70 C suhteellinen kosteus O 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun ja k ytt ess n sit ensimm isen kerran Turbomolekyylisen pumpun varastointiaika on 10 kuukautta toimitusp iv st HUOMIO Jos varastointiaika on jostain syyst pidempi pumppausj rjestelm tulee palauttaa tehtaalle Pyyd lis tietoja paikalliselta Agilent
95. e vy adujuce ist vakuum Zariadenie TPS compact je vybaven pridavn mi konektormi pre kontrolu vypustny ventil ako aj pre dialkov ovl danie z osobn ho po ta a pripojen ho s riovou linkou Nasleduj ce asti obsahuju v etky potrebn inform cie ktor zaru uju bezpe nos pracovn ka v priebehu pr ce so zariaden m Podrobn inform cie sa nachadzaju v dodatku Technical Information TPS compact User Manual 87 901 010 01 C 171 262 14 N vod na Obsluhu V eobecne informacie Navod na pou itie obsahuje tieto Standardne ozna enia 4171114118 Nebezpe ie maj s stredi pozornos pracovn ka na ur it postup alebo innos nespr vne vykonanie ktor ch m e sp sobi v ne zranenie POZOR Pozor ozna uj postupy nedodr anie ktor ch m e sp sobi po kodenie zariadenia Pozn mky upozor uj na d le it inform cie z textu 172 262 TPS compact User Manual 87 901 010 01 C Navod na Obsluhu 14 Uchovavanie Aby sa zaistila maximalna funk nost a spolahlivost erpacich sustav Agilent je potrebn dodr iavat nasledujuce pokyny neprekra ujte nasleduj ce pecifik cie prostredia po as prevozu prena ania a uchovavania vyvev rozsah tepl t 20 C a 70 C rozsah relat vnej vlhkosti O a 95 bez kondenz cie z kazn k mus pri prvom spusten turbomolekul rnej v vevy v dy postupova pomaly a postupne skladovate
96. e entrada n o deve ser superior a 120 C ATENCAO Nunca activar o sistema de bombeamento se o flange de entrada n o estiver ligado c mara de v cuo ou n o estiver fechado com o flange de fecho ATENCAO N o tocar a turbobomba e os seus eventuais acess rios durante as operac es de aquecimento A elevada temperatura pode causar les es as pessoas ATENCAO Evitar colis es ou deslocamentos bruscos da turbobomba quando esta a funcionar Os rolamentos poderiam sofrer danos e poderia verificar se les es s pessoas ou s coisas i gt bl gt CUIDADO Para a saida de ar da bomba utilizar g s inerte sem poeiras particulas ou humidade p ex Azoto A press o de entrada atrav s da porta especifica deve ser inferior a 2 bars al m da press o atmosf rica TPS compact User Manual 87 901 010 01 C 69 262 5 Manual de Istruc es Utiliza o ATENCAO Quando a bomba utilizada para bombear gases t xicos inflam veis ou 70 262 radioactivos seguir os procedimentos adequados t picos para cada g s N o usar o sistema de bombeamento na presenca de gases explosivos Acendimento e Utilizac o do TPS compact Para ligar o TPS compact suficiente conect lo rede de alimentac o e colocar o interruptor exterior na posic o de ON O controller incorporado detecta automaticamente a corrente de alimentac o e acciona a bomba Quando ligar o aparelho pela primeira vez aconselh vel
97. e notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent qui d cline par cons quent toute responsabilit en cas de non respect total ou partiel des instructions donn es d utilisation impropre par un personnel non form d op rations non autoris es ou d emploi contraire aux r glementations nationales sp cifiques Le TPS compact est un syst me int gr constitu d une pompe turbomol culaire con ue pour des applications de vide pouss et ultrapouss et dot e d un contr leur et d une pompe primaire Le syst me est m me de pomper tous les types de gaz et de compos s gazeux mais il n est pas adapt au pompage de liquides ou de particules solides L effet de pompage est obtenu gr ce une turbine tournant vitesse lev e mue par un moteur lectrique triphas haut rendement Le TPS compact est totalement exempt d agents polluants et il est par cons quent indiqu pour toutes les applications exigeant un vide propre Le TPS compact est en outre dot de connecteurs auxiliaires permettant de commander la soupape de ventilation de le piloter distance l aide d un ordinateur host connect par ligne s rielle Les paragraphes suivants fournissent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information TPS compact User Manua
98. e sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energia de rotaci n podria ser liberada TAJA HM Para evitar da os a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instrucciones de instalaci n descritas en el presente manual 50 262 TPS compact User Manual 87 901 010 01 C Manual de istrucciones 4 Informaci n general Este eguipo es para uso profesional El usuario ha de leer atentamente el presente manual de instrucciones y cualguier otra informaci n suplementaria facilitada por Agilent antes de usar el aparato Agilent se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas nacionales especificas El TPS compact es un sistema integrado compuesto por una bomba turbomolecular para aplicaciones de alto y ultra alto vacio integrada por el respectivo controlador y la bomba primaria El sistema puede bombear cualquier tipo de gas o de composici n gaseosa pero no es adecuado para bombear liguidos o particulas s lidas El efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad movida por un motor el ctrico trifasico de alto rendimiento El TPS compact no posee absolutamente ning n agente contaminante por lo gue
99. echnical Information for en detaljert beskrivelse av TPS compacts kontrollpanel 118 262 TPS compact User Manual 87 901 010 01 C Instruksjon Manual 9 Stoppe TPS compact For a stoppe TPS compact er det nok A dreie den utvendige bryteren til OFF Den innebygde styreenheten stanser pumpesystemet umiddelbart Nodstopp For stoppe TPS compact i en ngdsituasjon er det n dvendig trekke stramkabelen ut av stikkontakten eller dreie den utvendige bryteren til OFF Vedlikehold TPS compact er vedlikeholdsfri bortsett fra utskifting av Tip seal Alt arbeid p systemet m kun utfgres av autorisert personell ANNUAIRES For noearbeid gj res p systemet m det frakoples tilf rselen pumpen m luftes ved pne den aktuelle ventilen og deretter vente til rotoren har stanset og pumpens overflatetemperatur er lavere enn 50 C Dersom systemet stanser m du ta kontakt med Agilents For systemet returneres til produsenten for reparasjon m det vedlagte skjemaet Helse og sikkerhet fylles inn og sendes til det lokale salgskontoret En kopi av dette arket ma vedlegges systemet som sendes tilbake Dersom et system skal kasseres ma dette skje i henhold til nasjonale bestemmelser TPS compact User Manual 87 901 010 01 C 119 262 9 Instruksjon Manual Kassering Kassering Betydningen av symbolet pa logo WEEE pa etikettene Symbolet som vises nedenunder er anvendt i henhold til EC direktivet kalt
100. ed postopki pri katerih lahko pride do po kodbe opreme Opombe vsebujejo pomebne informacije iz besedila 184 262 TPS compact User Manual 87 901 010 01 C Priro nik za Navodila 15 Shranjevanje Da bi jam ili najve ji mo ni nivo uporabnosti in zanesljivosti rpalnih sistemov Agilent je potrebno upo tevati slede a pravila Pri po iljanju premikanju in shranjevanju rpalk ne smete prese i naslednjih specifikacij temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti 0 do 95 brez kondenza Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko ivljenjska doba turbomolekularne rpalke je 10 mesecev od datum po iljanja POZOR e zaradi kakr nega koli razloga prese ete ivljenjsko dobo je treba rpalni sistem vrniti v tovarno Za dodatne informacije kontaktirajte lokalnega predstavnika prodaje in storitev za Agilent Vacuum TPS compact User Manual 87 901 010 01 C 185 262 15 Priro nik za Navodila Priprava za monta o Priprava za monta o TPS compact je dobavljen v posebni za itni embala i e je embala a po kodovana kontaktirajte lokalno prodajno pisarno Pri odpiranju sistema pazite da vam ne pade iz rok oz ga ne stresajte Embala o zavrzite v skladu s pravili Material je mo no v celoti reciklirati in je v skladu z ECC direktivo 85 399 POZOR Komponent ki bodo izpostavljene vakuumu se ne dotikajte z golimi rokami saj
101. ed to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or conseguential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any eguivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in F
102. ed window in th d Unknown Window 1 byte 0x32 N AL ha a nn is not a valid window The data type specified in the command Logic Numeric or Data Type E 1 byt 0x33 nee gt P gt Alphanumeric is not accorded with the specified Window The value expressed during a write Out of Range 1 byte 0x34 command is out of range value of the specified window The specified window is Read Only or Win Disabled 1 byte 0x35 temporarily disabled for example you can t write the Soft Start when the Pump is running TPS compact User Manual 87 901 010 01 C 241 262 17 Technical Information Window Protocol Examples Command START Source PC Destination Controller 02 80 30 30 30 31 31 03 142 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination Controller 02 80 30 30 30 31 30 03 42 32 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC 242 262 TPS compact User Manual 87 901 010 01 C Technical Information 17 Command SOFT START ON Source PC Destination Controller 02 80 31 30 30 31 31 103 42 32 STX ADDR WINDOW WR ON ETX CRC
103. edustajalta TPS compact User Manual 87 901 010 01 C 125 262 10 Ohjek sikirja Valmistelut asennusta varten Valmistelut asennusta varten TPS compact toimitetaan erityisess suojapakkauksessa mikali siin on mahdollisesti kuljetuksen aikana tapahtuneita vaurioita ottakaa yhteys paikalliseen myyntitoimistoon Pakkauksen purkamisen aikana tulee varoa erityisesti TPS compact n putoamista tai siihen kohdistuvia iskuja tai t rin it Pakkausta ei tule j tt ymp rist n Pakkausmateriaali voidaan kierr tt kokonaisuudessaan ja se vastaa EY direktiivi 85 399 ymp rist n suojelusta die Jotta kaasun vuoto ongelmilta v ltytt isiin ei tyhji lle altistuviin osiin tule koskea paljain k sin K ytt k aina k sineit tai muuta sopivaa suojausta Kuva 1 TPS compact ei vahingoitu ollessaan kosketuksissa ilman kanssa auki On kuitenkin suositeltavaa pit se suljettuna kunnes se asennetaan j rjestelm n Siten v ltet n laitteen mahdollinen p lysaastuminen 126 262 TPS compact User Manual 87 901 010 01 C Ohjekasikirja 10 Asennus HUOMIO Irrottakaa teippi ja poistakaa suojakansi vasta kun turbopumppu kytket n j rjestelm n Pumppausj rjestelm ei tule asentaa ja tai k ytt ymp rist ss miss se joutuu kosketuksiin s tekij iden sateen j n tai lumen p lyjen tai aggressiivisten kaasujen kanssa tai joissa on olemassa r j hdys tai tulipalovaar
104. ej wynosi 10 miesi cy od daty wysy ki Je eli z jakiegokolwiek powodu czas magazynowania jest d u szy nale y odes a zesp pompuj cy do fabryki W celu jakiejkolwiek informacji prosimy skontaktowa si z miejscowym przedstawicielem firmy Agilent TPS compact User Manual 87 901 010 01 C 149 262 12 Podrecznik Instrukcji Przygotowanie do instalacji Przygotowanie do instalacji System TPS compact jest dostarczany w specjanym ochronnym opakowaniu w przypadku lad w uszkodze do kt rych mog oby doj podczas transportu nale y skontaktowa si z miejscowym biurem sprzeda y Podczas operacji rozpakowywania nale y zwr ci szczeg ln uwag aby nie spowodowa upadku systemu TPS compact ani nie poddawa go uderzeniom lub wibracjom Nie porzuca opakowania w rodowisku Materia ten nadaje si ca kowicie do recyklingu zgodny jest z dyrektyw UE 855 399 dotycz cej ochrony rodowiska UWAGA Aby unikna problem w odgazowywania nalezy nie dotyka gotymi rekoma cz ci przeznaczonych do pr ni Nale y zawsze stosowa odpowiednie r kawice ochronne lub odpowiednie zabezpieczenie Posta 61 PRZYPIS System TPS compact nie mo e by uszkodzony poprzez wystawienie go na dzia anie atmosfery Mimo to zaleca sie aby pompa do momentu jej instalacji na systemie pozosta a zamkni ta w celu unikni cia zanieczyszczenia jej py em 150 262 TPS compact User Manual 87
105. em tomar muito cuidado para n o deixar cair o TPS compact e para n o submet lo a choques ou vibrac es N o depositar a embalagem no meio ambiente O material completamente recicl vel e em conformidade com a norma CEE 85 399 para a protec o do meio ambiente CUIDADO Para evitar problemas de perdas de gas ndo tocar com as mdos os componentes destinados a exposic o do vacuo Utilizar sempre luvas ou outra protecc o adeguada Figura 1 NOTA TPS compact n o pode ser danificado permanecendo simplesmente exposto atmosfera Aconselha se no entanto manter a bomba fechada at o momento da instala o no sistema para evitar eventuais acumulac es de po 66 262 TPS compact User Manual 87 901 010 01 C Manual de Istruc es 5 Instalac o AT UNI Remover a etiqueta autocolante e retirar a tampa de protec o somente no momento de ligar a turbobomba ao sistema N o instalar e ou usar o sistema de bombeamento em ambientes expostos a agentes atmosfericos chuva gelo neve poeiras gases agressivos em ambientes com possibilidade de explos o ou com elevado risco de inc ndio Durante o funcionamento necess rio que sejam respeitadas as seguintes condi es ambientais press o m xima Z bar al m da press o atmosf rica temperatura de 5 C a 35 C humidade relativa O 95 n o condensante Na presen a de campos electromagn ticos o sistema de bombeamento deve ser
106. er potreben navor za pritrjevanje TPS compact User Manual 87 901 010 01 C 187 262 15 Priro nik za Navodila Monta a Tab 1 PRIROBNICA NAPRAVA ZA PRITRJEVANJE N NAVOR ISO 63 M10 dr ala 4 22 Nm ISO 100K M10 dr ala 4 22 Nm ISO 160K M10 dr ala 4 22 Nm Turbo rpaklo z dovodno ConFlat prirobnico je treba fiksirati na vakuumsko le i e s pomo jo primerne Agilent strojne opreme Za dodatne informacije glejte prilogo Technical Information TPS compact a ni mo pritrditi s svojo osnovo Za namestitev opcijski dodatkov glej Technical Information 188 262 TPS compact User Manual 87 901 010 01 C Priro nik za Navodila 15 Uporaba Ta odstavek opisuje osnovne postopke za uporabo Pred uporabo sistema pove ite vse elektri ne in pnevmatske povezave Pri segrevanju vakuumskega le i a temperatura dovodne prirobnice ne sme prese i 120 C SVARILO rpalnega sistema ne uporabljajte e dovodna prirobnica ni priklju ena na vakuumsko le i e Tekom segrevanja se turbo rpalke ali njenih delov ne dotikajte Visoka temperatura lahko povzro i opekline SVARILO Prepre iti udarce ali premike turbo rpalke ko le ta deluje Le aji se namre lahko po kodujejo kar lahko povzro i kodo loveku in predmetom Mi POZOR Za prezra evanje rpalke uporabljajte ist plin brez prahu del kov ali vla nosti kot du ik Pritisk na oddu niku mora biti manj i o
107. ez py u lub innych cz stek i bez wilgoci np Azot Ci nienie wej ciowe poprzez odpowiedni wlot musi by ni sze od 2 bar w ponad ci nienie atmosferyczne TPS compact User Manual 87 901 010 01 C 153 262 12 Podrecznik Instrukcji U ytkowanie ZAGROZENIE Kiedy pompa jest zastosowana do pompowania gaz w toksycznych tatwo 154 262 palnych lub radioaktywnych nale y wykona odpowiednie procedury typowe dla ka dego z gaz w Nie stosowa zespotu pompujacego w obecno ci gazow wybuchowych W czenie i obs uga systemu TPS compact Aby w czy TPS compact wystarczy dostarczy napi cie zasilania i ustawi wy cznik zewn trzny w pozycji On Wbudowany sterownik tzw kontroler automatycznie rozpozna obecno zasilania i uruchomi pomp Przy pierwszym uruchomieniu nale y zastosowa tryb Soft Start uruchamiaj c go na kontrolerze dla dalszych uruchomie zaleca si wy czenie trybu Soft Start Dla procedury uruchomienia trybu Soft Start nale y zapozna si z paragrafem Opis Sygna w w rozdziale Technical Information Niebieska LAMPKA STATUS umieszczona na panelu tylnym podstawy urz dzenia TPS compact cz stotliwo ci swego migania okre la operatywne warunki systemu za wiecona na sta e pompa znajduje si w stanie normalnych obrot w miga powoli okres 400 ms system w stanie zbocza lub hamowania lub w stanie Stop lub w stanie
108. f pumping speed vs inlet pressure 214 262 TPS compact User Manual 87 901 010 01 C Technical Information 17 TPS compact equipped with TV81M 70 60 50 2 3 g 40 2 n o E 30 2 E EJ 2 20 10 0 0 0001 0 001 0 01 0 1 Inlet Pressure mbar Figure 7 Graph of pumping speed vs inlet pressure TPS compact TV301 TV81M 14lt Pump Down 1 E 03 1 E 02 1 E 01 T 1 E 00 2 E 1 E 01 2 7 1 E 02 n 1 E 03 1 E 04 1 E 05 1 E 06 Time sec TV301 TV81M Figure 8 Graph of pressure vs time with a pump down volume of 1 litre TPS compact User Manual 87 901 010 01 C 215 262 17 Technical Information TPS Compact Outline Inlet Screen Installation Figure 9 Figure 10 The inlet screens mod 969 9300 969 9309 969 9302 and 969 9303 prevent the blades of the pump from being damaged by debris greater than 0 7 mm diameter The inlet screen however does reduce the pumping speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure 216 262 TPS compact User Manual 87 901 010 01 C Technical Information 17 Figure 11 The screen can be mounted on each pump The screen can be removed as shown in the following figure Figure 12 TPS compact User Manual 87 901 010 01 C 217 262 17 Technical Information TPS Compact Outline The following figure shows the overal
109. ferimento al paragrafo Signal Description nel capitolo Technical Information Il LED blu STATUS posto sul pannello posteriore della base del TPS compact indica con la frequenza del suo lampeggio le condizioni operative del sistema acceso fisso la pompa in rotazione normale lampeggiante lentamente periodo di circa 400 ms il sistema in stato di rampa o di frenata o di Stop o di Waiting for interlock lampeggiante velocemente periodo di circa 200 ms condizione di errore Per una descrizione dettagliata del pannello di controllo del TPS compact vedere l appendice Technical Information TPS compact User Manual 87 901 010 01 C Istruzioni per l uso 1 Arresto del TPS compact Per arrestare il TPS compact sufficiente mettere in posizione OFF l interruttore esterno Il controller incorporato arresta immediatamente il sistema di pompaggio Arresto di Emergenza Per arrestare in condizioni di emergenza il TPS compact occorre staccare il cavo di alimentazione dalla presa di rete o spostare l interruttore esterno in posizione OFF Manutenzione Il TPS compact non richiede alcuna manutenzione ad eccezione della sostituzione del Tip seal Gualsiasi intervento deve essere eseguito da personale autorizzato VIL L Prima di effettuare qualsiasi intervento sul sistema scollegarlo dall alimentazione mandare all aria la pompa aprendo l apposita valvola attendere fino al completo arres
110. g slowly flashing period of about 400 ms the system is in ramp or in braking or in Stop or in Waiting for interlock status fast flashing period of about 200 ms error condition See the appendix Technical Information for a detailed description of the TPS compact control panel TPS Compact SDwitching off To switch off the TPS compact it is sufficient to move the external switch to OFF position The integrated controller immediately stops the pumping system TPS compact User Manual 87 901 010 01 C Instructions for Use 16 Emergency Stop To immediately stop the TPS compact in an emergency condition it is necessary to remove the supply cable from the mains plug or moving the external switch to OFF position Maintenance The TPS compact does not require any maintenance except Tip seal replacement Any work performed on the system must be carried out by authorized personnel WARNING Before carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center Before returning the system to the constructor for repairs the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserte
111. gend r kapcsolni a t pfesz lts get majd a k ls kapcsol t BE ll sba kapcsolni Az integr lt vez rl automatikusan felismeri a t pfesz lts g jelenl t t s elind tja a szivatty t Els ind t skor aj nlatos a Soft Start m dot haszn lni ennek a vez rl n val enged lyez s vel A k vetkez ind t sokhoz aj nlatos letiltani a Soft Start m dot A Soft Start m d aktiv l si elj r s hoz l sd a Jelleiras bekezd s a Technical Information fejezetben A k k STATUS kijelz a villog s s r s g vel jelzi a rendszer m k d si llapot t a nem villog sn l a szivatty rendesen forog lassan villog kb 400 ms peri dus a rendszer emelked ben f kez sben ll s vagy kapcsolatra v r llapotban van gyorsan villog kb 200 ms peri dus hibafelt tel A TPS compact vez rl panel r szletes le r s rt l sd Technical Information f ggel k A TPS compact kikapcsol sa A TPS compact kikapcsol s hoz elegend a k ls kapcsol t KI ll sba kapcsolni A be p tett vez rl azonnal le ll tja a szivatty z rendszert 142 262 TPS compact User Manual 87 901 010 01 C Felhaszn l i K zik nyv 11 Veszleallitas A TPS compact v szhelyzetben val azonnali leallitasahoz el kell tavolitani a tapkabelt a h l zati dugaszb l vagy a k ls kapcsol t KI allasba kell kapcsolni Karbantartas VESZ LY A TPS compact nem ig nyel karbanta
112. gget er anbragt i n rheden af elektromagnetiske felter skal den afsk rmes TPS compact kan installeres i en hvilken som helst position Fastgor TPS compact i en stabil position ved at slutte turbopumpens indl bsflange til en fast kontraflange der t ler et moment pa 50 Nm omkring akselen Turbopumpen med ISO indlgbsflange skal tilsluttes vakuumkammeret ved hj lp af dobbelte eller enkelte klemmer Den nedenst ende tabel viser det n dvendige antal af klemmer samt drejningsmoment afh ngig klemmetypen TPS compact User Manual 87 901 010 01 C 91 262 7 Istruktionsbog Installation Tab 1 FLANGE KLEMMETYPE ANT DREJNINGS MOMENT ISO 63 Dobbelt klemme med M10 gevind 4 22 Nm ISO 100K Dobbelt klemme med M10 gevind 4 22 Nm ISO 160K Dobbelt klemme med M10 gevind 4 22 Nm Turbopumpen med ConFlat indlobsflange skal tilsluttes pa vakuumkammeret ved hj lp af Agilent monteringsudstyret I bilaget Technical Information findes yderligere detaljer TPS compact kan ikke fastggres i fundamentet 92 262 Der henvises til bilaget Technical Information for oplysninger vedrerende installation af ekstraudstyret TPS compact User Manual 87 901 010 01 C Istruktionsbog 7 Anvendelse Dette afsnit beskriver de vigtigste driftsprocedurer Inden anvendelse af systemet bor samtlige elektriske og pneumatiske tilslutninger udf res I forbindelse med opvarmning af vakuumkammeret ma indl bsflangens temperatur ikke over
113. griffen und MiBachtung der nationalen einschlagigen Normen ubernimmt die Firma Agilent keinerlei Haftung Modell TPS compact ist ein integriertes System das aus einer Turbomolekularpumpe f r Hoch und H chstvakuum anwendungen integriert mit einem entsprechenden Controller und der Prim rpumpe besteht Das System eignet sich f r die F rderung aller Arten von Gasen oder gashaltigen Gemischen nicht jedoch f r die F rderung von Fl ssigstoffen oder Festpartikeln Die Pumpwirkung wird durch eine hochtourige Turbine erreicht die von einem Hochleistungsdrehstrommotor angetrieben wird Modell TPS compact enth lt keinerlei umweltsch dliche Substanzen und eignet sich deshalb auch f r Anwendungen die ein sauberes Vakuum erfordern Modell TPS compact verf gt des weiteren ber Zusatzanschl sse ber die das Entl ftungsventil gesteuert oder die Vorrichtung von einem Host Computer ber eine serielle Leitung gesteuert werden kann In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten TPS compact User Manual 87 901 010 01 C 27 262 2 Gebrauchsanleitung Allgemeine Informationen In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben I WARNUNG Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf einen Vorgang
114. h it out TPS compact User Manual 87 901 010 01 C 249 262 17 Technical Information Service Options Tip Seal Replacement The parts and tools reguired to replace Tip Seals are listed below a Tip Seal Replacement Kit P N IDP3TS 4 mm Allen wrench a Razor blade or side cutting pliers Compressed air optional Unlock the Scroll pump site Figure 40 Tip Seal replacement Figure A k Lift the Kl system Unscrew the scroll pump flange screws Figure 41 Tip Seal replacement Figure B 250 262 TPS compact User Manual 87 901 010 01 C Technical Information 17 Figure 42 Tip Seal replacement Figure C To Remove the Worn Tip Seals Disconnect the TPS compact from electrical power Unlock the scroll pump support by unscrewing the screws A see the Tip Seal replacement Figure A 1 a f ob Lift the TPS compact in order to access the Scroll pump site you ll hear a click noise as soon as the upper part of TPS compact is locked Remove 4 M5 socket head bolts B Remove the outboard housing axially off the frame C Remove and discard the worn tip seals D and the main O ring If compressed air is available blow any remaining seal debris off the seroll parts If seal debris is attached to the sides use a razor or Exacto knife to scrape the debris off TPS compact User Manual 87 901 010 01 C 251 262 17 Technical Information Service
115. hdem er die Verkaufsbedingungen gepr ft hat 36 262 TPS compact User Manual 87 901 010 01 C TPS compact User Manual 3 Mode d emploi Nomes de s curit pour Pompe Turbomoleculaires 38 Indications g n rales 39 Stockage 41 Preparation pour l installation 42 Installation 43 Utilisation 45 Mise en marche et utilisation du TPS compact46 Arr t du TPS compact 47 Arr t d urgence 47 Entretien 47 Mise au rebut 48 Traduction de la mode d emploi originale kai Agilent Technologies 37 262 3 Mode d emploi Nomes de s curit pour Pompe Turbomol culaires Nomes de s curit pour Pompe Turbomoleculaires Les pompes Turbomol culaires d crites dans le Manuel d Instructions suivant ont une nergie cin tique lev e due la grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation pourrait tre lib r e Ad Ed AN Pour viter tout d g t aux appareillages et emp cher toute blessure aux op rateurs il faut suivre attentivement les instructions d installation d crites dans ce manuel 38 262 TPS compact User Manual 87 901 010 01 C Mode d emploi 3 Indications g n rales Cet appareillage a t con u en vue d une utilisation professionnelle Avant toute utilisation de l appareil il est conseill l utilisateur de lire attentivement cett
116. installationen 102 Installation 103 Anv nding 105 Underh ll 107 Bortskaffning 108 Instruksjon Manual 109 Sikkerhetsanvisninger for Turbomolekyl re pumper 110 Generell informasjon111 Lagring 113 Klargjore til installasjon 114 Installasjon 115 Bruk 117 Vedlikehold 119 Kassering 120 Ohjek sikirja 121 Turbomolekyylipumppujen Turvaohjeet 122 Yleisi tietoja 123 TPS compact User Manual 87 901 010 01 C Contents Varastointi 125 Valmistelut asennusta varten126 Asennus 127 K ytt 129 Huolto 131 H vitt minen 132 11 Felhasznal i Kezik nyv 133 Biztons gi tmutat Turb molekul ris szivatty khoz 134 ltal nos inform ci 135 T rol s 137 El k szit s telepit sre 138 Telepit s 139 Haszn lat 141 Karbantartas 143 Megsemmisites 144 12 Podrecznik Instrukcji 145 Wskaz wki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych 146 Og lne informacje 147 Magazynowanie 149 Przygotowanie do instalacji 150 Instalacja 151 Uzytkowanie 153 TPS compact User Manual 87 901 010 01 C 9 262 Contents 10 262 13 14 15 Konserwacja 155 Przetworstwo odpadow 156 Navod k Pou iti 157 Bezpe nostni navod pro Turbomolekularni vyv wy 158 V eobecne informace 159 Uskladneni 161 Piiprava k instalaci 162 Instalace 163 Pou iti 165 dr ba 167 Likvidace 168 Navod na Obsluhu 169 Bezpe nostn n vod pre Turbomolekularne vyvevy 170 V eobecne informacie 171 Uch
117. isen ja k ytt jien vahingoittumisen v ltt miseksi TPS compact User Manual 87 901 010 01 C Ohjekasikirja 10 Yleisi tietoja T m laite on tarkoitettu ammattimaiseen k ytt n Ennen laitteen k ytt nottoa tulee k ytt j n lukea huolellisesti ohjekirja ja muut Agilentin toimittamat lis tiedot Agilent ei ota vastuuta seurauksista jotka johtuvat laitteen k ytt ohjeiden t ydellisest tai osittaisesta laiminlyonnista ammattitaidottoman henkil n virheellisest laitteen k yt st valtuuttamattomista toimenpiteist tai kansallisen lains d nn n vastaisesta k yt st TPS compact on kokonaisj rjestelm joka muodostuu valvojalla ja p pumpulla varustetusta turbomolekyylipumpusta korkean ja ultrakorkean tyhji n k ytt varten J rjestelm kykenee pumppaamaan kaiken tyyppisi kaasuja tai kaasukoostumuksia Se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeudella py riv n turbiinin avulla jota k ytt korkeatehoinen kolmivaiheinen s hk moottori TPS compact j rjestelm ss ei ole lainkaan likaavia aineita joten se soveltuu my s puhdasta tyhji t vaativiin k ytt tarpeisiin TPS compact j rjestelm n kuuluu lis ksi apuliittimi joiden avulla on mahdollista ohjata tuuletusventtiili ja k ytt j rjestelm kauko ohjauksella sarjakytketyn is nt tietokoneen avulla Seuraavissa kappaleissa on kaikki tarpeelliset tie
118. jny zacisk z gwintem M10 4 22 Nm ISO 160 K Podw jny zacisk z gwintem M10 4 22 Nm Turbopompa z kolnierzem wejsciowym ConFlat musi by zamocowana do komory pro niowej poprzez odpowiednie drobne uk ady mechaniczne firmy Agilent W celu dodatkowych informacji nale y zapozna si z dodatkiem Technical Information System TPS compact nie mo e by mocowany poprzez w asn podstaw Aby zainstalowa opcjonalne akcesoria nale y zapozna si z Technical Information 152 262 TPS compact User Manual 87 901 010 01 C Podrecznik Instrukcji 12 U ytkowanie W tym paragrafie zosta y przedstawione g wne procedury operacyjne Przed zastosowaniem systemu nale y wykona wszystkie po czenia elektryczne i pneumatyczne Podczas ewentualnego nagrzania komory pr niowej temperatura na ko nierzu nie mo e przekroczy 120 C ZAGROZENIE Absolutnie nie wolno uruchamia zespotu pompujacego w przypadku gdy kotnierz wej ciowy nie jest podtaczony do komory lub nie jest zamkniety z kotnierzem zamkniecia ZAGROZENIE Nie dotyka turbopompy i jej ewentualnych akcesori w podczas operacji nagrzewania Wysoka temperatura mo e spowodowa uszkodzenia cia a na osobach Podczas funkcjonowania turbopompy nale y unika uderze i jej przemieszczania o yska mog ulec uszkodzeniu i mo e doj do uszkodzenia Os b lub rzeczy Dla wlotu do powietrza pompy zastosowa oboj tny gaz b
119. k rnyezetben zemeltet s k zben a k vetkez k rnyezeti felt teleket kell biztos tani maxim lis nyom s 2 bar a l gk ri nyom s felett h m rs klet 5 C t l 35 C ig relativ p ratartalom 0 95 nem kondenz l Magneses mez k jelenl t ben a szivatty z rendszert v deni kell ferromagneses pajzs segitsegevel A TPS compact ot barmely helyzetben lehet telepiteni R gzitse a TPS compact ot stabil helyzetben a turboszivattyu bemeneti karimajat egy rogzitett ellenkarimara csatlakoztatva amely k pes ellenallni 50 Nm tengely k r li nyomat knak Az ISO bemeneti karimas turb szivatty t kapcsokkal vagy peckekkel kell r gziteni a vakuumkamr hoz A k vetkez tablazat mindegyik r gzit eszk zh z megmutatja a kapcsok vagy peckek sz ks ges sz m t s a hozz tartoz r gzit nyomat kot TPS compact User Manual 87 901 010 01 C 139 262 11 Felhaszn l i K zik nyv Telepites Tab 1 KARIMA R GZIT ESZK Z N R GZIT NYOMATEK ISO 63 M10 kapcsok 4 22 Nm ISO 100 K M10 kapcsok 4 22 Nm ISO 160 K M10 kapcsok 4 22 Nm A ConFlat bemeneti karimas turboszivattyut a megfelel Agilent hardverrel kell r gziteni a vakuumkamrahoz R szletes leir sert lasd Technical Information ATPS compact nem r gzithet az alapjan kereszt l Opcionalis tartoz kok telepit s hez valassza a Technical Information 140 262 TPS compact User Manual 87 901 010 01 C Felhaszn l i
120. k vakuovej komore pomocou vhodn ho hardware zna ky Agilent Podrobn inform cie sa nachadzaju v dodatku Technical Information TPS compact nemo no upevnit pomocou jej zakladnej dosky 176 262 O in tal cia doplnkovej v bavy pozri priru ku Technical Information TPS compact User Manual 87 901 010 01 C Navod na Obsluhu 14 Pou itie T to ast popisuje z kladn sposoby pou itia zariadenia Skor ne za nete syst m pou va zapojte v etky elektrick a pneumatick pripojenia Teplota vstupnej priruby po as zahrievania v kuovej komory nesmie prekro i 120 C 1743 5 AM Nikdy nepou vajte erpac syst m ak vstupn pr ruba nie je pripojen k v kuovej komore alebo nie je zablendovan Mi ZADANIA V priebehu zahrievania sa nikdy nedot kajte turbov vevy ani iadneho prislu enstva Vysok teploty mo u sp sobi pop leniny 4 74 dl Nepremiest ujte turbov vevu ak je v innosti a chr te ju pred n razmi aby nedo lo k po kodeniu lo sk o my mohlo vies k razom alebo k majetkov m kod m gt bi gt POZOR Pre vyplach vyvevy pou ivajte inertny plyn zbaveny prachu astic a vlhkosti napr dusik Tlak na ventila nom vstupe musi byt ni i ne 2 bary pretlakov TPS compact User Manual 87 901 010 01 C 177 262 14 N vod na Obsluhu Pou itie Nd JAAMAN Ak erpac syst m pou vate na vy erp vanie toxick ch hor av ch
121. ksomhet til en spesiell fremgangsm te eller praksis som hvis den ikke f lges kan medf re alvorlige skader isla Denne advarselen vises foran fremgangsm ter som dersom de ikke f lges kan fore til at utstyret skades Merknadene inneholder viktig informasjon som er hentet fra teksten 112 262 TPS compact User Manual 87 901 010 01 C Instruksjon Manual 9 Lagring For A garantere maksimalt niva for funksjonalitet og driftssikkerhet til pumpesystemet Agilent ma en felge forskriftene nedenfor Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra O til 95 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpene nar de mottas og startes opp f rste gang Lagringstiden for en turbomolekyl r pumpe er 10 m neder fra sendedato TUE Hvis lagringstiden av en hvilken som helst grunn er lenger m pumpesystemet returneres til fabrikken Vennligst kontakt den lokale Agilent forhandleren for informasjon TPS compact User Manual 87 901 010 01 C 113 262 9 Instruksjon Manual Klargjore til installasjon Klargjore til installasjon FORSIKTIG TPS compact leveres i en spesiell beskyttelsesemballasje Viser denne tegn p skader som kan ha oppstatt under transporten ma du ta kontakt med det lokale salgskontoret Nar TPS compact pakkes ut ma du se til at det ikke slippes ned eller
122. l 87 901 010 01 C 39 262 3 Mode d emploi Indications g n rales Cette notice utilise les signes conventionnels suivants ALES AIME Les messages d avertissement attirent l attention de l op rateur sur une ATTENTION proc dure ou une man uvre sp ciale qui effectu e de fa on impropre risque de provoquer de graves l sions Les messages d attention apparaissent avant certaines proc dures dont le non respect pourrait endommager s rieusement l appareillage Les notes contiennent des renseignements importants extrapol s du texte 40 262 TPS compact User Manual 87 901 010 01 C Mode d emploi 3 Stockage Pour garantir les performances et la fiabilit maximales des syst mes de pompage Agilent il est indispensable de respecter les instructions suivantes Le transport la manutention et le stockage des pompes doivent imp rativement avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C humidit relative de 0 95 non condensante Ala premi re utilisation les pompes turbomol culaires doivent toujours tre mises en marche en mode soft Start Le temps de stockage d une pompe turbomol culaire est de 10 mois compter de la date d exp dition anida En cas de d passement du temps de stockage le syst me de pompage doit tre retourn e en usine Pour tout renseignement contacter le repr sentant Agilent de zone TPS compact User Manual 8
123. l ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rh llanden respekteras Temperaturomr de 20 C till 70 C Relativ fuktighet O till 95 utan kondens Kunden ska alltid mjukstarta de turbomolekyl ra pumparna n r de mottas och s tts i drift f r f rsta g ngen De turbomolekyl ra pumparna kan lagras i 10 m nader fran leveransdatumet UND Om lagringstiden av n gon anledning r l ngre m ste pumpsystemet skickas tillbaka till fabriken Var god och kontakta den lokala Agilent terf rs ljaren f r ytterligare information TPS compact User Manual 87 901 010 01 C 101 262 8 Bruksanvisning F rberedelser f r installationen F rberedelser f r installationen TPS compact levereras i ett s rskilt skyddande emballage Kontakta det lokala f rs ljningskontoret om emballaget visar tecken p skador som kan ha uppst tt under transporten Se till att TPS compact inte tappas eller uts tts f r st tar vid uppackningen Kasta inte packmaterialet i soporna Materialet r tervinningsbart till 100 och uppfyller EU direktiv 85 399 om milj skydd OBSERVER Komponenter som ska uts ttas f r vakuum f r inte hanteras med bara h nder p g a kontamineringsrisken Anv nd alltid handskar eller liknande skydd Figur 1 23 04 00 Normal p verkan fr n atmosf ren kan inte skada TPS compact Trots det r det s krast att h lla pumpen nerpackad til
124. l afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht contact op te nemen met de leverancier van het apparaat zij het de fabrikant of een wederverkoper om het proces van gescheiden inzameling en verwerking in gang te zetten na de van toepassing zijnde termen en voorwaarden van het verkoopcontract te hebben gecontroleerd TPS compact User Manual 87 901 010 01 C TPS compact User Manual 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper Generel Information 87 Opbevaring 89 Forberedelse for installation 90 Installation 91 Anvendelse 93 Start og anvendelse af TPS compact 94 Stop af TPS compact 94 Nadstop 95 Vedligeholdelse 95 Bortskaffelse 96 Overs ttelse af originalinstruktionerne che Agilent Technologies 86 85 262 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper Sikkerhedsanvisninger for Molekyl re turbopumper De molekyl re turbopumper der er beskrevet i n rv rende brugsanvisning har en stor kinetisk energi der skyldes den hgje omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan omdrejningsenergien spredes OKB For at undg materielle skader samt at operat rerne kommer til skade er det strengt n dvendigt n je at overholde installeringsvejledningen i denne brugsanvisning
125. l flange dimensions with the protection screen fitted on pump with ISO flange and pump with CFF flange dimensions are in inches mm ISO 63 CFF 2 75 CFF 4 5 2 76 70 00 0 35 9 00 o 0 1 2 50 I ZL S 4 Y KF 40 2 09 53 00 0 24 6 00 0 67 17 00 CFF 8 ISO 160 S a CFF 6 ISO 100 0 47 12 00 DIMENSIONS inches mm Figure 13 218 262 TPS compact User Manual 87 901 010 01 C Technical Information 17 High Vaccum Flange Connection To connect the Turbo pump to the ISO inlet flange remove the outer ring and position the centering ring as shown in the figure REMOVE OUTER RING O RING PROTECTIVE EDGE Figure 14 Then fix the two flanges with the clamps or claws as shown in the figure CLAMPING SCREM O RING m Sy i Be o 7 Pa REN Figure 15 For ConFlat flange connections we recommend using Agilent hardware TPS compact User Manual 87 901 010 01 C 219 262 17 Technical Infor
126. ler radioaktiva gaser b r man f lja de s rskilda anvisningarna f r varje enskild gas Anv nd ej pumpsystemet i n rheten av explosiva gaser Start och anv ndning av TPS compact Starta TPS compact genom att sl till str mmen och placera den externa brytaren i l ge ON Den inbyggda styrenheten k nner automatiskt av str mtillf rseln och s tter ig ng pumpen Vid den f rsta starten rekommenderas det att aktivera funktionss ttet Soft Start p kontrollenheten F r efterf ljande starter rekommenderas det att deaktivera funktionss ttet Soft Start F r att sedan aktivera detta l ge Soft Start h nvisar vi till paragrafen Signal description i kapitlet Technical Information Den bl lysdioden STATUS p underdelens bakpanel p TPS compact anger genom frekvensen av dess blinkningar hur systemet fungerar fast sken pumpen roterar normalt a l ngsamt blinkande ungef r var 400 ms systemet r i l ge f r acceleration bromsning Stop eller Waiting for interlock hastigt blinkande ungef r 200 ms feltillst nd Se bilagan Technical Information f r en detaljerad beskrivning av kontrollpanelen f r TPS compact Att st nga av TPS compact St ng av TPS compact genom att placera den externa brytaren i l ge OFF Den inbyggda styrenheten avbryter omedelbart pumpsystemets funktion 106 262 TPS compact User Manual 87 901 010 01 C Bruksanvisning 8 N
127. lhaszn l nak a berendez s m k dtet se el tt el kell olvasnia ezt a g pk nyvet s a Agilent ltal biztos tott b rmely inform ci t A Agilent nem vonhato felel ss gre olyan esem nyek rt amelyek az ezen utas t soknak val ak r r szbeni meg nem felel s szakk pzetlen szem lyek ltali nem megfelel haszn lat a berendez sbe val jogosulatlan beavatkoz s vagy a konkr t nemzeti szabv nyokkal ellent tes b rmely m velet miatt t rt ntek A TPS compact egy integr lt rendszer turb molekul ris szivatty val nagy s rendkiv l nagy v kuumalkalmaz sokhoz a megfelel vez rl j vel A rendszer b rmely tipus gazt vagy g zkever ket k pes szivattyuzni Nem alkalmas folyad kok vagy szil rd r szecsk k szivatty z s ra A szivattyuzasi m veletet egy nagyteljes tm ny 3 f zis elektromos motorral hajtott nagysebess g turbina biztos tja A TPS compact szennyez anyagokt l mentes s ez rt alkalmas tiszta v kuumot ig nyl alkalmaz sokra A TPS compact fel van szerelve seg dcsatlakoz kkal a ventill tor szelep nek vez rl s hez amit t voli helyr l kell vez relni soros vonalon csatlakoztatott gazdag pen kereszt l A k vetkez bekezd sek a berendez st haszn l kezel biztonsaganak garant l s hoz sz ks ges sszes inform ci t tartalmazz k R szletes inform ci t tal l a Technical Information f ggel kben TPS compact User Manual 87 901 010 01 C 135 262 1
128. liminac o ap s a oportuna verificac o dos termos e condic es do contrato de venda TPS compact User Manual 87 901 010 01 C TPS compact User Manual 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen 74 Algemene informatie 75 Opslag 77 Uitpakken 78 Installatie 79 Gebruik 81 Inschakeling en gebruik van de TPS compact 82 Afzetten van de TPS compact 83 Noodstop 83 Onderhoud 83 Afvalverwerking 84 Vertaling van de originele instructies kai Agilent Technologies 73 262 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen Veiligheidsinstructies voor Turbomoleculaire pompen De turbomoleculaire pompen die in deze handleiding worden besproken hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de rotor breekt kan de rotatie energie vrijkomen LVA UNIES Om schade aan de apparatuur en letsel bij de bedieners te voorkomen moeten de installatie instructies in deze handleiding nauwgezet worden opgevolgd 74 262 TPS compact User Manual 87 901 010 01 C Bedrijfshandleiding 6 Algemene informatie Deze apparatuur is bestemd voor beroepsmatig gebruik De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door Agilent verstrekte informatie door te lezen alvorens he
129. ll 110V 60Hz 969 8223 TV301 150160 3 6 m3 h Scroll 110V 60Hz 969 8224 TV301 CFF8 3 6 m3 h Scroll 110V 60Hz 969 8225 TV81M KF40 3 0m3 h Scroll 220V 50 60Hz 969 8226 TV81M CFF 2 75 3 0m3 h Scroll 220V 50 60Hz 969 8227 TV81M IS063 3 0m3 h Scroll 220V 50 60Hz 969 8228 TV81M CFF 4 5 3 0m3 h Scroll 220V 50 60Hz 969 8229 TV301 150100 3 0m3 h Scroll 220V 50 60Hz 969 8230 TV301 CFF6 3 0m3 h Scroll 220V 50 60Hz 969 8231 TV301 150160 3 0m3 h Scroll 220V 50 60Hz 969 8232 TV301 CFF8 3 0m3 h Scroll 220V 50 60Hz TPS compact User Manual 87 901 010 01 C 207 262 17 Technical Information Description of the TPS Compact 208 262 TV81M or TV301 Integrate air Turbo pump Scroll pump cooling Integrate electronic pump controller System venting Main switch amp Main socket Pressure display indicator amp RS232 O interface Figure 2 TPS compact User Manual 87 901 010 01 C Technical Information 17 Turbopump Description The turbopump consists of a high frequency motor driving a turbine fitted with many bladed stages and Macrotorr stages The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The turbine is made of high strength light aluminium alloy and is machined from a single block of aluminium The turbine blades have five different angles from 44 to 12 while the Macrotorr stages are in the form of dises The turbine rotor is supported by permanently
130. ller enkle klemmer Folgende tabell angir det n dvendige antall klemmer og det relevante strammemomentet for de enkelte typer klemmer TPS compact User Manual 87 901 010 01 C 115 262 9 Instruksjon Manual Installasjon Tab 1 FLENS TYPE KLEMME ANT STRAMME MOMENT ISO 63 Dobbel klemme gjenge M10 4 22 Nm ISO 100 K Dobbel klemme gjenge M10 4 22 Nm ISO 160 K Dobbel klemme gjenge M10 4 22 Nm Turbopumpen med ConFlat inngangsflens skal festes til vakuumkammeret ved hjelp av de spesielle lasedelene fra Agilent For detaljer henvises det til Technical Information TPS compact ma ikke festes gjennom fundamentet 116 262 For installasjon av tilleggsutstyr vises det til Technical Information TPS compact User Manual 87 901 010 01 C Instruksjon Manual 9 Alle instruksjoner for korrekt bruk finnes i dette avsnittet Les ngye gjennom denne manualen for systemet tas i bruk Mens oppvarmingen av kammeret p g r m temperaturen ved inngangsflensen ikke overskride 120 C OKA Ikke start pumpesystemet hvis inngangsflensen ikke er koplet til vakuumkammeret eller ikke er lukket med lukkeflensen AVES SE Ikke beror turbopumpen eller noe av tilleggsutstyret under oppvarmingen De hoye temperaturene kan fore til brannskader AVASIN Unng st t eller bra bevegelser av turbopumpen n r den er i bruk Lagrene kan kunne skades og det kan kunne oppst skade p personer eller gjenstander ousad
131. llo di funzionalit ed affidabilit dei sistemi di pompaggio Agilent devono essere osservate le seguenti prescrizioni durante il trasporto lo spostamento e l immagazzinamento delle pompe non devono essere superate le seguenti condizioni ambientali temperatura da 20 C a 70 C umidit relativa da 0 a 95 non condensante il cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta il tempo di immagazzinamento di una pompa turbomolecolare amp di 10 mesi dalla data di spedizione Se per qualsiasi ragione il tempo di immagazzinamento superiore occorre rinviare il sistema di pompaggio in fabbrica Per ogni informazione si prega di contattare il locale rappresentante della Agilent TPS compact User Manual 87 901 010 01 C 17 262 1 Istruzioni per l uso Preparazione per l installazione Preparazione per l installazione Il TPS compact viene fornito in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere il TPS compact e a non sottoporlo ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente hardball Onde evitare problemi di degasament
132. ls den har installerats i systemet f r att f rhindra att det kommer in damm eller annat i den 102 262 TPS compact User Manual 87 901 010 01 C Bruksanvisning 8 Installation 1121933373515 Ta bort tejpen och dra ut skyddsproppen f rst n r turbopumpen ska anslutas till systemet Installera och eller anv nd inte pumpsystemet i milj er som uts tts f r p verkan fr n atmosf ren regn sn is damm aggressiva gaser och inte heller i explosiv eller brandfarlig milj F ljande krav p omgivningsf rh llanden g ller vid drift maximitryck 2 bar ver atmosf riskt tryck temperatur fr n 5 C till 35 C relativ luftfuktighet O 95 utan kondens I n rvaro av magnetf lt ska pumpsystemet skyddas med en s rskild sk rm TPS compact kan installeras i valfri position F st pumpen i ett stabilt l ge genom att ansluta pumpens intagsfl ns till en fast fl ns som m ste t la ett vridmoment p 50 Nm kring sin axel Turbopumpen med ISO intagsfl ns ska f stas vid vakuumkammaren med hj lp av dubbla eller enkla klamrar Den f ljande tabellen beskriver olika typer av klamrar n dv ndigt antal klamrar och atdragningsmoment TPS compact User Manual 87 901 010 01 C 103 262 8 Bruksanvisning Installation Tab 1 FL NS TYP AV KLAMMER ANT ATDRAGNINGSMOMENT ISO 63 Dubbel klammer g nga M10 4 22 Nm ISO 100 K Dubbel klammer g nga M10 4 22 Nm ISO 160 K Dubbel klammer g nga M1
133. lubricated high precision ceramic ball bearings installed on the forevacuum side of the pump The static blades of the stator are fabricated in stainless steel These are supported and accurately positioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding rotor discs These are fabricated in aluminium alloy During normal operation the motor functions with a power feed at 54 Vac three phase at 1330 Hz TV81M or 963 Hz TV301 To reduce losses during start up to a minimum the frequency increases according to a ramp with a higher initial voltage frequency ratio A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating The pump is balanced after assembly with a residual vibration amplitude less than 0 01 um Controller Description The integrated controller is a solid state frequency converter which is driven by a single chip micro computer and is composed of a PCB which includes a power supply with a 3 phase AC output analog and input output section microprocessor and digital section The controller recognizes the mains presence and converts the single phase AC mains supply into a 3 phase medium frequency output which is reguired to power the pump The controller can be operated by a remote host computer via the serial connection TPS compact User Manual 87 901 010 01 C 209 262 17 Tech
134. ma non adatto per il pompaggio di liguidi o di particelle solide L effetto pompante ottenuto tramite una turbina rotante ad elevata velocita mossa da un motore elettrico trifase ad alto rendimento Il TPS compact totalmente privo di agenti contaminanti ed guindi adatto per applicazioni che richiedono un vuoto pulito Il TPS compact ha inoltre dei connettori ausiliari tramite i guali possibile comandare la valvola di vent pilotarlo da remoto tramite un computer host collegato tramite linea seriale Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical Information TPS compact User Manual 87 901 010 01 C 15 262 1 Istruzioni per l uso Informazioni Generali Questo manuale utilizza le seguenti convenzioni NINFA messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali Viral messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura Le note contengono informazioni importanti estrapolate dal testo 16 262 TPS compact User Manual 87 901 010 01 C Istruzioni per l uso 1 Immagazzinamento ATTENZIONE Per garantire il massimo live
135. mation TPS Compact Outline To facilitate assembly and dismantling apply Fel pro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Attach the units and tighten each one in turn Repeat the sequential tightening until the flange faces meet CAUTION Exercise care when tightening nuts and bolts to avoid creating dents in the envelope as this may cause the pump rotor to lock 220 262 TPS compact User Manual 87 901 010 01 C Technical Information 17 High Vaccum Flange Connection Configurations T WITH ISO CLAMP JE e 5 CFF 4 1 2 BASEPLATE SI bo deo x WITH TAPPED HOLES N SE 3 p J n CFF 4 1 2 Y iso 63 MH nr 4 Figure 16 A i TI un NT Di W 1 LI BE UH UIL cer amp od p 7 NET N N Figure 17 TPS compa
136. mensagens de cuidado s o visualizadas antes de procedimentos que se n o efectuados correctamente podem causar danos aparelhagem As notas cont m informac es importantes destacadas do texto 64 262 TPS compact User Manual 87 901 010 01 C Manual de Istruc es 5 Armazenagem Para garantir o nivel M ximo de funcionalidade e fiabilidade dos sistemas de bombagem Agilent devem ser observadas as seguintes prescri es durante o transporte o deslocamento e a armazenagem das bombas as condic es ambientais devem ser as seguintes temperatura de 20 C a 70 C umidade relativa de 0 a 95 n o condensante ao accionar as bombas turbomoleculares pela primeira vez o cliente deve activ las sempre em modalidade Soft Start 0 tempo m ximo de armazenagem de uma bomba turbomolecular de 10 meses a contar da data da expedicao CUIDADO Se por uma raz o gualguer o periodo de armazenagem for superior sera necessario enviar o sistema de bombeamento para o fabricante Para mais informac es contactar o representante local da Agilent TPS compact User Manual 87 901 010 01 C 65 262 5 Manual de Istruc es Preparac o para a instalac o Preparac o para a instalac o O TPS compact fornecido numa embalagem protectora especial se esta apresentar sinais de danos que poderiam ter ocorrido durante o transporte entrar em contacto com o escrit rio de vendas local Durante a remoc o da embalag
137. mperatures may cause burns WARNING Avoid impacts or harsh movements of the pump when in operation The bearings may become damaged and damages to the persons or the things could be taken place CAUTION Use inert gas free from dust particles or humidity like Nitrogen for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure TPS compact User Manual 87 901 010 01 C 201 262 16 Instructions for Use Use WARNING When employing the pump for pumping toxic flammable or radioactive 202 262 gases please follow the reguired procedures for each gas disposal Do not use the pumping system in presence of explosive gases Switching on and Use of TPS Compact To switch on the TPS compact it is sufficient to supply the mains and then move the external switch to ON position The integrated controller automatically recognizes the mains presence and start up the pump At the first start up it is recommended to use the Soft Start mode by enabling it on the controller For the following start ups it is recommended to disable the Soft Start mode For the Soft Start mode activation procedure see the paragraph Signal Description in the chapter Technical Information The blue LED STATUS located on the TPS compact base rear panel indicates with its flashing frequency the system operating conditions with no flashing the pump is normally rotatin
138. n supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the eguipment or any action contrary to that provided for by specific national standards The TPS compact is an integrated system with a turbo molecular pump for high and ultra high vacuum applications associated with its relevant controller and its primary pump The system can pump any type of gas or gas compound It is not suitable for pumping liguids or solid particles The pumping action is obtained through a high speed turbine driven by a high performance 3 phase electric motor The TPS compact is free of contaminating agents and therefore is suitable for applications reguiring a clean vacuum The TPS compact is eguipped with auxiliary connectors to control the vent valve to be controlled from a remote site by means of an host computer connected through a serial line The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the eguipment Detailed information is supplied in the appendix Technical Information TPS compact User Manual 87 901 010 01 C 195 262 16 Instructions for Use General Information This manual uses the following standard protocol WARNING The warning messages are for attracting the attention of the o
139. n la flangia di chiusura VIA LIAN Non toccare la turbopompa e i suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura pud causare lesioni alle persone WAYS ALI ZN Evitare urti o spostamenti della turbopompa quando in funzione cuscinetti potrebbero danneggiarsi e potrebbero verificarsi danni alle persone o alle cose mai vala 1370 Perla mandata all aria della pompa utilizzare gas inerte esente da polvere particelle o umidit es Azoto La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar oltre la pressione atmosferica TPS compact User Manual 87 901 010 01 C 21 262 1 Istruzioni per l uso Uso NUTIA ZN Quando la pompa viene utilizzata per il pompaggio di gas tossici infiammabili 22 262 o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare il sistema di pompaggio in presenza di gas esplosivi Accensione ed Uso del TPS compact Per accendere il TPS compact sufficiente fornire la tensione di alimentazione e mettere in posizione ON l interruttore esterno Il controller incorporato riconosce automaticamente la presenza dell alimentazione ed avvia la pompa Alla prima accensione bene adottare la modalit Soft Start attivandola sul controller per gli avvii successivi si consiglia di disabilitare la modalit Soft Start Per la procedura di attivazione della modalit Soft Start far ri
140. nical Information Description of the TPS Compact Control Panel Description The following picture shows the TPS compact control panel the associated table lists the avail able commands For a detailed description see the following paragraphs P3 VENT GAUGE 00000000 00000 0000000 0000 O J5 IN OUT JE SERIAL STATUS Figure 3 Tab 3 Control name Description J5 IN OUT Input output connector to remote control the TPS compact J6 SERIAL Serial input output connector to control the TPS compact via an RS 232 or RS 485 connection STATUS Blue LED to show the system operating condition P3 VENT Connector to control the optional vent valve GAUGE Connector to control external EyeSys Gauge ON OFF switch not It is located on the rear side of the system It is the power shown in the picture supply switch 210 262 TPS compact User Manual 87 901 010 01 C Technical Information 17 Scroll Pump Description The TPS compact internal scroll creates vacuum using a simple dual scroll mechanism in which one of the nested scrolls orbits about the other creating moving zones of captured gas Gas enters the scroll set at the perimeter and is displaced and compressed toward the center hub where it is exhausted Gas enters scroll set Gas is displaced and 4 compressed toward Gas exhausted center hub at center hub Figure 4 TPS compact User Manual
141. ning 108 vers ttning av originalinstruktionerna RE Agilent Technologies 97 262 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar S kerhetsanvisningar f r Molekyl ra turbopumpar De molekyl ra turbopumparna som beskrivs i bruksanvisningen har en h g kinetisk energi beroende p den h ga rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsenergin frig rs VARNING F r att undvika skador p utrustningen och f rhindra att skador orsakas p operat rer m ste installationsinstruktionerna som beskrivs i den h r bruksanvisningen f ljas noga 98 262 TPS compact User Manual 87 901 010 01 C Bruksanvisning 8 Allm n Information Utrustningen r avsedd f r yrkesm ssig anv ndning Anv ndaren b r l sa denna bruksanvisning samt vrig dokumentation fr n Agilent f re anv ndning av utrustningen Agilent tar inget ansvar f r skador som helt eller delvis beror p sidos ttande av instruktionerna ol mplig anv ndning av person utan tillr cklig kunskap obeh rigt bruk av utrustningen eller hantering som strider mot g llande lokala f reskrifter Systemet TPS compact best r av en turbomolekyl r pump f r h ga och mycket h ga vakuumtill mpningar en styrenhet och en huvudpump Systemet kan anv ndas f r pumpning av alla typer
142. o non toccare con le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata Figura 1 NOTA Il TPS compact non pu essere danneggiato rimanendo semplicemente esposto all atmosfera Si consiglia comunque di mantenere chiusa la pompa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere 18 262 TPS compact User Manual 87 901 010 01 C Istruzioni per l uso 1 Installazione Fait Staccare l adesivo e togliere il tappo di protezione solo al momento del collegamento della turbopompa al sistema Non installare e o utilizzare il sistema di pompaggio in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali pressione massima 2 bar oltre la pressione atmosferica temperatura da 5 C a 35 C umidit relativa 0 95 non condensante In presenza di campi elettromagnetici il sistema di pompaggio deve essere protetto tramite opportuni schermi Il TPS compact pu essere installato in qualsiasi posizione Fissare il TPS compact in posizione stabile collegando la flangia di ingresso della turbopompa ad una controflangia fissa capace di resistere ad una coppia di 50 Nm attorno al proprio asse La turbopompa con flangia
143. o TPS compact Replumb with shorter and or larger diameter tubing Hammering Scroll pump overheated Check ventilation to TPS compact Check ambient noise temperature Debris in Scroll pump Flush the TPS compact Disassemble pump and inspect Internal Scroll Pump runs intermittently Motor thermal protector is cycling open and closed Allow the scroll motor to cool Identify the cause of the overload 254 262 The internal Scroll Pump is equipped with an auto reset thermal motor protector This protector automatically shuts down the pump when it detects an overload automatically restarts the pump when the motor has cooled to within temperature range condition and an acceptable TPS compact User Manual 87 901 010 01 C Orderable Parts Technical Information 17 Tab 11 Orderable parts part 1 TPS compact TV 81 M TV am TV 81 M TV 81 M KF40 CFF 2 75 ISO 63 CFF 4 5 120 V 969 8217 969 8218 969 8219 969 8220 220 V 969 8225 969 8226 969 8227 969 8228 Accessories DIY EyesSys Gauge Kit 969 9185 969 9196 969 9186 969 9187 DIY Full Range Gauge Kit 969 9190 969 9199 969 9192 969 9193 Wheels accessory kit 969 8233 969 8233 969 8233 969 8233 US Power cord 5 m 969 8452 969 8452 969 8452 969 8452 EU Power cord 5 m 969 8450 969 8450 969 8450 969 8450 UK Power cord 5 m 969 8451 969 8451 969 8451 969 8451 US Power cord 2 m 969 9397 969 9397 969
144. ommenderar d rf r att slutanv ndaren tar kontakt med leverant ren av anordningen oberoende om det handlar om moderf retaget eller terf rs ljaren f r att kunna starta uppsamlings och bortskaffningsprocessen detta efter l mplig kontroll av kontraktsenliga tidsgr nser och f rs ljningsvillkor 108 262 TPS compact User Manual 87 901 010 01 C TPS compact User Manual 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper 110 Generell informasjon 111 Lagring 113 Klargjore til installasjon 114 Installasjon 115 Bruk 117 Starte og bruke TPS compact 118 Stoppe TPS compact 119 Nodstopp 119 Vedlikehold 119 Kassering 120 Oversetting av den opprinnelige samsvarserkl ringen Agilent Technologies 109 262 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper Sikkerhetsanvisninger for Turbomolekyl re pumper Turbomolekyl rpumpene som er beskrevet i den folgende Bruksanvisningen har et h yt kinetisk energiniv som skyldes den hgye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn av en kontakt mellom rotor og stator eller brudd p rotoren kan roteringsenergien bli frigitt NIE For a unng skader pa utstyret og forebygge operat rskader m installasjonsanvisningene beskrevet i denne manualen folges noye 110 262 TPS compact User Manual 87 901 010 01 C Instruksjon Manual 9 Generell inf
145. ompact User Manual 87 901 010 01 C Priro nik za Navodila 15 Zaustavitev v sili Za takoj enj izklop TPS compact a v sili je potrebno odstraniti dovod napetosti ali premakniti zunanje stikalo v polo aj OFF Vzdr evanje TPS compact ne potrebuje vzdr evanja razen zamenjave Tip seal a Kakr no koli delo na sistemu mora opraviti avtorizirano osebje SVARILO Pred za etkom dela na sistemu ga izklju ite iz napetosti pre istite rpalko tako da odprete primerno odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru napake kontaktirajte va lokalni Agilent servisni center Preden vrnete sistem v popravilo morate izpolniti in dodati Health and Safety obrazec ki je prilo en tem navodilom ter ga poslati v lokalno prodajno pisarno Pred po iljanjem morate kopijo obrazca vstaviti v embala o sistema Sistem je treba uni iti v skladu z dolo enimi nacionalnimi standardi TPS compact User Manual 87 901 010 01 C 191 262 15 Priro nik za Navodila Odlaganje opadkov Odlaganje opadkov Pomen znamke WEEE na etiketah Spodaj navedeni simbol je v skladu z direktivo ES znano pod imenom WEEE Ta simbol ki velja samo v dr avah Evropske Skupnosti pomeni da izdelek NE SMETE ODSTRANITI skupaj z ostalimi komunalnimi ali pa industrijskimi odpadki temve morate poskrbeti za njihovo primerno lo evanje Zato pozivamo uporabnike da se ali pri
146. orizadas ou pelo uso contrario as normas nacionais especificas O TPS compact um sistema integrado constituido por uma bomba turbomolecular para aplicag es de alto e ultra alto vacuo eguipado com os respectivos controller e bomba primaria O sistema capaz de bombear gualguer tipo de gas ou de composto gasoso mas n o apropriado para bombear liquidos ou particulas s lidas O efeito da bomba obtido atrav s de uma turbina rotativa de alta velocidade movida por um motor el ctrico trifasico de alto rendimento O TPS compact totalmente isento de agentes contaminadores e portanto adequado para aplica es que reguerem um v cuo limpo Al m disso o TPS compact tem conectores auxiliares atrav s dos quais possivel alimentar uma valvula de vent accion lo por um controlo remoto atrav s de um computer host conectado por meio de linha serial Nos seguintes paragrafos est o descritas todas as informac es necess rias para garantir a seguranca do operador durante o uso da aparelhagem Informa es detalhadas s o fornecidas no ap ndice Technical Information TPS compact User Manual 87 901 010 01 C 63 262 5 Manual de Istruc es Informac es gerais Este manual utiliza as seguintes convenc es ATENCAO As mensagens de atencao chamam a atenc o do operador para um procedimento ou uma pr tica especifica que se n o efectuada correctamente pode provocar graves les es pessoais CUIDADO As
147. ormasjon Dette utstyret er beregnet til bruk av profesjonelle brukere Brukeren bgr lese denne brukerveiledningen og all annen informasjon fra Agilent for utstyret tas i bruk Agilent kan ikke holdes ansvarlig for hendelser som skjer pa grunn av manglende oppf lging av disse instruksjonene selv delvis feilaktig bruk av utrent personell ikke autoriserte endringer av utstyret eller handlinger som p noen m te er i strid med nasjonale bestemmelser TPS compact systemet best r av en turbo molekul r pumpe for bruk i hey eller ultrah ye vakuumanlegg en styreenhet og en hovedpumpe Systemet kan pumpe nesten alle typer gass eller gassforening Det er ikke beregnet for pumpe v sker eller faste partikler Pumpingen oppn s med en h yhastighetsturbin koplet til en trefaset elektrisk motor TPS compact har ingen forurensende stoffer og er derfor egnet for anlegg med behov for rene vakuum TPS compact har dessuten hjelpekontakter som gir muligheter for styring av utluftingsventilen og fjernstyring av systemet med en serietilkoplet vertsmaskin De f lgende avsnitt inneholder all informasjon som er n dvendig for sikre brukeren n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Technical Information TPS compact User Manual 87 901 010 01 C 111 262 9 Instruksjon Manual Generell informasjon Denne manualen bruker folgende standardprotokoll LOVER Disse meldingene skal tiltrekke seg brukerens oppmer
148. ovavanie 173 Priprava na in tal ciu 174 In tal cia 175 Pou itie 177 dr ba 179 Likvid cia 180 Priro nik za Navodila 181 Varnostna navodila za Turbomolekularne rpalke 182 TPS compact User Manual 87 901 010 01 C Contents Splo ne informacije 183 Shranjevanje 185 Priprava za monta o 186 Monta a 187 Uporaba 189 Vzdr evanje 191 Odlaganje opadkov 192 16 Instructions for Use 193 Safety Guideline for Turbomolecular Pumps 194 General Information 195 Storage 197 Preparation for Installation 198 Installation 199 Use 201 Maintenance 203 Disposal 204 17 Technical Information 205 Description of the TPS Compact 207 Technical Specification 212 TPS Compact Outline 214 Interconnections 222 RS 232 RS 485 Communication Description 236 TPS compact User Manual 87 901 010 01 C 11 262 Contents Window Protocol 239 Service Options 249 Orderable Parts 255 12 262 TPS compact User Manual 87 901 010 01 C TPS compact User Manual Istruzioni per I uso Indicazioni di Sicurezza per Pompe Turbomolecolari 14 Informazioni Generali 15 Immagazzinamento 17 Preparazione per l installazione 18 Installazione 19 Uso 21 Accensione ed Uso del TPS compact 22 Arresto del TPS compact 23 Arresto di Emergenza 23 Manutenzione 23 Smaltimento 24 Traduzione delle istruzioni originali SEE Agilent Technologies 13 262 1 Istruzioni per l uso Indicazioni di Sicurezza per Pompe Turbomolecolari Indicazioni
149. pa ckung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Modell TPS compact ist vorsichtig auszupacken wobei es vor dem Herunterfallen und vor Stof en und Vibrationen zu sch tzen ist Das Verpackungsmaterial ist vorschriftsgem zu entsorgen Es ist vollst ndig recyclebar und entspricht der Richtlinie 85 399 EWG f r Umweltschutz Um Entgasungen zu vermeiden diirfen die Teile die mit dem Vakuum in Ber hrung kommen nicht mit den blo en H nden angefa t werden Es sind stets Schutzhandschuhe oder andere Schutzmittel zu verwenden Abbildung 1 Modell TPS compact kann durch die Umgebung an sich keine Sch den erleiden Es sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden 30 262 TPS compact User Manual 87 901 010 01 C Gebrauchsanleitung 2 Installation ETS IN Das Klebeband abziehen und den Schutzdeckel erst bei Anschlu der Turbopumpe an das System abnehmen Das Pumpensystem darf nicht in Umgebungen die ungesch tzt vor Wetter Regen Frost Schnee Staub und aggressiven Gasen sind sowie auch nicht in explosionsfahigen oder erh ht brandgef hrdeten Umgebungen installiert und oder benutzt werden Beim Betrieb mussen folgende Umgebungsbedingungen eingehalten werden Maximaler Druck 2 bar ber dem atmosph rischen Druck Temperatur von 5 C bis 35 C a Relative Luftfeu
150. perator to a particular procedure or practice which if not followed correctly could lead to serious injury et The caution messages are displayed before procedures which if not followed could cause damage to the equipment The notes contain important information taken from the text 196 262 TPS compact User Manual 87 901 010 01 C Instructions for Use 16 Storage In order to guarantee the maximum level of performance and reliability of Agilent pumping systems the following guidelines must be followed a when shipping moving and storing pumps the following environmental specifications should not be exceeded temperature range 20 C to 70 C relative humidity range 0 to 95 non condensing a the turbomolecular pumps must be always soft started when received and operated for the first time by the customer a the shelf life of a turbomolecular pump is 10 months from the shipping date FIDE If for any reason the shelf life time is exceeded the pumping system has to be returned to the factory Please contact the local Agilent Vacuum Sales and Service representative for informations TPS compact User Manual 87 901 010 01 C 197 262 16 Instructions for Use Preparation for Installation Preparation for Installation CAUTION The TPS compact is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales
151. portional to frequency or power 1 power default 1 2 Pump temperature 3 Pressure 117 R W N Low Speed frequency Hz 1100 to Maximum rotational frequency win 120 default 1100 120 R W N Rotational frequency setting Hz 1100 to 1350 default 1350 122 R W L Set vent valve on off 0 lt Closed 1 lt Open default lt 1 125 R W L Set the vent valve operation Automatic 0 see note 1 On command 1 see note 2 126 R W N Vent valve opening delay expressed in 0 2 0 to 65535 corresponding sec to 0 to 13107 sec default 15 147 R W N Vent open time 0 infinite See vent connector paragraph 1 bit 0 2 sec 1 to 65535 155 R N Power limit applied watt Read the maximum allowable power 157 R W N Gas load type O N2 Select the gas load to the pump 1 Ar 246 262 TPS compact User Manual 87 901 010 01 C Technical Information 17 N Read Data Description Admitted Values Write Type 161 R W N Pressure Reading Connection Factor 0 to 10 Table A1 Appendix EyeSys Manual 10 1 N2 162 R W A R1 Set Point Pressure Valve Valid if Win 101 4 Format X X E XX Where X 0 to 9 sz tor 163 R W N Pressure unit of measure 0 mBar 1 Pa 2 Torr 167 R W A Stop speed reading 0 disable Activates deactivates the pump speed 1 enable reading after Stop command 200 R N Pump current in mA de 201 R N Pump voltage in Vdc 216 R N Controller Air Temperature
152. r s beind t sa c lj b l az ad sv teli szerz d s hat rid inek s felt teleinek alapos ttanulm nyoz sa ut n fel kell vennie a kapcsolatot a berendez s sz ll t j val legyen ez a gy rt vagy egy viszontelad TPS compact User Manual 87 901 010 01 C TPS compact User Manual Podrecznik Instrukcji Wskaz wki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych 146 Og lne informacje 147 Magazynowanie 149 Przygotowanie do instalacji 150 Instalacja 151 Uzytkowanie 153 W czenie i obs uga systemu TPS compact 154 Zatrzymanie TPS compact 155 Zatrzymanie Alarmowe 155 Konserwacja 155 Przetworstwo odpadow 156 T umaczenie instrukcji oryginalnej SEE Agilent Technologies 145 262 12 Podrecznik Instrukcji Wskazowki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych Wskazowki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych Pompy Turbomolekularne opisane w niniejszej Instrukcji Obstugi posiadaj wysok energie kinetyczn spowodowan bardzo wysok pr dko ci obrot w razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojanem lub z powodu p kni cia wirnika energia obrotowa mo e by zwolniona ZAGROZENIE Aby unikna uszkodzenia aparatury i zapobiec uszkodzeniom ciata operator w nalezy obowiazkowo przestrzega zalecen dotyczacych instalacji opisanych w niniejszej instrukcji obstugi 146 262 TPS
153. r returning products Dear Customer Please follow these instructions whenever one of our products needs to be retumed 1 2 3 4 5 6 7 Complete the attached Reguest for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as reguested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will guote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e If ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Sealthe product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on
154. rt Stop in remote mode the window Start 1 is a read only Stop 0 001 R W L Low Speed Activation in remote mode No 0 the window is a read only Yes 1 default 0 008 R W L Remote or Serial configuration Remote 1 Serial 0 default 1 100 R W L Soft Start write only in Stop condition YES lt 1 NO 0 101 R W N R1 Set Point type 0 Frequency 1 Power 2 Time 3 Normal 4 Pressure default 0 102 R W R1 Set Point valve expressed in Hz W or s default lt 867 103 R W Set Point delay time between the pump 0 to 999999 start and the set point check seconds default 0 104 R W L Set Point signal activation type the signal 0 high level active can be high level active or low level 1 low level active active default 0 105 R W N Set point hysteresis in of value 0 to 100 default 2 106 R W L Water cooling write only in stop 0 NO 1 lt YES 107 R W L Active Stop write only in stop 0 NO 1 YES default 0 TPS compact User Manual 87 901 010 01 C 245 262 17 Technical Information Window Protocol N Read Data Description Admitted Values Write Type 108 R W N Baud rate 600 0 1200 1 2400 2 4800 3 9600 4 default 4 109 W L Pump life cycle time cycle number reset To reset write 1 110 R W L Interlock type default lt 1 Impulse 0 Continuous 1 111 R W L Analog output type output voltage signal 0 frequency pro
155. rtast kiv ve a Tip seal cser j t A rendszeren v gzett barmely munkat jogosult szem lyzetnek kell elv geznie A rendszeren barmely munka v gz se el tt valassza le azt a tapfesziilts gr l szell ztesse a szivatty t a megfelel szelep kinyitasaval varjon amig a rotor forgasa le ll s amig a szivattyu fel let nek h merseklete 50 C ala esik Meghib sod s eset n forduljon a Agilent szervizk zponthoz Miel tt javitasra visszak ldi a rendszert a gyartohoz az ehhez a g pk nyvh z csatolt Eg szs g s biztonsag lapot ki kell t lteni s el kell k ldeni a helyi kereskedelmi irodahoz A lap egy m solat t szallitas el tt be kell illeszteni a rendszercsomagba Ha a rendszert le kell selejtezni azt rtalmatlan tani kell a konkret nemzeti szabvanyoknak megfelel en TPS compact User Manual 87 901 010 01 C 143 262 11 Felhaszn l i K zik nyv Megsemmis t s Megsemmis t s 144 262 A c mk n jelenl v WEEE logo jelent se Az al bb l that szimb lum az EK WEEE elnevez s ir nyelv vel sszhangban ker l alkalmaz sra Ez a szimb lum mely csak az Eur pai K z ss g orsz gaiban rv nyes azt jelzi hogy a term k melyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal egy tt megsemmis t sre hanem azt egy szelekt v hullad kgy jt rendszerbe kell tov bb tani A v gfelhaszn l nak a gy jt si s megsemmis t si elj
156. ruik WAVES UNIES Bij dit symbool staat tekst die de aandacht van de operator vestigt op een speciale procedure of methode die indien niet correct uitgevoerd ernstig lichamelijk letsel kan veroorzaken VOORZICHTIG Bij dit symbool staat tekst met procedures die indien niet opgevolgd schade aan apparatuur kunnen veroorzaken De opmerkingen bevatten belangrijke informatie die uit de tekst is gelicht 76 262 TPS compact User Manual 87 901 010 01 C Opslag VOORZICHTIG Bedrijfshandleiding 6 Om een zo goed mogelijke werking en betrouwbaarheid van de pompsystemen van Agilent te garanderen moeten de volgende voorschriften in acht worden genomen tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan temperatuur van 20 C tot 70 C relatieve vochtigheid van 0 tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer in werking worden gesteld de opslagtijd van een turbomoleculaire pomp bedraagt 10 maanden vanaf de verzenddatum Indien om een willekeurige reden de opslagtijd langer is moet het pompsysteem weer naar de fabriek worden gestuurd Voor meer informatie wordt verzocht contact op te nemen met de plaatselijke vertegenwoordiger van Agilent TPS compact User Manual 87 901 010 01 C 71 262 6 Bedrijfshandleiding Uitpakken Uitpakken De T
157. s enabled when the reference quantity chosen frequency power or time or pressure or normal is higher than the set threshold The signal can be high level active that is the output is normally OFF and becomes ON when activated or low level active that is the output is normally ON and becomes OFF when activated Moreover if the reference quantity is the frequency or the power or pressure drawn it is possible to set the hysteresis in of the threshold value to avoid bouncing TPS compact User Manual 87 901 010 01 C Technical Information 17 For example reference quantity frequency threshold 867 Hz hysteresis 2 activation type high level 24 Set point output Vdc 0 850 867 884 Frequency Hz Figure 31 It is possible to delay the set point checking for a programmable delay time The PROGRAMMABLE SET POINT signal has the following default settings reference quantity frequency thereshold 867 Hz hysteresis 2 activation type high level delay time 0 second The Navigator Software optional allows the operator to set all the programmable feature TPS compact User Manual 87 901 010 01 C 231 262 17 Technical Information Interconnections 232 262 How to Connect the Open Collector Input of the Controller Here below there are the typical connections of the open collector input of TPS compact to an external system Two cases are considered 1 the customer
158. stable position connecting the inlet flange of the turbopump to a fixed counter flange capable of withstanding a torgue of 50 Nm around its axis The turbopump with ISO inlet flange must be fixed to the vacuum chamber by means of clamps or claws The following table shows for each fixing device the necessary number of clamps or claws and the relevant fixing torgue TPS compact User Manual 87 901 010 01 C 199 262 16 Instructions for Use Installation Tab 1 FLANGE FIXING DEVICE N FIXING TORQUE ISO 63 M10 clamps 4 22 Nm ISO 100 K M10 clamps 4 22 Nm ISO 160 K M10 clamps 4 22 Nm The turbopump with ConFlat inlet flange must be fixed to the vacuum chamber by means of the appropriate Agilent hardware See the appendix Technical Information for a detailed description The TPS compact cannot be fixed by means of its base For installation of optional accessories see Technical Information 200 262 TPS compact User Manual 87 901 010 01 C Use Instructions for Use 16 This paragraph details the fundamental operating procedures Make all electrical an pneumatic connections before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed 120 C Never use the pumping system when the turboinlet flange is not connected to the vacuum chamber or is not blanked Do not touch the turbopump or any of its accessories during the heating process The high te
159. stalace Tab 1 PRIRUBA PRICHYTN ZARIZENI POCET UTAHOVACI MOMENT ISO 63 Spony M10 22 Nm ISO 100 K Spony M10 4 22 Nm ISO 160 K Spony M10 4 22 Nm Turbomolekularni vyv va se vstupn p rubou ConFlat se musi p ipevnit k vakuov komo e pou it m p slu n ho materi lu firmy Agilent Viz podrobn popis v p loze Technical Information V v vu TPS compact nelze p ipevnit pomoc jej podstavy 164 262 Chcete li informace o dopl kov m p slu enstv viz Technical Information TPS compact User Manual 87 901 010 01 C Pouziti Navod k Pou iti 13 Tento odstavec popisuje podrobnosti zakladnich pracovnich postupu P ed pou it m syst mu prove te v echna elektrick a pneumatick p ipojen P i zah v n vakuov komory teplota vstupn p ruby nesm p ekro it 120 C NEBEZPE erpac syst m nikdy nepou vejte nebude li vstupn p ruba p ipojen k vakuov komo e B hem zah v n se turbov v vy ani jej ho p slu enstv nedot kejte Vysok teplota m e zp sobit pop leniny NEBEZPE NEBEZPE P edch zejte n raz m i posun m turbomolekul rn v v vy b hem jej ho chodu Mohlo by doj t k po kozen lo isek a tak ke zran n osob i kod m na v cech Pro odv tr n v v vy pou vejte inertn plyn bez prachu stic a vlhkosti nap dus k Tlak p i od
160. sten Betriebsvorg nge erl utert Vor Benutzung des Systems sind alle elektrischen und pneumatischen Anschl sse auszuf hren W hrend der eventuellen Aufheizung der Vakuumkammer darf die Temperatur am Eingangsflansch 120 C nicht berschreiten Das Pumpensystem darf nicht in Betrieb genommen werden wenn der Eingangsflansch nicht an die Vakuumkammer angeschlossen oder nicht mit dem Verschlu flansch verschlossen ist W hrend des Aufheizens d rfen weder die Pumpe noch eventuelle hei e Zubeh rteile ber hrt werden Es besteht Verbrennungsgefahr Die Turbopumpe darf w hrend des Betriebes keinen St en oder ruckartigen Bewegungen ausgesetzt werden Die Lager k nnten besch digt werden und Personen oder Gegenst nden Schaden zugef gt werden VORSICHT F r die Bel ftung der Pumpe staub partikel und feuchtigkeitsfreies Inertgas z B Stickstoff verwenden Der Eingangsdruck am Bel ftungsanschlu soll unter 2 bar ber dem atmosph rischen Druck betragen TPS compact User Manual 87 901 010 01 C 33 262 2 Gebrauchsanleitung Gebrauch I WARNUNG Wenn das Pumpensystem zur F rderung von giftigen leicht entflammbaren oder radioaktiven Gasen benutzt wird sind die f r das jeweilige Gas vorgeschriebenen Vorg nge und Ma nahmen zu befolgen Das Pumpensystem darf niemals bei Vorhandensein von explosionsf higen Gasen verwendet werden Einschaltung und Gebrauch von Modell TPS compact 34 26
161. stige 120 C GIR Pumpen m aldrig aktiveres hvis indlobsflangen ikke er tilsluttet vakuumkammeret eller hvis pumpen ikke er lukket ved hj lp af lukkeflangen WONINGEN R r aldrig turbopumpen eller dens tilbeh r i forbindelse med personer opvarmningsprocedurerne Den h je temperatur kan resultere i skade pa ANNUAIRES Undg stod eller pludselige bev gelser af turbopumpen mens den er aktiveret Der er risiko for beskadigelse af lejerne og det kan medfore skader A p personer eller ting Efo Til pumpens luftafl b anvendes inaktiv luftart der er fri for st v partikler eller fugtighed eksempelvis kvalstof Indgangstrykket gennem den s rlige bning skal v re under 2 bar over det atmosf riske tryk TPS compact User Manual 87 901 010 01 C 93 262 7 Istruktionsbog Anvendelse OV RATE N r pumpen anvendes til toksiske brandfarlige eller radioaktive gasser folges fremgangsmaden for den enkelte gastype Anvend ikke pumpen til eksplosive gasser Start og anvendelse af TPS compact T nding af TPS compact sker ved blot at tilslutte str mmen og indstille den udvendige afbryder i position ON Den indbyggede styreenhed registrerer gjeblikkeligt tilslutningen og pumpen startes Benyt Soft Start nar apparatet t ndes f rste gang Dette sker ved at aktivere funktionsmaden pa kontrolenheden Det anbefales at frakoble funktionsmaden Soft Start i forbindelse med de efterf lgende starter
162. systemet kontaktes et Agilent reparationsv rksted Inden systemet sendes til reparationsv rkstedet skal Sikkerheds og tilstandsdokumentet der er vedlagt denne instruktionsmanual udfyldes En kopi af dette dokument skal inds ttes i systemets emballage inden afsendelse Skrotning af systemet skal forega i overensstemmelse med det p g ldende lands s rlige love TPS compact User Manual 87 901 010 01 C 95 262 7 Istruktionsbog Bortskaffelse Bortskaffelse 96 262 Betydningen af WEEE logoet pa m rkaterne Nedenstaende symbol anvendes i overensstemmelse med det sakaldte EU direktiv WEEE Symbolet kun g ldende for EU landene viser at produktet som det sidder pa IKKE ma bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres pa en godkendt affaldsstation Vi opfordrer derfor slutbrugeren til at kontakte leverandgren af anordningen enten fabrikken eller en forhandler for igangs ttelse af afhentnings og bortskaffelsesprocessen efter n je at have kontrolleret betingelserne i salgskontrakten TPS compact User Manual 87 901 010 01 C TPS compact User Manual 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar 98 Allm n Information 99 F rvaring 101 F rberedelser f r installationen 102 Installation 103 Anv nding 105 Start och anv ndning av TPS compact 106 Att st nga av TPS compact 106 N dstopp 106 Underh ll 107 Bortskaff
163. t apparaat in gebruik te nemen Agilent acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen onoordeelkundig gebruik door niet hiervoor opgeleid personeel reparaties waarvoor geen toestemming is verkregen of gebruik in strijd met de specifieke nationale wetgeving De TPS compact is een geintegreerd systeem dat uit een turbomoleculaire pomp voor hoge en ultrahoge vacu mtoepassingen en een primaire pomp bestaat Het systeem is in staat om elk type gas of gasverbinding te pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect wordt verkregen door een zeer snel draaiende turbine die aangedreven wordt door een elektrische draaistroommotor met hoog rendement De TPS compact is volledig vrij van verontreinigingen en is dus ook geschikt voor toepassingen die een schoon vacu m verlangen De TPS compact is bovendien van hulpconnectors voorzien waarmee de ontluchtingsklep kan worden aangestuurd en waarmee het systeem d m v een serieel aangesloten host computer op afstand kan worden bediend In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens het gebruik van de apparatuur te verzekeren Gedetailleerde informatie is te vinden in de bijlage Technical information TPS compact User Manual 87 901 010 01 C 75 262 6 Bedrijfshandleiding Algemene informatie Deze handleiding maakt van de volgende symbolen geb
164. te ji nechali zakrytou dokud nebude nainstalov na do syst mu a t m se ochr nila p ed jak mkoli zne i t n m a prachem 162 262 TPS compact User Manual 87 901 010 01 C Navod k Pou iti 13 Instalace POZOR P ed p ipojen m turbomolekularni v v vy do syst mu nesundavejte adhezni a ochranne viko erpac syst m neinstalujte v prost ed kter je vystaveno atmosf rick m vliv m d sn h led prachu agresivn m plyn m ve v bu n m prost ed nebo v prost ed s vysok m nebezpe m po ru Za provozu je t eba dodr ovat n sleduj c podm nky dan prost ed m maxim ln tlak 2 bary nad atmosf rick m tlakem a teplota od 5 C do 35 C a relativn vlhkost 0 95 bez sr en V p tomnosti magnetick ch pol se erpac syst m mus chr nit feromagnetick m st n n m V v vu TPS compact lze instalovat v libovoln poloze V v vu TPS compact upevn te v n jak stabiln poloze a vstupn p rubu turbov v vy p ipojte k pevn protip rub kter snese torzn moment 50 Nm kolem sv osy Turbomolekul rn v v va se vstupn p rubou ISO se mus p ipevnit k vakuov komo e pou it m p slu n ch spon a p chytek N sleduj c tabulka uv d nezbytn po et spon a p chytek pro ka d p chytn za zen a p slu n utahovac moment TPS compact User Manual 87 901 010 01 C 163 262 13 Navod k Pou iti In
165. tion Le TPS compact ne peut tre fix par sa base Pour l installation des accessoires en option se reporter Technical Information 44 262 TPS compact User Manual 87 901 010 01 C Mode d emploi 3 Utilisation Ce paragraphe pr sente les principales proc dures op rationnelles Avant d utiliser le syst me effectuer tous les branchements lectriques et pneumatiques Pendant le chauffage ventuel de la chambre vide la temp rature de la bride d entr e ne doit pas d passer 120 C WERNE SH Ne jamais faire fonctionner le syst me de pompage si la bride d entr e n est pas reli e la chambre vide ou si elle n est pas ferm e avec la bride de fermeture NAMEN AN viter de toucher la turbopompe ainsi que ses accessoires ventuels pendant les op rations de chauffage La temp rature lev e peut tre l origine de l sions graves NAME ANN viter tout choc ou d placement de la turbopompe lorsqu elle est en marche Cela pourrait endommager les paliers et provoquer de graves dommages aux personnes et aux choses Maa PI Nation Pour le refoulement l air de la pompe utiliser un gaz inerte d pourvu de poussi re particules ou humidit Ex azote La pression d entr e travers la porte pr vue cet effet doit tre inf rieure 2 bars au del de la pression atmosph rique TPS compact User Manual 87 901 010 01 C 45 262 3 Mode d emploi Utilisation AUS
166. to del rotore ed attendere che la temperatura superficiale della pompa sia inferiore a 50 C In caso di guasto possibile usufruire del servizio di riparazione Agilent Prima di rispedire al costruttore un sistema per riparazioni indispensabile compilare e far pervenire al locale ufficio vendite la scheda Sicurezza e Salute allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nell imballo del sistema prima della spedizione Oualora un sistema dovesse essere rottamato procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche TPS compact User Manual 87 901 010 01 C 23 262 1 Istruzioni per l uso Smaltimento Smaltimento 24 262 Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita TPS compact User Manual 87 901 010 01 C TPS compact User Manual Gebrauchsanleitung Si
167. ure Mode REQUIRED FIELD See next pag Detailed Description of Malfunction Please provide the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature s Date Pg 2 3 Agilent Technologies Vacuum Products Division Reguest for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION PARAMETERS Vacuum leak High voltage problem Solenoid failure Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Contact Overtemperature Temp 2 Purge flow Cooling defective Clogging OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Damaged flange SCROLL AND ROTARY VANE PUMPS Pump doesn t start Noisy pump describe Doesn t reach vacuum Over temperature Pump seized Other Section 6 ADDITIONAL TERMS Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Displ
168. usi odstranit ako deleny odpad Vyzyvame preto kone n ho uZivatela aby sa skontaktoval s dod vatelom pristroja i u je to vyrobca alebo predajca za u elom jeho likvid cie podla zmluvn ch podmienok predaja 180 262 TPS compact User Manual 87 901 010 01 C TPS compact User Manual 15 Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke 182 Splo ne informacije 183 Shranjevanje 185 Priprava za monta o 186 Monta a 187 Uporaba 189 Vklop in uporaba TPS compact a 190 Izklop TPS compact a 190 Zaustavitev v sili 191 Vzdr evanje 191 Odlaganje opadkov 192 Prevod navodil v izvirniku SEE Agilent Technologies 181 262 15 Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke Varnostna navodila za Turbomolekularne rpalke Turbomolekularne rpalke opisane v naslednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko sprosti rotacijska energija SVARILO Da bi se izognili po kodbam opreme in prepre ili po kodbe osebja morate natan no slediti navodilom za name anje iz tega priro nika 182 262 TPS compact User Manual 87 901 010 01 C Priro nik za Navodila 15 Splo ne informacije Oprema je namenjena za profesionalno uporabo Pred uporabo mora uporabnik prebrati navodila
169. utilizar a modalidade Soft Start activando a atrav s do controller Posteriormente aconselha se a desactivar a modalidade Soft Start Para o procedimento de activa o da modalidade Soft Start usar como refer ncia o par grafo Signal Description no cap tulo Technical Information A luz piloto azul STATUS posicionada no painel traseiro da base do TPS compact indica atrav s da frequ ncia de intermit ncia as condic es operacionais do sistema acesa fixa a bomba funciona normalmente intermitencia lenta periodo de aprox 400 ms o sistema est em estado de acelerac o ou de paragem ou de Stop ou de waiting for interlock intermit ncia r pida per odo de aprox 200 ms condi o de erro Para informac es mais detalhadas sobre o painel de comando do TPS compact consultar o ap ndice Technical Information TPS compact User Manual 87 901 010 01 C Manual de Istruc es 5 Paragem do TPS compact Para parar o TPS compact suficiente colocar o interruptor exterior na posi o OFF O controller incorporado p ra imediatamente o sistema de bombeamento Paragem de Emergencia Para parar em condic es de emergencia o TPS compact necess rio desligar o cabo de alimenta o da tomada da rede de alimentacao ou colocar o interruptor exterior na posi o OFF Manutencao O TPS compact n o requer gualguer manuten o com excepc o da substitui o do Tip seal To
170. utsettes for noen form for st t Emballasjen ma ikke kastes pa en ulovlig mate Alle materialer er 100 resirkulerbare og er i samsvar med EU direktiv 85 399 om milj beskyttelse For a unnga avgassingsproblemer ma ingen del som skal utsettes for vakuum handteres med bare hendene Bruk alltid hansker eller andre og passende verneutstyr Figur 1 MERK Normale milj messige belastninger kan ikke delegge TPS compact Likevel 114 262 anbefaler vi holde pumpen lukket til den er montert i systemet slik at den ikke forurenses eller utsettes for nedst ving TPS compact User Manual 87 901 010 01 C Instruksjon Manual 9 Installasjon ET HN Tapen og beskyttelsesproppen skal fjernes f rst nar turbopumpen koples til systemet Ikke installer eller bruk pumpesystemet i miljger som utsettes for regn sn eller is st v aggressive gasser eksplosjonsfarlige milj er eller miljger med stor brannfare Under bruk m folgende forhold respekteres maksimalt trykk 2 bar over atmosf risk trykk temperatur fra 5 C til 35 C relativ fuktighet 0 95 uten kondens Ved magnetfelt m pumpesystemet beskyttes av dertil egnede skjermer TPS compact kan monteres i en valgfri stilling Fest TPS compactien stabil stilling med inngangsflensen festet mot en fast koplingsflens med et dreiemoment p 50 Nm rundt aksen Turbopumpene med ISO innlgpsflens skal festes til vakuumkammeret med dobble e
171. v tr vac m otvoru mus b t men ne 2 bary nad atmosf rick m tlakem TPS compact User Manual 87 901 010 01 C 165 262 13 N vod k Pou it Pou iti A 34010100 Pokud pou v te erpac syst m pro erp n toxick ch ho lav ch nebo radioaktivn ch plyn dodr ujte pros m po adovan postupy pro likvidaci ka d ho plynu V v vu nepou vejte v p tomnosti v bu n ch plyn Zapnut a pou v n v v vy TPS compact V v vu TPS compact sta zapojit do s t a pak zapnout venkovn vyp na Vestav n regul tor automaticky rozezn p tomnost s ov ho nap t a spust v v vu P i prvn m uveden do provozu se doporu uje nastavit na regul toru m kk start U dal ch spu t n se doporu uje m kk start zru it Chcete li informace k aktivaci m kk ho startu viz odstavec Popis sign lu v kapitole Technical Information Modr LED kontrolka STATUS na zadn m panelu z kladny modelu TPS compact ukazuje prost ednictv m rychlosti sv ho blik n opera n stav syst mu bez blik n vyv va se ot norm ln pomal blik n interval cca 400 ms syst m se pozvolna rozb h nebo brzd nebo stoj nebo je ve stavu ek n na blokov n rychl blik n interval cca 200 ms poruchov stav Viz podrobn popis ovl dac ho panelu v v vy TPS compact v p loze Technical Information Vypnut v v vy
172. xterne Schalter auf die Schaltstellung OFF zu schalten Das Modell TPS compact erfordert keine Wartung au er der Austausch des Tip seal Eventuelle Eingriffe d rfen nur durch autorisiertes Fachpersonal ausgef hrt werden Vor jedem Eingriff am System den Netzstecker ziehen die Pumpe ber ffnung des entsprechenden Ventils bel ften und abwarten bis der Rotor vollkommen stillsteht und die Temperatur am Pumpengeh use unter 50 C abgesunken ist Bei Defekten kann der Agilent Service Bevor Fa Agilent ein System zur Reparatur das diesem Handbuch beiliegt ausgef llt an die rtliche Verkaufsstelle zu senden Eine Kopie ist der Verpackung des Systems vor dem Versand beizulegen Eine eventuelle Verschrottung hat unter Beachtung der einschl gigen nationalen Vorschriften zu erfolgen TPS compact User Manual 87 901 010 01 C 35 262 2 Gebrauchsanleitung Entsorgung Entsorgung Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in Ubereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Eguipment angebracht Dieses Symbol nur in den EU L ndern giiltig zeist an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nac
173. zastavenie Udr ba Ak chcete zariadenie TPS compact okam ite vypnut v stave nudze musite alebo vytiahnut kabel napajania zo zastr ky zdroja napajania alebo prepn t vonkaj i vypina do polohy OFF Zariadenie TPS compact nevy aduje iadnu udr bu s vynimkou v meny Tip seal Ak ko vek pravy a opravy syst mu mus vykona autorizovan person l NEBEZPE IE Sk r ne za nete oko vek robi v syst me odpojte ho od zdroja nap jania vyvetrajte v vevu tak e otvor te pr slu n ventil po kajte k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia vyh adajte servisn stredisko spolo nosti Agilent Pred odoslan m zariadenia v robcovi treba vyplni dotazn k Zdravie a Bezpe nos pripojen k n vodu na pou itie a odosla miestnemu predajcovi K piu dotazn ka vlo te do bal ka so syst mom a odo lite spolu s n m Ak je potrebn likvid cia syst mu mus prebehn v s lade so pecifick mi predpismi danej krajiny TPS compact User Manual 87 901 010 01 C 179 262 14 N vod na Obsluhu Likvidacia Likvidacia Vyznam loga WEEE nachadzajuceho sa na titkoch Aplikovanie doluozzna en ho symbolu dodr uje smernicu EU s nazvom WEEE Tento symbol platny iba pre taty Eur pskej Unie znamena e vyrobok s tymto titkom NESMIE byt odstraneny spolu s be nym domacim alebo priemyselnym odpadom ale sa m

TPS-compact User Manual

Contents

Download Pdf Manuals

Related Search

Related Contents