The Safety and User Manual - Singh Center for Nanotechnology
Contents
1. 12 3 QNF staff and or EHRS will handle all spills that create a hazardous condition to any QNF occupant 12 4 A small spill is defined as one that 12 4 1 Does NOT spread rapidly 12 4 2 Does NOT endanger people or property except by direct contact 12 4 3 Does NOT endanger the environment outside the Nanofab 12 4 4 The volume is less than a gallon of liquid 12 5 The lab occupant should 12 5 1 Label the spill and leave someone in charge of alerting others about the spill so that accidents can be prevented 12 5 2 Contact the Nanofab staff for supervision of the cleanup The staff may determine that the Nanofab user is capable of cleaning the spill under staff supervision 12 5 3 If the client is unsure of the severity of the spill do not hesitate to call EHRS at 215 898 4453 12 6 A large spill is defined as one that 12 6 1 Spreads rapidly 12 6 2 Is toxic 12 6 3 Endangers people or property 12 6 4 Endangers the environment outside of the building and or is more than a gallon of liquid 12 The lab occupant should 12 7 1 Call EHRS at 215 898 4453 12 7 2 Evacuate the Nanofab warning others of the spill as they leave 12 8 Safety Measures for Spill Assessment and Cleanup 12 8 1 Nanofab users and staff should remember that cleaning up a spill may be potentially more hazardous than routinely working with the same substance because you have less control over the environment Ensure that personal protective2. 34 5 3 2014 11 2 1 1 The MSDS library for the Center can be accessed online at 11 2 1 2 https www seas upenn edu nanofab secure WNF Approved Chemic als html 11 2 1 3 An MSDS should be referred to before using an unfamiliar or new chemical If the MSDS for the chemical a client wishes to use are missing from the website let the staff know 11 3 Material Request 11 3 1 If Nanofab users require a new type of chemical contact the Laboratory Manager 11 4 Personal Protective Equipment 11 4 1 A face shield is required when working at all benches that are NOT located in the Wet Process Bay 11 4 2 Full PPE Personal protective equipment is required when working at the wet benches in the Wet Process Bay PPE consists of a face shield apron and heavy gauge nitrile gloves that extend to mid forearm 11 4 3 PPE is intended for protection against chemical spills and are considered chemical resistant NOT chemical proof 11 4 4 No personnel wearing PPE must be found outside the Wet Process Bay unless he she is tending to an emergency situation 11 5 PPE must be removed using the following protocol 11 5 1 Wash Gloves 11 5 2 Dry gloves using wipes 11 5 3 Dispose of gloves 11 5 4 Remove Face Shield 11 5 5 Hang face shield 11 5 6 Hang apron if it is dry Otherwise dispose of apron 11 5 7 Chemical Gloves are for personal protection against chemical spills 11 5 8 Never immerse gloves in chemicals as they are only che
3. QNF_USER_MANUAL_R1 33 34 5 3 2014 18 Version History Revision Date Author Changes 0 0 05 03 14 N Clay Original draft 0 1 0 2 QNF_USER_MANUAL_R1 34 34 5 3 2014
4. QNF IS FIRST EMERGENCY CONTACTS Primary Emergency Contact Dial 511 from any campus phone University Police 215 573 3333 University EHRS 215 898 4453 After Hours University EHRS Pager 215 308 5266 After the tone sounds dial your phone number and wait for a return call If your page is not answered within one minute call 511 NON EMERGENCY SITUATIONS Materials Safety Data Sheets https www seas upenn edu nanofab secure WNF_Approved_Chemicals html University EHRS 215 898 4453 E mail contact ehrs ehrs upenn edu EHRS Chemical Hygiene Plan http www ehrs upenn edu programs labsafety chp PRIMARY NANOFAB STAFF CONTACTS Laboratory Manager Kyle Keenan 215 898 7560 Lab Safety Specialist Kimberly Bush 215 746 6549 Nanofabrication Director Noah Clay 215 898 9308 Singh Building Manager Chris Montowski 215 783 5725 NANOFAB WEBSITE http www nano upenn edu core facilities nanofabrication QNF_USER_MANUAL_R1 2 34 5 3 2014 SAFETY AT QNF IS FIRST PANIC CHECKLISTS IF A HAZARDOUS CONDITION OCCURS Tog Call the Penn Comm 9 511 Evacuate the building immediately Alert others on the way out Meet the Nanofab staff at the LRSM driveway on 33 st IF YOU HEAR THE FIRE ALARM 1 2 3 Evacuate the building immediately Alert others on the way out Meet at the LRSM driveway on 33 st IF YOU SEE SOMEONE UNDER THE SAFETY SHOWER 1 ml Ox gro Reopecm If the victim is by
5. Wipe down the surface of any items to brought in QNF with IPA and water mixture and wipes 7 7 3 Dona hair net Nanofab users should make sure that all of their hair is covered 7 7 3 1 No hair should protrude from the hair net 7 7 4 Don a face mask or beard cover such that both mouth and nose are covered 7 7 5 Place gloves on both hands 7 8 Final Gown Procedure 7 8 1 Don a hood garment 7 8 2 Dona suit garment Ensure hood is completely tucked inside suit 7 8 3 Don boot garments 7 8 4 Safety Glasses are required Users may bring their own or borrow from the storage rack next to the sliding door In place of safety glasses regular glasses with side shields are also acceptable general eye protection not replacement for face mask when required 7 9 Use the mirror to ensure all apparel is properly worn 7 10 Collect all items brought into the gowning area and take into the Nanofab 7 10 1 Allowed items include pens cell phones approved notepads with cleanroom paper tablets laptop computers and memory sticks 7 11 Nanofab users should then step on the sticky mat located just before they enter through the sliding door and make 5 10 baby steps QNF USER MANUAL R1 9 34 5 3 2014 7 12 Prior to leaving nanofab users should verify login logout state on all equipment used to ensure they have been properly shut down For example verify that vacuum systems without automatic cross over aren t left with roughing pump va
6. plastic liners A small bin located in the spinner benches should be used for solid waste contaminated with the chemicals used in that bench 11 33 2 There are also a number of bins labeled as general waste that use clear liners Please do not place anything contaminated with chemicals in those bins 11 33 3 Sharps containers can also be found throughout the facility along with white buckets for glass and silicon disposal 11 33 4 Batteries should be disposed of in containers labeled Battery Disposal 11 33 5 III V and II VI materials should be disposed of in containers labeled Compound Semiconductor Disposal 12 Chemical Spill Protocol 12 1 Emergency Response Equipment 12 1 1 Spill control kids are placed in several locations around the lab Bottles of neutralization liquid are also available for use on acid and caustic spills Emergency showers and eye washes are located around the facility as well Most chemical burns particularly in the eyes should be washed for 15 minutes before seeking QNF USER MANUAL R1 23 34 5 3 2014 further medical attention First Aid Kits are available in each Bay Tubes of Calcium Gluconate Gel are available in the Wet Process Bay for application on hydrofluoric acid burns This should be applied promptly and is not a substitute for medical attention 12 2 Nanofab users are required to report all chemicals spills that occur and evacuate the laboratory with all personnel if a hazardous occurs
7. signed the User Agreement ALL prospective Nanofab users are required to complete the each step detailed on QNF s website at http www seas upenn edu nanofab pages WNF Access html 5 General Rules amp Restrictions 5 1 The following rules are to be observed by all persons qualified to work in the Nanofab 5 1 1 Only individuals certified through registration and orientation are allowed to enter the Nanofab 5 1 2 All Nanofab equipment usage when applicable must be entered in the respective log manual along with any unusual occurrences QNF USER MANUAL R1 6 34 5 3 2014 5 1 3 Nonessential items tools books etc will not be allowed to accumulate and will be removed from the lab at the discretion of the Laboratory Manager and the Nanofab Staff 5 1 4 The Nanofab user should check Nanofab gown and PPE for contamination Every QNF user should eliminate contact between gloved hands and the face as gloves may be contaminated 5 1 5 In order to use equipment the client must have a complete understanding of equipment and operation and be a certified user 5 1 6 The Nanofab user must have a complete understanding of all the chemicals at the wet bench or equipment that they are using Reviewing the MSDS sheets so that the hazards risks and methods for responding to incidents is a good way to begin 5 1 7 Most importantly no user shall ever work alone while performing hazardous work 5 1 7 1 Hazardous work comprises processing
8. users should alert persons in the area that a spill has occurred This will ensure that the lab s attention can be focused on the immediate issue cleanup Nanofab users should label the area or find someone to alert others about the spill to prevent accidents 12 11 2 Under staff supervision the client should turn off any ignition sources in the Nanofab such as burners motors and other spark producing equipment Prevent the spread of contamination and contain any volatile material within a room by keeping doors closed 12 11 3 Nanofab users should consult the MSDS sheet for the chemical and notify the QNF Staff or EHRS for proper cleaning procedures 12 11 4 Nanofab users should ensure that they are wearing Personal protective equipment e g goggles apron laboratory coat gloves shoe covers based the selection of the equipment on the hazard 12 11 5 If needed Nanofab users should use a pH strip to assess the chemical 12 11 6 Nanofab users should neutralize spills of corrosives before attempting to clean up the spill 12 117 Absorb liquid spills using the appropriate absorbent pad for the type of chemical spilled Nanofab users should then place the pad over the spill and draw the free liquid into the pad Place the used pillows or absorbent materials in plastic QNF USER MANUAL R1 25 34 5 3 2014 bags for disposal along with contaminated disposable protective equipment e g gloves Sweep up waste and place in plastic bag
9. R MANUAL R1 7 34 5 3 2014 6 1 1 Scheduled down times for the Nanofab will be posted on the home page of the QNF web site 6 1 2 Unforeseen closing will be posted on the QNF web site and notifications will be sent out by email to the Nanofab Client list serve 6 1 3 While the Nanofab is open 24 7 there are certain restrictions and policies that must be abided for maintaining privileges of Nanofab access by each client of the facility 6 2 Staff Maintained Business Hours are Monday through Friday 8 00AM 7 00PM with the exception of University holidays weather emergencies University cancellations etc 6 3 Only personnel who have completed the training listed above are permitted to enter the Nanofab 6 3 1 No Nanofab client can work in the Nanofab alone if their intent is to work in the Wet Process Bay 6 3 2 Nanofab users must always have a buddy present within QNF for hazardous work 7 Nanofab Attire 7 1 Only full length long pants a minimum of short sleeve shirts and closed toe flat bottom shoes are allowed in the Nanofab 7 1 1 Prohibited lower body garments skirts short pants shorts or anything excessively baggy 7 1 2 Prohibited upper body garments tank tops halter tops and spaghetti straps no exposed belly back skin 7 1 3 Prohibited footware heels work boots heavy boots shoes that leave any area of the foot exposed below the ankle 7 2 Safety Glasses 7 2 1 Safety glasses must be worn at all times
10. Safety and User Manual Table of Contents 10 11 13 14 15 16 17 Expectations of the QNF Community c ccccccccessessssececeeeeessessneeeeeeeessessssssaeess Nanofab Cleanroom Orientation ccccccccscccccssscssssseeessccesessessseeseeseeseesssssaneas Resporisibilitles 2 3 7 5 er eerte etie Ete e eU etre Ue e PE o e eve E t Natofab ACCesS ouai a Ten at d te ua ode a see UG es Ses n MNA EFa de TQ d RISUS TUA General Rules amp Restrictions shopper patena eee Ho decori aa e P Id eeeauae Hours of Operati Mese ee eran aenea eid Nanofab ATUS usur oto ug cedo sada aes ra bltee diaeta mc ORTE Nanofab Materials and Cleanliness essere WebBenchDUUll2atlgPhis a aa arto ite Far tan Rer ene o d gve AS QUOC te GN DO UpAu uS Phone Utilization eiiean bes RAO a EA EE H ta IR gene Safety Considerations ccccccccccsssssssscececeeeceeseseesececeeeceeseseuseseceeeessseseaeaeeeeeesseeeees Equipment UtilizatiOn fovecatecceesssseeessucaececssdsesdevdacscev sssesendcaveceesiveesevscanddecsie Nanofab Init aCHOP Sa equ ta poeee a QUIA tmp aa blau t mU agi cp tuta dva Appendix A Common Acids amp Bases Utilized eeseeeeeeeee Appendix B Common Corrosives Utilized eeeesesesennnnnenn Appendix C Incompatible Chemicals cccccssssscccececessesssseseeeeeeecessessaeeeeeeeens QNF USER MANUAL R1 1 34 5 3 2014 SAFETY AT
11. bin to the left of the sliding door in the Gowning Area 7 19 Items that should be discarded once used 7 19 1 Face masks 7 19 2 Hair bouffant caps 7 19 3 Gloves 7 20 The following is the cleanroom garment laundering schedule QNF_USER_MANUAL_R1 10 34 5 3 2014 7 20 1 Nanofab garments are laundered every week by an external vendor If a gown becomes chemically stained it is best for it to be washed as soon as possible The laundry container is in the gowning room 7 20 2 If there is an emergency evacuation that involves wearing garments outside of the Nanofab the garments must be placed in the laundry bin and a fresh set of garments must be selected 8 Nanofab Materials and Cleanliness 8 1 Keeping cleanrooms clean and organized is every user s responsibility 8 2 Enforcement procedures may be necessary to ensure safe and effective operations 8 3 Absolutely no food or drink should be brought into QNF or consumed while using any QNF tool 8 4 Do not bring non cleanroom items into a cleanroom 8 5 Do not take cleanroom items out of a cleanroom 8 5 1 Do not borrow chemicals 8 6 Always clean up the working space you have used before moving to the next station 8 7 Don t leave store anything on public areas such as machine tops bench surfaces on under tables etc without permission from a cleanroom supervisor 8 8 Keep non shared items such as tool boxes wafers glassware etc in the storage area assi
12. chemicals and common sense 1 6 1 In many cases rules have been created in response to specific incidents of chemical misuse by users 1 6 2 In addition a large volume of state and federal law covers chemical use in the workplace and disposal of waste QNF USER MANUAL R1 4 34 5 3 2014 1 6 3 Some may believe our rules are restrictive and unnecessary but they are required to maintain safety of more many researchers working in the same area 1 6 4 In spite of rules and staff supervision the primary responsibility for safety rests with the individual user 2 Nanofab Cleanroom Orientation 2 1 All new Nanofab users must complete an orientation conducted by staff members This orientation is an introduction to the QNF cleanroom facility and is intended to give Nanofab users a background understanding of the location function and use of various safety support and process equipment 2 1 1 Nanofab users must complete this orientation in order to gain access to the Nanofab facility 2 1 2 Nanofab users will learn about the facilities processing capabilities and the many rules that surround use of the facility 2 1 3 Nanofab users who are found in violation of the rules and procedures listed throughout this manual may lose certain Nanofab privileges or complete access to the Nanofab 2 1 4 Working in a Nanofab environment presents many hazards and it is imperative that Nanofab users fully understand the rules and regulations in p
13. dizers should also be separated from reducing agents 11 29 Appendix A contains a more detailed list of specific chemicals that should not be mixed 11 30 General Rules When Working With Chemicals QNF_USER_MANUAL_R1 20 34 5 3 2014 11 30 1 To ensure the Nanofab is as safe as possible the following procedures should be followed when working with chemicals 11 30 1 1 QNF Wet bench Training is required for all Nanofab users who intend to work with any wet chemistry inside the Nanofab 11 30 1 2 Nanofab users must read the MSDS before using a chemical in the Nanofab 11 30 1 3 Nanofab users should be aware of chemicals that must be used in plastic beakers and chemicals that must be used in glass beakers 11 30 1 4 Beakers pans and tanks holding chemicals must be labeled with mixture name Date and owner name must be with beakers left unattended 11 30 1 5 Nanofab users must always wear appropriate protective equipment in addition to required Nanofab apparel when working with chemicals 11 30 1 6 Nanofab users should not work with acids or bases in the solvent hoods 11 30 1 7 Nanofab users should not work with solvents in the acid or base hoods 11 30 1 8 Nanofab users should make sure that gloves are clean and dry before transferring chemicals to or from the bench 11 30 1 9 Nanofab users should use only one bottle at a time Do not open a new bottle unless an existing bottle is completely empty Pour chemical slowly Do not l
14. e with a thermometer QNF USER MANUAL R1 21 34 5 3 2014 11 30 1 15 Nanofab users should rinse the heavy chemical gloves with DI water and dry them before taking them off If they become stained Nanofab users should immediately dispose of them by placing them in a trash receptacle 11 30 1 16 Nanofab users should not wear safety apparel outside of wet bench areas unless working under emergency or HAZMAT cleanup conditions 11 30 1 17 Nanofab users should make sure that all PPE is clean and dry before returning it to storage areas 11 30 1 18 Nanofab users should always clean up their work area before they leave Beakers should be thoroughly rinsed with DI water dried and stored right side up in their appropriate location 11 30 2 Solvent Contaminated Items 11 30 2 1 Wipes gloves or other items that have resists or other spin on polymer solutions on them should not be disposed of in the standard trash cans 11 30 2 2 These polymer solutions will release the solvents into the air for a very long time filling the room with solvent fumes that the air system can quickly spread throughout the lithography areas In all the lithography Bays or where solvents are employed special trash cans attached to building exhaust are to be used for disposing of these items 11 30 2 3 The trash exhaust prevents the release of the fumes into the room 11 30 2 4 If a user enters a room and notices a strong solvent smell it should be investigated i
15. ents 2 Propanol CH3CHOHCH3 100 Acetone CH3COCH3 100 Chlorobenzene C6H5CI 100 Methanol CH3OH 10096 Toluene C6H5CH3 10096 Trichloroethylene C2HCI3 10096 Xylene C6H4 CH3 2 80 9096 QNF_USER_MANUAL_R1 32 34 5 3 2014 16 Appendix B Common Corrosives Utilized 16 1 Chemical Type Chemical 16 2 Corrosives Ammonium Fluoride 16 3 Ammonium Hydroxide 16 4 Ammonium Hydroxide 16 5 Buffered Oxide Etch BOE 16 6 Hydrochloric Acid 16 7 Aluminum Etch 80 15 3 2 16 8 Hydrofluoric Acid 16 9 Phosphoric Acid 16 10 Potassium Hydroxide 16 11 Resist Developer 16 12 Sulfuric Acid 17 Appendix C Incompatible Chemicals 17 1 Chemical Incompatible with 17 2 Acetic Acid Nitric Acid Ethylene Glycol Peroxides 17 3 Permanganates 17 4 Ferric Chloride Aluminum 17 5 Hydrogen Peroxide Copper Chromium Iron Alcohols Acetone Organics 17 6 Mercury Ammonia 17 7 Nitric Acid Photoresist Developer Acetic Acid Flammable 17 8 Liquids Flammable Gases 17 9 All Acids ex Hydrochloric hydrofluoric All Bases ex Sodium cyanide potassium hydroxide 17 10 sodium hydroxide 17 11 Oxidizers ex Permanganates inorganic peroxides 17 12 Persulfates perchlorates 17 13 Flammables organic materials reducing agents ex 17 14 Zinc alkaline metals formic acid 17 15 Water Reactives sodium potassium metal hydrides 17 16 hydrolysable halides Water 17 17 NANO STRIP Solvents 17 18 Sulfuric Acid Solvents
16. equipment is worn 12 9 Basic Protection For Handling Spills QNF USER MANUAL R1 24 34 5 3 2014 12 9 1 Eye Protection 12 9 1 1 Safety glasses are required for working in the laboratory or cleaning up spills of hazardous materials For corrosive and or reactive materials goggles or a face shield are also necessary 12 9 2 Skin Protection 12 9 2 1 When handling wet or dry chemicals a chemically resistant apron with sleeves should be worn as well as chemically resistant gloves Glovers are very important as they protect the hands A pair of heavy nitrile butyl or neoprene gloves and a pair of disposable polyethylene gloves are recommended for each person involved in a cleanup 12 9 3 Boots or chemically resistant shoe covers may be necessary for large liquid spills 12 9 4 Since some chemicals may go through even heavy nitrile butyl or neoprene gloves 12 9 5 Refer to the MSDS or call EHRS before touching the chemical 12 10 Additional Precautions 12 10 1 At least two people should be present for every clean up 12 10 2 Label the area or leave someone in charge of alerting others about the spill so that accidents can be prevented 12 10 3 If use of a respirator is necessary for the clean up contact a member of the Nanofab staff If a staff member cannot be reached it is a high hazard emergency Nanofab users should alert all others users and evacuate the Nanofab 12 11 Minor Spill Cleanup Procedures 12 11 1 Nanofab
17. er can and have been minimized by the proper use of engineering controls such our toxic gas monitoring system use of proper equipment proper confinement ventilation sensors purges safety valves etc and by procedural controls implemented by the staff 3 3 3 Wet Chemicals 3 3 3 1 The second more troublesome category of hazard concerns wet chemicals i e the acids bases and solvents commonly used in lithography and etching These are hands on hazards and in a multi use facility like the QNF are hard to control by engineering It is precisely because they are considered ordinary by many users that they present a serious hazard The chemicals commonly used in the facility can cause severe burns tissue damage organ damage asphyxiation and genetic damage if improperly used These chemicals can enter the body by inhalation ingestion or absorption either directly through the skin or through gloves and may have either long or short term health consequences In addition improper use of solvents can result in a major fire Ordinary chemicals are thus definitely not hazard free Users are expected to treat all chemicals with appropriate respect and to be aware of all possible reactions which may be created either intentionally or by accident 4 Nanofab Access 4 1 Nanofab users are defined as research associates faculty members undergraduate students graduate students and external Nanofab users whose home institution has
18. es is up if another user finds the equipment not in use and begins using it the machine belongs to this user Therefore if a user allows the previous user to use the QNF USER MANUAL R1 29 34 5 3 2014 equipment he she must log into the equipment after logging out the other user The user should then be around the equipment to prevent another violation Violation Using equipment when it is undergoing maintenance and is marked not to be used or System Machine Down Penalty Suspension from the Nanofab for three weeks Explanation Under no circumstances is a user allowed to perform any maintenance on any equipment Any abnormalities while using the equipment must promptly be reported to the QNF Staff When a machine is undergoing maintenance repairs users must be cooperative and patient No user is allowed to use equipment in a non workable state or when it is undergoing routine maintenance Violation Being logged in equipment for longer than the equipment time limit running into someone else s time Penalty First Offense Written warning Second Offense One week suspension from Nanofab Third and Subsequent Offenses One week suspension from Nanofab each time If the equipment is not reserved by another user you can continue to use the equipment If you are exceeding the equipment time limit for usage you should log out and log back in This resets the timer for the equipment login Violation Failure to record use in lo
19. et it gulp 11 30 1 10 Nanofab users should always dispose of chemicals in the designated waste drain aspirator or receptacle Nanofab users should not pour chemicals back into the storage bottle If Nanofab users pour too much they should dispose of it appropriately 11 30 1 11 Nanofab users should put the cap back on each chemical bottle securely They should rinse and dry the outside of the bottle before returning itto storage If the bottle is empty Nanofab users should rinse and properly dispose of bottles 11 30 1 12 Nanofab users should always exercise extreme caution in handling wet chemistries Because most chemicals used in the lab look like water Nanofab users should always assume any liquid is dangerous In addition Nanofab users should always dry water off gloves and beakers after rinsing them with water so that others will not mistake the water for a dangerous chemical 11 30 1 13 Nanofab users should clearly mark the name of the chemicals the client s name where someone would contact the client and when the client expects to return on a clean wiper Nanofab users should leave this sign next to the chemicals in use 11 30 1 14 When using hot plates Nanofab users should check that their beaker is both suitable for hot plate use and smaller than the area of the plate Nanofab users should never use a Teflon or plastic beaker on a hot plate Nanofab users should always monitor the temperature of the chemicals on a hot plat
20. et must be used QNF USER MANUAL R1 12 34 5 3 2014 9 4 All chemicals lids require proper labeling even water The U S Environmental Protection Agency EPA defines any uncovered container not in current use as an illegal disposal of the chemical by evaporation Even if the user never plans on walking away from the container lab policy requires that they have a lid for it This policy is required for all containers including containers of water 9 5 Always pour chemicals inside a wet bench and away from your body 9 6 QNF stocks and supplies the chemicals commonly required for processing in the facility Users are neither allowed to bring in their own stocks of these chemicals or to appropriate as a private stash any of these chemicals 9 6 1 We simply do not have room for researchers to have private bottles of chemicals 9 6 2 The one major exception to this is with resists and other expensive lithography chemicals where research groups that purchase their own may store it in the facility for their exclusive use 9 6 3 Working stocks of chemicals are kept in the chemical cabinets located under the hoods or nearby Extra stock is kept in service corridors accessible by staff only therefore users may not replenish the cleanroom cabinets 9 7 Chemicals supplies carried from room to room in the lab must be carried in a rubber chemical carrying bucket or carts 9 7 1 Users carrying bottles within a single bay are not required to u
21. fety of personnel If there is a toxic gas detection event of a given chemical all upstream gas sources are shut down at their respective source 11 9 2 BLUE LIGHT strobes prompt for IMMEDIATE EVACUATION exit through nearest emergency egress and gather at the rally point Blue strobe lights are located in every area of the cleanroom 11 10 Safety Showers 11 10 1 Safety showers are for chemical decontamination or fire suppression on a person or their clothing Each shower also contains an eye wash station Showers are located in each bay containing a wet To operate the shower locate self beneath the shower pull the lever hanging from the shower and water will begin to flow To operate the eye wash place eyes in the center of the eye wash bowl push the lever on the side of the bowl and water will begin to flow If exposed to chemicals rinse the affected area for a minimum of five minutes seek help immediately and dial 511 from the nearest phone 11 11 First Aid Kit 11 11 1 The First Aid kits are located in each bay of the cleanroom It is for addressing minor injuries and minor burn pain relief It also contains calcium gluconate Calgonate for HF exposure Calgonate is also located in the Wet Process Bay 11 12 Chemical Classes and Hazards 11 13 Toxic compounds are a class of substances that upon exposure may result in death or serious debilitation Exposure to chemicals in the laboratory can occur by several different route
22. gging computers or reporting use in logbooks Penalty First Offense Written warning Second Offense One week suspension from the Nanofab Third and Subsequent Offenses One week suspension from Nanofab each time Violation Leaving chemicals without proper labels Penalty The mislabeled chemical will be disposed of properly The user will be issued a written warning Repeat Offenders One week suspension from Nanofab Explanation All chemicals left unattended must be properly documented by the use of these chemical warning forms This includes everything including water which is left unsupervised at the fume hood hotplate or any other location for any period of time Violation Not wearing proper safety equipment at a wet bench Penalty First Offense Reminder to put on proper safety equipment Second Offense Written warning Third Offense One week suspension from the Nanofab Fourth Offense One month suspension from Nanofab Subsequent Offense One semester suspension from Nanofab Violation Unauthorized entry into the Nanofab following another user or allowing a user to enter the Nanofab behind you Penalty Suspension from the Nanofab for up three weeks Explanation Each user should scan swipe individually to enter the Nanofab level and get in the gowning area No one should follow another user into the Nanofab This is to prevent the entrance of unauthorized users into the Nanofab QNF_USER_MANUAL_R1 30 34 5 3 2014 Viola
23. gned to you when not in use 8 9 No food is allowed in the cleanroom 8 10 Users are not authorized to enter the cleanroom service chaise areas 8 11 Writing Paper Notebooks and Pens 8 11 1 Use only cleanroom paper and notebooks inside a cleanroom 8 11 2 Use non retractable ball point or nylon tipped pens Don t use pencils or crayons 8 12 Bringing Materials into Cleanroom 8 12 1 Prepare at least one tool box for storing your non shared items 8 12 2 Wafer processing tools such as tweezers scribers timers glassware etc should always stay inside your own tool box when not in use 8 12 3 Always keep dedicated cleanroom tools inside the cleanrooms QNF USER MANUAL R1 11 34 5 3 2014 8 12 4 Don t bring non cleaned tools into a cleanroom without cleaning and permission 8 13 Glassware and Plastic Containers 8 13 1 The laboratory provides general purpose glassware 8 13 2 To mitigate cross contamination users are responsible for providing their own glassware and plasticware for chemical handling 8 13 3 Users are advised to obtain watch glasses graduated cylinders and small storage containers 8 14 Tweezers 8 14 1 Users are advised to obtain both metal and Teflon tweezers 8 15 Storage 8 15 1 Store your tool box and other non shared materials in the racks in the clean aisle 8 15 2 Do not take use other users non shared items without their permission 9 Wet Bench Utilization 9 1 QNF classifies wet be
24. he first time Most organic peroxides are sensitive to varying degrees to shock heat or friction The rate of peroxide formation will depend upon the compound Some peroxides quickly build up to an explosive level and some are only explosive on concentration such as when a solvent is distilled 11 25 Reducing agents become an electron donor when they react 11 26 Solvents are the component of solution that is present in the greatest amount and is capable of dissolving another substance 11 27 Incompatible Chemicals 11 28 There are certain chemicals that should not be mixed because a violent reaction may occur Each individual is responsible for knowing which chemicals and containers are compatible Below are common examples of incompatibilities in the Nanofab 11 28 1 Some chemicals such as TCE cannot be used with plastic beakers 11 28 2 Some chemicals such as HF cannot be used with glass beakers 11 28 3 Acids must always be separated from bases because a violent reaction may occur 11 28 3 1 1 Acids must also be separated from active metals such as sodium or potassium 11 28 3 1 2 Further inorganic acids should be kept away from organic acids 11 28 4 Bases must always be separated from acids 11 28 5 Flammables must be kept away from heat sun flame or spark source 11 28 5 1 1 Also keep flammables away from oxidizers 11 28 6 Oxidizers must be kept away from flammables and other organic materials 11 28 6 1 1 Oxi
25. in the labs 7 2 2 Auser may provide their own providing they meet the ANSI Z87 1 2003 standard 7 2 3 Safety glasses may only be removed when using optical microscopes Users should be sure to remember to put them back on when they step away from the microscope 7 2 4 Safety glasses are not a substitute for face shields when working with chemicals 7 3 Contact Lenses 7 3 1 Contact lenses are allowed in all areas of the facility In the past it was not considered good laboratory practice to wear contacts in any laboratory but the American Chemical Society changed its recommendation and the QNF has adopted its practice QNF USER MANUAL R1 8 34 5 3 2014 7 4 Bunny suits safety glasses booties hair nets mustache beard nets and gloves must be worn at all times in the Nanofab 7 5 To enter the gowning room Nanofab users will swipe their Penn ID Nanofab users can then enter the gowning room and store any unneeded personal items on the shelves to the right of the entry door 7 5 1 Only one user is permitted to enter the pre gowning area per swipe Tailgating is strictly prohibited 7 5 2 Each user should clean the soles of shoes by using the sticky mat located on the floor just inside the pre gowning entrance by taking 5 10 steps on the sticky mat 7 6 In the Nanofab pre gowning area Nanofab users should don a set of blue shoe covers booties 7 7 Pre gowning Procedure 7 7 1 Place shoe covers over shoes 7 7 2
26. incident 11 32 A Note About Hydrofluoric Acid 11 32 1 HF is used primarily to etch silicon dioxide It is dangerous because of its resemblance to water it is not painful upon initial contact it may be absorbed through unbroken skin it depletes the calcium in the body and destroys tissue and it is potentially lethal Solutions of less than 10 may take hours before symptoms appear but any contact is still very dangerous If skin contact with HF occurs 11 32 2 Nanofab users should immediately Rinse the Affected Skin with water 11 32 3 Nanofab users should Remove all Jewelry and Clothing exposed to HF while rinsing in the safety shower for 5 minutes 11 32 4 Nanofab buddy should Call 511 and demand an Ambulance and HAZMAT team The buddy should notify the all responders of the MSDS to provide to a doctor in the ER and give a report of the proceedings to the lab manager after the incident 11 32 5 After washing Nanofab users should NOT Dry Skin 11 32 6 Nanofab users should with the help of their Nanofab buddy if needed cover the entire affected area with Calcium Gluconate Gel using a double gloved hand 11 327 Take the gel with you and continuously apply fresh gel on the way to the emergency room and while waiting 11 32 8 HF is the most dangerous chemical in QNF 11 33 Solid Waste Handling 11 33 1 Solid waste that is contaminated with chemicals should be disposed of into the appropriate waste bin those bins use yellow
27. ion is required even if the person is a certified User of a similar tool at another facility or institution 13 6 3 Retraining and recertification may be necessary if a user hasn t used the specific tool for a long period of time 13 6 4 Do not schedule time for others 13 6 5 You must conform to all rules and procedures regarding use of the specific tool including properly using the tools logbook if applicable 13 6 6 Bringing in others from your group to observe is not allowed without prior permission from the Laboratory Manager This will be strictly enforced 13 6 7 Users must schedule time prior to operating most equipment Equipment on line reservations will be available to all qualified users 13 6 8 If necessary it is every user s responsibility to fill in the logbook during and after using equipment 13 6 9 It is every users responsibility to try their best to keep equipment in operating condition 13 6 10 It is every user s responsibility to immediately report any unusual occurrences to the engineer in charge 13 6 11 Using equipment is generally based on first come first serve However certain priorities may apply according to the agreement among faculty members or scheduling protocols 13 6 12 An advance reservation is required for facilities or tools that are listed on the QNF Scheduling Tool 13 6 13 When a User becomes qualified for a facility or tool is on the QNF on line Scheduling Tool an accoun
28. l names first and last in all QNF logbooks Please no first names only or nicknames etc 13 7 3 Users are required to enter in all QNF logbooks the time they entered and left the facility 13 7 4 Users are required to note any problems or irregularities with the facility or tool s operation during their session in the logbook These notes alert subsequent Users to instrument status 14 Nanofab Infractions 14 1 From time to time people will have other things on their mind and unintentionally do something they really should not do Most people do not mind a friendly reminder now and then It is up to the users to keep the Nanofab operating smoothly and as long as everyone cooperated then the chances of ruined projects injuries and problems in general are greatly reduced If anyone has a problem with being politely told about something that may endanger somebody tell the staff about it and we will take care of the problem 14 2 Using QNF is a privilege not a right That privilege comes with responsibilities Users are written up for a warning or a violation at staff s discretion every time they fail to follow the Facility protocols The nature and severity of the violations determine whether the access is re instated or not 14 3 The following describes proper Nanofab policies that users must follow at all times Failure to do so is a violation and the penalty for the violation is also listed below Users must arrive at the equi
29. lace to protect them 2 1 5 It is required that Nanofab users come to staff with any questions and fully read comply with and understand the safety manual before beginning work in the Nanofab 3 Responsibilities 3 1 Most accidents in cleanrooms occur at wet benches when pouring mixing or transporting chemicals A great deal of this manual therefore emphasizes wet chemical safety 3 2 The procedures and precautions outlined in this manual are for the purpose of protecting Nanofab workers and equipment 3 2 1 Anyone found in violation of the aforementioned procedures will suffer consequences including a loss of privileges or even a complete loss of access to the Nanofab 3 2 2 In order to prevent such consequences it is the responsibility of the client to review this procedures manual frequently and attentively 3 2 3 If Nanofab users see others in violation of any protocol in the manual Nanofab users should inform them of their mistake or confer with Nanofab staff for example through the E mail in order to prevent minor or catastrophic accidents from occurring QNF USER MANUAL R1 5 34 5 3 2014 3 3 Laboratory Hazards 3 3 1 Hazards in the laboratory fall into two general categories 3 3 2 Compressed Gases 3 3 2 1 QNF employs a variety of compressed gases some of which are toxic highly toxic corrosive flammable pyrophoric or explosive The use of these gases is thus strictly regulated These hazards howev
30. le attempting to give aid Responses to some common potential laboratory incidents are described below 11 1 2 Chemical Inhalation The victim should seek medical attention 11 1 3 Chemical Ingestion Nanofab users should immediately go to the emergency room or call 511 for advice on treatment for poisoning and chemical toxicity The client should not induce vomiting unless directed to do so by a health care provider 11 1 4 Thermal Burn Nanofab users should immerse the burned area in cold water or hold under cold running water until the pain stops and then cover with a sterile dressing If the burn is severe Nanofab users should seek medical attention 11 1 5 Bleeding Nanofab users should hold a clean pad directly on the wound and apply hand pressure If necessary elevate the bleeding extremity and apply pressure to a pressure point to reduce blood flow If the bleeding is excessive does not stop or is from a deep wound Nanofab users should seek medical attention 11 1 6 Clothing Fire Nanofab users should put out burning clothing or hair by dousing the victim in a safety shower or other water source If a safety unavailable have the victim roll on the floor to put out the flames 11 1 7 Always call for medical attention for the victim before administering first aid and report the incident to the laboratory manager If EHRS requests an incident report for the accident you will be notified 11 2 MSDS Library QNF USER MANUAL R1 16
31. lve open 7 13 Nanofab users should also make sure that all their work areas are clean and safe In addition Nanofab users should ensure they have retrieved all items brought into the space Exceptions include items in storage on the user storage shelving 7 14 Items found in the facility by staff will be collected and placed in bins in the service corridors Please contact staff if you suspect something has been left behind and collected 7 15 Upon leaving nanofab users should step into the gowning room quickly and completely allow the sliding door to close behind them 7 16 Ungowning Procedure Part I in final gown area 7 16 1 Remove Nanofab boot garments 7 16 2 Remove Nanofab suit garment 7 16 3 Remove Nanofab hood garment 7 17 Ungowning Procedure Part II in pre gown area 7 17 1 Remove face mask or beard cover 7 17 2 Remove hair net 7 17 3 Remove gloves 7 17 4 Collect belongings 7 17 5 Remove shoe covers and place in bootie recycling bin if OK Dispose of booties in trash if torn dirty or otherwise unfit to be used 7 17 6 Swipe card at exit door 7 18 The following are items that can be reused 7 18 1 Cleanroom Suit bunny suits hang on the rack with the hanger assigned with your name 7 18 2 Hood stored inside the sleeves or snap to collar of your coverall 7 18 3 Cleanroom Boots hang with your coverall on hooks 7 18 4 Safety glasses stored in your tool box or replace QNF safety glasses in the
32. mical resistant NOT chemical proof 11 5 9 Always wear when working with acids and bases in the Wet Process Bay 11 6 Video Monitoring 11 6 1 The Nanofab is equipped with high definition video cameras that allow for remote monitoring of the rooms in the event of an emergency They also have a recording capability 11 7 Fire Alarms 11 7 1 Fire alarm pull stations are located in the gowning area and adjacent to the two main emergency exit doors along the main Nanofab corridor They are intended to alert building occupants of a fire or similar emergency requiring immediate QNF_USER_MANUAL_R1 17 34 5 3 2014 evacuation If a fire alarm sounds and or a fire alarm strobe is observed immediately exit the Nanofab and gather at rally point in front of Pierce Hall 11 8 Fire alarm pull stations located on the front face of wet benches will activate carbon dioxide discharge into the respective bench Each bench of stainless steel construction contains ultraviolet and infrared sensors for flame detection and will trigger carbon dioxide discharge These alarms are intended to suppress a fire inside the respective bench and will alert building occupants in an identical way to other cleanroom fire alarm pull stations 11 9 Toxic Gas Monitoring System 11 9 1 The toxic gas monitoring system is intended to monitor concentrations of certain gases gas handling equipment status and UV IR fire detectors in the Nanofab and support areas to ensure the sa
33. mmediately as olfactory fatigue will quickly set in 11 30 2 4 1 Olfactory fatigue is where the nose stops smelling an odor after being exposed to it for a period of time 11 30 2 5 The first place to check are the trash cans to see if someone has improperly disposed of a resist covered item 11 30 2 6 If the source of the odor cannot be located users should exit the area and contact staff or EHRS 11 31 Chemical Exposures 11 31 1 Any major chemical exposure should be reacted to immediately by using the chemical safety shower 11 31 2 All clothing should be removed as soon as possible to assist in getting the chemical off of the body Modesty should not prevent users from doing this Other users should use the emergency phones to contact EH amp S and request medical assistance for a chemical exposure The injured person should fully rinse the affected area for 15 minutes and then seek medical treatment If the exposure was to a hydrofluoric acid containing solution the rinsing should only be for 5 minutes followed by liberal application of Calcium Gluconate Gel to the affected area followed by medical treatment Users affected by chemical burns should not worry about any chemical spill but instead should take care of themselves and allow someone else to deal with the spill After seeking medical attention for the exposure the user should contact the Laboratory Manager to QNF USER MANUAL R1 22 34 5 3 2014 inform them of the
34. names of staff in charge for each tool 13 3 3 If unable to determine which staff member to contact please email nclay upenn edu 13 4 Retraining and or qualification may be required if a User has not used a specific facility for a long period of time It is the decision of QNF staff to determine the need for retraining and qualification 13 5 Equipment Training and Certification 13 5 1 You must contact a QNF staff member or qualified user in charge of the tool in order to complete this step Qualification consists of operating the tool under the supervision of the QNF staff member or qualified user in order to confirm training Upon the completion of training and qualification User status will be granted for that particular facility or tool 13 5 2 Please note that certain facilities tools require that initial sessions by those with User status either be operator assisted or limited to normal business hours The QNF staff member in charge of each tool has the final authority over granting QNF_USER_MANUAL_R1 26 34 5 3 2014 13 5 3 User Status and when any initial session requirements are met 13 5 3 1 Become a General Nanofabrication Facility User 13 5 3 2 Complete training 13 5 3 3 Complete certification 13 5 3 4 Gain access if applicable to equipment that requires on line reservations 13 6 Please note the following 13 6 1 Only certified Users are allowed to schedule and use equipment 13 6 2 An official certificat
35. nches in two groups those that require a face shield and those that require full personal protective equipment 9 1 1 All benches in the Wet Process Bay require full PPE personal protective equipment which consists of a face shield apron and heavy nitrile gloves 9 1 2 All other QNF hoods e g lithography and PDMS which require a face shield 9 2 All chemicals brought into QNF require approval by the Laboratory Manager and must have a valid MSDS materials safety data sheet 9 2 1 Chemicals cannot be brought into QNF from the pre gown entrance Hazards are too great for injuring many people if a spill occurs 9 2 1 1 If you must bring a chemical in QNF please contact a staff member and meet them at the West Loading Dock adjacent to LRSM 9 2 1 2 The staff person will bring the chemical s to a designated spot in the cleanroom for you 9 2 2 If shipping approved chemicals to the QNF from elsewhere it is important that they are shipped following all Department of Transportation DOT laws for hazardous shipments 9 2 2 1 This generally requires that the person packaging the material has received official DOT training for shipment of hazardous materials 9 2 2 2 Users should check with EHRS for more information regarding shipping chemicals 9 3 Chemical transport within a bay in the cleanroom is permitted without the use of chemical bucket If transporting a chemical from one bay to another bay in the cleanroom a chemical buck
36. operating and safety rules of the facility or endangering the safety of themselves or other users may have their access restricted suspended or revoked at the sole discretion of the management 1 4 2 Users are expected to be awake and alert at all times while in the facility labs 1 4 2 1 Sleeping in any of the labs will result in a suspension of lab access 1 4 2 2 Additionally running in the lab rough play or other disruptive actions will not be tolerated and may result in suspension of lab access 1 5 Safety is an overriding concern in all QNF laboratory activities All operations must be undertaken with the safety of both the individual user and other users as the primary consideration 1 5 1 Asa general rule anyone violating any safety rule or otherwise compromising his or her personal safety or the safety of others will be denied access to the laboratory 1 5 2 Suspensions may be for several days a week or permanently These suspensions are at the sole discretion of the facility management Ignorance of the rules lack of common sense language difficulties carelessness and being short on time are not adequate excuses for unsafe behavior 1 5 3 In general if a user is not certain on what the proper procedure is for something it is better to stop and ask staff than to try and guess what to do 1 6 For the most part rules on chemical use are formulated on the basis of basic chemical knowledge the properties of individual
37. or of the Silverstein Pavilion 34th and QNF_USER_MANUAL_R1 15 34 5 3 2014 Spruce St in the Hospital of the University of Pennsylvania All others should report to the Emergency Room located on the ground floor of the Silverstein Pavilion at the Hospital of the University of Pennsylvania Please see the special procedure related to Hydrofluoric Acid exposure Please take some time to identify the shortest route to take in case you need medical evaluation If you are in doubt as to what to do please call University Police at 511 for assistance After 5 00 pm and during weekend and holidays all users should report to the Emergency Room located on the ground floor of the Silverstein Pavilion at the Hospital of the University of Pennsylvania If there is a Facility problem such as a water leak strange noise smell etc please notify QNF staff If a staff member cannot be reached please contact the Building Manager M F 7 30 am to 6 00 pm or 215 746 6620 after hours Depending on the nature of the situation it may also be appropriate to call EHRS 11 1 First Aid for Minor Incidents 11 1 1 Remember 511 People often become so involved in the unfolding emergency situation they forget that help is a phone call away Initial response to an emergency event is dictated by the emergency Evaluate any situation before attempting to give aid Nanofab users should not expose themselves to hazardous atmospheres chemical contact or other dangers whi
38. plates in the lithography areas should only be used for the baking of resist on substrates 9 15 4 When using a hotplate users are required to be present in the facility or have someone designated to watch over the hotplate if they need to step out for a moment The user should be actively checking on the material on the hotplate using a thermocouple to monitor the solution temperature to make certain that the chemical is not heated to a dangerous temperature This is especially important as the material is being heated up to the operating temperature as small solution volumes can quickly heat up to a dangerous temperature 9 15 5 Only glass containers should be used on hotplates no matter what temperature the material is being heated to Due to this requirement hydrofluoric acid QNF_USER_MANUAL_R1 14 34 5 3 2014 solutions are never to be heated on hotplates in the facility 9 16 Spinners 9 16 1 Require a separate training 9 16 2 Users need to leave spinners as clean as they found them Before use you may want to line bowl with foil Do not apply more resist than required 9 16 3 Never squirt solvent down a spinner shaft 9 17 All acids and bases are disposed of by aspirating chemicals from beakers 9 17 1 Rinse the aspirator surface exposed to chemicals when done 9 18 All solvents are disposed by pouring waste into cup sinks 9 19 All rinse water can be poured into the deep gooseneck sinks 9 19 1 Never dispose of rinse wa
39. pment site promptly as a delay of greater than 30 minutes will count as a no show If a user realizes that he she will not require using the equipment he she reserved the reservation must be cancelled before the hour it is reserved for It is encouraged that users cooperatively share equipment usage time Users are not allowed to schedule equipment time for another user in their own account name This means that you should not sign up for equipment in your name QNF_USER_MANUAL_R1 28 34 5 3 2014 with the intent of giving the time to another user even though it is a member of your group 14 4 Below are common violations penalties and explanations associated with various Nanofab infractions Please note these examples are included for reference but not limited to the range of infractions that may be encountered Violation Granting access to an unauthorized user to use equipment or enter the facility Penalty Suspension from the Nanofab for up to three weeks Explanation Without consent of the Laboratory Manager no user can grant access to an unauthorized user to use equipment or the facility without his her constant supervision The authorized user must be present the entire time the other user wants to use that equipment Violation Using equipment with someone else s access privileges without being an authorized user and or not under supervision Penalty Suspension from the Nanofab for up to three weeks Explanation A user is no
40. s 11 13 1 Inhalation 11 13 2 Contact with skin or eyes QNF USER MANUAL R1 18 34 5 3 2014 11 13 3 Ingestion 11 13 4 Injection 11 14 Toxicity information is available on the material safety data sheet of each chemical Chemicals in the Nanofab are EXTREMELY HAZARDOUS The Nanofab contains some of the most dangerous chemical categories including strong acids and bases corrosives and flammables Appendix 1 lists some common hazardous chemicals used in the lab and their concentrations These concentrations necessary for nanofabrication and microfabrication are much higher than those found in conventional undergraduate labs and can cause severe damage to human tissue Therefore Nanofab users must be alert and cautious when using these chemicals to avoid all contact with them 11 15 Acids have a pH of less than 7 Chemicals can be identified as acids if they have a name ending in acid or if their chemical formula is of the form HX aq or HaXbOc 11 16 Bases have a pH of greater than 7 Chemicals can be identified as bases if they contain hydroxide OH carbonate CO3 or hydrogen carbonate HCO3 anions Ammonia NH3 is also a base Caustic is another word for a base which may also be referred to as alkalines 11 17 Corrosives have the tendency to cause deterioration of metal surfaces Strong acids and bases are corrosives Corrosives are chemicals which erode the skin and the respiratory epithelium and can be ver
41. s for disposal Do not vacuum any waste or liquids 13 Equipment Utilization 13 1 You must be a Nanofabrication Facility User before becoming a Specific Tool User Training for all QNF facilities and tools will be conducted by QNF staff or qualified QNF Users However final certification may be required by a QNF staff member Training and qualification are both required to gain User Status for a particular facility or tool Prospective equipment users need training from QNF staff 13 1 1 A first time user is encouraged to observe the equipment operation from qualified group mates or users prior to official training Internal users should do a pre training by observing usage from an already qualified group member if possible 13 1 2 Formal training for an internal and external user needs to be done with one of the staff in charge of that tool Training consists solely of observation 13 2 Only Users qualified by QNF technical staff or other qualified QNF user are allowed to use QNF equipment An official QNF qualification is required even if the person is a qualified user of a similar tool at another facility or institution 13 3 Training includes the observation of facility tool operation 13 3 1 Certification is the verification of training by QNF staff or qualified user observing the User operate the facility or tool 13 3 2 Official training will be conducted by assigned QNF staff or qualified user please check QNF website for
42. se the rubber chemical bucket 9 7 2 All chemical containers moved outside of a hood must be sealed with a screw top lid Open containers or containers with unattached lids may not be carried around the lab even if they only contain water 9 8 Users must not open a new bottle until the old one is empty 9 8 1 When a chemical bottle is emptied it must be thoroughly rinsed before disposal in the chemical bottle trash 9 8 2 An automatic bottle washer located in the General Chemistry aisle is available for this function 9 8 3 Instructions on the use of this system are covered in the orientation If the system is offline for any reason users are still responsible for rinsing bottles manually at the sink 9 9 Chemical bottles that contained chlorinated solvents like methylene chloride must also be rinsed with isopropanol to get rid of the residual material before being rinsed with water 9 9 1 Chemical bottles that contained a polymer solution photoresists spin on glasses etc need to have the polymer material completely rinsed out of the QNF USER MANUAL R1 13 34 5 3 2014 container before it can be disposed Users must determine the correct solvent to do this and into what waste bottle the solvent rinse should go into 9 9 2 In many cases Acetone is not the correct solvent for this 9 9 3 Contact the staff responsible for that area of the lab for assistance in the proper solvent choice 9 10 Everything in a wet bench mu
43. st be labeled even rinse water 9 11 Attach a cleanroom sticky note to on the lid on each container 9 11 1 Do not use cleanroom wipers for labels 9 11 2 A proper label consists of the chemical name user name and date An example 9 11 2 1 Acetone Joseph Millitorr 12 21 2014 9 12 Every container requires a lid even rinse water The labware should be made of the appropriate material and just large enough to easily work with the samples to be processed Do not use containers that are too large for the samples as this will use more chemicals than needed and create more waste to dispose Disposal costs for chemicals are often much more than the original chemical costs so users should try to minimize wasteful use of the chemicals 9 13 Wet benches exhaust fumes from the cleanroom Do not place any part of self inside bench except for gloved hands and forearms 9 14 Benches are equipped with nitrogen aspirators and deionized water 9 15 Hot Plates 9 15 1 Allow hot plates to warm before use With the exception of lithography hot plates turn off after use Do not heat containers of solvents on hotplates Use heated baths 9 15 2 Hot plates may seem to be a very basic piece of lab equipment but they can be very dangerous if used in an improper manner with the chemicals in the facility Hotplates are tightly controlled at the facility due to the risk of being left unattended and creating a hazardous situation or fire 9 15 3 The hot
44. t allowed to use equipment without being an authorized user for the equipment He she can only use the equipment under the full supervision of an authorized user Violation Allowing an authorized unauthorized user to run equipment under your name without supervision Penalty Suspension from the Nanofab for up to three weeks Explanation No user can grant access to another user authorized or unauthorized to use equipment without his her constant supervision The authorized user who has access to the equipment must be present at the equipment the entire time the other user wants to use that equipment Violation Using equipment reserved for another user Penalty Suspension from the Nanofab for up to three weeks Explanation A user is not able to login to any equipment reserved by another user for the first 30 minutes of the first hour the equipment is reserved If the person who reserved it does not show up in the first 30 minutes any other authorized user can use the machine after that time If a user s run exceeds his her scheduled time the next user who has reserved the equipment should reach a compromise with the previous user The machine belongs to the user who reserved it and it is entirely his her decision to allow or disallow the previous user from using it The user should however be careful in allowing the previous user to continue using the equipment as he she faces the risk of violating a Nanofab policy Also after 30 minut
45. t will be created or updated for them to allow for advance time reservation by the User with User Status If this is their first such qualification they will receive their account information and password from QNF or via PennKey 13 6 14 Some facilities required initial assistance In those instances the QNF staff member must reserve the time 13 6 15 Users are prohibited from scheduling time for another user even if they are members of the same research group or have the same affiliation 13 6 16 All Users are prohibited from giving out their Scheduling Tool User Name and or Password for use by other users or from giving other users access to their PennKey or generic facilities access card for any card reader access controlled QNF QNF USER MANUAL R1 27 34 5 3 2014 facilities QNF reserves the right to deny future access to any User in the event of a willful breach of this policy 13 6 17 It is allowable for a User to have other students group members enter facilities for observation or training purposes provided that prior arrangements have been made with the Laboratory Manager 13 6 18 Observation and training both mean watching but not touching Anyone actually using operating a QNF tool must be a fully qualified User 13 7 Facility amp Equipment Logs when applicable 13 7 1 Users are required to properly and accurately enter all information requested in facility tool logbooks 13 7 2 Users are required to PRINT their ful
46. ter in a cup sink even if it is solvent contaminated 10 Phone Utilization 10 1 There are phones located in each bay near the main clean aisle Dial 9 to reach off campus 10 1 1 Phones are intended for hazard communication and within campus communications not for personal use or laboratory business 10 2 Please refer to the emergency contact information at the beginning of this manual for emergency and non emergency contact phone numbers 10 3 Cell phones PDAs and tablets may be brought into the cleanroom 10 3 1 Ensure these items are removed from clothing and wiped down prior to donning cleanroom garments 11 Safety Considerations A Note on Emergency Response In case of a fire or medical emergency immediately call 511 from any University phone or 215 573 3333 from your cell phone Report the emergency and follow the dispatcher s instructions In the event of a chemical spill notify Facility staff If a staff member cannot be reached please call EHRS 215 898 4453 Monday through Friday from 8 00 am to 5 00 pm outside EHRS regular hours call their emergency pager at 215 308 5266 after the beeps dial your phone number and wait for a return call If your page is not answered call 511 Medical evaluation is required for all chemical exposures Students should report to Student Health Services 3535 Market Street Suite 100 Phone 215 746 3535 Faculty and staff should report to Occupational Medicine located on the 1st flo
47. themselves you become his her buddy Avoid contact with liquid on floor which may be contaminated Call 511 and demand an ambulance If the chemical spill is HF assist the victim in locating calcium gluconate Be ready to provide a dry garment Communicate to the responders that the individual was exposed to HF Document with e mail to the QNF Laboratory Manager IF YOU GET CHEMICALLS ON YOUR SKIN 1 2 Approach the nearest safety shower and pull the handle to activate it Demand help but remain under the safety shower IF A FIRE STARTS 1 2 3 4 Pull a fire alarm Evacuate the building immediately Alert others on the way out Meet at the LRSM driveway on 33 st QNF USER MANUAL R1 3 34 5 3 2014 1 Expectations of the QNF Community 1 1 Please follow procedures and use common sense QNF staff strives to make the Facility a safe and productive environment but your cooperation is essential Paying attention taking notes following procedures and treating the chemicals tools and people you encounter in the Facility with respect will aid in developing good work habits that will benefit you throughout your career 1 2 Remember that all work should be accomplished with safety as your absolute priority 1 3 Remember to always ask for help when in doubt 1 4 It is the responsibility of all users and staff to act in a professional courteous and safe manner at all times while in QNF 1 4 1 Users violating the
48. tion Damage to equipment Penalty The charges that the individual responsible for the damage will incur will be determined on a case by case basis Violation Not following proper gowning and de gowning procedures Penalty First Offense Demonstration of proper gowning and de gowning procedures Second Offense Written warning Subsequent Offense One week suspension from the Nanofab each time Violation Removing supplies and or equipment from Nanofab Penalty Suspension from the Nanofab for three weeks QNF_USER_MANUAL_R1 31 34 5 3 2014 15 Appendix A Common Acids amp Bases Utilized 15 1 15 2 15 3 15 4 15 5 15 6 15 7 15 8 15 9 15 10 15 11 15 12 15 13 15 14 15 15 15 16 15 17 15 18 15 19 15 20 15 21 15 22 15 23 15 24 15 25 15 26 15 27 15 28 15 29 15 30 Chemical Type Chemical Formula Concentration Acids and Oxidizers Acetic Acid CH3COOH 95 Hydrofluoric Acid HF 49 Hydrochloric Acid HCL 36 Nitric Acid HNO3 68 Phosphoric Acid H2PO4 85 Sulfuric Acid H3SO4 96 Hydrogen Peroxide H202 30 Aluminum Etch 80 15 3 2 Phosphoric Acid 80 Acetic Acid 15 Nitric Acid 3 Water 2 NANO STRIP Sulfuric Acid 90 Peroxymonosulfuric Acid 5 Hydrogen Peroxide 5 BOE Buffered Oxide Etch NH4 HF 50 10 Bases Ammonium Hydroxide NHAOH 25 Ammonium Fluoride NH4F 40 Potassium Hydroxide KOH 45 Sodium Hydroxide NaOH 50 Tetramethylammonium Hydroxide CH3 4NOH 25 Solv
49. with strong acids and strong bases Use of these chemicals is limited from 8 00AM to 7 00PM Monday to Friday on days when staff is present 5 1 7 2 Staff personnel are not present on University holidays weather emergencies cancellations etc 5 1 7 3 If performing hazardous work every Nanofab user should have a buddy who is qualified and present at all times on the laboratory to help in the event of an incident 5 1 8 Food and drinks are not allowed in the Nanofab 5 1 9 No smoking is allowed 30 minutes before entering the Nanofab 5 1 10 Only use pens Pencils are not allowed in the Nanofab 5 1 11 Other items not allowed in the Nanofab are books book bags and other unnecessary items 5 1 12 Nanofab users should try to avoid sneezing and coughing in the Nanofab Breathing directly on a surface or wafer should also be avoided 5 1 13 Singing whistling and chewing gum produces severe contamination and should be avoided 5 1 14 Nanofab users should not enter the service corridors except in case of emergency 5 1 15 Nanofab users should always make sure that their area is clean before they leave Nanofab users should thoroughly clean and dry the area they have used along with any tools or equipment 5 1 16 Use of earbuds headphones and playing of any music is prohibited 6 Hours of Operation 6 1 The Nanofab is open 24 7 every day of the year unless maintenance or unforeseen circumstances require closure QNF USE
50. y damaging to the eyes When inhaled the vapors of corrosives can cause severe bronchial irritation Appendix B contains a list of some of the corrosive liquids used in the Nanofab 11 18 Flammables are compounds whose vapors are easily ignitable at room temperature Flammables can be identified by looking at the MSDS sheet for the chemical 11 19 Halogenated solvents contain an element from the halogenated second to last column on the periodic table These elements are Fluorine Chlorine Bromine lodine and Astatine 11 20 Inorganic acids have chemical formulas that do not contain carbon 11 21 Non halogenated Solvents are any solvent that does not contain an element from the halogen class second from last column of the periodic table 11 22 Organic acids have chemical formulas which contains carbon QNF USER MANUAL R1 19 34 5 3 2014 11 23 Oxidizing agents are materials which gain electrons when they react with other substances This reaction may result in explosion or fire 11 24 Peroxide formation in laboratory solutions and reagents by auto oxidation has caused many laboratory accidents including unexpected explosions of residues remaining after solvent distillation Many liquid a few solid and a few gaseous organic and a few inorganic solid compounds form peroxides over time Peroxides form by the reaction of the chemical with oxygen allowed in the headspace of chemical containers once the container is opened for t
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