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User Manual Dektak 2011-05

1. 3 17 Chapter 4 Taking Measurements and Analyzing Data 4 1 Setting the Measurement 4 2 Settings on the Measurement Options 4 2 Taking a Standard Manual 2D 4 4 What Happens During a Scan 4 7 Creating an Automation Recipe that Includes Deskew Points 4 10 Appending Analytical Functions 4 13 Setting the Cursor Locations and 4 14 Applying Software 0 1 4 16 Creating a 4 18 Creating Analyzer 4 20 Using the Data Analyzer and Analysis Toolbox 4 20 Setting the Parameters for an Analysis or 4 22 selecting the Meta 4 22 Creating a VISION Reclp8 ae eke 4 22 Viewing and Analyzing Stored Dat
2. X Data Acquisition ome ume ee s Jl 0 000 0 000 0 000 4 Load 65535 52428 39321 26214 13107 0 0 99 198 297 396 Figure 4 9 Live Video of the Stylus with the Real Time Measurement Trace on the Right os O je s 2t25 gt ELAPSED TIME mum unc G Figure 4 10 Real Time Picture of the Sample During a Measurement Taken with the 3D Mapping Package Taking Measurements and Analyzing Data 4 9 Data Analysis M M 5 EA 8 4 DEM E o 0 2 4 0A 1 0 0 2 04 0 6 0 8 1 12 14 1 6 18 2 Plot Legend Limits Cursor Status Cursor Control ArrayData X Axis Label Position mm ArrayData um Width mm R 04076 48537 00953 g Y Axis M 1 0606 4 2039 0 0970 A 06531 0 6498 RPM Min Max Figure 4 11 Data Analysis Display CREATING AN AUTOMATION RECIPE THAT INCLUDES DESKEW POINTS When you are developing an Automation recipe for a production reference sample all programmed X and Y coordinates relate to the position of that particular sample as it rests on the stage It 1s unlikely that you can load subsequent samples at the exact physical location of the reference point that was used to define the Automation recipe To compensate for such skewing you can establish Deskew reference and measurement p
3. Figure 4 1 DektakXT System with an Open Enclosure Door Taking Measurements and Analyzing Data 4 1 SETTING THE MEASUREMENT OPTIONS Before taking a manual measurement or an automated series of measurements you must make selections in the Measurement Setup window see Figure 4 2 If you save these selections as a Vision recipe that you designate as the default the system will automatically apply them to every future measurement For instructions see Creating a Vision Recipe on page 4 18 NOTE If the Measurement Options window does not appear click the Measurement Setup button 41 the Ribbon Measurement Setup X Measurement Options scan Standard Scan Length 2000 um 6 5 Duration 10 Profile Hills amp Valleys 0807 Sample 3000 pts Stylus Type Radius 12 5 um Speed 200 ums Stylus Force 3 mg Additional Parameters Tower Up After Scan Use Soft Touchdown Advanced Options Data Stitching 3D Figure 4 2 Measurement Options Tab of the Measurement Setup window Settings on the Measurement Options Tab Scan Type Select from the following Standard Scan A normal scan type in which the scan 15 performed across the surface of a sample Because the tower is nulled before each scan each successive scan has its own reference point Static Tower Scan A special scan type in which the scan is performed acr
4. Data Leveling Settings 5i Leveling Type QS i S None cere Mean 50 Two Foant Linear Frt Linear amp Curvature Removal 48 Cercle Data Region for Leveling Calculabons V Use full cata set Use data between R and M Cursar Exclude data between R and M Cursor Cursor Pasitiareng 44 __ Label Position mm Width mm CET CN Ej 0 0000 a 22009 421 1 I 1 1 1 I 1 1 T 0 02 0 04 0 206 04 0 13 0 14 yi6 118 03 0 22 iB 4 4 0 44 0 48 AB 0 5 Use Terms Mask Edat ask Cursor Status Array Data Label Postion mm Wielth R gospa A3 5505 0000 M 0 1602 432077 000000 8 010905 04330 Figure 4 22 Data Leveling Pop up Menu Taking Measurements and Analyzing Data 4 17 CREATING A DATABASE NOTE Every time you change the selection of analytical functions that you want to log you must create a new database To create a database 1 Select the analytical functions cursor positions and analyses and filters that you want to include in this database 2 Click the Database Setup button and then click Create New File Create New File A Save window appears Enter a name for your database and then click Save 3 As shown in Figure 4 23 the Database Setup View window appears The currently selected analysis flow is available from nested expandable lists
5. DektakXT Stylus Profiler e User Manual Innovation with Integrity STYLUS PROFILER USER MANUAL P N 980 365 2011 Bruker Corporation All rights reserved Printed in the United States of America May 31 2011 COPYRIGHT NOTICE The reproduction transmission or use of this document or its contents is not permitted without express written authority Offenders will be liable for damages All rights reserved All configurations and specifications are subject to change without notice TRADEMARK NOTICE Vision64 is registered trademark of Bruker Corporation All other brand or product names are trademarks or registered trademarks of their respective holders Bruker Nano Surfaces Business 2650 East Elvira Road Tucson Arizona 85756 Phone 520 741 1044 Fax 520 294 1799 Bruker Corporation Statement of Limited Warranty This product is covered by the terms of the Bruker Corporation standard warranty as in effect on the date of shipment and as reflected on the Bruker Order Acknowledgement and Quote While a summary of the warranty statement is provided below please refer to the Order Acknowledgement and or Quote for a complete statement of the applicable warranty provisions In addition a copy of these warranty terms may be obtained by contacting Bruker WARRANTY Seller warrants to the original Buyer that new equipment will be free of defects in material and workmanship for a per
6. 5 Standard Scan Stylus Force 3 mg Range 6 5 um Length 2000 Duration 10 0 sec Profile Valleys 1 7 Resolution 0 667 pm pt Stylus Type Radius 12 5 um gt Sample 3000 pts 6 7831 mm 8 1372 Additional Parameters W Tower Up After Scan 3D Map Y Extent Y Resolution 0 Number of Traces 0 um pm trace Re null Tower Yes No Advanced Options Number of Measurements Data Auto Save Prompt Before Overwrite Starting Measurement Number 5 Auto Save File Name Data 6S OPDx Browse Insert Macro Title Note Data Stitching Settings Overlap Length Delay After Each Measurement Use Soft Touchdown msec Overlap Method Average Replace Figure 3 4 Vision64 Instrument Tab Including the Live Video Display POWERING DOWN THE SYSTEM IMPORTANT SAFETY INFORMATION The DektakXT system is equipped with a red EMERGENCY button located on the EMO Box connected to the back of the profiler see Figure 3 4 You may place this box in any convenient and readily accessible location Pressing the EMERGENCY button immediately shuts off power to all system components excluding the computer monitor and power supply adapter The 24 VDC control circuit in the EMO Box also remains energized After y
7. Select your analyses and filters in the Analysis Toolbox as explained in the next section Click the Open Database button at the button of the Database window and then open the database that you want to associate with this Analyzer Recipe On any Ribbon tab select Save gt Analyzer Recipe To make this Analyzer recipe a part of the currently open Vision recipe select the Default Analyzer check box on the toolbar on top of the Data Analyzer Using the Data Analyzer and Analysis Toolbox An Analyzer recipe is associated with each dataset and appears in the Data Analyzer see Figure 4 26 whenever that dataset 1s active An Analyzer recipe consists of the name of the active dataset the dataset type for example Surface Height the Raw Data analysis and any other analyses and filters that have been selected in the Analysis Toolbox see Figure 4 27 4 20 Data Analyzer X 5 4 TestlDektak OPDx 4 Surface Profile 4 kar Raw 4 r Profile Filter Profile Stats Figure 4 26 Data Analyzer Taking Measurements and Analyzing Data Below Data Analyzer the Analysis Toolbox contains all of the analyses and filters that be applied to a dataset see Figure 4 27 Analysis Toolbox 1D Analysis Bearing Histogram Profile Stats Step Detection Stress Trace 1D Filter T Micro Form Filter Profile Filter F Terms Removal F Operator Figure 4 27 Analysis Toolbox To apply an
8. cum 47 4 SQ 546414 mco Measurement Pause Cancel Open Save CopyTo Print Help Brukercom Advanced StylusForce Vertical Reset Measurement Automation Data Windows Reset Y Clipboard d Setup Calibration Calibration Dektak Setup E Acquisition 5 Data Analysis X Data Analyzer Contour cD 794 3Di amp Bearing is Histogram PN AutoCorr 74 APSD 6 PSD Combo Plots 2 1 00 1 00 41 5 X Profile 1 002 mm 50 Delta X mm 1 990 Z um 10 605 m 4 SolarMapScan TB OPDx 4 Surface Height M Be Raw Mw vw v Y NM VAM 101 u 107 z 40 v 28443 14728 deg 35 VL 7 30 21 bw ne n a 0 0 0 5 1 0 1 5 mm Y Profile 0 998 mm Delta _Yimm 1 999 _ Z um 1 440 m Analysis Toolbox Y M 2D Analysis 50 JE E 4 ameters Functional ameters Height eters Hybrid VASA ety v un DAT UN wy sr wre I css Surface Area 9 Trace Analysis 35 0 0 0 5 10 1 5 m V Parameters Volume 2D Filter 77 Data Fill f Data Restore 77 Fourier Filter cal standard 3D OP f Remove Modal Tilt Ready Figure 2 15 2D Contour Plot Generated with the 3D M
9. see Chapter 5 of this manual For full instructions on using the Vision64 software see the DektakXT online Help Vision WWWAOHIK T aX5 COIT Broker Corporation Figure 2 11 The Vision64 Welcome Screen System Overview 2 7 Figure 2 12 Output Display for Single Scan Measurement OPTIONS AND ACCESSORIES A number of options and accessories are available for the DektakXT system including A video monitor that provides a 23 inch high resolution flat panel color display see Figure 2 13 It shows programs and graphics in full color along with a color video image of the sample surface from the USB camera in the tower assembly Figure 2 13 Video Monitor The X Y auto stage described in Stage Configurations on page 2 2 A broad line of calibration standards see Figure 2 14 2 8 System Overview Figure 2 14 Step Height Standard A variety of styli for measuring fine surface features and softer samples Stress Measurement for calculating tensile or comprehensive stress on processed wafers The 3D Mapping Option that enables true 3D mapping see Figure 2 15 calculates the bearing ratio and performs many other analyses 200 mm 7 8 inch data stitching software for increasing the scan length to 150 mm or longer with multiple stitching operations available only on systems that include the X Y auto stage 2 Instrument Analyze Preferences 4 w 1
10. set Enable Data Logging to True and then click OK A database file is now generated for each scan measurement see Figure 4 25 ar CT Darm P ipanarmas bass x L J 583 nip aJ Porc LETEN 44 gt es 3 1 pau n ies E Figure 4 25 Data Analysis Display with Open Database Window Taking Measurements and Analyzing Data 4 19 An Analyzer recipe contains your selected analytical functions 2D analyses and filters If your system includes the 3D mapping package it also contains the default plot and 3D analysis filter flow IMPORTANT The Analyzer recipe that is open when you save a Vision recipe becomes part of that Vision recipe This means that the analyses and filters that it contains will automatically be applied to every future dataset For more information see Creating a Vision Recipe on page 4 22 To create an Analyzer recipe 1 2 Take a new scan measurement Select your analytical functions and cursor bandwidth settings as explained in Appending Analytical Functions on page 4 13and Setting the Cursor Locations and Bandwidths on page 4 14
11. 9 Environmental Enclosure with the Door Closed EMO Box An Emergency Machine Off box EMO Box includes POWER OFF and POWER ON buttons along with an EMERGENCY OFF button see Figure 2 10 The EMERGENCY OFF button cuts off power to the DektakXT system but leaves power on to the computer and monitor After the EMERGENCY OFF button has been depressed the power cannot be returned to the system until it has been released This is accomplished by turning it clockwise by one eighth turn 2 6 System Overview Off EMO button Power On button Power Off button e Figure 2 10 EMO Box COMPUTER AND SOFTWARE The DektakXT system can include the optional DellTM computer keyboard mouse and DVD drive If you prefer to used your own preferred computer it must fill the following requirements gt The computer must be capable of running the Windows operating system The monitor must have a 6 x 9 aspect ratio and minimum display resolution 1920 x 1080 The pre loaded Vision64 measurement and analysis software see Figure 2 11 has 64 bit parallel processing architecture It allows you adjust the system illumination position a sample under the stylus take single scan or automated measurements see Figure 2 12 calculate analytical functions apply analyses and filters and perform special operations such as comparing the analytical results from multiple scans For an introduction to Vision64
12. accelerates measurements by reducing the time between scans This allows for the generation of large 3D maps or long scans for measuring stress Electronics The DektakXT system includes a power supply adapter with an input voltage 100 240 VAC see Figure 2 5 This unit sends power to the various system components System Overview A signal processor provides monitoring and control of signal stylus force coil stage motor and LED illumination see Figure 2 6 An integrated cable connector panel handles system input output and power signals Power demand is 110 VA maximum with a standard outlet power connection Figure 2 5 Power Supply Adapter Figure 2 6 Signal Processor Base Feet The standard urethane polymer base feet see Figure 2 7 help isolate the system from the surrounding vibrational environment Figure 2 7 Standard Base Foot System Overview 2 5 The optional passive pneumatic isolation feet see Figure 2 8 accept compressed air or nitrogen These feet can be used place of a large vibration isolation system Figure 2 8 Isolation Base Foot Environmental Enclosure The acrylic environmental enclosure see Figure 2 9 protects the sample and scan area from adverse outside influences such as noise vibrations dust and air currents The front door lifts to provide sample access The system should always be operated with the enclosure door closed i Figure 2
13. doing this appear after the figure Basic Operations and Maintenance 3 7 AY SEI Figure 3 10 X Y Stage Control Panel To set the X Y position of the motorized sample positioning stage 1 Inthe X Y Control Panel in the Live Video Display see Figure 3 10 click the blue Gear icon in the upper right corner to enter the select the units as well as the speeds for Fast Medium and Slow see Figure 3 11 If you select the Grab Circle to Move check box you must grab the red circle in the middle of the X Y Control Panel before you can adjust the X Y position of the motorized stage When your settings are complete click OK XY Options Display Units Millimeter Fast Speed 15 mm s Medium Speed 7 5 mm s Slow Speed 1 Imm s Grab Circle To Move Show Stage Rectangle OK Cancel Figure 3 11 Options Dialog Box 2 Inthe lower right corner click the speed at which you want the stage to travel 3 Do one of the following Holding down the left mouse button drag the red dot in the center of the cross hairs The dot becomes an arrow that you can drag with the cursor The real time X and Y positions of the stage appear in the boxes 3 8 Basic Operations and Maintenance at the lower left Click and drag to move the stage to another area of interest and display it in the Live Video Pane When you have obtained the correct stage position release the mouse bu
14. in the upper right corner A table to the left shows the parameters in the currently active database whose path appears above the table DatabaseSetupView 4 Current Analysis Flow Profile Stats AuteSelection Result Analysis Name Display Units CA rogram Data ruken Vision Database KT 1 CursorPosition Total P ASH Profile Stats Segment 1 Total Profile 4 Segment 1 b Settings Total_Pa ats Segment 2 Total Profile 414 4 Total Profile Total_Pt Profile Stats Segment 2 Total Profile 41444442 Category TotalP_ASH 4 Segment 2 b Settings 4 Total Profile Units Category F Terms Removal Figure 4 23 Database Setup View window 4 18 Taking Measurements and Analyzing Data 4 following buttons appear at the bottom of the Database Setup View window Create New File Select All Analytical Results Show Pass Fail Use Template CSV move Current CS Figure 4 24 Buttons at the Bottom of the Database Setup View window 5 Click the desired button and make the appropriate entries NOTE Click Select All Analytical Results to populate the database with the current selections or analysis parameters in the Analytical Results table 6 Click OK in the Database Setup window 7 Doone of the following Toggle to Database button on the Analyze Tab to Logging Enabled Click the General Preferences button 4 on the Preferences
15. is designed to minimize potential health and safety hazards during normal operation and routine maintenance activities As with any mechanical system that uses electrical energy and compressed air it contains some physical and electrical hazards You should be aware of these potential hazards and the controls used to minimize them Review this section and contact Bruker if you have any questions on environmental health or safety related issues associated with the system Potential safety hazards associated with the system are clearly identified this manual In addition warning and safety labels have been placed on the system where there exists a potential for personal Safety Safety injury or damage to the system The following table illustrates each label describes its meaning and indicates where it appears on the system Table 1 1 Warning Safety and Compliancy Labels Illustration Location on System haane may service Ihis equipimicr Bae Tor If shock indicator is red proceed as directed on red arrow Only authorized personnel may service this equipment See this manual for safety information Indicates that only 110 120 Volts AC may be used Indicates that only 220 240 Volts AC may be used Pinch point hazard Keep hands clear Warns against nan compliance with safe waste disposal procedures for electrical and electronic e
16. swab to remove any dust You may also use a small soft bristle paintbrush Do NOT use an air gun CAUTION N Dispose of wipes in an appropriately labeled solvent contaminated waste container 3 16 Basic Operations and Maintenance ELECTRONICALLY CONFIGURING AND CALIBRATING THE PROFILER WARNING Most of the settings available from the icons in the Configuration section of the Instrument toolbar should NOT be changed by the user without help from Bruker Customer Service To reach Bruker Customer Service call 800 873 9750 To change the DektakXT hardware configuration settings 1 On the Instrument tab of the Ribbon in Vision64 click one of the following icons to open its associated dialog box 4 i x Advanced Stylus Force Vertical Reset Setup Calibration Calibration Dektak Figure 3 26 Configuration and Calibration Buttons the Instrument Tab Click Advanced Setup to open a dialog box that allows you to make the settings for Soft Touchdown which controls the gradual increase of the stylus force to a specified value and Tower LVDT Phase and Force which controls the production and processing of the electrical signals that correspond to surface variations of the sample Call Bruker Customer Service for help in making your settings When you are done click OK The Stylus Force Calibration wizard guides you through the process of calibrating the force with which the stylus tip contacts the s
17. the number of data points that the system should take on the sample during a measurement Speed Indicates the scan speed in units of um s Tower Up After Scan Select this check box to make the DektakXT stylus profiler automatically raise the tower ti a safe position after each scan Use Soft Touchdown If your system includes the 3D Mapping Option select this check box to make the DektakXT stylus profiler increment the stylus force up to the specified value This causes the stylus to descend more slowly thus minimizing the possibility of scratching the sample Taking Measurements and Analyzing Data 4 3 NOTE For instructions on making the settings on the Advanced see Creating Automation Recipe that Includes Deskew Points on page 4 10 For instructions on making the settings on the Data Stitching and 3D Map tabs see your Vision64 online Help TAKING A STANDARD MANUAL 2D MEASUREMENT 4 4 The most common measurement performed on the DektakXT system is a Standard manual 2D measurement which consists of a single trace along the sample in the Y direction that is along the front to back axis When the scan is complete Vision64 provides an output of the two dimensional trace describing the height of surface features with an interactive Z versus Y plot The length of the trace that you can define depends upon the DektakXT stage that is installed For a DektakXT system with the manual 150mm X Y stage the standard sc
18. the sides align the alignment pins on its top with the outside of the front of the sensor head see Figure 3 19 Gently push up until the tool is flush with the bottom of the sensor head The ridge at the back of the stylus exchange tool must roughly line up with the back of the sensor head Sensor head Alignment pi Stylus tip Stylus exchange too Figure 3 24 Stylus Exchange Tool Flush with the Bottom of the Sensor Head WARNING Avoid any personal contact with the stylus arm or tip This can result in damage to the stylus 8 Disengage the magnet by rotating the thumbwheel in either direction so that a gray circle replaces the green one 9 Lower the stylus exchange tool 10 Position the magnetic shield the thumbscrew shaft on the left side of the sensor head Basic Operations and Maintenance 3 15 11 Turn the brass thumb screw clockwise to attach the magnetic shield as shown Figure 3 25 Do tighten the screw just snug it Brass thumb screw on sensor head Magnetic shield Figure 3 25 Sensor Head with Magnetic Shield Attached CLEANING THE STYLUS TIP 1 Tower up to the Home position t 2 is a sample on the chuck or stage remove it 3 Clean the stylus tip using a lint free synthetic cotton swab which will not leave any fibers on the stylus Moisten the swab with deionized water or laboratory grade isopropyl alcohol Lightly touch the stylus tip with the synthetic cotton
19. you take a manual measurement or an automated series of measurements To select analytical functions El 1 Onthe Ribbon click the Data Analysis icon 2 With the live measurement results open right click the Analytical Results pane the Data Analysis window The following pop up menu appears Append Delete Delete All Change ID Export Analytical Results Figure 4 16 Analytical Results Pop Up Menu 3 Select Append The following window appears Taking Measurements and Analyzing Data 4 13 Total Profile Primary Profile Height Hybrid Geometry E Pa gt ASH E Pdq E Area Volume E Avg Height C Slope Perim E Psk E pv E Radius Spatial E Pe E Discrimination Settings Height 10 Pz Spacing 1 75 Sampling Length Zero mean data before calculating parameter s Use the same settings for raw primary roughness and waviness Cursor Positioning Label Position mm Width mm R 0 0000 0 0000 1 9993 0 0000 1 1993 Calculate Close Figure 4 17 Analytical Functions window 4 Select your analytical functions and then enter the positions and bandwidths of the cursors that define the area in which the analytical functions should be calculated 5 Click Calculate SETTING THE CURSOR LOCATIONS AND BANDWIDTHS The red reference R cursor and green measurement M cursor in the Data Analysis Display define the portio
20. 3D Map Figure 4 8 Live Video Display Showing the Descending Stylus and Its Shadow After the stylus tip contacts the sample surface it begins to scan over the surface features The Live Video Display shows a real time image of the stylus along with a measurement trace of the surface in the Data Aquisition window to the right see Figure 4 8 It also provides the vertical and horizontal distances between the cursor trace intercepts and the distances from the vertical and horizontal zero grid lines NOTE If your system includes the 3 D Mapping package or if the scan is set for Hill or Valley the process described above is somewhat different For example during a measurement with the 3D Mapping package a real time picture of the sample appears during data collection see Figure 4 9 After the scan measurement is complete the Data Analysis Display appears see Figure 4 10 The surface features encountered by the stylus are represented as a two dimensional profile To the right the output display shows a list of the scan parameters along with any user requested analytical results If you have created and activated a database that database appears beside the Data Analysis display see Figure 4 25 At the end of the scan measurement the tower and stylus automatically move back to their starting positions and the system is immediately ready for the next measurement 4 8 Taking Measurements and Analyzing Data
21. Analyzing Data 4 15 APPLYING SOFTWARE LEVELING 4 16 Software leveling allows the system to quickly and automatically level the profile trace You must software level the stage in order to obtain accurate step height measurements and accurate readings from analytical functions Software leveling sets the reference and measurement cursors at zero to establish a reference for measurements To software level a trace from a live measurement in the Data Analysis window 1 Click Terms Removal F Operator the Analysis Toolbox see Figure 4 20 to add it to the Data Analyzer tree see Figure 4 21 Analysis Toolbox X 2D Analysis i Bearing Histogram Profile Stats Step Detection Stress Trace 2D Filter a T Micro Form Filter Profile Filter Terms Removal F Operator Figure 4 20 Terms Removal F Operator in the Analysis Toolbox Taking Measurements and Analyzing Data Data Analyzer Default Analyzer 4 Standard Scan 11 18 19 4 Surface Profile 4 FL Scan 4 Profile Filter Profile Stats 0 r t Terms Removal F Operator Figure 4 21 Terms Removal F Operator in the Data Analyzer Tree 2 Position the R and M cursors as far apart as possible along the baseline of the step 3 Right click and select Two Point Linear Fit rom the Data Leveling Settings pop up menu see Figure 4 22 4 The profile trace re plots and levels with the R and M cursor intercepts at zero
22. Measurement Figure 4 5 Measurement Buttons 13 Observe the measurement in real time in the Data Acquisition window If the scan hits or exceeds the top or bottom border of the Data Acquisition window adjust the tilt on the scan stage see Figure 4 6 and or increase the Scan Range value in the Measurement Options window 4 6 Taking Measurements and Analyzing Data Stage leveling knob Figure 4 6 Stage Leveling Knob 14 Atthe end of the measurement the Data Analysis window appears see Figure 4 6 If desired click Save Dataset 5 2 t O QO 47 a SOF K IP ES z Measurement Pause Cancel Open Save Copy To Print Help Bruker com Advanced Stylus Force Vertical Reset Measurement Automation Data Windows Reset M M Clipboard M Setup Calibration Calibration Dektak Setup Setup Acquisition M Analytical Results Label Value R Pos R Width M Pos Total ASH 87 624 nm 53 103 um 27 065 um 0 121 mm 37 343 un Total 1 202nm 0 102 mm 27 065 um 0 278 mm 37 343 un Total Pt 17 146 nm 0 102 mm 27 065 um 0 278 mm 37 343 un 4 f Terms Removal F Operator Profile Stats 4 Surface Profile Analysis Settings Total Profile Primary Profile Roughness Profile Waviness Profile Other Height Hybrid Geometry Pz ASH E Area Pp E Avg Height Slope Pv Radius Pt Wat
23. The light bar at the back of the profiler Illuminates The red LED lights on the scan stage limit switches illuminate 6 Press and release the power button on the front of the computer 7 Turn on the monitor and power up the computer 8 Select Start gt Vision64 or click the Vision64 application button on the desktop or task bar As the software launches the following events occur The tower assembly moves to its upper limit The system stops with the stylus in the Tower Up position The scan stage initializes You can now safely position the sample beneath the stylus The Vision64 Welcome screen appears followed by the Vision64 Instrument tab which includes the DektakXT Live Video Display see Figure 3 4 9 Allow the system to warm up for approximately 15 minutes before taking a scan measurement 3 2 Basic Operations and Maintenance 1228 LEN Instrument Analyze Preferences g Ry 1 O SP 212499 551 a BOF 4 46 Measurement Pause Cancel Open Save Tower Tower Tower Stylus Home Unload Configure Stylus Force Vertical Reset Copy To Print Help Bruker com Automation Data Data Windows Reset M M Down Up Home Scanner Scanner Hardware Calibration Calibration Dektak Clipboard m Setup Acquisition Analysis Measurement Files Control Configuration Miscellaneous urrent View Current Windows Measurement Recipe X Live Video Parameters a
24. a 4 23 Chapter 5 Using 64 5 1 Opening Vision6A 5 1 Closing 4 anaa 5 1 Important Vision64 Directories 5 2 Using the Vision64 Online 5 2 Finding a Help 5 2 Selecting WinDows for 5 3 Working With Vision VIEWS 5 3 Displaying Other Vision64 Windows 1 5 6 More Features of the Interface 5 9 Changing the Units and Other User Preferences 5 10 Table of Contents Applying Filters Performing Analyses 3D Mapping Optiion Table of Contents DektakXT system be set up and operated only accordance with the instructions outlined this manual In the chapters that follow the messages below indicate that special vigilance is required CAUTION Whenever you see a Caution note there is a possibility that data will be lost or there is so
25. a Data button on the toolbar above the Data Analyzer CREATING A VISION RECIPE A Vision recipe contains all of the information that the system needs to make a single scan measurement It also includes the Analyzer recipe that is active when you create and save the Vision recipe SO you can scan a sample and then visualize and analyze the resulting dataset with a single click To create and save a Vision recipe 1 Select a scan type and make measurement selections in the Measurement Setup window 2 Doone ofthe following To save this Vision recipe independently of the currently active Analyzer recipe click Save Vision Recipe on any Ribbon Tab To save the currently active Analyzer recipe as part of this Vision recipe select the Default Analyzer check box on the Data Analyzer Toolbar and then click Save Vision Recipe on any Ribbon Tab 3 Inthe Save As window enter a recipe name The system supplies the file extension 4 To save your settings as the default Vision recipe that the system will apply to every new scan measurement select the Set as the Startup Recipe check box on top of the Data Analyzer 5 Click Save 4 22 Taking Measurements and Analyzing Data VIEWING AND ANALYZING STORED DATA DektakXT measurement results are stored in files with an opdx extension To open one select Open gt Dataset Multiple stored datasets can be simultaneously opened and displayed in the Active Data Gallery see Figure 4 28 Click
26. a thumbnail image of a dataset to make it the active one in the Data Analysis window standard DektakXT or the Main Display Area 3D Mapping Option To apply filters and analyses to the active dataset make selections in the Analysis Toolbox For instructions see Using the Data Analyzer and Analysis Toolbox on page 4 18 To save any changes to the active dataset select Save gt Dataset TestiDektak TestDektak TestA OPDx TestLevelin Figure 4 29 Active Data Gallery Containing Multiple Stored Datasets Taking Measurements and Analyzing Data 4 23 This chapter explains basic Vision64 operations and describes the user interface For full instructions on using Vision64 see its online Help NOTE For instructions on Vision64 software features that control the DektakXT profiler see Chapter 3 OPENING VISION64 Select Start Vision64 or double click the Vision64 application button 47 the desktop or task bar The Vision64 Welcome screen appears followed by the Vision64 Instrument tab which includes the DektakXT Live Video Display Vision64 requires a software key to run see Figure 5 1 If the key 16 not installed in a USB port an error message appears If this occurs install the key and restart Vision64 Figure 5 1 Software Key in a USB Port CLOSING VISION64 Click the Exit button 125 in the upper right hand corner When you are prompted to confirm that you want to exit the pro
27. ample The Vertical Calibration wizard guides you through the procedure of taking a height or depth measurement and comparing the results with a calibration standard s certified value An average measured value that is within 0 5 of the certified value ensures that your DektakXT system is taking accurate measurements The Reset Dektak function initializes the scan stage NOTE Fora full explanation of all DektakXT configuration settings see the Vision64 online Help GENERAL CARE AND MAINTENANCE Follow these guidelines Do not use lubricants on the stage leadscrews Always position the sample so that the stylus 15 the only part ofthe stylus assembly that touches the sample Basic Operations and Maintenance 3 17 3 18 Keep the environmental enclosure door closed both when the DektakXT system is in use when it 1s not Never connect or disconnect any cables when the power 15 Do not lower the tower without the stage assembly in place Do not move a sample during a scan measurement Avoid vibration and shock during measurements For example ensure that an operator does not bump a surface close to the profiler or the profiler itself during a measurement Always raise the tower to the maximum vertical position when the system is not in use Basic Operations and Maintenance This chapter tells you how to take manual and automated scan measurements It also explains the manipulation and analysis of scan data
28. an length can range from 50um minimum to 55mm maximum For a DektakXT system equipped with an automated 150mm XY stage the standard scan length can range from 50um minimum to 200mm maximum Scan lengths from 55mm to 200mm use the DektakXT s data stitching capability which is described the online Help WARNING Always raise the tower prior to loading a sample Failure to do so can damage the stylus and sample IMPORTANT Always operate the DektakXT inside its acrylic environmental enclosure see Figure 4 1 This enclosure protects the sample and scan area from adverse outside influences such as noise vibrations dust and air currents Always operate the system with the enclosure door closed 1 Inthe Vision64 Measurement Setup window do one of the following If your system includes the X Y or theta auto stage click Unload Sample in the Live Video Display The tower moves to its full upward position and the stage moves to its full front unload position If your system includes the manual X Y stage click Tower Up in the Live Video Display and then t use the manual stage controls to bring the stage to its full front position For instructions see Chapter 3 2 Place the sample the sample fixture chuck If you are measuring a wafer this will be the vacuum wafer chuck If your are measuring a solar sample this will be the solar chuck Otherwise place the sample on the square base platform of t
29. analysis or filter click it in the Analysis Toolbox The selected operation is immediately performed on the active scan dataset In the Data Analyzer above the Analysis Toolbox the operation now appears as part of the workflow tree Analyzer recipe as shown in Figure 4 28 Data Analyzer B UM Default Analyzer 4 Standard Scan 10 08 57 AM 4 Surface Profile 4 HL Scan 4 Profile Filter Profile Stats f Terms Removal F Operator 1 Step Detection Figure 4 28 Workflow Tree that Includes Terms Removal F Operator and Step Detection Taking Measurements and Analyzing Data 4 21 IMPORTANT After you click a second analysis not a filter the Analysis toolbox goes blank because you can perform only one analysis per branch If you want to perform more than one analysis click the Profile Filter branch and then add another analysis which then becomes an additional branch of the Data Analyzer Setting the Parameters for an Analysis or Filter To set the default parameters for an analysis or filter right click its icon click Default Settings make your settings in the window that appears and then click OK The settings will now be applied during every future operation of this type Selecting the Meta Data To select the types of meta data to be stored with each dataset click the Meta Data button 9 in the Data Analyzer To view the meta data that is already associated with an active dataset click the Met
30. ance or 4 failure to perform preventive maintenance in accordance with Seller s recommendations including keeping an accurate log of preventive maintenance In addition this warranty does not apply if any equipment or part has been modified without the written permission of Seller or if any Seller serial number has been removed or defaced No one is authorized to extend or alter these warranties on Seller s behalf without the written authorization of Seller THE ABOVE WARRANTIES ARE EXPRESSLY IN LIEU OF ANY OTHER EXPRESS OR IMPLIED WARRATIES INCLUDING THE WARRANTY OF MERCHANTABILITY AND OF ANY OTHER OBLIGATION ON THE PART OF SELLER SELLER DOES NOT WARRANT THAT ANY EQUIPMENT OR SYSTEM CAN BE USED FOR ANY PARTICULAR PURPOSE OR WITH ANY PARTICULAR PROCESS OTHER THAN THAT COVERED BY THE APPLICABLE PUBLISHED SPECIFICATIONS NO CONSEQUENTIAL DAMAGES LIMITATION OF LIABILITY Seller shall not be liable for consequential damages for anticipated or lost profits incidental indirect special or punitive damages loss of time loss of use or other losses even if advised of the possibility of such damages incurred by Buyer or any third party in connection with the equipment or services provided by Seller In no event will Seller s liability in connection with the equipment or services provided by Seller exceed the amounts paid to Seller by Buyer hereunder Buyer is advised that if the equipment is used in a manner not specified by the manufact
31. and viewing 4 22 Monitor 2 7 2 8 O Online help 5 2 Optics adjusting illumination 3 5 Power and Off switches 1 2 Power supply adapter 2 4 2 5 Powering down 3 3 Powering up 3 1 Pressure hazards 1 4 R Ribbon in Vision64 5 10 Ribbon tabs 5 10 5 Safety features Emergency Off button 1 1 Power On and Off switches 1 2 Safety precautions 1 2 Sample fixtures for stages 2 3 Scanning process 4 8 Signal processor 2 5 Software key 3 1 Software leveling 4 16 Stage Configurations 2 2 Controlling the X Y auto 2 3 Controlling the theta auto 3 9 Manually leveling 3 6 Sample fixtures chucks 2 3 Using the manual positioning controls 3 6 Step height standard 2 9 Stored data viewing and analyzing 4 23 Stylus Cleaning the tip 3 16 Removing 3 13 Installing a new 3 10 IX 2 T Theta stage control 3 9 Tower assembly 2 3 Towering up and down 3 5 Turning on the system 3 1 U Units changing 5 10 User preferences changing 5 10 V Vision recipes 4 22 Vision Views 5 3 Vision64 Closing 5 1 Described 22 2 7 Directories 5 2 Elements of the workspace 5 3 Interface explained 5 1 Online help 5 2 Opening 5 1 Selecting windows for display 5 3 Starting 3 2 Vision Views 5 3 W Wafer vacuum sample fixture 2 3 X X Y auto stage manually leveling 3 6
32. apping Option System Overview 2 9 This chapter describes the basic use of your DektakXT stylus surface profiler including the software procedures that involve profiler control For instructions regarding other software procedures see Chapter 5 of this manual and the Vision64 online Help POWERING UP THE SYSTEM The following steps include all possible startup contingencies Normally you can simply press the white ON button on the EMO Box turn on the computer and monitor and then start the Vision64 software To power up the DektakXT system 1 Verify that the cable from power supply adapter is connected to a wall outlet 2 Verify that all USB cables are connected 3 Verify that the software key is installed in a USB port of the computer see Figure 3 1 The software key is shipped inside the Vision64 CD case Figure 3 1 Software Key in a USB Port 4 Verify that the red Emergency Off button on the EMO Box is the On popped up position If it is not release it by rotating it clockwise until it pops up see Figure 3 2 Basic Operations and Maintenance 3 1 Figure 3 2 Releasing the Red Emergency Button the EMO box 5 Press the white ON button on the EMO Box After you do this the following events occur The white ON button on the EMO box illuminates see Figure 3 3 Figure 3 3 EMO Box with Illuminated On Button All system devices are powered up with the exception of the computer and monitor
33. at the bottom of the right pane of the Live Video Display see Figure 3 7 Move it to the right to increase the illumination and to the left to decrease it The feature that you want to scan should be clearly illuminated NOTE When you save a Vision recipe the illumination level is automatically included along with the other measurement settings Figure 3 7 Intensity Bar Basic Operations and Maintenance 3 5 USING THE MANUAL STAGE POSITIONING CONTROLS If your DektakXT system includes the manual sample positioning stage see Figure 3 8 you must use the procedures described in this section to adjust both the X and Y positions Adjusting the X Y Position To position a sample using the manual sample positioning stage controls 1 Ensure the stylus is not touching the sample surface If it is click the Tower Up button Ec on the toolbar 2 Position the scan start site by using the X Y positioning levers Pull the lever below the front of the platform for coarse X movement Pull the lever below the left side of the platform for coarse Y movement Use the respective knobs to finely position the sample X fine positioning knob X coarse positioning Lever coarse positioning lever Figure 3 8 X Y Positioning Levers on the Manual Sample Positioning Stage NOTE After fine tuning the scan site using the X and Y positioning levers you may to re null the tower to adjust for skew To re null the tower t
34. ata Analyzer Live Video Cursor Status Label Position M 14998 lum Figure 5 10 Live Video Display 0 0000 mm 2 0 0000 mm Move Cursor Status Cursor Control Label Position mm Raw um Width m R 00542 00298 0 0000 e M 2 8387 17536 0 0000 F E om A 17845 17238 R m Active Gallery x m Test1Dektak est TestA OPDx TestLeveling Data Analysis Vision View showing the selected dataset Active Gallery showing four open datasets Figure 5 12 Active Gallery with Multiple Datasets 5 8 Using Vision64 Database 1 0 02852 0 6589 2 0 02737 0 5220 3 0 02843 0 6687 4 0 02453 0 6149 Ava 0 02721 0 6161 Std 0 00161 0 0580 Skewness 0 90764 0 7822 0 02852 0 6687 Min 0 02453 0 5220 Range 0 00399 0 1467 Pass 4 4 Fail 0 0 Figure 5 13 DektakXT Database MORE FEATURES OF THE INTERFACE Application Menu Button Use this button to open the Application Menu from which you can access the most common Vision64 application functions see Figure 5 14 Using Vision64 5 9 Measurement Single Acquisition Automated Measurement Pause Cancel Open Save Figure 5 14 Application Menu Ribbon This taskbar see Figure 5 15 provides access to all of the functions available in Vision64 Note that the most commonly used buttons are permanently displayed to the left and right of each
35. cate Database Abort Run On Error Figure 4 15 Options at the Bottom of the Automation Editor 9 Select Save gt Automation Recipe Name this recipe and then click Open 10 Select Measurement gt Automated Measurement The system automatically runs the Deskew recipe followed by the Automation recipe 11 As the measurement sequence initiates an Automation Status message appears Watch the live progress bar as the stage moves to the first location specified in the Automation recipe 12 Afterthe stylus arrives at each programmed point you must use the Live Video Display and the Instrument Control Panel above it to tower down and align that point The stylus then runs over the sample and the stage moves to the next location specified in the Automation recipe 4 12 Taking Measurements and Analyzing Data 13 At any time you can click to cancel the automated sequence 14 Atthe end of an automation run a message informs you that the system has Completed script named Script Name Click OK APPENDING ANALYTICAL FUNCTIONS After you take a scan measurement Vision64 can calculate a number of analytical functions for analysis of roughness waviness step height and geometrical measurements Frequently calculated functions include ASH delta average step height horizontal distance and vertical distance You can save your selection of analytical functions to a Vision recipe so that they are automatically calculated whenever
36. ch List Pa Label Value mm R 0 3242 1 2453 0 0 M 0 2666 87 6624 0 0 0 0576 88 9077 si Plot Legend i Cursor Status F u Total ASH 87 428 nm x Total Profile Axis Label Position mm Total Profile n Wid IE Pc 5 10 Spacing 1 Sampling Length Zero mean total profile data before calculating parameter s Use the same settings for raw primary roughness and waviness Figure 4 7 Data Analysis Window What Happens During a Scan Measurement When a measurement begins the tower assembly lowers and the stylus descends You can see the stylus and its shadow in the Live Video Display see Figure 4 7 Taking Measurements and Analyzing Data Instrument Analyze Preferences o 00 57 K nt Pause Cancel 8 Print Hel Brukercom Advanced StylusForce Vertical Reset 7 Setup Calil bra tion Calibration Dektak Files Miscellaneous onfigurat Measurement Measurement Setup Measurement Options 5 Standard Scan Range 6 5 um x uration Profile Hills amp Valleys Stylus Radius 12 5 um Stylus Force 10 mg Additional Parameters Tower Up After Scan se Soft Touchdown Advanced Options Data Stitching
37. diately stop the system In some circumstances it is advisable to have two service personnel working on a system at the same time This ensures that one person will always have access to the EMERGENCY OFF button 1 6 Safety The DektakXT stylus surface profiler is an advanced thin and thick film step height measurement tool In addition to profiling surface topography and waviness the Dektak XT system measures roughness in the nanometer range Available with a standard manual sample positioning stage see Figure 2 1 or an optional automatic X Y or theta stage see Figure 2 3 it provides a step height repeatability of 5 0 6 nm In addition to taking two dimensional surface profile measurements the DektakXT system can produce three dimensional measurements and analyses when equipped with the 3D Mapping Option Hood covered measurement ead that includes the tower camera illuminator and sensor 4 Bridge Sensor head and stylus Block sample fixture chuck Manual sample positioning stage can stage ystem base Ure MP EMI DektakXT Base foot ase foo Figure 2 1 DektakXT Stylus Profiler with the Standard Manual X Y Sample Positioning Stage System Overview 2 1 HOW THE SYSTEM WORKS The DektakXT system takes measurements electromechanically by moving a diamond tipped stylus over the sample surface according to a user programmed scan length speed and stylus force The stylus is linked
38. e exchange tool see Figure 3 18 Lower the exchange tool containing the stylus from the bottom of the sensor head and take it to the protective case in which the stylus was shipped see Figure 3 15 11 To remove the stylus from the stylus exchange tool a Disengage the magnet on the exchange tool by rotating the thumb wheel in either direction so that a gray circle replaces the green one 3 12 Basic Operations and Maintenance b Using tweezers gently grip the silver magnetic disk pad at the back of the stylus and then lift the stylus out of the channel on the stylus exchange tool c Place the stylus in its protective case with the tip pointing downward through the hole in the film in the lower part of the protective case see Figure 3 20 Figure 3 20 Inserting the Stylus Tip into the Hole in the Film in the Stylus Case WARNING Always store the stylus in its protective case Failure to do so can result in damage to the stylus INSTALLING A DIFFERENT STYLUS NOTE The following instructions assume that you have already removed the magnetic shield from the sensor head on the DektakXT profiler If this is not the case follow steps 4 6 in the previous section 1 Tower up to the Home position to allow room for maneuvering Locate the stylus exchange tool If its green circle is visible rotate the thumbscrew in either direction to disengage the magnet and replace the green circle with a gray one T
39. enance activities that require mechanical motion while the hood and base are removed Pressure Hazards Pressure hazards exist due to the difference in kinetic energy of a gas within a container or piping system and the surrounding environment If a sudden breach of a gas line or a pressurized container were to occur for example a gas delivery line bursts the pressure differential between the gas in the line and the surrounding atmosphere will cause the gas to be forcefully expelled into the surrounding atmosphere This can cause physical injuries due to particles flying outward with extremely high speed The DektakXT system uses compressed clean dry air CDA to operate the optional vibration isolation table It is designed to use CDA at the typical house supplied pressures of 50 psi The CDA fittings or components of the pneumatic system should be adjusted only after appropriate release of air line pressure As with electrical and mechanical tasks maintenance activities involving the air lines should occur only after appropriate pressure lockout procedures have been implemented see General Lockout Tagout Procedures in the section that follows INSTALLATION AND MAINTENANCE SAFETY ISSUES Certain installation activities require attention to special safety hazards in addition to the overall system hazards discussed in the Safety and Health Hazards section above The installation of the systems requires connection and adjustment of electricity a
40. for the Bearing Ratio analysis appears in Figure 5 18 5 12 Using Vision64 x Bearing Ratio Analysis Number of Bins 1000 Bearing Ratio Offsets Peak Offset ox Valley Offset ox Bearing Ratio Heights Upper tp ox Lower 1005 Figure 5 18 Bearing Ratio Analysis Dialog Box 3D MAPPING Option If your Vision64 software includes the 3D Mapping Option the user interface and workflow operate somewhat differently than described in this chapter For example the Data Visualization Taskbar allows you to quickly change the displayed plot while the Combo Plot drop down list lets you select combination plots for display see Figure 5 19 For more information about the 3D Mapping Option see your Vision64 online Help Data Analysis Contour cD 794 3Di amp Bearing Histogram lA AutoCorr PN APSD A PSD 124094 04 Combo Plots Contour and Bearing Curve Delta Contour Histogram 400 Contour and 3Di Value Units Contour Histogram and Bearing Curve Term Removal Type None 5 Contour 3Di Histogram Bearing Curve f es Contour and APSD Contour and Autocorrelation 00 Contour and PSD j Contour APSD and PSD 50 81 5 2 x 0 0 0 5 1 0 1 Figure 5 19 Data Visualization Taskbar Combo Plot Drop down List Using Vision64 5 13 Numerics 3D Mapping Option 2 9 A Analysis Toolbox 4 21 5 6 Analytical functi
41. gram click Yes Alternatively you can close Vision64 by clicking the Vision64 application button 4 taskbar followed by Close Window Vision Using Vision64 5 1 IMPORTANT VISION64 DIRECTORIES The Vision64 application directory C Program Files Veeco Vision64 holds the Vision64 executable code The directory ProgramData Veeco Vision64 holds data and configuration information for the Vision64 application USING THE VISION64 ONLINE HELP IMPORTANT Online assistance in using Vision64 is immediately available through the Vision Help menu This extensive Help system should always be your main source of information about using the Vision64 Finding a Help Topic To display Help in the Vision64 software select Help gt Help Contents see Figure 5 2 or press the F1 key to open the Help Tab Help Contents About Vision Figure 5 2 Help Button on the Vision64 Ribbon Tab You can click into another Display Tab to change the contents of the Main Display Area and then return to the same Help topic by re selecting the Help Tab The Help opens to a Table of Contents on the left and an introduction to Vision64 Help topics can be selected by clicking one of the following buttons in the left panel of the Help Tab Contents lets you browse the Table of Contents Double click on a book major heading to view its pages individual topics Double click on a page to view the topic Index lets you v
42. h the stylus For instructions see Using the Manual Stage Positioning Controls on page 3 6 and Using the Auto Stage Positioning Controls on page 3 7 Figure 3 6 Sample Loaded on the Theta Sample Fixture Chuck 3 4 Basic Operations and Maintenance Unloading the Sample When a scan routine is complete the stylus automatically lifts off the surface To remove the sample from the fixture click the Unload Sample button to make the system move the sample positioning stage forward You can now lift your sample off the fixture TOWERING UP AND DOWN You must slowly lower the tower assembly to bring the feature that you want to measure into focus in the Live Video Display To do this click the Tower Down button on the toolbar above the Live Video Display To raise the tower assembly click the Tower Up button LI To bring the tower all the way up to its home position click the Tower Home button 5 NOTE The DektakXT profiler automatically towers down to bring the stylus into contact with the sample whenever you start a single scan measurement 3D map scan or automation program WARNING The tower assembly has a total travel range of 50mm so sample heights must not exceed 50mm ADJUSTING THE ILLUMINATION After lowering the tower to focus the camera on your sample you must adjust the illumination level of the video image displayed on the monitor To do this move the slider on the Intensity Bar
43. he 65 5um is the best Profile Select from the following Valleys Provides 90 of the measurement range below the zero horizontal grid line This option is used primarily for measuring etch depths Hills and Valleys Provides 50 of the measurement range above the zero horizontal grid line and 50 below This option is used in most applications especially if the surface characteristics of the sample are not well known or if the sample is out of level Hills Provides 90 of the measurement range above the horizontal grid line This option is used primarily for measuring step heights NOTE When setting up ranges and scan profile types always think about keeping the stylus trace from topping out or bottoming out in the Data Acquistion window Stylus Type Select the currently installed stylus type from the drop down list Stylus Force Enter a value between 1 mg and 15 mg Length Enter a scan length between 50 um and 55 000 um 55 mm for a non stitched measurement Duration Enter amount of time it will take to complete a given scan Scan duration in conjunction with scan length determines the horizontal resolution of a scan For most applications a 10 20 second scan provides adequate resolution and throughput Resolution Enter the horizontal resolution for the scan length and scan duration The scan resolution is expressed in um sample indicating the horizontal distance between data points Sample Indicates
44. he scan stage itself 3 If your system includes a vacuum chuck turn on the vacuum switch 4 Inthe Live Video Display click the Load Sample button 29 scan stage moves back its home position ready for a measurement Taking Measurements and Analyzing Data 5 Click Tower Down the Live Video Display tower lowers to the measurement position with the stylus down and the stylus makes brief contact with the sample The stylus then moves to its Up position 6 If necessary adjust the Intensity slider in the Live Video Display so that the sample is clearly illuminated Figure 4 3 Illumination Bar 7 Adjust the position of the X Y or theta stage until you find the location of interest on your sample 8 Fine position the location of interest the center of the Live Video Display NOTE Since the stylus scans across the sample in the Y direction it is important to position the features of your location of interest so that they are perpendicular to the scan direction For example if you are measuring a step height standard the step must run horizontally across the Live Video Display Samples such as metals should be positioned so that the lay the predominant direction of the surface texture runs horizontally across the Live Video Display NOTE Because the scan will move in the Live Video Display the trace must be positioned above the stylus thus ensuring that it will be fully meas
45. his means that the magnet is NOT engaged as shown in Figure 3 21 Basic Operations and Maintenance Magnetic disk pad Alignment pin Gray circle tha one of five indicates that the magnet is disengaged hannelfor holding the stylus Thumbscre Figure 3 21 Stylus Exchange Tool with Its Magnet Disengaged 3 Locate the case that holds the stylus that you want to install After opening the case use tweezers to gently lift the stylus holding ONLY THE SILVER MAGNETIC DISK PAD AT ITS BACK END see Figure 3 22 Figure 3 22 Lifting the Stylus from Its Case Align the magnetic disk pad of the stylus with the magnetic disk pad on the stylus exchange tool see Figure 3 21 Seat the stylus in the channel on the exchange tool The stylus arm should extend out through the front channel on the exchange tool see Figure 3 23 3 14 Basic Operations and Maintenance 6 Rotate the thumb wheel the left side of the stylus exchange tool counterclockwise to display the green circle and engage the magnet see Figure 3 23 Magnetic disk pad on the stylus exchange tool Magnetic disk pad on the stylus Stylus arm extended out through front of Green circle indicatin channel that the magnet is engaged Figure 3 23 Stylus Exchange Tool with a Stylus Seated in the Channel and the Magnet Engaged 7 Place the stylus exchange tool underneath the sensor head on the DektakXT profiler Holding the stylus exchange tool by
46. iew search terms that can help you locate topics Type in the first few letters of the word or phrase that you are looking for The scrolling list displays that portion of the alphabetical display Double click on a topic in the list to display it Search lets you search for any word in the Help system Type the word you want to find in the field provided Then double click on a found topic to view its information Favorites displays the topics that you have previously added to a list At the top of the Help Tab Print Back Forward Home Refresh Stop and Add to Favorites buttons allow you to navigate the system 5 2 Using Vision64 SELECTING WINDOWS FOR DISPLAY Click the Windows button on the toolbar From the list select the windows that you want to display see Figure 5 3 4 Measurement Automation Data Setup Setup Acquisition Analysis E Measurement Setup E Automation Editor Live Video Instrument Control E Database Data Acquisition D ata Analysis Active Gallery Data Analyzer Analysis Toolbox Python Scripting Shell m Figure 5 3 Vision64 Window Selection Buttons and Menu WORKING WITH VISION VIEWS The Vision64 workspace can simultaneously display one or more of the following Vision View windows which appear in Figure 5 3 through Figure 5 7 Measurement Setup Automation Setup Data Acquisition Data Analysis which includes the Data Analyzer a
47. ing the Sample 3 4 Table of Contents lii Loading the Sample reti wu RESEQEX C RESTI PES P3qRRE ones 3 4 Unloading the Sambple 2422 ome eee ceded wm xar gh SR ELS X RTI Oe Re CR Rs e OR s 3 5 Towering Up and 3 5 Adjusting the 1 3 5 Using the Manual Stage Positioning 3 6 Adjusting the X Y POSION i a ux cR mae eyes ss 3 6 Leveling the Stage 3 6 Using the Auto Stage Positioning 3 7 oY CORMEOLEP SIBI s 2454s ies sudes TUES auRSPUSUM anes 3 7 Theta Control Pangi ees oe ee 3 9 Removing an Installed Stylus 3 10 Installing a Different Stylus 3 13 Cleaning the Stylus 3 16 Electronically Configuring and Calibrating the Profiler 3 17 General Care and Maintenance
48. iod of one year commencing a on final acceptance or b 90 days from shipping whichever occurs first This warranty covers the cost of parts and labor including where applicable field service labor and travel required to restore the equipment to normal operation Seller warrants to the original Buyer that replacement parts will be new or of equal functional quality and warranted for the remaining portion of the original warranty or 90 days whichever is longer Seller warrants to the original Buyer that software will perform in substantial compliance with the written materials accompanying the software Seller does not warrant uninterrupted or error free operation Seller s obligation under these warranties is limited to repairing or replacing at Seller s option defective non expendable parts or software These services will be performed at Seller s option at either Seller s facility or Buyer s business location For repairs performed at Seller s facility Buyer must contact Seller in advance for authorization to return equipment and must follow Seller s shipping instructions Freight charges and shipments to Seller are Buyer s responsibility Seller will return the equipment to Buyer at Seller s expense All parts used in making warranty repairs will be new or of equal functional quality The warranty obligation of Seller shall not extend to defects that do not impair service or to provide warranty service beyond normal business hours Monday
49. me specific action that you must perform for the system to work properly WARNING Whenever you see a Warning note there is the possibility of personal injury or equipment damage SAFETY FEATURES Several features of the DektakXT system ensure operator safety Red Emergency Off Button The DektakXT system is equipped with a red EMERGENCY OFF button located on the EMO box see Figure 1 1 This unit may be placed any convenient and readily accessible location Pressing the EMERGENCY OFF button shuts off DC power to the system devices excluding the computer monitor and power supply adapter The 24 VDC control circuit in the EMO Box also remains energized Safety 1 1 EMO button Power On button Figure 1 1 EMO Box CAUTION Use the EMERGENCY OFF button only in case of an emergency White Power On Button and Black Power Off Button The DektakXT system is equipped with a white POWER ON button and a black POWER OFF button These buttons are located next to the red EMERGENCY OFF button on the EMO Box see Figure 1 1 Pressing the POWER ON button provides DC power to all system devices but the computer monitor and power supply adapter Pressing the POWER OFF button shuts off DC power to all system devices but the computer monitor and power supply adapter The 24 VDC control circuit in the EMO Box also remains energized SAFETY PRECAUTIONS The DektakXT system
50. n of the profile trace on which to calculate analytical functions on the measurement results see Figure 4 18 You can adjust the bandwidth at each cursor to average the data points within that cursor s bandwidth This is especially useful for average step height measurements 4 14 Taking Measurements and Analyzing Data 100 u u B 80 i 60 40 a nm 20 Figure 4 18 2D Profile of the Data Analysis Display Showing the R and M Cursors To change the position of each cursor on the measurement data click on it and then drag it with the mouse To change the bandwidth of a cursor click it to display small boxes that you can then drag To reposition the cursors while maintaining the same distance between them click on one of the cursors and then hold down the Alt key while dragging that cursor The second cursor moves along with it The locations of the R Cursor and M Cursor and their bandwidths appear in a box at the bottom of the Data Analysis window see Figure 4 7 To change these settings type in new values and press Enter NOTE The numbers in the Cursor Status box indicate the points at which the cursors intercept the profile trace in relation to the horizontal scale Cursor 5tatus Label Position mm Total Profile y Width mm R 0 5362 0 0223 0 0000 M 14182 0 0372 0 0000 0 8821 0 0149 Figure 4 19 Cursor Status Box Taking Measurements and
51. nd Analysis Toolbox if Raw Data is selected You can change the size and layout of each Vision View by clicking and dragging with the mouse You can save each configuration by clicking Save gt Vision Views If you save your preferred set of Vision Views as the startup it will appear each time that you start Vision64 Click the Reset button to return to the factory set configuration of the currently displayed Vision View Click Reset All to return to all of the factory set configurations of all four of the Vision Views Q3 Reset Reset All Using Vision64 5 3 Measurement Options gt Trace scan Type Length 2000 Range Duration 10 0 sec ON Resolution 0 667 pm pt Sample 3000 pts Stylus Type Radius 12 5 Speed 200 pm s stylus Force 3 Additional Parameters V Tower Up After Scan Use Soft Touchdown Advanced Options Data Stitching 3D Map Figure 5 4 Measurement Setup Vision View 0 5 0 2 0 02 0 5 Active Inactive CICCI Delay Between Moves 5 0 5 Move to Measurement Locations Figure 5 5 Automation Setup Vision View Using Vision64 Data Acquisition 2 5 1 15 T 1 T 0 5 200 400 600 800 1000 1200 1400 1600 1800 2000 Figure 5 6 Data Acquisiton Vision View Plot Legend Cursor Status Cursor C
52. nd pressurized air lines These types of activities require knowledge and use of lockout tagout procedures Maintenance procedures often present greater hazards to personnel than normal production activities due to the need to defeat safety features in order to access the equipment The following sections present general information on some of the key safety related procedures or actions that maintenance personnel should follow when servicing the DektakXT system Safety General Lockout Tagout Procedures This section describes general lockout tagout procedures for electrical systems and pressurized air lines Contact your internal safety and health representative for more detailed procedures for your facility as well as for training and authorization certification requirements Lockout Procedure 1 2 3 10 11 Notify all affected and other persons of intended lockout Turn off the computer following the normal shutdown procedure Unplug the first cord on the power supply adapter from its receptacle on the signal processor on the back of the DektakXT stylus profiler Unplug the second cord on the power supply adapter from its wall outlet Place the power supply adapter with its two disconnected cords in a secure location This is the equivalent of a lockout tagout procedure on a more complex system Close the air regulator toggle switch below the vibration isolation table Dissipate any residual pressure following the appropria
53. nt pins along with one of the following sample fixtures chucks 101 mm 4 inch square base platform with no vacuum capability Ceramic vacuum Dedicated photo voltaic vacuum Figure 2 2 Standard Manual Sample Positioning Stage with Square Base Platform Fixture System Overview The 3D Mapping and Automation Options which include auto sample positioning stage see Figure 2 3 In addition to 3D mapping see Figure 2 15 these options provide automation and programmability of up to 200 sites on samples of up to 150 mm 5 90 inches in diameter The X Y auto sample positioning stage includes one of the following sample fixtures chucks 50 mm to 76 mm 2 to 3 inch wafer vacuum 101 mm to 152 mm 4 to 6 inch wafer vacuum Dedicated 203 mm 8 inch wafer vacuum Ceramic vacuum Dedicated photo voltaic vacuum Figure 2 3 Auto Stage with Wafer Vacuum Sample Fixture Chuck PROFILER COMPONENTS As shown in Figure 2 1 the DektakXT stylus surface profiler system contains all of the mechanical electrical and optical components for sample positioning sample viewing and scanning measurement As described in Stage Configurations on page 2 2 the system can be configured with a manual or X Y auto stage Its sturdy single arch bridge design reduces sensitivity to adverse environmental conditions Measurement Head The hood covered measurement head shown in Figure 2 1 houses a USB video camera and an LED illuminator
54. oints on a reference sample at the time that the Automation recipe 15 defined You may select any easily identifiable landmarks on the reference sample as Deskew points for example the test pads on a silicon wafer or substrate corners When the system runs the Automation recipe it refers to these Deskew points to correct for variations in the positions of your samples To create and run an Automation recipe that includes Deskew points 1 Position your reference sample on the stage so that the area that you want to use as your Deskew reference point is visible in the Live Video Display The Deskew reference point anchors the sample location to a fixed stage position 2 Click the Automation Setup button e on the Ribbon The Automation Editor appears 3 Tower down 4 Toset the Deskew reference point a In the Live Video Display drive the stage to the area that you want to use as the Deskew reference point b In the Automation Editor click Set Reference Point A red circle enclosing an R now appears in that location see Figure 4 12 4 10 Taking Measurements and Analyzing Data nananana PPI aet DIN lob 24 ADMI e LUH 45 a Jude mir 1 Lager Figure 4 12 Setting the Deskew Reference Point 5 To set the Deskew alignment point a Drive the stage to the area on the image
55. ons appending 4 13 Analyzer recipes 4 20 Application Menu button 5 9 Auto Stages 2 3 Automated measurements 4 10 Automation Editor 4 10 Automation recipes 4 10 B Base feet 2 5 Bridge 2 3 Calibrating the system 3 17 Camera 2 3 Chucks for 3D mapping and automation 2 3 Computer 2 6 2 7 Configuring the system 3 17 Cursor locations and bandwidths setting 4 14 D Data Analyzer 4 20 5 6 Database Creating 4 18 Example 5 9 Data stitching software 2 9 DektakXT Stylus Profiler Components described 2 3 Configuring and calibrating 3 17 Electronics 2 4 Environmental enclosure 2 6 4 4 Illustrated 2 2 DektakXT Stylus Profiler cont Options and accessories 2 8 Principle of operation 2 2 Scanning operation 4 8 E Electrical task classification 1 5 Electronics 2 4 Emergency Off button 1 1 EMO box 2 6 3 2 Environmental enclosure 2 6 4 4 H Hazards Mechanical 1 4 Pressure 1 4 Help using Vision64 5 2 Illumination adjusting 3 5 Installation of the system safety issues 1 4 Intensity bar 3 5 L Leveling the stage 3 6 Linear Variable Differential Transformer 2 2 Loading and unloading sample 3 4 Lockout procedures 1 5 Maintenance of the system 1 4 3 17 Manually leveling the stage 3 6 Measurement sequence of events 4 7 Measurement head described 2 3 Measurement Options setting 4 2 1 Measurements scan Automated 4 10 Manual 4 4 Mechanical hazards 1 4 Meta data selecting
56. ontrol ArrayData Label Position ArrayData Width mm ROM M 106 4 2039 0 0970 A 1065 0 6498 Figure 5 7 Data Analysis Vision View Using Vision64 5 5 Data Analyzer X Eee 0 4 TestlDektak OPDx 4 Surface Profile 4 Raw 4 Profile Filter Profile Stats Figure 5 8 Data Analyzer Analysis Toolbox X 1D Analysis Bearing Histogram Profile Stats Step Detection Stress Trace 1D Filter 77 Micro Form Filter Profile Filter f Terms Removal F Operator Figure 5 9 Analysis Toolbox DISPLAYING OTHER VISION64 WINDOWS 5 6 In addition to the four Vision Views you can display the following items The Live Video Display that gives you a live view of your sample and the stylus see Figure 5 10 The Instrument Control Panel that allows you to control the DektakXT profiler see Figure 5 11 The Active Gallery Display that simultaneously displays thumbnail views of all active datasets It appears below the Data Analysis Vision View see Figure 5 12 The Database Display that shows statistical analysis results in a comma separated variable file see Figure 5 13 Using Vision64 Using Vision64 NOTE To use the Analysis toolbox Click an icon to immediately apply it to the active dataset Right click an icon to open an analysis setup dialog box The Analysis Toolbox is available only when Raw Data is selected in the D
57. oss the surface of a sample but the tower is nulled before only the first scan Each successive scan therefore uses the same initial reference point Static Scan A special scan type in which the scan is performed at the same point The scan stage does not move The tower 15 nulled before the scan This scan type 15 primarily used for determining the noise and drift of the system Map Scan If your system includes the 3D Mapping Option select this scan type to measure analyze and view surface contour data in three dimensions X Y and 7 4 2 Taking Measurements and Analyzing Data Range Enter value that indicates vertical resolution of the scan When measuring extremely fine geometries the 6 5 um range provides a vertical bit resolution of 0 1 nm For general applications the 1 0 nm vertical resolution of the 65 5 um range 15 usually adequate When measuring thick films or very rough or curved samples select the 524 um range with 8 0 nm resolution NOTE The selected scan range is scaled across the LVDT output of the stylus head sensor and digitized The greater the selected scan range the lower the vertical resolution of the measurement The 6 5um range will provide a vertical bit resolution of approximately 0 1nm The 65 5um range has a resolution of 1nm the 524um range has a resolution of 8nm and the 1mm range has a vertical resolution of 15nm So while the 65 5um 524um and 1mm scan ranges would all work for a 10um step t
58. ou power down the system via the EMO box you must exit Vision64 shut down the computer and turn off the monitor as described below Emergency Machine Off EMO button Black Off Button Figure 3 5 Red EMO and Black Off buttons on the EMO box Basic Operations and Maintenance power down the DektakXT system 1 Close the Vison64 software as described in Closing Vision64 on page 5 1 2 Press the black Orr button on the EMO Box see Figure 3 5 This shuts off power to all system devices but the computer monitor power supply adapter and 24 VDC control circuit in the EMO Box 3 Select Start Shut Down from the Windows 7 Start menu and then click Shut Down in the dialog box that appears 4 Turn off the monitor LOADING AND UNLOADING THE SAMPLE WARNING If the sample does not freely clear the stylus click the Tower Up to raise the stylus so that it is safely above the sample Failure to do so can damage both the stylus and the sample Loading the Sample Click the Unload Sample button amp on the toolbar above the Live Video Display to move the scan stage forward 55mm two inches You can now conveniently place a sample on the sample fixture see Figure 3 6 remove it without risk of damage to the stylus or the sample Click the Load Sample button 47 to move the scan stage backward its home position Use the manual or auto stage controls to fine position the area of interest on the sample beneat
59. ower up and then tower down Leveling the Stage stage configurations of the DektakXT system allow you to manually level the sample positioning stage by turning the leveling knob below it see Figure 3 9 The closest possible manual leveling ensures the best profiler performance Guidelines for leveling the stage appear after the picture 3 6 Basic Operations and Maintenance Stage leveling knob Figure 3 9 Stage Leveling Knob As you perform manual stage leveling follow these guidelines To view the effect of leveling on the profile trace real time perform stage leveling while a scan measurement is in progress To verify that the maximum possible level has been obtained position the cursors so that they intersect the same horizontal plane If the profile trace is extremely off level change the measurement range to 5240kA Level the trace change to the intermediate range and then repeat the procedure until the stage 15 leveled The best level is achieved by using the 6 5k range USING THE AUTO STAGE POSITIONING CONTROLS When you open Vision64 the Live Video Display appears by default On its right hand side it contains two instrument control panels the X Y Control Panel and the Theta Control Panel X Y Control Panel Prior to a taking measurement you must position the area of interest on the sample under the stylus by adjusting the X Y position of the motorized sample positioning stage Instructions for
60. quipment Indicates that sy stem complies with China RoHS environmental standards regarding toxic or hazardous substances or elements Indicates that sy stem complies with European Compliance CE shipping box that holds the DektakXT profiler Right face of EMO Box Back of computer near power cord port Back of computer near power cord port Left face of scan stage Lower right face of EMO Box Rear cover Lower left face of EMO box 1 3 SAFETY AND HEALTH HAZARDS Although the Dektak XT system has been designed with safety in mind it does contain some inherent potential hazards Physical hazards associated with operating the equipment are discussed in this section Mechanical Hazards Mechanical hazards exist in the systems wherever moving parts are located such as slides Protection against most of the mechanical hazards in the Dektak XT system is provided in the form of a hood and system base Wherever possible physical guards have been placed around moving parts to prevent personnel from contacting them The exceptions are the areas around and above the X Y stage These areas however do not contain pinch point hazards Some maintenance tasks may require removal of the hood and system base In these cases safe work practices including use of lockout procedures for electricity pressure pneumatic system or other applicable hazards should be followed Only trained service personnel should perform maint
61. r in the Data Analyzer see Figure 5 8 or Analysis Toolbox see Figure 5 9 Then click Edit Settings in the Data Analyzer or Edit Default Settings in the Analysis Toolbox The following dialog box appears Using Vision64 5 11 4 Surface Profile Filter Settings Filter Type Gaussian Regression Gaussian 2RC Short Cutoff Spline Gaussian Regression Second Order Gaussian Regression Robust Gaussian Regression Second Order Robust Gaussian Regression Output Total Profile Primary Profile Roughness Profile Wawviness Profile Figure 5 17 Surface Profile Filter Settings Dialog Box Select the filter that you want to apply If this is a Gaussian filter select Apply Short Cutoff or Apply Long Cutoff to determine the frequency cutoff wavelength In the Output section select the type of profile in which you want to view the output Click OK The system applies the selected filter to the active dataset To apply Terms Removal F Operator or Micro Form filter click it in the Analysis Toolbox seeFigure 5 9 To change the settings right click it prior to its application PERFORMING ANALYSES To perform an analysis on the active dataset click the analysis for example Bearing Ratio that you want to apply in the Analysis Toolbox see Figure 5 9 To change the analysis settings right click the analysis and select Edit Default Settings prior to performing it Make your selections and click OK The dialog box
62. sor The real time theta position of the stage appears in the box below the ring This position is graphically depicted by the moving red indicator on the yellow ring 3 When you have obtained the correct stage position release the mouse button REMOVING AN INSTALLED STYLUS When a stylus becomes worn or you want to measure another type of sample you must remove the currently installed stylus from the sensor head see Figure 3 18 before replacing it with a different Figure 3 14 Sensor Head and Stylus the DektakXT Profiler 3 10 Basic Operations and Maintenance remove a stylus from the sensor head the DektakXT profiler 1 Locate the protective case in which the stylus was shipped and place it near the DektakXT stylus profiler see Figure 3 15 Figure 3 15 Protective Stylus Case 2 Locate the black plastic stylus exchange tool see Figure 3 18 and place it near the stylus case 3 Tower up to the Home position 5 to allow room for maneuvering 4 On the profiler turn the brass thumbscrew on the left side of the sensor head counter clockwise to loosen the sensor head magnetic shield see Figure 3 16 Brass thumb screw on sensor head Magnetic shield Figure 3 16 Sensor Head with Magnetic Shield Attached 5 Slip the shield off the pin on the right side of the sensor head 6 Carefully move the shield toward the front of the profiler and pull it off the sensor head making sure to avoid contac
63. t with the stylus Figure 3 17 Magnetic Shield Removed from Sensor Head Basic Operations and Maintenance 3 11 7 Rotate the thumbscrew on the stylus exchange tool so that a gray circle NOT a green one is visible and the magnet is NOT engaged see Figure 3 18 Magnetic disk pad Eg 7 7 7 77Z 7 Alignment pin Gray circle indicating one of five that the magnet is disengaged hannel for holding the Thumbscre stylus Figure 3 18 Stylus Exchange Tool with Its Magnet Disengaged 8 Position the stylus exchange tool beneath the sensor head see Figure 3 19 9 Holding the stylus exchange tool by its sides align the alignment pins on its top with the outside of the front of the sensor head see Figure 3 19 Gently push up until the tool is flush with the bottom of the sensor head The ridge at the back of the stylus exchange tool must roughly line up with the back of the sensor head The stylus tip should extend out through the front of the channel on the exchange tool Sensor head Alignment pi Stylus tip Figure 3 19 Stylus Exchange Tool Flush with the Bottom of the Sensor Head WARNING Avoid any personal contact with the stylus arm or tip This can result in damage to the stylus 10 Rotate the thumbscrew on the left side of the stylus exchange tool so that a green circle becomes visible and the magnet is engaged The magnet now pulls the stylus into the channel on th
64. tab on the Ribbon Ribbon Tabs Click these tabs to make the Ribbon display the Analyze Tab see Figure 5 15 the Instrument Tab or the Preferences Tab You can perform the functions on these tabs by clicking a button or by using keyboard shortcuts Some tabs include split buttons that provide multiple related commands Instrument Analyze Preferences a 1 Create Edit Database 4 9 A rd lt Mis Log to Database Measurement Pause Cancel Open Save Set Current As CopyTo Print Help Bruker com Measurement Automation Data Windows Reset 7 7 Default Clipboard 7 Setup Setup X Acquisition Analysis M Figure 5 15 Ribbon with the Analyze Ribbon Tab Selected CHANGING THE UNITS AND OTHER USER PREFERENCES You can specify different units before or after a scan measurement After you have done this the data plot scan parameters measurement parameters ranges and analytical function calculations all appear in the new units that you have specified 5 10 Using Vision64 change units before or after scan measurement 1 the Preferences tab of the Ribbon click the Units and Numbers button L 2 Make your settings in the Units dialog box see Figure 3 15 and then click OK Set All Units in Metric Set All Units English Figure 5 16 Units Dialog Box APPLYING FILTERS To apply a filter to the active dataset click Profile Filte
65. te dissipation procedure for example opening a bleed valve Verify that all personnel are clear of the hazard zone Attempt to restart the equipment If properly locked out the equipment should not be able to be started Use a voltmeter and make voltage measurements to verify that all electrical sources have been locked out If properly locked out no voltage should be present Check the reading on supply line pressure gauges to verify that no pressure exists within the system If properly locked out no pressure should exist Perform maintenance work Returning the System to Operation 1 oO oc A gt Verify that all personnel materials tools and test equipment are clear of the hazard zone Plug the first cord on the power supply adapter into its receptacle on the signal processor on the back of the DektakXT stylus profiler Plug the second cord on the power supply adapter into a wall outlet Open the air regulator toggle switch to repressurize the vibration isolation table Turn on the computer following the normal startup procedure Notify all affected and other persons that the lockout has been cleared and the equipment is back in operation Electrical Task Classification Each task involving electrical operations is evaluated for severity and classified according to the criteria outlined in Table 1 2 These criteria categorize electrical hazards into four types ranging from Type 1 de energized to Type 4 fully energi
66. that you want to use as the Deskew alignment point b Tower down 221 In the Automation Editor click the Add Alignment Site button solid red circle now appears at that location see Figure 4 13 Pree tts Be ren et dle eres p gm T cl sim Br Oe J Mirme ipar 1 D mem a ACE mm Ja dee ate ee Ferca IP 1 Hage Figure 4 13 Setting the Deskew Alignment Point Taking Measurements and Analyzing Data 4 11 6 To program the measurement points a Drive the stage to the area on the image that you want to use as the first measurement point b Tower down In the Automation Editor click the Measurement Site button A number outlined by a green circle now appears at that location see Figure 4 14 Q Repeat the above steps to define all further required measurement points Figure 4 14 Setting a Deskew Measurement Point 7 the Automation Editor select the Align at Start of Automated Run check box to activate the Deskew feature The system will now automatically run the Deskew recipe prior running this Automation recipe 8 If desired change the Automation Options at the bottom of the Automation Editor see Figure 4 15 Automation Options Number Of Runs 5 Unload Stage Prompt To Dupli
67. through Friday excluding Seller holidays No claim will be allowed for any defect unless Seller shall have received notice of the defect within thirty days following its discovery by Buyer Also no claim will be allowed for equipment damaged in shipment sold under standard terms of F O B factory Within thirty days of Buyer s receipt of equipment Seller must receive notice of any defect that Buyer could have discovered by prompt inspection Products shall be considered accepted 30 days following a installation if Seller performs installation or b shipment unless written notice of rejection is provided to Seller within such 30 day period Expendable items including but not limited to lamps pilot lights filaments fuses mechanical pump belts V belts wafer transport belts pump fluids O rings and seals ARE SPECIFICALLY EXCLUDED FROM THE FOREGOING WARRANTY AND ARE NOT WARRANTIED used equipment is sold 5 IS WHERE IS WITHOUT ANY WARRANTY EXPRESS OR IMPLIED Warranty Seller assumes liability under the above warranties for equipment or system failures resulting from 1 abuse misuse modification or mishandling 2 damage due to forces external to the machine including but not limited to acts of God flooding power surges power failures defective electrical work transportation foreign equipment attachments or Buyer supplied replacement parts or utilities or services such as gas 3 improper operation or mainten
68. tion 1 5 Chapter 2 System Overview 2 1 How the System MVOPKS a uud ote la quati uxo cg de ocn gusti eee deme dab Beem Ye as a 2 2 Stage Configurations lille hh hrs 2 2 Pronler COMPONENTS Eq Oud AL GE GL a E VIE TOR 2 3 Measurement Head 2 3 Sensor Head and Stylus 2 4 Sample Positioning 2 4 Cail 2 4 ISC TONIC g eeen 06 2 4 Base GCC acc cc oe wk ond Babee AMEE pase esd Gee a 2 5 Environmental Enclosure 2 6 EMO DIX rU 2 6 Computer and Software 2 7 Options and 2 8 Chapter 3 Basic Operations and Maintenance 3 1 Powering Up ihe rreri ee bose b dan VO d ees 3 1 Powering Down the System 3 3 Loading and Unload
69. to a Linear Variable Differential Transformer LDVT which produces and processes electrical signals that correspond to surface variations of the sample After being converted to digital format these surface variations are stored for display and analysis The Vision64 application calculates and displays the results of user selected analytical functions for measuring surface texture and other parameters to characterize the profile data For example the Ra average roughness analytical function the most commonly used international parameter of roughness calculates the arithmetic average deviation from the mean line within the assessment length If there is an active database selected analytical functions are logged to it during each measurement STAGE CONFIGURATIONS 2 2 The DektakXT stylus surface profiler comes in the following stage configurations The standard 2 D DektakXT system which includes a two axis manual sample positioning stage with 101 6 x 101 6 mm 4 x 4 inches of X Y translation manual leveling two point programmable or cursor software leveling and manual theta rotation see Figure 2 2 This standard stage accommodates samples up to 50 mm 1 9 inches thick and performs long scans of 55 mm 2 16 inches It provides 50 8 mm 2 inches of X Y translation as well as manual theta positioning see Figure 2 3 The standard system 15 available with 50 mm 1 97 inch 100 mm 3 94 inch and 150 mm 5 90 inch wafer alignme
70. to assist the operator in feature location and stylus centering The live video output of the camera provides feedback to the operator during a scan measurement The measurement head also includes a sensor head that magnetically holds the stylus assembly and contains the feedback mechanisms required to track stylus movement as it rides over the sample surface System Overview 2 3 2 4 WARNING Do not remove the hood and attempt to service the components of the yourself Instead call Bruker Customer Service Failure to heed this warning can result in damage to delicate equipment Sensor Head and Stylus Assembly A diamond tipped stylus see Figure 2 3 attached to the sensor head permits accurate two dimensional surface profiler measurements in a wide range of applications In standard configuration user programmable stylus force from 1 mg to 15 mg allows profiling on soft or hard surfaces A variety of available stylus tip sizes are available to fill a broad range of measurement applications Each tip comes in its own protective case NOTE DektakXT system comes with a stylus exchange tool that allows you to safely exchange one stylus for another without damaging the delicate tip Figure 2 4 Sensor Head and Stylus Assembly Sample Positioning Stage Available sample positioning stages and sample fixtures chucks are discussed in Stage Configurations on page 2 2 Scan Stage The direct drive scan stage
71. tton Click the Edit Mode button Either type your locations in the X and Y fields or click the Move button to move the stage to those locations Theta Control Panel Prior to a taking measurement you must place the area of interest on the sample under the stylus by adjusting the position of the motorized theta sample positioning stage Instructions for doing this appear after the figure Theta 9 Med Figure 3 12 Theta Stage Control To set the position of the motorized theta sample positioning stage 1 Inthe Theta Control Panel in the Live Video Display see Figure 3 12 click the blue Gear icon in the upper right corner to enter the units as well as the speeds for Fast Medium and Slow on both the R Axis and the Theta Axis see Figure 3 13 If you select the Grab Rectangle to Move check box you must grab the red rectangle in the middle of the Theta Control Panel before you can adjust the theta position of the motorized stage When your settings are complete click OK Basic Operations and Maintenance 3 9 RThetaStageOptions R Axis Settings Display Units Fast Speed Medium Speed Slow Speed Theta Axis Settings Display Units Fast Speed Medium Speed Slow Speed E Grab Rectangle To Move Figure 3 13 RTheta Stage Options Dialog Box 2 Holding down the left mouse button drag the red bar in the center of the ring The bar becomes an arrow that you can drag with the cur
72. ured 9 On the Measurement Options tab of the Measurement Setup window select Standard Scan see Figure 4 4 10 Ifyou do not want to use the default Measurement Options settings that are stored in your Vision recipe change any other settings on the Measurement Options tab of the Measurement Setup window For definitions of the parameters in the Measurement Options window see Setting the Measurement Options on page 4 2 NOTE If your system includes the X Y auto stage click the Teach button to the left of the Length field open a window that lets you drive the stage to the start point of the scan Taking Measurements and Analyzing Data 4 5 Measurement Setup X Measurement Options scan Standard Scan Length 2000 Range 6 5 um Duration 10 sec Profile Hills amp Valles gt pnm Sample 3000 pts Stylus Type Radius 12 5 pm Speed 200 um s Stylus Force 3 mg Additional Parameters Tower Up After Scan Use Soft Touchdown Advanced Options Data Stitching 3D Figure 4 4 Measurement Options Window 11 Click the Advanced Options tab and make sure that the Number of Measurements is set to 1 12 Click the Measurement button on the Ribbon see Figure 4 5 and then select Measurement The events that now occur are described in What Happens During a Scan Measurement on page 4 6 Q Measurement Single Acquisition Uu Automated
73. urer the protection provided by the equipment may be impaired Notices The information in this document is subject to change without notice No Liability 15 assumed for errors contained herein or of incidental or consequential damages in connection with the furnishing performance or use of the material Warranty li Chapter PEDIR bo eh ods Ges TOLLIT 1 1 o rarena nner 25d 5256 vat eut doe ER wend Edo tae doa EN se ee 1 1 Red Emergency Off 1 1 White Power On Button and Black Power Off 1 2 Salely Preca llriS x32 5 27 9 Bra e E UR oes ae Op dos oes sous wd s 1 2 Safety and Health 1 4 Mechanical 1 1 4 Pressure HaaZ dSn are cence uu ne eyed Na PECES SQ REFS 1 4 Installation and Maintenance Safety Issues 1 4 General Lockout Tagout Procedures 1 5 Lockout 1 5 Returning the System to 1 5 Electrical Task Classifica
74. zed and exposure required Lockout tagout requirements including training requirements are based on the type of hazard present Safety operator tasks are classified as Type 1 or 2 Only qualified service personnel should perform Type 3 or 4 tasks following established Bruker service policies 1 5 Table 1 2 Classification of Operator Tasks Type 1 Equipment is fully de energized Type 2 Equipment is energized Energized circuits are covered or insulated Type 3 Equipment is energized Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible Potential exposures are no greater than 30 volts rms 42 4 volts peak 60 volts DC or 240 volt amps in dry locations Type 4 Equipment is energized Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible Potential exposures are greater than 30 volts rms 24 volts peak 60 volts DC or 240 volt amps in dry locations Potential exposures to radio frequency currents whether induced or via contact exceed certain limits NOTE No routine tasks for the DektakXT system are classified as Type 4 During any troubleshooting or maintenance activities that are performed while the DektakXT system is operating the technician should always be able to easily reach the EMERGENCY OFF button on the EMO Box see Figure 1 1 In case of an emergency the technician can press the EMERGENCY OFF button to imme

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