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1. 14 Standard 2 Standard Motor Wiring 17 Air Supply Requirements 11 Attaching the 11 U Unpacking and Handling the Stage 9 B Ballscrew 23 w 5 6 pL rm 12 CIGANING 21 22 Cleaning 1 21 D Declaration of Incorporation 8 E Electrical 12 encoders uc ble E TIE 17 Environmental 13 Inspection Schedule 21 L Limit 5 16 L brication E 21 M model 9 Optional 3 S safety 6 www aerotech com Index 29 AirLift 115 Series Stage User s Manual Index 30 Index www aerotech com Reader s Comments AirLift 115 Series Stage Manual P N EDS155 December 16 2010 Revision 1 01 00 Please answer the questions below and add any suggestions for improving this doc ument2. 27 29 Reader s 31 www aerotech com lii Table of Contents AirLift 115 Series Stage User s Manual www aerotech com AirLift 115 Series Stage User s Manual List Of Figures List of Figures Figure 1 1 Figure 1 2 Figure 1 3 Figure 1 4 Figure 2 1 Figure 3 1 Figure 3 2 Figure 3 3 Figure 3 4 Figure 4 1 Figure 4 2 Figure 4 3 Typical AirLift 115 Series Positioning 2 2 2 1 AirLift 115 Series Stage 4 4 4 2002 2 2 AirLift 115 Mounting Configuration 1 4 AirLift 115 Mounting Configuration 2 5 AirLift 115 With Lifting Hardware and Shipping Brackets Shown 10 Limit Switch PA ERAR EES 16 Limit and Encoder Wiring for Standard AirLift 115 5 6 17 Limit Encoder Pin 4 2 0 18 Motor Wiring Connector for all AirLift 115 18 Air Bearing Surfaces and
3. 244220 2 1 1 1 Optional Features sce eei sd 3 1 2 2 0 2 2 2 2 24 222 2 22 1 4 1 3 Safety Procedures and 2 2 22 222222222 2 4 4 2 6 1 4 EC Declaration 54 4 8 Chapter 2 Installation 2 2 2 2 2 2 2 2 9 2 1 Unpacking and Handling the Stage 22222222222 2 2 2 1 42 9 2 2 Air Supply 224 42 22 22 24222 1 7 2 24242222222 11 2 3 Attaching the Payload to the 2222222222 2 2 2 2 11 2 4 Electrical 0 0 2 4 12 2 4 1 End of Travel Limit 4 2 12 Chapter 3 Operating 13 3 1 Environmental 2 45 2 13 3 2 Accuracy and Temperature
4. 2 4 13 3 3 Basic 2 7 21 21 4 4 14 3 4 Limit Switches ee cae 16 3 4 1 Limit Switch 2 4 16 3 4 2 Limit 2 2 2222 2 02 2 22221 16 3 5 Standard 2 2 2 2 4 3 0 4 17 3 6 Vacuum 24 2 4 4 0 2 7 19 Chapter 4 2 2 21 4 1 Service and Inspection Schedule 2 2 2 eee cece eee cccccccccccccccceeececccceeeeceecceeeeees 21 4 2 Cleaning and 4 erre rrr 21 4 2 1 Recommended Cleaning 2 21 4 2 2 Cleaning 001122 22 4 2 3 Ballscrew Lubrication 4 0 0 0 4 23 Appendix A Warranty and Field 25 Appendix B Technical
5. Is the manual Adequate to the subject Well organized Clearly presented Well illustrated i How do you use this document in your job Does it meet your needs What improvements if any would you like to see Please be specific or cite examples C T SmwPeWbes Nam Weg seria erp Name Aerotech Subsidiary Email Order Maiyourcommentsto Farto Aerotech Inc 412 967 6870 101 Zeta Drive Pittsburgh PA 15238 U S A service aerotech com
6. A DANGER gt DANGER gt DANGER gt DANGER WARNING WARNING WARNING To minimize the possibility of electrical shock and bodily injury or death disconnect all elec trical power prior to making any electrical connections To minimize the possibility of electrical shock and bodily injury or death when any electrical circuit is in use ensure that no person comes in contact with the circuitry when the stage is connected to a power source To minimize the possibility of bodily injury or death disconnect all electrical power prior to making any mechanical adjustments Moving parts of the stage can cause crushing or shearing injuries All personnel must remain clear of any moving parts Improper use of the stage can cause damage shock injury or death Read and understand this manual before operating the stage If the stage is used in a manner not specified by the manufacturer the protection provided by the stage can be impaired Stage cables can pose a tripping hazard Securely mount and position all stage cables to avoid potential hazards Chapter 1 www aerotech com AirLift 115 Series Stage User s Manual Overview Do not expose the stage to environments or conditions outside the specified range of oper ating environments Operation in conditions other than those specified can cause damage to the equipment The stage must be mounted securely Improper mounting can result in injury and d
7. 75 5 25 GRID SPACING 171 5 SQ RECOMMENDED APERTURE LIFTING HAROWARE 13 TYP 185 5 BMS60 BRK 216 BMS100 BRK AIR INLET FITTING FOR 6MM OD TUBING FEEDBACK CONNECTOR LINEAR ENCODER BASIC MODEL A TRAVEL B AIRLIFT115 050 50 288 AIRLIFT115 100 100 AIRLIFT115 150 150 FEEDBACK CONNECTOR MOTOR POWER CONNECTOR ROTARY ENCODER DIMENSIONS MILLIMETERS Figure 1 3 AirLift 115 Mounting Configuration 1 Dimensions 4 Chapter 1 www aerotech com AirLift 115 Series Stage User s Manual Overview MOTOR POWER CONNECTOR F ual L FEEDBACK CONNECTOR LINEAR ENCODER FEEDBACK CONNECTOR ROTARY ENCODER T A AIR INLET FITTING 6MM OD TUBING LIFTING HARDWARE 185 5 BMS60 BRK 216 BMS100 BRK 50 SPACING wscwon s 25 AIRLIFT115 050 2 162 6 SQ AIRLIFT1 15 100 275 1143 SQ AIRLIFT115 150 DIMENSIONS MILLIMETERS Figure 1 4 AirLift 115 Mounting Configuration 2 Dimensions Www aerotech com Chapter 1 5 Overview AirLift 115 Series Stage User s Manual 1 3 Safety Procedures and Warnings The following statements apply throughout this manual Failure to observe these precautions could result in serious injury to those performing the procedures and damage to the equipment This manual and any additional instructions included with the stage should be retained for the lifetime of the stage
8. by CCW motor rotation Normally Active clockwise High CCW Limit HOME LMT Home Limit Paralleled with CCW with Standard Jumper or CW Optional Jumper limit Typically not used MKR Marker Incremental encoder output pulse given once per revolution Typically used for home reference cycle MKR N Incremental encoder output either the compliment of Marker with a line driven TTL type encoder or 2 5 VDC bias level with amplified sine wave type encoder IN MTR Motor Phase A MTR Motor Phase B MTR Motor Phase S Sine Incremental encoder output either TTL line driven or amplified sine wave type signal Cos leads sin for CW positive motion SIN N Incremental encoder output Compliment of sin 3 6 Vacuum Operation The AirLift 115 is an air bearing stage and is not compatible with operation in a vacuum environment Contact Aerotech for alternate solutions www aerotech com Chapter 3 19 Operating Specifications AirLift 115 Series Stage User s Manual 20 Chapter 3 www aerotech com AirLift 115 Series Stage User s Manual Maintenance Chapter 4 Maintenance AirLift 115 stages are designed to be low maintenance systems The non contact air bearing surfaces require no lubrication and exhibit no wear However it is important to clean the bearing surfaces to maintain the accuracy of the stage You must lubricate the precision ground ballscrew drive at regular intervals This chap ter will detail t
9. AirLift 115 Series Lift Stage User s Manual P N EDS155 Revision 1 01 00 Dedicated to the Science of Motion Aerotech Inc 101 Zeta Drive Pittsburgh 15238 Phone 412 963 7470 Fax 412 963 7459 www aerotech com Product Registration Technical Support Revision History Register online at http www aerotech com prodreg cfm United States Headquarters Phone 412 967 6440 Fax 412 967 6870 Email service aerotech com United Kingdom Phone 44 118 940 9400 Fax 44 118 940 9401 Email service aerotech co uk Germany Phone 49 911 967 9370 Fax 49 911 967 93720 Email service aerotechgmbh de Japan Phone 81 0 47 489 1741 Sales Phone 81 0 47 489 1742 Service Fax 81 0 47 489 1743 Email service aerotechkk com jp China Phone 852 3793 3488 Email saleschina aerotech com Revision 1 01 00 December 16 2010 Revision 1 00 00 February 26 2010 Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies Aerotech Inc 2010 AirLift 115 Series Stage User s Manual Table of Contents Table of Contents Table of 22 iii 6 ERR EE V Eist or Tables vii Chapter 1 22 2 4 2 1 1 1 Standard
10. CW LIMIT 5V LIMIT COM ENC 5V ENC COM COS COS N SIN SIN N MKR MKR N HB HA HC SIG SHLD FDBK 426GRN GG 26 BRN 6 26 BRN 7 2 2 Limit and Encoder Wiring for Standard 115 Stages Chapter 3 17 Operating Specifications AirLift 115 Series Stage User s Manual DA 15P Solder Cup EXK00100 Back Shell ECK01022 Vio cx Jacksocket ECK00328 5V 4 ECX00428 10 COND 22 AWG 75 SIG 12 GRNAWHT sin 1 HE o SIN 9 YELANHT c io cos 2 COS 10 BRN WHT Wire Side View MRK 3 TAN MRK 11 GRY WHT 24 GRN n Figure 3 3 Limit Encoder Pin Assignments MTR SHLD FRM GND Ay M8 2 7 MTR 18 WHT 7 7 7 7 MTR B 2 19 RED f 7 MTR 13 BLK 2 2 Figure 3 4 Motor Wiring Connector for all AirLift 115 Stages 18 Chapter 3 www aerotech com AirLift 115 Series Stage User s Manual Operating Specifications Table 3 4 Limit Motor Wiring Pin Descriptions Pin Output CW Limit Signal indicating stage maximum travel produced by CW motor rotation Normally Active High COS Cosine Incremental encoder output either TTL line driven or amplified sine wave type sig nal Cos leads Sin for CW positive motion COS N Incremental encoder output Compliment of cos Counter Signal indicating stage maximum travel produced
11. Encoder Scales Require Periodic 22 Cover Plate Mounting Screw 2 7 23 Grease Fitting and Hard Stop 4 00 0 24 www aerotech com V List of Figures vi AirLift 115 Series Stage User s Manual www aerotech com AirLift 115 Series Stage User s Manual List of Tables List of Tables Table 1 1 Model Numbering 3 Table 3 1 Environmental 214 2 2 27 4 13 Table 3 2 AirLift 115 Series 2 4 44 7 2 2 14 Table 3 3 4 000 02 4 15 Table 3 4 Limit Motor Wiring Pin 00 19 Table B 1 Current Changes 1 01 00 0 0 2 2 222 27 Table B 2 Archived 28 www aerotech com vii List of Tables AirLift 115 Series Stage User s Manual viii www aerotech com AirLift 115 Series Stage User s Manual Overview Chapter 1 Overview This manual describes Aerotech s AirLift 115 series of air bearing positioning stages Figure 1 1 shows a typ ical A
12. amage to the equipment Use care when moving the stage Manually lifting or transporting stages can result in injury Only trained personnel should operate inspect and maintain the stage This stage is intended for light industrial manufacturing or laboratory use Use of the stage for unintended applications can result in injury and damage to the equipment Before using this stage perform an operator risk assessment to determine the needed safety requirements A A A A A A 2 2 2 2 2 2 Z Z 2 2 2 Z www aerotech com Chapter 1 7 Overview AirLift 115 Series Stage User s Manual 1 4 EC Declaration of Incorporation Manufactorer Aerotech Inc 101 Zeta Drive Pittsburgh PA 15238 USA AEROTECH xv herewith declares that the product Aerotech Inc AirLift 115 Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006 42 EC as amended does therefore not in every respect comply with the provisions of this directive and that the following harmonized European standards have been applied EN ISO 12100 1 2 2003 A1 2009 Safety of machinery Basic concepts general principles for design ISO 14121 1 2007 Safety of machinery Risk assessment Par 1 Principles EN 60204 1 2005 Safety of machinery Electrical equipment of machines Part 1 General requirements and further more declares that it is not allowed to put the equipment i
13. buyer Aerotech must be notified within 30 days of shipment of incorrect materials No product may be returned whether in warranty or out of warranty with out first obtaining approval from Aerotech No credit will be given nor repairs made for products returned without such approval Any returned product s must be accompanied by a return authorization number The return authorization number may be obtained by calling an Aerotech service center Products must be returned prepaid to an Aerotech service center no C O D or Collect Freight accepted The status of any product returned later than 30 days after the issuance of a return authorization number will be subject to review After Aerotech s examination warranty or out of warranty status will be deter Returned Product War mined If upon Aerotech s examination a warranted defect exists then the prod ranty Determination uct s will be repaired at no charge and shipped prepaid back to the buyer If the buyer desires an airfreight return the product s will be shipped collect Warranty repairs do not extend the original warranty period After Aerotech s examination the buyer shall be notified of the repair cost At such Returned Product time the buyer must issue a valid purchase order to cover the cost of the repair and Non warranty Deter freight or authorize the product s to be shipped back as is at the buyer s mination expense Failure to obtain a purchase order number
14. cations The environmental specifications for the AirLift 115 are listed in the following table Table 3 1 Environmental Specifications Ambient Operating 10 to 35 C 50 to 95 F Temperature The optimal operating temperature is 20 C 2 68 F 4 F If at any time the operating tem perature deviates from 20 C degradation in performance could occur Contact Aerotech for information regarding your specific application and environment Storage 0 to 40 C 32 to 104 F in original shipping packaging Humidity Operating 40 percent to 60 percent RH Storage 30 percent to 60 percent RH non condensing in original packaging Altitude Operating 0 to 2 000 m 0 to 6 562 ft above sea level E Contact Aerotech if your specific application involves use above 2 000 m or below sea level Use the system in a low vibration environment Excessive floor or acoustical vibration can affect stage and system performance Contact Aerotech for information regarding your specific appli cation The AirLift 115 stages are not suited for dusty or wet environments This equates to an ingress sure protection rating of IPOO Indoor use only Do not expose the stage to environments or conditions outside the specified range of oper ating environments Operation in conditions other than those specified can cause damage to the equipment WARNING 3 2 Accuracy and Temperature Effects The accuracy of the encoder scale is a key el
15. commended 4 2 1 Recommended Cleaning Solvents Before using a cleaning solvent on any part of the stage use Nitrogen or less preferably clean dry com pressed air to blow away small particles and dust For general cleaning and removal of dust use only iso propyl alcohol on AirLift 115 stages Do not use acetone on AirLift 115 stages Isopropyl alcohol should be conservatively applied to a clean lint free cloth and the cloth should be used to wipe down the stage Do not use an excessive amount of solvent as it could enter the body of the stage and potentially damage the air bearing The AirLift 115 ballscew drive requires periodic lubrication THK AFE CA cleanroom rated grease is applied to the ballscrew during assembly at Aerotech s factory For maintenance lubrication use only grease Greases of different physical properties cannot be mixed and doing so could degrade the per formance of the stage and eventually cause stage failure www aerotech com Chapter 4 21 Maintenance AirLift 115 Series Stage User s Manual 4 2 2 Cleaning Process It is recommended that the air bearing surfaces be cleaned often to prevent potential damage to the stage or decreased performance Blow the entire stage with Nitrogen or clean dry compressed air often to prevent dust form building up on the stage In order to clean the entire length of the air bearing surfaces it is necessary to move the stage to the positive travel limit
16. ement in the overall positioning accuracy In most stages a scale error can be expected if the temperature of the scale differs from 20 C 68 F however the AirLift 115 is designed with encoder scales having vary small coefficients of thermal expansion CTE This feature makes the accuracy of the stage much less dependent on the operating temperature Although the accuracy is much less sensitive to temperature than many systems the best accuracy will still be achieved if the stage is operated at the 20 C 68 F temperature at which it was calibrated www aerotech com Chapter 3 13 Operating Specifications AirLift 115 Series Stage User s Manual 3 3 Basic Specifications Basic AirLift 115 series positioning stage specifications are shown in Table 3 2 For the most recent spec ifications see Aerotech s website www aerotech com Table 3 2 115 Series Specifications LN ZEZE III Accuracy 1 Certified with each stage 2 Specifications are for centered load Other loading configurations will affect specifications 3 Axis orientation for on axis loading is listed 4 Specifications are for single axis systems measured 25 mm above the tabletop Performance of multi axis systems is payload and workpoint dependent Consult factory for multi axis or non standard applications 5 To protect air bearing against under pressure condition an in line pressure switch tied to the motion controller is required 6 Air suppl
17. ge Figure 4 2 Cover Plate Mounting Screw Removal 3 The ballnut and grease fitting should be visible through the window as shown in Figure 4 3 Engage a grease gun with appropriate attachment over the ballscrew s grease fitting AirLift 115 stages use grease fitting C MT6x1 and THK s grease gun MG70 with a Type attachment is recommended www aerotech com Chapter 4 23 Maintenance AirLift 115 Series Stage User s Manual Grease Fitting Mechanical Stop Figure 4 3 Grease Fitting and Hard Stop Location 4 Generally it is recommended that grease be pumped into the ballnut until it just begins to seep out of the nut and onto the screw shaft On AirLift 115 stages this can be difficult to see Use caution when pump ing grease as applying too much can significantly increase the torque required to drive the stage and pre vent lubrication from being evenly dispersed along the screw shaft Remove any clumps of excess grease and wipe down any surfaces other than the ballscrew that may have come in contact with the grease 5 Afterthe ballnut has been properly greased reinstall the cover plate and restore power to the stage 6 Slowly cycle the stage back and forth through travel for a minimum of 10 cycles to distribute the lubri cation 24 Chapter 4 www aerotech com AirLift 115 Series Stage User s Manual Warranty and Field Service Appendix A Warranty and Field Service Aerotech Inc warrants its products to be f
18. ges of a brushless motor high acceleration no brushes to wear and lower heating yet it has zero cogging for extremely smooth motion and accuracy BMS motors for AirLift 115 are fitted with a fail safe brake which coupled with the precision ground ballscrew drive eliminates the need for the pneumatic counterbalance typically seen on vertical air bearing stages Limit switches and mechanical shock absorbers which protect the carriage from over travel are also stand ard Air Bearing Base Feedback Connector Linear Encoder Air Inlet Fitting 6 mm OD Tubing Block Hard Stop Cover Plate Manifold Feedback Connector Rotary Encoder Motor Connector Figure 1 2 AirLift 115 Series Stage Components 2 Chapter 1 www aerotech com AirLift 115 Series Stage User s Manual Overview 1 1 1 Optional Features Custom designed AirLift 115 stages can be ordered with features such as higher resolution custom travel lengths and custom mounting options The standard options for the AirLift 115 are shown in Table 1 1 Con tact the Aerotech factory for more details about custom designed stages Table 1 1 Model Numbering System AirLift 115 50 mm travel 050 AirLift 115 100 mm travel 100 AirLift 115 150 mm travel 150 BMS100 Brushless servomotor with connectors and brake BRK Www aerotech com Chapter 1 3 Overview AirLift 115 Series Stage User s Manual 1 2 Dimensions 20X M6X1 0 v9
19. he cleaning process and specify recommended cleaning solvents NOTE The bearing area must be kept free of foreign matter and moisture otherwise the performance and life expectancy of the stage will be reduced See Section 2 2 for air requirements To minimize the possibility of bodily injury confirm that all electrical power is disconnected prior to making any mechanical adjustments DANGER 4 1 Service and Inspection Schedule Lubricant inspection and replenishment for AirLift 115 series stages depends on conditions such as duty cycle speed and operating environment An inspection interval of once per month is recommended until a trend develops for the application The grease should be fresh and soft and evenly distributed over the entire length of the screw shaft Longer or shorter inspection intervals might be required to maintain a film of lubri cant on the ballscrew If the stage is under a high duty cycle it might be necessary to lubricate the screw as often as once per week If the application process uses only a small portion of travel for most of the duty cycle you should periodically drive the stage through the full travel to redistribute the lubrication along the screw shaft The ballscrew support bearings are sealed and should not need lubrication under normal use 4 2 Cleaning and Lubrication Only the ballscrew of the AirLift 115 stage requires lubrication Periodic cleaning to remove dust from the stage is also re
20. iguration the input to the controller is seen as a logic 0 typical 0 4V 12 8mA when no limit condition is present When the limit switch is activated a 5V source through a pull up resistor on the controller causes a logic 1 typically 4 8 5V to be seen by the controller input See Figure 3 1 for a diagram of limit switch wiring 5V Pull Up Resistor AirLift 115 Limit Input To Controller NC Limit Switch Controller Figure 3 1 Limit Switch Wiring 16 Chapter 3 www aerotech com AirLift 115 Series Stage User s Manual 3 5 Standard Motor Wiring Stages fitted with standard motors and encoders come from the factory completely wired and assembled For reference connector pin outputs and general wiring information are given in the following figures Pin outputs are defined in Table 3 4 Operating Specifications NOTE Refer to the other documentation accompanying your Aerotech equipment Call your Aerotech rep resentative if there are any questions on system configuration NOTE If you are using your own cables to connect the stage ensure that motor and ground wires can handle current higher than the continuous current listed in Table 3 3 The voltage rating of the wire insulation must be greater than the bus voltage listed in Table 3 3 13 e 25 9 22 5 18 14 1 Detail A1 DB25P 00101 View Connector Contact Side Figure 3 2 www aerotech com CW C
21. irLift 115 positioning stage This chapter introduces standard and optional features of the AirLift 115 stages and gives general safety pre cautions The AirLift 115 is a single axis air bearing lift stage available in travels of 50 mm 100 mm and 150 mm Figure 1 1 Typical AirLift 115 Series Positioning Stage NOTE Aerotech continually improves its product offerings and listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product information at www aerotech com www aerotech com Chapter 1 1 Overview AirLift 115 Series Stage User s Manual 1 1 Standard Features The AirLift 115 series stages offer an ideal solution for applications that require stringent Z direction posi tioning while maintaining extremely tight angular performance over full travel Applications include sem iconductor wafer inspection and testing non contact metrology optical inspection systems and laser processing applications The AirLift 115 incorporates air on air preload in the lateral directions of motion The opposing thin film pres sure maintains the bearing nominal gap tolerance This design in addition to the large air bearing surfaces that distribute the load over a large surface area results in a stage with outstanding stiffness Aerotech s BMS series of brushless rotary motors are included with the AirLift 115 series stages This motor has all the advanta
22. is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply If any Aerotech product cannot be made functional by telephone assistance or pur chased replacement parts and cannot be returned to the Aerotech service center for repair then the following field service policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech cov ering all transportation and subsistence costs and the prevailing labor cost includ ing travel time necessary to complete the repair Aerotech Inc Phone 412 963 7470 101 Zeta Drive Pittsburgh PA Fax 412 963 7459 15238 2897 Appendix A www aerotech com AirLift 115 Series Stage User s Manual Technical Changes Appendix B Technical Changes Table B 1 Current Changes 1 01 00 Section s Affected General Information Section 1 4 Section added Section 3 1 Section added Chapter 2 Installation Section 2 1 Sec Safety information and warnings added tion 2 4 and Section 1 3 Section 3 5 Note about motor wire current and voltage requirements added www aerotech com Appendix B 27 Technical Changes AirLift 115 Series Stage User s Manual Table B 2 Archived Changes Section s Affected General Information 28 Appendix B www aerotech com Index AirLift 115 Series Stage User s Manual Index
23. nto service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national implementing legislation i e as a whole including the equipment referred to in this Declaration Authorized Representative Manfred Besold Address Name Position Location Date AEROTECH GmbH S d West Park 90 D 90449 N mberg Alex Weibel bs Engineer Verifying Compliance Pittsburgh PA December 16 2010 Chapter 1 www aerotech com AirLift 115 Series Stage User s Manual Installation Chapter 2 Installation This chapter describes the installation procedure of the AirLift 115 stage including handling the stage prop erly the proper base for stage mounting attaching the payload and making the electrical and pneumatic con nections Installation must follow the instructions in this chapter Failure to follow these instructions could result in injury and damage to the equipment WARNING 2 1 Unpacking and Handling the Stage Each stage has a label listing the system part number and serial number These numbers contain information necessary for maintaining or updating system hardware and software Locate this label and record the infor mation for later reference If any damage has occurred during shipping report it immediately Before operating the stage it is important to let the stage
24. ntrol system setup involves connecting a stage and motor combination to the appropriate drive chassis with the cables provided Connect the provided cables to the motor and feedback connectors on the stage Labels on the drive indicate the appropriate connections Refer to your drive manuals and documentation for additional installation and operation information In some cases if the system is uniquely configured a drawing showing system interconnects is supplied Motor and encoder wiring and connector pin outputs are given in Section 3 5 Never connect or disconnect any electrical component or connecting cable while power is applied or serious damage may result WARNING The stage s protective ground is located on pin A4 of the motor connector If you are using cables other than those provided by Aerotech to connect the motor to the drive you must connect pin A4 to a ground connection WARNING 2 4 1 End of Travel Limit Switches AirLift 115 stages are equipped with a pair of end of travel limit switches Referto Section 3 4 for a descrip tion of limit switch operation and wiring 12 Chapter 2 www aerotech com AirLift 115 Series Stage User s Manual Operating Specifications Chapter 3 Operating Specifications This chapter contains general technical information about AirLift 115 series stages Included are basic prod uct specifications and general information on limit switches and motor wiring 3 1 Environmental Specifi
25. or approval within 30 days of notification will result in the product s being returned as is at the buyer s expense Repair work is warranted for 90 days from date of shipment Replacement com ponents are warranted for one year from date of shipment At times the buyer may desire to expedite a repair Regardless of warranty orout Rush Service of warranty status the buyer must issue a valid purchase order to cover the added rush service cost Rush service is subject to Aerotech s approval www aerotech com Appendix A 25 Warranty and Field Service On site Warranty Repair On site Non warranty 26 Repair Company Address AirLift 115 Series Stage User s Manual If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts and cannot be returned to the Aerotech service center for repair and if Aerotech determines the problem could be warranty related then the following policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech cov ering all transportation and subsistence costs For warranty field repairs the cus tomer will not be charged for the cost of labor and material If service is rendered at times other than normal work periods then special service rates apply If during the on site repair it is determined the problem
26. or trips at 100 C 7 Ambient operating temperature range 0 C 25 C Consult Aerotech for performance in elevated ambient temperatures 8 All Aerotech amplifiers are rated Apk use torque constant in N m Apk when sizing www aerotech com Chapter 3 15 Operating Specifications AirLift 115 Series Stage User s Manual 3 4 Limit Switches AirLift 115 series stages are provided with end of travel limit switches The limit switches signal when the stage has reached its maximum useable travel distance in either direction 3 4 1 Limit Switch Operation Limit switches are integral to the stage s linear encoder They are placed directly on the encoder scale at the extents of nominal stage travel When the stage encoder senses a limit a clockwise CW or counter clockwise CCW limit signal is generated If the stage is driven past the electrical limit it will encounter the hard stop The stage s shocks are designed to the stage s specifications Damage to the stage could result from a hard stop strike if the stage is driven at conditions exceeding its maximum velocity accel eration or payload specifications WARNING 3 4 2 Limit Switch Wiring Limit switches are open collector TTL compatible devices powered by 5 Volts that change output states when the stage approaches its maximum travel distance Since they are open collector devices they may be interfaced to 24 Volt logic inputs With the NC limit conf
27. ree from defects caused by faulty mate rials or poor workmanship for a minimum period of one year from date of shipment from Aerotech Aerotech s liability is limited to replacing repairing or issuing credit at its option for any products that are returned by the original purchaser during the warranty period Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer where or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or sub sequently provided or whether or not Aerotech s products are specifically designed and or manufactured for buyer s use or purpose Aerotech s liability or any claim for loss or damage arising out of the sale resale or use of any of its prod ucts shall in no event exceed the selling price of the unit Aerotech Inc warrants its laser products to the original purchaser for a minimum Laser Products period of one year from date of shipment This warranty covers defects in work manship and material and is voided for all laser power supplies plasma tubes and laser systems subject to electrical or physical abuse tampering such as opening the housing or removal of the serial tag or improper operation as determined by Aerotech This warranty is also voided for failure to comply with Aerotech s return procedures Claims for shipment damage evident or concealed must be filed with the carrier Return Procedure by the
28. sary for use A standard airflow rate of 45 to 55 SLPM standard liters per minute at 551 kPa should be observed for the entire sys tem To protect the air bearing against under pressure or loss of pressure an inline pressure switch set at no lower than 40 psi and tied to the motion controller s E stop is recommended 2 3 Attaching the Payload to the Stage To prevent damage to delicate payloads test the operation of the stage before the payload is attached to the stage table Proceed with the electrical installation and test the motion control system in accordance with the system documentation Document all results for future reference For information on electrical connections refer to Section 2 4 The payload should be flat rigid and comparable to the stage in quality For valid accuracies the mounting interface should be flat within per 50mm www aerotech com Chapter 2 11 Installation AirLift 115 Series Stage User s Manual 2 4 Electrical Installation Electrical installation requirements will vary depending on stage options Installation instructions in this sec tion are for stages equipped with standard Aerotech motors intended for use with an Aerotech motion control system Contact Aerotech for further information regarding stages that are otherwise configured Aerotech motion control systems are adjusted at the factory for optimum performance When the AirLift 115 series stage is part of a complete Aerotech motion co
29. stabilize to room temperature for at least 12 hours Clean the stage by blowing it off with pressurized nitrogen or clean oil free air Remove all red anodized shipping brackets and lifting hardware before attempting to move the axis see Fig ure 2 1 Improper stage handling could adversely affect the stage s performance Therefore use care when moving the stage Manually lifting or transporting the stage can result in injury WARNING Lift the stage only by the provided lifting hardware WARNING Do not attempt to move the stage until the air supply detailed in Section 2 2 has been installed Moving the stage table without air supplied can cause permanent damage to the stage WARNING www aerotech com Chapter 2 9 Installation AirLift 115 Series Stage User s Manual Shipping Brackets Lifting Hardware Figure 2 1 AirLift 115 With Lifting Hardware and Shipping Brackets Shown 10 Chapter 2 www aerotech com AirLift 115 Series Stage User s Manual Installation 2 2 Air Supply Requirements The quality of the air supplied to the air bearing is important for the operation of the system If compressed air is used it must be filtered to 0 25 microns dry to 0 F dew point and oil free If nitrogen is used it must be 99 9996 pure and filtered to 0 25 microns The filtration requirement is to prevent particles from clogging the air bearing Air pressure in the range of 517 kPa to 551 kPa 75 psi to 80 psi is neces
30. thereby extending the carriage out of the stage base the maximum amount Remove any obstruc tions that could potentially interfere with motion of the carriage then jog the stage to the positive travel limit Once the stage is in position disable the axis and remove power to the stage Clean all exposed surfaces as described in Section 4 2 1 Once the solvent has dried you can restore power Moving the stage table without air supplied can cause permanent damage to the stage Refer to Section 2 2 for more information about air requirements and installation WARNING To minimize the possibility of bodily injury confirm that all electrical power is disconnected prior to making any mechanical adjustments DANGER Air Bearing Surfaces Figure 4 1 Air Bearing Surfaces and Encoder Scales Require Periodic Cleaning 22 Chapter 4 www aerotech com AirLift 115 Series Stage User s Manual Maintenance 4 2 3 Ballscrew Lubrication Procedure Use the following steps to lubricate the ballscrew As stated in Section 4 2 1 use only AFE CA grease for lubrication To minimize the possibility of bodily injury confirm that all electrical power is disconnected prior to making any mechanical adjustments DANGER 1 Jogthe stage carriage to the negative travel limit and remove power to the stage 2 Remove the mounting screws to the cover plate on the side of the stage as shown in Figure 4 2 to gain access to the inside of the sta
31. y must be clean dry to 0 F dew point and filtered to 0 25 um or better 14 Chapter 3 www aerotech com AirLift 115 Series Stage User s Manual Operating Specifications Table 3 3 Motor Specifications E T ei Performance ae 1 5 Rated Speed 3 000 Rated Power Output Con m 112 133 tinuous Electrical Specifications 9 BEMF Constant Line Line Voltspk Krpm Max Continuous Current Stall Amprk 2 3 2 Amprms 1 6 9 2 t Stall 9 Amprms 6 5 4 oz in Amppk 20 1 38 1 Torque Constant 8 En N m Amprms 0 20 0 38 oz in Amprms 284 53 9 N mAW 0 050 0 076 2 4 oz in W 7 02 10 74 Resistance 25 C Line ohms Ld 4 12 9 Line Inductance Line Line 1 2 40 Mechanical Specifications Motor Weight kg Ib 1 1 2 4 1 5 3 3 kg m 1 96 10 5 3 71 105 Rotor Moment of Inert oz in s 0 0028 0 0053 Max Radial Load N Ib 89 20 89 20 Max Axial Load N Ib 89 20 89 20 1 Performance is dependent upon heat sink configuration system cooling conditions and ambient temperature 2 Values shown 75 C rise above a 25 C ambient temperature with housed motor mounted to a 250 mm x 250 mm x6 mm alu minum heat sink 3 Peaktorque assumes correct rms current consult Aerotech 4 Torque constant and motor constant specified at stall 5 All performance and electrical specifications 10 6 Maximum winding temperature is 100 C thermist
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