User Manual - Laboratory ovens
Contents
1. If you do please contact us 8 00 a m to 6 00 p m Fastern Time at 1 740 373 4763 Direct 1 800 438 4851 Toll Free U S and Canada 1 877 213 8051 FAX http www thermoscientific com Internet Worldwide Web Home Page service led marietta thermofisher com Service E Mail Address Our Sales Support staff can provide information on pricing and give you quotations We can take your order and provide delivery information on major equipment items or make arrangements to have your local sales representative contact you Our products are listed on the Internet and we can be contacted through our Internet home page Our Service Support staff can supply technical information about proper setup operation or troubleshooting of your equipment We can fill your needs for spare or replacement parts or provide you with on site service We can also provide you with a quotation on our Extended Warranty for your Thermo Scientific products Whatever Thermo Scientific products you need or use we will be happy to discuss your applications If you are experiencing technical problems working together we will help you locate the problem and chances are correct it yourself over the telephone without a service call When more extensive service is necessary we will assist you with direct factory trained technicians or a qualified service organization for on the spot repair If your service need is covered by the warranty we will arrange for the unit to be repa2. Interior 23 W x 18 D x 19 1 2 H 58 x 46 x 50 cm Exterior 31 5 8 W x 24 1 4 D x 35 H 80 x 62 x 89 cm Capacity 4 6 cubic feet Weight net 3490M 1 3492M 1 180 lbs 81 8 kg 3494M 1 3495M 1 220 lbs 100 0 kg 3496M 1 3497M 1 202 lbs 91 8 kg 3498M 1 3499M 1 234 lbs 106 4 kg Environmental Conditions Pollution Degree 2 Installation Category II Altitude 2000 meters MSL mean sea level Humidity 8096 maximum non condensing Electrical supply 120VAC or 240VAC Voltage tolerance 10 of normal rated line Temperature 15 C to 40 C Product usage This product is intended for use indoors only Thermo Scientific Clean Room Oven 3 3 Location Stacking Units Thermo Scientific Section 4 Unpacking and Installation The shipping carton should be inspected upon delivery When received carefully examine for any shipping damage before unpacking If damage is discovered the delivering carrier should both specify and sign for the damage on your copy of the delivery receipt Open the carton carefully making certain that all parts are accounted for before packaging materials are discarded After unpacking if damage is found promptly report it to the carrier and request a damage inspection promptly Important Failure to request an inspection of damage within a few days after receipt of shipment absolves the carrier from any liability for damage Call for a damage inspection promptly BE ADVISED
3. To maintain a constant temperature for a specified time 1 Press the PAGE button until you reach the program list ProG LiSt 2 Press the SCROLL button until display reads tYPE 3 Press the UP or DOWN button until display reads dwEll 4 Press the SCROLL button until display reads dur 5 Press the UP or DOWN button to select a time in dwell units seconds minutes or hours set in the dwL U parameter StEP To climb instantaneously from the current temperature to a specified temperature La 2 Thermo Scientific Press the PAGE button until you reach the program list ProG LiSt Press the SCROLL button until display reads tYPE Press the UP or DOWN button until the display reads StEP Press the SCROLL button until display reads tGt Press the UP or DOWN button to set a target setpoint Clean Room Oven 6 11 Section 6 Programmable Models Setting the Segment Type 6 12 Clean Room Oven continued cALL Running Multiple Programs 4x16 Segment Programmable Models Only To call a program as a subroutine If you want to run multiple programs you can program the controller to call or link one program to another This makes it possible to run one program at any time during another program and also return to the original program if desired 1 Press the PAGE button until you reach the program list ProG LiSt 2 Press the SCROLL button until display reads tYP
4. 3492M 1 22 0 minutes 3494M 1 3495M 1 04 18 0 minutes 3496M 1 3497M 1 1 0 minutes ambient to 90 C 3498M 1 3499M 1 20 5 minutes Temperature Recovery Time of Load 3490M 1 3492M 1 2 2 2222 8 minutes 3494M 1 3495M 1 00 0 ee aes 4 minutes 3496M 1 3497M 1 2 0 2 eee eee 11 minutes 90 C after 1 min door opening of 90 degrees 3498M 1 3499M 1 0 eee 7 minutes Method Door open 90 for 1 minute Oven loaded with 9 4 wafer boats filled with wafers and evenly distributed in the oven A thermocouple measured wafer temperature in the center wafer boat Time recorded equals elapsed time for wafer temperature to reach 90 of setpoint 150 C Note Performance measured under controlled laboratory conditions Your oven s performance may be slightly different depending on application A Dimensions 3490M 1 3492M 1 Interior 13 W x 18 D x 19 1 2 H 33 x 46 x 50 cm Exterior 21 5 8 W x 24 1 4 D x 35 H 55 x 62 x 89 cm Capacity 2 6 cubic feet 3494M 1 3495M 1 Interior 18 W x 18 D x 19 1 2 H 46 x 46 x 50 cm Exterior 26 5 8 W x 24 1 4 D x 35 H 68 x 62 x 89 cm Capacity 3 6 cubic feet 3 2 Clean Room Oven Thermo Scientific Section 3 Specifications Dimensions continued 3496M 1 3497M 1 Interior 14 W x 18 D x 19 1 2 H 36 x 46 x 50 cm Exterior 26 5 8 W x 24 1 4 D x 35 H 68 x 62 x 89 cm Capacity 2 8 cubic feet 3498M 1 3499M 1
5. 4 Unpacking and Installation Latch Adjustment Ifthe door opens while oven is heating follow the procedure below to adjust the latch The door will have to be adjusted to close more easily to Heatin g Door 0 pens low for the expansion occurring during heating 1 Open the door Use 5 64 Allen wrench to remove the Allen setscrew from the door strike assembly 2 Rotate catch mechanism counterclockwise to increase length and thereby position door a little farther away from the body of the oven The number of turns will have to be estimated Re insert and tighten Allen setscrew securely 3 Repeat if necessary to achieve satisfactory operation Depending on operating temperature the procedure may have to be repeated to ensure proper door operation Thermo Scientific Clean Room Oven 4 5 Section5 Features ALT AL2 REM MAN AT Hi Limit H H H H RAMP o BEES Bu GW ES A 1 2 3 4 5 Figure 5 1 Control Panel Control Panel 1 Power Switch Turns all power to the unit on or off 2 Power Switch Status Lamp When power is on this green lamp is lit 3 Hi Limit Thermostat This hydraulic type thermostat provides mechanical overtemperature back up control if the temperature programmer controller should fail 4 Hi Limit Thermostat Status Lamp When lit this red lamp signals that the temperature is exceeding the hi limit setpoint established by the user 5 Programmer Controller 4
6. 7 1 Door Gasket Repair vassi era ae and 7 1 Complete Gasket Replacement u mn a em dee 7 2 Filter Replacement arc ote sera 7 2 Parts Replacement General nenne das sue deed is 7 2 Section8 Replacement Parts 0cc cece eee eee eee nennen 8 1 Ordering Procedures aaa aa il Red iR AERE RETE RE 8 2 vi Clean Room Oven Thermo Scientific Thermo Scientific Section 1 Description This advanced series of Ultra Clean 100 ovens incorporates programmer controller which can be conveniently and easily operated by the user from a front panel keyboard Mnemonics in the display area of the programmer controller keeps the user informed of the parameters which are being acted upon An additional option allows the unit to be operated in either automatic or manual mode Mechanical air circulation provides optimum temperature uniformity and rapid recovery after door openings Two systems protect oven contents against overheating An alarm setpoint programmed in the controller initiates a visual signal in the event the actual temperature exceeds the limit In addition a second system is an independent hydraulic thermostat set by the operator to a temperature slightly higher than the maximum operating temperature This thermostat is a mechanical backup to protect contents in the unlikely event the programmer controller experiences a failure A red status lamp warns of the overtemperature condition Clean Room Oven 1 1 Section2 Safe
7. Each guide has 2 sets of tabs Insert the top tabs first then the bottom tabs Slide shelves into place The following procedure is based on test information and a survey of methods currently used by microchip manufacturers e The person cleaning the oven prior to clean room use should wear disposable polyethylene gloves to prevent skin oils from contaminating the oven surfaces e Use a lint free soft paper manufactured for clean room maintenance e Remove shelves floor and inside side walls from oven and clean thoroughly Clean interior chamber including heaters blower wheel and very gently the sensor tube e Move the oven into the clean room and follow installation procedures noting that it must be cleaned AGAIN before use After installing the shelves bake the empty oven with a steady air exchange until particle count is reduced to an acceptable level For working temperatures about 200 C bake 2 to 3 hours at 200 C Turn the power switch on the left side of the front panel to OFF the bottom half of the rocker pushed in Plug the oven into an electrical outlet providing the power that is specified on the oven nameplate Thermo Scientific Gas Connection Door Adjustment Thermo Scientific Section 4 Unpacking and Installation Inert gas such as nitrogen can be injected into the chamber to flush out impurities The gas inlet on the back of the oven is a 1 8 inch NPT pipe Connect Tygon R 3603 tubing to thi
8. Ovens must be cleaned and baked out prior to use in clean rooms Note Disconnect unit from the power source when not in use A Place the oven where it is to be operated in an area away from drafts Provide enough clearance to allow free air movement around the oven Leave clearance at the rear for gas connection and adjustment of air vent Position the unit with room for 90 of door opening to the right The oven must not be placed on a combustible surface Warning These ovens should not be placed one on top of the other because 1 There is danger of the oven on top being accidentally knocked over with possibility of serious injury and property damage 2 Heat from oven below can damage control panel components of oven above with possible resulting electrical short and fire To arrange ovens vertically order optional space saver stacking rack Model 3480 2 A Clean Room Oven 4 1 Section 4 Unpacking and Installation 4 2 Leveling Shelf Installation Cleaning Baking Out the Oven Electrical Power Clean Room Oven The oven should be level though its operation does not depend on this Do not remove the ovens rubber feet they are necessary for proper ventilation removing the rubber feet may also cause erratic temperature control and damage to the electronic components Install shelf guides in desired locations along the inside sides of the oven Make sure the pair of guides for each shelf are at the same level
9. be manually set or automatically tuned To tune automatically you must tune above and below the transfer point G SP If the process value is below the transfer point G SP the calculated values will automatically be inserted into the SEt 1 set and if the process value is above G SP the calculated values will automatically be inserted into the SEt 2 Autotuning The Autotune feature automatically sets up the PID values in the control parameters to suit new process conditions To tune your oven using autotuning 1 Load your oven with a load similar to your normal load and close the door 2 Set the setpoint temperature 3 Press the PAGE button until the display reads Atun LiSt 4 Press the SCROLL button until tunE OFF is displayed 5 Press the UP or DOWN button to select on 6 Simultaneously press the PAGE and SCROLL buttons to return to the HOME DISPLAY The display will flash tunE while tuning is in progress Thermo Scientific Clean Room Oven 6 15 Section 6 Programmable Models 6 16 Adaptive Tuning Clean Room Oven Adaptive tuning continuously evaluates tuning parameters Adaptive tuning automatically installs new values if better accuracy is possible Adaptive tuning should be used when the characteristics of a process change due to load or setpoint changes or in a process that can not handle the oscillation caused by a one shot tune To tune your oven using adaptive tuning ds
10. button operation controller allows user to set and control operating temperature and program ramp to setpoint procedures operating details follow in the upcoming OPERATION section Thermo Scientific Clean Room Oven 5 1 Section6 8 Segment amp 4x16 Segment Programmable Models The 8 segment programmable controller consists of a microprocessor based three mode PID Proportional Integral Derivative programmable temperature controller with over temperature protection and appropriate output switching devices to control the oven The digital readout continuously displays chamber upper display and setpoint lower display temperatures unless the SCROLL or PAGE button is depressed The programmable controller can be used as a single setpoint controller or as a programmable controller The 8 segment digital model enables eight segments of programming The 4x16 segment programmable controller consists of a microprocessor based three mode PID Proportional Integral Derivative programmable temperature controller with over temperature protection and appropriate output switching devices to control the oven The digital readout continuously displays chamber upper display and setpoint lower display temperatures unless the SCROLL or PAGE button is depressed The programmable controller can be used as a single setpoint controller or as a programmable controller The 4 program controller has four 16 segment programs Note The controller will
11. display units Range 1 9999 Clean Room Oven 6 5 Section 6 Programmable Models Controller Parameters continued 6 6 Clean Room Oven Alarms Pid LiSt G SP Gain Setpoint Is the temperature at which the controller switches from the SEt1 PID values to the SEt 2 PID values Pb Proportional band in display units SEt 1 ti Integral time in seconds SEt 1 td Derivative time in seconds SEt 1 Pb2 Proportional band SEt 2 ti2 Integral time in seconds SEt 2 td2 Derivative time in seconds SEt 2 ACCS LiSt Access List Access Code Code needed to enter or change the other configuration amp 8 parameters which are not normally accessible Not accessible The controller will flash an alarm message in the home display if an alarm condition is detected Note The following alarm messages are factory default settings and may vary if you have changed the configuration of your controller IDHi 0 C 2FSH 250 C IdHi PV deviation high alarm 2FSH PV full scale high alarm LCr load current low alarm HCr load current high alarm S br Sensor break check that sensor is connected correctly L br Loop Break Check that the heating circuits are working properly Ld F Heater Circuit Fault indication of either an open or short solid sate relay a blown fuse missing supply or open circuit heater SSr F Solid state relay failure indications in a solid state relay indicates eithe
12. for 3495M units can be ordered with brackets as Shelves for 3499M units can be ordered with brackets as Shelves for 3497M units can be ordered with brackets as Please refer to the Specification Plate for the complete model number serial number and series number when requesting service replacement parts or in any correspondence concerning this unit All parts listed herein may be ordered from the Thermo Scientific dealer from whom you purchased this unit or can be obtained promptly from the factory When service or replacement parts are needed check first with your dealer If the dealer cannot process your request then contact our Technical Services Department Prior to returning any materials please contact our Technical Services Department for a Return Materials Authorization number RMA Material returned without an RMA number will be refused Thermo Scientific Thermo Fisher Scientific 401 Millcreek Road Marietta Ohio 45750 United States www thermofisher com ThermoFisher SCIENTIFIC
13. procedures outlined in the proceeding sections of this manual This procedure is for 4x16 Segment Programmable Models only The same steps are used when creating a new program and editing an existing program with the exception being that a new program starts with all its segments set to End in the tYPE parameter Temporary changes can be made to these parameters when the program is in the Hold state but permanent changes must be made in the Reset state Follow the steps below to create or edit a program 1 Press the PAGE button until you reach the program list ProG LiSt 2 Press the SCROLL button until display reads PrG n 3 Press the UP or DOWN button to select a number for a new program or to edit an existing program Clean Room Oven 6 7 Section 6 Programmable Models Hb Holdback 6 8 Clean Room Oven Holdback consists of a value and a type If the measured value lags behind the setpoint by an undesirable amount during a ramp or dwell the holdback feature can be used to freeze the program at its current state the HOLD light will flash The program will resume when the error comes within the holdback value OFF holdback is disabled Lo Deviation Low Holdback holds the program back when process variable deviates below the setpoint by more than the holdback value Hi Deviation High Holdback holds the program back when process variable deviates above the setpoint by more than the holdback value bAnd Devia
14. return to the HOME DISPLAY if left idle for more than a few seconds A Note Once the desired parameter has been selected depressing either the UP or DOWN button will change the parameter value In all cases the value shown on display is the current working value of that parameter A Thermo Scientific Clean Room Oven 6 1 Section 6 Programmable Models AUTO MAN Output 1 Display Button Window EUROTHERM 2416 Upper UR E E Display 33 El Lower e c Display RUN HOLD Button UP ARROW Button PAGE DOWN ARROW Button SCROLL Button Button Figure 6 1 4x16 amp 8 Segment Programmable Models with OTP Basic Operation When the controller is turned ON it will perform a short self test and then change to the HOME DISPLAY The HOME DISPLAY shows the measured temperature process value in the upper display and the desired value setpoint in the lower display To Change the if you want to change the setpoint press the UP or DOWN button until S etp oint the desired setpoint value is displayed in the lower display and then release the button To View the Display From the HOME DISPLAY press the SCROLL button The display will Units briefly show the temperature units in C F K and then return to the HOME DISPLAY if a different temperature unit is required call Technical Services 6 2 Clean Room Oven Thermo Scientific Section 6 Programmable Models To View the Outp Ut From the HOME DISPLAY press the SC
15. the UP or DOWN ARROW to select the holdback value in display units rmP U Press the UP or DOWN ARROW to toggle between ramp units SEc min or Hour Controller will default to SEc dwL U Press the UP or DOWN ARROW to toggle between dwell units SEc min or Hour Controller will default to SEc Cyc n Press the UP or DOWN ARROW to set the number of program cycles 1 to 999 or cont The controller will default to cont SEG n Press the UP or DOWN ARROW to select the segment number 1 8 in 8 segment models 1 16 in 4x16 models tYPE Press the UP or DOWN ARROW to select the segment type End end of program rmPr ramp rate ramp to a specified setpoint at a set rate rmp t ramp time ramp to a specified temperature in a set time dwEll to maintain a constant temperature for a set time StEP climb instantaneously from current to specified temperature cALL to call a program as a subroutine available only on 4x16 programmable models The controller will default to End Other parameters used with tYPE include tGt target setpoint Rate rate of temperature increase and dur time to target setpoint or time to dwell End t End segment type dwELL dwell continuous rSEt reset and S OP End Segment Output power level AL LiSt Alarm List IdHi Deviation High Alarm Atun LiSt Autotune List tunE One shot autotune enable drA Adaptive tune enable drA t Adaptive tune trigger level in
16. Class 100 Clean Room Ovens Operating Manual and Parts List LT1476X7 Rev 0 Visit us online to register your warranty www thermoscientific com warranty Preface Models covered in this manual 3490M 6879 26c 3492M 6881 26c 3492M 1 6882 26c 1 MANUAL NUMBER LT1476X7 7006879 0 6 4 10 Transfer to Marietta was LT1476X 5 30 08 CCS REV ECR ECN DATE DESCRIPTION By Thermo Scientific Clean Room Oven i Preface CAUTION Contains Parts and Assemblies Susceptible to Damage by Electrostatic Discharge ESD Important Read this instruction manual Failure to read understand and follow the instructions in this manual may result in damage to the unit injury to operating personnel and poor equipment performance A Caution All internal adjustments and maintenance must be performed by qualified service personnel A Material in this manual is for information purposes only The contents and the product it describes are subject to change without notice Thermo Fisher Scientific makes no representations or warranties with respect to this manual In no event shall Thermo be held liable for any damages direct or incidental arising out of or related to the use of this manual 2010 Thermo Scientific All rights reserved Clean Room Oven Thermo Scientific Preface Important operating and or maintenance instructions Read the accompanying text carefully gt gt gt Potential ele
17. E 3 Press the UP or DOWN button until display reads CALL 4 Press the SCROLL button until display reads PrG n 5 Press the UP or DOWN button to select a program number to be linked 6 Press the SCROLL button until display reads CYC n 7 Press the UP or DOWN button to select the number of cycles the linked program is to be run End To end or repeat a program 1 Press the PAGE button until you reach the program list ProG LiSt 2 Press the SCROLL button until display reads tYPE 3 Press the UP or DOWN button until display reads End 4 Press the SCROLL button until display reads End t 5 Press the UP or DOWN button to toggle between dwEll an indefinite dwell S OP End Segment Output Power and rSET reset Thermo Scientific Setting the Target Setpoint Running a Program Holding a Program Cancelling a Program Thermo Scientific Section 6 Programmable Models This procedure is for 4x16 Segment Programmable Models only 1 Press the PAGE button until you reach the program list ProG LiSt 2 Press the SCROLL button until display reads tGt 3 Press the UP or DOWN button to set the target setpoint temperature 8 Segment Programmable Models only To run a program press the RUN HOLD button the RUN light will illuminate 4x16 Segment Programmable Models only To run a program press the RUN HOLD button the RUN light will illum
18. Load your furnace with a load characteristic of those you intend to heat in it Press the PAGE button until display reads Atun LiSt Press the SCROLL button until drA OFF is displayed Press the UP or DOWN button to select on Press the SCROLL button until drA t is displayed Press the UP or DOWN button until the desired trigger value is achieved Thermo Scientific Section Maintenance The Ultra Clean Class 100 Oven should be cleaned with lint free wipes and thoroughly vacuumed Caution Disconnect plug from electrical outlet before attempting any maintenance or repair of this unit Note Make no attempt to service or repair a Thermo Scientific product under warranty before consulting your Thermo Scientific dealer After the warranty period such consultation is still advised especially when the repair may be technically sophisticated or difficult If assistance is needed beyond what the distributor can provide call the Technical Services Department No merchandise however should be returned directly to the manufacturer without prior approval Door Gasket Repair Remove oven from clean room area If the door gasket is nicked or has a small tear the gasket may be repaired with RTV Sealant 3145 part 120 053 00 Form the sealant to the proper shape in the case of a nick Use the sealant to reattach a small torn piece to the rest of the gasket Allow 12 hours for the sealant to dry fully Bake the gasket
19. ROLL button twice This value Power a read only value and cannot be changed Buttons and OP1 Output 1 illuminates when the heating output of the temperature Indicators controller is on AUTO MAN Auto Manual Mode when the controller is in the automatic mode the output automatically adjusts to keep the temperature or process value at the setpoint The AUTO light will illuminate The manual mode has been disabled through factory configuration Call Technical Services for further information RUN HOLD Run Hold button e Starts a program when pressed once RUN light illuminates e Holds a program when pressed again H OLD light illuminates e Cancels hold and continues running when pressed again HOLD light is off and RUN light illuminates e Exits a program when the button is held down for two seconds RUN and HOLD lights are off e At the end of a program the RUN light will flash During holdback the HOLD light will flash PAGE button allows you to choose a parameter from a list of parameters SCROLL button allows you to choose a parameter within a list of parameters UP button allows you to increase the value in the lower display DOWN button allows you to decrease the value in the lower display Thermo Scientific Clean Room Oven 6 3 Section 6 Programmable Models Controller Parameters Home Display C measured temperature in Celsius Temperature units can not be changed without entering the con
20. ctrical hazards Only qualified persons should perform procedures associated with this symbol re gt Equipment being maintained or serviced must be turned off and locked off to prevent possible injury Hot surface s present which may cause burns to unprotected skin or to materials which may be damaged by elevated temperatures Marking of electrical and electronic equipment which applies to electrical and electronic equipment falling under the Directive 2002 96 EC WEEE and the equipment that has been put on the market after 13 August 2005 ERA This product is required to comply with the European Union s Waste Electrical amp Electronic Equipment WEEE Directive 2002 96 EC It is marked with the WEEE symbol Thermo Fisher Scientific has contracted with one or more recycling disposal companies in each EU Member State European Country and this product should be disposed of or recycled through them Further information on Thermo compliance with this directive the recyclers in your country and information on Thermo products will be available at www thermofisher com Y Always use the proper protective equipment clothing gloves goggles etc Y Always dissipate extreme cold or heat and wear protective clothing v Always follow good hygiene practices Y Each individual is responsible for his or her own safety Thermo Scientific Clean Room Oven iii Preface Do You Need Information or Assistance on Thermo Scientific Products
21. figuration Contact Technical Services if a different temperature unit is required OP 96 output power demand displayed in lower display cannot be changed C id Controller identification number PrG Program number displayed when a program is running x16 programmable models only IdHi Deviation High Alarm tunE One shot autotune enable run LiSt Program Run List PrG Currently running program only used on 4x16 programmable models StAt Displays the program status OFF run running active program hoLd program on hold HbAc waiting for process to catch up End program completed in the lower display The controller will default to OFF FASt Fast run through program no YES The controller will default e to no SEG d Flash active segment type in the lower display of the home display no YES The controller will default to no ProG LiSt Program Edit List PrG n Press the UP or DOWN ARROW to select the program number program number will be displayed in lower display on 4x16 programmable models only Hb Press the UP or DOWN ARROW to select the holdback type OFF disables holdback Lo deviation low holdback Hi deviation high holdback or bAnd deviation band holdback for the entire program The controller will default to OFF 6 4 Clean Room Oven Thermo Scientific Controller Parameters Thermo Scientific continued Section 6 Programmable Models Hb U Press
22. for several hours until the RTV has hardened completely Then return oven to the clean room area Thermo Scientific Clean Room Oven 7 1 Section 7 Maintenance Complete Gasket Replacement Hu Unplug oven from outlet before servicing Remove shelves floor and side walls 3 Lay the oven on its back side Be sure to support the oven back above the surface to protect the vent port Loosen all the Phillips screws from the trim strips holding the gasket 4 Pull the gasket out from under the trim strips 5 Starting at the seam on the hinge side slide the double lip under the trim strip and work the gasket around the door opening Smooth out any bows in the gasket and trim off any excess 6 Tighten screws holding trim strips 7 Clean oven s inner body replace floor side walls and shelves Disconnect unit from electrical outlet Filter Replacement 2 In the event unit has been in use be certain that it has cooled before doing any work in the interior 3 Filter cover is on the right hand side of interior of cabinet 4 Remove shelves 5 Locate and remove 2 screws on front of filter cover one at top and the other at the bottom 6 Note flange of filter cover which is secured to back wall by nuts Remove nuts and washers 7 Remove filter cover assembly from cabinet 8 Replace existing filter with new one 9 Reverse procedure to reassemble Parts in the event that access is required to replace hea
23. g the hinges out of position 8 Tighten all hinge screws VERY securely 9 Replace door on bottom hinge pivot bolt Replace the top pivot bolt and washer Tighten top and bottom hinge pivot bolts VERY securely to maintain proper alignment Clean Room Oven 4 3 Section 4 Unpacking and Installation Latch Adjustme nt Ifthe door does not fit snug against the gasket follow the procedure below Door Against Gasket adjust latch 1 Open the door Use a 5 64 Allen wrench to remove the Allen setscrew from the door strike assembly 2 Rotate the catch mechanism clockwise to shorten length and thereby bring door closer to body of oven The number of turns will have to be estimated 3 Re insert and tighten the Allen setscrew securely 4 Repeat this procedure as necessary to achieve a tight seal Latch Adjustme Nt If the door is too hard to open follow the procedure below to adjust the Door Hard to Open 1 Open the door Use 5 64 Allen wrench to remove the Allen setscrew from the door strike assembly 2 Rotate catch mechanism counterclockwise to increase length and thereby position door a little farther away from the body of the oven The number of turns will have to be estimated Reinsert and tighten Allen setscrew securely 3 Repeat if necessary to achieve satisfactory operation jes S ad e Allen Setscrew ESA Figure 4 1 Door Strike Mechanism 4 4 Clean Room Oven Thermo Scientific Section
24. in dwELL segments amount of time to remain at a specific temperature See Setting the Segment Type for an explanation on how to set a dwell segment 1 Press the PAGE button until you reach the program list ProG LiSt 2 Press the SCROLL button until display reads dwL U 3 Press the UP or DOWN button to toggle between seconds minutes and hours Set the number of times a group of segments or programs are to be repeated by following the steps listed below 1 Press the PAGE button until you reach the program list ProG LiSt 2 Press the SCROLL button until display reads CYC n 3 Press the UP or DOWN button to select the number of cycles you want to run or press the DOWN button to select cont so the program will run continuously Note The program ramp rate is designed to reduce the heatup rate or cooling rate that the furnace normally exhibits When not using this feature the oven will operate at its maximum heating and cooling capability A Clean Room Oven 6 9 Section 6 Programmable Models Setting the Segment Type There are five segment types Proceed with the following steps according to the type of segment you have selected rmP r Ramp To ramp linearly at a set rate to a specified temperature 1 Press the PAGE button until you reach the program list ProG LiSt 2 Press the SCROLL button until display reads tYPE 3 Press the UP or DOWN button until display reads rmP r N
25. inate or 1 Press the PAGE button until you reach the run list run LiSt 2 Press the SCROLL button until display reads PrG 3 Press the UP or DOWN button to select the program number you want to run 4 Press the RUN HOLD button once to start the program The RUN light will illuminate To put a running program on hold press the RUN HOLD button The HOLD light will illuminate To cancel a program hold the RUN HOLD button down until the RUN and HOLD lights go off Clean Room Oven 6 13 Section 6 Programmable Models Tuning Your Oven Tuning Error Gain Scheduling 6 14 Clean Room Oven The purpose of tuning your oven is to match the characteristics of your controller to the characteristics of the process being controlled Good control is evidenced by stable straight line control of the setpoint temperature with no fluctuations No overshoot or undershoot of the setpoint temperature rapid restoration of the setpoint temperature when external disturbances cause deviations from the setpoint This controller has automatic tuning features which install optimum tuning parameters to give the best temperature accuracy No manual loading of tuning parameters is needed We recommend that you tune the oven to your specific application to obtain the best results To provide the best temperature accuracy possible use these features when you install your oven and whenever you change your application or procedure No
26. ired at our expense and to your satisfaction Regardless of your needs our professional telephone technicians are available to assist you Monday through Friday from 8 00 a m to 6 00 p m Eastern Time Please contact us by telephone or fax If you wish to write our mailing address is Thermo Fisher Scientific 401 Millcreek Road Box 649 Marietta OH 45750 International customers please contact your local Thermo Scientific distributor iv Clean Room Oven Thermo Scientific Thermo Scientific Section 1 Section 2 Section 3 Section 4 Section 5 Table of Contents Description u a hori es oa Cu ER et 1 1 Safety Information 0 ccc cece eee eee eee eens 2 1 Specifications naar 3 1 Unpacking and Installation 0 cc cece eee eee eee 4 1 Locator eco A RU RU NP AEN Eie at 4 1 Staking LInits amp 274 5 tease Meses da eter deeem al 4 Electrical Power en Oy Ie EN ad GAS 4 2 Bakine Out the Oven ud chee ees AES ir EXE 4 2 Cleaning PER 4 2 Shelf Installation ir esee oye CA e Ce al 4 2 Leveling ran ee pub esi ala 4 2 Door Adjustment 12 a ar a re EA Y x ERG TE p HE 4 3 Gas Connection esce A Ree Pea Re a docks 4 3 Latch Adjustment Door Hard to Open 000000 e eee 4 4 Latch Adjustment Door Against Gasket o ooooooooooooo 4 4 Latch Adjustment Heating Door Opens 000005 4 5 Features rco sie ba ei Een aol dees tans so aeuo cama 5 1 Control Panel sense san are 5 1 C
27. lean Room Oven V Table of Contents Section6 8 Segment amp 4x16 Segment Programmable Models 6 1 To View th Display Units cs cae ia PX ALES ES ES 6 2 To Change the Setpolntcorsogintis porra ite ke P 6 2 Basie Operation es AS Joe ed t VOL RR EGET YO CE 6 2 To View the Output Power 1 23 22222 E REED RETIA 6 3 Buttons and Indicators asd eee a RA ER a E ETE 6 3 Controller Parameters cs p ROVER ig AER ES RR ke 6 4 Alam os cvs qe talents beni ERA ERR lea dtes 6 6 Single Setpoint Controller Operation 0 000 eee ee ee 6 7 Sensor Break Protection 24 04 24a wae Hie Hada ER SE Pewee 6 7 Programming the Controller 2 2 alvei hes demi 6 7 Creating a New or Editing an Existing Program 6 7 Hb Holdback 25243240 222242024 eR E ee 6 8 CYC n Setting the Number of Cycles 2222222 6 9 dwL U Setting Dwell Units cerei Re RR Ex 6 9 tinPU Setting Ramp Units sauer aaa 6 9 Setting the Segment Type 2206 vee eit REIR Ee RP wd 6 10 Setting the Target Setpoint aiii pt ata hrs 6 13 Cancelling a Program otitis 6 13 Holding a Program i mua Pe uam ENTER AO denied 6 13 Running a Program as v eR ERR a 6 13 Tuning Your Oven 55 3 eiua em eG eem eat A ER TUE 6 14 Tuning Error ss Eq EET ERE AREE Eq T VU EAE 6 14 Gain Scheduling a dt eden eee ste eet ea ee a 6 14 Autotuning ie a au ea IRE een 6 15 Adaptive Tuning 4 ien 1 ae lei 6 16 Section Maintenance seseeeeeeeer anne nennen nun
28. ote When the program ramp has ended or has been reset the oven will continue to maintain setpoint temperature It will not cool to ambient temperature unless the setpoint is set to ambient temperature by the program or by the operator A Steps 4 and 5 are used in the 4 x16 segment program model only If using an 8 segment program skip to Step 6 4 Press the SCROLL button until display reads Hb 5 Press the UP or DOWN button to toggle between bAnd Hi Lo and OFF 6 Press the SCROLL button until display reads tGt 7 Press the UP or DOWN button to set a target setpoint 8 Press the SCROLL button until display reads rAtE 9 Press the UP or DOWN button to select a value in ramp units seconds minutes or hours set in the rmP U parameter rmP t To ramp to a specified temperature at a set time 1 Press the PAGE button until you reach the program list ProG LiSt 2 Press the SCROLL button until display reads tYPE 3 Press the UP or DOWN button until display reads rmP t 6 10 Clean Room Oven Thermo Scientific Setting the Segment Type 4 continued Section 6 Programmable Models Press the SCROLL button until display reads tGt 5 Press the UP or DOWN button to set a target setpoint 6 Press the SCROLL button until display reads dur 7 Press the UP or DOWN button to select a time in ramp units seconds minutes or hours set in the tmP U parameter dwEll
29. r an open or short circuit in the SSR Htr F Heater failure Indication that there is a fault in the heating circuit indicates either a blown fuse missing supply or open circuit heater Thermo Scientific Sensor Break Protection Single Setpoint Controller Operation Programming the Controller Creating a New or Editing an Existing Program Thermo Scientific Section 6 Programmable Models This controller provides sensor break protection in the event the thermocouple opens If an open thermocouple condition occurs the digital display will blink S br and the power to the heating element will be shut OFF cycle light will extinguish 1 Switch the circuit breaker to the ON position The setpoint temperature presently set in the controller will appear in the lower display The upper display indicates the actual chamber temperature 2 To change the setpoint press the UP or DOWN button until the desired setpoint value is displayed then release the button 3 The oven will begin to heat if the new setpoint temperature is higher than the present chamber temperature The controller is capable of varying temperature or process value with time through programming A program is stored as a series of segments and can be run once repeated a set number of times or run continuously To create a customized program using the controller parameters listed under Controller Parameters at the beginning of this section follow the
30. s pipe and to the dual regulator on the gas source Leave the gas turned off until the oven is being operated If the oven is to be operated without gas keep the inlet capped DO NOT USE THE PLASTIC SHIPPING CAP Warning Inject only an inert gas into the oven The use of any other type gas may lead to fire or explosion and serious injury or death and property damage A During shipping the oven door may have been knocked out of line The following procedure will correct door to body and door to gasket misalignment 1 Lay the unit on its back If exhaust and purging ports are fitted support the unit on 2 x 4 s to protect these components 2 Remove the pivot bolt and flat washer from the top door hinge 3 Unlatch the door handle to release the door then slide the door out and off the bottom hinge pivot bolt to gain access to hinge screws 4 Slightly loosen hinge screws on top and bottom hinges so hinges require firm hand pressure to reposition DO NOT REMOVE HINGE SCREWS complete removal of screws will make it extremely difficult to reassemble the hinge 5 Replace the door on the bottom hinge pin and fit the door in place Loosen the bottom hinge pivot bolt with an open end wrench Replace the top hinge pivot bolt and set it to be finger tight 6 Align the door to the body top bottom and sides 7 Remove the top hinge pivot bolt again noting the position of properly aligned hinges Remove the door carefully without movin
31. te Display will flash tu ER if an error occurs during tuning To clear the error and restart tuning simultaneously press the PAGE and SCROLL buttons and follow the steps outlined in Autotuning A Note To stop the tuning function simultaneously press the PAGE and SCROLL buttons A The display will flash tu ER if an error occurs during tuning To clear the error and restart tuning simultaneously press the PAGE and SCROLL buttons and follow the steps outlined in Autotuning G SP Gain Scheduling Gain scheduling is the automatic transfer of control between two sets of PID values The 2416 controller does this at a presettable process value Gain scheduling is used for difficult control processes which show large changes in their response time or sensitivity at high or low temperatures or when heating or cooling The G SP gain schedule setpoint is factory set at 700 C The G SP must be adjusted to 200 C from the desired setpoint temperature when tuning Thermo Scientific Section 6 Programmable Models Setting the Transfer Point If gain scheduling has been enabled G SP will appear at the top of the PID list This sets the value at which the transfer will occur When the process value is below this level PID1 will be active and when it is above Pid2 will be active Set a value between the control regions that show the greatest change to achieve the best point of transfer Tuning The two sets of PID values can
32. ters RTD sensor or safety Rep laceme nt G eneral thermostat extreme care is necessary when removing Teflon bladder After completing repairs it is recommended that bladder and sealant Dow Corning Sealant 736 be replaced 7 2 Clean Room Oven Thermo Scientific Section 8 Replacement Parts Bladder Teflon Blower Wheel 160 125 0 Cordsets 3490M CR1476X2 3490M 1 3495M 1 3499M 1 3497M 1 CR1476X1 600 002 00 160 124 00 MT1476X4 MT1476X3 Door Handle Fan Blade Heat Relief Fan Motor 120 V Fan Motor 240V Fan Motor Blower 370 264 00 Filter HEPA 3497M 1 525 036 00 Filter Inline 3497M 1 525 034 00 Fuses 3490M 1 All Other Models Fuse Holder 330 298 00 330 299 00 330 297 00 Gasket order length by model number 530 180 00 Heaters 3490M 3490M 1 3495M 1 3497M 1 3499M 1 Rubber Feet 4 Sealant Dow Corning 736 340 244 00 340 231 00 790 078 00 120 080 00 Sensor Assembly 014 186 00 Shelves Shelf Support Bracket Solid State Relay Teflon is a registered trademark of DuPont Thermo Scientific Clean Room Oven 8 1 Section 8 Replacement Parts 8 2 Ordering Procedures Clean Room Oven DESCRIPTION PART NUMBER Status Lamps Status Lamp Base Power Green Status Lamp Base Hi Limit Red Switch Power Temperature Controller 8 segment Temperature Controller 4 program Thermostat Hi Limit Thermostat Knob Shelves for 3490M units can be ordered with brackets as Shelves
33. tion Band Holdback combines the features of the high and low deviation holdback in that it holds the program back when the process variable deviates above or below the setpoint by more than the holdback value To set the holdback type 1 Press the PAGE button until you reach the program list ProG LiSt 2 Press the SCROLL button until display reads Hb 3 Press the UP or DOWN button to toggle between bAnd Hi Lo and OFF Hb U Holdback Value Note The value set in this parameter is always for the entire program 4 To set the holdback value 1 Press the PAGE button until you reach the program list ProG LiSt 2 Press the SCROLL button until display reads Hb U 3 Press the UP or DOWN button to enter a holdback value Thermo Scientific rmP U Setting Ramp Units dwL U Setting Dwell Units CYC n Setting the Number Thermo Scientific of Cycles Section 6 Programmable Models Ramp units are time units which are used in rmP r segments ramp to a setpoint at degrees per second minute or hour and rmPt segments ramp to setpoint in a specific amount of time See Setting the Segment Type for an explanation on how to set a ramp segment 1 Press the PAGE button until you reach the program list ProG LiSt 2 Press the SCROLL button until display reads rmP U 3 Press the UP or DOWN button to toggle between seconds minutes and hours Dwell units are time units which are used
34. ty Information Your Thermo Scientific Class 100 Clean Room Oven has been designed with function reliability and safety in mind It is your responsibility to install it in conformance with local electrical codes It is most important that the user follow installation instructions exactly as written Failure to do so is likely to lead to improper operation erroneous calibrations and possible damage to the equipment Do not attempt operation without this information Thermo Scientific Clean Room Oven 2 1 Thermo Scientific Section 3 Specifications Power Requirements All models accept 50 Hz or 60 Hz current 3490M 3492M 120 3494M 1 3495M 1 220 240 3100 3496M 1 3497M 1 220 240 3100 3498M 1 3499M 1 220 240 3100 Temperature Range Slightly above ambient to 250 C Temperature Control Model aussagen outed ce coe 100 C 3490M 1 3492 MT iss Br Mee eee 0 1 C 3494M 1 3495M 1 i cerni nee 0 1 C 3496M 1 3497M 1 0 2 C 90 C 3498M 1 3499M 1 1 0 e 20 0 1 C Temperature Uniformity Model ur ced brum ssl daa teo o 100 C 3490M 1 3492M 1 1 enn nnn 1 0 C 3494M 1 3495M 1 oooooooooo 1 0 C 3496M 1 3497M l 1 5 C 90 C 3498M 1 3499M 1 ai e ee eee 1 0 C 3490M 1 3492M 1 220 240 1900 200 C 0 2 C 0 2 C 0 2 C 200 C 2 0 C 2 0 C 2 0 C Clean Room Oven 3 1 Section 3 Specifications Temperature Rise Times 3490M 1
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