MDX Sparc-LE ® 20
Contents
1. T Arc Event Time 1 us div P Sparc le 20 Response Figure 2 3 Target current during active arc handling mode Self Run Mode You can select this mode through the Sparc le 20 front panel or User port When selected the Sparc le 20 unit shorts out and reverses the target voltage for 5 us at a 20 kHz rate This reversal of voltage prevents charge buildup on the system surfaces slows the growth of oxide films and extends target life During this self run mode the Sparc le 20 unit continues to process arcs as they occur up to a 40 KHz rate This is also what happens in active arc mode At operation above 700 V the internal self run frequency automatically shifts to 15 kHz This lower self run frequency is required to lower the power dissipation in the snubber resistors The self run mode selection engages a 20 kHz oscillator which triggers the Sparc le 20 power switches This action produces the same output characteristics as if an arc were about to start The only difference is that the activation effect is created internally by the Sparc le 20 switches and not by an arc in the chamber The Sparc le 20 switches first discharge the chamber capacitance and then reverse the chamber voltage This voltage reversal on the target prevents charge buildup on the system surfaces and slows insulating film build up Normal arcs which may occur while the self run mode has been selected are processed the s2. 3 4 Specifications 5700306 H MDX Sparc le 20 P Chapter 4 Connectors Indicators and Controls CONNCCLOTS 4 voee te Lee qe HOS PUE A EC E e IU POT AC ILICE EE ERG Bae ENE 24 2 4 1 Input AC Power Connector r obi ape bu sib RT aS Ep d ER WESS Beste 4 1 Input DC Power Connector 0 0 00 cece e eee e eens 4 1 Output DC Power Connector 00 ec Kn o puq uw e eee 4 2 Terminal Block Connectors Optional 0 0 0 0 cece KK KK KK KK KK KK KK KK KK KK KK KK KK 4 2 Military Style Connectors Optional WW kK KK KK KK KK KK KK KK KK KK KK KK KK KK eee 4 3 Remote Control Panel Connector 0 0 kK kK KK KK KK KK KK KK KK n 4 5 BNC Activation counting Port 0 0 0 0 kK KK KK KK KK KK KK KK e 4 5 User Analog Digital I O Port oo oooooooooooroocr III u u 4 5 User Port Pin Descriptions r paper op a na ERU p e E a RES 4 6 IndiCatotS x coe bre ee pa PI Baal piii ie ERE Ru A eque 4 7 Stat s sipnalS 5 Sr ee UR Oper IESUS PEDE ea len Da ad 4 7 Front Panel Indicators o6 voce or HERR Rr tende HL ERN a 4 7 Unit Illustrations eorr reU D esie eee cete eun ode iare A bed e e 4 8 Front View of the Sparc le 20 ass eb Deta rar 4 8 Rear View ol Spatc Ie 20 vaa e Be ope akena qu pee epe Ub n E Ce nu kuya 4 9 Rear View of Sparc le 20 MS 3470 Connectors 4 10 Rear View of Sparc le 20 Terminal Block 0 0 0 0 KK KK KK KK KK KK KK KK KK KK KK 4 11 DIMENS
3. 5 2 Installation 5700306 H MDX Sparc le 20 Change the frequency by using a small screwdriver to rotate the frequency control switch located at the rear of the unit The slot in the rotary switch is vertical for 20 kHz operation or horizontal for to 2 kHz operation Do not rotate the switch past the 20 kHz or 2 Khz position as shown in Figure 5 1 Only the self run frequency is affected the rate at which arcs are handled remains the same Self run frequency select 20 kHz 2kHz 1328 Figure 5 1 Frequency change switch Using the Interlock Switch Option The cover over the input and output connectors engages an interlock switch This switch is bypassed on units shipped from the factory by switch S2 2 on the logic board This allows the Sparc le 20 unit to be evaluated without the User port functions When you are ready to take advantage of the User port functions and the interlock switch open switch S2 2 The interlock switch is not applicable with the MS 3470 units MAKING REAR PANEL CONNECTIONS Grounding A protective earth terminal stud is located next to the input ac line cord connector This terminal is connected internally to the input line cord ground wire at the ac line cord connector A DANGER Connect the protective earth terminal on the MDX rear panel to protective earth ground before making any other connection Note For optimum performance ground the chassis stud to the chamber ground
4. 5700306 H Installation 5 3 Advanced Energy Connecting AC Input Power The ac input line connection is made through a line cord possessing either a standard US three prong 115 V ac type or a two prong German 220 V ac type plug When a unit is purchased it is internally connected for the correct line voltage at the factory and then supplied with the appropriate line cord A sticker located next to the line cord connector indicates the voltage for which the unit has been wired The range of input line voltages for each case and the associated line cord plug are listed below e U S 115 V ac plug 90 126 5 V ac rms 50 60 Hz single phase 30VA German plug 180 253 V ac rms 50 60 Hz single phase 30 VA It is important to note that for the Sparc le 20 unit to operate in its active arc handling mode ac input power must be present Operation of the system with the Sparc le 20 line cord unplugged restricts it to Arc Out enhancement mode operation only Connecting the DC Input and Output A female UHF type connector is standard for both the dc input and output on the MDX Sparc le 20 unit see Figure 4 1 on page 4 2 As a result both the input and output connections are made by means of a male UHF type connector Amphenol 83 822 which AE provides The RG 8U cables for both input and output are not included with the Sparc le 20 unit but can be purchased from AE separately An optional terminal block connector see Figure 4 2 on page
5. Table 4 2 Pin Descriptions for Female Connector Pin Letter Description A Unused do not connect Positive return from chamber Ground Interlock Interlock Ground Unused do not connect Ir GO Ti m O u Negative supply to chamber 4 4 Connectors Indicators and Controls 5700306 H MDX Sparc le 20 Remote Control Panel Connector Connections for remote control of the Sparc le 20 unit can be made through a 9 pin female D subminiature connector This female connector and housing are provided with the unit at the time of purchase BNC Activation counting Port A BNC connector referenced to chassis ground is provided and available to be connected to an external counter A 5 V 5 us pulse is generated each time the Sparc le 20 unit is activated to repress an arc This pulse width is less when the unit is experiencing an over current condition The self run frequency is not present at this output User Analog Digital I O Port The table below provides information about each pin on the User port connector See Connecting AC Input Power on page 5 4 for details on making this connection The User connector is primarily an analog interface that allows the use of a remote controller 5700306 H Connectors Indicators and Controls 4 5 Advanced Energy User Port Pin Descriptions The following table provides information about each pin in
6. ENABLED pom 20 CS2D l e e En l l l n 4 SELFRUND 1 CSTD o O j i f S2 closed e i e e 6 SUPERVC D i va A EN I l l e 7 SUPERVED i l l l l OVERTEMP e 9 ACPWR 11 AUXD Lov INTERLOCK D VM e 1 OUTCOM D gt 37 OUTCOMD Figure 6 2 MDX User port control of Sparc le 20 6 2 Operation 5700306 H MDX Sparc le 20 The following chart illustrates how the three operating modes of the Sparc le 20 unit can be selected using the MDX User port functions and the Sparc le 20 User port Table 6 1 Operating Modes Target CS1 D CS2 D Sparc le 20 operating mode 1 Low High arc out enhancement 2 High Low active arc handling 3 Low Low self run SUPERVISORY CIRCUIT An internal supervisory circuit within the Sparc le 20 unit monitors its function in the active arc handling and self run modes The purpose of this error signal User pin 7 SUPERVE D is to notify the operator that Sparc le 20 is not functioning properly This signal is intended to be handled independently of the MDX User port preferably by the system controller This is because the decision as to whether or not to shut off the MDX should be made at the system level Switch assembly S2 1 located on Sparc le 20 s logic board must be in its closed position to make the fault signal low on Sparc le 20 s User pin 7 Figure 6 3 on page 6 4
7. For certain target materials some arc energy is required to initially clean the target of arcing sites In these cases the Sparc le 20 unit is so effective in lowering arc energy that a long period is necessary for new target conditioning Also experience has shown that when AE s new arc out enhancement circuit is used the target is cleaned more quickly than with the standard MDX supply alone The Sparc le 20 design anticipates its use with older MDX models not having this new feature and therefore includes the new arc out enhancement circuitry When the Sparc le 20 is turned off it automatically switches in the arc out enhancement circuit 5700306 H Theory 2 5 Advanced Energy Arc Event N Positive Voltage 40 V OV 250 V 500 V Time 2 us div 2003 Figure 2 6 Target voltage during arc out enhancement mode Arc Event Positive Current N pA i 0A N 20 A 40 A Time 2 us div 2004 Figure 2 7 Target current during arc out enhancement mode 2 6 Theory 5700306 H MDX Sparc le 20 Chapter opecifications Functional Specifications 030 eee vu p ep UE rer RESP IPLE MEER PUE 3 1 Physical Spec
8. Logic Board Switches on page 5 2 for more information about setting the switches on the logic board Note You need to supply a 5 kW pull down resistor for User pin 7 Load current must exceed 1 5 A before the supervisory circuit becomes functional FACTORY CONFIGURATION When Sparc le 20 is shipped positions 1 and 2 on switch S1 are set OPEN and positions 1 and 2 on switch S2 are set CLOSED The self run frequency is set to 20 KHz 5700306 H Operation 6 3 Advanced Energy Sparc le 20 User Port a go 5 a a a a a x 2 z lt a z ui so S S ul 2 2 gt iuo z B gt E z f O kx 8 2 e lo lt 5 a a pu tu E e 5 T z Ww 2 2 gt E D z Lj 77 a 0 oz O OA e o e e e dl 2 g 8 E Bd Lg x ey lt lt lt 2 lt oe SR P Figure 6 3 Sparc le 20 User port signal lines 5700306 H Operation 6 4 MDX Sparc le 20 P Chapter r Troubleshooting and Customer Support Before Calling AE Customer Support 0 0 0 KK KK KK KK KK KK KK KK KK KK KK KK KK KK KK eens 7 1 Checks with the Power Off sas sensual de a E pe Pees 7 1 Checks with the Power OB siete odessa ne eS neta epee pre S p eke quas 7 1 Returning Units for Repair lese I ay S 7 3 Warranty sda sc eo LEN EE IURE NOS EUR baci RUNDE eR baie hoe Je ete dee ds 7 3 Authorized Returns u w ek be EUR eich PEE ES ule Er sab dare E Rx 7 4 Upgrading UNIS 4
9. n 3 2 Electrical Specifications u sue see semear o ia ie eo e l k es 3 2 Environmental Specifications 0 0 0 eee KK KK KK KK eee 3 3 Chapter 4 Connectors Indicators and Controls 4 1 ConnectofSi iecore dia nand x EHI Leave tes 4 1 Input AC Power Connector 4 1 Input DC Power Connector 4 2 Output DC Power Connector 0 KK KK KK KK KK KK KK KK KK KK K 4 2 Terminal Block Connectors Optional 4 3 Military Style Connectors Optional 4 3 Remote Control Panel Connector 4 5 BNC Activation counting Port 4 5 User Analog Digital VO Port 4 5 User Port Pin Descriptions 0 0 une are i alaya En e SN 4 6 5700306 H Advanced Energy Indicators ia REFS RE E HHH XX 4 7 Status signals oo da e ERR ds da Pe IR 4 7 Front Panel Indicators ooe u susunan sa pasa eee 4 7 Unit Illustrations una ani pet qani ee BUILT where ee e i 4 8 Front View of the Sparc le20_ 4 8 Rear View of Sparc le 20 4 9 Rear View of Sparc le 20 MS 3470 Connectors 4 10 Rear View of Sparc le 20 Terminal Block 4 11 DIMENSIONS is ere Pan Ex ers tae que s 4 12 Chapter 5 Install
10. AF In all cases the seller has sole responsibility for determining the cause and nature of the failure and the seller s determination with regard thereto shall be final 7 4 Troubleshooting and Customer Support 5700306 H MDX Sparc le 20 A activation counting 2 1 arc handling 2 2 3 3 arc out 2 3 2 5 atmospheric pressure 3 3 C connectors ports 3 2 bnc activation counting 2 1 bnc activation counting 4 5 input ac power 4 1 input dc power 4 2 output dc power 4 2 remote control panel 4 5 user I O port 4 5 control manual 6 1 MDX 6 2 user port 6 1 cooling requirements 5 1 customer support before calling 7 1 contact information 7 2 D description general 2 1 documentation See user manual E environmental specifications 3 3 F factory configuration 6 3 fault conditions 3 1 overtemperature 3 1 over voltage 3 1 frequency self run 5 2 G general description 2 1 grounding 5 3 H humidity 3 3 Index I icons in user manual 1 2 on unit 1 3 input current 3 2 input voltage ac 3 2 dc 3 2 installing safety requirements 1 4 safety warning 1 3 interfacing 6 1 user port control 6 1 M modes arc handling 4 7 6 3 self run 6 3 S safety checks 7 1 precautions 1 3 See also activation counting 2 1 self run frequency changing 5 2 Setting up cooling requirements 5 1 design considerations 5 1 distance from chamber 5 1 logic board switches 5 2 signal arc suppression 2 1 signals analog n
11. KK KK KK KK KK eee 5 2 Making Rear Panel Connections 0 KK KK KK KK KK KK KK KK KK KK KK kk kk kk kk kk KK kk 5 2 Grounding resistir eben ad oth de Suche bae e betent b op d oe bb e pue eps 5 3 Connecting AC Input Power 0 0 2 cece I een eee 5 3 Connecting the DC Input and Output 2 00 0 eh 5 3 Connecting to the Terminal Block 2 2 0 KK KK KK KK KK KK KK KK KK KK KK K KK KK KK 5 3 Connecting to the MS 3470 Connectors 0 0 0 KK KK KK KK KK KK KK KK KK KK KK KK KK 5 4 SETTING UP Unpacking Unpack and inspect your MDX Sparc le 20 accessory carefully Check for obvious physical damage If no damage is apparent proceed to make the connections If you do see signs of shipping damage contact Advanced Energy Industries Inc and the carrier immediately Save the shipping container for submitting necessary claims to the carrier Design Considerations The Sparc le 20 technology performs best when it is physically located within 6 m 20 ft of cable distance from the chamber cathode The Sparc le 20 unit is made to bolt into either the front or rear of a rack Cooling of the Sparc le 20 unit is provided by an internal fan Take precautions when mounting the unit to prevent its air flow from being restricted Cooling Requirements The Sparc le 20 unit contains its own internal fan for cooling When you install a Sparc le 20 unit on your system ensure that it is in a location where its maximum ambient
12. Re EIS CE E k E Rei 7 3 Authorized Retums 25 23 lay a Wanda pa by d eh d n k 7 4 Upgrading Units s q p Rer ee he RI WR S Spes 7 4 Warranty Statement isses pee ee e e eu a Eoo 4 7 4 ii 5700306 H MDX Sparc le 20 Figure 2 1 Figure 2 2 Figure 2 3 Figure 2 4 Figure 2 5 Figure 2 6 Figure 2 7 Figure 4 1 Figure 4 2 Figure 4 3 Figure 4 4 Figure 4 5 Figure 4 6 Figure 4 7 Figure 4 8 Figure 5 1 Figure 5 2 Figure 6 1 Figure 6 2 Figure 6 3 List of Figures Physical location of Sparc le 20 in a system 2 2 Target voltage during active arc handling mode 2 3 Target current during active arc handling mode 2 4 Target voltage during self run mode 0 0 0 0 KK KK KK KK KK KK KK KK KI 2 5 Target current during self run mode 2 5 Target voltage during arc out enhancement mode 2 6 Target current during arc out enhancement mode 2 6 Standard UHF type dc input and output connector 4 2 Optional terminal block connector for dc input and output 4 3 Optional MS 3470 connector 0 0 KK KK KK KK KK KK KK KK KK KK KK KK k 4 3 Front View of the Sparc le 202 2 eee k rd 4 8 Rear View of the Sparc le 20 0 LA kk KK KK KK KK KK KK KK KK KK KK KK KK KK 4 9 Rear View of the Sparc le 20 with mili
13. connector labeled CHAMBER Also ensure that you maintain proper polarity when making these connections Failure to correctly connect input and output power could result in damage to the unit Output DC Power Connector The standard output dc power connector is the same type of male UHF connector with insulating sleeve as is used for the input This connector and sleeve are provided with the unit at the time of purchase the cable is not provided A 2 position terminal block or MS 3470 connector is optional on the Sparc le 20 unit see Military Style Connectors Optional on page 4 3 See Connecting the DC Input and Output on page 5 4 for installation information UHF Female provided Plastic Sleeve Amphenol 83 8227 Sleeve Assembly provided Figure 4 1 Standard UHF type dc input and output connector 4 2 Connectors Indicators and Controls 5700306 H MDX Sparc le 20 Terminal Block Connectors Optional A 2 position terminal block connector is optional on the Sparc le 20 Figure 4 2 See Connecting the DC Input and Output on page 5 4 for installation information A A R NO TO OS ES ES Cu cult YE 30 DY I 31 E ME EINE NE INC LIINC NEZ JI NE To Chamber From MDX ZAN ER TA GA G A NAS S L LZ Figure 4 2 Optional terminal block connector for dc input and output Military Style Connectors Opt
14. the User port connector Table 4 3 User Port Pin Descriptions Pin pin 1 Name OUTCOM D Description This is a dedicated return line to the MDX It is connected to chassis ground and then to protective earth ground at the MDX pin 2 15 VDC This is a voltage which must be applied to Sparc le 20 s interface circuits A capability of 50 mA is required pin 3 ENABLE D This 15 Vdc signal must be pulled low to activate Sparc le 20 s active arc handling mode The user must be able to sink 20mA from this pin pin 4 SELFRUN D This 15 Vdc signal must be pulled low to activate Sparc le 20 s self run mode The user must be able to sink 20 mA from this pin pin 5 INTCOM A This signal connects to the internal Sparc le 20 ground It is active on pin 5 only when S1 on the Sparc le 20 s logic board has been activated pin 6 SUPERVC D This collector is normally connected to 15 VDC pin2 through switch S2 1 being closed on Sparc le 20 logic board For more information about logic board switches see page 3 5 pin 7 SUPERVE D This signal is low or open during a fault of Sparc le 20 s active arc handling mode This also shows a fault when the input dc voltage to Sparc le 20 is too low or too high to operate while in the active arc handling mode This pin will sink up to 2 mA pin 8 15VDCINT This signal connects to the internal 15 V dc used to power Sparc le 20 s logic circ
15. to improve them are discovered AE is happy to upgrade older units so that they reflect recent improvements The fee for upgrading a unit will be a percentage of the current list price based on the age of the unit Such an upgraded unit will carry a 6 month warranty which will be added to any time remaining on the original warranty Contact Customer Support for specifics on getting an older unit upgraded to the current revision level Warranty Statement The seller makes no express or implied warranty that the goods are merchantable or fit for any particular purpose except as specifically stated in printed AE specifications The sole responsibility of the Seller shall be that it will manufacture the goods in accordance with its published specifications and that the goods will be free from defects in material and workmanship The seller s liability for breach of an expressed warranty shall exist only if the goods are installed started in operation and tested in conformity with the seller s published instructions The seller expressly excludes any warranty whatsoever concerning goods that have been subject to misuse negligence or accident or that have been altered or repaired by anyone other than the seller or the seller s duly authorized agent This warranty is expressly made in lieu of any and all other warranties express or implied unless otherwise agreed to in writing The warranty period is 12 months after the date the goods are shipped from
16. 3 2 Specifications 5700306 H MDX Sparc le 20 Table 3 3 Electrical Specifications Reverse Recovery Voltage 10 of input voltage Arc handling Characteristics 40 000 arcs sec maximum 4 to 6 us typical arc recovery time 1 800 V absolute maximum input dc voltage 150 V minimum to 1000 V maximum output operating range 7 to 11 us delay before next arc can be processed ENVIRONMENTAL SPECIFICATIONS The following table lists the environmental specifications Table 3 4 Environmental Specifications Ambient Temperature Operating Minimum 0 C maximum 40 C maximum value of average over 24 hr 35 C Storage Minimum 25 C maximum 55 C Transportation Minimum 25 C maximum 55 C for short periods of up to 24 hr the maximum is 70 C Coolant Temperature Air gas minimum 0 C maximum 35 C Coolant Flow Parameters Contamination Cooling air should be free of corrosive vapors and parti cles conductive particles and particles that could become conductive after exposure to moisture Humidity 1596 to 8596 relative humidity no condensation or icing Atmospheric Pressure Operating 800 mbar minimum approximately 2000 m above sea level Storage 800 mbar minimum approximately 2000 m above sea level Transportation 660 mbar minimum approximately 3265 m above sea level 5700306 H Specifications 3 3 Advanced Energy
17. 4 3 or MS 3470 connector see Figure 4 3 on page 4 3 are available for dc input and output See the following section for instructions on connecting to these types of connector CONNECTING TO THE TERMINAL BLOCK The optional terminal block connector features two positions each for dc input and dc output To connect to the terminal block follow these steps 1 Ensure that ac input power has been removed from the Sparc le 20 unit 2 Power off the MDX power supply 3 Remove the connector cover from the rear of the Sparc le 20 unit 4 Slide the appropriate cables up through the two holes in the bottom of the connector cover and out the back of the cover see Figure 5 2 on page 5 5 5 Attach the cables to the appropriate positions on the connector taking care to maintain proper polarity 6 Re attach the connector cover see Figure 5 2 on page 5 5 Note The connector cover features a metal tongue that slides into a slot on the connector plate Inserting this tongue into the slot provides interlock when switch S2 2 is open For more information about the interlock switch see Using the Interlock Switch Option on page 5 3 5 4 Installation 5700306 H MDX Sparc le 20 Figure 5 2 Connecting dc input and output to the terminal block CONNECTING TO THE MS 3470 CONNECTORS To connect the optional military style connector to the terminal block follow these steps 1 Ensure that ac input p
18. 53 nes rb 4 Ab9 44 sees E EUR ceed AEPPLRIEISGRIBSST wie S BEEN AUR 7 4 Warranty Statement 3 q 54 224 bebo A deed bate ae shed RE ee a Rd 7 4 BEFORE CALLING AE CUSTOMER SUPPORT A WARNING RISK OF DEATH OR BODILY INJURY Disconnect all sources of input power before working on this unit or anything connected to it Checks with the Power Off Make sure the power switch is off Check for visible damage to the unit cables and connectors Make sure all unit connectors are installed correctly and are fastened tightly Check to determine whether any system related circuit breakers have been tripped Make sure there is input power to the unit and make sure it meets specifications An gt wWN P gt Make sure ground connections are adequate and secure Checks with the Power On 1 Check the unit s input power connections to ensure the proper power is being supplied to the unit 2 Check unit s LEDs to determine that the proper ones are lit 5700306 H Troubleshooting and Customer Support 7 1 Advanced Energy AE CUSTOMER SUPPORT Please contact one of the following offices if you have questions Table 7 1 Customer Support Locations Office Telephone AE World Headquarters 1625 Sharp Point Drive Fort Collins CO 80525 USA Phone 970 221 0108 or 970 221 0156 Fax 970 221 5583 Email technical supportO aei com AE Voorhees NJ 1007 Laurel Oak Road Voorhees NJ 0
19. 8043 USA Phone 609 627 6100 Fax 609 627 6159 Email pete potter aei com AE California 491 Montague Expressway Milpitas CA 95035 USA Phone 408 263 8784 Fax 408 263 8992 Email allen vallei 9 aei com Bldg 347 Yamabuki cho Shinjuku ku Tokyo Japan AE Austin Phone 512 231 4200 8900 Cameron Road Fax 512 719 9042 Suite 100 Austin TX 78754 AE GmbH Phone 49 711 77927 0 Raiffeisenstrasse 32 Fax 49 711 7778700 70794 Filderstadt Email kamel ferdi O aei com Bonlanden Germany AE Japan KK Phone 81 3 32351511 TOWA Edogawabashi Fax 81 3 32353580 Email okamoto tetsu O aei com AE Korea Ltd Gongduk Building 4th floor 272 6 Seohyun Dong Bundang Gu Sungam Si Kyunggi 463 050 Korea Phone 82 342 705 1200 Fax 82 342 705 276 Email sung lee O aei com AE United Kingdom Unit 5 Minton Place Market Court Victoria Road Bichester Oxon OX6 7QB UK Phone 44 1869 320022 Fax 44 1869 325004 Email catherine kendall O aei com 7 2 Troubleshooting and Customer Support 5700306 H MDX Sparc le 20 RETURNING UNITS FOR REPAIR Before returning any product for repair and or adjustment first follow all troubleshooting procedures If after following these procedures you still have a problem or if the procedure instructs you to call AE Customer Support and discuss the problem with a representative Be prepared to give the serial number of the unit and the
20. DX Sparc le 20 P Chapter 2 Theory General Description gt OS tania be ss o iub k K ib Way A 2 1 Activation Counting censo sipe eee Leads we nee hae Saree HRS EE a qe 2 1 Supervisory Circuit 20 002 eso DL Ed ur peque EORR ERA eed ahead des 2 1 Theory Of Operation o we E EHE E INAN ente d YR ees ws EID t 2 1 Active Arc Handling Mode 2 2 Set R n Mode us s E Dues ORs ese aes DERE PEGA SCRA RE A NT da 2 4 Arc Out Enhancement Mode x ra a SE l ken pha uhaq dib n upaqa Bav ki in 2 5 GENERAL DESCRIPTION The Sparc le 20 Small Package Arc Repression Circuit Low Energy 20 kHz unit is an add on accessory for the Advanced Energy magnetron drive power supplies with output currents under 25 A Its main function is to enhance the arc handling capability of the MDX power supply Even though the MDX power supplies exhibit excellent arc handling characteristics such as low output energy storage and recovery response time to hard arcs of under 10 ms the demand for improved film quality with even fewer defects has arisen This demand has led to the development of the Sparc le 20 technology which clears arcs in microseconds and dramatically reduces the number of hard arcs The Sparc le 20 add on accessory is a cost effective alternative to improving sputtered film quality Its small size coupled with minor modifications to the system cables allows it to be easily
21. IONS A RAE E EB DIR O RS UU e DUAE EY qe 4 12 CONNECTORS Input AC Power Connector Each Sparc le 20 unit is supplied with its own ac line cord Depending upon the model ordered there is either a line cord with a U S 115 V ac three prong plug or a line cord with a German two prong plug for 220 V ac operation Each unit is wired to accept the line voltages associated with the line cord provided See Connecting AC Input Power on page 5 4 for installation information 5700306 H Connectors Indicators and Controls 4 1 Advanced Energy Input DC Power Connector The output of the MDX magnetron power supply becomes the input dc to the Sparc le 20 unit The standard input dc connector to the Sparc le 20 unit is a UHF male connector Amphenol 83 822 A 2 position terminal block or MS 3470 connector is optional on the Sparc le 20 unit see Military Style Connectors Optional on page 4 3 With units featuring the standard UHF dc input connector an assembled 6 foot cable connectors and insulating sleeves are provided at the time of purchase The cable end that has the long insulating sleeve over the UHF connector is intended to be connected to the MDX output See Connecting the DC Input and Output on page 5 4 for more information A WARNING Ensure that the input dc power connector is connected to the Sparc le 20 input connector labeled MDX and that the output dc power connector is connected to the Sparc le 20 output
22. MDX Sparc LE 20 User Manual Ar 5700306 H Advanced Energy Industries Inc 1625 Sharp Point Drive Fort Collins CO 80525 USA 970 221 4670 technical support aei com April 1999 User Manual MDX Sparc LE 20 5700306 H Aca EUST N WARNING Read this entire manual and all other publications pertaining to the work to be performed before you install operate or maintain this equipment Practice all plant and product safety instructions and precautions Failure to follow instructions can cause personal injury and or property damage All personnel who work with or who are exposed to this equipment must take precautions to protect themselves against serious or possibly fatal bodily injury Advanced Energy Industries Inc AE provides information on its products and associated hazards but it assumes no responsibility for the after sale operation of the equipment or the safety practices of the owner or user This equipment produces or uses potentially lethal high voltage high current radio frequency RF energy NEVER DEFEAT INTERLOCKS OR GROUNDS All information herein is subject to periodic updates Inquiries concerning this manual should be directed to AE Information provided by AE is believed to be correct and reliable However no responsibility is assumed by AE unless otherwise expressly taken INE ADVANCED is a registered trademark of Advanced Energy Industries Inc L ENERGY Advanced Energy is a reg
23. The Sparc le 20 circuitry responds to arcs within microseconds and therefore requires that the impedance distance between it and the chamber be kept to a minimum Figure 2 1 Physical location of Sparc le 20 in a system The Sparc le 20 unit s arc handling current characteristic immediately shunts the target current away from the target and starves the arc By removing the current source and for a short time reversing the target voltage the arcs are quenched quickly The Sparc le 20 has three operating modes Active Arc handling mode Self run mode Arc Out enhancement mode Active Arc Handling Mode The active arc handling mode is the primary operating mode of Sparc le 20 unit You can select this mode from the front panel or the User port In this mode the target current is immediately shunted away from the target when an arc is about to begin When the current source is removed and the target voltage is reversed for a short time the arcs are quenched quickly 2 2 Theory 5700306 H MDX Sparc le 20 An illustration of the Sparc le 20 unit s arc handling characteristics in the active arc handling mode is shown in Figure 2 2and Figure 2 3 Arcs can be handled at a rate of up to 40 000 arcs per second If this rate is continuously exceeded the unit overheats and automatically switch over to the arc out enhancement circuit for target cleaning After clearing the arc th
24. X Sparc le 20 P Chapter 1 Introduction Read This Section kw sn ye ha Ohh tia cha E bae abi pe tp dd ed Pese 1 1 Organization of the Manual KK KK KK KK KK KK KK KK KK KK KK KK KK KK KK KK KK kK kk kk KK kk 1 1 Interpreting the Manual e sie 12 E kal pa yaaa su EAA us u ata 1 1 Type Conventions cx ee st os er Hp ERE A lA bu D SS 1 1 Icons Symbols xsv eere a es E ERR 1 2 SA eby s opina pela dB Eno agi dE DG UR PN EA DES CEPS HE 1 3 Installation Requirements 1 3 READ THIS SECTION We know that some of you operate the Sparc LE 20 accessory now and that you don t feel you have the time to read the entire manual Below is a list of manual sub sections you must read before getting started Theory of Operation Hlectrical Specifications Connectors and Pin Descriptions Operating Overview In addition we recommend that you scan Organization of the Manual and Interpreting the Manual which are short sections intended to guide you through the manual Organization of the Manual helps you more quickly find what you need Interpreting the Manual explains the type conventions what it means when a word appears in capitalized italic type for instance and icon symbol definitions ORGANIZATION OF THE MANUAL The main table of contents is an outline of the manual s major topics It contains only the chapter titles and the first and second level headings within each chapter thus you can skim these pa
25. ame 4 6 digital name 4 6 error 6 3 fault low 6 3 name with overline 4 6 status 4 7 status table 4 7 specifications 3 3 electrical 3 2 environmental 3 3 functional 3 1 5700306 H Index i MDX Sparc le 20 physical 3 2 filing a claim 7 3 status signals 4 7 returning units 7 4 supervisory circuit 2 1 statement 7 4 switches interlock 5 4 interlock option 5 3 logic board 5 2 self run frequency 5 2 symbols in user manual 1 2 on unit 1 3 system controller 6 3 T temperature ambient 3 3 coolant 3 3 operating 3 3 terminal block 5 4 connecting to 5 4 diagram 5 5 optional connector 4 3 5 4 theory of operation 2 2 U unpacking 5 1 upgrading units 7 4 user manual icons used 1 2 organization 1 1 symbols used 1 3 type conventions 1 2 V voltage ac input 3 2 chamber 2 4 dc input 3 2 output range 2 3 target 2 2 2 3 W warranty authorized returns 7 4 5700306 H Index ii
26. ame way at a maximum rate of 20 000 arcs per second The self run mode can only operate when Sparc le 20 unit has been turned on or enabled It will not function if Sparc le 20 unit is in the arc out enhancement mode The self run mode frequency of 20 kHz can be changed to match the original Sparc le unit s self run mode frequency of 2 kHz See Changing Self run Frequency on page 5 2 2 4 Theory 5700306 H MDX Sparc le 20 OV 250 V 500 V d A r H Trigger Point Time 1 us div 2097 Figure 2 4 Target voltage during self run mode 0A 10A 20A Trigger Point Do Time 1 us div 2008 Figure 2 5 Target current during self run mode Arc Out Enhancement Mode The arc out enhancement mode is active when the Sparc le 20 unit is turned off or not enabled The arc out circuit consists of passive components and clamp rectifiers only During an arc it functions as a resonant LC network which discharges and then commutates off the arc through its reversing action This process is also very fast and arcs can be suppressed in under 20 us The target voltage and current for this mode are shown in Figure 2 6 and Figure 2 7
27. ards or unsafe practices which could result in minor personal injury or product or property damage 1 2 Introduction 5700306 H MDX Sparc le 20 The following symbols could appear on labels on your unit High voltage Protective earth ground Warning refer to manual Short circuit protected a o a ay 9 N 8 S M o SAFETY Do not attempt to install or operate this equipment if you have not first acquired proper training Make sure that this unit is properly grounded Ensure that all cables are properly connected Verify that input line voltage and current capacity are within specifications before turning on the power supplies Use proper ESD precautions DO NOT BE CARELESS AROUND THIS EQUIPMENT A WARNING RISK OF DEATH OR BODILY INJURY Disconnect all sources of input power before working on this unit or anything connected to it 5700306 H Introduction 1 3 Advanced Energy INSTALLATION REQUIREMENTS Operating and maintenance personnel must receive proper training before installing or maintaining high energy electrical equipment Potentially lethal voltages could cause death serious personal injury or damage to the equipment Ensure that all appropriate safety precautions are taken This unit requires the addition of a Protective Earth ground conductor on the rear panel and the use of a shielded power cable on the input terminal block 1 4 Introduction 5700306 H M
28. ation III eR e e e e eee YR lele OS 5 1 Setting Up rec nae ee be au a u as SG HHH HHHH HHHH He 5 1 Unpacking reor e tete b cm i tie ait ne di T 5 1 Design CoflSid rationS ya kal kw e n le es 5 1 Cooling Requirements 0 0 KK KK KK KK es 5 1 Logic Board Switches oy ka s el ERR a lar sn dal E Ce ws 5 2 Changing Self run Frequency 5 2 Using the Interlock Switch Option 5 3 Making Rear Panel Connections 0 00 0 eese 5 3 Gro nding bre bae t gro ee rone RADI UR EAE bees 5 3 Connecting AC Input Power 0 0 0 KK KK KK KK KK KK KK KK KK kk 5 4 Connecting the DC Input and Output 5 4 Chapter 6 Operation kk a ha xa n ak Ek En w RUE a a n A n e are e a 6 1 Methods of Go ntr l sa u uu sla k s Kal e e wn hur l d el 6 1 Front Panel Manual Control 6 1 User Port Controls eis gcse tel ettari beca Rca Gi en 6 1 Chapter 7 Troubleshooting and Customer Support 7 1 Before Calling AE Customer Support 7 1 Checks with the Power Off W K KK KK KK KK KK KK KK KK KK eee 7 1 Checks with the Power On 2 2 kK KK KK KK KK KK KK KK KK KK KK eee 7 1 Returning Units for Repair A kk kk kk KK KK KK KK KK ee 7 3 Warranty veces aran Ep e BOK
29. be granted by Advanced Energy Industries Inc 1625 Sharp Point Drive Fort Collins Colorado 80525 USA MDX Sparc le 20 Table of Contents Chapter 1 Introduction 1 1 Read This Section 0 0 0 0 cece KK KK KK KK KK KK kK kk kk kk k 1 1 Organization of the Manual 1 1 Interpreting the Manual 0 2 2 0 KK KK KK KK KK KK KK KK KK KK KK k 1 2 Type Conventions Z s 4541202 beetle bs del Pa y 1 2 Icons Symbols kuren ki ra eet eor eh ep oU e dua ts 1 2 Saeta ui eii ota aetate 1 3 Installation Requirements WAA KK kK KK KK KK KK KK KK e 1 4 Chapter 2 Theory uh Rr ERE PE TUS E EN NUES VE NS er NS W 2 1 General Description s zn ka bee oe bee hm E sh ees 2 1 Activation Counting s k k l l a l l kn G l r l r l 2 1 Supervisory Circle ski OU ACRI k wl EAR ERIS YA 2 1 Theory of Operation coc u weka AA A ea erre 2 2 Active Arc Handling Mode 2 2 Self RUN Mode u a amis nal eh G way espe i 2 4 Arc Out Enhancement Mode 2 5 Chapter 3 Specifications 3 1 Functional SpecificationS XW k KK KK KK KK KK KK KK KK KK KK KK 3 1 Physical Specifications siro u Ab Ae wu uh aa k d W
30. dicators and Controls 4 9 Advanced Energy Rear View of Sparc le 20 MS 3470 Connectors 2017 PATENT NUMBER 5 427 669 AE NZ o x m E E P s E E o e PY P Ke Figure 4 6 Rear View of the Sparc le 20 with military style connectors 4 10 Connectors Indicators and Controls 5700306 H MDX Sparc le 20 Rear View of Sparc le 20 Terminal Block 2019 AC Input CS Sb From MDX To Chamber Figure 4 7 Rear view of Sparc le 20 with terminal block 5700306 H Connectors Indicators and Controls 4 11 Advanced Energy Dimensions f 47 431 80 mm i 6 88 174 63 mm Y i 13259 mm E ENERGY Sp arc le 207 NS GUN Y 19 _ 482 60 mm i Figure 4 8 Dimensions 4 12 Connectors Indicators and Controls 5700306 H MDX Sparc le 20 Chapter Installation Setting UP ee Ed ep Pix pe te plo a a dd Chura Aa 5 1 Urnpacking matas rss ha e Eee be Ros edo Meese 6a haul ge Mae eee 4 LOS fle ges PM 5 1 Design Considerations llle 5 1 Cooling R quirementss iode Ep ER ENSIS Soles a gs bu nga sss sN DES 0 5 1 Logic Board Switches essc ieee pues ERU tato a Lo 5 1 Changing Self run Frequency o oooooooooo ee l l eee 5 2 Using the Interlock Switch Option 0 0 KK KK KK KK KK KK KK KK KK
31. e Sparc le 20 unit requires at least 10 us for the internal pulse transformer core to reset Should another arc occur before this 10 us has elapsed this arc might not be cleared by the Sparc le 20 unit In this case the arc may become a hard arc and draw excessive current until the MDX power supply turns off After the MDX supply clears the hard arc it automatically turns back on and the process continues Prior to an arc occurring the target voltage collapses on most chambers That is while the system is operating at a negative potential voltage drops sharply towards zero volts How far the target voltage collapses depends upon the target material Higher impedance target materials tend not to drop as far as lower impedance targets This voltage change is used to trigger the Sparc le 20 unit into action The Sparc le 20 unit uses an automatic tracking trigger circuit which allows the user to operate over the entire output voltage range without adjustment PES Sparc le 20 Response A OV 7 250 V 500 V f Arc Event Time 1 us div aos Figure 2 2 Target voltage during active arc handling mode 5700306 H Theory 2 3 Advanced Energy 0A 10A 20A
32. er 83 1R Optional 2 position terminal block or MS 3470 connec tors male for input female for output Cable Connector for DC Input and Output UHF type male Amphenol part number 83 822 Optional terminal block or MS 3476 connector DC Input and Output RG 8U coaxial cable output cable from Sparc le 20 to Cables chamber not to exceed 6 m 20 ft Size 13 3 cm x 48 3 cm x 19 4 cm 5 25 H x 19 W x 7 65 D Weight 7 7 kg 17 Ib maximum ELECTRICAL SPECIFICATIONS The following table lists the electrical specifications A WARNING occur Positive voltage output with a negative ground is prohibited Hardware damage will Table 3 3 Electrical Specifications AC Input Voltage 90 to 126 5 V ac rms 50 60 Hz single phase 30 VA 180 to 253 V ac rms 50 60 Hz single phase 30 VA DC Input Voltage Any low Z or standard Z output from an MDX magnetron supply DC Current 25 A steady state maximum No minimum current is required for operation The supervisory circuit requires a minimum of 1 5 A before it is operational Note Low power Sparc le 20 units should be operated only up to 3 A If you are unsure whether you have a low power Sparc le 20 unit please note the part number on the unit 315xxxx xxx and contact AE Input and Output DC Polarity Negative output positive at ground Negative output positive floating less than 100 V from ground
33. ervoltage overtemp perature or over voltage condition The operating mode is automatically switched to ARC OUT enhancement mode When the fault condition clears Sparc le20 automatically switches back to the prior operating mode and this LED goes out Active Arc Green LED lights to indicate that active arc han dling mode has been selected with the OPERAT ING MODE switch Self Run Green LED lights to indicate that self run mode has been selected with the OPERATING MODE switch Local Green LED lights to indicate local control from the Sparc le20 unit s front panel Remote Green LED lights to indicate remote control from the Sparc le20 unit s User port 5700306 H Connectors Indicators and Controls 4 7 Advanced Energy UNIT ILLUSTRATIONS Front View of the Sparc le 20 0 7 f A Sparc le ADVANCED ENERGY AE Power on Ready F Mode Override V Overvoltage Overtemp 2 2 Ee az o Ned N 2016 ES A Figure 4 4 Front View of the Sparc le 20 4 8 Connectors Indicators and Controls 5700306 H MDX Sparc le 20 Rear View of Sparc le 20 o TN a N a Ss E G 11 o Q n IV x HS x f NY z M X E E ses a o PET 2 4 1 N s hi NI JJ NN pA 2 YOY A lt 5 W CN J NA Figure 4 5 Rear View of the Sparc le 20 5700306 H Connectors In
34. ges and get an idea of what the manual contains without being overwhelmed by several heading levels At the beginning of each chapter a table of contents lists each sub heading in the chapter and its page number The Index gives you a topic analysis 5700306 H Introduction 1 1 Advanced Energy INTERPRETING THE MANUAL Type Conventions To help you quickly pick out what is being discussed the manual presents certain words and phrases in type that are different from the rest of the text We use the following type conventions Pinand signal names appear in capitalized italics DUTY CYCLE A Labels that are on the unit switches indicators etc generally appear in boldface capital letters MODIFY Exceptions are port names which simply begin with a capital letter User port Functions are printed in boldface lowercase letters analog input filtering Icons Symbols This symbol represents important notes concerning potential harm to N people this unit or associated equipment It is found whenever needed in the manual We include this symbol in Danger Warning and Caution boxes to identify specific levels of hazard seriousness A DANGER This box identifies immediate hazards which will result in severe personal injury or death A WARNING This box identifies hazards or unsafe practices which could result in severe personal injury or death A CAUTION This box identifies haz
35. ifications L rs a E EG pp UEBER e 3 2 Electrical Specifications ui Pa a bu P ER SER IQ LUE EXPO qu upa s dec 3 2 Environmental Specifications er u sss s cece eee e 3 3 FUNCTIONAL SPECIFICATIONS The following table lists the functional specifications Table 3 1 Functional Specifications Control Signal Source MDX User Port Fault Conditions An overtemperature condition causes the Sparc le 20 unit to cease functioning in its active arc handling mode It automatically switches to the ARC OUT enhancement mode An overtemperature condition is indicated by the OVERTEMP LED on the front panel An over voltage condition input voltage to the Sparc le 20 unit exceeds 1000 V prevents the Sparc le 20 unit from operation in its active arc handling mode It automatically switches to the ARC OUT enhancement mode When the input voltage drops below 1000 V the Sparc le 20 unit switches back automatically to the prior arc handling mode and over voltage condition is reported as a low out put on pin 7 of the Sparc le 20 User port An open signal on pin 9 of the User port means a loss of ac power to the Sparc le 20 unit or an overtemperature con dition or an open interlock switch 5700306 H Specifications 3 1 Advanced Energy PHYSICAL SPECIFICATIONS The following table lists the physical specifications Table 3 2 Physical Specifications DC Input and Output Connectors UHF type female Amphenol part numb
36. ional Military style connectors are optional on the Sparc le 20 The MS 3470 dc input connector is a male MS3470 connector the MS 3470 dc output connector is a female MS 3470 connector See Figure 4 3 The pin descriptions described in Table 4 1 and Table 4 2 are the same for both the input and output The full military specification numbers for these connectors are MS3470 L18 8P and MS3470 L18 8S respectively Recall that cabling and other attached components a mating connector for example for these connectors also have military specification numbers To configure and or assemble connecting components refer to the appropriate military specifications AE does not supply mating connectors See Connecting the DC Input and Output on page 5 4 for installation information To Chamber From MDX Figure 4 3 Optional MS 3470 connector 5700306 H Connectors Indicators and Controls 4 3 Advanced Energy Pin Descriptions for Male Connector The following table lists the pin descriptions for the male connector Table 4 1 Pin Descriptions for Male Connector Pin Letter Description A Unused do not connect Positive return to dc supply Ground Interlock Interlock Ground Unused do not connect E GO Ti m OO o U Negative supply from dc supply Pin Descriptions for Female Connector The following table lists the pin descriptions for the female connector
37. istered trademark of Advanced Energy Industries Inc Apex is a trademark of Advanced Energy Industries Inc Arc Check is a trademark of Advanced Energy Industries Inc Arc Out is a trademark of Advanced Energy Industries Inc Astral is a trademark of Advanced Energy Industries Inc Crystal is a trademark of Advanced Energy Industries Inc FixedMatch is a registered trademark of Advanced Energy Industries Inc GenCal is a trademark of Advanced Energy Industries Inc Matchless is a trademark of Advanced Energy Industries Inc Microsweep is a registered trademark of Advanced Energy Industries Inc Pinnacle is a trademark of Advanced Energy Industries Inc Sparc is a registered trademark of Advanced Energy Industries Inc Sparc le is a registered trademark of Advanced Energy Industries Inc Sparc vs is a trademark of Advanced Energy Industries Inc Starburst is a trademark of Advanced Energy Industries Inc SwitchMatch is a trademark of Advanced Energy Industries Inc Z Scan is a trademark of Advanced Energy Industries Inc Z Ware is a trademark of Advanced Energy Industries Inc 1998 Copyright by Advanced Energy Industries Inc All rights reserved Without written permission no part of this manual covered by copyright herein may be reproduced or copied in any form or by any means graphic electronic or mechanical including photocopying recording taping or information and retrieval systems Written permission must
38. ower has been removed from the Sparc le 20 unit 2 Power off the MDX power supply 3 Attach the cables to the appropriate connectors 5700306 H Installation 5 5 Advanced Energy 5 6 Installation 5700306 H MDX Sparc le 20 Chapter Operation Methods of Control s k secu ov ea SU ES ENSE OR a RE RE EP WESS 6 1 Front Panel Manual Control kk kk KK KK ere 6 1 User Port Control i novo nale epe did Re 6 1 SUpervisory Circuit core PIETRA ER SEE LES YR ES 6 3 Factory Configuration l a sek e Sa W da s b SAAN r Saw W Y Na n Wak d 6 3 METHODS OF CONTROL You can control the Sparc le 20 unit from the front panel switches or from the User port through optically coupled signals The interfacing functions available on the Sparc le 20 unit are represented by the abbreviated schematic Figure 6 3 on page 6 4 Units are shipped from the factory configured for User port control Front Panel Manual Control A Sparc le 20 unit can be controlled manually from the front panel Select LOCAL with the two position CONTROL switch Then use the three position OPERATING MODE switch to select an operating mode Although the manual method of operation limits the available options it does allow the unit to be quickly evaluated on a system without adding additional control cables User Port Control The Sparc le 20 unit can be operated through the User port on the rear panel For User port opera
39. pport All warranty work will be performed at an authorized AE service center see list of contacts at the beginning of this chapter You are responsible for obtaining authorization see details below to return any defective units prepaying the freight costs and ensuring that the units are returned to an authorized AE service center AE will return the repaired unit freight prepaid to you by second day air shipment or ground carrier for local returns repair parts and labor will be provided free of charge Whoever ships the unit either you or AE is responsible for properly packaging and adequately insuring the unit 5700306 H Troubleshooting and Customer Support 7 3 Advanced Energy Authorized Returns Before returning any product for repair and or adjustment call AE Customer Support and discuss the problem with them Be prepared to give them the serial number of the unit and the reason for the proposed return This consultation call will allow Customer Support to determine if the unit must actually be returned for the problem to be corrected Such technical consultation is always available at no charge Units that are returned without authorization from AE Customer Support and that are found to be functional will not be covered under the warranty see warranty statement below That is you will have to pay a retest and calibration fee and all shipping charges Upgrading Units AE s products are continually changing as ways
40. reason for the proposed return This consultation call allows Customer Support to determine whether the problem can be corrected in the field or if the unit needs to be returned Such technical consultation is always available at no charge If you return a unit without first getting authorization from Customer Support and that unit is found to be functional you will be charged a re test and calibration fee plus shipping charges To ensure years of dependable service Advanced Energy products are thoroughly tested and designed to be among the most reliable and highest quality systems available worldwide All parts and labor carry our standard one year warranty WARRANTY Advanced Energy products are warranted to be free from failures due to defects in material and workmanship for 12 months after they are shipped from the factory please see warranty statement below for details In order to claim shipping or handling damage you must inspect the delivered goods and report such damage to AE within 30 days of your receipt of the goods Please note that failing to report any damage within this period is the same as acknowledging that the goods were received undamaged For a warranty claim to be valid it must Bemade within the applicable warranty period Include the product serial number and a full description of the circumstances giving rise to the claim Have been assigned a return authorization number see below by AE Customer Su
41. retro fitted into existing systems Activation Counting Users have found that a knowledge of the arcing rate over the life of a target or over the duration of a process cycle can be used as a measure to explain defects or poor film quality The Sparc le 20 unit includes an isolated signal connected to a BNC connector which can be monitored by a counter Each time a Sparc le 20 unit suppresses an arc a 5 V 5 s signal arc suppression signal is generated During heavy arcing the pulse width may become less than 5 us During the self run mode the activation counter generates a signal only when an arc is suppressed between the pulses That is the self run frequency cannot be monitored on this output Supervisory Circuit An internal supervisory circuit within the Sparc le 20 unit monitors its function in the active arc handling and self run modes The purpose of this circuit is to notify the operator that the Sparc le 20 unit is not functioning properly this prevents yield loss in critical processes A signal is produced at the Sparc le 20 User port in the case of a unit malfunction The load current must exceed 1 5 A before the supervisory circuit becomes operational 5700306 H Theory 2 1 Advanced Energy THEORY OF OPERATION The Sparc le 20 unit is inserted between the MDX power supply and the chamber see Figure 2 1 It is connected in series with the output of the MDX power supply and physically located close to the chamber
42. tary style connectors 4 10 Rear view of Sparc le 20 with terminal block 4 11 DIMENSIONS y need ge debeas eb 4 12 Frequency change switch i s xselle Rey da to 5 3 Connecting dc input and output to the terminal block 5 5 Connector jumpers for User port operation of Sparc le20 6 1 MDX User port control of Sparc le 20 6 2 Sparc le 20 User port signal lines LS KK KK KK KK KK eee 6 4 5700306 H Advanced Energy iv 5700306 H MDX Sparc le 20 List of Tables Table 3 1 Functional Specifications 3 1 Table 3 2 Physical Specifications 3 2 Table 3 3 Electrical Specifications 44 4 644450 Howie ea ea 3 2 Table 3 4 Environmental Specifications 3 3 Table 4 1 Pin Descriptions for Male Connector 4 4 Table 4 2 Pin Descriptions for Female Connector 4 4 Table 4 3 User Port Pin Descriptions 4 6 Table 4 4 Stats Signals cose x SR MEIN DARK MESURE QURME eR bl etn 4 7 Table 4 5 Front Panel Indicators 1 1 0 A kK KK KK KK KK KK KK KK KK KK KK KI eee 4 7 Table 6 1 Operating Modes asus ruas kesl aa oe ds A IERI E REA 6 3 Table 7 1 Customer Support Locations 7 2 5700306 H V MD
43. temperature is not exceeded see Environmental Specifications on page 3 3 and where its air vent inlets and outlets are not obstructed 5700306 H Installation 5 1 Advanced Energy Logic Board Switches A DANGER Before removing the Sparc le 20 unit cover take proper precautions against ESD electro static discharge Potential damage to the unit could occur Note Before removing the Sparc le 20 unit cover take proper precautions against ESD Electro static discharge Potential damage to the unit could occur To set the switches discussed in the following sections you must access the logic board by removing the unit cover Before removing the unit cover remove ac and dc input power from the Sparc le 20 unit take proper precautions against ESD electro static discharge and take care to remove all unit cover screws If you are uncertain about this procedure please contact the nearest AE Customer Service office Changing Self run Frequency A switch on the logic board has been provided so that you can change the self run frequency from 20 kHz to 2 kHz Units shipped from the factory always have this switch set in the 20 kHz position The self run frequency can be changed via an access port located at the rear of the unit A CAUTION Do not change the frequency setting while the unit is operating Turn off the DC supply and unplug the SPARC LE 20 line cord before changing the frequency setting
44. tion connect the jumpers on the female cheater plug on the logic board as shown in Figure 6 1 See Logic Board Switches on page 5 2 for more information mro U ea ia Connect pin 4 to select 4 self run mode i 5 Figure 6 1 Connector jumpers for User port operation of Sparc le 20 5700306 H Operation 6 1 Advanced Energy The User interface connector is a 9 pin male subminiature D connector located on the rear panel Details of each of these signals and their function are described in User Port Pin Descriptions on page 4 6 The Sparc le 20 unit can also be operated through the MDX User port Both switches on the 1 switch assembly must be open and no jumpers should be installed in the female cheater plug for MDX control For more information about setting the switches on the logic board Logic Board Switches on page 5 2 The control lines used on the MDX to control Sparc le 20 unit are illustrated in Figure 6 2 As can be seen from Figure 6 2 when CS2 D is selected at the MDX then Sparc le 20 unit is activated The Sparc le 20 self run mode is selected in a similar manner using the MDX unit s CS1 D line When using the MDX to control a cathode switch box another means is required to control Sparc le 20 Sparc le 20 MDX User Port User Port DEUS EC i 8 M5VdcINT S1 open i e o gt 5 INTCOMA l l l l L e 2 15 V dc m 18 15Vdo f e r 3
45. uits It is active only when S1 on the Sparc le20 logic board has been activated It can only source 50 mA pin 9 OVERTEMP AC PWR INTERLOCK D This 0 15 V dc signal opens whenever an overtemperature trip has occurred in the Sparc le 20 unit whenever the ac line cord has been disconnected or whenever an interlock switch is open This pin will sink up to 2 mA maximum Note A A appended to a pin name indicates an analog signal a D appended to the pin name indicates a digital signal An overline on the signal name indicates that the signal is true when low 4 6 Connectors Indicators and Controls 5700306 H MDX Sparc le 20 INDICATORS Status Signals Status signals can be externally monitored by means of an output line on the User port Digital signals are O to 15 V Table 4 4 Status Signals Pin Name Function 9 OVERTEMP AC Opens when overtemperature condition or loss of ac PWR INTERLOCK D power occurs 7 SUPERVE D Opens when the active arc handling function is not operating properly Front Panel Indicators There are seven LED indicators on the Sparc le 20 front panel See the panel drawings at the end of this chapter for LED locations The table below provides details Table 4 5 Front Panel Indicators LED Name Function Power On ready Green LED lights to indicate that power is on Mode Override Yellow LED lights to indicate an internal overtem Ov
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