FB Positioning Systems User Guide
Contents
1. 12 581 194 pending Nanomotion Ltd 4 FlexDC User Manual Limited Warranty Revision History Revision Release Details date 00 A Apr 2009 New release 01 A Jan 2011 Added UHV connection wires schema Added an Important note as to run the system before operation Added deteails about configurations which include interpolator Added updated EOP information 01 B Feb 2011 Updated the Stage Heat Dissipation considerations section semantics NA Aug 2012 Administrative change added patent information section in front matter Nanomotion Ltd 5 FB Positioning Systems User Guide Table of Contects Table of Contents dI elem Em 9 1 1 About This User Guide eerta tette eite 9 1 2 Who Should Use This User G lde eere eere ires ee 9 1 3 Nanomotion Products Reference Documentation 9 14 Safely Precaution Ss eege feierte e ee 10 MH wlicllipllpe e aq q w ua a ua o pias 11 2 EIERE RE Rossi 11 EN e 11 23 Sage eat E 11 2 4 Available Configurable Assemblies eee 12 2 5 Encoder Options cicer ere toe ecd qae x eeu e en Ru dee ee 12 3 QUICK START E 13 3 1 Unpacking the SIage ege e eee uM endet ure Re ena n d sd teh tede 13 5 2 lage AMS TAN ALON geese EE 14 33 Connecting and Turning On the System ae Leno cerned 15 4 MECHANICAL DRAWINGS Eed 18 au ET Ee EE 18 ET E 19 4 amp 3 cPB2. 26 107 d 100 oO 62 93 17 72 e 78 87 47 70 13 55 f 56 62 33 50 9 39 g 50 56 30 45 8 35 Table 1 EOP Table for HR Motors Driven by AB1A AB2 AB4 Nanomotion Ltd 29 FB Positioning Systems User Guide Motor Dynamic Performance 6 2 3 1 An Example for Defining the EOP for AB1A Driver in Vacuum Environment An example for using the graph and table Figure 7 and Table 1 for the AB1A driver A vacuum application requires 10N at a velocity of 100mm sec The graph shows that this point of operation corresponds to the curve d The table shows that curve d and a vacuum environment require that a duty cycle of 1796 will not be exceeded and the maximum continuous operation time is limited to 72 seconds 6 2 4 EOP for HR Motors Driven by AB5 AB51 Drivers Nanomotion Ltd The AB5 AB51 drivers are preferable for a perfect servo tracking and or very low ripple constant velocity Refer to the AB5 and AB51 Drivers User Manual D N AB05458200 The AB5 unique features result in the motor consuming more power and in a lower EOP compared to the EOP for a motor operating with the AB1A driver The AB51 driver is a modified version of the AB5 driver which gives a higher EOP compared to the AB5 driver with some adverse effect on control performance in respect to tracking error and low velocity ripple 30 FB Positioning Systems User Guide Motor Dynamic Performance Figure 8 illustrates motor velocity as a function of the ap
3. N HR00458001 C CAUTION Shortening the motor cable length may damage the motor Do not attempt to shorten the cable without prior confirmation by Nanomotion Extending the motor cable does not damage the motor however it might affect its performance Nanomotion Ltd 15 FB Positioning Systems User Guide Quick Start 3 3 1 3 3 2 3 3 3 3 3 4 3 3 5 3 3 6 Connect the motor to the Nanomotion driver refer to driver user manual for more information Refer to section 6 3 for Standard Motor Connector Pinout and section 6 4 for Ultra High Vacuum Motor Connection Wires e he Motor Connected interlock is available on Nanomotion standard motor connector It disables high voltage on the bare driver output connector when the motor disconnected from the driver e Nanomotion s motors run at a resonant frequency and are sensitive to the capacitance of the electrical circuit Changing cable length affects the total capacitance refer to driver user manual for maximum allowed cable length e Nanomotion provides motors with specific low capacitance cable as follows n Standard motors 210pF meter a Vacuum motors 43pF meter Connect the driver to the user s servo controller refer to driver user manual and controller user manual for pinouts and interconnection information For stage configuration without the interpolator skip to section 3 3 4 otherwise perform steps a to c to connect the interpolator a
4. the date of shipment NM warrants those parts replaced under warranty for a period equal to the remaining warranty coverage of the original part NM s sole and exclusive obligation under this warranty provision shall be to repair or at its sole option exchange defective products or the relevant part or component but only if i the Purchaser reports the defect to NM in writing and provides a description of the defective product and complete information about the manner of its discovery within ten 10 days of its discovery ii NM has the opportunity to investigate the reported defect and to determine that the defect arises from faulty material parts or workmanship and iii the Purchaser returns the affected product to a location designated by NM These provisions constitute the exclusive remedy of the Purchaser for product defects or any other claim of liability in connection with the purchase or use of NM products This warranty policy applies only to NM products purchased directly from NM or from an authorized NM distributor or representative This warranty shall not apply to i products repaired or altered by anyone other than those authorized by NM ii products subjected to negligence accidents or damage by circumstances beyond NM control iii product subjected to improper operation or maintenance i e operation not in accordance with NM Installation Manuals and or instructions or for use other than the original purpose for whic
5. 0 V 453 Ma 6H Y 315 4X 177 500 Tooling Holes L I 9 315177 Mounting Holes C Bored Farside 40 so 1 575 1 969 20 900 823 A mm B mm FB050 020 0 1M2 FB050 050 0 1M2 75 so FB050 050 0 Ma 75 80 Figure 2 FB050 Stage Layout Nanomotion Ltd 18 FB Positioning Systems User Guide Mechanical Drawings 4 2 FB075 Layout 5 165 V 177 M5 6H Y 177 Tooling Holes 8X 217THRU ALL LJ 394 Y 217 g ia de GEN E Mounting Holes Tooling Holes C Bored Farside EcL FB075 040 0 1M4 FBO75 100 0 1M4 110 125 110 FB075 150 0 1M4 160 175 160 Figure 3 FBO75 Stage Layout Nanomotion Ltd 19 FB Positioning Systems User Guide Mechanical Drawings 4 3 FB100 Layout 8X 5 217 THRU ALL 8X 5 165 Aen 394 Vy 217 M5 6H y 375 Mounting Holes S C Bored Farside Tooling Holes Des Y 311 M5 6H V 217 Tooling Holes Ground FB100 100 0 1M8 120 160 120 FB100 150 0 1MB 160 200 160 Figure 4 FB100 Stage Layout Nanomotion Ltd 20 FB Positioning Systems User Guide Mechanical Drawings 4 4 FB150 Layout 8x D 260 THRU ALL 8x 197 dk son L_ 433 V 256 M6 6H V 472 Mounting Holes Tooling Holes E Ve T C Bored Farside 5 197 dk ae M6 6H 250 Tooling Holes A mm B mm C mm Figure 5 FB150 Stage Layout Nanomotion Ltd 21 FB Positioning Systems User Guide 5 Techni
6. 00 100 0 1M8 Refer to section 6 1 for Settling Time calculation 5 7 FB150 Series Propeties Travel Stiffness Dynamic Static Moving d adds Stall Force Holding Mass mm Force N g The specified values are within 10 range Refer to section 6 1 for Settling Time calculation Nanomotionltd 24 FB Positioning Systems User Guide Motor Dynamic Performance 6 Motor Dynamic Performance 6 1 Settling Time The achievable settling time is mainly dictated by the damping of the motor and the natural frequency of the system A typical number of three cycles is required for the motor damping to damp the system vibration along the motion axis so the settling time is roughly according to the following formula 15 529 Fr where Fr is the natural frequency of the system and is calculated according to the following formula rr E 2 i m Where K stiffness of the motor in Newton meter m mass of the moving part in Kg If the desired natural frequency is higher than the one calculated for a given configuration adding another motor in parallel or in tandem increases the system s natural frequency due to the increased stiffness The combined stiffness of several motors is the algebraic sum of stiffness of the individual motors The user should recalculate the natural frequency using the combined stiffness of the motors It is worthwhile to note that the effective motor stiffness increase
7. ALG Sin Cos optional EB 100 060 10M 1 um optional 4 HR4 100 05M D um optional 8 HR8 150 01M 0 1 um standard 300 50N 50 nm optional 10N 10 nm optional ALG Sin Cos optional FB 150 100 10M 1 um optional 4 HR4 150 05M 5 um optional 8 HR8 200 01M 0 1 um standard 300 50N 50 nm optional 10N 10 nm optional ALG Sin Cos optional 7 2 Example Configurations e FB150 stage with 100mm travel Sin Cos encoder and HR8 motor FB 150 100 ALG 8 e FB050 stage with 20mm travel 0 1M encoder resolution and HR2 motor FB 050 020 10M 2 Nanomotion Ltd 39 FB Positioning Systems User Guide Contact Information 8 Contact Information 8 1 Customer Service Contact your local distributor or email Nanomotion Ltd Technical Support Department at techsupport nanomotion com with detailed problem description 8 2 General Inquiries and Ordering e Outside the USA Nanomotion Ltd Headquarters Nanomotion Ltd PO Box 223 Yokneam Israel 20692 Tel 4 972 73 2498065 Fax 4972 73 2498099 Web site www nanomotion com Email nano nanomotion com e Inthe USA Nanomotion Inc US Headquarters Nanomotion Inc 1 Comac Loop Ste 14B2 Ronkonkoma NY 11779 Tel 800 821 6266 Fax 631 585 1947 Web site www nanomotion com Email nanous nanomotion com Nanomotion Ltd 40
8. Connect the encoder output to the interpolator input refer to section 6 5 for encoder s pinout b Connect the interpolator output see section 6 5 for the A Quad B Encoder Connector Pinout to the controller c Proceed to section 3 3 5 Connect the encoder to the servo controller refer to section 6 5 and section 6 6 for encoders pinouts refer to controller user manual for pinout and interconnection details Connect the servo controller to the PC Connect the proper external power supply to the driver refer to the driver user manual for more information Nanomotion Ltd 16 FB Positioning Systems User Guide Quick Start 3 3 7 Connect the servo controller to power supply source refer to the controller user manual for more information 3 3 8 Before operating the stage refer to the controller user manual for servo parameters tuning and operation instructions 3 3 9 Turn the servo controller on ensure there is no command when turning the power on bubo After unpacking the stage or if is unused for an extended period of time over a week run the stage with relaxed servo settings several times the whole travel so it resumes its equilibrium caution Avoid prolonged operation in an unstable condition excessive vibration and noise during the tuning process Nanomotion Ltd 17 FB Positioning Systems User Guide Mechanical Drawings 4 Mechanical Drawings 4 1 FB050 Layout 5X 13
9. IODIESDUE casais eso is Saias teehee uae il Ad eek cais esta 20 qu E bayot ii b ee a qub etd ble it ei Daten 21 5 TECHNICAL SPECIFICATIONS trant eege ee eege 22 5 1 Straightness and Flatness eege USAS ERAS ia ae 22 5 2 Maximum Load Capacily ne en reor tex ra emen nes ete ex ecd ge 22 5 3 gene e UE 22 Ay RBOBOSCNES eur amet oU RR REP EUR mam dope E as ese 23 So EN RE 23 5 6 EE 24 Nanomotion Ltd 6 FB Positioning Systems User Guide Table of Contects 5 7 FBVSO RE 24 6 MOTOR DYNAMIC PERFORMANGCE u u u 25 6 1 Settling Time ue uuu uui edet recente ERREUR ERREUR RA ERRA TIO sh EA 25 6 2 Thermal Envelope of Performance EOP for HR Motors 26 63 Standard Motor Connector Te E 35 6 4 Ultra High Vacuum Motor Connection Wires 37 6 5 A Quad B Encoder Connector Pinout AEN 38 6 6 Sin Cos Encoder Connector Pinout era 38 7 ORDERING INFORMATION i iint ut ntn nS Rein Ex amia sears fora eegne 39 7 1 Part Numbering Schemes OE ergeben eee nus 39 42 dExampl COonlulalioHs s u ses eo pce SE 39 8 CONTACT INFORMATION patet u ehre 40 c MEME e Ee qhuspa puspa ENS 40 8 2 General Inquiries and Ordering soie dori ete ete t preci eraot ponis ie qe 40 Nanomotion Ltd 7 FB Positi
10. SD NANOMOTION A Johnson Electric Company FB Positioning Systems User Guide FB00458000 01 REV B August 29 2012 Nanomotion Ltd POB 623 Yokneam 20692 Israel Tel 972 73 2498000 Fax 972 73 2498099 Web Site www nanomotion com E mail nano nanomotion com FB Positioning Systems User Guide Copyright Copyright This document contains proprietary information of Nanomotion Ltd and may not be reproduced in any form without prior written consent from Nanomotion Ltd No part of this document may be reproduced translated stored in a retrieval system or transmitted in any form and by any means electronic mechanical photographic photocopying recording or otherwise without the written permission of Nanomotion Ltd Information provided in this document is subject to change without notice and does not represent a commitment on the part of Nanomotion Ltd Copyright 2009 2012 Yokneam Israel All rights reserved All products and company names are trademarks or registered trademarks of their respective holders Nanomotion Ltd 2 FB Positioning Systems User Guide Limited Warranty Nanomotion Ltd hereinafter NM warrants the product other than software manufactured by it to be free from defects in material and workmanship for a period of time of one year except those parts normally considered as consumable expendable components such as motor conditioning brushes The warranty commences thirty 30 days from
11. Systems User Guide FB Series 2 FB Series 2 1 Introduction The FB series product line is a family of standard linear positioning systems stages designed for modular single and multi axis applications The stage configuration utilizes cross roller bearings a linear optical encoder and Nanomotion ceramic servo motors The stages are offered in a wide range of widths and travel lengths and encoder resolutions to achieve a range of performance criteria Various motors sizes are available for each configuration to meet necessary force acceleration requirements 2 2 Features e Compact stage design with low profile e Direct drive motor with simple robust construction e Linear encoder mounted in the center for optimum positioning eliminating Abby Error e Easily configurable in multi axis e Wide range of slide sizes travels and motor sizes 2 3 Stage Configurations Series W i Motor Options Standard Travels mm FB050 HR2 or HR4 20 50 75 FBO75 HR4 or HR8 40 60 100 150 FB100 HR4 or HR8 60 100 150 200 300 FB150 150mm HR4 or HR8 100 150 200 300 Nanomotion Ltd 11 FB Positioning Systems User Guide FB Series 2 4 Available Configurable Assemblies Nanomotion supplies the FB stages in following multi axes configurations e X Y e X Z using angle bracket e X Y Z using angle bracket e Vacuum versions available Nanomotion also configures assemblies with integrated Theta and Goniometer stages
12. cal Specifications 5 1 Straightness and Flatness FB050 FB075 FB0100 Starightness 2 5um 25mm 2 5um 25mm 2 5um 25mm 1 e amp Flatness travel travel travel travel 5 2 Maximum Vertical Load Capacity Maximum Vertical Load Capacity kg Travel mm FB050 FB075 FB0100 FB150 5 3 Position Repeatability EE 0 1um 0 5 um standard 10nm 50 nm optional 50nm 200 nm optional 0 5um E 2 um optional 1 0um 3 um optional Nanomotion Ltd 22 FB Positioning Systems User Guide Technical Specifications 5 4 FB050 Series Propeties Travel Stiffness Dynamic Static K Stall Force Holding mm N p N Force N 20 pepe Specified values are within 10 range FB050 020 0 1M2 Refer to section 6 1 for Settling Time calculation 5 5 FB075 Series Propeties Travel Stiffness Dynamic Static Moving ban Stall Force Holding Mass mm Force N FB075 040 0 1M4 40 FB075 060 0 1M4 E FB075 060 0 1M8 The specified values are within 10 range Refer to section 6 1 for Settling Time calculation Nanomotion Ltd 23 FB Positioning Systems User Guide Technical Specifications 5 6 FB100 Series Propeties Travel Stiffness Dynamic Static LK Stall Force Holding mm N p N Force N The specified values are within 10 range FB100 060 0 1M4 FB100 060 0 1M8 FB100 100 0 1M4 FB100 150 0 1M8 FB100 200 0 1M8 GE EE FB1
13. h the product was designed to be used NM shall not in any event have obligations or liabilities to the Purchaser or any other party for loss of profits loss of use or incidental increased cost of operation or delays in operation special or consequential damages whether based on contract tort including negligence strict liability or any other theory or form of action even if NM has been advised of the possibility thereof arising out of or in connection with the manufacture sale delivery use repair or performance of the NM products Without limiting the generality of the preceding sentence NM shall not be liable to the Purchaser for personal injury or property damages Patent Information Nanomotion products are covered under one or more of the following registered or applied for patents 5 453 653 5 616 980 5 714 833 111597 5 640 063 6 247 338 6 244 076 6 747 391 6 661 153 69838991 3 6 384 515 7 119 477 7 075 211 69932359 5 1186063 7 211 929 69941195 5 1577961 4813708 6 879 085 6 979 936 7 439 652 7061158 1800356 1800356 1800356 2007 533057 pending 2011 093431 pending 7 876 509 10 2007 7009928 pending 200780019448 6 7713361 9 pending 12 294 926 pending GB2008000004178 pending GB2009000003796 pending 12 398 216 pending GB2446428 Nanomotion Ltd 3 FlexDC User Manual Limited Warranty 12 517 261 pending 08702695 1 pending 10 2009 7017629 pending 12 524 164 pending
14. inout in section 6 3 I I Direction 1 Common Direction 2 Red Figure 11 UHV Motor Connection Wires Nanomotion Ltd 37 FB Positioning Systems User Guide Motor Dynamic Performance 6 5 A Quad B Encoder Connector Pinout The encoder connector is a D Type 15pin male This connector is compatible to Renishaw RGH24 digital encoder Note this connector pinout is valid aslo for the interpolator output refer to section 3 3 3 for connecting the interpolator Pin Name Incremental signals Reference mark Index Table 5 AgB Encoder Pinout 6 6 Sin Cos Encoder Connector Pinout The encoder connector is a D Type 15pin male This connector is compatible to Renishaw RGH24 analogue encoder Vi4 lj Vi l Incremental signals Vo lo Vo lo Vot lo Reference mark Index Lm qwe Inner shield Shield Case Outer shield Table 6 Sin Cos Encoder Pinout Nanomotion Ltd 38 FB Positioning Systems User Guide Ordering Information 7 Ordering Information 7 1 Part Numbering Scheme Available configurations for the FB stages Width Travel Encoder resolution HR Motor type m mm 020 10M 1 um optional 2 HR2 050 05M 5 um optional 4 HR4 060 01M 0 1 um standard 075 50N 50 nm optional 10N 10 nm optional ALG Sin Cos optional ER 075 040 10M 1 um optional 4 HR4 060 05M D um optional 8 HR8 100 01M 0 1 um standard 150 50N 50 nm optional 10N 10 nm optional
15. n sec sec 0 a 100 100 CO 56 500 b 100 100 cO 54 450 g 100 100 OO 45 280 d 100 100 cO 33 170 e 100 100 oO 23 100 f 53 58 170 12 66 g 33 48 77 10 44 h 17 28 32 6 5 25 Table 3 EOP Table for HR Motors Driven by the AB51 Driver Reduced LUT Note In the Brake Off Mode the full advantage of the AB5 driver is enabled giving a linear response best tracking and low velocity performance Using this mode the motor operates continuously even at 0 command and special attention must be given to maintain the work regime within the permitted Duty Cycle and Maximal Continuous Operation Time refer to Table 2 and Table 3 Once the operation time has reached the Maximal Continuous Operation Time even at Brake Off Mode without motion the driver must be disabled to allow the motor to cool down for at least 400 seconds in air and 700 sec in vacuum environment Nanomotion Ltd 33 FB Positioning Systems User Guide Motor Dynamic Performance 6 2 4 1 6 2 4 2 Nanomotion Ltd An Example for Defining the EOP for AB5 Driver in Vacuum Environment Brake On Mode A vacuum application requires 8N at a velocity of 80mm sec and the motor is disabled when stand still Brake On Mode The graph see Figure 9 shows that this point of operation corresponds to the curve e see Table 2 Table 2 for AB5 in Brake On Mode shows that curve e and a vacuum environment require that a duty cycle
16. n the screws back to their original location at the end of the rail by applying a proper torque Nanomotion Ltd 13 FB Positioning Systems User Guide Quick Start 3 2 Stage Installation caution Install the stage in a location free of excessive vibration 3 2 1 Attach the stage to a user prepared mounting surface refer to chapter 4 Mechanical Drawings for interface The recommended level of flatness for attachment surface is 20um or less 3 2 2 Attach the payload to the stage refer to chapter 4 Mechanical Drawings for interface Nanomotionltd Gg FB Positioning Systems User Guide Quick Start 3 3 Connecting and Turning On the System Am PORTANT Make sure all stage motors and encoders are connected to the corresponding axis on the servo controller The motors and the encoders are already aligned and adjusted by Nanomotion and their performance is verified Nanomotion guarantees proper driver and motor performance only when using Nanomotion supplied cables Nanomotion supplies conditioned stages Perform conditioning only in case a motor had been remounted refer to motor user manual As to vacuum V and ultra high vacuum UHV stages Nanomotion supplies clean V and UHV motors yet the bake out is required in order to remove residual contaminants and absorbed humidity from the motors and other system components Refer to the Nanomotion Vacuum and Ultra High Vacuum Motors Bake out Procedure D
17. nction of the applied driver command voltage Allowing up to 30 mm sec variations use it as a reference and as a guideline for expected motor performance 300 250 200 n o 150 E E 100 gt 8 5 EE 1 d deg a EE a ce a a Y eae EE EE E E Leben NEEN E OEE sasa asas sz pusu sss 0 1 2 3 4 5 6 7 8 9 Command V Figure 6 Motor Velocity vs Command 1 The motor operates horizontally at room temperature and low duty cycle lt 10 It interfaces with the Ceramic Driving Strip according to Nanomotion Specifications and a cross roller high quality slide Nanomotion Ltd 28 FB Positioning Systems User Guide Motor Dynamic Performance Figure 7 and Table 1 are designed to help the user determining the correct envelope of performance and avoid overheating and damaging the motor HR1 HR2 HR4 HR8 4 8 16 32 3 6 12 24 2 4 8 16 LU 1 2 4 8 0 0 0 0 0 50 100 150 200 250 300 Velocity mm sec Figure 7 Motor Force vs Velocity at the Various Work Regimes a g AB1A AB2 ABA Air 25 C Air 50 C Vacuum o 2 Maximal Maximal Maximal o Duty Cycle Continuous Duty Cycle Continuous Duty Cycle Continuous 26 Operation 26 Operation 26 Operation time sec time sec time sec a 100 oO 100 oO 100 oO b 100 oO 100 oO 44 184 c 100 oO 92 137
18. ns 6 2 3 and 6 2 4 After the continuous operation is completed the driver must be disabled to cool down the motor for 400 sec in air and for 700 sec in vacuum environment 26 FB Positioning Systems User Guide Motor Dynamic Performance Notes The duty cycle is the ratio of the operation time and the total work cycle operation time 4 idle time When operating the motor with the AB5 AB51 driver continuously in Brake Off Mode refer to section 6 2 4 EOP for HR Motors Driven by AB5 AB51 Driver the motor consumes power at all times even when the control command voltage is 0 zero thus the time at 0 command is accounted in the heating process and reduces the thermal EOP Upon operating a motion system in vacuum it is expected that the Coefficient of Friction of the bearing structure will increase This may require changing the system operation point on the thermal EOP curves 6 2 2 Stage Heat Dissipation Consideration The motor heat dissipation mechanism is by convection and radiation to the motor case and by conduction through motor s finger tips Hence the motor and the Ceramic Driving Strip bases must both be thermally designed to dissipate 2W each per motor s finger tip with maximum temperature rise of 15 C Nanomotion Ltd 27 FB Positioning Systems User Guide Motor Dynamic Performance 6 2 3 Thermal EOP for HR8 Motor Driven by AB1A AB2 ABA Drivers Figure 6 illustrates motor velocity as a fu
19. of 13 will not be exceeded and the maximum continuous operation time is limited to 90 seconds Alternatively AB51 can be used giving duty cycle and continuous operation of 23 and 100 sec respectively The same conditions under Air at 25 C will result in 100 Duty Cycle and unlimited continuous operation An Example for Defining the EOP for AB5 Driver in Vacuum Environment Brake Off Mode When Brake Off Mode is used under vacuum conditions the motor will overheat at any duty cycle if operated for a prolong time To calculate the max operation time use curve 0 a see Table 2 for time at 0 command and the operation curve for the operating time according to the following formula Tmax Max continues operation at the operation regime DC max continuous operation under regime a 1 DC If operating under curve c see Table 2 using AB5 in a duty cycle of 1096 the total operation time is Tmax 150 0 1 230 1 0 9 222 sec Once Tmax is reached the driver should be disabled for a period of 700 sec 34 FB Positioning Systems User Guide Motor Dynamic Performance 6 3 Standard Motor Connector Pinout This section describes the motor connector pinout Make sure the driver is set to operate with the HR motor series The motor driver connection is a standard 9 contacts D type female connector see Figure 10 Motor Connector Pinout 5 9 Directi
20. on 1 4 Common 8 Direction 2 3 Screen 7 2 6 1 Figure 10 Standard Motor Connector S CAUTION e Incase the user replaces the original standard motor connector with user s compatible connector it is essential to short circuit pins 1 and 6 for safety reasons refer to Figure 10 and Table 4 Nanomotion Ltd 35 FB Positioning Systems User Guide Motor Dynamic Performance Ping PoName Tee esto GND System ground Safety input shorted to pin 6 in order to verify the motor connection and to prevent driver s operation without the motor o quem NR mt 3 o Hahiagesu Comite wi etoomnal Shield Inner shield Shorted to the shield Table 4 Motor Connector Pinout Motor Connected Input Safety input shorted to pin 1 in order to verify the motor connection and prevent driver s operation without the motor Nanomotion Ltd 36 FB Positioning Systems User Guide Motor Dynamic Performance 6 4 Ultra High Vacuum Motor Connection Wires e The HR UHV motor does not have an outlet cable or a connector Instead it has 3 TFE jacketed flying wire leads extending out of the motor black red and white see Figure 11 The red and the white wires are directions down and up respectively and the black wire is the common e The user should provide a UHV compatible cable and connector for connecting the motor e Ensure that pins 1 and 6 of the connector are short circuited Refer to Table 4 Motor Connector P
21. oning Systems User Guide Lists List of Figures Figure 1 Removing the Shipping Bracket arara 13 Figure 2 FBOBO Stage Lay OQUE EE 18 Figure 3 FBO 5 Stage Layout a u u sua ER ED ERES aii Eed 19 Figure 4 FB100 Stage Layout EE 20 Figure 5 FB150 Stage Layout A E Das 21 Figure 13 Motor Velocity vs Command Au 28 Figure 14 Motor Force vs Velocity at the Various Work Regimes a g 29 Figure 15 Velocity vs Command Using the AB5 AB51 Driver 31 Figure 16 Force vs Velocity Using the AB5 AB51 Driver at the Various Work Regimes E LEE 32 Figure 6 Standard Motor Connector enne 35 Figure 7 UHV Motor Connection Wires ANEN 37 Nanomotion Ltd 8 FB Positioning Systems User Guide Preface 1 Preface 1 1 About This User Guide This user guide provides instructions for unpacking connecting and operating the FB positioning system It also includes details of the various Nanomotion FB positioning systems available configurations motor performance specifications and mechanical layouts For user s convinience the FB positioning system is refered to as stage further in this user guide 1 2 Who Should Use This User Guide This user guide is intended for engineers or technicians directly involved in installation operation and maintenance of positioning systems and control systems Before starting the procedure outlined in this user guide make sure tha
22. plied AB5 AB51 driver command voltage Allowing up to 30 mm sec variations use it as a reference and as a guideline for expected motor performance 300 250 200 150 100 50 Velocity mm sec 0 1 2 3 4 5 6 7 8 9 10 Command V Figure 8 Velocity vs Command Using the AB5 AB51 Driver Nanomotion Ltd 31 FB Positioning Systems User Guide Figure 9 and Table 2 are designed to help the user determining the correct envelope of performance and avoid overheating and damaging the motor HR1 HR2 HR4 HR8 4 8 16 32 Force N 0 50 100 150 200 250 300 Velocity mm sec Figure 9 Force vs Velocity Using the AB5 AB51 Driver at the Various Work Regimes a h AB5 Air 25 C Vacuum Curve Duty Cycle Duty Cycle Continues Duty Cycle Continues Brake_ Off Brake_On Operation Brake_On Operation sec 7e sec 0 a 100 100 o0 28 230 b 100 100 00 23 210 c 100 100 00 19 150 d 100 100 OO 14 110 e 50 80 280 13 90 f 33 58 170 12 66 g 24 45 77 10 44 h 11 28 32 6 5 25 Table 2 EOP Table for HR Motors Driven by AB5 Standard LUT Nanomotion Ltd Motor Dynamic Performance 32 FB Positioning Systems User Guide Motor Dynamic Performance AB51 Air 25 C Vacuum Cury Duty Cycle Duty Cycle Continues Duty Cycle Continues urve Brake_ Off Brake_On Operation Brake_On Operatio
23. providing rotation tip tilt Contact Nanomotion technical support for more information see chapter 8 HIE e Nanomotion supplies lubricated vacuum and ultra high vacuum stages by means of Apiezon Grease Type M high vacuum grease Other type of grease is optional e Each stage has integrated non adjustable mechanical hard stops 2 5 Encoder Options Resolution Standard Mark 50 nm Included Included 10 nm Included Included Analog output Optional Included Sin Cos Notes 1 All standard FB stages are provided with 0 1um resolution linear encoders 2 Reference Mark magnetic non adjustable Home Sensor 3 All vacuum stages are supplied with an external interpolator box Nanomotion Ltd 12 FB Positioning Systems User Guide Quick Start 3 Quick Start 3 1 Unpacking the Stage Nanomotion delivers the FB stage for vacuum environment double bagged per Class1000 clean room standards The non vacuum FB stages are delivered in a Nanomotion standard packaging Non vacuum FB stages with 50nm and 10nm encoder resolution and all vacuum FB stages include an external encoder interpolator box interpolator see section 2 5 3 1 1 All FB stages are delivered with their axes locked by shipping brackets Before stage operation remove the shipping bracket by means of screwdriver see Figure 1 Figure 1 Removing the Shipping Bracket 3 1 2 After removing the shipping bracket faste
24. s under close loop operation Driving vertically with a motor that actuates based on friction requires specific consideration to the static load separate from the dynamic force Rule of thumb each 4N element can drive 120 grams vertically Beyond this consider a counter balance in a form of a spring a continuous force gas spring or opposing weight Nanomotion Ltd 25 FB Positioning Systems User Guide Motor Dynamic Performance 6 2 Thermal Envelope of Performance EOP for HR Motors 6 2 1 Nanomotion Ltd Description Motor operating temperature is a result of the balance between heat generation and heat dissipation e The heat generation depends on motor s work regime driver command level e The heatis dissipated through the following heat transfer mechanisms conduction radiation and convection the convection mechanism is negligible in vacuum environment The heat dissipation mechanisms should be able to dissipate the heat generated in order to avoid overheating The EOP gives the user the tools to assess the permitted operating conditions for set ambient temperature and command deriving the duty cycle and maximal continuous operation that assures safe operation The user can either operate the motor for an extended period of time at a specific duty cycle or alternatively can operate the motor for a continuous time period specified under Maximal Continuous Operation Time see graphs and tables in sectio
25. t you read the Safety Precautions section outlined below and follow all safety guidelines as described further on in this user guide 1 3 Nanomotion Producis Reference Documentation The following documents contain additional information related to the FB Positioning Systems which can be found on Nanomotion website as well e AB5 and AB51 Drivers User Manual e AB1A AB2 ABA Driver User Manuals e FlexDC Controller HW User Manual includes Quick Start e FlexDC Controller SW User Manual e HR2 HR4 HR8 Motor User Manuals e Nanomotion Vacuum and Ultra High Vacuum Motors Bake out Procedure Nanomotion Ltd 9 FB Positioning Systems User Guide Preface 1 4 Safety Precautions AS waRNING Do not remove the cover of the motor or disassemble its connector High voltage hazard Before operating the stage ensure that the motors are grounded Y CAUTION Nanomotion Ltd Ensure that the stage is not subjected to mechanical shock Do not immerse the stage in any liquid or cleaning agent Use only a clean cloth to wipe the stage The HR motors are not user serviceable In case the motor had been remounted perform the conditioning procedure refer to motor user manual Follow the Quick Start instructions provided in this guide before operating the stage Motor operation must adhere to a specific duty cycle refer to motor user manual or refer to the EOP chapter further in this user guide 10 FB Positioning
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