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User Manual MP134E - Physik Instrumente

1. f necessary reduce the values of the parameters PIShift Steps per Second ID 0x1F000600 and PIShift Frequency ID 0x1F000400 on the drive electronics see documentation of the drive electronics gt When the E 871 controller is used When the PIShift Open Loop Driving Mode ID 0x1F000702 parameter has a value of O step mode and motions in open loop operation are initiated with the SMO command The step frequency depends directly from the control value commanded with SMO and is limited by the value of the Maximum Motor Output ID 0x9 parameter If necessary reduce the commanded control value and the value of the Maximum Motor Output parameter gt Reduce the operating time with a high operating frequency p 49 gt Stop the motion immediately if an electronics malfunction occurs NOTICE Operating voltage too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause damage to the Q 522 gt Only operate the Q 522 with controllers drivers and original accessories from PI gt Do not exceed the operating voltage range p 48 for which the Q 522 is specified gt Only operate the Q 522 when the operating voltage is properly connected see Pin Assignment p 56 NOTICE Reduced lifetime of the piezo actuator due to permanently high voltage The permanent application of a high static voltage to piezo actuators leads to a considerable reduction in t
2. Figure 2 Example of model with linear encoder Q 522 140 stage Cable exit for drive connection 1 Case of the linear encoder 2 Ruler of the linear encoder 3 Moving platform 4 Ceramic rail of the drive 5 Base body 6 Linear guiding 7 8 Cable exit for sensor connection 10 Version 1 0 0 MP134E Q 522 Miniature Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description Figure 3 Example Stage which is not suitable for operation in a vacuum equipped with sensor 1 Only with vacuum incompatible models with sensor ESD protective cap 2 Connection for drive and sensor with vacuum incompatible models Sub D 15 m connector with vacuum compatible models Sub D 15 f connector 3 With vacuum incompatible models with sensor Warning sign Electrostatic sensitive devices 4 Type plate p 12 5 Stage X Figure 4 Direction of motion of the Q 522 shown using the Q 522 100 left and Q 522 140 with linear encoder right for examples The arrow in the figure above shows the positive direction of motion Q 522 Miniature Stage MP134E Version 1 0 0 11 3 Product Description E l 3 3 Product Labeling Figure 5 Type plate of the Q 522 Position of the product labeling example view in Figure 6 Q 522 Position of the product labeling example view A 113064246 Serial number example individual for each Q 522 Meaning of the places counting from left 1 internal information 2 and 3
3. The heat produced during operation of the Q 522 can affect your application gt Install the Q 522 so that the application is not impaired by the dissipated heat gt Ensure sufficient ventilation at the place of installation gt Make sure that the complete bottom side of the Q 522 is in contact with the surface on which the Q 522 is mounted NOTICE Unintentional changes in position with vertical mounting If the load exceeds the self locking of the drive when the stage is mounted vertically unintentional changes in the position of the moving platform occur Unintentional changes in position of the moving platform can damage the drive the load or the environment gt When the stage is mounted vertically make sure that the installed load is lower than the self locking of the drive 20 Version 1 0 0 MP134E Q 522 Miniature Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation NOTICE Damage from unsuitable cables Unsuitable cables can damage the electronics gt Only use cables provided by PI for connecting the Q 522 to the electronics INFORMATION For the reproducibility of the positioning to be optimal all components must be affixed with zero backlash gt Make sure that stage and load are affixed with zero backlash INFORMATION When handling the vacuum version of the stage appropriate cleanliness must be ensured gt Only touch the stage with powder free gloves gt If necess
4. Q 522 Miniature Stage MP134E Version 1 0 0 55 10 Technical Data I 10 4 Pin Assignment 10 4 1 Q 522 xy0 Vacuum Incompatible 56 Connector Sub D 15 m The Sub D 15 m connector transmits the signals of the drive and for the models with sensor in addition the signals of the sensor and of the ID chip EAN HE CE CE e pme fan fm 8 Jess Jensen iO met Notorstral eee ma ICON HE CE CE The sign indicates that the corresponding pin has not been assigned Only with models with sensor The cable shield is connected to the connector shell Version 1 0 0 MP134E Q 522 Miniature Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 4 2 Q 522 xyU Vacuum Compatible Connector Sub D 15 f The Sub D 15 f connector transmits the signals of the drive and for the models with sensor in addition the signals of the sensor and of the ID chip 8 a Ol 0000000 al N ee j h d 19 9 Figure 20 Sub D 15 f connector CON ECC LO CN SH Je ea a fan fen Tom epo pooo EEE C CAMINOS COMINO CON The sign indicates that the corresponding pin has not been assigned Only with models with sensor The cable shield is connected to the connector shell Q 522 Miniature Stage MP134E Version 1 0 0 57 11 Old Equipment Disposal PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic
5. all parts are cleaned before assembly During assembly and measurement powder free gloves are worn Afterwards the stage is cleaned once again by wiping and shrink wrapped twice in vacuum compatible film gt Only touch the stage with powder free gloves gt f necessary wipe the stage clean after unpacking 6 Version 1 0 0 MP134E Q 522 Miniature Stage 3 Product Description PIEZO NANO POSITIONING WWW PI WS 3 Product Description In this Chapter Model Overview ccccecccccececcecceceeceeceeceeeececeeaeceecuesesaecuecueaeeaecueseeaeseesueseeaesueaeeaesneeneaees 7 PIOQUEL VIEW sans ea ren Transen ea tetanaaerean 10 Prode Label nee een E ee 12 SCODE Ol DEIN EV rca necia para 13 AECESSOMOS ee ee een 13 Suitable Electronics cnica 14 Technical Features iaa i n 15 3 1 Model Overview Classification of the Q 522 models Twelve standard versions of the Q 522 stage are available They differ in terms of the following features Travel range Dimensions Equipment with a linear encoder Suitability for operation in vacuum Vacuum suitability to 10 hPa Q 522 040 32 mm x 22 mm x 10 mm Yes Travel Linear encoder range present Q 522 Miniature Stage MP134E Version 1 0 0 7 3 Product Description E i Vacuum Travel Linear encoder aes range eseni suitability to j 10 hPa Detailed model names Order Product name number Q 522 000 Q Motion Miniature Linear Stage 6 5 mm Tr
6. manufacturing year 4 to 9 consecutive numbers Q 522 140 Product name example the places after the point refer to the model A Warning sign Observe manual 12 Version 1 0 0 MP134E Q 522 Miniature Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description u zu Description A www PIMICOS COM Manufacturer s address website Symbol for the protective earth conductor marks the protective earth connection of the Q 522 3 4 Scope of Delivery The Q 522 is delivered with the following components tem Gamponents O Q 522 Linear positioning stage as specified in the order p 7 Screw set for mounting the Q 522 consisting of LPS 22 5006 21 5 m6x 3 A2 dowel pins ISO 8734 2 M2x6 A2 socket head cap screws ISO 4762 MP134E Manual for Q 522 linear positioning stage Only with models without sensor which are not suitable for operation in a vacuum 7202500042 Adapter cable for connection to the E 870 drive electronics 0015 Sub D 15 f to Mini DIN 4 m 0 3 m Only with models with sensor which are not suitable for operation in a vacuum 7202500043 Y adapter cable for connection to the E 871 controller 0015 Sub D 15 f to HD Sub D 15 m and HD Sub D 15 f 0 3 m 3 5 Accessories gt f you need accessories e g vacuum feedthroughs contact the customer service department p 45 Q 522 Miniature Stage MP134E Version 1 0 0 13 3 Product Description E 3 6 Suitable Electronics El
7. p 39 INFORMATION If the parameters of the electronics are not adapted to the Q 522 and the application load orientation of the Q 522 the Q 522 will either not move or not move satisfactorily gt Only operate the Q 522 when the parameters of the electronics have been correctly set gt Pay particular attention to the parameter settings for operating voltage and operating frequency 36 Version 1 0 0 MP134E Q 522 Miniature Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation INFORMATION The PIShift drive develops noises in step mode The noise development depends on the current step frequency 6 2 1 Starting Up the Q 522 x0z with the E 870 Drive Electronics INFORMATION The values for the parameters of the E 870 drive electronics are listed in a table in this section p 38 For optimum drive performance the values of the following parameters should be identical PiIShift Steps per Second ID 0x1F000600 PIShift Frequency ID 0x1F000400 Prerequisites v You have read and understood the general notes on start up and operation p 33 v You have read and understood the documentation of the E 870 drive electronics E870T0001 Technical Note or E870T0002 Technical Note You have properly installed the stage p 19 The E 870 drive electronics has been properly installed and all connections on the E 870 have been set up see E870T0001 Technical Note or E870T0002 Technical Note Starti
8. Electronics cccccccccccccncnncccnnonononnnnnnnnnnnnnnnnnnnnnnnncnnns 29 5 1 General Notes on Installation Figure 7 Accessible when the moving platform is driven out Ceramic rail of the PIShift drive and for models with sensor ruler of the linear encoder example Q 522 140 NOTICE Damage from mechanical actions The ruler of the linear encoder is scratch sensitive and can be damaged by mechanical actions e g from pointed objects gt Treat the ruler with extreme care Q 522 Miniature Stage MP134E Version 1 0 0 19 5 Installation gt I NOTICE hr f Malfunction due to soiling Any type of soiling e g dust oil lubricant or condensation will render the Q 522 inoperable gt Keep the Q 522 free from dirt and condensation gt Avoid touching the ceramic rail of the drive and the ruler of the linear encoder NOTICE pi f Electrostatic hazard The Q 522 x40 models sensor present not suitable for use in a vacuum have a Sub D 15 m connector for connection to the electronics Touching the pins of the connector can damage electrostatic also ESD sensitive components of the Q 522 For this reason the Q 522 x40 models are equipped with an ESD protective cap on the connector at the time of delivery gt Remove the ESD protective cap from the connector only when you connect the Q 522 to the controller NOTICE y f Heating up of the Q 522 during operation
9. MP134E Version 1 0 0 33 6 Start Up and Operation E I NOTICE Overheating during continuous operation The highest velocity is achieved at maximum operating frequency however the Q 522 can overheat during continuous operation as a result gt Observe the recommended operating time according to the operating frequency in step mode p 49 gt Ensure sufficient ventilation at the place of installation NOTICE Damage from collisions Collisions can damage the stage the load to be moved and the environment gt Make sure that no collisions are possible between the stage the load to be moved and the environment in the motion range of the stage gt Do not place any objects in areas where they can get caught by moving parts gt Stop the motion immediately if an electronics malfunction occurs NOTICE f Operating frequency too high An operating frequency that is too high can cause damage to the Q 522 gt Only operate the Q 522 with controllers drivers and original accessories from PI gt Do not exceed the operating frequency range p 48 for which the Q 522 is specified 34 Version 1 0 0 MP134E Q 522 Miniature Stage 6 Start Up and Operation PIEZO NANO POSITIONING WWW PI WS NOTICE Considerable wear due to high operating frequency A high operating frequency in step mode can cause considerable wear on the mechanical system gt When the E 870 drive electronics is used
10. N Push Pull Force Dimensions 22 x 33 x 10 mm W x L x H Piezoelectric Inertia Drive Vacuum Compatible to 10 9 hPa 8 Version 1 0 0 MP134E Q 522 Miniature Stage 3 Product Description PIEZO NANO POSITIONING WWW PI WS Order Product name number Q 522 10U Q Motion Miniature Linear Stage 13 mm Travel Range without Position Sensor for Open Loop Operation 1 N Push Pull Force Dimensions 22 x 33 x 10 mm W x L x H Piezoelectric Inertia Drive Vacuum Compatible to 10 9 hPa Q 522 14U Q Motion Miniature Linear Stage 13 mm Travel Range Linear Encoder 1 nm Resolution 1 N Push Pull Force Dimensions 22 x 33 x 10 mm W x L x H Piezoelectric Inertia Drive Vacuum Compatible to 10 9 hPa Q 522 20U Q Motion Miniature Linear Stage 26 mm Travel Range without Position Sensor for Open Loop Operation 1 N Push Pull Force Dimensions 22 x 33 x 10 mm W x L x H Piezoelectric Inertia Drive Vacuum Compatible to 10 9 hPa Piezoelectric Inertia Drive Vacuum Compatible to 10 9 hPa Q 522 24U Q Motion Miniature Linear Stage 26 mm Travel Range Linear Encoder 1 nm Resolution 1 N Push Pull Force Dimensions 22 x 33 x 10 mm W x L x H Q 522 Miniature Stage MP134E Version 1 0 0 9 3 Product Description E l 3 2 Product View Figure 1 Example of model without linear encoder Q 522 100 stage 1 Moving platform 2 Ceramic rail of the drive 3 Base body 4 Linear guiding 5 Cable exit for drive connection
11. White arrows M1 6 threaded holes depth 2 5 mm Light gray arrows M2 threaded holes depth 2 6 mm Dark gray arrows M2 threaded holes depth 2 8 mm Q 522 Miniature Stage MP134E Version 1 0 0 27 5 Installation PI Prerequisites Y Y You have read and understood the general notes on installation p 19 You have properly mounted the stage on a surface p 21 or on a Q 522 p 24 The stage is disconnected from the electronics You have prepared the load so that it can be affixed to the moving platform for the required position and depth of the holes for accommodating the screws and locating pins see Dimensions p 50 The distance between the center of gravity of the load and the center of the moving platform is as small as possible in all directions Atleast four points are provided for affixing the load on the moving platform If you use locating pins for aligning the load You have made two locating holes of Y 1 5 mm H7 in the load for accommodating locating pins Tools and accessories Screws of suitable length p 50 Options M2 screws Only Q 522 0yz and Q 522 2yz M1 6 screws Suitable tools for fastening the screws Optional 2 locating pins of suitable length for locating holes with 1 5 mm H7 Affixing the load to the Q 522 la 2 3 28 Align the load on the Q 522 so that the mounting holes in the load and the holes in the moving platform overlap If you use
12. switching on the controller a reference point definition must be performed before absolute target positions can be commanded and reached 1 4 Figures For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 2 Version 1 0 0 MP134E Q 522 Miniature Stage PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 5 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals Description E 870 10 E 870 11 E 870 21 E 870 41 E870T0001 Technical Note Piezomotor PiezoMike Drive Electronics OEM Board 1 to 4 Channels E 870 1G E 870 2G E 870 4G Piezomotor E870T0002 Technical Note PiezoMike Drive Electronics Bench Top 1 to 4 Channels E 871 1A1 PIShift Controller 1 Channel PZ241E User Manual Linear Encoder PlMikroMove SM148E Software Manual 1 6 Downloading Manuals INFORMATION If a manual is missing or problems occur with downloading gt Contact our customer service department p 45 INFORMATION For some products e g Hexapod systems and electronics that are delivered with a CD access to the manuals is password protected The password is stored on the CD Availability of the manuals Password protected manuals FTP download directory Freely available man
13. the lower Q 522 using two M2 screws a Manually displace the moving platform of the upper Q 522 until one of the two counter sunk holes in the base body is accessible b Introduce the screw into the counter sunk hole c Tighten the screw with a maximum torque of 35 Necm d Make sure that the screw head does not protrude from the counter sunk hole e Repeat the steps a to d for the other counter sunk hole in the base body of the Q 522 4 Check that the upper Q 522 fits on the lower Q 522 without backlash 5 4 Affixing the Load to the Q 522 NOTICE Impermissibly high forces and torques Impermissibly high forces and torques that are applied to the moving platform can damage the Q 522 gt For affixing type and mass of the load observe the maximum permissible forces according to the specifications p 47 gt Avoid tilting torques at the moving platform NOTICE Screws that are too long The Q 522 can be damaged by screws that are too long gt Note the depth of the mounting holes in the moving platform p 50 gt Only use screws of the correct length for the respective mounting holes 26 Version 1 0 0 MP134E Q 522 Miniature Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 12 Q 522 20z The arrows identify the following mounting holes in the moving platform of the Q 522 For load alignment Black arrows Locating holes 1 5 mm H7 depth 2 mm For affixing the load
14. 0 BE ae 2202 Width SSS Drive Drive properties iaa A type De ME a SE inertia drive inertia drive inertia drive inertia drive Q 522 Miniature Stage MP134E Version 1 0 0 47 10 Technical Data gt I Preliminary Data Q 522 040 Q 522 140 Q 522 240 Q 522 x00 Q 522 04U Q 522 14U Q 522 24U Q 522 x0U Miscellaneous Operating temperature 0to 40 0 to 40 O to 40 O to 40 range Material Aluminum Aluminum Aluminum Aluminum BEE Cable length Connector Recommended controller Ask about custom designs The Q 522 stage series replaces the LPS 22 series 10 1 2 Maximum Ratings The Q 522 stage is designed for the following operating data Maximum Operating Maximum Operating Maximum Power Voltage Frequency Consumption 10 1 3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the Q 522 Area of application For indoor use only Maximum altitude 2000 m Air pressure Q 522 xy0 1100 hPa to 0 1 hPa Q 522 xyU 1100 hPa to 10 hPa 48 Version 1 0 0 MP134E Q 522 Miniature Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data Relative humidity Highest relative humidity 80 for temperatures up to 31 C non condensing Decreasing linearly to 50 relative humidity at 40 C non condensing Operating temperature 0 TC to 40 C Storage temperature 20 C to 70 C Transport temperature 20 C to 70 C Maximum bakeout tem
15. 134E Q 522 Miniature Stage PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 3 on our website Q 522 Miniature Stage MP134E Version 1 0 0 45 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 Technical Data In this Chapter Se 11 e PEC OC ampessaeaateaseanasa ene 47 CS AIA TIMO narnia bala EisieEs 49 DINGEN IONS essen ante re arca tea 50 FAAS PPP e O A A A 56 10 1 Specifications 10 1 1 Data Table Preliminary Data Q 522 040 Q 522 140 Q 522 240 Q 522 x00 Q 522 04U Q 522 14U Q 522 24U Q 522 x0U Motion and 6 5 mm travel range 13 mm travel range 26 mm travel range 6 5 mm to 26 mm positioning resolution 1 nm resolution 1 nm resolution 1 nm travel range UHV version UHV version UHV version open loop Q 522 04U Q 522 14U Q 522 24U UHV versions Q 522 x0U at O OO O OS AS Travel range range 26 65to26 5 to 26 Integrated sensor A encoder A encoder Linear encoder S Load capacity Load capacity Length 0
16. PI MP134E Q 522 Miniature Stage User Manual Version 1 0 0 Date 24 02 2015 This document describes the following products Q 522 xyz Q Motion Miniature Linear Stage Piezoelectric Inertia Drive x Travel range 0 6 5mm 1 13 mm 2 26 mm y Equipment with a sensor 0 without sensor 4 with sensor z Suitable for vacuum O suitable to 0 1 hPa U suitable to 10 hPa Physik Instrumente PI GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente Pl GmbH Co KG is the owner of the following trademarks PIO PICO PICMA PlLine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano 2015 Physik Instrumente Pl GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente Pl GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 24 02 2015 Document number MP134E KSch version 1 0 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About t
17. anual of the drive electronics v The drive electronics is switched off i e not connected to the power source Tools and accessories If the drive electronics has a Mini DIN 4 socket models E 870 x1 E 870 xG 7202500042 0015 adapter cable in the scope of delivery p 13 If the drive electronics has a connector strip model E 870 10 Suitable adapter from Sub D 15 f to the connector strip The pin assignment of the J10 connector strip 2x4 pin can be found in the E870T0001 Technical Note f you need a suitable adapter contact our customer service department p 45 Q 522 Miniature Stage MP134E Version 1 0 0 29 5 Installation I Connecting the Q 522 x00 to E 870 drive electronics with a Mini DIN 4 socket 1 Connect the Q 522 x00 with the adapter cable Connect the Sub D 15 m connector of the Q 522 with the connector of the adapter cable Sub D 15 f 2 Connect the adapter cable with the drive electronics a Connect the Mini DIN 4 connector of the adapter cable with the Mini DIN 4 socket of the drive electronics b Take suitable measures to prevent the adapter cable from being accidentally disconnected Connecting the Q 522 x00 to E 870 drive electronics with a connector strip gt Connect the Q 522 x00 to the connector strip of the drive electronics using a suitable adapter 5 5 2 Connecting the Q 522 to the Controller INFORMATION gt For information regarding the connect
18. ary wipe the stage clean INFORMATION The positive direction of motion of the axis is given in the product view p 10 5 2 Mounting the Q 522 on a Surface and Connecting It to a Protective Earth Conductor NOTICE Protruding screw heads Protruding screw heads can damage the Q 522 gt Ensure that the screw heads do not protrude from counter sunk holes so that they do not interfere with the stage motion Q 522 Miniature Stage MP134E Version 1 0 0 21 5 Installation gt I NOTICE Warping of the Q 522 due to mounting on uneven surfaces Mounting the Q 522 on an uneven surface can warp the Q 522 Warping reduces the accuracy gt Mount the Q 522 on an even surface The recommended evenness of the surface is lt 2 um gt For applications with great temperature changes Only mount the Q 522 on surfaces that have the same or similar thermal expansion properties as the Q 522 INFORMATION The contact of the Q 522 with the protective earth conductor is made as follows gt Two counter sunk holes in the base body of the Q 522 gt Suitable conductive screws p 13 gt Protective earth conductor connected to the surface on which the Q 522 is mounted INFORMATION gt Observe the applicable standards for mounting the protective earth conductor Figure 8 Example Q 522 04z left View from below right View from top 1 Two locating holes on the bottom side of the stage are used for alignment on a
19. avel Range without Position Sensor for Open Loop Operation 1 N Push Pull Force Dimensions 22 x 33 x 10 mm W x L x H Piezoelectric Inertia Drive Q 522 040 Q Motion Miniature Linear Stage 6 5 mm Travel Range Linear Encoder 1 nm Resolution 1 N Push Pull Force Dimensions 22 x 33 x 10 mm W x L x H Piezoelectric Inertia Drive Q 522 100 Q Motion Miniature Linear Stage 13 mm Travel Range without Position Sensor for Open Loop Operation 1 N Push Pull Force Dimensions 22 x 33 x 10 mm W x L x H Piezoelectric Inertia Drive Piezoelectric Inertia Drive Q 522 140 Q Motion Miniature Linear Stage 13 mm Travel Range Linear Encoder 1 nm Resolution 1 N Push Pull Force Dimensions 22 x 33 x 10 mm W x L x H Piezoelectric Inertia Drive Q 522 200 Q Motion Miniature Linear Stage 26 mm Travel Range without Position Sensor for Open Loop Operation 1 N Push Pull Force Dimensions 22 x 33 x 10 mm W x L x H Q 522 240 Q Motion Miniature Linear Stage 26 mm Travel Range Linear Encoder 1 nm Resolution 1 N Push Pull Force Dimensions 22 x 33 x 10 mm W x L x H Piezoelectric Inertia Drive Q 522 00U Q Motion Miniature Linear Stage 6 5 mm Travel Range without Position Sensor for Open Loop Operation 1 N Push Pull Force Dimensions 22 x 33 x 10 mm W x L x H Piezoelectric Inertia Drive Vacuum Compatible to 10 9 hPa Q 522 04U Q Motion Miniature Linear Stage 6 5 mm Travel Range Linear Encoder 1 nm Resolution 1
20. ccording to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the Q 522 working order gt Read the user manual Q 522 Miniature Stage MP134E Version 1 0 0 5 2 Safety P J gt Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the Q 522 2 3 Organizational Measures User manual gt Always keep this user manual available by the Q 522 The latest versions of the user manuals are available for download p 3 on our website gt Add all information given by the manufacturer to the user manual for example supplements or Technical Notes gt If you pass the Q 522 on to other users also turn over this user manual as well as other relevant information provided by the manufacturer gt Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage gt Only install and operate the Q 522 after having read and understood this user manual Personnel qualification The Q 522 may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel 2 4 Measures for Handling Vacuum Compatible Products When handling the vacuum version of the stage attention must be paid to appropriate cleanliness At PI
21. e Technical Data 194 SOCCINGA NO NS ansiado lia 10 1 1 Data TOE eea ito 10 1 2 MmU RAUS nennen 10 1 3 Ambient Conditions and Classifications ooncccccccooncnnnconoonnnnnnos 10 2 Operala TIMO toser cerro 103 DME OE Seren ee nee 10 3 1 O 22 OZ ein tdci 10 3 2 DS OFZ ARE A EEE as 10 3 3 OE AM A AEE RENNENS E T 10 3 4 A AVES OO Om A LEENEERE 10 3 5 6 572 221 POPE o OP CO PO A A LEENEERE 10 3 6 E ECAA Y E AA RO OOOO A E E 192 RNAS SONNEN ee E E E ET 10 4 1 Q 522 xy0 Vacuum Incompaltible ccccccnnnccccconnnooooccnnnnnnnnnnnnnnos 10 4 2 Q 522 xyU Vacuum Compatible cccccccccccccccnccococccnnnnononenononos Old Equipment Disposal EC Declaration of Conformity PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual ooooccccncccccooononnccnnnccnnnnnonnccnnnnnnnnnnnannnnnos 1 Symbols and Typographic CONVONtIONS ccccccccccccconnccnnnnccnonononccnnnnnnnonnnnnncnnnonononenanenonos 1 A E O O O O EN 2 A PR PEC PEC 0 E 2 Other Applicable DOCUMENTS cccccccncccnnccnnnnccccononnncnnnnnnnnnnnnnnnnnnnnononnnnnnnnnnnnnnnnnnnnnnennnennss 3 Downloading Manuals carter di 3 1 1 Goal and Target Audience of this User Manual This manual contains information on the intended use of the Q 522 It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicab
22. e self locking of the drive Parameters of the drive gt See the Functional impairment after system modification electronics incorrectly set problem in this table Operating voltage too low gt Provide an operating voltage of 48 V Unfavorable operating gt Adapt the operating frequency for the step mode for details frequency for step mode see Starting Up the Stage p 36 and manual of the electronics used Warped base body gt Mount the Q 522 on an even surface The recommended evenness of the surface is 2 um Unfavorable load mounting gt Observe the maximum torque when affixing the load p 26 gt Keep the distance between the center of gravity of the load and the center of the moving platform as small as possible in all directions Unsuitable ambient gt Only operate the Q 522 in a clean environment and within conditions the permissible ambient conditions p 48 Wear of the drive gt Replace the Q 522 and make sure that the operating parameters of the used electronics are adapted to the stage Q 522 Miniature Stage MP134E Version 1 0 0 43 8 Troubleshooting P I Drive is blocked gt Carefully release the blockage by manually moving the moving platform back and forth gt Contact our customer service department p 45 If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 45 44 Version 1 0 0 MP
23. ectronics 0000 Suitable for eg number Description Stage without Stage with sensor sensor Q 522 x00 Q 522 x40 Q 522 x0U Q 522 x4U E 870 10 PIShift Piezomotor PiezoMike Drive Electronics 1 Channel OEM Board E 870 11 PIShift Piezomotor PiezoMike Drive Electronics 1 Channel OEM Board with Connector Strip E 870 1G PIShift Piezomotor PiezoMike Drive Electronics 1 Channel Bench Top Device E 870 21 PIShift Piezomotor PiezoMike Drive Electronics 2 Channels OEM Board with Connector Strip E 870 2G PIShift Piezomotor PiezoMike Drive Electronics 2 Channels Bench Top Device E 870 41 PIShift Piezomotor PiezoMike Drive Electronics 4 Channels OEM Board with Connector Strip E 870 4G PIShift Piezomotor PiezoMike Drive Electronics 2 Channels Bench Top Device E 871 1A1 PIShift Controller 1 Channel Linear Encoder gt Toorder contact our customer service department p 45 14 Version 1 0 0 MP134E Q 522 Miniature Stage 3 Product Description PIEZO NANO POSITIONING WWW PI WS 3 7 Technical Features 3 7 1 Linear Encoder Sensor Some models of the Q 522 are equipped with an optical linear encoder For the encoder resolution refer to the table in the Specifications section p 47 Optical linear encoders measure the actual position directly direct metrology Therefore errors occurring in the drivetrain such as nonlinearity backlash or elastic deformation cannot influence the measur
24. ement of the position 3 7 2 Reference Point Switch The Q 522 models equipped with a sensor have an optical reference point switch The commands that use the reference signal are described in the user manual of the controller and or in the corresponding software manuals 3 7 3 ID Chip Q 522 models with sensor contain an ID chip in the connector The following data are stored as parameters on the ID chip Information on the stage Type serial number date of manufacture version of the hardware Settings for the sensor Interpolation rate corrections of hysteresis as well as of phase and offset gain values When switched on or rebooted controllers from Pl read the data from the ID chip For more information on the ID chip recognition see the manual of the controller used Q 522 Miniature Stage MP134E Version 1 0 0 15 4 Unpacking PIEZO NANO POSITIONING WWW PI WS 4 Unpacking NOTICE Electrostatic hazard The Q 522 x40 models sensor present not suitable for use in a vacuum have a Sub D 15 m connector for connection to the electronics Touching the pins of the connector can damage electrostatic also ESD sensitive components of the Q 522 For this reason the Q 522 x40 models are equipped with an ESD protective cap on the connector at the time of delivery gt Remove the ESD protective cap from the connector only when you connect the Q 522 to the controller INFORMATION When handling the vac
25. equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG ensures environmentally correct disposal of old Pl equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik Instrumente Pl GmbH Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany Q 522 Miniature Stage MP134E Version 1 0 0 59 12 EC Declaration of Conformity PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity For the Q 522 an EC Declaration of Conformity has been issued in accordance with the following European directives 2006 95 EC Low Voltage Directive 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Safety Low Voltage Directive EN 61010 1 2010 EMC EN 61326 1 2013 RoHS EN 50581 2012 laa Q 522 Miniature Stage MP134E Version 1 0 0 61
26. ge moves per ID 0x1F000600 second at the set operating frequency Version 1 0 0 MP134E Q 522 Miniature Stage 6 Start Up and Operation PIEZO NANO POSITIONING WWW PI WS 6 2 2 Starting Up the Q 522 x4z with the E 871 Controller INFORMATION If you use the software included in the scope of delivery of the E 871 controller the operating parameters can be loaded from the P MicosStages2 dat stage database The entries in the stage database are updated regularly gt Download the Pl Update Finder from the PI website http www update pi portal ws and use it to update the PlMicosStages2 dat stage database on your PC For further information see the user manual of the E 871 controller INFORMATION For optimum drive performance in step mode the Maximum Motor Output ID 0x9 parameter in the P MicosStages2 dat stage database takes a value of 15 kHz For further information see Operating Time p 49 and user manual of the E 871 controller Prerequisites v You have read and understood the general notes on start up and operation p 33 You have properly installed the stage p 19 You have read and understood the user manual of the controller You have read and understood the manual of the PC software XK SS SOS The controller and the required PC software have been installed All connections on the controller have been set up see user manual of the controller Starting up the Q 522 x4z with the E 871 c
27. gt For all stages in a multi axis system make sure that forces that act upon the moving platform in the respective direction of motion do not exceed the active push pull force of the drive p 47 INFORMATION Any model of the Q 522 can be used as lower or upper stage 24 Version 1 0 0 MP134E Q 522 Miniature Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 9 Example Affixing a Q 522 04z on a Q 522 04z Prerequisites v You have read and understood the general notes on installation p 19 v The stages are disconnected from the electronics v You have properly mounted the lower stage on a surface and connected it to a protective earth conductor p 21 v You have accounted for the space required for a cable routing free of kinks and in accordance with regulations Tools and accessories LP 22 5006 screw set from the scope of delivery of the Q 522 p 13 21 5 m6 x 3 dowel pins ISO 8734 2 M2x6 socket head cap screws ISO 4762 Suitable tools for fastening the screws Q 522 Miniature Stage MP134E Version 1 0 0 25 5 Installation gt I Setting up a multi axis system 1 Insert the two locating pins into the locating holes on the bottom side of the upper Q 522 or in the moving platform of the lower Q 522 see figures above 2 Place the upper Q 522 on the lower Q 522 so that the locating pins are inserted into the corresponding locating holes on the other side 3 Affix the upper Q 522 to
28. he lifetime of the piezo ceramic of the stage gt When the Q 522 is not used switch off the electronics Q 522 Miniature Stage MP134E Version 1 0 0 35 6 Start Up and Operation E I NOTICE Destruction of the piezo actuators by electric flashovers Using the Q 522 in environments that increase the electrical conductivity can lead to the destruction of the piezo actuators of the drive by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials e g metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the Q 522 in environments that can increase the electrical conductivity gt Only operate the Q 522 within the permissible ambient conditions and classifications p 48 gt For operation in vacuum below 0 1 hPa Do not operate the Q 522 during evacuation NOTICE Increased wear due to small working range Using a small working range permanently increases the wear in this region gt f possible Select another part of the travel range for the working range in regular intervals 6 2 Starting Up the Stage The presence of a sensor defines the electronics to be used to operate the Q 522 see also Suitable Electronics p 14 Models without sensor Q 522 x0z E 870 drive electronics p 37 Models with sensor Q 522 x4z E 871 controller
29. his Chapter General Notes on Start Up and Operation cccccccccccncccccocccnncocononnnnnononnnnnnnononncnnnnnnnos 33 Stanina Up TAGS 1A OG nenne e eo A 36 6 1 General Notes on Start Up and Operation A Risk of electric shock if the protective earth conductor is not connected If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the Q 522 in the case of malfunction or failure of the system If touch voltages exist touching the Q 522 can result in minor injuries from electric shock gt Connect the Q 522 to a protective earth conductor p 21 before start up gt Do not remove the protective earth conductor during operation gt If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the Q 522 to the protective earth conductor before Starting it up again Burning from hot surface The surface of the Q 522 and its vicinity can heat up during operation Touching the Q 522 and surrounding parts can result in minor injuries from burning gt Cool the Q 522 so that the temperature of its surface and surrounding parts does not exceed 65 C gt If sufficient cooling is not possible Make sure that the hot Q 522 and its Surrounding parts cannot be touched gt If sufficient cooling and protection against contact are not possible Mark the danger zone in accordance with the legal regulations Q 522 Miniature Stage
30. his Document 1 1 1 Goal and Target Audience of this User Manual ccccceseeceeeeessseeeeeeaeeeeeees 1 1 2 Symbols and Typographic CONVONtIONS oooocccncccncnccnnccnnonnconcnonnnnnononononnnnnononanenns 1 1 3 A aie Saute E E E E 2 1 4 FOUE O e a E E OSO O Ener 2 1 5 Other Applicable DOCUMENTS ccccccccccocnnccnnnncccnononncononononononannnnnnnnnonnnnnnnnnnnnnnnononans 3 1 6 Downloading Manuals ccccooncnccccnncnccconnncononcnnnnnncononnnnnnonnnncnnononcnnconannnnnnanennonanens 3 2 Safety 5 2 1 WETS A o O aa 5 2 2 General Safety Instructions cccccccooccnnnccnnnccnnononnncnnnnnonononannnnnnnnnonononnnennnononononano 5 2 3 Organizational Measures c oooonncnccccnonnconccononncnnnnnnnnncnnnnnnnnnnnnnnnnnnnnnnnnnnanrnnncnnnnanes 6 2 4 Measures for Handling Vacuum Compatible Products cooooonccccnccccnncccnnccnnnncnnss 6 3 Product Description 7 3 1 Model Overview cccccccccccsssceeceesceeceeeceeceseceeceuceesseeeeeessaeceessaeceeseeeeesaaeeeesaaaeees 7 3 2 PO CIICE AA ee ee ee ee 10 3 3 Product LADEN nee ee 12 3 4 Scope of Delivery una 13 3 5 ACCESSOMES marcaron tirarla 13 3 6 Suttable Electronics econo 14 3 7 Technical Features cccccccseececceeseecceesececceuseeecseeeecseuseeeseeueeessageeesssneeesssaeenenes 15 3 7 1 Linear Encoder Sensor ccccccccccseseeceeccaeeeeeeeeeeeeseeeesseaeeeeessaaaees 15 3 7 2 Reference Point Switch occccoccccococonnnccoconcncononcnnononcnnononnnonona
31. imensions Comma 4x M16 725 B B 1 85 Figure 14 Q 522 04z Q 522 Miniature Stage MP134E Version 1 0 0 51 10 Technical Data P I 10 3 3 Q 522 10z Dimensions in mm Signs that are used to separate decimal places Depth and diameter of holes Point All other dimensions Comma 2x O2 1 L_j 4 2 3 4 4x 615 F15 E 77 4 4x M2 72 5 B B Figure 15 Q 522 10z 52 Version 1 0 0 MP134E Q 522 Miniature Stage PIEZO NANO POSITIONING WWW PI WS 10 3 4 Q 522 14z Dimensions in mm Signs that are used to separate decimal places Depth and diameter of holes Point All other dimensions Comma A A I 22V E nero T Figure 16 Q 522 14z Q 522 Miniature Stage MP134E 10 Technical Data OO ATA Version 1 0 0 53 10 Technical Data Pp I 10 3 5 Q 522 20z Dimensions in mm Signs that are used to separate decimal places Depth and diameter of holes Point All other dimensions Comma 8x M2 72 6 4x 015 x2 3 4x M1 6 y2 5 SA AMI T m m 36 A O B B 1 95 Figure 17 Q 522 20z 54 Version 1 0 0 MP134E Q 522 Miniature Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 6 Q 522 242 Dimensions in mm Signs that are used to separate decimal places Depth and diameter of holes Point All other dimensions Comma A A rr A LOG RIO 8x M2 72 6 Ze 4x 01 5 213 B B 1 95 Figure 18 Q 522 24z
32. ing the stage Only when the stage is not used in vacuum gt When necessary clean the surfaces of the stage with a cloth that is lightly dampened with a mild cleanser or disinfectant Only when the stage is used in vacuum gt Only touch the stage with powder free gloves gt f necessary wipe the stage clean Q 522 Miniature Stage MP134E Version 1 0 0 41 PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting Drive electronics or E 870 drive electronics from PI Functional impairment after system modification No or limited motion controller has been gt Adapt the parameters of the drive electronics in the E 870 replaced Control PC program to the Q 522 see Starting Up the Q 522 x0z with the E 870 Drive Electronics p 37 and Technical Note E870T0001 or E870T0002 E 871 controller from Pl The stage has been replaced gt Load the parameter set corresponding to the Q 522 model from the stage database gt f necessary Set the parameters on the controller in the PIMikroMove PC program so that they correspond to the application load orientation of the Q 522 model see user manual of the controller The cable is not connected gt Check the connecting cable s correctly or is defective Excessive load gt Reduce the load Observe the information in the Technical Data section p 47 gt Ifthe stage is mounted vertically make sure that the installed load is lower than th
33. ion of a vacuum compatible Q 522 contact the customer service department p 45 Prerequisites v You have read and understood the general notes on installation v You have installed the E 871 controller p 14 v You have read and understood the user manual of the controller v The controller is switched off i e the power supply is not connected to the power socket via the power cord Tools and accessories Y adapter cable 7202500043 0015 in the scope of delivery p 13 30 Version 1 0 0 MP134E Q 522 Miniature Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Connect the Q 522 x40 to the E 871 controller 1 Q 522 Miniature Stage Connect the Q 522 x40 with the Y adapter cable a Remove the ESD protective cap from the Sub D 15 m connector of the Q 522 b Connect the Sub D 15 m connector of the Q 522 with the connector of the Y adapter cable Sub D 15 f Connect the Y adapter cable with the E 871 controller a Connect the HD Sub D 15 m connector for motor connection to the corresponding socket of the controller see user manual of the controller b Connect the HD Sub D 15 f connector for sensor connection to the panel plug of the controller see user manual of the controller Secure the connections with the integrated screws against accidental disconnection MP134E Version 1 0 0 31 6 Start Up and Operation PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation In t
34. le safety procedures The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual r i Dangerous situation If not avoided the dangerous situation will result in minor injury A gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation Q 522 Miniature Stage MP134E Version 1 0 0 1 1 About this Document gt I INFORMATION Information for easier handling tricks tips etc Symbol Label Meaning 1 Action consisting of several steps whose sequential 2 order must be observed gt Action consisting of one or several steps whose sequential order is irrelevant List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface Warning sign on the product which refers to detailed information in this manual 1 3 Definition Load capacity Maximum load capacity in the vertical direction when the stage is mounted horizontally The contact point of the load is in the center of the platform Linear encoder The linear encoder is an incremental sensor for capturing changes in position Signals from the sensor are used for axis position feedback After
35. locating pins to align the load a Insert the locating pins into the locating holes in the moving platform or the load b Place the load on the moving platform so that the locating pins are inserted into the corresponding locating holes on the other side Affix the load using the screws Maximum torque for M1 6 screws 17 Ncm Maximum torque for M2 screws 35 Ncm Check that the load fits on the moving platform of the stage without backlash Version 1 0 0 MP134E Q 522 Miniature Stage 5 Installation PIEZO NANO POSITIONING WWW PI WS 5 5 Connecting the Q 522 to the Electronics The presence of a sensor defines the electronics to be used to operate the Q 522 see also Suitable Electronics p 14 Models without sensor Q 522 x0z E 870 drive electronics p 29 Models with sensor Q 522 x4z E 871 controller p 30 INFORMATION The Q 522 and the electronics can be delivered as a pre configured system gt f a connection assignment is given on the labels of the Q 522 and or electronics observe this assignment when connecting the Q 522 5 5 1 Connecting the Q 522 to the Drive Electronics INFORMATION gt For information regarding the connection of a vacuum compatible Q 522 contact the customer service department p 45 Prerequisites v You have read and understood the general notes on installation v You have installed the E 870 drive electronics p 14 v You have read and understood the user m
36. nenoos 15 3 7 3 IG R E E E Po EEEENEUHRRR EESFERURENEREEE 15 4 Unpacking 17 5 Installation 19 5 1 General Notes on Installation ooccccccoconncnncconooncnnnnnnnancnnnnononnnnnonononncnnnnnnnns 19 5 2 Mounting the Q 522 on a Surface and Connecting It to a Protective Earth o gat hee ee ee ee eee EE EEEE 21 5 3 Setting Up a Multi Axis System occccoconcccncccnoncconccononnnnnnnononncnnnnononnnnnnnonnnncnnnnnnnns 24 5 4 Affixing the Load to the 9522 une au 26 5 5 Connecting the Q 522 to the ElectronicS ccccccnnnnccccccnnooocccnnnnnnnnnnnnnonnnnnnnnnnos 29 5 5 1 Connecting the Q 522 to the Drive Electronics ooooncccnnnnncoo 29 5 5 2 Connecting the Q 522 to the Controller ooocccccncccccooonnccnnnnnnnos 30 10 11 12 Start Up and Operation 6 1 General Notes on Start Up and Operation ccoooooonnncnnnnccnonnnnnnccnnnnnnnnnnanncnnnnnnnnos 6 2 Starting Up the Stage ooooccccccccoocconccononnconncononncnnnnonnnncnnnnnnnnnrnnnnononnrnnnnonnnnrnnennnnns 6 2 1 Starting Up the Q 522 x0z with the E 870 Drive Electronics 6 2 2 Starting Up the Q 522 x4z with the E 871 Controller Maintenance 7 1 General Notes on Maintenance ccccccoccccccccconnnnnnccconnnnnnononononnnnnnnnnnnnnnononnnnnnnnnons 7 2 Performing a Maintenance RUN cooccnnccnnccnncccncnnccnncnncononenononnnononnnnnnnonanennonancnncnnos 7 3 Cleaning the 22 ones Troubleshooting Customer Servic
37. ng pins a Introduce the two locating pins into the locating holes on the bottom side of the Q 522 see figure above or in the surface b Place the Q 522 on the surface so that the locating pins are inserted into the corresponding locating holes on the other side 2 Mount the Q 522 on the surface with two M2 screws a Manually displace the moving platform of the Q 522 until one of the two counter sunk holes in the base body is accessible Q 522 Miniature Stage MP134E Version 1 0 0 23 5 Installation gt I b Introduce the screw into the counter sunk hole c Tighten the screw with a maximum torque of 35 Nem d Make sure that the screw head does not protrude from the counter sunk hole e Repeat the steps a to d for the other counter sunk hole in the base body of the Q 522 3 Make sure that the contact resistance at all connection points relevant for mounting the protective earth conductor is lt 0 1 Q at 25 A 4 Check that the Q 522 fits on the surface without backlash 5 3 Setting Up a Multi Axis System The Q 522 can be used in XY systems NOTICE Impermissibly high load on the stages In an XY system the stage for the Y axis must be moved as well Impermissibly high loads interfere with the motion and can damage the stages gt Include the mass of the moved stage in the calculation of the load to be moved gt For all stages in a multi axis system Do not exceed the maximum permissible load
38. ng up the Q 522 x0z with the E 870 drive electronics 1 Make sure that the parameters of the E 870 drive electronics have been set correctly for values see table below p 38 2 Provide the control signal required for operating the system Details can be found in the E870T0001 or E870T0002 Technical Note 3 If necessary Adapt the PIShift Steps per Second parameter ID 0x1F000600 and the PIShift Frequency parameter ID 0x1F000400 to your application see also Operating Time p 49 Q 522 Miniature Stage MP134E Version 1 0 0 37 6 Start Up and Operation E I 38 The following table lists the settings for the parameters of the E 870 drive electronics Further information on the parameter settings is found in the Operating Time section p 49 Parameter Parameter in E 870 Drive Electronics in E 870 Drive Electronics Value E voltage AAA Upper Supply Voltage upper limit ID 0x1F000000 Operating voltage PIShift Lower Supply Voltage lower limit ID 0x1F000100 Charging current PIShift Forward Current 0 2 A during forward ID 0x1F000200 motion Charging current PIShift Backward Current 0 2 A during backward ID 0x1F000300 motion Operating frequency PIShift Frequency 20000 Hz in step mode ID 0x1F000400 Duty cycle of the PIShift Charge Cycle 1 current source during ID 0x1F000500 the output of one period of the modified sawtooth signal in step mode Number of steps the PIShift Steps per Second 20000 sta
39. nns 5 Organizational Measures ooooncccnnccccccconnncnnnnoconononnncnnnononononannnnnnnnnnnnnannrnnnnnnnnnnnnnnnnnnnnnns 6 Measures for Handling Vacuum Compatible Products cooccccccoccnnoconnnncccnnnnconanenoss 6 2 1 Intended Use The Q 522 is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants In accordance with its design and realization the Q 522 is intended for single axis positioning adjusting and shifting of loads at different velocities in interval operation The Q 522 uses a PIShift piezomotor as a drive When at rest the drive is self locking requires no current generates no heat and maintains its position The Q 522 can be mounted in any orientation The specifications of the Q 522 apply to horizontal mounting p 47 The Q 522 is not intended for applications in areas in which a failure would present severe risks to human beings or the environment For further information on the operating conditions of the Q 522 see Technical Data p 47 Some models of the Q 522 are equipped with a linear encoder for direct position measurement The intended use of the Q 522 is only possible when completely mounted and connected The Q 522 must be operated with suitable electronics p 14 The electronics is not included in the scope of delivery of the Q 522 2 2 General Safety Instructions The Q 522 is built a
40. ontroller 1 Start up the stage see E 871 user manual The start up comprises the following steps Selecting the stage type Defining the reference point of the axis Commanding first motions for testing Q 522 Miniature Stage MP134E Version 1 0 0 39 6 Start Up and Operation E I 2 If necessary Adapt the Maximum Motor Output ID 0x9 parameter to your application also refer to General Notes on Start Up and Operation p 33 and Operating Time p 49 The E 871 user manual describes the start up using the PIMikroMove program 40 Version 1 0 0 MP134E Q 522 Miniature Stage PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance cccccccccccssseseseceeeeeeeeeeeseeeeeeeeseaeeeeeeeeeessssaaeeeeeeees 41 Performing a Maintenance RUN ccccsssccccssseeeccesscecseeeeeccseueeecsauececseseeessageesssaeees 41 Cleaning the os recostado En ee Eee re 41 7 1 General Notes on Maintenance NOTICE Damage due to improper maintenance Improper maintenance can lead to misalignment and failure of the Q 522 gt Only loosen screws according to the instructions in this manual 7 2 Performing a Maintenance Run The maintenance run must cover the entire travel range gt Perform the maintenance run after every 10 million steps 7 3 Cleaning the Q 522 Prerequisites v You have disconnected the stage from the electronics Clean
41. perature Q 522 xyU for vacuum compatible products 120 C for 12 hours only in switched off state Overvoltage category in acc with EN 60664 1 2007 VDE 0110 1 Protection class acc to EN 61140 VDE 0140 1 Degree of pollution acc to EN 60664 1 2007 VDE 0110 1 Degree of protection acc to IEC 60529 10 2 Operating Time The operating time and the operating frequency in step mode affect the lifetime of the stage In order to prevent overheating and high wear the operating time with given operating frequency and 100 duty cycle should not exceed the values given in the following table Operating frequency in Hz Operating time 48 V 0 2 A 20000 10 s max 10000 20 s max 5000 60 s max lt 1000 120 s max For the relevant parameters see Starting Up the Stage p 36 and the user manual of the electronics used With 100 duty cycle without heat dissipation Q 522 Miniature Stage MP134E Version 1 0 0 49 10 Technical Data P I 10 3 Dimensions 10 3 1 Q 522 00z Dimensions in mm Signs that are used to separate decimal places Depth and diameter of holes Point All other dimensions Comma 4x M1 6 92 5 Figure 13 Q 522 00z 50 Version 1 0 0 MP134E Q 522 Miniature Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 2 Q 522 04z Dimensions in mm Signs that are used to separate decimal places Depth and diameter of holes Point All other d
42. surface 2 Two M2 screws are used to mount the stage on the surface 22 Version 1 0 0 MP134E Q 522 Miniature Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Prerequisites v You have read and understood the general notes on installation p 19 v The Q 522 is disconnected from the electronics v You have provided a suitable surface for the required position and depth of the holes for accommodating the screws and locating pins see Dimensions p 50 The surface must be connected to the protective earth conductor Two locating holes with 1 5 mm H7 and two M2 mounting holes are available in the surface The holes for accommodating the screws have to be sufficiently conductive to ensure the proper functioning of the protective earth conductor For applications with great temperature changes The surface should have the same thermal expansion properties as the Q 522 e g surface made of aluminum The evenness of the surface is lt 2 um v You have accounted for the space required for a cable routing free of kinks and in accordance with regulations Tools and accessories LPS22 5006 screw set from the scope of delivery of the Q 522 p 13 21 5m6 x 3 dowel pins ISO 8734 2 M2x6 socket head cap screws ISO 4762 Suitable tools for fastening the screws Mount the Q 522 on a surface and connect it to a protective earth conductor 1 Align the Q 522 on the surface using the locati
43. uals Pl website gt Follow the corresponding instructions for downloading Q 522 Miniature Stage MP134E Version 1 0 0 3 1 About this Document I Download freely accessible manuals 1 2 oi 4 Open the website http www pi portal ws Click Downloads Click the corresponding product category Go to the corresponding product code The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Download password protected manuals 1 2 3 Insert the product CD in the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the file name Find the user name and the password in the section User login for software download in the Release News Open the FTP download directory ftp pi ftp ws Windows operating systems Open the FTP download directory in Windows Explorer Log in with the user name and the password from the Release News In the directory of the corresponding product go to the Manuals sub directory Copy the desired manual to the hard disk of your PC or to a data storage medium Version 1 0 0 MP134E Q 522 Miniature Stage 2 Safety PIEZO NANO POSITIONING WWW PI WS 2 Safety In this Chapter apo IS cst ee ee A yq 5 General Safety Instructions cccccccccoconnnccnnnnononononnnenonononononanennnnnnnonnnannncnnnnnnnonenanenn
44. uum version of the stage attention must be paid to appropriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder free gloves are worn Afterwards the stage is cleaned once again by wiping and shrink wrapped twice in vacuum compatible film gt Only touch the stage with powder free gloves gt f necessary wipe the stage clean after unpacking 1 Unpack the Q 522 with care 2 If present do not remove the ESD protective cap from the connector of the Q 522 3 Compare the contents against the items covered by the contract and against the packing list 4 Inspect the contents for signs of damage If there is any sign of damage or missing parts contact Pl immediately 5 Keep all packaging materials and the ESD protective cap in case the product needs to be returned Q 522 Miniature Stage MP134E Version 1 0 0 17 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation oooccccnnncccnoconnncnnnnnonononannconnnnnonononnnennnnnnnnnnnanncnnns 19 Mounting the Q 522 on a Surface and Connecting It to a Protective Earth Conductor iaa teneceteca eseterecs 21 Setting Up a Multi Axis SySteM o ccoooconnnccnnocononononnccnnnononononanennnnnononnnnnnnennnnnnnnnnnnncnnns 24 Affixing the Load to the Q 522 ssssssesessseessssssssssesssssssssssesesseseeeseeeeesesseseeseeeess 26 Connecting the Q 522 to the

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