User Manual PZ234E - Physik Instrumente
Contents
1. nennen 14 3 2 2 PlHera Piezo XY Stade 16 3 2 3 PIMera Precision Z Stage iii iaia 18 3 3 A 19 3 4 Scope of Delivery i 20 3 5 TECHNICAL e etanol ed 21 3 5 1 Flexure Guides eee 21 3 5 2 Capacitive SENSOrs nenn 21 4 Unpacking 23 5 Installation 25 5 1 General Notes on Installation sese 25 5 2 Fastening the Stage and Load sese 28 5 3 Connecting the P 62x to a Protective Earth Conductor 32 6 Start up and Operation 37 6 1 General Notes on Start Up and Operation i 37 6 2 Operating the P402X cti ri aia i nia enidan 40 6 3 Discharging the P 62X SP qn 40 10 11 12 Maintenance 7 1 General Notes on Maintenance 7 2 Cleaning the P 62X nennen nennen nenn Troubleshooting Customer Service Technical Data 10 1 SSC INC ANON Ss arca dolo ona iii testes 10 1 1 Data Table i 10 1 2 Maximum Ratings i 10 1 3 Ambient Conditions and Classifications 10 2 PITA US HONS lc 103 RIPASSIGNMENI iii 10 4 Suitable Piezo Controllers cceceecececeeeecececeeeeaees Old Equipment Disposal EC Declaration of Conformity PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual esse eee eee eee 1 Symbols and Typographic CONveEntions ii 2 Other2. Figure 4 Long lever and center of load on the side of the moving platform Prerequisite v You have read and understood the General Notes on Installation p 25 Tools and accessories When mounting a P 621 1xx P 622 1xx P 625 1xx P 628 1xx or P 629 1xx Screws of appropriate size and length dimensions see p 53 Optionally Dowel pins of appropriate size and length dimensions see p 53 When mounting other P 62x models Supplied screws for mounting the stage on a surface Optionally Supplied dowel pins for aligning the stage or loads m Suitable tools 30 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 5 Installation Fastening the P 62x and load 1 Alignment optional Align the stage using the locating holes in the base body see p 53 and suitable dowel pins Align the load using the locating holes in the moving platform of the P 62x see p 53 and suitable dowel pins 2 Mounting Only mount the stage on the mounting holes intended for this purpose see p 53 If the stage is not equipped with a separate protective earth connection follow the instructions for connecting the protective earth conductor via the mounting holes p 32 when fastening the stage Only fasten loads to the threaded holes intended for this purpose see p 53 P 62x Positioning Systems PZ234E Version 1 0 1 31 5 Installation P J 5 3 Connec
3. INFORMATION If your system was calibrated by PI the piezo servo controller and the stage must not be exchanged or substituted gt Take note of the assignment indicated by the serial numbers on the calibration label on the piezo servo controller gt Ifthe piezo servo controller or the stage has to be replaced recalibrate the axis displacement see controller manual or contact our customer service department p 45 P 62x Positioning Systems PZ234E Version 1 0 1 39 6 Start up and Operation P J INFORMATION Sound and oscillations e g loud talking impacts can interfere with the functioning of the P 62x gt Avoid sound and oscillations during the operation of the stage INFORMATION The expansion of the piezo actuators depends on the ambient temperature and can vary by up to 20 in the given temperature ranges 6 2 Operating the P 62x gt Follow the instructions in the manual of the used piezo controller for start up and operation of the P 62x 6 3 Discharging the P 62x The P 62x must be discharged before demounting Demounting is necessary e g before cleaning or transporting the P 62x as well as for modifications Discharging takes place via the internal discharge resistor of the PI controller Discharging a P 62x that is connected to the controller 1 When you operate the P 62x in closed loop operation switch the servo mode off on the controller open loop operation 2 Set the piezo voltage to 0 V
4. The mounting holes are each marked with the symbol for the protective earth conductor c Tighten the four M2 screws each with at least three rotations and a torque of 0 15 Nm to 0 2 Nm P 62x Positioning Systems PZ234E Version 1 0 1 35 PIEZO NANO POSITIONING WWW PI WS 6 Start up and Operation 6 Start up and Operation In this Chapter General Notes on Start Up and Operation i 37 Operating the E e e E UnA 40 DISCHArgiRg Ne P 62Xriiniireierilian iii iii sandeces 40 6 1 General Notes on Start Up and Operation Risk of electric shock if the protective earth conductor is not connected If a protective earth conductor is not or not properly connected dangerous touch voltages can occur and there is a risk of electric shock In the case of malfunction or failure of the system touching the P 62x can result in minor injuries gt Connect the P 62x to a protective earth conductor p 32 before start up gt Do not remove the protective earth conductor during operation gt lf the protective earth conductor has to be temporarily removed e g for modifications reconnect the P 62x to the protective earth conductor before Starting it up again P 62x Positioning Systems PZ234E Version 1 0 1 37 6 Start up and Operation P I Dangerous voltage and residual charge on piezo actuators A The P 62x is driven by piezo actuators Temperature changes and compressive stresses can induce charge
5. which is equipped with an internal discharge resistor gt Do not pull out the connector from the electronics during operation For stages with Sub D connector Touching the contacts in the connector can lead to an electric shock max 130 V DC and minor injuries gt Do not touch the contacts in the connector gt Secure the connector of the stage with screws against being pulled out of the controller Operating voltages that are too high or incorrectly connected can cause damage to the P 62x gt Only operate the P 62x with controllers drivers and original accessories from Pl gt Do not exceed the operating voltage range p 51 for which the P 62x is specified gt Only operate the P 62x when the operating voltage is properly connected see Pin Assignment p 57 10 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 2 Safety In the case of P 62x stages with Sub D connectors ground loops can occur when the stage is grounded via the protective earth connection or the mounting holes and additionally by the shield of the connection cable for the electronics gt Ifa ground loop occurs contact our customer service department p 45 Oscillations can cause irreparable damage to the stage Oscillations are indicated by a humming and can result from the following causes The load and or dynamics of operation differ too much from the calibration settings The stage
6. 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 5 Installation The connection of the P 62x to the protective earth conductor depends on the model Models with separate protective earth connection all except for P 620 Models without separate protective earth connection only P 620 Separate protective earth connection present If a separate protective earth connection is present it must be used Figure 5 Protective earth connection No separate protective earth connection present If no separate protective earth connection is present all mounting holes marked with the symbol for the protective earth conductor must be used in order to ensure the proper connection of the protective earth conductor Figure 6 Mounting hole with symbol for the protective earth conductor Tools and accessories Suitable protective earth conductor Cross sectional area of the cable gt 0 75 mm Suitable screwdriver All models except for P 620 Supplied M4 CE screw set for connecting the protective earth conductor P 62x Positioning Systems PZ234E Version 1 0 1 33 5 Installation P I When mounting a P 620 Supplied dowel pins for aligning the stage on a surface Supplied M2x12 screws and safety washers for mounting the stage on a surface Suitable surface The surface on which the P 620 is to be mounted must be connected to a suitable protective earth conductor The contact surfaces w
7. 10 hPa P 62x Positioning Systems PZ234E Version 1 0 1 17 3 Product Description P J 3 2 3 PlHera Precision Z Stage A PR AAA P 620 ZCD Precise PlHera Vertical Nanopositioning Stage 50 um Capacitive Sensor Sub D Connector P 620 ZCL Precise PlHera Vertical Nanopositioning Stage 50 um Capacitive Sensor LEMO Connector P 620 Z0L Precise PIHera Vertical Nanopositioning Stage 65 um Open Loop LEMO Connector P 620 ZUD PlHera Vertical Nanopositioning Stage 50 um Direct Metrology Capacitive Sensor Vacuum Compatible to 10 hPa P 621 ZCD Precise PlHera Vertical Nanopositioning Stage 100 um Capacitive Sensor Sub D Connector P 621 ZCL Precise PlHera Vertical Nanopositioning Stage 100 um Capacitive Sensor LEMO Connector P 621 ZOL Precise PlHera Vertical Nanopositioning Stage 140 um Open Loop LEMO Connector P 621 ZUD Precise PlHera Vertical Nanopositioning Stage 100 um Direct Metrology Capacitive Sensor Sub D Connector Vacuum Compatible to 10 hPa P 622 ZCD Precise PlHera Vertical Nanopositioning Stage 250 um Capacitive Sensor Sub D Connector P 622 ZCL Precise PlHera Vertical Nanopositioning Stage 250 um Capacitive Sensor LEMO Connector P 622 Z0L Precise PlHera Vertical Nanopositioning Stage 400 um Open Loop LEMO Connector P 622 ZUD Precise PlHera Vertical Nanopositioning Stage 250 um Direct Metrology Capacitive Sensor Sub D Connector Vacuum Compatible to 10 hPa 18 Version 1 0 1 PZ23
8. 62x is intended for fine positioning as well as the fast and precise movement of small objects The specifications of the P 62x apply to horizontal mounting Depending on the model the motion is performed as follows in one axis horizontally or vertically in two axes horizontally Vertical mounting is only possible under certain conditions The intended use of the P 62x is only possible in combination with suitable electronics p 59 that is available from PI The electronics is not included in the scope of delivery of the P 62x The electronics must provide the required operating voltages To ensure proper performance of the servo control system the electronics must be able to read out and process the signals from the capacitive sensors P 62x Positioning Systems PZ234E Version 1 0 1 5 2 Safety P I 2 2 General Safety Instructions The P 62x is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the P 62x gt Only use the P 62x for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the P 62x 2 2 1 Organizational Measures User manual gt Always keep this user manual next to the P 62x If the user manual is lost or damaged conta
9. Hz uF UA Hz x um PI Tolerance min 20 0 typ typ typ typ typ 20 20 20 max max max 20 20 5 10 mm Versions without a sensor are available under the P 62x ZOL order numbers operating temperature range 20 to 150 C Vacuum compatible versions to 10 hPa are available under the P 62x ZUD order numbers 50 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 2 Maximum Ratings P 62x stages are designed for the following operating parameters Maximum Maximum operating Maximum power operating voltage frequency unloaded consumption P 621 2xx 6 W inX and Y P 622 2xx 7 W in X and Y i P 62x Positioning Systems PZ234E Version 1 0 1 51 10 Technical Data P I 10 1 3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the P 62x Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0 1 hPa corresponds to roughly 825 torr to 0 75 torr Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C Operating temperature 20 C to 80 C For versions without sensor P 62x xOL 20 to 150 C Storage temperature 20 C to 80 C Transport temperature 25 C to 85 C Overvoltage category Protection class Degree of pollutio
10. P 885 Ls 1 9 20 to 80 Aluminum 40 x 40 x 25 0 295 1 5 P 622 2CD P 625 2CD P 622 2CL P 625 2CL X Y X Y Capacitive Capacitive 300 600 250 500 0 4 0 5 0 7 1 4 0 02 0 03 2 5 3 ES 0 2 0 1 225 135 300 195 180 120 215 150 160 105 175 125 10 8 10 8 10 10 10 10 PICMA PICMA P 885 P 885 3 1 6 2 1 9 1 6 20 to 80 20 to 80 Aluminum Aluminum 50 x 50 x 60 x 60 x 25 25 0 348 0 43 1 5 1 5 CD versions Sub D special CL versions LEMO P 628 2CD P 628 2CL X Y Capacitive 950 800 0 5 3 5 0 03 10 20 5 0 05 79 105 60 89 99 79 10 8 10 10 PICMA P 887 19 3 20 to 80 Aluminum 80 x 80 x 25 0 7 1 5 P 629 2CD P 629 2CL X Y Capacitive 1800 1500 2 3 5 0 03 14 30 15 0 1 60 100 99 89 50 80 10 8 10 10 PICMA P 888 52 4 3 20 to 80 Aluminum 100 x 100 x 40 1 37 1 5 10 Technical Data Unit um nm nm nm urad N um Hz Hz Hz Hz Hz Hz uF uA Hz x um C mm Tolerance min 20 0 typ typ typ typ 20 20 20 20 20 20 20 max max max 20 20 5 10 mm Versions without a sensor are available under the P 62x 20L order numbers operating temperature range 20 to 150 C Vacuum compatible versions to 10 hPa are available under the P 62x 2UD order numbers The resolution of Pl piezo nanopositioners is not limited
11. WS 3 Product Description 3 5 Technical Features 3 5 1 Flexure Guides The P 62x has flexure guides for frictionless motion and high guiding accuracies A flexure guide is an element which is free from static and sliding friction It is based on the elastic deformation bending of a solid e g steel and does not have any rolling or sliding parts Flexure elements have a high stiffness and load capacity and are very insensitive to shocks and vibrations Flexure guides are maintenance and wear free They are 100 vacuum compatible function in a wide temperature range and do not require any lubricants 3 5 2 Capacitive Sensors Except for the models P 62x x0L all P 62x are equipped with capacitive sensors Capacitive sensors measure the position directly on the moving platform direct metrology and work without contact Neither friction nor hysteresis interferes with the measurement which allows excellent linearity values to be achieved in combination with the high position resolution Capacitive sensors achieve the best resolution stability and bandwidth P 62x Positioning Systems PZ234E Version 1 0 1 21 PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacking INFORMATION When handling the vacuum version of the stage attention must be paid to appropriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder free gloves are worn Afterwards the stage is cleaned on
12. is operated near its resonant frequency If you notice oscillations gt If oscillations occur during closed loop operation switch the servo mode off immediately gt If oscillations occur during open loop operation stop the stage immediately The P 62x achieves its positioning accuracy as a result of the optimized coordination of mechanical components and piezo actuators Disassembly of the P 62x will cause the specified accuracies to be lost gt Do not open the P 62x The use of the P 62x in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials such as metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the P 62x in environments that can increase the electric conductivity gt Only operate the P 62x within the permissible ambient conditions and classifications see p 52 gt For operation in vacuum below 0 1 hPa Do not operate the P 62x during evacuation P 62x Positioning Systems PZ234E Version 1 0 1 11 2 Safety P I The constant application of high voltage to piezo actuators can lead to leakage currents and flashovers that destroy the ceramic If the P 62x is not used but the controller is to remain switched on to ensure temperature stabi
13. on the controller Discharging a P 62x that is not connected to the controller gt Connect the stage to the switched off Pl controller 40 Version 1 0 1 PZ234E P 62x Positioning Systems WWW PI WS 7 Maintenance PIEZO NANO POSITIONING 7 Maintenance In this Chapter General Notes on Maintenance ii 41 NS MING WAS o q A 41 7 1 General Notes on Maintenance NOTICE Misalignment from loosening screws The P 62x is maintenance free and precisely aligned gt Do not loosen any sealed screws on the P 62x 7 2 Cleaning the P 62x Prerequisites v You have discharged the piezo actuators of the P 62x see p 40 v You have disconnected the P 62x from the controller Cleaning the P 62x gt Clean the surface of the P 62x with a towel that is lightly dampened with a mild cleanser or disinfectant with alcohol or with isopropanol gt Donotdo any ultrasonic cleaning P 62x Positioning Systems PZ234E Version 1 0 1 41 PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting No or limited motion The cable is not gt Check the cable connections connected correctly Excessive load gt Do not exceed the compressive tensile stress Capacity according to the specifications p 48 The load was gt After changing the load to be changed moved perform a zero point adjustment see controller manual Reduced accuracy Warped base body Mount the P 62x on an even
14. surface The recommended evenness of the surface is 20 um Mount the P 62x on a surface that has the same or similar thermal expansion properties as the P 62x e g aluminum surface P 62x or controller When using analog controllers or has been replaced stages without an ID chip a recalibration is necessary after changing the P 62x or the controller gt Perform a recalibration of the axis displacement see controller manual or contact our customer service department p 45 Axes have been When connecting the stage with mixed up during the controller observe the connection assignment of the axes This assignment is indicated by labels on the devices P 62x Positioning Systems PZ234E Version 1 0 1 43 8 Troubleshooting P I The stage starts Servo control gt Immediately switch off the servo oscillating or is parameters set mode of the affected stage axes positioned incorrectly Check the settings of the servo inaccurately control parameters on the controller Operation with Do not operate the stage in open resonant frequency loop operation with resonant frequency The load was Adjust the parameters on the changed controller according to the load change If the problem that occurred with your system is not listed in the table above or it cannot be solved as described contact our customer service department p 45 44 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING W
15. to a protective earth conductor see p 32 before start up Do not remove the protective earth conductor during operation Use electrically conductive materials e g screws and flat washers for mounting the protective earth conductor Make sure that the contact resistance is lt 0 1 ohm at 25 A at all connection points relevant for mounting the protective earth conductor If the protective earth conductor has to be temporarily removed e g for modifications reconnect the P 62x to the protective earth conductor before Starting it up again P 62x Positioning Systems PZ234E Version 1 0 1 7 2 Safety P I The P 62x is driven by piezo actuators Temperature changes and compressive stresses can induce charges in piezo actuators After being disconnected from the electronics piezo actuators can also stay charged for several hours Touching or short circuiting the contacts in the connector of the P 62x can lead to minor injuries In addition the piezo actuators can be destroyed by an abrupt contraction gt Do not open the P 62x gt Discharge the piezo actuators of the stage before installation Connect the stage to the switched off PI controller which is equipped with an internal discharge resistor gt Do not pull out the connector from the electronics during operation For stages with Sub D connector Touching the contacts in the connector can lead to an electric shock max 130 V DC and minor injuries gt Do not touch
16. 2007011652B4 US patent no 7 449 077 Japanese patent no 4667863 Chinese patent no ZL03813218 4 2014 Physik Instrumente Pl GmbH amp Co KG Karlsruhe Deutschland The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 15 07 2014 Document number PZ234E CBo Version 1 0 1 Subject to change without notice This manual is superseded by any new release The latest release is available for download on our website http www pi ws PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual sse eee 1 1 2 Symbols and Typographic CONventions nenn 2 1 3 Other Applicable DOCUMENTS nennen 3 2 Safety 5 2 1 mMiended A nt 5 2 2 General Safety Instructions ii 6 2 2 1 Organizational NICASUNCS urinaria 6 2 2 2 Measures for Handling Vacuum Compatible Products 7 2 2 3 Safety Measures during Installation Rennen 7 2 2 4 Measures during Start Up and Operation nn 10 3 Product Description 13 3 1 Features and ApplicatioNs iii 13 3 2 POS NO N ee enter 14 3 2 1 PlHera Piezo Linear Stage
17. 4E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 3 Product View The illustration serves as an example and can differ from your stage model gt Observe the symbols on your device 2 3 4 Figure 1 Example of product view 1 2 3 4 P 62x Positioning Systems PZ234E Version 1 0 1 19 Moving platform Base body Protective earth connection Connection cable to the electronics 3 Product Description P I 3 4 Scope of Delivery Order Number Mems Modi O Stage according to order p 14 a 000036450 M4 protective earth screw set consisting of All models 1 M4x8 flat head screw with cross recess XCept for ISO 7045 P 620 2 safety washers o 2 flat washers 000036451 M2 protective earth screw set consisting of 4 M2x12 hex head cap screws ISO 4762 4 safety washers 4 dowel pins 1 m6 x 4 ISO 8734 1 Allen wrench 2491 Screw set consisting of 8 M3x10 hex head cap screws DIN 7984 4 dowel pins 1 5 m6 x 4 ISO 8734 1 Allen wrench 000017112 screw set consisting of P 629 2xx 4M4x16 hex head cap screws ISO 7984 4 dowel pins 1 5 m6 x 4 ISO 8734 1 Allen wrench 000011857 screw set consisting of 4 M3x10 hex head cap screws DIN 7984 4 dowel pins 1 5 m6 x 4 ISO 8734 1 Allen wrench PZ240EK Short instructions for piezo positioning All models systems 20 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI
18. 500 um Direct Metrology Capacitive Sensors Sub D Connector P 625 2CL Precise PlHera XY Nanopositioning System 500 x 500 um Direct Metrology Capacitive Sensors LEMO Connector P 625 20L Precise PlHera XY Nanopositioning System 600 x 600 um Open Loop LEMO Connector 16 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 3 Product Description fc NONO BBB TEA P 625 2UD Precise PlHera XY Nanopositioning System 500 x 500 um Direct Metrology Capacitive Sensors Sub D Connector Vacuum Compatible to 10 hPa P 628 2CD Precise PlHera XY Nanopositioning System 800 x 800 um Direct Metrology Capacitive Sensors Sub D Connector P 628 2CL Precise PlHera XY Nanopositioning System 800 x 800 um Direct Metrology Capacitive Sensors LEMO Connector P 628 20L Precise PlHera XY Nanopositioning System 1000 x 1000 um Open Loop LEMO Connector P 629 2CD PlHera XY Piezo Nanopositioning Stage 1500 x 1500 um Capacitive Sensors Sub D Connector P 629 2CL PlHera XY Piezo Nanopositioning Stage 1500 x 1500 um Capacitive Sensors LEMO Connector P 629 20L Precise PlHera XY Nanopositioning System 1800 x 1800 um Open Loop LEMO Connector P 629 2UD PlHera XY Piezo Nanopositioning Stage 1500 x 1500 um Capacitive Sensors Sub D Connector Vacuum Compatible to 10 hPa P 628 2UD Precise PlHera XY Nanopositioning System 800 x 800 um Direct Metrology Capacitive Sensors Sub D Connector Vacuum Compatible to
19. Applicable DOCUMENES i 3 1 1 Goal and Target Audience of this User Manual This user manual contains the necessary information for the intended use of the P 62x x stands for the travel range details can be found in the Model Overview p 14 lt assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures For updated releases of this user manual or if you have any questions contact our customer service department p 45 P 62x Positioning Systems PZ234E Version 1 0 1 1 1 About this Document P I 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual T Dangerous situation If not avoided the dangerous situation will result in minor injury A gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation INFORMATION Information for easier handling tricks tips etc Symbol Meaning 1 Action consisting of several steps whose sequential 2 order must be observed gt Action consisting of one or several steps whose sequential order is irrelevant n List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface Warning sign on th
20. ITIONING WWW PI WS 3 Product Description A P 625 1CL Precise PlHera Linear Nanopositioning System 500 um Direct Metrology Capacitive Sensor LEMO Connector P 625 10L Precise PlHera Linear Nanopositioning System 600 um Open Loop LEMO Connector P 625 1UD Precise PlHera Linear Nanopositioning System 500 um Direct Metrology Capacitive Sensor Sub D Connector Vacuum Compatible to 10 hPa P 628 1CD Precise PlHera Linear Nanopositioning System 800 um Direct Metrology Capacitive Sensor Sub D Connector P 628 1CL Precise PlHera Linear Nanopositioning System 800 um Direct Metrology Capacitive Sensor LEMO Connector P 628 10L Precise PlHera Linear Nanopositioning System 950 um Open Loop LEMO Connector P 628 1UD Precise PlHera Linear Nanopositioning System 800 um Direct Metrology Capacitive Sensor Sub D Connector Vacuum Compatible to 10 hPa P 629 1CD PlHera Linear Piezo Nanopositioning Stage 1500 um Capacitive Sensor Sub D Connector P 629 1CL PlHera Linear Piezo Nanopositioning Stage 1500 um Capacitive Sensor LEMO Connector P 629 10L Precise PlHera Linear Nanopositioning System 1800 um Open Loop LEMO Connector P 629 1UD PlHera Linear Piezo Nanopositioning Stage 1500 um Capacitive Sensor Sub D Connector Vacuum Compatible to 10 hPa P 62x Positioning Systems PZ234E Version 1 0 1 15 3 Product Description P J 3 2 2 PlHera Piezo XY Stage ee Lee eee P 620 2CD Precise PlHera XY Nanoposi
21. PI PZ234E P 62x Positioning Systems User Manual Version 1 0 1 Date 15 07 2014 This document describes the following products P 620 P 621 P 622 P 625 P 628 P 629 PlHera piezo linear stage P 620 1CD 1CL 10L 1UD P 621 1CD 1CL 10L 1UD P 622 1CD 1CL 10L 1UD P 625 1CD 1CL 10L 1UD P 628 1CD 1CL 10L 1UD P 629 1CD 1CL 10L 1UD P 620 P 621 P 622 P 625 P 628 P 629 PlHera piezo XY stage P 620 2CD 2CL 20L 2UD P 621 2CD 2CL 20L 2UD P 622 2CD 2CL 20L 2UD P 625 2CD 2CL 20L 2UD P 628 2CD 2CL 20L 2UD P 629 2CD 2CL 20L 2UD P 620 P 621 P 622 PlHera precision Z stage P 620 ZCD ZCL Z0L ZUD P 621 ZCD ZCL Z0L ZUD P 622 ZCD ZCL Z0L ZUD 1CD 2CD ZCD 1UD 2UD ZUD with Sub D connector ACL 2CL ZCL 10L 20L Z0L with LEMO connector Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany _ Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente PI GmbH amp Co KG is the owner of the following trademarks PIO PICO PICMA PILine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano The products described in this document are in part protected by the following patents German patent no 10021919C2 German patent no 10234787C1 German patent no 10348836B3 German patent no 102005015405B3 German patent no 10
22. WW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the relevant user manuals for your system are available for download on our website http www pi ws P 62x Positioning Systems PZ234E Version 1 0 1 45 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 Technical Data In this Chapter DDS CHIC A OMS RR 48 RI SIO NG siano 53 NIE AS SION ricaricare ira 57 Suitable Piezo Controllers nennen nennen nennen nennen nennen nennen 59 P 62x Positioning Systems PZ234E Version 1 0 1 47 10 Technical Data P I 10 1 Specifications 10 1 1 Data Table P 620 1CD P 621 1CD P 622 1CD P 625 1CD P 628 1CD P 629 1CD Unit Tolerance P 620 1CL P 621 1CL P 622 1CL P 625 1CL P 628 1CL P 629 1CL Active axes X X X X X X Motion and positioning Integrated sensor Capacitive Capacitive Capacitive Capacitive Capacitive Capacitive Open loop travel 60 120 300 600 950 1800 um min 20 to 120 V 20 0 Closed loop travel 50 100 250 500 800 1500 um Closed loop open 0 2 0 1 0 4 0 2 0 7 0 4 1 4 0 5 1 8 0 5 3 2 nm typ l
23. a oo 15 er ro Joe fror e ve 5 e2 as o 56 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 Pin Assignment 7W2 Sub D mix connector Figure 12 Sub D mix connector Front side with connections Figure 13 Sub D mix connector Top view LEN ema O ci WE Probe sensor signal moving part of the capacitive sensor GND PZT Ground of piezo voltage Fee Target Target sensor signal non moving part of the capacitive sensor P 62x Positioning Systems PZ234E Version 1 0 1 57 10 Technical Data P I LEMO coaxial connectors Figure 14 LEMO coaxial connectors Connector Signal Function Connector shell shell S Probe sensor AA moving part et shield of the capacitive sensor Target Target sensor signal non moving Cable shield part of the capacitive sensor PZT PZT Piezo voltage Ground of piezo voltage on cable shield 58 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 4 Suitable Piezo Controllers To operate a P 62x you need a piezo controller The device is selected depending on the type of application The table below lists suitable controllers Controller Channels FATES OS xCL E 610 Piezo Driver 1 Controller OEM module E 625 Piezo Servo Controller bench top E 665 Piezo Driver Servo 1 Controller bench top E 609 OEM Piezo Controller E 709 Digita
24. by friction or stiction Value given as noise with E 710 digital controller With digital controller With analog controllers 0 05 With digital controller With analog controllers 0 07 P 62x Positioning Systems PZ234E Version 1 0 1 49 10 Technical Data Active axes Motion and positioning Integrated sensor Open loop travel 20 to 120 V Closed loop travel Open loop resolution Closed loop resolution Linearity error Repeatability Tilting Ox Oy Mechanical properties Stiffness Unloaded resonant frequency Resonant frequency 30 g Push pull force capacity Load capacity Lateral force Drive properties Ceramic type Electrical capacitance Dynamic operating current coefficient Miscellaneous Operating temperature range Material Dimensions Mass Cable length Sensor voltage connection P 620 ZCD P 620 ZCL Z Capacitive 690 10 5 10 10 PICMA P 883 0 7 1 8 20 to 80 Aluminum 30 x 30 x 15 0 12 1 5 P 621 ZCD P 621 ZCL Z Capacitive 140 100 0 2 0 3 0 02 1 lt 20 0 6 790 500 10 8 10 10 PICMA P 885 3 3 8 20 to 80 Aluminum 40 x 40 x 17 5 0 17 1 5 CD versions Sub D special CL versions LEMO P 622 ZCD P 622 ZCL Z Capacitive 400 250 0 5 4 0 02 1 lt 80 0 24 360 270 10 8 10 10 PICMA P 885 6 2 3 1 20 to 80 Aluminum 50 x 50 x 17 5 0 24 1 5 Unit um nm nm nm urad N um
25. ce again by wiping and shrink wrapped twice in vacuum compatible film gt Only touch the stage with powder free gloves gt f necessary wipe the stage clean after unpacking 1 Unpack the P 62x with care 2 Compare the contents against the items covered by the contract and against the packing list 3 Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately 4 Keep all packaging materials in case the product needs to be returned P 62x Positioning Systems PZ234E Version 1 0 1 23 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation i 25 Fastening the Stage and Load ii 28 Connecting the P 62x to a Protective Earth Conductor een 32 5 1 General Notes on Installation Dangerous voltage and residual charge on piezo actuators The P 62x is driven by piezo actuators Temperature changes and compressive stresses can induce charges in piezo actuators After being disconnected from the electronics piezo actuators can also stay charged for several hours Touching or short circuiting the contacts in the connector of the P 62x can lead to minor injuries In addition the piezo actuators can be destroyed by an abrupt contraction gt Do not open the P 62x gt Discharge the piezo actuators of the stage before insta
26. ct our customer service department p 45 gt Add all information given by the manufacturer to the user manual for example supplements or Technical Notes gt Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can lead to minor injury as well as property damage gt Only install and operate the P 62x after having read and understood this user manual Personnel qualification The P 62x may only be started up operated maintained and cleaned by authorized and qualified staff 6 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 2 2 Measures for Handling Vacuum Compatible Products When handling the vacuum version of the stage attention must be paid to appropriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder free gloves are worn Afterwards the stage is cleaned once again by wiping and shrink wrapped twice in vacuum compatible film gt Only touch the stage with powder free gloves gt If necessary wipe the stage clean after unpacking 2 2 3 Safety Measures during Installation If a protective earth conductor is not or not properly connected dangerous touch voltages can occur and there is a risk of electric shock In the case of malfunction or failure of the system touching the P 62x can result in minor injuries gt gt gt Connect the P 62x
27. e body Warping of the base body will reduce accuracy gt Mount the P 62x on a flat surface The recommended flatness for the surface is 20 um gt For applications with great temperature changes Only mount the P 62x on surfaces that have the same or similar thermal expansion properties as the P 62x e g surfaces made of aluminum NOTICE si f Tensile stress on piezo actuator with vertical mounting When the stage is mounted vertically a tensile stress can result in particular alignments that destroys the piezo actuator gt If you want to mount the P 62x vertically contact our customer service department p 45 28 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 5 Installation INFORMATION In order to facilitate mounting with screws you can fix the P 62x or loads using dowel pins The P 62x has two holes each on the bottom side of the base body and on the moving platform to accommodate dowel pins INFORMATION The positive direction of motion is away from the cable exit side Correct Figure 2 Centrally mounted load and center of load in the area of the moving platform Incorrect Mounting the load incorrectly causes high strain on the flexure guides in the stage high torques and the danger of oscillations Figure 3 High set up and center of load far above the moving platform P 62x Positioning Systems PZ234E Version 1 0 1 29 5 Installation P I
28. e product which refers to detailed information in this manual The information marked with this warning sign must be observed 2 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 3 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals For the latest versions of the user manuals contact our customer service department p 45 E 610 00 Piezo Driver E 625 CR Piezo Servo Controller E 665 CR Piezo Servo Controller E 609 OEM Piezo Controller E 709 Digital Piezo Controller E 753 Digital Piezo Controller E 712 Digital Multi Channel Piezo Controller PZ195E User Manual E 725 Digital Multi Channel Piezo Controller PZ197E User Manual E 761 Digital Multi Channel Piezo Controller PZ164E User Manual PCI Card PIMikroMove SM148E Software Manual NanoCapture SM71E Software Manual P 5xx P 6xx P 7xx Piezo Positioning PZ240EK Short Instructions Systems P 62x Positioning Systems PZ234E Version 1 0 1 3 PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter apo ee USG AA o yn 5 General Safety Instructions ii 6 2 1 Intended Use The P 62x is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants Based on its design and realization the P
29. hysik Instrumente PI GmbH amp Co KG Manufacturer s Auf der Roemerstra e 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name PIHera Piezo Stage Model Numbers P 620 P 621 P 622 P 625 P 628 P 629 Product Options all complies with the following European directives 2006 95 EC Low Voltage Directive LWD 2004 108 EC EMC Directive The applied standards certifying the conformity arg listed below Electromagnetic Emission EN 61000 6 3 2007 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 Safety Low Voltage Directive EN 61010 1 2001 July 21 2011 Karlsruhe Germany Physik Instrumente PI GmbH amp Co KG Auf der Roemerstra e 1 76228 Karlsruhe Germany PIEZO WAND POSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www piws AAA INTER _ r gt pmrrro mm_u P 62x Positioning Systems PZ234E Version 1 0 1 63
30. ics 26 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 5 Installation NOTICE Damage due to incorrectly tightened screws Incorrectly tightened screws can cause damage If the torque is too low screws and parts can become loose and endanger the application If the torque is too high parts e g screws threaded holes can be damaged gt Observe the torque range given for the used screws during installation Torque for stainless steel screws A2 70 Screw sie Min torque TN M1 6 0 06 Nm 0 12 Nm INFORMATION Extended cables can affect the performance of the P 62x gt Do not use cable extensions If you need longer cables contact our customer service department p 45 P 62x Positioning Systems PZ234E Version 1 0 1 27 5 Installation P I 5 2 Fastening the Stage and Load NOTICE 4 Protruding screw heads Protruding screw heads can damage the P 62x gt Ensure that the screws are completely fastened and that the screw heads do not protrude from the counter sunk holes so that they do not interfere with the stage motion NOTICE di f Screws that are too long The P 62x can be damaged by screws that are too long gt Note the depth of the mounting holes in the moving platform p 53 gt Only use screws of the correct length for the respective mounting holes NOTICE i gt Warping of the base body Incorrect mounting can warp the bas
31. ith the stage generally the holes for accommodating the mounting screws must be sufficiently conductive Connecting the protective earth conductor to the separate protective earth connection all models except for P 620 Figure 7 Recommended mounting of the protective earth conductor profile view 1 Case of the P 62x 2 Flat washer 3 Safety washer 4 Screw 5 Cable lug 6 Protective earth conductor 1 If necessary fasten a suitable cable lug to the protective earth conductor 2 Fasten the cable lug of the protective earth conductor to the M4 screw on the protective earth connection of the P 62x as shown in the profile view 3 Tighten the M4 screw with at least three rotations and a torque of 1 2 Nm to 1 5 Nm 34 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 5 Installation Connecting the protective earth conductor via the mounting holes only P 620 Figure 8 Stage on a surface that must be connected to a protective earth conductor for mounting holes see arrows 1 Optionally Align the stage using the locating holes in the base body see p 53 and the supplied dowel pins 2 Mount the stage on an electrically conductive surface that is connected to a suitable protective earth conductor a Place a safety washer on each M2x12 screw b Insert a screw together with its respective safety washer into each of the four mounting holes see white arrows in the illustration
32. l Piezo Controller E 753 Digital Piezo Controller bench top E 712 Digital Piezo Controller modular system E 725 Digital Piezo Controller bench top E 761 Digital Piezo Controller PC card 1 One controller is required for each axis 2 E 710 3DO adapter cable required must be ordered separately P 62x Positioning Systems PZ234E Version 1 0 1 59 PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal Since 13 August 2005 in accordance with the EU directive 2002 96 EC WEEE electrical and electronic equipment can no longer be disposed of in the member states of the EU with other wastes When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG ensures environmentally correct disposal of old Pl equipment that was first put into circulation after 13 August 2005 free of charge If you have old Pl equipment you can send it postage free to the following address Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany P 62x Positioning Systems PZ234E Version 1 0 1 61 PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity 12 EC Declaration of Conformity PI Declaration of Conformity according to DIN EN ISOVIEC 17050 1 2005 Manufacturer P
33. lity In closed loop operation 1 Switch the servo mode off on the controller open loop operation 2 Setthe piezo voltage to 0 V on the controller In open loop operation gt Bet Ihe piezo voltage to 0 V on the controller 12 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Features and Applications i 13 Moder OVErVIEW esse ee ee Den ee ee ee Enten 14 FOGG VE Ware au ana ara 19 MOODS Ol SCV GY seen eo ee re ee 20 Technical Features unsre din 21 3 1 Features and Applications P 62x PlHera stages use PICMA piezo actuators that allow a compact design and low profile PlHera stages offer long travel ranges with a subnanometer resolution They are equipped with a particularly stiff and frictionless system of flexure guides that allow a high guiding accuracy The stages can be combined into compact XYZ systems P 62x ZCD and P 62x ZCL stages are available for the vertical axis Vacuum compatible versions of the P 62x are available on request P 62x Positioning Systems PZ234E Version 1 0 1 13 3 Product Description P I 3 2 Model Overview The following standard versions of the P 62x are available 3 2 1 PlHera Piezo Linear Stage E PAE I P 620 1CD Precise PIHera Linear Nanopositioning System 50 um Direct Metrology Capacitive Sensor Sub D Connector P 620 1CL Precise PIHera Li
34. llation Connect the stage to the switched off PI controller which is equipped with an internal discharge resistor gt Do not pull out the connector from the electronics during operation For stages with Sub D connector Touching the contacts in the connector can lead to an electric shock max 130 V DC and minor injuries gt Do not touch the contacts in the connector gt Secure the connector of the stage with screws against being pulled out of the controller P 62x Positioning Systems PZ234E Version 1 0 1 25 5 Installation P I NOTICE Destruction of the piezo actuator by electric flashovers The use of the P 62x in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials such as metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the P 62x in environments that can increase the electric conductivity gt Only operate the P 62x within the permissible ambient conditions and classifications see p 52 gt For operation in vacuum below 0 1 hPa Do not operate the P 62x during evacuation NOTICE Unsuitable cables KA Unsuitable cables can damage the electronics gt Only use cables from PI for connecting the P 62x to the electron
35. n Degree of protection according to IEC 60529 52 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 2 Dimensions Dimensions in mm Note that the decimal places are separated by a comma in the drawings Standard tolerance according to DIN ISO 2768 f H Roughness Ra 1 6 a pr I LH FM L J 0 01 oc OA Figure 9 P 62x 1CD 1CL 10L 1UD There is no separate protective earth connection on the P 620 P 62x Positioning Systems PZ234E Version 1 0 1 53 10 Technical Data TRE PIET TO E 0 z Pas oje feo fo er foz oes fee fee a Pe Pe reala T 70 foe at 65 Jus T 6 100 225 oo 00 so eo Joe Jue 92 Term Je Ja a Js Jer jou oje fe es o 2 ea ee perma 151 es wes ss e Je fe fez Pezza 151 es mes fs ss 5 je je oz Peas vo 151 es mes fe ss 5 8 9 az Pza po 151 es mes fs ss 5 Je je oz Paso aor 9s mes 10 75 je Jas PI 54 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 10 Technical Data Figure 10 P 62x 2CD 2CL 20L 2UD D There is no separate protective earth connection on the P 620 EN O JA PT AS ER A A 2 PO E Led A O A A a apne ASE P 62x Positioning Systems PZ234E Version 1 0 1 55 10 Technical Data P I Figure 11 P 62x ZCD ZCL ZOL D There is no separate protective earth connection on the P 620 ppe CIC CACA e poz
36. nd the loads on the P 62x using the mounting fixtures holes intended for this purpose Incorrectly tightened screws can cause damage If the torque is too low screws and parts can become loose and endanger the application If the torque is too high parts e g screws threaded holes can be damaged gt Observe the torque range given for the used screws during installation see p 27 P 62x Positioning Systems PZ234E Version 1 0 1 9 2 Safety P I 2 2 4 Measures during Start Up and Operation gt Donot start up the P 62x until it is fully mounted and connected If a protective earth conductor is not or not properly connected dangerous touch voltages can occur and there is a risk of electric shock In the case of malfunction or failure of the system touching the P 62x can result in minor injuries gt Only operate the P 62x when a protective earth conductor see p 32 is connected The P 62x is driven by piezo actuators Temperature changes and compressive stresses can induce charges in piezo actuators After being disconnected from the electronics piezo actuators can also stay charged for several hours Touching or short circuiting the contacts in the connector of the P 62x can lead to minor injuries In addition the piezo actuators can be destroyed by an abrupt contraction gt Do not open the P 62x gt Discharge the piezo actuators of the stage before installation Connect the stage to the switched off PI controller
37. near Nanopositioning System 50 um Direct Metrology Capacitive Sensor LEMO Connector P 620 10L Precise PlHera Linear Nanopositioning System 60 um Open Loop LEMO Connector P 620 1UD Precise PlHera Linear Nanopositioning System 50 um Direct Metrology Capacitive Sensor Sub D Connector Vacuum Compatible to 10 hPa P 621 1CD Precise PlHera Linear Nanopositioning System 100 um Direct Metrology Capacitive Sensor Sub D Connector P 621 1CL Precise PIHera Linear Nanopositioning System 100 um Direct Metrology Capacitive Sensor LEMO Connector P 621 10L Precise PIHera Linear Nanopositioning System 120 um Open Loop LEMO Connector P 621 1UD Precise PlHera Linear Nanopositioning System 100 um Direct Metrology Capacitive Sensor Sub D Connector Vacuum Compatible to 10 hPa P 622 1CD Precise PIHera Linear Nanopositioning System 250 um Direct Metrology Capacitive Sensor Sub D Connector P 622 1CL Precise PlHera Linear Nanopositioning System 250 um Direct Metrology Capacitive Sensor LEMO Connector P 622 10L Precise PIHera Linear Nanopositioning System 300 um Open Loop LEMO Connector P 622 1UD Precise PIHera Linear Nanopositioning System 250 um Direct Metrology Capacitive Sensor Sub D Connector Vacuum Compatible to 10 hPa P 625 1CD Precise PlHera Linear Nanopositioning System 500 um Direct Metrology Capacitive Sensor Sub D Connector 14 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POS
38. oop resolution Linearity error 0 02 0 02 0 02 0 03 0 03 0 03 typ closed loop Repeatability 1 1 1 5 10 14 nm typ Pitch yaw 3 3 3 6 6 30 10 urad typ Mechanical properties Stiffness in motion 0 42 0 35 0 2 0 1 0 12 0 13 N um 20 direction Unloaded resonant 1100 800 400 215 125 125 Hz 20 frequency Resonant frequency 550 520 340 180 115 120 Hz 20 O 20g Resonant frequency 260 240 185 110 90 110 Hz 20 120g Push pull force 10 10 10 10 10 10 N max capacity in motion direction Load capacity 10 10 10 10 10 10 N max Lateral force 10 10 10 10 10 8 N max Drive properties Piezoceramics PICMA PICMA PICMA PICMA PICMA PICMA P 883 P 885 P 885 P 885 P 887 P 888 Electrical capacitance 0 35 109 3 1 6 2 19 52 UF 20 Dynamic operating 0 9 1 9 1 9 1 6 3 4 3 HA 20 current coefficient Hz x um Miscellaneous Operating 20 to 80 20 to 80 20 to 80 20 to 80 20 to 80 20 to 80 C temperature range Material Aluminum Aluminum Aluminum Aluminum Aluminum Aluminum Dimensions 30 x 30 x 40 x 40 50 x 50 x 60 x 60 x 80 x 80 x 100 x 100 mm 12 x15 15 15 17 x 22 5 Mass 0 11 0 16 0 2 0 24 0 38 0 72 kg 5 Cable length 1 5 1 5 15 1 5 1 5 15 m 10 mm Sensor voltage CD versions Sub D special connection CL versions LEMO Versions without a sensor are available under the P 62x 10L order numbers operating temperature range 20 to 150 C Vacuum compatible versions to 10 hPa are available under the P 62x 1UD order n
39. perate the P 62x within the permissible ambient conditions and classifications see p 52 For operation in vacuum below 0 1 hPa Do not operate the P 62x during evacuation 38 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 6 Start up and Operation NOTICE Destruction of the piezo actuator by continuously high voltage The constant application of high voltage to piezo actuators can lead to leakage currents and flashovers that destroy the ceramic If the P 62x is not used but the controller is to remain switched on to ensure temperature stability In closed loop operation 1 Switch the servo mode off on the controller open loop operation 2 Set the piezo voltage to 0 V on the controller In open loop operation gt Set the piezo voltage to 0 V on the controller NOTICE Uncontrolled oscillation ap Oscillations can cause irreparable damage to the stage Oscillations are indicated by a humming and can result from the following causes The load and or dynamics of operation differ too much from the calibration settings The stage is operated near its resonant frequency If you notice oscillations gt f oscillations occur during closed loop operation switch the servo mode off immediately gt If oscillations occur during open loop operation stop the stage immediately INFORMATION The positive direction of motion is away from the cable exit side
40. s in piezo actuators After being disconnected from the electronics piezo actuators can also stay charged for several hours Touching or short circuiting the contacts in the connector of the P 62x can lead to minor injuries In addition the piezo actuators can be destroyed by an abrupt contraction gt gt gt gt gt Do not open the P 62x Discharge the piezo actuators of the stage before installation Connect the stage to the switched off Pl controller which is equipped with an internal discharge resistor Do not pull out the connector from the electronics during operation For stages with Sub D connector Touching the contacts in the connector can lead to an electric shock max 130 V DC and minor injuries Do not touch the contacts in the connector Secure the connector of the stage with screws against being pulled out of the controller NOTICE Destruction of the piezo actuator by electric flashovers The use of the P 62x in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials such as metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt gt Avoid operating the P 62x in environments that can increase the electric conductivity Only o
41. the contacts in the connector gt Secure the connector of the stage with screws against being pulled out of the controller Unsuitable cables can damage the electronics gt Only use cables from PI for connecting the P 62x to the electronics Mechanical forces can damage or misalign the P 62x gt Avoid impacts that affect the P 62x gt Do not drop the P 62x gt Do not exceed the maximum permissible compressive tensile stress gt If you want to mount the P 62x vertically contact our customer service department p 45 8 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO POSITIONING WWW PI WS 2 Safety Incorrect mounting can warp the base body Warping of the base body will reduce accuracy gt Mount the P 62x on a flat surface The recommended flatness for the surface is 20 um gt For applications with great temperature changes Only mount the P 62x on surfaces that have the same or similar thermal expansion properties as the P 62x e g surfaces made of aluminum The P 62x can be damaged by screws that are too long and parts that are wrongly mounted gt When mounting the P 62x on a surface make sure that the mounting screws do not interfere with the motion of the stage The screw heads must not protrude from the counter sunk holes Note the depth of the mounting holes in the moving platform Only use screws of the correct length for the respective mounting holes Only mount the P 62x a
42. ting the P 62x to a Protective Earth Conductor A Risk of electric shock if the protective earth conductor is not connected If a protective earth conductor is not or not properly connected dangerous touch voltages can occur and there is a risk of electric shock In the case of malfunction or failure of the system touching the P 62x can result in minor injuries gt Connect the P 62x to a protective earth conductor before start up gt Do not remove the protective earth conductor during operation gt Use electrically conductive materials e g screws and flat washers for mounting the protective earth conductor gt Make sure that the contact resistance is lt 0 1 ohm at 25 A at all connection points relevant for mounting the protective earth conductor gt lf the protective earth conductor has to be temporarily removed e g for modifications reconnect the P 62x to the protective earth conductor before Starting it up again NOTICE Ground loops with double connection of protective earth conductor In the case of P 62x stages with Sub D connectors ground loops can occur when the stage is grounded via its protective earth connection or the mounting holes as well as by the shield of the connection cable for the electronics gt lf aground loop occurs contact our customer service department p 45 INFORMATION gt Observe the applicable standards for mounting the protective earth conductor 32 Version 1 0
43. tioning System 50 x 50 um Direct Metrology Capacitive Sensors Sub D Connector P 620 2CL Precise PlHera XY Nanopositioning System 50 x 50 um Direct Metrology Capacitive Sensors LEMO Connector P 620 20L Precise PlHera XY Nanopositioning System 60 x 60 um Open Loop LEMO Connector P 620 2UD Precise PlHera XY Nanopositioning System 50 x 50 um Direct Metrology Capacitive Sensors Sub D Connector Vacuum Compatible to 10 hPa P 621 2CD Precise PlHera XY Nanopositioning System 100 x 100 um Direct Metrology Capacitive Sensors Sub D Connector P 621 2CL Precise PlHera XY Nanopositioning System 100 x 100 um Direct Metrology Capacitive Sensors LEMO Connector P 621 20L Precise PlHera XY Nanopositioning System 120 x 120 um Open Loop LEMO Connector P 621 2UD Precise PlHera XY Nanopositioning System 100 x 100 um Direct Metrology Capacitive Sensors Sub D Connector Vacuum Compatible to 10 hPa P 622 2CD Precise PlHera XY Nanopositioning System 250 x 250 um Direct Metrology Capacitive Sensors Sub D Connector P 622 2CL Precise PlHera XY Nanopositioning System 250 x 250 um Direct Metrology Capacitive Sensors LEMO Connector P 622 20L Precise PlHera XY Nanopositioning System 300 x 300 um Open Loop LEMO Connector P 622 2UD Precise PlHera XY Nanopositioning System 250 x 250 um Direct Metrology Capacitive Sensors Sub D Connector Vacuum Compatible to 10 hPa P 625 2CD Precise PlHera XY Nanopositioning System 500 x
44. umbers The resolution of Pl piezo nanopositioners is not limited by friction or stiction Value given as noise with E 710 digital controller With digital controller With analog controllers 0 05 With digital controller With analog controllers 0 07 48 Version 1 0 1 PZ234E P 62x Positioning Systems PIEZO NANO Active axes Motion and positioning Integrated sensor Open loop travel X Y 20 to 120 V Closed loop travel X Y Open loop resolution Closed loop resolution X Y Linearity error X Y Repeatability X Y Pitch yaw Mechanical properties Stiffness X Y Unloaded resonant frequency X Unloaded resonant frequency Y Resonant frequency X 509 Resonant frequency Y 50g Resonant frequency X 100g Resonant frequency Y 100g Push pull force capacity in motion direction Load capacity Lateral force Drive properties Piezoceramics Electrical capacitance in X Y Dynamic operating current coefficient in X Y Miscellaneous Operating temperature range Material Dimensions Mass Cable length Sensor voltage connection POSITIONING P 620 2CD P 620 2CL X Y Capacitive 60 50 0 1 0 2 0 02 2 3 0 22 979 800 270 395 285 300 10 5 10 10 PICMAO P 883 0 35 0 9 20 to 80 Aluminum 30 x 30 x 21 5 0 195 1 5 WWW PI WS P 621 2CD P 621 2CL X Y Capacitive 120 100 0 2 0 4 0 02 2 3 0 25 420 939 285 369 220 285 10 8 10 10 PICMAO
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