Home

Specifications

1. Tilt angle 020 0 20 0 20 0 20 Optical pass ratio 50 50 100 0 or 50 50 100 0 or 100 0 or 0 100 100 0 or 0 100 0 100 0 100 Protective filter Built in laser beam filter Built in laser beam filter Tube lens 1X 1X 2X zoom 1X 1X Applicable laser 1064 532 355nm 532 266nm Camera mount C mount using optional adapter B Use a laser with TV port C mount receptacle with green filter switch Illumination Reflective illumination for bright field Koehler illumination with aperture diaphragm system optional 12V 100W fiber optics non stepped adjustment light guide length 1 5m power consumption 150W Objective optional M Plan Apo M Plan Apo SL G Plan Apo for observation Objective optional M LCD Plan NIR M Plan UV for laser cutting M LCD Plan NUV ve Loading 14 5kg 13 6kg 14 1kg 13 2kg 14 2kg 13 5kg 13 9kg 13 1kg Refer to the Microscope Units leaflet E4191 Mass main unit 6 1kg 7 1kg 6 6kg 7 5kg 6 4kg 7 2kg 6 7kg 7 5kg for more details Loading on optical tube excluding weight of objective lenses and eyepieces es Mitutoyo VMU SERIES 378 Video Microscope Unit The VMU is a compact lightweight and easy to install microscope unit for CCD camera monitoring in semiconductor fabrication facilities SPECIFICATIONS 1X Maginification of tube Applicable wave
2. TM 500 SERIES 176 Toolmaker s Microscopes The Mitutoyo TM Series is a toolmaker s microscope well suited for measuring dimensions and angles of workpiece features It can also be used to check the shape of screws and gears by attaching an optional reticle The compact body makes it ideal for use on shop tloors with limited space for measuring instruments FEATURES e Angle measurement is performed easily by turning the angle scale to align the cross hair reticle with the workpiece image llumination intensity can be adjusted TM 505 Technical Data Observation image Optical tube Angle reading Eyepiece Objective Total magnification Erect image Monocular diopter adjustable Depression angle 30 Reticle 90 broken cross hair 176 126 Range 360 Minimum reading 6 by vernier 15X 176 116 View field dia 13mm Optional 10X 20X 2X 176 138 Working distance 67mm Optional 5X 10X 30X Transmitted illumination e Light source e Functions Surface illumination e Light source e Functions Power supply Mass Tungsten bulb 24V 2W With green filter Light intensity adjustable Tungsten bulb 24V 2W Light intensity adjustable 100 110 120 220 240V AC 50 60Hz 13 59 14 5kg TM 510 Angle reading Refer to the TM 505 510 leaflet E4158 for more details Optional Accessories 176 115 176 116 176 117 176 139 176 137 164 161 164 16
3. 176 110 176 140 176 141 176 142 176 143 176 144 176 123 176 124 176 125 176 120 176 121 176 122 176 127 176 128 176 129 176 130 176 112 Fiber optic ring light Twin bulb reflected illumination unit Bifurcated fiber illuminator Concentric circles up to 24mm 0 05mm increment Concentric circle up to g 2 01 increment 55 angle 60 angle Metric screw threads pitch 0 25 1mm Metric screw threads pitch 1 25 2mm ISO metric screw threads pitch 0 075 0 7mm ISO metric screw threads pitch 0 75 2mm ISO unified screw threads 80 28TPI ISO unified screw threads 24 14TPI ISO unified screw threads 13 10TPI Unified screw threads 80 28TPI Unified screw threads 24 14TPIl Unified screw threads 13 10TPI Whitworth screw threads 60 26TPI Whitworth screw threads 24 18TPI Whitworth screw threads 16 11TPI NF screw threads 80 28TPI NF screw threads 24 14TPI NF screw threads 13 10TPI 14 5 involute gear teeth normal rack type 20 involute gear teeth normal rack type SPECIFICATIONS Model No TM 505 TM 510 Order No 176 811 176 812 XY stage travel range 50 x 50mm 100 x 50mm Measurement method Micrometer head optional Micrometer head optional Floating function XY stage table top size 152 x 152mm 240 x 152mm Effective area of table 96 x 96mm 154 x 96mm Max workpiece height 115mm 107mm Max
4. 176 668 176 669 176 670 176 671 176 672 MF UB 176 687 176 688 176 689 176 690 176 691 176 692 MF UC 176 673 176 674 176 675 176 676 176 677 176 678 MF UD 176 693 176 694 176 695 176 696 176 697 176 698 XY stage travel range 50x 50mm 100 x 100mm 200 x 100mm 200 x 170mm 300 x 170mm 400 x 200mm Z axis travel range 150mm 150mm 150mm 220mm 220mm 220mm Focusing method Manual focusing coarse focusing 10mm rev fine focusing 0 1mm rev Measurement method Linear encoder 2 axis model X Y axis 3 axis model X Y Z axis Resolution switchable 0 001mm 0 0005mm 0 0001mm 0001 00005 00001 Measuring accuracy at 20 C XY aixs 2 2 0 02L um L Measuring length mm when not loaded JIS B 7153 Indication accuracy at 20 C Floating function Z axis 5 0 04L um L Measuring length mm X and Y axes with Quick release mechanism XY stage top size 280 x 280mm 280 x 280mm 350 x 280mm 410 x 342mm 510 x 342mm 610 x 342mm Effective glass size 180 x 180mm 180 x 180mm 250 x 150mm 270 x 240mm 370 x 240mm 440 x 240mm Swiveling function 5 left 5 left 3 left Max stage loading 10kg 10kg 10kg 20kg 20kg 15kg Max workpiece height 150mm 150mm 150mm 220mm 220mm 220mm The following suffixes to the order No e g 176 667 10 10 for English User s Manual 11 for Chinese user s manual No suffix is Ja
5. 378 327 M Plan Apo M Plan Apo SL G Plan Apo 378 320 378 322 378 324 378 326 BD Plan Apo BD Plan Apo SL 378 321 378 323 378 325 378 327 Depression angle Applicable objective optional Dimensions Main unit 360 x 803 x 568 5mm Workstage 700 x 400mm Power supply 100 to 240VAC 50 60Hz Power consumption Approx 150W 378 320 378 321 378 324 378 325 Mitutoyo Approx 300W 378 322 378 323 378 326 378 327 Mass Approx 50kg including workstage i to the FS300 leaflet E4197 for more etalls FS 70 SERIES 378 Microscope Unit for Semiconductor Inspection Technical Data FEATURES a E A e The optical system that was originally e Bright field Differential Interference _ ee oe wie right and left developed for the best selling FS60 Contrast DIC and polarized observations TR e Gr iieaaenent models was further enhanced for the FS70 are standard with the FS70Z The FS70L 3 8mm rev for coarse adjustment models It is ideal as the microscope unit and FS70L4 do not support the DIC Trinocular tube Image Erect image P Pupil distance Siedentopf type of a prober station for semiconductors All method AA e range 51 76mm models CE marked e By employing an inward turret the long Tilt angle 0 20 only TH THS models _ e The FS70L supports three types of YAG working distance objectives provide Illumination system Reflective ilumination e field laser wavelength ranges 1064nm 5
6. f R DF View field 1 View field 2 Mass Note 378 788 4 10X 10 42 15mm 120mm 0 7um 1 6um 24mm 0 48x0 64mm l460g These objectives offer extra high resolving power 378 814 4 50X 0 75 5 2mm 4mm 0 4um 0 49um 90 48mm 0 10x0 13mm_ 400g 378 815 4 100X 0 90 1 3mm 2mm 0 3um 0 34um g0 24mm 0 05x0 06mm 410g DIMENSIONS Mag Magnification N A Numerical aperture W D Working distance f Focal distance R Resolving power 378 814 4 DE Focal depth Parfocal distance Parfocal distance Parfocal distance View field 1 Field of view when using 24mm eyepiece View field 2 Field of view when using 1 2 CCD camera Note The G Plan Apo Series are designed for observing a workpiece through glass thickness 3 5mm Note These objectives offer extra long working distance Mag N A W D f R DIR View field 1 Magnification Numerical aperture Working distance Focal distance Resolving power Focal depth Field of view when using 24mm eyepiece View field 2 Field of view when using 1 2 CCD camera Glass Thickness t 3 5mm Corrected G Plan Apo for Bright Field Observation Order No Mag NA W D f R Die View field 1 View field 2 Mass 378 847 20X 0 28 29 42mm 10mm 1 0um 3 5m 1 2mm 0 24x0 32mm 270g 378 848 3 50X 0 50 13 89mm 4mm 0 6um 1 4m g0 48mm 0 10x0 13mm 320g In
7. features and combinations are designed with Geometry Keys on the front panel Simply clicking a key and then capturing the feature coordinates means you can complete the measurement quickly and accurately This improves operator productivity reduces errors and save operation time and cost Refer to the QM Data200 and Vision Unit leaflet E4232 for more details Optional Accessories 12AAH035 Floppy disk drive unit USB type 12AAD033 Receipt printer for 230V 12AAD034 Receipt printer for 120V 908353 Printer paper for receipt printer 12AAA804 Printer cable 2m 937179T Foot switch 172 270 Adjustable stand 12AAD193 Connection cable B 12AAD194 Connection cable C 12AAD195 Connection cable D 12AAD196 Connection cable E 12AAA807 RS 232C cable 2m 12AAG920 RS 232C cable 3m Technical Data Image detection e Directivity Non direction e Min diameter 2mm on the screen e Min width 1mm on the screen e Max moving speed 1000mm s Applicable illumination e Type Surface Contour illumination e Range 30Lux to 1500Lux on the screen Bright Dark field difference 20Lx Repeatability tum in contour illumination Function Creating performing and editing measuring procedures Optional Accessories 12AAE671 Detector attachment A for 2250 to 350mm screen of PJ A3000 PJ H30 PH 3515 series 12AAE672 Detector attachment B for 2500 to 600mm screen of PV 5110 PV 600A series SYSTEM DIAGRAM Main unit wit
8. Data output via RS 232C interface Power supply 100 110 120 220 240V AC 50 60Hz Mass 65 5kg 505C 1010C 69 5kg 2010C 130kg 2017C 138kg 3017C 144kg 4020C Optional Reticles for 3X Eyepiece 12AAG838 12AAG878 Cross hair 7um width 12AAG836 12AAG877 Cross hair Sum width 12AAG873 12AAG876 Cross hair 3um width 12AAG839 12AAG879 Cross hair and 45 angle 12AAG840 12AAG880 Broken cross hair and 60 angle 12AAG841 12AAG881 Zeiss type chart 12AAG842 20mm scale 0 1mm reading 12AAG843 Concentric circle 01 2 18mm 12AAG844 10mm scale 0 1mm reading 12AAG845 5mm scale 0 05mm reading 12AAG846 10x10mm section 1mm min 12AAG847 Metric screw thread P 0 25 1 0 12AAG848 Metric screw thread P 1 25 2 0 12AAG849 Involute gear tooth 14 5 module 0 1 1 0 12AAG850 Involute gear tooth 20 module 0 1 1 0 12AAG851 Unified screw thread 80 28TPI 12AAG852 Unified screw thread 24 14TPl 1 n nmn 12AAG853 Unified screw thread 13 10TPI 12AAG854 Concentric circle 0 01 g 2 for MF U models MF MF U compatible Reticle mount standard accessory for MF U models for MF models 90 chain line Line width 5um standard accessory Refer to the MF MF U leaflet E4153 for more details Optional Accessories 176 392 Monocular tube with 10X eyepiece 176 393 Binocular tube with 10X eyepiece set 378 856 10X eyepiece set vie
9. for CEE DC for CCC E for BS K for EK No suffix is required for JIS 100V No suffix is required for JIS 100V LED Ring Illuminator LED Ring Light for FS Objectives Electric parts C LED Ring Illumination ih HDD suspension PCB l Black resin molded parts D Twin fiber optics illumination SPECIFICATIONS SPECIFICATIONS Order No 176 367 2 Order No Please contact us Applicable microscopes MF models with 1X 3X 5X 10X Applicable microscopes MF models with 1X 3X 5X objective objective Light source White LED Light source Supplied from microscope Length of LED cable 1500mm surface illumination To denote your AC power cable add the following suffixes to the order No A for UL CSA C for Taiwan D for CEE DC for CCC E for BS K for EK No suffix is required for JIS 100V PCB Mitutoyo QM Data200 SERIES 264 2 D Data Processing Unit The QM Data200 is a geometric readout analysis unit for optical instruments such as a profile projectors This unit features powertul 2 D coordinate measurement capabilities with easy to use key operation The QM Data200 improves operator productivity minimizes errors and saves total measurement time and production cost FEATURES e Informative graphic displays on the large LCD screen make for easy measurement operations e One key operation for combined measurements that are often used circle circle distance etc e The Al measuremen
10. is required for 1720B 1730B models Refer to the MF MF U leaflet E4153 for more details E for BS K for EK No suffix is required for JIS 100V DIMENSIONS 305 200 300 50 452 200 726 3 50 903 3 100 Unit mm Mitutoyo Hyper MF MF U SERIES 176 High Accuracy Measuring Microscopes FEATURES e The world highest accuracy XY measuring accuracy of 0 9 3L 1000 um e Selectable LAF Laser Auto Focus function Hyper MF U with optional optical tube turret and objectives TAT LL Lata 2 THAT LLL i Tiwi TUL LTT ab me m e High operability and repeatability e Three axis motorized control e Power drive auto focus unit is a standard feature Technical Data Hyper MF Observation image Optical tube Erect image Monocular or binocular tube optional depression 25 Reticle projection method with TV mount Optical path ratio eyepiece TV mount 50 50 Eyepiece lens optional 10X 15X 20X Objective 3X 375 037 1 W D 77 0mm Optional 1X 5X 10X 20X 50X 100X Transmitted illumination e Light source e Optical system e Functions Surface illumination e Light source e Optical system e Functions Data output Power supply Dimensions Mass Technical Data Observation image Optical tub
11. with optional turret objective and fiber illumination Differential interference contrast DIC observation Effective in detecting fine scratches and steps on the surface of metal liquid crystal and semiconductors Most common method of observation Observing directly the light reflected from the surface of the workpiece Technical Data Observation image Optical tube Erect image Siedentoph type pupil distance adjustment 51 76mm 1X tube lens Binocular tube depression 30 Reticle projection method with TV mount Optical path ratio eyepiece TV mount 50 50 10X field No 24mm Optional 15X 20X Manual or power M BD Plan Apo objective from 1X to 100X Refer to page J 36 for more details Transmitted illumination e Light source Halogen bulb 12V 50W e Optical system Telecentric illumination with adjustable aperture diaphragms Light intensity adjustable Non stepped brightness adjustment Surface illumination e Light source Eyepiece lens Turret optional Objective optional e Functions Optional halogen illumination unit fiber optic cold light illumination Koehler illumination with adjustable aperture diaphragms e Optical system e Functions Light intensity adjustable Non stepped brightness adjustment Display unit No of axis 2 axes or 3 axes e Resolution 0 001mm 0 0005mm 0 0001mm 0001 00005 00001 e Functions Zero setting Direction switching Da
12. 0 C XY aixs 2 2 0 02L um L Measuring length mm when not loaded JIS B 7153 Indication accuracy at 20 C Z axis 5 0 04L um L Measuring length mm Floating function X and Y axes with Quick release mechanism XY stage top size 280 x 280mm 280 x 280mm 350 x 280mm 410 x 342mm 510 x 342mm 610 x 342mm Effective glass size 180 x 180mm 180 x 180mm 250 x 150mm 270 x 240mm 370 x 240mm 440 x 240mm Swiveling function 5 left 5 left 3 left Max stage loading 10kg 10kg 10kg 20kg 20kg 15kg Max workpiece height 150mm 150mm 150mm 220mm 220mm 220mm The following suffixes to the order No e g 176 661 10 10 for English User s Manual 11 for Chinese user s manual No suffix is Japanese user s manual Selection of machine type Machine type MF A MF B Measurement system Illumination Unit Applicable Illumination Unit Order No X and Y axis 2 aixs type LED 176 345 Halogen 176 347 X Y and Z axis 3 axis type To denote your AC power cable add the following suffixes to the order No A for UL CSA C for Taiwan D for CEE DC for CCC E for BS K for EK No suffix is required for JIS 100V DIMENSIONS pt 9 360 234 50 261 452 200 551 726 3 50 903 3 100 Mitutoyo MF U SERIES 176 High pow
13. 0 to 40 times in total magnification e MSM series can be connected to a digital camera or CCD camera to save captured images of the object or for simultaneous observation through different media e The extended depth of focus long working distance and wide field of view increase work efficiency The system is ideal for inspecting various objects such as electronic components metal components plants mineral cells compositions and biological e Various attachments expand applications and use Extended MSM units can be used for appearance Inspections on processing lines inside inspection systems or in teaching environments lt MSM 412 i i MSM Z414 Si CF E m 7 mae L i i a a z MSM Z475T i MSM 465 i SPECIFICATIONS Model No MSM 412 MSM Z414 MSM Z475 MSM Z475T MSM 465 Order No 377 925 377 945 377 975 377 985 377 965 Optical system Greenough s type Galilean type Total magnification 10X 20X 10X to 40X 7 5X to 50X 6X 12X 25X 50X Optical tub Binocular Binocular Binocular Trinocular Binocular Pupil distance adjustable 54 76mm 54 76mm 52 79mm 54 76mm Eyepiece optional WF5X 22 WF10X 20 standard WF15X 13 WF5X 22 WF10X 20 standard WF15X 13 WF10X 23 standard WF5X 23 WF6 25X 23 WF15X 17 WF20X 13 WF6 25X 23 WF10X 23 standard WF15X 17 6 WF20X 10 WF20X 10 WF32X 8 F20X 13 4 WF32X 10 Object
14. 10x 10 25 20mm 20mm 1 1um 4 4um a2 4mm 0 48x0 64mm 3109 a workpiece s image can be focused within the focal depth even when the wavelength used is changed anywhere from 378 837 5 20X 0 36 15 0mm 10mm 0 8um 2 1um 1 2mm 0 24x0 32mm 330g the visible range 550nm to the ultraviolet range 378 838 5 50X 0 40 12 0mm 4mm 0 7um 1 7um g0 48mm 0 10x0 13mm 400g 266nm Therefore the M Plan UV Series are suitable for 378 839 5 80X 0 55 10 0mm 2 5mm 0 5um 0 9um g90 3mm 0 06x0 08mm 380g laser repair using a high frequency laser beam DIMENSIONS iene 95 Parfocal distance Mag Magnification N A Numerical aperture W D Working distance i Focal distance R Resolving power DE Focal depth View field 1 Field of view when using 24mm eyepiece View field 2 Field of view when using 1 2 CCD camera T Parfocal distance 7 Parfocal distance MSM 400 SERIES 377 Stereo Microscopes FEATURES e Bright sharp images with real depth are produced with high resolution and excellent faithfulness to color thus minimizing eye fatigue while increasing Inspection efficiency and productivity e The MSM series provides a Tull range of advanced functions at an affordable price e User friendly turret types MSM 412 MSM 465 and a zoom type MSM Z414 are available e Continuous zooming a standard feature allows you to enlarge the object by 1
15. 2 152 390 152 389 152 391 152 392 611635 041 611675 041 611201 241 611202 241 383038 176 204 965013 10X eyepiece view field dia 13mm 15X projection lens set 20X eyepiece view field dia 10mm Objective 5X W D 33mm N A 0 10 Objective 10X W D 14mm N A 0 14 Digimatic micrometer head range 50mm reading 0 001mm Digimatic micrometer head range 2 50mm reading 00005 0 001mm Micrometer head for X axis range 50mm reading 0 005mm Micrometer head for Y axis range 50mm reading 0 005mm Micrometer head for X axis range 2 reading 0001 Micrometer head for Y axis range 2 reading 0001 Rectangular gauge block 25mm Rectangular gauge block 50mm Rectangular gauge block 1 Rectangular gauge block 2 Halogen bulb 24V 2W Dial indicator attachment for Z axis measurement SPC cable 2m for Digimatic micrometer head Fixture and Stage accessories 990561 176 106 172 196 176 105 172 197 172 378 176 107 Workpiece clip 2pcs set Rotary table for TM 505 effective dia 66mm Rotary table for TM 510 effective dia 100mm Swivel center support for TM 505 max workpiece dia 70mm Swivel center support for TM 510 max workpiece dia 80mm V block with clamp max workpiece dia 25mm Holder with clamp Illumination units 176 366 176 203 176 344 Reticles 176 111 176 135 176 113 176 114 176 109
16. 26 Joon Bright dark field BF DF 378 321 378 323 378 325 378 327 a or pe TT Reflected illumination Koehler illumination with aperture diaphragm centering mechanism and field stop PERM l 12V 100W halogen lamp non stepped brightness adjustment With filter mounting MEEI pat saani slot 2 slot with BF DF switching slide 378 321 378 323 378 325 378 327 only Biss ghee ime i Transmitted illumination 12V 100W fiber illumination non stepped brightness adjustment with aperture TEP TEIRA diaphragm 378 323 378 324 378 326 378 327 only AS fi E Focus adjustment With concentric coarse and fine focusing wheels right and left ip pee Fine adjustment 0 1mm rev for 32mm travel range a a SSS eee Coarse adjustment 3 8mm rev for 32mm travel range Bright field observation Power turret Inward type with 4 lens mounts Most common method of observation Workstage Travel stroke 356 x 306mm with X Y axis fine feed knobs and coarse travel handle Observing directly the light reflected from the surface of the workpiece Optical tube Type Trinocular tube erect image Field number 24 Fixed 20 378 320 378 321 378 322 378 323 Adjustable 0 to 20 378 324 378 325 378 326 378 327 Intermediate image mag 1X Optical pass ratio Siedentopf type adjustment range 51 76mm Pupil distance Siedentopf type adjustment range 51 76mm Eyepiece Field of view 10X 930 378 320 378 321 378 322 378 323 10X 024 378 324 378 325 378 326
17. 3 303
18. 32nm excellent operability a ee and 355nm while the FS70L4 supports e An ergonomic design with superb Light source es T two types of wavelength ranges 532nm operability the FS70 employs the erect a E E and 266nm thus expanding the scope of image optical system the image in the oe power consumption 150W laser applications allowing laser cutting field of view has the same orientation as DaS a wntemtea a of thin films used in semiconductors and the specimen and enlarged fine focus liquid crystal substrates However Mitutoyo adjustment wheel with rubber grip coarse assumes no responsibility whatever for adjustment knob the performance and or satety of the laser system used with Mitutoyo microscopes A careful examination is recommended in selecting a laser emission unit FS70L4 SPECIFICATIONS Model No FS70 FS70 TH FS70Z FS70Z TH FS70L FS70L TH FS70L4 FS70L4 TH Order No 378 184 1 378 184 3 378 185 1 378 185 3 378 186 1 378 186 3 378 187 1 378 187 3 Short base model No FS70 S FS70 THS FS70Z S FS70Z THS FS7OL S FS70L THS FS70L4 S FS70L4 THS Order No 378 184 2 378 184 4 378 185 2 378 185 4 378 186 2 378 186 4 378 187 2 378 187 4 Focus adjustment 50mm travel range with concentric coarse 3 8mm rev and fine 0 1mm rev focusing wheels right left Image Erect image Pupil distance Siedentopf type adjustment range 51 76mm Field number 24
19. 378 754 5 and for laser repair 378 829 5 50X 0 42 17 26mm 3 9mm 0 7um 1 6um 20 48mm 0 10x0 13mm 320g 378 752 5 100X 0 50 12 13mm 2mm 0 6um 1 1m 0 24mm 0 05x0 06mm 335g 378 754 5 100X 0 50 11 76mm 2mm 0 6um 1 1m 20 24mm 0 05x0 06mm 335g In air DIMENSIONS 74 94 95 37 Parfocal distance 378 827 4 71 87 95 37 Parfocal distance Near ultraviolet Radiation and LCD Glass Thickness t 0 7mm Corrected LCD Plan Apo NUV for Bright Field Observation 378 829 5 Note cee Order No Mag NA W D f R D F View field 1 View field 2 Mass Leet NE Cera Sena aE 378 820 4 50X 0 42 1476mm 4mm 0 7um t 6um 0 48mm 0 10x0 13mm 310d thickness 1 1mm 378 827 4 378 828 5 or 0 7mm 378 753 4 50X 0 42 14 53mm 4mm 0 7um 1 6um 0 48mm 0 10x0 13mm 310g 378 829 5 378 754 5 and for laser repair 378 751 4 100X 0 50 11 03mm 2mm 0 6um 1 1 um 20 24mm 0 05x0 06mm 380g In air DIMENSIONS Unit mm 83 97 95 37 Parfocal distance 378 751 4 378 820 4 Parfocal distance Ultraviolet Radiation Corrected M Plan UV for Bright Field Observation Note l a l Order No Mag N A W D f R D F View field 1 View field 2 Mass These ultraviolet corrected objectives are designed so that 378 844 5
20. 8 805 3 50X 055 13 0 mm 4mm 0 5um 0 9um g0 48mm 0 10x0 13mm_ 290g 378 806 3 100X 0 70 6 0mm 2mm 0 4um 0 6um g0 24mm 0 05x0 06mm_ 320g DIMENSIONS Unit mm 11 W D 1 4 wave length filter Sa 84 95 Parfocal distance 378 801 6 378 807 3 378 804 3 378 806 6 i Parfocal distance Parfocal distance Parfocal distance Parfocal distance M Plan Apo SL for Bright Field Observation Order No Mag NA W D f R DUE View field 1 View field 2 Mass Note a 378 810 3 20 0 28 30 5mm 10mm 1 0um 3 5um at 2mm 10 24x0 32mm 240g These objectives offer extra long working distance 378 811 3 50X 0 42 20 5mm 4mm 0 7m 1 6um g0 48mm 0 10x0 13mm_ 280g 378 812 3 80X 0 50 15 0mm 2 5mm 0 6um 1 1um 0 3mm 0 06x0 08mm 280g 378 813 3 100X 10 55 13 0mm 2mm 0 5um 0 9um g0 24mm 0 05x0 06mm_ 290g 378 816 3 200X 0 62 13 0mm_ Imm 0 4um 0 7um g0 12mm 0 025x0 03mm 490g DIMENSIONS Unit mm 95 Parfocal distance 3 9 20 5 W D gt 95 _ 378 811 3 95 _ 378 816 3 Parfocal distance Parfocal distance Parfocal distance Order No Mag NA W D
21. A W D f R D F View field 1 View field 2 can be focused within the focal depth even when the 378 809 5 10X 0 28 30 5mm 20mm Tum 3 5um 2 4mm 0 48x0 64mm 255g wavelength used Is changed anywhere from the visible 378 817 4 20X 0 40 17 0mm 10mm 0 7um 1 7um a1 2mm 0 24x0 32mm_ 340g range I 620nm to the near ultraviolet range I 355nm 378 818 4 50x 0 42 15 0mm 4mm O7um 1 6um 90 48mm 0 10x0 13mm_ 350g Therefore The M Plan NUV Series are suitable for laser repair using a high frequency laser beam 378 819 4 100X 0 50 11 0mm_ 2mm 0 6um 1 1m g0 24mm 0 05x0 06mm 380g 378 888 4 50X 0 65 10 00mm 4mm 0 42um 0 65um 20 48mm 0 10x0 13mm 500g DIMENSIONS o_o Mag Magnification N A Numerical aperture W D Working distance if Focal distance R Resolving power Parfocal distance DE Focal depth View field 1 Field of view when using 224mm eyepiece View field 2 Field of view when using 1 2 CCD camera Near Infrared Radiation and LCD Glass Thickness t 1 1mm or 0 7mm Corrected LCD Plan Apo NIR for Bright Field Observation Note a Order No Mag NA W D f R DE View field 1 View field2 Mass Hee ey ora eae 378 827 5 20x 10 40 19 98mm 10mm 0 72um t 2um at 2mm 0 24x0 32mm 305g thickness 1 1mm 378 827 4 378 828 5 or 0 7mm 378 828 5 50X 0 42 17 13mm 3 9mm 0 7um 1 6um 0 48mm 0 10x0 13mm 3209 378 829 5
22. ES 359 Vision System Retrofit for Microscopes FEATURES e The automatic edge detection tools and various macro icons allow measurement in one easy step e The graphics and measurement navigation functions facilitate operation e Image data input storage function e Measurement results are output to MS Excel This lets the user generate an inspection table on the same computer e Allows the tolerance zone measurement of measurement results and various types of Statistical processing for each item Vision Unit No 359 737 for MF C No 359 739 for MF UC e Combined use with the focus pilot provides high accuracy in height measurements Patent pending e A series of measuring operations can be performed using just one screen display e The auto brightness control function faithfully reproduces the type and degree of illumination used This function is limited to the MF MF U series QSPAK Measurement Window The PC system QSPAK software and microscope are optional Technical Data Projected image Inverted image Camera unit e Image sensor 1 2 color CMOS camera e Resolution 0 0001mm e Dimensions 100 x 58 x 89mm W x Dx H e Mass 0 4kg Adapter unit e Operating software QSPAK VUE optional e Dimensions 45 x 123mm e Magnification 0 5X e Mass 0 3kg Magnifications 21X 210X on 19 monitor Standard accessory Foot switch 12AAJ088 QSPAK optional software For observation comparison
23. UB2515B Hyper MF UD2515B Hyper MF UE2515B Hyper MF UF2515B 160x476x381 power unit Order No mm 176 430 176 431 176 432 176 433 176 434 Mass 255kg main unit 14kg power unit Observation type BF BF BF or BF BD BF BF or BF BD Digital counter Laser auto focus function Available Available XY stage travel range 250x150mm 250x150mm 250x150mm 250x 150mm 250 x 150mm Measuring unit Linear encoder Linear encoder Linear encoder Linear encoder Linear encoder Resolution 0 01um 0 01um 0 01um 0 01um 0 01um Measuring accuracy at 20 C 0 9 3L 1000 um L XY axis measuring length mm when not loaded Drive system X Y Z axis Motor driver control with the joystick XY stage top size 460x350mm 460x350mm 460x350mm 460x350mm 460 x 350mm Effective glass size 300x200mm 300x200mm 300x200mm 300x200mm 300 x 200mm Swiveling function 25 ao E B s Max stage loading 30kg 30kg 30kg 30kg 30kg Max workpiece height 150mm 150mm 150mm 150mm 150mm Mitutoyo Lee a cable add the following suffixes to the order No A for UL CSA C for Taiwan D for CEE DC for CCC E for BS K for EK No suffix is Ratan Hyper MF MF U leaflet 4267 for more details DIMENSIONS Optional Accessories See page J 19 for Hyper MF models See page J 21 for Hyper MF U models QM Data200 2 D data processing unit Refer to page J 26 for more details cc Vision Unit PC based visio
24. air DIMENSIONS Unit mm Order No Mag NA W D R DUE View field 1 View field 2 Mass 378 831 7 2X 0 055 34 0mm 100mm 5 0um 91um g12mm 2 4x3 2mm 340g 378 832 7 5X 0 14 34 0mm 40mm 2 0um 14 0um g4 8mm 0 96x1 28mm_ 350g 378 830 7 7 5X 0 21 34 0mm 26 6 mm 1 3um 6 2um 93 6mm 0 64x0 85mm_ 350g 378 833 7 10X 0 28 34 0mm 20mm 1 0um 3 5um 2 4mm 0 48x0 64mm 350g 378 834 7 20X 0 42 20 0mm 10mm 0 7um 1 6um g1 2Mm 0 24x0 32mm 400g 378 835 7 50X 055 13 0mm 4mm 0 5um 0 9um g0 48mm 0 10x0 13mm_ 440g 378 836 7 100X 0 0 6 0mm 2mm 0 4um 0 6um g0 24mm 0 05x0 06mm_ 460g DIMENSIONS 95 Sz NoN m 7 aa Parfocal distance 4 34 W D 378 831 7 61 95 zs NOIN gt k m St St ee aa Parfocal distance aa 34 W D 1 378 832 7 61 95 a N oln mM St zF E Parfocal distance 378 830 7 is NION oo SS st 7 Q A Q 61 95 378 833 7 Parfocal dis tance 95 378 834 7 Parfocal distance X 378 835 7 Parfocal distance BD Plan Apo SL for Bright Dark Field Observation Unit mm 89 95 _378 836 7 Parfocal dista
25. bjective provides a flat chromatic aberration free image throughout the field of view making it is suitable for any type of microscope e Specially designed objectives are also available with correction for near infrared radiation near ultraviolet radiation and ultraviolet radiation or various thicknesses of LCD screen glasses The mounting screw threads of objectives are designed to contorm to JIS B 7141 1988 M Plan Apo and M Plan Apo SL objectives for bright field observation Near infrared radiation corrected M Plan Apo NIR objectives Near ultraviolet radiation corrected M Plan Apo NUV objectives BD Plan Apo and BD Plan Apo SL objectives for bright dark field observation Ultraviolet radiation corrected M Plan UV objectives Refel for n Mitutoyo M Plan Apo for Bright Field Observation Order No Mag NA W D R DF View field 1 View field 2 Mass Note 378 800 3 1x 0 025 11 0mm 200mm 11 0um 440um o24mm 4 8x6 4mm 300g Tea unit 378 074 is required when using 1X 378 801 6 2X 0 055 34 0mm 100mm 5 0um 91um 12mm 2 4x3 2mm 220g 378 802 6 5X 0 14 34 0mm 40mm 2 0um 14 0um g4 8mm 0 96x1 28mm_ 240g 378 807 3 7 5X 0 21 35 0mm 26 67mm 1 3um 6 2um 93 6mm 0 64x0 85mm 240g 378 803 3 10X 0 28 33 5mm_ 20mm 1 0um 3 5um 2 4mm 0 48x0 64mm 230g 378 804 3 20X 0 42 20 0mm 10mm 0 7um 1 6um o1 2mm 0 24x0 32mm 270g 37
26. e Eyepiece lens Turret optional Halogen bulb 12V 100W fiber optic cold light illumination Telecentric illumination with adjustable aperture diaphragms Light intensity adjustable 100 steps brightness adjustment Halogen bulb 12V 50W Koehler illumination with adjustable aperture diaphragms Light intensity adjustable 100 steps brightness adjustment Via RS 232C interface 100 110 120 220 240V AC 50 60Hz 880x913x730mm main unit 160x476x381 power unit 250kg main unit 14kg power unit Hyper MF U Erect image Siedentoph type pupil distance adjustment 51 76mm 1X tube lens Binocular tube depression 25 Reticle projection method with TV mount Optical path ratio eyepiece TV mount 50 50 10X field No 24mm Optional 15X 20X Power Objective optional M BD Plan Apo objective from 1X to 100X Refer to page J 36 for more details Transmitted illumination e Light source e Optical system e Functions Surface illumination e Light source e Optical system Halogen bulb 12V 100W Telecentric illumination with adjustable aperture diaphragms Light intensity adjustable 100 steps brightness adjustment Halogen bulb 12V 50W Koehler illumination with adjustable aperture diaphragms e Functions Light intensity adjustable 100 steps brightness e SPECIFICATIONS eae aa ayaa AC 50 60Hz Dimensions 880x913x770mm main unit Model No Hyper MF B2515B Hyper MF
27. ed as standard on both sides allow precise focus and observation measurement regardless of handedness e High magnitication eyepiece observation up to 2000x e Standard measuring microscope that has a wide variety of optional accessories including a Vision Unit and various digital CCD cameras Using optional slide type nosepiece with 2 lens mount factory set option MF B2017C XY stage travel range 200 x 170mm with optional binocular tube 2010B 200 x 100mm 4020C 400 x 200mm Technical Data Observation image Erect image Optical tube optional Monocular or binocular tube depression 25 Reticle projection method with TV mount Optical path ratio eyepiece TV mount 50 50 Eyepiece lens optional 10X 15X 20X Objective 3X 375 037 W D 72 5mm Optional 1X 5X 10X 20X 50X 100X Transmitted illumination e Light source Halogen bulb 12V 50W e Optical system Telecentric illumination with adjustable aperture diaphragms Light intensity adjustable Non stepped brightness adjustment Surface illumination Halogen bulb 12V 150W Koehler illumination with adjustable aperture diaphragms e Functions e Light source e Optical system e Functions Light intensity adjustable Non stepped brightness adjustment Display unit e No of axis 2 axes MF A type or 3 axes MF B type e Resolution 0 001mm 0 0005mm 0 0001mm 0001 00005 00001 e Functions Zero setting Direction switching
28. er Multi function Measuring Microscopes FEATURES e Observation with a clear and flare less erect image and a wide field of view e Measuring accuracy that is the highest in its class and conforms to JIS B 7153 e Proven high NA objectives from the FS optical system long working distance type ETT Polarized light observation Observing only the filtered light that vibrates in one direction Used for observing materials with special optical characteristics such as mineral and liquid crystal TE DEA g Dark field DF observation Observing only the scattered light by shutting down the direct light to the objectives The scratches and dust that cannot be viewed in the bright view field can be observed by this method in high contrast e Integration of metallurgical and measurement microscope functions provides high resolution observation and high accuracy measurement solution illumination unit reflected transmitted selectable trom a high intensity LED or halogen bulb required e Variable aperture diaphragm reflected transmitted allows observation measurement while suppressing light diffraction e Variety of standardized stages in sizes up to 400 x 200 mm e Quick release mechanism useful for moving the stage quickly when measuring workpieces that are large in size or quantity e High magnification eyepiece observation up to 4000X e Low noise design MF UB3017C XY stage travel range 300 x 170mm
29. h SPC output MUX 1 OF 264 002 Direct connection PV 5110 PH 3515F ae Connectin Connectin All profile projectors with the linear scale Main unit with RS 2322C output cable D f cable C i XY stage can be connected directly 12AAD195 12AAD194 PJ A3000D F PJ H30 MF MF U RS 232C cable 2m aaa For RS 232C output Connected to PC KA Counter lt gt Connecting cable B Sip 12AAD193 Hyper MF MF U Power switch For FDD unit connection USB ea For stick memory a connection USB QM Data200 Rear panel For footswitch input OPTOEYE 200 No 332 151 The OPTOEYE 200 Image Edge Sensor eliminates human errors which may be involved in visual alignment ensuring speedy accurate and consistent measurements regardless of operator s skill e Bright and dark buttons allow easy calibration e OPTOEYE can be powered by QM Data200 via the connecting cable It means that no FEATURES AC adapter is required e OPTOEYE 200 adopts a thin fiber optic cable for detector connection to offer easy set up and smart operation without obstructing your vision OPTOEYE 200 Detector attachment optional DIMENSIONS unit mm Mitutoyo Vision Unit SERI
30. in the focal depth even when the 378 823 5 10X 10 26 30 5mm 20mm 1 1pm 4 tum o2 4mm 10 48x0 64mm 250g Wavelength used is changed anywhere from the visible range 480nm up to near infrared range 1800nm Therefore 378 824 5 20X 0 40 20 0mm 10mm O 7ym 1 7um 1 2mm 0 24x0 32mm 300g w Plan hl Sates ave aurietale dan Esse renal e a 378 825 5 50X 0 42 17 0mm 4mm 0 7um 1 6um g0 48mm 0 10x0 13mm_ 315g when the wavelength used exceeds 1100nm the focussing 378 826 5 100X 0 50 12 0mm_ 2mm 0 6um 1 1um 0 24mm 0 05x0 06mm 335g position may slightly deviate from that in the visible range 378 863 5 50X 0 65 10mm 4mm _ 0 42um 0 65um o0 48mm 0 10x0 13mm 450g ue to changes in glass alspersion and retractive index 1 378 864 5 100X 0 0 Omm 2mm 0 39um 0 56um 20 24mm 0 05x0 06mm_ 450g DIMENSIONS 0 4 37 5 W D Unit mm 57 5 715 95 i 95 i 95 Parfocal distance Parfocal distance Parfocal distance 1__ 30 5 W D i 64 5 95 i 378 825 5 Parfocal distance Parfocal distance Near ultraviolet Radiation Corrected M Plan Apo NUV for Bright Field Observation Note a nn a N These objectives are designed so that a workpiece s image Order No Mag N
31. ive 1X 2X turret 1X to 4X zoom 0 75X to 5X zoom 1 2X 2 5X 5X turret Auxiliary objective optional oS O E T A E 2X HOS TDN D BM Total magnification 2 5X to 60X 2 5X to 120X 1 87X to 320X 3 75X to 320X Working distance of objective 95mm 80mm 113mm 89mm Focusing travel 44mm 44mm 50mm 50mm Maximum workpiece height 93mm 95mm 130mm 95mm Workstage size 295mm 95mm 95mm 295mm Dimensions 151x285x343mm 151x285x343mm 151x285x343mm 151x285x343mm 4 9kg 377 925B 5 3kg 377 945B 4 8kg 377 965B Mass 47g 5 1kg 5 3kg 5 4kg 6 3kg To denote your AC power cable add the following suffixes to the order No A for UL CSA C for Taiwan D for CEE DC for CCC E for BS K for EK No suffix is required for JIS 100V DIMENSIONS Unit mm Optional Lenses For MSM 412 2414 5X 22 eyepiece 15X 13 eyepiece 20X 10 eyepiece 377 026 377 028 377 029 MSM 2414 0 5X Auxiliary 0 75X Auxiliary 1 5X Auxiliary objective objective objective i 377 045 377 046 377 047 For MSM 465 MSM 465 MSM Z2475 6 25X 23 eyepiece 15X 17 6 eyepiece 377 066 377 067 20X 13 4 eyepiece 32X 10 eyepiece 377 068 377 069 i p 4 i B i O 0 5X Auxiliary 1 5X Auxiliary 2X Auxiliary aora a objective objective objective MSM 465 MSM Z414 377 076 377 077 377 078 Mitutoyo P
32. le a stand alone type with tilt system and a flexible arm type that can be mounted on a Profile Projector Microsoft Excel is a registered trademark of Microsoft Corporation NeGe1 hOe81 x 0 5026 0 5072 D 1 4202 Hone MOOG 6 5389 6 5370 1 4988 ie z 4 pb ate i E DEE Y 1 0708 0653 Y 1 070 Te xy E io TI DR Technical Data Resolution 0 0001mm Program functions Part program creation execution editing Number of data maximum value minimum value mean value standard deviation range histogram Maximum of 1000 elements Point line circle distance ellipse rectangular hole slotted hole intersection and intersecting angle Point line circle Monographic LCD 320 x 240 dots with LED back light Measurement result file output RS 232C output CSV format MUX 10F format Japanese English German French Italian Spanish Portuguese Cheskey Chinese simplitied traditional Statisical processing Element memory Element recall Element key in Display system Display language Korean Data input RS 232C X Y Z axis signal Footswitch Data output RS 232C Printer Floppy disk drive unit Power supply 100V AC to 240V AC Mass 2 9kg stand mount type 2 8kg arm mount type e Intuitive panel design The QM Data200 employs Geometry Keys to accelerate the measurement process The probing routine of standard geometric
33. length 378 506 378 505 Near infrared and visible radiation 378 513 Near infrared visible near ultraviolet radiation 378 514 Visible and ultraviolet radiation Objective Optional Reflected illumination e Telecentric system with aperture stop system e Fiber optic illuminator optional is required Light source Halogen bulb 21V 150W optional Mass 378 505 570g 378 506 5909 378 513 12709 378 514 13009 FEATURES e The optical system features ultra long working distance objectives and correction for the wide range of radiation wavelengths in use e The fiber optic reflected illumination keeps the workpiece free from thermal expansion The fiber optic illuminator is required for the light source e Also available with a laser mount or turret objective mount Selection Guide to System Configuration VMU L4B Order No Depends on each system uu u wu w configuration 69 00 08 02 espana ASA o s Vertical CCD camera mount oj o Horizontal CCD camera mount YAG laser mount Fiber optic illumination unit M Plan Apo M Plan Apo SL G Plan Apo objectives for bright field observation suan M Plan Apo NIR LCD Plan Apo NIR M Plan Apo NUV and LCD Plan Apo NUV objectives A for laser cutting M Plan UV objectives for laser machining A Provided A Available as optional accessory Refer to the Mic
34. n measuring system Refer to page J 28 for more details Unit mm Three axis Motor driven Joystick The X Y and Z axes are driven and controlled with one joystick that serves as the nerve center of operation Speed control is possible trom high speed traverse of the stage to ultra low speed precise positioning of a workpiece Large Highly Accurate XY Stage The XY stage is a massive highly stable design created using mechanical techniques developed over Mitutoyo s long years of experience in manufacturing precision measuring microscopes Maximum stage loading is 30kg and a range of useful fixtures is available that includes a water holder and swivel center support Hyper MF U Highly Accurate Digital Scales These microscopes are equipped with highly accurate digital glass scales on all three axes Mitutoyo produces glass scales in an underground laboratory where the temperature and humidity are constant throughout the year The XY stage and Z optical tube displacements are displayed digitally LAF Optical Tube The LAF Laser Auto Focus optical tube can be selected The LAF system achieves high repeatability when measuring minute steps etc enabling difficult measurements with minimum fatigue Available for model MF U only Image graphic of AF optical path ge The LAF uses a low power laser that corresponds to Class 2 visible radiation
35. nce Order No Mag N A W D f R DUE View field 1 View field 2 Mass 378 840 7 20X 0 28 30 5mm 10mm 1 0um 3 5um g1 2mm 0 24x0 32mm_ 350g 378 841 7 50X 0 42 20 0mm 4mm 0 7um 1 6um g0 48mm 0 10x0 13mm 410g 378 842 7 80X 0 50 13 0mm 2 5mm 0 6um 1 1m g0 3mm 0 06x0 08mm_ 430g 378 843 7 100X 0 55 13 0mm_ 2mm 0 5um 0 9um g0 24mm 0 05x0 06mm_ 440g DIMENSIONS 378 841 5 Unit mm 378 842 5 Parfocal distance 8 5 13 W D 378 843 5 Mitutoyo BD Plan Apo HR for Bright Dark Field Observation Order No Mag N A W D f R DAF View field 1 View field 2 Mass HOt l l 378 845 7 50x 075 5 2mm 4mm O4um 049m 0 48mm 0 10x0 13mm 5309 These objectives offer extra high resolving power 378 846 7 100X 0 90 mma 2mm 0 3um 0 34um g0 24mm 0 05x0 06mm 545g DIMENSIONS Unit mm _ 378 845 378 846 Parfocal distance Near infrared Radiation Corrected M Plan Apo NIR for Bright Field Observation Order No Mag N A WD f R D F View field 1 View field 2 Mass These objectives are designed so that a workpiece s image 378 822 5 5X 0 14 37 5mm 40mm 2 0um 14 0um 4 8mm 0 96x1 28mm 220g can be focused with
36. ocket Magnifiers SERIES 183 FEATURES gt Optional Reticles for pocket comparators e Suitable for inspecting metal surfaces 1 183 201 SPECIFICATIONS hire Magnification Order No Remarks n bos eo 25X 183 201 Pen type 183 202 183 103 183 104 183 202 With stand 50X 183 203 With stand a ase ues 183 203 183 105 183 106 183 107 Pocket Comparators SERIES 183 E FEATURES 183 108 e By replacing optional reticles dimensional angle and other types of measurement 483 101 can be performed Se e An optional illuminator 950757 is available SPECIFICATIONS S 183 111 183 112 183 113 Magnification Order No Remarks l 8X 183 101 Optional reticles available Optional 9X 183 121 Optional reticles available soe 10X 183 131 Optional reticles available 183 114 183 115 SERIES 183 FEATURES e Allows the user 8X 16X zoom 7 observation e Magnification indicator is provided for 8X 10X 12X 14X and 16X observation e Metric and inch scales are provided for 183 304 Reticle provided measuring e Comes with a carrying case SPECIFICATIONS Magnification Order No Remarks 8X 183 304 With reticles Scale graduation 0 1mm 005 Clear Loupe SERIES 183 SPECIFICATIONS Magnification Order No Remarks 7X 183 301 Drawtube removable 10X 183 302 Drawtube removable 15X 183 303 Drawtube removable 183 301 183 302 18
37. of JIS C6802 1997 Safety Mitutoyo Accessory for Measuring Microscope Focus Pilot FP 05 FEATURES e By installing this system on the camera mount of an MF series measuring Stage Micrometer e Four types of chart patterns are available The pattern should be selected in microscope and projecting the focusing chart onto the workpiece surface the focal point can be detected with high accuracy and high repeatability accordance with the type of workpiece surface texture A AN A A e The brightness of the chart can be i WZ adjusted e A wide view field observation on the monitor is made possible with the use of a CCD camera C mount adapter is Concentric circle Slit included SPECIFICATIONS SPECIFICATIONS Order No 375 056 soe MF C models MF U C models Graduations 0 01mm light source Green LED Red LED Green LED Red LED eS ao Een u ANY Magnification 0 5X Accuracy 0 1 Camera Mass tey adapter C mount provided Pade Up to 2 3 inch Mass 1 8kg 1 8kg To denote your AC power cable add the following suffixes to the order No A for UL CSA C for Taiwan D for CEE DC for CCC E for BS K for EK No suffix is required for JIS 100V Within 2 3 area from the center of view field Power Focus Unit SPECIFICATIONS Order No Please contact us Applicable microscopes MF C models MF UC models Resoluti
38. of form e Template matching function e Manual pattern matching function For simple measurement e One click edge detection tool function e Smart tool function e User macro function For repeated measurement auto measurement e Quick navigation function e Playback function e Graphic function e External data output function e Statistical calculation function One click Edge Detection LJ Optional accessory Just by clicking the mouse near the edge of a workpiece g QSPAK automatically scans the edge and detects it showing Calibration glass chart Vision Unit No 958448 Fiber optic its coordinates This function also works with the point tool ring illuminator box tool circle tool and auto focus tool Pass a ee Se i ee all it Adapter unit Multi I O card Measuring microscope w XY or XYZ counter Foot switch No 12AAJ088 Connecting cable 19 color display PC Focus Pilot Pentium4 WindowsXP Graphic Window The measurement results and measured elements are plotted in the graphic window in real time By using this function the user can check the current measuring position at a glance The graphic window can be used for geometrical calculation A for UL CSA D for CEE E for BS DC for China K for EK C for Taiwan No suffix is required for JIS 100 a B oe esd Baer an Os SE aii eas MRA ee j ist 1HE i Eii E GEA en piji rs Mit
39. on 0 4um Drive speed 3 2mm s Power supply 100 240V AC 50 60Hz Dimensions WxDxH Control box 108 x 72 x 193mm Manual and Power Turrets SPECIFICATIONS Order No 176 211 378018 176 210 378 016 378 116 Observation type BD BF BD BF BF No of objective 4 mount 4 mount 4 mount 4 mount 5 mount mounts ma Manual Motor Power supply AC 100V 240V Dimensions i Turret 164x65x137 WxDxH Control Box 108x72x193 To denote your AC line voltage add the following suffixes to the order No e g 176 210A A for UL CSA D for CEE E for BS DC for China K for EK C for Taiwan No suffix is required for JIS 100V Twin fiber optics illuminator Ring fiber optics illuminator SPECIFICATIONS SPECIFICATIONS Order No 176 343 Order No 176 366 Applicable microscopes MF MF U models Applicable microscopes MF models Length of fiber cable 700mm Length of fiber cable 1000mm Light source Halogen bulb 12V 100W Light source Halogen bulb 12V 100W 517181 halogen bulb 517181 halogen bulb Dimensions W x D x H Light unit 235 x 76 x 120mm Dimensions W x D x H Light unit 235 x 76 x 120mm To denote your AC power cable add the following suffixes to the order No A To denote your AC power cable add the following suffixes to the order No A for UL CSA C for Taiwan D for CEE DC for CCC E for BS K for EK for UL CSA C for Taiwan D
40. panese user s manual Selection of machine type 12AAA846 Foot switch Illumination units Refer to page J 25 176 315 Halogen illumination unit 12V 100W 176 316 Halogen illumination unit 12V 150W 176 343 Twin fiber optics illuminator 12AAG806 GIF color filter for 176 315 12AAG807 LB80 color filter for 176 315 Fixture and Stage accessories Refer to page J 15 Machine type MF UA MF UB MF UC MF UD Observation type Bright field BF Bright field BF Bright Dark field Bright Dark field BF DF BF DF Measurement system X and Y axis 2 axes X Y and Z axis 3 axes X and Y axis 2 axes X Y and Z axis 3 axes Illumination Unit Applicable Illumination Unit LED Halogen Order No 176 346 176 348 Note Because the Generation C type does not have equipped the illumination unit it is necessary to select the either LED illumination unit or Halogen illumination unit To denote your AC power cable add the following suffixes to the order No A for UL CSA C for Taiwan D for CEE DC for CCC 176 107 Holder with clamp 172 378 V block with clamp max workpiece dia 25mm 172 197 Swivel center support max workpiece dia 80mm 176 305 Rotary stage with fine feed knob for 505C 1010C 2010C models 176 306 Rotary stage with fine feed knob for 2017C 3017C models Fixture mount adapter 176 310 is required for 1020B models Fixture mount adapter 176 304
41. roscope Units leaflet E4191 for more details Reticles optional 516848 516576 516578 516577 516849 516850 516851 Cross hair Broken cross hair 90 and 60 Concentric circle Diametric increment 1 2mm 20mm scale Minimum reading 0 1mm with cross hair 10mm scale Minimum reading 0 1mm 5mm scale Minimum reading 0 05mm 10x10mm section Minimum section 1x1mm Refer to the Microscope Units leaflet E4191 for more details Eyepieces SERIES 378 FEATURES e The field of view is extra wide e Optional reticles are available 378 857 378 858 378 856 Objectives SERIES 378 The Mitutoyo 378 Series objectives have the world s longest working distance and an intinity correction optical system These ob jectives provide flexible observation at high magnifications and independent correction of chromatic aberration FEATURES e The long working distance type objectives provide excellent clearance between the lens surface and the workpiece surface in focus making it possible to observe workpieces which are usually hard to tocus because of awkward projections SPECIFICATIONS Order No Magnifi Field Mass Individual 2pcs set cation number order No 378 856 10X 24 85g 378 856 5 378 857 15X 16 40g 378 857 5 378 858 20X 12 559g 378 858 8 e The metallurgical plan apochromatic M Plan Apo objective is an excellent optical system This o
42. stage loading 5kg 5kg Remarks for EK No suffix is required for JIS 100V Note D and E are not compatible with CE DIMENSIONS To denote your AC power cable add the following suffixes to the order No A for UL CSA CED for CEE CEE for BS D for CEE DC for CCC E for BS K Unit mm Mitutoyo MF SERIES 176 Measuring Microscopes The MF measuring microscopes expandability such as when used in combination with Mitutoyo s vision unit to boost its performance or data management on a PC promises further improved measuring efficiency FEATURES e Observation with a clear and flare less erect image and a wide field of view e Measuring accuracy that is the highest in its class and conforms to JIS B 7153 e ML series high NA objectives that are specially designed for the MF series long working distance type bh E E Selection of XY stage by travel range 505C 50 x 50mm 1010C 100 x 100mm illumination unit reflected transmitted selectable trom a high intensity LED or halogen bulb required e Variable aperture diaphragm reflected transmitted allows observation measurement while suppressing light diffraction e Variety of standardized stages in sizes up to 400x200mm e Quick release mechanism useful for moving the stage quickly when measuring workpieces that are large in size or quantity e Coarse tine feed handles equipp
43. t function automatic identification of measuring item eliminates switching between the measurement command keys QM Data200 No 264 145 stand mount type No 264 146 arm mount type No 264 149 for Hyper MF MF U To denote your AC power cable add the following suffixes to the order No A for UL CSA C for Taiwan D for CEE E for BS No suffix is required for JIS 100V QM Data200 Stand mount type e Graphic display Measurement intormation and data are visualized on the back lit LCD display with graphical interfaces The geometric feature that you selected is displayed with the probing navigator The measurements map and blink indication show you the probing points and sequences Simply probe points and click by following the blink indicator Measurements can be easily completed even by a beginner This improves operation accuracy and reduces errors and time e Equipped with a measurement procedure teaching function and measuring position navigation in Repeat mode e The user menu function allows the user to register measurement commands or part programs to create custom menus e Tolerance zone measurement of data processing results and various statistical processing routines for each item are available e Measurement result output to MS Excel in spreadsheet CSV format e The measurement procedure and measurement result can be saved using the optional floppy disk drive unit Two models are availab
44. ta output via RS 232C interface Power supply 100 110 120 220 240V AC 50 60Hz Mass 65 5kg 505C 1010C 69 5kg 2010C 130kg 2017C 138kg 3017C 144kg 4020C Selection of XY stage by travel range 505C 50 x 50mm 1010C 100 x 100mm 2010C 200 x 100mm 2017C 200 x 170mm 4020C 400 x 200mm Optional Accessories 378 857 15X eyepiece set view field dia 16mm 378 858 20X eyepiece set view field dia 12mm Objective See page J 36 378 018 Adjustable manual BF turret 378 116 Adjustable power BF turret 176 211 Adjustable manual BF DF turret 378 210 Adjustable power BF DF turret Reticles See page J 18 178 092 Polarization unit 378 076 DIC unit for 100X SL80X SL50X objective 378 078 DIC unit for 50X SL20X objective 378 079 DIC unit for 20X objective 378 080 DIC unit for 10X 5X objective 12AAA643 ND2 color filter 12AAA644 ND8 color filter 12AAA645 GIF filter 12AAA646 LB80 color filter 375 054 0 5X camera adapter with C mount adapter 970441 C mount adapter 513667 Halogen bulb 24V 50W 12BAB345 Halogen bulb long life type 24V 50W 517181 Halogen bulb 24V 100W 12BAD602 High intensity halogen bulb 24V 100W 176 308 Vibration damping stand 176 309 Mounting stand 375 056 Stage micrometer 12AAA165 Lens cleaning kit SPECIFICATIONS Model No XY stage size 505C 1010C 2010C 2017C 3017C 4020C Order No MF UA 176 667
45. ture and Stage accessories Refer to page J 15 176 107 Holder with clamp 172 378 V block with clamp max workpiece dia 25mm 172 197 Swivel center support max workpiece dia 80mm 176 305 Rotary stage with fine feed knob for 505C 1010C 2010C models 176 306 Rotary stage with fine feed knob for 2017C 3017C 4020C models Fixture mount adapter 176 310 is required for 2010B models Fixture mount adapter 176 304 is required for 2017B 3017B 4020B models gt QM Data200 2 D data processing unit Refer to page J 14 for more details 12AAA807 Connecting cable set Focus pilot FP 05 Focus assisting system Refer to page J 24 for more details Vision Unit PC based vision measuring system Refer to page J 28 for more details SPECIFICATIONS Model No XY stage size 505C 1010C 2010C 2017C 30C 4020C Order No MF A 176 661 176 662 176 663 176 664 176 665 176 666 MF B 176 681 176 682 176 683 176 684 176 685 176 686 XY stage travel range 50x 50mm 100 x 100mm 200 x 100mm 200 x 170mm 300 x 170mm 400 x 200mm Z axis travel range 150mm 150mm 150mm 220mm 220mm 220mm Focusing method Manual focusing coarse focusing 30mm rev fine focusing 0 2mm rev Measurement method Linear encoder 2 axis model X Y axis 3 axis model X Y Z axis Resolution switchable 0 001mm 0 0005mm 0 0001mm 0001 00005 00001 Measuring accuracy at 2
46. utoyo FS 300 SERIES 378 High Power Inspection Microscope The FS 300 is designed for inspecting micro components such as IC chips and video head parts The optical system features ultra long working distance objectives wide view field eyepieces and independent correction for lateral chromatic aberration FEATURES e The complete FS 300 system can be composed of a variety of components for meeting diverse applications e Available with or without a transmitted light illuminator e Ultra long working distance objectives provide easy manipulation of workpieces e Easy switching between bright tield illumination and dark tield illumination me a Polarized light observation Observing only the filtered light that vibrates in one direction Used for observing materials with special optical characteristics such as mineral and liquid crystal Optional accessories widen the range of applications Effective in detecting fine scratches and steps on the surtace of metal liquid crystal and semiconductors FS 300 with optional accessories j Dark field observation Observing only the scattered light by shutting down the direct light to the objectives The scratches and dust that cannot be viewed in the bright view field can be observed by this method in high contrast SPECIFICATIONS Main unit Observation system Bright field BF 378 320 378 322 378 324 378 3
47. w field dia 24mm 378 857 15X eyepiece set view field dia 16mm 378 858 20X eyepiece set view field dia 12mm 375 043 Protractor eyepiece 10X 176 313 Digital protractor eyepiece 10X 375 036 2 1X objective W D 61mm N A 0 03 375 037 1 3X objective W D 77mm N A 0 09 375 034 1 5X objective W D 61mm N A 0 13 375 039 10X objective W D 51mm N A 0 21 375 051 20X objective W D 20mm N A 0 42 375 052 50X objective W D 13mm N A 0 55 375 053 100X objective W D 6mm N A 0 7 176 314 1 Slide type nosepiece 2 mount parfocal 176 314 2 Slide type nosepiece 2 mount mag adjusted 12AAA643 ND2 color filter transmitted surface 12AAA644 ND8 color filter transmitted surface 12AAA645 GIF filter transmitted surface 12AAA646 LB80 color filter transmitted surface 375 054 0 5X camera adapter with C mount adapter 970441 C mount adapter 513667 Halogen bulb 24V 50W 12BAB345 Halogen bulb long life type 24V 50W 176 308 Vibration damping stand 176 309 Mounting stand 375 056 Stage micrometer 12AAA165 Lens cleaning kit 12AAA846 Foot switch Illumination units Refer to page J 25 176 351 6 Oblique surface illumination unit 176 367 2 LED ring illuminator 176 343 Twin fiber optics illuminator 176 366 Ring fiber optics illuminator 12AAG806 GIF color filter for fiber optics illuminator 12AAG807 LB80 color filter for fiber optics illuminator Fix

Specifications

Contents

Download Pdf Manuals

Related Search

Related Contents