Process Eye Professional
Contents
1. E E E i 8 7 Toolbars aoe ee Z 5 Status Bar Eile List Window DataQ00001 ER atanoooo2 Main Window Style Show Date Time DataQO0003 View Manager Show File Size Datal00004 Properties Examples of each option are shown below FileName Comment DataQ00001 No comment Datal00002 No comment DataQO0003 Mo comment DataQ00004 No comment FileName Time DataQO0001 24 10 2003 09 31 DatalO0002 0 07 2003 16 51 DataDO0003 31707 2003 08 46 DatalO0004 01 08 2003 15 03 File Name i Datal00001 Tak D atatoa 4k D atatoa 4119K D atalDO004 14276 Main Window Style This is the text window which appears with each view it can display one of three pieces of information The contents of the alarm log The recipe properties The contents of the comment field By default the alarm log is normally displayed Closing this view will also close the file RGA Information Recall Data000001 File Edit Scan view window Help EN F E a 4 w Status Bar Eile List Window File Name File List Properties DataQ00001 eed co a Wain Veindow Style D ata ggggz Main Window Style Comment views Datalooo03 View Manager Recipe Properties View DataQ00004 Properties Nitrogen Note This option is only visible in the View pull down menu when a2. Last Scan views the newest scan acquired in the current recipe run 6 Status Bar The status bar is along the bottom of the screen and displays mouse over help information It can be switched off by selecting Status Bar from the View pull down menu Process Eye Professional Recall SP104010 101 August 2005 g Chapter 3 Working with Data Files Overview Recall data files are compound files This means that they can hold multiple sets of information all within the one file Usually they hold just one set of data but there are cases where you may find that they hold more They hold a separate comment that you can edit multiple times they hold information about the settings used to acquire the data perhaps most obviously they hold all the information needed to reconstruct any trend views that were displayed when the original file was closed out So when you open a data file Recall can reconstruct the trend views to look exactly the same as they did on the acquisition computer 3 1 Opening a file To open a file using the file open dialog i RGA Information Recall Data RGA Information Recall File Edit Scan Yiew Window Help File View Help Open Dialog Co M z Er Quick Open lay Er E Replace with Previous x E Replace with Next z aa Es Dataddd0i s Datal0000 Open This Save As Data00000 Re e E e Export As Text Export s Text Baseline Wizard Baseline Wizard Standard Views v Allow Docking
3. lt lt Auto Construct gt lt Detault Trend gt gt File View 1 File View 2 File View 3 ecse View Definition gt BarChart PD Process Eye Professional Recall SP104010 101 August 2005 from the left hand list and a measurement to apply it to in the right hand list 25 For example Selecting Default Trend and Barchart1 adds a default trend using data from Barchart1 Pata bie JEW Mananer The new view will now appear in the Data File Check Un Check the Swept Measurements you want to view hide View Manager dialog Measurement Barlhartt fet Click OK New trend views to be displayed in addition to any existing views View Measurement lt Default Trend gt BarCharti Add Remove Close existing Trend Views before displaying the ones in this list Sa The new view is then displayed mei ses effete Fine Hydrogen Helium Carbon 12 Nitrogen 14 Hydrocarbon 15 Oxygen 16 OH group Water Nitrogen Oxygen Araon 36 Argon Carbon dioxide Photoresist 64 Fluorocarbon ES PumpDown000001 Trend en 00 00 00 00 02 00 00 04 00 00 06 00 00 08 00 Elapsed Time File Edit Scan view Window Help To open the view properties of an active view you may either select EEE a me Properties from the View pull down menu or use the Properties lv File List Windows Icon _ File Name File List Properties j ESERE a Main Window Style d wjew Manager Note If the view lo
4. emkKs Technology for Productivity Spectra Products Process Eye Professional Recall MKS Instruments Process Eye Professional Recall User Manual SP104010 101 August 2005 As part of our continuous product improvement policy we are always pleased to receive your comments and Suggestions about how we should develop our product range We believe that the manual is an important part of the product and would welcome your feedback particularly relating to any omissions or inaccuracies you may discover You can send your comments to MKS Instruments Spectra Products Cowley Way Crewe Cheshire CW1 6AG U K 44 0 1270 250150 Tel 44 0 1270 251939 Fax Email manual_info mksinst com Windows is a trademark of the Microsoft Corporation All other brand or product names are trademarks or registered trademarks of their respective companies MKS Instruments Process Eye Professional Recall SP104010 101 August 2005 2 I Getting Help We are always pleased to provide assistance where we can If you are experiencing difficulties or need help feel free to call your local MKS Spectra facility and ask for the Customer Support Group Please have the following information ready so that our technical staff may help you quickly and effectively The serial numbers of the analyser and control unit each of these numbers begins with the letters MKS or LM The Process Eye software version number thi
5. S RGA Information Recall 2 The Export Function requires that all open data Files are closed Do you want to close all the windows now Yes Mo 3 7 Creating a Baseline File A baseline file is required for statistical process control this file contains an average and standard deviation value for each value in a scan You can open a baseline file in Recall and view it like any other data file The file is then used to compare live against stored data and allows the live data to be displayed as a standard deviation from the baseline file instead of as a pressure A baseline file would normally include data from one recipe run during a repetitive process The recipe is created and run normally to generate a number of standard data files Files relating to a good process run can be then incorporated into the baseline file and the original recipe modified to include this file Select Baseline Wizard from the File pull down menu RGA Information Recall File View Help Qpen Dialog Cbrl 0 Emr Quick Open Export 45 Text Baseline Wizard This starts the wizard the first page is for information only click lt Next gt Process Eye Professional Recall SP104010 101 August 2005 13 Create or Add to a Baseline File gt Create a new Baseline fie To create a new baseline file select the Create a new baseline Baseine aes Click here to change the filename file option an incrementing file name will
6. Hide Print Ctrl P Show Comments Print Preview Show Date Time Print Setup Show File Size 1 Datado0002 5I d 2 Data000003 5I d 3 Data000001 5I d Exit Select Open Dialog from the File pull down menu or right click on a file in the file list and select Open New Folder DE demy In the Open dialog select the folder and file to open Datao00001 sI d and then click lt Open gt ES E gDatanoooo2 5I d E Dataoo0003 51 d Filename DataQ00002 SI d Files of ype Spectra Data Files SI d Cancel Process Eye Professional Recall SP104010 101 August 2005 9 3 2 Opening a file in the File List RGA Information Recall File wiew Hep o o o lt oOo p i GH open Dias EO Date000002 a EMR Quick Open D atapita Open Mew Folder Export 4s Text Baseline Wizard Export 4s Text j Baseline Wizard Allow Docking Standard Views Hide pee Show Comments Print Setup Show Dake Time Show File Size 1 Datadoood2 SI d 2 DataQOo003 5I d 3 Datadooo01 SI d Exit A file from the file list can be opened by selecting Quick Open from the File pull down menu or by right clicking on the file and selecting Open This 3 3 Scrolling through the data file list Once a file is open other files in the same folder can be opened sequentially using the Open previous and Open next icons a g ere itriniiiniceiiiebhien Th
7. It is exported in the pressure units selected in Recall preferences Column headings are identifiers such as the channel names in the above example column headings are Time Scan Mass 1 etc Scan Number Adds the scan number to the file Millisecond Data The time will include milliseconds for example 25 09 2003 22 00 09 will become 25 09 2003 22 00 09 415 3 6 Exporting Files As Text The action of exporting files is similar to using the Save As option except that you can Export a batch of multiple files and there is no need to load them into the Recall workspace Process Eye Professional Recall SP104010 101 August 2005 12 p7 To export a group of files from the file list highlight the files to be exported right click on the selection and choose Export as Text Natao Open This Data Open New Folder Export 4s Text Baseline Wizard w Allow Docking Hide Show Comments Show Date Time Show File Size Alternatively you can select File Export as Text this will display a file open dialog where single or multiple files can be selected for export Use this method to export files that are not in the current active directory shown in the file list window File Edit Scan view Window Help E Open Dialog Ctrl C Sal EWR Quick Open E Replace With Next Ey Close Save Os Export 45 Text If Recall has open files then the following message will be displayed
8. Yellow Calibration Sensitivity 28 02 2003 14 02 13 nyjat Yellow Calibration Sensitivity 28 02 2003 14 02 34 n a Yellow Calibration Sensitivity 28 02 2003 14 02 54 h a Yellow Calibration Sensitivity 28 02 2003 14 03 14 n a Yellow Calibration Sensitivity 28 02 2003 14 03 34 n a Yellow Calibration Sensitivity 28 02 2003 14 03 54 n a Yellow Calibration Sensitivity 28 02 2003 14 04 14 n a Yellow Calibration Sensitivity 28 02 2003 14 04 35 n a Yellow Calibration Sensitivity 28 02 2003 14 04 55 n a Yellow Calibration Sensitivity 28 02 2003 14 05 14 h a Yellow Calibration Sensitivity 28 02 2003 14 05 34 n a Yellow Calibration Sensitivity Data acan Data Pressures in mbar Time deia h g Mass 1 Mass 2 25r 097 2003 22 00 09 14 6 2354e O007 257 0972003 22 00 15 15 te LbLe O00 meS oo 2003 22 00 21 16 6 4055e 007 Calibration Calibration Calibration Calibration Calibration Calibration Calibration Calibration Calibration Calibration Calibration Calibration Calibration rHass Failed Failed Failed Failed Failed Failed Failed Failed Failed Failed Failed Failed Failed oS ils 6 5166e 006 og 526 000 g 3 1 769e 009 The alarms and events are events that are written to the event log while the recipe is running To include this information check the box The pressure of each mass in the measurement
9. be generated automatically and the file stored in the currently active folder Baseline file name Last Modified Popers TO Change the filename or directory for the baseline file click the lt Browse gt button lt Back Cancel Note The only files that can be added to a baseline file are those in the currently open folder and listed in the file list You cannot add files from more than one directory or from another directory other than the current one Create or Add to a Baseline File To add files to an existing baseline file select the Add files to the existing Baseline file highlighted below option C Create a new Baseline file Baseline4 na Click here to change the filename Add files to the existing Baseline file highlighted below Baseline file name Last Modified Baseline 23 10 2003 13 20 37 23 10 2003 13 22 28 _ Properties Baseline3 23 10 2003 13 43 18 mes Highlight the file to modify and click Next Click Properties to view the properties of the selected baseline file The files in the current folders are checked to ensure that they were created using the same version of the recipe If not a list of revisions will be displayed and files created by each revision can be included by checking the box next to that revision If revisions of recipes have different measurement properties the data files cannot be included in the same data file Select Recipes or Recipe Yersions The Baseline Wizard has foun
10. file to view it in Recall you will see the View Manager dialog which allows you to choose the data set that you want to view RGA Information Recall Mon000001 File Edit Scan View Window Help To see the dialog for the currently active file select View Manager from the View pull down menu os Ene at Toolbars Status Bar File List Window File Name File List Properties gt Baseline Main Window Style Baseline Baseline3 Mon000001 MonOO00002 Mon000003 Mon0O00004 View Manager Properties The Data File View Manager dialog will appear Data File View Manager Check Un Check the Swept Measurements you want to viewshide Any current swept measurement views are displayed in the top list In the above example there is a view for the measurement Barchart1 to remove it uncheck the box Measurement BarChartl New trend views to be displayed in addition to any existing views Measurement New trends can be added by clicking on Add Close existing Trend Views before displaying the ones in this list The Add Trend Dialog The left hand window displays a list of all the currently defined trend views The right hand window displays a list of measurements Add Trend View Select an item in the View List then one from the Measurement List Available Views for Datas etl Apply to Data Stream Measurement Data To add a trend select one of the view definitions
11. the Baseline at any future time fou will also be able to change the recipe and add these new recipe versions to the list of allowable versions provided that the data acquisition properties remain Unchanged IF you are sure that you are ready to proceed click Nest and wait while the Wizard creates the empty file lt Back Cancel The wizard is now ready to create an empty baseline file with the correct structure click Next to continue The baseline file is now ready for data to be added Select Files to Add to the Baseline Because the latest revisions of recipe data files were chosen the only valid files to add are Mon000016 and Mon000017 Hame Sea Date Alarms Comment O Mond00016 1285 11703 2003 05 O O Monoo0017 355 117 0372003 06 O None gt gt None gt gt gt Select All Files in Baseline 0 Scans in Baseline Undefined lt Back Cancel If the earlier revision was chosen Mon000001 through to Mon000015 could be included Select the files relating to good process runs by putting Select Files to Add to the Baseli i i EAE E EE AEREE a check in the box next to that file Name CJ Mondoo001 O Mondo0002 O Mondoo003 O Mondoo004 O Mondooo05 C Mongogggg O Mondoooo7 O Mondoo003 O Mondoo003 O Mond00010 k Select All Date 2o 02 2003 14 10 03 2003 O8 1070372003 O8 1070372003 O8 10 03 2003 O8 10 03 2003 O8 10 03 200
12. 3 11 10 03 2005 13 10 03 2003 15 100320073 16 Alarms 13 Seve orne tore e ce _ Comment lt lt None gt lt lt None gt None gt gt None gt gt None gt gt None gt gt lt lt None gt gt lt lt None gt gt lt lt None gt lt None gt gt Files in Baseline 0 Scans in Baseline Undefined lt Back Cancel Process Eye Professional Recall SP104010 101 August 2005 16 To continue click Next Baseline Options For files that have a different number of scans from the Baseline file If the data files have differing numbers of scans the files can be aligned from the beginning so the data from the first scan of each file is compared then the next and so on f Align added files with the Baseline at the start f Align added files with the Baseline at the end The baseline file will be constructed ta contain a maximum of 11791 scans Alternatively the files can be aligned to the last scan i wheel Fe ere So all the data from the last scan of each file is SE ee a re mere enc BAe compared and then the next to last scan and so on You have selected 15 files to add lt Back Cancel The baseline file can now be included in the actual recipe Edit the recipe using Recipe Wizard and add the file on the Statistical Process Monitoring dialog Recipe Definition Wizard Statistical Process Monitoring Statistical process monitoring is conducte
13. N Log Off m longson Shut Down Windows XP Professional From the Start menu select All Programs MKS RGA Applications Recall F pA Documents t FrintMe Internet Printing F m Real b ee He SIMION 3D 7 0 Search SnagIt 6 b F F Help and Support E Startup Adobe Reader 6 0 HE Microsoft Access j Microsoft Excel IKEA Microsoft Outlook umber of ways fm MKS RGA Applications Help fin Modem Helper Sonic F Eroadcom Advanced Control Suite Dell Media Experience Internet Explorer Recipe Wizard a Tools oO 4 Process Eye Professional From the Process Eye or Recipe Wizard program by clicking on Recipe Name __ Analog Interactive Barchart High Wac Barchart Interactiv Edit Barchart Low vacu Barchart with Trer Demo With Mo Irial Easy ie Instrument Tuning Leak Check Intera Recall Data w Allow Docking Hide i Peak Jump Interac Show Dates T t m mam m m Far ka n Manual Include Te Show Instruments Analog Interactive Barchart Interactive Barchart Low Vacuum Barchart With Trend In Demo with No Instrum Easy view Instrument Tuning Inter Leak Check Interactive Manual Include Manual Include Test Peak Jump Interactive StartRecipe Test Recipe for Manus Test Scritp for Manual Barchart Hi
14. call SP104010 101 August 2005 18 Torr mTorr Select Preferences from the File pull down menu then the option required Preferences Preferences W Always tile the views when a data file is opened Selecting Defaults opens the Preferences dialog where i Add a graph cursor to analog 7 bar chart views changes to the way a file opens can be made at masses leave blank for first mass separate multiple asco walls CETL SE Also available from the Preferences menu is the unit of pressure Recall will use in its displays Minimize the Comment File Information windows Initially show the Comment File Information window az f Commen C Settings f Alarms Events Cancel When data is exported as text all pressures are converted to the units selected here 4 3 Printing Only trend and graph displays can be printed in Recall if a text window is the active window or if there are no open files the print option is disabled The print function prints the data currently displayed if a view has been edited it will be the edited version that is printed and not the original BGA Information Recall Mont File Edit Scan Yiew Window Help Ca Open Dialog Chrl o EWR Quick Open Et Replace With Previous E E Replace With Next ET Close Save OS Export As Text Baseline Wizard Standard Views Print Print Preview Print Setup Select Print from the File pull down menu
15. ck is enabled then properties will not be a available ej Eroperties me 4 8 The Window Pull Down Menu EF The window pull down menu is only visible when a data file is open Window Help pt New Trend Window Close alll windows Arrange All windows d Process Eye Professional Recall SP104010 101 August 2005 Jg Add a New Trend To add a new trend view to the current file select New Trend View from the Window pull down pci menu or click on the add trend icon Trend Display Pane and Channel Properties lt j Use the Trend Display Pane amp Channel Properties dialog to Set the channels to be associated with this Trend View Individual panes display configure the new trend their nwn selection of channels fram a common list nf 15 items Trend Pane 1 v Hydrogen eee win _ saree Clicking Edit Channel allows the user to change the properties of the Helium BarChart1 Carbon 12 BarChart1 gt selected channel such as the mass it is measuring or if it relates to a ncn sachet user channel BarChart1 BarChart1 DarChart1 i BarChart Hep ton Ne Osygen BarChart1 Argon 36 BarChart1 A Mna Argon BarChart1 Carbon dioxide BarChart1 Photoresist 64 BarChart1 Fluorocarbon BarChart Checked channels that are not acquired are automatically exchided omes Channel Properties Entry for channel 1 Mae The list of known gases relating to mass numbers is contained in ee eae
16. d The nine buttons that make up the Chart Display Toolbar control certain aspects of the active data windows le pr i i BE Properties displays the properties dialog for the currently active recipe view Grid displays a Y axis grid in the currently active view window Default is disabled Log Lin switches between a linear and logarithmic Y axis Default is linear Y axis Minor Ticks enables the display of minor ticks on the Y axis Default is major ticks Time switches between real and elapsed time on the X axis from the start of the recipe Default is elapsed time Days displays the date and time on the X axis Default is time only X axis Minor Ticks enables the display of minor ticks on the X axis Default is major ticks Add Scroll Bar adds a scroll bar to the X axis Default is no scroll bar Add Cursor adds a measurement cursor to the active Bar chart display The cursor can be moved to the required mass and will display the mass number and partial pressure As many cursors as are required can be added 5 4 Scan Navigation Toolbar H H4 bh bh WH The last six buttons control the viewing of stored data E g y First Scan views the oldest scan stored in the file Jump Back views the scan 10 scans previous to the current one being viewed Previous Scan allows you to view the previous scan Next Scan allows you to view the next scan Jump Forward views the scan 10 scans subsequent to the current one being viewed
17. d yellow Alarms Only E Aed Alarms Onl Recipe Properties View The Recipe Properties view displays information on the instrument and recipe settings ES Mon000001 Recipe Properties SEE Show properties for General Properties v and 7 Feature Property Recipe name D Process Eye 2000 Recipes Modu Recipe date 26 02 2003 14 29 38 Instrument 1 Instrument Name Chamber 3 Serial Number LM 75 00702004 Application HPQ25 High Pressure Quad with roll Sensor HPQ Inlet System None Inlet 1 Factor 1 00 RGA application software Process Eye Y3 Data file version 7 The information displayed can be filtered using the Show Properties pull down Comment View Mon000001 Comment Sa The Comment View displays any comments already stored aa with the file You can add new comments simply by clicking on the page and typing the new comment New Text Process Eye Professional Recall SP104010 101 August 2005 24 Once a comment has been added it can be saved by selecting Save from the pull down menu or clicking on the Save icon Managing Views You will remember that Recall data files are compound files see the overview at the start of chapter 3 The View Manager dialog is not normally displayed when you open a data file because almost all data files contain only one set of data However baseline files are one example of a data file that contains multiple sets of data and when you open a baseline
18. d by comparing live data with Baseline data contained in a baseline file Baseline Filename Note that the Recipe Wizard will not check for the existence of the baseline file if you select the first option When the recipe runs the file must be in place C Use the file named lt BaseLinel Sl d gt in the same folder as the data file Use the explicit filename specified below Ic Sony SCE Process Eye 2000 D ata Chamber 3 Monitor Baseline2 S lesa lt Back Next gt Cancel Help Process Eye Professional Recall SP104010 101 August 2005 17 Chapter 4 Recall Toolbars and Utilities 4 1 Standard Views To modify and create views use the View Manager RGA Information Recall Open Dialog Chrl 0 Emr Quick Open Eile wiew Help Export 4s ext Baseline Wizard Standard views Preferences es alt Be TE ee The Manage Views dialog appears see the Process Eye Professional manual for more information on View Manager 4 2 Preferences Preferences are only available if there are no open files RGA Information Recall File View Help i Ss Open Dialog Ctrl O oa E Quick Open Export s Text ZAB amp Baseline Wizard Standard Views Defaults Print Setup Pascal mbar 1 Mon000001 SI d 2 Data000002 5I d 3 Data000001 SI d Process Eye Professional Re
19. d files in the current folder that belong to more than one recipe or to a recipe that has undergone at least one version revision Recipe version control is an important aspect of Baseline file maintainance It is permissible for recipe versions to differ so long as the differences do not affect data acquisition Choose one or more recipels version s from the list below Recipe Name Version HPS Chi234C0 Monitor 26 02 2003 14 29 38 HPQ25 Ch1234C0 Monitor 11 03 2003 05 25 16 z Back Cancel Process Eye Professional Recall SP104010 101 August 2005 14 If data from recipes with different measurement properties has been selected the following warning dialog is displayed and one of the recipe revisions would have to be removed before proceeding RGA Information Recall Recipe versions HPO25 Chiz34CD Monitor of 26 02 2003 14 29 38 and HPQ25 Chi23s4CD Monitor of 11 03 2003 05 25 16 have measurements with different properties The Baseline Wizard can only proceed when you select recipe versions containing compatible measurements Select Recipes or Recipe Yersions The Baseline Wizard has found files in the current folder that belong to more than one recipe or to a recipe that has undergone at least one version revision Recipe version control is an important aspect of Baseline file maintainance It is permissible for recipe versions to differ so long as the differences do not affect data acquisition Choose one or mo
20. e default behaviour when Recall opens a new file is to cascade the windows and show the information window in alarm view However when you open a file using the up and down buttons the placement of windows does not change If the information window was minimised it will remain minimised File Edit Scan wiew Window Help E Open Dialog Certo Emm Quick Open E Replace With Previous Eg Replace With Wext J Close The same features are also available from the File pull down menu Note While using the Up and Down buttons the display is locked You must click the Unlock button to change the window layout Then you can click the Up or Down buttons again 3 4 Closing a file m RGA Information Recall Data File Edit Scan View Window Help ta Open Dialog Chrl 0 FG Quick Open E Replace With Next eat clase To close an active file select Close from the File pull down menu or click on the close button on the text view F E Note Clicking on the close button on any trend or chart view 5 simply closes that view x To close all open files use the Close All icon Process Eye Professional Recall SP104010 101 August 2005 10 3 5 Saving a File in Plain Text Format Data in Process Eye is stored in a digital format that is not easily read by any other program Recall therefore has the ability to export data in two plain text formats e to a user defined flexible format using tab delimited columns with text in q
21. eeseeeeaeeeeaeeeeaeaeeaeeesaeaesaeeesaeaesaesaees 10 NO SUMED E A S T ANA P T A eau TE EAT A E EP E A A E ET 10 3 5 Saving a File in Plain Text Format sessssenssonnnsonnesnnoennssnnesnnoenneonnueonnesnnoennsonnesnnoennsennnsennesnnsenaon 11 SG BONNO eS AS TOX cirina O E a e aiaiai 12 3 7 Creating a BaSGline Fil wsssiassosansewswscasameanesaiaanbavessanevadioenaimendhessansnadnceaanaeaabews Mhareuesasuamsaianinederunes 13 Chapter 4 Recall Toolbars and UtilitieS ccscscscescsssssesenesenensnsceseeeesenensnsceeeeeeeeeeuenensnseeseeeenensass 18 RA SINC GN VOWS saii AE vic sais sears aerate etna evan E EA 18 AZ PROV CCCs eee tage E E E E E woes enned sania coils Sas sures deweiaie E E E E 18 AS PUNUNG sence censesiencesisacacesecesacacstadarensensswendh OEE EEEE AAR AEAEE ATENA REAN 19 A4 EXN RECAI asinsnuiexvaneeeiacseseueunqnerenncracacetuabawndcsins ivsamndisoudeausctamesraunacanstednseneeinnsanousanesierispsaseseiate 19 Aa The Edit MenNU siasii a E E ENERET 20 4 6 The Scan Pull Down MenU sssssssssssssnursrrnnsnnnnnnrnnnennnrnnnnrorurnnnnnnnnnurnrnnnrnnnnnurnnnenennnnnnrnnnenennnnnne 21 A7 The VIEW Pull DOW MENU sarsrnireiiincitieka ai a a ai 21 4 8 The Window Pull Down Menu sesscncscescenssatsaaeniaiessacetawnannsseds vues exewiaetsindiqaies seiseeniwntrerntaadevievieensest 26 Process Eye Professional Recall SP104010 101 August 2005 4 Chapter 1 Starting Recall Recall can be started in an Programs RU
22. gh Vacuum Edit Mew Recall Data Delete Copy Move Rename s Allow Docking Hide Show Instruments Show Dates Properties the Recall button Or from the Process Eye or Recipe Wizard program by right clicking on a recipe and selecting Recall Data from the list You can also double click a data file in Windows Explorer and Recall will open it MKS Instruments Process Eye Professional Recall SP104010 101 August 2005 5 Chapter 2 The Main Recall Screen The main page of the Recall program consists of six parts 2 File Edit Scan Yiew Window Help Ai amp Hoe FAB Aant gg Kai BPELi eIl mH MWe EADDN amt Data000001 Trend 6X Data000001 BarChartt f 5x Datad00001 Alarms ox FileName IAT Pen a Dete000001 h f Show All Alarms and F vents 7 Date Time Seven Pressure mbar 00 05 00 00 10 00 10 20 30 Elapsed Time Scan 4 from 3 to 12 Ready C MicDantim Data 100 Percent CO2 Calibration Pressure in mbar 1 Title Bar The title bar shows the name of the file currently in view The close minimize and maximize buttons work in the normal manner 2 Menu Bar Recall is no different from other Windows based programs all the available functions are available via the menus 3 File List The File List contains a list of all the Recall data files in the current directory 4 Data View Window The Data View window contain
23. ick on the paste icon or use the keyboard shortcut Ctrl V Process Eye Professional Recall SP104010 101 August 2005 20 4 6 The Scan Pull Down Menu The scan pull down menu is only visible when a file is open RGA Information Recall MonQ00003 File Edit Scan view Window Help ca E H Goto First F7 a 44 Jump Backwards shift F amp R l Goto Previous Fa File Name i Goto Next F9 DataQ0000 natsono00 PP Jump Forwards Shift Fo DataQoooo M Goto Last F10 DataQO000 DataQ0000 User Channels mo Annan First Scan button displays the oldest scan stored in the file Jump Backwards button displays the scan 10 scans previous to the scan in view Go to Previous button displays the scan previous to the current one in view Go to Next button displays the scan after the current one in view Yy y 2 Jump Forwards displays the scan 10 scans after the current one in view Il Last Scan button displays the oldest scan stored in the file 4 7 The View Pull Down Menu Toolbars RGA Information Recall Data z File Edit Scan Yiew Window Help A Toolbars H w Status Bar w File List Window File Hame File List Properties d Datal00001 on j Datagonod Main Window Style DatalO0003 View Manager D atadi Properties Process Eye Professional Recall SP104010 101 August 2005 21 Toolbars Al Selecti
24. ll windows j Cascade File Tile File Horizontally T Tile File vertically Selecting an active view To select a view and make it the active view choose it from the list of Window Help currently open views fact New Trend Window E Close All Windows Arrange All Windows 1 Bring File To Front iF Cascade File fee Tile File Horizontally T Tile File Vertically vik BarChartl 2 PumpDownO00001 Alarms 3 PumpDownO00001 Trend MKS Instruments Process Eye Professional Recall SP104010 101 August 2005 28
25. ng Toolbars from the View pull down menu opens the Toolbars dialog Toolbars fa henu bar W Detault EW Wl5can Navigation iv Chart Display Customize Ii Trend Display Close Reset W Show Tooltips if Cool Look Here you can select if a toolbar is displayed or not The Show Tool tips option displays mouse over help The Cool Look option changes the menu buttons to 3D style Status Bar RGA Information Recall Data z File Edit Scan View Window Help leg E al Toolbars l le Status Bar Eile List Window _File Name File List Properties DataQ00001 Fe fea D araning Main Window Style Datal00003 View Manager DataQ00004 Properties The Status bar can be disabled by removing the check mark H RGA Information Recall DataQO000 File Edit Scan View Window Help we Et a E Toolbars i Status Bar IE File List window _File Name File List Properties Data000001 i D atanan Main Window Style DataQ00003 View Manager Datal00004 Properties The File List can be disabled in the same way Process Eye Professional Recall SP104010 101 August 2005 272 File List Properties There are three additional pieces of information that can be displayed in the file list window these are Comments Date Time and File Size RGA Information Recall Data z File Edit Scan View Window Help
26. or click on the print icon 4 4 Exiting Recall RGA Information Recall File View Help E Ta ces 0 To exit Recall select Exit from the File pull down menu or click on the close Open Dialog Chril 0 U ES ouick open A button Export 4s Text Baseline Wizard Standard views Preferences j Print Setup 1 Dakaoo0002 SI d 2 MonQ00001 SI d 3 Datatoooo1 SI d 4 Data000003 5I d 5 Daka0oo001 SI d Process Eye Professional Recall SP104010 101 August 2005 19 4 5 The Edit Menu m RGA laformation Recall kio File Edit Scan view Window He g Undo Chri 2 t A cut Chrl i Flek Copy Chrl c Heh Paste Ctrl Base i Mon000002 Comment Seles The edit pull down menu is only visible when a file is a open the menu is only enabled when modifying text New text 7 in the comment view see Page 35 To undo a change made in the comment view select Undo from the Edit pull down menu or use the keyboard shortcut Ctrl Z y To cut a section of text from the comment view highlight a section of text then select Cut from the Edit pull down menu click on the cut icon or use the keyboard shortcut Ctri X To copy a section of text from the comment view highlight a section of text then select Copy from the Edit pull down menu click on the copy icon or use the keyboard shortcut Ctrl C To paste a section of text into the comment view select lt Paste gt from the Edit pull down menu cl
27. re recipels version s from the list below Recipe Mame Version DI HPAES Ch1234C0 Monitor 26 02 2003 14 29 38 HPO2S Chi 234C0 Monitor 11 03 2003 05 25 16 lt Back Cancel Select one of the revisions and click Next Baseline File Measurements Accept the defaults for this page to replicate all of the measurements from the data files into the baseline file This will ensure access to all Baselining features Choose Modify it you will want to use the baseline file only for alarm purposes and on a restricted subset of readings Data File Measuremerits Measurement 1 TM Channel type of 5 channels Measurement 2 1U Channel type of 22 channels In Baseline File az Properties Reset All Channel type of 5 channels Channel type of 22 channels Modit lt Back Cancel A list of measurements in the selected data file is displayed you can choose to include all or any number of the measurements in the baseline file Simply check the box next to the measurement to include it Click Next Process Eye Professional Recall SP104010 101 August 2005 15 Create Empty Baseline File WARNING The Baseline Wizard is ready to create an empty Baseline File Once the file is created you will not be able to change the structure of the measurements that it contains You will not be able to go back over the pages of the Wizard that you have already filled in Tou will however be able to add data files to
28. s closes all the currently open files Start Process Eye starts the Process Eye or EasyView program Start Recipe Wizard starts the Recipe Wizard program Start Software Setup starts the Software Setup wizard Cut cuts the highlighted section of text Copy copies the highlighted section of text to the clip board Paste pastes the contents of the clip board into the recipe Cascade windows cascades all open windows Tile horizontally tiles all open windows horizontally Tile vertically tiles all open windows vertically Bring active file to the front brings all open views for the active file to the front Print prints the contents of the currently open recipe file Help opens the online help file for recipe wizard 5 2 Trend Display Toolbar Three buttons constitute the Trend Display Toolbar Add New Trend Window is used to add a new trend Clicking this button will cause the Trend Display Pane and Channel Properties windows to be displayed See Adding Trends for more details of this window Note the button only becomes available when there is data to trend i e after the second scan is complete oh a Key Display controls the display of the key table for the active trend views The button will not be available if no trend view is available Key Mode changes the key table view between vertical and horizontal views Process Eye Professional Recall SP104010 101 August 2005 7 5 3 Chart Display Toolbar ey ad t D E Laie le
29. s is written on the software CD ROM and can also be found on screen by selecting Help About from the menu bar in the Recipe Wizard window The operating system used and any Service Packs which have been applied Support Contact Telephone Numbers United Kingdom 44 0 1270 250150 North America 1 408 778 6060 1 800 VAC CHECK MKS Instruments Process Eye Professional Recall SP104010 101 August 2005 3 Contents Ti Gettin HED ciccuunceatacnwicvanseansuenaads casas sisaeandescauaciaascaauuamenencursccnataemuaccesaceunieumiaiucutadnasaussnamavensnsianeuans 3 Chapter 1 Startno REGAN corina 5 Chapter 2 The Main Recall Screen 1ccssssssnssesececseneneneneneneuanauananusesenenonououocououoeseuauauauauauauauauasasaas 6 A TMU BSA espace tera etre etre ose etapa Pere etna cae PA A O tare a nites sedan A E OE 6 2 INV TAL AW oes tee cence se cree nee en cores es ee scence ee ae eee eee eee eee 6 eia AMi AE E T se ets EE EE E E E E E aenaaay sees E E EE E 6 TPA VEW WV OW s a S E N 6 DB LOOMDGNS A A T E A A A A IA AE 6 G LaS DaF earann E EE E E ae 8 Chapter 3 Working with Data Files sccsescscscscscssnsnsneesenenenceensnsneneenenenensnsnsnsneaeeneneneneuensnsneaeeneneeas 9 Bede OPANG a MO aaa EE ER 9 3 2 Opening a file in the File List n onanonunnnnnnnnenennnnsnnnnnnnunnnnnnnnnnunnnnnnennnnnnnnrernnnenrnnnnrnrnnnenrnnennnnene 10 3 3 Scrolling through the data file list ccccccceceeeeceeeeeeeeeeeeeeeeeaee
30. s the data views This window will contain the graphs for both swept and trend views as will as a text view 5 Toolbars The toolbars appear as one row of buttons below the menu bar and immediately above the recipe list Each toolbar can be may be hidden by selecting View Toolbars from the menu bar and un checking those you wish to hide The default setting is for all toolbars to be visible 5 1 Default Toolbar SEBSB ESs 4AB tbe The default toolbar contains SEBEMa gg twenty icons for viewing data ta Open File opens a file using the standard dialog Multiple files may be opened by holding Shift or CTRL when selecting multiple files from the file open dialog imi Quick Open opens the data file highlighted in the file list Process Eye Professional Recall SP104010 101 August 2005 6 lt fF 7 Roo Bw p m i m i Gy j Open Previous opens the previous data file in the file list and closes the current one The display settings do not change as you move from one file to the next Unlock Views allows changes to views when using the open previous or open next method of opening a file By default views are locked when opened in this manner Open Next opens the next data file in the file list and closes the current one The display settings do not change as you move from one file to the next Disk Store saves any changes to the current active recipe to disk Close File closes the current active file Close All File
31. spheric Inlet 1 Factor 1 00 Inlet 2 Factor 1 00 Full scale amps 2 00e 006 Electronic Gain 1 1 0 Electronic Gain 2 100 0 Electronic Gain 3 20000 0 Faraday gains 3 Multiplier gains 2 Detector type il iux I O connection o Maximum mass 100 SEM identification 1500 Filament type 0 Mains frequency O Peak resolution 32 Peaks per amu 1 Process Eye Professional Recall SP104010 101 August 2005 11 Data Acquisition Settings TaAcquisition Settings 1 Data Ser Dataseri hata Stream Data Measurement HarCharti hacquisition mode 0 Channel count 100 Tnstrument LAY6 OO199002 First mass 1 00 Last mass 100 00 Accuracy 5 Detector Faraday Sensitivity A mbar 1 50e 006 Column Headings Selecting this option includes the acquisition setting used on the measurement Note These are the settings for each measurement if there is more than one measurement there will be a separate section for each Full scale reading mbar 1 336 002 Electronic gain ID 2 Detector gain 1 00 Ion Source Standard Electron Energy Emission current 1 00 Electron energy 40 0 Ton energy 7 00 Extractor voltage 20 0 Detector woltage 600 0 Filament 1 Alarms and Events Events Timer Duration Severity Eyen Texti Text2 28 02 2003 14 01 34 hja Yellow Calibration Sensitivity 28 02 2003 14 01 54 n a
32. t least one data file is open Process Eye Professional Recall SP104010 101 August 2005 23 The Alarm Log view E3 Mon000001 Alarms Shove an Alarms and Events SS The alarm log view displays the contents of the 28 02 2003 14 01 20 Data Files Storing data to D Process Eye 20005 a la rm log 28 02 2003 14 01 34 Calibration Sensitivity Calibration Failed Factor DataSet 28 02 2003 14 01 54 Calibration Sensitivity Calibration Failed Factor DataSet 28 02 2003 14 02 13 Calibration Sensitivity Calibration Failed Factor DataSetl 28 02 2003 14 02 34 Calibration Sensitivity Calibration Failed Factor DataSet 28 02 2003 14 02 54 Calibration Sensitivity Calibration Failed Factor DataSet 28 02 2003 14 03 14 Calibration Sensitivity Calibration Failed Factor DataSet 28 02 2003 14 03 34 Calibration Sensitivity Calibration Failed Factor DataSet 28 02 2003 14 03 54 Calibration Sensitivity Calibration Failed Factor DataSet 28 02 2003 14 04 14 Calibration Sensitivity Calibration Failed Factor DataSet 28 02 2003 14 04 35 Calibration Sensitivity Calibration Failed Factor DataSet 28 02 2003 14 04 55 Calibration Sensitivity Calibration Failed Factor DataSet 28 02 2003 14 05 14 Calibration Sensitivity Calibration Failed Factor DataSet PRAIA ZANE 14 05 AA Malihratinn Sensitivity Calibration Failed Factor DataSet eee ll Slarmoe ard Everts Dated Red an
33. the text file C Program Files Spectra RGA Applications Workstation Common Gases txt Optionally enter a measurement name or leave blank for auto selection when this view is used Channel Name or Alias IT est Gas lt lt Auto gt gt v This can be edited or added to in order to give a more accurate description of the users system In the above example Mass 2 1 Atomic hydrogen Hydrogen has been edited to read Test Gas 4 Helium Carbon Nitrogen 2 CH2 group Atomic nitrogen CH3 group Methane 2 Cancel Close All Windows Window Help EA New Trend Window To close all open windows select Close All Windows from the Windows Window pull down or use the icon lose All pi Arrange All windows Arrange All Windows To arrange all open windows from all the open data files Window Help New Trend Window E Close All Windows Smt amp Select Arrange All Windows from the Window pull down J and then choose one of the standard windows arrangement Arrange All Windows Cascade methods H Bring File To Front Tile Horizontally ii Cascade File fe Tile File Horizontally Tile Vertically Arrange Icons Process Eye Professional Recall SP104010 101 August 2005 27 To arrange windows on an active File Wrdow Het bec Mew Trend Window To arrange the windows on the currently active file choose from the four E Close All Windows options shown 3 Arrange A
34. uotes ASCII file e toa fixed text format suitable for replay by a Virtual RGA see the Process Eye manual Load the file into memory by opening it using one of the standard methods described above Then choose File Save As from the menu If you want to save the file as a Virtual Vacuum Profile file vvp for replay by a Virtual RGA be sure to select the appropriate File Type from the drop down list Wote this feature requires at least v 5 21 of Recall This will cause the Export Data to File dialog to appear E Data To Fil xport Bata lo Fie Here you can specify which data is exported the Filename options are explained below lteme to Include Measurements W General information Data Set All sets k M Data acquisition settings Data Stream fan streams W Alame and events iv Data Measurements i Include column headings All measurements i Include scan number W Include scan time Millisecond data if Annotations User Records Cancel i General Information Pe ea re eee Selecting this option includes the header and Recipe Name C Process Eye Recipes Barchart Interactive SI r instrument information in the text file Recipe Date 15 09 2003 272 16801 Software version Process Eye V3 File version 7 Instrument 1 Instrument Name MiniLab Serial number LM 6 00199002 application atmospheric Inlet Mini Lab Sensor Standard Enclosed Source Inlet system Atmo
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