User`s manual MDP 5011
Contents
1. M DP 5011 User s Manual GB 00725 Edition 04 Aug 11 G 02602 Edition 02 July 11 B 300 Pump connection to an installation It is absolutely necessary to install the pump according to the following installation specifications to secure the user and the equipment The adixen constructor declines any responsibility if the pump installation is not designed in accordance with the installation specifications described in this section The connection of the The dimensions of the connection parts should be study carefully pump to the reduce the following as much as possible installation must be dimensions a and b the flexibility of the connection plate sufficiently rigid the overhang c between the pump and its anchor point Support plate Bellows Rigid support The equipment attachment devices should be sufficiently rigid to prevent potential risks in the event of failure of a rotary component or a violent shock on the pump exceptional phenomena For this use the rotary flange attachment holes If the inlet flange is attached with claw clamps use 6 claw clamps for flange lt DN 100 8 claw clamps for flange DN 100 adixen Vacuum Products M DP 5011 User s M anual 1 4 B 300 Pump connection to an installation The pump can operate in any position Cooling Ambient operating temperature recommendations and MDP with natural convection or air cooled T 35 C 95 F temperature limits2. P Nx 4equ ensseJd ja UT L0 300 l c0 3 A p ds 6uiduuing 00 L 0 300 l V0 300 1 UH NIMM B H 70 3098S L0 UOJIp3 970 D 0 sr S I peeds Burdund 172 adixen Vacuum Products MDP 5011 User s Manual G 10 4equ eunssaJd 19 u vo ides L0 uonip3 920 5 Pumping curves c0 300 l L0 300 L 00 300 1 L0 300 L c0 300 l 0 300 l v0 300 l c0 300 l a oH mm mm ZN m p LO 400 1 9 00 300 1 9 9 9 L0 300 l d 9 O c0 300 l s um s 0 300 l 4w dAW UM LLOS dAW 9184 MO WDS MO J adixen Vacuum Products M DP 5011 User s Manual 2 2 GB 00956 Edition 08 Juin 11 G 200 Safety questionnaire Procedure for returning adixen products You wish to return an adixen product for maintenance The equipment will be dismantled and possibly cleaned by a technician from our Service Centre In compliance with European Community s L360 directives French labor code L231 R231 and Federal OSHA Safety Standard 1910 1200 adixen Vacuum Products requires this form to be completed to preclude the potential health risk to its service personnel
3. It is recommended for use at ambient temperature between 95 and 122 F or in continuous use at high pressure adixen Vacuum Products M DP 5011 User s M anual 1 2 2 2 Connection cont Connection to the water line Water flow adjustment Water cooling connection B 340 When the air cooling device must be replaced by a water cooling device proceed as follows Install the cooling ring 1 on the MDP housing in the specific groove and put it facing the water line Screw the 2 water fittings 2 to the cooling ring and orientate them Secure the device by screwing the hose clamp 3 with a screwdriver the cooling ring does not rotate Use a flexible or a rigid 6 x 8 mm hose to connect one of the water fittings to the water line The user must provide some method of controlling water flow Use a flexible or a rigid 6 x 8 mm hose to connect the other fitting to the drain Control the flow of water depending on ambient temperature and water temperature using the following graph Water flow l mn 1 4 1 2 0 8 0 6 0 4 0 2 104 122 Ambient temperature F adixen Vacuum Products M DP 5011 User s Manual G 02603 Edition 03 July 11 G 02605 Edition 03 July 11 Mechanical connection Electrical connection Functional limits B 350 Air cooling kit connection When the water cooling kit must be replaced by
4. MDP water cooled T 50 C 122 F Pumping conditions In cases of high pressure pumping or frequent cycling the pump temperature is higher so water or air cooling are recommended 2 4 adixen Vacuum Products M DP 5011 User s M anual G 02602 Edition 02 July 11 G 02602 Edition 02 July 11 B 300 Pump connection to an installation Pump line connections Do not expose any part of the human body to vacuum The product is supplied with the inlet and exhaust sealed Remove these blanking plates when you are ready to connect the product on your vacuum system As well as don t operate the product unless the inlet and exhaust are connected to a vacuum and exhaust pumping line Make sure all parts and chambers connected to the inlet exhaust and purge of the maglev pump can withstand a negative pressure of 1 bar below atmospheric pressure and that they are impervious to damage from vacuum seals etc Risk of injury by cutting Contact with the pump rotor cell may cause cuts Alternatively protective gloves may be worn when servicing the product For safety reasons use accessories on the inlet and exhaust lines whose materials and sealing properties are compatible with the gases being used Pollution risk Unclean and contaminated component can increase the pumping down time Use only dry and clean pipe lines and wear glooves to make the pump connections After connecting the product to the pumping l
5. 401 Pump dimensions A 510 MDP 5011 accessories START UP B 100 Safety instructions B 300 Pump connection to an installation B 320 Nitrogen purge connection MDP5011CP B 330 Venting valve connection B 340 Water cooling connection B 350 Air cooling kit connection OPERATION C 100 Safety instructions for product use C 150 Molecular pump operation in a pumping application MAINTENANCE D 100 Precautions before maintenance D 300 MDP 5011 pump maintenance frequency MAINTENANCE INSTRUCTIONS E 200 MDP 5011 pump lubrication MAINTENANCE COMPONENTS F 000 Spare parts Instruction of use F 100 MDP 5011 first level of maintenance APPENDIX G 010 MDP 5011 pumping curves G 200 Safety questionnaire 1 2 MANUAL PART NUMBER 062 199 EDITION 14 JULY 11 Co nte nts Translated from original version User s manual Molecular pumps MDP 5011 Before switching on the product study the user s manual and make sure you follow the safety instructions You can recognise these by the Caution Warning and Danger symbols Good practice tips and manufacturer s recommendations are in a blue box The performance and operational safety of this product are guaranteed provided it is used normally in the operating conditions defined in this manual It is the customer s task to train operators to use the product if they do not speak the language the manual is written in ens
6. At the pump exhaust the gases are evacuated to the atmosphere by a roughing pump Since the MDP compression rate is set by the design the MDP limit pressure is given by that of the roughing pump used The MDP 5011 pump work with the ACT 100 or ACT 200 TH controller Refer to the corresponding Controller User s Manual to used the pump adixen Vacuum Products M DP 5011 User s M anual 1 1 G 02596 Edition 02 March 06 MDP 5011 A 210 The different version operating principle The rotor a smooth drum with a row of blades at the top is mounted at the end of a shaft turning in two high precision ball bearings lubricated with grease and located in the low vacuum area All pumping elements are aluminium The pump is rotated by a single phase electronically controlled electric motor The rotor is mounted directly on the shaft while the stator is attached to the pump body INLET Je SHAFT IMPELLER ROTOR HOUSING DRAG PUMP MOTOR DYNAMIC SEAL BALL BEARING a i sr De EXHAUST MOTOR HOUSING ELECTRICAL CONNECTOR MDP 5011 standard molecular pump Cross section drawing adixen Vacuum Products M DP 5011 User s M anual 1 2 2 2 A 210 The different version operating principle MDP 5011 CP The MDP 5011 CP is specially designed for aggressive environments version for Ball bearings and motor are isolated from process gases by a corrosive gases dynamic inert gas purge system MD
7. some semi conductor processes If following inspection and quotation customer elects to not proceed with repair he will be subject to service fee to cover product decontamination disassembly cleaning and evaluation costs Please to fill in the following form print it and attach it to the product before shipping to the service repair office closest to you WARNING In the event of chemical contamination please indicate the following gases or substances Substances produced Exhaust Gases by reaction A introduced Reactor B B C Pump or pump unit Gases or substances introduced into the reactor and which may be found at the exhaust A Gases or substances resulting from the reaction or process B Gases or substances that may possibly be formed inside the pump due to a thermodynamic or chemical reaction condensation deposition precipitation etc C e Precautions need to be taken before transferring contaminated products Please contact Service Center for recommendations adixen Vacuum Products MDP 5011 User s Manual 1 2 QUESTIONNAIRE DE SECURITE G 200 SAFETY QUESTIONNAIRE Ce questionnaire est t l chargeable sur le site www adixen com This questionnaire can be downloaded from www adixen com Proc dure de retour des produits ADIXEN Ce formulaire ne peut tre rempli et sign que par une personne habilit e Procedure for returning ADIXEN products This questionnai
8. that can occur when receiving disassembling or repairing potentially contaminated products Equipment returned without this form completed and secured to outside of package will be returned to customer unprocessed Equipment must be drained of fluids and residue securely packaged and shipped prepaid Concerning the closing of the ports inlet amp outlets of the product metallic airtight blank flanges should be used if toxic or copper gases have been pumped We wish to draw your attention to the following points e The risk may be of the following nature Chemical Danger to health risks of explosion fire risks for the environment Please indicate the chemical formula and name of the gases or substances that have been in contact with the equipment pump or detector Biological In case of contamination such as pathogenic germs micro organisms bacteria viruses etc classes 1 to 4 and group E our Service Center is currently unable to decontaminate and recycle such material without risk to the safety of our staff Please contact us before sending the product to the Service center Radioactive In case of contamination our Service Center is currently unable to decontaminate and recycle such material without risk to the safety of our staff Please contact us before sending the product to the Service center Copper contamination Copper based by products formed in sputtering or etching processes are considered as a poison in
9. 1 works with the ACT 100 or ACT 200 TH controller refer to the ACT User s manual This user s manual includes only the instructions to connect the hybrid turbo pump to the equipment Refer to the controller user s manual to power and use the pump chapter B C and D adixen Vacuum Products M DP 5011 User s M anual 1 2 2 2 MDP 5011 Molecular pumps This product complies with requirements of European Directives listed in the Declaration of Conformity contained in G 100 of controller s manual Copyright Intellectual property The use of adixen products are subject to copyright and intellectual property rights in force in any jurisdiction All rights reserved including copying this document in whole or any part without prior written authorization from adixen Vacuum Products Specifications and information are subject to change without notice by from adixen Vacuum Products adixen Vacuum Products M DP 5011 User s Manual G 02594 Edition 03 July 11 G 02617 Edition 03 July 11 MANUAL PART NUMBER 062 199 EDITION 14 JULY 11 Translated from original version Chapter A Chapter B Chapter C Chapter D Chapter E Chapter F Chapter G adixen Vacuum Products MDP 5011 User s M anual Contents User s manual Molecular pumps MDP 5011 INTRODUCTION A 200 MDP 5011 molecular pump overview A 210 The different version operating principle A 400 MDP 5011 technical characteristics A
10. M DP 5011 User s M anual 1 1 G 02608 Edition 02 March 06 C 150 Molecular pump operation in a pumping application Study the safety instructions for product use see C700 First pump start up ACAUTION When the pump is new or after a prolonged shut down of 3 months or more under normal storage conditions it is recommended to operate the pump at atmospheric pressure for 10 minutes inlet and exhaust open to atmosphere in order to ensure a slow rotation and grease re distribution in the pump ball bearings DANGER The access to the rotor of a molecular pump with an unconnected inlet is dangerous Similarly if the pump is not switched on it may be driven by another pump in operation risk of injury Example of a single The chamber and pipes are at atmospheric pressure the pumps are valve assembly switched off the valves are closed Start up start up the MDP cooling system open the E1 valve start up the primary pump start up the MDP pump Chamber to be evacuated Stop close E1 stop the primary pump stop the MDP pump stop the cooling system Roughing pump adixen Vacuum Products M DP 5011 User s M anual 1 2 Example of a 3 valve assembly example 1 Example of a 3 valve assembly example 2 To refill the chamber 2 2 With air To stop pumping C 150 Molecular pump operation in a pumping application The chamber and pipes are at atmospheric
11. Original Translated from original version A PASSION FOR PERFECTION adi en MDP 50 by PFEIFFER VACUUM Li MDP 5011 Molecular pump User s manual PFEIFFER E VACUUM aditen by PFEIFFER VACUUM G 02594 Edition 03 July 11 Dear customer You have just purchased an adixen Molecular pump We would like to thank you and are proud to count you as one of our customers This product has benefited from adixen Vacuum Produst s many years of experience in the field of molecular pump design To guarantee high performances and full satisfaction from this equipment we suggest that you study this manual before any intervention on your pump particularly the chapter on installation and start up MDP 5011 Molecular pumps adixen mors by PFEIFFER VACUUM This product is designed to gererate vacuum by pumping on gases but no liquids neither solids It is dedicated for running in industrial and laboratory environments The products must not operate in an area with risk of explosion Consult us to study a solution APPLICATIONS Fast evacuation of small volumes Interseal pumping Regeneration of cryopumps Leak detection Spectrometry Production of electronic tubes INSTRUMENTATION Mass spectrometry Surface analysis BENEFITS The design of the MDP pump offers the reliable and the robustness with performances adapted to numerous applications CONTROLLER The MDP 501
12. P 5011 CP can operate with the same controller than the MDP 5011 standard INLET n H M EK ROTOR DRAG PUMP B HOUSING MOTOR NN iu oL MOTOR HOUSING PURGE SYSTEM i DN16 DYNAMIC SEAL EXHAUST ELECTRICAL CONNECTOR MDP 5011 CP Molecular pump Cross section drawing adixen Vacuum Products M DP 5011 User s Manual G 02596 Edition 02 March 06 G 02599 Edition 03 July 11 A 400 Technical characteristics Characteristics Units Inlet flange Exhaust flange Rotation speed tr mn Starting time 0 to 27000 tr mn mn Pumping speed Compression rate MDP 5011 CP DN 63 ISO K DN 16 ISO KF 27 000 Ui Ultimate pressure CP with purge 50 sccm Natural convection Air cooling Maximum pressure at inlet in continuous operation Water cooling Maximum pressure at Natural convection exhaust in continuous Air cooling operation Water cooling Natural convection 5 to 35 C 41 to 95 F 5 to 35 C 41 to 95 F 5 to 50 C 41 to 122 F 2 3 kg 3 2 5 IP 20 indoor use up to 2000m 6562 pied 80 for temp up to 31 C 87 F decreasing linearly to 50 at 40 C 104 F rate 2 Ambient operating temperature C Air cooling MEN tr mn mn NZ He L5 CO CS He COS mbar NNI Environmental conditions M Ingress Protection W Use of the product E Altitude Maximum relative humidity Pollution degree Ac
13. Q95 h11 93 75 h0 45 Fan 84 5 um D 0 0 0 000 DOPSOGDOO00 Q 00 MoM eM O95 93 75 adixen Vacuum Products MDP 5011 User s M anual A 401 Screwing by 4 threaded holes diam 0 76 4 on diam 3 46 88 5 63 52 12 mm 0 47 2 05 for disassembling Power supply Connector 3 3 G 02598 Edition 03 July 11 Screen filter 2 5 mm Compact filter Electrical venting valve Cooling kit A 510 Pump accessories This filter protects the pump P N against solid particles gt 2 5 mm DN 63 ISO K 063117 The filter stops particles P N gt 20 microns and is used in the event of high densities of dust or MILES ias 062912 risk of implosion when pumping tubes or lamps This valve is used to refill the pump with air after pump stopping or after a power failure P N of electrical venting valve compatible with ACT 100 Electrical venting valve DN16 ISO KF 100 V 50 60 Hz 063165 Electrical venting valve DN16 ISO KF 115 V 50 60 Hz 063171 Electrical venting valve DN16 ISO KF 200 V 50 60 Hz 063173 Electrical venting valve DN16 ISO KF 220 V 50 60 Hz 063169 Electrical venting valve DN16 ISO KF 240 V 50 60 Hz 063172 It is easy to install or replace a cooling kit by another Water cooling kit 062184 Air cooling kit 110 V ACT 100 062187 Air cooling kit 220 V ACT 100 062186 Air cooling kit 12 V ACT 200 TH 118809 adixen Vacuum Product
14. al formula Ces produits pr sentent un risque de nature These susbstances present the following risks Chimique Chemical Toxique Toxic Oui Yes Non No Canc rig ne Carcinogenic Oui Yes Non No Combustible Combustible Oui Yes Non No Corrosive Corrosive Oui Yes Non No Explosive Explosive Qui Yes Non No Biologique Biological Oui Yes Non No Radioactive Radioactive Oui Yes Non No Autre Other Vous reporter ventuellement a la page pr c dente See preceding page if necessary SIGNATURE Vous avez r pondu Oui a une des questions pr c dentes Je confirme que seules les substances pr cis es ont t en contact avec l quipement sus mentionn et que les proc dures de pr paration d emballage et de transport ont t respect es You have replied yes to one of the above questions I confirm that only the substances mentioned have been in contact with the above equipment and that the preparation packing and transport procedures have been complied with R ponse Oui fermeture tanche de l aspiration et du refoulement Reply Yes seal inlet and outlet ports with blank flanges POY EDEN cT TT Fonction POSITION i aicscontncantouscrtwiewmensataadauicbbuseuvenzancabavicbniuesiormeuanben Signature autoris e Authorised signature suus Tampon Cachet Stamp Seal Explication d taill e Detailed explanation Si Oui
15. an air cooling device proceed as follows Install the fan on the pump housing by a bracket This last is assembled on the pump rear tape with 3 screws M4 refer A401 page 313 Connect the contact plug of the minus wire to a fan assembling screw With the ACT 100 controller Connect the fan cable to the K connector of the controller With the ACT 200 TH controller Power the fan with the provided 12V connector on the pump controller cable connection The fan provides sufficient cooling for ambient temperature up to 95 F If the ambient temperature is above 95 F the user should install a water cooling collar It is recommended for use at ambient temperature between 95 and 132 F or in continuous use at high pressure adixen Vacuum Products M DP 5011 User s M anual 1 1 G 03068 Edition 02 July 11 C 100 Safety instructions for product use When the pump is new or after a prolonged shut down of 3 months or more under normal storage conditions it is recommended to operate the pump at atmospheric pressure for 10 minutes inlet and exhaust open to atmosphere in order to ensure a slow rotation and grease re distribution in the pump ball bearings Do not operate the pump until it is securely fixed If the pump seizes the stored energy of the rotor may cause further damage and injury to people See B 300 Before to use the controller make sure that the mechanical and electrical connections have been made
16. and if required for the used gases a breathing mask Ventilate the premises well Do not dispose of residue in the usual waste disposal network but x have it destroyed by a qualified organization oe Install the inlet and exhaust blanking plates thus delivered with the E pump The outside of the appliance and control box can be cleaned with a lint free wiper Avoid using cleaning products that deteriorate printed surfaces and self adhesive labels All other cleaning operations must be done by our service centers Decontamination product dismantling According to the regulations 2002 96 CE about Waste of electrical and electronical equipments and 2002 95 CE about Restriction of Hazardous substances the manufacturer provides a recycling paid service for the end of life of waste electrical and electronic equipment Any obligation of the manufacturer to take back such equipment shall apply only to complete not amended or modified equipment using adixen Vacuum Products original spare parts delivered by adixen Vacuum Products containing i e all its components and sub assemblies This obligation will not cover the shipping cost to an adixen take back facility Before returning the product fill in the safety form available in appendix of the user s manual Attach it to the product before shipping to the service repair office closest to you How to contact us The partial and full overhaul must be performed by man
17. cording to Pneurop Specifications The 2 maximum pressures can not occur at the same time Note the MDP 5011 pump must not be baked The compression rate of the MDP 5011 CP is lower than this of the standard MDP 5011 pump A part of the dynamic seal allows the protection against corrosion adixen Vacuum Products M DP 5011 User s M anual 1 1 G 02600 Edition O1 Sept 04 A 401 Pump dimensions MDP 5011 DN 63 ISO K Dimensions mm inch cooled by natural convection Screwing by 4 threaded holes 30 30 diam 0 76 4 on diam 3 46 88 Exhaust DN 16 ISO KF for disassembling O95 95 75 Power supply Connector adixen Vacuum Products MDP 5011 User s M anual 125 A 401 Pump dimensions MDP 5011 DN 63 ISO K Dimensions mm inch water cooling 109 1 Screwing by 4 threaded holes diam 0 76 4 on diam 3 46 88 Orientable 360 PS Je ST CN au lt 5 i 3 Exhaust DN 16 ISO KF N INLET DN 63 ISO KF A ks Q95 h11 23 75 h0 43 5 63 52 12 mm 0 47 D for disassemblin Water cooling connections for 2 05 g 0 23 x 0 31 6x 8 mm plastic tubing or copper tubing O95 93 75 106 5 24 19 c Power supply Connector 2 3 adixen Vacuum Products M DP 5011 User s M anual G 02600 Edition 01 Sept 04 G 02600 Edition O1 Sept 04 Pump dimensions MDP 5011 DN 63 ISO K Dimensions mm inch Air cooling Exhaust DN 16 ISO KF INLET DN 63 ISO KF
18. erforming a maintenance operation stop the pump When the pump is at rest switch off the pump by setting the controller main switch to 0 wait 5 minutes before disconnecting the main cable If this last one remains connected some components will still be energized Risk of injury by cutting The inlet of the pump musn t be disconnected as long as the rotor is moving and without having disconnecting the power line cable After pumping on corrosive or toxic gases it is strongly recommended to seal the pump with blanking plates in case of return to the repair service centers Refer to F100 for connecting accessories A DANGER Risk due to pumping conditions Remaining process gases in the pump may cause severe injury or death Before removing the pump from the installation continue N2 flow from the process tool for 30 min Nitrogen pressure and flow rate should be identical to the programmed values during process DANGER During pump removal operator could be in contact with process residues on the exhaust which could cause severe injury or death Ask your safety department for instructions according to the local regulations A DANGER Chemical supplies coming from the tool as well as the water and the nitrogen need also to be locked out tagged out adixen Vacuum Products M DP 5011 User s M anual 1 2 D 100 Safety recommendations related to maintenance Users are advised Wear gloves protective glasses
19. f the pump is not switched on it may be driven by another pump in operation Always connect the pump inlet port before starting the pump Risk of tilting although the product meets EEC safety regulations topple angle 10 it is advisable to guard against the risk of tilting during handling installation and use The products are factory tested to ensure they will not leak in normal operating conditions It is the user s responsibility to ensure this level of leak tightness is maintained The product is supplied with the inlet and exhaust sealed These are to prevent foreign bodies entering the pump during transport and storage Do not remove these blanking plates until you are ready to install the product on the vacuum line When the pump is new if it is going to be put into storage keep it in its packaging in the following conditions ina clean and dry environment atan ambient temperature between 5 C and 40 C fora period of 2 years maximum with a running period every 6 months refer to C700 If you need to store a pumping unit which has run on clean process don t forget to purge the pump with N2 Seal the inlet exhaust and purge ports with blanking plates refer to F700 Don t store the pump more than 6 months in a clean and dry environment Never store a pump which has been used on corrosive process Return it to an adixen repair service center refer to G200 I 4 adixen Vacuum Products
20. from the roughing pump If the user want to make a venting he must press the STOP switch on the ACT 100 controller Disconnect the power cable on the ACT 100 controller Refer to controller User s Manual adixen Vacuum Products M DP 5011 User s M anual 1 1 G 02603 Edition 03 July 11 B 340 Water cooling connection Water characteritics In order to limit corrosion and motor cooling circuit clogging it is recommended to use cooling water with the following characteristics Treated soft water or non corrosive industrial water pH between 7 5 and 11 Hardness 7 milli equivalent dm 350 mg l of CaCO3 calcium carbonate 35 f French degree Resistivity 1 500 Q cm R 20 000 Q cm Particles maximum size 0 2 mm Solid pollution 100 mg dm Maximum pressure 7 bar Temperature from 50 to 77 F 10 to 25 C due to limestone deposition which may necessitate in the worst case a complete cleaning and overhaul of the cooling circuit CAUTION The use of uncontrolled city water can lead to water circuit clogging The presence of micro organisms like aquatic weed and micro biological substances like bacteria can lead to cooling problem in the pump Appropriate water treatment system need to be use to prevent such growth of micro organisms Connection Provide a water inlet pipe and a tap to adjust the flow rate It consists of a water circulator ring which can be equipped on the MDP housing
21. igned for use on process tools and integration with the process tool EMO Check that the pump is correctly connected to the equipment emergency stop device Electric shock hazard Some components have capacitors charged to over 60VDC or motor operating as generator When power is switched off they keep their charge for a time Take precautions concerning the access to the connector pins Wait at least 5 minutes after the turbopump comes to complete stop before starting any work on the product Fire protection The pump is not intended to be installed on process containing flammable materials or in hazardous atmosphere The pump body is made of aluminium The main part enclosure and the majority of the non metallic parts mainly electrical components and frequency converter have a fire rating of UL94VO and or are UL approved Smoke hazard due to the presence of electrical components The smoke hazard is low due to the use of approve components and the containment smoke in the pump cover Ensure that the product is connected to an electrical installation in compliance with the local and national safety requirements equipped with electrical protection fuses circuit breaker which has a suitable earth ground point properly connected When units containing control circuits are equipped with dry contact outputs it is the responsability of the customer to use these outputs in compliance with extra low voltage
22. ine check for leaks along the entire to ensure proper connections adixen Vacuum Products M DP 5011 User s M anual 3 4 B 300 Pump connection to an installation Inlet Install the screen filter or compact filter accessory on the pump connect the pump to the installation Inlet flange DN 63 ISO K CAUTION It is recommended to install an isolation valve between the chamber to allow chamber venting without stopping the pump Exhaust Connect the Air inlet valve accessory to the pump Connect the pump to primary pumping circuit Exhaust flange DN 16 ISO KF When pumping on corrosive gases or aggressive gases the gas can cause injury or death The exhaust of the turbopump must be connected to roughing pump line compatible with process gases It is highly recommended to install an isolation valve between the pump and the roughing circuit 1 Different connection accessories can be found in the Manufacturer s catalog 4 4 adixen Vacuum Products M DP 5011 User s M anual G 02602 Edition 02 July 11 G 03078 Edition 02 July 11 B 320 Nitrogen purge connection MDP 5011CP For proper protection from reactive gases and particles the inert gas purge system must be used continuously Nitrogen For maximum performance a filtered dry nitrogen supply with the characteristics following characteristics is required H O concentration lt 1 ppm O concentration 1 ppm dew point lt 22 C pa
23. installation and security standards NJ 4 adixen Vacuum Products MDP 5011 User s M anual GB 00725 Edition 04 Aug 11 GB 00725 Edition 04 Aug 11 B 100 Safety instructions for pump and controller installation The user and or OEM are ultimately responsible for operating the equipment in a safe manner The manufacturer has no control over the types of gases exposed to this pump This is the user and or the OEM s responsibility to follow the necessary safety requirements Frequently process gases are toxic flammable corrosive explosive and or otherwise reactive Toxic gases can cause serious injury or death Operators and users must take the appropriate safety recommendations to prevent injury Consult the responsible department for instructions and safety information Hazardous gases through the pump can cause serious injury or death Its mandatory by regulations to connect the turbomolecular pump s exhaust to a rough pumping line compatible with the process gases Check that pump is correctly connected to the equipment B300 A DANGER Pump connection to the installation It is strongly recommended to secure the turbopump installation to prevent any safety hazard to the user in standard operating conditions B 300 CAUTION The units containing control circuits are designed to guarantee normal safety conditions taking their normal operating environment into account use in rack In specific cases of
24. move the red jumper Distribute the dose of grease in 2 diametrically opposed points until the syringe plunger comes to a stop against the black jumper Introduce the lubrication syringe needle into the drilled screw located at the center of the rotor until it comes to a stop against the screw head Keep the syringe pressed down to the bottom of its housing throughout the operation Remove the black jumper from the syringe and introduce the grease until the plunger comes to a stop Remove the syringe Reassemble the end cap 12 and the circlips F The relubrication operation is complete Execute the pump running see Controller User s Manual E300 gt adixen Vacuum Products M DP 5011 User s M anual 3 3 GB 01390 Edition 04 May 09 Replacement of parts and use of non genuine parts F 000 Spare parts Instructions of use Our products are designed to comply with current EC regulations and guarantee optimal operating conditions with maximum safety conditions for the user Any modification of the product made by the user is liable to lead to non compliance with the regulations or even to put into doubt the performance of the product and the user s safety Replacement of defective components with parts that are not genuine jeopardizes the initial safety conditions of the equipment In such cases the EC declaration of conformity becomes null The manufacturer withdraws responsibility for
25. p during these operations Lubrication must be performed with the pump switched off The MDP contains two bearings which must both be reloaded with grease at each relubrication period The syringe is equipped with two jumpers with different widths and colours red and black used to proportion the grease accurately for each pump bearing see figure page 2 3 Lubrication of bearing on the pumping cell side black jumper Lubrication of bearing opposite the pumping cell side red jumper adixen Vacuum Products M DP 5011 User s M anual 1 3 E 200 MDP 5011 pump lubrication RELUBRICATION PROCESS A OWN Bo EX L KE J TXT DA _ FX AN T d J SEN up ESS a5 n VY O N c TEE wl are tgan T ce Black adixen Vacuum Products M DP 5011 User s Manual 2 3 G 02611 Edition 03 July 11 Bearing lubrication Bearing opposite the pumping cell Bearing on cell side E 200 MDP 5011 pump lubrication Stop the MDP pump and the primary pump Vent the MDP pump to atmospheric pressure Remove the circlips F Tighten a screw M4 in the thread of the end cap 12 and remove it ntroduce the syringe equipped with its needle into a hole of the ring 4 and re
26. pressure the pumps are off the valves are closed Pre evacuation of the chamber start up the primary pump start up the MDP cooling system open the E2 valve Chamber to be evacuated When the pressure in the chamber is 1 mbar the secondary pumping can be started up close E2 start up the MDP pump open E1 and E3 Roughing pump The chamber in atmospheric the pumps are operating the valves E2 and E3 are closed the cooling circuit is operating Pre evacuation of the chamber close E1 and open E2 The pressure in the chamber is x 1 mbar close E2 open E1 and E3 Close the E3 valve E1 remains open and open an air inlet on the chamber Pumps are isolated by closing the valves close the E3 valve MDP pump and primary pump rotating stop the MDP pump close the E1 valve stop the primary pump stop the cooling circuit adixen Vacuum Products M DP 5011 User s Manual G 02608 Edition 02 March 06 G 02610 Edition 03 July 11 D 100 Safety recommendations related to maintenance Maintenance must be performed by a skilled maintenance operator trained in the relevant health and safety aspects EMC electrical hazards chemical pollution etc Isolate the product from all energy sources mains electricity compressed air water gas before starting work A WARNING Standard precautions before any maintenance operations Before p
27. r vacuum de www pfeiffer vacuum de adixen Vacuum Products 98 avenue de Brogny 74009 Annecy Cedex France T 33 0 4 50 65 77 77 F 33 0 4 50 65 77 89 info adixen fr www adixen com Ed 14 Date o7 11 P N o62199 HMM MIT IM TA
28. re is only to be filled in and signed by an authorized person SOCIETE COMPANY Nom Soci t Name of company eeeeeeeeeeenennnnnee Nom personne Name of person ueeeeseeeee eene Qui remplit ce formulaire Who has filled in questionnaire Fonction POSITION viitctecceccccccececececnceecececececececncneeeesenacerensnnsneasetasass N T l TO N Fax Fax NO esee vea nbn aki e E DR ES a E E RR DER n E RR RO EN Pour renseignements ventuels sur les produits utilis s for any information on products used INTERVENTION SERVICE EQUIPEMENT EQUIPMENT CSCI DUON mr N de S rie Serial no lseeeiiseseeesseeene nennen Type de proc d Type of process eeeeeeeeeeeeeeeeeee nenne Pour lequel l quipement est utilis for which equipement is used Date de l exp dition Date of consignment ssssss Intervention souhait e R vision r paration Service required overhaul repair etc Type d anomalie constat e Type of anomaly observed PROCEDE CUIVRE COPPER PROCESS Produit utilis sur un proc d Cuivre Product used on a Copper process ASPECT SECURITE SAFETY ASPECT Oui Yes Non No L quipement mentionn ci dessus a t en contact avec les produits suivants The above equipment has been in contact with the following substances nom et formule chimique name and chemic
29. risque de nature f Yes what type of risk Je confirme que le mat riel sus mentionn n a t en contact avec aucune substance dangereuse et a t vid de son huile Si applicable confirm that the above equipment has not been in contact with any dangerous substance and has been emptied of oil If applicable R ponse Non sans risque Reply No no risk NOM anie ooo dade ae ee eee een ee ere aera ED I eee eee eee POMICELONN ES POS Sn nee Ud CR xPM EHE M MUS De D DN Signature autoris e Authorised signature ssss Tampon Cachet Stamp Seal adixen Vacuum Products 98 avenue de Brogny B P 2069 74009 ANNECY CEDEX Tel 33 4 50 65 77 77 Fax 33 4 50 65 75 77 Web site www adixen com 2 2 adixen Vacuum Products M DP 5011 User s Manual GB 00956 Edition 08 Juin 11 wv A PASSION FOR PERFECTION PFEIFFER VACUUM gt Leading Dependable Pfeiffer Vacuum stands for innovative and custom vacuum Customer Friendly solutions worlwide For German engineering art competent advice and reliable services Even since the invention of the turbopump we ve been setting standards in our industry And this claim to leadership will continue to drive use in the future You are looking for a Pfeiffer Vacuum Products GmbH perfect vacuum solution Berliner Strasse 43 Please contact us 35614 Asslar Germany T 49 6441 802 0 F 49 6441 802 202 Info pfeiffe
30. rticles lt 1m oil lt 0 1 ppm pressure range 1 to 1 3 bar The cleanliness of the gas line must be correct Nitrogen connection The purge gas line must have an DN16 ISO KF fitting to connect it directly to the MDP with a centering ring and quick connect clamp ei MDP 5011 CP ae Filter Valve Ni flowrate Ifthe pressure in the purge gas line is greater than 1 4 bar 20 5 psi adjustment absolute the check valve automatically opens in order to limit the flow into the MDP to 50 sccm We recommend that the pressure of the purge line be set at 1 to 1 3 bar 15 to 19 psi absolute to avoid wasting the purge gas If the pressure of the purge line exceeds 1 3 bar 15 psi absolute the performance of the pump will be affected adixen Vacuum Products M DP 5011 User s M anual 1 1 G 02604 Edition 02 July 11 Composition Electrical wiring with ACT 100 Working Electrical wiring with ACT 200 TH B 330 Venting valve connection Check the solenoid valve voltage it must be compatible with line voltage see A510 It consists of A solenoid valve normally open NO mounted on a DN 16 ISO KF flanged fitting The fitting is installed between the outlet flange of the MDP and the foreline of the primary pump Connect the solenoid valve cable to the J connector of the ACT 100 controller D Ups A If there is a power failure this device vents the MDP pump to atmosphere to prevent oil contamination
31. s M DP 5011 User s M anual 1 1 GB 00725 Edition 04 Aug 11 B 100 Safety instructions for pump and controller installation Indicates a potentially hazardous situation which if not avoided could result in property damage ACAUTION Indicates a potentially hazardous situation which if not avoided could result in moderate or minor injury It may also be used to alert against unsafe practices Indicates a potentially hazardous situation which if not avoided could result in death or severe injury DANGER Indicates an imminently hazardous situation that if not avoided will result in death or severe injury extreme situations Overview For emergencies adixen Vacuum Products M DP 5011 User s Manual 1 4 B 100 Safety instructions for pump and controller installation Our products are designed to comply with current EEC regulations Users making their own modifications to the product are liable to break its compliance with these regulations degrade its EMC electromagnetic compatibility rating and make it unsafe to use The manufacturer declines all liability for the consequences of such operations The product s EMC rating is obtained on the understanding that it is installed in compliance with EMC rules Specially in environments that are prone to emit interference use shielded cables and connections on interfaces This pump is not equipped with an emergency stop EMO device because it is des
32. see chapters from pump and controller s manuals Risk of cut The access to the rotor of a turbomolecular pump with an unconnected inlet port is dangerous In the meantime if the pump is not switched on it may be driven by another pump in operation Always connect the pump inlet port before starting the pump DANGER It is highly recommended to install a screen filter at the pump inlet an isolation valve between the chamber to be pumped and the pump an isolation valve between the pump and the roughing pump Specific operating conditions may exist that require extra caution from users due to the high temperatures generated outer surfaces gt 70 C wear protective gloves and leave the pump to cool before working on the product Risk of injury by cutting The inlet of the pump musn t be disconnected as long as the rotor is moving and without having disconnecting the power line cable Risk of seizing Avoid moving or applying shock to a running product Avoid rotating the product about a perpendicular plane to the axis of rotation of the high vacuum pump Risk of electrical shock The turbopump and the controller must only be disconnected from each other when the turbopump is completely at rest and the controller disconnected from the power supply Never unplug the pump by disconnecting the main cable Only the authorized and trained technicians can perform intervention on the product adixen Vacuum Products
33. such operations Besides counterfeiting and unfair trading of parts are condemned under civil and criminal laws The manufacturer urges the user not to use imitation parts or the misappropriation and pirating of intellectual property performed by some dishonest operators The manufacturer supplies maintenance components spare parts or kits to perform the maintenance of its products see F10 adixen Vacuum Products MDP 5011 User s Manual 1 1 G 02613 Edition 03 July 11 F 100 First level of maintenance Lubrication syringe Ready to use it contains the grease load required P N for a regreasing operation on the 2 bearings ARES NER AMEN ACCESSOFIES Electrovalve coil 100 V 50 60 Hz 038126 Electrovalve coil 115 V 50 60 Hz 038122 Electrovalve coil 200 V 50 60 Hz 038125 Electrovalve coil 220 V 50 60 Hz 038121 Connecting accessories at inlet After pumping on corrosive or toxic gases it is strongly and exhaust recommended to seal the pump with blanking plates in case of return to the repair service centers At inlet DN63 ISO K Blank off flange Centrering ring with o ring Double claw clamps set of 4 303056 Stepped lugs and fasteners Get of ozi adixen Vacuum Products MDP 5011 User s M anual 1 1 G 10 Pumping curves c0 300 1 L0 300 e e e y UAW Z dAY YM LLOS ddl 00 300 1
34. ufacturer trained personnel Contact nearest service center or the service support at the following e mail address support service adixen fr 212 adixen Vacuum Products M DP 5011 User s M anual G 02610 Edition 03 July 11 G 02609 Edition 02 July 11 D 300 MDP 5011 pump maintenance frequency 18000 In continuous operation 16000 at ultimate pressure 7 14000 12000 10000 8000 In cycle less than 1 hour N at maximum inlet pressure SS 6000 ma 4000 10 20 30 40 50 Housing temperature C Housing temperature measuring point Maintenance frequency Maintenance frequency 20 C temperature 35 C temperature Operation to be carried out Section 16 000 hours 10 000 hours 1st lubrication E 200 32 000 hours 20 000 hours 2nd lubrication E 200 48 000 hours 30 000 hours Ball bearings replacement adixen Vacuum Products M DP 5011 User s M anual 1 1 G 02611 Edition 03 July 11 Use of the lubrication syringe E 200 MDP 5011 pump lubrication The first lubrication required for the correct operation of MDP pumps is performed in the factory Subsequent lubrications should be performed according to the procedure below and according to a frequency defined as a function of processes used see D 300 Only use the grease recommended by the manufacturer and contained in the lubrication syringe see F100 Avoid introducing foreign matter into the pum
35. ure operators know the safe practices to apply when using the product Indicates a potentially hazardous situation which if not avoided could result in property damage ACAUTION Indicates a potentially hazardous situation which if not avoided could result in moderate or minor injury It may also be used to alert against unsafe practices Indicates a potentially hazardous situation which if not avoided could result in death or severe injury DANGER Indicates an imminently hazardous situation that if not avoided will result in death or severe injury extreme situations 2 2 adixen Vacuum Products M DP 5011 User s M anual G 02617 Edition 03 July 11 G 02618 Edition 03 July 11 Two pump versions Main characteristics The molecular pump in an installation Controller A 200 MDP 5011 molecular pump overview The standard version MDP 5011 pump The version for corrosive gases MDP 5011CP pump The MDP 5011 offers high pumping performances between 10 mbar and 10 mbar and a maximum flowrate fo 400 sccm With a simple construction but robust rotor and low rotational speed 27 000 rpm the MDP is robust against accidental air in rush shock venting and gyroscopic effects Including built in ceramic ball bearings The MDP is easily field maintainable Inlet Atmospheric pressure pressure Chamber to be pumped High Rough pumping pumping High vacuum i 4 Rough vacuum
36. use on tables make sure that no objects enter the ventilation openings or block the openings when handling the units Operation A WARNING Do not operate the pump until it is securely fixed If the pump seizes the stored energy of the rotor can cause rapid movement of the pump which may cause further damage and injury to people It is mandatory to respect installation instructions described in the pump user s manual The adixen constructor declines any responsibility if the pump installation is not made in accordance with the installation specifications This label informs the user that moving parts present inside the pump coud cause personal injury like crushing or cutting The user must keep all body parts away from moving parts MOVING PARTS PRESENT Moving parts can crush and cut Keep hands or feet away from moving parts adixen Vacuum Products MDP 5011 User s Manual 3 4 B 100 Safety instructions for pump and controller installation Do not expose any part of the human body to vacuum The product is supplied with the inlet and exhaust sealed Remove these blanking plates when you are ready to connect the product on your vacuum system As well as don t operate the product unless the inlet and exhaust are connected to a vacuum and exhaust pumping line DANGER Storage Risk of cut injury The access to the rotor of a turbomolecular pump with an unconnected inlet port is dangerous In the meantime i
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