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1. Configure SMU Trigger Model for Sweep Pulse Output Pulses will all be the same level so set start and stop to the same value and the number of points in the sweep to 2 smua trigger source lineari pulseLevel pulseLevel 2 smua trigger source limitv pulseLimit smua trigger measure action smua ASYNC We want to start the measurements before the source action takes place so we must configure the ADC to operate asynchronously of the rest of the SMU trigger model actions Measure I and V during the pulse smua trigger measure iv smua nvbufferl smua nvbuffer2 Return the output to the bias level at the end of the pulse smua trigger endpulse action smua SOURCE IDLE smua trigger endsweep action smua SOURCE IDLE smua trigger count numPulses smua trigger arm stimulus 0 smua trigger source stimulus jy timmer T JE WBINAE IID SUMBIE CIE LC S Sie NSIS stimulus Mercer esa E TES ZEN TT smuont e igger exsrelpexpLlbs res SiesmMmbliS iexeabererexe c tease 2 GIANG TED smua trigger source action smua ENABLE smua source output smua OUTPUT ON smua trigger initiate waitcomplete smua source output unum UITIUM IR PrintPulseData Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Name PrintPulseData Description This function prints the data contained in smua nvbufferl and smua nvbuffer2 in a for
2. gt gt mode tsplink TRIG_SYNCHRONOUSA Trigger layer ARMED EVENT ID B un stimulus O count 5 tsplink trigger 2 source stimulus EVENT_ID SOURCE COMPLETE EVENT ID measure stimulus B mode tsplink TRIG FALLING MEASURE COMPLETE EVENT ID endpulse stimulus Model 260xA Model 261xA or Model 263xA When the configured trigger model of the Series 2600A instrument is initiated the following occurs 1 The source measure unit SMU trigger model passes through the Arm Layer enters the Trigger Layer reaches the Source Event pauses and then waits for an event trigger from TSP Link trigger 1 2 ATSP Link trigger is received by TSP Link trigger 1 Because TSP Link trigger 1 is configured as a synchronous acceptor it latches the line low and outputs an event trigger to the SMU Source Event 3 The SMU Source Event Detector receives the event trigger from TSP Link trigger 1 sets the SMU output to the step level waits a programmed source delay if any and continues 4 The SMU trigger model moves to the Measure Event where it waits a programmed measure delay if any takes a measurement and then outputs the MEASURE COMPLETE event trigger 5 TSP Link trigger 1 receives the MEASURE COMPLETE event trigger and releases the TSP link trigger line telling the Model 2651A that it has completed its step and that the Model 2651A may begin its sweep 6 The SMU trigger model moves to the End P
3. This manual has prepared you to start using your new Model 2651A for your real world applications For more detailed information about the Model 2651A refer to the Keithley Instruments Model 2651A Reference Manual part number 2651A 901 01 For additional information on the Model 2651A refer to e The Product Information CD ROM ships with the product Contains software tools drivers and product documentation including documentation for switch cards that are compatible with the Model 2651A e The Keithley Instruments website http www keithley com Contains the most up to date information from the website you can access e The Knowledge Center which contains the following handbooks e The Low Level Measurements Handbook Precision DC Current Voltage and Resistance Measurements e Switching Handbook A Guide to Signal Switching in Automated Test Systems e Application notes e Updated drivers e Information on related products including e The Model 4200 SCS Semiconductor Characterization System e The Series 2600A System SourceMeter Instruments e Your local Field Applications Engineer can help you with product selection configuration and usage Check the website for contact information Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com A Action keys RECall 2 2 STORE e 2 2 C Communication Set up 5 1 6 2 7 3 Compliance Setting front panel compliance
4. Verify that at least two nodes are present Configure the Drain SMU 2651A smua reset smua source func smua OUTPUT DCVOLTS smua sense smua SENSE REMOTE smua source rangev math max math abs dstart math abs dstop Select the source range that is large enough to fit all values of the sweep smua source levelv 0 Sets the drain bias level smua source limiti 5 smua measure rangev smua source rangev smua measure rangei pulseLimit off and 50 or pulseLimit Select a measure range larg nough to fit pulses up to the current limit Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com smua measure autozero smua AUTOZERO ONCE smua measure nplc 0 001 NPLC can be increased to improve measurement accuracy However it should remain small enough to fit the measurement within the width of the settled part of the pulse smua measure delay pulseWidth 1 localnode linefreq smua measure nplc 50e 6 Set the measure delay so that the measurement is taken at the end of the pulse before the falling edge Timer 1 controls the pulse period trigger timer 1 count dsteps lt 1 and 1 or dsteps 1 If dsteps 1 then use 1 for the count else use dsteps 1 trigger timer 1 delay pulsePeriod trigger timer 1 passthrough true trigger timer 1 stimulus spl
5. line for j 1 gsteps do line line string format gNt gNt gNt smua nvbufferl sourcevalues j 1 dsteps i SME Nvo cerz Norad cepe a smuamnyoukt erika 14 eisEeme s 3 end print line end end Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Section 6 Characterization of power discretes Model 2651A High Power System SourceMeter Instrument User s Manual Example program usage 6 16 The functions of this script allow the sweep parameters of the test to be adjusted without having to rewrite and rerun the script A test can be executed by calling the function Iv Curves gstart gstop gsteps dstart dstop dsteps pulseWidth pulsePeriod pulseLimit with the appropriate values passed to it in its parameters IV Curves parameters Parameter O ume Deseripon gstart Volts The level of the first step in the gate sweep gstop Volts The level of the last step in the gate sweep gsteps Volts The number of steps in the gate sweep dstart Volts The level of the first step in the drain collector sweep dstop Volts The level of the last step in the drain collector sweep dsteps Not The number of steps in the drain collector sweep applicable pulseWidth Seconds The width of the pulse in the drain collector sweep pulsePeriod Seconds The time between the start of consecutive pulses in the drain collector sweep pulseLimit Amperes The current limit of the p
6. minimizing self heating A single Model 2651A High Power System SourceMeter Instrument can pulse measurement test with precision timing at currents up to 50 A and pulse widths as low as 100 us This example demonstrates how to perform pulsed measurements and collect l V curves using the Model 2651A High Power System SourceMeter Instrument on a MOSFET The same procedure could be used to test IGBTs Equipment needed for this example To run this test you will need the following equipment e Model 2651A High Power System SourceMeter Instrument e Series 2600A System SourceMeter Instrument see NOTE e TSP Link cable Keithley Instruments part number CA 180 3A e GPIB cable or Ethernet cable to connect the Model 2651A to a computer e Additional cable and connector assemblies as required to make connections to the device under test DUT for example Model 2651A KIT and Model 2600 KIT see Device connections on page 6 4 for a schematic of required connections NOTE For this application Series 2600A System SourceMeter Instrument refers to any of the following instrument models Models 2601A 2602A 2611A 2612A or 2635A 2636A Set up communication The communication setup is illustrated in the following diagram GPIB is used as an example but this application can be run using any of the supported communication interfaces for the instruments A TSP Link connection enables communication between the two instruments Commands fo
7. smua trigger measure iv node 2 smua nvbufferl node 2 smua nvbuffer2 node 2 smua trigger endpulse action smua SOURCE HOLD node 2 smua trigger endsweep action smua SOURCE IDLE node 2 smua trigger count gsteps node 2 smua trigger arm stimulus 0 node 2 smua trigger source stimulus moc Z spilsumisiexaseyeyesE LIE T WN IND node 2 smua trigger measure stimulus 0 modelem muan criggercndpullse stamulus node 2 esplank Erigger 2 AVENT EID node 2 smua trigger source action smua ENABLE Configure Model 26xxA TSP Link Triggers node 2 tsplink trigger 1 clear node 2 tsplink trigger 1 mode node 2 tsplink TRIG SYNCHRONOUSA node 2 tsplink trigger 1 stimulus node 2 smua trigger MEASURE COMPLETE EVENT ID node 2 tsplink trigger 2 clear node 2 tsplink trigger 2 mode mexets r2 srsgoibstsusc JEUNE MINION Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Prepare the Gate SMU 26xxA node 2 smua nvbufferl clear node 2 smua nvbufferl collectsourcevalues if node 2 smua nvbufferl fillmode node 2 smua nvbufferl fillmode end node 2 smua nvbuffer2 clear node 2 smua nvbuffer2 collectsourcevalues if node 2 smua nvbufferl fillmode node 2 smua nvbufferl fillmode end The SMUs are configured and ready to run OxejoxhEG qa node 2 smua source output Smus source oubpu if errorqueue count 0 then print Errors were encou
8. 2 2 LIMIT 2 2 LOAD 2 2 MEAS 2 2 MENU e 2 2 MODE 22 Number keys 2 2 RECall 2 2 REL 2 2 RUN 2 2 SPEED 2 2 SRC 2 2 STORE 2 2 Index 1 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com TRIG 2 2 L LabVIEW drivers 8 2 Linear sweep 6 5 LXI Discovery Browser 3 1 Downloading from website 3 1 Manuals 1 2 Measure Simultaneous current and voltage 5 1 Measurement Fast sampling ADC 5 1 Front panel 4 1 4 2 Function selecting 4 2 Range selecting 4 2 Waveforms 5 1 N Navigation wheel 2 2 2 3 NBTI 5 1 Node TSP Link 6 2 Number keys 2 2 O Operation keys ENTER e 2 2 EXIT 2 2 FILTER 2 2 LIMIT 2 2 LOAD 2 2 MENU 2 2 RECall 2 2 REL e 2 2 RUN e 2 2 TRIG 2 2 Oscillation 6 4 Output enable 4 2 OUTPUT ON OFF control 2 2 4 2 4 3 P Parameters CapturePulsel 5 9 CapturePulseV 5 9 Plug in Java 3 1 Power Discrete l V curve testing 6 1 Pulses High power pulses 5 1 R Range Selecting auto 4 2 Reading buffer 3 7 Downloading 3 7 Reading buffers 3 7 Displaying readings 3 7 Readings Display 4 3 Observing 3 7 4 3 S Scripts CapturePulsel 5 9 CapturePulseV 5 9 Clearing 3 6 Create in TSB Embedded 3 3 3 4 Deleting 3 6 Examples 5 4 5 9 7 9 7 16 Exporting 3 6 Fast ADC 6 10 6 16 Importing 3 6 Management 3
9. 6 Stopping 3 6 Viewing 3 6 SMU Combining to increase current sourcing 7 1 Source Level 4 2 Speed Fast sampling ADC 5 1 Sweep Parameters adjust 6 16 Voltage 6 5 T Test Script Processor 6 10 Tests Discrete l V curve 6 1 Trigger model Configuring 5 2 6 5 7 6 Described 6 8 7 8 Diagram 6 6 Initialization 5 2 Operation 6 7 6 8 6 9 Troubleshooting 8 1 External trigger lines 8 1 IP address 3 1 3 2 8 1 LabVIEW driver 8 2 Line frequency 8 1 Save present state 8 2 Voltage 8 1 Web page 3 1 3 2 8 1 TSB Embedded 3 3 Script create with 3 3 TSP Express 3 8 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Model 2651A High Power System SourceMeter Instrument User s Manual Index TSP Link Nodes 6 2 V Voltage Source set level 4 2 W Warranty 1 1 Web interface 3 1 Accessing 3 1 Browser requirements 3 1 Home page 3 2 IP address configuration 3 2 Reading buffers 3 7 TSB Embedded 3 3 TSP Express 3 8 Using 3 1 2651A 900 01 Rev A March 2011 Index 3 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Specifications are subject to change without notice All Keithley trademarks and trade names are the property of Keithley Instruments Inc All other trademarks and trade names are the property of their respective companies
10. 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Section 2 Using the front panel interface Model 2651A High Power System SourceMeter Instrument User s Manual To change a value using the navigation wheel 1 Tum the navigation wheel to go to the character you want to change the character blinks when selected Press the navigation wheel to edit that character Turn the navigation wheel to change the value Press the navigation wheel to enter the change Repeat these steps as needed to change the value oa fF YN Press the ENTER key or the navigation wheel when finished changing all the characters To change a value using the numeric keypad NOTE The numeric entry method may only be used if the numeric keypad is enabled If the keypad is disabled press the MENU key then select DISPLAY gt NUMPAD gt ENABLE Use the CURSOR arrow keys to move the cursor to the value that you want to edit Press any of the desired number keys 0 9 0000 The cursor moves to the next value on the right Repeat the above steps as required to set the desired values Press the ENTER key to select the value or press the EXIT LOCAL key to cancel the change Optional Press the EXIT LOCAL key to return to the main menu 2 4 2651A 900 01 Rev A March 2011 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Section 3 Using the web interfa
11. OQ arm count 5 arm stimulus SWEEP COMPLETE EVENT ID trigger timer 1 ce stimulus EVENT_ID Trigger layer ARMED EVENT ID 0 03 s passthrough true count 20 OQ count 21 source stimulus SOURCE COMPLETE EVENT ID stimulus 7 MEASURE COMPLETE EVENT ID endpulse stimulus a PULSE COMPLETE EVENT ID passthrough false tsplink trigger 1 EVENT ID S mode tsplink TRIG SYNCHRONOUSM PC 5 7 stimulus TSP Link 9 tsplink trigger 2 EVENT ID ES mode tsplink TRIG FALLING stimulus TSP Link bus Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com When the configured trigger model of the Model 2651A is initiated the following occurs 1 10 11 12 13 14 15 The source measure unit SMU trigger model passes through the Arm Layer enters the Trigger Layer then outputs the ARMED event trigger The ARMED event trigger triggers TSP Link trigger 1 which outputs a trigger on TSP Link line 1 This trigger is meant to tell the Series 2600A that it should step the gate SMU The SMU trigger model continues until it reaches the Source Event and then pauses and waits for an event trigger A trigger comes back on TSP Link trigger 1 indicating that the gate step is complete An event trigger is output from TSP Link trigger 1 and input to timer 1 Timer 1 receives the event trigger and begins its countdown while simultaneously pa
12. connections SENSE GUARD OUTPUT S S LO HI LOG GGGHI Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Making front panel measurements Use the following procedure to configure the instrument and make measurements from the front panel Step 1 Select and set source level Perform the following steps to select the voltage source and set its value to 10 V 1 Press the SRC key as needed to select the V Source as indicated by the units in the source field on the display The flashing digit cursor indicates which value is selected for editing 2 Move the cursor to the digit to change then press the navigation wheel to enter the EDIT mode as indicated by the EDIT indicator 3 Use the RANGE keys to select the 10 V range If using a different source value use the lowest possible range for the best accuracy 4 Set the source value to 10 0000 V and then press the ENTER key or the navigation wheel to complete editing Step 2 Set compliance limit Perform the following steps to edit the compliance limit value to 10 mA 1 Press the LIMIT key 2 Move the cursor to the digit to change then press the navigation wheel to enter the EDIT mode as indicated by the EDIT indicator 3 Enter the limit value of 10 000 mA 4 Press the ENTER key or the navigation wheel to complete editing Step 3 Select measurement function and range To select measurement function and
13. count the trigger layer repeats and the SMU trigger model reaches Source Event where it waits for another trigger from timer 1 Because timer 1 had its count set to one less than the trigger count timer 1 will continue to output a trigger for each iteration of the Trigger Layer loop The trigger model then repeats from step 3 e If the current iteration is equal to the trigger count the SMU trigger model exits the Trigger Layer passes through the Arm Layer and returns to an idle state Model 2651A node 2 trigger model operation In the Model 2651A instrument subordinate node 2 trigger model timer 1 controls the pulse width and is programmed with the same delay as timer 2 in the Model 2651A master node 1 The pulse period is controlled by TSP Link trigger 1 which gets its triggers from the Model 2651A instrument master node 1 timer 1 so the same timer in the system controls the pulse period Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com When the trigger model of Model 2651A subordinate node 2 is initialized the following occurs 1 The source measure unit SMU trigger model leaves the idle state flows through the arm layer enters the trigger layer and reaches the Source Event where it waits for an event trigger 2 TSP Link trigger 1 receives a trigger from the TSP Link interface and outputs an event trigger to the SMU Source Event 3 The SMU Sourc
14. e nthe console type the following and then press Enter smua nvbufferl clear e f successful the command will appear in the Instrument Output box 6 Setthe buffer to append readings 4 e nthe console type the following and then press Enter smua nvbufferl appendmode 1 e f successful the command will appear in the Instrument Output box 7 Set the buffer to collect timestamps 4 e nthe console type the following and then press Enter smua nvbufferl collecttimestamps 1 e f successful the command will appear in the Instrument Output box 8 Run the script e Select the script in the User Scripts list e Click Run 9 The Instrument Output box displays any error messages and output from the script 10 If no errors appear but readings do click Run a few times to populate the buffer Each time the script is run readings appear in the Instrument Output box and are also placed in the buffer Script management options Existing scripts are listed in the User Scripts box on the left side of the web interface To delete a script click the name of the script and click Delete The script is deleted from the User Scripts list and from the nonvolatile memory of the instrument To stop operation of a script click Abort Script To export the selected script to the computer click Export to PC Choose the directory in which to save the script and click Save Scripts are saved to a file with the extension tsp TSP files are native
15. ege 4 2 Step 4 TUM OWPUL OM e tase tina 4 2 Step 5 Observe readings on the display iiit arpaa chee traite aa a aa ad tienes 4 3 Sep o TUNT OUI UE QT ocacto eia ke toner nen dido e RM AMADEUS 4 3 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Capturing high power pulse WaVefOrimMs ccccsseeeeeceseseeeeeeeeeeeeeeneeeeeeenseeeeeeeeneeeeees 5 1 introduction to capturing WAV EONS 3 riot ene t ett toE m odes tisebd eet etica DEP iet EMbbad EINE 5 1 Equipmentneeded Tor this example ccs osoirucc Pac tes pra decent eben Ea eae etpa eie ea doceo pu eater gae 5 1 SEC UD COMMUNICA neesiana n r aea N EEA CP EROR dC gu HS 5 1 Device CONNGCUONG e 5 2 Configuring the trigger Modelspoor A 5 2 Example programm CODD c misa r ritui duelo toutou ditti idet maiden ea eae 5 4 Example prodgtamidsadge as iuit ttai ta ED reta eir Pastel e Hidden ate un ieieit 5 9 Characterization of power discretes eeeeeeeeeeeeeeeeeeeeenee nennt 6 1 Introduction to power discrete l V curve TESTING joss caius c oo sete tbtto SE todas plebe bees abe RE PUDE 6 1 Equipmerntneeded Tor this example uiri usci toto eo Pa rab e peer ee a a pa tuer ea Poste pu aue o thun 6 2 Set up commblhileatigfV cua esve ts toc pur es veterea ando a D e ar E EE set esas en EN 6 2 Device CONNG CONG ic c 6 4 Conf
16. following is a Test Script Processor TSP script that performs a series of sweeps to collect I V curve data for power MOSFETs and IGBT devices The script contains all the code necessary to e Initialize the TSP Link connection e Configure the output and trigger models of the source measure unit SMU as described in the previous section e Prepare the reading buffers e Execute the test e Return the collected data in a format that can be copied from the instrument console and pasted into Microsoft Excel The script is written using Test Script Processor TSP functions rather than as a single block of inline code TSP functions are similar to functions in other programming languages such as Microsoft Visual C or Visual Basic and must be called before the code contained in them is executed Because of this running the script alone will not execute the test To execute the test run the script to load the functions into test script memory and then call the functions Refer to the documentation for Test Script Builder or TSB Embedded for directions on how to run scripts and enter commands using the instrument console The script contains comments that describe what is being performed by the lines of code and documents the functions in the script Lines starting with node 2 are commands that are being sent to the Series 26xxA through the TSP Link interface All other commands are executed on the Model 2651A Test Equipment De
17. in the following table CapturePulsel parameters LCICRENNUOKENEN CC HN pulseLevel Amperes The current level of the pulse pulseWidth Seconds The width of the pulse pulseLimit Volts The voltage limit of the pulses to output numPulses Not applicable The number of pulses to output Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Section 5 Capturing high power pulse waveforms Model 2651A High Power System SourceMeter Instrument User s Manual An example call to this function is as follows CapturePulselI 50 300e 6 50 5 This call will output five 50 A pulses with a 300 us pulse width The pulses will be limited to 10 V and have a 196 duty cycle At the completion of the pulsed outputs the SMU output is turned off The resulting data from this test will be returned in a Microsoft Excel compatible format you can cut and paste the output from the console that can be used for graphing and analysis 5 10 2651A 900 01 Rev A March 2011 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Section 6 Characterization of power discretes In this section Introduction to power discrete l V curve testing 6 1 Equipment needed for this example sss 6 2 Sel psoriasis ssoia scena a HR RA RE IRAM ERES UR leila 6 2 Device CONMECHOMNS sssaaa n etic te A ead 6 4 Configuring
18. is greater than that of a single Model 2651A This example demonstrates how to perform an Rds on sweep up to 100 A using two Model 2651A High Power System SourceMeter Instruments Combining SMUS to increase current sourcing capability A CAUTION Carefully consider and configure the appropriate output off state source and compliance levels before connecting the Model 2651A High Power System SourceMeter Instrument to a device that can deliver energy for example other voltage sources batteries capacitors solar cells or other Series 2600A System SourceMeter instruments Program recommended instrument settings before making connections to the device Failure to consider the output off state source and compliance levels may result in damage to the instrument or to the device under test DUT To combine two Model 2651A High Power System SourceMeter Instruments to output a pulse that is greater than that of a single instrument the current sources are connected in parallel This delivers the sum of the currents to the DUT which allows a sweep of the DUT up to 100 A The following figure illustrates this principle of combining current sources Figure 23 Sum of parallel current sources Because each Model 2651A can produce up to 50 A placing the instruments in parallel can deliver up to 100 A In this example we will sweep the DUT using each Model 2651A to source exactly half of the desired total current level for each point in the
19. limit 4 2 Connections Device 4 1 5 2 6 4 7 4 Current Increase sourcing capability 7 1 7 2 Curves Example test script 6 10 6 16 l V curves 6 1 6 4 6 5 6 6 6 7 6 9 IV Curves parameters 6 16 D Delete script 3 6 Discovery Browser LXI 3 1 Display Observing readings 3 7 4 3 Documentation 1 2 Download Reading buffer 3 7 DualSmuRdson 7 16 E Examples Combining SMUs for 100 A current sweep 7 9 7 16 Fast sampling ADC 5 4 6 10 6 16 Exercises Create and run script with TSB Embedded 3 4 Retrieve readings from buffer 3 7 Export script 3 6 F Fast ADC CapturePulsel 5 9 CapturePulseV 5 9 Communication setup 6 2 Device connections 6 4 Example program code 6 10 6 16 High power pulse 5 1 Trigger model 5 2 2651A 900 01 Rev A March 2011 Index Waveforms capturing 5 1 Front panel 2 1 Compliance limit 4 2 Indicators 2 2 Interface 2 1 Measurements 4 1 4 2 Output on off 4 2 Readings 4 3 Source measure procedure 4 2 Using 2 1 Functions CapturePulsel 5 9 CapturePulseV 5 9 DualSmuRdson 7 16 IV Curves 6 16 Selecting 4 2 Import script 3 6 Indicators 2 2 IP address 3 2 8 1 l V Curves 6 1 6 4 6 5 6 6 6 7 6 9 Performance characterization 6 1 6 4 IV Curves 6 16 J Java plug in 3 1 K Keypad 2 4 Keys CONFIG 2 2 DIGITS 2 2 DISPLAY 2 2 ENTER 2 2 EXIT 2 2 FILTER
20. or A and places the cursor in the source field for editing nmi Cycles through measure functions V A Q or W Places the cursor in the compliance limit field for editing Also selects the limit value to edit V A or W Directly controls the mode DIGITS Cycles through display resolution 4 1 2 5 1 2 or 6 1 2 digits Selects either the fast or integrating A D converter When the integrating A D converter is selected this key also sets the measurement speed and accuracy by controlling the measurement aperture Controls relative measurements This allows a baseline value to be subtracted from a reading FILTER Enables or disables the digital filter You can use this filter to reduce reading noise LOAD Loads test for execution Runs the last selected factory or user defined test code STORE RECALL TRIG Accesses reading buffers and takes readings Recalls data or statistics from CHANA BUFF1 or CHANA BUFF2 Triggers readings Accesses the main menu The main menu can be used to configure many facets of operation LOCAL to take the unit out of remote operation ENTER AcoepIs the current selection or brings up the next menu opion In me cases PS fergie enten ey et nema te revaeten anea Oe When enabled the number keys 0 9 0000 allow direct numeric E in the EDIT mode Press the navigation wheel to enter EDIT mode see To change a value using the numeric keypad on page 2 4 Test Equipment Depot
21. or current sweeps This is useful for two terminal device characterization and similar applications M Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com 2651A 900 01 Rev A March 2011 Section 4 Making basic front panel measurements In this section INMOODUCHON p M 4 1 Equipment needed for this example sss 4 1 Devic COMMECUOMS E ETE T 4 1 Making front panel measurements seeeesees 4 2 Introduction You can use the Model 2651A High Power System SourceMeter Instrument to make basic measurements from the front panel In this example measurements are made on a 10 kQ resistor Similar measurements can be made on any two terminal device under test DUT if appropriate source values are used Equipment needed for this example To run this example you will need the following equipment e Model 2651A High Power System SourceMeter Instrument e Additional cable and connector assemblies as required to make connections to the DUT for example Model 2651A KIT See Device connections on page 4 1 for a schematic of required connections Device connections Connections from the Model 2651A High Power System SourceMeter Instrument to the DUT are shown in the diagram below Proper care should be taken to ensure good contact through all connections Figure 11 Two wire resistance
22. or other Series 2600A System SourceMeter instruments Program recommended instrument settings before making connections to the device Failure to consider the output off state source and compliance levels may result in damage to the instrument or to the device under test DUT Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com NOTE For best results all connections should be left floating no connections should be tied to ground Figure 25 Connections for Rds on sweep Model 2651A Model 2651A master node 1 subordinate node 2 TSP Link SENSE GUARD S S LO G GGGHI OUTPUT SENSE GUARD OUTPUT LO HI S S 10 HI LOG GGGHI TSP Link 9 Gate resistor Series 26xxA if required subordinate node 3 LOS GH GGGS LO HI Model 260xA Model 261xA or Model 263xA Equivalent SMU master node 1 SMU subordinate node 2 SMU subordinate node 3 Gate resistor if required NOTE During high current pulsing through the channel of the device the gate may begin to oscillate This oscillation creates an unstable voltage on the gate which may cause unstable measurements through the device channel You can install a resistor to dampen this oscillation and stabilize the gate Install the resistor between the gate of the device and the force and sense HI of the Model 2651A If the gate still remai
23. perform installation and service procedures Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category and Measurement Category II as described in the International Electrotechnical Commission IEC Standard IEC 60664 Most measurement control and data I O signals are Measurement Category and must not be directly connected to mains voltage or to voltage sources with high transient over voltages Measurement Category II connections require protection for high transient over voltages often associated with local AC mains connections Assume all measurement control and data I O connections are for connection to Category sources unless otherwise marked or described in the user documentation Exercise extreme caution when a shock hazard is present Lethal voltage may be present on cable connector jacks or test fixtures The American National Standards Institute ANSI states that a shock hazard exists when voltage levels greater than 30 V RMS 42 4 V peak or 60 VDC are present A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring Operators of this product must be protected from electric shock at all times The responsible body must ensure that operators are prevented access and or insulated from every connection point In some cases connections must be exposed to potential human contact Product operators in these circumstances must be trai
24. range 1 Select the current measurement function by pressing the MEAS key as needed 2 Enable autorange by pressing the AUTO key the AUTO indicator lights Alternatively you can set manual ranging using the up or down RANGE keys Step 4 Turn output on Turn the output on by pressing the OUTPUT ON OFF control The OUTPUT indicator light turns on Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Model 2651A High Power System SourceMeter Instrument User s Manual Section 4 Making basic front panel measurements Step 5 Observe readings on the display 1 Observe the readings on the display Press the TRIG key if necessary to trigger the instrument to begin taking readings The readings are on the top line and source and limit values are on the bottom line For the 10 kQ resistor typical display values are 1 00000mA SrcA 10 0000 V LimA 010 0000mA 2 Press the MEAS key several times to display measured voltage resistance power and current Typical values for the 10 kQ resistor are 10 0000 V 10 0000 kQ 10 0000 mw and1 00000 mA Step 6 Turn output off When finished turn the output off by pressing the OUTPUT ON OFF control The OUTPUT indicator light will turn off 2651A 900 01 Rev A March 2011 4 3 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Section 5 Capturing high power pulse waveforms In this se
25. s cameie 1 EVN ID Suelo PLCC mea sureme imule wirseeSie ieibn ese NABI IUD Siiiblel c Ie atre rene o EmMolowIL SS eEsbunpdburs ie walleye esse 2 GEINARINGE ICID smua trigger source action smua ENABLE smua source output smua OUTPUT ON smua trigger initiate waitcomplete smua source output smugso SEU ORIS PrintPulseData end Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Name CapturePulsel pulseLevel pulseWidth pulseLimit numPulses Description This function outputs current pulses with a 1 duty cycle and performs measurements using the fast ADC to capture each pulse in its entirety At the conclusion of the pulse train the data is returned to the instrument console in a Microsoft Excel compatible format Parameters pulseLevel The current level of the pulse in amps pulseWidth The width of the pulse in seconds 100e 6 lt pulseWidth lt 4e 3 pulseLimit The voltage limit of the pulse in volts numPulses The number of pulses to output Example Usage CapturePulseIl 50 300e 6 10 5 function CapturePulseI pulseLevel pulseWidth pulseLimit numPulses if numPulses nil then numPulses 1 end Configure the SMU reset smua reset smua source func smua OUTPUT DCAMPS smua sense smua SENSE REMOTE smua source rangei pulseLevel smua source leveli 0 The bia
26. stimulus Model 2651A subordinate TSP Link 9 tsplink trigger 1 EVENT ID i mode tsplink TRIG FALLING stimulus trigger timer 1 EVENT ID passthrough false count smua trigger Idle Arm layer arm stimulus lt Trigger layer source stimulus measure stimulus endpulse stimulus IDLE EVENT ID SWEEPING EVENT ID Oo arm count 1 SWEEP COMPLETE EVENT ID ARMED EVENT ID gt count 100 L SOURCE COMPLETE EVENT ID E COMPLETE EVENT ID D PULSE COMPLETE EVENT ID TSP Link 9 smua trigger Idle Arm layer arm stimulus sie Trigger layer source stimulus measure stimulus endpulse stimulus IDLE EVENT ID SWEEPING EVENT ID arm count 1 oO SWEEP COMPLETE EVENT ID ARMED EVENT ID SOURCE COMPLETE EVENT ID MEASURE COMPLETE EVENT ID PULSE COMPLETE EVENT ID Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Master Model 2651A node 1 trigger model operation In the master Model 2651A node 1 trigger model timer 1 controls the period of the pulse while timer 2 controls the pulse width TSP Link trigger 1 prompts Model 2651A subordinate node 2 to output its pulse When the trigger model of the master Model 2651A node 1 is initialized the following occurs 1 The source measure unit SMU trigger model leaves the idle state flows through the Ar
27. sweep Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Equipment needed for this example To run this test you will need the following equipment e Two Model 2651A High Power System SourceMeter Instruments e One Series 2600A System SourceMeter Instrument for this application Series 2600A System SourceMeter Instrument refers to any of the following instrument models Models 2601A 2602A 2611A 2612A or 2635A 2636A e Two TSP Link cables Keithley Instruments part number CA 180 3A e One GPIB cable or Ethernet cable to connect one Model 2651A to a computer e Additional cable and connector assemblies as required to make connections to the device under test DUT for example Model 2651A KIT and Model 2600 KIT see Device connections on page 7 4 for a schematic of required connections NOTE The Model 2651A High Power System SourceMeter Instruments must be at the same firmware revision Set up communication The communication setup is illustrated in the following diagram GPIB is used as an example but this application can be run using any of the supported communication interfaces for the instruments A TSP Link connection enables communication between the two instruments Commands for the Model 2651A SMU 2 node 2 and the Series 2600A SMU 3 node 3 are sent over the TSP Link interface Figure 24 GPIB communication example for Rds on sweep Model 2651A
28. sweeps and measurements Basic Sequential SDM Source Delay Measure Advanced Sequential SDM FET Sweep Example Project CSS Tools N I So nj xj KEITHLEY gt v auto navigate Index TSP Express Introduction TSP Express is a utility that easily creates runnable scripts for the Keithley Instruments Series 2600A SourceMeter Instruments SMU Click here for a quick step by step example View or change instrument configuration Open an existing project Open an existing script New script Outline view of script A GREATER MEASURE OF CONFIDENCE TSP Express may be launched via a web link from any Series 2600A instrument or by using a shortcut on the PC See launching the application for more details The start up screen is the TSP Express project wizard It provides a menu of choices for building new test scripts as well as options for opening existing projects and scripts It also allows the user to view or change instrument configurations The start up screen is shown whenever TSP Express is launched or when an existing project is closed File Close Project To work with scripts or projects selectfrom the following options Quick Start the choices inthis section help quickly get started creating scripts ingle SMU sweeps and measurements Create a simple project with a single functional segment to generate basic voltage and
29. to Test Script Builder or TSB Embedded but they can be opened and edited in any text editor To import scripts from the computer click Import to PC Select the directory that contains the file You can only import files with the extension tsp To clear the name box and the box that contains the script click Clear You can type the name of a script in the TSP Script box and click View Script to view the contents of the script Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Reading buffers The Reading Buffers tab provides access to the Model 2651A reading buffers The data used in this example was created and placed in the buffer by the Exercise Create and run a script with TSB Embedded on page 3 4 Exercise Retrieve readings from a buffer To retrieve readings from a populated buffer 1 From the navigation area on the left side of the web interface select Reading Buffers The Reading Buffers embedded page is displayed Figure 6 Select reading buffer LXI Keithley Instruments 26514 Main Windows Internet Explorer go E http 192 168 1 101 Fie Edit View Favorites Tools Help y Favorites EiixI Keithley Instruments 2651A Main KEITHLEY A GREATER MEASURE OF CONFIDENCE LXI Web Interface Welcome Page Welcome Page IP Configuration Instrument Model Manufacturer Set Password Firmware Revisi
30. width node 2 trigger timer 1 count 1 node 2 trigger timer 1 delay pulseWidth 3e 6 node 2 trigger timer 1 passthrough false node 2 trigger timer 1 stimulus node 2 smua trigger SOURCE COMPLETE EVENT ID node 2 trigger timer 1 clear Configure SMU Trigger Model for Sweep node 2 smua trigger source lineari dstart 2 dstop 2 dsteps node 2 smua trigger source limitv pulseLimit node 2 smua trigger measure iv node 2 smua nvbufferl node 2 smua nvbuffer2 node 2 smua trigger measure action node 2 smua ENABLE Return the output to the bias level at the end of the pulse sweep node 2 smua trigger endpulse action node 2 smua SOURCE TDLE node 2 smua trigger endsweep action node 2 smua SOURCE IDLE node 2 smua trigger count dsteps node 2 smua trigger arm stimulus 0 node 2 smua trigger source stimulus noc 2 teslis eiae il wae JUD node 2 smua trigger measure stimulus 0 node 2 smua trigger endpulse stimulus node 2 trigger timer 1 EVENT ID node 2 smua trigger source action node 2 smua ENABLE Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Configure the 26xxA Gate SMU node 3 smua reset node 3 smua source func node 3 smua OUTPUT DCVOLTS node 3 smua sense node 3 smua SENSE REMOTE no
31. 168 1 101 Fie Edit View Favorites Tools Help Ue Favorites e LXI Keithley Instruments 26514 Main KEITHLEY A GREATER MEASURE OF CONFIDENCE LXI Web Interface Welcome Pag Welcome Page IP Configuration Instrument Model Set P Manufacturer Firmware Revision TSB Embedded Serial Number Reading Buffers 5 Description Flash Upgrade LXI Class LXI Version Log MAC Address IR ee ade i To run TSP Express 1 From the navigation area on the left side of the web interface select TSP Express The TSP Express page is displayed 2 Click the Launch button The TSP Express window opens 3 There is a help pane on the right side of the main window You can adjust the width of the help pane by sliding the vertical bar Click and follow the step by step example to become familiar with TSP Express there is a link to the example in the TSP Express Introduction s first paragraph Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Section 3 Using the web interface 3 10 TP ley Instruments Inc TSI File Edit Instrument View Help Bon TSP E Quick amp Easy IV Test Quick Start emm xpress Model 2651A High Power System SourceMeter Instrument User s Manua Figure 10 TSP Express Single SMU sweeps and measurements Multiple SMU
32. EVENT ID TSP Link Trigger 2 is used by the 2651A to command the 26xxA that it has completed the drain sweep and that the 26xxA continue Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Prepare the Drain SMU 2651A reading buffers smua nvbufferl clear smua nvbufferl collectsourcevalues 1 smua nvbufferl fillmode smua FILL ONCE smua nvbuffer2 clear smua nvbuffer2 collectsourcevalues 1 smua nvbuffer2 fillmode smua FILL ONCE Configure the Gate SMU 26xxA node 2 smua reset node 2 smua source func node 2 smua OUTPUT DCVOLTS node 2 smua sense node 2 smua SENSE REMOTE node 2 smua source levelv 0 node 2 smua source limiti 100e 3 node 2 smua measure delay 300e 6 Give gate 300us to settle Do not need to configure any additional measure settings Timing is not critical on the gate so autorange will do node 2 smua source highc node 2 smua DISABLE E If you find the gate to be unstable even with a gate resistor in place changing highc to node 2 smua ENABLE can improve stability Configure Gate SMU 26xxA Trigger Model node 2 smua trigger source linearv gstart gstop gsteps node 2 smua trigger source limiti 100e 3 node 2 smua trigger measure action node 2 smua ENABLE node 2
33. Equipment needed for this example To run this test you will need the following equipment e Model 2651A High Power System SourceMeter Instrument e GPIB cable or Ethernet cable to connect the Model 2651A to a computer e Additional cable and connector assemblies as required to make connections to the device under test DUT for example Model 2651A KIT see Device connections on page 5 2 for a schematic of required connections Set up communication The communication setup is illustrated in the following diagram GPIB is used as an example but this application can be run using any of the supported communication interfaces for the instrument Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Figure 12 GPIB communication example for fast ADC GPIB Gf m BEIAMOH POWER SYSTEM Sowane 1 3 21000V Cs SrcA 20 0000 A LimAL10 0000V Cu o amp 99 99 ome 7 Q Gu Gum Ee e ecd E x aw Ge Gua Gap Q Device connections Make the connections as illustrated in the following figure To ensure good contact use care when making connections Figure 13 Connections for fast ADC example Model 2651A SENSE GUARD S S LOG GGGHI 40V 50A MAX Equivalent Configuring the trigger model To output precisely timed high power pulses and accurately capture the pulse with the fast ADC the trigger model of the Model 2651A High Power System SourceMeter
34. Indicator Meaning EDIT Unit is in the source editing mode ERR Questionable reading or invalid calibration step REM Unit is in remote mode TALK Unit is addressed to talk LSTN Unit is addressed to listen SRQ Service request is asserted REL Relative mode is enabled FILT Digital filter is enabled AUTO Source or measure autorange is selected asterisk Readings are being stored in the buffer The navigation wheel Turn the navigation wheel to scroll to a menu option or to change the selected value Push the navigation wheel to open menus or to select a menu option or a value In most cases pressing the navigation wheel performs the same action as pressing the ENTER key The OUTPUT ON OFF control Press this control to turn the Model 2651A source output on or off The output indicator will light when the source is on The setup and control keys provide front panel control and configuration The following figure illustrates each key s location The table following the figure contains a definition of each key Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Figure 2 Setup and control keys if 8 9 o gt DISPLAY Quro CURSOR P gt LOCAL CONFIG Key descriptions DISELAY Toggles between the various source measure displays and the user message mode CONFIG Configures a function or operation SRC Selects the source function V
35. Instrument must be used Using the trigger model we can output pulses as large as 50 A with pulse widths as small as 100 us and position our measurements with microsecond resolution The image below is a diagram of the trigger model used in this example Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Figure 14 Trigger model configuration for fast ADC example Model 2651A Local node smua trigger IDLE EVENT ID Idle Arm layer SWEEPING EVENT_ID k _ lt x gt arm count 1 arm stimulus SWEEP COMPLETE EVENT ID trigger timer 1 eal stimulus EVENT_ID Trigger layer 0 03 s ARMED EVENT ID passthrough true count 4 k lt gt count 5 source stimulus a SOURCE COMPLETE EVENT ID trigger timer 2 measure stimulus 1 a MEASURE COMPLETE EVENT ID stimulus 3 endpulse stimulus 3ms E PULSE COMPLETE EVENT ID passthrough false count 1 Local node Since only one instrument is being used in this example the local node is used In this example timer 1 is used to control the time between pulses while timer 2 is used to control the pulse width Timer 1 also controls the start of the measurements starting them at the same time it triggers the pulse and thus overlapping the measurements with the pulse When the trigger model of the Model 2651A is initialized the following occurs 1 The source measure unit SMU trigge
36. KEITHLEY A GIR EAT EIR MEASURE Q F C0 NF TD EN CE Keithley Instruments Inc Corporate Headquarters 28775 Aurora Road Cleveland Ohio 44139 440 248 0400 Fax 440 248 6168 1 888 KEITHLEY www keithley com 12 06 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com
37. Model 2651A High Power System SourceMeter Instrument Test Equipment 99 Washington Street User s Manual Er Depot Melrose MA 02176 Phone 781 665 1400 1 800 517 8431 Toll Free 1 800 517 8431 2651A 900 01 Rev A March 2011 KEITHLEY Model 2651A High Power System SourceMeter Instrument User s Manual 2011 Keithley Instruments Inc Cleveland Ohio U S A All rights reserved Any unauthorized reproduction photocopy or use the information herein in whole or in part without the prior written approval of Keithley Instruments Inc is strictly prohibited All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments Inc Other brand names are trademarks or registered trademarks of their respective holders The Lua 5 0 software and associated documentation files are copyright 1994 2008 Tecgraf PUC Rio Terms of license for the Lua software and associated documentation can be accessed at the Lua licensing site http Awww lua org license html Document number 2651A 900 01 Rev A March 201 1 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com The following safety precautions should be observed before using this product and any associated instrumentation Although some instruments and accessories would normally be used with nonhazardous voltages there are situations where hazardous conditions may be pres
38. N concepts and settings in the Model 2651A Reference Manual for more information about configuring the Model 2651A for a LAN connection connecting the Model 2651A to the LAN and establishing a LAN connection to the instrument Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Once the Model 2651A is configured correctly and connected to the LAN you can use the Ex Discovery Browser to identify the IP addresses of LXI certified instruments that are set up for automatic IP address selection Once identified you can double click the IP address in the LXI Discovery Browser to open the web interface for the instrument The LXI Discovery Browser is available on the Keithley Instruments website http www keithley com To locate the LXI Discovery Browser on the Keithley website 1 2 3 4 Select the Support tab In the model number box type 2651A From the list select Software and click the search icon A list of software applications for the Model 2651A is displayed See the readme file included with the application for more information For more information about the LXI Consortium see the LXI Consortium website http www Ixistandard org Alternatively use the following instructions to connect to the instrument web interface 1 Confirm the LAN light on the instrument is illuminated The LAN light is located on the rear panel as part of the LAN RJ 45 connector Op
39. SMU 1 TSP Link Node 1 Controller Model 2651A SMU 2 TSP Link TSP Link Node 2 Series 26xxA SMU 3 TSP Link Node 3 Model 260xA Model 261xA or Model 263xA Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com To set the TSP Link node number using the front panel interface Press the MENU key Select TSPLink Select NODE Use the navigation wheel to adjust the node number Press the ENTER key to save the TSP Link node number ak WN gt On the Model 2651A SMU 1 TSP Link node 1 perform a TSP Link reset to update it with the linked instruments 1 Press the MENU key 2 Select TSPLink 3 Select RESET NOTE If error 1205 is generated during the TSP link reset ensure that the Series 2600A has a unique TSP Link node number You can also perform a TSP Link reset from the remote command interface by sending tsplink reset to the Model 2651A This method is used in the example program Device connections To run the test make the connections as illustrated in the following figure To ensure good contact use care when making connections A CAUTION Carefully consider and configure the appropriate output off state source and compliance levels before connecting the Model 2651A High Power System SourceMeter Instrument to a device that can deliver energy for example other voltage sources batteries capacitors solar cells
40. View Favorites Tools Help x secure Search v Favorites LXI Keithley Instruments 2651A Main A GREATER MEASURE OF CONFIDENCE LXI Web Interface Welcome Pag Welcome Page Instrument Model Manufacturer Set Password Firmware Revision TSB Embedded Serial Number Reading Buffers Description Flash Upgrade LX Class TSP Express LXI Version Log MAC Address Glossary TCP IP Address ee ee oe ndi wate tote sagi al Pt TSB Embedded TSB Embedded is a web application that includes a command line interface that you can use to issue commands and interact with the instrument TSB Embedded also provides a convenient way to create and manage user scripts TSB Embedded resides in the instrument You can use TSB Embedded to run some of the application examples in other sections of this manual If you can access the web interface home page but cannot use TSB Embedded or TSP Express make sure you have the Java SE Runtime Environment JRE Version 6 or later installed on your computer Create a script using TSB Embedded NOTE If you are using TSB Embedded to create scripts you do not need to use the commands loadscript or loadandrunscript and endscript Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Exercise Create and run a script with TSB Embedded The following programming example illustrates the setup and command sequence of a
41. a alae bebes ex edite fut etos ee Bede vet rue eb eise pude ded card v tenete Pune ba Re Quo 3 1 Connect to the instrument web interface ssssssssssssssssssseeneeeneneermernnene 3 1 Web interlace NOME Page e H H 3 2 IP COMMGUPAU ON LAD sisssci st peceas casted SS EIS 3 2 TOBE MBCOO SG scsteii diete Tutor mar hb PUDE ORE euet EI EXPE ENRR EN UN a 3 3 Greate a script using TSB EmbBOGed uut iier rotat rient HIER eene Erud eo Rape eoe eu L Eit u sos 3 3 Exercise Create and run a script with TSB Embedded sssssssessseee 3 4 Isesding DUITeESc ossis niat un REM AMMIAN I IL 3 7 Exercise Retrieve readings fom a Duffer ss oret uice utto ttr nen avi ncn pum NER uote TR dn ap eR pA EdKR RSS 3 7 ToP EXPOSE Mee TT 3 8 Making basic front panel measurements eese 4 1 Introd UC HOD cone irc rit oe Sum bete tse e beet ke pter Beto Boc Pa rape fel irbee a rule etta ed P tame i Cute bee sere td 4 1 Equipment needed Tor this earmple ucro bate toa ra ret rst ta dese e v tcv 4 1 M ie xeenasiioprm ETE 4 1 Making jront panel measulremenls o coast ra ERR RE RED EE RARE ERE RUNE RE SUD RARE MERE RR RUAR 4 2 Step Te Select and set SOURCE level sten ela trii a e tuU ivi R EI REEE 4 2 St8p 2 oet camplianes ilico iocis ionis ee ob ot ta Pepe boe tet tae tutae bsebari E iut d Agi a eee bee bn DIR PUE 4 2 Step 3 Select measurement f nction and range cei es cess aaan aa doce
42. ain of the device from 1 A to 100 A in 100 points The points of this sweep will be gathered using pulsed measurements with a pulse width of 500 us and a pulse period of 50 ms for a 1 percent duty cycle These pulses will be limited to a maximum of 10 V At the end of the sweep all SMU outputs will be turned off The resulting data from this test will be returned in a Microsoft Excel compatible format you can cut and paste the output from the console that can be used for graphing and analysis 2651A 900 01 Rev A March 2011 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Model 2651A High Power System SourceMeter Instrument User s Manua Section 8 Troubleshooting FAQs In this section About this Sectio caeci chineenneainnaad 8 1 Need different line frequency or voltage ssss 8 1 Can use external trigger INS s 2 2 cissincctcasacdessasscedpsascncanies 8 1 The internal web page of the instrument is not accessible 8 1 Save the present state of the instrument 8 2 LabVIEW driver for the Model 2651A About this section The intent of this section is to troubleshoot the most common problems encountered with the Model 2651A For additional troubleshooting information please see the Troubleshooting section in the Model 2651A Reference Manual Need different line frequency or voltage need to use a M
43. ator for assistance e If you are using the automatic configuration method and you have a one to one connection between the instrument and the computer verify that the computer is set to receive an IP address automatically e If you are using the manual configuration method over a corporate network verify that you have entered the IP address gateway and subnet mask provided by your network administrator e If you are using the manual configuration method and a one to one connection with the computer verify that the subnet mask agrees with the computer s settings e If the above suggestions do not work see the Model 2651A Reference Manual Communication interfaces Save the present state of the instrument How do I save the present state of the instrument You can save the present state of the instrument using the front panel menus or from a command interface See the Model 2651A Reference Manual User setups LabVIEW driver for the Model 2651A Where do find the LabVIEW driver for the Model 2651A The latest NI LabVIEW driver is available from the Keithley Instruments support website http www keithley com support 8 2 2651A 900 01 Rev A March 2011 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Section 9 Next steps In this section Additional Model 2651A information ccccccsssseeeeeeeeeeeeees 9 1 Additional Model 2651A information
44. basic source measure procedure with the following parameters e Source function and range Volts autorange e Source output level 5 V e Current compliance limit 10 mA e Measure function and range Current 10 mA To create and run a sample script with TSB Embedded 1 From the navigation on the left side of the web interface select TSB Embedded The TSB Embedded page is displayed Figure 4 Select TSB Embedded LXI Keithley Instruments 2651A Main Windows Internet Explorer p G Je http 192 168 1 101 Fie Edit View Favorites Tools Help yy Favorites LXI Keithley Instruments 26514 Main KEITHLEY A GREATER MEASURE OF CONFIDENCE LXI Web Interface Welcome Page Welcome Page IP Configuration Instrument Model Manufacturer Set Password Firmware Revision Serial Number Reading Buffers Description Flash U d cds Ade LXI Class TSP Express LXI Version Log MAC Address Glossary TCP IP Address Av i Me a a tO s aas Aimo PH a atte satan nt 2 Tocreate the example script enter the name of the TSP script basic source measure atthe location shown by 1 in the following illustration Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Figure 5 TSB Embedded page Keithley Instrume Test Script Builder Embedded User Scripts TSP Script basic_source_measure n Export to PC Import fro
45. ce In this section Nttod ctioM E 3 1 Connect to the instrument web interface esses 3 1 Web ntertace Home BS spo RR RASA DRM ATARI Li bias 3 2 IP conHgutadon abuse shea ceu beo eom toco RS 3 2 TSB Embeddad imer rere ertet a cep i Hte cue ERE eae 3 3 Reading DUIRG ie EAR 3 7 TOP EXPOS S i diteisiep tap UE MB Epp TENE 3 8 Introduction The Model 2651A web interface allows you to review instrument status control the instrument and upgrade the instrument over a LAN connection The instrument web page resides in the firmware of the instrument Changes you make through the web interface are immediately made in the instrument Many examples in this manual and in the Model 2651A Reference Manual can be run through the TSB Embedded page of the instrument web interface Connect to the instrument web interface NOTE The instrument web interface requires the web browser plug in Java SE Runtime Environment Version 6 or later The latest version of the plug in is available from http www java com en download manual jsp Installation files are also available on the Model 2651A Product Information CD ROM that came with your instrument The instrument web interface uses Java applets and depending on your browser security settings may require your permission to download and install them To connect to the instrument web interface you must have a LAN connection from the computer to the instrument See LA
46. conds 100e 6 lt pulseWidth lt 4e 3 The current limit of the pulse in amps The number of pulses to output 5 pulseLimit numPulses E Example Usage CapturePulseV 5 300e 6 50 5 1 function CapturePulseV pulseLevel pulseWidth pulseLimit numPulses if numPulses nil then numPulses 1 end Configure the SMU reser smua reset smua source func smua OUTPUT DCVOLTS smua sense smua SENSE REMOTE smua source rangev pulseLevel smua source levelv 0 The bias level smua source limiti 5 We DO limit Use a measure range that is as large as the biggest possible pulse smua measure rangei pulseLimit smua measure rangev pulselLevel Select the fast ADC for measurements smua measure adc smua ADC FAST Set the measure count to be 1 25 times the width of the pulse to ensure we capture the entire pulse plus falling edge smua measure count pulseWidth smua measure interval 1 25 Prepare the reading buffers smua nvbufferl clear smua nvbufferl collecttimestamps 1 smua nvbufferl collectsourcevalues 0 smua nvbufferl fillmode smua FILL ONCI smua nvbuffer2 clear smua nvbuffer2 collecttimestamps 1 smua nvbuffer2 collectsourcevalues 0 smua nvbuffer2 fillmode smua FILL ONCI Cannot use source values with async measurements A A Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 T
47. ction Introduction to capturing waveforms eeeessses 5 1 Equipment needed for this example ssssss 5 1 Sot upseotmiunosubli s uiae cuiii ioi lids Goin ueste icta i Le LX 5 1 bI V e Neolalel ejoa 5 2 Configuring the trigger model 5 necne ree 5 2 Example program code cecccccceeceeeeeseeceeaeeeeeeeseeseceeeeeeeees 5 4 Example program Usage eoess ta peser E De rH puR YAN ERE IE ARa 5 9 Introduction to capturing waveforms The Model 2651A High Power System SourceMeter Instrument offers a unique feature In addition to a traditional integrating ADC the Model 26514 also features a fast sampling ADC The fast ADC of the Model 2651A allows the instrument to take measurements at high speed with capabilities similar to an oscilloscope This allows you to capture data at up to one million samples per second with more than 5000 readings in a single burst This feature allows simultaneous current and voltage measurements without any additional hardware and offers 18 bit resolution providing for high accuracy even at high speed The fast ADC of the Model 2651A allows this instrument to be used in a broad range of applications such as negative bias temperature instability NBTI testing and transient thermal analysis In this example we will demonstrate how to use the fast ADC of the Model 2651A to capture both the current and voltage waveforms of high power pulses
48. de 3 smua source levelv gateLevel node 3 smua source highc node 3 smua ENABLE If you find your gate oscillating even with a dampening resistor in place try enabling high C mode to help stabilize the gate Prepare the reading buffers node 3 smua nvbufferl clear node 3 smua nvbufferl collectsourcevalues 1 if node 3 smua nvbufferl fillmode nil then node 3 smua nvbufferl fillmode node 3 smua FILL ONCE end node 3 smua nvbuffer2 clear node 3 smua nvbuffer2 collectsourcevalues 1 if node 3 smua nvbuffer2 fillmode nil then node 3 smua nvbuffer2 fillmode node 3 smua FILL ONCE end OPhejswliEs Cin node 3 smua source output node 3 smua OUTPUT ON node 2 smua source output node Z smuay oU EUN smua source output smua OUTPUT ON if errorqueue count 0 then print Errors wer ncountered reset return end Give the gate some time to settle before starting the sweep delay 0 001 node 3 smua measure iv node 3 smua nvbufferl node 3 smua nvbuffer2 Start the 2651A 42 trigger model node 2 smua trigger initiate Start the 2651A 41 trigger model smua trigger initiate Wait until test is complete waitcomplete cx Olt ple s ONR node 3 smua source output swexele emma COUMEU pe smua source output smua OUTPUT OFF node 2 smua source output noce 2 smilie CUME UN OPE Print back data PrintDualSmuRdsonData end T
49. e Event Detector receives the event trigger from TSP Link trigger 1 begins to output the pulse waits the programmed source delay if any and outputs the SOURCE_COMPLETE event to timer 1 before allowing the SMU trigger model to continue 4 Timer 1 receives the SOURCE_COMPLETE event trigger from TSP Link trigger 1 and begins its countdown 5 The SMU trigger model continues to the Measure Event where it waits for a programmed measure delay if any takes a measurement and then continues until it stops at the End Pulse Event where it waits for an event trigger 6 The timer 1 countdown expires and timer 1 outputs an event trigger to the SMU End Pulse Event 7 The SMU s End Pulse Event Detector receives the event trigger from timer 1 outputs the falling edge of the pulse and then allows the SMU trigger model to continue 8 The SMU trigger model compares the current trigger layer loop iteration with the trigger count e If the current iteration is less than the trigger count the trigger layer repeats and the SMU trigger model reaches Source Event where it waits for another trigger from TSP Link trigger 1 The trigger model then repeats from step 2 e If the current iteration is equal to the trigger count the SMU trigger model exits the trigger layer passes through the arm layer and returns to an idle state Series 2600A trigger model operation In this example the Series 2600A is controlled by script so its trigger model is no
50. egin trigger timer 1 count dsteps 1 trigger timer 1 delay pulsePeriod trigger timer 1 passthrough true trigger timer 1 stimulus smua trigger ARMED EVENT ID trigger timer 1 clear Timer 2 controls the pulse width trigger timer 2 count 1 trigger timer 2 delay pulseWidth 3e 6 trigger timer 2 passthrough false trigger timer 2 stimulus smua trigger SOURCE COMPLETE EVENT ID trigger timer 2 clear Configure SMU Trigger Model for Sweep Bach unit will source half the current so divide the start and stop values by 2 Sms OUT Sce o scart NECS SS SIE S smua trigger source limitv pulseLimit pulseLimit 0 1 Again keep the limit SMU 1 lower than the limit of SMU 2 to prevent parallel V sources smua trigger measure iv smua nvbufferl smua nvbuffer2 smua trigger measure action smua ENABLE Return to the bias level at the end of the pulse sweep smua trigger endpulse action smua SOURCE IDLE smua trigger endsweep action smua SOURCE IDLE smua trigger count dsteps smua trigger arm stimulus 0 smua trigger source stimulus ieee tiner DIL SIBMZESNME EID smua trigger measure stimulus 0 Siiliblel Hie LEGS EMCOUIlSS Sie smMollwis ieee MSE E STE VIERIIN ETT smua trigger source action smua ENABLE Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com COMmiriGuice 2951 2 Deus SIMU 2 node 2 smua
51. en an Internet browser such as Microsoft Windows Internet Explorer version 6 0 or later only If you do not know the IP address press the MENU key on the instrument front panel and then select LAN gt STATUS gt IP ADDRESS In the Address box of the Internet browser enter the IP address of the instrument and press Enter The home page of the instrument web interface is displayed Web interface home page The Welcome page of the web interface gives you basic information about the instrument including The instrument model serial number firmware revision calibration date and LXI information An ID button to help you locate the instrument Links to the instrument web applications including TSB Embedded Reading Buffers Flash Upgrade and TSP Express IP configuration tab The IP Configuration tab provides access to the Model 2651A LAN settings Refer to the Model 2651A Reference Manual for additional information about IP configuration Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com NOTE You must reload the page if you change the gateway or subnet mask from the Modify IP configuration page If you change the IP address you must type the new IP address in the address bar before you can use the web interface again Figure 3 Select IP configuration LXI Keithley Instruments 26514 Main Windows Internet Explorer Gc v e http 192 168 1 101 File Edit
52. ent This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury Read and follow all installation operation and maintenance information carefully before using the product Refer to the user documentation for complete product specifications If the product is used in a manner not specified the protection provided by the product warranty may be impaired The types of product users are Responsible body is the individual or group responsible for the use and maintenance of equipment for ensuring that the equipment is operated within its specifications and operating limits and for ensuring that operators are adequately trained Operators use the product for its intended function They must be trained in electrical safety procedures and proper use of the instrument They must be protected from electric shock and contact with hazardous live circuits Maintenance personnel perform routine procedures on the product to keep it operating properly for example setting the line voltage or replacing consumable materials Maintenance procedures are described in the user documentation The procedures explicitly state if the operator may perform them Otherwise they should be performed only by service personnel Service personnel are trained to work on live circuits perform safe installations and repair products Only properly trained service personnel may
53. ent receives the event trigger from timer 2 and outputs the falling edge of the pulse after which it allows the SMU trigger model to continue 9 The SMU trigger model then compares the current Trigger Layer loop iteration with the trigger count e Ifthe current iteration is less than the trigger count the Trigger Layer repeats and the SMU trigger model reaches Source Event where it waits for another trigger from timer 1 The trigger model then repeats from step 3 e If the current iteration is equal to the trigger count the SMU trigger model exits the Trigger Layer passes through the Arm Layer and returns to idle Example program code NOTE The example code is designed to be run from Test Script Builder or TSB Embedded It can also be run from other programming environments such as Microsoft Visual Studio or National Instruments LabVIEW However modification of the example code may be required to do so The following script contains all the code necessary to output and capture a current or voltage pulse using the Model 2651A fast ADC The script sets up the source measure unit SMU configures the trigger model prepares the reading buffers executes the test and outputs the collected data in a format that can be copied and pasted from the instrument console to a Microsoft Excel spreadsheet The script is written using Test Script Processor TSP functions rather than as a single block of inline code TSP functions are s
54. est Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com 1 fun end Function PrintDualSmuRdsonData Description This function processes the data stored in the SMU reading buffers by function DualSmuRdson and prints back the individual SMU data and the combined SMU data and Rds on readings in a format that is copy and paste compatible with Microsoft Excel ction PrintDualSmuRdsonData Print the gate SMU readings print Gate SMU r nSource Value tVoltage tCurrent promese se abis ve c koreans YAO 2 Vee WESS Wie in node 3 smua nvbufferl sourcevalues 1 node 3 smua nvbuffer2 1 node 3 smua nvbuffer1 1 Print column headers print TimestampNtSource ValueNtVoltage 1 tCurrent 1 tVoltage 2NtCurrent 2 tVoltage tCurrent tRds on Loop through the reading buffer printing one row at a time for i 1 smua nvbufferl n do Combined Source Level SMU1 source level SMU2 source level sourceLevel smua nvbufferl sourcevalues i node 2 smua nvbufferl sourcevalues i Combined Voltage Average SMU1 Voltage reading SMU2 Voltage reading combinedVoltage smua nvbuffer2 i node 2 smua nvbuffer2 i 2 Combined Current SMU1 Current reading SMU2 Current reading combinedCurrent smua nvbufferl i node 2 smua nvbufferl i Rds on Combined Voltage Combined Current rdson combinedVoltage combinedCurrent Print a row
55. estEquipmentDepot com Configure the Pulsed Sweep setup Timer 1 controls the pulse period trigger timer 1 count numPulses 1 12 Durty Gycle trigger timer 1 delay pulseWidth 0 01 trigger timer 1 passthrough true trigger timer 1 stimulus smua trigger ARMED EVENT ID Timer 2 controls the pulse width trigger timer 2 count 1 trigger timer 2 delay pulseWidth 3e 6 trigger timer 2 passthrough false trigger timer 2 stimulus smua trigger SOURCE COMPLETE EVENT ID Configure SMU Trigger Model for Sweep Pulse Output Pulses will all be the same level so set start and stop to the same value and the number of points in the sweep to 2 smua trigger source linearv pulseLevel pulseLevel 2 smua trigger source limiti pulseLimit smua trigger measure action smua ASYNC We want to start the measurements before the source action takes place so we must configure the ADC to operate asynchronously of the rest of the SMU trigger model actions Measure I and V during the pulse smua trigger measure iv smua nvbufferl smua nvbuffer2 Return the output to the bias level at the end of the pulse sweep smua trigger endpulse action smua SOURCE IDLE smua trigger endsweep action smua SOURCE IDLE smua trigger count numPulses smua trigger arm stimulus 0 smua trigger source stimulus iEEsbgprese
56. he documentation for Test Script Builder or TSB Embedded for directions on how to run scripts and enter commands using the instrument console The script contains comments that describe what is being performed by the lines of code and document the functions in the script Lines starting with node 2 are commands that are being sent to Model 2651A on node 2 through the TSP Link interface Lines starting with node 3 are commands that are being sent to the Series 2600A through the TSP Link interface All other commands are executed on the master Model 2651A on node 1 excu bl Title Combining SMUs for 100A Example Description This script is designed to perform an Rds on sweep on a power OSFET device It combines two 2651A SMUs in parallel to perform a current sweep up to 100A Data collected from the sweep is then returned in a icrosoft Excel compatible format for plotting and analysis Equipment needed 2x 2651A 1x 26xxA 2x TSP Link Cable TSP hiniC om incimcie ON Upas Node POENAE 2651A 2 2 26xxA B Master Node PC Interface Node 1 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Name DualSmuRdson gateLevel dstart dst pulsePeriod pulseLimit Description This function uses two 2651A SMUs to perform a pulsed Rds on up to 100A Sweep with currents Parameters gateLevel Th Osee The dstop The dsteps The pulseWidth The pu
57. he trigger model continues as described in step 6 e Ifthe iteration number is greater than the trigger count the SMU trigger model exits the Trigger Layer and goes into the Arm Layer Upon entering the Arm Layer the SMU trigger model outputs the SWEEP COMPLETE event trigger TSP Link trigger 2 receives the SWEEP COMPLETE event trigger and outputs a trigger on TSP Link line 2 This trigger is meant to signal the Series 26004 that it is acceptable to continue and it no longer needs to hold the current gate level The trigger model checks the current Arm Layer iteration number against the arm count e If the iteration number is less than the arm count the trigger model stays in the Arm Layer and begins the entire process again from step 1 e If the iteration number is greater than the arm count the trigger model continues exits the Arm Layer and returns to an ildle state Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Series 26xxA instrument s trigger model operation The following figure illustrates the Series 26xxA trigger model configuration for this test Figure 21 Series 26xxA instrument s trigger model for IV curve characterization TSP Link bus Series 26xxA subordinate node 2 smua trigger IDLE EVENT ID Idle TSP Link 9 Arm layer SWEEPING EVENT ID tsplink trigger 1 O arm count 1 EVENT_ID arm stimulus L1 SWEEP COMPLETE EVENT ID immo
58. hile standing on a dry insulated surface capable of withstanding the voltage being measured The instrument and accessories must be used in accordance with its specifications and operating instructions or the safety of Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com the equipment may be impaired Do not exceed the maximum signal levels of the instruments and accessories as defined in the specifications and operating information and as shown on the instrument or test fixture panels or switching card When fuses are used in a product replace with the same type and rating for continued protection against fire hazard Chassis connections must only be used as shield connections for measuring circuits NOT as safety earth ground connections If you are using a test fixture keep the lid closed while power is applied to the device under test Safe operation requires the use of a lid interlock Ifa screw is present connect it to safety earth ground using the wire recommended in the user documentation The A symbol on an instrument means caution risk of danger The user should refer to the operating instructions located in the user documentation in all cases where the symbol is marked on the instrument The A symbol on an instrument means caution risk of electric shock Use standard safety precautions to avoid personal contact with these voltages The symbol on an instrument shows tha
59. igure To ensure good contact use care when making connections NOTE For best results all connections should be left floating no connections should be tied to ground Figure 17 Connections for IV curve characterization Model 2651A master node 1 Equivalent SENSE GUARD S G LO G OUTPUT Lo i GGGHI Comm SMU subordinate node 2 SMU master node 1 Gate resistor if required TSP Link 9 Series 26xxA subordinate node 2 N Channel power MOSFET LlOSGH GGG S Lo HI Gate resistor if required SLO Model 260xA Model 261xA or Model 263xA NOTE During high current pulsing through the channel of the device the gate may begin to oscillate This oscillation creates an unstable voltage on the gate which may cause unstable measurements through the device channel You can install a resistor to dampen this oscillation and stabilize the gate Install the resistor between the gate of the device and the force and sense HI of the Model 2651A If the gate still remains unstable enable High C mode on the Model 2651A source measure unit SMU Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Configuring the trigger model Correctly configuring the trigger model allows you to achieve pulsed measurements with precise timing and current levels up to 50 A on the Model 2651A The following figure illus
60. iguring the trigger Modal uiui iore luck iebeatvelineccessetnenithislaeeedievenesgnniaaenedahades 6 5 Model 2651A tagger model eperatlQnh uacua erede ea xp E REX OEE aR 6 7 Series 26xxA instruments trigger model operation 2 ebrei icc cnet bern t ete botte cda 6 9 Example program COUG fece Hn 6 10 Examiple program tls AGG sa issuer n ACRUNRARNRR EA ASDNN MAR REM M M ceE URR E 6 16 Increasing SMU current sourcing ability eeeeeeeererrnneerenneee 7 1 introduction to combining SIMMS 552215 accede sicot unos tatto shots co tos uo sa teaties aN 7 1 Combining SMUs to increase current sourcing capability seeseee 7 2 Equipment needed for this example 2 ii otro LI eicit E ERE EIFE LIP HEC RETIA ERE ERA Ad ei 7 3 STUD COMMUNIC N sr e E 7 3 DEVICE CONNECIONS PR nesta dated a i aA ATS LAR 7 4 Config ring the rigger migdel u aai tics dile re d eene tae teet tei cena Cice d eece o cdi ateieed 7 6 Master Model 2651A node 1 trigger model operation s 7 8 Model 2651A node 2 trigger model operation ecrire iiaa 7 8 Series 2600A tigger model operatio 2 A an aaa UD erai aaa A ALIA HAMM TN LR ee 7 9 Example program Codec aa dente MANRMM AA IDEE DRE CURES 7 9 Example program sdb casae rase UM A UP MEM MINE Td uSA red aM dM IUOS 7 16 Troubleshooting FAQ neenon anri nnn nnum ana
61. imilar to functions in other programming languages such as Microsoft Visual C or Visual Basic and must be called before the code contained in them is executed Because of this running the script alone will not execute the test To execute the test run the script to load the functions into test script memory and then call the functions Refer to the documentation for Test Script Builder or TSB Embedded on page 3 3 for directions on how to run scripts and enter commands using the instrument console The script contains comments that describe what is being performed by the lines of code and documentation for the functions in the script alte Title Fast ADC Usage Description This script is designed to output pulses and capture both the current and the voltage of the pulse using the fast ADC of the Model 2651A High Power System SourceMeter instrument Equipment Needed 1x 2651A Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Name CapturePulseV pulseLevel pulseWidth pulseLimit numPulses Description This function outputs voltage pulses with a 1 duty cycle and performs measurements using the fast ADC to capture each pulse in its entirety At the conclusion of the pulse train the data is returned to the instrument console in a Microsoft Excel compatible format Parameters pulseLevel The voltage level of the pulse in volts pulseWidth The width of the pulse in se
62. ine Criggaer i e EVEN IND trigger timer 1 clear Timer 2 controls the pulse width trigger timer 2 count 1 trigger timer 2 delay pulseWidth 3e 6 trigger timer 2 passthrough false trigger timer 2 stimulus smua trigger SOURCE COMPLETE EVENT ID trigger timer 2 clear Configure Drain SMU 2651A trigger model smua trigger source linearv dstart dstop dsteps smua trigger source limiti pulseLimit smua trigger measure action smua ENABLE smua trigger measure iv smua nvbufferl smua nvbuffer2 smua trigger endpulse action smua SOURCE IDLE smua trigger endsweep action smua SOURCE IDLE smua trigger arm count gsteps smua trigger count dsteps smua trigger arm stimulus 0 smua trigger source stimulus trigger Cimer EIL Eya JUD smua trigger measure stimulus 0 smua trigger endpulse stimulus trigger timer 2 EVENT ID smua trigger source action smua ENABLE Configure TSP Link Triggers tsplink trigger 1 clear tsplink trigger 1 mode tsplink TRIG SYNCHRONOUSM jo onib bon dob ah No o bal MiM timus smua trigger ARMED EVENT ID TSP Link Trigger 1 is used by the 2651A to command the 26xxA to step the gate and for the 26xxA to report to the 2651A that it has completed the step tsplink trigger 2 clear tsplink trigger 2 mode Esplink ERI GSEABISENG tsplink trigger 2 stimulus smua trigger SWEEP COMPLETE
63. lsePeriod The pulseLimit gate level to be used d starting current level of the drain sweep ending current level of the drain sweep number of steps in the drain sweep width of the drain pulse in seconds time from the start of one drain pulse to the next in seconds op dsteps pulseWidth uring the sweep Ihe voltage limit of the drain pulse in volts Note Actual pulse limit will be 10 lower than setting to protect SMUs in a compliance condition Example Usage DualSmuRdson 10 11 i 100 100 5009 6 50 function DualSmuRdson gateLevel pulseLimit decar OSEE e 3 10 dsteps pulseWidth pulsePeriod Esphimkiresert S Were ielneie ene ledas EENT nodes are present reset Configure 2651A 1 Drain SMU 1 smua reset smua source func smua smua sense smua smua source offmode smua smua source offfunc smua smua source offlimiti le 3 SMU 1 will be a OV voltage output is turned off SMU smua source rangei smua source leveli smua source limitv OUTPUT DCAMPS SENSE REMOTE OUTPUT NORMAL OUTPUT DCVOL 1 ett oii a source with IS mit 1mA limit when its 2 will be a 0A current source with a 10V limit when the output is turned off These settings keep the parallel combination safe in case one SMU is turned off math max math abs dstart 2 math abs dstop 2 0 9 SMU 2 will have a voltage li
64. m Layer enters the Trigger Layer outputs the ARMED event trigger and then reaches the Source Event where it waits for an event trigger The ARMED event trigger is received by timer 1 which begins its countdown and passes the trigger through to be received by TSP Link trigger 1 timer 2 and the SMU Source Event Detector TSP Link trigger 1 receives the event trigger from timer 1 and sends a trigger through the TSP Link interface to Model 2651A subordinate node 2 to instruct it to output the pulse The SMU Source Event Detector receives the event trigger from timer 1 begins to output the pulse waits the programmed source delay if any outputs the SOURCE COMPLETE event to timer 2 and then allows the SMU trigger model to continue Timer 2 receives the SOURCE COMPLETE event trigger from timer 1 and begins to count down The SMU trigger model continues to the Measure Event where it waits a programmed measure delay if any takes a measurement and continues until it encounters the End Pulse Event where it waits for an event trigger The timer 2 countdown expires and timer 2 outputs an event trigger to the SMU End Pulse Event The SMU End Pulse Event Detector receives the event trigger from timer 2 outputs the falling edge of the pulse and allows the SMU trigger model to continue The SMU trigger model compares the current trigger layer loop iteration with the trigger count e If the current iteration is less than the trigger
65. m PC Save Script View Script Clear l Restore Model 2651A defaults Console Hu Instrument Output smua nvbufferl clear smua nvbufferl appendmode 1 AE Run Delete Reset Abort Script Export Script to USB 3 Enter the code below in the script box 2 Restore Model 2651A defaults smua reset Select voltage source function smua source func smua OUTPUT_DCVOLTS Set source range to auto smua source autorangev smua AUTORANGE_ON Set voltage source to 5 V smua source levelv 5 Set current limit to 10 mA smua source limiti 10e 3 Set current range to 10 mA smua measure rangei 10e 3 erg Oxgi CWESITUE s smua source output smua OUTPUT ON Print and place current reading in buffer print smua measure i smua nvbuffer1 Turn off output smua source output smua OUTPUT OFF Beep beeper enable beeper ON beeper beep 1 1200 beeper enable beeper OFF Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com NOTE Commands and parameters for the Model 2651A are case sensitive It is important to type in the commands exactly as shown to avoid syntax and execution errors 4 Click Save Script 3 The script is added to the User Scripts list on the left Standard edit functions such as copy cut and paste work in TSB Embedded 5 Clear the buffer 4
66. mat that is copy and paste compatible with Microsoft Excel I function PrintPulseData print Timestamp tVoltage tCurrent for i 1 smua nvbufferl n do print string format g t g t g smua nvbufferl timestamps i smua nvbuffer2 i smua nvbufferl i end end Example program usage The functions in this script allow the parameters of the test to be adjusted without rewriting and rerunning the script To execute the test either call CapturePulseV to capture voltage or CapturePulseI to capture current passing in the appropriate values as parameters The parameters of the CapturePulseV function are in the following table CapturePulseV parameters Parameter Un ar pulseLevel Volts The voltage level of the pulse pulseWidth Seconds The width of the pulse pulseLimit Amperes The current limit of the pulses to output numPulses Not applicable The number of pulses to output An example call to this function is as follows CapturePulseV 10 300e 6 50 5 This call will output five 10 V pulses with a 300 us pulse width The pulses will be limited to 50 A and have a 1 percent duty cycle At the completion of the pulsed outputs the source measure unit SMU output is turned off The resulting data from this test will be returned in a Microsoft Excel compatible format you can cut and paste the output from the console that can be used for graphing and analysis The parameters of the CapturePulser function are contained
67. mit of 10V limit 10 lower than that of SMU 2 we can ensure that only one of the two SMUs will ever go Sets the DC bias level SSIS che We bias Linte By setting the voltage into compliance and become a voltage source This is desirable because if both SMUs went into compliance there would which is an unsafe condition smua measure nplc smua measure rangev smua measure autozero smua measure delay 0 005 pulseLimit pulseWidth 1 localnode linefreq be two voltage sources in parallel smua AUTOZERO ONCE smua measure nplc 20e 6 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Set the delay so that the me Prepare the reading buffers asurement is near the end of the pulse smua nvbufferl clear smua nvbufferl collecttimestamps 1 smua nvbufferl collectsourcevalues 1 smua nvbufferl fillmode smua FILL ONCE smua nvbuffer2 clear smua nvbuffer2 collecttimestamps 1 smua nvbuffer2 collectsourcevalues 1 smua nvbuffer2 fillmode smua FILL ONCE Configure TSP Link Trigger 1 tsplink trigger 1 clear tsplink trigger 1 mode tsplink TRIG FALLING tsplink trigger 1 stimulus iExESbeyeyee s timer 1L SIND IED TSP Link Trigger 1 signals 2651A 2 to pulse Timer 1 controls the pulse period by triggering the pulse to b
68. na ainne sau uER enn uu eu staan 8 1 Pet cie me mie Ati seannetearenn E inca nedan an 8 1 Need different line frequency or Voltage scnccscensicteeniiaenicnniinen linden 8 1 Can luse external ager lINGS enron 8 1 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Model 2651A High Power System SourceMeter Instrument User s Manual Table of Contents The internal web page of the instrument is not accessible ssesssess 8 1 Save the present state of the instrument sssssssssssssssssseeeeneemeenne 8 2 LabVIEW driver for the Model 2651 orta ute t Rc e ea DRE Er Da ga ex RR NE 8 2 24g 9 1 Additional Model 2651A Information iei irte ree toa ci o rx ba ch pesa 9 1 jp dE l 1 2651A 900 01 Rev A March 2011 iii Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Section 1 Introduction In this section haeo p nastiness 1 1 Extended Waltallly ce aste tele aai oiiaii 1 1 Introduction tothis stus iaoia o pee AER cians saltates td e DERE Abus 1 1 pobres TR 1 2 Organization of manual Sections oreet eren 1 2 Model 2651A applications essssssessee 1 2 Welcome Thank you for choosing a Keithley Instruments product The Model 2651A High Power System SourceMeter Instrument pr
69. ned to protect themselves from the risk of electric shock the circuit is capable of operating at or above 1000V no conductive part of the circuit may be exposed f Do not connect switching cards directly to unlimited power circuits They are intended to be used with impedance limited sources NEVER connect switching cards directly to AC mains When connecting sources to switching cards install protective devices to limit fault current and voltage to the card Before operating an instrument ensure that the line cord is connected to a properly grounded power receptacle Inspect the connecting cables test leads and jumpers for possible wear cracks or breaks before each use When installing equipment where access to the main power cord is restricted such as rack mounting a separate main input power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator For maximum safety do not touch the product test cables or any other instruments while power is applied to the circuit under test ALWAYS remove power from the entire test system and discharge any capacitors before connecting or disconnecting cables or jumpers installing or removing switching cards or making internal changes such as installing or removing jumpers Do not touch any object that could provide a current path to the common side of the circuit under test or power line earth ground Always make measurements with dry hands w
70. nent call a Keithley Instruments office for information To clean an instrument use a damp cloth or mild water based cleaner Clean the exterior of the instrument only Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument Products that consist of a circuit board with no case or chassis e g a data acquisition board for installation into a computer should never require cleaning if handled according to instructions If the board becomes contaminated and operation is affected the board should be returned to the factory for proper cleaning servicing 11 07 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Table of Contents pipes m HP 1 1 ee UICE IL ULL LEER 1 1 Extended Wanay em 1 1 Introduction to THIS MANUAL iioc icut iet ERE Ehe tont EE E RERUM UI ERR RS e XE DRE PEPN EAT ad 1 1 CD ROM CORDES nia tiir bee oer EHE PR EREMO ERU ad RI A TR PHP IRE TR Da eS 1 2 Organization Of manual Schons sssrinin innana nian in EE MEE Po NEED aseheadanate 1 2 Model 285 TA appliGatlofis icio qu Eoo EUNDI Ep dpt CPU a aa 1 2 Using the front panel interface eeeeeeeeeeeeeee eere eene 2 1 figere e Tm mE 2 1 g edernim EERE 2 1 Using the web Interfaeg uiiis iini dade med ER ERR REB EERYRE L0 EARE ROLL UU UELLE X FR LKR ES 3 1 IntFOd UO cado haeo d
71. ns unstable enable High C mode on the Model 2651A source measure unit SMU Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Configuring the trigger model When the trigger model is correctly configured you can achieve pulsed measurements with precise timing and current levels up to 100 A for the combined Model 2651A instruments Refer to the Example program code on page 7 9 for an implementation of this trigger model In this trigger model the master Model 2651A node 1 is configured to control the overall timing of the sweep Subordinate Model 2651A node 2 is configured to wait for signals from the master Model 2651A node 1 that prompt it to pulse In this example the Series 2600A is controlled by script so its trigger model is not used The following figure illustrates the overall trigger model configuration of this test which synchronizes the two Model 2651A High Power System SourceMeter Instruments to within 1 us to provide a single 100 A pulse Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Figure 26 Trigger model configuration for Rds on sweep Model 2651A master node 1 trigger timer 1 soes passthrough true stimulus EVENT_ID trigger timer 2 500e 6 s passthrough false stimulus EVENT_ID count tsplink trigger 1 EVENT_ID mode tsplink TRIG FALLING fC
72. nt 5 arm stimulus SWEEP COMPLETE EVENT ID trigger timer 1 gt stimulus Trigger layer ARMED EVENT ID passthrough true source stimulus SOURCE COMPLETE EVENT ID trigger timer 2 measure stimulus E stimulus MEASURE COMPLETE EVENT ID endpulse stimulus PULSE COMPLETE EVENT ID passthrough false count 1 tsplink trigger 1 EVENT_ID mode tsplink TRIG SYNCHRONOUSM fF stimulus tsplink trigger 2 EVENT ID TSP Link 9 mode tsplink TRIG FALLING stimulus Series 26xxA subordinate node 2 smua trigger IDLE EVENT ID Idle TSP Link 9 Arm layer SWEEPING EVENT ID tsplink trigger 1 O arm count 1 EVENT ID arm stimulus oO SWEEP COMPLETE EVENT ID np mode tsplink TRIG_SYNCHRONOUSA Trigger layer ARMED EVENT ID gt count tsplink trigger 2 source stimulus EVENT ID SOURCE COMPLETE EVENT ID measure stimulus mode tsplink TRIG FALLING MEASURE COMPLETE EVENT ID endpulse stimulus NI p Model 260xA Model 261xA or Model 263xA Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Model 2651A trigger model operation The following figure illustrates this test s Model 2651A trigger model configuration Figure 20 Model 2651A trigger model for IV curve characterization Model 2651A master smua trigger IDLE EVENT ID Idle Arm layer SWEEPING EVENT ID
73. ntered i e eee rerurn end Start the 26xxA trigger model node 2 smua trigger initiate Start the 2651A trigger model smua trigger initiate waitcomplete Mele omel ica reading buffers Al nil then node 2 smua FILL ONCE I ec MLL qim node 2 smua FILL ONCE the test node 2 smua OUTPUT ON smua OUTPUT ON SW Otto OIE iE Smua source outpult node 2 smua source output Return the data PrintIVcurveData gsteps end dsteps petar complet smua OUTPUT OFF node 2 smua OUTPUT OFF Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com ok IE PrintIVcurveData gsteps dsteps Description This function will output the data collected by the W Curves cuncetiom im e Mierogort mecel ue ompeiioiie Tornato Bor a step of the gate this function will output three columns that contain the drain sweep data and the gate data in the first row Parameters gsteps The number of steps in the gate sweep dsteps The number of steps in the drain sweep Example Usage PrintIVcurveData 5 21 ae function PrintIVcurveData gsteps dsteps linel line2 it for i 1 gsteps do linel linel string format Vgs 0 2f t gq t g t node 2 smua nvbufferl sourcevalues i node 2 smua nvbuffer2 i node 2 smua nvbufferl i line2 line2 Source Value tVoltage tCurrent t end print linel print line2 for i 1 dsteps do
74. ntroduction to combining SMUs A common test performed on power MOSFETs characterizes the resistance of the device under test DUT In this test the gate of the DUT is held at a constant voltage representing the on state of the device while a current is swept through the drain and the voltage is measured The resulting data can be plotted to show drain current versus Rds on for the DUT The following figure is an example of this plot 0 02 p 0 019 0 018 0 017 0 016 0 015 Rds on 0 014 0 013 0 012 0 011 0 01 Figure 22 Example Rds on curves for a power MOSFET device VMgs 10V Vgs 6V 100 20 30 40 50 60 Ids amperes 70 80 90 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com To avoid device self heating this test is usually performed using pulsed measurements This method pulses current across the device for a short duration During this pulse after the pulse has settled the voltage is measured The duration of the pulse and the duty cycle in which the pulses are applied to the device are controlled minimizing self heating A single Model 2651A High Power System SourceMeter Instrument can pulse measurement test with precision timing at currents up to 50 A and pulse widths as low as 100 us To increase the pulse output you can combine two Model 2651A High Power System SourceMeter Instruments to output a pulse that
75. odel 2651A at a different line frequency or voltage What do I need to do The Model 2651A supports a line frequency of either 50 Hz or 60 Hz The factory configures the Model 2651A to automatically detect and operate at line frequencies either 50 Hz or 60 Hz each time the instrument power is turned on In noisy environments it may be necessary to manually configure the instrument to match the actual line frequency See the Model 2651A Reference Manual Line frequency configuration Can use external trigger lines Yes these signals appear on the digital I O connector For information about the digital I O capabilities refer to Controlling digital I O lines in the Model 2651A Reference Manual The internal web page of the instrument is not accessible cannot access the internal web page of the instrument How do fix this Ensure that the instrument has been assigned a valid and unique IP address Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Section 8 Troubleshooting FAQs Model 2651A High Power System SourceMeter Instrument User s Manual e To view the IP address of the Model 2651A press MENU Select LAN gt STATUS gt IP ADDRESS If a valid IP address is displayed the instrument configuration is correct If 0 0 0 0 is displayed the IP address is not valid e If you are using the automatic configuration method over a corporate network contact your network administr
76. of data print string format gNt gNt gNte gNt gNt gNCSgNCSgNCtSg smua nvbufferl timestamps i sourceLevel smua nvbuffer2 i smua nvbufferl i node 2 smua nvbuffer2 i node 2 smua nvbufferl i combinedVoltage combinedCurrent rdson end Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Section 7 Increasing SMU current sourcing abilit Example program usage 7 16 The functions in this script allow the sweep parameters of the test to be adjusted without having to rewrite and rerun the script A test can be executed by calling the function DualSmuRdson gateLevel dstart dstop dsteps pulseWidth pulsePeriod pulseLimit with the appropriate values passed to it in its parameters DualSmuRdson parameters Parameter S ume Deseripon gateLevel Volts The voltage level to hold the gate dstart Amperes The level of the first step in the drain sweep dstop Amperes The level of the last step in the drain sweep dsteps Not The number of steps in the drain sweep applicable pulseWidth Seconds The width of the pulse in the drain sweep pulsePeriod Seconds The time between the start of consecutive pulses in the drain sweep pulseLimit Volts The voltage limit of the pulses in the drain sweep An example call to this function is as follows DualSmuRdson 10 1 100 100 500e 6 50e 3 10 This call will set the gate source measure unit SMU output to 10 V and then sweep the dr
77. on TSB Embedded Serial Number 2 Select smua nvbuffer1 1 3 Inthe Recall Attributes area near the bottom of the page select Values and Time Stamp 2 Description Flash Upgrade LXI Class TSP Express LXI Version Log MAC Address XGlOSSREY Les es M P IRR d jg Rie aho M P 4 Click Download 3 The table displays the present buffer data Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Figure 7 Downloading the reading buffer Keithley Instruments Reading Buffers Help 5 Notice that the Source Value column is not populated To collect source values before taking readings use TSB Embedded to set the following attribute smua nvbufferl collectsourcevalues 1 Figure 8 Sample downloaded reading buffer 146875048995 00 146675048995 206658101081 affert 110057605695 389714288711 smua nvbuffer2 TSP Express The TSP Express tab provides access to the TSP Express Launch page From this page click the Launch button to start TSP Express Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com NOTE Only one TSB Embedded or TSP Express session can be running and connected to the same instrument Figure 9 Select TSP Express LXI Keithley Instruments 2651A Main Windows Internet Explorer go jE http 192
78. on Street Melrose MA 02176 TestEquipmentDepot com Model 2651A High Power System SourceMeter Instrument User s Manual Section 1 Introduction e Characterization of power discretes on page 6 1 Demonstrates how to use the Keithley Instruments Model 2651A with a second Series 2600A System SourceMeter instrument to characterize power MOSFETs and IGBTs This example introduces the interaction between two instruments trigger models The application performs pulsed measurements collecting IV curve data and placing itina Microsoft Excel compatible file format for graphic and analysis e Increasing SMU current sourcing ability on page 7 1 Demonstrates how to combine two Keithley Instruments Model 2651A instruments with an additional Series 2600A System SourceMeter instrument and characterizes the resistance of a power MOSFET by sweeping current up to 100 A 2651A 900 01 Rev A March 2011 1 3 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Section 2 Using the front panel interface In this section Mattel dO scie ooi eot EE UE EPI tius 2 1 SEOTIED ATL sues tese treet rereretnre iii etui cere teem etree errr terre 2 1 Introduction Before starting this section complete the tasks outlined in the Model 2651A Quick Start Guide Once you have completed those tasks read this section which provides enough basic information about the Model 2651A front panel interface to work
79. ovides manufacturers of electronic components and semiconductor devices a high power source measure unit SMU A SMU is an instrument that combines source and measurement capabilities in a single instrument This combination simplifies test processes by eliminating synchronization and connection issues associated with multiple instrument solutions A Model 2651A provides a scalable high throughput highly cost effective solution for precision DC pulse and low frequency AC source measure testing that also maintains code compatibility with the Series 2600A Extended warranty Additional years of warranty coverage are available on many products These valuable contracts protect you from unbudgeted service expenses and provide additional years of protection at a fraction of the price of a repair Extended warranties are available on new and existing products Contact your local Keithley Instruments representative for details Introduction to this manual This manual provides detailed tutorials to help you achieve success with your Keithley Instruments Model 26514 In addition the basics of the two simplest interfaces the front panel and the web interface are provided to familiarize you with the instrument Select and run all examples in Sections 5 6 and 7 that are relevant to your intended use and to the equipment you are using Some of the examples in this manual may use unfamiliar commands and concepts For detailed information about these
80. pot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Title IV Curves Example Script Description This script will perform a series of IV curves on a MOSFET or IGBT device and will return the data in a Microsoft Excel compatible format for graphing and analysis TS Palme Comi ignes OE Node 1 2651A Node 2 26xxA Master Node Node 1 I aol Iy Curves lgetart Getop Gsteps detart si opsiepspne pulsewidth pulsePeriod pulseLimit Description This function will perform a series of pulsed sweeps on a MOSFET or IGBT device to generate a series of IV Curves that characterize the device Note To avoid device oscillations a series resistor on the gate terminal of the device may be required Parameters Gisieetaier The starting voltage of the gate sweep gstop The ending voltage of the gate sweep gsteps The number of steps in the gate sweep dstart The starting voltage of the drain sweep dstop The ending voltage of the drain sweep dsteps The number of steps in the drain sweep pulseWidth The width of the drain pulse in seconds pulsePeriod The time in seconds between the start of consecutive drain pulses in the sweep pulseLimit The current limit in amperes of the drain pulse Example Usage iy Comwes 5 9 5 O 10 21 3006 6 30e 5 50 SAN unco IW Ctryes getart CSOs Getsrs Cerar Ceco Cetere jouillseiachela pulsePeriod pulseLimit reset tsplink reset 2
81. r model e Leaves the idle state e Flows through the Arm Layer e Enters the Trigger Layer e Outputs the ARMED event trigger e Pauses at the Source Event where it waits for an event trigger Timer 1 receives the ARMED event trigger and begins its countdown while passing the event trigger through to both the SMU s Source Event and Measure Event simultaneously The SMU Measure Event receives the event trigger from timer 1 and begins to take measurements Because measurements have been configured to be asynchronous the Measure Event begins its execution before the Source Event has completed and will continue to take measurements even after the End Pulse Event has executed For more information see Using the remote trigger model in the Model 2651A Reference Manual The SMU Source Event receives the event trigger from timer 1 begins to output the pulse and then waits the programmed source delay if any before it outputs the SOURCE COMPLETE event to timer 2 and allows the SMU trigger model to continue Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com 5 Timer 2 receives the SOURCE_COMPLETE_EVENT_ID event trigger from timer 1 and begins its countdown 6 The SMU trigger model continues to the End Pulse Event where it pauses and waits for an event trigger from timer 2 The timer 2 countdown expires and timer 2 outputs an event trigger to the SMU End Pulse Event The SMU End Pulse Ev
82. r the Series 2600A on TSP Link node 2 are sent over the TSP Link interface Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Figure 16 GPIB communication overview Model 2651A TSP Link Node 1 TSP Link Series 26xxA TSP Link Node 2 Model 260xA Model 261xA or Model 263xA When using the TSP Link communication interface each instrument must have a unique TSP Link node number Configure the node number for the e Model 2651A to 1 e Series 2600A to 2 To set the TSP Link node number using the front panel interface Press the MENU key Select TSPLink Select NODE Use the navigation wheel to adjust the node number Press the ENTER key to save the TSP Link node number ak U N gt On the Model 2651A SMU 1 TSP Link node 1 perform a TSP Link reset to update it with the linked instruments 1 Press the MENU key 2 Select TSPLink 3 Select RESET NOTE If error 1205 is generated during the TSP link reset ensure that the Series 2600A has a unique TSP Link node number You can also perform a TSP Link reset from the remote command interface by sending tsplink reset to the Model 2651A This method is used in the example program Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Device connections To run the test make the connections as illustrated in the following f
83. refer to the Reference Manual part number 2651A 901 01 on the Product Information CD ROM that came with your instrument Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com CD ROM contents Two CD ROMs are shipped with each Model 2651A order The Model 2651A Quick Start Guide User s Manual and Reference Manual are provided in PDF format on the Model 2651A Product Information CD ROM e Quick Start Guide Provides unpacking instructions describes basic connections and reviews basic operation information If you are new to Keithley Instruments equipment refer to the Quick Start Guide to take the steps needed to unpack set up and verify operation e User s Manual Provides application examples If you need a starting point to begin creation of applications refer to the User s Manual for a variety of specific examples e Reference Manual Includes advanced operation topics and maintenance information Programmers looking for a command reference and users looking for an in depth description of the way the instrument works including troubleshooting and optimization should refer to the Reference Manual A second CD ROM contains the Test Script Builder script development software Keithley Instruments part number KTS 850 Use this CD ROM to install the Test Script Builder Integrated Development Environment This software not only provides an environment to develop a test program but also
84. reset node 2 smua source func node 2 smua OUTPUT DCAMPS node 2 smua sense node 2 smua SENSE REMOTE node 2 smua source offmode node 2 smua OUTPUT NORMAL node 2 smua source offfunc node 2 smua OUTPUT DCAMPS node 2 smua source offlimitv 10 See quer dixsaue SMU will be a OA current source with 10V limit when output is turned off node 2 smua source rangei math max math abs dstart 2 math abs dstop 2 node 2 smua source leveli 0 Sets the DC bias level node 2 smua source limitv 10 Sets the DC bias limit node 2 smua measure nplc 0 005 node 2 smua measure rangev pulseLimit node 2 smua measure autozero node 2 smua AUTOZERO ONCE node 2 smua measure delay pulseWidth 1 node 2 linefreq node 2 smua measure nplc 20e 6 Set the delay so that the measurement is near the end of the pulse Prepare the reading buffers node 2 smua nvbufferl clear node 2 smua nvbufferl collecttimestamps 1 node 2 smua nvbufferl collectsourcevalues 1 node 2 smua nvbufferl fillmode node 2 smua FILL ONCE node 2 smua nvbuffer2 clear node 2 smua nvbuffer2 collecttimestamps 1 node 2 smua nvbuffer2 collectsourcevalues 1 node 2 smua nvbuffer2 fillmode node 2 smua FILL ONCE Configure TSP Link Trigger 1 node 2 tsplink trigger 1 clear node 2 tsplink trigger 1 mode TESZ spl me DES AENG Timer 1 controls the pulse
85. s level smua source limitv 10 c Wee wile iqucie Use a measure range that is as large as the biggest possible pulse smua measure rangev pulseLimit smua measure rangei pulseLevel ENoelectm she asi or measurements smua measure adc smua ADC FAST Set the measure count to be 1 25 times the width of the pulse to ensure we capture the entire pulse plus falling edge smua measure count pulseWidth smua measure interval 1 25 Prepare the reading buffers smua nvbufferl clear smua nvbufferl collecttimestamps 1 smua nvbufferl collectsourcevalues 0 smua nvbufferl fillmode smua FILL ONC smua nvbuffer2 clear smua nvbuffer2 collecttimestamps 1 smua nvbuffer2 collectsourcevalues 0 smua nvbuffer2 fillmode smua FILL ONCI Cannot use source values with async measurements Fl Ey Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com end Configure the Pulsed Sweep setup Timer 1 controls the pulse period trigger timer 1 count numPulses 1 is Duty Cyele trigger timer 1 delay pulseWidth 0 01 trigger timer 1 passthrough true trigger timer 1 stimulus smua trigger ARMED EVENT ID Timer 2 controls the pulse width trigger timer 2 count 1 trigger timer 2 delay pulseWidth 3e 6 trigger timer 2 passthrough false trigger timer 2 stimulus smua trigger SOURCE COMPLETE EVENT ID
86. ssing the event trigger The SMU Source Event Detector receives the event trigger from timer 1 sets the SMU output to the pulse level waits for a programmed source delay if any and outputs the SOURCE_COMPLETE event to timer 2 Timer 2 receives the SOURCE_COMPLETE event trigger and begins its countdown The SMU trigger model moves to the Measure Event where it waits for a programmed measure delay if any then takes a measurement The SMU trigger model moves to the End Pulse Event where it stops and waits for an event trigger from timer 2 The timer 2 countdown expires and outputs an event trigger to the SMU End Pulse Event The End Pulse Event Detector receives the event trigger from timer 2 sets the SMU output to the bias level and then continues The trigger model checks the current Trigger Layer iteration number against the trigger count e Ifthe iteration number is less than the trigger count the trigger model stays in the trigger layer and wraps around to the Source Event where it waits again for an event trigger from timer 1 as it did in step 3 This time however timer 2 will not receive an event trigger from TSP Link trigger 1 Despite this the trigger model will continue running because the timer 1 count was set to one less than the trigger count Therefore timer 1 will continue outputting event triggers while the trigger model is in the Trigger Layer outputting one trigger event every time the countdown expires T
87. t the surface may be hot Avoid personal contact to prevent burns The 4 symbol indicates a connection terminal to the equipment frame If this symbol is on a product it indicates that mercury is present in the display lamp Please note that the lamp must be properly disposed of according to federal state and local laws The WARNING heading in the user documentation explains dangers that might result in personal injury or death Always read the associated information very carefully before performing the indicated procedure The CAUTION heading in the user documentation explains hazards that could damage the instrument Such damage may invalidate the warranty Instrumentation and accessories shall not be connected to humans Before performing any maintenance disconnect the line cord and all test cables To maintain protection from electric shock and fire replacement components in mains circuits including the power transformer test leads and input jacks must be purchased from Keithley Instruments Standard fuses with applicable national safety approvals may be used if the rating and type are the same Other components that are not safety related may be purchased from other suppliers as long as they are equivalent to the original component note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product If you are unsure about the applicability of a replacement compo
88. t used Example program code NOTE The example code is designed to be run from Test Script Builder or TSB Embedded It can also be run from other programming environments such as Microsoft Visual Studio or National Instruments LabVIEW However modification of the example code may be required to do so Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com The following script contains all the code necessary to perform an Rds on sweep up to 100 A using two Model 2651A High Power System SourceMeter Instruments and a Series 2600A System SourceMeter Instrument This script e Initializes the TSP Link connection e Configures the source measure units SMUs e Configures the trigger models of the two Model 2651A instruments e Prepares the reading buffers e Executes the test e Stores the collected data in a format that can be copied from the instrument console and pasted into a Microsoft Excel spreadsheet The script is written using Test Script Processor TSP functions rather than as a single block of inline code TSP functions are similar to functions in other programming languages such as Microsoft Visual C or Visual Basic and must be called before the code contained in them is executed Because of this running the script alone will not execute the test To execute the test run the script to load the functions into test script memory and then call the functions Refer to t
89. the ability to load the test program onto the instrument Running a program loaded on the instrument eliminates the need to send individual commands from the host computer to the instrument when running a test Organization of manual sections Bookmarks for each manual section have been provided in the PDF see Adobe Acrobat or Reader help for information about bookmarks The manual sections are also listed in the Table of Contents located at the beginning of this manual Model 2651A applications In addition to being a stand alone instrument the Keithley Instruments Model 2651A High Power System SourceMeter Instrument can intelligently connect to other instruments and multiple devices This manual provides application examples that guide you through several common instrument to instrument scenarios These applications are presented after the summary information about the High Power System SourceMeter Instrument and include e Making basic front panel measurements on page 4 1 Demonstrates the basic measurement function using a single Model 2651A and a two terminal device under test DUT e Capturing high power pulse waveforms on page 5 1 Capturing high power pulse waveforms Demonstrates how to use the Keithley Instruments Model 2651A connected to a control computer This example introduces configuration of the instrument s trigger model to make high speed measurements of an LED Test Equipment Depot 800 517 8431 99 Washingt
90. the trigger model 2 rei creen 6 5 Example program COJE A sse eese trr heroe Pet Ema eiai 6 10 Example program Usate eoosar ente eoo i etras eh pas ex aasa 6 16 Introduction to power discrete I V curve testing A common test performed on power MOSFETs and IGBTs characterizes the I V performance of the device under test DUT at various gate voltages In this test the gate of the device is held at a constant voltage while the voltage on the drain or collector of the device is swept and current is measured This process is repeated for several different gate voltages and the resulting data is plotted to show a series of I V curves for the device The following figure illustrates an example of this plot for a power MOSFET device Figure 15 Example set of IV curves for a power MOSFET device 50 45 40 35 T g g 30 Vgs 5 00 E A Vgs 6 00 59 A at oo MM M OMM Vgs 7 00 20 ams 3 m Vgs 8 00 J Vgs 9 00 15 f 10 5 L 0 4 0 2 4 6 8 10 12 Vds volts Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com To avoid device self heating this test is usually performed using pulsed measurements This method pulses voltage across the device for a short duration During this pulse after the pulse has settled the current is measured The duration of the pulse and the duty cycle in which the pulses are applied to the device are controlled
91. through the examples provided in this manual The front panel of the Keithley Instruments Model 2651A contains the following items 1 2 The POWER key 3 The navigation wheel The display 4 The OUTPUT ON OFF control 5 The setup and control keys You can use the keys display and the navigation wheel to access view and edit the menu items and set values For additional information about the front panel see the General operation section in the Model 2651A Reference Manual Front panel The front panel of the Model 2651A is shown below Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Figure 1 Front panel 3 21000V SrcA 20 0000 A LimAL1O 0000V CURSOR 1 The POWER key Press this key to turn the instrument on Press it again to turn the instrument 2 3 4 5 x off 0 The display During operation the display provides readings and information about the selected measurement and configuration It also shows the control status local or remote If REM is displayed the instrument is being controlled remotely through GPIB LAN or USB If REM is not displayed control is through the front panel During setup the display shows menu choices that you can use to configure the instrument The items listed below represent the possible display indicators and what they mean
92. trates this test s overall trigger model configuration including the interactions between the Model 2651A and the Series 2600A instrument Refer to the Example program code on page 6 10 for an implementation of this trigger model In this example the trigger model of each instrument is configured to perform a linear sweep The Series 2600A is configured to sweep the voltage applied to the gate of the device The Model 2651A is configured to sweep the voltage across the drain or collector of the device The Model 2651A is configured to repeat its sweep and will do so as many times as there are steps in the sweep of the Series 2600A For example if the Model 2651A instrument s sweep contains four points and the Series 2600A instrument s sweep contains three points the Model 2651A instrument s sweep will run three times for a total of 12 points To synchronize the sweeps between instruments the trigger lines of the TSP Link interface are used The following figure illustrates the 12 point sweep example Figure 18 SMU output from configured trigger model I Gate LV Series 26xxA 4V Drain nn nnt RE B or Collector 0V Model 2651A Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Figure 19 Trigger model configuration for IV curve characterization Model 2651A master smua trigger IDLE EVENT ID Idle Arm layer SWEEPING EVENT ID arm cou
93. ulse Event where it stops and waits for an event trigger from TSP Link trigger 2 7 ATSP Link trigger is received by TSP Link trigger 2 indicating that the Model 2651A instrument sweep has completed and it is safe to go to the next step TSP Link trigger 2 outputs an event trigger to the SMU End Pulse Event Detector 8 The SMU End Pulse Event Detector receives an event trigger from TSP Link trigger 2 completes the End Pulse Action and then continues Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com 9 The trigger model checks the current Trigger Layer iteration number against the trigger count e If the iteration number is less than the trigger count the trigger model stays in the trigger layer and wraps around to the Source Event where it waits again for an event trigger from TSP Link Trigger 1 The trigger model repeats from step 2 e If the iteration number is greater than the trigger count the SMU trigger model exits the Trigger Layer and goes into the Arm Layer 10 Because the arm count is set to 1 the trigger model exits the Arm Layer and returns to an idle state Example program code NOTE The example code is designed to be run from Test Script Builder or TSB Embedded It can also be run from other programming environments such as Microsoft Visual Studio or National Instruments LabVIEW However modification of the example code may be required to do so The
94. ulses in the drain collector sweep An example call to this function is as follows Iv_Curves 5 9 5 0 10 21 300e 6 30e 3 50 This call sweeps the drain of the device from 0 V to 10 V in 21 points The points of this sweep are gathered using pulsed measurements with a pulse width of 300 us and a pulse period of 30 ms for a 1 percent duty cycle These pulses are limited to a maximum of 50 A This sweep is performed at five different gate voltages starting with 5 V and ending at 9 V The resulting data from this test will be returned in a Microsoft Excel compatible format you can cut and paste the output from the console that can be used for graphing and analysis 2651A 900 01 Rev A March 2011 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com Section 7 Increasing SMU current sourcing ability In this section Introduction to combining SMUS 5 ene eee 7 1 Combining SMUs to increase current sourcing capability 7 2 Equipment needed for this example ssssssss 7 3 Sebup carmmbnicatiniss s ee ucsep iom teer t esten baeo tem cost 7 3 Device Connections oreet tri e e ED rp eR AXE EFE PASO E CHE SERRE 7 4 Configuring the trigger model eere eee innen 7 6 Example programi COJE eers s pap tete rape pastu i ERE a EM ESREREME 7 9 Example program USAGE siiriccixscencticidcianiaveccaigedusiatictacactastbenies 7 16 I

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