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Lab1

1. 4 The toolbar beneath the menu bar contains tool icons 4 The status bar at the bottom contains runtime information 4 The work area in the center contains input file and runtime information windows The T Spice window Figure 8 allows you to view a SPICE file sp in which the exported resonator components their simulation parameters and connectivity are displayed a The Insert Command feature provides an easy convenient means of entering device and model statements stimuli simulation commands and simulation options within T Spice You will use the Insert Command feature to add two commands One instructs the simulator to run an AC analysis The other instructs the simulator to include a file process sp in the simulation netlist this file contains fabrication process parameters for the resonator components T Spine HR rona sp cd Fis Edt View Sinultion Tabe Options window Hap PELC i PAs o s 8 SPICE nest List written by S Edit Winiz 7 02 Gratbeo on Pec F 2001 at 14 46 55 t Gawetoco poobing commanda probe Opkioas poeoebetilensme 1 home Jacolin Jocumentation Hemefco V49 1 Contagurat ico F L prokhesdblile 0 home jacolini Joecwument st ion MemeProtV3 1 Cont igurat aon F Liles bubo prokhetopmodule Kybesonstor WUBCET DERIV Vo in out Cin le 6 Bibel GATN 1 Ag 1k Esp cuti O smopoeg O 1 A0 Eampin ampin in 1 Fampout out O outi O i GAI
2. to make sure you have placed the voltage sources correctly PEP PT ey Placing Global Nodes Global nodes simplify the drawing and maintenance of schematics They allow nodes throughout a design to be connected to each other without the need to draw or delete wires Global nodes are especially useful for power ground anchor clock reset and other system wide nodes that require routing throughout the hierarchy of the design fs To create a global node you must place a global symbol on the design with the Global Symbol tool Global symbols are special instances that function as wireless connectors When you attach a node to a global symbol you connect that node to all other nodes on every page and module in the design file that are attached to the same global symbol Such nodes then become global nodes You will add three global ground symbols and three anchors to the schematic The global grounds will be connected to the negative terminals of the voltage sources to set electrical grounds The anchors will be connected to the fixed mechanical terminals to signify mechanical anchors fs To place a ground symbol in the design click the Global Symbol tool on the left side of the schematic window a Left click on the schematic page The Instance Module browse box will appear with a list of the available global nodes 3 Select the ground Gnd symbol and click OK The first ground symbol will be placed where you left clicked i
3. Files lnzlude fike Library file Table hle L elete lintary file 4 Inkiaizator 2 Qube 4 Settings Table 3 Voltage source 2 Opbmestion lncet Command Cancel Figure 11 Selecting the technology process file a Click the Insert Command button and then cancel close to dismiss the Command Tool dialog You have just inserted the simulation commands into your netlist You will now run the simulation 3 Click the Save icon on the toolbar to save the changes you made to the netlist Simulating from a Netlist Using T Spice and W Edit SPICE netlists can be simulated and the simulation results can be displayed graphically In this example the coupled electro mechanical behavior of the resonator is simulated using T Spice Simulating with T Spice 3 Click the Run Simulation button located in the Simulation toolbar to run the simulation The Run Simulation dialog opens 3 Check the Do not show check box amp Click Start Simulation in the Run Simulation dialog The AC analysis that you had set up earlier using the Insert Command will now be performed The Simulation Output window will appear It displays simulation statistics and progress information as well as any warning or error messages During the AC analysis the simulation results are being recorded Once the simulation is complete you may examine the analysis results using the S Edit Probe tool 3 Probing a Waveform The waveform probe is used to brow
4. NY hO 1 y AF RE ACin i m Ei e m m a cre Simulata like Figure 8 T Spice window 3 Place the cursor on a blank line before the End of main circuit MyResonator line 3 Select the Insert Command tool from the Command toolbar The T Spice Command Tool dialog box appears Figure 9 Anaki Gunent squice Files Inibelzshan Dai Festlinigs Table Volegs soe Opomizelion Paredes Tiareiert DC opeialing port Transfer funcion DE arela swegp Faraman a4aep THE FE E E Figure 9 T Spice Command Tool dialog The T Spice Command Tool dialog lists command categories on the left By default the Analysis category is selected The right side of the dialog contains buttons listing the commands within the selected category this command list may also be viewed by clicking the sign next to each category When a command is selected the right side of the dialog changes to contain the parameters of the selected command 3 Add an AC analysis command by clicking the AC button on the right side of the T Spice Command Tool dialog The directory tree on the left side of the T Spice Command Tool dialog will open up to list the commands available under Analysis The right side of the T Spice Command Tool dialog will contain parameters specific to the AC Analysis command 3 Select decade as the Frequency sampling type o Set Frequencies per decade to 500 Frequency range From to 10k and Frequenc
5. Select the left comb and then flip it by choosing Edit gt Flip gt Horizontal 3 Move the comb drives so that their connection pins represented by circles line up with the pins on the plate Figure 2 Note Make sure that the Vactuate pins of the comb face the Vactuate pins of the plate Vpassive t Disp t LinearCombDrive Rigidelate Dirk LinearCombDrive Dirk Vpassive h Disp b Figure 2 Aligning the comb drives to the plate Instantiating Folded Springs 3 Instantiate the LinearFoldedSpring_DirX module and place it above the plate 3 Create a copy of the folded spring and place it below the plate 3 Flip the second instance of the folded spring by selecting Edit gt Flip gt Vertical Note Make sure that the VPassive pins of the spring face the Vpassive pins of the plate Wiring Objects Wires are drawn using the Wire tool E At first you may confuse the Wire tool with the Line tool Lines are used to graphically represent components they are non electrical objects used to annotate your schematic Wires are electrical and are used to connect objects Zooming the View Sensitive operations such as wiring nodes require a closer view for accuracy 3 Select View gt Zoom gt Mouse amp Drag a box around the plate with the left mouse button Allow enough room to see the areas between the comb drives and the folded springs If you find you have zoomed in too much or too little use the plus and minus keys to Zo
6. TEA Gi Dalhousie University Inspiring Minds Department of Electrical and Computer Engineering ECED 6240 CMOS MEMS Lab 1 MEMS Pro Tutorial Lab report due Feb 27th In this tutorial you will create a schematic design analyze system behavior and generate device layout with the MEMS Pro tools S Edit T Spice W Edit and L Edit The design example is an electrostatic lateral comb drive resonator A resonator is a MEMS transducer that can be used as a sensor by exploiting the high sensitivity of its resonant frequency to various physical parameters The resonator was chosen for your review because it is an easily understood coupled electro mechanical system e Before you start create a folder in the C ECED6240 directory and save all the files you will generate into your folder e Your lab report should include a summary of the lab the schematic of the resonator the displacement waveform and the layout of a simple mechanical structure e Write a few lines regarding your layout e g the dimension materials used etc 1 Creating a Schematic In this section you will learn how to navigate and manipulate designs using the S Edit schematic editor Launching S Edit 3 Launch S Edit by clicking from the Start menu Start gt Programs gt MEMS Pro v6 0 gt S Edit 3 The S Edit user interface consists of six areas The title bar at the very top of the application window contains the file name the module name the page n
7. al line cursors extend to the full height or length of the chart As the line cursors are moved along the chart their coordinates appear at the margins of the chart window We will demonstrate the use of Vertical Bar cursors below 3 Select Chart gt Cursors gt Vertical Bars Two vertical cursors should appear on the chart They can be dragged with the left mouse button The cursors X axis locations x1 and x2 and the difference dx between the X axis locations of both cursors are displayed at the top left corner of the chart window The Y axis location of the moving or last moved cursor is displayed under the trace name on the right side of the chart 3 Position the left bar so that it lines up with the tip of the trace peak The frequency value is shown as x1 and should be about 16 56 kHz The displacement value can be found under the trace name vm right_m x1 x2 and dx ad fe File Ede view Chart Options Window Help le hi st Beles sp gt RBS m A 4659 eledt7a ge apeh ateral Comb drive Resonator I I I F I iF Voltage Magnitude uv Displacementfright omi tunm Frequency HI For Help press Fl Figure 16 Using the Vertical Bars cursor Q gt You may now exit S Edit T Spice and W Edit 4 Generating a Layout Launching L Edit Ka amp Launch L Edit by clicking Start gt Programs gt MEMS Pro v6 0 gt L Edit A default file named Layout1 should be visible in the work a
8. ame and the mode The menu bar at the top contains commands The palette bar on the left contains tool icons The status bar at the bottom contains runtime information The display area in the center contains the schematic The standard commands toolbar below the menu bar contains often used commands TAEA ANAN Designs are contained in files each of which consists of one or more modules Modules are viewed in either of two modes 4 Symbol Mode a graphical representation of the module showing the module s connections 4 Schematic Mode shows the composition and connectivity of the module The schematic may contain one or more pages which consist largely of two component types 4 Primitives geometrical objects wires ports annotation objects and labels all created with the S Edit drawing tools 4 Instances copies of other modules dynamically linked to their originals Instances are displayed in a design using the module s symbol page Opening the File As part of this section of the tutorial you will place the components of an electrostatic lateral comb drive resonator connect those components and run an AC analysis on your design The schematic symbols for these components have two pins for each connecting side one carrying the electrical signal denoted with the prefix v as in VAnchor and the other carrying the mechanical signal with no prefix as in Anchor Other terminals are named after their location on
9. ces Properties Figure 13 Traces dialog 3 Click Apply and then OK to return to the chart amp Click Chart gt Expand Chart to better view the chart Notice that the displayed unit for vm right_m is Volts The mechanical behavior of this system is modeled using electrical analogs of mechanical components the mechanical displacement has been mapped to voltage Therefore vm right_m represents the displacement at the right_m node Let s change the label of the dependent variable axis Y axis from Voltage Magnitude to Displacement The new Y axis units will also be changed to meters 3 Choose Chart gt Options to invoke the Chart Options dialog S Click the Axes tab 3 Set the Chart title to Lateral Comb drive Resonator 3 Inthe Y axis list remove the information that appears and enter Displacement right_m under Label and m under Units Figure 14 14 Chart Options Frequency Figure 14 Chart Options dialog amp Click OK The chart is modified accordingly Figure 15 15 Ej J te i E Cc oO l D w EL 0 A CEER T ee eee ee E I I 0 i i E L I p I i p F E T I E E L E dik iik Frequency Hz Figure 15 Customizing the amplitude waveform You may want to measure specific values on the chart Cursors are vertical lines horizontal lines or points that can be used to identify locations on the trace for measuring reading The vertical and horizont
10. eform probing box is checked In the Probing data file location area set the path to the dat file that will be created myreson dat In the AC Analysis Probing Options check the Current Magnitude dB Current Phase Voltage Magnitude and Voltage Phase boxes as shown in Figure 7 Perr Waveform Probing Setup x wi awef ora Frobing Opio M Enable waveform probing O Ingude device noise contributions in probe data tie Include malkiel parameters in probe data fle Probing dete Ale location ryrecon dat Brot SC naleie Probing Options Curent Charachenstics Voltage Characlershos fe Cumart Magnitude dE M Yokags blagnituds Curent Magnitude Iv Molage Magnitude M Corer Phiose M Yokags Phaze Real Conmponart Real Comoonernt M Imagnary Comporeril Imaginary Companart Figure 7 Waveform Probing Setup dialog box Q a Click OK to accept the probing information amp Click the Save icon to save your settings 2 Adding Simulation Commands 2 You will now use T Spice to add the simulation commands in the circuit Click the T Spice button located in the Standard Commands toolbar of S Edit T Spice will launch with the exported netlist MyResonator sp open T Spice contains a full featured editor that includes search and replace of strings and regular expressions it also includes incremental find There are four areas on the T Spice user interface 4 The menu bar at the top contains menu commands
11. ing a single trace Collapsing the charts causes W Edit to show all the visible traces in one chart There should now be two charts Figure 12 one displaying the amplitude information of node right_m vm right_m and the other displaying the phase angle vp right_m both plotted versus frequency 3 Now you should be able to view a peak in the amplitude at around 17 kHz Opis Window Hele E 1 x agnitude uV M e deg For Help press F fum Figure 12 Charts representing the amplitude and the phase angle Trace Manipulation At times you may find it necessary to hide traces in order to simplify a waveform window amp Select both charts by choosing Edit gt Select All Traces 3 Choose Chart gt Collapse Charts 3 With the now single chart selected choose Chart gt Traces o Inthe Traces dialog click the box beneath the Show label to uncheck vp right_m The checkmark will disappear The trace information will still be available but the trace will not appear the next time you view the chart 13 Chart title myreson Aez Ippe Data we Freq Traces available Traces in chart C Program Files MeMSCAPSMEN Trace name idb vl Load gt ynlik ble vplright_ri idb 3 Load All gt idbpsS_LCOMB_ 3 M_a 1de v bs LOOMB 3 M_a 1 xe idbtS_LCOMB_3 M_M_1 Mde Unioad wo idbt S_ LOCO MB 2 bit ide TARR TTAB THF oe Unload all Browse Anthmetic Tra
12. n the previous 3 Copy and paste the ground symbol twice 3 Move the three ground symbols to a place in the schematic near each voltage source o Then wire the negative lower terminal of each of the three voltage sources to a ground symbol You have placed the three ground symbols Now you have to place the three anchors 3 To place an anchor symbol onto the design click the Global Symbol tool on the left side of the schematic window 3 Left click on the schematic page The Instance Module browse box will appear with a list of the available global nodes 3 Select the anchor anchor symbol see Figure 4 E Lk cald Module To Instance jeancher and fanc_m Figure 4 Instance Module browse box Click OK The anchor will be placed where you left clicked in the previous step Copy and paste the anchor symbol twice Move two anchors to a place on the schematic near each comb drive And move the third anchor near the top spring At this point the three anchor symbols should be connected to the Anchor pins of the top spring and the two comb drives Compare your wiring to the completed schematic presented in Figure 1 Pins VAnchor fixed electrical and Anchor fixed mechanical of the bottom spring should be the only pins left unconnected at this point Connect them to the VAnchor and Anchor pins respectively of the top spring lt Compare your design to the complete design presented in Figure to make sure the re
13. om in and out The arrow keys can be used to pan the view You will now create connections between the plate and the other schematic components with wires X Select the Wire tool from the schematic toolbar 3 Initiate the wire placement by left clicking on the plate at the Disp_b pin The pin is shown as an open circle on the bottom left terminal of the plate 3 Move the cursor down and end the wire placement by right clicking at the pin called Disp on the bottom spring This pin is shown as an open circle on the top left terminal of the bottom spring 3 Repeat this process to wire the plate with the other components see Figure 3 3 Home the view by pressing the Home key fl eo 7 eS eer ee ee 7 i PRERE RE P Figure 3 Schematic view of the wired elements Instantiating Voltage Sources Instantiate the Source_v_ac module Place it to the left of the left comb Instantiate the Source_v_dc module Place it to the right of the right comb Copy the instance of Source_v_de and place it to the right of the top spring Select the wire tool Wire the upper terminal of the AC source to the VAnchor pin of the left comb and the positive terminals of the DC sources to the VAnchor pin of the right comb and top spring The positive terminals in this example are located at the top of the voltage sources in this example 3 Compare your design to the complete design in Figure 1
14. rea The L Edit user interface is similar in appearance to the S Edit user interface In addition to the menu palette and status bars there is a shortcut bar that contains buttons for the most commonly used menu commands As in S Edit L Edit files are assembled hierarchically from discrete usually functionally distinct units called cells these cells can be edited and instantiated The current file and cell are named at the top of the application window 3 Select File gt Open to open the reson tdb file located under the C Program Files SoftMEMS MEMS Pro v6 0 Tutorial Resonator directory The Resonator cell should appear as the active cell Each mask layer of the Resonator cell can be viewed by clicking the corresponding layer on the Pallette bar on the left and then right click the mouse to hide all the rest layers amp Familiar yourself with L Edit and understand the layout of the Resonator cell 3 Select File gt New and click OK in the open dialog box to create a new layout of a simple structure of your choice For example a cantilever beam a bridge structure etc amp Refer to MUMPs User Manual for design rules Save your layout as tdb file in your folder 17
15. se through an S Edit design and probe nodes to examine circuit simulation results for the specified node When a node is probed S Edit invokes W Edit which automatically displays the waveform corresponding to the simulation results for that node W Edit can also be launched from T Spice by selecting Window gt Show Waveform Viewer or by clicking the W Edit button from the T Spice toolbar In this tutorial you will invoke W Edit from S Edit using the probing feature Warning Make sure that you have already set up the probing information using Setup gt Probing in S Edit S Click somewhere in the S Edit schematic window that contains the resonator schematic to re activate S Edit 12 3 Click the Probe tool located on the Schematic toolbar The cursor now has the shape of the Probe tool N 3 Left click with the Probe tool on the right_m node During waveform probing W Edit is launched displaying the results of the T Spice simulation graphically The W Edit window should display a chart containing the magnitude and phase of the displacement of node right_m resulting from the performed AC analysis Viewing a Waveform The W Edit application window can contain many child windows each containing one or more charts 3 Maximize the window containing your results by clicking the button at the upper right corner of the window Chart Setups W Edit allows the expansion of charts with more than one trace per chart into separate charts each contain
16. sonator has been wired correctly rrrrry y E Editing Object Properties Now you will edit the properties of one of the voltage sources in the schematic to set up the design for simulation amp Select the voltage source next to the left comb Invoke the Edit Instance of Module Source_v_ac dialog by selecting Edit gt Edit Object Edit Instance of Module Source v_a Instance Nere x rltee SsS Fropertice Heme Ydw Type Delak Show mag 10 C E pi phass 0 0 Text fv All SPICE OUTPUT vt Elpos ineat Tet More Yoe 0 0 Tet w al More Figure 5 Edit Instance of Module Source v ac dialog o Enter 1 for mag 0 for phase and 0 for Vdc and click OK 3 Give the voltage source for the right comb drive a DC value of 0 volts Do this by choosing Edit gt Edit Object with this source selected Enter 0 in the V field 3 Similarly give the voltage source for the folded springs a DC value of 50 Volts Labeling Nodes In S Edit connectivity is defined in terms of nodes A node is a point on the schematic to which one or more pins or wires are connected Nodes are defined by their names and the scope of a node is normally the collection of schematic pages in a module That is if a node name appears twice within a single module both names refer to the same point of connection If the same node name appears within two different modules the nodes refer to completely different points of connec
17. the component a suffix is appended to their name For instance Disp_b is the displacement pin located at the bottom _b of the plate The other suffixes are _t for top _I for left and _r for right These symbols are assembled to form the resonator design and a frequency sweep AC analysis of the system is performed to discover the resonant frequency and the magnitude of displacement The electro mechanical behavior of the components is modeled by expressing the mechanical behavior in terms of electrical analogs These models can then be used to solve for the electrical and mechanical behavior of the system as well as the coupling between the two energy domains The complete design is provided for your reference in the reson sdb file under C Program Files SoftMEMS MEMS Pro v6 0 Tutorial Resonator 3 Select File gt Open to open this file The current visible file module page and mode are named at the top of the title bar The schematic view of the resonator appears in Figure 1 Edit resonadh Aena Seati E Pagel E lal z ETT ho Heb alea SI eae fe alae a snl 2 a 3 aah Saa A E Tutorial ka Da Tele ke Tapar a a i bra bheal Carra re jajal gt elele F ele lalola j TEA E jo Aa la SofLHERE ee ee es ie So aed ne a COPY MOVEEGIT ELECT Tosi Moje Seea ohjat Sesion A Figure 1 Schematic view of the complete resonator Creating a New Module To initiate your new resonator design yo
18. tion S Edit automatically assigns a name to each node but you may also name nodes manually User assigned node labels are helpful for annotating S Edit schematics and producing more readable netlists 3 Select the Node Label tool from the schematic toolbar 4 amp Label the two wires connecting the plate to the right comb right_m and right_e To label a node click it and enter the new node name in the Place Node Label dialog box The right_e node label should be placed on the wire between the VActuate and Vactuate_r pins and the right_m node label should be placed on the wire between the Disp and Disp_r pins 3 To change the orientation of the node label click the Selection button click the node label then select Edit gt Edit Object From the Edit Node Label dialog box click one of the eight radio buttons representing the location of the label origin amp Edit the node labels orientations to look somewhat like the layout in Figure 6 3 You may rename the rest of the nodes in your diagram to match the names used in the Resonator module of the reson sdb file if you wish This is an optional step S Edit will automatically assign names to unlabeled nodes Figure 6 right m and right e nodes Setting up the Probing Information You will now specify the probing information for the resonator Select Setup gt Probing The Waveform Probing Setup dialog box appears In the Waveform Probing Options area make sure that the Enable wav
19. u must first create a new module Select Module gt New to create a module In the Module Name edit field enter MyResonator and click OK Now would be a good time to save a copy of the file Select File gt Save As to invoke the Save As dialog Select the C ECED6240 Your_own_folder enter myreson sdb as the filename and click the Save button rere Instantiating Components Instantiating a Plate 3 Select Module gt Instance to invoke the Instance Module dialog 3 Select RigidPlate_DirX as the Module to Instance and click OK RigidPlate_DirX a four sided plate with eight points of connection pins will appear at the center of the schematic page 3 Home the view by selecting View gt Home or by pressing the Home key The view of the plate will be resized so that the plate fills the contents of the window Instantiating Comb drives 3 Instantiate the LinearCombDrive_DirX module as you instantiated the plate The newly instantiated LinearCombDrive_DirX will appear above the plate in the middle of the schematic window You will have to move it to a new location using the S Edit click and drag feature Note Objects in S Edit can be moved by pressing the Alt key and left clicking to drag them 3 Place the comb drive to the right side of the previously instantiated plate 3 Place a second comb drive into the design by copying the instance With the first comb instance selected select Edit gt Copy then Edit gt Paste 3
20. y range To to 100k 10 T S pice Command T ool x AF DE orena Frequency sampling bor decade id eee SMEER Frequencies par decade Nure rarcent Transfer function Parsmelnic swesp nee oe 4l Curent sour Fiom M a Files F ntiaizabon To f H Quik Settings Table 3 Voltage rodice H Optmestion awe ZWEE Mot uted Incet Comm ard Lance Figure 10 Customizing the AC analysis amp Click the Insert Command button and then cancel close to dismiss the Command Tool dialog Once the AC analysis is set up you need to include fabrication process information into the netlist The steps below will guide you through this task amp Place the cursor on a blank line before the End of main circuit MyResonator line Access the T Spice Command Tool dialog by clicking the Insert Command icon Click the next to the Files category on the left side of the dialog Click Include file under Files The right side of the dialog box displays the parameters corresponding to your selection In the Include file field click the Browse button change the file type into Spice Files sp spc cir select the process sp file located under the Tutorial Resonator directory and click Open PEP ey 11 Spice Command ool l Analysis AC loclude File DC opersting port DC banshee sneep rrocess so Pouner Horz Biowize Trarsiert Trarefer hanckion Parmes wez Curent source

Lab1

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