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OPERATIONS MANUAL - Control Laser Corporation

1. 407 926 3500 866 6 2 8619 1 5 6 Labeling Labels must be affixed to each laser to identify the manufacturer certify compliance with 21 CFR provide warnings to the user about the wavelength level and location of accessible laser radiation present and give precautions that should be taken to avoid exposure to the laser radiation 21 CFR 1040 10 g and EN 60825 5 Figure 1 5 illustrates the placement of labels affixed to the FALIT Laser System in compliance with this requirement CLECE orev FALIT Laser Operation Manual 14 Copyright 2015 Control Laser Corporation NE Polce Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 1 5 7 Documentation Instructions must be provided that will enable the user to safely operate and maintain the laser 21 CFR 1040 10 h and EN 60825 6 1 This manual gives instructions for operating and maintaining the FALIT Laser System laser and provides warnings and cautions that must observed by the user to prevent unnecessary exposure to laser radiation It is recommended that this manual be thoroughly studied by all personnel who have any responsibility for the laser prior to its operation 1 6 Classification of Laser Functions Laser products are classified according to the maximum level of laser radiation within human access during operation only Levels accessible only during maintenance or service do not affect the classification therefore it is possibl
2. lt controllaser FALIT Tabletop Failure Analysis Laser Inspection Tool FALIT FAILURE ANALYSIS LASER INSPECTION TOOL OPERATIONS MANUAL 7101 TPC Drive 100 Orlando FL 32822 Telephone 407 926 3500 866 612 8619 Fax 407 926 3590 www controllaser com ra es Polce Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL Contents T a E E E nr een ere one ea sen oar eer eer eee 2 E a E E E AA AE AA SA rece ee eae 6 dc FROCO MMA CATION ooe A EE E A 6 AE eE e EE E A E AEE E mee ne nr E AAE A E AE S A A 6 1 3 Responsibility OF the Laser USE aisce 7 1 4 Protective Eyewear ssssssssessessessessessessessessessesseeseoseoseeseeseesersresresrrsressesresressrorrssroreoseosessesseeseeseeseeee 8 L5 Perlormance ReguirementS erecein 8 I Sed Protective HOUSINE uneren as E E RE 8 fs OPAC AET O 6 e E ee eee Cee ee ence 9 d Wo Jaro ah Fe cud gil ch a Ge g co Renan ten een nm re ne 10 My AM Ole MUU sssri an E see sauetach sens seeateeenetomoeesteteeteeees 11 15 5 LOCATON Of Controls sacer E A E E O E 11 IRERE 1E a AEAEE A EAEE E E A E AEE I A TE T 14 BA DOCUMEM al OM a E E ES 15 LO Classmiecdtion OF Laser FUNCTIONS citi sscancendnsrnseecnctycagseasnncesheownensearveonseenutensnaceecatnen wien teatnreemabreagsesanecns 15 dW A oE Reo cu A N AE ae E E AA A ee E eee eee eee 17 1 8 ESD Electrostatic Discharge Protection cccscccccccessseccecceeseeccceceeeeceeseeeeeeceeseueseee
3. 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL NOTE Please make sure that you Home the Z axis at least once after your power up the FALIT system before you make any Absolute moves This makes sure that the absolute movement is done with the highest accuracy Homing can be done via the Table Control Panel s Z axis tab Always begin jobs at Z focus If you would like to begin the current Job s lasing process by moving to the currently selected Z focus simply make sure that the Always begin jobs at Z focus check box is checked before you press the Run button Moving to pre defined custom Z Axis Positions Templates Ulilitizs Help Move to Decap Position S we Move to Cross Section Design Position 6 gt Move to Cross Section Process Position pte Hide F Move to LIBS Position r Move to Custom Z Axis Focus Positions Position 1 0 0000 Shift F1 Position2 0 0000 Shift F2 Position 3 0 0000 Shift F3 Axis Control Panel Position 4 0 0000 Shift F4 T Position 5 0 0000 Shift F5 You can move the Z axis to any 1 of 5 user configured position by selecting Table from the main menu highlighting Move to Custom Z Axis Positions and then selecting any 1 of the 5 available positions The absolute positions are displayed along with their respective position numbers Note that you can also hold down the SHIFT key on the keyboard
4. By hitting the Reset button the POWER ON labeled light should turn on signaling the operator to move to the key switch The key switch has three positions Off The machine is in off mode computers and controllers should still be in the off position CLECE OEA FALIT Laser Operation Manual 91 MNAO ONIO ER COM Copyright 2015 Control Laser Corporation 407 926 3500 FAILURE ANALYSIS LASER INSPECTION TOOL Start Starts the laser system then reverts back to the ON position Basically to properly start the FA lit tool the operator must turn the key clockwise to the START setting and then allow the key to revert back to the ON position The ON position should boot all computers and keep all controllers on This will not initialize anything until instructed by the operator Copyright 2015 Control Laser Corporation CLECE OEA FALIT Laser Operation Manual 92 MASONI O ER COM FALIT rokriee Service 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL After the computers have booted with no errors the FA lit software should be located on the desktop Double click on the FA lit shortcut and the initialization process should begin aN D L x lt q Q a gt oo a N P lt gt EC Oe 1 qn gt n gt yom Loe BE ersion 2 0 51806 1 Ee Y ACR View She Eto nay Initializing IFC Vision System l A iii S Sr a A N s
5. Laser Operation Manual 83 WW NI M Copyright 2015 Control Laser Corporation ZASE FAILURE ANALYSIS LASER INSPE T drsnas ar Cea Delete CTION TOOL Create new tolder Create FTF connection ole Mount NDAS pyre device 407 926 3500 866 612 8619 id My Computer Name Date Type Size gt 4 CD RW Drive E W cre 11 1712 3 File Folder Ja FTP Connections i DateTbI1 9 8 12 1 16 File Folder gt O System Reserved C J eti 11 29 12 1 File Folder Locat DIKO J Recovery Manager 11 29 12 1 File Folder gt d usb_backup_restore_ video 12 6 12 9 5 File Folder oS nemovsnig pova J write_comple_fix 12 5 12 3 0 File Folder b Computers Near Me timken tib 12 3 1210 File 4 188 2 Fa NAS connections a j mr thee Generate File name F WAyBackup tib amp name J Files of type Backup Archives tib S oK cancer 11 After naming the file TIB extension click OK 12 On the following screen press Next to continue 13 Now click the Proceed button to start the Backup process 14 Once the Backup has completed you will see the dialog box below click OK Infarction u Backup operation succeeded 15 Close the Acronis Backup software by clicking on the Red X in the upper right hand corner of the screen 16 Following the previous steps 1 4 change the system BIOS boot priority back to the WDC Hard drive then Save and Exit to bootup into Windows an
6. Location Y enter to set a new width The height of the object Type in a new value and press enter to set a new height The width of the object Type in a new value and press Width ae i Height CLECE OEA FALIT Laser Operation Manual 41 WWW CONTR M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL Circle only The radius of the object Type in a new Radius value and press enter to set a new radius Hollow circle only The inside radius of the object Radius Thickness Type in a new value and press enter to set a new inside radius Hollow rectangle only The thickness of the left wall of Thickness Left a hollow rectangle Type in a new value and press enter to set a new value Hollow rectangle only The thickness of the right wall of Thickness Right a hollow rect Type in a new value and press enter to set a new value Hollow rectangle only The thickness of the top wall of Thickness Top a hollow rect Type in a new value and press enter to set a new value Hollow rectangle only The thickness of the bottom Thickness Bottom wall of a hollow rect Type in a new value and press enter to set a new value 6 1 5 2 Galvo Settling Times GST Parameters A GSTs Galvo Settling Times Galvo Settling Time GST is a laser beam delay measured in microseconds that synchronizes the laser beam with the galvanometers movement during st
7. mE Select Table from the main menu and then select We Utilities Help l EEEE the item Axis Control Panel see eft A new OVE Co Leca Os clon Move to Cross Section Position window will be displayed see Figure 6 37 In the Mavetadcrace AEE wigan acon section labeled X press the Home button to Move to LIBS Position begin the homing process for the X axis In the section labeled Y press the Home button to begin the homing process for the Y axis CLECE OEA FALIT Laser Operation Manual 73 WWW CONTR M Copyright 2015 Control Laser Corporation Al IT Sales 407 926 3500 866 612 8619 FAILURE ANALYSIS LASER INS TION T Table Control Panel A KI Y ris Home Halt Reset Home Halt Reset Servo Servo On Servo Off Servo Servo On Servo Off Figure 6 31 Table Control Panel 4 Ideal Chip Placement Mount the fixture and place a 1 0 X 1 0 inches approx chip in the Cross pocket of the fixture 5 Designate a Cross Section Vision Position Designate a position as the Cross Section Vision Position the default position that the tables move to when beginning a new cross sectioning process This is the position at which the chip will be completely seen on the vision system and where the cross section Line Object over the chip will be drawn Utilities Help Once you have successfully homed both the X Move to Decap Position and Y tables move the tables to the current Move to Cro
8. y TA y T y n A y v A Iveic JT acer Ih ee ee l A tE FANALY SIS LASER NSDECI ION if OOL i C Copyright Control Systemation Inc 2005 2006 All rights reserved Control Systemation THE POWER IN MICRO MACHINING amp AUTOMATION The actual initialization process will take approximately 5 8 minutes After the software begins the initialization process the laser controller should begin setting the temperature of the chiller and the parameters for the laser to begin with When finished the laser should give a message Stating the initialization procedure is completed and the x y tables if applicable have finished homing This will allow the operator to know that the start up procedure was successful and applications can now be decapsulated CLECE OEA FALIT Laser Operation Manual 93 WWW CONTROLLASER COM Copyright 2015 Control Laser Corporation 407 926 3500 866 6 2 8619 SHUT DOWN The shut down procedure can be done two ways The first way is to actually go to the laser contro panel under the LASER menu and select the shutdown button _ULTRALIT mn ga ESA ET aad Be H BD e X i P l II i New Open Save Insert Teach Mode Delete Hide Run Run Step Pause Stop EMO Lase Show Pic Laser Control Panel Initialize Laser Shutdown Laser o miin tit Green Shutdown Shutter Add sequence Delete sequence Shutter Op
9. 44 WWW CONTR M Copyright 2015 Control Laser Corporation i IT Sales 407 926 3500 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL What Is Bevel Bevel Complete False Bevel Complete True Indent Border Normal Decap Beveled Decap A bevel is simply a stepped decap process that leaves a beveled effect as shown above A bevel is merely a cavity that is resulted wnen mold compound is lased away step by step as shown above A normal decap process would result in a rectangle decap object taking off mold compound in equal size every time you press the run button A beveled decap process would complete a beveled pattern as shown above and would take off increasingly lesser area of mold compound as it progresses This is governed by four new parameters CLECE OEA FALIT Laser Operation Manual 45 WWW CONTR M Copyright 2015 Control Laser Corporation FALIT rokfree Senace 66 8128619 FAILURE ANALYSIS LASER INSPECTION TOOL Bevel Types There are two possible bevel types The system can be configured to do either of the two This is a one time setup option usually done by the customer s request This type of bevel is the default type The drawn Inside Rectangle rectangular object represents the outer border of the bevel The border and indent determine the number of bevel steps The direction of the bevel is always from the biggest l rectangle inwards toward the Inside rectangle
10. FAILURE ANALYSIS LASER INSPECTION TOOL 6 4 Status 407 926 3500 866 612 8619 As shown in the figure at left the System Status section a General ji Decapsulation Laser IR onl iit Cross sectioning Laser Green L I B S Spectromety X Tables CLECE OEA WWW CONTROLLASER COM displays the status of General warnings faults messages Decapsulation Laser System Cross Sectioning Laser Licks Siorecuronmen sy XY Table Each status is indicated via an indicator of either Online or Offline depending on the current status see circled areas The General area displays important information regarding communication with the laser systems and other processes that are taking place that are not seen by the operator FALIT Laser Operation Manual 63 Copyright 2015 Control Laser Corporation ZASE rohFiee Senice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 6 5 Vision System Fine Focus If you notice that the live image is blur and out of focus then you can rectify this by using the Fine Focus option Make sure the lighting on the vision system is turned on Use the Zoom In button to set the zoom level to 10 Click on Camera from the main menu then Fine Focus The Fine Focus Dialog box will appear see Figure 6 24 BL Fine Focus SCROLL BAR Figure 6 24 Fine Focus Dialog Box Use the Scroll Bar
11. If Bevel Enable is True and Bevel Complete is False pressing the Run button once will result in the above depicted bevel being lased Each red square depicts a bevel s tep which is in fact done a little distance away from the focus point than the previous bevel step Drawn Rectangle Tool The result is a bevel shaped cavity The drawn rectangular object represents the inner border of the bevel The border and indent determine the number of bevel steps The bevel actually begins by an expanded rectangle around the drawn one and bevels it s way inwards Bevel begins from outside The drawn rectangle thus is the smallest bevel rectangle This makes sure that the lasing of the bevel does not within the drawn area i The direction of the bevel is always from the biggest rectangle inwards towards the drawn rectangle If Bevel Enable is True and Bevel Complete is False pressing the Run button once will result in the above depicted bevel being lased Each red square depicts a bevel step which is in fact done a little distance away from the focus point than the previous bevel step Drawn Rectangle Tool The result is a bevel shaped cavity CLECE OEA FALIT Laser Operation Manual 46 ASONI M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 6 1 5 3 Text Parameters Text Tool Only aj Height 0 3927 E GSTO 1000 GST 10 GST2 200 Gols
12. M Copyright 2015 Control Laser Corporation LIT gales 407 926 3500 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL Once you are satisfied with the position of the chip save the table position as the new Decap Position Sie Camera Laser Table Uk Start Decap Calibration Stark Cross section Calibration oe l l l oe By clicking on Calibration in the main menu and Start LIBS Calibration Stop Calibration selecting Save Decap Position see left Save Decap Position Save Cross Section Position Save Crass Section vision Position Save LIBS Position Utilities Hep You will be asked if you are sure you want to save this Move to Decap Position position as the new decap position Click on Yes to Mowe to Cross Section Position confirm Whenever you want to begin a decap process Move to Cross Section vision Position N the tables will then move to this new location whenever Move to LIBS Position you select Move to Decap Postion from the Table menu see left 4 Ready to begin Decap Calibration xis Control Panel You are now ready to begin the actual decap calibration process Remove the chip and place a black anodized Aluminum plate over the fixture Make sure that this plate is relatively secured so that it will not fall off when the tables are moved Using a double sided scotch tape to do this will suffice Click on the button labeled Calibrate Decap located at the lower right hand part of
13. The contents of shipment may have been opened for Customs Inspection to verify contents against shipping documents declaration CLECE orev FALIT Laser Operation Manual 20 ANW CONTRO SRN COM Copyright 2015 Control Laser Corporation F LIT fal Fiee Sevice 866 612 6619 FAILURE ANALYSIS LASER INSPECTION TOOL Notify your Control Laser Representative and Control Laser Inc in Orlando Florida regarding material received in damaged or mishandled condition If the crate is received in good condition proceed to unpack CLECE OEA FALIT Laser Operation Manual 21 WWW CONTROLLASI M Copyright 2015 Control Laser Corporation 407 926 3500 866 6 2 8619 2 3 Unpacking 2 3 1 Machine The machine is contained within a wooden crate The machine is removed by first removing the SIDE COVER of the crate After the SIDE COVER has been removed extract the machine and associated cable 2 3 2 Packing List Compare and check off the quantity and item description of the material unpacked to the packing list Any discrepancy of quantity or material description should be reported to your Control Laser Representative and Control Laser Inc in Orlando Florida 2 3 3 Inspection Visually examine unpackaged received material for any shipping defects 2 4 Setup Connect the air water filter and vacuum to the machine as shown in Figure 2 1 This is the back of the machine Also indicated is the electrical cord p
14. 10 E LaserCurrernt 27 00 MHumSarmples 5 ee ae ee TE An e Caption Laser Pulsing Grid Figure 6 21 LIBS Parameters C LIBS Parameters As shown in Figure 6 21 above the LIBS parameters determine the characteristics of the grid that denotes the patterns of samples D Default Parameters When a LIBS grid is drawn for the first time it gets default lasing parameters assigned to it To change these values click and highlignt the parameter value to change and then type in the new value Press the Save as Defaults located just below the lasing parameters section Save as Defaults This sets the default parameters as the ones you have just entered in the lasing parameter list Each time you draw a new grid object it will have these new parameters assigned by default E Lasing Run Once the lasing parameters are set begin the LIBS process by pressing the Run button below i CO Press Run to begin the LIBS Process Aun CLECE OEA FALIT Laser Operation Manual 59 WWW CONTR M Copyright 2015 Control Laser Corporation ZASE Tollfree Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL F Graph Spectrometry Select Grid Point V Show Reference Graph Monitor Wavelength nm T Start End Zoom In Row 1 Column 1 CAFALITCODE BIN DEBUG HELP BurrBrown LSD at 5838 End 5941 Cursors Rating Tolerence Refresh Graph ae ae ee Open Reference Graph Upper 20 0 Lower 20 0 efres
15. 1000 GST4 1000 GST5 1000 GSTh 100 GST 10 Text Font StandardFont TextHeight 0 3927 F Text Lasing Text Text The text string you wish to lase Select the font that you wish to use from the available font Font styles Set the height of the text Entering a new value will resize Text Height gt 2 the drawn text tool box NOTE The drawn text rectangle is the boundary of the actual lasing If the text string is smaller than the width of the box it will lase normally If the text string is longer than the box then it will be squashed to fit inside the box The height of the drawn text tool is the actual height of the lased text as well Thus the lased text will always be within the drawn text tool CLECE OEA FALIT Laser Operation Manual 47 WWW CONTR M Copyright 2015 Control Laser Corporation LIT gales 407 926 3500 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 6 1 8 Image Templates An Image Template feature has been introduced to the FALIT system that addresses a major concern when using SAM images as a map of the chip being processed SAM images aren t 100 accurate in dimensions and do not always clearly show all the characteristics of the chip Thus a better way of creating a template of a chip has been added to the FALIT s arsenal of tools An Image Template is a true representation of a totally or partially decaped chip The user can depict an area of interest which i
16. Box B to give you a reference position and size CLECE OEA FALIT Laser Operation Manual 71 WWW CONTR M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 3 Verify that the lasing was done at the position and size as the one you drew on the screen You should be able to see the lased shape overlap the drawn shape on the screen 4 Press the Zoom In Out buttons and watch the Drawn Box move and resize according to the Zoom Level At each level you should see the main cross hair repositioning or overlapping the lased cross hair while the size of the box should grow or shrink according to the zoom level 5 When you are at the maximum zoom level delete the shape that you have drawn and redraw the shape to overlap the C Box as shown below 6 Lase the shape above by pressing the Run button 7 Verify that the lasing was done at the position and size as the one you drew on the screen You should be able to see the lased shape overlap the drawn shape on the screen If both the lased boxes were lased at the right place then the Decap Calibration process was completed successfully CLECE OEA FALIT Laser Operation Manual 72 WWW CONTR M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 6 6 3 Cross Sectioning Calibration The cross section calibration should be
17. Calibration Stop Calibration Move ko Decap Position Move bo Cross Section Position Save Decap Position Move to Cross Section Vision Position Save Cross Section Position Move to LIBS Position Save Cross Section vision Position Save LIBS Position Axis Control Panel Figure 6 33 Save Cross Section Vision Figure 6 34 Move to Cross Section Vision Position Position 6 Starting the Cross section calibration You are ready to begin the cross section calibration process Move the chip using the Jog buttons until the chip is centered under the cross section laser s nozzle Use the Jog buttons and move the tables Try to get the chip as close to the center of the nozzle as possible Press the Lase Cross button to lase a cross using the cross section laser The tables will move during this lasing process Once the tables have come to a stop you should see a cross mark on the chip If you do not see this repeat the process by either pressing the Lase Cross button or by increasing the current in small steps The chip should have a cross mark as shown at left Move the tables using the Jog buttons until the chip is visible on the vision screen Move the chip using the Jog buttons until the cross on the chip is centered on the Main Crosshair on the screen as shown at left Complete the calibration process by following the on screen help Once the calibration process is complete exit the FALIT system and run it again for the n
18. DRAIN WATER FROM WATERTANK AND HOSES USING A WET DRY VACUUM 4 FILL CHILLER WITH DISTILLED WATER ONLY TIGHTEN FILLER TUBE CAP 5 TURN ON CHILLER AND RUN FOR 5 MINUTES 6 TURN CHILLER OFF AND COMPLETELY DRAIN WATER FROM WATER TANK AND HOSES USING THE WET DRY VACUUM 7 FILL CHILLER WITH 140z OF Optishield Il AND DISTILLED WATER TIGHTEN FILLER TUBE CAP 8 TURN ON CHILLER AND RUN FOR 5 MINUTES 9 Reset the chiller to RS 232 mode CLECE OEA FALIT Laser Operation Manual 81 WW NT M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 9 0 System Backup and Recovery Procedure In the back of every system CLC manufactures we p include a full recovery drive of all factory system files Located on the back of the system PC weve installed a i flash drive that contains Acronis Backup Recovery am software and TIB Backup file for recovering your laser system to the factory defaults when necessary 9 1 System Backup Procedure 1 Enter the System BIOS Startup Options by pressing the appropriate button shown on screen during startup Typically F2 F10 or DELETE 2 Once in the BIOS menu locate the BOOT dropdown list at the top right of the screen 3 Under the BOOT list make the USB hard drive the First Boot Priority 4 Save and Exit the BIOS menu 5 The system will automatically restart into the Acronis Backup Software located o
19. GB 11 37 GB NTFS IJ L MBR and Track 0 MBR and Track 0 12 At the select destination screen click Next to continue 13 Now click the Proceed button to start the System Recovery process 14 Once the Recover has completed you will see the dialog box below click OK ae Se ee iet SEE PeR e aai Intorno n a d E PNPA m a a vV Recover operation succeeded x y Se i OK A 15 Close the Acronis Recovery software by clicking on the Red X in the upper right hand corner of the screen 16 Following the previous steps 1 4 change the system BIOS boot priority back to the WDC Hard drive then Save and Exit to bootup into Windows and Laser Software CLECE OEA FALIT Laser Operation Manual 87 WWW CONTR M Copyright 2015 Control Laser Corporation 407 926 3500 866 6 2 8619 10 0 Options and Upgradibility 10 1 Base Module Decap Only STANDARD OPTIONS INCLUDE 30 Watt Air Cooled Laser Operator Work Station Light Scan optics Welded Steel Frame Fume Removal Port Stackable Light Fume Removal System Power Distribution Gas Assist Nozzle Vision System for Chip Alignment Class 1 Workstation Failure Analysis Pro Software Operator Door with View Port Computer Monitor Mouse amp Keyboard 10 2 Material Characterization Module meca Only Requires Base Module This Module allows the operator to perform a complete Aloha Spectrometry on the Mold Compound during the Decap Process Alpha
20. INSPECTION TOOL The Table Control Panel displays Click on the Home button in the corresponding X or Y section to home either table see Figure 6 74 Table Control Panel A is Y Axis fe SI Servo Servo On Servo Off Servo Servo On Servo Off Figure 6 14 Table Control Panel B Move to Cross Sectioning Position Before beginning the cross sectioning process you must move the XY tables to the Cross Sectioning Position and verify that once the tables move to this position the nozzle of the Cross laser is roughly at the center of the chip If not you must go through the Cross Section Calibration process before you proceed any further Please refer to relevant documentation Once you nave successfully homed both the X and Utilities Help Y tables move the tables to your current cross sectioning position To do this select Table from Mace torassa Section Poston Move to Decap Position the main menu and select Move to Cross Move to Cross Section Vision Position Sectioning Position option see Figure 6 75 The Move to LIBS Position tables will move to the current cross sectioning Axis Contral Panel position Figure 6 15 Table Option Move to Cross Section Position You should now be able to see both the tables and the chip placed on the tables on your vision system screen If not click on the Jog buttons in the XY Table Control section on the cece main screen see Figure 6 16 to move the fin
21. Snutter SPECO escursioni 66 A A Aa T a A E A E E pSeatemar dats 66 6 6 2 Decap and GEL CalibratiON sdscccdcindndesnindicedanateceswadssanievedessenindecsiansdasstnasssendoeatesaseinieuadveatuseseiaions 67 6 6 3 Cross Sectioning Calibration siwscsssscccsesasvsd veaninessiatswabiiacvecsrnaresdernandsatecedeeativeedwatabesnadeosaisenteoetewens 73 6 6 4 LIBS Spectrometry Calibration esssseseseesessrrrrssssrrresssrrrrsssrrrrressrrrressrrtrrssrreressereressseereeseeereesss 76 AO TOU OO aE E EEEE EE 78 RETOU S OOUR E aor a E T E T E 78 Te Mil L POWE OWN a E 78 PAL INO ETTO a E E oes deca nieisasies nm apace saeco sue paca iene ea anasaconoas 79 I Sa ec tec cae ee ce eee cscs A cove seca T E E eee eee 79 8 1 Coolant level check Optional liquid cooled systems ccccccccessseececeeesecceceeeesecceseeeeseceeeeeeneeeeeeas 80 8 2 DPSS COGAN Filter CIN Cs parucatcttiecdsaresnaidatiensdueutecatnnutbeadvsatndeoniadnutdesatessunbitecaiaiatedeaniadienirctunueiitees 80 S2 ED ANB OO NE ye tecacen cesstaantde E E sania anus E E b ner vnueiestncsa nner onteenutesetaoeruete 80 8 2 3 Fill the chiller with distilled water ccccccccccccssssssseeccccccsaeesseeeccccesseeeeeececesessaeaaseeeeeesessagenssss 80 2h PSE SUSU INN sacra nce EE tenis atueate cadet cud neseaseurots 81 9 0 System Backup and Recovery Procedure vetcccisccsccetctscasteseseceriadiescpeorsesesadtassduevnaaseaneeentvensadereetecacts 82 Ol Syste BICU Proce dU G eoria EEE a 82 J
22. and press any one of the function keys F1 to F5 to move to positions 1 to 5 respectively CLECE OEA FALIT Laser Operation Manual 27 WW CONTROLLAS M Copyright 2015 Control Laser Corporation ZASE rohFiee Senice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL Saving configuring custom Z Axis Positions Z Axis You can save values for the 5 custom Z axis positions via the Table Control Panel s Z Axis tab Figure 6 2 Home Servo On Servo Off tl To get the current Z Axis position press the Get Position button The absolute value of the Z axis will be displayed in the text box to the right of i il this button Type in the value you wish to set as the Z axis Get Position ncha position for any 1 of the 5 positions in the boxes under the Custom Focus Positions section and press the Set button to the right of the box to set that value as the Z Axis position Custum Fucus Pusiliurrs Setting these values will over write previous or Simchas Sa values for the respective positions 2 oo Inches Set A Homing 3 90 Inches Set z Before you can begin the decap process make sure that the XY Tables have been properly 4 UU Inches Set homed The table will auto home whenever you 3 Inch run the FALIT application 0 0 nches Set To manually home the tables click on Table in the AE main menu and select the Axis Control Panel see ROUER Utilities Help The Table Control Pa
23. calibration processes MUST be completed prior to doing any decap process Please refer to Sections 6 6 1 Exposure calibration for the vision system and 6 6 2 Decap Calibration for procedure and additional information 6 1 3 SAM Images A SAM image is an image of a chip taken by an acoustic p WES Bhs ae Ky microscope The SAM image at left shows various x characteristics of the chip s interior in an X Ray manner and can be used as a blueprint during a decap process The image can be overlaid over the live image of the chip on the vision system in order to map out sections of the chip that you would like to decap The decap tools can then be used to decap only those areas NOTE A decap process can be done without a SAM image However a SAM image is a handy tool to use since it gives you a better idea of where to decap CLECE OEA FALIT Laser Operation Manual 30 WWW CONTR M Copyright 2015 Control Laser Corporation N E Polce Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 6 1 4 Decap Process A Chip Location Place a chip to decap on the fixture Make sure that you can see the chip on the vision system of the FALIT application The complete chip must be visible inside the Lasing Area box which is indicated in cross section on the vision system This box represents the boundary in which you can lase Any decap tool object placed outside this box will not lase B Sam Images You can opt
24. of this lasing object This is a read Sequence only value and is used during bitmap saves and auto LIBS process graph saves Oer C UTN Lasing current of the laser The value is in Amps Laser Q Switch Q Switch frequency modulation The duty cycle for the q switch Set this to the same as Duty Cycle Q Switch amp d Speed at which the galvos move during a lasing This pee relates to how fast the object is lased Passes Determines the number of times to lase an oDject CLECE OEA FALIT Laser Operation Manual 38 WWW CONTR M Copyright 2015 Control Laser Corporation ZASE role Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 6 1 5 1 Advanced Parameters EBA P FillSpacing 0 003000 FillStvle Cross Rotation 0 0 o cale 100 000 Scale 100 000 E fAmis Height 0 0000 El Location A 1 3504 7 Location r 0 6308 Width 0 5856 Height 0 4919 El Got 1000 yt FillSpacing Density of Filing units Determines the distance between lines of a fill pattern The Fill Spacing Smaller the distance the tighter the fill pattern Fill Style Select between four types of fill styles Fills the object with an interlacing series of 1 Cross lines that cross each other at the given fill Spacing Fills the object using a series of lines laid out 2 Race Track l in a converging race track pattern 3 Vertical Fill the object with only vertical lines CLECE OEA FALIT La
25. option use the Edit option from the main menu and select Copy and Paste to accomplish the same goal Pasting via the main menu will insert the new object at 0 0 origin of the vision system screen F Decap Sequences Each time you draw a new decap tool object you actually create a sequence of objects These sequences are listed in the Sequence List as shown in Figure 6 9 Lasing Sequences Sequence Las Show Pic Read 01 Sey 01 Yeux Yes Nu Nu TextRect02 SeqQ1 No Yes No No Add sequence Delete sequence Figure 6 9 Lasing Sequences CLECE OEA FALIT Laser Operation Manual 33 WWW CONTR M Copyright 2015 Control Laser Corporation LIT gales 407 926 3500 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL A new entry is added each time a decap tool object is added Clicking on any entry will result in the corresponding object being highlignted on the vision system and vise versa Lasing parameters for each sequence also display each time an entry is clicked on A single decap tool object can have many sequences attached to it When the object is first drawn one sequence is added automatically Sub sequences can then be added to any decap tool A sub sequence is an additional sequence corresponding to the same decap tool The differences between related sub sequences are the lasing parameters in the sub sequence such as using a single tool and to lase many times using different lasing characteristics T
26. process results in drawn shapes not lasing in correct positions and the size of the lased shapes not being the same in which they were drawn in C How do I do the Decap Calibration To begin the calibration process click on the button labeled Calibrate Decap located at the lower right hand part of the FALIT application Step by step instructions on how to proceed with the calibration process appear on the screen Follow these steps and complete the process The following is an explanation of the various prerequisites that need to be in place before beginning the calibration process Utilities Help 1 Home the X and Y Tables Move to Cross Section Position Note that during the start of the FALIT application Move to Cross Section vision Position the tables will home automatically Move to LIBS Position Click on Table from the main menu and then select L Axis Control Panel see Figure 6 27 CLECE OEA FALIT Laser Operation Manual 67 WWW CONI M Copyright 2015 Control Laser Corporation ZASE rohFiee Senice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL As shown in Figure 6 28 in the section labeled X Axis press the Home button to begin the homing process for the X axis In the section labeled Y Axis press the Home button to begin the homing process for the Y axis Watch the X and Y tables home and wait until they come to a stop Table Control Panel A FLHIS Y Axis Halt R
27. system is used in the cross section process The cross section laser emits a laser beam that can cut through both the mold compound and any other material within it 6 2 1 X Y Tables The F A LIT system is equipped with an XY Table which lets you position your chips when running processes The system also comes with a custom fixture which holds the chips Use the tables to position the chip at various positions which are crucial to the process you are running at the time For example when positioning the chip in such a way that it is visible under the camera system you must move the tables by clicking on the Jog buttons located in the XY Table Control see Figure 6 73 to get the chip under the camera system xY Table Control Speed Distance t insect inch 1 00 Figure 6 13 Jog Buttons in XY Table Control A Homing Before you can begin the cross sectioning process make sure that the XY Tables have been properly homed The table will auto home whenever you run the F A LIT application We Utilities Help Move to Decap Position To manually home the tables click on Table in the main menu and select the Axis Control Panel see figure at Move Co Cross Section Position Move Co Cross Section vision Position Move to LIBS Position lef Axis Control Panel CLECE OEA FALIT Laser Operation Manual 52 Copyright 2015 Control Laser Corporation F LIT rohFiee Senice 866 612 8619 FAILURE ANALYSIS LASER
28. the LIBS grid is done z EE Or KAS ASE S GONE N order to acquire data via the LIBS Sensor Figure 6 35 Performing LIBS Analysis This calibration process ensures that the Fire Spot at which the laser is fired falls within the Focus Area of the LIBS sensor and that the this Fire Spot is calibrated to the 0 0 of the vision system 1 Move to the Decap Position This position doubles as the LIBS position 2 Secure a plate of black anodized material on the fixture 3 Draw a Hollow Circle around the 0 0 position on the Vision System Screen see below Lase the circle by clicking RUN The chip should have a Hollow Circle as shown at left 4 Jog the tables using the Jog buttons and move the plate until the lased hollow circle is roughly under the LIBS sensor s focus area This position will be fine tuned in step 6 NOTE The LIBS sensor s focus area should fall within the lasing field of the IR laser CLECE OEA FALIT Laser Operation Manual 77 WWW CONTRt M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 5 Enter a value for PA X and Y and turn the beam on and off using the appropriate buttons and fire the laser The idea is to get the Fire Spot so that it falls within the LIBS sensor s focus area Keep moving the Fire Spot by entering value for PA X and Y until you get the fire spot roughly within the LIBS Focus Area 6 Turn the beam on and jog th
29. the calibration process 4 2 Setting the Lase Area Move the Lase Area box so that it overlaps the largest of the 4 boxes that you just lased This is to define a lase area in which you need to place your chips during normal decap operation This lase area is a reference to the operator to indicate that if he places any shaped outside this area they will not be lased 4 3 Setting the Origin The idea is to get the highlighted Big Cross Hair positioned so that it overlaps the Cross Hair of the Lased Calibration Boxes This is the vertical and horizontal lines that dissect the three Lased Calibration Boxes A B and C Move the Big Cross Hair so that it overlaps the Lased Cross hair Press the Next button when you are ready to proceed to the next step 4 4 Setting the Pixels Per Inch Move the highlighted purple box so that it is positioned and stretched to completely overlap the Lased Box A The idea is to make sure that this box is the same size as that of the Lased Box A Press the Next button when you are ready to proceed to the next step 4 5 Moving the Zoom Offset Cross hair Move the little purple cross hair so that it is within the Lased Box A Press the Next button when you are ready to proceed to the next step CLECE OEA FALIT Laser Operation Manual 70 WWW CONTR M Copyright 2015 Control Laser Corporation N E Polce Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 4 6 Setting the Zoom
30. to adjust the focus until the image on the vision system is perfectly focused Press the Close button to exit Set the Zoom to position 1 using the Zoom out button Non FireWire Camera Only aA FT az f e he Ae ll Ay DIGITA irm e Mra Figure 6 25 Set Screw Locations Find the Set screw B in Figure 6 25 directly under the Coarse Focus adjustment screw A in Figure 6 25 and loosen it about 2 turns Loosen the Coarse Focus Screw A and move it along the axis of the lens until the image is properly focused Tighten the Screw A and set screw B CLECE OEA FALIT Laser Operation Manual 64 IWW CONTRO MI Copyright 2015 Control Laser Corporation F LIT fal Fiee Sevice 866 612 6619 FAILURE ANALYSIS LASER INSPECTION TOOL 6 6 Calibration 6 6 1 Exposure calibration for the vision system Each zoom level has its own exposure settings for the vision system You can configure the exposure calibration settings for each zoom level by selecting Camera from the main menu and clicking on Exposure Calibration Laser Table Templ Refresh Image Exposure Calibration Fine Focus Camera Setup Screen The Exposure Calibration Dialog box appears as shown in Fig 6 26 Exposure Calibration oomLevel Brightness T lt gt 50 I Auto Shutter Speed lt gt 4095 Auto Set B G and 55 Save All and Exit E wit Figure 6 26 Exposure Calibration Dialog Box CLECE OEA F
31. 1 CFR 1040 10 f 6 and EN 60825 4 7 The safety shutter for the FALIT System laser is located inside the laser rail assembly and is actuated by the switch on the control panel See Figure 1 4 The enclosure access door interlock switches inhibit safety shutter operation when the door is open The shutter terminates lasing by blocking the laser beam path and preventing emission of laser radiation out of the laser rail assembly and into the main enclosure The shutter should be functionally tested each time the laser is turned on by placing a fire brick or similar beam absorbing material under the output optics and initiating a START WRITE command Contact the Control Laser Field Service Department immediately if the shutter does not operate Do NOT operate the laser if the shutter is inoperable 1 5 5 Location of Controls Controls which are necessary for operation of the laser must be located so that they can be operated without exposure to laser radiation 21 CFR 1040 10 f 7 and EN 60825 4 8 All of the controls used to operate the FALIT Laser System are located outside the workstation enclosure Figure 1 4 explains the location and functions of the controls and indicators on the FALIT Laser System CLECE OEA FALIT Laser Operation Manual 11 WWW CONTR M Copyright 2015 Control Laser Corporation 407 926 3500 866 612 8619 SYSTEM LIGHTS OFF ON START OFF ON gt 1 Emergency Stop Switch
32. 2 System FOC OV IVF 1 CC UN sineren irer rn 85 Rene e sitieigse igiohelecigciele lc eeeeeee em eee enn trent E E mnt rteee teeter mettre nr ttetrey 88 10 1 Base Mod le DCCA Only eeuen 88 CLECE OEA FALIT Laser Operation Manual 4 WWW CONTRI MI Copyright 2015 Control Laser Corporation N E Polce Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 10 2 Material Characterization Module Decap ONy cccccccccssseccccceeeseecceeeeeeeeseeeeeeeeceeseueneeeeeeeeeees 88 10 3 Chip Cross Sectioning Module sssssseessssenssrresssrrrssrrrrssrrressreroserenssreresrreessrereserressreresrtreseeereserresene 88 10 4 Motherboard Dissecting Module ia ccscstcncesaarcdvvestccedcecacsdeucoensadand tnuca N 89 SEs AUTO eIn e ahde U E E E E OE E A I E E E E 89 TO GEL M OOU ea E E E ee ee eer eee 89 SART UP E E E E E E AE E T 90 SAOUT DOWN N orrek r E E A A E E EE A E E 94 CLECE OEA FALIT Laser Operation Manual 5 WWW CONTR M Copyright 2015 Control Laser Corporation ZASE Tollfree Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECT D O a Ni a NoNic Han 5 2014 ufactured Date N pas Ser 04810291 30347 Workstation Ser 0000118401114 120 VAC 9 2A 1 P 50 60Hz CLASS 4 LASER PRODUCT Ta Complies with 21 CFR 1040 10 except for deviations Saeed persuant to Laser Notice No 50 dated June 24 2007 qd C ty 1 1 Recommendation Control Laser recommends that this Safety sectio
33. 4900 FAX 212 398 0023 EN 60825 is issued by the European Committee for Electrotechnical Standardization CENELEC as a safety standard for the manufacture and use of laser products in the European Union The government of each member country of the European Union enforces it individually CLECE OEA FALIT Laser Operation Manual 7 WW NI M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 1 4 Protective Eyewear The FALIT Laser System emits invisible laser radiation at 1 064 The following specifications are provided to assist the Laser Safety Officer in evaluating the hazard potential of the laser These specifications represent the worst case potential for short term peak laser emission Recommended Optical Density for Eyewear for this system is 6 Eye protection goggles or spectacles must be worn while the FALIT laser is in operation Never look directly into the laser beam path or view it though specular reflection such as glossy materials including metals glass items of jewelry Avoid placing such materials near the beam path 1 5 Performance Requirements 21 CFR and EN 60825 specify certain performance requirements features that must be incorporated into or provided with each laser product for radiation safety purposes These features followed by an explanation of their function in the FALIT Laser System are described in
34. 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL A blue rectangle will appear Resize it around the entire chip s area 5 In the Templates menu select Save Image Template Area to save this as a template onto your hard drive A new dialog box will appear prompting you to specify the save location The usual folder is C CSIAFALIT Images Templates 6 1 8 2 Loading an image template 1 Inthe Templates main menu select Load Image Template ens Utilities Help Show Image Template Area Save Image Template Area Load Image Template Edit Loaded Image Template Show Image Template Make Image Template Transparent 2 Browse to the location that you saved your Image Templates and select the template you wish to load 3 Note that you now see the template super imposed over the live image onscreen By default you can move or edit the size of the template 4 If you wish the template to be non editable select Templates from the main menu and select Edit Image Templates and make sure that the check mark to the left of it is not visible 5 You can show hide and make the template transparent using the respective options in the Template main menu CLECE OEA FALIT Laser Operation Manual 49 WWW CONTR M Copyright 2015 Control Laser Corporation N E mire sevice 8666128619 FAILURE ANALYSIS LASER INSPECTION TOOL 6 1 9 Recipes A recipe is a set of Lasing Parameters that you can save in order t
35. ALIT Laser Operation Manual 31 WWW CONTR M Copyright 2015 Control Laser Corporation YN ar roliice Seve 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL Polygon Draws any shape of object on the vision screen Text Draws a rectangle that represents an area where a text string will be lased To draw any of the above objects click on one of them in Figure 6 8 and left click and hold and drag the mouse over an area on the vision system Letting go of the left mouse button completes the drawing process D Editing Decap Tool Objects Edit the size of any decap tool object by left clicking on the not spots denoted by little solid rectangles located on the border of the objects see eft co Reposition the decap tool objects by clicking on it and dragging it with the mouse Selected objects appear in yellow Hot Spot You can draw as many decap tool objects as you want Fine adjusting decap objects You may need to fine adjust a decap object but might not be able to make the minute change by clicking on a hot spot and dragging the mouse In such a Situation you can click on a hot spot and simply use the arrow keys on the keyboard to make minute adjustments Each press of the arrow key in the desired direction would result in the selected decap object being stretched or shrunk The step size or the value by how much each arrow keypress changes the decap shape is user Fine Adjust Units config
36. ALIT Laser Operation Manual 65 WWW CONTROLLASI M Copyright 2015 Control Laser Corporation N E Polce Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 6 6 1 1 Zooming in and out Select the desired zoom level from the combo box Selecting a zoom level will result in the camera system being zoomed to that level 6 6 1 2 Auto Settings for Gain and Shutter Speed You can let the vision system dynamically automatically set it s own brightness gain and shutter speed for each zoom level Simply leave the Auto check box checked beside each option to put them into Auto mode An unchecked Auto option means that what even value you set by either dragging the slider bar or typing in a value will be used at the corresponding zoom level 6 6 1 3 Manual Settings for Gain and Shutter Speed You have the ability to set two different options individually to make the live image at any zoom level to your liking You can drag the slider bars of each option to immediately set it You can alternately type in a new value in the text box to the right of the slider bar and press enter 6 6 1 4 Getting real time feedback Note that when you want to set a manual value a good starting point is to first click and check the Auto checkbox This will immediately put the option into auto mode and you will notice that the slider bars and the corresponding values will change dynamically This means that the vision system is dynamically ad
37. FAILURE ANALYSIS LASER INSPECTION TOOL Starting Y coordinate of the line in the laser s lasing Start Y field Ending X coordinate of the line in the laser s lasin End X field Ending Y coordinate of the line in the laser s lasing End Y field Kerf The kerf determines the thickness of the cross section line The laser beam diameter cannot change and therefore the kerf is used to make a wider cut as shown on the next page The kerf is necessary in order for the entire laser beam to penetrate through the material that is being cut No Kerf Single Line eo With Kerf Rentangular Cutting Motion The kerf value is the thickness of the rectangle 6 2 6 Process Parameters A E C en Lasing current of the laser The value is in Amps Laser Q Switch Q Switch frequency of the RF driver Passes Determines the number of times to lase this object Speed at which the galvos move during lasing This relates to how fast the object is lased Speed CLECE OEA FALIT Laser Operation Manual 57 Mi NT M Copyright 2015 Control Laser Corporation N E Polce Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 6 3 LIBS Optional LIBS Laser Induced Breakdown Spectrometry The LIBS unit enables you to analyze any material and display a graph containing the elements found within that material The IR laser fires pulses to read the elements of a material 6 3 1 Calibration The calibration process
38. Pixels Per Inch and Offset for each Zoom Level This is a repetitive step Pressing the NEXT button will iterate through the various Zoom Levels The idea is to do the following for each zoom step a Move and position the little cross hair so that it overlaps the center position of the lased cross hair of the lased boxes b Move and resize the Purple Box so that it fits one of the following Lased Boxes For zoom levels 1 3 your Lased Box in concern should be Box A For zoom levels 4 5 your Lased Box in concern should be Box B For zoom levels 6 8 your Lased Box in concern should be Box C For zoom levels 9 and higher your Lased Box in concern should be Box D For each zoom level indicated make sure that the Purple Box overlaps the corresponding Lased Box Please refer to the Help Text displayed in the text area during this process for more help NOTE An animated picture of which lasing box A B C or D to fit is shown on screen for each step 5 Calibration Complete Once you have successfully gone through the above steps close the FALIT application and run it again for the new calibration setting to take effect E How to I test if the decap calibration process was successful Test the settings by doing the following 1 Draw a Box on the screen and place it close to the Origin the intersection of the Yellow Cross hair on the screen Ideally you want to size the box so that it overlaps the top left hand quadrant of the lased
39. Position Section Vision Position by clicking on Table from eoa ene the main menu and selecting the Move to Cross Move to Cross Section vision Position Section Vision Position option see Figure 6 18 Move to LIBS Position The tables will move to the current cross section vision position Axis Contral Panel Figure 6 15 Move to cross section vision position Verify that this position brings the tables into the view of the vision system You should now Y Table Control be able to see the table and the chip placed T on your vision system screen If you do not nee ame lt l gt see the full chip on your vision system screen con ET p use the Jog buttons see Figure 6 19 to move the tables until you see the chip Figure 6 19 Jog Buttons in XY Table Control CLECE OEA FALIT Laser Operation Manual 54 WWW CONTROLLASI M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL Once you are satisfied with the position of the chip Calibration Camera Laser Table ULE save this table position as the new Cross Section Start Decap Calibration Vision Position by clicking on Calibration from the Start Cross section Calibration main menu and selecting Save Cross Section Vision Start LIBS Calibration Position see Figure 6 20 You will be asked if you are Stop Calibration sure you want to save this position as the new Cross Save Dec
40. Position see Figure 6 4 The tables will move to the current Move to LIBS Positon decap position Axis Control Panel On the vision system screen you should see both the tables and the chip placed on the tables If you do not see the full chip on the screen click on the Jog buttons in the XY Table Control section on the main screen See Figure 6 6 to move the tables until you see the chip Figure 6 5 Move to Decap Position XY Table Control ZAbs Move JogSpeed JogStep a units sect units 200 D 1 0 wv T uuu Get Z Pos oo m Always begin jobs at Z focus Figure 6 6 X Y Table Control CLECE OEA FALIT Laser Operation Manual 29 Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL Once you are satisfied with the position of the chip save this table position as the new Decap Position by selecting Calibration from the main menu and Calibration Camera Laser Table Ut Start Decap Calibration Start Cross section Calibration then clicking on Save Decap Position see Figure 6 7 Start LIBS Calibretion You will be asked if you are sure you want to save Stop Calibration this position as the new decap position Click on Yes Save Decap Position to confirm Save Cross Section Position Save Cross Section Vision Position Save LIBS Position Figure 6 7 X Y Table Control 6 1 2 Calibration The
41. Replacement of Electrical Assemblies amp Service No Components Replacement of Mechanical Components Service No Replacement of Optical Components Service No Troubleshooting amp Repair Service See Note Testing Following Repair EAE See Hor Optical Alignment Adjustment Service Yes Programming Service No Setup Fixture Alignment Service No Testing following repair programming setup Service Yes NOTE Some troubleshooting and testing functions will not require the laser to be lasing Keep the safety shutter closed and the key switch in the CONTROL ON position to prevent lasing whenever possible CLECE OEA FALIT Laser Operation Manual 16 WW NT M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL CAUTION If an interlock must be defeated during an authorized service function all personnel in the vicinity of the laser must wear laser eyewear that is made for an optical density OD listed in the table on page 4 of this manual 1 7 Electrical Safety Disconnect main power line s before working on any electrical equipment if it is not necessary for the equipment to be operating Disconnect main power line s before changing the laser lamp After disconnecting power wait at least five minutes for the capacitors to discharge through the bleeder resistors before touching any electrical equipment Do not short or ground the power supply output becau
42. Spectrometry uses the known light Signature fingerprint which is unique for every element known to man and charts its characteristics By using a known sample this module can overlay the data of the compound being Decapped to show inconsistencies The module is used to Characterize Mold Compound plot out contaminants plot flow inconsistencies and much more 10 3 Chip Cross Sectioning Module Requires Base Module CLECE orev FALIT Laser Operation Manual 88 Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL This Module will allow the operator to perform destructive cross sectioning 10 4 Motherboard Dissecting Module Requires Base Module and Cross Sectioning Module This Module will allow the operator to perform destructive dissecting of motherboards The Operator places a motherboard onto the Standard 12 x 12 X Y Positioner Table and imports the image of the board The operator can then draw a shape circle Square or rectangle around the component to be removed for further analysis Optional table sizes available Addendum Start Up and Shut Down Procedure 10 5 Automation Module IN Not available with Cross Sectioning or Motherboard Modules This Module allows fully automated Failure Analysis The module allows an operator to perform decap and material characterization on either individual part configurations or on one setting f
43. The Emergency Stop switch is for emergencies only It will shut off all safety items in case of an emergency See Addendum Start Up and Shut Down Procedure at the end of this document 2 Safety Shutter Switch Turn the safety shutter switch to the CLOSE position to close the safety shutter and terminate lasing from the FALIT Laser System laser Turn the switch to the OPEN position to open the safety shutter and enable lasing 3 Key Switch The keys witch has three positions Power Off Turns the laser off The key can be removed only in this position Control On Activates the laser controller system Laser On Activates the laser and computer CLECE OEA FALIT Laser Operation Manual 12 IWW CONTROLLASER COM Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL CAUTION When the key switch is in the LASER ON position high voltage is present and the system is capable of lasing 4 Laser on Indicator This light illuminates to indicate that the laser system is capable of emitting laser radiation 5 Computer Keyboard amp Mouse Connection USB Connection for QWERTY style 83 key 101 key emulation keyboard for data entry Connection for standard USB Mouse 6 Internal Illumination Control Switch 7 System Reset Button CLECE OEA FALIT Laser Operation Manual 13 WWW CONTR M Copyright 2015 Control Laser Corporation
44. ap Position Section Vision Position Click on Yes to confirm Save Cross Section Position Save Cross Section vision Position Save LIBS Position Figure 6 20 Save Cross Section Vision 6 2 2 Cross Section Calibration Boction The calibration processes MUST be completed prior to doing any cross section process Please refer to Sections 6 6 7 Exposure calibration for the vision system and 6 6 3 Cross Section Calibration for procedure and additional information 6 2 3 Cross Sectioning Process A Chip Location On the fixture place a chip to cut through Make sure that you can see the chip on the vision system of the F A LIT application B Cross Section Line Tool You should be able to see the chip on the vision system To insert a line press the Insert Line button as show below The line tool that is inserted represents the path that the laser will take when it cuts through the chip Insert Line Move or resize the line as needed and place it over the live image of the chip at the location where you wish to cut through The length of the line equals the length of the cut C Lasing Parameters The Cross section line tool has its own lasing parameters which govern the characteristics of the actual lasing process Please refer to the relevant documentation for details descriptions of these parameters D Default Parameters CLECE OEA FALIT Laser Operation Manual 55 WWW CONTR M Copyright 2015 Control Laser Co
45. arts stops and corners GSTs prevent marking irregularities such as gaps at corners The faster the marking speed the larger the GST values must be The Express software has default GST settings that are automatically applied to all marking programs The default settings are designed to prevent inaccuracies in the majority of marking designs Adjust the GST settings only if you notice inaccuracies in your marking results that could not be corrected by adjusting the power speed and Q switch parameters CLECE OEA FALIT Laser Operation Manual 42 wi NI M Copyright 2015 Control Laser Corporation ZAVER FAILURE ANALYSIS LASER INSPECTION TOOL 407 926 3500 866 612 8619 The GST command s parameters define both the type of beam movement during which the delay must occur and the length of the beam delay There are six 6 types of beam movements to which GSTs can be applied Each type has been assigned a number from O 6 the number 1 is not used All five types of movements have a delay length range of O to 30 000 micro seconds the default delays noted below are adequate for most marking images 1 GST O ZG 5 GS 2 4 GST 5 5 GST 4 Oras GST 6 CLECE OEA WWW CONTROLLASER COM Delays the beam immediately before a DRAW command or move The default delay is 1 000 microseconds Not Available Delays the beam at the end of a DRAW command or move The default delay is 1 000 microseconds De
46. ctions B OateToi 9 8 12 1 16 File Folder i Ji eon 11 29 12 1 File Fotder Removable Drive 0 I Recovery Manager t1 29 12 1 File Folder Computers NearMe usb backup_restore_video 12 5 12 9 5 File Folder i hor A INAS CONNSCEONS write complie_m 12 52 30 File F older E tinker ub 12 3 12 10 File 4 168 s i gt Fite name Di Files oftype Backup Archwes tb lt Cancel 9 Right click on the Image file that now appears in the list Shown as Full Backup Choose Recover from the drop down menu File backups Created Cam Rating Method images timken Cia aacamoManecuo E yw Validate Archive Edit Comments Move Remove J Details 10 Choose Recover Whole Disks and Partitions then click Next Choose recovery method Recover whole disks and partitions Recover chosen files and folders Select files and folders to recover from the original disk backup CLECE OEA FALIT Laser Operation Manual 86 WWW CON TROLCLCASER COM Copyright 2015 Control Laser Corporation F LIT fal Fiee Sevice 866 612 6619 FAILURE ANALYSIS LASER INSPECTION TOOL 11 Click on Disk 1 in the Directory List to select all Drives to be recovered for a full system restore then click Next Select the items to recover Partition Flags Capac Used S Type E Disk 1 A A LA NTFS System Reserved C PriAct 100 MB 24 13MB NTFS V LS NTFS Unlabeled D Pri 232 8
47. d Laser Software FALIT Laser Operation Manual 84 Copyright 2015 Control Laser Corporation CLC controllaser WWW CONTROLLASER COM AL cr Jolfre Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 9 2 System Recovery Procedure 1 Enter the System BIOS Startup Options by pressing the appropriate button shown on screen during startup Typically F2 F10 or DELETE 2 Once in the BIOS menu locate the BOOT dropdown list at the top right of the screen 3 Under the BOOT list make the USB hard drive the First Boot Priority 4 Save and Exit the BIOS menu 5 The system will automatically restart into the Acronis Recovery Software located on the USB drive 6 Once the software has initialized choose the Recover Option in the Main Menu 4 Back Up My Disks Files amp Folders Recover a My Disks Files amp Folders 7 Click on the Browse for Backup button 4 Disk Recovery Recover your computer from a backup 8 Choose the removable drive from the directory list on the left side Then on the right side you ll notice a single TIB file appear Highlight this TIB file and click OK CLECE OEA FALIT Laser Operation Manual 85 Wi NI M Copyright 2015 Control Laser Corporation F LIT role Service 466 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL T My Computer Name Date Type Size gt CO Drive C cic 117123 File Folder l J FTP Conne
48. de an Earth Ground The incoming AC service is in the OFF POSITION Using a conductive wrist strap and conductive floor mat remove the ESD electrical jumper connect the D connector in the umbilical cable from the Power Supply Cooler to the Laser head Secure the two retaining fasteners at the D connector to the Laser head If a conductive wrist strap and conductive floor mat is not available one may place one hand in contact with the metallic portion of the RF BNC connector and proceed as above CLECE OEA FALIT Laser Operation Manual 18 WW NT M Copyright 2015 Control Laser Corporation F LIT Tolre Service 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 1 9 Warning Labels Under regulations established by the Center for Devices and Radiological Health CDRH of the Food and Drug Administration the FALIT laser systems are Class 1 laser products In compliance with regulations the locations of the warning labels affixed to the laser system can be found below Labels affixed to the individual laser can found inside the laser manual that is on the same CD ROM as the one where this manual was found Each label is assigned an alphabetical designator Reproductions of the labels along with corresponding designators are also depicted CAUTION CLASS 4 LASER VISIBLE ANGOR INVISIBLE RADIATION WHEN OPEN AND INTERLOCKS DEFEATED AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION 1 Laser Burst Radiation Labe
49. done in order to correlate the actual lasing position of the tables during a cross section process This process should normally be done if the cross section laser was physically moved A How do I do the Cross Section calibration process To begin the cross section calibration process click on the button labeled Calibrate Cross located at the lower right hand part of the FALIT application You will be given step by step instructions on how to proceed with the calibration process on the screen Follow these steps and complete the process The following is an explanation of the various prerequisites that need to be in place before you begin the calibration process 1 Make sure that the cross section Laser is connected Cross sectioning is done using the cross section laser system Therefore you need to make sure that the cross section laser system has been connected at the back of the FALIT system 2 Startup the cross section Laser System When the cross section laser system is connected run the FALIT Application to startup the laser Upon initialization the application will detect and begin the proper laser initialization process for the cross section laser The application will then notify you when the cross section laser system is successfully initialized 3 Home the X and Y Tables Note that during the start of the FALIT application the tables will home automatically Wait until the X and Y tables come to a stop
50. e Figure 2 Air Vacuum and Electrical Connections CLECE orev FALIT Laser Operation Manual 22 Copyright 2015 Control Laser Corporation 407 926 3500 866 612 8619 3 0 Utilities 3 1 Electrical Requirements See Electrical Drawings 3 2 Alr Requirement S10 59 G CLECE OEA FALIT Laser Operation Manual 23 ANWW CONTROLLASI M Copyright 2015 Control Laser Corporation 407 926 3500 866 612 8619 4 0 Environmental Requirements 4 1 Storage Environment Requirements Temperature 20 to 50 C Humidity lt 80 4 2 Working Environment Requirements Temperature 13 to 43 C Humidity lt 80 Do not turn on the laser emission if there is condensation on the output window of laser head Remove the condensation by clean hot dry air Never place the unit in a location where excessive heat moisture or corrosive materials are present If the system moved into the working location from a cold environment leave the system for a few hours to warm up before installing it CLECE OEA FALIT Laser Operation Manual 24 wi NI M Copyright 2015 Control Laser Corporation 407 926 3500 866 612 8619 5 0 Installation 5 1 Installing Machine Refer to Section 2 4 Setup 5 2 Electrical Connections Standard electrical connection See Electrical Drawings 5 3 Cooling System Air Cooled CLECE OEA FALIT Laser Operation Manual 25 ANWW CONTROLLASI M C
51. e for Class 1 products to contain Class 4 lasers It is the responsibility of the manufacturer to determine whether specific functions are operation maintenance or service In general the following definitions apply Operation consists of functions by which the product accomplishes its intended purpose These may include loading work pieces or documents and setting and manipulating external controls Maintenance consists of functions performed by the user to assure performance These may include cleaning and replacement of expendables Service usually means repair These may be performed by specially trained service personnel or by sophisticated users following instructions specifically indicated as service instructions Certain maintenance procedures will be considered service if they are infrequent complex or highly specialized CLECE OEA FALIT Laser Operation Manual 15 WWW CONTR M Copyright 2015 Control Laser Corporation N E Polce Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL Table 1 1 lists the functions of operation maintenance and service associated with the Class 1 FALIT Laser System laser described in this manual TABLE 1 1 CLASSIFICATION OF LASER FUNCTIONS PONCHON CLASSIFICATION REQUIRES LASING Lasing of Parts Operation Yes Loading Unloading Parts Operation No Operation of Laser Controls Operation Yes Cleaning Optics Maintenance No Cleaning Cabinet etc Maintenance No
52. e tables until the fire spot falls within the Hollow Circle You must only use the jog buttons for this purpose DO NOT enter new value to the PA X and Y The idea is to move the hollow circle using the jog buttons until the hot spot is in its center When completed turn the beam off 7 Press Save and Exit to complete the LIBS calibration process 7 0 Troubleshooting 7 1 Trouble Shooting 7 1 1 Laser power low 1 Coolant level check if applicable A Look at the screen on the chiller and see if there are any alarms or errors B Remove the fill cap on the chiller and check to see if water is present 2 Cooling status check The actual temp reading on LCD not the setting or the LED reading on the chiller open the left side panel looking from front of the Power Supply the chiller temp readout is located at lower right It should be within 0 5 C of the setting 3 RH check Humidity sensor The window has 3 portions the RH level is between the pink color reading and the next higher blue color reading The desiccant should be changed after the sensor shows 60 RH unless is specified differently in the user manual or test data sheet Change the desiccant according to instructions in the maintenance schedule 4 Working Temperature Optimize the working temperature according to the instructions in the maintenance schedule CLECE OEA FALIT Laser Operation Manual 78 WW NT M Copyright 2015 Control Laser Corpora
53. eeseueneeeeesegenes 18 Doe Wy AN IMI CNG sp r EE a onenaeieoeaduaesentenee 19 ZO We Ol Ie AIO eI IGN GING SCENIC nse stars cesnecsenest E AE 20 FM STON UO FIM AU OO ee E A 20 DP RECENO venicen a E eaniaas robe ones E ein riaereienneeate nies 20 PA al URPI NE ea nn 22 Die VAC INS aree vate cue arena cos cen aceon vuce cineca her E A E E E EN 22 ZO PI RE IGE oen EEE E EES 22 PASA EE 01 a1 a PEE EA E E I EET E E A E A E E E OE A EE 22 2A e U E E E E E 22 SO UTE senaia EEE E 23 3L Electrical RE CIPO meN S caresser T TANN 23 SZ AN RETEN N a E EE 23 AO Enmironmental REGUIPETINONNS oerien knie EEKE ERATE ETE REE EEEN REEE EEE REE 24 A OOS ENO nmen R egur emne e E a R eee A N 24 CLECE OEA FALIT Laser Operation Manual 2 WWW CONTRI MI Copyright 2015 Control Laser Corporation N E Polce Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 4 2 Working Environment REGUINCMIONI S vicusisicndesinsccslestsicedusiuis asenisaadeta sis edesisusadleaisascbesiseendesipiccleniiesdunads 24 EA AMD Sete CO 8s cc wees cere ae E cee yoo eec seme E E E E ce 2 eel IVS aE MIENE a cause orton aciae suet decets sete cam ect sarees are ace acietn baat slontelec saute neice sents dece nite aeasecsenaadss 25 5 2 Electrical CONMOCTIONS sree EA ER 25 De DOME Sy Oee on saneesaeheseeuetabaeuedeasatsensase tesotesaarceconarecd sntieotnsatteat 25 sO SOM OOS FEO snaps nesnseoavn paces ovanousasesanepneesh ess nnonsaptestsepnerptarstueshensaunsaoeeamesbeu
54. en Shutter Close Gas On Gas Off g te eee 22 00 Beam Off Set Curent aser Switch 4 00 y 9 utyOyel 4 BeamPosition X Y 0 000 0 000 Speed 19 000000 Q Switch Passes 3 5 5 Set Q Switch r p FillSpacing 0 000500 XV FillStvle Cross Vailuax Analysis Lasen Inspection Tool Rotation 0 0 of 0 CSI core Systemation XScale 100 000 YScale 100 000 ZA xisHeight 0 0000 LaserCurrent aser Current Ar XY Table Control Vision Control ZA Eeke sees AE Brightness Zoom Save as Defaults Load from Recipe 0 05 i y 4 feel Ab nnn xT a y 4 S B q a 0 0000 Get Pos bp cata ecap ate bp cata ecap After the shutdown button is selected the operator will receive a message stating the shutdown process is beginning price mo 7 E9 LaiaCmare oon CLECE orev FALIT Laser Operation Manual 94 INNA GOING O ER COM Copyright 2015 Control Laser Corporation my Sales 407 926 3500 Toll Free Service 866 612 8619 FAILURE ANALYSIS LASER INS The second way is to exit the software using the X button located in the right hand corner This will send a message asking the operator wants to shut down the laser NY Tlie Comerol ee 2 m ir Pl k qa Gat es If the operator wants the laser to be shut down check the shutdown and turn off laser box and choose yes as the exiting answer This wi
55. er Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL Press Save and Exit to save and return to the main application screen 6 1 9 1 Managing Edition Saved Recipes You can add new recipes delete existing recipes or modify their values by the Recipe Manager Simply select the recipe that you wish to modify from the Recipe drop down list and perform the changes If you want the changes to be saved permanently press the Save and Exit button 6 1 9 1 Loading Saved Recipes If you would like to load a recipe and populate the property grid with the values from a recipe simply click on the Load from Recipe button Save as Detaults i Load from A ECIpE El LaserCurrent 13 00 LaserlSwitch 6 00 DutyCycle 1 Speed 18 000000 Passes 1 El FillSpacing 0 003000 FillStvle Cross Rotation 0 0 sequence None moo cale 100 000 A new list will be displayed towards the right of the property grid Click on the name of the recipe you wish to load and the value will be loaded into the property grid If you do not want to load any recipes select NONE CLECE OEA FALIT Laser Operation Manual 51 IWW GCONTROLLASI M Copyright 2015 Control Laser Corporation TASI fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INS TION 6 2 Cross Sectioning Optional Cross sectioning is the process of cutting a chip in half The chip can be dissected along any given axis The cross section laser
56. es MUST be completed prior to doing any LIBS process Please refer to Sections 6 6 1 Exposure calibration for the vision system and 6 6 4 LIBS Calibration for procedure and additional information 6 3 2 LIBS Process A Chip Location 1 On the fixture place a chip that to run a LIBS process 2 Move to the Decap location The LIBS grids is drawn while the chip is in the decap location 3 Make sure that you can see the chip on the vision system of the FALIT application The complete chip must be visible inside the Lasing Area box which is indicated in cross section on the vision system This box represents the boundary in which you can lase B LIBS Grid Object Insert a LIBS grid by pressing the Insert Grid button The default size of the grid is located in the Geometric Parameters section as shown in Figure 6 27 Type in the desired rows or cols size and press Insert Grid once again to redraw the grid Each point of the grid denotes a sample point at which the laser will be fired at and a sample taken The final results will be displayed via a graph CLECE OEA FALIT Laser Operation Manual 58 WW NI M Copyright 2015 Control Laser Corporation YN ar roliice Seve 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL Caption Laser pulsing grid El CridColurrins 2 Geometric aridHtows Z GridSpacing 0 1000 J Parameters GridSpacingy 0 1000 p Position 0 0000 Positiony 0 0000 El Integration Time
57. esesqaestaaneenomaasest veskonson 26 ca Deca AON ce eaters natin cnet E E 26 CLIX onle ODL O Mall o E S tier 26 SAPNE o MOO TA IEEE OEA TEE A A AA IAE 26 Ce CIND O e T a T eeectiens 30 DE AM MIVA OS ER 30 A DECID PrO OS era E E E reece E T E E E E EAA 31 AEn SVG se e E E E E 38 6 1 5 1 Advanced Parameters 0 ec ecessessessessessessssssssesssssssssssessssessessssssssssssssssssssssssssssssssssssessens 39 oe Pee a Cie O14 al 210g O4 es eo EE 6S amemener em eer em E SA A 41 6 15 27 Ga VO Setiine Umes G gt T Parane lE S sormesi n araur inaina tA 42 6 1 5 2 Bevel Parameters Rect and Circle Only sssssssesssesrsrisirisisisisnssserrssnraririsinisisrsisesrsnseas AA Ca oh SSN gaeceseat eeu EE E AEE cesses ones ceed souk esses T 45 Oe TOA Parama ar TACTO ON e 47 cS imee Temple a E S 48 6 1 0 Creating an image temp A Oe R 48 6 1 8 2 Loading an image template saisesieisraisasi naain a na a n a Ea 49 CLF Fy SS era E 50 AE MEE AE E ee mene E E NA ee T A EA AE 50 OAOT Manaen 7 EdIUOMN SAVE RECIPE pered enen CECENE EEEE si 6 1 9 1 Loading Saved RECIDES ccccccsccsscecesensesseatececsecasccenensscneaesseecscsesasaeeecnseasaennecevconaseaneesnavnas 51 6 2 Cross Sectioning Optional acisrsscisssisrirrernrensrrcriisoreiri esir renr E EEEE iE EE ESEE ENEE 52 OAT TaD O ee eE E A E EE ER 52 6 2 2 COSS SECON Calibra Uo ene E 55 Bio Cross SEC COMMIS Proces S ere EEE EAE debameeaeennicdintanec 55 EE a OE a E ee ne A es eee 56 6 2 5 Geometry Pa
58. eset Halt Reset Servo Servo On Servo Dff Servo Servo On Servo Off Figure 6 28 Table Control Panel 2 Ideal Chip Placement Mount the fixture and place a 1 0 X 1 0 inches approx chip in the Decap pocket of the fixture 3 Designate a Decap Position Designate a position as the Decap Position the default position that the tables will move to when you want to begin a New Decap process Saved job files will retain the table positions at the time of saving Loading a saved job results in the tables automatically moving to the saved location Vel Utilities Help Once you have successfully homed both the X and Move to Decap Position Y tables move the tables to your current Decap Move to Cross Section Position position by clicking on Table from the main menu Mowe Co Cross Section vision Position and selecting Move to Decap Position see Figure 6 e eee 29 The tables move to the current decap position Axis Control Panel Figure 6 29 Move to Decap Position Verify that this decap position brings the tables into the view of the vision system You _ _ Table Control should now be able to see the table the chip T placed on the tables on your vision system E E TE lt l screen If you do not use the Jog buttons car a an g see Figure 6 30 to move the tables until you see the chip Figure 6 30 Jog Buttons in XY Table Control CLECE OEA FALIT Laser Operation Manual 68 ANW CONTRO
59. ew settings to take effect CLECE OEA FALIT Laser Operation Manual 75 WWW CONTR M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL B Testing the Cross Section Position Insert a small horizental line at the center of the field see left The chip should have a Horizontal Line as shown at left For a cross section laser the typical operating current range is 18 to 28 A It is recommended that the current be set to a low value of 20 A Make sure the current is sufficient to see the beam but not to damage the chip Set Passes to 20 or more Click on RUN to start lasing Check if the laser beam is centered on the chip The lasing of this line is on the center of the chip 6 6 4 LIBS Spectrometry Calibration To perform a LIBS process move the tables to the Decap position draw a Grid object and press RUN to do a LIBS analysis For the LIBS unit to acquire data it needs to fire a laser beam to a spot Fire Spot on the chip in the Focus Area of LIBS sensor see Figure 6 35 CLECE OEA FALIT Laser Operation Manual 76 Mi NT M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL IR Laser LIBS Sensor LIBS Focus Area Fire Spot LIBS Fire Position Chip in Decap Position This is where the actual This is where the drawing of fii of the a
60. fsect finchl lt g tables until you see the chip 100 0 10 XY Table Control Figure 6 16 Jog Buttons in XY Table Control CLECE OEA FALIT Laser Operation Manual 53 ANW CONTRO MI Copyright 2015 Control Laser Corporation F LIT fal Fiee Sevice 866 612 6619 FAILURE ANALYSIS LASER INSPECTION TOOL Once you are satisfied with the position of the chip EEA Camera Laser Table Ut e Start Decap Calibration save this table position as the new Cross Sectioning Position by selecting Calibration from the main menu Start Cross section Calibration and then clicking on Save Cross Sectioning Position Start LIBS Calibration see Figure 6 17 You will be asked if you are sure you Stop Calibration want to save this position as the new cross sectioning Save Decan Position position Click on Yes to confirm Save Cross Section Position Save Cross Section vision Position Save LIBS Position Figure 6 17 Save Cross Section Position C Move to Cross Sectioning Vision Position You need to designate a position as the Cross Section Vision Position the default position that the tables will move to when you begin a new cross sectioning process This is the position at which you will be able to see the chip on the vision system and thereby draw the cross section Line Object over the chip Once you have successfully homed both the X and Utilities Help Y tables move the tables to your current Cross m Move ko Decap
61. h Grap Sipi Elements Found C Element Table Si 288 104 Element Rating Wavelength nm C 39 333 247 877 i 43 333 251 593 43 333 251 593 26 333 251 897 33 333 252 860 33 333 252 860 21 333 259 799 21 333 263 086 54 333 288 104 20 733 324 805 390 541 390 541 393 383 394 419 396 212 396 900 416 795 421 635 a calc Show All Min Peak 15 000 Search Band 2 Anal Wavelength nm Figure 6 22 Spectrometer Graph The graph in Figure 6 22 represents the result of the LIBS process It shows the various elements found in a material sample and compares it with a Reference Graph of known element readouts Please refer to documentation regarding the Graph for more details G Saving and Loading Save the grid objects and lasing parameters in a single Job file by clicking on File from the main menu and selecting Save Job files are saved with the JOB extension You can also load any saved job file by clicking on File from the main menu and selecting Load CLECE OEA FALIT Laser Operation Manual 60 WW CONTROLLASER COM Copyright 2015 Control Laser Corporation AL ice Jolfre Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 6 3 3 LIBS Spectrometry Parameters LIBS parameters determine the lasing characteristics of a grid tool object Sections 6 3 5 General Parameters 6 3 6 Geometry Parameters and 6 3 7 Process Parameters describe the
62. head assembly and laser beam path 1 5 2 Safety Interlocks Any part of the protective housing that must be opened removed or displaced during normal operation of the laser must be interlocked to prevent access to laser radiation 21 CFR 1040 10 f 2 and EN 60825 4 3 The access door to the work enclosure is protected by two magnetic reed switches which cause the safety shutter to close and terminate lasing from the FALIT Laser System laser when the door is open The switch is attached to the enclosure frame and the actuating magnet is attached to the enclosure door Figure 1 Opening the door releases the switch contacts removing electrical power from the safety shutter causing the shutter to close The use of dual interlock switches provides redundancy which ensures continued functionality of the interlock circuit in the event of failure of one of the switches SY MONITOR DUAL INTERLOCKS lt E acner ENCLOSURE DOOR Figure 1 Safety Interlocks CLECE OEA FALIT Laser Operation Manual 9 WWW CONTR M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL The interlocks should be tested at least once per week to verify that they are still functional To test the interlocks hold the magnet next to only one of the magnetic reed switches and initiate a command to open the shutter If the shutter opens the other switch i
63. ionally load a SAM image of your chip and overlay view Process Calibration it on the vision system Hide Lasing Objects Insert SAM Image To load a SAM Image click on View in the main menu and select Insert SAM Image figure 6 8 Browse and select the ow SAM Image SAM image that to use If necessary move the image around Make SAM Transparent and resize it until it perfectly overlaps the live image of the Figure 6 7 X Y Table Control chip To move and resize the SAM overlay select View in the main menu and select Edit SAM Image figure 6 8 Once overlaid click on Edit SAM Image again to disable editing The SAM image can be shown or hidden at any time by clicking on View in the main menu and then selecting the appropriate option in the main SAM related actions can also be accomplished by clicking on tool bar and then clicking on the action to do C Decap Tool Objects Inser Shape Select one of the decap tools in i I 4 KQ T Figure 6 8 on the right to depict the Hollow Hollow type of decap to do The description Rect Rect Circle Circle Polygon ext of each tool is listed below Feira 6 8307 obeT Rect Rectangle Draws a solid rectangle object on the vision screen HollowRect HollowRectangle Draws a Hollow Rectangle object on the vision screen Circle Draw a solid Circle object on the vision screen HollowCircle Draws a Hollow Circle Donut object on the vision screen CLECE OEA F
64. justing its gain and shutter speed Once in auto mode this value will come to stabilize after a few seconds This is your optimal value Now click and uncheck the Auto check box and do your fine tuning if you wish 6 6 1 5 Setting values for Gain and Shutter Speed Once you set the desired Gain and or shutter soeed you must SET this value to the corresponding zoom level by pressing the Set B G and SS button 6 6 1 1 Saving all values Once you have Set values for each of the available zoom levels you must SAVE them by pressing the Save All and Exit button CLECE OEA FALIT Laser Operation Manual 66 WWW CONTR M Copyright 2015 Control Laser Corporation F LIT tan casas FAILURE ANALYSIS LASER INSPECTION TOOL If you do NOT wish to save any values and simply wish to exit the exposure calibration screen press the Exit button 6 6 2 Decap and GEL Calibration A When to do decap calibration The Decap Calibration process needs to be done whenever the camera is moved or if any modifications are done to its location It s also a good thing to do before you are about to decap a new kind of chip or have not used the system for a long time B What does the decap calibration process do The decap calibration process does the following The above factors determine the true lasing position and size of a given shape when drawn on the vision system s drawing screen Not completing this calibration
65. l 2 Laser Interlock Caution Manufactured by CLC Model FALIT Benchtop Control Laser Corporation Manufactured Date March 2015 CAUTION CLASS 4 LASER 7101 TPC DR Laser Ser 123456789 VISIBLE AND OR INVISIBLE RADIATION SUITE 100 Workstation Ser 987654321 WHEN OPEN AVOID EYE OR SKIN Orlando FL 32822 120 VAC 20 AMPS 1P 50 60Hz EXPOSURE TO DIRECT OR SCATTERED 7 SC RADIATION www controllaser corr CLASS 4 LASER PRODUCT Complies with 21 CRF 1040 MADE IN THE U S A persuant to Laser Notice No 50 D ited June 54 Hal 07 3 Laser Panel Open Label 4 Serial Number Label CLECE OEA FALIT Laser Operation Manual 19 WWW CONTROLLASER COM Copyright 2015 Control Laser Corporation 407 926 3500 866 6 2 8619 2 0 Packing Unpacking and Setup 2 1 Shipping Information Container Size 66 L x 48 W x 53 H Container Weight 600 Lbs Quantity Description FALIT Laser Workstation Consisting of the following Sealed Laser Module s enclosed in CDRH Class 1 Workstation DVD RW Computer with Mutli HD and 2GB Ram Power Z Axis X Y Tables Flat Panel Display Microsoft Windows XP Operating System Transit Suggestion Air Ride Padded Trucking 2 2 Receiving Visually examine exterior surfaces of the wooden crate for signs of damage or mishandling If the crates were received in damaged or mishandled condition immediately notify freight forwarder Do not sign release acceptance on Bill of Landing NOTE
66. lays the beam during long moves across the marking field The default delay is 500 microseconds Delays the beam during the marking of more gradual changes in direction such as ARC to ARC ARC to LINE LINE to ARC and LINE to LINE draws with angles greater than 135 degrees The default delay is 50 microseconds Delays the beam coming out of corners with angles of less than 135 degrees GST 5 is applied to LINE to LINE draws only The default delay is 1 000 microseconds Delays the beam going into corners with angles of less than 135 degrees GST 6 is applied to LINE to LINE draws only The default delay is 1 000 microseconds FALIT Laser Operation Manual 43 Copyright 2015 Control Laser Corporation i IT Sales 407 926 3500 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 1000 10 200 1000 1000 1000 100 10 BevelEnable False BevelCormplete False Bevellndent 0 011 BevelBorder 0 052 BevelPasses 5 E BevelEnable Bevel Enable Bevel Enable Set to True if you wish to do a bevel process If False the bevel is done If True only the inside area is Bevel Complete aq Bevel Indent The width of each bevel step The total width between the start of a bevel to the inside Bevel Border P Read Only The total number of passes steps per bevel for one lasing This is the value that results by dividing the border by the indent Bevel Passes CLECE OEA FALIT Laser Operation Manual
67. ll give the same menus as the other shut down procedure The final step in the shutdown is to turn the key to the OFF position wait for the computers to properly turn off and nit the EMO button CLC controllaser FALIT Laser Operation Manual 95 Copyright 2015 Control Laser Corporation
68. n the USB drive 6 Once the software has initialized choose the Backup Option in the Main Menu 4 Back Up My Disks Files amp Folders 4 Recover My Disks Files amp Folders CLECE OEA FALIT Laser Operation Manual 82 JWW CONTROLLASI M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 7 Next Choose Disk and Partition Backup Disk backup ap Disk and Partition Backup Back up your computer 8 Click on Disk 1 in the Directory List to select all Drives to be backed up then click Next Partition Flags Capacity Used Space Type iDisk 1 A Ci Lm NTFS System Resemed C PriAct 100 MB 24 13 MB NTFS Ji U NTFS Unlabeled D gt Pri 232 8 GB 12 939 GB NTFS 9 Create New Backup Archive and Click the Browse button 10 Choose the Removable Drive F typically In the file name field type in the file name for the Backup The file created at CLC is named with the system serial number and the date year month day Example 01 15 2013 is 130115 So your backup file may look like RESTORE 0123450113_130115 You would name your next backup RESTORE 0123450113_140115 if the system is backed up once a year on Jan 15th One previous backup file is recommended to be left in the drive in case the last one fails Once there are two files on the drive then the oldest one can be deleted to make room for the next CLECE OEA FALIT
69. n be read thoroughly by all personnel before operating or performing maintenance on the FALIT Laser System 1 2 Compliance Statement The FALIT Laser System described in this section is certified by Control Laser as a Class 1 product in accordance with Title 21 Code of Federal Regulations Subchapter J 21 CFR and European Standard EN 60825 1 2007 Food amp Drug Administration Center for Devices and Radiological Health Office of Compliance 10903 New Hampshire Avenue Silver Spring MD 20993 Telephone 301 796 5500 CAUTION Any action which disables modifies defeats or otherwise alters the function or operation of any of the performance requirements described in paragraphs 1 8 automatically voids the Class 1 certification stated above and places responsibility for compliance with 21CFR and EN 60825 Upon the person or organization taking such action CLECE OEA FALIT Laser Operation Manual 6 WW CONTROLLASI M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 1 3 Responsibility of the Laser User The performance requirements described in paragraphs 1 8 are those that are defined by the United States government and the European Union as the responsibility of the laser manufacturer The user also has certain responsibilities for the safe use of the laser which are defined in ANSI Z136 1 The American National Standard for the Safe U
70. n below This results in the lasing of each and every object you have drawn Saving and Loading Save all the decap tool objects and lasing parameters in a single Job file by clicking on File in the main menu and select Save Job files are saved with the JOB extension To load any saved job file click on File in the main menu and select Load Choose the file to load Polygon tool s Ortho Mode Polygon Ortha Mode The polygon tool s Orthogonal Mode can be set by right clicking on the live image when no objects are select and clicking on the Polygon Ortho Mode option and making sure it s checked In Ortho mode each line of the drawn polygon will be forced to only horizontal or vertical lines This helps the user to draw polygonal shapes that are guaranteed to have right angles at every line intersection To go back to free hand or non Ortho Mode simply click on the Polygon Ortho Mode option again and make sure the check mark is cleared CLECE OEA FALIT Laser Operation Manual 37 WWW CONTR M Copyright 2015 Control Laser Corporation YN ar roliice Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 6 1 5 1 Basic Parameters Zt A LaserCurrent 13 00 Laserlowitch 6 00 DutyOycle 1 Speed 18 000000 B Passes 1 El FillSpacing 0 003000 FillStvle Cross Rotation 0 0 mo cale 100 000 Scale 100 000 Axis Height 0 0000 yt LaserCurrent Laser Current Amperes Provides the name
71. nel displays Click on the Home button in the corresponding X or Y section Move od C055 EEIN FOSON Move to Cross Seciion Vision Position to home either table see Figure 6 4 E OAN DE ASE Axis Control Panel Figure 6 3 Homing Figure 6 4 Table Control Panel ig Table Control Panel X Axis Y Axis Home Halt Reset Home Halt Reset Servo ON Servo On Servo Off Servo ON Servo On Servo Off CLECE OEA FALIT Laser Operation Manual 28 ANW CONTRO MI Copyright 2015 Control Laser Corporation TASI rohFiee Senice 866 612 8619 FAILURE ANALYSIS LASER INS TION T Homing Z Axis a Table Control Panel X Axis Y Axis Z Axis Home Halt Reset Home Halt Reset Halt Servo ON Servo On Servo Off Servo ON Servo On Servo Off Servo On Servo Off B Move to Decap Position Before beginning the decap process you must move the XY tables to the Decap Position the default position the tables move to when beginning a new decap process NOTE Saved Job files will retain the table positions at the time of saving Loading a saved job will automatically move the tables to the saved location Once you have successfully homed both the X and Y Utilities Hel tables move the tables to your current Decap Mave to Decas Position position To do this select Table from the main Mave tn Cross Secion Position menu and select Move to Decap Position option Move to Cross Sec ion Vision
72. nt 13 00 Show none Laserliowitch 6 00 Copy Dutlycle 1 Paste Speed 18_000000 i Pares 1 Set Fine Adjust X Y El Decap Options Popup Menu icneeina 0 003000 ee PUP FillStvle Cross Rotation 0 0 ocale 100 000 Scale 100 000 AxisHeight 0 0000 a LaserCurrent Lager Current Amperes Figure 6 11 Lasing Parameters If no object is currently selected the property grid will be disabled CLECE OEA FALIT Laser Operation Manual 36 WWW CONTR M Copyright 2015 Control Laser Corporation N E Polce Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL Once a decap tool object is drawn its lasing parameters can be set see Figure 6 10 Each decap tool object has a corresponding lasing parameter set which defines the actual lasing characteristics of that object When an object is drawn for the first time it gets default lasing parameters assigned to it These parameters can be changed by highlighting its value and typing in the new one Click on Save as Defaults located just below the lasing Save as Defaults parameters section to save the new default parameters Each time a new decap tool object is drawn they will have these new default parameters For descriptions of the parameters in Figure 6 11 see sections 6 1 5 General Parameters and 6 7 6 Process Parameters I Lasing Run gt Once the lasing parameters are set for each object begin the decap A process by pressing the Run button as show
73. o add a new sequence highlight the main sequence of a given object and then click on the Add sequence button located just below the Sequence List see Figure 6 9 Delete a sequence by clicking the sequence in the sequence list and then click on the Delete sequence button see Figure 6 9 NOTE Deleting the main sequence of an object deletes all sub sequences and the corresponding decap tool object Deleting a tool object will also result in the deletion of all corresponding sequences and sub sequences CLECE OEA FALIT Laser Operation Manual 34 WWW CONTR M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL G Sequence Options You can set 4 sequence options that accomplish different tasks for the given option The options correspond to the 4 columns in the Sequence List named Lase Visible Bitmap LIBS see Figure 6 70 Possible values are either Yes or No Lasing Sequences SEQUENCE OPTIONS Sequence Lase Wisi Bib LIBS Figure 6 10 Lasing Sequence Options Yes Lases the corresponding sequence during normal lasing Lase No Skips does not lase the corresponding sequence during normal lasing Yes Shows the corresponding decap tool object on the vision screen No Hides the corresponding decap tool object on the vision Visible agen Note Non visible objects are locked so that they cannot be accidently moved Yes Saves a bitmap of
74. o load and reuse is later A recipe is a handy way to save a set of lasing parameters and reused them of different chips For example you can save recipes for different chips and then load them when you are processing those chips later on Previously the only way you could save a process parameter set was via the save load of defaults Recipes are a neat way of saving several defaults and using loading them later on 6 1 9 1 Saving Recipes In order to save a recipe you first need to have entered the lasing parameters into the property grid as you would normally do before you begin a lasing process Once you have all the lasing parameters set go to Utilities main menu and select Recipe Manager A new dialog box will be shown to you Recipe Manager Recipe Properties Recipes GE 2 g Add new recipe LaserCurrent 13 00 LaserQSwitch 6 00 New Recipe Name DutyCycle 1 Speed 18 000000 Passes 1 XScale 100 000 YScale 100 000 New GSTo 1000 Delete recipe GST1 10 GST2 200 GST3 1000 GST4 1000 GST5 1000 GST6 100 GST 10 LaserCurrent Laser Current Amperes You ll see that the lasing parameters that you set in the property grid are automatically carried over to this new screen You can give a new name for this Recipe by typing it into the New Recipe Name area and pressing the New button CLECE OEA FALIT Laser Operation Manual 50 WWW CONTROLLASER COM Copyright 2015 Control Las
75. olant System status completely shut down 1 Use a flat head screwdriver to open the back panel of the Power Supply Chiller Cabinet PSCC 2 Drain coolant tank Remove the drain plug from the bottom of the chiller and let the chiller drain into a bucket or have a wet vacuum ready to suck up the water 3 Drain laser head disconnect coolant hose at the back of the laser head suck the coolant out from the laser head by a wet vacuum 4 Drain water pump and particle filter use a wet vacuum to suck the coolant out from the two hoses disconnected from the back of laser head 5 Connect the 2 hoses back to laser head 8 2 3 Fill the chiller with distilled water 1 Fill the coolant tank with 140z of Optishield Plus and distilled water only 1 8 Gallon through the level tube if the system does not have a level tube fill the tank through the top of the tank 2 Secure the level tube by the 2 holding clamps and close tube the cap CLECE OEA FALIT Laser Operation Manual 80 Mi NI M Copyright 2015 Control Laser Corporation N E Polce Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 8 2 4 Flush system Please refer to your chiller manual on how to set the chiller to run in manual mode so that the chiller will run without the laser being active 1 Turn the chiller on PN CAUTION Watch for Leaks 2 LET CHILLER RUN FOR 5 MINUTES AND CHECK FOR ANY LEAKS 3 TURN CHILLER OFF AND COMPLETELY
76. opyright 2015 Control Laser Corporation FALLIT Polce Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION 6 0 Software Operation 6 1 Decapsulation 6 1 1 X Y Tables Optional The decapsulation process is used to remove the mold compound of a chip The laser beam emitted by the laser affects just the mold compound material and leaves all other material intact This preserves the wire leads and other vital parts of the chip and allows for the analysis of the decapsulated chip r _ X Table Control A ZAbsMove JogSpeed JogStep ai units sect units T oo 0 1 0 B 0 0000 Get Z Pos T Always begin jobs at Z focus Figure 6 1 X Y Table Controls 6 1 1 1 Automated Z Axis The automated Z Axis provides an easy z axis control The Z axis can be moved up and down using the optional jog buttons depicted with a Z in figure 6 1 Jogging Moving the Z Axis Relative Motion To move the Z axis up or down enter a value for the Jog speed and the Job Step boxes and press the Z Up or Z Down buttons to move in that direction The movement is always relative to the current position Jogging Moving the Z Axis Absolute Motion If you want to move the Z axis in absolute mode click on the Z Abs Move check box and make sure it is checked Now pressing the Z Up and Z Down buttons will move the Z Axis in absolute values CLECE OEA FALIT Laser Operation Manual 26 Copyright
77. or an entire JEDEC tray The operator chooses the function tray or individual part mode and either partial or full decap and then starts the automatic process 10 6 GEL Module AN Not available with Cross Sectioning or Motherboard Modules This module allows the removal of low hardness silicone gel used in IGBTs and other devices Using a patented process we can remove the silicone gel from the component often times without damaging the passivation layer The software tools used for this process are similar to those used for the base module Decap process so the user will require very little training if they already understand the Decap process A special laser is required for this process Start Up and Shut Down Procedure CLECE OEA FALIT Laser Operation Manual 89 WW NI M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL START UP This walk through begins with the EMO emergency shutdown button switch i Addendum Start Up and Shut Down Procedure Begin by pulling the EMO outward with a clockwise turning motion After the EMO switch is pulled press the reset button This will reset all controllers and faults and begin the startup procedure CLECE OEA FALIT Laser Operation Manual 90 WWW CONTR M Copyright 2015 Control Laser Corporation PACH EE Tol free Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL
78. paragraphs 1 7 below 1 5 1 Protective Housing The laser radiation emitted by a Class 1 laser product must be contained within a protective housing at all points where access to radiation is not required during normal operation of the product in the performance of the function for which it was designed 21 CFR 1040 f 1 and EN 60825 4 2 CAUTION The FALIT Laser System must never be run during normal operation with any part of the protective housing open removed or displaced CLECE OEA FALIT Laser Operation Manual 8 WW NI M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL Before returning any parts to CLC for repair replacement contact Customer Service at 866 612 8619 You will be supplied with a Return Material Authorization RMA number used to track the part during repair and shipping Laser radiation generated by the FALIT Laser System originates in the laser module a sealed unit inside the enclosed head assembly that is not accessible to the user The assembly which focuses and manipulates the laser beam at the piece to be lased is mounted at the end of the head assembly Laser radiation is completely contained within the enclosed head assembly except where it exits the assembly to impact the piece to be lased In the standard configuration laser radiation is emitted downward from the assembly Figures 1 1 and 1 2 show the
79. parameters in Figure 6 23 and how they affect the lasing process H 2 El Pn Caption Laser pulsing grid El GridColurmns 2 GridA owg 2 GridSpacing 0 1000 GridSpacing 0 1000 Position 0 0000 Position 0 0000 El Integration Time 10 E LaserCurrent 2r 00 MumSamples 5 z ee b a e SN An Caption Laser Pulsing Grid Figure 6 25 LIBS Parameters 6 3 4 General Parameters Provides the name of the lasing object This is a read only value Caption 6 3 5 Geometry Parameters Grid Columns Number of columns of the grid Grid Rows Number of rows of the grid CLECE OEA FALIT Laser Operation Manual 61 Wi NT M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL Distance between columns of the grid Grid Spacing X Starting X coordinate position of the Grid in the laser s lasing field Grid Spacing y Distance between rows of the grid Position XV Starting Y coordinate position of the Grid in the Position Y laser s lasing field 6 3 6 Process Parameters Integration Time Exposure time for the sensor Laser Current Q Switch frequency of the RF Driver Number of samples taken Samples Delay between laser pulse and sensor shutter open Sample interval Time between samples Number of Sample Delay CLECE OEA FALIT Laser Operation Manual 62 Wi NI M Copyright 2015 Control Laser Corporation ZASE
80. r diMelel vesscvsacssssecaivredecessadeencasatvnsssoaiecadweetecesnantacnivnedeceveousuanndoetuvedieisecddonsTesaswaresn s 56 6 2 0 Process Paramete Sais cepscussnensnnsdsnnadesinonanccsvessatannbatnetqneesstewnnsanacsenesesawonasaussannsstawunpemarsaenedeeennpaweter 57 Po LBA OU IO VAIN eea A E E EE 58 CLECE OEA FALIT Laser Operation Manual 3 WWW CONTR M Copyright 2015 Control Laser Corporation N E Polce Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 9 cel OOI ore E E E E T E E E A 58 Oae LIBS OC CS o a a a oeeecaeee 58 6 3 3 LIBS Spectrometry Para metetS wiccaccncsessccaeccsacsdutenacsteenctasnesendesdawsanenad RE a ai 61 SERE E E E E EE O E A E E E E 61 6 3 5 Geometry ParameterS sssssessssessrssosrsrrssssrsressssreresrsreseosroresrsrrosesesresessreroseeressoseoreseosrereseeresee 61 O PTO SE P al Me Clo a E E E E santusenccesimarseee 62 oA aU eaa E E E nce 63 0 5 VYBION Syste Mm FINE FOCUS xirucssenaiversesivnesienasscuteedancahoesiteuicsivotatenaadaatendaedonens Ea 64 o O O E E E E E E E E 65 6 6 1 Exposure calibration for the vision SyStemM ssesssssessssresssrrrssrrerssreressrerssrrresrreresrrreserereseeresene 65 Mex ZOU AR EE E E EE TN 66 6 61 2 Auto Settings tor Gaimana SNULMeEr SPECO seriinin nan ENE 66 6 6 1 3 Manual Settings for Gain and Shutter Speed sssssssisisesississsrsrsrsraririsisisisisissisrsiss 66 AEAEE e a e a l a T EA ser E A 66 6 0 1 5 Setting values Tor Gainan
81. rporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL When the line object is drawn for the first time default lasing parameters are assigned to it Change the defaults by typing in the parameters to use as defaults in the parameter section and press the Save as Defaults located just below the lasing parameters section Save as Defaults This sets the default parameters as the ones you have just entered in the lasing parameter list Each time you draw a line too object it will have these new parameters assigned by default E Cut Run Once the lasing parameters for the line object are set begin the cross sectioning process by pressing the Run button as shown below This cuts the chip along the line drawn a iih gt Press Run to begin cross sectioning process Aun F Saving and Loading To save the line tool object and lasing parameters in a single Job file click on File from the main menu and select Save Job files are saved with the JOB extension To load any saved job file click on File from the main menu and select Load 6 2 4 General Parameters Provides the name of the lasing object This is a read only value Caption 6 2 5 Geometry Parameters Starting X coordinate of the line in the laser s lasing Start X field CLECE OEA FALIT Laser Operation Manual 56 WWW CONTR M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619
82. s faulty and must be replaced Repeat the test with the second switch CAUTION The interlocks must remain functional at all times during normal operation of the FALIT Laser System If the interlocks must be turned off during an authorized service functions such as optical alignment laser eyewear that is made for an optical density described in the table on page 4 must be worn 1 5 3 Master Key Control Even though not required for a Class 1 laser a master key control is provided on the main control panel to enable and disable operation of the FALIT Laser System The key can be removed from the switch only in the OFF position and when removed the laser is disabled 21 CFR 1040 10 f 4 and EN 60825 4 5 CAUTION The key should be given only to personnel authorized by the Laser Safety Officer to operate the FALIT Laser System The laser should never be left unattended while it is running or while the key is available and not under the control of an authorized person CLECE OEA FALIT Laser Operation Manual 10 WWW CONTR M Copyright 2015 Control Laser Corporation F LIT fal Fiee Sevice 866 612 6619 FAILURE ANALYSIS LASER INSPECTION TOOL 1 5 4 Beam Attenuator A beam attenuator safety shutter is not required on Class 1 laser products however a shutter is used on the FALIT Laser System in conjunction with the protective housing interlocks to interrupt lasing when the housing is open 2
83. s usually the entire chip and save that area as a Template Later on the user can load any template and overlay it over the live image Templates work just like SAM images but are created with real chips and thus present a more realistic mapping of a chip When loading a template the zoom level at which the image was Saved is also read and the zoom is automatically adjusted This ensures that the user will not have to stretch or shrink the loaded template to fit the live image The user can if he she wishes alter the size and location of a loaded template to fit his her needs 6 1 8 1 Creating an image template In order to create an image template you first need to select a chip that you can sacrifice for this process 1 Zoom to a level that shows the entire chip on the screen 2 Place a rectangular decap tool object that totally covers the chip The aim is to totally decap this chip until all the inner components are visible 3 Run the decap process and make sure it decaps entirely Utilities Help 4 Now that you can see all the components entirely Show Image Template Area select Templates in the main menu and click on Show save Image Template Area Image Template Area Load Image Template Edit Loaded Image Template Show Image Template Make Image Template Transparent CLECE OEA FALIT Laser Operation Manual 48 WWW CONTR M Copyright 2015 Control Laser Corporation rae es Polce Sevice
84. se of Lasers and Section Three of EN 60825 Radiation safety of laser products equipment classification requirements and user s guide These standards require the user to appoint a Laser Safety Officer to oversee the use of this Class 1 equipment This individual shall have the authority and responsibility to monitor and enforce the control of laser hazards and to effect the knowledgeable evaluation and control of laser hazards See the appropriate standard ANSI Z136 1 in the United States of America and Section Three of EN 60825 in the European Union for the specific responsibilities of the Laser Safety Officer ANSI Z136 1 is issued by the American National Standards Institute ANSI as a recommended Safety guide for the use of laser products in the United States of America ANSI cannot enforce adherence to the guide however OSHA the Occupational Safety and Health Administration uses the guide as its inspection standard when it inspects workplaces that use lasers Therefore the guide in effect carries the authority of the United States government It is recommended that the procedures outlined in the guide be followed when operating the FALIT Laser System It is also recommended that the user contact local and State authorities to determine whether or not additional regulations may apply ANSI Z136 1 may be ordered from AMERICAN NATIONAL STANDARDS INSTITUTE 25 West 43 4 Street 44 floor New York NY 10036 Telephone 212 642
85. se the power supply is not electrically isolated from the power line Positive protection against possible hazards requires proper connection of the ground terminal on the power cable and an adequate external ground Check these connections at the time of installation and periodically thereafter Never work on electrical equipment unless there is another person nearby who is familiar with the operation and hazards of the equipment and who is competent to administer first aid When possible keep one hand away from the equipment to reduce the danger of current flowing through the body Always use approved insulated tools when working on high voltage circuits Special measurement techniques are required for this system Ground references must be selected by a technician who has a complete understanding of the system operation and associated electronics CLECE OEA FALIT Laser Operation Manual 17 WWW CONTR M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 1 8 ESD Electrostatic Discharge Protection Connect the M BNC RF cable in the umbilical cable exiting the DPSS Power Supply Cooler to the Q Switch F BNC connector located on the Laser head This provides an initial DC return path between the Laser head and the DPSS Power Supply Cooler The Power Supply Cooler incoming AC service cable must be connected to the electrical utility service to provi
86. ser Operation Manual 39 WWW CONTR M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 4 Horizontal Fill the object with only horizontal lines Determines the X scale factor of the lasing object You can either increase or decrease the overall scale without X Scale having to resize the object on the vision system 100 is 100 Determines the Y scale factor of the lasing object You can VY Scal either increase or decrease the overall scale without care having to resize the object on the vision system 100 is 100 Optional Tne relative distance to move the z axis before Z AXIS Heignt lasing this object CLECE OEA FALIT Laser Operation Manual 40 WWW CONTR M Copyright 2015 Control Laser Corporation YN aor roliice Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 6 1 5 1 Geometric Parameters El A Location 1 3504 Location r 0 6308 Width 0 5656 Height 0 4919 E GST 1000 GSI 10 GST 200 4513 1000 GSiA 1000 GSTS 1000 yj 4516 100 GST 10 J Locaton_ Xx Location Coordinate NOTE Only parameters that are appropriate for the selected object are displayed The X coordinate location of the object Type in a new Location X value and press enter to move the object to that X location The Y coordinate location of the object Type in a new value and press enter to move the object to that Y location
87. ss Section Position Cross Section Vision Position by clicking on Table from the main menu and selecting Move to Beene eae Cross Section Vision Position see left The tables Axis Control Panel will move to the current cross section vision position Verify that this position brings the tables into the view of the vision system You should now be able to see the table and the chip on the vision system screen If not use the Jog buttons see Figure 6 32 to move the tables until you see the chip l xY Table Control Speed Distance T insect linch al 1 00 Figure 6 32 Jog Buttons in XY Table Control CLECE OEA FALIT Laser Operation Manual 74 Copyright 2015 Control Laser Corporation ZASE Folie Sevice 866 6128619 FAILURE ANALYSIS LASER INSPECTION TOOL Once you are satisfied with the position of the chip save the table position as the new Cross Section Vision Position by clicking on Calibration from the main menu and selecting Save Cross Section Vision Position see Figure 6 33 When asked if you are sure you want to save this position as the new cross position click on Yes to confirm This ensures that when you begin a cross process the tables will move to this new location when you select Move to Cross Section Vision Position from the Tables menu see Figure 6 34 Calibration Camera Laser Table Uk Start Decap Calibration Start Cross section Calibration Utilities Help Start LIBS
88. the FALIT application 4 1 Lasing the Calibration Boxes A The idea is to get the Calibration Boxes A B C and D plus the largest Lase Area box lased so that it is visible on the vision screen The Calibration Boxes are similar to the following image If any of the 5 boxes were lased off the screen adjust the Box PR X and Box PRY values and release until these boxes are centered on the vision screen Increase the values for X and or Y and press the Lase Box button to release the Calibration Boxes Once the CLECE OEA FALIT Laser Operation Manual 69 WWW CONTR M Copyright 2015 Control Laser Corporation N E Polce Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL boxes are totally visible on the vision screen proceed to the next step by pressing the Next button Note that there is a limit to which you can move the boxes using the Box PR X and Box PR Y values You have reached the maximum values when your lased boxes start to lase bunched up or when they are lased with their sides one on top of the other This means that you have reached the maximum positions of the Laser Galvos and cannot move the boxes any more In such a situation you need to physically move the camera so that you can see more of the lased Boxes without having to enter large values for the Box PR X and Box PR Y NOTE If you physically move the camera system you need to start at step 1 once again in order to begin
89. the live image of the vision system after lasing the corresponding sequence during normal lasing The Bitmap bitmap is saved in the Bitmap subfolder No Does not save any bitmaps Yes Runs a LIBS process after the corresponding sequence has been lased during normal lasing A LIBS grid must already be LIBS inserted in order for this option to work No No LIBS process is run CLECE OEA FALIT Laser Operation Manual 35 WWW CONTR M Copyright 2015 Control Laser Corporation ENLIT a a Beis FAILURE ANALYSIS LASER INSPECTION TOOL A value of Yes or No can be chosen by first clicking and highlighting the sequence to change Clicking the column heading that corresponds to the option to change will toggle the values between Yes and No Another option click and highlight a decap tool object on the vision system and right click and select the appropriate option from the pop up menu NOTE The objects which show as BOLD are the only ones that will be lased Hidden or Non lasing objects will appear with normal text or INDENT text Decap Object Sub Menu Decap Options Popup Menu v Lase a v Show You can set many Decap objects related options by clicking on Pic Bitmap any Decap object and selecting it then right clicking to get the Decap Object Menu as shown below Lase all excspt this Lase only this H Parameters ait Lase none FE at Show all except this E A Show only this E Show all LaserCurre
90. tion F LIT ganas FAILURE ANALYSIS LASER INSPECTION TOOL 7 1 2 No laser output 1 Check shutter status Should be open hearing the movement when switching 2 Check the Voltage and Current reading on LCD if O current and more than 20 V there is open circuit in diode module 3 RH check Humidity sensor The window has 3 portions the RH level is between the pink color reading and the next higher blue color reading The desiccant should be changed after the sensor shows 60 RH unless is specified differently in the user manual or test data sheet Change the desiccant according to instructions in the maintenance schedule Call Control Laser Inc CSI customer service team at 1 407 926 3562 for assistance MAINTENANCE SCHEDULE 1 Check Coolant Level 1 Month 2 Check Humidity Level 1 Month 2 Coolant amp Filter Change 6 Months 4 Working Temp Optimization 6 Months CLECE OEA FALIT Laser Operation Manual 79 WWW CONT M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL 6 1 Coolant level check Optional liguid cooled systems System status completely shut down A Look at the screen on the chiller and see if there are any alarms or errors B Remove the fill cap on the chiller and check to see if water is present 8 2 DPSS Coolant Filter Change Particle Filter 2802 00254 Optishield ll 1008 00730 8 2 1 Drain Co
91. urable Simply right click on a selected decap Please aeann T ae to use object and click on the Set Fine Adjust X Y option R Sinas to get the following dialog box ra Enter a value for X and Y in the respective boxes OK Cancel and press OK to save it Roe Limos Now each time you want to fine adjust each arrow key press will result in the selected object being changed by the value you set above CLECE OEA FALIT Laser Operation Manual 32 WWW CONTR M Copyright 2015 Control Laser Corporation ZASE fal Fiee Sevice 866 612 8619 FAILURE ANALYSIS LASER INSPECTION TOOL Eg If you set X 0 1 and Y 0 2 then each time you press the right arrow key the selected decap object will grow or shrink by 0 1 inches Each time you press the up or down arrow keys the selected decap shape will grow or shrink by 0 2 inches p Delete unwanted objects by clicking on them and then either press Tales the lt Delete gt key or clicking on the delete button shown at left E Copy and Paste You can copy an existing tool object and paste it as a new object The new object will have the same decap parameters as the one you copied from To copy an object click on it to select and highlight it Right click and select Copy from the pop up menu To paste the copied object highlight the source tool object Right click on any area on the vision system screen and select Paste The new object will be pasted at that point Another

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