User Manual
Contents
1. If you are using only O2 in your process leave the ozone generator off Open the lid and carefully place the substrate on the hotplate If the plate temperature is high a pocket of air can form between the wafer and the plate The water may slide accross the hotplate When the substrate temperature equalizes it will sink to the plate Once this has occured position the substrate in the middle of the hotplate Note Do not place any substrates higher than 12mm in the chamber With your left hand slightly raise the chamber lid then with your right hand move the bar holding the lid to the right Slowly lower the chamber lid and fasten the two catches on the front of the chamber Do not procede until BOTH latches are securely fastened Make sure the manual purge button is in the off position Press the START AS button Once the set time has been reached the START light will go out and a automatic 3 minute purge will begin Wait until the automatic purge has completed 3 minutes Note To abort a run press the RESET A6 button DO NOT OPEN THE LID AT THIS POINT Press the PURGE A3 button The PURGE button will light up and a nitrogen flow will enter the chamber Let the purge conitnue for a MINIMUM of three minutes After the three minutes of purge it is safe to open the lid and retrieve your substrate When the purge light goes off open the latches and lift the chamber lid Remove your substrate close and latch the lid and press the MAIN A2. for the stripper These will be referenced in the following instructions A This is the main control panel for the system The switches are as follows Al MAIN POWER A2 HEATER A3 PURGE A4 UV LAMP A5 START A6 RESET A7 OZONE GENERATOR B This is the timer where you will set the time for your process B1 Set Seconds in process time B2 Set tens of seconds in process time B3 Set minutes in process time B4 Set tens of minutes in process time B5 Reset the time left on the counter B6 Time left in active process PV Plate Value B7 Set time for process SV Set Value C This is the temperature controller for the system It is only on when the HEAT button is on Cl SET C2 LEFT C3 DOWN C4 UP C5 Temperature measured on the plate C6 Temperature set point Instructions l A If the MAIN POWER A1 button is not on turn it on If the light for the button will not come on make sure the power supply the small box located to the left of the stripper is on Press the PURGE A3 button and allow it to run for three minutes Once three minutes has passed open the lid and visually inspect the uv lamp located in the lid If the lamp is broken close and latch the lid then find help from a staff member If you need the hotplate and the HEATER A2 button is not on turn it on Set the temperature to the desired level You do this by pushing the SET C1 button on the temperature control
3. 1 button Clean up any materials left around the stripper Troubleshooting l If there is no oxygen flow make sure that the bottle in the chase is not empty Do this by entering the chase behind the machine and make sure that the high pressure side closest to the bottle is not zero and that the valve on top of the bottle is open
4. Samco UV Ozone Stripper Keith Bradshaw 5 2006 The Samco model UV 1 is a stripper cleaner used for cleaning or stripping organic materials such as solvent residues photoresist ink or polyimide from substrate materials The system uses a combination of UV light ozone and heat to accomplish this You do not always have to use ozone Running only oxygen through the system will clean very small layers of organics Light Source Low pressure Hg Lamp san 85nm 02 040 Decomposition 02 0 03 Synthesis O30 02 Decomposition Cleaning a Modifying Warnings 1 The stripper uses ozone which is toxic Never open the cover unless you are sure that the system has vented completely If you abort a run in progress a manual purge must be done for a MINIMUM of 3 minutes A manual purge is accomplished by pressing the purge button which will light up when active then stopped after three minutes by pressing the purge button again 2 Using a sample taller than 12mm can cause the UV lamp to break upon closing the cover The breaking of the lamp releases small amounts of mercury into the chamber If the heater is run during this condition toxic levels of mercury vapor can be released 3 The surface of the hotplate could cause burns to unprotected skin and through cleanroom gloves Only use tweezers to place and remove substrates Controls Following are detailed descriptions of each of the relevant control panels
5. ler On the temperature setpoint line C6 the two left digits will start blinking The far right digit will be solid Use the UP C4 and DOWN C3 keys to set the solid digit Push the LEFT C2 button to move to the middle digit Set this one in the same way Press the LEFT C2 button to set the last digit on the left If you need to redo a digit continue to press the LEFT C2 button until that digit is solid Once the time is set press the SET C1 button No digits should be flashing Set the time for the process To do this go to the timer B and use the bottom 4 keys B1 B4 to set the number of minutes and seconds you wish to run your process The set time will be displayed in the lower set of numbers B7 For example if my process was 14 minutes and 23 seconds I would push B4 once B3 four times B2 twice and B1 three times Calibrate the oxygen flow into the chamber To do this close and latch the lid Press the START AS button The flow meter will register a flow For most uses you want the flow between 30 and 40 on the meter Once the meter is calibrated 10 11 12 13 14 15 press the RESET A6 button Press the PURGE A3 button After three minutes of purging press the purge button again If you have any questions on the flow you need contact your advisor or a staff member If you are using the UV lamp and the ozone generator and these are not on turn them on These buttons are UV LAMP A4 and OZONE GENERATOR A7
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