User Manual MP142E - Physik Instrumente
Contents
1. If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the N 111 in the case of malfunction or failure of the system If touch voltages exist touching the N 111 can result in minor injuries from electric shock gt Connect the N 111 to a protective earth conductor before start up p 22 gt Do not remove the protective earth conductor during operation gt If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the N 111 to the protective earth conductor before Starting it up again N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 27 6 Start Up and Operation i Ji Dangerous voltage and residual charge on piezo actuators A The N 111 is driven by piezo actuators Temperature changes and compressive stresses can induce charges in piezo actuators After being disconnected from the electronics piezo actuators can also stay charged for several hours Touching or short circuiting the contacts in the connector of the N 111 can lead to minor injuries In addition the piezo actuators can be destroyed by an abrupt contraction gt Do not open the N 111 gt Do not touch the contacts in the connector of the linear actuator gt Secure the connector of the linear actuator with screws against being pulled out of the controller If you want to pull out the connector of the linear actuator gt Do not pull out the con2. Windows operating systems Open the FTP download directory in Windows Explorer N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 3 1 About this Document gt Ji 6 Log in with the user name and the password from the Release News 7 Inthe directory of the corresponding product go to the Manuals sub directory 8 Copy the desired manual to the hard disk of your PC or to a data storage medium 4 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter Mendod USG presin ea 5 General Safety Instructions cccccceeeececcceeeeeeeeeeeeeeeeeeeseseeeeeceeeeeessseaeeeeeeeeesssaaeeseeeess 5 Organizational MEASUIES ccccccceeeeeecceeeeeeeeeseeeceeeeeceeeeeseeeeeeeesseseeeeeeeeessaeaaeeeeeeeeeesaas 6 2 1 Intended Use Based on its design and realization the N 111 is intended for single axis positioning adjusting and shifting of loads at various velocities The N 111 is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants The intended use of the N 111 is only possible when installed and in connection with a Suitable controller p 12 The controller is not included in the scope of delivery of the N 111 2 2 General Safety Instructions The N 111 is built according to state of the art technology and recognized safety standards Impro
3. 3 4 Scope of Delivery The N 111 is delivered with the following components Order Component number N 111 2x1 Linear actuator according to order 000036450 M4 screw set for protective earth connection MP142E User manual this document in printed form od Packaging materials 3 5 Suitable Controllers E 712 1AM Digital Motion Controller 1 Channel for NEXLINE Nanopositioning Linear Drives with Incremental Encoder 3 6 Only N 111 2A1 Technical Features for Closed Loop Operation 3 6 1 Linear Encoder Sensor The linear actuator is equipped with an optical linear encoder For the encoder resolution refer to the table in the Specifications section p 37 Optical linear encoders measure the actual position directly direct metrology Therefore errors occurring in the drivetrain such as nonlinearity backlash or elastic deformation cannot influence the measurement of the position 3 6 2 Reference Point Switch The linear actuator is equipped with a direction sensing reference point switch that is located approximately in the middle of the travel range This sensor transmits a TTL signal that indicates whether the linear actuator is on the positive or negative side of the reference point switch The commands that use the reference signal are described in the user manual of the controller and or in the corresponding software manuals 12 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator 4 Unpack
4. WWW PI WS 5 Installation 5 2 Mounting the N 111 INFORMATION For optimum repeatablity all components must be firmly affixed to each other Tools and accessories Four M3 cylinder head screws ISO 4762 with suitable length Suitable screwdriver or hexagonal key Prerequisites v You have provided a suitable installation environment p 15 v The linear actuator is not connected to the controller Mounting the N 111 Figure 9 Position of the mounting holes schematic 1 Position the mounting holes in the mounting plate of the linear actuator see figure over the corresponding holes in the surface 2 Completely screw in the cylinder head screws at all mounting holes 3 Check that the linear actuator fits on the surface without backlash N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 21 5 Installation gt Ji 5 3 Connecting the N 111 to the Protective Earth Conductor INFORMATION gt Observe the applicable standards for mounting the protective earth conductor INFORMATION gt The hole for the protective earth connection is marked on the product p 11 Tools and accessories Suitable protective earth conductor conductor cross section 0 75 mm insulation green yellow M4 screw set included in the scope of delivery of the linear actuator Philips head screwdriver PH 2 Connecting the N 111 to the protective earth conductor Figure 10 Position of the protective earth connecti
5. mode Velocity 100 duty cycle 0 4 nanostepping mode Mechanical properties Stiffness in motion direction 16 Drive force active 50 Holding force passive 70 Drive properties Motor type NEXLINE Operating voltage 250 N 111 NEXLINE Linear Actuator MP142E N 111 2A1 X 10 10 nm to 7 um 2 Linear encoder 0 025 5 nm 1 0 0 6 0 4 16 50 70 NEXLINE 250 Unit um nm mm s mm s mm s N um Version 1 0 0 Tolerance typ max max max 20 max min 37 10 Technical Data PI N 111 201 N 111 2A1 Unit Tolerance Miscellaneous Operating temperature range 40 to 80 40 to 80 C Material Aluminum stainless Aluminum stainless steel titanium Steel titanium Mass 245 325 g Cable length 15 tS m 10 mm Connector Sub D 25 Sub D 25 Recommended controllers E 712 1AM E 712 1AM Ask about custom designs Depending on drive electronics Data refer to operation with E 712 controller Depending on drive electronics Data refer to operation with E 712 controller The maximum velocity in nanostepping mode is designed for the best possible constancy so that no velocity variations occur when executing the steps Data refer to operation in full step mode 10 1 2 Ambient Conditions and Classifications 38 The following ambient conditions and classifications must be observed for the N 111 Area of application For indoor use only Maximum altit
6. 3 6 Only N 111 2A1 Technical Features for Closed Loop Operation 068 12 3 6 1 Linear Encoder Sensor cccccceccsseeeeeeeeeeeeeeeeeeeeeeeeeeeseaeeeeeeeaaaees 12 3 6 2 Reference Point SWItCH sesira ieesnii ennes ii e Enia 12 4 Unpacking 13 5 Installation 15 5 1 Providing a Suitable Installation EnNVirOnMent ccccccsseeeeeeeeeeeeeeeeeeaeeeeeeeeeas 15 5 2 Mounting Me N II T sssrin E 21 5 3 Connecting the N 111 to the Protective Earth Conductor cccccseeeeeeeeeeees 22 5 4 Affixing the Load to the NAV Vii cdeccsscchenececadseesetebeneaededeeesanthvebandabencesb deesiacsd ened 24 5 5 Connecting the N 111 to the Controller ccccccccccecssseseeeeeeaeeeeeeseseeeeeeeeenaeees 26 Start Up and Operation 27 6 1 General Notes on Start Up and Operation cccccccccsseeeeeeeeeeeeeeaeeeeeeeeeeeeeeaas 27 6 2 Operating the N 111 ccc cccssessseeeeeeeeeeeeeeseeeeeeeeesaeeseeeeeeeseseeeeeeeeeeesssaaeeeses 29 6 3 Discharging the N 111 ccccceesceeseseeeeeeeeseeeseeeeeeaeaseeeseeseeeseaueeesaaeeeesseeeeeenaees 30 Maintenance 31 7 1 General Notes on Maintenance ccccccsessccceccessecceeeeeeeeceeeeeeeeceesseeeeceeeeeaeees 31 7 2 Gioaning iNe INE 111 rennan e EENS 31 Troubleshooting 33 Customer Service 35 Technical Data 37 10 1 SpeciNcalONS eroine nE EE E EEE 37 10 1 1 Da FANE ea E E E 37 10 1 2 Ambient Conditions and Classifications ccccccccsseceeeseeeeeeeee
7. analog operation position resolutions up to 25 pm can be achieved open loop operation N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 7 3 Product Description i The linear actuator supports the following modes of operation for positioning a load Full step mode Long travel ranges High velocity High dynamic forces Nanostepping mode Long travel ranges Low vibration Uniformity of motion Analog mode Travel ranges in the um range High dynamics High resolution gt Further details on the operating modes are found in the manual of the controller used 3 2 Model Overview Two standard versions of the N 111 NEXLINE OEM linear actuator are available They differ regarding the presence of an integrated sensor and thus in height Ne Figure 1 Height hb 1 Actuator 2 Surface part of the application hp H eight 8 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator PIEZO NANO POSITIONING WWW PI WS 3 Product Description Model Characteristics N 111 201 NEXLINE OEM piezo stepping actuator travel range 10 mm max push force 50 N overall height hp 42 5 mm N 111 2A1 NEXLINE OEM piezo stepping actuator travel range 10 mm max push force 50 N with linear encoder 5 nm resolution overall height hp 62 mm gt For further technical data see the specifications p 37 PI also produces custom designs upon request Custom designs can differ from the described standard products in resp
8. linear actuator the outward motion of the rod is defined as positive direction of motion INFORMATION In the ideal application case the linear actuator is operated quasi statically In quasi Static operation the load is mainly kept at a particular position and only temporarily positioned stepping mode For the N 111 2A1 the following also applies INFORMATION The repeatability of the positioning is only ensured when the reference point switch is always approached from the same side Recommended controllers from PI fulfill this requirement with their automatic direction detection for reference moves to the reference point switch 6 2 Operating the N 111 Prerequisites v v v You have read and understood the user manual of the controller You have read and understood the user manual of the PC software You have properly mounted the linear actuator p 15 and connected the protective earth conductor p 22 The controller and the required PC software have been installed All connections with the controller have been established See user manual of the controller N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 29 6 Start Up and Operation i Ji Operating the N 111 gt Follow the instructions in the manual of the controller used for startup and operation of the N 111 6 3 Discharging the N 111 The N 111 must be discharged in the following cases When the N 111 is not used but the controller rema
9. slightly dampened with a mild cleanser or disinfectant e g ethanol or isopropanol gt Donotdo any ultrasonic cleaning N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 31 PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting Problem Target position is approached m too slowly or with overshoot Servo control parameters are not optimally set Target position is not kept 7 stable Large changes in the load Uncontrolled oscillations of the N 111 Excessive lateral forces on the rod Increased wear Reduced accuracy No or limited motion Excessive load Excessive counterforces in the direction of motion 8 Troubleshooting Switch off the servo control system immediately Check the settings of the servo control parameters If necessary correct the settings of the servo control parameters Avoid lateral forces on the rod of the N 111 Reduce the load see Mechanical Load Capacity p 40 In the case of vertical mounting gt Ensure gravity compensation so that the maximum load p 40 is not exceeded lf the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 35 N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 33 PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail mail
10. 2A1 Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 17 N 111 2A1 dimensions rod at center position N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 43 10 Technical Data Pp I 10 5 Pin Assignment 10 5 1 N 111 201 O 0060608090069686 s e S E E E ES o 14 25 Figure 18 Sub D 25 connector Siaran funton ection D1 Supply voltage for shearing group 1 250 V to 250 V Supply voltage for shearing group 2 250 V to 250 V 7 C Supply voltage for clamping group 250 V to 250 V 11 14 Ground of shearing group 1 D2 Ground of shearing group 2 2 J ee pO a o a Po oe Eo Eo E Eo oo eS a a 2 eT oe La 44 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator PIEZO NANO POSITIONING WWW PI WS 10 Technical Data a p p ip C a S The sign indicates that the corresponding pin has not been assigned 10 5 2 N 111 2A1 13 Cae a 18888888806 14 29 Figure 19 Sub D 25 connector Supply voltage for shearing group 1 250 V to 250 V 2 5V Supply voltage for encoder Input 3 48V ref Supply voltage for reference point switch C Supply voltage for shearing group 2 250 V to 250 V ground sensor oe GND ref Ground of reference point swith of reference Ground of reference point swith switch 10 Ce Supply voltage for clamping group 250 V to 250 V
11. Low Voltage Directive EN 61010 1 2010 EMC EN 61326 1 2013 RoHS EN 50581 2012 lt laa N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 49
12. N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 45 10 Technical Data Pp I a a a C C C e a p ma C a a The sign indicates that the corresponding pin has not been assigned 46 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal In accordance with EU law electrical and electronic equipment may not be disposed of in EU member states via the municipal residual waste Dispose of your old equipment according to international national and local rules and regulations In order to fulfil its responsibility as the product manufacturer Physik Instrumente PI GmbH amp Co KG undertakes environmentally correct disposal of all old Pl equipment made available on the market after 13 August 2005 without charge Any old PI equipment can be sent free of charge to the following address Physik Instrumente Pl GmbH amp Co KG Auf der Roemerstr 1 D 76228 Karlsruhe Germany N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 47 12 EC Declaration of Conformity PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity For the N 111 an EC Declaration of Conformity has been issued in accordance with the following European directives 2006 95 EC Low Voltage Directive 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Safety
13. PI MP142E N 111 NEXLINE Linear Actuator User Manual Version 1 0 0 Date 15 06 2015 This document describes the following products N 111 201 NEXLINE OEM Piezo Stepping Actuator 10 mm 50 N N 111 2A1 NEXLINE OEM Piezo Stepping Actuator 10 mm 50 N Linear Encoder 5 nm Resolution Physik Instrumente PI GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente PI GmbH amp Co KG is the owner of the following trademarks PI PIC PICMA PILine PIFOC PIMag PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano The products described in this document are in part protected by the following patents German patent no 10148267B4 US patent no 6 800 984B2 European patent no 1267478B1 2015 Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 15 06 2015 Document number MP142E MMa version 1 0 0 Subject to change without notice This manual is superseded by any new release The latest release is av
14. ailable for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual cccccesseeceeeeeesseeeeeeeeeeeeees 1 1 2 Symbols and Typographic CONVENTIONS c ccseeeccceeeeeeseeeeeeaeeeeeeessaaeeeeeeeaaaeeees 1 1 3 FOUG Ga cca nse niccied ahammar scacaneiedasanehotadasusonacanibeduducibeda state siactanesinantehasa E 2 1 4 Other Applicable DOCUMENTS ccccccececeeeseeeeeeeeeeeueeeeeeeeeeeeseeeeaeeeeeeeeessaaaaeees 2 1 5 Downloading Manuals ccccseeeececeeeeeeceeeeeesneeeeeeeeaeeesseeeeeseaseeesseeeessaneeesnaeeees 3 2 Safety 5 2 1 Mendea USE sessirnar E 5 2 2 General Safety Instructions cc ceeceeccceeeeceeeeeseceeeeeeeeeeeeeeeeeeeseaeeaeeeeeeeessaaaaeess 5 2 3 Organizational MEASUMES cccccsssseceeeceeeseceeecsaeeecececseaseeeeeeseaeeeeesseaseeeeesaaeeeess 6 3 Product Description 7 3 1 Features and Applications cccccsssccccsssececcesececceeseeecseseeeceagseeeseuseeessaseeessaaeees 7 3 2 MOCO OVGIVICW eesin anara e Ae EAE Er A E N 8 3 3 OCC TO Weiren a A E i E E a iea 9 3 3 1 OC crescent sacra os cca nes eereoese ansenc usando cies th daeneewaeeesndhaacacaecosacon 9 3 3 2 Product DELAI seisan N EAEE 10 3 3 0 PO OUGT AG WING aicinss a ateeaks esa drocet anc E E 11 3 4 SCODS Ol Delivery soseri niea E AE NE RAE NAERATA EE ERN 12 3 5 suitable GOMPOMNESNS renses en E EAA eiTe TEE NARAR 12
15. ance and tighten the screw with a torque of 1 1 Nm 3 Check that the load is affixed firmly N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 25 5 Installation I 5 5 Connecting the N 111 to the Controller 1 5 m 0 05 m 0 m Figure 13 Cabling diagram Prerequisites v You have mounted the linear actuator properly p 15 and have connected the protective earth conductor p 22 You have installed a suitable controller p 12 You have read and understood the user manual of the controller Connecting the N 111 to the controller 1 Connect the connector of the linear actuator to the corresponding socket of the controller see user manual of the controller 2 Secure the connection with the integrated screws against accidental disconnection 3 Eliminate or label resulting danger areas in accordance with the valid regulations and recommendations 26 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator 6 Start Up and Operation PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation ccccccccsssseseeeeeeeeeeeaeeeeseeeeeeessaaeeeeeeeees 27 Operating the N T Ti sca cepseesdceacausictessteiaenepatinetnaeissanecazset easasecienanteePsaeaeaecseauoetbeanateeeaas 29 LISS Har QU NE N 1T ecn Eee En 30 6 1 General Notes on Start Up and Operation Risk of electric shock if the protective earth conductor is not connected
16. anuals E 712 Digital Piezo Controller PZ195E User Manual PIMikroMove SM148E Software Manual 2 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator 1 About this Document PIEZO NANO POSITIONING WWW PI WS 1 5 Downloading Manuals INFORMATION lf a manual is missing or problems occur with downloading gt Contact our customer service department p 35 INFORMATION For some products e g Hexapod systems and electronics that are delivered with a CD access to the manuals is password protected The password is stored on the CD Availability of the manuals Password protected manuals FTP download directory Freely available manuals PI website gt Follow the corresponding instructions for downloading Downloading freely accessible manuals 1 Open the website http www pi portal ws 2 Click Downloads 3 Click the corresponding product category 4 Goto the corresponding product code The available manuals are displayed 5 Click the desired manual and save it on the hard disk of your PC or on a data storage medium Downloading password protected manuals 1 Insert the product CD in the PC drive 2 Switch to the Manuals directory on the CD 3 Inthe Manuals directory open the Release News file including releasenews in the file name 4 Find the user name and the password in the section User login for software download in the Release News 5 Open the FTP download directory fip pi ftp ws
17. ect to dimensions characteristics or other technical data gt f necessary contact our customer service department p 35 directly 3 3 Product View 3 3 1 Overview f er Figure 2 Linear actuators N 111 2A1 left and N 111 201 right N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 9 3 Product Description K l 3 3 2 Product Details Figure 3 Position of important elements top and bottom view of actuator case schematic components marked in color 1 Connection cable 2 Protective earth connection 3 Rod non rotating 4 Actuator case 5 Mounting plate 10 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator 3 Product Description PIEZO NANO POSITIONING WWW PI WS 3 3 3 Product Labeling Figure 4 Position and appearance of the product labels Position aeng Description TETEE 2 B Symbol for the protective earth conductor marks the protective earth connection of the N 111 p 22 3 N 111 2A1 Product name example the places after the point refer to the model 3 113055789 Serial number example individual for each N 111 Meaning of the places counting from left 1 internal information 2 and 3 manufacturing year 4 to 9 consecutive numbers Country of origin Germany Country of origin S WWW PIWS Manufacturer s address website IL Manufacturer s logo CE conformity mark N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 11 3 Product Description i
18. eees 38 102 Max m m Rallin S aen E E E EEEE 39 10 3 Mechanical Load Cap aGiy x cccensccnccedescxcuazsssvateaesonameiuacedeadesceseaeamerdnensesuetessoeands 40 MOA ANITA TAS ONS ara ce cusencctsncnsss E E E aus ecmencncuseumernseuiees 42 10 4 1 Sa Is E O a en ee eee ee eee 42 10 4 2 DEIT A or E E EA E E 43 TORS TPT AS SION ee R EA 44 10 5 1 PAM O r Er cance ssiceripaantie ounce este tnautien cine sibneineastaaaseationes 44 10 5 2 A D A E A lignans silecenyent detent E T 45 Old Equipment Disposal 47 EC Declaration of Conformity 49 PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual cccceceecceeeeeeeeeeseeeeeeeeeeenaaeeeeeeeees 1 Symbols and Typographic COnventions cccecccccccccceessesseeceeeeeeeeseeeeeeeeeeeessuaageeseeees 1 PIQUE CS eaaa tani yneeasdnaianaien Tuasereattatenyanaciuleaian 2 2 3 Other Applicable DOCUMENHS cccccceeceseeeseeeeeeeeeeaeeeeeceeeesseueeeseeeeeeeesseeeaeeeeeeeeeesaas Downloading Manuals cinneniactscadsdanssiszanddswsiehiehentacasaciadansanientdaneietssnannectananiedandienenisanelcass 1 1 Goal and Target Audience of this User Manual This manual contains information on the intended use of the N 111 lt assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of t
19. gure The ambient conditions do not exceed the ranges that are given in the specification for the N 111 see Technical Data p 37 gt When planning the application and installing the linear actuator take account of the space required for routing the cables without kinks and in accordance with regulations Length of the connection cable approx 1 5 m gt If necessary provide measures to limit or compensate for undesirable forces and torques example gravity compensation in the case of vertical mounting gt f possible perform a graphic simulation of the intended actuator motions with a mounted load or suitable calculations in order to identify possible collisions within the application gt If necessary implement suitable design or control related measures to avoid collisions during operation of the linear actuator Example Collisions of the load with the surface when the rod is moved inwards can be avoided by the following measures Spacers flat washers or sleeves between the rod and load Reduced thickness of the surface Limitation of the travel range in the PC software gt In accordance with legal regulations avoid or label danger areas that result from installation of the linear actuator and from use e g risk of crushing in the case of heavy moving loads fast actuator motions and or high drive torques 20 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator PIEZO NANO POSITIONING
20. he maximum permissible active and passive forces and the resulting torques that are allowed to act on the rod according to the specification p 37 INFORMATION For optimum repeatablity all components must be firmly affixed to each other Prerequisites v You have properly fastened the linear actuator according to the corresponding instructions p 21 v The linear actuator is not connected to the controller Tools and accessories M3 fastening screw with suitable length depth of the threaded hole 5 mm further dimensions see p 42 f necessary Spring washer s or M3 flat washer s Open end wrench AF 7 Suitable screwdriver hexagonal key or open end wrench for the fastening screw 24 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator PIEZO NANO POSITIONING WWW PI WS 5 Installation Affixing load to the N 111 Figure 12 Relevant components of the rod for affixing the load 1 Wrench flat of the rod 2 M3 threaded hole for affixing the load There is a further parallel wrench flat on the rod that is symmetrical to the threaded hole and at a distance of 7 mm from the wrench flat shown hidden in the above view 1 Attach the rod Apply the open end wrench to the wrench flats of the rod 2 Affix the load on the threaded hole in the rod of the linear actuator with the fastening screw and if necessary attached spacers safety washers or spring washers Screw in the screw until you feel a resist
21. he user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual A Dangerous situation If not avoided the dangerous situation will result in minor injury A gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 1 1 About this Document gt Ji INFORMATION Information for easier handling tricks tips etc Symbol Meaning Label 1 Action consisting of several steps whose sequential 2 order must be observed gt Action consisting of one or several steps whose sequential order is irrelevant E List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface Warning signs affixed to the product that refer to AN detailed information in this manual 1 3 Figures For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 1 4 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own m
22. inear Actuator PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 8 Relevant rod dimensions d Diameter of the rod 8 mm s Distance between rod end lower edge of the mounting plate with full use of the travel range 3 mm to 13 mm at center position 8 mm delivery state switching point for reference point switch in the N 111 2A1 x Motion axis of the rod You can obtain all dimensions of the linear actuator and relevant individual parts in the section Dimensions p 42 The intended use of the linear actuator requires a suitable installation environment gt Make sure that the following conditions are met Material and statics of the surface and the screw connections fastening screw hole system are designed so that the static and dynamic forces that occur can be safely and continuously managed Four M3 threaded holes and a feedthrough for the rod have been made in the surface The distances between the holes in the surface match the distances between the mounting holes of the linear actuator dimensions see p 42 The depth of each hole is adapted to the length of the screws so that the linear actuator can be completely screwed in N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 19 5 Installation gt Ji The position and size of the feedthrough for the rod prevent the rod from touching the surface after mounting position and dimensions of the rod see p 42 and above fi
23. ing PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 1 Unpack the N 111 with care 2 Compare the contents against the items covered by the contract and against the packing list 3 Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately 4 Keep all packaging materials in case the product needs to be returned N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 13 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter Providing a Suitable Installation ENVirOnMent ccccccseeeeceeeceeeeeeeeesaeeeeeeeesaaaeeeees 15 Mou un ng the NETII eseina ea i a SPSE o ems 21 Connecting the N 111 to the Protective Earth Conductor cccccseeeeeeeseeeeeeeeeeeaeees 22 Affixing the Load to the NET TT wecsisinsecescccdssdesncbonscsnchocanctabsaeanded veaasne ecebswessstsbul edecbdekenes 24 Connecting the N 111 to the Controller ccccccccccccccssseeeeeeeaeeseeeeseeeeeeeeeesaeeeeeeeasaaees 26 5 1 Providing a Suitable Installation Environment Installation recommendation The N 111 is intended for being screwed into a level surface a base body or a case referred to in general as surface in the following Alternatives for mounting holes see also the following figures Threaded holes in the surface Through holes in the surface The following instructions for preparing and carrying out the fastening refer
24. ins switched on to ensure temperature stability Before pulling out the connector of the N 111 e g before demounting e g before cleaning and transport of the N 111 and for modifications of the application Discharging the N 111 1 If you are working in closed loop operation Switch off the servo mode on the controller 2 Set the piezo voltage to 0 V on the controller 3 If you want to disconnect the N 111 from the controller f possible Switch off the controller Wait at least 10 seconds before disconnection 30 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance ccccccccceccecceccececcecceceeceecuceuceeceecauseeaeeaeseeseeeeeaesaees 31 deanna 1e RN 1A scaccegseetececcee cane aside en eoseds desesinParpeoecusaeaseeh a tsess eousned vsespocecease eeseaseas ae 31 7 1 General Notes on Maintenance NOTICE Damage due to improper maintenance The linear actuator can become misaligned as a result of improper maintenance The specifications can change as a result p 37 gt Only loosen screws according to the instructions in this manual 7 2 Cleaning the N 111 Prerequisites v You have discharged the piezo actuators of the N 111 p 30 v You have disconnected the N 111 from the controller Cleaning the N 111 gt Clean the surfaces of the N 111 with a cloth that is
25. nector from the controller during operation gt Discharge the linear actuator before pulling out the connector p 30 gt If possible Switch off the controller and wait at least 10 seconds before pulling out the connector NOTICE Heating up of the N 111 during operation The heat produced during operation of the N 111 can affect your application gt Install the N 111 so that your application is not affected by the dissipating heat NOTICE Uncontrolled oscillation Your application and the N 111 can be damaged by uncontrolled oscillations Uncontrolled oscillations can be identified by the fact that the linear actuator approaches the target position too slowly or too fast or does not keep it stable servo jitter If uncontrolled oscillations occur during the operation of the N 111 gt Immediately switch off the servo control system of the affected axis gt Check the settings of the servo control parameters 28 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation NOTICE Increased friction due to lateral forces on the rod Lateral forces that act on the rod of the N 111 increase the friction between the rod and internal drive components Increased friction impairs the motion of the rod and increases the wear of the drive components gt Avoid lateral forces on the rod of the N 111 INFORMATION For sending commands to the
26. nt A maximum step size and velocity are attained for horizontal mounting of linear actuator and load when no pull force acts in the direction of the rod axis Pull forces acting on the rod e g gravity in the case of vertical mounting or in relation to the horizontal line inclined mounting of the system can support the rod motion and cause the velocity to increase further area left of point A On the contrary the linear actuator applies the maximum active force to compensate for the maximum permissible load point B In this state the velocity drops to 0 In the currentless state of the linear actuator the rod is clamped holding force generated by the preloaded piezo assemblies Consequently the position of a coupled load is held with a permissible load If the holding force is overcompensated by an impermissibly high load the clamping effect of the piezo assemblies on the rod is lost slippage point C Compared to the velocity analog conditions result for the step sizes in normal operation see graph range to the left of B N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 41 10 Technical Data Pp I 10 4 Dimensions 10 4 1 N 111 201 Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 16 N 111 201 dimensions rod at center position 42 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 4 2 N 111
27. on 22 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 11 Mounting of protective earth connection schematic M4 screw Toothed washer Flat washer Cable lug Oa A NS linear actuator case with protective earth connection M4 threaded hole and protective earth conductor symbol 6 Protective earth conductor 1 If necessary fasten a suitable cable lug to the protective earth conductor 2 Remove the screw the toothed washers and flat washers from the package of the screw set 3 As shown in the above figure fasten one flat washer and one toothed washer each above and below the protective earth conductor or its cable lug with the screw on the protective earth connection of the linear actuator position of the protective earth connection on the linear actuator see figure above 4 Tighten the screw with a torque of 1 2 Nm to 1 5 Nm 5 Make sure that the protective earth conductor of the linear actuator is properly connected with the existing protective earth system within your application at all times N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 23 5 Installation gt Ji 5 4 Affixing the Load to the N 111 NOTICE Impermissibly high load on the linear actuator Impermissibly high loads inhibit the motion of the rod and can damage or destroy the linear actuator gt With respect to mass and fastening type of the load observe t
28. orce Fp 50 N to 50 N Lateral force F 5Nto5N Torque M in the direction of the rod axis 0 2 Nm to 0 2 Nm Torque M generated by lateral force radial not shown 0 15 Nm to 0 15 Nm The following figure shows the directions of acting forces and torques as examples Depending on the orientation of the setup effects of gravity must be included in the calculation Fr Fp Figure 14 Forces and torques potentially affecting the rod schematic F Active force direction for forward motion of the rod or Fy Holding force when the rod is at rest F Force generated by load positioning or holding F Lateral force M Torque e g in the case of load mounting dashed direction of action of the causal force 40 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator PIEZO NANO POSITIONING WWW PI WS 10 Technical Data Velocities and step sizes when the drive is loaded Figure 15 Velocity v as a function of the active force F qualitative F Active force v Velocity of the rod Special conditions A No load B Stop C Slippage With increasing mass of the load and thus the active force to be generated the achievable step size of the drive elements and thus also the maximum velocity of the rod decrease see explanations of the operation of the NEXLINE drive in the manual of the controller The relationships are qualitatively shown in the above diagram In the unloaded state poi
29. per use can result in personal injury and or damage to the N 111 gt Only use the N 111 for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the N 111 N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 5 2 Safety PI 2 3 Organizational Measures User manual gt Always keep this user manual available by the N 111 The latest versions of the user manuals are available for download p 3 on our website Add all information given by the manufacturer to the user manual for example supplements or Technical Notes If you pass the N 111 on to other users also turn over this user manual as well as other relevant information provided by the manufacturer Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage Only install and operate the N 111 after having read and understood this user manual Personnel qualification The N 111 may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Featu
30. res and Applications ccccccccccssececeseeeceeeeeseececeeecessaeeeceeeeseusesseueesseeeeseeeeesaaees 7 NWIOG Cl OV Ci CW ge oceerceac tice ceenecsceetctutt vancaeceene aS 8 PECOU CT VIW acti ncaeteenaaiob a E E S 9 SCODE Ol SCN O e E 12 Suitable Controllers cccccccseecccceeseceeceseeeceeeeeceeeceeseeeceeseueeeesseeeeesseeeesseeeeeseeeeeeeeas 12 Only N 111 2A1 Technical Features for Closed Loop Operation cccceceeees 12 3 1 Features and Applications Travel range 10 mm High push and holding forces 50 N 70 N High position resolution PiezoWalk principle Self locking thus no holding currents and no heat generation at rest Non magnetic function principle Can also be used in environments with Clean room requirements Strong magnetic fields Strong UV radiation Vacuum modified products up to 0 1 hPa on request The N 111 NEXLINE OEM linear actuator is a compact drive for nanopositioning technology The feed is generated by coordinated shearing and clamping motions of strongly preloaded piezo elements that are coupled to a rod PiezoWalk principle In this way NEXLINE drives combine relatively long travel ranges with the nanometer precision of piezo actuators The N 111 2A1 is equipped with a linear encoder for direct measurement of the rod position The resolution here is 5 nm over the entire travel range closed loop operation In highly dynamic
31. to an installation with threaded holes N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 15 5 Installation I gt If you use other designs proceed correspondingly A Me Figure 5 Recommended fastening on the surface cross sectional drawing only one screw is screwed in for better representation Surface Mounting plate of the linear actuator Counterbore Through hole for M3 in the mounting plate of the linear actuator M3 threaded hole in the surface Fastening screw Cylinder head M3 ISO 4762 DBD a ARK DW HS m 16 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 6 Example of alternative to recommended fastening with through hole in the surface and nut Surface Mounting plate of the linear actuator Counterbore Through hole for M3 in t he mounting plate of the linear actuator Through hole for M3 in the surface Fastening screw Cylinder head M3 ISO 4762 M3 nut N D9 OG KR HS m N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 17 5 Installation PP I Providing a suitable installation environment 4 Figure 7 Linear actuator on surface schematic relevant components Surface section M3 threaded hole Case of the linear actuator Feedthrough for rod here hole 10 mm coaxial to the motion axis of the rod Om A NH asa Rod of the linear actuator 18 Version 1 0 0 MP142E N 111 NEXLINE L
32. to info pi ws gt If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present gt f possible Take photographs or make videos of your system that can be sent to our customer service department if requested The latest versions of the user manuals are available for download p 3 on our website N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 35 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data In this Chapter 10 Technical Data POS CHIC A MOINS pease seateseak oenieeeecseessiece E E 37 IVA IY Fe ING S en stsniaunictrinaccauernsont tadnoncantnausinnWeheasanstusestdymaneti anhalt emer niannaneeleinasoerens 39 Mechanical Load Capacity ccccccssssececcceeseeceesceeeseceeesseaseceeeeeeaeeeeesseeeeeeesseaeeeeeseaas 40 PANETTA S ONS spect ieseshcareaey sles E E E 42 PIN ASSIONMEN diinisiasi e aAa REEERE i eCa EE AA Si EE EEEa 44 10 1 Specifications 10 1 1 Data Table N 111 201 Active axes X Motion and positioning Travel range 10 Step size in step mode 10 nm to 7 um Travel range in analog mode 2 Integrated sensor Open loop resolution 0 025 Closed loop resolution Velocity 10 duty cycle full step 1 0 mode Velocity 100 duty cycle full step 0 6
33. ude 2000 m Relative humidity Highest relative humidity 80 for temperatures to 31 C non condensing Decreasing linearly to 50 relative humidity at 40 C non condensing Operating temperature 40 C to 80 C Storage temperature 40 C to 80 C Transport temperature 40 C to 80 C Overvoltage category in acc with EN 60664 1 2007 VDE 0110 1 ee Protection class acc to EN 61140 VDE 0140 1 Version 1 0 0 MP142E N 111 NEXLINE Linear Actuator 10 Technical Data PIEZO NANO POSITIONING WWW PI WS Degree of pollution acc to EN 60664 1 2007 VDE 0110 1 Degree of protection acc to IEC 60529 10 2 Maximum Ratings The N 111 is designed for the following maximum ratings Maximum Operating Maximum operating Maximum power frequency or consumption velocity unloaded A Analog mode 250 V 250 V 700 Hz 1 65 W Full step 600 um s 2 6 W mode Nanostep 400 um s ping mode for dynamic continuous operation not recommended at full amplitude and a max frequency of 250 Hz N 111 NEXLINE Linear Actuator MP142E Version 1 0 0 39 10 Technical Data gt Ji 10 3 Mechanical Load Capacity Maximum values for torque and forces Negative values in the table correspond to a reversal of the effective direction according to the following figure Parameter Permissible Values Passive force holding force linear actuator currentless F 70 N to 70 N Active force drive f
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