M210_01 Operator
Contents
1. 1 3 5 1 Be Bee A cass cess day k kak dya ELA Ea dik 3 5 1 3 5 2 TL w l e Bet KN 3 5 2 Cil AU Alarm EEN 3 6 1 3 6 1 e UE e EE 3 6 1 3 6 2 Touchscreen n iaHHHH mm HHHH 3 6 1 3 6 3 NEE 3 6 2 OPERATOR MANUAL II 2 AMTECH k TEMPRESS PREFACE Preface This set of manuals explains how to operate a Horizontal Diffusion LPCVD furnace Refer to the Touchscreen reference manual M440 01 or the TSC 2 reference manual M450 03 for a full description of all operating screens For information about processing refer to the Process Manual M220 xxx 02 The Tempress Horizontal Diffusion Furnaces are fully described in the reference manuals M300 series Tempress documentation set The complete Tempress documentation set includes N Safety manual H Operator manual H Reference manuals 1 Loadstation 2 Furnace 3 Gas cabinet 4 Main Power cabinet 5 DPC 6 DTC 7 Touchscreen 8 TSC 2 optional SECS GEM H Vendor documentation Delivery s on request N Desired vendor documentation e Sic and Quartz drawings e RS422 protocol DPC DTCO OPERATOR MANUAL III 2 AMTECH k TEMPRESS PREFACE User Definition It is strongly recommended that all users first read this manual before starting any procedure To produce an accessible manual suiting on various responsibilities Tempress defines the following users Operator The operator is handling the process from loading until unloading of the wafers2. 60204 1 especially EN 418 Pressing an EMO button turns off all power to the system except to the fans on top of the furnace This prevents fire hazard as a result of high heat concentration in the furnace cabinet Also those parts that are connected to a UPS facility remain operational Press the EMO button when a person is in danger when there is a fire a water leak or any other event that could be hazardous to life 2 2 Alarm Signals Alarms and alerts generated by tube controls are presented in several ways e Buzzer LED H Touch screen D Light tower H TSC II 2 2 1 Buzzer LED Visible and audible alarm signals are generated by the DPC DTC and the DMC The visible signals will be presented with a LED located below the buzzer position as shown in Figure 1 1 Each tube process is represented by one LED and buzzer combination 2 2 2 Touchscreen The visible alarm signals will be presented on the touchscreen bottom line Alarms on the Touchscreen are always in combination with an audible signal Touching the screen deactivates the audible signal A new Alarm or alert will not activate the audible signal again before current alarm has Lg been solved OPERATOR MANUAL 2 2 m AMTECH TEMPRESS SAFETY 2 2 3 Light tower Alarms generated by the DPC DTC and DMC will be made visible by three colors Each color of the light tower represents particular circumstances Green represents safe operation
3. Toxic Material The process engineer responsible for all process related activities has to inform the operator about the hazards of the process 2 5 Safety measures Safety measures are indicated in the appropriate procedures OPERATOR MANUAL 2 5 AMTECH N TEMPRESS OPERATOR INSTRUCTION 3 Operator Instructions This document describes the various procedures required for an operator The procedures describe how to load and unload wafers how to select a new process recipe how to start continue a process recipe how to stop the timer of a running process recipe how to modify Variable Commands when available and how to abort a running process recipe 3 1 Load or Unload process wafers Loading and unloading process wafers on the paddle is required before and after each process run 3 1 1 Load process wafers e Place the wafers on the wafer carriers depending on the situation with vacuum tweezers or a wafer transfer system e Pick up wafer carriers with a pick up fork or automated loading tool e Place the wafer carriers around the center of flatzone as indicated on the loadstation 3 1 2 Unload wafers CAUTION Wafers and paddle are hot e Allow the wafers to cool down e Pick up wafer carriers with a pick up fork or automated loading tool Amtech Systems S300 e Remove the wafers from the wafer carriers depending on the situation with vacuum tweezers or a wafer transfer system OPERA
4. UTE AMTECH MPRESS SAFETY l For a functional description of the light tower signals see table 1 Signal Mode Desctiption Green ON Operational No warnings or messages OFF Not operational Yellow BLINKING N pressure switch No Nz gas flow detected Air pressure switch No Air flow detected Torch temp 750 The torch temperature has to exceed 750 C Torch Flame failure There is no flame the Ha valve will be closed Torch H O ratio The H2 O gt z ratio exceeds the safety value Torch shell The skin temperature of the torch is too high Temperature sensor Temperature powerpack is powerpack too high Bubbler temp Bubbler temp is too high Bubbler level Fluid level is too low O2 low Oz flow is too low Exhaust Low High Exhaust flow out of limits Limit alarm only if Actual value is out of limits programmed in the process recipe Wait for operator only if Operator action is required programmed in the process to continue recipe Process is finished Boat manual Servo driver is in manual mode Maintenance mode Maintenance mode is activated OFF No alarm and or alert Red ON Excess temperature Tube is overheated controller has been activated Leakage detection A gas or water leak has been detected OFF No alarm and or alert No actual dangerous or hazardous situation Table 1 Light tower signal description OPERATOR MANUAL 2 4 t AMTECH 2 4
5. is in Step 0 OPERATOR MANUAL 3 2 2 TEMPRESS OPERATOR INSTRUCTION 3 2 2 TSC 2 1 select the desired tube from the pull down menu or from the Overview screen 2 select Operations to access the operations screen 3 Select the desired process recipe from the pull down menu 4 Press Yes to confirm the question Are you sure to select another process recipe Note selecting another process recipe is only possible if the current process recipe is in Step 0 OPERATOR MANUAL 3 2 3 AMTECH TEMPRESS OPERATOR INSTRUCTION 3 3 Start Continue a new process recipe Two different situations require the Start command The first situation is starting a newly selected process recipe so it starts running from Step 0 The second situation is starting a process recipe that has been stopped or is waiting for an Operator instruction 3 3 1 Touchscreen 1 return to the Main Menu by pressing ESC until the following screen appears 2 press 4 to access Tube Control System Control Certif ications Process Recipes Tube Control Monitor Enter choice 3 press 2 to access Start Stop Process Recipe PHO 6 E SiS Graphic Process Control Variable Process Command Start Stop Process Recipe Select a Process Recipe Abort Process Recipe Assign Control Zones to Paddle Inputs Clear Alarms Edit Lot Id Enter c
6. Operator Manual Tempress Systems Inc Operator manual M210_01 January 2004 This page intentionally left blank et AMTECH TU TEMPRESS I TABLE OF CONTENTS Table of contents PISTA E III Tempress documentation set III User Definitions ET IV Notes Cautions and Warnings ER V Contents description EE VI REVISION HIStory ne seinen e A AE Ye E deme VI 1 lntroductioan EE 1 1 ki Generalka e aaa a a a a aa i N 1 1 1 2 Operator area description eee 1 2 PAEST re y EE EE T 2 2 2 1 Emergency Off EMO E E kk kk kk kk KH 2 2 2 2 PAAR OIQM AIS ees 2 2 2 2 1 Buzzer AR EDs conten yk Pane kmna pek n EEE HEDRE K S RE KAR 2 2 2 2 2 Ee E 2 2 2 2 3 Light towe EE 2 3 2 2 4 TSC Alarm Menu EE 2 3 2 3 Light tower signal description optional 2 3 ZA F xi6 Mat EEN 2 5 2 5 Safety measures eee 2 5 3 Operator ln Str U C OTIS ll KEEN kk kk kk KRA 2 5 1 3 1 Load or Unload process wafers lhK i n 3 1 1 3 1 1 Load process water 3 1 1 3 1 2 Bled e ae canikan kk 3 1 1 3 2 Selecting a new process rechte 3 2 1 3 2 1 t AE 3 2 1 3 2 2 BEE 3 2 3 OPERATOR MANUAL as AMTECH TU TEMPRESS l TABLE OF CONTENTS 3 3 3 4 3 5 3 6 Start Continue a new process recipe eee 3 3 1 3 3 1 Ee ien DT EE 3 3 1 3 3 2 JEE 3 3 2 Stop a running process recipe eee eee 3 4 1 3 4 1 Touchscreen EE 3 4 1 3 4 2 E 3 4 2 Abort a running process rechte 3 5
7. TOR MANUAL 3 1 1 OPERATOR INSTRUCTION 3 2 Selecting a new process recipe A new process recipe needs to be selected so the new instructions can be executed A new process recipe can only be selected if the current process recipe is in Step 0 3 2 1 Touchscreen 1 return to the Main Menu by pressing ESC until the following screen appears 2 press 4 to access Tube control System Control Certif ications Process Recipes Tube Control Monitor Enter choice 3 press 6 to Select a Process PR BG EB XS 9 Recipes Graphic Process Control Start Stop Process Recipe Abort Process Recipe Clear Alarms Enter choice or press Variable Process Command Select a Process Recipe fssign Control Zones to Paddle Inputs Edit Lot Id 4 select the desired process recipe by entering its number Li H S NO NITRIDE1 NITRIDEZ SELECT PROCESS recipe J Sure to SELECT PROCESS recipe YES NO 20 mar 2003 09 40 42 OPERATOR MANUAL 3 2 1 e AMTECH TEMPRESS OPERATOR INSTRUCTION 5 press Yes to confirm the PROCESS question Sure to SELECT PROCESS recipe Yes No i Mine 6 STAND BY Hu NITRIDE1 NITRIDEZ SELECT PROCESS recipe Sure to SELECT PROCESS recipe YES NO 20 mar 2003 09 40 42 Note selecting another process recipe is only possible if the current process recipe
8. Therefore the operator needs to select a recipe put the wafers on the boat fill in Lot ID Start the process monitor the progress and unload wafers Process engineer The process engineer is a qualified chemical engineer who is responsible for the process recipes and their results The process engineer writes tests and releases new process recipes Service or Maintenance engineer The maintenance engineer is a qualified electrician or mechanic who is responsible for a proper functioning system in accordance to its designated purpose A Tempress qualified service engineer will perform the first installation OPERATOR MANUAL IV U AMTECH TEMPRESS PREFACE Notes Cautions and Warnings Notes Cautions and Warnings appear throughout this manual where extra attention is required to a particular safety item Three levels can be distinguished NOTE Notes alert to pay attention to items or procedures of special importance e CAUTION Cautions alert for a potentially hazardous situation that may result in minor ot moderate injuries Cautions can also alert for potential equipment and or product damage WARNING Warnings alert for conditions that may result in permanent and or lethal injuries OPERATOR MANUAL N AMTECH Ba TEMPRESS PREFACE Contents description This manual is divided into the following sections and appendices Section 1 Introduction Provides an overvie
9. afers several loader types can be implemented including the default inline loader the Amtech Atmoscan and the backmounted softlander To prevent particles on the wafers during the loading process a constant horizontal laminar flow is created from the loadstation into the cleanroom The loadstation is powered by 220V and has an illuminated On Off switch for the fans and the lights The remote control cabinet in the loadstation contains TFT Touchscreens one for each tube These supply the user interface for communication with the Digital System Controllers Digital Process Controller Digital Temperature Controller and Digital Motion Controller OPERATOR MANUAL 1 2 ir AMTECH TEMPRESS SAFETY 2 Safety This section contains a brief description of the safety features of a Tempress Horizontal Diffusion System for the operator Operators must have a general knowledge of the technology involved in diffusion systems They should understand safety practices outlined in this manual The descriptions contained in this user manual are general in nature or generic The actual furnace may differ in minor detail from the furnace described in this manual because of customer specific requirements or modifications Please refer to the Tempress Safety manual for a complete description of available safety features 2 1 Emergency Off EMO Emergency Off EMO buttons are located around the system at accessible locations according to EN
10. al condition Yellow represents warnings and alerts Red represents alarms See section 2 3 for a full description 2 2 4 TSC Alarm menu Activating the alarm menu gives an overview of all active and passed Alam alarms during the process In case of an active alarm the Alarm button start flashing on and off 2 3 Light tower signal description optional Two light towers one on top of the loadstation in the cleanroom and one on top of the furnace in the greyroom are Red installed for fast anticipation on the status of the production process This section describes the function of each light and its relation to the tube status A light tower is default comprised of 3 lights from top to bottom RED YELLOW and GREEN Yellow Green The green and red light can indicate 2 signals 1 OFF 2 ON The yellow light can indicate 2 signals 1 OFF 2 BLINK Figure 2 1 Default light tower configuration The light tower is controlled by a tower signal PLC that receives its commands from the various controllers among others DPC DTC DMC Excess temperature controller gas detection system alarm and the TSC Host control In case the EMO switch is activated or a power failure occurs for more than 4 seconds the power supply to the furnace will stop and also the light tower will be off The tower signal PLC is programmed by Tempress Systems Inc and is not adjustable by customers OPERATOR MANUAL 2 3 H
11. art for example N alarm signal a continuous beeeeeeeeeeeeep to alert for an alarm situation 3 6 1 Required action e Operator alert signals beep beep beep require the operator to press Start to have the furnace proceed to the next step in the process e Alarm situation signals beeeeeeeeeeep require the operator to alert the responsible person s immediately 3 6 2 Touchscreen 1 touch the touchscreen to silence the buzzer 2 read the alarm message in the bottom line of the screen 3 take the appropriate action as c n BB NZ TRANS TEMP TLC described in section 3 6 1 Boo D N2 TRANS D_OUT 6 Alarm TEMPERATURE ZONE 3 POWER 05 ju 1 2002 11 26 43 OPERATOR MANUAL 3 6 1 La N K AMTECH BW laz B k Gannas OPERATOR INSTRUCTION 3 6 3 TSC 2 1 the overview screen gives an instant view of which tubes are in alarm in RED 2 select the desired tube from the pulldown menu or from the Overview screen 4 select the Alarm screen ISTACK 01 A3 NITRIDE 3 read the alarm message s 4 take the appropriate action as described in section 3 6 1 OPERATOR MANUAL 3 6 2
12. be Control System Control Certif ications Process Recipes Tube Control Monitor Enter choice 3 press 3 to access Abort Process Recipe PE OCE s S c ON TROL Graphic Process Control Variable Process Command Start Stop Process Recipe J gt Select a Process Recipe Abort Process Recipe Assign Control Zones to Paddle Inputs Clear Alarms Edit Lot Id Enter choice or press to exit 4 press Yes to confirm the ABORT PROCESS question Are you sure you want to abort 5 press Yes again to activate the 0 abort command OPERATOR MANUAL 3 5 1 e AMTECH TU TEMPRESS TEMPRESS OPERATOR INSTRUCTION 3 5 2 TSC 2 1 select the desired tube from the pull down menu or from the Overview screen 2 select Operations to access the operations screen 3 Press Abort to abort the selected process recipe 4 Press Yes to confirm the question Sure to abort OPERATOR MANUAL 3 5 2 N AMTECH TEMPRESS OPERATOR INSTRUCTION 3 6 Clear Alarms Visible and audible Alarms signals are generated by the DPC and DTC The visible alarms will be presented both on the touchscreen and the TSC 2 computer s the audible alarms are available on the touchscreen only Two different audible alarm signals are available e operator alert an intermittent beep beep beep to alert an operator for action press St
13. cipe System Control Certif ications Process Recipes Tube Control Monitor Enter choice L Y EC Graphic Process Control Start Stop Process Recipe Abort Process Recipe Clear Alarms Enter choice or press Variable Process Command Select a Process Recipe Assign Control Zones to Paddle Inputs Edit Lot Id STRET a IHE PROCESS N1 NITRIDE1 00 30 00 0 NO STAND BY CUSTOMER 1 CUSTOMER 1 CUSTOMER 1 CUSTOMER 2 CUSTOMER 2 CUSTOMER 2 Enter START PROCESS recipe or ESCAPE to exit 18 apr 2003 13 35 39 OPERATOR MANUAL 3 4 1 e AMTECH 79 TEMPRESS OPERATOR INSTRUCTION 3 4 2 TSC 2 1 select the desired tube from the pull down menu or from the Overview screen 2 select Operations to access the operations screen 3 Press Pause to stop the selected process recipe from the current step STACK 01 A3 NITRIDE OPERATOR MANUAL 3 4 2 AMTECH TEMPRESS OPERATOR INSTRUCTION 3 5 Abort a running process recipe A manual Abort instruction may be required if the operator foresees a dangerous situation ot a continuous looped process recipe needs to be reset to Step 0 to allow selection of another process recipe 3 5 1 Touchscreen 1 return to the Main Menu by pressing ESC until the following screen appears 2 press 4 to access Tu
14. d according to the position of the furnace relative to an operator Usually the system contains mote than 1 tube Based on the number and size of tubes the system is referred to as a 2 3 or 4 stack Figure 1 1 is an example of a 4 stack system allowing up to 4 different processes at any time The tubes are numbered from 1 to 4 with tube number 1 at the top and tube 4 at the bottom All tubes operate fully independently Load Station Furnace Gas Cabinet Main Power Cabinet TL LI B i EK dk LE LI L SC L 2 TUBE 1 Z a ji e m ssc TUBE 2 pS Z Z D n Kl Ze d TUBE 3 Z E TUBE 4 Z J Eza Ss EBI ES a I x z Figure 1 1 Schematic view of a right handed 4 stack Diffusion System OPERATOR MANUAL 1 1 AMTECH TEMPRESS INTRODUCTION 1 2 Operator area description HOT SURFACE Buzzer LED Light Fan Switch Wafers Touchscreen MOVING PART Figure 1 2 Loadstation The operator area is limited to the loadstation only Figure 1 2 shows the relevant items The Loadstation part of a Tempress System should be placed in the cleanroom The Furnace and Gas cabinet can optionally be placed in the greyroom To load w
15. hoice or press to exit 4 press Start to start continue the START 7 STOP PROCESS selected process recipe E m 00 30 00 H III ROCES e ruming NO CUSTOMER 1 0 CUSTOMER 1 CUSTOMER 1 CUSTOMER 2 CUSTOMER 2 CUSTOMER 2 Enter START PROCESS recipe or ESCAPE to exit 18 apr 2003 13 35 39 OPERATOR MANUAL 3 3 1 TU TEMPRESS TEMPRESS OPERATOR INSTRUCTION 3 3 2 TSC 2 1 select the desired tube from the pull down menu or from the Overview screen 2 select Operations to access the operations screen 3 press Start to start the selected ounce reva ld process recipe from Step 0 4 press Continue to start a process recipe that has been stopped or is waiting for an Operator instruction 5 press Yes to confirm the question Do you want to start OPERATOR MANUAL 3 3 2 AMTECH 9 TEMPRESS OPERATOR INSTRUCTION 3 4 Stop a running process recipe Stopping a running process recipe may be required to temporarily stop the process recipe When activated the Stop command will stop the timer while all given commands are maintained 3 4 1 Touchscreen 1 return to the Main Menu by pressing ESC until the following screen appears 2 press 4 to access Tube Control 3 press 2 to access Start Stop Process Recipe 4 press Stop to stop the selected process re
16. w of the Tempress Systems Inc Horizontal furnace Section 2 Safety Describes the safety components and functions It describes all measures that are required to provide a safe way of working Section 3 Operator Instructions Describes all procedures that are required for the operator Revision History This manual is revision 1 of the Operator Manual and is intended to explain the required operator procedures The function and screens it describes are based on the following software releases N TSC 2 version 6 3 17 02 2003 e DPC 2 1 03 17 02 2003 e DTC 2 F 02 17 02 2003 e Touchscreen 2 1 05 17 02 2003 Por minor software and hardware changes addendum to this manual will be available For major changes a new revision will be available For information or other questions please contact Tempress Systems Inc OPERATOR MANUAL VI v AMTECH WW TEMPRESS INTRODUCTION 1 Introduction 1 1 General The horizontal furnaces of Tempress Systems Inc are developed according to the European directives for Machinery 98 37 EC Low Voltage 73 23 EC and EMC 89 336 EEC The Tempress Diffusion system is a modular horizontal furnace designed to process silicon wafers as part of the manufacturing technology of semiconductor optical MEMS and solar devices Figure 1 1 shows an example of a standard L shape diffusion system with 4 process tubes shown without the partition of a cleanroom wall It is a right handed system define
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