Ana/Dig MFC Manual_upd04_c.qrk
Contents
1. Vacuum are calibrated with the MFC s outlet exhausting to Vacuum Standard Temperature and Pressure 0 C and 760 mm Hg Calibration Traceability National Institute of Standards and Technology N I S T Manufacturing Environment Assembled Calibrated Tested and Packaged in Class 100 Cleanroom Environment Purge Capability Full purge capability with 1 slm purge minimum depends on gas density and pressure OPTIONAL FEATURES Options are set at the factory unless otherwise specified 3 1 3 2 Auto Shut off Option With the Auto Shut off option a setpoint command of less than 2 0 1 VDC closes the MFC control valve Since an MFC valve is not a positive shutoff valve a shutoff valve in series with the MFC may be needed Users of digital MFCs can disable or increase the Auto Shutoff option to any value up to a maximum of 10 of the full scale operational range using the MultiFlo Virtual Interface Refer to the MultiFlo Virtual Interface User s Manual Response Time Options Fast Sec to a setpoint command of 20 100 per SEMI E17 91 Soft Start Ramping gradually 5 second linear ramp Soft start options 4 6 6 10 10 15 20 30 or 40 60 seconds This option is configured in the factory for analog MFCs and cannot be adjusted by the user Users of digital MFCs can select the Response Time to be 0 20 seconds using the MultiFlo Virtual Interface Refer to the Details section of the MultiFlo Vi2. valve open or purge input activated Use the tool software to verify this Is the setpoint correct for the required flow Use the tool software to verify this FLOW UNABLE TO REACH A SETPOINT When the setpoint is raised beyond this point the MFC remains at some value lower than the setpoint Is the gas inlet outlet pressure differential sufficient If the differential is too low the MFC valve voltage or drive will be at its maximum value when the setpoint is raised above the point where the flow will increase Adjust regulator to the proper operating pressure Verify that the pressure is correct for this gas and range typically 25 psia Is the MFC calibrated for the gas flowing If not replace the MFC with properly calibrated unit WHAT TO DO Verify that the pressure is correct for this gas and range typically 25 psia Check the MFC label Run Flow Verify 199 001 0006 REV F 4 05 24 NO GAS FLOW CONTROL BELOW SOME SETPOINT When the setpoint is lowered below this point the MFC signal remains at some value higher than the setpoint WHAT TO DO Is the gas inlet outlet pressure differential too high If the differential is too high MFC valve voltage or drive will be at its minimum value when the setpoint is lowered below the point where the flow will decrease Adjust the regulator to the proper operating pressure Verify that the pressure is correct for
3. D 85622 Weissenfeld Germany Tel 49 89 9049 0381 Fax 49 89 9049 0382 France Switzerland Spain amp Portugal Sales Celerity Tel 33 474 182 544 Fax 33 474 182 543 Mobile 33 689 872 027 Sales dmeneghel celerity net 199 001 0006 REV F 4 05 16 6 Manufacturing Sales and Service Locations Benelux Sales Celerity Tel 32 5531 0240 Fax 32 5531 0244 Mobile 32 474 905 007 Sales mlambelin celerity net Israel Sales AVBA Engineers Ltd Ramat Gabriel Industrial Park P O Box 690 Migdal Haemek 10500 Israel Tel 972 66 442575 Fax 972 66 442577 Italy Sales Microcontrol Electronic s r l Via Guiba 11 20132 Milano Italy Tel 39 02 28314420 Fax 39 02 2871777 Norway amp Iceland Sales NorGruppen As Civ Ing Helge Ingeberg AS Gamle Drammensvei 94 Lierporten PO Box 100 N 3420 Lierskogen Norway Tel 47 32 8535 50 Fax 47 32 8535 55 Russia Sales Cheliabinska str 11 2 Moscow 105568 Russia Tel amp Fax 7 095 308 0523 South Africa Sales Unit Instruments S A 29 Marina Crescent Panorama Parow 7500 Cape Town South Africa Tel amp Fax 27 21 923894 ASIA China Shanghai Sales and Service SCH Electronics Shanghai Co Ltd No 150 Cailun Road Zhangjiang Industrial Park Pudong New Aera Shanghai China 201203 Tel 86 21 3895 0181 Fax 86 21 5895 2569 China Tianjin Sales and Service Asian Power Technology Co Ltd Teda Group Heda In
4. 16 7 2 Operation 2005 Celerity Inc Start of Auto Zero Sequence The Auto Zero function is activated by a Valve Off signal from pin J on the MFC This signal can be triggered by either manual shutoff or the Auto Shutoff Start Delay When the off signal is received the Auto Zero initiates a 90 second flow stabilization delay Operating Limits Following the 90 second delay the Auto Zero continuously compares the output of the MFC meter with DC Common and makes any necessary alignment of the MFC meter by adjusting a digital potentiometer This comparison adjustment process typically requires 30 60 seconds for completion Operating Limits If the variation between the MFC meter output and DC Common is greater than 4 to 5 the Auto Zero will not zero but will display the differential between the true zero and the 4 to 5 limit This difference and the Auto Zero alarm indicates the need to check calibration or service of the MFC Auto Zero Hold When the valve is turned on to resume flow the Auto Zero reference is stored in memory and maintained through subsequent operations until the MFC is turned off again Any time the MFC is unplugged the Auto Zero procedure should be re initiated before use in process control System Standby Most systems are programmed to shutoff the MFC during Standby conditions This activates the auto zero continuously until the process is turned on In addition most systems return to standby if th
5. If you wish to replace an MFC call Celerity with the serial number of the MFC you wish to replace Celerity will determine the part number for the equivalent MFC with the same options 7 INSTALLATION 7 1 7 2 7 3 Unpacking Verify that the controller was not damaged in shipment Notify the shipper immediately if you find a problem All products returned must have a Return Material Authorization number RMA see section 12 8 issued prior to return shipment to the factory NOTE Do not remove the shipping caps covering the inlet and outlet fittings until immediately prior to the actual MFC installation in the tool Purging before Installing the MFC Before installing the MFC completely purge the gas lines with nitrogen or argon The purge gas must be moisture and oxygen free to less than 100 ppb The preferable method is to cycle purge the line for a period of two to four hours depending on the cleanliness required by the process and the reactiveness of the process gas Cycle purging consists of evacuating to a low pressure adequate to induce outgassing and then purging to remove adhered moisture and oxygen The cycle is repeated several times to complete the cleaning Alternatively eight to twenty four hours of purging alone may be used if vacuum is not available Positioning the Controller The controller must be positioned so that the gas flow is in the direction of the arrow stamped on the controller base It is designe
6. contamination analysis If a product is being returned to Celerity it must include your company name contact Contaminination Disclosure Form and RMA Call Unit for an RMA prior to shipping 12 4 Un Packaging When the MFC is received at a service or calibration facility the bag should be opened only within a cleanroom area Class 1000 or better 12 5 Cleaning Cleaning of the MFCs should be done with semiconductor grade chemicals Assembly calibration response timing and performance testing is to be accomplished in a Class 100 or better environment 12 6 Shipping Once the unit has been cleaned serviced and or recalibrated it must be hardcapped and bagged for return Include with the removal documentation any documentation relevant to the calibration and service that was performed 2005 Celerity Inc 199 001 0006 REV F 4 05 12 12 7 Shipping Costs Celerity prepays outgoing freight charges when any part of the service is performed under warranty All domestic shipments are sent via UPS ground transport However if the unit has been returned collect to Celerity the costs are added to the repair invoice Import export charges foreign shipping charges or special customer specified handling will be paid for by the customer 12 8 Returned Material Authorizations RMA All product returns must accompany a RMA number for proper material handling within Celerity Contact customer service at 714 921 2640 for a Returned Ma
7. o AG hee tow Eder ideas E SQUE TE eee Aes 5 PRODUCT DRAWINGS 2065 cari eek tae ERI ERR Sem RE bee Cewek SE enc 6 PRODUCT SPECIFICATIONS o ooocoooo es 6 1 MEC side can label g40 2 044 008 60dewd RERO Dx EY de be bee rS eh Perd 62 Traceability PE ETC TERT Z INSTALLATION coco xo RR RE E REEL EROS RE RE Rex ER ee Rode FeAl IPA KING oae RR a ERU dee ei eate PC ON VS 7 2 Purging before Installing the MEC 7 3 Positioning the Controller 7A Mounting the Controller 24 2 2 seme repe a ta ct aes de ee hed 7 5 Connecting to gas SUDDpLY lITIG Joa pa cp wknd n PS a AR Re RE A EE M RE hee wees 2005 Celerity Inc 199 001 0006 REV F 4 05 8 ELECTRICAL CONNECTIONS lt i eit eae cee RR mI RR RR RE te Ga ee E EGRE Um RR RUE RC n 6 o T Voltasecarad PIOS ac rue e o ters Sae UD ese DE OR gle UK 6 8 2 Connections to a Power SUDDly xau kt etg e PG Aa OEE del Eire eg dod bd e Send 7 9 9 Warm Ot ses A ks M ae See ee 7 9 MULTIFLO VIRTUAL INTERFACE c occcccoo hh hh hh 7 SEU c E 7 9 2 Configure the DMFC for Networking 7 10 OPERATION AND PERFORMANCE CHECKS 0 00 cece ee eee eee rn 8 10 1 Automatic Zero InitialiZatiOli x 205 200 sac ae AA A ES Hea REEDS 8 10 2 Proper SEQUENGING unes eee RE RR Race dai ad ws aa Rods SURE tc Hee 8 103 Leak destinando a aen See gee ee wee heh a ee e bes 8 TOA PUSS m 8 10 4 1 Non Reactive Gases isse eese be inh e BUNS Ree RR OR
8. signal from Valve Off command pin J or zero setpoint for automatic shutoff A feature models of the MFC which initiates a 2 minute delay After the delay the Auto Zero compares the output of the MFC meter to DC Common determining the direction and degree of variance The Auto Zero then executes an incremental or decremental step of its digital potentiometer as determined and compares the new reading to zero This continuous incremental step and compare cycle continues indefinitely The operator may observe the progress of this cycle by monitoring the readout of the MFC meter A stable zero readout is typically achieved in 30 60 seconds at which point the MFC is ready for operation After a stable zero 0 2 is achieved the operator may turn on the MFC This action disconnects pin J disabling the Auto Zero circuitry and maintaining the new zero setting If the meter output never achieves zero the MFC zero variance may have exceeded the correction limit of the Auto Zero circuitry 4 5 of full scale The Automatic Zero alarm will then indicate the need for service or re calibration of the MFC 199 001 0006 REV F 4 05 30 16 7 4 16 7 5 2005 Celerity Inc Operational Test 1 Plug in the MFC with the gas off and the MFC turned on 2 Allow the MFC to warm up for 60 minutes 3 Note what zero reading is displayed 4 Turn off the MFC using either manual pin J Input 0 VDC or automatic shutoff zero setpoint of models
9. 16 7 10 2 Proper Sequencing Systems using a microprocessor or computer for operating the MFC should sequence the valve off between processes This is accomplished in the following way MFC s with Automatic Shut off Simply provide a zero setpoint Gas will automatically be shut off MFC s without Automatic Shut off Switch Pin J off if applicable Valves whether upstream or downstream from the mass flow controller should be programmed to turn on prior to turning on the MFC and turn off after the MFC is turned off For units with Auto Zero it is recommended that the upstream valve and downstream valve be turned off for a minimum of three minutes prior to the start of a process This is because the Auto Zero function employs a 2 minute time delay before it begins to act upon any zero offset 10 3 Leak Test It is important to test the mass flow controller connections for leak integrity after it has been installed into your system with a helium leak detector 10 4 Purge There are two recommended purging processes one for non reactive gases and one for reactive gases 2005 Celerity Inc 199 001 0006 REV F 4 05 10 4 1 Non Reactive Gases From process tool control system fully open the MFC by setting the setpoint to 100 of the full scale range Purge the mass flow controller with clean dry nitrogen or argon for a minimum of two hours 10 4 2 Reactive Gases Use one of the following three meth
10. 60 004 1015 Optional 15 pin D to 20 pin card edge adapter P N 200 104 1000 Model 9660 9860 9861 only Site Preparation Thoroughly clean dry and purge all piping associated with the entire flow control system prior to installing the controller Positioning and Mounting the Controller The controller must be positioned so that the gas flow is in the direction of the arrow stamped on the controller base The High Temperature controller is designed and calibrated to be mounted in the Horizontal position only Match the mounting holes on the bottom of the flow controller with those on the mounting surface Using two 8 32 screws mount the flow controller See drawings 990 111 9660U or 990 111 9865U for mounting hole positions The Remote electronics must be mounted outside of the high temperature area The controller and Remote electronics are connected through the high temperature cable assembly Using the remote clamp bracket mount the Remote electronics in any position that is convenient within reach of the high temperature cable Longer length cable can be specially ordered The temperature limit of the electronics is O 50 C 32 F 122 F Connect to Gas Supply Line Once the controller is correctly mounted connect the inlet and outlet VCR fittings to the gas supply line 1 Install new gaskets compatible with the gas to be used 2 Tighten nut finger tight 3 Tighten in accordance with the fitting manufacturers speci
11. 86 3 559 0988 Fax 886 3 559 2220 Taiwan Tainan Sales amp Service SCH Eleectronic Co Ltd No 139 Min Tsu Rd Hsin shi Tainan County Taiwan Tel 886 6 599 9889 Fax 4886 6 599 9816 27 16 7 AUTO ZERO FEATURE FOR ANALOG MASS FLOW CONTROLLERS 16 7 1 Introduction Celerity MFCs guarantee a zero drift of less than 6 per year essentially eliminating the need for the Auto Zero feature However it is still offered as an option The Auto Zero feature eliminates zero drift as a contributor to long term process non repeatability It automatically and continuously re zeros the MFC between process runs This reduces the need for frequent calibration a procedure which can be both costly and time consuming This feature can identify an MFC which is in need of recalibration or repair and can be used as a trigger for a system alarm to the operator prior to a process run See Figure 2 The Auto Zero feature eliminates zero drift thus maximizing process repeatability The significance of this enhanced repeatability is very dramatic at the low end of the MFC ranges as shown in Figure 1 where a 1 zero variance can result in a 10 error at 10 of full scale VOLTAGE OUTPUT 100 50 0 10 50 100 GAS FLOW Figure 1 Zero Variance of 1 the effects An alarm may be triggered to indicate that the calibration of this MFC should be evaluated 2005 Celerity Inc 199 001 0006 REV F 4 05 28
12. BROOKS CONNECTOR 15 PIN D 4 20mA CONNECTOR UDI15 UDB15 UDN15 1 Common 1 Signal Common 2 Zero Alarm 2 Flow Out 3 3 Power Common 4 15 VDC 4 Valve Off 5 5 15 VDC 6 Output 4 20mA 6 15 VDC 7 Power Common 7 Valve Test Point 8 Case Ground 8 Setpoint 0 5 VDC 9 Valve Off 9 Power Common 10 15 to 35 VDC Ext 10 Signal Common Drv Option 11 11 15 VDC 12 12 Valve Test Point 13 13 Signal Common 14 Case Ground 14 Signal Common 15 15 Setpoint 4 20mA 15 PIN D BROOKS SMART CONNECTOR 20 PIN HONDA CONNECTOR UDH20 1 Setpoint Return 1 2 0 5VDC Flow Out 2 Power Common 3 3 Output 0 5 VDC 4 Output 4 20mA 4 15 VDC 5 24 VDC MFC Power 5 6 6 VTP 15 0 VDC 7 Setpoint 4 20mA 7 8 8 9 Power Common 9 10 Flow Output Common 10 11 11 Setpoint 0 5 VDC 12 Valve Override 12 Signal Common 13 VTP 13 Signal Common 14 RS485 A 14 Purge Close 15 RS485 A 15 16 15 VDC 15 PIN D CONNECTOR UDK15 17 Tey 3 1 MKS Test Point 9 2 Flow Out 20 3 Valve Close ER 4 Valve Open 9 PIN D CONNECTOR UDU9 UDT9 5 Power Common 1T Valve Off a 2 Output 0 5 VD
13. C T EVT 3 15 VDC 8 Setpoint 0 5 VDC ao Poner Common CAS 5 15 VDC 10 Optina Input 6 Setpoint 0 5 VDC 11 Signal Common sional Common 12 Signal Common cons ignal Common 13 9 Valve Test Point 14 ENEE st 9 PIN D STEC CONNECTOR UDS9 UDF9 UDJ9 1 Purge Close 2 Output 0 5 VDC 3 15 VDC 4 Power Common 5 15 VDC 6 Setpoint 0 5 VDC 7 Signal Common 8 Signal Common 9 VIP 15 0 VDC 2005 Celerity Inc 199 001 0006 REV F 4 05 16 9 PIN D STEC CONNECTOR UDV9 9 PIN D STEC 7350 COMPATIBLE PINOUT UDM9 UDY9 UDZ9 9 PIN 9 PIN D STEC UDS CONNECTOR UDQ9 UDW9 UDO9 9 PIN D PROFIBUS CONNECTOR 2005 Celerity Inc Purge Close Output 0 5 VDC 15 VDC Power Common 15 VDC Setpoint 0 5 VDC Signal Common Signal Common 1 2 3 4 5 6 7 8 9 VTP 10 VDC Purge Close Output 0 5 VDC 15 VDC Signal Common 15 VDC Setpoint 0 5 VDC AZ Alarm VTP O o NI uj A Wa NJ Ra AZ Disable D PORTER CONNECTOR Open Output Setpoint Power Common Valve Test Point 15 VDC 15 VDC Signal Common W CO DY UI wji N e Shield UDR9 W INTERCONNECTED GROUNDS Purge Close Output 0 5 VDC 15 VDC Power Signal Common 15 VDC Setpoint 0 5 VDC Power S
14. C S nal SIGNAL COMMON VALVE TEST POINT 15 VDC ar 15 VDC tal a EIT 2 COMMON ga VALNE OPE Figure 4 9000 Series Remote D Connector Option Pinout UDU15 Purge Prior to introducing process gas insure that the MFC and gas lines have been thoroughly purged with clean dry N2 Zero Check For High Temp Controllers The electrical zero should be regularly monitored and adjusted accordingly using the zero adjustment 16 3 7 1 Ensure that the flow controller has been ON for more than 60 minutes and the flow controller is at its operational temperature The High Temperature controllers have a calibration temperature window that is 15 C from the nominal operating temperature 16 3 7 2 Shut OFF the inlet and outlet gas supply lines to the flow controller making sure that no gas is flowing through the controller 16 3 7 3 The flow signal output should read a steady O If the output is not within 16 3 8 2005 Celerity Inc 0 5 25 mV of 0 0 V then remove the small inspection label on the Remote electronics and press the Zero button For best performance the Zero should be within 0 2 10 mV See drawing 990 111 9660U for zero adjustment access Note For remote readouts including analog to digital converters ensure that the readouts match the 9000 Series signals Adjust the remote readout zero and full scale to match the 9000 Series signals Calibration Check For High Temp Controllers Ca
15. E CARE ee Roue Rack e ade 9 101 2 Reactive Gas685 5 cec ex c eee Peu CUR ber ade pedit oe ee a EDU EROR SCR ER ge Reed 9 10 5 ZrO CNC suman aran rada awardee See tee Rae a Relea 9 10 6 Foll Flow CHEEK s srr s et CR nce eg a A dd 10 10 7 Flow Control Response Check 10 10 83 Calibration Check assed aA ake eb aenen ded dere bg ESSE eda wei P Sagal 10 11 TROUBLESHOOTING m ie xe RR a eed ede ewe Hh eee A ee ee eke Bak 11 11 1 Environmental Factos e nu er baat pois eee idee pres SHS ER eds guns 11 11 2 MEG Troubleshooting Checklist ser 2s samet ht Rene a seared Heke R ade oe me 11 12 REMOVAL 00d dar E Ram E ds ie ds E a E Ea 12 12 1 Purging before removing the MEC 12 12 2 REMOVING the MEC ces Sassi cee ls Dadra eg gene eth a ea eae ee Be 12 12 3 Paekasing the MFC sue pri 5 t ted a S Ee ade ae 12 2A Un PaCKIBINE O O of Sekt oe Poa Are tA 12 WAC ISAM Os a 2 ai case thee oe ead ate e pte ihe Se eye oak oe ae ee E Meera edu day pee San anes oP ear ke 12 726 SMD DING Euh cies Mus Sas e oe PE eet ME ne ee ee eee 12 22 ShIppIig GOSIS ts ae acre ae pte cas os es uA Eu str Shae dite E DE 13 12 8 Returned Material Authorizations RMA 0 eee eee ee 13 12 9 Documentales She ch cet oerte pies uic neon aere Bee e sah as inte Mia acf aa Qu Sax A enced 13 I3 MAINTENANGE iud be 8 2 ees Cee oe AS E SUR EE EE ra et 13 T3 LiEmergericy SetVIGGe xus scene ooh wing ace ee Meta pep ao d Eh e a PE ede ele un 13 13 2 Routine Maintena
16. FC is the only Having the NET Status LED not lit is normal operating mode for a single connection to the bus device on the system controller ot lit There is a tool connection Verify the physical condition of the system controller connections issue Flashing The device is in Self test This is normal operation for the Self test mode Green Red mode Flashing Green The device is in Standby mode This is normal operation It is waiting for the MFC to be connected to the tool Flashing Green The MFC and tool are not communicating Verify that the MFC has been set up with the MAC ID that the tool is expecting Flashing Green The System Controller is not functioning it is off the bus Reconnect the system controller bus enough time to poll the number of devices on the bus Steady Green The device is operating This is normal operation normally and communicating properly Steady Red There are duplicate MAC Ids Correct the MAC Ids Unplug and plug the MFC cable to create a hard reset or send a tool command to soft reset the MFC Steady Red The baud rate of the MFC is Switch setting 2 for 500K different from the rest of the Reset the baud rate to be consistent with the rest of the devices on the bus bus Steady Red There is a failure in the Verify the integrity of the physical connection to the bus communication link Recycle the power to reinitialize the MFCs Flashing Red T
17. MFCs use 11 25 VDC power A Flow meter has the same pinout as a controller except that the following pinouts do not apply on a meter Setpoint Valve Test Point Valve Off Auto Zero Disable Auto Zero Alarm NOTE Do not make any connections to any unlabeled connector pins 2005 Celerity Inc 199 001 0006 REV F 4 05 6 8 2 8 3 Connections to a Power Supply If you are using a power supply other than one from Celerity check the pin assignments making sure they match those in Appendice 16 1 depending on connector type Celerity power supplies use a cable that has a 20 pin female header type connector at one end and a 20 pin card edge MFC type at the other The connectors are keyed at both ends When making the connection be sure to apply pressure directly down on the edge connector NOTE Do not rock the connector back and forth this could cause damage to the electronic circuits Warm Up Once the power supply is securely connected to the MFC MFM please allow at least 60 minutes for the unit to stabilize 9 MULTIFLO VIRTUAL INTERFACE 9 1 9 2 Features To fully take advantage of all the outstanding operational features of Celerity s digital mass flow controllers a Multiflo Virtual Interface User Kit is required This will allow access to the mass flow controllers through a conventional personal computer With it you can issue commands to and access information from up to 32 MFCs See the Mu
18. UNIT Analog and Digital Mass Flow Controllers and Meters User s Manual CELERITY 2005 Celerity Inc 199 001 0006 REV F 4 05 Contents 1 OVERVIEW viene eee ewe cae ecb ewe web xm Ree dh eke RE RU RWS RI E Rx m ee eee nee 1 1 Flow Controller Flow Meter Model Designations 0 0 000 eee eee 1 2 Flow Controller Flow Meter Model Designations by Applications 0 0 2 0 0000 e eee 2 STANDARD FEATURES vicio RR ERU EN em RE EME eR ENS Re E RE Re ee EE Bde 2 LATHE etorri ase bark bem Aes 2 2 Calibration CONGIMONS 0445 4 3 rn Bd RECS Io RECON RERO Sane nee Aa puc DG DEL we 2 3 Standard Temperature and Pressure o 2 4 Calibration Iraceablliby cotas ads e dae bbe den ee beau eh be bd ITUR NE ORAS TES 2 0 Mantifacturing Environment ecd aa wee deh eee kh egal hae eee aa ERG 2 6 Purge Capability socs sirrg ricasca nead RR 3 OPTIONAL FEATURES in eee me Sere E Sead Eur a EDERE ee dE 311 AUTO ShUEOM ODIO xz ocu 27 xr a Xs Ales mede ih id he au bi oer ae 3 2 Response Time Options 0 er 3 3 Connector ODIIOHS 2 adire ERIT PR ro ed ISP bh Sede wee Pond ed 34 Special Adapters cce etos a e ond pos artes ed b e NEU e he Seri 3 5 Valve ODItIOnS ius Go be a at cela a OR BUR OR a een es 3 0 Flow Direction ODtlOriS iua sep pep Eee eR dida ws arth aed ata hb ia hoods ed ds 3 4 Abto Zero OHIOON 228 ene a resi d ine eating S ela c ws A A OR ne 3 8 Fittings Options 2 RR 4 POWER SUPPLIES REGE IR cea
19. as flow that is passing through them 1 1 Flow Controller Flow Meter Model Designations Unit Mass Flow Controller models have the prefix of UFC Unit Flow Controller and Mass Flow Meters have the prefix of UFM Unit Flow Meter Mass Flow Controllers UFC XXXX Unit Flow Controller Mass Flow Meters UFM XXXX Unit Flow Meter 1 2 Flow Controller Flow Meter Model Designations by Applications Table 1 shows the general applicability of each model covered by this manual Full Scale lt Digital gt lt Digital gt lt Analog gt Category Model Family Footprint Flow Range RS485 DeviceNetTM Analog Min Max Analog PROFIBUS Protocol Elastomer Seal Products 32 in Ra Finish 122 series Control Valves 1 1 O sccm 30 slm 122 180 series Standard Flow Applications 5 O sccm 30 slm 180HS 180HA 7300 series Standard Flow Applications 15 O sccm 30 slm 7301 7304 7300 7320 series Standard Flow w Auto Shutoff 5 O sccm 30 slm 7321 7324 7320 8100 series Standard Flow Applications LS O sccm 30 slm 8101 8105 8100 8130 series Setpoint Pressure Control L5 O sccm 30 slm 8130 High Purity Metal Seal Products 10 or 16 u in Ra Finish 132 series Control Valves 1 42 O sccm 30 slm 132 1551 series Standard Flow Applications 1 5 30 sccm 6 slm 1551 1630 series Setpoint Pressure Control L5 O sccm 30 slm 1630 1660 series Standard Flow A
20. d to be mounted only in the position for which it was calibrated See the side label of the MFC Refer to Section 6 1 High Temperature models 9000 series are designed to be mounted in the horizontal position only 2005 Celerity Inc 199 001 0006 REV F 4 05 5 Mounting Attitude TIMES HOS HOV Horizontal On Side Horizontal Or Vertical Figure 1 Mounting Attitudes Two Configurations HOS and HOV In order to provide optimum performance Celerity calibrates all Mass Flow Controllers and Mass Flow Meters to the position specified at the time of the order 7 4 Mounting the Controller Use two 8 32 screws to mount the controller This will ensure the flow controller s resistance to vibration from external sources 7 5 Connecting to gas supply line Once the unit is correctly mounted connect the inlet and outlet fittings of the controller to the gas supply line Depending on the type of fittings used connect and tighten per fitting manufacturers specifications NOTE You MUST use two wrenches to tighten each fitting of the unit one for the nut and the other to keep the fitting from receiving any rotational stress If you do not do this you could cause a leak due to stress applied to the MFC s internal seals 8 ELECTRICAL CONNECTIONS 8 1 Voltage and Pinouts Check that the pin connections of the mating cable have the same pinout See Appendice 16 1 Most analog and digital MFCs use 15 VDC power DeviceNet
21. dustrial Zone Branch 4 Xing Hua Street Xi0Qing Economic Development Jingang Road Tianjin China 300381 Tel 86 22 83966095 Fax 86 22 83966093 India Xytek Corp 407 Sai Pooja Chambers P 58 Sector 11 CBD Belapur New Bombay 400614 India Tel 91 22 757 3611 Fax 91 22 757 1912 Japan Osaka Sales Kinetics Japan K K Sumitomo Seimei Shin Osaka Kita Bldg 8th Floor 4 1 14 Miyahara Yodogawa ku Osaka shi 532 0003 J apan Tel 481 6 6150 1581 Fax 81 6 6150 1606 Japan Yokohama Sales Kinetics Japan K K 5F 3 19 5 Shin Yokohama Kouhokuku Yokohama shi Kanagawa ken 222 0033 J apan Tel 81 45 477 3521 Fax 81 45 477 3526 Japan Kashima Service amp Manufacturing Kinetics Japan K K 3 Hikari Kashima shi Ibaragi 314 0014 Japan Tel 481 299 84 3188 Fax 481 299 84 3189 Korea Sales and Service Celerity Korea Inc RA 406 Sungnam APT Factory Sungnam Kyungki do 463 070 Korea Tel 482 31 708 2522 Fax 482 31 708 2524 Singapore Sales amp Service Celerity Singapore Pte Ltd BLK 164 Kallang Way 07 28 29 JTC Bldg Singapore 349248 Tel 65 6744 7041 Fax 65 6744 1867 Taiwan Taipei Sales SCH Electronic Co Ltd 7th FI No 128 Sec 3 Ming Shen E Rd Taipei Taiwan 10445 Tel 886 22 713 6090 Fax 886 22 717 2072 Taiwan Hsinchu Sales and Service SCH Electronic Co Ltd No 169 2 1 section Kang Le Rd HsinFeng Hsiang HsinChu Hsien Taiwan Tel 8
22. ere is a loss of power and the system is powered back up This standby condition automatically activates the auto zero to zero the MFC for process running Automatic Zero Frequency Requirements It is recommended that the MFC with Auto Zero be turned off and taken through above Steps 2 3 at a typical frequency of daily to weekly to ensure its best performance Automatic Zero Alarm The alarm indicates that zero has drifted beyond the operating limits of the Auto Zero The Auto Zero alarm will indicate to the system that there is a need to check the calibration 199 001 0006 REV F 4 05 29 16 7 3 Theory of Auto Zero Operation 2005 Celerity Inc The Auto Zero feature in CELERITY Mass Flow Controllers overcomes zero drift by automatically adjusting the MFC meter to electrical zero during off cycles between process runs A stable zero enables operators to achieve repeatability of 1 even in very low flow operations 0 2 of full scale The following tabulation and graph demonstrate the critical effect of zero drift on repeatability Error if 1 Error if 2 Maximum with Setpoint Zero Offset Zero Offset Auto Zero 100 FS 1 2 0 2 50 FS 2 4 0 4 20 FS 5 10 1 0 10 FS 10 20 2 0 1 FS 100 200 20 0 Such drift may vary from MFC to MFC OUTSIDE LIMIT WITHIN LIMIT Figure 3 Simplified Logic of the Auto Zero Circuitry Flow Diagram The Auto Zero circuitry is triggered by a
23. fications 199 001 0006 REV F 4 05 20 16 3 5 NOTE 2005 Celerity Inc Connect to Power Supply The 9000 Series uses a Cardedge plus either 15 pin or 9 pin D connector for power flow and control signal lines unless it is a DeviceNet model If you are using a power supply other than one from Unit Instruments check the pin assignments making sure they match those in Figure 1 Once the power supply is securely plugged in the flow controller should be warmed up for 60 minutes before any other operation Signal Common Zero Alarm Manual 15 VDC 100 mA max Valve OFF 0 5 VDC Flow Output Power Common Case Ground Valve OFF 15VDC 200 mA max 3 Manual Valve Test Point Purge Signal Common Signal Common 0 5 VDC Set Point Input Minimum load impedence 2000 Ohms Figure 1 9000 Series 15 pin D Connector Pinout CASE GND 1 A SET POINT 0 5 VDC POWER COMMON 2181 SIGNAL COMMON OUTPUT 0 5 VDC 3 C VALVE TEST didi 15 VDC 15 VDC 4 D KEYWAY COMMON 10 J VALVE OFF Figure 2 9000 Series Cardedge Connector Pinout The Model 9865 DeviceNet versions use a mini 5 pin connector that is compliant with DeviceNet specifications see Pinouts below 4 3 1 DRAIN 2 V 11 25 VDC S 3 V 4 CAN H 1 2 5 CAN L Figure 3 9000 Series DeviceNet Connector Pinout Male 199 001 0006 REV F 4 05 21 16 3 6 16 3 7 CASE GND 3 POWER COMMON THS OUTPUT 0 5 VD
24. fter MFC cutoff and 90 sec delay continuous operation until the MFC is turned on Minimum Operating Time 2 to 3 minutes depending on offset of true zero Operating Limits 4 5 of full scale Auto Zero Alarm Indicates Auto Zero at operating limits Transistor close Pin B C Ambient Temp Range 0 50 C 32 122 F Dimensions 1 6 x 1 1 x O 1 199 001 0006 REV F 4 05 31 16 7 6 Troubleshooting 16 7 7 16 7 8 2005 Celerity Inc Auto Zero boards should be either replaced or repaired at the factory The following is a list of potential sources of operator difficulty when improperly utilizing the Auto Zero feature Each item on the checklist should be investigated during troubleshooting Checklist 1 Was the MFC warmed up for 60 minutes prior to zeroing 2 Is the MFC being operated in the position for which it was calibrated 3 Was the Auto Zero allowed the 90 second delay for stabilization 4 s the setpoint above 1 of full scale for units with Auto Shut off A 5 Was the Auto Zero board installed correctly 6 Is there gas flowing when the MFC is off 7 Is the MFC meter zero beyond the 4 5 range of automatic zero and in need of repair or recalibration 8 Has the Auto Zero MFC been off cycled regularly to ensure best performance 9 Is the Auto Zero allowed to operate for a minimum of 3 minutes to re establish zero Disabling Auto Zero to Establi
25. he Poll 1 0 connection timed The System Controller may attempt to reestablish communication tool out software Verify that the software timing is correct for the number of devices being polled Flashing Red The software does not have Revise the timing in the System Controller 2005 Celerity Inc 199 001 0006 REV F 4 05 26 2005 Celerity Inc UNITED STATES Austin TX Sales amp Service Celerity 200 C Parker Drive 600 Austin TX 78728 Tel 512 247 9092 Fax 512 246 5590 Beaverton OR Sales amp Service Celerity 9665 SW Allen Blvd Ste 113 Beaverton OR 97005 Tel 503 643 5564 Fax 503 520 8834 Tempe AZ Sales Celerity 1320 West Auto Drive Tempe AZ 85284 Tel 480 763 2134 Fax 480 763 2210 Milpitas CA Corporate Celerity 1463 Centre Pointe Drive Milpitas CA 95035 Tel 408 946 3100 Voice 408 934 6301 Yorba Linda CA Sales amp Service Celerity 22600 Savi Ranch Parkway Yorba Linda CA 92887 Tel 714 279 3500 Fax 714 921 0804 EUROPE Europe Head Office Ireland amp UK Sales amp Service Celerity Fluid Systems Ireland Ltd Ballycoolin Business Park Blanchardstown Dublin 15 Ireland Tel 353 18 247 100 Fax 353 18 247 101 Sales penglish celerity net Germany amp Austria Sales Celerity Tel 49 811 9988 770 Fax 49 811 9988 771 Mobile 49 160 9497 7238 Sales akeppel celerity net Germany Service ESL Elektronik GmbH Am Mitterfeld 35
26. ignal Common Power Signal Common W CO NI uj A wji N S VTP 15 0 VDC Protective Ground Reserved for Power Recv Transmit Data P Control P Data Gnd Voltage Plus Reserved for Power Recv Transmit Data N W N DUE wji N Ra Control N 199 001 0006 REV F 4 05 UDP9 9 PIN D CONNECTOR UDG9 Valve Control Output 0 5 VDC 15 VDC Power Common 15 VDC Setpoint 0 5 VDC Signal Common RS485 DX WO CO N Oy U1 A wj N Aa RS485 DX DEVICENET CONNECTOR 1 Drain 2 V 11 25 VDC 3 v 4 CAN H 5 CAN L 4 3 5 1 0O 2 17 16 2 16 2 1 Setting the MFC MFM Zero MFC zero must be set correctly and consistently to avoid any flow inaccuracies that might be present in a mass flow controller or meter Background It is normal to experience zero drift in the flow meter output during the life of an mass flow controller MFC MFC users should understand what MFC zero offset is and how to adjust for its drift When an MFC is first installed it is normal to re zero the device to ensure the best results MFC Zero is the signal produced by the mass flow sensor when gas is not flowing This signal is measured at the output terminal of the MFC with respect to the signal common terminal The MFC zero must be set such that the output reads 0 0 when the MFC is not flowing a
27. libration must be checked by flowing gas through a calibration reference and then through the mass flow controller to verify correct readout Celerity recommends that all High Temperature metal seal controllers be returned to Celerity for re calibration 199 001 0006 REV F 4 05 22 16 3 9 Maintenance 16 3 9 1 Service Any precision instrument such as a mass flow controller requires occasional servicing It is especially important to perform this service if the flow controller has been operating for an extended period of time or has been subjected to corrosive gases or other gases which leave excessive residue If non reactive gases are used service your flow controller annually If reactive gases are used the flow controller should be serviced every six months Due to the high service temperature low particle count and high leak integrity all High Temperature metal seal flow controllers must be returned to Celerity for service 2005 Celerity Inc 199 001 0006 REV F 4 05 23 2005 Celerity Inc 16 4 Troubleshooting Guide 16 4 1 Determining Whether or Not to Remove the MFC Always contact Celerity Technical Support before removing the MFC Prior to replacing an MFC thoroughly purge the system or replace re clean contaminated components NO GAS FLOW WHAT TO DO Is the gas supply turned on Is the regulator on and at the correct operating pressure Check the shut off valve and the pressure readout Ty
28. ltiFlo Virtual Interface Operational Manual for details Refer to Multiflo Virtual Interface User Manual to perform the following Monitor Setpoint Flow and Valve Voltage Turn the Flow Off and On Archive and analyze collected data from these units Make comparisons among units Change the gas that the unit is configured for Troubleshoot quickly Correct for a calibration inaccuracy NOTE The Digital MultiFlo MFC doesn t need to be warmed up to be programmed for gas and range Configure the DMFC for Networking 1 Power the MFC see Section 8 2 Starting from left to right configure each DMFC for a MacID address The MaclID address must be between 32 and 96 inclusive 3 Using RJ 11 connectors daisy chain up to 32 DMFC s 2005 Celerity Inc 199 001 0006 REV F 4 05 4 Install the appropriate length RJ 11 connector to the final DMFC in the daisy chain and connect to the 25 Pin to RJ 11 adapter on the RS 232 RS 485 converter supplied with your MultiFlo Virtual Interface User Kit 5 Connect the 25 Pin to 9 Pin adapter to the serial port of your personal computer or Laptop 6 Install MultiFlo Virtual Interface Software supplied in the Multiflo Virtual Interface User Kit 10 OPERATION AND PERFORMANCE CHECKS Perform the following checks after the mass flow controller has been installed into the system 10 1 Automatic Zero Initialization See Appendices 16 3 and Appendices
29. ly problems electrical interference Control problems cannot reach setpoint oscillation Differential pressure not within operating range nlet pressure not stable Cable losses too much ground current Zero problems indicated zero not stable Temperature steady state and transient nlet pressure steady state and transient Power supply problems electrical interference Attitude sensitivity Table 1 Environmental factors 11 2 MFC Troubleshooting Checklist Check For These Factors Verify that the supply voltage is correct Verify that the grounding is consistent Verify that the setpoint signal at the MFC connector is the same as the setpoint signal coming from the tool Verify that the Output Indicated Flow of the flow controller is the same at the input of the tool Verify the valve voltage response Move the setpoint upward and downward looking for the valve voltage to change accordingly Compare recent valve voltage to past valve voltage If it has changed and the other parameters have not then a failure is likely 2005 Celerity Inc 199 001 0006 REV F 4 05 11 12 REMOVAL The following procedures are designed to minimize or eliminate the contamination normally associated with the most highly reactive gases Celerity has also designated these procedures to reduce the overall exposure of wafers to foreign particles 12 1 Purgi
30. nce 0 o 13 13 3 Factory Calibration and Senice 2 slo Pew des la a a ia 13 TA Fed odn e MMC IT TMMMMMPS 13 13 5 Technical SUpDOIFt a cavas ok wie ac ee RUE act ected RUE IC RUE E edt Babe tuc S e ler SUE 14 2005 Celerity Inc 199 001 0006 REV F 4 05 14 WARRANTY ci nig ESGOR EE MEGRAUGROEER neh be A ee heed teed ada es 14 15 WEB SITE TECHNICAL RESOURCES 0 0 cece eee eee hh hn 14 16 APPENDICES vieiras bee eek eee RR RR RE FER GE E E eed 15 16 1 Connector PINGUIS Sorel oma Roper eR e hides URS o etc e mop Ao Cla KR 15 16 2 Setting The MEC MEM Zero xig eek is ER ehr Dao RR Re P EEG CE EA RO ROAD Oe das 18 16 3 9000 Series Supplerment a sese seda a a gida g Meat dee ea gad eee dene eee LAE 20 16 4 Troubleshooting Guide 24 16 5 DeviceNet Operations LEDS a sese meluedkRROIo4quiwee4eib4ed eR Sake need 26 16 6 Manufacturing Sales and Service Locations o o o oooooooooo aaaea 27 16 7 Auto Zero Feature for Analog Mass Flow Controllers o on anaana naaa aaaea 28 2005 Celerity Inc 199 001 0006 REV F 4 05 1 OVERVIEW Celerity Mass Flow Controllers precisely monitor and control the mass flow of gases in processes such as Plasma Etching CVD Diffusion EPI and Sputtering where superior accuracy is required Mass Flow Meters are identical to mass flow controllers except that they do not have a controlling valve Therefore they do not control but only accurately measure and report the g
31. nd increasing equipment uptime However the current sensor models have a drift specification of less than 6 per year The proper application of the Auto Zero option depends entirely on the ability to ensure absolutely no flow across the MFC sensor during the Auto Zero cycle With few exceptions this means that there must be positive shutoff valves immediately upstream and downstream of the MFC and that there must be proper valve sequencing All Digital Mass Flow Controllers have Auto Zero circuitry installed which can be enabled or disabled using the MultiFlo Virtual Interface Refer to the MultiFlo Virtual Interface User s Manual For a more complete explanation of the the Auto Zero Feature see Appendice 16 7 If you have any questions regarding the ordering or installing of an MFC with the Auto Zero feature please consult Applications Engineering first 2005 Celerity Inc 199 001 0006 REV F 4 05 3 3 8 Fittings Options The fittings available for these units are Swagelok VCR VCO9 C seal and W seal surface mount Ultraseal Buttweld and Specials Not all fittings are available for all gases and ranges Fitting options will vary according to the MFC model 4 POWER SUPPLIES Celerity manufactures a series of analog and digital power supplies These are capable of monitoring and or controlling from 1 to 5 mass flow controllers or meters simultaneously Call Celerity Customer Service for further i
32. net to find your local service center 15 WEB SITE TECHNICAL RESOURCES Celerity provides several technical information resources on our website including The Basics of Thermal Mass Flow Control 2005 Celerity Inc 199 001 0006 REV F 4 05 14 16 APPENDICES 16 1 Connector Pinouts MFC CARDEDGE CONNECTOR 15 PIN D CONNECTOR UDU15 1 Case Ground 1 Common 2 Power Common 2 3 Output 0 5 VDC 3 4 15 VDC 4 15 VDC 5 5 6 Sensor Out 6 Output 0 5 VDC 7 Power Common 8 8 Case Ground 9 9 Valve Off 10 Common 10 A Setpoint 0 5 VDC 11 15 VDC B Signal Common 12 Valve Test Point C Signal Common 13 Signal Common D Valve Test Point 14 Signal Common E 15 Setpoint 0 5 VDC F 15 VDC REMOTE D CONNECTOR OPTION UDU15 H Zero Alarm 1 Common J Valve Off MFM CARDEDGE CONNECTOR 15 VDE 1 Case Ground 6 Output 0 5 VDC 2 Power Common 7 Power Common 3 Output 0 5 VDC 8 Case Ground 4 15 VDC 9 Valve Off 5 10 6 Sensor Out 11 15 VDC 12 Valve Test Point 8 13 Signal Common 9 14 Signal Common 10 15 Setpoint 0 5 VDC A B Signal Common C Signal Common D E F 15 VDC H J 15 PIN D CONNECTOR AR JO 9 PIN D CONNECTOR okee 2005 Celerity Inc 199 001 0006 REV F 4 05 15 PIN D
33. nformation 5 PRODUCT DRAWINGS You can access and download a product drawing for any specific model of mass flow controller MFC via www celerity net http www celerity net html products technical_data drawings 6 PRODUCT SPECIFICATIONS You can access and download the exact product specifications for any specific model via www celerity net http www celerity net html products literature literature html 6 1 MFC side can label MFC side can labels carry a detailed listing of all information about a specific MFCs statistics as built at the factory UFC XXXX 1 MFC Model Number 999cc 1 6 PH3 2 Nameplate Gas and Range PII he ao LL 3 D sene Part Number SN A1234567890 4 Serial Number Colac t _ 5 Calibration reference for traceability E 30000t MK 6 N2 Calibration Reference Z 20 OOX XX P 7 Response Speed Exhaust Condition E ex OBRE EK Atmosphere or Vacuum 50 A xx 8 Operating Attitude sae 200000 9 Valve Type NC NO ery eA lle d Seal and Seat Material V1o XX Seal m 0 10 Reference Temperature and Pressure Arles Ad 11 Electrical Connector Types UDUS pi 12 Options Auto Shutoff Auto Zero 4 pea a aA _____ 13 Customer Special Request Number PID FW 1 23 14 Main Firmware Revision 71 235 15 DeviceNet Firmware Revis Figure 1 MFC Side Can Label with Explanations 2005 Celerity Inc 199 001 0006 REV F 4 05 6 2 Traceability
34. ng before removing the MFC Before removing the MFC purge the gas lines with nitrogen or argon The purge gas must be moisture and oxygen free to less than one hundred parts per billion The preferable method is to cycle purge the line for a period of two to four hours depending on the cleanliness required by the process and the reactiveness of the process gas Cycle purging consists of evacuating to a low pressure adequate to induce outgassing and then purging to remove adhered moisture and oxygen The cycle is repeated several times to complete the cleaning Alternatively eight to twenty four hours of purging alone may be used if vacuum is not available 12 2 Removing the MFC Once the line has been purged the MFC can be removed Inspect the upstream and downstream lines as well as the MFC inlet and outlet for signs of contamination Immediately hardcap the inlet and outlet fittings of the MFC and cap the line fittings as well The unit should be sealed in a cleanroom plastic bag before leaving the cleanroom area 12 3 Packaging the MFC The unit can now be transported to the service or calibration location If the MFC is to be transported outside of the facility it should be packaged in its original carton or 1 inch of foam cushion on all sides adequate for shipping an instrument Be sure to include documentation of any contamination found failure symptoms and the location of its installation This documentation can facilitate future
35. ntrollers are field serviceable by the factory They should be maintained cleaned and repaired by an authorized Celerity Unit repair center 2005 Celerity Inc 199 001 0006 REV F 4 05 13 13 5 Technical Support A factory technician is available to answer your questions by phone any time 24 hours a day 7 days a week 1 888 UNIT INC 14 WARRANTY Celerity products are warranted against defects in materials and workmanship for a period of two or three years depending on the model from the date of shipment when used in accordance with specifications and not subjected to physical damage abuse or contamination MODEL TYPES ULTRA HIGH PURITY HIGH PURITY METAL SEAL MFCs METAL SEAL MFCs MODEL NUMBERS WARRANTY LENGTH Three years Three years MODEL TYPES HIGH PURITY HIGH PURITY METAL SEAL MFCs METAL SEAL MFCs MODEL NUMBERS ELASTOMERIC MFCs Two years ELASTOMERIC MFCs WARRANTY LENGTH Three years Two years Table 3 Warranties Two years If units are judged to be out of warranty Celerity will notify the owner of replacement or repair costs before proceeding Factory service and repairs include a ninety day warranty on all parts and labor Normal turnaround time is five working days or less on any standard range item returned for warranty service MFCs that are repaired by anyone other than Celerity service centers during the warranty period void their warranty Check our website at www celerity
36. ny gas Zero offset is a major contributor to flow inaccuracies particularly at lower control setpoints where the zero offset error becomes a large percentage of the total flow signal Because of this problem it is imperative that the MFC zero be set correctly and consistently There are two common errors that can result in errant zeroing 16 2 2 Gas Inlet Pressure The inlet pressure is an often overlooked source of potential zero error on MFCS Many high density low viscosity gasses exhibit slight changes in zero output as a function of MFC inlet pressure MFCs flowing gasses such as tungsten hexafluoride and many fluoro carbons are especially sensitive to this problem A simple way of minimizing this problem is to keep the inlet pressure as low as possible Note This does not apply to pressure buffered reverse flow controllers as the pressure sensitive portion of the MFC is on the downstream side of the MFC 16 2 3 MFC control valve leakage Because the MFC is not intended to be used as a positive shut off device the MFC valve is not guaranteed to be leak tight when the valve is closed What this means is that setting the MFC zero while there is a pressure differential across the MFC can be a problem because the MFC will be measuring the valve leakage Setting the zero under these conditions will result in a calibration error In order to minimize flow errors it is suggested that the user follow the zeroing procedure below 16 2 4 Fact
37. ods See Connecting to Gas Supply Line Section 7 5 Cycle purge Alternately evacuate and purge the mass flow controller for 2 to 4 hours with clean dry nitrogen or argon For toxic and corrosive gases it is recommended to use 100 120 cycles Continuous purge Purge the mass flow controller with clean dry nitrogen or argon for 8 to 24 hours Evacuation purge Evacuate the mass flow controller for 8 to 24 hours 10 5 Zero Check Reference Appendice 16 2 Note For remote readouts including analog to digital converters ensure that the readouts match the inputs to the controller Adjust their zero and full scale to match For more information on setting the MFC MFM Zero please refer to Appendice 16 2 2005 Celerity Inc 199 001 0006 REV F 4 05 9 10 6 10 7 10 8 2005 Celerity Inc Full Flow Check 1 Apply the gas at the appropriate inlet pressure 2 Apply a Setpoint of 100 This is accomplished by applying a 5 00 VDC setpoint to pin A relative to pin B or C on the cardedge connector 3 Verify that the indicated flow output reads a steady 5 volts 10 mV pin 3 relative to pin B or C on the cardedge connector This is equivalent to a flow of 100 0 2 Flow Control Response Check 1 Close the valve by a applying a 0 setpoint where auto shut off is enabled or b apply a Valve Off command apply O volts to pin J of the cardedge connector 2 Remove the Valve Off command This acc
38. omplished by disconnecting pin J from pin 10 3 Verify that the response time is correct For fast start units refer to the response specifications for each model and range For slow start linear response units the response time that is best for your application was chosen at the time of your order 4 6 seconds 6 10 seconds 10 15 seconds 20 30 seconds or 40 60 seconds 4 If the unit does not meet the response specifications contact Celerity for assistance Calibration Check Calibration is checked by flowing gas through a calibration reference upstream from the mass flow controller or meter If the gas used for this calibration check is other than the specific surrogate gas or the actual process gas such as N2 MFC errors of up to 10 can be expected This is due to the different characteristics among the different gases 199 001 0006 REV F 4 05 10 11 TROUBLESHOOTING Many problems that appear to be MFC related may actually be caused by another part of the system Go through the step by step Troubleshooting Guide Appendice 16 3 before removing the MFC from service Environmental factors may affect MFC performance see Table 1 but these are easily resolved using a simple troubleshooting checklist see Table 2 11 1 Environmental Factors SYMPTOMS CAUSES Inaccurate flow span shifts Temperature steady state and transient Inlet pressure steady state and transient Power supp
39. ory Suggested Zeroing Procedure 2005 Celerity Inc 1 Mount the MFC in the intended physical orientation The gas delivery system should be at the intended operating temperature 2 Insure the MFC flow path is filled with process gas If the MFC was recently purged or newly connected to the system run process gas for 5 to 10 minutes Alternatively evacuate the MFC using a vacuum pump then run process gas long enough to full the MFC and gas line 199 001 0006 REV F 4 05 18 3 While running process gas at the normal operating pressure close the down stream isolation valve 4 Place the MFC in purge mode or give it a command to flow 100 setpoint Monitor the indicated flow until it stabilizes near zero Close the upstream isolation valve Oo O Give the MFC a zero percent flow command to close the control valve 7 Let the MFC warm up and stabilize for 60 minutes 8 Monitor the zero output to insure it has stabilized 9 ANALOG MFCSs Adjust R13 Zero Potentiometer until desired zero value is established 10 DIGITAL MFC s Activate the zero adjust routine by one of two methods 10 1 Depress the zero momentary contact switch on the top of the MFC 10 2 Through the RS 485 digital interface ClassOx68 Instance 1 Attribute OxBA Send a write command with an 8 bit integer value of 1 11 Wait 30 seconds while the MFC runs the zero routine Do not send any commands to the MFC or disturb the inlet pressure N
40. ote The status of the zero service routine can be monitored through the RS485 digital interface Read the Class 0x68 Instance 1 Attribute OXBA The MFC will return an eight bit integer value of 1 while it is in process of running the zero service routine and return an eight bit integer value of 0 when the zero service routine has been completed 12 Read the zero output If it is not 0 FS 05 then repeat from step 9 16 2 5 Conclusion Improperly zeroed MFCs can cause significant calibration errors and result in process inconsistencies Following the above zeroing procedure should eliminate the most often overlooked sources of zero adjustment error If you have any questions regarding the adjustment of MFC zero or any technical questions please call the Celerity Applications Engineering Department at 714 921 2640 or visit our website at www celerity net 2005 Celerity Inc 199 001 0006 REV F 4 05 19 16 3 9000 Series Supplement Metal Seal High Temperature Liquid amp Solid Source Vapor Mass Flow Controllers Models 9660 9661 9860 9861 and 9865 16 3 1 Installation Instructions 16 3 1 1 Unpacking 16 3 2 16 3 3 16 3 4 2005 Celerity Inc Verify that the controller was not damaged in transit The following items are part of the 9000 Series controller 9000 Series controller 9000 Series remote electronics High temperature cable assembly length 3 ft P N 955 000 0003 Remote clamp bracket P N 8
41. pically 25 psia Are any upstream or downstream isolation valves closed either by the system or because of failure Verify that the pneumatic valves are operating Is the MOD LED on the MFC lit solid green Look at the top of the unit Is the NET LED on the MFC lit solid green Look at the top of the unit If not cycle power to the unit or re boot Is the commanded setpoint from the system 0 Use the tool software Verify interlocks Has the MFC been commanded off by an active valve close input Use the tool software Verify interlocks FLOW OUT OF RANGE WHAT TO DO Is the gas inlet outlet pressure differential either too high or too low If the differential is too high MFC valve voltage or drive will be zero or abnormally low for the setpoint Verify that the pressure is correct for this gas and range typically 25 psia Is the MOD LED on the MFC lit solid green Is the setpoint correct for the required flow Is the MFC calibrated for the particular gas Is the MFC zero correct If not refer to the Zeroing Procedure Look at the top of the unit Use the tool software to verify this Check the MFC label Run Flow Verify Verify Leak Check Rates are OK NO GAS CONTROL FLOW IS AT OR ABOVE MAXIMUM Is there too much gas pressure across the MFC WHAT TO DO Verify that the pressure is correct for this gas and range typically 25 psia Is a system
42. pplications LS O sccm 30 slm 1661 1665 1660 1660 SDS series Safe Delivery Source 1 5 O sccm 30 slm 1663 1664 1662 1662L 3160 series High Flow Applications L5 30 slm 100 sim 3161 3165 5360 series High Flow Applications LS 30 sim 100 sim 5361 5365 7360 series Standard Flow Applications L5 O sccm 30 slm 7361 7364 7360 9660 series High Temperature Applications 15 O sccm 30 slm 9660 Ultra High Purity Metal Seal Products 4 u in Ra Finish 8160 series Standard Flow Applications 1 5 O sccm 30 slm 8161 8165 8160 8160 SDS series Safe Delivery Source 1 5 O sccm 30 sIm 8163 8164 8162 8162L 8260 series Standard Flow Applications 1 5 mini O sccm 30 slm 8261 8260 8560 series Standard Flow Applications 1 125 O sccm 30 slm 8561 8565 8560 SDS series Safe Delivery Source 1 125 O sccm 30 sim 8563 8564 9500 series High Temperature Applications 1 125 O sccm 30 slm 9561 9565 9860 series High Temperature Applications LS O sccm 30 slm 9861 9865 Table 1 Model Designations by applications 02005 Celerity Inc 199 001 0006 REV F 4 05 STANDARD FEATURES 2 1 2 2 2 3 2 4 2 5 2 6 Attitude Each MFC is built for a specific attitude either HOS Horizontal on Side or HOV Horizontal or Vertical For further details refer to Section 7 3 Mounting Attitude Calibration Conditions MFCs ordered as Atmosphere are calibrated with the MFC s outlet exhausting to Atmosphere MFCs ordered as
43. rtual Interface User s Manual 2005 Celerity Inc 199 001 0006 REV F 4 05 3 3 3 4 3 5 3 6 3 7 Connector Options The electrical connector configurations are shown in Appendice 16 1 Electrical Connections This includes detailed information and pinouts Special Adapters Retrofitting of the models of most competitors is accomplished using special electronic and mechanical adapters Contact Celerity s Applications Engineering department for help with your particular requirement Valve Options The valve is configured at the time of manufacture to be Normally Closed or Normally Open and is not user modifiable Normally closed standard The valve is closed when there is no power applied to the unit Normally open optional The valve is fully open when there is no power applied to the unit Flow Direction Options There are two configurations of Flow Direction and this is not user modifiable Standard The sensor is upstream and the valve is downstream The valve buffers the sensor from downstream process pressure fluctuations Pressure buffered The valve is upstream and the sensor is downstream The valve buffers the sensor from upstream pressure fluctuations Auto Zero Option The Auto Zero feature detects zero offset during no flow conditions and electronically re zeros the output signal Auto Zero on earlier Unit models was of great benefit in reducing drift a
44. sh True Zero aa 4 0 MN Lr Apply a setpoint of 2 or more Turn on the MFC pin J open circuited or 5VDC applied Isolate gas flow or evacuate the MFC Unplug the MFC Replug the MFC and allow 10 min warm up assuming previous 60 min warm up Establish the normal operating temperature and attitude of the MFC The true zero should now appear on the flow readout If the true zero is beyond the operating limits 4 5 then the following re zero procedure can be used Re zeroing is advised if true zero is more than 1 out 199 001 0006 REV F 4 05 32 Figure 6 Zero Pot Location Adjusted with no pressure applied to the unit 16 7 10 AUTO ZERO FUNCTIONAL TEST The Auto Zero control may be tested by intentionally adjusting true zero to 1 or 1 turning off the MFC zero setpoint or O VDC applied to pin J and observing the Auto Zero compensation after the two minute delay After the test is complete reset the true zero to zero output utilizing the same procedure described in the section Auto Zero Out of Range Adjustment re zeroing true zero 16 7 11 AUTO ZERO ALARM FUNCTIONAL TEST When the true zero is outside of the range of the Auto Zero 4 5 F S the Auto Zero alarm should be activated The true zero may be adjusted outside of this range to test the alarm on off 2005 Celerity Inc 199 001 0006 REV F 4 05 33
45. terial Authorization number 12 9 Documentation The documentation of the service and calibration should be maintained based on the location in order to determine the contamination of each gas line These procedures should provide maximum cleanliness This is required for many of the new more critical semiconductor processes 13 MAINTENANCE 13 1 Emergency Service In addition to a fast turnaround time for regular service and repairs Celerity can in most cases provide an advance replacement unit for EMERGENCY PRODUCTION DOWN situations In this way your production can get back on line while your original unit is repaired 13 2 Routine Maintenance Any precision instrument such as a mass flow controller requires occasional servicing It is especially important to perform this service if the flow controller has been operating for an extended period of time or has been subjected to gases which leave excessive residue If non reactive gases are used the flow controller should be serviced annually If reactive gases are used the flow controller should be serviced every six months Occasionally the Zero Offset should be checked See the section Operation and Performance Checks for adjustment instructions 13 3 Factory Calibration and Service Celerity provides a 5 day turnaround time for factory calibration and repair and an even shorter turnaround time for a nominal additional cost 13 4 Field Service Celerity Mass Flow Co
46. this gas and range typically 25 psia Is the MFC valve leaking Possibly caused by contamination Test the valve for leak integrity and replace if leaking Run the Leak By procedure GAS FLOW OR MFC READING OSCILLATES WHAT TO DO Is the MFC calibrated for the gas flowing If not replace MFC with properly calibrated unit Most nitrogen calibrated MFCs will oscillate on hydrogen or helium Check the MFC label Run Flow Verify Is there too much gas pressure across the MFC Adjust regulator to proper operating pressure if necessary Are the inlet and outlet pressures steady Check inlet pressure Verify that the pressure is correct for this gas and range typically 25 psia e If erratic a faulty pressure regulator can make an MFC appear to oscillate Verify that the pressure is correct for this gas and range typically 25 psia MFC DOES NOT READ ZERO WHEN GAS IS SHUT OFF WHAT TO DO Is the differential pressure across the MFC really zero Equalize the pressure across the MFC by opening the control valve briefly Perform a zero adjustment using tool software If not refer to the Zeroing Procedure Verify that the pressure is correct for this gas and range typically 25 psia If the unit has been contaminated the valve may not be able to close and therefore it will not zero Is the MFC configured properly in the tool software Use the tool software to
47. verify this 2005 Celerity Inc Is the MFC mounted in the proper attitude Also for best results calibrate the MFC in the same attitude in which it will be operating 199 001 0006 REV F 4 05 See the MFC side can label look for HOV Vertical or HOS Horizontal Check the part number or MFC Description 25 16 5 Maintenance MOD Module Status LED LED INDICATES WHAT TO DO Not lit No power to the MFC Check the voltage at the cable connector across pins 2 and 3 Verify that the voltage is 11 25 Vdc Not lit Damaged Defective LED Contact Kinetics Technical Support Not lit MFC Power Supply problem Contact Celerity Technical Support Flashing The device is in Self test The Device is operating normally if this flashing green red lasts for no more Green Red mode than five seconds Steady Red The microprocessor has Contact Celerity Technical Support failed Steady Green The device is powered up This is normal operating mode NET Network Status LED LED INDICATES WHAT TO DO ot lit No power to the MFC If both the Mod and Net LEDs are out check the voltage at the cable connector across pins 2 and 3 Verify that the voltage is 11 25 VDC ot lit Damaged Defective LED Unplug and plug the MFC cable performing a hard reset or send the tool command to soft reset the MFC Verify that the LED is flashing red green If not contact Celerity Technical Support ot lit A single M
48. with Auto Shutoff feature Verify that no gas is flowing when the MFC is off This is critical to the accurate and repeatable operation of the automatic zero feature Celerity suggests that positive isolation valves be installed upstream and downstream of the MFC to ensure no gas flow during Auto Zero operation cycle If the MFC is being used in a vacuum process we recommend that zeroing take place under vacuum conditions to better ensure that there is no flow If the MFC is installed in the vertical position the gas should either be evacuated or the pressure reduced to atmosphere Celerity recommends this because some high density gases exhibit a thermal siphon effect within the MFC during standby Thermal siphon produces internal recirculating flow within mass flow controllers due to heating of the gas This effect will cause the Auto Zero to offset in error Current Celerity MFCs with the new sensor will not exhibit this offset 5 Wait 3 minutes to allow the Auto Zero to complete the zeroing process 6 Confirm that the reading is zero 40 2 of full scale Auto Zero Specifications Performance ACCUTACYoccccnncccnnnncccnnnnnnnos 0 2 of full scale Time Requirement WatmM LD eite 60 minutes Auto Zero stabilization 2 min delay between turn on and Auto Zero function Auto Zero operation continuous comparative cycle for 30 60 seconds minimum after valve off or until the MFC is turned on Operating Period a
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