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LiquiTrak® Nonvolatile Residue Monitor Model 8000:User Manual

1. Command Explanation RL Read Laser RRA Read Record raw Analog RRC Read Record Control RRN Read Record NRM data RRS Read Record Status RTO Read power On Time RV Read Version S4S Set 4 20ma Span S4Z Set 4 20ma Zero SBS Set Nebulizer Set Point SBV Set Nebulizer Flow Volume Scale Factor SCT Set Calibration Table SDO Set Detector Offset SDS Set Dead time Span SDT Set Detector Threshold SDZ Set Dead time Zero SE Set Evaporator On Off SES Set Evaporator Set Point SFS Set Flow Set point SFZ Set Flow Zero value SG Set Growth heater on off SGS Set Growth tube temperature Set point SL Set Laser on off SLS Set Laser Set point SM x t Set Mode x mode t sample time in tenth of second SO Set Optics heater on off SOS Set Optics temperature Set point SP Set Pump on off SR x y Set 4 20ma Range x min PPT y max PPT SS Set Saturator temperature controller on off SSS Set Saturator temperature Set point SZ Set auto Zero function NRM Model 8000 User Guide 41 Version 1 8 NRM 8000 Software Cal Tab The Cal tab should only be used by a qualified service technician to calibrate A the NRM 8000 Do not use the Cal tab during normal operation of the NRM 8000 you may inadvertently change the NRM 8000 s calibration settings For reference an example of the data on the Cal tab is shown in Figure 21 below Figure 21 Cal Tab data A A Cone Hee PPT Conc Rico 1000 1750 2000 3250
2. SDS Command SDS xxxx xxxx 3000 4095 Response OK Response issued after parameters changed Example Command SDS 4000 Sets the full scale value for the dead time measurement circuit to 4000 Response OK Command SDS Response 4000 Parameters not changed Current setting displayed on record SDT Set Detector Threshold SDT is used to set the threshold value in millivolts for particle pulse detection or to return the value of the current setting if no parameter is supplied SDT Command SDT xxx xxx 0 120 Response OK Response issued after parameters changed Example Command SDT 50 Sets the threshold value to 50millivolts Response OK Command SDT Response 50 Parameters not changed Current setting displayed on record NRM Model 8000 User Guide 58 Version 1 8 Appendix D Firmware Commands SDZ Set Dead Time Zero SDZ is used to set the Zero value for the dead time measurement circuit The command echoes the value of the current setting if no parameter is supplied SDZ Command SDZ xxx xxx 0 100 Response OK Response issued after parameters changed Example Command SDZ 11 Sets the Zero value to 11 Response OK Command SDZ Response 11 Parameters not changed Current setting displayed on record SE Set Evaporator Heater SE is used to turn the Evaporator Heater on or off The Heate
3. NRM 8000 Software Display Tabs Data Collection Interval Chart Options button Autoscale buttons 4 Follow the instructions from the NRM Chart Setup Wizard When the installation is complete an icon labeled NRMChart appears on the desktop Remove the USB flash drive from the USB port Launch the NRM program by double clicking on the NRMChart icon You will see the main screen An example of the main screen is shown in Figure 14 below Figure 14 Main Screen EE NRMChart Instrument Serial Number 143 DAR i i About ae Communication Port Chart Text Cal 60K Start button changes to Stop during data 30K collection Chart Controls H fa fields Chart Controls S SS DOWN How to Begin Data Collection Follow these instructions to begin data collection 1 2 Specify a communications port See detailed information on page 39 Check the data collection interval and reset if necessary See detailed information on page 39 Specify a location to store the data See detailed information on page 39 Click the Start button to begin collecting data See detailed information on page 39 Turn off autoscaling if necessary See detailed information on page 39 NRM Model 8000 User Guide 34 Version 1 8 NRM 8000 Software Software Options The following list is a summary of the options available on the main screen Detailed information about these options can be found on the
4. Log record 5 24 2014 23 59 N 0 393 393 207 6 6 3117 97 3 15 20 04 6 Version 1 8 Appendix D Firmware Commands Explanation of N Record Values Flags Status Flags Hexadecimal The number in the N record may be a combination of the values of more than one flag Explanation of Status Flags Weighting Description 0 No flag 1 Over range concentration 2 The aerosol flow was out of range for some portion of the sample 4 Nozzle flow error occurred during the sample 8 Absolute pressure out of range for some portion of the sample 10 Saturator Growth Tube Optics Nebulizer or Evaporator temperatures were out of range during the sample 20 WCPC is in the warmup period 40 Reserved 80 The laser error occurred during some portion of the sample 100 Low water pressure lt 5psi 200 Out of water condition occurred during the sample Real ppt ppt concentration Avg ppt Long average ppt concentration average of the five most recent records Particle Concentration Aerosol Concentration in 4 cm Sample Time Sample interval elapsed time in 1 0 second resolution 1 3600 seconds Live Time Live time 0 001 3600 seconds in each sample interval Counts Accumulated particle counts during the sample interval Photo Raw Photometric 0 8090 Nebulizer Flow Nebulizer flow in mL min indicates no drip counts during the sample UPW Pressure Ultrapure Water Pressure in psi instantaneous val
5. then temperature equilibrated 2 The residue particles pass to a growth tube where the wetted walls composed of a porous medium are heated to raise the vapor pressure The high diffusivity of the water vapor allows the vapor to reach the center of the sample stream at a faster rate than the thermal diffusivity of the vapor can equilibrate to the higher temperatures near the walls creating a supersaturated condition along the radius of the flow stream These unstable conditions facilitate water condensation on the residue particles 3 The residue particles that are larger than the detection limit of the WCPC particle critical size act as condensation nuclei as they pass up the growth tube 4 The enlarged particles are detected by the optical detector Particle Detection Efficiency Like all particle counters the lower detection efficiency of the WCPC is defined by a curve ranging from 0 efficiency at some size to 100 efficiency at a larger size Figure 3 on page 10 shows a typical detection efficiency curve for the WCPC The 50 efficiency point occurs at approximately 6 5 nanometers half the particles at 6 5 nm act as sites of nucleation for subsequent particle growth in the WCPC s supersaturated water vapor and half do not The nebulizer produces a Gaussian size distribution of residue particles Figure 3 shows the Gaussian curve superimposed on the WCPC detection efficiency curve NRM Model 8000 User Guide 9 Version
6. 0 C Response OK Command SBS Response 350 Parameters not changed Current setting displayed on record NRM Model 8000 User Guide 55 Version 1 8 Appendix D Firmware Commands SBV Set Nebulizer Flow Volume SBV is used to set the calibration factor for the drip flowmeter The parameter supplied with the NRM is the droplet volume uL drop SBV Command SBV xxx xxx 1 1000 Response OK Response issued after parameters changed Example Command SBV 60 Sets the Nebulizer flow to 60 uL drop Response OK Command SBV Response 60 Parameters not changed Current setting displayed on record SCT Set Calibration Table SCT is used to set and report the ppt calibration table The calibration table consists of 16 ppt Concentration pairs The ppt values are fixed and the aerosol concentration values are provided as input calibration values by the Service Technician during calibration An example of a calibration table is shown in Figure 21 on page 42 To check the calibration points you can read back the entire calibration table by entering the SCT command without entering any parameters NRM Model 8000 User Guide 56 Version 1 8 Appendix D Firmware Commands SCT Command SCT p c p 10 20 30 60 100 300 600 1000 2000 3000 6000 10 000 20 000 30 000 or 60 000 ppt c 1 500 000 cc Response OK Response issued after paramet
7. 1 CAUTION ONLY QUALIFIED PERSONNEL MAY SERVICE THIS INSTRUMENT Serial Number Label A serial number label similar to the one shown below is positioned on the back panel of the NRM 8000 Fluid Measurement Technologies inc 4106 Hoffman Road White Bear Lake MN 55110 USA WWW FMTDEVELOP COM MODEL NO NRM 8000 SERIAL NO 100 MANUFACTURED APRIL 2006 NRM Model 8000 User Guide 3 Version 1 8 NRM 8000 Safety and Handling Procedures CE Declaration of Conformity The CE on the Serial Number Label indicates that the NRM 8000 meets the Health and Safety requirements and is in conformity with the following EU Directives s EU EMC Directive 89 336 EEC s EU Low Voltage Directive 72 23 EEC Using the relevant section of the following EU standards and other normative documents EMC EN55011 1998 1999 2002 EN61326 1 1997 1998 2001 2003 Safety EN61010 1 2002 2 4 Edition Warnings Please familiarize yourself with the following warnings before operating the UN NRM 8000 The NRM 8000 must be used following manufacturer s specifications otherwise safety cannot be guaranteed All service work must be performed by qualified service technicians only qualified service technicians should remove the NRM 8000 cover When the NRM 8000 is running there are hot surfaces inside the detector Do not remove the cover at any time unless you are a qualified service technician To prevent electric shocks ensure that
8. 1 5 mL min and 3 0 mL min It can take up to 15 minutes for the nebulizer flow rate to stabilize after the NRM 8000 warms up Raw Particle Count and Water Pressure Screen The Raw Particle Count and Water Pressure screen shown in Figure 9 on page 22 displays the raw particle count from the WCPC and the incoming water pressure This screen is used by service technicians to determine whether the WCPC is functioning correctly and to set the incoming water pressure NRM Model 8000 User Guide 21 Version 1 8 NRM 8000 Operation Raw Particle Count in number per cm Residue Concentration Figure 9 Raw Particle Count and Water Pressure Screen fog Ya URI Pressure S PX j lt Incoming Water Pressure in psi The raw particle count is a count of the number of residue particles formed as each nebulizer droplet is dried It is not a particle count of particles present in the water as measured by a conventional liquid borne particle counter You can watch the water pressure value change on the display screen as you adjust the incoming water pressure with the WATER PRESSURE valve on the back panel shown in Figure 6 on page 17 The water pressure should be between at least 30 psi Residue Concentration Screen The Residue Concentration screen shown in Figure 10 below displays a bar graph of measured residue concentrations over a two hour period This graph allows you to monitor the residue data being collected
9. 3000 4700 6000 1895 10000 14300 20000 em 30000 28700 50000 73000 Calibration data Write button used by the Service Technician to update the calibration data NRM Model 8000 User Guide 42 Version 1 8 Read button used by the service technician to populate the calibration data NRM 8000 Troubleshooting Troubleshooting There are no user serviceable parts inside the NRM 8000 All repair and maintenance must be performed by a qualified service technician When working with the NRM s Do not remove any parts from the instrument unless this manual tells you to do so s Do not remove the instrument housing or covers while power is supplied to the instrument You can use the READ and SET commands described in Appendix D beginning on page 47 for basic troubleshooting Occasionally orifices or tubes within the NRM 8000 become blocked This is indicated by a low Nebulizer flow rate or an inadequate waste water flow If this occurs perform the Backflush procedure described in Removing Water Flow Blockages on page 25 NRM Model 8000 User Guide 43 Version 1 8 Appendix A Acknowledgements Appendix A Acknowledgements Acknowledgments The NRM 8000 owes its extraordinary specifications to the continuous laminar flow Water based Condensation Particle Counter from Aerosol Dynamics Inc of Berkeley CA We currently license the WCPC technology from Aerosol Dynamics We give our sincere thanks to
10. 8 NRM 8000 Shutting Down and Moving 11 12 13 14 15 16 17 18 Place a paper towel by the CPC DRAIN and NEBULIZER DRAIN ports on the back panel to collect the small amount of water that will drain Unscrew the CPC DRAIN and NEBULIZER DRAIN caps and keep them in a safe location for later use Turn the BACKFLUSH valve from BACKFLUSH to NORMAL Wait 24 hours Then replace the caps on the CPC DRAIN and NEBULIZER DRAIN ports and turn off the air or nitrogen Replace the Flaretek nut and cap you removed in step 4 Disconnect the air or nitrogen supply line and the water waste line and turn off the power Disconnect the power cord You should have saved the Flaretek nut and cap you removed when you installed the NRM Place these on the WATER INLET port to prevent material from entering the port The NRM is now prepared for shipping or moving Note If you did not save the original Flaretek nut and cap find suitable alternatives or the NRM may become contaminated during transport If you have any questions about shipping or moving the NRM 8000 contact Fluid Measurement Technologies Inc at 651 762 7762 NRM Model 8000 User Guide 28 Version 1 8 NRM 8000 Data Acquisition Data Acquisition NRM 8000 data is collected via Analog and Digital outputs Figure 13 below shows the communication ports on the NRM 8000 back panel The NRM 8000 collects particle count data and stores the collection time each tenth of
11. After Evaporation Residue Residue Concentration Screen s sesoeses0000000000 22 EE 35 36 SiREcOrd dai See Data Records Safety and Handling Drocedures 2 4 Schematic Diagram of the NRM 8000 6 Serial Number 3 Version 1 8 NRM 8000 User Manual Index Serial Port See USB and Serial Ports Set 4 20 MA Zero GAZE 55 Set 4 20mA Span 4 54 Set Aturator Set Point DD 66 Set Auto Zero Function GZ 66 Set Calibration Table GC 56 Set Commands circo a cnc 53 Set Dead Time Span GIG 58 Set Dead Time Zero 59 Set Detector Offset GC 58 Set Detector Threshold SDT eee 58 Set Evaporator Heater GE 59 Set Evaporator Temperature Set Point SES 59 Set Flow Set Point GP 60 Set Flow Zero SEZ cucicscononononosororconononiacnenacarionononos 61 Set Growth Heater DC 61 Set Growth Tube Temperature Set Point SGS 62 Set Laser 62 Set Laser Set Point GD 63 SetMode S Ministra 53 Set Nebulizer Flow Volume GBV 56 Set Nebulizer Set Point SBS eee 55 Set Optics Heater GC 63 Set Optics Temperature Set Point SOS 64 Set Pump SP cas is cbc tes fess iio Set Range SR Set Saturator SS Setup Equipment Setup Procedure mcmccccnincononononcocinanacananonancananano 13 16 NRM Model 8000 User Guide 69 Shutting Down the NRM SOU 25 27 Software Installation ocoonnccnnonncnnnnnonoconnnonnnonnnonns 33 Software Overview 33 Softwa
12. Figure 10 Residue Concentration 4 i RK PETI Every 60 seconds new data is added on the right of the graph and the oldest data is dropped from the left Each 60 second update is the average of 60 one second readings stored in an internal buffer The vertical scale on the graph is units of ppt residue concentration and automatically updates to include the highest recorded concentration over the two hour period The 60 second ppt value is reported over the Analog and Serial communications interfaces The NRM 8000 has no internal memory and therefore does not store data To collect and store data you must use the NRM 8000 software see NRM 8000 Software on page 33 NRM Model 8000 User Guide 22 Version 1 8 NRM 8000 Operation Flow Rate Nebulizer Flow Rate Screen The Nebulizer Flow Rate screen shown in Figure 11 below displays a bar graph of the nebulizer flow rate over a two hour time period This graph allows you to check that water is flowing correctly through the nebulizer Figure 11 Nebulizer Flow Rate e Lu E NIR Every 60 seconds new data is added on the right of the graph pushing old data off the left The vertical scale is in units of mL min and automatically updates to include the highest recorded flow rate over the two hour period The nebulizer flow rate is reported over the Serial communications interface Status Screen The Status screen shown in Figure 12 below displays information abou
13. Nitrogen Supply See Connecting Compressed Air Nitrogen Supply Angleiof Tilt csc coincidir Autoscealing iii a Back Panel Diagram Backflush See Removing Water Flow Blockages Blockages See Removing Water Flow Blockages ER imita See Data Records Cal Tab aceite kaise See Calibration Tab Calibration Data 42 Calibration Overview sssssessssossosoososs0se0s0ss0s0000 11 Calibration Tab 42 CE Declaration of Confort 4 Chart Control s miinisntaaa Chart Taba Collect Data dat COM D Hien tied seek Bea a CORT titi de de Com O ed e Communication Ports Communications Parameters Compressed Air See Connecting Compressed Air Nitrogen Supply Cone Chat rsr nieri riia iT iao 38 Concentration and Nebulizer Flow Rate Screen 21 Condensation Nucleation occonoccocncononononnonnannnonnonns 9 Connecting Compressed Air Nitrogen Supply 16 17 Connecting Power Supply Connecting UPW Supply ocuccencnanainanannonannonronos Connecting Water Drain cece Data ACQUISITION 0 0 cece cece cscs eeneneteeseseneneees Data Collection eeneg iia Data Collection Interval o oononcccnnonionionconacononnno Data Records DefinitionS 006 Detection Efficiency Ds O ow eects este Displaying Chart iii Draining the NRM 8000 See Shutting Down the NRM 8000 Firmware Commands Table 47 Flow Diagram of the NRM 8000 een 7 NRM Model 8000 User Guide 68 Fluid Measurement Technologies en i Fron
14. OK Command S4S Response 9500 Parameters not changed Current setting displayed on record NRM Model 8000 User Guide Version 1 8 Appendix D Firmware Commands S4Z Set 4 20mA Zero S4Z is used to set the zero level 4mA of the analog current loop outlet allowing the zero point calibration value to be set for the analog current loop output When the command is entered the analog output is set to zero scale allowing the current to be set to 4mA Adjust the S4Z number between 0 and 200 until the analog output reads 4mA This value is only held until the next reported N data record To hold the zero value longer than 60 seconds or your specified data collection interval enter the SM 0 command S4Z Command S4Z xxx x 0 200 Response OK Response issued after parameters changed Example Command S4Z 50 Sets the 4 mA span value to 50 Current loop output set to zero scale response Response OK Command S4Z Response 50 Parameters not changed Current setting displayed on record SBS Set Nebulizer Set Point SBS is used to set the control temperature set point for the nebulizer The set point temperature is provided in 1 10 C The factory default setting is 350 35 0 C SBS Command SBS xxx x 0 400 Response OK Response issued after parameters changed Example Command SBS 350 Sets the Nebulizer temperature to 35
15. Wrench 1 2008001 Terminal Connector 1 2679000 Certificate of Calibration 1 NRM Model 8000 User Guide 14 Version 1 8 NRM 8000 Installation Table 2 NRM 8000 Dimensions Dimension English Metric Height 8 49 in 21 57 cm Width 16 16 in 41 05 cm Width Handle 16 30 in 41 40 cm Depth 14 13 in 35 89 cm Depth including fittings 15 7 in 39 88 cm Depth of fittings 1 57 in 3 99 cm Figure 5 Physical Space Requirements for the NRM Note All dimensions shown in inches Metric conversions are shown in Table 2 TOP 14 13 1 57 S C i 16 16 4 7 2 N 8 49 NRM Model 8000 User Guide SIDE 15 Version 1 8 NRM 8000 Installation Equipment You Need To ensure you have all the tools and equipment you need to install the NRM 8000 check the following list before you begin If necessary use the Flaretek and Swagelok nuts attached to the appropriate fittings on the back of the NRM You will require the following items A bench or instrument cabinet at the point of installation An electrical power supply 115VAC to 230VAC Water from the supply you want to monitor entering the NRM through a inch outside diameter Teflon PFA tube Note The tube must have a Flaretek nut in place and be flared for a Flaretek connection Cleaned dried compressed air or nitrogen regulated to 50 psi entering th
16. a second This data is accumulated and used to calculate and report ppt and raw residue particle concentration The NRM 8000 has no internal clock or any data storing capability beyond 60 seconds Figure 13 Communication Ports Relay and 4 20 mA OUTPUT N 4 2 m USB Port USB Port Link Indicator Light SERIAL Port Usa fa f y Power Switch ki o MACE THE USS EE mn AC Receptacle rerewe MANUFACTURED BY QUANT TECHNOLOGIES POR FLUO MEASUREMENT TECHNOLOGES 4 20 milliamp mA OUTPUT The 4 20 mA analog output is updated every 60 seconds with a ppt value The ppt value is the average of the 60 previous one second ppt values and is shown on the display bar graph NRM Model 8000 User Guide 29 Version 1 8 NRM 8000 Data Acquisition Relay and 4 20mA Output Connector Table 4 Relay and 4 20 mA connections Pin s Connector Description 1 2 Status CC Status contact closure These relay contacts close when the status LED is on 3 12 VDC Voltage source available for powering external 4 20mA loop interface 50ma max LOOP Positive 4 20mA loop connection 5 LOOP Negative 4 20mA loop connection 6 GND Cabinet ground and power return for 12VDC source Note Loop and Loop are an isolated transmitter pair and operate over a 8 30vdc range Common Connections The 2 wire 4 20 mA connector is a 2 wire transmitter NRM energized by the loop current where the loop source voltag
17. a Concentration chart Figure 19 Concentration Chart EE NRMChart Instrument Serial Number 143 Fie About Chart Text Cal 2K 0 28 Mar Chart Controls 1010 cc 5 ppt rms NRM Model 8000 User Guide 38 Version 1 8 NRM 8000 Software Chart Controls Specify a Communications Port The default value for the data communications is Com Off indicating that the Communications port is off Choose a communications port option from the drop down menu If you are not sure which communications port to select first choose Com 1 the most commonly used port If you are using a USB cable choose Com 2 If your choice of communication port is successful data is displayed on the screen after the first data collection interval The supplied USB flash drive part 2679100 contains several communications drivers If you see a message after connecting the USB cable requesting an additional driver insert the USB flash drive into a USB port on your computer and the appropriate driver will download If you do not see data your computer is malfunctioning and you should contact your internal technical support Set the Data Collection Interval The data collection interval is applied to all data collected with the NRM 8000 software The default value for the data collection interval is 60 seconds the recommended interval To change the data collection interval click 60 and then enter a value of yo
18. by Entegris Customer service numbers 952 556 4196 or 800 394 4083 A cold flaring tool provided by Saint Gobain Performance Plastics Customer service numbers 714 630 5818 or 800 833 5661 Follow the manufacturer s instructions for the flaring method you choose 4 Flush ultrapure water through the tube for several minutes to remove any debris created by the flaring process NRM Model 8000 User Guide 18 Version 1 8 NRM 8000 Installation Remove the Flaretek nut and transit plug from the WATER INLET fitting Keep this Flaretek nut and plug for use when moving the NRM or returning the NRM to the factory See shutdown instructions on page 27 Insert the tube into the WATER INLET fitting as far as it will go Hand tighten the Flaretek nut Turn on the ultrapure water supply Water then flows through the NRM 8000 and out through the waste line Ensure the WATER INLET has no leaks If you see any leaks tighten the fitting Connecting the Power Supply and Adjusting the Water Inlet Pressure When the power supply is connected and the NRM 8000 has warmed up you can adjust the water pressure To connect the power supply and adjust the water inlet pressure follow these instructions 1 Plug the supplied power cable into the AC plug receptacle on the back panel of the NRM 8000 shown in Figure 6 on page 17 Switch the power on The NRM 8000 automatically begins its warmup procedure The front panel display shown in Figure 7
19. for the performance of service The Customer shall be responsible for packaging and shipping the defective product to the service center designated by EMT Inc with shipping charges prepaid This warranty shall not apply to any defect failure or damage caused by improper use or improper or inadequate maintenance and care FMT Inc shall not be obligated to furnish service under this warranty a to repair damage resulting from attempts by personnel other than FMT Inc representatives to install repair or service the product b to repair damage resulting from improper use or connection to incompatible equipment or c to service a product that has been modified or integrated with other products when the effect of such modification or integration increases the time or difficulty of servicing the product THIS WARRANTY IS GIVEN BY FMT INC WITH RESPECT TO THE LISTED PRODUCTS IN LIEU OF ANY OTHER WARRANTIES EXPRESS OR IMPLIED FMT AND ITS VENDORS DISCLAIM ANY IMPLIED WARRANTIES OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE FMT RESPONSIBILITY TO REPAIR OR REPLACE DEFECTIVE PRODUCTS IS THE SOLE AND EXCLUSIVE REMEDY PROVIDED TO THE CUSTOMER FOR BREACH OF THIS WARRANTY FMT AND ITS VENDORS WILL NOT BE LIABLE FOR ANY INDIRECT SPECIAL INCIDENTAL OR CONSEQUENTIAL DAMAGES IRRESPECTIVE OF WHETHER FMT LLC OR THE VENDOR HAS ADVANCE NOTICE OF THE POSSIBILITY OF SUCH DAMAGES Service Policy Knowing that inoperative or defective instruments are a de
20. on page 20 informs you of the current status Note The warmup procedure can take up to 15 minutes to complete When the front panel displays a reading in ppt press the DISPLAY button once After pressing DISPLAY the front panel shows raw particle counts in cm3 and incoming water pressure in psi Adjust the WATER PRESSURE knob on the back panel until the water pressure reading on the front panel is 25 psi If you experience any problems installing your NRM 8000 please contact Fluid Measurement Technologies Inc at 651 762 7762 NRM Model 8000 User Guide 19 Version 1 8 NRM 8000 Operation Operation Instructions Once all installation procedures have been completed you are ready to begin standard operation of the NRM 8000 The Front Panel The front panel of the NRM 8000 is shown in Figure 7 below and described on the following pages Warning Behind the wick access port is a fragile ceramic wick Do not remove this wick the wick should be replaced once every 12 months by a qualified service technician Unauthorized wick removal will void any warranty and you will have to return the NRM to the manufacturer for repair Figure 7 NRM 8000 Front Panel Four Status Indicator Lights Unmarked STATUS FLOW LASER voie encon LIQUITRAK MONVOLATILE RESIDUE MONITOR pa Display MODEL 8000 Screen DISPLAY Button UY e y wy s ge Wick Access Port N
21. page 29 The connector pin out is given in Table 5 below Note This can be converted to provide an Ethernet connection if needed USB Universal Serial Bus communications This port provides an alternate path for the serial interface mentioned above To a host computer this acts like an additional serial port Table 5 Serial Connector Signal Communications PIN Number Signal Direction 2 RXD Input to NRM 3 TXD Output from NRM 5 GND The Serial and USB data ports share a common communications channel to the NRM 8000 microcontroller but data can only be received from one port at a time The NRM 8000 sends a data record to the Serial or USB port once every 60 seconds The USB link light flashes whenever data is transmitted When a connection is linked to the USB port the USB link indicator light is on and communications can be received from the USB Port but not from the Serial port The link indicator light flashes off whenever data is transmitted When no connection is linked to the USB port the USB link indicator light is off and communications can be received from the Serial port The link indicator light flashes on whenever data is transmitted Once the Serial or USB connection is made between the NRM and a host computer the NRM software can send and receive the firmware commands listed in Appendix D on page 47 Data Records The data records N records reported via the RS 232 or USB por
22. ppt Avg See detailed information on page 36 Neb Flow See detailed information on page 37 UPW Press See detailed information on page 38 Conc See detailed information on page 38 The chart controls options are described beginning on page 39 Note The ppt rms values are displayed regardless of which chart is selected NRM Model 8000 User Guide 35 Version 1 8 NRM 8000 Software Logging indicates you are collecting data ppt The default option the ppt chart displays the data in parts per trillion The ppt data is averaged over five intervals of collected data and the ppt root mean squared rms value of these five data points is displayed on the screen Most ultrapure water systems have a stable ppt level and therefore an rms value lt 10 Figure 15 is an example of a ppt chart When you have selected the data logging option from the File menu Logging is displayed on the screen If you cannot see the word Logging you are not collecting data For details see Log the NRM Data to a File on page 39 Figure 15 ppt Chart A Instrument Scrial Humber 143 Most recent ppt value ppt root mean squared rms value Chart options button ppt Average ppt Avg If your ppt value is unstable use the ppt Average chart to smooth out the data The ppt data is averaged over five intervals of collected data and shown on the ppt Average chart Example If the Data Collection interval is 60 second
23. trademarks copyrights or other intellectual property rights covering subject matter in this document Providing you with this document does not give license to these patents trademarks copyrights or the intellectual property except as expressly provided in a written agreement from Fluid Measurement Technologies Inc NRM Model 8000 User Guide i Version 1 8 Limitation of Warranty and Liability Fluid Measurement Technologies EMT Inc offers a full 12 month repair or replacement warranty on all products sold Warranty covers defects resulting from design or manufacturing If any such product proves defective during this warranty period EMT Inc at its option either will repair the defective product without charge for parts and labor or will provide a replacement in exchange for the defective product This warranty is offered on a return to factory basis with return shipping expense expressly at the cost of the customer EMT Inc will pay the return shipping on any materials repaired or replaced Any repaired or replaced item assumes the remainder of the initial warranty period FMT Inc warrants only to the extent of replacement or repair of our products and does not assume any responsibility for consequential damages No warranty is offered on accounts with past due balances In order to obtain service under this warranty Customer must notify EMT Inc of the defect before the expiration of the warranty period and make suitable arrangements
24. water supply and disconnect the water line from the BACKFLUSH fitting 10 Turn the BACKFLUSH valve from BACKFLUSH to NORMAL NRM Model 8000 User Guide 25 Version 1 8 NRM 8000 Operation 11 Replace the Flaretek nut and cap you removed in step 4 12 Connect the water supply line to the WATER INLET Flaretek fitting and turn on the water supply Note It may take several minutes for the flow rates and drip counter to come back to regular operation If after waiting for 30 minutes the flow rate and drip counter do not return to normal operating rates contact Fluid Measurement Technologies Inc at 651 762 7762 NRM Model 8000 User Guide 26 Version 1 8 NRM 8000 Shutting Down and Moving How to Shut Down the NRM 8000 for Moving or Shipping If you need to move the NRM 8000 to another lab or facility or if you need to ship it for service work read this section to familiarize yourself with the precautions you should take and the procedures you should follow Warning The NRM 8000 can tolerate being tilted at an angle of up to 10 during normal operation Do not tip more than 10 If you tip the NRM 8000 at an angle gt 10 water floods the optics If you plan to move or ship the NRM it must be drained first Performing any of the following improper handling techniques may damage the instrument and will invalidate the warranty Shipping transporting an undried undrained instrument Tipping gt 10 during normal
25. 1 8 NRM 8000 How It Works Figure 3 WCPC Detection Efficiency Curve Superimposed on the Residue Particle Gaussian Size Distribution TU A Orne E ANA CTT 100 90 80 30 Detection efficiency 20 10 2 3 4 5 678 910 20 30 40 50 60 80 100 Size nanometers Particles to the left of the WCPC s efficiency curve do not initiate nucleation and therefore are not counted by the WCPC Particles to the right of the efficiency curve act as sites for nucleation and therefore are counted If the ultrapure water becomes dirtier or if the water contains an increased level of Potassium chloride KCl during calibration each droplet from the nebulizer remains the same size but contains more residue Therefore when the ultrapure water droplet dries the resulting residue particle is larger The Gaussian size distribution of the residue particles shifts to the right when superimposed on the WCPC s efficiency curve Figure 4 on page 11 shows this shift of the Gaussian Curve NRM Model 8000 User Guide 10 Version 1 8 NRM 8000 How It Works Figure 4 As the Water Becomes More Contaminated the Gaussian Size Distribution Shifts to the Right 100 A eT TT Detection efficiency 2 3 4 5 678 910 20 30 40 50 60 80 100 Size nanometers Calibrating the NRM 8000 The raw particle count must be converted from particles cm to parts per trillion ppt This is achieved by calibrating the NRM 8000 with k
26. FA Flaretek Waste Outlet L inch SS Swagelok Compressed Air inlet Ya inch SS Swagelok Software Data acquisition program included Windows XP or Windows 7platform required Flaretek is a registered trademark of Entegris Inc Swagelok is a registered trademark of Swagelok Company Teflon is a registered trademark of E I DuPont de Nemours and Company Inc Windows is a registered trademark of Microsoft Corporation Specifications subject to change without notice NRM Model 8000 User Guide 45 Version 1 8 Appendix C Data Reporting Records Appendix C Data Reporting Records The NRM 8000 displays data in real time on the front panel display You can collect data records over time and export them in text form using the NRM 8000 software Data records in text form include the following s N Records S Records Used by qualified service technicians for troubleshooting Ss A Records Used by qualified service technicians for troubleshooting C Records Used by qualified service technicians for troubleshooting N Record Data N records are collected according to the interval you have specified such as every 60 seconds and displayed in a series on the Text tab They are displayed indefinitely as long as data collection is set up and the NRM 8000 is powered on They can also be displayed if you enter the command RRN in the Firmware Command field They display information about the functioning of
27. Fluid Measurement F Technologies Inc LiquiTrak Nonvolatile Residue Monitor Model 8000 User Manual Part Number 1978000 Version 1 8 LiquiTrak Nonvolatile Residue Monitor Model 8000 User Manual Copyright Fluid Measurement Technologies Inc 2007 All rights reserved Address Fluid Measurement Technologies Inc 4106 Hoffman Road White Bear Lake MN 55110 3708 USA Phone Number 651 762 7762 Fax Number 651 762 7763 URL www fmtdevelop com The following is a history of the LiquiTrak Nonvolatile Residue Monitor Model 8000 User Manual part number 1978000 Version Date Change Version 1 0 August 2007 Version 1 1 May 2007 CE Declaration of Conformity added Minor text edits Version 1 2 February 2008 Document formatting updated Major content rewrite Version 1 3 March 2008 Screen shots and photos updated Version 1 4 May 2008 Minor edits Nebulizer Flow Chart screen updated Version 1 5 October 2008 Corrected typographical errors Version 1 6 March 2009 Changed instructions for shutting down and draining the NRM Version 1 7 September 2011 Added information about flash drive Updated packing list Updated shutdown procedures Version 1 8 June 2014 Corrected errors in the shut down procedure firmware commands and the specifications page All trademarks appearing in this manual are the property of their respective owners Fluid Measurement Technologies Inc may have patents or pending patent applications
28. L 0 Turns the laser off Response OK Command SL Response 0 Parameters not changed Current setting displayed on record NRM Model 8000 User Guide 62 Version 1 8 Appendix D Firmware Commands SLS Set Laser Set Point SLS is used by a qualified service technician to set the laser power It can also be used to query the current operating point as well as the set point If the WCPC detects an over current condition usually an indicator of a failing laser diode the reported operating point is less than the set point A Warning The SLS command should only be used by a qualified service technician If you use the SLS command you may over drive the laser diode causing it to be damaged or destroyed SLS Command SES xxxx x 0 4095 Response OK Response issued after parameters changed Examples Command SLS 1400 Sets the laser power to 1400 Response OK Command _ SLS Response 1400 Parameters not changed Displays current operating point and current set point Command SLS 4000 Sets the laser power to 4000 Response Value exceeds laser Indicates value exceeds maximum set point allowed amount SO Set Optics Heater SO is used to turn the optics heater on or off The heater is always in the on condition when the instrument is first powered up SO Command SO x x 0 turns heater off x 1 turns heater on Respons
29. M 8000 from its shipping container Save the original packing materials for use when shipping the NRM 8000 back to Fluid Measurement Technologies Inc for service or for moving the NRM 8000 to a different location Warning If the NRM 8000 is returned to FMT Inc in anything other than the original shipping container you will be charged for any damage that occurs during shipping If you do not have the original shipping container contact FMT Inc at 651 762 7762 Place the NRM 8000 on a level surface Make sure there is an unrestricted air flow around the NRM Fluid Measurement Technologies Inc recommends at least a 2 inch air gap on both sides and the top of the NRM Dimensions are shown in Table 2 and Figure 5 on page 15 Allow the detector to reach ambient temperature if necessary Make sure all the items listed in Table 1 were included in the NRM 8000 shipment If any of the items are missing or damaged please call Fluid Measurement Technologies Inc at 651 762 7762 Table 1 NRM 8000 Packing List Part Number Description Quantity Model 8000 Liquitrak Nonvolatile Residue Monitor 1 1978000 User Manual Printed 1 2679100 USB Flash Drive containing the NRM User 1 Manual NRM Monitoring Software part 1978100 and communication drivers 962003 USB 2 0 Cable 1 962002 RS 232 Serial Cable 1 2679050 Quick Installation Guide 1 1303053 Power Supply Cable USA only 1 3305007 7 64 Allen
30. RAIN ports For details see How to Shut Down the NRM 8000 for Moving or Shipping on page 27 The BACKFLUSH valve For details see Removing Water Flow Blockages below Removing Water Flow Blockages The normal ultrapure water waste flow rate is approximately 150 mL min A low nebulizer flow rate or inadequate flow from the waste line may indicate a blockage although this is an extremely rare occurrence If an NRM 8000 orifice or tube becomes blocked use the following backflush procedure to remove the blockage 1 Turn off the water supply to the NRM 8000 and wait a few seconds for the water pressure to drop to zero Confirm that the pressure is zero by looking at the Raw Particle Count and Water Pressure screen see page 21 Keep the NRM power turned on and the compressed air or nitrogen flowing Turn the BACKFLUSH valve from NORMAL to BACKFLUSH Warning If you do not turn the valve to BACKFLUSH water floods the NRM and causes significant damage Remove the Flaretek nut and cap from the BACKFLUSH Flaretek fitting Disconnect the water line from the WATER INLET fitting and connect it to the BACKFLUSH Flaretek fitting Prepare to collect the water that flows out of the WATER INLET fitting during the backflush procedure For example connect a piece of PFA tubing to the WATER INLET Turn on the water supply water will now flow out of the WATER INLET fitting Allow the water to flow for about 5 minutes Turn off the
31. RC returns the current control values flow and temperature in the C record format This command is intended for diagnostic use only by a qualified service technician RRC Command RRC Response C Record The C record displays 19 columns of data Example of C Record C 2821 2824 2771 2047 2047 1307 821 820 2251 821 821 1535 1616 1615 1068 895 892 3601 Reading from left to right the columns in the example and on the screen represent the following Record Pump Pump A D Pump Saturator Saturator Saturator Type Ctrl Drive Control A D Drive C 2821 2824 2771 2047 2047 1307 Growth Growth Growth Optics Optics A Optics Nebulizer Tube Tube A D Tube Control D Drive Control Control Drive 821 820 2251 821 821 1535 1616 Nebulizer Nebulizer Evaporator Evaporator Evaporator A D Drive Control A D Drive 1615 1068 895 892 3601 Note The values are raw analog values RRS Read Record Status RRS returns the current status values in the S record format This command is intended for diagnostic use only by a qualified service technician RRS Command RRS Response S Record The S record displays 8 columns of data NRM Model 8000 User Guide 51 Version 1 8 Appendix D Firmware Commands NRM Model 8000 User Guide Example of S Record S 150 970 25 0 60 0 60 0 35 0 120 0 Reading from left to right the co
32. RM 7700 introduced in 1992 the NRM 8000 has been redesigned to incorporate updated electronics and a Water based Condensation Particle Counter WCPC The WCPC replaces the alcohol based Condensation Particle Counter CPC used in the NRM 7700 The NRM 8000 is an improvement over the NRM 7700 for the following reasons Instead of alcohol the WCPC uses the same ultrapure water that the NRM 8000 is monitoring No external water reservoir is needed The WCPC has a wider measurement range than the original CPC and diffusion screens are no longer required By using less internal tubing and eliminating most of the diffusion losses the NRM 8000 has a response time almost ten times faster than the NRM 7700 The NRM 8000 s measurement technique incorporates the following basic processes 1 UPW entering the NRM 8000 from your supply is nebulized to generate an aerosol of water droplets 2 Filtered heated air or nitrogen dries each water droplet leaving behind a particle of residue agglomerates 3 A WCPC measures the concentration of residue agglomerates The concentration is calibrated to give you a readout in parts per trillion ppt displayed on the front panel of the NRM Figure 1 on page 6 is a schematic diagram illustrating the main components of the NRM 8000 Figure 2 on page 7 is a detailed schematic of the flow The measurement technique is described in more detail beginning on page 8 NRM Model 8000 User Guide 5
33. RM Model 8000 User Guide 20 Version 1 8 NRM 8000 Operation DISPLAY Button Use the DISPLAY button to select the type of data or status information shown on the graphics display 1 As the NRM 8000 warms up use the DISPLAY button to toggle between the Warmup screen and the Status screen 2 When the NRM warm up is complete the Status Indicator light stops flashing and displays a steady green Press the DISPLAY button to change the information shown on the graphics display toggle between five different screens of information An explanation of each screen is given on the following pages Concentration ppt and Nebulizer Flow Rate Screen The Concentration ppt and Nebulizer Flow Rate screen shown in Figure 8 below is the default display for the NRM 8000 It indicates residue concentrations and the nebulizer flow rate Figure 8 Concentration Screen and Nebulizer Flow Rate i d RO Residue gt ji A d i ti ti Concentration in lt ini di 2 2 y ppt EA A ml m1n elle The NRM 8000 collects residue concentration data in cm every tenth of a second This raw particle count data is accumulated and used to calculate and report residue concentration as parts per trillion ppt The displayed concentrations are based on the most recent five seconds of data and are updated each second The displayed values range from 0 to 60 000 ppt During normal operation the nebulizer flow rate should show a value between
34. Susanne V Hering PhD and Mark R Stolzenburg PhD both of Aerosol Dynamics for their invention and their clever insights to this unique technology NRM Model 8000 User Guide 44 Version 1 8 Appendix B Specifications Appendix B NRM 8000 Specifications Table 7 NRM 8000 Specifications Displayed Measurement Range 1 60 000 ppt Response time to impurity change lt 90 seconds Sample Flow Rate Between 1 5 and 3 0 mL min Calibrated Drip Counter Flow Meter Total Flow Rate 150 mL min Inlet Water Pressure 207 621 kPa 30 90 psig The water drain must be open to the atmosphere and able to take a flow of 150 mL min Compressed air flow rate pressure 25L min at 345 kPa 50 psig Note Compressed air must be dry and particle free Nitrogen can be substituted for compressed air Residue Drying Temperature 120 C 248 F Wetted Surface Materials Sapphire PFA Teflon PTFE 316L Stainless Steel Detector Working Fluid Water supplied by the UPW system Ambient Temperature Range 15 35 C 59 95 F Ambient Relative Humidity Range 0 85 Maximum Water Temperature 80 C 176 F Dimensions WxDxH 21 6 h x41 4 w x39 8 d cm 8 5 h x16 3 w x15 7 d inches Note Depth measurement includes the fittings on the back panel Weight 8Kg 18 lbs Power Universal 100 230 VAC 50 60 Hz 125 VA Outputs USB RS 232 and 4 20 mA Ethernet adapter available Ultrapure Water Inlet Ya inch P
35. Version 1 8 NRM 8000 How It Works Figure 1 Schematic Diagram of the NRM 8000 Note In the schematic diagram below nitrogen is shown as the drying agent but compressed air can also be used Growth Tube Dilution N2 2 Porous Media Calibration 500 um Diameter Capillary 5 L min Detector Output Ultrapure Diode Detector ad To Drain Water i 120 mL min 60 ym 118 mL min Filter NRM Model 8000 User Guide 6 Version 1 8 NRM 8000 How It Works Figure 2 NRM 8000 Flow System WASTE OUTLET DRIP COUNTER DRAIN BACKFLUSH VALVE BACKFLUSH CONNECTION VENTURI REGULATOR COMPRESSED AIR INLET 50 PSI PRESSURE REGULATOR NRM Model 8000 User Guide WICK werc ACCESS 150 cm min AEROSOL 2 5 Limin DILUTED AEROSOL DRY AIR FIXED ORIFICE 2 L min AEROSOL HEATER NEBULIZER 118 ml min SAMPLE CAPILLARY WATER CONTROL ORIFICE PICKOFF TEE Oriented to direct bubbles away from sample stream NEBULIZER REGULATOR PRESSURE WATER PRESSURE REGULATOR PILOT CONTROL 25 PSI 7 Version 1 8 NRM 8000 How It Works How the Nebulizer Creates an Aerosol of Water Droplets Ultrapure water flowing at approximately 120 mL min enters the NRM 8000 through the WATER INLET connection on the back panel The water passes through a sintered stainless steel filter 60 um pore size that removes any large debris and then flows to an air actuated pressure regulator shown in Figure 2 on p
36. age 7 The pressure regulator allows you to control the water pressure If someone inadvertently turns off the air supply the pressure regulator closes and prevents water from entering the NRM eliminating the potential of internal water leaks By turning the WATER PRESSURE knob you adjust the air pressure and therefore automatically adjust the water pressure shown as a digital display in psi on the front panel From the pressure regulator the water flows to the nebulizer through a tee fitting and a section of PFA microbore tubing The PFA tubing gradually lowers the water pressure and prevents any out gassing of dissolved gases in the incoming water Within the nebulizer the water and compressed air nitrogen supplied at a constant flow rate and pressure combine to form a stable poly dispersed aerosol of ultrapure water droplets Measuring the Flow Rate The flow rate of water flowing through the nebulizer is used as an indicator that the NRM 8000 is set up and operating correctly Instead of using a conventional flow meter the NRM 8000 incorporates a new patented method of measuring the flow rate Of the water flowing through the nebulizer 95 leaves it as part of a waste stream The waste water is collected by a weir and stand pipe system and then delivered as a steady stream of water droplets of identical size These droplets fall through a simple light beam As each droplet breaks the beam a detector senses a scattered light s
37. all electrical outlets are grounded Follow the instructions for all inlet and outlet connections Incorrect connections will cause the NRM 8000 to malfunction The air or nitrogen supplied to the NRM 8000 must be filtered particle free dried oil free and regulated at 50 psi Do not remove the wick The wick is fragile and should only be removed by a qualified service technician unauthorized wick removal will void any warranty and necessitate return of the NRM 8000 to the factory During normal operation do not tilt the NRM 8000 at an angle gt 10 If you tilt the NRM 8000 at an angle gt 10 water will flow into the NRM optics and you will invalidate the warranty You must drain the NRM 8000 before you move or ship it Do not ship an undried undrained NRM 8000 back to Fluid Measurement Technologies Inc Doing so will damage the detector and invalidate the warranty Do not subject an undrained NRM 8000 to freezing temperatures Doing so will damage the detector and invalidate the warranty NRM Model 8000 User Guide 4 Version 1 8 NRM 8000 How It Works How the NRM 8000 Works The NRM 8000 monitors Ultrapure Water UPW quality continuously in real time by measuring the amount of nonvolatile residue also known as Residue After Evaporation or RAE The NRM 8000 begins giving you a readout after only 15 minutes of operation Although the measurement technique used by the NRM 8000 is the same as that of the N
38. cable Troubleshoot the NRM 8000 using the READ and SET commands described in Appendix D beginning on page 47 Perform a calibration Hardware and Software Requirements The following items are required for successfully running the NRM software A personal computer Note Clock speed and internal RAM are not critical for successful operation A hard drive with gt 20MB free space If you intend to store data over a long period of time months or years you will need at least a 100MB hard drive A CD drive Microsoft Windows XP or Windows 7 Operating system The following items are recommended for successfully running the NRM 8000 software A USB port and a USB memory storage device for transferring the NRM 8000 data file An uninterruptible power supply sized for your computer 250 450 VA to prevent interruptions to data collection caused by power fluctuations If you have any questions about these requirements contact Fluid Measurement Technologies Inc at 651 762 7762 How to Install and Start the Software Follow these instructions to install the NRM 8000 software I Connect the PC to the NRM 8000 using either the supplied RS232 cable part 962002 or the USB 2 0 cable part 962003 Start the computer Insert the supplied USB flash drive into a USB port on the computer Using Windows Explorer locate the USB flash drive and double click on the Setup exe icon NRM Model 8000 User Guide 33 Version 1 8
39. codessteccetssaiots ea vesscsvoxossisudcosicenionsebsodendsscnssreisssente 59 SES Set Evaporator Temperature Set Point een 59 SES Set FLOW Sets POM Erase tacita EE iii RA SEENEN 60 SEL Seb NAS EE 61 NRM Model 8000 User Guide iv Version 1 8 SG Set Growth EE 61 SGS Set Growth Tube Temperature Set Point EE 62 Sls Set A EN 62 SES Set Laser POUM as 63 SO Set Optics Deater e eegesegeeeegeee er Eed 63 SOS Set Optics Temperature Set POiE oocococodononoconononononannnnnananannnnnnnnnnonononora raro rara rn nana nn orar ar ananans 64 SSA AA A A E A aa 64 SIE 65 Ee EE 65 999 vet Saturatorset ee il ino ic apectaadsosih bd otueid 66 SZ DeUAULO Zero ee 66 Appendix D Referentes ui ds a tdci 67 ida A AAA A AA 68 NRM Model 8000 User Guide V Version 1 8 About This Manual About This Manual Intended Audience The NRM Model 8000 User Manual is intended to be used by qualified personnel such as technicians and engineers in a semiconductor facility or laboratory setting Scope of User Manual This User Manual contains detailed instructions for the installation and set up of the NRM including connecting the hardware and installing the software The manual also contains an explanation of how the NRM works Definitions NRM NonVolatile Residue Monitor s UPW Ultrapure Water EU European Union RAE Residue After Evaporation CPC Condensation Particle Counter WCPC Water based Condensation Partic
40. corded whenever you enter a READ or SET command in the Firmware Command field shown in Figure 20 below and press the Enter key READ and SET command data is shown interspersed with the N records The available READ and SET commands are listed in Table 6 on page 41 and are described in more detail in Appendix D beginning on page 47 Warning Only a qualified service technician should use the SET commands If these commands are used incorrectly the operation of the NRM 8000 is adversely affected Figure 20 Text tab BS NAMChart Instrument Serial Number 143 Fle About Chat Te Cal N Records 5 6 1 40 25 9 n O 506 485 522 60 8 0 481 486 460 6 n 0 476 484 472 6 n O 482 485 482 6 N 0 493 487 501 6 n 0 496 485 505 60 4 0 496 487 503 60 4 0 499 490 510 60 9 6 n 0 487 491 491 60 9 6 4 0 491 493 498 60 9 6 n 0 485 492 487 60 9 6 n 0 486 490 489 60 8 0 496 490 506 60 9 6 811 0 504 491 519 60 0 6 n 0 482 490 462 60 9 6 n 0 496 489 489 60 9 6 n 0 479 489 477 60 9 60 n 0 487 489 490 60 9 6 ss esas 5000000000 DOoOoOOoOO ew 68 9 Ja hu pu pu pu BRR pu pu pu pu pu pu pu tb pu V o 26 5 5 Ai a 25 16 ER 5 4 a 4 9 5 S 6 6 4 VA NA UNA OUIUN DY YANAD NRM Model 8000 User Guide 40 Version 1 8 NRM 8000 Software Table 6 Firmware Commands
41. d at the end of each sample interval For diagnostic use only To stop data collection enter SM 0 in the Firmware Command field NRM Model 8000 User Guide 53 Version 1 8 Appendix D Firmware Commands SM Command SM n ttttt n mode 0 1 2 3 4 7 8 ttttt sample interval in tenths of a second 1 36 000 Response OK Response issued after parameters changed Example Command SM 2 60 The response indicates continuous data collection response mode 2 at 6 second sample intervals Response OK Command SM Parameters not changed Current setting displayed on record Response 2 60 Response mode 2 6 second sample time S4S Set 4 20mA Span S4S is used to set the full scale current output allowing a full scale calibration value for the analog current loop output When the GAS command is entered the analog output is set to full scale allowing the full scale current to be set at 20mA Adjust the S4S number to a number from 8 000 10 000 until the analog output reads 20mA This value is only held until the next reported N data record To hold the span value longer than 60 seconds or your specified data collection interval enter the SM 0 command S4S Command S4S xxxx x 8000 10000 Response OK Response issued after parameters changed Example Command 45 9500 Sets the 4 20 mA span value to 9500 Current loop output to full scale response Response
42. e Warning Using any Set commands other than the SM command can adversely affect the calibration of the instrument We recommend you do not use any of the Set commands other than SM but if you do please use extreme caution The Set commands may cause interruptions in data reporting If you use a Set command other than SM first query and record the current parameter or mode You will then be able to return to those specific settings after executing the command SM Set Mode SM is used to set the data collection mode and the sample interval At the end of each sample interval the data is reported and if in a continuous mode the data is cleared internally and the next sample is started The seven available modes are shown in the following list 0 Idle No data collection 1 Collects one sample interval of data and reports data at completion 2 Continuously collects data and reports data at end of every sample interval 3 Collects one sample interval of data but also includes an S record at the end of the sample interval 4 Continuously collects data and reports data at end of every sample interval Also includes an S record at the end of each sample interval 7 Collects one sample interval of data but also includes an S A and C record at the end of the sample interval For diagnostic use only 8 Continuously collects data and reports data at end of every sample interval but also includes an S A andC recor
43. e NRM through a Y inch outside diameter plastic tube fitted with a Swagelok nut Ss A Y inch outside diameter plastic tube fitted with a Swagelok nut to drain waste water from the NRM An adjustable wrench A clean tube cutter Note No tubing is supplied with the NRM Setting up the NRM 8000 Setting up the NRM 8000 includes the following procedures Ss Connecting a compressed air or nitrogen supply For details see Connecting the Compressed Air or Nitrogen Supply on page 17 Attaching a drain for the waste water For details see Connecting the Water Drain on page 18 Ss Connecting the NRM 8000 to your ultrapure water supply For details see Connecting the Ultrapure Water Supply on page 18 Connecting the power supply and powering on the NRM 8000 For details see Connecting the Power Supply and Adjusting the Water Inlet Pressure on page 19 All the installation procedures are performed at the back of the NRM be sure you have enough room to perform them Figure 6 below shows the connectors and fittings on the back panel of the NRM Warning The NRM 8000 can be tilted at an angle of up to 10 during normal operation Do not tilt more than 10 If you tilt at an angle gt 10 water will flood the optics If you plan to move or ship the NRM 8000 it must be drained first Performing any of the following improper handling techniques may damage the instrument and will invalidate the warranty Shippin
44. e OK Response issued after parameters changed Example Command SO 0 Turns the heater off Response OK Command SO Response 0 Parameters not changed Current setting displayed on record NRM Model 8000 User Guide 63 Version 1 8 Appendix D Firmware Commands SOS Set Optics Temperature Set Point SOS is used to set the control temperature set point for the WCPC optics The set point temperature is provided in 1 10 C This parameter is not stored and will revert to the default values 600 or 60 0 C on the next power up cycle SOS Command SOS xxx xxx 0 800 Response OK Response issued after parameters changed Example Command SOS 600 Sets the control temperature set point for the optics to 60 0 Response OK Command SOS Response 600 Parameters not changed Current setting displayed on record SP Set Pump SP is used to enable or disable the pump that provides airflow through the NRM SP Command SP x x 0 turns the pump off x 1 turns the pump on Response OK Response issued after parameters changed Example Command SP 0 Turns the pump off Response OK Command SP Response 0 Parameters not changed Current setting displayed on record NRM Model 8000 User Guide 64 Version 1 8 Appendix D Firmware Commands SR Set Range SR is used to set the 4 20mA current loop output range Parameters allow for ran
45. e is included in the receiver and the transmitter NRM floats The Loop and Loop connections are connected to the receiver The 3 wire 4 20 mA connector is a 3 wire transmitter energized by a supply voltage at the transmitter NRM The transmitter sources the loop current and the transmitter common GND is connect to the receiver common The 12VDC source is connected to the LOOP and the receiver is connected to LOOP and GND Status Relay The Status Relay contact on the back panel of the NRM 8000 allows you to monitor fault conditions If the contact is closed all of the following conditions are met s The NRM is powered on and has completed its warm up The WCPC aerosol pump is running and the aerosol flow rate is in range The WCPC nozzle pressure is within range The ambient absolute pressure is in range The internal operating temperatures are within range No laser fault is detected The water pressure is gt 10 psi No WCPC out of water fault exists If the contact is open one or more of the conditions has not been met NRM Model 8000 User Guide 30 Version 1 8 NRM 8000 Data Acquisition USB and Serial Communication Ports To allow flexible data collection and instrument control the NRM 8000 provides the following data ports Serial Standard RS 232 type serial communications This port is provided through the 9 pin D Sub connector on the back panel of the NRM 8000 shown in Figure 13 on
46. ed to get your NRM 8000 up and running Please read the detailed instructions beginning on page 14 for each step before you set up the NRM 8000 1 Carefully unpack the NRM 8000 Save the original packing materials for use when shipping the NRM 8000 back to Fluid Measurement Technologies Inc for service or for moving the NRM 8000 to a different location For details see Unpacking the NRM 8000 on page 14 Warning If the NRM 8000 is returned to FMT Inc in anything other than the original shipping container you will be charged for any damage that occurs during shipping If you do not have the original shipping container contact FMT Inc at 651 762 7762 Check the packing list see Table 1 on page 14 to make sure you received all essential components Note If any components are missing or appear to be damaged contact Fluid Measurement Technologies Inc at 651 762 7762 Familiarize yourself with the way the NRM 8000 works For details see How the NRM 8000 Works on page 5 Ensure you have all the necessary equipment for installing the NRM 8000 For details see Equipment You Need on page 16 Set up the NRM 8000 by connecting it to appropriate inputs outputs and outlets and powering it on For details see Setting up the NRM 8000 on page 16 NRM Model 8000 User Guide 13 Version 1 8 NRM 8000 Installation Unpacking the NRM 8000 To unpack the NRM 8000 follow these instructions 1 Carefully remove the NR
47. ee 36 ppt Average Ppt Ave rerien trese aTi iei eai EKE EEE EEE AEE ESEE Ea TEE EERE ES 36 Nebulizer low Neb FloW iere 37 Ultrapure Water Pressure UPW Dress 38 Concentration TC ONC EE 38 WEE EE 39 Bo aE EE 40 CAL TAD E EE A A pbvadenasar nesbobutats 42 Troubleshooting a ii 43 Appendix A Acknowledgements sioionmnneiinia sanidad 44 Appendix B NRM 8000 Specifications ocooonnonnonosnnmmmmms 45 Appendix C Data Reporting Records ococononmonmmmmmmmmmmmmmms 46 N Rec rd A O O REO 46 S Record Stats A A 46 E EE 46 C Record KE 46 Appendix D Firmware Commands sesesesessososesesessososesesesesesesesrosororesesereosososesesesesesessssesososesee 47 e EE 48 RRN Read Record NRM Data NEEN 48 RL Read Teasers ita EE dd EE EE 50 RRA Read Record Analog 50 RRE Read Record Control miii iii 51 RRS Read Record Stat dia 51 KEREN 52 A Re A A di 52 Der COMMAND Sid soa aes 53 SM e EE 53 SAS SEU 20m ALS pam E 54 S4 SEL A 20MIA Zero EE EE EE 55 SBS Set Nebulizer Set Point oooococcnononononcon nenonaononanannononaononananiononoononananiononaononarnnnonodanionanaonenocacnones 55 SBV Set Nebulizer Flow Volume ENEE 56 SCT Set Calibration Table asneira ai aa aR Ee ORES cobebesbevbesaeheosebes 56 SDO Set Detector EN 58 SDS Seat Dead Time E 58 SPT Set Detector Threshold r sassaresi sier Eici iii iia 58 SDZ Sev Dead MELO E 59 SE Sef Evaporator Heaters iiss scccccectecsetessccssccensss
48. ers changed Example Command SCT 20 800 Response OK Command SCT Responses 10 6 20 16 30 30 60 88 100 195 200 570 300 1090 600 3250 1000 6600 2000 13300 3000 18500 6000 33000 10000 50000 20000 71000 30000 87000 60000 125000 Parameters not changed You can read back the entire calibration table Note If the calibration table is non monotonic not in ascending order the message Calibration table is invalid is appended to the end of the table Review the table for the error Measurement Technologies Inc recommends that you do not use this A Warning This command affects the NRM 8000 calibration Fluid command unless instructed to do so by a qualified service technician The NRM must be completely warmed up it must have been powered up for at least 30 minutes before performing this function NRM Model 8000 User Guide Version 1 8 Appendix D Firmware Commands SDO Set Detector Offset SDO is used to set the offset value of the photo detector SDO Command SDO xxxx x 0 4095 Response OK Response issued after parameters changed Example Command SDO 2040 Sets the photo detector offset value to 2040 Response OK Command SDO Response 2040 Parameters not changed Current setting displayed on record SDS Seat Dead Time Span SDO is used to set the full scale value for the dead time measurement circuit
49. following pages Chart Tab Chart tab Allows you to select one of five available chart styles The Chart Controls options at the bottom of the screen allow you to control the charts by doing the following Cancelling the auto scaling option and manually adjusting the y axis Selecting the chart to be displayed Selecting the data collection interval default is 60 seconds Selecting the communications port Starting and stopping data collection Text tab Displays the N records being transmitted to the serial communications port every 60 seconds as well as the reply to any READ and SET commands you have entered See Appendix D beginning on page 47 for more information about the N record and the READ and SET commands Cal tab Used to Read and Write calibration data to the NRM Warning The calibration option should only be used by a qualified service technician If you change the NRM calibration you may see an error message and the NRM display and transmit values will be incorrect File menu Allows you to select where data will be stored on your computer About menu Tells you which version of the NRM Software you are running Use the Chart tab to display data in chart form and the Chart Controls options at the bottom of the screen to customize the charts Click the chart options button to toggle through the following available options until you reach the one you want ppt See detailed information on page 36
50. for the saturator to 25 0 Response OK Command SSS Response 250 Parameters not changed Current setting displayed on record SZ Set Auto Zero Function This command executes an auto zero function that calibrates the flow and nozzle transducer offset values Warning This command affects the NRM 8000 calibration Fluid ES Measurement Technologies Inc recommends that you do not use this command unless instructed to do so by a qualified service technician The NRM must have been powered up for at least 30 minutes before performing this function SZ Command SZ 1 Response a b a flow offset 0 999 b nozzle offset 0 9999 Response issued after parameters changed Example Command SZ 1 Starts the auto zero calibration Response 187 190 Indicates the flow offset is 187 and the nozzle offset is 190 Command SZ Response 187 190 Parameters not changed Current setting displayed on record NRM Model 8000 User Guide 66 Version 1 8 Appendix E References Appendix D References D B Blackford A New NonVolatile Residue Monitor for the Semiconductor Industry presented at the Ultrapure Water Executive Forum Austin Texas 2007 NRM Model 8000 User Guide 67 Version 1 8 Index Index TN WEE See Data Records Acknowledgement En 44 Adjusting Water Pressure ccccceeeeeeseenees 19 Aerosol EE 8 Air Supply See Connecting Compressed Air
51. g transporting an undried undrained instrument NRM Model 8000 User Guide 16 Version 1 8 NRM 8000 Installation BACKFLUSH Valve Tilting gt 10 with the power on Subjecting an undried undrained instrument to freezing temperatures Warning A fragile ceramic wick is located behind the wick access port This ceramic wick should only be removed by a qualified service technician unauthorized wick removal will void any warranty and necessitate return of the NRM 8000 to the manufacturer Figure 6 Back Panel of the NRM BACKFLUSH Inlet gt EE Power AES WATER Switch Se a omen T PRESSURE VK Knob 0 MATER INLET AC Plug Ce Receptacle Se WATER CE INLET CPC DRAIN NEBULIZER DRAIN WATER AIR INLET OUTLET Connecting the Compressed Air or Nitrogen Supply The air or nitrogen supplied to the NRM 8000 must be filtered dried oil free and regulated at 345 kPa 50 psi Follow these instructions to connect the compressed air or nitrogen supply 1 Remove the Swagelok nut and ferrule from the AIR INLET on the back panel If you don t already have a nut connected to your tubing use the Swagelok nut provided with the NRM 8000 NRM Model 8000 User Guide 17 Version 1 8 NRM 8000 Installation 2 Make sure the compressed air or nitrogen is supplied to the NRM through a 1 4 inch outside diameter plastic tube Insert the tube into the stainless steel Swagelok fitting o
52. ges spaming 0 to 60 000 ppt SR Command SR xxxxx yyyyy x minimum PPT for 4ma output current y maximum PPT for 20ma output current 0 lt x lt y lt 60000 Response OK Response issued after parameters changed Example Command SR 0 60000 Sets the 4 10mA current loop output range from 1 60000 ppt Response OK Command SR Response 60000 Parameters not changed Current setting displayed on record SS Set Saturator SS is used to turn the saturator temperature controller on or off The controller is always in the on condition when the instrument is first powered up SS Command SS x x 0 turns controller off x 1 turns controller on Response OK Response issued after parameters changed Example Command SS 0 Turns the controller off Response OK Command SS Response 0 Parameters not changed Current setting displayed on record NRM Model 8000 User Guide 65 Version 1 8 Appendix D Firmware Commands SSS Set Saturator Set Point SSS is used to set the control temperature set point for the WCPC saturator The set point temperature is provided in 1 10 C This parameter is not stored and will revert to the default values 200 or 20 0 C on the next power up cycle SSS Command SSS xxx xxx 0 800 Response OK Response issued after parameters changed Example Command SSS 250 Sets the control temperature set point
53. h Heater SG is used to turn the growth tube heater on or off The heater is always in the on condition when the instrument is first powered up SG Command SG x x 0 turns heater off x 1 turns heater on Response OK Response issued after parameters changed Example Command SG 0 Turns the heater off Response OK Command SG Response 0 Parameters not changed Current setting displayed on record NRM Model 8000 User Guide 61 Version 1 8 Appendix D Firmware Commands SGS Set Growth Tube Temperature Set Point SGS is used to set the control temperature set point for the WCPC growth tube The set point temperature is provided in 1 10 C This parameter is not stored and will revert to the default values 600 or 60 0 C on the next power up cycle SGS Command SGS xxxx xxx 0 8000 Response OK Response issued after parameters changed Example Command SGS 600 Sets the control temperature set point for the Growth Tube to 60 0 Response OK Command SGS Response 600 Parameters not changed Current setting displayed on record SL Set Laser SL is used to turn the laser on or off The laser is always in the on condition when the instrument is first powered up SL Command SL x x 0 turns laser off x 1 turns laser on Response OK Response issued after parameters changed Example Command S
54. ignal or pulse and a counter keeps track of the pulses An algorithm converts the pulse count to a flowrate in mL min which is shown on the front panel display How the Nebulized Droplets are Dried The ultrapure water droplets produced by the nebulizer are rapidly heated at 120 C Each water droplet is evaporated to dryness leaving behind a particle of residue consisting of dissolved inorganic material Every nebulizer droplet results in a residue particle the cleaner the ultrapure water the smaller the amount of residue within each droplet and the smaller the resulting residue particle After the heating additional compressed air or nitrogen is introduced from the supply to prevent re condensation and to quickly move the residue particles to the WCPC NRM Model 8000 User Guide 8 Version 1 8 NRM 8000 How It Works How the WCPC Counts the Residue Particles The WCPC uses a patented technology to count residue particles Water is used as the working fluid and mixing or adiabatic expansion techniques are not needed A condensation nucleation technique deposits water on the residue particles to grow them to a size that can be detected with a conventional optical counting system The stream of residue particles is uninterrupted and follows a laminar flow path from the sample inlet to the optical detector The WCPC particle counting process is as follows 1 The residue particles are mixed with water vapor in the Saturator and
55. le Counter s EEPROM Electrically Erased Programmable Read Only Memory KCI Potassium Chloride ppt parts per trillion ppt rms ppt root mean squared psi pounds per square inch kPa Kilo Pascals PFA Perfluoralkoxy Ss VAC VDC Volts Alternating Current Volts Direct Current AC Alternating Current USB Universal Serial Bus mA Milliamperes NRM Model 8000 User Guide 1 Version 1 8 NRM 8000 Safety and Handling Procedures Safety and Handling Procedures Read this section to learn safe handling procedures for the NRM Model 8000 There are no user serviceable parts inside the NRM 8000 all repair and maintenance must be performed by a qualified service technician When working with the NRM 8000 Do not remove any parts from the instrument unless this manual tells you to do so Do not remove the instrument housing or covers while power is supplied to the instrument Safety Signals The following warning symbols and labels are used in the documentation and on the NRM 8000 Follow the procedures described in this manual to use the instrument safely Warning Warnings are used for the following purposes To indicate that unsafe use of the instrument could result in serious injury to you or cause irrevocable damage to the instrument To indicate that if you do not follow the procedures described in this manual you may damage the instrument To draw attention to important information ab
56. lumns in the example and on the screen represent the following Record Flow Atm Saturator Growth Optics Nebulizer Evaporator Type Press Temp Tube Temp Temp Temp Temp S 150 977 25 60 60 35 120 2 Note The values are raw analog values RTO Read Time On RTO reports the time the NRM was powered on RTO Command RTO Response hhh mm hhh number of hours the NRM is on mm number of minutes the NRM is on Example Command RTO Read Time on command Response 456 40 456 hours 40 minutes RV Read Version RV returns the instrument model number firmware version and serial number RV Command RV Response NRM 8000 v vv ranges 0 01 9 99 3 digits Ver v vv S N nnnn nnnn ranges 100 99999999 Example Command RV Read Version command Response NRM 8000 Version 1 06 Ver 1 06 S N 141 Serial 141 52 Version 1 8 Appendix D Firmware Commands Set Commands Set commands are used to set instrument parameters and data collection modes You will use the Set Mode SM command to control data collection The other Set commands described on the following pages are supplemental and intended for use by a qualified service technician You can also enter a Set command without a parameter to check the current setting The response displayed on the screen is the current setting of the parameter or mod
57. n the back panel 3 Using an adjustable wrench tighten the Swagelok nut one half turn past hand tight 4 Turn on the air or nitrogen at the source The incoming pressure must be regulated at 345 kPa 50 psi Connecting the Water Drain Most of the water entering the NRM 8000 drains away through the WATER OUTLET A venturi within the NRM 8000 forces waste water out through the drain tube Follow these instructions to connect the water drain 1 Remove the Swagelok nut from the WATER OUTLET on the back panel If you don t already have a nut connected to your tubing use this Swagelok nut 2 Insert the inch outside diameter plastic tube into the outlet s Swagelok fitting on the back panel 3 Using an adjustable wrench tighten the Swagelok nut one half turn past hand tight Connecting the Ultrapure Water Supply Water must be supplied to the NRM 8000 through a 4 inch diameter Teflon PFA tube specially adapted to fit the WATER INLET fitting To prepare the PFA tube for attachment to the WATER INLET fitting take the following precautions Make sure your hands are clean Do not touch the end of the water supply tube you may contaminate it To connect the ultrapure water supply follow these instructions 1 Cut the end of the tube evenly with a clean tube cutter 2 Place a Flaretek nut over the end of the PFA tube before attempting to flare the end 3 Flare the tube using either A heat flaring tool provided
58. nown amounts of Potassium Chloride KCI KCl in its dry form is an ideal compound for calibrating the NRM because KCI has a purity level gt 99 98 KCl is non toxic KCl has a density that approximates to silica one of the primary sources of nonvolatile residue found in ultrapure water During the calibration procedure KCl is added to ultrapure water just upstream of the NRM using a custom designed motorized syringe injection NRM Model 8000 User Guide 11 Version 1 8 NRM 8000 How It Works system The motorized syringe technique means the flow of water through the NRM is uninterrupted and the background impurity level is kept to a minimum A calibration curve is plotted using a minimum of nine calibration points because nine points are necessary to accurately calibrate the NRM over its operating range When the calibration curve is plotted 18 points spanning the NRM s operating range are loaded into the NRM s Electrically Erased Programmable Read Only Memory EEPROM Calibrating the NRM is a complex procedure contact Fluid Measurement Technologies Inc at 651 762 7762 for all service and calibration issues FMT Inc and its authorized distributors offer annual on site calibration An NRM 8000 calibration usually takes two days to complete NRM Model 8000 User Guide 12 Version 1 8 NRM 8000 Installation How to Install the NRM 8000 Installation Overview Following is an overview of the steps requir
59. operation Subjecting an undried undrained instrument to freezing temperatures To prepare the NRM 8000 for shipping follow these instructions 1 Turn off the water supply to the NRM 8000 and wait a few seconds for the water pressure to drop to zero confirm that the pressure is zero by looking at the Raw Particle Count and Water Pressure Screen described on page 21 2 Keep the NRM 8000 power turned on and the compressed air or nitrogen flowing into the AIR INLET on the back panel Note During this time the solenoid valve for the WCPC s water reservoir will repeatedly open with a characteristic clicking sound 3 Turn the BACKFLUSH Valve from NORMAL to BACKFLUSH Warning If you do not turn the valve to BACKFLUSH water floods the NRM and causes significant damage Remove the Flaretek nut and cap from the BACKFLUSH Flaretek fitting Disconnect the water line from the WATER INLET fitting Attach a second clean air supply to the BACKFLUSH fitting Prepare to collect the small amount of water that flows out of the WATER INLET fitting For example connect a piece of PFA tubing to the WATER INLET 8 Turn on the clean air supply and adjust the pressure to approximately 5 psi the air will clear the water out of the WATER INLET fitting 9 Allow the air to flow for about five minutes 10 Turn off the air supply and disconnect the air line from the BACKFLUSH fitting ND OO NRM Model 8000 User Guide 27 Version 1
60. out the operation and maintenance of the NRM 8000 Note Notes are used to indicate important information High Voltage Sticker A High Voltage warning sticker attached to the NRM 8000 warns you that uninsulated voltage within the instrument may be sufficient to give you an electric shock Do not make contact with any part inside the instrument Grounding Connection Sticker A Grounding Connection sticker attached to the NRM 8000 indicates that the NRM 8000 is connected to earth ground and cabinet ground NRM Model 8000 User Guide 2 Version 1 8 NRM 8000 Safety and Handling Procedures Laser Safety Warning A laser safety warning label like the one shown below is positioned on the insulating foam that surrounds the optical assembly The label warns of hazardous laser radiation if the optical assembly is opened and the instrument is powered on The optical assembly is not user serviceable LASER RADIATION WHEN OPEN CLASS 1 LASER PRODUCT 650nm SmW MAXIMUM OUTPUT Class I Laser Sticker When operated according to the manufacturer s instructions the NRM 8000 is a Class I laser product as defined by U S Department of Health and Human Services standards under the Radiation Control for Health and Safety Act of 1968 A certification and identification label like the one shown below is positioned on the back panel of the NRM 8000 CLASS 1 LASER PRODUCT THIS PRODUCT IS IN COMPLETE COMPLIANCE WITH 21 CFR 104010 AND 1040
61. page 51 RRN Read Record NRM data see page 48 RRS Read Record Status see page 51 RTO Read power On Time see page 52 RV Read Version see page 52 Set Commands GAS Set 4 20ma Span see page 54 S4Z Set 4 20ma Zero see page 55 SBS Set Nebulizer Set Point see page 55 SBV Set Nebulizer Flow Volume Scale Factor see page 56 SCT Set Calibration Table see page 56 SDO Set Detector Offset see page 58 SDS Set Dead time Span see page 58 SDT Set Detector Threshold see page 58 SDZ Set Dead time Zero see page 59 SE Set Evaporator On Off see page 59 SES Set Evaporator Set Point see page 59 SFS Set Flow Set Point see page 60 SFZ Set Flow Zero Value see page 61 SG Set Growth Heater On Off see page 61 SGS Set Growth Tube Temperature Set point see page 62 SL Set Laser On Off see page 62 SLS Set Laser Set Point see page 63 SM x t Set Mode x mode t sample time in tenth of second see page 53 SO Set Optics Heater on off see page 63 SOS Set Optics Temperature Set point see page 64 SP Set Pump On Off see page 64 SR x y Set 4 20ma Range x min PPT y max PPT see page 65 SS Set Saturator Temperature Controller On Off see page 65 SSS Set Saturator Temperature Set Point see page 66 SZ Set Auto Zero Function see page 66 NRM Model 8000 User Guide 47 Version 1 8 Appendix D Firmware Commands Read Commands Read Commands are used to display specific data values The values associa
62. r is always in the on condition when the instrument is first powered up SE Command SE x x 0 turns heater off x 1 turns heater on Response OK Response issued after parameters changed Example Command GEO Turns the heater off Response OK Command SE Response 0 Parameters not changed Current setting displayed on record SES Set Evaporator Temperature Set Point SES is used to set the control temperature set point for the evaporator The set point temperature is provided in 1 10 C This parameter is not stored and reverts to the default values on the next power up cycle the factory default value is 1200 120 0 C NRM Model 8000 User Guide Version 1 8 Appendix D Firmware Commands SES Command Response Example Command Response Command Response SES xxxx OK SES 1200 OK SES 1200 SFS Set Flow Set Point xxxx 0 1250 Response issued after parameters changed Sets the control temperature set point for the Evaporator to 120 0 C Parameters not changed Current setting displayed on record SFS is used to set the flow control set point which represents 0 15 L min internal aerosol flow for the flow control system The default parameter is used as a control point to control the internal vacuum pump The bit value of the absolute pressure sensor is also recorded 1 Enter a parameter after entering the command 2 The diffe
63. re Requirements See Hardware Software Requirements Space Requirement inari nean ne ai 15 Specifications See NRM 8000 Specifications Status Indicator Liehts ee 24 Status Sereen re eel tai 23 Status Screen Parametere 24 Text KE EE 40 Tools and Equipment See Setup Equipment Troubleshooting critica irc 43 Ultrapure Water Supply See Connecting UPW Supply Unpacking the NRM 000 14 UPW Pressure Chart 38 USB and Serial Ports oooooncocononnonconncnncnnonnnonnon nos 31 Warmup STE io 21 EE 4 Wai na ii Water Dram See Connecting Water Drain Water Flow Blockages See Removing Water Flow Blockages Water Inlet See Connecting UPW Supply Water Outlet See Connecting Water Drain Water Pressure See Adjusting Water Pressure WEB AAA 5 8 9 38 44 SN 20 Version 1 8
64. rential orifice pressure is compared to the control point and adjustments are made to the pump drive to maintain a match between the two 3 The absolute pressure value is continuously measured and used to correct the control point for changes in inlet pressure SFS Command SFS xxxx yyyy xxxx 0 4095 bit value for the current absolute pressure value recorded yyyy 2000 4095 optional absolute pressure bit value Response OK Response issued after parameters changed Example Command SFS 2312 3200 Sets the set flow set point to 2312 and the absolute pressure value to 3200 Response OK Command SFS Response 2312 3200 Parameters not changed Current setting displayed on record NRM Model 8000 User Guide 60 Version 1 8 Appendix D Firmware Commands SFZ Set Flow Zero SFZ is used to set the flow control zero value The issued parameter is used as the zero value for the flow system When issued without a parameter the command indicates the current flow zero value Note The SZ command is usually used to set the flow zero value therefore SEZ is rarely used SFZ Command SFZ xxx xxx 1 350 Response OK Response issued after parameters changed Example Command SFZ 164 Sets the flow control zero value to 164 Response OK Command SEZ Response 164 Parameters not changed Current setting displayed on record SG Set Growt
65. s the ppt Average data is displayed every five minutes Figure 16 on page 37 shows an example of a ppt Average chart NRM Model 8000 User Guide 36 Version 1 8 NRM 8000 Software Figure 16 ppt Average Chart E HAM bart Lontzen Serial Nini 143 a genee O 22 Jan Chat Cortule Nebulizer Flow Neb Flow The Nebulizer Flow chart displays the flow rate in mL min of ultrapure water through the nebulizer Figure 17 is an example of a Nebulizer Flow chart Figure 17 Nebulizer Flow Chart El NRMChart Instrument Serial Number 143 File About Chart Text Cal 3 2 0 T T r T r T 8 May 23 33 1 38 3 33 5733 Tras 9 733 Chart Controls 206 mL min 8 ppt ms bow AutoScale Neb Flow I Com1 ei Stop m me NRM Model 8000 User Guide 37 Version 1 8 NRM 8000 Software Ultrapure Water Pressure UPW Press The Ultrapure Water Pressure chart displays the ultrapure water pressure in psi over the data collection interval Figure 18 shows an example of an Ultrapure Water Pressure chart Figure 18 Ultrapure Water Pressure Chart E NRMChart Ira rsmar Serial Number 144 D 22 Jan 3 40 40 7 40 De Contra 254 pw T Autocad UPW Per 00w Concentration Conc The Concentration chart displays the raw residue count in particles cm from the WCPC It is primarily used by the service technician for troubleshooting purposes Figure 19 shows an example of
66. t Panel Description oocinicinonininnnnonononrorreronos 20 Front Panel Diagram ococcccccncnnnnnonancnnnnncnoncncaroreronos 20 Growth Tube coin isa 47 62 Hardware Requirements See Hardware Software Requirements Hardware Software Requirements ocios 33 How the NRM 8000 Work 5 11 Installation Procedures ooconocnconionnionconocincnnon 13 19 Laser Safina licita 3 Log Data 39 Measuring the Flow Raten 8 Moving Shipping the NRM 8000 See Shutting Down the NRM 8000 NReeopd ootd EEN See Data Records Nebulizer td lt t 8 Nebulizer Flow Chart 37 Nebulizer Flow Rate Gereen 23 Nitrogen Supply See Connecting Compressed Air Nitrogen Supply Nonwvolatile Residue 5 NRM 8000 Dimensions ooccccocononnnonnconnoconononnnonononns 15 NRM 8000 Packing List ee 14 NRM 8000 Gpechficatons ss ssssssssssssessesss eresse 45 Output 4 20 mA Packing List Power Supply ppt Average Chart 36 Ppt Chata tai 36 Raw Particle Count and Water Pressure Screen 21 Read Commands eccooccoconononnconccnnonnnonnco naco nonnnionon nos 48 Read Laser RE rir rinnan AR ais 50 Read Record Analog RRA ooocccicinconocononcnrornnons 50 Read Record Control RRC 51 Read Record NRM Data RRN 48 Read Record Status RR 51 Read Time On RTO coccocnncnccinnnnoninnnoninnnnnnncnnoncnonos 52 Read Version RV 52 Removing Water Flow Blockages 25 43 Repair and Maintenance Residue
67. t the operating condition of the NRM The values change as the NRM completes its warmup cycle The Status Screen is used primarily by qualified service technicians Figure 12 Status Screen oi z E E E KI ide Fi Table 3 on page 24 displays the parameters shown on the Status Screen a brief description of each and their normal ranges NRM Model 8000 User Guide 23 Version 1 8 NRM 8000 Operation Table 3 Status Screen Parameters Display Explanation Range Abbreviation Neb Nebulizer Temperature 35 3 C typical Optc Optics Temperature 60 1 C GT Growth Tube Temperature 60 1 C Sat Saturator Temperature 25 1 C Evap Residue Drying Temperature 120 5 C Photo Photometric Reading 0 8000 AP Atmospheric Pressure 990 millibars typical Flow Flow Rate through the WCPC 150 5 cc min Status Indicator Lights The Status Indicator Lights shown in Figure 7 on page 20 indicate the current operating status The Status Lights are as follows Unmarked light Flashes blue once for each water droplet that falls through the nebulizer flow rate detector A constant flashing blue indicates normal operation Status light A steady green glow indicates the instrument has warmed to its operating temperature and the laser is running at its normal operating power A slow blinking one blink per second indicates that the operating temperatures are not
68. ted parameters responses returned by the NRM 8000 and examples are given on the following pages The RRN command creates N records The other Read commands are supplemental and intended for use by a qualified service technician RRN Read Record NRM Data RRN returns the current data values in the N record format N records are collected every 60 seconds or whatever time period you have specified for the data collection interval and displayed in a series on the Text tab They can also be displayed if you enter the command RRN in the Firmware Command field RRN Command RRN Response N Record The N record displays 11 columns of data Example of N Record N 0 393 393 207 6 6 3117 97 3 15 20 04 Reading from left to right the columns in the example and on the screen represent the following Record Flag Real ppt Avg Particle Sample Live Counts type ppt Concentration Time Time N 0 393 393 207 6 6 3117 Photo Nebulizer UPW Flow Pressure 97 2 15 20 4 Note The values are raw analog values An explanation of the values can be found on page 49 When the N record is exported a Log record is created in csv format The Log record adds the date and time at the beginning of the record and the Root Mean Squared RMS value at the end Example N Record N 0 393 393 207 6 6 3117 97 3 15 20 04 NRM Model 8000 User Guide 48
69. the NRM 8000 A more detailed description is given in RRN Read Record NRM Data on page 48 S Record Status S records are displayed on the Text tab when you enter the command RRS in the Firmware Command field They display status information A more detailed description is given in S Record Status on page 51 A Record A Records display the current raw analog values on the Text tab when you enter the command RRA in the Firmware Command field They are used by qualified service technicians for diagnostic purposes A more detailed description is given in A Record on page 50 C Record C records display the current control values for flow and temperature and are displayed on the Text tab when you enter the command RRC in the Firmware Command field They are used by qualified service technicians for diagnostic purposes A more detailed description is given in C Record on page 51 NRM Model 8000 User Guide 46 Version 1 8 Appendix D Firmware Commands Appendix D Firmware Commands Table 8 is a quick reference of all the firmware commands More detailed information about each command can be found on the referenced pages Note The commands are not case sensitive Table 8 Firmware Commands Command Explanation Read Commands RL Read Laser see page 50 RRA Read Record raw Analog see page 50 RRC Read Record Control see
70. triment to our customers satisfaction our service policy is to give prompt attention to any known problems If you discover any malfunction of the NRM 8000 contact FMT Inc at 651 762 7762 USA If you are outside of the USA please call your authorized distributor NRM Model 8000 User Guide ii Version 1 8 Table of Contents About This Mandala EEN 1 INN 1 Scopeot User Manta rinda EEEE a 1 DENSA E ANE Art Metre errata eer Cera tre oa 1 Safety and Handling Procedure ee 2 SE 2 CE Declaration f CONO ia A EEEE E E a e iaai 4 A AN 4 How the NRM 8000 Works siicscccccsessiccesescssescasssesccstcssesevebesneusesacaccsocessedssseescusstesveadscesseraienseanseze 5 Measuring the Flow Rate cccceesssssseseseseseeseeenenssesesesesnsnenenessssscececeesesescececeesenssesesesesneneneneneaseees 8 How the Nebulized Droplets are Dited iii scccisesaseterovescenensadsanasysneseopiecvebensusdhiepedsneoreecions 8 How the WCPC Counts the Residue Parttcdes nono nonn nono noranos 9 Particle Detection Efficiency EEN 9 Calibrating the NRM 8000 it e 11 How to Install the NRM 8000 sccsssssssssssscsescssssecssccescscssessassssssessccsssacsecssasencssessacsass 13 Installation Overview ccccccccccesscccsssceessecssscecssececssscecsaecesssecsseeeesaececsseceseeecsseeeeaecesseecsseeeenes 13 Wnpacking CDe 14 Equipment You Need A ea rade 16 Setting up the RMS 16 Connecting the Compressed Air or Nitrogen Supply cccscccccssessteteseses
71. ts contain residue concentration in ppt and particle concentration accumulated over the reporting time which defaults on power up to 60 seconds The N record also reports a long average value that is an average over the six previous ppt values in the N record See Appendix C page 46 for more information about the N record NRM Model 8000 User Guide 31 Version 1 8 NRM 8000 Data Acquisition Communications Parameters All serial communications within the NRM use the following communications parameters Baud Rate 115 200 Bits Character 8 Stop bits 1 Parity None Communication protocols used in the N record All data communication is preformed through ASCII based character codes All multi field responses are comma separated values CSV All input commands and output responses are terminated with a carriage return CR All input Line feeds LF codes are ignored NRM Model 8000 User Guide 32 Version 1 8 NRM 8000 Software NRM 8000 Software The NRM 8000 is a stand alone instrument and can operate without being connected to a computer the display gives a real time readout that can be used to monitor performance However using the NRM 8000 software allows you to collect data over time to monitor trends and incidents Using the NRM 8000 software you can Collect data on a local computer attached to the NRM 8000 with either a standard RS 232 serial cable supplied or a standard USB
72. tsneneesssssesseeeeenenenees 17 Connecting the Water Drainer tico calcita indian tas 18 Connecting the Ultrapure Water Supply EEN 18 Connecting the Power Supply and Adjusting the Water Inlet Pressure EE 19 Operation InStUCON Sa Eeer 20 The FOME A A aT pea 20 DISPLAY DAET nO iii KEES SREL estada 21 Concentration ppt and Nebulizer Flow Rate Screen EE 21 Raw Particle Count and Water Pressure Screen ccccssscesscssecssecssecstecsseesceesseeeesecesseseesscessenaes 21 Residue Concentration O cas 22 Nebulizer Flow Rates ENEE 23 St at s Screen EE 23 Status Indicator Lights ee ett ee E 24 A A Paine A ANNAN 25 Removing Water Flow Blockages EEN 25 How to Shut Down the NRM 8000 for Moving or Shipping ccccoccoocnconononncnnnnninnocacnaoncnosa 27 Data Acguisiti t nina A AN A A 29 420 mmalliamip mA OUTRO Va a Deals 29 Relay and 4 20mA Output Commechor EEN 30 Common en Te E 30 DtatUs Rela visu tna lis 30 USB and Serial Communication Ports cccccccsccssesssessseesseescccssecssecsssceseceseceseseeesseesesseeeaes 31 Data Records da dates 31 Communications Parametros 32 NRM Model 8000 User Guide iii Version 1 8 NRM 8000 Software EEN 33 Hardware and Software Requirements mita an aida 33 How to Install and Start the Zettuengg eege Sue eege 33 How to Begin Data Collection cccccccssseescseseesenetesesesesssnsesessscsceceeenenssesesesesnensnenessassceceeeeeeenenens 34 Software OPS a id 35 Chart TA AAA a eee es 35 D
73. ue at reporting time NRM Model 8000 User Guide 49 Version 1 8 Appendix D Firmware Commands RL Read Laser RL returns the laser power in and the current in milliamps RL Command RL Response pc p power 0 100 c current in milliamps 0 300 Example Command RL Read Laser command Response 97 35 Laser power 97 Current 35 mA RRA Read Record Analog RRA returns the current raw analog values in the A record format This command is intended for diagnostic use only by a qualified service technician RRA Command RRA Response A Record The A record displays 17 columns of data Example of A Record A 3227 3213 310 894 1616 4095 2832 2401 563 95 16 2047 820 821 1057 1863 Reading from left to right the columns in the example and on the screen represent the following Record Flow Absolute Water Evaporator Nebulizer Float Type Control Inlet Pressure Temp Temp Switch Pressure Pressure Sensor Sensor Transducer A 3227 3213 310 894 1616 4095 Internal Laser Laser Photo Dead Time Saturator Growth Reference Power Current Temp Tube Voltage Temp 2832 2401 563 95 16 2047 820 Optics Nozzle Cabinet Temp Pressure Temp Drop 821 1057 1863 Note The values are raw analog values 50 Version 1 8 NRM Model 8000 User Guide Appendix D Firmware Commands RRC Read Record Control R
74. ur choice That value will become the new data collection interval in seconds Log the NRM 8000 Data to a File You can specify a location to store the NRM 8000 data Select Log from the File menu Choose the directory where you want the data stored and a file name for the stored data select Save and return to the main screen Note Data is stored as comma separated values csv for easy manipulation by Microsoft Excel Collect Data To begin collecting data click the Start button The first data point is shown on the left side of the screen after the data collection interval has passed Set the Autoscaling Autoscaling is set as the default and allows you to fit the data to the chart Without autoscaling you may have data peaks that go off the chart To turn off autoscaling follow these instructions 1 Click the autoscaling field on the main screen 2 Use the UP and DOWN arrows to adjust the y axis scale NRM Model 8000 User Guide 39 Version 1 8 NRM 8000 Software Text Tab Firmware Command field The text tab allows you to display the data in text form instead of in chart form The N records are collected at the specified data collection intervals and displayed in a series An example of the Text tab showing a series of N records is shown in Figure 20 below For more information about the N record see Appendices C and D The Text tab also displays responses to the Firmware READ and SET Commands These responses are re
75. within their normal operating range If this condition persists after you have waited 30 minutes contact Fluid Measurement Technologies Inc at 651 762 7762 Flow light A steady green glow indicates that the current sample flow rate is within 10 of its nominal value of 150 cm3 min A rapid flashing indicates that the flow gt 110 of its nominal flow If this condition persists after you have waited 30 minutes contact Fluid Measurement Technologies Inc at 651 762 7762 A slow flashing indicates that the flow rate has dropped below 90 If this condition persists after you have waited 30 minutes contact Fluid Measurement Technologies Inc at 651 762 7762 Light off indicates that the pump is switched off Laser light A steady green glow indicates normal operation If there is no green light the laser is malfunctioning In that situation contact Fluid Measurement Technologies Inc at 651 762 7762 NRM Model 8000 User Guide 24 Version 1 8 NRM 8000 Operation The Back Panel The installation procedures are performed at the back of the NRM 8000 The back panel is shown in Figure 6 on page 17 Components of the back panel include the following The AIR INLET WATER INLET WATER PRESSURE and WATER DRAIN fittings For details see How to Install the NRM 8000 on page 13 The Data Communication ports on the left side of the back panel For details see Data Acquisition beginning on page 29 The CPC DRAIN and NEBULIZER D

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LiquiTrak® Nonvolatile Residue Monitor Model 8000:User Manual