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Process Eye Pro V5 User Manual

1. With the Auto View to Front checked clicking on a tab at the bottom of the status pane will bring all those recipe s windows to the front In the status window the tabs for the running recipes are displayed The uppermost tab is the selected recipe Alarms L No name COM2 Categoryack EventTet Liid0 200115 367 Connec Filament Mo 1 i Wizard Message Filament Status On Stor In this example Bar chart High Vacuum Status Scanning Barchar OFE j G E Data Files ata With Disk Store is the selected recipe Ste Filament supply change M Always Show latest Alarm s Acknowledge All Barchart High Vacuum with Disk Store KECE Done Clicking on the Analog Interactive tab o causes that recipe to become the active Category Ack EventText reci e rid Wizard Message Connected p a Filament Mo 1 5 Filament Status On i Data Files data ta i Status Scanning Analogl a a A A L SE LE M Always Show latest Alarm s Acknowledge All CRG ries Barchart High Vacuum with Disk Store KRAGE Done Process Eye Professional V5 SP104008 100 August 2005 116 Process Eye Analog Interactive Becpe Edt Yew window teo Oyina x 6 92 e naar on a mules anes If Auto View to Front is enabled the views for the Eh Ceol 2210 1 LM32 023223 Li Anaiog X M ae dm 3 r active recipe are always on top Ee aller The Analog I
2. Y axis scale within the new recommended bounds Expand the Y axis scale to include the new recommended bounds Use the new recommended bounds F Save all the settings as a new or modified view definition Cancel Process Eye Professional V5 SP104008 100 August 2005 121 11 1 4 Window pull down menu lew Trend Window The Window pull down menu is where you can add a new AE emai trend view or arrange the view windows you already have im Bring Recipe To Front Cascade Recipe fe Tile Recipe Horizontally fT Tile Recipe vertically 1 Barchart With Trend Interactive 1 As Barchart wo Barchart With Trend Interactive As Trend New Trend Window Trend Display Pane and Channel Properties Clicking on new trend window will bring up the Trend Set the channels to be associated with this Trend View Individual panes display WE their own selection of channels from a common list of 15 items Properties window for a new view Fill In the Dages that 7 follow and the new view will be created in addition to any Channel Display Name Measurement Add Pane views that a ready exist Mass 2 00 Hydrogen lt lt Auto gt gt Mass 4 00 Mass 12 00 Mass 14 00 Mass 15 00 Mass 16 00 Mass 17 00 Mass 18 00 Mass 28 00 Mass 32 00 Mass 36 00 Mass 40 00 Helium lt lt Auto gt gt Carbon 12 lt lt Auto gt gt Nitrogen 14 lt lt Auto gt gt Edit Channel gt gt Hydrocarbon 15 lt lt Auto g
3. admin Press Alt T ab to show hide this dialog user UserName New User Password E Process Eye Professional V5 SP104008 100 August 2005 129 13 3 Process Eye Watchdog The process eye watchdog utility monitors the performance of the Process Eye program If it detects a problem with Process Eye it will attempt to restart the program Ensure that Process Eye is not running Then select Process Eye Watchdog from Start MKS RGA Applications Tools The watchdog will start Process Eye to configure the watchdog double click on the icon in the i taskbar Process Eye Watchdog Monitor The watchdog can be temporarily disabled by selecting the M This watchdog application continually checks that the second option box You will have to confirm that you are the M a intone poems Pelee currently logged on user of the Windows session using your Options normal Windows logon name and password f Enable all the automatic monitoring features that check for the corect operation of Process Eye However the program will automatically restart when Windows a E a ere reboots or if Process Eye is restarted or when you re select C Temporarily disable monitoring Resume monitoring again if automatic mode Process Eye restarts Mote it is preferable to restart Process Eye by re selecting the ot eee eee On many installations you can check the box to have Windows POE ase OS NRE Me Version 1 0 Buld40 reboot if the watchdog fails to resta
4. al Line Thickness The thickness of the plotted line can be changed to aid visibility Change Color Colour The colour of the plotted line can also be changed Select a colour then click OK to apply it to the channel Update Scan Update Scan Changes made to the channels properties are not immediately made to the scan When all changes required have been made click Update Scan The new settings will then be applied It will be apparent that the accuracy and scan mode apply to all the scan channels However individual channels can use different detectors or electronic gain settings If you use more than one value for these properties EasyView groups channels that have common settings together Otherwise readings are taken in the same order as the channels are displayed You do not have to have the mass values in ascending order Indeed sometimes it is an advantage not to do so Peak jump mode is a fast acquisition mode The RGA may not have time to recover if adjacent channels require it to move from a very high partial pressure to a very low one Data quality may be improved by thinking carefully about the mass sequence Passing over a large reading can be as harmful to data quality as taking a reading at that mass You may improve data quality by adding one or more throw away channels after the RGA has scanned over a large peak Process Eye Professional V5 SP104008 100 August 2005 86 8 6 Disk Store Disk Store is available
5. pages not shown in this manual 3 MKS RGA Software Setup Install Location The program and data files will be installed in the locations that you specify f The application software will be installed to the location shown below If you want to choose a different location edit the text accordinaly Install Location Program Files Spectra Choose a location where data that is shared by all users will be stored Ic Process Eye Browse lt Back Cancel Help 3 MKS RGA Software Setup Installation Features You can install either a full or limited set of features Choose one of the following installation types Complete install This installs the full suite of programs You will be able to connect to AGA instruments acquire data in real time and review data stored on this or other Offline install This installs only the components necessary for reviewing data acquired on other computers With this type of install you will not be able to acquire real time data using this computer lt Back Cancel Help MKS RGA Software Setup MKS recommends that you keep your operating system software up to date This is usually the best way to protect the computer against infection by malicious viruses On the following pages you will have the option to upgrade one or more operating system components for which newer versions are available The service packs to perform these updates are al
6. High Mass Resolution 28671 Ej gt Extract 0 130 112 0 i gt 1 il Mi Main Ad eraura ALLEL LILE E Done Pressure in mbar The above screen is displayed by clicking the Analog Mode button in the Mode toolbar and selecting the Tuning button in the Page Selection toolbar The Analog view is displayed and the interactive analog control toolbar will appear in the status window Acquisition Control du bh BOs fh 32 Accuracy5 EA 1 333e 002 mbar F 1 333e 002 mbar Use this toolbar to change the scan parameters each of the functions are explained below i al Start Mass To change the start mass of the scan either enter a number directly into the box or click on the arrows to increase or decrease the mass number Note that the first mass cannot be less than 1 and that the first mass plus the mass span cannot exceed the maximum mass allowed by the control unit i soale Mass Span To change the mass span of the scan either enter a number directly into the box or click on the arrows to increase or decrease the mass span Note that the first mass plus the mass span cannot exceed the maximum mass allowed by the control unit ccuracy5 Accuracy Scan accuracy determines the amount of averaging carried out for each reading A high accuracy number provides a clean scan but increases scan time The accuracy ranges available are from 0 to 8 A 2 Points per peak The number of measurements each full mass is divided in
7. Mass 12 Carbon 12 BarChart1 Mass 14 Nitrogen 14 BarChart1 Edit Channel gt gt Mass 15 Hydrocarbon 15 BarChart1 Mass 16 Oxygen 16 BarChart1 Mass 17 OH group BarChart1 Mass 18 Water BarChart1 Mass 28 Nitrogen BarChart1 bee Mass 32 Oxygen BarChart1 Mass 36 Argon 36 BarChart1 Mass 40 Argon BarChart1 Mass 44 Carbon dioxide BarChartt C Mass 64 00 Photoresist 64 lt lt Auto gt gt C Mass 69 00 Fluorocarbon lt lt Auto gt gt lt j Checked channels that are not acquired are automatically excluded cancel LLR Properties for Continuous Mass Scan View KAKS C Use the data acquisition properties to set the X axis properties First Mass fi Last Mass 50 Annotations Mass cursor Show elapsed time in addition to scan number If the view is a swept measurement the Swept Measurement View Properties dialog is displayed i MV Minor ticks F Show real time in addition to scan number Initial Axis Properties Use the data acquisition properties to set the Y axis scale M 4 or S decade Log scale depends on acqu naccuracy Use the following explicit settings Current maximum value is 1 3e 004 Max value 0 0001 33 Min value fi 33e 008 V Log scale l Restrict these values to the maximum bounds of the acquired data Grid Minor ticks Subsequent Axis Autoranging Strategy If the bounds of the data subsequently change during the lifetime of this view C Leave the Y axis unchanged Force the
8. Programs MKS RGA Applications Tools Administrative Assistant If you are installing the software for the first time this completes the first administrative part of the procedure You will complete the entire installation when you run the software as the RGA User for the first time MKS strongly recommends that you create limited user privilege accounts for users of the RGA software This procedure is detailed in the following section Process Eye Professional V5 SP104008 100 August 2005 18 1 3 Creating User Accounts 1 3 1 Overview The following section describes how to create a new local user and assign local user rights using the Windows XP environment as a guide This is not common for all Windows operating systems advice from your I T representative or MKS Spectra should be sought if you are unsure of how to continue or the PC is part of your company network You will need to be logged on to the PC with an administrative account to create the RGA User account with assigned User rights If your PC is on a network the RGA User will require a Domain account Seek advice from your IT Staff if this Is the case 1 3 2 Create the RGA User Account 2 LABO17 Click on the Start button right click on the My Computer entry and select Manage from the menu Internet My Documents Internet Explorer 7 W gt E mail 4 My Recent Documents gt 3 Outlook Ex press 3 GJ My Pictures f eR D Windows Mo
9. wi fhe al For trend views Key Display makes the legend key visible or invisible lie Key Position moves the legend key either to the left of the trend or above the trend Process Eye Professional V5 SP104008 100 August 2005 61 5 4 Saving the View Properties Process Eye Professional Only You have already seen that EasyView maintains one set of Barchart and trend view properties which are always applied automatically Process Eye Professional allows you to create multiple views and save them to disk so that you can apply them at run time or to recipes when you create the recipe To save the new settings check the save settings box On a trend view this is at the bottom of the Time Axis page On a swept measurement it is at the bottom of the property dialog Save all the settings as a new or modified view definition Note You need v 5 21 to do this for a swept measurement This will then bring up the Save View Save View Type in a name for the view by default the file that will store the properties is given the same name with a SI v Save current annotation details extension M Optional Components If you want to give the file a name that is different from ie hie etc latoyewtan the name of the view click on the file Browse button and fava 9 manually rename the file If you want a caption to appear on the graph as a title type it in the Optional Screen Title text box Name by which this v
10. Chapter 1 Software Installation Insert the CD ROM in the drive if it does not auto run click the setup exe application in the root folder From the CD browser select the option to install the software This will launch the Administrative Assistant that will guide you through the complete installation process 1 1 Administrative Installation Using the Administrative Assistant J MKS RGA Software Setup MKS RGA Software The Administrative Assistant contains full context sensitive on line help Administrative Assistant You can access this help at any time either by clicking the Help button or simply by pressing the F1 This assistant will guide you through the steps that are function key on your keyboard required to install your selected RGA software on this computer You are strongly advised to close all applications that are currently running before you proceed Click Next to continue i Cancel Help 22 MKS RGA Software Set eel You must agree to the terms of the software license Licence Agreement You must agree with the licence agreement below in order to proceed in order to proceed with the installation The license terms are printed in the preface of this manual MKS INSTRUMENTS ELECTRONIC END USER LICENSE AGREEMENT FOR MKS RGA APPLICATION SOFTWARE This MKS Instruments MKS End User License Agreement accompanies the MKS r RGA Software and MKS r RGA Demonstration Software products and rela
11. Displays the elapsed time from the start of the recipe Show real time in addition to scan number Displays the real time governed by the PC clock Both the above options cannot be enabled at the same time Annotations To edit the Annotations icon click on Annotations Annotations Annotations Stream Mame Display Any annotation streams defined in the recipe will be listed check the display box to show the annotation on the view To change the icon select one of the shapes from the list Click OK to return to the properties page Check or uncheck the streams to show hide them on the view Double click the shapes list to change the display shanescalour of the curently selected stream Cancel 5 1 2 Initial Y axis Properties On a swept measurement the Y axis is always shown as pressure the units of which are determined in Process Eye preferences Use data acquisition properties to set Y axis properties Creates a view with the Y axis properties governed by the measurement on which the view is based 4 Or 5 decade log scale Changes the Y axis from a linear scale with its origin at zero to a logarithmic scale with a minimum dependant on the accuracy of the measurement At the higher accuracies the software will display 5 decades of pressure while at lower accuracies it will display 4 The full scale pressure will be calculated automatically based on the current electronic and detector gains Use the following explicit
12. Help The Help button launches the RGA Device Manager Help application at its home page but you can access context sensitive help at any time by pressing the F1 key on your keyboard Additional registered Connection If you have previously set up access rights to a control unit that cannot now be discovered the unit s details are indicated in the additional registered connections panel The Details button inside this panel gives more information Process Eye Professional V5 SP104008 100 August 2005 31 Typically if you no longer use the control unit s referred to you can remove these connections since unused registered connections increase the time taken for Process Eye Professional or EasyView to start up 3 2 The Details Menu The items on the details menu are accessed either by clicking the Details button on the right hand side of the window or by right mouse clicking the item in the control unit list Serial Shared Ready Serial No preconnection Ready Fixed View auto discovery log More details Configure v My Computer IP Configuration Refresh FS strument that was not Details es Help F1 you expected to find Click Troubleshoot to launch the Hardware rd Serial Number Name Address Type Access Status w LM76 90805001 MY Plus Local RS232 Serial Shared Ready wx LM76 90805005 1000P 10 10 54 200 Serial No preconnection Ready Details v LM101 00205003 HPQ2IP sconne
13. 100 7 gt above expressed as a percentage is ESE aes ee The Hardware Information dialog is displayed This details the hardware resources available to the calibration recipe The Ion Source Selection dialog is displayed and presents the opportunity to choose which ion source configuration the calibration recipe is to be associated with It also shows the details of any previous calibrations defined for this instrument and ion source configuration If the RGA has an inlet system you will have a choice of which inlet you assume is active when specifying the pressure values in this recipe definition When correctly selected click Next The Calibration Mass and System Pressure dialog is displayed Enter the following variables into the text boxes Mass to be used for Faraday calibration the mass used to base the calibration upon It should be a mass that you know has a reasonable peak height when you run a barchart scan Usually you will simply enter a process chamber pressure value in the edit box However if your hardware has an inlet system and you have configured the hardware to be able to calibrate the inlet you will have to enter an upstream and a downstream pressure Enter the percentage contribution of the partial pressure of your selected mass to the gauge pressure entered above For example you know that the contribution of mass 28 to an air spectrum is about 78 Process Eye Professional
14. 1to 2 of 2 Man A Analog Interactive Done Pressure in mbar 1 Title Bar The Title Bar shows the application name and the name of the active recipe or EasyView connection The Close Minimize and Maximize button on the right hand side of the title bar operate in the normal manner 2 Menu Bar The MKS RGA software is no different from other Windows programs all the available functions are available via the menu bar 3 Views Windows The Views windows are where the data acquired in the RGA software is displayed All the windows for all the recipes or connections are displayed here but in the graphic just two are shown a bar chart and a trend associated with a single RGA connection 4 Toolbars The Toolbars appear as one or more rows of buttons below the menu bar and immediately above the recipe list and views windows Process Eye and EasyView have many buttons in common however Process Eye does have additional buttons that are not available or do not apply to EasyView By default the buttons are distributed between several toolbars Each of the toolbars may be hidden by selecting View Toolbars from the menu bar and un checking those you wish to hide The default setting is visible for all toolbars 5 Recipe List Process Eye Professional only Process Eye is a recipe driven RGA application A recipe specifies in complete detail the actions that the RGA is to take to acquire the data you need it can manipulate the data make decisio
15. Instruments Connections menu item This dialog shows eemks all the control units to which you can ee connect If the list is empty refer to No Instruments Currently Connected a chapter 2 Ready Pressure in mbar Provided that your vacuum hardware is at a pressure that is safe for the RGA to be switched on you are ready to start using your RGA This pressure is usually a value lower than 1e 3 torr mbar 1e 1 Pa If you are ready to do so double click the item in the Recipe List window titled Barchart with Trend Interactive Now proceed with section 4 3 MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 41 4 2 The Main Screen for EasyView To start the main EasyView application program click on Start Programs MKS RGA Applications EasyView The main EasyView window is displayed If you have just one RGA and you have exclusive access to it EasyView will connect immediately and the screen on the following page will be displayed You are ready to start acquiring data If you specified that you wanted either Recipe view or e shared or exclusive access to more than x o b S 2E naasna le Es E e ahir a la a one RGA in the hardware installation this screen will show all the accessible instrument details EasyView Loader SerialNo Name Status Last Used IP Address tad ae are listed click Edit Connections and check that Process Eye is connected to the Instrument Ser
16. Screen Elements Title Bar Control Unit List Details Configure Troubleshoot Help Additional registered Connection 3 2 The Details Menu 3 3 The Configure Menu 3 4 The Hardware Set up Utility 3 4 1 General 3 4 2 Trips 3 4 3 Analyzer 3 4 4 Inlets 3 4 5 Analog I O 3 4 6 Digital I O 3 4 7 Delays 3 4 8 Tools 3 4 9 Commit Changes Chapter 4 Getting Started with Process Eye Professional or EasyView 4 1 The Main Screen for Process Eye Professional 4 2 The Main Screen for EasyView 4 3 Running a Barchart with Additional Trend View 1 Title Bar 2 Menu Bar 3 Views Windows 4 Toolbars 5 Recipe List Process Eye Professional only 6a Status Windows Process Eye Professional 6b Status Windows and Control Panel EasyView 4 3 Saving Data to Disk 4 4 Adding Annotations Chapter 5 Displaying the Acquired Data Overview 5 1 Editing the Barchart or Analog View Properties 5 1 1 X Axis Properties Minor Ticks Show elapsed time in addition to scan number Show real time in addition to scan number Process Eye Professional V5 SP104008 100 August 2005 Annotations 5 1 2 Initial Y axis Properties Use data acquisition properties to set Y axis properties 4 Or 5 decade log scale Use the following explicit settings Restrict these values to the maximum bounds of the acquired data Grid Minor Ticks 5 1 3 Subsequent Y Axis Auto Ranging Strategy 5 2 Editing the Trend View Properties 5 2 1 Editing a Trend Channel Type Editing a mass channel Editing a
17. The control unit has a table of software delays that control the length of transition states for example how long to wait when switching between a Faraday and multiplier detector General Trips Analyzer Inlets Analogl O Digitall 0 Delays Tools The internal scanning and measurement delays are optimised at the factory and normally will not require adjustment You should only change these settings if you have been advised to do so by MKS personnel You should never normally need to change the delays from Chana the standard factory defaults However in exceptional circumstances an MKS support engineer may recommend changes to one or more of these standard settings This topic is not covered any further in this manual OK Cancel Process Eye Professional V5 SP104008 100 August 2005 39 3 4 8 Tools Using the features of this tab you can set options that apply to the application itself and you can perform tasks such as back up and restore of control unit settings LM101 00205003 Hardware Setup General Trips Analyzer inlets Analog 0 Digitall 0 Delays Tools If you want to bypass the password screen you can set this Options option using the checkbox RUABNING Tis Cal cleo e take cheroes toa pacman Usually in the context of Process Eye or EasyView you do not a ae cnet have a choice of pressure units they default to the option The units for pressure readings are common throughout
18. The first option on this page is to choose the data Choose between Normal Real mode and Demonstration mode n ape acquisition mode Usually you will select the first option as indicated The software has a demonstration mode that allows it to run with virtual RGA s If you wish to run the software in this mode choose the second option Otherwise to run real hardware you are recommended to select the first option Normal real mode The software will connect to real hardware but will ignore any virtual RGA s installed on your system i 0 Demonstration mode The software will connect to virtual RGA s installed or created on this computer It will ignore all real RGA s if they exist Mixed mode The software will connect to both real and virtual RGA s This mode is intended mainly for recipe authors and experienced application developers Note if you change the setting the new setting will not take effect until the next time you log on to this computer coed __ In Normal real mode the software connects to real hardware to acquire real RGA data In Demonstration mode the software connects to any number of Virtual RGA s that although they exist purely in the computer s memory behave exactly like a real instrument If this option is selected the software will only connect to virtual RGA s Note strictly this is true only for Windows XP with the firewall enabled Where no firewall is in p
19. V5 SP104008 100 August 2005 100 When all the parameters have been entered correctly click Next Instrument Calibration Wizard ej Finally the Run time Options dialog is displayed Run time Options Set up the optional features that will apply when this calibration is run in Process Eye If you normally use peak centered bar chart PTN measurements be sure to check the Acquire data Fun he EE E en thw from the peak centre only checkbox Display the following message and wait for the or to amend the ssure value s P anea a oe a It is quite common to select the Apply to both Set the pressure as close as possible to the value indicated Enter the actual z in the edit box then press START fi la ments ch eck box a Iso sorties Select the required options and click Finish to complete T Acquire data from the peak centre only rather than find the peak maximum the calibration definition Apply the results of this calibration to both filaments Switch the filament off when the calibration is complete On O e j o oo Firstly you will be asked to confirm that you want to define a new calibration and then given the option to run the newly defined calibration Recipe Wizard Process Eye Professional G You are about to define a calibration recipe for Head 1 Are you sure that you want to construct this recipe If you choose Yes the recipe will be stored on the ed instrument server Choose No to lea
20. Wizard can launch the RGA Device Manager application You use this for all aspects of hardware set up This application is described in full detail in chapters 2 and 3 If you are installing the software for the first time by working step by step through this manual it is easiest to select Skip hardware auto detection at the present time You will learn how to install hardware in the next chapter 21 Setup Wizard Pressure Units Choose the pressure units to be used throughout the full software suite Process Eye Professional can calculate and display pressures in any of the following units Select one of Pascal C milliT orr omei Heo _ Setup Wizard Custom File Location Define a root folder for data recipes and views Each user of this computer stores their own data in a folder within their Personal Folder Root storage location Process Eye Change Actual location C Documents and Settings Administrator My Documents Process Eye Event Log Cancel Help Setup Wizard Setup Wizard has enough information to complete the installation When the SetupWizard finishes what would you like to do next Run Recall to review existing data files l Run Recipe Wizard to create new recipes If you think the settings that you have entered are correct click Finish lt Back Cancel Help Process Eye Professional V5 SP104008 100 August 2005 If the administrator
21. a consistent way each time it is used Although there may be times when the RGA expert needs to run the RGA interactively the main purpose is to perform repetitive tasks so that RGA data can be used to diagnose inconsistent output from a process A recipe does not have to make use of an RGA One of the supplied recipes demonstrates this point However the most likely scenario is that you will run recipes that do use your RGA to acquire and display data Since recipes are effectively small programs in their own right they can do almost anything that your computer can do They can acquire data from other sensors they can communicate with other applications or with your Factory Management system they can manipulate the data that they acquire and make decisions based on that derived data or display the derived data in a variety of ways Fortunately you do not have to be a programmer to create these recipes because Process Eye Professional comes with the Recipe Wizard application that will write the recipe for you in response to your input into a sequence of wizard style queries If you are a VB programmer you can extend these wizard generated recipes further Process Eye Professional will even run compiled recipes written in VB or Visual C although a description of the techniques to do this is beyond the scope of this manual Process Eye Professional uses the concepts of a scan made up of one or more measurements Measurements are typic
22. and resolution settings j Where a multiplier is fitted you can reset the multiplier detector M kee a done ai erkin sensitivities Depending on your choice of options you may be able to reset either the multiplier sensitivity or gain to the factory default 3 4 4 Inlets This tab will only be relevant if you have an RGA with an inlet system Where this is the case you must configure each inlet so that its inlet factor pressure reduction factor is correct If you obtained the complete system from MKS you will have been informed what the inlet factors for your system are 1M101 00205003 Hardware Setup ar Select an item from the drop down list that describes as General Tips Analyzer Inlets Analog 0 Digtal1 0 Delays Tools closely as possible the inlet that is fitted for example a x10 Configuration orifice Inlet System None In the pressure reduction box enter the actual reduction factor to use which may be a more precise figure for example Base inlet Pressure reduction 1 0 6 i Process Chamber direct ig J Additional Inlet If you want to be able to calibrate the inlet at run time check Fal the Allow calibration box Additional Inlet 2 SSS ee 2 Please be aware that calibrating an inlet requires that you know both the upstream pressure and the ion source pressure of the RGA analyser Cancel 3 4 5 Analog I O This tab displays the configuration of the Analog I O connector on
23. applicable the Commercial Computer Software and Commercial Computer Software Documentation are being licensed to U S Government end users A only as Commercial Items and B with only those rights as are granted to all other end users pursuant to the terms and conditions herein NOTICE TO USER THIS IS A CONTRACT BY INSTALLING THIS SOFTWARE YOU ACCEPT ALL THE TERMS AND CONDITIONS OF THIS AGREEMENT Unpublished rights reserved under the copyright laws of the United States MKS Instruments Inc 90 Industrial Way Wilmington MA 01887 MKS Microvision Microvision IP e Vision e Vision Plus HPQ2 HPQ IP EasyView and Process Eye Professional are trademarks of MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 4 Contents Licence Terms and Conditions I Getting Help II Introduction Process Eye Professional Overview EasyView Overview Topics Covered by this Manual An RGA as a Source of Data Connecting Control Units III Software Installation Pre requisites Chapter 1 Software Installation 1 1 Administrative Installation Using the Administrative Assistant 1 2 Administrative Options 1 3 Creating User Accounts 1 3 1 Overview 1 3 2 Create the RGA User Account 1 4 User Set up Chapter 2 An Introduction to the RGA Device Manager 2 1 Hardware Management Overview 2 2 Finding Undiscovered Control Units 2 2 1 The Troubleshooting Wizard Chapter 3 The RGA Device Manager and Hardware Set up 3 1 The Main
24. calibration with a factor in v5 21 onwards Values in dum coenae TERE excess of one increase the pressure relative to the manufacturer s TA PEANT calibration and values less than 1 reduce it Use an average of 1 j readings Apply calibration factor 1 Total Pressure Analog Input ping 10 signal and 2 return The dialog also displays the connector pins used by the gauge When a gauge is used for rollover correction you can modify or reset the algorithm by clicking the Algorithm button This is an advanced feature that is not described further in this manual You should only ever use non default settings if instructed to do so by MKS support personnel If you do not have an external gauge all the four inputs and one output are available for use within your data acquisition recipes The General Purpose I O panel indicates the pins that can be used to connect I O to the control unit 3 4 6 Digital I O This tab lists the inputs and outputs that have been enabled on the Digital I O connector on the rear of the control unit LM101 00205003 Hardware Setup aie By default there are no I O channels enabled but you can set General Trips Analyzer Inlets Analogl O Digital l O Delays Tools individual channels to be configured as inputs or outputs by Configuration clicking the Change button There is 1 connected digital input and 1 connected digital output Inputs on PB Outputs on PA OK Cancel This
25. click the Connect button or double click the row in the list that applies Each connected control unit will have its own tab at the bottom of the control panel Click on the relevant tab to see the information pane EasyView LIMY6 90805001 Ag Atus m i be Instrument Status Idle Active Filament 1 Sensor Identification Standard Open Source Filament Status OF Detector Type Dual Faraday and multiplier Total Pressure Mia Sum of Scanned Masses NIG Multiplier Status Locked Maximum Mass 200 AMU RF Configuration Smart Head RF Control Unit Use Standard Ras External Hardware Mo extemal hardware Embedded Yersion wE 00 fie EasyView MV Plus Pressure in mbar Process Eye Professional V5 SP104008 100 August 2005 71 Chapter 7 Using Process Eye Professional 7 1 Recipes in Process Eye Professional Recipes are fundamental to Process Eye Professional The software does nothing until you give it a recipe to run Indeed rather than thinking of Process Eye Professional as RGA software it is more accurate to describe it as software to run recipes These recipes are fully fledged programs written in a version of Microsoft Visual Basic that is used by millions of people worldwide every day because it is found on or used to generate more than half of the active pages displayed on the World Wide Web Process Eye Professional is aimed at users in a production or process environment where it is essential that the RGA does its work in
26. eae Barchart Analog Data list Then set its Minor Tick Marks ia Bii J properties from the Ea Zero Line relevant size Axis Lines aI i font color and I Label Font style controls Use Restore to Defaults to reset to the factory settings Trend Key Font not shown Process Eye Professional V5 SP104008 100 August 2005 114 10 3 Other Preferences The Preferences menu can be accessed from the Recipe pull down menu Recipe Instruments View Window Help Run ctrl Rk amp iF im ip Edit Ctrl J New Ctrl M Standard Views y mbar Torr Print Setup T Auto View to Front Exit Demo with No Instrument Easyview Show Recipe Error Message Boxes Allow Demo Test Data Instrument Tuning Interactive Leak Check Interactive De l Lome baker abn Graph Settings 10 3 1 Units of Pressure Process Eye Professional supports the following pressure units Pascal mbar Torr and mTorr The internal units used by all the applications in the RGA suite are Pascal and all internal pressure values are stored in these units You use the set up applications to set the pressure units for all the applications however each application can also set its own units depending on the preference set here Pascal is simply converted to the required unit before displaying the information In addition all user variables that are labeled as pressures
27. elected to have each log on user define their own personal settings you may choose the units that you would like to use If the administrator elected to have each log on user define their own personal settings you may choose the location for recipe and data files You must choose a location somewhere beneath your personal My Documents folder The Event Log button sets some advanced settings relating to the maximum file size for the Process Eye master log file This file records information such as when the application runs when hardware was calibrated and when recipe errors are found The default is to limit this file size to 100 Kb The last page of the User Set up Wizard offers you the choice of running one of the main applications directly when the installation completes If you have not yet installed your hardware leave these checkboxes unchecked When you click the Finish button the selections that you have made in the Wizard are installed 22 If you selected recipes to be installed a report history of all the recipes that the Wizard has installed to date Date __ Description Files including those installed on the current session is TB August 2005 Get Started v5 Example Recipes Moy 2004 Ta of 13 Recipe Installation History displayed If you have not yet installed your RGA hardware please continue with the next chapter of this manual MKS Instruments Pro
28. in any of the EasyView scan modes and can be accessed by clicking the button shown T What to store options Start disk storage From now onwards starts storing when you click What to store Where to store OK Buffering scans 1 15 10 2003 11 39 46 to 106 15 10 2003 11 41 10 Start Storing From buffered scan allows you to select a prior From now onwards scan number or time so you can store data that C Fombutteredscan 1 atime 15 10 2003 1 38 46 EasyView is holding in its history buffer If you enter a Frith Soin scan number the time will be adjusted to match If you enter a time the corresponding scan number will be shown C at time a Note The buffer is reset if any changes to the current scan are made otherwise somewhere between 500 and 1000 prior scans are stored in the buffer Likewise you can select to continue storing indefinitely or to finish at one of the scans in the history buffer You cannot set a particular future scan or time Where to store options Folder enter the path or browse to the folder where ore TA the scans are to be stored The default path is z Data EasyView ControlUnitName Name Daa oO o A How to make up the file name Na me C Just use the folder name specified Enter a name for the saved data file by default this is C Append date time information to the name data but it can be anything you choose Append incrementing number to the name C Documents and Se
29. it It will always appear in the recipe list window If you want to access the features described in this chapter double click the recipe item once for each control unit that you want to connect to If there is more than one available instrument you will select the one to use for the current instance by double clicking it You will not be able to connect to any instrument that is already running a recipe Important Note Several of the MKS RGA control units maintain a set of six separate ion source and tuning parameters In keeping with its simpler approach to hardware control EasyView maintains one set of ion source and tuning parameters for each control unit that apply throughout the application In order to maintain compatibility between EasyView and Process Eye Professional the EasyView product sets all six of these sets of values to be the same Process Eye Professional maintains the six named combinations of ion source and tuning parameters individually so that you can change the behaviour of the control unit by switching from one set of settings to another If you are using Process Eye Professional to run the EasyView recipe you will have an extra drop down list box in the Mode toolbar described below You use this to select the active configuration Process Eye Professional V5 SP104008 100 August 2005 77 8 1 EasyView Toolbars There are two EasyView toolbars the Mode Toolbar is the horizontal toolbar across the top of the EasyView s
30. mail sorting office along with hundreds of other letters for the good residents of the city The street name and company name identify which postman has the job of delivering your letter When he delivers it to the mail room of your chosen future employer someone identifies it as needing to be routed to the human resources department Your IP address system is very similar The 192 168 0 0 network identified the street where the company was located The entity ID eg 250 identified the specific company in that street When it was delivered the letter was routed to a particular department in IP addressing terms a particular port numbered between 1 and 65535 Just as someone may have been anticipating your job application so software can be configured to listen for messages on a particular port The RGA data server listens for clients that wish to connect The developers of the internet foresaw that providing a unique address for everyone in the world would be cumbersome and unnecessary Unlike the postal system where everyone might want to contact everyone else they saw that most of the time it would only be necessary for the residents of one street to communicate with each other You do not need or want everyone in the world to talk to your RGA So there can be many thousands of 192 168 0 0 networks around the world so long as they are not wired together you will never know whether they exist or not If you do need to get access
31. mass on more than one measurement You can specify for each channel your preference for the measurement from which it should obtain its data For example you have two Bar chart measurements Bar chart 1 that is a mass 1 to 50 Faraday measurement and Bar chart 2 which is a mass 1 to 100 multiplier measurement If the channel has a mass value of 4 the data would be taken from Barcharti because that is the first measurement that contains a mass with a value of 4 This will be true even if the peak height on mass 4 is SO small that it is lost in the noise level and mass 4 in multiplier is a good stable peak If the value is mass 84 the data would be taken from Barchart2 even if the peak is so large it is off scale This is because Barchartz2 is the first measurement that contains mass 84 Process Eye Professional V5 SP104008 100 August 2005 54 Editing a user channel If the channel type is set to Channel then the Value box is greyed out as these channels are variables defined by their names The channel will be selected based on the name in the Channel Name text box and the measurement name in the Measurement Name text box Usually the measurement selection will be Auto because it would be very rare for your channel names to be duplicated across multiple measurements see the comments above in editing a mass channel Editing the channel display To change the colour of a trend line click on the Colour list box Colo B Th
32. of implied warranties or limitations on how long an implied warranty may last so the above limitations may not apply to you 5 Governing Law and General Provisions This Agreement will be governed by the laws of the State of Massachusetts U S A excluding the application of its conflicts of law rules This Agreement will not be governed by the United Nations Convention on Contracts for the International Sale of Goods the application of which is expressly excluded If any part of this Agreement is found void and unenforceable it will not affect the validity of the balance of the Agreement which shall remain valid and enforceable according to its terms You agree that the Software will not be shipped transferred or exported into any country or used in any manner prohibited by the United States Export Administration Act or any other export laws restrictions or regulations This Agreement shall automatically terminate upon failure by you to comply with its terms This Agreement may only be modified in writing signed by an authorized officer of MKS 6 Notice to Government End Users The Software and Documentation are Commercial Items as that term is defined at 48 C F R 2 101 consisting of Commercial Computer Software and Commercial Computer Software Documentation as such terms are used in 48 C F R 12 212 or 48 C F R 227 7202 as applicable Consistent with 48 C F R 12 212 or 48 C F R 227 7202 1 through 227 7202 4 as
33. off the audio tone in the interactive leak check recipe Re Zero button is used to take a new zero reading during a leak check measurement Process Eye Professional V5 SP104008 100 August 2005 111 10 1 7 Customizing Toolbars You can customize the toolbars as required You can choose which Toolbars are visible or you can create your own toolbars with your own choice of buttons Process Eye Professional Main From the view pull down menu select Toolbars Recipe Instruments View Window Help ra Toolbars Status Bar Recipe List Window Show Instruments Show Dates Recipe Hame Analog Interactive This will bring up the Toolbars dialog Check the box for the toolbars you wish to have displayed Checking Cool Look will change the appearance of the toolbars Toolbars To create a new toolbar click on the New button Toolbars Menu bar iw Default iw Scan Navigation Wl Chart Display Customize i Trend Display Iv indow Arrangement Feset nteractive Scan if Show Tooltips if Cool Look New Toolbar tal Give the new Toolbar a name and click OK a This will create a blank Toolbar that you can then customize test Cancel Customize From the toolbar dialog box click the Customize button to bring up the customize dialog Toolbars Commands Toolbars V Show Tooltips New ea ERA Iv Cool Look Reset i Chat Display mre Click the Command tab to see the button
34. on how the calibration recipe was Follow the instructions in the box below The Wizard is ready to launch N written you may or may not need to enter the the calibration procedure actual chamber pressure Set the pressure as close as possible to the value indicated Enter the actual j j j j Seay He nae ange TART If you have inlets that are being calibrated you will have to enter values in both entry boxes These should be the pressures upstream and downstream of the inlet orifice Actual value of Process chamber pressure mbar Actual value of Analyzer chamber pressure mbar When yoy are sure that the conditions are corect for calibration to begin click Start rea A number of factors are measured while the calibration routine is running These include the peak maximum peak centre and stability Once the calibration routine has completed click fal Calibration Wizard cE Next to view the results Calibration result When the calibration is complete a report is generated detailing the previous calibration factor as well as the new one Calibration succeeded The stability test result was good The graphic shown here is from a multiplier ee calibration At the end of a Faraday calibration you a een have the option to apply either the new sensitivity calibration is 5 51e 004 Ajmbar at 683 Volts factor or to apply the factory default value If you choose Cancel no changes are made and the control unit reverts to its p
35. print button on the tool bar Edit Ctrl New Ctrl Preferences Standard Views Exit 12 1 1 Print Setup Selecting Print Setup from the Recipe pull down menu will bring up a standard Windows print properties dialog Print Setup From here you can configure the printer for paper size orientation etc Printer Name hp deskjet 920c Copy 1 Status Ready Type hp deskjet 920c Where LPT1 Comment Faper Orientation Size Letter e Portrait ke SOUICE Automatically Select C Landscape Network Cancel Printing a View Click on the view you wish to print so it becomes the active view Then either click on the Print button or select Print from the recipe pull down menu If you click on the print button the print will start immediately with the default settings If you select Print from the recipe pull down menu the standard Windows print dialog appears giving you the option to change the default printer settings You can only print swept measurement views and trends other views within Process Eye cannot be printed If you require a hard copy of these other views use the Print Screen key on the keyboard Information contained on a trend printout The key at the foot of the printout shows the colour of the line the channel name and the value of the trend line at the start and finish of the trend printout There is no title or foot note feature in the print facility You can however give th
36. py Last Scan views the newest scan acquired in the current recipe run 10 1 6 Interactive Scan Navigation Toolbar itt New Head LM76 00399001 LM76 003990 Ly Analog Accuracy 5S ido 1 333e 004 mbar F 1 333e 004 mbar ful 1 4 50 re J The Interactive Scan Toolbar becomes active when interactive recipes are running to allow you to modify the scan parameters let New Head Li 76 00399001 LM76 00399C Control Unit Text Box is an information only box giving the details of the control unit the recipe is currently using l Analog Scan List box gives the name of the currently active measurement Accuracy 5 Accuracy drop down list allows you to make changes to the accuracy of the current scan z Electroni in dr wn list allows you to select the pre amplifier gain B tasseoznes E ectronic Gain crop do y prena SE F 1327 004 mba Detector drop down list allows you to switch between Faraday and SCEM detectors u 4 b First Mass text box allows you to select the start mass of the scan You can either type in the required number and press lt Enter gt or use the scroll arrows to scroll to the required start mass w 50 Mass Span text box allows you to select the mass span of the scan You can either type in the required number and press lt Enter gt or use the scroll arrows to scroll to the required mass span re Restart Scan button will force the scan to restart Audio button is used to switch on
37. run the RGA application suite 4 1 The Main Screen for Process Eye Professional To start the main Process Eye Professional program click on Start Programs MKS RGA Applications Process Eye Professional If you are already in Recipe Wizard Process Eye Professional can be launched directly by clicking on the Launch Process Eye button or by selecting Recipe Run Process Eye from the menu bar g The main Process Eye window is displayed TEE If you followed typical practice and specified care NESS SSeS ee ee eee eee ee that you wanted exclusive access to one or i more RGA s in the hardware installation this screen will show the connected instruments details ujip pP TE Click to select an instrument or double cick to expand ist Pressureinmbor a Process Eye Professional Main aoe ge Yo yn tsp Tf you did not specify exclusive access to rae einem s ZE AEn uso ee eee Ae an RGA during hardware installation the screen will be shown without any instrument details See Section 3 3 n r Analog Interactive Barchart High Vacuum with Bachar Interactive achat Low Vacuum With Barchart Wih Trend Interact Demo With No Instrument EasyView Instrument Turing Interactive Leak Check Interactive Peak Jump Interactive However provided you have shared access to at least one RGA you are ready to start acquiring data You can check the RGA s to which you have access by clicking the
38. running for as well as the time Minor time ticks When checked the time axis will display minor ticks To edit the Annotations icon click on Annotations ATU CATT ta Any annotation streams defined in the recipe will be listed check peta the display box to show the annotation on the view To change oan a ii the icon select one of the shapes from the list Click OK to return to the Properties page a e Check or uncheck the streams to show hide them on the view Double click the shapes list to change the display shane colour of the curently selected stream Cancel Elapsed time origin properties Although you will commonly start acquiring RGA data as soon as the recipe starts this need not necessarily be the case Sometimes data acquisition is delayed and sometimes asynchronous data becomes available long before the first RGA data scan The elapsed time origin t 0 can be set to be the time that the view is created or the time that a particular measurement starts or a time of your choice Data can still be plotted prior to the origin if it is available the x axis prior to elapsed time t 0 is shown in red f view creation time With this option checked the origin of the elapsed time is the time when the view was created The elapsed time origin Time of my choice feature is also available f Time of my choice 15 08 2006 of 09 31 sc You can set the origin to be any time you require the elapsed time displayed becomes
39. sepia en New scan information You define your own Sample Trend View Import Edit Delete Set 4s Default On the save page you can then either keep the same List Name and File Name in which case the original file will be overwritten or you can choose to either change the List Name or the File Name Changing the names effectively creates a new view that was based on an existing one 5 5 3 Importing a View You can import a view from a different computer To import a view select Import in the Manage Views dialog Manage Views List of currently specified Standard Views Ehee Sample Swept View Mew Sample Trend View Import The Import view dialog appears Edit Delete Set As Default Process Eye Professional V5 SP104008 100 August 2005 64 Import View Look in gt Views E Sem Ramp SI w Files of type view definitions SI Cancel Browse to the view definition file SI v that you want to import and click the Open button This will then take you through the View Creation Wizards as described earlier but with the various settings already filled in with the settings from the imported file On the save page you can either keep the same List Name and File Name in which case a copy of the definition file will be generated in the Process Eye Professional Views directory Note If the file is already in this directory then it will be ov
40. the rear panel of the control unit LM101 00205003 Hardware Setup a If as in the example shown the control unit is one with a pressure gauge attached select the type of gauge from the list in the top panel General Trips Analyzer Inlets Analog 1 0 Digital 1 0 Delays Tools Rollover correction Obtain Total Pressure reading from External software input Internal lon Gauge Granville Phillips Micro lon Gauge High pressure mode Pascal Note that only HPQ2S RGA S are equipped with an external Granville Phillins Micro lon Gauge High pressure mode mB ar Grane Praks Hic loni Ge High ees riode Tai gauge for rollover correction All other instruments will show not applicable in the gauge type list Properties Algorithm General Purpose 1 0 Available 16 bit 10 to 10 analog inputs 3 Available 12 bit 0V to 10V analog outputs 1 Pin Information Input 1 5 and 13 Input 3 11 and 3 Input 2 12 and 4 Input 4 10 and 2 Output 1 pin 15 relative to OY on pin 8 If enabled at run time inputs are measured by default every 100ms and an average of 10 readings reported Cancel Process Eye Professional V5 SP104008 100 August 2005 37 The Properties button shows a dialog in which you can change the acquisition frequency accuracy The software automatically converts the ie a l aT ae pa ese oc voltage to a pressure according to the manufacturer s calibration You ee can change this
41. the recipe list and click on the Run Recipe button Interactive Disk Store starts disk store in an interactive recipe that has not been configured to store to disk automatically Disk Store Pause is used to pause an interactive disk store to un pause click again Close recipe halt a recipe that is currently running The Close Recipe button will not be available unless a recipe is running and the Status window has focus click in the status window to give it focus Also the recipe needs to have been configured to include the ability to end the recipe prematurely You can also close a recipe by clicking on the close button in the Status pane 3 Fel Lock used to lock the application by using a user specified password Recipe Wizard launches the Recipe Wizard program to enable you to edit recipes Recall launches the Recall program to allow the review of stored data Setup Wizard launches the Setup Wizard to allow changes to the software or hardware installation Having launched the Wizard you will have to close the RGA application because you cannot make changes to the hardware software setup while the application is running Print prints the data from the active data window Add Annotation used to add annotation at a particular time It will be displayed on all the recipe s views Add Annotation at Selected Time used in conjunction with a trend to mark a particular event ir im ip Calibration used to define Faraday and
42. the suite of chosen in the main set up programs They can be changed with the application Setup Wizard Tools Create a recovery file for this control unit by backing up the Back up settings displayed on all the tabs in this dialog to disk Restore settings from a previously backed up file Restore Create a ML report file that details all the settings in the control Report unit Cancel The tools available are Back up save all the control unit settings to a file Restore restore all the control unit settings using a previously saved back up Report create a complete documented report on the current settings You can save this to disk and or view it using your browser Please note that the back up and report options act on the settings currently displayed on the pages of the dialog If you have made changes to the dialog and you do not commit these changes to the control unit by clicking the OK button the action will not reflect the true state of the control unit 3 4 9 Commit Changes You commit any changes to the control unit by clicking the OK button All the configuration settings are downloaded to the control unit and it will then reboot If you want to leave the control unit unchanged click Cancel Process Eye Professional V5 SP104008 100 August 2005 40 Chapter 4 Getting Started with Process Eye Professional or EasyView Note Once the software has been installed the CD is not required to
43. the time that has elapsed from this point This option will set the elapsed start time origin to be the time that a particular measurement was created 5 2 5 Key Legend properties M None Select None to remove the key legend from the trend Top legend Otherwise select either Top or Side to position the key legend accordingly 0 Side legend Once the changes to the view settings are complete click on the Finish button to apply the changes or check the Save Settings check box to bring up the Save View dialog described in 5 4 Note the save settings check box Is not available on EasyView installations nor is it available on Process Eye installations where the administrator has elected to install a restricted user interface Process Eye Professional V5 SP104008 100 August 2005 60 5 3 Using the Toolbar Buttons to Change View Properties You can change many visual properties without the need to use the properties dialogs simply by selecting the view and clicking on a button in the toolbar 4 Minor Ticks turns minor ticks on or off for the Y axis Grid turns the grid on and off for the Y axis Log Lin changes between log and linear mode for the Y axis Display Days switches on and off the Display Days function True Elapsed Time switches between displaying the Real Time and the Elapsed Time X Axis Minor Ticks turns minor ticks on and off for the X axis reereE X Axis Scroll Bars turns scroll bars on and off for the X axis
44. to the outside world you do it through a particular address on your network called a gateway The gateway manages the connection between you and the outside world Process Eye Professional V5 SP104008 100 August 2005 131 So how do you choose an IP address for your control unit First find out the IP address and subnet mask for your computer Write this down Confirm from the description above which part of the address is the network part and which part normally the final number is the identifier on the network If there are other computers on the network you need to know their identifiers so that you do not inadvertently use their address for your control unit Once you have chosen a unique address for example 192 168 0 50 MKS recommends that you physically label the control unit with the address you have chosen and then run the RGA Device Manager application that you can use to program the new address MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 132
45. user channel Editing the channel display 5 2 2 Adding a Trend Pane 5 2 3 Configuring the Trend s Y Axis Y Axis Scale Properties Y Axis General Properties Y Axis Auto range Properties 5 2 4 Configuring the trend time axis Time axis properties Elapsed time origin properties 5 2 5 Key Legend properties 5 3 Using the Toolbar Buttons to Change View Properties 5 4 Saving the View Properties Process Eye Professional Only 5 5 Managing Views Using View Manager Process Eye Professional only 5 5 1 Creating a New View 5 5 2 Editing a View in View Manager 5 5 3 Importing a View 5 5 4 Delete a View in View Manager 5 5 5 Setting a Particular View as the Default Chapter 6 Managing RGA Connections 6 1 Connection Information 6 2 Adding a Connection 6 3 Removing a Connection 6 4 Refresh Connections 6 5 Export Connection Information 6 6 Exit Connection Dialog 6 7 Hardware Information in the Status Pane Process Eye Professional only 6 7 1 No Instruments Connected Window 6 7 2 General Information Window 6 7 3 Digital IO Window 6 7 4 Remote Vacuum Controller RVC Window 6 7 5 Cirrus Window 6 8 Hardware Information and Connections in the Status Pane EasyView only Chapter 7 Using Process Eye Professional 7 1 Recipes in Process Eye Professional 7 2 Launching a Process Eye Recipe 7 3 Closing a Process Eye Recipe 7 4 Creating a New Recipe 7 5 Editing an Existing Recipe 7 6 Recipe Information in the Status Pane 7 6 1 Recipe Information View in t
46. will also be converted from Pascal to the chosen unit Pascal cae aye r ajs EE mbar A tick in the selection indicates the currently used pressure unit nd All pressure axes will also be labeled with the current unit mTorr Rl Rarchart High Vacuum with Disk Store 1 As Rarchart In this example you can see that the Y axis of the chart is labeled in mbar a 2 a te g a 40 4 Scan 193 Pascal To change this to Torr click on Torr in the selection mbar mTorr Process Eye Professional V5 SP104008 100 August 2005 115 If any recipes are running the peak heights will immediately change to represent this new measurement unit RS Barchart High Vacuum with Disk Store 1 As Barchart i i The axis scale and label will only change however when the recipe is shutdown and restarted x o te t o E 2 a W a The Maximum Peak Height information will only change when Process Eye is shutdown and restarted 10 3 2 Auto View to front mbar Torr mTorr Mae ub view Eo Fron Allow DemnoalTest Data Pascal Show recipe error message boxes Graph Settings When the RGA software is running all the views are displayed in the client area between the toolbars and the status window When more than one recipe or connection is active it may be that some windows are covered by views from a different recipe
47. write your own client software or to integrate RGA s into your existing system control software MKS provides a software development kit SDK for application developers as a separate product Connecting Control Units The Microvision Plus and HPQ2 smart head control unit connects to the PC using a serial interface that may be RS232 or RS422 RS485 is not supported Microvision Plus IP and HPQ2 IP control units connect via a standard network interface The serial RS232 connection on the rear panel of these instruments should not be used for general data acquisition On very rare occasions it may be necessary to use it for diagnostic purposes The e Vision and e Vision Plus control units connect exclusively using a standard network interface For the greatest security and reliability of data MKS recommends that networked instruments are on their own physical network and that the computer that controls them have a dedicated separate network card However this may not always be practical or desirable and it is quite possible to run these control units on a business or office network The control unit must be one suitably configured to run with Process Eye Professional or EasyView If the control unit was supplied with another software package or a previous version of Process Eye or was not obtained directly from MKS or one of its agents or distributors please contact your local MKS Spectra facility for upgrade instructions Process Eye Profe
48. you have just taken delivery of your control unit from MKS it will have been configured correctly at the factory You should not need to use this utility in order to get you started This utility is the means by which you modify the hardware configuration of your control units You will need to enter a password in order to make changes to control units However if you leave the password box blank you may view all the settings without changing them The configurable options are broken down into eight pages of settings shown below The eight tabs are General Trips Analyzer Inlets Analog I O Digital 1 O Delays Tools 3 4 1 General LM101 00205003 Hardware Setup Siz The General tab displays many fixed items of information General Trips Analyzer Inlets Analog 0 Digitall 0 Delays Tools including the embedded software versions The three user Control unit and Sensor configurable settings are the name assigned to the control Serial number LM101 00205003 at 10 10 54 253 tore Delais P unit the mains frequency and the filament type You may EAE a E also use this page as another way to download new r 20728F embedded software to the control unit Embedded software Control Unit CORE V 5 00a Shia Be sure to set the mains frequency to the correct value for MEE coe ne alain ce tea _ Download your locale Selecting the wrong value can give rise to Options unwanted noise on the spectra acquired Friendly name Am
49. 0 RR s 4 eee 5 2 1 Editing a Trend Channel You can edit a channel either by double clicking it or by highlighting the channel and then clicking the edit channel button This will bring up the Channel Properties dialog which allows each channel to be set up independently Channel Properties Entry for channel 1 Type Mass k Value Optionally enter a measurement name or leave blank for aubo selection when this view is Used lt lt Autor gt tiA Channel Name or Alias Argon External Total BarChart 3 BarChartz Atomic hydrogen Hydrogen Helium Carbon Nitrogeniz CH group Atomic nitrogen CH3 group Methane Cancel Type The channel can be one of two types selected from the pull down list Type Mass A mass type channel is a partial pressure measurement of a mass scanned by one of the measurements in a recipe Process Eye Professional V5 SP104008 100 August 2005 53 A channel type channel is any channel other than the channel defined in the recipe These channels are user variables that can be defined either in the recipe wizard or through script and are not necessarily partial pressures The associated list of known gases relating to mass numbers is contained in the text file C Program Files Spectra RGA Applications Workstation Common Gases txt This may be edited or added to in order to give an accurate description of the users system Editing a mass channel If the chan
50. 0 16072002 11 36 47 Mo Time Specified You can also select the recipe and then click the Close button in the r main toolbar All Record 1 of 1 Pressure in mbar NUM The start up recipe associated with the Main tab can never be closed L7 5 00501010 No name COM1 LM75 00501010 MicroVision Filament No 1 Filament Status On OU Satine Filament 4 1 b Active Source Base Pressure RGA Status Scanning BarChartl sy Barchart With Trend Interactive Filament Status AAP Sensor Identification HPQ Detector Type Faraday Total Pressure NZA Tunable No Maximum Mass 80 AMU RF Configuration Smart Head Control Unit Use Standard RGA External Hardware None Embedded Version V3 62m Barchart With Trend Interactive Process Eye Professional V5 SP104008 100 August 2005 73 4 Creating a New Recipe Either select Recipe New from the main menu bar or right click on the Recipe List and choose New from the pop up menu This will launch the Recipe Wizard Recipe Definition Wizard If you do not want to see this introductory page in future check the box Process Eye Professional Data Recipe Wizard Recipe Wizard has full on line context sensitive help that you can access either by clicking the Help button or by pressing the F1 function key Each page of the wizard has its own help information Recipes contain a complete set of instructions for setting up hardware and acquiring data Recipes can p
51. 0600013 amp asy View AGA amp lul IN be H 41 gt yy Acquisition Control da 1 f u 200 i Peak Center v 2b 6 667e 007 mbar v F 6 667e 007 mbar v P3 e e Instrument Status Scanning Barchart Active Filament 1 Sensor Identification Standard Open Source Filament Status On Detector Type Faraday Channel Plate Total Pressure NJA Multiplier Status OFF Maximum Mass 200 AMU RF Configuration Smart Head Control Unit Use Standard RGA TUNING ii z Main ELGA ALLS LLURS Done Pressure in mbar The Barchart view is displayed and the interactive Barchart control toolbar will appear in the status window Acquisition Control tl 1 I BO i Peak Center Accuracy 5 E 41 3336002 mbar F 1 333e 002 mbar p2 Use this toolbar to change the scan parameters each of the functions are explained below i 1 ajel Start Mass To change the start mass of the scan either enter a number directly into the box or click on the arrows to increase or decrease the mass number Note that the first mass cannot be less than 1 and that the first mass plus the mass span cannot exceed the maximum mass allowed by the control unit d 50l Mass Span To change the mass span of the scan either enter a number directly into the box or click on the arrows to increase or decrease the mass span Note that the first mass plus the mass span cannot exceed the maximum mass allowed by the control unit in Peak Center Scan Mode The scan mode i
52. 08 100 August 2005 28 2 2 1 The Troubleshooting Wizard RGA Communications Troubleshooting Wizard Clicking the Troubleshoot button on the RGA Device RGA Communications Manager dialog starts the Troubleshooting Wizard Troubleshooting Wizard This Wizard can diagnose the most common reasons for hardware connection failures It can either fix the problem or advise you on the steps you should take to do so Click Next to continue Cancel Help RGA Communications Troubleshooting Wizard Enter the serial number of the instrument that you want Identify the control unit to troubleshoot to locate The unit is identified by its serial number Be sure to enter it carefully You do not want to re configure the wrong instrument The serial number is prefixed with LM and is labelled on the end of the control unit nearest the analyzer Please be sure to enter the serial number corectly If you have used the troubleshooting wizard with this Select one Enter the 8 digit number or pick instrument before you will find its Serial number from the list a previous number from the list J pesa already present in the drop down list LM76 is a Microvision Plus instrument Clear History coct_ Heo _ If you chose a serial instrument you will have to enter the COM port number where the serial cable is connected If you chose a network instrument choose from one of these options RGA Communications Troubleshooting Wizar
53. 2 14 56 34 Note Test Note p 00 05 00 Elapsed Time You can add as many annotations as required and when using Recall to review the data they will be displayed in the same way Process Eye Professional V5 SP104008 100 August 2005 47 Chapter 5 Displaying the Acquired Data Overview Views are the graphs that display the RGA data The software provides many features that allow you to personalise and customize the way that this data is presented EasyView and Process Eye Professional both have the same presentation capabilities However EasyView takes the simple approach that the way you set up a particular view is the way that you will want it to look next time Process Eye Professional lets you define multiple views the appropriate one for a particular task can be called up at any time Views come in two different types The first is a Swept Measurement View This is a display of partial pressure versus mass There are two types of swept measurement view the Bar chart shown below where there is a single bar shown per mass Fal Barchart With Trend Interactive 1 As Barchart Sel a Pressure mbar _ 40 45 450 ae E jak a a jak cL Scan 135 Process Eye Professional V5 SP104008 100 August 2005 48 The alternative is the Trend view where a variable versus time can be plotted El Analog Interactive As Trend Wass 7 00 bass 14 00 Hydrogen Hitrogen 14 T 092 007 T 84
54. 8 13 52 58 Value Existing sensitivity 2 18e 004 4 mbar gt lt MESSAGE Time 2003 10 28 13 53 05 Value Filaments have been on for 2 8 minutes gt lt MESSAGE Time 2003 10 28 13 53 08 Value Gain 100 fsp 9 16e 005 mbar RGA Zero is 60 1 ppm of full scale reading gt lt MESSAGE Time 2003 10 28 13 53 10 Value Reading 2 91e 007 mbar gt lt MESSAGE Time 2003 10 28 13 53 10 Value Peak center calibration 6 23e 004 A4 mbar gt lt MESSAGE Time 2003 10 28 13 53 29 Value Peak maximum calibration 6 55e 004 A mbar gt lt MESSAGE Time 2003 10 28 13 53 48 Value Calibration succeeded The stability test result was excellent gt lt MESSAGE Time 2003 10 28 13 53 57 Value Calibration applied EasyView New factor 6 55e 004 A mbar gt Details of all calibrations are logged in the application log file at one of the following locations Process Eye Logs Process xml or Process Eye Logs Process log or EasyView Logs Process xml or EasyView Logs Process log When the calibration runs the software checks the stability of the partial pressure by taking ten separate readings and calculation the standard deviation sigma of the sample If the value of 3 x sigma as a percentage of the first reading taken is Less than 1 the stability is excellent otherwise if it is Less than 3 the stability is good otherwise if it is Less than 10 the stability is acceptable otherwise the stability is po
55. A mbar at 695 Volts The new calibration is 6 68e 002 A mbar at 699 Volts gt lt MESSAGE Time 2003 10 28 13 58 32 Value Calibration applied Easy View New factor 6 68e 002 A mbar gt Details of all calibrations are logged in the application log file at one of the following locations Process Eye Logs Process xml or Process Eye Logs Process log or EasyView Logs Process xml or EasyView Logs Process log MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 95 8 11 Degas Note Not all MKS control units support the degas capability Click the Degas button on the Page Selection toolbar to reveal the ion source degas settings Ea aoa T EasyView LM76 90803004 KIOUOS lA duke GES Be bead i Ramp Period LD Start Power wm 15 af Duration gg al l seconds Maximum Power Period Power Om 55 af Duration 240 af seconds Tuning Recovery Period During the recovery period the ion L source conditions will be returned to Curation T an seconds normal Start Bele EasyView VIO00P j Pressure in mbar When EasyView degasses an ion source it ramps up to full power over a user defined period of time It then maintains that power for a further period When degas is complete it resets the ion source conditions to normal and waits for a period of time during which the temperature of the source can stabilize You enter the values that determine this power pro
56. Assistant at a later time when you are more familiar with the product These features are not part of the EasyView package 3 2 MKS RGA Software Setup Administrative Options Security Features g The Watchdog is a system tray application that Process Eye is equipped with several advanced security features A continually checks that the main Process Eye application is running correctly If it detects that it is These features can enhance the security of your RGA software Choose the security features not it can shut it down and restart it that you would like to enable If this is the first time that the RGA software has been installed the checkboxes show the recommended options for your setup code The Restricted user interface does not include Activate the Process Eye Watchdog to monitor the continual effective operation of the menus and buttons for changing or launching recipes idata acquisistion software Install a restricted user interface without the ability to create or launch recipes Select this option only if the RGA Product Group has supplied you with fully automatic recipes You can prevent users from Cha ng i ng reci pes usi ng f Disable the abilty to save changes to recipes when using the editing tools the reci pe ed iti ng wiza rd Apply a password protected software lock to the computer mouse and keyboard You can Lock down the computer so that only authorised users can interact with the computer sb as __Sere
57. Assistant needs to unblock selected ports through the Windows Firewall The help window autom atically SO th at the correct network ports are lists the ports that will be affected and provides further information You can specify which computers or network instruments will be granted access to these ports ena bled to a low the RGA softwa re to run co rrectly C Any computer or network instrument including those on the internet Computers or network instruments on one or more of my local network subnets only If you have Windows XP but do not have service pack Normally this is the best option EA 10 10 540 2 installed the Assistant will show this page but will j not make any changes to the firewall settings If all your instruments use serial connections and you do not want other computers to have If you install Ser vice pack 2 at a later date be sure to access to them you can select the second option and uncheck all listed entries If you have any network instruments you must at least check the subnet item to which they are re run the Assistant SO that the firewall can be set connected COrrec tly coc Heb You may need to open the firewall to allow one or more of the following e Allow network instruments to communicate to this computer e Allow other computers to which serial instruments are attached to pass data to this computer e Allow an instance of the RGA software installed on another computer to access seria
58. Brings the views for the current active recipe to the front and tiles them vertically Selecting Individual View beet New Trend Window The bottom section of the pull down list contains a list of the currently open views The current active view is indicated by a tick next to it Arrange All Windows j jmt Bring Recipe To Front Cascade Recipe fel Tile Recipe Horizontally T Tile Recipe vertically To make a different view active click on that view As well as making this the active view it will also bring the view to the front we 1 Barchart With Trend Interactive 1 As Barchart 2 Barchart With Trend Interactive As Trend 3 Demo With Mo Instrument 1 As Trend Process Eye Professional V5 SP104008 100 August 2005 123 11 1 5 Help Pull down Menu amp Help Topics The help pull down menu is were you can access the online help or get _ information about the Process Eye program P About Process If you need to contact MKS about your software please have the version of Process Eye Professional or EasyView available Click on About Process to obtain this information MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 124 Chapter 12 Printing Both Print Setup and Print can be accessed from the recipe pull down menu Unless a recipe is running the Print option is grayed out as the print function only works with the active view Run Cr me P 7 L In addition there is a
59. Change the IP Address Download gt strumen Package Download Access Help F1 you expected to find Click Troubleshoot to launch the Hardware rd Browse to the instrument network instruments only Selecting this option will open your default browser and navigate to the home page of the selected instrument If the control unit is an e Vision or e Vision Plus this is the means by which you configure the control unit as well The password for configuration is MKS all in upper case Process Eye Professional V5 SP104008 100 August 2005 32 Change the IP address network instruments only Selecting this option will lead to the IP address configuration dialog described below Download is the process by which new embedded software is downloaded to the control unit This selection does not apply to e Vision or e Vision Plus which have their software downloaded as a package Package Download not serial instruments A download package is a collection of files that are downloaded to the control unit at one time Package downloads use the File Transfer Protocol FTP Selecting this menu item will launch the Package Download Wizard which will guide you through the steps necessary to download your selected package Packages are supplied as executable files exe Having selected the package to download your CD ROM will contain the most up to date package at the time of delivery but newer ones are released periodicall
60. Connection button Server ID MES AGA Instrument Server Windows Check boxes by instruments indicate that Process will automatically connect to the instrument at startup Only check Instruments that you have complete control over Changes will take effect nest time Process is started Add Connection Remove Connection Refresh Save Into Close 6 4 Refresh Connections Although the list and its associated information is updated periodically automatically you can force a complete refresh of all the server information by clicking on the Refresh button 6 5 Export Connection Information Connections to Instrument Servers et iam To save the connection information click on the Export button Check boxes by instruments indicate that Process will automatically connect to the instrument at startup Only check Instruments that you have complete control over Changes will take effect next time Process is started Add Connection amoye Connect Refresh Export Close aporta seren information kie IE The Export a Server Information File dialog appears ae CHEE Jeeg Choose a location and file name to save the file By default the i suggested filename is thiscomputername_servers dat CD Recipes mia This file can then be used on a PC without connections to simulate all the connections to this computer This enables off line recipes to be written for the current installation File name Save as type Server Informat
61. LM 6 01603006 Recipe View Window Help amp A 2 Oe eS E1 t e LE been Sa 4 lt EasyView LM76 01 603006 Leakcheck Mass 4 00 ae EasyView Leakcheck View Pressure a a LL Ee Pe alee RUGER Ea Sa ESSE a eae 00 00 30 00 01 00 00 01 30 00 02 00 00 02 30 00 03 00 00 03 30 00 04 00 00 04 30 Elapsed Time EasyView LM76 01603006 New Head 1M76 01603006 Y A dul W be TNS Acquisition Control hi 4 00000 AccuracyS 140 1 333e 004 mbar v F 1 333e 004 mbar dJ Instrument Status Scanning Leakcheck 1 Active Filament 1 Sensor Identification Standard Open Source Filament Status On Detector Type Faraday Channel Plate Total Pressure NJA TUNING Multiplier Status oF Maximum Mass 200 AMU 1 A RF Configuration Smart Head Control Unit Use Main A Easy iew Lh 76 01603006 weta Done Pressure in mbar The Leak Check view is loaded and the interactive Leak Check control toolbar appears in the status window cause Control hk 4 pogo Accuracy 1 333e 002 mbar F 1 333e002mbar Z a Use this toolbar to change the scan parameters each of the functions are explained below hi Anno af Probe Mass t To change the probe mass of the scan either enter a number directly into the box or click on the arrows to increase or decrease the mass number In contrast to the other modes that require whole number masses leak check mode permits fractional masses but you cannot enter a mass that exceeds the maxim
62. Multiplier calibrations first two buttons and to perform a calibration of either kind third button 10 1 2 Window Arrangement Toolbar a ma eS Cascade button cascades all windows 1 Tile Vertical button vertically tiles all windows ES Tile Horizontal button tiles all the windows horizontally m Bring to Front button will bring the active window to the front Process Eye Professional V5 SP104008 100 August 2005 109 10 1 3 Trend Display Toolbar Hg Add New Trend Window is used to add a new trend window and show the view definition wizard so you can specify its properties There is no limit to the number of trend windows you can associate with a recipe connection Note the button only becomes available when there is data to trend i e after the second scan is complete ei Key Display makes the legend key visible or invisible Key Position switches moves the legend key either to the left of the trend or above the trend 10 1 4 Chart Display Toolbar ey Ei t E hm da lad Properties displays the view settings for the active view window a Grid displays a Y axis grid in the currently active view window Default is disabled d Log Lin switches between a linear and logarithmic Y axis Default is linear 4 Y axis Minor Ticks enables the display of minor ticks on the Y axis Default is major ticks a Time switches between real and elapsed time on the X axis from the start of the recipe Default is elapsed time Days
63. O Tact MKS Spectra Products Process Eye Professional and EasyView From Version 5 20 onwards Process Eye Professional V5 User Manual SP104008 100 August 2005 As part of our continuous product improvement policy we are always pleased to receive your comments and Suggestions about how we should develop our product range We believe that the manual is an important part of the product and would welcome your feedback particularly relating to any omissions or inaccuracies you may discover You can send your comments to MKS Instruments Spectra Products Cowley Way Crewe Cheshire CW1 6AG U K 44 0 1270 250150 Tel 44 0 1270 251939 Fax Email manual_info mksinst com Windows is a trademark of the Microsoft Corporation All other brand or product names are trademarks or registered trademarks of their respective companies MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 2 Licence Terms and Conditions MKS INSTRUMENTS ELECTRONIC END USER LICENSE AGREEMENT FOR MKS RGA APPLICATION SOFTWARE This MKS Instruments MKS End User License Agreement accompanies the MKS r RGA Software and MKS r RGA Demonstration Software products and related explanatory materials Software The term Software also shall include any upgrades modified versions or updates of the Software licensed to you by MKS Please read this Agreement carefully At the end you will be asked to accept this ag
64. Pane Y axis Once the channels have been set click on the Next button This will bring up the Y axis dialog box Each pane has a set of properties that define its Y axis scale and its appearance Show Properties for Scale properties for the selected pane C Use the individual measurement properties to set the Y axis scale A Use the following explicit settings Current maximum value is 1 3e 004 Max value Min value Log scale 0 0001 33 fi 33e 008 T Restrict these values to the maximum bounds of the acquired data Stack channels of digital data r General properties for the selected pane l Grid Y axis Title Y axis Minor ticks Gi e eret fo Subsequent Y Axis autoranging strategy for the selected pane If the bounds of the data subsequently change during the lifetime of this view C Leave the Y axis unchanged C Autorange the Y axis based on the current and recommended bounds C Expand the Y axis to include the new recommended bounds Use the new recommended bounds lt Back Cancel Process Eye Professional V5 SP104008 100 August 2005 56 Each trend pane can have a different Y Axis setup To set up each pane select the pane you want to edit from the trend Pane pull down list box Show Properties for Trend Pane 1 Y Axis Scale Properties The scale can be set in a number of ways C Use the individual measurement properties to set the asis scale If you select the above option the sca
65. RGA application software is a client It connects to these RGA servers that act as a source of data The connections dialog displays all the servers to which the a application is connected when the connection is good these servers are denoted by this symbol If there is a problem with the connection the server symbol is replaced with the following symbol T Displayed beside the server symbol is the IP address of the server If the RGA is connected to this computer with a serial connection it will show as having the localhost IP address of 127 0 0 1 even if your computer has a real network address Process Eye Professional V5 SP104008 100 August 2005 66 Displayed under the server symbol are details of all its associated instruments If you have multiple serial RS232 422 instruments connected to a computer they will all be listed beneath the common server If you have e Vision or IP instruments there can only ever be one instrument for that server If in RGA Device Manager you have set exclusive access to a particular control unit there will be a check in the box next to it Me LM90 200115367 This means when the Process Eye program is started and available instruments have been located any instruments with a check will be pre connected and the instrument information will be displayed in the Process Eye Status Panel Once the instrument has been pre connected it will become unavailable to any other connection If th
66. Setup code procprof Install features Complete installation Install folder C Program Files Spectra Data folder C Process Eye If you want to change the details click the Cancel button and run the Assistant another time 32 MKS RGA Software Setup MKS RGA Software The Assistant is ready to perform the following tasks The Assistant is ready to install the Process Eye Professional suite of programs apply the configuration settings that are appropriate for your setup code Cancel Help Process Eye Professional V5 SP104008 100 August 2005 Once the Assistant has completed the initial checks it is ready to install the correct software for your chosen set up code The complete installation process may require the Assistant to perform several tasks which are itemised on this screen Some set ups may involve a reboot of the computer part way through All these steps will be handled automatically 14 1 2 Administrative Options 53 MKS RGA Software Setup Having completed the installation of the necessary files to your hard drive the final stages of the set up process involve the configuration of several administrative set up options Administrative Options Moe ORN You can re run this section of the Assistant at any time after installing the software so any choices you make now may be changed later Product ID mkstga 5 21 0001 procprof 10210 J MKS RGA Software Setup Demonstration Mode m
67. The Status Bar Recipe List Window Show Instruments Show Dates Properties 11 1 4 Window pull down menu New Trend Window Arrange All Windows Bring Recipe to Front Cascade Recipe Tile Recipe Horizontally Tile Recipe Vertically Selecting Individual View 11 1 5 Help Pull down Menu Chapter 12 Printing 12 1 1 Print Setup Printing a View Chapter 13 Process Eye Tools 13 1 Backup and Recover 13 2 Computer Lock 13 3 Process Eye Watchdog Appendix 1 Network Hardware and IP Addresses Process Eye Professional V5 SP104008 100 August 2005 I Getting Help Much of the application software suite has online context sensitive help Please use this along with the reference material in this manual as a starting point for getting help We are always pleased to provide personal assistance where we can If you are experiencing difficulties or need further help feel free to call your local MKS Spectra facility and ask for the Customer Support Group Please have the following information ready so that our technical staff may help you quickly and effectively The serial numbers of the analyser and control unit each of these numbers begins with the letters MKS or LM The Process Eye or EasyView software version number this is written on the software CD ROM and can also be found on screen by selecting Help About from the menu bar The operating system used and any Service Packs which have been applied Support Contact Teleph
68. You can then access the describes the location or function of the RGA system SN rea ee If you have multiple RGA s you can then easily to distinguish one from a another Use simple alphanumeric characters for your name You are Run Hardware Setup prohibited from using characters such as or any quote marks If you have to enter a new IP address for the control unit it is important that you understand how this address is chosen There should be someone in your organisation that is responsible for networks and the assignment of addresses Please be sure to discuss with your network administrator what you plan to do You have a basic choice between assigning a fixed IP address and having a computer on the network assign Configuration for LM101 00205003 g one for you This latter case is called DHCP addressing but please ensure that you only select this option if you have a BeREE ODE Nata DHCP server on the same network as the control unit C Assign an IP address automatically using DHCP If you do not have or do not want to use a DHCP server you IP address 10 10 54 253 must assign a unique fixed address that matches the address oan ES ae of the computer that will control it Note The IP address of this computer i 10 10 54 76 For example If your computer s address is 10 20 30 41 with a subnet mask of 255 255 255 0 you should choose a fixed address that is Cancel 10 20 30 xxx where xxx is a number betwee
69. a This will add dates to the recipe list window a eA O SRN These are the dates the recipes were added to the list or modified archart High Vacuum with lt lt Unspecified gt gt 16 08 2002 Barchart Interactive lt lt Unspecified gt gt 16 08 2002 A A 5 Berchet Low VarumWil necede 16 08 2002 using the Recipe Wizard If you edit the script of the recipe then the Barchart With Trend Interact lt lt Unspecified gt gt 16 08 2002 Demo With No Instrument lt lt None Required gt gt 16 08 2002 date is not updated Instrument Tuning Interactive lt lt Unspecified gt gt 16 08 2002 Leak Check Interactive lt lt Unspecified gt gt 16 08 2002 Peak Jump Interactive lt lt Unspecified gt gt 16 08 2002 Process Eye Professional V5 SP104008 100 August 2005 120 Properties The Properties item will only be active if a recipe is running with a view loaded Toolbars Click on the Properties button to bring up the view properties of the active Status Bar i view ww Recipe Lisk Window Show Instruments Show Dates Properties Trend Display Pane and Channel Properties Set the channels to be associated with this Trend View Individual panes display If the view is a trend the Trend Pro perties d ia log is their own selection of channels from a common list of 15 items d ispl aye d Channel _ __ Display Measurement Add Pane Mass 2 Hydrogen BarChart1 Mass 4 Helium BarChart1
70. a detector gain of 100 3 each electronic gain setting and an electronic gainof 100 Sa ree arg mae Not applicable el C on mass elpa y r par a If you specify an impossible value the dialog shows a red Stop icon Otherwise it shows a green tick Icon When complete click Next The Run time Options dialog is then displayed as in the Faraday calibration Make any necessary choices and click Finish to complete the definition of the multiplier calibration As in the Faraday calibration definition you are asked if you are sure you want to define a new multiplier calibration and if you would like to run the calibration To run the multiplier calibration either click Yes now or select Run a Defined Calibration from the Instruments pull down menu Process Eye Professional V5 SP104008 100 August 2005 104 9 3 Running a Faraday or Multiplier Calibration Note The calibration data is stored at the server and not at the client so all users who connect to an instrument either locally or over the network use the same calibration information Once you have run a calibration you will change the calibration information for all users of that instrument Note A Faraday calibration should always be defined and executed prior to a Multiplier calibration for a given ion source configuration If you have just defined the calibration you will go straight to the Select an Instrument page If you want to run a calibration that you have alre
71. ady defined make the Instruments Run Calibration menu selection The Select an Instrument dialog is displayed Calibrate Instrument Available Instruments i From the list pick the instrument you wish to The list shows instruments for which a calibration method exists calibrate In this case there is only one instrument I present Serial E New Head LM76 00399001 lt Back Cancel This page shows the configurations for which a calibration recipe has been defined Calibrate Instrument Source Settings Selection Select the source and detector combination that you wish to calibrate i Select the ion source configuration and then the detector click on Next to start the calibration lon source Configurations Detector configurations You can define one Faraday calibration and three Standard Electron Energy Faraday multiplier calibrations for each ion source setting P g If you have started the calibration routine directly E J from the definition wizard then the correct Information instrument ion source setting and detector are Calibration recipe date 15 10 2003 09 42 33 automatically selected simply click Next to Previous calibration on the current filament Not previously calibrated continue The creation date and the date the calibration was Back ayes last run are shown in the Information panel Process Eye Professional V5 SP104008 100 August 2005 105 Calibrate Instrument earnan Depending
72. alibration result To apply the default calibration click Default Calibration succeeded The stability test resul was excellent To use the calibration just performed click Apply 4 typical sensitivity For the current conditions is 1 50e 004 Ambar The current sensitivity is 2 18e 004 Afmbar The new calibration is 6 55e 004 4 mbar Click Apply to apply the new calibration or Default to apply the Factory default Default Cancel Fa Calibration Wizard The calibration is now complete click on Finish to exit Your selected calibration factor has been applied The application logfile holds the details Click Finish bo exit the Calibration Wizard Process Eye Professional V5 SP104008 100 August 2005 92 The date of the calibration and sensitivity value will then be displayed at the bottom of the EasyView window i i Easyview LM 76 01100013 4c4 i lul Ib bz dir e Faraday rail LD Calibrate mass ui 39 4 using the Faraday detector to have a value of 1e 007 mbar j Wo Apply the resulting calibration to both filaments Start Last calibrated by Easy view 28 10 2003 13 54 04 Current source sensitivity 6 55e 004 4 mbar al G Easy view LH P6041 100013 4 lt MESSAGE Time 2003 10 28 13 52 58 Value Calibrating RGA Source EasyView Faraday detector gt lt MESSAGE Time 2003 10 28 13 52 58 Value Parameters mass 28 pkht 1 00e 007 gt lt MESSAGE Time 2003 10 2
73. ally analog barchart peak jump or leak check acquisitions To these you can add as many user measurements as you like to contain your derived data user measurements can contain as many individual channels of data as you wish Process Eye will gather one complete set of readings from the RGA and then call the recipe to calculate the values for all the channels in the user measurement s This completes one scan and the process repeats Recipes are totally event driven The completion of a scan is one such event Other data such as electrical analog or digital inputs is almost always asynchronous to the scan So this data also gives rise to change events and the data arriving from these sources can be stored separately from the scan data The built in functionality of the recipe software is contained within the Process Eye Object Model In addition to many properties and methods associated with the scan measurement and reading objects the model supports the ability to control the display of windows and the user interface The CD ROM contains several useful recipes to get you started this manual assumes that you have installed these and that you will run them as you read through this chapter Please be aware that the author of a recipe has the ability to set properties that control whether a user can launch the recipe or can close it the recipe may allow the user to interact with the data acquisition or not or to modify the confi
74. annels with both channels configured to Draw stepped Tip Put your digital channels in a pane above the partial pressure data to see the relationship between the two 00 00 00 00 01 00 00 02 00 00 03 00 00 04 00 00 05 00 00 06 00 00 07 00 0000 00 00 09 00 00 10 00 Elapsed Time Process Eye Professional V5 SP104008 100 August 2005 57 Y Axis General Properties Grid Enabling the grid check box will draw a horizontal grid on the trend Sy asis Minor ticks Enabling the minor ticks check box will display minor ticks If the grid is enabled you will also get grid lines for the minor ticks Yanie Title O00 Enter a label for the Y axis in this text box Doe pane 1 If there is only one trend pane on the trend this box is set to 100 and unavailable ee imc If there is more than one trend pane you can set the proportion of the trend window that the particular pane will occupy Y Axis Auto range Properties Subsequent Axis autoranging strategy for the selected pane If a view s Y axis limits are based on an If the bounds of the data subsequently change during the lifetime of this view interactive measu rement or the RGA has an inlet Leave the Y axis unchanged system these limits can be changed during the C Autorange the asis based on the current and recommended bounds lifetime of the view C Expand the r asis to include the new recommended bounds Four options determine how the axis will react to future
75. are entering Note The IP address of this computer is 10 10 54 76 a valid address SIS He iG api AIOE St Almost always you will be entering a fixed address that differs from Cancel your computer address only in the number following the final dot If you want to check that the address change was successful check the Browse to this instrument checkbox You should see the instrument s home page The Download Dialog You have the option to select the latest core latest application or to select an individual file to download IP control units have the additional option to download the latest embedded server application The RGA Device Manager will read the file version and ask you to confirm that you want to replace the existing version with the new version Download File If you choose Cancel the download will not proceed Otherwise the Details download process will take a few seconds following which the control Type Embedded application for Motorola 68000 processor unit will r eboot Name Microvision Process Eye AG Version V5 00a During this time it may disappear from the RGA Device Manager list Do you want to replace the existing V5 04 software with this file but after the reboot it will reappear once more Cancel Process Eye Professional V5 SP104008 100 August 2005 33 The Access Control dialog You will usually want to set up for the main RGA application to attempt to gain exclusive access to your control units Howe
76. ass jv Minor ticks _ Show tsal time in addition to scan number scan because in both cases the RGA performs a continuous eee es sweep of equally spaced readings between a first mass and C Use the data acquisition properties to set the Y axis scale p qu y p g i a last mass Use the following explicit settings Current maximum value is 1 3e 004 M 0 0001 33 Min val fi 33e 008 Vv L P 1 i a these values to the Her bounds of the acqui te 7 l Ea syView remem bers the setti Ngs you choose In th IS quired data rigid Mewes dialog so that they are automatically applied the next time Subsequent Axis Autoranging Strategy you acquire a continuous mass scan If the bounds of the data subsequently change during the lifetime of this view C Leave the Y axis unchanged C Force the Y axis scale within the new recommended bounds Process Eye Professional allows you to Save several views Expand the Y axis scale to include the new recommended bounds as standard views that can be applied to your recipes A when you create them In this way you can maintain a standardised presentation of data that is relevant to the nci task the recipe fulfills f Save all the settings as a new or modified view definition The above example shows the default properties that can be used to create the following default view R Analog Interactive 1 As Analog In this view all the masses acquired from the first mass to the last mass are s
77. at switch on You will usually want to ensure that this corresponds to your safe state which will depend on the nature of the circuit driven by the TTL output Note Setting an output line in a recipe script to False or zero always sets the TTL level low setting it to True or non zero will set the level high This is true whether the default On Power up set output TTL levels is high or low The digital lines PB6 and PB7 differ from the other lines as they can be configured to revert to the selected power up state after a predetermined amount of time This can be configured by checking the If PB6 or PB7 are connected outputs box and entering the required time in seconds When enabled the deglitch filter works by monitoring the data line for changes in state If a change is detected a timer will start if no further changes of state are detected by the time the timer has reached the deglitch time the digital input line will change state If a change in state is detected before the timer has reached the deglitch time no changes will be made to the digital input line Note If the digital input is continually changing state at a frequency faster then the set deglitch time then no changes in state will be reported Please read the relevant section of the control unit manual to find out how to wire external hardware to the control unit 3 4 7 Delays LM101 00205003 Hardware Setup lc This tab is an advanced feature
78. ates every few seconds Please wait a few seconds after installing a new control unit or after changing its configuration You must allow the unit time to reboot and for RGA Device Manager to acquire the new information about it Process Eye Professional V5 SP104008 100 August 2005 27 2 2 Finding Undiscovered Control Units Although the RGA Device Manager will usually find any control unit there may be occasions when you expect to find one in the list but it is absent There will usually be a simple reason for this use the Troubleshoot button to launch a Wizard to help you get up and running quickly Examples of likely reasons for failing to discover a control unit are that the Windows firewall is blocking communications or that the serial port is not RGA enabled The Troubleshooting Wizard can diagnose these and other problems for you and can usually bring network instruments on line But before you run the Wizard please check that the cables are installed correctly and that the instrument is powered up Also if you have used the control unit successfully before take a moment to consider what might have changed recently with your computer s set up Have you changed your network settings If so please run the Administrative set up first This will ensure that your firewall settings are up to date Note The Troubleshooting Wizard Is only available from version 5 21 of the application software Process Eye Professional V5 SP1040
79. ation runs the software checks the stability of the partial pressure by taking ten separate readings and calculation the standard deviation sigma of the sample If the value of 3 x sigma as a percentage of the first reading taken is Less than 1 the stability is excellent otherwise if it is Less than 3 the stability is good otherwise if it is Less than 10 the stability is acceptable otherwise the stability is poor Where the calibration is performed at the peak centre the algorithm reports any misalignment of the peak in increments of 1 32 of an a m u MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 107 Chapter 10 Customising the Workspace Process Eye Professional and EasyView both allow extensive possibilities for personalizing the working environment You can customize the toolbars re organise the docking windows personalize the colours used for the displays and select a range of global preferences Note some of the features described below do not apply to the EasyView workspace MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 108 10 1 Modifying the Toolbars Many buttons act on the active recipe active connection in EasyView or the active view To activate a recipe click on its tab in the status pane To activate a view be sure to click in the view window 10 1 1 The Default Toolbar WIA ABS D A Fi Run Recipe starts a recipe Select the recipe from
80. ause until triggered by an initial event can acquire data in a variety of ways can make calculations on the measurements raise alarms and store information to disk Click the Help button or press F1 to get help on any page Cancel Help Here is a selection of the choices offered on the following pages e Whether to acquire data from an RGA whether the recipe is for a particular RGA or whether the choice can be left until run time The RGA data to be acquired The data to be derived from the RGA data Additional events that trigger actions How to display the data acquired Whether to save the data to disk Alarm criteria and actions The full features of Recipe Wizard are described in an associated manual Having created the recipe you run it as described in section 7 2 above Advanced users can display the recipe script and extend the functionality by writing VB code in any of the event placeholders generated by the wizard This capability is not described further in this manual 7 5 Editing an Existing Recipe Select the recipe to be edited in the Recipe List window right click and choose Edit from the pop up menu or choose the Recipe Edit selection from the main menu bar This will re run the wizard Make the changes you require and when you click on the Finish button the edited recipe will be saved Process Eye Professional V5 SP104008 100 August 2005 74 7 6 Recipe Information in the Status Pane Each active recipe
81. available are from 0 to 8 ae Peak Jump Settings Use this sien to Ie us Peak Jump settings window shown Sela 5 e 14 a 25 i 2s A 1 333e 002 mbar Settings for each of the 15 channels can be edited using this toolbar mice a Click on the channels tab to edit the settings for that particular channel jz Check the box to enable the channel In the above example only channels 1 to 7 are enabled channels 8 to 15 are disabled Process Eye Professional V5 SP104008 100 August 2005 85 ll a al Scan Mass Set the particular channels scan mass Note that the mass cannot be less than 1 and cannot exceed the maximum mass allowed by the control unit iio 1 333e 004 mbar Electronic Gain The electronic gain of the pre amplifier can be changed by selecting one of the values from the drop down list The lowest electronic gain appears first in the list The pressure indicates the maximum value that can be measured using that range The higher the gain selected the smaller the partial pressure that can be measured this may cause peaks of a higher partial pressure to saturate F 1 333e 004 mbar Detector The detector type used for the scan can be changed Depending on the type of instrument the options are Faraday Multiplier 1 Multiplier 2 and Multiplier 3 Multiplier 1 2 and 3 refer to the same physical detector but using three separate calibration values that provide successively greater amplification of the ion current
82. ave Disk button if the recipes you wish to install are not shown Have Disk al Recipe Family Name Description C Get Started v5 Example Recipes Nov 2004 lt Back Newt gt Cancel Help The User Set up Wizard will install recipes to the relevant target location If the recipe collection that you want to install is listed simply check the relevant box If you have been provided with a collection of recipes on a separate floppy disk or CD ROM or by e mail click the Have Disk button Insert the disk and select it from the drop down list then click OK Now the recipe collection will appear in the list If the recipe collection has been e mailed to you and the attachment is on your hard drive select Browse from the drop down list and find the Ist file that holds the recipe collection information Setup Wizard Hardware Setup The Wizard can search for IP or e Vision contol units or serial instruments on this or other computers Do you want to install new hardware or to change your existing hardware setup Run hardware auto detection now The Wizard will only be able to detect instruments that are switched on i C Skip hardware auto detection The existing hardware setup is correct Run hardware auto detection if you need to change the configuration of a control unit or to install a control unit for the first time Process Eye Professional V5 SP104008 100 August 2005 The User Set up
83. be displayed in the main window list If the control unit needs some form of installation or configuration the Configure Now button will be enabled When you click this button RGA Device Manager will guide you through the procedure necessary to get you going Here are some examples of what may be required Give the control unit a friendly name Assign the control unit a new IP address network instruments only Download an upgrade to the embedded software Set the pressure reduction factors for associated inlet hardware Sometimes it may be necessary to do more than one of these things If so simply double click the item in the list and click Configure Now again to perform each task in turn Process Eye Professional V5 SP104008 100 August 2005 25 Some control units will require a password in order to change these Enter a Login password or leave the im po rtant setti ngs box blank to login as a guest with read only priviliges ae ae spel tees If you are asked for a password by the dialog shown the password is the same as the Quick Set up Code that you used to install the software initially If you are using browser software to browse to a network instrument the password to configure the control unit is MKS all in upper case TTRIGILNeaeaetcuiment If you are requested to enter a friendly name for the instrument in a dialog earn such as the one shown you must enter a name of your choice that Please assign a end name
84. ce fitted If required for specific applications these parameters can be changed There are four parameters to change and they have the following functions Emission current is the current of thermally emitted electrons that flows between the filament and the source plate The emission current is regulated by the temperature of the filament and hence by the actual current passing through the filament Up to a point higher emission current gives higher peak heights however higher emission currents mean higher filament temperatures and shorter filament life Nominal emission current is 1 mA but this should be reduced if running at high pressure or at low electron energy Electron Energy is the accelerating voltage between the filament and the ion source It is therefore the energy that the electrons have in the ion source The standard electron energy is 70eV however for particular applications this may be changed For example reducing the energy below 40eV will prevent Ar ions being formed This will prevent peaks at mass 18 and 20 due to the doubly charged argon atoms having masses of 36 and 40 Ion energy is the voltage of the ion source and hence the starting energy of the ions Changing the ion energy will affect the ion optics of the source and would not normally be changed The Extract voltage is the voltage on the extract plate and the repeller in the ion source This voltage again affects the ion optics of the source and would not normall
85. cess Eye Professional V5 SP104008 100 August 2005 23 Chapter 2 An Introduction to the RGA Device Manager 2 1 Hardware Management Overview The RGA Device Manager application is the main application for all aspects of hardware management including Installation Configuration Access control Network configuration The RGA Device Manager application is used for all MKS RGA control units including Microvision Plus HPQ2 and HPQ2S e Vision and e Vision Plus Microvision IP and HPQ2 IP You can run the RGA Device Manager application from either Start Programs MKS RGA Applications Or from the relevant page in User Set up accessed from Start Programs MKS RGA Applications Tools With everything configured and working correctly the main window looks like this RGA Device Manager xpspZinstallpc 10 10 54 145 255 255 755 0 The list shows the control units that are connected to network and serial ports of this camputer Glee Double click an item to view more details Serial Number YW O00P 10 10 54 200 Serial No preconnection Ready wd LM101 00205003 HPOQ2IP 10 10 54 253 Fined No preconnection In use i Details Configure Additional registered connections There are no additional registered connections Deal Help F1 Is there an Unlisted instrument that pou expected to find Click Troubleshoot to launch the Hardware Troubleshoot Connection Troubleshooting wizard Apar
86. changes in the measurement conditions such as using a new inlet or detector or electronic gain range for example Use the new recommended bounds Leave the Y Axis unchanged leaves the Y Axis settings unchanged when the measurement changes The settings will remain as you set it now Force the Y Axis scale within the new recommended bounds reduces the maximum and or increases the minimum value so that the Y scale does not overflow the new recommended bounds Expand the Y Axis scale to include the new recommended bounds changes either the maximum or the minimum Y axis settings to incorporate the new settings Use the new recommended bounds changes the Y Axis settings to match the new measurement settings These options will become more obvious using the following example Suppose you are current y acquiring large peaks on a low electronic gain The recommended bounds are from 1e 4 torr to 1e 8 torr Now what happens n the future when you switch to the high electronic gain range so that you can see the smaller peaks The new recommended bounds will be say 5e 7 torr to 5e 11 torr Option Y axis Range Now Y axis Range after future gain change to POLI ne 5e 7 to 5e 11 1 Leave 1e 4 to 1e 8 Pte4tole8 2 Force within 1e 4 to 1e 8 5e 7 to 1e 8 3 Expand 1e 4 to 1e 8 1e 4 to 5e 11 1e 4 to 1e 8 5e 7 to 5e 11 Process Eye Professional V5 SP104008 100 August 2005 58 It may seem that the obvious choice is the fourth one which is the
87. ckup To make a backup spanned across a number of disks click the Multiple Zip files to fit on option and select the type of media There is also a custom size option simply select and then enter the size of files to be created ee if reports are also to be backed up check the relevant check boxes Include report output CS When the options have been selected click Start Backup To restore a backed up installation click on the Restore tab Process Eye 2000 System Backup Click on Browse and select the backup file required from the standard file open dialog Restore filename zip A SPE 2k Backup ASG1 Steve Billington ZIP Browse To begin the restore process click on Start Restore Start Restore Restore Process Eye Professional V5 SP104008 100 August 2005 127 13 2 Computer Lock Process Eye has the ability to lock the computer to prevent unauthorised use The utility provides more functionality that the standard windows password protected screen saver although the RGA application display remains visible and continues to be updated the keyboard and mouse are disabled so it is not possible to switch from Process Eye to another running application This utility is different from the simple Lock feature built in to Process Eye and described in a chapter 10 It supports the concept of defined users and administrators who are not the same as regular Windows users and administrators To run this ut
88. clicking the Change button If you elect to have a common location you may choose the common units you will use for pressure The Event Log button allows you to change some advanced settings that are also common to all users 32 MKS RGA Software Setup PEER If you chose to have a common location for all users PEE E SARTRE Process Eye Professional users can then choose whether to maintain recipes on this computer the Although settings and data are always stored locally on this computer recipes that control the default or to maintain a common set of recipes for way that the RGA acquires data can be stored on a remote computer p multiple computers at one central location If you elect to store recipes on a remote computer click the Browse button to specify the location Ensure that all users of this computer have both share and read access to the folder you specify This is an advanced feature which will be of interest x oe only to users who are installing the software in a Store recipes in a folder on a remote computer on my network i factory environment OWSE Recipe and View definitions will be stored in folders beneath the folder you specify cme Hee _ The Process Eye Professional software comes with several Security Features By default these are usually un checked off If you have never used MKS RGA software before you are advised initially to leave the options un checked You can re run the Administrative
89. ction Ready More Details Browse to Instrument Install or Configure Instrument Change IP Address Package Download Configure v Additional registered connections Download There is 1 additional registered Access found Details Click Troubleshoot to launch the Hardware My IP Configuration Is there an Refresh list Troubleshoot Connection Troubleshooting Wizard The More Details dialog displays the information about the control unit in more detail It is the default action when you double click an item in the list If the RGA that you are interested in has a red cross beside it you should always select this menu item to find out more about the problem The listed items are continuously updated every few seconds When the application first runs and whenever you select Refresh List or press the F5 key RGA Device Manager writes an auto discovery log of all the messages received from the connected hardware You can view this log by choosing the menu item from the Details button It can sometimes indicate the cause of a communications problem 3 3 The Configure Menu You access the Configure menu either by right clicking on the list or by clicking the Configure button The menu offers the following options Serial Shared Ready Serial Nopreconnection Ready Details v Fixed No preconnection Ready Browse to this instrument Install or Configure this instrument
90. d Network Instrument Connection details The control unit should get its IP address from a DHCP If an instrument with the specified serial number is found what IP address do you want it to be server on Its network given The instrument should be given a fixed IP address defined below The control unit should have a fixed IP address which A fe you must enter in the form of an address and a subnet a mask Subnet mask The Wizard will automatically re program the IP address of the control unit accordingly If this is a new control unit this will probably fiz your connection problem If this is an existing control unit that has been used successfully by someone on a different computer they may no longer be able to access it once it becomes accessible to you cm tee Please understand that the information that you enter here is the information that you want the control unit to end up with if it is found Itis not necessarily the information that the control unit has now You may not even know what address the control unit currently has Process Eye Professional V5 SP104008 100 August 2005 29 RGA Communications Troubleshooting Wizard Instrument Status The COMMS LED can provide additional diagnostic information If you can see the COMMS LED on the rear panel of the control unit which of the following best describes its state C slowly blinking on and off once or twice per second permanently off p
91. d 3 1 00 70 00 5 50 112 00 1 50e 004 lagos Mn Ma Reading Passad Easyview 1 00 70 00 5 50 112 0 1 50e 004 ARE pA PASEA A A w Mass Alignment Resolution Settings 154 Supply 1 amp 0 13 50 l0 y Low Mass Alignment Low Mass Resolution High Mass Alignment High Mass Resolution 130 Supply 45 40 116 20 151 850 y Standard Electron Energy 32767 32767 32767 32767 Supph 4 75 5 45 4 96 Ti Low Electron Energy 32767 32767 32767 32767 15 Supply 13 50 17 50 14 90 ye User defined 1 32767 32767 32767 32767 Electron Energy 0 69 4 1 64 y User defined 2 32767 32767 32767 32767 ERAEN ager Bam 442 yf User defined 3 32767 32767 32767 32767 F Easy View 32767 32767 32767 32767 SEM Supply Cisgnostic 645 00 S50 567 6 y The report contains information about the control unit configuration source settings and mass alignment resolution settings as well as power supply levels Switch on filaments In order to test the multiplier the filament The filament is off at present which means that the SEM Supply diagnostics cannot be performed nee ds to b e switch e d on If you run If you are sure that the analyzer pressure is lower then the maximum operating pressure then it s safe to turn the filaments on diagnostics without switching the filament Do you want to turn the Filaments on on the following dialog appears Cancel to exit without running diagnostics No to run diagnostics with the filament off in which case the multiplier voltage will
92. d to install a restricted user interface Process Eye Professional V5 SP104008 100 August 2005 52 5 2 Editing the Trend View Properties A trend view can be associated with any measurement Along with the RGA data it is also possible to display Signals from the analog digital inputs and other user variables The only limitation is that the X axis is always time Trend Display Pane and Channel Properties Ed Right mouse click on the trend view to bring up the trend display properties dialog Set the channels to be associated with this Trend View Individual panes display their own selection of channels from a common list of 15 tems Tae Ee The first page is the channel setup page It shows the ee BarChart channels that are currently being displayed You can Helium BarChart enable or disable channels by checking the box next to Carbon 12 BarChartl Nitrogen 14 BarChart Edit Channel gt gt the cha n nel Hydrocarbon 15 BarChartl Oxygen 16 BarChart OH group BarChartl Water BarChartl Tecan Nitrogen BarChart Yia es Oxygen Barlhartl Argon 36 BarChart Argon BarChartl Mass 44 Carbon dioxide BarChartl CJ Mass 64 00 Photoresist 64 egAutor gt L Mass 69 00 Fluorocarbon lt lt Auto gt gt 4 ii amp Checked channels that are not acquired are automatically excluded coca F Mass 2 E Mass 4 Mass 12 Mass 14 Mass 15 Mass 16 Mass 17 Mass 18 F Mass 28 M Mass 32 M Mass 36 EM Mass 4
93. default But the differences between the options become clearer when you scroll back through the data that you obtained before the change In some of the cases the big peaks would be clipped at 5e 7 in others the early data would appear very noisy because it was obtained at a lower gain 5 2 4 Configuring the trend time axis Time Axis Display and Legend Properties Click on Next to bring up the Time axis and legend properties dialog Each pane shares a common set of properties for the Time Axis Time Axis Clock start 30 08 2008 v 1222 24 SS Elapsed dd hh mm s Display elapsed time start Span 0 dd O hh 10 mmf59 ss V Scroll display ee OO A 5 I Minor time ticks nnotations Elapsed Time Origin Display clock time C View creation time Time of my choice 30 08 2008 al 12 22 24 ane Specific data source start time Key Legend C None Top legend C Side legend Save all the settings as a new or modified view definition lt Back Cancel Time axis properties C Display clock time This option will display the time axis using real time as calculated by the PC clock oF Ree This option will display the time axis as an elapsed time The origin of the elapsed ai time will depend on how the time origin is defined This is the offset from the elapsed time origin that the time axis El d B O ddjo hhfO mm0 will start to display This is the amount of time that will be displayed on screen in t
94. displays the date and time on the X axis Default is time only ie X axis Minor Ticks enables the display of minor ticks on the X axis Default is major ticks km Add Scroll Bar adds a scroll bar to the X axis Default is no scroll bar Add Cursor adds a measurement cursor to the active Bar chart display The cursor can be dragged to the required mass and will display the mass number and partial pressure As many cursors as are required can be added The yellow flags can be dragged up or down to make adjacent mass information visible 10 1 5 Scan Navigation Toolbar E M 4432RH When the Historic Data button is not depressed the active continuous mass scan view is displaying the live data currently being acquired While the button is depressed the continuous scan window will display historic data New data is still being acquired in this historic mode you will see the total number of scans figure increasing while the current scan number remains the same The six navigation buttons below will only become available when historic data is being viewed e g The Historic Data button is depressed W First Scan views the oldest scan stored in memory Jump Back views the scan 10 scans previous to the current one being view Process Eye Professional V5 SP104008 100 August 2005 110 Previous Scan views the last scan Next Scan views the next scan Jump Forward views the scan 10 scans subsequent to the current one being view
95. e If you have a multi valve inlet you can change the active inlet using the drop down list The list always shows the currently active inlet Process Eye Professional V5 SP104008 100 August 2005 97 Chapter 9 Calibrating the RGA Using Process Eye Professional Note The topic of calibrating the RGA using EasyView was covered in the previous chapter Overview As with everything in Process Eye Professional calibration involves the execution of a recipe So calibration has two parts the recipe definition and the recipe execution You also know that Process Eye Professional Supports six different sets of settings for the ion source parameters on most control units Where these collections of settings differ each set will usually give rise to a different sensitivity for the ion source Each detector will give rise to a different sensitivity Indeed the sensitivity when using the multiplier detector depends directly on the multiplier voltage That is the reason why Process Eye Professional allows you to select three different multiplier voltages to work with Multiplier 1 2 and 3 Strictly speaking each filament will produce a different sensitivity due to small differences in their position relative to the ion source All these combinations give rise to a total of 48 different possible calibration sensitivities maintained by Process Eye Professional In practice there is often much commonality between the values or their relationships to on
96. e 008 bass 15 00 Wass 16 00 lass 17 00 Wass 18 00 bass 25 00 Hydrocarbon 15 8 0xygen 16 OH group Water Hitragen 1 838 007 1 592 007 1 90e 006 7896 006 1 112 006 Oxygen Argon 36 9 dfie 008 5 67e8 008 hess 69 00 Fluorocarbon 6376 006 Carbon dioxide Photoresist Ge 4 7 12 007 4 96e 008 Argon 4672 007 bass 32 00 Wass 36 00 ie 40 00 44 00 bass 64 00 00 00 00 Elapsed Time MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 In Process Eye Professional this type of view is particularly flexible as the data plotted is not necessarily partial pressures any user variable can be plotted on trend Trend views can have multiple panes but the maximum number of individual channels they can display is limited to 15 You can display any number of separate trend views 49 5 1 Editing the Barchart or Analog View Properties A live view can be edited either by right clicking on the view itself or by selecting the view and clicking on the Properties button Properties for Continuous Mass Scan View x You change the properties on this page to customize your Xba view of barchart or analog measurement data The next C Use the data acquisition properties to set the X axis properties AE A section explains these properties in detail First Mass 1 Last Mass 50 Annotations Mass cursor Show elapsed time in addition to scan number The software refers to analog and Barchart data as a m
97. e Status Bar The Status Bar appears at the bottom of the screen Ready Pressure in mbar To make the Status Bar visible invisible click on the Status Bar item in the pull down menu Toolbars Status Bar If a check is visible then the Status Bar will be visible Recipe List Window Show Instruments Show Dates Recipe List Window The Recipe List window is the list of all the currently loaded recipes Analog Interactive B archart High Vacuum with Barchart Interactive Barchart Low Vacuum with Barnchart With Trend Interact Demo With Mo Instrument Instrument Tuning Interactive Leak Check Interactive Peak Jump Interactive This window can be resized and can be docked or floating however if you close it you can only bring it back by re checking the item in the View menu Toolbars Check the Recipe List Window entry to make the recipe list visible or Status Bar invisible Recipe List Window Show Instruments Show Dates Various functions are also available by clicking on a recipe in the recipe list window with the right mouse button Run to start this recipe Recipe Name Analog Interactive Barchart High Yacut Barchart Interactive Edit Barchart Low Vacul New Barchart With Trend Recall Daksa Demo With Mo Instr Easyvieny Allow Docking Instrument Tuningtr Hjde Leak Check Interact Peak Jump Interacti Edit to use the Recipe Wizard to edit this recipe Run New to cr
98. e another A Faraday calibration uses the Faraday detector to compare the ion current associated with a particular mass against the known partial pressure of that mass A Faraday calibration defines the basic ion source sensitivity in amps per pressure unit for a give set of ion source conditions This is a fundamental property of a hot filament ion source attached to a quadrupole RGA It should fall within a relatively narrow range When outside that range the analyzer probably needs repair A multiplier detector calibration uses the basic ion source sensitivity to find a voltage that amplifies the ion source signal by an amount that you specify For this reason you should always run a Faraday calibration immediately before a multiplier one This chapter describes the steps of defining a Faraday or multiplier calibration and then running it Process Eye Professional V5 SP104008 100 August 2005 98 9 1 Defining a Faraday Calibration To calibrate the instrument you first need to define a calibration for it to perform Instrument Calibration Wizard Process Eye Professional Main Recipe Instruments View Window Help El Define Faraday Calibration Settings JM Define Multiplier Calibration Settings ij Run a Defined Calibration Process Eye Professional RGA Calibration Wizard An individual Microvision Control Unit can have only one Faraday calibration and up to three Multiplier Calibrations for each ion source confi
99. e of the probe mass You click this button to force the control unit to take a new zero measurement MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 84 8 5 Peak Jump Mode es EasyView EasyView LM 6 00600013 ap Recipe Yiew Window Help oa amp Se Dm mM ie ES 19 8 hmla A 4 4 EasyView LM 6 0060001 3 Trend LIVE hiass 2 Nass 18 Mass 28 htss 32 Ness 40 btass 84 Nass 129 Day 00 00 21 49 3 54e 008 4 62e 008 2 03e 008 4 46e 009 78e 009 4 58e 007 1 88e 007 Easyview Trend Display EANN E SUR mnn Sa Pressure D rs 00 03 30 00 04 00 00 04 30 00 05 00 00 05 30 00 06 00 00 06 30 00 07 00 00 07 30 00 08 00 Elapsed Time le EasyView LM76 00600013 Sasy View AGA EJ A ul GL Bec a Acquisition Control i Peak Center Accuracy v Ready Pressure in mbar In Peak Jump mode an interactive Peak Jump control toolbar appears in the status window and the data is displayed in a trend view window Acquisition Control i Peak Center Accuracy5 Use this toolbar to change the scan parameters each of the functions are explained below in Peak Center Scan Mode The scan mode is the method used to report the peak height The options are Peak Centre Peak Max or Peak Average Accuracy 5 Accuracy Scan accuracy determines the sampling amount carried out on each reading A high accuracy number provides a clean scan but increases scan time The accuracy ranges
100. e printout a title by adding a caption to the view Process Eye Professional V5 SP104008 100 August 2005 125 In the Save View dialog of the view properties add the required title to the Optional Screen Title text box Save View m Optional Components Save current annotation details Title to be displayed above view E asyView Trend View Name by which this view will be known in the List of Views 5 ooo File location F Save this view as the default view for its type cuca The trend view caption then appears as a title on the printout MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 126 Chapter 13 Process Eye Tools 13 1 Backup and Recover The backup and recover tool is used to backup the current Process Eye installation The tool will backup all recipes and views as well as the registry settings for the current user To run select Backup and Recover from Start MKS RGA Applications Tools Process Eye 2000 System Backup This will bring up the System Backup dialog choose the location and name for the backup file Backup filename zip a PE2K Backup 45G1 Steve Billington ZIP Browse G One ZIP file on a fixed drive and any network drive OF one ZIP file split across multiple disks if required for local removable media Multiple ZIP files to fit on F Include report output HTM amp JPG F Include report output CS Start Ba
101. e pull down menu Process Eye Professional and selecting Standard Views Recipe Instruments View Windi Run Cirl R The other applications in the software suite Recipe Wizard and Recall have the Edit Ctrl same menu You can manage your views in any of these applications New Ctrl Preferences Print Setup Exit Manage Views The Manage Views start page gives details of the current views registered in Process Eye List of currently specified Standard Views Name of View Name of View __ Default Sample Swept View New Sample Trend View i fd To create a new view click the New button Edit Delete Set As Default 5 5 1 Creating a New View A swept measurement view can only be associated with swept data acquisitions e g Analog or Bar chart measurement It cannot be associated with either a Peak Jump or a Leak Check measurement A trend view can be associated with any measurement or collection of measurements Manage Views en eee eee The Manage Views start page gives details of the current views Name of View Default mea registered in Process Eye Name of View S leS t Vi eae Tied view o News al To create a new view click the New button Edit Delete Set As Default Process Eye Professional V5 SP104008 100 August 2005 63 r armee i The Create New View Dialog appears This Wizard will take you through the steps of creating a Standard View on data Select ei
102. e shown as circles outputs are shown as squares A white box signifies the bit is low a blue box signifies that the bit is high A blue circle signifies a high input and a white circle signifies a low input 6 7 4 Remote Vacuum Controller RVC Window If your system is configured to have an RVC then the Digital IO button will be replaced by an RVC button al Old Mini Lab LM76 01001008 Microvision Clicking on this button will display Valve Mode Manual the RVC status Here you can 7 ture state aom ign vac m switch the turbo heater filament ee Ot O wv Oez valve s and valve mode ANN Filament State D Valve 2 6 7 5 Cirrus Window If you are using Process Eye with Cirrus the Digital IO button is replaced by a Cirrus button Clicking this button displays the Cirrus status EEEE ENE E AI E S You can control the Cirrus pumps ot St OF and heaters directly from this window If the Cirrus has a multi valve inlet you can select the active inlet from the drop down list The Pump indicator is red when the pumps are off amber when the pumps are starting up and green when the pumps are fully operational and the turbo is at speed Clicking the indicator will toggle the status The main Heater selection box allows the user to select three states for the chamber heater Off Warm and Bake When the capillary heater is on the indicator will turn from red to green clicking the indicator will
103. eading uses the same methodology as the Faraday calibration Choose one of the following three options which will be used at run time to define how At run time you will enter the current process pressure the output current from the multiplier detector will be converted to a pressure Scale to an extemal pressure gauge on the process chamber In this example we will use the second method which calibrates the multiplier to match the run time reading C C Use or to determine the pressure calibrati x sch a had a obtained using the Faraday detector same value Select the appropriate option and click Next Process Eye Professional V5 SP104008 100 August 2005 102 Instrument Calibration Wizard Calibration Mass and System Pressure Define the calibration mass and if requested estimate the likely system pressure applicable at runtime Multiplier Detector Calibration Parameters Mass to be used for multiplier calibration Ba Suggestions The following tems are only required when calibrating against a pressure gauge The anticipated process pressure gauge reading when the calibration is camied out is mbar The contribution of mass 36 to the gauge pressure entered above expressed as a percentage is eh ee Instrument Calibration Wizard Multiplier Gain Choose a means to specify the added contribution of the multiplier to the measured signal compared with the Faraday detector alone Setting the multiplier voltage a
104. eate a new wizard recipe Recall Data to open the Recall program in the directory associated with data stored in this recipe Allow Docking to make the recipe list dockable If this selection is not checked then the recipe list behaves as a floating window Show Instruments Show Dates Process Eye Professional V5 SP104008 100 August 2005 119 Recipe List Recipe Name Analog Interactive Barchart High Yacuum wo Barchart Interactive Barchart Low Wacuum W z Mee ale eek al Taai laen IM 4 Select Hide to close the recipe list It can then only be made visible by selecting Recipe List Window in the view pull down menu The Show instruments and Show dates functions have the same function as those in the view pull down menu described below Show Instruments To show the instrument that a recipe is written for in the recipe list window click on the Show Instruments item in the view pull down menu Toolbars Status Bar Generic recipes will have an unspecified instrument recipes that do not use an instrument will have None required as the instrument Recipe List Window Otherwise the instrument details that the recipe was written for will appear Show Instruments Show Dates Show Dates To show the date a recipe was created in the recipe list window click on the Show Dates item the View pull down menu Toolbars Status Bar Recipe List Window Show Instruments w Show Dates
105. ed connections There are no additional registered connections Jetail Help F1 lz there an unlisted instrument that you expected to find Click Troubleshoot to launch the Hardware Troubleshoot r Connection Troubleshooting Wizard Title Bar The title bar displays your computer name IP address and subnet mask enclosed in square brackets You already know from the previous chapter that using the graphic above as an example the computer named xpsp7instalipc is on the 10 10 54 0 IP address range and that it would be able to communicate with network instruments having unique addresses on the same range Control Unit List The control unit list displays all discovered control units Each entry displays information about the unit s serial number name its network location address type its accessibility and status You can double click an item in the list to view more verbose details about the highlighted control unit or you can right mouse click an item and bring up a context sensitive pop up menu that offers all the available actions that can be taken Details The Details button displays a pop up menu with more options about the information in the list Configure The Configure button displays a menu of relevant options relating to the configuration and set up of an RGA Troubleshoot The Troubleshoot button launches the Troubleshooting Wizard that can assist you in diagnosing hardware communications problems
106. elis Mains frequency 50 Hz v Filament type Tungsten v Cancel Process Eye Professional V5 SP104008 100 August 2005 35 3 4 2 Trips M101 00205003 Hardware Setup This tab allows you to set the behaviour of the filament and multiplier protection trips General Trips Analyzer Inlets Analog 1 0 Digital 1 0 Delays Tools Filament trips The electron emission current is continuously monitored by the control electronics o ESA OEEO 15 AASE ees oe Checking the first check box ensures that the filament is Extemal trip connection is configured for Filament protection turned off if the emission current cannot be maintained Turn filaments off when a client reliquishes a control connection If left un checked the filament will remain on but the peak data acquired may be subject to considerable error Multiplier trips 4 You can elect to have the filament turn off automatically after Vv a predetermined number of minutes of unattended use It is recommended that the external X trip jack socket is used to provide some interlocking of the filament circuit to an external hardware contact In this case you would select the Filament protection option from the drop down list In some installations the external contact is used to actually turn the filament on or off If this is the case choose the Filament control option You should not normally choose the No protection option Your choice for the final f
107. er of the particular entity on the network So in this example the network is the 192 168 0 0 network and the control unit would have the ID of 250 on that network If your computer is already on a network you should know your address and subnet mask it may be the 192 169 0 0 network but it may not If you are not connected to a network you will need to configure your computer as the administrator and using control panel to have a fixed IP address MKS suggests that you set your computer up to be 192 168 0 1 with a subnet mask of 255 255 255 0 If you have more than one control unit you will need a Small network switch to which you connect your computer and your control units If you just have the one control unit you can connect it directly to the computer but you must use a special network cable called a crossover cable this just crosses over the send and receive wires at either end Assuming that you have multiple control units decide in advance what the address for each will be They must all be different and the must be different from every other entity on the physical cabled network So what is an IP address and how should you decide what it should be You can imagine a busy industrial park with all the world s major corporations having their head office located within it You want to send a good old fashioned letter to the human resources department of one of these companies asking them for a job Your letter arrives at the busy
108. ere is no check in the box next to the instrument Process Eye will not pre connect The instrument will be available to you and to any other interested connection Only one mt LH 92 029223 connection can control an RGA at one time but the control unit will be pooled between multiple users You will also notice one other attribute in the small graphics above the LM80 instrument is in use indicated by the small peak spectrum beside it while LM92 is available for use If there is a problem with the connection to one of the instruments the following symbol will be displayed M E Cell 22 1D 1 Further information about a connection can be seen if you click on one of the connections Connections to Instrument Servers Property D e LM76 90805001 Hosman C LM 92 90805002 Fort 10014 Connected es Protocol Ver 1 3 Compatible Wer 1 2 Server ID MES AGA Instrument Server Check boses by instruments indicate that Process will automatically connect to the instrument at startup Only check Instruments that you have complete control over Changes will take effect next time Process i started Add Connection Remove Connection Refresh Export Close 6 2 Adding a Connection Clicking on the server will provide details about that connection Clicking on the instrument will provide details about that instrument To add a server connection click on the Add Connection button The Add New Connectio
109. ermanently on bright green C mostly off but flickers briefly every five to ten seconds C don t know RGA Communications Troubleshooting Wizard Ready to test The Wizard is ready to test the connection Click the Next button or click Back to change the information you have already entered Depending on the type of control unit the test may take up to a minute RGA Communications Troubleshooting Wizard The Wizard has completed its tests The results are shown below HARDWARE TROUBLESHOOTING REPORT Serial Number LM 76 90805002 Date 08 08 2005 15 42 09 Result The specified instrument was not found although the following control units were found to be connected to the server LM 76 90805001 Suggested corrective action s un the Administrative Assistant application from the Start Menu and ensure that the connected port is enabled The COMMS LED suggests that the control unit is working correctly Save Open v Always open the report when this page is displayed i Cancel Help If you can do so enter the instruments status by checking the LED s on the instruments rear panel and indicating the state of the LED s on this page Note the wizard may display a different page from the one shown here depending on your particular control unit Click Next to begin the test which depending on the type of instrument may take up to a minute When the test is complete the Wizard displays a
110. erwritten or you can choose to change either the list name or the file name 5 5 4 Delete a View in View Manager Select the view you wish to delete in the Manage Views dialog and click the Delete button 5 5 5 Setting a Particular View as the Default Manage Views List of currently specified Standard Views Default Sample Swept View 0 Sample Trend View Set As Default One swept view and one trend view can be set as your default for that type The Manage Views dialog shows which views if any are currently default To select a view as the default simply highlight it and click Set As Default When you define which views a recipe uses you can select that the recipe should use the default view This will be the view specified in the Manage Views dialog If no view is set as default Process Eye will show a view with its own default settings If you want to change the default view from one registered view to another simply highlight the new view that you want as the default and click Set As Default The existing default view will be un set If you want to stop using one of your views as a default altogether and revert to the built in default view select the view that is currently the default view for that type and click the Set As Default button again Process Eye Professional V5 SP104008 100 August 2005 65 Chapter 6 Managing RGA Connections 6 1 Connection Information The connections to Process Eye Profe
111. es Process Eye Professional Main Recipe Instruments View Window Help Run crak of Se Edit Ctrl Pi New Ctrl h Preferences Standard Views we mbar Torr A i mTorr Print Setup Auto View to Front All ow Demo Test Data Demo With No Inatrument E Bemo T E asyyiew Show Recipe Error Message Boxes Instrument Tuning Interactive Leak Check Interactive Graph Settings Deals horam liber bi ae The Graph Preferences dialog appears Graph Preferences Here you can manipulate the various options used Graph Title in the graphs size colour font and the style of each item The dialog changes to reflect any changes that are made Y Axis Label Clicking on the Reset to Defaults button will return all the settings to their factory defaults x Axis Label ltem Size Color Font j E B Id Label Font an E Arial abcdeABCDE leie Reset to defaults Cancel The following diagram shows all the options that can be set If the properties cannot be changed for a selected item they will remain greyed out Trend Line 1 15 Border Title Font Plot Area Select the active Grid Lines item from the Major Tick Marks j Item drop down oe ac
112. es of scanning modes such as bar chart analog scan and multi trend In Process Eye Professional a scan can be made up of any number of mass scan measurements that acquire bar chart or analog data and mass reading measurements that deal with single masses User measurements that may be the result of a calculation can also be incorporated into the scan along with data from another source The package has been designed to be configured by the process engineer who can set up a number of pre set configurations called recipes for various production requirements These can then be selected by an operator with a single click If you install Process Eye Professional the functionality of EasyView is provided as one of the pre installed recipes EasyView Overview The EasyView package is designed to provide an easy to use working environment in which to use an MKS RGA While sharing the features of the Process Eye Professional package such as acquisition speed and wide dynamic range the package is fully interactive EasyView contains all the same capabilities of data acquisition storing to disk sensor calibration and degassing the ion source as Process Eye Professional and is compatible with external hardware such as a Remote Vacuum Controller or a Cirrus bench top system Topics Covered by this Manual The manual starts with the installation of the software and hardware There are sections on Getting Started acquiring data and displaying da
113. etector settings gt More detectors You can view the sensitivities of the other detector settings by SAUE Se ee clicking repeatedly on the More Detectors icon Current sensitivity 4 50e 005 Ambar Detector gain 1 0 at Filter E iiion The Filter Configuration is shown in the lower panel There Lowmass 32767 32767 are four integer numbers that set the alignment and resolution High mass 32767 32767 Copy ToAl at low and high mass Click a peset butan then choose one ot Restall Pest Click the Copy to All button to apply the alignment and resolution settings indicated for the current configuration Base Pressure RGA in the example shown to the other five ion source configurations Note the following Reset functions require version 5 21 Process Eye Professional V5 SP104008 100 August 2005 36 Click the Reset button to reset the settings for the current ion source configuration to the factory default values Click Reset All to reset all six ion source configurations to their factory default values In both cases you can select which features to reset as shown here Reset Options Base Pressure RGA You can individually reset Select one or more of the following analyzer reset options The options that you select will be reset to the factory default values GSR T The source parameters such as ion and electron energy Heer D ERR anya The basic ion source Faraday calibration sensitivity E The filter alignment
114. file on the degas settings page When you are ready to proceed click the Start button EasyView displays the progress of the degas procedure by indicating the time remaining the current power level and the filament current being drawn 8 12 Remote Vacuum Controller RVC BM Click the RVC button on the Page Selection toolbar to reveal the RVC status 7 j e EasyView LM76 90805004 V IOOGO lul Wh hex oe 41r Es i Vave Mode Automatic g Turbo State E Alarm 6 Status 1 High ac S Input i Heater State g Yalve 1 ih Status 2 Low Yac g Input 2 Aye Filament State Yalve 7 Py Automatic Hele Easyview VI000P Pressure in mbar You have full control over the RVC settings using this panel You can start and stop the pump select the valve mode or open or close individual valves Remember that in order to open valves the pump must be at speed and the RGA filament must be on Process Eye Professional V5 SP104008 100 August 2005 96 8 13 Cirrus Click the Cirrus button on the Page Selection toolbar to reveal the Cirrus status EasyView LM92 90805002 Civuy yon oo Page A duh UM be be A 3 Chamber Pressure 8 3E 006 mbar Pump ra Heater Cit Capillary Heater Selected Yalve Valve 2 TUNING Main Ailey aia ANIES Pressure in mbar Ready The chamber pressure is the value obtained from the internal gauge situated close to the turbo pump Click on an indicator to change its stat
115. guration Each calibration requires its own recipe A Faraday calibration determines the sensitivity of the ion source and optionally calibrates the pressure reduction factor of an inlet orifice or capillary A multiplier calibration sets the operating conditions of the detector to be optimal for the data acquisition conditions that you specify Creating a new calibration recipe involves two main steps On the next two pages you select the instrument on which the recipe will be run and the ion source configuration to which it applies Then you fill in the conditions under which the calibration will be camied out Click the Help button or press F1 to get help on any page Instrument Calibration Wizard Select a Specific RGA The list shows all the available connected instruments Choose the one to be associated with this recipe Standard RGA Select one of the RGA sensors from the list below The recipe will be written to connect with this specific LM76 01204004 127 0 0 1 j Process Eye Professional V5 SP104008 100 August 2005 To define the calibration select Define Faraday Calibration Settings from the Instruments pull down menu The RGA Calibration Wizard is started From the following dialog choose the instrument for which the calibration is to be defined and click Next 99 Instrument Calibration Wizard Hardware Information This page lists the important features of the hardware resources y
116. guration of the RGA The administrator of your system may even have elected to install a restricted user interface in this case you will not even have access to recipes and this chapter will not be relevant to you Obviously if this is the case you will have been supplied with a set of recipes that control the RGA automatically Process Eye Professional V5 SP104008 100 August 2005 72 7 2 Launching a Process Eye Recipe The currently available recipes are shown in the Recipe List 4 x Recipe Name Analog Interactive Barchart High Vacuum with Disk Store Barchart Interactive Double click the entry in the Recipe List we Barchart Low Vacuum ith Disk Store a Barchart With Trend Interactive Degas enclosed ion source Highlight the entry and choose Recipe Run from the menu or click the e aaee on gauge Run Recipe button on the Toolbar Demo With No lnstrument Eapen ee ee EEOSE Right click the entry and choose the Run menu option Peak Jump Interactive To run a recipe do one of 7 3 Closing a Process Eye Recipe The simplest way to close a recipe is to select its tab in the Status Pane and then click its close button at the top right hand corner This button may be disabled if the author has written the recipe to disallow manual closure of the recipe re ee ee close the recipe automatically UserText StartTime EndTime Connected to Mo name COM CLM 5 00501 01
117. h Bectron Energy User defined 1 User defined 2 User defined 3 User defined 4 amp Low Mass Alignment 26369 al W High Mass Alignment 35859 al Hi Low Mass Resolution 30719 al E High Mass Resolution a73 al H AAA Copy to all gt Main AOE LAA Exactly the same comments apply to the tuning parameters in the Tuning View In the example shown above the settings shown are again applicable to the active Standard Electron Energy configuration Either enter a number in the text boxes for the four parameters or use the sliders to change the values If you wish to use the current tuning parameters on all of the ion source configurations you can simply click on the Copy to all button If you change your mind clicking on the Undo Copy will reset the parameters to their previous values This undo option Is only available whilst this window is open If the active view is changed the values will be permanently written Note You will often use the EasyView recipe to adjust the ion source alignment and resolution because it provides an easy to use interactive environment in which to work Please read the additional information on tuning in the next chapter 7 6 5 The Status Window for the Start up Recipe The start up recipe associated with the Main tab behaves like the status window for any other recipe except for two differences the instrument information shows all the instruments connected to the application and the start up
118. he Software on a hard disk or other storage device install and use the Software on a file server for use on a network for the purposes of i permanent installation onto hard disks or other storage devices or ii use of the Software over such network and make backup copies of the Software You may make and share unlimited copies of the Software for others in your own company to use at the same business location Ownership of MKS RGA hardware does not of itself confer a right to install the software If you did not obtain said hardware directly from MKS or one of its agents or distributors you must contact MKS and make separate arrangements to obtain a licensed copy of the software direct from MKS or one of its agents or distributors 2 Copyright and Trademark Rights The Software is owned by MKS and its suppliers and its structure organization and code are the valuable trade secrets of MKS and its suppliers The Software also is protected by United States Copyright Law and International Treaty provisions You may use trademarks only insofar as required to comply with Section 1 of this Agreement in accordance with accepted trademark practice including identification of trademark owner s name Such use of any trademark does not give you any rights of ownership in that trademark Except as stated above this Agreement does not grant you any intellectual property rights in the Software 3 Restrictions You agree not to modify adap
119. he Status Window 7 6 2 Instrument Status View in the Status Window 7 6 3 Ion Source Settings View in the Status Window 7 6 4 Tuning View in the Status Window 7 6 5 The Status Window for the Start up Recipe Chapter 8 Using EasyView Overview 8 1 EasyView Toolbars 8 2 Analog Mode Process Eye Professional V5 SP104008 100 August 2005 8 3 Barchart Mode 8 4 Leak Check Mode 8 5 Peak Jump Mode 8 6 Disk Store 8 7 EasyView Diagnostics 8 8 EasyView Tuning 8 9 EasyView Calibration Faraday 8 10 EasyView Calibration Multiplier 8 11 Degas 8 12 Remote Vacuum Controller RVC 8 13 Cirrus Chapter 9 Calibrating the RGA Using Process Eye Professional Overview 9 1 Defining a Faraday Calibration 9 2 Defining a Multiplier Calibration Recipe 9 3 Running a Faraday or Multiplier Calibration 9 4 Calibration Alignment and Stability Chapter 10 Customising the Workspace 10 1 Modifying the Toolbars 10 1 1 The Default Toolbar 10 1 2 Window Arrangement Toolbar 10 1 3 Trend Display Toolbar 10 1 4 Chart Display Toolbar 10 1 5 Scan Navigation Toolbar 10 1 6 Interactive Scan Navigation Toolbar 10 1 7 Customizing Toolbars 10 2 Graph Preferences 10 3 Other Preferences 10 3 1 Units of Pressure 10 3 2 Auto View to front 10 3 3 Show recipe error message boxes Process Eye Professional Chapter 11 The Main Application Menus 11 1 1 Recipe Menu 11 1 2 Instruments Pull Down Menu Process Eye Professional only 11 1 3 View Pull Down Menu Toolbars
120. his Span 0 dd JQ hhf mm JO ss case the last 10 minutes of data will be displayed With Display Clock Time selected the Clock Start feature is now available Clock start 15 08 2002 09 31 36 _ Time Axis Display and Legend Properties The time displayed will be the current time at the origin of the X axis You can enter a new time and date for the X axis origin Clock start 30 08 2008 122224 however if you have Scroll Display enabled the time origin will August 2005 bh E mm i ss be reset at the end on the next scan Mon Tue Wed Thu Fri 5 Each pane shares a common set of properties for the Time Axis Time Axis Display cloc hh 10 mm 59 ss 3 4 5 8 sn 12 moaiens TO Change the date click on the Clock Start pull down the 2 23 24 2 A Calendar dialog will appear Select the required date from the calendar pages Time of my choice 30 08 2008 ne 12 22 24 San Specific data source start time Key Legend C None Top legend C Side legend Save all the settings as a new or modified view definition lt Back Cancel Process Eye Professional V5 SP104008 100 August 2005 59 When checked the trend will automatically scroll to keep the latest data displayed If not Ww Scroll displ checked you can manually scroll the display to see the data held at any point in the data buffer Display days When checked the time axis will display the number of days the trend has been
121. hown on the X axis along with the scan number The four decade logarithmic Y axis displays the unit of pressure and the full scale pressure for the current data acquisition setting w p o B H a ua Minor ticks are also displayed The following section outlines the various changes that can be made to views using the Properties for Continuous Mass Scan View dialog We will look at each function in turn 5 1 1 X Axis Properties Checking the Use the data acquisition properties to set the X axis properties button creates a view with the X axis properties governed by the measurement on which the view has been based For example if the view was based on a Bar chart scan measuring from mass 5 up to mass 45 then this view will show mass 5 to mass 45 along the X Axis Checking the Use the following bases the X axis range on the values entered in the text boxes with the following limitations Although you can choose not to display masses that are being measured you cannot choose to display masses that are not being measured For example you create a Bar chart measurement scanning from mass 5 to 45 you can base a view displaying from mass 10 to 40 but not from mass 5 to 50 If this is attempted the view will revert to displaying the measurement s range Process Eye Professional V5 SP104008 100 August 2005 50 Minor Ticks Displays minor ticks on the X axis Show elapsed time in addition to scan number
122. iew will be known in the List of Views a Seka If you want this view definition to be your default swept EI measurement or trend view check the Save this view Te se thg view se the Helga Weal iorie ue as the default view for its type checkbox This is explained further in the following section Note this feature is not available if your administrator installed the restricted user interface option Back Cancel Note If you edit a currently existing view and change the name in the Name by which this view will be known In the list of views text box the file name will not automatically be changed to match the list name Unless you click on the File browse button and change the name of the file you will overwrite the currently existing view that you are editing and the original view will be lost Process Eye Professional V5 SP104008 100 August 2005 62 5 5 Managing Views Using View Manager Process Eye Professional only View Manager is Process Eye Professional s central view management system All stored views can be edited imported or deleted through View Manager regardless of their type or function You can set one each of your swept measurement and trend views to be the default for their type You can also create a new view for a specific purpose or recipe although it is easier to create the view dynamically while acquiring data and then save it for future use The View Manager feature can be started from the Recip
123. ilament trip check box selection probably depends on the local conditions of the way you work Sometimes it is advisable for the software to turn off the filaments automatically when you quit the RGA application In other cases you may prefer that they be left on all the time You should only adopt this approach if you are sure that the filaments are well interlocked at the hardware level The two options for multiplier trips are checked by default The first turns off the multiplier if the filament is not on The second automatically turns off the multiplier during a bake on a system with an MKS Remote Vacuum Controller RVC or an MKS Cirrus system 3 4 3 Analyzer This tab shows the ion source and mass filter configuration properties for each of six possible groups of settings You select the information displayed by choosing a Configuration from the drop down list at the top of the page 1M101 00205003 Hardware Setup WE In the example shown the settings relate to the Base General Trips Analyzer inlets Analog 1 0 Digital1 0 Delays Tools Pressure RGA configuration in which the electron emission E E A current is 0 39mA and the ion energy is 7eV lon source Electron energy ev 70 Emission current m 39 The calibration sensitivity in units of Amps per unit of pressure lon energy ev F Extractor potential V 110 is shown for the Faraday detector using filament 1 Maximum recommended pressure 1 33e 004 mbar Faraday Fil 1 d
124. ility select Lock This Computer from Start MKS RGA Applications Tools MKS_PASSWORD The initial username and password is displayed Your initial Username is admin and the initial password is blank You will be a Super User Your first action should be to Login with this Username and change your password You can iF you wish add further users who may or may Username admin d and a blan k not hawe the right to create Further users password field click Yes to continue Choose Yes to acknowledge that you have understood this message or choose No to guit The computer will now be locked amp Process Eye Password Lock DEIR To unlock the computer type admin in the UserName text box and This Process Eye PC is currently locked from users To use then click Logon the PC please provide a valid UserName and Password Press Alt T ab to show hide this dialog UserName Password Logon Process Eye Password Lock amka To lock the PC click Lock PC If you do nothing i e no mouse actions or key presses the PC will be locked after 5 minutes Lock PC Configure PC will be locked in 5 minutes To configure the Lock PC utility click Configure Extended Password Contig From configure you can create edit and delete users You can also No Rey Mouse activity lockout time rns 5 J j i i min change the time without use before the computer is locked When run for the firs
125. ion Files dat gt cancel YOu do not need to store information to save the current configuration for use by the current PC this happens automatically The file is not a back up Refer to the Hardware Setup chapter for information about backing up control unit settings Process Eye Professional V5 SP104008 100 August 2005 68 6 6 Exit Connection Dialog To exit connections simply click on the Close button If changes have been made to the pre connection status of any of the instruments and you want to activate the changes immediately you must restart the application see section 6 2 6 7 Hardware Information in the Status Pane Process Eye Professional only The status window gives information on connected control units and any recipes that are running The window can be resized and can be docked or float anywhere on the screen By default it is docked at the bottom of the Process Eye screen 6 7 1 No Instruments Connected Window smks Technology for Productivity Spectra Products No Instruments Currently Connected Click to make a Connection If there are no instruments connected or if the system is not set up for exclusive access to any instruments then the page will appear as above Clicking the Click to make Connection link takes you to the Connections dialog described above 6 7 2 General Information Window New Mini Lab LM80 200115367 MicroVision Idle Active Filament 4 1 b Active S
126. is will bring up a standard Windows colour selection dialog where you can choose a new colour To change the thickness of the displayed line move the slider on the Line Thickness control Line thickness i The Draw Stepped check box can be used when displaying information for a channel that has discrete values Draw Stepped Instead of each point on the trend being joined by a straight line the points are joined only by horizontal and vertical lines The value of the reading is not changed and is not necessarily 0 or 1 but is usually an integer Channel Display Mame Measurement M Mass 1400 Lo Atomicnittogen lt lt Auto gt gt 5 2 2 Adding a Trend Pane You can create multiple trend panes that allow you to display a number of different Y Axis linked to a common time axis on the same trend window Test Views 2 As Trend This is a 2 pane trend with channel 1 displayed on trend pane 1 with its own measurement units and channel 2 displayed on trend pane 2 with different measurement units You can if you wish display a channel on both panes n 00 00 00 00 01 00 00 02 00 00 03 00 00 04 00 00 05 00 00 06 00 00 07 00 00 08 00 00 09 00 00 10 00 Elapsed Time Process Eye Professional V5 SP104008 100 August 2005 55 On the Trend display pane and channel properties dialog click on the Add pane button to add a new pane Trend Display Pane and Channel Properties Set the channels to be ass
127. l be able to change the ion source settings on this page New Mini Lab LM80 200115367 MicroVision 7 Note These controls are ee enabled only if the measurement Electron Energy 0 100e 7 40 00 al i gt m enero a mode is analog and if the recipe Bastos e m author has allowed tuning LI a PU Ky Analog LE The ion source configuration for the current recipe is shown in green text while the settings displayed relate to the configuration highlighted in yellow In the above example the sliders and text boxes show the settings for the active configuration Standard Electron Energy Enter a number in the text boxes for the four parameters or use the sliders to change the values You can change the settings for any of the parameters in any of the configurations but remember that you will only see the effect on the data in the configuration associated with the green text because that is the configuration being used to acquire the data Process Eye Professional V5 SP104008 100 August 2005 75 7 6 4 Tuning View in the Status Window Click on the Tuning tab to reveal the alignment settings for the recipe s control unit If your recipe does not allow tuning these pages will be for information only However if your recipe does allow tuning you will be able to change alignment and resolution on this page Status New Mini Lab LM80 200115367 MicroVision Standard Bectron Energy Hig
128. l included in the RGA installation package i Cancel Help Process Eye Professional V5 SP104008 100 August 2005 You can choose the file locations for program files and system data You should always install the program files to your locale specific Program Files location since Windows prevents any changes to this area of the disk by any users other than administrators In contrast the location for data needs to be accessible to everyone who will use the RGA because these settings will need to be changed at run time If either of these folders needs to be created the Assistant will do this for you A Complete Install allows you to run RGA s on this computer and to save the data that is generated Sometimes you will want to install the software on a computer that will only be used to recall and review data files that were stored somewhere else In this case you do not need all the real time applications and you can elect to perform an Off line Installation MKS recommends that you keep your computer up to date with the latest service packs from Microsoft If you do not have the latest Windows service packs installed for the operating system and for Internet Explorer the Assistant will optionally apply them for you 13 32 MKS RGA Software Setup Welcome to Process Eye Professional The Setup Assistant has completed its checks on your existing software It is ready to install the RGA applications
129. l instruments connected to this one You can choose to allow any computer to have access to the network ports required by the MKS software or you can choose to restrict the access to your local subnet s only If you are familiar with the management of the firewall through Control Panel you will recognise this restricted access as being the settings behind the Security Center Scope button The default setting is to allow restricted scope Note that the Assistant will only set up the Windows XP firewall It cannot configure any other firewall software Process Eye Professional V5 SP104008 100 August 2005 17 S2 MKS RGA Software Setup This screen indicates that the Assistant has finished cman requesting information from you and is ready to apply The Setup Assistant is ready to save your settings the settings that you have entered If you choose Cancel at this point none of the Administrative Options that you have entered will be applied If you want to review your settings click the Back button If you are ready to save the settings click Next Cancel Help 3 4 MKS RGA Software Setup MKS RGA Software The Administrative Assistant has finished setup is complete The final part of the setup procedure will be carried out when you log on as the user of the RGA software Click Finish to exit i Cancel Help You can re run the Assistant and change any of the optional settings by selecting Start
130. lace you would be able to connect to real network instruments in Demonstration mode In Mixed mode the software will connect to both real and virtual hardware This option is primarily intended for RGA software developers Process Eye Professional V5 SP104008 100 August 2005 15 lt 2 MKS RGA Software Setup If multiple users log on to this computer you can Addisinistiative Distiare Mulina Users z choose how they interact with the RGA software Sharing data and settings between users If you want each logged on user to have a separate These settings affect the way that multiple users of this computer interact with the AGA software location where they Can save their data and settings i Each user of this computer has their own private storage location for data and choose the fi rst option on this page recipes as part of their My Documents folder The Assistant will set up folder locations beneath each user s My Documents folder C Process Eye Change Y Specify a common set of pressure units for all users Event Log However it is perhaps more common that you will Moe e want to work in such a way that all the individual log Fig Sit on users will share access to common data and settings In this case you must select a folder that is accessible to all users cme Hee The default location for this choice is the same folder that you chose earlier for the common system settings You can change this selection by
131. le will be defined by the measurements that the displayed channels use For the Usermeasurement measurements this is a scale between 100 and 1E 6 The check box will change the scale between linear and log f Use the following explicit settings Checking the above will allow you to set the maximum and minimum limits on the Y axis manually Max value 0 0001 33 Enter the maximum value you want to display Min value 6 352 008 Enter the minimum value W Log scale To display a Log scale check the box Note The software cannot display negative numbers or zero when set to Log scale i Units of pressure If the Units of pressure check box is enabled the axis will change scale if the units are changed in preferences Restrict these values to the masimum bounds of the acquired data If the above option is checked the scale will be limited by the maximum bounds of the measurements being used For example if the only data to be displayed are mass channels from Barchart1 the limit of the maximum value you can have will be the full scale pressure on Barchart1 f Stack channels of digital data With this option selected the Y axis pane does not have a scale as such All enabled channels are given a value of either zero or non zero and are then plotted against their channel name test45 1 As Trend uv Osr 0 o This option is primarily useful for displaying digital data In this example there are two digital input ch
132. ly that it will have a red cross beside it as shown in the next screen view RGA Device Manager xpspZinstallpc 10 10 54 145 255 2755 755 0 The list shows the control units that are connected to network and seral ports of this computer Double click an iter to view more details Serial Number Name Address Type Access Status a LM 76 90805001 Mv Plus Local RS232 Serial No preconnecton Set up requ Additional registered connections There are no additional registered connections Jetail Help F1 4 I I e T ls there an unlisted instrument that you expected to find Click Troubleshoot to launch the Hardware Connection Troubleshooting Wizard More Details ay aes Whenever you see an item with a red cross you should double Serial Number LM76 90805001 click the item in the list to bring up the More Details pop up Name MY Plus 5 Connection Status This instrument needs to be installed configured or d la log as shown upgraded before it can be used Click the Configure Now button Access When the Process Eye EasyView software runs it will ignore this instrument Configure Now Network Connection IP Address This computer 127 0 0 1 Server This instrument is a serial A5232 instrument connected to a Windows 32 bit RGA data server Fa Install and or configure this instrument before use This dialog displays much more information about the state of the instrument than can
133. n 1 and 254 that is not used by any other device on the physical network Never use 0 or 255 for the fourth number These numbers have a special meaning on a network The subnet mask for the control unit will almost always be the same as the subnet mask of your computer Ww Browse to the instrument when this dialog closes If you are in any doubt about IP addressing please read Appendix 1 of this manual or read the on line help on the subject by pressing the F1 key Process Eye Professional V5 SP104008 100 August 2005 26 Provided you give the control unit a unique address on your subnet RGA Device Manager will show it with a green tick RGA Device Manager xpspinstallpc 10 10 54 145 255 255 255 0 The list shows the control units that are connected to network and serial ports of this computer Double click an item to view more details Serial Number Name Address Type Access Status LM 76 30605001 MY Plus Local RS 232 Serial MHo preconnecton Ready m Additional registered connections There are no additional registered connections Help F1 l A Teas ae orate es ls there an Unlisted instrument that you expected to find Click Troubleshoot to launch the Hardware Connection Troubleshooting Wizard Once your hardware is installed the RGA Device Manager will show it as ready for use The main window of the RGA Device Manger is a live real time view of all the RGA s on your system The list upd
134. n dialog appears Add Hew Connection Enter Network Address specified either 4 b c d notation or by name ak Cancel And Or check the servers that you would like to add fromm the list of located servers below Server Address Type windows RS232 422 LM76 90805001 MV Plus windows R5232 422 LM92 90805002 Cirrus Refresh application will not be able to connect to it at the present time Process Eye Professional V5 SP104008 100 August 2005 The list shows all the servers that are on the network and all the serial instruments connected to this computer on 127 0 0 1 Check the box es beside all the servers you wish to add and then click OK You may add an unlisted server by network name or IP address The application will add this server to its list of shared access connections but the 67 Note where a server has multiple instruments you only need to click one of its checkboxes to access all instruments When you return to the Connections dialog you may optionally check the exclusive access checkbox next to your new connection s You will get exclusive access the next time you run Process Eye You will have Shared access during the current session 6 3 Removing a Connection Connections to Instrument Servers To remove a connection simply ae 029223 highlight the connection that is no ostname 5 EFA Port 10013 longer required and click on the pe t LMS0 2001 15367 Connected Yes a m ae oe Remove
135. nd detector gain The Multiplier detector increases the gain of the analyzer when compared to the signal achieved with the Faraday detector The purpose of multiplier calibration is to determine the multiplier voltage necessary to achieve the desired gain would like to define the multiplier gain explicitly Process Eye Professional V5 SP104008 100 August 2005 The Calibration Mass and System Pressure dialog When performing a calibration against the comparative Faraday detector reading all that is required at this dialog is to enter the mass at which the calibration will occur To continue click Next The Multiplier Gain dialog is displayed This dialog allows you to choose how you want to define the gain of the multiplier detector There are two choices Define the multiplier gain explicitly where a user defined gain setting is used for calibration Or Define the gain in terms of the peak height I need to measure where the maximum required peak height is entered and the associated gain is then calculated for calibration Both methods are described below 103 Define the multiplier gain explicitly Instrument Calibration Wizard d In the resulting dialog simply enter the required gain Multiplier Gain N value into the text box Enter a value for the gain achieved using the multiplier detector relative to the Faraday detector The implications of the entered value are explained along with the maximum a
136. nd minimum detectable Enter a value for Detector Gain or use the scroll bar to adjust the value Additional information partial pressures using this value of detector gain for EEPO EN EE EE a each electronic gain setting settings are valid and remain unchanged is as follows With an electronic gain of the range of measurement will be If you specify an impossible gain the dialog shows a 20000 amp 76 008t0 222 013 mbar red Stop icon Otherwise it shows a green tick icon At runtime calibration will be camied out using an electronic gain of Not applicable fury vel betwen OSS sod O5 acceptable When complete click Next Instrument Calibration Wizard In the resulting dialog simply enter the required agra ee e E A maximum detectable partial pressure into the text box Measurable peak height range r aa e a a aa aa N a The calibration recipe will then calculate the detector MM Favor detector gain over electronic gain recommended gain required to make this possible Additional information The implication of selection assuming that the current Faraday detector setting valid i i ri and remain unchanged is as follows aun ee The implications of the entered value are explained With an electronic gain of the range of measurement will be g rat A along with the maximum and minimum detectable x20000 6 6e 009to 2 2e 013 mbar partial pressures using this value of detector gain for You will achieve the specified maximum peak height using
137. nel type selected is Mass there are a number of ways of editing the channel One way is to select one of the pre defined channels in the selection table Atomic hydrogen i 2 Hidrogen 4 Helium 12 arbor 14 Nitrogen 2 be 14 CH group 14 Atomic nitrogen 15 CH3 group 15 Methane 16 Methane bl 1 bara Our Clicking on one of the lines will set the mass value and channel name Alternatively you can type in the value of the mass you wish to display in the Value text box Value 2 Then type the name that you wish to appear on the trend key in the Channel name or alias text box Channel Name or Alias H ydroger Note If you leave this box blank the channel name will be displayed as Mass xx where xx Is the value entered in the Value text box Trend views are not linked to any specific measurement indeed in Process Eye Professional it is very common to combine data from multiple sources onto a trend so that it is easy to see the interaction between the process and the RGA Often the name of the channel will uniquely identify the measurement in this case Optionally enter a measurement name or leave aur tsti CS d the lt lt auto gt gt option is the easiest to Fock fer sile seechon when tniesieieieed AA use the RGA software will automatically find the single measurement that has that named mass or channel However particularly with partial pressure data it may sometimes occur that you obtain the same
138. not be tested Yes to switch the filament on and then run diagnostics If you choose this option be sure that the vacuum level is such that it is safe to switch the filament on Process Eye Professional V5 SP104008 100 August 2005 89 8 8 EasyView Tuning E Note Tuning parameters can only be changed whilst in the analog mode In all other modes the tuning information can only be viewed Note If your control unit is an e Vision or e Vision Plus you will not be able to change the ion source settings EasyView LM76 00399001 Aew Head iM76 00399001 A lul GS bec Ged SA Acquisition Control du J fr uw soff f amp 32 v Accuracy5 v 160 1 333e 004mbar F 1 333e 004 mbar v i Low Mass Alignment 32767 Ki z gt Emission 0 SmA 1 00 aj H gt J3 High Mass Alignment 32767 x EJ gt Electron Energy 0 100e 70 00 al fl gt Low Mass Resolution 32767 Ki gt Ion Energy 0 10e 55 al y gt High Mass Resolution 32767 al of gt Extract 0 130 112 0 al y gt l L v The tuning information page consists of two parts The first is the mass alignment and resolution controls the second the ion source parameters The mass alignment controls control the position of the mass peaks in relation to the mass scale There are two controls for the alignment The low mass control affects all masses by the same amount Moving to slider to the right causes the peaks to move to the right and causes the alignmen
139. ns based on the values obtained and present the results in a flexible way The Recipe List contains a list of all the currently available recipes To run a recipe double click on the recipe title in the Recipe Names va list or select the recipe and click on the Run Selected Recipe button Process Eye Professional V5 SP104008 100 August 2005 44 6a Status Windows Process Eye Professional The Status window as the name suggests shows status information including instrument filaments events and alarms The Status Window is multi page in addition to the main page tab there will be additional tabs for each recipe that is running Click on the tab for the page you wish to view The tabs are named after the recipe to which they relate Click on the Recipe hotspot for recipe information and click on the Instrument hotspot for hardware information 6b Status Windows and Control Panel EasyView The lower portion of the screen is given over to the Control Panel in EasyView Like Process Eye the status window is multi page The first page tab shows all the connected hardware Subsequent tabbed pages show the control panel for each running RGA You use the features of the control panel to drive the RGA You can acquire data calibrate the analyzer degas the ion source and so on Process Eye Professional V5 SP104008 100 August 2005 45 4 3 Saving Data to Disk If you are using Process Eye Professional click the disk button on the
140. nteractive view is shown when this recipe is selected r Pressure in mbar Process Eye Barchart High Vacuum with Disk Store Becpe Edt yew window teo PORO A EAA A aN AA The Bar Chart High Vacuum with Disk Store view eee seer iS Shown when this recipe is selected Recpe Name uvalog Interactive Barchat High Vacuum with Darchat Interactive Done Pressure in mbar 10 3 3 Show recipe error message boxes Process Eye Professional If your recipes are all generated by the Wizard they are unlikely to cause errors but if you have added your own VB script code an error may occur If a script error occurs in the recipe you can choose whether or not to display an error message In a production environment you usually do not want to enable message boxes because there may not be anyone available to accept it whereas while you are developing the recipe you almost certainly do want to get a message when an error occurs The message box gives useful information about the error that has occurred If the error is a recognized error type then the error type is given along with the code that caused the problem the line the code is on and the recipe file name that contains the code You are given the option of debugging the recipe If you select Yes the Recipe Wizard application will open the recipe at the offending line If the Show Recipe Error Message Boxes is not enabled then the recipe will just abort on encou
141. ntering an error In all cases recipe errors are logged to the application log file in your Logs folder Process Eye Professional V5 SP104008 100 August 2005 117 Chapter 11 The Main Application Menus Note Some of the menus described in this chapter are not available in EasyView nor are they available in Process Eye Professional if as an Administrative Option you elected to use the Restricted User Interface 11 1 1 Recipe Menu The features accessed from the recipe menu have been fully described in the earlier chapters 11 1 2 Instruments Pull Down Menu Process Eye Professional only ee From this menu the Connections dialog can be accessed and calibrations can be defined and performed iF Define Faraday Calibration Settings 4M Define Multiplier Calibration Settings In EasyView the Connections menu item is on the Recipe J Run a Defined Calibration bri 11 1 3 View Pull Down Menu Toolbars This menu can be used to set up the appearance of Process Eye Status Bar Recipe List Window Show Instruments Show Dates Toolbars Toolbars Status Bar Recipe List Window Show Instruments Show Dates Opens the Toolbars edit dialog Toolbars Toolbars Menu bar Iw Default iw Scan Navigation Chart Display Customize iw Trend Display Window Arrangement Reset interactive Scan Siae W Show Tooltips W Cool Look Process Eye Professional V5 SP104008 100 August 2005 118 Th
142. o Aarne Ube uh WK be YY Allow Changes a File Facsec L aotect te estat Acquisition Control dal qof uw sof fh 32 AccuracyS C4 6 673e 007 mbar F 6 673e 007 mbar You can then change the scan properties un check the Allow Changes option and continue with the Disk Store without having to run through the Start Disk Storage dialog Note The name of the file will still change A given data file can only store data for one set of acquisition conditions MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 88 8 EasyView Diagnostics Diagnostics mode is only available if there is no scan mode currently selected If diagnostics is ay unavailable then the selection is greyed out Instrument Diagnostic Information Running diagnostics in EasyView produces the following 26 08 2005 12 16 33 report of i KS Serial Number LMi76 90805001 User Defined Name MY Plus EasyView Version 5 21000100 Instrument Info Sensor Identification Standard Open Source Detector Type Dual Faraday and multiplier Note that there is just one set of ion source and tuning External Hardware No external hardware g g RF Configuration Smart Head RF settings that is used throughout the application This same fiie pe i set of values is applied to all six of the settings in the control Embedded Software Version v5 00 unit Active Filament 1 Diagnostics Results Diagnostic Min Max Reading Passed 450 Suppl
143. ociated with this Trend View Individual panes display their own selection of channels from a common list of 15 items Trend Pane 1 v Channel Name Measurement Add Pane Mass 2 Hydrogen BarChart1 Mass 4 Helium BarChartl Mass 12 Carbon 12 BarChartl Mass 14 Nitrogen 14 BarChart1 Edit Channel gt gt Mass 15 Hydrocarbon 15 BarChart1 Mass 16 Oxygen 16 BarChartl Mass 17 OH group BarChartl vi Mass 18 Water BarChart Use Standard Nitrogen BarChartl View gt gt BarChartl Mass 28 Oxygen Mass 32 Mass 36 Argon 36 BarChartl Mass 40 Argon BarChartl Mass 44 Carbon dioxide BarChartl C Mass 64 00 Photoresist 64 lt lt Auto gt gt C Mass 69 00 Fluorocarbon lt lt Auto gt gt lt amp RR Checked channels that are not acquired are automatically excluded coca The settings for each pane can be modified Select the pane that you wish to edit from the Trend Pane Pull down list box Trend Pane 1 The two pane view at the start of this section was created in the following way Trend Pae Channel 1 was enabled on trend pane 1 Channel Display Hame Measurement AE User defined a KEUSE UserMleasure User defined 7 Channel 2 Userieasure Trend Pane 2 Channel 2 was enabled on trend pane 2 Channel Display Mame Measurement C User defined ggg Channel 1 User easure H User defined m Channel 2 User easure 5 2 3 Configuring the Trend s Y Axis Properties for Trend View
144. ofessional V5 SP104008 100 August 2005 20 1 4 User Set up Setup Wizard Welcome to Process Eye Professional Version 5 21 Development Build Number 100 Product ID mksrga 5 21 0001 procprof 1 7617 This Setup Wizard will guide you through the final steps of the software installation process Help is always available by pressing the F1 function key Click the Next button E Cancel Help You can run the User Set up application at any time by selecting User Set up from Start Programs MKS RGA Applications Tools but it will launch automatically the first time that you run a new or upgraded version of the RGA software Once again you will notice that there is full context sensitive on line help available by pressing the F1 function key or by clicking the Help button The pages that follow depend on the main set up code and also on some of the options selected by the administrator when the Administrative Assistant was run Setup Wizard Install Recipes Recipes define how the RGA is used and the data that it measures Before you can use recipes they must be installed Setup Wizard can install Process Eye Professional recipes for you These may have been extracted from the original install disk or be provided on a supplementary disk The recipes may be either samples that you can edit or special recipes developed by Spectra that are tailored to your particular application History Click the H
145. one Numbers United Kingdom 44 0 1270 250150 North America 1 408 778 6060 1 800 VAC CHECK MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 8 IT Introduction The MKS software covered by this manual is designed to operate with the full range of MKS Spectra smart head instruments such as Microvision e Vision and HPQ2 The software will run under Windows 98SE ME NT4 2000 and Windows XP operating systems No other versions of Windows are suitable Note This manual is to be used in conjunction with version 5 20 onwards of Process Eye Professional or EasyView If you are currently using an earlier version please contact your local MKS Spectra representative to discuss upgrade options Process Eye Professional Overview The Process Eye Professional package is designed to monitor partial pressures and optionally analog and digital inputs in a production environment where it is essential to observe and record the current status of the process while simultaneously reviewing historical events in both the current and archived runs In addition complex comparisons including statistical comparisons can be made in real time The data acquisition is fast and covers a wide dynamic range of pressures so that some or all of the partial pressures along with analog and digital inputs can be measured and stored while only data of interest is displayed Traditionally RGA operation has been based around a seri
146. or Where the calibration is performed at the peak centre the algorithm reports any misalignment of the peak in increments of 1 32 of an a m u Process Eye Professional V5 SP104008 100 August 2005 93 8 10 EasyView Calibration Multiplier Click on the Multiplier tab on the calibration page ee EasyView LIM 6 01100013 54 A dal GEL be Gael I9 py E Multiplier J Calibrate Wi Multiplier 1 against the Faraday detector using mass wL 40 ale and a multiplier gain of fu 100 aj M Apply the resulting calibration to both filaments Star p d Last calibrated by Easyview Never Current source sensitivity 2 23e 002 4 mbar ce EasyYiew LHTHO1 100013 4 Select the multiplier setting to be calibrated from the drop down list the mass to calibrate against and the multiplier gain required By convention you typically calibrate Multiplier1 to have a gain between 30 and 100 Multiplier2 to have a gain between 100 and 1000 and Multiplier3 to have a gain greater than 1000 The multiplier will be calibrated at the mass chosen so that the pressure reported in faraday and multiplier at this mass will be the same If you are using Process Eye Professional you will have an additional option to apply the same gain and detector voltage to all the ion source configurations Click Start to begin the calibration The calibration will perform a zero measure the peak height in faraday adjust the multiplier voltage so the peak height in mul
147. ou selected on the previous page This recipe will have access to the following resources System Standard RGA with Standard Open Source Inlet System None Inlet 1 RGA Chamber Factor 1 fixed calibration Vacuum Controller Not fitted Mass range 1 to 200 amu Detector Faraday and Multiplier Instrument Calibration Wizard lon Source Selection Select one of the available ion source configurations for this calibration Configuration name Stier eia ees mae 164 hd When the Wizard requests process pressure infomation assume that the operable inlet will be RGA Chamber h Curent Settings for this Configuration Current Faraday sensitivity for this configuration 1 50e 004 A mbar Previous Faraday detector calibration date Not calibrated Date of current Faraday calibration recipe No recipe found Electron Energy 70 0 eV Filament Emission 1 0mA lon Energy 5 5eV Extractor Volts 112 0 V Fixed inlet with an Inlet Pressure Reduction Factor of 1 Instrument Calibration Wizard Calibration Mass and System Pressure Define the calibration mass and if requested estimate the likely system pressure applicable at runtime Faraday Detector Calibration Parameters Mass to be used for Faraday calibration The anticipated process pressure gauge reading when the calibration is camied out is 1 33e 006 mbar The anticipated ion source pressure gauge reading when a aa mbar The contribution of mass 40 to the gauge pressure s entered foo
148. ource Filament Status MAA Sensor Identification Standard Enclosed Source Multiplier Status Off Total Pressure NAA Atmospheric Inlet Mini Lab If there is an instrument connected the instrument details will appear on the page The blue information area of the window is always visible The white information area changes to reflect the currently selected mode It also displays details on the currently selected instrument filament and multiplier status Select Filament selects which of the two filaments to use Click on the arrow The number indicates the active filament Your selection becomes the new default each time the control unit is 4 1 p powered up Filament On Off Click to switch the filaments on or off When the filament is on it is displayed red when off blue PPPs 6 7 3 Digital IO Window New Mini Lab LM80 200115367 MicroVision Port A Port B Combined value 0 Combined value 255 Bit 7 6 5 4 3 2 141 0 7 6 5 4 3 2 1 0 Configuration b b b b i h i i gt Configuration Re Re Be Fe Re Fe Fe aa Value CC CY Cd I e oe0e0000080 Clicking the Digital IO button changes the information panel to that of the digital IO port Process Eye Professional V5 SP104008 100 August 2005 69 The digital ports consist of 2 ports of 8 lines In the above example port A is configured as 8 outputs and port B is configured as 8 inputs However the inputs and outputs can be configured in any combination required Inputs ar
149. p mode Clicking on this button brings up the Peak Jump settings page in the status window Gin The Cirrus button is only visible when the control unit is associated with a Cirrus benchtop gt nalytical RGA system Clicking this button brings up the Cirrus information and control page The Degas button opens the Degas Settings page You can degas the ion source of selected MKS RGA s based on the settings you enter on this page The RVC button opens the RVC settings and status page You use this page to manage the vacuum hardware when fitted If you are using Process Eye Professional to run the EasyView recipe you will additionally have an ion source configuration drop down list box Use this to select the active ion source configuration for the RGA Process Eye Professional V5 SP104008 100 August 2005 78 8 2 Analog Mode A e EasyView EasyView LM 76 00600013 Recipe View Window Help xX Be B 8 EasyView LM 6 0060001 3 Analog EasyView Analog Mode Pressure 132 133 Scan 9 1 13 2004 11 10 16 amp EasyView LI76 00600013 Sasy ew AGA EJ lul E be H 41 gt Acquisition Control that 125 i 16 f A 32 v AccuracyS v 26 6 667e 007 mbar F 6 667e 007 mbar w s i Low Mass Alignment 32767 Ki m gt Emission 0 SmA 1 00 Ki H gt l Y High Mass Alignment 41279 Ki Bi gt Electron Energy 0 100e 70 00 a E gt Low Mass Resolution 35839 Ki Bi gt Ion Energy 0 10 55 Ki Ef gt
150. pops up a new dialog as shown here DY Conte tiation There are usually sixteen available channels of I O Eas Ue Sas o pen ears ere although if you have an external gauge on the analog Sebel apelin ana ll input as shown in this example one or more channels bai High may be marked as reserved Not used so Not used fe Not used jv Dogitchtor f100 mi iseconds You cycle through the options of Not Used Input and Niue Pid ad Biv aeia Output simply by left mouse clicking on the icon in the ne se Set the maximum permissible On time to left most column of the list Not used 300 seconds Not used i i oe x Not used The pin associated with the channel is indicated in the e rid oan N fourth column Reon Ping IBV stall The additional pins are described at the bottom of the dialog Cancel The Options panel has the following features Process Eye Professional V5 SP104008 100 August 2005 38 You can choose whether the outputs boot high or low See below You can modify the deglitch time See below When PB6 and or PB7 are configured as outputs you can optionally set a maximum permissible on time for these outputs only Typically this is used for the control of a calibration gas sample bottle in order to ensure that the bottle contents are not inadvertently drained The When the control unit powers up set the TTL levels of connected output option is used to determine the state of the digital outputs
151. r the stored data Start disk storage What to store Where to store Name Data How to make up the file name f Just use the folder name specified f Append datetime information to the name f Append incrementing number to the name C Process Eve 2000D ata Barchart With Trend Interactives D ataQ00009 5 d Cancel At any time you can end the disk storage by clicking on the interactive store button again You can pause the disk store In Process Eye Professional click on the Disk store pause button In EasyView check the Pause check box To resume storing later In Process Eye Professional simply click the button again In EasyView un check the Pause check box This will restart storing to disk to a new file Note While the disk store is active the scan is no longer interactive and the interactive scan controls will be unavailable When you pause or end the disk store the scan will become interactive again Process Eye Professional V5 SP104008 100 August 2005 46 4 4 Adding Annotations Time stamped annotations can be added to a swept measurement or a trend There are 2 ways to do this The first is to click on the Add Annotation button In the dialog that appears you can specify a time for the annotation to appear on the trend and any text you wish to add Annotations amp 3i By default the time of annotation will be the current time Time of annotation 28 11 2002 Y 14 48 02 gt although yo
152. recipe does not have a recipe status view New Mini Lab LM80 200115367 MicroVision Status Idle Active Filament 4 1 gt Active Source Filament Status AAAS Sensor Identification Standard Enclosed Source Detector Type Faraday Channel Plate Multiplier Status Off Total Pressure NZA Tunable No Maximum Mass 100 AMU Atmospheric Inlet Mini Lab The next chapter is entitled Using EasyView As a Process Eye Professional user you should still read the chapter because you have the functionality of EasyView accessible to you as an EasyView recipe Process Eye Professional V5 SP104008 100 August 2005 76 Chapter 8 Using EasyView Overview EasyView is a special application that provides interactive control of the RGA All standard RGA modes of operation are available in addition to diagnostics degas and calibration mode The previous chapters have described how to manage your instrument s and how they will be displayed in the Main tab of the control panel When the application starts it automatically creates a connection to all your instruments Each one has its own tabbed page All scanning modes are fully interactive allowing changes to be made to all scanning parameters There is also a disk store function allowing all data to be stored to disk for review using the Recall program If you installed Process Eye Professional the functionality of EasyView is available to you as a recipe You do not need to install
153. reement and continue to install or if you do not wish to accept this Agreement to decline this agreement in which case you will not be able to use the Software The terms of this license are not affected by any of the following whether you purchased the software in association with MKS hardware whether you obtained the software at no cost for an evaluation whether the software is labeled Demonstration because both the RGA Software and the RGA Demonstration Software are fully featured implementations of the software product For this reason the same license restrictions apply whether the software was obtained for demonstration or commercial purposes By the same token it makes no difference to the license terms whether you have paid for the software as part of a commercial arrangement or you obtained it for no charge as an evaluation copy Upon your acceptance of this Agreement MKS grants to you a nonexclusive license to use the Software provided that you agree to the following 1 Use of the Software You may only install the software if it was supplied to you or a business colleague in the same company as yourself and at your business location by MKS or one of MKS agents or distributors It is your responsibility to know the identity of the individual or group of individuals at your business location who was were the original licensed recipient direct from MKS or its agent or distributor You may install t
154. rend Interactive 4s Trend we 3 Demo With No Instrument 1 45 Trend If Bring Recipe to Front is clicked the two Bar chart with Trend Interactive views are overlaid on the other view Cascade Recipe Brings the views for the current active recipe to the front and arranges them in cascade mode a Process Lye Barchart With Trend Interactive Recipe Ede yew window Help OF BF X GI OZ S naam gt E ben lin M e ROD Bt No name COM LM75 00502005 v Ls BaChani v Accwacp5S i 44460004 mbar v F 4 444e004rbe v tt ije Se Aa xi F Barchart With Trend Interactive As Trend Recipe Name Ess oe Barchart With Trend Interactive 1 As Barchart Analog Interactive Barchat High Vacuum vath iio 4 Barcha Interactive Barchat Low Vacuum With Bachat Wih Trend Interact Demo With No Inetumert Ingtumert Tuning Irtecoctive Leak Choc Interactive Peak Jump Interactive T T T T T T T T T T T T T T T T T T T T T T T T 2 4 7 6 68 10 12 14 16 18 20 22 24 26 20 30 32 34 36 36 40 42 44 46 40 50 Scan 48 jo 1 Category ck EventText UserText StartTime EndTime aj Wizard Message Connected to No name COMH LM7S 00502005 OOMOO 191331 No Tine Specified W always Show latest Alarm s Acknowledge All Record 1 of 1 BA Main MATA omicuemiicelstis Demo With No Instrument Tile Recipe Horizontally Brings the views for the current active recipe to the front and tiles them horizontally Tile Recipe Vertically
155. report comprising of the following information The overall result Suggested corrective actions The individual test results Additional diagnostic information that could be useful in further dealing with the problem The Save button allows you to save a copy of the report to show it to your system administrator for example You can choose between one of two different report formats plain text or html The Open button displays the report in html format in your browser making it easier to read You can have the wizard always open the report in your browser by checking the check box This completes the introduction to the management of RGA hardware The next chapter examines the RGA Device Manager application in more detail Process Eye Professional V5 SP104008 100 August 2005 30 Chapter 3 The RGA Device Manager and Hardware Set up The previous chapter gave a brief introduction to RGA Device Manager It showed how you might use the application to install a new RGA this chapter describes all the functionality of the program 3 1 The Main Screen Elements RGA Device Manager xpsp installpe 10 10 54 145 255 255 255 0 The list shows the control units that are connected to network and serial ports of this computer Double click an item to view more details 10 10 54 200 Serial No preconmecton Ready wg LM101 00205003 HPO2IP 10 10 54 253 Fixed Nopreconnection In use Details Configure Additional register
156. ressure NJA J TIATA a Se De Main ARSE AAE Done Pressure inmbar MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 43 4 3 Running a Barchart with Additional Trend View The main Process Eye Professional or EasyView screen is where most of your time will probably be spent It provides a view onto the RGA data being acquired in EasyView it has the control panel that you use to determine what the RGA does while in Process Eye Professional it provides details of installed recipes instrument information alarm events and communications status s Process bye Protessinnal Analog Interactive AT EON COO EE AOE r ee ee This shows a typical screen for Process BBE Non Hoad COTO KMT OOOK Feo T Acousy6 Elas odiniu S F ooa je a oa Eye Professional The screen for ma EasyView was shown on the previous es ee page Both screens share many common ee fae Se Pee Mee Me deneni Rachal Wilh Tiera Intera Demo With No Irnstunmerit Easy View Instrument Tuning Interactive Leak Check Interactive Peak Jump Interactive _ x gt 3 Fressu s mbar Sods 15 20 725 30 35 40 45 50 Scan 8 Alarms CotegoryAck EventText ane StartTime EndTime Heed Lh76 00399001 F 00399001 1410 2003 16 38 03 No Tine Specified ri Filamert supply change LM76 00399001 On 1410 2003 16 38 04 No Tine Specitied C d li Wizard Message abatar V Alwaye Show latect Alarm e l Acknowledge All Records
157. revious calibration Click Apply to apply the new calibration or Cancel to ignore the result Cancel Details of all calibrations are logged in the application log file at one of the following locations Process Eye Logs Process xml or Process Eye Logs Process log or EasyView Logs Process xml or EasyView Logs Process log eMESSAGE Time 2003 10 27 12 01 17 Value Calibrating RGA Source Standard Electron Energy Multiplier 1 detector gt lt MESSAGE Time 2003 10 27 12 01 17 Value Existing settings sensitivity 5 57e 004 a mbar voltage 683 3 volts gt lt MESSAGE Time 2003 10 27 12 01 19 Value Filaments have been on for 4 8 minutes gt lt MESSAGE Time 2003 10 27 12 01 41 Value Peak height of mass 28amu using Faraday detector 1 44e 008mbar gt lt MESSAGE Time 2003 10 27 12 01 41 Value Starting multiplier calibration Required peak height is 1 44e 008 mbar using a detector ain of 100 gt EENE Ta aiian 12 02 16 vValue Calibration succeeded The stability test result was good The new calibration is 5 51e 004 A mbar at 683 Volts gt lt MESSAGE Time 2003 10 27 12 02 26 Value Calibration applied Standard Electron Energy New factor 5 51e 004 Afmbar gt lt LOGFILE gt On the final page of the calibration wizard click on Finish to exit Process Eye Professional V5 SP104008 100 August 2005 106 9 4 Calibration Alignment and Stability When the calibr
158. rporate the new settings Use the new recommended bounds changes the Y Axis settings to match the new measurement settings These options will become more obvious using the following example Suppose you are current y acquiring large peaks on a low electronic gain The recommended bounds are from 1e 4 torr to 1e 8 torr Now what happens n the future when you switch to the high electronic gain range so that you can see the smaller peaks The new recommended bounds will be say 5e 7 torr to 5e 11 torr Option Y axis Range Now Y axis Range after future gain change to recommended 5e 7 to 5e 11 1e 4 to 1e 8 1e 4 to 1e 8 2 Force within 1e 4 to 1e 8 5e 7 to 1e 8 3 Expand 1e 4 to 1e 8 1e 4 to 5e 11 1e 4 to 1e 8 5e 7 to 5e 11 It may seem that the obvious choice is the fourth one But the differences between the options become clearer when you scroll back through the data that you obtained before the change In some of the cases the big peaks would be clipped at 5e 7 in others the early data would appear very noisy because it was obtained at a lower gain Once the changes to the view settings are complete click on the Finish button to apply the changes or check the Save Settings check box to bring up the Save View dialog described in 5 4 Note the save settings check box requires at least v5 21 of the software and is not available on EasyView installations nor Is it available on Process Eye installations where the administrator has electe
159. rt Process Eye three times Cancel within a short time period There is full help and more description of the watchdog configuration options Click Start Programs MKS RGA Applications Help Process Eye Professional V5 SP104008 100 August 2005 130 Appendix 1 Network Hardware and IP Addresses It is increasingly common for RGA control units to be fitted with TCP IP network connectivity This is a very useful feature it allows connection over long distances it is easy for multiple users to share hardware and it makes it possible to benefit from features such as browsing the control unit with a simple web browser However to take advantage of all these benefits you have to understand how to give the control unit an IP address every entity on a network has to have a unique address by which it can be identified IP addresses are usually expressed as four numbers separated by a dot full stop or point mark So for example the default address of a control unit when it leaves the factory is 192 168 0 250 The numbers range from 0 to 255 In addition to the unique IP address you also have to specify a subnet mask which has the same format but which for most users will always be 255 255 255 0 If you understand binary numbers you will recognize this as a bit pattern of 24 1 s followed by 8 O s The 1 s mask the part of the address that is the network identifier while the 0 s mask the part of the address that is the identifi
160. s currently assigned to Window Arrangement the new Toolbar you have created test Process Eye Professional V5 SP104008 100 August 2005 112 You can drag one of the buttons in this case the Create New Recipe button onto the toolbar Process Eye Barchart With Trend Interactive joy x Becive Edt Wew Window Helo l D 4 xX 49 S K DDH ie Lii OIB imod fw Me lamam E No name COM Lm75 00min v lla BaChatt E AcowacyS v sin 3944004 v F 39442004 mba v be 1 so i I a Fi Barchart With Trend Interactive 2 As Trend Select a category then click a button to see ite description Drag the button to any toolbar Description Use Recipe Wizard lo create oc elit a recipe 10 15 20 25 30 35 40 45 90 Eie Category Ack _ EventText TRS UserText TEO Fi StatTime EndTime e Wizard Message Connected to No name COM1 LM75 00501010 16 07 2002 11 36 47 No Time Specifiocd 7 Always Show latest Alarm s Acknowledge All Record 1 of 1 y al gt Le Main Barchart With Trend Interactive Ready Pressure in mbar NUM aner 4 mbar id ha L ith Trend Interactive 1 As Barchart Se MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 This new Toolbar can then be positioned next to the other toolbars 113 10 2 Graph Preferences You can set the global properties of the views from the Graph Settings under Preferenc
161. s the method used to report the peak height The options are Peak Centre Peak Max or Peak Average Accuracy5 Accuracy Scan accuracy determines the amount of averaging carried out for each reading A high accuracy number provides a clean scan but increases scan time The accuracy ranges available are from 0 to 8 Ch 1 333e 002 mbar Electronic Gain The electronic gain of the pre amplifier can be changed by selecting one of the values from the drop down list The lowest electronic gain appears first in the list The pressure indicates the maximum value that can be measured using that range The higher the gain selected the smaller the partial pressure that can be measured this may cause peaks of a higher partial pressure to saturate Process Eye Professional V5 SP104008 100 August 2005 81 F 1 333e 004 mba Detector The detector type used for the scan can be changed Depending on the type of instrument the options are Faraday Multiplier 1 Multiplier 2 and Multiplier 3 Multiplier 1 2 and 3 refer to the same physical detector but using three separate calibration values that provide successively greater amplification of the ion current jx Add Trend Click this button to add or remove a trend view in addition to the Barchart view This tend can be edited in the same way as any normal trend view MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 82 8 4 Leak Check Mode ts e EasyView EasyView
162. settings Enables the maximum and minimum displayed pressures to be entered manually The display can be either linear or logarithmic determined by the check box Restrict these values to the maximum bounds of the acquired data Causes the Y axis maximum pressure setting to be governed by the maximum pressure obtained from the measurement associated with the view Note You cannot display zero or negative values in logarithmic mode Grid Displays a horizontal grid aligned with the ticks of the Y axis Minor Ticks Displays minor ticks on the Y axis 5 1 3 Subsequent Y Axis Auto Ranging Strategy If a view s Y axis limits are based on an interactive measurement or the RGA has an inlet system these limits can be changed dynamically during the lifetime of the view Process Eye Professional V5 SP104008 100 August 2005 51 Four options determine how the axis will react to future changes in the measurement conditions such as using a new inlet or detector or electronic gain range for example Leave the Y Axis unchanged leaves the Y Axis settings unchanged when the measurement changes The settings will remain as you set them now Force the Y Axis scale within the new recommended bounds reduces the maximum and or increases the minimum value so that the Y scale does not overflow the new recommended bounds Expand the Y Axis scale to include the new recommended bounds changes either the maximum or the minimum Y axis settings to inco
163. sl_ Hee through the mouse and keyboard Process Eye Professional V5 SP104008 100 August 2005 16 32 MKS RGA Software Setup The RGA software continuously attempts to connect Administrative Options RS232 and RS422 Serial Instruments to an RGA instrument on all of your computer s serial Serial instruments that may be connected to this computer p p ports unless you identify particular ports as being RGA disabled The AGA software can auto detect serial instruments connected to the COM ports on this computer Jn el eae If you plan to connect RS232 or RS422 serial ee instruments to this computer you will want to ensure serial all the serial ports to which you might connect an saral RGA are RGA enabled If you do not need to connect serial instruments to this By the same token be sure to RGA disable any ports computer click Uncheck All g to which you connect other devices If you only use RGA s with network connectivity you should click the Uncheck All button to prevent the RGA software from continuously checking to see if there is an instrument attached If you have Windows XP installed the Assistant will display the Windows Firewall page 32 MKS RGA Software Setup Widows Frowal The Windows firewall became a default feature of The Setup Assistant will adjust the Windows Firewall settings f Windows XP with the release of service pack 2 The Assistant will configure your XP firewall The
164. ssional V5 SP104008 100 August 2005 10 TII Software Installation Pre requisites The full Process Eye Professional and EasyView software runs on any of the following operating systems Windows XP Windows 2000 Windows NT4 with service pack 6 Windows Me Windows 98se The Demonstration CD software runs only on Windows 2000 or XP and additionally requires a screen resolution of at least 1024 x 768 pixels The TOOLweb RGA version of Process Eye Professional requires that Internet Information Services IIS is pre installed You can do this from Control Panel and Add Remove Programs Select the Add Remove Windows Components option If you are installing the TOOLweb RGA version of Process Eye Professional please read the additional installation instructions provided as a help file on the CD ROM Before you start to install your RGA application software make sure you have fitted and pre configured any plug in communication cards you may require You must be an administrator of the computer to install the software However once the software has been installed you can run it with simple user privileges MKS recommends that you do so since this is a key component in any strategy for preventing malicious software infecting the system The following sections detail the software installation creating an RGA User account and configuration of the main application program Process Eye Professional V5 SP104008 100 August 2005 11
165. ssional or EasyView are usually configured in the RGA Device Manager program however you may also edit the connection settings from within the Process Eye main program If you have installed Process Eye Professional the same dialogs are accessible from the same menu item in Recipe Wizard Process Eye Professional Main From the Process Eye main window select Connections Recipe Instruments View Window Help from the Instruments pull down menu 7 JF_ Define Faraday Calibration Settings iM Define Multiplier Calibration Settings J Runa Defined Calibration E ESAE In EasyView the menu item is on the Recipe pull down menu Recipe View Window Help ji Close Connections Preferences Frink Setup Exit The Connections to Instrument Servers dialog appears Connections to Instrument Servers 192 168 0 11 D LM92 029223 Fey 192 168 0 173 M gt LM90 2001 15367 Check boses by instruments indicate that Process will automatically connect to the instrument at startup Only check Instruments that you have complete control over Changes will take effect next time Process i started Add Connection Refresh Save Info Close Each of your RGA control units is connected to software that acts as a data server On a network instrument this software is part of the control unit For a serial instrument the server software is a Windows application that runs on your computer The
166. t gt Oxygen 16 lt lt Auto gt gt OH group lt lt Auto gt gt bad saa Use Standard Nitrogen lt lt Auto gt gt View gt gt Oxygen lt lt Auto gt gt Argon 36 lt lt Auto gt gt Argon lt lt Auto gt gt Mass 44 00 Carbon dioxide lt lt Auto gt gt Mass 64 00 Photoresist 64 lt lt Auto gt gt Mass 69 00 Fluorocarbon lt lt Auto gt gt lt amp Checked channels that are not acquired are automatically excluded coca You can add as many trend views as you need The same data can appear on more than one view LLL Arrange All Windows This item will bring up an additional list Te Marzana From here you can arrange the windows in the usual way In this menu however Tile vertically all the currently open views from all the currently running recipes will be arranged Arrange Icons The other window arrangement methods in this pull down menu apply only to the active recipe Process Eye Professional V5 SP104008 100 August 2005 122 Bring Recipe to Front This item brings the views for the current active recipe to the front deck Mew Trend Window In this case there are 2 views for the active recipe drrange All Windows Barchart with Trend Interactive and one view for the inactive recipe Demo with no instrument ba Ering Recipe To Front Cascade Recipe fe Tile Recipe Horizontally PT Tile Recipe vertically 1 Barchart With Trend Interactive 1 4s Barchart 2 Barchart With T
167. t translate reverse engineer decompile disassemble or otherwise attempt to discover the source code of any compiled Software You agree neither to redistribute the complete Process Eye Professional V5 SP104008 100 August 2005 3 software nor any of the examples or documentation to any third party or to a different business location within your own organization You agree not to pass on the software in part or as a whole to any third party or to any person or persons in your own company organization but not at your business location This restriction applies equally whether or not your own organization obtained the software at no cost 4 No Warranty The Software is being delivered to you AS IS and MKS makes no warranty as to its use or performance MKS AND ITS SUPPLIERS DO NOT AND CANNOT WARRANT THE PERFORMANCE OR RESULTS YOU MAY OBTAIN BY USING THE SOFTWARE OR DOCUMENTATION MKS AND ITS SUPPLIERS MAKE NO WARRANTIES EXPRESS OR IMPLIED AS TO NONINFRINGEMENT OF THIRD PARTY RIGHTS MERCHANTABILITY OR FITNESS FOR ANY PARTICULAR PURPOSE IN NO EVENT WILL MKS OR ITS SUPPLIERS BE LIABLE TO YOU FOR ANY CONSEQUENTIAL INCIDENTAL OR SPECIAL DAMAGES INCLUDING ANY LOST PROFITS OR LOST SAVINGS EVEN IF AN MKS REPRESENTATIVE HAS BEEN ADVISED OF THE POSSIBILITY OF SUCH DAMAGES OR FOR ANY CLAIM BY ANY THIRD PARTY Some states or jurisdictions do not allow the exclusion or limitation of incidental consequential or special damages or the exclusion
168. t from the application name itself the title bar indicates the name of this computer and its full IP address and subnet mask If you have multiple network cards fitted you can find the network properties of each card by clicking the Details button If you need to connect to network RGA s it is important that you know the IP address of this computer The main window features a list of all the RGA s that are connected to this computer They may be Serial instruments connected to COM ports on this computer Serial instruments connected to a different computer Network instruments The list box displays The Serial Number of the instrument This is a unique ID always prefixed with LM The Friendly Name You choose this name it is easier to locate a specific RGA by name rather than its serial number The Network Location Process Eye Professional V5 SP104008 100 August 2005 24 The Type of Connection serial or if a network instrument whether the address is fixed or assigned by a DHCP server The Access Control settings whether you want exclusive or shared access to the control unit The current Status of the control unit whether it is available or in use Other aspects of the main window are described later in this chapter If you are installing a control unit for the first time it is very unlikely that it will show up in the list with a green tick indicating that it is ready for immediate use It is much more like
169. t time the first action should be to create a new user to do this click Add New User Edit User Delete User Add Hew User Cancel Process Eye Professional V5 SP104008 100 August 2005 128 Add Edit User Enter a new user name and password UserName New User Two options are possible for this new user W This user can create edit delete users i Enable Windows Security buttons on Ctrl Alt Del This User Can Create Edit Delete Users allows ce i administrative privileges over the other users Confirm password Note Never delete the original default user until at et least one user with administrative privileges has been created Enable Windows security buttons on Ctrl Alt Del normally the user can use ctrl alt del to bring up the windows security dialog and then log off or shut down the computer Un check the box to prevent this from happening Note some Windows systems do not support this particular functionality Extended Password Config The new user will now appear in the list click OK to continue No Key Mouse activity lockout time ming 5 admin Mew User Edit User Delete User Add New User Cancel OF Log on as the new user by entering the new username and Process Eye Password Lock Sela ne Y This Process Eye PC is currently locked from users To use the PC please provide a valid UserName and Password x e It is not possible to click on Configure and delete the
170. t value to increase Moving the slider to the left causes the peaks to move to the left and the alignment number to decrease The high mass control affects masses proportional to how far up the mass scale they are Moving mass 1 by 0 1 amu using the high mass control will cause mass 100 to move by 1 amu for example The resolution controls control the peak width As you increase the resolution the peak will get narrower but will also become smaller Reducing the resolution will make the peaks bigger but can lead to interference between adjacent peaks For standard instruments the resolution is set so the peak width at 5 10 for HPQ2 units of the max peak height is 1 amu Peak Height This peak is aligned at mass X 100 54 The resolution is set to 1 amu at 5 of the maximum peak height Mass All instruments have the mass alignment and resolution set before leaving the factory A copy of the tuning settings is always included with the documentation Only small changes to the alignment and resolution should ever be necessary to account for small changes in temperature between the factory and place of operation If major changes are made to the settings so that peaks are no longer visible please re enter the factory supplied settings to try and recover the peaks Process Eye Professional V5 SP104008 100 August 2005 90 The ion source parameters are by default set to the optimum parameters for the type of ion sour
171. ta in ways that suit your pattern of work Although Process Eye Professional and EasyView adopt very different approaches to the user interface and experience there is much in common Where necessary the manual indicates the differences between the two software applications but these sections have been kept to a minimum The complete suite of applications includes the Recall program for reviewing historical RGA data saved to disk and for Process Eye Professional the Recipe Wizard application which generates recipes automatically based on a wizard style user interface These applications have separate manuals Process Eye Professional V5 SP104008 100 August 2005 9 An RGA as a Source of Data This manual uses client server concepts to describe the mechanism of acquiring data and displaying it for the user The application software Process Eye Professional or EasyView is the client The control unit is the server since it is the source of data Network enabled instruments such as the e Vision and Microvision Plus IP have their data servers built in Serial instruments such as the Microvision Plus must be connected to a PC that runs server software that is capable of multiplexing more than one serial instrument and acting as the data server to the connecting client This Windows software is referred to as the Local RGA Server The client application and the data server communicate using a proprietary MKS ASCII protocol If you want to
172. tatus page A ul I be 47 A Analog Mode button starts or stops if already running the Analog mode IMA Barchart Mode button starts or stops if already running the Barchart mode b Leak check Mode button starts or stops if already running the leak check mode h Peak Jump Mode button starts or stops if already running the peak jump mode LI Disk Store starts or stops if already storing to disk storing data to disk Filament Select chooses the current active filament Clicking on one or other of the arrows toggles the active filament between filament 1 and filament 2 41h Ae Filament Status shows the current status of the filament Blue represents a filament that is off Red represents a filament that is on Clicking the icon will toggle the filament between off and on q Diagnostics runs the diagnostic program on display the diagnostic report on the screen The Page Selection toolbar is the vertical toolbar along the side of the status page it has the following buttons i Information returns the status window display to the general information page Tuning opens the tuning page in the status window This page has the controls that enable you to tuning adjust the tuning of the RGA peak alignment and resolution Calibration opens the calibration settings page in the status window You can calibrate your RGA based on the settings you select on this page Peak Jump Settings is only visible when EasyView is in Peak Jum
173. ted explanatory materials Software The term Software also shall include any upgrades modified versions or updates of the Software licensed to you by MKS Please read this Agreement carefully At the end you will be asked to accept this agreement and continue to install or if you do not wish to accept this Agreement to decline this agreement in which case you will not be able to use the Software C accept the terms of the licence agreement Cancel Help 32 MKS RGA Software Setup OSA The CD ROM can be used to install one of several The setup code is printed on the CD label A different set ups of RGA software The Quick Set up Code determines exactly what software is installed The correct code for your installation is printed on the label of your CD ROM Please enter the Quick Setup Code that is printed on the CD label From CD You must enter the code on this page of the This code identifies the components that need to be installed for your particular hardware Assistant The code is not case sensitive and software requirements lt Back Cancel Help Process Eye Professional V5 SP104008 100 August 2005 12 The pages that follow depend on the set up code entered and the Windows operating system installed on your computer This manual shows the most common dialogs from a Windows XP install Your set up may include others which should be self explanatory Remember that you can refer to the on line help for any
174. th er Cre ate N ew Vi ew ona Swe pt M easu rement or acquired with Process 2000 4 Standard View definition contains all the information pase E E Le ieee Create a new view on up to 15 and then click the Next These views can be shared between live data in Process 2000 and historical data button reviewed using Recall Standard Views ensure that your data is always presented in a consistent format This will take you through the View Creation Wizards Flaca PEE the ais Ui ons nae to rai described earlier However since you are off line Process P Eye does not fill in the current active scan information You Create a new view on a Swept measurement typically Barchart or b p Analog style define your own channel or mass span information and the You can use Iris vow fer any conbinebon of data whether patil default measurements to use based on what you know of A I the recipe that will be used at run time roe On the save page the wizard defaults to giving the filename the same name as the view name but you can change this if you wish 5 5 2 Editing a View in View Manager Select the view that you wish to edit from the Manage Views dialog and click the Edit button iulaya Hewi amp 3 This will take you through the View Creation Wizards List of currently specified Standard Views ince described earlier However since you are defining a general purpose view Process Eye does not fill in the current active Semple
175. tiplier TUNING Multiplier Status Locked l L RF Configuration Smart Head RF External Hardware No external hardware EasyView MY Plus Pressure inmbar e EasyView EasyView MV Plus Recipe wiew Window Lielp do EasyView MY Plus Trend LIVE tss 2 ass 4 Brass 18 Bs Day 00 Hydrogen Helium ta Nitrogen 00 03 13 E2 242 009 a tie 010 4 05e 003 3 EasyView Trend View MIRIC STE UU UB UU Elapsed Time UUUZUU 1 20 25 30 Sean A TAMAPNNA 17 ARA You will now see the main EasyView data acquisition window In order to follow through the rest of this chapter of the manual it is suggested that you do the following Look at the area at the bottom of the main window Click on the barchart Tuk icon This will initiate the barchart scan mode Then click on the Show Trend View icon at the right hand end of the Acquisition control toolbar This fick will add the optional trend view to the display Your screen should now look similar to this ah We 4 a g EasyView LM76 90805001 MV Pius a lA hal ih b tir Allow Changes File C iPmcess Eye DatalEasy ew MU Plus Data0G000L ST 0 B Acquisition Cantal ita ia H s l i Peak Center v Accuracy 5 v g 1 333e 004d mbar v F 1 333 004mbar v px z Instrument Status Scanning Barchart 5 J Active Filament 1 Sensor Identification Standard Open Source Filament Status On Detector Type Dual Faraday and multiplier Tatal P
176. tiplier with the gain specified matches and then check the stability When the calibration finishes click Next ee Calibration Wizard Details of the previous and current calibration will be Calibration result displayed click Apply to apply the current calibration Calibration succeeded The stability test result was excellent The current sensitivity is 2 23e 002 Ambar at 695 volts The new calibration is 6 68e 002 Ofmbar at 699 volts Click Apply to apply the new calibration or Cancel to ignore the result Cancel The date and sensitivity of the current calibration will be displayed at the bottom of the EasyView window i ee Easy View LM76 01100013 54 lak l bMS bee bed VP A i aday Multiplier J Calibrate bi Multiplier 1 against the Faraday detector using mass wil 40 alel and a multiplier gain of fu 100 aj m Wo Apply the resulting calibration to both filaments Sten E AL Last calibrated by Easyview ea 10 2003 13 59 24 Current source sensitivity 6698 002 Ambar aD ait EasyVview LM F601 100013 Process Eye Professional V5 SP104008 100 August 2005 94 lt MESSAGE Time 2003 10 28 13 52 58 Value Calibrating RGA Source EasyView Faraday detector gt lt MESSAGE Time 2003 10 28 13 52 58 Value Parameters mass 28 pkht 1 00e 007 gt lt MESSAGE Time 2003 10 28 13 52 58 Value Existing sensitivity 2 18e 004 A mbar gt lt MESSAGE Time 2003 10 28 13 53 05 Value Filamen
177. to 8 16 or 32 The higher the number of points per peak selected the better the representation of peak shape However scan time and the amount of data generated will increase If the data is to be imported into Excel for instance choose a lower value Process Eye Professional V5 SP104008 100 August 2005 79 Oh 1 333e 002 mbar Electronic Gain The electronic gain of the pre amplifier can be changed by selecting one of the values from the drop down list The lowest electronic gain appears first in the list The pressure indicates the maximum value that can be measured using that range The higher the gain selected the smaller the partial pressure that can be measured this may cause peaks of a higher partial pressure to saturate F 1 333e 004mbar Detector The detector type used for the scan can be changed Depending on the type of instrument the options are Faraday Multiplier 1 Multiplier 2 and Multiplier 3 Multiplier 1 2 and 3 refer to the same physical detector but using three separate calibration values that provide successively greater amplification of the ion current MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 80 8 3 Barchart Mode litle es EasyView EasyView LM 6 0060001 3 Recipe Yiew Window Help xX Be A lt EasyVYiew LM76 00600013 Barchart EasyView Barchart Mode ERLER a ae FEF es Faf 100 110 160 170 180 190 200 Scan 5 1 13 2004 10 41 46 amp EasyView LM76 0
178. toggle the status For more information on the Cirrus see the Cirrus manual Process Eye Professional V5 SP104008 100 August 2005 70 6 8 Hardware Information and Connections in the Status Pane EasyView only EasyView shows much of the same information as Process Eye Professional in its control panel at the bottom of the screen There is a Cirrus button and an RVC button if this hardware is installed Clicking the relevant button shows the same information and offers the same controlling capabilities as Process Eye Professional The Main tab at the bottom left of the control panel shows the connection and Ready states of all the available control units a e EasyView Loader SerialMa Hame Statys Last Used IF Address ers 30205002 imus Ready Newer 127 0 0 1 Poe are listed click Edit Connections and check that Process Eye is connected to the Instrument Serwers Refresh List Edit Connections r Pressure in mbar The Edit Connections button leads to the connections dialog already described The Refresh List button updates the list but does not refresh all the server information To do that you must click Edit Connections and then click Refresh in the Connections Dialog If the instrument can be used by EasyView the status is shown as Ready if not the status should give an indication of why the instrument cannot be used If you do not already have a tab at the bottom of the control panel for the instrument that you want to use
179. toolbar at the top of the screen In EasyView click the large disk button in the control panel Note The most common behaviour in Process Eye Professional is that the recipe defines the disk storing attributes In this Getting Started example however we are using an interactive recipe in order to show some similarities between the Process Eye Professional and the EasyView installations Furthermore it will often be the case that interactive control of the RGA in Process Eye Professional is best achieved by using the built in EasyView recipe described later in this manual Clicking the Interactive Disk Store button whilst in an interactive recipe that is not already storing to disk will bring up the interactive store dialog This is also explained in more detail in chapter 8 Start disk storage tJ In this dialog you can choose to store What to store where to store from the current scan onwards or from Buffering scans 21 2611 2002 14 43 06 to 360 28 11 2002 14 47 17 any prior scan held in the active history buffer Start Storing f From now onwards If you have been acquiring data for a long C Frombufleredscan 21 ZH atime 28711 2002 Z 144306 time you may not be able to store all the Finish Storing prior history oC ie e H atime enro heri If you choose to store from the buffered history you can choose to store just a small part of it Clicking on Where to Store allows the user to specify a location fo
180. ts have been on for 2 8 minutes gt lt MESSAGE Time 2003 10 28 13 53 08 Value Gain 100 fsp 9 16e 005 mbar RGA Zero is 60 1 ppm of full scale reading gt lt MESSAGE Time 2003 10 28 13 53 10 Value Reading 2 91e 007 mbar gt lt MESSAGE Time 2003 10 28 13 53 10 Value Peak center calibration 6 23e 004 A mbar gt lt MESSAGE Time 2003 10 28 13 53 29 Value Peak maximum calibration 6 55e 004 A mbar gt lt MESSAGE Time 2003 10 28 13 53 48 Value Calibration succeeded The stability test result was excellent gt lt MESSAGE Time 2003 10 28 13 53 57 Value Calibration applied EasyView New factor 6 55e 004 A mbar gt lt MESSAGE Time 2003 10 28 13 55 51 Value Calibrating RGA Source Easy iew Multiplier 1 detector gt lt MESSAGE Time 2003 10 28 13 55 51 Value Parameters mass 40 pkht 0 00e 000 dgain 100 mmpkht 0 gt lt MESSAGE Time 2003 10 28 13 55 51 Value Existing settings sensitivity 2 23e 002 A mbar voltage 695 0 volts gt lt MESSAGE Time 2003 10 28 13 56 04 Value Filaments have been on for 5 8 minutes gt lt MESSAGE Time 2003 10 28 13 57 01 Value Peak height of mass 40 03amu using Faraday detector 1 62e 009mbar gt lt MESSAGE Time 2003 10 28 13 57 01 Value Starting multiplier calibration Required peak height is 1 62e O009mbar using a detector gain of 100 gt lt MESSAGE Time 2003 10 28 13 58 16 Value The current sensitivity is 2 23e 002
181. ttings Steve Billington My Documents Process Eye Data E asyView LM 76 00399001 D ata000001 SI d Cancel The file name can optionally be amended with other information Just use the folder name specified creates in the example shown the file data SI d An existing file of the same name would be overwritten Append date time information to name adds date and time information to the file and would create the file DataYYYYMMDDHHmmSS SI d where YYYY is the current year MM is the current month DD is the current day HH is the current hour mm is the current minute and SS is the current second Append incrementing number to the name adds the next available sequential number to the name and would first create Data000001 SI d the next would be Data000002 SI d and so on thus creating a new file each time data is saved While storing to disk the Disk Store toolbar will be visible in the status window H mmks EasyView LM98 00104252 vo aTe d ul LL be B A Allow Changes File iDoue and Senings eto Hickson AAG SPECTRA Mp Documents E asp Loew Dara Easy jew LM RE ieee D arati diaa aes ST Acquisition Control Al HH Notice that the disk store icon is no longer available and the path to the disk store file is displayed Process Eye Professional V5 SP104008 100 August 2005 87 Checking the Allow Changes box pauses the disk store and re enables the scan toolbar A H e nks EasyView LM98 00104252 Mi
182. u can select a new time by using the Time and Note Date list boxes Enter text into the Note text box when your annotation is aay complete press the OK button The second way to add an annotation is to click on the Add Annotation at Selected Time button This method is always associated with a current trend view ea Barchart With Trend Interactive 2 s Trend BE Xx Select an active trend VIEW Then click the button Wass 14 Nitrogen 14 1 ii The cursor changes to a pen move the pen cursor along the r Iflr 74007 Pie pee trend line to the point that you want to annotate Clicking on pone ponte Fe aoe the trend here will bring up the annotation dialog but now the Argon 36 Argon 9 54e 009 1 45e 006 5 56e 008 time will be set to the time at that position on the trend 00 05 00 Elapsed Time Each annotation added will be marked by a symbol along the top of the trend If you move the EJ cursor over this symbol the text will be displayed as a tool tip as shown Barchart With Trend Interactive 2 As Trend Si x i i i LIVE Mass 14 If you have multiple trend views associated with the active ay yorogen elum arbon rogen z aet keset eene zene ee recipe or connection they will all inherit the annotation The iiaeo olem Pace e Ses annotation will also appear on the barchart view when you scroll Mass 32 Mass 26 to the scan in which the event occurred 1 27e 008 1 41e 006 3 812e 008 x Time 28 11 200
183. um mass allowed by the control unit Accuracy 5 Accuracy Scan accuracy determines the sampling amount carried out on each reading A high accuracy number provides a clean scan but increases scan time The accuracy ranges available are from 0 to 8 Ch 1 333e 002 mbar Electronic Gain The electronic gain of the pre amplifier can be changed by selecting one of the values from the drop down list The lowest electronic gain appears first in the list The pressure indicates the maximum value that can be measured using that range The higher the gain selected the smaller the partial pressure that can be measured this may cause peaks of a higher partial pressure to saturate F 1 333e 004 mbar Detector The detector type used for the scan can be changed Depending on the type of instrument the options are Faraday Multiplier 1 Multiplier 2 and Multiplier 3 Multiplier 1 2 and 3 refer to the same physical detector but using three separate calibration values that provide successively greater amplification of the ion current Process Eye Professional V5 SP104008 100 August 2005 83 d Audio Not support on certain sensor configurations Switches the audio tone on or off The tone changes in frequency as the measured peak height changes This is a useful feature if you are unable to see your monitor while leak checking z Re zero The control unit takes a zero measurement before it starts returning the values for the partial pressur
184. ve the server no Recipe Wizard Process Eye Professional To run the calibration at this point click Yes If you choose not to run the calibration at this time it can be run at any time by selecting Run a Defined Calibration from the Instruments pull No down menu If you choose Yes the calibration that you have just defined will automatically be selected when you run the calibration This is explained in the section after next 7 J Do you want to run this calibration now Process Eye Professional V5 SP104008 100 August 2005 101 9 2 Defining a Multiplier Calibration Recipe Note A Faraday calibration should always be defined prior to a Multiplier calibration for a given ion source configuration As in the Faraday calibration go to the Instruments pull down menu but this time select Define Multiplier Calibration Settings Follow the same steps as in the definition of the Faraday calibration up until the Ion Source Selection dialog Here you can again select which ion source settings will be used for the calibration If a Faraday calibration has not yet been performed the following dialog is displayed Recipe Wizard Process Eye Professional You have not yet run a Faraday calibration on this source configuration Itis advisable to do so before defining the features of a multiplier calibration because a i multiplier calibration uses the Faraday sensitivity as a run time parameter Choose OK to continue an
185. ver you may be on a factory network where separate computers are associated with individual control units Instrument Access In that case you should only check the box in this dialog for the RGA that belongs to you The other RGA s listed in the main window should show No pre connection in the Access column of the list C Share this instrument with other users This ensures that their users can access them when they need to Attempt to gain exclusive access to this instrument These settings configure the access to this instrument from the main application software packages such as Process Eye and EasyView Cancel If you have one RGA that you want to be able to control from two computer locations select the option to Share this instrument with other users You will then connect to the RGA only when you need to Unless you have a good reason to do otherwise you should choose the settings shown in the graphic above Note that sharing does not mean that two users can have concurrent access to an RGA Only one user at a time can control an RGA By selecting the exclusive access option you are requesting the run time software to connect to the RGA as soon as it starts up thereby preventing anyone else from connecting even though you may not be actually using it to acquire data Process Eye Professional V5 SP104008 100 August 2005 34 3 4 The Hardware Set up Utility This utility is not used with e Vision or e Vision Plus If
186. vie Maker 2 My Music i MSN Explorer DE mr co Open a My Nel Explore Een Software Video Camera i Search ite Control Windows Media Player Map Network Drive Printers Disconnect Network Tour Windows XP Show on Desktop Helpan Rename Recall f Search Properties All Programs gt y Run Dv off O Turn Off Computer Com puter Management Nac le deca In the Computer Management dialog click on m g the Local Users and Groups entry to expand m Computer Management Local j pt sre Took Hy System Tools the list and show the CREES ane arcup h jp Event Viewer aj Storage ia shared Folders Ba Services and Applications Local Users and Groups Performance Logs and Alerts A Device Manager S Storage Removable Storage Disk Defragmenter Disk Management Ta Services and Applications Process Eye Professional V5 SP104008 100 August 2005 19 Computer Management m Fie Action view Window Help Dor laixi Right click on the Users folder and select New User from the list gt m 2 mj Computer Management Local iL System Tools Event Viewer Shared Folders 2 Local Users and Groups J users CI Groups Performance Logs and Alerts a Device Manager Storage Removable Storage Disk Defragmenter Disk Management Ee Services and Applications if System Tools Storage Ba services and Applications It is recommended that
187. werfs ona List Edt Connections CR i Recipe wew window Help If you did not specify either shared or CLT oe ae gop ome 3 exclusive access to an RGA during hardware installation the screen will be shown without any instrument details Click the Edit Connections button then in the dialog that follows click Add Connection and check one of the checkboxes to select an RGA to connect to Refer to chapter 2 for more information EasyView Loader If no are listed click Edit Connections and check that Process Eye is connected to the Instrument Serwerfs Refresh List ERC ections sna t you Provided that your vacuum hardware is at a pressure that is safe for the RGA to be switched on you are ready to start using your RGA This pressure is usually a value lower than 1e 3 torr mbar 1e 1 Pa If you are ready to do so double click the line containing the information about the RGA that you are ready to use MKS Instruments Process Eye Professional V5 SP104008 100 August 2005 42 e EasyView EasyView MY Plus E Recipe view Window Help X amp o Se S la ym me llr esi E O E ae a EasyView L 1 MI Phas A uh GE be a I A Gi Instrument Status Idle J Active Filament 1 Filament Status of Sensor Identification Detector Type Total Pressure Sum of Scanned Masses Maximum Mass Control Unit Use Standard RGA Embedded Yersion v5 00 Standard Open Source Dual Faraday and mul
188. will have its own tab and its own information pane within the Status Window On the blue area to the left there are two links one to the Recipe Status information and the other to the Instrument information 7 6 1 Recipe Information View in the Status Window Alarms f Alarm The information shown here is Mo T excuse TTC TST Re eee the output from the recipe event log The recipe author can output messages to this window Vv Always Show latest Alarm s p Acknowledge All Ne es ea ad Lad Ky Analog Interactive Record 1 of 1 7 6 2 Instrument Status View in the Status Window Click on the instrument name in the blue screen area to switch to the Instrument Status View Depending on a the configuration of the hardware aeee ar you will have tabs across the top ee a ae ee 5 for General Ion Source Tuning ee ae See Digital I O RVC and Cirrus Click a ier cs Teta esa eal on the appropriate tab for the Bees hese ser Hed cone Wee Asp ich information that you want to a view The General tab has interactive controls that allow you to switch the filament on or off and to choose which of the two available filaments to use 7 6 3 Ion Source Settings View in the Status Window Click on the Ion Source tab to reveal the ion source settings for the recipe s control unit If your recipe does not allow tuning these pages will be for information only However if your recipe does allow tuning you wil
189. y follow the steps explained by the Wizard including the procedure to put the control unit into FTP mode for the file transfer itself Access Control This menu selection leads to the Access Control dialog described in section 3 3 You choose whether when Process Eye Professional or EasyView start up they attempt to gain exclusive access to the selected RGA or whether the control unit needs to be shared with users on other computers Install or configure instrument not e Vision or e Vision Plus This is the main selection for all aspects of installation or configuration of your hardware The Hardware Set up application that is launched by this menu selection is described in more detail in section 3 4 Change the IP address Always consult with your network administrator before changing the IP address of a control unit You must not choose an address that is used by another network connection If you are unsure please read Appendix 1 or click the Help button or press the F1 key The IP Configuration Dialog i Lonfieuration tor MI01 00203003 E This dialog allows you to select the IP addressing mode DHCP or New Control Unit Settings fi xed x C Assign an IP address automatically using DHCP Hse the folowing Meed settings If you choose a fixed address you enter the address and subnet oo MERE mask The IP addresses associated with network connections on this ty gt oO computer are shown in order to help you check that you
190. y 533 60 355 90 450 00 yy 15 Supply 16 50 13 50 15 00 y 1304 Supply 143 40 116 20 130 00 y 54 Supply 4 75 Suse 5 00 y 154 Supply 13 50 17 50 15 00 y Electron Energy 69 40 59 60 64 50 y Extractor 120 40 103 60 112 00 y SEM Supply Diagnostic 645 00 555 00 600 00 Source Settings Emission m Electron Energy fe Ion Energy fev Extract vY Faraday Ambar 1 00 70 00 5 50 112 00 1 50e 004 Mass Alignment Resolution Settings Low Mass Alignment Low Mass Resolution High Mass Alignment High Mass Resolution 32767 32767 32767 32767 Running diagnostics on a Process Eye Professional 2 cree ee ea BAER installation produces the following report mE mks Serial Number LATE Onaga User Defined Hare Mew Head Mire 00322300L Tachmolooy tor Productuity utr a AW FTG DUTY Note that the six individual and different source and Process Eye Version 00000 taddromenit tifa tuning settings are shown Semo dendfication Standard pen Source Decko Type Faraday Channel Plate Exteel Hardware ag Source Settings Ri Conhguratcn Smert Head Emission m Electron Energy eV Ion Energy eY Extract Y Faraday Ajmbar Memmi a Standard Electron Energy 1 00 70 00 5 50 112 0 1506 004 Contro Link Use Stendard AGA Low Electron Energy 1 00 40 00 5 50 112 0 1 50e 004 Propped Serves aeen W User defined 1 1 00 70 00 5 50 112 0 1 50e 004 RSs PETER User defined 2 1 00 70 00 5 50 112 0 1 50e 004 Diagnostics Results User define
191. y be changed Process Eye Professional V5 SP104008 100 August 2005 91 8 9 EasyView Calibration Faraday Click on the Calibration button in the Select Page toolbar to bring up the calibration setup page If it is not already selected click on the Faraday tab Calibration can only be performed if the instrument is not in one of the scanning modes ee EasyView LM76 01100013 454 Eule BE I using these settings is Poj Frada Multiple displayed at the bottom of the J Calibrate mass ual 2p ald using the Faraday detector to have a value of 4e 007 mbar window In this case this is the a S first time the calibration has W Apply the resulting calibration to both filaments E l TUNING sa been run with these settings mi The date of the last calibration Last calibrated by Easyview Never Current source sensitivity 1 50e 004 4 tmbar Easy iew LM76 01100013 Pick a mass to calibrate against and enter a known partial pressure for that mass Start the calibration by clicking on Start This will launch the Calibration Wizard If the filaments are not currently switched on you will be prompted to do so The calibration routine will then measure the zero the peak maximum value and the peak center value of the mass chosen and then perform a stability check of 10 readings Click Next to view the results of the calibration Calibration Wizard To exit without changing the calibration click Cancel C
192. you use the name RGA User New User to easily identify the account User name You can enter a full name description and password if you wish Full name Description Check the User cannot change password and Password never expires boxes as shown Password po User must change password at next logon Confirm password User cannot change password Password never expires Account is disabled Create _ m Computer Management m Fie Action view Window Help am x 9 Click on the Create button and then click the m Computer Management Local i System Tools g Event Viewer Shared Folders 2 Local Users and Groups 3 Users C Groups Performance Logs and Alerts Device Manager IE aj Storage Removable Storage Disk Defragmenter Disk Management Ta Services and Applications Names Full Name K gi Administrator Guest E gi Help ssistant jaso Remote Desktop Help Assi sup Set Password bft Corporation All Tasks gt Delete Rename Help Description Built in account for administering tH Built in account For guest access to Account for Providing Remote Assis This is a vendor s account for the H Close button to return to the Computer Management dialog Opens property sheet for the current selection At this point you should now log off as the Administrator and log on as the RGA User to continue with the Software Setup section Process Eye Pr
193. yway or Cancel to exit the Wizard oe This simply states that whilst the multiplier calibration recipe will be defined relative to the current uncalibrated Faraday sensitivity executing this calibration is unlikely to produce a calibrated result Normally you should click Cancel and define and run your Faraday calibration recipe first Instrument Calibration Wizard The Multiplier Detector dialog is displayed Multiplier Detector i Choose one of the three Multiplier detector configurations to which this calibration will apply This dialog is used to choose which multiplier detector ae configuration the calibration will apply to and also Configuration name displays the details of any previous calibrations Iv When this calibration runs succsessfully apply the same detector voltage and detector a 2 Se eee By convention Multiplier1 provides the lowest detector amplification and Multiplier 3 the highest Current Settings for this Configuration Previous detector calibration date Not calibrated Click Next to contin ue Date of current calibration recipe No recipe found Gain 30 0 Detector Volts isan aa ae Instrument Calibration Wizard i The Pressure Scale dialog iS displayed Pressure Scale Converting detector output to a pressure reading This dialog is used to choose the method employed to perform the calibration Calibration against a known pressure Scaling to an external pressure gauge r

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