User`s Manual - Newport Corporation
Contents
1. 16 2 2 9 COnmectine Air oorr D pex 16 2 3 Squaring and Leveling the OTS 18 2 3 1 Leveling the OTS frame for the rigid N and isolated verons cilm 18 2 4 Jnstallins the N 19 2 9 Levelme the table on the frame esit ac ro etos 20 2 5 1 Leveling the Table on the Rigid non isolated N version OU Sued hear 20 2 5 2 Leveling the Table on the Rigid isolated I version of the OTS Sy Ste bacon oe iit aite 22 20 Bloabne Table 22 2 7 Adjusting Leveling Valve Sensors 23 3 Section 3 Operation 25 ox Pr icmies ot OC Pera ases demi secs aetate cie SURE E uias 29 32 Performance Adjustments vrer a edes 23 3 2 1 Stabilizing high center of mass loads 25 3 2 2 Improving leveling response 26 3 2 3 Table loads and or load positions change 26 020 eyen ET 26 Sei ROTE 26 VOCUM 21 Section 4 Troubleshooting 28 JL sud ro dus tco o vedete docs 28 4 2 Poor Isolation Perlormante Ede eot 28 OV SCM 29 44 System Leaks Constantly 29 42. T Figure 22 System stability diagram Improving leveling response times If the system 15 stable the re leveling response time may be decreased by increasing the system pressure In addition the needle valves may be opened until the system oscillates and then closed slightly This is desirable if components are moving over the surface of the table For systems where the loads are seldom changed slower re leveling may be beneficial This 15 accomplished by closing the needle valves slightly and or decreasing the system pressure needle valves should be opened the same amount for each isolator that they supply Table loads and or load positions change If the loads are moving or changing significantly the control arms may require adjustment Each time the load is changed check the relationship of the support plate to the top of each isolator If the desired 144 inch 1s not maintained adjust the overall system pressure and or the sensor positions Maintenance Newport Isolation Systems require little maintenance No periodic maintenance 15 required Cleaning Newport isolators are painted powder coated or zinc plated steel This coated material is relatively corrosion resistant It may be cleaned by applying non abrasive liquid household cleaner to a rag and wiping the isolator Avoid abrasive cleaners 3 3 2 27 Air Quality Oil water or debris in the air supply may contaminate the leveling valves or isola
3. 5 Leaking From Isolator eerie terrenae heben roten 20 Section 5 Factory Service 30 S L Obtaining Factory Set VICO 30 Service Form 31 vi List of Figures Figure 1 OTS leg weldment with shipping bracket being removed 12 Figure 2 OTS leg weldments and cross brace positioning 12 Figure 3 Leveling valve mounting holes located on the cross brace should be installed so they are positioned toward the top of the frame and FACTO OH HG 13 Figure 4 Connecting cross braces to OTS leg weldments 13 Figure 5 Tightening the cross brace bolts to the leg weldment 14 Figure 6 Completed OTS frame assembly 14 Leveline Valve ei 15 Figure 8 Master Leveling valve installed on cross brace 15 Figure 9 Location of Master slave 16 Figure 10 Air regulator filter ARF being installed on leg weldment 16 Figure 11 Pneumatic plumbing diagram for isolated version OTS system 17 Figure 12 Tubing connection for Master isolator eeeeeessssssssss 17 Figure 13 Tubing connection for master slave isolator 18 Pieure Leyelime the O 19 Figure 15 Close up of leveling feet used to level
4. 6 3 kg cm 3 Check all connections for leaks Correct or repair any leaks before proceeding If the table does not float within several minutes increase the air pressure until the table floats or adjust the value height sensors to hold the control arms further down Confirm that the needle valves are open 7 turn per isolator supplied NOTE If the table oscillates after it floats decrease the air pressure or close the needle valves slightly In clean room applications the exhaust port on the 23 valves be connected to the clean room vacuum system to capture the valve exhaust NOTE Exhaust must be routed to a vacuum system Backpressure in the tubing will cause the exhaust air to leak from the valve Payload support plate 74 gap Top of flange Figure 21 Close up of OTS isolator floating 2 7 Adjusting Leveling Valve Sensors 1 After the system floats check the position of the payload support plate for all isolators see figure 21 The gap between the bottom of payload support plate and the top of the flange should be about 1 4 inch nominal 6 mm Adjust the control arm adjustment acrew of each valve Figure 12 as required to obtain this gap When all 1solators are adjusted re check the level of the payload NOTE this step should require only minor adjustments Do not move the small set screw near the pivot of the valve control arm Verify that the table 1s freely floating on the isolators M
5. 4 Figure 5 Tightening the cross brace bolts to the leg weldment CAUTION Do not over tighten The bolts can be stripped if excessive force is used Tighten to a torque of 6 ft Ibs Figure 6 Completed OTS frame assembly 2 2 1 15 Installing Leveling Valves If your frame is the non isolated N version you do not have leveling valves Please skip this section of the assembly instructions Go to section 2 5 If your OTS system is the isolated version I three leveling valves will need to be mounted to the cross braces Note that only three leveling valves are needed since three points define a plane The diagram in figure 7 shows the location for the leveling valves Leveling valve locations Figure 7 Leveling valve location Two sets of holes have been pre drilled and tapped in the frame cross braces One set has been drilled in the leg weldment Attach the leveling valves to the frame via these holes and use a 4mm allen wrench to tighten the M 5 socket head cap screws that came with the leveling valves See figure 7 for valve location Mounted leveling valve to frame cross brace Figure 8 Master Leveling valve installed on cross brace 2 2 2 2 2 3 leveling valve mounted to leg weldment Figure 9 Location of Master slave valve Installing the Air Filter Regulator ARF Figure 10 Air regulator filter ARF being installed on leg weldment Attach the ARF air regulator to the mounting brack
6. E NEWPORT CORPORATION SHALL NOT BE LIABLE FOR ANY INDIRECT SPECIAL OR CONSEQUENTIAL DAMAGES RESULTING FROM THE PURCHASE OR USE OF ITS PRODUCTS First printing 2009 2009 by Newport Corporation Irvine CA rights reserved No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any change will be reflected in future printings Newport Corporation 1791 Deere Avenue Irvine CA 92606 USA Part No 90026760 Rev B Table of Contents ii Pale OT COMEM S uto tai ed bon ud endi a otio iv Listor _ gt ______ ____ _ _ _ 6 _ _ vi Section 1 General information 7 EURO GNC WOM 2e 7 2 OUI SUITES uus ie tan touc e st atas tis 7 1 3 Unpacking and 7 l4 Considerations sou ences 7 O SDV SCCM PLAC CINCO 8 1 5 Air Supply Requirements e 9 La Warranty tices ae 9 2 Section 2 Unpacking and Assembly 10 ZA Unpacking and Inspecting inpet eeu hene cet 10 2 2 OPS Assembly as amend atout 11 2 2 1 Installing Leveling Valves eres 15 2 2 2 Installing the Air Filter Regulator ARP
7. SmariTable amp OTS User s Manual lt gt NNevvport Experience Solutions Warranty Newport Corporation warrants that this product will be free from defects 1n material and workmanship and will comply with Newport s published specifications at the time of sale for a period of one year from date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s option To exercise this warranty write or call your local Newport office or representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the product freight prepaid to the indicated service facility Repairs will be made and the instrument returned freight prepaid Repaired products are warranted for the remainder of the original warranty period or 90 days whichever first occurs Limitation of Warranty The above warranties do not apply to products which have been repaired or modified without Newport s written approval or products subjected to unusual physical thermal or electrical stress improper installation misuse abuse accident or negligence in use storage transportation or handling This warranty also does not apply to fuses batteries or damage from battery leakage THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES EXPRESSED OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR US
8. The leveling valves provided with the system control the height of the table to within 0 01 inch 0 3mm accuracy This tolerance is adequate for most applications More accurate valves are available for specialized applications 3 2 Performance Adjustments Once the system 15 assembled and floating it 15 possible to make minor adjustments to suit your individual needs These adjustments involve the system air pressure the control arms and needle valves WARNING Once the system is floating keep fingers away from the area between the support plate and the top of the isolators Any object between these points may be caught if the load or air supply changes Personal injury may result 3 2 1 Stabilizing high center of mass loads If your load has a high center of mass or if the load 1s particularly heavy the system may oscillate In this case lower the air pressure or close the needle valves slightly This may improve stability and reduce the oscillation or hunting A rule of thumb for determining high center of gravity C G system stability is shown in Figure 3 1 If the combined center of gravity of the payload 15 within the stable region the system will be stable If the combined C G is inside the may be stable region the system may be stable If the combined 15 outside both regions the system will probably be unstable 26 3 2 2 3 2 3 3 3 3 3 1 May Be Stable Region Stable Region _
9. anner Wrench gt h Figure 18 Leveling wrenches used for leveling the OTS rigid system Bolt amp Clamp Support Plate gt Wrenches Figure 19 Illustration showing positioning of leveling wrenches used for leveling the OTS rigid system 22 2 5 2 2 6 Figure 20 Safelock clip attachment Leveling the Table on the Rigid isolated 1 version of the OTS System Make sure the table 18 resting on all four table support plates and does not rock when pressed down on at any of the four corners If this 1s the case attach the Safelock clips as described in section 2 6 2 figure 20 Make sure all 4 isolator leveling feet are still in contact with floor If the table is not in contact with all four support plates and rocks adjust the appropriate leveling foot until the table support 1s in contact with the bottom of the table Once all four support plates are in contact with the bottom of the table and all four leveling feet are in contact with the floor use the Safelock clips and clip bolts to attach the table support to the table see figure 20 The opposite end of the spanner wrench used to adjust the jack screw can be used to tighten these bolts Floating the Table 1 Close the metering needle valve figure 12 on each isolator then open it turn 2 Turn on the air supply and adjust the regulator for the pressure calculated using the formula given in Section 1 6 This pressure must not exceed 90 psig
10. ator Hole pattern on bottom of table for attaching Safelock clips Figure 16 Mounting hole pattern for attaching table to isolator CAUTION When lowering the payload on to the isolators do not allow the payload to shift sideways Doing so could damage the isolators Position the table so the bolt hole patterns line up over each isolator see figure 16 Slowly lower the table to within of the OTS frame Slight adjustment of the OTS frame positioning may be necessary in order to achieve proper alignment for the isolator and bolt hole pattern on the bottom of the table Leveling the table on the frame Leveling the Table on the Rigid non isolated N version of the OTS System Adjust the four leveling jack screws Figure 17 19 using the spanner wrenche figure 18 until the table top contacts evenly on all four of table supports and does not rock when pressed down on at any of the four corners Make sure all 4 1solator leveling feet are still in contact with floor The isolated I version of the OTS does not have or require this adjustment Use the Safelock clips and clip bolts to attach the table support to the table see figure 20 The opposite end of the spanner wrench used to adjust the jack screw can be used to tighten these bolts 21 Figure 17 Jack screw used to level the rigid OTS system Support ON Clamp Bolts EJ Level Adjustment Hex Nut Support Plate Sp
11. e OTS isolators must be mounted so that its axis is not more than 0 5 degrees from vertical This is necessary for the isolator to function properly in the horizontal mode Note 0 5 degrees is equal to 0 05 1 3 mm inches in 6 0 inches which is the isolator base dimension A typical spirit level will easily measure 0 5 degrees and can be used to check the vertical alignment of each isolator If the floor where the isolators are being mounted has a depression of more than 0 05 inches under one side of the base then the floor should be grouted or shimmed level at this location If the system is not located on the ground floor of the building it should be located near primary vertical structures such as exterior walls or support columns By locating the table near these structures the effects of low frequency floor motion will be minimized thus increasing isolator performance It is also advisable to avoid locations adjacent to major sources of vibration from operating machinery such as elevators air conditioning plants or factory equipment WARNING The payload is attached to the isolators with bolts In the event of an earthquake the system may collapse For areas susceptible to earthquakes we recommend that earthquake restraints be installed on each vibration control system 1 6 Air Supply Requirements A constant supply of air must be connected to the isolators during operation After initial setup and filling the 1solators cons
12. eling Valve Table Bottom Air Supply Line Tee fitting Elbow fitting Grey Tubing Elbow fitting on isolator on isolator Figure 13 Tubing connection for master slave isolator 2 3 Squaring and Leveling the OTS Frame 2 3 1 Leveling the OTS frame for the rigid N and isolated versions l Place the bubble level on the OTS frame as shown in figure 14 The level measures if the frame is level in the X Y plane Use the 1 open end wrenches provided to adjust the four leveling feet until the frame 1s level figure 15 One wrench is used to hold the lock nut while the other is used to rotate the bolt This will either raise or lower the table depending on the direction the nut 15 rotated Adjust the leveling feet until the frame 15 level 2 4 19 Figure 14 Leveling the OTS frame 2 Figure 15 Close up of leveling feet used to level the OTS frame Installing the Table WARNING Payloads are heavy Use a forklift or other appropriate equipment Be sure to use proper lifting procedures to avoid severe personal injury With the OTS frame assembled and leveled as described in Section 2 2 raise the table and position it above the OTS frame Be sure the frame is correctly positioned relative to the attachment holes provided in the bottom of the table See Figure 16 20 2 5 2 5 1 Table Bottom Surface Ea Isolator Clamp Hex Head bolt 3 Isol
13. et Attach the mounting bracket to the OTS leg assembly figures 7 and 10 Use the 4mm allen wrench to tighten the two M 5 socket head cap screws Connecting Air Lines The IPV leveling valve 1s shown in Figure 12 Three valves are used in all systems as only three points are required to determine a plane The leveling valve locations are selected such that they form the largest triangle possible under the table The larger the triangle the more stable the system will be When two or more isolators are controlled by the same valve they act as a single large isolator supporting the table at the center of force of the several isolators The floating height of the system 1s determined at the valve position 17 Connect grey air lines to the 1solators as shown in figures 11 12 and 13 When cutting tubing be sure the ends are round and cut squarely This is best done with a single edge razor blade scissors will deform the tubing causing leaks The connections are detailed in Figures 11 12 and 13 Use translucent tubing to connect the air supply to the ARF Be sure the connections are firm by tugging on the tube 3 leveling valves Air Supply Figure 11 Pneumatic plumbing diagram for isolated version OTS system Table Bottom Leveling un Valve Control Arm Adjustment Screw Air Supply Line OTS Frame Metering Needle Grey Tubing Barb Fitting Valve Figure 12 Tubing connection for Master isolator Lev
14. ill remain centered unless the payload and isolators are moved relative to each other Equipment on the payload may be vibrating at a resonant frequency of other components Improve the rigidity of the mounting for that equipment or remove that item from the system Air currents or pressure fluctuations may be disturbing components on the payload 29 4 3 System Oscillates If the system oscillates or hunts you may have a set up with a high center of mass Refer to the information in Section 3 2 1 or consult your Newport representative or Newport Corporation for further assistance 4 4 System Leaks Air Constantly Newport isolators and valves are pressure leak tested prior to shipment Check all tubing connections for leaks with soapy water Tubing that is crushed out of round or that 15 not cut squarely may not seal in the push in fittings Use a single edge razor blade to cut the tubing cleanly If testing with soapy water indicates that either the 1solator or valve are leaking contact Newport Customer Service 4 5 Oil Leaking From Isolator Damping oil may leak from the isolator if it is inverted or tilted more than 45 degrees Losses of less than 3 ml will not affect the isolator performance Total volume of damping oil per isolator is approximately 30 ml Contact Newport Corporation if oil must be replaced 30 5 1 Section 5 Factory Service Obtaining Factory Service To obtain information concerning factory se
15. ove the table gently from side to side about 1 8 inch You should not encounter any resistance Re check by moving the table up and down the same amount Again there should be no restriction of movement Push one corner of the table down approximately 1 8 and release it The table should return to the original position within less than 4 seconds Response time may be adjusted as described in Section 3 2 2 If the table rocks back and forth oscillates vertically without settling down close all of the needle valve adjustment screws Then re open the screw by 1 8 to turn In each corner of the table gently push down on the table top The table should lower and then return to its starting position Gently push up from the bottom of the table The table should slightly rise then return to its original position If the table does not move freely either 24 or down adjust the height adjustment screws in the leveling valves until the table moves freely 25 3 Section 3 Operation 3 1 Principles of Operation Newport Isolators provide one of the best methods of vibration isolation for critical applications The system operates on the principle of air pistons which are equivalent of soft springs The main advantage of the Newport system over other designs are low vertical resonant frequency with low amplification at resonance Q and a Pendulum M horizontal decoupling system for effective isolation from low amplitude vibration
16. rvice contact Newport Corporation or your Newport representative Please have the following information available Model number 2 Purchase order number 3 Complete description of the problem If components are to be returned to Newport Corporation you will be given a Return Number which you should reference in your shipping documents Please fill out the service form located on the next page and have the information ready when contacting Newport Corporation Include the completed service form with any parts or components that are returned 31 Service Form Vibration Control Products Name RETURN AUTHORIZATION f Company Please obtain prior to return of item Address Country Date P O Number Phone Number Item s Being Returned Model serial or manufacturing date Description Reason for return of goods please list any specific problems Please Describe the Problem Attach additional sheets as necessary Where 15 the Equipment Installed factory controlled laboratory out of doors etc Maximum Air Pressure available Regulated Yes No Any additional information If special modifications have been made by the user please describe below 32
17. se of action Newport Corporation maintains offices throughout the United States and other locations worldwide Refer to the back cover of this manual for the addresses and telephone numbers of these offices 10 2 Section 2 Unpacking and Assembly 2 1 Unpacking and Inspecting Unpack the SmartTable OTS leg assemblies the cross braces and all of the hardware Inspect all of the parts for shipping damage There are 2 different versions of the OTS system rigid and isolated The parts shipped with your SmartTable OTS vibration Isolation system are shown below Isolated I Version Rigid N version ipti OTS cross 3 braces 2 OTS cross 3 braces 2 braces and leg leg braces and leg leg weldments weldments weldments weldments 1 1 8 open end 2 frame leveling wrench s wg afelock clips 12 sets 07 WW and mounting screws regulator and mounting Isolator leveling bracket wrench V4 translucent 40 feet Hex head air line tubing screws Tee connector washer 14 20 7 8 Hex head screws Black flat washer 4 locking washer Safelock clips 12 sets 7 16 wrench and mounting screws Bubble level V4 locking washer 11 Bubble level 2 100 Tubing 10 mounting clips 1 1 8 open end frame leveling wrench Black hole amp a plugs 78 V4 Grey 40 feet SN 2 tubing NPT male 1 tubing adaptor M5 x 0 8 6 36mm SHCS 2 10mm 2 2 OTS Frame Assembly The SmartTable OTS leg assemblies are
18. shipped bolted together via two shipping brackets These brackets keep the OTS leg assemblies upright during shipping so oil used for horizontal damping inside the isolator chamber does not leak out CAUTION Do not lay the leg assemblies on their side Damping oil will leak out of the assembly Remove the two shipping brackets using the 7 16 wrench included with your OTS system Each bracket has 4 bolts that must be removed 12 Figure 2 OTS leg weldments and cross brace positioning Roughly position the OTS leg assemblies The distance between the assemblies should be about the length of the cross braces Cross brace length is roughly 6 8 10 feet depending on the size of your system WARNING Two people will be required to safely assemble the OTS frame Each cross brace has 2 sets of holes drilled in it These holes are used to mount the leveling valves Make sure the holes are pointing outward 13 Additionally make sure the holes are positioned toward the top of the 1solator see figure 3 Figure 3 Leveling valve mounting holes located on the cross brace should be installed so they are positioned toward the top of the frame and facing outward Figure 4 Connecting cross braces to OTS leg weldments Bolt the cross braces one at a time to the OTS frame assembly using the 7 16 bolts washers and lock washers provided with the OTS frame Use the 7 16 wrench to tighten the bolts to a torque of 6 ft Ibs 1
19. the OTS frame 19 Figure 16 Mounting hole pattern for attaching table to isolator 20 Figure 17 Jack screw used to level the rigid OTS system 2 Figure 18 Leveling wrenches used for leveling the OTS rigid system 2 Figure 19 Illustration showing positioning of leveling wrenches used for le veline the OT St deu Roa eR 21 Figure 20 Satelock chip attachment oet a 22 Figure 21 Close up of OTS isolator 23 22 System Ate eee Ho 26 Section 1 General information 1 1 Introduction The Newport SmartTable OTS Vibration Isolation Workstation provides an ideal working platform for vibration influenced devices such as interferometers microscopes and balances Sensitive instruments such as these will show significant improvements in resolution and repeatability when isolated from floor motion by the OTS pneumatic suspension system Special care was taken to ensure excellent performance in the 10 50 Hz floor vibration frequency range corresponding to dominant ambient vibration frequencies common to multi floor buildings The OTS pneumatic isolators provide excellent protection against both vertical and horizontal floor motions These workstations integrate Newport s rigid laminated honeycomb panel SmartTable technology and pneumatic isolation systems
20. to provide a mounting platform which is rigid yet thin and lightweight The system accommodates high center of gravity loads with exceptional stability Equipped with casters the system 1s easy to move without heavy equipment It is possible to tailor the system to a wide variety of applications using the range of sizes and the many optional storage and safety accessories 1 2 Getting Started Please read this instruction manual thoroughly before assembling the isolation system The individual components have been assembled at the factory and require only final system assembly and performance adjustment 1 3 Unpacking and Inspection The components of your Newport Vibration Control System are packed in individual labeled boxes Carefully inspect all components for shipping damage Report any shipping damage immediately to Newport and the shipping company 1 4 Safety Considerations The following terms are used in this manual that relate to your safety 1 5 WARNING Warning is used to indicate dangers that could result in personal injury CAUTION Caution is used to indicate situations that may result in damage to components of your Newport Vibration Control System System Placement To ensure optimal performance from your OTS Vibration Isolation System it should be located on a level surface Uneven floors or mounting surfaces may cause difficulty 1f their irregularity 1s outside of the range of the leveling feet Th
21. tor damping system and degrade performance Use of the Newport model ARF Air Regulator and Filter in the air supply will prevent this occurrence The filter does require occasional cleaning 28 4 Section 4 Troubleshooting 4 1 System Does Not Float Use the following procedure if the system does not float when pressure 15 applied to the isolators l Ensure that the supply pressure is 5 10 psig 0 4 0 7 kg cm2 above the pressure reading of any of the leveling valves If the load 18 increased the pressure should be increased to maintain the difference between supply and valve pressure Refer to Section 1 6 Check to see if all air lines are connected properly and the supply pressure is adequate see step A Refer to Figures 10 11 and 12 Be sure that the needle valves are not closed completely Check each leveling valve for clogging To do this press the control arm down Air should flow into the isolator accompanied by the familiar sound of moving air Repair or replace any clogged valve Use the ARF filter regulator to prevent this situation 4 2 Poor Isolation Performance The following may lead to poor isolation performance of your system l Vibration may be transmitted to the table through direct physical contact of equipment with external sources of vibration including cables Isolators that float too high too low or are not centered may conduct floor vibration to the table top Centered isolators w
22. ume air only when the leveling valves adjust the pressure to compensate for changes in the load on the table Bottled nitrogen or mechanically compressed air may be used The required pressure is determined by dividing the total load including table weight by the total isolator diaphragm area 15 6 in per isolator plus 5 10 psig For example if the table plus load is 2850 pounds and will be mounted on 4 isolators the required pressure 15 2850 Ibs 4 15 6 in 10 psig 55 6 psig Note that the maximum operating pressure for the system is 90 psig 6 3 kg cm The Newport Model ACMP air compressor is an extremely quiet source of clean pressure regulated air If another compressor or plant air 1s used the Newport model ARF Air Regulator Filter should be used to ensure maintenance free operation These filters prevent water and dirt from getting into the leveling valves and causing the valves to fail due to clogging The supply should include a shut off valve so that the air may be shut off during maintenance or extensive setup when the load is changed drastically CAUTION Bottled carbon dioxide is not recommended since icing can occur during rapid filling of the isolators 1 7 Warranty Information Warranty information may be found on the page preceding the Table of Contents in this manual Should it become necessary to exercise the warranty contact your Newport representative to determine the proper cour
Download Pdf Manuals
Related Search