HR4 Ultrasonic Motor User Manual
Contents
1. Vacuum level high vacuum motors Vacuum level ultra high vacuum motors Maximum Baking Temperature for vacuum motors 3 2 4 Physical Dimensions Length Width Height Weight 250 mm sec 15 to 18 N 14 N reference value 2 3 to 2 8 N u 72 N 2 to 4 N Volt driver amp command dependant 60 to 72 N sec m 1 to 2 V driver dependant Better than 100nm see application notes 20 000 hours under nominal operating conditions 270Vrms 39 6KHz sine wave 320 mA rms 15W 0 50 C 20 C 70 C 0 80 non condensing 107 Torr guaranteed only after baking 10 19 Torr guaranteed only after baking 120 C 140 C for ultra high vacuum motor 42mm 46 6mm 15mm 73 gr HR4 Motor User manual 3 3 Chapter 3 Specifications 3 2 5 Performance Envelope The following graph illustrates motor velocity as a function of the applied driver command voltage Allowing up to 30 mm sec variations use it as a reference and as a guideline for expected motor performance M otors vebciy VS comm and 300 0 250 0 200 0 150 0 100 0 50 0 Velcity n m ec 0 0 0 1 2 3 4 5 6 7 8 9 10 Comm and Figure 3 3 Motor Velocity vs Command The motor operates horizontally at room temperature and low duty cycle 1096 It interfaces an Ceramic Strip according to Nanomotion Specifications and a cross roller high qu2. 5 3 3 3 3 1 Schematics Chapter 3 Specifications Dimensions for Standard and High Vacuum Motors DIREC TION OF MOTION Soe GND PAN SCREW 21 40 2 ed c GE M 3x0 5 2 F 24 L N T 3 8 Tt au Th 4222 az 40 5 14401 3 Tex ae FRONT COVER FRONT COVER L 46 6 BACKWARD BACKWARD dis 0 6 0 2 POWER CABLE 03 FRONT COVER ROT COVER ee FORWARD 41 9 REF gt M4x0 7 NOTES 7 1 PRELOAD RELEASE ECCENTRICS SHOULD I al 4 MONIS REMAIN ACCESSIBLE AFTER MOUNTING N gt 2 ALL DIMENSIONS REFER A MOTOR A CORRECTLY MOUNTED AGAINST ALUMINA STRIP 2 3 ALLDIMENSIONSARE IN MM 2 1 9 4 GENERAL TO LERANCE 70 1 MeL IT N FINGER 8 TPS 03 05 bas PRELOAD i N RELEA SE copy of layout drawing MSP4 M30 L00 20 a EC CENTRIC S Figure 3 5 Dimensions for Standard and High Vacuum Motors HR4 Motor User Manual 3 6 Chapter 3 Specifications 3 3 2Dimensions for Ultra High Vacuum Motors DIREC TION OF MOTIOIN 2332 M3x0 5 2 THREADS FOR GROUND o 1 40 5 1 4 FRONT COVER FRONT COVER BACKWARD L BAC KWARD 41 3 0 6 0 2 FRONT COVER FRONT COVER FORWARD FORWARD 41 9 REF NOTES 1 PRELOAD RELEASE ECCENTRICS SHOULD 4
3. THREADS REMAIN ACCESIBLE AFTER MOUNTING ra FOR MOUNTING 2 ALL DIMENSIONS REFER TO A MOTOR CORRECTLY MOUNTED AGAINST ALUMINA STRIP 3 ALLDIM ENSIONS ARE IN MM 4 GENERAL TOLERANCE 0 1 10 7 0 2 PRELOAD FINGER RELEA SE TIPS 03 05 ECCENTRICS copy of layout drawing SPAU M 10 L00 20 2 Figure 3 6 Dimensions for Ultra High Vacuum Motors HR4 Motor User Manual 3 7 Chapter 3 Specifications 3 3 3 Mounting Base Dimensions STAGE CARRIAGE BESTE MOTOR MOUNTING SURFACE SHOULD BE FIXED a TO STAGE BASE 9540 2 TYPx4 N a gt HE 10 7 0 1 25 8 0 1 2 li TYPx2 Figure 3 7 Base Layout HR4 Motor User Manual 3 8
4. epoxy or CIBA GEIGEY Arldite Radite for non vacuum applications NOTE Be sure the epoxy contacts the upper surfaces of the plate and the stage carriage but does not flow over the Ceramic plate front surface Ceramic Plate Figure 2 4 Securing the Ceramic Driving Plate to the Stage 5 Allow the required time period for curing according to the Epoxy manufacturer specifications 6 Mount the motor according to the following section HR4 Motor User Manual 2 6 Chapter 2 Preparation and Installation 2 2 2 Mounting the Motor 1 Preload the motor using a 3mm flat screwdriver turn both of the two preload setting screws counter clockwise until the turn is completed and the slot is in the position illustrated below NOTE the motor is usually supplied with the preload screws already at the preloaded position If so please continue to step 2 Preloaded position Figure 2 5 Non preloaded Position Continued on the following page HR4 Motor User Manual 2 7 Chapter 2 Preparation and Installation Stage Carriage Mounting Base Stage Base Ceramic Driving Plate Figure 2 6 Mounting the Motor 2 While making sure not to exert any force on the fingers place the motor on the mounting base and loosely secure it using four M4 screws and spring washers inserted from the underside of the mounting base Do not tighten yet 3 Gently press the motor against the ceramic driving plate until it just
5. WANOMOTION ro 4 00 00 30 Nanomotion Ltd POB 223 Yokneam 20692 Israel Tel 972 4 959 0862 Fax 972 4959 0995 Web Site www nanomotion net E mail nano nanomotion com Nanomotion Ltd POB 223 Yokneam 20692 Israel Tel 972 4 959 0862 Fax 972 4959 0995 Web Site www nanomotion net E mail nano nanomotion com CE Compliance Copyright Preface The LN 2000 family drivers and motors complies to the following directive Safety 61010 1 1990 EMC 89 336 EEC as amended by 92 81 EEC and 93 68 EEC Harmonized Standards to which conformity is declared EN 50081 2 1993 EN 55011 1991 Generic Emission Standards Class A for radiated emission and Class B for conducted emission EN 50082 2 1995 Generic Immunity Standard NOTE UHV motors are designed for convenient interface to the UHV setup The motors are therefore supplied with three open electrical leads Whereas standard motors comply with CE regulations and the UHV motors have the same internal design as standard motors the UHV motors are supplied as components and CE conformity in both EMI and Safety must be implemented as part of the UHV system design April 2000 This document contains proprietary information of Nanomotion Ltd and may not be reproduced in any form without prior written consent from Nanomotion Ltd HR4 Motor User Manual Preface Preface This Installation Manual is designed to help the reader install and operate t
6. ality slide HR4 Motor User manual 3 4 Chapter 3 Specifications The following graph and table are designed to help the user determine the correct performance envelope of operation so as to not overheat and damage the motor Force Vs Vebcity atvarbus work regi es 0 100 200 300 Vebcity mm Sec amp max continuo max continuo max continuo a Duty Cycld operation tilDuty Cycle operation tilDuty Cycle operation ti 184 137 107 93 72 87 seconds 70 55 62 seconds 50 39 56 seconds 45 35 Figure 3 4 Performance envelope at various work regimes How to define a performance envelope An example for using the graph and table A vacuum application requires 5N at a velocity of 100mm sec The graph shows that this point of operation corresponds to curve The table shows that curve d and a vacuum environment require that a duty cycle of 1796 will not be exeeded while maintaining a maximum continuous operation time of 72 seconds Vacuum application note Heat dissipation mechanism is by radiation to the motor case and by conduction through the fingers Hence the motor and the ceramic drive strip bases must both be thermaly designed to dissipate 1W each per motor with a temperature rise of 15 C maximum Also the temperature of all parts in contact with the motor and with the ceramic drive strip should not exeed 40 C HR4 Motor User manual 3
7. ated controller 14 Handling CAUTIONS Do not set power on unless the motor is mounted and preloaded Do not immerse the motor in any solvent or cleaning agent Use only a clean cloth to wipe the motor Be sure that the motor and specifically the finger tips are not subjected to mechanical shocks 1 5 Installation and Servicing It is recommended to follow the installation instructions in this guide when mounting and installing the motor The HR4 does not contain any user serviceable parts HR4 Motor User Manual 1 2 2 Preparation and Installation 2 1 Preparation For optimal motor performance it is recommended to use the Ceramic driving plate provided by Nanomotion These driving plates have been specifically designed to work with Nanomotion motors Substituting this plate with any other material might reduce motor performance or damage the motor NOTE The instructions given in this section refer to the standard ceramic driving plates provided by Nanomotion Nanomotion can not guarantee performance attained by plates purchased from other sources HR4 Motor User Manual 2 1 Chapter 2 Preparation and Installation 2 1 1 Mounting Base Prepare the base as described in Section 3 3 3 Mounting Base Dimensions The base should be positioned perpendicular to the Ceramic driving plate that is bonded to the stage If necessary refer to the schematic for motor dimensions CAUTION T
8. ces between the motor finger tips and the stage and provides the required friction Bond the driving plate to the stage surface interfacing with the motor finger tips according to the instructions given in this section Stage Cermic Driving Plate Figure 2 2 Bonding the Ceramic Driving Plate HR4 Motor User Manual 2 4 Chapter 2 Preparation and Installation 1 Clean the bonding region on the stage using a suitable agent such as Acetone or Methanol 2 Peel off the self adhesive backing paper on the Ceramic driving plate The self adhesive tape is compatible with high vacuum applications 3 Referring to the figure below place the plate in position verifying that There is a maximum of 3 5mm between the lower edge of the Ceramic driving plate and the motor mounting surface There is a minimum of 12 0mm between the upper edge of the Ceramic driving plate and the motor mounting surface Ceramic driving plate Mounting Surface r1 1 i 1 D i i i i Figure 2 3 Ceramic Driving Plate Position Continued on the following page HR4 Motor User Manual 2 5 Chapter 2 Preparation and Installation 4 Referring to the figure below apply two drops of epoxy adhesive on the center of the Ceramic driving plate upper surface about 2cm apart The Epoxy must bond between the plate and the stage Recommended adhesive Emerson amp Cuming ecobond 24 for vacuum applications 3M 2216
9. contacts it and tighten the four screws of Step 2 at a torque of 0 5 0 7 Nm HR4 Motor User Manual 2 8 Chapter 2 Preparation and Installation 4 Release the preload setting screws using again the 3mm flat screwdriver turn both screws clockwise until the turn is completed and the slot is in the position illustrated below The motor is now preloaded against the ceramic drive plate Released position Figure 2 7 Released Position 5 Ground the motor according to the following section 2 2 3 Motor Grounding Warning Be sure to ground the motor to the electrical network ground according to the following instructions before operating the motor 1 Prepare a grounding wire and terminal connection with the following specifications Terminal diameter for an M3 screw Wire diameter minimum 18 AWG Wire length maximum of 2 meter 2 Open the motor ground screw figures 3 5 amp 3 6 and connect the Ground connection prepared in step 1 3 Secure the terminal between the two lock washers 4 Connect the other end of this cable to the electrical network ground 5 Connect the motor to its driver according to the instructions given in the following section HR4 Motor User Manual 2 9 2 2 4 Chapter 2 Preparation and Installation Motor Connections This section describes the motor connector pinout and the connections to each of the available drivers Make sure the dr
10. he mounting base and the method used for mounting should be designed for maximum mechanical rigidity and stiffness Stage Carriage Ceramic Driving Plate location Mounting Base 4 x holes Figure 2 1 Motor Mounting Base The mounting base dimensions diagram refers to the front surface of the ceramic driving plate For driving plate dimensions please refer to the price list The four screws securing the motor to the mounting surface will be inserted from its underside Any protrusion of the screws might interfere with motion on another axis HR4 Motor User Manual 2 2 Chapter 2 Preparation and Installation 2 1 2 Limiting Stage Motion The provided ceramic driving plate should not exceed the stage It must be supported by a solid even backing along all its length in order to avoid breaking when motor is pressed against it The Ceramic driving plate should also be at least 20 mm longer than the stage travel length otherwise the motor finger tips might be damaged If the above requirements are not met limit the stage travel distance using end stops HR4 Motor User Manual 2 3 Chapter 2 Preparation and Installation 2 2 Motor Installation The installation procedure consists of Bonding the Ceramic Driving plate to the stage Mounting the motor Grounding the motor Connecting the motor to its driver 2 2 1 Bonding the Driving Plate to the Stage The Driving Ceramic Plate interfa
11. he safety shorting between pins 1 and 6 is not implemented and should be preformed by the user A WARNING Since there is no cable shielding the HR4 1 U motor case to the ground it must be grounded by means of connection to the network ground Please refer to section 2 2 3 in the manual for detailed instructions 2 2 4 2 System Electrical Configuration The Motor is to be operated by one of Nanomotion s drivers Following is the two possible configurations Without an Integrated Nanomotion s Driver LC circuit LC zn Figure 2 9 Connection to a driver using an external LC box Nanomotion s Driver With an Integrated Internal LC circuit Figure 2 10 Connection to a Driver with internal LC circuit HR4 Motor User Manual 2 11 2 2 5 Motor Run In Chapter 2 Preparation and Installation Run in of the motor is important to reduce wear rate of the system and to increase its lifetime The required run in conditions are as follows e velocity 50 mm sec e Duty cycle 50 e Duration 4 hours When the run in is completed carefully clean the ceramic strip with a Q Tip soaked with IPA without dismounting the motor General remarks 1 The procedure should be repeated if the motor is disconnected and then reinstalled 2 Do not perform run in in a vacuum environment HR4 Motor User Manual 2 12 3 1 Offset Specifications General These specifications apply t
12. he various types of Nanomotion s HR4 Piezoceramic Motors This manual assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical dimensions as well as the mechanical and electrical installation procedures for these motors Warranty The motors are covered by warranty for a period of twelve months from the date of invoice The following voids the warranty Misuse or incorrect mounting incorrect electrical connections removal of motor cover or of serial number modification of parts and any other use that is not according to the cautions and warnings provided in this guide Liability for replacement will be determined after inspection of any defective item by Nanomotion or an approved agent Patents Aspects of the HR4 motors and relevant applications are protected by the following patent and patent applications e US 5453653 e US 5714833 e US 5696421 e US 5616980 e US 5682076 HR4 Motor User Manual Il Definition of Terms Warnings and Cautions Preface NOTE usefull information CAUTION Identifies conditions or practices that could result in damage to this product or other property WARNING Identifies conditions or practices that could result in personal injury damage to the product or other property A WARNINGS Do not remove the cover of the motor or disas
13. imensions Among its applications are microscopy precision motion robotics etc The motors provide a linear response to the input voltage The operation of the motor and driver resembles that of a DC motor driven by a voltage amplifier The specifications described in this chapter apply only to the motor driven by the AC 1 Driver Card and the AB 1 driver box Minor differences may result if NCD Controller Driver DC 12 Driver Card or DB 121 122 Driver Box are used Vacuum Motors Applications of the Nanomotion motors for vacuum and high vacuum environments include wafer inspection and metrology scanning stages and lithography The HR4 V and HR4 U motors are constructed of materials that have been selected and designed for high vacuum compatibility HR4 Motor User Manual 1 1 Introduction 1 3 HR4 System Parts A complete set for a single axis will comprise of the following a HR4 Motor b Ceramic Driving Plate for linear applications or Ceramic Driving Ring Disk for rotary applications see section 2 2 1 c LC Box Tank Circuit d One of the following drivers AC 1 Driver Card ABI DC 12 Driver Card DB 121 or 122 Driver Box Driver Controller Box NOTE For the first 4 driver options use a standard off the shelf DC Controller with a servo rate of 10KHz or more You may consult for the recommended controller The option for NCD Driver Controller Box consists of a driver and an integr
14. iver is set to operate with the HR4 motor series CAUTIONS Reducing the length of the supplied motor cable may damage the motor Do not attempt to shorten the cable without prior confirmation by Nanomotion Extending the motor cable will not damage the motor however it will affect its performance 2 2 4 4 Motor Connector Pinout WARNING Do not remove the cover of the motor disassemble its connector High voltage inside CAUTION Do not set power on unless the motor is mounted and preloaded The motor driver connection is a standard 9 contacts D type female connector whose pinout is given below Motor Connector Pinout 5 9 Direction 1 2 8 Direction 2 3 Screen 7 2 6 1 Figure 2 8 Motor Connector NOTE Pins 6 and 1 on the motor connector are shorted This is done for safety reasons driver voltage is disabled unless pins 1 amp 6 are shorted when motor is connected HR4 Motor User Manual 2 10 Chapter 2 Preparation and Installation For Ultra High Vacuum motor The 4 41 0 motor does not have an outlet cable or a connector Instead there are 3 TFE jacketed wires extending outside the motor 1 black wire 1 red and 1 white wire The red and white wires are direction 1 and 2 respectively and the black wire is the common Also t
15. o the standard motor driven by the AB1 Driver Box The motor features a linear voltage response The motor and driver can be modeled as a DC motor with friction driven by a voltage amplifier as illustrated in the following diagram Figure 3 1 Block Diagram of the Motor and Driver Where Vin Command to the driver 10 to 10 V Kf Force constant N V Offset Starting voltage V Kfv Velocity damping factor similar to back EMF N x sec m Vel Motor velocity m Sec M Moving mass kg S Laplace variable 1 sec HR4 Motor User Manual 3 1 Chapter 3 Specifications A block diagram of a typical HR4 Driver Motor Sub system is shown below A command voltage of 10V is applied to the driver The driver then generates a 39 6Khz sine wave V motor whose amplitude is a function of command voltage The sine wave drives the HR4 motor Figure 3 2 Block Diagram of a typical HR4 Driver Motor Sub system Velocity Force Dem V Command V Motor HR4 Motor User manual 3 2 Chapter 3 Specifications 3 2 Specification Parameters 3 2 1 Performance Maximum Allowable Velocity Dynamic Stall Force Static Holding Force Non Energized Stiffness Nominal Preload on Stage Kf Kfv Offset Attainable Resolution Nominal Lifetime 3 2 2 Electrical Maximal Voltage Maximal Current consumption Maximal Power Consumption 3 2 3 Environmental Ambient Temperature Storage Humidity
16. semble its connector High voltage inside Be sure to ground the motor to the electrical network ground according to the following instructions before operating the motor CAUTIONS Arrows on motor indicate direction of motion Align accordingly Do not set power on unless motor is mounted and preloaded Do not immerse the motor in any liquid or cleaning agent Use only a clean cloth to wipe the motor sure that the motor and specifically the finger tips are not subjected to mechanical shocks Be sure that the distance of the motor to the plate enables the motor finger tip to contact the driving plate otherwise the motor might be damaged during operation The mounting base and the method used for mounting should be designed for maximum mechanical rigidity and stiffness Reducing the length of the supplied motor cable may damage the motor Do not attempt to shorten the cable without prior confirmation from Nanomotion Extending the motor cable will not damage the motor however it will affect its performance HR4 Motor User Manual I Preface Table of Contents HR4 Motor User Manual IV 1 1 1 1 2 Introduction About the Motor The HR4 motors are high precision ceramic motors belonging to the Nanomotion LN2000 product line Designed and manufactured by Nanomotion Ltd the HR4 motors combine unlimited stroke with high resolution in compact d
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