450 mm Single Wafer Shipper User Manual
Contents
1. PTFE membrane 1 01 1016406 5 Filter retainer Thermoplastic elastomer TPE 1 01 1014479 6 Cover Polycarbonate PC 1 01 1017658 Polycarbonate PC 01 1014480 7 Cushion Polycarbonate PC 4 1420 210 01 8 Option 134 2 kHz RFID capsule Glass enclosure 1 01 1004283 01 9 Option Clarilite wafer Polycarbonate PC 1 01 1014742 10 Option Clarilite wafer retainer Polycarbonate PC 4 4 450 MM SINGLE WAFER SHIPPER USER MANUAL REV A ENTEGRIS INC General Use Instructions Opening and Closing The single wafer shipper latches are a permanent molded feature of the base To unlatch the shipper simply push inward on the tab that extends through the top cover in the locations shown by the arrows in Figure 1 To minimize particles it s recommended to open and close the shipper slowly Figure 1 The SWS450 101 incorporates a detented hinge that holds the cover in an upright position to minimize the need for a large workspace when placing or removing wafer as shown in Figure 2 The SWS450 101 cover can also be opened to a flat 180 if desired by applying additional pressure to overcome the hinge detent shown in Figure 3 Figure 3 ENTEGRIS INC 450 MM SINGLE WAFER SHIPPER USER MANUAL Wafer Access Options Vacuum wand access is provided to the underside of the wafer at the front of the shipper as shown in Figure 4 Figure 4 Access to the edge of the wafer is also provided in four locations indic2. HIPPER USER MANUAL REV A The Clarilite wafer is an optional device that is useful in minimizing moisture and oxygen in the SWS450 101 when the shipper is sealed in a moisture barrier bag for shipment or long term storage The Clarilite wafer can be easily snapped into or removed from the bottom of the SWS450 101 with the four retainer clips shown in Figure 16 The Clarilite wafer housing must be cleaned separately from the single wafer shipper Figure 16 It is not necessary to remove the wafer cushions shown in Figure 17 for cleaning but they are easily replaceable if damaged Figure 17 ENTEGRIS INC 450 MM SINGLE WAFER SHIPPER USER MANUAL Ordering Information 450 mm Single Wafer Shipper Part Number SWS450 101 B N N Lo Clean C Cleaned Purification N None C Clarilite wafer RFID N None N None Port B 01 1017573 Millex filter left side Example SWS450 101 A B N N C Material Polycarbonate PCR 80 Port 01 1017573 Millex filter left side Material RFID None A Polycarbonate PCR 80 Purification None B Polycarbonate Steripure Clean Cleaned C Other Product Information As Molded Product The SWS450 101 is manufactured within a non cleanroom environment therefore it is recommended that this product be cleaned prior to usage Entegris cleaned product may be offered please contact the factory for more information Product Reuse If the SWS450 101 is properly han
3. In North America 800 394 4083 www entegris com 2012 Entegris Inc All rights reserved Printed in USA 5565 7133ENT 0112 CO Entegris creating a material advantage
4. MICROENVIRONMENTS DD Entegris 450 MM SINGLE WAFER SHIPPER User manual Table of Contents Introduction ccccccceccsccccscceeccsceeses Features and Benefits cccccceeeeeee ee Specifications ccccscescecseseeseeeeees Dimensions cee eeceeceee eee een sense eeeenes Components cecceceeceeceee eee eea sense seneste General Use Instructions c0eeees Opening and Closing o Wafer Access Options ccccceeeee eee es Assembly with Wafer ccccccceeenee eens Controlling the Wafer Environment for Shipping or Long term Storage Packaging for Shipment Secondary Packaging Options Assembly Disassembly and Cleaning Recommendations Ordering Information cceeeeees Product Information ccccscccceseeees As Molded Product o on Product Reuse For More Information ccscccceseeees Terms and Conditions ccccscccseseeess Warranty Information ccceeseeeees 450 MM SINGLE WAFER SHIPPER USER MANUAL ENTEGRIS INC 450 MM SINGLE WAFER SHIPPER USER MANUAL REV A 450 MM SINGLE WAFER SHIPPER USER MANUAL Introduction In the process of scaling up your 450 mm program you need reliable wafer storage and shipment to ensure that your development remains on schedule You cannot waste valuable time replacing expensive wafers that have be
5. ated by the arrows in Figure 5 Figure 5 450 MM SINGLE WAFER SHIPPER USER MANUAL REV A 5 450 MM SINGLE WAFER SHIPPER USER MANUAL Assembly with Wafer Remove the SWS450 101 from packaging materials and clean as required Refer to the Assembly Disassembly and Cleaning Recommendations section Place the wafer into the bottom tray as shown in Figure 6 Figure 6 Controlling the Wafer Environment for Shipping or Long term Storage The SWS450 101 comes with an elastomeric gasket that is designed to provide particle protection to the wafer but will not function as a moisture barrier To manage particle contamination in transit the SWS450 101 should be bagged twice with appropriate cleanroom compatible bags and sealed using a light vacuum 5 mils PE recommended A third moisture barrier bag with a desiccant pack inside should be used with light vacuum and sealed to reduce the potential for wafer haze events caused by moisture condensation due to changing temperature extremes in transit Barrier bags should be a minimum of 5 mils in thickness and have a water vapor transmission rate FED 101 of 0 0006 gms 100 in 24 hrs Do not exceed 6 inches of H O when vacuum sealing the bags or the shipper could be damaged 6 450 MM SINGLE WAFER SHIPPER USER MANUAL REV A Packaging for Shipment Entegris offers multiple options for packaging solutions for the SWS450 101 Our packaging has been tested to exceed the requi
6. cations Wafer diameter 450 mm SEMI M76 compatible Wafer thickness 450 mm SEMI M76 compatible Dimensions Length 544 8 mm 21 45 Width 509 0 mm 20 04 Height closed 59 7 mm 2 35 Height open 554 5 mm 21 83 Weight Empty 2 47 kg 5 45 Ib With wafer 2 81 kg 6 19 Ib Packaging development and product performance testing based on SEMI M76 wafer standard Nonstandard wafers may require additional verification testing Dimensions Top View Side View open ry TI 509 0 mm F 554 48 mm 20 04 i i 21 83 Y 1 i i j e uM Y 544 5 mm 21 45 Side View 2 units stacked Side View 3 23 Qs ji E gt wae mm I a Z 4 39 P l SE i e 59 7 mm 2 35 ENTEGRIS INC 450 MM SINGLE WAFER SHIPPER USER MANUAL REV A 3 450 MM SINGLE WAFER SHIPPER USER MANUAL Components Part Number Item Description Material Qty 01 1014481 1 Hinge bushing Acetal POM 2 01 1014741 2 Gasket Thermoplastic elastomer TPE 1 01 1014478 3 Base Polycarbonate PC 1 01 1017656 Polycarbonate PC 01 1017573 4 Filter breather
7. d by sliding the cover off the hinge pin attached to the bottom It is not necessary to remove the bush ings from the cover when cleaning See Figure 10 Figure 10 The gasket can be removed and cleaned separately to 450 MM SINGLE WAFER SHIPPER USER MANUAL Figure 11 It is also recommended that the breather filter assembly be removed for cleaning See Figure 12 Figure 12 Figure 13 shows proper breather filter and retainer orientation To remove the assembly from the SWS450 101 apply light upward pressure to the inside beveled surface of the filter retainer with a flat blade screw driver or similar device improve cleaning efficiency and reduce drying time Figure 13 Figure 11 ENTEGRIS INC 450 MM SINGLE WAFER SHIPPER USER MANUAL REV A 7 450 MM SINGLE WAFER SHIPPER USER MANUAL If recording the number of product uses is desired a grid feature is provided on the bottom of the single wafer shipper Figure 14 that can be marked using a permanent marking device like a spring loaded cen ter punch Marking should be done prior to cleaning the product Figure 14 In the unlikely event that the bushings need replace ment they can be easily removed after the cover is removed from the base by applying pressure and slid ing in the direction shown in Figure 15 The bushings are designed to be installed in one direction only Figure 15 8 450 MM SINGLE WAFER S
8. dled and main tained it is capable of being reused many times In order to maximize the number of reuses the following guidelines should be followed e SWS450 101 assembly should be cleaned after each use e Thoroughly inspect the single wafer shipper for damage loose components or excess wear prior to reuse e Entegris supplied secondary packaging should be used e Maximum temperature should not exceed 70 C 158 F during use or storage ENTEGRIS INC 450 MM SINGLE WAFER SHIPPER USER MANUAL REV A For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you Visit www entegris com and select the Customer Service link for the center nearest you Terms and Conditions of Sale All purchases are subject to Entegris Terms and Conditions of Sale To view and print this information visit www entegris com and select the Legal Notices link from the footer Product Warranties For Product Warranties visit www entegris com and select the Legal Notices link from the footer Entegris and Clarilite are registered trademarks of Entegris Inc SEMI is a registered trademark of Semiconductor Equipment and Materials International Corporation Millex is a registered trademark of Millipore Corporation ENTEGRIS INC Corporate Headquarters 129 Concord Road Billerica MA 01821 USA Customer Service Tel 1 952 556 4181 Customer Service Fax 1 952 556 8022
9. en contaminated or damaged Entegris 450 mm single wafer shipper can alleviate this issue by providing a safe environment for you to ship and store your test wafers Constructed of strong engineering grade polymers this shipper maintains a clean environment while its edge only wafer contact internally protects against device damage and surface area contamination Entegris has been working with you to protect your wafers during shipment and storage for over 40 years and will continue to support you in the transition to 450 mm Along with protection from the shipper we ve developed secondary packaging to ensure your wafers are safe and clean upon arrival Our 1 capacity and 5 capacity packages successfully pass ISTA 2A drop and vibration testing offering you a complete 450 mm shipping solution Features and Benefits Feature Benefit Edge only wafer contact Protects against damage and surface area contamination Hinged design with detent feature Holds cover in upright position minimizing work area footprint Vacuum wand access area Allows wafer pickup with vacuum wand Elastomeric gasket and breather filter Maximum particle barrier Accommodates multiple wafer thicknesses For nonstandard applications Stackable Efficient storage RFID capable Process and inventory management 2 450 MM SINGLE WAFER SHIPPER USER MANUAL REV A ENTEGRIS INC 450 MM SINGLE WAFER SHIPPER USER MANUAL Specifi
10. rements established by ISTA 2A for shock and vibration performance International Safe Transit Association performance test for Individual Packaged Products weighing 150 lb 68 kg or Less If an alternative packaging system is to be used the packaging system must be tested to ISTA 2A or equivalent to assure proper performance and prevent wafer breakage as 450 mm wafers are very fragile and need to be protected when shipped Secondary Packaging Options When shipping only one wafer is required the use of Entegris packaging 01 1016902 Figure 7 is recommended If larger numbers of wafers need to be transported Entegris packaging 01 1016903 Figure 8 holds up to five single wafer shippers Figure 7 01 1016902 Figure 8 01 1016903 ENTEGRIS INC Assembly Disassembly and Cleaning Recommendations Many different types of systems may be suitable to clean the SWS450 101 but should use deionized water only It is not advisable to clean this shipper in solvent based cleaning systems When drying the SWS450 101 the temperature of the part should not exceed 70 C 158 F or damage may occur For the best cleaning results it is recommended that the product be partially disassembled to help clean and dry the hinge and gasket components To disassemble the SWS450 101 rotate the hinge 270 off the edge of a work space See Figure 9 Figure 9 Once the product is in this position the cover can be remove
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