MX80L User Guide
Contents
1. gt gt i i ET 15 20 25 35 40 45 All Data Plot Linear Target millimetres Published accuracy and repeatability specifications are subject to the testing methodology Daedal s methodology provides specifications over the entire table travel regardless of start or finish position The accuracy and repeatability specifications are based on the peak to peak error measured by a laser interferometer and prism located at 38mm above the center of the table This type of measurement sums the X Y Z roll pitch and yaw errors Temperature deviations from test condition may cause deviations in straightness flatness accuracy and repeatability from catalog specifications Tests are performed with the table mounted to a granite table unloaded at 20 C In this example the accuracy of an MX80L TO2 ranges from 3 68 microns to 2 64 microns This table would have its accuracy specified as 6 32 micron since the worst case would be starting at one extreme and traveling to the other Parker Hannifin Corporation 14 Daedal Division Automation I2. 5 PE PPI eli RIO 6 REPAIR INE ORMA 6 WARNINGS AND PRECAUTIONS cacascrutcutaniavicierostunionvedwy tie Rap cR ERE Ee TD ed erb re gue tud meu 6 SPECIFICATION CONDITIONS 7 ACSEMBEYBIAGISAM Sone ee 8 CHAPTER 2 MX80L SERIES TABLE SPECIFICATIONS 9 ORDER NUMBER ICING NE CIN 9 GENERAL TABLE SPECIFICATIONS 13 MX80L SERIES TECHNICAL run 15 LINEAR MOTION GUIDE BEARING LIFE LOAD COMPUTATION cceccececcececeececeececeeceeaeceeaeceeeeceeaeseeneaeseeaeseeaeseeaeseeaeseeaeeeeaeseeeeaeeneaeeetas 20 MX SUL SERIES ese DATA 21 EFECIBICAESBECIFICATIONS 23 CLEAN ROOM PREPARATION C NTRENTTNEEM
3. m NO n Sn uu MO O d 75 0 2 95 Z Axis at Mid travel Parker Hannifin Corporation 12 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 2 MX80L Series Table Specifications General Table Specifications MXBOLP Precision Grade MXAGOLS Standard Grace Peak Force Mib 1202 7 12727 24 54 MEH 12727 1227 246 4 MEA 24 5 4 Cycle Duty 190 190 100 100 100 100 100 100 100 Positional Accuracy 5 0 um 13 14 15 15 25 a 35 a5 35 1 0 um T 15 20 2 25 25 0 5 um Lm 4 5 5 5 12 15 20 20 20 0 1 um 3 4 5 5 20 0 02 um 3 4 5 20 0 01 3 4 5 5 20 1087 1370 0 Measured at the carnage center 35 mm 11 Total accuracy and bidirectional repeatability over full travel aoe the mounting surface 20 C with ne ipeak to peak cad batad to granite surface Tat to within 1mizren 300 mm Total accuracy and bi cirectional re Pr full evel E 1 Precision grade with correction value provided Consul factory if better accuracy required Parker Hannifin Corporation 13 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 2 MX80L Series Table Specifications Test Methodology ALL DATA PLOT LINEARITY T 5 Dc rl eet i PETI gc z 5 UN 2d k 6 32
4. Table Load 15 Thermal Effects Accuracy 35 Causes 36 Compensation 36 Repeatability 35 Thrust Specifications 13 Travel 9 Setting Limit Sensors 29 Unpacking 5 Velocity Maximum 34 Specifications 13 ViX Amplifier 37 Drive Specifications 25 Warnings 6 Wiring Diagrams 26 Z Channel 31 Parker Hannifin Corporation Daedal Division Irwin Pennsylvania
5. E 24 ENCODER SPECIFICATIONS 25 FAL EFFECT TRES 25 LIMIT AND HOME SENSOR SPECIFICATIONS sa lad uova Nada 25 LOW ESD TEE T ROTE B M M 25 DRIVE rese rere re 25 SN eT BR dea ver cR 26 CHAPTER 3 HOW TO USE THE 27 MOUNTING ORIENTATION C RCRUM 27 MOUNTING SURFACE REQUIREMENTS ausa iia bean od Ek da EUR AAEFRZK ARDT 27 LOAD MOUNTING REQUIREMENTS 2 E Ryan Ew Re guae wa UE CQ Vr e 28 LIMIT AND HOME SENSOR OPERATION cecececeececececeeeecececeeaeneceeeeeenenececeeaeaeseceegeaeaeneneseeeeeneseceeeeaenesesee
6. If the positioner is mounted in a multi axis configuration special care should be taken in routing and strain relieving the cables so as to prevent flexing of the cable at the connection to the table and where mounted stationary to the structure Provide sufficient service loop that the cable bends a minimum of 25mm from these end points It is also recommended to avoid twisting the cable The cable should be secured in a position which will orient it in a direction that creates a single plane of operation for the cable To replace extension cables 1 Disconnect power to positioner 2 Remove two button head screws from side of shield and remove the shield 3 Remove the two cap head screws from the strain relief and remove the strain relief 4 unplug extension cables 5 Reverse steps to reassemble Note When reassembling the strain relief take care not to pinch any wires and be certain that the exposed braided shield on the cables lies under the strain relief Parker Hannifin Corporation 32 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 3 How to Use the MX80 Cable Management For multi axis configurations special attention needs to be taken into account for the moving cables on the non base axis TIP For Multi axis Configurations Consider using the top axis for the highest frequency move in the application The top axis will have the least amount of weight to move and will reduce the
7. force being generated In low duty cycle applications heat generation is low however as duty cycles increase temperature of the MX80L will increase causing thermal expansion of the base With very high duty cycles these temperatures can reach temperatures as high as 30 C above ambient Compensating for Thermal Effects If the application requires high accuracy the thermal effects must either be removed by regulating carriage temperature or compensated for with a correction factor added to the commanded position Controlling the carriage temperature is the best method However this means controlling the ambient temperature by removing all heat cold generators from the area and operating at very low duty cycles Compensation is the other way of achieving accuracy without sacrificing performance In this case the system must be exercised through its normal operating cycle The temperature of the carriage should be measured and recorded from the beginning cold until the carriage becomes thermally stable This carriage temperature should be used in a compensation equation Below is the fundamental thermal compensation equation Ca Ia 1 Te AT Corrected displacement mm Incremental displacement mm Thermal Expansion 0 000022 mm mm C AT Temperature Differential from 20 C Example Carriage Temperature of 32 required move of 100mm Cd 100mm 100mm Te 12 C 99 9736mm In this exa
8. 4 5 Load kg Automation Parker Hannifin Corporation Daedal Division Irwin Pennsylvania MX80L Series Product Manual Chapter 2 MX80L Series Table Specifications T04 Travel Moment Life Load Charts Parker Hannifin Corporation 19 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 2 MX80L Series Table Specifications Linear Motion Guide Bearing Life Load Computation To predict the travel life of the MX8OL cross roller bearings under a moment load use the curve with the corresponding lever arm and given load Factor in dynamic as well as static loads For compound loading multiple moments use an effective lever arm of 2x actual lever arm Example Given a MX80L T02 with a 2 kg load mounted 35 mm off of the end of the carriage in line with the travel path The lever arm is 35 mm 40 mm center of table to edge 75 mm This loading produces a pitch moment Therefore using the Pitch curve for the 50mm travel draw a vertical line up from the x axis at the 2 kg load point until it intersects the 75 curve The point of intersect is the predicted bearing life of the table In this example the life is 10 000 km of travel Life Moment Chart 50mm travel Pitch Yaw Loading 100000 10000 I D im 2 1000 100 0 1 2 3 4 5 6 7 8 Load kg Parker H
9. 8 T04 amp T05 using M4 socket head cap screws 70 0 2 76 E CENTERED 70 0 2 76 50 0 1 97 CENTERED CENTERED TO2 TO3 104 TOS cius CENTERED FORMAX0 7 X LENGTH SOCKET CAP HEAD SCREW 10012 0000 20 1578 0 0005 BASE 240085999 DOWEL PIN HOLES e The positioner must be mounted to a flat stable surface with a flatness error less than or equal to 0 025mm 300mm for operation specifications will be greatly varied from published specification To meet catalog specifications the surface must have a flatness error less than or equal to 0 003mm 300mm for Standard grade and 0 001mm 300mm for Precision grade Parker Hannifin Corporation 27 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 3 How to Use the MX80 e Catalog specifications may deviate for positioners mounted to surfaces that do not meet the above conditions e If the intended mounting surface cannot meet these specifications a separate rigid mounting plate meeting these specifications should be used to mount to the main structure e If mounting conditions require that the table base is overhung table specifications will not be met over that portion of the table Additionally in X Y Systems the overhung portion of the Y axis may not met specifications due to the additional error caused by deflection and non support of the base Contact Daedal for guidelines on specificat
10. Distance Max Velocity Ta 2 Distance 500 mm sec 0 020 2 gt 5 0mm This means that both the positive and negative limit switch targets must be moved inward by 5 0 mm The limit deceleration rate should be set to 25 6 meters sec Using the supplied limit flag sheet cut two 5 0mm long strips from the appropriate white or black depending on configuration marked Limit Home Adjustment overlay decal and follow the procedure for changing the limits Adjusting the Limit Flag Procedure The following procedure is to be used for changing the limit flag Switching activation from N O to N C or vice versa and adjusting the activation position of the end of travel limits on the MX80 Images shown are for changing H3L2 to H2L3 Step 1 Remove power from the unit and allow time for stage base and carriage to reach room temperature Step 2 Remove the limit flag bracket from the MX80L by removing the button head cap screws BHCS that secure the bracket to the side of the carriage Step 4a adjust limits to increase travel With a razor cut and remove the desired amount of protective sticker and magnet which equals the amount of desired travel increase Parker Hannifin Corporation 30 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 3 How to Use the MX80 Step 4b To adjust limits to reduce travel With a razor cut the clear protective sticker at the end of the magnet that i
11. MX8OL is the main limiting factor for maximum speed The T01 and T02 options 2bmm and 50mm a triangular motion profile with 5g accel decel will only yield peak speeds of 1 1m sec and 1 5 m s respectively e Linear Encoder Limit The linear encoder has speed limits relative to encoder resolution these limits are listed below Encoder Maximum Velocity Required Post Resolution Quadrature Input Bandwidth 5 micron 5 meters second 1 2 MHz micron 3 meters second 1 6 7 MHz 0 5 micron 1 5 meters second 6 7 MHz 0 1 micron 0 3 meters second 10 MHz 0 02 micron 0 06 meters second 10 MHz 0 01 micron 0 03 meters second 10 MHz 1 When using an encoder with 5 micron resolution velocity limited by speed dependant force 2 This is the bandwidth frequency that the amplifier or servo control input should have to operate properly with the encoder output at maximum speeds This frequency is post quadrature to determine pre quadrature divide above values by 4 Above frequencies include a safety factor for encoder tolerances and line loses e Force Speed Limit The available force of the MX80L reduces as speed increases Chapter 2 MX80L Series Technical Data Parker Hannifin Corporation 34 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 4 Performance Thermal Effects on Accuracy The MX80L uses a moving magnet linear servo motor The magnet rails and the encoder tape are mounted to the carriage
12. Option E1 Hone 1 0 Lim Resolution 0 5 um Resolution 0 1 um Resolution ES 5 0 um Resolution 0 02 um Resolution 20 nanometer E 0 01 um Resolution 10 nanometer Environmental R1 Standard Finish black anodized R2 Cheanrmoxom Prep R10 Low ESD Finish R20 Low ESD Finish amp Claanroom Prep Digital Drive A1 ho Drive 20 2 foros mode A21 MVIXZSC AMH velocity modaj A12 MIXZSO AH step direction moda A25 VIXZSCO IH Drive controller Othor Options X1 one x2 Z as Praumatic Counter Balance Nat available with TOS Trareal Axis Designater hone single axis 52 X axis base unit icables 12 o clock 53 fads 60 arc sec cables 3 o dock 54 fads 60 arc sec cables 9 o dock 55 fads 15 arc sec cables 3 o dock 56 Y axis 15 arc sec cables 9 o dock Automation Parker Hannifin Corporation Daedal Division Irwin Pennsylvania MX80L Series Product Manual Chapter 2 MX80L Series Table Specifications Dimensional Drawings l Dimensions nun 1015 TOS 103 TO 40 desp imati H 7 7 thread m x deep E 4 0 OTE 24 lopi dowel pin holes E 2 joi 4 0 0 012 0 000 i5 da 5 dowel pin holes m 35 2 ims a 24 0 uu 280 0 k H ano EN 2550 liil E B E T
13. The motor coils are mounted in the base and unless the table is mounted to an insulated surface the heat generated in the coils should radiate out the base maintaining a low thermal delta between base and carriage All specifications for the MX80L are taken at 20 Variation from this temperature will cause additional positional errors If the carriage of the MX80L varies from this temperature the encoder scale will expand or contract thus changing its measuring length and thus encoder resolution The factor by which this thermal effect occurs is 0 000022mm mm C Although this sounds like a very small number it can make significant accuracy and repeatability effects on your applications especially on longer travel applications To understand this better let s look at an example Example A standard grade MX80L with 150mm travel is being used The accuracy over the entire travel is 25 microns 20 C If the carriage temperature increases by 5 C an additional error of 17 microns will be added over the total travel 0 000022mm mm C 150mm 5 C However this additional error can be compensated for since the error is linear The accuracy of the is plotted with respect to carriage temperature in the graph below for the 25 mm 50 mm 100 mm and 150 mm travel lengths Temperature Effect on Accuracy 0 07 0 06 0 05 0 04 0 03 0 02 0 01 Error mm 0 25 50 15 100 125 150 Travel mm 5 degre
14. cycles on the cables Pneumatic Counterbalance Cylinder Specification Description Specifications Cylinder Piston Area 0 105 in Cylinder Mounting Torque Head nut 0 45 0 90 Nm 4 8 in Ibs Rod End 0 23 0 56 Nm 2 5 in Ibs Maximum Compressive Rod Force 10 Ibs Allowable Input Pressure 0 100 psi Coefficient of Friction 0 015 assuming no side load Operating Temperature 20 175 Counter Balance Force For Z axis vertical applications the use of the pneumatic counter balance and accessory kit is strongly recommended The pneumatic accessory kit includes a filter regulator precision regulator fittings and 1 8 ID tubing The pressure in the pneumatic cylinder can be set to provide a balancing force to counter act the effect of gravity The counter balance force Fc is a linear function of the pressure P and the cylinder piston area Ac Fc PxAc See the following table to set the counter balance force Fc P 0 25 kg 0 5 kg 10 5 psi 4kg The yaw force generated by the counter balance will add 0 2 arc sec of yaw per psi of pressure The Pressure regulation during motion is dependent on the speed and acceleration of the motion profile The following table shows the expected pressure fluctuation based on the move dynamics Velocity Fluctuation 1g lt 500 mm sec 19g lt 500 mm sec lt 2000 mm sec 1 psi 1 680z 0 47 N of force Clean Room Compatibility The
15. errors and possible run away conditions The motor cable has an area of the shield exposed to allow a grounding path from shield to drive ground The Hall Encoder and Limit Home cables have the shield carried through the connector hood that is in turn grounded through the drive MX80L purchased with ViX drives as part of the configurable part number come equipped with p clips designed for the small OD of the motor cable to allow the cable shield to be grounded to the ViX ground Cabling The MX8OL is provided with high flex cabling which is strain relieved at the connection point on the positioner The Hall Encoder cable is terminated with a high density 15 pin D sub connector which is compatible with the ViX drive from Parker The motor cable is terminated with flying leads which are stripped and tinned and ready for installation into the screw terminals on the ViX drive For wire color codes and pin outs see tables in electrical section of manual The limit home cable is optional and therefore if not ordered a space will be open in the clamp at the connection point The limit home cable is provided with a 15 pin D sub connector which is compatible with the ViX drive For wire color codes and pin outs see tables in electrical section of manual Recommended bend radius for these cables is 50mm This radius will provide a minimum of 10 million cycles of the cable Smaller bend radius will reduce cable life while larger bend radius will increase life
16. 3 BLACK amp WHITE GREEN 5 6 Endoftravel ORANGE 8 Home GREEN 8 EncoerA YELLOW 9 WHITEBROWN ViX X1 MOTOR LEADS WIRE COLOR DRIVE WHITE BLACK GREEN Note Tables purchased before June 1 2009 require an interpolator box and a bypass cable for 10 and 20 nanometer resolutions 20 NANOMETER INTERPOLATION BOX 143 6 REF 5 65 600 300 190 23 61 11 81 3 3 CABLE LENGTH EAC OF SHE L TO BACK 02 SHELL 10 NANOMETER INTERPOLATION BOX Parker Hannifin Corporation 26 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 3 How to Use the MX80 Chapter 3 How to Use the MX80L Mounting Orientations The 80 can be mounted normal inverted side or vertically For vertical z axis mounting the pneumatic counter balance is recommended to compensate for the effect of gravity on the carriage and the load For all mounting orientations the cables should be secured as to not interfere with the movement of the carriage and bearings SIDE MOUNTED INVERTED VERTICAL With c balance and z bracket Mounting Surface Requirements Proper mounting of the MX8OL is essential to optimize product performance All specifications are based on the following conditions e positioner must be bolted down using all counter bored mounting holes provided 4 on T01 amp T02
17. Daedal Manual No 100 5326 01 Rev 6 MXO8OL Precision Grade MX8OL Standard Grade Product Manual Effective March 12 2010 Supersedes May 7 2008 Electromechanical Positioning Systems Automation MX80L Series Product Manual Important User Information WARNING FAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS AND OR SYSTEMS DESCRIBED HEREIN OR RELATED ITEMS CAN CAUSE DEATH PERSONAL INJURY AND PROPERTY DAMAGE This document and other information from Parker Hannifin Corporation its subsidiaries and authorized distributors provide product and or systems options for further investigation by users having technical expertise It is important that you analyze all aspects of your application and review the information concerning the product or system in the current product catalog Due to the variety of operating conditions and applications for these product systems the user through its own analysis and testing is solely responsible for making the final selection of the products and systems and assuming that all performance safety and warning requirements of the application are met The products described herein including without limitation product features specifications designs availability and pricing are subject to change by Parker Hannifin Corporation and its subsidiaries at any time without notice The information in the product manual including any apparatus methods techniques and concepts descr
18. agnet surfaces To change from normally open to normally closed operation of the sensor the patterns are reversed Example of Limit and Home Flag magnets corresponding to possible MX80L Limit Home configurations Config Endof Travel Limit Flag Magnets Normally us TY Normally Normally L3 8 Gosea Op LO am rn L2 Open Closed H1L1 Option Upgrades e Limits and Homes can not be added to the MX80S table in the field due to the integrated design which encloses the sensor on a printed circuit board in the base If the magnetic sensor limit and home are desired the unit must be returned to the factory on an RMA To change Limit Home operation from Normally Open to Normally Closed or from Normally Closed to Normally Open a new limit flag bracket must be purchased contact factory for proper configuration and part number e To adjust the operating position of the limits limit home adjustment magnets can be adhered on top of the existing limit flag These adjustment magnets are included with the unit To change the activation position of the sensors Determine desired position Cut magnet to proper length Follow Adjusting Limit Flag Procedure to add to the adjustment Determining Desired Position The limit sensors are set at the factory for maximum travel These factory settings only allow for a minimum of 1 5mm 0 06 before the carriage contacts the end sto
19. annifin Corporation 20 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 2 MX80L Series Table Specifications MX80L Series Technical Data Force Speed Chart The Force Speed Charts for the MX80L are shown for all available travels In the maximum allowable travel range the motor force is the same for 80 and 48 VDC bus voltage See Electrical Specifications for motor parameters Performance based on table mounted to 200mmx150mmx20mm Aluminum plate Curves shown include friction and viscous damping values of table Peak speed is limited by travel length for 25mm T01 and 50mm T02 travel lengths Force Speed Note Speed mm second TO1 25mm travel is limited to a maximum speed of 1100 mm sec T02 50mm is limited to 1500 due to limited travel Parker Hannifin Corporation 21 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 2 MX80L Series Table Specifications Blank Page Parker Hannifin Corporation 22 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 2 MX80L Series Table Specifications Electrical Specifications Specifications for both the 4 pole D11 and 8 pole linear servo motors D11 Saat Force Fa N 40 80 80 Stl Curent Continuous AmpsRMS os 16 16 Resistance 88 43 m 34 1 1 Max
20. asurement location A point directly below a component may have a different particle count than at a side location In an effort to clarify the class of clean room that our products can be used in with out affecting the overall rating of the clean room Daedal provides a Clean Room Class Compatibility chart for product intended for use in such environments Due to the moving magnet design of the MX80L minimal particle generation occurs during operation MX8OL tables with clean room preparation were tested in Daedal s vertical laminar flow work station which utilizes ULPA filters to produce an environment having a cleanliness of class 10 prior to testing Tables were tested in a variety of orientations with sampling both below the table and at the carriage mounting surface with a particle counter capable of measuring 0 3 um diameter and larger particles Based on results from testing following the 209E Federal Standard the following chart shows the expected clean room compatibility of the MX8OL with Class 10 clean room prep Consult factory for details on test methodology and results MX80L Clean Room Class Compatibility Compatibility is defined as not affecting the clean room class rating with the addition of this product for classes shown For example a MX80L with 50mm travel with a velocity of 500mm sec will not effect a class 10 clean room or higher The Class 1 rating in the table refers to class 1 levels of 0 3u and larger particles detected i
21. breakout board may be purchased to allow access to the remaining 2 inputs and all of the outputs Parker Hannifin Corporation 37 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Appendix Chapter 6 Maintenance and Lubrication Cross Roller Bearing Lubrication Standard Prep e Recommended Lubricant Mobil Vactra No 2 oil e Lubrication Interval 1000 hours e Method Lightly coat the bearing surfaces with oil Bearings surfaces can be exposed by moving the table to the end of travel lubricating the now exposed surfaces then moving the table to the other end of travel and lubricating the other set of surfaces A Warning Excessive oiling of the bearings particularly the limit side bearing can cause unit to malfunction Excess oil can damage limit sensor and target Clean Room Prep e Recommended Lubricant Castrol Braycote 803 grease e Lubrication Interval 2000 hours e Method Lightly coat the bearing surfaces with grease Bearings surfaces can be exposed by moving the table to the end of travel lubricating the now exposed surfaces then moving the table to the other end of travel and lubricating the other set of surfaces Warning Excessive greasing of the bearings particularly the limit side bearing can cause unit to malfunction Excess grease can damage limit sensor and target General notes Shorter lubrication interval may be required in environments with high amount
22. ding performance and response A high precision non contact linear encoder provides sub micron resolution and repeatability Selectable resolutions range from 10 nanometers to 5 microns Precision ground zero cage creep crossed roller bearing sets provide extremely smooth precise linear translation Travel limit and home sensors are conveniently designed into the unit for easy adjustment over the entire travel of the stage Although there are no moving cables 1 or 3 meters of hi flex cabling depending on configuration option is included and wired directly into the units This hi flex cabling addresses cable flexing concerns associated with the second or third axis in multi axis system Unpacking AN Unpacking Carefully remove the positioner from the shipping container and inspect the unit for any evidence of shipping damage Report any damage immediately to your local authorized distributor Please save the shipping container for damage inspection or future transportation Incorrect handling of the positioner may adversely affect the performance of the unit in its application Please observe the following guidelines for handling and mounting of your new positioner e DO NOT allow the positioner to drop onto the mounting surface Dropping the positioner can generate impact loads that may result in flat spots on bearing surfaces or misalignment of drive components e DO NOT drill holes into the positioner Drilling holes into the positioner can g
23. e 4 a B 1531 130 0 i 1000 zin 18 ai i s Centered 700 Pneumatic Vertical 18 Axis Counter Balance iimibhome a 12250 4020000 dowel hides 2 4 5 drill thru dla x amp O deep COI Meee Ske hy 290 0 4 044 dowel holes Oy 2 Dimensions rmm Travel A B C D E F H J N NECI 25 8 15 5 70 10 4 22 5 22275 dla x 50 desp 50 BD 15 5 70 10 4 225 99 97 5 ceuntebiore 53 100 780 30 10 35 70 35 18 525 16 67 5 Cty 12 150 210 30 5 65 70 65 22 B 87 5 16 92 5 Parker Hannifin Corporation 10 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 2 MX80L Series Table Specifications Z axis configuration with counter balance not available on 200mm Travel 25 and 50mm travel MX80L T01 OR T02 16 0 0 63 P N 100 9822 01 QTY 2 P N 002 2223 01 CYLINDER ASSY 125 0 4 92 Z AXIS SHOWN AT MID TRAVEL POSITION 100mm travel MX80L T0O3 5 6 0 22 002 2223 02 Cylinder Ass y P N 100 9822 02 Qty 2 50 0 1 97 Z Axis shown at Mid travel Parker Hannifin Corporation 11 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 2 MX80L Series Table Specifications 150mm travel MX80L T04 N 100 9822 02
24. ed distributor or Daedal Customer Service Department at 800 245 6903 to obtain a RMA number You will be notified of any cost prior to making the repair Warnings and Precautions A Hot Surfaces DO NOT touch linear motor coils located in the base of the MX80 Seepage 7 Assembly Diagram for component location after high duty operation Motor temperature may approach 125 C The unit itself may become warm or hot to the touch A Electrical Shock DO NOT take apart or touch any internal components of the positioner while unit is plugged into an electrical outlet SHUT OFF power before replacing components to avoid electrical shock AN High Magnetic Field Unit may be HAZARDOUS to people with Pace Makers or any other magnetically sensitive medical devices Unit may have an effect on magnetically sensitive applications A Ferrous Materials The positioner s open design WILL ATTRACT ferrous materials The customer must take additional precautions in these applications to keep positioner free of these highly magnetic particles AN Vertical Operation The MX80L is NOT recommended for vertical operation unless it is configured with the pneumatic assist option If the pneumatic assist is not used the carriage and customer s load will fall in power loss situations potentially causing product or load damage or personal injury AN General Safety Because linear motors can accelerate up to 5 g s and sometimes positioners move without war
25. eeaeneseseeeeaeneseeneeeneneseeseenenenens 29 ADJUSTING THE LIMIT FLAG PROCEDURE iris sarvobews usu vt tus Sau gau ge ae Saa erbe I 30 31 Z CHANNEL POSITION REFERENCE 31 Rei zB 32 IN carcere 32 AGE IIE MM c uen 33 PNEUMATIC COUNTERBALANCE m 33 CHAPTER 4 PERFORMANCE 0 2 00 c ccecescescnecnensensenscneceeesenseeeeeseneesenscnseneneenscnseuseneesensenscnennensenensseenesenssesensenmasenscoseneneenscneeees 34 ACCELERATION 9 34 PE 34 THERMAL EFFECTS ee 35 THERMAL EFFECTS ON Cau A aa uana e rta da ra cx aaa Aaa 35 CAUSES OF TEMPERATURE INCREASES cese RII Ime mene ennemi reme rese remetirreretreremieremre remi reme rere rere 36 COMPENSATING FOR THERMAL EFFECTS isssessesee ee e
26. enerate particles and machining forces that may effect the operation of the positioner Daedal will drill holes if necessary contact your local authorized distributor e DO NOT subject the unit to impact loads such as hammering riveting etc Impacts loads generated by hammering or riveting may result in flat spots on bearing surfaces or misalignment of drive components e DONOT lift the positioner by cables or cable management system Lifting positioner by cables or cable management system may effect electrical connections and or cable management assembly The unit should be lifted by the base structure only e DO NOT expose positioner to mist spray or submersion in liquids DO NOT disassemble positioner Unauthorized adjustments may alter the positioner s specifications and void the product warranty Parker Hannifin Corporation 5 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 1 Introduction Return Information Returns All returns must reference a Heturn Material Authorization HMA number Please call your local authorized distributor or Daedal Customer Service Department at 800 245 6903 to obtain a RMA number See Daedal Catalog 8083 USA for additional information on returns and warranty Repair Information Out of Warranty Repair Our Customer Service Department repairs Out of Warranty products All returns must reference a RMA number Please call your local authoriz
27. es C 10 degrees 99 15 degrees 20 degrees Thermal Effects on Repeatability Repeatability will not be affected as long as the temperature remains constant However the repeatability will be affected as the temperature changes from one level to another This is most commonly experienced when starting an application cold Then as the application runs the MX80L comes to its operational temperature The positions defined when the unit was cold will now be offset by the thermal expansion of the unit To compensate for this offset all positions should be defined after the system has been exercised and brought to operational temperature Parker Hannifin Corporation 35 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 4 Performance Causes of Temperature Increases One or more of the following conditions may affect the temperature of the MX80L carriage e Ambient Temperature This is the air temperature that surrounds the MX80L e Application or Environment Sources These are mounting surfaces or other items which produce a thermal change that affect the temperature of the MX8OL carriage i e X Y configurations with motors or other heat generating devices that heat the mounting surface and thus thermally affect the MX80L carriage e Motor heating from MX80L Since the MX8OL uses a servo motor as its drive it produces no heat unless there is motion or a
28. he table See Chapter 2 Dimensional Drawing for positive direction definition The repeatability of the Z channel is equal to the repeatability of the table Thus the repeatability of the 2 channel equals Encoder Resolution 7 Channel Repeatability 5 micron 10 micron 1 micron 2 micron 0 5 micron micron 0 1 micron 0 4 micron 0 02 micron 0 4 micron 0 01 micron 0 4 micron NOTE Home repeatability is also very dependent on controller input speed and homing algorithms The above repeatability does not include possible controller tolerance Additionally to achieve the highest Parker Hannifin Corporation 31 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 3 How to Use the MX80 repeatability the final homing speed must be slow Slower final speed usually results in higher repeatability NOTE The Z channel output is only one resolution count wide Thus the on time may be very brief Due to this some controllers may have difficulty reading the signal If you are experiencing the positioner not finding the Z channel during homing try reducing final homing speed also refer to your controller manual for frequency rates of the Z channel input Grounding Shielding All cables are shielded These shields are to be grounded to a good earth ground Failure to ground shields properly may cause electrical noise problems These noise problems may result in positioning
29. ibed herein are the proprietary property of Parker Hannifin Corporation Daedal Division or its licensors and may not be copied disclosed or used for any purpose not expressly authorized by the owner thereof Since Parker Hannifin Corporation Daedal Division constantly strives to improve all of its products we reserve the right to change this product manual and equipment mentioned therein at any time without notice For assistance contact Parker Hannifin Corporation Daedal Division 1140 Sandy Hill Road Irwin PA 15642 Phone 724 861 8200 800 245 6903 Fax 724 861 3330 E mail ddlcat parker com Web site www daedalpositioning com Parker Hannifin Corporation 2 Daedal Division Automation Irwin Pennsylvania 412LXR Series Product Manual Chapter 1 Introduction MXSOL Series Product Manual Table of Contents IMPORTANT USER RR RR RR A RR RR RR sess sa us sas suu R sana eaa 2 4 CHAPTER 1 INTRODUCTION 2 6 DU M U RO nn 5 PRODUCT DESCRIPTION cc eccaccounsunsuduimindedutsunndthawandaxndunetstakwaindedadusn wad
30. imum Bus Votage Vm voso o o 9 N L m a Motor Constant Km N sqrt watt Fs 1 0 Rated Ambient Temperature AT C 20 20 20 Winding Class H H H 1 25 C ambient 125C Winding Temperature with the table mounted to a 200mm x 150mm x 20mm aluminum plate 2 Measured with a 0 33 mm gap 3 Measured Line to Line 10 4 Value is measured peak of sine 5 30 Line to Line inductance bridge measurement 1Khz 6 Initial winding temperature must be 60 C or less before Peak Current is applied 7 8 9 1 DC current through a pair of motor phases of a trapezoidal six state commutated Peak of the sinusoidal current in any phase for a sinusoidal commutated motor Total motor force per peak of the sinusoidal amps measured in any phase 10 0 Maximum time duration with 2 times rated current applied with initial winding temp at 60 C 11 Maximum time duration with 3 times rated current applied with initial winding temp at 60 12 The Distance from the leading edge of the north pole to the leading edge of the next north pole 13 Average friction over total table travel Parker Hannifin Corporation 23 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 3 How to Use the MX80 Clean Room Preparation There is no clean room rating for motion control products just individual compatibility with class of clean rooms The compatibility is also dependant on me
31. internal components causing the motor to stall Parker Hannifin Corporation 39 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Index Acceleration Limits 34 Specifications 13 Accuracy Specifications 13 Thermal Effects 35 36 Assembly Diagram 8 37 Bearing Life 15 Load 20 Lubrication 38 Bend Radius 32 Cabling 9 32 33 Cleanroom 24 33 38 Counter Balance 33 Deceleration Distance 29 Dimensional Drawings 10 Drive Ampilifier 9 Electrostatic Discharge ESD 25 Encoder 31 34 35 Options 9 Resolution 34 Specifications 25 Velocity Limit 34 Z Channel 9 Force Speed Charts 22 24 General Specifications 13 Grounding 32 Automation Hall Effect Specifications 25 Home Sensor 9 Adjusting 31 Specifications 25 ViX 37 Horizontal Translation 20 Ingress Protection Rating 39 Internal Protection 39 Limit Sensor 9 Adjusting 30 Specifications 25 37 Lubrication 38 Maintenance 38 Mass 13 Motor Force 34 Motor Heating 36 Mounting 9 27 Surface Requirements 27 28 Order Number Nomenclature 9 Overhang 28 Pinning 9 Repair Information 6 Repeatability 31 Specifications 13 Thermal Effects 35 Return Information 6 Settling Time 34 40 Index Shielding 32 Specifications Bearing 15 Electrical 23 Encoder 25 Force 21 General 13 Hall Effect Sensors 25 Speed Limits 34 Maximum 29
32. ions of overhang applications Load Mounting Requirements Dowel holes are included in the carriage of the MX8OL for repeatable mounting of loads fixturing When bolting payload to carriage take precaution in using bolts M4 with 7mm of engagement as to not damage the table A Use appropriate length bolt The MX80L compact design requires proper sized bolts to be used when mounting payloads to the carriage Excessive length bolts can damage bearings or pin the table in position Parker Hannifin Corporation 28 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 3 How to Use the MX80 Limit and Home sensor operation The MX80L utilizes an innovative method for setting limit and home positions The magnetic sensors embedded in the base of the MX80L change state based on the limit flag This space saving compact design consists of three 3 parts magnetic sensors limit flag and limit flag bracket The limit and home magnetic sensors are mounted to a PCB in a fixed position to the base of the unit The flag bracket is mounted to the left side of the carriage with respect to the cables The Limit Flag is a pattern of thin magnets which triggers the sensors This pattern defines whether the switch functions as normally open or normally closed A limit is normally closed when the switch operates from non magnet to magnet surfaces The home switch is normally open when the switch operates from non magnet to m
33. men mene meneemerremetremetresetrereretreremieremsretsr remi rese reser rere 36 CHAPTER 5 CONNECTING TO THE Ix SHE SFO aEOUE x 37 CHAPTER 6 MAINTENANCE AND 38 GROSS ROLLER BEARING LUBRICATION METTE 38 APPENDIX A INTERNAL PROTECTION cccceeceececceceeceeceeceeeeceeceeceeaseuseeseeeaseaseeseeseeeaseuseeseesaseaseuseeseuseuseuseeseseuseuseuseeseseases 39 INDE seas ses en ce cs S 8 40 Parker Hannifin Corporation 3 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Revision Notes Revision Notes Revision 1 Original Document Revision 2 8 25 03 General Made numerous spelling corrections Added precision grade tables Page 9 Modified configurable to include precision grade tables Page 13 Modified specifications to include precision grade tables Page 25 Modified Low ESD description to include precision grade tables Revision 3 Changed wiring block extension dimension on page 10 Page 29 30 amp 31 Changed Limits Home from optical sensors to magnetic sensors Re
34. mple the commanded move should be 26 4 microns less 100mm 99 9736mm than the desired move This will compensate for the thermal expansion of the scale This is a simple linear correction factor and can be programmed in to most servo controllers using variables for the position commands Parker Hannifin Corporation 36 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 5 Connecting the ViX Amplifier Chapter 5 Connecting to the ViX The MX8OL is designed to be plug and run compatible with the Parker ViX drive The cables the MX8OL are labeled to match the labels on the for ease of use and quick installation When purchased as part of the part number the ViX will have the motor parameters already downloaded X1 MOTOR LEADS 111 WIRE COLOR DRIVE RED U RED WHITE nl BLACK MI GREEN X2 FEEDBACK HALL CONNECTOR j 6 X5 LIMITS CONNECTOR FUNCTION WIRE COLOR ORANGE PIN FUNCTION WIRE COLOR M BLACK BROWN gaia Eiee ORANGE 6 Temperature YELLOW BLACK of travel LUE WHITE 8 EncoderA YELLOW For Drive Only versions of the ViX the limits need to 9 Hall 1 WHITE BROWN be connected to the motion controller NOT the drive YELLOW RED 11 Encoder B BLUE AN Limits use Inputs The ViX drive has 5 digital inputs When using with MX80L the EOT Limits and Home use 3 of the 5 inputs A VMIS PF screw terminal
35. n Daedal s Class 10 chamber For complete class 1 compatibility the particle count for the 0 1 and 0 2m particles would also need to be taken into consideration Standard Clean Room Preparation e Stringent cleaning and handling measures e Clean room rated lubricant e Reduce force specification by 25 Parker Hannifin Corporation 24 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 3 How to Use the MX80 Encoder Specifications Description Specification Specification Input Power 5 5 150 to 220 mA depending on encoder resolution Output Square wave differential line driver RS422 2 channels A and B in Incremental quadrature 90 phase shift E2 E4 5 E8 Reference Z Synchronized pulse duration equal to one resolution bit Repeatability of Channel position is unidirectional moving toward positive direction and is equal to table repeatability specifications Maximum Speed 5 0 micron resolution 2 0 meters sec limited by table 1 0 micron resolution 2 0 meters sec limited by table 0 5 micron resolution 1 5 meters sec 1 micron resolution 0 3 meters sec 20 nanometer resolution 0 06 meters sec 10 nanometer resolution 0 03 meters sec Hall Effect Specification Description Specifications eee Specifications Input Power 5 VDC 30 mA Output Open collector Current Sinking 20 mA Max Limit and Home Sensor Specifications Descri
36. ning keep all personnel away from dynamic travel range of positioner Parker Hannifin Corporation 6 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 1 Introduction Specification Conditions Specifications Are Temperature Dependent Catalog specifications are obtained and measured at 20 Degrees C Specifications at any other temperature may deviate from catalog specifications Minimum to maximum continuous operating temperature range with NO guarantee of any specification except motion of a standard unit before failure is 5 40 degrees C Specifications Are Mounting Surface Dependent Catalog specifications are obtained and measured when the positioner is fully supported bolted down and is mounted to a work surface that has a maximum flatness error of e Standard Grade 0 003mm 300mm 0 0001 ft Precision Grade 0 001mm 300mm 0 00004 ft Table will operate with work surface 0 100mm 300mm but performance specifications will be significantly effected Specifications Are Point of Measurement Dependent Catalog specifications and specifications in this manual are measured from the center of the carriage 38 mm above the carriage surface All measurements taken at any other location may deviate from these values Parker Hannifin Corporation 7 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 1 Introduction Assembly Diagram CARRIAGE Limit Flag B
37. p In slow speed applications this may be adequate however as the top speed of the application increases the required deceleration distance increases To determine the safe Deceleration Distance the Maximum Speed and the Maximum Obtainable Deceleration Rate must be known or calculated The maximum speed should be known from your application requirements Velocity limits should be set in your program or in your amplifier to cause a fault if the speed exceeds this value The maximum deceleration is a factor of load and available peak force of the table Using F ma calculate maximum acceleration and then required deceleration distance See the following example for calculating maximum deceleration for an application with a payload 0 25 kg an MX80 TO1 with a maximum speed of 500 mm s Parker Hannifin Corporation 29 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 3 How to Use the MX80 Total mass 0 46 kg Payload mass 250 grams Carriage mass 213 grams Application Speed 500mm sec Available peak force at 25 m sec 11 8 N See Chapter 2 Force Speed Curve Maximum Obtainable Deceleration Rate Thus F ma gt F m gt 11 8N 0 46kg gt 25 6 m sec Now calculate the Deceleration Distance for linear deceleration First find the Deceleration time Ta Max Velocity Deceleration Rate 50 m sec 25 6 m sec gt 0 020 seconds Second find the Deceleration Distance
38. ption Specification Input Power 5 VDC 60 mA power from encoder no additional connection needed Output Output form is selectable with product Normally Closed Current Sinking Normally Open Current Sinking NPN open collector 5 to 24 VDC types Sink maximum of 50 mA Repeatability Home Sensor 5 um unidirectional with 1 0 micron or better encoder NOTE Repeatability using z channel refers to encoder specifications Low ESD Specifications The low ESD ElectroStatic Discharge option refers to either an electroless nickel coating on standard grade tables or an Armoloy coating on precision grade tables that provides a very low resistance path to ground from all surfaces of the MX80 Drive Specifications Refer to Specifications provided in the ViX Manual Parker Hannifin Corporation 25 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 3 How to Use the MX80 Cabling and Wiring Diagrams Connector Pin Out and Extension Cable Wire Color Codes for the 5 1 0 5 and 0 1 micron resolution encoders X5 LIMITS Not included with H 1 H1 L1 option A7 FEEDBACK ues Ep pem te Eri cd i DL u X1 MOTOR TT ViX X2 FEEDBACK HALL CONNECTOR PIN FUNCTION WIRE COLOR ViX X5 LIMITS CONNECTOR FUNCTION WIRE COLOR 1 ORANGE 2 BROWN
39. racket Anti Cage Creep Left side of stage w r t cables Cross Roller Bearings Encoder Linear Motor Read Coils Head BASE Parker Hannifin Corporation 8 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 2 MX80L Series Table Specifications Chapter 2 MX80L Series Table Specifications Order Number Nomenclature Fil in an order code from each of the numbered to create a complete model order code 0 00 Order Example MXS80LTO2 M P 014 Series MIX BIOL Travel mm TU 25 TO 50 TOS 100 TO 150 TOS 200 Mounting M Metric Grade S Staredarad Precision mot available with TOS Travel option Drive Type Di Free Travel Motor D11 4 Pole 26 8 20 mm travel ont Di3 8 Pole 100 150 amp 200 mm travel only Home Sensor H1 Mone Fres Travel H2 Curent Sinking H3 Current Sinking Limit Sensor L1 Hone Frea Travel only L2 Current Sinking L3 Current Sinking Cable Options CMO3 Ne Cables Froe Trawa GM O4 High Flex Gables Connector 1 mater CMOS High Flex Cables w VEX Connector 3 meter CM06 High Flax Cables Connector reo limit home cable 1 meter CMOT High Flex Cables Connector reo cable 3 meter Channel Location Zi None I3 Canter Position c H3 15 o o o O L2 CMOS 73 EB Ai A25 Xi St Digital Linear Encoder
40. rwin Pennsylvania MX80L Series Product Manual Chapter 2 MX80L Series Table Specifications MX80L Series Technical Data The useful life of a linear table at full catalog specifications is dependent on the forces acting upon it These forces include both static components resulting from payload weight and dynamic components due to acceleration deceleration of the load In multi axes applications the primary positioner at the bottom of the stack usually establishes the load limits for the combined axes When determining load life it is critical to include the weight of all positioning elements that contribute to the load supported by the primary axis The life load charts are used to establish the table life relative to the applied loads Life Load Curve All Travels Life Load Normal Load A 0 1 2 3 5 6 7 8 Load kg Moment Load Life Curves The effect of moment loading on the bearing life is dependent upon load and lever arm The lever arm in this case is measured from the center of the surface of the table to the point where the load is applied For dynamic loading use the distance from the center of the table to the center of mass of the load The Life Load charts show curves for various lever arm lengths units in mm Note Pitch moments and Yaw moments use the same curves p Force 4 ee Yaw Moment Loading Roll Moment Loading Pitch Moment Loading Parker Hannifin Corporation 15 Daedal Division Au
41. s of dust and other contamination Parker Hannifin Corporation 38 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Appendix Appendix A Internal Protection Daedal has conducted testing to determine the degree to which the positioner is protected by using a British standard called an Ingress Protection Rating IP Rating The MX80OL has IP 10 protection rating Definition Reference British standard EN 60529 1992 This standard describes a system of classifying degrees of protection provided by enclosures of electrical equipment Standardized test methods and the establishment of a two digit numeric rating verify the extent of protection provided against access to hazardous parts against ingress of solid foreign objects and against the ingress of water First Number The first number indicates protection of persons against access to dangerous parts and protection of internal equipment against the ingress of solid foreign objects 1 Protection against access to hazardous parts with the back of a hand and protected against solid foreign objects of 50 mm diameter and larger Second Number The second number indicates protection of internal equipment against harmful ingress of water 0 No special protection provided Note Number Indicators above represent only a partial list of IP Rating specifications Warning Particles as small as 0 005 diameter could lodge between the table and
42. s to be adjusted Flatten out protective sticker at the cut this allows a flat surface to adhere additional magnet Place additional self adhesive magnet supplied with positioner at the end of the existing magnet which equals the amount of desired travel reduction Confirm that there is no gap between the original magnet and the additional magnet just applied If there is a gap remove the additional magnet discard it and apply a new magnet Step 5 Gently slide bracket under carriage Push up on bracket insert 0 5mm to 1 0mm shims between bracket and base insert and tighten BHCS Setting Home Sensor The MX80L is equipped with a home position reference sensor when purchased with Home configuration option H2 or H3 The home sensor is located on the same PCB as the limit sensors and the target is located between the limit targets The sensor is typically used in conjunction with the encoder Z marker If another home location is desired the home target can be adjusted by removing the limit flag decal and applying adjustment overlay decals in the desired location Z Channel Position Reference The Z channel is an output on the encoder Many servo controllers support this input The Z channel on the is at mid travel The Z channel is a unidirectional device This means that the final homing direction must occur one direction The MX8OL is set that the final home direction is to be toward the positive end of t
43. tomation Irwin Pennsylvania MX80L Series Product Manual Chapter 2 MX80L Series Table Specifications T01 Travel Moment Life Load Charts Life Moment Chart 25mm travel Pitch Yaw Loading 100000 10000 Life km 1000 100 Load kg te Moment Chart 25mm travel Roll Loading 10000 1000 us Load kg Life km Parker Hannifin Corporation 16 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 2 MX80L Series Table Specifications 702 Travel Moment Life Load Charts 100000 10000 Life km 1000 100 Life Moment Chart 50mm travel Pitch Yaw Loading 100000 10000 Life km 1000 100 300 250 200 150 0 3 4 5 6 8 Load kg Life Moment Chart 50mm travel Roll Loading 300 250 00 0 3 4 5 6 8 Load kg Automation 17 Parker Hannifin Corporation Daedal Division Irwin Pennsylvania MX80L Series Product Manual Chapter 2 MX80L Series Table Specifications T03 Travel Moment Life Load Charts Life km 100000 10000 1000 100 Life Moment Chart 100mm travel Pitch Yaw Loading 25 300 250 3 4 5 Load kg 150 100000 10000 Life km Life Moment Chart 100mm travel Roll Loading 1000 100 3
44. vertical counter balance is compatible with clean rooms of class 250 500 for speeds below 500 mm sec or class 1000 for higher speeds due to the particle generation on the plunger Parker Hannifin Corporation 33 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 4 Performance Chapter 4 Performance Acceleration Limits Acceleration of linear servo driven tables is typically limited by three 3 factors linear bearings available motor force and settling time Due to the high load bearings used in the MX80 the acceleration is only limited by the available motor force and the settling time e Available Motor Force This is the primary factor that reduces acceleration This is simply the amount of motor force available to produce acceleration The larger the inertial and or frictional load the lower the accelerations limit e Settling Time In many applications reducing cycle time is a primary concern To this end the settling time the amount of time needed after a move is completed for table and load oscillating to come within acceptable limits become very important In many cases where very small incrementing moves are executed the settling time is greater than the actual move time In these cases accelerations may need to be reduced thus reducing the settling time Speed Limits The Maximum Speed of the MX80L is limited by three 3 factors e Travel Length The short travel length of the
45. vision 4 Removed Steps 5a amp 5b from page 30 Steps 5a amp 5b were for optical Limits Home Revision 5 Added information for the T05 200mm travel positioner Revision 6 Updated electrical specification for the resistance and inductance on D11 and D13 motors page 23 Added the following Note to page 26 Tables purchased before June 1 2009 require an interpolator box and a bypass cable for 10 and 20 nanometer resolutions Revised Static Friction for D11 motor from 0 5N to 1 0N page 23 Page 29 Changed the following sentence from These factory settings only allow for a minimum of 3mm 0 12 before the carriage contacts the end stop to These factory settings only allow for a minimum of 1 5mm 0 06 before the carriage contacts the end stop Page 9 added encoder option E5 to Order Number Nomenclature section Parker Hannifin Corporation 4 Daedal Division Automation Irwin Pennsylvania MX80L Series Product Manual Chapter 1 Introduction Chapter 1 Introduction Product Description MX80L Positioner Although MX80L is small in size and weight it is large on performance and reliability All key components are integral to the unit residing within the body of the stage to provide a clean looking reliable unobstructed package At the heart of the MX80L is an innovative non contact linear servo motor patent pending This direct drive motor has been optimized for force speed and acceleration to deliver outstan
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