GTS30V User Manual - Newport Corporation
Contents
1. Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Yaw Pitch Rotation of carriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 C A linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 164 points Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more information please consult the metr2. GTS30V High Precision Vertical Linear Stage QO USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed GTS30V High Precision Vertical Linear Stage Warranty S A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used K J EDH0222En1031 07 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from e Incorrect usage Load on the stage greater than maximum specified load Carriag
3. Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user D Newport EDH0222En1031 07 15 vi Experience Solutions GTS30V High Precision Vertical Linear Stage Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stag
4. Position Origin m i at 5 mm from the bottom end of travel EOR Limit E i aaa EOR Limit Mechanical 7 seen Zero i 1 Index Pulse Index Pulse a Stage Travel Range gt Motion Direction End of Run and Mechanical Zero are 5 V open collector type The Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source D Newport Experience Solutions EDH0222En1031 07 15 6 GTS30V High Precision Vertical Linear Stage 5 4 5 5 D Newport Experience Solutions Feedback Signal Position 2 3 4 Encoder Phase A Direction Encoder Phase A Encoder Phase B A Encoder Phase B el Direction Motion gt Direction The incremental sensor consists of a optical scale and an encoder head When the carriages of the stage move the encoder head generates square signals in quadrature sent to pins 19 20 23 and 24 of the SUB D25 connector Newport Stage Encoder Phase A Pin 19 Y pe Encoder Phase A I Pin 23 Encoder Phase B_ Pin 20 LE Encoder Phase B Pin 24 Index Pulse Phase x Pin 15 LT Index Pulse Phase Pin 25 Output Signals gt OO 0 Oe YYYY Y Y a Pin 21 150 mA max amp Sens
5. 0 4 2 NF EN 61000 4 3 NF EN 61000 4 4 e NF EN 61000 4 5 NF EN 61000 4 6 ORIGINAL DECLARATION Done in Beaune La Rolande on 26 June 2015 Dominique DEVIDAL Quality Director v EDH0222En1031 07 15 GTS30V High Precision Vertical Linear Stage Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark CE The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a
6. 2 Connection On each stage is represented a label which indicates its name andits serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion system quickly and safely ESP These stages are ESP compatible Enhanced System Performance is COMPATIBLE 6 3 Cables Our GTS30V stage is delivered with a MCAB 3 3 meter cable This cable is equipped with a SUB D25M connector so it can be directly connected to our controllers drivers 6 4 MCAB 3 Cable lt 2 28 58 gt DISCONNECTED CABLE CONNECTOR STAGE SUB D25 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING STATIC CABLE 21 50 38 CABLE IN MOTION 23 78 96 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable For applications where the standard 3 meter cable MCAB 3 included with your stage is not adequate Newport offers longer length cables designed to ensure the integrity of your positioning application These cables are specially shielded and terminated with Newpor
7. D Newport Experience Solutions 1 1 EDH0222En1031 07 15 GTS30V High Precision Vertical Linear Stage 9 0 Maintenance 9 1 9 2 EDH0222En1031 07 15 RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The GTS30V stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The GTS30V stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your GTS30V stage to Newport s After Sales Service after every 2000 hours of use for lubrication If your stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your GTS30V stage to Newport once a year for recalibration to its original specificati
8. al scale with 50 nm resolution Compared to alternative designs featuring a screw mounted rotary encoder this direct position feedback avoids drive train errors impacting positioning performance hence leading to superior positioning accuracy and repeatability 2 1 Design Details Base Material High strength 7075 Aluminum Bearings Anti creep crossed roller bearings Drive Mechanism Precision ground lead screw gravity preloaded nut Drive Screw Pitch mm 1 Feedback Linear steel scale 20 pm signal period 0 05 um resolution RS 422 differential output Limit Switches Optical Origin Optical located 5 mm from lower position travel limit Drive Type DC Servo Cable Length m 3 included NOTE RoHS This product complies with the RoHS directive Restriction of Hazardous Substances Compliant gt Newport EDH0222En1031 07 15 2 Experience Solutions GTS30V High Precision Vertical Linear Stage EW Characteristics 3 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of position uncertainty which depends on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors
9. cal Zero End of Run lin max 10 mA lin max 16 MA V max 30 V V max 5 6 V If the Mechanical Zero output is not used a 1 k2 0 25 W resistor must be connected p between pins 13 and 21 Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 QD Newport EDH0222En1031 07 15 10 Experience Solutions GTS30V High Precision Vertical Linear Stage 8 0 Dimensions 4 HOLES M6 THD 4 HOLES M4 THD ON SQR 3 97 100 8 SUB D25M ON 2 95 x3 94 75x100 DEPTH 39 10 CONNECTOR DEPTH 31 8 TI Te a 7 o xr A anousmaran v 120 ae ON 3 94x2 95 100x75 3 DEPTH 31 8 FR a 5 HOLES M4 THD s ON 93 62 92 4 HOLES M6 THD v l DEPTH 31 8 ON SOR 2 95 75 oe DEPTH 39 10 i amp DIMENSIONS IN INCHES AND MILLIMETERS 04 57 i 116 al A n 24 75 5 12798 130 4 HOLES 0 31 7 8 4 y 39 M qi y 4 alt A SOR 3 97 MANUAL KNOB lt ie gt SOR 4 53 4 63 lt 115 gt i 1175 a A compact XYZ assembly consisting of a GTS150 linear stage a GTS70 linear stage and a GTS3OV vertical stage
10. ch as semiconductor wafer inspection nanotechnology automated device alignment metrology and quality control processes When combined with our XM GTS VP ILS or IMS series of linear stages the GTS30V is a space saving alternative to traditional XYZ stacks of stages and provides unobstructed access to the payload from any side Furthermore centering the payload over the bearings ensures less cantilevering load effects and Abbe induced motion errors High precision vertical motion is achieved using a direct vertical guiding system composed of matched pairs of anti creep crossed roller bearings Compared to alternative wedged designs this direct guiding method provides consistently lower and more repeatable runout errors In addition the lack of any re circulating elements in the bearings leads to outstanding ripple free motion required in high sensitivity focus adjustments Lastly the geared retainers prevent bearing cage migration a problem often found with other linear bearings especially in vertical arrangements A folded DC motor with a precision ground low friction lead screw arrangement delivers ultra smooth motion and does not back drive even at high loads A reduction belt between the motor and the lead screw increases the available output torque reduces the servo sensitivity and ensures 100 nm minimum incremental motion with all Newport motion controllers and drivers Precision position feedback is provided by an optic
11. e Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit D Newport Eee Stns vii EDHO222En1031 07 15 GTS30V High Precision Vertical Linear Stage Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock e Operating temperature 10 to 35 C e Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that
12. e frayed or damaged in any way e If the power plug is damaged in any way e If the unit is exposed to rain excessive moisture or liquids are spilled on the unit e If the unit has been dropped or the case is damaged e If you suspect service or repair is required e Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to e Keep all air vents free of dirt and dust e Keep all liquids away from the unit e Do not expose the unit to excessive moisture 85 humidity e Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts gt Newport EDH0222En1031 07 15 8 Experience Solutions GTS30V High Precision Vertical Linear Stage 6
13. e speed higher than specified speed Improper grounding Connectors must be properly secured When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads e Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings D Newport ii Experience Solutions GTS30V High Precision Vertical Linear Stage Table of Contents Warranty teen mrssmn leds das ness aa teens cap decors tresse eee a stades ii EC Declaration Of CONOMIE ARE Re v D finitions and SyYMbOlS nssss simon itestermernstissnernrneleisteeenrtentiiennnee vi WAPI GS nresnani ee E ea a axed dites d ele eee tree a tee En vii CAUTIONS session vi catseuv set sduver oastevveaevecveaaeiveey vente nlsdenidenens viii 1 0 Introduction 1 2 0 Description eee ne en nT ene en RENT THT 2 2 1 Design Details n E nanan 2 3 0 Characterislics suimmirens 3 Sil D finitions sisi issun
14. edaccesdosiicoseniccsscudaehominpacaresesseacaatibe can cesseatesusdebansiants 12 DEL VICE POEM PE ET TE LE EN RS 13 gt Newport EDH0222En1031 07 15 iv Experience Solutions GTS30V High Precision Vertical Linear Stage EC Declaration of Conformity SO K Se SS DA ES Ne 9 N 6 SA G QD Newport Experience Solutions tf af me amp ORR EK AMA RS EC Declaration of Conformity following Annex II 1A of Directive 2006 42 EC on machinery The manufacturer MICRO CONTROLE Spectra Physics 9 rue du bois sauvage F 91055 Evry FRANCE Hereby declares that the machinery e Description GTS30V e Function High Precision Vertical Linear Stage e Models GTS30V the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility was designed and built in accordance with the following harmonised standards e NF EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements e NF EN 55011 2010 A1 2011 Class A was designed and built in accordance with the following other standards e NF EN 6100
15. einserissnnnitieisiniiseenmnieneieites 3 3 2 Mechanical Specifications scsessisdiin dinninrdaienenneerneeterdte 4 3 3 Load Specification Definitions 4 3 4 Load Characteristics and Stiffness 0 0 ccc cccsecssecseeeeseceseeeeeeneeeneeenes 4 3 5 Stage Weights eee 5 Bt DIV or am nounou 5 NUTR momo 6 5 1 UE34CC Motor Characteristics 6 5 2 Command Signals for the DC Motor cccccseesesseeseeeeeeseeseeeseeseeeeeenes 6 5 3 Sensor Position 25 2520 urtieterrnerebe ere dtaderennndetrti de lets detente ii 6 5 4 Feedback Signal Position sesessessssessesessesessessssessesessesessessssessesessesessesessese 7 55 PINUS enina nn a a T 6 0 Connection to Newport Controllers 8 6 amp 1 Warnings on Controllers osonucoimiciisisniniiaiiiiiiaeii eii 8 02 CONNECTION mnr r E E E O R 9 6 3 CADIeS eiia e a a a lth tes 9 GA MCAB S Cable ss insreisnrisensrnrsnennrneereninnnennemeendnesel 9 7 0 Connection to Non Newport Electronics 10 hel COMMCCUH ONS ss Teens rene ne a a N A EE 10 8 0 Dimensions 11 gt Newport Experience Solutions iii EDH0222En1031 07 15 GTS30V High Precision Vertical Linear Stage 9 0 Maintenance 20 0 cccccscscscssscscsssesssssesssssessssseseesses 12 9 1 Maintenance 2 0 0 0 ccccsssccccessscccesssssccccescecsesessescecesseeseseessseseceesseeeeeess 12 92 Repalt sistema aie Giardia E 12 O S Cali DYatiO ls ts cccucecissasec
16. load N Q lt Cz 1 D 30 Where Dmax Cantilever distance mm 100 CAUTION Do not use the GTS30V stage as an horizontal movement Specifications are given only for a vertical use gravity preloaded D Newport 4 Experience Solutions GTS30V High Precision Vertical Linear Stage 3 5 Stage Weights The stage weight indicated into the below table is the one of the stage without any cable Weight Ib kg GTS30V 7 3 3 3 3 meter MCAB 3 Cable 1 32 0 6 4 0 Drive The GTS30V stage is equipped with a DC motor and a metal optical scale Specifications Resolution Maximum Speed Motor um mm s GTS30V 0 05 10 UE34CC D Newport Experience Solutions 5 EDH0222En1031 07 15 GTS30V High Precision Vertical Linear Stage EW Motor 5 1 UE34CC Motor Characteristics Motor Nominal Max RMS Max Peak Resistance Inductance Voltage V Current A Current A Q mH UE34CC 48 0 5 1 0 2 52 0 51 5 2 Command Signals for the DC Motor Motor v ooo Motor v Motor v po Displacement gt Direction Direction Displacement Motor v Direction In the above drawings Motor signal is referred to Motor signal When the stage moves in Direction the Motor voltage is higher than Motor voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage 5 3 Sensor Position i Home
17. ology tutorial section in the Newport catalog or at www newport com D Newport Experience Solutions 3 EDH0222En1031 07 15 GTS30V High Precision Vertical Linear Stage 3 2 3 3 3 4 gt EDH0222En1031 07 15 Mechanical Specifications Travel Range mm 30 5 25 from origin Minimum Incremental Motion um 0 1 Bi directional Repeatability um 0 2 or 0 1 On Axis Accuracy um 1 5 or 0 75 Maximum Speed mm s 10 Straightness Flatness mm 1 5 or 0 75 Pitch Roll 2 mrad 50 or 25 MTBF h 20 000 hours at 25 load and with a 30 duty cycle 1 Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the definition of typical specifications which are about 2X better than the guaranteed values visit www newport com for the Motion Control Metrology Primer 2 To obtain arcsec units divide urad value by 4 8 CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 um Load Specification Definitions Normal Load Capacity Cz Maximum load a stage can move while maintaining specifications Max Speed mm s 10 Max Acceleration mm s 40 Load Characteristics and Stiffness Cz Normal centered load capacity N 40 Kax Compliance in roll urad Nm 40 Kay Compliance in pitch urad Nm 40 Kaz Compliance in yaw yrad Nm 25 Ox Qy Off center
18. ons D Newport 1 2 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems D Newport Experience Solutions 13 EDH0222En1031 07 15 Newport Experience Solutions Visit Newport Online at WWw newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
19. ors 5 V 5 Encoders OV Power Supply Pin 22 0 Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 Pinouts The SUB D25 connection for the GTS30V stage is given in the following table GTS30V UE34CC 1 N C 14 OV 2 N C 15 Index Pulse I 3 N C 16 0 V logic u o 1 4 N C 17 End of Run o 5 Motor 18 End of Run gt 6 Motor 19 Encoder Phase A 2 7 Motor 20 Encoder Phase B a 3 8 Motor 21 5 V O A 9 N C Origin End of Runs Encoder os ee ola 10 N C 22 0 V Encoder 11 N C 23 Encoder Phase A 12 N C 24 Encoder Phase B 13 Mechanical Zero 25 Index Pulse I 7 EDH0222En1031 07 15 GTS30V High Precision Vertical Linear Stage 6 0 Connection to Newport Controllers 6 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances e If the power cord or any attached cables ar
20. t s standard SUB D25 connectors They are available in 5 m MCAB 5 7 m MCAB 7 or 10 m MCAB 10 lengths WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk D Newport Experience Solutions 9 EDH0222En1031 07 15 GTS30V High Precision Vertical Linear Stage 7 0 Connection to Non Newport Electronics 7 1 Connections WARNING Newport is not responsible for malfunction or damage to a GTS30V stage when it is used with non Newport controllers WARNING Newport guarantees CE compliance of the GTS30V stages only if they are used with Newport cables and controllers Nevertheless the figure below shows the wiring when a GTS30V stage is used with non Newport controllers SUB D25M Connection Connector UE34CC e2ee 222 ODDO 9200 1 Motor Motor a 1 Motor I Motor s Ground gt lt OV logic Mechanical Zero Encoder Phase A 1 Encoder Phase A Encoder Phase B Encoder Phase B Index Pulse N ND NN Index Pulse I End of Run End of Run 5 V Encoder 0 V Encoder Connector i i LLL LLL Connector Cap Cap 1 The Mechanical Zero logic signal is open collector type It supports until 30 V and 10 mA 2 Open collector type with a 5 6 V protective Zener diode Newport Stage Mechani
21. the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year gt Newport EDH0222En1031 07 15 viii Experience Solutions GTS30V High Precision Vertical Linear Stage High Precision Vertical Linear Stage GTS30V 1 0 Introduction This manual provides operating instructions for the GTS30V precision vertical linear stage GTS3O0V stage RECOMMENDATION We recommend you read carefully the chapter Connection to electronics before using the GTS30V stage ILS250 GTS30V and URS100 stages in XZ0z configuration gt Newport Experience Solutions 1 EDH0222En1031 07 15 GTS30V High Precision Vertical Linear Stage 20 Description The GTS30V is the ideal foundation for applications that require long travel vertical motion of horizontally oriented samples Its low profile and high precision motion capabilities make this stage an excellent choice for applications su
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