WS-650 Quick Start Instructions
Contents
1. Figure 3 3 3 8 tubing can be connected to vent exhaust port Adding a length of tubing will act as a muffler thereby lowering its noise level The tubing length may affect the maximum achievable vacuum Do not restrict or block the exhaust output lower vacuum values may result 3 0 OPERATION Set the CDA or N2 pressure to 60psi Turn on pressure Place a substrate onto the vacuum chuck Press the vacuum key to apply vacuum to the substrate 3 A vacuum will be applied onto the substrate and a vacuum reading will be displayed in the upper right corner of the LCD 4 When the vacuum key is pressed a hissing sound will be generated from the IV PVG This is normal air flow is exhausted as it creates a vacuum There is no hissing sound when vacuum is not turned off N e 4 0 TROUBLESHOOTING 1 If no vacuum is generated try the following a Check air supply Is it 60psi Is it turned on Is it at the IV PVG input b Check all connections for tightness If you need assistance contact support at 215 699 7278 or email us at support laurell com All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN Approximate Vacuum Achieved With Different Pressure Settings 3 8 fitting2. option Install the drain connector onto the Drain Port Push the connector fully onto the stem Attach 0 5 12 7mm exhaust tubing to an exhaust source VAC JM All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer 10 Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN INSTALL DRAIN CONNECTOR option _ Install the drain f connector onto the Drain Port Push the connector fully onto the stem _ Use a 3 16 4 8mm Allen wrench to tighten set screw into the recessed groove DO NOT OVER TIGHTEN SET SCREW OR IT MAY DEFORM THE PORT AND LEAK All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer 11 Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN INSTALL DOWNFLOW EXHAUST CONNECTOR option gt Install the Down Flow drain connector onto the Drain Exhaust Port Push the connector fully onto the stem gt Use a 3 16 4 8mm Allen wrench to tighten set screw into the recessed groove DO NOT OVER TIGHTEN SET SCREW OR IT MAY DEFORM THE PORT AND LEAK gt 5 32 3 97mm tubing from Down Flow exhaust to Different
3. INSTALL SEAL PURGE TUBING gt Cut the end of tubing squarely using a razor blade or tube cutter if necessary Install the 1 4 O D tubing by inserting the tubing into the Seal Purge push to connect fitting Push in until the tubing seats completely Connect the other end of the tubing to a 60 70 psi CDA or N2 supply gt A Need CDA error will appear in the run mode status screen on the 650 controller if this requirement is not met gt Toremove tubing turn off pressure source With the pressure at Opsi press in tubing and the inner collar at the same time then pull back on the tubing All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer a Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN SEAL PURGE SCHEMATIC WAFER PROCESS CHAMBER DRAIN OUTPUT CDAIN INPUT ME LIQUID gt This graphic represents the functionality of the seal purge The seal s purpose is to separate the process chamber from the motor and electronics in order to insure long service free operation All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer _5 Laurell Technologi
4. gt To remove fragment adapter turn off vacuum and lift up All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer 16 Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN CONNECTING TO THE 650 CONTROLLER SPIN 3000 PORT ONLY gt Connect the RS 232C gt Connect the RS 232C cable to an unused RS cable to the RJ 11 232C port on the PC port looks like a gt For more information see sections 1 and 2 in phone jack on the the Spin 3000 user manual 650 controller gt gt If the computer does not have a 9 pin RS 232 serial port use a USB port to communicate to the controller gt Use the enclosed USB adapter to connect to the RS 232C cable See picture below gt Use the following instructions to install the USB software All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer siTe Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN USB INSTALLATION INSTRUCTIONS Keyspan USA 19HS USB Serial Adapter Before installing the Keyspan USB Serial Adapter make sure the adapter is unplugged from your system as with most USB device installations Windows 32 bit Instr
5. only Pressure psi Vacuum in inches of Hg 4 14 8 4 Lo 2 4 4 6 2 8 5 18 24 2 2 5 5 10 15 0 5 30 0 5 0 5 NOTE These values are approximations actual values may vary NOTE The processor has a minimum vacuum setting of 15 This is a factory setting The processor must have 15 of vacuum to operate All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer _8 Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN INSTALL THE VACUUM TUBING Slide the locking nut the gripper with the tapered end pointing toward the locking nut and the ferrule with the tapered end toward the vacuum valve onto the air operated vacuum valve Ferrule Gripper Locking nut Push the tubing into the vacuum valve connector Slide the ferrules into the vacuum valve and HAND tighten nut Connect the other end of the tubing to a vacuum source Without seal purge pressurization the pneumatic vacuum valve WILL NOT OPERATE All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer Ga Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN INSTALL DRAIN CUP CONNECTOR
6. Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN QUICK START WS 650 LITE INSTALLATION INSTRUCTIONS gt Open Boxes gt Remove All Contents If any parts are missing contact the factory immediately Claims for missing parts must be made within 30 days of inate mtor mnim rreren shipment All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer _l Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN WS 650 SPIN PROCESSOR INCLUDES S 1 5m of 0 5 12 7mm chemically resistant Tygon exhaust tubing optional Drain reservoir connector and two 2 250ml polypropylene drain catch cups optional F 1 5m of 1 25 4mm FEP Teflon drain tubing amp drain connector optional 3 16 4 8mm Allen wrench to tighten set screw drain connector optional 10 3m of 3 9 5mm polyethylene vacuum tubing Spare 7s x 4 6 35mm vacuum fitting optional 10 of 4 polyethylene tubing for CDA N2 Seal Purge 1 75 45mm Wafer Chuck for 50 150mm substrates ONPP TFM models only Wafer Fragment Adapter for 7 50mm substrate fragments 6NPP TFM models only e Package of Viton O rings for fragment chuck for acids and toluene e Package of EPDM O rings for fragment chuck for solvents USB adapter Document CD with S
7. RS LID OPEN message close lid If system 1s installed but there is insufficient CDA or N2 NEED CDA message will appear See section 3 in manual for programming See section 4 in manual for maintenance and errors If there is insufficient vacuum lt 15 381mm Hg factory set point the NEED VACUUM message will appear All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer sI a Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN INSTALLTION COMPLETE AND READY FOR PROGRAMMING Drain attached Vacuum tubing installed Seal Purge tubing installed Power Cord plugged in If CDA and vacuum are present at the required pressures the processor is ready for programming With a substrate on the chuck and the vacuum button enabled the amount of vacuum present will be indicated gt TIPS gt ALWAYS USE LAURELL CHUCKS gt ALWAYS PREVENT CHEMICALS FROM ENTERING THE VACUUM PATH gt FOR SUPPORT CONTACT SUPPORT LAURELL COM All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer 23 Laurell Technologies Quick Start WS 650 Series 08 2012 10070193
8. ate officer 19 Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN Product Registration 3 1 Keyspan USB Serial Adapter USA19 pakaa Connections for your computer InstallShield Wizard Complete Setup has finished installing the Keyspan USB Serial Adapter USA19H on your computer Thank you for purchasing the Keyspan USA 19HS Please take a moment to register now so that we can alert you when software updates have been posted The entire registration process takes less than 60 seconds 7 From your Start menu find amp launch the Keyspan USB Serial Adapter Assistant Keyspan USB Serial Adapter USA19H Assistant z a n ORT Adapter Status Properties Port Mapping Diagnostics Help E USATSHT _ COM Idle 8 Plug in the Keyspan adapter to a free USB port on your computer connecting to a USB hub is not recommended After a minute or so you should see a tray notification indicating that your adapter is installed IR Your devices are ready to use ow Device driver software installed successfully Note If the above tray does not appear do the following a Make note of the COM port that is idle See above COM 3 Idle b Open up the Spin 3000 application c Login into Spin 3000 using the password located on the front of the CD sleeve Click on EDIT Click on RS 232 Interface Change the COM port to the idle COM port When commun
9. es Quick Start WS 650 Series 08 2012 10070193 revN INSTALL THE PNEUMATIC VACUUM GENERATOR IVPVG option gt CDA or N2 input 60 70 psi gt Vent Exhaust Figure 10 OVERVIEW The Laurell Technologies IV pneumatic vacuum generator is capable of generating a variable amount of vacuum depending on input air pressure It creates a vacuum by venturi action 2 0 INSTALLATION 1 For best performance use a dedicated CDA or N2 supply regulator for the vacuum generator The generator s flow rate is approximately 1 67cfm at 60psi See figure 2 Note It may be possible to tee the CDA or N2 supply to both the processor and the IVPVG but there must be a sufficient volume of gas to satisfy both If there is an insufficient volume the processor will produce a Need CDA error message Also there may be a loss of vacuum from its initial level when the vacuum is first applied Output of CDA N2 Regulator Figure 2 All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer ahs Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN 2 Connect the output side of the regulator using the provided 4 tubing to the CDA or N2 input on the vacuum transducer box See figure 3 WM i N2 CDA INPUT CDA N2 Supply Input 60 70PS
10. etween the low and high set points B indicates the exhaust flow is higher than the maximum set point High set point is set to 3 00 All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer _14 Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN USING THE BULL S EYE LEVEL It is always a good practice to level the system wafer chuck before using A level wafer chuck will help to reduce thickness non uniformities Use the level either on the chuck itself or on a flat substrate do not pull vacuum onto to the substrate when leveling Level the system by leveling the bench or table If this is impractical use shims under the feet of the processor All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer _15 Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN INSTALLING THE FRAGMENT ADAPTER gt Installed 1 75 45mm chuck gt Bottom view of Fragment Adapter gt With vacuum off place fragment adapter onto the low profile chuck gt Place fragment on chuck and press the vacuum key on control panel support laurell com an STOP
11. his copy of the Fs software Software on a single computer You may not use or install the Software on more than one computer at the same time 2 Copy Restrictions Ownership of Software You own the media on which the Software is recorded Keyspan retains title to the Software including copies regardless of form or media and to all copyrights therein You may make one or more copies of the Software solely for archival or backup purposes The Software and accompanying written materials are copyrighted 3 Transfer Restrictions You may transfer the Software with a copy of this cense agreement If you choose No rent to install K InstallShield UNext gt A InstallShield 5 Keyspan USB Serial Adapter USA19H Setup Status Select folder where setup will install files Setup will install the Keyspan USB Serial Adapter USA19H software in the following folder Keyspan USB Serial Adapter is configuring your new software installation z Destination Folder E Program Files Keyspan USB Serial Adapter f a uy Install Shield Next gt InstallShield After installing the drivers you may register the adapter optional Click Finish to complete installation You may now re enable anti virus protection All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corpor
12. ial Pressure Gauge gt Differential Pressure Gauge gt Exhaust gt Drain gt Optional Digihelic Differential Pressure Gauge please refer to Digihelic operation manual for instructions It is located in the large binder or packing box All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer 210 Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN DIGHELIC INSTALLATION gt The Digihelic is labeled indicating all physical connections Match the colored wire to the color written on the label Rear view of Digihelic Connect each wire to the designated terminal point gt Connect the 5 32 tubing from the down flow exhaust to the low pressure input port gt Leave the high pressure input port open to atmosphere All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer en Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN DIGIHELIC DIFFERENTIAL PRESSURE SENSOR STATES A indicates the exhaust flow is lower than the minimum set point Low set point is set to 0 50 No A or B indicates the exhaust flow is b
13. ication is established a data stream will appear in the lower From Spin Processor data window m hope Your computer should now be set up to interface with Laurell Technologies Spin 3000 software If you experience difficulties support is available from the factory at support laurell com All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer _ 20 Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN SPIN 3000 SOFTWARE INSTALLATION INSTRUCTIONS Note To minimize potential installation problems please follow these best practices installation instructions for this or any software p lt Close all currently running applications Disable any running anti virus software Complete software installation as per following instructions Re enable anti virus software Restart the system amp run application on subsequent startup NN NM BB OG Note Refer to sections 1 and 2 in the Spin 3000 Operation Manual for additional information All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer Dje Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN STARTUP ERRO
14. pin 3000 Software Spin 3000 communication cable Bull s Eye Level Vv YYYY WV VY V WV gt Documentation CD with Spin 3000 Software Please Note The documentation CD contains all operation manuals quick start installation instructions programming worksheets spin 3000 software and a list of popular options If an option was ordered such as an Alignment Tool Foot Switch Liner Universal Dispense UD2 Downflow Exhaust Manual EBR Porous Chuck Use Guidelines Programmable Exhaust etc please check this folder for your option s All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer En Laurell Technologies Quick Start WS 650 Series REAR VIEW 08 2012 10070193 revN Drain Port Backpack Connector Cover for Future Valve Expansion Power Cord Plug Cord into the appropriate power source SEE SECTION 2 IN MANUAL FOR COMPLETE INSTALLATION INSTRUCTIONS Spin 3000 Cable Connector Pneumatic Vacuum Valve and Connection Circuit Breaker with On Off Capability All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer oo Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN
15. pter is unplugged from your system until after you have installed the drivers D Keyspan CD Browser KEYSPAN USA 19HS Install Software Step 1 Important Disconnect your Keyspan adapter BEFORE you install this softwere Step 2 Once you have disconnected the adapter click on one of the choices below to install your Keyspan adapter softwere This will start the Keyspan installer Follow the installer s on screen instructions to complete the installation Note Windovs 98 98SE and Me drivers are found on Keyspan s website 6 Follow the default instructions to install the drivers on your computer yspan USB Serial Adapter USAIOH Keyspan USB Serial Adapter USA19H Setup License Agreement Please read the following license agreement carefully Scroll down to read the entire agreement Keyspan License Agreement a n successfully on Windows 2000 or Windows XP you must have j This Agreement constitutes a legal agreement between you the end user and Keyspan a division of InnoSys Incorporated Keyspan You should carefully read the following terms and conditions before installing this software INSTALLING THE SOFTWARE INDICATES YOUR ACCEPTANCE OF THESE TERMS AND CONDITIONS J Administrator privileges Close All Other Windows IF you are upgrading a previous version of the USB Serial Adapter software close all other windows X ie oceeding 1 Grant of License Keyspan grants to you the right to use t
16. revN NEVER DO THIS gt For extended use clean rinse then dry your spin processor after each use taking care to prevent any chemicals from entering the vacuum path Do not fill up or overflow the process chamber or bowl fluids must not be permitted to flow under the substrate If the chuck face shows signs of chemical residue remove and clean immediately Cleaning the o ring surface will improve the seal See Section 4 in manual VACUUM CHUCK WET TEST Examine and adjust your process to prevent such occurrences gt Do not at any time force fluids or pressuring gas in the center of the vacuum chuck Cleaning the vacuum path in this manner is dangerous and can cause significant damage to your spin processor All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer 94
17. uctions Disable any anti virus software you may have running 2 Insert amp browse to the Driver Installation CD on your computer Launch the driver installation main menu if not automatically started launch exe Ss E o l Sorex ne Wy Organize 22 Views Burnto disc Ome Favorite LL Name Size Type Date modified __ Location p p J Setup m UserManual E D 19hs_cdBrowser_37s dbd E P ar405eng exe M autorun inf i demo32 exe Folders desktop ini IE sia gdiplus dll J P Ls Launch exe Mic amp Launch ini g Other Keyspan Products pdf revUSAI9Hibt _ ww 4 Click Install Software B Keyspan CD Browser KEYSPAN USA 19HS Main Menu Click the buttons below to install your Keyspan software or read the Keyspan User Manual Keyspan s documentation is in PDF format To read the Keyspan documentation you need Acrobat Reader You can dovmload a free copy of Acrobat Reader from Adobe s website vww adobe com Visit Our Website Copyright Keyspan All information contained in this manual is the property of Laurell Technologies Corporation and is NOT to be edited reproduced or distributed without express written permission from a corporate officer _18 Laurell Technologies Quick Start WS 650 Series 08 2012 10070193 revN 5 Click the button that launches the installer that matches your computer s operating system Ensure that the USB Serial ada
Download Pdf Manuals
Related Search