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XPS-Q8 - XPSDocumentation

1. 2 O leta We 0 A E m mehunesus M amp k 5 CN Newport NO Experience Salvin 129 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial An event is entirely composed of Actor Category Event Name Parameter1 Parameter2 Parameter3 Parameter4 Not all event names have a preceding actor and category but all events have four parameters even though some parameters are not needed For these parameters it 1s still required to use zero 0 as default To define an Event use the function EventExtendedConfigurationTriggerSet Examples EventExtendedConfigurationTriggerSet MyGroup MyPositioner SGamma MotionStart 0 0 0 0 In this case the actor is a positioner MyGroup MyPositioner and the event has a category The event happens when the next motion with the SGamma profiler on the positioner MyGroup MyPositioner starts After the motion has started the event is removed EventExtendedConfigurationTriggerSet MyGroup X YLineArc ElementNumberStart 5 0 0 0 In this case the actor is a group MyGroup and the event has a category The event happens when the trajectory element number 5 on the next LineArc trajectory on this group Starts EventExtendedConfigurationTriggerSet GPIO2 ADC2 ADCHighLimit 3 0 0 0 In this case the actor is a GPIO name GPIO2 ADC2 and the event has no category The event happens
2. sssssssssssseseeeeeeeeeee nennen eene nennen 213 24 2 Three phase AC brushless driver XPS DRV02 ssssssseeeeeeeenneeene nennen 214 243 ADC Motor Driver XPS DRV UJ ios hataveie tatis U br ou uES RE uude den a otn IURE PUER ND P NRI PARE TUUM UNE 215 24 4 Pass Through Board Connector 25 Pin D Sub XPS DRV00 sss 215 25 0 Appendix G Analog Encoder Connector 216 26 0 Appendix H Trigger IN Connector ee eee eere eene 217 d osdiedidigiM rm M 219 CY Newport ix XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Universal High Performance Motion Controller Driver Warranty Newport Corporation warrants that this product will be free from defects in material and workmanship and will comply with Newport s published specifications at the time of sale for a period of one year from date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s option To exercise this warranty write or call your local Newport office or representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the product freight prepaid to the indicated service facility Repairs will be made and the instrument returned freight prepaid Repaired products are warranted for th
3. Subnet mask SER 255 255 oO Default gateway Use the following ONS server addresses Preferred ONS server Alternate DNS server 5 Click OK NOTE The last number of the IP address must be set to any number between 2 to 253 100 in this example NOTE When configuring the controller to be on the network the settings for the PC s Ethernet card must be set back to default which is Obtain an IP address automatically Once the Ethernet card address is set you are ready to connect to the XPS controller Following is the procedure for connecting to the controller 6 Open Internet Browser and connect to http 192 168 254 254 Login Name Administrator Password Administrator Please see the picture below Rights Administrator NOTE Please note that the login text is case sensitive QW Newport Experiences Solutiom 25 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller User s Manual GO Newport Experience Solutions XPS Q8 Motion Controller Give your name password and status to log on Name Administrator Password 995005090095 Rights Once you are logged in you can change the IP configuration by following the steps described in section 3 5 4 or 3 5 5 depending on your configuration NOTE If you want to reset the IP address to the default factory setting follow the section 3 5 4 to set the IP address back to 192 168 0 254 3 6
4. INTRANET or INTERNET ETHERNET Figure 10 Ethernet Configuration 2 7 1 Communication Protocols The Ethernet connection provides a local area network through which information is transferred in units known as packets Communication protocols are necessary to dictate how these packets are sent and received The XPS Controller Driver supports the industry standard protocol TCP IP TCP IP is a connection protocol and in this protocol the master must be connected to the slave in order to begin communication Each packet sent is acknowledged when received If no acknowledgment is received the information is assumed lost and is resent 11 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller User s Manual 2 7 2 Addressing There are two levels of addresses that define Ethernet devices The first is the MAC address This is a unique and permanent 6 byte number No other device will have the same MAC address The second level of addressing is the IP address This is a 32 bit or 4 byte number The IP address is constrained by each local network and must be assigned locally Assigning an IP address to the controller can be done in a number of ways see section 3 5 Connecting to the XPS 2 8 Sockets Multitasking and Multi user Applications Based on the TCP IP Internet communication protocol the XPS controller has a high number of virtual communication ports known as sockets To establish comm
5. Enperenes Solutions xi XPSDocumentation V1 4 x EDH0301En1050 08 15 Preface Universal High Performance Motion Controller Driver Confidentiality amp Proprietary Rights Reservation of Title The Newport Programs and all materials furnished or produced in connection with them Related Materials contain trade secrets of Newport and are for use only in the manner expressly permitted Newport claims and reserves all rights and benefits afforded under law in the Programs provided by Newport Corporation Newport shall retain full ownership of Intellectual Property Rights in and to all development process align or assembly technologies developed and other derivative work that may be developed by Newport Customer shall not challenge or cause any third party to challenge the rights of Newport Preservation of Secrecy and Confidentiality and Restrictions to Access Customer shall protect the Newport Programs and Related Materials as trade secrets of Newport and shall devote its best efforts to ensure that all its personnel protect the Newport Programs as trade secrets of Newport Corporation Customer shall not at any time disclose Newport s trade secrets to any other person firm organization or employee that does not need consistent with Customer s right of use hereunder to obtain access to the Newport Programs and Related Materials These restrictions shall not apply to information 1 generally known to the public or obta
6. Example The following shows an example of a positioner mapping data file PosMapping txt 0 00125 0 00112 0 00137 0 00000 0 00140 0 00145 0 00154 Define the positioner mapping in the stages ini file Backlash Backlash 0 unit Positioner mapping PositionerMappingFileName PosMapping txt PositionerMappingLineNumber 7 PositionerMappingMaxPositionError 0 00154 Travels MinimumTargetPosition 3 unit HomePreset 0 unit MaximumTargetPosition 3 unit NOTE These travel limits must be equal to or be within the positioner s limit positions of the mapping file 3 and 3 in the above example Use of the functions e GroupInitialize MyGroup e GroupHomeSearch MyGroup e GroupMoveAbsolute MyGroup Positioner 0 25 The mapping file must at least cover the minimum and the maximum travel of the positioner It must cover MinimumTargetPosition and MaximumTargetPosition parameters defined in the stages ini section Travels In the example above the travel of the positioner can not be larger than 3 units but it can be smaller than this The units for the data are the same as defined by EncoderResolution in the stages ini The data reads as follows the corrected position at position 3 00 units is 2 99846 units 3 00 0 00154 Between two data points the XPS controller performs a linear interpolation of the error The corrected position at position 0 25 units 1s 0 24965 units 0 25 0 0
7. QS Newport Experencs Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 206 XPS Q8 Controller Appendix 20 1 2 Digital Outputs Parameter Low Level Output Voltage High Level Output Voltage Input Current LOW Input Current HIGH Digital Output Figure 64 Open Collector Digital Output GPIOn outputs n 1 to 4 can be accessed via the GPIODigitalSet GPIOn DO function 20 2 Digital Encoder Inputs Driver Boards amp DRV00 All digital encoder inputs are RS 422 standard compliant e All digital encoder signals are not isolated but are referenced to the electrical ground GND e Encoder signals must be differential pairs using 26LS31 or MC3487 line driver type circuits Encoder inputs have a terminating impedance of 120 Q e Inputs are always routed on differential pairs For a high level of signal integrity we recommend using shielded twisted pairs of wires for each differential signal e Encoder power supply is 5 V 250 mA maximum referenced to the electrical ground and is sourced directly by the driver boards 20 3 Digital Servitudes Driver Boards DRV00 amp Analog Encoders Connectors All servitude inputs are TTL compatible e All servitude inputs are not isolated but are referenced to the electrical ground GND e Input levels must be between 0 V and 5 V All servitude inputs are refreshed synchronously with the XPS control loop 8 kHz All servitude inputs are identica
8. e Simulates the trajectory to determine the positioner s travel requirements in negative and positive directions and the maximum allowed speed and acceleration for each positioner This function determines whether the trajectory is executable e fall is OK it returns an OK 0 Otherwise it returns a corresponding error An error for instance is reported if one of the positioner s speed or acceleration reached during the trajectory exceeds the maximum allowed speed or acceleration The function MultipleAxesPV TVerificationResultGet can be executed only after a MultipleAxesPVT Verification It returns the trajectory limits for each positioner which are the travel requirements in positive and negative directions the achieved maximum speed and acceleration To execute a PVT trajectory send the function MultipleAxesPV TExecution while specifying the file name and the number of cycles This function does not verify the trajectory s coherence or geometric conditions exceeding any positioner s min or max travel speed or acceleration before execution so users must be careful when executing a trajectory without verifying the trajectory first In case of an error during execution because of bad data or because of a following error the motion group will make an emergency stop and will go to the disabled state Finally the function MultipleAxesPVTParametersGet returns the trajectory name and the number of the trajectory eleme
9. e The Corrector PIPosition is used when a constant voltage applied to a driver results in a constant position of the positioner stepper motor piezo electrostrictive etc e Corrector PIDFFVelocity is used when a constant voltage applied to a driver results in a constant speed of the positioner DC motor and driver board in speed loop mode e Corrector PIDFFAcceleration is used when a constant voltage applied to a driver results in a constant acceleration of the positioner DC motor and driver board in current loop mode e Corrector PIDDualFFVoltage is used when a constant voltage applied to a driver results in a constant voltage applied to the motor DC motor and driver board with direct PWM command 14 1 2 XPS PIDFF Architecture Corrector loops PIDFFVelocity PIDFFAcceleration and PIDFFDualVoltage all use the same architecture as the PID corrector that is detailed below PIPosition is a simplified version of this loop that is used to provide closed loop positioning via encoder feedback to stepper motor positioners GO Newport NO Experiences Saulia 173 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial 14 1 2 1 PID Corrector Architecture The PID corrector uses the following error SetpointPosition EncoderPosition as its input and applies the sum of three correction terms Kp Kd and K1 to determine the output SetPoint Position A Encoder Position
10. 20 1 Digital I Os All GPIO Inhibit and Trigger In and PCO Connectors All digital I Os are TTL compatible e All digital I Os are not isolated but are referenced to electrical ground GND e Input levels must be between 0 V and 5 V e Output levels should be at least 5 V up to 30 V absolute maximum rating with open collector outputs e Outputs must be pulled up to the user s external power supply 5 V to 24 V This external power supply must be referenced to the XPS ground GND All digital I Os are refreshed asynchronously on user requests Therefore digital inputs or outputs have no refresh rate Typical delay is 100us due to the clock cycle and priorities made to other functions All digital inputs are identical except for GPIO3 inhibition input described with GPIO3 All digital inputs are in negative logic and have internal 5 V pull up resistors 20 1 1 Digital Inputs Parameter Symbol Min Max Units Low Level Input Voltage Vir 0 0 8 V High Level Input Voltage Vin 1 6 5 V Input Current LOW In 2 5 mA Input Current HIGH Im 0 4 mA 2 21 k0 TALS14 100 0 TT Figure 63 Digital TTL Input Digital Input C GPIOn inputs n 1 to 4 can be accessed via the GPIODigitalGet GPIOn DI function All digital outputs are identical All digital outputs are in negative logic NPN open collector 74LS06 TTL type circuit and have no internal pull up to permit levels above 5 V
11. GPIO1 FEMALE SUB D37 POWER ON OFF LS Zu o d ry 2 SWEN E nnus e HOST Mi m DR RSS oooh ETHERNET 10 100 d Nie BASE T ACIN REMOTE oe es ETHERNET 10 100 GPIO2 BASE T FEMALE SUB D25 p 8 x NEWPORT INHIBIT INPUT 8 x POSITION STAGE DRIVER INTERFACES FEMALE SUB D15 COMPARE OUT 4 FEMALE LEMO CONNECTORS Figure 8 Rear Panel of XPS Controller Driver NOTE The Main Power ON OFF Switch is located above the inlet for the power cord The switch and the inlet must be accessible to the user 2 6 1 Axis Connectors AXIS 1 AXIS 8 Each installed axis driver card features a connector to attach a cable supplied with every Newport stage between the controller and a motion device CAUTION Carefully read the labels on the driver cards and make sure the specifications motor type voltage current etc match those of the motion devices you intend to connect Severe damage could occur if a stage is connected to the wrong driver card Experience Solutions XPSDocumentation V1 4 x EDH0301En1050 08 15 10 XPS Q8 Controller User s Manual ADR Siem HT nea rl rm Tem y a uoa Enim E i soa aja E a 67 9 6 0 1 a Nonas am ire a te ea hets tco LI Figure 9 Axis Driver Card Please see the next section for installation instructions NOTE Power Input 100 240 V 50 60 Hz 11 A 5 5 A 2 7 Ethernet Configuration ETHERNET
12. KFeedForwardVelocity Driver Board amp Stage From the encoder Figure 55 Corrector PIDFF Velocity 177 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial 14 3 1 1 14 3 1 2 XPSDocumentation V1 4 x EDH0301 En1050 08 15 178 Parameters FeedForward Method e Velocity e KFeedForwardVelocity is a gain that can be applied to this feed forward e When the system is used in open loop the PID output is not applied and the feed forward gain is set to 1 the entire output of the controller is FF gain PID corrector e Total output of the PID is a speed units s so Kp is given in 1 s Ki is given in 1 s Kd has no unit Filtering and Limitation e ScalingVelocity units s is the theoretical speed resulting from a 10 V input to the driver e VelocityLimit units s is the maximum speed that can be commanded to the driver Basics For a perfect system no friction all performance factors known no following errors a KFeedForwardVelocity value of 1 will generate the exact amount of output required to reach the TargetPosition The Kd parameter is generally redundant when using the speed loop of the driver and is usually set to zero but a higher value can be used to improve the tightness of the speed loop The proportional gain Kp drives the cut off frequency of the closed loop Due to the integration of the speed command in a position by the
13. Kom 5 qgkp 1 TargetPosition EncoderPosition KForm is Oe Low pass filter Derivative filter cut off frequency i T Saturation at KS x Limit Kl KForm TargetPosition EncoderPosition KForm Figure 52 PID Corrector Architecture 14 1 2 2 Proportional Term The Kp or proportional gain multiplies the current following error of that servo cycle by the proportional gain value Kp The effect is to react immediately to the following error and attempt to correct it Changes in position generally occur during commanded acceleration deceleration and in moves where velocity changes occur in the system dynamics during motion As Kp is increased the PID corrector will respond with a increased output and the error is more quickly corrected For instance if a positioner or group of positioners is expected to have small following errors as is the case for small moves where overcoming static friction of the system is predominant then the Kp may need to be increased to produce sufficient output to the driver For larger moves the following errors are generally larger and require lower Kp values to produce the desired output Also note that for larger moves the kinetic friction of the system is generally GO Newport Experiences Solution XPSDocumentation V1 4 x EDH0301 En1050 08 15 174 XPS Q8 Controller Motion Tutorial 14 1 2 3 14 1 2 4 QW Newport Experiences Salv
14. The Parameter has a sign if it is assigned as velocity floating point This means that the direction of motion is dictated by the sign of the velocity parameter QW Newport Experiences Saulia 79 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial 7 3 2 Moves of Certain Displacements These two move commands which don t use the same parameters are explained below e MoveRelative The action MoveRelative commands a relative move of a positioner similar to the function GroupMoveRelative However the function GroupMoveRelative is not available in the Referencing state The relative move is specified by a positive or negative displacement The move is done with the SGamma profiler The speed and acceleration are the default values or the last value defined by either a move on sensor event a MoveToPreviouslyLatchedPosition or a PositionerSGammaParametersSet e MoveToPreviouslyLatchedPosition This action moves the positioner to the last latched position see section 7 3 1 Move on sensor events for details It verifies there was a position latched since this last GroupReferencingStart call This is important because an old latched position can still be in memory from a previous home search or referencing And moving to this previous latched position could have unexpected results The move is done with the SGamma profiler The speed is specified by a parameter The acceleration is the de
15. 0 char plPAddress 15 192 168 33 236 int nPort 5001 double dTimeOut 60 int SocketID 1 I TCP IP connection SocketID TCP ConnectToServer plPAddress nPort dTimeOut if SocketlD 1 sprintf buffer Connection to s port ld failed n plPAddress nPort AfxMessageBox buffer MB_ICONSTOP else AfxMessageBox Connected to target MB ICONINFORMATION Get controller version FirmwareVersionGet SocketID buffer Get controller version AfxMessageBox buffer MB ICONINFORMATION TCP IP disconnection TCP CloseSocket SocketlD Close Socket AfxMessageBox Disconnected from target MB ICONINFORMATION j QW Newport Experience Solutio XPS Q8 Controller Motion Tutorial TO 18 4 Experiences Solutio Ex1 _ YersionGet i Connected to target This example opens a TCP connection gets the firmware version of the XPS controller and closes the connection The execution is displayed in message boxes To learn more about the DLL prototypes refer to the Programmer s Manual accessible from the web site interface of the XPS controller The Software drivers manual also accessible from the XPS web site interface provides further information about the use of the DLL and additional C programming examples Running Processes in Parallel TCP provides a reliable point to point communication channel that client ser
16. Universal High Performance Motion Controller Driver a Newport Motion Controller Driver Model yps User s Manual CN software Tools and Newport pco Experience Solutions Precision Motion Guaranteed XPS Q8 Universal High Performance Motion Controller Driver QW Newport Experience Salam XPSDocumentation V1 4 x EDH0301En1050 08 15 ii XPS Q8 Universal High Performance Motion Controller Driver Table of Contents S102 11 an a ee A 1X EU Declaration of Conformity ocicccsseccceedsacctecvrnsciecesnchieeaaciiecdsacttnertactecssacdteeiacwectsactixarte X je AC SRI an adie oe saci t Xl Confidentiality amp Proprietary Rights eeeesseesesesesseeeeeernes Xi Sales Tech Support amp Service sesssssesseeeese eese senes Xi Service Information seeesseeeeeeee eee he eene eene he sen ennt tees s erre eterne xii Newport Corporation RMA Procedures seen xii POCO a E A TIAA E eria xii LO iie soeces E 1 La eU 1 L2 Dennitionsand Symbole erraren ainei ra ainena EEr EEEE EEEE EEA ES MER REEE Re EEn 3 1 2 1 General Warning or Caution eene 3 L22 WESC CA S HOC eose niorPatess end dust a oiu MAUS Ub aPUQUM IURE Op AE 3 1 2 3 European Union CE Mark sse eene eene eene enne 3 2 E EE uM c 3 12 3 OPE 1 11010 oes deer en eee on ne cee e
17. the analog output is only updated once and keep this value until it is changed Action Parameter 1 Positioner Name This parameter defines the name of the positioner in which the SetpointAcceleration is used to output in the analog output Action Parameter 2 Gain The SetpointAcceleration is multiplied by the gain value For example if the gain is set to 10 and the corrected SetpointAcceleration is 1 mm s then the output voltage will be 10 V Action Parameter 3 Offset The offset value is used to correct for any voltage that may initially be present in the Analog output Analog output SetpointAcceleration value gain offset Action parameter 4 This parameter is 0 by default NOTE The gain can be any constant value used to scale the output voltage and the offset value can be any constant value used to correct for any offset voltage in the analog output ExecuteTCLScript This action executes a TCL script on an event Action Parameter 1 TCL File Name This parameter defines the file name of the TCL program Action Parameter 2 TCL Task Name Since several TCL scripts can run simultaneously different or even the same the TCL Task Name is used to track individual TCL programs For example the TCL Task Name stops a particular program without stopping all other TCL programs that are running simultaneously Action Parameter 3 TCL Argument List The Argument list is used to run the TCL scripts with
18. 6 T 8 9 Figure 71 XPS DRV01 Motor Driver Connectors Motor This output must be connected to the positive lead of the DC motor The voltage seen at this pin is pulse width modulated with maximum amplitude of 48 V DC Motor This output must be connected to the negative lead of the DC motor The voltage seen at this pin is pulse width modulated with maximum amplitude of 48 V DC Phi This output must be connected to Winding A lead of a two phase stepper motor The voltage seen at this pin is pulse width modulated with maximum amplitude of 48 V DC Ph2 This output must be connected to Winding A lead of a two phase stepper motor The voltage seen at this pin is pulse width modulated with maximum amplitude of 48 V DC Ph3 This output must be connected to Winding B lead of a two phase stepper motor The voltage seen at this pin is pulse width modulated with maximum amplitude of 48 V DC Ph4 This output must be connected to Winding B lead of a two phase stepper motor The voltage seen at this pin is pulse width modulated with maximum amplitude of 48 V DC Common 3 amp 4 This output must be connected to the center tab of Winding B ofa two phase stepper motor The voltage seen at this pin is pulse width modulated with maximum amplitude of 48 V DC Common 1 amp 2 This output must be connected to the center tab of Winding A ofa two phase stepper motor The voltage seen at this pin is pulse width modulated with maximum amplitude
19. Appendix 19 0 Appendix A Hardware 19 1 Controller 4 SLOTS 0 28 7 0 EE bu iE 1 48 MIN 18 2 MAX 18 6 37 7 MIN 463 MAX 473 Weight 16 kg 32 Ib Input voltage 100 240 VAC Input current 11 A 115 V 5 5 A 230 V Frequency 60 50 Hz QW Newport XPSDocumentation V1 4 x EDH0301 En1050 08 15 204 Fruit XPS QS Controller Appendix 19 2 Rear Panel Connectors RATING AC AY CAUTION PN ATTENTIOM 100 240Vac ft E ata electric shock do rot lr aloe aa 60 50HZ No user serviceable parts inside Toute intervention b l int rieur doit Bre 114 17 15V Refer to qualified service personnel effectude par un technicien qualifi _ 5 5A 230V i ENCODERI ENCODER i P ENCODER ha ENCODERS DRIVER 8 DRIVER 7 DRIVER amp DRIVER 5 DRIVER 4 DRIVER 3 DRIVER 2 19 3 Environmental Requirements Temperature range storage 20 to 80 C Operating 5 to 35 C Relative Humidity Non condensing Storage 10 to 95 RH Operating 10 to 85 RH Altitude Storage To 10 000 ft Operating To 5 000 ft Experiences Solutiom 205 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Appendix 20 0 Appendix B General I O Description This paragraph briefly describes all XPS signal types A description of each XPS connector interface is detailed in further paragraphs
20. Auto configuration Manual configuration Error file display System manual configuration Boot script file name M Boot script Moo arguments Valid Single Axis s Add Spindle Isp Add XY MyXYGroup Add XYZ xvz Add Multiple M Add CAUTION Generating new configuration files will delete your current configuration Once configuration files will be generated the controller will reboot You need to close your browser wait a few seconds to let the controller to take in account the new configuration Clear all InterlockedGroups SingleAxisInUse Single SingleAxisWithClampingInUse CLAMPING SingleAxisThetaInUse THETA SpindleInUse SPIN XYInUse XY TZInUse TZ MultipleAxesInUse MULTI MULTI PositionerInUse M1 M2 M3 AD Newport S Spectra Physics Solutions to Make Manage and Measure Light tiperexce Soutora Lin 9 Enter a group name For example if you are setting up two ILS stages you can set them up as two Single Axis groups one XY group or one or two MulipleAxis groups Any group name can be given In the example the name of the XY group is MyXY Group 10 Click on ADD to get to the next screen QW Newport XPSDocumentation V1 4 x EDH0301 En1050 08 15 32 Experience Solutions XPS QS Controller User s Manual SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TEI GO Newport Auto configuration Manual configu System Build X
21. Each line of this file represents one element of the trajectory A line contains several data separated by a comma The number of data in each line depends on the number of positioners in the MultipleAxes group The first data in each line is the duration of the element The following data is grouped in pairs of two representing the displacement and the output velocity for each positioner of the group So the line format is as follows Data 1 Element duration seconds Data 2 lstpositioner s displacement units Data 3 lstpositioner s output velocity units s Data 4 2nd positioner s displacement units Data 5 2nd positioner s output velocity units s And so on NOTE The first positioner is always the first defined in the system ini of the MultipleAxes group see ActuatorInUse the second positioner is always defined as second and 0 On QS Newport XPSDocumentation V1 4 x EDH0301 En1050 08 15 104 powimo Sunt XPS Q8 Controller Motion Tutorial 8 3 7 Trajectory File Example Following is an example of a PVT trajectory defined in a MultipleAxes group that contains two positioners The tabs are added for better readability and are ignored in a line 0 4167 0 2 9167 0 7 0833 0 9 5833 0 10 0 4167 10 2 9167 10 7 0833 10 9 5833 9 5833 10 7 0833 10 2 91667 10 0 41667 10 9 5833 7 0833 2 91667 1 25 0 41667 0 L3 C OO DO O 0D ID DO ox
22. For functions with dynamic arguments ADD and REMOVE buttons are available Alternatively you can use a as a separator between different arguments XPSDocumentation V1 4 x EDH0301En1050 08 15 56 Experience Soon XPS Q8 Controller Software Tools SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS Cw Rievvport DOCUMENTATIO Function list Function argument s GroupMoveAbsolute Do an absolute move GroupHomeSearch GrouplInitializeNoEncoderReset char GroupName 250 OK Groupinitialize Group2 Edit GrouplInitializeWithEncoderCalibration P Cancel GroupJogCurrentGet double TargetPosition Add 20 GroupJogModeDisable GroupJoqModeEnable GroupJogParamoetersGet GroupJogParametersSet KCN GroupkKill GroupMotlonDisable GroupMotionEnable GroupMotionStatusGet GroupMoveAbort GroupMoveRelative GroupPositionCorrectedProfilerGet GroupPositionCurrentGet GroupPositionPCORawEncoderGet GroupPositionSetpointGet NOTE Some commands can take a long time to execute so if you ve got a blank screen or a HTTP 404 error check your web dient time out Command history list pm CO Newport spectra Physics Clear History TCL Generator Gathering Display External Gathering Display Solutions to Make Manage and Measure Light For some arguments like ExtendedEventName ExtendedActionName or GatheringType the argument name is not dire
23. GatheringConfigurationGet GatheringCurrentNumberGet GatheringDataGet GatheringDataMultipleLinesGet GatheringStop GatheringRunAppend See the Programmer s Manual for details about these functions NOTE When using the function GatheringConfigurationSet from the terminal screen of the XPS utility the syntax for one parameter is not directly accessible For instance for the parameter XY X SetpointPosition first select XY X from the choice list Then click on the choice field again and select SetpointPosition See also screen shots on the next page For specifying more than one data type use the ADD button Select the next parameter as described above Step 2 Click in the choice field again Select parameter name and click Step 3 To add another parameter press ADD Repeat steps 1 and 2 Function argument s GatheringConfigurationSet Configuration acquisition char Type 25 1 Fi Function argument s GatheringConfiguration r Configuration acquisition char Type 251 XY X s Edit XY X SetpointPosition wv Edit XY X char Type 251 R URSEi100 i XY X w Edit XY CurrentPosition FollowingError Setpoint Velocty Setpoint cceleration CurrentVelocity CurrentAcceleration CorrectorOutpu GPIO D1 GPIOT DI GPIO1 DO GPIO1 DO GPIO2 DI GPIO2 DI GPIO3 DI GPIO3 DI PIOS DO 103 00 Example 1 Using the terminal screen of the XPS utility this example shows the sequence of functions to accom
24. Otherwise it returns a corresponding error The function XY ZSplineVerificationResultGet can be executed only after an XY ZSplineVerification and returns the following e Travel requirement in the positive and negative directions for each positioner e The maximum possible trajectory velocity speed that is compatible with all positioners velocity parameters It returns a value for the trajectory velocity that when applied at least one of the positioners will reach its maximum allowed speed at least once along the trajectory So th i MiniVmax actuator and volocity sitionerMaximum Velocity However this value does not take into account that the positioners acceleration can limit the trajectory velocity This is the case with splines that contain sharp curved segments e The maximum trajectory acceleration that is compatible with all positioner parameters At this trajectory acceleration one of the positioners will reach its maximum allowed acceleration during trajectory execution The function XY ZSplineV erificationResultGet returns the trajectory execution limits that have previously been calculated by the XYZSplineVerification function Note on this function s response Only the returned travel requirements are specific for each positioner the returned velocity acceleration values are the same for all positioners because they represent the trajectory s velocity acceleration To execute a spline trajectory send th
25. Password Anonymous The predefined Administrator has the log in name Administrator Password Administrator Both the log in name and the password are case sensitive C y7 7 m 4 OO E http 192 168 33 233 Fa 9 gt lt p Favoris 33 Galerie de composants v Ei Bdn gt Smet amp XPS Q8 Motion Controller Identification Newport Experience Solutions XPS Q8 Motion Controller Give your name password and status to log on Name Administrator Password 999090900000000 Rights C User i Administrator I XPSDocumentation V1 4 x EDH0301 En1050 08 15 36 XPS Q8 Controller Software Tools The main tab is displayed across the top of the XPS Motion Controller Driver main program window and lists each primary interface option Each interface option has its own pull down menu that allows the user to select various options by clicking the mouse s left button On the following pages a brief description of all available tools is provided Administrator Menus SYSTEM STAGE CONTROLLER CONFIGURATION FRONTPANEL TERMINAL TUNING FUNCTIONAL TESTS DOCUMENTATION GO Newport Sub Menu for CONTROLLER CONFIGURATION SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS DOCUMENTATION GO Newport IP management Usersmanagement General Restricted set of User Menus GO Newport FRONT PANEL TERMINAL FUNCTIONAL TESTS DOCUMENTATION Vagal aban
26. SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS DOCUMENT ATIC 2 Rievuport Function list Command APT to execute GroupHomeSearch GroupinitializeMaEncaderReset Groupinitializae GrouplnibializeWithEncoderCalibration GroupJogcurrentaet GrouploghodeDisable GrouplogModeEnable se CGroupdlogParamasterscet GrouplogParametersset RSS c reupkill iGroupMotionDisable GrouphotisonEnable GroupMotianStatustet GreupMevaAbort Received message GroupMgoveBelative Croupiasitiancaorrnectedirofilertcoet GroupPositioncurrentGat GreupPosirianPCORawEncoderiaet GroupPositionSetpontGet m MOTE Sore commande can take a Long time to execute amp If you ve gat Wank screen or HTTP 304 error check your web cient tire gut Command history lst Clear History TCL Generator Gathering Display External Gathering Display CS Mevvport S apectra Priysics Solehona io Make Manage and Measure Lighi larru ian fr The functions are listed in alphabetical order Only those functions that are listed are available from the current system configuration For example if the system consists only of SingleAxis groups no group specific functions for Spindles XY groups XYZ groups or MultipleAxis groups will be listed GO Newport XPSDocumentation V 1 4 x EDH0301En1050 08 15 58 Experience Soon XPS Q8 Controller Software Tools 4 21 TUNING Auto Scaling Auto scalin
27. The max resolution of the distance spaced pulses is 20 nm setting PositionerHardInterpolatorFactorSet 200 If the goal is to get pulses at a nominal distance of 268 nm at a speed of 200 mm s speed this is not possible using the distance spaced pulse configuration Either 260 nm or 280 nm are possible but not 268 nm With some minor adjustments to the target speed however this is possible using the time spaced pulse configuration e The target speed is 200 mm s the desired distance between successive pulses is 268 nm So the nominal time interval between successive pulses 1s 268 nm 200 mm s 1 340 us e Round this nominal value to the next possible time interval means to the next integer multiple of 25 ns 1 350 us Use this rounded time interval to calculate a corrected velocity 268 nm 1 350 us 198 51852 mm s GroupMoveAbsolute MyStage X 50 PositionerSGammaParametersSet MyStage X 198 51852 2500 0 02 0 02 PositionerTimeFlasherSet MyStage X 30 30 0 00000135 Positioner TimeFlasherEnable MyStage X GroupMoveAbsolute MyStage X PositionerTimeFlasherDisable MyStage X In this example a first pulse 1s generated when the stage crosses the position 30 mm Further pulses are generated every 1 350 us until the stage reaches the maximum position of 30 mm Since the stage moves at a speed of 198 51852 mm s the nominal distance between successive pulses is 198 51852 mm s 1 35 us 268 nm 13 3 5 AquadB Signals on PCO
28. When sent AquadB signals are generated always To disable this mode use the function PositionerPositionCompareDisable The function PositonerPositonCompareAquadB WindowedSet has three input parameters Positioner name Minimum Position Maximum Position To enable the AquadB signals the function PositionerPositionCompareEnable must be sent Example GrouplInitialize MyStage GroupHomeSearch MyStage PositionerPositionCompareAquadBWindowedSet MyStage X 10 20 PositonerPositionCompareEnable MyStage X PositionerPositionCompareGet MyStage amp MinimumPosition amp MaximumPosition amp EnableState This function returns the parameters previously defined the minimum position 10 the maximum position 20 and the enabled state 1 enabled 0 disabled GroupMoveAbsolute MyStage 30 PositionerPositionCompareDisable MyStage X The figure below shows a screen shots from an oscilloscope for the example above CH1s5V gt e20ms div NORM 2kS s DT 32 8ms The group has to be in a READY state for the position compare to be enabled Also the PositionerPositionCompareAquadB WindowedSet function must be completed before the PositionerPositionCompareEnable function In this example AquadB signals are generated when the positioner is between the minimum position of 10 mm and the maximum position of 20 mm Experience Solutio 169 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Moti
29. and operate damaged equipment 3 3 Packing List Included with each XPS controller are the following items e User s Manual and Motion Tutorial e XPS controller e Cross over cable gray 3 meters e Straight through cable black 5 meters e Power cord e Rack mount ears and handles If there are missing hardware or have questions about the hardware that were received please contact Newport CAUTION Before operating the XPS controller please read chapter 1 0 very carefully 3 4 System Setup This section guides the user through the proper set up of the motion control system If not already done carefully unpack and visually inspect the controller and stages for any damage Place all components on a flat and clean surface CAUTION No cables should be connected to the controller at this point First the controller must be configured properly before stages can be connected QS Newport Experience Salvin XPSDocumentation V1 4 x EDH0301En1050 08 15 14 XPS Q8 Controller User s Manual 3 4 Installing Driver cards Figure 11 Installing Driver cards Due to the high power of the XPS controller 300 W for the CPU and 500 W for the drives ventilation is very important To ensure a good level of heat dissipation the following rules must be followed 1 It is strictly forbidden to use the XPS controller without the cover properly mounted on the chassis Driver boards must be in
30. not used 4 Blue not used 5 Blue White not used 5 Blue White not used B Green 6 Orange 7 Brown White not used 7 Brown White not used 8 Brown not used 8 Brown not used Figure 13 Ethernet Cross Over Cables QW Newport Experience Solution XPSDocumentation V1 4 x EDH0301En1050 08 15 16 XPS Q8 Controller User s Manual 3 5 3 Direct Connection to the XPS Controller For a direct connection between a PC and the XPS controller you need to use the crossover cable and the HOST or REMOTE connector at the back of the XPS Figure 14 Direct Connection to the XPS using cross over cable First the IP address on the PC s Ethernet card has to be set to match the default factory XPS s IP address 192 168 0 254 for the HOST connector or 192 168 254 254 for the REMOTE connector Following is the procedure to set the Ethernet card address This procedure is for the Windows XP operating system almost similar process forWindow 7 1 Start Button gt Control Panel gt Network Connections Network and Sharing Center gt Change adapter settings 2 Right Click on Local Area Connection Icon and select Properties Local Area Connection 4 Properties PIK Connect using EE 3Com 3C305TX based Ethemet Adapter Generne This connection uses the Following Items jel Client For Microsoft Networks m File and Printer Sharing for Microsoft Networks Internet Protocol TCP IP
31. the below table except MotionDone refer to the motion profiler of the XPS controller The motion profiler runs at a frequency of 2 5 kHz or every 400 us Thus events triggered by the motion profiler have a resolution of 400 us Consequently events with duration such as MotionState will trigger an action every 400 us All motion related events except MotionDone have a category such as Sgamma or Jog This category refers to the motion profiler Here SGamma refers to the profiler used with the function GroupMoveRelative and GroupMoveAbsolute and Jog refers to the profiler used in the Jogging state The other event categories refer to trajectories The separator between the category the actor and the event name is a dot Category Group GPIO SGamma XYLineArc PVT 1 2 3 4 Positioner TimerX Jog Spline O mem OO mE X E me 00 Dem Mix Dew mmWixpEe C ona cd 3 e Guida 1 Caiman a ConsuaDeedeninind mmm 1 mme 4 n O 4 imeem m m pw E 4 Bmw Huet 8 0 Mme 0000 78 1 3R sm meh 4 1 Stemi 3 E manm iin mme Mm ees
32. there are four parameters to specify e PositionerName is the name of the positioner on which this function is executed e Action is the type of action that is executed There are eight actions that can be distinguished into three categories Moves that stop on a sensor event moves of certain displacement and position counter reset categories e Sensor is the sensor used for those actions that stop on a sensor event It can be MechanicalZero MinusEndOfRun or None e Parameter is either a position or velocity value and provides further input to the function QS Newport Esperance Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 78 XPS Q8 Controller Motion Tutorial The following table summarizes all possible configurations Sensor Parameter Action MechanicalZero MinusEndOfRun None Position Velocity LatchOnLowToHighTransition LatchOnHighToLowTransition LatchOnIndex LatchOnIndexAfterSensorHighToLowTransition SetPosition SetPositionToHomePreset MoveToPreviouslyLatchedPosition MoveRelative 7 3 1 Move on sensor events The move on sensor events starts a motion at a defined velocity latches the position when a state transition of a certain sensor is detected then stops the motion There are four possible actions under this category e LatchOnLowToHighTransition e LatchOnHighToLowTransition e LatchOnIndex e LatchOnIndexAfterSensorHighToLow With LatchOnLowToHighTransition and LatchOnHighTo
33. 2 9 Examples XYZSplineVerification XY ZGroup Splinel trj This function returns a 0 if the trajectory is executable XY ZSplineVerificationResultGet XY ZGroup XPositioner Name NegTravel PosTravel MaxSpeed MaxAcceleration This function returns the name of the trajectory checked with the last sent function XYZSplineVerification to that motion group Splinel trj the negative travel required for the XYZGroup XPositioner the positive travel required for the XYZGroup XPositioner the maximum trajectory velocity and the maximum trajectory acceleration XYZSplineExecution XY ZGroup Splinel trj 10 100 Executes the trajectory Splinel trj with a trajectory velocity of 10 units s and a trajectory acceleration of 100 units s XYZSplineParametersGet XY ZGroup FileName Trajectory Velocity TrajectoryAcceleration ElementNumber Returns the name of the trajectory being executed Splinel trj the trajectory velocity 10 the trajectory acceleration 100 and the number of the currently executed trajectory element 8 3 PVT Trajectories 8 3 1 Trajectory Terminology Trajectory continuous multidimensional motion path PVT stands for Position Velocity and Time PVT trajectories are defined in an n dimensional space n 1 to 8 These are available with MultipleAxes groups A PVT trajectory is generated with continuous movements of the MultipleAxes group s positioners over several time periods For each period each posi
34. 4 Kd is generally not needed but it can help in certain cases to improve the response when the speed loop of the driver board is not efficient enough Note To set the corrector parameters loop type Ki Kp Kd use the following functions refer to Programmer s Manual for details e CorrectorType PIDFFVelocity PositionerCorrectorPIDFFVelocitySet e CorrectorType PIDFFAcceleration PositionerCorrectorPIDFFAccelerationSet e CorrectorType PIDDualFFVoltage PositionerCorrectorPIDDualFFVoltageSet e CorrectorType PIPosition PositionerCorrectorPIPositionSet 14 3 2 Corrector PIDFFAcceleration The PIDFFAcceleration must be used in association with a driver having a torque input constant voltage gives constant acceleration using MotorDriverInterface AnalogAcceleration AnalogSin60 Acceleration AnalogSin90Acceleration AnalogSinl20Acceleration AnalogDualSin60 Acceleration AnalogDualSin90Acceleration or AnalogDualSin120Acceleration SetPoint Acceleration KFeedForwardAcceleration SetPoint Position PID Corrector Filtering amp o Calculations i To the driver From the encoder Figure 56 Corrector PIDFF Acceleration Driver Board amp Stage 14 3 2 1 Parameters FeedForward method e A feed forward in acceleration is used e KFeedForwardAcceleration is a gain that can be applied to this feed forward e When the system is used in open loop the PID output is cut and the fe
35. 4 4 CONTROLLER CONFIGURATION Geneeral ccccccccccccccccccccceeeesssesssseeeeeeeeeeeeeeeeeeeeeeas 38 4 5 SYSTEM Error file display ccccccccccceseeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeseeeeeeeeeeeseseeeseeeseeeseseeeeees 39 4 6 SYSTEM Last error file display cccccccccccccccccccceeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeees 39 4 7 SYSTEM Auto Configuration cccccccccssccsecsesesssesssecseesesesssesssecseesenesssessooessvessoeosvessoesenes 40 4 8 SYSTEM Manual Configuration eio itr Een Y UTE AE EU PR I PUDE In IM COUEE UE nio sU a POIERE 40 4 9 SYSTEM Manual Configuration Gantries Secondary Positioners suse 44 Z9 L Home search of Pati W cone poni Dee mU Po MIR aa Aa AE eR E a MN M Ren MM EE 45 49 2 Qantries with linear MotOrS iore io petat hae H Rape iai etn ER eo EY e MURUS 46 4 9 3 Gantries with linear motors and variable force ratio sessssssss 47 410 STAGE Add from Data Base iore rrt prete h ERE ee rhe Sep ERAT AR RE bees a ex pa E AT Usa Mex Eee PE AT As aS 49 AIL STAGE hu M 50 4 12 FRONT PANEL Mowve ccccccccccccccccceesssssssssssceeeccceecceccceeessessssnsseeaeaeeeeeeeesesesseessnsnsees 52 XPSDocumentation V1 4 x EDH0301En1050 08 15 iv XPS Q8 Universal High Performance Motion Controller Driver 413 ULM IC MENT 53 4 14 FRONT PANEL Spi
36. A gathering file can have a maximum of 1 000 000 data entries and a maximum of 25 different data types The first line of the data file contains the sample period in seconds minimum period 0 000125 s the second line contains the names of the data type s and the other lines contain the acquired data A sample file is shown below QW Newport Experiences Salvia 147 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial 12 1 XPSDocumentation V 1 4 x EDH0301En1050 08 15 148 Gathering dat SamplePeriod 0 0 GatheringTypeA GatheringTypeB GatheringTypeC ValueA1 ValueB1 ValueC1 ValueA2 ValueB2 ValueC2 ValueAN ValueBN ValueCN Time Based Internal Data Gathering The data for time based gathering are latched by an internal interrupt related to the servo cycle of the XPS 8 kHz The function GatheringConfigurationSet defines the type of data that will be stored in the data file The following is a list of all the data type s that can be collected PositionerName CurrentPosition PositionerName SetpointPosition PositionerName FollowingError PositionerName CurrentVelocity PositionerName SetpointVelocity PositionerName CurrentAcceleration PositionerName SetpointAcceleration PositionerName CorrectorOutput GPIO ADC DAC DI DO See the Programmer s Guide for a list of all the GPIO Names of the Analog and Digital I O The Setpoint values refer to the theoretical values from
37. C Choice Point Here is an example of a simple stage diagram First State Second State Initial Point Third State Final Point State diagrams can also include sub state diagrams First State amp Third State Choice Point The state diagrams that are specific to the XPS controller follow the same format Within the XPS controller all positioners are assigned to different motion groups These motion groups have the following common state diagram Not initialized state Grouplnitialize l Motor Following error Following Error initialization or state timeout Motor initialization done GroupHomeSearch Homing done Not referenced state Homing state CY Newport Experiences Solution XPSDocumentation V1 4 x EDH0301 En1050 08 15 68 XPS Q8 Controller Motion Tutorial As shown in the above state diagram all groups have to be first initialized and then homed before any group is ready to perform any other function Once the group is homed it is in a ready state There are five different motion groups available with the XPS controller e SingleAxis group e Spindle group e XY group e XYZ group e MultipleAxes group Each group also has group specific states Please refer to the Programmer s Manual for group specific state diagrams for the five different groups All positioners of a group are bundled together for security handling Security handling of different group
38. CurrentAccelerationCutOffFrequency 50 Velocity 25 GKI 0 Set Save Cancel Acceleration 1000 GKD 0 MinimumTjerkrime 0 005 KForm 0 MaximumTjerkTime 005 KFeedForwardAcceleration a Distance 0 KFeedForwardJerk o0 Set amp Move Cancel Set Save Cancel Auto tuning Mode Short settling Refresh rate frames sec 1 00 Set AD Newport Ssss yere Aara a mend Tarn Carja hu 3 To save the recommended values click Save To apply these new values reboot the controller The positioner should now work properly Experiences Solutio 59 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Software Tools NOTE All other functions of the tuning page should be used only by experienced users 4 22 TUNING Auto Tuning NOTE Apart from the Auto scaling feature which is described in the previous chapter only experienced motion control users should use the TUNING tool of the XPS controller All Newport positioners are supplied with default tuning parameters that provide consistently high performance for the vast majority of applications Use the Tuning tool with Newport positioners only when not fully satisfied with the dynamic behavior of the positioners Auto Tuning works best with direct drive stages Friction drive or ballscrew drive systems may not result in optimum tuning using this feature The following is a brief description of the TUNING too
39. EE E ANE ESE 14 VU me c Dui dvi E T T U 15 e OWE ON TE N E E E E A TET 15 s Proin enin E de Rm 16 3 5 1 Straight through cables black ss 16 3 9 2 COPOSSSOVEECaDIOS OAY erriren nE bios esa ns Raton A E AEAEE 16 3 5 3 Direct Connection to the XPS Controller sene 17 3 5 4 Connecting the XPS to a Corporate Network using Static IP Configuration 19 3 5 5 Configuring the XPS for Connection to a Corporate Network Using Dynamic IP en uliuiciic 21 3 5 6 Recovering a lost IP CONfiQuratiOn cc cccccccecceeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeees 24 3 6 Testing your XPS PC Connection and Communication ccccsssesssseseeeseesesssessssssseeseees 26 eg fmm Gros eir MI tS RE 27 3 8 Comimeurine the Controlle Feier ernaia ioa aa 28 MEE iiS diu ORT E EEE AEE 29 3 8 2 Manual Configuration for Newport Positioners seen 31 3 8 3 Manual Configuration for non Newport Stages ccccccccccccceeeeeeeeeeeeeeeeeeeeeeeees 35 De Systemi SUDO Wd sn cectorers cece cisee ir nn ArT ETA ESEA NSONA A A ears 35 Software Tools 40 S itware WONG 36 Zo Software Tools COVEEVIO Was xroy casts nscs svcansonducenncd aa eani Ra Neni ANERER aE AA enian 36 4 2 CONTROLLER CONFIGURATION Users Management eeeereeern 37 4 3 CONTROLLER CONFIGURATION IP Management essen 38
40. IEEE E E E E AA 87 7 8 1 Analog Position Tracking ccccccccccccceceeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeees 88 7 8 2 Analog Velocity Tracking sssssssssssssseseeeeeeeeee nennen enne 88 S0 Lre NIC REEL OE EUIS SEDES 90 Gl Line Arc Trajectories ied oerte patata tis bbAeuep cu tuRsOnPibesbodnabeha Prd nb Ae M AE End ANa Erba ed AAEE 90 NMENU Ies MERO UA EENE EEEa 90 8 1 2 Trajectory Conventions 0 cccccccccsesesseseeeseeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeees 9 m MERC sei ConyentionS E 91 8 1 4 Defining Line Arc Trajectory Elements cccccccccccccccceeeceeeeeeeeeeeeeeeeeeeeeeees 91 ES EME BIA MUT MMC 92 Onl MC SP E E 93 8 1 7 Trajectory File DesctipLiOTL speed rero Rr piede Ero ER rand aden 93 8 1 89 Trajectory File Examples eerdere nner DI tee EE rea ve e ese TIR DI rates e Ee Site tiii 93 8 1 9 Trajectory Verification and Execution sss eene 94 8 1 10 Examples of the Use of the Functions esses 95 UMEN E 96 8 2 L Trajectory Termine ey seroren an nean a Ean 96 58 2 2 Trajectory ConyentIofiScosssse esse ineen 96 8 2 3 Geometric Conventions eessssssssesseeeeeenn nne nnne nennen nennen ener nnne nnne 96 8 2 4 Catmull Rom Interpolating Splines essen 97 8 2 5 Trajectory Elements Arc Length Calculation ccccccccccccceeeeeeeeeeeeeseeeeeees 97 8 2 0 Trajectory File DeSCHD
41. Move Jog Spindle I O view I Oset Positioner errors Hardware status Driver status 4 2 CONTROLLER CONFIGURATION Users Management This tool allows managing User accounts There are two types of users Administrators and Users Administrators have configurations rights Users have restricted rights to use the system The following steps are needed to create a new user 1 Enter a new user name in the login field 2 Choose the access rights User or Admin 3 Check the box Reset PWD to XXXXXXXX Your password is reset to XXXXXXXX 4 Select the VALID button to add the new access account Ne N t SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TE User account management Administrator Admin Modify Delete Anonymous User Modify Delete MyUser User Modify Delete Add Modify Login Rights User Admin V Reset PWD to XXXXXXXX Valid Clear AD Newport G spectra Physics NOTE The default password is XXXXXXXX and must be changed after the first log in 37 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Software Tools 4 3 CONTROLLER CONFIGURATION IP Management See chapter 3 5 for details SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PA Ww Newport IP management Us IP management GO Newport G spectra Physics biperence Saara Aer d Nara Corne 4 4 CONTROLLER CONFIGURATION General This screen provides valuable informatio
42. MyGroup MyPositioner has a following error that exceeds the warning following error value DoubleGlobalArrayEqual Triggers an action when the value of the variable in the DoubleGlobalArray and referenced by the global variable number is equal to the value to check The variable can be modified by using the DoubleGlobalArraySet function QW Newport Experiences Salvin 135 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial DoubleGlobalArrayDifferent Triggers an action when the value of the variable in the DoubleGlobalArray and referenced by the global variable number is different from the value to check The variable can be modified by using the DoubleGlobalArraySet function DoubleGlobalArrayInferiorOrEqual Triggers an action when the value of the variable in the DoubleGlobalArray and referenced by the global variable number is less than or equal to the value to check The variable can be modified by using the DoubleGlobalArraySet function DoubleGlobalArraySuperiorOrEqual Triggers an action when the value of the variable in the DoubleGlobalArray and referenced by the global variable number is greater than or equal to the value to check The variable can be modified by using the DoubleGlobalArraySet function DoubleGlobalArrayInferior Triggers an action when the value of the variable in the DoubleGlobalArray and referenced by the global variable number is lower than the val
43. Newport Corporation When calling Newport regarding a problem please provide the Tech Support representative with the following information e Your contact information e System serial number or original order number e Description of problem e Environment in which the system is used e State of the system before the problem e Frequency and repeatability of problem e Can the product continue to operate with this problem e Can you identify anything that may have caused the problem Newport Corporation RMA Procedures Any XPS Series Controller Driver being returned to Newport must be assigned an RMA number by Newport Assignment of the RMA requires the item s serial number Packaging XPS Series Controller Driver being returned under an RMA must be securely packaged for shipment If possible re use the original packaging xiii XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Universal High Performance Motion Controller Driver GO Newport Experencs Salvin XPSDocumentation V1 4 x EDH0301En1050 08 15 xiv XPS QS Controller User s Manual CY Newport Motion Controller rrr a Meer nes User s Manual tym _ cue 1 0 Introduction 1 1 Scope of the Manual The XPS is an extremely high performance easy to use integrated motion controller driver offering high speed communication through 10 100 Base T Ethernet outstanding trajectory accuracy and powerful programming functionali
44. Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems QO Newport XPSDocumentation V 1 4 x EDH0301En1050 08 15 219 Experience Solutions Newport Visit Newport Online at www newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales Tel 33 0 1 60 91 68 68 e mail france newport com Technical Support e mail tech _europe newport com Service amp Returns Tel 33 0 2 38 40 51 55
45. On the other hand more functions could be sent in parallel using non blocking sockets However the drawback 1s that it is almost impossible to diagnose which function caused an error To execute several processes in parallel for instance to request the current position during a motion and other data simultaneously it is possible to communicate to the XPS controller via different sockets The XPS controller supports a maximum number of 84 parallel opened sockets The total number of open communication channels to the XPS controller be it via the website TCL scripts a LabVIEW program or any other program can not be larger than 84 Users who prefer not to use blocking sockets or whose programming languages don t support multiple sockets such as Visual Basic versions prior to version Net can disable the blocking feature by setting a low TCPTimeOut value 20 ms for instance In 201 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial this case the XPS will unblock the last socket after the TCPTimeOut time However this method loses the ability to pinpoint which commands were not properly executed Examples of the use of parallel sockets The following examples illustrate how to open several sockets via the web site interface TCL scripts LabVIEW VIs and C programs Web site interface The simplest way to open several sockets in parallel is to open several browser windows using the IP addre
46. PCOPulseWidth are 0 2 default 1 2 5 and 10 us Please note that only the falling edge of the trigger pulse is precise and only this edge should be used for synchronization irrespective of the PCOPulseWidth setting Note also that the duration of the pulse detected by the electronics may be longer depending on the time constant of your RC circuit Successive trigger pulses should have a minimum time lag equivalent to the PCOPulseWidth time multiplied by two QS Newport Experience Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 166 XPS Q8 Controller Motion Tutorial The following functions are used to generate time spaced pulses PositionerTimeFlasherSet Positioner TimeFlasherGet Positioner TimeFlasherEnable PositionerTimeFlasherDisable The function PositonerTimeFlasherSet defines the position window and the time intervals for the trigger signals It has four input parameters Position Name Minimum Position Maximum Position Time Interval The time interval must be greater than or equal to 0 0000004 seconds 0 4 us and less than or equal to 50 seconds Furthermore the time interval must be a multiple of 25 ns To enable the time spaced pulses the function PositionerTimeFlasherEnable must be sent Example 1 GrouplInitialize MyStage GroupHomeSearch MyStage PositionerTimeFlasherSet MyStage X 5 25 0 00001 PositonerTimeFlasherEnable MyStage X GroupMoveAbsolute MyStage 30 PositionerTimeFlasherD
47. Q8 Controller User s Manual 2 0 System Overview P259 Specifications Number of Axes e 1 to 8 axes of stepper DC brush DC brushless motors or piezo electric stacks using internal drives e Other motion devices using external third party drives Communication Interfaces e Internet protocol TCP IP e One Ethernet 10 100 Base T RJ45 connector with fixed IP address for local communication e One Ethernet 10 100 Base T RJ45 connector for networking dynamic addressing with DHCP and DNS e Typically 0 3 ms from sending a tell position command to receiving the answer e Optional XPS RC remote control Firmware Features e Powerful and intuitive object oriented command language e Native user defined units no need to program in encoder counts e Real time execution of custom tasks using TCL scripts e Multi user capability e Concept of sockets for parallel processes e Distance spaced trigger output pulses max 2 5 MHz rate programmable filter e Time spaced trigger output pulses 0 02 Hz to 2 5 MHz rate 50 ns accuracy e Trigger output on trajectories with 100 us resolution e Data gathering at up to 8 kHz rate up to 1 000 000 data entries e User defined actions at events monitored by the controller autonomously at a rate of 8 KHz e User definable system referencing with hardware position latch of reference signal transition and set current position to value capability e Axis position or speed controlled by analog input e Axis p
48. Romberg numerical integration algorithm This guarantees that the arc length is calculated with an error less than 10 units 8 2 6 Trajectory File Description The spline trajectory is described in a file in the Admin Public Trajectories folder of the XPS controller Each line of this file represents one point of the spline trajectory except for the first and the last lines that are needed only to define the start and the end of the trajectory Two consecutive points form a trajectory segment The format of a line in a file 1s X Position Y Position Z Position The separator between the X Y and Z Position is a comma As mentioned before the first and last lines of the file are needed only for the interpolation of the first and the last spline segments These define the angle the trajectory starts and ends but the motion system will not hit these points So the trajectory s first real point starting point is the one defined by the second line and the trajectory s real last point end point is the one defined by the second to the last line The position values in the data file are relative to the physical position of the motion group at the start of the trajectory If the position in the second line of the file starting point is not equal to zero 0 0 0 the real trajectory positions those that the motion group will hit are shifted further by this value Example The spline trajectory file has the following format Xo
49. SingleAxis group Specific XYZ Group Features Spline trajectories XYZ mapping These features are only available with XYZ groups It is not possible for an XYZ group to perform a Line Arc or a PVT trajectory Also an XYZ group cannot be slaved to another group however any positioner of an XYZ group can be a master to a slaved SingleAxis group Specific MultipleAxes Features PVT trajectories PVT trajectories are only available with MultipleAxes groups It is not possible for a MutipleAxes group to perform a Line Arc or a Spline trajectory Also a MultipleAxes group cannot be slaved to another group However any positioner of a MultipleAxes group can be a master to a slaved SingleAxis group Native Units The XPS controller supports user defined native units like um inches degrees or arcsecs The units for each positioner are set in the configuration file where the parameter EncoderResolution indicates the number of units per encoder count When using the XPS controller with Newport stages this part of the configuration is done automatically Once defined all motions speeds and accelerations can be commanded in the same native unit without any math needed All other parameters like stage travel maximum speed and all compensations are defined on the same scale as well This is a great advantage compared to other controllers that can be commanded only in multiples of encoder counts which can be an odd number In the XPS contr
50. Step 2 Click in the choice field again and select the parameter name Function argumenti s EventExtendedConf Configure one or several events char ExtendedEventN m e 251i XY X Edit Samia constante ocity Start zGammoa constantVesocityEnd cranii ciim erem ar ul SGamma ConstantAcdelerationStart SGamma Const ccelerationEnd SGammoea Caonst S Gamma Const EM Gamma Consta tOecsleraticnEnd siamrma coenstantDeeleration state SSamma MotionStart SGamma MotianEnd SGamma MotionsState Jog Constant VelocatyStart Jog ConstantVeloctyEnd Jog ConsiantVeloctyState Jog Constant ccelerationStart log ConstantA ccelerationEnd Jeg ConstantAccelerationstate lJog MotionStart mm Kb mmm ER XPSDocumentation V1 4 x EDH0301 En1050 08 15 146 Step 3 Define event parameters To add another event click ADD else click OK I Function argument s EventExtendedConfigurationTriggerSet Configure ane on several events F char Extended ver tName 251 I q XY X SGammy MotionStart v Edit char EventParameter1 251 char EventParameter2 251 0 char EventParameter3 251 char EventParameter4 251 char ExtendedEventName 251 char EventParameter1 251 D 10 0 0 0036704078032 GO Newport Experience Solution XPS Q8 Controller Motion Tutorial 12 0 Data Gathering The XPS controller provides four methods for data gathering 1 Time based internal data
51. To define a gantry check the box Use a secondary positioner during the definition of a Single Axis group or XY group See chapter 4 8 for further instructions on how to define a new motion group When done the following screen appears example Single Axis group Y N SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TER Auto configuration Manual configura System Build Single Axis XGantry Positioner Stroke Dee 0 sees VEBAPEWAR IV Use a Secondary Positioner Positioner Stroke SecondaryPositioner seme ume O bqpenence Saara A Crete d Narr Cog he XPSDocumentation V1 4 x EDH0301En1050 08 15 44 sem XPS Q8 Controller Software Tools Define the plug number for the secondary positioner and the name from the stage data base The secondary positioner must have common values with the primary positioner for the following parameters MaximumVelocity MaximumAcceleration HomeSearchMaximumVelocity HomeSearchMaximumAcceleration MinimumTargetPosition Maximum TargetPositioner The parameters End referencing position and End referencing tolerance refer to the homing process of the gantry see chapter 4 9 1 for details The parameter Offset after initialization is relevant only for gantries with linear motors See chapter 4 9 2 for details For all other gantries enter 0 for this parameter Furthermore for certain XY gantries it is also possible to apply a variable f
52. Tracking GroupInitialize Group GroupHomeSearch Group PositionerAnalogTrackingVelocityParameterSet Group Positioner GPIO2 ADC1 Offset Scale DeadBandThreshold Order Velocity Acceleration GroupAnalogTrackingModeEnable Group Velocity GroupAnalogTrackingModeDisable Group QW Newport Experiences Salvin 89 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial 8 0 XPSDocumentation V 1 4 x EDH0301En1050 08 15 90 Trajectories 8 1 8 1 1 The XPS controller supports 3 different types of trajectories The Line arc trajectory is a trajectory defined by a combination of straight and curved segments It is available only for positioners in XY groups The major benefit of a Line arc trajectory is the ability to maintain constant speed speed being the scalar of the trajectory velocity throughout the entire path excluding the acceleration and deceleration periods The trajectory is user defined in a text file that is sent to the controller via FTP Once defined the user executes a function to begin the trajectory and the XPS automatically calculates and executes the motion including precise monitoring of the speed and acceleration all along the trajectory Simply executing the same trajectory more than once results in continuous path contouring A dedicated function performs a precheck of the trajectory which returns the maximum and minimum travel require
53. XPS places a priority on the displacement position value over the velocity value To reach the exact position the speed of the positioner may vary slightly from the value set in the stages ini file or by the PositionerSGammaParametersSet function So the drawback of the SGamma profile is that the velocity used during the move can be a little bit different from the velocity defined in the parameters For example the exact velocity will change when the move distance is changed move 100mm then 100 001 mm then 100 011 mm There will be some changes to the commanded velocity This change can be ignored for many applications except where an accurate time synchronization during the motion is required The function PositionerSGammaExactVelocity AdjustedDisplacementGet can be used as described below to achieve the exact desired speed in applications that require an accurate value of the velocity during a move In this case the velocity value is adhered to but the target position may be slightly different from the one required In other words according to the application requirements the user can choose between very accurate positions or very accurate velocities Example PositionerSGammaExactVelocity AdjustedDisplacementGet MyGroup MyStage 50 55 ExactDisplacement This function returns the exact displacement for that move with the exact constant velocity set shown in the example above 10 mm s The result is stored in the variable ExactDisplac
54. actual target is performed Linear error compensation The linear error compensation helps improve the accuracy of a motion device by eliminating linear error sources Linear errors can be caused by screw pitch errors linear increasing angular deviations abbe errors thermal effects or cosine errors misalignment between the feedback device and the direction of motion Linear error compensation is applicable to all positioners Its value is defined in the stages ini When set to other than zero the encoder positions are compensated by this value Linear error compensation can be used in conjunction with other compensation For this reason keep in mind the effects of using linear error compensation in addition to other compensation methods Positioner mapping In contrast to the linear error compensation positioner mapping also allows compensation for nonlinear error sources Positioner mapping is done by sending a compensation table to the XPS controller and configuring the needed settings in the stages ini Positioner mapping is available with all positioners and works in parallel with other compensations except for the backlash compensation method Better accuracy performance is achievable with linear compensation and positioner mapping combined XY mapping XY mapping is only available with XY groups It allows compensation for all errors of an XY group at any position of the XY group by sending two compensation tables to the XPS controlle
55. axis compared with the base turns slightly around its center So a correction DeltaTheta value calculated from the XY positions must be sent to Theta to move it in order to keep the Theta immobile relative the base during the XY move In the following discussion Theta is a SingleAxisTheta Group XPSDocumentation V1 4 x EDH0301 En1050 08 15 124 powimo Sunt XPS Q8 Controller Motion Tutorial Configuration in the system ini file Yaw mapping is enabled when an XY group is associated with the Theta group It is defined by this key word YawMappingXYGroupName The XY motions induce errors along Theta These errors are defined in a mapping file YawMappingToThetaFileName When the Yaw is applied corrections are generated on XY These corrections are defined in the two mapping files YawMappingToXFileName YawMappingToYFileName In building the mapping file YawMappingToThetaMappingFile follow the same rules used for positioner mapping The following parameters are used to check the correctness of the file YawMappingToThetaLineNumber YawMappingToThetaColumnNumber YawMappingToThetaMaxPositionError In building the two mapping files YawMappingToXMappingFile and YawMappingToY MappingFile follow the same rules used for XY group mapping The following parameters are used to check for file correctness YawMappingToXFileName YawMappingToXLineNumber YawMappingToXColumnNumber YawMappingToXMaxPositionEr
56. can choose between a regular stage configuration and a Spindle configuration A Spindle is a specific rotary device with a periodic position reset at 360 by default meaning 360 equals 0 When defining the stage as Spindle in the stages ini you must assign this stage also to a Spindle group in the system configuration and vice versa For details about Spindles please refer to section 6 3 5 Once the stage name appears you can modify it as needed see comments above 6 The box Use ESP Compatibility for Hardware detection is checked by default If your stage has an ESP chip inside see the ESP compatible sticker on the stage this box should remain checked Otherwise with vacuum compatible stages or with old Newport stages or with non Newport stages uncheck this box 7 Click on Add new stage to add the stage Once all stages have been added you can review or modify these parameters from the screen Modify under the main tab STAGE NOTE From this screen you have access to all stage parameters Only experienced users should modify these parameters For the exact meaning of the different parameters please refer to the document ConfigurationWizard pdf accessible from the main tab DOCUMENTATION 8 When finished with all stages click on Manual Configuration under SYSTEM The following screen appears AD N t SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS DOCUMENTATION
57. code XPSDocumentation V 1 4 x EDH0301En1050 08 15 202 SOSO RMS XPS Q8 Controller Motion Tutorial NOTE Socket 2 and Socket 3 are not opened by the TCLScriptExecute function but it is assumed that these scripts open a socket in their code LabVIEW VIs In a VI file several processes can easily be created all beginning with a TCP Open and all finishing with a TCP Close Each TCP Open will open its own socket Shown below is a simple VI that opens 4 sockets simultaneously examplei vi Block Diagram Fle Edt View Project Operate Took Window Help gt co m y 5 sale gt 17pt Application Font Fa 3s 8 Firmware version 192 168 33 236 Socket 1 192 166 353 256 Socket 3 Current Position X amp Y units E DD iS C CSYSC lt Ci eet gl Eje LT F 192 168 33 236 Socket 4 C program A C program is executed sequentially Even if it calls many functions they are always executed one by one following the order they are written In order to open several sockets for multitasking the C multithreading functionality must be used The XPS driver DLL allows a maximum number of 100 simultaneously opened sockets One XPS controller supports a maximum number of 84 simultaneously opened sockets but a program could control several XPS controllers eem 203 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Appendix
58. gain NotchGain The gain usually in the range of 0 01 to 0 1 is the value of the amplification of a signal at a frequency equal to the central frequency and the bandwidth is the range about the central frequency for which this gain is equal to a 3 db reduction Notch filters are typically used to avoid the instability of the servo loop due to the mechanic s natural frequencies by lowering the gain at these frequencies When they are implemented these filters add some phase shift to the signal This phase shift increases with the filter bandwidth and must remain small in the frequency range where the servo loop is active to maintain stability The result is that notch filters are only effective at avoiding instabilities due to excessive and constant natural frequencies The last section of the diagram shows the limitation and scaling features Scaling is used to transform units of position speed or acceleration to a corresponding voltage The Limitation factor is a safety that is used to limit the maximum voltage that can be applied to the driver to protect against any runaway or saturation situations that may occur Feed Forward Loops and Servo Tuning Corrector PIDFF Velocity The PIDFF Velocity corrector should be implemented into applications where the positioner driver requires a speed input constant voltage to the driver provides constant speed output to the positioner using MotorDriverInterface AnalogVelocity gt
59. gathering With this method one data set is gathered for every n servo cycle 2 Event based internal data gathering With this method one data set is gathered at an event 3 Function based internal data gathering With this method one data set 1s gathered by a function 4 Trigger based external data gathering With this method one data set is gathered for every n external trigger input see also chapter 13 0 Output Triggers Method 1 2 and 3 these are also referred to as internal or servo cycle synchronous data gathering With the trigger based data gathering this 1s also referred to as an external data gathering as the event that triggers the data gathering or the receipt of a trigger input is asynchronous to the servo cycle The time based the event based and the function based data gathering store the data in a common file called gathering dat The trigger based external data gathering stores the data in a different file called ExternalGathering dat The type of data that can be gathered differs also between the internal and the external data gathering Before starting any data gathering the type of data to be gathered needs to be defined using the functions GatheringConfigurationSet 1n case of an internal data gathering or ExternalGatheringConfigurationSet in case of an external data gathering Refer to the Programmer s Manual and the Gathering functions for a complete list of data types During dat
60. in each row is the tab All positions are relative to the physical home position of the XY group The data files must contain the X position 0 and the Y position 0 The error at X Y 0 must be 0 which means that the error at the home position is 0 This hardware reference for XY mapping has the advantage of being independent of the value of the HomePreset The following shows the structure of such mapping files X Mapping File Y Mapping File XMappingColumnNumber YMappingColumnNumber lt gt 0 Ymin Y1 05 is Y max 0 Ymin Y T 0 Y max ER Xmin Xerr00 m As b ER X min Y err 00 m as 2 M i Ex aq en i od f C0 C0 E Co C0 a zi vas XPSDocumentation V1 4 x EDH0301En1050 08 15 116 Figure 38 XY Mapping Files NOTE Error in X Y 0 must be 0 This value in the file corresponds to the HomePreset position in the XY group reference Experience Solution XPS Q8 Controller Motion Tutorial To activate XY mapping the mapping files must be in the admin config directory of the XPS controller and the following settings must be configured in the system ini e XMappingFileName Name of the mapping file e XMappingLineNumber Total number of lines of that file e XMappingColumnNumber Total number of columns of that file e XMappingMaxPositionError Maximum absolute error i
61. increases the stability of the system The steady state error however is unaffected since the derivative of the steady state error is zero These two gains alone can provide stable positioning and motion for the system However to eliminate the steady state errors an additional gain value must be used Integral Term The Integral term Ki acts as a gain that increases when the frequency of the variations of the following error decrease Tias t i ae sir t The result is that the integral term becomes dominant at low frequencies compared to the proportional and derivative terms The gain becomes infinite when frequency 0 Even a very small following error will generate an infinite value of the integral term The advantage of the integral term is that it will eliminate any steady state following error However the disadvantage is that the integral term can reach values where the corrector is saturated causing the system to become unstable at the end of a move and cause the positioner to hunt or dither To reduce this effect two additional parameters are included in the PID corrector to help prevent these instabilities Ks and Integration Time Ks The saturation limit factor Ks permits users to limit the maximum value of Ki that is applied to the total PID corrector output The Ks saturation limit can be set between 0 and 1 a typical setting is 0 5 As an example at a setting of 0 5 the maximum output generated by the Ki term appli
62. is completed MotionDone the theoretical MotionDone and the VelocityAndPositionWindow MotionDone The method used is set in the stages ini file In theory MotionDone is completed as defined by the profiler However it does not take into account the settling of the positioner at the end of the move So depending on the precision and stability requirements at the end of the move the theoretical MotionDone might not always be the same as the physical end of the motion The VelocityAndPositionWindow MotionDone allows a more precise definition by specifying the end of the move with a number of parameters that take the settling of the positioner into account In the VelocityAndPositionWindow MotionDone the motion is completed when PositionErrorMeanValue lt MotionDonePositionThreshold AND VelocityMeanValue lt MotionDoneVelocityThreshold is verified during the MotionDoneCheckingTime period The different parameters have the following meaning MotionDoneTimeout Velocity A saath ican i eec legte x MotionDoneVelocityThreshold Time Position error MotionDone with checking time 0 Filtered Position arror Time Position error g End of theoretical move MotionDoneCheckingTime MotionDone with checking time gt 0 Figure 23 Motion Done 83 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial e MotionDonePositionThreshold This parameter defines the pos
63. output is updated at each servo cycle or at each profiler cycle as long as the event occurs When used with events that have no duration like MotionStart or MotionEnd the analog output is only updated once and this value is kept until it is changed Action Parameter 1 Positioner Name This parameter defines the name of the positioner in which the Velocity value is used Action Parameter 2 Gain The Velocity value is multiplied by the gain value For example if the gain is set to 10 and the velocity value is 1 mm s or any other velocity unit then the output voltage 1s 10 V Action Parameter 3 Offset The offset value is used to correct for any voltage that may initially be present in the Analog output QW Newport Experiences Salvia 139 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial Analog output Velocity value gain offset Action parameter 4 This parameter must be 0 by default DACSet SetpointAcceleration This action is used to output a voltage on the Analog output to form an image of the theoretical acceleration The gain and the offset are used to calibrate this image This action makes most sense with events that have duration Always MotionState ElementNumberState etc as the analog output will be updated at each servo cycle or at each profiler cycle as long as the event lasts When used with events that have no duration like MotionStart or MotionEnd
64. processes Host managed processes are recommended for applications that require a lot of data management or a lot of digital communication with other devices other than the XPS controller In this case it is more efficient to control the process from a dedicated program that runs on a PC and which sends and receives information to and from the XPS controller via the Ethernet TCP IP communication interface Communication to the XPS controller can be established from almost any PC and is independent of the PC s operating system Windows Linux Unix Mac OS etc and programming language LabVIEW C C Python Matlab VisualBasic Delphi etc The XPS controller supports the development of host managed processes with a Windows communication DLL a complete set of LabVIEW drivers and a number of example programs in C VisualBasic and LabVIEW A few basic examples are provided in this section For more details please refer to the Software Drivers Manual XPS managed processes TCL The XPS controller is also capable of controlling processes directly using TCL scripts TCL stands for Tool Command Language and is an open sourced object oriented command language With only a few fundamental constructs it is very easy to learn and it is almost as powerful as C Users of the XPS can use TCL to write a complete application code with any function The TCL script can be executed in real time but in the background utilizing time that the controll
65. rS iieri dnon aAA TAE aa Eia 205 19 3 Enyironmental R eguiremMeniS sessin iine EENDERDE ENNAN 205 20 0 Appendix B General I O Description ssseeesossssecocsssscccccsssceossssseeoosoo 206 20 1 Digital I Os All GPIO Inhibit and Trigger In and PCO Connectors 206 PAM DEAL TA CREER Un 206 DOM MITA I KK 207 20 2 Digital Encoder Inputs Driver Boards amp DRV00 seeeeeeeenenennnnenn 207 20 3 Digital Servitudes Driver Boards DRV0O amp Analog Encoders Connectors 207 20 4 Analog Encoder Inputs Analog Encoder Connectors sese 207 20 5 Analog L OXGPIO2 COnEBeGtOE aeuecoto sete ehesu zit qees ie be Revs Enter er Sepe SR ra REGE e s SRM GR ES RER ania 208 PPS AAMAS BRUST 208 ZI SM MEE uou c 208 21 0 Appendix C Power Inhibit Connector eere eeeeeee 209 22 0 Appendix D GPIO Connectors ecce eres e eere eee ee eee eee eeu ua 210 ZEN EPMO WE ONC ClOR E 210 222 MAO ZC OMRON oean E E E E E E 210 p MEC SX OM CUO ceo sonneaieaconctuaioessmieteaenoceeesmenetes 211 Dp MERC AUR E nie T i T Em 211 23 0 Appendix E PCO Connector ecce ee eee e eee eee eee ee ettet eeaaa 212 24 0 Appendix F Motor Driver Cards eee e eee e ee eere eene 213 24 1 DC and Stepper Motor Driver XPS DRVO1
66. signal mode Frequency gt 1 and lt 5000 Amplitude gt 0 and lt Limit Time gt 0 Echelon signal mode Amplitude gt 0 and lt Limit or 0 and gt Limit Time gt 0 During Time Signal Amplitude End of Time Signal 0 Random amplitude signal mode Amplitude gt 0 and lt Limit Time gt 0 Frequency gt 1 and lt 5000 The signal is generated with a random value at every controller base time Tbase 0 1 ms then is filtered with a second order low pass filter at the cut off Frequency value o Random pulse width binary amplitude signal mode Amplitude 0 and Limit Time 0 Frequency 71 and lt 5000 The signal is a sequence of pulses Signal Amplitude or 0 with the pulse randomly varied in width multiple of Tbase Frequency is the controlled system band width cut off frequency necessary for the PRBS Pseudo Random Binary Sequence function configuration The non effective functional parameters can accept any value the value 0 is recommended for simplicity The PositionerExcitationSignalGet function is used to get the parameters previously used with the PositionerExcitationSignalSet function Esperance Salvin XPS Q8 Controller Motion Tutorial 16 3 Notes The numbers in the boxes represent the values of the group Status Bold transitions are driven by function the others are internal transitions 16 4 Experience Solutiom Gro
67. stage encoder the overall gain of the proportional part at a given frequency Frq is Kp 2 n Frag Gain This gain is equal to one at FrqP FrqP Kp 2 7 This frequency FrqP must remain lower than the frequency FrqD of the derivative part to keep the stability The integral gain Ki drives the capability of the closed loop to overcome perturbations at low frequencies and to limit static error Due to the double integration of the acceleration command in a position by the stage encoder the overall gain of the integral part at a given frequency Frq is Ki Gain i 2 n Frq This gain is equal to one at Fral 1 F rq Ki 2 7 This frequency FrqI must remain lower than the frequency FrqP of the proportional part to keep the stability QS Newport Experencs Salvin XPS Q8 Controller Motion Tutorial 14 3 2 Methodology of Tuning PID s for PIDFFAcceleration Corrector direct drive DC motors 1 Verify the AccelerationFeedForward in open loop adjustment done using ScalingAcceleration Close the loop set Kd increase it to minimize following errors until vibrations appear during motion 2 Decrease Kd to eliminate oscillations 3 Set Kp increase it to minimize following errors until the appearance of oscillations decrease it to eliminate oscillations 4 Set Ki increase it to limit static errors and settling time until the appearance of overshoot oscillations Note To
68. syntax of the function and make final text changes as needed When done click Execute E1471 NET ins CAIN TRILLER CUNEIGUBJATICN FRUIT PANEI IERMIPMAI TLE PI FUNCIIONAIL TESIS DME AAT Function list Command GroupHomeSearch al API to execute GraupTnitializenoEncnoderReset Groupinitialize GraupinitializeWithEncaoderCallbration GroupJogCurrentGet Received message GrouplJagMoedenpisable GrouplagModeEnablae GroupJogParametersaet GroupJogParametersSet Groupkill CGraupMatianDisable GroupMayeAbsolute Group 20 Execute GroupmotionErmalile GroupMotianStatustsat GroupioveAbonrt CroupMaowveRelative Graupiosiriancaorrnectedinrafrlertuet GroupPasitionCurrentGet GroupPositionPCORawEncodartet i GroupPositionSetpoimtGet 7 NOTE Some commend can take a lang time to execute sa if you vie got blank screen or a HTTP 404 error check your web cient tima aut Command history list Clear History TCL Generator Gathering Display External Gathering Display pm Qo Rievvport S Spectra Physics Soletions to Make Manage and Measure Light VamUuE Peer wee eee 4 When the function is executed the controller s response will appear in the Received message window A returned 0 means that the function has been executed successfully In all other cases there will be an error code Use the function ErrorStringGet to get more information about the error
69. the locking thumbscrews When using stages with an analog encoder interface a separate encoder cable must be connected to the corresponding axis connector of the control board labeled Encoder 1 to Encoder 8 Please note that the XPS controller will not detect cross connection errors between the motor of one stage and the encoder of another stage Make sure that motor encoder and other cables are plugged to the appropriate axis driver card and encoder connectors CAUTION It is strongly recommended that the user read section 3 4 System Setup before attempting to turn the controller on Serious damage could occur if the system is not properly configured All Newport ESP compatible stages are electrically and physically compatible with the XPS controller ESP compatible stages are visually identified with a blue ESP Compatible sticker on the stage If an ESP compatible motion system was purchased all necessary hardware to connect the stage with the XPS controller is included The stage connects to the XPS via a shielded custom cable that carries all the power and control signals encoder limits and home signals The cable is terminated with a standard 25 pin D Sub connector Dummy stages might be used to simulate a stage These allow users to configure and test the system s behavior without having real stages connected For a dummy stage use a male 25 pin D Sub connector with the signals for and travel limits c
70. the profiler whereas the current values refer to the actual or real values of position velocity and acceleration To gather information from the secondary positioner of a gantry append SecondaryPositioner to the positioner name Example PositionerName SecondaryPositioner FollowingError For details about gantry configurations see chapter 4 9 It is possible to start the gathering either by a function call or at an event The following sequence of functions is used for a time based data gathering started by a function call GatheringConfigurationSet GatheringRun The following sequence of functions is used to start a time based data gathering at an event GatheringConfigurationSet EventExtendedConfigurationTriggerSet EventExtendedConfigurationActionSet EventExtendedStart A function triggers the action for instance a GroupMoveRelative When all data is gathered use the function GatheringStopAndSave to save the data from the buffer to the flash disk of the XPS controller QS Newport Esperance Salvin QW Newport XPS Q8 Controller Step 1 Select the positioner name and click EE argument s GatheringConfigurat Configuiation acquisition char Typel 251 xy SetpomntPoasition CurrentPosition FollowingErrar 5Setpaintvelocity SetpointAcceleration CurrentVelocity Current4cceleration CorrectorOutput Motion Tutorial Other functions associated with internal Gathering are
71. use the function GatheringStopAndSave For more details about data gathering refer to chapter 12 Data Gathering Action parameter 1 to 4 These parameters are 0 by default ExternalGatheringRun This action starts an external data gathering It requires that an external data gathering was previously configured with the function GatheringExternalConfigurationSet The gathering must be launched by a punctual event and does not work with events that have duration Action Parameter 1 NbPoints This parameter defines the number of data acquisitions NbPoints multiplied by the number of gathered data types must be smaller than 1 000 000 For instance if 4 types of data are collected NbPoints can not be larger than 250 000 4 250 000 1 000 000 Action Parameter 2 Divisor This parameter defines every Nth number of the trigger input signal at which the gathering GO Newport Experiences Salvin 141 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial will take place This parameter must be an integer and greater than or equal to 1 For example if the divisor is set to 5 then gathering will take place every 5th trigger on the trigger input signal Action Parameter 3 and 4 These parameters are 0 by default For further details on data gathering see chapter 12 Data Gathering MoveAbort This action stops abort a motion on an event It is similar to sending a MoveA
72. used to adjust the amplitude of the total output and the parameter Kform is used set how soon this Gkx is applied As seen in the figure below if a Kform of 1 1s implemented the GKx is not applied until the positioner is very close to its target position in this case 0 But a Kform of 10 will implement the GKx much sooner and tighten the control of the loop further from the target position This can be very effective when positioning high inertial loads or when very short settling times are critical The default setting for the Kform parameter is 0 for all standard Newport stages QS Newport Experience Solution XPS Q8 Controller Motion Tutorial 14 2 Filtering and Limitation In addition to the various PID correctors and calculations filtering and limitation parameters also have the same structure for all the correctors PIDFFVelocity PIDFFAcceleration and PIDFFDualVoltage etc 14 3 14 3 1 SetPoint Velocity SetPoint Position QW Newport Experiences Solutiom OUTPUT from PID and FeedForward Correctors PID Corrector Filtering amp Calculations To the driver Voltage to driver Digital Digital Limitation Scaling Notch Filter 1 Notch Filter 2 Figure 54 Filtering and Limitation The first section of the above diagram shows the succession of two digital notch filters Each filter is defined by its central frequency NotchFrequency its bandwidth NotchBandwidth and its
73. value which is applied with the sign of the velocity e When the system is used in open loop the PID output is cut and only one feed forward in velocity is applied with the gain defined by KFeedForwardVelocityOpenLoop PID corrector e Output of the PID is a voltage Kp is given in V unit Ki is given in V unit s Kd is given in V s unit Filtering and Limitation e ScalingVoltage is the theoretical motor voltage resulting from a 10 V input on the driver 48 V e VoltageLimit volts is the maximum motor voltage allowed to be commanded to the driver Refer to the XPS Q8 Configuration Wizard Document for a detailed explanation Experience Solutio XPSDocumentation V1 4 x EDH0301En1050 08 15 182 XPS Q8 Controller Motion Tutorial SetPoint Position QW Newport Experiences Solutiom 14 3 3 2 14 3 3 3 Basics The PIDDualFFVoltage corrector can be seen as a mix between the PIDFFVelocity and PIDFFAcceleration correctors It is difficult to give a precise picture of this behavior which depends a lot on the response of the stage speed and acceleration versus motor voltage Methodology of Tuning PID s for PIDDualFF Corrector DC motors with tachometers 1 Adjust KFeedForwardVelocityOpenLoop to optimize the fidelity of the speed at high speed 2 Close the loop using the same value for KFeedForwardVelocity set Kp increase it to minimize following errors until oscillations vibrations appears dur
74. values or possible interference In case of an error during execution because of bad data or because of a following error for example if the trajectory acceleration or speed was set too high the motion group will make an emergency stop and will enter the disabled state The parameters for trajectory velocity and trajectory acceleration can also be set to zero In this case the controller uses executable default values which are Min All V max actuator for trajectory velocity and Min All Ama actuator for trajectory acceleration A trajectory can be executed many times up to 2 times by specifying the ExecutionNumber parameter with the XY LineArcExecution function In this case the second run of the trajectory 1s simply appended to the end of the first run while the end position of the first run is taken as a new start position referenced to zero of the second run The trajectory endpoint does not need to be the same as the start point The total trajectory is executed without stopping between the different runs Finally the function XY LineArcParametersGet returns the trajectory execution status with trajectory name trajectory velocity trajectory acceleration and current executed trajectory element This function returns an error if the trajectory is not executing 8 1 10 Examples of the Use of the Functions XYLineArcVerification XYGroup Linearcl trj This function returns a 0 if the trajectory is executable XYLineArcVerificatio
75. 0 The value of LinearEncoderCorrection is specified in ppm parts per million The correction is applied relative to the physical home position of the positioner the Encoder position by definition is set to the HomePreset value at the home position This hardware reference for linear error correction has the advantage of being independent of the value of the HomePreset Example In the Encoder section of the stages ini file set a value other than 0 but 0 5 x 10 lt value lt 0 5 x 10 in parameter LinearEncoderCorrection Encoder EncoderType AquadB EncoderResolution 0 001 unit LinearEncoderCorrection 5 ppm Positioner Mapping Positioner mapping corrects for any nonlinear errors of a positioner Positioner mapping is applicable on all positioners and can be used with to other compensations except backlash compensation 113 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial c Corrector mapping correction HomePreset Mapping File PositionerMappingFileName PositionerMappingLine Number PositionerMappingMaxPositionError LinearEncoderCorrection Figure 36 Positioner Mapping e HomePreset Encoder position value at the home position e LinearEncoderCorrection Value in ppm Correction is given by CorrectedPosition HomePreset EncoderPosition HomePreset 1 LinearCorrection 10 e Mapping file Declaration of mapping in the stages ini fi
76. 0 08 15 XPS Q8 Universal High Performance Motion Controller Driver IG EXOHIOOBASIUDIL esia aR oaae isana 190 DOSE Dodo tese pF EPUR Mie bte ipt EE E n mp ctu isden D tUpe losa PPM MINUM IR RITE MUMS 190 16 2 Howto Use the Excitation Signal Function eeeeeesesessesssee nnns 190 IF Groop Siite Didar im tO m 191 16 4 Function Description eeeeesssesesseeeeeeee nnn aaa aaa ananas 191 17 0 Pre Corrector Excitation Signal eee eere eee eee ee een 192 A De a a m t 192 17 2 Pre corrector excitation signal wave forms eeeessessseseeeeeeeee nnns 192 173 Technical Timp le mic nat tO scenes rotes cd tinin o oar To NE NONE ANE E OEEO VENKON ENE 194 IX EE a E E O 194 PZ JIrapleene nta HOT eis teres E AES 195 17 3 3 Group capsule state diagram modification sss 196 18 0 Introduction to XPS Programming eee eee e eee ee eene eene enne nne 197 Me LELO TET 198 e2 Ay c E A A 199 o DEEDS E m 200 18 4 Running Processes in Parallel essen 201 GO Newport XPSDocumentation V 1 4 x EDH0301En1050 08 15 viii Experience Soon XPS Q8 Universal High Performance Motion Controller Driver e Appendices 19 0 Appendix SLIDE 204 OE Connor 204 19 2 Rear Panel Connoct
77. 0 Amplitude Mismatch GO Newport Expeneret Solutions 185 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial The amplitude mismatch between sine and cosine signals generates 0 17 interpolation error per percent amplitude mismatch With a 20 um scale pitch 1 amplitude mismatch generates 33 nm peak to peak interpolation error Note Positive amplitude is the distance between the signal s maximum value and the signal axis Negative amplitude is the distance between the signal s minimum value and the signal axis If the positive amplitude and negative amplitude are not equal there is amplitude mismatch Phase Shift Error when 1 of phase shift Period Encoder Period Figure 61 Phase Shift The phase shift between sine and cosine generates 0 28 interpolation error per degree phase shift With a 20 um scale pitch 1 degree phase shift between sine and cosine generates 55 5 nm peak to peak error Combined Errors The combination of these errors is not a simple sum but is more likely a root mean square relationship With a 20 um scale pitch 1 sine offset 1 cosine offset 1 phase mismatch and 1 degree phase error between sine and cosine generates 132 5 nm peak to peak error 20004 0 3296 0 3296 0 16496 0 2896 111 373 Note that the calculated value 111 373 nm 1s lower than the measured 132 5 nm Analog encoder compensation feature The compensa
78. 0 mm s or 500 mm s e Ifthe output velocity is equal to 50 mm s Position imm mm s e 20 40 60 80 100 ms e Ifthe output velocity is equal to 500 mm s Position Ein NA 100 mm ms Experience Solutiom 103 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial Velocity 500 mm s 50 20 40 60 80 100 ms Figure 33 PVT trajectory element in execution the comparison A PVT trajectory must have three parameters position velocity and time With a given target displacement output velocity and time duration the PVT trajectory calculates intermediate positions and velocities as a function of time With an output velocity of 50 mm s the positioner has enough time to achieve the displacement within the assigned time 100 ms in the forward direction The velocity increases at the beginning and then slows down towards the end The position always increases up to the target position 5 mm On the other hand when the output velocity is set to 500 mm s the positioner does not have enough time to achieve the displacement and speed output required in the forward direction So the positioner will first reverse the direction of motion to be able to approach the end position with a speed of 500 mm s 8 3 6 Trajectory File Description The PVT trajectory is described in a file that is in the public Wrajectories folder of the XPS controller
79. 00190 0 00190 0 00190 0 00190 0 00190 0 00190 0 0 00254 0 00254 0 00254 0 00254 0 00254 0 00254 0 00254 0 0 00254 0 00254 0 00254 0 00254 0 00254 0 00254 0 00254 Matrix of Z errors XYZMapping Z txt OO OoococococOocOO 00 1 0 0 0 0 0 0 0 0 00 0 00125 0 00125 0 00125 0 00125 0 00125 0 00125 0 00125 0 0 00125 0 00125 0 00125 0 0 00125 0 00125 0 00125 0 0 00125 0 00125 0 00125 0 00125 0 00125 0 00125 0 00125 1 00 0 00190 0 00190 0 00190 0 00190 0 00190 0 00190 0 00190 0 0 00137 0 00137 0 00137 0 00137 0 00137 0 00137 0 00137 0 0 00137 0 00137 0 00137 0 00137 0 00137 0 00137 0 00137 1 00 0 0002 0 0003 0 0002 0 0003 0 0002 0 0003 0 0002 Motion Tutorial 2 00 0 00530 0 00530 0 00530 0 00530 0 00530 0 00530 0 00530 0 0 00110 0 00110 0 00110 0 00110 0 00110 0 00110 0 00110 0 0 00110 0 00110 0 00110 0 00110 0 00110 0 00110 0 00110 2 00 0 0002 0 0003 0 0002 0 0003 0 0002 0 0003 0 0002 3 00 0 00190 0 00190 0 00190 0 00190 0 00190 0 00190 0 00190 0 0 00123 0 00123 0 00123 0 00123 0 00123 0 00123 0 00123 0 0 00123 0 00123 0 00123 0 00123 0 00123 0 00123 0 00123 GO Newport Experience Salvin XPSDocumentation V1 4 x EDH0301En1050 08 15 122 XPS Q8 Controller Motion Tutorial Verify in the corresponding sections of the stages i
80. 0140 0 25 1 NOTE Mapping is a function implemented within the controller to correct positioning errors Once activated mapping is transparent to the user The function GroupPositionCurrentGet doesn t return 0 24965 0 25 0 00140 0 25 1 but 0 25 QW Newport Experience Solutions 115 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial API gt move to XY TargetPosition 10 4 A positioner Profiler Y positioner Profiler XY Mapping XY mapping is only applicable to XY groups It compensates for all errors of an XY group at any position of that XY group XY mapping can be used in conjunction with other compensations including positioner mapping So care must be taken about the unwanted effects of using XY mapping and other compensation at the same time gt To servo loop X X positioner Profiler to Corrector Interpolation idi X Error Mapping Y Error Mapping Figure 37 XY Mapping Y positioner Profiler to Corrector Interpolation To servo loop Y XY mapping is defined by 2 compensation tables in text file format each for X and Y errors In each of these files the first column specifies the X positions X being the first positioner of the XY group and the first row the Y positions Each cell represents the axis error for that X Y position as shown in the tables below The first entry in that file must be 0 zero The separator between the data
81. 1 Parameter2 Parameter3 Parameter4 Not all action names have a preceding actor but all actions have four parameters Even though all four parameters may not be defined in an action it is still required to have an entry with zero 0 as the default To define an action use the function EventExtendedConfigurationA ctionSet GO Newport NO Experiences Saulia 137 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial Example EventExtendedConfigurationActionSet GPIO1 DO DOToggled 4 0 0 0 In this case the actor is the digital output GPIO1 DO and the action is to toggle the output The value 4 refers to bit 3 00000100 Hence this action toggles the value of bit 3 on the digital output GPIO DO EventExtendedConfigurationActionSet ExecuteTCLScript Example tcl 1 0 0 The action ExecuteTCLScript has no preceding actor This action will execute the TCL script Example tcl The task name is 1 and the TCL script has no arguments a zero for the third parameter means there are no arguments EventExtendedConfigurationActionSet GatheringRun 1000 8 0 0 The action GatheringRun has no preceding actor This action will start an internal data gathering It will gather a total of 1000 data points one data point every 8th servo cycle meaning one data point for every 8 8000 s 1 ms It is also possible to trigger several actions with the same event To do so just define an
82. 2 00 0 00534 0 00322 0 00845 0 00228 0 00210 0 00308 0 00148 2 00 0 00234 0 00222 0 00245 0 00128 0 00310 0 00348 0 00138 3 00 0 00192 0 00453 0 00331 0 00787 0 00232 0 00134 0 00789 3 00 0 00122 0 00353 0 00231 0 00387 0 00132 0 00122 0 00689 Travels MinimumTargetPosition 3 unit HomePreset 0 unit MaximumTargetPosition 23 unit QW Newport Experiences Saulia 117 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial NOTE The limit travels must be equal or within the X and Y limit positions of the mapping files 3 and 3 respectively in this example Apply the following settings in the system ini file Mapping XY XMappingFileName XYMapping X txt XMappingLineNumber 7 XMappingColumnNumber 7 XMappingMaxPositionError 0 00845 YMappingFileName XYMapping Y txt YMappingLineNumber 7 YMappingColumnNumber 7 YMappingMaxPositionError 0 00739 Use of the functions e GrouplInitialize XY e GroupHomeSearch XY e GroupMoveAbsolute XY 3 2 The mapping files must at least cover the minimum and the maximum travel of the XY group they must cover the MinimumTargetPosition and the MaximumTargetPosition for the X and Y positioners parameters defined in the stages ini see section Travels So in the above example the travel of the X and Y positioners can not be larger than 3 units but they can be smaller than t
83. 3 A DC motor without tachometer ILSCC type DriverName XPS DRVO1I in voltage mode Input 1 10 V results in ScalingVoltage 48 V Input 2 10 V results in ScalingCurrent 3 A MotorDriverInterface AnalogVoltage CorrectorType PIDDualFFVoltage Stages with Stepper motor amp Encoder UTSPP RVPE ILSPP DriverName XPS DRV0O1 in stepper mode Input 1 10 V results in ScalingCurrent in motor winding 1 Input 2 10 V results in ScalingCurrent in motor winding 2 MotorDriverInterface AnalogStepperPosition CorrectorType PIPosition Stages with Stepper motor amp no encoder TRA SR50PP PR50PP MFAPP DriverName XPS DRVO1I in stepper mode Input 1 10 V results in ScalingCurrent in motor winding 1 Input 2 10 V results in ScalingCurrent in motor winding 2 GO Newport Esperance Salvin XPSDocumentation V1 4 x EDH0301En1050 08 15 172 XPS Q8 Controller Motion Tutorial MotorDriverInterface AnalogStepperPosition CorrectorType NoEncoderPosition These are just examples of available positioner associations in the XPS The flexibility of positioner associations allows many other configurations to be developed to drive non Newport positioners or other products Before developing other configurations the user must be aware that the main goal of creating these associations 1s to match the servo loop output to the appropriate driver input as stated by the manufacturer For Instance
84. 4 XPS Q8 Controller Motion Tutorial 7 6 QW Newport Experiences Salvin Use the following functions GroupInitialize MyGroup GroupHomeSearch MyGroup PositionerMotionDoneGet MyGroup MyPositioner This function returns the parameters for the VelocityAndPositionWindow Motion done previously set in the stages ini file so 4 100 0 1 0 001 and 0 5 PositionerMotionDoneSet MyGroup MyPositioner PositionThresholdNewValue VelocityThresholdNewValue CheckingTimeNewValue MeanPeriodNewValue TimeoutNewValue This function replaces the parameters with the newly entered values If this function is not executed the default setting from the ini file is used JOG Jog is an indeterminate motion defined by velocity and acceleration Unlike a GroupMoveAbsolute or a GroupMoveRelative the end of the motion is not defined by a target position It can be best described by a go command with a definition how fast but not how far In Jog mode the speed and acceleration of a motion group can be changed on the fly to accommodate varying situations This is not possible with a GroupMoveAbsolute or a GroupMoveRelative which are defined moves Practical examples for Jog are with tracking systems or coordinate transformations where the speed or acceleration of the jogging group is modified depending on the position or speed of the other motion groups or based on an analog input value The Jog mode can be enabled using the f
85. 4 x EDH0301En1050 08 15 126 XPS Q8 Controller Motion Tutorial API gt move tc TargetPositio 10 7 5 Gamma Profiler Experiences Solutio Theta Encoder and XY Correction In a Theta XY group a motion in Theta will induce an offset of the center of the Theta axis Utilizing the 3 encoders of the Theta stage a correction in X and Y can be implemented to correct for the induced eccentricity effectively keeping the Theta axis in the same position relative to the base The Theta axis is composed of three encoders A B and C The encoder type is defined in the stages ini file by EncoderType It must either be AquadBTheta or AnalogInterpolatedTheta EncoderType Theta Positioner e gt ProfilerPosition A B and C Theta Encodsr EncoderPosition Positioner BENE a Reading and jesse Corrector romer X correction Interpolatior CorrectedEncoderPositic Y correction Theta Correction CorrectedProfilePositior CorrectedProfilePositior To enable Theta correction an XY group must be associated with the SingleAxisTheta group It is defined in the system ini file by ThetaCorrectionXYGroupName ThetaCorrectionLowPassCutOffFrequency 20 The radius r and the XY correction limits are defined in the stages ini file by units XY rad units Theta units XY units XY EncoderRadius MaximumEncoderCorrectionX Maximu
86. 5000 GKP 0 no unit GKI 0 GKD 0 KForm 0 fae KFeedForwardAcceleration 1 KFeedForwardJerk 0 Filters parameters MotchFrequency1 0 NotchBandwidthi 0 NotchGaini 0 NotchFrequency 0 NotchBandwidth2 0 NotchGain2 0 Gathering Filters parameters CurrentVelocityCutOffFrequency 50 PE EAL am CurrentAccelerationCutOffFrequency 50 0 10 0 20 0 30 0 40 0 20 0 60 0 70 0 860 0 90 1 00 Motion parameters seconds Velocity 25 Acceleration 1000 I Defined range Auto range PURI m cud LLL 2100 0 D MaximumTjerkTime 0 05 Java Runtime Environment A Erosion paca Coa fa a ul amp Distance 20 Solutions to Make Manage and Measure Light 4 When satisfied with the results there is no need to tune the stage If not satisfied return to the tuning page and move back to the start position 5 Next to the Auto tuning button there is a Mode field for Auto tuning Select Short settling or High robustness Choose Short settling to improve the settling time after a motion or to reduce the following error during the motion Short settling will define high PID vales for your stage but there is a risk of oscillation Choose 61 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Software Tools High robustness to improve the robustness of the motion system and to avoid oscillations during or after a motion High robustness for instance can avo
87. 92 168 254 254 Following is the procedure to set the Ethernet card address This procedure is for the Windows XP operating system almost similar process to Windows 7 1 Start Button gt Control Panel gt Network Connections Network and Sharing 2 Right Click on Local Area Connection Icon and select Properties Local Area Connection 4 Properties Connect using EE 3Com 3C305TX based Ethemet Adapter Generic This connection uses the Following Items jel Client For Microsoft Networks i File and Printer Sharing For Microsoft Networks Internet Protocol TCPZIF Install Uninstall Properties Description Transmission Control Protocal Intermet Protocol The default wide area network protocol that provides communication across diverse interconnected networks Show icon in notification area when connected 3 Highlight Internet Protocol TCP IP TCP IP4 and click on Properties 4 Type the following IP address and Subnet Mask as shown in the next figure XPSDocumentation V1 4 x EDH0301 En1050 08 15 24 Experience Satin XPS Q8 Controller User s Manual Internet Protocol TCP IP Properties General You can get IP settings assigned automatically if your network supports this capability Othenvise You need to ask your network administrator for the appropriate IP settings C Obtain an IP address automatically Use the following IP address IP address 192 168 254 100
88. B input 8 Enceder B input 21 index input a Index input 22 Reserved 10 Pulse Pulsa output 23 SND ti Direction Pulse output 24 N C 12 Analog A output 25 SND 13 Analog B output Figure 74 DRV00 Pass Through Connector Analog A output and Analog B output have 16 bit resolution at 10 V output These signals are used to command an external driver QW Newport Experiences Solutiom 215 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Appendix 25 0 Appendix G Analog Encoder Connector ENCODER 1 TO 8 Mating connector Male DB15 with UNC4 40 lockers Function Function Analog Cosine 0 5 Vpp Analog Cosine 0 5 Vpp GND GND Analog Sine 0 5 Vpp Analog Sine 0 5 Vpp 5 V 5 VL Do Not Connect Do Not Connect Limit or Limit Analog Index Analog Index Do Not Connect Home or Limit Figure 75 Analog Encoders Connector This connector is used to receive sine cosine encoder signals The sinusoidal position signals sine and cosine must be phase shifted by 90 and have signal levels of approximately 1 Vpp Each of these two signals is composed of an analog sinusoidal signal and its complement entering in a differential amplifier Sine Cosine and Index signals Analog Sine Analog Sine Analog Cosine and Analog Cosine inputs are the sine and cosine information from the encoder glass scale Levels for these individual signals must be 0 5 Vpp with a DC
89. Band Figure 24 The Relationship Among Offset Scale Dead Band amp Order GO Newport Experience Sulam XPSDocumentation V1 4 x EDH0301 En1050 08 15 88 XPS Q8 Controller Motion Tutorial The tracking velocity calculates as follows e AnalogInput is the voltage input at the GPIO e AnalogGain refers to the AnalogGain setting of the analog input e Offset Order DeadBandThreshold and scale are defined with the function PositionerAnalogTrackingVelocityParametersSet e MaxADCAmplitude InputValue OutputValue are internally used parameters only InputValue AnalogInput Offset if InputValue gt 0 then InputValue InputValue DeadBandThreshold if InputValue lt 0 then InputValue 0 else InputValue InputValue DeadBandThreshold if InputValue gt 0 then InputValue 0 OutputValue InputValue MaxADCAmplitude Order Velocity Sign InputValue OutputValue Scale MaxADCAmplitude In the dead band region there is no motion If the order is set to 1 then the velocity is linear with respect to the input voltage If order is set greater than 1 then the velocity response is polynomial with respect to the input voltage This makes the change in velocity more gradual and more sensitive in relation to the change in voltage A good example for using analog velocity tracking is for an analog joystick Example Following is an example that shows the sequence of functions used to set up Analog Velocity
90. CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS DO QAD Newport Auto configuration Manual configuration Error file display System auto configuration m Solutions to Make Manage and Measure Light If you want to continue click the Yes I confirm button and the following page appears SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS DO GO Newport Auto configuration Manual configuration Error file display System auto configuration Solutions to Make Manage and Measure Light Check if all connected stages are recognized by the system If yes click GENERATE CONFIGURATION FILES The controller reboots and the following screen appears this may take up to 16 seconds Microsoft Internet Explorer E 1 X A Your modifications have been processed and the controller is now rebooting pce Click OKR When the controller has finished booting a second beep after 12 18 seconds press F5 to reload the page select FRONT PANEL and then select Move The following screen appears 29 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller User s Manual SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS DOCUMENTATION QO Newport Move Jog Spindle I O view I Oset Positionererrors Hardware status Driver status Move Position State Action Positioner name Velocity Absmovei Absm
91. CSetCumentPostion Positioner name Gain Offset M DACSetCumenVelcity Positioner name Gain Offset mM DACSetSetpointPosiion Positionername Gain Offset m DACSetSetpoitVelocity Positionername Gain Offset m DACSetSetpintAcceleration Positionername Gain Offset ExemeTCLScipt TCL filename Task name Arguments KifCLSeip Takname S GatrngOnDaa GaterngRun Nbofponts Divisor GaenngRmAppnd po GaerngStp o ooo ExtemalGatherngRun Nbofpoits Divison o j MovAbrt jo CAUTION Certain events like MotionState have a duration These events trigger the associated action in each motion profiler cycle as long as the event is true For example associating the action DOToggle with the event MotionState will toggle the value of the digital output in each profiler cycle as long as the MotionState event is true An event doesn t reset the action after the event For example to set a digital output to a certain value during a constant velocity state and to set it to its previous value afterwards two event triggers are needed One to set to the digital output of the desired value at the event ConstantVelocityStart and another one to set it to its original value at the event ConstantVelocityEnd The same effect CANNOT be achieved by using the event ConstantVelocityState by itself An action 1s composed entirely of Actor Action Name Parameter
92. Connector In the AquadB signals configuration AquadB encoder signals are provided on the PCO connector see Appendix E PCO connector for details and pinning These signals are either output always Always configuration or only when the positioner is within a defined position window Windowed configuration When used with stages that feature a digital encoder AquadB the AquadB signals are the same as the encoder signals of the stage When used with SinCos encoders AnalogInterpolated the resolution of the AquadB signal is defined by the signal period of the encoder and the settings of the hardware interpolator by the function PositionerHardInterpolatorFactorSet Example XM stages feature an analog encoder with a signal period of 4 um With the setting PositionerHardInterpolatorFactorSet 200 the post quadrature resolution of the AquadB signals is 4 um 200 0 02 um In this case one full period of the AquadB signals equals 0 08 um The following functions are used to configure AquadB signals PositionerPositionCompareAquadBWindowedSet PositionerPositionCompareAquadBWindowedGet PositionerPositionCompareEnable PositionerPositionCompareAquadBAlwaysEnable PositionerPositionCompareDisable GO Newport XPSDocumentation V1 4 x EDH0301 En1050 08 15 168 Experience Solutions XPS Q8 Controller Motion Tutorial The function PositonerPositonCompareAquadBAIwaysEnable has only one input parameter the positioner name
93. DOCUMENTATION SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL KYO Newport Function list Command API to execute PositionerCorrectorSR1AccelerationGet a e a PositionerEncoderCalibrationParametersGet SingleA Execute PositionerCorrectorSR1O0bserverAccelerationSet i PositionerCorrectorSR10ffsetAccelerationGet Received message PositionerCorrectorSR10ffsetAccelerationSet PositionerCorrectorTypeGet 0 0 0061 0 0069 0 0059 3 0023 PositionerCurrentVelocityAccelerationFiltersGet PositionerCurrentVelocityAccelerationFiltersSet PositionerDriverFiltersGet PositionerDriverFiltersSet PositionerDriverPositionOffsetsGet PositionerDriverStatusGet PositionerDriverStatusStringGet PositionerEncoderAmplitudeValuesGet PositionerEncoderCalibrationParametersGet PositionerErrorGet PositionerErrorRead PositionerErrorStringGet gt PositionerExcitationSignalGet NOTE Some commands can take a long time to execute so if you ve got a blank screen or a HTTP 404 error check your web client time out Command history list Clear History TCL Generator Gathering Display femme eset O PositionerEncoderCalibrationParametersGet SingleAxis1 Positioner1 double double double double 0 0 0061 0 0069 0 0059 3 0023 LO Newport S Spectra sics Solutions to Make Manage and Measure Light tiperexe Saara a rene d er Step 2 Start the AnalogEncoderCalibrationDiplay VI which is found in the ftp site Move the posit
94. DRV01 Spindle Stage families Stages in the selected family NPX 4 URS75PP URS100PP URS150PP URS150BPP Stage name URS150CC IV Use ESP compatibility for hardware detection Add new stage IMS600LM RIGHT LO Newport S Spectra Physics Solutions to Make Manage and Measure Light 49 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Software Tools 4 11 STAGE Modify This screen allows you to review and modify all parameters of stages included in the stages ini Only experienced users should modify these parameters For the exact meaning of the different parameters please refer to the document ConfigurationWizard pdf accessible from the main tah DOCUMENTATION SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING DD Newport Stage modification UTM100CC1HL XPS DRVO RGV100BL XPS DRV02 Duplicate Modify Delete Restart Application Reboot LO Newport G Spectra Physics Solutions to Make Manage and Measure Light taperexe saaa GO Newport XPSDocumentation V 1 4 x EDH0301En1050 08 15 50 Experience Solutions XPS Q8 Controller Software Tools Experience Solutiom To modify the parameters of a stage do the following 1 Select a stage from the list Click on Modify 2 Scroll down to the section that contains the parameters that will be modified Parameters that require quite common changes are
95. Description Transmission Control Protacal Intermet Protocol The default wide area network protocol that provides communication across diverse interconnected networks Show icon in notification area when connected 3 Highlight Internet Protocol TCP IP TCP IP4 and click on Properties 4 Incase using HOST connector type the IP address 192 168 0 100 and Subnet Mask 255 253 255 0 In case using REMOTE connector type the IP address 192 168 254 100 and Subnet Mask 255 255 255 0 17 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller User s Manual Internet Protocol TCP IP Properties General You can get IP settings assigned automatically if your network supports this capability Othenvise You need to ask your network administrator for the appropriate IP settings C Obtain an IP address automatically Use the following IP address IF address 192 768 O 100 Subnet mask 255 255 255 0 Default gateway Use the following DNS server addresses Preferred ONS server Alternate DNS server 5 Click OK NOTE The The Last number of the IP address must be set to any number between 2 to 253 100 for example NOTE When configuring the controller to be on the network the settings for the PC s Ethernet card will have to be set back to default under Obtain an IP address automatically Once the Ethernet card address is set you are ready to connect t
96. Get MyStage amp Minimum Position amp MaximumPosition amp PositionStep amp EnableState This function returns the parameters previously defined the minimum position 5 the maximum position 25 the position step 0 002 and the enabled state I enabled 0 disabled GroupMoveAbsolute MyStage 30 PositionerPositionCompareDisable MyStage X The group has to be in a READY state for the position compare to be enabled Also the PositionerPositionCompareSet function must be completed before the PositionerPositionCompareEnable function In this example one trigger pulse is generated every 0 002 mm between the minimum position of 5 mm and the maximum position of 25 mm The first trigger pulse will be at 5 mm and the last trigger pulse will be at 25 mm The output pulses are accessible from the PCO connector at the back of the XPS controller See appendix E PCO connector for details GO Newport Experience Sulam XPSDocumentation V1 4 x EDH0301 En1050 08 15 160 XPS Q8 Controller Motion Tutorial This table summarizes the results of the example above Position Pulse enable Pulse 1 of the stage 1 state activation Explanation 0 0 No Position compare not enabled 5 Yes Position compare enabled first pulse 345329 Yes One pulse every 0 002 mm 25 Yes Last pulse 25 002 No Position compare disabled 30 No Position compare disabled The figure below shows actual screen shots from an oscilloscope for the exampl
97. H0301 En1050 08 15 0 00 0 00125 0 00412 0 00126 0 00320 0 00169 0 00369 0 00458 0 0 00125 0 00412 0 00126 0 0 00169 0 00369 0 00458 0 0 00125 0 00412 0 00126 0 00320 0 00169 0 00369 0 00458 1 00 0 00137 0 00258 0 00153 0 00154 0 00265 0 00337 0 00333 0 0 00137 0 00258 0 00153 0 00154 0 00265 0 00337 0 00333 0 0 00137 0 00258 0 00153 0 00154 0 00265 0 00337 0 00333 Motion Tutorial 2 00 0 00110 0 00111 0 00298 0 00169 0 00169 0 00214 0 00152 0 0 00110 0 00111 0 00298 0 00169 0 00169 0 00214 0 00152 0 0 00110 0 00111 0 00298 0 00169 0 00169 0 00214 0 00152 3 00 0 00123 0 00287 0 00487 0 00369 0 00125 0 00456 0 00335 0 0 00123 0 00287 0 00487 0 00369 0 00125 0 00456 0 00335 0 0 00123 0 00287 0 00487 0 00369 0 00125 0 00456 0 00335 XPS Q8 Controller Matrix of Y errors XYZMapping Y txt 0 0 0 0 0 0 0 0 3 00 0 00190 0 00190 0 00190 0 00190 0 00190 0 00190 0 00190 0 0 00192 0 00192 0 00192 0 00192 0 00192 0 00192 0 00192 0 0 00192 0 00192 0 00192 0 00192 0 00192 0 00192 0 00192 2 00 0 00530 0 00530 0 00530 0 00530 0 00530 0 00530 0 00530 0 0 00534 0 00534 0 00534 0 00534 0 00534 0 00534 0 00534 0 0 00534 0 00534 0 00534 0 00534 0 00534 0 00534 0 00534 1 00 0 00190 0
98. It is between the NotReferenced state and the Ready state Please see the state diagram below GroupHomeSearch Done NOT REFERENCING Referencing Action Execute WAITING MOVING GroupReferencingStart GroupReferencingStop Figure 22 State Diagram 7 3 5 Example MechanicalZeroAndIndexHomeSearch The following sequence of functions has the same effect as the MechanicalZeroAndIndexHomeSearch GroupReferencingStart GroupName PositionerHardwareStatusGet PositionerName amp status if status amp 4 0 4 is the Mechanical zero mask on the hardware status GroupReferencingActionExecute PositionerName LatchOnLowToHighTransition MechanicalZero 10 GroupReferencingActionExecute PositionerName LatchOnHighToLowTransition MechanicalZero 10 GroupReferencingActionExecute PositionerName LatchOnLowToHighTransition MechanicalZero 5 GroupReferencingActionExecute PositionerName LatchOnIndexAfterSensorHighToLow MechanicalZero 5 GroupReferencingActionExecute PositionerName MoveToPreviouslyLatchedPosition None 5 GroupReferencingActionExecute PositionerName SetPositionToHomepreset 0 GroupReferencingStop GroupName 7 11 None 7 4 Move A move is a point to point motion On execution of a move command the motion device moves from a current position to a desired destination absolute move or by a defined increment relative move During motion the con
99. KP o0 CurrentAccelerationCutOffrrequency 50 Velocity 25 GKI 0 Set Save Cancel Acceleration 1000 GKD o0 MinimumTjerkTime 0 005 KForm o0 MaximumTjerkTime 005 KFeedForwardAcceleration 1 Distance 0 KFeedForwardJerk 0 Set amp Move Cancel Set Save Cancel Auto tuning Mode Short settling v Refresh rate frames sec 1 00 Set A Newport Giscse my merece Sonora amp vee of bg Conroe 2 Click Kill group then click Auto scaling The stage vibrates for a couple of seconds Then the following message appears A N t SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS DOCUMENTATION Auto scaling successful Current scaling acceleration To apply these new scaling press SAVE else press CANCEL Calculated scaling acceleration 75713 487 Save amp Boot Cancel Current position 0 415000 70000 State Not initialized state from scaling calibration Corrector parameters Filters parameters Acquisition parameters ClosedLoopStatus 1i NotchFrequency1 0 Gathering 1 fe KP 219000 NotchBandwidth1 NEN Gathering 2 KI 15600000 NotchGain1 oo Gathering 3 KD 875 NotchFrequency2 en Gathering 4 Y KS o8 NotchBandwidth2 EBENEN Gathering 5 IntegrationTime 199 NotchGain2 oo Number of points 1000 DerivativeFilterCutOffFrequency 5000 CurrentVelocityCutOffFrequency o so Frequency divisor 10 GKP 0
100. LDOTL d ooeseern tivo nti PUE Eae nta Qe RESO RE RR 98 8 2 Trajecdory Fie Tex cil usss 98 8 2 8 Spline Trajectory Verification and Execution sse 100 VEN MY 5 621108 RN UNT 101 OMEN QM eleg SN m en 101 Soil Trajectory Derminologyu eet ii rtr PEE adatta ieri ad rati qaaa esi ee pets 101 8 3 2 Trajectory Convenllolis asscscseie eoe ee pk YpREERARRERFR RATER EERA FERE HERR ENNEA EEN TEENE E 101 8 3 3 Geometric C OMY CHONG caesus iei orex eus eoae o aonqu Sr epuboo E EE bus ka dos vp reana E ERpr gU UR Era 102 Bo PVT TCO AO Mo iot n HEN IeR OE HII EUREN OSEE I IUSTUS ITUENO MSS 102 8 3 5 Influence of the Element Output Velocity to the Trajectory 103 8 3 6 Trajectory File Description ccc cccccccccccccccceeeeeeeeeeeeeeeeeeeeeeeeeeeeseeeeeeeeeeeeeeees 104 57 Trajeciory File Example esesustesecpsce eset teepe tur sisse tho te enn era 105 8 3 8 PVT Trajectory Verification and Execution cccccccccccccccceceeeeeeeseeseeeeeeeeees 106 8 3 9 Examples of the Use of the functions ccccccccccccceeceeeeeeeeeeeeeseeeeeeeeeeeeeees 107 9 0 Emergency Brake and Emergency Stop Cases 108 Esperance Salvin XPSDocumentation V1 4 x EDH0301En1050 08 15 vi XPS Q8 Universal High Performance Motion Controller Driver UR MEG DU ICD e te ccc ccs ct ses aest eccseats esse edotecescuteessiveonecusoet ecebeceneacscuees 111 FO Backlash CompefSallOD s
101. LowTransition latching happens when the right transition on the defined sensor occurs The sensor can be latched to either MechanicalZero MinusEndOfRun and PositiveEndOfRun when supported by the hardware refer to 7 2 to know which hardware supports the function With LatchOnIndex and LatchOnIndexAfterSensorHighToLow latching happens on the index signal With LatchOnIndexAfterSensorHighToLow latching happens on the first index after a high to low transition at the defined sensor MechanicalZero or MinusEndOfRun Because of the dedicated hardware circuits used for the position latch there 1s essentially no latency between sensor transition detection and position acquisition In all cases motion stops after the latch However this means that the stopped position doesn t rest on the sensor transition but at some short distance from it To move exactly to the position of the sensor transition use the action MoveToPreviouslyLatchedPosition The latch does not change the current position value In order to set the current position value use the action SetPosition or SetPositionToHomePreset for instance after a MoveToPreviouslyLatchedPosition In the Referencing state the limit switch safeties emergency stop are still enabled until the MinusEndOfRun sensor is specified with a GroupReferencingActionExecute function When specified the limit switch safeties are disabled and will only be re enabled with the function GroupReferencingStop
102. NTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS DOCUMENTATION GO Newport Function list Command PositionerSGammaParametersSet API to execute PositionerSGammaPreviousMotionTimesGet PositionerStageParameterGet Reboot miu PositionerStageParameterSet Received message PositionerTimeFlasherDisable PositionerTimeFlasherEnable PositionerTimeFlasherGet PositionerTimeFlasherSet PositionerUserTravelLimitsGet PositionerUserTravelLimitsSet PositionerWarningFollowingErrorGet PositionerWarningFollowingErrorSet TCLScriptExecuteWithPriority NOTE Some commands can take a long time to execute so if you ve got a blank screen or a HTTP 404 error check your web client time out Command history list Clear History TCL Generator Gathering Display EE LO Newport S Spectra Physics Solutions to Make Manage and Measure Light bqpecence Saara Wait for the end of the boot sequence There is an initial beep a few seconds after power on and a second beep when the controller has finished booting The time between the first beep and the second beep is approx 12 18 seconds Connect the CAT 5 network cable black to the HOST connector of the XPS controller and to your network After restarting the controller and restoring your PC s Ethernet card default configuration open the Internet browser and connect using your given Static IP address If you don t want to connect directly to the Corpor
103. OEE E 70 6 3 1 Specific SingleAxis Group Features 2 0 cccccccccccccccccceeeeeeeeeeeeeeeeeeeeeeeeeeeeeees 71 6 3 2 Specific Spindle Group Features sse eene 71 633 Specilic XY Group Featules isenestositestiss erie adie ei 71 6 3 4 Specific XYZ Group Features ccccccccesseeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeees 71 6 3 5 Specific MultipleAxes Features cccccccccccccccccceeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeees 71 M uc Ai MR 71 PE a i E E A E E TE A E E A 73 Ta oy m 73 FROM uris e ccm 75 JT SC ICECHCTHOS LAG a E apa NNNM E E ANN UMEN 78 To cCMIOVSSQR SEBDSOF OVES ood donati uenis nisdbruonesducs donc Eu Genau ud tuU NU RoRMVEMEMORU sa 79 7 3 20 Moves of Certain Displacements ssssseeennnnnnenenneeneen ene 80 7 3 3 Position Counter Resets J onvivateson dise tiumtesed mide chai Reni e NER EAEE AEAEE ENEA NNER 80 Pepe UALS TAO N N A N N NA N E 81 7 3 5 Example MechanicalZeroAndIndexHomeSearch ccccccccccceeceeeeeeeeeeeeeeeees 81 Ao c c 81 GO Newport Experience Salvin V XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Universal High Performance Motion Controller Driver T Moon DONO ai crater c terete dee cnoseceecctontiiencasuadres svi cate asoupcecetenssataneasdvesasne A A T 83 DO IO conve as 85 Ted Mee lay e E E E E E EE E E 86 EE Go MAC
104. OLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS Auto configuration Manual configuration Error file display Last error file display Last error file display Le Solutions to Make Manage and Measure Light Expeneriet Solutions 39 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Software Tools 4 7 SYSTEM Auto Configuration With the help of this screen a quick basic configuration of the XPS controller can be done Check un check those stage models that you want don t want the XPS controller to configure to When done click Generate Configuration Files The XPS controller reboots After re booting you are able to use the XPS controller in this basic configuration For further information refer to chapter 3 8 1 NOTE Generate Configuration Files deletes your current system ini configuration file For troubleshooting a system make sure that you have a copy of the original system ini file for recovery Under Driver Model and Stage Model all motor drivers and Newport ESP compatible stages seen by the XPS controller are listed This screen also provides valuable information for diagnosing or troubleshooting the system SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS Y Newport Auto configuration Manual configuration Error file display System auto configuration 1 XPS DRV02 RGV100BL v 2 XPS DRV02 XML210 v 3 XPS D
105. PORARY Timer Triggers an action every nth servo cycle where n is defined with the function TimerSet Event parameter to 4 0 by default GO Newport Experience Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 130 XPS Q8 Controller Motion Tutorial NOTE This event is PERMANENT until the next reboot Call the EventExtendedRemove function to remove it MotionDone Triggers an action when a position is reached Event parameter 1 to 4 0 by default For the exact definition of MotionDone please refer to section 7 5 ConstantVelocityStart Triggers an action when constant velocity is reached Event parameter 1 to 4 0 by default ConstantVelocityEnd Triggers an action when constant velocity is finished Event parameter 1 to 4 0 by default ConstantVelocityState Triggers an action during constant velocity Event parameter 1 to 4 0 by default ConstantVelocityState Event Y ConstantVelocityStart ConstantVelocityEnd Event Event Figure 40 Constant Velocity Event ConstantAccelerationStart Triggers an action when constant acceleration 1s reached Event parameter 1 to 4 0 by default ConstantAccelerationEnd Triggers an action when constant acceleration is finished Event parameter to 4 0 by default ConstantAccelerationState Triggers an action during constant acceleration Event parameter 1 to 4 0 by default ConstantAccelerationState Event x Y ConstantAccele
106. PS it is possible that one group uses one axis of the XPS controller for an optical delay line while another group simultaneously uses other axes for a totally different application Both applications could run completely independent from different workstations without any delays or cross talk The XPS controller uses TCP IP blocking sockets which means that the commands to the same socket are blocked until the XPS returns feedback about the completion of the currently executed command either 0 if the command has been completed successfully or an error code in case of an error If customers want to run several processes in parallel users should open as many 84 parallel sockets Please refer to section 18 4 Running Processes in Parallel for further information about sockets and parallel processing 2 9 Programming with TCL TCL documentation is in a PDF file accessible from the XPS controller web site TCL stands for Tool Command Language and is an open source string based command language With only a few fundamental constructs and relatively little syntax it is very easy to learn yet it can be as powerful and functional as traditional C language TCL includes many different math expressions control structures if for foreach switch etc events lists arrays time and date manipulation subroutines string manipulation file management and much more TCL is used worldwide with a user base approaching Experience Salti
107. RV02 IMS600LM v 4 XPS DRVO1 UNKNOWN PO 5 XPS DRVO1 UNKNOWN fC Ie 6 XPS DRVO1 UNKNOWN Oe 7 XPS DRVO1 UNKNOWN pO 8 XPS DRVO1 UNKNOWN dud CAUTION Generating new configuration files will delete your current configuration Once configuration files Say will be generated the controller will reboot You need to close your browser wait a few seconds to Generate config files and Boot let the controller to take in account the new configuration GO Newport Spectra Physics 4 8 SYSTEM Manual Configuration Manual Configuration allows you to review the current system configuration or to define a new one See also chapter 3 8 2 for further information To create a new system configuration define all motion groups that should belong to that system It is not possible to append a motion group to an existing configuration from this tool To define a new motion group do the following 1 Enter the name of the new group My XY Group in this case Click on ADD to confirm the new group XPSDocumentation V1 4 x EDH0301En1050 08 15 40 Experience Soon XPS Q8 Controller Software Tools SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS DOCUMENTATION GO Newport Auto configuration Manual configuration Error file display System manual configuration E Q3 P B NM My XY Group BootScriptFileName BootScriptArguments GROUPS InterlockedGroups SingleAxisInUse Singl
108. S Q8 Controller Motion Tutorial 7 8 1 Analog Position Tracking The parameters that can be set for analog position tracking are the GPIO Name scale and offset The GPIO Name denotes which connector and pin number the analog signal will be input The scale and the offset are used to calibrate the output position in the following way Position InitialPosition AnalogValue Offset Scale Typical applications of analog position tracking are for beam stabilization tracking systems auto focusing sensors or alignment systems When connecting a function generator to the GPIO input analog tracking provides an easy way to make cyclical or sinusoidal motion for example Example Following is an example that shows the sequence of functions used to setup Analog Position Tracking GroupInitialize Group GroupHomeSearch Group PositionerAnalogTrackingPositionParameterSet Group Positioner GPIO2 ADC1 Offset Scale Velocity Acceleration GroupAnalogTrackingModeEnable Group Position GroupAnalogTrackingModeDisable Group 7 8 20 Analog Velocity Tracking The parameters that can be set for analog velocity tracking are the GPIO Name offset scale deadband threshold and order The relationship among offset scale deadband and order is illustrated in Figure 24 With order 1 Du Us Out gt In Dead Band 78 With order 1 on the output Dead
109. S Q8 Controller Motion Tutorial with the event Always see next example This link will avoid that the event trigger gets removed after it is not happening anymore 3 EventExtendedConfigurationTriggerSet Always 0 0 0 0 G1 P1 SGamma ConstantVelocityStart 0 0 0 0 EventExtendedConfigurationActionSet GPIO1 DO DOSet 4 4 0 0 EventExtendedStart EventExtendedConfigurationTriggerSet Always 0 0 0 0 G1 P1 SGamma ConstantVelocityEnd 0 0 0 0 EventExtendedConfigurationActionSet GPIO1 DO DOSet 4 0 0 0 EventExtendedStart GroupMoveAbsolute G1 P1 50 GroupMoveAbsolute G1 P1 50 In this example when positioner G1 P1 reaches constant velocity bit 3 on the digital output on connector number 1 is set to 1 Note 4 00000100 and when the constant velocity of the positioner G1 P1 is over bit 3 will be set to zero Different from the previous example adding the event Always avoids the event trigger being removed after the event is over Hence the state of the bit 3 will change with every beginning and with every end of the constant velocity state of a motion 4 EventExtendedConfigurationTriggerSet G1 P1 SGamma ConstantV elocityState 0 0 0 0 EventExtendedConfigurationActionSet GPIO1 DO DOSet 255 0 0 0 EventExtendedStart GroupMoveAbsolute G1 P1 50 In this example during the constant velocity state of the positioner G1 P1 1 us pulses are generated on all 8 bits in the di
110. Select the driver corresponding to your hardware and group configuration For all continuous rotation stages you can choose between a regular stage configuration and a Spindle configuration A Spindle is a specific rotary device with a periodic position reset at 360 meaning 360 equals 0 When defining the stage as Spindle in the stages ini you must assign this stage also to a Spindle group in the system configuration and vice versa For details about Spindles please refer also to section 6 3 4 Once the stage name appears it can be modified The default name is the Newport part number but in some cases it makes sense to use a different name This way for instance it is possible to add the same set of parameters several times in the stage data base under different stage names Later modifying certain parameters like travel ranges or PID settings to optimize the stage for different applications becomes straightforward 5 The box Use ESP Compatibility for Hardware detection is checked by default If the stage has an ESP chip a blue ESP compatible sticker is on the stage this box shall remain checked Otherwise with vacuum compatible stages or with old Newport stages uncheck this box 6 Click on Add new stage to add a stage SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS DOCUMENTATION QO Newport Add from database Modify Drivers and configuration XPS DRV01 XPS
111. Testing your XPS PC Connection and Communication To check if the XPS communicates with to the host computer send a ping message from the computer to the XPS This is done through the Windows menu Start gt Run gt then type ping IP address of the XPS See the example below for the IP address 192 168 33 236 Type the name of a program Folder document or Internet resource and Windows will open it Far vau vj If the XPS is connected and communicates properly it replies in the terminal window that appears after clicking on the OK button o C WINDOWSsystem32 ping exe Pinging 192 168 33 236 with 32 bytes of data Reply from 192 168 353 236 bytes 32 time lt ims Reply from 192 168 353 236 bytes 32 time lt ims Reply from 192 168 33 236 bytes 32 time lt ims Experencs Salvin XPSDocumentation V1 4 x EDH0301En1050 08 15 26 XPS Q8 Controller User s Manual If the XPS controller is not communicating the window displays that the time delay of the request is exceeded Ensure that the correct cable and IP addresses are set properly 3 7 Connecting the Stages CAUTION Never connect disconnect stages while the XPS controller is powered on CAUTION Mount the stage s on a flat stable surface before connecting to the XPS controller With the power off carefully connect the supplied cables to the stage and to the appropriate axis connector at the rear of the controller Secure both connections with
112. The first event parameter specifies the status mask in decimal format The other event parameters are 0 by default Code Hexa Bit Decimal Hardware status description 0x00010000 16 65536 Hard interpolator encoder error 0x00800000 23 8388608 Second driver powered on Example EventExtendedConfigurationTriggerSet MyGroup MyPositioner PositionerHardwareStatus 768 0 0 0 This event happens when the positioner MyGroup MyPositioner either the plus end of run or a minus end of run is detected WarningFollowingError Triggers an action when the following error exceeds the warning following error value In the PositionCompare mode activated by the PositionerPositionCompareEnable function during a move relative or absolute and inside the zone set by PositionerPositionCompareSet if the current following error exceeds the WarningFollowingError value the PositionCompareWarningFollowingErrorFlag is activated and the move returns a corresponding error 120 Warning following error during move with position compare enabled To reset the PositionCompareWarningFollowingErrorFlag send the PositionerPositionCompareDisable function The WarningFollowingETrror is set to FatalFollowingError defined in stages ini file by default but it can be modified with PositionerWarningErrorSet Example EventExtendedConfigurationTriggerSet MyGroup MyPositioner WarningFollowingError 0 0 0 0 This event happens when the positioner
113. The manufacturer MICRO CONTROLE Spectra Physics 9 rue du bois sauvage F 91055 Evry FRANCE Hereby declares that the product Description XPS Function Universal High Performance Motion Controller Driver Type of equipment Electrical equipment for measurement control and laboratory use complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility EMC complies with all the relevant provisions of the Directive 2014 35 EU relating to electrical equipment designed for use within certain voltage limits Low Voltage was designed and built in accordance with the following harmonised standards NF EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements NF EN 55011 2010 A1 2013 Class A NF EN 61000 3 2 2006 A1 2009 A2 2009 Electromagnetic compatibility EMC Part 3 2 Limits Limits for harmonic current emissions CEI 61010 1 2010 Safety requirements for electrical equipment for measurement control and laboratory use Part 1 General requirements was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 5 NF EN 61000 4 6 NF EN 61000 4 11 Date 26 06 2015 Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle F 45340 Beaune La Rolande France
114. Trajectory Event ElementNumber Start Triggers an action when the trajectory element number has started The first event parameter specifies the number of the trajectory element The other event parameters are 0 by default ElementNumberState Triggers an action during the execution of that trajectory element number The first event parameter specifies the number of the trajectory element The other event parameters are 0 by default ElementNumberState Event i Y TrajectoryStart TrajectoryEnd Event Event Figure 45 Element Number Event GO Newport Experience Solution XPSDocumentation V1 4 x EDH0301En1050 08 15 132 XPS Q8 Controller Motion Tutorial TrajectoryPulse Triggers an action when a pulse on the trajectory is generated see chapter 13 0 Output Triggers for details All event parameters are 0 by default TrajectoryPulseOutputState Triggers an action during the trajectory pulse output state meaning between the start and the end of the trajectory output pulses see sections Erreur Source du renvoi introuvable and Erreur Source du renvoi introuvable Triggers on Trajectories for details All event parameters are 0 by default ILowState Triggers an action when the digital input bit is in a low state The first event parameter is the bit index 0 to 15 The other event parameters are 0 by default DILowHigh Triggers an action when the digital input bit switches from a low state
115. URATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS Move Jog Spindle I O view I O set Positioner errors Hardware status Driver status Digital output we Pr re ewm FO r NT C mmm zm u mmm mum mnm n Analog output GPIO2 DAC1 0 000193 Set GPIO2 DAC3 0 000117 Set GPIO2 DAC2 0 000151 Set GPIO2 DAC4 0 000180 Set QO Newport G seys peere SSAra amp Cranes d won Casus hue XPSDocumentation V1 4 x EDH0301 En1050 08 15 54 Experience Solutions XPS Q8 Controller Software Tools 4 17 FRONT PANEL Positioner Errors The Positioner Errors page is an important page for trouble shooting When encountering any problems during the use of the system information about the errors related to the positioners are found in this page Hovering the cursor over the letters brings up the type of error Note that all positioner errors encountered since the last Clear all positioner errors are displayed even if some of the errors may no longer be present The Refresh button refreshes the error page This means that new errors will be displayed while retaining a history of previous errors To clear the errors use the button Clear all positioner errors SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS D Newport Move Jog Spindle I Oview I Oset Positionererrors Hardware status Driver status Positioner errors MULTI M1 OK MULTI M2 OK MULTI M3 OK Refres
116. Use Spin XYInUse My XY Group XYZlnUse MultipleAxesInUse My XY Group PositionerlnUse StepAxis ScanAxis InitializationAndHomeSearchSequence Together Mapping XY XMappingFileName YMappingFileName My_XY_Group StepAxis PlugNumber 3 StageName VP 25XA SECONDARY My XY Group ScanAxis PlugNumber 4 StageName VP 25XA PRIMARY Spin PositionerlnUse Rot Spin Rot PlugNumber 2 StageName URS100CC_ Spindle QW Newport Experience Solutiom 43 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Software Tools 4 9 SYSTEM Manual Configuration Gantries Secondary Positioners This section is for experienced users of the XPS controller and addresses the configuration of a gantry via a secondary positioner A gantry is a motion device where two positioners each of them having a motor an encoder limits etc are used for a motion in one direction Like most gantries the two positioners are rigidly attached to each other see example below Hence all motions including motor initialization homing and emergency stops must be done in perfect synchronization Figure 16 Example of a gantry The XPS controller allows configuring single axis gantries Xx configuration and XY gantries For XY gantries it is possible to define XxY XYy and XxYy configurations Here X and Y refer to the primary positioner and x and y to an assigned secondary positioner
117. XPSDocumentation V 1 4 x EDH0301En1050 08 15 70 Experience Solutions XPS Q8 Controller 6 3 1 6 3 2 6 3 3 6 3 4 6 3 5 6 4 QW Newport Experiences Salvia Motion Tutorial To illustrate this let s consider a typical scanning application If there is an error on the stepping axis of the XY table which is set up as an XY group only the XY table is disabled while the auto focusing tool a vertical stage that is defined as a separate SingleAxis group continues to function Each of the five available motion groups has specific features Specific SingleAxis Group Features Master Slave To enable this function the slaved positioner must be defined as a SingleAxis group The master positioner can be a member of any motion group So it is possible to define a Positioner as a slave of another positioner that is part of an XYZ group Specific Spindle Group Features The Spindle Group is a single positioner group that enables continuous rotations with no limits and with a periodic position reset Master Slave In Master Slave spindle mode the master and the slave group must be Spindle groups Specific XY Group Features Line Arc trajectories XY mapping These features are only available with XY groups It is not possible for an XY group to perform a Spline or a PVT trajectory Also an XY group cannot be slaved to another group however any positioner of an XY group can be a master to a slaved
118. Y end point in that way that the angle discontinuity to the previous segment does not exceed the maximum allowed angular discontinuity The angular discontinuity is measured in degrees and is defined in the head of the trajectory data file In theory a trajectory can be defined only by straight lines if two adjacent line segments have an angular difference smaller than the allowed angle of discontinuity as shown in the Figure 26 Figure 26 Contouring with linear lines only In practice this is not recommended since each angle of discontinuity corresponds to an instantaneous velocity change on both axes which produces large accelerations This can result in a shock to the stages and an increase in the following error The larger the angle of discontinuity the larger the shock and following error will be Special consideration must be given to both these effects when increasing the maximum discontinuity angle from its default value 8 1 5 Define Lines A line element is defined by specifying the Xi Yi ending point The succeeding element s starting point is always the end point of the previous segment Xii Y i1 Note that all line element positions are defined relative to the trajectory s starting point 0 0 X Y Rite Ya Figure 27 Line element to Xi Yi position coordinates As described before when adding a new line element the user must make sure that the discontinuity angle between the new segment and the p
119. Y Axis MyXYGroup Dqpenence Soon a Orte d rra Coreen 11 Enter the positioner names Any positioner name can be used In this example the X positioner name is ILSIS50CC UPPER The home sequence can be either Together or X then Y The other fields refer to the error compensation mapping of the XPS controller see chapter 10 0 for details For the first configuration don t enter anything in these fields 12 Click on VALID to get following screen SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TEF Auto configuration Manual configur System Build Double Axis MyXYGroup Positioner ILS150CC UPPER Use a Secondary Positioner Positioner ILSi50CC_LOWER l Use a Secondary Positioner AD Newport Gies me A enter c Merl Cac ar im 13 Enter the appropriate PlugNumber The plug number is the axis number where the stage is physically connected to the XPS controller Looking at the rear of the controller plug number 1 is the first plug on the right and the number increases to the left 14 Select the StageName from the list of stages These stage names refer to the stages defined with the Web Tool Stage Management 15 Specify the Time Flash Base Frequency value the default is 40e must be between 39 5 e and 40 5 ef Hz 16 Checking the box Use a secondary Positioner assigns a secondary positioner for a gantry configuration For details about gantries please refer t
120. Yo o X y 4 X y 4 Xj Y 4 X Y4 4 At the moment the trajectory is executed the motion group is at the position Xc Yc Zc So the real matrix in absolute coordinates of the motion group is X orx 9X1 Yoriy 07Y1 A ctz Z Xe Ye Ze X cix x Yety y Lotz Z X ax X J eig y1 Zotz Z X orx X Jar f1 Zaz 724 8 2 Trajectory File Example This trajectory example represents a spiral starting from 0 20 0 and ending at 0 20 24 As described before the trajectory s first 5 19 365 1 and last 5 19 365 25 GO Newport Experience Sulam XPSDocumentation V1 4 x EDH0301 En1050 08 15 98 XPS Q8 Controller Motion Tutorial points are only needed to define the start and end conditions of the trajectory Because the second line 0 20 0 is not equal to zero 0 0 0 all points that the motion group will hit during the execution of the trajectory are reduced by this value from the physical starting position of the motion group The original data file is except for the tabs that are only added for better readability 13 229 17 321 19 365 20 19 365 17 321 13 229 0 13 229 17 321 19 365 20 19 365 With this data file the real trajectory points relative to the physical start position of the motion group are first and last lines are eliminated because the motion group will not hit these points and the values from the second column are reduced by 20 as the fir
121. a Physics Solutions to Make Manage and Measure Light tiperexxe Saara a Ove made Application button 3 When done click Save to apply the new values or click Cancel if a mistake was 4 To take the new values into account reboot the controller or use Restart The same screen allows duplicating stages in the stages ini in most case some parameters are modified as a second step or to delete stages from the stages ini 51 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Software Tools 4 12 FRONT PANEL Move The Move page provides access to basic group functions like initialize home or motor disable and executes relative and absolute moves The Move page also provides a convenient review of all important group information like group names group states and positions All motion groups are listed in the Move page NOTE A spindle group can do relative moves and absolute moves So it can be used in the Move page See section 4 14 for more information about Spindle moves Move Submenu FRONTPANEL Menu Positioner name ea pe A Newport SYRTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS DOCUMENTATION Positioner position Aa serada Move Jog Spindle I O view I O set Positioner errors Hardware status Driver status 0 02017 i Initialize MULTI M1 _Go _Go pe gt 0 100743 1 Initialize MULTI M2 _Go _Go ET IE 0 00068 1 Init
122. a gathering new data is appended to a buffer With the functions GatheringCurrentNumberGet and GatheringExternalCurrentNumberGet the current number of data sets in this buffer and the maximum possible number of data sets that fits into this buffer can be recalled The maximum possible number of data sets equals 1 000 000 divided by the number of data types belonging to one data set The function GatheringDataGet index returns one set of data from the buffer Here the index 0 refers to the Ist data set the index n 1 to the n th data set When using this function from the Terminal screen of the XPS utility the different data types belonging to one data line are separated by a semicolon To save the data from the buffer to the flash disk of the XPS controller use the functions GatheringStopAndSave and GatheringExternalStopAndSave These functions will store the gathering files in the Admin Public folder of the XPS controller under the name Gathering dat with function GatheringStopAndSave for internal gathering or GatheringExternal dat with function GatheringExternalStopAndSave for external gathering CAUTION The functions GatheringStopAndSave and GatheringExternalStopAndSave overwrite any older files with the same name in the Admin Public folder After a data gathering it is required to rename or better to relocate valid data files using an ftp link to the XPS controller see chapter 5 FTP connection
123. ance defines the maximum allowed distance from the secondary positioner s ideal position when the primary positioner is at its home position When the actual distance is greater than the value of the End referencing tolerance homing is aborted When the actual distance is less than the value for the End referencing tolerance then the secondary positioner moves to the End referencing position while the primary positioner stays at its home position Hence this parameter corrects the angle between the gantry s X and Y axes QW Newport Experiences Salvin 45 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Software Tools The sketch below illustrates this process Primary Secondary 37 Pos End referencing Position 7 Pos Index difference Initial position 1 Search home of the Secondary positioner The primary positioner follows 2 Search home of the Primary positioner The secondary positioner follows 3 Ifthe distance of the secondary positioner s position to the End referencing position is greater than the value for the End referencing tolerance homing is aborted If not the Secondary positioner moves to the End referencing position while the primary positioner stays at its home position The index difference refers to the difference of the secondary positioner s position when the primary positioner is at its home position to the home position of the s
124. and executes D and E with one tenth of the programmed home search speed In the case when the positioner starts from the other end of the home switch transition the routine is shown in Figure 21 Origin Switch Encoder Index Pulse Figure 21 Home Origin Search from Opposite Direction The positioner moves at the home speed up to the home switch transition segment A and then executes segments B C D and E as in figure 20 QS Newport Experience Solution XPSDocumentation V1 4 x EDH0301 En1050 08 15 76 XPS Q8 Controller Motion Tutorial This home search process guarantees that the last segment E is always performed in the positive direction of travel and at the same reduced speed This method ensures an precise and repeatable reference position There are 7 different home search processes available in the XPS controller 1 MechnicalZeroAndIndexHomeSearch is used when the positioner has a hardware home switch plus a zero index from the encoder This process is the default for most Newport standard stages 2 MechanicalZeroHomeSearch is used with positioners that have a hardware home switch but with no zero index from the encoder 3 IndexHomeSearch is used with positioners that have a home index but with no hardware home switch signal In this process the positioner initially moves in the positive direction to find the index When a limit switch is detected the direction of motion reverses
125. arch process is to define one unique index pulse as the absolute position reference This is first done by finding the home switch transition and then the very first index pulse Figure 19 D E Motion Origin Switch Encoder Index Pulse Figure 19 Slow Speed Origin Switch Search Labeling the two motion segments D and E the controller searches for the origin switch transition in D and for the index pulse in E To guarantee the best repeatability possible both D and E segments must perform at a very low speed and without stopping in between The homing process described above has a drawback At low search speeds the process could take a very long time if the positioner happens to start from the one end of travel To speed things up the positioner is moved fast until it is in the vicinity of the origin switch and then performs the two slow motions D and E at half the home search velocity The new sequence is shown in Figure 20 C D E Motion Origin Switch Encoder Index Pulse Figure 20 High Low Speed Home Origin Switch Search Motion segment B is performed at the pre programmed home search speed When the home switch transition is encountered the motion device stops with an overshoot reverses direction and searches for the switch transition again this time at half the speed segment C Once the switch transition is encountered it stops again with an overshoot reverses direction
126. argetPosition will be 20 8 NOTE When an application requires a sequence of small incremental motion of constant step size close to the encoder resolution make sure that the commanded incremental motion is equal to a multiple of encoder steps The TargetPosition SetpointPosition CurrentPositon and FollowingError can be queried from the controller using the appropriate function calls QS Newport Esperance Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 72 XPS Q8 Controller Motion Tutorial 7 0 Motion 7 1 Motion Profiles Motion commands refer to strings sent to a motion controller that will initiate a motion The XPS controller provides several modes of positioning from simple point to point motion to the most complex trajectories On execution of a motion command the positioner moves from the current position to the desired destination The exact trajectory for the motion is calculated by a motion profiler So the motion profiler defines where each of the positioners should be at each point in time There are details worth mentioning about the motion profiler in the XPS controller In a classical trapezoidal motion profiler trapezoidal velocity profile the acceleration is an abrupt change This sudden change in acceleration can cause mechanical resonance in a dynamic system In order to eliminate the high frequency portion of the excitation spectrum generated by a conventional trapezoidal velocity motion pro
127. art of this function is the integral gain of the PID filter that requires a following error equal to Zero to reach a constant value The encoder in the positioner delivers a discrete signal encoder counts Take the example of an encoder with a resolution of 1 and a target position equal to 1 4 The real position cannot reach the value of the target position 1 or 2 instead of 1 4 so the following error will never be equal to zero closest values are 0 6 and 0 4 Thus due to the integral gain of the PID filter the system will never settle but will oscillate between the positions 1 and 2 The XPS controller avoids this instability while allowing the use of native units instead of encoder counts by using a rounded value of the TargetPosition to calculate the motion profile and a rounded value for the following error But the non rounded value of the TargetPostion will be stored as final position so that there is no accumulation of errors due to rounding in case of successive relative moves To understand the difference consider a positioner with a resolution of 1 that is at the position 0 This positioner receives a relative motion command of 10 4 At the end of the motion the CurrentPosition will be 10 and the SetpointPosition will be 10 but the TargetPosition will be 10 4 The positioner then receives the same relative motion command again At the end of this motion the CurrentPosition will be 21 the SetpointPosition will be 21 and the T
128. ate Network using the Dynamic IP Configuration skip to section 3 7 Connecting the Stages Experience Solution XPSDocumentation V1 4 x EDH0301En1050 08 15 20 XPS Q8 Controller User s Manual 3 5 5 Experiences Salubons Configuring the XPS for Connection to a Corporate Network Using Dynamic IP Configuration It is recommended to ask your IT department to configure the XPS to your network to avoid any issue with your network policies and rules Configure your connection as described in 83 5 3 for REMOTE connection Connect the host plug to your network using a direct cable Get to CONTROLLER CONFIGURATION gt IP management web page Select dynamic IP as shown below Fichier Editon Aff chage Favors Out SYSTEM STAGE CONTROLLER CONFIGURATION IP mane IP management Click the SET button and the following screen appears Message de la page Web x Please reboot controller to apply IP configuration changes call Reboot function on TERMINAL page _ Go to the TERMINAL window double click on the Reboot function then press the Execute button 21 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS QS Controller User s Manual bt EEE TET Li B wes Positoring System r Edw Alae Fai Citi SYSTEM SALI Wr ILI NES Nes dte 5 T ILEN FERONT PANEI TERMINA PUNIR FURCI IONAL TESIS e mI S TA T LUM Revo Function lis
129. ation is equal to the encoder resolution 153 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial For devices with sine cosine 1 Vpp analog encoder interface the resolution is equal to the encoder scale pitch divided by the value of the positioner hard interpolator see function PositionerHardInterpolatorFactorGet Its value is set to 20 by default the maximum allowed value is 200 Please refer to the Programmer s Manual for details The external latch positions require that the device has an encoder No position data can be latched with this method for devices that have no encoder GPIO2 ADC1 to GPIO ADC4 referring to the 4 analog input channels on the GPIO2 The following sequence of functions is used for a trigger based data gathering GatheringExternalConfigurationSet EventExtendedConfigurationTriggerSet EventExtendedConfigurationActionSet EventExtendedStart Other functions associated with event based gathering are GatheringConfigurationGet GatheringCurrentNumberGet GatheringExternalDataGet Please refer to the Programmer s Manual for details Example GatheringExternalConfigurationSet X Y X ExternalLatchPosition GPIO2 ADC1 EventExtendedConfigurationTriggerSet Immediate 0 0 0 0 EventExtendedConfigurationActionSet ExternalGatheringRun 100 2 0 0 EventExtendedStart In this example a trigger based external gathering is started immediately with the function E
130. ation signal The excitation signal function PositionerPreCorrectorExcitationSignalGet can be executed only when the positioner is in the READY state When the excitation signal process is in progression the positioner is in the ExcitationSignal state At the end of the process the positioner returns to the READY state see the group state diagram below The function parameters are Frequency gt 0 1 and lt 0 5 CorrectorISRPeriod 5000 Hz if CorrectorISRPeriod 0 1us Amplitude 0 amplitude of sine excitation signal in unit of position Time gt 0 seconds The verifications of position amplitude SetpointPosition lt MaximumTargetPosition and SetpointPosition 2 Amplitude gt MinimumTargetPosition velocity amplitude gt 0 and lt Maximum Velocity and acceleration amplitude gt 0 and lt MaximumAcceleration must be done in this function The PositionerPreCorrectorExcitationSignalGet function is used to get the parameters previously set with the PositionerPreCorrectorExcitationSignalSet function GO Newport NO Experiences Saulia 195 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial 17 3 3 Group capsule state diagram modification Notes The numbers in the boxes represent the values of the group status Bold transitions are driven by function the others are internal transitions Initial Emergency sto Emergency bra
131. aximumPosition specified with the function PositionerPositionCompareSet are rounded to the nearest detectable trigger position When using the Position Compare function with AquadB encoders the trigger resolution is equal to the EncoderResolution of the positioner specified in the stages ini When using the Position Compare function with AnalogInterpolated encoders the trigger resolution is equal to the EncoderScalePitch defined in the stages ini divided by the interpolation factor defined by the function PositionerHardInterpolatorFactorSet AnalogInterpolated encoder EncoderScalePitch M Optical ruler Figure 48 AnalogInterpolated Encoder Trigger resolution EncoderScalePitch PositionerHardInterpolatorF actor Trigger pulses PositionStep MinimumPosition MaximumPosition Figure 49 Trigger Pulses MinimumPosition MaximumPosition and PositionStep should be multiples of the Trigger resolution If not rounding to the nearest multiple value is made QS Newport Experience Sulam XPSDocumentation V1 4 x EDH0301En1050 08 15 162 XPS Q8 Controller Motion Tutorial 13 3 3 Compensated Position Compare This feature requires hardware boards to be E4323x or later Older hardware will return an error This feature is used to output a pulse each time the stage moves over user predefined positions 13 3 3 1 XPS system of coordinates To explore the details of the XPS coordinate s
132. behavior with methods A method is a function subroutine associated with an object Therefore an object is a software bundle of variables and related methods Encapsulating related variables and methods into a neat software bundle is a simple yet powerful idea that provides two primary benefits to software developers e Modularity The source code for an object can be written and maintained independent of the source code for other objects Also an object can be easily passed around in the system e Hidden information An object has a public interface that other objects can use to communicate with it The object can maintain private information and methods that can be changed at any time without affecting the other objects that depend on it All objects have a life cycle and state diagrams are used to show the life cycle of the objects The transition from one state to another is initiated after receiving a message from another object Like all other diagrams state diagrams can be nested in different layers to keep them simple and easy to read CY Newport Experiences Salubons XPS Q8 Controller Motion Tutorial 6 2 State Diagrams State diagrams are a way to describe the behavior of each group or object They represent each steady state of a group and every transition between states in an exhaustive way State diagrams contain the following components E Initial Point e Final Point Transition Between 2 States
133. bels affixed to the XPS Series Controller Driver This symbol indicates a hazard arising from dangerous voltages Any mishandling could result in damage to the equipment personal injury or even death Figure 3 CE Mark 1 2 3 European Union CE Mark The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified to comply with all current and applicable European Union CE regulations and recommendations Figure 4 ON Symbol 12 4 ON Symbol The ON Symbol in Figure 4 appears on the power switch of the XPS Series Controller Driver This symbol represents the Power On condition O Figure 5 OFF Symbol 1 2 5 OFF Symbol The Off Symbol in Figure 5 appears on the power switch of the XPS Series Controller Driver This symbol represents the Power Off condition QW Newport Experience Salvin 3 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller User s Manual 1 3 1 4 XPSDocumentation V1 4 x EDH0301En1050 08 15 4 Warnings and Cautions The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Situation has the potential to cause bodily harm or death CAUTION Situation has the potential to cause damage to proper
134. bort function on the event After stopping the group is in the READY state Action Parameter 1 to 4 These parameters are 0 by default 11 3 Functions The following functions are related to event triggers XPSDocumentation V1 4 x EDH0301En1050 08 15 142 EventExtendedConfigurationTriggerSet This function configures one or several events In the case of several events the different events are separated by a comma in the argument list Before activating an event one or several actions must be configured with the function EventExtendedConfigurationActionSet Only then the event and the associated action s can be activated with the function EventExtendedStart EventExtendedConfigurationTriggerGet This function returns the event configuration defined by the last EventExtendedConfigurationTriggerSet function EventExtendedConfigurationActionSet This function associates an action to the event defined by the last EventExtendedConfigurationTriggerSet function EventExtendedConfigurationActionGet This function returns the action configuration defined by the last EventExtendedConfigurationActionSet function EventExtendedStart This function launches activates the last configured event and the associated action s defined by the last EventExtendedConfigurationTriggerSet and EventExtendedConfigurationActionSet and returns an event identifier When activated the XPS controller checks for the ev
135. configuration The details of the different event triggers are separated by a comma Esperance Salvin XPS Q8 Controller Motion Tutorial 11 4 GO Newport Experience Solytions Examples Below is a table that shows possible events that can be associated with possible actions Some of these examples however may have unwanted results Since the XPS controller provides great flexibility to trigger almost any action at any event the user must be aware of the possible unwanted effects Possible events Possible actions Always Toggle digital output Immediate Generate pulse on digital output e Motion start gt Set digital output Motion end E Copy setpoint position to analog output Motion state Bin a Analog output setpoint position gain offset Constant velocity start E Copy setpoint velocity to analog output Constant velocity end Analog output setpoint velocity gain offset Constant velocity state Copy setpoint acceleration to analog output o Analog output setpoint acceleration gain offset Trajectory element start Start TCL script Trajectory element state Start data gathering 1 Possible but probably with unwanted 2 Possible but will copy only ONE result Will always toggle the digital value to the analog output that will output while the group is in motion remain the same Figure 46 Possible Events Examples 1 EventExtendedConfigurat
136. ctions e GrouplInitialize XY Z e GroupHomeSearch XY Z e GroupMoveAbsolute XYZ 3 1 1 The mapping files must at least cover the minimum and the maximum travel of the XYZ group they must cover the MinimumTargetPosition and the MaximumTargetPosition for the X Y and Z positioners parameters defined in the stages ini see section Travels So in the above example the travel of the X and Y positioners can not be larger than 3 units and the travel for the Z positioner can not be larger than 1 unit But the travel can be smaller than these The unit of the data is the same as defined by EncoderResolution in the stages ini The data reads as follows at position X Y Z 3 00 2 00 1 00 the corrected X position is 2 99848 units 3 00 0 00152 the corrected Y position is 2 9989 units 3 00 0 00110 and the corrected Z position is 3 0002 units 3 00 0 0002 Between two datas the XPS controller does a linear interpolation of the error The three mapping files for X Y and Z don t need to contain the same X Y and Z positions NOTE Mapping is a function implemented in the XPS controller to correct errors But when mapping is activated it is transparent to the user At position X Y Z 3 00 1 00 1 00 the function GroupPositionCurrentGet XY Z X doesn t return 3 00333 3 00 0 00333 but returns 3 10 6 Yaw Mapping PP Firmware Version Only During an XY move due to surface flatness errors in the base the Theta
137. ctly accessible In these cases define the first part of the argument name then click in the field again and define the second part of the argument name See the example below for defining the GatheringType with the function GatheringConfigurationSet Step 1 Select the positioner name and click I Functidn argument s GatheringConfigurat Configulation acquisition char Typel 251 R URS Y 10 XY Y SetnointPositian CurrentPasitian FollowingError SetpointVeloaty Setpaint amp cceleratian CurrentVelocity CurrentAcceleratian CarrecterOutput GPIO1 DI GPIO1 DO0 GPIO2 DI GPIO3 DI GPIO3 DO Experiences Solutiom Step 2 Click in the choice field again Select parameter name and click Function argument s GatheringConfigurationset Configuration acquisition char Type 251 XY X v XY X R URS100 XY X SetpointPosition CurrentPosition FollowingError SetpointVelocty Setpaint amp ccelaratian Current elacity Current amp cceleratian CarrectorQutput GPIOL DI GPIO1 DO GPIO2 DI GPIO3 DI GPIO3 DO Step 3 To add another parameter press ADD Repeat step 1 and step 2 Function argument s GatheringConfiguration Configuration acquisition char Type 251 XY X SetpointFosition Edit char Tyvpe 251 57 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Software Tools 3 When all arguments are defined click OK Now review the final
138. ctor 200 then the ScanVelocity must lt 62 5 x 10 0 004 200 1 25 mm s otherwise the PCO will not work properly 13 3 2 Even Distance Spaced Pulses Position Compare In the even distance spaced pulse configuration one first output pulse is generated when the positioner enters the defined position window This is independent of the positioner entering the window from the minimum position or from the maximum position From this first pulse position a new pulse is generated at every position step until the stage exits the window NOTE To make sure that the trigger pulses are always at the same positions independent of the positioner entering the window from the minimum or from the maximum window position the difference between the minimum and the maximum window position should be an integer multiple of the position step The duration of the trigger pulse is 200 nsec by default and can be modified using the function Positioner PositionComparePulseParametersSet PositionerName PCOPulseWidth EncoderSettlingTime Possible values for PCOPulseWidth are 0 2 default 1 2 5 and 10 us Please note that only the falling edge of the trigger pulse is precise and only this edge should be used for synchronization irrespactable from the PCOPulseWidth setting Note also that the duration of the pulse detected by your electronics may be longer depending on the time constant of your RC circuit Successive trigger pulses should have a minimum t
139. ctuator by actuator This function works only after an XY LineArcVerification e XYLineArcExecution Executes a trajectory e XYLineArcParametersGet Returns the trajectory s current execution parameters This function works only while executing the trajectory The function XYLineArcVerification can be executed at any time and is independent from trajectory execution This function performs the following e Checks the trajectory file for data and syntax coherence e Calculates the trajectory limits which are the required travel per positioner the maximum possible trajectory velocity and the maximum possible trajectory acceleration This function defines the parameters for trajectory execution e fall is OK it returns an OK 0 Otherwise it returns a corresponding error The function XYLineArcVerificationResultGet can be executed only after an XYLineArcVerification and returns the following e Travel requirement in positive and negative direction for each positioner e The maximum possible trajectory velocity speed that is compatible with all positioner s velocity parameters It returns a value for the trajectory velocity that when applied at least one of the positioners will reach its maximum allowed speed at least once along the trajectory ies between Min V max actuator and yolocity desitionerMaximam Velocity However this value does not take into account the positioners s acceleration which can a
140. d are used for homing the stage to a repeatable location Ground reference for encoder feedback This input is pulled up to 5 V with a 2 2 kQ resistor by the controller The Origin signal originates from the stage and is used for homing the stage to a repeatable location 5 V DRV01 250 mA Maximum A 5 V DC supply is available from the driver Limit ground Shield GND This supply is provided for stage home index travel limit and encoder feedback circuitry Ground for stage travel limit signals Limit ground is combined with digital ground at the controller side Motor cable shield ground Brake available only on DRVM board Voltage command 24 V or 48 V strap on the driver board to drive the brake Brake available only on DRVM board Reference of the above voltage command Tachometer amp Tachometer These inputs are used to receive tachometer voltage information This voltage depends on the output voltage rating of the employed tachometer Three phase AC brushless driver XPS DRV02 DRIVER 1 TO 8 DRIVER 1 TO 8 5 A Mating connector T 5 Mating connector looooo Male DBS 00000 Female DB9 9 0000 F with UNC4 40 lockers a 0000 g with UNC4 40 lockers PIN Function 1 Z 3 4 5 6 B 9 PIN X Function Travel limit Travel limit Origin N C 5V Thermistor GND Thermistor GND Phase U Phase U Phase V Phase V Thermistor Phase W Phase VW GND Thermisto
141. d system initialization in1 files Below is an example of a typical stage and the type of DriverName MotorDriverInterface and CorrectorType each is assigned These standard Newport settings will be optimal for virtually every application and users would only need to modify their corrector loop parameters Kp Kd K1 to optimize positioner performance Similar configurations can be adopted for non Newport stages that are of similar motor driver types Stages with high current gt 3 A DC motor RV IMS with tachometer or back emf estimation DriverName XPS DRVO01 03 10 V Input gives ScalingVelocity stage velocity Speed loop amp Current loop configured by hardware MotorDriverInterface AnalogVelocity CorrectorT ype PIDFF Velocity for Speed loop and PIDFFAcceleration for current loop Stages with DC motor driven through a current loop RGV no tachometer DriverName XPS DRV02 10 V Input gives ScalingAcceleration stage acceleration Current loop configured by hardware MotorDriverInterface AnalogAcceleration CorrectorType PIDFFAcceleration Stages with low current 3 A DC motor amp tachometer VP DriverName XPS DRVOI in velocity mode Input 1 10 V results in ScalingVelocity theoretical stage velocity Input 2 10 V results in ScalingCurrent 3 A Speed loop programmable MotorDriverInterface AnalogVelocity CorrectorType PIDFFVelocity Stages with low current
142. dded safety a programmable over current protection setting 1s also available 7 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller User s Manual The XPS DRV02 is a software configurable PWM amplifier for 3 phase brushless motors It has been optimized for performance with XM ILS LM IMS LM linear motor stages and RGV direct drive rotation stages The XPS DRV02 supplies a 100 kHz PWM output with a maximum output current of 5 A per phase and 44 Vpp The XPS DRV02 requires 1 Vpp analog encoder input signals used also for motor commutation Motor initialization is done by a special routine measures the magnetic position without the need for Hall or other sensors The XPS DRVO3 is a fully digital programmable PWM amplifier that has been optimized for use with high performance DC motors The high switching frequency of 100 kHz and appropriate filter technologies minimize noise to enable ultra precision positioning in the nm range The XPS DRV03 supplies a maximum current of 5 Amps and 48 Volts It is capable of driving DC motors in velocity mode for motors with tachometer in voltage mode for motors without tachometer and in current mode for torque motors All parameters are programmable in physical units for instance the bandwidth of the velocity loop Furthermore the XPS DRV03 features individual limits for the rms current and the peak current The XPS DRVPI is a programmable driver card for Newport s NanoPositioni
143. digital output GPIO3 to 0 Once checked the line arc trajectory defined in the Linearc2 trj file gets executed with a velocity of 10 units sec and an acceleration of 70 units s When this trajectory starts more precisely when the positioner of the X axis starts moving the bits 2 4 and 6 of the output GPIO3 are set to 1 42 101010 D01 DO2 D03 DO4 DOS5 DOG evro OC O e Qutput set to 1 C Output set to 0 NOTE Selecting the function TCLScriptExecute from the terminal menu opens a drop down list for the available TCLFileNames However this list is limited to 100 entries To learn more about TCL programming refer to the TCL Manual accessible from the documentation menu of the XPS web site The TCL manual provides a complete description of all TCL commands and some more complex examples of TCL scripts LabVIEW LabVIEW is one of the most popular programming languages used with the XPS controller Newport provides a complete set of LabVIEW drivers for the XPS controller Refer to the XPS Q8 LabVIEW Manual pdf and the XPS Q8 ProgrammerManual pdf for additional details on implementing LabVIEW with the XPS and the location of the drivers 199 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial 18 3 DLL Drivers A DLL simplifies function calls from most programming languages The DLL of the XPS controller is located in the Admin Public Drivers DLL folder of the XPS co
144. dministrator Rights Administrator There are two possibilities to configure the controller Auto configuration and manual configuration Auto Configuration is the simplest method to configure the controller but has some limitations e Auto configuration works only with Newport ESP compatible positioners e Auto configuration configures all detected positioners as single axis groups However single axis groups provide limited functionality no synchronized motion no trajectories no XY or XYZ compensation To take full benefit of the capabilities of the XPS controller a manual configuration is needed e For non Newport stages or very old Newport stages manual configuration is required See document ConfigurationWizard pdf for details This document is accessible from the XPS web tools under the tab DOCUMENTATION e Manual configuration is also required for some vacuum compatible stages no ESP chip and for stages with adjustable home position 1 0 1 if the home position is changed from the standard position 0 to 1 or 1 The positions 1 and 1 require different settings in the stage data base as the home switch position is not recognized by the ESP chip XPSDocumentation V1 4 x EDH0301 En1050 08 15 28 Experience Solutions XPS QS Controller User s Manual 3 8 1 Auto Configuration When logged in as Administrator select SYSTEM then Auto configuration The following screen appears SYSTEM STAGE CONTROLLER
145. dth time times two The signals are open collector type and accept up to 30 Volts and 40 mA The 5V output provided on the PCO connector can be used to pull up these outputs and can supply 50 mA max NOTE To ensure fast transitions with an open collector it is necessary to have enough current to speed up the transistor s junction capacitor charge discharge A good value is around 10 mA So to pull up the PCO signals to 5 V a 470 Q resistor can be used Refer to section B 1 Digital I Os Digital Outputs for detailed electrical description XPSDocumentation V1 4 x EDH0301 En1050 08 15 212 powimo Sunt XPS Q8 Controller Appendix 24 0 Appendix F Motor Driver Cards 24 1 DC and Stepper Motor Driver XPS DRV01 DRIVER 1 TO 8 43 3 1 Mating connector lOOOOOOOODOOOO Male DB25 with UNC4 40 lockers 25 000000000000 44 Function Function D C MOTOR STEPPER MOTOR D C MOTOR STEPPER MOTOR Tachometer Ph 1 Index Index Tachometer Ph 1 Limit ground Limit ground Tachometer Ph 2 Travel limit Travel limit Tachometer Ph 2 Travel limit Travel limit Motor Ph 3 Encoder A Encoder A Motor Ph 3 Encoder B Encoder B Motor Ph 4 E 5W 5W Motor Ph 4 2 Encoder ground Encoder ground Reserved Common 3 amp 4 Encoder A Encoder A Reserved Common 3 amp 4 Encoder B Encoder B Reserved Common 1 amp 2 lindex index Reserved Common 1 amp 2 Origin Origin Shid GND Shid GND 1 2 3 4 5
146. e TZInUse TZ MultipleAxesInUse MULTI MULTI PositionerInUse M1 M2 M3 AD Newport S Spectra Physics Solutions to Make Manage and Measure Light tipererce Sanoa A Orten d Nm Conner 2 Enter the name for each positioner associated with the motion group StepAxis and ScanAxis in this case Define the home sequence Together or XThenY or Y ThenX For error compensation define the name and structure of the correction data otherwise leave these fields blank For details about error compensation see chapter 10 0 When done click on VALID to accept the configuration SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL T EXO Newport Auto configuration Manual config System Build XY Axis My_XY_Group AD Newport Gney tiperesce Sowtora A rete c Mero Corgi atin 3 Specify the plug number The plug number is the number of the drive card 1 to 8 where the stage 1s physically connected to the XPS controller see back of XPS controller Select the name of the Stage from the stage data base scroll down menu Checking the box Use a secondary Positioner assigns a secondary positioner for a gantry configuration A gantry is a motion device where two positioners each of them having a motor an encoder limits etc are used for a motion in one direction DM 41 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Software Tools Like most gantries the
147. e whole motion group GroupName independent of its definition as a SingleAxis group a Spindle group an XY group an XYZ group or a MultipleAxes group Within the system configuration file system ini select the home sequence as sequential one positioner after the other or in parallel with all positioners homing at the same time With a single function such as GroupMoveAbsolute GroupName Position the whole motion group GroupName is moved synchronously to the defined absolute position where Position may be one or more parameters depending on the number of positioners this motion group contains This same command can be used to move a single positioner of a group to an absolute position by using the syntax GroupMoveAbsolute GroupName PositionerName Position1 These powerful object oriented functions are not only extremely intuitive and easy to use they are also more consistent with other programming methods and reduce the number of commands learned compared to traditional mnemonic commands Another benefit provided by motion groups is improved error handling For instance whenever an error occurs due to a following error or a loss of the end of run signal only the motion group where the error originated is affected disabled while all other motion groups remain active and enabled The XPS manages these events automatically This greatly reduces complexity and improves the security and safety of sensitive applications
148. e Internet It works in the same way as HTTP for transferring web pages from a server to a user s browser and SMTP for transferring electronic mail across the Internet FTP uses the Internet TCP IP protocol to enable data transfer An FTP connection is needed to view the information saved in the XPS controller to download documentation to transfer configuration files to modify them locally to transfer TCL scripts etc To connect to the FTP server e Start the XPS controller and wait until the boot sequence completes e Open an Internet browser window Windows explorer is another option to access the files e Connect to the FTP server with the IP address of the controller Example G C3 v H Internet 19216833233 e Select File from the menu of the Internet browser and then Connect as The following window appears QW Newport Experiences Saulia 63 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS QS Controller Software Tools qe To log on to this FTP server type a user name and password FTP server 192 168 254 254 User name Administrator Password seeeeeeceesaee After you log on you can add this server to your Favorites and return to it easily A FTP does not encrypt or encode passwords or data before sending them to the server To protect the security of your passwords and data use WebDAV instead F Log on anonymously 7 Save password Log On Specify the us
149. e above The enable window is displayed in ch1 and the pulses in ch2 Tek PreVu m D cl mee pede l 234v je 6 20V Lire TV WE bin pede iier T anis ES zi E 17 Jun 2005 15 10 00 14 13 04 At position 5 mm the position compare output functionality becomes active and the first pulse is generated Then pulses are generated every 2 um which equals a time span of 100 us at a speed of 20 mm s 2 um 20 mm s 100 us Tek Prevu M 20 0ys D cl T A 2 24V 6 20V SANS I NIA pe Nh AEN VD I Nn ISIN or Maa nM Ie P hiii PA e PRINCI a NA Na fte NITE P 2 z L 4 a ar a ar P oo dnd Va P IS mm AN aei tnn tna LR eg Pa f rere Bast oil mats o apod etna gt i T a 3 uoi eut I nog rcx s MP DP See SRD BP TDA 1 bedl ndi a lad od nas oa bad od aii oaas ad oa mi a bad d a aaa ied alaa aa bai a wae as bai na a a baind as as and nde aan laat a ae s Mai a i A Tad aa i 17 Jun 2005 i 101 340ps 14 16 13 This second picture shows a zoom of the second pulse The duration of the pulse should be 200 ns however the pulse duration can be longer as the rising edge is related to the Experience Solutio 161 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial time constant of the RC circuit used Please note that only the falling edge of the pulse is precise and should be used for synchronization purposes NOTE The parameters PositionStep MinimumPosition and M
150. e at Ki Fral 2 7 QS Newport Esperance Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 184 XPS Q8 Controller Motion Tutorial 15 0 Analog Encoder Calibration This section refers only to analog sine encoder inputs The purpose of the analog encoder interpolation feature 1s to improve the stage accuracy by detecting and correcting analog encoder errors such as offsets sine to cosine amplitude differences and phase shift Other kinds of errors can exist in the encoder such as impure sine or cosine signals This feature will not compensate for them and will disturb the results of the calibration process Also this calibration process assumes that the errors are small i e less than a few percent Below are figures and numbers to illustrate the type of errors and their impact on accuracy Offset Error Error when 1 of sine or cosine offset 96 Period Encoder Period Figure 59 Offset Error The offset error generates 0 32 interpolation error per percent offset on the sine or cosine signals With a 20 um scale pitch 1 sine offset generates 63 5 nm peak to peak interpolation error Note The real signal is not always symmetrical to 0 The offset error is defined as the difference between the signal s horizontal axis where it is symmetrical and 0 Amplitude Mismatch Error when 1 amplitude difference Lf TONNE 4 Encoder Period 95 Period 0 Figure 6
151. e by the servo loop result in a voltage output from the controller that is applied to the driver which can be either any of Newport s Universal drive modules or to an external driver through the XPS pass through module Depending on the corrector loop type selected the level of this output voltage can be the result of two gain factors the PID corrector and the FeedForward loop The XPS has imbedded configuration files that provide optimized corrector loop settings for all Newport stages Non Newport stages may need to be assigned a specific corrector loop setting during the set up process In addition to the two main gain loops the XPS also adds filtering and error compensation parameters to this servo loop to improve system response and reliability The profiler Trajectory Generator within the controller calculates in real time the position velocity and acceleration deceleration that the positioner must follow to reach its commanded position Setpoint Position This profile is updated at a rate of 2 5 kHz The PID corrector then compares the SetpointPosition as defined by the profiler and the current position as reported by the positioner s encoder to determine the current following error The PID corrector then outputs a value that the controller uses to maintain increase or decrease the output voltage which is applied to the driver This loop is updated at a rate of 8 kHz The adjustment of the PID parameters allows users to optimiz
152. e eee E SUUS 3 WY i AI AMOS ate thc emet scoters ents bax a a E a Re Danse 4 LA General Warnings and Cautions ixcs ccasteseasdevadeasancedensdendeceanbeseasdeaadeasca ATENEA EEANN EAA NANENANE 4 2 0 Sy CONOEVIOM Guided eer eeieieietis ie cece eiboi iive cau sc etsi eL eredi iei eeeiaedi 6 2S NE gt 6 eiie TREE Uem 6 PEE P uci eut RTT 7 2 3 Compatible Newport Positioners and Drive Power Consumption esses 8 DA APS Hardware OVENI CW se ssacoeteontcancwnunaaiasonnanantaunenetmota aE IE iE A E ENEE 9 25 TrontPanel Description oen iure inner saves e anaE naa AA EENAA ETIKA e ANENA AANSEN NAE a Aie 9 20 Rear Panel DeSCEIDUORB serranon T EER 10 2 6 1 Axis Connectors AXIS 1 AXIS 8 nennen ene 10 27 iai OROSII CLER TRE 11 2 7 1 Communication Protocols esssssssssseeeene nennen eene nnns 11 2S MEN RIS D RTT RRRORENTOROERN 12 2 8 Sockets Multitasking and Multi user Applications eene 12 PA MEM us accorto Ee ro 12 GO Newport NO Experiences Salvia ivs iii XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Universal High Performance Motion Controller Driver S0 CUETO AE E 14 3 Unpacking and Hendlffg orcino neen NEESER Din PER AUR PEE Re MR BERT RUMP Ni 14 3 2 Inspection for Damage ccceeeeeceseeesssssseessessssssssssssssssssssssssssesssssssssessssssssssssessaaassaaaaaaaaaas 14 DENEN E M nee AA A A I ee ne 14 IA OV SUMMA SCUD errendi AAA E E
153. e function XYZSplineExecution with the parameters for the trajectory velocity and the trajectory acceleration the trajectory acceleration that is used during the start and the end of the trajectory The motion profile for spline trajectories is trapezoidal The function XYZSplineExecution does not verify the trajectory s coherence or geometric conditions exceeding any positioner s min or max travel speed or acceleration before execution so users must pay attention when executing a trajectory without verifying the trajectory the maximum possible values In case of an error during execution because of bad data or because of a following error for example the trajectory acceleration or speed was set too high the motion group will make an emergency stop and will go to the disabled state The parameters for trajectory velocity and trajectory acceleration can also be set to zero In this case the controller uses executable default values which are the Min AIl V max actuator for trajectory velocity and Min All Ama actuator for trajectory acceleration Finally the function XYZSplineParametersGet returns the trajectory execution status with trajectory name trajectory velocity trajectory acceleration and current executed trajectory element This function returns an error if the trajectory is not executing QS Newport Esperance Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 100 XPS Q8 Controller Motion Tutorial 8
154. e of the XPS controller is that it automatically adapts the jerk time to the step width by defining a minimum and a maximum jerk time This auto adaptation of the jerk time allows a perfect adjustment of the system s behavior with different motion step sizes NOTE Because of jerk controlled acceleration any move has a duration of at least four times the jerk time For the XPS controller the following parameters need to be configured for the SGamma profile e MaximumVelocity units s e MaximumAcceleration units s e EmergencyDecelerationMultiplier Applies to Emergency Stop e MinimumJerkTime s e MaximumJerkTime s The above parameters are set in the stages ini file for a positioner When using the XPS controller with Newport stages these parameters are automatically set during the configuration of the system The velocity acceleration and jerk time parameters is modified by the function PositionerSGammaParametersSet Example PositionerSGammaParametersSet MyGroup MyStage 10 80 0 02 0 02 This function sets the positioner MyStage velocity to 10 units s acceleration to 80 units s and minimum and maximum jerk time to 0 02 seconds The set velocity and acceleration must be less than the maximum values set in the stages ini file These parameters are not saved if the controller is shut down After a re boot of the controller the parameters will retain the values set in the stages ini file In actual use the
155. e proof method for initialization than the default initialization process which applies only very small oscillations to the stage during initialization 4 9 3 Gantries with linear motors and variable force ratio For XY gantries where the two X axes are driven by linear motors meaning driven in acceleration mode it is also possible to apply a variable force ratio for the two X axes positioners This variable force ratio accounts for the different forces required by the primary and the secondary X axes positioner depending on the position of the Y axis When correctly set it ensures a torque free acceleration and deceleration of the X axis see picture below for illustration Axe X Ace Y To apply a variable load ratio to an XY gantry check the box Use a force ratio during the group definition See example below There are three parameters to input e Y Offset for force ratio e Primary Y Motor Force Ratio e Secondary Y Motor Force Ratio A correct definition of these three parameters is not simple For additional information about this function please call Newport GO Newport Experience Solutiom 47 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Software Tools SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL YW Newport System Build Double Axis XY Positioner X o Puger do IV Use a Secondary Positioner Positioner X SecondaryPositioner omeemveme O me
156. e remainder of the original warranty period or 90 days whichever comes first Limitation of Warranty The above warranties do not apply to products which have been repaired or modified without Newport s written approval or products subjected to unusual physical thermal or electrical stress improper installation misuse abuse accident or negligence in use storage transportation or handling This warranty also does not apply to fuses batteries or damage from battery leakage THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES EXPRESSED OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE NEWPORT CORPORATION SHALL NOT BE LIABLE FOR ANY INDIRECT SPECIAL OR CONSEQUENTIAL DAMAGES RESULTING FROM THE PURCHASE OR USE OF ITS PRODUCTS Copyright 2015 by Newport Corporation Irvine CA All rights reserved No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual is provided for information only and product specifications are subject to change without notice Any change will be reflected in future printings Experencs Salvin XPSDocumentation V1 4 x EDH0301En1050 08 15 X XPS Q8 Universal High Performance Motion Controller Driver EU Declaration of Conformity SAAB BIO X ka ur v Gr OPS OPES OP SOS T AN XPS o Year C mark affixed 2015 Experience Solutions Q K e e EU Declaration of Conformity
157. e the performance of their positioner or system by increasing or decreasing the responsiveness of the output to increasing or decreasing following errors Refer to the section 14 3 on PID tuning for more information and tips on PID tuning The PID corrector loop and trajectory generation loop rates have been optimized to provide the highest level of precision In most applications the critical control loop is the PID corrector since it has the most significant impact on positioning performance Because of this the PID loop is updated 4 times 10 2 5 during each profiler cycle to improve profile execution and minimize following errors The Feed Forward gain generates a voltage output to the driver that is directly proportional to the input The purpose of this gain is to generate a movement of the positioner as close as possible to the desired move that 1s independent of the encoder feedback loop Adding this Feed Forward gain can help reduce any encountered following errors and thus requires less compensation by the PID gain corrector For QW Newport Experience Solutio 171 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial example if a driver and positioner respond to a constant voltage by moving at a constant speed then feed forward input would be dictated by the SetpointSpeed The XPS stores standard Newport stage configuration files that can be used to quickly and easily develop the stage an
158. e tools of the XPS controller It also includes an introduction to FTP connections and some general guidelines for troubleshooting maintenance and service 4 Software Tools 5 FTP connection 6 Maintenance and Service The third part provides an exhaustive description of the XPS architecture its features and capabilities Complementing the programmer s guide this part is educational and is organized by features starting with the basics and getting to the more advanced features It provides a complete list of descriptions of different features including 7 XPS Architecture 8 Motion 9 Trajectories 10 Compensation 11 Event Triggers 12 Data Gathering 13 Triggers 14 Control Loops 15 Analog Encoder Calibration 16 Introduction to XPS programming XPSDocumentation V1 4 x EDH0301 En1050 08 15 2 Experience Soter XPS Q8 Controller User s Manual 1 2 Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the XPS Series Controller Driver where safety related issues occur 1 2 1 General Warning or Caution Figure 1 General Warning or Caution Symbol The Exclamation Symbol in Figure 1 may appear in Warning and Caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible 1 2 2 Electric Shock Figure 2 Electrical Shock Symbol The Electrical Shock Symbol in Figure 2 may appear on la
159. econdary positioner The value for the Index difference can be queried by the function PositionersEncoderIndexDifferenceGet When no other metrology tools are available the following method can be used to determine a value for the End referencing position of an assembled gantry Set the value for End referencing position and End referencing tolerance to 0 Complete the configuration of your system After reboot initialize and home the gantry group With high probability the homing will fail with error 85 due to the zero value for the End referencing tolerance Query the index difference with the function PositionersEncoderIndexDifferenceGet Repeat the initialization homing and querying of the index difference several times and build the average and the standard deviation from all values Now configure a new system with the same gantry For End referencing position apply the average value of the index difference For End referencing tolerance apply a value that is approximately equal to 6 times of the standard deviation of the index difference Complete your configuration and reboot your system Initialize and home the gantry group several times to confirm the gantry is working properly 4 9 2 Gantries with linear motors The parameter Offset after initialization defines the offset of magnetic tracks of the linear motors between the primary and the secondary positioners This parameter is important to
160. ection you can change the IP configuration of the controller in order to connect the XPS over a Network Select CONTROLLER CONFIGURATION of the web site and select the sub menu IP Management SYSTEM STAGE CONTROLLER CONFIGURATION FRONT Pi QA Newport IP management U IP management Solutions to UI The static IP address the subnet mask and the Gateway IP address must be provided by your Network Administrator to avoid network conflicts Once you have these addresses you can input them in the IP configuration window as shown above The above shown addresses are only examples zac 19 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller User s Manual NOTE To avoid conflict with the REMOTE Ethernet plug the IP address must be different from 192 168 254 NOTE For the majority of Networks the setting above for the Subnet Mask will work However for larger networks 200 computers or more the Subnet Mask address must be verified with the IT department In most cases and for larger networks the Subnet Mask is set to 255 255 0 0 Once the appropriate addresses for the Static IP configuration are set click on SET and the following screen appears Message de la page Web Please reboot controller to apply IP configuration changes call Reboot function on TERMINAL page Go to the TERMINAL window and double click on Reboot function then press the Execute button SYSTEM STAGE CO
161. ectory elements segments are available lines Line X Y and arcs Arc R A Radius SweepAngle Any Line arc trajectory is a set of consecutive line or arc segments The line segments are true linear interpolations y A x B the arc segments are true arcs of circles x x0 y yO R A Line arc trajectory forms a continuous path so each segment s final position is equal to the next segment s starting position However as the segment s tangential angles around the connection point of any two consecutive segments may not be continuous there might be velocity discontinuities from one segment to next For reference this discontinuity is categorized as RO wherein the position is continuous but velocity is not An excessive velocity discontinuity at joints can damage the stages so the trajectory definition process must take this into account Each Line arc trajectory element is defined relative to the trajectory starting point Every trajectory starting point has the coordinates 0 0 which has no relation to the Zero position of the positioners AII trajectories physically start from the current X and Y positions of the XY group 8 1 3 Geometric Conventions The coordinate system of a Line arc trajectory is an XY orthogonal system The X axis of this system correlates to the XPositioner and the Y axis correlates to the Y Positioner of the XY group as defined in the system in1 The origin of the XY coordinate system is in the
162. ed Trigger Based External Data Gathering The trigger based data gathering allows acquiring position and analog input data at receipt of an external trigger input TRIG IN connector at the XPS see section 26 0 for more details The position data is latched by dedicated hardware The jitter between the trigger signal and the acquisition of the position data is less than 50 ns The analog inputs however are only latched by an internal interrupt at a rate of 8 kHz and the XPS will store the most recent value Hence the acquired analog input data might be up to 125 us old NOTE There must be a minimum time of 125 us between two successive trigger inputs The data of the trigger based external data gathering is stored in a file named ExternalGathering dat which is different from the file used for the internal data gathering Gathering dat Hence internal and external data gathering can be used at the same time The function GatheringExternalConfigurationSet defines which type of data will be gathered and stored in the data file The following data types can be collected PositionerName ExternalLatchPosition and PositionerName SecondaryPositioner ExternalLatchPosition for secondary positioners of gantries see chapter 4 9 for details These positions refer to the uncorrected encoder position meaning no error corrections are taken into account For devices with RS422 differential encoders the resolution of the position inform
163. ed forward gain is set to 1 PID corrector QW Newport Experience Solutions 179 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial 14 3 2 2 XPSDocumentation V1 4 x EDH0301 En1050 08 15 180 e Output of the PID is an acceleration value in units s Kp is given in l s Ki is given in 1 s3 Kd is given in 1 s Filtering and Limitation e ScalingAcceleration units s is the theoretical acceleration of the stage resulting from a 10 V input to the driver depends on the stage payload e AccelerationLimit units s is the maximum acceleration allowed to be commanded to the driver Basics The derivative term Kd drives the cut off frequency of the closed loop and must be adjusted first the loop will not be stable with only Kp Due to the double integration of the acceleration command in a position by the stage encoder the overall gain of the derivative path at a given frequency Frq is equal to Kd 2nFrq This gain is equal to one at FrqD Kd 2z close to servo loop cut off frequency This frequency must remain lower than the cut off frequency of the current loop of the driver and lower to mechanical natural frequencies to keep the stability The proportional gain Kp drives mainly the capability of the closed loop to overcome perturbations at medium frequencies and to limit following errors Due to the double integration of the acceleration command in a position by the
164. ed to a SinCos encoder AnalogInterpolated the AquadB configuration essentially provides an image of the encoder signals on the PCO connector In the time flasher configuration an output pulse is generated when crossing a defined position and a new pulse is generated at a defined time interval until a maximum position has been reached In some cases this mode can provide an even more precise synchronization of the motion to an external tool in particular if the variation of the speed multiplied with the time interval is smaller than the error of the encoder signals during the same period Dedicated hardware is used to check the position crossing and the time interval to attain less than 50 ns latency between the position crossing and the trigger output For the distance spaced pulses configuration time flasher configuration or AquadB signals on PCO connector configuration it is recommended to calibrate the position compare before all PCO pulses generation It is also recommended to set the position compare hardware to the scanning range you intend to use to get the best performances refer to Section 13 3 for details In addition and independent from the above the XPS controller can output distance spaced pulses on Line arc trajectories and time spaced pulses on PVT trajectories In these cases the distances time intervals are checked on the servo cycle and a resolution of 100 us is provided 13 1 Triggers on Line Arc Trajectories Th
165. ed to the PID output would be 0 5 x the maximum set output However if the Ki gain factor output is less than 0 5 x the maximum set output then the entire gain will be applied to the PID corrector This maximum output is set within the section MotorDriverInterface in the stages ini using the parameters AccelerationLimit VelocityLimit or VoltageLimit Refer to the Programmers manual for more information on this function Integration Time The IntegrationTime is used to adjust the duration for integration of the residual errors This can help in applications where large following errors can occur during motion The 175 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial 14 1 2 5 XPSDocumentation V 1 4 x EDH0301En1050 08 15 176 use of a small Integration Time value will limit the integration range to the latter parts of the move avoiding the need of a large overshoot at the end of the move to clear the integrated following error value The drawback is that the static error will be less compensated Variable Gains In addition to the classical Kp Ki and Kd gain parameters the XPS PID Corrector Loop also includes variable gain factors GKp GKd and GKi These can be used to reduce settling time on systems that have nonlinear behavior or to tighten the control loop during the final segment of a move For example a positioner or stage with a high level of friction will have a response wh
166. ee LI lI lI lI lI lI l3 l3 lI ll This file represents the following data Time Axis 1 Axis 1 Axis 2 Axis 2 Period s Displacement Velocity Out Displacement Velocity Out 1 0 10 10 7 0833 8 75 1 0 10 10 9 5833 10 1 0 9 5833 8 75 10 10 1 0 7 0833 5 10 10 1 0 2 9167 1 25 10 10 1 0 0 4167 0 10 10 1 0 9 5833 1 0 7 0833 1 0 2 9167 1 0 0 4167 Table 1 The trajectory data file Position Units seconds Experience Solytions 105 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial Velocity Units s seconds Figure 34 Executing the trajectory data file with the PVT algorithm 8 3 8 PVT Trajectory Verification and Execution Here are four functions to verify or execute a PVT trajectory e MultipleAxesPVTVerification Verifies a PVT trajectory data file e MultipleAxesPVTVerificationResultGet Returns the results of the last trajectory verification call actuator by actuator This function works only after a MultipleAxesPVT Verification e MultipleAxesPVTExecution Executes a PVT trajectory e MultipleAxesPVTParametersGet Returns the trajectory s current execution parameters This function works only while executing a trajectory The function MultipleAxesPV TVerification can be executed at any moment and is independent of the trajectory execution This function does the following e Checks the trajectory file for data and syntax coherence
167. eeded set PCO pulse duration and pulse settling time PositionerPositionComparePulseParametersSet Positioner PulseDuration SetlingTime Move the scanning group to the scan start position outside of the scanning zone GroupMoveAbsolute Group Positionl Position2 Set the firing positions by reading data from file or loading to controller s memory or with a set function Note that the firing positions defined with the following functions are only the offsets relative to the scanning positioner start position that will be specified with the PositionerCompensatedPCOPrepare function Data file XPSDocumentation V 1 4 x EDH0301En1050 08 15 164 Experfence 1 Shot XPS Q8 Controller Motion Tutorial 13 3 3 4 13 3 3 4 1 QW Newport Experiences Saulia PositionerCompensatedPCOFromFile Positioner File aS PositionerCompensatedP COSet Positioner Start Stop Distance Width UserPos i buffer i 0 N 1 PositionerCompensatedPCOLoadToMemory Positioner DataLines Calculate the firing absolute positions in the user s coordinate system and convert them to raw encoder positions PositionerCompensatedP COPrepare Positioner Direction StartPos I StartPos2 Activate CIE08 compensated PCO pulses generation RawPos i buffer i 0 N I PositignerCompensatedPCOEnable Positioner i PCO pulse Internal function called every serv
168. eleration Aw cos ot ExcitationJerk Aw sin ot XPSDocumentation V 1 4 x EDH0301En1050 08 15 192 SOSO RMS XPS Q8 Controller Motion Tutorial Curve color Gain Offset Curve designation Unit r s unit units no unit no unit no unit 0 48 0 54 0 60 seconds Fig 1 Position excitation signals amplitude A unit Curve color Gain Offset Curve designation Unit unti ont no unit no unit no unit 6 5 j 4 3 o E 1 0 48 0 54 0 60 seconds Fig 2 Velocity excitation signals amplitude A 2T1F units s 193 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial Curve color Gain Offset Curve designation Unit Magenta 0 0 S1 Pos SetpointAcceleration units s ERBluc 0 0 S1 Pos CurrentAcceleration units s Red no unit Green 0 0 None no unit gaddar 0 0 0 0 0 None 0 0 qi didiai i Cyan 0 0 None no unit 0 06 0 12 0 18 0 24 0 30 0 36 0 42 0 48 0 54 0 60 seconds Fig 3 Acceleration excitation signals amplitude A 2TIF units s 17 3 Technical Implementation 17 3 1 Use case The following sequence of commands will allow to gather the required informations Prior to the use of this new fea
169. ement for instance 50 552 GroupMoveAbsolute MyGroup MyStage 50 552 QO Newport Experience Salvin XPSDocumentation V1 4 x EDH0301En1050 08 15 74 XPS Q8 Controller Motion Tutorial 7 2 QW Newport Experiences Saulia In the above example for a position of 50 55 mm the command returns a value of 50 552 This means that in order for the positioner MyStage to achieve the desired velocity in the most accurate way the commanded position should be 50 552 mm instead of 50 55 mm The XPS can report two different positions The first one is the SetpointPosition or theoretical position This is the position where the stage should be according to the profile generator The second position is the CurrentPosition This is the actual position as reported by the positioner s encoder after taking into account all compensation The relationship between the SetpointPosition and the CurrentPosition is as follows Following error SetpointPosition CurrentPosition The functions to query the SetpointPosition and the CurrentPosition values are GroupPositionCurrentGet and GroupPositionSetpointGet Home Search Home search is a specific motion process Its goal is to define a reference point along the course of travel accurately and repeatably The need for this absolute reference point is twofold First 1n many applications it is important to know the exact position in space even after a power off cycle Seco
170. encoder the overall gain of the proportional path at a given frequency Frq is equal to Kp 2nFrq This gain is equal to 1 at Frq P Kp 2z close to the cut off frequency This frequency must remain lower than the cut off frequency of the speed loop of the driver and lower than the mechanic s natural frequencies to maintain stability The integral gain Ki drives the capability of the closed loop to overcome perturbations and to limit static error Due to the integration of the speed command in a position by the stage encoder the overall gain of the integral path at a given frequency Frq is Gain E 5 2 7 Frq This gain is equal to one at Fral Frqgl EM Ki 2 7 This frequency FrqI must typically remain lower than the frequency FrqP of the proportional path to keep the stability of the servo loop QS Newport Esperance Salvin XPS Q8 Controller Motion Tutorial 14 3 1 3 Methodology of Tuning PID s for PIDFF Velocity Corrector DC motors with or without tachometer 1 Verify the speed in open loop adjustment done using ScalingVelocity 2 Close the loop set Kp increase it to minimize following errors to the level until oscillations vibrations start during motion then decrease Kp slightly to cancel these oscillations 3 Set Ki increase it to limit static errors and improve settling time until the appearance of overshoot or oscillation conditions Then reduce Ki slightly to eliminate these oscillations
171. ent at each servo cycle or at each profiler cycle for those events that are motion related and triggers the action when the event occurs Hence the maximum latency between the event and the action is equal to the servo cycle time of 125 us or equal to the profiler cycle time of 400 us for motion related events For events with duration it also means that the same action is triggered at each servo cycle meaning every 125 us or at each profiler cycle which is every 400 us as long as the event occurs Event triggers and their associated action are automatically removed after the event configuration has happened at least once and is no longer true The only exception is if the event configuration contains any of the permanent events Always or Trigger In this case the event trigger will always stay active With the function EventExtendedRemove any event trigger can get removed EventExtendedWait This function halts a process essentially by blocking the socket until the event defined by the last EventExtendedConfigurationTriggerSet occurs EventExtendedRemove This function removes the event trigger associated with the defined event identifier EventExtendedGet This function returns the event configuration and the action configuration associated with the defined event identifier EventExtendedAllGet This function returns for all active event triggers the event identifier the event configuration and the action
172. er does not need for servo or communication Multiple TCL programs run in a time sharing mode To learn more about implementing TCL refer to the TCL Manual which is accessible from the web site of the XPS controller The advantages of XPS managed processes compared to host managed processes are faster execution and better synchronization in many cases without any time taken from the communication link XPS managed processes or sub processes are particularly valuable for repeating tasks tasks that run in a continuous loop and tasks that require a lot of data from the XPS controller Examples include anti collision processes processes that utilize security switches to stop motion when stages are in danger of collision tracking auto focusing or alignment processes processes that use external data inputs to control the motion or custom initialization routines processes that must constantly be executed during a system s use The XPS controller has real time multi tasking functionality and with most applications there is not only a choice between a host managed or an XPS managed process but also a recognition of splitting the application into the right number of sub tasks and defining the most efficient process for each sub task An efficient process design is one of the main challenges with today s most complex and critical applications in terms of time and precision It is recommended to spend time thinking about the proper process definitio
173. er name and password Press log on The folders of the XPS controller are displayed see below Browse through the different folders and transfer data from or to your host PC the same way as Windows Explorer ELE Thelnternet 192 168 254 254 z Search 192 168 254 254 Organize v s u Favorites bin Config E Desktop File folder File folder Ji Downloads 33 Recent Places Public UserOptionalModules usr File folder j File folder File folder Libraries a 2 WebFiles Documents Fie folder 2 Music be Pictures Firmware File folder QW Newport Experience Solution XPSDocumentation V1 4 x EDH0301 En1050 08 15 64 XPS Q8 Controller Maintenance and Service 5 0 Maintenance and Service 5 1 5 2 5 3 XPSDocumentation V1 4 x EDH0301 En1050 08 15 65 Enclosure Cleaning The XPS Controller Driver should only be cleaned with a sufficient amount of soapy water solution Do not use an acetone or alcohol solution this will damage the finish of the enclosure Obtaining Service The XPS Controller Driver contains no user serviceable parts To obtain information regarding factory service contact Newport Corporation or your Newport representative and be ready with the following information e Instrument model number on front panel and original order number e Instrument serial number on rear panel e Description of the problem If the XPS is to be returned to Newpor
174. er of the currently executed trajectory element 107 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial 9 0 Emergency Brake and Emergency Stop Cases Inthial Emergency stop Emergency brake j EMERGENCY BRAKING E rlor a aJa caling alib MOTOR INIT done l l l l l 7 Enipr i i i ot mm f i 1 E E E Eror Teor Eror rrbr ad otor 1 ON EN 74 75 76 ANALOG AUTO EXCITA MOVING JOGGING SLAVE TRACKING TUNING TION G qj SCALING CALIB DISABLE SIGNAL or d 20 47 ui 48 68 I 49 Empr oye ENCODER CALIB F done Tuning Exc tatio l Elo dane aqme l eal IN d 9 Folldwing c ay G Gla c m r G C error Ete done Dp HOMING P j 64 Note Emergency brake brings a stage to a stop then sets the motor power to Off Emergency stop sets motor power to Off only Experience Solution XPSDocumentation V1 4 x EDH0301 En1050 08 15 108 XPS Q8 Controller Motion Tutorial Emergency Brake occurs when Standard end of run driver safety supervisor Plus end of run is detected Standard limit and home encoder safety supervisor e Minus end of run is detected Standard limit and limit encoder safety supervisor Line arc trajectory execution Error occurs when reading or getting trajectory parameters The user target position 1s outside the MinimumTargetPosition and Max
175. erated at the same position as the PCO pulse and its width will be adjusted as a position value Start constant velocity Velocity l Stop constant velocity Start position i i Stop position Position width The upper limit for the pulse rate will be the distance travelled by the stage over a servo cycle with some margin to avoid any pulse overrun PCO pulse PCO enable The minimum distance between trigger positions can be calculated as MinimumTriggerPulseDistance gt 1 2 ScanningVelocity ServoCycleTime For example for a stage running at 300 mm s and a servo cycle of 100 us the minimum distance between trigger pulses must be bigger than 36 um The margin to take in account will depend on many parameters such as the speed stability 13 3 3 3 CIE08 compensated position compare scanning process description 13 3 3 3 1 Scan preparation Add the following lines in XPS controller Admin Config system ini ScanningPositioner section CIE08CompensatedPCOMode Enabled Enabled or Disabled CIE08CompensatedPCOMaximumDataNumber Value must lt 1000000 Reboot the controller Set hard interpolator factor for the scanning positioner then initialize and home the scanning group PositionerHardInterpolatorFactorSet Positioner Factor Maximum value 200 Grouplnitialize Group Initialize scanning group GroupHomeSearch Group Search home for the scanning 13 3 3 3 2 Scan execution Ifn
176. ervo cycle means every 0 125 ms If instead of the event Always the event Immediate will be used only the most recent values will be sent and kept If instead of the event Always a motion related event such as MotionState is used the update will only happen at every profiler cycle or every 0 4 ms 6 TimerSet Timer1 10000 EventExtendedConfigurationTriggerSet Timer1 Timer 0 0 0 0 EventExtendedConfigurationActionSet GPIO1 DO DOToggle 255 0 0 0 EventExtendedStart EventExtendedRemove 1 The function Timer sets the Timer at every 8 000th servo cycle or at one second Hence in this example every second all bits in the digital output on connector number 1 will be toggled Note 255 11111111 The event Timer is permanent In order to remove the event trigger use the function EventExtendedRemove with the associated event identifier 1 in this case 7 MultipleAxesPVTPulseOutputSet G1 2 20 1 GatheringConfigurationSet G1 P1 CurrentPosition EventExtendedConfigurationTriggerSet Always 0 0 0 0 G1 PV T TrajectoryPulse 0 0 0 0 EventExtendedConfigurationActionSet GatheringOneData 0 0 0 0 EventExtendedStart MultipleAxesPV TExecution G1 Traj trj 1 In this example the generation of an output pulse every one second between the 2 and the 20 element in the next PVT trajectory executed on the group Gl is first defined function MultipleAxisPV TPulseOutputSet Then data gathering is defined CurrentPosit
177. fault value or the last value defined by a PositionerSGammaParametersSet 7 3 3 Position Counter Resets Position counter resets sets the current position to a certain value There are two options SetPosition and SetPositionToHomePreset The main use of these actions is when the positioner is at a well defined reference position after a MoveToPreviously LatchedPosition action Another use of this action is for a soft system start by Referencing a group to a known set position without executing a home search process for example In this case a suggested sequence of functions follows GroupReferencingStart GroupName GroupReferencingActionExecute PositionerName SetPosition None KnownCurrentPosition GroupReferencingStop GroupName SetPosition sets the current position to a value defined by a parameter SetPositionToHomePreset sets the current position to the HomePreset value stored in the stages ini configuration file It is equivalent to a SetPosition of the same positioner to the HomePreset value It is important that all positioners of a motion group are referenced to a position using the SetPosition or SetPositionToHomePreset before leaving the Referencing state see example on page 94 QW Newport Experencs Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 80 XPS Q8 Controller Motion Tutorial 7 3 4 State Diagram The Referencing state is a parallel state to the homing state
178. file the XPS controller uses a sophisticated SGamma motion profile Figure 17 shows the acceleration velocity and position plot for the SGamma profile Jerk Velocity 1000 500 1000 units s c c T units s e c un So 0 1 0 2 0 3 0 1 0 2 0 3 Time s Time s T Acceleration Position 0 5 units s e e nits c 20 c e 0 1 0 2 0 3 0 1 0 2 0 3 Time s Time s Displacement 150 e units Maximum velocity 0 8 units s Maximum acceleration 12 units s Minimum jerk time 0 004 s Maximum jerk time 0 04 s Notice The minimum displacement lasts at least 4 times the minimum jerk time Figure 17 SGamma Motion Profile The SGamma motion profile provides better control of dynamic systems It allows for perfect control of the excitation spectrum that a move generates In a multi axes system this profile gives better control of each axis independently but also allows control of the cross coupling that are induced by the combined motion of the axes As shown in figure 17 the acceleration plot is parabolic The parabola is controlled by the jerk time jerk being the derivative of the acceleration This parabolic characteristic of the acceleration QW Newport Experience Solutio 73 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial results in a much smoother motion The jerk time defines the time needed to reach the necessary acceleration One featur
179. further details see chapter 11 0 The functions PositionerMotionDoneGet and PositionerMotionDoneSet allow reading and modifying the parameters for the VelocityAndPositionWindow MotionDone These parameters are only taken into account when the MotionDoneMode is set to VelocityAndPositionWindow in the stages ini Example Modifications of the MotionDoneMode can be made only manually in the stages ini file The stages ini file is located in the config folder of the XPS controller see Chapter 5 FTP connection for details Stage parameters can also be modified from the website in Administrator mode STAGES menu Modify submenu Make a copy of the stages ini file to the PC Open the file with any text editor and modify the MotionDoneMode parameter of the appropriate stage to VelocityAndPositionWindow and set the following parameters Motion done MotionDoneMode VelocityAndPositionWindow instead of Theoretical MotionDonePositionThreshold 4 units MotionDoneVelocityThreshold 100 units s MotionDoneCheckingTime 0 1 seconds MotionDoneMeanPeriod 0 001 seconds MotionDone Timeout 0 5 seconds Replace the current stages ini file on the XPS controller with this modified version make a copy of the old ini file first Reboot the controller To apply any changes to the stages ini or system ini the controller has to reboot QS Newport Esperance Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 8
180. g a move to a motion group all positioners of that group will move synchronously For any move the controller will always determine the shortest time within the positioner s parameters setup All positioners will start and stop their motion at the same time This type of motion is also known as linear interpolation The functions for absolute and relative motions are GroupMoveAbsolute and GroupMoveRelative respectively Example A motion system consisting of one XY group called ScanTable and one SingleAxis group called FocusStage ScanTable has two positioners called ScanAxis and StepAxis GroupHomeSearch ScanTable GroupHomeSearch FocusStage After homing is completed GroupPositionCurrentGet ScanTable Pos1 Pos2 Will return 0 to Posl and 0 to Pos2 assuming PresetHome 0 GroupPositionCurrentGet FocusStage Pos3 Will return 0 to Pos3 assuming HomePreset 0 GroupMoveAbsolute ScanTable 100 50 GroupMoveAbsolute ScanTable StepA xis 20 The second move is only for one positioner of that group and can be only executed after the first move is completed After all moves are completed GroupPositionCurrentGet ScanTable Pos1 Pos2 Will return 100 to Posl and 20 to Pos2 GroupMoveRelative FocusStage 1 GroupMoveRelative FocusStage 1 The second move can be only executed after the first move is completed After all moves are completed GroupPositionCurrentGet FocusStage Pos3 Will retu
181. g is only available with positioners that feature a direct drive motor such as the XM ILS LM IMS LM or RGV100BL To guarantee consistent performance of these stages it is strongly recommended to perform Auto scaling once the load is attached to the stage During auto scaling the XPS controller measures the mass inertia with rotation stages on the positioner and returns recommended values for the Scaling Acceleration parameter Repeat Auto scaling with any major change of the payload on the positioner With no major change of the payload there is no need to redo Auto scaling To perform Auto scaling do the following 1 Select the main tab TUNING Then select a positioner name The following screen appears A N t SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS DOCUMENTATION MULTI M1 m Disable Kill group Kill All Absolute move 0 Go State Ready state from motion Current position 10 000000 Corrector parameters Acquisition parameters Filters parameters ClosedLoopStatus 4 NotchFrequency1 0 Gathering 1 KP 219000 NotchBandwidth1 oo Gathering 2 o KI 15600000 NotchGain1 0 Gathering 3 fo KD 875 NotchFrequency2 0 Gathering 4 foe KS 0 8 NotchBandwidth2 0 Gathering 5 IntegrationTime 1e 99 NotchGain2 0 Number of points 1000 DerivativeFilterCutOffFrequency 5000 CurrentVelocityCutOffFrequency so Frequency divisor 40 G
182. ge under the main tab STAGE For detailed information about this tool please refer to the document ConfigurationWizard pdf provided under the main tab DOCUMENTATION 3 9 System Shut Down To shut down the system entirely perform the following procedure Wait for the stage s to complete their moves and come to a stop Turn off the power using the power switch located above the power cord at the back of the controller QW Newport Experiences Saulia 35 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Software Tools LEE SL d E 75 muB Pojani eh Motion Cenbrollar f Driver XIPS CI Ier rb COSE Gu Wa PELA TRO de DEREN NL S el Del bs o wart ah made co TR Dmm RE Software Tools 4 0 Software Tools 4 1 Software Tools Overview The XPS software tools provide users a convenient access to the most common features and functions of the XPS controller All software tools are implemented as a web interface The advantage of a web interface is that it is independent from the user s operating system and doesn t require any specific software on the host PC There are two options to log in to the XPS controller as User or as Administrator Users can log in only with User rights Administrators can log in with User and with Administrator rights When logged in with Administrator rights you have an extended set of tools available The predefined user has the log in name Anonymous
183. gital output on connector number 1 at every cycle of the motion profiler Note 255 11111111 The cycle time of the motion profiler is 400 us so pulses are generated every 400 us see picture below Tek Prevu OO SS oo WC as OBI 7 120mV para caters Ptah ekinstart skier i ei idptet 5 arl4lUa iba a axl4TURLUS ef idyuris a layer m lj ety Gey iis aan pci a n 2 00V M 100us A Chl 3 08 V 29Jun 2005 10 20 13 23 51 5 EventExtendedConfigurationTriggerSet Always 0 0 0 0 EventExtendedConfigurationActionSet GPIO2 DAC1 DACSet SetpointPosition G1 P1 0 1 10 0 GPIO2 DAC2 DACSet SetpointVelocity G1 P1 0 5 0 0 EventExtendedStart GO Newport XPSDocumentation V 1 4 x EDH0301En1050 08 15 144 Experfence Sunt XPS Q8 Controller Motion Tutorial In this example the analog output 1 on GPIO2 will always output a voltage in relation to the SetpointPosition of the positioner G1 P1 and the output 2 on GPIO2 will always output a voltage in relation to the SetpointVelocity of the same positioner The gain on output 1 is set to 0 1 V unit and the offset to 10 V This means that when the stage is at the position 0 units a voltage of 10 V will be sent When the stage is at the position 10 units a voltage of 9V will be sent Here the event Always means that these values will be updated every s
184. grammer s Manual for a complete list of status and error codes Also refer to chapter 4 0 for troubleshooting the XPS controller with the help of its web utilities QS Newport Esperance Salvin XPS Q8 Controller Software Tools 5 4 Updating the Firmware Version of Your XPS Controller Users can regularly update the controller with new firmware releases Updating the firmware does not overwrite the stages ini or system ini No configuration will be lost when updating the firmware Refer to the FirmwareHistory document which explains the changes needed in the stages ini and system ini files Refer to the XPS page at www newport com for more information A history file for the firmware and the stage database is added to the XPS web documentation QW Newport Esperance Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 66 XPS QS Controller Motion Tutorial 6 0 XPS Architecture 6 1 XPSDocumentation V1 4 x EDH0301 En1050 08 15 67 Motion Tutorial Introduction The architecture of the XPS firmware is based on an object oriented approach Objects are key to understanding this approach Real world objects share two characteristics state and behavior Software objects are modeled after real world objects so they have state and behavior too A software object maintains its state in one or more variables A variable is an item of data named by an identifier A software object implements its
185. h higher level of precision for synchronization than alternative time based systems Unlike most high resolution multiplication devices the XPS interpolators do not compromise positioning speed With a maximum input frequency ranging from 180 kHz to 400 kHz depending on the interpolation factor the maximum speed of a stage with a 20 um signal period scale can be up to 3 6 m s 2 3 Compatible Newport Positioners and Drive Power Consumption The list of all compatible Newport positioners and the corresponding drive module needed is available from the Newport catalog or at www newport com Esperance Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 8 XPS Q8 Controller User s Manual 2 4 2 5 GO Newport Experiences Salubons XPS Hardware Overview I O Board Motor PSU 500W _ ATX 12V 300W 2 Axes Control Card t ue Figure 6 XPS Hardware Overview Front Panel Description SX niewport Moti Figure 7 Front Panel of XPS Controller Driver The XPS RC Remote Control plugs into the front panel of the XPS controller to enable computer independent motion and basic system diagnostics For more information refer to the XPS data sheet and the XPS RC manual 9 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS QS Controller User s Manual 2 6 Rear Panel Description GPIO4 TRIGGER IN GPIO3 8 x HEIDENHAIN MALE SUB D37 MALE SUB D9 SUB D15 1 VPP ENCODER INPUT E
186. h rate frames sec 1 00 Set C Manual refresh Refresh Clear all positioner errors AD Newport Gsen Lperere Saara amp Dane d on Carpo wien 4 18 FRONT PANEL Hardware Status The Hardware Status page is another important page for trouble shooting but not all information is related to an error SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TES X Newport Move Jog Spindle I O view I Oset Positioner errors Hardware status Driver stat Hardware status MULTI M1 MULTI M2 Be MULTI M3 x Refresh rate frames sec 1 00 Set C Manual refresh GO Newport S Spectra Physics Solutions to Make Manage and Measure Light tperexe Saara ow GO Newport Experience Salvin 55 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Software Tools 4 19 4 20 FRONT PANEL Driver Status The Driver Status page is another important page for trouble shooting but not all information is related to an error The type of status information that you can get depends on the drivers used Ww N t SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TEST Move Jog Spindle I O view I O set Positioner errors Hardware status Driver status Driver status MULTI M1 MULTI M2 MULTI M3 Refresh rate frames sec 1 00 Set C Manual refresh Qo Newport G soys tiperesce Saara a rmsd Marre Corno ana TERMINAL T
187. h your current parameter settings l 2 6 ve Initialize and home the positioner then move to the desired start position Define the gathering data For the stage tuning it is recommended to gather only the following error and the current position Define a typical motion distance Define the frequency divisor The frequency divisor defines the sampling rate of the gathering A frequency divisor equal to one means one data point is gathered every servo cycle or every 125 us With most positioners it is sufficient to set a value of 10 meaning one data point every 1 25 ms Define the number of points in relation to the distance the frequency divisor the velocity and the acceleration Define the velocity acceleration and jerk time When done click Set amp Move 3 The gathering results are displayed in a Java applet window To view the results install Java Runtime Environment Standard Edition on the host or remote computer The XPS has a direct link to download Java Runtime when not installed on the computer Comment 19 9 2011 11 27 XPS C8 QNX Firmware Precision Platform V1 0 0 Curve color Gain Corrector parameters ClosedLoopStatus 1 KP 219000 Cc tio Unit urve designation m KI 15600000 1000 0 o EU NET 8 0 o MULTI M1 FollowingError units iss 375 i eo MULTI M1 CurrentPosition v units KS 0 8 Red no unit IntegrationTime 1e 99 i a DerivativeFilterCutOffFrequency
188. he Terminal screen allows the execution of all XPS controller functions It also provides a convenient method for generating executable TCL scripts For more details about TCL scripts see chapter 18 1 SYSTEM STAGE CONTROLLER CUME IGURA I DOM FRONT PFAMEL TERMINAL TUNING FUNCIIONAL IESUS DOCUMENT AT LOM Newport Function list Command a APL to execute ContrallerrtatiankernelTimasoadcet E xiculte controllerStatusGet M CES Conkraller amp tatusRead ContrallerStatusstringEet Boubleslabal amp rraytet F Doublaslobal rraysat ElapzedTimaeGet Errarstringtsat EventExtendedAllGet EventExtendedicCanflqurationactioniat EventEstendedContiqurationactionSet EventExtendedcanfiguratianTriggeraet EventExtendedcConflgurationTriggerSet EventExtendedGet EventExtendedBemuee EventExtendedstart EventExtendedWalt Firmware erson GatheringConfigurationset bud Received missagie MOTE Some commands can take a long time t execute sa IT vau ve pot a blank screen or HTTP 404 error check your web dient time out Command history list Clear History TEL Generator Gathering Display External Gathering Display CS Mevvyport S spectra Prysics Solutions to Make Manage and Measure Light i_uees es mcm E T To execute a function from the Terminal do the following 1 Double click to select a function which then appears in the API to execute window 2 Define the arguments for the function
189. he following equations Profile coefficient Acceleration jerk eck S DT Ve Vat 2 DX DT Initial acceleration a Z 5 DX DT 2 Vin Vow Dr Final acceleration 2 DT Va 2 Vout 3 DX Gout 7 DT Profile equation XPSDocumentation V 1 4 x EDH0301En1050 08 15 Acceleration Acc t Ga Jerk t Velocity 2 velie Veste qo eet Position 242 a Pos t Via t 4 et MP QS Newport Esperance Salvin 102 XPS Q8 Controller Motion Tutorial Here DT isthe segment duration in seconds DX isthe displacement during DT Vin is the output velocity of the previous segment which is equal to the input velocity of the current segment Vout is the output velocity of the current segment t is the time in seconds starting at 0 entry of the current element and ending at DT end of the segment 8 3 5 Influence of the Element Output Velocity to the Trajectory The contour of each PVT trajectory element is influenced not only by the displacement but also by the input and output velocities As the user decides on these velocities attention must be placed on these values to get the desired results The effect of the velocity 1s illustrated in the following example which shows the position and velocity profiles for one segment of a PVT trajectory that has a displacement of 5 mm a duration of 100 ms an input velocity of 10 mm s and an output velocity of either 5
190. hering is started by a function call The SetpointPosition and FollowingError of the positioner XY X are gathered at a rate of 1 kHz every 8 servo cycle 8 kHz servo cycle rate Data gathering is stopped after the relative move is completed Gathering will stop automatically once the number of points specified has been collected However data will not be saved automatically to a file The function GatheringStopAndSave must be used to save the data to a file It is also possible to halt data gathering at an event To do so define another event trigger and assign the action GatheringStop to that event Use another event trigger and assign the action GatheringRunAppend to continue with gathering For details see chapter 11 0 Event Triggers Note The function GatheringRun always starts a new internal data gathering and deletes any previous internal gathering data hold in the buffer If you want to append data to the file use the function GatheringRunAppend instead 12 2 Event Based Internal Data Gathering The event based gathering provides a method to gather data at an event For instance gathering data at a certain value of a digital or analog input during a constant velocity state of a motion or on a trajectory pulse The event based data gathering uses the same file as the time based and the function based data gathering see sections 12 1 and 12 3 However unlike the time based gathering the event based gathering a
191. hers are internal transitions Motion Disable Error 41 MOTOR INIT Initialize Actuator Set motor on 22 to 34 ANALOG T DISABLE _ MOVING SPINNING SLAVE TRACKING ENCODR CALIB T 1 Motion Done Tracking Enable 6 Abort 2 10 Disable 12 Disable 14 Move 7 Error Error Error Error Error Error Home Spin Parameters Slave Tracking Error 3 4 Set 9 Enable 11 Enable 13 Search 2 Motion Following Move 43 HOMING Disable 5 42 13 12 10 18 14 16 NOTREF READY REFERENCING Referencin Start 16 Called function GroupInitialize 7 GroupMoveAbort 13 GroupAnalogTrackingModeEnable GroupHomeSearch 8 GroupKill or KIHAI 14 GroupAnalogTrackingModeDisable GroupMoveAbsolute 9 GroupSpinParametersSet 15 GroupInitializeWithEncoderCalibration GroupMoveRelative 10 GroupSpinModeStop 16 GroupReferencingStart GroupMotionDisable 11 SpinSlaveModeEnable 17 GroupReferencingStop GroupMotionEnable 12 SpinSlaveModeDisable State diagram of the XPS controller 6 3 Motion Groups Within the XPS controller each positioner or axis of motion must be assigned to a motion group This group can either be a SingleAxis group a Spindle group an XY group an XYZ group or a MultipleAxes group Once defined the XPS automatically manages all safeties and trajectories of the motion group from the same function For instance the function GroupHomeSearch GroupName automatically homes th
192. his The units for the data are the same as defined by the EncoderResolution in the stages ini The data reads as follows at position X 3 00 units Y 2 00 units the corrected X position is 2 99852 units 3 00 0 00148 and the corrected Y position is 1 99862 units 2 00 0 00138 Between two data points the XPS controller performs a linear interpolation of the error The two mapping files don t need to contain the same X and Y positions NOTE Mapping is a function implemented within the XPS controller to correct positioning errors When mapping is activated it is transparent to the user At position X Y 3 00 2 00 the function GroupPositionCurrentGet XY X doesn t return 2 99852 3 00 0 00148 but 3 10 5 XYZ Mapping XYZ mapping is available only with XYZ groups It compensates for all errors of an XYZ group at any position of that XYZ group XYZ mapping can be used in conjunction with other compensations including positioner mapping Care must be taken to consider the effects when using XYZ mapping and other compensations at the same time XYZ mapping is defined by 3 compensation files compensation for errors in X Y or Z in text format Each of these files can be seen as the juxtaposition of successive tables where the first column of the first table contains the X positions the first row of the first table contains the Y positions and the first cell of each table contains one of the Z positions Each table represent
193. ia much lower than static friction and would generally require less correction gain than smaller moves However if Kp becomes too large the mechanical system may begin to overshoot encoder position gt SetpointPosition and at some point it may begin to oscillate becoming unstable if it does not have sufficient damping Kp cannot completely eliminate errors However since as the following error e approaches zero the proportional correction element Kp x e also approaches zero and results in some amount of steady state error For this reason other gain factors like Kd and Ki are required Derivative Term The Kd or derivative gain multiplies the differential between the previous and current following error by the derivative gain value Kd The result of this gain is to stabilize the transient response of a system and can also be thought of as electronic damping of the Kp The derivative acts as a gain that increases with the frequency of the variations of the following error d di sin 2z Fr t Ax Fr cos 2a Fr t The result is that the derived term becomes dominant at high frequencies compared to the proportional and integral terms For the same reason the value of Kd is in most cases limited by high frequency resonance of the mechanics This is why a low pass filter cut off frequency DerivativeFilterCutOffFrequency is implemented in the derivative branch to limit excitation at high frequencies Increasing the value of Kd
194. ialize GroupHomeSearch then PositionerHardInterpolatorPositionGet Controller response 0 Value2 example 0 2 71051e 20 Value2 must be closed to 0 meaning that the position compare is now calibrated Note It is not mandatory to calibrate the PCO and its accuracy is application dependent 13 3 1 2 Valid settings as a function of scan velocity and PCO pulse settling time Determine PCO encoder frequency AquadB encoder PCO encoder frequency ScanVelocity EncoderResolution Analog Sin Cos encoder PCO encoder frequency ScanVelocity HardInterpolatorFactor EncoderScalePitch Example ScanVelocity 10 mm s EncoderScalePitch 0 004 mm HardInterpolatorFactor 200 gt PCO encoder frequency 10 200 0 004 500000 500 kHz The valid settings are shown in the following table Pulse settling PCO encoder frequency kHz time us OK x l OK QS Newport Esperance Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 158 XPS Q8 Controller Motion Tutorial Note When changing the PCO pulse settling time you must limit the maximum velocity of the stage accordingly otherwise you will loose the PCO position and generate the wrong number of pulses at wrong positions As per the above table if you set the pulse settling time to 4 us the maximum PCO encoder frequency needs to be limited to less than 0 25 4x 10 62 5 kHz So if EncoderScalePitch 0 004 mm and HardInterpolatorFa
195. ialize MULTI M3 _Go go EE gt Kill All groups Kill All NOTE The new velocity gets only applied with thg next motion Refresh rate frames sec 1 00 Set _setf Q gt Newport G enemy cream Positioner Absolute Move to the absolute Relative Move to the relative Velocity Position position Position position GO Newport XPSDocumentation V 1 4 x EDH0301En1050 08 15 52 Experience Solutions XPS Q8 Controller Software Tools 4 13 FRONT PANEL Jog The Jog page allows executing a jog motion A jog motion is a continuous motion where only the speed and acceleration are defined but no target position Speed and acceleration can be changed during the motion but not during the acceleration period For a Jog motion the jog mode must be enabled see Action button SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TES Y Newport Move Jog Spindle I O view I O set Positioner errors Hardware status Driver statu fF 0 11 Enable jog MULTI M1 3e 06 1i Enable jog MULTI M2 0 11 Enable jog MULTI M3 Kill All NOTE The new velocity gets only applied with the next motion Refresh rate frames sec 1 00 Set LO Newport S spectra Prys Solutions to Make Manage and Measure Light tperexe Saara 4 14 FRONT PANEL Spindle The Spindle page provides similar functions to the Jog page However specific jog actions are replaced by spindle actions that o
196. ich is dependent on the size of the move friction 1s negligible for a large move but becomes a predominant factor for small moves For this reason the required response of the system to reach the commanded position is not the same for small and large moves The optimum value of PID parameters for small moves is very often higher than the optimum value for large moves It is advantageous to modify PID settings depending on the move size For users that do not need to make PID corrector adjustments or prefer not to benefit from the compensations provided by the variable gain correctors This compensation is made automatically by the XPS variable gain corrector by applying a gain that is driven by the distance between the Target Position position that must be reached at the end of the motion and the Encoder Position As shown in the figure below when the distance to move completion is large the total output gain from these parameters is fractional the Kform term is fractional but as the move size or distance to final position is small the Kform term approaches 1 and full GKx output is provided GKp 10 Kp 2 Target Position 0 Encoder Position 100 to 100 Kform Kp K tion 1 GK T P Kform Encoder Position Target Position Encoder Position Kform 1 GKp Kp Kp 1 Encoder Position Kp Kp 10 Encoder Position Encoder Position Figure 53 Variable Gains The parameter GKx is
197. id oscillations for a rotation stage with high payload inertia When done with the selection click Auto tuning 6 The stage vibrates for a couple of seconds When done the following screen appears A N t SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS DOCUMENTATION MULTL M1 Disable Kill group Kill All Absolute move o _Go State Ready state from auto tuning Current position 19 957960 Corrector parameters Filters parameters Acquisition parameters ClosedLoopStatus NotchFrequency1 oo Gathering 1 FollowingError KP 174872 869 NotchBandwidth1 o Gathering 2 CurrentPosition v KI 12196037 331 NotchGaini oo Gathering 3 o l KD 783 567 NotchFrequency2 0 Gathering 4 o KS o8 NotchBandwidth2 oo Gathering 5 IntegrationTime 1e499 NotchGain2 0 Number of points 10000 DerivativeFilterCutOffrrequency sooo CurrentVelocityCutOffFrequency so Frequency divisor 1 GKP CurrentAccelerationCutOfffrequency 50 Velocity 25 GKI 0 Set Save Cancel Acceleration 1000 GKD 0 MinimumTjerkTime 0 005 KForm 0 MaximumTjerkTime 0 05 KFeedForwardAcceleration 1 Distance 20 KFeedForwardJerk 0 Set amp Move Cancel Set Save Cancel Auto tuning Mode Short settling v Refresh rate frames sec 1 00 Set AD Newport Sissi 7 Press Set to apply the new parameters Set only changes the working parameters during data gathering Rec
198. iete tesi abe Reno Peru ebbe p piis eU os FORE REA FA ues DURER ER ADS eR eS E SER rR Up ON 112 10 2 Linear Error Bo ais e CO EORR 113 I0 TPosttioncr M IDDIBS sarsii nan E AEE aes see scene s ad AEE SUE UN UEatd sns Ses 113 io XAY Mapping M T 116 IT NEP A A Ele RR 118 10 6 Yaw Mapping PP Firmware Version Only esses 124 10 7 Theta Bncoder and XY C OEFGCDIOTL serere n epe airain Ee SUM R I eus UU S REN AANE i 127 ILO Event DEISOOES uie Epid Eie ee i DOE ede itcr DER estu 128 INNEREN 129 WP NEE oso TP 157 FEM udi e C 142 E MESCOU MR M 143 120 Dati ETITONIITAmETETETU TL ULT 147 12 1 Time Based Internal Data Gathering essessesseeeeeee nnns 148 12 2 Event Based Internal Data Gathering eeeeseeeseeee nnns 150 12 3 Function Based Internal Data Gathering eeeeeeseseeseeee ens 153 12 4 Trigger Based External Data Gathering eeeeeeeeeeseseeeeenns 153 190 Outp t Wuruu ETT TIT TIT 155 13 1 Triggers on Line Arc Trajectories eeeeeesssessesseee nnn nns 155 13 2 Triggers on PVT Trajectories eeeseeesesssssseeseeeeee enn nnn nnns 157 13 3 Distance Time Spaced Pulses or AquadB Position Compare ueeeeueesuee 158 13 3 1 Pos
199. ime lag equivalent to the PCOPulseWidth time multiplied two The second parameter EncoderSettlingTime applies a filter to the encoder signals for the trigger pulse generation Possible values are 0 075 default 1 4 12 us The setting of this EncoderSettlingTime should be done in relation to the application in particular speed and encoder resolution and the encoder position noise For most applications the default value works fine At very low speed with high encoder resolution and significant encoder position noise however it may be possible that additional trigger pulses are generated where no trigger pulse should be generated from the application In these cases a higher value setting for the EncoderSettlingTime could avoid these unwanted extra pulses The value for the EncoderSettlingTime however should not exceed the value for the Encoder resolution divided by the speed Please note also that the EncoderSettlingTime adds a nominal delay between the encoder transition and the trigger pulse Example With XM stages and the hardware interpolator set to 200 see function PositionerHardInterpolatorFactorSet the resolution of the trigger pulses is 20 nm 4 um encoder scale pitch 200 At continuous speed motion with 20 um s speed the nominal time between successive encoder counts is 1 ms 20 nm 20 um s In a not optimum environment of the XM stages it is possible that the actual position detected by the trigger circuitry i
200. imum TargetPosition value Actual positioner velocity is greater than the MaximumVelocity value Spline trajectory execution Error occurs when reading or getting trajectory parameters The user target position 1s outside the MinimumTargetPosition and MaximalTargetPosition value Actual positioner velocity is greater than the MaximumVelocity value PVT trajectory execution Error occurs when reading or getting trajectory parameters Error occurs during trajectory execution The user target position is outside the MinimumTargetPosition and MaximalTargetPosition values Actual positioner velocity is greater than the Maximum Velocity value S gamma motion of a slave or a gantry Group positioner is not in the secondary positioner gantry home process And end of run detection is enabled And the group is not a spindle group And the user target position 1s outside the MinimumTargetPosition and MaximalTargetPosition value QW Newport Experiences Saulia 109 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial Emergency Stop occurs when AquadBEncoder fault Quadrature error FOC fault signals noisy or too fast Analog interpolator encoder fault Quadrature error FOC fault Hard interpolator quadrature fault Hard interpolator fault IP200 N1231BEncoder fault 3 axes e Signal error e Glitch error Analog interpolated theta encoder fault Quadrature error FOC fault Hard i
201. inable from public sources 2 readily apparent from the keyboard operations visual display or output reports of the Programs 3 previously in the possession of Customer or subsequently developed or acquired without reliance on the Newport Programs or 4 approved by Newport for release without restriction Sales Tech Support amp Service North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 877 835 9620 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com XPSDocumentation V1 4 x EDH0301En1050 08 15 xii Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 vry CEDEX France Sales France Tel 33 0 1 60 91 68 68 e mail france newport com Sales Germany Tel 49 0 61 51 708 0 e mail germany newport com Sales UK Tel 44 0 1635 521757 e mail uk newport com Technical Support e mail tech europe gnewport com Service amp Returns Tel 33 0 2 38 40 51 55 Esperance Salvin XPS Q8 Universal High Performance Motion Controller Driver QW Newport Experiences Saulia Service Information The user should not attempt any maintenance or service of the XPS Series Controller Driver system beyond the procedures outlined in this manual Any problem that cannot be resolved should be referred to
202. ine a blank noise or an echelon signal that the controller sends to motors to excite the system In measuring the output signal of the excited system we can determine some system characteristics such as the system transfer function How to Use the Excitation Signal Function The PID excitation signal function is only available with the stages controlled in acceleration acceleration control ex brushless linear motors velocity velocity control or in voltage voltage control It is not used with the stages controlled in position ex stepper motors The excitation signal function PositionerExcitationSignalSet can be executed only when the positioner is in the READY state When the excitation signal function is in process the positioner is in the ExcitationSignal state At the end of the process the positioner returns to the READY state see group state diagram This function sends an excitation command to the motor over a time period This function is allowed for PIDFFAcceleration PIDFF Velocity or PIDDualFF Voltage control loop The parameters to configure are signal type 0 sine 1 echelon 2 random amplitude 3 random pulse width binary amplitude integer frequency Hz double amplitude acceleration velocity or voltage unit double and during time seconds double The effective functional parameters for each mode are Limit means AccelerationLimit VelocityLimit or VoltageLimit Sine
203. ing is an example of a trajectory file that represents a rectangle with rounded corners and with the end point equal to the starting point FirstTangent 0 Degrees DiscontinuityAngle 0 01 Degrees Line 10 0 Arc 10 90 Line 20 20 Arc 10 90 Line 0 30 Arc 10 90 Line 10 10 Arc 10 90 Y Axis X Axis Figure 29 Graphical display of the first Line arc trajectory data file example Erperienca Solutions 93 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial The following is an example of a trajectory file that represents a rectangle with rounded corners and with the end point equal to the starting point FirstTangent 90 Degrees DiscontinuityAngle 0 01 Degrees Arc 10 90 Line 60 10 Arc 10 180 Line 60 30 Arc 10 180 Line 60 50 Arc 15 90 Line 75 35 Arc 15 90 Line 60 50 Arc 5 180 Line 60 40 Arc 5 180 Line 60 30 Arc 5 180 Line 60 20 Arc 5 180 Line 60 10 Arc 10 180 80 60 40 20 0 20 40 60 go Line 10 10 Arc 10 90 X Axis Y Axis Figure 30 Graphical display of the second Line arc trajectory data file example 8 1 9 Trajectory Verification and Execution There are four functions to verify or execute a Line arc trajectory e XYLineArcVerification Verifies a Line arc trajectory data file e XYLineArcVerificationResultGet Returns the last trajectory verification results a
204. ing motion decrease Kp to eliminate oscillations 3 Set Kd increase until oscillations vibrations appear during motion and decrease it to eliminate oscillations 4 Increase Ki to cancel static error and minimize settling time until appearance of overshoot oscillations 14 3 4 Corrector PIPosition PID Corrector Filtering amp Ey Calculations To the driver 14 3 4 1 PIPosition corrector can be used with AnalogStepperPosition or AnalogPosition interface The AnalogPosition interface is to be used with a driver having a position input example piezo driver The AnalogStepperPosition interface 1s to be used with a driver having two sine and cosine current inputs constant voltage gives constant currents in motor windings so position is constant Driver Board amp Stage From the encoder Figure 58 Corrector PIPosition Parameters FeedForward e One feed forward in position No adjustable gain e When the system is used in open loop the PI output is cut and the feed forward in position is applied PI corrector e Output of the PI is a position Kp has no units Ki is given in 1 s 183 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial 14 3 4 Basics amp Tuning In most cases only Ki is needed to correct static errors The overall gain of the integral part of the servo loop at a given frequency Frq 1s Gain 2 7 Frq This gain is equal to on
205. input parameters For the argument parameter any input can be used number string These parameters are used inside the script To get the number of arguments use tcl argc inside the script To get each argument use tcl_argc 1 inside the script For example this parameter can be used to specify a number of loops inside the TCL script A zero 0 for this parameter means there are no input arguments Action parameter 4 This parameter is 0 by default KillTCLScript This action stops a TCL script on an event Action parameter 1 Task name This parameter defines which TCL script is stopped Since several TCL scripts can run GO Newport XPSDocumentation V 1 4 x EDH0301En1050 08 15 140 Experience Solutions XPS Q8 Controller Motion Tutorial simultaneously different or even the same script the TCL Task Name is used to track individual TCL programs Action parameter 2 to 4 These parameters are 0 by default GatheringOneData This action acquires one data as defined by the function GatheringConfigurationSet Different from the GatheringRun see next action which generates a new gathering file the GatheringOneData appends the data to the current gathering file stored in memory In order to store the data in a new file first launch the function GatheringReset which deletes the current gathering file from memory Action parameter 1 to 4 These parameters are 0 by default GatheringRun This act
206. ion SingleAxisSlaveModeEnable To enable the Master slave mode the Slave group must be in the ready state The Master group can be in the not referenced or ready state Example 1 This example shows the sequence of functions used to set up a master slave relation between two axes that are not mechanically joined meaning the two axis can move independently GroupInitialize SlaveGroup GroupHomeSearch SlaveGroup GrouplInitialize MasterGroup GroupHomeSearch MasterGroup SingleAxisSlaveParametersSet SlaveGroup MasterGroup Positioner Ratio SingleAxisSlaveModeEnable SlaveGroup GroupMoveRelative MasterGroup Positioner Displacement SingleAxisSlaveModeDisable SlaveGroup QS Newport Esperance Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 86 XPS Q8 Controller Motion Tutorial Example 2 This example shows the sequence of functions used to set up a Master slave relation between two axes that are mechanically joined Different from example 1 all motions including the motion done during the home search routine are performed synchronously Important First set the HomeSearchSequenceType of the Slave group s positioner to CurrentPositionAsHome in the stages ini and reboot the XPS controller Grouplnitialize SlaveGroup GroupHomeSearch SlaveGroup GroupInitialize MasterGroup SingleAxisSlaveParametersSet SlaveGroup MasterGroup Positioner Ratio SingleAxisSlaveModeEnable SlaveGro
207. ion of positioner G1 P1 Hence in this example with every trajectory pulse one data point is gathered and appended to the current gathering file in memory Here adding the event TrajectoryPulse with the permanent event Always makes sure that the event trigger is always active Without the event Always only one data point will be gathered This is because any event is automatically removed once it happens and does not happening in the next servo or profiler cycle which is the case here as a pulse is only generated every one second Please note that the action GatheringOneData appends data to the current data file In order to store the data in a new file it 1s required to first launch the function GatheringReset which deletes the current data file from memory 8 GatheringConfigurationSet G1 P1 CurrentPosition EventExtendedConfigurationTriggerSet G1 P1 SGamma MotionStart 0 0 0 0 EventExtendedConfigurationActionSet GatheringRun 20 1000 0 0 EventExtendedStart GroupMoveAbsolute G1 P1 50 GatheringStopAndSave In this example an internal data gathering of 20 data points every 0 1 second every 800 servo cycle is launched with the start of the next motion of the positioner GO Newport Experience Salvin 145 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Step 1 Select the positioner name and click Function argument s EventExtendedConf veu one or several events char Exte
208. ion sets a voltage on the Analog output in relation to the actual current or theoretical Setpoint position The gain and offset are used to calibrate the output This action makes the most sense with events that have some duration always MotionState ElementNumberState etc as the analog output will be updated at each servo cycle or at each profiler cycle as long as the event occurs When used with events that have no duration like MotionStart or MotionEnd the analog output is only updated once and this value is kept until it is changed Action Parameter 1 Positioner Name This parameter defines the name of the positioner on which the position value is used Action Parameter 2 Gain The position value is multiplied by the gain value For example if the gain is set to 10 and the position value is 1 mm or any other unit then the output voltage is 10 V Action Parameter 3 Offset The offset value is used to correct for any voltage that may already be present in the Analog output Analog output Position value gain offset Action parameter 4 This parameter is 0 by default DACSet CurrentVelocity and DACSet SetpointVelocity This action sets a voltage on the Analog output relative to the actual current or theoretical Setpoint velocity The gain and the offset are used to calibrate the output This action makes most sense with events that have duration Always MotionState ElementNumberState etc as the analog
209. ion starts an internal data gathering It requires that an internal gathering was previously configured with the function GatheringConfigurationSet The gathering must be launched by a punctual event and does not work with events that have duration Action Parameter 1 NbPoints This parameter defines the number of data acquisitions NbPoints multiplied by the number of gathered data types must be smaller than 1 000 000 For instance if 4 types of data are collected NbPoints can not be larger than 250 000 4 250 000 1 000 000 Action Parameter 2 Divisor This parameter defines the frequency of data gathering in relation to the servo frequency of the system 8 kHz This parameter must be an integer and greater than or equal to 1 For instance if the parameter is set to 8 then data gathering will take place every 8 servo cycle or at a rate of 1 kHz 8 kHz 8 or at every 1 msec Action Parameter 3 and 4 These parameters are 0 by default GatheringRunAppend This action continues a gathering previously stopped with the action GatheringStop see next action Action parameter 1 to 4 These parameters are 0 by default GatheringStop This action halts a data gathering previously launched by the action GatheringStart Use the action GatheringRunAppend to continue data gathering Note that the action GatheringStop does not automatically store the gathered data from the buffer to the flash disk of the controller To store data
210. ionTriggerSet G1 P1 SGamma ConstantVelocityStart 0 0 0 0 EventExtendedConfigurationActionSet GPIO1 DO DOSet 4 4 0 0 EventExtendedStart GroupMoveAbsolute G1 P1 50 In this example when positioner G1 P1 reaches constant velocity bit 3 on the digital output on connector number 1 is set to 1 Note 4 00000100 Note that the state of the bit will not change when the constant velocity of the positioner has ended In order to do so a second event trigger would be required see next example EventExtendedConfigurationTriggerSet G1 P1 SGamma ConstantV elocityStart 0 0 0 0 EventExtendedConfigurationActionSet GPIO1 DO DOSet 4 4 0 0 EventExtendedStart EventExtendedConfigurationTriggerSet G1 P1 SGamma ConstantVelocityEnd 0 0 0 0 EventExtendedConfigurationActionSet GPIO1 DO DOSet 4 0 0 0 EventExtendedStart GroupMoveAbsolute G1 P1 50 In this example when positioner G1 P1 reaches constant velocity bit 3 on the digital output on connector number 1 is set to 1 Note 4 00000100 and when the constant velocity of the positioner G1 P1 is over bit 3 will be set to zero Note that the same effect can not be reached with the event name ConstantVelocityState After both events have happened the event triggers will get automatically removed In order to trigger the same action at each motion it is required to link the events 143 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XP
211. ioner at very low speed Ex Analog Encoder Calibration Display vi Controller Address Refresh time ms 12 166 33 233 so Select the positioner and press START J I i 1 D 40 0 20 0 00 0 20 0 40 Cosinus V Notice the variations between the actual green values and the ideal red values In this case it makes sense to apply new compensation values QW Newport Experience Solution XPSDocumentation V1 4 x EDH0301 En1050 08 15 188 XPS Q8 Controller Motion Tutorial Step 3 Apply the compensation values gathered in step 1 into the stages ini reboot the controller Initialize the positioner run the AnalogEncoderCalibrationDiplay VI move the positioner at a very low speed amp Analog Encoder Calibration Display vi Fichier Edition Ex cution Outils Parcourir Fen tre Aide Analog encoder display Controller Address Refresh time ms 192 168 33 233 so Select the positioner and press START y5ingle TSP1 Notice the difference to the previous results It might be necessary to run the compensation at several positions and several times to optimize the results QW Newport Experiences Solutiom 189 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial 16 0 Excitation Signal 16 1 16 2 XPSDocumentation V 1 4 x EDH0301En1050 08 15 190 Introduction The excitation signal function generates a typical signal a s
212. is capability outputs pulses at constant trajectory length intervals on Line Arc Trajectories The pulses are generated between a start length and an end length AII lengths are calculated in an orthogonal XY plane The StartLength EndLength and PathLengthInterval refer to the Setpoint positions The trajectory length is calculated at a rate of 8 kHz This means that the resolution of the trajectory length is 0 000125 trajectory velocity For a trajectory velocity of 100 mm s for instance the resolution of the trajectory length is 12 5 um If the programmed PathLengthInterval is not a multiple of this resolution the pulses can be off from the ideal positions by a maximum half of this resolution Two signals are provided GPIO2 pin11 Window A constant 5 V signal is sent between the StartLength and the EndLength GPIO2 pin12 Pulse A 1 us pulse with 5 V peak voltage is sent every PathLengthInterval For details about the XPS I O connectors see appendix section 22 2 QW Newport Experience Salvin 155 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial To define the StartLength EndLength and PathLengthInterval use the function XYLineArcPulseOutputSet Example XYLineArcPulseOutputSet XY 10 30 0 01 One pulse will be generated every 10 um on the next Line Arc Trajectory between 10 mm and 30 mm XYLineArcVerification XY Traj trj Loads and verifies the trajectory T
213. isable MyStage X The group has to be in a READY state for the time flasher to be enabled Also the PositionerTimeFlasherSet function must be completed before the PositionerTimeFlasherEnable function In this example one trigger pulse is generated every 0 00001 seconds or at a rate of 100 kHz between the minimum position of 5 mm and the maximum position of 25 mm The first trigger pulse will be at 5 mm and the last trigger pulse will be at 25 mm or before The output pulses are accessible from the PCO connector at the back of the XPS controller See appendix E PCO connectors for details Figure 50 Temporal resolution of time spaced pulses in oscilloscope view QW Newport Experience Salvin 167 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial Example 2 The time flasher function is of particular use with high precision direct drive stages At high speeds these stages typically provide very good speed stability In other words the position change over a short time interval is highly consistent and repeatable Hence time spaced pulses can be used for synchronization with similar in some cases even higher precision as distance spaced pulses The time spaced pulse configuration however provides some further flexibility with regards to the nominal distance between successive triggers Consider an XM stage for instance XM stages feature an analog encoder with 4 um signal period
214. ition compare settings and limits Of use sss 158 13 3 2 Even Distance Spaced Pulses Position Compare cccccccccceceeeeeeeeeeeeeeees 159 13 3 3 Compensated Position Compare ssssseeeneenneennnn 163 13 3 4 Time Spaced Pulses Time Flasher seen 166 13 3 5 AquadB Signals on PCO Connector cccccccccccccceeeceeeeeeeeeeeeeeeeeseeeeeeeeeeeees 168 140 Control LOOPS uiid ioi sete rrr orici iod EH dE eere eni his 171 IN M dus dbi Ne o 171 14 1 1 Servo structure and Basics cccccccccccccccccccccceeececeeeeeesecceeeeeeeeesessessnssessnsnsness 171 12 1 2 XPS PBOEP Arie Cire ciii ti oet a i dita tr E oseee est E 173 1 2 GC ran and LII TOL sp ts eacccnnes MESS ERO SSUnt esa cg sans eene Ais iuto UR eE Er Ek nna A EEN eR UNE 177 14 3 Feed Forward Loops and Servo Tuning eeeessssseeeeeeeeee nnns 177 4 331 Corrector PIDEEVelOClby scenerna e oR AEA i 177 14 3 2 Corrector PIDFFAcceleration sess nennen 179 14 3 3 Corrector PIDDual FF Voltage cccccccccsssseeeseeeeeeeeeeeseseeeeeeseseeeeeeeeees 182 14 3 4 Corrector PIPosition cccccscsssssseeeeseeeeeeeseeesesseeseseeeeeeeeeeeseeeeeeeeeeeeeseeees 183 15 0 Analog Encoder Calibration ccccccccsssssssssssssccccsssssssssssscccssssseeees 185 QW Newport Experiences Salvia Vii XPSDocumentation V 1 4 x EDH0301En105
215. ition error window The position error has to be within of this value for a period of MotionDoneCheckingTime to validate this condition e MotionDoneVelocityThreshold This parameter defines the velocity window The velocity at the end of the motion has to be within of this value for a period of MotionDoneCheckingTime to validate this condition e MotionDoneCheckingTime This parameter defines the period during which the conditions for the MotionDonePositionThreshold and the MotionDoneVelocityThreshold must be true before setting the motion done e MotionDoneMeanPeriod A sliding mean filter is used to attenuate the noise for the position and velocity parameters The MotionDoneMeanPeriod defines the duration for calculating the sliding mean position and velocity The mean position and velocity values are compared to the threshold values as defined above This parameter is not illustrated on the graph e MotionDoneTimeout This parameter defines the maximum time the controller will wait from the end of the theoretical move for the MotionDone condition before sending a MotionDone time out Important The XPS controller can only execute a new move on the same positioner or on the same motion group when the previous move is completed MotionDone and when the positioner or the motion group is again in the ready state The XPS controller allows triggering an action when the motion is completed MotionDone by using the event MotionEnd For
216. ke v NOTINIT 1 EMERGENCY_ BRAKING 4 9 3 5 6 8 A y A A al iError I i i s f I i i 41 I 1 MOTOR INIT i E i Error l ERE Error Excitatio Mu Signal Erto l i rds I l Error i Moto on l l Signal i e end HOMING d 42 b Done gt 43 atk 27 NOTREF READY c 64 d 11 REFERENCING a GroupInitialize b GroupHomeSearch or c GroupReferencingStart d GroupReferencingStop e PositionerExcitationSignalSet f PositionerPreCorrectorExcitationSignalSet QS Newport Experience Solution XPSDocumentation V1 4 x EDH0301 En1050 08 15 196 XPS Q8 Controller Motion Tutorial 18 0 Introduction to XPS Programming For advanced applications and repeating tasks it is usually better to sequence different functions in a program rather than executing them manually via the web site interface Motion process programs can be written in different ways but essentially are distinguished between host managed and XPS managed processes A host managed uses the Ethernet TCP IP interface from a PC to control the XPS The XPS managed process is controlled directly by the XPS controller via a TCL script The chapter provides a brief introduction of the different ways of programming the XPS This section however cannot address all details For further information refer to the TCL and the software drivers manual of the XPS controller which are accessible via the XPS web site Host managed
217. l All servitude inputs expect normally closed sensors referenced to ground input is activated if the sensor is open and have internal 2 2 kQ pull up resistors to the 5 V 20 4 Analog Encoder Inputs Analog Encoder Connectors The analog encoder interface complies with the Heidenhain LIF481 glass scales wiring standard QW Newport Experiences Salvin 207 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Appendix 20 5 Analog I O GPIO2 Connector 20 5 1 Analog Inputs The 4 analog inputs have a range of 10 V 14 Bit resolution and a 15 kHz 2nd order low pass filter In all cases the analog input values must be within the 10 V range The analog input impedance is typically 22 kQ The maximum input current is 500 uA 1 LSB 20 V 16384 1 22 mV The maximum offset error is 17 1 mV 20 5 2 Analog Outputs The 4 analog outputs have a range of 10 V and 16 Bit resolution The maximum offset error is 2 mV and the maximum gain error is 6 LSB The output settling time is typically 50 usec at 1 of the target value output filter is a 15 kHz Ist order low pass filter Analog outputs are voltage outputs output current less than 1 mA so to use them properly they must be connected to an impedance higher than 10 kQ 1 LSB 20 V 65536 0 3 mV Analog outputs can be accessed via the GPIOAnalogSet GPIO2 DA Cn function QS Newport Esperance Salvin XPSDocumentation V 1 4
218. l 1 Select a positioner name The following screen appears ADO N t SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS DOCUMENTATION MULTL M1 Initialize Kill group Kill All Absolute move _Go Auto scaling State Not initialized state from scaling calibration Current position 0 414990 Corrector parameters Filters parameters Acquisition parameters ClosedLoopStatus 1 NotchFrequency1 6 Gathering 1 x KP 219000 NotchBandwidth1 6 Gathering 2 KI 15600000 NotchGaini oo Gathering 3 m KD 875 NotchFrequency2 0 Gathering 4 KS NotchBandwidth2 o Gathering 5 IntegrationTime 1e 99 NotchGain2 o Number of points 1000 DerivativeFilterCutOffFrequency 5000 CurrentVelocityCutOffFrequency 50 Frequency divisor 10 GKP NEM CurrentAccelerationCutOffFrequency 5 Velocity 25 GKI 0 Set Save Cancel Acceleration 1000 GKD 0 MinimumTjerkTime 0 005 KForm 0 MaximumTjerkTime 0 05 KFeedForwardAcceleration 1 Distance 0 KFeedForwardJerk 0 Set amp Move Cancel Set Save Cancel Auto tuning Mode Short settling _ Refresh rate frames sec 1 00 Set QD Newport Sect apecence Soutora LIRE XPSDocumentation V1 4 x EDH0301En1050 08 15 60 Experience Soon XPS Q8 Controller Software Tools 20 18 16 14 11 I H H EX un J AH Newport S Spectra Physics 2 Perform a data gathering wit
219. l purposes e Spline trajectory elements segments are 3 order polynomial curve segments S u joining the positions Pi Xii Yi 1 Zi 1 and P Xi Yi Zi Here u is the normalized time parameter that varies from 0 corresponding to Pj 1 to 1 corresponding to Pi e Spline trajectories form a continuous path each segment s output position is equal to the next segment s input position and the segment tangential angles at the connection point of any two consecutive segments are continuous including its derivative For reference this discontinuity is categorized as R wherein position and velocity are continuous but not acceleration 8 2 3 Geometric Conventions The Spline trajectory s coordinate system is an XYZ orthogonal system The X axis of this system correlates to the XPositioner the Y axis to the YPositioner and the Z axis to the ZPositioner of the XYZ group as defined in the stages ini The origin of the XYZ coordinate system is in the lower left corner with positive values up Z to the right X and forward Y All angles are measured in degrees presented as floating point numbers Angle origin and sign follow the trigonometric convention positive angles are measured counter clockwise GO Newport Esperance Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 96 XPS Q8 Controller Motion Tutorial 8 24 Catmull Rom Interpolating Splines To trace a smooth curve that links differe
220. l be 0 0 0 0 In that case contact your IT department CO Newport XPSDocumentation V1 4 x EDH0301En1050 08 15 22 XPS Q8 Controller User s Manual Remove the REMOTE cable and if needed configure your PC back to its original Ethernet configuration you have saved before modification Make sure that the standard CAT 5 network cable black is connected to the HOST connector of the XPS controller and to your network Open your internet browser and use the dynamic IP address er Edition Affichage Favoris Outils CONTROLLER CONFIGURATION FR IP managem Check with your IT department that the lease time set at the DHCP is longer than the time you plan to leave the XPS switched off otherwise you will lose your dynamic address and will need to connect to the REMOTE to know the new assigned one by the DHCP NOTE Do not use Dynamic IP configuration if your DHCP server uses Windows NT 4 0 Experience Soutons 23 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS QS Controller User s Manual 3 5 6 Recovering a lost IP configuration If you want to recover a lost IP configuration you need to connect the PC directly to the REMOTE connector at the back of the XPS with the gray cross over cable Figure 15 Direct connection to the XPS using a cross over cable and the REMOTE connector First the IP address on the PC s Ethernet card must be set to match the fixed IP address ofthe XPS in the REMOTE plug 1
221. ld be connected to a power installation that incorporates appropriate protection devices Refer to the installation requirements of your facility and local applicable Standards concerning the use of RCDs residual current device Dimensions W x D x H e 9 AU L 508 mm Weight 2 2 QW Newport Experiences Saulia 15 kg max Drive Options The XPS controller is capable of driving up to 8 axes of most Newport positioners using driver cards that slide through the back of the chassis These factory tested drives are powered by an internal 500 W power supply which is independent of the controller power supply When used with Newport ESP stages the configuration of the driver cards is easy using the auto configuration utility software Advanced users can also manually develop their own configuration files optimized for specific applications The XPS DRVO1 is a software configurable PWM amplifier that is compatible with most of Newport s and other companies DC brush and stepper motor positioners The XPS DRV01I motor driver supplies a maximum current of 3 Amps and 48 Volts It has the capability to drive bipolar stepper motors in microstep mode sine cosine commutation and DC brush motors in velocity mode for motors with tachometer or voltage mode for motors without tachometer Programmable gains and a programmable PWM switching frequency up to 300 kHz allow a very fine adjustment of the driver to the motor For a
222. le Positioner mapping section The positioner mapping data is defined in a text file Each line of that file represents one set of data Each set of data is composed of the position and the error at this position The separator between the two data entries in each line 1s a tab All positions are relative to the physical home position of the positioner The data file must contain the line 0 0 which means that the error at the home position is 0 This hardware reference for positioner mapping has the advantage of being independent of the value of the HomePreset The following shows the general structure of such a data file PosMin Error 0 Pos 1 Error 1 Pos 2 Error 2 0 0 PosMax Error LineNumber 1 To activate positioner mapping the mapping file must be in the admin config directory of the XPS controller and the following settings must be configured in the stages ini e PositionerMappingFileName Name of the mapping file e PositionerMappingLineNumber Number of lines of the file e PositionerMappingMaxPositionError Maximum absolute error in the file must be larger than any entry in the mapping file To be read properly the error entries must be in index format see example PositionerMappingLineNumber and PositionerMappingMaxPositionError are only used to check for the correctness of the mapping file Experience Solution XPSDocumentation V1 4 x EDH0301En1050 08 15 114 XPS Q8 Controller Motion Tutorial
223. leAxisInUse Single SingleAxisWithClampingInUse CLAMPING SingleAxisThetaInUse THETA SpindleInUse SPIN XYInUse XY XYZInUse XYZ TZInUse TZ MultipleAxesInUse MULTI MULTI PositionerInUse M1 M2 M3 gt GO Newport GS specira Physics A retener Corea wien Solutions to Make Manage and Measure Light 5 Do the same for all other motion groups When done click on Generate config files and Boot to apply the new configuration XPSDocumentation V1 4 x EDH0301En1050 08 15 42 XPS Q8 Controller Software Tools NOTE Generate config files and Boot deletes the current system ini file To create a copy of the current system ini file retrieve this from the admin config folder of the XPS controller The following screen appears Microsoft Internet Explorer X AN Your modiications have been processed and the controller is nov rebooting Click on OKR 6 When the controller has finished booting second beep after 12 18 seconds select the SYSTEM tab then Error File Display When there is no entry in the error file your system is configured correctly and ready to use If not this file provides some valuable information for troubleshooting see also chapter 4 5 This is an example of a system ini file with one XY group and one Spindle group GENERAL BootScriptFileName BootScriptArguments GROUPS SingleAxisInUse Spindleln
224. lower left corner with positive values up and to the right All angles are measured in degrees presented as floating point numbers Angle origin and signs follow the trigonometric convention positive angles are measured counter clockwise 8 1 4 Defining Line Arc Trajectory Elements A Line arc trajectory is defined by a number of line and arc elements The trajectory elements are executed in the same order as defined in the trajectory data file Experiences Salvin aa E ae Entry Angle Lines A Figure 25 Line arc trajectory example 91 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial Figure 25 shows a trajectory example Every trajectory must have a first element entry angle called First Tangent defined in the head of the trajectory data file If the first element is a line this parameter has no effect If the first element is an arc the entry angle is the tangent to the first point of the arc Each trajectory element is identified by a number starting from 1 The references for synchronizing external events with the trajectory execution are the starting and ending points of these elements Line and arc elements can be sequenced in any order An arc is automatically placed by the controller so that its entry angle corresponds to the exit angle of the preceding element to ensure the continuity of the trajectory But with every line segment the user must choose the X
225. lso limit the trajectory velocity For example the case of a Line arc trajectory containing arc segments with a small radius e The maximum possible trajectory acceleration that is compatible with all positioners parameters This means that one of the positioners will reach its maximum allowed acceleration during the trajectory execution The XYLineArcVerificationResultGet function returns the trajectory execution limits that have previously been calculated by the XYLineArcVerification function Note about this function s result Only the returned travel requirements are specific for each GO Newport Experience Solutio XPSDocumentation V 1 4 x EDH0301En1050 08 15 94 XPS Q8 Controller Motion Tutorial positioner The returned velocity acceleration values are the same for all positioners because they represent the trajectory s velocity acceleration To execute a Line arc trajectory send the function XY LineArcExecution with the parameters for the trajectory velocity and the trajectory acceleration that is used during the start and end of the trajectory The motion profile for Line arc trajectories is trapezoidal The function XY LineArcExecution does not verify the trajectory coherence or geometric conditions exceeding any positioners min or max travel speed or acceleration before execution so users must pay attention when executing a trajectory and verify the trajectory relative to the maximum possible
226. lt 0x00000008 3 Motion done time out 0x00000010 4 Requested position exceed travel limits in trajectory or slave mode 0x00000020 Requested velocity exceed maximum value in trajectory or slave mode 0x00000040 6 64 Requested acceleration exceed max value in trajectory or slave mode 0x00000100 8 256 Minus end of course activated 0x00000200 9 512 Plus end of course activated 0x00000400 10 1024 Minus end of run glitch 0x00000800 11 2048 Plus end of run glitch 0x00001000 12 4096 Encoder quadrature error 0x00002000 13 8192 Encoder frequency and coherence error 0x00010000 16 65536 Hard interpolator encoder error 0x00020000 17 131072 Hard interpolator encoder quadrature error 0x00100000 20 1048576 First driver in fault 0x00200000 21 2097152 Second driver in fault Examples EventExtendedConfigurationTriggerSet MyGroup MyPositioner PositionerError 2 0 0 0 This event happens when the positioner MyGroup MyPositioner has a fatal following error EventExtendedConfigurationTriggerSet MyGroup MyPositioner PositionerError 12 0 0 0 This event happens when the positioner MyGroup MyPositioner has either a home search time out or a motion done time out QS Newport Experencs Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 134 XPS Q8 Controller Motion Tutorial PositionerHardwareStatus Triggers an action when the current hardware status applied with the error mask results in a value other than zero
227. lynomial pieces for each positioner that hit the positions P at time ti 1 with a velocity vi 1 and positions Pi QW Newport Experiences Salvia 101 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial 8 3 3 8 3 4 at time t with a velocity vi There is no direct link between the trajectories of the different positioners in a MultipleAxes group PVT trajectories form a continuous path each segment output position is equal to the next segment input position and the segment tangential angles at the connection point of any two consecutive segments are continuous including its derivative It means that the PVT trajectory continuity property is R The input velocity of any element is equal to the output velocity of the previous element The input velocity for the first element is always zero The output velocity of the last element must be zero as well Geometric Conventions The coordinate system can be any convention it does not need to be an orthogonal system A PVT trajectory can be defined for any MultipleAxes group There is no limit to the number of positioners belonging to that MultipleAxes group It is also possible to define a PVT trajectory for a MultipleAxes group that contains only one positioner PVT Interpolation For each positioner belonging to the MultipleAxes group the PVT trajectory calculates a 3 order polynomial curve P u that can be presented by t
228. mEncoderCorrectionY O Center 1 2 3 Encoders r EncoderRadius tl t2 t3 delta encoder counter T1 Encoder position 1 T2 Encoder position 2 X T3 Encoder position 3 71472473 3 T3 T2 T Translation i v3 ty cu ri Y correction 3 R Rotation R X correction 127 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial 11 0 Event Triggers XPSDocumentation V1 4 x EDH0301En1050 08 15 128 XPS event triggers work similar to IF THEN statements in programming If the event occurs then an action is triggered Programmers can trigger any action from a list of possible actions see section 11 2 at any event from a large list of possible events see section 11 1 It is also possible to trigger several actions with the same event Furthermore it 1s possible to link several events to an event configuration In this case all events must happen at the same time to trigger the action s It is comparable to a logic AND between the different events Some events are one time events like motion start They will trigger an action only once when the event occurs Some other events have a duration like motion state They will trigger the same action each time as applicable as long as the event occurs For events with duration the event can be also considered as a statement that 1s checked whether it is true or not A third event category are the per
229. manent events Always always happens and Timer happens every nth servo cycle They will trigger the action always on every nth servo cycle As the XPS controller provides the utmost flexibility in programming event triggers the user must be careful and consider possible unwanted effects Some events might have a duration although only one single action is asked Some other events might never occur This is especially true when linking several events to an event configuration The different possible effects are illustrated in section 11 3 by a few examples To trigger an action with an event the event and the associated action must first be configured using the functions EventExtendedConfigurationTriggerSet and EventExtendedConfigurationActionSet Then the event trigger is activated using the function EventExtendedStart When activated the XPS controller checks for the event at each servo cycle or each profiler cycle for those events that are motion related and triggers the action when the event happens Hence the maximum latency between the event and the action is equal to the servo cycle of 125 us or equal to the profiler cycle time of 400 us For events with duration it means that the same action is triggered at each servo cycle i e every 125 us or at each profiler cycle i e every 400 us as long as the event is happening Event triggers and their associated actions are automatically removed after the event config
230. me teme 00000 8 et aerintiinton 8 IV Use a force ratio x f y Positioner Y This is an example of a system ini file with one XY gantry GROUPS SingleAxisInUse SpindlelnUse XYInUse MyXYGantry XYZlnUse MultipleAxesInUse MyXYGantry PositionerlnUse X Y InitializationAndHomeSearchSequence YThenX XMappingFileName YMappingFileName Gantry Force Ratio parameters YOffsetForForceRatio 0 PrimaryYForceRatio 0 SecondaryYForceRatio 0 MyXYGantry X PlugNumber 1 StageName IMS600LM Secondary positioner X2 SecondaryPlugNumber 4 SecondaryStageName IMS600LM SecondaryPositionerGantryEndReferencingPosition 10 2243 SecondaryPositionerGantryEndReferencing Tolerance 0 1 SecondaryPositionerGantryOffsetAfterlnitialization 7 47 MyXYGantry Y PlugNumber 3 StageName IMS400LM XPSDocumentation V1 4 x EDH0301En1050 08 15 48 did XPS Q8 Controller Software Tools 4 10 Experience Solutiom STAGE Add from Data Base With the help of this screen a stage from the Newport stage data base can be added to the personal stage data base called stages ini In the lower left corner you can review the name of the stages that are already in this stage data base To add a new stage do the following 1 Double click to select a family name from the list 2 Double click to select the part number corresponding to your hardware 3
231. ments per positioner as well as the maximum possible trajectory speed and trajectory acceleration that is compatible with the different positioner parameters The spline trajectory executes a Catmull Rom spline which is a 3rd order polynomial curve on an XYZ group The main requirements of a spline are to hit all points except for the first and the last point that are only needed to define the start and the end of the trajectory and to maintain a constant speed throughout the entire path except during the acceleration and deceleration period The definition and execution of the spline trajectory is similar to the Line arc trajectory with similar functions for trajectory pre checking The PVT mode is the most complex trajectory and is only available with MultipleAxes groups In a PVT trajectory each trajectory element is defined by the end position and end speed of each positioner plus the move time for the element When all elements are defined the controller calculates the cubic function trajectory that will pass through all defined positions at the defined times and velocities PVT is a powerful tool for any kind of trajectory with varying speeds and for trajectories with rotation stages or other nonlinear motion devices Line Arc Trajectories Trajectory Terminology Trajectory defined as a continuous multidimensional motion path Line arc trajectories are defined in a two dimensional XY plane These are used with XY groups The main
232. n about the firmware and the hardware of the controller It is an important screen for troubleshooting the controller AD N SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS IP management Users management General Versions display LO Newport S Spectra Physics Solutions to Make Manage and Measure Light txperesce Saara a rene od woan Corpus iue XPSDocumentation V1 4 x EDH0301 En1050 08 15 38 XPS QS Controller Software Tools 4 5 SYSTEM Error file display The Error File Display is another important screen for troubleshooting the XPS controller When the XPS encounters any error during booting for instance due to an error in the configuration files or because the configuration 1s not compatible with the connected hardware there are entries in the error log file that guides you to correct the error When no error is detected during the system boot this file is blank SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS Newport Auto configuration Manual configuration Error file display Error file display LO Newport S Spectra Physics Solutions to Make Manage and Measure Light tiperexce Sonora a ened Narr Copan tee 4 6 SYSTEM Last error file display The Last error file display shows errors encountered in the last XPS boot When no error is detected during the last system boot this file 1s blank A N t SYSTEM STAGE CONTR
233. n and the best approach to control the XPS using a program However not all details can be addressed in this chapter QW Newport Experiences Salvia 197 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial 18 1 TCL Generator The TCL generator provides a convenient way of generating simple executable TCL scripts These scripts are also a good place to start for the development of more complex scripts Note that applications that are memory intensive or require links other XPS may require a script that is external to the XPS The TCL generator is accessible from the terminal page of the XPS web site Pressing the TCL generator button generates a TCL script that includes the commands previously executed and listed in the Command history list Note that the command order in the generated TCL script is the same but in inverted order as the executed commands in the Command history list The name of the generated TCL script is History tcl and is stored in the Admin Public Scripts folder in the controller Be aware that generating a TCL script overwrites an already created History tcl file if it is present on the XPS To permanently save the created TCL script connect to the XPS via FTP and either rename or move the History tcl file before generating a new History tcl from the TCL Generator button Example This is an example using three stages two in an XY group named XY and one in a Si
234. n that file as shown in the tables below e YMappingFileName Name of the mapping file e YMappingLineNumber Total number of lines of that file e YMappingColumnNumber Total number of columns of that file e YMappingMaxPositionError Maximum absolute error in that file must be larger than any entry in the mapping file To be read properly the error entries must be in index format see example The X Y MappingLineNumber X Y MappingColumnNumber and X Y MappingMaxPositionError are only used to check for the correctness of the mapping file Example The following shows an example of the X and Y mapping files Matrix X XYMapping X txt 3 00 0 00192 0 00453 0 00331 0 00787 0 00232 0 00134 0 00789 2 00 0 00534 0 00322 0 00845 0 00228 0 00210 0 00308 0 00148 Matrix Y XYMapping Y txt 3 00 0 00172 0 00433 0 00311 0 00737 0 00212 0 00114 0 00689 2 00 0 00434 0 00222 0 00635 0 00128 0 00110 0 00208 0 00128 1 00 0 00254 0 00676 0 00769 0 00787 0 00342 0 00675 0 00234 1 00 0 00154 0 00376 0 00569 0 00387 0 00142 0 00375 0 00134 Verify in the stages ini for both stages 0 00 0 00023 0 00049 0 00102 0 0 00089 0 00101 0 00121 0 00 0 00013 0 00029 0 00089 0 0 00079 0 00089 0 00101 1 00 0 00254 0 00676 0 00769 0 00787 0 00342 0 00675 0 00234 1 00 0 00204 0 00636 0 00739 0 00567 0 00332 0 00375 0 00232
235. nResultGet XY Group XPositioner Name NegTravel PosTravel MaxSpeed MaxAcceleration This function returns the name of the trajectory checked with the last sent function XYLineArcVerification to that motion group Linearcl trj the negative or left travel required for the XYGroup XPositioner the positive or right travel required for the XYGroup XPositioner the maximum trajectory velocity and the maximum trajectory acceleration XYLineArcExecution XY Group Linearcl trj 10 100 2 Executes the trajectory Linearcl trj with a trajectory velocity of 10 units s and a trajectory acceleration of 100 units s two 2 times XYLineArcParametersGet XYGroup FileName Trajectory Velocity TrajectoryAcceleration ElementNumber Returns the name of the trajectory in execution Linearc1 trj the trajectory velocity 10 the trajectory acceleration 100 and the number of the current executed trajectory element QW Newport Experiences Saulia 95 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial 8 2 Splines 8 2 1 Trajectory Terminology Trajectory Continuous multidimensional motion path Spline trajectories are defined in a three dimensional XYZ space They are available with XYZ groups only The major benefit provided by a spline trajectory is to hit all points except for the first and the last point that are needed to define the start and the end and to maintain an almost co
236. nction PositionerBacklashSet The new value for the backlash will be taken into account with the next following move Finally the function PositionerBacklashGet returns the current value of the backlash and the backlash status enabled or disabled For backlash setting to remain set after power down the stages ini file must be modified with the value desired Experience Solution XPS Q8 Controller Motion Tutorial 10 2 10 3 QW Newport Experiences Salvin Example In the Backlash section of the stages ini file set a value greater than or equal to 0 Backlash Backlash 5 units This example shows the sequence of functions that enable backlash compensation PositionerBacklashEnable MyGroup MyPositioner GroupInitialize MyGroup GroupHomeSearch MyGroup PositionerBacklashSet MyGroup MyPositioner 10 PositionerBacklashGet MyGroup M yPositioner Backlash Status Returns the backlash value 10 and the backlash status Enable PositionerBacklashDisable MyGroup MyPositioner Linear Error Correction Linear error correction is applicable on all positioners and works in parallel with any other compensation To use linear error correction you need to set a value for LinearErrorCorrection in the stages ini When set the corrected positions are calculated in the following way Corrected position HomePreset EncoderPosition HomePreset x 1 LinearEncoderCorrection 1
237. ndedEv entHName 251 Edit Ail GPIOZ ADCI GFIOZ ADCZ GPIO2 ADCS GPIO2 ADCA GFIO2 DACtY GPIO2 DAC2 GPFIO2 DAC3 GFIO2 DAC4 GPIO1 DI GFIOZ2 DI GPIO3 DI GPFIOZ DI GPFIO1 DQO GPFIO3 DO Motion Tutorial G1 P1 The type of data that gathered is defined with the function GatheringConfigurationSet CurrentPosition of positioner G1 P1 To store the data from internal memory to the flash disk in the XPS controller send the function GatheringStopAndSave The GatheringRun deletes the current data file in internal memory in contrast to the GatheringOneData which appends data to the current file Also the function GatheringStopAndSave stores the data file under a default name Gathering dat on the flash disk of the XPS controller and will overwrite any older file of the same name in the same folder Hence make sure to store valuable data files under a different name before a GatheringStopAndSave NOTE When using the function EventExtendedConfigurationTriggerSet or EventExtendedConfigurationActionSet from the terminal screen of the XPS utility the syntax for one parameter is not directly accessible For instance for the event XY X SGamma MotionStart first select XY X from the choice list Then click on the choice field again and select SGammaMotionStart See also screen shots below For specifying more than one data type use the ADD button Select the next parameter as described above
238. ndle 20 0 0 cccccccsssssssssssnneececeeeeeeeeessessssnsssaaeaeeeeeeeeeeseseseesnneeees 53 AAS BRONIPANEBL DO VIEW antessemutentetestent Ete E e E N A darse ues iE SEEE EEE E USE 54 AN FRONT PANEL 10 Sofres AEE E EEA aa 54 4 17 FRONT PANEL Positioner Errors ccccccccceceeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeeees 55 4 18 FRONT PANEL Hardware Status ssssssssseeeeeeeeeeeeeeeee nnne nee 55 4 19 FRONT PANEL Driver Status esssssssssssssssseeeeseee eene eene nnnnnn nnne eene nnn nnns 56 5 OPTED Deere 56 4 21 TUNING Auto Scaling 0 ccc cccccccessesessssseeeeseeeeeeeseeeeeeeeeeeeeeeeseeeeeeseeeeeeeeseeeeeeeeeeeeeees 59 222 TUNING tos i tasers sos es sees e eens eee ee ees 60 OS TFPOUNCHONSETE T Ramen ne eee ee enn E eee 63 4 24 FTP File Transfer Protocol Connection c ccc cesssssssseeececccceeeeeeceaeeeessessseeeeeceeceeeeeeeaaas 63 3 0 iMauntenance and SOI VICE sete ccccececdecceeteccteccccseseseaicceseceetoucveseceteccccbosesesecceoues 65 EE Uu ERR 65 me CHHEUESISRAC NE MRT me tre ene te ee ae ee 65 235 MENO etm 65 5 4 Updating the Firmware Version of Your XPS Controller eeeeeeeeeeeeeeeeeeee 66 Motion Tutorial 600 POPS m wdlucdil er c MM 67 OMEN SION 67 02 Sale Diap ami oair snai eA S EENE ESO AE ENA EAEE SARA EAE SANN EAE 68 Cr Moon Grous eer n Enna E ONE ORINE EAEE EN EE SR OEE
239. ndly to prevent the motion device from hitting a travel obstruction set by the application or its own hardware travel limits the controller uses software limits To be efficient the software limits must be referenced accurately to the home before running the application After motor initialization any motion group must first be homed or referenced before any further motion can be executed Here homing refers to a predefined motion process that moves a stage to a unique reference position and defines this as Home Referencing refers to a group state that allows the execution of different motions and the setting of the position counters to any value see next section for details The referencing state provides flexibility for the definition of custom home search and system recovery processes It should only be used by experienced users A number of hardware solutions may be used to determine the position of a motion device the most common are incremental encoders By definition these encoders can only measure relative position changes and not absolute positions The controller keeps track of position changes by incrementing or decrementing a dedicated counter according to the information received from the encoder Since there is no absolute position information position zero is where the controller was powered on and the position counter was reset To determine an absolute position from incremental encoders the controller must use a
240. nector Mating connector Female DB15 with LINCATAO lockers Signal type Function Signal ype Function Supply GHD TTL input Input 1 Reserved TTL input Input 2 output Output 1 TTL input Input 3 autput Output 2 TTL input Input 4 C autput Output 3 TTL input Input 5 Guiput Output 4 TTL input Input amp autput Output 5 Supply 5 supply autput Output amp oulput 100m lt A4 CO Cn Cn d Q3 Bl Figure 68 GPIO3 Digital I O Connector General Purpose Inputs Outputs GPIO3 is a digital I O connector 22 4 GPIO4 Connector GPIO4 qq Mating connector Female DESF with UNC4 40 lockers AT PIM Signal type Description Signal type Description TTL input Input 1 TTL input Input z TTL input Input 3 TTL input Input 4 TTL input Input 5 TTL input Input amp TTL input Input 7 TTL input Input amp TTL input Input 8 TTL input Input 10 TTL input Input 11 TTL input Input 12 Supply GND Supply 5 supply autput 100m Supply D C qulput D C output D C qulput Ut 5e Cn GA C Bj oe GND Output 2 Output 4 Output amp D C output D C output D C output Supply Output 1 Output 3 Output amp 5V supply autput lt 100mA Supply GND j TTL input Input 13 TTL input Input 14 TTL input Input 15 TTL input Input 16 O C output Output 7 output Output 8 O C output Output 8 output Output 10 O C output Output 11 output Output 12 O C output Output 13 output Output 14 O C output Outp
241. ng buffer from memory GatheringConfigurationSet X Y X CurrentPosition XY Y CurrentPosition GPIO2 ADC1 The 3 data XY X CurrentPosition XY Y CurrentPosition and GPIO2 ADCI will be gathered EventExtendedConfigurationTriggerSet Timer1 0 0 0 0 GPIO2 ADC1 ADCHighLimit 5 0 0 0 EventExtendedConfigurationActionSet GatheringOneData 0 0 0 0 EventExtendedStart Different from the previous example here the event ADCHighLimit is linked to the event Timerl This has two effects First the event becomes permanent as the event timer is permanent Second one set of data is gathered only every 10 ms combination of events must be true For details on the event definition please see chapter 11 0 Event Triggers As a result one set of data is gathered every 10 ms whenever the value of the GPIO2 ADC1 exceeds 5 Volts Example 3 TimerSet Timerl 8 Sets the timer 1 to 8 servo ticks means every I ms GatheringReset Deletes gathering buffer from memory GatheringConfigurationSet XY Z X CurrentPosition XY Z Y CurrentPosition XY Z Z CurrentPosition EventExtendedConfigurationTriggerSet Timer1 0 0 0 0 XYZ Spline TrajectoryState 0 0 0 0 EventExtendedConfigurationActionSet GatheringOneData 0 0 0 0 EventExtendedStart In this example during the execution of the next spline trajectory on the group XYZ one set of data will be gathered every 10 ms In contrast to time based gathering which allows programming of a similar functi
242. ng line of piezoelectric stack stages This driver card has a range of 10 to 150 VDC with 30 mA continuous The drive features a 4 kHz update rate and resolution of 16 bits ADC and DAC It also accepts strain gage position feedback The XPS DRVO0O and XPS DRVOOP pass through module can be used to pass control signals to other external third party amplifiers drivers By setting the controller s dual DAC output to either analog position analog stepper position analog velocity analog voltage or analog acceleration including sine commutation the XPS is capable of controlling almost any motion device including 39 party brushless motors and voice coils In addition to conventional digital AquadB feedback encoder interface the XPS controller also features a high performance analog encoder input 1 Vpp Heidenhain standard on each axis An ultra high resolution very low noise encoder signal interpolator converts the sine wave input to an exact position value with a signal subdivision up to 32 768 fold For example when used with a scale with 4 um signal period the resolution can be as fine as 0 122 nm This interpolator can be used for accurate position feedback on the servo corrector of the system An additional hardware interpolator with 40 MHz clock frequency and programmable signal subdivision up to 200 fold is used for synchronization purposes This fast interpolator latches the position directly with less than 50 ns latency and provides a muc
243. ngleAxis group named S The following functions were executed in the Terminal web page KillAllQ GroupInitialize S GrouplInitialize X Y GroupHomeSearch S GroupHomeSearch X Y GroupMoveAbsolute S 70 GroupMoveAbsolute S 70 GPIODigitalSet GPIO3 DO 63 0 EventExtendedConfigurationTriggerSet XY X XY LineArcTrajectory Star t 0 0 0 0 EventExtendedConfigurationActionSet DOSet GPIO3 DO 42 42 0 0 EventExtendedStart XYLineArcVerification XY Linearc2 tr XYLineArcExecution XY Linearc2 trj 10 70 1 Then the TCL Generator button is pressed to create a TCL script file The file is named History tcl When executed that TCL file will execute all of the functions used individually in the terminal SN Command history list _TCt Generator Gathering display H t 0 0 0 0 0 0 0 0 IGroupMoveAbsolute S 70 IGroupHomesSearch XY 0 IGroupHomeSearch S 0 Izroupintialize XY ooo 9 7 0 0 IGroupinitialize S KIAIN lo XPSDocumentation V 1 4 x EDH0301En1050 08 15 198 XPS Q8 Controller Motion Tutorial QW Newport Experiences Salvin 18 2 To execute the script use the XPS function TCLScriptExecute History tcl task1 0 In this example after initializing and homing both groups the TCL script moves the single axis stage to the position of 70 units then to the position of 70 units It then sets all pins 1 6 on the
244. ni For the X axis Travels MinimumTargetPosition 3 unit HomePreset 0 unit MaximumTargetPosition 3 unit NOTE The limit travels must be equal or within the X limit positions of the mapping files shown here 3 and 3 For the Y axis Travels MinimumTargetPosition 3 unit HomePreset 0 unit MaximumTargetPosition 3 unit NOTE The limit travels must be equal or within the Y limit positions of the mapping files shown here 3 and 3 For Z axis Travels MinimumTargetPosition 1 unit HomePreset 0 unit MaximumTargetPosition 71 unit NOTE The limit travels must be equal or within the Z limit positions of the mapping files shown here 1 and 1 Represents the errors in the X axis Represents the errors in the Y axis Represents the errors in the Z axis Experience Salvin In the system ini file Mapping XYZ XMappingFileName XYZMapping X txt XMappingXLineNumber 7 XMappingYColumnNumber 7 XMappingZDimNumber 3 XMappingMaxPositionError 0 00787 YMappingFileName XYZMapping Y txt YMappingXLineNumber 7 YMappingYColumnNumber 7 YMappingZDimNumber 3 YMappingMaxPositionError 0 00534 ZMappingFileName XYZMapping Z txt ZMappingXLineNumber 7 ZMappingYColumnNumber 7 ZMappingZDimNumber 3 ZMappingMaxPositionError 0 0003 123 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial Use of the fun
245. nly work for Spindle groups ROD Newport SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCI lapi Talia I O view IfOset Positioner errors Hardware status EE E E 1 SP Pos Kill All NOTE The new velocity gets only applied with the next motion Refresh rate frames sec 1 00 _ Set AD NWevvport S Spectra PHYSICS Solutions to Make Manage and Measure Light perenne Soon Fr Caran nin QW Newport Experience Saulia 53 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Software Tools 4 15 FRONT PANEL I O View The I O View page shows the current states or values of all analog and all digital I O s of the controller To set the outputs use the page I O Set YB N t SYSTEM STAGE CONTROLLER CONFIGURA N FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS Move Jog Spindle Digital I O GPIO1 DI IN GPI01 00 or 0 0 0 0 o 0 0 0 GP102 01 o E See ie GP103 D1 mo pentes Ber OUT GPIO3 DO Eas eas RED ERES ee ERED GPIO4 DI ee se ae ee Oe aie ae ee ae GPIO4 DO our 8E FEE ERE EGRE ERE ERE EET IRE ERES ERE Analog I O GPIO2 ADC1 IN 0 0037 GPIO2 DAC1 OUT 0 0002 GPIO2 ADC2 IN 0 0015 GPIO2 DAC2 OUT 0 0002 GPIO2 ADC3 IN 0 0025 GPIO2 DAC3 OUT 0 0001 GPIO2 ADC4 IN 0 0061 GPIO2 DAC4 OUT 0 0002 4 16 FRONT PANEL T O Set The I O Set page allows setting the analog and digital outputs of the controller Y N t SYSTEM STAGE CONTROLLER CONFIG
246. nstant speed speed being the scalar of the vector velocity throughout the entire path except during the acceleration and deceleration periods Please note that the trajectory speed can vary in some areas depending on the distribution of the reference points This is related to the spline algorithm used Trajectory element segment An element of a spline trajectory is defined by a 3rd order polynomial curve joining two consecutive control points Trajectory velocity The tangential linear velocity speed along the trajectory during its execution Trajectory acceleration The tangential linear acceleration used to start and end a trajectory Trajectory acceleration and trajectory deceleration are always equal and by default 8 2 2 Trajectory Conventions When defining and executing a spline trajectory a number of rules must be followed e The motion group must be an XYZ group e All trajectories must be stored in the controller s memory under public trajectories one file for each trajectory Once a trajectory is started it executes in the background allowing other groups or positioners to work independently and simultaneously e Fach trajectory must have a defined beginning and end Endless infinite trajectories are not allowed Although N times N defined by user non stop execution of a trajectory is allowed As the trajectory is stored in a file the trajectory s maximum size maximum elements number is unlimited for practica
247. nt predefined trajectory points the intermediate points must be calculated following a mathematical model For the sake of simplicity in most cases this is done by a polynomial curve polynomial interpolation For motion systems the resulting curve should hit all predefined points This is called precise interpolation in contrast to approximate interpolation like Bezier splines where the predefined points act only as control points Within this class of precise interpolation are e Global polynomial interpolation One polynomial represents the whole trajectory Examples are Lagrange polynomials or Newton polynomials e Local polynomial interpolation Each segment that links two consecutive trajectory points has its own polynomial The resulting curve is obtained by segment polynomial concatenation To limit oscillations inside segments the polynomial order is generally limited to 3 or less This is called spline interpolation If the polynomial order is equal to 3 it is called cubic spline interpolation The interpolation methods are also classified by the continuity criterion CX An interpolating curve has the continuity C if it and its derivatives up to k degrees are continuous in all its points The interpolating spline curves generally have C or C continuity Catmull Rom splines are a family of local cubic interpolating splines where the tangent at each point pi is calculated based on the previous p and the next point pi on the s
248. nt that is currently being executed This function returns an error if the trajectory is not executing QS Newport Experience Sulam XPSDocumentation V1 4 x EDH0301 En1050 08 15 106 XPS Q8 Controller Motion Tutorial QW Newport Experiences Salvin Examples of the Use of the functions MultipleAxesPV TVerification NGroup PVT1 trj This function returns a 0 if the trajectory is executable MultipleAxesPV TVerificationResultGet NGroup 1Positioner Name NegTravel PosTravel MaxSpeed MaxAcceleration This function returns the name of the trajectory verified with the last functions call of MultipleAxesPVTVerification to the motion group NGroup PVTI trj and the trajectory limits for the positioner NGroup 1 Positioner These trajectory limits are the negative or left travel requirement the positive or right travel requirement the achieved maximum speed and acceleration Make sure that these trajectory limits required negative and positive travel speed and acceleration are within the soft limits of the stages defined in the stages ini file section Travel MinimumTargetPosition MaximumTargetPosition and section Profiler MaximumVelocity MaximumAcceleration MultipleAxesPV TExecution NGroup PVT1 trj 5 Executes the trajectory PVTI trj five 5 times MultipleAxesPV TParametersGet NGroup FileName ElementNumber Returns the currently executed trajectory file name PVTI trj and the numb
249. nterpolator quadrature fault Hard interpolator fault IP200 XY correction fault AquadBTheta encoder Quadrature error FOC fault XY correction fault AnalogAccelerationMotorInterface Driver fault AnalogDualSinAccelerationMotorInterface AnalogPositionMotorInterface AnalogSinAccelerationMotorInterface AnalogStepperPositionMotorInterface AnalogVelocityMotorInterface AnalogVoltageMotorInterface DigitalStepperPositionMotorInterface AnalogSinAccelerationLMIMotorInterface AnalogAccelerationT ZMotorInterface AnalogPositionPiezoMotorInterface Single Axis with clamping control e Unclamped state Single Axis theta QS Newport Experencs Salvin XPSDocumentation V1 4 x EDH0301En1050 08 15 110 XPS Q8 Controller Motion Tutorial 10 0 Compensation The XPS controller features different compensation methods that improve the performance of a motion system Backlash compensation The use of backlash compensation improves the bi directional repeatability and accuracy of a motion device that has mechanical play Backlash compensation is applicable to all positioners but it is not available in all motion modes When backlash compensation is activated the XPS controller adds a user defined BacklashValue to the TargetPosition to calculate a new target position whenever the direction of motion reverses This internally used new target position is then the basis for the calculations of the motion profiler No modification of the
250. ntroller The files XPS Q8 drivers h and XPS Q8 drivers lib must be copied to the project folder and the file XPS Q8 drivers dll to the folder of the executable file r1 Ire oe Em m e Exl_VersionGet files Ej Source Files pen T2 Ex1 VersionGet h Ex1 VersionGetDlg h Fichier Edition Affichage Favoris Outils 3 Resource h Pr c dente gt tj A Rechercher C Dossiers xJ as Kou ii XPSDocumentation V1 4 x EDH0301 En1050 08 15 200 J XP5 Q8 diivers h XPS Q8 diivers lib Resa i Ex1 VersionGet ico Z Ex1 VersionGet rc2 E FieadMe txl E E External Dependencies Adresse Debug 109 Ko Application 164 Ko Extension de l applic S lectionnez un l ment pour obtenir une description Once these files are added for instance to a C project the prototypes of the functions can be called in the program with the respective syntax of the functions parameters number type The file XPS Q8 drivers h can be opened to see the list of the available functions and their prototypes For instance the prototype of the function FirmwareVersionGet is as follows DLL int stdcall FirmwareVersionGet int Socketlndex char Version It requires two arguments int and char The maximum number of open sockets is 80 A supervisor can control as many XPS as much as the network and bandwidth can support Example C code char buffer 256
251. ny user given name Once the system has been built all system information is stored in a file called system ini Also the system ini file is located in the Config folder of the XPS controller The following describes the different steps needed to add a stage to modify the stage parameters and to build a manual configuration Chapter 4 0 provides further information about some of the steps described here Once you are logged in as Administrator click on STAGE and then click on Add from database 1 The following screen appears SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS DOCUMENTATION GOO Newport Add from database Modify NPX 4 Stages in the selected family Drivers and configuration XPS DRV01 XPS DRV01 Spindle URS100BPP URS150BPP RGV100BL XML350 M Use ESP compatibility for hardware detection IMS600LM VP 25XA PRIMARY Add new stage VP 25XA SECONDARY IMS600LM LEFT IMS600LM RIGHT LO Newport S Spectra Physics Solutions to Make Manage and Measure Light 2 Double click to select a family name from the list 3 Double click to select the part number corresponding to your hardware QW Newport Experiences Solytions 31 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller User s Manual 4 Select the driver corresponding to your hardware and configuration For all continuous rotation stages you
252. o cycle to set and generator CIE08 board enable new PCO pulses when previous has been fired Set motion parameters for scan PositionerSGammaParametersSet Positioner ScanVelocity ScanAcceleration MinimumJerkTime MaximumJerkTime Move the scanning positioner across the scanning zone during this move the firing pulses will be generated GroupMoveRelative Positioner ScanDistance CIE08 compensated position compare related functions Here 1s the list of the associated functions with a brief description For detailed information refer to the XPS Programmer s Manual Firing positions definition There are three ways to enter the firing positions reading from file writing directly to the controller s memory or calculating with a set function Firing positions definition from a data file Function PositionerCompensatedPCOFromFile Positioner FileName reads firing positions from a data file to the controller s memory Firing positions definition from a load to memory function Function PositionerCompensatedPCOLoadToMemory Positioner DataLines appends firing positions to the controller s memory from DataLines parameter To reset the controller s memory the PositionerCompensatedPCOMemoryReset function is provided Firing positions definition from a set function Function PositionerCompensatedPCOSet Positioner Start Stop Distance Width calculates a set of evenly spaced firing
253. o section 4 9 Don t check this box for a regular XY group or for a regular SingleAxis group 33 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller User s Manual 17 Click on VALID to return to the initial screen Cm R ort SYSTEM STARE CDNTROLLER CONFIGURATION FRONT PAMEL TERHIHAL TUMIMG FUNCTICHAL TESTS DCECUMENTATICHN ute contigqueaiees Manual configuratees Error fle displey System manual configuration Gunarating por tea rancor po gman E Abas mill ee geneoara bed the cestreDer vill euliiats You niid te iliii peur biiresar pratt d heer decoreta te bet the Ceabeller to tile ex actua the rue Generate config files and Boot Clear all GENERAL a baotScnetldaMamea Beene gumeni GROUPS InteiethedGroues 5ingle xuinise Single Cirle Wwehclampinglnus CLAMPING frig Theale m THE oar s E nie IPIN wrine XY x Tzln se XT Tbe qe Mulipietizet inion MULTI 18 Continue the same way with the other motion groups 19 When done click on Create new system ini file to complete the System configuration The controller re boots and the following message appears Microsoft Internet Explorer AX AN Your modifications have been processed and the controller b nov rebooting Boss Click on OR When the controller has finished booting a second beep after 12 18 seconds press F5 to
254. o the XPS controller Following is the procedure for connecting to the controller 6 Open Internet Browser and connect to http 192 168 0 254 in case using HOST connector or connect to http 192 168 254 254 in case using REMOTE connector Login Name Administrator Password Administrator Please see the picture below Rights Administrator NOTE Please note that the login text is case sensitive XPSDocumentation V 1 4 x EDH0301En1050 08 15 18 Experience Solutions XPS QS Controller User s Manual NNevvport Experience Solutions XPS Q8 Motion Controller Give your name password and status to log on Name Administrator Password 999000009090000 Rights C User i Administrator ENTER LO Newport G Spec tra Physics Solutions to Make Manage and Measure Light dapeneect mon ao of Remar Comoran Once logged in the XPS has established a direct connection to the local computer If you don t want to connect the XPS controller through a Corporate Network you may skip to section 3 7 Connecting the Stages NOTE If you want to change the IP address of the XPS controller follow the explanation in the next section It is necessary to keep using the gray cross over Ethernet cable to connect the XPS controller directly to the PC 3 5 4 Connecting the XPS to a Corporate Network using Static IP Configuration Once you are logged in using the previously described steps for direct conn
255. of 48 V DC Travel limit This input is pulled up to 5 V with a 2 2 kQ resistor by the controller and represents the stage positive direction hardware travel limit Travel limit This input is pulled up to 5 V with a 2 2 kQ resistor by the controller and represents the stage negative direction hardware travel limit Encoder A amp A These A and A inputs are differential inputs Signals are compliant with RS422 electrical standard and are received with a Experiences Solutio 213 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Appendix 24 2 Encoder B and B Index amp Index Encoder ground Origin 26LS32 differential line receiver A resistor of 120 Q adapts the input impedance The A and A encoder signals originate from the stage position feedback circuitry and are used for position tracking These B and B inputs are differential inputs Signals are compliant with RS 422 electrical standard and are received with a 26LS32 differential line receiver A resistor of 120 Q adapts the input impedance The B and B encoder signals originate from the stage position feedback circuitry and are used for position tracking These Index and Index inputs are differential inputs Signals are compliant with RS422 electrical standard and are received with a 26LS32 differential line receiver A resistor of 120 Q adapts the input impedance The Index and Index signals originate from the stage an
256. offset of 2 5 V 0 5 V Analog Index and Analog Index inputs are used to receive Index information from the encoder glass scale 5 VA This 5 VA DC supply is provided for powering the encoder T5 VL This 5 VL DC supply is provided for powering the limits when they are present on the glass scale Limit Limit Limit Signal Reference Home Signal Figure 76 Limit and Home TTL Input Signals Limit Limit Signal Limit Limit Signal Figure 77 Limit and Limit TTL Input Signals GS Newport Experience Solution XPSDocumentation V1 4 x EDH0301En1050 08 15 216 XPS Q8 Controller Appendix 26 0 Appendix H Trigger IN Connector TRIG IN Mating connector Female DBS with UNCA 40 lockers Figure 76 Trigger Input Connector Synchro is a TTL input It is used to trigger acquisition of the XPS controller acquisition External gathering A low to high transition will latch all encoders and analog inputs in the controller Experiences Saulia 217 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Appendix QW Newport Experencs Salvin XPSDocumentation V1 4 x EDH0301En1050 08 15 218 XPS Q8 Universal High Performance Motion Controller Driver Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone
257. ogParameterSet MyXY Group XPositioner 5 20 Only the X axis starts moving with a velocity of 5 units per second and an acceleration of 20 units per second GroupJogParameterSet MyXY Group XPositioner 0 20 The X axis stage stops moving its velocity being 0 units per second GroupJogModeDisable MyX Y Group Disables the Jog mode In Jog mode the profiler uses the CurrentPosition and the defined velocity and acceleration to calculate a new Setpoint position every 0 4 ms These new Setpoint positions are then transferred to the corrector loop which runs every 0 1 ms To accommodate the different frequencies between the profiler and the corrector a linear interpolation between the new Setpoint and the previous Setpoint is done Worst case a new velocity and acceleration can be executed only every 0 4 ms In Jog mode the profiler uses a trapezoidal motion profile see also section 7 1 for further details on motion profiles 7 7 Master Slave In master slave mode any motion axis can be electronically geared to another motion axes or a Single master with multiple slaves The gear ratio between the master and the slave is user defined During motion all axes compensations of the master and the slave are taken into account The slave must be a SingleAxis group The master can be a positioner from any group The Master slave relation is set by the function SingleAxisSlaveParametersSet The Master slave mode is enabled by the funct
258. oller there are 4 types of position information for each positioner TargetPosition SetpointPosition FollowingError and CurrentPosition These are described as follows The CurrentPosition is the current physical position of the positioner It is equal to the encoder position after all compensations backlash linear error and mapping have been taken into account The SetpointPosition is the theoretical position commanded to the servo loop It is the position where the positioner should be during and after the end of the move 71 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial The FollowingError is the difference between the CurrentPosition and the SetpointPosition The TargetPosition is the position where the positioner must be after the completion of a move When the controller receives a new motion command after the previous move 1s completed a new TargetPosition is calculated This new target is received as an argument for absolute moves For relative moves the argument is the length of the move and the new target is calculated as the addition of the current target and the move length Then the profiler of the XPS calculates a set of SetpointPositions to determine where the positioner should be at each given time When the positioner is controlled by a digital servo loop with a PID corrector part of the signals sent to the motor of the positioner is a function of the following error P
259. on data gathering will automatically stop at the end of the trajectory Also it is not needed to define the total number of data sets that will be gathered QS Newport Experencs Salvin XPSDocumentation V1 4 x EDH0301En1050 08 15 152 XPS Q8 Controller Motion Tutorial 12 3 12 4 QW Newport Experiences Salvia Function Based Internal Data Gathering Function based gathering provides a method to gather one set of data using a function It uses the same data file as the time based and the event based data gathering see chapters 13 1 and Erreur Source du renvoi introuvable for details At receipt of the function one set of data is appended to the gathering file in memory The data type s that can be collected with the event based gathering are the same as for the time based and the event based gathering see chapter 12 1 and 12 2 for details Example GatheringReset Deletes gathering buffer GatheringConfigurationSet XY X CurrentPosition XY Y CurrentPosition The 2 data XY X CurrentPosition and XY Y CurrentPosition will be gathered GatheringDataAcquire Gathers one set of data GatheringCurrentNumberGet This function will return 1 500000 1 set of data acquired max 500 000 sets of data can be acquired GatheringDataAcquire GatheringDataAcquire GatheringCurrentNumberGet This function will return 3 500000 3 sets of data acquired max 500 000 sets of data can be acquir
260. on Tutorial NOTE The AquadB signal configuration is only available with positioners that have an encoder AquadB or AnalogInterpolated The AquadB signals can not be provided at the same time as the distance spaced pulses PCO or the time spaced pulses The function PositionerPositionCompareEnable enables always the last configuration sent either distance spaced pulses defined with the function PositionerPositionCompareSet or AquadB pulses defined with the function PositionerPositionCompareAquadBWindowedSet QS Newport Esperance Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 170 XPS Q8 Controller Motion Tutorial 14 0 Control Loops 14 1 XPS Servo Loops 14 1 1 Servo structure and Basics The XPS controller can be used to control a wide range of motion devices which are categorized by the XPS as positioners Within the structure of the XPS firmware a positioner is defined as an object with an associated profile trajectory a PID corrector a motor interface a driver a stage and an encoder The general schematic of a positioner servo loop is below Corrector Loop FeedForward Input Profiler Trajectory l Generator T Filtering REDI Corrector amp Voltage to the Driver power enue Calculations Limitation driver to stage Feedback fro the encode Figure 51 Servo structure and Basics Motorized Stage The calculations don
261. onSet GatheringOneData 0 0 0 0 Defines the action gathers one set of data each trajectory pulse EventExtendedStart Starts the event trigger MultipleAxesPVTExecution XY Traj trj 1 Executes the trajectory Traj trj one time GatheringStopAndSave 157 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial Saves the gathering data from memory in a file gathering dat in the admin public folder of the XPS In this example one set of data will be gathered every 10 ms on the trajectory between the start of the 3rd and the end of the 5th element 13 3 Distance Time Spaced Pulses or AquadB Position Compare 13 3 1 Position compare settings and limits of use 13 3 1 1 Position compare calibration EncoderIndex Offset stages ini is a configuration parameter measured in position unit like mm deg used to correct the offset between stage raw encoder position and stage hard interpolator position values To measure EncoderIndexOffset value do the followings Set EncoderIndexOfjset 0 in stages ini then reboot the controller Send the following commands to the controller Grouplnitialize then GroupHomeSearch PositionerHardInterpolatorPositionGet Example PositionerHardInterpolatorPositionGet XY X double Controller response 0 Value example 0 0 001 Set EncoderIndexOffset Valuel in stages ini then reboot the controller once again Send the same commands Grouplnit
262. onnected to ground and plug this connector to the Newport stage interface see pinout description of the motor driver connectors in appendix F Configure your system with a number of these dummy stages Dummy stages can be found in the stages ini file see Admin Config folder of the controller under DUMMY STAGE QW Newport Experiences Saulia 27 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller User s Manual 3 8 Configuring the Controller When the driver boards are installed and the IP address is configured the controller can be configured for the stages e Switch off the XPS controller e Connect the stages or motion devices e Switch on the XPS controller and wait for the end of the boot sequence There is an initial beep a few seconds after power on and a second beep when the controller has finished booting The time between the first beep and the second beep is approx 12 18 seconds e Open an internet browser and connect to http lt your fixed IP address gt J JE http 192168 33 233 amp s x aly Favoris w j Galerie de composants v XPS Q8 Motion Controller Identification A A J v F NNevvport Experience Solutions XPS Q8 Motion Controller Give your name password and status to log on Name Administrator Password 9990000000000 Rights C User Administrator _ENTER QD Newport spea Physis Login Administrator Password A
263. ontroller User s Manual 3 5 Connecting to the XPS The Newport s XPS Controller Driver is a multi axis motion controller system that is based on a high performance 10 100 Base T Ethernet connection using a CATS cable The controller can be connected in 2 different ways 1 Direct connection PC to XPS through a cross over cable gray cable supplied 2 Corporate Network connection requires input from a Network Administrator black Two cables are provided with the motion controller e Cross over cable used when connecting the XPS directly to a PC e Straight Ethernet cable used when connecting the XPS through an intranet 3 5 1 Straight through cables black Standard Ethernet straight through cables are required when connecting the device to a standard network hub or switch Pin Assignments na we c c m 1 Orange White 2 Orange 3 Green White 4 Blue not used 5 Blue White not used 6 Green 1 Brown White not used 8 Brown not used Figure 12 Straight through cables 3 5 2 Cross over cables gray Standard Ethernet cross over cables are required when connecting the device directly to the Ethernet port of a PC NOTE Cross over cables are typically labeled cross over or XO at one or both ends Pin Assignments 1 1 1 8 2 z 3 3 b 6 Orange White Green White 2 range 2 Green 3 Green White 3 Orange White 4 Blue
264. optimize the performance of a gantry with linear motors It ensures the correct sinusoidal commutation of the two motor signals An accurate measurement of the offset can be done only with dedicated metrology tools For gantries NOT driven in acceleration mode e g gantries with NO linear motors this value is set to 0 Also for stages driven in acceleration mode and are configured for gantries it is recommended to force the initialization position using the LMI mode Large Move Initialization To do so append LMI to the line MotorDriverInterface AnalogSinX AccelerationLMI X 60 90 or 120 and add a line InitializationCycleDuration 5 at the end of the section with driver command interface parameters in the stages ini Example QS Newport Experience Solutio XPSDocumentation V1 4 x EDH0301 En1050 08 15 46 XPS QS Controller Software Tools Driver command interface parameters MotorDriverInterface AnalogSin120AccelerationLMI ScalingAcceleration 30641 units s AccelerationLimit 27856 units s MagneticTrackPeriod 24 units InitializationAccelerationLevel 20 percent Initialization CycleDuration 5 seconds With the LMI setting during initialization the motor is energized and the stage moves to the closest stable magnetic position The result is a quick motion of the stage at most by half of the length of the magnetic track This behavior might be undesired but provides a more failur
265. or 4 synch analog inputs 10 V 14 Bit 4 synch uncommitted analog outputs 16 Bit Watchdog timer and remote interlock Hardware latch of all positions and all analog I O s 8 kHz max frequency lt 50 ns latency on positions lt 100 us time jitter on analog I O s One high speed position compare output per axes that can be either configured for position synchronized pulses or for time synchronized pulses lt 50 ns accuracy latency 2 5 MHz max rate RS 422 differential inputs for A B and I Max 25 MHz over velocity and quadrature error detection 1 Vpp analog encoder input up to x32768 interpolation used for servo amplitude phase and offset correction additional 2nd hardware interpolator used for synchronization up to x200 interpolation Forward and reverse limit home error input Analog voltage analog velocity and analog acceleration used with XPS DRVO01 and XPS DRV03 for DC brush motor control Analog position used with XPS DRV0O1 for stepper motor control or with the XPS DRVPI for piezo control Analog position used with external drives for example 3rd party motors Analog acceleration sine acceleration and dual sine acceleration used with XPS DRV02 for brushless motors control Step and direction and pulse mode for stepper motors requires XPS DRVOOP and external stepper motor driver 500 W 230 VAC and 425 W 115 VAC total available power 100 240 VAC 60 50 Hz 10 A 5 5 A The controller shou
266. orce ratio for the two X positioners This variable force ratio accounts for the different forces required by the primary and the secondary X axes positioners depending on the position of the Y axis to ensure a torque free motion For details see chapter 4 9 3 NOTE When using the gantry configuration the secondary positioner is almost invisible in the application All functions are sent directly to the motion group or to the primary positioner of that group However it is possible to get information about the secondary positioner by data gathering and using SecondaryPositioner as the positioner name Example MySingleGantry S1 SecondaryPositioner FollowingError For further details about data gathering see chapter 12 0 4 9 1 Home search of gantries During the home search of a gantry first the secondary positioner is homed and the primary positioner follows the motion Then the primary positioner is homed and the secondary positioner follows the motion At the end the primary positioner 1s at its home position but the secondary positioner will be off its home position due to the tolerances in the assembly of the gantry This ideal position can be defined to be the position of best orthogonality between the X and Y axis of the gantry The parameter End referencing position defines the ideal position of the secondary positioner when the primary positioner is at 1ts home position The parameter End referencing toler
267. osition speed or acceleration copied to analog output e Trajectory precheck function replying with travel requirement and max possible speed e Auto tuning and auto scaling Motion e Jogging mode including on the fly changes of speed and acceleration e Synchronized point to point e Spindle motion continuous motion with periodic position reset e Gantry mode including XY gantries with variable load ratio e Line arc mode linear and circular interpolation incl continuous path contouring e Splines Catmull Rom type e PVT complex trajectory based on position velocity and time coordinates e Analog tracking using analog input as position or velocity command e Master slave including single master multiple slaves and custom gear ratio Compensation e Linear error Backlash positioner error mapping e XY and XYZ error mapping e All corrections are taken into account on the servo loop Control Loop e Open loop PI position PIDFF velocity PIDFF acceleration PIDDualFF voltage e Variable PID s PID values depending on distance to target position e Deadband threshold Integration limit and integration time e Derivative cut off filter 2 user defined notch filters QO Newport Experience Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 6 XPS Q8 Controller User s Manual Trigger In Trigger Out Dedicated Inputs Per Axis Drive Capability AC Power Requirements 30 TTL inputs and 30 TTL outputs open collect
268. other action in the SAME function Several actions must be separated by a comma Example EventExtendedConfigurationTriggerSet MyGroup MyPositioner PositionerError 2 0 0 0 EventExtendedConfigurationActionSet ExecuteTCLScript ShutDown tcl 1 0 0 ExecuteTCLScript ErrorDiagnostic tcl 2 0 0 EventExtendedStart In this example the TCL scripts ShutDown tcl and ErrorDiagnostic tcl are executed when a fatal following error is detected on the positioner MyGroup MyPositioner The exact meaning of the different actions and action parameters is as follows DOToggle This action is used to reverse the value of one or many bits of the Digital Output When using this action with an event that has some duration for example motion state the value of the bits will be toggled at each profiler cycle as long as the event occurs Action Parameter 1 Mask The mask defines which bits on the GPIO output will be toggled change their value For example if the GPIO output is an 8 bit output and the mask is set to 4 then the equivalent binary number is 00000100 So as an action bit 3 will be toggled Action Parameter 2 to 4 These parameters are 0 by default DOPulse This action is used to generate a positive pulse on the Digital Output The duration of the pulse is 1 microsecond To function the bits on which the pulse is generated should be set to zero before When using this action with an event that has some duration fo
269. ove2 Relative move 0 00269 0 Initialize MULTI M1 _Go Go _ lt gt 0 004199 0 Initialize MULTI M2 Go _Go I gt 0 001405 0 Initialize MULTI M3 _Go _6o EE Kill All NOTE The new velocity gets only applied with the next motion Refresh rate frames sec 1 00 Set A Newport 6 Spectra Physics Solutions to Make Manage and Measure Light perece Saara A eames id arp Carpete Click Initialize The State number changes from 0 to 42 and the Action button changes from Initialize to Home Click Home The stage starts moving to find its reference position When done the state number is 11 and the action button changes to disable Enter an allowed position value in the Abs move 1 field and click Go The stage moves to this absolute position Your system is now ready to use For more advanced functions please read the rest of this manual NOTE In AUTO CONFIGURATION the default group is set as SingleAxis To set the positioners to a different group type use manual configuration QS Newport Esperance Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 30 XPS Q8 Controller User s Manual 3 8 2 Manual Configuration for Newport Positioners Manual configuration provides users access to all capabilities of the XPS controller For manual configuration users first need to build the stage data base using the web tool Add from Database
270. over the previous parameters by rebooting the system 8 To test the behavior of the motion system with the new parameters repeat the same data gathering and compare the results Make manual changes to the settings and verify the behavior 9 To permanently save the settings to the stages ini press Save Save overwrites the current settings in your stages ini Press Save only when fully satisfied with the results For recovery Newport recommends making a copy of the stages ini with the old settings NOTE For further information about the meaning of the different tuning parameters see chapter 14 0 XPSDocumentation V1 4 x EDH0301 En1050 08 15 62 Experience Solutions XPS Q8 Controller Software Tools 4 23 FUNCTIONAL TESTS The FUNCTIONAL TESTS page allows running TCL scripts saved in the Admin Public Scripts FunctionalTests folder of the XPS controller Supplied in the firmware the Functional Tests scripts will then display the results of a gathering file Select the TCL Script name then press Execute script to run the script or Kill script to stop its execution SYSTEM STAGE CONTROLLER CONFIGURATION FRONTPANEL TER Functional tests TCL file name M List of arguments lo Execute script Kill script Qo Newport G spectra Physics Solutions to Make Manage an bpem Sonora 4 24 FTP File Transfer Protocol Connection FTP is the protocol for exchanging files over th
271. pline In case of the spline curve tension t 1 2 normal case the Catmull Rom spline is described by the following equation 1 3 3 1 np 2 5 4 Al p 10 1 0 pj 0 2 0 0 Duo Here pi are the coordinates of the predefined trajectory point in x y and z pxi py pzi u is the normalized interpolating parameter varying from 0 starting at pi to 1 ending at pin S u ty u u No Catmull Rom splines have a C continuity continuity up to the first derivative local control and interpolation Catmull Rom splines have the advantage of simple calculation without matrix inversion for on line calculations which is a great advantage for splines with a large number of trajectory points For this reason the XPS controller uses the Catmull Rom spline interpolation Pg NC pi t p pol Figure 31 A Catmull Rom spline 8 2 5 Trajectory Elements Arc Length Calculation Spline contouring at constant speed requires an accurate calculation of the segment s arc length The segment s arc length can be expressed as follows Experience Salvin 97 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial L u u J ET TEE 329 du Here uo 0 is the segment starting point and u 1 is the segment ending point Sx Sy Sz are x y and z components of the segment function This integral can only be numerically calculated which is done by the XPS controller using the
272. plish a time based data gathering triggered at an event GroupInitialize XY GroupHomeSearch XY GatheringConfigurationSet XY X SetpointPosition XY X CurrentVelocity XY X SetpointAcceleration The 3 data XY X SetpointPosition XY X CurrentVelocity and XY X SetpointAcceleration will be gathered EventExtendedConfigurationTriggerSet XY X SGamma M otionStart 0 0 0 0 EventExtendedConfigurationActionSet GatheringRun 4000 8 0 0 EventExtendedStart GroupMoveRelative XY X 50 GatheringStopAndSave Experience Solutiom 149 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial In this example gathering is started when the positioner XY X starts its next motion using the Sgamma profiler in this case with GroupMoveRelative or possibly with GroupMoveAbsolute The types of data being collected are the Setpoint Position Current Velocity and Setpoint Acceleration for the positioner XY X A total of 4000 data sets is collected one data point every 8 servo cycles or one data point every 8 8000 s 0 001 s Example 2 Using the terminal screen of the XPS utility this example shows the sequence of functions to accomplish a time based data gathering started by a function call GroupInitialize X GroupHomeSearch X GatheringConfigurationSet X X SetpointPosition X X FollowingError GatheringRun 5000 8 GroupMoveRelative X 10 GatheringStop GatheringStopAndSave In this example gat
273. positions to the controller s memory 165 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial 13 3 3 4 2 Firing positions preparation Function PositionerCompensatedPCOPrepare Positioner ScanDirection StartPositionl StartPosition2 calculates the firing at absolute positions in user s coordinate system and converts them to firing absolute raw PCO positions in encoder s coordinate system When mappings are enabled the correction between the user s coordinate system position and raw encoder position will be different at each different location For this reason the prepare function must know the location positions of all positioners in the scanning group where the scan will be done 13 3 3 4 3 Associated functions Pulses generation enable Function PositionerCompensatedP COEnable Positioner activates the CIEOS compensated PCO pulses generation status becomes running value 1 The pulses will be generated when the scanning positioner will move across the predefined positions When the last pulse is generated the CIE08 compensated PCO mode will become inactive status becomes inactive value 0 To get the status of the CIEOS compensated PCO pulses generation use the PositionerCompensatedP CO CurrentStatusGet function Note that only the scanning positioner positions are used to fire pulses if you prepare a set of positions at a given location but you enable the firing pulse
274. ppends data to the existing file in memory This allows gathering of data during several periods or even with different methods in one common file see examples To start data gathering in a new file use the function GatheringReset which deletes the current gathering file from memory The data type s that can be collected with event based gathering are the same as data for time based and function based gathering PositionerName CurrentPosition PositionerName SetpointPosition PositionerName FollowingError PositionerName CurrentVelocity PositionerName SetpointVelocity Esperance Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 150 XPS Q8 Controller Motion Tutorial PositonerName CurrentAcceleration PositionerName SetpointAcceleration PositionerName CorrectorOutput GPIO ADC DAC DI DO See Programmer s manual for a list of all the GPIO Names for the Analog and Digital I O The Setpoint values refer to the theoretical values from the profiler where as the current values refer to the actual or real values of position velocity and acceleration To gather information from the secondary positioner of a gantry append SecondaryPositioner to the positioner name Example PositionerName SecondaryPositioner FollowingError For details about gantry configurations see chapter 4 9 The following sequence of functions is used in event based data gathering GatheringReset GatheringConfigurationSet EventEx
275. pt execution When using TCL scripts for machine security or other time critical tasks it is therefore important to limit the frequency of continuous communication requests from a host computer which includes the XPS website and to verify the execution speed of repetitive TCL scripts QW Newport Experiences Saulia 13 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller User s Manual 3 0 Getting Started 3 1 Unpacking and Handling It is recommended that the XPS Controller Driver be unpacked in your lab or work site rather than at the receiving dock Unpack the system carefully small parts and cables are included with the equipment Inspect the box carefully for loose parts before disposing of the packaging You are urged to save the packaging material in case you need to ship your equipment 3 2 Inspection for Damage XPS Controller Driver has been carefully packaged at the factory to minimize the possibility of damage during shipping Inspect the box for external signs of damage or mishandling Inspect the contents for damage If there is visible damage to the equipment upon receipt inform the shipping company and Newport Corporation immediately WARNING Do not attempt to operate this equipment if there is evidence of shipping damage or you suspect the unit is damaged Damaged equipment may present additional personnel hazard Contact Newport technical support for advice before attempting to plug in
276. r 1 2 a 4 5 6 ri 8 8 Motor Driver Connector Servitudes Connector Figure 72 XPS DRV02 Motor Driver Connectors The stage thermistor can be connected to either connector XPSDocumentation V1 4 x EDH0301 En1050 08 15 QS Newport Experience Solution 214 XPS QS Controller Appendix 24 3 DC Motor Driver XPS DRV03 DRIVER 1 TO 8 en Mating connector OOOOO000000000 Male DB25 with UNC4 40 lockers OQOOOgq 0oonDodo Pisis ee a P PIN X Function PIN Function Tachometer Index Tachometer Limit ground Tachometer 17 Travel limit Tachometer 18 Travel limit Motor 19 Encoder A Motor 20 Encoder B Motor 21 5V Motor 22 Encoder ground N C 23 Encoder A N C 24 Encoder B N C 25 findex N C Origin Shid GND 25 1 2 3 4 5 6 T 8 8 Figure 73 XPS DRV03 Motor Driver Connectors 24 4 Pass Through Board Connector 25 Pin D Sub XPS DRV00 WARNING The Pass through board connector replaces the motor interface connector only if the axis is connected to an external motor driver PASS THROUGH BOARD Mating connector cCOoOOOOOoooooDoO Male DB25 with LIINC AIO lockers Fos g urn 0 n0 8 oe 0 s DOooOoOoOOODOcOC PIN Function PIN Function 1 Reserved 14 Reserved 2 45 15 Inhibition output 3 Origin input 16 Reserved 4 Travel limit input 17 Reserved 5 Travel limit input 18 Reserved 6 Main fault input 18 Encoder A input T Encoder A input 20 Encoder
277. r SetPointAcceleration GG a Mapping mapping correction Figure 35 Definition of different positions for one actuator Backlash Compensation Backlash compensation is applicable on all positioners but works only under certain conditions e The HomeSearchSequenceType in the stages ini must be different from CurrentPositionAsHome e Backlash compensation is not compatible with positioner mapping So for positioners with backlash compensation it is not allowed to have an entry for PositionerMappingFileName in the stages ini e Backlash compensation is not compatible with trajectories Line Arc Spline PVT jog or analog tracking So it is not possible to execute any trajectory to use the jog mode or to enable the analog tracking with any motion group that contains positioners with backlash compensation enabled After the above has been taken into consideration a number of steps need to be taken to enable backlash compensation First of all there must be a value larger than 0 for backlash in the stages ini But this setting does not automatically enable backlash compensation To do so send the function PositionerBacklashEnable while the motion group which includes the positioner is disabled To disable backlash compensation for instance to execute a jog motion or to use analog tracking use the function PositionerBacklashDisable The value for backlash compensation can be changed at any time with the fu
278. r x and y compensations mapped to x and y positions The XY mapping is dynamically taken into account on the corrector loop of the XPS controller XY mapping works in parallel to other compensation methods Keep in mind that the results of XY mapping may not be the same as those of Positioner mapping or linear compensation alone XYZ mapping XYZ mapping is only available with XYZ groups It compensates for all errors of an XYZ group at any position of the XYZ group by sending three compensation files to the XPS controller x compensations mapped to x y and z positions and so on The XYZ mapping is dynamically taken into account on the corrector loop of the XPS controller XYZ mapping works in parallel to other compensation methods Keep in mind that the results of XYZ mapping may not be the same as those of Positioner mapping or linear compensation alone TargetPosition SetpointPosition amp CurrentPosition are accessible via function and Gathering Data Collection SetpointVelocity SetpointAcceleration amp FollowingError are accessible via Gathering Data Collection QW Newport Experiences Saulia 111 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller API MoveAbsolute MoveRelative Motion Tutorial API MoveAbsolute MoveRelative SetPointPosition TargetPosition Double precision 10 1 XPSDocumentation V1 4 x EDH0301En1050 08 15 112 setPointVelocity FollowingErro
279. r Err Err Err Err Err Err Err Err Err Err Err Err Err Err H Figure 39 XYZ Mapping Files Err in each compensation file can either be Xerr Yerr or Zerr 119 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial NOTE The error at X Y Z 0 must be 0 This value in the file corresponds to the HomePreset positions in the XY group reference A terminator 7 must be added at end of each table To activate XYZ mapping the mapping files must be in the admin config directory of the XPS controller and the following settings must be configured in the system ini e XMappingFileName Name of the mapping file e XMappingXLineNumber Total number of lines of each table including the header e XMappingYColumnNumber Total number of columns e XMappingZDimNumber Number of tables e XMappingMaxPositionError Maximum absolute error in that file must be larger than any entry in the mapping file e YMappingFileName Name of the mapping file e YMappingXLineNumber Total number of lines of each table including header e YMappingYColumnNumber Total number of columns e YMappingZDimNumber Number of tables e YMappingMaxPositionError Maximum absolute error in that file must be larger than any entry in the mapping file e ZMappingFileName Name of the mapping file e ZMappingXLineNumber Total number of lines of each table including header e ZMappingYColumnNumber Total numbe
280. r example motion state a 1 us pulse will be generated at each cycle of the motion profiler or every 400 us as long as the event occurs Action Parameter 1 Mask The mask defines on which bits on the GPIO output the pulse will be generated For example if the GPIO output is an 8 bit output and the mask is set to 6 then the equivalent binary number is 00000110 So as an action a 1 us pulse will be generated on bit 2 and 3 of the GPIO output Action Parameter 2 to 4 These parameters are 0 by default QO Newport XPSDocumentation V 1 4 x EDH0301En1050 08 15 138 Experience Solutions XPS Q8 Controller Motion Tutorial DOSet This action is used to modify the value of bit s on a Digital Output Action Parameter 1 Mask The mask defines which bits on the GPIO output are being addressed For example if the GPIO output is an 8 bit output and the mask is set to 26 then the equivalent binary number is 00011010 Therefore with a Mask setting of 26 only bits 2 4 and 5 are being addressed on the GPIO output Action Parameter 2 Value This parameter sets the value of the bits that are being addressed according to the Mask setting For example since a Mask setting of 26 bits 2 4 and 5 can be modified a value of 8 00001000 will set the bits 2 and 5 to 0 and the bit 4 to 1 Action parameter 3 and 4 These parameters are 0 by default DACSet CurrentPosition and DACSet SetpointPosition This act
281. r of columns e ZMappingZDimNumber Number of tables e ZMappingMaxPositionError Maximum absolute error in that file must be larger than any entry in the mapping file The X Y Z MappingXLineNumber X Y Z MappingY ColumnNumber X Y Z MappingZDimNumber and X Y Z MappingMaxPositionError are only used to check for the correctness of the mapping file GO Newport Esperance Salvin XPSDocumentation V1 4 x EDH0301En1050 08 15 120 XPS Q8 Controller QW Newport Experiences Salvin Example The following example shows the X error mapping files for an XYZ mapping Note that it is not necessary to repeat the XY coordinates in the table Z 1 to the other tables Z 0 and Z l Matrix of X errors XYZMapping X txt 0 0 0 0 0 0 0 0 3 00 0 00192 0 00453 0 00331 0 00787 0 00232 0 00134 0 00189 0 0 00192 0 00453 0 00331 0 00787 0 00232 0 00134 0 00189 0 0 00192 0 00453 0 00331 0 00787 0 00232 0 00134 0 00189 2 00 0 00534 0 00322 0 00445 0 00228 0 00210 0 00308 0 00148 0 0 00534 0 00322 0 00445 0 00228 0 00210 0 00308 0 00148 0 0 00534 0 00322 0 00445 0 00228 0 00210 0 00308 0 00148 121 1 00 0 00254 0 00376 0 00769 0 00787 0 00342 0 00275 0 00234 0 0 00254 0 00376 0 00769 0 00787 0 00342 0 00275 0 00234 0 0 00254 0 00376 0 00769 0 00787 0 00342 0 00275 0 00234 XPSDocumentation V1 4 x ED
282. raj trj XYLineArcExecution XY Traj trj 10 100 1 Executes the trajectory at a trajectory speed of 10 mm s and with a trajectory acceleration of 100 mm s one time Please note that the pulse output settings are automatically removed when the trajectory is over Hence with the execution of every new trajectory it is also required to define the pulse output settings again It is also possible to use the trajectory pulses and the pulse window state as events in the event triggers see section 11 0 Event Triggers for details This allows the gathering of data on a trajectory at constant length intervals Example XYLineArcPulseOutputSet XY 10 30 0 01 One pulse every 10 um will be generated on the Line Arc Trajectory between 10 mm and 30 mm XYLineArcVerification XY Traj trj Loads and verifies the trajectory Traj trj GatheringConfigurationSet XY X CurrentPosition XY Y CurrentPosition GPIO2 ADC1 Configures data gathering to capture the current positions of the XY X and the XY Y and the analog input GPIO2 ADCI EventExtendedConfigurationTriggerSet Always 0 0 0 0 X Y LineArc TrajectoryPulse 0 0 0 0 Triggers an action for every trajectory pulse The link of the event TrajectorPulse with the event Always is important to make the event permanent Otherwise the event will be removed after the first pulse EventExtendedConfigurationActionSet GatheringOneData 0 0 0 0 Defines the action gathers one set of data each t
283. rajectory pulse EventExtendedStart Starts the event trigger XYLineArcExecution XY Traj trj 10 100 1 Executes the trajectory at a trajectory speed of 10 mm s and a trajectory acceleration of 100 mm s one time GatheringStopAndSave Saves the gathering data from memory into a file gathering dat in the admin public folder of the XPS In this example one set of data will be gathered on the trajectory between length 10 mm and 30 mm at constant trajectory length intervals of 10 um Experencs Salvin XPSDocumentation V1 4 x EDH0301En1050 08 15 156 XPS Q8 Controller Motion Tutorial 13 2 QW Newport Experience Salvin Triggers on PVT Trajectories This capability outputs pulses at constant time intervals on a PVT trajectory The pulses are generated between a first and a last trajectory element see 9 3 PVT Trajectories for details The minimum possible time interval is 125 us Two signals are provided GPIO2 pin11 Window A constant 5 V signal is sent between the beginning of the first and the end of the last trajectory element GPIO2 pin12 Pulse A 1 us pulse with 5V peak voltage is sent for every time interval For details about the XPS I O connectors see appendix section 22 2 To define the first element the last element and the time interval use the function MultipleAxesGroupPV TPulseOutputSet Example 1 MultipleAxesGroupP V TPulseOutputSet Groupl 3 5 0 01 One pul
284. rationStart ConstantAccelerationEnd Event Event Figure 41 Constant Acceleration Event The same definition applies to ConstantDecelerationStart ConstantDecelerationEnd and ConstantDecelerationState ConstantDecelerationStart ConstantDecelerationEnd Event Event A ConstantDecelerationState Event Figure 42 Constant Deceleration Event MotionStart Triggers an action when motion starts Event parameter 1 to 4 0 by default MotionEnd Trigger an action when motion is ended Event parameter 1 to 4 0 by default Note MotionEnd refers to the end of QW Newport Experiences Solutio 131 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial the theoretical motion which is not the same as the definition of MotionDone see section 7 5 MotionState Triggers an action during motion Event parameter 1 to 4 0 by default MotionState Event f MotionStart MotionEnd Event Event Figure 43 Motion Event There are also several trajectory events that can be defined TrajectoryStart Triggers an action when the trajectory has started Event parameter 1 to 4 0 by default TrajectoryEnd Triggers an action when the trajectory has stopped Event parameter 1 to 4 0 by default TrajectoryState Triggers an action during trajectory execution Event parameter 1 to 4 0 by default TrajectoryState Event Trajectory Start TrajectoryEnd Event Event Figure 44
285. re XPSDocumentation V1 4 x EDH0301En1050 08 15 12 XPS Q8 Controller User s Manual one million users It is quickly becoming a standard and critical component in thousands of corporations Consequently TCL is field proven very well documented and has many tutorials applications tools and books publicly available www tcl tk XPS users can use TCL to write complete application code and the XPS allows them to include any function in a TCL script When developed the TCL script can be executed in real time in the background of the motion controller processor and does not impact any processing requirements for servo updates or communication The QNX hardware real time multiprocessing operating system used on the XPS controller assures precise management of the multiple processes with the highest reliability Multiple TCL programs run in a time sharing mode with the same priority and will get interrupted only by the servo or communication tasks or when the maximum available time of 20 ms for each TCL program is over The advantage of executing application code within the controller over host run code is faster execution and better synchronization in many cases without any time taken from the communication link The complete communication link can be reserved for time critical process interaction from or to the process or host controller NOTE It is important to note that the XPS gives communication requests priority over TCL scri
286. reference position that is unique to the entire travel called a home switch or origin switch usually in conjunction with an index pulse An important requirement is that this switch must have the same resolution as the encoder pulses If the motion device uses a linear scale as a position encoder the home switch is usually placed on the same scale and read with the same resolution If on the other hand a rotary encoder is used homing becomes more complicated To have the same resolution a mark on the encoder disk could be used called index pulse but because the mark repeats every revolution it does not define a unique point over the entire travel An origin switch on the other hand placed in the travel of the motion device is unique but typically is not precise or repeatable enough The solution is to use both in a dedicated search algorithm as follows Origin Switch Encoder Index Fulse Figure 18 Home Origin Switch and Encoder Index Pulse 75 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial A Home switch Figure 18 separates the entire travel in two areas one has a high level and the other has a low level The most important part is the transition between the two areas Just by looking at the origin switch level the controller knows already on which side of the transition the positioner is and which direction to start the homing process The task of the home se
287. reload the page select FRONT PANEL then select Move The following screen appears Group names will be different according to your definition A N t SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS DOCUMENTATION Move 0 02109 0 Initialize MULTI M1 _Go _Go E gt 0 002993 0 Initialize MULTI M2 _Go _Go E gt 0 011505 O Initialize MULTI M3 _Go _Go E ES Kill All NOTE The new velocity gets only applied with the next motion Refresh rate frames sec 1 00 Set LO Newport S Spectra Physics Solutions to Make Manage and Measure Light apecence Soutora A eee Nery Compan aua Click Initialize The State number changes from 0 to 42 and the Action button changes from Initialize to Home Click Home The stage starts moving to find its reference position When done the state number is 11 and the action button 1s Disable Enter an allowed position value in the Abs move 1 field and click Go The stage moves to this absolute position Your system is now ready to use For more advanced functions please read the rest of this manual XPSDocumentation V 1 4 x EDH0301En1050 08 15 34 Emer Saytin XPS Q8 Controller User s Manual 3 8 3 Manual Configuration for non Newport stages For configuring the XPS controller to stages or positioning devices not made by Newport use the tool Add Custom Sta
288. requirement of a Line arc trajectory is to maintain a constant speed speed being the scalar of the vector velocity throughout the entire path except during the acceleration and deceleration periods Trajectory element segment an element of a trajectory is defined by a simple geometric shape in this case a line or an arc segment Trajectory velocity the tangential linear velocity speed along the trajectory during its execution Trajectory acceleration the tangential linear acceleration used to start and end a trajectory Trajectory acceleration and trajectory deceleration are equal by default QS Newport Experencs Salvin XPS Q8 Controller Motion Tutorial 8 1 2 Trajectory Conventions When defining and executing a Line arc trajectory a number of rules must be followed The motion group must be an XY group All trajectories must be stored in the controller s memory under public trajectories one file for each trajectory Once a trajectory is started it executes in the background allowing other groups or positioners to work independently and simultaneously Each trajectory must have a defined beginning and end Endless infinite trajectories are not allowed Although N times N defined by user non stop execution of the same trajectory is allowed As the trajectory is stored in a file the trajectory s maximum size maximum elements number is unlimited for practical purposes Two types of Line arc traj
289. revious one 1s not excessive QS Newport Esperance Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 92 XPS Q8 Controller Motion Tutorial 8 1 6 Define Arcs An arc is defined by specifying the radius R and the sweep angle A Figure 28 First Tangent Figure 28 An arc defined with radius and angle Both radius and sweep angles are expressed in double precision floating point numbers The sweep angle can range from 107 to 1 797 x 10 allowing a definition of arcs from a fraction of a degree to practically an infinite number of overlapping circles 8 1 7 Trajectory File Description The Line arc trajectory is defined in a file that has to be stored in the public trajectories folder of the XPS controller This file must have the following structure The first line sets the FirstTangent Defines the tangent angle for the first point in case of an arc This parameter has no effect if the first element is a line The second line sets the DiscontinuityAngle Defines the maximum allowed angle of discontinuity The third line must be empty for better readability The following lines define the Line arc trajectory Each line defines an element of the trajectory An element can be a Line or an Arc Line Define X and Y positions to build a linear segment Line X Y Arc Define radius and sweep angle to build an arc of circle Arc R A 8 1 8 Trajectory File Examples The follow
290. ring homing Note This home search works only with the CIEO05 E3920x board or later versions The home search process is set up in the stages ini file When using the XPS controller with Newport ESP compatible stages this setting is done automatically with the configuration of the system The home search velocity acceleration and time out are also set up in the stages ini file Each motion group can either be homed together or sequentially meaning all positioners belonging to that group home at the same time in parallel or all the positioners home one after the other respectively This option is also set up in the system ini file or during configuration A Home search can be executed with all motion groups and any motion group MUST be homed before any further motion can be executed To home a motion group that is in a ready state that motion group must first be killed and then re initialized QW Newport Experience Salvin TI XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial Example This is the sequence of functions that initialize and home a motion group GroupInitialize MyGroup GroupHomeSearch MyGroup GroupKill MyGroup 7 3 Referencing State The predefined home search processes described in the previous section might not be compatible with all motion devices or might not be always executable For instance if there is a risk of collision during a
291. ription Supply 12V supply output 100m Supply 5V supply autput lt 100rm4 1 2 3 output Output 4 output Output output Output output Output output Output 5 6 y 8 Mating connector Male DBS with UNC4 40 lockers Signal type Figure 66 GPIOI Digital I O Connector General Purpose Inputs Outputs GPIOI is the main XPS digital I O connector 22 2 GPIO2 Connector GPIO2 PIN Signal type Supply N C TTL input TTL input TTL input TTL input TTL input ALG ALG Reserved Reserved Reserved Supply t5 CO Ch Cn E C6 Bi oaooogoooogooooo OOOOOo OOOO Description PIN GNE Input 1 Input z Input 3 Input 4 Input 5 Mating connector Male DB25 with UNC4 40 lockers Signal type Analog mpl Analog mpl Analog mpl Analog impul Supply Analog oulpul Analog output Analog oulpul Analog autpul Supply TTL input Supply Description Analog input 1 Analog input 2 Analog input 3 Analog input 4 SND Analog output 1 Analog output 2 Analog output 3 Analog output 4 GND Input amp GND Funciian Figure 67 GPIO2 Analog amp Digital Connector General Purpose Inputs Outputs GPIO2 is an additional digital input connector This connector is also the main analog I O connector with 4 analog inputs and 4 analog outputs XPSDocumentation V1 4 x EDH0301En1050 08 15 210 QS Newport Experience Solution XPS QS Controller Appendix 22 3 GPIO3 Con
292. rn 2 to Pos3 The velocity acceleration and jerk time parameters of a move are defined by the function PositionerSGammaParametersSet see also section 7 1 When the controller receives new values for these parameters during the execution of a move it will not take these new values into account on the current move but only on the following moves To change the velocity or acceleration of a positioner during the motion use the Jogging mode see section 7 5 Experience Salvin XPSDocumentation V1 4 x EDH0301 En1050 08 15 82 XPS Q8 Controller Motion Tutorial 7 5 Experience Solutiom A move can be stopped at any time with the function GroupMoveAbort that accepts GroupNames and PositionerNames It is important to note however that the function GroupMoveAbort PositionerNames is accepted when the motion was commanded to the positioner and not to the group In the previous example the function GroupMoveAbort ScanTable ScanAxis is reyected for a motion that has been launched with GroupMoveRelative ScanTable 100 50 To stop this motion send the function GroupMoveAbort ScanTable With XPS firmware 1 5 0 and higher the XPS controller supports also asynchronous moves of several positioners belonging to the same motion group The individual motion however needs to be managed by separate threads see also section 18 4 for details Motion Done The XPS controller supports two methods that define when a motion
293. ror YawMappingToYFileName YawMappingToYLineNumber YawMappingToYColumnNumber YawMappingToYMaxPositionError Format for each yaw mapping file X Y and Theta e First cell must be 0 e First column represents the X Positions e First row represents the Y Positions e Each cell represents the corresponding yaw error NOTE The error of X Y 0 must be 0 This XY position in the file correspond to the HomePreset position of the XY group reference X and Y positions must at least cover the entire travel of the XY group XY and Yaw corrections occur at the same time Limitations of mapping table size e Maximum lines 400 e Maximum columns 400 QW Newport Experiences Saulia 125 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial Format of th r wMappingToXFileName file o ymn Co we Xer00 NEUES ECT UIN a p cus ee ee eae ees am 140 eeengroxiinenunber FEM EREEW 5 01 0s 1 s d s YawMappingToXColumauNumber Format of IE MET ane aia al file XMin YerOO CESE 0 o nmn n YawMappingToYLineNumber Ss YawMappincToYColumnNumber Format of the wMappingToThetaFileName file Theta er 0 NC WC O2 OD i YawMappingToThetaLineNumber pu YawMapoingToThetaColumnNumoer Experience Solution XPSDocumentation V1
294. s a plane defined by the Z position of the first cell The separator between the different data in each row is a tab For legibility inserting an empty line between successive tables is recommended but not mandatory The other cells contain the corresponding error QS Newport Esperance Salvin XPSDocumentation V1 4 x EDH0301En1050 08 15 118 XPS Q8 Controller Motion Tutorial All positions are relative to the physical home position of the XYZ group The data files must contain the X position 0 the Y position 0 and the Z position 0 The error at X Y Z 0 must be 0 which means that the error at the home position is 0 This hardware reference for XYZ mapping has the advantage of being independent of the value of the HomePreset Figure 39 shows the structure for the three mapping files for X Y and Z corrections MappingZDimNumber GO Newport Experiences Solutiom Z min Z max MappingXLineNumber XYZMappingCorrectionX dat All Err entries are X errors corrections for X XYZMappingCorrectionY dat All Err entries are Y errors corrections for Y XYZMappingCorrectionZ dat All Err entries are Z errors corrections for Z MappingYColumnNumber Zmin Ymin C0 Ymax Er 2 0 0 t NE 0 eel Err Err Err Err Err Err Err Err Err Err Err Err 0 Err Err ere Err Err Err Err Err a E Er Er Em En 4 Z max IRE Err Err Err Err Err Err Err Err Err Err a Er
295. s generation and start the move from a different location the pulses could be generated but their accuracy will be impacted by the mapping difference between the two locations Pulses generation abort Function PositionerCompensatedPCOAbort Positioner disables the CIE08 compensated PCO pulses generation The pulses generation is stopped immediately no more pulse will be generated even if the scanning positioner continues to move across the predefined firing positions To stop the scanning move use GroupMoveAbort function Pulses data reset The function PositionerCompensatedPCOMemoryReset Positioner resets the CIEOS compensated PCO data memory This function is useful to remove the data that was previously entered with the PositionerCompensatedPCOLoadToMemory function Pulses generation status get The function PositionerCompensatedP COCurrentStatusGet Positioner Status gets the current status of CIE08 compensated PCO pulses generation 13 3 4 Time Spaced Pulses Time Flasher In the time spaced configuration a first pulse is generated when the motion axis enters the time pulse window From this first pulse a new pulse is generated at every time interval until the positioner exits the time pulse window Hardware attains less than 50 ns jitter for the trigger pulses The duration of the pulse is 200 nsec by default and can be modified using the function PositionerPositionComparePulseParametersSet Possible values for the
296. s is treated independently Following is a list of the different faults and consequences that can happen in the XPS controller Error type General inhibition Emergency stop Motor fault Encoder fault End of travel Emergency brake Following error Motion disable e After an emergency brake or an emergency stop both considered major faults the corresponding group goes to a not initialized state the system has to be initialized and homed again before any further motion e After a following error as it is considered a minor fault the corresponding group goes to a Disable state a GroupMotionEnable command puts the system back into ready state At any given time the group status can be queried from the controller The function GroupStatusGet GroupName returns the current state number The state numbers correspond to the state and to the event that generated the transition 1f any The function GroupStatusStringGet StateNumber returns the state description corresponding to the state number QW Newport Experiences Saulia 69 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial Initial KillAllGroup 8 Emergency Stop Emergency Brake 0 40 NOTINIT EMERGENCY BRAKING 4 9 63 6 3 50 Initialize 1 Initialize amp CalibrateEncoder 15 Notes The numbers in the boxes are the different group status In bold are the transitions called by API see below the ot
297. s not continuously increasing but flickering around one encoder count 20 nm from time to time When using the default setting for the EncoderSettlingTime 0 075 us under these conditions it is very likely that more than QW Newport Experiences Salvia 159 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial one trigger pulse is generated since the stage seen by the controller is moving back and forth A higher value setting for the EncoderSettlingTime could avoid these unwanted and unpredictable extra trigger pulses in this case Pulses Position crossing A 4 t iin EncoderSettlingTime 3 7 min PCOPulseWidth 2 between successive pulses m gt Figure 47 Position Compare Output The following functions are used to configure the distance spaced pulses PositionerPositionCompareSet PositionerPositionCompareGet PositionerPositionCompareEnable PositionerPositionCompareDisable The function PositonerPositonCompareSet defines the position window and the distance for the trigger pulses It has four input parameters Positioner Name Minimum Position Maximum Position Position Step To enable the distance spaced pulses the function PositionerPositionCompareEnable must be sent Example Group Initialize MyStage GroupHomeSearch MyStage PositionerPositionCompareSet MyStage X 5 25 0 002 PositonerPositionCompareEnable MyStage X PositionerPositionCompare
298. se will be generated every 10 ms between the start of the 3rd element and the end of the 5th element MultipleAxesPV T Verification Groupl Traj trj Loads and verifies the trajectory Traj trj MultipleAxesPVTExecution XY Traj trj 1 Executes the trajectory Traj trj one time Note that the pulse output settings are automatically removed when the trajectory is over Hence with the execution of every new trajectory the pulse output settings must be defined again It is also possible to use the trajectory pulses and the pulse window state as events in the event triggers see section 11 0 Event Triggers for details This allows the gathering of data on a trajectory Example 2 MultipleAxesPV TPulseOutputSet Groupl 3 5 0 01 One pulse will be generated every 10 ms between the start of the 3rd element and the end of the 5th element MultipleAxesPV TI Verification Groupl Traj trj Loads and verifies the trajectory Traj trj GatheringConfigurationSet Group1 P CurrentPosition GPIO2 ADC1 Configures data gathering to capture the current position of the Group1 P positioner and the analog input GPIO2 ADCI EventExtendedConfigurationTriggerSet Always 0 0 0 0 Group1 PV T TrajectoryPulse 0 0 0 0 Triggers an action for every trajectory pulse The link of the event TrajectorPulse with the event Always is important to make the event permanent Otherwise the event will be removed after the first pulse EventExtendedConfigurationActi
299. serted from right driver 1 to left driver 8 when looking at the rear of the controller Ifless than eight are used the remaining slots must be disabled with the appropriate slot covers that were delivered with the controller The surrounding ventilation holes at the sides and back of the XPS rack must be free from obstructions that prevent the free flow of air 3 4 2 Power ON GO Newport Experience Solutiom Plug the AC line cord supplied with the XPS into the AC power receptacle on the rear panel Plug the AC line cord into the AC wall outlet Turn the Main Power Switch to ON located on the Rear Panel The system must be installed in such a way that power switch and power connector are accessible by the user After the main power is switched on the LED on the front panel of the XPS will turn green There is an initial beep after power on and a second beep when the controller has finished booting If the controller boots properly the second beep is happy sounding otherwise the sad sounding beep is emitted The time between the first and the second beeps can be 12 18 seconds There is also a STOP ALL button on the front panel that 1s used to stop any motion in progress and then activate the inhibit input of all motor drivers This is a software function triggered by the inhibit input located on the rear panel or the STOP ALL front panel button 15 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 C
300. set the corrector parameters loop type Ki Kp Kd use the following functions refer to Programmer s Manual for details e CorrectorType PIDFFVelocity PositionerCorrectorPIDFFVelocitySet e CorrectorType PIDFFAcceleration PositionerCorrectorPIDFF AccelerationSet e CorrectorType PIDDualFFVoltage PositionerCorrectorPIDDualFFVoltageSet e CorrectorType PIPosition PositionerCorrectorPIPositionSet QW Newport Experiences Saulia 181 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial 14 3 3 Corrector PIDDual FFVoltage SetPoint Acceleration SetPoint Velocity SetPoint Position 14 3 3 1 The PIDDualFF Voltage must be used in association with a driver having a voltage input constant voltage gives constant motor voltage using MotorDriverInterface AnalogVoltage Can also be used in velocity or acceleration command P KFeedForwardAcceleration KFeedForwardVelocity PID Corrector Filtering amp Calculations a To the driver From the encoder Figure 57 Corrector PIDDual FFVoltage Driver Board amp Stage Parameters FeedForward method e 3 feed forwards are used Speed Acceleration and Friction e KFeedForwardAcceleration is a gain that can be applied to the feed forward in acceleration e KFeedForwardVelocity is a gain that can be applied to the feed forward in velocity e Friction is a
301. sition and the feed back positions These gathered information can be stored in the controller and retrieved for further analysis The architecture of the implementation is the following SineExcitationJerk C orrectedSetpointJerk SineExcitationAcceleration CorrectedSetpointAcceleration Control Loop SineExcitationVelocitv P ID Correct or CorrectorOutput C orrectedSetpointVelocity SineExcitationPosition i This feature is allowed with PIDFFAcceleration PIDFFVelocity and PIDDualFFVoltage control loops This makes it available for stages controlled with acceleration for drivers integrating a current loop such as for brushless linear motors or D C motors velocity for drivers integrating a velocity control loop such as for D C motors with a tachometer or with voltage for power amplifiers without any embedded control loop Refer to the XPS user s Manuals for more details on the different control loops The new SineExcitation are calculated every servo cycle based on the input parameters Depending on the setting of the controller the servo cycle is up to 8 kHz 17 2 Pre corrector excitation signal wave forms The exact forms of pre corrector excitation signal of position velocity acceleration and jerk are the followings c 2mF F excitation frequency ExcitationPosition A cos wt A A excitation amplitude t current time ExcitationVelocity A sin ot ExcitationAcc
302. ss of the controller This is completely transparent to the user Two or more groups of stages can be commanded from two terminal menus at the same time to execute different motions multitasking TCL scripts A TCL script is carried out sequentially the commands are executed one by one following the order they are written in the script Consequently there is no benefit to open several sockets in a single TCL script However it is possible to start a TCL script from another TCL script That way as many sockets and parallel processes can be started as needed Below is an example with 3 open sockets THHHHHHHHHHHBHHHHHHHHBL TCL program GEN FHT set TimeOut 10 set code 0 set Prog1 ProgRV tcl set Task1 Task1 set Prog2 ProgXY tcl set Task2 Task2 open TCP socket set code catch OpenConnection TimeOut socketID if code 0 puts stdout ProgGen TCP_ConnectToServer OK gt code ID socketlD Socket 1 set code catch TCLScriptExecute socketlD Prog1 Task1 0 puts stdout ProgGen TCLScriptExecute gt error code lt Socket 2 set code catch TCLScriptExecute socketlD Prog2 Task2 0 puts stdout ProgGen TCLScriptExecute gt error code lt Socket 3 close TCP socket set code catch TCP_CloseSocket socketID puts stdout ProgGen TCP_CloseSocket gt code ID socketlD else puts stdout ProgGen TCP_ConnectToServer NOT OK gt
303. st line was 0 20 0 0 0 635 2 679 6 771 20 33 229 37 321 39 365 40 39 365 37 321 33 229 20 OOnND OF WN CO Z Axis pe Yaxis A Figure 32 Executing the above normalized trajectory data file with the Catmull Rom spline algorithm QD Newport Ewperenes Solutions 99 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial 8 2 8 Spline Trajectory Verification and Execution Here are four functions to verify or execute a spline trajectory e XYZSplineVerification Verifies a spline trajectory data file e XYZSplineVerificationResultGet Returns the last trajectory verification results actuator by actuator This function works only after an XY ZSplineVerification e XYZSplineExecution Executes a trajectory e XYZSplineParametersGet Returns the trajectory current execution parameters This function works only while executing of the trajectory The function XY ZSplineVerification can be executed at any moment and is independent from the trajectory execution This function performs the following e Checks the trajectory file for data and syntax coherence e Calculates the trajectory limits which are the required travel per positioner the maximum possible trajectory velocity and the maximum possible trajectory acceleration This function defines the parameters for trajectory execution e fall is OK it returns an OK 0
304. standard home search process In other situations a home search process might not be desirable For example to ensure that the stages have not moved the current positions are stored into memory In this case it 1s sufficient to reinitialize the system by setting the position counters to the stored position values For these special situations the XPS controller s referencing state as in alternative to the predefined home search processes NOTE The Referencing state should be only used by experienced users Incorrect use could cause equipment damage The Referencing state is a parallel state to the homing state see the state diagram on page 81 Figure 22 To enter the referencing state send the function GroupReferencingStart GroupName while the group is in the NOT REFERENCED state In the Referencing state the function GroupReferencingActionExecute PositionerName Action Sensor Parameter will perform certain actions like moves position latches of reference signal transitions or position resets The function PositionerSGammaParametersSet PositionerName can be used to change the velocity acceleration and jerk time parameters To leave the referencing state send the function GroupReferencingStop GroupName The Group will then be in the HOMED state state number 11 The syntax and function of the function GroupReferencingActionExecute PositionerName Action Sensor Parameter will be discussed in detail With this function
305. t Command PaasitionerTimeFlasherEnable AR to execute PositionerTimeFlasherGet Reboot PositionerTimeFlasherSet Reboot Execute PositioneruserTravelLimitscaet PositionerUserTravelLimitsSet Received message PositionerWarningFallewingErrorGet Positioner arni gFollewingErrorset Reboot Rettartapplication SingleAxisSlaveModeDisable 5ingleAxisSlaveaModeEnabla SingleAxisSlaveParameterscet SingleAxisSlaveParametersSet TCL5SeriptExecuteAnd Wait TCLScriptExecute TCLS criptExecutewithPriority TCLSzriptKill TCLScriptKillAll NOTE Some commands can take a long Eme bo execute oo if vou ve got a blank screen or a HTTP 404 error check your web client time out Commoand history list Clear History TCL Generator Gathering Display External Gathering Display Ao Newport G pecia Physics Selah boa Make Manage and Measure light Wait for controller to reboot open the internet browser and connect to REMOTE You can see the dynamic IP address in CONTROLLER CONFIGURATION gt General he td 0n Affehage Favors Out SYSTEM STAGI CONTROLLER CONFIGURATION FRG IP managem Versions display B Webserve ar Prec ch il on Platfor rm V1 0 D i Bn i pows aH Li mote rh 5 mc DEN TRE ES i R Ri emoti P c c ontri nt oe sion E KE PS R RC M D C 0 X aA PSF The IP address delivered by your DHCP is displayed above In case the XPS cannot negotiate an IP address from the DHCP the displayed address wil
306. t Corporation a Return Number will be issued which should be referenced in the shipping documents Complete a copy of the Service Form found at the end of this User s Manual and include it with your shipment Troubleshooting For troubleshooting the user can query different error and status information from the controller The XPS controller provides the Positioner Error the Positioner Hardware Status the Positioner Driver Status the Group Status and also a general system error If there is an error during command execution the controller will return an error code The command ErrorStringGet can be used to retrieve the description corresponding to the error code The following function commands are used to retrieve Positioner Error and Positioner Hardware Status e PositionerErrorGet Returns an error code e PositionerErrorStringGet Returns the description of the error code e PositionerHardwareStatusGet Returns the status code e PositionerHardwareStatusStringGet Returns the description corresponding to the status code In a fault condition it is also very important to know the current status of the group and the cause of the transition from the previous group status to the current group state The following functions can be used to retrieve the Group Status e GroupStatusGet Returns the group status code e GroupStatusStringGet Returns the description corresponding to the group status code NOTE Refer to the Pro
307. tendedConfigurationTriggerSet EventExtendedConfigurationActionSet GatheringOneData 0 0 0 0 EventExtendedStart Use the function GatheringStopAndSave to store the gathered file from the buffer to the flash disk of the XPS controller Other functions associated with the event based gathering are GatheringConfigurationGet GatheringCurrentNumberGet GatheringDataGet Please refer to the programmer s manual for details Example 1 GatheringReset Deletes gathering buffer in memory GatheringConfigurationSet XY X CurrentPosition XY Y CurrentPosition GPIO2 ADC1 The 3 data XY X CurrentPosition XY Y CurrentPosition and GPIO2 ADCI will be gathered EventExtendedConfigurationTriggerSet GPIO2 ADC1 ADCHighLimit 5 0 0 0 EventExtendedConfigurationActionSet GatheringOneData 0 0 0 0 EventExtendedStart Data gathering starts when the value of the GPIO2 ADC1 exceeds 5 Volts One set of data will be gathered at each servo cycle or every 125 us as the event is checked at each servo cycle Data gathering automatically stops when the value of the GPIO2 ADC1 falls below 5 V again and the event is automatically removed see chapter 11 0 Event Triggers for details QW Newport Experiences Saulia 151 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial Example 2 TimerSet Timerl 8 Sets the timer 1 to servo ticks means every I ms GatheringReset Deletes gatheri
308. the minimum and the maximum target positions of a rotation stage For example to enable larger rotations of a rotation stage that is not configured as a Spindle set the maximum target position to a very high value and the minimum target position to a very low value In this case it is also required to disable the limit switches of the rotation stage see stage manual for details AD N t SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING FUNCTIONAL TESTS Add from database Modify Stage configuration edition RGV100BL PositionerMappingFileName PositionerMappingLineNumber PositionerMappingMaxPositionError units Limit sensor input plug parameters ServitudesType StandardEORDriverPlug MinimumTargetPosition 165 units MaximumTargetPosition 165 units HomePreset 0 units MaximumVelocity 25 720 units s MaximumAcceleration 1000 units s EmergencyDecelerationMultiplier 1 1 MinimumJerkTime 0 005 s MaximumJerkTime 0 05 s TrackingCutOffFrequency 25 Hz Home search process parameters HomeSearchSequenceType MechanicalZeroAndIndexHomeSearch HomeSearchMaximumVelocity 25 360 units s HomeSearchMaximumAcceleration 500 units s HomeSearchTimeOut 10 s HomingSensorOffset 0 02 units Position servo loop type parameters CorrectorType PIDFFAcceleration ClosedLoopStatus Closed FatalFollowingError 1 units gt Save Cancel AD Newport S Spectr
309. tion for repeatable distortions of the analog encoder input signals is always active It uses the following parameters read from the stages ini file The default values are 0 for all stages EncoderSinusOffset 0 volts EncoderCosinusOffset 0 volts EncoderDifferentialGain 0 EncoderPhaseCompensation 0 deg The function GroupInitializeWithEncoderCalibration initializes the positioner and runs the encoder calibration process During calibration the stage moves for 25 EncoderScalePitch and the controller determines the appropriate calibration values The controller though will not automatically apply these values GS Newport Experience Sulia XPSDocumentation V 1 4 x EDH0301En1050 08 15 186 XPS Q8 Controller Motion Tutorial The function PositionerEncoderCalibrationParametersGet returns the results of the last encoder calibration To apply these values add them manually to the appropriate section in the stages ini file and reboot the controller In the folder Admin Public Drivers Lab View XPS Q8 of the XPS controller embedded in Examples llb there is a LabVIEW application to display the current analog encoder values The display zone matches the maximum possible amplitude of the analog signals When they are larger than this the AD converter will clip and the interpolation error will increase dramatically The dotted circle represents the 1 volt peak to peak ideal encoder the red circle represents the c
310. tioner must complete a defined displacement from its current position and a defined output velocity at the end of the period By definition there is no constant vector velocity and no definition for a vector acceleration in contrast to Line arc trajectories or splines Trajectory element segment An element of a PVT trajectory 1s defined by a set of all positioner displacements and output velocities and the duration for the segment In the PVT data file each element is represented by a line of values DT DP1 VOI DP2 VO2 DPn VOn DT The segment duration in seconds DP1 DP2 DPn Positioners 1 2 n displacements during DT VOI VO2 VOn Positioners output velocities at the end of DT 8 3 2 Trajectory Conventions When defining or executing a PVT trajectory a number of rules must be followed e The motion group must be a MultipleAxes group e All trajectories must be stored in the controller s memory in Public Trajectories Once a trajectory is started it executes in the background allowing other groups to work independently and simultaneously e Fach trajectory must have a beginning and an end Endless infinite trajectories are not allowed Although N times N defined by user non stop execution of a trajectory is allowed Since the trajectory is stored in a file the trajectory s maximum size maximum elements number is practically not limited e PVT trajectory elements segments are 3 order po
311. to a high state The first event parameter is the bit index 0 to 15 The other event parameters are 0 by default DIHighState Triggers an action when the digital input bit is in a high state The first event parameter is the bit index 0 to 15 The other event parameters are 0 by default DIHighLow Triggers an action when the digital input bit switches from a high to a low state The first event parameter is the bit index 0 to 15 The other event parameters are 0 by default DIToggled Triggers an action when the digital input bit switches from low to high or from high to low The first event parameter is the bit index 0 to 15 The other event parameters are 0 by default ADCHighLimit Triggers an action when the analog input value exceeds the limit The first event parameter is the limit value in volts The other event parameters are 0 by default ADCLowLimit Triggers an action when the analog input value is below the limit The first event parameter is the limit value in volts The other event parameters are 0 by default QW Newport Experiences Salvin 133 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial PositionerError Triggers an action when the current positioner error applied with the error mask for the 32 bit register results in a value other than zero The first event parameter specifies the error mask in a decimal format The other event parameters are 0 by defau
312. troller is monitoring the feedback of the positioner and is updating the output based upon the following error The XPS controller s position servo is being updated at 8 kHz and the profile generator at 2 5 kHz providing highly accurate closed loop positioning Between the profiler and the corrector there is a time based linear interpolation to accommodate the different frequencies Experiences Solutio 81 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial There are two types of moves that can be commanded an absolute move and a relative move For an absolute move the positioner will move relative to the HomePreset position as defined in the stages ini file In most cases the HomePreset is 0 which makes the home position equal to the zero position of the positioner For a relative move the positioner will move relative to the current TargetPosition In relative moves it is possible to make successive moves that are not equal to a multiple of an encoder step without accumulating errors Absolute and relative moves can be commanded to positioners and to motion groups When commanding a move to a positioner only the position parameter for that positioner must be provided When commanding a move to a motion group the appropriate number of position parameters must be provided with the move command For instance for a move command to an XYZ group 3 position parameters must be defined When commandin
313. ture the group must be in the ready state to do so the following functions are required GroupInitialize GroupHomeSearch To gather the data for a given frequency the following steps are required GatheringConfigurationSet EventExtendedConfigurationTriggerSet EventExtendedConfigurationActionSet EventExtendedStart PositionerPreCorrectorExcitationSignalSet GatheringStopAndSave To retrieve the gathered data different methods can be used ftp transfer or programmatically using one of the following functions GatheringConfigurationGet GatheringCurrentNumberGet GatheringDataGet GatheringDataMultipleLinesGet GatheringStop GatheringRunAppend Refer to the XPS user s manaual for more details on the above mentionned listed functions QS Newport XPSDocumentation V1 4 x EDH0301En1050 08 15 194 Experfence Sunt XPS Q8 Controller Motion Tutorial The difference between the existing excitation signal function PositionerExcitationSignalSet and the new one PositionerPreCorrectorExcitationSignalSet 1s PositionerExcitationSignalSet inserts the excitation signal into corrector output after the PID corrector control loop calculation PositionerPreCorrectorExcitationSignalSet inserts the excitation into corrector inputs before the PID corrector control loop calculation 17 3 2 Implementation The PositionerPreCorrectorExcitationSignalSet function is implemented to inject the excit
314. two positioners are rigidly attached to each other Hence all motions including motor initialization homing and emergency stops must be done in perfect synchronization For details about Gantries and their configuration please refer to section 4 9 Specify the Time Flash Base Frequency value default is 40E6 must be between 39 5E6 and 40 5E6 Hz When all positioners are configured click on VALID to confirm the group configuration Ww Newport SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL Ti Auto configuration Manual config System Build Double Axis My XY Group Positioner StepAxis Oo mwe OOOO Tie her Baso Frevo AE usea Secondary Positioner Positioner ScanAxis 0 FPeume 0 d usea Secondary Positioner VALID AD Newport spectra Physics A rann Mrmq Carpa un Solutions to Make 4 When the configuration of each positioner is validated the new group is listed in the New system build window SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL Newport TERMINAL TUNING FUNCTIONAL TESTS DOCUMENTATION Auto configuration Manual configuration Error file display System manual configuration Boot scriptfleneme TO o mwm See See ee Sintered E Pl ae JINN Hn EE MEM KEEN o mee 0 1 2j Generate config files and Boot GENERAL BootScriptFileName BootScriptArguments GROUPS InterlockedGroups Sing
315. ty It combines user friendly web interfaces with advanced trajectory and synchronization features to precisely control from the most basic to the most complex motion sequences Multiple digital and analog I O s triggers and supplemental encoder inputs provide users with additional data acquisition synchronization and control features that can improve the most demanding motion applications To maximize the value of the XPS Controller Driver system it is important that users become thoroughly familiar with available documentation The XPS Quick Start and XPS User s Manual are delivered as paper copies with the controller The Programmer s TCL Software Drivers and Stage Configuration manuals are PDF files accessible from the XPS web site DLLs and corresponding sources are available from the controller disk in the folder Public Drivers DLL DLLs can also be downloaded through the FTP LabVIEW VIs with examples are also available from the controller disk in the folder Public Drivers LabView They can also be downloaded through FTP To connect through FTP please see chapter 5 FTP connection The first part of this manual serves as an introduction and also as a reference It includes 1 Introduction 2 System Overview 3 Getting Started Guide Experiences Salubons XPSDocumentation V1 4 x EDH0301En1050 08 15 1 XPS Q8 Controller User s Manual The second part provides a detailed description of all softwar
316. ty or equipment WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact an electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground System earthing must be of type earthed neutral TN as defined by CEI60364 NOTE Additional information the user or operator should consider General Warnings and Cautions The following general safety precautions must be observed during all phases of operation of this equipment Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of design manufacture and the intended use of the equipment e Heed all warnings on the unit and in the operating instructions e To prevent damage to the equipment read the instructions in this manual for the selection of the proper input voltage e Only plug the Controller Driver unit into a grounded power outlet e Ensure that the equipment is properly grounded to earth ground through the grounding lead of the AC power connector e Route power cords and cables where they are not likely to be damaged e Use Proper Power Cord Use only the power cord specified for this product and certified for the country of use e The system must be installed in such a wa
317. ue to check The variable can be modified by using the DoubleGlobalArraySet function DoubleGlobalArraySuperior Triggers an action when the value of the variable in the DoubleGlobalArray and referenced by the global variable number is higher than the value to check The variable can be modified by using the DoubleGlobalArraySet function DoubleGlobalArrayInWindow Triggers an action when the value of the variable in the DoubleGlobalArray and referenced by the global variable number is superior to MinValue and inferior to MaxValue DoubleGlobalArrayOutWindow Triggers an action when the value of the variable in the DoubleGlobalArray and referenced by the global variable number is outside the interval defined by MinValue and MaxValue QS Newport Esperance Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 136 XPS Q8 Controller Motion Tutorial 11 2 Actions There are several actions that can be triggered by the events discussed previously Users have the full flexibility to trigger any action out of the list of possible actions at any event out of the list of possible events It is also possible to trigger several actions at the same event by adding several sets of parameters to the function EventExtendedConfigurationA ctionSet similar to how it is done with events Group GPIO Positioner TimerX 1 2 3 4 pom JjDOToge Mak O pm Pulse Mak O pom Set Mak Vale M DA
318. unction GroupJogModeEnable and is available to all motion groups Once this mode is enabled the motion parameters can be set using the command GroupJogParameterSet which is applicable to positioners and to motion groups To exit the Jog mode first set the velocity to zero and then send the function GroupJogModeDisable Examples For a single axis group GroupJogModeEnable MySingleGroup Enables the Jog mode GroupJogParameterSet MySingleGroup 5 20 The single stage starts moving with a velocity of 5 units per second and an acceleration of 20 units per second GroupJogParameterSet MySingleGroup 5 20 The single stage starts moving in the reverse direction with the same velocity and same acceleration GroupJogParameterSet MySingleGroup 0 20 The single stage stops moving its velocity being 0 units per second GroupJogModeDisable MySingleGroup Disables the Jog mode For an XY group GroupJogModeEnable MyXY Group Enables the Jog mode GroupJogParameterSet MyXY Group 5 20 10 40 The X axis and Y axis start moving with a velocity of 5 and 10 units per second and an acceleration of 20 and 40 units per second respectively 85 XPSDocumentation V1 4 x EDH0301En1050 08 15 XPS Q8 Controller Motion Tutorial GroupJogParameterSet MyXY Group 0 20 0 40 Both stages stop moving their velocities being 0 units per second To apply new parameters to only one stage use the following function GroupJ
319. under the main tah STAGE When adding a new stage from this web tool the controller copies the parameters from its internal database which contains parameters for all Newport stages and stores these parameters in a file called stages ini Hence the stages ini file contains the parameters for only a subset of stages as defined by the user Users can assign any name for their stages The default name is the Newport part number but in some cases it makes sense to use a different name This way for instance it is possible to add the same set of parameters several times in the stage data base under different stage names Later you can modify certain parameters like travel ranges or PID settings to optimize the stage for different applications All stage parameters can be modified using the Web Tool Modify under the main tab STAGE Alternatively the stage parameters can be modified directly in the stages ini file using a text editor The stages ini file is located in the Config folder of the XPS controller This folder is accessible via ftp see chapter 5 for details When all stages are added to the stages ini file build the system using the web tool Manual Configuration under the main tab SYSTEM In this tool the stages get assigned to positioners and the positioners get assigned to motion groups Please refer to chapter 6 3 for details on the different motion groups and their specific features The group name and positioner name can be a
320. unication the user must first request a socket ID from the XPS controller server listening at a defined IP number and port number When sending a function to a socket the controller will always reply with a completion or error message to the socket that has requested the action The concept and application of sockets has many advantages First users can split their application into different segments that run independently on different threads or even on different computers To illustrate this see below SocketID OpenSocket SocketID2 OpenSocket For i 1 to nbpos Zerror ReadAFSensor Goal Position i error GroupMoveRelative SocketID2 Z Zerror error GroupMoveAbsolute SocketID1 XY goal if error OK than TakePicture Next i In this example a thread on socket 1 commands an XY stage to move to certain positions to take pictures while another thread on socket 2 independent of socket 1 concurrently manages an auto focusing system The second task could even be run on a different PC than the first task yet be simultaneously executed within the XPS Alternatively if the auto focusing system is providing an analog feedback this task could have been also implemented as a TCL script within the XPS see the next topic Second the concept of sockets has another practical advantage for many laboratory users since the use of threads allows them to share the same controller for different applications at the same time With the X
321. until the index is found Note For users with CIE03 E3425x boards if a limit is detected before the index there will be an emergency brake and the group will go in NOT_INITIALIZED status 4 CurrentPositionAsHome is used when the positioner has no home switch or index This process will keep the positioner s home at its current location Setting the home too close to the EOR could generate unwanted emergency stops Start with around 50 MIM Minimum Incremental Movement units but an optimum distance may be determined by trial and error depending on the stage This feature can also be used to set home arbitrarily and bypass a home switch 5 MinusEndOfRunAndIndexHomeSearch uses the positioner s minus end of run limit as a hardware home switch and a zero index from the encoder This process is comparable to MechanicalZeroAndIndexHomeSearch but uses the minus end of run limit signal as hardware home switch and moves in the positive direction until the Index is reached Otherwise it will reach the positive limit or a timeout will occur The positioner homes to a position that is different from the MechanicalZeroAndIndexHomeSearch location 6 MinusEndOfRunHomeSearch uses the positioner s minus end of run limit for homing Note that the emergency stop at the negative limit is disabled during homing 7 PlusEndOfRunHomeSearch uses the positioner s plus end of run limit for homing and the emergency stop at the positive limit is disabled du
322. up GroupHomeSearch MasterGroup GroupMoveRelative MasterGroup Positioner Displacement NOTE The slave positioners should have similar capabilities as the master positioner in terms of velocity and acceleration Otherwise the full capabilities of the master or the slave positioners may not be utilized 7 8 Analog Tracking Analog tracking controls the position or velocity of a motion group via external analog inputs Analog tracking is available with all motion groups To enable this mode first set the tracking parameters of the positioners belonging to that motion group Then enable tracking while the motion group is homed in ready state after homing In analog tracking mode the analog inputs are filtered by a first order low pass filter Its cut off frequency is defined by the parameter TrackingCutOffFrequency given in the section profiler of the stage ini parameter file To set or get the tracking parameters use the following functions PositionerAnalogTrackingPositionParametersSet PositionerAnalogTrackingPositionParametersGet PositionerAnalogTrackingVelocityParametersSet Positioner AnalogTrackingVelocityParametersGet The functions PositionerAnalogTrackingPositionParametersSet and PositionerAnalogTrackingVelocityParametersSet define the maximum velocity and acceleration used during analog tracking QW Newport Experiences Salvin 87 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XP
323. up State Diagram Initial Y NOTINIT HOMING 42 Cb lag Emergency stot 3 5 6 8 Emergency brake 40 i EMERGENCY_BRAKING Motion disabl 7475 75 Error Excitatiol oe ee A m o DISABLE Signal Yd rror Signal e end Done NOTREF o n READY d REFERENCING a GroupInitialize b GroupHomeSearch or c GroupReferencingStart d GroupReferencingStop e PositionerExcitationSignalSet Function Description e PositionerExcitationSignalGet e PositionerExcitationSienalSet see ProgrammerManual pdf 191 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial 17 0 Pre Corrector Excitation Signal 17 1 Description The XPS firmware integrates functions to measure the response of the system by injecting different excitation signals inside the control loop To extend the capabilities to use alternate ways measuring a system transfer function the injection of an excitation sine wave signal will be made available outside the control loop To benefit from the efficiency of the control loop using the feed forward gains the position the velocity the acceleration and the jerk will be injected in the control loop This new feature coupled with the gathering capabilities of the controller will allow to inject the sine position excitation and concurrently gather the commanded po
324. uration has happened at least once and is no longer true The only exception is if the event configuration contains any of the permanent events Always or Timer In this case the event trigger will always stay active With the function EventExtendedRemove any event trigger can get removed The function EventExtendedWait can be used to halt a process It essentially blocks the socket until the event occurs Once the event occurs it is deleted It requires a preceding function EventExtendedConfigurationTriggerSet to define the event at which the process continues The functions EventExtendedGet and EventExtendedAllGet return details of the event and action configurations Experencs Salvin XPS Q8 Controller Motion Tutorial 11 1 Events General events are defined as Always Immediate and Timer With the event Always an action is triggered each servo cycle meaning every 125 us For events that are defined as Immediate an action is triggered once immediately during the very next servo cycle For the events defined as Timer an action is triggered immediately and every nth servo cycle Here n corresponds to the FrequencyTicks defined in the function TimerSet There are five different timers available that can be selected by the actor 1 5 Actor is the object that actions events are linked to All events that are motion related from MotionStart to TrajectoryPulseOutputState in
325. urrent mean encoder settings and the green dot the current encoder value This application uses the function PositionerEncoderAmplitudeValuesGet for display E Analog Encoder Calibration Display vi Fihier Edition Ex cution Outils Parcourir Fen tre Aide Analog encoder display Controller Address Refresh time ms 192 168 33 233 so Select the positioner and press START MAY ai i i i i 0 40 0 20 0 00 0 20 0 40 Cosinus V Example of the use of the functions GrouplInitializeWithEncoderCalibration MyGroup PositionerEncoderCalibrationParametersGet MyGroup MyStage This function returns the encoder calibration parameter values encoder sine signal offset encoder cosine signal offset encoder differential gain and encoder phase compensation These values need to be entered in the appropriate section of the stages ini PositionerEncoderAmplitudeV aluesGet M yGroup MyStage This function returns the encoder amplitude values encoder sine signal maximum amplitude value encoder sine signal current amplitude value encoder cosine signal maximum amplitude value and encoder cosine signal current amplitude value Following is the complete process for calibrating a stage with an analog encoder interface Experience Solutions 187 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial Step 1 Initialize the positioner and run the calibration routine TUNING FUNCTIONAL TESTS
326. ut 15 output Output 16 Figure 69 GPIO4 Additional Digital I O Connector General Purpose Inputs Outputs GPIOA is an additional digital I O connector 211 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Appendix 23 0 Appendix E PCO Connector Distance spaced pulses AquadB how or Tim spaced pulses signals Position Compare Output 5 VL 5 VL Mating connector Axis 1 Pulse Enable Axis 1 A LEMO Axis 1 Pulse Axis 1 B FGGOB3O06CLADS2 or 42 Axis 2 Pulse Axis 2 B 5 Axis 2 Pulse Enable Axis 2 GND GND Figure 70 Position Compare Output Connector There is one PCO connector for every two axes Axis 1 refers to the upper odd encoder plug and axis 2 refers to the lower even encoder plug The signals provided on this plug depend on the configuration of the output triggers see chapter 13 Output trigger for more details The state of the enable signal is low when the stage 1s inside the programmed position compare window Note also that only the falling edge of the trigger pulse is precise and only this edge should be used for synchronization regardless of the PCOPulseWidth setting The duration of the pulse is 200 nsec by default and can be modified using the function PositionerPositionComparePulseParametersSet Possible values for the PCOPulseWidth are 0 2 default 1 2 5 and 10 us Successive trigger pulses should have a minimum time lag equivalent to the PCOPulseWi
327. ventExtendedStart The types of data being collected are the XY X encoder position and the value of the GPIO2 ADC1 A total of 100 data sets are collected one set of data at each second trigger input Gathering will stop automatically after the 100th data acquisition Use the function GatheringExternalStopAndSave to save the data to a file The file format is the same as for internal data gathering QS Newport Esperance Salvin XPSDocumentation V 1 4 x EDH0301En1050 08 15 154 XPS Q8 Controller Motion Tutorial 13 0 Output Triggers External data acquisition tools lasers and other devices can be synchronized to the motion For this purpose the XPS features one dedicated trigger output per axis see Appendix E PCO connector for details The XPS can be configured to either output distance spaced pulses AquadB encoder signals or time spaced pulses on this connector In the distance spaced configuration one output pulse is generated when crossing a defined position and a new pulse is generated at every defined distance until a maximum position has been reached In most cases this mode provides the most precise synchronization of the motion to an external tool In the AquadB configuration AquadB encoder signals are output on the PCO connector These signals can be provided either always or only if the positioner is within a defined position window When used with stages that feature a digital encoder AquadB as oppos
328. ver applications on the Internet use to communicate with each other To communicate over TCP a client program and a server program establish a connection to one another Each program binds a socket to its end of the connection To communicate the client and the server both read from and write to the socket that binds the connection Sockets are interfaces that can plug into each other over a network Once plugged in the connected programs can communicate IP address IP address of the XPS of the computer I socket socket XPS Host Controller Driver Computer stdout Figure 62 Running Processes in Parallel XPS uses blocking sockets In other words the programs commands are blocked until the request for data has been satisfied When the remote system writes data on the socket the read operation will complete it and write the data in the received message window of the Terminal menu 0 if command has been executed without error or the error number in case of an error That way commands are executed sequentially since each command always waits for a response before finishing and then allowing execution of the next function The main benefit of using this type of socket 1s that an execution acknowledgement is sent to the host computer with each function In case of any error it allows an exact diagnostic which function has caused the error It also allows a precise sequential process execution
329. when the voltage on the GPIO ADC2 exceeds 3 Volts It is also possible to link different events to an event configuration The same function EventExtendedConfigurationTriggerSet is used and the different events are just separated by a comma The event combination happens when all individual events happen at the same time It is comparable to a logic AND between the different events Examples EventExtendedConfigurationTriggerSet GPIO2 ADC2 ADCHighLimit 3 0 0 0 MyGroup MyPositioner SGamma MotionState 0 0 0 0 This event will happen when the voltage of the GPIO ADC2 exceeds 3 Volts during a SGamma motion of the MyGroup MyPositioner EventExtendedConfigurationTriggerSet Always 0 0 0 0 MyGroup M yPositioner SGamma M otionStart 0 0 0 0 This event will happen during each SGamma motion starts of the positioner MyGroup MyPositioner The addition of the event Always has the effect of keeping the event after the next motion has been started see differences compared to the first example above The exact meaning of the different events and event parameters are as follows Always Triggers an action ALWAYS means at each servo cycle Event parameter to 4 0 by default NOTE This event is PERMANENT until the next reboot Call the EventExtendedRemove function to remove it Immediate Triggers an action IMMEDIATELY meaning once during the very next servo cycle Event parameter to 4 0 by default NOTE This event is TEM
330. x EDH0301En1050 08 15 208 XPS Q8 Controller Appendix 21 0 Appendix C Power Inhibit Connector INHIBIT Mating connector Male DB15 with UNC4 40 lockers PIN Signal type Description PIN Signal type Description Supply GND Reserved Inhibition Must be connected to GMD Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved 1 2 3 4 5 6 7 8 Reserved Figure 65 Inhibition connector This connector is provided for the wiring of a remote STOP ALL switch It has the same effect as the front panel STOP ALL button Inhibition input is a standard TTL input Inhibition Pin 2 must always be connected to GND during normal controller operation An open circuit is equivalent to pressing STOP ALL on the front panel Wire the switch contacts normally closed NOTE Connecting more than one switch is not recommended on this input QW Newport Experiences Solutiom 209 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Appendix 22 0 Appendix D GPIO Connectors 22 1 GPIO1 Connector GPICH oon0oooOoOoDoOOgOoOoOgooDoOO eaoodoooodooodooOOo gooo Signal type M C TTL input Input 1 TTL input Input 2 TTL input Input 3 TTL input Input 4 TTL input Input amp TTL input Input amp TTL input Input 7 TTL input Input amp Output Output Output Qutpaul Output Output i CO j m cn qe i hi Desc
331. y that the power switch and the power connector remain accessible to the user e Disconnect or do not plug in the AC power cord under the following conditions Ifthe AC power cord or any other attached cables are frayed or damaged Ifthe power plug or receptacle is damaged Ifthe unit is exposed to rain or excessive moisture or liquids are spilled on it QO Newport Experience Salvin XPS Q8 Controller User s Manual Ifthe unit has been dropped or the case is damaged Ifthe user suspects service or repair is required e Keep ir vents free of dirt and dust and obstructions e Keep liquids away from unit e Do not expose equipment to excessive moisture 78596 humidity e Do not operate this equipment in an explosive atmosphere e Disconnect power before cleaning the Controller Driver unit Do not use liquid or aerosol cleaners e Do not open the XPS Controller Driver stand alone motion controller There are no user serviceable parts inside the XPS Controller Driver e Return equipment to Newport Corporation for service and repair e Dangerous voltages associated with the 100 240 VAC power supply are present inside Controller Driver unit To avoid injury do not touch exposed connections or components while power is on e Follow precautions for static sensitive devices when handling electronic circuits QW Newport Experiences Salvin 5 XPSDocumentation V 1 4 x EDH0301En1050 08 15 XPS
332. ystem use the example of the XY group but the same is true for the other groups The firing positions are defined in the called user s system of coordinates X Y The controller will convert the X Y coordinates to raw encoder positions Xr Yz to take into account the group mapping the encoder mapping and the encoder linear compensation to accurately fire the pulses at the requested positions To know the positions in the different systems of coordinates the following functions are provided GroupPositionCorrectedProfilerGet function has as input a X Y position in the user s system of coordinates and will output the Xm Ym position in the machine s system of coordinates by applying the XY mapping compensation GroupPositionPCORawEncoderGet function has as input a X Y position in the user s coordinate system and will output the Xr Y position in the encoder s system of coordinates without any compensation QW Newport Experiences Saulia 163 XPSDocumentation V1 4 x EDH0301 En1050 08 15 XPS Q8 Controller Motion Tutorial 13 3 3 2 CIE08 compensated position compare signals definition If the CIE08 compensated PCO pulses generation is activated the PCO pulses will be generated at each predefined position with a pulse time duration that can be set with the PositionerPositionComparePulseParametersSet function cf XPS Programmer s Manual for details The PCO enable output signal will be gen

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