Panel Mount Mass Flow Controller MPC Series User`s Manual
Contents
1. oh i A Connection pan No 9 13 5 10 port IN Applicable panel plate thickness is 2 to 9mm Panel cutout unit mm Vertical gang mounting Lili Horizontal gang mounting 48 X N 3 35 Individual mounting 4504 N Number of mounted units 3 4 Chapter 3 MOUNTING AND WIRING 6 Mounting on a panel The mounting panel should be used with a thickness of 2 to 9mm of steel Mounting bracket Panel cutout o Handling Precautions To fasten this controller onto the panel tighten a mounting bracket screws and turn one more half turn when there is no play between the bracket and panel Excessively tightening the screws might deform the controller case 6 Piping connection e When this controller is mounted on a panel use piping which does not give a stress to the controller case during and after the piping work e Connect the piping so that the gas flows in the direction from IN to OUT as indicated on the body e After connecting piping check for any gas leaks 0 Handling Precautions lt When metal piping is directly connected to the piping connection port this controller cannot be mounted on a panel Doing so will deform or damage the case lt When leak check is performed using leak check liquid ensure to avoid spillage or contact of liquid on to the case electrical wires and connectors Doing so mightcause malfunction or faulty2. Basic wate press DISP key or any key is not O pressed for 10 seconds or longer Setting flowrate operation Setting flowrate SP value G any Sv nol presse press DISP key less than 1 second longer Operation mode display Instantaneou flowrate Operation mode Integrated ISP key Valve drive flowrate display output display press V key f Integrated flowrate 3 seconds or longer Instantaneous J L owrate Vo A Integrated flowrate Valve drive output wim OF eli 5 T L Bink Lights press DISP key purine press DISP key press lt key 3 seconds or longer Parameter setup display Application oe Gragg operation Setting value ggg press DISP key press lt key Function setup 3 seconds or longer display Item B HBH Setting value HEHE press lt key 3 seconds or longer press DISP key Chapter 5 APPLICATION OPERATION 5 1 Function Setup Follow the procedure below to set the functions such as event output type and external switch input assignments 5 2 1 Press the DISP key to display the integrated flowrate value gt gt L lamp lights 2 Keep the lt key pressed for 3 seconds or longer nt Ls Deij 1 gt gt is indicated on the upper display Parameter setup mode 3 Keep the lt key pressed for 3 seconds or longer gt gt The item No 1 is indicated on the upper display and the function setup mode is entered
3. adjust the preset flowrate during trial operation e Loader communication function The connection of a dedicated loader cable sold separately to the loader jack at the rear side of this device enables direct communication with a personal computer in the form of one to one using the communication program made by user By using this loader communication various settings in the function setup and the flowrate setup can be configured from a personal computer and the control flowrate or alarm status can be read out with the personal computer Chapter 1 INTRODUCTION a mone Ssereciion ae model No flow ow range ey En on aee F MPC Panel mount mass flow controler B Ee ano A TE TEE nn E E e KATE A AAN a rda ai 0020 1 1 f Jo4io200l minslandardy 4 Model with integrated display CE E without RS 485 communication function 2 With RS 485 communication function HEHN without analog input output function oO Without optional function Oo Without optional function Without optional function _ Inspection certificate provided LY Complying with traceability certification 0 Product version 1 L min standard indicates the volume flowrate per minute L min converted to 20 C and 1 atmospheric pressure The reference temperature can also be changed to 0 C 25 C and 35 C 2 The nitrogen air is set as a factory setting The MPC can be used
4. by the contact turning OFF lt Valve drive output display The valve drive output value can be displayed in the unit of 0 0 to 100 0 The increase or decrease of supply pressure and the choking of piping can be detected lt Alarm display output shut off The flowrate deviation alarm can be output by detecting the deviation between setting flowrate and control flowrate The alarm judgment delay time can also be set When a flowrate alarm occurs or an alarm occurs during controller self diagnostics the event signal is output the valve can be forcibly fully closed or fully opened at your choise also lt Event lamp lighting output Two of the following event types can be output Alarm output When the flowrate deviation alarm or self diagnostics occurs Flowrate upper lower limit output Output by comparison to the optional upper lower flowrate limit setting value Integration count up output When the integration setting flowrate is exceeded Integration pulse output Pulse can be output for each integration display unit OK output When the control flowrate is within the range of set point allowable range The operating mode can be identified and output externally as an event The output ON delay time can also be set However the delay cannot be set to integration pulse output In addition the output logic can be reversed At regular time ON at event occurrence OFF However the output is always OFF during po
5. cancelled Note e When the operating mode selection 5 6 or 8 is selected at the external switch input function assignment and X in the function setup the operating mode selection valve fully closed fully open by the ON OFF operation of external switch inputs can be performed For the function setup method refer to gt Chapter 5 APPLICATION OPERATION e When each operation mode is entered ever while the instantaneous flowrate is displayed the operation mode is indicated on the upper display as shown below The OK lamp blinks in fully open mode Table of operation mode displays while the instantaneous flowrate is displayed Fully closed mode Off FF is displayed at all times after flowrate zero is confirmed Control mode On or Off 7 is displayed for 1 second when the control mode is entered Fully open mode Blinking Fu is displayed for 1 second when the fully open mode is entered 4 6 Chapter 5 APPLICATION OPERATION When the following operation is performed while the integrated flowrate is displayed the parameter setup mode and function setup mode are entered and each setting value can be changed Power ON Instantaneous flowrate display Multi setting flowrate display Gn press DISP key 1 second or longer Setting flowrate No oO a a SP No 4 fl
6. event is selected at the event output type assignment lt 144 and 44 in the function setup or when 1 Function enabled is selected at the valve automatic shut off function 3 This can be set only when 1 Function enabled is selected at the PV forced zero function 24 in the function setup The result of the factory setting and setting range becomes the flowrate obtained by multiplying the full scale flowrate by the percentage in parentheses The factory setting and setting range vary according to the gas type Chapter 6 TROUBLESHOOTING B Alarm code display When a flowrate deviation alarm occurs or when an alarm occurs during controller self diagnostics the operating mode currently selected at Operation selection at alarm occurrence amp in the function setup is forcibly switched to Except AT The upper display alternately indicates the alarm codes shown in the table below and the regular display Alarm a Error Cause Countermeasure code Flowrate deviation lower Insufficient alarm judgment delay time Request for repair service limit alarm insufficient power voltage insufficient if there is no problem on the items inlet pressure excessive operating listed on the left temperature etc Flowrate deviation Insufficient alarm judgment delay time Request for repair service upper limit alarm valve trouble sensor trouble etc if there is no problem with the delay time Valve overhea
7. multi setting flowrate is displayed it is automatically returned to the instantaneous flowrate display Chapter 4 BASIC OPERATION 4 2 Setting the Flowrate B Procedure for changing flowrate in digital setting Single SP setting mode number of SPs 1 according to function setup 4 Follow the procedure below to change the SP value setting flowrate 1 Press the DISP key gt gt The instantaneous flowrate value and SP value are displayed Same as the display at power supply ON 2 Press the A key or v key gt gt The digit currently being changed blinks You can move to the digit to be changed by pressing the lt key 3 When the target value is displayed press the ENT key gt gt The SP value is fixed At this point the SP value is updated Note Direct setup function e The control can be executed using the SP value currently being changed indicated by blinking display when the Direct setup function is enabled is selected at direct setup function switching lt 2 in the function setup The ENT key needs not to be pressed to fix the SP value However to switch the display by pressing the DISP key press the ENT key to fix the SP value and switch the display This function is useful when changing the SP value little by little The factory setting is set to Direct setup function is enabled For the function setup method refer to gt Chapter 5 APPLICATION OPERATION Mul
8. operation 3 5 Chapter 3 MOUNTING AND WIRING Wiring CAUTION 3 6 Be sure to check that the wiring is correct before you turn the power ON Incorrect wiring might cause damage or malfunction 6 Connector specifications Part No MCVW1 5 9 STF 3 5 Phoenix Contact Mfg Wire type Either of single core wire or stranded wire applicable Compatible cable 0 08 to 1 5mm AWG 28 to 16 Appropriate length of stripped wire 7mm Compatible screw driver Tip size 2 5 x 0 4mm a flat head driver Connector signal names 1 POWER Powers Gave 2 POWER eno Powersuppy ground 3 Evi JEvenioutputi Open collector non insulated output Eve Event output 2 5 External switch input 1 Switching input OPEN GND De ed mn 24V p A O B EV EV2 i 2 D 2 D External switch input 2 1 Analog setting voltage input 1 for the model with analog I O function 2 RS 48 5 Communications DA 0 to 5V or 1 to 5V 1 Analog flowrate voltage output 2 for the model with RS 48 5 communicatio 2 RS 48 5 Communications DB function SIGNAL GND Signal ground Input output signal common Signal ground is connected with power supply ground inside this device Chapter 3 MOUNTING AND WIRING Wiring e Power supply 24Vde POWER 24V ________ POWER GND e Event output Load 8 Event output 1 Load 4 Event output 2 9 SIGNAL GND lt External switch i
9. range 0 to 50 C 32 to 122 F when RS 485 communication Allowable storage temperature range 10 to 60 C 14 to 140 F Allowable operating humidity range 10 to 90 RH no condensation allowed Flowrate Setup method 1 Key operation 2 External setup voltage input only for the setup model with analog I O function 3 Loader communication 4 communications only for the model RS 485 communications function Setup input voltage range 0 to 5Vdc 1 to 5Vdc selectable by function setup and external input only for the model with analog I O function Flowrate Display method 7 segment LED 8 digits display For the instantaneous flowrate display 4 digits and for the setting flowrate display 4 digits Indication accuracy 2 FS 1 digit at standard temperature and differential pressure Integra 0 00 to 999 999 99L 0 0 to 9 999 999 9L function Data backup timing 1 At each 5L count 1 At each 20L count 2 At each after 1 hour from the previous backup Flowrate 0 to full scale flowrate scaling available output Standard output voltage range 0 to 5Vdc 1 to 5Vde selectable by function setup and external input 7 2 MPCO0005 MPC0020 Proportional solenoid valve Normally closed when de energized N C 5 00 L min standard 20 0 L min standard Nitrogen air argon carbon dioxide CO Note The gas must be a dry gas not containing corrosive components chlorine sulfur acid The gas must also be a clean gas not cont
10. 4 Press the A key or V key to select the target setup item No and then press the ENT key gt gt The current setting value being indicated on the display blinks 5 Press the A key or V key to display the target setting value and then press the ENT key gt gt The setting value is stored If other items are required to set up return to the step 4 and repeat the procedure Otherwise proceed to the step 6 6 Press the DISP key gt gt The mode is returned to the instantaneous flowrate display o Handling Precautions e If any operation is not performed for one minute after entering the function setup mode the display automatically returns to the regular display instantaneous flowrate display e lf the DISP key is pressed while the operation in step 5 is performed indicated by blinking display the setting value remains at the previous value without being updated B Function setup item list Chapter 5 APPLICATION OPERATION Display Item Item Description Setup Item and Factory Remarks Description Setting Operating mode selection selection by key sas Instantaneous flow rate setup method instantaneous SP setup method selec tion Number of instanta neous flowrate setups selection number of SPs selection Input voltage range selection at analog setting Analog SP input range selection Flowrate analog output voltage range selection PV analog output range selection E
11. 53 analog digital setting is reversed when the contact is ON Slow start ON must be selected ing 4 When the valve fully closed input and the valve fully open input are put in at the same time by two contact the both inputs are disabled When the integrated count value reaches the integrated event setting value the valve is fully closed When control is resumed from the fully closed mode the integrated value is automatically reset Set the alarm flowrate in the parameter setup mode See page 5 7 Alarm output turns ON even if 0 is selected 4 2 Move to fully open 0 Slow start is enabled when the external contact input turns ON in case of slow start operation switching isselected at to ii Slow start disabled 1 to 8 Slow start enabled equivalent to approx 1 to 6 seconds settling time Slow start setup Gas type selection 0 Conversion factor for If the flowrate range changes due to each gas type set by the a change in the gas type the flowrate user OK range and flowrate alarm range in Air nitrogen the parameter setup must be changed Argon When 0 is selected set the Carbon dioxide CO conversion factor in the parameter setup mode Referenced to 20 C 1 atmosphere Referenced to 0 C 1 atmosphere Referenced to 25 C 1 atmosphere Referenced to 35 C 1 atmosphere Flowrate display 5 4 Inlet pressure adjustment Instantane
12. CATION OPERATION 5 1 Function Setup oenen eneen eneen eneen enen en 5 2 B Function setup item list oenen eneen 5 3 5 2 Parameter Setup aas anaa nagan eeen eenen eenen enen 5 6 Chapter 6 TROUBLESHOOTING B Alarm code display eneen eeen eenen eenen 6 1 E Other troubles ses ers sean der vaneen nanne adams 6 2 Chapter 7 SPECIFICATIONS B Specifications ensen enen eneen venen venen venen 7 1 B Relationship between flowrate when valve is fully open and 7 6 differential pressure in air vi Conventions Used in This Manual The following conventions are used in this manual CJ Handling Precautions Note gt gt OK lamp ENT key Handling Precautions indicate items that the user should pay attention to when handling the MPC Series Notes indicate useful information that the user might benefit by knowing This indicates the item or page that the user is requested to refer to The numbers with the parenthesis indicate steps in a sequence or indicate corresponding parts in an explanation This indicates the contents shown on the personal computer or unit as a result of operation or unit status after completion of operation This indicates 7 segment indication on the setup display This indicates an LED lamp on the setup display This indicates a key on the setup display vii Chapter 1 INTRODUCTION B Introduction The MPC series high performance digit
13. D A ANANAS No CP SP 1153E Panel Mount Mass Flow Controller MPC Series User s Manual Installation Thank you for purchasing the MPC Series This manual contains information for ensuring correct use of the MPC Series It also provides necessary information for installation maintenance and trou bleshooting This manual should be read by those who design and maintain devices that use the MPC Series Be sure to keep this manual nearby for handy reference Yamatake Corporation RESTRICTIONS ON USE This product has been designed developed and manufactured for general purpose application in machinery and equipment Accordingly when used in applications outlined below special care should be taken to implement a fail safe and or redundant design concept as well as a periodic maintenance program e Safety devices for plant worker protection e Start stop control devices for transportation and material handling machines e Aeronautical aerospace machines e Control devices for nuclear reactors Never use this product in applications where human safety may be put at risk REQUEST Ensure that this User s Manual is handed over to the user before the product is used Copying or duplicating this User s Manual in part or in whole is forbid den The information and specifications in this User s Manual are sub ject to change without notice Considerable effort has been made to ensure that this User s Manual i
14. S 7 3 Chapter 7 SPECIFICATIONS Model No MPC9500 MPC0002 Flowrate Max output voltage 7Vdc max maximum output when flowrate exceeds range cae The input impedance of the connected device must be at least 100kQ Total output accuracy Indication accuracy 0 5 FS 30Vdc 15mA max open collector non insulated output 100ms 10 when the integrated pulse output is selected switch Non voltage contact or open collector Approx 0 5mA contact current Max 1 0V with open collector Max 50uA with open collector Communi 1 Loader communication 6 2 RS 485 communications 3 wire 7 cation 2400 4800 9600 19200 38400bps Power 24Vdc current consumption 300mA max 22 8 to 25 4Vdc ripple 5 max Brass Ni plated stainless steel Teflon Viton Mounting direction Display surface must be placed vertically inlet port lower side outlet port upper side Mounting bracket 8144691 7 001 wiring connector Applicable standard EN61326 1997 Amendment A1 1998 A2 2001 1 _L min standard indicates the volume flowrate per minute L min converted to 20 C and 1 atmospheric pressure The reference temperature can also be changed to 0 C 25 C and 35 C The controllable flowrate range varies according to the gas type Refer to the following table MPC9500 MPCO0002 Control flowrate range Setting indication resolution Control flowrate range Setting indication resolution L min standard L min standard L min stand
15. age this controller This controller is not provided with the capability of completely closing the valve If the valve must be completely closed provide a shutoff valve separately When an external valve is closed must make the valve standby by fully closing with either of the following methods e Make the flowrate to zero e Set the operation mode to the fully closed mode If this valve is maintained in control mode despite of closing the external shutoff valve zero flowrate large excess flowrate will instantly flow when the external shutoff valve is opened In the case of the MPC0020 if the external shutoff valve is closed for more than 5 minutes under control mode or valve forced fully open the valve over heat limit ALT operated and the valve driving current is forcibly limited If this status exists for more than 30 minutes the valve is forced to full close condition When this controller is mounted on a panel use piping which does not give stress to the controller case during and after the piping work If a metal piping is directly connected to the pipe connection port of this controller the case might be deformed or damaged A CAUTION Do not allow lead clippings chips or water to enter this controller case Failure to do so might cause malfunction or faulty operation The part between the power supply circuit of this controller and the I O circuit is not isolated Therefore ensure that the power supp
16. aining dust or oil mist 2 to 100 FS gt 1 Within 1 0s typ to set point 2 FS 2 FS max at standard temperature and differential pressure 1 FS max Within 0 1 FS C 0 056 FS F 0 2 FS max 0 3 FS max 0 2 FS max 0 5 FS max 0 2 FS max 0 2MPa 290PSI Inlet pressure 0 2MPa 290PSI gauge Outlet pressure 0 0MPa OPSI gauge 0 1MPa 145PSI 0 15MPa 217 5PSI 0 3MPa 435PSI max 0 05 to 0 3MPa 72 5 to 435PSI 0 2 FS max 0 5MPa 725PSI gauge 25 C 77 F 10 to 50 C 14 to 122 F 0 to 50 C 32 to 122 F when RS 485 communication 10 to 60 C 14 to 140 F 10 to 90 RH no condensation allowed 1 Key operation 2 External setup voltage input only for the model with analog I O function 3 Loader communication 4 communications only for the model RS 485 communications function 1 0 to 5Vdc 1 to 5Vdc selectable by function setup and external input only for the model with analog I O function 7 segment LED 8 digits For the instantaneous flowrate display 4 digits and for the setting flowrate display 4 digits Cr 2 FS 1 digit at standard temperature and differential pressure 0 0 to 9 999 999 9L 0 to 99 999 999L 0 1L 1 At each 50L count 1 At each 200L count 2 At each after 1 hour from the previous backup ak 0 to full scale flowrate scaling available 0 to 5Vdc 1 to 5Vde selectable by function setup and external input Chapter 7 SPECIFICATION
17. al mass flow controller has been developed for the general industrial market featuring high speed and wide range flowrate control the following features are offered e The MPC series integrates the advanced technologies of an ultra high speed response flow velocity sensor the uF Micro Flow sensor made using Yamatake proprietary technology an ultra compact proportional solenoid valve a new flow channel structure and advanced actuator control technology achieves the realization of the mass flow controller which can be mounted on the panel of the equipments This is a compact 48 X 48mm mask size and light weight approx 300g mass flow controller Easy operation and easy mounting can be realized in good harmony when replacing from a float type flow meter In addition the automatic control of mass flow rate and remote flow setting change can be performed There is almost no influence of temperature and pressure fluctuations by integrating a uF sensor A wide variety of functions are provided as a standard function to respond to the various needs of the users In case of a float type flow meter the pressure and temperature compensation is inevitable In addition if the design conditions gas specific gravity secondary back pressure etc are different from the conditions for use the reading value is required to convert by a specific calculation formula However these inconvenient operation is no more required with the mass
18. ard L min standard ND No M O T oO ke O Oo Sic 5 a a 2 a lt n D 0 020 t0 0 500 0 002 0 08 to 2 00 0 01 0 020 to 0 500 0 002 0 08 to 2 00 0 01 Carbon dioxide 0 012 to 0 300 0 001 0 040 to 1 200 0 005 MPC0005 MPC0020 Control flowrate range Setting indication resolution L min standard L min standard L min standard L min standard 0 1 Carbon dioxide 0 06 to 3 00 0 3 to 16 0 0 1 7 4 Chapter 7 SPECIFICATIONS MPC0005 MPC0020 7Vdc max maximum output when flowrate exceeds range 0 5 FS The input impedance of the connected device must be at least 100kQ Total output accuracy Indication accuracy 0 5 FS 1 Loader communication 6 2 RS 485 communications 3 wire Display surface must be placed vertically inlet port lower side outlet port upper side Approx 300g Mounting bracket 81446917 001 wiring connector EN61326 1997 Amendment A1 1998 A2 2001 2 The temperature and pressure at calibration 3 Differential pressure required for obtaining full scale flowrate 4 Operation is possible even under the required differential pressure However the controllable flowrate range will become small For details refer to gt B Relationship between flowrate when valve is fully open and differential pressure next page B Applicable only to the model with analog input output function 6 A dedicated loader package sold separately i
19. ay flowrate display 4 5 Press DISP key 1 second or longer i Instantaneous JA Mi Press Tkey g A Reet Ji m flowrate a f tl Fain Ll Press DISP key or any key is not non pressed for 10 seconds or longer Setting flowrate T Setting flowrate bi 29 g Dn SP value Oh 280 Any key i font eid eae Press DISP key less than 1 second longer Operation mode display 1 2 Instantaneous Fy el Hi 1 flowrate BIN mie E L Lo i it o l gt Operation mode vy g g JE ee Integrated flowrate display 3 Integrated flowrate im mi 4p Press V key Yo Uol 3 seconds or longer Integrated flowrate g g 5 ees NIE j x Lights T y Press DISP key Valve drive output display Instantaneous f 7 n n fl mel r 4 lowrate mie mi Ou Valve drive output 7 5 ja imi ae J amp Press DISP key 1 The operation mode display is not displayed when the 0 no operation mode selection by key setting is selected at the operation mode selection lt Lie in function setup 2 If any key is not pressed while the operation mode is displayed the display is automatically returned to the instantaneous flowrate display after approx 10 seconds 3 When the ENT key is pressed for 3 seconds or longer while the integrated flowrate is displayed the integrated flowrate value is reset 4 The multi setting flowrate is displayed only when the multi setting 1 to 3 is sele
20. cific Gravity of Standard Compatible Gas air is taken as 1 0 Argon 1 38 Carbon dioxide 1 53 Revision History Date 04 02 CP SP 1153E Ist Edition WAMATAKE Specifications are subject to change without notice Yamatake Corporation Advanced Automation Company International Business Headquarters Totate International Building 2 12 19 Shibuya Shibuya ku Tokyo 150 8316 Japan URL http www yamatake com This has been printed on recycled paper 01 Printed in J apan 1st Edition Issued in Feb 2004 W
21. cted at flowrate setup ro gt number selection 1 4 in function setup For details on function setup method refer to gt Chapter 5 APPLICATION OPERATION 5 If no setup change is made while the multi setting flowrate is displayed the display will automatically return to the instantaneous flowrate display after approx 10 seconds Instantaneous flowrate display setting flowrate display When the power is turned ON the instantaneous flowrate value is indicated on the upper display and the setting flowrate value is indicated on the lower display The number of effective digits which are displayed differs according to the flowrate range The operating mode is also indicated on the upper display when the operating mode is changed For details refer to CF 4 3 Selecting the Operating Mode page 4 6 4 1 Chapter 4 BASIC OPERATION 4 2 6 Operating mode display instantaneous flowrate display When the DISP key is pressed for less than 1 second while the instantaneous flowrate is displayed the upper display maintains the instantaneous flowrate and the lower display indicates the operation mode The table below shows the display contents to each operation mode For the operating mode selection method refer to CF 4 3 Selecting the Operation Mode page 4 6 If any key not pressed while the operation mode is displayed the display will automatically return to the instantaneous flowrate display after app
22. e power supply of this controller is isolated from the power supply for external devices insulate the power supply If a common power supply is used for the controller and the external devices it might cause malfunction or faulty operation 3 1 Chapter 3 MOUNTING AND WIRING CAUTION For the model with analog I O function do not apply a negative voltage or large voltage more than 5V to the analog setting input terminal Doing so might cause malfunction or faulty operation This device is a precision instrument Do not drop it nor subject it to shock Doing so might damage the device Be sure to check that the wiring is correct before you turn the power ON Incorrect wiring might cause damage or malfunction Use Yamatake Corporation s SurgeNon if there is the risk of power surges caused by lightning Failure to do so might cause fire or faulty operation B Mounting 3 2 Avoid mounting this controller in the following locations Locations subject to high and low temperature and humidity Locations subject to sudden changes in temperature and condensation Locations subject to be filled with corrosive gases and flammable gases Locations whose atmospheres contain large amounts of dirt and dust salt conductive substances such as iron powder water droplets oil mist and organic solvents Locations directly subject to mechanical vibration or shock Locations subject to direct sunlight and rain Locations subject to sp
23. equired to set up return to the step 3 and repeat the procedure Otherwise proceed to the step 6 6 Press the DISP key gt gt The mode is returned to the instantaneous flowrate display o Handling Precautions 5 6 lt lf you do nothing for one minute after entering the parameter setup mode the display automatically returns to the regular instantaneous PV display lt lf you press the DISP key without pressing the ENT key after carrying out the operation in step 5 the setting remains at the previous value without being updated Chapter 5 APPLICATION OPERATION 6 Parameter setup item list No f Display 2 F 0 5 to 100 FS i a 10 1 F 0 5 to 100 FS 1 o 10 10 FS 0 5 to 100 KE 10 1 KE Flowrate deviation 2 FS 0 5 to 100 FS upper limit alarm 10 10 hysteresis Flowrate deviation 10 FS 0 5 to 100 FS lower limit alarm 10 10 Flowrate deviation 2 FS 0 5 to 100 FS lower limit alarm 10 10 hysteresis Flowrate deviation 10 0s alarm judgment delay time Event output 1 Even if the delay time is set it is delay time r disabled during selection of Event output 2 integration pulse output delay time User setup 1 000 conversion factor Event output 1 upper 0 FS 0 to 100 FS Unit L min standard lower limit 10 10 flowrate setup Event output 2 upper O FS Oto 100 FS lower limit 10 10 flowrate setup Analog optio
24. ethod refer to gt Chapter 5 APPLICATION OPERATION o Handling Precautions lt Do not apply a negative voltage or a large voltage exceeding 5V to the analog setting voltage input terminal Doing so might cause faulty operation or malfunction 4 5 Chapter 4 BASIC OPERATION 4 3 Selecting the Operating Mode When the DISP key is pressed for less than 1 second while the instantaneous flowrate is displayed same as the display at power supply ON the instantaneous flowrate indication on the upper display is not changed and the lower display shows the operating mode enabling the selection of operation mode Follow the procedure below to select the operation mode 1 Press the DISP key to display the operation mode 2 Press the A key or V key gt gt The display is changed as shown below Akey Fua Fully open mode 7 Control mode OFF Fully closed mode 3 Select the target operating mode gt gt Display blinks 4 Press the ENT key to fix the operating mode gt gt The operating mode is changed o Handling Precautions lt When 0 The operating mode selection by key operation is disabled is selected at the operation mode selection lt 42 in the function setup the operating mode is not displayed even if the DISP key is pressed lt When the DISP key is pressed during the operation in step 3 the operating mode indicated by blinking display the operating mode selection is
25. flow control B Functions Multi setup function Up to four preset flowrate settings can be instantaneously switched to by key operation or external switching input Gas type switching function The gas type to be used can be selected from the standard compatible gases by key operation Gas type setting function The user can set any gas type conversion factors to accommodate the gases other than standard compatible gases or mixed gases Valve forced open close function selecting the operation mode The valve can be forcibly fully opened or fully closed by key operation or external switching input Slow start function Sudden changes in the control flowrate when control is started or when the flowrate setting value is changed can be suppressed The control speed can be changed in eight stages within the range from about 1 to 6 seconds 1 1 Chapter 1 INTRODUCTION lt Flowrate integration function The fowrate can be integrated up to eight digits 99 999 999 count The display is switched in four digits at a time MPC9500 0 01L in unit MPC0002 0005 0 1L in unit MPC0020 1L in unit The count can be reset by key operation or external switching input Integration start stop reset can be remote controlled by external switching input After a reset by key operation the integration calculation is started automatically However if a reset contact ON is carried out by external switching input integration is resumed
26. for argon and carbon dioxide gases by setup change 1 4 Chapter 2 NAMES AND FUNCTIONS OF PARTS 6 Display Upper display Displays the instantaneous flowrate value 7 segment display When the display is switched it also displays the integrated flowrate value upper 4 digits B MPG parameter setup item function setup item or alarm details y EV ff i Lower display Displays the set flowrate gt 7 segment display Ji Nii Hi a l When the display is switched it also displays the operation mode SP H H B B integrated flowrate values lower 4 digits DISP key Used when switching l ne lt value drive output parameter setup values 1 key the details of do GC o Eo No No f function setup values O O O O O O O Operation lamp Wo L Indicates that the integrated flowrate is displayed lt Vv En KB Flashes when an integration event occurs OK Lights when the control flowrate is within the setting value allowable range lt V A keys Flashes when the operating mode is valve Used when incrementing decrementing fully open the digit or moving to a desired digit SP1 to SP3 The lamp corresponding to the SP No which is used at multi setup is lit EV1 EV2 Lights when the event output is ON ENT key Used when setting the SP value and storing the value It also can be used for the integrated flowrate resetting and alarm resetti
27. lashing of oil or chemicals Locations close to sources of electrical noise Locations where strong magnetic or electrical fields are generated Joint connection Chapter 3 MOUNTING AND WIRING e Connect the joint by holding the hexagonal section of the pipe connection port of the body with a spanner or wrench o Handling Precautions e Do not hold the case of the controller with your hand when screwing the joint into the connection port Doing so might deform the body e Screw the joint with an appropriate torque as recommended by the joint manufacturer Exceeding the torque limits will cause damage the connection port e Apply appropriate amount of sealant Do not coat the top most thread of the screw Remove any dirt or burrs from inside the joint Good example Bad example 3 3 Chapter 3 MOUNTING AND WIRING External dimensions unit mm 9 CC gt TD CC gt AD SS el Ge dal a Connector accessory Mounting bracket accessory 2 61 eZ Loader 1459 Connection or B 48 ee jack p Nk No 1 MPC HEBE B Raga U L OK SP1 SP2 SP3 EVI EV2 CaS 5 J ee x 48 44 8 AeSeeeeeee 2 Rc1 8
28. ly of this controller is isolated from the power supply for external devices insulate the power supply If a common power supply is used for the controller and the external devices it might cause malfunction or faulty operation For the model with analog I O function do not apply a negative voltage or large voltage more than 5V to the analog setting input terminal Doing so might cause malfunction or faulty operation This device is a precision instrument Do not drop it nor subject it to shock Doing so might damage the device Be sure to check that the wiring is correct before you turn the power ON Incorrect wiring might cause damage or malfunction Use Yamatake Corporation s SurgeNon if there is the risk of power surges caused by lightning Failure to do so might cause fire or faulty operation iii The Role of This Manual In all 3 manuals have been prepared for the MPC Series Read the manual according to your specific requirements The following lists all the manuals that accompany the MPC Series and gives a brief outline of the manual If you do not have the required manual contact Yamatake Corporation or your dealer Panel Mount Mass Flow Controller MPC Series Manual No CP UM 5317E This manual is supplied with the product Personnel in charge of design and or manufacture of a system using this device must thoroughly read this manual This manual describes the safety precau
29. nal 100 FS 10 to 100 FS The flowrate of analog input output scaling 10 10 100 5V is set Unit L min standard Integrated event 0 to 9999 flowrate lower 4 digits Integrated event 0 to 9999 flowrate upper 4 digits PV forced zero 0 0 to 999 9s function 4 On during judgment of flowrate OK DSS BAYS A sp j ON OK l OFF to arf arf EM 2 Operation during judgment of flowrate deviation upper and lower limit alarms BLS BH Hi KE KALOI ON ALM SP OFF leito k e 5 7 Chapter 5 APPLICATION OPERATION 3 4 5 6 7 18 9 10 This can be set only when other than 0 Not used is selected at the flowrate alarm setup type 5 in the function setup This can be set only when other than 0 Not used is selected at the event output type assignment i77 7 L 8 in the function setup and This can be set only when 0 User setting is selected at gas type selection lt amp in the function setup This can be set only when 8 Instantaneous PV upper limit event 9 Instantaneous PV lower limit event and 10 Instantaneous PV lower limit event 2 is selected for the 7 and amp amp event output type assignment in the function setup ue This can be set only when 1 Function enabled is selected for the 24 analog optional scaling function in the function setup This can be set only when 11 Integrated flowrate
30. ng Note e The definition of the terms used in this manual is as follows SP Set Point Set flowrate value PV Process Variable Instantaneous flowrate value control flowrate Operation mode 3 mode of valve fully closed valve control valve fully open Rear view Loader jack Connects to a personal computer by using a dedicated loader cable sold separately Pipe connection outlet port This is the out flow side port Connector Pipe connection inlet port This is the in flow side port 6849S bp 8 Ll QSee2ooeoaQ 2 1 Chapter 3 MOUNTING AND WIRING NWARNING Never allow gases that are within explosive limits to pass through this controller Doing so might result in explosion accidents Do not use this controller for gases other than standard compatible gas types nitrogen air argon and carbon dioxide CAUTION Prevent foreign matter from entering the controller If the rust water droplet oil mist or dust in the piping flows into the controller measurement error might occur and result in damaging the controller If there is a possibility that are any foreign matter flows into the controller provide a filter or mist trap capable of eliminating more than 0 14 m foreign matter at the upstream and periodically inspect and replace the filter Use this controller within the operating differential pressure range Also do not apply pressure outside the p
31. nger These icons graphically represent the actual prohibited action The example on the left notifies the user that disassembly is prohibited White circles with a diagonal bar notify the user that specific actions are Black filled in circles instruct the user to carry out a specific obligatory action to prevent possible danger These icons graphically represent the actual action to be carried out The example on the left instructs the user to remove the plug from the outlet WARNING Never allow gases that are within explosive limits to pass through this controller Doing so might result in explosion accidents Do not use this controller for gases other than standard compatible gas types nitrogen air argon and carbon dioxide OO Do not use this controller for medical instruments CAUTION Prevent foreign matter from entering the controller If the rust water droplet oil mist or dust in the piping flows into the controller measurement error might occur and result in damaging the controller If there is a possibility that are any foreign matter flows into the controller provide a filter or mist trap capable of eliminating more than 0 1u m foreign matter at the upstream and periodically inspect and replace the filter Use this controller within the operating differential pressure range Also do not apply pressure outside the pressure resistance range Doing so might dam
32. nput o o External switch input 1 o 0 External switch input 2 9 SIGNAL GND e Analog input output only for the model with analog I O function Oto5Vor ___ 7 Analog input 1 to 5V input 2 gt Analog output Oto5Vor 1 to 5V output _ 9 SIGNAL GND e RS 48 5 communication only for the model with RS 48 5 communication function DA _ _ 7 DA DB DB SG Q SIGNAL GND o Handling Precautions lt Be sure to turn the power supply source OFF before wiring connection Doing so might cause faulty operation lt Be sure to check that the wiring is correct before you turn the power ON Incorrect wiring might cause damage or malfunction lt Be sure that the event output does not exceed the specified output rating of this controller When driving a relay use the relay with a built in diode for coil surge absorption Doing so might cause faulty operation 3 7 Chapter 3 MOUNTING AND WIRING 6 Example of wiring Event output 1 Event output 2 Output common Analog setting voltage input DA Analog flowrate voltage output DB Analog input output common SG 3 8 24Vde Al DA lt AO DB 8 SIGNAL GND 9 Chapter 4 BASIC OPERATION 4 1 Switching Displays Each press of the DISP key switches the display as shown below The display shown below is an example Instantaneous Multi setting flowrate displ
33. or accuracy e Temperature reference does not e Match the temperature reference match the reference flowmeter Can be changed in the function setup 5 e Regulator is vibrating slightly e Change the regulator pressure setting e Foreign object attached to sensor e Request for repair service 6 2 Chapter 7 SPECIFICATIONS nT B Specifications Specifications are given on the next page 7 1 Chapter 7 SPECIFICATIONS Model No MPC9500 MPC0002 Valve type Proportional solenoid valve Standard full scale flowrate 0 500 L min standard 2 00 L min standard nitrogen conversionvalue 1 Standard compatible gas types Nitrogen air argon carbon dioxide CO3 Note The gas must be a dry gas not containing corrosive components chlorine sulfur acid The gas must also be a clean gas not containing dust or oil mist Control Control range 1 4 to 100 FS gt 1 2 FS max at standard temperature and differential pressure 1 Pressure influence 0 4 FSmax per 0 1MPa 0 7 FSmax Q flowrate 2 FSmax 1 2 FSmax Pressure Standard differential pressure 2 0 2MPa 290PSI Inlet pressure 0 2MPa 290PSI gauge outlet pressure 0 0MPa OPSI gauge Required differential pressure 3 0 05MPa 72 5PSI Operating differential pressure 0 3MPa 435PSI max range 4 0 SMPa 725PS gauge Tempera Standard operating temperature 2 25 C 77 F ture Allowable operating temperature 10 to 50 C 14 to 122 F
34. ous flowrate direct setup function switching PV filter Analog optional scaling function PV forced zero function Station address setting Transmission speed selection Communications conditions selection ONO 0 Oto 0 1MPa 0 05 to 0 15MPa 0 15 to 0 25MPa 0 25 to 0 35MPa 0 35 to 0 45MPa 0 45 to 0 5MPa Function disabled Function enabled Without filter Sampling 2 times moving average Sampling 4 times moving average Sampling 8 times moving average Function disabled Function enabled Function disabled Function enabled Communications function disabled 1 to 127 Station address 0 38 400bps 19200bps 96 OObps 48 00bps 2400bps 8 data bits even parity 1 stop bit 8 data bits no parity 2 stop bits Chapter 5 APPLICATION OPERATION The accuracy drift caused by the influence of pressure can be compensated by adjusting the inlet pressure setting to the actual inlet pressure Can be controlled by instantaneous SP being change blinking If the PV filter is used in a 2 or 3 setting the operation differential pressure must be lower than the standard differential pressure Do not change the setting under the control The flowrate at analog input output 100 5V can be optionally set The flowrate is set in parameter setup mode See amp page 5 7 for details When the setting flowrate is zero or when the valve fully clo
35. owrate integrated event flowrate and event output delay time are set in the parameter setup mode See 5 2 Parameter setup page 5 7 for the details Note the delay time cannot be set to integration pulse output 9 Events are outputted even in fully closed operation mode 10 Events are not outputted in fully closed operation mode 1 to 11 Always OFF during power supply OFF 5 3 Chapter 5 APPLICATION OPERATION Display Item Item Description Setup Item and Factory Remarks Description Setting External switch input 1 function assignment External switch input 2 function assignment Valve automatic shut off when the integration event occurred Resetting the integrated value at start of control Flowrate alarm setup type Operation selection at alarm occurrence Not used Reset integration Stop integration count operation Switching of SP No Switching of flowrate setup method Valve fully closed Valve fully open Switching of slow start operation Switching of operating mode Contact ON control mode Contact OFF fully closed Function disabled Function enabled Function disabled Function enabled Not used Only upper limit alarm used Only lower limit alarm used Upper lower limit alarm used Control continued alarm ignored Move to fully closed 3 To select an SP No of 3 or more setting assign 3 both the ii and The
36. ressure resistance range Doing so might damage this controller This controller is not provided with the capability of completely closing the valve If the valve must be completely closed provide a shutoff valve separately When an external valve is closed must make the valve standby by fully closing with either of the following methods e Make the flowrate to zero e Set the operation mode to the fully closed mode If this valve is maintained in control mode despite of closing the external shutoff valve zero flowrate large excess flowrate will instantly flow when the external shutoff valve is opened In the case of the MPC0020 the external shutoff valve is closed for more than 5 minutes under control mode or valve forced fully open the valve over heat limit Fi 7 operated and the valve driving current is forcibly limited If this status exists for more than 30 minutes the valve is forced to full close condition When this controller is mounted on a panel use piping which does not give stress to the controller case during and after the piping work If a metal piping is directly connected to the pipe connection port of this controller the case might be deformed or damaged Do not allow lead clippings chips or water to enter this controller case Failure to do so might cause malfunction or faulty operation The part between the power supply circuit of this controller and the I O circuit is not isolated Therefore ensure that th
37. rox 10 seconds Operation mode Lower display Fully closed mode Control mode EN Fully open mode Fut 6 Integrated flowrate display When the DISP key is pressed while the operation mode is displayed the L lamp lights and the integrated flowrate value is indicated on the upper display and lower display For instance if the integrated flowrate is 1 234 567 8L the 1234 is indicated on the upper display and the 567 8 is indicated on the lower display Integrated flowrate reset operation Keep the ENT key pressed for 3 seconds or longer while the integrated flowrate is displayed 6 Valve drive output display instantaneous flowrate display When the V key is pressed for 3 seconds or longer while the integrated flowrate is displayed the valve drive output value indication range 0 0 to 100 0 is indicated on the lower display The instantaneous flowrate is indicated on the upper display In order to distinguish from other indication the decimal point indication blinks while the valve drive output is displayed 6 Multi setting flowrate display only when the multi setting is enabled When the DISP key is pressed for one second or longer while the instantaneous flowrate display the setting flowrate number SP No currently being selected is indicated on the upper display and the setting flowrate value SP value is indicated on the lower display If any key is not pressed for 10 seconds or longer while the
38. s free from inaccuracies and omissions If you should find any inaccuracies or omissions please contact Yamatake Corporation In no event is Yamatake Corporation liable to anyone for any indirect special or consequential damages as a result of using this product 2004 Yamatake Corporation ALL RIGHTS RESERVED The pF logo is a trademark of Yamatake Corporation Micro Flow Sensor and MPC are trademarks of Yamatake Corporation PY SAFETY PRECAUTIONS W E About Icons Safety precautions are for ensuring safe and correct use of this product and for preventing injury to the operator and other people or damage to property You must observe these safety precautions The safety precautions described in this manual are indicated by various icons As the following describes the icons and their meanings be sure to read and understand the descriptions before reading this manual WA R N N G Warnings are indicated when mishandling this product might result in death or serious injury to the user A CA U TI O N Cautions are indicated when mishandling this product might result in minor injury to the user or only physical damage to this product E Examples wrongful operation or misuse of this product These icons graphically represent the actual danger The example on the left warns the user of the danger of electric shock Triangles warn the user of a possible danger that may be caused by prohibited to prevent possible da
39. s chapter describes the basic operations for using this device APPLICATION OPERATION This chapter describes how to set the functions and parameters on this device TROUBLESHOOTING This chapter describes how to investigate and remedy trouble that may occur during operation of this device SPECIFICATIONS This chapter describes the specifications and external dimensions of this device Contents SAFETY PRECAUTIONS The Role of This Manual Organization of This User s Manual Conventions Used in This Manual Chapter 1 INTRODUCTION E Introduction ers tereseta ei vases Wade dk 1 1 MB FUNCUONSG 6668s aa aan NA aa ATER AA el E a BE AA ARA A BN TEE BNN a Ka aa A NRG aa 1 1 B Model selection quide s enen enen en eneen enen enen 1 4 Chapter 2 NAMES AND FUNCTIONS OF PARTS Chapter 3 MOUNTING AND WIRING E _ Mounting ar ie eer sneren vern deken Moa eeen ee en a 3 2 BOWING iis roteert eeb ede a 3 6 Chapter 4 BASIC OPERATION 4 1 Switching Displays eee enen en eneen en enen enen eneen en 4 1 4 2 Setting the Flowrate os onen enen eneen eenen enen enen eneen 4 3 B Procedure for changing flowrate in digital setting 4 3 B Procedure for changing flowrate in analog seiting 4 5 a model with analog input output function 4 3 Selecting the Operating Mode 6 00 eee c cece cece ene e eneen 4 6 Chapter 5 APPLI
40. s or longer after performing the operation while the multi setting flowrate is displayed on the previous page the display is automatically returned to the instantaneous flowrate display Chapter 4 BASIC OPERATION B Procedure for changing flowrate in analog setting a model with analog input output function To change the SP value setting flowrate value using an external setting voltage 1 Analog setting is selected at the flowrate setup method selection 3 in the function setup For the function setup method refer to gt Chapter 5 APPLICATION OPERATION The setting voltage range can be selected at the analog input voltage range selection 45 in the function setup The analog setting voltage value to the SP value can be calculated from the calculation formulas in the following table Voltage range How to calculate setting voltage 0 Oto 5V Setting voltage V Setting flowrate Full scale flowrate X 5 00 3 1 to 5V Setting voltage V Setting flowrate Full scale flowrate X 4 00 1 00 Note e When the 1 Function enabled is selected at the analog optional scaling function 2 in the function setup the full scale flowrate at analog setting can be optionally changed In this case the full scale flowrate of analog flowrate output voltage PV output voltage is also changed as same as input voltage The scaling flowrate is set in the parameter setup mode For the function setup and parameter setup m
41. s required 7 Applicable only to the model with RS 485 communications function 7 5 Chapter 7 SPECIFICATIONS B Relationship between flowrate when valve is fully open and differential pressure 7 6 in air MPC9500 MPC0002 0005 MPC0020 _ 40 _100 _160 A A A 4 at 530 a 120 i eo 5 20 5 80 3 5 40 3 gio 5 20 g 40 a a A 0 0 OL 0 01 02 03 04 05 06 0 1 2 3 4 5 6 0 4 8 12 16 20 24 Flowrate L min standard Flowrate L min standard Flowrate L min standard MPC9500 MPC0002 0005 MPC0020 _ 58 _ 14 5 _ 23 2 S 5 4 35 p 17 4 pe 8 a 8 29 2116 T w 58 T i i 5 8 5145 5 29 G a G a 0 0 0 Let 0 01 02 03 04 05 06 0 1 2 3 4 5 6 0 4 8 12 16 20 24 Flowrate L min standard Flowrate L min standard Flowrate L min standard Calculate the differential pressure from the following formula when a gas other than air is used Differential pressure differential pressure in air X specific gravity of gas to be controlled Example The differential pressure when argon flows at 10L min standard on MPC0020 is 35kPa X 1 38 48kPa 5 075PSI X 1 38 7 004PSI Spe
42. s the ENT key to fix the SP value and switch the display This function is useful when changing the SP value frequently or little by little The factory setting is set to Direct setup function is enabled For the function setup method refer to gt Chapter 5 APPLICATION OPERATION As shown in the following table up to 4 SP values can be switched according to the ON OFF state of the external switch inputs when the 3 Switching of SP No is assigned at the external switch input function assignments lt and in the function setup If the number of SPs is two set either one of or to 3 Switching of SP No However in this case the SP No cannot be updated using the A key or V key Only the SP value can be updated External switch input state Input 1 DIT Input 2 Dia SP t0 be selected ORF or SP ON JO PE OFF ON Pe ON C o Handling Precautions f the DISP key is pressed during the operation on the previous page 4 4 while the set point is blinking the SP No and SP value cannot be stored and are returned to the previous value When 1 Analog setting is selected at the flowrate setup method selection 3 in the function setup and the operation is carried out using the SP value according to the analog setting voltage the operation to change the SP value and SP No using the A key or V key cannot be accepted If any key is not pressed for 10 second
43. sed mode is entered the PV is forcibly made to zero after delay time The shifting of PV by influence of pressure can be cancelled The delay time is set in the parameter setup mode 1 When 4 Switching of flowrate setup method is selected at the external switch input function assignment 071 JN Mf or the switching by external switch input takes precedence 2 These items can be set only on the models with analog input output function 3 These items can be set only on the models with RS 485 communication function 5 5 Chapter 5 APPLICATION OPERATION 5 2 Parameter Setup 6 Setup method Follow the procedure below to set the parameters such as flowrate deviation alarm upper and lower limit flowrate and event output delay time 1 Press the DISP key to display the integrated flowrate gt gt L lamp lights 2 Keep the lt key pressed for 3 seconds gt gt S12 is indicated on the upper display Parameter setup mode is entered 3 Press the A key or V key to select the target setup item and press the ENT key gt gt The setting value currently being indicated on the lower display blinks 4 Press the A key or V key to select the target setting value You can move to the digit to be changed by pressing the lt key 5 When the target setting value is displayed press the ENT key to fix the setting value gt gt The setting value is stored If other items are r
44. t prevention During the control or fully open mode When the gas is continuously limit is operated the gas is forcibly shut off by external shut off by external device set device for more than 5 minutes the set flowrate to zero or valve fully closed mode Sensor error Sensor trouble foreign object attached If sensor is not restored after to sensor or entering of hydrogen or turning the power OFF then helium gas request for repair service EZ I O correction data error Data corrupted due to electrical noise Request for repair service EEN Sensor calibration data error Data corrupted due to electrical noise Request for repair service Aa User setup data error Power shutoff during writing of data Set data again o Handling Precautions e The alarm code is displayed only when the instantaneous flowrate operating mode and integrated flowrate are displayed e ALi Valve overheat prevention limit is operated only for the MPC0020 In this case in spite of the selection at amp in the function setup the valve drive current is forcibly limited If this state is continued for 30 minutes or longer the valve is fully closed If ALE sensor error occurs the flowrate value will become indefinite Therefore the control flowrate becomes indefinite even if 0 Control continued alarm ignored is selected at isin the function setup lt When 1 Move to fully closed or 2 Move to fully open is selected at 1 4 in
45. the function setup the alarm display and the operating mode at alarm occurrence can be maintained even after the cause of alarm is removed When canceling the alarm make the alarm reset operation Canceling the alarm Keep the ENT key pressed while the instantaneous flowrate is displayed The alarm can be cancelled after 3 seconds 6 1 Chapter 6 TROUBLESHOOTING B Other troubles Error Cause Countermeasure Flowrate display does not become lt Zero point shift due to the e Match the inlet pressure setting zero even in spite of an actual zero influence of pressure function setup 5 with the flowrate actual inlet pressure used or use Display does not become OFF the PV forced zero function even if the valve is fully closed function setup 2 e Gas type setup is incorrect e Match the gas type setting function setup 5 with the actual gas used e Condensation on sensor e Insert a mist trap upstream e Foreign object attached to sensor e Request for repair service Flowrate does not stabilize lt Operation differential pressure e Reduce the inlet pressure range is exceeded e Large inlet pressure fluctuations e Install a regulator upstream e Regulator interference e Change the regulator pressure setting or apply the PV filter function setup 3 Large pressure loss between regulator Increase the pipe diameter and this device Large fluctuation in inlet pressure according to flowrate Po
46. ti SP setting mode number of SPs 2 to 4 according to function setup 2 Up to four SP values setting flowrate values can be switched by key operation and by external switch inputs Follow the procedure below to change the SP No and SP value 1 Press the DISP key gt gt The instantaneous flowrate value and SP value are displayed Same as the display at power supply ON 2 Keep the DISP key pressed for 1 second or longer gt gt The SP No currently being selected setting flowrate No SP 0 to SP 3 is indicated on the upper display and the SP value is indicated on the lower display 3 Press the A key or V key to change the SP No 4 When the target value is displayed press the ENT key 5 Press the A key or V key to change the SP value gt gt The digit being changed blinks You can move to the digit to be changed by pressing the lt key 6 When the target value is displayed press the ENT key gt gt The SP value is fixed At this point the SP value and SP No are updated 4 3 Chapter 4 BASIC OPERATION Note Direct setup function e The control can be executed using the SP value currently being changed indicated by blinking display when the Direct setup function is enabled is selected at direct setup function switching lt lt in the function setup The ENT key needs not to be pressed to fix the SP value However to switch the display by pressing the DISP key pres
47. tions installation wiring and primary specifications For further information about operation refer to other manuals Installation Panel Mount Mass Flow Controller MPC Series Installation Manual No CP SP 1153E This manual This manual is optional sold separately Personnel in charge of design manufacture operation and or maintenance of a system using this device must thoroughly read this manual This manual describes the installation wiring major functions and settings operating procedures troubleshooting and detailed specifications Panel Mount Mass Flow Controller MPC Series Communications Functions Manual No CP SP 1154E Those using the communications functions of the MPC series should read this manual This manual describes an outline of communications wiring communications procedures a list of MPC series communications data how to remedy trouble and communications specifications Organization of This User s Manual This manual is organized as follows Chapter 1 Chapter 2 Chapter 3 Chapter 4 Chapter 5 Chapter 6 Chapter 7 INTRODUCTION This chapter briefly describes this device its features and the model selection guide NAMES AND FUNCTIONS OF PARTS This chapter describes the Names and functions of parts on this device MOUNTING AND WIRING This chapter describes installation mounting wiring and initial settings on this device BASIC OPERATION Thi
48. vent output 1 type assignment Event output 2 type assignment Unlocked sere other than flowrate setting are locked All settings locked Operating mode selection by key operation is disabled Operating mode selection by key operation is enabled Digital setup set by key operation or RS 48 5 communications Analog setup set by external analog voltage input Number of SPs 1 2 5 only Number of SPs 2 SF o ape Number of SPs 3 GP o to 5 zo Number of SPs 4 Gi tof GE 3 0 to 5V input 1 to 5V input Oto 5V output 1 to 5V output Not used OFF at all times ON when alarm occurred Integration pulse output On when PV is in flowrate OK judgement range ON in control mode ON in fully open mode ON in control mode or fully open mode ON in fully closed mode Instantaneous PV upper limit event Instantaneous PV lower limit event 1 10 Instantaneous PV lower limit event 2 11 Integrated flowrate event 1 to 11 Reverse output of 1to11 At no events ON At event occurred OFF The key lock can be canceled even while it is enabled iat is indicated on the display during the key locked setting The selection of whether operating mode selection by key operation fully closed control fully open is enabled or disabled is available See 4 3 Selecting the Operating Mode page 4 6 Flowrate OK judgment range upper lower limit event fl
49. wer OFF e OK lamp lighting output The OK lamp can be made to light when the control flowrate is within the setting value allowable range This function is very handy for verifying at a glance whether or not the new setting value is being followed properly when a setting value is changed OK lamp output can also be used as an interlock signal for subsequent processes by assigning it to event output and loading it to a sequence program 1 2 Chapter 1 INTRODUCTION e Automatic shut off function The valve can be shut off automatically under the following conditions However the valve of this device does not have a capability of complete shut off When the complete shut off is required provide a separate shut off valve externally 1 When the integration count value reaches the setting value 2 When one of the alarms including flowrate alarms occurs lt Automatic reset of integration count at start of control function Start of control and integration count reset can be carried out simultaneously by a single action key operation or external switching input Combining this function with the automatic shut off function described above is handy for shutting the valve off when a fixed number of integration values have been counted repeatedly lt Direct setup function This function allows users to easily change the flowrate setup This function is useful when you frequently change setting values for example when you
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