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TV 551/701 Navigator - Agilent Technologies

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1. Figure 11 TV 551 Navigator outline 244 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 Figure 12 TV 701 Navigator outline TV 551 701 Navigator User Manual 87 900 934 01 M 245 300 17 Technical Information Figure 13 TV 551 701 Navigator with ISO F flange outlines 246 300 TV 551 701 Navigator User Manual 87 900 934 01 M 17 Technical Information Pumping speed l s TV 551 TV 701 800 Pumping speed l s Throughput mbar l s Inlet pressure mbar Figure 14 Graph of nitrogen pumping speed vs inlet pressure with inlet screen 10 NJ Nitr
2. 200 2 50 Duty Cycle Figure 20 SOFT START this input is used to provide a soft start to the pump in this condition the ramp up time could be up to 150 min Programmable analog signal this output signal is a voltage from 0 to 10 Vdc proportional to a reference quantity frequency or power set by the user The default setting is the frequency see the following example diagram 0 Output V 714 Frequency Hz Figure 21 TV 551 701 Navigator User Manual 87 900 934 01 M 251 300 17 Technical Information 0 Output V Power W Figure 22 Fault this open collector output signal is ON when a system fault condition is detected Programmable set point this open collector output signal is enabled when the reference quantity chosen frequency current or time is higher than the set threshold The signal can be high level active that is the output is normally at O Vdc and becomes 24 Vdc when activated or low level active that is the output is normally at 24 Vdc and becomes 0 Vde when activated Moreover if the reference quantity is the frequency or the current drawn it is possible to set the hysteresis in of the threshold value to avoid bouncing For example reference quantity frequency threshold 500 Hz a hysteresis 1 activation type high level 252 300 TV 551 701 Navigator User Man
3. Posta 2 W obecnosci p l elektromagnetycznych pompa musi by odpowiednio zabezpieczona przez odpowiednie ekranowanie W celu szczeg lowego zapoznania sie z tematem patrz dodatek Technical Information TV 551 701 Navigator musi by podtaczony do gl wnej pompy patrz schemat w dodatku Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M Podrecznik Instrukcji 12 Mocowanie pompy ZAGROZENIE W przypadku uszkodzenia wirnika ztacze miedzy pompa i systemem moze by narazone na bardzo wysoki moment Jezeli ztacze jest niewystarczajace by wytrzyma wspomiany moment pompa moze sie odczepi od systemu lub silnik mo e odczepic sie od obudowy pompy W takim przypadku fragmenty metalu moga by wyrzucone przez pompe lub przez system i moga one spowodowa powa ne uszkodzenia lub mier os b jak i uszkodzi aparatur znajduj c si w pobli u systemu Zamocowa system TV 551 701 Navigator w pozycji stabilnej montuj c ko nierz wej cia turbopompy do ko nierza systemu dokr caj c w taki spos b aby po czenie to wytrzyma o moment 8600 Nm wok w asnej osi Na przyk ad ko nierz ISO K mo e by zamocowany stalowymi zaciskami o odpowiedniej wytrzyma o ci typ modelu Agilent IC63250DCMZ W niniejszej tabeli przedstawione zosta y dla ka dego ko nierza ilo potrzebnych zacisk w IC63250DCMZ i moment dokr cenia ich Tab 1 KO NIERZ Nr MOMENT DOKR
4. Fix the TV 551 701 Navigator in a stable position mounting the inlet flange of the turbopump to the system counter flange with a connection capable of withstanding a torque of 8600 Nm around its axis For example the ISO K flange can be fixed using high strength steel clamps like Agilent model IC63250DCM2 The following table shows for each flange the necessary number of IC63250DCMZ clamps and the relevant fixing torque Tab 1 FLANGE N FIXING TORQUE ISO 160 10 35 Nm ISO 200 8 35 Nm The following table shows for each ISO F flange the necessary number of screws and the relevant fixing torque Tab 2 FLANGE N FIXING TORQUE ISO 160 F 8 5 Nm ISO 200 F 12 5 Nm The class of the steel screws for F flange must be gt 8 8 The turbopump with ConFlat inlet flange must be fixed to the vacuum chamber by means of the appropriate Agilent hardware See the appendix Technical Information for a detailed description The TV 551 701 Navigator can be installed in any position TV 551 701 Navigator User Manual 87 900 934 01 M 221 300 16 Instructions for Use Pump Fixing NOTE The TV 551 701 Navigator cannot be fixed by means of its base MP The TV 551 701 Navigator belongs to the second installation or overvoltage category as per directive EN 61010 1 Connect the device to a mains line that satisfy the above category The TV 551 701 Navigator has Input Qutput and serial communication connectors that must be conne
5. De groene LED LD1 op het paneel van de basis van de TV 551 701 geeft door de freguentie van zijn knipperen de werkcondities van het systeem aan brandt onafgebroken de pomp draait normaal a knippert langzaam periode van circa 400 ms het systeem is in de status oploop of remmen of stop of waiting for interlock knippert snel periode van circa 200 ms fouttoestand Afzetten van de TV 551 701 Navigator Hiervoor behoeft slechts de stroomvoorziening te worden onderbroken De ingebouwde controller stopt onmiddellijk de pomp TV 551 701 Navigator User Manual 87 900 934 01 M 95 300 6 Bedrijfshandleiding Voor de veiligheid van de bediener dient de controller Turbo V gevoed te worden met een driedradige voedingskabel zie de tabel met de bestanddelen die u kunt bestellen voorzien van een stekker met internationale goedkeuring Gebruik de kabel en de stekker samen met een goedgeaard stopcontact om elektrische schokken te voorkomen en om te voldoen aan de vereisten van de EG normen De in de controller ontwikkelde hoge voltage kan ernstige letsels of de dood veroorzaken Maak de voedingskabel los alvorens onderhoudswerkzaamheden in het systeem uit te voeren Noodstop Om de TV 551 701 Navigator in noodomstandigheden te stoppen moet de stroomtoevoerkabel van de controller losgemaakt worden 96 300 TV 551 701 Navigator User Manual 87 900 934 01 M Bedrijfshandleiding 6 Ond
6. Die gr ne LED LD1 an der Bodenplatte von Modell TV 551 701 gibt mit der H ufigkeit ihres Blinkens die Betriebsbedingungen des System an a Daueranzeige Die Pumpe befindet sich im normalen Betrieb a Langsame Blinkanzeige ca 400 ms das System befindet sich entweder im Status Rampe Abbremsung Stopp oder Waiting for Interlock Schnelle Blinkanzeige ca 200 ms Fehlerstatus Stoppen von Modell TV 551 701 Navigator Zum Stoppen von Modell TV 551 701 Navigator ist die Versorgungsspannung abzuschalten Der eingebaute Controller sorgt f r den sofortigen Pumpenstopp TV 551 701 Navigator User Manual 87 900 934 01 M 39 300 2 Gehrauchsanleitung WARNUNG F r die Sicherheit des Bedieners muss der Controller Turbo V mit einem dreidr htigen Stromkabel siehe Tabelle der Bestellteile versorgt werden das mit einem auf internationaler Ebene genehmigten Stecker ausgestattet ist Verwenden Sie dieses Kabel und den Stecker zusammen mit einer entsprechend geerdeten Steckdose um Stromschl ge zu vermeiden und den Anforderungen der EG Richtlinien zu entsprechen Die Hochspannungen die sich im Controller entwickeln k nnen zu schweren Sch den oder zum Tod f hren Vor den Wartungsarbeiten innerhalb der Einheit die Stromkabel trennen Not Aus Zur Stillsetzung von Mod TV 551 701 Navigator in Notsituationen ist vom Controller das Netzkabel abzuziehen 40 300 TV 551 701 Navigator User Manual 87 900 9
7. Modell TV 551 701 Navigator kann nicht mittels seines Sockels befestigt werden Wig Der TV 551 701 Navigator geh rt zur zweiten Installationsklasse berdruck die von den Normen EN 61010 1 vorgesehen ist Die Vorrichtung mu daher an eine Speisungsleitung angeschlossen werden die dieser Kategorie entspricht Der TV 551 701 Navigator hat Verbinder f r den Ein und Ausgang und die Schnittstellenkommunikation die an die Au enkreise an geschlossen werden m ssen soda kein Teil unter Spannung zug nglich ist Sicherstellen da die Isolierung der an den TV 551 701 Navigator an geschlossenen Vorrichtung auch bei einer Einzelst rung ausreichend isoliert wie es von der Richtlinie EN 61010 1 vorgesehen wird TV 551 701 Navigator User Manual 87 900 934 01 M 37 300 2 Gehrauchsanleitung Gebrauch In diesem Abschnitt werden die wichtigsten Betriebsvorg nge erl utert Vor Benutzung des Systems sind alle elektrischen und pneumatischen Anschl sse auszuf hren W hrend der eventuellen Aufheizung der Vakuumkammer darf die Temperatur am Eingangsflansch 120 C nicht berschreiten Die Pumpe darf nicht in Betrieb genommen werden wenn der Eingangsflansch nicht an die Vakuumkammer angeschlossen oder nicht mit dem Verschlussflansch verschlossen ist W hrend des Aufheizens d rfen weder die Pumpe noch eventuelle hei e Zubeh rteile ber hrt werden Es besteht Verbrennungsgefahr VORSICHT W hrend des Betriebs sind S
8. v n v v vy TV 551 701 Navigator 192 Vypnut v v vy TV 551 701 Navigator 192 Nouzov zastaven 193 dr ba 194 Likvidace 194 P eklad origin ln ho n vodu E Agilent Technologies 183 300 13 Navod k Pou iti Bezpe nostni navod pro Turbomolekul rni vyv vy Turbomolekularni vyv vy jak jsou popisovany v nasledujicim navodu obsahuji velk mno stvi kinetick energie diky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefunk nosti nap kontaktu rotoru anebo statoru nebo p i zhroucen rotoru m e doj t k uvoln n rota n energie A 174434180 Pokyny k instalaci uveden v tomto n vodu musi b t p sn dodr ov ny za elem prevence po kozen za zen a zran n obsluhy 184 300 TV 551 701 Navigator User Manual 87 900 934 01 M N vod k Pou iti 13 V eobecne informace Toto zar zen je ur eno pro odborniky U ivatel by si m l pred pou it m zarizeni precist tento n vod a v echny dal informace dodan firmou Agilent Firma Agilent neodpov d za jak koli nehody kter vzniknou n sledkem i ste n ho nedodr en t chto pokyn nespr vn m pou v n m neznal mi osobami neopravn nym z sahem do za zen nebo jakoukoli innost kter je v rozporu s pokyny uveden mi v pr slu n ch st tn ch norm ch V v va TV 551 701 Navigator je integrovan syst m s turbomolekul rn vyv
9. pompy w obecno ci gaz w wybuchowych TV 551 701 Navigator User Manual 87 900 934 01 M 177 300 12 Podrecznik Instrukcji Wlaczenie i Uzytkowanie systemu TV 551 701 Navigator Aby wtaczy TV 551 701 Navigator wystarczy dostarczy napiecie zasilania Wbudowany sterownik rozpoznaje automatycznie obecno sygnal w interlock u i uruchomienia i uruchamia pompe Tryb Soft Start przewidziano w celu wtaczenia pompy po dluzszym okresie postoju Aby mozliwe bylo uruchomienie przy aktywnym Soft Start nalezy wtaczy w w tryb poprzez oprogramowanie patrz paragraf RS 232 485 COMMUNICATION DESCRIPTION w dodatku Technical Information Zielona dioda led znajdujaca sie na panelu podstawy TV 551 701 Navigator wskazuje z czestotliwoscia wlasnego migania stan operacyjny systemu a zaSwiecona na sta e pompa znajduje si w normalnych obrotach miga powoli okres 400 ms system w stanie zbocza lub hamowania lub w stanie Stop lub w stanie Waiting for interlock a miga szybko okres 200 ms stan b du Zatrzymanie systemu TV 551 701 Navigator Aby zatrzyma TV 551 701 Navigator wystarczy od czy napi cie zasilania Wbudowany sterownik zatrzyma natychmiast pomp 178 300 TV 551 701 Navigator User Manual 87 900 934 01 M Podrecznik Instrukcji 12 ZAGROZENIE Dla zagwarantowania bezpieczenstwa operatorowi kontroler Turbo V powinien by zasilany kablem zasilajacym o 3
10. za nete prev dza dr b rske pr ce v tejto jednotke odpojte nap jaciu n ru N dzov zastavenie Ak chcete zariadenie TV 551 701 Navigator okam ite vypn v stave n dze mus te vytiahnu k bel nap jania zo z suvky zdroja nap jania TV 551 701 Navigator User Manual 87 900 934 01 M 205 300 14 Navod na Obsluhu Udrzba Zariadenie TV 551 701 Navigator nevy aduje Ziadnu udr bu Akekol vek pravy a opravy syst mu musi vykonat autorizovany person l NEBEZPE Sk r ne za nete oko vek robi v syst me odpojte ho od zdroja nap jania vyvetrajte v vevu tak e otvor te pr slu n ventil po kajte k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia vyh adajte servisn stredisko spolo nosti Agilent kde v m pokazen v vevu vymenia za n hradn repasovan Sk r ne syst m odo lete na opravu alebo v menu mus te vyplni dotazn k Zdravie a bezpe nos Dotazn k pripojen k n vodu na pou itie je potrebn vyplni a odosla miestnemu predajcovi K piu dotazn ka vlo te do bal ka so syst mom a odo lite spolu s n m 206 300 Ak je potrebn likvid cia v vevy mus prebehn v s lade so pecifick mi predpismi danej krajiny TV 551 701 Navigator User Manual 87 900 934 01 M N vod na Obsluhu 14 Likvid cia Vyznam loga WEEE nach dzajuceho sa na Stitkoch Ap
11. 1 SPARE o 40 0 WIN o u Note that the vent valve can also be controlled by means of the serial connection 258 300 A serial communication kit with a serial cable and the T Plus software is available optional TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 RS 232 RS 485 Communication Description Both the RS 232 and the RS 485 interfaces are available on the connector P2 The communication protocol is the same see the structure below but only the RS 485 manages the address field Therefore to enable the RS 485 is necessary to select the type of communication as well as the device address by means of the Navigator software Communication Format 8 data bit a no parity a 1 stop bit baud rate 600 1200 2400 4800 9600 programmable Communication Protocol The communication protocol is a MASTER SLAVE type where Host MASTER Controller SLAVE The communication is performed in the following way 1 the host MASTER send a MESSAGE CRC to the controller SLAVE 2 the controller answer with an ANSWER CRC to the host The MESSAGE is a string with the following format lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt where TV 551 701 Navigator User Manual 87 900 934 01 M 259 300 17 Technical Information When a data is indicated between two quotes it means that the indicat
12. CENIA ISO 160 10 35 Nm ISO 200 8 35 Nm W niniejszej tabeli przedstawione zosta y dla ka dego ko nierza ISO F ilo potrzebnych rub i moment dokr cenia ich Tab 2 a A E gt NE ne ISO 160 F 8 5 Nm 5 Nm Dla kotnierzy F ruby stalowe musza posiada klase gt 8 8 TV 551 701 Navigator User Manual 87 900 934 01 M 175 300 12 Podrecznik Instrukcji Turbopompa z kolnierzem wej ciowym ConFlat musi by zamocowana do komory pro niowej poprzez odpowiednie drobne uklady mechaniczne firmy Agilent W celu dodatkowych informacji nalezy zapozna sie z dodatkiem Technical Information TV 551 701 Navigator mo e by zainstalowany w jakiejkolwiek pozycji System TV 551 701 Navigator nie mo e by mocowany poprzez wtasna podstawe 176 300 TV 551 701 Navigator nale y do drugiej kategorii instalacji lub nadnapiecia przewidzianej przez norme EN 61010 1 Dlatego te podtaczy urzadzenie do linii zasilania ktora spetni te wymogi TV 551 701 Navigator posiada konektory wej ciowe wyj ciowe i dla komunikacji szeregowej kt re musza by podtaczone do obwod w zewnetrznych w sposob aby Zadna cze znajdujaca sie pod napieciem nie mogta by dostepna Nalezy upewni sie e izolacja podtaczonego urzadzenia do TV 551 701Navigator posiada odpowiednie odizolowanie nawet w stanie pojedynczej usterki zgodnie z wymaganiami normy EN 61010 1 Aby zainstalowa opcjonalne akcesoria nale y zapozna sie z Te
13. TV 551 701 Navigator User Manual 87 900 934 01 M 189 300 13 N vod k Pou it Mont ry ran V v vu TV 551 701 Navigator nelze p ipevnit pomoci jeji podstavy Podle sm rnice EN 61010 1 pat vyv va TV 551 701 Navigator do druh elektroinstala n nebo p ep ov t dy Za zen p ipojte do nap jec s t ktera spl uje uvedenou t du V v va TV 551 701 Navigator je vybavena vstupn mi a v stupn mi konektory a konektory pro s riovou komunikaci kter se mus p ipojit k extern m obvod m tak aby dn elektrick sou st nebyla p stupn Zajist te aby izolace za zen p ipojen ho k v v v TV 551 701 Navigator byla p im en i v p pad jedin poruchy podle sm rnice EN 61010 1 190 300 TV 551 701 Navigator User Manual 87 900 934 01 M Pouziti N vod k Pouziti 13 Tento odstavec popisuje podrobnosti z kladnich pracovnich postup Pred pou itim syst mu proved te vSechna elektrick a pneumatick pripojeni Pri zahiivani vakuov komory teplota privodni priruby nesmi prekrocit 120 C NEBEZPE I Turbomolekularni vyvevu nikdy nepou ivejte nebude li privodni priruba p ipojen k vakuov komo e nebo nem li uta enou zav rac p rubu B hem zah v n se turbomolekul rni vyv vy ani jej ho p slu enstv nedot kejte Vysok teplota m e zp sobit pop leniny B hem chodu chra te v v vu p ed n razy vibracem
14. Technical Specification Tab 3 Technical Specification CHARACTERISTIC TV 551 TV 701 Pumping speed with inlet screen Nz He Compression ratio Nz He Base pressure According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange and using the recommended pre vacuum pump Inlet flange Foreline flange Rotational speed Recommended forepump Mechanical Dry Operating position Operating ambient temperature Cooling requirements Cooling water 242 300 CFF 6 350 l s 450 l s 450 l s CFF 8 1S0160 550 1 s 600 1 s 510 l s CFF 10 150200 690 1 s 620 1 s 510 I s 1x 109 1x 107 1x 106 1x10 1x107 1 x 106 with minimum recommended mechanical pump lt 1x 10 10 mbar 1 x 10 10 Torr with minimum recommended diaphragm pump 2 x 10 9 mbar 1 5 x 10 9 torr ISO 160 CF 6 CF 8 ISO 200 CF 10 KF 25 NW 42000 rpm lt 5 minutes Agilent DS 302 Agilent Triscroll PTS 300 Any 5 C to 35 C Natural air convection Water optional use water with electrical conductivity lt 500 uS cm flow 200 1 h 0 89 GPM temperature 10 C to 30 C pressure 3 to 5 bar 45 to 75 Psi 120 C at inlet flange max CF flange 80 C at inlet flange max ISO flange TV 551 701 Navigator User Manual 87 900 934 01 M Max permissible rotor t
15. yt kinetisk energiniv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn av en kontakt mellom rotor og stator eller brudd p rotoren kan roteringsenergien bli frigitt AIP IE For unng skader p utstyret og forebygge operaterskader ma installasjonsanvisningene beskrevet i denne manualen f lges n ye 128 300 TV 551 701 Navigator User Manual 87 900 934 01 M Instruksjon Manual 9 Generell informasjon Dette utstyret er beregnet til bruk av profesjonelle brukere Brukeren b r lese denne brukerveiledningen og all annen informasjon fra Agilent f r utstyret tas i bruk Agilent kan ikke holdes ansvarlig for hendelser som skjer p grunn av manglende oppf lging av disse instruksjonene selv delvis feilaktig bruk av utrent personell ikke autoriserte endringer av utstyret eller handlinger som p noen m te er i strid med nasjonale bestemmelser TV 551 701 Navigator systemet best r av en turbomolekul r pumpe for bruk i h y eller ultrah ye vakuumanlegg og en styreenhet Systemet kan pumpe nesten alle typer gass eller gassforening Det er ikke beregnet for pumpe v sker eller faste partikler Pumpingen oppn s med en h yhastighetsturbin maks 42000 opm koplet til en trefaset elektrisk motor TV 551 701 Navigator har ingen forurensende stoffer og er derfor egnet for anlegg med behov for rene vakuum TV 551 70
16. 3 lla johtimella varustettua s hk kaapelia k ytt m ll katso tilattavien osien taulukkoa K yt t t kaapelia ja pistoketta yhdess oikein maadoitetun pistorasian kanssa jotta s hk iskuilta v ltyt n ja CE normien vaatimukset t yttyv t Valvojassa kehittyv t korkeaj nnitteet voivat aiheuttaa vakavia onnettomuuksia tai jopa kuoleman Irrota s hk kaapeli ennen yksik n sis lle suoritettavien huoltotoimenpiteiden aloittamista H t pys ytys TV 551 7012 Navigator on pys ytett v h t tilassa irrottamalla s hk kaapeli ohjausyksik st TV 551 701 Navigator User Manual 87 900 934 01 M 151 300 10 Ohjek sikirja Huolto TV 551 701 Navigator ei vaadi lainkaan huoltoa Mahdolliset toimenpiteet tulee j tt valtuutetun henkil n teht v ksi VAROITUS Ennen mink n tyyppist toimenpidett j rjestelm ss kytkek se irti s hk verkosta p st k pumppuun ilmaa avaamalla siihen tarkoitettu venttiili ja odottakaa roottorin t ydellist pys htymist Antakaa t m n j lkeen pumpun pintal mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilent in korjauspalvelua jonka kautta saatte uudistetun pumpun vahingoittuneen tilalle Ennen pumpun l hett mist valmistajalle korjausta tai vaihtopalvelua varten on ehdottomasti t ytett v ja toimitettava paikalliseen myyntitoimistoon Turvallisuus ja Terveys kaavake joka on liitteen ohjekirja
17. 300 16 Instructions for Use Installation Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected maximum pressure 2 bar above atmospheric pressure temperature from 5 C to 35 C see the diagram pressure temperature in the appendix Technical Information relative humidity 0 90 non condensing CAUTION Do not remove the adhesive and protective cap before connecting the turbopump to the system Figure 2 In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for detailed information The TV 551 701 Navigator must be connected to primary pump see Technical Information 226 300 TV 551 701 Navigator User Manual 87 900 934 01 M Instructions for Use 16 Pump Fixing WARNING If a rotor failure occurs the connection of the pump to the system could be subjected to a significant torque If the connection is not sufficient to withstand that torque the pump could detach from the system or the motor housing could detach from the pump envelope In this case metal fragments could be projected from the pump or system which could cause serious injury or death and or damage to surrounding equipment
18. 551 701 Navigator User Manual 87 900 934 01 M Istruktionsbog 7 Forberedelser for installation TV 551 701 Navigator leveres i en speciel beskyttende emballage Kontakt den lokale forhandler hvis emballagen viser tegn p skader der kan v re opst et under transporten S rg for at TV 551 701 Navigator ikke tabes eller uds ttes for st d ved udpakningen Smid ikke emballagen ud Materialet kan genbruges 100 og opfylder EU direktiv 85 399 om milj beskyttelse ans eie Komponenter der skal uds ttes for vakuum m ikke ber res med bare h nder idet der er risiko for afgasning Anvend altid handsker eller anden lignende beskyttelse Figur 1 Normal atmosf risk p virkning kan ikke skade TV 551 701 Navigator Det anbefales dog at opbevare pumpen i en lukket kasse indtil den skal installeres Herved forhindres at der kommer st v i pumpen TV 551 701 Navigator User Manual 87 900 934 01 M 103 300 7 Istruktionsbog Installation FORSIGTIG Install r og anvend ikke pumpen i milj er der uds ttes for p virkninger fra atmosf ren regn sne is damp aggressive gasser og ligeledes ikke i eksplosivt eller brandfarligt milj F lgende krav til omgivelsesforholdene g lder ved drift max tryk 2 bar over det atmosf riske tryk a temperatur fra 5 C til 35 C se illustrationen i bilaget Technical Information relativ luftfugtighed 0 90 ikke kondenser
19. 551 701 Navigator User Manual 87 900 934 01 M 197 300 14 Navod na Obsluhu N vod na pouZitie obsahuje tieto Standardn oznacenia POZOR Pozor ozna uj postupy nedodr anie ktorych m Ze sp sobit po kodenie zariadenia 3 13241818 Nebezpe ie maj s stredi pozornos pracovn ka na ur it postup alebo innos nespr vne vykonanie ktor ch m e sp sobi v ne zranenie Pozn mky upozor uj na d le it inform cie v texte Uchov vanie Ak chcete aby turbomolekul rne v vevy zna ky Agilent pod vali maxim lny a spo ahliv v kon dodr iavajte nasleduj ce pokyny a neprekra ujte nasleduj ce podmienky prostredia po as prevozu pren ania a uchov vania v vev rozsah tepl t 20 C a 70 C rozsah relat vnej vlhkosti 0 a 95 bez kondenz cie z kazn k mus pri prvom spusten turbomolekul rnej v vevy v dy pou i re im soft tartu a skladovate nos turbomolekul rnej v vevy je 10 mesiacov odo d a dodania POZOR Ak z ak hoko vek d vodu vypr as skladovate nosti zariadenia vr te v vevu do z vodu v ktorom bola vyroben Inform cie z skate u miestneho zast penia spolo nosti Agilent pre predaj a servis 196 300 TV 551 701 Navigator User Manual 87 900 934 01 M N vod na Obsluhu 14 Priprava na in talaciu Zariadenie TV 551 701 Navigator sa dodava v pecialnom ochrannom balen Ak je balenie po koden o sa m e s
20. 701 Navigator User Manual 87 900 934 01 M Mode d emploi 3 Installation Ne pas installer et ou utiliser la pompe dans des milieux expos s aux agents atmosph riques pluie gel neige la poussi re aux gaz agressifs ainsi que dans des milieux explosifs ou fort risque d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes pression maxi 2 bar au del de la pression atmosph rique temp rature de 5 C 35 C Cf graphique dans Technical Information a humidit relative 0 90 non condensante vaga iil l Ne d coller l adh sif et ne retirer le couvercle de protection qu au moment de brancher la turbopompe au syst me Figure 2 En pr sence de champs magn tiques la pompe doit tre prot g e l aide d crans appropri s Pour tout autre renseignement se reporter l opuscule Technical Information Le TV 551 701 Navigator doit tre connect une pompe primaire Cf sch ma dans Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 49 300 3 Mode d emploi Fixation de la pompe VALSSIA En cas endommagement du rotor la connexion pompe syst me pourrait 50 300 tre soumise un couple tr s important Si la connexion n est pas en mesure de r sister au dit couple la pompe peut se d tacher du syst me ou le moteur de l enveloppe de la pompe Dans ce cas
21. 900 934 01 M Ohjek sikirja 10 Valmistelut asennusta varten TV 551 701 Navigator toimitetaan erityisess suojapakkauksessa mik li siin on mahdollisesti kuljetuksen aikana tapahtuneita vaurioita ottakaa yhteys paikalliseen myyntitoimistoon Pakkauksen purkamisen aikana tulee varoa erityisesti TV 551 701 Navigatorin putoamista tai siihen kohdistuvia iskuja tai t rin it Pakkausta ei tule j tt ymp rist n Pakkausmateriaali voidaan kierr tt kokonaisuudessaan ja se vastaa EY direktiivi 85 399 ymp rist n suojelusta HUOMIO Jotta kaasun vuoto ongelmilta v ltytt isiin ei tyhji lle altistuviin osiin tule koskea paljain k sin K ytt k aina k sineit tai muuta sopivaa suojausta a SSA Fe gt MIT as RE Kuva 1 TV 551 701 Navigator ei vahingoitu ollessaan kosketuksissa ilman kanssa auki On kuitenkin suositeltavaa pit se suljettuna kunnes se asennetaan j rjestelm n Siten v ltet n laitteen mahdollinen p lysaastuminen TV 551 701 Navigator User Manual 87 900 934 01 M 145 300 10 Ohjek sikirja Asennus Pumppua ei tule asentaa ja tai k ytt ymp rist ss miss se joutuu kosketuksiin s tekij iden sateen j n tai lumen p lyjen tai aggressiivisten kaasujen kanssa tai joissa on olemassa r j hdys tai tulipalovaara K yt n aikana on noudatettava seuraavia ymp rist koskevia ehtoja maksimipaine 2 baaria
22. Az anyag teljesen jrafeldolgozhat s megfelel az EEC 85 399 es direktiv nak G zkivon si probl m k elkeriil s re ne rintse meg puszta k zzel a vakuumnak kitett komponenseket Mindig viseljen keszty t vagy m s alkalmas v d felszerel st bra 1 A k rnyezetnek val norm l kitetts g nem tudja k ros tani a TV 551 701 Navigatort M gis aj nlatos z rva tartani a rendszerbe val telepitesig igy megakad lyozva a por ltali szennyez d s b rmely form j t TV 551 701 Navigator User Manual 87 900 934 01 M 159 300 11 Felhaszn l i K zik nyv Telep t s FIGYELEM Ne telep tse valamint ne haszn lja a szivatty t atmoszf rikus k zegeknek kitett k rnyezetben es h j g porban agressz v g zokban illetve robban vagy t zvesz lyes k rnyezetben zemeltet s k zben a k vetkez k rnyezeti felt teleket kell biztos tani maxim lis nyom s 2 bar a l gk ri nyom s felett h m rs klet 5 C t l 35 C ig l sd a nyom s h m rs klet diagramot a Technical Information f ggel kben a relativ p ratartalom 0 90 nem kondenz l Ne t vol tsa el az ntapad cs kot s a v d kupakot csak a turb szivatty rendszerre csatlakoztat sa el tt 160 300 bra 2 M gneses mez k jelenl t ben a szivatty t v deni kell ferrom gneses pajzs seg ts g vel R szletes inform ci rt l sd Technica
23. Bediener vorzubeugen befolgen Sie bitte aufmerksam die in diesem Handbuch beschriebenen Installationshinweise 30 300 TV 551 701 Navigator User Manual 87 900 934 01 M Gebrauchsanleitung 2 Allgemeine Informationen Dieser Apparat ist f r den fachm nnischen Gebrauch be stimmt Vor dem Gebrauch hat der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau zu lesen Bei auch teilweiser Nichtbeachtung der enthaltenen Anweisungen unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mi achtung der nationalen einschl gigen Normen bernimmt die Firma Agilent keinerlei Haftung Modell TV 551 701 Navigator ist ein integriertes System das aus einer Turbomolekularpumpe f r Hoch und H chstvakuum anwendungen integriert mit einem entsprechenden Controller besteht Das System eignet sich f r die F rderung aller Arten von Gasen oder gashaltigen Gemischen nicht jedoch f r die F rderung von Fl ssigstoffen oder Festpartikeln Die Pumpwirkung wird durch eine hochtourige Turbine max 42 000 1 min erreicht die von einem Hochleistungs drehstrommotor angetrieben wird Modell TV 551 701 Navigator enth lt keinerlei umweltsch dliche Substanzen und eignet sich deshalb auch f r Anwendungen die ein sauberes Vakuum erfordern Modell TV 551 701 Navigator verf gt des weiteren ber Zusatzanschl sse ber die ein zus tz licher Ventilator versorgt das Entl ftungsventil
24. Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Gannot calibrate No zero high backround Gauge tube not warking Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump deseribe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or retuming a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for
25. Derfor oppfordrer man den sluttelige brukeren av anordningen henvende seg til leverand ren av anordningen som kan v re et firma eller en forhandler som s rger for oppsamling og eliminering etter ha kontrollert avtal og betingelser i kj pekontrakten N Er x lt A N 7 TV 551 701 Navigator User Manual 87 900 934 01 M 139 300 9 Instruksjon Manual Eliminering 140 300 TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet 142 Yleisi tietoja 143 Varastointi 144 Valmistelut asennusta varten 145 Asennus 146 Pumpun kinnitys 147 K ytt 149 TV 551 701 Navigatorin k ynnistys ja k ytt 150 TV 551 701 Navigatorin pys ytt minen 150 H t pys ytys 151 Huolto 152 H vitt minen 153 Alkuper isen ohjeiden k nn s E Agilent Technologies 141 300 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet T ss k ytt ohjeessa kuvatuissa turbomolekyylipumpuissa on korkea maara kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa pyorimisenergia saattaa vapautua VAROITUS T ss k ytt ohjeessa kuvattuja asennusohjeita on noudatettava tarkasti 142 300 laitteiston vaurioitumisen ja k ytt jien vahingoittumisen v lt
26. F prirubu potrebny po et svoriek a pr slu n upev ovac kr tiaci moment Tab 2 PR RUBA PO ET U AHOVAC KR TIACI MOMENT ISO 160 F 8 5 Nm ISO 200 F 12 5 Nm Trieda oce ov ch skrutiek pre pr rubu typu F mus by vy ia ako 8 8 Turbov veva so vstupnou pr rubou ConFlat mus by pripojen k v kuovej komore pomocou vhodn ho hardware zna ky Agilent Podrobn inform cie sa nach dzaj v dodatku Technical Information Zariadenie TV 551 701 Navigator m e by nain talovan v ubovo nej polohe TV 551 701 Navigator User Manual 87 900 934 01 M 201 300 14 Navod na Obsluhu U pevnenie vyve NW Zariadenie TV 551 701 Navigator sa nem e upevni pomocou vlastnej z kladnej dosky Zariadenie TV 551 701 Navigator patr do druhej in tala nej prep ovej kateg rie pod a smernice EN 61010 1 Zariadenie je potrebn pripoji ku zdroju nap jania ktor vyhovuje uvedenej kateg rii Zariadenie TV 551 701 Navigator m konektory pre vstup v stup a konektory s riovej komunik cie ktor je potrebn pripoji k vonkaj iemu okruhu tak aby nebola dostupn iadna elektrick s as Presved ite sa i zariadenie pripojen k TV 551 701 Navigatoru m adekv tnu izol ciu aj pre pr pad samostatnej chyby pod a smernice EN 61010 1 202 300 TV 551 701 Navigator User Manual 87 900 934 01 M Pouzitie N vod na Obsluhu 14 T to ast popisuje z kladn sposoby pou
27. TV 551 701 Navigator User Manual 87 900 934 01 M Istruktionsbog 7 Anvendelse Dette afsnit beskriver de vigtigste driftsprocedurer Inden anvendelse af systemet b r samtlige elektriske og pneumatiske tilslutninger udf res I forbindelse med opvarmning af vakuumkammeret m indl bsflangens temperatur ikke overstige 120 C Pumpen m aldrig aktiveres hvis indl bsflangen ikke er tilsluttet vakuumkammeret eller hvis pumpen ikke er lukket ved hj lp af lukkeflangen R r aldrig turbopumpen eller dens tilbeh r i forbindelse med opvarmningsprocedurerne Den h je temperatur kan resultere i skade p personer FORSIGTIG Undg sammenst d vibrationer eller bratte bev gelser i forbindelse med brug af turbopumpen Der er risiko for beskadigelse af lejerne Pumpen skal forsynes med luft eller delgasser der ikke indeholder st v eller faste partikler Indgangstrykket ved den specielle d r skal v re mindre end 2 bar over atmosf risk tryk I forbindelse med pumpning af aggressive gasser er disse pumper udstyret med en d r igennem hvilken det er n dvendigt at forsyne pumpen med delgasser kv lstof eller argon for at beskytte lejerne se bilaget Technical Information ADVARSEL N r pumpen anvendes til toksiske brandfarlige eller radioaktive gasser folges fremgangsm den for den enkelte gastype Anvend ikke pumpen til eksplosive gasser TV 551 701 Navigator User Manual 87 900 934 01 M 1
28. Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 52
29. ben karbantart si munk t v gezne kapcsolja le az egys gr l a t pfesz ltseg szolg ltat k belt Veszleallitas A TV 551 701 Navigator veszhelyzetben val azonnali le llit s hoz el kell t volitani a t pk belt a h l zati dugaszb l TV 551 701 Navigator User Manual 87 900 934 01 M 165 300 11 Felhaszn l i K zik nyv Karbantart s A TV 551 701 Navigator nem ig nyel karbantart st A rendszeren v gzett b rmely munk t jogosult szem lyzetnek kell elv geznie VESZ LY A rendszeren b rmely munka v gz se el tt v lassza le azt a t pfesz lts gr l szell ztesse a szivatty t a megfelel szelep kinyit s val v rjon am g a rotor forg sa le ll s am g a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n l pjen kapcsolatba a helyi Agilent szervizk zponttal ahol tudnak adni egy helyre ll tott rendszert a hib s helyett Miel tt jav t sra vagy cser re visszak ldi a rendszert a gy rt hoz az ehhez a k zik nyvh z csatolt Eg szs g s biztons g rlapot ki kell t lteni s el kell k ldeni a helyi kereskedelmi irod hoz Az rlap egy m solat t sz ll t s el tt el kell helyezni a rendszert tartalmaz csomagba 166 300 Ha a szivatty t le kell selejtezni azt a specifikus nemzeti el r soknak megfelel en rtalmatlan tani kell TV 551 701 Navigator User Manual 87 900 934 01 M Felhaszn l i K zik nyv 11 Meg
30. des morceaux de m tal peuvent tre expuls s par la pompe ou le syst me et entra ner des blessures graves voire la mort et ou endommager s rieusement les quipements environnants Fixer le TV 551 701 Navigator de fa on stable en assurant la collerette d entr e de la turbopompe la contre collerette du syst me au moyen d une connexion en mesure de r sister un couple de 8600 Nm autour de son axe La bride d entr e ISO K peut tre fix e l aide d taux en acier haute r sistance comme le mod le Agilent IC 63250 DCMSZ Le tableau suivant indique pour chaque collerette le nombre de pinces IC63250 DCMZ n cessaires et le couple de serrage appliquer Tab 1 d Bride N Couple de serrage lt lt n Mi ISO 200 8 35 Nm Le tableau suivant indique pour chaque bride d entr e ISO F le nombre de vis n cessaires et le couple de serrage appliquer Tab 2 Bride N _Couple de serrage gt ISO 160 F 8 5 Nm TV 551 701 Navigator User Manual 87 900 934 01 M Mode d emploi 3 La turbopompe bride d entr e ConFlat doit amp tre fix e la chambre vide l aide des l ments m caniques Agilent pr vus cet effet Pour tout autre d tail se reporter l appendice Technical Information Le TV 551 701 Navigator peut tre install e dans n importe quelle position Le TV 551 701 Navigator ne peut tre fix par sa base Faith Le TV 551 701 Navigator appartient la deuxi me cat gor
31. evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e Ifrequesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques
32. is om dit koppel te weerstaan zou de pomp van het systeem of de motor van het pomplichaam los kunnen raken In dit geval kunnen metaalfragmenten door de pomp of het systeem in het rond worden geschoten welke ernstig letsel de dood en of schade aan omliggende apparaten kunnen veroorzaken Bevestig de TV 551 701 Navigator in een stabiele positie door de inlaatflens van de turbopomp op de contraflens van het systeem te monteren met een verbinding die in staat is om een koppel van 8600 Nm rondom de eigen as te weerstaan De ISO K flens kan bijvoorbeeld bevestigd worden met stalen klemmen met een hoge weerstand zoals het model Agilent IC 63250 DCMZ De volgende tabel beschrijft voor elke flens het aantal benodigde klemmen IC 63250 DCMZ en met welk koppel ze aangetrokken moeten worden Tab 1 NR AANHAAL KOPPEL ISO 160 10 35 Nm ISO 200 8 35 Nm De volgende tabel beschrijft voor elke ISO F flens het aantal benodigde klemmen IC 63250 DCMZ en met welk koppel ze aangetrokken moeten worden De klasse van de stalen schroeven voor de F flenzen moet gt 8 8 zijn TV 551 701 Navigator User Manual 87 900 934 01 M Bedrijfshandleiding 6 De turbompomp met ConFlat inlaatflens moet aan de vacu mpomp worden bevestigd met behulp van de speciale mechanische bevestigingselementen van Agilent Zie voor meer informatie de bijlage Technical information De TV 551 701 Navigator kan in alle standen worden geinstalleerd De
33. kompletn likvidaci uveden ho v robku TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual 14 N vod na Obsluhu Bezpe nostn pokyny pre Turbomolekul rne v vevy 196 Vseobecn inform cie 197 Uchov vanie 198 Priprava na in talaciu 199 In talacia 200 Upevnenie v vevy 201 Pou itie 203 Zapnutie a pou itie zariadenia TV 551 701 Navigator 204 Vypnutie zariadenia TV 551 701 Navigator 204 N dzov zastavenie 205 dr ba 206 Likvid cia 207 Preklad origin lneho n vodu E Agilent Technologies 195 300 14 Navod na Obsluhu Bezpecnostne pokyny pre Turbomolekul rne vyvevy Turbomolekul rne vyvevy opisan v nasleduj cej prirucke sa vyzna uj vysokou kinetickou energiou a to v aka vysokej r chlosti ot ania v kombin cii so pecifickou hmotnos ou svojich rotorov V pr pade syst movej poruchy napr pri kontakte rotora a statora alebo pri zlomen rotora sa mo e uvolni rota n energia NEBEZPE Pokyny k in tal cii uveden v tomto n vode musia by d sledne dodr ovan aby nedo lo k po kodeniu zariadenia alebo k zraneniu obsluhy 196 300 TV 551 701 Navigator User Manual 87 900 934 01 M N vod na Obsluhu 14 Vseobecne inform cie Toto zariadenie je ur en pre profesion lnych pracovnikov Skor ne za nete zariadenie pou ivat pre itajte si navod na pou itie a v etky dal ie pokyny spolo nosti Agilent Spolo nost A
34. lahko sprosti rotacijska energija SVARILO Da bi se izognili po kodbam opreme in prepre ili po kodbe osebja morate natan no slediti navodilom za name anje iz tega priro nika 210 300 TV 551 701 Navigator User Manual 87 900 934 01 M Priro nik za Navodila 15 SploSne informacije POZOR Oprema je namenjena za profesionalno uporabo Pred uporabo mora uporabnik prebrati navodila za uporabo in vse dodatne informacije ki mu jih je posredoval Agilent Agilent ni odgovoren za dogodke ki bi nastali zaradi neupostevanja teh navodil nepravilne uporabe in nepoobla enega poseganja v opremo ali kakr nega koli dejanja ki niso v skladu s standardi TV 551 701 Navigator je integriran sistem s turbomolekularno rpalko za visoko in ultra visoko vakuumsko uporabo s primernim krmilnikom Sistem lahko rpa vse tipe plinova ali plinskih zmesi Ni primeren za rpanje teko ine ali trdnih delcev rpanje se izvaja preko hitre turbine maks 42000 rpm ki jo vodi visoko u inkovit 3 fazni elektri ni motor TV 551 701 Navigator ne vsebuje onesna evalnih agentov in je primeren za isto vakuumiranje Opremljen je s pomo nimi prilju ki za dodaten ventilator ki skrbi za nazor obe za zrak ki je nadzorovana z ra unalnikom preko serijske povezave RS232 ali RS485 Naslednji odstavki vsebujejo informacije ki so potrebne za varnost tistega ki uporablja to opremo Podrobne informacije lahko najdete v prilogi Technical
35. lcsavarjai oszt ly nak gt 8 8 nak kell lennie A ConFlat bemeneti karim s turb szivatty t a megfelel Agilent hardverrel kell r gziteni a vakuumkamr hoz R szletes leir sert l sd Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 161 300 11 Felhaszn l i K zik nyv A TV 551 701 Navigator b rmely helyzetben telep thet A TV 551 701 Navigator nem r gz thet az alapj n kereszt l igla da ba A TV 551 701 Navigator a m sodik telep t si vagy t lfesz lts g kateg ri hoz tartozik az EN 61010 1 direkt va szerint Csatlakoztassa az eszk zt a fenti kateg ri nak megfelel h l zathoz A TV 551 701 Navigatornak olyan bemeneti kimeneti s soros kommunik ci s csatl z sai vannak amelyeket gy kell k ls ramk r kh z csatlakoztatni hogy elektromos r szek ne legyenek hozz f rhet k Gy z dj n meg r la hogy a TV 551 701 Navigatorhoz csatlakoztatott eszk z megfelel egyes hiba eset n is az RN 61010 1 direkt va szerint 162 300 TV 551 701 Navigator User Manual 87 900 934 01 M Felhaszn l i K zik nyv 11 Haszn lat Ez a bekezd s r szletezi az alapvet zemeltetesi elj r sokat V gezze el az sszes elektromos s pneumatikus csatlakoztat st a rendszer haszn lata el tt A v kuumkamra melegit se k zben a bemeneti szelep h m rs klete nem haladhatja meg a 120 C ot Soha ne haszn lja a turb szivatty t ha a bemeneti k
36. leur 54 300 TV 551 701 Navigator User Manual 87 900 934 01 M Entretien Mode d emploi 3 Le TV 551 701 Navigator n exige aucun entretien particulier Toute intervention doit tre effectu e par un personnel agr AVERTISSEMENT Avant toute intervention sur le syst me le d brancher refouler l air de la pompe en ouvrant la soupape pr vue cet effet attendre jusqu I arr t complet du rotor et jusqu ce que la temperature superficielle de la pompe soit inf rieure 50 C En cas de panne il est possible de b n ficier du service r parations Agilent qui permet d obtenir une pompe r g n r e en remplacement de la pompe endommag e Avant de renvoyer une pompe au constructeur pour r paration ou advanced exchange service remplir et faire parvenir au bureau de vente local la fiche S curit et Sant jointe au pr sent manuel d instructions Une copie de cette fiche devra tre mise dans l emballage du syst me avant l exp dition En cas de mise au rebut de la pompe proc der son limination conform ment aux r glementations nationales concernant la gestion des d chets TV 551 701 Navigator User Manual 87 900 934 01 M 55 300 3 Mode d emploi Mise au rebut Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indiqu
37. material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liahle for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next Detailed Description of Malfunction Please provide the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature Pg 2 3 Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode io describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Cantact Overtemperature Other Temp 2 Purge flow Cooling defective Clogging EEG OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage prablem Solenoid failure Damaged flange Error code on display Other
38. med h g h llfasthet t ex modellen Agilent IC 63250 DCMZ Tabellen som f ljer anger hur m nga klamrar IC 63250 DCMZ som r n dv ndiga f r varje fl ns samt motsvarande tdragningsmoment Tab 1 FL NS ANT TDRAGNINGS MOMENT ISO 160 10 35 Nm ISO 200 8 35 Nm Tabellen som f ljer anger hur skruvar som r n dv ndiga f r varje ISO F fl ns samt motsvarande tdragningsmoment Tab 2 FL NS ANT TDRAGNINGS MOMENT ISO 160 F 8 5 Nm ISO 200 F 12 5 Nm St lskruvarna f r fl nsarna F ska vara av klass gt 8 8 Turbopumparna med intagsfl ns ConFlat ska f stas till vakuumkammaren med hj lp av Agilent f stdelar F r detaljer h nvisas till bilaga Technical Information TV 551 701 Navigator kan installeras i valfri position TV 551 701 Navigator User Manual 87 900 934 01 M 119 300 8 Bruksanvisning TV 551 701 Navigator systemet kan inte fastsp nnas med sin egen bas OBSERVER TV 551 701 Navigator tillh r den andra installationsklassen eller versp nningsklassen enligt standard EN 61010 1 Anslut d rf r anordningen till en elledning som uppfyller kraven f r denna klass TV 551 701 Navigator r utrustad med kontaktdon f r ing ngarna utg ngarna och f r den seriella kommunikationen som ska anslutas till de externa kretsarna s att det inte g r att komma t n gon sp nningsf rande del Kontrollera att anordningen som r ansluten till TV 551 701 Navigator har en l mplig isolering ven v
39. ne pripoj te turbov vevu k syst mu 200 300 Postava 2 V pr tomnosti magnetick ho po a mus by v veva chr nen feromagnetick m t tom Podrobn inform cie sa nach dzaj v dodatku Technical Information Zariadenie TV 551 701 Navigator sa mus pripoji k prim rnej v veve pozri Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M N vod na Obsluhu 14 Upevnenie vyvevy Ak sa objavi chyba rotora pripojenie vyvevy k syst mu bude vystaven siln mu to iv mu momentu Ak pripojenie nie je dostato ne pevn aby to iv mu momentu odolalo m e sa odpoji v veva od syst mu alebo kryt motora od pl a v ve vy V takom pr pade sa m u z v vevy alebo syst mu prudko vymr ti kovov asti a sp sobi v ne zranenie alebo smr a alebo po kodi al ie zariadenia Upevnite zariadenie TV 551 701 Navigator do stabilnej polohy tak e pripevn te vstupn pr rubu turbov vevy k pr rube syst mu Pripojenie mus by schopn vydr a to iv moment 8600 Nm okolo vlastnej osi Napr klad pr ruba typu ISO K m e by pripevnen oce ov mi svorkami s vysokou pevnos ou napr model Agilent IC63250DCMZ Nasleduj ca tabu ka ukazuje pre ka d typ pr ruby potrebn po et svoriek a pr slu n upev ovac kr tiaci moment Tab 1 n m a na a ISO 160 10 35 Nm ISO 200 8 35 Nm Nasleduj ca tabulka ukazuje pre ka du ISO
40. nebo jinou vhodnou ochranu Postava 1 V norm ln m prost ed se v v va TV 551 701 Navigator nem e po kodit P esto doporu ujeme abyste ji nechali zakrytou dokud nebude nainstalov na do syst mu a t m se ochr nila p ed jak mkoli zne i t n m a prachem TV 551 701 Navigator User Manual 87 900 934 01 M 187 300 13 N vod k Pou it Instalace V v vu neinstalujte v prost ed kter je vystaveno atmosf rick m vliv m d sn h led prachu agresivn m plyn m ve v bu n m prost ed nebo v prost ed s vysok m nebezpe m po aru Za provozu je t eba dodr ovat n sledujici podm nky dan prost ed m a maximalni tlak Z bary nad atmosf rick m tlakem a teplota od 5 C do 35 C viz diagram tlak teplota v pr loze Technical Information relativni vlhkost 0 90 bez sr en Pred p ipojen m turbomolekul rn vyv vy do syst mu nesund vejte adhezn a ochrann v ko 168 300 Postava 2 V pr tomnosti magnetick ch pol se vyv va mus chr nit feromagnetick m stinenim Viz podrobn informace v priloze Technical Information V v va TV 551 701 Navigator se mus p ipojit k prim rn mu erpadlu viz Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M Navod k Pou iti 13 Monta vyv wy Pokud dojde k poru e rotoru propojeni vyv vy se syst mem by mohlo b
41. osoby NEBEZPE Ne za nete prov d t jak koli pr ce na tomto zafizeni odpojte jej od s t odvzdu nete vyv vu otevrenim pr slu n ho ventilu po kejte a se rotor p estane ot et a po kejte dokud povrchov teplota v vevy neklesne pod 50 C V p pad poruchy kontaktujte technick servis firmy Agilent kter m e dodat n hradn repasovanou vyv vu v m nou za porouchanou Pred odesl nim vyv vy v robci na opravu nebo vym nu za repasovan kus vypl te list Zdrav a bezpe nost p ilo en k tomuto n vodu a ode lete ho do kancel e m stn ho prodejn ho odd len P ed odesl n m p ibalte k za zen kopii tohoto listu Likvidace 194 300 Pokud se m v v va vy adit mus se zlikvidovat v souladu s konkr tn mi st tn mi normami V znam loga WEEE nach zej c ho se na t tku N e uveden symbol odpov d sm rnic m CE pojmenovan m WEEE Tento symbol platn jen pro st ty Evropsk Unie ur uje e v robek kter je takto ozna en NESM b t likvidov n spole n s ostatn mi dom c mi nebo pr myslov mi odpady ale je nutno ho p edat do pat i n ch provozn ch sb ren kde mus b t t d n a likvidov n odd len od m stsk ho odpadu U ivateli kter m n v robek likvidovat doporu ujeme aby se nakontaktoval p mo s v robcem nebo prodejcem kter se po pat i n m prov en term n a smluvn ch podm nek postar o
42. prve is nm PES sn ISO 160 10 35 Nm ISO 200 8 35 Nm Nedenst ende tabel beskriver antallet af skruer som er ngdvendige til hver enkelt ISO F flange samt det ngdvendige tilsp ndingsmoment Tab 2 Flange N Torque de aperto ISO 160 F 8 5 Nm ISO 200 F 12 5 Nm St lskruerne til flangerne F skal v re i klasse gt 8 8 TV 551 701 Navigator User Manual 87 900 934 01 M 105 300 7 Istruktionsbog Turbopumpen med ConFlat indl bsflange skal tilsluttes p vakuumkammeret ved hj lp af Agilent monteringsudstyret I bilaget Technical Information findes yderligere detaljer TV 551 701 Navigator kan installeres i en hvilken som helst position Navigator TV 551 701 kan ikke fastg res i fundamentet OORZICHTIG TV 551 701 Navigator h rer til den anden installationsklasse eller oversp ndingsklasse jf normen EN 61010 1 Slut derfor anordningen til en forsyningslinie som opfylder kravene i denne klasse TV 551 701 Navigator er forsynet med konnektorer til ind udgange og til seriel kommunikation Konnektorerne skal tilsluttes de eksterne kredsl b s ledes at det ikke er muligt at opn adgang til de sp ndingsf rende dele Kontroll r at anordningen der er tilsluttet TV 551 701 Navigator har en passende isolering Dette g lder ogs i tilf lde af enkeltfejl som angivet i normen EN 61010 1 106 300 Der henvises til bilaget Technical Information for oplysninger vedr rende installation af ekstraudstyret
43. przewodach zobacz tabele cze ci dajacych sie zam wi i zamontowana wtyczka zgodna z miedzynarodowymi normami Kabel ten podtaczy wraz z wtyczka do kontaktu uziemionego celem unikniecia porazen pradem elektrycznym oraz spelnienia wymog w norm CE Duze sity wewnetrzne wytwarzajace sie w kontrolerze moga spowodowa powazne uszkodzenia ciata lub mier Przed przeprowadzeniem czynnosci konserwacyjnych wewnatrz tego urz dzenia od czy kabel zasilaj cy Zatrzymanie Awaryjne Aby zatrzyma w stanie awaryjno alarmowym TV 551 701 Navigator nale y od czy kabel zasilania ze sterownika TV 551 701 Navigator User Manual 87 900 934 01 M 179 300 12 Podrecznik Instrukcji Konserwacja System TV 551 701 Navigator nie wymaga Zadnej konserwacji Jakakolwiek interwencja musi by wykonana przez upowa niony personel ZAGROZENIE Przed wykonaniem jakiejkolwiek interwencji na systemie nale y odtaczy go od zasilania otworzy odpowiedni zaw r wlotu powietrza odczeka az do catkowitego zatrzymania wirnika i odczeka az temperatura powierzchni pompy bedzie ponizej 50 C W przypadku usterki mozliwe jest skorzystanie z serwisu naprawczego Agilent kt ry pozwoli na uzyskanie zregenerowanego systemu w zastepstwie uszkodzonego systemu Przed wysytka systemu do konstruktora celem naprawy lub advanced exchange service nalezy obowiazkowo wypelni i przekaza do miejscowego biura sprzeda y karte Bezpiecze
44. rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsenergin frig rs VARNING F r att undvika skador p utrustningen och f rhindra att skador orsakas p operat rer m ste installationsinstruktionerna som beskrivs i den h r bruksanvisningen f ljas noga 114 300 TV 551 701 Navigator User Manual 87 900 934 01 M Bruksanvisning 8 Allm n information Utrustningen r avsedd f r yrkesm ssig anv ndning Anv ndaren b r l sa denna bruksanvisning samt vrig dokumentation fr n Agilent f re anv ndning av utrustningen Agilent tar inget ansvar f r skador helt eller delvis till f ljd av sidos ttande av instruktionerna ol mplig anv ndning av person utan tillr cklig kunskap obeh rigt bruk av utrustningen eller hantering som strider mot g llande lokala f reskrifter Systemet TV 551 701 Navigator best r av en turbomolekyl r pump f r h ga och mycket h ga vakuumtill mpningar och en styrenhet Systemet kan anv ndas f r pumpning av alla typer av gas eller gasf reningar Dock l mpar sig inte systemet f r pumpning av v tskor eller fasta partiklar Pumpningen stadkoms med hj lp av en h gvarvig turbin max 42000 varv minut som drivs av en trefas h geffektsmotor Inga tillsats mnen anv nds i TV 551 701 Navigator som d rf r passar f r till mp
45. t be kept opened the backing pump should be left operating TV 551 701 Navigator User Manual 87 900 934 01 M 291 300 17 Technical Information Purge gas line Pressure regulator Gas purge valve Gas purge port Forevacuum pump o OO B ON gt Turbopump Figure 61 Purge layout Pump Used in Presence of Magnetic Fields 292 300 Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power consumption by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radia tion and hence the rotor may be overheated while static parts of the pump remain cool This effect is strongly dependant from the intensity time function and distribution of the magnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by the motor in high vacuum opera tion no particular problem should be expected However if the effect is grater than the case should be carefully reviewed by Agilent s special ist As a matter of fact in case of high magnetic fields also important forces might be generated and applied to the rotor TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information Accessories and Spare Parts Tab 9 Accessori
46. v ase el apartado RS 232 485 COMMUNICATION DESCRIPTION en el anexo Technical Information El LED verde LD1 situado en el panel de la base del TV 551 701 indica con la frecuencia de su parpadeo las condiciones operativas del sistema encendido fijo la bomba est en rotaci n normal parpadea lentamente periodo de 400 ms aproximadamente el sistema est en estado de rampa o de frenado o de stop o de waiting for iterlock parpadea r pidamente periodo de 200 ms aproximadamente condici n de error Parada del TV 551 701 Navigator Para parar el TV 551 701 Navigator nte con desenchufarlo de la corriente El controler incorporado detiene inmediatamente la bomba TV 551 701 Navigator User Manual 87 900 934 01 M 67 300 4 Manual de istrucciones Para seguridad del operador el controlador Turbo V debe ser alimentado con cable de alimentaci n de 3 hilos vease tabla de partes disponibles para pedido provisto de un enchufe aprobado internacionalmente Utilizar el cable y el enchufe junto con un tomacorriente adecuadamente conectado a tierra para evitar descargas electricas y cumplir con los requerimientos de las normas CE Las altas tensiones que se desarrollan en el controlador pueden provocar graves danos o incluso resultar fatales Desconectar el cable de alimentaci n antes de ejecutar las operaciones de mantenimiento en el interior de la unidad requerimientos de las normas CE Par
47. verde posto sul pannello della base del TV 903 Pumping System indica con la frequenza del suo lampeggio le condizioni operative del sistema acceso fisso la pompa in rotazione normale lampeggiante lentamente periodo di circa 400 ms il sistema in stato di rampa o di frenata o di Stop o di Waiting for interlock lampeggiante velocemente periodo di circa 200 ms condizione di errore Arresto del TV 551 701 Navigator Per arrestare il TV 551 701 Navigator amp sufficiente togliere la tensione di alimentazione Il controller incorporato arresta immediatamente la pompa TV 551 701 Navigator User Manual 87 900 934 01 M 25 300 1 Istruzioni per uso AVAUS L EU Per la sicurezza dell operatore il controller Turbo V deve essere alimentato con un cavo di alimentazione a 3 fili vedere la tabella delle parti ordinabili dotato di una spina approvata a livello internazionale Utilizzare questo cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i requisiti delle norme CE Le alte tensioni che si sviluppano nel controller possono provocare gravi lesioni o la morte Prima di eseguire delle operazioni di manutenzione all interno dell unit scollegare il cavo di alimentazione Arresto di Emergenza Per arrestare in condizioni di emergenza il TV 551 701 Navigator occorre staccare il cavo di alimentazione dal controller 26 300 TV 551 701 Navigat
48. 07 300 7 Istruktionsbog Start og anvendelse af TV 551 701 Navigator For at starte TV 551 701 er det tilstr kkeligt at tilslutte et forsyningsstik Den indbyggede styreenhed genkender blokerings og startsignaler automatisk og starter pumpen Soft Start moden bruges for at t nde pumpen efter lang stilstand For at aktivere SOFT START metoden skal ovenn vnte m de programmeres ved hj lp af software se afsnit RS 2327485 COMMUNICATION DESCRIPTION i bilaget Technical Information Den gr nne LED LDI der er anbragt p panelet pa TV 551 701 s fundament angiver systemets funktion ved blink konstant t ndt pumpen er i normal rotation langsomme blink periode p ca 400 ms systemet er i stilling for acceleration bremsning stop eller Waiting for interlock hurtige blink periode p ca 200 ms fejl Stop af TV 551 701 Navigator For at afbryde TV 551 701 Navigator er det tilstr kkeligt at afbryde str mtilf rselen Den indbyggede styreenhed afbryder straks pumpen 108 300 TV 551 701 Navigator User Manual 87 900 934 01 M Istruktionsbog 7 For operat rens sikkerhed skal Turbo V controller en str mforsynes med et 3 tr det f dekabel se tabellen over de bestilbare stykker f dekablet skal v re udstyret med et stik som skal v re godkendt p international plan Benyt dette kabel og stik sammen med en stikkontakt som p passende m de er forbundet til jorden for at und
49. 1 701 Navigator i en n dsituasjon TV 551 701 Navigator User Manual 87 900 934 01 M 137 300 9 Instruksjon Manual Vedlikehold TV 551 701 Navigator er vedlikeholdsfritt Alt arbeid p systemet m kun utf res av autorisert personell ADVARSEL F r noe arbeid gj res p systemet m det frakoples str mtilf rselen pumpen m luftes ved pne den aktuelle ventilen og deretter vente til rotoren har stanset og pumpens overflatetemperatur er lavere enn 50 C Dersom systemet stanser m du ta kontakt med Agilents reparasjonservice eller med Agilents avanserte bytteservice som kan tilby overhalte system til erstatning for det delagte systemet F r systemet returneres til produsenten for reparasjon eller som innbytte for et overhalt system m det vedlagte skjemaet Helse og sikkerhet fylles inn og sendes til det lokale salgskontoret En kopi av dette arket m vedlegges systemet som sendes tilbake 138 300 Dersom et system skal kasseres m dette skje i henhold til nasjonale bestemmelser TV 551 701 Navigator User Manual 87 900 934 01 M Instruksjon Manual 9 Eliminering Betydelsen av symbolet p logo WEEE p etikettene Symbolet nedenunder som finnes er anvendt i henhold til EC direktiv kalt WEEE Dette symbolet som bare gjelder for land i Det europeiske fellesselskap viser at produktet som det sitter p IKKE m behandles som vanlig hus industriavfall men m legges i kildesortering
50. 1 Navigator har dessuten hjelpekontakter som gir muligheter for forsyning av en ekstra vifte styring av utluftingsventilen og fjernstyring av systemet med en serietilkoplet vertsmaskin De f lgende avsnitt inneholder all informasjon som er n dvendig for sikre brukeren n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 129 300 9 Instruksjon Manual Denne manualen bruker f lgende standardprotokoll Sete Denne advarselen vises foran fremgangsm ter som dersom de ikke f lges kan f re til at utstyret skades nu 38 Disse meldingene skal tiltrekke seg brukerens oppmerksomhet til en spesiell fremgangsm te eller praksis som hvis den ikke f lges kan medf re alvorlige skader Merknadene inneholder viktig informasjon som er hentet fra teksten Lagring For garantere optimal drift og p litelighet for Agilent turbomolekyl re pumper m f lgende anvisninger f lges Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra 0 til 95 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpene n r de mottas og startes opp f rste gang a Lagringstiden for en turbomolekyl r pumpe er 10 m neder fra sendedato du la Hvis lagringstiden av en hvilken som helst grunn er lenger m pumpen re
51. 3 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 04 2011 Publication Number 87 900 934 01 M Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R O C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 10U UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agi
52. 34 01 M Wartung Gebrauchsanleitung 2 Modell TV 551 701 Navigator erfordert keine Wartung Eventuelle Eingriffe d rfen nur von autorisiertem Fachpersonal ausgef hrt werden WARNUNG Vor jedem Eingriff am System den Netzstecker ziehen die Pumpe ber ffnung des entsprechenden Ventils bel ften und abwarten bis der Rotor vollkommen stillsteht und die Temperatur am Pumpengeh use unter 50 C abgesunken ist Bei Defekten kann der Agilent Service in Anspruch genommen werden der eine general berholte Pumpe als Ersatz f r die defekte Pumpe zur Verf gung stellt Bevor Fa Agilent ein System zur Reparatur oder den Um tauschdienst eingesandt wird ist das Formular Sicherheit und Gesundheit das diesem Handbuch beiliegt ausgef llt an die rtliche Verkaufsstelle zu senden Eine Kopie ist der Verpackung des Systems vor dem Versand beizulegen Eine eventuelle Verschrottung der Pumpe hat unter Beachtung der einschl gigen nationalen Vorschriften zu erfolgen TV 551 701 Navigator User Manual 87 900 934 01 M 41 300 2 Gehrauchsanleitung Entsorgung 42 300 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zug
53. 34 01 M 275 300 17 Technical Information Figure 42 276 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 Water Cooling Kit Installation The water cooling kit mod 969 9347 or 969 9337 must be installed when the pump is used under heavy load conditions or when air cooling is insufficient m Figure 43 Model 969 9337 gt patta DK J Figure 44 Model 969 9347 The kit is assembled as shown in the figure TV 551 701 Navigator User Manual 87 900 934 01 M 271 300 17 Technical Information Figure 45 Two rubber or plastic hoses from the water supply must be fitted to the two water cooling banjos Cooling may be carried out either through an open circuit with eventual discharge of the water or us ing a closed circuit cooling system The water temperature must be between 10 C and 30 C with an inlet pressure between 3 and 5 bar This allows a flow of about 200 l h The water electrical conductance must be lt 500 us cm When the conductance is higher in closed water circuit the use of up to 20 of Ethyl Glycole is suggested Vent Accessories The vent valve and vent device allow to avoid undesired venting of the pump during temporary power failure and enables an automatic vent o
54. 4 300 TV 551 701 Navigator User Manual 87 900 934 01 M Gebrauchsanleitung 2 Installation Die Pumpe darf nicht in Umgebungen die ungesch tzt vor Wetter Regen Frost Schnee Staub und aggressiven Gasen sind sowie auch nicht in explosionsf higen oder erh ht brandgef hrdeten Umgebungen installiert und oder benutzt werden Beim Betrieb m ssen folgende Umgebungsbedingungen eingehalten werden Maximaler Druck 2 bar ber dem atmosph rischen Druck Temperatur von 5 C bis 35 C siehe Diagramm im Anhang Technical Information Relative Luftfeuchtigkeit 0 95 nicht kondensierend VORSICHT Das Klebeband abziehen und den Schutzdeckel erst bei Anschluss der Turbopumpe an das System abnehmen Abbildung 2 Bei Vorhandensein von elektromagnetischen Feldern ist die Pumpe entsprechend abzuschirmen F r ausf hrliche Informationen siehe im Anhang Technical Information Modell TV 551 701 Navigator ist an eine Prim rpumpe anzuschlie en siehe Schema in Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 35 300 2 Gebrauchsanleitung Befestigung der Pumpe WARNUNG Wenn ein L uferschaden auftritt k nnte die Verbindung zwischen der Pumpe 36 300 und dem System mit einem erheblichen Drehmoment belastet werden Setzt die Verbindung diesem Drehmoment keinen ausreichenden Widerstand entgegen besteht die M glichkeit dass sich die Pumpe vom Syste
55. 7 Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt The controller can answers with the following response types Tab 7 Numeric Alphanumeric ACK Unknown Window Data Type Error Out of Range Win Disabled Response types 10 bytes 1 byte TV 551 701 Navigator User Manual 87 900 934 01 M Description After a read instruction of a logic window After a read instruction of a numeric window After a read instruction of an alphanumeric window The command execution has been successfully completed The command execu tion has been The specified window in the command is not a valid window The data type specified in the command Logic Numeric or Alphanu meric is not accorded with the specified Win dow The value expressed during a write command is out of the range value of the specified window The specified window is Read Only or temporarily disabled for ex ample you can t write the Soft Start when the Pump is running 261 300 17 Technical Information Examples Command START Source PC Destination Controller 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP
56. 7 900 934 01 M 149 300 10 Ohjek sikirja TV 551 701 Navigatorin k ynnistys ja k ytt TV 551 701 Navigatorin k ynnistykseen riitt ett se kytket n s hk verkkoon Sis nrakennettu valvoja tunnistaa automaattisesti lukitus ja k ynnistyssignaalit ja k ynnist pumpun Soft Start tapa on k ytett viss pumpun k ynnist mist varten pitk n seisonta ajan j lkeen Jotta k ynnistys voitaisiin saataisiin suorittaa uudelleen Soft Start menetelm ll tulee yll mainittu on aktivoitava uudelleen ohjelmiston kautta ks kappale RS 232 485 COMMUNICATION DESCRIPTION Technical Information liitteess Vihre LED LD1 joka sijaitsee TV 551 701 n perustan paneelissa osoittaa vilkkumistiheydell n j rjestelm n toimintaolosuhteet palaa jatkuvasti pumppu py rii normaalisti a vilkkuu hitaasti noin 400 ms n jakso systeemi on kiihdytys jarrutus pys ytys tai Waiting for interlock tilassa a vilkkuu nopeasti noin 200 ms n jakso virhetila TV 551 701 Navigatorin pys ytt minen TV 551 701 Navigatorin pys ytt miseen riitt ett se kytket n irti s hk verkosta Sis nrakennettu valvoja pys ytt pumpun v litt m sti 150 300 TV 551 701 Navigator User Manual 87 900 934 01 M Ohjek sikirja 10 K ytt j n turvallisuuden takaamiseksi Turbo V valvojan virran sy t n on tapahduttava pistokkeella kansainv lisesti hyv ksytty tyyppi ja
57. 701 Navigator totalmente isentos de agentes contaminadores e portanto adequado para aplica es que requerem um v cuo limpo Al m disso o TV 551 701 Navigator tem conectores auxiliares atrav s dos quais poss vel alimentar um ventilador adicional comandar a v lvula de vent accion lo por um controlo remoto atrav s de um computer host conectado por meio de linhas seriais RS 232 RS 485 Nos seguintes par grafos est o descritas todas as informa es necess rias para garantir a seguran a do operador durante o uso da aparelhagem Informa es detalhadas s o fornecidas no ap ndice Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 73 300 5 Manual de Istru es Este manual utiliza as seguintes convenc es CUIDADO As mensagens de cuidado s o visualizadas antes de proceder que se n o observadas poderiam causar danos a aparelhagem Duae As mensagens de aten o atraem a aten o do operador num procedimento ou uma pr tica espec fica que se n o executada de modo correto poderiam provocar graves les es pessoais As notas cont m informa es importantes estrapoladas pelo texto 74 300 TV 551 701 Navigator User Manual 87 900 934 01 M Manual de Istruc es 5 Armazenagem Para garantir o nivel M ximo de funcionalidade e fiabilidade das bombas Turbomoleculares Agilent devem ser observadas as seguintes prescric es durante o transporte o d
58. 8 2 Gebrauchsanleitung 29 Sicherheitshinweise f r Turbomolekularpumpen 30 Allgemeine Informationen 31 Lagerung 33 Vor der Installation 34 Installation 35 Befestigung der Pumpe 36 Gebrauch 38 Wartung 4 TV 551 701 Navigator User Manual 87 900 934 01 M 5 300 Contents 6 300 Entsorgung 42 Mode d emploi 43 Normes de s curit pour Pompe Turbomol culaires 44 Indications g n rales 45 Stockage 47 Preparation pour l installation 48 Installation 49 Fixation de la pompe50 Utilisation 52 Entretien 55 Mise au rebut 56 Manual de istrucciones 57 Indicaciones de Seguridad para Bombas Turbomoleculares 58 Informaci n general 59 Almacenamiento 61 Preparaci n para la instalaci n 62 Instalaci n 63 Fijaci n de la bomba 64 Uso 66 Mantenimiento 69 Eliminaci n 70 TV 551 701 Navigator User Manual 87 900 934 01 M Contents 5 Manual de Istruc es 71 Indicac es de Seguranca para Bombas Turbomoleculares 72 Informac es gerais 73 Armazenagem 75 Preparac o para a instalac o 76 Instalac o 77 Fixac o da bomba 78 Utilizac o 80 Manutenc o 83 Eliminac o 84 6 Bedrijfshandleiding 85 Veiligheidsinstructies voor Turbomoleculaire pompen 86 Algemene informatie 87 Opslag 89 Voorbereiding voor installatie 90 Installatie 91 Bevestiging van de pomp 92 Gebruik 94 Onderhoud 97 Afvalverwerking 98 7 Istruktionsbog 99 Sikkerhedsanvisninger for Molekyl re turbopumper 100 TV 551 701 Navigator Use
59. 934 01 M Istruktionsbog 7 Bortskaffelse Betydningen af WEEE logoet pa m rkaterne Nedenst ende symbol anvendes i overensstemmelse med det s kaldte EU direktiv WEEE Symbolet kun g ldende for EU landene viser at produktet som det sidder p IKKE m bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi opfordrer derfor slutbrugeren til at kontakte leverand ren af anordningen enten fabrikken eller en forhandler for igangs ttelse af afhentnings og bortskaffelsesprocessen efter n je at have kontrolleret betingelserne i salgskontrakten TV 551 701 Navigator User Manual 87 900 934 01 M 111 300 7 Istruktionsbog Bortskaffelse 112 300 TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar 114 Allm n information 114 F rvaring 116 F rberedelser f r installation 117 Installation 118 Fasts ttning avpump 119 Anv ndning 121 Start och anv ndning av TV 551 701 Navigator 122 Att st nga av TV 551 701 Navigator 122 N dstopp 123 Underh ll 124 Bortskaffning 125 vers ttning av originalinstruktionerna 5 Agilent Technologies 113 300 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar De molekyl ra turbopumparna som beskrivs i bruksanvisningen har en h g kinetisk energi beroende p den h ga
60. C a 70 C umidit relativa da 0 a 95 non condensante a il cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta il tempo di immagazzinamento di una pompa turbomolecolare di 10 mesi dalla data di spedizione Vera 0 Se per qualsiasi ragione il tempo di immagazzinamento superiore occorre reinviare la pompa in fabbrica Per ogni informazione si prega di contattare il locale rappresentante della Agilent Preparazione per l installazione II TV 551 701 Navigator viene fornito in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere il TV 551 701 Navigator e a non sottoporlo ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale amp completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente TV 551 701 Navigator User Manual 87 900 934 01 M 19 300 1 Istruzioni per uso Preparazione per l installazione Fatal Onde evitare problemi di degasamento non toccare con le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata Ur N i D N LE 5 Figura 1 NOTA II TV 551 701 Navigator non pu essere danneggi
61. COMMUNICATION DESCRIPTION no ap ndice Technical Information A luz piloto verde LD1 posicionada no painel da base do TV 551 701 indica atrav s da frequ ncia de intermit ncia as condi es operacionais do sistema aceso fixo a bomba funciona normalmente a intermitencia lenta per odo de aprox 400 ms o sistema est em estado de acelera o ou de paragem ou de Stop ou de waiting for interlock a intermitencia r pida per odo de aprox 200 ms condi o de erro Paragem do TV 551 701 Navigator Para parar o TV 551 701 Navigator suficiente desligar a tens o de alimenta o O controller incorporado para imediatamente a bomba TV 551 701 Navigator User Manual 87 900 934 01 M 81 300 5 Manual de Istru es Para a seguranca do operador o controller Turbo V deve ser alimentado com um cabo de alimentac o com 3 fios ver a tabela das partes que podem ser encomendadas eguipado de uma tomada aprovada a nivel internacional Utilize este cabo e tomada juntos com uma tomada adeguadamente conectada a terra para evitar chogues electricos e satisfazer os requisitos das normas CE As altas tens es que se desenvolvem no controller podem provocar graves danos ou at morte Antes de realizar operac es de manutenc o no interno da unidade desligar o cabo de alimentac o Paragem de Emergencia Para parar o TV 551 701 Navigator em condic es de emergencia necessario desligar do contr
62. ENS ANT STRAMMEMOMENT ISO 160 10 35 Nm ISO 200 8 35 Nm Den f lgende tabellen beskriver antall skruer som er n dvendige for hver ISO F flens og tilh rende strammemoment Tab 2 FLENS ANT STRAMMEMOMENT ISO 160 F 8 5 Nm ISO 200 F 12 5 Nm Til flensene F m st lskruene v re av klasse gt 8 8 Turbopumpen med ConFlat inngangsflens skal festes til vakuumkammeret ved hjelp av de spesielle l sedelene fra Agilent For detaljer henvises det til Technical Information TV 551 701 Navigator kan monteres i en valgfri stilling TV 551 701 Navigator User Manual 87 900 934 01 M 133 300 9 Instruksjon Manual TV 551 701 Navigator m ikke festes gjennom fundamentet FORSIKTIG TV 551 701 Navigator h rer til installasjonsklasse eller overspenningsklasse nummer 2 i f lge EN 61010 1 standarden Kople derfor anordningen til en hovedledning som tilfredsstiller kravene for denne klassen TV 551 701 Navigator er utstyrt med koplingsstykker for inn utgangene og seriekommunikasjonen som m koples til de ytre str mkretsene slik at ingen deler under spenning er tilgjengelige Forsikre deg om at isoleringen av anordningen koplet til TV 551 701 Navigator har en egnet isolering ogs under forhold med en enkel feil i f lge EN 61010 1 standarden 134 300 For installasjon av tilleggsutstyr vises det til Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M Instruksjon Manual 9 Bruk Alle instruks
63. Information Navodila so napisana po naslednjem standardnem protokolu Sporo ila so prikazana pred postopki pri katerih lahko pride do po kodbe opreme SVARILO Svarilo so za to da pritegnejo pozornost uporabnika na dolo ene postopke pri katerih lahko pride do resnih po kodb e se jih ne dr i Opombe vsebujejo vse najbolj pomembne informacije iz besedila TV 551 701 Navigator User Manual 87 900 934 01 M 211 300 15 Priro nik za Navodila Shranjevanje Da bi zagotovili maksimalni u inek in zanesljivost rpalk Agilent Turbomolecular se morate dr ati naslednjih vodil Pri po iljanju premikanju in shranjevanju rpalk ne smete prese i naslednjih specifikacij temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti 0 do 95 brez kondenza a Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko ivljenjska doba turbomolekularne rpalke je 10 mesecev od datum po iljanja POZOR e zaradi kakr nega koli razloga prese ete ivljenjsko dobo je treba rpalko vrniti v tovarno Za dodatne informacije kontaktirajte lokalnega predstavnika prodaje in storitev za Agilent Vacuum 212 300 TV 551 701 Navigator User Manual 87 900 934 01 M Priro nik za Navodila 15 Priprava za montazo TV 551 701 Navigator je dobavljen v posebni za itni embala i Ce je embala a po kodovana kontaktirajte lokalno prodajno pisarno Pri odpiranju sistema paz
64. Manuale di istruzioni Bedienungshandbuch Notice de mode d emploi Manual de istrucciones Manual de istruc es Bedrijfshandleiding Istrukstionsbog Bruksanvisning 87 900 934 01 M 04 2011 TV 551 701 Navigator Pump models 969 8922 969 8923 969 8925 969 8926 969 8927 969 8944 969 8945 Kit models 969 8832 969 8833 969 8835 969 8836 969 8837 969 8842 969 8843 Controller models 969 8976 969 8977 Instruksjon manual Ohjek sikirja Felhaszn l i k zik nyv Podrecznik instrukcji N vod k pouziti N vod na obsluhu Prirocnik za navodila User Manual E Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 934 01 M Edition Edition 04 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and
65. Plug the line card and connect the pump cable to the pump 7 Connect the mating connector with the jumper on the interlock signal to start the pump Figure 56 TV 551 701 Navigator User Manual 87 900 934 01 M 285 300 17 Technical Information Side Mounting The L shaped bracket P N 969 9349 is available as an option See the following figure 1 Place the L shaped bracket on the controller with the pump cable toward the bracket and fix it by means of the three socket head screws M5 the washers and the nuts The 6 holes on the bracket allows to mount the controller with the rotation angle that you like Turn the pump upside down Place the bracket on the pump bottom the hole on the bracket has the same diameter as the pump bottom flange 4 Screw a little bit the three screws M6 in the holes on the pump bottom Rotate the bracket until the controller is on the chosen position Tighten the screws properly Turn the pump again Plug the line card and connect the pump cable to the pump o N GI Connect the mating connector with the jumper on the interlock signal to start the pump 286 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 Figure 57 Connection A High Vacuum Flange For ISO K flange con
66. Seuraavissa kappaleissa on kaikki tarpeelliset tiedot laitteen k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset tiedot l ytyv t osasta Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 143 300 10 Ohjek sikirja T m k sikirja k ytt seuraavanlaisia merkint j Huomio merkinn t varoittavat toimenpiteist joiden laiminly nti voi johtaa laitteen vaurioitumiseen LUKIEN Varoitus merkint jen teht v n on kiinnitt k ytt j n huomio erityisiin toimintatapoihin joiden virheellinen suorittaminen voi aiheuttaa vakavia henkil vahinkoja Huomiot sis lt v t t rke tekstist otettua tietoa Varastointi Noudata seuraavia ohjeita jotta Agilent turbomolekyylinen pumppu toimisi eritt in tehokkaasti ja luotettavasti Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun ja k ytt ess n sit ensimm isen kerran Turbomolekyylisen pumpun varastointiaika on 10 kuukautta toimitusp iv st Jos varastointiaika on jostain syyst pidempi pumppu tulee palauttaa tehtaalle Pyyd lis tietoja paikalliselta Agilent edustajalta 144 300 TV 551 701 Navigator User Manual 87
67. Source PC Destination Controller 02 80 30 30 30 31 30 03 42 32 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC 262 300 TV 551 701 Navigator User Manual 87 900 934 01 M Command SOFT START ON Source PC Destination Controller Technical Information 17 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destination Controller 02 80 31 30 30 31 30 03 42 33 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC TV 551 701 Navigator User Manual 87 900 934 01 M 263 300 17 Technical Information Window Meanings Tab 8 Window Meanings 000 008 R W L 100 R W L 101 R W N 102 R W N mc e pe gt gt 106 R W L 107 R W L 5 Description Start Stop in remote mode the window is a read only Remote default or Serial configuration Soft Start write only in Stop condition Set Point type Set Point threshold expressed in Hz mA or s Set Point delay time between the pump start and the set point check seconds Set Point signal act
68. TV 551 701 Navigator User Manual 87 900 934 01 M 265 300 17 Technical Information 266 300 205 206 300 301 302 320 to 399 400 402 500 503 504 N Pump status N Error code N Cycle time in minutes zeroed by the reset command N Cycle number zeroed by the reset command N Pump life in hours zeroed by the reset command Reserved to Agilent service A CRC EPROM QE A CRC Param PA Reserved to Agilent service N RS 485 address L Serial type select Stop 0 Waiting intlk 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 Bit description see the following figure 0 to 999999 0 to 9999 Oto 999999 QE8XXXX where XXXX are variable PA8XXXX where XXXX are variable 0 to 31 default 0 0 lt RS 232 1 RS 485 default 0 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 1 Automatic means that when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On command means that the vent valve is opened or closed by means of window n 122 TOO HIGH LOAD SHORT CIRCUIT OVERVOLTAGE PUMP OVERTEMP NO CONNECTION CONTROLL OVERTEMP AUX FAIL POWER FAIL Figure 29 Window N 206 Bit Description TV 551 701 Navigator User Manua
69. TV551 701 Navigator kan niet met behulp van zijn eigen basis worden bevestigd OORZICHTIG De TV 551 701 Navigator behoort tot de tweede installatiecategorie of overspanningscategorie die door de norm EN 61010 1 is voorzien Sluit deze inrichting dus aan op een voedingslijn die aan deze categorie voldoet De TV 551 701 Navigator bezit connectoren voor de ingangen uitgangen en voor de seri le communicatie die aangesloten moeten worden op de externe circuits zodat geen enkel deel onder spanning toegankelijk is Controleer of de inrichting verbonden met de TV 551 701 Navigator goed geisoleerd is ook in geval van een enkele storing zoals voorzien door de norm EN 61010 1 Zie Technical Information voor installatie van accessoires die als optie verkrijgbaar zijn TV 551 701 Navigator User Manual 87 900 934 01 M 93 300 6 Bedrijfshandleiding Gebruik In deze paragraaf worden de belangrijkste gebruiksprocedures vermeld Breng alle elektrische en pneumatische aansluitingen tot stand alvorens het systeem te gebruiken Tijdens de eventuele verwarming van de vacu mkamer mag de temperatuur op de inlaatflens niet meer dan 120 C bedragen Laat de pomp nooit draaien als de inlaatflens niet op de vacu mkamer is aangesloten of als de afsluitflens niet gesloten is Raak de turbopomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken VOORZICHTIG Vermijd schokk
70. USTOMER INFORMATION Com Name Comact Name Tel Email Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only O Taxable O Non taxable 2 PRODUCT IDENTIFICATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if reguesting a billable service 3A LI Non Billable LI Billable mmm New PO hard copy must be submitted with this form 3B exchange Repair upgrade _IConsignment Demo calibration evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed ta the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic Corrosive Reactive 1 Flammable El Explosive 1 Biological Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous
71. V 551 701 Navigator n o pode ser danificado permanecendo simplesmente exposto atmosfera Aconselha se no entanto manter a bomba fechada at o momento da instala o no sistema para evitar eventuais acumula es de p 76 300 TV 551 701 Navigator User Manual 87 900 934 01 M Instalac o Manual de Istruc es 5 Instale este equipamento somente em locais fechados e para todos os efeitos n o utilize o equipamento em ambientes expostos aos efeitos delet rios do tempo chuva gelo neve em ambientes sujeitos a p gases agressivos ambientes explosivos ou com alto risco de inc ndio Durante o funcionamento necess rio que sejam respeitadas as seguintes condi es ambientais press o m xima 2 bar al m da press o atmosf rica temperatura de 5 C a 35 C consultar a planilha no ap ndice Technical Information a humidade relativa 0 90 n o condensante Remover a etiqueta autocolante e retirar a tampa de protec o somente no momento de ligar a turbobomba ao sistema Figura 2 Na presen a de campos electromagn ticos a bomba deve ser protegida atrav s de blindagens adequadas Para ulteriores detalhes consultar o ap ndice Technical Information O TV 551 701 Navigator deve ser ligado a uma bomba prim ria consultar esquema em Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 71 300 5 Manual de Istru es Fixacao da bom
72. a GROUND signal and the open collector pin are available 254 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 24 Vdc 5 Vdc Customer s device Controller TRE NPN A 24 Vdc PNP 5 Vdc Cust s device Controller TAL Figure 25 Case TV 551 701 Navigator User Manual 87 900 934 01 M 255 300 17 Technical Information 256 300 24 Vdc Customer s device Controller X 5 Vdc TER 24 Vdc SE Controller Customer s i device dia 3 Vde JAK x or Figure 26 Case 2 with relay utilisation TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 24 Vdc Customer s i device rer Controller A PNP 5 Vdc z JA K 24 Vdc Controller Customer s device idis HE E NPN mr Figure 27 Case 2 with transistor utilisation TV 551 701 Navigator User Manual 87 900 934 01 M 257 300 17 Technical Information P2 Serial Figure 28 9 pin connector This is a 9 pin D type serial input output connector to control via an RS 232 or RS 485 connection the TV 551 701 Tab 5 Signal characteristics and use Pin N Signal name
73. a temperatura puede provocar lesiones a las personas Evitense golpes oscilaciones o bruscos desplazamientos de la turbobomba durante su funcionamiento Los cojinetes podrian dafiarse Para el envio de aire de la bomba utilizar aire o gas inerte sin polvo o particulas La presi n de entrada a traves de la puerta deber ser inferior a 2 bar por encima de la presi n atmosf rica Para bombear gases agresivos estas bombas est n dotadas de una puerta especifica mediante la cual es necesario suministrar a la bomba un caudal de gas inerte Nitr geno o Arg n para proteger los rodamientos v ase el anexo Technical Information j ADVERTENCIA Cuando la bomba se utiliza para bombear gases t xicos inflamables o radioactivos seguir los procedimientos apropiados t picos de cada gas No usar la bomba cuando haya gases explosivos 66 300 TV 551 701 Navigator User Manual 87 900 934 01 M Manual de istrucciones 4 Encendido y Uso del TV 551 701 Navigator Para encender el TV 551 701 Navigator basta con suministrar la tensi n de alimentaci n El controlador incorporado reconoce autom ticamente la presencia de las sefiales de interbloqueo y de arranque y activa la bomba La modalidad Soft Start est prevista para poner en marcha la bomba luego de un periodo prolongado de inactividad Para utilizar una puesta en marcha Soft Start activa es necesario habilitar la forma anteriormente indicada mediante software
74. a IC 63250 DCMZ kiinnitinm r ja niiden kiristysmomentit Tab 1 LAIPPA MAA RA KIRISTYS MOMENTTI ISO 160 10 35 Nm ISO 200 8 35 Nm Seuraavassa taulukossa ilmoitetaan jokaiselle ISO F laipalle sruuvien kiinnitinmaara ja niiden kiristysmomentit Tab 2 LAIPPA MAA RA KIRISTYS MOMENTTI ISO 160 F 8 5 Nm ISO 200 F 12 5 Nm Laippojen F ter sruuvien tulee olla luokkaa gt 8 8 Turbopumppu ConFlat sis ntulolaipalla tulee kiinnitt tyhji kammioon sopivien Agilentin mekaanisten varusteiden avulla Lis tietoja l ytyy Technical Information liitteest TV 551 701 Navigator voidaan asentaa mihin tahansa asentoon TV 551 701 Navigator User Manual 87 900 934 01 M 147 300 10 Ohjek sikirja TV 551 701 Navigatoria ei voida kiinnitt perustansa kautta HUOMIO TV 511 701 Navigator kuuluu toiseen EN 61010 1 s nn sten mukaiseen asennusluokkaan tai ylij nniteluokkaan Kytke laite t m n vuoksi s hk verkkoon joka t ytt t m n luokan vaatimukset TV 551 701 Navigator laitteissa on liittimet sis ntuloille ulostuloille sek sarjakytkenn lle jotka on kytkett v ulkoisiin j rjestelmiin siten ettei mihink n j nnitteen alaisena olevaan osaan p st k siksi Varmista ett TV 551 701 Navigator laitteeseen kytketyn laitteen eristys riitt my s yksitt isen toimintah iri n yhteydess EN 61010 1 s nn sten edellytt m ll tavalla Ks Technical Information liitett lis v
75. abb le ll st k vet elind t s ra szolg l A Soft Start m d ind t s hoz azt aktiv lni kell a megfelel szoftver paranccsal l sd RS 232 485 COMMUNICATION DESCRIPTION a Technical Information f ggel kben A TV 551 701 Navigatoron elhelyezett z ld LED a villog s nak gyakoris g val jelzi a rendszer zemi k r lm nyeit a nem villog sn l a szivatty rendesen forog lassan villog kb 400 ms peri dus a rendszer emelked ben f kez sben ll s vagy Waiting for interlock llapotban van a gyorsan villog kb 200 ms peri dus hibafelt tel A TV 551 701 Navigator kikapcsol sa A TV 551 701 Navigator kikapcsol s hoz le kell kapcsolni a t pfesz lts get A be p tett vez rl azonnal le ll tja a szivatty t 164 300 TV 551 701 Navigator User Manual 87 900 934 01 M Felhaszn l i K zik nyv 11 A gepkezel biztons ga rdek ben a Turbo V vez rl egyseget h romeres bet pk bellel kell ell tni l sd a megrendelhet alkatr szek t bl zat t ami egyik vegen nemzetk zi szabv ny szerinti csatlakoz dug val van ell tva Ezt a k belt s csatlakoz dug t megfelel en f ldelt csatlakoz aljazattal haszn lja hogy elker lje az aram tes vesz ly t s eleget tegyen az EK normativ iban lefektetett biztons gi k vetelmenyeknek A magasfesz ltseg ami az ellen rz egys gben keletkezik s lyos s riil seket s t hal lt okozhat Miel tt az egys g belsej
76. aconseja mantener cerrada la bomba hasta que se instale en el sistema para evitar su posible contaminaci n por polvo 62 300 TV 551 701 Navigator User Manual 87 900 934 01 M Manual de istrucciones 4 Instalacion Este equipo debe ser instalado s lo en ambientes cerrados y en ninguna circunstancia podr utilizarse en ambientes expuestos a agentes atmosf ricos lluvia hielo nieve polvos gases agresivos ni en ambientes explosivos o sujetos a elevado riesgo de incendio Durante el funcionamiento es necesario que se respeten las condiciones ambientales siguientes presi n m xima 2 bares por encima de la presi n atmosf rica temperatura de 5 C a 35 C v ase gr fico en el anexo Technical Information humedad relativa 0 90 no condensadora ATENCI N Despegar el adhesivo y quitar el tap n de protecci n s lo al conectar la bomba al sistema Figura 2 Cuando existan campos electromagn ticos la bomba ha de protegerse mediante pantallas oportunas V ase el anexo Technical Information para m s detalles El TV 551 701 Navigator ha de conectarse a una bomba primaria v ase diagrama en Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 63 300 4 Manual de istrucciones Fijaci n de la bomba VON MANS TNM En caso de da arse el rotor la conexi n entre la bomba y el sistema puede 64 300 ser sometida a un par de fuerza exces
77. ada de Emergencia Para detener en condiciones de emergencia el TV 551 701 Navigator es necesario desconectar del controlador el cable de alimentaci n 68 300 TV 551 701 Navigator User Manual 87 900 934 01 M Manual de istrucciones 4 Mantenimiento El TV 551 701 Navigator no necesita ning n mantenimiento Cualquier operaci n deber ser realizada por personal autorizado Antes de realizar cualquier operaci n en el sistema desconectarlo de la corriente enviar aire de la bomba abriendo la v lvula oportuna esperar hasta que el rotor se pare completamente y esperar a que la temperatura superficial de la bomba sea inferior a 50 C En caso de averia se podr utilizar el servicio de reparaci n Agilent que permite obtener una bomba regenerada para sustituir la averiada Antes de enviar al fabricante una bomba para su reparaci n o advanced exchange service es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Seguridad y Salud adjunta al presente manual de instrucciones Una copia de la misma se deber introducir en el embalaje del sistema antes de enviarlo En caso de que la bomba se tenga que desguazar eliminarla respetando las normas nacionales espec ficas TV 551 701 Navigator User Manual 87 900 934 01 M 69 300 4 Manual de istrucciones Eliminacion 70 300 Significado del logotipo WEEE presente en las etiguetas El simbolo que se indica a continuaci n es
78. aiting for interloc Hitro utripanje perioda pribli no 200 ms Napaka Izklop naprave TV 551 701 Navigator Za izklop naprave TV 551 701 Navigator morate prekiniti dovod napetosti Vgrajen kontroler takoj zaustavi rpalko SVARILO Za varnost operaterja mora biti krmilnik Turbo V napajan preko triveznega napajalnega kabla glej tabelo delov ki se lahko naro ijo z vtika em potrjen na mednarodnem nivoju Uporabljajte ta kabel in vtika skupaj s primerno ozemljeno vti nico tako da vas tok ne strese in da zadovoljite EU predpisom Visoka napetost ki je prisotna v krmilniku lahko povzro i hude po kodbe ali smrt Preden za nete z vzdr evalnimi postopki v notranjosti izvlecite napajalni kabel Zaustavitev v sili 218 300 Za takoj enj izklop naprave TV 551 701 Navigator je treba izklju iti napetostni kabel iz napetosti TV 551 701 Navigator User Manual 87 900 934 01 M Priro nik za Navodila 15 Vzdrzevanje Naprave TV 551 701 Navigator ni potrebno vzdr evati Kakr no koli delo na sistemu mora opraviti avtorizirano osebje SVARILO Pred za etkom dela na sistemu ga izklju ite iz napetosti pre istite rpalko tako da odprete primerno odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru okvare kontaktirajte lokalni Agilent servisni center ki vam lahko zamenja pokvarjeno rpalko s popravljeno Preden odnese
79. al est aplicado N O deve ser eliminado juntamente com os res duos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Portanto convidamos o utilizador final a contactar o fornecedor do dispositivo seja este o fabricante ou um revendedor para encaminhar o processo de recolha e elimina o ap s a oportuna verifica o dos termos e condi es do contrato de venda N ana N TI 4 NA N J S N OY TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen 86 Algemene informatie 86 Opslag 89 Voorbereiding voor installatie 90 Installatie 91 Bevestiging van de pomp 92 Gebruik 94 Inschakeling en gebruik van de TV 551 701 Navigator 95 Afzetten van de TV 551 701 Navigator 95 Noodstop 96 Onderhoud 97 Afvalverwerking 98 Vertaling van de originele instructies M Agilent Technologies 85 300 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen De turbomoleculaire pompen die in deze handleiding worden besproken hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de rotor breekt kan de rotatie energie vrijkomen vue AN Om schade aan de apparatuur en lets
80. ance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale 232 300 TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual 17 Technical Information Description of the TV 551 701 Navigator 235 TV 551 Navigator Kit Models 236 TV 701 Navigator Kit Models 238 Pump Description 239 Controller Description 241 Technical Specification 242 TV 551 701 Navigator outline 244 Interconnections 248 P3 Vent 248 P4 External Fan 249 J1 In Out 249 Signal Description 250 How to Connect the Open Collector Inputs of the Controller P2 Serial 258 RS 232 RS 485 Communication Description 259 Communication Protocol 259 Window Meanings 264 Inlet Screen Installation 268 Heater band installation 271 Air Cooling Kit Installation 273 TV 551 701 with Navigator Controller 273 TV 551 701 Pump with Standard Rack Controller 275 Water Cooling Kit Installation 277 Original Instructions E Agilent Technologies 233 300 17 Technical Informatio
81. any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Governm
82. aplicado en observancia de la directiva CE denominada WEEE Este simbolo valido solo para los paises miembros de la Comunidad Europea indica gue el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario debera ser sometido a un procedimiento de recogida diferenciada Por lo tanto se invita al usuario final a ponerse en contacto con el proveedor del dispositivo tanto si ste es la casa fabricante o un distribuidor para poder proveer a la recogida y eliminaci n del producto despu s de haber efectuado una verificaci n de los t rminos y condiciones contractuales de venta AN EE pe 4 X L N TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual 5 Manual de Istruc es Indicac es de Seguranca para Bombas Turbomoleculares 72 Informac es gerais 72 Armazenagem 75 Prepara o para a instala o 76 Instala o 71 Fixa o da bomba 78 Utiliza o 80 Acendimento e Utiliza o do TV 551 701 Navi gator 81 Paragem do TV 551 701 Navigator 81 Paragem de Emerg ncia 82 Manuten o 83 Elimina o 84 Tradu o das instru es originais Ee Agilent Technologies 71 300 5 Manual de Istru es Indicac es de Seguranca para Bombas Turbomoleculares As bombas turbomoleculares descritas no seguinte Manual de Instruc es tem uma alta quantidade de energia
83. arima nincs csatlakoztatva a v kuumkamr hoz nem z rja azt le a lez r karima Ne erintse meg a turb szivatty t vagy annak tartozekait a melegitesi folyamat k zben A magas h merseklet egesi ser l amp seket okozhat TA dana Kerilje a szivatty t s t r z s t vagy durva mozgat s t zem k zben A csap gyak megs r lhetnek Haszn ljon port l s szil rd r szekt l mentes leveg t vagy k z mb s g zt a szivatty szell ztet s hez A szell z porton l v nyom snak 2 barn l kisebbnek kell lennie a l gk ri nyom s f l tt Agressz v g zok szivatty z s hoz ezek a szivatty k fel vannak szerelve egy k l nleges porttal hogy lehet v tegy k k z mb s gaz pl Nz Ar stabil raml s t v delmet visel szivatty sz m ra l sd Technical Information f ggel k VESZ LY Amikor a szivatty t m rgez t zvesz lyes vagy radioakt v g zok szivatty z s ra haszn lja k vesse az egyes g zok kezel s re vonatkoz elj r sokat Ne haszn lja a szivatty t robban g zok jelenl t ben TV 551 701 Navigator User Manual 87 900 934 01 M 163 300 11 Felhaszn l i K zik nyv A TV 551 701 Navigator bekapcsol sa s haszn lata A TV 551 701 Navigator bekapcsol s hoz r kell kapcsolni a t pfesz lts get A be p tett vez rl automatikusan felismeri a kapcsolatot s a start jel jelenl t t s elind tja a szivatty t A Soft Start m d a szivatty hossz
84. arusteiden asentamista varten 148 300 TV 551 701 Navigator User Manual 87 900 934 01 M K ytt Ohjek sikirja 10 T h n kappaleeseen on kirjattu t rkeimm t k ytt toimenpiteet Suorittakaa ennen j rjestelm n k ytt kaikki s hk ja paineilmakytkenn t Tyhji kammion mahdollisen l mmityksen aikana sis ntulolaipan l mp tila ei saa ylitt 120 C tta VAROITUS lk k ytt k pumppua ellei sis ntulolaippaa ole kytketty tyhji kammioon tai pumppua suljettu sulkulaipalla lk koskeko turbopumppuun tai sen lis osiin l mmitt misen aikana Korkea l mp tila saattaa aiheuttaa henkil iden loukkaantumisia V lt kolhuja heiluntaa tai kkiliikkeit turbopumpun toiminnan aikana sill laakerit voivat vahingoittua K yt pumpun ilmansy tt n ilmaa tai jalokaasua joissa ei ole p ly tai hiukkasia Erityisen aukon l pi sy tett v n paineen tulee olla alle 2 baaria yli atmosf risen paineen Pumput on varustettu aggressiivisten kaasujen pumppausta varten aukolla jonka l pi pumppuun kuljetetaan jalokaasuja typpi tai argon laakereiden suojaamiseksi katso Technical Information liite VAROITUS Kun pumppua k ytet n myrkyllisten paloherkkien tai radioaktiivisten kaasujen pumppaamiseen noudattakaa jokaiselle kaasulle sopivaa menettelytapaa lk k ytt k pumppua r j hdysherkkien kaasujen l hell TV 551 701 Navigator User Manual 8
85. as turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez el per odo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de env o al cliente ATENCI N En caso de superarse por cualquier motivo el periodo m ximo permitido de almacenamiento ser necesario devolver la bomba al fabricante Para mayores informaciones al respecto se ruega contactar con el representante local de Agilent TV 551 701 Navigator User Manual 87 900 934 01 M 61 300 4 Manual de istrucciones Preparaci n para la instalaci n El TV 551 701 Navigator se suministra en un embalaje especial de protecci n si se observan dafios que podrian haberse producido durante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de que no se caiga el TV 551 701 Navigator y de no someterlo a golpes o vibraciones No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con la directiva CEE 85 399 para la preservaci n del medio ambiente ATENCI N Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vacio Utilizar siempre guantes u otra protecci n adecuada Figura 1 EI TV 551 701 Navigator no puede dafiarse permaneciendo simplemente expuesto a la atm sfera De todas formas se
86. ato rimanendo semplicemente esposto all atmosfera Si consiglia comun que di mantenere chiusa la pompa fino al momento dell installazione sul sistema onde evitare eventuale inquina mento da polvere 20 300 TV 551 701 Navigator User Manual 87 900 934 01 M Istruzioni per l uso 1 Installazione Non installare e o utilizzare la pompa in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento amp necessario che siano rispettate le seguenti condizioni ambientali a pressione massima 2 bar oltre la pressione atmosferica temperatura da 5 C a 35 C vedere grafico nel appendice Technical Information a umidit relativa 0 90 non condensante werd l3 Staccare l adesivo e togliere il tappo di protezione solo al momento del collegamento della turbopompa al sistema Figura 2 In presenza di campi elettromagnetici la pompa deve essere protetta tramite opportuni schermi Vedere l appendice Technical Information per ulteriori dettagli I TV 551 701 Navigator deve essere collegato ad una pompa primaria vedere schema in Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 21 300 1 Istruzioni per uso Fissaggio della pompa ANS TZEN Se si verifica un danno al rotore la connessione tra la pompa ed il sistema 22 300 potrebbe essere s
87. ba ATEN AO Em caso de dano no rotor a liga o entre a bomba e o sistema corre o risco 78 300 de sofrer um torque muito grande Se a ligac o n o resistir de maneira suficiente ao referido torgue a bomba pode soltar se do sistema ou o motor pode soltar se do inv lucro da bomba Nesse caso fragmentos de metal podem ser projectados da bomba ou do sistema que podem provocar les es graves ou a morte e ou danificar os eguipamentos adjacentes Colocar o TV 551 701 Navigator em posic o est vel fixando o flange de entrada da turbobomba ao contra flange do sistema com uma ligac o que resista a um torque de 8600 Nm volta do seu eixo Por exemplo o flange ISO K pode ser fixado com bornes de aco de alta resist ncia como o modelo Agilent IC 63250 DCMZ A tabela a seguir cont m por cada flange o n mero de bornes IC 63250 DCMZ necess rios e o respectivo torque de aperto Tab 1 Flange N Torque de aperto ISO 160 10 35 Nm ISO 200 8 35 Nm A tabela a seguir cont m por cada flange ISO F o n mero dos parafusos necess rios e o respectivo torque de aperto Tab 2 Flange N Torque de aperto ISO 160 F 8 5 Nm A classe de resistencia dos parafusos de aco para as flanges F deve ser gt 8 8 TV 551 701 Navigator User Manual 87 900 934 01 M Manual de Istruc es 5 A turbobomba com flange de entrada ConFlat deve ser fixada na c mara de v cuo atrav s de parafusos especificos da mec nica Agilen
88. blik n m a bez blik n v v va se ot norm ln pomal blik n interval cca 400 ms syst m se pozvolna rozb h nebo brzd nebo stoj nebo je ve stavu ek n na blokov n a rychl blik n interval cca 200 ms poruchov stav Vypnut v v vy TV 551 701 Navigator Pro vypnut v v vy TV 551 701 Navigator je nutn p eru it s ov nap t Vestav n regul tor v v vu okam it zastav 192 300 TV 551 701 Navigator User Manual 87 900 934 01 M Navod k Pou iti 13 Pro zaji t ni bezpe nosti obsluhy musi byt TV 903 Pumping System Power Supply 969 6501 nap jen troj ilov m piivodnim kabelem viz tabulka dil ktere Ize doobjednat se zastr kou mezinarodn schv lenou Pou ivejte tento kabel se z str kou a pat i n uzemn nou z suvku abyste p ede li razu elektrick m proudem a aby byly zaru en po adavky norem ES Vysok nap ti kter vznik v regul toru m e zp sobit v n zran ni i smrteln Pred provad nim z sah dr by uvniti jednotky pfivodni kabel odpojte Nouzov zastaven Pro okam it zastaven vyv vy TV 551 701 Navigator v nouzov situaci je t eba odpojit nap jec kabel ze s ov z suvky TV 551 701 Navigator User Manual 87 900 934 01 M 193 300 13 N vod k Pou it Udr ba Vyv va TV 551 701 Navigator nevyZaduje adnou udr bu Vesker prace na tomto zafizeni musi prov det opr vnen amp
89. ce mod 969 9831 men Figure 50 The vent device has adjustable delay time up to 36 min This value can be used only with rack controller To install the vent device unscrew and remov e the threaded plug see figure below Figure 51 TV 551 701 Navigator User Manual 87 900 934 01 M 281 300 17 Technical Information Screw the flange mod 969 9108 on the pump taking care of the o ring right position Assemble the seal ring and lock the vent device in position using the KF klamp KF klamp Figure 52 Vibration Isolator Installation 282 300 Six vibration isolators for ISO and CFF inlet flange version pumps are available as accessories The four model part numbers are the following model 969 9345 for ISO 160 flange model 969 9346 for ISO 200 flange model 969 9334 for CFF 6 flange model 969 9335 for CFF 8 flange model 969 9336 for CFF 10 flange They typically reduce the vibration transmitted from the TV 551 701 Navigator to the system by a factor of 20 Please refer to the relevant instruction manual TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 Purge Valve Installation A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump To install the gas purge valve it is necessary to unscrew the purge po
90. chnical Information TV 551 701 Navigator User Manual 87 900 934 01 M Podrecznik Instrukcji 12 Uzytkowanie W tym paragrafie zostaly przedstawione gl wne procedury operatywne Przed zastosowaniem systemu nale y wykona wszystkie potaczenia elektryczne i pneumatyczne Podczas ewentualnego nagrzania komory pro niowej temperatura na kolnierzu nie mo e przekroczy 120 C ZAGROZENIE Nigdy nie nalezy uruchomi pompe w przypadku kiedy kotnierz wejsciowy nie jest podtaczony do komory lub nie jest zamkniety z kotnierzem zamkniecia Nie dotyka turbopompy i jej ewentualnych akcesoriow podczas operacji nagrzewania Wysoka temperatura mo e spowodowa uszkodzenia ciata na osobach UWAGA Unika uderze waha lub gwa townych przesuni turbopompy podczas jej dzia ania Mog uszkodzi si o yska Dla wlotu do powietrza pompy zastosowa powietrze lub oboj tny gaz bez py u lub innych cz stek Ci nienie wej ciowe poprzez odpowiedni wlot musi by ni sze od 2 bar ponad ci nienie atmosferyczne Dla pompowania niszcz cych gaz w pompy te s wyposa one w odpowiedi wlot poprzez kt ry nale y dostarczy pompie przep yw oboj tnego gazu Azot Argon dla zabezpieczenia o ysk Patrz dodatek Technical Information Kiedy pompa jest stosowana do pompowania gaz w toksycznych atwo palnych lub radioaktywnych nale y wykona odpowiednie procedury typowe dla ka dego z gaz w Nie stosowa
91. cin tica devida a alta velocidade de rotagao unida a massa especifica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o estator ou uma ruptura do rotor a energia de rotac o poderia ser liberada ATEN AO Para evitar danos aparelhagem e prevenir les es aos operadores necess rio seguir atentamente as instru es de instala o descritas neste manual 72 300 TV 551 701 Navigator User Manual 87 900 934 01 M Manual de Istruc es 5 Informac es gerais Esta aparelhagem destina se a uso profissional O utilizador deve ler atentamente o presente manual de instruc es e todas as informac es adicionais fornecidas pela Agilent antes de utilizar a aparelhagem A Agilent n o se responsabiliza pela inobserv ncia total ou parcial das instruc es pelo uso indevido por parte de pessoas n o treinadas por operac es n o autorizadas ou pelo uso contr rio s normas nacionais especificas O TV 551 701 Navigator um sistema integrado constitu do por uma bomba turbomolecular para aplica es de alto e ultra alto v cuo integrada no relativo controller O sistema capaz de bombear qualquer tipo de g s ou de composto gasoso mas n o adequado para bombear l quidos ou part culas s lidas O efeito da bomba obtido atrav s de uma turbina rotativa de alta velocidade 42000 r p m m x movida por um motor el ctrico trif sico de alto rendimento O TV 551
92. cted to external circuits in such a way that no electrical part is accessible Be sure that the insulation of the device connected to the TV 551 701 Navigator is adequate even in the case of single fault as per directive EN 61010 1 228 300 TV 551 701 Navigator User Manual 87 900 934 01 M Use Instructions for Use 16 This paragraph details the fundamental operating procedures Make all electrical and pneumatic connections before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed 120 C Never use the turbopump when the inlet flange is not connected to the vacuum chamber Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become dam aged Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure For pumping aggressive gases these pumps are fitted with a special port to allow a steady flow of inert gas like N2 Ar for pump bearing protection see the appendix Technical Information When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases TV 551 701 Navigat
93. de soft Start a Le temps de stockage d une pompe turbomol culaire est de 10 mois compter de la date d exp dition unfall En cas de d passement du temps de stockage pour toutes raisons la pompe doit tre retourn e en usine Pour tout renseignement contacter le repr sentant Agilent de zone TV 551 701 Navigator User Manual 87 900 934 01 M 47 300 3 Mode d emploi Preparation pour l installation ATTENTION Le TV 551 701 Navigator est livr dans un emballage de protection sp cial en cas d endommagement de l emballage pouvant s tre produit pendant le transport contacter le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber le TV 551 701 Navigator et ne lui faire subir aucun choc et aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et conforme la directive CEE 85 399 en mati re de protection de l environnement Afin d viter tout probl me de d gazage ne pas toucher mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e Figure 1 Le TV 551 701 ne peut s endommager en restant simplement expos l atmosph re Toutefois afin d viter toute pollution due la poussi re il est conseill de le garder dans son emballage clos jusqu au moment de l installation 48 300 TV 551
94. drift f r f rsta g ngen De turbomolekyl ra pumparna kan lagras i 10 m nader fran leveransdatumet Om lagringstiden av n gon anledning r l ngre m ste pumpen skickas tillbaka till fabriken Var god och kontakta den lokala Agilent terf rs ljaren f r ytterligare information 116 300 TV 551 701 Navigator User Manual 87 900 934 01 M Bruksanvisning 8 F rberedelser f r installation TV 551 701 Navigator levereras i ett s rskilt skyddande emballage Kontakta det lokala f rs ljningskontoret om emballaget visar tecken p skador som kan ha uppst tt under transporten Se till att TV 551 701 Navigator inte tappas eller uts tts f r st tar vid uppackningen Kasta inte packmaterialet i soporna Materialet r tervinningsbart till 100 och uppfyller EU direktiv 85 399 om milj skydd etta a i Komponenter som skall uts ttas f r vakuum f r inte hanteras med bara h nder pga kontamineringsrisken Anv nd alltid handskar eller liknande skydd PA Se N N a Figur 1 Normal p verkan fr n omgivningen kan inte skada TV 551 701 Navigator Trots det r det s krast att h lla pumpen nerpackad tills den har installerats i systemet f r att f rhindra att det kommer in damm eller annat i den TV 551 701 Navigator User Manual 87 900 934 01 M 117 300 8 Bruksanvisning Installation Installera och anv nd inte pumpen i milj er som uts tts f r p verkan fr n atmo
95. durante as opera es de aquecimento A elevada temperatura pode causar les es s pessoas Evitar colis es oscila es ou deslocamentos bruscos da turbobomba quando est a funcionar Os rolamentos poderiam sofrer danos Para a sa da de ar da bomba utilizar ar ou g s inerte sem poeiras ou part culas A press o de entrada atrav s da porta espec fica deve ser inferior a 2 bar acima da press o atmosf rica Para bombear gases agressivos estas bombas est o equipadas com uma porta espec fica atrav s da qual necess rio fornecer bomba um fluxo de g s inerte Azoto ou Argon para proteger os rolamentos consultar o ap ndice Technical Information ATENCAO Quando a bomba utilizada para bombear gases t xicos inflam veis ou radioactivos seguir os procedimentos adequados tipicos para cada g s N o usar bomba na presenca de gases explosivos 80 300 TV 551 701 Navigator User Manual 87 900 934 01 M Manual de Istruc es 5 Acendimento e Utilizac o do TV 551 701 Navigator Para ligar o TV 551 701 suficiente fornecer a tens o de alimentac o O controller incorporado reconhece automaticamente os sinais de interlock e de activac o e acciona a bomba O modo Soft Start previsto para ligar a bomba ap s um longo per odo de paragem Para ter um arranque com Soft Start activo necess rio habilitar o modo mencionado anteriormente utilizando o software consultar o par grafo RS232 485
96. e TV 551 701 Navigator User Manual 87 900 934 01 M 249 300 17 Technical Information Tab 4 Signal characteristics and use Pin N Signal name In Output NE EE efi NS 2 Start Stop In 3 Interlock In 4 5 6 1 8 Soft start In 9 10 Contact normally open 11 Programmable set point Out 12 Contact normally open o TMT lt gt lt non i lt TT 50004 15 e Ground Out e Programmable analog signal Signal Description Start Stop input signal to start or stop the pump With the supplied cover connector the START STOP signal is connected to the 24 Vdc pin and the START STOP signal to the GROUND pin in this condition the pump automatically starts as soon as the controller recognises the input supply Plug amp Pump Interlock input signal to control the pump rotation With the supplied cover connector the interlock signal is connected to the 24 Vdc pin and the interlock signal to the GROUND pin Speed setting PWM input signal to set the pump speed The PWM signal characteristics must be the following frequency 100 Hz 20 250 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 amplitude 24 V max duty cycle range from 25 to 75 corresponding to an output frequency from 272 Hz to 714 Hz see the following diagram 800 714 700 Excitation Frequency Hz 300 272
97. e 9 Model 969 8837 Pump Description The pump consists of a high frequency motor driving a turbine fitted with 8 bladed stages and 4 Macrotorr stages The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The turbine is made of high strength aluminium alloy machined from a single block Proceeding from the high vacuum to the for vacuum region the turbine stages sequence is Ist stage with a blade angle of 40 a 2nd stage with a blade angle of 34 a 8rd stage with a blade angle of 28 Ath and 5th stages with a blade angle of 24 6th stage with a blade angle of 20 7th and 8th stages with a blade angle of 16 The Macrotorr stages are in the form of four discs The turbine rotor is supported by permanently lu bricated high precision ceramic ball bearings in stalled on the forevacuum side of the pump TV 551 701 Navigator User Manual 87 900 934 01 M 239 300 17 Technical Information The static blades of the stator are made of stain less steel These are supported and accurately po sitioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding rotor discs These are made of aluminium alloy During normal operation the motor is fed with a voltage of 54 Vac three phase at 715 Hz To re duce losses during start up to a minimum the fre quency increases accordin
98. e alimentar un ventilador adicional accionar la v lvula de ventilaci n pilotarla a distancia con un ordenador host conectado mediante linea serial RS 232 RS 485 A continuaci n se facilita toda la informaci n necesaria para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informaci n m s detallada TV 551 701 Navigator User Manual 87 900 934 01 M 59 300 4 Manual de istrucciones Este manual utiliza las convenciones siguientes ATENCI N Los mensajes de atenci n se visualizan antes de los procedimientos que al no respetarse podr an provocar da os al equipo tud 4 Los mensajes de advertencia atraen la atenci n del operador sobre un procedimiento o una operaci n especifica que al no realizarse correctamente podr a provocar graves lesiones personales Las notas contienen informaci n importante extra da del texto 60 300 TV 551 701 Navigator User Manual 87 900 934 01 M Manual de istrucciones 4 Almacenamiento Para garantizar el nivel m ximo de funcionalidad y fiabilidad de las bombas turbomoleculares Agilent deber n aplicarse las siguientes instrucciones durante el transporte desplazamiento y almacenamiento de las bombas no deber n superarse las siguientes condiciones ambientales temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 6 no condensante el cliente deber activar siempre las bomb
99. e pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer in werking worden gesteld de opslagtijd van een turbomoleculaire pomp bedraagt 10 maanden vanaf de verzenddatum ali Vile tel Indien om een willekeurige reden de opslagtijd langer is moet de pomp weer naar de fabriek worden gestuurd Voor meer informatie wordt verzocht contact op te nemen met de plaatselijke vertegenwoordiger van Agilent TV 551 701 Navigator User Manual 87 900 934 01 M 89 300 6 Bedrijfshandleiding Voorbereiding voor installatie OORZICHTIG De TV 551 701 Navigator wordt in een speciale beschermende verpakking geleverd als er schade wordt geconstateerd die tijdens het transport veroorzaakt zou kunnen zijn meteen contact opnemen met het plaatselijke verkoopkantoor Zorg er bij het uitpakken voor dat de TV 551 701 Navigator niet kan vallen en geen stoten of trillingen te verduren krijgt Laat de verpakking niet ergens buiten achter Het verpakkingsmateriaal is volledig recyclebaar en voldoet aan de EEG milieurichtlijn 85 399 Om ontgassingsproblemen te voorkomen mogen de componenten die met het vacu m in aanraking komen niet met de blote handen aangeraakt worden Gebruik altijd handschoenen of een andere geschikte bescherming Figuur 1 De TV 551 701 Navigator kan niet beschadigd worden door eenvoudigweg aan de atmosfeer blootgesteld te worden Toch wordt aangeraden om de pomp gesloten
100. e que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un systeme de collecte s lective Apres avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en ceuvre le processus de collecte et mise au rebut NY M N 4 OY ABBE 56 300 TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares 58 Informaci n general 58 Almacenamiento 61 Preparaci n para la instalaci n 62 Instalaci n 63 Fijaci n de la bomba 64 Uso66 Encendido y Uso del TV 551 701 Navigator 67 Parada del TV 551 701 Navigator 67 Parada de Emergencia 68 Mantenimiento 69 Eliminaci n 70 Traducci n de las instrucciones originales Ee Agilent Technologies 57 300 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energia cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un dafio del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energ a de rotaci n podr a se
101. ective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F Ili Varlan 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS TEL N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to fail
102. ed data is the corresponding ASCII character 260 300 lt STX gt Start of transmission 0x02 a lt ADDR gt Unit address 0x80 for RS 232 lt ADDR gt Unit address 0x80 device number 0 to 31 for RS 485 a lt WIN gt Window a string of 3 numeric character indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph lt COM gt Command 0x30 to read the window 0x31 to write into the window a DATA an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not present The field length is variable according to the data type as per the following table Tab 6 Data type Field length Valid characters Logic L 1 0 off 1 on Numeric N 6 o 0 9 right justified with 0 Alphanumeric A 10 from blank to ASCII lt ETX gt End of transmission 0x03 lt CRC gt XOR of all characters subsequent to lt STx gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII character The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same structure of the MESSAGE TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 1
103. ed turbine max 42000 rpm driven by a high performance 3 phase electric motor The TV 551 701 Navigator is free of contaminating agents and therefore is suitable for applications requiring a clean vacuum It is equipped with auxiliary connectors to supply an additional fan to control the vent valve to be controlled from a remote site by means of an host computer connected through a serial line RS232 or RS485 The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 223 300 16 Instructions for Use This manual uses the following standard protocol The caution messages are displayed before procedures which if not followed could cause damage to the equipment WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The notes contain important information taken from the text Storage In order to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps the following guidelines must be followed a when shipping moving and storing pumps the following environmental specifications should not be exceeded temperature range 20 C to 70 C relative h
104. ef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat Ni yes N TI 4 NG ZLA EN OY TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual 3 Mode d emploi Normes de s curit pour Pompe Turbomol culaires 44 Indications g n rales 44 Stockage 47 Preparation pour l installation 48 Installation 49 Fixation de la pompe 50 Utilisation 52 Mise en marche et utilisation du TV 551 701 Navigator 53 Arr t du TV 551 701 Navigator 53 Arr t d urgence 54 Entretien 55 Mise au rebut 56 Traduction de la mode d emploi originale 5 Agilent Technologies 43 300 3 Mode d emploi Normes de s curit pour Pompe Turbomoleculaires Les pompes Turbomol culaires d crites dans le Manuel d Instructions suivant ont une nergie cin tique lev e due la grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation pourrait tre lib r e AHSA AU Pour viter tout d g t aux appareillages et emp cher toute blessure aux op rateurs il faut suivre attentivement les instructions d installation d crites dans ce manuel 44 300 TV 551 701 Navigator Us
105. eindgebruiker wordt dus verzocht contact op te nemen met de leverancier van het apparaat zij het de fabrikant of een wederverkoper om het proces van gescheiden inzameling en verwerking in gang te zetten na de van toepassing zijnde termen en voorwaarden van het verkoopcontract te hebben gecontroleerd Ny N X J S 4 zn LX TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual 1 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper 100 Generel information 100 Opbevaring 102 Forberedelser for installation 103 Installation 104 Fastgorelse af pumpe 105 Anvendelse 107 Start og anvendelse af TV 551 701 Navigator 108 Stop af TV 551 701 Navigator 108 N dstop 109 Vedligeholdelse 110 Bortskaffelse 111 Oversattelse af originalinstruktionerne Agilent Technologies 33 20 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper De molekyl re turbopumper der er beskrevet i n rv rende brugsanvisning har en stor kinetisk energi der skyldes den hoje omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan omdrejningsenergien spredes L MNAT NIER For at undg materielle skader samt at operat rerne kommer til skade er det strengt n dvendigt n je at overholde installeringsvejledningen i denne brugsanv
106. el bij de bedieners te voorkomen moeten de installatie instructies in deze handleiding nauwgezet worden opgevolgd 86 300 TV 551 701 Navigator User Manual 87 900 934 01 M Bedrijfshandleiding 6 Algemene informatie Deze apparatuur is bestemd voor beroepsmatig gebruik De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door Agilent verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen Agilent acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen onoordeelkundig gebruik door niet hiervoor opgeleid personeel reparaties waarvoor geen toestemming is verkregen of gebruik in strijd met de specifieke nationale wetgeving De TV551 701 Navigator is een geintegreerd systeem dat uit een turbomoleculaire pomp voor hoge en ultrahoge vacu mtoepassingen plus bijbehorende controller bestaat Het systeem is in staat om elk type gas of gasverbinding te pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect wordt verkregen door een zeer snel draaiende turbine max 42 000 toeren min die aangedreven wordt door een elektrische draaistroommotor met hoog rendement De TV 551 701 Navigator is volledig vrij van verontreinigingen en is dus ook geschikt voor toepassingen die een schoon vacu m verlangen De TV 551 701 Navigator is bovendien van hulpconnectors voorzien waarmee een extra ventilator kan worden gev
107. emperature Vibration level displacement Lubricant Power supply Input voltage Input freg Max input power Stand by power Max operating power Protection fuse Compliance with Power cable Serial communication Navigator kit Installation category Pollution degree Storage temperature Weight kg Ibs ISO flange CF flange EN 1012 2 With European or NEMA plug 3 meters long optional Technical Information 17 120 C NE W re gt lt 45 dB A at 1 meter 100 to 240 Vac 50 60 Hz 600 VA 30 to 35 W TV 551 325 W with water cooling 220 W with air cooling TV 701 350 W with water cooling 250 W with air cooling 1x63A UNI EN 292 1 UNI EN 292 2 EN CENELEC 55011 IEC 1000 4 2 ex 801 2 IEC 1000 4 3 ex 801 3 IEC 1000 4 4 ex 801 4 EN 61010 1 IEC 1010 1 RS232 cable with a 9 pin D type male connector and a 9 pin D type female connector and Navigator software optional 2 20 C to 70 C 19 4 43 19 4 43 23 4 51 6 25 5 54 2 5 4 12 When the TV 551 701 Navigator has been stored at a temperature less than 5 C wait until the system has reached the above mentioned temperature TV 551 701 Navigator User Manual 87 900 934 01 M 243 300 17 Technical Information TV 551 701 Navigator outline The following figures show the TV 551 701 Navigator outlines dimensions are in inches mm 151 6 cer e IEW FROM A
108. en trillingen of bruuske verplaatsingen van de turbopomp wanneer deze in werking is De lagers kunnen anders beschadigd raken Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan 2 bar boven de atmosferische druk bedragen Deze pompen zijn voor het pompen van agressieve gassen van een speciale poort voorzien waardoor de pomp een stroom inert gas stikstof of argon ter bescherming van de lagers krijgt geleverd zie bijlage Technical Information WAARSCHUWING Wanneer de pomp wordt gebruikt voor het pompen van giftige brandbare of radioactieve gassen moeten de procedures worden gevolgd die speciaal voor elk type gas zijn opgesteld Gebruik de pomp niet in aanwezigheid van explosieve gassen 94 300 TV 551 701 Navigator User Manual 87 900 934 01 M Bedrijfshandleiding 6 Inschakeling en gebruik van de TV 551 701 Navigator Om de TV551 701 Navigator in te schakelen is het voldoende om deze van stroom te voorzien De ingebouwde controller herkent automatisch de aanwezigheid van interlock en startsignalen en start de pomp De Soft Start modus is voorzien om de pomp na een langdurige periode van stilstand in te schakelen Om met Soft Start te starten moet bovengenoemde modus via de software worden vrijgegeven zie paragraaf RS 2327485 COMMUNICATION DESCRIPTION in de bijlage Technical Information
109. en a bakeout is needed The heater band is applied to the upper part of the pump casing as shown in the figure and heats it to a temperature of about 80 C The heater band must be mounted such that there is perfect thermal contact with the pump wall to obtain fast and efficient heating Figure 38 TV 551 701 Navigator User Manual 87 900 934 01 M 271 300 17 Technical Information Heater band installation Switch on the heater while the turbopump is in operation In the event of turbopump overheat the pump will be automatically cut out by the thermistor sensor NOTE The turbopump must be baked only when operat ing with an inlet pressure less than 10 4 mbar and with water cooling CAUTION If the chamber of the system is baked at a high temperature a shield should be installed to pre vent thermal radiation heating the high vacuum flange on the pump The maximum temperature allowed for the inlet flange is 120 C 272 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 Air Cooling Kit Installation TV 551 701 with Navigator Controller An air cooling kit mod 969 9339 is available to improve the TV 551 701 cooling during heavy operational conditions optional Figure 39 Fan specifications air flow 200m h a input voltage 24 Vdc dimensions 127 x 127 x 38 mm 5 x 5 x 1 5 in power 4 7 W The fan bracket is shaped so that it ca
110. en tillsammans med en jordad anslutning f r att undvika st tar och enligt kr vande EU normer Den h ga sp nningen som framkallas av styrenheten kan orsaka personskador eller till och med d da Dra d rf r alltid ur str mkabeln innan eventuella underh llsarbeten utf rs inuti enheten N dstopp Dra ut elsladden fr n styrenheten f r att utf ra ett n dstopp av TV 551 701 Navigator TV 551 701 Navigator User Manual 87 900 934 01 M 123 300 8 Bruksanvisning Underh ll TV 551 701 Navigator r underh llsfritt Allt servicearbete m ste utf ras av auktoriserad personal Innan n got arbete utf rs p systemet m ste pumpens str mf rs rjning avbrytas och pumpen luftas genom att den aktuella ventilen ppnas V nta sedan tills rotorn stannat samt tills pumpens yttemperatur r l gre n 50 C Om pumpen havererar kontakta Agilent reparationsverkstad som kan ers tta pumpen med en renoverad pump Innan systemet l mnas in till tillverkaren f r reparation eller advanced exchange service m ste h lso och s kerhetsbladet som medf ljer bruksanvisningen fyllas i och skickas in till den lokala terf rs ljaren Bifoga dessutom en kopia av bladet med pumpen 124 300 Skrotning av pumpen skall ske enligt g llande lagstiftning TV 551 701 Navigator User Manual 87 900 934 01 M Bruksanvisning 8 Bortskaffning Betydelse av logotypen WEEE p etiketterna Symbolen som visas nedan har till mpa
111. ende Tapen og beskyttelsesproppen fjernes f rst n r turbopumpen tilsluttes systemet 104 300 Figur 2 Hvis pumpen er anbragt i n rheden af elektromagnetiske felter skal den afsk rmes Se bilaget Technical Information for yderligere oplysninger TV 551 701 Navigator skal tilsluttes en hovedpumpe se skemaet Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M Istruktionsbog 7 Fastgorelse af pumpe Hvis rotoren beskadiges kan forbindelsen mellem pumpen og systemet blive udsat for et kraftigt drejemoment Hvis forbindelsen ikke er tilstr kkelig til at modst dette drejemoment kan pumpen rive sig l s fra systemet eller motoren kan rive sig l s fra pumpens bekl dning I dette tilf lde kan metalfragmenter blive slynget ud af pumpen eller systemet hvilket kan medf re alvorlige kv stelser eller d dsfald og eller materiel beskadigelse af apparaterne i n rheden Mont r TV 551 701 Navigator i en stabil position ved at montere turbopumpens indgangsflange p systemets kontraflange Forbindelsen skal kunne t le et drejemoment p 8 600 Nm omkring dens egen akse ISO K flangen kan eksempelvis fastsp ndes ved hj lp af st lklemmer med hgj styrke f eks modellen Agilent IC 63250 DCMZ Nedenst ende tabel beskriver antallet af klemmer IC 63250 DCMZ som er n dvendige til hver enkelt flange samt det n dvendige tilsp ndingsmoment for klemmerne Tab 1
112. ent users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 Navigator TV 551 Navigator TV 551 701 Navigator User Manual 87 900 934 01 M 3 300 TV 701 Navigator TV 701 Navigator 4 300 TV 551 701 Navigator User Manual 87 900 934 01 M Contents Contents 1 Istruzioni per l uso 15 Indicazioni di Sicurezza per Pompe Turbomolecolari 16 Informazioni Generali 17 Immagazzinamento 19 Preparazione per l installazione 19 Installazione 21 Fissaggio della pompa 22 Uso 24 Manutenzione 27 Smaltimento 2
113. er Manual 87 900 934 01 M Mode d emploi 3 Indications generales Cet appareillage a t concu en vue d une utilisation professionnelle Avant toute utilisation de l appareil il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent qui d cline par cons quent toute responsabilit en cas de non respect total ou partiel des instructions donn es d utilisation impropre par un personnel non form d op rations non autoris es ou d emploi contraire aux r glementations nationales sp cifiques Le TV 551 701 Navigator est un syst me int gr constitu d une pompe turbomol culaire con ue pour des applications de vide pouss et ultrapouss et dot d un contr leur Le syst me est m me de pomper tous les types de gaz et de compos s gazeux mais il n est pas adapt au pompage de liquides ou de particules solides L effet de pompage est obtenu gr ce une turbine tournant vitesse lev e 42000 tr min maxi mue par un moteur lectrique triphas haut rendement Le TV 551 701 Navigator est totalement exempt d agents polluants et il est par cons quent indiqu pour toutes les applications exigeant un vide propre Le TV 551 701 Navigator est en outre dot de connecteurs auxiliaires permettant d alimenter un ventilateur suppl mentaire de commander la soupape de ventilation de le piloter distance l aide d un ordina
114. erhoud De TV 551 701 Navigator is onderhoudsvrij Eventuele werkzaamheden moeten door bevoegd personeel worden uitgevoerd Alvorens werkzaamheden aan het systeem uit te voeren de voeding loskoppelen de pomp met behulp van de hiervoor bestemde klep ontluchten en wachten totdat de rotor volledig stil staat en de oppervlaktetemperatuur van de pomp onder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent in te schakelen zo krijgt men een geregenereerde pomp ter vervanging van de defecte pomp Alvorens de pomp ter reparatie of ruil naar de fabrikant op te sturen moet de bij deze handleiding gevoegde kaart Veiligheid en Gezondheid volledig ingevuld naar het plaatselijke verkoopkantoor worden gestuurd Een kopie van deze kaart moet v r versturing bij het systeem in de verpakking worden gevoegd Mocht de pomp gesloopt worden ga dan overeenkomstig de specifieke nationale wetgeving te werk TV 551 701 Navigator User Manual 87 900 934 01 M 97 300 6 Bedrijfshandleiding Afvalverwerking 98 300 Betekenis van het logo WEEE op de etiketten Het onderstaande symbool wordt aangebracht in overeenstemming met de EG richtlijn WEEE Dit symbool alleen geldig voor de landen van de Europese Gemeenschap seeft aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De
115. es and Spare Parts DESCRIPTION Mains cable European Plug 3m long Serial cable and Navigator Software Inlet screen DN 160 Inlet screen DN 200 Heater band 120 V Water cooling kit plastic model Air cooling kit for Navigator Controller Air cooling kit for standard rack controller Bracket for Navigator Controller side mounting Vibration isolator CF 6 Vibration isolator ISO 160 Vibration isolator CF 8 Vibration isolator ISO 200 Vibration isolator CF 10 Vent flange NW 10 KF M8 Vent valve for standard rack controller Vent valve for Navigator Controller Purge valve with KF16 flange Purge valve with 7 16 flange Triscroll Dry Vacuum Pump PTS 300 single phase universal motor Triscroll Dry Vacuum Pump PTS 300 3 phase universal motor 17 PTS03001UNIV TV 551 701 Navigator User Manual 87 900 934 01 M 293 300 17 Technical Information Accessories and Spare Parts 294 300 TV 551 701 Navigator User Manual 87 900 934 01 M Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corr
116. eslocamento e a armazenagem das bombas as condi es ambientais devem ser as seguintes temperatura de 20 C a 70 C humidade relativa de 0 a 95 n o condensante ao accionar as bombas turbomoleculares pela primeira vez o cliente deve activ las sempre em modalidade Soft Start 0 tempo m ximo de armazenagem de uma bomba turbomolecular de 10 meses a contar da data da expedi o CUIDADO Se por uma raz o qualquer o per odo de armazenagem for superior ser necess rio enviar outra vez a bomba para o fabricante Para mais informa es contatar o representante local da Agilent TV 551 701 Navigator User Manual 87 900 934 01 M 75 300 5 Manual de Istru es Preparac o para a instalac o O TV 551 701 Navigator fornecido numa embalagem protectora especial se esta apresentar sinais de danos que poderiam ter ocorrido durante o transporte entrar em contacto com o escrit rio de vendas local Durante a remo o da embalagem tomar muito cuidado para n o deixar cair o controller e para n o submet lo a choques ou vibra es N o depositar a embalagem no meio ambiente O material completamente recicl vel e em conformidade com a norma CEE 85 399 para a protec o do meio ambiente Para evitar problemas de perdas de g s n o tocar com as m os os componentes destinados exposi o do v cuo Utilizar sempre luvas ou outra protec o adequada Figura 1 O T
117. essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita N hav N TI Y NA N J S N OY 28 300 TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual Gebrauchsanleitung Sicherheitshinweise f r Turbomolekularpumpen 30 Allgemeine 30 Lagerung 33 Vor der Installation 34 Installation 35 Befestigung der Pumpe 36 Gebrauch 38 Einschaltung und Gebrauch von Modell TV 551 701 Navigator 39 Stoppen von Modell TV 551 701 Navigator 39 Not Aus 40 Wartung 41 Entsorgung 42 bersetzung der Originalanleitungen 2 Agilent Technologies 23 300 2 Gebrauchsanleitung Sicherheitshinweise f r Turbomolekularpumpen Die in der folgenden Gebrauchsanweisung beschriebenen Turbomolekularpumpen verf gen aufgrund der hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren ber eine gro e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k nnte diese Rotationsenergie freigesetzt werden WARNUNG Um Sch den am Ger t zu vermeiden und um Verletzungen der
118. explosiva gaser TV 551 701 Navigator User Manual 87 900 934 01 M 121 300 8 Bruksanvisning Start och anv ndning av TV 551 701 Navigator F r att starta TV 551 701 beh ver du bara ansluta till ett eluttag Den inbyggda styrenheten k nner automatiskt igen f rreglings och startsignaler och startar pumpen L get Sof Start har f ruts tts f r att t nda pumpen efter ett l ngre stillast ende F r en start med Sof Start m ste man aktivera ovann mnda l ge genom mjukvaran se stycket RS 232 485 COMMUNICATION DESCRIPTION i bilagan Technical information Den gr na lysdioden LD1 p underdelen av TV 551 701 anger genom frekvensen av dess blinkningar hur systemet fungerar fast sken pumpen roterar normalt l ngsamt blinkande ungef r var 400 ms systemet r i l ge f r acceleration bromsning Stop eller Waiting for interlock hastigt blinkande ungef r 200 ms feltillst nd Att st nga av TV 551 701 Navigator Om du vill st nga av TV 551 701 Navigator beh ver du bara dra ut elkabeln ur v gguttaget Den inbyggda styrenheten avbryter omedelbart pumpens funktion 122 300 TV 551 701 Navigator User Manual 87 900 934 01 M Bruksanvisning 8 VARNING F r operat rens s kerhet b r Turbo V systemet vara anslutet med en str mkabel med 3 stycken ledare se tabellen ver ordinerbara delar tillsammans med kontakt godk nd p internationell niv Anv nd sladden och kontakt
119. formation La LED verte LD1 plac e sur le panneau de la base du TV 551 701 indique par sa frequence de clignotement les conditions op rationnelles du syst me allum e fixe la pompe est en rotation normale a clignote lentement p riode d environ 400 ms le syst me est en tat de rampe de freinage de stop ou d attente interlock a clignote rapidement p riode d environ 200 ms condition d erreur Arr t du TV 551 701 Navigator Pour arr ter le TV 551 701 Navigator il suffit de retirer la tension d alimentation Le contr leur incorpor arr te imm diatement la pompe TV 551 701 Navigator User Manual 87 900 934 01 M 53 300 3 Mode d emploi Pour la s curit de l op rateur le contr leur Turbo V doit tre aliment par un c ble d alimentation 3 fils voir le tableau des parties qui peuvent tre ordonn es dot d une fiche approuv e niveau international Utiliser ce c ble et cette fiche avec une prise connect e d une mani re ad quate terre pour viter des d charges lectriques et satisfaire les requis des normes CE Les tensions lev es qui se d veloppent dans le contr leur peuvent provoquer de graves endommagements ou la mort Avant d effectuer les op rations d entretien l int rieur de l unit d brancher le c ble d alimentation Arr t d urgence Pour arr ter le TV 551 701 Navigator en conditions d urgence il faut d brancher le cordon d alimentation du contr
120. ft Start brukes n r pumpen skal startes igjen etter ha st tt stille en lengre periode For sette i gang en Soft Start er det n dvendig stille inn modusen via programvare se avsnittet RS232 485 COMMUNICATION DESCRIPTION i tillegget Technical Information Den gr nne lysdioden LD1 p TV 551 701 basepanel angir systemets funksjon ved hjelp av blink den lyser fast pumpen roterer normalt den blinker langsomt ca hver 400 ms systemet er i stilling for akselerasjon bremsing stopp eller Waiting for interlock den blinker hurtig ca hver 200 ms feiltilstand Stoppe TV 551 701 Navigator TV 551 701 Navigator stoppes ved kople det fra str mforsyningen Den innebygde styreenheten stanser pumpen umiddelbart 136 300 TV 551 701 Navigator User Manual 87 900 934 01 M Instruksjon Manual 9 Turbo V styreenheten m forsynes med en 3 tr ds str mkabel se tabellen for deler som kan bestilles og utstyrt med et st psel som er internasjonalt godkjent for brukerens sikkerhet Bruk denne kabelen og st pselet sammen med en egnet jordet kontakt for unng elektrisk st t og for overholde EU forskriftene H yspenningene som utvikler seg inne i styreenheten kan f re til alvorlige skader eller d dsulykker F r man utf rer vedlikeholdsoperasjoner inne i enheten er det n dvendig kople fra str mkabelen N dstopp Trekk ut nettkabelen fra styreenheten for stoppe TV 55
121. g elektriske st d og opfylde kravene if lge CE EF normerne De h je sp ndinger som udvikles i controller en kan for rsage alvorlige skader eller d den F r der foretages vedligeholdelses operationer inde i enheden skal man koble f dekablet fra N dstop Afbrydelse af TV 551 701 Navigator i n dsituationer sker ved at koble ledningen fra styreenheden TV 551 701 Navigator User Manual 87 900 934 01 M 109 300 7 Istruktionsbog Vedligeholdelse TV 551 701 Navigator beh ver ikke nogen vedligeholdelse Ethvert indgreb skal foretages af autoriseret personale ADVARSEL Inden der foretages noget som helst indgreb p systemet skal str mmen f rst afbrydes og luften i pumpen skal fjernes ved at bne ventilen Vent med foretagelse af indgrebet til rotoren er standset og til temperaturen p pumpens overflade er under 50 C I tilf lde af skader p systemet kontaktes et Agilent reparationsv rksted der udskifter pumpen med en repareret pumpe Inden pumpen sendes til konstrukt rens reparationsv rksted eller advanced exchange service skal Sikkerheds og tilstandsdokumentet der er vedlagt denne instruktionsmanual udfyldes og sendes til den lokale forhandler En kopi af dette dokument skal inds ttes i systemets emballage inden afsendelse 110 300 Skrotning af pumpen skal foreg i overensstemmelse med det p g ldende lands s rlige love TV 551 701 Navigator User Manual 87 900
122. g oby spowodowa powa ne uszkodzenia cia a S to wa ne informacje wyci gni te z tekstu Magazynowanie W celu zagwarantowania najwy szego poziomu funkcjonalno ci i niezawodno ci pomp Turbomolekularnych Agilent nale y przestrzega nast puj cych zalece podczas transportu przestawiania i magazynowania pomp nie nale y przekracza nast puj cych warunk w rodowiskowych temperatura od 20 C do 70 C wzgl dna wilgo od 0 do 95 3 bez opar a klient po otrzymaniu i przygotowaniu po raz pierwszy pomp turbomolekularnych musi je zawsze uruchomi w spos b Soft Start czas magazynowania danej pompy turbomolekularnej wynosi 10 miesi cy od daty wysy ki UWAGA Jezeli z jakiegokolwiek powodu czas magazynowania jest dtuzszy nalezy odesta pompe do fabryki W celu jakiejkolwiek informacji prosimy skontaktowa sie z miejscowym przedstawicielem firmy Agilent 172 300 TV 551 701 Navigator User Manual 87 900 934 01 M Podrecznik Instrukcji 12 Przygotowanie do instalacji System TV 551 701 Navigator jest dostarczany w specjanym ochronnym opakowaniu w przypadku lad w uszkodzen do kt rych mog oby doj podczas transportu nale y skontaktowa sie z miejscowym biurem sprzeda y Podczas operacji rozpakowywania nale y zwr ci szczeg ln uwag aby nie spowodowa upadku systemu TV 551 701 Navigator ani nie poddawa go uderzeniom lub wibracjom Nie porzuca opakowan
123. g to a ramp with a higher initial voltage frequency ratio The pump can be water cooled or air cooled in the first case the customer can use the dedicated channels on the pump body in the second case an external optional fan is available A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating The pump is balanced after assembly with a resid ual vibration amplitude less than 0 01 um The pump can operate in any position and can be supported on the high vacuum flange The connection of the forevacuum on the side of the pump is a KF 25 NW flange Figure 10 240 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 Controller Description The dedicated controller is a solid state frequency converter which is driven by a single chip micro computer and is composed of two PCBs which include power supply and 3 phase output analog and input output section microprocessor and digi tal section The power supply together with the 3 phase out put converts the single phase AC mains supply into a 3 phase low voltage medium frequency output which is required to power the pump The controller can be operated by a remote host computer via the serial connection Windows based software is available optional TV 551 701 Navigator User Manual 87 900 934 01 M 241 300 17 Technical Information
124. gesteuert oder die Vorrichtung von einem Host Computer ber eine serielle Leitung gesteuert werden kann RS232 RS485 In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten TV 551 701 Navigator User Manual 87 900 934 01 M 31 300 2 Gehrauchsanleitung In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben VORSICHT Die Vorsichtshinweise werden vor Vorg ngen angegeben die bei Nichtbeachtung Sch den an der Anlage verursachen k nnten WARNUNG Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf einen Vorgang oder eine bestimmte Ausf hrungsweise die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnten Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden 32 300 TV 551 701 Navigator User Manual 87 900 934 01 M Gebrauchsanleitung 2 Lagerung Um ein H chstma an Effizienz und Zuverl ssigkeit der Agilent Turbomolekularpumpen zu gew hrleisten sind die folgenden Anweisungen zu beachten W hrend des Transports der Handhabung und der Einlagerung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werden Temperatur von 20 C bis 70 C Relative Feuchtigkeit von 0 bis 95 nicht kondensierend Der Kunde hat d
125. gilent nenesie iadnu zodpovednos za ak ko vek udalosti zapr inen postupom ktor nie je v s lade dokonca ani v iasto nom s lade s t mito pokynmi zapr inen nespr vnym pou van m zariadenia nepou en mi osobami neopr vnenou pravou zariadenia alebo ak mko vek postupom ktor je v rozpore so pecifick mi tandardmi danej krajiny Zariadenie TV 551 701 Navigator predstavuje integrovan syst m s turbomolekul rnou v vevou pre vysok a ultravysok v kuov aplik cie s relevantn m kontroln m modulom Syst m dok e vy erpa ubovo n typ plynu alebo zmesi plynov Nie je vhodn na vy erp vanie tekut n alebo pevn ch ast Vy erp vanie zabezpe uje ve mi r chla turb na max 42000 ot ok min tu poh an vysokov konn m 3 f zovym elektrick m motorom Zariadenie TV 551 701 Navigator neobsahuje iadne kontamina n inidl a preto sa hod pre aplik cie vy aduj ce ist v kuum Zariadenie je vybaven pomocn mi konektormi na pripojenie al ieho ventil tora na ovl danie vetracieho ventilu a kv li mo nosti ovl dania zo vzdialen ho miesta pomocou hostite sk ho po ta a pripojen ho cez s riov komunika n linku RS232 alebo RS485 Nasleduj ce asti obsahuj v etky potrebn inform cie ktor zaru uj bezpe nos pracovn ka v priebehu pr ce so zariaden m Podrobn inform cie sa nach dzaj v dodatku Technical Information TV
126. gsemmisites 167 Az eredeti utasit s fordit sa E Agilent Technologies 155 300 11 Felhaszn l i K zik nyv Biztons gi tmutat Turb molekul ris szivatty khoz A turb molekul ris szivatty k ahogy a k vetkez g pk nyvben le van rva nagy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor s az ll r sz rintkez se vagy a forg r sz sz tt r se eset n a forg si energia felszabadulhat VESZ LY A berendez s k rosod s nak s a kezel szem lyzet s r l s nek megel z s re az ebben a g pk nyvben adott telep t si utas t sokat szigor an be kell tartani 156 300 TV 551 701 Navigator User Manual 87 900 934 01 M Felhaszn l i K zik nyv 11 Altalanos informacio A berendez st professzion lis felhaszn l k sz m ra tervezt k A felhaszn l nak a berendez s m k dtet se el tt el kell olvasnia ezt a g pk nyvet s a Agilent ltal biztositott b rmely inform ci t A Agilent nem vonhat felel ss gre olyan esem nyek rt amelyek az ezen utasit soknak val ak r r szbeni meg nem felel s szakk pzetlen szem lyek ltali nem megfelel haszn lat a berendez sbe val jogosulatlan beavatkoz s vagy a konkret nemzeti szabv nyokkal ellent tes b rmely m velet miatt t rt ntek A TV 551 701 Navigator egy integr lt rendszer turbo molekul ris szivatty va
127. i a prudk mi pohyby Mohly by se po kodit lo iska Pro odplyn n v v vy pou vejte vzduch nebo inertn plyn kter je zbaven prachu a sm tek Tlak p i odv tr vac m otvoru mus b t men ne 2 bary nad atmosf rick m tlakem Pro erp n agresivn ch plyn jsou tyto v v vy vybaveny speci ln m otvorem kter umo uje plynul p tok inertn ho plynu nap N2 Ar pro ochranu lo isek v v vy viz p lohu Technical Information NEBEZPE Pokud pou v te vyv vu pro erpani toxick ch horlavych nebo radioaktivn ch plyn dodr ujte pros m po adovan postupy pro likvidaci ka d ho plynu Vyvevu nepou vejte v p tomnosti v bu n ch plyn TV 551 701 Navigator User Manual 87 900 934 01 M 191 300 13 N vod k Pou it Zapnut a pou v n v v vy TV 551 701 Navigator Pro uvedeni vyvevy TV 551 701 Navigator do provozu je nutn amp priv st sitov nap ti Integrovany regulator automaticky zji tuje blokovani pr tomnost spou t cich signalu a uvede vyv vu do provozu Re im Soft Start slou k zapnut vyv vy po delSim vyrazeni z provozu Chcete li zapnout re im Soft Start musite jej aktivovat pat i n m programov m p kazem viz odstavec RS 232 485 COMMUNICATION DESCRIPTION v pr loze Technical Information Zelen kontrolka umist n na eln m panelu z kladny vyvevy TV 551 701 Navigator indikuje provozn stavy syst mu
128. i nenadnim premikom rpalke tekom delovanja Nosilci se lahko po kodujejo Za prezra evanje rpalke uporabite zrak ali inertni plin brez prahu ali delcev Pritisk na oddu niku mora biti manj i od 2 bara nad pritiskom atmosfere Za rpanje agresivnih plinov so te rpalke opremljene s priklju kom ki omogo a stalen pretok inertnih plinov kot Na Ar za za ito nosilcev glej prilogo Technical Information SVARILO Pri rpanju strupenih vnetljivih ali radioaktivnih plinov sledite zahtevanim navodilom za odstranjevanje vsakega plina rpalke ne uporabljajte v prisotnosti eksplozivnih plinov TV 551 701 Navigator User Manual 87 900 934 01 M 217 300 15 Priro nik za Navodila Vklop in uporaba naprave TV 551 701 Navigator Za vklju itev TV 551 701 Navigator morate priklju iti napetost Vgrajeni kontroler samodejno prepozna zaporo in prisotnost signalov za vklop ter za ene rpalko Soft Start na in je predviden za zagon po dalj i neuporabi rpalke Za zagon Soft Start na ina je potrebno aktivirati ustrezen programski ukaz glej odstavek RS 232 485 COMMUNICATION DESCRIPTION v prilogi Technical Information Zelena LED dioda ki se nahaja na sprednji plo i TV 551 701 Navigator s hitrostjo utripanja ozna uje delovne pogoje sistema a Brez utripanja C rpalka je normalno vrti a Po asno utripanje perioda pribli no 400 ms Sistem je v stanju ramp breaking stop ali v stanju W
129. ia w rodowisku Materia ten nadaje si ca kowicie do recyklingu zgodny jest z dyrektyw UE 855 399 dotycz cej ochrony rodowiska UWAGA Aby unikna problem w odgazowywania nalezy nie dotyka gotymi rekoma cze ci przeznaczonych do wytwarzania pro ni Nalezy zawsze stosowa odpowiednie rekawice ochronne lub odpowiednie zabezpieczenie Pa di N d Nar bs dl Ji P m A P ES q lt A 2 W N ALA A I JO A 4 m i Posta 1 System TV 551 701 Navigator nie moze by uszkodzony poprzez wystawienie go na dziatanie atmosfery Mimo to zaleca sig aby pompa do momentu jej instalacji na systemie pozostata zamknieta w celu unikniecia zanieczyszczenia jej pytem TV 551 701 Navigator User Manual 87 900 934 01 M 173 300 12 Podrecznik Instrukcji Instalacja Nie instalowa i lub u ytkowa pompy w otoczeniach wystawionych na czynniki atmosferyczne deszcz mr z nieg py y gazy chemiczne w rodowiskach wybuchowych lub z wysokim zagro eniem po aru Podczas dzia ania nale y obowi zkowo przestrzega nast puj cych warunk wi otoczenia maksymalne ci nienie 2 bary ponad ci nieniem atmosferycznym a temperatura od 5 C do 35 C patrz wykres graficzny w dodatku Technical Information wzgl dna wilgo 0 90 bez opar Usuna ta me klejaca i zdja korek zabezpieczajacy dopiero w momencie potaczenia pompy do systemu 174 300
130. id ett enskilt fel enligt standard EN 61010 1 120 300 Installation av tillbeh rsutrustning beskrivs i Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M Bruksanvisning 8 Anv ndning OBSERVER Anvisningar f r riktig anv ndning finns i styrenhetens bruksanvisning Innan du anv nder systemet ska du utf ra alla elektriska och pneumatiska anslutningar Om vakuumkammaren uppv rms f r temperaturen vid inloppet aldrig verstiga 120 C S tt aldrig ig ng pumpen om intagsfl nsen varken r kopplad till vakuumkammaren eller r blockerad p plats med l sfl nsen Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r att undvika br nnskador Undvik sammanst tningar sv ngningar eller pl tsliga f rflyttningar av turbopumpen n r den r ig ng Lagren kan bli skadade Pumpen ska f rses med luft eller med delgaser som rfria fr n damn eller andra partiklar Ing ngstrycket mot r tt d rr m steunderstiga 2 bar ut ver det atmosf riska trycket F r pumpning av fr tande gaser r dessa pumpar f rsedda med en speciell ppning igenom vilken man ska leda en str m av delgas kv ve eller argon f r att skydda lagren se bilagan Technical information D pumpen anv nds f r pumpning av giftiga l ttant ndliga eller radioaktiva gaser b r man f lja de s rskilda anvisningarna f r varje enskild gas Anv nd ej pumpen i n rheten av
131. ie Turbomolekularpumpen nach dem Empfang bei Erstinbetriebnahme stets im Modus Soft Start in Gang zu setzen Die Lagerdauer f r eine Turbomolekularpumpe betr gt 10 Monate ab dem Speditionsdatum VORSICHT Falls die Lagerdauer aus verschiedenen Gr nden die genannte Frist berschreiten sollte ist die Pumpe an das Werk zur ckzusenden F r Informationen wenden Sie sich bitte an den rtlichen Agilent Vertreter TV 551 701 Navigator User Manual 87 900 934 01 M 33 300 2 Gebrauchsanleitung Vor der Installation VORSICHT Modell TV 551 701 Navigator wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Modell TV 551 701 Navigator ist vorsichtig auszupacken wobei es vor dem Herunterfallen und vor St f3en und Vibrationen zu sch tzen ist Das Verpackungsmaterial ist vorschriftsgem zu entsorgen Es ist vollst ndig recyclebar und entspricht der Richtlinie 85 399 EWG f r Umweltschutz Um Entgasungen zu vermeiden d rfen die Teile die mit dem Vakuum in Ber hrung kommen nicht mit den blo en H nden angefasst werden Es sind stets Schutzhandschuhe oder andere Schutzmittel zu verwenden Abbildung 1 Modell TV 551 701 Navigator kann durch die Umgebung an sich keine Sch den erleiden Es sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden 3
132. ie d installations ou surtension pr vue par la norme EN 61010 1 De ce fait brancher le dispositif une ligne d alimentation compatible avec cette cat gorie Le TV 551 701 Navigator dispose de connecteurs pour les entr es sorties et pour la communication en s rie qui doivent tre branch s aux circuits ext rieurs de facon qu aucune partie sous tension ne soit accessible S assurer que l isolation du dispositif branch au TV 551 701 Navigator a une isolation appropri e m me en condition de panne individuelle selon les termes de la norme EN 61010 1 Pour l installation des accessoires en option se reporter Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 51 300 3 Mode d emploi Utilisation Ce paragraphe pr sente les principales proc dures op rationnelles Avant d utiliser le syst me effectuer tous les branchements lectriques et pneumatiques Pendant le chauffage ventuel de la chambre vide la temp rature de la bride d entr e ne doit pas d passer 120 C AVERTISSEMENT Ne jamais faire fonctionner la pompe si la bride d entr e n est pas reli e la chambre vide ou si elle n est pas ferm e avec la bride de fermeture Eviter de toucher la turbopompe ainsi que ses accessoires ventuels pendant les op rations de chauffage La temperature lev e peut tre I origine de lesions graves ATTENTION Lorsque la turbopompe fonctionne viter tout choc osci
133. isning 100 300 TV 551 701 Navigator User Manual 87 900 934 01 M Istruktionsbog 7 Generel information Dette udstyr er beregnet til professionel anvendelse Brugeren b r l se denne brugsanvisning og anden yderligere information fra Agilent f r udstyret anvendes Agilent tager ikke ansvar for skader helt eller delvis som f lge af tilsides ttelse af disse instruktioner fejlagtig brug af personer uden tilstr kkeligt kendskab ukorrekt anvendelse af udstyret eller h ndtering der strider imod g ldende lokale regler TV 551 701 Navigator systemet omfatter en turbomolekyl r pumpe til h je eller meget h je vakuumtilpasninger og aktuel styreenhed Systemet er i stand til at pumpe en hvilken som helst form for gas eller gaslignende luftarter men systemet kan ikke anvendes til pumpning af v ske eller af faste partikler Pumpningen sker ved hj lp af en hurtigroterende turbine 42000 omdr min Turbinen drives af en elektrisk trefasemotor med h j effekt TV 551 701 Navigator er ikke fremstillet af skadelige stoffer og er derfor egnet til anvendelse der kr ver rent vakuum TV 551 701 Navigator har endvidere hj lpestik der g r det muligt at forsyne ventilator styre ventilationsventilen og fjernstyre den ved hj lp af en v rtscomputer gennem seriel forbindelse RS 232 RS 485 De f lgende afsnit indeholder oplysningerne der er n dvendige for at garantere sikkerhed for operat ren i forbindelse med anvendelse af udst
134. ite da vam ne pade iz rok oz ga ne stresajte Embala o zavrzite v skladu s pravili Material je mo no v celoti reciklirati in je v skladu z ECC direktivo 85 399 POZOR Komponent ki bodo izpostavljene vakuumu se ne dotikajte z golimi rokami saj boste tako prepre ili probleme pu anja Zmeraj uporabite rokavice ali drugo primerno za ito Slika 1 Normalna izpostavljenost na okolje ne more po kodovati naprave TV 551 701 Navigator Kljub temu je priporo ljivo da je enota zaprta dokler je ne namestite v sistem S tem boste prepre ili onesna enje s prahom TV 551 701 Navigator User Manual 87 900 934 01 M 213 300 15 Priro nik za Navodila Monta a Napravo name ajte samo odznotraj in v nobenem primeru je ne name ajte v okolju ki je izpostavljeno na atmosferske agente de sneg led prah agresivni plini ali v okoljih kjer obstaja nevarnost po ara Tekom delovanja je treba spo otvati naslednje pogoje Maksimalen pritisk 2 bara nad pritiskom atmosfere temperatura Od 5 C od 45 C glej diagram pritisk temperatura v prilogi Technical Information a Relativna vla nost 0 90 brez kondenza Lepljiv in za itni pokrov ne odstranjujte dokler ne pove ete turbo rpalko na sistem 214 300 Slika 2 V prisotnosti magnetnih polje mora rpalka biti za itena s feromagnetnim itom Za dodatne informacije glejte prilogo Technical I
135. itia zariadenia Skor ne za nete system pou ivat zapojte v etky elektrick a pneumatick pripojenia Teplota vstupnej priruby po as zahrievania vakuovej komory nesmie prekro it 120 C NEBEZPE Nikdy nepou vajte turbov vevu ak vstupn pr ruba nie je pripojen k v kuovej komore alebo ak nie je zablendovan V priebehu zahrievania sa nikdy nedot kajte turbov vevy ani iadneho pr slu enstva Vysok teploty m u sp sobi pop leniny Dbajte na to aby v veva po as innosti nebola vystaven n razom kmitaniu alebo prudk m pohybom Mohli by sa po kodi lo isk V vevu preplachujte pomocou vzduchu alebo inertn ho plynu zbaven ho prachu a ast c Tlak na peci lnym vstupom na vy erp vanie agres vnych plynov ktor umo uj stabiln tok inertn ho plynu napr klad N Ar kv li ochrane lo sk v vevy pozri dodatok Technical Information NEBEZPE Ak v vevu pou vate na od erp vanie toxick ch hor av ch alebo r dioakt vnych plynov dodr iavajte pros m po adovan postupy pre likvid ciu jednotliv ch plynov Nepou vajte v vevu v pr tomnosti v bu n ch plynov TV 551 701 Navigator User Manual 87 900 934 01 M 203 300 14 Navod na Obsluhu Zapnutie a pou itie zariadenia TV 551 701 Navigator Ak chcete zapn t zariadenie TV 551 701 Navigator musite ho pripojit ku zdroju nap jania Integrovany kontrolny modul automaticky rozp
136. itrogen to the pump through the purge port connect a gas purge valve between the pressure regulator and the pump Adjust the pressure regulator in order to read a gas flow rate of 0 1 to 0 8 mbar l s To prevent bearing damage Agilent suggests a minimum purge gas flow rate of 10 sccm 0 17 mbar l s This value can be exceeded according to the process requirements Please contact Agilent for specific applications The purge gas throughput with the recommended forepump of 15 m h 11 CFM allows to achieve a high vacuum pressure in the 10 8 mbar range The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pressure The recommended procedure to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points 1 Close the corrosive gas flow into the system 2 Leaving the Turbo V pump and the backing pump running and the purge gas flowing wait for enough time to evacuate the corrosive gas from the system 3 Turn off the Turbopump 4 Open the Turbo V vent port slowly until to reach atmospheric pressure in the system 5 When the Turbo V pump and the backing pump are stopped and the system is at at mospheric pressure for a better bearing pro tection it is advisable to leave the purge gas flowing into the Turbo V pump with the chamber or the Turbo V vent valve opened to avoid system overpressures If the vent valve can
137. ivation type the signal can be high level active or low level active Set point hysteresis in of threshold Intercooling Active Stop write only in stop Baud rate Admitted Values Start 1 Stop 0 Remote 1 Serial 0 default 1 YES 1 NO 0 0 Frequency 1 Current 2 Time default 0 default 643 0 to 99999 default 0 0 high level active 1 low level active default 0 0 to 100 default 2 0 NO 1 YES 0 NO 1 YES 600 0 1200 1 2400 2 4800 3 9600 4 264 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 Pump life cycle time cycle number reset To reset write Impulse 0 Continuous 1 121 122 Analog output type output voltage signal proportional to frequency or power Rotational frequency setting Hz Maximum rotational frequency in Hz active only in Stop condition Set vent valve on off on closed 0 frequency 1 power default 0 272 to 714 default 714 272 to 714 default 714 On 1 Off 0 default 1 Reserved to Agilent service R W Set the vent valve operation Automatic 0 see note 1 On command 1 see note 2 Vent valve opening delay expressed in 0 2 sec 0 to 65535 corresponding to 0 to 13107 Pump power in W pump current x pump voltage duty cycle Driving frequency in Hz Pump temperature in C
138. ivo En estas circunstancias la conexi n podria no resistir a dicho par de fuerza y como consecuencia la bomba podria separarse del sistema o el motor podria separarse respecto del contenedor de la bomba En este caso fragmentos de metal pueden ser proyectados por la bomba o por el sistema con consiguiente grave riesgo de lesiones o muerte y o dafios a los aparatos adyacentes Fijar el TV 551 701 Navigator en posici n estable montando la brida de entrada de la turbo bomba en la contrabrida del sistema con conexi n capaz de resistir a un par de 8600 Nm en torno a su propio eje A modo de ejemplo la brida ISO K puede fijarse con mordazas de acero de alta resistencia como el modelo Agilent IC 63250 DCMZ En la siguiente tabla se indican respecto de cada brida la cantidad de mordazas IC 63250 DCMZ necesarias y el par de apriete con el cual fijarlas Tab 1 Brida N Par de apriete E ZU Ja A E ISO 200 8 35 Nm En la siguiente tabla se indican respecto de cada brida ISO F la cantidad de los tornillos necesarios y el par de apriete con el cual fijarlas Tab 2 180160F 8 sm ISO 200 F 12 5 Nm TV 551 701 Navigator User Manual 87 900 934 01 M Manual de istrucciones 4 La turbobomba con brida de entrada ConFlat ha de fijarse a la c mara de vacio mediante los accesorios mec nicos especificos Agilent Para m s detalles v ase el anexo Technical Information El TV 551 701 Navigator puede instalarse en cualquier p
139. jo primerne Agilent strojne opreme Za dodatne informacije glejte prilogo Technical Information Napravo TV 551 701 Navigator lahko namestite v poljuben polo aj TV 551 701 Navigator User Manual 87 900 934 01 M 215 300 15 Priro nik za Navodila Pritrjevanje rpalke OPOMBA Naprave TV 551 701 Navigator ne morete fiksirati z njegovo lastno spodnjo ploskvijo POZOR Po direktivi EN 61010 1 spada TV 551 701 Navigator v skupino za drugo name anje ali prekovolta o Napravo prilju ite na napetost ki je v vskladu z zgornjo kategorijo Naprava TV 551 701 Navigator ima vhodne izhodne in serijske priklju ke ki jih je treba povezati na zunanja vezja tako da noben elektri ni del ni dosegljiv Prepri ajte se da je izolacija naprave priklju ene na TV 551 701 Navigator primerna tudi v primerno ene napake kar je opisano v direktivi EN 61010 1 216 300 TV 551 701 Navigator User Manual 87 900 934 01 M Uporaba Priro nik za Navodila 15 Ta odstavek opisuje osnovne postopke za uporabo Pred uporabo sistema pove ite vse elektri ne in pnevmatske povezave Pri segrevanju vakuumskega le i a temperatura dovodne prirobnice ne sme prese i 120 C SVARILO Turbo rpalke ne uporabljajte e dovodna prirobnica ni priklju ena na vakuumsko le i e Tekom segrevanja se turbo rpalke ali njenih delov ne dotikajte Visoka temperatura lahko povzro i opekline Izogibajte se udarcem oscilacijam al
140. joner for korrekt bruk finnes i dette avsnittet Les n ye gjennom denne manualen f r systemet tas i bruk Mens oppvarmingen av kammeret p g r m temperaturen ved inngangsflensen ikke overskride 120 C Ikke start pumpen hvis inngangsflensen ikke er koplet til vakuumkammeret eller ikke er lukket med lukkeflensen Ikke ber r turbopumpen eller noe av tilleggsutstyret under oppvarmingen De h ye temperaturene kan f re til brannskader ler AN Unng st t svingninger eller plutselige bevegelser av turbinpumpen n r den er i funksjon Lagrene kan skades Bruk st v og partikkelfri luft eller inaktiv gass ved forsyning av pumpen Trykket ved inngangen m ikke v re mindre enn 2 bar over atmosf risk trykk Ved pumping av etsende gasser er disse pumpene utstyrt med en spesiell pning Til denne pningen skal flyt av inaktive gasser argon eller kvelstoff koples for beskytte lagrene se Technical Information POLARE N r pumpen brukes for pumpe giftige brannfarlige eller radioaktive gasser skal de relevante forskriftene for de enkelte gasstypene f lges Pumpen skal ikke brukes i eksplosjonsfarlige milj er TV 551 701 Navigator User Manual 87 900 934 01 M 135 300 9 Instruksjon Manual Starte og bruke TV 551 701 Navigator TV 551 701 startes ved sette str mkabelen i veggkontakten Den innebygde styreenheten kjenner automatisk igjen blokkerings og startsignaler og starter pumpen Modusen So
141. k trykk temperatur fra 5 C til 35 C se diagram i tillegget Technical Information a relativ fuktighet 0 90 uten kondens SS Tapen og beskyttelsesproppen skal fjernes f rst n r turbopumpen koples til systemet 132 300 Figur 2 Ved magnetfelt m pumpen beskyttes av dertil egnede skjermer Se Technical Information for detaljer TV 551 701 Navigator m koples til en hovedpumpe se skjema i Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M Instruksjon Manual 9 Festing av pumpen Dersom rotoren delegges kan tilkoplingen mellom pumpen og systemet utsettes for et betydelig dreiemoment Dersom tilkoplingen ikke er sterk nok til t le dette dreiemomentet kan pumpen l sne fra systemet eller motoren kan l sne fra pumpens hylster I dette tilfellet kan metallsplinter kastes ut fra pumpen eller fra systemet Dette kan f re til alvorlige skader eller d d og eller skader p annet utstyr i n rheten Fest TV 551 701 Navigator i en stabil posisjon monter turbopumpens innl psflens til systemets motflens med en tilkopling som er i stand til t le et dreiemoment p 8600 Nm rundt sin egen akse ISO K flensen kan f eks festes ved hjelp av st lklemmer med h y styrke f eks modellen Agilent IC 63250 DCMZ Den f lgende tabellen beskriver antall klemmer IC 63250 DCMZ som er n dvendige for hver flens og tilh rende strammemoment Tab 1 FL
142. khez vezethet A megjegyz sek fontos a sz vegb l kivonatolt inform ci kat tartalmaznak T rol s FIGYELEM A Agilent turbomolekul ris szivatty k maxim lis teljes tm nyszintj nek garant l s ra a k vetkez tmutat sokat kell k vetni a szivatty k sz ll t sakor mozgat sakor s t rol sakor a k vetkez k rnyezeti param tereket nem szabad t ll pni a h m rs klettartom ny 20 C 70 C relativ p ratartalom 0 95 nem kondenz l a A turbomolekul ris szivatty kat mindig l gyan kell ind tani amikor a felhaszn l tveszi s el sz r zemelteti ket a Egy turbonukle ris szivatty rakt rozhat si ideje 10 h nap a sz ll t s d tum t l Ha valamilyen okb l a rakt rozhat si id t t ll pik a szivatty t vissza kell vinni a gy rba K rem inform ci rt forduljon a helyi Agilent v kuumkereskedelmi s szolg ltat si k pviselethez 158 300 TV 551 701 Navigator User Manual 87 900 934 01 M Felhaszn l i K zik nyv 11 El k szit s telepit sre FIGYELEM A TV 551 701 Navigatort k l nleges v d csomagol sban sz llitj k Ha ez s r l s jeleit mutatja ami sz llit s k zben felmer lhet forduljon a helyi szolg ltat si irod hoz A rendszer kicsomagol sakor gyeljen arra hogy ne ejtse le s ker lje annak b rmilyen hirtelen t s t vagy r zk d s t Ne rtalmatlanitsa a csomagol anyagokat nem megengedett m don
143. l 87 900 934 01 M 267 300 17 Technical Information Inlet Screen Installation Figure 30 Figure 31 Figure 32 268 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 The inlet screens mod 969 9302 969 9304 and 969 9316 prevents the blades of the pump from being damaged by debris greater than 0 7 mm di ameter The inlet screen however does reduce the pump ing speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure Figure 33 The screen can be mounted on each pump The screen can be removed as shown in the following figure Figure 34 TV 551 701 Navigator User Manual 87 900 934 01 M 269 300 17 Technical Information The following figure shows the overall flange dimensions with the protection screen fitted on pump with ISO flange and pump with CFF flange FFE 7 NN En P i T DT a gt FF d N N B LL II lt a QQ IMEN mm inches Figure 35 PA ENSI I inches Figure 36 270 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 Heater band installation Figure 37 The heater band model 969 9808 and 969 9807 can be used to heat the pump casing wh
144. l Information A TV 551 701 Navigatort els dleges szivatty hoz kell csatlakoztatni l sd Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M Felhaszn l i K zik nyv 11 szivatty r gzit se Ha rotorhiba jelentkezik a szivatty s a rendszer k z tti csatlakoz s jelent s nyomat knak lehet kit ve Ha a csatlakoz s nem k pes ezt a nyomatekot elviselesni a szivatty lev lhat a rendszerr l illetve a motor lev lhat a szivatty h zr l Ebben az esetben f mr szecsk k rep lhetnek sz t a szivatty b l vagy a rendszerb l ami komoly k rokat illetve hal los ser leseket es vagy a t bbi gep k rosod s t okozhatja R gzitse a TV 551 701 Navigatort stabil helyen a turb szivatty bemeneti karim j t a rendszer ellenkarim j ra szerelve 8600 Nm tengely k r li nyomateknak ellen llni k pes csatlakoz ssal P ld ul az ISO K karima r gzithet nagy teherbir s ac lkapcsokkal mint az IC63250DCMZ Agilent t pus A k vetkez t bl zat mindegyik karim hoz megmutatja az IC63250DCMZ kapcsok sz kseges sz m t s a hozz tartoz r gzit nyomatekot Tab 1 KARIMA N R GZIT NYOMATEK ISO 160 10 35 Nm ISO 200 8 35 Nm A k vetkez t bl zat mindegyik ISO F karim hoz megmutatja a csavarok sziks ges sz m t s a hozz tartoz r gzit nyomat kot Tab 2 KARIMA N R GZIT NYOMATEK ISO 160 F 8 5 Nm ISO 200 F 12 5 Nm Az F karima ac
145. l nagy s rendk v l nagy v kuumalkalmaz sokhoz a megfelel vez rl j vel A rendszer b rmely t pus g zt vagy g zkever ket k pes szivatty zni Nem alkalmas folyad kok vagy szil rd r szecsk k szivatty z s ra A szivatty z si m veletet egy nagyteljes tm ny 3 f zis elektromos motorral hajtott nagysebess g turbina max 42000 fordulat perc biztos tja A TV 551 701 Navigator szennyez anyagokt l mentes s ez rt alkalmas tiszta v kuumot ig nyl alkalmaz sokra Fel van szerelve k ls csatlakoz kkal hogy tov bbi ventill tort t pl ljon vez relje a ventill tor szelepet amit t voli helyr l ir ny t egy soros vonalon RS 232 vagy RS 485 kereszt l csatlakoztatott gazdag p seg ts g vel A k vetkez bekezd sek a berendez st haszn l kezel biztons g nak garant l s hoz sz ks ges sszes inform ci t tartalmazz k R szletes inform ci t tal l a Technical Information f ggel kben TV 551 701 Navigator User Manual 87 900 934 01 M 157 300 11 Felhaszn l i K zik nyv FIGYELEM Ez a k zik nyv a k vetkez figyelmeztet jelz seket haszn lja A Figyelem zenetek olyan elj r sok el tt jelennek meg amelyeket ha nem tartanak be az a berendez s k rosod s t okozhatja VESZ LY A vesz lyt jelz zenetek felh vj k a kezel figyelm t egy konkr t elj r sra vagy gyakorlatra ami ha nem megfelel en v gzik el s lyos szem lyi s r l se
146. lent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
147. likovanie doluozzna en ho symbolu dodr uje smernicu EU s n zvom WEEE Tento symbol platny iba pre St ty Eur pskej Unie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako delen odpad Vyz vame preto kone n ho u vate a aby sa skontaktoval s dod vate om pr stroja i u je to v robca alebo predajca za elom jeho likvid cie pod a zmluvn ch podmienok predaja TV 551 701 Navigator User Manual 87 900 934 01 M 207 300 14 Navod na Obsluhu Likvid cia 208 300 TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual 15 Prirocnik za Navodila Varnostna navodila za Turbomolekularne rpalke 210 Splosne informacije 210 Shranjevanje 212 Priprava za montazo 213 Montaza 214 Pritrjevanje rpalke 215 Uporaba 217 Vklop in uporaba naprave TV 551 701 Navigator 218 Izklop naprave TV 551 701 Navigator 218 Zaustavitev v sili 218 Vzdrzevanje 219 Odlaganje opadkov 219 Prevod navodil v izvirniku E Agilent Technologies 209 300 15 Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke Turbomolekularne rpalke opisane v naslednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se
148. llation ou d placement brusque car les paliers pourraient se d t riorer Pour le refoulement de l air de la pompe utiliser de l air ou du gaz inerte exempt de poussi re ou de particules La pression d entr e travers la porte pr vue cet effet doit tre inf rieure 2 bar au del de la pression atmosph rique Pour le pompage de gaz agressifs ces pompes sont dot es d une porte sp ciale travers laquelle il est n cessaire de fournir la pompe un flux de gaz inerte azote ou argon pour prot ger les paliers voir l appendice Technical Information AVERTISSEMENT Lorsque la pompe est utilis e pour le pompage de gaz toxiques inflammables ou radioactifs suivre les procedures typiques de chaque gaz Ne pas utiliser la pompe en presence de gaz explosifs 52 300 TV 551 701 Navigator User Manual 87 900 934 01 M Mode d emploi 3 Mise en marche et utilisation du TV 551 701 Navigator Pour allumer le TV 551 701 Navigator il suffit de fournir la tension d alimentation Le contr leur incorpor reconnait automatiquement la pr sence de signaux d interlock et de d marrage et il actionne la pompe Le mode Soft Start a t concu pour permettre d allumer la pompe apres une longue p riode d inutilisation Pour mettre en marche en mode Soft Start il est n cessaire d activer ce mode op ratoire l aide du logiciel Cf paragraphe RS232 485 COMMUNICATION DESCRIPTION dans l appendice Technical In
149. m oder der Motor vom Pumpengeh use l st In diesem Fall k nnten Metallsplitter von der Pumpe oder vom System geschleudert werden die schwere Sch den oder den Tod und oder Sch den an benachbarten Ger ten zur Folge haben k nnten TV 551 701 Navigator in einer stabilen Position befestigen Den Eintrittsflansch der Turbopumpe am Gegenflansch des Systems montieren Diese Verbindung soll einem Drehmoment von 8 600 Nm um die eigene Achse standhalten Der ISO K Flansch kann zum Beispiel mit hochfesten Stahlklemmen befestigt werden Typ Modell Agilent IC 63250 DCMZ Die nachstehende Tabelle gibt an wie viele Klemmen IC 63250 DCMZ f r jeden Flansch erforderlich sind und mit welchem Anzugsmoment sie festzuziehen sind Tab 3 Flansch Anz Anzugsmoment ISO 160 10 35 Nm ISO 200 8 35 Nm Die nachstehende Tabelle gibt an wie schrauben f r jeden ISO F Flansch erforderlich sind und mit welchem Anzugsmoment sie festzuziehen sind Tab 4 dl Flansch 0 Anz Anzugsmoment ISO 160 F 8 5 Nm ISO 200 F 12 5 Nm F r die Flansche F m ssen die Stahlschrauben von der Klasse gt 8 8 sein TV 551 701 Navigator User Manual 87 900 934 01 M Gebrauchsanleitung 2 Turbopumpen mit ConFlat Eingangsflansch sind mit dem speziellen Agilent Befestigungsmaterial an die Vakuum kammer anzuschlie en F r ausf hrliche Informationen siehe im Anhang Technical Information Modell TV 551 701 Navigator kann in jeder beliebigen Position installiert werden
150. n 234 300 Vent Accessories 278 TV 551 701 Navigator Controller Compatible Vent Valve mod 969 9834 279 Standard Rack Controller Compatible Vent Valve mod 969 9843 280 Vent Device mod 969 9831 281 Vibration Isolator Installation 282 Purge Valve Installation 283 Serial Cable Installation 284 TV 551 701 Controller Installation 284 Bottom Mounting 285 Side Mounting 286 Connection A High Vacuum Flange 287 Connection B Fore Vacuum Pump 288 Connection Configurations 289 Connection C Electrical 290 Pump Used with Corrosive Gases 291 Pump Used in Presence of Magnetic Fields 292 Accessories and Spare Parts 293 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 Description of the TV 551 701 Navigator The TV 551 701 Navigator pumping system con sists of a pump with a dedicated controller fixed to it The system is available in five models for TV 551 and three models for TV 701 The models of each group differ in the high vacuum flange The TV 551 Navigator five models are Model 969 8832 with ISO 160 high vacuum flange Model 969 8842 with ISO 160 F high vacuum flange Model 969 8833 with ConFlat 8 external diameter high vacuum flange Model 969 8835 with ConFlat 6 external diameter high vacuum flange The TV 701 Navigator three models are Model 969 8836 with ISO 200 high vacuum flange Model 969 8843 with ISO 200 F high vacuum flange Model 969 8837 with ConFlat 10 e
151. n be mounted close to the pump To fix the fan to the TV 551 701 case execute the following procedure see the following figure TV 551 701 Navigator User Manual 87 900 934 01 M 273 300 17 Technical Information 3 Fix the fan to the suitable bracket by means of the furnished screws 4 Fix the bracket to the pump body between the pump and the controller 5 Connect the fan supply to the P4 connector of the controller Figure 40 274 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 TV 551 701 Pump with Standard Rack Controller When the TV 551 701 pumps are used with the standard rack controller it is necessary to utilize the air cooling kit model 969 9314 Figure 41 Fan specification a air flow 25 1 s 51 CFM a input voltage 120 Vac 50 60 Hz maximum power 17 W dimensions 119 x 119 mm 4 69 x 4 79 inches To fix the fan to the pump position it ensuring that the holes in the plate line up with those in the pump base Insert the respective washers and screws and tighten with a screwdriver Connect the fan to the controller TV 551 701 Navigator User Manual 87 900 9
152. nect the Open Collector Inputs of the Controller 254 Inlet Screen Installation 268 Heater band installation 271 Air Cooling Kit Installation 273 Water Cooling Kit Installation 277 Vent Accessories 278 TV 551 701 Navigator User Manual 87 900 934 01 M Contents Vibration Isolator Installation 282 Purge Valve Installation 283 Serial Cable Installation 284 TV 551 701 Controller Installation 284 Pump Used with Corrosive Gases291 Pump Used in Presence of Magnetic Fields 292 Accessories and Spare Parts 293 TV 551 701 Navigator User Manual 87 900 934 01 M 13 300 Contents 14 300 TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual Istruzioni per uso Indicazioni di Sicurezza per Pompe Turbomolecolari 16 Informazioni Generali 16 Immagazzinamento 19 Preparazione per l installazione 19 Installazione 21 Fissaggio della pompa 22 Uso24 Accensione ed Uso del TV 903 Pumping System 25 Arresto del TV 551 701 Navigator 25 Arresto di Emergenza 26 Manutenzione 27 Smaltimento 28 Traduzione delle istruzioni originali 5 Agilent Technologies 15 300 1 Istruzioni per uso Indicazioni di Sicurezza per Pompe Turbomolecolari Le pompe Turbomolecolari descritte nel seguente Manuale di Istruzioni hanno una elevata guantita di energia cinetica dovuta alla alta velocit di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contat
153. nections fix the two flanges with the clamps as shown in the figure Figure 58 TV 551 701 Navigator User Manual 87 900 934 01 M 287 300 17 Technical Information WARNING It is mandatory to connect the pump in such a way to withstand the torque specified in the IN STRUCTION FOR USE section Specifically pay attention to clamp design material of clamps and bolts and bolt fixing torque For ConFlat flange connections we recommend using Agilent hardware To facilitate assembly and dismantling apply Fel pro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Note that the connections can be made only with the bolt in the lower side Attach the units and tighten each one in turn Re peat the sequential tightening until the flange faces meet Exercise care when tightening nuts and bolts to avoid creating dents in the envelope as this may cause the pump rotor to lock Connection B Fore Vacuum Pump A flange KF 25 NW is available to connect the Tur bo V551 701 pump to the fore vacuum pump hose or vacuum approved pipe can be used If a rigid pipe is used any vibration generated by the mechanical pump must be eliminated through the use of bellows The Turbo V551 701 pump is characterized by its high compression
154. nformation TV 551 701 Navigator morate priklju iti na primarno rpalko glej Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M Priro nik za Navodila 15 Pritrjevanje Erpalke e pride do napake na rotorju potem lahko med povezavo rpalke s sistemom pride do velikega navora e povezava ne more izdr ati tak nega navora se lahko rpalka izklju i iz sistema ali se ohi je motorja iztrga iz nostilca rpalke V tak nem primeru lahko priletijo kovinski delci iz rpalke ali sistema in povzro ijo resne po kodbe ali smrt in ali po kodujejo okoli ko opremo Namestite TV 551 701 Navigator na stabilno pozicijo tako da zmontirate dovodno prirobnico turbo rpalke na prirobnico na sistemu tako da povezava lahko zdr i navor ve ji od 8600 Nm okoli osi ISO K prirobnico lahko na primer pritrdite s pomo jo jeklenih dr al kot pri Agilent modelu IC63250DCMZ Naslednja tabela za vsako prirobnico prikazuje tevilo potrebnih IC63250DMZ pritrjeval ter potreben navor za pritrjevanje Tab 1 PRIROBNICA N NAVOR ISO 160 10 35 Nm ISO 200 8 35 Nm Naslednja tabela za vsako ISO F prirobnico prikazuje tevilo potrebnih vijakov ter potreben navor za pritrjevanje Tab 2 PRIROBNICA N NAVOR ISO 160 F 8 5 Nm ISO 200 F 12 5 Nm Razred jeklenih vijakov za F prirobnico mora biti gt lt 8 8 Turbo rpaklo z dovodno ConFlat prirobnico je treba fiksirati na vakuumsko le i e s pomo
155. ni che richiedono un vuoto pulito Ha inoltre dei connettori ausiliari tramite i quali possibile alimentare un ventilatore aggiuntivo comandare la valvola di vent pilotarlo da remoto tramite un computer host collegato con linea seriale RS232 o RS485 Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical information TV 551 701 Navigator User Manual 87 900 934 01 M 17 300 1 Istruzioni per uso Questo manuale utilizza le seguenti convenzioni Fair messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni al apparecchiatura id messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali Le note contengono informazioni importanti estrapolate dal testo 18 300 TV 551 701 Navigator User Manual 87 900 934 01 M Istruzioni per l uso 1 Immagazzinamento Per garantire il massimo livello di funzionalita ed affidabilita del le pompe Turbomolecolari Agilent devono essere osservate le seguenti prescrizioni durante il trasporto lo spostamento e l immagazzinamento delle pompe non devono essere superate le seguenti con dizioni ambientali temperatura da 20
156. ningar som kr ver ett rent vakuum TV 551 701 Navigator har dessutom en hj lpkontakt som g r det m jlig att f rse str m till en extra ventilator att kontrollera avluftningsventilen och att fj rrstyra den med hj lp av en host dator som r ansluten genom seriell f rbindelse RS 232 RS 485 De f ljande avsnitten inneh ller all information som beh vs f r att garantera operat rens s kerhet under anv ndningen Detaljerade uppgifter finns i bilagan Technical information TV 551 701 Navigator User Manual 87 900 934 01 M 115 300 8 Bruksanvisning OBSERVER I bruksanvisningen anv nds f ljande standardrubriker Detta varningsmeddelande visas framf r procedurer som m ste f ljas exakt f r att inte risk f r maskinskada skall uppst Varningsmeddelandena informerar operat ren om att en speciell procedur eller en viss typ av arbete m ste utf ras exakt enligt anvisningarna I annat fall finns risk f r sv ra personskador Detta visar p viktig information i texten F rvaring OBSERVER Respektera f ljande anvisningar f r att garantera optimal prestanda och drifts kerhet f r Agilent turbomolekyl ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rh llanden respekteras Temperaturomrade 20 C till 70 C Relativ fuktighet O till 95 utan kondens Kunden ska alltid mjukstarta de turbomolekyl ra pumparna n r de mottas och s tts i
157. nstwo i Zdrowie zataczona do niniejszej instrukcji Jeden egzemplarz karty musi by wto ony do opakowania systemu przed jego wysytka Jezeli pompa musi by poddana rozbi rce rzystapi do jej eliminacji zgodnie z obowiazujacymi krajowymi normami w meritum sprawy 180 300 TV 551 701 Navigator User Manual 87 900 934 01 M Podrecznik Instrukcji 12 Przetworstwo odpadow Objasnienie znajdujacego sie na etykiecie znaczenia logo WEEF Uzyty ponizej symbol jest zgodny z wymogiem zarzadzenia WEEE Unii Europejskiej Symbol ten prawomocny tylko w krajach Unii Europejskiej oznacza ze wyrob ktory nim zostal oznaczony NIE moze byc przetworzony jako odpad razem z innymi domowymi lub przemyslowymi natomiast musi byc skladowany w miejscu przeznaczonym dla odpadow do przerobki zroznicowanej Dlatego tez poleca sie uzytkownikowi po uprzedniej weryfikacji terminu i warunkow zawartych w kontrakcie sprzedazy nawiazac kontakt z dostawca lub sprzedawca urzadzenia w celu uruchomienia procesu zbiorki i przerobu TV 551 701 Navigator User Manual 87 900 934 01 M 181 300 12 Podrecznik Instrukcji Przetworstwo odpadow 182 300 TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual 13 N vod k Pouziti Bezpe nostni navod pro Turbomolekul rni vyv vy 184 V eobecn informace 185 Uskladn n 186 P prava k instalaci 187 Instalace 188 Mont v v vy 189 Pou it 191 Zapnut a pou
158. oed de luchtuitlaatkleppen kunnen worden aangestuurd en waarmee het systeem d m v een serieel aangesloten host computer op afstand kan worden bediend RS 232 RS 485 In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens het gebruik van de apparatuur te verzekeren Gedetailleerde informatie is te vinden in de bijlage Technical information TV 551 701 Navigator User Manual 87 900 934 01 M 87 300 6 Bedrijfshandleiding Deze handleiding maakt van de volgende symbolen gebruik a10 vre jie Bij dit synbool staat tekst met procedures die indien niet opgevolgsd schade aan apparatuur kunnen veroorzaken JH LINE Bij dit symbool staat tekst die de aandacht van de operator vestigt op een speciale procedure of methode die indien niet correct uitgevoerd ernstig lichamelijk letsel kan veroorzaken De opmerkingen bevatten belangrijke informatie die uit de tekst is gelicht 88 300 TV 551 701 Navigator User Manual 87 900 934 01 M Bedrijfshandleiding 6 Opslag Om een zo goed mogelijke werking en betrouwbaarheid van de Turbomoleculaire pompen van Agilent te garanderen moeten de volgende voorschriften in acht worden genomen tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan temperatuur van 20 C tot 70 C relatieve vochtigheid van 0 tot 95 niet condenserend de klant moet de turbomoleculair
159. ogen 10 2 3 10 N Helium 8 10 ER 8 Hydrogen 10 10 10 1 10 100 Foreline pressure mbar Figure 15 Graph of compression ratio vs foreline pressure TV 551 TV 701 100 Throughput mbar l s TV 551 701 Navigator User Manual 87 900 934 01 M 0 1 10 10 107 1 1 Inlet pressure mbar Inlet pressure mbar Figure 16 Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 247 300 17 Technical Information Interconnections The following figure shows the TV 551 701 interconnections S ERIAL LINE ENT VALVE TPUT Figure 17 TV 551 701 interconnections P3 Vent Figure 18 P3 Vent This is a dedicated 24 Vde connector to control the optional vent valve 248 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 P4 External Fan Figure 19 External fan This is a dedicated 24 Vdc connector to supply the optional external fan J1 In Out Figura 2 In Out This connector carries all the input and output sig nals to remote control the TV 551 701 Navigator Itis a 15 pins D type connector the available sig nals are detailed in the table the following para graphs describe the signal characteristics and us
160. oller o cabo de alimentac o 82 300 TV 551 701 Navigator User Manual 87 900 934 01 M Manual de Istruc es 5 Manutenc o O TV 551 701 Navigator n o requer qualquer manutenc o Todas as operac es devem ser efectuadas por pessoal autorizado ATENCAO Antes de executar qualquer operac o no sistema deslig lo da alimentac o introduzir ar na bomba abrindo a v lvula espec fica aguardar at a completa paragem do rotor e at que a temperatura superficial da bomba seja inferior a 50 C Em caso de defeito poss vel usufruir do servi o de assist ncia Agilent que permite obter uma bomba regenerada que substitua a que apresenta defeito Antes de reenviar ao fabricante uma bomba para as repara es ou o advanced exchange service indispens vel preencher e enviar ao escrit rio de vendas local a ficha Seguran a e Sa de anexa ao presente manual de instru es A c pia da mesma deve ser colocada na embalagem do sistema antes da expedi o Caso uma bomba tenha que ser destru da proceder sua elimina o respeitando as normas nacionais espec ficas TV 551 701 Navigator User Manual 87 900 934 01 M 83 300 5 Manual de Istru es Eliminacao 84 300 Significado do logotipo WEEE presente nos rotulos O simbolo abaixo indicado aplicado de acordo com a directiva CE denominada WEEE Este s mbolo v lido apenas para os pa ses da Comunidade Europeia indica que o produto no qu
161. on pu essere fissato tramite la sua base ara MTV 551 701 Navigator appartiene alla seconda categoria di installazione o sovratensione prevista dalla normativa EN 61010 1 Connettere quindi il dispositivo ad una linea di alimentazione che soddisfi tale categoria Il TV 551 701 Navigator ha dei connettori per gli ingressi uscite e per la comunicazione seriale che devono essere connessi ai circuiti esterni in modo che nessuna parte sotto tensione sia accessibile Assicurarsi che l isolamento del dispositivo connesso al TV 551 701 Navigator abbia un isolamento adeguato anche in condizione di guasto singolo come previsto dalla nor mativa EN 61010 1 Per l installazione degli accessori opzionali vedere Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 23 300 1 Istruzioni per uso Uso In questo paragrafo sono riportate le principali procedure operative Prima di usare il sistema effettuare tutti i collegamenti elettrici e pneumatici Durante l eventuale riscaldamento della camera da vuoto la temperatura sulla flangia di ingresso non deve essere superiore a 120 C AVVERTENZA Non far funzionare mai la pompa se la flangia di ingresso non collegata alla camera a vuoto o non chiusa con la flangia di chiusura Non toccare la turbopompa e i suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura pud causare lesioni alle persone ATTENZIONE Evitare u
162. or User Manual 87 900 934 01 M Istruzioni per l uso 1 Manutenzione II TV 551 701 Navigator non richiede alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato Prima di effettuare qualsiasi intervento sul sistema scollegarlo dall alimentazione mandare all aria la pompa aprendo l apposita valvola attendere fino al completo arresto del rotore ed attendere che la temperatura superficiale della pompa sia inferiore a 50 C In caso di guasto possibile usufruire del servizio di riparazione Agilent che permette di ottenere una pompa rigenerata in sostituzione di quella guasta Prima di rispedire al costruttore una pompa per riparazioni o advanced exchange service indispensabile compilare e far pervenire al locale ufficio vendite la scheda Sicurezza e Salute allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nell imballo del sistema prima della spedizione Qualora una pompa dovesse essere rottamata procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche TV 551 701 Navigator User Manual 87 900 934 01 M 27 300 1 Istruzioni per uso Smaltimento Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato amp applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale amp applicato NON deve
163. or User Manual 87 900 934 01 M 229 300 16 Instructions for Use Switching on and Use of TV 551 701 Navigator To switch on the TV 551 701 Navigator it is necessary to supply the mains The integrated controller automatically recognizes the interlock and start signals presence and start up the pump Soft Start mode is used to start the pump after it has stopped for a long time To start with the Soft Start function on activate the mode in the software see paragraph RS 232 485 COMMUNICA TION DESCRIPTION in the Technical Information appendix The green LED located on the TV 551 701 Navigator base front panel indicates with its flashing frequency the system operating conditions with no flashing the pump is normally rotating Slowly flashing period of about 400 ms the system is in ramp or in braking or in Stop or in Waiting for interlock status fast flashing period of about 200 ms error condition TV 551 701 Navigator Switching off To switch off the TV 551 701 Navigator it is necessary to remove the mains The integrated controller immediately stops the pump WARNING The Turbo V controller must be powered with 3 wire power cord see orderable parts table and plug internationally approved for user s safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock and to satisfy CE requirements High voltage developed in the cont
164. osici n EI TV 551 701 Navigator no puede fijarse utilizando su base ATENCI N EI TV 551 701 Navigator pertenece a la segunda categoria de instalaci n o sobretensi n prevista por la normativa EN 61010 1 Por lo tanto este dispositivo debe ser conectado a una linea de alimentaci n adecuada para dicha categoria EI TV 551 701 Navigator tiene conectores para las entradas salidas y para la comunicaci n serial que deben ser conectados a los circuitos externos de manera que ninguna parte bajo tensi n quede accesible Controlar que el aislamiento del dispositivo conectado al TV 551 701 Navigator mantenga una acci n aisladora incluso en caso de verificarse una averia de conformidad con lo establecido por la normativa EN 61010 1 Para instalar los accesorios opcionales v ase Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 65 300 4 Manual de istrucciones Uso En este apartado se citan los procedimientos operativos principales Antes de usar el sistema realizar todas las conexiones el ctricas y neum ticas Durante el posible calentamiento de la c mara de vacio la temperatura de la brida de entrada no ha de ser superior a 120 C ADVERTENCIA ATENCI N No hacer funcionar nunca la bomba si la brida de entrada no est conectada al sistema o no est cerrada con la brida de cierre No tocar la turbo bomba y sus posibles accesorios durante las operaciones de calentamiento La alt
165. ottoposta ad una coppia significativa Se la connessione non sufficiente per resistere alla suddetta coppia la pompa potrebbe staccarsi dal sistema o il motore potrebbe staccarsi dall involucro della pompa In questo caso frammenti di metallo potrebbero essere proiettati dalla pompa o dal sistema i quali potrebbero causare seri danni o la morte e o danni agli apparati adiacenti Fissare il TV 551 701 Navigator in posizione stabile montando la flangia di ingresso della turbopompa alla controflangia di sistema con una connessione capace di resistere ad una coppia di 8600 Nm attorno al proprio asse Per esempio la flangia ISO K pud essere fissata con morsetti in acciaio ad alta resistenza tipo il modello Agilent IC63250DCM2 La seguente tabella descrive il numero di viti necessarie e con quale coppia di serraggio stringerle Tab 1 Flangia i N Coppia di serraggio 35 Nm ISO 200 8 35 Nm La seguente tabella descrive per ogni flangia ISO F il numero di viti necessarie e con quale coppia di serraggio stringerle Tab 2 Coppia di serraggio TV 551 701 Navigator User Manual 87 900 934 01 M Istruzioni per l uso 1 La turbopompa con flangia di ingresso ConFlat deve essere fissata alla camera da vuoto per mezzo dell apposita minuteria meccanica Agilent Per ulteriori dettagli vedere l appendice Technical Information II TV 551 701 Navigator pu essere installato in qualsiasi posizione Il TV 551 701 Navigator n
166. ozn pritomnost sign lov spojenia a spustenia a zapne vyvevu Re im Soft Start slu i na zapnutie vyvevy po dl om vyradeni z prev dzky Ak chcete reZim Soft Start odblokovat musite ho aktivovat vhodnym softwarovym prikazom pozri Cast RS 232 485 COMMUNICATION DESCRIPTION v dodatku Technical Information Zelena dioda LED na zakladnom elnom paneli zariadenia TV 551 701 Navigator indikuje frekvenciou blikania sposob innosti systemu a iadne blikanie v veva norm lne rotuje pomal blikanie interval asi 400 ms syst m je v niektorom z t chto stavov n beh brzdenie Stop alebo akanie na spojenie a r chle blikanie interval asi 200 ms chybov stav Vypnutie zariadenia TV 551 701 Navigator Ak chcete vypn zariadenie TV 551 701 Navigator mus te ho odpoji od zdroja nap jania Zabudovan kontroln modul v vevu okam ite zastav 204 300 TV 551 701 Navigator User Manual 87 900 934 01 M N vod na Obsluhu 14 Z dovodu bezpe nosti obsluhuj ceho pracovnika musi byt kontrolne zariadenie nap jan pomocou 3 ilovej n ry vi tabu ku dielov ktor mo no objedna so z str kou medzin rodne schv lenou T to n ru so z str kou pou vajte spolu s vhodne uzemne nou z suvkou aby nedo lo k z sahu elektrick m pr dom a aby boli splnen po iadavky noriem ES Vysok nap tie v kontrolnom zariaden m e sp sobi v ne kody alebo smr Prv ne
167. p Turbomolekularnych 170 Informacje ogolne 171 Magazynowanie 172 Przygotowanie do instalacji 173 Instalacja 174 Mocowanie pompy 175 Uzytkowanie 177 Konserwacja 180 Przetworstwo odpadow 181 N vod k Pouziti 183 Bezpe nostni n vod pro Turbomolekul rn vyv vy 184 V eobecne informace 185 Uskladneni 186 Priprava k instalaci 187 Instalace 188 Mont z vyvevy 189 TV 551 701 Navigator User Manual 87 900 934 01 M Contents Pou iti 191 Udr ba 194 Likvidace 194 14 Navod na Obsluhu 195 Bezpe nostne pokyny pre Turbomolekularne vyvevy 196 V eobecne inform cie 197 Uchov vanie 198 Priprava na instal ciu 199 Instal cia 200 Upevnenie vyvevy 201 Pou itie 203 Udr ba 206 Likvidacia 207 15 Priro nik za Navodila 209 Varnostna navodila za Turbomolekularne rpalke 210 Splo ne informacije 211 Shranjevanje 212 Priprava za monta o 213 Monta a 214 Pritrjevanje rpalke 215 Uporaba 217 Vzdr evanje 219 TV 551 701 Navigator User Manual 87 900 934 01 M 11 300 Contents 12 300 16 Odlaganje opadkov 219 Instructions for Use 221 Safety Guideline for Turbomolecular Pumps 222 General Information 223 Storage 224 Preparation for Installation 225 Installation 226 Pump Fixing 227 Use 229 Maintenance 231 Disposal 232 17 Technical Information 233 Description of the TV 551 701 Navigator 235 Technical Specification 242 TV 551 701 Navigator outline 244 Interconnections 248 How to Con
168. peration 278 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 TV 551 701 Navigator Controller Compatible Vent Valve mod 969 9834 50 mm Figure 46 This vent valve waits before opening a minimum time of about 5 sec This time can be increased up to about 220 min by means of a setting of the Navigator software optional To install the vent valve unscrew the threaded plug see figure below Figure 47 Then screw the vent valve into the pump and tighten it using a 16 mm hexagonal spanner with a torque of 2 5 Nm TV 551 701 Navigator User Manual 87 900 934 01 M 279 300 17 Technical Information Figure 48 CAUTION Do not overtighten the valve as this may damage the thread on the pump Then connect the cable from the valve to the suita ble connector on the controller see the preceding paragraph INTERCONNECTIONS Standard Rack Controller Compatible Vent Valve mod 969 9843 Figure 49 280 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 This vent valve has a fixed delay time of about 5 sec This value can be used only with rack controller To install the vent valve execute the same steps as the vent valve model 969 9834 see the above paragraph Vent Devi
169. r Manual 87 900 934 01 M 1 300 Contents 8 300 Generel information 101 Opbevaring 102 Forberedelser for installation 103 Installation 104 Fastgorelse af pumpe 105 Anvendelse 107 N dstop 109 Vedligeholdelse 110 Bortskaffelse 111 Bruksanvisning 113 S kerhetsanvisningar f r Molekyl ra turbopumpar 114 Allm n information 115 F rvaring 116 F rberedelser f r installation 117 Installation 118 Fasts ttning avpump 119 Anv ndning 121 Underh ll 124 Bortskaffning 125 Instruksjon Manual 127 Sikkerhetsanvisninger for Turbomolekyl re pumper 128 Generell informasjon 129 TV 551 701 Navigator User Manual 87 900 934 01 M Contents Lagring 130 Klargj re til installasjon 131 Installasjon 132 Festing av pumpen 133 Bruk 135 Vedlikehold 138 Eliminering 139 10 Ohjek sikirja 141 Turbomolekyylipumppujen Turvaohjeet 142 Yleisi tietoja 143 Varastointi 144 Valmistelut asennusta varten145 Asennus 146 Pumpun kinnitys147 K ytt 149 Huolto 152 H vitt minen 153 11 Felhaszn l i K zik nyv 155 Biztons gi tmutat Turb molekul ris szivatty khoz 156 ltal nos inform ci 157 T rol s 158 El k szit s telepit sre 159 TV 551 701 Navigator User Manual 87 900 934 01 M 9 300 Contents 10 300 12 13 Telepit s 160 A szivatty r gzitese 161 Haszn lat 163 Karbantart s 166 Megsemmisites 167 Podrecznik Instrukcji 169 Wskaz wki dotyczace bezpieczenstwa dla Pom
170. r liberada UAH Para evitar da os a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instrucciones de instalaci n descritas en el presente manual 58 300 TV 551 701 Navigator User Manual 87 900 934 01 M Manual de istrucciones 4 Informaci n general Este equipo es para uso profesional El usuario ha de leer atentamente el presente manual de instrucciones y cualquier otra informaci n suplementaria facilitada por Agilent antes de usar el aparato Agilent se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas nacionales especificas El TV 551 701 Navigator es un sistema integrado compuesto por una bomba turbomolecular para aplicaciones de alto y ultra alto vacio integrada por el controler correspondiente El sistema puede bombear cualquier tipo de gas o de composici n gaseosa pero no es adecuado para bombear liquidos o particulas s lidas El efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad 42000 r p m m x movida por un motor el ctrico trif sico de alto rendimiento El TV 551 701 Navigator no posee ning n agente contaminante y por lo tanto es adecuado para aplicaciones que requieren un vac o limpio Asimismo el TV 551 701 Navigator posee conectores auxiliares con los que se pued
171. ratio also for oil vapors When using a mechanical oil sealed pump it is advisable to install a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil backstreaming 288 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 Connection Configurations Figure 59 TV 551 701 Navigator User Manual 87 900 934 01 M 289 300 17 Technical Information Connection C Electrical Figure 60 The turbopump is connected to the controller through an 8 pin connector Pins B C and D are the 3 phase supply to the motor pins A and F are connected to the temperature sensor NTC type 30 KQ resistance at 25 C and pin E is connected to the pump ground pins G and H are not connected If the temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60 C the sensor automatically cuts out the power supply 290 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 Pump Used with Corrosive Gases To prevent damage to the bearings an inert gas must flow into the pump body around the upper bearing towards the forevacuum line To supply the inert purge gas e g n
172. roller can cause severe injury or death Before servicing the unit disconnect the input power cable Emergency Stop To immediately stop the TV 551 701 Navigator in an emergency condition it is necessary to remove the supply cable from the mains plug 230 300 TV 551 701 Navigator User Manual 87 900 934 01 M Instructions for Use 16 Maintenance The TV 551 701 Navigator does not require any maintenance Any work performed on the system must be carried out by authorized personnel WARNING Before carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center who can supply a reconditioned pump to replace that broken down Before returning the pump to the constructor for repairs or advanced exchange service the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the system package before shipping If a pump is to be scrapped it must be disposed of in accordance with the specific national standards TV 551 701 Navigator User Manual 87 900 934 01 M 231 300 16 Instructions for Use Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accord
173. rt cover as shown in the following figure Figure 53 and then screw the gas purge valve with a torque of 2 5 Nm as shown in the following figure Figure 54 TV 551 701 Navigator User Manual 87 900 934 01 M 283 300 17 Technical Information Serial Cable Installation The supplied serial cable must be installed when the TV 551 701 Navigator or the optional vent valve have to be controlled by means of a remote computer The cable is installed fixing the 9 pin D type connector into the P2 serial connector as shown in the following figure Figure 55 TV 551 701 Controller Installation The controller can be mounted in two position bottom mounting as per the complete system a side mounting To install the controller execute the following procedures 284 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 Bottom Mounting See the following figure 1 Turn the pump upside down 2 Place the three fixing blocks with the through holes toward the inside and fix them with the three M6 screws to the pump bottom 3 Place the controller on the blocks with the pump cable toward the pump body 4 Fix the controller to the blocks by means of the three socket head screws M5 5 Turn the pump again 6
174. rti oscillazioni o bruschi spostamenti della turbopompa quando in funzione I cuscinetti potrebbero danneggiarsi Per la mandata all aria della pompa utilizzare aria 0 gas inerte esente da polvere o particelle La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar oltre la pressione atmosferica Per il pompaggio di gas aggressivi queste pompe sono dotate di una apposita porta attraverso la quale necessario fornire alla pompa un flusso di gas inerte Azoto o Argon per proteggere i cuscinetti vedere l appendice Technical Information AVVERTENZA Quando la pompa viene utilizzata per il pompaggio di gas tos sici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza di gas esplosivi 24 300 TV 551 701 Navigator User Manual 87 900 934 01 M Istruzioni per l uso 1 Accensione ed Uso del TV 903 Pumping System Per accendere il TV 551 701 Navigator sufficiente fornire la tensione di alimentazione Il controller incorporato riconosce automaticamente la presenza dei segnali di interlock e di avvio ed avvia la pompa Il modo Soft Start previsto per accendere la pompa dopo un prolungato periodo di fermo Per avere una partenza con Soft Start attivo occorre abilitare il modo suddetto tramite software vedere il paragrafo RS232 485 COMMUNICATION DESCRIPTION nell appendice Technical Information Il LED
175. ructions for Use Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy may be released WARNING To avoid damage to equipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed 222 300 TV 551 701 Navigator User Manual 87 900 934 01 M Instructions for Use 16 General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The TV 551 701 Navigator is an integrated system with a turbo molecular pump for high and ultra high vacuum applications with its relevant controller The system can pumps any type of gas or gas compound It is not suitable for pumping liquids or solid particles The pumping action is obtained through a high spe
176. semmisit s A c mk n jelenl v WEEE logo jelent se A lent l that szimb lum az EK WEEE elnevezes ir nyelv vel sszhangban ker l alkalmaz sra Ez a szimb lum mely csak az Eur pai K z sseg orsz gaiban rv nyes azt jelzi hogy a term k melyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal egy tt megsemmisitesre hanem azt egy szelektiv hullad kgy jt rendszerbe kell tov bbitani A v gfelhaszn l nak a gy jt si s megsemmisit si elj r s beindit sa c lj b l az ad sv teli szerz d s hat rid inek s felt teleinek alapos ttanulm nyoz sa ut n fel kell vennie a kapcsolatot a berendez s sz ll t j val legyen ez a gy rt vagy egy viszontelad TV 551 701 Navigator User Manual 87 900 934 01 M 167 300 11 Felhaszn l i K zik nyv Megsemmis t s 168 300 TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual 12 Podrecznik Instrukcji Wskaz wki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych 170 Informacje ogolne 171 Magazynowanie 172 Przygotowanie do instalacji 173 Instalacja 174 Mocowanie pompy 175 Uzytkowanie 177 W czenie i U ytkowanie systemu TV 551 701 Navigator 178 Zatrzymanie systemu TV 551 701 Navigator 178 Zatrzymanie Awaryjne 179 Konserwacja 180 Przetworstwo odpadow 181 Ttumaczenie instrukcji oryginalnej E Agilent Technologies 169 300 12 Podrecznik Instrukcji W
177. sf ren regn sn is damm aggressiva gaser och inte heller i explosiv eller brandfarlig milj F ljande krav p omgivningsf rh llanden g ller vid drift a maximitryck 2 bar over atmosf riskt tryck a temperatur fran 5 C till 45 C se bild i Technical Information relativ luftfuktighet 0 90 utan kondens usa ja Ta bort tejpen och skyddsproppen f rst n r turbopumpen ska anslutas till systemet 118 300 Figur 2 I n rvaro av magnetf lt ska pumpen skyddas med en s rskild sk rm Se bilagan Technical information f r ytterligare upplysningar TV 551 701 Navigator m ste anslutas till en huvudpump se schemat i Technical information TV 551 701 Navigator User Manual 87 900 934 01 M Bruksanvisning 8 Fasts ttning av pump VARNING I h ndelse av rotorfel kan anslutningen mellan pumpen och systemet uts ttas f r ett h gt vridmoment Om anslutningen inte t l ovann mnda vridmoment kan pumpen lossna fr n systemet eller motorn kan lossna fr n pumpens h lje I detta fall kan metallf rem l slungas iv g fr n pumpen eller systemet och f rorsaka allvarliga skador eller d dsfall och eller skador p apparater i n rheten F st TV 551 701 Navigator i ett stabilt l ge genom att ansluta turbopumpens intagsfl ns till systemets fl ns som m ste t la ett vridmoment p 8600 Nm kring sin axel Exempelvis kan ISO K fl nsen f stas med st lklamrar
178. skaz wki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych Pompy Turbomolekularne opisane w niniejszej Instrukcji Obstugi posiadaja wysoka ilo energii kinetycznej spowodowanej bardzo wysoka predkoscia obrotowa razem z masa wlasciwa wirnik w W przypadku uszkodzenia systemu na przyktad z powodu kontaktu miedzy wirnikiem a stojanem lub z powodu pekniecia wirnika energia obrotowa moze by zwolniona ZAGROZENIE Aby unikna uszkodzenia aparatury i zapobiec uszkodzeniom ciata operator w nalezy obowiazkowo przestrzega zalecen dotyczacych instalacji opisanych w niniejszej instrukcji obstugi 170 300 TV 551 701 Navigator User Manual 87 900 934 01 M Podrecznik Instrukcji 12 Informacje ogolne Ta aparatura jest przeznaczona do u ytku zawodowego U ytkownik musi przeczyta bardzo uwa nie niniejsza instrukcje kazda dodatkowa informacje dostarczona przez firme Agilent przed uzytkowaniem aparatury Firma Agilent uchyla sie od jakiejkolwiek odpowiedzialno ci w przypadku czeSciowego lub calkowitego braku przestrzegania instrukcji w przypadku niewtasciwego uzytkowania przez nieprzeszkolony personel w przypadku nieupowaznionych interwencji jak i w przypadku braku zastosowania odpowiednich norm krajowych System TV 551 701 Navigator jest zintegrowanym systemem sktadajacym sie z pompy turbomolekularnej dla zastosowan wysokich i ultra wysokich pr ni jak i przez odpowiedni system sterowania tzw kontroler System jest w s
179. ssa Kyseisen kaavakkeen kopio tulee liitt j rjestelm n pakkaukseen ennen sen l hett mist 152 300 Mik li pumppu t ytyy romuttaa toimikaa sen h vitt misess kansallisen lains d nn n m r m ll tavalla TV 551 701 Navigator User Manual 87 900 934 01 M Ohjek sikirja 10 H vitt minen Pakkausmerkinn iss olevan WEEE logon merkitys Alla n kyv merkki on lis tty pakkaukseen EY n ns WEEE direktiivin mukaisesti Merkki koskee ainoastaan Euroopan Unionin j senmaita tarkoittaa ett tuotetta EI saa h vitt tavallisen kotitalous tai teollisuusj tteen mukana vaan se on toimitettava erilliseen ker yspisteeseen Loppuk ytt j kehotetaan sen vuoksi ottamaan ker ys ja h vitt misprosessia varten yhteytt laitteen toimittajaan olipa se sitten laitteen valmistaja tai j lleenmyyj tarkastettuaan ensin kaupan sopimusehdot TV 551 701 Navigator User Manual 87 900 934 01 M 153 300 10 Ohjek sikirja H vitt minen 154 300 TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual 11 Felhaszn l i K zik nyv Biztons gi tmutat Turb molekul ris szivatty khoz 156 ltal nos inform ic 157 T rol s 158 El keszites telepitesre 159 Telepites 160 A szivatty r gzit se 161 Haszn lat 163 A TV 551 701 Navigator bekapcsol sa s haszn lata 164 A TV 551 701 Navigator kikapcsol sa 164 Veszleallitas 165 Karbantart s 166 Me
180. st na maxim lni provozuschopnost a spolehlivost turbomolekul rnich vyv v firmy Agilent musite dodr ovat n sledujici pokyny a P i p eprav p em s ov n a skladov n vyv v byste nem li p ekra ovat n sleduj c technick podm nky prost ed Teplotn rozp t 20 C a 70 C a Rozp t vlhkosti 0 a 95 bez sr en turbomolekularni v v vy mus u ivatel po dod vce a poprv v dycky spou t t pozvoln skladovatelnost turbomolekul rn v v vy je 10 m s c ode dne doru en Pokud dojde z jak hokoli d vodu k p ekro en skladovac lh ty v v vu mus te vr tit v robci Informujte se pros m u m stn ho z stupce pro prodej a servis v v v firmy Agilent 186 300 TV 551 701 Navigator User Manual 87 900 934 01 M N vod k Pou iti 13 Priprava k instalaci Vyv va TV 551 701 Navigator se dod v ve speci lnim ochrann m obalu Pokud toto baleni vykazuje zn mky po kozeni k n mu mohlo dojit b hem prepravy kontaktujte va i mistni prodejni pobocku Pri vybalovani davejte pozor aby zarizeni nespadlo a chra te jej pred v emi nenadalymi narazy otfesy nebo vibracemi Balici material nelikvidujte nedovolenym zpusobem Tento material Ize 100 recyklovat a spl uje poZadavky sm rnice EEC 85 399 Aby se zamezilo probl m m s odply ovanim nepou vejte hol ruce pii manipulaci s komponenty ktere budou wystaveny vakuu V dy pou ivejte rukavice
181. t Para ulteriores detalhes consultar o ap ndice Technical Information O TV 551 701 Navigator pode ser instalado em qualquer posic o O TV 551 701 n o pode ser fixado atrav s da sua base CUIDADO O TV 551 701 Navigator pertence segunda categoria de instala o ou sobretens o prevista pela norma NE 61010 1 Portanto ligue o dispositivo a uma linha de alimenta o apropriada para esta categoria O TV 551 701 Navigator tem dois conectores para as entradas saidas e para a comunica o de s rie que devem ser ligados aos circuitos externos de modo a n o permitir o acesso s partes sob tens o Assegure se de que o isolamento do dispositivo ligado ao TV 551 701 Navigator esteja isolado correctamente mesmo em caso de avaria conforme previsto pela norma NE 61010 1 Para a instala o dos acess rios opcionais consultar Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 79 300 5 Manual de Istru es Utilizacao Neste par grafo s o descritos os principais procedimentos operacionais Antes de usar o sistema efectuar todas as liga es el ctricas e pneum ticas Durante o eventual aquecimento da c mara a v cuo a temperatura na flange de entrada n o deve ser superior a 120 C ATEN O Nunca activar a bomba se a flange de entrada n o estiver ligado c mara de v cuo ou n o estiver fechado com a flange de fecho N o tocar a turbobomba e os seus eventuais acess rios
182. t miseksi TV 551 701 Navigator User Manual 87 900 934 01 M Ohjek sikirja 10 Yleisi tietoja T m laite on tarkoitettu ammattimaiseen k ytt n Ennen laitteen k ytt nottoa tulee k ytt j n lukea huolellisesti ohjekirja ja muut Agilentin toimittamat lis tiedot Agilent ei ota vastuuta seurauksista jotka johtuvat laitteen k ytt ohjeiden t ydellisest tai osittaisesta laiminly nnist ammattitaidottoman henkil n virheellisest laitteen k yt st valtuuttamattomista toimenpiteist tai kansallisen lains d nn n vastaisesta k yt st TV 551 701 Navigator on kokonaisj rjestelm joka muodostuu valvojalla varustetusta turbomolekyylipumpusta korkean ja ultrakorkean tyhji n k ytt varten J rjestelm kykenee pumppaamaan kaiken tyyppisi kaasuja tai kaasukoostumuksia Se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeudella 42000 kierrosta min max py riv n turbiinin avulla jota k ytt korkeatehoinen kolmivaiheinen s hk moottori TV 551 701 Navigator j rjestelm ss ei ole lainkaan likaavia aineita joten se soveltuu my s puhdasta tyhji t vaativiin k ytt tarpeisiin TV 551 701 Navigator j rjestelm n kuuluu lis ksi apuliittimi joiden avulla on mahdollista k ytt lis tuuletinta ohjata tuuletusventtiili ja k ytt j rjestelm kauko ohjauksella sarjakytketyn is nt tietokoneen avulla RS 232 RS 485
183. t vystaveno velk mu to iv mu momentu Pokud toto propojen nebude schopno vydr et tento to iv moment vyv va by se mohla odpojit od syst mu nebo kryt elektromotoru by se mohl odpojit od pl t v vevy V tomto p pad by z vyv vy nebo syst mu mohly vylet t kovov lomky kter by mohly zp sobit v n raz nebo smrt a tak po kodit okoln zafizeni Vyv vu TV 551 701 Navigator um st te do stabilni polohy a privodni pr rubu turbomolekul rn vyv vy pripevn te k protipr rub syst mu pomoc pr pojky kter odol to iv mu momentu 8600 Nm kolem sv osy Nap p rubu ISO K lze p ipevnit p chytkami z vysoce pevn oceli jako je typ IC63250DCMZ firmy Agilent Nasledujici tabulka uvadi nezbytny po et prichytek IC63250DCMZ pro ka dou p rubu a p slu n utahovaci moment Tab 1 P RUBA PO ET UTAHOVAC MOMENT ISO 160 10 35 Nm ISO 200 8 35 Nm N sleduj c tabulka uv d nezbytn po et roub pro ka dou p rubu ISO F a p slu n utahovac moment Tab 2 P RUBA PO ET UTAHOVAC MOMENT ISO 160 F 8 5 Nm ISO 200 F 12 5 Nm T da ocelov ch roub pro p rubu F mus b t gt 8 8 Turbomolekul rn v v va se vstupn p rubou ConFlat se mus p ipevnit k vakuov komo e pou it m p slu n ho materi lu firmy Agilent Viz podrobn popis v p loze Technical Information V v vu TV 551 701 Navigator lze instalovat v libovoln poloze
184. tanie pompowa jakikolwiek typ gazu lub mieszanki gazowej ale nie jest przystosowany do pompowania p yn w lub sta ych cz stek Zjawisko pompowania jest uzyskane poprzez obrotow turbin o wysokiej pr dko ci max 42000 obr min nap dzan przez elektryczny silnik tr jfazowy o wysokiej wydajno ci System TV 551 701 Navigator jest ca kowicie bez czynnik w zanieczyszczaj cych i dlatego te jest to system odpowiedni do zastosowa gdzie jest wymagana tzw czysta pr nia Poza tym posiada konektory pomocnicze poprzez kt re istnieje mo liwo zasilania dodatkowego wentylatora sterowania zaworem wentylatora zdalnego pilotowania go poprzez g wny komputer host pod czonego z szeregowym portem RS232 lub RS485 W nast pnych paragrafach zosta y przedstawione wszystkie potrzebne informacje w celu zagwarantowania bezpiecze stwa operatora podczas u ytkowania aparatury Szczeg owe informacje zosta y przedstawione w dodatku dotycz cym informacji technicznych Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 171 300 12 Podrecznik Instrukcji W tej instrukcji zastosowano nastepujace umowne znaczenia Komunikaty zwiekszonej uwagi sa wyswietlane przed procedurami i w przypadku ich braku przestrzegania mo e doj do uszkodzenia aparatury Komunikaty zagrozeniu przyci gaj uwag operatora co do danej procedury lub danego post powania kt rego nieprawid owe wykonanie mo
185. tat napr klad po as prepravy obr te sa na miestne zast penie spolo nosti Agilent Po as vyba ovania syst mu dbajte na to aby zariadenie nespadlo nebolo vystaven n razu alebo prudk mu otrasu alebo vibr ci m Obalov materi l zlikvidujte predp san m sp sobom Materi l je 100 recyklovate n a spl a po iadavky smernice EEC 85 399 Ak chcete pred s probl mom s odply ovan m nechytajte komponenty ktor bud vystaven v kuu hol mi rukami V dy pou vajte rukavice alebo in vhodn ochranu Postava 1 Be n vystavenie vplyvu prostredia nem e zariadenie TV 551 701 Navigator po kodi Napriek tomu je vhodn aby zariadenie zostalo zabalen a do in tal cie kv li prevencii kontamin cie prachom TV 551 701 Navigator User Manual 87 900 934 01 M 199 300 14 Navod na Obsluhu Instal cia Vyvevu neinstalujte ani nepouZivajte v prostred vystavenom vonkaj m vplyvom d sneh ad prach koroz vne plyny ani vo v bu n ch prostrediach alebo tam kde existuje vysok riziko po iaru Po as innosti zariadenia je potrebn zabezpe i tieto vlastnosti prostredia maxim lny tlak 2 bary nad rov ou atmosf rick ho tlaku a teplota od 5 C do 35 C C pozri z vislos tlaku od teploty v dodatku Technical Information a relat vna vlhkos 0 90 bez kondenz cie Neodstra ujte lepiacu p sku a ochrann uz ver sk r
186. te rpalko na popravilo ali zamenjavo z drugo enoto morate izpolniti Health and Safety obrazec ki je prilo en navodilom in ga poslate lokalni prodajni pisarni Pred po iljanjem morate kopijo obrazca vstaviti v embala o sistema Sistem je treba uni iti v skladu z dolo enimi nacionalnimi standardi Odlaganje opadkov Pomen znamke WEEE na etiketah Spodaj navedeni simbol je v skladu z direktivo ES znano pod imenom WEEE Ta simbol ki velja samo v dr avah Evropske Skupnosti pomeni da izdelek NE SMETE ODSTRANITI skupaj z ostalimi komunalnimi ali pa industrijskimi odpadki temve morate poskrbeti za njihovo primerno lo evanje Zato pozivamo uporabnike da se ali pri prodajalnem centru ali pa pri prodajalcu seznani o postopku lo evanja in odstranitve odpadkov ele nato ko se je seznanil s pogoji in z merili kupopordajne pogodbe TV 551 701 Navigator User Manual 87 900 934 01 M 219 300 15 Priro nik za Navodila Odlaganje opadkov 220 300 TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual 16 Instructions for Use Safety Guideline for Turbomolecular Pumps 222 General Information 223 Storage 224 Preparation for Installation 225 Installation 226 Pump Fixing 227 Use 229 Switching on and Use of TV 551 701 Navigator 230 TV 551 701 Navigator Switching off 230 Emergency Stop 230 Maintenance 231 Disposal 232 Original Instructions E Agilent Technologies 221 30 16 Inst
187. te houden zolang deze niet in het systeem wordt ingebouwd zodat eventuele vervuiling door stof wordt voorkomen 90 300 TV 551 701 Navigator User Manual 87 900 934 01 M Bedrijfshandleiding 6 Installatie De pomp mag niet geinstalleerd en of gebruikt worden in ruimten die blootgesteld zijn aan de weersomstandigheden regen vorst sneeuw stof agressieve gassen of in ruimten met explosiegevaar of zeer groot brandgevaar Tijdens de werking moeten de volgende omgevingscondities aanwezig Zijn max druk 2 bar boven de atmosferische druk a temperatuur van 5 C tot 35 C zie grafiek in de bijlage Technical Information a relatieve vochtigheid 0 90 niet condenserend ni tel Alleen op het moment waarop de turbopomp op het systeem wordt aangesloten mogen de sticker en de beschermdop verwijderd worden Figura 1 In aanwezigheid van magnetische velden moet de pomp op passende wijze afgeschermd worden Zie de bijlage Technical Information voor meer informatie De TV 551 701 Navigator moet op een primaire pomp aangesloten zijn zie schema in Technical information TV 551 701 Navigator User Manual 87 900 934 01 M 91 300 6 Bedrijfshandleiding Bevestiging van de pomp AVESNES Als schade aan de rotor optreedt zou de verbinding tussen de pomp en het 92 300 systeem aan een behoorlijk groot koppel onderhevig kunnen zijn Als de verbinding niet voldoende
188. teur host connect par ligne s rielle Les paragraphes suivants fournissent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 45 300 3 Mode d emploi Cette notice utilise les signes conventionnels suivants unfall Les messages d attention apparaissent avant certaines proc dures qui si elles ne sont pas observ es pourraient endommager s rieusement l appareillage MISERIS Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une manoeuvre sp ciale qui effectu e de fa on impropre risque de provoquer de graves l sions Les notes contiennent des renseignements importants isol s du texte 46 300 TV 551 701 Navigator User Manual 87 900 934 01 M Mode d emploi 3 Stockage Pour garantir les performances et la fiabilit maximales des pompes Turbomol culaires Agilent il est indispensable de respecter les instructions suivantes Le transport la manutention et le stockage des pompes doivent imp rativement avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C humidit relative de 0 95 non condensante Ala premi re utilisation les pompes turbomol culaires doivent toujours tre mises en marche par le client en mo
189. to und Vibrationseinwirkungen sowie Ruckbewegungen an der Turbopumpe zu vermeiden da die Lager besch digt werden k nnten F r die Bel ftung der Pumpe trockene staub und partikelfreie Luft oder Inertgase verwenden Der Eingangsdruck am Bel ftungsanschlu soll unter 2 bar ber dem atmosph rischen Druck betragen Zum Pumpen von aggressiven Gasen sind die Pumpen mit einer ffnungsklappe ausgestattet ber die zum Schutz der Lager Inertgas Stickstoff oder Argon zuzuleiten ist siehe Anhang Technical Information Wenn die Pumpe zur F rderung von giftigen leicht entflammbaren oder radioaktiven Gasen benutzt wird sind die f r das jeweilige Gas vorgeschriebenen Vorg nge und Ma nahmen zu befolgen Die Pumpe darf niemals bei Vorhandensein von explosionsf higen Gasen verwendet werden 38 300 TV 551 701 Navigator User Manual 87 900 934 01 M Gebrauchsanleitung 2 Einschaltung und Gebrauch von Modell TV 551 701 Navigator Zur Einschaltung von Modell TV 551 701 ist es mit der erforderlichen Versorgungsspannung zu versorgen Der eingebaute Controller erfa t automatisch das Vorhandensein von Interlock und Anlaufsignalen und startet die Pumpe Der Modus Soft Start sieht vor die Pumpe nach einem langen Stillstand einzuschalten Um die Pumpe im Modus Soft Start zu starten ist dieser Modus mittels der Software freizugeben siehe Abschnitt RS 232 485 COMMUNICATION DESCRIPTION im Anhang Technical Information
190. to tra rotore e statore o per una rottura del rotore l energia di rotazione potrebbe essere rilasciata NI r4 Per evitare danni all apparecchiatura e prevenire lesioni agli operatori necessario seguire attentamente le istruzioni di installazione descritte nel presente manuale 16 300 TV 551 701 Navigator User Manual 87 900 934 01 M Istruzioni per l uso 1 Informazioni Generali Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Il TV 551 701 Navigator un sistema integrato costituito da una pompa turbomolecolare per applicazioni di alto e ultra alto vuoto e dal relativo controller Il sistema capace di pompare qualsiasi tipo di gas o di composto gassoso ma non adatto per il pompaggio di liquidi o di particelle solide L effetto pompante ottenuto tramite una turbina rotante ad elevata velocit 42000 giri min max mossa da un motore elettrico trifase ad alto rendimento Il TV 551 701 Navigator totalmente privo di agenti contaminanti ed quindi adatto per applicazio
191. transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being retumed under a R must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 a sj Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 C
192. ts i enlighet med CD direktivet som har betecknats som WEEE Den h r symbolen g ller endast i de l nder som tillh r den Europeiska Unionen indikerar att produkten p vilken symbolen har applicerats INTE f r skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste uppr ttas Vi rekommenderar d rf r att slutanv ndaren tar kontakt med leverant ren av anordningen oberoende om det handlar om moderf retaget eller terf rs ljaren f r att kunna starta uppsamlings och bortskaffningsprocessen detta efter l mplig kontroll av kontraktsenliga tidsgr nser och f rs ljningsvillkor Wi Y a TV 551 701 Navigator User Manual 87 900 934 01 M 125 300 8 Bruksanvisning Bortskaffning 126 300 TV 551 701 Navigator User Manual 87 900 934 01 M TV 551 701 Navigator User Manual 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper 128 Generell informasjon 128 Lagring130 Klargj re til installasjon 131 Installasjon 132 Festing av pumpen 133 Bruk 135 Starte og bruke TV 551 701 Navigator 136 Stoppe TV 551 701 Navigator 136 N dstopp 137 Vedlikehold 138 Eliminering 139 Oversetting av den opprinnelige samsvarserkl ringen E Agilent Technologies 127 300 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper De turbomolekyl re pumpene som er beskrevet i den f lgende Bruksanvisningen har et h
193. turneres til fabrikken Vennligst kontakt den lokale Agilent forhandleren for informasjon 130 300 TV 551 701 Navigator User Manual 87 900 934 01 M Instruksjon Manual 9 Klargj re til installasjon FORSIKTIG TV 551 701 Navigator leveres i en spesiell beskyttelsesemballasje Viser denne tegn p skader som kan ha oppst tt under transporten m du ta kontakt med det lokale salgskontoret N r TV 551 701 Navigator pakkes ut m du se til at det ikke slippes ned eller utsettes for noen form for st t Emballasjen m ikke kastes p en ulovlig m te Alle materialer er 100 resirkulerbare og er i samsvar med EU direktiv 85 399 om milj beskyttelse For unng avgassingsproblemer m ingen del som skal utsettes for vakuum h ndteres med bare hendene Bruk alltid hansker eller andre og passende verneutstyr L use Figur 1 Normale milj messige belastninger kan ikke delegge TV 551 701 Navigator Likevel anbefaler vi holde pumpen lukket til den er montert i systemet slik at den ikke forurenses eller utsettes for nedst ving TV 551 701 Navigator User Manual 87 900 934 01 M 131 300 9 Instruksjon Manual Installasjon Ikke installer eller bruk systemet i milj er som utsettes for regn sn eller is st v aggressive gasser eksplosjonsfarlige milj er eller milj er med stor brannfare Under bruk m f lgende forhold respekteres maksimalt trykk Z bar over atmosf ris
194. ual 87 900 934 01 M Technical Information 17 N R Set point output Vdc Frequency Hz Figure 23 Set point output The set point output stays at O Vdc until the frequency becomes higher than 505 Hz that is 500 Hz 1 of 500 Hz then the output goes at 24 Vdc and stays at 24 Vdc until the frequency be comes lower than 495 Hz that is 500 Hz 1 of 500 Hz It is possible to delay the set point checking for a programmable delay time The PROGRAMMABLE SET POINT signal has the following default settings a reference quantity frequency a threshold 643 Hz hysteresis 2 activation type high level delay time 0 second The Navigator Software optional allows the oper ator to set all the programmable feature When no external input output device is available this connector must be closed with the supplied mating connector that short circuits the START and INTERLOCK inputs with the GROUND input see the following figure TV 551 701 Navigator User Manual 87 900 934 01 M 253 300 17 Technical Information Figure 24 How to Connect the Open Collector Inputs of the Controller Here below there are the typical connections of the open collector input of the integrated controller to an external system Two cases are considered 1 the customer supplies the 24 Vdc 2 the customer does not supply the 24 Vdc Please note that on the connector a 24 Vdc 60 mA voltage
195. umidity range 0 to 90 non condensing the turbomolecular pumps must be always soft started when received and operated for the first time by the customer the shelf life of a turbomolecular pump is 10 months from the shipping date If for any reason the shelf life time is exceeded the pump has to be returned to the factory Please contact the local Agilent Vacuum Sales and Service representative for informations 224 300 TV 551 701 Navigator User Manual 87 900 934 01 M Instructions for Use 16 Preparation for Installation The TV 551 701 Navigator is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the system be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 CAUTION In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Figure 1 Normal exposure to the environment cannot damage the TV 551 701 Navigator Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust TV 551 701 Navigator User Manual 87 900 934 01 M 225
196. ure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc o Agilent Technologies i Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e If ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Sealthe product in a plastic bag and package product carefully to avoid damage in
197. vou a pr slu n m regul torem pro takov aplikace kde se po aduje vysok a velmi vysok vakuum Za zen m e od erp vat libovoln plyn nebo plynnou sm s Nen vhodn na erp n tekutin nebo pevn ch stic erp n zaji uje velmi rychl turb na max 42000 ot min poh n n vysoce v konn m trojf zov m elektromotorem Zarizeni TV 551 701 Navigator neobsahuje dn kontaminujici l tky a proto se hod pro aplikace vyZadujici ist vakuum Je vybaveno p davn mi konektory pro p ipojen p davn ho ventil toru ovl d n odvzdu ovac ho ventilu kter je ovl d n na d lku pomoc hostitelsk ho po ta e p ipojen ho s riovou linkou RS232 nebo RS485 N sleduj c odstavce obsahuj informace pot ebn k zaji t n bezpe nosti obsluhy p i pou v n tohoto za zen Podrobn informace jsou uvedeny v p loze Technical Information TV 551 701 Navigator User Manual 87 900 934 01 M 185 300 13 N vod k Pou it Tento manual pou iva nasledujici standardni protokol POZOR V stra n hl en jsou uvedena pred postupy ktere by v pripad nedodr en mohly po kodit zafizeni NEBEZPE Varovn hl en jsou ur ena pro upozorn n obsluhy na ur it postup nebo innosti kter by v pripad nedodr en mohly zp sobit v n raz Pozn mky obsahuj d le it informace p evzat z textu Uskladneni Aby byla zaji
198. xternal diameter high vacuum flange The following figures show the eight models The pumps only are available with the following models 1 TV 551 Navigator pumps Model 969 8922 with ISO 160 high vacuum flange Model 969 8944 with ISO 160 F high vacuum flange Model 969 8923 with ConFlat 8 external diameter high vacuum flange Model 969 8925 with ConFlat 6 external diameter high vacuum flange TV 701 Navigator pumps Model 969 8926 with ISO 200 high vacuum flange Model 969 8945 with ISO 200 F high vacuum flange TV 551 701 Navigator User Manual 87 900 934 01 M 235 300 17 Technical Information Model 969 8927 with ConFlat 10 external diameter high vacuum flange The controller is also available as an option in two models Model 969 8976 for TV 551 Navigator Model 969 8977 for TV 701 Navigator TV 551 Navigator Kit Models Figure 3 Model 969 8832 Figure 4 Model 969 8842 236 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 Description of the TV 551 701 Navigator Figure 5 Model 969 8833 Figure 6 Model 969 8835 TV 551 701 Navigator User Manual 87 900 934 01 M 237 300 17 Technical Information TV 701 Navigator Kit Models Figure 7 Model 969 8836 Figure 8 Model 969 8843 238 300 TV 551 701 Navigator User Manual 87 900 934 01 M Technical Information 17 Figur
199. yli atmosf risen paineen a l mp tila 5 C 35 C ks Technical Information liitteen kaaviota a suhteellinen kosteus 0 90 ei tiivist v Irrottakaa teippi ja poistakaa suojakansi vasta kun turbopumppu kytket n j rjestelm n 146 300 Kuva 2 Mik li l sn on magneettikentti tulee pumppu suojata t h n tarkoitukseen olevilla suojilla Lis tietoja l ytyy Technical Information liitteest TV 551 701 Navigator tulee kytke p pumppuun ks Technical Information liitteen kaaviota TV 551 701 Navigator User Manual 87 900 934 01 M Ohjek sikirja 10 Pumpun kinnitys VAROITUS Jos roottori vaurioituu pumpun ja j rjestelm n v liseen liit nt n saattaa kohdistua huomattavaa v nt momenttia Ellei liit nt kest kyseist momenttia pumppu saattaa irrota j rjestelm st tai moottori pumpun kotelosta T ll in metallikappaleita saattaa sinkoutua pumpusta tai j rjestelm st ja aiheuttaa vakavia vahinkoja tai kuoleman ja tai l hell olevien laitteiden vaurioita Kiinnitt k TV 551 701 Navigator vakaaseen asentoon asentamalla turbopumpun sis ntulolaippa j rjestelm n vastalaippaan liitoksella joka kest 8600 Nm n momentin akselinsa ymp ri Esim ISO K laippa voidaan kiinnitt eritt in kest vill ter skiinnikkeill esim malli Agilent IC 63250 DCMZ Seuraavassa taulukossa ilmoitetaan jokaiselle laipalle tarvittav
200. yret Bilaget Technical Information indeholder detaljerede oplysninger TV 551 701 Navigator User Manual 87 900 934 01 M 101 300 7 Istruktionsbog FORSIGTIG I brugsanvisningen anvendes f lgende standardrubrikker Denne advarselsmeddelelse vises f r procedurer der skal f lges n je for ikke at risikere maskinskader ADVARSEL Advarselsmeddelelserne informerer operat ren om at en speciel procedure eller en vis type arbejde skal udf res precist efter anvisningerne I modsat fald er der risiko for sv re personskader Dette g r opm rksom p vigtig information i teksten Opbevaring FORSIGTIG Det er n dvendigt at overholde f lgende forskrifter for at sikre optimal funktion og driftssikkerhed i de turbomolekyl re pumper fra Agilent S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 20 C til 70 C relativ fugtighed fra 0 til 95 ikke kondenserende a Kunden skal altid starte de turbomolekyl re pumper ved hj lp af Soft Start funktionen ved modtagelse og start af pumperne for f rste gang a De turbomolekyl re pumper m opbevares i 10 m neder fra forsendelsesdatoen Hvis opbevaringsperioden af en eller anden grund er l ngere er det n dvendigt at sende pumpen tilbage til fabrikken Yderligere oplysninger f s ved henvendelse til den lokale Agilent repr sentant 102 300 TV

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