Chapter 6 Beam-Directing Optics
Contents
1. 2 Places 10 16 mm Aperture Dia 0 40 25 4mm 1 0 oils Center Line 4 40 yo 0 15 Deep 2 Sides 19 6 mm lt gt 0 77 ji Le 25 4 mm gt 1 0 Figure 6 6 Agilent 10701A 50 Beam Splitter dimensions User s Manual 6 9 Chapter 6 Beam Directing Optics Agilent 10707A Beam Bender Agilent 10707A Beam Bender The Agilent 10707A Beam Bender contains a 100 reflectance mirror which turns the direction of an incoming laser beam 90 degrees To maintain proper polarizations only right angle turns should be used in routing the laser beam Agilent 10707A Beam Bender Figure 6 7 Agilent 10707A Beam Bender 6 10 User s Manual Chapter 6 Beam Directing Optics Agilent 10707A Beam Bender Agilent 10707A Beam Bender Specifications Dimensions See drawings below Weight 58 grams 2 1 ounces Materials Used Housing Stainless Steel Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade Optical Efficiency Typical 99 Worst Case 98 4 40 0 15 Deep f 2 Sides Center Line Do SC ie 19 6 mm e gt 0 77 Typ Le 25 4 mm 1 0 6 32 UNC Thru Clearance For 4 or 2 5 mm 2 Places aga BENON che 19 6 mm 0 77 Typ Figure 6 8 Agilent 10707A Beam Bender dimensions User s Manual 6 11 CAUTION Chapter 6 Beam Directing Optics Agilent 10725A 50 Beam Splitter and 10726A Beam Bender Agilent 10725A 50 Beam Splitter and2. beam directing optics are described in Chapter 9 Accessories of this manual 6 2 User s Manual Chapter 6 Beam Directing Optics Introduction Table 6 1 Beam direction optics Beam Directing Order as required to manipulate beam path for your Optics application Agilent 10567A Dual Beam Beam Splitter useful in vacuum applications Agilent 10700A 33 Beam Splitter Agilent 10701A 50 Beam Splitter Agilent 10707A Beam Bender Agilent 10725A 50 Beam Splitter requires user supplied mounting hardware Agilent 10726A Beam Bender requires user supplied mounting hardware Adjustable Mounts for Adjustable mounts simplify installation and alignment of optics above optics Agilent 10710B Use with Agilent 10700A 10701A 10707A Agilent 10711A Use with Agilent 10702A 10706A 10706B 10715A 10716A Precision Beam Use in multiaxis laser measurement systems Manipulators Agilent N1203C Precision Beam Translator Agilent N1204C Precision Horizontal Beam Bender Agilent N1207C Precision Vertical Beam Bender All Agilent laser systems can use the same Agilent 107XX series of optics However keep in mind e TheAgilent 10719A and Agilent 10721A interferometers are designed to use the 3 mm nominal diameter beam from the Agilent 5517C 003 Laser Head Any of the beam directing optics described here can be used in the laser beam delivery system between the laser head and the interferometer s
3. e The Agilent 10735A Agilent 10736A and Agilent 10736A 001 interferometers can use a laser beam with a nominal diameter up to 9mm The 9 mm beam available from an Agilent 5517C 009 Laser head provides a greater yaw range than either the standard 6 mm beam or the 3 mm beam Any of the beam directing optics described here can be used in the laser beam deliver system between the laser head and the interferometer s However when a 9 mm beam is used with any of these beam directing optics except for the Agilent 10725A 50 Beam Splitter or the Agilent 10726A Beam Bender a portion of the beam may be clipped which will reduce the yaw range of the interferometer s receiving that beam User s Manual 6 3 NOTE Chapter 6 Beam Directing Optics Use of the Adjustable Mounts e TheAgilent 10725A beam splitter and the Agilent 10726A beam bender provide the same optical components as the Agilent 10701A beam splitter and the Agilent 10772A Turning Mirror or Agilent 10773A Flatness Mirror respectively The difference is that in the Agilent 10701A Agilent 10772A and Agilent 10773A the optical elements are already installed in mounting hardware The Agilent 10725A beam splitter and Agilent 10726A beam bender require custom user supplied mounts The Agilent 10772A Turning Mirror and the Agilent 10773A Flatness Mirror are described in Chapter 9 Accessories of this manual Use of the Adjustable Mounts The Agilent N1203C N1204C and N
4. Four screws 10 32 UNF x 75 inches long Alloy Steel Seating Torque is 39 in lbs if Cadmium plated or 51 in lbs if unplated Adjustment Tooling 5 mm Hex key wrench 6 18 User s Manual Chapter 6 Beam Directing Optics Agilent N1203C N1204C and N1207C Beam Manipulators Agilent N1204C Precision Horizontal Beam Bender Specifications and Characteristics Dimensions See Figure 6 12 Weight 920 grams Materials Used Martensitic stainless steel Optical grade glass Optical Efficiency 99 typical 97 5 Worst case Input Output Clear Aperture 6 13 0 mm Input Beam Position Tolerance 1 6 mm for 69 mm beam Angular Beam Steering Range from nominal 90 6 9mm beam centered on a 13 mm Aperture Yaw 6 using Adjustment Lever and adapter at p25 mm port Pitch 3 using Adjustment L ever and adapter at 25 mm port Yaw 1 using Adjustment Lever only at 9 mm port Pitch 0 7 using Adjustment Lever only at d mm port Angular Adjustment Sensitivity and Beam Steering Resolution 10 15 uradians better with operator patience Thermal Drift With the Manipulator feet on a horizontal surface g AP Pitch 5 urad per C itc AT H D AY_ S Yaw AT 0 5 urad per C Drift of beam steering angle can occur in the presence of thermal gradients in the Manipulator assembly This drift is transitory and alignment is recovered when the gradient has settled out Thermal Stability of Alignment Ball to Housing Bea
5. Agilent N1207C Precision Vertical Beam Bender Specifications and Characteristics Dimensions See Figure 6 12 Weight 920 grams Materials Used Martensitic stainless steel Optical grade glass Optical Efficiency 99 typical 97 5 Worst case Input Output Clear Aperture 6 13 0 mm Input Beam Position Tolerance 1 6 mm for 6 9 mm beam Angular Beam Steering Range from nominal 90 6 9mm beam centered on a 13 mm Aperture Yaw 3 using Adjustment Lever and adapter at p25 mm port Pitch 6 using Adjustment L ever and adapter at 25 mm port Yaw 0 7 using Adjustment Lever only at 69 mm port Pitch 1 using Adjustment Lever only at 9 mm port Angular Adjustment Sensitivity and Beam Steering Resolution 10 15 uradians better with operator patience Thermal Drift With the Manipulator feet on a horizontal surface g AP Pitch 5 urad per C itc AT H D AY_ S Yaw AT 0 5 urad per C Drift of beam steering angle can occur in the presence of thermal gradients in the Manipulator assembly This drift is transitory and alignment is recovered when the gradient has settled out Thermal Stability of Alignment Ball to Housing Beam angle steering alignment is recoverable over a slow environmental temperature change of 20 C provided there are no sharp thermal gradients within the assembly e AT At 20 C hr Housing to Mounting Plate The Manipulator feet are designed not to slip due to differential therm
6. 10726A Beam Bender These devices are designed for use in a laser measurement system that includes an Agilent 10735A or a standard Agilent 10736A Three axis Interferometer or an Agilent 10736A 001 Three axis Interferometer with Beam Bender They are designed to handle the 9 mm beam from an Agilent 5517C 009 The Agilent 10725A beam splitter is the same optical element as that used in the Agilent 10701A described above except that the Agilent 10725A is supplied without a housing The Agilent 10726A bender is the same optical element as that used in the Agilent 10772A turning mirror or Agilent 10773A flatness mirror described in Chapter 9 Accessories except that the Agilent 10726A is supplied without a housing Agilent Technologies does not provide mounting hardware for the Agilent 10725A beam splitter or the Agilent 10726A beam bender These devices are intended for use in user designed mounts The user is responsible for devising a mounting method that does not cause stresses in the optical devices that will result in distortion of the reflected laser wavefronts Agilent 10725A Beam Splitter Specifications Use Split a laser beam having a diameter up to 9 mm nominal This beam splitter requires a user supplied mount This optic can be made vacuum compatible Dimensions See drawings below Weight 2 grams 0 07 ounce Materials Used Optic Fused silica Optical Efficiency Typical 45 each beam Worst Case 39 each
7. 50 Beam Splitter Figure 6 4 Agilent 10700A 33 Beam Splitter and Agilent 10701A 50 Beam Splitter User s Manual 6 7 Chapter 6 Beam Directing Optics Agilent 10700A 33 Beam Splitter and 10701A 50 Beam Splitter Agilent 10700A 33 Beam Splitter Specifications Dimensions See drawings below Weight 62 grams 2 2 ounces Materials Used Housing Stainless Steel Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade Optical Efficiency 33 Path typical 30 worst case 27 67 Path typical 63 worst case 61 0 8 mm BH 0 03 x Ce Ge Sieh nas A 19 6 mm K 6 32 UNC 0 77 Typ Thru Clearance For 4 or 2 5 mm 2 Places 10 16 mm Aperture Dia 0 40 25 4 mm NS NA Center Line 1 0 AA 4 40 A re 0 15 Deep 2 Places 19 6 mm eg 0 77 Typ e 25 4 mm gt 1 0 Figure 6 5 Agilent 10700A 33 Beam Splitter dimensions User s Manual Chapter 6 Beam Directing Optics Agilent 10700A 33 Beam Splitter and 10701A 50 Beam Splitter Agilent 10701A 50 Beam Splitter Specifications Dimensions See drawings below Weight 62 grams 2 2 ounces Materials Used Housing Stainless Steel Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade Optical Efficiency Typical 45 each beam Worst Case 39 each beam SE 0 8 0 03 A Ce TA p oset l ws ees FA 3 d Ge Dese e 6 32 UNC Thru Clearance For 4 or 2 5 mm
8. Beam Splitter The Agilent 10567A Dual Beam Beam Splitter Figure 6 1 divides the laser beam into two beams perpendicular to each other see F igure 6 2 and directs them to two sets of measurement optics The return beams pass through the Agilent 10567A again and exit parallel to the input beam This beam splitter is typically used for applications where two axes of measurement are required to go through a window such as a window in a vacuum chamber Agilent 10567A Dual Beam Beam Splitter Figure 6 1 Agilent 10567A Dual Beam Beam Splitter AGILENT 10567A DUAL BEAM BEAM SPLITTER LASER BEAM To aw From Interferometer Vacuum Chamber Agilent 10780C y Y Axis Receiver saamin To Interferometer H bam l P E E g Agilent 10567A From Interferometer Agilent 10780C Beam Splitter X Axis Receiver Window Figure 6 2 Agilent 10567A Dual Beam Beam Splitter laser beam path User s Manual Chapter 6 Beam Directing Optics Agilent 10567A Dual Beam Beam Splitter Agilent 10567A Dual Beam Beam Splitter Specifications Dimensions See drawings below Weight 325 grams 11 5 ounces Materials Used Housing Aluminum Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade Optical Efficiency Typical 45 each beam Worst Case 39 each beam 8 32 UNC Exit 4 Holes e All Faces Return TY
9. Martensitic stainless steel Optical grade glass 99 typical 98 7 Worst case 6 19 0 mm 5mm Note input beam de centering may limit translation range See range specification below 3 mmwitho9 mm beam 4 0 mm witho6 mm beam 4 4 mm with 3mm beam 10 microradian maximum 1 0 micrometer AD_ AT 100nm per C Shift of output beam position is theroretically possible in the presence of a thermal gradient in the assembly but the refractive translator is quite insensitive to small angular changes Nevertheless even these miniscule shifts are transitory and the original position is recovered when the gradient has settled out Thermal Stability of Alignment Ball to Housing Beam position alignment is fully recoverable over a slow environmental temperature change of 20 C provided there are no sharp thermal gradients within the assembly i e AD AT 20 C hr Housing to Mounting Plate The Manipulator feet are designed not to slip due to differential thermal expansion between the stainless steel housing and an Invar mounting plate in the presence of an environmental temperature change of 20 C Thus there should be no unrecoverable beam displacement due to foot slippage when mounted to any material whose CTE is in the range of 1 6 x 10 C to 21 8 x LB C provided the feet are secured with the specified bolt torque value Resonant F requencies Ball and Spring Suspension The laser beam Manipulator comprises a
10. 1207C beam manipulators DO NOT use the adjustable mounts See Agilent N1203C N1204C and N1207C Beam Manipulators in this chapter for details on these products Aligning an Agilent laser measurement system may require adjusting the position of one of more of its optical components especially the beam directing optics in the path s between the laser head and the interferometer s The Agilent 10710B and Agilent 10711A adjustable mounts should be used to provide the adjustment capability for most optical components In general the alignment procedures are performed with all optical components in place Your measurement system design should allow for adjustment of the laser optics and receivers during alignment Vacuum Applications Vacuum options are available for Agilent beam directing optics except those requiring user supplied mounting hardware listed in Table 6 1 Contact Agilent Call Center for information telephone numbers of various call centers are listed on the Service and Support page at the back of this manual The vacuum option components use vacuum grade adhesives in their construction and may be used in vacuum applications Use of the Agilent 10725A Beam Splitter Agilent 10726A Beam Bender in a vacuum application depends on the materials used in the user created mounting arrangement 6 4 User s Manual Chapter 6 Beam Directing Optics Agilent 10567A Dual Beam Beam Splitter Agilent 10567A Dual Beam
11. Beam Directing Optics Beam Manipulators Chapter 6 Beam Directing Optics Introduction ntroduction This chapter describes the Agilent beam directing optics available for laser measurement systems In general the beam splitting and beam bending optics are used only for making right angle turns when routing the laser beam within the intended application The right angle turns must be aligned parallel to or perpendicular to the mounting plane of the laser head to minimize polarization effects This confines beam turning to one of four possible directions For instance for a horizontal laser beam with polarizations oriented vertically and horizontally the options are up down left and right Beam translators are used to ensure that the translated or offset laser beam remains parallel to the original beam direction The translator is useful whenever a high precision distance measurement with a laser is performed because it can reduce Abb error Table 6 1 summarizes the beam directing optics and the Agilent adjustable optics mounts with which they may be used The mounts are described in Chapter 9 Accessories of this manual Specification drawings of the optics described in this chapter are provided as part of the descriptions Agilent Technologies measurement optics available are described in Chapter 7 Measurement Optics of this manual Optics that are 1 not interferometers and 2 not usually referred to as
12. P y 35 6mm 4 1 40 1 CO 19 1 ye Se gt lt 12 7 mm 0 75 0 50 12 7mm 0 50 3 12 7 mm Return E H 0 50 53 3mm Entrance 1 mmh z i 2 10 2 10 Return x Y q _ y 12 7mm 0 50 50 8 mm gt 19 1 mm 2 00 21 6 mm 0 75 0 85 Figure 6 3 Agilent 10567A Dual Beam Beam Splitter dimensions 6 6 User s Manual Chapter 6 Beam Directing Optics Agilent 10700A 33 Beam Splitter and 10701A 50 Beam Splitter Agilent 10700A 33 Beam Splitter and 10701A 50 Beam Splitter Each of these optics directs part of the laser beam along a second axis Combinations of these optics may be used to split the single laser head beam into multiple parts for multiaxis measurements The beam splitters are rugged and easy to mount offering considerable flexibility in their mounting arrangements The Agilent 10700A 33 Beam Splitter deflects one third of the laser beam intensity perpendicular to the original beam direction while the remaining two thirds continues through the optic The Agilent 10701A 50 Beam Splitter operates in a similar manner with a 50 ratio of beam splitting By using combinations of these two accessories the beam may be split into several paths to perform multiaxis measurements F or example using a 33 and a 50 Beam Splitter one third of the laser beam intensity can be directed to each measurement axis in a three axis machine Agilent 10700A Agilent 10701A 33 Beam Splitter
13. al expansion between the stainless steel housing and an Invar mounting plate in the presence of an environmental temperature change of 20 C Thus there should be no unrecoverable misalignment due to foot slippage when mounted to any material whose CTE is in the range of 1 6 x 10 C to 21 8 x 10 C provided the feet are secured with the specified bolt torque value User s Manual 6 21 Chapter 6 Beam Directing Optics Agilent N1203C N1204C and N1207C Beam Manipulators Resonant F requencies Ball Spring Suspension Thelaser beam Manipulator comprises a very stiff nonlinear spring mass system At shock levels below the shock damage threshold it is not possible to excite a free vibration resonance in the ball suspension This is due to three phenomena 1 Prestress stiffening due to compression of the springs in final assembly 2 Stiffening due to geometrical deformation of the beam springs as a result of the compressive load 3 Frictional damping between ball and springs The natural resonance of the spring mass system 350 Hz is completely supressed by these effects The first FFT measured resonance in the assembly is at 3 5 kHz which is the Ball itself The next resonance is at 3 7 kHz which is the Housing Thus there is no resonance which could disturb laser beam alignment or position in the operating environment Mirror Spring Suspension The Mirror is held against three mounting pads machined into the Ball by spr
14. ance measurements The Agilent N1203C Precision Beam Translator is a precision optical mount for a refracting window The Agilent N1204C Precision Horizontal Beam Bender and Agilent N1207C Precision Vertical Beam Bender are precision optical mounts for bending mirrors These products are designed to provide high resolution positioning of laser beams for precise distance measurements by the application of removable tooling see Agilent N1203C 04C 07C Beam Manipulator Accessories in Chapter 9 Accessories of this manual for details on the adjustment tool kit Once the adjustment is completed and tools removed this mount will provide long term stability of the initial setting in the presence of specified thermal shock and vibration environments The Agilent N1203C translates the beam so that the measurement beam is positioned where you want it on the stage mirror The offset laser beam remains parallel to the original beam direction The translator is useful whenever a high precision distance measurement with a laser is performed because it can reduce Abb error The Agilent N1204C and N1207C steer the laser beam in angle in either the horizontal or vertical plane The beam bender s optical component a mirror is intended to turn the laser beam 90 relative to the original beam direction The beam bender is useful whenever high precision distance measurements with a laser is performed because it can reduce cosine error Applica
15. beam 6 12 User s Manual Chapter 6 Beam Directing Optics Agilent 10725A 50 Beam Splitter and 10726A Beam Bender 19 3 mm Dia 0 76 09 gt k 2 41 mm Minimum Clear Aperture 16 51 mm 0 65 Concentric to O D Figure 6 9 Agilent 10725A 9mm Laser Beam Splitter dimensions Agilent 10726A Beam Bender Specifications Use Bend a laser beam having a diameter up to 9 mm nominal This beam bender requires a user supplied mount This optic can be made vacuum compatible Dimensions See drawings below Weight 10 grams 0 35 ounce Materials Used Optic Fused silica Optical Efficiency Typical 99 Worst Case 98 Minimum Clear Aperture A Central 19 05 mm 0 75 x 26 92 mm 1 06 30 48 mm 1 20 5 59 0 22 IT t Figure 6 10 Agilent 10726A 9mm Laser Beam Bender dimensions lt _ 7 62 0 30 User s Manual 6 13 Chapter 6 Beam Directing Optics Agilent N1203C N1204C and N1207C Beam Manipulators Agilent N1203C N1204C and N1207C Beam Manipulators Overview The purpose of the Agilent N1203C N1204C and N1207C beam manipulators shown in Figure 6 11 is to precisely bend or translatea laser beam to achieve sub nanometer distance measurements The precise bending and translating results in a properly aligned laser beam An improperly aligned laser system will produce errors The beam manipulators are very useful in rapid laser system alignment used for precision dist
16. ing forces opposite the pads This spring mass system is not free to vibrate unless the Mirror is separated from the contact with pads It requires a shock load of 280 g far in excess of the shock damage threshold to separate the Mirror from the Ball Thus it is not possible in practice to excite a resonance Note The calculated resonance for the Mirror Spring system if the ball were free to oscillate is 340 Hz Shock Operating 40 g half sine 2 9 ms A shock load of 40 g half sine 2 9 ms will not disturb the alignment of the Ball Mirror or laser beam Non Operating 60 g half sine 2 9 ms A shock load of 60 g half sine 2 9 ms will not damage the Manipulator components but may disturb alignment Recommended Mounting Screws Four screws M5x20 long Alloy Steel Grade 12 9 Seating Torque is 5 N mif Cadmium plated or 6 5 N m if unplated OR Four screws 10 32 UNF x 75 inches long Alloy Steel Seating Torque is 39 in lbs if Cadmium plated or 51 in lbs if unplated Angular Adjustment Tool Leverage Lever rotatation ball rotation 2 9 1 6 22 User s Manual Chapter 6 Beam Directing Optics Agilent N1203C N1204C and N1207C Beam Manipulators Unless otherwise specified dimensions are in millimeters mm Figure 6 12 Agilent N1203C N1204C N1207C beam manipulator dimensions User s Manual 6 23 Chapter 6 Beam Directing Optics Agilent N1203C N1204C and N1207C Bea
17. lf The next resonance is at 3 7 kHz which is the Housing Thus there is no resonance which could disturb laser beam alignment or position in the operating environment Mirror Spring Suspension The Mirror is held against three mounting pads machined into the Ball by spring forces opposite the pads This spring mass system is not free to vibrate unless the Mirror is separated from the contact with pads It requires a shock load of 280 g far in excess of the shock damage threshold to separate the Mirror from the Ball Thus it is not possible in practice to excite a resonance Note The calculated resonance for the Mirror Spring system if the ball were free to oscillate is 340 Hz Shock Operating 40 g half sine 2 9 ms A shock load of 40 g half sine 2 9 ms will not disturb the alignment of the Ball Mirror or laser beam Non Operating 60 g half sine 2 9 ms A shock load of 60 g half sine 2 9 ms will not damage the Manipulator components but may disturb alignment Recommended Mounting Screws Four screws M5x20 long Alloy Steel Grade 12 9 Seating Torque is 5 N mif Cadmium plated or 6 5 N m if unplated OR Four screws 10 32 UNF x 75 inches long Alloy Steel Seating Torque is 39 in lbs if Cadmium plated or 51 in lbs if unplated Angular Adjustment Tool Leverage Lever rotatation ball rotation 2 9 1 6 20 User s Manual Chapter 6 Beam Directing Optics Agilent N1203C N1204C and N1207C Beam Manipulators
18. m Manipulators 6 24 Product specifications and descriptions in this document subject to change without notice Copyright C 2002 Agilent Technologies Printed in U S A 07 02 This is a chapter from the manual titled Laser and Optics User s Manual For complete manual order Paper version p n 05517 90045 CD version p n 05517 90063 This chapter is p n 05517 90106 User s Manual
19. m angle steering alignment is recoverable over a slow environmental temperature change of 20 C provided there are no sharp thermal gradients within the assembly e AT At 20 C hr Housing to Mounting Plate The Manipulator feet are designed not to slip due to differential thermal expansion between the stainless steel housing and an Invar mounting plate in the presence of an environmental temperature change of 20 C Thus there should be no unrecoverable misalignment due to foot slippage when mounted to any material whose CTE is in the range of 1 6 x 10 C to 21 8 x 10 C provided the feet are secured with the specified bolt torque value User s Manual 6 19 Chapter 6 Beam Directing Optics Agilent N1203C N1204C and N1207C Beam Manipulators Resonant F requencies Ball Spring Suspension Thelaser beam Manipulator comprises a very stiff nonlinear spring mass system At shock levels below the shock damage threshold it is not possible to excite a free vibration resonance in the ball suspension This is due to three phenomena 1 Prestress stiffening due to compression of the springs in final assembly 2 Stiffening due to geometrical deformation of the beam springs as a result of the compressive load 3 Frictional damping between ball and springs The natural resonance of the spring mass system 350 Hz is completely supressed by these effects The first FFT measured resonance in the assembly is at 3 5 kHz which is the Ball itse
20. ors displacement due to foot slippage when mounted to any material whose CTE is in the range of 1 6 x 10 C to 21 8 x LP C provided the feet are secured with the specified bolt torque value see the specifications and characteristic sections for the beam manipulators at the end of this chapter Optical Input Output ports and adjustment access The Agilent N1203C N1204C and N1207C manipulators have six input and output I O ports There is only one mounting face From this one mounting either horizontal or vertical bends in any direction may be accomplished Adjustment tools may be attached at any of ten access ports allowing two of the I O ports for entrance and exit of the laser beam See the Agilent N1203C Precision Beam Translator and Agilent 1204C and N1207C Precision Beam Benders User s Guide for details on mounting aligning adjusting etc of these beam manipulators 6 16 User s Manual Chapter 6 Beam Directing Optics Agilent N1203C N1204C and N1207C Beam Manipulators Agilent N1203C Precision Beam Translator Specifications and Characteristics Dimensions Weight Materials Used Optical Efficiency Input Output Clear Aperture Input Beam Position Tolerance Beam Translation Range from input at normal incidence on center of clear aperture Transmitted Beam Deviation Beam Translation Sensitivity R esolution Thermal Drift Translated Beam Displacement per C See Figure 6 12 920 grams
21. tion simplified These beam manipulators are easier to use and more durable than previous versions The manipulators provide more stability to laser measurement systems than previous solutions The operator merely aligns the manipulator with removable tools The operator need not perform the secondary clamping operation The manipulators are already clamped 6 14 User s Manual Chapter 6 Beam Directing Optics Agilent N1203C N1204C and N1207C Beam Manipulators Agilent N1204C Precision Agilent N1207C Precision Horizontal Beam Bender Vertical Beam Bender Figure 6 11 Agilent precision beam manipulators Stability Thermal TheAgilent N1203C N1204C and N1207C beam manipulators exhibit improved thermal stability since all components of the manipulator are of the same material and the ball is suspended symmetrically ina spring nest The symmetry of this design enables the contact points between the ball and the springs to remain precisely the same as the temperature changes Hence as the temperature changes there is no rotation imparted to the ball Mechanical The beam manipulator feet are designed not to slip due to differential thermal expansion between the stainless steel housing and an Invar mounting plate in the presence of an environmental temperature change of up to 20 C Thus there will be no unrecoverable beam User s Manual 6 15 Chapter 6 Beam Directing Optics Agilent N1203C N1204C and N1207C Beam Manipulat
22. very stiff nonlinear spring mass system At shock levels below the shock damage threshold it is not possible to excite a free vibration resonance in the ball suspension This is due to three phenomena 1 Prestress stiffening due to compression of the springs in final assembly 2 Stiffening due to geometrical deformation of the beam springs as a result of the compressive load 3 Frictional damping between ball and springs User s Manual 6 17 Chapter 6 Beam Directing Optics Agilent N1203C N1204C and N1207C Beam Manipulators Resonant F requencies Continued Ball and Spring Suspension Continued The natural resonance of the spring mass system 350 Hz is completely supressed by these effects The first FFT measured resonance in the assembly is at 3 5 kHz which is the Ball itself The next resonance is at 3 7 kHz which is the Housing Thus there is no resonance which could disturb laser beam alignment or position in the operating environment Shock Operating 40 g half sine 2 9 ms A shock load of 40 g half sine 2 9 ms will not disturb the alignment of the Ball Refractive Translator or laser beam Non Operating 60 g half sine 2 9 ms A shock load of 60 g half sine 2 9 ms will not damage the Manipulator components but may disturb alignment of the Ball Recommended Mounting Screws Four screws M5x20 long Alloy Steel Grade 12 9 Seating Torqueis 5 N mif Cadmium plated or 6 5 N m if unplated OR
Download Pdf Manuals
Related Search