Probe Card Adapter.book
Contents
1. met on vacuum control box Connect the vacuum control box end of the hose to valve PF 1 Figure 3 4 and the other end of the hose to the PCA Install vacuum supply hose Route the vacuum supply hose from the vacuum source through the VACUUM IN grommet on vacuum control box Connect the vacuum control box end of the hose to check valve PF 5 Figure 3 4 Make sure vacuum supply is at least 50 8 cm Hg Vent the vacuum control box to atmosphere no connec tion required 4 Making sure all power has been removed from the sys tem connect cables Connect the DUT cables between the probe card as sembly and the matrix pin cards of the Parametric Test system Route the cables to avoid sources of electromagnetic fields Avoid routing cables near sources of vibration or any other mechanical distur bance Confirm that moving parts of the prober do not con tact the cables Information regarding the location of connections within your system is found in the configuration drawings for your system The User s Manual s for your systems contains ad ditional information and can be referenced if required Figure 3 4 Installation Vacuum Control Box Cover 9139A 346 i Anti rotation bracket valve handle 9139A 348 14 D Tubing y X 40 1 2 1 Washer f WA 102 1 M Valve To PCA PF 1 gt SAL Gromm2. for the probe card and mother board 2 4 Mother board characteristics The mother board is the interface between the DUT cables and the probe card and it accepts 64 DUT cables It is sus pended from the prober mounting hardware Source mea sure guard and ground where appropriate are terminated for each DUT cable on the mother board Source measure and guard signals are kept separate for each pin and are all carried down to the probe card through spring loaded con tacts pogo pins Four ground pogo pins take ground down to the probe card Source and measure lines are guarded on the mother board using state of the art printed circuit board manufacturing techniques DUT cables can be routed verti cally or horizontally to the mother board Vertical routing is used when the DUT cables are routed above the top platform head plate of the prober Horizontal routing is used when the DUT cables are routed under the top platform of the prober 2 2 25 Probe card configuration The probe card contains 64 fully guarded measure and sense lines It contains mounting traces for 64 probe needles Drilled plated through holes are provided for interconnect pins The interconnect pins provide connections to an op tional close proximity load board An unpopulated blank probe card is provided with the Probe Card Adapter Assem bly Additional blank probe cards are available through your Keithley sales representative NOTE To reduce pin to
3. measure of the DUT cable and for connec tions to the probe needles A grid pattern of holes is pro vided to install components Pin numbers are labeled on the board This option is available directly from Keithley N N Probe Card 9139A 172 Figure 2 3 Probe needle mounting 2 3 Probe Card Adapter Overview 2 4 3 1 Introduction WARNING The installation procedures contained in this manual are intended for use only by qualified service personnel Do not perform these procedures unless quali fied to do so Failure to observe normal safety precautions could result in per sonal injury or death This section contains information needed for installing the Model 9139A PCA Probe Card Adapter on your prober Several paragraphs contain general installation steps Other paragraphs contain installation steps required for your spe cific prober Review the appropriate paragraph s before handling or installing the Model 9139A PCA Probe Card Adapter 3 2 Handling precautions The Model 9139A Probe Card Adapter is assembled at the factory to provide the highest quality connections possible between the DUT and your system Use care when handling these parts Installation CAUTION Do not touch high impedance areas of the probe card assembly or the probe card Figure 3 1 Touching a high
4. nonnc nono noc one cone cono nennen net tne enne tnr ersten testen trennen trennen 4 5 Connecting power supply and control cables to load board sse rennen 4 5 Installing and removing the load board oo eee ee cesses ceeeeeeceseescecaecssesaecsaeeseceeceseeeeeseeseaeeseeesecaeceaeeaeeaeeeeneeeeeseaeees 4 5 5 Maintenance u cack TET TEE Introduction z e senio t Neh has Be inten Shs e nope ee epe eb ede ere ep ien 5 1 Mechanical disassembly 4 eie ep idet ud eb ee to IR OE HUE ERI Matte days 5 1 Replacing plug in type DUT cables oononcnnccicnnnccnonnnancnnconncnnc conc no conc nennen nennen neret conan on enne etr enne tenerent nnne nennen 5 2 Moving DUT Cable COnneC Ons kumbia 5 2 Cleaning nr RN Gan RAE Ae REM tee SM tg hoe he eee eh tee ie hahaa a 5 3 R placing pOLO pIfis ite a ce ah coven piter sanken ar eei etie e ret teens 5 3 Replacing a pogo pin socket nisrani OREN ERE RN EEA S Or AEE AVET eren non nne nee nenne 5 4 Replacing vacuum Connection ied eese tec er tens etre ce Ue E sent gu tere 5 4 6 Replaceable Parts ici aii rr Di iau x c i a ia OAL Introduction NN 6 1 Dg T 6 1 Orderinganformatlon e oe Bee lod aos 6 1 EACtory SELVICE oerte pe Neo pine Heide e pe oi plea seii e e e e ete e m 6 1 A LEI lOSA aa c HERREN CN B Standard Prober Requirements ssc BOL ii General Information 11 Introduction This section contains general
5. the device under test Safe operation requires the use of a lid interlock Ifa E screw is present connect it to safety earth ground using the wire recommended in the user documentation The A symbol on an instrument means caution risk of danger The user should refer to the operating instructions located in the user documentation in all cases where the symbol is marked on the instrument The A symbol on an instrument means caution risk of danger Use standard safety precautions to avoid personal contact with these voltages The A symbol on an instrument shows that the surface may be hot Avoid personal contact to prevent burns The Ji symbol indicates a connection terminal to the equipment frame If this symbol is on a product it indicates that mercury is present in the display lamp Please note that the lamp must be properly disposed of according to federal state and local laws The WARNING heading in the user documentation explains dangers that might result in personal injury or death Always read the associated information very carefully before performing the indicated procedure The CAUTION heading in the user documentation explains hazards that could damage the instrument Such damage may invalidate the warranty Instrumentation and accessories shall not be connected to humans Before performing any maintenance disconnect the line cord and all test cables To maintain protection from electric shock and fire replacement compo
6. 13 Manualaddenda Any improvements or changes concerning the probe card adapter or manual will be explained in an addendum includ ed with the unit Be sure to note these changes and incorpo rate them into the manual before using or servicing the unit 1 4 Safety symbols and terms The following safety symbols and terms may be found on the probe card adapter or used in this manual The N symbol on an instrument indicates that the user should refer to the operating instructions located in the in struction manual The A symbol on an instrument shows that high voltage may be present on the terminal s Use standard safety pre cautions to avoid personal contact with these voltages The WARNING heading used in this manual explains dan gers that might result in personal injury or death Always read the associated information very carefully before per forming the indicated procedure 1 1 General Information The CAUTION heading used in this manual explains haz ards that could damage the probe card adapter Such damage may invalidate the warranty 15 Associated documents The following associated documents are not included in this manual They are included with the Keithley Parametric Test System and are recommended references e System installation guide This guide provides gener al information about locations of components within the system cabinet This guide also provides informa tion about installing DUT cables
7. 4080 Electroglas 4085 KLA 1007 KLA 1220 KLA TEL P 8 Pacific Western PW2 Pacific Western PW3 3 2 IN ern High Impedance Areas Suir EF AAA AAA Card TAC PR8100 Ultraprecision 680 Ultraprecision 880 Karl Suss TSK A PM 90A 3 3 2 Safety Operator safety from hazardous voltages depends on proper installation After installation but before energizing the unit make sure all prober safety shields are properly in place re fer to the manufacturer of your specific prober for prober safety shield information The light shield contains compo nents to allow for the installation of an interlock switch such as that provided with a Keithley S500 Series Test System See Figure 3 2 Figure 3 2 PCA light shield WARNING Do not operate the system until it is properly installed and all prober safety shields and interlocks are in place F ail ure to have the complete system proper ly installed with all safety shields in place could result in personal injury or death 3 3 3 Stack height The height from the prober s mounting seat to the surface of the chuck stack height is a basic installation consideration Figure 3 3 This stack height must equal the stack height of the probe card adapter The stack height of the Keithley probe card adapter can be 1 330 inches 3 378 cm or 1 492 inches 3 790 cm depending on the type of prober and on the requirements for cable routing Refer t
8. ACLE POGO PIN Figure 5 2 CS 831 RETAINER SPRING CONTACT Figure 2 1 9139A 331 RING SEGMENT CABLE CLAMP Figure 2 1 9139A 333 1 SOCKET 018 PROBE RING CPLB Figure 4 3 SO 147 SOCKET 025 SO 146 1 SOCKET 040 SO 146 2 SOCKET 060 SO 146 3 WASHER mother board to spring contact retainer WA 102 2 Probe card retainer cam assembly Qty Description Keithley part number 1 Retainer Ring Figure 2 1 9139A 326 1 Cap Probe Card Retainer Figure 2 1 9139A 327 2 Cam Retainer 9139A 328 2 Pivot Pin Cam 9139A 329 2 Torsion Spring 9139A 330 1 Ring Insulator 9139A 332 2 Dowel Pin 9139A 335 2 Dowel Pin Cam 9139A 336 2 Truarc Ring 45133 14H FA 233 2 1 O Ring Thermobonded GA 32 1 O Ring Thermobonded GA 33 1 Adapter Right Angle Figure 2 1 PF 6 1 4 40 X Ya PFHUC handle mount 4 A40X 4FHUC 6 3 Replaceable Parts Miscellaneous vacuum control box parts Qty Description Keithley part number 4 Nylon Tie Wrap Figure 3 3 CC 38 3 4 Tie Mount Figure 3 3 CC 47 1 Static Shielding Bag PO 13 3 1 Tygon Tubing order by length Figure 3 3 TX 40 1 6 4 Chuck The metal platform that holds the wafer during probing Close proximity load board load board This is an op tional printed circuit board that mounts directly above the probe needles It is used to connect resistors capacitors etc to the probe needles The load board is used when additional components must be located as close as pos
9. Instrument Cables and shorting plugs Matrix manual This manual provides detailed instal lation and operation instructions for the system matrix The drawing set of your system These drawings con tain detailed information about the configuration of your system The drawings show the DUT cable con nections Numbers located next to each DUT connec tion identify the pin number associated with the DUT connection 16 Unpackingand inspection 1 6 1 Inspection for damage CAUTION Do not touch high impedance areas of the probe card assembly or the probe card Touching a high impedance area will cause leakage and problems when performing low current measurements Also excessive leakage will cause the probe card adapter to fail system tests Carefully unpack your Model 9139A PCA Probe Card Adapter from its original shipping carton and inspect the card for any obvious signs of physical damage Report any such damage to the shipping agent immediately Save the original packing carton for possible future shipment 1 2 1 6 2 Shipment contents The following items are included with every Model 9139A PCA order Model 9139A PCA Probe Card Adapter Model 9139A VUA Vacuum control box Unpopulated blank probe card This probe card is used for diagnostics and is installed in the probe card adapter 15 6 m of 1 4 the vacuum hose Close Proximity Load Board with pin and sockets op tional 1 6 3 Additi
10. LD PLATE PROBE RING Figure 2 1 SOCKET 018 PROBE RING CPLB Figure 4 3 SPACER MODELS 9139A PCA 01 and 9139A PCA 04 SPACER MODELS 9139A PCA 02 and 9139 A PCA 05 STANDOFF MOUNTING BLOCK STRAP PROBE RING SHIELD 10 AWG PVC GREEN YELLOW 4 40X3 8 SOCKET BUTTON HEAD mother board to spring contact retainer LUG LUG MOTHER BOARD Figure 2 1 RETAINER SPRING CONTACT Figure 2 1 SOCKET 025 SOCKET 040 SOCKET 060 WASHER mother board to spring contact retainer CS 835 4 40X 1 APPH 4 40X3 4SOBTNH 6 32X1 1 4SOFHS 6 32X3 4PPH 9139A 327 9139A 142 9139 312 HH 37 9139 313 01 9139 313 02 GA 32 GA 33 CS 837 CS 836 1 CS 836 2 9139A 172 CS 830 9139A 325A CS 831 9139A 326 9139A 333 1 9139A 333 2 9139A 310 SO 147 9139A 334 2 9139A 334 1 9139 315 9139 314 SC 99 5 4 40X3 8SOBTNH LU 113 LU 99 6 9139A 102 9139A 331 SO 146 1 SO 146 2 SO 146 3 WA 102 2 6 2 Replaceable Parts Table 6 2 Model 9139A PCA 03 parts list Description Keithley part number 025 PIN CS 835 4 40X3 4 SOCKET BUTTON HEAD 4 40X3 4SOBTNH 4 40X3 8 SOCKET BUTTON HEAD mother board to spring 4 40X3 8SOBTNH contact retainer Figure 2 1 CLOSE PROXIMITY LOAD BOARD Figure 4 1 9139A 142 MOTHER BOARD 9139A 122 PIN CRIMP BARREL 040 CS 836 1 PIN CRIMP BARREL 060 CS 836 2 PIN CONTACT Figure 4 3 CS 837 PROBE CARD Figure 2 1 9139A 172 PROBE POGO PIN Figure 5 2 CS 830 RECEPT
11. T pins Figure 4 9 Locations of connections on probe card 45 Connecting ground to load board If the components mounted on the load board require a ground connection ground the load board To ground the load board either connect the load board to an external ground or ground to the mother board Note A plug can be soldered to the load board end of the ground wire allowing the ground wire to be disconnected from the load board if required External ground Connect a ground wire to the load board either by soldering or by soldering a plug to the end of the wire Route the ground wire out of the top of the prober to an external ground Ground to mother board Connect a ground wire to the load board either by soldering to the load board or by soldering a plug to the end of the wire Connect the ground wire to the mother board at one of the ground sockets for the DUT cables the outer row of sockets Close Proximity Load Board 4 6 Connecting power supply and control cables to load board Connections to external power supplies and connections to digital control signals can be routed from the load board out of the top of the prober 47 Installing and removing the load board To simplify installation each pin is numbered on the probe card and on the load board When assembling the two boards confirm that the pin numbers match The probe card is keyed and therefore will align with the correct pogo pins on t
12. W 3 Prober Stack height Cable Routing Cable exit Ring insert diameter Special items required from Pacific Western from Keithley TAC PR8100 Prober Stack height Cable Routing Cable exit Ring insert diameter Special item required U Itraprecision 680 Prober Stack height Cable Routing Cable exit Ring insert diameter U Itraprecision 880 Prober Stack height Cable Routing Cable exit Ring insert diameter Karl Suss Prober 3 789cm 1 492 in From top or bottom Any direction 24 447cm 9 625 in 1 Extended travel option to allow for a 6 probe card 2 Cylindrical card adapter with no cutouts 3 Keithley probe ring insert P N 9139A 351 501112 3 378cm 1 492 in Top only Any direction 24 764cm 9 75 in Special adapter ring from Teledyne TAC 3 789cm 1 492 in From top or bottom Any direction 24 764cm 9 75 in 3 789cm 1 492 in From top or bottom Any direction 24 764cm 9 75 in Consult factory for specifications TSK A PM 90A Prober Stack height Cable routing Cable exit Ring insert diameter Customer supplied parts from TSK 3 789cm 1 492 in Top only Rear and left only 24 764 cm 9 75 in Ring insert P N FM01275 D001 00 ent Equipment An Interworld Highway LLC Company Specifications are subject to change without notice All Keithley trademarks and trade names are the property of Keithley In
13. a ett E qme dE EE 1 1 Safety symbols and terms eee tree te Peer Quite SH EP pb EGRE erp rnae 1 1 Associated documents ua uere ti 1 2 Unpacking and inspection 2 2 treo etenim p e pee PU e HR PULO IRR e DESI etas 1 2 Inspection for d m ge s netter ette tene ee ete ied etie eine ted egere tule vt ER 1 2 Shipment Contents cert et eR EG PF p PO DSB gen 1 2 Additional manuals ic eR ettet eee te eee ae e ue ede eS deae eee prev e eene 1 2 Packing for shipment 5 orte ar HER EORR EE UO EGER shee sve ir MORE UE SER ETUR EORR TG 1 2 2 Probe Card Adapter O verview 5 eere nennen 27 T Introduction ice A A 2 1 Probe card adapter standard components cc eeeesseceececsecesseceseecsseesneecececsecescecsueeesceceneecseceeaeeeeeesaeceaeeceaeeeaaeeeneenss 2 1 Leakage paths and low current capabilities oer nete eR EH O ae RENI HERO SE RUE 2 2 Motherboard characteristics tatiana tutu ione sion tie CU P o EDAD deans 2 2 Probe card configuration ins epo Petre ERES Tes Pete pedi abe peret Ree eo pee Pe ERE pese ne 2 2 Probe needle desctiptioti 43 ses eter eee cete i eee bei teet se ku deve endete s 2 2 Light shield tek ae cS ARO o o 2 3 iau EE mets ats 2 3 3 Installation esses acaso cisci aaa ERR Seine er aL Introduction ec ERR ERES ene Ie a 3 1 Handhng precautions eee oq lestie isn Rh Sem 3 1 General installation considerat
14. be card adapter in a safe state Failure to reset the test equipment may cause injury or death due to electrical shock Run the probe card continuity test program refer to paragraph 3 7 2 Turn vacuum control box valve to the unload position W Release the probe card retainer cap latches 4 Carefully remove probe card and retainer cap from probe card adapter 3 6 3 6 Performance verification A matrix testis run as part of system diagnostics and requires a blank unpopulated probe card Do not run a matrix test af ter installing each probe card Run a Matrix Test after the probe card adapter installation to check for leakage open connections or shorted connections WARNING During leakage tests high voltages are present on the probe card adapter NOTE It is necessary to install a blank probe card in the probe card assembly to run diagnos tics provided A blank probe card is supplied with the probe card adapter This blank probe card must be retained by the customer The blank probe card s clean surface provides a known low leak age test environment The unmodified Kelvin connections assure accurate continuity tests Handling and storage of the blank probe card is important To permit accurate leakage tests the probe card must remain un populated The probe card must be stored in a protective con tainer in a clean low humidity environment Handling is important see paragraph 3 2 When install
15. ed to the mother board Maintenance NOTE When assembling the probe card adapter use Vacuum Goop from Swagelok to coat all o rings To disassemble the probe card adapter use the following pro cedure WARNING An installed probe card may contain le thal voltages when a test is in operation Reset the test equipment to place the PCA probe card adapter in a safe state Failure to reset the test equipment may cause injury or death due to electrical shock NOTE If time and space are available it is possi ble to disassemble the probe card adapter without disconnecting the DUT cables 1 Place the PCA in a safe state by resetting the test equip ment 2 Turn the vacuum control box valve to the unload posi tion 3 Disconnect vacuum hose from the probe card adapter 4 Disconnect the DUT cables from your system 5 1 Maintenance 5 Remove the probe card adapter assembly from your prober 6 Remove the light shield assembly See Figure 2 1 7 Remove the Allen head screws that secure the cable strain relief for the cable being replaced or moved 8 Remove the probe card from the probe card adapter as sembly paragraph 3 5 5 3 Replacing plug in type DUT cables The DUT cables are pre assembled with connector pins in stalled at the factory Replacement cables with pre assem bled connector pins are available through your Keithley sales office When you install the replacement cable note that th
16. et go GR 46 a Vacuum in yet DT Grommet e lt GR 46 Check Valve PF 5 Tie Wrap CC 38 3 Tie Mount Vacuum Control Box CC 47 9139A 345 Vacuum Hose Routing To Vacuum Source MU Tie Vent Open Ny E Vacuum Control Box Vacuum control box 3 5 Installation Probe Card Pin 1 Probe Card Retainer Cap Pin 1 Figure 3 5 Probe card and probe card retainer cap 5 Install the probe card Turn vacuum control box valve to load operate position Line up probe card pin 1 with pin 1 indicator on the retainer cap Figure 3 5 Insert probe card into probe card retainer cap NOTE Two alignment pins and holes are provided along the perimeter of the probe card These holes and pins provide for proper orienta tion of the probe card during installation Align pin 1 ofthe probe card with pin 1 of the mother board Use alignment marking on edge of probe card retainer cap and match to same markings of mother board sup port ring Attach the retainer cap to the mother board ring Make sure latches secure the probe ring retainer cap will click into place 6 Perform probe card continuity test S400 Series System to check Kelvin connections from the system matrix to the probe card adapter refer to paragraph 3 7 3 5 Probe card removal procedure WARNING An installed probe card may contain le thal voltages when a test is in operation Reset the test equipment to place the PCA pro
17. firm that your probe card adapter assembly was config ured properly at the factory Included with your probe card adapter is a copy of your completed Probe Card Adapter Order Guide and a site specific drawing of your probe card adapter Confirm that the probe card adapter and the drawing match your requirements as listed on the order guide Check the fol lowing items Check the DUT cables interconnecting plug s Make sure they are the correct type for your system Check that there are the correct number of DUT pins count the number of cables connected to the mother board Inspect the installation hardware This hardware is spe cific to your prober Check DUT cable routing Make sure that DUT cables are assembled correctly to the probe card adapter This 3 3 Installation 3 4 allows the DUT cables to exit properly from prober af ter the probe card adapter is installed 3 3 6 Light shield and microscope clearance Check the light shield and microscope clearance Most mi croscopes are located far enough above the probe card as sembly that they do not present clearance problems when the light shield cover is installed Some microscopes may pro trude into the probe ring assembly to the area below the shield plate This presents clearance problems If the micro scope is mounted on a pivoted arm move the microscope aside and then install the light shield 3 4 Installation procedure WARNING An instal
18. he mother board To install the load board follow these steps 1 Orient the load board so that pin 1 of the load board aligns with pin of the probe card 2 Plug the load board into the Hypertac pins located on the probe card 3 Install the support ring probe card and load board as sembly into the probe card adapter See paragraph 3 4 4 5 Close Proximity Load Board 4 6 5 1 Introduction This section describes how to perform maintenance while maintaining the high performance characteristics of the probe card adapter A minimum amount of maintenance is required for the moth er board and the DUT cables However when maintenance is required it is important to perform maintenance operations correctly Maintenance items such as replacing cables can have a significant impact on the probe card adapter s perfor mance When performing maintenance lubricate all o rings using Vacuum Goop from Swagelok Make sure to use adequate Vacuum Goop for lubrication but do not over lubri cate o rings For maintenance of the probe pins refer to documentation provided by the manufacturer of the probe pins WARNING The system can source high voltages at current levels that can result in personal injury or death Turn off power to sys tem before performing any maintenance procedure 5 2 Mechanical disassembly Disassembly of the probe card adapter is required when re placing DUT cables or when maintenance is requir
19. im pedance area will cause leakage and problems when performing low current measurements Also excessive leakage will cause the probe card adapter to fail system tests Handle board only by the edges Use gloves to prevent inad vertent contact with the high impedance areas Figure 3 1 Avoid bringing the board into contact with sources of con tamination Always confirm that fixtures and handling equipment are clean 3 1 Installation Cable Terminations Motherboard Pogo Pins Figure 3 1 High impedance areas 3 3 General installation considerations 3 3 1 Overview The mechanical architecture of the probe card adapter makes it possible to install the probe card adapter in a wide variety of probers In general the architecture consists of a mother board Figure 2 1 suspended from the prober ring Spacers inserted between the mother board and prober ring connect the two assemblies The length of the spacers determines the overall stack height of the probe card assembly Modification of the mother board assembly is not required when changing the stack height or when replacing the prober ring The ring insert diameter is changed by replacing the prober ring The following is a list of the different probers supported by the Model 9139A PCA Prober Card Adapter Alessi Hlectroglas 1034 Electroglas 2000 Series EG2001 and EG2010 Electroglas 3000 Series EG3001 and EG3010 Hlectroglas 4060 Electroglas
20. in 254635 001 3 789cm 1 492 in Over top plate of prober only 24 764cm 9 75 in 254635 001 3 789cm 1 492 in Over top plate of prober only 24 764cm 9 75 in Standard Prober Requirements KLA 1007 1220 Prober Stack height Cable Routing Cable exit Ring insert diameter Special installation notes Customer supplied parts from KLA TEL P 8 P 8XL Stack height Cable Routing Cable exit Ring insert diameter Customer supplied parts from KLA TEL 3 378cm 1 330 in Top only Any direction except from front of prober 24 764cm 9 75 in 1 Move vacuum hose to per mit installation of probe card adapter 2 Move LED sensor to permit installation of probe card adapter Re Standard ring insert adap ter P N 780 900935 00 2 HF prober ring insert adap ter P N 780 910804 00 3 378cm 1 330 in standard headplate order 9139A PCA 03 for SACC P 8 Model auto probe card changer Top only Any direction except from front of prober 24 764 cm 9 75 in Ring insert adapter P N U261 Z30003 XX Pacific Western PW 2 Prober Stack height Cable Routing Cable exit Ring insert diameter Special item required from Keithley 3 789cm 1 492 in From top or bottom Any direction 24 447cm 9 625in Keithley probe ring insert P N 9139A 351 501112 NOTE Contact Keithley Instruments if your prob er is not shown B 2 Pacific Western P
21. information about the Model 9139A PCA Probe Card Adapter The probe card adapter is designed specifically for parametric testing The advanced design of the probe card adapter provides greater accuracy of parametric tests where a wide range of measurements are needed The Model 91394 is a specially designed interface to con nect a Keithley Parametric Tester to the device under test DUT while maintaining system specifications Other appli cations with Keithley switching systems are possible on a custom order basis NOTE Specific information about installing hard ware on the prober is found in the documen tation provided by the prober manufacturer Information about connections to the Kei thley Parametric Test systems is found in the documentation provided with your sys tem 12 Features Key features of the Model 9139A PCA Probe Card Adapter include Vacuum lock allows quick exchange of probe cards with accurate and repeatable alignment Easy connection of DUT cables to probe card Mother board accepts 64 DUT cables probe card con tains 64 fully guarded measure and sense lines Maintains test system specifications to the probe tip Preserves full Kelvin connections to probe tip Extended guards reduces capacitance DUT cables can be routed vertically or horizontally to the motherboard supporting many different probers Extends low current capabilities of the Keithley Para metric Test system
22. ing this card han dle card by the edges and do not touch surface of probe card The following list describes the programs to verify perfor mance For further information about running diagnostics re fer to the software and or diagnostics manual for your system Performance Verification Using S530 Diagnotics Run the Matrix Tests from 530 diagnostics to verify probe card adapter performance 3 7 Options 3 7 1 Build plate and planarization fixture A build plate and planarization fixture is available through Cerprobe This fixture permits you to mount and adjust probes on the probe card The fixture accepts the Keithley probe card It interfaces to the Rucker amp Kolls build station 300X and Planarization station 425 The build plate and planarization fixture is purchased through one of the Cerprobe offices listed in Appendix B 3 7 2 Close proximity load board The Close Proximity Load Board is an option used when ex ternal components are required at DUT pins This option is covered in detail in Section 4 TEquipment An Interworld Highway LLC Company Close Proximity Load Board 4 1 Introduction 4 2 Close proximity load board This section contains information about the optional close The close proximity load board is used when external com proximity load board ponents are required at the DUT pins The load board is not required for most applications The load board consists of an unassembled PC board and a se
23. ins WARNING An installed probe card may contain le thal voltages when a test is in operation Reset the test equipment to place the PCA probe card adapter in a safe state Failure to reset the test equipment may cause injury or death due to electrical shock To replace a pogo pin use the following procedure Reset the tester hardware Remove the probe card from the probe card adapter as sembly Refer to paragraph 3 5 Remove the defective pogo pin Grab the pin with a pair of needle nose pliers Pull the pin out of its socket CAUTION The pogo pins are not symmetrical Damage to the socket may occur if the pogo pins are inserted incorrectly Locate the rounded end of the replacement pogo pin see Figure 5 2 Insert the rounded end of the pin into the socket The double chisel tip located on the other end of the pogo pin must protrude out of the socket This end of pogo pin contacts a pad located on the probe card Re install probe card Cs gt gt Small End 4 Solder Pads on surface of board this is the probe ring side of the mother board 5 3 Maintenance 5 7 Replacing a pogo pin socket If a pogo pin breaks off in a socket or if the pin becomes lodged in a socket the pogo pin socket can be replaced To replace a socket use the following procedure WARNING An installed probe card may contain le thal voltages when a test is in operation Reset the test equipment to p
24. ions sess nen rennen neon nc tenn nenne tnr enne trennen nee ene 3 2 OVERVIEW Mu 3 2 Salety icq oae needs e ene a eene RE EE 3 2 Rire edge 3 3 Cable routing euet ene pi eet 3 3 Probe card adapter configuration oet ette eee Bali asp Recess ende tees 3 3 Light shield and microscope clearance esseeseseeeeee nennen enne enne inneren ene nnennn 3 4 Installation POC Mesina eite e e Receta Rd ber teer nein 3 4 Probe card removal procedure sess nete RR nn O RR non rennen nen tretn eene E IOE EEES neret 3 6 daras alos MAA selves t es sive Dr ERBEN voce to tete a eene evel ewe e 3 6 ODptIODS asi oio RR 3 6 Build plate and planarization fixture eese eene eene treten nennen ne tee tree ene ete nnne 3 6 Close proximity load board dee teer rS toS ESEESE S OEKE E spe reete 3 6 4 Close Proximity Load Board rrr nnnm nennen AL TPO CU CHOI M 4 1 Close proximity load board enses cem se Ip EI RR ein UR ies tienes tu de 4 1 Installing Hypertac ptns eet o que tp e reri tet epe eu e o ERE Eee EE 4 2 Installing components on load board oooococcnoccocccconnconncnonaconnnnnn ccoo non nncnnnc eene enne neon anar Rc neret nnne E EEE cane non nnne enne enne 4 4 Connecting ground to load board cooooocnccconcccconnconononono nono noncnnn nro
25. lace the PCA probe card adapter in a safe state Failure to reset the test equipment may cause injury or death due to electrical shock 1 Follow steps in paragraph 5 2 to disassemble the probe card adapter 2 Locate the defective pogo pin socket assembly 3 Locate the pad where the defective socket is soldered to the mother board This pad is on the probe ring side of the mother board refer to Figure 2 1 4 Unsolder the socket from the probe ring side refer to Figure 2 1 of the mother board CAUTION Do not apply excessive heat when de soldering socket Excessive heat can melt the retention ring of the probe card adapter 5 4 5 Remove the unsoldered pin Push the end of the socket that protrudes through the mother board Grab the other end of the socket with a pair of needle nose pliers Pull the socket out of its hole in the retention ring 6 Remove residual solder from hole of solder pad 7 Insert the small end of the replacement socket into the hole located in the retention ring Figure 5 2 Slide the socket into the hole until the bottom of the socket is flush with the surface of the retention ring pogo pin not installed in socket 8 Confirm that the socket is installed properly Figure 5 2 The small end of the socket protrudes through the hole on the mother board The open end of the socket is flush with the surface of the retainer ring 9 Solder the socket to the pad located on the mother boa
26. led probe card may contain le thal voltages when a test is in operation Reset the test equipment to place the PCA probe card adapter in a safe state Failure to reset the test equipment may cause injury or death due to electrical shock Use the following procedure to install your Model 9139A PCA Probe Card Adapter 1 Unpack and inspect Model 9139A PCA See paragraph 3 2 for special handling precautions 2 Install the probe card adapter in your prober The hardware supplied with your probe card adapter as sembly varies depending on the type of prober you have Refer to paragraph 3 3 1 for a list of supported probers Appendix C details the specific requirements for a num ber of standard probers In some instances the prober may be modified by the supplier for a particular applica tion If this is the case contact Keithley for additional information on prober requirements and available op tions for the Model 9139A PCA Probe Card Adapter 3 Route 1 9 cm O D vacuum hose provided to probe card adapter out of the way of any moving parts of your prober Make sure the hose remains clear of any pinch points that could cut off or restrict flow through the vac uum hose The customer supplies all connections and hardware associated with vacuum hosing in addition to the vacuum source Install PCA to vacuum control box hose Route a section of vacuum hose from the PCA probe card adapter through the TO PCA grom
27. n a shock hazard is present Lethal voltage may be present on cable connector jacks or test fixtures The American National Standards Institute ANSI states that a shock hazard exists when voltage levels greater than 30V RMS 42 4V peak or 60VDC are present A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring Operators of this product must be protected from electric shock at all times The responsible body must ensure that operators are prevented access and or insulated from every connection point In some cases connections must be exposed to potential human contact Product operators in these circumstances must be trained to protect themselves from the risk of electric shock If the circuit is capable of operating at or above 1000V no conductive part of the circuit may be exposed Do not connect switching cards directly to unlimited power circuits They are intended to be used with impedance limited sources NEVER connect switching cards directly to AC mains When connecting sources to switching cards install protective devices to limit fault current and voltage to the card Before operating an instrument ensure that the line cord is connected to a properly grounded power receptacle Inspect the connecting cables test leads and jumpers for possible wear cracks or breaks before each use 04 09 When installing equipment where access to the main power cord is restricted such as rack mou
28. nect the probe card pins to other system pins System S5xx Cable Source or M easure Shield Two cables required for Kelvin connection 5 9 Cleaning Cleaning is important to ensure accurate low current measure ments The cleaning process removes contamination that caus es shunt resistance leakage between measurement paths Contamination can take many forms Some sources of con tamination are Residue remaining after incomplete cleaning Residue after using an improper or contaminated clean ing fluids Residue from fingerprints See paragraph 3 2 Flux from soldering Condensation from room conditions which do not meet Keithley specifications Observe the following precautions when it is necessary to use solder on a circuit board Use an OA based organic activated flux and take care not to spread the flux to other areas of the circuit board Remove the flux from the work areas when the repair has been completed Use pure water along with clean foam tipped swabs or a clean soft brush to remove the flux Once the flux has been removed swab only the repaired area with methanol then blow dry the board with dry nitrogen gas After cleaning the board should be allowed to dry in a 50 C low humidity environment for several hours Pogo Pin CS 830 b Double Chisel Tip Rounded End Figure 5 2 Orientation of pogo pin and socket Maintenance 5 6 Socket CS 831 Replacing pogo p
29. nents in mains circuits including the power transformer test leads and input jacks must be purchased from Keithley Instruments Standard fuses with applicable national safety approvals may be used if the rating and type are the same Other components that are not safety related may be purchased from other suppliers as long as they are equivalent to the original component note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product If you are unsure about the applicability of a replacement component call a Keithley Instruments office for information To clean an instrument use a damp cloth or mild water based cleaner Clean the exterior of the instrument only Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument Products that consist of a circuit board with no case or chassis e g a data acquisition board for installation into a computer should never require cleaning if handled according to instructions If the board becomes contaminated and operation is affected the board should be returned to the factory for proper cleaning servicing Table of Contents Section Page 1 General Information sasssnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnannnnnnnnnannnnannnnas LaL IO OO as ro A AAA A E A id 1 1 Beat tes 5 idee t e RR EUR E RU MR IER OE IER aii E GNI ERR IEEE DUAL EDO Re 1 1 Manual addend
30. nnection prober hardware probe card without probe pins E i S ens Or close proximity load board if needed for specific appli cation of probe card adapter Strain Relief 9139A 333 1 or 2 Strain Relief Motherboard Light Shield with Hold D 9139A 102 interlock connection 9 Own 9139A 122 S500 339A Screws 4 40x3 4 50BTNH DUT Cable Pogo Pins and Spring Alignment Pin for Contact Retainer Motherboard and Prober Ring 9139A 331 Probe Card Insert CS 830 CS 831 9139A 325 Vacuum Connection A PF 6 pat Motherboard Probe Card robe Lar Retainer Ring Retainer Cap 9139A 172 9139A 326 9139A 327 Insulator Teflon Ring y 9139 313 01 Figure 2 1 9139 313 02 Probe and adapter components 2 1 Probe Card Adapter Overview 2 3 Leakage paths and low current capabilities The Model 9139A PCA Probe Card Adapter permits fast low current measurements The short length of the connec tions between the DUT cables and the probe pins reduces ca pacitive coupling between probe pins Capacitance is further reduced by the extended guards This reduced capacitance permits faster rise times The Model 9139A PCA extends the low current capabilities of the Keithley Parametric Test system Leakage is mini mized by using short direct connections and by extending the guards traces through to the probe blade connections Leak age paths are also minimized by using low leakage materials
31. nstru ments for repair perform the following 1 Obtain an RA from the Repair Department at Keithley They will also determine the warranty status of your probe card adapter 2 Carefully pack the probe card adapter in the original packing carton or the equivalent 3 Write ATTENTION REPAIR DEPARTMENT on the shipping label 6 1 Replaceable Parts Models 9139A PCA 01 9139A PCA 02 9139A PCA 04 and 9139A PCA 05 parts list Table 6 1 Description Keithley part number 025 PIN 4 40X1 4 PHILLIPS PAN HEAD SCREW strap to standoff 4 40X3 4 SOCKET BUTTON HEAD ring segment mounting Figure 2 1 6 32X1 1 4 SOCKET FLAT HEAD mother board retainer mounting 6 32X3 4 PH PAN HD SCR shield plate mounting CAP PROBE CARD RETAINER Figure 2 1 CLOSE PROXIMITY LOAD BOARD Figure 4 1 COVER LIGHT PROBE RING HANDLE SHIELD INSULATOR BLACK DECAL Figure 2 1 INSULATOR BLACK DECAL Figure 2 1 O RING THERMOBONDED use Swagelock Vacuuum Goop O RING THERMOBONDED use Swagelock Vacuuum Goop PIN CONTACT Figure 4 3 PIN CRIMP BARREL 040 PIN CRIMP BARREL 060 PROBE CARD Figure 2 1 PROBE POGO PIN Figure 5 2 PROBE RING INSERT Figure 2 1 RECEPTACLE POGO PIN Figure 5 2 RETAINER RING Figure 2 1 RING SEGMENT CABLE CLAMP strain relief for Models 9139A PCA 01 and 9139A PCA 02 Figure 2 1 RING SEGMENT CABLE CLAMP strain relief for Models 9139A PCA 04 and 9139A PCA 05 Figure 2 1 SHIE
32. nting a separate main input power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator For maximum safety do not touch the product test cables or any other instruments while power is applied to the circuit under test ALWAYS remove power from the entire test system and discharge any capacitors before connecting or disconnecting cables or jumpers installing or removing switching cards or making internal changes such as installing or removing jumpers Do not touch any object that could provide a current path to the common side of the circuit under test or power line earth ground Always make measurements with dry hands while standing on a dry insulated surface capable of withstanding the voltage being measured The instrument and accessories must be used in accordance with its specifications and operating instructions or the safety of the equipment may be impaired Do not exceed the maximum signal levels of the instruments and accessories as defined in the specifications and operating information and as shown on the instrument or test fixture panels or switching card When fuses are used in a product replace with the same type and rating for continued protection against fire hazard Chassis connections must only be used as shield connections for measuring circuits NOT as safety earth ground connections If you are using a test fixture keep the lid closed while power is applied to
33. o Appendix C for prober specific stack height requirements Installation may require installing mounting hardware onto the prober to in sure that the prober stack height is the same as the probe card adapter stack height See paragraph 3 4 3 3 4 Cable routing Cable routing is an important installation consideration DUT cables can be routed above or below the top plate of the prober For cable routing above the top plate the DUT cables exit vertically from the probe card adapter For cable routing below the top plate the DUT cables exit horizontally from the probe card adapter Prober Top Plate Bearing Surface Stack Height Top of Wafer with chuck at probing position Figure 3 3 Stack height Installation The DUT cables are routed under the prober ring of the probe card adapter In addition the DUT cables on some probers may exit from the left right or from the back of the prober The cable exit you use depends on the type of prober and how the prober is oriented next to the system Regardless of how the DUT cables exit from the prober all the DUT ca bles must be the same length A uniform cable length pro vides uniform electrical characteristics capacitance and inductance of the cables This is important when performing capacitance measurements or when measuring low level currents paragraph 3 4 contains important information about installing DUT cables 3 3 5 Probe card adapter configuration Con
34. onal manuals This manual is included with every order If an additional manual is required order the manual package Keithley part number 9139A 901 00 The manual package includes an in struction manual and any pertinent addenda 1 7 Packing for shipment Should it become necessary to return the Model 9139A PCA for repair carefully pack the Model 9139A PCA in its orig inal packing carton or equivalent along with the following information An RA Return Authorization Obtain the RA from the Semiconductor Business Unit Repair Department at Keithley When an RA is issued the Semiconductor Business Unit Administrator will also determine the warranty status of your probe card adapter e Advise as to the warranty status of the probe card adapt er received from the Semiconductor Business Unit Re pair Department see above Write ATTENTION REPAIR DEPARTMENT on the shipping label Probe Card Adapter O verview 2 1 Introduction appropriate DUT cables strain reliefs and other miscellaneous hardware This section contains an overview of the Model 9139A PCA mother board containing interconnect pins for DUT Probe Card Adapter cable connection pogo pins and retention ring light shield with interlock connection 22 Probe card adapter standard components prober ring mother board support plate The Probe Card Adapter consists of the following parts Fig insulation ring Teflon ure 2 1 probe card ring vacuum co
35. pin capacitance use ce ramic blade probes 2 6 Probeneedle description Although probe cards with mounted probe needles pins are not available through Keithley Many probe card vendors are able to make probe cards for the 9139A Make sure the probe card manufacturer complies with the probe needle specifica tions required by the Model 9139A Figure 2 2 and Figure 2 3 Refer to Figure 2 3 for probe needle mounting information Ceramic Side Arm 0 150 Height 3 81mm 0 245 Tip D epth 6 22mm Figure 2 2 Probe needle dimensional specifications 2 7 Light shield The light shield covers the opening in the center of the probe card adapter This blocks ambient light and permits testing under a lights out condition 28 Options The following options are available with the Model 9139A PCA Probe Card Adapter Build Plate and Planarization fixture Designed for mounting and adjusting probes on this probe card The fixture interfaces to the Rucker amp Kolls build station 300X and planarization station 425 This option is available from the facilities listed in Appendix B Probe Needle aS Probe Card Adapter Overview Close proximity load board and Hypertac pins and sockets Not required for most applications used when external components are required at the DUT pin The close proximity load board contains drilled plated through holes Holes are provided for connections to source and
36. r so that the long pin is inserted into the probe card Install three mated pins and sockets Figure 4 4 for each DUT pin that requires connections to the load board For applications requiring low capacitance and fast set tling times plan connections so that a minimum quanti ty of connections are required to the load board H ypertac Socket SO 147 H ypertac Pin CS 837 Figure 4 3 Hypertac pin assembly Hypertac Socket Hypertac Pin x Close Proximity Load Board Insert Hypertac pins in these three locations Measure Source Y Guard Figure 4 4 Hypertac pin installation Place the load board on the sockets and line up so that all the sockets are seated in the load board Figure 4 5 Solder the socket to the load board DO NOT SOLDER THE HYPERTAC PINS TO THE PROBE CARD Fig ure 4 6 H ypertac Socket Probe Card H ypertac Pin Figure 4 5 Seating Hypertac sockets in load board Solder Socket Load Board Hypertac Socket Probe Card Hypertac Pin Figure 4 6 Soldering Hypertac sockets to load board 6 Insert a spacer between the load board and the probe card Figure 4 7 Pull boards far enough to insert a spacer Do not pull boards apart Spacing between the boards should allow approximately 1 16 of the Hyper tac pin to protrude through holes on the probe card 7 Turn the probe card load board assembly over so that the probe card faces up Solder the Hypertac pins to the probe card Fig
37. rd 10 Install a pogo pin into the socket 11 Clean the flux from the solder connection See proce dure in paragraph 5 5 12 Re install the probe card 5 8 Replacing vacuum connection The probe card adapter s vacuum connection can be replaced if damaged Remove the vacuum connection Make sure all old sealant is removed from threaded holes on probe card adapter Lightly apply standard pipe sealant to new vacuum connection and install Do not overtighten connection 6 1 Introduction This section contains a list of replaceable parts for the Model 9139A PCA 6 2 Partslist Probe card adapter Table 6 1 contains the part numbers of probe card adapter models 9139A PCA 01 9139A PCA 02 9139A PCA 04 and 9139A PCA 05 Table 6 2 contains the part numbers of probe card adapter model 9139A PCA 03 Blank probe card For a replacement blank unpopulated probe card order Keithley part number 9139A 172 Replaceable Parts 6 3 Ordering information To place an order or to obtain information about replace ment parts contact your Keithley representative or the facto ry see the front of this manual for addresses When ordering parts be sure to include the following information Probe card adapter model number 9139A Adapter serial number Part description and part number Circuit designation if applicable Keithley part number Tun 6 4 Factory service If the probe card adapter is to be returned to Keithley I
38. rd assembly prober specific Stack height of prober The distance between the surface the probe ring mounts on and the surface of the chuck Stack height of probe card adapter This is the distance between the surface where the probe ring rests against the top plate and the tips of the probe blades Glossary A 2 Standard Prober Requirements Alessi Prober Stack height 3 378cm 1 330 in Cable Routing Top only Cable exit Any direction Ring insert diameter 24 764cm 9 75 in Customer supplied parts Adapter ring from Alessi Electroglas 1034 Prober Stack height 3 789cm 1 492 in Cable Routing Over top plate of prober only Ring insert diameter 24 764cm 9 75 in E lectroglas 2000 Series E G 2001 and E G 2010 Prober Stack height 3 789cm 1 492 in Cable Routing Over top plate of prober only Ring insert diameter 24 764cm 9 75 in Electroglas 3000 Series E G 3001 and E G 3010 Prober Stack height 3 789cm 1 492 in Cable Routing Over top plate of prober only Ring insert diameter 24 764cm 9 75 in Electroglas 4060 Prober Stack height Cable Routing Ring insert diameter Adapter ring part number Electroglas 4080 Prober Stack height Cable Routing Ring insert diameter Adapter ring part number Electroglas 4085 Prober Stack height Cable Routing Ring insert diameter 3 789cm 1 492 in Over top plate of prober only 24 764cm 9 75
39. ree sizes of connector pins are used on each DUT cable The smallest connector pin is installed on the source and measure conductors A larger size connector pin is installed on the guard conductor The largest connector pin is installed on the outer shield ground conductor WARNING An installed probe card may contain le thal voltages when a test is in operation Reset the test equipment to place the PCA probe card adapter in a safe state Failure to reset the test equipment may cause injury or death due to electrical shock To replace a DUT cable perform the following procedure 1 Place the PCA in a safe state by resetting the test equip ment System S4xx Cable Source M easure Ground Guard Figure 5 1 Replacing plug in guarded type DUT cables 5 2 2 Disassemble the probe card adapter assembly refer to paragraph 5 2 3 Insert connector pins of cable in sockets in mother board see Figure 5 1 4 Reassemble probe card adapter 54 Moving DUT cable connections WARNING An installed probe card may contain le thal voltages when a test is in operation Reset the test equipment to place the PCA probe card adapter in a safe state Failure to reset the test equipment may cause injury or death due to electrical shock Typically probe card pin 1 is connected to system pin 1 probe card pin 2 is connected to system pin 2 etc If an ap plication requires different connections you can con
40. sible to the probe needles Head plate top plate ring carrier The upper surface of the prober that holds the probe card adapter Hypertac pin A type of connector pin used where low contact resistance long life and low insertion forces are re quired Interconnect pins Pins located between the probe card end of the DUT cable and the mother board Mother board assembly The printed circuit board where the DUT cables and pogo pins are soldered Mother board support ring The metal ring located under the mother board Pogo pins The spring loaded contacts that are located be tween the mother board and the probe card Probe blade A fine wire or contact assembly that provides the electrical connection between the die on the wafer and the probe card Glossary Probe card This is the printed circuit board where the probe blades are mounted Probe card adapter The complete probe assembly This includes the mother board assembly DUT cables probe card and prober specific hardware The probe card adapter is mounted to the head plate Probe card support ring The retaining ring for the probe card This is mounted on the bottom side of the Probe Card Adapter and holds the probe card Probe needles The contacts located between the probe card and the pads on the wafer Prober specific hardware Any special hardware that is re quired to install the probe card adapter into a specific prober Ring carrier Supports the mother boa
41. struments Inc All other trademarks and trade names are the property of their respective companies KEITHLEY A GIR EAT ER MEASURE G F CO N FII E UN E Keithley Instruments Inc Corporate Headquarters 28775 Aurora Road Cleveland Ohio 44139 440 248 0400 Fax 440 248 6168 1 888 KEITHLEY www keithley com 12 06
42. t of interconnecting pins and sockets Hypertac pins You assemble the load board and locate the Hypertac pins where external connections are required The Hypertac pins and sockets should only be connected to probe pins where exter Prober Ring Location of added components H ypertac Sockets Load Board Ju i l i i pon alt N Hypertac Pins 9139A 142 Ps Probe Card Figure 4 1 Probe card assembly cross sectional view 4 1 Close Proximity Load Board nal connections are required System specifications cannot be maintained on pins that are connected to the close prox imity load board Figure 4 1 shows a cross section of the probe card assembly The load board is mounted directly above the probe needles It is held in place by the Hypertac pins 4 3 Installing Hypertac pins Procedure To connect the load board to the probe card use the follow ing procedure 1 Cut the source and measure traces on probe card pins where external components are required Figure 4 2 Cut source and measure traces here Measure Source Guard Figure 4 2 Source and measure traces 4 2 CAUTION The source and measure signals must be connected together on the load board Failure to do so may cause inaccurate readings and or improper guarding 2 Pre assemble the Hypertac pins Figure 4 3 Mate the pairs of pins 3 Insert the mated pins and sockets into holes located on the probe card Orient the mated pai
43. unction They must be trained in electrical safety procedures and proper use of the instrument They must be protected from electric shock and contact with hazardous live circuits Maintenance personnel perform routine procedures on the product to keep it operating properly for example setting the line voltage or replacing consumable materials Maintenance procedures are described in the user documentation The procedures explicitly state if the operator may perform them Otherwise they should be performed only by service personnel Service personnel are trained to work on live circuits perform safe installations and repair products Only properly trained service personnel may perform installation and service procedures Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category and Measurement Category Il as described in the International Electrotechnical Commission IEC Standard IEC 60664 Most measurement control and data I O signals are Measurement Category and must not be directly connected to mains voltage or to voltage sources with high transient over voltages Measurement Category II connections require protection for high transient over voltages often associated with local AC mains connections Assume all measurement control and data I O connections are for connection to Category sources unless otherwise marked or described in the user documentation Exercise extreme caution whe
44. ure 4 8 4 3 Close Proximity Load Board d Load Board Temporary Spacer Y Probe Card 1 16 1 1 5mm Figure 4 7 Temporary spacer installation Solder Pin y Probe Card Temporary ee Spacer Load Board Figure 4 8 Soldering Hypertac pins 4 4 CAUTION When soldering pins avoid excessive heat on the foils Excessive heat could cause breakdown of the chemical struc ture of the board material and could cause leakage problems 8 When all components are mounted clean the load board and probe card with an HCFC to remove all solder flux and contamination CAUTION If the probe card adapter is used to per form low current measurements proper cleaning is required See paragraph 5 5 for additional information 4 4 Installing components on load board The load board has a grid pattern of holes spaced on 0 1 inch centers Components are secured by soldering the leads into the plated through holes Interconnections are made by sol dering wires between the components Connections to the source and measure conductors are made by soldering wires to holes located adjacent to where the source and measure Hypertac pins are soldered to the load board See Figure 4 9 NOTE Source and measure conductors must be connected together on the load board Connections to the probe pin are made by soldering a wire to the hole located adja cent to where the Hypertac pin is soldered to the load board Connections to D U
45. www keithley com Model 9139A PCA Probe Card Adapter Instruction Manual E usa 9139A 901 01 Rev D October 2011 Equipm u i pme nt An Interworld Highway LLC NET KEITHLEY M odel 9139A PCA Probe Card Adapter Instruction M anual 2011 Keithley Instruments Inc All rights reserved Cleveland Ohio U S A October 2011 Document Number 9139A 901 01 Rev D KEITHLEY Safety Precautions The following safety precautions should be observed before using this product and any associated instrumentation Although some instruments and accessories would normally be used with non hazardous voltages there are situations where hazardous conditions may be present This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury Read and follow all installation operation and maintenance information carefully before using the product Refer to the user documentation for complete product specifications If the product is used in a manner not specified the protection provided by the product warranty may be impaired The types of product users are Responsible body is the individual or group responsible for the use and maintenance of equipment for ensuring that the equipment is operated within its specifications and operating limits and for ensuring that operators are adequately trained Operators use the product for its intended f
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