BGM User Manual - Newport Corporation
Contents
1. o mm M J H o e il Y o O O 4HOLES D hF MODEL BGM160PP SHOWN Dimensions in millimeters Except BGM50 Connector orientation varies by series size Please call for exact configuration of specific models 25 PIN SUB D CONNECTOR MMMM lt K gt M lt L gt Diameter Dimension mm Model Metric D E F G H J K M N P 0 R S T U V Ww BGM50 M BGM50 7 5 75 4 x 25 4 50 50 89 78 5 53 5 63 5 74 1 6 50 5 22 5 BGM80 M BGM80 7 5 101 x 50 4 80 80 120 125 5 545 61 5 106 116 6 70 78 5 6 23 15 BGM120 M BGM120 6 8 152 4 x 50 8 150 x 100 120 120 170 206 31 70 94 164 180 8 99 128 6 43 2 BGM160 M BGM160 6 8 203 2 x 101 6 200 x 150 170 160 220 350 87 99 138 2 245 270 10 130 197 5 10 46 8 BGM200 M BGM200 6 8 254 x 203 2 250 x 250 270 200 270 520 135 196 360 398 10 200 300 10 62 5 4 HOLES THD A 26 Thread Spacing Dimension mm 1HOLE THD A CENTER Model A B C Z Model PP PE Cc MS Metric mm No Holes Metric BGM50 8 32 25 4 BGM50 M BGM50 amp BGM80 M BGM80 Q A 9 M BGMS0 M4 25 L 80 52. 5 7 Pinouts The 25 pin Sub D connection for the M BGM goniometric cradles is given in the following table UE31PP amp UE41PP UE31CC UE511CC M BGMPE M BGM50CC MJ3BGM120CC Manual UE41PP UE62PP UE63PP amp to M BGMMS M BGMPP M BGM80CC MJ3BGM200CC 1 Phase 1 1 N C 1 Tachometer 1 N C 2 Phase 1 2 N C 2 Tachometer 2 N C 3 Phase 2 3 N C 3 Tachometer 3 N C 4 Phase 2 4 N C 4 Tachometer 4 5 Phase 3 5 Motor 5 Motor 5 N C 6 Phase 3 6 Motor 6 Motor 6 N C 7 Phase 4 7 Motor 7 Motor 7 N C 14 8 Phase 4 8 Motor 8 Motor 8 N C 9 CommonPhase34 9 N C 9 N C 9 N C 10 N C 10 N C 10 N C 10 N C 5 5 11 Common Phase 1 2 11 N C 11 N C 11 N C 5 12 12 12 N C 12 N C e A 13 Mechanical Zero 13 Mechanical Zero 13 Mechanical Zero 13 Mechanical Zero 25 20 43 14 Shield Ground 14 Shield Ground 14 Shield Ground 14 Shield Ground 15 Index Pulse I 15 Index Pulse I 15 Index Pulse I 15 Index Pulse I 16 0 V logic 16 0 V logic 16 0 V logic 16 0 V logic 17 End of Run 17 End of Run 17 End of Run 17 End of Run 18 End of Run 18 End of Run 18 End of Run 18 End of Run 19 Encoder Phase 19 Encoder Phase 19 Encoder Phase A 19 Encoder Phase A 20 Encoder Phase B 20 Encoder Phase B 20 Encoder Phase B 20 X Encoder Phase B 21 Encoder Power 5V 21 Encoder 5 21 Encoder
3. Sub D25 male Connection Connection Connection Connector M BGMPP amp M BGM50 amp 80CC M JURM120 to 200CC 9 Common Phase 3 4 N C N C 10 NC N C N C 1 Common Phase 1 2 N C N C 12 i 1 N C N C 14 ri Phase 1 N C Tachometer 2 Phase 1 N C Tachometer 3 i r m Phase 2 N C Tachometer 4 1 1 PS Phase 2 N C Tachometer rod jn x 5 N Phase 3 Motor Motor 6 Phase 3 Motor Motor i Phase4 Motor Motor 8 i Phase 4 Motor Motor E a Y 14 1 Ground Ground Ground i 16 X 1 OV logic 0 V logic 0 V logic 13 E m Mechanical Zero Mechanical Zero Mechanical Zero 19 Encoder Phase Encoder Phase A Encoder Phase A 23 1 La Encoder Phase Encoder Phase A Encoder Phase A 20 r 1 Encoder Phase Encoder Phase B Encoder Phase B 24 Encoder Phase B Encoder Phase B Encoder Phase B 15 1 1 4 i Index Pulse Index Pulse Index Pulse 25 T 1 Index Pulse Index Pulse Index Pulse 1 17 End of Run End of Run End of Run 18 L 1 End of Run End of Run End of Run 21 1 7 E 45 V Encoder 5 V Encoder 5 V Encoder
4. 1 Goniometric Cradles 23 RoHS Compliant UsER S MANUAL Newport Experience Solutions For Motion Think Newport BGM Series Goniometric Cradles Warranty A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used 7 9 EDH0161En1030 07 11 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument trans portation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or mis use of any product or part CAUTION Warranty does not apply to damages resulting from e Incorrect usage Load on the stage greater than maximum specified load
5. lt 26 M BGM80 Carriage Interface 4 clearance holes for screw cf 64 x 20 depth 5 05 gt O 4 holes M4 thd 34 EDH0161En1030 07 11 16 Newport Experience Solutions BGM Series Goniometric Cradles QD Newport Experience Solutions 8 7 M BGM120 Interfaces M BGM120 Carriage Interface 100 wo G O lt G e9 g 1 Le 10 clearance holes or M4 screw Ln 8 holes M4 thd oo el Li Ft T m depth 6 010 6 holes M4 thd 2 holes M6 depth 8 lt 63 8 8 M BGM160 Interfaces M BGM160 Body Interface 2x4 holes 5 thd 1792 depth 8 4 holes M6 thd 156 x 92 depth 8 Y EN 9 9 6 Y 195 gt M BGM160 Carriage Interface 4 clearance holes for M4 captive screw 29 IX 1192 010 7 63 8 1
6. 14 9 3 Interface Plates Mounting erre t i 15 8 4 Assembly Patter ih sues 15 8 5 MOBGMDU Interfaces es 16 8 6 M BGM80 Interfaces 00 16 8 17 MABGM 120 Int naces ascia ere tian wha aaah 17 8 8 M BGM160 Interfaces cccsesscssssessccsccesecssscsscccerccesscsencsenccenessenes 17 8 9 M BGM200 5 ner rene nanii 18 90 Dimensions 17 1171s tente 19 10 0 Maintenance 1 sentes 20 10 1 Maintenaiice ci tr rere re oni e s 20 10 2 Repaltibg erret eei eire eere Is 20 10 3 Calibration tte etre eee HERR 20 Service FOr e P 21 Newport iv Experience Solutions BGM Series Goniometric Cradles EC Declaration of Conformity SY SSIS xt RTE ARRIR EIRIN RNN A E e ES BG Series CN L3 e E m3 EC Declaration of Conformity vvport OG following Annex ILIA Ne 2 of Directive 2006 42 EC on machinery Experience Solutions KO The manufacturer ONG MICRO CONTROLE Spectra Physics 1 rue Jules Guesde ZI Bois de BP189 52 F 91006 Evry FRANCE On EA 9 2 SA Hereby declares that the machinery Description BG Function High Precision Goniometers M
7. Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle con tact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts Newport 1 0 Experience Solutions BGM Series Goniometric Cradles 6 2 Connection On each goniometric cradle is represented a label which indicates its name its serial number and the motor it is equipped with ex UE31PP ENCODER 5SV MOTOR UE31PP M BGM80PE SIN Stepper Motor U 30VDC I 1A WARNING Always turn the controller s power OFF before connecting to a stage Goniometric cradles may be connected to the rear panel motor connectors labeled Motor any time prior to power up with the supplied cable assemblies WARNING With MM series controllers damage to goniometric cradle may
8. iioii en eee 4 3 3 Load Specification Definitions essssssseeeeeeneeeenene nnn 4 3 4 Load Characteristics and Stiffness 4 3 5 Goniometric Cradle Weights eese eene nennen 4 4 0 s 5 4 1 Stepper Drive VersiOns eese eene etn 5 4 2 DC Servo Drive Versions eterne nente teh ederet 6 D0 RU 7 5 1 Stepper Motor 1 7 5 2 Command Signals for Stepper Motors sse 7 5 3 DC Motor Characteristics opo e 7 54 Command Signals for DC Motors sse ii 5 5 Sens r POSIti n icc oie mienne area ed m e n deren ats 8 5 6 Feedback Signal Position eene nenne nnns 8 5 7 usa eno aa 9 60 Connection to Newport Controllers 10 6 1 Warnings on Controllers rro nr IPOD 10 6 2 5 E E E 11 6 3 Cables sesenta 11 10 Connection to Non Newport Controllers 13 QD Newport Experience Solutions iii EDH0161En1030 07 11 BGM Series Goniometric Cradles EDH0161En1030 07 11 8 0 Mot nling 14 8 1 Stage Mounting cc ccssesesessstccesscesecersccssccesscssecessccenecssecsencsenecsnesseees 14 8 2 Interfaces Disassembling oer eie
9. Carriage speed higher than specified speed Improper grounding 5 Connectors must be properly secured 5 When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads e Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior writ ten approval of Newport Corporation This manual has been provided for information only and product specifica tions are subject to change without notice Any changes will be reflected in future printings Newport ii Experience Solutions BGM Series Goniometric Cradles Table of Contents Eee Perses ii Declaration O COM Ormiy nene paga ida e v Definitions and Symbols p vi M armmnps Caution ederet ridere vi nc HOO En UO EBORE HDD Ee D OUO vii rir viii 1 0 Introductio iab doma Aio idet 1 2 0 3 Description 2 2 1 Design Details ener ere Eee ter eee re RH eee enint 2 3 0 Characteristics enne tnnt 3 2 1 Definitions 3 3 2 Mechanical 5pecificati ns
10. BGM120 to 200PE M BGMS50PE M BGM80PE Mini Step Drive Is used for stepper motors when 1 pulse emitted by electronic corre sponds to theoretical physical motion of a fraction of a full step of the motor For these goniometric cradles a mini step equals 1 10 of a full step Full Step Drive Is used for stepper motors when 1 pulse emitted by electronic corre sponds to theoretical physical motion of 1 full step of the motor Stepper Motor Performance Specifications Resolution Speed M BGM50PP and M BGM80PP 0 001 20 UE41PP M BGM120PP 0 001 20 UE62PP M BGM160PP and M BGM200PP 0 001 20 UE63PP M BGM50PE and M BGM80PE 0 001 2 UE31PP M BGM120PE to M BGM200PE 0 001 2 UE41PP Newport Experience Solutions 5 EDH0161En1030 07 11 BGM Series Goniometric Cradles 4 2 DC Servo Drive Versions The DC motor driven versions use two different motors depending on the size of the cradle e BGM50 and BGM80 These use low power DC servo motors enabling speeds to 2 5 sec e 120 BGM160 and BGM200 These use higher torque DC servo motors which allow for angular speeds up to 20 sec The motor also features a built in tachometer to provide superior speed stability M BGM120 to 2000 gt M BGM50CC M BGM80CC DC Motor Performance Specifications Resolution Speed Mot 9 otor um C sec M BGM50CC amp M BGM80CC 0 001 2 5 UE31CC M BGM120CC to M
11. BGM200CC 0 001 20 UE511CC 4 3 Manual Drive The BGM Series goniometric cradles are also available with manual drive MS These are offered with angular resolution of 0 001 and 2 rotation per revolution In addition to the vernier scale on the manual drive posi tion may be determined using the output from the incremental shaft encoder connector for the CV1000 encoder display is provided my BGMS0MS 88 80 5 Manual Performance Specifications Resolution Travel per Revolution C rev M BGMMS 0 001 2 QD Newport EDH0161En1030 07 11 6 Experience Solutions BGM Series Goniometric Cradles mn Motor 5 1 Stepper Motor Characteristics Motor Angle by Step Current Resistance Inductance Newport mH Utilization UE31PP 3 6 0 56 7 6 8 4 Full Step UE41PP 1 8 12 3 43 Full Step or Mini Step UE62PP 1 8 1 8 2 6 4 9 Mini Step UE63PP 1 8 2 9 1 16 2 0 Mini Step 5 2 Command Signals for Stepper Motors Command Signals Command Signals UE31PP UE41PP UE62PP UE63PP 1 2 3 4 1 2 3 4 Phase 1 Phase 1 eee Phase 2 Phase 3 Phase 3 Phase 4 4 4 Phase 4 Direction Displacement Direction Direction Displacement D
12. 129 106 5 90 5 BGM80 14 200 254 9 X 42 32 32 32 IW Me 25 BGM120 M BGM120 b 1 BGM120 1 4 20 25 4 15 255 12 1434 6 120 M6 _ 25 BGM160 1 4 20 25 4 21 a B a BU M BGM160 25 BGM160 M BGM160 8 BGM200 M BGM200 BGM200 14 00 254 49 L 146 5 129 5 192 143 4 M BGM50 TOP PATTERN M BGM200 M6 25 X 60 60 60 60 CY Newport Experience Solutions 19 EDH0161En1030 07 11 BGM Series Goniometric Cradles 10 0 Maintenance 10 1 10 2 10 3 EDH0161En1030 07 11 RECOMMENDATION It is recommended to contact our After Sales Service which will be able to define the appropriate maintenance for your application Maintenance The M BGM goniometric cradle requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and manipulated with precaution PRECAUTIONS The M BGM goniometric cradle must operate and be stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your goniometric cradle to our After Sales Service after every 2000 hours of use for lubrication If your M BGM goniometric cradle is mounted on a workstation and cannot be easily dismantled please contact our After Sales Service for further instructions Repairing CAUTION Never attempt to disassemble an element of the goniometric cradle that
13. 22 TE 0 V Encoder 0 V Encoder 0 V Encoder Connector r Connector Connector Connector QD Newport Experience Solutions Open collector type with a 5 6 V protective Zener diode End of Run or Mechanical Zero Max lin 16 mA V 5 6 V If the Mechanical Zero output is not used a 1 kQ 0 25 W resistor must be connected between pins 13 and 21 Encoder and Index Pulse are differential pair type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 13 EDH0161En1030 07 11 BGM Series Goniometric Cradles m Mounting EDH0161En1030 07 11 8 1 8 2 Stage Mounting WARNING Before to use a M BGM stage it is imperative to fix it directly on a rectified working surface from holes located on the mounting plate on another stage directly or with a mounting interface but in no case the stage has to remain without fastening It is equally necessary to fasten the device to move on the carriage directly removing the plate on the top of the stage CAUTION The working surface flatness directly influences stage accuracy and per formance Interfaces Disassembling Disassemble the top plate of the goniometric cradle fixed with 4 CHc M4 screws CY Newport 1 4 Ex
14. BGM Series Goniometric Cradles m Characteristics 3 1 QD Newport Experience Solutions Definitions Specifications of our products are established in reference to ISO 230 stan dard part II Determination of the position precision and repeatability of the machine tools with CNC This standard gives the definition of position uncertainty which depends on the 3 following quantities Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear error sources Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effect AII Newport motion electronics can compensate for linear accuracy errors by step encoder correction The relation between absolute accuracy and on axis accuracy is as follow Absolute Accuracy On Axis Accuracy Slope x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target posi tion when approached from opposite directions Minimum Incremental Motion Sensitivity Minimum motion that a goniometric cradle can achieve Our goniometric cradles and our kinematic chain are conceived in such a way that sensitivi ty is better than the resolution o
15. Index Pulse Index Pulse 1 1 a Ld 5 P 41 zs HK Travel Range Motion Direction End of Run and Mechanical Zero are TTL type 5 V 5 2 mA max Use of the Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source Use appropriate TTL type receivers Feedback Signal Position 1 2 3 4 e o T 9 Direction 4 o 96 16 880 Direction Direction Motion Direction EDH0161En1030 07 11 The incremental sensor operates following the photoelectric measurement principle with a disk including slides When the sensor shaft turns the sen sor generates square signals in quadrature sent to pins 19 20 23 and 24 of the 25 pin Sub D connector Newport 8 Experience Solutions BGM Series Goniometric Cradles Newport Stage Encoder Phase A Pin 19 Encoder Phase A 1 Pin 23 Encoder Phase B 4 Pin 20 Index Pulse Phase Encoder Phase i Pin 24 1 Pin 15 Index Pulse Phasel 5 Pin 25 1 Pin 21 0 ee Output Signals 5 V 45 Encoders amp Sensors Power Supply
16. Power 5V 21 Encoder Power 5 V 22 0 V Encoder 22 0 V Encoder 22 0 V Encoder 22 0 V Encoder 23 Encoder Phase A 23 Encoder Phase A 23 Encoder Phase A 23 Encoder Phase A 24 Encoder Phase B 24 Encoder Phase B 24 Encoder Phase B 24 Encoder Phase B 25 Index Pulse I 25 Index Pulse I 25 Index Pulse I 25 Index Pulse I QD Newport Experience Solutions EDH0161En1030 07 11 BGM Series Goniometric Cradles m Connection to Newport Controllers 6 1 EDH0161En1030 07 11 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operat ing the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances If the power cord or any attached cables are frayed or damaged in any way If the power plug is damaged in any way Ifthe unit is exposed to rain excessive moisture or liquids are spilled on the unit e If the unit has been dropped or the case is damaged If you suspect service or repair is required Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep allliquids away from the unit Do not expose the unit to excessive moisture gt 85 humidity
17. com Europe MICRO CONTROLE Spectra Physics S A S 1 rue Jules Guesde B t B ZI Bois de BP189 91006 Evry Cedex France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport fr com Service amp Returns Tel 33 0 2 38 40 51 55
18. has not been specified in this manual Disassembling a non specified element can cause a malfunction of the goniometric cradle If you observe a malfunction in your goniometric cradle please immediate ly contact us to make arrangements for a repair CAUTION All disassembly attempts or repair of goniometric cradle without autho rization will void your warranty Calibration CAUTION It is recommended to return your goniometric cradle to Newport once a year for a recalibration to its original specifications m Newport Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems Newport Experience Solutions 21 EDH0161En1030 07 11 Newport Experience Solutions Visit Newport Online at www newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail rma service newport
19. occur if the goniometric cradle is not the same type as shown on driver label located near the goniometric cradle interface connector Check that the option number specified on this label correspond to the number indicated in the driver module options table for your goniomet ric cradle WARNING Vacuum compatible goniometric cradles have to be configured if run ning with an ESP series controller 6 3 Cables All our M BGM goniometric cradles are delivered equipped with a 3 meter cable with 25 pin Sub D connectors so they can be directly connected to our controllers drivers of MM or ESP series Dimensions in inches millimeters Locking Knobs 0 41 EN 25 Pin Sub D 2 13 0 10 3 Connector 54 1 2 32 59 gt Disconnected 4 1 104 for a static cable 6 54 166 for a cable in motion with the stage WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable Newport Experience Solutions 1 1 EDH0161En1030 07 1 1 BGM Series Goniometric Cradles For applications where the standard 3 meter cable MMCABLE 3 included with your goniometric cradle is not adequate Newport offers longer length cables designed to ensure the integrity of your positioning application These cables are specially shielded and terminated with Newport s stan dard 25
20. pin sub D connectors They are available in 5 m MMCABLE 5 7 m MMCABLE 7 10 m MMCABLE 10 lengths WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk For cable lengths in excess of 3 meters we recommend the MMCABLE REG to ensure a high quality regulated 5 V supply to the goniometric cradles 25 Pin Sub D 28 25 Pin Sub D 241 Male 85 Female 54 c m lt 2 4 62 gt This regulator is available as an option Please note that for best efficiency this regulator should be attached to the stage to re adjust the 5 volts com ing from the controller through the long cable Newport EDH0161En1030 07 11 12 Experience Solutions BGM Series Goniometric Cradles El Connection to Non Newport Controllers WARNING Newport takes no responsibility for improper functioning or damage of a goniometric cradle when it is used with any non Newport controllers WARNING Newport guarantees the compliance of the goniometric cradles only if they are used with Newport cables and controllers Nevertheless the figure below indicates the recommended wiring when a M BGM goniometric cradle is used with non Newport controllers
21. 1 Y xad 4 holes M5 thd depth 6 17 EDH0161En1030 07 11 BGM Series Goniometric Cradles 8 9 M BGM200 Interfaces M BGM200 Body Interface 2 x 4 holes M6 thd 128 depth 9 4 holes M10 thd cA 220 x 110 depth 9 o lt 290 gt M BGM200 Carriage Interface 4 e i 4 clearance holes for M6 screw T e e te 4 holes 5 thd depth 8 156 j 92 s10 gt O 1163 1 128 Y 12 holes M6 thd depth 8 _ _ TT e o _ _ __ 2 E e Q These nested M BGM Series cradles can be aligned to provide 100 micrometer sphere of confusion about the point of rotation CY Newport 1 8 Experience Solutions EDH0161En1030 07 11 BGM Series Goniometric Cradles m Dimensions 4 HOLES D h E Z HOLES THD B C SPACING EXCEPT M BGM50
22. enter load capacity on bearings Cantilever distance in mm a Construction parameter ko Transversal stiffness My Maximum forward rotation torque Goniometric Cradles M BGM 50 80 120 160 200 Cz N 40 120 200 300 500 a mm 30 40 70 90 120 ka urad Nm 200 20 10 5 2 PE Nm 1 5 1 7 10 20 29 My Nm 1 5 1 7 6 16 17 CC Nm 1 5 1 7 9 10 10 3 5 Goniometric Cradle Weights Weights indicated into the below table are average values for goniometric cradles with a typical drive unit installed M BGM50 Ib kg 2 2 1 0 M BGM80 Ib kg 4 4 2 0 M BGM120 Ib kg 18 7 8 5 M BGM160 Ib kg 39 7 18 0 M BGM200 Ib kg 83 8 38 0 The weight variation between drive units is not very significant QD Newport EDH0161En1030 07 11 4 Experience Solutions BGM Series Goniometric Cradles m Drive 4 1 Stepper Drive Versions Stepper motor driven stages are offered in two variations e One mini step drive version PP with 1 10 step per encoder count enabling high angular speed motions up to 20 sec e One full step version PE with motor mounted step down gear allowing for angular speeds to 2 sec This version is primarily designed for applications requiring the direct positioning accuracy to be maintained to within the stage s mechanical resolution when power is switched off such as operation in a vacuum M BGM120 to 200PP M
23. eries stages are equipped with a knurled knob for a manual con trol when motor power is off All M BGM Series cradles feature 0 001 angular resolution and may be configured with manual drives DC motors or stepper motors with mini step or full step drive options and speeds to 20 sec Single row ball bear ings and precision ground tool steel races ensure smooth rotation with minimal wobble and eccentricity All M BGM stages are equipped with mechanical limit switches at 45 and a hardware origin allowing the stage to be returned to a reference home position For optimal performance we recommend the use of our ESP or MM series motion controllers The M BGM Series goniometric cradles are supplied with a 3 meter cable for connection to our motion controllers Design Details Base Material Stainless Bearings Ball bearings Drive Mechanism Ground worm gear Worm Gear Ratio M BGM50 to M BGM120 1 180 M BGM160 and M BGM200 1 60 Reduction Gear 1 10 on M BGM120PE to M BGM200PE 3 1 on M BGM160 and M BGM200 Feedback 2 000 pts rev rotary encoder with index pulse Limit Switches Mechanical at 45 Origin Optical Cable 3 m long cable included Vacuum Compatibility Vacuum compatible versions are available up to 105 Torr using full step motor PE D M BGMI60PE and M BGM200PE are equipped with 2 reduction gears Newport 2 Experience Solutions
24. ewport service facility to request cleaning and specification control every year QD Newport EDH0161En1030 07 11 viii Experience Solutions BGM Series Goniometric Cradles Goniometric Cradles BGM Series m Introduction This manual provides operating instructions for the goniometric cradle that you have purchased in the M BGM Series e M BGMPP MJBGMPEV6 MJBGMCC M BGMMS M BGMPE 5 REMARK Vacuum compatible goniometric cradles to 10 Torr In this case max speed and load capacity have to be divided by two M BGM Series goniometric cradles RECOMMENDATION We recommend you read carefully the chapter Connection to electron ics before using the M BGM goniometric cradle Newport Experience Solutions 1 EDH0161En1030 07 11 BGM Series Goniometric Cradles n Description 2 1 EDH0161En1030 07 11 M BGM Series goniometric cradles rotate about a transverse axis above the platform Compared to 360 rotation stages they offer maximum free access to the rotating part and allow construction of very compact multi axis rotation assemblies BGM cradles are designed so that orthogonal mounting of two adjacent size cradles e g M BGM50 and M BGM80 provides two perpendicular axes of rotation about the same point in space Mounting a rotation stage under the assembly adds a third orthogonal rota tion axis through the same point All M BGM S
25. f the encoder Resolution The smallest motion an encoder fixed to the goniometric cradle can mea sure Concentricity Displacement of the geometric center of a goniometric cradle from the rotation axis in the plane defined by bearings Wobble Tilt of rotation axis during rotation of a stage The testing of on axis accuracy repeatability and reversal error are made sys tematically with our test equipment in an air conditioned room 20 C Each goniometric cradle is tested with a precision optical encoder A linear cycle with 21 measures on the travel and 4 cycles in each direction gives a total of 164 points 3 EDH0161En1030 07 11 BGM Series Goniometric Cradles 3 2 Mechanical Specifications Resolution C 0 001 Unidirectional Repeatability 0 004 Reversal Value Hysteresis 0 02 Origin Repeatability 0 002 On Axis Accuracy C 0 05 Wobble prad 200 3 3 Load Specification Definitions Normal Load Capacity Cz Maximum load a goniometric cradle can move while maintaining specifica tions This value is given with speed and acceleration specified for each gonio metric cradle and with a load perpendicular to bearings Off Centered Load Q Maximum cantilever load a goniometric cradle can move Q lt Cz 1 D a D Cantilever distance a Construction parameter 3 4 Load Characteristics and Stiffness Q Off center load Q lt Cz 1 D a Cz Normal c
26. irection 9 Direction ee Direction 5 3 DC Motor Characteristics Motor Mechanical Power Nominal Voltage Armature Resistance Tachometer W V Q V Krpm UE31CC 2 53 24 57 UE511CC 110 75 5 1 7 31026 5 4 Command Signals for DC Motors Motor Motor Tachometer Motor Motor Tachometer Tachometer Displacement Direction Direction Displacement O Direction 9 9 0 Direction QD Newport Experience Solutions EDH0161En1030 07 11 BGM Series Goniometric Cradles 5 5 5 6 Encoder Phase A Encoder Phase A Encoder Phase B Encoder Phase B em In the above drawings Motor signal is referred to Motor signal Tacho Generator signal is referred to Tacho Generator signal When the stage moves in Direction the Motor voltage is higher than Motor voltage and Tacho Generator voltage is higher than Tacho Generator voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage Tacho Generator voltage is lower than Tacho Generator voltage Sensor Position Home Position Origin D at Center of Travel Range EOR Limit LS 4 EOR Limit NES VEN Mechanical 2 _ _ 5 Zero n
27. lamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations European Union CE Mark ATTENTION This stage is a Class A device In a residential environment this device can cause radioelectric interferences In this case suitable measurements must be taken by the user of this device Warnings and Cautions The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Situation has the potential to cause bodily harm or death CAUTION Situation has the potential to cause damage to property or equipment NOTE Additional information the user or operator should consider QD Newport EDH0161En1030 07 11 vi Experience Solutions BGM Series Goniometric Cradles Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its m
28. odels BGS50 80 CC PP M BGM120 160 200 CC PP PE PEV6 S DAC 2 SEN the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France o ENS M complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2004 108 EC relating to electro magnetic compatibility 26 was designed and built in accordance with the following harmonised standards NA NF EN 61326 1 2006 Electrical equipment for measurement control and V NS laboratory use EMC requirements Part 1 General requirements NF 55011 2007 Class NY was designed and built in accordance with the following other standards NF EN 61000 4 2 eth de NF EN 61000 4 3 NF EN 61000 4 4 5 61000 4 5 ONG NF EN 61000 4 6 e 4 TX 5 eS ORIGINAL DECLARATION X Done in Beaune La Rolande on 07 June 2011 Dominique DEVIDAL Quality Director DCI EN rev A ONG 52 ONG Newport Experience Solutions EDH0161En1030 07 11 BGM Series Goniometric Cradles Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur General Warning or Caution The exc
29. otor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an elect
30. perience Solutions BGM Series Goniometric Cradles Turn the stage upside down Disassemble the base plate fixed with 4 CHc screws on the body stage 8 3 Interface Plates Mounting Make steps of Interfaces Disassembling chapter in the opposite order 8 4 Assembly Pattern Stacking M BGM Series stages either together or with other Newport stage is easily accomplished Below are example schematics of the assembly pat terns used These interfaces are accessed by unscrewing and removing the upper and or lower plates of the stages see dimension drawing Newport Experience Solutions 15 EDH0161En1030 07 11 Goniometric Cradles 2 o BGM Series M BGM50 Interfaces M BGM50 Body Interface mm 6 4 8 holes M3 J 05 O y depth 5 lt 22 20 22 M BGM50 Carriage Interface 4 holes M3 thd 4 holes thd on ROR m 2 522 222 k 20 8 6 M BGM80 Interfaces M BGM80 Body Interface Y amp 7 34 2 7148 05 a lt 4 holes M4 thd 48 depth 5
31. ric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit Newport Stns vii EDHO161En1030 07 11 BGM Series Goniometric Cradles Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock Operating temperature 10 to 35 C Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point by using the manual knob as this may damage the stage mechanism CAUTION Contact your N
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