User Manual MP44E - Physik Instrumente
Contents
1. Nanotec teet 4H4009 L03 B Current per 0 8 A bipolar Phase resistance 3 3 ohm Torque 21 Nom Connector at stage sub D15 m Cable type C 815 38 Release 1 1 3 www pi ws Page 15 M 505 Linear Stages Operating Manual MP 44E Pin Assignments Connector type sub D15 m Pin Function 1 phase 1a 9 phase 1b 2 phase 2a 10 phase 2b 3 n c 11 n c 4 n c 12 n c 5 n c 13 n c 6 input 5 V supply from controller 14 output Limit signal positive active low 7 GND 15 output Reference signal 8 input Limit signal negative active low Limit and Position Reference Sensors All sensors used are magnetic field triggered Hall effect sensors usable with bipolar or CMOS circuitry M 505 stepper motor stages have active low limit switch outputs Sensor Specs Supply Voltage Range 4 5 to 24 Volts Supply Current 4 5 mA Sink Capability 25 mA Limit Sensor Layout for M 5xx Stages with Stepper Motors Dsub25 m connector at stage Limit signal logic Low active OK in range HIGH Limit Hit LOWY Release 1 1 3 www pi ws Page 162. 4 counts um Type DG Stages with Gearhead Drives Motor Type s t DC Motor type 2224R012SR Motor Power 4 2W Motor Voltage 0 to 12 V Encoder Types Ai initi edet IE2 512 rotary type Encoder 2048 counts motor revolution A Al B B Encoder transmission RS 422 Power supply via motor controllers Gearhead backlash free Release 1 1 3 www pi ws Page 6 2 3 M 505 Linear Stages Operating Manual MP 44E Gearhead Ratio 29 641975309 1 Design Resolution 0 01647262859 um count Translation Ratio 60 7067654328 counts um Recommended Motor Controllers M 505 xPD and xDG stages can be used with C 842 C 843 C 844 and Mercury C 860 C 862 controllers the M 505 xS2 with the C 600 and C 630 stepper motor controllers PWM Amplifiers The M 505 xPD stages with the ActiveDrive direct DC motor drive have the revolving spindle ball connected directly to the 17 Watt DC motor by a flexible coupling For maximum dynamic performance the DC servo motors are driven by high efficiency PWM power amplifiers integrated into the stages An externa
3. manual spindle qoCESS MOTOR cwi positive directian cow neguliwe Cui directian RN RP hh 8 8 b4 2 N I 8 8 PI negative limit S 5 positive limit sensors m m sensors Dwg M500LS HGL Position Sensor Specification Type tanda magnetic Hall effect sensors Power supply 5V GND supplied by the motor controller through the motor connector Voltage output TTL level Sink Source capability 48 mA sistens EUREN active high normal motor operation low limit switch reached high For stepper motor versions see section M 505 Stages with Stepper Motors 15 Release 1 1 3 www pi ws Page 8 4 2 4 3 M 505 Linear Stages Operating Manual MP 44E Position Reference Signal Sensors Position Reference Sensors are located approximately in the middle of the operating range and can be used to reference the absolute position of the stage within 0 5 um accuracy Always approach the reference sensor from the same side to reach the same position The difference in the reference points when approached from the positive side and from the negative side is about 0 2 mm to 0 4 mm The reference sensor in M 505 stages provides a static signal level which depends on the platform position If the platform is on the positive side the reference signal is 5 V while if the platform is on the negative sid
4. er d n d E Dei die 7 Position SENSOMS xen ic Dax bird Rx ea LEE Hx Xd ERR TEE CUR FER 8 4 1 ie cosa od tue 8 4 2 Position Reference Signal Sensors 9 4 3 Operating M 505 Stages eese 9 Motor Controller Setup esee 10 5 1 Using C 842 Motor Controllers with M 505 Stages 10 5 2 Using C 844 Motor Controllers with M 505 Stages 11 5 3 Using Mercury Motor Controllers with M 505 stages 11 Mechanical Handling 12 6 1 c tiens 12 6 2 Operating Environment eese 12 6 3 ted eem territi etm che 12 M 505 Dimensions 13 Pin Assignments ccreeiieio crece nc cce n cea 14 8 1 i BM ES 14 8 2 M505 pcm Mm 15 M 505 Stages with Stepper Motors 15 9 1 M 505 xS2 using 2 phase stepper 15 Copyright 2006 by Physik Instrumente PI GmbH amp Co KG Release 1 1 3 File M 505 User MP44E113 doc 378880 Bytes Release 1 1 3 WwwW pi ws Page 1 0 1 0 2 0 3 M 505 Linear Stages Operating Manual MP 44E
5. a flat plane and mounting objects onto the moving platform e 4 metric screws M4x30 w hex wrench purpose mounting two stages as an XY combination e Connecting cable part number C 815 38 e M 500 PS Power Supply for xPD versions e This MS 44E User Manual Specifications General Data Origin Repeatability better 1 um Max Load 100 kg Max push pull force 50 50 N Max lateral nenene 200 N Ballscrew 1mm Body Aluminum Specific Data for DC Motor Versions For stepper motor versions see section M 505 Stages with Stepper Motors 15 Type PD Stages with ActiveDrive DC Motor Motor Type DC Motor type 2342S024CR Motor POWT e bg beris 17 W Motor Voltage to x24 V Encoder type rotary encoder HEDM5500B Encoder 4000 counts motor revolution olgrials3 23 ce e itg ouibus A Al B B Transmission RS 422 Power supply external line power power supply order M 500 PS Design resolution 0 25 um count Translation Ratio
6. 1S2 M 505 2DG M 505 2PD M 505 2S2 M 505 4DG M 505 4PD M 505 4S2 M 505 6DG M 505 6PD M 505 6S2 Release 1 1 3 Linear Positioning Stage 25 mm DC Motor Gearhead Linear Positioning Stage 25 mm ActiveDrive DC Motor Linear Positioning Stage 25 mm 2 Phase Stepper Motor Linear Positioning Stage 50 mm DC Motor Gearhead Linear Positioning Stage 50 mm ActiveDrive DC Motor Linear Positioning Stage 50 mm 2 Phase Stepper Motor Linear Positioning Stage 100 mm DC Motor Gearhead Linear Positioning Stage 100 mm ActiveDrive DC Motor Linear Positioning Stage 100 mm 2 Phase Stepper Motor Linear Positioning Stage 150 mm DC Motor Gearhead Linear Positioning Stage 150 mm ActiveDrive DC Motor Linear Positioning Stage 150 mm 2 Phase Stepper Motor www pi ws Page 4 1 2 M 505 Linear Stages Technical Data Operating Manual MP 44E M 505 1PD M 505 1DG M 505 1S2 M 505 2PD M 505 2DG M 505 2S2 M 505 4PD M 505 4DG M 505 4S2 M 505 6PD M 505 6DG M 505 6S2 Units Notes Travel range 25 50 100 150 25 50 100 150 25 50 100 150 mm Design resolution 0 25 0 017 0 05 um A3 Min incremental motion 0 25 0 05 0 1 um 4 Unidirectional repeatability 0 25 0 1 0 1 um Bidirectional repeatability 1 1 1 um Accuracy per 25 mm 1 1 1 um Straightness 1 1 1 um Flatness 1 1 1 um Pitch 8y 50 50 50 urad Yaw 02 50 50 50 urad Max velocity 50 3 10 mm sec Max nor
7. Manufacturer Declarations Warranty Physik Instrumente PI warrants M 505 stages to be free from defects in material and workmanship for a period of 1 year from the date of shipment The warranty does not apply to defects resulting from misuse or any product modification without Pl s express written consent This warranty does not apply to problems arising from normal wear Safety Precautions Read This Before Operating M 505 Linear Stages e M 505 stages are powered by powerful electric motors and can accelerate to high speeds Be aware that automatic limit switch halt may not be supported by or activated at the motor control electronics Be aware that failure of the motor controller may drive the stage into a hard stop at high speeds When the stage is first connected to the motor controller be aware that the stage could start an undesired move To avoid damage or injury do not put anything in the gap between the moving platform and the motor cabin Never put your finger anywhere where the moving platform or any connected object could possibly trap it Declaration of Conformity The manufacturer Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany declares that the M 505 Linear Stages comply with the ISO IEC Guideline 22 and EN 45014 European Standards CE markings have been affixed to the device accordingly Release 1 1 3 www pi ws Page 2 M 505 Linear Stages Operating Manual MP 44E General De
8. Piezo Nano Positioning PI MP 44E User Manual M 505 Linear Positioning Stages Release 1 1 3 Date 2006 03 10 This document describes the following product s B M 505 xxx Linear Positioning Stages De 13 amd cM ee 4 E EL Physik Instrumente PI GmbH amp KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws M 505 Linear Stages Operating Manual MP 44E Table of Contents Manufacturer Declarations esee 2 0 1 Waranty eC 2 0 2 Safety Precaltiofis tate iet a et et 2 0 3 Declaration of Conformity ccccccseececscceeeeeteeeeeeeneeeeeeeeseenseeeneceene 2 General Design of M 505 Linear Stages 3 1 1 usmod m 4 1 2 Technical Det eor ducet eade 5 1 3 Shipment Contents esses eene 6 Specifications iiss R 6 2 1 iE 7 MB i e 6 2 2 Specific Data for DC Motor Versions 6 2 2 1 PD Stages with ActiveDrive DC Motor 6 2 2 2 DG Stages with Gearhead Drives 6 2 3 Recommended Motor Controllers 7 PWM
9. e the signal level is 0 V Most PI Motor Controllers offer the option of starting a search run for the reference point using the current reference sensor signal to determine the appropriate direction See the MS 52E command reference for the TARGET FIND REF AUTO command C 842 Motor Controllers offer only the FEP and FEN commands to start a search run for the reference signal If the stage is initially on the positive side the FEN find edge in negative direction command must be used whereas when the stage is in the negative side the FEP command must be used to start the search run in the right direction i e toward the reference point For stepper motor versions see section M 505 Stages with Stepper Motors p 15 Operating M 505 Stages Individual setting of motion control parameters is required for smooth and optimized movement Incorrect parameter setting may cause severe spindle vibration If this occurs set the motor off MF and modify the parameter settings Release 1 1 3 www pi ws Page 9 5 1 M 505 Linear Stages Operating Manual MP 44E Motor Controller Setup Using C 842 Motor Controllers with M 505 Stages WinMove and WinMoveNT are the standard operating programs for C 842 motor controllers being operated from Windows platforms WinMove allows configuration of the M 505 stages by a configuration file WinMove software automatically handles amplifier mode setting as a function of the stage model number sel
10. ected The amplifier mode can also be set by command PWM mode is enabled by the SOP command while analog mode is enabled by the SOH command 842 Parameter Settings for 505 Stages 842 Parameter 842 Parameter Settings for 505 Stages for M 505 Stages Stage Type M 505 xPD Parameter p term DP200 range 120 to 250 DP120 range 80 to 300 i term DI20 range 0 to 40 DI20 range 0 to 50 d term 00150 range 1000 to 300 DD150 range 0 to 400 i Limit DL2000 DL2000 vff term DFO range 0 to 2 000 DFO range 0 to 3 000 Acceleration 5 1200 range 50 to 2 000 SA400 range 20 to 1 000 Velocity V120000 range 1 to V180000 range 1 to 300 000 270 000 Release 1 1 3 www pi ws Page 10 M 505 Linear Stages Operating Manual MP 44E 5 2 Using C 844 Motor Controllers with M 505 Stages DCMove is the standard C 844 operating program This program uses a configuration file to define the motion control parameters First use the parameter menu to set these values PWM mode is enabled by the OUTP SIGN PWM command while analog mode is enabled by the OUTP SIGN DAC command C 844 Parameter Settings for M 505 Stages p i d terms PID 200 20 150 PID 120 20 150 range p 120 to 250 range p 80 to 300 range i O to 40 range i O to 50 range d 0 to 300 range d 0 to 400 i Limit LIM IERR 2000 LIM IERR 2000 vff term VFFO range 0 to 2 000 VFFO range 0 to 3 000 Accelerati
11. l line power power supply order number M 500 PS is provided to supply the built in amplifiers directly This architecture allows high torque and high velocities while loading the motor controller with control signals only The actual power is provided by the external supply Release 1 1 3 www pi ws Page 7 4 1 M 505 Linear Stages Operating Manual MP 44E Position Sensors Limit Switches M 505 stages are protected against running into the hard stop by two magnetic limit sensors Hall effect sensors with TTL drivers at each end of travel The inner side limit sensors 7 at the negative travel end and P1 at the positive travel end work with the controller s limit sense input lines The TTL output signal is active high The outer side limit sensors N2 at the negative and P2 at the positive end work locally opening a relay that cuts the motor current The second level limit switches provide for fail safe operation in case the controller fails to stop the motor when the inner side limit sensor is overrun If the second level limit switch is reached the stage can not be operated by the controller until the platform is pushed back manually Disconnect the motor cable or set the motor into MOTOR OFF state before moving the platform back into the current allowed area via the manual spindle access Moving Directions negative positive negative side positive side
12. mal load capacity 100 100 100 kg B1 Max push pull force 50 50 50 50 50 50 N B2 Max lateral force 200 200 200 N Encoder resolution 4000 2048 cts rev Motor resolution 20 000 stps rev Ballscrew pitch 1 1 1 mm rev Gear ratio 28 12 1 29 6 1 Nominal motor power 17 3 Motor voltage range 0 to 24 0 to 12 24 V Weight 1 5 1 8 2 5 3 2 1 5 1 8 2 5 3 2 1 5 1 8 2 5 3 2 kg Body material Al Al Al controller Recommended motor C 842 C 862 C 844 C 843 C 842 C 862 C 844 C 600 C 630 C 843 Notes ActiveDrive integrated PWM servo amplifier 24 V power supply included 2 phase stepper 24 V chopper voltage max 0 8 A phase 20 000 microsteps with C 600 C 630 controllers A3 Design Resolution Theoretical minimum movement that can be made based on characteristics of mechanical drive components selected A4 Minimum incremental motion The minimum motion that can be repeatably executed for a given input sometimes called the practical or operational resolution B1 Max Normal Load Centered vertical load on horizontal stage B2 Max Push Pull Active and passive force limit in operating direction at center of stage Release 1 1 3 www pi ws Page 5 1 3 2 1 2 2 2 2 1 2 2 2 M 505 Linear Stages Operating Manual MP 44E Shipment Contents M 505 stages are delivered with e 4 metric screws M6x30 w hex wrench purpose mounting the stage onto
13. on 3000000 range ACC 1000000 range 100 000 to 5 000 000 500000 to 2500000 Velocity MVEL 120000 range 1 to MVEL 180000 range 1 to 300 000 270 000 Using Mercury Motor Controllers with M 505 stages The Windows operating program for the Mercury controller allows choice of M 505 stages as a start option for operation Mercury always has the PWM mode enabled without any extra command Mercu ry Parameter Settings for M 505 Stages p term DP200 range 120 to 250 DP120 range 80 to 300 i term DI20 range 0 to 40 DI20 range 0 to 50 d term 00150 range 0 to 300 00150 range 0 to 400 i Limit DL2000 DL2000 Acceleration SA3000000 range 100 000 SA1000000 range 500 000 to 5 000 000 to 2 500 000 Velocity V120000 range 1 to V180000 range 1 to 300 000 270 000 Release 1 1 3 WwwW pi ws Page 11 6 1 6 2 6 3 M 505 Linear Stages Operating Manual MP 44E Mechanical Handling Mounting M 505 stages can be mounted in any orientation horizontally or vertically To achieve the specified guiding accuracy the stages must be mounted on a flat surface to avoid torsion of the basic profile Operating Environment M 505 stages should be operated in clean environments Although the bearings and ballscrew are covered to protect against dust and liquids falling vertically the aluminum case is not hermetically sealed Make sure that metal dust and liquid spray do not en
14. sign of M 505 Linear Stages M 505 linear stages are low profile high accuracy linear translation stages for industrial use and laboratory applications Used in the fields of semiconductor quality control metrology test equipment disk drive test setups and general R amp D tasks the M 505 stages are designed to meet demanding positioning requirements The stages combine a functional flat design to allow multi axis combinations and feature a precision machined base from high density stress relieved aluminum for exceptional stability and minimum weight recirculating ballscrews more accurate than rolled ballscrews and preloaded nuts provide low friction backlash free positioning Full travel accuracy is 1 um and the ActiveDrive versions have a unidirectional repeatability or 0 25 um High precision linear guiding rails with recirculating ball bearings guarantee 1 um 100 mm straightness and flatness All versions are equipped with non contact Hall effect direction sensing origin sensors and limit switches M 505 Stages Dwg M505 small TIF Release 1 1 3 www pi ws Page 3 1 1 M 505 Linear Stages Operating Manual MP 44E Model Survey M 505 stages are available with travel ranges of 25 50 100 and 150 mm Depending on the application integrated drives using DC motor gearhead combinations ActiveDrive DC motor or 2 phase stepper motors are offered M 505 1DG M 505 1PD M 505
15. ter the case via the gap between the cover and the aluminum body Maintenance When operated in a clean environment no maintenance is required If the stages are operated in extremely dusty environments we recommend cleaning and greasing the ballscrew and linear bearings from time to time The time interval depends of the degree of contamination and can vary from 100 to 800 operating hours Recommended lubricant for ballscrews KLUBER Staburags Type NBU 8EP or Beacom 325 Release 1 1 3 www pi ws Page 12 Operating Manual MP 44E M 505 Linear Stages imensions M 505 D 7 001 ep er er 196 9 0 ev tr Se9L biz XXP GOGN 98 981 ost tor ose xxzsoc W 98 92 ger po zo I2 v 1 Y zi 901 Yo i gt speeJui pejeqejun 801 decimal places delimited by commas in drawings Page 13 www pi ws Release 1 1 3 8 1 M 505 Linear Stages Operating Manual MP 44E Pin Assignments M 505 stages DC motor versions are equipped with male DB15 sockets for connecting the motor controller and one 3 pin round connector for the power supply For stepper motor versions see sec
16. tion M 505 Stages with Stepper Motors p 15 M 505 xPD J2 SIGNALS J1 POWER Connector J1 Power Suppl Type 3 pin round socket Reference No Switchcraft Tini Q G PIN Signal 1 GND 2 Voltage input 3 n c Connector J2 Signals Controller connection Type 15 pin Sub D connector Reference No AMP 9 215594 1 Pin Signal 1 Control input for optional motor brake TTL 9 n c 2 n c 10 PGND 3 MAGN 11 SIGN 4 5 V input 12 NLIMIT Limit signal of negative side active high 5 PLIMIT Limit signal of positive side active high 13 REFS position origin signal 6 GND Limit 14 A 7 A inverted 15 B 8 B inverted Release 1 1 3 WwwW pi ws Page 14 8 2 9 1 M 505 Linear Stages Operating Manual MP 44E M 505 xDG J2 SIGNALS 3 6 ete uk de 5 Connector J2 power and signal Type 15 pin sub D connector Reference No AMP 9 215594 1 Pin Signal 1 9 Motor 2 Motor 10 Power GND 3 not used 11 not used 4 5 V input 12 negative limit Limit signal for negative side active high 5 positive limit Limit signal for positive side active high 13 REFS position origin signal 6 GND Limit 14 7 15 8 505 Stages with Stepper Motors M 505 xS2 using 2 phase stepper motors The 2 phase stepper motors perform 20 000 steps per revolution in microstepping mode using the C 600 or C 630 stepper motor controllers Motor Manufacturer
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