Type 647B
Contents
1. MGC 647B V2 2 CH1 CH2 CH3 CHA ACT FLOW 0 000 1 750 1 400 0 000 UNIT SCC SCC SLM SLM MODE INDEP INDEP INDEP SLAVE INDEX 1 STATUS OFF ON O O 00 ERRORS FLOW ON INPUT DIRECT Figure 16 The Mode Selection defines the source of setpoint for each MFC channel Possible modes are INDEP independent SLAVE dependent to the actual flow of another channel EXTERN external source for setpoint PCS external controller PID built in PID controller TEST test for maintenance and installation 3 7 3 1 Independent Mode In the independent mode a MFC is driven by the entered setpoint which is constant 3 7 3 2 Slave Mode In the Master Slave configuration the ratio between the setpoints of the slaves and the setpoint of the master is kept at the selected ratio of gas composition If the setpoint of the master is changed the 647B also changes the setpoints for the slaves according to this ratio Additionally in this mode the master channel governs the gas flows of the slave channels l e the setpoints for the slave channels are calculated from the ACTUAL FLOW of the master channel according to the desired composition ratio and transmitted to the controllers instead of the setpoints displayed on the screen If for instance the gas flow of the master decreases because of a fault in the process the gas flows of the slaves are also brought down as can be seen from the ACT FLOW display If2. The installation of the device complies th the national derectives and standards Cleaning of the device must performed if it is desconnected from power supply and if the cleaning is performed dry Warning The device may be opened by MKS service personel only If the device is open danger for life by high voltage may occur 1 8 Installation The device must be used in a dry and heated room see ambient temperature The device produces heat due to the power consumption In order to avoid overheating the opening of the fan and all other openings in the case must not be closed Air must circulate through this openings without any blocking Attention ud The correct setting of the power voltage setting must be checked before y power is applied to the device Follow the steps below For installation of the device Hook the device to the power plug If you use a transformer it must be able to supply 300 Watt Hook the instruments to the device according to the pinout of the connectors or use the appropirate cables Switch the device on and perform the setup in the menues INSTRUMENT SETUP and SYSTEM SETUP If the digital interface is used RS232 IEEE the setup in the SYSTEM SETUP menu is of special importance 647B f you have problems booting the system you should read the chapter Reset of System and Applications of the 647B 1 9 Symbols at the case The device shows some symbols which are
3. MGC 647B V2 2 ERROR LISTING CHANNELS RIP LOW LIMIT 12 RIP HIGH LIMIT 2 NPUT OVERFLOW NPUT UNDERFLOW UTPUT OVERFLOW UTPUT UNDERFLOW OOHHHH LIST MODE HISTORY 03 ERRORS FLOW ON INPUT DIRECT Figure 11 Error messages TRIP LOW LIMIT The actual flow is lower than the low limit see also TRIP LIMITS menu page 22 TRIP HIGH LIMIT The actual flow is higher than the high limit see also TRIP LIMITS menu page 22 INPUT OVERFLOW INPUT UNDERFLOW The input signal of the displayed channel is higher than 10V or lower than 10V OUTPUT OVERFLOW OUTPUT UNDERFLOW The output signal is higher than 10 V or lower than 10V Since the calculated value cannot be transmitted to the controller this can disturb the regulation behavior of closed loops Two display modes are possible in ERROR LISTING The HISTORY mode stores all errors having occured until leaving the error listing In the ACTUAL mode only actual valid errors are displayed 15 647B 3 6 2 The SIGNALS menu MGC 647B V2 2 OUTPUT INPUT EXTERN CH1 00250 0250 0250 CH2 001746 01746 01746 CH3 005002 05002 05002 CHA 00500 0500 0500 CH5 00500 0500 0500 CH6 00500 0500 0500 CH7 00500 0500 0500 CH8 00500 0500 0500 PRES 00250 0015 PCS 0250 SIGNAL PROCESSING RUNNING 00 ERRORS FLOW ON INPUT DIRECT Figure 12 Attention When stoppin
4. 29 647B 3 9 Pressure Setup MGC 647B V2 2 PRESSURE 0 0000 RANGE FS 1 0000 Torr ZERO VALUE 0 001 ZERO ADJUST EXEC CONTROLLER STD GAIN 01 00 INTEG ACT s 02 00 LEAD s 00 30 00 ERRORS FLOW OFF INPUT DIRECT Figure 24 The 647B supports several pressure ranges listed below 0000 mTorr 10 000 mTorr 100 00 mTorr 1000 0 mTorr 4 1 0000 Torr 10 000 Torr 100 00 Torr 1000 0 Torr 1 0000 KTorr 10 000 KTorr 100 00 KTorr 1 0000 uBar 10 000 uBar 100 00 uBar 1000 0 uBar 1 0000 mBar 10 000 mBar 100 00 mBar 1000 0 mBar 1 0000 Bar 10 000 Bar 100 00 Bar 1 0000 Pa 10 000 Pa 100 00 Pa 1 0000 kPa 10 000 kPa 100 00 kPa 1000 0 kPa The zero adjust works similar to that of an MFC channel see chapter Zero Adjust page 20 Different external pressure controllers such as 250 152 153 652 or 146 type may be used The setup must show the applicated controller type 652 is valid also for 651 controller For the parameters of the PID controller see chapter Pressure Control page 13 30 647B 3 10 Information about the System MGC 647B V2 2 MKS Instruments Nov 02 1992 IC86 00 ERRORS FLOW ON INPUT DIRECT Figure 25 This menu gives information about the device such as Company Software release code internal code If you call MKS for support in case of problems please be prepared to give this informat
5. DIN 1871 18 DIRECT 9 ERROR LISTING 15 EXTENDED DISPLAY 12 EXTERN 19 External Mode 20 First Start Reset 10 FLOW OFF 8 FLOW ON 8 framing error 29 gain 14 Gas Composition 23 GAS COMPOSITION 11 Gas correction factor 44 Gas Correction Factors 18 Gas Correction Table 44 GAS MENU 11 GAS ON 12 GCF 18 handshake 27 hardware handshake 27 Hardware Reset 10 helium 18 HISTORY mode 15 HOST MODE 29 hydrogen 18 IEEE 488 24 48 independent mode 19 INPUT OVERFLOW 15 INPUT UNDERFLOW 15 integral 14 Interface Connections 27 interface status 25 lead 14 LED green 12 LED red 12 LIMIT 22 listener 24 local lockout LLO 25 LOCKED 9 MAIN MENU 10 main valve 8 Master Slave 19 MEMORY 9 MFC range 12 OUTPUT OVERFLOW 15 OUTPUT UNDERFLOW 15 overrun error 29 parity 27 parity error 29 PCS 20 PID 19 PID Controller 13 Pin Assignment 40 POLLING mode 25 Power Up Reset 10 PRESSURE CONTROL 13 PRESSURE CONTROL mode 20 QUIET mode 25 Range Selection 17 Relay Option 22 remote local 24 REPEAT mode 25 Reset to Default 10 647B rise time 13 RS232 26 RS232 Line Status 29 RTS CTS 27 Safety information 5 Setpoints 12 SIGNALS menu 16 SLAVE 19 SLEEP 22 software handshake 27 software release 31 step response 14 stop bits 27 talker 24 49 TEST 19 test signal 21 TOTAL FLOW 11 TRIP HIGH LIMIT 15 Trip Limit 22 TRIP LOW LIMIT 15 Trouble Shooting 39 Truth Table 23 USER 18 USER DISPLAY men
6. Syntax error Only one character has been sent instead of the expected 2 byte command 3 Invalid expression The command parameter does not have decimal form or invalid characters were found within the parameter e g 100 3 the decimal point is an invalid character s i D Q 36 647B 4 Invalid value The transmitted parameter is outside the parameter range e g 1200 is outside the range of a set point 5 Autozero error There was a trial to set the zero offset of an active channel Before setting the zero offset either the channel OF or the gas OF 0 has to be switched off lt cr gt carriage return 0D hex for termination lt nl gt new line 0A hex 37 647B 5 Application of the 647B 5 1 Mass Flow Controllers The mass flow controllers must have a linear DC voltage output of 0 5 V The input impedance must not be lower than 1 MOhms Some mass flow controllers of other manufacturers can be damaged by a constant set point lt 0 V Other possible symptoms are undesired oscillations when the setpoint is varied or disturbances of the regulation loop To operate mass flow controllers it is important that the allowed maximum of input signals are not exceeded The mass flow controllers must have a linear DC voltage input and output of 0 5 V MKS mass flow controllers types 0258A B C 0358B C 179A can be operated with the connector cables for MKS mass flow controllers ty
7. relay 2 of channel 1 Figure 28 41 647B 6 4 VIDEO connector Sub D female 9 pol GND T 6 intensity GND 2 7 video signal Exe 3 8 H Sync 4 9 V Sync en 5 Figure 29 6 5 MFC connector CH1 to CH8 Sub D female 15 pol T chassis 9 flow signal 2 10 flow feedback valve close 3 11 signal GND valve open 4 12 signal GND PGND 5 13 15V 6 14 15V d 15 chassis setpoint output 8 for use with cable type CB147 1 Figure 30 42 647B 6 6 ACCESS connector Sub D female 25 pol reserved valve open 1 valve close 1 flow signal 1 valve open 2 valve close 2 flow signal 2 valve open 3 valve close 3 flow signal 3 valve open 4 valve close 4 flow signal 4 6 7 PRESSURE connector Sub D female 9 pol pressure signal pressure setpoint 15V 15V PCS 1 14 2 15 3 16 4 17 5 18 6 19 7 20 8 21 9 22 10 23 11 24 12 25 13 Figure 31 1 6 2 a 3 8 4 9 5 Figure 32 43 chassis external setpoint 1 external setpoint 2 external setpoint 3 external setpoint 4 15V 15V PGND PGND AGND chassis PGND remote zero range switch AGND 647B 7 Gas Correction Table Conversion factors are related to
8. Cp DENSITY CONVERSION cal g C g l 0 C FACTOR Hydrogen Chloride 0 1912 Hydrogen Fluoride 0 3479 Isobutylene 0 3701 Krypton 0 0593 Methane 0 5328 Methyl Fluoride 0 3221 Molybdenum Hexafluoride 0 1373 Neon 0 246 Nitric Oxide 0 2328 Nitrogen 0 2485 Nitrogen Dioxide 0 1933 Nitrogen Trifluoride 0 1797 Nitrous Oxide 0 2088 Octafluorocyclobutane 0 1866 Freon C318 Oxygen 0 2193 Pentane 0 398 Perfluoropropane 0 194 Phosgene 0 1394 Phosphine 3 0 2374 Propane 0 3885 Propylene 3 0 3541 Silane i 0 3189 Silicon Tetrachloride 0 1270 Silicon Tetrafluoride i 0 1691 Sulfur Dioxide 0 1488 Table continued on next page 46 647B Sulfur Hexafluoride Trichlorofluoromethane Freon 11 Trichlorosilane 1 1 2 Trichloro 1 2 2 Trifluoroethane Freon 113 Tungsten Hexafluoride Xenon Empirically defined NOTE defined as 09C SYMBOL SF CCLF SiHCI CCLFCCIF or C CLF SPECIFIC HEAT Cp DENSITY g l o9c cal g C 0 1592 0 1357 0 0810 0 0378 CONVERSION FACTOR 2 Consult MKS Instruments Inc for special applications Note This table may contain more or less gases than that of the unit Figure 33 47 Standard Pressure is defined as 760 mmHg 1013 25 mbar Standard Temperature is 647B INDEX Actual gas flow 12 ACTUAL mode 15 ASCII format 32 BAND 22 baudrate 27 B MODE 31 C MODE 31 Commands 33 dead time 13 device clear 24
9. calibration in nitrogen or air SYMBOL SPECIFIC HEAT Cp DENSITY CONVERSION cal g C g l 0 C FACTOR Acetylene 0 383 Air 0 240 Ammonia 0 492 Argon 0 1244 Arsine sH 0 1167 Boron Trichloride 0 1279 Bromine 0 0539 Carbon Dioxide 0 2016 Carbon Monoxide 0 2488 Carbon Tetrachloride 0 1655 Carbon Tetraflouride 0 1654 Freon 14 Chlorine Chlorodifluoromethane Freon 22 Chloropentafluoroethane Freon 115 Chlorotrifluoromethane Freon 13 Cyanogen 0 2613 2 322 Deuterium 1 722 0 1799 Diborane Dibromodifluoromethane CBr F Dichlorodifluoromethane CCLF Freon 12 Dichlorofluoromethane CHCLF Freon 21 Dichloromethysilane CH SiCl 0 1882 Table continued on next page 44 647B SYMBOL SPECIFIC HEAT Cp DENSITY CONVERSION cal g C g l E 0 C FACTOR Dichlorosilane 1 2 Dichlorotetrafluoroethane Freon 114 1 1 Difluoroethylene Freon 1132A 2 2 Dimethylpropane 0 3914 Ethane 0 4097 Fluorine 0 1873 Fluoroform 3 0 176 Freon 23 Freon 11 0 1357 Freon 12 0 1432 Freon 13 0 153 Freon 13 B1 0 1113 Freon 14 0 1654 Freon 21 0 140 Freon 22 0 1544 Freon 23 0 176 Freon 113 0 161 Freon 114 0 160 Freon 115 0 164 Freon 116 0 1843 Freon C318 0 1866 Freon 1132A 0 224 Helium 1 241 Hexafluoroethane 0 1843 Freon 116 Hydrogen 3 419 Hydrogen Bromide 0 0861 Table continued on next page 45 647B SYMBOL SPECIFIC HEAT
10. might be rejected 3 7 3 3 External Mode This mode enables external control of the MFCs through the auxiliary connector The MFC s setpoint is caculated as the product of setpoint in menu EXTENDED MENU and the signal at the auxiliary input E g Setpoint of MFC setpoint in EXTENDED MENU auxiliary input 5 V 3 7 3 4 PCS Mode In the PRESSURE CONTROL mode PCS the 647B serves as the regulating unit for a pressure controller e g type 250 All gas flow channels which are configured in the PCS mode are regulated through the pressure control signal PCS according to the ratio of their set points 20 647B 3 7 3 5 PID Mode In this mode MFCs are driven by a PID algorithm see also menu PRESSURE CONTROL This mode is only available with the PID option 3 7 3 6 Test Mode In this mode the 647B generates a test signal which may be useful for installation procedures The test signal is a saw tooth beetween zero and 100 with a period of 4 sec 3 7 4 Zero Adjustment MGC 647B V2 2 CH1 CH2 CH3 CHA ACT FLOW 0 000 1 750 1 400 0 000 UNIT SCCM SCCM SLM SL ZERO VALUE 0 005 004 0 002 002 ZERO ADJUST EXEC EXEC EXEC EXEC STATUS OFF ON ON ON 00 ERRORS FLOW ON INPUT DIRECT Figure 17 To trigger the Auto Zero function the status needs to be changed from EXEC executable to ACT active through the cursor keys The status DONE or FAIL displa
11. 00 Fax 44 161 929 5511
12. 000 SCFM 11 5 000 SLM 31 5 000 SCFM 12 10 00 SLM 32 10 00 SCFM 13 20 00 SLM 33 20 00 SCF 14 50 00 SLM 34 50 00 SCFM 15 100 0 SLM 35 100 0 SCF 16 200 0 SLM 36 200 0 SCFM 17 400 0 SLM 37 500 0 SCF 18 500 0 SLM 38 30 00 SLM 19 1 000 SCMM 39 300 0 SLM RA c R check for range result rr GC c fff enter gas correction factor c 1 8 channel f 10 180 factor in percent GC c R check for gas correction factor result fffff 33 647B MO c m i pedo ll FOWNFOF MO c R AZ c 500 E5 500 XX ll HL c xxxx x 0 1100 C XXXX x 0 1100 CR TM c m 3330 IM NK ok TM c R GP C S XXXX Quom x9 S 1 9 x 0 1100 GPcsR PZ x 500 500 x ES CT R PU uu u 0 28 enter mode channel mode independent mode slave mode extern mode PCS mode test modeindex reference to master only if m equal 1 check for mode result m i zero adjust MFC result xxxxx channel offset value in mV error occured enter high limit channel high limit in 0 1 percent of full scale check for high limit result xxxxx enter low limit channel low limit in 0 1 percent of full scale check for low limit result xxxxx enter mode for trip limits channel mode SLEEP mode LIMIT mode BAND check for trip limit mode result m enter setpoint channel gas set 1 to 5 set
13. 1 4 SLM GAS MENU x 00 ERRORS FLOW ON INPUT DIRECT Figure 6 The USER DISPLAY menu allows monitoring the system during operation It displays all gas flows of the connected Mass Flow Controllers All gas flow values are displayed in a 4 digit format without limiting the resolution Additionally the physical unit of the gas flow is shown below The sum of all gas flow values TOTAL FLOW is displayed additionally The unit of the total flow can be selected through the keyboard The user can select one out of five predefined composition ratios see also GAS COMPOSITION menu through the GAS MENU parameter The stored composition ratios are labled with numbers 1 to 5 X means that none of the stored ratios is activated In this case the setpoints for the mass flow controllers are the ones defined in EXTENDED DISPLAY The displayed value of TOTAL FLOW is the sum of all single gas flows Because flow units of different decades e g SCCM and SLM are added it might come to discrepancies between the two displays which are due to rounding errors Step through the flow units of the TOTAL FLOW in order to optimize TOTAL FLOW display Since negative flow values are not added to TOTAL FLOW channels wich are turned off can not cause errors 11 647B 3 3 The EXTENDED DISPLAY menu MGC 647B V2 2 CH1 CH2 CH3 CHA ACT FLOW 0 000 1 750 1 400 0 000 SETPOINT 4 500 1 450 1 400 0 728 UNIT S
14. CC SCCM SLM SLM RANGE FS 5 000 5 000 1 4000 1 450 GAS USER AIR CO He MODE INDEP INDEP INDEP SLAVE STATUS OFF ON ON ON PRESSURE 0000 0 mbar 00 ERRORS FLOW ON INPUT DIRECT Figure 7 The EXTENDED DISPLAY menu allows controlling the system before and during operation It contains the most important information needed to control the system Here the setpoints of all channels can be set and changed The setpoints are selected by using the cursor keys The input is done either numerically by typing in the values or by scrolling using the cursor keys If MEMORY is displayed in the INPUT field of the status line a predefined gas menu has been selected in the previosly described USER DISPLAY menu In this case the set points of the channels cannot be changed Due to instabilities at the lower end of MFC range the lowest setpoint is limited to 1 Setpoints less than that are displayed as zero and an output value of 0 5 V is transferred to the MFC The displayed full scale ranges RANGE FS are the ranges of each controller scaled with the gas correction factors E g channel 4 controls a MFC with a range of 1 slm calibrated in nitrogen The regulated gas is helium and has a correction factor of 1 450 with respect to the calibration gas nitrogen i e the actual full scale range is RANGE FS 1 1 45 1 45 slm The actual gas flow of each channel is displayed in the line ACT FLOW Here the correction factors and ranges of the selected gase
15. DIRECT Figure 20 Up to 5 different gas compositions SET 1 to SET 5 can be defined here which can be selected in the menu USER DISPLAY through the item GAS MENU 23 647B 3 8 System Setup 3 8 1 IEEE 488 Setup MGC 647B v2 2 ADRESS 13 RESPONSE MODE REPEAT INTERFACE STATUS LCD VIEW ANGLE 023 LCD ON TIME min 010 HOST MODE C MODE RESET EXEC 00 ERRORS FLOW OFF INPUT DIRECT Figure 21 This menu is available instead of RS232 setup if the IEEE option is installed only The IEEE interface is designed to meet the functional requirements for talker and listener functional requirements as specified by IEEE Standard 488 1978 Functional capabilities SH1 source handshake AH1 acceptor handshake L3 listener T5 talker RL remote local DCi device clear The implemented commands are the same as in a RS232 device 3 8 1 1 IEEE Adress The address setup specifies the IEEE address of the device Possible adresses range from 0 to 30 An address value may only be used once in a bus system 24 647B 3 8 1 2 Response Modes There are three modes that specify the 647B s reaction to a data request of the bus controller QUIET POLLING REPEAT In the QUIET mode the 647B only responds to a command if data are pending There is no response if errors occur or if a command results in no data a
16. FF ON ON ON 00 ERRORS FLOW ON INPUT DIRECT Figure 18 The supervision becomes active 1 second after the selection of a mode Two relays are driven by each channel if the Relay Option is used The logic of the relays depends on the actual Supervision Mode SLEEP mode In this mode relay 1 represents the status of the channels s valve Relay 2 is idle BAND mode In this mode relay 1 also represents the status of the channel s valve Relay 2 however will become active if the actual flow is outside of the defined band LIMIT mode If the actual flow is below low limit relay 1 will become active and if it is above high limit relay 2 will become active 22 647B Truth Table Mode Relay Valve Low limit High limit Relay status SLEEP 1 OFF X X inactive SLEEP 1 ON X X active SLEEP 2 X X X inactive BAND 1 OFF X X inactive BAND 1 ON X X active BAND 2 X not exceeded not exceeded inactive BAND 2 X X exceeded active BAND 2 X exceeded X active LIMIT 1 X not exceeded X inactive LIMIT 1 X exceeded X active LIMIT 2 X X not exceeded inactive LIMIT 2 X X exceeded active X any condition Figure 19 3 7 6 Gas Composition MGC 647B V2 2 CH1 CH2 CH3 CH4 SET 1 1 000 1 700 0 000 0 000 SET 2 1 010 TS 0 000 0 000 SET 3 1 020 1 800 0 000 0 000 SET 4 1 040 1 850 0 000 0 000 SET 5 0 000 0 000 0 000 0 000 UNIT SCCM SCCM SLM SLM STATUS OFF ON ON ON 00 ERRORS FLOW ON INPUT
17. Multi Channel Flow Ratio Pressure Controller Type 647B Instruction Manual MKS Instruments Ausgabe 11 99 Deutschland GmbH Rev 11 96 Copyright 1999 by MKS Instrument Deutschland GmbH Alle Rechte vorbehalten Es ist nicht gestattet Teile des vorliegenden Dokuments zu vervielf ltigen oder in irgendeiner Form bzw mit irgendwelchen elektronischen oder mechanischen Mitteln einschlie lich des Fotokopierens und der Aufzeichnung bzw mit Hilfe von Speicher oder Informationswiedergewinnungs systemen zu bertragen sofern keine ausdr ckliche schriftliche Genehmigung seitens der MKS Instruments Deutschland GmbH vorliegt Gedruckt in der Bundesrepublik Deutschland Cajon und VCR sind eingetragene Warenzeichen der Cajon Company Macedonia Ohio Kalrez und Viton sind eingetragene Warenzeichen der E I DuPont de Nemours und Co Inc Wilmington Delaware Neoprene ist eingetragenes Warenzeichen der Vibration Mountings amp Controls Inc Bloomingdale New Jersey Swagelok ist eingetragenes Warenzeichen der Crawford Fitting Company Solon Ohio 647B Contents Contents 1 Gener ls 2 dnd a ach Mel de ass 1 1 1The Multi Gas Controller MGC Type 647B sse 1 EAO TOTANA AAE ee er o 1 1 3 OPINAS Aa 1 je Enn 1 1 5 Technical Specifications iii tet i b edt ED en 2 TG RIDE M 3 161 condat DEI 3 16 2 Rear Panel ice es 4 1 7 Safety Informa
18. S232 installation easier a status display is inserted in the SYSTEM SETUP menu The so called RS232 STATUS display three events on the RS232 line OE overrun error bytes were lost Bytes were lost on the input line of 647B This is typical if the handshake protocol does not work Check for the correct connection on the line and for fitting handshake protocols PE parity error the parity check failed A byte was transferred with a parity error This is typical for noise on the line Check the ground line FE framing error recognition of stopbit failed Synchronization of bytes did not work i e stop bit was not present This is typical for noise on the line Check the ground line n e E two dashes no error occured 3 8 2 6 Example The following examples show the usage of a 647B through the RS232 interface The examples are given in Power BASIC Program to display the act flow of channel 1 10 OPEN PRIN INPU PRINT PRINT PRINT PRINT PRINT INPUT PRIN GOTO END COM2 9600 0 8 1 AS 1 T 10 ID T 10 AS 7 ES 1 0500 s ON 1 A ON 0 FL 1 AS a AS 80 3 8 3 System Parameters For description of the parameter HOST MODE see chapter Remote Control page 30 For the description of RESET function in SYSTEM SETUP menu see the chapter Reset of System page 9
19. and their connecting cables In any case check the setup of the device 39 647B 6 Pin Assignment of rear connectors 6 1 RS232 connector Sub D male 9 pol T 6 RxD 2 7 RTS TxD 3 8 CTS 4 9 GND 5 Figure 26 6 2 IEEE 483 connector DIO 0 1 13 DIO 4 DIO 1 2 14 DIO 5 DIO 3 3 15 DIO 6 DIO 4 4 16 DIO 7 EOI 5 17 REN DAV 6 18 ground NRFD 7 19 ground NDAC 8 20 ground IFC 9 21 ground SRO 10 22 ground ATN 11 23 ground shield 12 23 ground Figure 27 40 647B 6 3 RELAYS connector Two relays are available for each channel The relay data are type of relay 1 switch with n o and n c position SPDT max switch voltage 100 V max power 3W max switch load 250 mA max response time 55 ms Sub D female 25 pol relay 11 nc l chassis 14 relay 11 cmn relay 11 no 2 15 relay 12 nc relay 12 cmn 3 16 relay 12 no relay 21 nc 4 17 relay 21 cmn relay 21 no 5 18 relay 22 nc relay 22 cmn 6 19 rekay 22 no relay 31 nc 7 20 relay 31 cmn relay 31 no 8 21 relay 32 nc relay 32 cmn 9 22 relay 32 no relay 41 nc 10 23 relay 41 cmn relay 41 no TE 24 relay 42 nc relay 42 cmn 12 25 relay 42 no chassis 13 legend nc normally closed no normally open cmn common pin relay 12
20. ature drift 4 optional 8 0 5 5 5 V 0 5 5 5 V 1 digit 0 075 C 7 pressure channel input voltage output voltage resolution error range temperature drift max 1 channel 0 5 10V 0 5 5V 16 bit 3 digit 0 075 C 7 external setpoint 0 5 5 5V measuring rate output rate 20 Hz channel 20 Hz channel operation temperature 15 40 C 5 lt 70 3 4 humidity Power supply voltage fuse frequency consumed power power supply for sensors voltages max current per sensor max total current 110 220 V 10 F 5 A 250 V fast burn 40 70 Hz 300 W 15 V 4 5 96 500 mA 1 4A 2 Dimensions Weight 19 x 3 HE x 342 mm 6 8 8kg 4 channel 9 2kg 8 channel Consider also the warming up period of the sensors For all channels i e gas flow and pressure 1 2 3 Relative humidity within the specified temperature range 4 For use in closed heatable rooms without condesation 5 6 7 Convectional cooling is assumed Without connectors For max signal within the range of operation temperature 647B 1 6 Drawings 1 6 1 Front Panel A Key Switch B Monitor LCD Display Figure 2 C Keyboard 647B 1 6 2 Rear Panel 1 Power Supply Connector Figure 3 8 Connector PRESSURE for ext 2 Voltage Selector Switch pressure controller or tran
21. culating and therefore not ready to accept more date it stops the transfer through a handshake protocol The 647B can accept 30 commands at maximum speed until it stops the transfer There are three kinds of handshake modes for the communication with the host computer no handshake software handshake XON XOFF hardware handshake RTS CTS The usage of one of the above modes depens on the connection to the computer If the communication is run without handshake and the calculating speed do not match loss of data may appear 3 8 2 4 Interface Connections When the 647B software is booting e g at power on or hardware reset it detects the handshake mode through the cable type on the RS232 line This mode is displayed in the menu 27 647B sub d 9 pol female sub d 9 pol female software handshake DTR 4 ground 5 sub d 9 pol female sub d 9 pol female hardware handshake PC 647B 3 TxD TxD 3 8 CTS CTS 8 2 RxD RxD 2 7 RTS RTS 7 6 DSR DSR 6 4 DTR DTR 4 ground ground 5 sub d 9 pol female sub d 9 pol female Figure 23 A typical error in handling the RS232 line is to plug in the cable after having switched the device on before As a result the 647B works with no handshake although the host computer expects a handshaking At installation time it may be helpful to check the actual handshake mode 28 647B 3 8 2 5 RS232 Line Status In order to make the debugging of a R
22. e three additional parameters to setup the PID algorithm with the PID optional only The best procedure to tune the PID controller is to make the step response of the application evaluate the parameters dead time Tt and rise time Ts and then calculate the PID parameters 13 647B A Kuls l ucleslc DERIT NET DE kk e e e e ee e e ke e e e se x 63 k J gt Tt Ts t Figure 9 tuning for optimal step response gain 0 6 K integral action 1 Ts lead 0 5 Tt tuning for optimal disturbance response gain 0 95 K integral action 2 4 Ts lead 0 42 Tt K is the relation of actual pressure to actual total flow both are to be taken as percent of full scale To improve the speed of your application first increase the value of the gain parameter then change the integral action If you cannot record a step response of your process it is also possible to estimate the necessary values Measure the time between the opening of the valves and the beginning change of the actual pressure as Tt Then measure the time until pressure has gained 63 of the final pressure value Configuration of an Application 647B y T e y Figure 10 14 647B 3 6 Diagnosis of System 3 6 1 The ERROR LISTING menu If the status line indicates the occurrence of errors details about these errors and the affected channels can be retrieved from the ERROR LISTING menu
23. ed or selected by scrolling up and down through a table In some cases certain input fields are not active The top line of the screen title displays the device type MGC Multi Gas Controller and software version The status line on the bottom of the screen displays the number of errors the status of the main valve and the input status of the keyboard see also MAIN MENU MGC 647B V2 2 title USER DISPLAY EXTENDED DISPLAY PRESSURE CONTROL DIAGNOSTICS INSTRUMENT SETUP SYSTEM SETUP PRESSURE SETUP lt datafield aaa al Y Ov 014 O NR _ u vy Eh 9 INFORMATION 00 ERRORS FLOW OFF INPUT DIRECT lt statusline comment the cursor is shown as underline in this document Figure 4 If errors occured detailed error descriptions are available through the menu ERROR LISTING see page 15 In order to turn off all gas flows at once there are the main valve functions The main valve is switched on with the key combination lt ON gt lt ALL gt and switched off with key combination lt OFF gt lt ALL gt The current state of the main valve is displayed as FLOW ON open and FLOW OFF closed respectively 647B The state of the keyboard is displayed in the INPUT field of the status line DIRECT input from keyboard enabled ON last input was lt ON gt OFF last input was lt OFF gt LOCKED The keyboard is locked t
24. explained here The A says to watch the documentation manual The type label gives information about the device type the serial number and some technical date The label close to the fuse holder tells the specification of spare fuses F 5A 250V 1 10 Accessories The 647B comes with the following accessories Sub D connector sets for the instruments 4 channel device ZB 19 8 channel deivce ZB 20 Power cable Y 0984492 Manual Y 1957647 2 handles for the case Y 5150011 4 screws for the handles Y 1600005 1 11 Cables Refer to the instruction manuals of the respective mass flow meters mass flow controllers and pressure transducers for cable information 1 12 Service In case of problems or failure of the device please contact your local MKS representative The last page of this manual contains a list of service and calibration centers 647B 2 Operating Instructions 2 1 The User Interface The device is operated via menus A menu consists of submenus input fields or display fields Submenus can be reached by typing the number labeling them on the screen or selecting them with the cursor and typing lt 0 gt They can be exited pressing the lt ESC gt button Input fields are highlighted by a cursor frame when they are selected for input Using the cursor keys different input fields can be selected i e the cursor keys move the cursor on the screen The input fields allow values to be edit
25. g signal processing the process is also stopped m This menu is designed for test and maintenance purposes only It displays all signals of the interface to the process The display unit is mV It is possible to enter setpoints in mV directly if the signal processing is stopped If you leave the signals menu then signal processing is restarted This avoids problems concerning general 647B usage 3 7 Instrument Setup MGC 647B V2 2 1 RANGE SELECTION 2 GAS SELECTION 3 MODE SELECTION 4 ZERO ADJUST 5 TRIP LIMITS 6 GAS COMPOSITION 00 ERRORS FLOW ON INPUT DIRECT Figure 13 The instrument setup contains all parameters which are related to the process 16 647B 3 7 1 Range Selection MGC 647B V2 2 CH1 CH2 CH3 CHA ACT FLOW 0 000 1 750 1 400 0 000 UNIT SCCM SCCM SLM SLM RANGE FS 5 000 5 000 2 000 1 000 STATUS OFF ON ON ON 00 ERRORS FLOW ON INPUT DIRECT Figure 14 The following ranges are available 1 sccm 2 sccm 5 sccm 10 sccm 20 sccm 50 sccm 100 sccm 200 sccm 500 sccm 1 sim 2 sim 5 sim 10 sim 20 sim 30 sim 50 sim 100 sim 200 sim 300 sim 400 sim 1 scmm 1 scfh 2 scfh 5 scfh 10 scfh 20 scfh 50 scfh 100 scfh 200 scfh 500 scfh 1 scfm 2 scfm 5 scfm 10 scfm 20 scfm 50 scfm 100 scfm 200 scfm 500 scfm sccm standard cubic centimeter per minute sim standard cubic liter per mi
26. hrough RS232 or IEEE MEMORY stored gas menu is active In the 8 channel version it is not possible to display all channels simultaneously on the display Therefore it is possible to scroll through the channels display horizontally 2 2 The Menu Tree MAIN MENU 1 USER DISPLAY 2 EXTENDED DISPLAY 3 PRESSURE CONTROL 4 DIAGNOSTICS 4 1 ERROR LISTING 4 2 SIGNALS 5 INSTRUMENT SETUP im 5 1 RANGE SELECTION 5 2 GAS SELECTION 5 3 MODE SELECTION 5 4 ZERO ADJUST 5 5 TRIP LIMITS 5 6 GAS COMPOSITION 6 SYSTEM SETUP 7 PRESSURE SETUP 8 INFORMATION Figure 5 647B 2 3 Reset of System There are four types of Reset First Start Reset Power Up Reset Hardware Reset Reset to Default Attention ud All of the above resets will switch off all gas flow controllers J First Start Reset will appear if the system is started for the first time or if the RAM has been replaced This has usually already taken place at the factory All data in the RAM are initialized with this reset A quick tap on keys lt 7 gt and lt 9 gt will force the system to First Start Reset If the device refuses to come up on power on press button lt 8 gt while switching the device on in order to perform a total rese
27. ion to MKS 4 Remote Control 4 1 Compatibility The 647B offers more functionality than the 147B which leads to some incompatible constructs in the remote control syntax To avoid this incompatibility the 647B distiguishes two host modes C MODE offers actual 647B commands B MODE offers 147B commands In B MODE the device is compatible with 147B so it is possible to use old configuration software without any changes The full 647B functionality is only available in C MODE In the beginning the C MODE will be initialized and the device will act like an actual 647B If a 147B command is used the 647B will switch to B MODE e g MO c 1 PL 1 3 It is also possible to switch to B MODE through menu SYSTEM SETUP and vice versa For setup see chapter System Parameters page 28 31 647B 4 2 Command Syntax In general all commands are transmitted in ASCII format Each command string must be terminated by a carriage return and there is no discrimination between upper and lower case letters In order to improve readability blanks 20 hex may be included as delimiters between command channel number and command parameters however this is not necessary All parameters can be read by the host For this purpose a R for Request is transmitted instead of the command parameter Cmd Cn Pl p2 p3 R lt cr gt lt nl gt Cmd cn R pl p2 p3 lt cr gt lt nl gt command 2 bytes S table of command
28. ita 43 Gas Correction Table kass de pam pude debate 44 INDEX m 48 647B 1 General 1 1The Multi Gas Controller MGC Type 647B The 647B is designed to control Mass Flow Controllers MFC with complex requirements to the process It allows different configuration Warning The safety instructions in this document must be kept Please take also a special note of all highlighted text in this document Various master slave configurations within several groups of channels External control of mass flow controllers Regulation of the pressure with a constant gas flow ratio 1 2 CE conformity The device complies to the CE regulations and conformity is declared to the following standards EN 55011 3 1991 Group 1 class B EN 50082 1 1992 PrEN 50082 2 1992 IEC 801 2 IEC 801 3 IEC 801 4 EN 61010 1993 1 3 Options The following options are available for the 647B Modules labeled with standard are part of the basic version 647BE X X P X N no Trip Relays T with Trip Relays R RS232 E IEEE Interface 4 4 Channels 8 8 Channels X any available model code The basic version can be extended later on with every proper combination 1 4 Software This manual meets software version V2 2 647B 1 5 Technical Specifications channels for gas flow max number of channels input voltage output voltage error range temper
29. m command level i e KE and bus level i e local The status is updated 5 times a second but as the communication could be faster than that it is possible that not all changes of status will be visible 3 8 1 4 Examples The following examples show the usage of a 647B through the IEEE interface The examples are given in HP85 basic 25 647B Program to display the act flow of channel 1 using QUIET mode 10 OCAL 7 20 OUTPUT 713 ID 30 ENTER 713 AS 40 DISP AS 50 OUTPUT 713 FS 1 0500 60 OUTPUT 713 ON 1 70 OUTPUT 713 ON 0 80 OUTPUT 713 FL 1 90 ENTER 713 AS 100 DISP AS 110 GOTO 80 keyboard remains enabled request for the advice ID bus request for ID data display ID on the HP85 screen set setpoint to 50 switch channel on ditto request of 1 channels act flow bus request display of act flow repeat act flow request Same program but with REPEAT mode and keyboard disabled 10 REMOTE 7 20 OUTPUT 713 ID 30 OUTPUT 713 FS 1 0500 40 OUTPUT 713 ON 1 50 OUTPUT 713 ON 0 60 OUTPUT 713 FL 1 70 WAIT 1000 80 ENTER 713 AS 90 DISP AS 100 GOTO 80 keyboard remains enabled request for the advice ID bus request for ID data Switch channel on ditto request of 1 channels ac
30. nute scmm standard cubic meter per minute scfh standard cubic feet per hour scfm standard cubic feet per minute 17 500slm 647B 3 7 2 Gas Selection Mc 6478 v2 2 CH1 CH2 CH3 CH4 ACT FLOW 0 000 1150 1 400 0 000 UNIT SCCM SCCM SLM SLM GAS USER AIR CO He FACTOR 1 000 1 000 0 700 1 450 STATUS OFF ON ON ON 00 ERRORS FLOW ON INPUT DIRECT Figure 15 This menu contains the table of Gas Correction Factors GCF for mass flow controllers which are calibrated in nitrogen under standard conditions DIN 1871 In this case standard pressure means 1013 mbar and standard temperature is 0 degree centigrade The cursor keys UP DOWN are used to scroll through the table entries of each channel For gases which are not included in the table there is the position USER which allows a direct numerical input of the GCF of any gas For a description how to calculate GCF see the manual of the mass flow controllers direct numerical input of the GCF is also allowed for the gases helium and hydrogen which are normally calibrated directly with these gases The 647B automatically calculates the actual range of each mass flow controller RANGE FS from the product GCF x RANGE E g for a flow controller which is calibrated in 1 slm nitrogen at a correction factor of 0 72 methane the actual flow range RANGE FS displayed in EXTENDED DISPLAY menu is 0 720 sim 18 647B 3 7 3 Mode Selection
31. oard disable display is switched to user menu keyboard enable display is switched back to previous menu sett all parameters to default perform a hardware reset like power up check for indetification result MGC 647B V2 2 mm dd yyyy month of release day of release year of release 35 647B The following host commands respectively the command extensions are only available with the PID option GN xxxx enter PID parameter gain xxxx 0 9999 gain in percent GN R check for PID parameter gain result xxxxx IA xxxx enter PID parameter integral action xxxx 0 9999 integral action in 10 ms IAR check for PID parameter integ act result xxxxx LD xxxx enter PID parameter lead xxxx 0 9999 lead in 10 ms LD R check for PID parameter lead result xxxxx MO cm i enter mode extended command c 1 8 channel m 0 mode independent m 1 mode slave and new line If no result value is available also an empty response lt cr gt lt nl gt is possible If an error has been detected in the command string an error message is sent before the acknowledge signal In this case the command has not been executed vl v2 E ec cr lt nl gt vl v2 result values indicator for an error error code 0 Chnnel error A invalid channel number was specified in the command or the channel number is missing 1 Unknown Command A command has been transmitted which is unknown to the 647B 2
32. p Limit Supervision ooococcccnoncconocononoccnnnccnnnncn conan noc n nan cn rara nana cnn 22 3 7 6 Gas Composition dieien ioner denderen rakana khaa enaa cnn rca rn cnn 23 3 08 System Setup it Ia eo Ete f Eee en f es 24 39 91 IEEE 488 S6tUp oe edem ete tele ed d petet ien 24 3 8 2 RS232 Setup cte tete ttu tete etos 26 3 8 3 System Parameters sessi eene trennen ens snnt tenens 29 3 9 Pressure Setup 2 pna RE E Heiler 30 3 10 Information about the System ssssssssssssssseseeeeeen nennen nenne 31 4 Remote Controls 24 o oet dtc d OI t dee fed een et dae EAR iba 31 4 1 Gompatbility reete rette et tasa 31 4 2 Gommarid Syntax i ereteeteivee voa teen agenda ooa reete ir Rive ibas 32 4 3 Table of Commands avveie Arden ak 33 5 Application Of tlie 64 7B Lene eei me a ie eh ERE be 38 5 1 Mass Flow Controllers essent nnns 38 5 2 Trouble Sho fting ont ict Per ete i E ene ra 39 6 Pin Assignment of rear connectors ccccococcccconcccccnnoncncnanencnnnnnnnncc nano nn nc nnnn nn cr cnn nn nennen nnne 40 6 1 R8232 Connector viii HERE rte EC a a Lp HR re N 40 6 2 IEEE 488 connector eta etes p iau AE s 40 6 9 RELAYS CODIDOCIOE s teet ete e etta teet 41 6 4VIDEO CONNECtO a ca de cd o d ds 42 6 5 MFC connector CH1 to CH8 sessi nes 42 6 6 ACCESS COhlector unt prier Rd eet tte laa bh 43 6 7 PRESSURE CONNECTOR i e rerit mte e eite t
33. pes 259 1259 2259 1159 1179A 2179A 1479A 1359 1559 and 2159 38 647B 5 2 Trouble Shooting Symptom Possible Causes and Remedies 1 No display 2 Display of gas flow is close to zero or not correct 3 Display of gas flow is on for a short time and goes back to zero 4 There are periodical peak pulses at constant gas flow 5 Entering data is not possible or there are unreadable characters on the display Power Failure Wrong position of voltage selector switch Loose mains connection No power in the outlet Fuse is defectiv Power supply is broken Loose connecton Power supply is broken Mass flow controller is warming up Set point is not being transmitted Valve in the supply line is closed Defect in the pipe line system Supply line valve is closed Pressure is down check gas supply No differential pressure e g pump is turned off Pressure regulator is defect frequent defect varying supply pressure may help It is recommended to replace the pressure regulator Disturbance by external sources change the path of power lines sreen sources of disturbance There is probably iconsistent data in battery backuped RAM The First Start Reset will fix this problem If the trouble is limited to a part of the eight possible channels it is recommended to localize the source of trouble by exchanging mass flow controllers
34. point in 0 1 percent of full scale check for setpoint in gas set result in a gas set XXXXX zero adjust pressure result offset value in mV error occured XXXXX pressure controller controller code 0 STD i e 1 250 2 152 3 4 5 standard 652 146 check for pressure controller result c pressure unit unit code 0 1 0000 mTorr 15 1 0000 mBar 1 10 000 mTorr 16 10 000 mBar 2 100 00 mTorr 17 100 00 mBar 3 1000 0 mTorr 18 1000 0 mBar 4 1 0000 Torr 19 1 0000 Bar 5 10 000 Torr 20 10 000 Bar 6 100 00 Torr 21 100 00 Bar 7 1000 0 Torr 22 1 0000 Pa 8 1 0000 kTorr 23 10 000 Pa 34 647B PUR ON c c 0 c 1 8 OF c c 0 c 1 8 ST c c 1 8 x 0 FFFFH DF mm dd YYYY 9 10 000 kTorr 24 100 00 Pa 10 100 00 kTorr 25 1 0000 kPa 11 1 0000 uBar 26 10 000 kPa 12 10 000 uBar 27 100 00 kPa 13 100 00 uBar 28 1000 0 kPa 14 1000 0 uBar check for pressure unit result rr open valve main valve corresponds to ON ALL channel valve close valve main valve corresponds to OFF ALL channel valve check for status of a channel result xxxxx incompatible channel status value bit 0 lt 0 1 channel off on bit 4 lt trip limit low Bit 5 lt trip limit high bit 6 lt overflow in bit 7 lt underflow in bit 8 lt overflow out bit 9 lt underflow out Bit 15 lt not used keyb
35. s channel number 1 4 8 parameters numerical input is always in decimal ASCII format request of the parameters carriage return 0D hex for terination new line 0A hex optional 32 647B 4 3 Table of Commands Select gas menu GMs 0 gas menu X normal setpoints are used E gt 1 gas menu 1 5 S l 5 check for gas menu result s GM R enter setpoint of a channel FS C XXXX channel c 1 8 setpoint in 0 1 percent of full scale x 0 1100 check for setpoint result xxxxx FS cR und check for actual flow of a channel result xxxxx channel c 1 8 actual flow in 0 1 percent of full scale x 0 1100 nter pressure setpoint FOR setpoint in 0 1 percent of full scale BERT 0 1100 check for pressure setpoint result xxxxx check for pressure result xxxxx E actual pressure in 0 1 percent of full scale x 0 1100 check for PCS result xxxxx PC actual PCS signal in 0 1 percent of full scale x 0 1100 nter pressure mod Eu mode off m 0 mode auto m 1 check for pressure mode reult m PM R enter range P A 8 Channel aa range code 0 1 000 SCCM 20 1 000 SCFH 1 2 000 SCCM 21 2 000 SCFH 2 5 000 SCCM 22 5 000 SCFH 3 10 00 SCCM 23 10 00 SCFH 4 20 00 SCCM 24 20 00 SCFH 5 50 00 SCCM 25 50 00 SCFH 6 100 0 SCCM 26 100 0 SCFH 7 200 0 SCCM 27 200 0 SCFH 8 500 0 SCCM 28 500 0 SCFH 9 1 000 SLM 29 1 000 SCFM 10 2 000 SLM 30 2
36. s are also automatically taken into account Values higher than 110 are displayed as an overflow through dashes The lowest displayed flow value is 10 See also Zero Adjust Typing lt ON gt lt x gt turns on the valve of channel x and causes its set point to be sent to the mass flow controller In addition to provide the possibility of turning on and off all controllers at the same time there is the switch lt ON OFF gt lt ALL gt The green LED GAS ON indicates that at least one mass flow controller is active A blinking red LED indicates that the software is working without problems STAND BY 12 647B 3 4 The PRESSURE CONTROL menu MGC 647B V2 2 CH1 CH2 CH3 CH4 0 000 1 750 1 400 0 000 CH5 CH6 CH7 CH8 0 000 0 000 0 000 0 000 GAIN 01 00 PRESSURE UNIT INTEG 02 00 Torr LEAD 00 30 0 3501 SETPOINT ODE PCS 0 467 OFF 0 3500 00 ERRORS FLOW ON INPUT DIRECT Figure 8 The PRESSURE CONTROL menu displays the actual flows and the actual pressure with its unit During an application with an external pressure controller the corrective action is also shown in PCS Pressure Control Signal The pressure is controllable through the pressure setpoint and the two pressure modes OFF set point for pressure regulation is turned off AUTO set point for pressure regulation is turned on All parameters are edited as usual 3 5 Tuning the PID Controller There ar
37. sducer 3 RS 232 Interface IEEE optional 9 Connector ACCESS 4 7 Connectors for MFC s 10 Connector RELAYS 647B 1 7 Safety Information 1 7 1 Symbols Used in this Instruction Manual Definitions of WARNING CAUTION and ATTENTION messages used throughout the manual procedure practice condition or the like which if not correctly Warning Vi The WARNING sign denotes a hazard It calls attention to a performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard It calls attention to an Y operating procedure practice or the like which if not correctly performed or adhered to could result in damage to or destruction of all or part of the product Attention ud The NOTE sign denotes important information It calls attention to a y procedure practice condition or the like which is essential to highlight 647B 1 7 2 Safety Instructions Attention ud Please read this instruction carefully and follow it before using this device LJ This device is state of the art and save But danger may appear by the device if not used according to the instructions or the professional knowledge Only spare parts of the manufacturer may be used for replacements The device must not be used in explosive environments Safety and reliability is only given in the following cases the device is used according to the manual the device is serviced by personel of the manufacturer only
38. t equal to First Start Reset This problem can have 2 reasons Data in memory was destroyed through a transient The described procedure will fix this problem There is an error in the hardware If the Start Up problem occurs more than once contact your local MKS service center Power Up Reset is performed everytime the system is switched on It resets all data which are needed for system administration Data of process parameters are not affected Hardware Reset is similar to Power Up Reset It is triggered by the keys lt OFF gt and lt cursor right gt pressed at the same time In any case Power Up or Hardware Reset leads to the MAIN MENU Reset to Default sets all process parameters to their default value This reset is triggered in SYSTEM SETUP menu After the device has been turned off one should wait for ca 15 seconds before turning it on again 2 4 Display adjustment The viewing angle of the LCD display and the timeout setting of its back light saver may be set in SYSTEM BACKUP menu 10 647B 3 Functionality 3 1 The MAIN MENU After turning on the power switch 1 tne MAIN MENU is displayed From this menu the different submenus are accessible See also figure 4 3 2 The USER DISPLAY menu MGC 647B V2 2 CH1 CH2 CH3 CH4 0 000 1 750 1 400 0 000 SCCM SCCM SLM SLM CH5 CH6 CH7 CH8 0 000 0 000 0 000 0 000 SLM SCCM SCCM SCCM PRESSURE 0000 0 mbar TOTAL FLOW 00
39. t all In the POLLING mode each command results an a response Either data an error string or an empty acknowledge i e lt CR gt lt LF gt is sent back to the controller Both modes QUIET and POLLING do not respond if there has been no request through a previous command The REPEAT mode is similar to POLLING but it responds to each data request of the bus controller If the controller has not sent a command before the request the 647B repeats the last given command If there has been no last command e g after power up the command ID is performed 3 8 1 3 Interface Status The interface status displays two flags the adress status and the communication status adress status TLK LSN communication status RMT LLO TLK means that the device is adressed as talker LSN means an adressing as listener Three dashes are displayed if any other device is adressed The bus controller is able to set the device to remote RMT or local status If the device is in remote status it is not possible to operate it through the keyboard but it can be switched back to local by the lt ESC gt key until the next command appears If the device is set to local lockout LLO status by the controller there is no reset to local status through the keyboard possible Regardless of the IEEE status the keyboard is also disabled by the command KD and enabled by KE In order to work with the keyboard it must be enabled fro
40. t flow wait until commands are accepted bus request display of act flow repeat act flow request For interface language see chapter Remote Control 3 8 2 RS232 Setup MGC 647B V2 2 BAUDRATE 9600 PARITY ODD BITS 8 bit STOPBITS 1 bit HANDSHAKE NONE RS232 STATUS LCD VIEW ANGLE 023 LCD ON TIME min 010 HOST MODE C MODE RESET EXEC 00 ERRORS FLOW OFF INPUT DIRECT Figure 22 The 647B implements a standard V24 RS232 interface with standard parameters 26 647B 3 8 2 1 Baudrate The baudrate defines the transfer speed of characters on the line The transfer rate of commands and data is determined by this baudrate and by the processing speed of 647B The first 30 commands will be directed to a buffer at maximum speed while the transfer of further commands is controlled by a handshake protocol The baudrate must fit to the baudrate of the host computer supported baud rates 50 75 110 150 300 600 1200 1800 2000 2400 3600 4800 7200 9600 Baud 3 8 2 2 Data Link Parameters The data link parameters must fit to setup of the host computer Change it according to the setup of the host word length 7 bit 8 bit parity NONE EVEN ODD stop bits 1 bit 2 bit 3 8 2 3 Handshake Protocol The handshake protocol synchronizes different processing speeds of 647B and host computer If the receiving device is busy with cal
41. the gas flow of a slave is disturbed however the composition ratio for this channel is incorrect 19 647B Eg a ratio of 5 1 master slave means Setpoint of slave act flow of master 0 2 The master channel is determined by the index which is associated with the slave channel The advantages hereby are that the master remains free for declaration in other modes and more than one master is possible With this declaration technique however useless circular reference chains which might even be dangerous for the application could appear In order ro avoid this the software checks out each input and rejects it if necessary Therefore this solution offers full advantages without risks Example 1 menu extract CH1 CH2 CH3 CH4 MODE INDEP SLAVE SLAVE INDEP INDEX de 2 In this example channel 1 is master of channel 2 which is master of channel 3 This is an open reference chain The index number of a slave indicates its master channel This declaration technique applicated to channel 2 as master has the advantage that this channel may be declared as slave while being a master Channel 4 is independent Example 2 menu extract CH1 CH2 CH3 CH4 MODE SLAVE SLAVE SLAVE INDEP INDEX 3 1 2 This example shows a circular reference chain which will never appear on 647B screen The software prevents its appearance by consequently rejecting wrong input This is the reason why some of the user s input
42. tio M taina a a a a nens nn a ninh nennt nnns nennen neas 5 1 7 1 Symbols Used in this Instruction Manual sss 5 1 7 2 Safety Instructions esses ener nns 6 1 8 Installation 32 1 peis 6 1 9 Symbols t the case aa te ehe 7 1 10 ACCOSSOLIOS nn AS 7 1 11 Cables iei dtt a te 7 1312 SEMC iain uim b E d IDEE E GN Uc d Ou eae ete 7 2 Operating Instructions nn cried adi 8 2 1 The User Interface 2 e dra A aa 8 2 2 The Menu Tree rer fre ad 9 2 9 Reset oO Si Mircea 10 2 4 Display a Mei ii 10 3 Functioriality 4 42 raid tea ecc bid 11 3 1 The MAIN MENU kiireinen aaa aae a ae aaia neeaae 11 3 2 The USER DISPLAY menu uusnsessssnssnnnnsnnnnnnnnnnnnnnnnnnnnnnnnnnnsnnnnnnnnnnnnnnnnnnnnnnen 11 3 3 The EXTENDED DISPLAY MENU iaa eea aeaea reae ai aaa aa a a aa aaraa iG kan aiaa 12 3 4 The PRESSURE CONTROL menu sss entere nnne enn 13 3 5 Tuning the PID Controller nennen nnne 13 3 6 Diagnosis of System 20unnnensnnunnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnennnnnnnnnnnnnen 15 3 6 1 The ERROR LISTING menu 0 cccecceeseeeeeeeeeeeeeeeaeseeeeeceaeeesaeeeeeeeeenees 15 3 6 2 The SIGNALS menu sse enne nennen 16 647B 3 7 Iristrument Setup eniti la as 16 3 71 Range Selection burn rone t rta et rita 17 3 7 2 Gas Selection acted Ins 18 3 7 9 Mode Selection cic Pe deed en ala 19 3 7 4 Zero Adjustment ie al dci sa 21 3 7 5 Tri
43. u 11 word length 27 XON XOFF 27 Zero Adjustment 21 ZERO VALUE 21 647B Customer Support Centers UNITED STATES MKS Instruments Inc Corporate Service Center 651 Lowell Street Methuen MA 01844 Fon 978 682 4567 Fax 978 682 8543 MKS Instruments Inc HPS Division Vacuum Components Valves amp Gauging 5330 Sterling Drive Boulder CO 80301 Fon 303 449 9861 800 345 1967 Fax 303 442 6880 CANADA MKS Instruments Canada Ltd 30 Concourse Gate Nepean Ontario Canada K2E 7V7 Fon 613 723 3386 800 267 3551 CAN only Fax 613 723 9160 FRANCE MKS Instruments France s a 43 Rue du Commandant Rolland B P 41 F 93352 Le Bourget Cedex France Fon 33 1 48 35 39 39 Telex 233817 F Fax 33 1 48 35 32 52 50 GERMANY BENELUX MKS Instruments Deutschland GmbH Schatzbogen 43 D 81829 M nchen Fon 49 89 420008 0 Fax 49 89 42 41 06 E Mail mks49 aol com ITALY G Gambetti Kenologia Srl Via A Volta No 2 20082 Binasco MI Italy Fon 39 2 90093082 Fax 39 2 905 2778 JAPAN MKS Japan Inc Harmonize Building 5 17 13 Narita Higashi Suginami Ku Tokyo 166 Japan Fon 81 3 3398 8219 Fax 81 3 3398 8984 KOREA MKS Korea Co Ltd 2 Floor Shin Young Bldg 257 4 Yangjae Dong Seocho Ku Fon 82 2 529 0713 4 Fax 82 2 529 0715 UNITED KINGDOM MKS Instruments U K Ltd 2 St George s Court Dairyhouse Lane Altrincham Cheshire WA14 5UA England Fon 44 161 929 55
44. ys the completition of the function The status FAIL indicates that the offset was too large and a new zero value was not generated FAIL status may also appear if the channel is switched on The status ACT appears on the screen for a very short time so that it is usually not noticed The measured value the zero offset of the sensor of the mass flow controller is displayed in the field ZERO VALUE In order to correct the zero offset this value is subtracted from actual flow and added to the setpoint output This way the controller gets a corrected setpoint and thus equalizing the sensor signal s error If necessary one can enter the zero offset directly 21 647B 3 7 5 Trip Limit Supervision There are three modes to supervise the process SLEEP mode LIMIT mode BAND mode In SLEEP mode no supervision is performed In LIMIT mode the actual flow is supervised to remain between the trip limits If the actual flow exceeds the high limit or falls below the low limit an error will be generated The limits are considered as absolute values The BAND mode is similar to LIMIT mode but the limits are considered as deviation to the setpoint The low limit represents negative deviation MGC 647B V2 2 CH1 CH2 CH3 CH4 ACT FLOW 0 000 1 750 1 400 0 000 UNIT SCCM SCCM SLM SLM MIN LIMIT 3 000 0 750 0 000 0 000 MAX LIMIT 4 000 0 250 1 400 1 450 SUPERVIS LIMIT BAND SLEEP SLEEP STATUS O
Download Pdf Manuals
Related Search