H-850 Hexapod Microrobot
Contents
1. 6 100 mrad s 0 3 5 mm s 3 50 mrad s 7 7 N um 100 100 N um 250 50 50 20 kg max 2000 500 250 85 N max DC motor DC motor gearhead gearhead 10 to 50 10 to 50 C Aluminum Aluminum 17 17 kg 5 3 3 m 10 mm Vacuum versions to 10 hPa are available under the following ordering number H 850 xV Specifications for vacuum versions can differ Technical data specified at 20 3 C Ask about custom designs The travel ranges of the individual coordinates X Y Z Ox By 07 are interdependent The data for each axis in this table shows its maximum travel where all other axes are at their zero positions If the other linear or rotational coordinates are not zero the available travel may be less 10 1 2 Maximum Ratings The Hexapod is designed for the following operating data Maximum operating voltage 50 Version 1 1 0 Maximum operating frequency unloaded Maximum current consumption MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 3 Specifications for Vacuum Compatible Versions feer Jur romme ee Mechanical properties Load base plate horizontal any orientation 80 40 25 10 CN Holding force base plate horizontal any 2000 400 250 85 orientation Miscellaneous 2 mon the vacuum 2 m on the vacuum m 10 mm side vacuum side vacuum feedthrough 3m feedthrough 3 m Cable length on the air side on the2. The configuration data is adapted before delivery gt Check whether the Hexapod controller matches the Hexapod A label on the rear panel of the controller indicates for which Hexapod the controller is intended gt When you have established the communication via TCP IP or RS 232 or use the user interface of the C 887 send the CST command The response shows the Hexapod to which the controller is adapted gt Only operate the Hexapod with a Hexapod controller whose configuration data is adapted to the Hexapod H 850 Hexapod Microrobot MS202E Version 1 1 0 37 6 Start Up pP I NOTICE Damage from collisions Collisions can damage the Hexapod the load to be moved and the environment gt Make sure that no collisions between the Hexapod the load to be moved and the environment are possible in the work space of the Hexapod gt Do not place any objects in areas where they can get caught by moving parts gt If the Hexapod controller malfunctions stop the motion immediately NOTICE Damage from transport lock that has not been removed Damage can occur to the Hexapod if the transport lock p 21 of the Hexapod has not been removed and a motion is commanded gt Remove the transport lock before you start up the Hexapod system 6 2 Starting Up the Hexapod System Prerequisite v You have read and understood the General Notes on Start Up p 37 v You have correctly installed the Hexapod i e you have m
3. suitable for holes with 5 mm for tolerance values see the mounting and locating holes in the moving platform which are depicted in the figure locating pins not included in the scope of delivery Affixing the Load la 30 Align the load so that the selected mounting holes in the moving platform can be used for affixing it If you use locating pins to align the load a Make two locating holes with 5 mm and a suitable tolerance in the load to accommodate locating pins b Insert the locating pins into the locating holes in the moving platform or the load c Place the load on the moving platform in such a way that the locating pins are inserted into the corresponding locating holes on the other side The arrangement of the mounting and locating holes in the moving platform of the Hexapod as well as the tolerance values can be found in the corresponding figure as well as in the dimensional drawing p 53 Affix the load to the selected mounting holes in the moving platform using the Screws Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 7 Connecting the Cable Set to the Hexapod 5 7 1 Connecting the C 887 A03 Standard Cable Set Prerequisites v The cable set is not connected to the Hexapod controller Tools and accessories Cable set C 887 A03 that belongs to the Hexapod system p 10 Connecting the C 887 A03 standard cable set to the Hexapod 1 Conne
4. to be transported again later 22 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation oooccccnnncconoccnnncnnnnnonononannconnnnnononnnnnennnnnononnnanncnnns 23 Determining the Permissible Load and Working Space cccooooooncccnncccnccnnoncconnnnnononanos 24 Attaching the snap on ferrite SUPPIESSOT cccccoccnncccncnnconononcnnnncnnonnncnnconancnnnnanrnnononcnnnnnas 25 Grounding the Hexapod Aa 26 Mounting the Hexapod on a Surface cooooonnncnnnncccccnoonncnnnnnonononannnnnnnnonnnnnnannnnnnnnnnnnnnans 26 Affixing the Load to the Hexapod ooocccccccccocccnccccnocccnnonononcnnnonnnancnnnnonnnncnnnnonannnnnononanenss 28 Connecting the Cable Set to the Hexapod ccoooocncccnnccccccononccononoconnnonnncnnnnnonononannnnnns 31 5 1 General Notes on Installation The Hexapod can be mounted in any orientation NOTICE Impermissible mechanical load and collisions Impermissible mechanical load and collisions between the Hexapod the load to be moved and the environment can damage the Hexapod gt Only hold the Hexapod by the base plate gt Before installing the load determine the limit value for the load of the Hexapod with a simulation program p 24 The limit values determined with the simulation program are only valid when the Hexapod controller has the servo mode switched on for the axes of the
5. 3 m KO60B01 12 Available Hexapod systems The following Hexapod systems are available as combinations of Hexapod Hexapod controller and cable set Hexapod Hexapod Controller Cable Set ME sic ici H 850 HV H 850 G1 H 850 GV C 887 11 C 887 21 C 887 A03 C 887 V02 mam gt ACI II IS CI fr fa Lo IMEI SD A E hasen Wan AA AA mas Xx Xx x H 850 Hexapod Microrobot MS202E Version 1 1 0 11 3 Product Description 3 3 Product View 12 Figure 1 Product view 1 Moving platform 2 Strut 3 Panel plug for power supply cable 4 Socket for data transmission cable 5 Base plate PI Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 4 Scope of Delivery The following table contains the scope of delivery of the Hexapod The scope of delivery of the Hexapod controller is listed in the user manual of the Hexapod controller For the scope of delivery of the cable set that belongs to the Hexapod system see the listing of the standard cable sets in Model Overview p 10 ae Sa H 850 Hexapod according to your order p 10 Packaging consisting of Transport lock with following accessories 4 M6x20 screws 2 M6x30 screws 6 plastic flat washers 000012899 Inner box with handle 560 mm x 560 mm x 400 mm 000012323 Outer box with soft foam cushions Pallet Documentation consisting of H850T0001 Technical
6. air side Drive and sensor Manufacturer Faulhaber Motor type DC 23425024 HDUC 8 100 Harmonic Drive for H 850 HV CS 8 50 Harmonic Drive for H 850 GV Motor Gearhead Encoder Manufacturer Faulhaber Encoder type magnetic encoder IE2 512 Reference point switch Optical vacuum compatible a I I lt I u 8 u u I I a I I Materials used Machine made parts gt 95 of the machine made parts i e base plate struts moving platform AIMgSi 3 2315 chemically nickel plated AlMg4 5Mn 3 3547 stainless steel type 303 1 4305 Remaining parts e g coupling elements Various vacuum compatible materials H 850 Hexapod Microrobot MS202E Version 1 1 0 51 10 Technical Data P I Drivetrain elements Stainless steel drive screw Electrical components Cable insulation Teflon PTFE FEP Shrink tubing Kynar PTFE Solder Sn95 5Ag3 8Cu0 7 Connectors AMP HD20 Lemo PCB s adapter board limit switch board PWM board sealed with vacuum compatible Torr seal Molykote HP 300 Kl ber Barrierta L55 2 Sealing compound and Torr seal Varian TRA CAST 3145 Araldite 2014 1 Huntsmann 5 Minute Epoxy adhesive Devcon Bakeout temperature 80 C 176 F 10 2 Ambient Conditions and Classifications Degree of pollution 2 Transport temperature 25 to 85 Storage temperature 0 C to 70 C Humidity Maximum relative humidity of 80 at temperatures of up to 31 C li
7. is for permanent attachment to the power supply cable of the Hexapod The snap on ferrite suppressor ensures the electromagnetic compatibility of the Hexapod system gt When attaching the snap on ferrite suppressor make sure that it is correctly positioned on the cable The snap on ferrite suppressor can only be removed with special tools not included in the scope of delivery gt Attach the snap on ferrite suppressor to the power supply cable of the Hexapod before you connect the Hexapod to the Hexapod controller for the first time Tools and accessories Snap on ferrite suppressor 000015165 in the scope of delivery p 13 Permanently attaching the snap on ferrite suppressor 1 Place the power supply cable of the Hexapod close behind the M12 connector that is intended for connection to the controller into the opened Snap on ferrite suppressor see figure 2 Close the snap on ferrite suppressor a Align the cable so that it is not squeezed when the snap on ferrite suppressor is closed b Carefully press the two halves of the snap on ferrite suppressor around the cable until the lock engages H 850 Hexapod Microrobot MS202E Version 1 1 0 25 5 Installation P I 5 4 Grounding the Hexapod The Hexapod is not grounded via the power supply cable If a functional grounding is required for potential equalization 1 Connect the base plate to the grounding system For connection use the supplied accessories p 13 an
8. moving platform of the connected Hexapod gt Before installing the load determine the working space of the Hexapod with a simulation program p 24 The limits of the working space vary depending on the current position of the Hexapod translation and rotation coordinates and the current coordinates of the pivot point gt Avoid high forces and torques on the moving platform during installation gt Ensure an uninterruptible power supply in order to prevent an unintentional deactivation of the Hexapod system and resulting unintentional position changes of the Hexapod gt Make sure that no collisions between the Hexapod the load to be moved and the environment are possible in the working space of the Hexapod H 850 Hexapod Microrobot MS202E Version 1 1 0 23 PI 5 Installation INFORMATION The optionally available PIVeriMove software for collision checking can be used to mathematically check possible collisions between the Hexapod the load and the environment The use of the software is recommended when the Hexapod is located in a limited installation space and or operated with a spatially limiting load For details regarding the activation and configuration of the PlVeriMove software for collision checking see Technical Note C88710002 included in the scope of delivery of the software 5 2 Determining the Permissible Load and Working Space Tools and accessories PC with Windows operating system on which the simulation
9. note in printed form on unpacking the Hexapod MS202E User manual for the Hexapod this document Screw sets 000034605 Mounting accessories 6 M6x30 hex head cap screws ISO 4762 1 Allen wrench 5 0 DIN 911 000036450 Accessories for connection to the grounding system 1 M4x8 flat head screw with cross recess ISO 7045 2 washers form A 4 3 DIN 7090 2 safety washers Schnorr 4 mm N0110 H 850 Hexapod Microrobot MS202E Version 1 1 0 13 3 Product Description 3 5 Accessories Order Number C 887 A20 C 887 A30 14 Hexapod cable set 20 m consisting of PI Name tenga mem Line driver box for data transmission cable controller e C030B0011 side Line driver box for data transmission cable Hexapod side Short data transmission cable MDR68 to MDR68 1 1 2 3m pieces Long data transmission cable MDR68 to MDR68 1 1 Power supply cable for line driver box with M12 coupling M12 connector Power supply cable for Hexapod m with M12 coupling M12 connector Hexapod cable set 30 m consisting of Line driver box for data transmission cable controller side Line driver box for data transmission cable Hexapod Short data transmission cable MDR68 to MDR68 1 1 2 3m pieces Long data transmission cable MDR68 to MDR68 1 1 Power supply cable for line driver box 27m with M12 coupling M12 connector Power supply cable for Hexapod 30 with M12 coupling M12 connector To order contact our customer ser
10. to affect safety The operator is responsible for the correct installation and operation of the H 850 H 850 Hexapod Microrobot MS202E Version 1 1 0 5 2 Safety P I 2 2 1 Organizational Measures User manual gt Always keep this user manual available by the H 850 The latest versions of the user manuals are available for download p 3 on our website gt Add all information given by the manufacturer to the user manual for example supplements or Technical Notes gt If you pass the H 850 on to other users also turn over this user manual as well as other relevant information provided by the manufacturer gt Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage gt Only install and operate the H 850 after having read and understood this user manual Personnel qualification The H 850 may only be started up operated maintained and cleaned by authorized and qualified staff 2 2 2 Measures for Handling Vacuum Compatible Products When handling the vacuum version of the Hexapod attention must be paid to appropriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder free gloves are worn Afterwards the Hexapod is cleaned once again by wiping and shrink wrapped twice in vacuum compatible film gt Only touch the Hexapod with powder free gloves gt f necess
11. 0 Hexapod Microrobot MS202E Version 1 1 0 55 10 Technical Data Pin assignment pf A 9 m eB Be ee SS i i mn ii as r F ENCB 6 30 I I 31 55 I I 32 56 I I 33 ET I I I 234 se i I I I I I I 56 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik Instrumente Pl GmbH Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany H 850 Hexapod Microrobot MS202E Version 1 1 0 57 PIEZO NANO POSITIONING WWW PI WS 12 Glossary 12 Glossary Work space The entirety of all combinations of translations and rotations that the Hexapod can approach from the current position is referred to as the work space The work space can be limited by the following external factors I
12. 10 Technical Data In this Chapter GIO CHING LO INS RE EN nee 49 Ambient Conditions and Classifications ccccccecceeceeceecceeceeceeceeceecueceecuseeseueeaseatens 52 DIMENSIONS REE EEE EEE RE eras 53 ELSE EE O A O A 55 10 1 Specifications 10 1 1 Data Table H 850 H1x H 850 G1x Unit Tolerance for higher loads and for higher velocity holding forces and precision Active axes X Y Z Ox Oy Oz X Y Z Ox Oy Oz Motion and positioning Travel range X Y 50 50 mm Travel range Z 25 25 mm Travel range 8x By 15 15 y Travel range 07 30 30 2 Single actuator design resolution 0 005 0 05 um Min incremental motion X Y 1 1 um typ Min incremental motion Z 0 5 0 5 um typ Min incremental motion 6x y 07 5 5 urad typ Backlash X Y 4 5 um typ Backlash Z 1 1 5 um typ Backlash Ox Oy 15 25 urad typ Backlash 07 30 45 urad typ Repeatability X Y 1 0 5 um typ Repeatability Z 0 3 0 2 um typ Repeatability 8x Oy 5 3 urad typ Repeatability Oz 9 6 urad typ H 850 Hexapod Microrobot MS202E Version 1 1 0 49 10 Technical Data Max velocity X Y Z Max velocity Ox Oy z Typ velocity X Y Z Typ velocity 8x Oy z Mechanical properties Stiffness X Y Stiffness Z Load base plate horizontal any orientation Holding force de energized base plate horizontal any orientation Motor type Miscellaneous Operating temperature range Material Mass Cable length PI 0 5 8 mm s
13. Data transmission cable on the air side HD Sub D 78f to MDR68m 3 m Vacuum feedthrough for power supply LEMO 2 pin to M12m Vacuum feedthrough for data transmission HD Sub D 78m f Power supply cable on the vacuum side LEMO 2 pin to LEMO 2 pin 2 m Data transmission cable on the vacuum side MDR68m to HD Sub D 78m 2 m Vacuum chamber 5 7 3 Connecting the cable set with line driver boxes to the Hexapod 34 Prerequisites v The cable set is not connected to the Hexapod controller Tools and accessories Long cable set with two line driver boxes available as optional accessories p 14 Connecting the cable set with line driver boxes to the Hexapod gt Connect the Hexapod and cable set with each other as shown in the connection diagram below Observe the assignment that is given by the labeling on the sockets connectors and cables When handling the connectors proceed as described in Connecting the C 887 A03 Standard Cable Set p 31 gt Do not connect the cable set to the Hexapod controller yet Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 5 Installation m M12 180 Miz 90 Controller 5 Hexapod m M12 180 4 pin f M12 180 3 4 wo 3 m m m m m m MDR 180 MDR 180 MOR 180 MER 180 Y MDR 180 MOR 180 68 pin 68 pin 68 pin 68 pin 68 pin 68 pin Figure 12 Connection diagram of cable set with line driver boxes i Line dri
14. Hexapod on an even surface The recommended evenness of the surface is 300 um The Hexapod can be damaged by excessively long screws gt When selecting the screw length observe the thickness of the moving platform p 53 or the depth of the mounting holes together with the load to be mounted gt Only use screws that do not project under the moving platform after being screwed in gt Only mount the Hexapod and a load on the mounting fixtures holes intended for this purpose H 850 Hexapod Microrobot MS202E Version 1 1 0 7 2 Safety P I 2 2 5 Safety Measures during Start Up There is a risk of minor injuries caused by crushing which can occur between the moving parts of the Hexapod and a stationary part or obstacle gt Keep your fingers away from areas where they can get caught by moving parts The geometrical data used by the Hexapod controller must be adapted to the Hexapod If incorrect geometrical data is used the Hexapod can be damaged by uncontrolled motions or collisions The geometrical data is adapted before delivery gt Check whether the Hexapod controller matches the Hexapod A label on the rear panel of the controller indicates for which Hexapod the controller is intended gt Only operate the Hexapod with a Hexapod controller whose geometrical data is adapted to the Hexapod Collisions can damage the Hexapod the load to be moved and the surroundings gt Make sure that no collisions between the He
15. Microrobot PIEZO NANO POSITIONING WWW PI WS 5 Installation NOTICE Screws that are too long The Hexapod can be damaged by excessively long screws gt When selecting the screw length observe the thickness of the moving platform or the depth of the mounting holes p 53 together with the load to be mounted gt Only use screws that do not project under the moving platform after being screwed in gt Only mount the Hexapod and the load on the mounting fixtures holes intended for this purpose Figure 9 Mounting and locating holes in the moving platform 4 x M6 holes with 8 mm depth 4 x M4 holes with 8 mm depth 3 x M6 holes with 12 mm depth 6 x M8 through holes Locating hole 5 mm G6 with 14 mm depth Locating hole 5 mm H8 with 14 mm depth O a KR O Na H 850 Hexapod Microrobot MS202E Version 1 1 0 29 5 Installation PI Prerequisites v Y You have read and understood the General Notes on Installation p 23 You have determined the permissible load and the working space of the Hexapod p 24 You have designed the load and the environment of the Hexapod so that the permissible load of the Hexapod is observed and no collisions can occur Tools and accessories Suitably long screws Options 4 M4 screws 3 or 4 M6 screws 6 M8 countersunk head screws Suitable tools for fastening the screws Optionally Two locating pins for easy alignment of the load on the Hexapod
16. PI MS202E H 850 Hexapod Microrobot User Manual Version 1 1 0 Date 04 06 2013 This document describes the following products H 850 H1 Hexapod Microrobot with Excellent Position Repeatability DC Motor Gearhead 0 5 mm s 250 kg Load H 850 HV Hexapod Microrobot with Excellent Position Repeatability DC Motor Gearhead 0 15 mm s 80 kg Load Vacuum Compatible to 10 hPa H 850 G1 Hexapod Microrobot with Excellent Position Repeatability DC Motor Gearhead 8 mm s 50 kg Load H 850 GV Hexapod Microrobot with Excellent Position Repeatability DC Motor Gearhead 2 5 mm s 25 kg Load Vacuum Compatible to 10 hPa Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany _ Telephon 49 721 4846 0 Telefax 49 721 4846 1019 E Mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente Pl GmbH amp Co KG is the owner of the following trademarks PIO PICO PICMA PlLine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano 2013 Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 04 06 2013 Do
17. able Documents The devices and software tools which are mentioned in this documentation are described in their own manuals cd ch E O C 887 Hexapod controller MS204E User Manual C 887 Hexapod controller MS204Equ User Manual Short Version 2 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 4 Downloading Manuals INFORMATION If a manual is missing on our website or if there are problems in downloading gt Contact our customer service department p 47 The current versions of the manuals are found on our website To download a manual proceed as follows 1 2 3 4 Open the website http www pi portal ws Click Downloads Click the corresponding category e g H Hexapods Click the corresponding product code e g H 850 An overview of the available file types is shown for the selected product If 0 Files is shown in the Documents line log in as follows to display and download the documents a Insert the product CD in the corresponding PC drive b Open the Manuals directory c Open the Release News e g C 887 Releasenews V x x x pdf on the CD of the product d Find the user name and password in the User login for software download section in the Release News e Inthe User login area on the left margin in the website enter the user name and the password in the corresponding fields f Click Login If Documents 0 Files is st
18. ary wipe the Hexapod clean after unpacking 2 2 3 Safety Measures during Transport An impermissible mechanical load can damage the Hexapod gt Only send the Hexapod in the original packaging gt Only hold the Hexapod by the transport lock or the base plate 6 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 2 4 Safety Measures during Installation Impermissible mechanical load and collisions between the Hexapod the load to be moved and the environment can damage the Hexapod gt Only hold the Hexapod by the base plate gt Before installing the load determine the limit value for the load of the Hexapod with a simulation program p 24 gt Before installing the load determine the work space of the Hexapod with a simulation program p 24 gt Make sure that the installed load observes the limit value determined with the simulation program gt Avoid high forces and torques on the moving platform during installation of the Hexapod and the load gt Ensure an uninterruptible power supply in order to prevent an unintentional deactivation of the Hexapod system and resulting unintentional position changes of the Hexapod gt Make sure that no collisions between the Hexapod the load to be moved and the environment are possible in the work space of the Hexapod Incorrect mounting can warp the base plate Warping of the base plate reduces the accuracy gt Mount the
19. bles by cables of the same type and test the function of the Hexapod Contact our customer service department p 47 Mount the Hexapod on an even surface p 26 The recommended evenness of the surface is 300 um Carry out a maintenance run over the entire travel range p 39 Carry out a strut test See user manual of the Hexapod controller The strut test should be carried out in the reference position unless the malfunction occurs with maximum or minimum displacement of the platform in Z Contact our customer service department p 47 If the problem with your Hexapod is not listed in the table or cannot be solved as described contact our customer service department p 47 H 850 Hexapod Microrobot MS202E Version 1 1 0 45 PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your Pl sales engineer or send us an e mail mailto info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for downloading p 3 on our website H 850 Hexapod Microrobot MS202E Version 1 1 0 47 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data
20. cities of up to 8 mm s are possible with the H 850 G1 model The version H 850 GV which is suitable for use in a vacuum achieves velocities of up 2 5 mm s Models with a higher load capacity The H 850 H1 with a higher gear ratio achieves a load capacity of 250 kg vertically and 50 kg in any orientation The version H 850 HV which is suitable for use in a vacuum can be loaded with up to 80 kg vertically and 40 kg in any orientation The parallel kinematics structure and the free choice of the pivot point offer the following advantages Positioning operations in six independent axes three translation axes three rotation axes with short settling times Pivot point is maintained for rotations and moves along with linear motions High accuracy and step resolution in all axes No addition of the errors of individual axes No friction and torques from moving cables The Hexapod is controlled with the Hexapod controller which is part of the Hexapod system The position commands to the Hexapod controller are entered in Cartesian coordinates H 850 Hexapod Microrobot MS202E Version 1 1 0 9 3 Product Description P I 3 2 Model Overview Hexapod and Hexapod controller are only available together as a system Possible system components Standard versions of the H 850 Hexapod H 850 H 1 Hexapod Microrobot with Excellent Position Repeatability DC Motor Gearhead 0 5 mm s 250 kg Load H 850 HV Hexapod Microrobot wit
21. ct the data transmission cable to the MDR68 socket in the base plate of the Hexapod sab Press the latches together on both sides of the connector Insert the connector into the socket on the Hexapod Check that the connector correctly fits d Release the latches O Oo 2 Connect the 90 angled M12 coupling of the power supply cable to the 4 pin M12 panel plug in the base plate of the Hexapod Observe the mechanical coding of the coupling and panel plug Do not use force H 850 Hexapod Microrobot MS202E Version 1 1 0 31 5 Installation P I 5 7 2 Connecting the C 887 V02 Standard Cable Set for Vacuum Versions 84 YE Y Q Y S 29 Sy st gt 71 28 lt A A B Figure 10 Dimensions of the vacuum feedthrough for data transmission 4668 dimensions in mm B 4holes 45x 6 for M3 countersunk screw 32 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 5 Installation Prerequisites v The cable set is not connected to the Hexapod controller Tools and accessories Cable set C 887 V02 that belongs to the Hexapod system p 10 Suitable tools for installing the vacuum feedthrough Installing vacuum feedthroughs 1 Install the vacuum feedthrough for data transmission 4668 a See the above figure for the dimensions of the vacuum feedthrough b Provide the vacuum chamber with a suitable opening c Install the vacuum feedthrough
22. cument number MS202E BRo version 1 1 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual rrrrrrnnnnnronnrnnnnnvvnnnnnnnnvnnnnnnnnee 1 1 2 Symbols and Typographic CONVENTIONS ccooocccncccncnccnnccononccnnnnononnnononononnnnnononanenos 1 1 3 Other Applicable DOCUMENTS ccccccccccocnnccnnncccconononccnnnononononanonnnnnnononnnnnnnnnnnnononenans 2 1 4 Downloading Manuals rrrrnrnnnnonrnnnnovrnnnnrenrnnnnennnnnnennnnnnnennnnerennnnnnennnnnnsennnnsnennnnsne 3 2 Safety 5 2 1 HETT USE escoria 5 2 2 General Safety Instructions ccccccoooccnnnccnnnccncnnnonncnnnononononannnnnnnnnnnononnnennnnnonononans 5 2 2 1 Organizational We asus mein 6 2 2 2 Measures for Handling Vacuum Compatible Products 6 2 2 3 Safety Measures during Transport rrnrnnvnnnnnnnnnnrrvvvnnnrnnnnnrrrreennnnnnnn 6 2 2 4 Safety Measures during Installation ooooonncccnnnccnnocannncnnnncnnnonanos 7 2 2 5 Safety Measures during Start Up ooocccccnccccccconnccnnncconononnnononononononans 8 2 2 6 Safety Measures during Maintenance ccccccccccooncccnnnccnnnnnnnncnnnncnnonnnans 8 3 Product Description 9 3 1 Features and AppliCatiONS oonccccccnnnnccconnncoconcnnonnnnonnnnnnnnnononcnnonnnnnnnnnannnno
23. d the M4 hole with an 8 mm depth p 53 marked with the ground connection symbol If there is no M4 hole with an 8 mm depth in the base plate connect using one of the M6 holes on the side for fastening the transport lock p 21 2 Connect the moving platform to the grounding system Use one of the mounting holes in the moving platform p 53 for connection or If the moving platform and the load are conductively connected with each other connect the load to the grounding system 5 5 Mounting the Hexapod on a Surface NOTICE Impermissible mechanical load An impermissible mechanical load can damage the Hexapod gt Only hold the Hexapod by the base plate NOTICE Warping of the base plate Incorrect mounting can warp the base plate Warping of the base plate reduces the accuracy gt Mount the Hexapod on an even surface The recommended evenness of the surface is 300 um 26 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 8 Mounting holes in the base plate Prerequisite v You have read and understood the General Notes on Installation p 23 Tools and accessories Allen wrench 5 0 and six of the supplied screws p 13 Optional two locating pins for easy alignment of the Hexapod suitable for holes with 8 mm H7 not included in the scope of delivery H 850 Hexapod Microrobot MS202E Version 1 1 0 27 5 Installa
24. e Machinery Directive 2006 42 EC Furthermore it complies with all provisions of the EMC Directive 2004 108 EC The applied standards certifying the conformity are listed below af f Machinery EN 12100 1 2011 03 EN 12100 2 2011 03 Electromagnetic Emission EN 61000 6 3 2007 09 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 10 The person authorized to compile the technical file is Siegmar Klein Address see manufacturer s address December 14 2011 i P Karlsruhe Germany A KLAr TILL EK Dr Karl Spanner President Physik Instrumente PI GmbH amp Co KG Auf der Roemerstra e 1 76228 Karlsruhe Germany PIEZO NANO POSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www pi ws BESTE e A 64 Version 1 1 0 MS202E H 850 Hexapod Microrobot
25. e the six M6x30 screws 40 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 7 Maintenance Figure 13 Transport lock on the moving platform 1 Transport lock 2 Moving platform 3 Plastic flat washer 3 Position the transport lock 1 on the Hexapod so that the holes in the braces of the transport lock are above the corresponding holes in the moving platform 2 and the base plate of the Hexapod see figures in Unpacking p 21 If the Hexapod system is defective the holes in the Hexapod and transport lock may not be congruent because the Hexapod has not reached the transport position Do not attach the transport lock and continue with step 7 4 Push the plastic flat washers 3 between the holes in the Hexapod and the transport lock 5 Fasten the transport lock with 2 screws M6x30 to the moving platform The screw heads must be located on the bottom side of the moving platform H 850 Hexapod Microrobot MS202E Version 1 1 0 41 7 Maintenance Figure 14 Transport lock on the base plate 6 10 11 12 13 14 15 16 17 Fasten the transport lock with 4 screws M6x20 on the side of the base plate see figure Pack the Hexapod in a plastic foil to protect it against dirt Open the outer box Remove the foam cover Open the inner box Remove the foam cover Hold the Hexapod by the transport lock or the base plate and place it in the foam insert of the inn
26. er box If the transport lock could not be attached stabilize the Hexapod by adding additional packaging material e g foam inserts Insert the foam cover in the inner box Close the inner box Insert the foam cover in the outer box Close the outer box Secure the box on the pallet 42 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 3 Cleaning the Hexapod Prerequisites v You have disconnected the Hexapod from the controller Cleaning the Hexapod gt Do not use any organic solvents Only when the Hexapod is not used in vacuum gt When necessary clean the surfaces of the Hexapod with a cloth slightly dampened with a mild cleanser or disinfectant Only when the Hexapod is used in vacuum gt Only touch the Hexapod with powder free gloves gt f necessary wipe the Hexapod clean H 850 Hexapod Microrobot MS202E Version 1 1 0 43 PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting Unexpected Cable broken Hexapod behaviour Connector or soldered joints loosened The Hexapod does Warped base plate not achieve the specified accuracy Increased wear due to small motions over a long period of time The Hexapod does Worn drive screw not move Foreign body has entered the drive screw Faulty motor Blocked or broken joint Dirty encoder Check the data transmission and power supply cables Replace the ca
27. er calculates the settings for the individual struts from the target positions given for the translational and rotational axes The velocities and accelerations of the struts are calculated in such a way that all struts start and stop at the same time After the Hexapod controller has been switched on or restarted the Hexapod has to complete a reference move in which each strut moves to its reference point switch After the reference move the moving platform is in the reference position and can be commanded to move to absolute target positions For more information see the user manual of the Hexapod controller H 850 Hexapod Microrobot MS202E Version 1 1 0 15 3 Product Description P I 3 6 4 Motion The platform moves along the translational axes X Y and Z and around the rotational axes U V and W Figure 2 XYZ coordinate system and rotations to the rotation coordinates U V and W The coordinate system is depicted above the platform for better clarity Translation Translations are described in the spatially fixed XYZ coordinate system The translational axes meet at the origin of the XYZ coordinate system 0 0 0 For more information see the glossary p 59 Rotation Rotations take place around the rotational axes U V and W The rotational axes meet at the pivot point For more information on the pivot point see the glossary p 59 In contrast to the spatially fixed translational axes the rotational axes and thus
28. gure 18 H 810 Hexapod the platform of which has been moved in X 1 Cable outlet H 850 Hexapod Microrobot MS202E Version 1 1 0 61 PIEZO NANO POSITIONING WWW PI WS 13 Appendix 13 Appendix In this Chapter Explanations of the Performance Test Sheet cccccccssscceeeeeseeeeeeeeeseeeeeeeeeeeeeeseees 63 EC Declaration of GC hlormily u nennen een ee ee 64 13 1 Explanations of the Performance Test Sheet The Hexapod is tested for the positioning accuracy of the translational axes before delivery The performance test sheet is included in the scope of delivery The following figure shows the test setup used 1 F _ 3 Figure 19 Test setup for measuring the X or Y axis 1 Laser interferometer 2 Mirror 3 Bench The following test cycles are performed Movement over the entire travel range with at least 20 measuring points in at least five cycles Movement over partial sections e g 1 mm in increments of e g 10 um H 850 Hexapod Microrobot MS202E Version 1 1 0 63 13 Appendix P I 13 2 EC Declaration of Conformity PI Declaration of Conformity according to DIN EN ISO IEC 17050 1 Manufacturer Physik Instrumente PI GmbH amp Co KG Manufacturer s Auf der Roemerstra e 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name Hexapod Microrobot Mode Numbers H 850 Product Options all complies with all relevant provisions of th
29. h Excellent Position Repeatability DC Motor Gearhead 0 15 mm s 80 kg Load Vacuum Compatible to 10 hPa H 850 G1 Hexapod Microrobot with Excellent Position Repeatability DC Motor Gearhead 8 mm s 50 kg Load H 850 GV Hexapod Microrobot with Excellent Position Repeatability DC Motor Gearhead 2 5 mm s 25 kg Load Vacuum Compatible to 10 hPa Standard versions of the C 887 Hexapod controller C 887 11 6 D Hexapod Controller Control of 2 Additional Servo Motor Axes Included TCP IP and RS 232 Interface 19 Chassis C 887 21 6 D Hexapod Controller TCP IP and RS 232 Interface Bench Top Standard cable sets C 887 A03 Cable Set for Hexapod 3 m consisting of Data transmission cable MDR68 to MDR68 1 1 K040B0034 Power supply cable M12m 180 to M12f 90 K060B0111 10 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description C 887 V02 Cable Set for Hexapod 2 m Vacuum Side Cable Feedthrough 3 m Air Side Cable consisting of Data transmission cable on the vacuum side MDR68m to HD Sub D 78m 2 m M824B0010 Power supply cable on the vacuum side LEMO 2 pin to LEMO 2 pin 2 m KO60B0132 Vacuum feedthrough for data transmission HD Sub D 78m f 4668 Vacuum feedthrough for power supply LEMO 2 pin to M12m C887B0002 Data transmission cable on the air side HD Sub D 78f to MDR68m 3 m K040B0092 Power supply cable on the air side M12m to M12f
30. ill being displayed no manuals are available Contact our customer service department p 47 Click Documents Click the desired manual and save it on the hard disk of your PC or on a data storage medium H 850 Hexapod Microrobot MS202E Version 1 1 0 3 PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter apo IS AAA o yn 5 General Safety Instructions ccccccccccoconnnccnnnnononononnncnnnnnonononanenononononnnnnnnnnnnnnnnonenannnnnns 5 2 1 Intended Use The Hexapod microrobot in short Hexapod is a laboratory device in accordance with DIN EN 61010 1 It is intended to be used in interior spaces and in an environment that is free of dirt oil and lubricants Based on its design and realization the Hexapod is intended for positioning adjusting and shifting of loads in six axes at various velocities The Hexapod is part of a Hexapod system The intended use of the Hexapod is only possible in connection with the Hexapod controller which is part of the Hexapod system and coordinates all motions of the Hexapod 2 2 General Safety Instructions The H 850 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the H 850 gt Only use the H 850 for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely
31. ition U 10 V 10 U and V parallel to the platform level 18 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 The W axis is commanded to move to position 10 The rotation takes place around the rotational axis W which was tilted during the previous rotations The W axis is always vertical to the platform level The rotation around the W axis tilts the rotational axes U and V W A Figure 5 Rotation around the W axis fil Platform in reference position Platform position U 10 V 10 W 10 U and V parallel to the platform level W vertical to the platform level For more data on the travel ranges see the Specifications section p 49 H 850 Hexapod Microrobot MS202E Version 1 1 0 19 PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacking The Hexapod is delivered in a special packaging with adapted foam inserts and with a transport lock installed NOTICE Impermissible mechanical load An impermissible mechanical load can damage the Hexapod gt Only send the Hexapod in the original packaging gt Only hold the Hexapod by the transport lock or the base plate INFORMATION When handling the vacuum version of the Hexapod attention must be paid to appropriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder free gloves are worn Afterwards the Hexapod is cleaned once again by
32. llowing maintenance measures are required 7 1 Carrying out a Maintenance Run Frequent motions over a limited travel range can cause the lubricant to be unevenly distributed on the drive screw gt Carry out a maintenance run over the entire travel range at regular intervals see user manual of the Hexapod controller The more often motions are carried out over a limited travel range the shorter the time between the maintenance runs has to be H 850 Hexapod Microrobot MS202E Version 1 1 0 39 7 Maintenance gt I 7 2 Packing the Hexapod for Transport NOTICE Impermissible mechanical load An impermissible mechanical load can damage the Hexapod gt Only send the Hexapod in the original packaging gt Only hold the Hexapod by the transport lock or the base plate INFORMATION The figures in the following section show an H 840 Hexapod The transport lock of the H 840 is attached the same way as with the H 850 Accessories Original packaging p 13 Transport lock p 21 Packing the Hexapod 1 Command the Hexapod to move to the reference position X Y U V 0 23 W 6 2 Uninstall the Hexapod system a Remove the load from the moving platform of the Hexapod b Power down the Hexapod controller c Remove the data transmission cable and the power supply cable from the Hexapod controller and the Hexapod d Loosen the six M6x30 screws with which the Hexapod is mounted ona surface e Remov
33. nanens 9 3 2 los LEO AA ee ee E 10 3 3 0 De O O PP 12 3 4 SCRDEOL DEINEN ne 13 3 5 ee ONS EE ne nee 14 3 6 LE eg 010100 EEE nr 15 3 6 1 MEN 15 3 6 2 Reference Point Switch and Limit Switches rrrrrrnnnnrrorrrnnnnrrvnnnnnn 15 3 6 3 BONO REE ENE 15 3 6 4 MO 16 4 Unpacking 21 5 Installation 23 5 1 General Notes on Installation ooccccccoconncnnccononnnnnnnnnnanennnnononnnnnonononnnnnnnonnns 23 5 2 Determining the Permissible Load and Working Space occccccocccnccconcnnoconcnncnnos 24 5 3 Attaching the snap on ferrite Suppressor eeennnnneennennnennennnnnnennnne nennen nennne nenne 25 5 4 Grounding the Hexapod ccoo irreal 26 5 5 Mounting the Hexapod on a Surface ooooccnccccccncccnccononnconnnononnnonnnnnnnncnnononnanennnnos 26 5 6 Affixing the Load to the Hexapod oooocccccccccocconccoconcconnnononncnnonononnconononancnnnonnnnncons 28 10 11 12 13 5 7 Connecting the Cable Set to the Hexapod oooccccccccocccnncccconnconccononncononononnconononnns 5 7 1 Connecting the C 887 A03 Standard Cable Set 5 7 2 Connecting the C 887 V02 Standard Cable Set for Vacuum V OF SIONS EE ren 5 7 3 Connecting the cable set with line driver boxes to the PU Start Up 6 1 GenerallNoles on Star UP nenne see aaa aa 6 2 Starting Up the Hexapod System ococoooccnnccccnoccnncoconononnnnnnnancnnnnononncnnnnonnnncnnnnnnnas Maintenance 7 1 Carrying out a Maintenance Run rrnnnnrnennrnnnnnrv
34. nearly decreasing until relative humidity of 50 at 40 C Degree of protection IP20 according to IEC 60529 Area of application For indoor use only Maximum altitude 2000 m 52 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 Dimensions All figures show the Hexapod in the reference position Dimensions in mm Note that the decimal places are separated by a comma in the drawings 328 4 J mn Figure 15 H 850 Hexapod front view dimensions in mm The 0 0 0 coordinates refer to the origin of the XYZ coordinate system When the default settings of the Hexapod controller are used and the Hexapod is in the reference position the pivot point is located at the origin of the XYZ coordinate system H 850 Hexapod Microrobot MS202E Version 1 1 0 53 PI 10 Technical Data un SPIS WONOA yA pl y a p8 bottom side p8 Figure 16 H 850 Hexapod top view dimensions in mm H 850 Hexapod Microrobot MS202E Version 1 1 0 54 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 4 Pin Assignment 10 4 1 Power Supply Connection Not for vacuum versions Power supply via 4 pin A coded M12 panel plug 3 0 O 4 DAA Only for vacuum versions power supply via 2 pin LEMO panel plug male type ECJ 1B 302 CLD 10 4 2 Data Transmission Connection Data transmission between the Hexapod and the Hexapod controller MDR68 socket H 85
35. nstallation space Dimensions and position of the load Pivot point The pivot point describes the center of rotation intersection of the rotational axes U V and W When the standard settings for the pivot point coordinates are used the pivot point is located at the origin of the XYZ coordinate system after a reference move see the dimensional drawing p 53 for more information The pivot point is shifted along with the platform during translations Rotations do not change the position of the pivot point The pivot point coordinates remain unchanged in both cases The pivot point coordinates can be changed in the Hexapod controller XYZ coordinate system The position and orientation of the Cartesian XYZ coordinate system cannot be changed which is why the system is referred to as spatially fixed The axes X Y and Z are referred to as translational axes The intersection of the axes of the spatially fixed Cartesian XYZ coordinate system 0 0 0 is referred to as the origin The Z axis is always perpendicular to the base plate of the Hexapod H 850 Hexapod Microrobot MS202E Version 1 1 0 59 12 Glossary P I The following example figures of the H 810 Hexapod show that the XYZ coordinate system does not move along with motions of the platform Figure 17 H 810 Hexapod in the reference position 1 Cable outlet 60 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 12 Glossary Fi
36. onnnonononnnnnnnnnnononananennnnnnnss 2 LOW MIC AGING Manuals EN oera sE oa e Eana Ea 3 1 1 Goal and Target Audience of this User Manual This manual contains information on the intended use of the H 850 It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual A Dangerous situation If not avoided the dangerous situation will result in minor injury gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation H 850 Hexapod Microrobot MS202E Version 1 1 0 1 About this Document gt I INFORMATION Information for easier handling tricks tips etc Symbol Label Meaning Action consisting of several steps whose sequential order o must be observed gt Action consisting of one or several steps whose sequential order is irrelevant a List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface Warning sign on the product which refers to detailed information in this manual 1 3 Other Applic
37. ounted the Hexapod on a surface and affixed the load to the Hexapod according to the instructions in Installation p 23 v You have read and understood the user manual of the Hexapod controller Accessories Hexapod controller belonging to the Hexapod system PC with suitable software see user manual of the Hexapod controller Starting up the Hexapod system 1 Connect the Hexapod to the Hexapod controller see user manual of the Hexapod controller 2 Start up the Hexapod controller see user manual of the Hexapod controller 3 Operate a few motion cycles for testing purposes See user manual of the Hexapod controller 38 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter Carrying out a Maintenance RUN ccccccnccnccccccnncnnnccconnnnnnnnnnnnnnnnononnnnnnnonnnnnnnnnnnnanennnnnnnns 39 Packing the Hexapod for Transport ooccccccoccnccconcnncconcnnnononcnnononnnnononnnnnnnancnnonanennnnoness 40 Cleaning the Hexapod ccccccccccccconcccnnncconononononononononononnnononnnonononannnnnnnnnnnnnnnrnnnnnnnnnnnnanness 43 NOTICE Damage due to improper maintenance The Hexapod can become misaligned as a result of improper maintenance The specifications can change as a result p 49 gt Only loosen screws according to the instructions in this manual Depending on the operational conditions and the period of use of the Hexapod the fo
38. program Hexapod Simulation Software is installed For more information see the manual of the Hexapod controller Determining the working space and permissible load of the Hexapod gt Follow the instructions in the manual of the Hexapod controller to determine the working space and the limit value for the load of the Hexapod with the simulation program The limit values in the following table are for orientation They only apply when the center of mass is at the origin of the XYZ coordinate system 0 0 0 Servo mode switched on Servo mode switched off for for Hexapod Hexapod Max load capacity Max holding force Mounting position of Mounted Mounted as Mounted Mounted as the base plate horizontally desired horizontally desired prosoma foo faen foon ser Joe fe jeon CI If you need help in determining the limit value for the load or determining the working space gt Contact our customer service department p 47 24 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 3 Attaching the snap on ferrite suppressor Figure 7 Power supply cable of the Hexapod with snap on ferrite suppressor 1 Power supply cable of the Hexapod 2 Snap on ferrite suppressor 000015165 3 Connector M 12 for connection to the controller INFORMATION The snap on ferrite suppressor 000015165 is included in the scope of delivery of the Hexapod system The snap on ferrite suppressor
39. so that the HD Sub D socket 78f is in the vacuum chamber 2 Install the vacuum feedthrough for the power supply C887B0002 a Provide the vacuum chamber with an opening of 12 mm in diameter The flange must not be more than 28 mm thick b Install the vacuum feedthrough so that the 2 pin LEMO connection is in the vacuum chamber Connecting the C 887 V02 standard cable set to the Hexapod gt Connect the Hexapod cable set and vacuum feedthroughs with each other as shown in the connection diagram below Observe the assignment that is specified by the labeling on the sockets conneciors and cables When handling MDR68 connectors proceed as described in Connecting the C 887 A03 Standard Cable Set p 31 Observe the mechanical coding of connectors and sockets Do not use force gt Do not connect the cable set to the Hexapod controller yet H 850 Hexapod Microrobot MS202E Version 1 1 0 33 5 Installation Controller M12 4 pin MOR 68 pin K060B0112 K040B0092 C887B0002 4668 K060B0132 M824B0010 1 m M12 4 pin MDR 68 pin PI K060B0112 3 m C887B0002 K060B0132 2 m Hexapod f f m M12 LEMO LEMO 4 pin 2 pin 2 pin K040B0092 3 m M824B0010 2 m f m f e T1 HDD HD D HD D SUB 78 SUB 78 5SUB 78 SUB 78 Figure 11 Connection diagram for C 887 V02 standard cable set for vacuum versions Power supply cable on the air side M12m to M12f 3 m
40. the pivot point as well move along with the platform see also the example below for consecutive rotations A given rotation in space is calculated from the individual rotations in the sequence U gt V gt W 16 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description INFORMATION The dimensional drawing p 53 contains the following Alignment of the XYZ coordinate system Position of the pivot point after the reference move when the standard settings of the Hexapod controller are used Example Consecutive rotations INFORMATION For a clearer view the figures have been adapted as follows Round platform replaced by T shaped platform XYZ coordinate system shown shifted Pivot point in the top left corner of the platform 1 The U axis is commanded to move to position 10 The rotation around the U axis tilts the rotational axes V and W Figure 3 Rotation around the U axis E Platform in reference position Platform position U 10 U parallel to spatially fixed X axis H 850 Hexapod Microrobot MS202E Version 1 1 0 17 3 Product Description P I 2 The V axis is commanded to move to position 10 The rotation takes place around rotational axis V which was tilted during the previous rotation The rotation around the V axis tilts the rotational axes U and W a Figure 4 Rotation around the V axis DU Platform in reference position Platform pos
41. tion p I Mounting the Hexapod 1 Make the necessary holes in the surface Six M6 threaded holes for mounting with M6x30 screws Optional Two locating holes with 8 mm H7 to accommodate locating pins The arrangement of the six mounting holes as well as the two locating holes in the base plate of the Hexapod can be found in the dimensional drawing p 53 The locating holes are on the bottom side of the base plate labeled in the dimensional drawing as bottom side 2 If you use locating pins to align the Hexapod a Insert the locating pins into the locating holes in the Hexapod or the surface b Place the Hexapod on the surface in such a way that the locating pins are inserted into the corresponding locating holes on the other side 3 Mount the Hexapod on the six mounting holes in the base plate using the included screws 5 6 Affixing the Load to the Hexapod NOTICE dh Impermissible mechanical load and collisions Impermissible mechanical load and collisions between the Hexapod the load to be moved and the surroundings can damage the Hexapod gt Make sure that the installed load observes the limit value resulting from the load test p 24 gt Avoid high forces and torques on the moving platform during installation gt Make sure that no collisions between the Hexapod the load to be moved and the surroundings are possible in the working space of the Hexapod 28 Version 1 1 0 MS202E H 850 Hexapod
42. ver box for data transmission cable controller side Line driver box for data transmission cable Hexapod side Short data transmission cable MDR68 to MDR68 1 1 3 m Long data transmission cable MDR68 to MDR68 1 1 Power supply cable for line driver box with M12 coupling M12 connector 9 OA O ND Power supply cable for Hexapod with M12 coupling M12 connector gt For the length of the cables 4 5 and 6 and the item IDs of the components see Optional Accessories p 14 H 850 Hexapod Microrobot MS202E Version 1 1 0 35 PIEZO NANO POSITIONING WWW PL WS 6 Start Up 6 Start Up In this Chapter General Notes on Start UP oooonccnnnnccccccconcccnnncconononnncnnnnnonononannnnnnnnnnnnnnnnnennnnnnnnnnnanncnnns 37 Starting Up the Hexapod System occooocccccccccoccnnnccconononncononncnnnononnnnnnnononnnnnnnononnnnnnnnnons 38 6 1 General Notes on Start Up Risk of crushing by moving parts A There is a risk of minor injuries caused by crushing which can occur between the moving parts of the Hexapod and a stationary part or obstacle gt Keep your fingers away from areas where they can get caught by moving parts NOTICE Incorrect configuration of the Hexapod controller The configuration data used by the Hexapod controller e g geometrical data and servo control parameters must be adapted to the Hexapod If incorrect configuration data is used the Hexapod can be damaged by uncontrolled motions or collisions
43. vice department p 47 C030B0012 K040B0034 K040B0186 K060B0126 K060B0127 C030B001 1 C030B0012 K040B0034 K040B0440 K060B0160 K060B0161 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 6 Technical Features 3 6 1 Struts The Hexapod has six adjustable length struts Each strut carries out linear motions Each set of settings of the six struts defines a position of the moving platform in six degrees of freedom three translational axes and three rotational axes Each strut is equipped with the following components One actuator Reference and limit switches Joints for connecting to the base plate and moving platform The actuator contains the following components DC motor with rotary encoder Gearhead Drive screw 3 6 2 Reference Point Switch and Limit Switches The reference point switch of a strut functions independently of the angular positions of the strut ends and the lengths of the other struts When a limit switch is activated the power source of the motor is switched off to protect the Hexapod against damage from malfunctions 3 6 3 Control The Hexapod is intended for operation with the Hexapod controller which belongs to the Hexapod system The Hexapod controller makes it possible to command motion of individual axes combinations of axes or all six axes at the same time in a single motion command The Hexapod controll
44. vnnnnnnnrenvnnnnnnennnnnnnnnsnnnnnnnnnsennnnnn 7 2 Packing the Hexapod for TranSport ccoooonccnncccconccnnccnnonccnncnonancnnnonnnnnnnnnnnnnanennnnss 7 3 Cleaning the Hexapod rrrnnnrnnnnnnrvnrnnnnvnnnnnnrnnnnnnsvnnnnnnrnnnnnnsnnnnnnssnnnnsnsnnnnnnsnnnnnnee Troubleshooting Customer Service Technical Data 10 1 A e e UOC E 0 O A 10 1 1 A 10 1 2 Maximum Rating S un EE smn tenes 10 1 3 Specifications for Vacuum Compatible Versions 10 2 Ambient Conditions and Classifications ooonncnccccconnconccononnnnncnonannnnnononanenns 10 3 DIMENSION S score 104 PNASSOnNMeN anne 10 4 1 Power Supply Connection occccccccocccncccccncccnncnnnannnnnonnnancnnnnnnnancnnnnnnnos 10 4 2 Data Transmission CONNECTION occccccoccncccoccnnccnonnnnonononnnnonnnnnonanennos Old Equipment Disposal Glossary Appendix 13 1 Explanations of the Performance Test Sheet ooooooncccnncccccononncccnnnccnnnnnannnnnnnnnnos 13 2 EC Declaration of Conformity ccccccccccoconnnccnnnccconononnnononononononnncnnnononononanennnnnnnos PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual rrrrnnnnnnnnnnnnnnnrvrvnnrrnnnnnrrrrvnnnrnnnnnnnnne 1 Symbols and Typographic Conventions cccccccccccconnccnnnccnnonononccnnnnnnnonnnnnnonononononenanennnos 1 Other Applicable DOCUMENTS cccccccnccconnccnnnnccccononnccnnnnnononononon
45. wiping and shrink wrapped twice in vacuum compatible film gt Only touch the Hexapod with powder free gloves gt If necessary wipe the Hexapod clean after unpacking Figure 6 Transport lock of the Hexapod 1 Hexapod with installed transport lock 2 Transport lock with fixing screws H 850 Hexapod Microrobot MS202E Version 1 1 0 21 4 Unpacking PI Tools and accessories Allen wrench 5 0 from the supplied screw set p 13 Unpacking the Hexapod 1 2 3 4 5 6 Open the outer box Remove the foam cover Open the inner box Remove the foam cover Hold the Hexapod by the transport lock and take it out of the foam insert Compare the contents against the items covered by the contract and against the packing list If parts are incorrectly supplied or missing contact PI immediately Inspect the Hexapod for signs of damage If you notice signs of damage contact PI immediately Remove the transport lock a Use the Allen wrench to loosen the 4 screws M6x20 with which the transport lock is laterally fastened to the base plate b Use the Allen wrench to loosen the 2 screws M6x30 with which the transport lock is fastened to the moving platform The screw heads are located on the bottom side of the moving platform c Remove the 6 loosened screws and the corresponding plastic flat washers d Remove the transport lock Keep all packaging materials and the transport lock in case the product needs
46. xapod the load to be moved and the surroundings are possible in the working space of the Hexapod Do not place any objects in areas where they can get caught by moving parts Immediately stop the motion if a malfunction occurs in the Hexapod controller see user manual of the Hexapod controller Damage can occur to the Hexapod if the transport lock of the Hexapod has not been removed and a motion is commanded gt Remove the transport lock before you start up the Hexapod system 2 2 6 Safety Measures during Maintenance The Hexapod can become misaligned as a result of improper maintenance The specifications p 49 can change as a result gt Do not loosen any screws 8 Version 1 1 0 MS202E H 850 Hexapod Microrobot PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Features and AppliCatiONS oooccccccnnccccnnccncnnononononannnononononnnnononnnonannnnnnnnnnnnnnononenenanos 9 Model Overview rrrrnrnnnnnnnnnnnnnnvnnnnnnnnnnnnennnnnnnnnnennnnnnnnnnennnnennennnnnnnennnnnennnnennennnnnenennunnn 10 Product KRER NERE RENEE REE SEE EEE EE EE 12 SE NNN esse ee ee me ee eooneeaen 13 AECESSOM S rr een ee een 14 Technical Features atan idad 15 3 1 Features and Applications The H 850 Hexapod is offered in four models that have different maximum velocities load capacities as well as different suitability for use in a vacuum Models for higher velocities Velo
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