model 4200 semiconductor characterization system
Contents
1. 14 co OC m CON Data Sheet The Data sheet displays test results in real time It is read only so that results cannot be modified Calc Sheet A spreadsheet that operates much like a standard Microsoft Excel spreadsheet is avail able for computation with each test The spreadsheet tool supports these functions Functions in the KITE Calc sheet ABS ACOS ACOSH ASIN ASINH ATAN ATAN2 ATANH AVERAGE COS COSH EXP FIXED IF LN LOG LOG10 LOOKUP MATCH MAX MIN NOW PI PRODUCT ROUND SIGN SIN SINH SQRT STDEVP SUM SUMSQ TAN TANH VARP Settings Sheet The settings sheet stores the test setup so that when the sheet tab is exported as a work book users can refer to the test configuration Append Sheet Append sheets store test results when the Append button is clicked Data in Append sheets is automatically plotted on the graph Test modules support up to twenty Append sheets 11 MODEL 4200 SCS SEMICONDUCTOR CHARACTERIZATION SYSTEM 12 Graph Tab Plotting The Graph Tab is a full featured plotting tool for creating report ready graphs It allows real time X Y plotting of acquired and extracted data with one or two Y axes Linear Semilog and Log Log graphs Real time auto scaling end of test auto scaling or manual scaling Sixcursors with X Y readout Graphical line fitting Plot overlay of multiple test executions Four data variable readouts2. Data Storage Fixed disk Internal high capacity fixed disk drive stores the operating system application programs and data files 1 44MB Flexible Diskette Drive Standard 3 5 inch 1 44MB flexible diskette drive Connectivity The 4200 SCS includes a 3COM 10baseT Ethernet Card with software drivers installed MODEL 4200 SCS SEMICONDUCTOR CHARACTERIZATION SYSTEM The Keithley Interactive Test Environment KITE The Keithley Interactive Test Environment KITE is the Model 4200 SCS Windows device characterization application It provides advanced test definition parameter analysis and graphing and automation capabilities required for modern semiconductor characterization KITE Projects A project is a collection of related tests organized in a hierarchy that parallels the physi cal layout of the devices on a wafer KITE operates on projects using an interface called the project navigator The project navigator simplifies organizing test files test execution and test sequencing The project navigator organizes tests into a logical hierarchy presented in a browser style format This structure allows users to define projects around wafer testing E B mosfet tests E subsite Ek Aterminal The subsite level organizes devices and controls subsite test sequencing Mr igg E subit The device level organizes test modules manages test module libraries and controls E vdsid device test sequencing The project level organ
3. User formatted comment box title and axis labels Definition Sheet Graph Status NMOS Drain Family T j 5 E a o amp E f a Drain Voltage V Output Files Sheet tab test results can be saved as a Microsoft Excel Workbook or delimited ASCII text file Plots can be saved as bit map image bmp files Display Flat Panel 800 by 600 resolution External SVGA 1024 by 768 or 800 by 600 resolution Printers A generic printer driver is factory installed using standard Windows NT printer support TECHNICAL DATA Example Projects The 4200 SCS includes the following KITE projects to facilitate rapid startup and provide examples for common semiconductor lab applications 1 DEFAULT The default project includes standard tests for MOSFETs BIPOLAR transistors resistors and diodes This project helps users to get started quickly 2 IVSWITCH The ivswitch project integrates control of a Keithley Model 707 or Model 708 external switch matrix with device testing 3 IVCVSWITCH The ivcvswitch project integrates control of the Keithley Model 590 C V Analyzer the HP 4284 and a Keithley switch matrix to configure a combined I V C V characterization station This project includes extractions of High Frequency C V parameters for both the Agilent 4284 and Keithley 590 including High Frequency C V and G or R vs V with extraction of Oxide Capacitance Effective Oxide Charge Density Oxide Thickne
4. SUPPLEMENTAL INFORMATION Supplemental information is not warranted but provides useful infor mation about the 4200 SMU 4210 SMU and 4200 PA COMPLIANCE ACCURACY Voltage compliance equals the voltage source specifications Current compliance equals the current source specifications OVERSHOOT lt 0 1 typical Voltage Full scale step resistive load and 10mA range Current 1mA step R 10kQ 20V range RANGE CHANGE TRANSIENT Voltage Ranging lt 200mV Current Ranging lt 200mV ACCURACY SPECIFICATIONS Accuracy specifications are multiplied by one of the following factors depending upon the ambient temperature and humidity RELATIVE HUMIDITY TEMPERATURE 5 60 60 80 10 18 C x3 x3 18 28 C xl x3 28 40 C x3 x5 REMOTE SENSE lt 10Q in series with FORCE terminal not to exceed a 5V difference between FORCE and SENSE terminals 30V maximum between COMMON and SENSE LO MAXIMUM LOAD CAPACITANCE 10nE MAXIMUM GUARD OFFSET VOLTAGE 3mV from FORCE GUARD OUTPUT IMPEDANCE 100kQ MAXIMUM GUARD CAPACITANCE 1500pE MAXIMUM SHIELD CAPACITANCE 3300pE 4200 SMU and 4210 SMU SHUNT RESISTANCE FORCE to COMMON 21070 100nA 1pA ranges 4200 PA SHUNT RESISTANCE FORCE to COMMON gt 10 6Q 1pA and 10pA ranges gt 10Q 100pA 100nA ranges OUTPUT TERMINAL CONNECTION Dual triaxial connectors for 4200 PA dual mini triaxial connectors for 4200 SMU and 4210 SMU NOISE CHARACTERISTICS typical Voltage Source
5. age sourcing and measuring particularly at currents greater than approximately 10mA The configuration provides eight instrument inputs with up to 72 output pins with less than 100pA offset current Each crosspoint provides HI LO and GUARD signal switching 4200 GP RS XX TYPICAL BLOCK DIAGRAM 3 uninreniissisi dier nie SI ee placera 4200 MTRX 2 4200 MTRX 2 4200 MTRX 2 4200 MTRX 2 Screw I Terminals 4200 MTRX 2 Strip 4200 MTRX 2 amp Tin 4200 MTRX 2 4200 MTRX 2 4200 MTRX 2 4200 MTRX 2 590 C V Meter IN OUT TIEI QQM m wc Pins 1 12 Pins 13 24 Pins 61 72 7078 MTC 20 7078 MTC 20 7078 MTC 20 HP4284 or 707A 4200 GP RS 12 or 12 707A 4200 GP RS 24 36 48 60 72 708A or 707A Switch Mainframe 707A Switch Mainframe 7071 Switch Card 7071 for each 12 pins 7078 MTC 20 Cable 7078 MTC 20 Cable for each 12 pins 7007 1 IEEE Cable 7007 1 IEEE Cable 7078 PEN Light Pen 7078 PEN Light Pen Maximum Signal Level 200V 1A Offset Current 100pA Maximum Leakage 100pA V 3dB Bandwidth 5MHz typical Connector Type Quick disconnect using 38 pin connectors or screw terminals TECHNICAL DATA Cabinets and Mounting Accessories 4200 CAB 20UX 4200 CAB 25UX 4200 CAB 34UX 4200 RM 4200 CRT RM 4200 KEY RM Model 2288 1G 20U Cabinet 35 in 25U Cabinet 44 in 34U Cabinet 60 in Slide Rack Mounting Kit for 4200 SCS F and 4200 SCS C Fixed Rack Mounting Kit
6. rms 0 01 of output range Current Source rms 0 1 of output range Voltage Measure p p 0 02 of measurement range Current Measure p p 0 2 of measurement range MAXIMUM SLEW RATE 0 2V us ADDITIONAL SPECIFICATIONS MAX OUTPUT POWER 22 watts for 4210 SMU and 2 2 watts for 4200 SMU both are four quadrant source sink operation DC FLOATING VOLTAGE COMMON can be floated 32 volts from chas sis ground VOLTAGE MONITOR SMU in VMU mode MEASURE VOLTAGE MEASURE ACCURACY RANGE RESOLUTION rdg volts 200 V 200 uV 0 015 3mV 20 V 20 pV 0 01 ImV 2 V 2yV 0 012 110 pV 200 mV luV 0 012 80 nV INPUT IMPEDANCE gt 10Q INPUT LEAKAGE CURRENT lt 30pA MEASUREMENT NOISE 0 02 of measurement range rms DIFFERENTIAL VOLTAGE MONITOR Differential Voltage Monitor is available by measuring with two SMUs in VMU mode or by using the low sense terminal provided with each SMU GROUND UNIT Voltage error when using the ground unit is included in the 4200 SMU 4210 SMU and 4200 PA specifications No additional errors are intro duced when using the ground unit OUTPUT TERMINAL CONNECTION Dual triaxial 5 way binding post MAXIMUM CURRENT 2 6A using dual triaxial connection 4 4A using 5 way binding posts LOAD CAPACITANCE No limit CABLE RESISTANCE FORCE lt 1 SENSE x100 MODEL 4200 SCS SEMICONDUCTOR CHARACTERIZATION SYSTEM TEMPERATURE RANGE Operating 10 to 40 C Storage
7. Configuration 4200 UL LS XX The Ultra Low Current Local Sense switch configuration is built using the Keithley Model 7174A Low Current Matrix Card which is designed for semiconductor research develop ment and production applications requiring high quality high performance switching of I V and C V signals This configuration provides eight instrument inputs with up to 72 out put pins at only 10fA typical offset current 4200 PA 4200 TRX 2 ins I apenas 2 M nai 4200 TRX 2 590 C V Meter IN OUT 7078 TRX BNC u J Pins 1 12 Pins 13 24 Pins 61 72 4200 TRX 3 4200 TRX 3 4200 TRX 3 HP4284 or 707A Coax tees not included 4200 UL LS 12 or 12 707A 4200 UL LS 24 36 48 60 72 4200 590 708A or 707A Switch Mainframe 7174A Switch Card 4200 TRX 3 Cable 7007 1 IEEE Cable 7078 TRX BNC Adapter 7078 PEN Light Pen 707A Switch Mainframe 7174A for each 12 pins 4200 TRX 3 Cable for each 12 pins 7007 1 IEEE Cable 7078 TRX BNC Adapter 7078 PEN Light Pen 590 100k 1M C V Meter 7078 TRX BNC Adapter 7007 1 IEEE Cable Connector Type 3 lug Triax Maximum Signal Level 200V 2A Offset Current 100fA max 10fA typical Maximum Leakage 0 01pA V 3dB Bandwidth 30MHz typical 21 MODEL 4200 SCS SEMICONDUCTOR CHARACTERIZATION SYSTEM 22 Ultra Low Current Remote Sense Configuration 4200 UL RS XX Remote sensing is more accurate for voltage sourcing and measurin
8. Printed in the U S A 9 Kallang Place Unit 01 09 Singapore 339154 Tel 65 295 2323 Fax 65 298 2333 No 2199 202500IK
9. drive CD ROM Source Measure Units Each system can be configured with up to six additional SMUs for a total of eight SMUs Two different SMU models are available a medium power 100mA 2W version Model 4200 SMU and a high power 1A 20W version Model 4210 SMU The system can sup port up to four high power SMUs Optional SMUs are installed beginning with the medium power version first then the high power version 4200 SCS Source Measure Units Maximum Maximum Maximum Voltage Current Power 4200 SMU medium power 210V 100mA 2W 4210 SMU high power 210V 1A 20W Remote PreAmp The low current measurement capabilities of any SMU can be extended by adding an optional Remote PreAmp Model 4200 PA The 4200 PA provides 0 1fA resolution by effectively adding five current ranges to either SMU model The PreAmp module is fully integrated with the system to the user the SMU simply appears to have additional meas urement resolution available The Remote PreAmp is shipped installed on the back panel of the 4200 SCS for local operation This installation allows for standard cabling to a prober test fixture or switch matrix Users can remove the PreAmp from the back panel and place it in a remote location such as in a light tight enclosure or on the prober platen to eliminate measurement problems due to long cables Platen mounts and triax panel mount accessories are available Remote PreAmps are installed at the factory in numeri cal o
10. for 4200 CRT Slide Rack Mounting Kit for standard keyboard and pointing device Model 590 Rack Mount Kit Additional Cables and Connectors 4200 RPC 0 3 4200 RPC 2 4200 RPC 3 4200 RPC 6 4200 TRX 0 3 4200 TRX 1 4200 TRX 2 4200 TRX 3 4200 MTRX 1 4200 MTRX 2 4200 MTRX 3 236 ILC 3 7007 1 7007 2 7078 TRX BNC Remote PreAmp Cable 0 3m for use inside prober shield Remote PreAmp Cable 2m for remote location of 4200 PA one included with each 4200 PA Remote PreAmp Cable 3m for remote location of 4200 PA Remote PreAmp Cable 6m for remote location of 4200 PA Ultra Low Noise PreAmp Triax Cable 0 3m Triax Triax connects 4200 PA to a test fixture recommended for remote location of the 4200 PA Ultra Low Noise PreAmp Triax Cable 1m Triax Triax connects 4200 PA to a test fixture Ultra Low Noise PreAmp Triax Cable 2m Triax Triax connects 4200 PA to a test fixture two included with each 4200 PA Ultra Low Noise PreAmp Triax Cable 3m Triax Triax connects 4200 PA to a test fixture Ultra Low Noise SMU Triax Cable 1m Mini Triax Triax connects 4200 SMUS to a test fixture Ultra Low Noise SMU Triax Cable 2m Mini Triax Triax connects 4200 SMUS to a test fixture two included with each 4200 SMU that is not configured with a Remote PreAmp Ultra Low Noise SMU Triax Cable 3m Mini Triax Triax connects 4200 SMUS to a test fixture Interlock Cable 3m one included with each 4200 SC
11. for each SMU configured with a 4200 PA 4200 RPC 2 Remote PreAmp Cable One supplied for each PreAmp 2m 6 6 ft 236 ILC 3 Interlock Cable 3m 10ft Line Cord NEMA 5 15P for 100 115VAC or CEE 7 7 Continental European for 240VAC User Manual Printed User Manual User Manual and Reference Manual are also supplied on the 4200 SCS Complete Reference CD ROM Optional Instrumentation 4200 SMU Medium Power Source Measure Unit for 4200 SCS 100mA to 100fA 200V to 1pV 2 Watt 4210 SMU High Power Source Measure Unit for 4200 SCS 1A to 100fA 200V to 1uV 20Watt 4200 PA Remote PreAmp Option for 4200 SMU and 4210 SMU extends SMU to 0 1fA resolution Support Options Calibration Options Return to factory calibration services provide calibration back to factory specifications 4200 CAL 4200 SCS Return Calibration Service This is a single event return to factory calibration service Includes cali bration back to factory specifications before and after data reports compliant with ANSI NCSL Z540 1 and ISO 17025 report require ments Does not include shipping 4200 3Y CAL 4200 SCS 3 Year Return Calibration Service This service provides 3 years of calibrated operation of the 4200 SCS Includes two calibrations back to factory specifications before and after data reports compliant with ANSI NCSL Z540 1 and ISO 17025 report requirements Does not include shipping 4200 5Y CAL 4200 SCS 5 Year Return Calibration Service This serv
12. 0 Series Parametric Test Systems This simplifies migration of test libraries between the 4200 SCS and Keithley parametric test systems Standard User Libraries The 4200 SCS includes the following useful subroutine libraries which provide out of the box integration and control of Keithley switch matrix systems and other common device characterization equipment Users access these libraries using the UTM definition tab described on page 9 matrixulib The matrixulib user library connects instrument terminals to output pins using a Keithley 707 or 708 switch system when configured as a general purpose Model 4200 GP RS XX low current Model 4200 LC LS XX or ultra low current matrix Model 4200 UL RS XX or Model 4200 UL LS XX ki590ulib The ki590ulib user library performs 100kHz or IMHz capacitance measurements C V sweeps C V pulse sweeps C t sweeps and cable compensation for the Keithley Model 590 C V Analyzer hp4284ulib The hp4284ulib user library performs capacitance measurements and C V sweeps using the Hewlett Packard 4284 LCR meter hp8110ulib The hp8110ulib performs initialization setup and triggering for the Hewlett Packard HP8110 or 81110 pulse generator ki42xxulib The ki42xxulib user library provides an example subroutine for performing a MOSFET ON resistance Roy test routine using the 4200 SCS LPTLIB interface See below for more information on the LPTLIB interface TECHNICAL DATA PRBGEN Th
13. 15 to 60 C HUMIDITY RANGE Operating 5 to 80 RH non condensing Storage 5 to 90 RH non condensing ALTITUDE Operating 0 to 2000m Storage 0 to 4600m POWER REQUIREMENTS 100V to 240V 50 to 60Hz MAXIMUM VA 500VA REGULATORY COMPLIANCE Safety Low Voltage Directive 73 23 EEC EMC Directive 89 336 EEC DIMENSIONS 43 6cm wide x 22 3cm high x 56 5cm deep 1754 in x 834 in x 22 in WEIGHT approx 29 7kg 65 5 Ibs for typical configuration of four SMUs I O PORTS SVGA Printer RS 232 GPIB Ethernet Mouse Keyboard ACCESSORIES SUPPLIED 4200 MTRX 2 Ultra Low Noise SMU Triax Cable 2 supplied for each SMU 2m 6 6 ft Not included with SMUs configured with a 4200 PA PreAmp Ultra Low Noise PreAmp Triax Cables 2m 6 6 ft 2 supplied for Ground Unit 2 supplied in replacement of 4200 MTRX 2 cables for each SMU configured with a 4200 PA Remote PreAmp Cable 1 supplied for each PreAmp 2m 6 6 ft Interlock Cable 3m 10 ft NEMA 5 15P for 100 115VAC CEE 7 7 Continental European for 240VAC Keyboard and Pointing Device User Manual 4200 TRX 2 4200 RPC 2 236 ILC 3 Line Cord NOTES All ranges extend to 105 of full scale Specifications apply on these ranges with or without a 4200 PA 3 Specified resolution is limited by fundamental noise limits Measured resolution is 6 digits on each range Source resolution is 4 digits on each range Interlock must be engaged to use the 200V ra
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15. CS SEMICONDUCTOR CHARACTERIZATION SYSTEM 20 Optional Accessories Computer Options 4200 CRT 17 SVGA Color Monitor 4200 MOUSE Microsoft Ambidextrous 2 Button Mouse note a pointing device is integrated with the 4200 keyboard Remote PreAmp Mounting Accessories 4200 MAG BASE Magnetic base for mounting 4200 PA on a prober platen 4200 VAC BASE Vacuum base for mounting 4200 PA on a prober platen 4200 TMB Triaxial mounting bracket for mounting 4200 PA on a triaxial mount ing panel Other Accessories 4200 MAN Printed Manual set for 4200 SCS Manual on CD ROM is included in Base Unit 4200 CART Roll around cart for 4200 SCS Model 8006 Component Test Fixture Model 8007 Semiconductor Test Fixture C V Options 4200 590 Model 590 100k 1M C V Analyzer with IEEE 488 Interface 1m IEEE cable 2ea BNC Triaxial Adapters Model 5909 Calibration Sources for Model 590 C V Analyzer TECHNICAL DATA Switch Matrix Options Overview Anumber of useful standard switch matrix configurations are available for 4200 SCS Each standard configuration includes all components cabling and instructions for the user to assemble the switch matrix and add the matrix configuration to the 4200 SCS test envi ronment Once a supported configuration is added to the test environment the 4200 SCS standard user library matrixulib connects instrument terminals to output pins through a simple fill in the blank interface Ultra Low Current Local Sense
16. Configuration Utility KCON simplifies programming and maintaining a fully integrated test station KCON provides a single interface for configuring external instruments switch matrices and analytical probers and for executing system diagnostics External Instrument Configuration KCON allows lab managers to integrate external instruments with the 4200 SCS and a supported switch matrix After the user configures the GPIB addresses for supported instruments Keithley supplied libraries will function and test modules can be transferred between 4200 SCS systems without any user modification In addition to the standard supported instruments the General Purpose Instrument allows users to develop subrou tines and control switches for a generic two terminal or four terminal instrument For the widest possible system extensibility users can develop their own test libraries for general purpose instruments Switch Matrix Configuration Users define the connection of 4200 SCS instruments and external instruments to device under test DUT pins through a supported switch matrix configuration See Switch Matrix Support and Standard Configurations Once connections are defined users need only enter instrument terminal name and pin number to establish connections The 4200 SCS applications and standard user libraries manage the routing of test signals between instrument terminals and DUT pins The user doesn t need to remember and program row and column
17. KEITHLEY TECHNICAL DATA MODEL 4200 SEMICONDUCTOR CHARACTERIZATION SYSTEM 4200 SPEC Rev D MODEL 4200 SCS SEMICONDUCTOR CHARACTERIZATION SYSTEM Table of Contents 2 Introduction 3 Configuration Options 5 Hardware Specifications 7 KTE Interactive Software Tools 18 18 19 20 20 21 25 25 26 27 28 7 Microsoft Windows NT 8 The Keithley Interactive Test Environment KITE 14 User Libraries KULT 17 System Configuration and Diagnostics KCON 17 Keithley External Control Interface KXCI Accessories Supplied 18 Optional Instrumentation Support Options 18 Calibration Options 19 Repair Options 19 Instrumentation Upgrades Embedded PC Policy Optional Accessories 20 Computer Options 20 Remote PreAmp Mounting Accessories 20 Other Accessories C V Options Switch Matrix Options 21 Ultra Low Current Local Sense Configuration 4200 UL LS XX 22 Ultra Low Current Remote Sense Configuration 4200 UL RS XX 23 Low Current Remote Sense Configuration 4200 LC RS XX 24 General Purpose Remote Sense Configuration 4200 GP RS XX Cabinets and Mounting Accessories Additional Cables and Connectors Front and Rear Panel Photographs PreAmp Mounting and Cabling 4200 SCS Accessories Introduction The Model 4200 SCS provides a total system solution for DC character ization of semiconductor devices and test structures This advanced parameter analyzer provides intuitive and sophisticat
18. List Sweep Measuring Measure Current or Programmed Current Measure Voltage or Functions Programmed Voltage Fast Normal Quiet and Custom Integration Times Measure voltage current or both on each sweep point regardless of forcing function TECHNICAL DATA Sampling Mode Linear sampling of up to 4096 points Sampling period is programmable from 1ms to 1000s Additional hold delay before first sample of up to 1000s Interactive Test Modules ITM are built Definition Sheet Graph Status from three different major functions Timing Speed duet Mode fE Definition Sheet and Graph The E T Definition Tab allows the operator to define a sweep or sampling mode test using a graphical approach The Sheet esu aye Tab stores acquired data and provides ea ii ge an Excel like workbook for viewing and Points 51 analyzing test results The Graph Tab Sus provides a full featured data plotting FORCE MEASURE MEASURE tool capable of producing report ready Step V Master Measure I NO Common OV Measure N graphs The Status Tab reports any errors He EM VUE AM iade that would interfere with test execution Step 1V Points 4 FORCE MEASURE Measure I NO Measure V NO Comp 0 14 dE vdssiditl 1 Definition Tab User Test Module The definition tab of a UTM presents users a tabular fill in the blank interface for enter ing input parameters to call a C language subroutine UTMs provi
19. S Shielded IEEE 488 Cable 1m Shielded IEEE 488 Cable 2m Coaxial connector for connecting coax instruments to a triax matrix 1 All 4200 SCS systems and instrument options are supplied with required cables 2m length 25 MODEL 4200 SCS SEMICONDUCTOR CHARACTERIZATION SYSTEM Front and Rear Panel Photographs The 4200 SCS is designed for rack mounting It has the same dimensions and occupies the same rack space as semiconducor parametric analyzers that may already be in use The 4200 SCS C Composite Front Bezel eliminates the flat panel display for users planning to use an external CRT exclusively RS 232 port Standard parallel printer port Low noise ground unit with remote sense ee a EU f gi no moser ier o a SSRSERERSE S ae P 3r Ta a E ia 4 ie gid ait ae eel EN Configurable from 2 to 8 SMUs 10BASE T LAN port GPIB interface controls external instruments or allows external control of the 4200 SCS using an HP 4145 style command language SVGA monitor port 26 TECHNICAL DATA PreAmp Mounting and Cabling MTT gt a We t i e Hoe ear e a i a r Ne a y fa mo ue bead a PreAmps ship factory installed for local operation Remote PreAmp Cables 4200 RPC provide analog in numerical order i e SMU1 SMU2 SMU3 up signal paths and digital control when the 4200 PA to the number of PreAmps specified is placed in a remote location An opt
20. closures Test modules can transfer between 4200 SCS systems without re entering connection information 4200 SCS Instrument Diagnostics Users can confirm system integrity of SMUs and Remote PreAmps by running a system self test For more complex problems the system s configuration analysis tool can gener ate reports that assist Keithley s Technical Support staff in diagnosing problems Keithley External Control Interface KXCI Keithley External Control Interface provides external GPIB control of the 4200 SCS using acommand interface designed for basic compatibility with the 4145B command set of the Hewlett Packard HP4155 56 The following commands are supported System Mode Commands DE CH VS VM SS VR IR VP IP VC IC SC HT DT SM WT IN NR DM XN YA YB XT MD ME SV GT DO RG defines lowest current range when autoranging including ranges below 1nA User Mode Commands US DV DI DS TV TI Common Mode Commands IT DR BC ID RS defines resolution of returned data up to 6 digits MP allows mapping an SMU to a VS or VM and back to an SMU 17 MODEL 4200 SCS SEMICONDUCTOR CHARACTERIZATION SYSTEM Accessories Supplied 4200 MTRX 2 Ultra Low Noise SMU Triax Cable Two supplied for each SMU 2m 6 6ft Not included with SMUs configured with a 4200 PA Remote PreAmp 4200 TRX 2 Ultra Low Noise PreAmp Triax Cable 2m 6 6 ft Two supplied for Ground Unit Two supplied in replacement of 4200 MTRX 2 cables
21. ctory installed on SMUSI 4 and a ground unit This system provides 0 1fA sensitivity on all four SMUs An excellent configuration for standard parameter analysis plus ultra low current measurement of MOSFET off current or dielectric leakage currents Ultra Low Current High Power Configuration Configuration One 1 Model 4200 SCS F Two 2 Model 4200 SMUs One 1 Model 4210 SMU Five 5 Model 4200 PA Remote PreAmp modules Description Includes four medium power SMUS one high power SMU five Remote PreAmps factory installed on SMUs 1 5 and a ground unit Provides a five SMU system with 0 1fA sensitivity on all SMUs and 1A capability on SMU5 Maximum Configuration Configuration One 1 Model 4200 SCS F Two 2 Model 4200 SMUs Four 4 Model 4210 SMUs Eight 8 Model 4200 PA Remote PreAmp modules Description Includes four medium power SMUS four high power SMUs eight Remote PreAmps factory installed on SMUs 1 8 and a ground unit Provides an eight SMU system with 0 1fA sensitivity on all eight SMUs and 1A capability on four channels Hardware Specifications TECHNICAL DATA Specification Conditions the termination of the supplied cables Specifications are the performance standards against which the 4200 SMU 4210 23 C 5 C within 1 year of calibration RH between 5 and 60 after 30 minutes SMU and 4200 PA are tested The measurement and source accuracy are specified at of warm up Sp
22. de the ability to control internal SMUs and GPIB and RS 232 devices This screen allows the user to select a user library a subroutine module and then enter the desired input parameters Test results are returned to the Sheet Tab for viewing and analysis Two methods of parameter extraction are available The Formulator provides automated line fits and parameter extraction A spreadsheet offers standard spreadsheet analysis tools The User Test Module UTM has Definition Sheet Graph Status virtually identical functionality as the ITM However users enter input TERR User Libraries ki590uib H parameters for subroutine calls in a User Modules Cv5Sweep590 tabular interface in the UTM s Definition FirstBias 5 00000E 00 LastBias 5 00000E 400 StepV Frequency DefaultBias double The first bias voltage 20 to 20 double The last bias voltage in the sweep 20 to 20 double The voltage sweep step size int The desired test frequency 0 100kHz 121MHz CVSWEEP MODEL 4200 SCS SEMICONDUCTOR CHARACTERIZATION SYSTEM 10 Formulator functions The Formulator performs data transformations for performing parameter analysis and line fits The Formulator supports the following functions Mathematical Functions Addition subtraction division multiplication exponent 4 absolute value ABS value at an index position AT Average AVG movin
23. e PRBGEN user library provides test modules to initialize the prober driver move to the next site or subsite in the prober s wafer map make or break contact between the probes and the wafer and obtain the X position and Y position of the prober Contact the factory for supported probers winulib The winulib user library provides user interface routines for operator prompting and input C language Microsoft Visual C Standard Edition provides the compiler for the Keithley User Library Tool Users can develop test subroutine libraries using the full capabilities of C language programming LPTLIB Control The LPTLIB provides an application programming interface for developing C language test routines that control 4200 SMUs and supported external instruments and switches This simple connect source measure approach eliminates the need for low level pro gramming and allows the user to focus on creating new test routines quickly The 4200 SCS LPTLIB is derived from the Keithley S600 series and S400 series parametric test systems to simplify migration of test routines between the 4200 SCS and Keithley para metric test systems Table 1 lists 4200 SCS LPTLIB functions Table 1 4200 SCS LPTLIB functions GROUP FUNCTION CALL Instrument devclr Device clear devint Device initialize Matrix addcon Add connection clrcon Clear connection conpin Connect pin conpth Connect path delcon Delete connection Ranging lo
24. ed capabilities for semiconductor device characterization The 4200 SCS combines unprecedented measurement speed and accuracy with an embedded Windows NT based PC and the Keithley Interactive Test Environment KITE to provide a powerful single box solution The Keithley Interactive Test Environment allows users to gain famil iarity quickly with tasks such as managing tests and results and gener ating reports Sophisticated and simple test sequencing and external instrument drivers simplify performing automated device and wafer testing with combined I V and C V measurements The 4200 SCS is modular and configurable The system supports up to eight Source Measure Units including up to four high power SMUs with 1A 20W capability An optional Remote PreAmp extends the reso lution of any Source Measure Unit from 100fA to 0 1fA TECHNICAL DATA Configuration Options The 4200 SCS supports many instrument configurations The standard configuration includes two medium power Source Measure Units SMUs and a Ground Unit Standard 4200 SCS Models 4200 SCS F Chassis 12 1 flat panel display Two 2 Model 4200 SMU medium power SMUs One 1 Remote Sense Ground Unit LAN GPIB RS 232 parallel port hard disk floppy disk drive CD ROM 4200 SCS C Chassis Composite Front Bezel CRT sold separately Model 4200 CRT Two 2 Model 4200 SMU medium power SMUs One 1 Remote Sense Ground Unit LAN GPIB RS 232 parallel port hard disk floppy disk
25. eed set to NORMAL Guarded Kelvin connection 1 C and 24 hours from ACAL SOURCE ACCURACY rdg amps 0 100 350 pA 0 050 15pA 0 050 15pA 0 042 1 5 pA 0 040 150 nA MEASURE ACCURACY rdg amps RESOLUTION 50 pA 5 pA 1 pA 100 nA 0 100 200 pA 0 045 3A 0 045 3A 0 037 300 nA 0 035 30nA CURRENT SPECIFICATIONS CURRENT MAX RANGE VOLTAGE 4210 SMU 1A 21V High 100 mA 210V Power 4200 SMU SMU Medium Power SMU 0 038 15 nA 0 060 1 5 nA 0 060 200 pA 0 060 30pA 0 033 3nA 0 050 600 pA 0 050 100 pA 0 050 30pA 4200 SMU and 4210 SMU with optional 4200 PA PreAmp 0 050 I1pA 0 050 100 fA 0 100 30 fA 0 500 15 fA 1 000 10 fA 0 060 3pA 0 060 300 fA 0 100 80 fA 0 500 50 fA 1 000 40 fA VOLTAGE COMPLIANCE Bipolar limits set with a single value between full scale and 10 of selected voltage range VOLTAGE SPECIFICATIONS VOLTAGE RANGE 200 V4 20 V 2 V MAX CURRENT cet 4200 SMU 4210 SMU RESOLUTION SOURCE ACCURACY rdg volts 0 02 15mV 0 02 1 5mV 0 02 300 pV 0 02 150 pV MEASURE ACCURACY rdg volts 0 015 3mV 0 0 1mV 0 012 150 pV 0 012 100 pV RESOLUTION 5mV 500 uV 50 uV 5 pV 200 pV 20 pV 2 uV 1 pV CURRENT COMPLIANCE Bipolar limits set with a single value between full scale and 10 of selected current range
26. eplaces all computer control of the prober with that of the operator At each prober command a dialog box will appear instructing the operator what operation is required Fake Prober The Fake prober is useful when prober actions are not desired such as when debugging without having to remove prober commands from a sequence 13 MODEL 4200 SCS SEMICONDUCTOR CHARACTERIZATION SYSTEM 14 Cascade Microtech Summit 12K Series verified with Nucleus UI Version 2 0 Karl Suss Model PA 200 verified with Wafermap for ProberBench NT Version 3 1 NI GPIB Driver for ProberBench NT Version 3 10 PBRS232 Interface for ProberBench NT Version 3 00 Navigator for ProberBench NT Version 3 1 Remote Communicator for ProberBench NT Version 3 00 MicroManipulator 8860 Prober verified with pcBridge Version 2 0 2 pcLaunch Version 2 0 9 pcIndie Version 2 0 7 pcWafer Version 2 0 8 pcNav Version 2 0 8 pcRouter Version 2 0 9 Keithley User Library Tool KULT The Keithley User Library Tool supports creating and integrating C language subroutine libraries with the test environment User library modules are accessed in KITE through User Test Modules Factory supplied libraries provide up and running capability for sup ported instruments Users can edit and compile subroutines then integrate libraries of subroutines with KITE allowing the 4200 SCS to control an entire test rack from a single user interface KULT is derived from the Keithley S600 and S40
27. g particularly at cur rents greater than approximately 10mA but degrades the performance of C V meters and pulse generators The Ultra Low Current Remote Sense switch configuration is built using the Keithley Model 7174A Low Current Matrix Card which is designed for semiconductor research development and production applications requiring high quality high perfor mance switching of I V and C V signals The configuration provides six instrument inputs with up to 30 output pins at only 10fA typical offset current 4200 UL RS XX TYPICAL BLOCK DIAGRAM 4200 PA e e a Qa FORCE 4200 TRX 2 SMU SENSE 4200 TRX 2 N m FORCE 4200 MTRX 2 SMU E PI SENSE 4200 MTRX 2i A FORCE 4200 MTRX 2 SMU See SENSE 4200 MTRX 2 ao 4200 MTRX 2 SMU4 FORCE orGNDU SENSE oN 4 7078 TRX BNC HP4284 N on an ne 4200 UL RS 6 12 18 24 30 lea 707A Switch Mainframe lea 7174A for input card lea 7174A for each 6 DUT pins 12 ea 4200 TRX 3 for each 6 DUT pins lea 7007 1 IEEE Cable 4ea 7078 TRX BNC Adapter lea 7078 PEN Light Pen Pins 24 30 4200 590 Connector Type 3 lug Triax lea 590 100k 1M C V Meter jea 20021 TETE Cable Maximum Signal Level 200V 2A 2ea 7078 TRX BNC Adapter Offset Current 100fA max 10fA typical Maximum Leakage 0 01pA V TECHNICAL DATA Low Current Local Sense Configuration 4200 LC LS XX The Low Current Local Sense
28. g average MAVG conditional computation COND derivative DELTA differential coefficient DIFF exponential EXP square root SQRT natural logarithm LN logarithm LOG integral INTG Line Fits and Parameter Extraction Functions Exponential line fit EXPFIT coefficient a EXPFITA coefficient b EXPFITB Linear Fit LINFIT linear slope LINFITSLP x intercept LINFITXINT y intercept LINFITYINT Logarithmic line fit LOGFIT coefficient a LOGFITA coefficient b LOGFITB Linear Regression line fit REGFIT slope REGFITSLP x intercept REGFITXINT y intercept REGFITYINT Tangent line fit TANFIT slope TANFITSLP x intercept TANFITXINT y intercept TANFITYINT Maximum value MAX minimum value MIN Search Functions Find Down FINDD Find Up FINDU Maximum position MAXPOS minimum position MINPOS First Position FIRSTPOS Last Position LASTPOS Sub Array subarray Formulator Constants The Formulator supports user supplied constants for use in parameter extractions These constants are factory installed PI 3 14159 rad K 1 38065 x 1075 J K Q 1 60218 x 10 C M 9 10938 x 10 kg E 1 60218 x 1071 J U 1 25664 x 105 N A E 8 85419 x 107 F m H 6 62607 x 107 J s C 2 99792 x 10 8 m s KT Q 0 02568 V TECHNICAL DATA Sheet Tab Data Viewing and Analysis The Sheet Tab of a test module captures data from a test execution and allows calculations in a sp
29. he price of any instruments purchased when a system is returned to the factory for an instrumen tation upgrade adding SMUs or PreAmps This fee is charged only once for an upgrade event The customer may add any quantity or type of instrument to their system for the upgrade fee The service fee includes a system burn in and calibration This service fee does not apply to software upgrades Does not include shipping Embedded PC Policy Keithley Instruments warrants the performance of the 4200 SCS only with factory approved Operating System and application software installed Systems that have been modified by the addition of third party application software unless the software is explic itly approved and supported by Keithley Instruments are not covered under the product warranty Model 4200 SCS units with unapproved software may need to be restored to fac tory approved condition before any warranty service can be performed e g calibration repair upgrade technical support Services provided by Keithley Instruments to restore units to factory approved condition will be treated as out of warranty service with time and material charges Approved Third Party Software Adobe Acrobat Reader 4 0 Diskeeper 5 0 Excel 2000 Word 2000 Full Armor 5 5 Internet Explorer 5 0 Internet Explorer 5 5 Norton Antivirus 2000 6 0 PC cillin 2000 Visual C 6 0 Service Pack 3 or higher WinZip 8 0 Print Screen Deluxe 4 0 19 MODEL 4200 S
30. ibcmd Send low level GPIB command to instrument kibdefclr Define string to clear GPIB instrument on devclr kibdefdelete Delete GPIB definition strings for devclr and devint kibdefint Define string to clear GPIB instrument on devint kibrcv Read device dependent string kibsnd Send device dependent command kibspl Serial poll an instrument kibsplw Synchronous serial poll RS 232 kspcfg Configure the port kspsnd Read device dependent string ksprcv Send device dependent command string kspdefclr Define string to clear RS 232 instrument on devclr kspdefdelete Delete RS 232 definition strings for devclr and devint kspdefint Define string to clear RS 232 instrument on devint General getstatus Read system and instrument status information setmode Set operating mode tstdsl Test station deselect tstsel Test station select Execution execut Executes Devint inshld Executes No operation Arithmetic kfpabs Floating point absolute value kfpadd Floating point add kfpdiv Floating point divide kfpexp Floating point raise e to a power kfplog Floating point logarithm kfpmul Floating point multiply kfpneg Floating point negative value kfppwr Floating point raise a number to a power kfpsqrt Floating point square root kfpsub Floating point subtract Provided for compatibility to other platform versions of LPTLIB 16 TECHNICAL DATA System Configuration and Diagnostics KCON The Keithley
31. ice provides 5 years of calibrated operation of the 4200 SCS Includes four calibrations back to factory specifications before and after data reports compliant with ANSI NCSL Z540 1 and ISO 17025 report requirements Does not include shipping 18 TECHNICAL DATA Repair Options 4200 REPAIR 4200 SCS Repair Service Contact the factory for repair estimates 4200 3Y REPAIR 4200 SCS 3 Year Hardware Warranty Extension This service includes 3 years of return to factory repairs from date of shipment including the standard product warranty and return ship ping If an instrument proves defective in parts or workmanship Keithley will repair and calibrate or replace the 4200 SCS and return it shipping prepaid Must be ordered at the same time as the 4200 SCS Rush shipping available with additional charges 4200 5Y REPAIR 4200 SCS 5 Year Hardware Warranty Extension This service includes 5 years of return to factory repairs from date of shipment including the standard product warranty and return ship ping If an instrument proves defective in parts or workmanship Keithley will repair and calibrate or replace the 4200 SCS and return it shipping prepaid Must be ordered at the same time as the 4200 SCS Rush shipping available with additional charges Instrumentation Upgrades 4200 UPGRADE 4200 SCS Hardware Upgrade Service Includes installation of new instruments calibration and verification This item must be included in addition to t
32. ional vacuum Model 4200 VAC BASE or magnetic Model 4200 MAG BASE platen mounting base allows the PreAmp to be located next to manipulators on the chuck platen eliminating measurement problems caused by long cable lengths when perform ing ultra low current measurements If platen space is not available the triax mounting bracket Model 4200 TMB allows users to locate the PreAmp on dual triaxial connectors that may already be installed for HP4156 Kelvin triax cables This mounting option reduces problems caused by long cables without occupying platen space 27 MODEL 4200 SCS SEMICONDUCTOR CHARACTERIZATION SYSTEM 4200 SCS Accessories Model 4200 CART Roll Around Cart for 4200 SCS Model 4200 CRT RM The CRT rack mount accepts up to 17 inch monitors Model 4200 KEY RM Keyboard Rack Mount Specifications are subject to change without notice All Keithley trademarks and trade names are the property of Keithley Instruments Inc All other trademarks and trade names are the property of their respective companies KEITHLEY Keithley Instruments Inc Sales Offices Pacific Basin representatives Japan Sinapore Copyright 2002 Keithley Instruments Inc BELGIUM CHINA FINLAND FRANCE GERMANY GREAT BRITAIN INDIA ITALY JAPAN KOREA NETHERLANDS SWEDEN SWITZERLAND TAIWAN 28775 Aurora Road Cleveland Ohio 44139 440 248 0400 Fax 440 248 6168 1 888 KEITHLEY 534 845
33. izes subsites and controls wafer looping execution ci The test module level performs tests analyzes data and plots results ip yvtlin Test Modules Within KITE two types of test modules are provided to capture the test input parameters data analysis and plot setting for data Interactive Test Modules provide a point and vl B ProjectView click interface for defining test input parameters and controlling the 4200 SCS SMUs User Test Modules provide a fill in the blank interface to either factory provided or user written C language subroutines These subroutines can control internal 4200 SCS instruments and or external instruments and systems through the RS 232 or GPIB inter face This dual approach provides an extendable test environment that gives the users the same capabilities for data analysis plotting and output and automation whether the instrument used is part of the base system or an external instrument It also offers users the flexibility to write complex test algorithms for control of either internal or external instruments Definition Tab Interactive Test Module The definition tab of an ITM provides a point and click interface for setting test input parameters that control the 4200 SCS SMUs and defining parameter extractions Two modes are available Sweep Mode Forcing Common Voltage Bias Current Bias VMU Voltage Sweep Current Functions Sweep Voltage Step Current Step Voltage List Sweep Current
34. nge TECHNICAL DATA KTE Interactive Software Tools KTE Interactive includes four software tools for operating and maintaining the 4200 SCS in addition to the Windows NT operating system Keithley Interactive Test Environment KITE The 4200 SCS device characterization application Keithley User Library Tool KULT Allows test engineers to integrate custom algorithms into KITE using 4200 SCS or external instruments Keithley Configuration Utility KCON Allows test engineers to define the configuration of GPIB instruments switch matrices and analytical probers connected to the 4200 SCS It also provides system diagnostics functions Keithley External Control Interface KXCI The 4200 SCS application for controlling the 4200 SCS from an external computer via the GPIB bus Microsoft Windows NT Windows NT Operating System The operating system is a standard distribution of Microsoft Windows NT Contact the Keithley factory for supported versions and service packs Security and Administration Management A third party administration package is installed and configured on each system This package provides lab supervisors a simple interface for managing system security The 4200 SCS is factory configured with two accounts The administrator account allows access to all system resources without limitation The administrator account has complete access to the security settings of the user account which is designed for day to day use
35. rangeX Define lowest range X i v rangeX Set active range X i v setauto Re enable autorange RangeX automatically disables autorange Sourcing forceX Force i or v limitX Set the i or v limit compliance mpulse Generate voltage pulse and measure the current pulseX Generate a pulse X i v Measuring avgX Make multiple measurements and average them Return the result X i v bmeasX Make a block of measurements and return the results X i v imeast Measure the timer immediately intgX Integrate Measure i or v over a integer number of power line cycles measX Measure X i v t 15 MODEL 4200 SCS SEMICONDUCTOR CHARACTERIZATION SYSTEM Table 1 4200 SCS LPTLIB functions continued Combination asweepX Array sweep X i v bsweepX Linear breakdown sweep X i v clrscn Clear the scan table clrtrg Clear the active trigger condition rtfary Return the FORCE array savgX Average measurements for each point in a sweep X i v scnmeas Make measurements simultaneously on multiple instruments searchX Binary search measurement X i v sintgX Sweep integrate X i v smeasX Sweep measure X i v t sweepX Linear sweep X i v trigXg Trigger if measurement gt value X i v t trigXl Trigger if measurement lt value X i v t Timing adelay Array delay delay Delay disable Disable timer enable Enable timer rdelay Realtime delay GPIB k
36. rder i e SMU1 SMU2 SMU3 up to the number of PreAmps specified Note All medium power SMU s must have PreAmps installed before PreAmps can be installed on high power SMUs MODEL 4200 SCS SEMICONDUCTOR CHARACTERIZATION SYSTEM Configuration Examples The 4200 SCS s plug in chassis design offers exceptional configuration flexibility as these examples illustrate Any of these configurations can be specified without a flat panel dis play by substituting the 4200 SCS C for the 4200 SCS E However an external SVGA mon itor is required to operate the 4200 SCS C Base Configuration with Ultra Low Current Configuration One 1 Model 4200 SCS F One 1 Model 4200 PA Remote PreAmp module Description Includes 4200 SCS with flat panel display two 4200 SMU medium power SMUS one 4200 PA remote PreAmp factory installed on SMU1 and a ground unit Provides 3 terminal device characterization using the built in ground unit with 0 1fA sensitivity on SMUI General Purpose Configuration comparable to HP 4155 Configuration One 1 Model 4200 SCS F Two 2 Model 4200 SMUs Description Includes 4200 SCS with flat panel display four 4200 SMU medium power SMUS and a ground unit Ultra Low Current Configuration comparable to HP 4156 Configuration One 1 Model 4200 SCS F Two 2 Model 4200 SMUs Four 4 Model 4200 PA Remote PreAmp modules Description Includes four medium power SMUs four Remote PreAmps fa
37. readsheet The Sheet Tab operates like an Excel workbook with the following spreadsheets the Data sheet the Calc sheet the Settings sheet and Append sheets Definition Sheet Graph Status Formulas Save As A B Cc D E x Drainl GateV GM IDLIN VT 598 5445E 9 O00 0000E 3 REF 2 1168E 3 623 9958E 3 868 0621E 9 50 0000E 3 5 3903E 6 1 9472E 3 1 2763E 6 100 0000E 3 8 1652E 6 1 7776E 3 1 8499E 6 150 0000E 3 11 4718E b 1 6079E 3 2 7128E 5 200 0000E 3 17 2583E 6 1 4383E 3 4 1226E 6 250 0000E 3 28 1954E 6 1 2687E 3 6 5717E 6 300 0000E 3 48 9820E 6 1 0991E 3 11 2202E 6 350 0000E 3 92 9709E 6 929 5023E 6 19 7285E 6 400 0000E 3 170 1661E 6 759 8825E 6 34 9786E 6 450 0000E 3 305 0010E 6 590 2628E 6 B0 5079E 6 500 0000E 3 510 5872E 6 420 6429E 6 100 4636E 6 550 0000E 3 799 1116E 6 251 0231E 6 159 1220E 6 600 0000E 3 1 1731E 3 81 4032E 6 238 5519E 6 B50 0000E 3 1 5885E 3 88 2164E 6 341 2830E 6 700 0000E 3 2 0546E 3 257 8363E 6 466 0724E 6 750 0000E 3 2 4957E 3 427 4561E 6 608 2251E 6 800 000D0E 3 2 8430E 3 597 0759E 6 766 8082E 6 850 0000E 3 3 1716E 3 766 6958E 6 934 3585E 6 900 0000E 3 3 3510E 3 936 3154E 6 1 1045E 3 950 0000E 3 3 4032E 3 1 1059E 3 1 2755bE 3 1 0000E40 3 4206E 3 1 2755E3 1 4437E 3 1 0500E40 3 3640E 3 1 4451E 3 1 6064E 3 1 1000E40 3 2531E3 1 6147E 3 Data A Calc A Settings endi A Append
38. ss Series Resistance and capacitance adjustment Doping Profile Depletion Length Flatband C and V Threshold Voltage Bulk Doping Metal Semiconductor Work Function Debye Length Bulk Potential and Average Doping Pulsed High Frequency C V and Capacitance vs Time 4 IVPGSWITCH The ivpgswitch project integrates an external pulse generator and performs a stress measure sequence 5 PROBESITES The probesites project illustrates how KITE controls semi automatic probe stations for automated probing of one subsite per site on a single wafer 6 PROBESUBSITES The probesubsites project illustrates how KITE controls semi automatic probe stations when testing multiple subsites per site on a single wafer Automation Test Sequencing The Keithley Interactive Test Environment KITE provides point and click test sequenc ing on a device a group of devices subsite module or test element group or a user pro grammable number of probe sites on a wafer Prober Control Keithley provides integrated prober control for supported analytical probers when test sequencing is executed on a user programmable number of probe sites on a wafer Contact the factory for a list of supported analytical probers A manual prober mode prompts the operator to perform prober operations during the test sequence Supported Probers Manual Prober Use the manual prober driver to test without utilizing automatic prober functionality Manual prober r
39. switch configuration is built using the Keithley Model 7072 Semiconductor Matrix Card which is designed for semiconductor applications requiring good quality of I V and C V signals The configuration provides eight instrument inputs with up to 72 output pins with less than 1pA offset current 4200 LC LS XX TYPICAL BLOCK DIAGRAM 4200 PA 4200 TRX 2 4200 TRX 2 4200 MTRX 2 4200 MTRX 2 4200 TRX 2 590 C V Meter IN OUT 7078 TRX BNC Pins 1 12 Pins 13 24 Pins 61 72 4200 TRX 3 4200 TRX 3 4200 TRX 3 HP4284 Coax tees not included 4200 LC LS 12 or 12 707A 4200 LC LS 24 36 48 60 72 708A or 707A Switch Mainframe 7072 Matrix Switch Card 4200 TRX 3 Cable 7007 1 IEEE Cable 7078 TRX BNC Adapter 7078 PEN Light Pen Connector Type 3 lug triax Maximum Signal Level 200V 1A Offset Current 1pA Rows A B Maximum Leakage 0 1pA V 3dB Bandwidth 5MHz typical Rows G H 707A Switch Mainframe 7072 for each 12 pins 4200 TRX 3 Cable for each 12 pins 7007 1 IEEE Cable 7078 TRX BNC Adapter 7078 PEN Light Pen 23 MODEL 4200 SCS SEMICONDUCTOR CHARACTERIZATION SYSTEM 24 General Purpose Remote Sense Configuration 4200 GP RS XX The General Purpose Remote Sense switch configuration is built using the Keithley Model 7071 General Purpose Matrix Card which is designed for applications requiring cost effective switching of I V and C V signals Remote sensing is more accurate for volt
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