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EnergyMax-USB/RS User Manual

1. 6 15 Fl Character Definitions bat m M DE 6 15 Operational Parameters 6 18 Coherent Service 7 5 vi Signal Words and Symbols in this Manual Signal Words Preface This documentation may contain sections in which particular hazards are defined or special attention is drawn to particular condi tions These sections are indicated with signal words in accordance with ANSI Z 535 6 and safety symbols pictorial hazard alerts in accordance with ANSI Z 535 3 and ISO 7010 Four signal words are used in this documentation DANGER WARNING CAUTION and NOTICE The signal words DANGER WARNING and CAUTION desig nate the degree or level of hazard when there is the risk of injury DANGER Indicates a hazardous situation that if not avoided will result in death or serious injury This signal word is to be limited to the most extreme situations WARNING Indicates a hazardous situation that if not avoided could result in death or serious injury CAUTION Indicates a hazardous situation that if not avoided could result in minor or moderate injury The signal word NOTICE is used when there is the risk of prop erty damage NOTICE Indicates information considered important but not hazard related Messages relating to hazards that could result in both personal injury and property damage are consid
2. Error 350 is raised when the error queue becomes full Non Queue overflow errors are replaced by Queue overflow errors when there is exactly one available storage location in the error queue No additional errors are added to the error queue if the error queue is full Error 310 is raised when the firmware detects an unexpected or unrecoverable error This error condition includes unrecoverable hardware faults Error 100 is raised when the device receives an unrecognized command or query Error 101 is raised when the device receives a command or query with one or more invalid data parameters Error 102 is raised when the device receives a command or query for which no valid data exists Error Count Query Queries the number of error records in the error queue at the time of the query Command none Query SYSTem ERRor COUNt Reply count of error records stored in integer format Error Query Queries the next error record s in the error queue More than one error record may be queried using the optional error record count parameter which must be an integer value A single error record is returned if error record count is not specified No reply is trans mitted if no error records are available As the meter transmits each error record The error record is permanently removed from the error queue The queued error record count decrements by EnergyMax USB RS User Manual Measu
3. User Manual EnergyMax USB RS Sensor System COHERENT User Manual EnergyMax USB RS Sensor System COHERENT 27650 SW 95th Ave Wilsonville OR 97070 EnergyMax USB RS User Manual GRE simplified S English This document is copyrighted with all rights reserved Under the copyright laws this document may not be copied in whole or in part or reproduced in any other media without the express written permission of Coherent Inc Permitted copies must carry the same proprietary and copyright notices as were affixed to the original This exception does not allow copies to be made for others whether or not sold but all the material purchased may be sold given or loaned to another person Under the law copying includes translation into another language Coherent the Coherent Logo and EnergyMax are trademarks or registered trademarks of Coherent Inc All other trademarks or registered trademarks are the property of their respective owners Every effort has been made to ensure that the data given in this document is accurate The information figures tables specifications and schematics contained herein are subject to change without notice Coherent makes no warranty or representation either expressed or implied with respect to this document In no event will Coherent be liable for any direct indirect special incidental or consequential damages resulting from any defects in it
4. seen 6 17 Operational Paramele rs 6 18 Host Interface Glossary Die oe 6 18 Calibration and Warranty seen 7 1 Coherent Calibration Facilities and Capabilities 4 7 1 Optical Calibration Method 7 2 EnergyMax NIST Traceable Optical Calibration 7 2 Re certify NCEA peau de use ioca cta Cc te 7 2 Calibration Fundamentals 2 pe 7 2 Calibration Verri at losa oe rale cie 7 3 Limited Warranty E 7 3 Extended Wat talit osos otto 7 4 Table of Contents Watranty RTT cc 7 4 i tod e 7 5 Product Shipping 7 6 Appendix A Frequently Asked Questions 8 1 Index 9 1 1 1 2 1 3 1 3 2 3 3 3 4 4 1 4 2 2 1 2 2 2 3 2 4 3 1 3 2 3 3 3 4 LisT OF FIGURES Waste Electrical and Electronic Equipment Label eere 1 1 Spectral Sensitivity Curves for Quantum EnergyMax Sensor esses 2 8 Pyroelectric Current and Voltage Response eese rennen enne 3 3 Photo Sensitivity Temperature Characteristics esee nene 3 5 Spectral Absorption of EnergyMax Sensor 5 3 7 Spectral Sensitivity of Ener
5. Error queuing occurs as explicitly defined elsewhere in this section If handshaking is OFF command and query responses will behave as explicitly defined elsewhere in this section Baud Rate Selects the transmit and receive baud rates together when the device has an RS 232 serial host port The command has no effect when the device has a USB host port The query returns the currently selected baud rate Command SYSTem COMMunicate SERial BAUD DEFaultl960011920013840015 76001115200 Default 9600 Query SYSTem COMMunicate SERial BAUD Reply 96001192001384001576001115200 If SCPI message handshaking is enabled the new baud rate takes effect after the handshake is transmitted If SCPI message hand shaking is disabled the new baud rate takes effect immediately Programming and system errors occasionally occur while testing or debugging remote programs and during measurement Error strings follow the SCPI Standard for error record definition error code gt lt quoted error string The host queries for errors in two steps 1 host queries for the number of error records available 2 host queries times for the error records Errors are stacked up to 20 deep In the case of error overflow the last error in the error list is an indication of error overflow Possible error strings are shown in Table 6 2 below Host Interface Table 6 2 Error Codes and Description Strings
6. 4 7 Turbo IS rao No CR 4 12 Procedures Using Turbo MOUe 4 12 Lang the Sow ake 4 14 Special hb ote iot re teat e tfo 5 1 Understanding the External Trigger 5 1 Extending Cable Length 5 2 Host InterDace e oA IRURE ROREM MD E 6 1 OVELVICW gt 6 1 INTE SSA Terminators 6 1 Messages Received By Sensor coussin 6 1 Messages Sent by 6 1 Host Command Quick Reference 1 nise a eiieeii ah 6 2 SCPI Interface Section ede pce t bees ld eee ee eed 6 4 Syntax and Notation Conventions 6 4 Commands and 6 4 scPDGConmmonm Commands sites ara E 6 4 TO EE E EE E E E 6 5 Error Record Reporting and Collection 6 6 Measurement Setup Control 4 iita aite sone 6 8 Statistics Mode Control oe end eret euet breite e encore ea eee 6 11 Tigger 6 12 Measurement Data Collection sco moa ort ee disti BA seats 6 14 Data Streaming Transmission Interface 242202221 6 16 Sensor sua tacos onte tee dois 6 16 Cali bration m 6 17 Data Streaming Transmission Interface Section
7. Operate multiple devices simultaneously and perform synchronized ratiometry A B analysis Trend and log results to file For system integration and for implementations involving customer written software EnergyMax sensors provide an in depth command set that is easy to access USB sensors connect on Virtual COM port thus supporting simple ASCII host commands communication for remote interfacing National Instruments LabVIEW drivers are supplied for easy LabVIEW integration Coherent EnergyMax sensors are known as smart sensors that is they incorporate onboard electronics that automatically correct for pyroelectric sensor temperature as well as built in wavelength compensation factors This section gives an overview of each of the five types of sensors that comprise the EnergyMax Family MaxBlack Diffuse Metallic MaxBlack With Diffusers MaxUV and Quantum EnergyMax USB RS User Manual MaxBlack The MaxBlack EnergyMax series has six different models that EnergyMax permit measurement over a wide range of wavelengths beam diam Sensors eters average power levels and repetition rates All MaxBlack EnergyMax sensors feature the MaxBlack coating which offers significantly better damage resistance and mechanical durability characteristics compared to black paint coatings The 25 and 50 mm diameter sensors accept a user installable optional heatsink refer to Increasing Average Power With Heat sinks
8. The last measurement record is composed of comma delimited data items generated at the same instant The data items presented including a flags item vary depending on the measurement and statistics modes and the data items selected as shown in Table 6 3 and Table 6 4 below Host Interface Table 6 3 Measurement Data Record Formats Statistics Mode Off Measurement Mode Measurement Record Format lt power gt lt period gt lt flags gt lt sequence ID lt energy gt lt period gt lt flags gt lt sequence ID gt Table 6 4 Measurement Data Record Formats Statistics Mode On Measurement Mode Measurement Record Format lt power gt lt mean gt lt min gt lt max gt lt stdv gt lt dose gt lt missed gt lt flags gt lt sequence ID gt lt energy gt lt mean gt lt min gt lt max gt lt stdv gt lt dose gt lt missed gt lt flags gt lt sequence ID gt 0 zero lt power gt is expressed in Watts using the 3E C formatting spec ification energy and dose are expressed in Joules using the 3E C formatting specification lt period gt is expressed in integer microseconds lt missed gt is expressed in integer units lt sequence ID gt is expressed in integer dimensionless units Statistics data items are the same units as the power or energy measurements from which they were calculated The lt power gt lt mean gt lt min gt lt max gt lt stdv gt and l
9. Streaming 010 EnergyMax USB RS User Manual 6 Press the Log Data to File folder icon ruso Active Display Inactive OFF Log Data to al cATurbo Log File csv 7 When the directory screen appears select enter a file name with a txt extension for tab delimited or csv extension for comma delimited and then press the OK button to dismiss the screen In this example the selected file is Turbo Log File csv 8 Click the OFF ON button to turn ON 49 turbo Active Display Inactive data logging Data to File Al cATurbo Log File csv 9 Click the Start Data Collection button and then turn ON the laser ss catt s iul Select Sensor Energy During data collection in Turbo mode all of the pulses are saved to the log file and the Turbo Active Display Inactive indicator blinks for every 500 pulses collected All other front panel displays including statistics live display batch counter and the plot window are inactive while Turbo mode is active Using the For complete EnergyMax PC information refer to the software help inside the application or reference the EnergyMax PC Help file Software included on the CD Special Topics SPECIAL TOPICS In this section Understanding the external trigger circuit this page Extending cable length 5 2 Understan ding To prevent ground loop noise from interfering with accurate measurement the external trigger inp
10. p 3 1 which can extend the energy and or repetition rate range These heatsinks allow 25 mm sensors to be used up to 15W average power and 50 mm sensors to be used up to 24W average power NOTICE Use of EnergyMax sensors at average power levels beyond the base model average power specification without the optional heatsink can cause permanent damage to the sensor Table 2 1 MaxBlack EnergyMax Sensor Specifications J 50MB HE J 50MB LE 1 25 J 25MB LE J 10MB HE J 10MB LE 1 6 mJ to 2J 400 uJ to 500 mJ 850 uJ to 1J 50 uJ to 50 mJ 12 uJ to 20 mJ 500 nJ to 600 uJ Wavelength Range ee um 0 19 to 12 memes 7 mm Mexemenm 9 8 fs 3 3 Memewans Mememews _ Energy Density 500 at 1064 nm 10 ns J cm Diffuser Calibration Wavelength 1064 ae Uncertainty Linearity 3 sensor cable Cable Cable Type USB and RS LI M Number USB 1191444 1191443 1191442 1191441 1191436 1191435 RS 1191432 1191431 1191429 1191428 Description Diffuse Metallic Diffuse Metallic EnergyMax sensors feature broad wavelength EnergyMax coverage 190 nm to 2 1 uum and large active area up to 50 mm Sensors This series of EnergyMax sensors has three different models that allow measurement over a wide range of wavelengths beam diame ters average power levels and repetition rates The
11. 0 0 5 0 11111 A 0 5 190 400 600 800 1000 Wavelength nm Figure 3 2 Photo Sensitivity Temperature Characteristics There is a small amount of pulse width linearity error when using a sensor at its maximum specified pulse width This error is less than 1 At pulse widths less than 10 us this error is negligible and is less than 0 5 The J 50MB IR sensor has a slightly higher pulse width linearity specification of 1 5 All pyroelectric EnergyMax sensors incorporate a diffuse coating to minimize specular reflections which eliminates spurious beams that can re enter the laser cavity In addition all EnergyMax sensors include the convenience of onboard electronics that have built in wavelength compensation factors Enter the wavelength of the laser being measured within the PowerMax PC software or by a host command and the sensor 3 5 EnergyMax USB RS User Manual Applying Wavelength Compensation Accuracy output will be automatically compensated Wavelength compensa tion results in an additional error factor when engaged and when the sensor is being used at a wavelength different from the wavelength at which it was calibrated The accuracy is based upon the sensor coating Overall measurement accuracy is a combination of calibration uncertainty found in the sensor specification tables and the wave length compensation accuracy tefer to Table 3 4 below The combined accuracy is based upon practices outline
12. Sensors With 2 6 MaxUV En rgyMax Sensors unie se a eR e RES A ER UON 2 7 Quantum Berg 2 8 Technical Description osten taente ie latest eec 3 1 Increasing Average Power With i torte tese dpa 3 1 Pyroeleetac Technology In En PURA 3 2 Damage Thresholds cinan eent ee e ee esses 3 3 Measurement Linearity oce Ib D ERE tansa INTE SESS ue 3 4 Ennery 3 4 Repetition Rate LTS ATI cete adiecit eR e E 3 4 Averdse Power Linearity aee eoo dede do Un a i tutes 3 4 Temperature Linearity of Quantum EnergyMax Sensors eese 3 5 Pulse Width Linearity 3 5 Spectral Response Rot m Opa 3 5 Applying Wavelength Compensation 3 6 Operation 4 1 LED Status 4 1 Powerme Energy Max RS deti neca 4 2 iii EnergyMax USB RS User Manual 1 1 quiero t P 4 2 I LEE HEC 4 3 Internal Ingbening Mode e ceret iubeo it a 4 3 Setting the Mave leAt beg 4 4 Tutorial Measuring Energy With a EnergyMax Sensor eee 4 5 AU OM c 4 7 Procedure Taking a Synchronized Ratiometric Reading
13. is too high There is some headroom above the maximum specification the amount of headroom is dependent on sensor responsivity and varies from 5 to 25 depending on the individual sensor but the maximum level should not be exceeded Another implication of using a sensor above its rated energy is the potential of high energy density damaging the coating Q What if I exceed the pulse width specification A Although there is some headroom built into the specifica tion using an EnergyMax sensor with a laser that has a pulse width longer than the specified maximum pulse width will result in increased measurement error For example if you use the sensor with double the maximum pulse width the result will be an additional 2 to 3 error EnergyMax USB RS User Manual Q Why isn t there a minimum pulse width specification A These pyroelectric energy sensors can function with pulse widths as short as nanoseconds picoseconds or even femto seconds and still measure correctly As described in the previous answer the maximum pulse width specification is important and is limited by the fall time of the sensor so Coherent only specs the maximum not the minimum pulse width As the pulse width gets shorter the only change that occurs is that the damage threshold on the energy sensors decreases When using really short pulses pay close attention to the damage threshold specifications and make use of the damage test slide Q Can I
14. listed as the Master serial number in the Synchronized Trending chart 15 Press the Select Sensor 2 button to display the Synch Configuration Screen Sensor 1 a Sensor2 b _ 0438B10R Synchronization Se This will display the Synch Configuration screen Select Synch Sensor Select Sensor v 16 Pick the second slower sensor from the dropdown menu and then press the 1 OK button to return to the Synch Select comen Gensor Configuration Setup screen Select Sensor Operation 17 Enter the desired math operation i default is an A B ratiometric calcula tion which is shown in this example and then click the OK button to complete setup 18 Press the Reset button in the Front panel 19 Click the Start Data Collection button and then turn ON the lasers 20 View the ratiometric data being trended This data can be logged to a file using the Log Data to File dialog Select Sensor 2 Sensor 1 Sensor b 0438B10R 0388810R mehronization Energy No data Wavelength nm 532 File Settings View Help Select Sensor Energy 5453 3 gt 1 5 9895 3 EnergyMax USB RS User Manual Tutorial Turbo Mode Procedure Using Turbo Mode At high repetition rates above approximately 1 to 2 KHz the sensor can capture and measure every single pulse as
15. storage when it is changed Command CONFigure GAIN COMPensation DEFaultlOFFION Default OFF Query CONFigure GAIN COMPensation Reply OFFION Factor Sets the gain compensation factor which is committed to persistent storage when it is changed The gain compensation factor has no units Error 101 is raised if the gain compensation factor is less than 0 001 or greater than 100 000 0 Command CONFigure GAIN FACTor DEFaultl lt 0 001 100000 0 gt Default 1 0 Query CONFigure GAIN FACTor Reply gain compensation factor Range Select Selects the meter measurement range expressed in Joules Ener gyMax USB RS sensors have two energy ranges Maximum or high range and Minimum or low range Range selection can be accomplished in two ways 1 Express the maximum expected energy measurement in Joules and the sensor firmware will select the best range 2 Select either the maximum or minimum range from within the EnergyMax PC software The measurement range is selected by expressing the maximum expected measurement which must be greater than 0 0 The granted full scale range value is the lowest available full scale range that can measure the maximum expected measurement For example if the list of available ranges is 3 mJ and 30 mJ the maximum expected measurement is 10 mJ and the granted range 15 30 mJ The granted full scale range is the top range available if the maximum expected measuremen
16. to damage beyond repair parts obsolescence or other reasons the Customer may be informed that an Extended Warranty program is not available for the Product If the Product fails and is returned to the Company within one year following the date of recalibration and recertification service the Company will at its option repair or replace the Product or any component found to be defective If the Product must be replaced and the Product is no longer available for sale Coherent reserves the right to replace with an equivalent or better Product This warranty applies only to the original purchaser and is not transferable The foregoing warranties shall not apply and Coherent reserves the right to refuse warranty service should malfunction or failure result from Damage caused by improper installation handling or use Laser damage including sensor elements damaged beyond repair Failure to follow recommended maintenance procedures x Unauthorized product modification or repair 2 Operation outside the environmental specifications of the product Coherent assumes no liability for Customer supplied material returned with Products for warranty service or recalibration THIS WARRANTY IS EXCLUSIVE IN LIEU OF ALL OTHER WARRANTIES WHETHER WRITTEN ORAL OR IMPLIED COHERENT SPECIFICALLY DISCLAIMS THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE IN NO EVENT SHALL THE COMPANY BE LIABLE FOR ANY IN
17. well as send data to the computer Most dual core and quad core computers faster than 2 GHz can process the data and analyze every pulse even at high repetition rates using the full graphical and statistical features of the software As the repetition rate increases however the software will eventually reach a point at which it can miss some of the pulses When that occurs there are two options 1 Enter a Decimation factor a decimation factor of 2 sends 1 2 of the data to the software a decimation of 3 sends 1 3 of the data and so on 2 Enter Turbo mode to log all of the data to a file Turbo mode lets the user continue to collect data for every pulse and save it directly to a file at the fastest rate that the sensor will permit This higher repetition rate logging capability is done by disabling the calculation and display elements of the software including the live display statistics and batch count and plotting This tutorial describes how to use the Turbo mode within EnergyMax PC software WARNING Follow all laser safety procedures The lasers must be switched OFF or shuttered before running the procedure given in this section 1 Connect the system components the following figure shows system components for EnergyMax USB Q EnergyMax USB System Components Sensor cable Meterless sensor power cable connector USB or RS 232 cable connector Operation 2 Start the EnergyMax PC application 3 Se
18. 23431 Medium heatsink 1123432 Large heatsink Increases average power handling on 50 mm aperture EnergyMax sensors Technology Different from all other thermal sensors pyroelectrics measure the rate of change of the sensor temperature rather than the temperature value itself As a result the response speed of the pyroelectric is usually limited by its electrical circuit design and the thermal resis tance of the absorptive coating In contrast other thermal sensors for example thermopiles and bolometers are limited by slower thermal response speeds typically on the order of seconds Pyro electrics respond only to changing radiation that is chopped pulsed or otherwise modulated so they ignore steady background radiation that is not changing with time Their combination of wide uniform spectral response sensitivity and high speed make pyroelectrics ideal choices for a vast number of electro optic applications Technical Description The EnergyMax sensor line uses a pyroelectric element to measure the energy in a laser pulse It does this by producing a large electrical charge for a small change in temperature The active sensor circuit takes the current from the sensor element and converts it to a voltage that the instrument can measure Figure 3 1 below shows the relationship between the current response of the pyroelectric element and the output voltage of the sensor circuit The relationship between the cu
19. 9 measured Pulse processing includes statistics processing and transmission output Command CONFigure DECimation DEFaultl1 99999 Default 1 Query CONFigure DECimation Reply 1 99999 Aperture Diameter Sets the aperture diameter Command CONFigure DIAMeter DEFaultlaperture diameter in mm Default 10 mm Query CONFigure DIA Meter Reply aperture diameter in mm Wavelength Sets the current wavelength which is committed to persistent storage when it is changed If the requested wavelength is greater than the upper wavelength limit the current wavelength is set to the upper wavelength limit Likewise if the requested wavelength 15 less than the lower wavelength limit the current wavelength is set to the lower wavelength limit The minimum and maximum allowed wavelength may also be named as data arguments The query gets the current maximum or minimum allowed wavelengths depending on the optional query data argument Command CONFigure WAVElength MINimuml MAXimuml requested wavelength in nm gt Query CONFigure WAVElength MINimumIMAXimum Reply if MINimum MAXimum is not specified granted wavelength in nm Reply if MAXimum is specified allowed maximum wavelength in nm Reply if MINimum is specified allowed minimum wavelength in nm EnergyMax USB RS User Manual Gain Compensation Enable Disable State Enables or disables gain compensation which is committed to persistent
20. B IR has a slightly higher energy linearity specification of 3 5 Repetition rate linearity is 1 In practice the actual error is often much less than 1 The pyroelectric crystal is sensitive to temperature at a rate of approximately 0 2 per degree Celsius change in temperature Historically this has limited the average power to which a sensor can be exposed This circuit permits measurement of higher pulse energy at faster repetition rates than ever before and enables the use of removable heatsinks EnergyMax sensors have less than 2 error when used at maximum average power and have less than 0 5 undershoot when hit with the full power rating In practice many EnergyMax sensors have typical average power linearity error of less than 1 Temperature Linearity of Quantum EnergyMax Sensors Pulse Width Linearity Spectral Response Temperature Coefficient C Technical Description The Silicon Quantum EnergyMax sensor J 10SI HE has a temperature linearity component because of a photo sensitivity temperature characteristic that varies by wavelength as shown in the figure below In practice the error is less than 1 unless the sensors are used in a very hot environment To calculate A C compare the temperature of the environment within which the sensor is being used to the calibration temperature Add 1 to 2 C for sensor elec tronics Typ 1 5 1
21. DIRECT INCIDENTAL OR CONSEQUENTIAL DAMAGES IN CONNECTION WITH ITS PRODUCTS Obtaining Service Calibration In order to obtain service under this warranty Customer must notify the Company of the defect before the expiration of the warranty period and make suitable arrangements for the performance of service The Company shall in its sole discretion determine whether to perform warranty service at the Customer s facility at the Company s facility or at an authorized repair station If Customer is directed by the Company to ship the product to the Company or a repair station Customer shall package the product to protect from damage during shipping and ship it to the address specified by the Company shipping prepaid The customer shall pay the cost of shipping the Product back to the Customer in conjunction with recalibration and recertification the Company shall pay the cost of shipping the Product back to the Customer in conjunction with product failures within the first twelve months of time of sale or during an extended twelve month warranty period A Returned Material Authorization number RMA assigned by the Company must be included on the outside of all shipping packages and containers Items returned without an RMA number are subject to return to the sender For the latest Customer Service information refer to our website www Coherent com Detailed instructions on how to prepare a product for shipping are described und
22. S LED Light Conditions LED Light Condition Status No light visible If the EnergyMax USB sensor is connected to the in the case of an EnergyMax RS sensor if it is connected to a power source but there are no visible lights the sensor is not powering up properly Test the sensor on another USB port and if that does not solve the problem contact Coherent for service refer to Table 7 1 p 7 5 for contact information Light is on Sensor is functioning Lights flashing The LED flashes for 50 msec with each pulse measurement At high repetition rates it may not appear to be flashing but will appear brighter than when measurements are not occurring EnergyMax USB RS User Manual Powering EnergyMax RS Sensors Watts Mode The EnergyMax RS sensor is powered via 4 to 20 VDC power supply input This power can be applied with either an external power supply not included as shown below or input through Pin 1 of the DB 9 connector optional external power supply can be ordered using part number 1105557 EnergyMax RS System Components Xx Sensor cable Meterless sensor power cable connector Power supply cable connector USB or RS 232 cable connector 4 to 20 VDC power supply EnergyMax pyroelectric sensors can measure average power from a series of pulses Selecting the power measurement mode will change the EnergyMax software to display an
23. This command is ignored if data streaming interface transmission is already disabled Command ABORt Query none The sensor can be queried for information for the purposes of unit identification and quality control Serial Number The query which is always available gets the serial number Query SYSTem INFormation SNUMber Reply quoted serial number Part Number The query which is always available gets the serial number Query SYSTem INFormation PNUMber Reply quoted part number Model Name The query which is always available gets the model name Query SYSTem INFormation MODel Reply quoted model name Calibration Date The query which is always availale gets the calibration date Query SYSTem INFormation CDATe Reply quoted calibration date Calibration Data Streaming Transmission Interface Seclion Host Interface Manufacturing Date The query which is always available gets the manufacturing date Query SYSTem INFormation MDATe Reply quoted calibration date Default Wavelength The query which is always available gets the default wavelength Query SYSTem INFormation WAV Elength Reply default wavelength in nm commands and queries contained in this section are used exclu sively by the factory for calibration purposes Error 100 will be raised if a valid password has not sent since the last reset cycle if any command or query contained in this section except
24. al and Electronic Equipment WEEE Directive 2002 96 EC is represented by a crossed out garbage container label Figure 1 1 below The purpose of this directive is to minimize the disposal of WEEE as unsorted municipal waste and to facilitate its separate collection Waste Electrical and Electronic Equipment Label EnergyMax USB RS User Manual Declaration of Declaration of Conformity certificates are available upon request Conformity Introduction Description DESCRIPTION In this section Introduction this page Product overview 2 2 Sensor overview p 2 3 MaxBlack EnergyMax sensors 2 4 Diffuse Metallic EnergyMax sensors p 2 5 MaxBlack EnergyMax sensors with diffusers 2 6 MaxUV EnergyMax sensors 2 7 Quantum EnergyMax sensor p 2 8 EnergyMax USB RS sensors have miniaturized meter electronics that are integrated within the sensor cable The entire range of Coherent high performance EnergyMax sensors is available in this form factor with either RS 232 or USB 2 0 connectivity enabling the measurement of the energy per pulse or average power of pulsed lasers from the nanojoule to the multi joule level over wavelengths from the deep ultraviolet through the far infrared and from single pulses to repetition rates of 10 kHz with measurement of every pulse Multiple EnergyMax sensors can share a trigger internal or external for synchronized operation for example to enabl
25. ation NFigure DECimation NFigure DIAMeter ONFigure DIAMeter Queries the aperture diameter NFigure WAV Elength NFigure WAV Elength NFigure GAIN COMPensation NFigure GAIN COMPensation NFigure GAIN FACTor NFigure GAIN FACTor NFigure RANGe SELect CONFigure RANGe SELect Queries the meter measurement range Q Sets the meter measurement mode type Q Sets the statistics processing mode Queries the statistics processing mode Sets the pulse decimation rate Queries the pulse decimation rate ara Sets the aperture diameter Q Sets the current wavelength Queries the current wavelength Enables or disables gain compensation Queries the gain compensation setting Sets the gain compensation factor Queries current gain compensation factor Selects the meter measurement range Statistics Mode Control Host Interface Table 6 1 Host Command Quick Reference Sheet 2 of 2 Command CONFigure STATistics BSIZe CONFigure STATistics BSIZe CONFigure STATistics RMOde CONFigure STATistics RMOde CONFigure STATistics STARt CONFigure STATistics STOP Description Page 6 11 6 11 6 11 6 11 6 11 6 11 Sets the statistics batch size Queries the statistics batch size Selects the action to be taken at the end of a statistical batch Queries the action to be taken at the end of a statistical batch Terminates the current statistical batch and start a new one Terminat
26. ax Sensors Description These sensors are specifically optimized for use with ArF lasers operating at 193 nm and KrF lasers operating at 248 nm and feature high accuracy and large active areas up to 50 mm The EnergyMax series uses a unique coating called MaxUV that delivers supe rior long term damage resistance Two of the 50 mm diameter models labeled as with Diffuser in the model name incorporate a DUV quartz diffuser for increased coating damage resistance Both sensors accept an user installable optional heatsink refer to Increasing Average Power With Heatsinks p 3 1 which can increase the maximum energy or average power range These heat sinks allow 25 mm sensors to be used up to 18W average power and 50 mm sensors to be used up to 43W average power both at 193 nm NOTICE Use of EnergyMax sensors at average power levels beyond the base model average power specification without the optional heatsink can cause permanent damage to the sensor Table 2 4 MaxUV EnergyMax Sensor Specifications J 50MUV 248 J 25MUV 193 5 ain Ween x m 5 58 1 n cable Cable Cable Type Item 1191449 1191448 EnergyMax USB RS User Manual Quantum The Quantum EnergyMax sensor incorporates a Silicon photodiode EnergyMax Sensor has a large 10 mm clear aperture and operates at a repetition rate from single pulse up to 10 KHz every
27. circumstances affect the terms of any warranty agreement between Coherent and the buyer Operating a Coherent product with any of its interlocks defeated is always at the operator s risk Table of Contents TABLE OF CONTENTS Signal Words and Symbols in this Manual esee enne vii NORIS a AT E dese eR UL Mrd vii pud e CP viii Preface sod aoo DL eg rs 1 Export Control Laws Compliance 1 P blica ton Update S 1 Enpackmg and 1 Post and stand Assembly X Safety ose obtento bie eto Accu cip tuse Sante Mc A EE 1 1 Environmental Regulations axes 1 1 1 1 Waste Electrical and Electronic Equipment WEEE 2002 1 1 Declaration Of 1 2 at aah 2 1 MS oe 2 1 Preduct OVeryie dM DI mS 2 2 Product Eetungs ts co cte ue crie mie utto ted 2 2 Software Fedtl fes 2 3 Sens r OVerVIe Wc 2 3 MaxBlack EnergyMax SensDS oc ote b p GIN BEA MINORI an ab PA RIS BA M I Reed 2 4 Diffuse Metallic Sensors cest ab palea udi quein 2 5 MaxBlack EnergyMax
28. d so message terminator flexibility can be attained A command or query is considered incomplete without the terminator The maximum length of any message received by the sensor is limited to 200 bytes messages sent by the sensor and defined in this section are termi nated by a carriage return and line feed pair EnergyMax USB RS User Manual The following table gives a brief description of all host commands OS omman 5 5 For detailed information about a specific command go to the page Quick p g pag referenced in the right hand column Reference Table 6 1 Host Command Quick Reference Sheet 1 of 2 SCPI INTERFACE SCPI Common Commands SYSTem COMMunicate SERial BAUD Selects the transmit and receive baud rates together when the device has an RS 232 serial host port SYSTem COMMunicate SERial BAUD Queries the currently selected baud rate 66 Error Record Reporting and Collection SYSTem ERRor COUNt Queries the number of error records in the error queue at the 6 7 time of the query SYSTem ERRor NEXT Queries the next error record s in the error queue SYSTem ERRor ALL Queries all error records in the error queue at the time of the ha query SYSTem ERRor CLEar Clears all error records in the error queue 68 Measurement Setup and Control NFigure MEASure TYPE ONFigure MEASure TYPE Queries the meter measurement mode type NFigure MEASure STATistics NFigure MEASure STATistics NFigure DECim
29. d in the National Institute of Standards Guidelines for Evaluating and Expressing Uncertainty NIST Technical Note 1297 1994 Edition The combined accuracy of the measurement is calculated by using the law of propagation of uncertainty using the root sum square square root of the sum of squares sometimes described as summing in quadrature where Measurement Accuracy Jp W where U Percent Calibration Uncertainty and Wave length Accuracy Example 1 J 10SI HE used at 355 nm U 396 W 5 Measurement Accuracy 43 52 49425 5 8 Example 2 J 10MB LE used at 532 nm U 296 W z 296 Measurement Accuracy J2 22 4 4 2 8 Table 3 4 Wavelength Compensation Accuracy Sheet 1 of 2 Wavelength Compensation Accuracy 46 Calibration Sensor for wavelengths other than the Wavelength calibration wavelength nm Multipurpose sensors MaxBlack coating 1064 nm coating J 50MB YAG High Rep Rate sensors Diffuse metallic 3 Absorption 96 Technical Description Table 3 4 Wavelength Compensation Accuracy Sheet 2 of 2 Wavelength Compensation Accuracy 46 Calibration for wavelengths other than the Wavelength calibration wavelength nm Figure 3 3 below and Figure 3 4 p 3 8 plot the spectral charac teristics of each sensor Figure 3 3 plots the percent absorption of each coating by wavelength Figure 3 4 plots also by wave length the spectral sensi
30. d trend data based on average power readings Average power is calculated by measuring the energy of the pulses and dividing by the periods between them and thus requires at least two pulses to make a power measurement Each subsequent pulse defines the period for the previous pulse until the last pulse see figure below The last pulse in a pulse burst will not yield a power measurement since the period after the last pulse is indeterminate This method permits more accurate tracking of initial average power transients for pulsed lasers Figure 4 1 Average Power Diagram When measuring the average power of a laser burst or continuous pulse train the frequency of the pulses must be greater than or equal to 1 Hz and less than or equal to the maximum repetition rate capa Triggering Internal Triggering Mode Operation bility of the pyroelectric sensor Multiple bursts separated by one second or less are treated as a single burst and accordingly the gap between bursts appears as a lower power Short bursts with rep rates greater than 1 kHz may not yield a power measurement EnergyMax sensors can be triggered externally via the Ext Trig connector This is particularly useful in an electrically noisy envi ronment EnergyMax sensors can be set to synchronize with either the positive or negative transition of this external signal When a reliable external trigger is not available an EnergyMax sensor can be set to use its ow
31. d via USB connection EnergyMax RS provides RS 232 connectivity Power input provided via 4 20 VDC input Fast 14 bit A D converter supports measurement accuracy similar to that found in LabMax TOP meter Up to five digits of measurement resolution e Each sensor incorporates a unique spectral compensation curve for accurate use at wavelengths that differ from the cali bration wavelength External and internal triggering available Units can share triggers to provide synchronized measure ments for applications such as ratiometry Software Features Sensor Overview Energy 31 7 nJ Smooth 100ms Area 1 1 00 Mean Std Dev OF 3210 307p Mean 31 35 3270 Dose Rep Rate 215 1 00 KHz gt E E Description 100 5 806 26 9 612 52 9 418 78E 9 22 Sensor 1 317nJ 225 04 9 Sensor 2 900 158 165 Math Autoscale 1 06 07 31 30 9 67 Setup Tuto Active Display inactive OFF Log Data to OFF Log Data im OFF 1 000 Collection Mode Time Interval interval s Streaming 0 10 EnergyMax PC applications software is supplied free with every EnergyMax sensor and includes the following features Trending tuning histogram at data rate up to kHz Statistics mean minimum maximum and standard deviation dose fluence and missed pulses Ability to log data to a file at up to 10 kHz in Turbo mode
32. de on Variable decimation Aperture diameter persistent Current wavelength persistent Gain compensation factor persistent Gain compensation state persistent 9600 9600 Pulse only Pulse only X Last granted setting The defaul wavelength Statistics batch size persistent Trigger edge Rising Rising Trigger bus participation mode Data streaming transmission interface state Wavelength correction cursor ff ff 1 1 00 Statistics restart mode persistent Trigger level Trigger delay Host Interface Glossary Message The transmission of a properly terminated string from host to sensor or from sensor to host Reset cycle The reception of a reset command or the action of disconnecting power and then connecting power to the sensor Either event sets all non persistent operational parameters to their default settings Ignored command query A defined response for commands or queries in which no internal or external action is taken and the command or query is dropped The meter responds to ignored commands queries as if the command or query was never sent Host Interface Factory settings Persistent settings typically set by the manufac turer They are parameters whose access is restricted by password Factory settings do not include operational parameters Missed pulse A measured pulse that registers with a peak value that does not exceed the baseline value Missed pulses are detectable only un
33. der external trigger conditions EnergyMax USB RS User Manual Calibration CALIBRATION AND WARRANTY Coherent Calibration Facilities and Capabilities In this section Coherent calibration facilities and capabilities this page Optical calibration method p 7 2 Limited warranty 7 3 ia Extended warranty p 7 4 Warranty limitations p 7 4 Obtaining service p 7 5 Product shipping instructions p 7 6 As the largest laser manufacturer in the world Coherent has been able to build state of the art calibration facilities containing the widest possible range of laser types and technologies This enables us to perform instrument and sensor calibration under virtually any combination of wavelength power and operating characteristics Sensors are calibrated against NIST traceable working standard sensors which are in turn calibrated against NIST calibrated golden standard sensors These working and golden standards are main tained with the utmost care recalibrated annually and verified even more regularly We maintain multiple NIST calibrated standards at many laser wavelengths to support the growing calibration needs of our customers Optical calibration is a core competency at Coherent and we strive to continually improve our methods precision and repeatability Additionally most of the calibrations are performed with highly automated systems thus reducing the possibility of human error to near
34. e pulse ratiometry Furthermore EnergyMax USB RS sensors significantly decrease the overall cost of ownership by removing the need to purchase a separate more costly meter with each sensor and by decreasing annual calibration costs related to integrating the electronics into the sensor These products are also useful in the lab and research setting because they can be used as standalone instruments with a computer or integrated smoothly into any experiment with an automated control and data acquisition system These meterless sensors are particularly attractive to system builders because their small size permits them to be easily embedded within instrumentation and their RS 232 or USB communications capabil ities facilitate automated operation by a host computer EnergyMax USB RS User Manual Product Overview Product Features Coherent EnergyMax PC application software provides a virtual instrument interface for sensors that enable the operator to take laser energy readings log data and compute measurement statistics Users can also write their own software using host interface commands that control all aspects of energy meter operation Able to measure every pulse up to 10 kHz and stream this data over the host port USB only RS 232 capable of measuring every pulse up to 10 KHz and streaming data over host port at a rate of 1 kHz EnergyMax USB provides direct USB high speed 2 0 tion to PC Power provide
35. ector Power supply cable connector RS 232 cable connector 4 to 20 VDC power supply EnergyMax USB RS User Manual Confirm that the blue LED is lit Start the EnergyMax PC software EnergyMax RS sensors only Click Add a RS 232 Serial Port on the Setting dropdown menu EnergyMax RS sensors only On the Add Serial Sensor menu select the Com Port and Baud Rate parameters and then click the OK button Select the highest baud rate supported by the computer Select the sensor serial number from the Select Sensor dropdown menu In the example at right the selected sensor is 0438B IOR Press the Start Data Collection button and then turn ON the laser to start taking energy measurements Blue LED File Settings View Sek Resolution 1 se Log File Format 4 Please Select COM port to add and tt baud Baud Rae 2560 Note Tha COM quesed Coherent and d the query Awad not be added to the lat To remove thie senor bom the lat the ErnesquMas PC pogam File Settings View Help Select Sensor Stat Data Cole File Settings View Help Select Senso E Cu Operation Tutorial EnergyMax USB and EnergyMax RS sensors can be synchronized for greater accuracy when performing A B ratiometry measure Synchronization ments The purpose of synchronizat
36. ed in house RS sensors Use a standard off the shelf RS 232 straight through extension cable to increase the length Overview Message Terminators Messages Received by the Sensor Messages Sent by the Sensor Host Interface HOST INTERFACE In this section Overview this page Message terminators this page 5 Host command quick reference 6 2 SCPI interface section p 6 4 Data streaming transmission interface section 6 17 2 Operational parameters 6 18 Host interface glossary p 6 18 This section defines the host interface of the EnergyMax USB RS meterless energy sensor and includes high level commands responses and behavior that a user or host computer can expect from the sensor The low level interface which covers RS 232 USB and other types of communication methods is not presented in this section except where it directly impacts the high level interface Messages between the sensor and the host computer are comprised entirely of ASCII string characters with the exception of the Data Streaming Transmission Interface which sends unsolicited uniquely coded out of band data transmissions Strictly binary messages are not supported All message strings passing through the host interface are terminated to signal the end of a message string Messages received by the sensor must be terminated by a carriage return decimal 13 Line feed characters decimal 10 are discarde
37. ed in the Quantum EnergyMax sensors varies greatly by wavelength The sensors have spectral compensation to account for this varia Description tion refer to Spectral Response p 3 5 so that measurements are still accurate when used at wavelengths different from the cali bration wavelength Table 2 5 Quantum EnergyMax Sensor Specifications Wem 8 3 sensor cable Cable Length mi 1 urs Item Number USB 1191434 RS 1191427 EnergyMax USB RS User Manual Technical Description TECHNICAL DESCRIPTION Increasing Average Power With Heatsinks In this section Increasing average power with heatsinks this page Pyroelectric technology p 3 2 Damage thresholds 3 3 Measurement linearity p 3 4 Spectral response 3 5 Using a heatsink increases the average power handling capability of EnergyMax sensors These power levels are done by combining active temperature compensation circuitry and enhanced thermal management techniques Maximum average power is wavelength dependent because absorption changes with wavelength Maximum average power is inversely proportional to the spectral absorption The 25 mm and 50 mm aperture sensors accept optional heatsinks that users can install by mounting them on the back of the sensor The heatsinks expand the average power handling capability as outlined below Average power specification is dependent on coating and wavel
38. eld is the firmware date having the form lt 3 character month name gt lt day of the month gt lt year gt The reply string is not quoted Example identification string Coherent Inc EnergyMax RS V1 3 Jul 10 2009 Note The quotes are not transmitted The system commands and queries access functionality that is exclusive of sensor measurement functions These commands can be sent at any time without affecting a measurement in progress System Restore Restores all user settings to the factory state refer to Table 6 6 p 6 18 Command SYSTem RESTore Query none Message Handshaking Selects the state of SCPI message roundtrip handshaking Command SYSTem COMMunicate HANDshaking ONIOFF Reply OK if ON is selected otherwise no reply is sent Query SYSTem COMMunicate HANDshaking Reply ONIOFF If handshaking is ON Empty commands commands with only whitespace charac ters reply with OK r n Valid commands with valid data reply with OK r n Valid queries with valid data reply as explicitly defined else where in this section followed by OK r n EnergyMax USB RS User Manual Error Record Reporting and Collection Valid commands or queries which result in an error reply with ERR lt n gt r n where n is the error code number trefer to Error Record Reporting and Collection p 6 6 Unrecognized commands or queries reply with ERR100 r n
39. ength Table 3 1 p 3 2 shows average power ratings for several wavelength and sensor combinations Note that 10 mm aperture sensors do not accept heatsinks 25 mm aperture sensors accept small and medium heatsinks and 50 mm aperture sensors accept large heatsinks NOTICE Use of EnergyMax sensors at average power levels beyond the base model average power specification without the optional heatsink can cause permanent damage to the sensor EnergyMax USB RS User Manual Wavelength un 1 50 amp LE J 25MB HE amp LE wl J 50MT 10KHZ J 25MT 10KHZ wa J 50MB YAG J 50MB IR POOR we Dimer 2 25v paw Pow ww Table 3 1 Average Power Ratings Heatsink we ase eme a Average power ratings are based upon testing at the listed wavelength not applicable for Quantum EnergyMax sensors b 50 mm EnergyMax sensors are compatible with the large heatsink c 25 mm EnergyMax sensors are compatible with small and medium heatsinks d 10 mm EnergyMax sensors do not have a heatsink available Item Number 1123430 Small heatsink Increases average power handling on 25 mm aperture EnergyMax sensors Name Table 3 2 below lists the different heatsinks that are available for EnergyMax sensors Table 3 2 Available Heatsinks Description 11
40. er Product Shipping Instructions p 7 6 Table 7 1 Coherent Service Centers Lei Phone J Fa Emi 1 800 343 4912 503 454 5777 info service Coherent com 49 6071 968 0 49 6071 968 499 info service Coherent com 503 454 5700 503 454 5777 info_service Coherent com EnergyMax USB RS User Manual Product Shipping Instructions To prepare the product for shipping to Coherent l Contact Coherent Customer Service refer to Table 7 1 p 7 5 for a Return Material Authorization number Attach a tag to the product that includes the name and address of the owner the person to contact the serial number and the RMA number you received from Coherent Customer Service Position the protective cap over the sensor Place the sensor in the original shipping carton and then situate the foam cutout over the sensor to hold it in place during ship ment If the original packing material and shipping carton are not available obtain a corrugated cardboard shipping carton with inside dimensions that are at least 6 in 15 cm taller wider and deeper than the sensor The shipping carton must be constructed of cardboard with a minimum of 375 16 170 kg test strength Wrap the sensor with polyethylene sheeting or equivalent material and then cushion the sensor in the shipping carton with packing material or urethane foam on all sides between the carton and the sensor Allow 3 in 7 5 cm on all sides the top and
41. ered safety messages and not prop erty damage messages Vil EnergyMax USB RS User Manual Symbols PPPRRPP The signal words DANGER WARNING and CAUTION are always emphasized with a safety symbol that indicates a special hazard regardless of the hazard level This symbol is intended to alert the operator to the presence of important operating and maintenance instructions This symbol is intended to alert the operator to the danger of exposure to hazardous visible and invisible laser radiation This symbol is intended to alert the operator to the presence of dangerous voltages within the product enclosure that may be of sufficient magnitude to constitute a risk of electric shock This symbol is intended to alert the operator to the danger of Electro Static Discharge ESD susceptibility This symbol is intended to alert the operator to the danger of crushing injury This symbol is intended to alert the operator to the danger of a lifting hazard viii Preface Export Control Laws Compliance Publication Updates Unpacking and Inspection Preface This manual presents user information for the Coherent TM EnergyMax meterless energy sensors For complete software installation instructions refer to the EnergyMax USB RS Software Installation and Quick Start Guide 1186241 inside the CD case that shipped with your product It is the policy of Coherent to comply strictly with U S export contro
42. es the current statistical batch if a batch is in progress Trigger Parameters TRIGger SOURce TRIGger LEVel TRIGger LEVel TRIGger SLOPe TRIGger SLOPe TRIGger DELay TRIGger DELay TRIGger SEQuence TRIGger BUS PMODe BUSINBUS TRIGger BUS PMODe Selects the trigger source 6 12 6 12 6 12 6 12 6 12 6 12 6 12 6 13 6 13 Sets the trigger level Queries the trigger level Selects the external trigger edge Queries the external trigger edge Selects the external trigger delay time Queries the external trigger delay time Sets the sequence ID Sets the trigger bus participation mode Queries the trigger bus participation mode 1 ww Data Streaming Transmission Interface Gating Sensor Information SYSTem INFormation MODel SYSTem INFormation CDATe Queries the calibration date N S 3 a amp 5 E S zh 5 3 SYSTem INFormation MDATe Queries the manufacturing date SYSTem INFormation WAV Elength Queries the default wavelength EnergyMax USB RS User Manual SCPI Interface Section Syntax and Notation Conventions Commands and Queries SCPI Common Commands Unless otherwise specified all SCPI commands and queries follow the syntax and notation conventions specified by the SCPI Standard For more information refer to the SCPI Standard found on the IVI Foundation website The base 10 numeric data format specification is used heavily in this section Unles
43. g G EnergyMax USB RS User Manual MaxBlack EnergyMax Sensors With Diffusers These sensors are specifically designed for high energy and high peak power lasers operating at relatively low repetition rates such as those based Nd YAG Ruby Ho YAG and Erbium The J 50MB YAG sensor can be used with beams up to 35 mm in diam eter and can work at 1064 nm 532 nm 355 nm and 266 nm without the need to change or self calibrate diffusers or any other accesso ries Both sensors combine a MaxBlack coating and a diffuser to produce superior damage resistance characteristics This combina tion enables operation with lasers that produce either very high energy per pulse or very high peak fluences NOTICE Use of EnergyMax sensors at average power levels beyond the base model average power specification without the optional heatsink can cause permanent damage to the sensor Table 2 3 MaxBlack EnergyMax Sensor With Diffusers Specifications Max Energy Density J cm 1064 1064 2940 Cable Length m J 50MB IR J 50MB YAG 30 15 30 14 0 at 1064 nm 10 ns gt 100 at 2940 nm 100 us 2 8 at 532 nm 10 ns 0 75 at 355 nm 10 ns 1 0 at 266 nm 10 ns IR 3 sensor cable 1 USB RS cable 1191437 1191440 1191430 Modified sensors with higher repetition rate energy range and or pulse width are available Con tact Coherent MaxUV EnergyM
44. gyMax Sensors With Diffusers eese 3 8 Average Power RM EM 4 2 Internal Ingeer Dhreshold coniu eee rh le Bee ede 4 4 External Trigger Input Circuitry 5 1 bnergyMax USB Standard Cable 5 2 Ratiometric Method of Optical Calibration esee 7 3 LisT OF TABLES MaxBlack EnergyMax Sensor Specifications 2 4 Diffuse Metallic EnergyMax Sensor Specifications eene 2 5 MaxBlack EnergyMax Sensor With Diffusers 8 22 22221 1 2 6 MaxUV EnergyMax Sensor Specifications eese rennen 2 7 Quantum EnergyMax Sensor Specifications 2 2 9 Average Power Ratings 3 2 Available des Ze ee estes 3 2 EnergyMax Damage Thresholds Capabilities 3 3 Wavelength Compensation 3 6 EnergyMax USB RS User Manual 4 1 6 1 6 3 6 4 6 6 7 1 EnergyMax USB RS LED Light Conditions eee eene eene e 010000016 4 1 Host Command Quick Reference 6 2 Error Codes and Description Strings 6 7 Measurement Data Record Formats Statistics Mode Off 6 15 Measurement Data Record Formats Statistics Mode On
45. ion mode is to make sure that data being reported by multiple sensors is correlated sequentially when triggered by a common triggering event To do synchronization EnergyMax USB and RS sensors are designed with the following features The sensor units stackable and automatically activate a common trigger bus when stacked together e The electronics module on the bottom of the module stack takes control of the trigger bus Each measurement made during trigger event is sequentially numbered Procedure Taking This procedure describes how to connect two EnergyMax USB a Synchronized EnergyMax RS sensors to your PC and take a synchronized A B Ratiometric ratiometric reading using the EnergyMax PC software Reading WARNING Follow all laser safety procedures The lasers must be switched OFF or shuttered before running the procedure given in this section 1 Connect the system components the following figure shows system components for both EnergyMax USB Ener gyMax RS sensors select the one that s applicable for your system Li b Sensor cable LUNA PON EnergyMax USB System Components Q EnergyMax RS System Components Sensor cable Meterless sensor power cable connector Power supply cable connector RS 232 cable connector USB cable 4 to 20 VDC power supply EnergyMax USB RS User Manual Start the Energy Max PC application Ene
46. l laws Export and re export of lasers manufactured by Coherent are subject to U S Export Administration Regulations which are administered by the Commerce Department In addition shipments of certain components are regulated by the State Department under the Inter national Traffic in Arms Regulations The applicable restrictions vary depending on the specific product involved and its destination In some cases U S law requires that U S Government approval be obtained prior to resale export or re export of certain articles When there is uncertainty about the obligations imposed by U S law clarification must be obtained from Coherent or an appropriate U S Government agency Products manufactured in the European Union Singapore Malaysia Thailand These commodities technology or software are subject to local export regulations and local laws Diversion contrary to local law is prohibited The use sale re export or re transfer directly or indirectly in any prohibited activities are strictly prohib ited To view information that may have been added or changed since this publication went to print connect to www Coherent com components of the Coherent EnergyMax USB RS sensor system are carefully tested and inspected before shipment NOTICE Save the inner container to store the components when not in use and to send the components to Coherent for calibration EnergyMax USB RS User Manual Inspect each of the fo
47. l regulations 1 1 RoHS compliance 1 1 Waste Electrical and Electronic Equipment WEEE 2002 1 1 Extended warranty 7 4 F Frequently asked questions 8 1 H Heatsinks 3 1 Hostinterface 6 1 I Increasing average power with heatsinks 3 1 Interface Host 6 1 ISO 9001 2000 7 1 Item part numbers 2 4 L Label Waste Electrical and Electronic Equipment WEEE 2002 1 1 LED status indicators 4 1 5 1 Limited warranty 7 3 Linearity 3 4 M MaxBlack coating 2 4 MaxBlack EnergyMax sensors 2 4 MaxBlack EnergyMax sensors with diffusers 2 6 Maximum Average power 2 4 Energy 8 1 Energy density 2 4 Pulse width 2 4 Repetition rate 2 4 MaxUV EnergyMax sensors 2 7 Measurement linearity 3 4 Average power 3 4 Energy 3 4 Pulse width 3 5 Repetition rate 3 4 Messages Received by the sensor 6 1 Sent by the sensor 6 1 Index 1 EnergyMax USB RS User Manual N NIST traceability 7 1 Noise equivalent energy 2 4 Obtaining service 7 5 Operating the software 4 1 Optical calibration Method 7 2 Ratiometric method 7 3 Optical calibration method Calibration fundamentals 7 2 Calibration verification 7 3 EnergyMax NIST traceable optical calibration 7 2 Re certify once a year 7 2 P Post and stand assembly x Power measurements taking 4 5 Preface vii Product overview Diffuse metallic EnergyMax sensors 2 5 MaxBlack EnergyMax sensors 2 4 MaxBlack EnergyMax sensors with diffusers 2 6 MaxUV EnergyMax sensors 2 7 Quantum EnergyMax Sen
48. lect the sensor serial number from the Select Sensor dropdown menu fie Settings Help the example at right the selected sensor is 0438 10 4 Select the applicable Measurement Measurement Range High Low and adjust the Trigger Level to get a good measure T ment For information on setting the pd Sample Size Time Interval trigger level refer to Internal Trig 100 f Steaming gering Mode p 4 3 5 Click Turbo on the Setting dropdown menu fis Add a RS 232 Serial Port The Turbo Active Display Inactive indicator light will turn green to indicate that the software is now in Turbo mode Measured values will show data PC File Settings View Help SACU TT f Select Sensor 04388108 Stat Data Collection Tending Tuning Trending Energy Off Wavelength am 532 0 Turbo Indicator Mean StdDev light Nodata Nodaa v Autoscale 4 Mode 2 Aclive Display Inactive Min Max r3 E Measurement Range data data C Power High 1 152E 06 Trigger Level 36 OFF Log Data to File 8 C Decmation 5 00 Gain Correction OFF 1 000 No data Sample Collection 1 Collection Count Fred Sample Size Time Interval Interval 0 Continuous 100
49. llowing items for damage The EnergyMax sensor Post and stand components refer to Post and Stand Assembly below Damage test slide only included with sensors that do not have a built in diffuser window s Heatsink if ordered optional accessory Advise Coherent immediately of any shortages or damage refer to Obtaining Service p 7 5 A Returned Material Authorization RMA will be issued for any damaged sensor trefer to Product Shipping Instructions p 7 6 Post and Stand Assembly Post Thumbscrew 1 4 20 SHC Screw supplied Environmental Regulations RoHS Compliance Waste Electrical and Electronic Equipment WEEE 2002 Figure I 1 Safety SAFETY Carefully review the following safety information to prevent personal injury and to prevent damage to this product or any equip ment connected to it There are no user serviceable parts in Coherent EnergyMax sensors For service information refer to Obtaining Service p 7 5 WARNING Do not operate the system if its panels are removed or any of the internal circuitry is exposed WARNING Do not operate the system in wet or damp conditions or in an explosive environment NOTICE Do not operate the system if there are suspected failures Refer damaged units to qualified Coherent service personnel These Coherent products are RoHS EU Restriction of Hazardous Substances compliant The European Waste Electric
50. ly zero Strict quality inspections during many stages of calibration and testing assure a precise and accurate instru ment that is NIST traceable and CE marked The benefit to our customers is that instruments calibrated by Coherent will consis tently perform as expected under their actual use conditions We are a registered ISO 9001 2000 company our products are NIST trace able and our calibration labs are fully ANSI Z540 compliant In addition to the technological advantage we also strive to deliver the best service in the industry with a knowledgeable and responsive staff and rapid turnaround EnergyMax USB RS User Manual Optical Calibration Method EnergyMax NIST Traceable Optical Calibration Re certify Once a Year Calibration Fundamentals Coherent provides a NIST U S National Institute of Standards and Technology traceable calibration certificate with every sensor that is shipped The calibration factor of an EnergyMax USB RS energy sensor specifies the magnitude of the pulse output for one joule optical input Coherent laser power and energy meters are precision instruments capable of delivering very accurate measurements as well as providing many years of useful service To maintain this high level of performance and to ensure compliance with your quality and ISO certification it is important to have your measurement system serviced and re certified once per year Extended use of laser power and energy
51. meters and sensors as well as environmental factors can have an adverse effect on accuracy and can also result in wear and or damage to parts critical to maintaining optimum performance EnergyMax USB RS sensors contain the analog to digital conver sion peak detection and gain stages integrated into the sensor cable The electronics and sensor are calibrated together as a system using the following calibration principles Coherent performs an optical calibration using a ratiometric substi tution method to remove laser energy variation as a source of error and to eliminate dependence on the absolute value of the beam splitter ratio as diagrammed in the figure shown below By introducing a beamsplitter each laser pulse can impinge on two sensors and the ratio of two sensor outputs can be measured on each pulse This ratio is independent of the actual pulse energy Calibration Verification Limited Warranty Calibration The actual calibration involves calculating ratios with respect to the reference sensor for the working standard and then for the Unit Under Test UUT U U T Reference Sensor Does not depend Working on splitter Standard Figure 7 1 Ratiometric Method of Optical Calibration To produce a ratio a sample comprised of 15 seconds of data is taken and then averaged and is then used to calculate the final calibration factor After calibration each se
52. n internal circuitry to extract a trigger from the incoming signal This is called Internal Triggering discussed below Internal triggering refers to finding a trigger automatically from the incoming signal The trigger level setting helps filter out low level noise that can cause false triggering from the sensor The trigger level is a percentage of the energy level listed for the measurement range that is currently selected So if a measurement range of 50 mJ is selected in the software and a trigger level of 196 is entered the trigger threshold will be 0 5 mJ This means that any values above 0 5 mJ will be captured as a valid reading and any values below 0 5 mJ will be ignored as noise Using the combination of the measurement range selection and the trigger level setting can help the sensor accu rately measure without picking up noise or false triggers in the read ings EnergyMax USB RS User Manual 15 10 8 Trigger Level 5 Setting the Wavelength In the following figure the internal trigger threshold has been set to 8 shown as a dashed line Pulse will definitely not generate a reliable trigger Pulse B generate a trigger but not reliably Pulses and D will definitely generate reliable triggers Definitely will not trigger May trigger but not reliable Definitely will trigger Figure 4 2 Internal Trigger Threshold The trigger is synchronous with the leading edge of the pulse but
53. new one Command CONFigure S TATistics S TARt Query none The command is ignored if statistics mode is off Stop a Batch EnergyMax USB RS User Manual Trigger Parameters Terminates the current statistical batch if a batch is in progress Command CONFigure STATistics STOP Query none The command is ignored if statistics mode is off or a batch is not in progress Trigger Source Selects the trigger source Command TRIGger SOURce DEFaultIINTernallEXTernal Default INTernal Query TRIGger SOURce Reply INTIEXT The trigger source setting has no effect on devices positioned as slaves in trigger bussed configurations slaves receive their trig gers from the trigger bus Internal Trigger Level Sets the trigger level expressed as a percentage of full scale capa bility Command TRIGger LEVel DEFaultl0 01 30 0 Default 5 Query TRIGger LEVel Reply 0 01 30 0 The trigger level setting has no effect when external triggering is selected or on devices positioned as slaves in trigger bussed config urations All slaves receive their triggers from the trigger bus External Trigger The external trigger settings has no effect when internal triggering is selected or on devices that are positioned as slaves in trigger bussed configurations Edge Select Selects the external trigger edge The selected trigger edge is the external trigger event Command TRIGger SLOPe DEFaultlPOSitivelNEGative Defa
54. nsor is tested to verify the calibration The result of this verification is presented on the second page Each sensor contains two gain stages Each stage is calibrated and tested in this manner Coherent Inc the Company warrants its laser power and energy meters and sensors products Products to the original purchaser the Customer that the product is free from defects in materials and workmanship and complies with all specifications active at the time of purchase for a period of twelve 12 months Coherent Inc will at its option repair or replace any product or component found to be defective during the warranty period This warranty applies only to the original purchaser and is not transfer able EnergyMax USB RS User Manual Extended Warranty Warranty Limitations Coherent Inc the offers original purchasers the Customer purchasing laser power and energy meters and sensors products Products an extended twelve 12 month warranty program which includes all parts and labor In order to qualify for this warranty a Customer must return the Product to the Company for recalibration and recertification The Company will re certify the Product provide software upgrades and perform any needed repairs and recalibrate the Product for a fixed service fee as estab lished by the Company from time to time and in effect at the time of service If the product cannot be re certified due
55. nt Inc 3 2015 RoHS printed in the USA Part No 1186243 Rev AB
56. pulse The main difference between a Quantum EnergyMax sensor and other Coherent EnergyMax sensors is its sensitivity A Quantum EnergyMax sensor can measure much smaller signals than the rest of the EnergyMax sensor line because it uses a photodiode rather than a pyroelectric element Due to the quantum nature of their response photodiode sensors are inherently more sensitive than pyroelectric sensors which are thermal based One consequence of this extra sensitivity is the possibility of measurement error or noise from stray modulated light sources for example stray reflections or room lights in a laboratory environment For this reason Quantum EnergyMax sensors are designed for use with a small integrated input beam tube which limits the field of view of the sensor aperture This tube is removable for alignment purposes and custom applications The following chart plots the minimum and maximum measurable energy across all wavelengths This chart can be used to find the measurable energy range for wavelengths different from that in the specifications table 532 nm 10 pJ 1 pd 2 J 10Si HE 100 nJ 10 nJ 100 pJ Energy J 10 pJ 1 pJ 200 400 600 800 1000 1200 1400 1600 1800 Wavelength nm Figure 2 1 Spectral Sensitivity Curves for Quantum EnergyMax Sensor The output of the Silicon and Germanium photodiodes us
57. rement Setup and Control Command none Query SYSTem ERRor NEXT lt error record count gt Default not applicable Reply next available error record s gt Error Query Queries all error records in the error queue at the time of the query No reply is transmitted if there are no error records available After completion of the reply transmission e The error queue is empty The queued error record count is zero Command none Query SYSTem ERRor ALL Reply all available error record s gt Error Clear Clears all error records in the error queue Command SYSTem ERRor CLEar Query none Measurement Mode Sets the meter measurement mode to select either power Watts or energy Joules measurement mode Command CONFigure MEASure DEFaultlJIW Default J Joules mode Query CONFigure MEASure TYPE Reply JIW Statistics Mode This command sets the statistics processing mode to either off or on Command CONFigure MEASure STATistics DEFaultlOFFION Default OFF Query CONFigure MEASure STATistics Reply OFFION Host Interface Variable Decimation Sets the pulse decimation rate which takes effect at the end of the current decimation cycle The decimation rate units are expressed pulses rounded to the nearest integer Pulse measurement data is selected for processing ranging from as frequent as 1 pulse processed per 1 measured to as infrequently as pulse processed per 9999
58. rgyMax RS sensors only Click Add a RS 232 Serial Port on the Setting dropdown menu EnergyMax RS sensors only On the Add Serial Sensor menu select the Com Port and Baud Rate parameters and then click the OK button Select the highest baud rate supported by the computer File Settings View Sek Resolution 1 Se Trigger 4 Log File Format Hohe Thar be quesed ai a Coherert sener and query 4 wil not be added to the fat To remove thir sensor bom the lat restart the EnesgiMas pogam Before you continue this procedure make sure the sensors are not stacked x Steps 5 through 9 verify that range and trigger threshold are independently working for each sensor before synchronizing Select the sensor serial number from the Select Sensor dropdown menu In the example at right the selected sensor is 0438 10 Press the Start Data Collection button and then turn ON the laser File Settings View File Settings View Help Operation 7 Select the applicable Measurement uessurement Ranae Range High or Low and adjust the Hisus v Trigger Level to get a good measure 28892 ment For information on setting the Pee Mode Sample Size C Time Interval trigger level refer to Internal Trig 100 6 Steaming gering Mode p 4 3 8 Turn OFF
59. rrent response and the output voltage response is fixed so the calibrated peak voltage of the output is the integrated energy of the laser pulse 253 6 203 _ 5 5 lt Q 4 153 VOltade 5 P x 9 103 53 T T T 2000 2400 2800 3200 3600 4000 Time us Figure 3 1 Pyroelectric Current and Voltage Response Dam age The following table lists the damage threshold for different types of Thresholds EnergyMax sensors at several wavelengths Table 3 3 EnergyMax Damage Thresholds Capabilities Sheet 1 of 2 S 70 170 140 250 EnergyMax USB RS User Manual Table 3 3 EnergyMax Damage Thresholds Capabilities Sheet 2 of 2 Damage Threshold mJ cm Wavelength nm 00 200 500 500 a Not applicable for Quantum EnergyMax sensors Measurement Linearity Energy Linearity Repetition Rate Linearity Average Power Linearity Coherent has designed the EnergyMax sensor line to greatly decrease several linearity effects common in pyroelectric energy sensors The outcome of this design effort is increased performance that is now better than at any time in the history of pyroelectric pulsed laser energy measurement Energy linearity across the entire specified energy range of an Ener gyMax sensor is 3 Within 10 to 90 of the energy range spec ification the sensors are typically linear to 2 The J 50M
60. s documentation Technical Support In the US Should you experience difficulties with your product or need technical information visit our website www Coherent com You can obtain additional support by either telephoning our Technical Support Hotline at 1 800 343 4912 or e mailing our Support Team at support instruments Coherent com Telephone coverage is available Monday through Friday except U S holidays If you call outside our office hours your call will be taken by our answering system and will be returned when the office reopens If there are technical difficulties with your product that cannot be resolved by support mechanisms outlined above e mail or telephone Coherent Technical Support with a description of the problem and the corrective steps attempted When communicating with our Technical Support Department via the web or telephone the model and serial number of the product will be required by the Support Engineer responding to your request Outside the US If you are located outside the U S visit our website for technical assistance or telephone our local Service Representative Representative phone numbers and addresses can be found on the Coherent website www Coherent com Coherent provides web and telephone technical assistance as a service to its customers and assumes no liability thereby for any injury or damage that may occur contemporaneous with such services These support services do not under any
61. s otherwise specified numeric data items are repre sented as Integer values Non scientific notation floating point values Scientific notation floating point values upper or lower case E For example the following data values are functionally equivalent 31256 s 31256 0 3 1256 4 31 256E3 3 1256 4 Unless otherwise specified non numeric data items typically referred to as strings are not quoted Enumerated values must exactly match using the long form short form comparison rules defined under the SCPI Standard The SCPI Standard specifies a standard set of common commands common commands and queries start with an asterisk Reset Command RST Resets all operational parameters to their power on states Reset does not affect calibration settings Command RST Query none System Options Host Interface Identification Query IDN Queries the meter identification string such as model name firm ware version and firmware date Query IDN Reply Coherent Inc EnergyMax type firmware date 5 version The dash sign separates all fields within the reply string The first field is always Coherent Inc The second field is the product name EnergyMax plus the type USB or RS The third field 18 version number having the format V lt major gt lt minor gt lt optional qualifier characters gt The fourth fi
62. se sensors feature a unique diffused metallic coating which offers significantly higher damage resistance than traditional metallic coatings and causes very little specular reflectance thus eliminating spurious beams that can re enter the laser cavity The 25 mm and 50 mm sensors accept a user installable optional heatsink refer to Increasing Average Power With Heatsinks p 3 1 which can extend the energy and or repetition rate range These heatsinks allow the J 25MT 10KHZ to be used up to 30W average power and J 50MT 10KHZ to be used up to 50W average power NOTICE Use of EnergyMax sensors at average power levels beyond the base model average power specification without the optional heatsink can cause permanent damage to the sensor Table 2 2 Diffuse Metallic EnergyMax Sensor Specifications J 50MT 10KHZ J 10MT 10KHZ Max Avg Power W i 500 at 1064 10 ns 50 1064 nm 10 ns Sensor Coating Diffuse Metallic Calibration Wavelength nm No Calibration Uncertainty 2 3 2 EMEN 3 1 USB RS cable Cable Type USB and RS Item Number USB 1191417 1191446 1191445 RS 1191433 2 Cable Length m E lt 2 a amp 513 m 5 tn S76 09 9 09 as 421 Ww lt B j 5 amp 5 lt gle 2 m 8 S z z e lz lt w S aj
63. sors 2 8 Product shipping instructions 7 6 Publication updates ix Pulse width Linearity 3 5 Specification 8 1 Pyroelectric Current and voltage response 3 3 Technology 3 2 Q Quantum EnergyMax sensors 2 8 R Ratiometric method of optical calibration 7 3 Re certify once a year 7 2 Repetition rate Linearity 3 4 Specification 8 1 Response spectral 3 5 Return material authorization number 7 6 RoHS compliance 1 1 RS sensors powering 4 2 5 Safety 1 1 Declaration of Conformity 1 2 Environmental regulations 1 1 Service obtaining 7 5 Shipping instructions product 7 6 Specifications Diffuse metallic EnergyMax sensor 2 5 MaxBlack EnergyMax sensor 2 4 MaxBlack EnergyMax sensor with diffuser 2 6 MaxUV EnergyMax sensor 2 7 Spectral Absorption of EnergyMax sensor coatings 3 7 Response 3 5 Sensitivity of EnergyMax sensors with diffusers 3 8 Status indicators LED 4 1 5 1 Symbols used in this document T Technical description 3 1 Damage thresholds 3 3 Increasing average power with heat sinks 3 1 Measurement linearity 3 4 Pyroelectric technology 3 2 Spectral response 3 5 Technology pyroelectric 3 2 U Unpacking and inspection ix Warranty Extended 7 4 Limitations 7 4 Limited 7 3 Waste Electrical and Electronic Equipment WEEE 2002 1 1 Wavelength Compensation 3 6 8 2 Compensation accuracy 3 6 Range 2 4 Wavelength setting 4 14 Index 2 EnergyMax USB RS User Manual Cohere
64. t exceeds the top range value Using the MAX and MIN parameters on the query result in obtaining either the maximum full scale reading or the minimum range full scale reading respectively Statistics Mode Control Host Interface Command CONFigure RANGe SELect lt maximum expected measurement gt IMA XimumlMINimum Default not applicable Query CONFigure RANGe SELect MAXimumlMINimum Reply lt granted full scale range gt Sets statistics calculation parameters to be used in the statistics oper ating mode Batch Size Sets the statistics batch size which takes effect at the end of the current statistical batch The batch size units are pulses rounded to the nearest integer Command CONFigure STATistics BSIZe DEFaultl2 1000000000 Default 100 Query CONFigure S TATistics BSIZe Reply 2 99999 Restart Mode Selects the action to be taken at the end of a statistical batch When statistics mode 1 on selecting AUTomatic will begin a new batch at the next measured pulse Selecting MANual requires the start command to begin a new batch when statistics mode is on refer to the CONFigure STATistics STARt command under Batch Initia tion and Termination below Command CONFigure S TATistics sRMOde DEFaultIMANuall AUTomatic Default MANual Query CONFigure STATistics RMOde Reply MANIAUT Batch Initiation and Termination Start a New Batch Terminates the current statistical batch and starts a
65. t dose gt data items are zero if any constituent pulse measurement in the batch is not measureable due to an error for example peak or baseline clipping The lt flags gt data item which communicates qualification informa tion is reported with each data message Qualification information which includes various error conditions is reported in a string containing one ASCII character for each qualification that is asserted If the qualification character is present the qualification is asserted If the qualification condition character is absent the quali fication is not asserted Each character present has a unique meaning as described in the following table Table 6 5 Flag Character Definitions Qualification Character Qualification Meaning No qualification exists EnergyMax USB RS User Manual Data Streaming Transmission Interface Gating Sensor Information The host has control over when measurement data is transmitted from the data streaming transmission interface Transmission is enabled after an INITiate command Transmission 1s disabled after an ABORt command While transmission 15 enabled measurement data records are transmitted immediately as they are generated Initiate Command Enables data streaming interface transmission This command 1 ignored if data streaming interface transmission is already enabled Command INITiate Query none Abort Command Disables data streaming interface transmission
66. the actual peak is determined algorithmically by sampling the input signal near the trigger From the trigger point forward the algorithm searches for peaks and from the trigger point back it searches for a baseline The wavelength should always be set for accurate power measure ments This can be done either in the EnergyMax PC application software or over the host port via a host command Tutorial Measuring Energy With a EnergyMax Sensor EnergyMax USB System Components Y Sensor cable USB cable connector Operation This tutorial describes how to connect a EnergyMax USB or Ener gyMax RS sensor to your PC and start taking energy measurements using the EnergyMax PC software WARNING Follow all laser safety procedures The laser must be switched OFF or shuttered before running the tutorial given in this section NOTICE For instructions on communicating with the sensor directly via host commands refer to Host Interface p 6 1 1 Install the EnergyMax PC software for details refer to the EnergyMax USB RS Software Installation and Quick Start Guide 1186241 that shipped with your system 2 Connect the system components the following figure shows system components for both EnergyMax USB Ener gyMax RS sensors select the one that s applicable for your system Q EnergyMax RS System Components Sensor cable 4 Meterless sensor power cable conn
67. the bottom Seal the shipping carton with shipping tape or an industrial stapler Ship the product to Coherent Inc 27650 SW 95th Ave Wilsonville OR 97070 Attn RMA add the RMA number you received from Coherent Customer Service Frequently Asked Questions APPENDIX A FREQUENTLY ASKED QUESTIONS This appendix gives answers to common questions about Coherent EnergyMax sensors What if I exceed the average power specification A Use of a sensor beyond its average power specification will result in increased error and can result in damage to the sensor if the temperature gets too hot Optional EnergyMax heatsinks are available to increase the average power specification of certain sensors for more information about heatsinks refer to Increasing Average Power With Heatsinks p 3 1 NOTICE Use of EnergyMax sensors at average power levels beyond the base model average power specification without the optional heatsink can cause permanent damage to the sensor What if I exceed the repetition rate specification A Use of EnergyMax sensors beyond the repetition rate spec ification will result in additional measurement error Increased repetition rate also increases the average power so do not apply more average power than can be handled by the sensor What if I exceed the maximum energy specification EnergyMax sensors have an active circuit that will saturate if the applied energy
68. the laser and confirm the sensor is not triggering on baseline noise If it is triggering on baseline noise increase the trigger level 9 Repeat steps 5 through 8 for the second sensor and then continue to step 10 below 10 Open the Select Sensor dropdown menu and select the faster sensor that 15 the sensor with the fastest higher repetition rate specification 11 Stack the sensors together with the faster sensor located on the bottom of the stack NOTICE The faster sensor must be on the bottom of the stack to prop erly trigger Since the faster sensor gets a trigger first it is important that this faster trigger be used to control the trigger bus Slower sensor on top Faster sensor on bottom 12 Select Dual Sensor Synchronization File Settings View from the Setting dropdown menu se Trager Calculated Rato Data Data Log Turbo Higher Data rate Add a RS 232 Senal Use Windows Locakzation lor Numenct 13 Select the Synchronized Trending tab EnergyMax USB RS User Manual 14 Click the Setup button Der J a Sree Ts This will display the Sync Configuration Setup menu The sensor selected in step 10 above which is the faster of the sensori sensors is automatically listed as Sensor a in this setup panel and will subsequently Synchronization be
69. the password command is received The Data Streaming Transmission Interface is an out of band inter face in which data messages are transmitted from the sensor to the host only Gating of the data streaming transmissions is controlled by the INITiate ABORt command described under Data Streaming Transmission Interface Gating p 6 16 Data streaming transmission messages are ASCII formatted but not strictly The high bit mask 0x80 which is always set for all bytes of all data streaming transmission messages including the termina tors allows host software to easily differentiate between data streaming transmission messages and SCPI reply messages The host may operate using the rule that if the high bit is set on any byte received from the sensor it is part of a data streaming transmission message Data streaming transmission messages are immediately sent to the host in ASCII text form as pulse measurements are generated Each message conforms to the last measurement data record format as described under Last Data Record Query p 6 14 but with the high bit set in all transmitted bytes Operational Parameters EnergyMax USB RS User Manual The following table shows all operational parameters after a reset cycle and the factory state Table 6 6 Operational Parameters Parameter Message handshaking Baud rate Error count Statistics mode Data item select statistics mode off Data item select statistics mo
70. tivity of sensors that have diffusers The spectral sensitivity is a function of the transmission of the optic and the absorption of the coating and is normalized to the calibration wavelength 0 9 Ic 0 8 0 7 0 6 0 5 0 4 0 3 0 2 0 1 0 1 1 10 20 Wavelength Figure 3 3 Spectral Absorption of EnergyMax Sensor Coatings EnergyMax USB RS User Manual 1 8 1 6 1 4 1 2 0 0 8 0 6 0 4 0 2 Sensitivity Normalized to Calibration Wavelength 0 1 1 Wavelength um The J 50MB IR is calibrated at both 1064 and 2940 Figure 3 4 Spectral Sensitivity of EnergyMax Sensors With Diffusers Operation OPERATION In this section LED status indicator this page Powering EnergyMax RS sensors p 4 2 Pyroelectric Watts mode p 4 2 Triggering p 4 3 Internal Triggering mode p 4 3 Setting the wavelength p 4 4 Tutorial Measuring energy With EnergyMax sensor 4 5 Tutorial Synchronization p 4 7 Tutorial Turbo mode p 4 12 Using the software p 4 14 LED Status A blue LED light is contained within the EnergyMax USB and EnergyMax RS connectors to provide health and status informa Indicator dur Table 4 1 EnergyMax USB R
71. ult POSitive Host Interface Query TRIGger SLOPe Reply POSINEG Delay Selects the external trigger delay time The internal trigger happens at the time marked by the external trigger delay time after the selected external trigger edge The trigger delay time units are microseconds Command TRIGger DELay DEFaultl0 1000 Default 0 Query TRIGger DELay Reply 0 1000 Set Sequence ID Sets the sequence ID which must be an integer value The sequence ID is used for data synchronization of multiple meters sharing the same trigger signal Command TRIGger SEQuence DEFaultl0 16777215 Default 0 Query none Trigger Bus Sets the trigger bus participation mode that is bussed or not bussed The query gets the trigger bus participation mode Command TRIGger BUS PMODe BUSINBUS Query TRIGger BUS PMODe Reply BUSINBUS This commend is used to designate if the device participates in the trigger bus The designated mode must match the physical trigger bus configuration Bus Control Position Gets the trigger bus control position that is master or slave Command None Query TRIGger BUS POSition Reply MASTISLAV Bus position is determined by the physical position of devices stacked in a trigger bus configuration which is one master and one or more slaves Unbussed devices will always return MAST EnergyMax USB RS User Manual Measurement Data Collection Measurement data can be collected in two wa
72. use the sensor at a wavelength different from the one it was calibrated at A Yes EnergyMax sensors have a wavelength compensation table in the circuitry inside the sensor Plug the sensor into your meter and go to the wavelength setup Enter the wavelength of your laser and the sensor will correct for any spectral and or transmission changes due to wavelength refer to Figure 3 3 p 3 7 for more information INDEX A Active area diameter 2 4 ANSI Z540 7 1 Average power Increasing with heatsinks 3 1 Linearity 3 4 Ratings 3 2 Specification 8 1 Cablelength 2 4 Cable length extending 5 2 Calibration Facilities and capabilities 7 1 Fundamentals 7 2 Uncertainty 2 4 Verification 7 3 Wavelength 2 4 Calibration and warranty 7 1 Coherent calibration facilities and capabilities 7 1 Extended warranty 7 4 Limited warranty 7 3 Obtaining service 7 5 Optical calibration method 7 2 Product shipping instructions 7 6 Warranty limitations 7 4 Coherent Calibration facilities and capabilities 7 1 Service centers 7 5 Compliance RoHS 1 1 D Damage Testslide x Thresholds 3 3 Declaration of Conformity 1 2 Description 2 1 Post and stand assembly x Unpacking and inspection ix Diffuse metallic EnergyMax sensors 2 5 E Energy Linearity 3 4 Range 2 4 EnergyMax NIST traceable optical calibration 7 2 EnergyMax sensors Diffuse metallic 2 5 MaxBlack 2 4 MaxBlack with diffusers 2 6 MaxUV 2 7 Quantum 2 8 Environmenta
73. ut is optically isolated from the the External EnergyMax internal ground by an optocoupler The following figure Trigger Circuit shows a simplified schematic of the external trigger input circuitry 3 3V SMB Receptacle Optoisolator 499 3010 To trigger 3 3V CMOS logic Q 12 5 Zs Figure 5 1 External Trigger Input Circuitry To provide proper functionality of the circuit the source of the external trigger pulse should meet the following requirements Logic Active high or low Select corresponding triggering edge using the TRIG SLOP POS or TRG SLOP NEG commands Level 5V TTL or CMOS logic Width gt 1 us Load current gt 12 5 mA EnergyMax USB RS User Manual Extendin g USB sensors The EnergyMax USB cable is 3 meters in length from the sensor to the electronics module and approximately 1 meter in Cable Leng th length from the electronics module to the USB or RS 232 connector 3 meters uncoiled length 1 meter uncoiled length Figure 5 2 EnergyMax USB Standard Cable USB hubs can be employed to increase the length of the cable The USB standard permits a maximum of five hubs connected in series with 5 meter cables connecting the hubs thus providing a maximum range of 27 5 meters There are also active 5 meter USB extension cables on the market that perform as if they were a USB hub but for just a single USB sensor Contact Coherent for advice related to specific hubs we have test
74. ys 1 Configuring the data item select and receiving measurement data records from the Data Streaming Transmission Interface 2 Querying the last data record generated Data Item Select Data items that appear in a measurement data record are selectable Selections differ based on measurement and statistics modes Statistics Mode Off Selects the statistics mode of transmit data items which takes effect immediately if statistics mode is off The data argument is a comma separated list of one or more tokens shown below At least one token must be specified The tokens may be specified in any order Command CONFigure ITEMselect 1 5 5 Query CONFigure ITEMselect Reply one or more of PULSIPERIFLAGISEQ Statistics Mode On Selects the statistics mode of transmit data items which takes effect at the end of the current statistical batch if statistics mode is on The data argument is a comma separated list of one or more tokens shown below At least one token must be specified The tokens may be specified in any order Command CONFigure STATistics ITEMselect MEAN MIN MAX STDV DOSE MISS SEQ Query CONFigure STATistics ITEMselect Reply one or more of MEAN MIN MAX STDV DOSE MISS SEQ Last Data Record Query Gets the last recorded measurement at the time of the query No reply is transmitted if no measurement has been recorded Command none Query READ Reply lt last measurement record gt

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